//时间：20200610 //作者：郝爽 //功能：测量线程 using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using System.Windows.Forms; using System.Threading; using System.IO; using SmartSEMControl; using MeasureData; using FileManager; using WebManager; using OpenCvSharp; using Extender; using DBManager; namespace MeasureThread { //图片模式 public enum ImageMode { FIB, SEM } public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托 public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e); public class ThreadStatusEventArgs { //状态 public Boolean State { get { return m_state; } set { m_state = value; } } private Boolean m_state; //时间 public DateTime Time { get { return m_time; } set { m_time = value; } } private DateTime m_time; //步骤代码 public String Step_Code { get { return step_Code; } set { step_Code = value; } } private String step_Code; //其他消息 public String Message { get { return this.message; } set { this.message = value; } } private String message; //孔名 public String HoleName { get { return this.holeName; } set { this.holeName = value; } } private String holeName; //图片信息 public class PictureInformation { public String Picture_FullPath { get { return picture_FullPath; } set { picture_FullPath = value; } } private String picture_FullPath; public double Work_Voltage { get { return work_Voltage; } set { work_Voltage = value; } } private double work_Voltage; public double Magnification { get { return magnification; } set { magnification = value; } } private double magnification; public double Work_Distance { get { return work_Distance; } set { work_Distance = value; } } private double work_Distance; public String Work_Status { get { return work_Status; } set { work_Status = value; } } private String work_Status; } //图片信息实例类 public PictureInformation Picture_Information { get { return picture_Information; } set { picture_Information = value; } } private PictureInformation picture_Information; //图像信息 public class ImageInformation { public int Method_Name { get { return method_Name; } set { method_Name = value; } } private int method_Name; public Source_Img_Degree_Direction SIDD; public Cut_Position CP; public Cut_Success CS; public Trapezoid_Top_Center_Position TTCP; public Auto_Foucs AF; public Auto_Stigmatic AS; public Center_Position_OffsetAngle_Direction CPOD; public Measure_Size MS; public ImageInformation() { SIDD = new Source_Img_Degree_Direction(); CP = new Cut_Position(); CS = new Cut_Success(); TTCP = new Trapezoid_Top_Center_Position(); AF = new Auto_Foucs(); AS = new Auto_Stigmatic(); CPOD = new Center_Position_OffsetAngle_Direction(); MS = new Measure_Size(); } //1-计算原始图像偏移角度及方向 public class Source_Img_Degree_Direction { public Boolean Is_Image = false; public double Degree { get { return degree; } set { degree = value; } } private double degree; public int Direction { get { return direction; } set { direction = value; } } private int direction; public int State { get { return state; } set { state = value; } } private int state; } //2-计算切割点位置 public class Cut_Position { public Boolean Is_Image = false; public double Offsetx { get { return offsetx; } set { offsetx = value; } } private double offsetx; public double Offsety { get { return offsety; } set { offsety = value; } } private double offsety; public int State { get { return state; } set { state = value; } } private int state; } //3-是否切割成功 public class Cut_Success { public Boolean Is_Image = false; public int State { get { return state; } set { state = value; } } private int state; } //4-计算切割后图像梯形区域上边中心点坐标 public class Trapezoid_Top_Center_Position { public Boolean Is_Image = false; public double TopCenterX { get { return topCenterX; } set { topCenterX = value; } } private double topCenterX; public double TopCenterY { get { return topCenterY; } set { topCenterY = value; } } private double topCenterY; public int State { get { return state; } set { state = value; } } private int state; } //5-自动对焦 public class Auto_Foucs { public Boolean Is_Image = true; public String Img_Path { get { return img_Path; } set { img_Path = value; } } private String img_Path; } //6-自动像闪 public class Auto_Stigmatic { public Boolean Is_Image = true; public String Img_Path { get { return img_Path; } set { img_Path = value; } } private String img_Path; } //7-计算切割面区域中心坐标，以及偏移角度及方向 public class Center_Position_OffsetAngle_Direction { public Boolean Is_Image = false; public double CenterX { get { return centerX; } set { centerX = value; } } private double centerX; public double CenterY { get { return centerY; } set { centerY = value; } } private double centerY; public double Degree { get { return degree; } set { degree = value; } } private double degree; public int Direction { get { return direction; } set { direction = value; } } private int direction; public int State { get { return state; } set { state = value; } } private int state; } //8-测量尺寸 public class Measure_Size { public Boolean Is_Image = false; public int State { get { return state; } set { state = value; } } private int state; } } //图像信息实例类 public ImageInformation Image_Information { get { return image_Information; } set { image_Information = value; } } private ImageInformation image_Information; public ThreadStatusEventArgs(string a_State) { picture_Information = new PictureInformation(); image_Information = new ImageInformation(); } } public class CutHolesStatusEventArgs { public string State { get { return m_state; } set { m_state = value; } } private string m_state; public string HoleName { get { return m_holeName; } set { m_holeName = value; } } private string m_holeName; public CutHolesStatusEventArgs(string a_state, string a_holeName) { this.m_state = a_state; this.m_holeName = a_holeName; } } public class Measure { /// 图像拉直算法 /// /// 倾斜角度 /// 圆心坐标x /// 圆心坐标y /// 倾斜情况下帧图的坐标x /// 倾斜情况下帧图的坐标y /// 复位到原位置需要移动的x值(返回值) /// 复位到原位置需要移动的y值(返回值) /// public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy) { try { float xr = x1 - x0;//倾斜图到中心的距离差x float yr = y1 - y0;//倾斜图到中心的距离差y float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度 //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度 float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度 float k_S = k - Slope;//通过夹角差求x2,y2 //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R); //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R); float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R); float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R); if (Slope > 0 || Slope < 0) { Hx = x0 + x2; Hy = y0 + y2; } else { Hx = 0; Hy = 0; } return true; } catch (Exception) { return false; } } //Web接口类 public WebResult wr = null; //扫描周期 private float cycle_time = 0; //人工干预 public int hand_intervene = 2; //样品台保护值 public float X_Min = 0; public float X_Max = 0.13f; public float Y_Min = 0; public float Y_Max = 0.13f; public float Z_Min = 0; public float Z_Max = 0.05f; public float T_Min = -4; public float T_Max = 70; public float R_Min = -380; public float R_Max = 380; public float M_Min = 0; public float M_Max = 0.012f; public float x_center_point = 65; public float y_center_point = 65; public event ThreadStatusHandler SendThreadStatus; // 声明事件 public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件 //定义一个全局的消息类 ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0"); //全局只有一个fatorySEM static FactoryHardware factorySEM = FactoryHardware.Instance; ISEMControl iSEM = factorySEM.ISEM; //全局只有一个Extender static ExtenderInterface factoryExtender = null;// ExtenderInterface.Instance; IExtenderControl iExtender = null;// factoryExtender.IExtender; MeasureDB m_MeasDB = null; //@的作用是不用转义字符\\只打一个就行 const String ImageName0 = @"Straighten.tif"; //传给客户，原始图像，为拉直操作 const String ImageName1 = @"FindCutPostion.tif"; //传给客户，作水平校正 const String ImageName2 = @"FIBCutPostion.tif";//传给客户，找到切割点 const String ImageName31 = @"FIBBefore.tif"; const String ImageName32 = @"FIBAfter.tif"; const String ImageName4 = @"SEMTrapCP.tif";//传给客户，找到已经切割点 const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户，水平校正 const String ImageName6 = @"SEMMagEnd.tif";//传给客户，测量层高 