更改了接口文件和单项测试界面

HOZProject/FormUnitControl.cs

@@ -56,7 +56,7 @@ namespace HOZProject
         #region 设备关闭按键
         private void btnCloseCtrl_Click(object sender, EventArgs e)
         {
-            if (sem.UnInit())
+            if (sem.Dispose())
             {
                 btnInit.BackColor = Control.DefaultBackColor;
             }
@@ -187,7 +187,8 @@ namespace HOZProject
         #region 缩放Get
         private void btnenlargeGet_Click(object sender, EventArgs e)
         {
-            float ret = sem.GetMagnification();
+            float ret = sem.Magnification;
+            //float ret = sem.GetMagnification();
             if (float.IsNaN(ret))
             {
                 lblenlargeGet.Text = "NaN";
@@ -209,7 +210,8 @@ namespace HOZProject
             float set = 0;
             if (float.TryParse(txtenlargeSet.Text, out set))
             {
-                sem.SetMagnification(set);
+                sem.Magnification = set;
+                //sem.SetMagnification(set);
             }
 
         }
@@ -218,7 +220,7 @@ namespace HOZProject
         #region 焦距Get
         private void btnWDGet_Click(object sender, EventArgs e)
         {
-            float ret = sem.GetWorkingDistance();
+            float ret = sem.WorkingDistance;
             if (float.IsNaN(ret))
             {
                 lblWDGet.Text = "NaN";
@@ -240,7 +242,7 @@ namespace HOZProject
             float set = 0;
             if (float.TryParse(txtWDSet.Text, out set))
             {
-                sem.SetWorkingDistance(set);
+                sem.WorkingDistance = set;
             }
         }
         #endregion
@@ -436,6 +438,7 @@ namespace HOZProject
             float set = 0;
             if (float.TryParse(txtScanRotationSet.Text, out set))
             {
+                
                 sem.SetScanRotation(set);
             }
         }
@@ -636,5 +639,64 @@ namespace HOZProject
             }
         }
         #endregion
+
+        #region 获取光束BEAM坐标
+        private void btnBeamShiftXGet_Click(object sender, EventArgs e)
+        {
+            float ret = sem.GetBeamShiftX();
+            if (float.IsNaN(ret))
+            {
+                lblBeamShiftXGet.Text = "NaN";
+                txtBeamShiftXSet.Enabled = false;
+                btnBeamShiftXSet.Enabled = false;
+            }
+            else
+            {
+                lblBeamShiftXGet.Text = ret.ToString();
+                txtBeamShiftXSet.Text = ret.ToString();
+                btnBeamShiftXSet.Enabled = true;
+            }
+        }
+
+        private void btnBeamShiftXSet_Click(object sender, EventArgs e)
+        {
+            float set = 0;
+            if (float.TryParse(txtBeamShiftXSet.Text, out set))
+            {
+                sem.SetBeamShiftX(set);
+            }
+        }
+
+        private void btnBeamShiftYGet_Click(object sender, EventArgs e)
+        {
+            float ret = sem.GetBeamShiftY();
+            if (float.IsNaN(ret))
+            {
+                lblBeamShiftYGet.Text = "NaN";
+                txtBeamShiftYSet.Enabled = false;
+                btnBeamShiftYSet.Enabled = false;
+            }
+            else
+            {
+                lblBeamShiftYGet.Text = ret.ToString();
+                txtBeamShiftYSet.Text = ret.ToString();
+                btnBeamShiftYSet.Enabled = true;
+            }
+        }
+
+        private void btnBeamShiftYSet_Click(object sender, EventArgs e)
+        {
+            float set = 0;
+            if (float.TryParse(txtBeamShiftYSet.Text, out set))
+            {
+                sem.SetBeamShiftY(set);
+            }
+        }
+        #endregion
+
+        private void btnDoSemDriftCorrn_Click(object sender, EventArgs e)
+        {
+            //sem.CmdDoSemDriftCorrn();
+        }
     }
 }

