//时间:20200610 //作者:郝爽 //功能:测量线程 using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using System.Windows.Forms; using System.Threading; using System.IO; using SmartSEMControl; using MeasureData; using FileManager; namespace MeasureThread { //图片模式 public enum ImageMode { FIB, SEM } public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托 public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e); public class ThreadStatusEventArgs { public string State { get { return m_state; } set { m_state = value; } } private string m_state; public DateTime Time { get { return m_time; } set { m_time = value; } } private DateTime m_time; public ThreadStatusEventArgs(string a_State) { this.m_state = a_State; } } public class CutHolesStatusEventArgs { public string State { get { return m_state; } set { m_state = value; } } private string m_state; public string HoleName { get { return m_holeName; } set { m_holeName = value; } } private string m_holeName; public CutHolesStatusEventArgs(string a_state, string a_holeName) { this.m_state = a_state; this.m_holeName = a_holeName; } } public class Measure { public event ThreadStatusHandler SendThreadStatus; // 声明事件 public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件 //全局只有一个fatorySEM static FactoryHardware factorySEM = FactoryHardware.Instance; ISEMControl iSEM = factorySEM.ISEM; //@的作用是不用转义字符\\只打一个就行 const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正 const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点 const String ImageName3 = @"ImageFIB600X2.tif"; const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点 const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正 const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高 const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针 const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针 const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏 const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏 const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像 const String ElyDeposition = @"Deposition.ely"; //沉积 const String ElyCrossSection = @"CrossSection.ely"; //切割 const float fMin = (float)0.0000002; //单位是米 int m_nWorkHoleNo = -1; //测量文件 private MeasureFile m_measureFile; public MeasureFile MeasureFile { get { return this.m_measureFile; } set { this.m_measureFile = value; } } //测量的切割孔 private List m_cutHoles; public List cutHoles { get { return this.m_cutHoles; } set { this.m_cutHoles = value; } } //工作文件夹 private string m_WorkingFolder; public string WorkingFolder { get { return this.m_WorkingFolder; } set { this.m_WorkingFolder = value; } } //程序当前路径 private string m_ProgramFolder = Directory.GetCurrentDirectory(); //线程状态 private ThreadStatus m_ThreadStatus; public ThreadStatus TStatus { get { return this.m_ThreadStatus; } set { this.m_ThreadStatus = value; } } //测量参数 private MeasureParam m_MsParam; public MeasureParam MeasParam { get { return this.m_MsParam; } set { this.m_MsParam = value; } } //构造函数 public Measure() { Init(); } private void Init() { MeasParam = new MeasureParam(); TStatus = new ThreadStatus(); cutHoles = new List(); } //初始化测量业务, 读测量文件,判断是否有可测试的切孔 public bool InitMeas(MeasureFile a_measureFile) { m_measureFile = a_measureFile; List listHoles = m_measureFile.ListCutHole; foreach (CutHole h in listHoles) { if (h.SWITCH == true) { m_cutHoles.Add(h); } } if (m_cutHoles.Count == 0) return false; this.m_MsParam = m_measureFile.MParam; return true; } public void SendMsg(string a_StrMsg) { ThreadStatusEventArgs arg = new ThreadStatusEventArgs(a_StrMsg); arg.Time = DateTime.Now; SendThreadStatus(this, arg); } public void SendCutHoleMsg(string a_state, string a_holeName) { CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName); arg.HoleName = a_holeName; arg.State = a_state; SendCutHolesStatus(this, arg); } //测量流程 public void DoMeasure() { //创建线程的测量状态的更新 this.TStatus.ComputeTime(THREAD_TIME_TYPE.START); if (SendThreadStatus != null) { SendMsg("开始测量。"); } //检查硬件连接是否正常 if (!ConnectHardware()) { SendMsg("连接硬件失败。"); this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED); return; } SendMsg("硬件连接成功。"); //设置工作文件夹 if (!SetWorkingFolderStr()) { SendMsg("设置工作文件夹失败"); this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED); return; } SendMsg("创建工作文件路径为" + WorkingFolder); float[] firstPosition; for (int i = 0; i < m_cutHoles.Count; i++) { m_nWorkHoleNo = i; if (i == 0) { SendMsg("第一个切孔开始测量"); //切孔操作-开始 SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName); firstPosition = iSEM.GetStagePosition(); //第一个孔的测试 FirstHole(); //切孔操作-完成 SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName); } else { //非第一个孔的测试 SendMsg("第" + i.ToString() + "个切孔开始测量"); //切孔操作-开始 SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName); OtherHole(); //切孔操作-完成 SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName); } } } //检查硬件连接是否正常 public bool ConnectHardware() { //返回硬件的连接状态 return iSEM.ConnectStatus(); } //设置工作文件夹 public bool SetWorkingFolderStr() { WorkingFolder = m_measureFile.FilePath; return true; ////获取工作文件路径 //string pathName = m_measureFile.FilePath; ////判断工作文件路径是否为空或无效 //if (string.IsNullOrEmpty(pathName)) //{ // SendMsg("路径无效"); // return false; //} ////文件未保存 //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0) //{ // SendMsg("工程文件未保存"); // return false; //} ////获取工作文件所在文件夹 //string folder = System.IO.Path.GetDirectoryName(pathName); //if (string.IsNullOrEmpty(folder)) //{ // SendMsg("工程文件无效"); // return false; //} //WorkingFolder += @"\\"; //LogManager.Init(WorkingFolder); //return false; } //插入PT针 public bool InsertPT() { string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt; SendMsg("调用宏插入PT针宏文件" + fn); iSEM.CMDMCFFilename(fn); //延时1s?? Thread.Sleep(1000); return true; } //撤出PT针 public bool RetractPT() { string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt; SendMsg("调用宏撤出PT针宏文件" + fn); iSEM.CMDMCFFilename(fn); //延时1s?? Thread.Sleep(1000); return true; } //PT沉积 public bool PTWork() { //执行PT沉积的ELY文件 string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition; SendMsg("执行PT沉积Ely文件:" + fn); if (!ExcuteEly(fn)) { return false; } //等待沉积完成 while (true) { Thread.Sleep(10000); if (iSEM.GetFIBMode() == 0) { break; } } return true; } //FIB切割 public bool FIBWork() { //执行PT沉积的ELY文件 string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection; SendMsg("执行FIB切割Ely文件:" + fn); if (!ExcuteEly(fn)) { return false; } //等待切割完成 while (true) { Thread.Sleep(10000); if (iSEM.GetFIBMode() == 0) { break; } } return true; } public bool ExcuteEly(string a_filename) { //执行ELy文件有三个动作 //1. 选择ELY文件 SendMsg("选择ELY文件"); if (!iSEM.CmdFIBLoadELY(a_filename)) { SendMsg("选择ELY文件失败"); return false; } Thread.Sleep(1000); //2. 确认ELY文件 SendMsg("确认ELY文件"); if (!iSEM.CmdFIBEXPOSUREELY()) { SendMsg("确认ELY文件失败"); return false; } Thread.Sleep(1000); //3. 