const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域 const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针 const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针 const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏 const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏 const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像，这个图像为使用工具SmartSEM工具的图像 const String ElyDeposition = @"Deposition.ely"; //沉积 const String ElyCrossSection = @"CrossSection.ely"; //切割 const float fMin = (float)0.0000002; //单位是米 public Boolean key_stop = false; String focus_path = ""; String FIBfocus_path = ""; String StigX_path = ""; String StigY_path = ""; String EDS_path = ""; String data_path = ""; int m_nWorkHoleNo = -1; int m_nXrayId = -1; //测量文件 private MeasureFile m_measureFile; public MeasureFile MeasureFile { get { return this.m_measureFile; } set { this.m_measureFile = value; } } //测量的切割孔 private List m_cutHoles; public List cutHoles { get { return this.m_cutHoles; } set { this.m_cutHoles = value; } } //工作文件夹 private string m_WorkingFolder; public string WorkingFolder { get { return this.m_WorkingFolder; } set { this.m_WorkingFolder = value; } } //程序当前路径 private string m_ProgramFolder = Directory.GetCurrentDirectory(); //线程状态 private ThreadStatus m_ThreadStatus; public ThreadStatus TStatus { get { return this.m_ThreadStatus; } set { this.m_ThreadStatus = value; } } //测量参数 private MeasureParam m_MsParam; public MeasureParam MeasParam { get { return this.m_MsParam; } set { this.m_MsParam = value; } } //构造函数 public Measure(String webServerIP, String webServerPort, String webServerUrl) { MeasParam = new MeasureParam(); TStatus = new ThreadStatus(); cutHoles = new List(); //配置远程连接 wr = new WebResult(webServerIP,webServerPort,webServerUrl); } //初始化测量业务, 读测量文件，判断是否有可测试的切孔 public bool InitMeas(MeasureFile a_measureFile) { m_measureFile = a_measureFile; List listHoles = m_measureFile.ListCutHole; foreach (CutHole h in listHoles) { if (h.SWITCH == true) { m_cutHoles.Add(h); } } if (m_cutHoles.Count == 0) return false; this.m_MsParam = m_measureFile.MParam; if(m_measureFile.MParam.EDS == true) { factoryExtender = ExtenderInterface.Instance; iExtender = factoryExtender.IExtender; m_MeasDB = new MeasureDB(m_measureFile); } return true; } public void SendMsg(string step_code) { arg.Step_Code = step_code; arg.Time = DateTime.Now; SendThreadStatus(this, arg); } public void SendCutHoleMsg(string a_state, string a_holeName) { CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName); arg.HoleName = a_holeName; arg.State = a_state; SendCutHolesStatus(this, arg); } public bool DoEDS(int a_PointNum, string PointsName) { //XrayID记录 EDSParam param = m_measureFile.MParam.EDSP; double dDwellTime = param.DwellTime; int nImageType = param.ImageType; double dScanSizes = param.ScanSize; iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes); string path = EDS_path; iExtender.GrabImage(path + "\\EDSImage.tif", 0, 0, 0, 0, 0); //送给客户，计算感兴趣的区域 List listPoints = new List(); List> listFeature = new List>(); //向分析点数据库更新 if (!m_MeasDB.InsetAPoint(a_PointNum, PointsName, EDS_path, param.PointMode, listPoints.Count, param.AreaMode, listFeature.Count)) { LogManager.AddHardwareLog("插入分析点失败", true); } int AreasNo = -1; if (param.PointMode == true) { //点采集 foreach (Point pt in listPoints) { long[] XrayData = new long[2000]; Dictionary listElement = new Dictionary(); iExtender.XrayPointCollectiong(param.PointTime, pt.X, pt.Y, out XrayData, out listElement); //写入数据库 m_nXrayId++; //InsertAPointXay(a_PointNum, m_nXrayId, pt.X, pt.Y, XrayData, listElement); } } if (param.AreaMode == true) { //面采集 long[] XrayData = new long[2000]; Dictionary listElement = new Dictionary(); foreach (List < Segment> listSeg in listFeature) { iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement); //写入数据库 m_nXrayId++; AreasNo++; } } return true; } //测量流程 public void DoMeasure() { //创建线程的测量状态的更新 this.TStatus.ComputeTime(THREAD_TIME_TYPE.START); if (SendThreadStatus != null) { //SendMsg("开始测量。"); } LogManager.AddHardwareLog("开始测量",true); //检查硬件连接是否正常 if (!ConnectHardware()) { //SendMsg("连接硬件失败。"); this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED); return; } //设置工作文件夹 if (!SetWorkingFolderStr()) { //SendMsg("设置工作文件夹失败"); this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED); return; } //增加EDS控制 //将停止键复位 key_stop = false; //开始测量就将模式设置为SEM if (!iSEM.CmdFIBModeSEM()) { LogManager.AddHardwareLog("开始切换到SEM模式失败，程序退出。", true); return; } arg.Picture_Information.Work_Status = "SEM"; //自动亮度对比度 if (!iSEM.SetAutoVideoBrightnessAndContrast()) { LogManager.AddHardwareLog("开始设置自动亮度、对比度失败，程序退出。", true); return; } Thread.Sleep(5000); //设置扫描周期 iSEM.CmdFocusRate(); cycle_time = iSEM.GetCycleTime(); if (cycle_time == 0) { LogManager.AddHardwareLog("获取扫描周期时间失败", true); return; } for (int i = 0; i < m_cutHoles.Count; i++) { //记录测量序号和孔名 m_nWorkHoleNo = i; arg.HoleName = m_cutHoles[i].HoleName; //最终数据存放目录 data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName; //对焦数据存放目录 focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus"; m_MsParam.AutoFocus.Path = focus_path; if (!Directory.Exists(focus_path)) { Directory.CreateDirectory(focus_path); } //FIB对焦数据存放目录 FIBfocus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\FIBFocus"; m_MsParam.FIBFocus.Path = FIBfocus_path; if (!Directory.Exists(FIBfocus_path)) { Directory.CreateDirectory(FIBfocus_path); } //StigX数据存放目录 StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX"; m_MsParam.AutoStigX.Path = StigX_path; if (!Directory.Exists(StigX_path)) { Directory.CreateDirectory(StigX_path); } //StigY数据存放目录 StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY"; m_MsParam.AutoStigY.Path = StigY_path; if (!Directory.Exists(StigY_path)) { Directory.CreateDirectory(StigY_path); } //EDS数据存放路径 if (m_measureFile.MParam.EDS == true) { EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS"; m_MsParam.AutoStigY.Path = EDS_path; if (!Directory.Exists(EDS_path)) { Directory.CreateDirectory(EDS_path); } } //判断孔状态 if (m_cutHoles[i].STATE != State.Ready) { continue; } //开始循环工作 if (i == 0) { m_cutHoles[i].START = DateTime.Now; //切孔操作-开始 m_cutHoles[i].STATE = State.InProcess; //SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); //1、移动样品台到第一个观测点，先移动R轴，再移动XY轴 if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R)) { LogManager.AddHardwareLog("样品台R轴移动失败。", true); return; } while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { return; } //移动XY轴 if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y)) { LogManager.AddHardwareLog("样品台XY轴移动失败。", true); return; } while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { return; } //成功 if (FirstHole()) { //保存文件，将测量状态更改 m_cutHoles[i].STATE = State.Success; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); } //失败 else { m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); } //切孔操作-完成 //SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); } else { //其他孔测量之前的初始化 if (!OtherHole_Init()) { arg.Message = "当前测量点位置初始失败！"; arg.State = false; SendMsg("0-1"); Thread.Sleep(5000); continue; } //其他孔的测量 m_cutHoles[i].START = DateTime.Now; //非第一个孔的测试 //SendMsg("第" + i.ToString() + "个切孔开始测量"); //切孔操作-开始 //SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName); m_cutHoles[i].STATE = State.InProcess; SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); //其他孔的测试 //成功 if (OtherHole()) { //保存文件，将测量状态更改 m_cutHoles[i].STATE = State.Success; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); } //失败 else { m_cutHoles[i].STATE = State.Failed; m_cutHoles[i].END = DateTime.Now; m_measureFile.Save(); } //切孔操作-完成 //SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName); SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName); } if(key_stop) { m_cutHoles[i].END = DateTime.Now; m_cutHoles[i].STATE = State.Ready; m_measureFile.Save(); arg.Message = "用户停止测量"; SendMsg("0-0"); break; } } } //检查硬件连接是否正常 public bool ConnectHardware() { //返回硬件的连接状态 return iSEM.ConnectStatus(); } //设置工作文件夹 public bool SetWorkingFolderStr() { WorkingFolder = m_measureFile.FilePath; return true; } //插入PT针 public bool InsertPT() { string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt; //SendMsg("调用宏插入PT针宏文件" + fn); iSEM.CMDMCFFilename(fn); //延时1s？？ Thread.Sleep(1000); return true; } //撤出PT针 public bool RetractPT() { string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt; //SendMsg("调用宏撤出PT针宏文件" + fn); iSEM.CMDMCFFilename(fn); //延时1s？？ Thread.Sleep(1000); return true; } //PT沉积 public bool PTWork() { //执行PT沉积的ELY文件 //string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition; //SendMsg("执行PT沉积Ely文件:" + fn); if (!ExcuteEly(m_MsParam.PTTemp)) { return false; } //等待沉积完成 while (true) { Thread.Sleep(10000); if (iSEM.GetFIBMode() == 0) { break; } } return true; } //FIB切割 public bool FIBWork() { //执行PT沉积的ELY文件 //string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection; //SendMsg("执行FIB切割Ely文件:" + fn); if (!ExcuteEly(m_MsParam.FIBTemp)) { return false; } //等待切割完成 while (true) { Thread.Sleep(10000); if (iSEM.GetFIBMode() == 0) { break; } } return true; } //执行ELY文件的步骤 public bool ExcuteEly(string a_filename) { //执行ELy文件有三个动作 //1. 选择ELY文件 //SendMsg("选择ELY文件"); if (!iSEM.CmdFIBLoadELY(a_filename)) { //SendMsg("选择ELY文件失败"); return false; } Thread.Sleep(1000); //2. 确认ELY文件 //SendMsg("确认ELY文件"); if (!iSEM.CmdFIBEXPOSUREELY()) { //SendMsg("确认ELY文件失败"); return false; } Thread.Sleep(1000); //3. 执行ELY文件 //SendMsg("执行ELY文件"); if (!iSEM.CmdFIBSTARTELY()) { //SendMsg("执行ELY文件失败"); return false; } Thread.Sleep(1000); return true; } //执行自动对焦 public bool ImageFocus(String step_code) { if (m_measureFile.MParam.FocusMode == 1)//手动 { if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成？", "确认消息", MessageBoxButtons.YesNo)) { } else { return false; } } else if(m_measureFile.MParam.FocusMode == 2)//自有自动 { //郝工增加自动对焦算法 //处理文件夹 if (Directory.Exists(focus_path)) { Directory.Delete(focus_path, true); } Thread.Sleep(3000); arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); //再创建文件夹 Directory.CreateDirectory(focus_path); //1、对焦参数类，2、输出工作距离 int wd = 0; //20201015 根据当前的工作距离重新计算对焦位置 float currentWd = iSEM.GetWorkingDistance(); m_MsParam.AutoFocus.UP = currentWd * 1000000 - m_MsParam.AutoFocus.Step; m_MsParam.AutoFocus.Down = currentWd * 1000000 + m_MsParam.AutoFocus.Step; LogManager.AddHardwareLog("修改对焦参数", true); AutoFocus(m_MsParam.AutoFocus, out wd, step_code); //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true); //设置工作距离 iSEM.SetWorkingDistance((float)(wd * 0.00000001)); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); //处理图片位置 //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName); } else if(m_MsParam.FocusMode == 3) //客户自动 { //后期和客户对接接口 List filenames = new List(); String retfilename = wr.Img_Auto_Focus(filenames); } else //蔡司自动对焦 { iSEM.CmdAutoFocusCoarse(); while(true) { Thread.Sleep(10000); if(0 == iSEM.GetAutoFunction()) { break; } } iSEM.CmdAutoFocusFine(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } } return true; } //执行自动消像散 public bool ImageStig(String step_code) { if (m_measureFile.MParam.FocusMode == 1)//手动 { if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成？", "确认消息", MessageBoxButtons.YesNo)) { } else { return false; } } else if (m_measureFile.MParam.FocusMode == 2)//自有自动 { //郝工增加自动对焦算法 //处理文件夹 if (Directory.Exists(StigX_path)) { Directory.Delete(StigX_path, true); } Thread.Sleep(3000); arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); //再创建文件夹 Directory.CreateDirectory(StigX_path); //1、对焦参数类，2、输出像散值 int stigX = 0; //根据当前的stigX重新计算像散值 float currentStigX = iSEM.GetAstigmatismX(); //m_MsParam.AutoStigX.Step = 10; //像散的步长为10 m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step; m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step; LogManager.AddHardwareLog("修改消像散参数", true); AutoStig(m_MsParam.AutoStigX, out stigX, step_code); //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true); //设置工作距离 iSEM.SetAstigmatismX((float)(stigX * 0.01)); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); //处理图片位置 //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName); //处理文件夹 if (Directory.Exists(StigY_path)) { Directory.Delete(StigY_path, true); } Thread.Sleep(3000); arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); //再创建文件夹 Directory.CreateDirectory(StigY_path); //1、对焦参数类，2、输出像散值 int stigY = 0; //根据当前的stigX重新计算像散值 float currentStigY = iSEM.GetAstigmatismY(); //m_MsParam.AutoStigY.Step = 10; //像散的步长为10 m_MsParam.AutoStigY.UP = currentStigY - m_MsParam.AutoStigY.Step; m_MsParam.AutoStigY.Down = currentStigY + m_MsParam.AutoStigY.Step; LogManager.AddHardwareLog("修改消像散参数", true); AutoStig(m_MsParam.AutoStigY, out stigY, step_code); //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true); //设置工作距离 iSEM.SetAstigmatismY((float)(stigY * 0.01)); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); } else if (m_MsParam.FocusMode == 3) //客户自动 { //后期和客户对接接口 List filenames = new List(); String retfilename = wr.Img_Auto_Focus(filenames); } else //蔡司自动对焦 { iSEM.CmdAutoFocusCoarse(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } iSEM.CmdAutoFocusFine(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } } return true; } //执行FIB自动对焦，FIBFocus //执行自动消像散 public bool FIBFocus(String step_code) { if (m_measureFile.MParam.FocusMode == 1)//手动 { if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成？", "确认消息", MessageBoxButtons.YesNo)) { } else { return false; } } else if (m_measureFile.MParam.FocusMode == 2)//自有自动 { //郝工增加自动对焦算法 //处理文件夹 if (Directory.Exists(FIBfocus_path)) { Directory.Delete(FIBfocus_path, true); } Thread.Sleep(3000); arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); //再创建文件夹 Directory.CreateDirectory(FIBfocus_path); //1、对焦参数类，2、输出对焦值 int FIBFocus = 0; //根据当前的stigX重新计算像散值 float currentFIBFocus = iSEM.GetFIBObjectivePotential(); //m_MsParam.FIBFocus.Step = 10; //像散的步长为10 m_MsParam.FIBFocus.UP = currentFIBFocus - m_MsParam.FIBFocus.Step; m_MsParam.FIBFocus.Down = currentFIBFocus + m_MsParam.FIBFocus.Step; LogManager.AddHardwareLog("修改FIB自动对焦参数", true); AutoFIBFocus(m_MsParam.FIBFocus, out FIBFocus, step_code); //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true); //设置工作距离 iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01)); //设置完工作距离后必须延迟5秒 Thread.Sleep(5000); //处理图片位置 //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName); } else if (m_MsParam.FocusMode == 3) //客户自动 { //后期和客户对接接口 List filenames = new List(); String retfilename = wr.Img_Auto_Focus(filenames); } else //蔡司自动对焦 { iSEM.CmdAutoFocusCoarse(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } iSEM.CmdAutoFocusFine(); while (true) { Thread.Sleep(10000); if (0 == iSEM.GetAutoFunction()) { break; } } } return true; } /// ///13. 自动 定位功能,沉积 /// /// public bool GetPoistion() { float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0; int state = 1; //1.控制SEM放大600X if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage)) { arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败"; arg.State = false; SendMsg("1-5"); return false; } if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification)) { arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败"; arg.State = false; SendMsg("1-5"); return false; } arg.State = true; arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功"; SendMsg("1-5"); //判断是否停止进程 if (key_stop) { return false; } //2.控制SEM自动对焦、亮度、对比度 if(ImageFocus("1-6")) { arg.Message = "自动对焦完成"; arg.State = true; SendMsg("1-6"); } else { LogManager.AddHardwareLog("设置观测点后，自动对焦失败。", true); arg.Message = "自动对焦失败"; arg.State = false; SendMsg("1-6"); return false; } //判断是否停止进程 if (key_stop) { return false; } //1.1大于10000倍进行消像散处理 float dMag = iSEM.GetMagnification(); if (dMag > 10000)//需要消像散 { if (!ImageStig("1-6")) { LogManager.AddHardwareLog("拉直操作消像散失败，程序退出。", true); arg.Message = "拉直操作自动消像散失败！"; arg.State = false; SendMsg("1-6"); return false; } arg.Message = "拉直操作自动消像散成功！"; arg.State = true; SendMsg("1-6"); } //3.