//时间：20200610 //作者：郝爽 //功能：测量线程 using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using System.Windows.Forms; using System.Threading; using System.IO; using System.Drawing; using System.Xml; using SmartSEMControl; using MeasureData; using FileManager; using WebManager; using OpenCvSharp; using DBManager; using Extender; using CookComputing.XmlRpc; namespace MeasureThread { #region 信息定义 public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托 public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e); //测量线程状态 public class ThreadStatusEventArgs { //状态 public Boolean State { get { return m_state; } set { m_state = value; } } private Boolean m_state; //时间 public DateTime Time { get { return m_time; } set { m_time = value; } } private DateTime m_time; //步骤代码 public String Step_Code { get { return step_Code; } set { step_Code = value; } } private String step_Code; //其他消息 public String Message { get { return this.message; } set { this.message = value; } } private String message; //孔名 public String HoleName { get { return this.holeName; } set { this.holeName = value; } } private String holeName; //图片信息 public class PictureInformation { public String Picture_FullPath { get { return picture_FullPath; } set { picture_FullPath = value; } } private String picture_FullPath; public double Work_Voltage { get { return work_Voltage; } set { work_Voltage = value; } } private double work_Voltage; public double Magnification { get { return magnification; } set { magnification = value; } } private double magnification; public double Work_Distance { get { return work_Distance; } set { work_Distance = value; } } private double work_Distance; public String Work_Status { get { return work_Status; } set { work_Status = value; } } private String work_Status; } //图片信息实例类 public PictureInformation Picture_Information { get { return picture_Information; } set { picture_Information = value; } } private PictureInformation picture_Information; //图像处理信息 public class ImageInformation { public int Method_Name { get { return method_Name; } set { method_Name = value; } } private int method_Name; public Source_Img_Degree_Direction SIDD; public Cut_Position CP; public Cut_Success CS; public Trapezoid_Top_Center_Position TTCP; public Auto_Foucs AF; public Auto_Stigmatic AS; public Center_Position_OffsetAngle_Direction CPOD; public Measure_Size MS; public ImageInformation() { SIDD = new Source_Img_Degree_Direction(); CP = new Cut_Position(); CS = new Cut_Success(); TTCP = new Trapezoid_Top_Center_Position(); AF = new Auto_Foucs(); AS = new Auto_Stigmatic(); CPOD = new Center_Position_OffsetAngle_Direction(); MS = new Measure_Size(); } //1-计算原始图像偏移角度及方向 public class Source_Img_Degree_Direction { public Boolean Is_Image = false; public double Degree { get { return degree; } set { degree = value; } } private double degree; public int Direction { get { return direction; } set { direction = value; } } private int direction; public int State { get { return state; } set { state = value; } } private int state; } //2-计算切割点位置 public class Cut_Position { public Boolean Is_Image = false; public double Offsetx { get { return offsetx; } set { offsetx = value; } } private double offsetx; public double Offsety { get { return offsety; } set { offsety = value; } } private double offsety; public int State { get { return state; } set { state = value; } } private int state; } //3-是否切割成功 public class Cut_Success { public Boolean Is_Image = false; public int State { get { return state; } set { state = value; } } private int state; } //4-计算切割后图像梯形区域上边中心点坐标 public class Trapezoid_Top_Center_Position { public Boolean Is_Image = false; public double TopCenterX { get { return topCenterX; } set { topCenterX = value; } } private double topCenterX; public double TopCenterY { get { return topCenterY; } set { topCenterY = value; } } private double topCenterY; public int State { get { return state; } set { state = value; } } private int state; } //5-自动对焦 public class Auto_Foucs { public Boolean Is_Image = true; public String Img_Path { get { return img_Path; } set { img_Path = value; } } private String img_Path; } //6-自动像闪 public class Auto_Stigmatic { public Boolean Is_Image = true; public String Img_Path { get { return img_Path; } set { img_Path = value; } } private String img_Path; } //7-计算切割面区域中心坐标，以及偏移角度及方向 public class Center_Position_OffsetAngle_Direction { public Boolean Is_Image = false; public double CenterX { get { return centerX; } set { centerX = value; } } private double centerX; public double CenterY { get { return centerY; } set { centerY = value; } } private double centerY; public double Degree { get { return degree; } set { degree = value; } } private double degree; public int Direction { get { return direction; } set { direction = value; } } private int direction; public int State { get { return state; } set { state = value; } } private int state; } //8-测量尺寸 public class Measure_Size { public Boolean Is_Image = false; public int State { get { return state; } set { state = value; } } private int state; } } //图像处理信息实例类 public ImageInformation Image_Information { get { return image_Information; } set { image_Information = value; } } private ImageInformation image_Information; public ThreadStatusEventArgs(string a_State) { picture_Information = new PictureInformation(); image_Information = new ImageInformation(); } } //切孔状态 public class CutHolesStatusEventArgs { public string State { get { return m_state; } set { m_state = value; } } private string m_state; public string HoleName { get { return m_holeName; } set { m_holeName = value; } } private string m_holeName; public CutHolesStatusEventArgs(string a_state, string a_holeName) { this.m_state = a_state; this.m_holeName = a_holeName; } } #endregion public class Measure { #region 变量定义 //Web接口类 public WebResult wr = null; //SmartSEM远程路径 public String RemoteELYPath = ""; public String RemoteMLFPath = ""; //扫描周期 private float cycle_time = 0; //人工干预 public int hand_intervene = 2; //样品台保护值 public float X_Min = 0; public float X_Max = 0.13f; public float Y_Min = 0; public float Y_Max = 0.13f; public float Z_Min = 0; public float Z_Max = 0.05f; public float T_Min = -4; public float T_Max = 70; public float R_Min = -380; public float R_Max = 380; public float M_Min = 0; public float M_Max = 0.012f; public event ThreadStatusHandler SendThreadStatus; // 声明事件 public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件 //定义一个全局的消息类 ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0"); //全局只有一个fatorySEM static FactoryHardware factorySEM = FactoryHardware.Instance; ISEMControl iSEM = factorySEM.ISEM; //@的作用是不用转义字符\\只打一个就行 const String ImageName0 = @"SEMStraighten.tif"; //传给客户，原始图像，为拉直操作 const String ImageName1 = @"FIBStraighten.tif"; //传给客户，原始图像，为拉直操作 //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户，作水平校正 const String ImageName2 = @"FIBCutPostion.tif";//传给客户，找到切割点 const String ImageName31 = @"FIBBefore.tif"; const String ImageName32 = @"FIBAfter.tif"; const String ImageName4 = @"SEMTrapCP.tif";//传给客户，找到已经切割点 const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户，水平校正 const String ImageName6 = @"SEMMagEnd.tif";//传给客户，测量层高 const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域 const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像 const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像 const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户，找到已经切割点 const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照 const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照 const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照 const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照 const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照 const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照 const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针 const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针 const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏 const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏 const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像，这个图像为使用工具SmartSEM工具的图像 const String ElyDeposition = @"Deposition.ely"; //沉积 const String ElyCrossSection = @"CrossSection.ely"; //切割 const float fMin = (float)0.0000002; //单位是米 const float fSateyZ = (float)0.03;//单位是米 public Boolean key_stop = false; String focus_path = ""; String FIBfocus_path = ""; String StigX_path = ""; String StigY_path = ""; String EDS_path = ""; String data_path = ""; int m_nWorkHoleNo = -1; //测量文件 private MeasureFile m_measureFile; public MeasureFile MeasureFile { get { return this.m_measureFile; } set { this.m_measureFile = value; } } //测量的切割孔，这个切孔的状态要保存的测量文件中去 private List m_cutHoles; public List cutHoles { get { return this.m_cutHoles; } set { this.m_cutHoles = value; } } //工作文件夹 private string m_WorkingFolder; public string WorkingFolder { get { return this.m_WorkingFolder; } set { this.m_WorkingFolder = value; } } //程序当前路径 private string m_ProgramFolder = Directory.GetCurrentDirectory(); //线程状态 private ThreadStatus m_ThreadStatus; public ThreadStatus TStatus { get { return this.m_ThreadStatus; } set { this.m_ThreadStatus = value; } } #endregion //构造函数 public Measure(String webServerIP, String webServerPort, String webServerUrl) { LogManager.AddHardwareLog("进入构造函数", true); TStatus = new ThreadStatus(); cutHoles = new List(); //配置远程连接 wr = new WebResult(webServerIP,webServerPort,webServerUrl); } //初始化测量业务, 读测量文件，判断是否有可测试的切孔 public bool InitMeas(MeasureFile a_measureFile) { LogManager.AddHardwareLog("进入初始化函数", true); m_measureFile = a_measureFile; List listHoles = m_measureFile.ListCutHole; foreach (CutHole h in listHoles) { if (h.SWITCH == true) { m_cutHoles.Add(h); } } if (m_cutHoles.Count == 0) return false; if (m_measureFile.MParam.EDS == true) { LogManager.AddHardwareLog("能谱分析", true); Init_MeasDB(); } return true; } //给前台UI发送消息步骤 public void SendMsg(string step_code) { arg.Step_Code = step_code; arg.Time = DateTime.Now; SendThreadStatus(this, arg); } //给前台UI发送孔状态信息 public void SendCutHoleMsg(string a_state, string a_holeName) { CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName); arg.HoleName = a_holeName; arg.State = a_state; SendCutHolesStatus(this, arg); } //测量流程 public void DoMeasure() { //创建线程的测量状态的更新 this.TStatus.ComputeTime(THREAD_TIME_TYPE.START); LogManager.AddHardwareLog("测量线程：开始测量",true); //检查硬件连接是否正常 LogManager.AddHardwareLog("测量线程：连接硬件", true); if (!ConnectHardware()) { MessageBox.Show("连接电镜失败！","重要错误",MessageBoxButtons.OK,MessageBoxIcon.Error); this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED); LogManager.AddHardwareLog("测量线程报错：连接硬件硬件连接失败", false); return; } //设置工作文件夹 LogManager.AddHardwareLog("测量线程：设置工作文件夹", true); if (!SetWorkingFolderStr()) { this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED); LogManager.AddHardwareLog("测量线程报错：设置文件夹失败", false); return; } //设置SmartSEM远程路径 iSEM.SetRemoteELYPath(RemoteELYPath); iSEM.SetRemoteMLFPath(RemoteMLFPath); //增加EDS控制 //将停止键复位 key_stop = false; //开始测量就将模式设置为SEM LogManager.AddHardwareLog("测量线程：切换到SEM模式", true); if (!iSEM.CmdFIBModeSEM()) { LogManager.AddHardwareLog("测量线程报错：开始切换到SEM模式失败。", false); return; } arg.Picture_Information.Work_Status = "SEM"; //设置扫描周期 LogManager.AddHardwareLog("测量线程：设置图像扫描周期为对焦周期", true); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); if (cycle_time == 0) { LogManager.AddHardwareLog("测量线程报错：获取扫描周期时间失败", false); return; } Thread.Sleep((int)cycle_time +100); //开始做各个孔的检测 for (int i = 0; i < m_cutHoles.Count; i++) { //自动亮度对比度 LogManager.AddHardwareLog("测量线程：开启自动亮度，对比度调节", true); iSEM.SetAutoBright(100); Thread.Sleep(200); iSEM.SetAutoContrast(100); Thread.Sleep(200); //LogManager.AddHardwareLog("SEM模式设置自动亮度调节目标50%，亮度调节目标30%", true); if (!iSEM.SetAutoVideoBrightnessAndContrast()) { LogManager.AddHardwareLog("测量线程报错：开始设置自动亮度、对比度失败。", false); return; } Thread.Sleep(5000); LogManager.AddHardwareLog("测量线程：测试第"+i.ToString()+"个分析点。", true); //记录测量序号和孔名 m_nWorkHoleNo = i; arg.HoleName = m_cutHoles[i].HoleName; //最终数据存放目录 data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName; //对焦数据存放目录 focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus"; m_measureFile.MParam.AutoFocus.Path = focus_path; if (!Directory.Exists(focus_path)) { Directory.CreateDirectory(focus_path); } //StigX数据存放目录 StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX"; m_measureFile.MParam.AutoStigX.Path = StigX_path; if (!Directory.Exists(StigX_path)) { Directory.CreateDirectory(StigX_path); } //StigY数据存放目录 StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY"; m_measureFile.MParam.AutoStigY.Path = StigY_path; if (!Directory.Exists(StigY_path)) { Directory.CreateDirectory(StigY_path); } //EDS数据存放路径 if (m_measureFile.MParam.EDS == true) { EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS"; m_measureFile.MParam.EDSP.Path = EDS_path; if (!Directory.Exists(EDS_path)) { Directory.CreateDirectory(EDS_path); } } //判断孔状态 if (m_cutHoles[i].STATE != State.Ready) { LogManager.AddHardwareLog("测试孔"+ m_cutHoles[i].HoleName+"状态非就绪，不予测量。", true); continue; } //20201127增加Scanrotate Off iSEM.SetScanRotationOff(); Thread.Sleep(200); //20.光束等复位 iSEM.SetBeamShiftX(0); Thread.Sleep(200); iSEM.SetBeamShiftY(0); Thread.Sleep(200); //开始循环工作 if (i == 0) { LogManager.AddHardwareLog("测量线程：分析点" + m_cutHoles[i].HoleName+"开始测量。", true); m_cutHoles[i].START = DateTime.Now; //切孔操作-开始 m_cutHoles[i].STATE = State.InProcess; SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); LogManager.AddHardwareLog("测量线程：控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + "," + m_cutHoles[0].Position.X.ToString()+"," + m_cutHoles[0].Position.Y.ToString()+"," + m_cutHoles[0].Position.Z.ToString() + ")", true); #region 坐标恢复 //0、先移动Z轴到比较低的位置上。 if (m_measureFile.MParam.Title)//如果是倾斜样品台，移动Z轴 { if (!iSEM.SetStageGotoZ(fSateyZ)) { arg.State = false; arg.Message = "样品台移动到观测点：" + m_cutHoles[i] + "的位置失败。"; SendMsg("1-0"); LogManager.AddHardwareLog("测量线程报错：样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false); m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); Thread.Sleep(3000); continue; } while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); LogManager.AddHardwareLog("停止键被按下", true); return; } } //1、移动样品台到第一个观测点，先移动R轴，再移动XY轴 if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R)) { arg.State = false; arg.Message = "样品台移动到观测点：" + m_cutHoles[i] + "的位置失败。"; SendMsg("1-0"); LogManager.AddHardwareLog("测量线程报错：样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false); m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); Thread.Sleep(3000); continue; } while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); LogManager.AddHardwareLog("停止键被按下", true); return; } //2、移动XY轴 if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y)) { arg.State = false; arg.Message = "样品台移动到观测点：" + m_cutHoles[i] + "的位置失败。"; SendMsg("1-0"); LogManager.AddHardwareLog("测量线程报错：样品台XY轴移动失败,(X,Y)为" + m_cutHoles[0].Position.X.ToString() + "," + m_cutHoles[0].Position.Y.ToString()+ ")", false); m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); Thread.Sleep(3000); continue; } while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); LogManager.AddHardwareLog("停止键被按下", true); return; } //3、恢复Z轴 if (m_measureFile.MParam.Title) { //恢复Z轴 if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z)) { arg.State = false; arg.Message = "样品台移动到观测点：" + m_cutHoles[i] + "的位置失败。"