执行ELY文件 SendMsg("执行ELY文件"); if (!iSEM.CmdFIBSTARTELY()) { SendMsg("执行ELY文件失败"); return false; } Thread.Sleep(1000); return true; } /// ///13. 自动 定位功能 /// /// public bool GetPoistion() { SendMsg("自动定位"); //13.自动定位切割 { SendMsg("放大600倍"); //1.控制SEM放大600X if (!iSEM.SetMagnification(600)) { return false; } //2.控制SEM自动对焦、亮度、对比度 // if (!MeasParam.FocusMode) { if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo)) { SendMsg("拍摄照片完成"); //return true; } else { SendMsg("拍摄照片失败"); return false; } //弹出手动对焦的窗口 } //else //{ // //调用自动对焦模块 //} //3.设置SEM进行角度补偿54度 SendMsg("设置校正54度"); if (!TiltCorrection(54)) { SendMsg("设置SEM进行角度补偿54度"); return false; } Thread.Sleep(5000); //4.控制SEM拍照 SendMsg("SEM拍照"); //5.保存照片 { //1. 创建目录,已经完成 //2. 设置图片名称 //3. 保存图片1 WorkingFolder = m_measureFile.FilePath; String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1; SendMsg("SEM拍照存储到" + fileName1); if (!GetImage(ImageMode.SEM, fileName1)) { SendMsg("SEM拍照失败"); return false; } Thread.Sleep(3000); } //6.设置FIB拍照参数——扫描时间、束流等 //7.控制FIB自动亮度、对比度 SendMsg("切换FIB控制"); if (!iSEM.CmdFIBModeFIB()) { SendMsg("FIB模式切换失败"); return false; } Thread.Sleep(10000); //8.控制FIB拍照 //9.保存照片 SendMsg("FIB拍照"); { //1. 设置图片名称 //2. 保存图片2 String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2; if (!GetImage(ImageMode.FIB, fileName2)) { SendMsg("FIB拍照失败"); return false; } Thread.Sleep(3000); } //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数) SendMsg("调用识别位置"); if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo)) { SendMsg("移动已完成"); //return true; } else { SendMsg("移动已失败"); return false; } SendMsg("进行PT沉积"); //11.自动工具样品类型参数确定是否需要PT沉积 { //1. 根据客户PT沉积坐标控制FIB调整到中心位置 //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确 //3. 根据坐标进行PT沉积 if (!PTWork()) { SendMsg("PT沉积失败"); return false; } } return true; //模拟为客户返回的坐标值 float x0 = 0, y0 = 0; SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败"); //12.根据梯形坐标控制FIB调整到中心位置 if (!iSEM.MoveStageXY(x0, y0)) { SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败"); return false; } //电镜移动是有一个延时的操作的? //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确 float x1 = iSEM.GetStageAtX(); float y1 = iSEM.GetStageAtY(); if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin) { SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败"); return false; } //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库 float[] firstPosition = iSEM.GetStagePosition(); //这里要调用文件保存功能 SendMsg("坐标1(" + firstPosition[0].ToString() + "," + firstPosition[1].ToString() + "," + firstPosition[2].ToString() + "," + firstPosition[3].ToString() + "," + firstPosition[4].ToString() + "," + firstPosition[5].ToString() + ")"); } return false; } /// /// 14. FIB切割 /// /// public bool FIBCross() { //14.自动控制FIB切割 { //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流 //2.控制FIB进行切割 SendMsg("FIB切割"); if (!FIBWork()) { SendMsg("FIB切割失败"); return false; } Thread.Sleep(5000); //3.控制FIB拍照600X //4.保存图片 { //1.设置图片名称 //2.保存图片3 WorkingFolder = m_measureFile.FilePath; String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3; SendMsg("SEM拍照存储到" + fileName3); if (!GetImage(ImageMode.FIB, fileName3)) { SendMsg("FIB拍照失败"); return false; } Thread.Sleep(3000); } //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警 //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻 } return true; } /// /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转 /// /// public bool FindCross() { //16.