控制SEM拍照,找到切割位置 String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_MsParam.Location_Magnification.ToString("0") + "_" + ImageName1; arg.Picture_Information.Picture_FullPath = fileName1; arg.Picture_Information.Work_Voltage = m_MsParam.Location_Voltage; arg.Picture_Information.Magnification = m_MsParam.Location_Magnification; arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(1000); //拍照前改变速度,延时 iSEM.CmdSaveRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); if (!GetImage(ImageMode.SEM, fileName1)) { arg.Message = "SEM拍照失败"; arg.State = false; SendMsg("1-7"); return false; } arg.State = true; arg.Message = "SEM拍照成功"; SendMsg("1-7"); iSEM.CmdFocusRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //判断是否停止进程 if (key_stop) { return false; } //判断是否为仅拍照，不是则执行FIB操作 if (!m_MsParam.Is_Photograph) { //6.设置FIB拍照参数——扫描时间、束流等 //7.控制FIB自动亮度、对比度 if (!iSEM.CmdFIBModeFIB()) { arg.Message = "FIB模式切换失败"; arg.State = false; SendMsg("1-8"); return false; } arg.State = true; arg.Picture_Information.Work_Status = "FIB"; arg.Message = "FIB模式切换成功"; SendMsg("1-8"); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //判断是否停止进程 if (key_stop) { return false; } //8.控制FIB拍照 //9.保存照片======更改路径 String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_MsParam.FIB_Magnification.ToString("0") + "_" + ImageName2; arg.Picture_Information.Picture_FullPath = fileName2; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(1000); //FIB的放大位数，将来会改 if(!iSEM.SetFIBMagnification(m_MsParam.FIB_Magnification)) { arg.Message = "FIB放大倍数设置失败"; arg.State = false; SendMsg("1-9"); return false; } arg.Message = "FIB放大倍数设置成功"; arg.State = true; SendMsg("1-9"); Thread.Sleep(1000); //增加FIB对焦 //2.控制SEM自动对焦、亮度、对比度 if (FIBFocus("1-10")) { arg.Message = "自动FIB对焦完成"; arg.State = true; SendMsg("1-10"); } else { LogManager.AddHardwareLog("设置观测点后，自动FIB对焦失败。", true); arg.Message = "自动FIB对焦失败"; arg.State = false; SendMsg("1-10"); return false; } //判断是否停止进程 if (key_stop) { return false; } //拍照前改变速度,延时 iSEM.CmdSaveRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); if (!GetImage(ImageMode.FIB, fileName2)) { arg.Message = "FIB拍照失败"; arg.State = false; SendMsg("1-11"); return false; } arg.State = true; arg.Message = "FIB拍照成功"; SendMsg("1-11"); iSEM.CmdFocusRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //判断是否停止进程 if (key_stop) { return false; } //10.将照片传给客户，返回梯形位置坐标，及样品类型参数（是否需要PT沉积，PT坐标位置，PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数） LogManager.AddHardwareLog("准备移动样品台", true); LogManager.AddHardwareLog("文件名="+fileName2, true); LogManager.AddHardwareLog("样品类型="+m_MsParam.SampleName, true); LogManager.AddHardwareLog("供应商名称="+m_MsParam.Firm, true); wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_MsParam.SampleName), m_MsParam.Firm, out x1, out y1, out x2, out y2, out state); LogManager.AddHardwareLog("FIB梯形左上角和右上角位置信息= " + x1.ToString() + ", " + y1.ToString() + ", " + x2.ToString() + ", " + y2.ToString(), true); LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true); if (state == 1) { //1. 根据客户PT沉积坐标控制FIB调整到中心位置？？？？？？？ float xc = (x1 + x2) / 2; float yc = (y1 + y2) / 2; if (!MoveToPix(xc,yc)) { arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败"; arg.State = false; SendMsg("1-12"); return false; } arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置成功"; arg.State = true; SendMsg("1-12"); if (hand_intervene == 1) { MessageBox.Show("Web返回数据移动是否正确？\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK); } } else { arg.Message = "图像接口参数state返回值为零"; arg.State = false; SendMsg("1-12"); if(hand_intervene==1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { return false; } } //判断是否停止进程 if (key_stop) { return false; } //11.自动工具样品类型参数确定是否需要PT沉积 if (m_MsParam.PT) { //1. 根据客户PT沉积坐标控制FIB调整到中心位置？？？？？？？ //第10步已经移动好位置 //2. 验证移动准确性：获取当前FIB中心位置坐标，与客户返回坐标对比，验证是否一定正确 //x0 = iSEM.GetStageAtX(); //y0 = iSEM.GetStageAtY(); //if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin) //{ // arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败"; // arg.State = false; // SendMsg("1-1"); // return false; //} //arg.State = true; //arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功"; //SendMsg("1-8"); //判断是否停止进程 //if (key_stop) //{ // return false; //} //12.根据样品类型参数确定是否需要PT沉积，控制PT针插入 if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true) { if (!InsertPT()) { arg.Message = "插入PT针失败"; arg.State = false; SendMsg("1-13"); return false; } arg.State = true; arg.Message = "插入PT针成功"; SendMsg("1-13"); } //判断是否停止进程 if (key_stop) { return false; } //3. 根据坐标进行PT沉积 if (!PTWork()) { arg.Message = "PT沉积失败"; arg.State = false; SendMsg("1-14"); return false; } arg.State = true; arg.Message = "PT沉积成功"; SendMsg("1-14"); //判断是否停止进程 if (key_stop) { return false; } //15.根据样品类型决定是否撤出PT针 if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true) { if (!RetractPT()) { arg.Message = "撤出PT针失败"; arg.State = false; SendMsg("1-15"); return false; } arg.State = true; arg.Message = "撤出PT针成功"; SendMsg("1-15"); } //判断是否停止进程 if (key_stop) { return false; } } } //12.根据梯形坐标控制FIB调整到中心位置 //13.验证移动准确性：获取当前FIB中心位置坐标，与客户返回坐标对比，验证是否移动正确 //以上两步已经将程序移动到11内部去做 //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库，保存客户返回值信息到数据库 float[] firstPosition = iSEM.GetStagePosition(); m_cutHoles[0].Position.X = firstPosition[0]; m_cutHoles[0].Position.Y = firstPosition[1]; m_cutHoles[0].Position.Z = firstPosition[2]; m_cutHoles[0].Position.T = firstPosition[3]; m_cutHoles[0].Position.R = firstPosition[4]; m_cutHoles[0].Position.M = firstPosition[5]; //这里要调用文件保存功能 arg.Message = "坐标1(" + firstPosition[0].ToString() + "," + firstPosition[1].ToString() + "," + firstPosition[2].ToString() + "," + firstPosition[3].ToString() + "," + firstPosition[4].ToString() + "," + firstPosition[5].ToString() + ")"; arg.State = true; SendMsg("1-16"); //判断是否停止进程 if (key_stop) { return false; } return true; } /// /// 14. FIB切割 /// /// public bool FIBCross() { int state = 0; //这里不知道PT沉积之后是否变回SEM，所以这里加一句切换到FIB命令 if (!iSEM.CmdFIBModeFIB()) { return false; } Thread.Sleep(Convert.ToInt32(cycle_time)+1000); //增加FIB对焦 if (FIBFocus("1-17")) { arg.Message = "FIB自动对焦完成"; arg.State = true; SendMsg("1-17"); } else { LogManager.AddHardwareLog("设置观测点后，自动对焦失败。", true); arg.Message = "自动对焦失败"; arg.State = false; SendMsg("1-17"); return false; } //判断是否停止进程 if (key_stop) { return false; } String fileName31 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_MsParam.FIB_Magnification.ToString() + "_" + ImageName31; arg.Picture_Information.Picture_FullPath = fileName31; arg.Picture_Information.Work_Status = "FIB"; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = m_MsParam.FIB_Magnification; arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(1000); //拍照前改变速度,延时 iSEM.CmdSaveRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); if (!GetImage(ImageMode.SEM, fileName31)) { arg.Message = "FIB切割前拍照SEM模式照失败"; arg.State = false; SendMsg("1-18"); return false; } arg.State = true; arg.Message = "FIB切割前拍照SEM模式照成功"; SendMsg("1-18"); iSEM.CmdFocusRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //判断是否停止进程 if (key_stop) { return false; } //14.自动控制FIB切割 //1.根据参数设置FIB草率时间（使图清晰），设置梯形上下边及深度、设置束流 //2.控制FIB进行切割 //以上1、2步全部用ELY文件代替 if (!FIBWork()) { arg.Message = "FIB切割失败"; arg.State = false; SendMsg("1-19"); return false; } arg.State = true; arg.Message = "FIB切割成功"; SendMsg("1-19"); Thread.Sleep(1000); //判断是否停止进程 if (key_stop) { return false; } //切割后会切换到SEM，所以需要再切换回FIB模式 if (!iSEM.CmdFIBModeFIB()) { return false; } Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //3.控制FIB拍照600X //底层没有控制方法。 //4.保存图片 String fileName32 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_MsParam.FIB_Magnification.ToString() + "_" + ImageName32; arg.Picture_Information.Picture_FullPath = fileName32; arg.Picture_Information.Work_Status = "FIB"; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = m_MsParam.FIB_Magnification; arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(1000); //增加FIB对焦 if (FIBFocus("1-20")) { arg.Message = "FIB自动对焦完成"; arg.State = true; SendMsg("1-20"); } else { LogManager.AddHardwareLog("设置观测点后，自动对焦失败。", true); arg.Message = "自动对焦失败"; arg.State = false; SendMsg("1-20"); return false; } //拍照前改变速度,延时 iSEM.CmdSaveRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); if (!GetImage(ImageMode.FIB, fileName32)) { arg.Message = "FIB切割后拍照失败"; arg.State = false; SendMsg("1-21"); return false; } arg.State = true; arg.Message = "FIB切割后拍照成功"; SendMsg("1-21"); iSEM.CmdFocusRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //判断是否停止进程 if (key_stop) { return false; } //5.