; SendMsg("1-0"); LogManager.AddHardwareLog("测量线程报错：样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false); m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); Thread.Sleep(3000); continue; } while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下。", true); m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); return; } } arg.State = true; arg.Message = "样品台移动到观测点：" + m_cutHoles[i] + "的位置成功。"; SendMsg("1-0"); //4、设置WD iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD); Thread.Sleep(1000); #endregion //第一个点开始测量 if (FirstHole()) { //保存文件，将测量状态更改 m_cutHoles[i].STATE = State.Success; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); } //失败 else { m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); } } else { //其他孔的测量 LogManager.AddHardwareLog("测量线程：分析点" + m_cutHoles[i].HoleName + "开始测量。", true); m_cutHoles[i].START = DateTime.Now; m_cutHoles[i].STATE = State.InProcess; SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); //其他孔测量之前的初始化 if (!OtherHole_Init()) { arg.State = false; arg.Message = "样品台移动到观测点：" + m_cutHoles[i] + "的位置失败。"; SendMsg("1-0"); Thread.Sleep(3000); LogManager.AddHardwareLog("测量线程：" + arg.Message, true); continue; } arg.State = true; arg.Message = "样品台移动到观测点：" + m_cutHoles[i] + "的位置成功。"; SendMsg("1-0"); //其他孔开始测量 if (OtherHole()) { //保存文件，将测量状态更改 m_cutHoles[i].STATE = State.Success; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); } //失败 else { m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); } } if(key_stop) { m_cutHoles[i].END = DateTime.Now; m_cutHoles[i].STATE = State.Ready; m_measureFile.Save(); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); arg.Message = "用户停止测量"; SendMsg("0-0"); break; } //两个点之间更换，加延时以便完成显示 Thread.Sleep(3000); } } //检查硬件连接是否正常 public bool ConnectHardware() { //返回硬件的连接状态 return iSEM.ConnectStatus(); } //设置工作文件夹 public bool SetWorkingFolderStr() { WorkingFolder = m_measureFile.FilePath; return true; } //插入PT针 public bool InsertPT() { string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt; //SendMsg("调用宏插入PT针宏文件" + fn); iSEM.CMDMCFFilename(fn); //延时1s？？ Thread.Sleep(1000); return true; } //撤出PT针 public bool RetractPT() { string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt; //SendMsg("调用宏撤出PT针宏文件" + fn); iSEM.CMDMCFFilename(fn); //延时1s？？ Thread.Sleep(1000); return true; } //PT沉积 public bool PTWork() { //执行PT沉积的ELY文件 if (!ExcuteEly(m_measureFile.MParam.PTTemp)) { return false; } //等待沉积完成 while (true) { Thread.Sleep(7000); if (iSEM.GetFIBMode() == 0) { break; } } return true; } //FIB切割 public bool FIBWork() { //执行PT沉积的ELY文件 if (!ExcuteEly(m_measureFile.MParam.FIBTemp)) { return false; } //等待切割完成 while (true) { Thread.Sleep(10000); if (iSEM.GetFIBMode() == 0) { break; } } return true; } //执行ELY文件的步骤 public bool ExcuteEly(string a_filename) { //执行ELy文件有三个动作 //1. 选择ELY文件 //SendMsg("选择ELY文件"); if (!iSEM.CmdFIBLoadELY(a_filename)) { //SendMsg("选择ELY文件失败"); return false; } Thread.Sleep(1000); //2. 确认ELY文件 //SendMsg("确认ELY文件"); if (!iSEM.CmdFIBEXPOSUREELY()) { //SendMsg("确认ELY文件失败"); return false; } Thread.Sleep(1000); //3. 执行ELY文件 //SendMsg("执行ELY文件"); if (!iSEM.CmdFIBSTARTELY()) { //SendMsg("执行ELY文件失败"); return false; } Thread.Sleep(1000); return true; } /// ///13. 自动 定位功能,沉积 /// /// public bool GetPoistion() { float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0; int state = 1; LogManager.AddHardwareLog("测量线程：13.自动定位、沉积-功能自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString(), true); Thread.Sleep(200); //1.控制SEM放大600X if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage)) { arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败"; arg.State = false; SendMsg("1-6"); LogManager.AddHardwareLog("测量线程报错：13.自动定位、沉积-自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "控制失败", false); return false; } Thread.Sleep(200); if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification)) { arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败"; arg.State = false; SendMsg("1-6"); LogManager.AddHardwareLog("测量线程报错：13.自动定位、沉积-自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString() + "控制失败", false); return false; } float current = iSEM.GetMagnification(); while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1) { iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification); Thread.Sleep(200); current = iSEM.GetMagnification(); } arg.State = true; arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功"; SendMsg("1-6"); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下。", true); return false; } //判断是否为仅拍照，不是则执行FIB操作 if (!m_measureFile.MParam.Is_Photograph) { LogManager.AddHardwareLog("测量线程：切换到FIB模式。", true); //6.设置FIB拍照参数——扫描时间、束流等 //7.控制FIB自动亮度、对比度 Thread.Sleep(200); if (!iSEM.CmdFIBModeFIB()) { arg.Message = "FIB模式切换失败"; arg.State = false; SendMsg("1-8"); LogManager.AddHardwareLog("测量线程报错：切换到FIB模式失败。", false); return false; } arg.State = true; arg.Picture_Information.Work_Status = "FIB"; arg.Message = "FIB模式切换成功"; SendMsg("1-8"); Thread.Sleep(1000); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下。", true); return false; } //8.控制FIB拍照 //9.保存照片======更改路径 //20201103,FIB使用定位的放大倍数 String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Location_Magnification.ToString("0") + "_" + ImageName2; arg.Picture_Information.Picture_FullPath = fileName2; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(200); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(200); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(200); //FIB的放大位数，将来会改 LogManager.AddHardwareLog("测量线程：设置FIB放大倍数"+ m_measureFile.MParam.Location_Magnification.ToString(), true); //20201103，FIB使用定位的放大倍数 if (!iSEM.SetFIBMagnification(m_measureFile.MParam.Location_Magnification)) { arg.Message = "FIB放大倍数设置失败"; arg.State = false; SendMsg("1-9"); LogManager.AddHardwareLog("测量线程失败：FIB放大倍数设置失败。", false); return false; } arg.Message = "FIB放大倍数设置成功"; arg.State = true; SendMsg("1-9"); Thread.Sleep(200); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下。", true); return false; } //4、设置WD iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD); Thread.Sleep(1000); //20201127增加自动亮度对比度 if(m_measureFile.MParam.FIBDo) { if(m_measureFile.MParam.FIBAutoBC) { iSEM.SetAutoVideoBrightnessAndContrast(); //20201128陈工建议增加 Thread.Sleep(200); iSEM.SetAutoBright(100); Thread.Sleep(200); iSEM.SetAutoContrast(100); Thread.Sleep(5000); } else { iSEM.SetAutoVideoOff(); Thread.Sleep(200); iSEM.SetBrightness(m_measureFile.MParam.FIBB); Thread.Sleep(200); iSEM.SetContrast(m_measureFile.MParam.FIBC); Thread.Sleep(200); } } //拍照前改变速度,延时 iSEM.CloseReduced(); Thread.Sleep(200); iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); if (!GetImage(fileName2)) { arg.Message = "FIB拍照失败"; arg.State = false; SendMsg("1-11"); LogManager.AddHardwareLog("测量线程报错：FIB拍照失败。", false); return false; } arg.State = true; arg.Picture_Information.Picture_FullPath = fileName2; arg.Message = "FIB拍照成功"; SendMsg("1-11"); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下。", true); return false; } iSEM.CmdFIBModeSEM(); Thread.Sleep(200); //10.将照片传给客户，返回梯形位置坐标，及样品类型参数（是否需要PT沉积，PT坐标位置，PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数） LogManager.AddHardwareLog("测量线程：调用图像处理接口，准备移动样品台", true); LogManager.AddHardwareLog("文件名=" + fileName2, true); LogManager.AddHardwareLog("样品类型=" + m_measureFile.MParam.SampleName, true); LogManager.AddHardwareLog("供应商名称=" + m_measureFile.MParam.Firm, true); wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x1, out y1, out x2, out y2, out state); LogManager.AddHardwareLog("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString()+")", true); LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true); if (state == 1) { //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割 float xc = (x1 + x2)/2; float yc = (y1 + y2)/2; x0 = xc - 512; y0 = 384 - yc; LogManager.AddHardwareLog("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true); px = iSEM.GetPixelSize(); //修改FIB切割的ELY文件坐标 XmlDocument xmlDoc = new XmlDocument(); xmlDoc.Load(m_measureFile.MParam.FIBTemp);//加载baixml文件，xmlpath 为XML文件的路径du XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID"); if (xns != null) { XmlAttributeCollection attributeCol = xns.Attributes; //遍历自己点属性 double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0; LogManager.AddHardwareLog("XML-Width_a = " + width_a.ToString(), true); foreach (XmlAttribute attri in attributeCol) { if (attri.Name == "x") { attri.InnerText = ((x0 * px)*1000000 - width_a).ToString(); LogManager.AddHardwareLog("XML-TopLeft-X = " + attri.InnerText, true); } else if (attri.Name == "y") { attri.InnerText = ((y0 * px)*1000000-2.791).ToString(); LogManager.AddHardwareLog("XML-TopLeft-Y = " + attri.InnerText, true); } } } xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT"); if (xns != null) { XmlAttributeCollection attributeCol = xns.Attributes; double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0; //遍历自己点属性 foreach (XmlAttribute attri in attributeCol) { if (attri.Name == "x") { attri.InnerText = ((x0 * px)*1000000 - width).ToString(); } else if (attri.Name == "y") { attri.InnerText = (((y0 * px) *1000000) + 2 - 2.791).ToString(); } } } xmlDoc.Save(m_measureFile.MParam.FIBTemp);//保存的该XML文件,否则更新无效 //判断是否需要PT沉积，如果需要也要修改PT的ELY文件 if (m_measureFile.MParam.PT) { xmlDoc = new XmlDocument(); xmlDoc.Load(m_measureFile.MParam.PTTemp);//加载baixml文件，xmlpath 为XML文件的路径du xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT"); if (xns != null) { XmlAttributeCollection attributeCol = xns.Attributes; double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0; //因为ELY文件里的矩形高就是负值，所以在下面的Y值加上这个值就好。 double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5; //遍历自己点属性 foreach (XmlAttribute attri in attributeCol) { if (attri.Name == "x") { attri.InnerText = ((x0 * px) * 1000000 - width).ToString(); } else if (attri.Name == "y") { attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString(); } } } xmlDoc.Save(m_measureFile.MParam.PTTemp); } if (hand_intervene == 1) { MessageBox.Show("Web返回数据移动是否正确？\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK); } } else { arg.Message = "图像接口参数state返回值为零"; arg.State = false; SendMsg("1-12"); if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { LogManager.AddHardwareLog("测量线程报错：自动定位图像接口返回0", false); return false; } LogManager.AddHardwareLog("测量线程报错：自动定位图像接口返回0", false); return false; } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //11.自动工具样品类型参数确定是否需要PT沉积 if (m_measureFile.MParam.PT) { if (!iSEM.CmdFIBModeFIB()) { LogManager.AddHardwareLog("测量线程报错：切换到SEM模式失败", false); return false; } Thread.Sleep(200); //12.根据样品类型参数确定是否需要PT沉积，控制PT针插入 if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true) { LogManager.AddHardwareLog("测量线程：插入PT针" + arg.Message, true); if (!InsertPT()) { arg.Message = "插入PT针失败"; arg.State = false; SendMsg("1-13"); LogManager.AddHardwareLog("测量线程报错："+ arg.Message, false); return false; } arg.State = true; arg.Message = "插入PT针成功"; SendMsg("1-13"); } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //3. 根据坐标进行PT沉积 if (!PTWork()) { arg.Message = "PT沉积失败"; arg.State = false; SendMsg("1-14"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } arg.State = true; arg.Message = "PT沉积成功"; SendMsg("1-14"); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //15.根据样品类型决定是否撤出PT针 if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true) { if (!RetractPT()) { arg.Message = "撤出PT针失败"; arg.State = false; SendMsg("1-15"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } arg.State = true; arg.Message = "撤出PT针成功"; SendMsg("1-15"); } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } if (!iSEM.CmdFIBModeSEM()) { //arg.Message = "切割前SEM拍照失败。"; //arg.State = false; //SendMsg("1-17"); LogManager.AddHardwareLog("测量线程报错：切换到SEM模式失败", false); return false; } } } //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库，保存客户返回值信息到数据库 float[] firstPosition = iSEM.GetStagePosition(); m_cutHoles[0].Position.X = firstPosition[0]; m_cutHoles[0].Position.Y = firstPosition[1]; m_cutHoles[0].Position.Z = firstPosition[2]; m_cutHoles[0].Position.T = firstPosition[3]; m_cutHoles[0].Position.R = firstPosition[4]; m_cutHoles[0].Position.M = firstPosition[5]; //这里要调用文件保存功能 arg.Message = "坐标1(" + firstPosition[0].ToString() + "," + firstPosition[1].ToString() + "," + firstPosition[2].ToString() + "," + firstPosition[3].ToString() + "," + firstPosition[4].ToString() + "," + firstPosition[5].ToString() + ")"; arg.State = true; SendMsg("1-16"); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } return true; } /// /// 14. FIB切割 /// /// public bool FIBCross() { int state = 0; #if CHECK float mag = m_measureFile.MParam.Location_Magnification / 3; if (mag < 200) { mag = 200; } String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111; iSEM.SetMagnification(mag); Thread.Sleep(2000); iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); if (!GetImage(fileName1)) { arg.Message = "切割前SEM拍照失败。"; arg.State = false; SendMsg("1-17"); LogManager.AddHardwareLog("测量线程报错：SEM切割前图像拍照失败", false); return false; } iSEM.CmdFocusRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); arg.Message = "切割前SEM拍照成功。"; arg.Picture_Information.Picture_FullPath = fileName1; arg.State = true; SendMsg("1-17"); #endif if (!iSEM.CmdFIBModeFIB()) { arg.Message = "切换到FIB模式失败。"; arg.State = false; SendMsg("1-18"); LogManager.AddHardwareLog("测量线程报错：切换到SEM模式失败", false); return false; } arg.Message = "切换到FIB模式成功。"; arg.State = true; SendMsg("1-18"); Thread.Sleep(1000); iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification); float current = iSEM.GetMagnification(); while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1) { iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification); Thread.Sleep(200); current = iSEM.GetMagnification(); } Thread.Sleep(2000); //14.自动控制FIB切割 //1.根据参数设置FIB草率时间（使图清晰），设置梯形上下边及深度、设置束流 //2.控制FIB进行切割 //以上1、2步全部用ELY文件代替 if (!FIBWork()) { arg.Message = "FIB切割失败"; arg.State = false; SendMsg("1-19"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } arg.State = true; arg.Message = "FIB切割成功"; SendMsg("1-19"); Thread.Sleep(300); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //做切割后SEM的拍照 LogManager.AddHardwareLog("测量线程：切割后SEM拍照", true); if (!iSEM.CmdFIBModeSEM()) { //arg.Message = "切割后SEM拍照失败。"; //arg.State = false; //SendMsg("1-20"); LogManager.AddHardwareLog("测量线程报错：切换到SEM模式失败", false); return false; } Thread.Sleep(1000); #if CHECK String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112; iSEM.SetMagnification(mag); Thread.Sleep(2000); iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); if (!GetImage(fileName2)) { arg.Message = "切割后SEM拍照失败。"; arg.State = false; SendMsg("1-20"); LogManager.AddHardwareLog("测量线程报错：SEM切割后图像拍照失败", false); return false; } arg.Picture_Information.Picture_FullPath = fileName2; arg.Message = "切割后SEM拍照成功。"; arg.State = true; SendMsg("1-20"); iSEM.CmdFocusRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); //5.验证切割准确性：与切割前对比，如果对比误差大，则停止自动执行，进行报警 wr.Img_Cut_Success(fileName1, fileName2, out state); LogManager.AddHardwareLog("测量线程：验证切割准确性，切割前图像："+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true); if (state == 0) { LogManager.AddHardwareLog("测量线程报错：验证切割准确性失败，图像接口参数state返回值为零。", false); arg.Message = "图像接口参数state返回值为零"; arg.State = false; SendMsg("1-22"); if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { return false; } LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); } arg.State = true; LogManager.AddHardwareLog("验证切割准确性成功。", true); arg.Message = "FIB切割校验成功"; SendMsg("1-22"); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下。", true); return false; } #endif return true; } /// /// 16.