自动调整SEM找到切割位置 { //1.控制SEM放大到300倍 if (!iSEM.SetMagnification(300)) { return false; } //2.控制SEM自动对焦、亮度、对比度-接口 if (!MeasParam.FocusMode) { //弹出手动对焦的窗口 } else { //调用自动对焦模块 } Thread.Sleep(5000); //3.控制SEM拍照 String fileName4 = WorkingFolder + ImageName4; if (!GetImage(ImageMode.SEM, fileName4)) { return false; } Thread.Sleep(3000); //4.将照片传给客户,获取偏移坐标,以及偏移角度 float x4 = 0, y4 = 0; float angle = 0; //5.根据坐标控制SEM移动到切孔位置,居中 if (!iSEM.MoveStageXY(x4, y4)) { return false; } if (!iSEM.SetScanRotation(angle)) { return false; } ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确 //float x5 = iSEM.GetStageAtX(); //float y5 = iSEM.GetStageAtY(); //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin) //{ // return false; //} } return true; } public bool CommonWork() { SendMsg("插入PT针"); //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入 //if (firstHole.PT == true) { if (!InsertPT()) { SendMsg("插入PT针失败"); return false; } } //13. 自动 定位功能 SendMsg("自动定位切割位置"); if (!GetPoistion()) { SendMsg("自动定位切割位置失败"); return false; } //14.自动控制FIB切割 SendMsg("FIB切割"); if (!FIBCross()) { SendMsg("FIB切割失败"); return false; } //{ // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流 // //2.控制FIB进行切割 // //3.控制FIB拍照600X // //4.保存图片 // { // //1.设置图片名称 // //2.保存图片3 // String fileName3 = WorkingFolder + ImageName3; // if (!GetImage(ImageMode.FIB, fileName3)) // { // return false; // } // } // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警 // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻 //} //15.根据样品类型决定是否撤出PT针 SendMsg("撤出PT针"); //if (firstHole.PT == false) //{ if (!RetractPT()) { SendMsg("撤出PT针失败"); return false; } //} // 16.找到切割位置 SendMsg("找到切割位置"); //17.自动控制SEM拍截面照 SendMsg("观测层高"); SendMsg("切换SEM控制"); if (!iSEM.CmdFIBModeSEM()) { SendMsg("SEM模式切换失败"); return false; } Thread.Sleep(10000); SendMsg("放大6000倍"); if (!iSEM.SetMagnification(6000)) { SendMsg("放大倍数调整失败"); return false; } if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo)) { SendMsg("拍摄照片完成"); //return true; } else { SendMsg("拍摄照片失败"); return false; } SendMsg("图像校正36度"); //3.设置SEM角度补偿cos36度 if (!TiltCorrection(36)) { return false; } Thread.Sleep(3000); string fn; //用宏抓一般图 Thread.Sleep(5000); fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic; SendMsg("用宏抓一般图" + fn); iSEM.CMDMCFFilename(fn); //延时1s?? Thread.Sleep(5000); //用宏抓好图 fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic; SendMsg("用宏抓好图" + fn); iSEM.CMDMCFFilename(fn); //延时1s?? Thread.Sleep(30000); Thread.Sleep(10000); WorkingFolder = m_measureFile.FilePath; String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6; SendMsg("SEM拍照存储到" + fileName6); if (!GetImage(ImageMode.SEM, fileName6)) { SendMsg("SEM拍照失败"); return false; } //用宏抓标志图 fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif; SendMsg("用宏抓标志图" + fn); iSEM.CMDMCFFilename(fn); //延时1s?? Thread.Sleep(30000); //恢复简单抓图 Thread.Sleep(5000); fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic; SendMsg("用宏抓一般图" + fn); iSEM.CMDMCFFilename(fn); SendMsg("所有图结束"); return true; } //第一个孔的测试过程 public bool FirstHole() { MeasureData.CutHole firstHole = m_cutHoles[0]; SendMsg("插入PT针"); //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入 //if (firstHole.PT == true) { if (!InsertPT()) { SendMsg("插入PT针失败"); return false; } } //13. 自动 定位功能 SendMsg("自动定位切割位置"); if (!GetPoistion()) { SendMsg("自动定位切割位置失败"); return false; } //14.