验证切割准确性：与切割前对比，如果对比误差大，则停止自动执行，进行报警 wr.Img_Cut_Success(fileName31, fileName32, out state); if(state == 0) { arg.Message = "图像接口参数state返回值为零"; arg.State = false; SendMsg("1-22"); if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { return false; } } arg.State = true; arg.Message = "FIB切割校验成功"; SendMsg("1-22"); //判断是否停止进程 if (key_stop) { return false; } return true; } /// /// 16.自动调整SEM找到切割位置，这里不是简单的拉直旋转 /// /// public bool FindCross() { float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0; int state = 0; //切换到SEM模式 if (!iSEM.CmdFIBModeSEM()) { arg.Message = "SEM模式切换失败"; arg.State = false; SendMsg("1-23"); return false; } arg.State = true; arg.Message = "SEM模式切换成功"; SendMsg("1-23"); arg.Picture_Information.Work_Status = "SEM"; Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //判断是否停止进程 if (key_stop) { return false; } //1.控制SEM放大到300倍 if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage)) { arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败"; arg.State = false; SendMsg("1-24"); return false; } if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/3)) { arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 3).ToString("0.0") + "倍失败"; arg.State = false; SendMsg("1-24"); return false; } arg.State = true; arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/3).ToString("0.0") + "倍成功"; SendMsg("1-24"); //判断是否停止进程 if (key_stop) { return false; } //3.控制SEM拍照 String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + (m_MsParam.Location_Magnification/3).ToString("0") + "_" + ImageName4; arg.Picture_Information.Picture_FullPath = fileName4; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(1000); //拍照前改变速度,延时 iSEM.CmdSaveRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); if (!GetImage(ImageMode.SEM, fileName4)) { arg.State = false; arg.Message = "SEM拍照失败"; SendMsg("1-25"); return false; } arg.State = true; arg.Message = "SEM拍照成功"; SendMsg("1-25"); iSEM.CmdFocusRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //判断是否停止进程 if (key_stop) { return false; } //4.将照片传给客户，获取偏移坐标，以及偏移角度 //5.根据坐标控制SEM移动到切孔位置，居中 LogManager.AddHardwareLog("准备移动样品台", true); LogManager.AddHardwareLog("文件名=" + fileName4, true); wr.Img_Trapezoid_Top_Center_Position(fileName4,out x2, out y2, out state); LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true); LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true); if (state == 1) { //1. 根据客户PT沉积坐标控制FIB调整到中心位置？？？？？？？ if (!MoveToPix(x2, y2)) { arg.State = false; arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败"; SendMsg("1-26"); return false; } //判断是否移动完成 while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } arg.State = true; arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败"; SendMsg("1-26"); if (hand_intervene == 1) { MessageBox.Show("Web返回数据移动是否正确？\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK); } } else { arg.Message = "图像接口参数state返回值为零"; arg.State = false; SendMsg("1-26"); if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { return false; } } //判断是否停止进程 if (key_stop) { return false; } return true; } /// /// 17.自动控制SEM拍截面照 /// /// public bool ShotSection(ref String image18) { float x0 = 0, y0 = 0, x1 = 0, y1 = 0; int state = 0; //1、放大6000倍,放大倍数参数photograph_ if (!iSEM.SetSEMVoltage(m_MsParam.Photograph_Voltage)) { arg.Message = "电压设置" + m_MsParam.Photograph_Voltage.ToString("0.0") + "失败"; arg.State = false; SendMsg("1-27"); return false; } if (!iSEM.SetMagnification(m_MsParam.Photograph_Magnification)) { arg.Message = "放大倍数调整失败"; arg.State = false; SendMsg("1-27"); return false; } arg.Message = "放大倍数调整成功"; arg.State = true; SendMsg("1-27"); //判断是否停止进程 if (key_stop) { return false; } //2.控制SEM自动对焦、亮度、对比度-接口 if (ImageFocus("1-28")) { arg.Message = "自动对焦完成"; arg.State = true; SendMsg("1-28"); } else { arg.Message = "自动对焦失败"; arg.State = false; SendMsg("1-28"); return false; } //判断是否停止进程 if (key_stop) { return false; } //1.1大于10000倍进行消像散处理 float dMag = iSEM.GetMagnification(); if (dMag > 10000)//需要消像散 { if (!ImageStig("1-28")) { LogManager.AddHardwareLog("拉直操作消像散失败，程序退出。", true); arg.Message = "拉直操作自动消像散失败！"; arg.State = false; SendMsg("1-28"); return false; } arg.Message = "拉直操作自动消像散成功！"; arg.State = true; SendMsg("1-28"); } //3、设置SEM补偿角度 if (m_MsParam.Is_Photograph == false) { if (!TiltCorrection(m_measureFile.MParam.Correction_Angle)) { arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败"; arg.State = false; SendMsg("1-29"); return false; } arg.State = true; arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功"; SendMsg("1-29"); Thread.Sleep(2000); //判断是否停止进程 if (key_stop) { return false; } } //4、拍照，5、保存照片 String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_MsParam.Photograph_Magnification.ToString("0") + "_" + ImageName5; arg.Picture_Information.Picture_FullPath = fileName5; arg.Picture_Information.Work_Status = "SEM"; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(1000); //拍照前改变速度,延时 iSEM.CmdSaveRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); if (!GetImage(ImageMode.SEM, fileName5)) { arg.Message = "SEM拍照失败"; arg.State = false; SendMsg("1-30"); return false; } arg.State = true; arg.Message = "SEM拍照成功"; SendMsg("1-30"); iSEM.CmdFocusRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //判断是否停止进程 if (key_stop) { return false; } if (m_MsParam.Is_Photograph == false) { //8,计算切割面区域偏移角度及方向 float degree = 0; int direction = 0; wr.Img_Center_Position_OffsetAngle_Direction(fileName5, out degree, out direction, out state); LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true); //接口返回像素，*pixelsize,得到坐标点。判断移动方式 if (state == 1) { //梯形角度 iSEM.SetScanRotationOn(); Thread.Sleep(1000); iSEM.SetScanRotation(degree); Thread.Sleep(1000); arg.State = true; arg.Message = "图像接口返回角度为：" + degree.ToString(); SendMsg("1-31"); if (hand_intervene == 1) { MessageBox.Show("Web返回数据移动是否正确？\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK); } } else { arg.Message = "图像接口参数State返回值为零"; arg.State = false; SendMsg("1-31"); if(hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { return false; } } //判断是否停止进程 if (key_stop) { return false; } //11、自动对焦。与之前操作相同 if (ImageFocus("1-32")) { arg.Message = "自动对焦完成"; arg.State = true; SendMsg("1-32"); } else { arg.Message = "自动对焦失败"; arg.State = false; SendMsg("1-32"); return false; } //判断是否停止进程 if (key_stop) { return false; } //1.1大于10000倍进行消像散处理 dMag = iSEM.GetMagnification(); if (dMag > 10000)//需要消像散 { if (!ImageStig("1-32")) { LogManager.AddHardwareLog("拉直操作消像散失败，程序退出。", true); arg.Message = "拉直操作自动消像散失败！"; arg.State = false; SendMsg("1-32"); return false; } arg.Message = "拉直操作自动消像散成功！"; arg.State = true; SendMsg("1-32"); } //12拍照 String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_MsParam.Photograph_Magnification.ToString("0") + "_" + ImageName6; arg.Picture_Information.Picture_FullPath = fileName6; arg.Picture_Information.Work_Status = "SEM"; arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage(); Thread.Sleep(1000); arg.Picture_Information.Magnification = iSEM.GetMagnification(); Thread.Sleep(1000); arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance(); Thread.Sleep(1000); //拍照前改变速度,延时 iSEM.CmdSaveRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); if (!GetImage(ImageMode.SEM, fileName6)) { arg.Message = "SEM拍照失败"; arg.State = false; SendMsg("1-33"); return false; } arg.State = true; image18 = fileName6; arg.Message = "SEM拍照成功"; SendMsg("1-33"); iSEM.CmdFocusRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //判断是否停止进程 if (key_stop) { return false; } //华为程序还没有做出来 } //14光束复位和Rotation关闭开关 arg.Message = "光束复位成功"; arg.State = true; SendMsg("1-36"); iSEM.SetTiltAngleOff(); Thread.Sleep(1000); iSEM.SetScanRotationOff(); Thread.Sleep(1000); iSEM.SetBeamShiftX(0); Thread.Sleep(1000); iSEM.SetBeamShiftY(0); Thread.Sleep(3000); //判断是否停止进程 if (key_stop) { return false; } return true; } //第一个孔的测试过程 public bool FirstHole() { MeasureData.CutHole firstHole = m_cutHoles[0]; //设置拉直的放大倍数 if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification)) { arg.Message = "拉直放大倍数设置失败！"