//时间:20200610
//作者:王琦
//功能:SmartSEM remote API控制
using System;
using System.Collections.Generic;
using System.Linq;
using System.Runtime.InteropServices;
using System.Text;
using System.Threading.Tasks;
using APILib;
using System.Threading;
namespace SmartSEMControl
{
//可能遇到的错误提示部分??在log加入之后添加
class SmartSEM : ISEMControl
{
#region 模拟参数
//放大缩小
private String AP_MAG = "AP_MAG";
//焦距
private String AP_WD = "AP_WD";
//亮度
private String AP_BRIGHTNESS = "AP_BRIGHTNESS";
//对比度
private String AP_CONTRAST = "AP_CONTRAST";
//亮度目标
private String AP_AUTO_BRIGHT = "AP_AUTO_BRIGHT";
//对比度目标
private String AP_AUTO_CONTRAST = "AP_AUTO_CONTRAST";
//消像散X轴
private String AP_STIG_X = "AP_STIG_X";
//消像散Y轴
private String AP_STIG_Y = "AP_STIG_Y";
//角度补偿
private String AP_TILT_ANGLE = "AP_TILT_ANGLE";
//SEM移动X
private String AP_BEAMSHIFT_X = "AP_BEAMSHIFT_X";
//SEM移动Y
private String AP_BEAMSHIFT_Y = "AP_BEAMSHIFT_Y";
//X轴移动到
private String AP_STAGE_GOTO_X = "AP_STAGE_GOTO_X";
//Y轴移动到
private String AP_STAGE_GOTO_Y = "AP_STAGE_GOTO_Y";
//Z轴移动到
private String AP_STAGE_GOTO_Z = "AP_STAGE_GOTO_Z";
//T轴移动到
private String AP_STAGE_GOTO_T = "AP_STAGE_GOTO_T";
//R轴移动到
private String AP_STAGE_GOTO_R = "AP_STAGE_GOTO_R";
//M轴移动到
private String AP_STAGE_GOTO_M = "AP_STAGE_GOTO_M";
//Scan Rotate角度
private String AP_SCANROTATION = "AP_SCANROTATION";
//像素大小
private String AP_PIXEL_SIZE = "AP_PIXEL_SIZE";
//X轴坐标
private String AP_STAGE_AT_X = "AP_STAGE_AT_X";
//Y轴坐标
private String AP_STAGE_AT_Y = "AP_STAGE_AT_Y";
//Z轴坐标
private String AP_STAGE_AT_Z = "AP_STAGE_AT_Z";
//T轴坐标
private String AP_STAGE_AT_T = "AP_STAGE_AT_T";
//R轴坐标
private String AP_STAGE_AT_R = "AP_STAGE_AT_R";
//M轴坐标
private String AP_STAGE_AT_M = "AP_STAGE_AT_M";
#endregion
#region 数字参数
//Scan Rotate开关
private String DP_SCAN_ROT = "DP_SCAN_ROT";
//取消电子束校正
private String DP_TILT_CORRECTION = "DP_TILT_CORRECTION";
//自动亮度对比度
private String DP_AUTO_VIDEO = "DP_AUTO_VIDEO";
//图像解冻
private String DP_FROZEN = "DP_FROZEN";
//图像类型切换
private String DP_DETECTOR_TYPE = "DP_DETECTOR_TYPE";
//图像大小
private String DP_IMAGE_STORE = "DP_IMAGE_STORE";
//样品台状态
private String DP_STAGE_IS = "DP_STAGE_IS";
//自动函数状态
private String DP_AUTO_FUNCTION = "DP_AUTO_FUNCTION";
#endregion
#region 命令
//开启电压
private String CMD_BEAM_ON = "CMD_BEAM_ON";
//关闭电压
private String CMD_EHT_OFF = "CMD_EHT_OFF";
//自动对焦1
private String CMD_AUTO_FOCUS_COARSE = "CMD_AUTO_FOCUS_COARSE";
//自动对焦2
private String CMD_AUTO_FOCUS_FINE = "CMD_AUTO_FOCUS_FINE";
//自动消像散
private String CMD_AUTO_STIG = "CMD_AUTO_STIG";
#endregion
#region 宏文件命令
private String MCF_FILENAME = "MCF_";
#endregion
#region APILib
private Api CZEMApi = new Api();
private Boolean m_bInitialised = false;
#endregion
#region 构造函数
public SmartSEM()
{
Init();
}
#endregion
#region 设备初始化
///
/// 设备初始化
///
/// return:true or false
public Boolean Init()
{
long lrt = 0;
#if ROMOTE
lrt = CZEMApi.InitialiseRemoting();
#else
lrt = CZEMApi.Initialise("");
#endif
if (lrt != 0)
{
m_bInitialised = false;
return false;
}
else
{
m_bInitialised = true;
return true;
}
}
#endregion
#region 设备远程初始化
///
/// 设备远程初始化
///
/// return:true or false
public Boolean InitRemoting()
{