自动控制FIB切割 SendMsg("FIB切割"); if (!FIBCross()) { SendMsg("FIB切割失败"); return false; } //{ // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流 // //2.控制FIB进行切割 // //3.控制FIB拍照600X // //4.保存图片 // { // //1.设置图片名称 // //2.保存图片3 // String fileName3 = WorkingFolder + ImageName3; // if (!GetImage(ImageMode.FIB, fileName3)) // { // return false; // } // } // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警 // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻 //} //15.根据样品类型决定是否撤出PT针 SendMsg("撤出PT针"); //if (firstHole.PT == false) //{ if (!RetractPT()) { SendMsg("撤出PT针失败"); return false; } //} // 16.找到切割位置 SendMsg("找到切割位置"); //17.自动控制SEM拍截面照 SendMsg("观测层高"); SendMsg("切换SEM控制"); if (!iSEM.CmdFIBModeSEM()) { SendMsg("SEM模式切换失败"); return false; } Thread.Sleep(10000); SendMsg("放大6000倍"); if (!iSEM.SetMagnification(6000)) { SendMsg("放大倍数调整失败"); return false; } if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo)) { SendMsg("拍摄照片完成"); //return true; } else { SendMsg("拍摄照片失败"); return false; } SendMsg("图像校正36度"); //3.设置SEM角度补偿cos36度 if (!TiltCorrection(36)) { return false; } Thread.Sleep(3000); string fn; //用宏抓一般图 Thread.Sleep(5000); fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic; SendMsg("用宏抓一般图" + fn); iSEM.CMDMCFFilename(fn); //延时1s?? Thread.Sleep(5000); //用宏抓好图 fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic; SendMsg("用宏抓好图" + fn); iSEM.CMDMCFFilename(fn); //延时1s?? Thread.Sleep(30000); Thread.Sleep(10000); WorkingFolder = m_measureFile.FilePath; String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6; SendMsg("SEM拍照存储到" + fileName6); if (!GetImage(ImageMode.SEM, fileName6)) { SendMsg("SEM拍照失败"); return false; } //用宏抓标志图 fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif; SendMsg("用宏抓标志图" + fn); iSEM.CMDMCFFilename(fn); //延时1s?? Thread.Sleep(30000); Thread.Sleep(5000); fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic; SendMsg("用宏抓一般图" + fn); iSEM.CMDMCFFilename(fn); //延时1s?? Thread.Sleep(5000); SendMsg("所有图结束"); ////17.自动控制SEM拍截面照 //{ // //1.控制SEM放大到指定参数大小范围,6000x // if (!iSEM.SetMagnification(6000)) // { // return false; // } // //2.控制SEM自动对焦、消像散、亮度、对比度 // if (!MeasParam.FocusMode) // { // //弹出手动对焦的窗口 // } // else // { // //调用自动对焦模块 // } // //3.设置SEM角度补偿cos36度 // if (!TiltCorrection(36)) // { // return false; // } // //4.控制SEM拍照 // //5.保存照片4 // String fileName5 = WorkingFolder + ImageName5; // if (!GetImage(ImageMode.SEM, fileName5)) // { // return false; // } // //6.将照片传给客户,获取偏移坐标 // float x6 = 0, y6 = 0; // float angle1 = 0; // float mage = 10000; // //7.根据坐标控制SEM移动到分析位置 // if (!iSEM.MoveStageXY(x6, y6)) // { // return false; // } // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确 // float x7 = iSEM.GetStageAtX(); // float y7 = iSEM.GetStageAtY(); // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin) // { // return false; // } // //9.控制SEM平行校正,并记录校正前初始值 // float foldAnagle = iSEM.GetScanRotation(); // if (foldAnagle == float.NaN) // { // return false; // } // if (!iSEM.SetScanRotation(angle1)) // { // return false; // } // //10.控制SEM放大到指定参数大小范围 // if (!iSEM.SetMagnification(mage)) // { // return false; // } // //11.控制SEM自动对焦、消像散、亮度、对比度 // if (!MeasParam.FocusMode) // { // //弹出手动对焦的窗口 // } // else // { // //调用自动对焦模块 // } // //12.控制SEM对分析位置拍照 // String fileName6 = WorkingFolder + ImageName6; // if (!GetImage(ImageMode.SEM, fileName6)) // { // return false; // } // //13.保存照片 // //14.