; arg.State = false; SendMsg("1-0"); return false; } arg.Message = "拉直放大倍数设置成功！"; arg.State = true; SendMsg("1-0"); Thread.Sleep(1000); //自动化流程-每个点都需要补偿54度 if (m_MsParam.Is_Photograph == false) { if (!TiltCorrection(54.0f)) { arg.Message = "角度补偿54度失败！"; arg.State = false; SendMsg("1-1"); return false; } Thread.Sleep(2000); arg.Message = "角度补偿54度成功！"; arg.State = true; SendMsg("1-1"); //判断是否停止进程 if (key_stop) { return false; } } //2、拉直操作 if (!Straighten_Handle()) { LogManager.AddHardwareLog("拉直操作失败。", true); return false; } //判断是否停止进程 if (key_stop) { return false; } //13. 自动 定位功能 if (!GetPoistion()) { LogManager.AddHardwareLog("自动定位失败，程序退出。", true); return false; } //判断是否停止进程 if (key_stop) { return false; } //14.自动控制FIB切割 if (m_MsParam.Is_Photograph == false) { if (!FIBCross()) { return false; } } //判断是否停止进程 if (key_stop) { return false; } //16.找到切割位置 if (m_MsParam.Is_Photograph == false) { if (!FindCross()) { return false; } //判断是否停止进程 if (key_stop) { return false; } } //将过程17最后的拍照图片提出给18步进行调用 String img18 = ""; //17.自动控制SEM拍截面照 if (!ShotSection(ref img18)) { return false; } //判断是否停止进程 if (key_stop) { return false; } //18.自动层高分析 if (m_MsParam.Is_Photograph == false) { float size = iSEM.GetPixelSize(); float mag = iSEM.GetMagnification(); int state = 1; //wr.Img_Measure_Size(img18, mag, size, out state); if (state == 0) { arg.Message = "测量尺寸失败"; arg.State = false; SendMsg("1-40"); return false; } arg.State = true; arg.Message = "测量尺寸成功"; SendMsg("1-40"); } #region 测试程序 //最后保存测量数据-测量文件、测量状态，m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success. //中间停止更新状态为Unmeasured,过程中return false时，更新状态为failed,保存测量文件 //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成？", "确认消息", MessageBoxButtons.YesNo)) //{ // SendMsg("拍摄照片完成"); // //return true; //} //else //{ // SendMsg("拍摄照片失败"); // return false; //} //SendMsg("图像校正36度"); ////3.设置SEM角度补偿cos36度 //if (!TiltCorrection(36)) //{ // return false; //} //Thread.Sleep(3000); //string fn; //用宏抓一般图 //Thread.Sleep(5000); //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic; //SendMsg("用宏抓一般图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(5000); ////用宏抓好图 //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic; //SendMsg("用宏抓好图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(30000); //Thread.Sleep(10000); //WorkingFolder = m_measureFile.FilePath; //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6; //SendMsg("SEM拍照存储到" + fileName6); //if (!GetImage(ImageMode.SEM, fileName6)) //{ // SendMsg("SEM拍照失败"); // return false; //} ////用宏抓标志图 //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif; //SendMsg("用宏抓标志图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(30000); //Thread.Sleep(5000); //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic; //SendMsg("用宏抓一般图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(5000); //SendMsg("所有图结束"); ////17.自动控制SEM拍截面照 //{ // //1.控制SEM放大到指定参数大小范围，6000x // if (!iSEM.SetMagnification(6000)) // { // return false; // } // //2.控制SEM自动对焦、消像散、亮度、对比度 // if (!MeasParam.FocusMode) // { // //弹出手动对焦的窗口 // } // else // { // //调用自动对焦模块 // } // //3.设置SEM角度补偿cos36度 // if (!TiltCorrection(36)) // { // return false; // } // //4.控制SEM拍照 // //5.保存照片4 // String fileName5 = WorkingFolder + ImageName5; // if (!GetImage(ImageMode.SEM, fileName5)) // { // return false; // } // //6.将照片传给客户，获取偏移坐标 // float x6 = 0, y6 = 0; // float angle1 = 0; // float mage = 10000; // //7.根据坐标控制SEM移动到分析位置 // if (!iSEM.MoveStageXY(x6, y6)) // { // return false; // } // //8.验证移动准确性：获取当前SEM中心位置坐标，与客户返回坐标对比，验证是否移动正确 // float x7 = iSEM.GetStageAtX(); // float y7 = iSEM.GetStageAtY(); // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin) // { // return false; // } // //9.控制SEM平行校正，并记录校正前初始值 // float foldAnagle = iSEM.GetScanRotation(); // if (foldAnagle == float.NaN) // { // return false; // } // if (!iSEM.SetScanRotation(angle1)) // { // return false; // } // //10.控制SEM放大到指定参数大小范围 // if (!iSEM.SetMagnification(mage)) // { // return false; // } // //11.控制SEM自动对焦、消像散、亮度、对比度 // if (!MeasParam.FocusMode) // { // //弹出手动对焦的窗口 // } // else // { // //调用自动对焦模块 // } // //12.控制SEM对分析位置拍照 // String fileName6 = WorkingFolder + ImageName6; // if (!GetImage(ImageMode.SEM, fileName6)) // { // return false; // } // //13.保存照片 // //14.控制SEM取消电子束校正，回到初始值 // if (!iSEM.SetScanRotation(foldAnagle)) // { // return false; // } //} ////18.自动层高分析 //{ // //1.获取SEM Pixel Size给客户传入参数 // if (iSEM.GetPixelSize() == float.NaN) // { // return false; // } // //2.将照片传给客户，客户进行层高分析（返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据），如果客户自行出分析报告则无需返回数据 //} ////19.自动能谱分析 //{ // //1. 确定能谱位置 // //2. 控制牛津打能谱 // //3. 能谱分析——面扫+线扫描 //} #endregion return true; } //非第一个孔的测试过程 public bool OtherHole() { //设置拉直的放大倍数 if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification)) { LogManager.AddHardwareLog("拉直放大倍数设置失败，程序退出。", true); arg.Message = "拉直放大倍数设置失败！"; arg.State = false; SendMsg("1-0"); return false; } arg.Message = "拉直放大倍数设置成功！"; arg.State = true; SendMsg("1-0"); Thread.Sleep(1000); //自动化流程-每个点都需要补偿54度 if (m_MsParam.Is_Photograph == false) { if (!TiltCorrection(54.0f)) { arg.Message = "角度补偿54度失败！"; arg.State = false; SendMsg("1-1"); return false; } arg.Message = "角度补偿54度成功！"; arg.State = true; SendMsg("1-1"); Thread.Sleep(2000); //判断是否停止进程 if (key_stop) { return false; } } //拉直操作 if (!Straighten_Handle()) { return false; } //判断是否停止进程 if (key_stop) { return false; } //13. 自动 定位功能 if (!GetPoistion()) { return false; } //判断是否停止进程 if (key_stop) { return false; } //14.自动控制FIB切割 if (m_MsParam.Is_Photograph == false) { if (!FIBCross()) { return false; } } //判断是否停止进程 if (key_stop) { return false; } // 16.找到切割位置 if (m_MsParam.Is_Photograph == false) { if (!FindCross()) { return false; } //判断是否停止进程 if (key_stop) { return false; } } //将过程17最后的拍照图片提出给18步进行调用 String img18 = ""; //17.自动控制SEM拍截面照 if (!ShotSection(ref img18)) { return false; } //判断是否停止进程 if (key_stop) { return false; } //18.自动层高分析 if (m_MsParam.Is_Photograph == false) { float size = iSEM.GetPixelSize(); float mag = iSEM.GetMagnification(); int state = 1; //wr.Img_Measure_Size(img18, mag, size, out state); if (state == 0) { arg.Message = "测量尺寸失败"; SendMsg("1-40"); return false; } arg.Message = "测量尺寸成功"; SendMsg("1-40"); } #region 测试程序 //string fn; //用宏抓一般图 //Thread.Sleep(5000); //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic; //SendMsg("用宏抓一般图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(5000); ////用宏抓好图 //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic; //SendMsg("用宏抓好图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(30000); //Thread.Sleep(10000); //WorkingFolder = m_measureFile.FilePath; //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6; //SendMsg("SEM拍照存储到" + fileName6); //if (!GetImage(ImageMode.SEM, fileName6)) //{ // SendMsg("SEM拍照失败"); // return false; //} ////用宏抓标志图 //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif; //SendMsg("用宏抓标志图" + fn); //iSEM.CMDMCFFilename(fn); ////延时1s？？ //Thread.Sleep(30000); ////恢复简单抓图 //Thread.Sleep(5000); //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic; //SendMsg("用宏抓一般图" + fn); //iSEM.CMDMCFFilename(fn); //SendMsg("所有图结束"); #endregion return true; } //测试完第一个孔后的样品台初始化操作。 //再调用CommonWork执行非第一个孔的测试过程 public bool OtherHole_Init() { CutHole currentHole = m_cutHoles[m_nWorkHoleNo]; #region 初始化 //1、不只拍照，且不是倾斜观测，则移动T轴 if (m_MsParam.Is_Photograph == false && m_MsParam.Title == false) { //4. 控制样品台T轴归0，R轴变为坐标1、Z/M轴作为坐标2保存不变 if (!iSEM.SetStageGotoT(0)) { return false; } while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { return false; } } //2、如果是倾斜观测，则移动Z轴 if(m_MsParam.Title==true) { //4. 控制样品台T轴归0，R轴变为坐标1、Z/M轴作为坐标2保存不变 if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_MsParam.ZDistance/1000)) { return false; } while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { return false; } } //3. 