long lrt = CZEMApi.InitialiseRemoting();
if (lrt != 0)
{
m_bInitialised = false;
return false;
}
else
{
m_bInitialised = true;
return true;
}
}
#endregion
#region 连接状态
public Boolean ConnectStatus()
{
return m_bInitialised;
}
#endregion
#region 关闭设备
///
/// 关闭设备
///
/// true or false
public Boolean Dispose()
{
if (m_bInitialised)
{
long lrt = CZEMApi.ClosingControl();
if (lrt != 0)
{
return false;
}
else
{
m_bInitialised = false;
return true;
}
}
else
{
return false;
}
}
#endregion
#region 读参数函数
private Boolean ReadParams(String str_param, ref float value)
{
if (m_bInitialised)
{
object varfloat = new VariantWrapper((float)0.0f);
long lrt = CZEMApi.Get(str_param, ref varfloat);
if (lrt != 0)
{
return false;
}
else
{
value = Convert.ToSingle(varfloat);
return true;
}
}
else
{
return false;
}
}
#endregion
#region 写模拟参数函数
private Boolean WriteParams(String str_param, float value)
{
if (m_bInitialised)
{
//先取范围
object varMin = new VariantWrapper((float)0.0f);
object varMax = new VariantWrapper((float)0.0f);
long lrt = CZEMApi.GetLimits(str_param, ref varMin, ref varMax);
if (lrt != 0)
{
return false;
}
if (value <= Convert.ToSingle(varMax) && value >= Convert.ToSingle(varMin))
{
object varFloat = new VariantWrapper(value);
lrt = CZEMApi.Set(str_param, ref varFloat);// set value
if (lrt != 0)
{
return false;
}
return true;
}
else
{
return false;
}
}
else
{
return false;
}
}
#endregion
#region 写数字参数函数
private Boolean WriteDataParams(String str_param, float value)
{
if (m_bInitialised)
{
object varFloat = new VariantWrapper(value);
long lrt = CZEMApi.Set(str_param, ref varFloat);// set value
if (lrt != 0)
{
return false;
}
return true;
}
else
{
return false;
}
}
#endregion
#region 执行命令
private Boolean ExecuteCmd(String cmd)
{
if (m_bInitialised)
{
long lrt = CZEMApi.Execute(cmd);// execute command
if (lrt != 0)
{
return false;
}
else
{
return true;
}
}
else
{
return false;
}
}
#endregion
#region 放大缩小
///
/// 读取缩放倍数
///
/// true:float or false:NaN
public float GetMagnification()
{
float ret = 0;
if(ReadParams(AP_MAG, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置缩放倍数
///
/// 倍数
/// true or false
public Boolean SetMagnification(float set)
{
return WriteParams(AP_MAG, set);
}
#endregion
#region 焦距
///
/// 读取工作距离
///
/// true:float or false:NaN
public float GetWorkingDistance()
{
float ret = 0;
if (ReadParams(AP_WD, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置焦距
///
/// 焦距
/// true or false
public Boolean SetWorkingDistance(float set)
{
return WriteParams(AP_WD, set);
}
#endregion
#region 亮度
///
/// 读取亮度
///
/// true:float or false:NaN
public float GetBrightness()
{
float ret = 0;
if (ReadParams(AP_BRIGHTNESS, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置亮度
///
/// 亮度
/// true or false
public Boolean SetBrightness(float set)
{
return WriteParams(AP_BRIGHTNESS, set);
}
#endregion
#region 对比度
///
/// 读取对比度
///
/// true:float or false:NaN
public float GetContrast()
{
float ret = 0;
if (ReadParams(AP_CONTRAST, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置对比度
///
/// 对比度
/// true or false
public Boolean SetContrast(float set)
{
return WriteParams(AP_CONTRAST, set);
}
#endregion
#region 自动亮度对比度
///