SmartSEMControl/HardwareInterface.cs

@@ -6,10 +6,29 @@ using System.Threading.Tasks;
 
 namespace SmartSEMControl
 {
+    //SEM控制
     interface SEMControl
     {
-        //样品台的控制
-        
+
+        //缩放
+        float Magnification
+        {
+            get;set;
+        }
+
+        //焦距
+        float WorkingDistance
+        {
+            get;set;
+        }
+
+
+
+        //清除控件
+        Boolean Dispose();
+
+
+
     }
 
     interface FIBControl

SmartSEMControl/SmartSEM.cs

@@ -10,9 +10,9 @@ using System.Threading;
 
 namespace SmartSEMControl
 {
-    public class SmartSEM
+    public class SmartSEM : SEMControl
     {
-        #region 参数
+        #region 模拟参数
         //放大缩小
         private String AP_MAG = "AP_MAG";
         //焦距
@@ -27,6 +27,10 @@ namespace SmartSEMControl
         private String AP_STIG_Y = "AP_STIG_Y";
         //角度补偿
         private String AP_TILT_ANGLE = "AP_TILT_ANGLE";
+        //SEM移动X
+        private String AP_BEAMSHIFT_X = "AP_BEAMSHIFT_X";
+        //SEM移动Y
+        private String AP_BEAMSHIFT_Y = "AP_BEAMSHIFT_Y";
         //X轴移动到
         private String AP_STAGE_GOTO_X = "AP_STAGE_GOTO_X";
         //Y轴移动到
@@ -57,6 +61,13 @@ namespace SmartSEMControl
         private String AP_STAGE_AT_M = "AP_STAGE_AT_M";
         #endregion
 
+        #region 数字参数
+        //Scan Rotate开关
+        private String DP_SCAN_ROT = "DP_SCAN_ROT";
+        //取消电子束校正
+        private String DP_TILT_CORRECTION = "DP_TILT_CORRECTION";
+        #endregion
+
         #region 命令
         //开启电压
         private String CMD_BEAM_ON = "CMD_BEAM_ON";
@@ -70,6 +81,13 @@ namespace SmartSEMControl
         private long lrt = 0;
         #endregion
 
+        #region 构造函数
+        public SmartSEM()
+        {
+            Init();
+        }
+        #endregion
+
         #region 设备初始化
         /// <summary>
         /// 设备初始化
@@ -77,11 +95,11 @@ namespace SmartSEMControl
         /// <returns>return:true or false</returns>
         public Boolean Init()
         {
-#if ROMOTE
-            lrt = CZEMApi.InitialiseRemoting();
-#else
-            lrt = CZEMApi.Initialise("");
-#endif
+            #if ROMOTE
+                lrt = CZEMApi.InitialiseRemoting();
+            #else
+                lrt = CZEMApi.Initialise("");
+            #endif
             if (lrt != 0)
             {
                 m_bInitialised = false;
@@ -93,9 +111,9 @@ namespace SmartSEMControl
                 return true;
             }
         }
-#endregion
+        #endregion
 
-#region 设备远程初始化
+        #region 设备远程初始化
         /// <summary>
         /// 设备远程初始化
         /// </summary>
@@ -114,14 +132,14 @@ namespace SmartSEMControl
                 return true;
             }
         }
-#endregion
+        #endregion
 
-#region 关闭设备
+        #region 关闭设备
         /// <summary>
         /// 关闭设备
         /// </summary>
         /// <returns>true or false</returns>
-        public Boolean UnInit()
+        public Boolean Dispose()
         {
             if (m_bInitialised)
             {
@@ -141,9 +159,9 @@ namespace SmartSEMControl
                 return false;
             }
         }
-#endregion
+        #endregion
 
-#region 读参数函数
+        #region 读参数函数
         private Boolean ReadParams(String str_param, ref float value)
         {
             if (m_bInitialised)
@@ -165,9 +183,9 @@ namespace SmartSEMControl
                 return false;
             }
         }
-#endregion
+        #endregion
 
-#region 写参数函数
+        #region 写模拟参数函数
         private Boolean WriteParams(String str_param, float value)
         {
             if (m_bInitialised)
@@ -211,9 +229,29 @@ namespace SmartSEMControl
                 return false;
             }
         }
-#endregion
+        #endregion
 
-#region 执行命令
+        #region 写数字参数函数
+        private Boolean WriteDataParams(String str_param, float value)
+        {
+            if (m_bInitialised)
+            {
+                object varFloat = new VariantWrapper(value);
+                lrt = CZEMApi.Set(str_param, ref varFloat);// set value
+                if (lrt != 0)
+                {
+                    return false;
+                }
+                return true;
+            }
+            else
+            {
+                return false;
+            }
+        }
+        #endregion
+
+        #region 执行命令
         private Boolean ExecuteCmd(String cmd)
         {
             if (m_bInitialised)
@@ -233,67 +271,53 @@ namespace SmartSEMControl
                 return false;
             }
         }
-#endregion
+        #endregion
 