自动调整SEM找到切割位置，这里不是简单的拉直旋转 /// /// public bool FindCross() { float x2 = 0, y2 = 0; int state = 0; //切换到SEM模式 if (!iSEM.CmdFIBModeSEM()) { arg.Message = "SEM模式切换失败"; arg.State = false; SendMsg("1-23"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } arg.State = true; arg.Message = "SEM模式切换成功"; SendMsg("1-23"); arg.Picture_Information.Work_Status = "SEM"; Thread.Sleep(1000); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //1.控制SEM放大到300倍 if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage)) { arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败"; arg.State = false; SendMsg("1-24"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } Thread.Sleep(200); //iSEM.SetAutoVideoBrightnessAndContrast(); iSEM.SetAutoVideoOff(); Thread.Sleep(200); iSEM.SetBrightness(50.0f); Thread.Sleep(200); iSEM.SetContrast(30.0f); Thread.Sleep(5000); float mag = m_measureFile.MParam.Location_Magnification / 3; if (mag < 200) { mag = 200; } if (!iSEM.SetMagnification(mag)) { arg.Message = "放大" + mag.ToString("0.0") + "倍失败"; arg.State = false; SendMsg("1-24"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } Thread.Sleep(200); float current = iSEM.GetMagnification(); Thread.Sleep(200); while (Math.Abs(current - mag) > 2) { iSEM.SetMagnification(mag); Thread.Sleep(200); current = iSEM.GetMagnification(); Thread.Sleep(200); } arg.State = true; arg.Message = "放大" + mag.ToString("0.0") + "倍成功"; SendMsg("1-24"); Thread.Sleep(2000); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //3.控制SEM拍照 String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4; arg.Picture_Information.Picture_FullPath = fileName4; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(200); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(200); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(200); //拍照前改变速度,延时 iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); if (!GetImage(fileName4)) { arg.State = false; arg.Message = "SEM拍照找切割位置失败"; SendMsg("1-25"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } arg.Picture_Information.Picture_FullPath = fileName4; arg.State = true; arg.Message = "SEM拍照成功"; SendMsg("1-25"); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); //判断是否停止进程 if (key_stop) { return false; } //4.将照片传给客户，获取偏移坐标，以及偏移角度 //5.根据坐标控制SEM移动到切孔位置，居中 LogManager.AddHardwareLog("测量线程：图像处理接口，准备移动样品台", true); LogManager.AddHardwareLog("文件名=" + fileName4, true); wr.Img_Trapezoid_Top_Center_Position(fileName4,Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state); LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true); LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true); if (state == 1) { //1. 根据客户PT沉积坐标控制FIB调整到中心位置？？？？？？？ if (!MoveToPixByMoveStage(x2, y2)) { arg.State = false; arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败"; SendMsg("1-26"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } //判断是否移动完成 while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } arg.State = true; arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功"; SendMsg("1-26"); //高倍到低倍不进行对焦 //拍照前改变速度,延时 iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10; if (!GetImage(fileName10)) { //arg.State = false; //arg.Message = "SEM拍照失败"; //SendMsg("1-25"); //return false; LogManager.AddHardwareLog("测量线程报错：找到已切割的位置拍照失败", true); } iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); if (hand_intervene == 1) { MessageBox.Show("Web返回数据移动是否正确？\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK); } } else { arg.Message = "图像接口参数state返回值为零"; arg.State = false; SendMsg("1-26"); if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { return false; } LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } return true; } /// /// 17.自动控制SEM拍截面照 /// /// public bool ShotSection(ref List limg_path, ref List lsize) { int state = 0; #region 设置拍照的电压 LogManager.AddHardwareLog("测量线程：设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true); //1、放大倍数参数photograph_ if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Photograph_Voltage)) { arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败"; arg.State = false; SendMsg("1-27"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } #endregion Thread.Sleep(200); #region 设置拍照的放大倍数 LogManager.AddHardwareLog("测量线程：设置拍照放大倍数====" + m_measureFile.MParam.Photograph_Magnification.ToString(), true); if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification)) { arg.Message = "放大倍数调整失败"; arg.State = false; SendMsg("1-27"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } float set = m_measureFile.MParam.Photograph_Magnification; float current = iSEM.GetMagnification(); while(Math.Abs(current- set) > 1) { iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification); Thread.Sleep(200); current = iSEM.GetMagnification(); } arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString()+ "成功"; arg.State = true; SendMsg("1-27"); Thread.Sleep(3000 + (Int32)cycle_time); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } #endregion #region 拍摄矩形的切割孔，使用拍照的放大倍数 //if(!iSEM.SetAutoVideoBrightnessAndContrast()) //{ // LogManager.AddHardwareLog("测量线程报错：自动开启亮度对比度失败", false); // return false; //} //Thread.Sleep(5000); //2.控制SEM自动对焦、亮度、对比度-接口 iSEM.SetReduced(402, 128, 340, 256); Thread.Sleep(200); //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 iSEM.CmdFocusRate(5); //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 end Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); LogManager.AddHardwareLog("测量线程：17.自动控制SEM拍截面照-关闭自动亮度对比度开始！", true); if (!iSEM.SetAutoVideoOff()) { LogManager.AddHardwareLog("测量线程报错：关闭自动亮度对比度失败", false); return false; } Thread.Sleep(5000); LogManager.AddHardwareLog("测量线程：17.自动控制SEM拍截面照-关闭自动亮度对比度结束！", true); LogManager.AddHardwareLog("测量线程：17.自动控制SEM拍截面照-自动对焦开始！", true); if (ImageFocus1(false)) { arg.Message = "自动对焦完成"; arg.State = true; SendMsg("1-28"); } else { arg.Message = "自动对焦失败"; arg.State = false; SendMsg("1-28"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } LogManager.AddHardwareLog("测量线程：17.自动控制SEM拍截面照-自动对焦结束！", true); iSEM.CloseReduced(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(200 + Convert.ToInt32(cycle_time)); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } if (!iSEM.SetAutoVideoBrightnessAndContrast()) { LogManager.AddHardwareLog("测量线程报错：自动开启亮度对比度失败", false); return false; } Thread.Sleep(5000); //3、设置SEM补偿角度 if (m_measureFile.MParam.Is_Photograph == false) { LogManager.AddHardwareLog("测量线程：角度补偿" + m_measureFile.MParam.Correction_Angle.ToString()+"度", true); if (!TiltCorrection(m_measureFile.MParam.Correction_Angle)) { arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败"; arg.State = false; SendMsg("1-29"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } arg.State = true; arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功"; SendMsg("1-29"); Thread.Sleep(200); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", false); return false; } } //4、拍照，5、保存照片 String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5; arg.Picture_Information.Picture_FullPath = fileName5; arg.Picture_Information.Work_Status = "SEM"; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(200); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(200); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(200); //拍照前改变速度,延时 iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time)*2); if (!GetImage(fileName5)) { arg.Message = "SEM拍照失败"; arg.State = false; SendMsg("1-30"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } arg.Picture_Information.Picture_FullPath = fileName5; arg.State = true; arg.Message = "SEM拍照成功"; SendMsg("1-30"); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } #endregion if (m_measureFile.MParam.Is_Photograph == false) { #region 对当前矩形进行旋转校正 //8,计算切割面区域偏移角度及方向 float degree = 0; int direction = 0; wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state); LogManager.AddHardwareLog("测量线程：2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true); LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true); //接口返回像素，*pixelsize,得到坐标点。判断移动方式 if (state == 1) { //梯形角度 iSEM.SetScanRotationOn(); Thread.Sleep(200); //20201128陈工要求，谭博返回角度*0.7 iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor)); Thread.Sleep(200); arg.State = true; arg.Message = "图像接口返回角度为：" + degree.ToString(); SendMsg("1-31"); if (hand_intervene == 1) { MessageBox.Show("Web返回数据移动是否正确？\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK); } } else { arg.Message = "图像接口参数State返回值为零"; arg.State = false; SendMsg("1-31"); if(hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { //return false; } LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } Thread.Sleep(200); //12拍照 String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6; arg.Picture_Information.Picture_FullPath = fileName6; arg.Picture_Information.Work_Status = "SEM"; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(200); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(200); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(200); //拍照前改变速度,延时 iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); if (!GetImage(fileName6)) { arg.Message = "SEM拍照失败"; arg.State = false; SendMsg("1-33"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } arg.Picture_Information.Picture_FullPath = fileName6; arg.State = true; arg.Message = "SEM拍照成功"; SendMsg("1-33"); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } #endregion #region 获取两个位置上及放大倍数 //计算两个测量区域坐标 List ct = new List(); List mag = new List(); System.Drawing.Point ct0; float mag1, mag2, magMax; //LogManager.AddHardwareLog("测量线程：图像处理接口，计算两个放大区域坐标，输入图像" + fileName6.ToString() + "控制失败", true); wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state); LogManager.AddHardwareLog("测量线程：图像处理接口返回值为" + state.ToString() + "，计算两个放大区域坐标，输入图像" + fileName6.ToString() + "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) + "输入产品" + m_measureFile.MParam.Firm.ToString() + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")" + "输出放大倍数1" + mag[0] + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")" + "输出放大倍数2" + mag[0] + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true); #endregion if (state == 1 && ct.Count != 0 && mag.Count != 0) { arg.State = true; arg.Message = "获取位置及放大倍数成功"; SendMsg("1-34"); #region 记录初始设置的BeamShift的百分比和样品台XY位置 float xs = iSEM.GetBeamShiftX(); Thread.Sleep(200); float ys = iSEM.GetBeamShiftY(); Thread.Sleep(200); float xpCur = iSEM.GetStageAtX(); Thread.Sleep(200); float ypCur = iSEM.GetStageAtY(); Thread.Sleep(200); LogManager.AddHardwareLog("测量线程：原来的光束偏移量x = " + xs.ToString() + "y=" + ys.ToString() + "," + "原来样品台的位置x= " + xpCur.ToString() + "y=" + ypCur.ToString(), true); #endregion //找到放大倍数最大值 magMax = mag[0]; for (int m = 1; m < mag.Count; m++) { if (mag[m] > magMax) { magMax = mag[m]; } } #region 移动到梯形左上角 //20201127将视野移动到梯形左上角位置 MoveToPix(ct0.X, ct0.Y); LogManager.AddHardwareLog("测量线程：移动到对焦点（ " + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true); //关闭自动亮度对比度 iSEM.SetAutoVideoOff(); Thread.Sleep(2000); iSEM.SetReduced(402, 128, 340, 256); Thread.Sleep(200); //add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 iSEM.CmdFocusRate(5); //add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 end Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); //放大到10000倍 iSEM.SetMagnification(magMax / 2); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); set = magMax / 2; current = iSEM.GetMagnification(); while (Math.Abs(current - set) > 1) { iSEM.SetMagnification(set); Thread.Sleep(200); current = iSEM.GetMagnification(); } LogManager.AddHardwareLog("========测量线程：开始自动聚焦--6000倍！", true); //自动对焦 if (!ImageFocus1(true)) { LogManager.AddHardwareLog("========测量线程：6000倍自动聚焦失败！", true); return false; } LogManager.AddHardwareLog("========测量线程：6000倍自动聚焦成功！", true); ////自动消像散 //if (!ImageStig1()) //{ // return false; //} //放大到10000倍 iSEM.SetMagnification(magMax); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); set = magMax; current = iSEM.GetMagnification(); while (Math.Abs(current - set) > 1) { iSEM.SetMagnification(set); Thread.Sleep(200); current = iSEM.GetMagnification(); } LogManager.AddHardwareLog("========测量线程：开始自动聚焦--12000倍！", true); //自动对焦 if (!ImageFocus1(true)) { LogManager.AddHardwareLog("========测量线程：12000倍自动聚焦失败！", true); return false; } LogManager.AddHardwareLog("========测量线程：12000倍自动聚焦成功！", true); ////自动消像散 //if (!ImageStig1()) //{ // return false; //} ////放大到20000倍 //iSEM.SetMagnification(magMax*2); //Thread.Sleep(100 + Convert.ToInt32(cycle_time)); //set = magMax*2; //current = iSEM.GetMagnification(); //while (Math.Abs(current - set) > 1) //{ // iSEM.SetMagnification(set); // Thread.Sleep(200); // current = iSEM.GetMagnification(); //} ////自动对焦 //if (!ImageFocus1()) //{ // return false; //} iSEM.CloseReduced(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); #endregion #region 循环拍照 for (int n = 0; n < ct.Count; n++) { #region 恢复到拍照的状态 iSEM.SetStageGotoX(xpCur); while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } iSEM.SetStageGotoY(ypCur); while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //恢复原来的放大倍数 if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification)) { LogManager.AddHardwareLog("测量线程报错：第一个区域放大倍数" + mag[n].ToString() + "控制失败", false); return false; } Thread.Sleep(100 + Convert.ToInt32(cycle_time)); set = m_measureFile.MParam.Photograph_Magnification; current = iSEM.GetMagnification(); while (Math.Abs(current - set) > 1) { iSEM.SetMagnification(set); Thread.Sleep(200); current = iSEM.GetMagnification(); } //恢复BeamShift的百分比值 iSEM.SetBeamShiftX(xs); Thread.Sleep(200); iSEM.SetBeamShiftY(ys); Thread.Sleep(200); #endregion #region 移动到指定点位置 if (!MoveToPix(ct[n].X, ct[n].Y)) { arg.State = false; arg.Message = "移动到第一个点位置失败"; SendMsg("1-" + (35 + n).ToString()); //移动到第一个点失败 LogManager.AddHardwareLog("测量线程报错：移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false); } LogManager.AddHardwareLog("测量线程：移动到第1个点（ " + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")", true); #endregion #region 如果是第一个点，则1W倍对焦 if (n == 0) { ////在第一个点上放大1W倍对焦 //if (!iSEM.SetMagnification(mag[n])) //{ // LogManager.AddHardwareLog("测量线程报错：第一个区域放大倍数" + mag[n].ToString() + "控制失败", false); // return false; //} //Thread.Sleep(100 + Convert.ToInt32(cycle_time)); //while (true) //{ // current = iSEM.GetMagnification(); // if (Math.Abs(current - mag[n]) < 1) // { // Thread.Sleep(200); // break; // } // Thread.Sleep(200); // iSEM.SetMagnification(set); // Thread.Sleep(200); //} //if (m_measureFile.MParam.SampleName == "2") //{ // //窗口对焦 // iSEM.SetReduced1(340, 1, 340, 256); // Thread.Sleep(200); // iSEM.CmdFocusRate(); // Thread.Sleep(200); // cycle_time = iSEM.GetCycleTime(); // Thread.Sleep(100 + Convert.ToInt32(cycle_time)); // //自动对焦 // if (!ImageFocus1(false)) // { // return false; // } // //恢复全屏 // iSEM.CloseReduced(); // Thread.Sleep(200); // cycle_time = iSEM.GetCycleTime(); // Thread.Sleep(100 + Convert.ToInt32(cycle_time)); //} //else //{ // //窗口对焦 // //iSEM.SetReduced(402, 128, 800, 600); // //Thread.Sleep(200); // iSEM.CmdFocusRate(); // Thread.Sleep(200); // cycle_time = iSEM.GetCycleTime(); // Thread.Sleep(100 + Convert.ToInt32(cycle_time)); // //自动对焦 // if (!ImageFocus1(false)) // { // return false; // } // //恢复全屏 // //iSEM.CloseReduced(); // //Thread.Sleep(200); // cycle_time = iSEM.GetCycleTime(); // Thread.Sleep(100 + Convert.ToInt32(cycle_time)); //} LogManager.AddHardwareLog("========测量线程：进入内部观察，不对焦！", true); //增亮图像 iSEM.SetAutoVideoOff(); Thread.Sleep(200); float currentBright = iSEM.GetBrightness(); Thread.Sleep(200); float currentContrast = iSEM.GetContrast(); Thread.Sleep(200); iSEM.SetBrightness(currentBright + 2); Thread.Sleep(200); iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮 Thread.Sleep(200); } #endregion #region 拍照 if (!iSEM.SetMagnification(mag[n])) { arg.State = false; arg.Message = "移动到第一个点位置拍照失败"; SendMsg("1-35"); LogManager.AddHardwareLog("测量线程报错：第一个区域放大倍数" + mag[n].ToString() + "控制失败", false); return false; } LogManager.AddHardwareLog("========测量线程：移动到第一个点位置拍照完成！", true); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); set = mag[n]; current = iSEM.GetMagnification(); while (Math.Abs(current - set) > 1) { iSEM.SetMagnification(set); Thread.Sleep(200); current = iSEM.GetMagnification(); } //获取像素大小 lsize.Add(iSEM.GetPixelSize()); Thread.Sleep(200); String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1; arg.Picture_Information.Picture_FullPath = fileName7; arg.Picture_Information.Work_Status = "SEM"; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(200); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(200); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(200); //拍照前改变速度,延时 iSEM.CmdLineScan(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 100); if (!GetImage(fileName7)) { arg.State = false; arg.Message = "移动到第一个点位置失败"; SendMsg("1-35"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } LogManager.AddHardwareLog("========测量线程：移动到第一个点位置完成！", true); iSEM.CmdPixelScan(); Thread.Sleep(200); limg_path.Add(fileName7); arg.Picture_Information.Picture_FullPath = fileName7; arg.State = true; arg.Message = "移动到第一个点位置拍照成功"; SendMsg("1-35"); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 100); #endregion } #endregion if (hand_intervene == 1) { MessageBox.Show("Web返回数据移动是否正确？