/// 读取自动亮度对比度状态
///
/// true:float or false:NaN
public float GetAutoVideo()
{
float ret = 0;
if (ReadParams(DP_AUTO_VIDEO, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置自动亮度对比度状态
///
/// 0:off;1:B(亮度);2:C(对比度);3:BC
/// true or false
public Boolean SetAutoVideoOff()
{
return WriteDataParams(DP_AUTO_VIDEO, (float)0);
}
public Boolean SetAutoVideoBrightness()
{
return WriteDataParams(DP_AUTO_VIDEO, (float)1);
}
public Boolean SetAutoVideoContrast()
{
return WriteDataParams(DP_AUTO_VIDEO, (float)2);
}
public Boolean SetAutoVideoBrightnessAndContrast()
{
return WriteDataParams(DP_AUTO_VIDEO, (float)3);
}
#endregion
#region 亮度目标
///
/// 读取亮度目标
///
/// true:float or false:NaN
public float GetAutoBright()
{
float ret = 0;
if (ReadParams(AP_AUTO_BRIGHT, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置亮度目标
///
/// 亮度
/// true or false
public Boolean SetAutoBright(float set)
{
return WriteParams(AP_AUTO_BRIGHT, set);
}
#endregion
#region 对比度目标
///
/// 读取对比度目标
///
/// true:float or false:NaN
public float GetAutoContrast()
{
float ret = 0;
if (ReadParams(AP_AUTO_CONTRAST, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置对比度目标
///
/// 对比度目标
/// true or false
public Boolean SetAutoContrast(float set)
{
return WriteParams(AP_AUTO_CONTRAST, set);
}
#endregion
#region 消像散
///
/// 读取消像散X
///
/// true:float or false:NaN
public float GetAstigmatismX()
{
float ret = 0;
if (ReadParams(AP_STIG_X, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 读取消像散Y
///
/// true:float or false:NaN
public float GetAstigmatismY()
{
float ret = 0;
if (ReadParams(AP_STIG_Y, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置消像散X
///
/// 对比度
/// true or false
public Boolean SetAstigmatismX(float set)
{
return WriteParams(AP_STIG_X, set);
}
///
/// 设置消像散Y
///
/// 对比度
/// true or false
public Boolean SetAstigmatismY(float set)
{
return WriteParams(AP_STIG_Y, set);
}
#endregion
#region 角度补偿
///
/// 读取角度补偿
///
/// true:float or false:NaN
public float GetTiltAngle()
{
float ret = 0;
if (ReadParams(AP_TILT_ANGLE, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置角度补偿
///
/// 角度补偿
/// true or false
public Boolean SetTiltAngle(float set)
{
Boolean ret = false;
ret = WriteDataParams(DP_TILT_CORRECTION, 1);
ret = WriteParams(AP_TILT_ANGLE, set);
ret = WriteDataParams(DP_TILT_CORRECTION, 0);
return ret;
}
#endregion
#region 图像大小
public int[] GetImageStore()
{
int[] i_ret = new int[2];
float ret = 0;
if (ReadParams(DP_IMAGE_STORE, ref ret))
{
switch(ret)
{
case 0:
i_ret[0] = 1024;
i_ret[1] = 768;
break;
case 1:
i_ret[0] = 512;
i_ret[1] = 384;
break;
case 2:
i_ret[0] = 2048;
i_ret[1] = 1536;
break;
case 3:
i_ret[0] = 3072;
i_ret[1] = 2304;
break;
case 4:
i_ret[0] = 4096;
i_ret[1] = 3072;
break;
case 5:
i_ret[0] = 5120;
i_ret[1] = 3840;
break;
case 6:
i_ret[0] = 6144;
i_ret[1] = 4608;
break;
case 7:
i_ret[0] = 8192;
i_ret[1] = 6144;
break;
case 8:
i_ret[0] = 12288;
i_ret[1] = 9216;
break;
case 9:
i_ret[0] = 16384;
i_ret[1] = 12288;
break;
case 10:
i_ret[0] = 24576;
i_ret[1] = 18432;
break;
case 11:
i_ret[0] = 32768;
i_ret[1] = 24576;
break;
default:
i_ret[0] = 0;
i_ret[1] = 0;
break;
}
}
else
{
i_ret[0] = 0;
i_ret[1] = 0;
}
return i_ret;