控制SEM取消电子束校正,回到初始值 // if (!iSEM.SetScanRotation(foldAnagle)) // { // return false; // } //} ////18.自动层高分析 //{ // //1.获取SEM Pixel Size给客户传入参数 // if (iSEM.GetPixelSize() == float.NaN) // { // return false; // } // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据 //} ////19.自动能谱分析 //{ // //1. 确定能谱位置 // //2. 控制牛津打能谱 // //3. 能谱分析——面扫+线扫描 //} return true; } //非第一个孔的测试过程 public void OtherHole() { //for (int i = 1; i < m_cutHoles.Count; i++) //{ SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString()); CutHole currentHole = m_cutHoles[m_nWorkHoleNo]; //1. 初始化 { //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻 //读取图像冻结状态 float ffrozen = iSEM.GetImageFrozen(); if (ffrozen == float.NaN) { return; } if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo)) { SendMsg("样品台恢复到水平"); //return true; } else { SendMsg("禁止样品台恢复到水平"); return; } //2. 调节样品1号孔的样品台6轴坐标 //3. 将样品1号孔坐标2存入数据库 //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变 if (!iSEM.SetStageGotoT(0)) { return; } while (true) { Thread.Sleep(10000); if (iSEM.GetStageIs() == 0) { break; } } //5. 获取光镜2号孔XY坐标 SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")"); //6. 根据光镜坐标控制样品台移动 if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y)) { SendMsg("移动失败"); } while (true) { Thread.Sleep(10000); if (iSEM.GetStageIs() == 0) { break; } } //7. 控制样品台,调整T轴54度、M/Z/R轴不变 if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo)) { SendMsg("样品台旋转"); //return true; } else { SendMsg("禁止样品台旋转"); return; } if (!iSEM.SetStageGotoT(54)) { return; } while (true) { Thread.Sleep(10000); if (iSEM.GetStageIs() == 0) { break; } } } SendMsg("拉直操作"); SendMsg("其他操作与1号孔操作一致"); if (!CommonWork()) { return; } //2. 定位切割 { //1. 拉直操作 { //1.1 控制SEM进行拍照 //1.2 图片传给客户,返回偏移角度 //1.3 根据返回角度,控制样品台转动 } //2. 与1号孔13步相同 } //3. 以后步骤与1号孔以后步骤一致 //} } //角度补偿 public bool TiltCorrection(float a_fAngle) { //记录原来电镜的状态 // bool bTilt = false; //float fOldTilt = iSEM.GetTiltCorrection(); //if (fOldTilt == float.NaN) //{ // return false; //} //else if (fOldTilt == 1) //{ // bTilt = true; //} //else if (fOldTilt == 0) //{ // bTilt = false; //} //float fOldAngle = iSEM.GetTiltAngle(); //if (fOldAngle == float.NaN) //{ // return false; //} //开启校正 SendMsg("开启校正"); if (!iSEM.SetTiltAngleOn()) { return false; } //设置校正角度 //if (!iSEM.SetTiltAngle(fOldAngle)) //{ // return false; //} //恢复原始状态 SendMsg("校正角度"+ a_fAngle.ToString()); if (!iSEM.SetTiltAngle(a_fAngle)) { return false; } //if (bTilt) //{ // if (!iSEM.SetTiltCorrectionOn()) // { // return false; // } //} //else //{ // if (!iSEM.SetTiltCorrectionOff()) // { // return false; // } //} return true; } //拍图 public bool GetImage(ImageMode a_mode, String a_fileName) { //1. 图像解冻 float foldFrozen = iSEM.GetImageFrozen(); if (foldFrozen == float.NaN) { return false; } if (!iSEM.ImageLive()) { return false; } //2. 确认图像模式 if (ImageMode.SEM == a_mode) { if (!iSEM.CmdFIBModeSEM()) { return false; } } else if (ImageMode.FIB == a_mode) { if (!iSEM.CmdFIBModeFIB()) { return false; } } else { return false; } //3. 获取分辨率 int[] ImageSize = iSEM.GetImageStore(); if (ImageSize[0] == 0 || ImageSize[1] == 0) { return false; } short width = (short)ImageSize[0]; short height = (short)ImageSize[1]; //4. 抓图 if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0)) { return false; } //5. 恢复初始状态 if (foldFrozen == 0) { if (!iSEM.ImageLive()) { return false; } } else if (foldFrozen == 1) { if (!iSEM.ImageFrozen()) { return false; } } return true; } } }