\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK); } } else { if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { // return false; } } else { //return false; } arg.State = false; arg.Message = "获取位置及放大倍数失败"; SendMsg("1-34"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } } ////14光束复位和Rotation关闭开关 //arg.Message = "光束复位成功"; //arg.State = true; //SendMsg("1-36"); iSEM.SetTiltAngleOff(); Thread.Sleep(200); iSEM.SetScanRotationOff(); Thread.Sleep(200); iSEM.SetBeamShiftX(0); Thread.Sleep(200); iSEM.SetBeamShiftY(0); Thread.Sleep(200); //判断是否停止进程 if (key_stop) { return false; } return true; } //第一个孔的测试过程 public bool FirstHole() { //设置拉直的放大倍数 LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数，放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), true); if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification)) { LogManager.AddHardwareLog("测量线程报错：第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败，放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), false); arg.Message = "测量线程报错：拉直放大倍数设置失败！"; arg.State = false; SendMsg("1-1"); return false; } float current = iSEM.GetMagnification(); while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1) { iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification); Thread.Sleep(200); current = iSEM.GetMagnification(); } arg.Message = "拉直放大倍数设置成功！"; arg.State = true; SendMsg("1-1"); Thread.Sleep(2000); //自动化流程-每个点都需要补偿54度 if (m_measureFile.MParam.Is_Photograph == false) { LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-倾斜补偿角度为54度", true); if (!TiltCorrection(54.0f)) { LogManager.AddHardwareLog("测量线程报错：倾斜补偿角度为54度失败", false); arg.Message = "角度补偿54度失败！"; arg.State = false; SendMsg("1-2"); return false; } arg.Message = "角度补偿54度成功！"; arg.State = true; SendMsg("1-2"); Thread.Sleep(1000); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } } // by sun：2是5/6类样品，不需要拉直 if (m_measureFile.MParam.SampleName != "2") { LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-拉直操作开始！", true); if (!Straighten_Handle()) { LogManager.AddHardwareLog("测量线程报错：第一个孔的测试过程-拉直操作失败。", true); return false; } LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-拉直操作结束！", true); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下。", true); return false; } } else { arg.Message = "拉直操作自动对焦成功！"; arg.State = true; SendMsg("1-3"); Thread.Sleep(1000); arg.Message = "拉直拍照成功！"; arg.Picture_Information.Picture_FullPath = ""; arg.State = true; SendMsg("1-4"); Thread.Sleep(1000); arg.Message = "拉直操作完成"; arg.State = true; SendMsg("1-5"); Thread.Sleep(1000); } //13. 自动 定位功能 LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-自动定位开始！", true); if (!GetPoistion()) { LogManager.AddHardwareLog("测量线程报错：自动定位失败，程序退出。", false); return false; } LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-自动定位结束！", true); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下。", true); return false; } //14.自动控制FIB切割 del by sun 2020-12-15 temp //if (m_measureFile.MParam.Is_Photograph == false) //{ // LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-14.自动控制FIB切割开始！", true); // if (!FIBCross()) // { // LogManager.AddHardwareLog("测量线程报错：自动控制FIB切割失败。", false); // return false; // } // LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-14.自动控制FIB切割结束！", true); //} //del by sun 2020-12-15 temp end //判断是否停止进程 if (key_stop) { return false; } //16.找到切割位置 if (m_measureFile.MParam.Is_Photograph == false) { LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-16.找到切割位置开始！", true); if (!FindCross()) { return false; } LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-16.找到切割位置结束！", true); //判断是否停止进程 if (key_stop) { return false; } } LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-17.自动控制SEM拍截面照开始", true); //将过程17最后的拍照图片提出给18步进行调用 List limg_path = new List(); List lsize = new List(); //17.自动控制SEM拍截面照 if (!ShotSection(ref limg_path, ref lsize)) { //return false; } LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-17.自动控制SEM拍截面照结束！", true); //判断是否停止进程 if (key_stop) { return false; } //这段是临时的 //arg.State = true; //arg.Message = "测量尺寸成功"; //SendMsg("1-40"); //18.自动层高分析 if (m_measureFile.MParam.Is_Photograph == false) { LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-18.自动层高分析开始", true); float size = iSEM.GetPixelSize(); int state = 1; wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state); if (state == 0) { arg.Message = "测量尺寸失败"; arg.State = false; SendMsg("1-40"); return false; } arg.State = true; arg.Message = "测量尺寸成功"; SendMsg("1-40"); LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-18.自动层高分析结束！", true); } //19.能谱分析 if (m_measureFile.MParam.EDS) { LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-19.能谱分析开始===" + m_measureFile.MParam.EDS, true); EDSAnalysis(); LogManager.AddHardwareLog("测量线程：第一个孔的测试过程-19.能谱分析结束===" + m_measureFile.MParam.EDS, true); } //20.复位 LogManager.AddHardwareLog("===========测量线程：20.复位开始", true); BeamShiftReset(); return true; } //非第一个孔的测试过程 public bool OtherHole() { //设置拉直的放大倍数 if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification)) { LogManager.AddHardwareLog("拉直放大倍数设置失败，程序退出。", true); arg.Message = "拉直放大倍数设置失败！"; arg.State = false; SendMsg("1-1"); return false; } float current = iSEM.GetMagnification(); while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1) { iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification); Thread.Sleep(200); current = iSEM.GetMagnification(); } arg.Message = "拉直放大倍数设置成功！"; arg.State = true; SendMsg("1-1"); Thread.Sleep(2000); //自动化流程-每个点都需要补偿54度 if (m_measureFile.MParam.Is_Photograph == false) { if (!TiltCorrection(54.0f)) { arg.Message = "角度补偿54度失败！"; arg.State = false; SendMsg("1-2"); return false; } arg.Message = "角度补偿54度成功！"; arg.State = true; SendMsg("1-2"); Thread.Sleep(2000); //判断是否停止进程 if (key_stop) { return false; } } if (m_measureFile.MParam.SampleName != "2") { if (!Straighten_Handle()) { LogManager.AddHardwareLog("测量线程报错：拉直操作失败。", true); return false; } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下。", true); return false; } } else { arg.Message = "拉直操作自动对焦成功！"; arg.State = true; SendMsg("1-3"); Thread.Sleep(1000); arg.Message = "拉直拍照成功！"; arg.Picture_Information.Picture_FullPath = ""; arg.State = true; SendMsg("1-4"); Thread.Sleep(1000); arg.Message = "拉直操作完成"; arg.State = true; SendMsg("1-5"); } //13. 自动 定位功能 if (!GetPoistion()) { return false; } //判断是否停止进程 if (key_stop) { return false; } //14.自动控制FIB切割 if (m_measureFile.MParam.Is_Photograph == false) { if (!FIBCross()) { return false; } } //判断是否停止进程 if (key_stop) { return false; } // 16.找到切割位置 if (m_measureFile.MParam.Is_Photograph == false) { if (!FindCross()) { return false; } //判断是否停止进程 if (key_stop) { return false; } } //将过程17最后的拍照图片提出给18步进行调用 List limg_path = new List(); List lsize = new List(); //17.自动控制SEM拍截面照 if (!ShotSection(ref limg_path, ref lsize)) { //return false; } //判断是否停止进程 if (key_stop) { return false; } //这段是临时的 //arg.State = true; //arg.Message = "测量尺寸成功"; //SendMsg("1-40"); //18.自动层高分析 if (m_measureFile.MParam.Is_Photograph == false) { float size = iSEM.GetPixelSize(); int state = 1; wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state); if (state == 0) { arg.Message = "测量尺寸失败"; arg.State = false; SendMsg("1-40"); return false; } arg.State = true; arg.Message = "测量尺寸成功"; SendMsg("1-40"); } //19.能谱分析 if (m_measureFile.MParam.EDS) { EDSAnalysis(); } //20.复位 del by sun 2020-12-15 //BeamShiftReset(); //del by sun 2020-12-15 end return true; } //测试完第一个孔后的样品台初始化操作。 //再调用CommonWork执行非第一个孔的测试过程 public bool OtherHole_Init() { CutHole currentHole = m_cutHoles[m_nWorkHoleNo]; #region 初始化 //1、不只拍照，且不是倾斜观测，则移动T轴 if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false) { //4. 控制样品台T轴归0，R轴变为坐标1、Z/M轴作为坐标2保存不变 if (!iSEM.SetStageGotoT(0)) { LogManager.AddHardwareLog("样品台归零失败", false); return false; } while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } } //2、如果是倾斜观测，则移动Z轴 if(m_measureFile.MParam.Title==true) { //4. 控制样品台T轴归0，R轴变为坐标1、Z/M轴作为坐标2保存不变 //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_measureFile.MParam.ZDistance/1000)) //20201109, Z轴降到安全的位置上 if(!iSEM.SetStageGotoZ(fSateyZ)) { LogManager.AddHardwareLog("测量线程报错：样品台Z回到安全位置失败", false); return false; } while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } } //3. 根据光镜坐标控制样品台移动 if (!iSEM.SetStageGotoR(currentHole.Position.R)) { //SendMsg("移动失败"); LogManager.AddHardwareLog("测量线程报错：样品台R旋转失败，目标R" + currentHole.Position.R.ToString(), false); return false; } LogManager.AddHardwareLog("移动R轴到="+ currentHole.Position.R.ToString(), true); while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y)) { //SendMsg("移动失败"); LogManager.AddHardwareLog("测量线程报错：样品台(X,Y)移动失败失败，目标（x，y）为(" + currentHole.Position.X.ToString()+"," +currentHole.Position.X.ToString()+")", false); return false; } LogManager.AddHardwareLog("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true); while (true) { Thread.Sleep(10000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //4、倾斜观测时恢复Z轴 if (m_measureFile.MParam.Title == true) { //4. 控制样品台T轴归0，R轴变为坐标1、Z/M轴作为坐标2保存不变 if (currentHole.Position.Z > 0.043) { LogManager.AddHardwareLog("测量线程报错：样品台Z过高，目标z" + currentHole.Position.Z.ToString(), false); return false; } if (!iSEM.SetStageGotoZ(currentHole.Position.Z)) { LogManager.AddHardwareLog("测量线程报错：样品台Z移动失败，目标z" + currentHole.Position.Z.ToString(), false); return false; } while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } } //5. 控制样品台，调整T轴54度、M/Z/R轴不变 if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false) { if (!iSEM.SetStageGotoT(54)) { LogManager.AddHardwareLog("测量线程报错：校正54度有误", true); return false; } while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //4、设置WD iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD); Thread.Sleep(1000); #endregion return true; } //初始化拉直操作 public bool Straighten_Handle() { if (m_measureFile.MParam.Title) { //倾斜样品台，SEM视野是黑色的 LogManager.AddHardwareLog("测量线程：恢复到工作位置后重新调亮图像。", true); if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm { LogManager.AddHardwareLog("测量线程报错：重新设置到标准工作距离失败。", false); return false; } Thread.Sleep(7000); //自动亮度对比度使用 } //1、自动对焦 LogManager.AddHardwareLog("测量线程报错：拉直操作前自动对焦开始", true); iSEM.SetReduced(402, 128, 340, 256); Thread.Sleep(200); //add by sun 2020-12-15 iSEM.CmdFocusRate(5); //add by sun 2020-12-15 end Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); iSEM.SetAutoVideoOff(); Thread.Sleep(200); iSEM.SetBrightness(50.0f); Thread.Sleep(200); iSEM.SetContrast(30.0f); Thread.Sleep(200); if (!ImageFocus1(false)) { LogManager.AddHardwareLog("测量线程报错：拉直操作自动对焦失败，程序退出。", false); arg.Message = "拉直操作自动对焦失败！"; arg.State = false; SendMsg("1-3"); return false; } iSEM.CloseReduced(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); iSEM.SetAutoVideoBrightnessAndContrast(); Thread.Sleep(5000); arg.Message = "拉直操作自动对焦成功！"; arg.State = true; SendMsg("1-3"); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下。", true); return false; } //2、拍张照片 String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0; LogManager.AddHardwareLog("测量线程：设置保存图像的是扫描速度保存图像" + fileName0, true); //拍照前改变速度,延时 iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); if (!GetImage(fileName0)) { LogManager.AddHardwareLog("测量线程报错：拉直拍照失败", false); arg.Message = "拉直拍照失败"; arg.State = false; SendMsg("1-4"); return false; } arg.Message = "拉直拍照成功！"; arg.Picture_Information.Picture_FullPath = fileName0; arg.State = true; SendMsg("1-4"); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) +100); //3、华为接口，获取旋转角度 float degree = 0; int direction = 0; int state = 1; wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state); LogManager.AddHardwareLog("测量线程：使用图像处理接口：样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true); LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true); LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true); if (state == 0) { LogManager.AddHardwareLog("测量线程：图像处理接口参数state返回为零" ,false); arg.Message = "图像处理接口参数state返回为零"; arg.State = false; SendMsg("1-5"); if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { return false; } return false; } if (direction == 2) { degree = -degree; } if (degree != 0) { //4、拉直，旋转R轴 LogManager.AddHardwareLog("测量线程：图像拉直，旋转角度" + degree.ToString(), true); //选择之前，先降Z轴 float Zpos = iSEM.GetStageAtZ(); Thread.Sleep(200); LogManager.AddHardwareLog("测量线程：当前Z轴位置" + Zpos.ToString() + "m", true); if (!iSEM.SetStageGotoZ(fSateyZ)) { LogManager.AddHardwareLog("测量线程报错：样品台Z回到安全位置失败", false); return false; } while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } iSEM.SetStageDeltaR(degree); while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } if (!iSEM.SetStageGotoZ(Zpos)) { LogManager.AddHardwareLog("测量线程报错：样品台Z回到安全位置失败", false); return false; } while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //4、设置WD iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD); Thread.Sleep(1000); } arg.Message = "拉直操作完成"; arg.State = true; SendMsg("1-5"); return true; } //角度补偿 public bool TiltCorrection(float a_fAngle) { if (!iSEM.SetTiltAngleOn()) { return false; } Thread.Sleep(200); //恢复原始状态 if (!iSEM.SetTiltAngle(a_fAngle)) { return false; } return true; } //拍图 public bool GetImage(String a_fileName) { //3. 获取分辨率 int[] ImageSize = iSEM.GetImageStore(); if (ImageSize[0] == 0 || ImageSize[1] == 0) { return false; } short width = (short)ImageSize[0]; short height = (short)ImageSize[1]; //4. 抓图 if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0)) { return false; } return true; } //拍图1 public bool GetImage1(String a_fileName) { //3. 获取分辨率 int[] ImageSize = iSEM.GetImageStore(); if (ImageSize[0] == 0 || ImageSize[1] == 0) { return false; } short width = (short)ImageSize[0]; short height = (short)ImageSize[1]; //4. 