}
public Boolean SetImageStore(float set)
{
return WriteDataParams("DP_IMAGE_STORE", set);
}
#endregion
#region 抓取图像
///
/// 抓取图像
///
/// true:float or false:NaN
public Boolean GrabImage(String filename, short xoff,short yoff, short width,short height,short type)
{
if (m_bInitialised)
{
long lrt = CZEMApi.Grab(xoff, yoff, width, height, type, filename);
if (lrt != 0)
{
return false;
}
else
{
ImageFrozen();
return true;
}
}
else
{
return false;
}
}
#endregion
#region 图像解冻
public Boolean ImageFrozen()
{
return WriteDataParams(DP_FROZEN, (float)1);
}
public Boolean ImageLive()
{
return WriteDataParams(DP_FROZEN, (float)0);
}
#endregion
#region 图像类型切换
public Boolean DetectorType(float set)
{
return WriteDataParams(DP_DETECTOR_TYPE, set);
}
#endregion
#region 电子束移动接口
///
/// 获取电子束移动接口X
///
/// true:float or false:NaN
public float GetBeamShiftX()
{
float ret = 0;
if (ReadParams(AP_BEAMSHIFT_X, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 获取电子束移动接口Y
///
/// true:float or false:NaN
public float GetBeamShiftY()
{
float ret = 0;
if (ReadParams(AP_BEAMSHIFT_Y, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置电子束移动接口X
///
/// X坐标
/// true or false
public Boolean SetBeamShiftX(float set)
{
return WriteParams(AP_BEAMSHIFT_X, set);
}
///
/// 设置电子束移动接口Y
///
/// X坐标
/// true or false
public Boolean SetBeamShiftY(float set)
{
return WriteParams(AP_BEAMSHIFT_Y, set);
}
#endregion
#region 样品台移动接口
///
/// 返回样品台坐标数组
///
/// Lenght=6
public float[] GetStagePosition()
{
object retx = new VariantWrapper((float)0.0f);
object rety = new VariantWrapper((float)0.0f);
object retz = new VariantWrapper((float)0.0f);
object rett = new VariantWrapper((float)0.0f);
object retr = new VariantWrapper((float)0.0f);
object retm = new VariantWrapper((float)0.0f);
float[] ret = new float[6];
if (m_bInitialised)
{
CZEMApi.GetStagePosition(ref retx, ref rety, ref retz, ref rett, ref retr, ref retm);
ret[0] = Convert.ToSingle(retx);
ret[1] = Convert.ToSingle(rety);
ret[2] = Convert.ToSingle(retz);
ret[3] = Convert.ToSingle(rett);
ret[4] = Convert.ToSingle(retr);
ret[5] = Convert.ToSingle(retm);
}
else
{
ret[0] = float.NaN;
ret[1] = float.NaN;
ret[2] = float.NaN;
ret[3] = float.NaN;
ret[4] = float.NaN;
ret[5] = float.NaN;
}
return ret;
}
///
/// 样品台位置 X轴
///
/// true:float or false:NaN
public float GetStageAtX()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_X, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 样品台位置 Y轴
///
/// true:float or false:NaN
public float GetStageAtY()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_Y, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 样品台位置 Z轴
///
/// true:float or false:NaN
public float GetStageAtZ()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_Z, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 样品台位置 T轴
///
/// true:float or false:NaN
public float GetStageAtT()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_T, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 样品台位置 R轴
///
/// true:float or false:NaN
public float GetStageAtR()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_R, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 样品台位置 M轴
///