-#region 放大缩小
-        /// <summary>
-        /// 读取缩放倍数
-        /// </summary>
-        /// <returns>true:float or false:NaN</returns>
-        public float GetMagnification()
+        #region 缩放
+        public float Magnification
         {
-            float ret = 0;
-            if (ReadParams(AP_MAG, ref ret))
+            get
             {
-                return ret;
+                float ret = 0;
+                if (ReadParams(AP_MAG, ref ret))
+                {
+                    return ret;
+                }
+                else
+                {
+                    return float.NaN;
+                }
             }
-            else
+            set
             {
-                return float.NaN;
+                WriteParams(AP_MAG, value);
             }
         }
+        #endregion
 
-        /// <summary>
-        /// 设置缩放倍数
-        /// </summary>
-        /// <param name="set">倍数</param>
-        /// <returns>true or false</returns>
-        public Boolean SetMagnification(float set)
-        {
-            return WriteParams(AP_MAG, set);
-        }
-#endregion
-
-#region 焦距
-        /// <summary>
-        /// 读取工作距离
-        /// </summary>
-        /// <returns>true:float or false:NaN</returns>
-        public float GetWorkingDistance()
+        #region 焦距
+        public float WorkingDistance
         {
-            float ret = 0;
-            if (ReadParams(AP_WD, ref ret))
+            get
             {
-                return ret;
+                float ret = 0;
+                if (ReadParams(AP_WD, ref ret))
+                {
+                    return ret;
+                }
+                else
+                {
+                    return float.NaN;
+                }
             }
-            else
+            set
             {
-                return float.NaN;
+                WriteParams(AP_WD, value);
             }
         }
+        #endregion      
 
-        /// <summary>
-        /// 设置焦距
-        /// </summary>
-        /// <param name="set">焦距</param>
-        /// <returns>true or false</returns>
-        public Boolean SetWorkingDistance(float set)
-        {
-            return WriteParams(AP_WD, set);
-        }
-#endregion
-
-#region 亮度
+        #region 亮度
         /// <summary>
         /// 读取亮度
         /// </summary>
@@ -320,9 +344,9 @@ namespace SmartSEMControl
         {
             return WriteParams(AP_BRIGHTNESS, set);
         }
-#endregion
+        #endregion
 
-#region 对比度
+        #region 对比度
         /// <summary>
         /// 读取对比度
         /// </summary>
@@ -349,9 +373,9 @@ namespace SmartSEMControl
         {
             return WriteParams(AP_CONTRAST, set);
         }
-#endregion
+        #endregion
 
-#region 消像散
+        #region 消像散
         /// <summary>
         /// 读取消像散X
         /// </summary>
@@ -405,9 +429,9 @@ namespace SmartSEMControl
         {
             return WriteParams(AP_STIG_Y, set);
         }
-#endregion
+        #endregion
 
-#region 角度补偿
+        #region 角度补偿
         /// <summary>
         /// 读取角度补偿
         /// </summary>
@@ -434,9 +458,9 @@ namespace SmartSEMControl
         {
             return WriteParams(AP_TILT_ANGLE, set);
         }
-#endregion
+        #endregion
 
-#region 抓取图像
+        #region 抓取图像
         /// <summary>
         /// 抓取图像
         /// </summary>
@@ -460,9 +484,65 @@ namespace SmartSEMControl
                 return false;
             }
         }
-#endregion
+        #endregion
+
+        #region SEM移动接口
+        /// <summary>
+        /// 获取SEM移动接口X
+        /// </summary>
+        /// <returns>true:float or false:NaN</returns>
+        public float GetBeamShiftX()
+        {
+            float ret = 0;
+            if (ReadParams(AP_BEAMSHIFT_X, ref ret))
+            {
+                return ret;
+            }
+            else
+            {
+                return float.NaN;
+            }
+        }
+
+        /// <summary>
+        /// 获取SEM移动接口Y
+        /// </summary>
+        /// <returns>true:float or false:NaN</returns>
+        public float GetBeamShiftY()
+        {
+            float ret = 0;
+            if (ReadParams(AP_BEAMSHIFT_Y, ref ret))
+            {
+                return ret;
+            }
+            else
+            {
+                return float.NaN;
+            }
+        }
+
+        /// <summary>
+        /// 设置SEM移动接口X
+        /// </summary>
+        /// <param name="set">X坐标</param>
+        /// <returns>true or false</returns>
+        public Boolean SetBeamShiftX(float set)
+        {
+            return WriteParams(AP_BEAMSHIFT_X, set);
+        }
 