抓图 if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0)) { return false; } return true; } #region 算法设计 //执行自动对焦 public bool ImageFocus() { if (m_measureFile.MParam.FocusMode == 1)//手动 { if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成？", "确认消息", MessageBoxButtons.YesNo)) { } else { return false; } } else if (m_measureFile.MParam.FocusMode == 2)//自有自动 { //郝工增加自动对焦算法 //处理文件夹 if (Directory.Exists(focus_path)) { Directory.Delete(focus_path, true); } Thread.Sleep(3000); arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); //再创建文件夹 Directory.CreateDirectory(focus_path); //1、对焦参数类，2、输出工作距离 int wd = 0; //20201015 根据当前的工作距离重新计算对焦位置 float currentWd = iSEM.GetWorkingDistance(); //m_measureFile.MParam.AutoFocus.UP = currentWd * 1000000 - m_measureFile.MParam.AutoFocus.Step; //m_measureFile.MParam.AutoFocus.Down = currentWd * 1000000 + m_measureFile.MParam.AutoFocus.Step; Thread.Sleep(2000); float currentMag = iSEM.GetMagnification(); Thread.Sleep(2000); FocusParam pFoucs = new FocusParam(); if (currentMag <= m_measureFile.MParam.Photograph_Magnification) { pFoucs = m_measureFile.MParam.AutoFocus; pFoucs.UP = 5050; pFoucs.Down = 5150; pFoucs.Step = 50; pFoucs.fStep = 10; pFoucs.Range = 50; //4、设置WD iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD); Thread.Sleep(1000); } else { pFoucs = m_measureFile.MParam.AutoFocus; pFoucs.UP = 5000; pFoucs.Down = 5200; pFoucs.Step = 10; pFoucs.fStep = 5; pFoucs.Range = 50; //4、设置WD iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD); Thread.Sleep(1000); } //LogManager.AddHardwareLog("修改对焦参数", true); AutoFocus(pFoucs, out wd); LogManager.AddHardwareLog("自动调节算法输出"+ (wd * 0.00000001).ToString(), true); //设置工作距离 iSEM.SetWorkingDistance((float)(wd * 0.00000001)); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); //处理图片位置 //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName); } else if (m_measureFile.MParam.FocusMode == 3) //客户自动 { //后期和客户对接接口 List filenames = new List(); String retfilename = wr.Img_Auto_Focus(filenames); } else //蔡司自动对焦 { iSEM.CmdAutoFocusCoarse(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } iSEM.CmdAutoFocusFine(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } } return true; } //执行自动对焦 public bool ImageFocus1(Boolean Is_Stig) { if (m_measureFile.MParam.FocusMode == 1)//手动 { if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成？", "确认消息", MessageBoxButtons.YesNo)) { } else { return false; } } else if (m_measureFile.MParam.FocusMode == 2)//自有自动 { #region 执行蔡司自动对焦程序 //服务地址 string snumstr = @"http://192.168.1.101:8123"; // 调用方法；只对焦不消像散 if (Is_Stig) { string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr); if (focusstig != "success") { return false; } } else { string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr); if (onlyfocus != "success") { return false; } } #endregion } else if (m_measureFile.MParam.FocusMode == 3) //客户自动 { //后期和客户对接接口 List filenames = new List(); String retfilename = wr.Img_Auto_Focus(filenames); } else //蔡司自动对焦 { iSEM.CmdAutoFocusCoarse(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } iSEM.CmdAutoFocusFine(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } } return true; } //执行自动消像散 public bool ImageStig() { if (m_measureFile.MParam.FocusMode == 1)//手动 { if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成？", "确认消息", MessageBoxButtons.YesNo)) { } else { return false; } } else if (m_measureFile.MParam.FocusMode == 2)//自有自动 { //郝工增加自动对焦算法 //处理文件夹 if (Directory.Exists(StigX_path)) { Directory.Delete(StigX_path, true); } Thread.Sleep(3000); arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); //再创建文件夹 Directory.CreateDirectory(StigX_path); //1、对焦参数类，2、输出像散值 int stigX = 0; //根据当前的stigX重新计算像散值 float currentStigX = 0;// iSEM.GetAstigmatismX(); //m_measureFile.MParam.AutoStigX.Step = 10; //像散的步长为10 //m_measureFile.MParam.AutoStigX.UP = currentStigX - m_measureFile.MParam.AutoStigX.Step; //m_measureFile.MParam.AutoStigX.Down = currentStigX + m_measureFile.MParam.AutoStigX.Step; //设置工作距离 iSEM.SetAstigmatismX((float)0); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); //LogManager.AddHardwareLog("修改消像散参数", true); AutoStig(m_measureFile.MParam.AutoStigX, out stigX); LogManager.AddHardwareLog("自动消散算法输出X"+ (stigX * 0.01).ToString(), true); //设置工作距离 iSEM.SetAstigmatismX((float)(stigX * 0.01)); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); //处理图片位置 //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName); //处理文件夹 if (Directory.Exists(StigY_path)) { Directory.Delete(StigY_path, true); } Thread.Sleep(3000); arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); //再创建文件夹 Directory.CreateDirectory(StigY_path); //1、对焦参数类，2、输出像散值 int stigY = 0; //根据当前的stigX重新计算像散值 float currentStigY = 0;// iSEM.GetAstigmatismY(); //m_measureFile.MParam.AutoStigY.Step = 10; //像散的步长为10 //m_measureFile.MParam.AutoStigY.UP = m_measureFile.MParam.AutoStigY.; //m_measureFile.MParam.AutoStigY.Down = m_measureFile.MParam.AutoStigY.Step; iSEM.SetAstigmatismY((float)0); Thread.Sleep(2000); LogManager.AddHardwareLog("修改消像散参数", true); AutoStig(m_measureFile.MParam.AutoStigY, out stigY); LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true); //设置工作距离 iSEM.SetAstigmatismY((float)(stigY * 0.01)); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); } else if (m_measureFile.MParam.FocusMode == 3) //客户自动 { //后期和客户对接接口 List filenames = new List(); String retfilename = wr.Img_Auto_Focus(filenames); } else //蔡司自动对焦 { iSEM.CmdAutoFocusCoarse(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } iSEM.CmdAutoFocusFine(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } } return true; } //自动聚焦 public bool AutoFocus(FocusParam a_param, out int a_nWd) { a_nWd = 0; float wd = iSEM.GetWorkingDistance(); a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离 if (a_param == null) { LogManager.AddHardwareLog("空参数", true); return false; } string path = a_param.Path; if (!Directory.Exists(path)) { LogManager.AddHardwareLog("文件夹丢失", true); return false; } string path_coarse = a_param.Path + "\\Coarse"; if (!Directory.Exists(path_coarse)) { Directory.CreateDirectory(path_coarse); } string path_fine = a_param.Path + "\\Fine"; if (!Directory.Exists(path_fine)) { Directory.CreateDirectory(path_fine); } //1. 拍照 //1.1， 粗拍照 //1.1.1， 根据参数计算拍照次数 double nUp = a_param.UP * 100.0 ; double nDown = a_param.Down * 100.0; double nStep = a_param.Step * 100.0; double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5); LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true); //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString()); //粗拍照 for (int i = 0; i < nTimes; i++) { int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5); iSEM.SetWorkingDistance((float)(cWd * 0.00000001)); arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) +100); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() +"um"); String fileName = path_coarse + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(fileName)) { return false; } //arg.State = true; //arg.Message = "自动对焦"; //SendMsg("0-9"); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(3000); } //1.2， 选定细拍照的工作距离 int CorWd = 510000; ChooseBest(path_coarse,out CorWd); if (CorWd == -1) CorWd = 510000; else a_nWd = CorWd; //SendMsg("粗选工作距离wd = " + a_nWd.ToString() ); //1.3， 细拍照 if ( (CorWd - a_param.Range * 100.0) <=0) { return false; } double nfUp = CorWd - a_param.Range * 100.0; double nfStep = a_param.fStep * 100.0; double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5); //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString()); for (int i = 0; i < nfTimes; i++) { int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5); iSEM.SetWorkingDistance((float)(cWd * 0.00000001)); arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time)+100); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() + "um"); String fileName = path_fine + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(fileName)) { return false; } //arg.State = true; //arg.Message = "自动对焦"; //SendMsg("0-9"); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(2000); } int fineWd = CorWd; ChooseBest(path_fine, out fineWd); //SendMsg("wd fine max = " + fineWd.ToString()); if (fineWd == -1) a_nWd = CorWd; else a_nWd = fineWd; //SendMsg("细选工作距离wd = " + a_nWd.ToString()); //arg.State = true; //arg.Message = "自动对焦"; //SendMsg(step_code); return true; } //自动聚焦1 public bool AutoFocus1(FocusParam a_param, out int a_nWd) { a_nWd = 0; float wd = iSEM.GetWorkingDistance(); a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离 if (a_param == null) { LogManager.AddHardwareLog("空参数", true); return false; } string path = a_param.Path; if (!Directory.Exists(path)) { LogManager.AddHardwareLog("文件夹丢失", true); return false; } string path_coarse = a_param.Path + "\\Coarse"; if (!Directory.Exists(path_coarse)) { Directory.CreateDirectory(path_coarse); } string path_fine = a_param.Path + "\\Fine"; if (!Directory.Exists(path_fine)) { Directory.CreateDirectory(path_fine); } //1. 拍照 //1.1， 粗拍照 //1.1.1， 根据参数计算拍照次数 double nUp = a_param.UP * 100.0; double nDown = a_param.Down * 100.0; double nStep = a_param.Step * 100.0; double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5); LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true); //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString()); //粗拍照 for (int i = 0; i < nTimes; i++) { int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5); iSEM.SetWorkingDistance((float)(cWd * 0.00000001)); //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) + 50); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() +"um"); String fileName = path_coarse + "\\" + cWd.ToString() + ".tif"; //arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage1(fileName)) { return false; } //arg.State = true; //arg.Message = "自动对焦"; //SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(3000); } //1.2， 选定细拍照的工作距离 int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5); ChooseBest(path_coarse, out CorWd); if (CorWd == -1) CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5); else a_nWd = CorWd; //SendMsg("粗选工作距离wd = " + a_nWd.ToString() ); //1.3， 细拍照 if ((CorWd - a_param.Range * 100.0) <= 0) { return false; } double nfUp = CorWd - a_param.Range * 100.0; double nfStep = a_param.fStep * 100.0; double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5); //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString()); for (int i = 0; i < nfTimes; i++) { int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5); iSEM.SetWorkingDistance((float)(cWd * 0.00000001)); //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() + "um"); String fileName = path_fine + "\\" + cWd.ToString() + ".tif"; //arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage1(fileName)) { return false; } //arg.State = true; //arg.Message = "自动对焦"; //SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(2000); } int fineWd = CorWd; ChooseBest(path_fine, out fineWd); //SendMsg("wd fine max = " + fineWd.ToString()); if (fineWd == -1) a_nWd = CorWd; else a_nWd = fineWd; //SendMsg("细选工作距离wd = " + a_nWd.ToString()); //arg.State = true; //arg.Message = "自动对焦"; //SendMsg("0-9"); return true; } //自动消像散 AutoStig public bool AutoStig(FocusParam a_param, out int a_nWd) { a_nWd = 0; float wd = 0; if (a_param.TYPE == 2) { wd = iSEM.GetAstigmatismX(); } else if (a_param.TYPE == 3) { wd = iSEM.GetAstigmatismY(); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离 if (a_param == null) { LogManager.AddHardwareLog("空参数", true); return false; } string path = a_param.Path; if (!Directory.Exists(path)) { LogManager.AddHardwareLog("文件夹丢失", true); return false; } string path_coarse = a_param.Path + "\\Coarse"; if (!Directory.Exists(path_coarse)) { Directory.CreateDirectory(path_coarse); } string path_fine = a_param.Path + "\\Fine"; if (!Directory.Exists(path_fine)) { Directory.CreateDirectory(path_fine); } //1. 拍照 //1.1， 粗拍照 //1.1.1， 根据参数计算拍照次数 double nUp = a_param.UP * 100.0; double nDown = a_param.Down * 100.0; double nStep = a_param.Step * 100.0; double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5); LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true); //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString()); //粗拍照 for (int i = 0; i < nTimes; i++) { int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5); if (a_param.TYPE == 2) { iSEM.SetAstigmatismX((float)(cWd * 0.01)); } else if (a_param.TYPE == 3) { iSEM.SetAstigmatismY((float)(cWd * 0.01)); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) +100); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() +"um"); String fileName = path_coarse + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(fileName)) { return false; } arg.State = true; arg.Message = "自动像散"; SendMsg("0-8"); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(3000); } //1.2， 选定细拍照的工作距离 int CorWd; ChooseBest(path_coarse, out CorWd); if (CorWd == -1) { a_nWd = 0; } else { a_nWd = CorWd; } //SendMsg("粗选工作距离wd = " + a_nWd.ToString() ); //1.3， 细拍照 if ((CorWd - a_param.Range * 100.0) <= -10000) { return false; } double nfUp = 0; if (a_param.Range >= 0) nfUp = CorWd - a_param.Range * 100.0; else nfUp = CorWd + a_param.Range * 100.0; double nfStep = a_param.fStep * 100.0; double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5); //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString()); for (int i = 0; i < nfTimes; i++) { int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5); if (a_param.TYPE == 2) { iSEM.SetAstigmatismX((float)(cWd * 0.01)); } else if (a_param.TYPE == 3) { iSEM.SetAstigmatismY((float)(cWd * 0.01)); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) +100); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() + "um"); String fileName = path_fine + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(fileName)) { return false; } arg.State = true; arg.Message = "自动像散"; SendMsg("0-8"); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(2000); } int fineWd = CorWd; ChooseBest(path_fine, out fineWd); //SendMsg("wd fine max = " + fineWd.ToString()); if(fineWd == -1) a_nWd = CorWd; else a_nWd = fineWd; //SendMsg("细选工作距离wd = " + a_nWd.ToString()); //arg.State = true; //arg.Message = "自动像散"; //SendMsg(step_code); return true; } //执行自动消像散1 public bool ImageStig1() { if (m_measureFile.MParam.FocusMode == 1)//手动 { if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成？", "确认消息", MessageBoxButtons.YesNo)) { } else { return false; } } else if (m_measureFile.MParam.FocusMode == 2)//自有自动 { //郝工增加自动对焦算法 //处理文件夹 if (Directory.Exists(StigX_path)) { Directory.Delete(StigX_path, true); } Thread.Sleep(3000); arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(200); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(200); //再创建文件夹 Directory.CreateDirectory(StigX_path); //1、对焦参数类，2、输出像散值 int stigX = 0; //根据当前的stigX重新计算像散值 float currentStigX = 0;// iSEM.GetAstigmatismX(); //m_MsParam.AutoStigX.Step = 10; //像散的步长为10 //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step; //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step; //设置工作距离 currentStigX = iSEM.GetAstigmatismX(); Thread.Sleep(1000); FocusParam pFocus = new FocusParam(); pFocus = m_measureFile.MParam.AutoStigX; float old_up = m_measureFile.MParam.AutoStigX.UP; float old_down = m_measureFile.MParam.AutoStigX.Down; float setvalue = m_measureFile.MParam.AutoStigX.UP; pFocus.UP = currentStigX - setvalue; pFocus.Down = currentStigX + setvalue; //m_measureFile.MParam.AutoStigX.Step = 1; //m_measureFile.MParam.AutoStigX.Range = (float)0.5; //m_measureFile.MParam.AutoStigX.fStep = (float)0.1; LogManager.AddHardwareLog("消像散参数: up = "+pFocus.UP+",down = " + pFocus.Down+ ",step =" + pFocus.Step + ",rang ="+ pFocus.Range + ",fstep = " + pFocus.fStep, true); //LogManager.AddHardwareLog("修改消像散参数", true); AutoStig1(pFocus, out stigX); m_measureFile.MParam.AutoStigX.UP = old_up; m_measureFile.MParam.AutoStigX.Down = old_down; LogManager.AddHardwareLog("自动消散算法输出X" + (stigX * 0.01).ToString(), true); //设置工作距离 iSEM.SetAstigmatismX((float)(stigX * 0.01)); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); //处理图片位置 //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName); //处理文件夹 if (Directory.Exists(StigY_path)) { Directory.Delete(StigY_path, true); } Thread.Sleep(3000); arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(200); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(200); //再创建文件夹 Directory.CreateDirectory(StigY_path); //1、对焦参数类，2、输出像散值 int stigY = 0; //根据当前的stigX重新计算像散值 float currentStigY = 0;// iSEM.GetAstigmatismY(); //m_MsParam.AutoStigY.Step = 10; //像散的步长为10 //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.; //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step; currentStigY = iSEM.GetAstigmatismY(); Thread.Sleep(1000); //m_measureFile.MParam.AutoStigY.UP = currentStigY - setvalue; //m_measureFile.MParam.AutoStigY.Down = currentStigY + setvalue; //m_measureFile.MParam.AutoStigY.Step = 1; //m_measureFile.MParam.AutoStigY.Range = (float)0.5; //m_measureFile.MParam.AutoStigY.fStep = (float)0.1; FocusParam pFocusY = new FocusParam(); pFocusY = m_measureFile.MParam.AutoStigY; float old_upY = m_measureFile.MParam.AutoStigY.UP; float old_downY = m_measureFile.MParam.AutoStigY.Down; //float setvalue = m_measureFile.MParam.AutoStigX.UP; pFocusY.UP = currentStigY - setvalue; pFocusY.Down = currentStigY + setvalue; LogManager.AddHardwareLog("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true); AutoStig1(pFocusY, out stigY); m_measureFile.MParam.AutoStigY.UP = old_upY; m_measureFile.MParam.AutoStigY.Down = old_downY; LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true); //设置工作距离 iSEM.SetAstigmatismY((float)(stigY * 0.01)); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); } else if (m_measureFile.MParam.FocusMode == 3) //客户自动 { //后期和客户对接接口 List filenames = new List(); String retfilename = wr.Img_Auto_Focus(filenames); } else //蔡司自动对焦 { iSEM.CmdAutoFocusCoarse(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } iSEM.CmdAutoFocusFine(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } } return true; } //自动消像散 AutoStig1 public bool AutoStig1(FocusParam a_param, out int a_nWd) { a_nWd = 0; float wd = 0; if (a_param.TYPE == 2) { wd = iSEM.GetAstigmatismX(); } else if (a_param.TYPE == 3) { wd = iSEM.GetAstigmatismY(); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离 if (a_param == null) { LogManager.AddHardwareLog("空参数", true); return false; } string path = a_param.Path; if (!Directory.Exists(path)) { LogManager.AddHardwareLog("文件夹丢失", true); return false; } string path_coarse = a_param.Path + "\\Coarse"; if (!Directory.Exists(path_coarse)) { Directory.CreateDirectory(path_coarse); } string path_fine = a_param.Path + "\\Fine"; if (!Directory.Exists(path_fine)) { Directory.CreateDirectory(path_fine); } //1. 拍照 //1.1， 粗拍照 //1.1.1， 根据参数计算拍照次数 double nUp = a_param.UP * 100.0; double nDown = a_param.Down * 100.0; double nStep = a_param.Step * 100.0; double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5); LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true); //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString()); //粗拍照 for (int i = 0; i < nTimes; i++) { int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5); if (a_param.TYPE == 2) { iSEM.SetAstigmatismX((float)(cWd * 0.01)); } else if (a_param.TYPE == 3) { iSEM.SetAstigmatismY((float)(cWd * 0.01)); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) + 100); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() +"um"); String fileName = path_coarse + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage1(fileName)) { return false; } //arg.State = true; //arg.Message = "自动像散"; //SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(3000); } //1.2， 选定细拍照的工作距离 int CorWd; ChooseBest(path_coarse, out CorWd); if (CorWd == -1) { a_nWd = 0; } else { a_nWd = CorWd; } //SendMsg("粗选工作距离wd = " + a_nWd.ToString() ); //1.3， 细拍照 if ((CorWd - a_param.Range * 100.0) <= -10000) { return false; } double nfUp = 0; if (a_param.Range >= 0) nfUp = CorWd - a_param.Range * 100.0; else nfUp = CorWd + a_param.Range * 100.0; double nfStep = a_param.fStep * 100.0; double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5); //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString()); for (int i = 0; i < nfTimes; i++) { int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5); if (a_param.TYPE == 2) { iSEM.SetAstigmatismX((float)(cWd * 0.01)); } else if (a_param.TYPE == 3) { iSEM.SetAstigmatismY((float)(cWd * 0.01)); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) + 100); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() + "um"); String fileName = path_fine + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage1(fileName)) { return false; } //arg.State = true; //arg.Message = "自动像散"; //SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(2000); } int fineWd = CorWd; ChooseBest(path_fine, out fineWd); //SendMsg("wd fine max = " + fineWd.ToString()); if (fineWd == -1) a_nWd = CorWd; else a_nWd = fineWd; //SendMsg("细选工作距离wd = " + a_nWd.ToString()); //arg.State = true; //arg.Message = "自动像散"; //SendMsg("0-9"); return true; } //自动FIB对焦 AutoFIBFocus public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code) { a_nWd = 0; float wd = 0; if (a_param.TYPE == 4) { wd = iSEM.GetFIBObjectivePotential(); } else { LogManager.AddHardwareLog("FIB自动聚焦参数设置有误", true); return false; } a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离 if (a_param == null) { LogManager.AddHardwareLog("空参数", true); return false; } string path = a_param.Path; if (!Directory.Exists(path)) { LogManager.AddHardwareLog("文件夹丢失", true); return false; } string path_coarse = a_param.Path + "\\Coarse"; if (!Directory.Exists(path_coarse)) { Directory.CreateDirectory(path_coarse); } string path_fine = a_param.Path + "\\Fine"; if (!Directory.Exists(path_fine)) { Directory.CreateDirectory(path_fine); } //1. 拍照 //1.1， 粗拍照 //1.1.1， 根据参数计算拍照次数 double nUp = a_param.UP * 100.0; double nDown = a_param.Down * 100.0; double nStep = a_param.Step * 100.0; double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5); LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true); //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString()); //粗拍照 for (int i = 0; i < nTimes; i++) { int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5); if (a_param.TYPE == 4) { iSEM.SetFIBObjectivePotential((float)(cWd * 0.01)); } else { LogManager.AddHardwareLog("FIB对焦参数设置有误，对焦类型错", true); return false; } //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) +100); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() +"um"); String fileName = path_coarse + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(fileName)) { return false; } arg.State = true; arg.Message = "FIB自动对焦"; SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(3000); } //1.2， 选定细拍照的工作距离 int CorWd; ChooseBest(path_coarse, out CorWd); a_nWd = CorWd; //SendMsg("粗选工作距离wd = " + a_nWd.ToString() ); //1.3， 细拍照 if ((CorWd - a_param.Range * 100.0) <0) { return false; } double nfUp = CorWd - a_param.Range * 100.0; double nfStep = a_param.fStep * 100.0; double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5); //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString()); for (int i = 0; i < nfTimes; i++) { int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5); if (a_param.TYPE == 4) { iSEM.SetFIBObjectivePotential((float)(cWd * 0.01)); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) +100); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() + "um"); String fileName = path_fine + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(fileName)) { return false; } arg.State = true; arg.Message = "FIB自动对焦"; SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(2000); } int fineWd; ChooseBest(path_fine, out fineWd); //SendMsg("wd fine max = " + fineWd.ToString()); a_nWd = fineWd; //SendMsg("细选工作距离wd = " + a_nWd.ToString()); return true; } //LoG算子计算 private double LoGMean(string a_strImgPath) { //读入Img文件 if (!File.Exists(a_strImgPath)) { return 0; } Mat src, gray_src; int kernel_size = 3; src = Cv2.ImRead(a_strImgPath); gray_src = new Mat(); src.CvtColor(ColorConversionCodes.BGR2GRAY); Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10)); Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel); Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0); Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size); Cv2.ConvertScaleAbs(src, src); //图像的平均灰度 double meanValue = 0.0; meanValue = Cv2.Mean(src)[0]; return meanValue; } //梯度计算 private double Tenengrad(string a_strImgPath) { //读入Img文件 if (!File.Exists(a_strImgPath)) { return 0; } Mat src; src = Cv2.ImRead(a_strImgPath); src.CvtColor(ColorConversionCodes.BGR2GRAY); Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10)); Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel); Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0); Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1); //图像的平均灰度 double meanValue = 0.0; meanValue = Cv2.Mean(src)[0]; return meanValue; } //梯度计算 private double TTgrad(string a_strImgPath) { //读入Img文件 if (!File.Exists(a_strImgPath)) { return 0; } Mat src; src = Cv2.ImRead(a_strImgPath); src.CvtColor(ColorConversionCodes.BGR2GRAY); Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10)); Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel); Mat scalex = new Mat(); Mat scaley = new Mat(); Cv2.Scharr(src, src, src.Depth(), 1, 0); Cv2.ConvertScaleAbs(src, scalex); Cv2.Scharr(src, src, src.Depth(), 0, 1); Cv2.ConvertScaleAbs(src, scaley); Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src); //图像的平均灰度 double meanValue = 0.0; meanValue = Cv2.Mean(src)[0]; return meanValue; } //三选二算法 private bool ChooseBest(string a_strImgPath, out int a_nWd) { a_nWd = -1; var files = Directory.GetFiles(a_strImgPath, "*.tif"); float[] values = new float[files.Length]; double smax1 = LoGMean(files[0]); int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0])); double smax2 = Tenengrad(files[0]); int wdmax2 = wdmax1; double smax3 = TTgrad(files[0]); int wdmax3 = wdmax1; int x = 0; foreach (var file in files) { int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file)); double svalue1 = LoGMean(file); double svalue2 = Tenengrad(file); double svalue3 = TTgrad(file); if (smax1 < svalue1) { smax1 = svalue1; wdmax1 = wd; } if (smax2 < svalue2) { smax2 = svalue2; wdmax2 = wd; } if (smax3 < svalue3) { smax3 = svalue3; wdmax3 = wd; } x++; } //SendMsg("LoG = " + wdmax1.ToString() + "，梯度 = " + wdmax2.ToString() + "，滤波 = " + wdmax3.ToString()); if (wdmax1 == wdmax2 || wdmax1 == wdmax3) { a_nWd = wdmax1; //SendMsg("焦距 = " + wdmax1.ToString()); } else if (wdmax1 == wdmax2 || wdmax2 == wdmax3) { a_nWd = wdmax2; //SendMsg("焦距 = " + wdmax2.ToString()); } else if (wdmax3 == wdmax2 || wdmax1 == wdmax3) { a_nWd = wdmax3; //SendMsg("焦距 = " + wdmax3.ToString()); } else { //SendMsg("对焦失败。"); return false; } return true; } //移动到像素位置，这里要靠移动样品台实现，当位移量小于3um时，不予移动 bool MoveToPixByMoveStage(float xc, float yc) { //单位是m/pix float XpixSize = iSEM.GetPixelSize(); LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true); float YpixSize = iSEM.GetPixelSize();///(float)m_measureFile.MParam.PixelSizeCor); LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true); Thread.Sleep(500); //0:width, 1:height int[] imageSize = iSEM.GetImageStore(); int width = imageSize[0] / 2; int height = imageSize[1] / 2; LogManager.AddHardwareLog("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true); LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true); float deltX = (xc - (float)width) * XpixSize; float deltY = (yc - (float)height) * YpixSize; LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true); LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true); float xpCur = iSEM.GetStageAtX(); float ypCur = iSEM.GetStageAtY(); LogManager.AddHardwareLog("当前位置（" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true); float xpNew = xpCur - deltX; float ypNew = ypCur + deltY; LogManager.AddHardwareLog("目标位置（" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true); //计算光束偏移值： //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现 { LogManager.AddHardwareLog("X方向移动样品台", true); if (!iSEM.SetStageGotoX(xpNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } } //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现 { LogManager.AddHardwareLog("Y方向移动样品台", true); if (!iSEM.SetStageGotoY(ypNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } } return true; } //移动到像素位置 bool MoveToPix(float xc, float yc) { //单位是m/pix float XpixSize = iSEM.GetPixelSize(); LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel",true); float YpixSize = (XpixSize/(float)m_measureFile.MParam.PixelSizeCor); LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true); Thread.Sleep(200); //0:width, 1:height int[] imageSize = iSEM.GetImageStore(); int width = imageSize[0]/2; int height = imageSize[1]/2; LogManager.AddHardwareLog("目标像素是(" + xc.ToString()+ ","+ yc.ToString() + ")", true); LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true); float deltX = (xc - (float)width) * XpixSize; float deltY = (yc - (float)height) * YpixSize; LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true); LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true); float xpCur = iSEM.GetStageAtX(); Thread.Sleep(200); float ypCur = iSEM.GetStageAtY(); LogManager.AddHardwareLog("当前位置（" + xpCur.ToString()+ "," + ypCur.ToString() + "),单位m", true); float xpNew = xpCur - deltX; float ypNew = ypCur + deltY; LogManager.AddHardwareLog("目标位置（" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true); //计算最大偏移量 float beamXCur = iSEM.GetBeamShiftX();//单位是% Thread.Sleep(200); iSEM.SetBeamShiftX(100); Thread.Sleep(200); float beamXMax = iSEM.GetBeamOffsetX();//单位是m Thread.Sleep(200); iSEM.SetBeamShiftX(beamXCur); Thread.Sleep(200); //计算光束偏移值： float beamX = iSEM.GetBeamOffsetX(); LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true); beamX = (-deltX + beamX); LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true); if( ((beamX <= beamXMax) && (beamX >=0)) || ((beamX >= -beamXMax)&& (beamX < 0))) { LogManager.AddHardwareLog("X方向移动光束", true); float beamXShift = beamX * 100 / beamXMax; LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true); if (!iSEM.SetBeamShiftX(beamXShift)) //if (!iSEM.SetBeamOffsetX(beamX)) { LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true); return false; } } else if(deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现 { LogManager.AddHardwareLog("X方向移动样品台", true); if (!iSEM.SetStageGotoX(xpNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } } float beamY = iSEM.GetBeamOffsetY(); LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true); beamY = (-deltY + beamY); LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true); //计算最大偏移量 float beamYCur = iSEM.GetBeamShiftY();//单位是% Thread.Sleep(200); iSEM.SetBeamShiftY(100); Thread.Sleep(200); float beamYMax = iSEM.GetBeamOffsetY();//单位是m Thread.Sleep(200); iSEM.SetBeamShiftY(beamYCur); Thread.Sleep(200); if (((beamY <= beamYMax) && (beamY >= 0)) || ((beamY >= -beamYMax) && (beamY < 0))) { LogManager.AddHardwareLog("Y方向移动光束", true); float beamYShift = beamY * 100 / beamYMax; LogManager.AddHardwareLog("Y方向光束偏移量" + beamYShift.ToString() + "%", true); //if(!iSEM.SetBeamOffsetY(beamY)) if (!iSEM.SetBeamShiftY(beamYShift)) { LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true); return