根据光镜坐标控制样品台移动 if (!iSEM.SetStageGotoR(currentHole.Position.R)) { //SendMsg("移动失败"); return false; } LogManager.AddHardwareLog("移动R轴到="+ currentHole.Position.R.ToString(), true); while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { return false; } if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y)) { //SendMsg("移动失败"); return false; } LogManager.AddHardwareLog("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true); while (true) { Thread.Sleep(10000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { return false; } //4、倾斜观测时恢复Z轴 if (m_MsParam.Title == true) { //4. 控制样品台T轴归0，R轴变为坐标1、Z/M轴作为坐标2保存不变 if (!iSEM.SetStageGotoZ(currentHole.Position.Z)) { return false; } while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 if (key_stop) { return false; } } //5. 控制样品台，调整T轴54度、M/Z/R轴不变 if (m_MsParam.Is_Photograph == false) { if (!iSEM.SetStageGotoT(54)) { return false; } while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } } //判断是否停止进程 if (key_stop) { return false; } #endregion return true; } //初始化拉直操作 public bool Straighten_Handle() { //1、自动对焦 if (!ImageFocus("1-2")) { LogManager.AddHardwareLog("拉直操作自动对焦失败，程序退出。", true); arg.Message = "拉直操作自动对焦失败！"; arg.State = false; SendMsg("1-2"); return false; } arg.Message = "拉直操作自动对焦成功！"; arg.State = true; SendMsg("1-2"); //判断是否停止进程 if (key_stop) { return false; } //1.1大于10000倍进行消像散处理 float dMag = iSEM.GetMagnification(); if (dMag > 10000)//需要消像散 { if (!ImageStig("1-2")) { LogManager.AddHardwareLog("拉直操作消像散失败，程序退出。", true); arg.Message = "拉直操作自动消像散失败！"; arg.State = false; SendMsg("1-2"); return false; } arg.Message = "拉直操作自动消像散成功！"; arg.State = true; SendMsg("1-2"); } //2、拍张照片 String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_MsParam.Stretch_Magnification.ToString("0") + "_" + ImageName0; //拍照前改变速度,延时 iSEM.CmdSaveRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); if (!GetImage(ImageMode.SEM, fileName0)) { arg.Message = "拉直拍照成功"; arg.State = false; SendMsg("1-3"); return false; } arg.Message = "拉直拍照成功！"; arg.State = true; SendMsg("1-3"); iSEM.CmdFocusRate(); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); //3、华为接口，获取旋转角度 float degree = 0; int direction = 0; int state = 1; wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_MsParam.SampleName), m_MsParam.Firm, out degree, out direction, out state); LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true); if (state == 0) { arg.Message = "华为接口参数state返回为零"; arg.State = false; SendMsg("1-4"); if (hand_intervene == 1) { if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作？。", "确认消息", MessageBoxButtons.YesNo)) { return false; } } else { return false; } } if (direction == 2) { degree = -degree; } #region//暂时不用这个拉直 //旋转R轴 //float getr = iSEM.GetStageAtR(); //getr = getr + degree; //if(getr>R_Max) //{ // getr = getr - 360; //} //if(getr X_Max || y1 < Y_Min || y1 > Y_Max) //{ // return false; //} //iSEM.MoveStageXY(x1, y1); #endregion //4、拉直，旋转R轴 iSEM.SetStageDeltaR(degree); while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } arg.Message = "拉直操作完成"; arg.State = true; SendMsg("1-4"); //华为接口，去掉人工干预 //MessageBox.Show("拉直操作完成，如果不正确请手动进行拉直然后点击OK按钮。", "确认消息", MessageBoxButtons.OK); return true; } //角度补偿 public bool TiltCorrection(float a_fAngle) { if (!iSEM.SetTiltAngleOn()) { return false; } //恢复原始状态 if (!iSEM.SetTiltAngle(a_fAngle)) { return false; } return true; } //拍图 public bool GetImage(ImageMode a_mode, String a_fileName) { //3. 获取分辨率 int[] ImageSize = iSEM.GetImageStore(); if (ImageSize[0] == 0 || ImageSize[1] == 0) { return false; } short width = (short)ImageSize[0]; short height = (short)ImageSize[1]; //4. 抓图 if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0)) { return false; } return true; } //自动聚焦 public bool AutoFocus(FocusParam a_param, out int a_nWd, String step_code) { a_nWd = 0; float wd = iSEM.GetWorkingDistance(); a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离 if (a_param == null) { LogManager.AddHardwareLog("空参数", true); return false; } string path = a_param.Path; if (!Directory.Exists(path)) { LogManager.AddHardwareLog("文件夹丢失", true); return false; } string path_coarse = a_param.Path + "\\Coarse"; if (!Directory.Exists(path_coarse)) { Directory.CreateDirectory(path_coarse); } string path_fine = a_param.Path + "\\Fine"; if (!Directory.Exists(path_fine)) { Directory.CreateDirectory(path_fine); } //1. 拍照 //1.1， 粗拍照 //1.1.1， 根据参数计算拍照次数 double nUp = a_param.UP * 100.0 ; double nDown = a_param.Down * 100.0; double nStep = a_param.Step * 100.0; double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5); LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true); //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString()); //粗拍照 for (int i = 0; i < nTimes; i++) { int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5); iSEM.SetWorkingDistance((float)(cWd * 0.00000001)); arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() +"um"); String fileName = path_coarse + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(ImageMode.SEM, fileName)) { return false; } arg.State = true; arg.Message = "自动对焦"; SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(3000); } //1.2， 选定细拍照的工作距离 int CorWd; ChooseBest(path_coarse,out CorWd); a_nWd = CorWd; //SendMsg("粗选工作距离wd = " + a_nWd.ToString() ); //1.3， 细拍照 if ( (CorWd - a_param.Range * 100.0) <=0) { return false; } double nfUp = CorWd - a_param.Range * 100.0; double nfStep = a_param.fStep * 100.0; double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5); //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString()); for (int i = 0; i < nfTimes; i++) { int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5); iSEM.SetWorkingDistance((float)(cWd * 0.00000001)); arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time)+1000); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() + "um"); String fileName = path_fine + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(ImageMode.SEM, fileName)) { return false; } arg.State = true; arg.Message = "自动对焦"; SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(2000); } int fineWd; ChooseBest(path_fine, out fineWd); //SendMsg("wd fine max = " + fineWd.ToString()); a_nWd = fineWd; //SendMsg("细选工作距离wd = " + a_nWd.ToString()); return true; } //自动消像散 AutoStig public bool AutoStig(FocusParam a_param, out int a_nWd, String step_code) { a_nWd = 0; float wd = 0; if (a_param.TYPE == 2) { wd = iSEM.GetAstigmatismX(); } else if (a_param.TYPE == 3) { wd = iSEM.GetAstigmatismY(); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离 if (a_param == null) { LogManager.AddHardwareLog("空参数", true); return false; } string path = a_param.Path; if (!Directory.Exists(path)) { LogManager.AddHardwareLog("文件夹丢失", true); return false; } string path_coarse = a_param.Path + "\\Coarse"; if (!Directory.Exists(path_coarse)) { Directory.CreateDirectory(path_coarse); } string path_fine = a_param.Path + "\\Fine"; if (!Directory.Exists(path_fine)) { Directory.CreateDirectory(path_fine); } //1. 