-#region SEM移动接口
+        /// <summary>
+        /// 设置SEM移动接口Y
+        /// </summary>
+        /// <param name="set">X坐标</param>
+        /// <returns>true or false</returns>
+        public Boolean SetBeamShiftY(float set)
+        {
+            return WriteParams(AP_BEAMSHIFT_Y, set);
+        }
+        #endregion
+
+        #region 样品台移动接口
         /// <summary>
         /// 返回样品台坐标数组
         /// </summary>
@@ -499,7 +579,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 X轴
+        /// 样品台位置 X轴
         /// </summary>
         /// <returns>true:float or false:NaN</returns>
         public float GetStageAtX()
@@ -516,7 +596,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 Y轴
+        /// 样品台位置 Y轴
         /// </summary>
         /// <returns>true:float or false:NaN</returns>
         public float GetStageAtY()
@@ -533,7 +613,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 Z轴
+        /// 样品台位置 Z轴
         /// </summary>
         /// <returns>true:float or false:NaN</returns>
         public float GetStageAtZ()
@@ -550,7 +630,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 T轴
+        /// 样品台位置 T轴
         /// </summary>
         /// <returns>true:float or false:NaN</returns>
         public float GetStageAtT()
@@ -567,7 +647,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 R轴
+        /// 样品台位置 R轴
         /// </summary>
         /// <returns>true:float or false:NaN</returns>
         public float GetStageAtR()
@@ -584,7 +664,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 M轴
+        /// 样品台位置 M轴
         /// </summary>
         /// <returns>true:float or false:NaN</returns>
         public float GetStageAtM()
@@ -601,7 +681,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 X轴
+        /// 样品台位置 X轴
         /// </summary>
         /// <param name="set">X轴移动坐标</param>
         /// <returns></returns>
@@ -611,7 +691,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 Y轴
+        /// 样品台位置 Y轴
         /// </summary>
         /// <param name="set">Y轴移动坐标</param>
         /// <returns></returns>
@@ -621,7 +701,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 Z轴
+        /// 样品台位置 Z轴
         /// </summary>
         /// <param name="set">Y轴移动坐标</param>
         /// <returns></returns>
@@ -631,7 +711,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 T轴
+        /// 样品台位置 T轴
         /// </summary>
         /// <param name="set">Y轴移动坐标</param>
         /// <returns></returns>
@@ -641,7 +721,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 R轴
+        /// 样品台位置 R轴
         /// </summary>
         /// <param name="set">Y轴移动坐标</param>
         /// <returns></returns>
@@ -651,7 +731,7 @@ namespace SmartSEMControl
         }
 
         /// <summary>
-        /// SEM位置 M轴
+        /// 样品台位置 M轴
         /// </summary>
         /// <param name="set">M轴移动坐标</param>
         /// <returns></returns>
@@ -659,9 +739,9 @@ namespace SmartSEMControl
         {
             return WriteParams(AP_STAGE_GOTO_M, set);
         }
-#endregion
+        #endregion
 
-#region Scan Rotate角度接口
+        #region Scan Rotate角度接口
         /// <summary>
         /// 获取Scan Rotate角度接口
         /// </summary>
@@ -686,11 +766,13 @@ namespace SmartSEMControl
         /// <returns>true or false</returns>
         public Boolean SetScanRotation(float set)
         {
+            WriteDataParams(DP_SCAN_ROT, 1);
             return WriteParams(AP_SCANROTATION, set);
+            WriteDataParams(DP_SCAN_ROT, 0);
         }
-#endregion
+        #endregion
 
-#region 像素读取PixelSize
+        #region 像素读取PixelSize
         /// <summary>
         /// 获取Pixel Size 接口,只读
         /// </summary>
@@ -707,20 +789,50 @@ namespace SmartSEMControl
                 return float.NaN;
             }
         }
-#endregion
+        #endregion
+
+        #region 电子束校正设置
+        /// <summary>
+        /// 读取电子束校正状态
+        /// </summary>
+        /// <returns></returns>
+        public float GetTiltCorrection()
+        {
+            float ret = 0;
+            if (ReadParams(DP_TILT_CORRECTION, ref ret))
+            {
+                return ret;
+            }
+            else
+            {
+                return float.NaN;
+            }
+        }
 
-#region 开启电压
+        /// <summary>
+        /// 设置电子束校正状态
+        /// </summary>
+        /// <param name="set"></param>
+        /// <returns></returns>
+        public Boolean SetTiltCorrection(float set)
+        {
+            return WriteDataParams(DP_TILT_CORRECTION, set);
+        }
+        #endregion
+
+        #region 开启电压
         public Boolean CmdOpenVoltage()
         {
             return ExecuteCmd(CMD_BEAM_ON);
         }
-#endregion
+        #endregion
 
-#region 关闭电压
+        #region 关闭电压
         public Boolean CmdCloseVoltage()
         {
             return ExecuteCmd(CMD_EHT_OFF);
         }
-#endregion
+        #endregion
+
     }
 }