false; } } else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现 { LogManager.AddHardwareLog("Y方向移动样品台", true); if (!iSEM.SetStageGotoY(ypNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败"; //arg.State = true; //SendMsg("1-7"); } return true; } //自动亮度对比度调节 //自动亮度对比度 public bool AutoBC(String step) { arg.Message = "自动亮度对比度"; arg.State = true; SendMsg("1-10"); iSEM.SetAutoBright(100); iSEM.SetAutoContrast(100); //LogManager.AddHardwareLog("FIB模式自动亮度目标51.5，自动对比度目标35.", true); if (!iSEM.SetAutoVideoBrightnessAndContrast()) { LogManager.AddHardwareLog("开始设置自动亮度、对比度失败，程序退出。", true); return false; } Thread.Sleep(5000); int i = 0; float bright = iSEM.GetBrightness(); float contrast = iSEM.GetContrast(); //最多调节30s，30s没调节好，认为调节失败 for (i = 0; i < 5; i++) { bright = iSEM.GetBrightness(); contrast = iSEM.GetContrast(); if ((bright >= 40 && bright <= 60) && (contrast >= 35 && contrast <= 40)) break; Thread.Sleep(5000); } bright = iSEM.GetBrightness(); contrast = iSEM.GetContrast(); if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40)) && i == 5) { LogManager.AddHardwareLog("亮度对比度调节时间过长", true); return false; } iSEM.SetAutoBright(100); iSEM.SetAutoContrast(100); //LogManager.AddHardwareLog("SEM模式自动亮度目标50，自动对比度目标30.", true); return true; } //执行FIB自动对焦，FIBFocus //执行自动消像散 public bool FIBFocus(String step_code) { if (m_measureFile.MParam.FocusMode == 1)//手动 { if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成？", "确认消息", MessageBoxButtons.YesNo)) { } else { return false; } } else if (m_measureFile.MParam.FocusMode == 2)//自有自动 { //郝工增加自动对焦算法 //处理文件夹 if (Directory.Exists(FIBfocus_path)) { Directory.Delete(FIBfocus_path, true); } Thread.Sleep(3000); arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); //再创建文件夹 Directory.CreateDirectory(FIBfocus_path); //1、对焦参数类，2、输出对焦值 int FIBFocus = 0; //根据当前的stigX重新计算像散值 float currentFIBFocus = iSEM.GetFIBObjectivePotential(); //m_measureFile.MParam.FIBFocus.Step = 10; //像散的步长为10 m_measureFile.MParam.FIBFocus.UP = currentFIBFocus - m_measureFile.MParam.FIBFocus.Step; m_measureFile.MParam.FIBFocus.Down = currentFIBFocus + m_measureFile.MParam.FIBFocus.Step; LogManager.AddHardwareLog("修改FIB自动对焦参数", true); AutoFIBFocus(m_measureFile.MParam.FIBFocus, out FIBFocus, step_code); //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true); //设置工作距离 iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01)); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); //处理图片位置 //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName); } else if (m_measureFile.MParam.FocusMode == 3) //客户自动 { //后期和客户对接接口 List filenames = new List(); String retfilename = wr.Img_Auto_Focus(filenames); } else //蔡司自动对焦 { iSEM.CmdAutoFocusCoarse(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } iSEM.CmdAutoFocusFine(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } } return true; } /// 图像拉直算法 /// /// 倾斜角度 /// 圆心坐标x /// 圆心坐标y /// 倾斜情况下帧图的坐标x /// 倾斜情况下帧图的坐标y /// 复位到原位置需要移动的x值(返回值) /// 复位到原位置需要移动的y值(返回值) /// public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy) { try { float xr = x1 - x0;//倾斜图到中心的距离差x float yr = y1 - y0;//倾斜图到中心的距离差y float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度 //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度 float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度 float k_S = k - Slope;//通过夹角差求x2,y2 //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R); //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R); float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R); float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R); if (Slope > 0 || Slope < 0) { Hx = x0 + x2; Hy = y0 + y2; } else { Hx = 0; Hy = 0; } return true; } catch (Exception) { return false; } } // 放大倍数差校正 public bool MagComp(float oldMag, float newMag) { //开启电压校正时进行电压校正 if (m_measureFile.MParam.MagComp) { int oldLevel = -1, newLevel = -1; float deltX = 0, deltY = 0; if (oldMag < m_measureFile.MParam.MagRange1) { oldLevel = 1; } else if ((oldMag <= m_measureFile.MParam.MagRange2) && (oldMag > m_measureFile.MParam.MagRange1)) { oldLevel = 2; } else if ((oldMag <= m_measureFile.MParam.MagRange3) && (oldMag > m_measureFile.MParam.MagRange2)) { oldLevel = 3; } else if ((oldMag <= m_measureFile.MParam.MagRange4) && (oldMag > m_measureFile.MParam.MagRange3)) { oldLevel = 4; } if (newMag < m_measureFile.MParam.MagRange1) { newLevel = 1; } else if ((newMag <= m_measureFile.MParam.MagRange2) && (newMag > m_measureFile.MParam.MagRange1)) { newLevel = 2; } else if ((newMag <= m_measureFile.MParam.MagRange3) && (newMag > m_measureFile.MParam.MagRange2)) { newLevel = 3; } else if ((newMag <= m_measureFile.MParam.MagRange4) && (newMag > m_measureFile.MParam.MagRange3)) { newLevel = 4; } if (oldLevel != newLevel) { if (oldLevel == 1) { switch (newLevel) { case 1: break; case 2: deltX = m_measureFile.MParam.MagCompX1; deltY = m_measureFile.MParam.MagCompY1; break; case 3: deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2; deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2; break; case 4: deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3; deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3; break; } } else if (oldLevel == 2) { switch (newLevel) { case 1: deltX = -m_measureFile.MParam.MagCompX1; deltY = -m_measureFile.MParam.MagCompY1; break; case 2: break; case 3: deltX = m_measureFile.MParam.MagCompX2; deltY = m_measureFile.MParam.MagCompY2; break; case 4: deltX = m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3; deltY = m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3; break; } } else if (oldLevel == 3) { switch (newLevel) { case 1: deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2; deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2; break; case 2: deltX = -m_measureFile.MParam.MagCompX2; deltY = -m_measureFile.MParam.MagCompY2; break; case 3: break; case 4: deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3; deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompX3; break; } } else if (oldLevel == 4) { switch (newLevel) { case 1: deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3; deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3; break; case 2: deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3; deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3; break; case 3: deltX = -m_measureFile.MParam.MagCompX3; deltY = -m_measureFile.MParam.MagCompY3; break; case 4: break; } } //通过移动光束校正便宜量 //单位是m/pix float pixSize = iSEM.GetPixelSize(); LogManager.AddHardwareLog("像素尺寸=" + pixSize.ToString() + "m/pixel", true); Thread.Sleep(500); float xpCur = iSEM.GetStageAtX(); float ypCur = iSEM.GetStageAtY(); LogManager.AddHardwareLog("当前位置（" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true); float xpNew = xpCur - deltX; float ypNew = ypCur + deltY; LogManager.AddHardwareLog("目标位置（" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true); //计算最大偏移量 float beamXCur = iSEM.GetBeamShiftX();//单位是% iSEM.SetBeamShiftX(100); float beamXMax = iSEM.GetBeamOffsetX();//单位是m iSEM.SetBeamShiftX(beamXCur); //计算光束偏移值： float beamX = iSEM.GetBeamOffsetX(); LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true); beamX = (-deltX + beamX); LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true); if (beamX < beamXMax || beamX < -beamXMax) { LogManager.AddHardwareLog("X方向移动光束", true); float beamXShift = beamX * 100 / beamXMax; if (!iSEM.SetBeamShiftX(beamXShift)) { LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true); return false; } } else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现 { LogManager.AddHardwareLog("X方向移动样品台", true); if (!iSEM.SetStageGotoX(xpNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } } float beamY = iSEM.GetBeamOffsetY(); LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true); beamY = (-deltY + beamY); LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true); //计算最大偏移量 float beamYCur = iSEM.GetBeamShiftY();//单位是% iSEM.SetBeamShiftY(100); float beamYMax = iSEM.GetBeamOffsetY();//单位是m iSEM.SetBeamShiftY(beamYCur); if (beamY < beamYMax || beamY < -beamYMax) { LogManager.AddHardwareLog("Y方向移动光束", true); float beamYShift = beamY * 100 / beamYMax; if (!iSEM.SetBeamShiftY(beamY)) { LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true); return false; } } else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现 { LogManager.AddHardwareLog("Y方向移动样品台", true); if (!iSEM.SetStageGotoY(ypNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败"; //arg.State = true; //SendMsg("1-7"); } } } return true; } #endregion #region 测试程序 //最后保存测量数据-测量文件、测量状态，m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success. //中间停止更新状态为Unmeasured,过程中return false时，更新状态为failed,保存测量文件 //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成？", "确认消息", MessageBoxButtons.YesNo)) //{ // SendMsg("拍摄照片完成"); // //return true; //} //else //{ // SendMsg("拍摄照片失败"); // return false; //} //SendMsg("图像校正36度"); ////3.设置SEM角度补偿cos36度 //if (!TiltCorrection(36)) //{ // return false; //} //Thread.Sleep(3000); //string fn; //用宏抓一般图 //Thread.Sleep(5000); //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic; //SendMsg("用宏抓一般图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(5000); ////用宏抓好图 //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic; //SendMsg("用宏抓好图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(30000); //Thread.Sleep(10000); //WorkingFolder = m_measureFile.FilePath; //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6; //SendMsg("SEM拍照存储到" + fileName6); //if (!GetImage(ImageMode.SEM, fileName6)) //{ // SendMsg("SEM拍照失败"); // return false; //} ////用宏抓标志图 //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif; //SendMsg("用宏抓标志图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(30000); //Thread.Sleep(5000); //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic; //SendMsg("用宏抓一般图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(5000); //SendMsg("所有图结束"); ////17.自动控制SEM拍截面照 //{ // //1.控制SEM放大到指定参数大小范围，6000x // if (!iSEM.SetMagnification(6000)) // { // return false; // } // //2.控制SEM自动对焦、消像散、亮度、对比度 // if (!MeasParam.FocusMode) // { // //弹出手动对焦的窗口 // } // else // { // //调用自动对焦模块 // } // //3.设置SEM角度补偿cos36度 // if (!TiltCorrection(36)) // { // return false; // } // //4.控制SEM拍照 // //5.保存照片4 // String fileName5 = WorkingFolder + ImageName5; // if (!GetImage(ImageMode.SEM, fileName5)) // { // return false; // } // //6.将照片传给客户，获取偏移坐标 // float x6 = 0, y6 = 0; // float angle1 = 0; // float mage = 10000; // //7.根据坐标控制SEM移动到分析位置 // if (!iSEM.MoveStageXY(x6, y6)) // { // return false; // } // //8.验证移动准确性：获取当前SEM中心位置坐标，与客户返回坐标对比，验证是否移动正确 // float x7 = iSEM.GetStageAtX(); // float y7 = iSEM.GetStageAtY(); // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin) // { // return false; // } // //9.控制SEM平行校正，并记录校正前初始值 // float foldAnagle = iSEM.GetScanRotation(); // if (foldAnagle == float.NaN) // { // return false; // } // if (!iSEM.SetScanRotation(angle1)) // { // return false; // } // //10.控制SEM放大到指定参数大小范围 // if (!iSEM.SetMagnification(mage)) // { // return false; // } // //11.控制SEM自动对焦、消像散、亮度、对比度 // if (!MeasParam.FocusMode) // { // //弹出手动对焦的窗口 // } // else // { // //调用自动对焦模块 // } // //12.控制SEM对分析位置拍照 // String fileName6 = WorkingFolder + ImageName6; // if (!GetImage(ImageMode.SEM, fileName6)) // { // return false; // } // //13.保存照片 // //14.控制SEM取消电子束校正，回到初始值 // if (!iSEM.SetScanRotation(foldAnagle)) // { // return false; // } //} ////18.自动层高分析 //{ // //1.获取SEM Pixel Size给客户传入参数 // if (iSEM.GetPixelSize() == float.NaN) // { // return false; // } // //2.将照片传给客户，客户进行层高分析（返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据），如果客户自行出分析报告则无需返回数据 //} ////19.自动能谱分析 //{ // //1. 确定能谱位置 // //2. 控制牛津打能谱 // //3. 能谱分析——面扫+线扫描 //} #endregion #region 能谱所有参数 //全局只有一个Extender static ExtenderInterface factoryExtender = ExtenderInterface.Instance; IExtenderControl iExtender = factoryExtender.IExtender; MeasureDB m_MeasDB = null; int m_nXrayId = 0; const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片 const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户，找到已经切割点 const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户，水平校正 const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户，测量层高 /// /// 做能谱分析 /// /// 分析点ID，索引号 /// 分析点名称 /// 分析点的位置ID /// 成功或失败 public bool DoEDS(int a_PointNum, string PointsName, int num) { try { //XrayID记录 LogManager.AddHardwareLog("程序进入EDS测量！", true); EDSParam param = m_measureFile.MParam.EDSP; double dDwellTime = param.DwellTime; int nImageType = param.ImageType; double dScanSizes = param.ScanSize; LogManager.AddHardwareLog("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true); iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes); string path = EDS_path; string edsfn = path + "\\" + num.ToString() + "_" + ImageNameEDS; LogManager.AddHardwareLog("EDS_PATH=" + edsfn, true); iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0); //送给客户，计算感兴趣的区域 List listPoints = new List(); List listlines = new List(); List> listFeature = new List>(); List lines_height = new List(); System.Drawing.Point area_pt = new System.Drawing.Point(); int width = 1; int height = 1; //点数据 int state = 0; wr.EDS_Param_Points(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listPoints, out state); if (state == 0) { LogManager.AddHardwareLog("点采集失败", true); return false; } //线数据 LogManager.AddHardwareLog("线扫描", true); state = 0; wr.EDS_Param_Lines(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listlines, out lines_height, out state); LogManager.AddHardwareLog("线返回数据" + listlines[0].X.ToString() + "," + listlines[0].Y.ToString() + ",lines_height=" + lines_height.Count.ToString(), true); if (state == 1) { //将线转换为segment数据 LogManager.AddHardwareLog("将线转换为segment数据", true); List segments = new List(); for (int i = 0; i < listlines.Count; i++) { for (int j = 0; j <= lines_height[i]; j++) { Segment segment = new Segment(); segment.X = listlines[0].X; segment.Y = listlines[0].Y + j; segment.Length = 1; segments.Add(segment); } listFeature.Add(segments); } LogManager.AddHardwareLog("将线转换为segment数据完成", true); } else { LogManager.AddHardwareLog("线采集失败", true); return false; } //面数据 state = 0; wr.EDS_Param_Areas(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out area_pt, out width, out height, out state); LogManager.AddHardwareLog("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true); if (state == 1) { //将面转换为segment数据 LogManager.AddHardwareLog("将面转换为segment数据", true); List segments = new List(); for (int j = 0; j <= height; j++) { Segment segment = new Segment(); segment.X = area_pt.X; segment.Y = area_pt.Y + j; segment.Length = width; segments.Add(segment); } listFeature.Add(segments); LogManager.AddHardwareLog("将面转换为segment数据完成", true); } else { LogManager.AddHardwareLog("面采集失败", true); return false; } //存储数据 //向分析点数据库更新 LogManager.AddHardwareLog("listPoints=" + listPoints.Count.ToString() + ",listFeature=" + listFeature.Count.ToString(), true); if (!m_MeasDB.InsetAPoint(a_PointNum, PointsName, EDS_path, listPoints.Count, listFeature.Count, num)) { LogManager.AddHardwareLog("插入分析点失败", true); } LogManager.AddHardwareLog("插入分析点成功", true); int AreasNo = 0; long[] XrayData = new long[2000]; Dictionary listElement = new Dictionary(); //点采集 foreach (System.Drawing.Point pt in listPoints) { XrayData = new long[2000]; listElement = new Dictionary(); //LogManager.AddHardwareLog("点采集开始", true); iExtender.XrayPointCollectiong(param.PointTime, pt.X, pt.Y, out XrayData, out listElement); //写入数据库 m_nXrayId++; Boolean ret = m_MeasDB.InsertAPointXay(a_PointNum, m_nXrayId, pt.X, pt.Y, XrayData, listElement, num); LogManager.AddHardwareLog("点采集结束，写入数据库开始--" + m_nXrayId.ToString() + "," + ret.ToString(), true); //LogManager.AddHardwareLog("点采集写入数据库结束", true); if (m_nXrayId % 5 == 0) { Thread.Sleep(5000); } else { Thread.Sleep(1000); } } //面采集 foreach (List listSeg in listFeature) { XrayData = new long[2000]; listElement = new Dictionary(); LogManager.AddHardwareLog("面采集开始", true); LogManager.AddHardwareLog("AreaTime=" + param.AreaTime.ToString(), true); iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement); LogManager.AddHardwareLog("面采集结束，写入数据库开始", true); //写入数据库 m_nXrayId++; AreasNo++; m_MeasDB.InsertAAreaXay(a_PointNum, m_nXrayId, AreasNo, listSeg, XrayData, listElement, num); LogManager.AddHardwareLog("面采集写入数据库结束", true); } } catch (Exception e) { LogManager.AddHardwareLog(e.Message, false); } return true; } /// /// 初始化数据库 /// public void Init_MeasDB() { m_MeasDB = new MeasureDB(m_measureFile); } /// /// 161.