拍照 //1.1， 粗拍照 //1.1.1， 根据参数计算拍照次数 double nUp = a_param.UP * 100.0; double nDown = a_param.Down * 100.0; double nStep = a_param.Step * 100.0; double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5); LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true); //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString()); //粗拍照 for (int i = 0; i < nTimes; i++) { int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5); if (a_param.TYPE == 2) { iSEM.SetAstigmatismX((float)(cWd * 0.01)); } else if (a_param.TYPE == 3) { iSEM.SetAstigmatismY((float)(cWd * 0.01)); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() +"um"); String fileName = path_coarse + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(ImageMode.SEM, fileName)) { return false; } arg.State = true; arg.Message = "自动像散"; SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(3000); } //1.2， 选定细拍照的工作距离 int CorWd; ChooseBest(path_coarse, out CorWd); a_nWd = CorWd; //SendMsg("粗选工作距离wd = " + a_nWd.ToString() ); //1.3， 细拍照 if ((CorWd - a_param.Range * 100.0) <= -10000) { return false; } double nfUp = CorWd - a_param.Range * 100.0; double nfStep = a_param.fStep * 100.0; double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5); //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString()); for (int i = 0; i < nfTimes; i++) { int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5); if (a_param.TYPE == 2) { iSEM.SetAstigmatismX((float)(cWd * 0.01)); } else if (a_param.TYPE == 3) { iSEM.SetAstigmatismY((float)(cWd * 0.01)); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() + "um"); String fileName = path_fine + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(ImageMode.SEM, fileName)) { return false; } arg.State = true; arg.Message = "自动像散"; SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(2000); } int fineWd; ChooseBest(path_fine, out fineWd); //SendMsg("wd fine max = " + fineWd.ToString()); a_nWd = fineWd; //SendMsg("细选工作距离wd = " + a_nWd.ToString()); return true; } //自动FIB对焦 AutoFIBFocus public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code) { a_nWd = 0; float wd = 0; if (a_param.TYPE == 4) { wd = iSEM.GetFIBObjectivePotential(); } else { LogManager.AddHardwareLog("FIB自动聚焦参数设置有误", true); return false; } a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离 if (a_param == null) { LogManager.AddHardwareLog("空参数", true); return false; } string path = a_param.Path; if (!Directory.Exists(path)) { LogManager.AddHardwareLog("文件夹丢失", true); return false; } string path_coarse = a_param.Path + "\\Coarse"; if (!Directory.Exists(path_coarse)) { Directory.CreateDirectory(path_coarse); } string path_fine = a_param.Path + "\\Fine"; if (!Directory.Exists(path_fine)) { Directory.CreateDirectory(path_fine); } //1. 拍照 //1.1， 粗拍照 //1.1.1， 根据参数计算拍照次数 double nUp = a_param.UP * 100.0; double nDown = a_param.Down * 100.0; double nStep = a_param.Step * 100.0; double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5); LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true); //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString()); //粗拍照 for (int i = 0; i < nTimes; i++) { int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5); if (a_param.TYPE == 4) { iSEM.SetFIBObjectivePotential((float)(cWd * 0.01)); } else { LogManager.AddHardwareLog("FIB对焦参数设置有误，对焦类型错", true); return false; } //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() +"um"); String fileName = path_coarse + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(ImageMode.SEM, fileName)) { return false; } arg.State = true; arg.Message = "FIB自动对焦"; SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(3000); } //1.2， 选定细拍照的工作距离 int CorWd; ChooseBest(path_coarse, out CorWd); a_nWd = CorWd; //SendMsg("粗选工作距离wd = " + a_nWd.ToString() ); //1.3， 细拍照 if ((CorWd - a_param.Range * 100.0) <0) { return false; } double nfUp = CorWd - a_param.Range * 100.0; double nfStep = a_param.fStep * 100.0; double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5); //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString()); for (int i = 0; i < nfTimes; i++) { int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5); if (a_param.TYPE == 4) { iSEM.SetFIBObjectivePotential((float)(cWd * 0.01)); } else { LogManager.AddHardwareLog("自动消像散参数设置有误", true); return false; } //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001); Thread.Sleep(Convert.ToInt32(cycle_time) + 1000); int swd = cWd / 100; //SendMsg("wd = " + swd.ToString() + "um"); String fileName = path_fine + "\\" + cWd.ToString() + ".tif"; arg.Picture_Information.Picture_FullPath = fileName; if (!GetImage(ImageMode.SEM, fileName)) { return false; } arg.State = true; arg.Message = "FIB自动对焦"; SendMsg(step_code); //判断是否停止进程 if (key_stop) { return false; } //Thread.Sleep(2000); } int fineWd; ChooseBest(path_fine, out fineWd); //SendMsg("wd fine max = " + fineWd.ToString()); a_nWd = fineWd; //SendMsg("细选工作距离wd = " + a_nWd.ToString()); return true; } //LoG算子计算 private double LoGMean(string a_strImgPath) { //读入Img文件 if (!File.Exists(a_strImgPath)) { return 0; } Mat src, gray_src; int kernel_size = 3; src = Cv2.ImRead(a_strImgPath); gray_src = new Mat(); src.CvtColor(ColorConversionCodes.BGR2GRAY); Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10)); Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel); Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0); Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size); Cv2.ConvertScaleAbs(src, src); //图像的平均灰度 double meanValue = 0.0; meanValue = Cv2.Mean(src)[0]; return meanValue; } //梯度计算 private double Tenengrad(string a_strImgPath) { //读入Img文件 if (!File.Exists(a_strImgPath)) { return 0; } Mat src; src = Cv2.ImRead(a_strImgPath); src.CvtColor(ColorConversionCodes.BGR2GRAY); Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10)); Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel); Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0); Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1); //图像的平均灰度 double meanValue = 0.0; meanValue = Cv2.Mean(src)[0]; return meanValue; } //梯度计算 private double TTgrad(string a_strImgPath) { //读入Img文件 if (!File.Exists(a_strImgPath)) { return 0; } Mat src; src = Cv2.ImRead(a_strImgPath); src.CvtColor(ColorConversionCodes.BGR2GRAY); Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10)); Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel); Mat scalex = new Mat(); Mat scaley = new Mat(); Cv2.Scharr(src, src, src.Depth(), 1, 0); Cv2.ConvertScaleAbs(src, scalex); Cv2.Scharr(src, src, src.Depth(), 0, 1); Cv2.ConvertScaleAbs(src, scaley); Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src); //图像的平均灰度 double meanValue = 0.0; meanValue = Cv2.Mean(src)[0]; return meanValue; } //三选二算法 private void ChooseBest(string a_strImgPath, out int a_nWd) { a_nWd = -1; var files = Directory.GetFiles(a_strImgPath, "*.tif"); float[] values = new float[files.Length]; double smax1 = LoGMean(files[0]); int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0])); double smax2 = Tenengrad(files[0]); int wdmax2 = wdmax1; double smax3 = TTgrad(files[0]); int wdmax3 = wdmax1; int x = 0; foreach (var file in files) { int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file)); double svalue1 = LoGMean(file); double svalue2 = Tenengrad(file); double svalue3 = TTgrad(file); if (smax1 < svalue1) { smax1 = svalue1; wdmax1 = wd; } if (smax2 < svalue2) { smax2 = svalue2; wdmax2 = wd; } if (smax3 < svalue3) { smax3 = svalue3; wdmax3 = wd; } x++; } //SendMsg("LoG = " + wdmax1.ToString() + "，梯度 = " + wdmax2.ToString() + "，滤波 = " + wdmax3.ToString()); if (wdmax1 == wdmax2 || wdmax1 == wdmax3) { a_nWd = wdmax1; //SendMsg("焦距 = " + wdmax1.ToString()); } else if (wdmax1 == wdmax2 || wdmax2 == wdmax3) { a_nWd = wdmax2; //SendMsg("焦距 = " + wdmax2.ToString()); } else if (wdmax3 == wdmax2 || wdmax1 == wdmax3) { a_nWd = wdmax3; //SendMsg("焦距 = " + wdmax3.ToString()); } else { //SendMsg("对焦失败。"); } } //移动到像素位置 bool MoveToPix(float xc, float yc) { float pixSize = iSEM.GetPixelSize(); Thread.Sleep(500); //0:width, 1:height int[] imageSize = iSEM.GetImageStore(); int width = imageSize[0]/2; int height = imageSize[1]/2; float deltX = (xc - (float)width) * pixSize; float deltY = (yc - (float)height) * pixSize; float xpCur = iSEM.GetStageAtX(); float ypCur = iSEM.GetStageAtY(); float xpNew = xpCur - deltX; float ypNew = ypCur - deltY; LogManager.AddHardwareLog("样品台移动信息:deltx=" + deltX.ToString() + ",delty=" + deltY.ToString() + ",xpNew=" + xpNew.ToString() + ",ypNew=" + ypNew.ToString(), true); if (deltX > 10)//使用移动样品台实现 { if (!iSEM.SetStageGotoX(xpNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败"; //arg.State = true; //SendMsg("1-7"); } else//使用移动光束实现 { float beamX = deltX * (float)0.66; if (!iSEM.SetBeamShiftX(beamX)) { return false; } } if (deltY > 10)//使用移动样品台实现 { if (!iSEM.SetStageGotoY(ypNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } } else//使用移动光束实现 { float beamY = deltY * (float)0.671; if (!iSEM.SetBeamShiftY(beamY)) { return false; } } return true; } } }