/// true:float or false:NaN
public float GetStageAtM()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_M, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 样品台位置 X轴
///
/// X轴移动坐标
///
public Boolean SetStageGotoX(float set)
{
return WriteParams(AP_STAGE_GOTO_X, set);
}
///
/// 样品台位置 Y轴
///
/// Y轴移动坐标
///
public Boolean SetStageGotoY(float set)
{
return WriteParams(AP_STAGE_GOTO_Y, set);
}
///
/// 样品台位置 Z轴
///
/// Y轴移动坐标
///
public Boolean SetStageGotoZ(float set)
{
return WriteParams(AP_STAGE_GOTO_Z, set);
}
///
/// 样品台位置 T轴
///
/// Y轴移动坐标
///
public Boolean SetStageGotoT(float set)
{
return WriteParams(AP_STAGE_GOTO_T, set);
}
///
/// 样品台位置 R轴
///
/// Y轴移动坐标
///
public Boolean SetStageGotoR(float set)
{
return WriteParams(AP_STAGE_GOTO_R, set);
}
///
/// 样品台位置 M轴
///
/// M轴移动坐标
///
public Boolean SetStageGotoM(float set)
{
return WriteParams(AP_STAGE_GOTO_M, set);
}
#endregion
#region 移动样品台XY轴
public Boolean MoveStageXY(float x,float y)
{
Boolean ret = false;
ret = SetStageGotoX(x);
ret = SetStageGotoY(y);
return ret;
}
#endregion
#region Scan Rotate角度接口
///
/// 获取Scan Rotate角度接口
///
/// true:float or false:NaN
public float GetScanRotation()
{
float ret = 0;
if (ReadParams(AP_SCANROTATION, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置Scan Rotate角度接口
///
/// 角度补偿
/// true or false
public Boolean SetScanRotation(float set)
{
Boolean ret = false;
ret = WriteDataParams(DP_SCAN_ROT, 1);
ret = WriteParams(AP_SCANROTATION, set);
ret = WriteDataParams(DP_SCAN_ROT, 0);
return ret;
}
#endregion
#region 像素读取PixelSize
///
/// 获取Pixel Size 接口,只读
///
/// true:float or false:NaN
public float GetPixelSize()
{
float ret = 0;
if (ReadParams(AP_PIXEL_SIZE, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
#endregion
#region 电子束校正设置
///
/// 读取电子束校正状态
///
///
public float GetTiltCorrection()
{
float ret = 0;
if (ReadParams(DP_TILT_CORRECTION, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
///
/// 设置电子束校正状态
///
///
///
public Boolean SetTiltCorrectionOff()
{
return WriteDataParams(DP_TILT_CORRECTION, (float)0);
}
public Boolean SetTiltCorrectionOn()
{
return WriteDataParams(DP_TILT_CORRECTION, (float)1);
}
#endregion
#region 开启电压
public Boolean CmdOpenVoltage()
{
return ExecuteCmd(CMD_BEAM_ON);
}
#endregion
#region 关闭电压
public Boolean CmdCloseVoltage()
{
return ExecuteCmd(CMD_EHT_OFF);
}
#endregion
#region 自动对焦1
public Boolean CmdAutoFocusCoarse()
{
return ExecuteCmd(CMD_AUTO_FOCUS_COARSE);
}
#endregion
#region 自动对焦2
public Boolean CmdAutoFocusFine()
{
return ExecuteCmd(CMD_AUTO_FOCUS_FINE);
}
#endregion
#region 自动消像散
public Boolean CmdAutoStig()
{
return ExecuteCmd(CMD_AUTO_STIG);
}
#endregion
#region 调用宏文件命令
public Boolean CMDMCFFilename(String filename)
{
String CMDMCF = MCF_FILENAME + filename;
return ExecuteCmd(CMDMCF);
}
#endregion
#region 读取样品台状态
public float GetStageIs()
{
float ret = 0;
if (ReadParams(DP_STAGE_IS, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
#endregion
#region 读取自动函数的状态
public float GetAutoFunction()
{
float ret = 0;
if (ReadParams(DP_AUTO_FUNCTION, ref ret))
{
return ret;
}
else
{
return float.NaN;
}
}
#endregion
public void InsertPT()
{
}
//PT针退出
public void OutputPT()
{
}
}
}