自动调整SEM找到切割位置，这里不是简单的拉直旋转 /// /// public bool EDS_FindCross() { float x2 = 0, y2 = 0; int state = 0; iSEM.SetAutoVideoOff(); Thread.Sleep(200); iSEM.SetBrightness(50.0f); Thread.Sleep(200); iSEM.SetContrast(30.0f); //1.控制SEM放大到300倍 float mag = m_measureFile.MParam.Photograph_Magnification / 3; if (mag < 200) { mag = 200; } if (!iSEM.SetMagnification(mag)) { arg.Message = "放大" + mag.ToString("0.0") + "倍失败"; arg.State = false; SendMsg("1-24"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } Thread.Sleep(200); float current = iSEM.GetMagnification(); Thread.Sleep(200); while (Math.Abs(current - mag) > 2) { iSEM.SetMagnification(mag); Thread.Sleep(200); current = iSEM.GetMagnification(); Thread.Sleep(200); } Thread.Sleep(2000); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //3.控制SEM拍照 String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4; arg.Picture_Information.Picture_FullPath = fileName4; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(200); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(200); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(200); //拍照前改变速度,延时 iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 100); if (!GetImage(fileName4)) { //arg.State = false; //arg.Message = "SEM拍照找切割位置失败"; //SendMsg("1-25"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } //arg.Picture_Information.Picture_FullPath = fileName4; //arg.State = true; //arg.Message = "SEM拍照成功"; //SendMsg("1-25"); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 100); //判断是否停止进程 if (key_stop) { return false; } //4.将照片传给客户，获取偏移坐标，以及偏移角度 //5.根据坐标控制SEM移动到切孔位置，居中 LogManager.AddHardwareLog("测量线程：图像处理接口，准备移动样品台", true); LogManager.AddHardwareLog("文件名=" + fileName4, true); wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state); LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true); LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true); if (state == 1) { //1. 根据客户PT沉积坐标控制FIB调整到中心位置？？？？？？？ if (!MoveToPixByMoveStage(x2, y2)) { //arg.State = false; //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败"; //SendMsg("1-26"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } //判断是否移动完成 while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //arg.State = true; //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功"; //SendMsg("1-26"); //高倍到低倍不进行对焦 //拍照前改变速度,延时 iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 100); if (hand_intervene == 1) { MessageBox.Show("Web返回数据移动是否正确？\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK); } } else { arg.Message = "图像接口参数state返回值为零"; arg.State = false; SendMsg("1-26"); if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { return false; } LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } return true; } /// /// 171.能谱第17步找点采集数据 /// /// public bool EDS_ShotSection() { int state = 0; #region 设置拍照的放大倍数 LogManager.AddHardwareLog("测量线程：设置拍照放大倍数" + m_measureFile.MParam.Photograph_Magnification.ToString(), true); if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification)) { //arg.Message = "放大倍数调整失败"; //arg.State = false; //SendMsg("1-27"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } float set = m_measureFile.MParam.Photograph_Magnification; float current = iSEM.GetMagnification(); while (Math.Abs(current - set) > 1) { iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification); Thread.Sleep(200); current = iSEM.GetMagnification(); } //arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString() + "成功"; //arg.State = true; //SendMsg("1-27"); Thread.Sleep(3000 + (Int32)cycle_time); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } #endregion #region 拍摄矩形的切割孔，使用拍照的放大倍数 //2.控制SEM自动对焦、亮度、对比度-接口 iSEM.SetReduced(402, 128, 340, 256); Thread.Sleep(200); //add by sun 2020-12-15 iSEM.CmdFocusRate(5); //add by sun 2020-12-15 end Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); if (!iSEM.SetAutoVideoOff()) { LogManager.AddHardwareLog("测量线程报错：自动开启亮度对比度失败", false); return false; } Thread.Sleep(5000); if (ImageFocus1(false)) { //arg.Message = "自动对焦完成"; //arg.State = true; //SendMsg("1-28"); } else { //arg.Message = "自动对焦失败"; //arg.State = false; //SendMsg("1-28"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } iSEM.CloseReduced(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(200 + Convert.ToInt32(cycle_time)); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } if (!iSEM.SetAutoVideoBrightnessAndContrast()) { LogManager.AddHardwareLog("测量线程报错：自动开启亮度对比度失败", false); return false; } Thread.Sleep(5000); //3、设置SEM补偿角度 if (m_measureFile.MParam.Is_Photograph == false) { LogManager.AddHardwareLog("测量线程：角度补偿" + m_measureFile.MParam.Correction_Angle.ToString() + "度", true); if (!TiltCorrection(m_measureFile.MParam.Correction_Angle)) { //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败"; //arg.State = false; //SendMsg("1-29"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } //arg.State = true; //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功"; //SendMsg("1-29"); Thread.Sleep(200); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", false); return false; } } //4、拍照，5、保存照片 String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS5; arg.Picture_Information.Picture_FullPath = fileName5; arg.Picture_Information.Work_Status = "SEM"; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(200); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(200); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(200); //拍照前改变速度,延时 iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) * 2); if (!GetImage(fileName5)) { //arg.Message = "SEM拍照失败"; //arg.State = false; //SendMsg("1-30"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } //arg.State = true; //arg.Message = "SEM拍照成功"; //SendMsg("1-30"); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 100); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } #endregion if (m_measureFile.MParam.Is_Photograph == false) { #region 对当前矩形进行旋转校正 //8,计算切割面区域偏移角度及方向 float degree = 0; int direction = 0; wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state); LogManager.AddHardwareLog("测量线程：拍照角度移动,输入图像" + ImageNameEDS5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true); LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true); //接口返回像素，*pixelsize,得到坐标点。判断移动方式 if (state == 1) { //梯形角度 iSEM.SetScanRotationOn(); Thread.Sleep(200); //20201128陈工要求，谭博返回角度*0.7 iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor)); Thread.Sleep(200); //arg.State = true; //arg.Message = "图像接口返回角度为：" + degree.ToString(); //SendMsg("1-31"); if (hand_intervene == 1) { MessageBox.Show("Web返回数据移动是否正确？\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK); } } else { //arg.Message = "图像接口参数State返回值为零"; //arg.State = false; //SendMsg("1-31"); if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { //return false; } LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } Thread.Sleep(200); //12拍照 String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS6; arg.Picture_Information.Picture_FullPath = fileName6; arg.Picture_Information.Work_Status = "SEM"; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(200); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(200); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(200); //拍照前改变速度,延时 iSEM.CmdSaveRate(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 100); if (!GetImage(fileName6)) { //arg.Message = "SEM拍照失败"; //arg.State = false; //SendMsg("1-33"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); return false; } //arg.State = true; //arg.Message = "SEM拍照成功"; //SendMsg("1-33"); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 100); //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } #endregion #region 获取两个位置上及放大倍数 //计算两个测量区域坐标 List ct = new List(); List mag = new List(); System.Drawing.Point ct0; float magMax = 0; //LogManager.AddHardwareLog("测量线程：图像处理接口，计算两个放大区域坐标，输入图像" + fileName6.ToString() + "控制失败", true); wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state); LogManager.AddHardwareLog("测量线程：图像处理接口返回值为" + state.ToString() + "，计算两个放大区域坐标，输入图像" + fileName6.ToString() + "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) + "输入产品" + m_measureFile.MParam.Firm.ToString() + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")" + "输出放大倍数1" + mag[0] + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")" + "输出放大倍数2" + mag[0] + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true); #endregion if (state == 1 && ct.Count != 0 && mag.Count != 0) { //arg.State = true; //arg.Message = "获取位置及放大倍数成功"; //SendMsg("1-34"); #region 记录初始设置的BeamShift的百分比和样品台XY位置 float xs = iSEM.GetBeamShiftX(); Thread.Sleep(200); float ys = iSEM.GetBeamShiftY(); Thread.Sleep(200); float xpCur = iSEM.GetStageAtX(); Thread.Sleep(200); float ypCur = iSEM.GetStageAtY(); Thread.Sleep(200); LogManager.AddHardwareLog("测量线程：原来的光束偏移量x = " + xs.ToString() + "y=" + ys.ToString() + "," + "原来样品台的位置x= " + xpCur.ToString() + "y=" + ypCur.ToString(), true); #endregion #region 移动到梯形左上角 //找到放大倍数最大值 magMax = mag[0]; for (int m = 1; m < mag.Count; m++) { if (mag[m] > magMax) { magMax = mag[m]; } } //20201127将视野移动到梯形左上角位置 MoveToPix(ct0.X, ct0.Y); LogManager.AddHardwareLog("测量线程：移动到对焦点（ " + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true); //关闭自动亮度对比度 iSEM.SetAutoVideoOff(); Thread.Sleep(2000); iSEM.SetReduced(402, 128, 340, 256); Thread.Sleep(200); //add by sun 2020-12-15 iSEM.CmdFocusRate(5); //add by sun 2020-12-15 end Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); //放大到10000倍 iSEM.SetMagnification(magMax / 2); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); set = magMax / 2; current = iSEM.GetMagnification(); while (Math.Abs(current - set) > 1) { iSEM.SetMagnification(set); Thread.Sleep(200); current = iSEM.GetMagnification(); } //自动对焦 if (!ImageFocus1(true)) { return false; } //放大到10000倍 iSEM.SetMagnification(magMax); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); set = magMax; current = iSEM.GetMagnification(); while (Math.Abs(current - set) > 1) { iSEM.SetMagnification(set); Thread.Sleep(200); current = iSEM.GetMagnification(); } //自动对焦 if (!ImageFocus1(true)) { return false; } iSEM.CloseReduced(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); #endregion #region 恢复到拍照的状态 iSEM.SetStageGotoX(xpCur); while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } iSEM.SetStageGotoY(ypCur); while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } iSEM.CloseReduced(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); //增亮图像 iSEM.SetAutoVideoOff(); Thread.Sleep(200); float currentBright = iSEM.GetBrightness(); Thread.Sleep(200); float currentContrast = iSEM.GetContrast(); Thread.Sleep(200); iSEM.SetBrightness(currentBright + 2); Thread.Sleep(200); iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮 Thread.Sleep(200); #endregion #region 循环拍照 for (int n = 0; n < ct.Count; n++) { #region 恢复到拍照的状态 iSEM.SetStageGotoX(xpCur); while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } iSEM.SetStageGotoY(ypCur); while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //恢复原来的放大倍数 if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification)) { LogManager.AddHardwareLog("测量线程报错：第一个区域放大倍数" + mag[n].ToString() + "控制失败", false); return false; } Thread.Sleep(100 + Convert.ToInt32(cycle_time)); set = m_measureFile.MParam.Photograph_Magnification; current = iSEM.GetMagnification(); while (Math.Abs(current - set) > 1) { iSEM.SetMagnification(set); Thread.Sleep(200); current = iSEM.GetMagnification(); } //恢复BeamShift的百分比值 iSEM.SetBeamShiftX(xs); Thread.Sleep(200); iSEM.SetBeamShiftY(ys); Thread.Sleep(200); #endregion #region 移动到指定点位置 if (!MoveToPix(ct[n].X, ct[n].Y)) { arg.State = false; arg.Message = "移动到第一个点位置失败"; SendMsg("1-" + (35 + n).ToString()); //移动到第一个点失败 LogManager.AddHardwareLog("测量线程报错：移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false); } LogManager.AddHardwareLog("测量线程：移动到第1个点（ " + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")", true); #endregion #region 如果是第一个点，则1W倍对焦 if (n == 0) { } #endregion #region 拍照 if (!iSEM.SetMagnification(mag[n])) { arg.State = false; arg.Message = "移动到第一个点位置拍照失败"; SendMsg("1-35"); LogManager.AddHardwareLog("测量线程报错：第一个区域放大倍数" + mag[n].ToString() + "控制失败", false); return false; } Thread.Sleep(100 + Convert.ToInt32(cycle_time)); set = mag[n]; current = iSEM.GetMagnification(); while (Math.Abs(current - set) > 1) { iSEM.SetMagnification(set); Thread.Sleep(200); current = iSEM.GetMagnification(); } DoEDS(m_nWorkHoleNo + 1, cutHoles[m_nWorkHoleNo].HoleName, n + 1); #endregion } #endregion if (hand_intervene == 1) { MessageBox.Show("Web返回数据移动是否正确？\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK); } } else { if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { // return false; } } else { //return false; } //arg.State = false; //arg.Message = "获取位置及放大倍数失败"; //SendMsg("1-34"); LogManager.AddHardwareLog("测量线程报错：" + arg.Message, false); } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } } //判断是否停止进程 if (key_stop) { return false; } return true; } /// /// 19.能谱分析 /// /// public bool EDSAnalysis() { //1.先降Z轴 if (m_measureFile.MParam.EDSZ < Z_Min || m_measureFile.MParam.EDSZ > Z_Max) { LogManager.AddHardwareLog("Z轴位置设置超出范围.", true); } LogManager.AddHardwareLog("将Z轴位置指定到：" + m_measureFile.MParam.EDSZ.ToString(), true); if (!iSEM.SetStageGotoZ(m_measureFile.MParam.EDSZ)) { LogManager.AddHardwareLog("测量线程报错：样品台Z回到安全位置失败", false); return false; } while (true) { Thread.Sleep(4000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { LogManager.AddHardwareLog("停止键按下", true); return false; } //2.角度改为54度 iSEM.SetScanRotationOff(); Thread.Sleep(200); //3.设置电压和电流 iSEM.SetSEMVoltage(m_measureFile.MParam.EDSV); Thread.Sleep(2000); iSEM.SetSEMIPROBE(m_measureFile.MParam.EDSA); Thread.Sleep(500); //4.自动亮度对比度 iSEM.SetAutoBright(100); Thread.Sleep(200); iSEM.SetAutoContrast(100); Thread.Sleep(200); if (!iSEM.SetAutoVideoBrightnessAndContrast()) { LogManager.AddHardwareLog("测量线程报错：开始设置自动亮度、对比度失败。", false); return false; } Thread.Sleep(5000); //5.自动对焦 iSEM.SetReduced(256, 192, 512, 512); Thread.Sleep(200); //add by sun 2020-12-15 iSEM.CmdFocusRate(5); //add by sun 2020-12-15 end Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); if (!ImageFocus1(false)) { return false; } iSEM.CloseReduced(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); //6.调用161步过程 if (!EDS_FindCross()) { return false; } //7.调用171步过程 if (!EDS_ShotSection()) { return false; } return true; } /// /// 20.光束等复位 /// public void BeamShiftReset() { iSEM.SetTiltAngleOff(); Thread.Sleep(200); iSEM.SetScanRotationOff(); Thread.Sleep(200); iSEM.SetBeamShiftX(0); Thread.Sleep(200); iSEM.SetBeamShiftY(0); Thread.Sleep(200); } #endregion } }