using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading; using System.Threading.Tasks; using NLog; using SmartSEMControl; namespace MeasureThread { class Locate : ILocate { struct PositionRecord { public float xs; public float ys; public float xpCur; public float ypCur; public float magCur; } private PositionRecord pr=new PositionRecord(); NLog.Logger log; private LocateParam prm; private ISEMControl iSEM; const float Z_Min = 0; const float Z_Max = 0.05f; const float fSateyZ = (float)0.007;//单位是米 public Locate(ISEMControl iSEM) { this.log = NLog.LogManager.GetCurrentClassLogger(); this.iSEM = iSEM ?? throw new ArgumentNullException(nameof(iSEM)); } public bool LocateCutHolePosition(MeasureData.CutHole currHole, bool ifTilt) { if (ifTilt)//如果是倾斜样品台，移动Z轴 { //0、先移动Z轴到比较低的位置上。 if (!MoveZAxis(fSateyZ, Locate.ZAxisDirection.down)) { log.Error("测量线程报错：样品台Z轴移动失败,Z移动" + fSateyZ.ToString(), false); return false; } } //1、移动样品台到第一个观测点，先移动R轴，再移动XY轴 if (!MoveRAxis(currHole.Position.R)) { log.Error("测量线程报错：样品台R轴移动失败,R为" + currHole.Position.ToString(), false); //continue; return false; } //2、移动XY轴 // lo.MoveToPixByMoveStage(currHole.Position.X,currHole.Position.Y) if (!iSEM.MoveStageXY(currHole.Position.X, currHole.Position.Y)) { log.Error("测量线程报错：样品台XY轴移动失败,(X,Y)为" + currHole.Position.X.ToString() + "," + currHole.Position.Y.ToString() + ")", false); return false; } while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } //判断是否停止进程 //3、恢复Z轴 if (ifTilt) { //恢复Z轴 if (!MoveZAxisByAbs(currHole.Position.Z)) { log.Error("测量线程报错：样品台Z轴移动失败,Z为" + currHole.Position.Z.ToString(), false); return false; } } //4、设置WD iSEM.SetWorkingDistance(currHole.Position.WD); Thread.Sleep(1000); return true; } public bool RotateStageByDeltaR(float deltaR) { float Zpos = iSEM.GetStageAtZ(); Thread.Sleep(200); log.Info("测量线程：当前Z轴位置" + Zpos.ToString() + "m", true); Locate lo = new Locate(iSEM); //选择之前，先降Z轴 lo.MoveZAxis(fSateyZ, Locate.ZAxisDirection.down); iSEM.SetStageDeltaR(deltaR); while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } Thread.Sleep(1000); if (!MoveZAxisByAbs(Zpos)) { log.Error("测量线程报错：样品台Z回到安全位置失败", false); return false; } return true; } public void RecordCurrentBeamShiftAndStagePosition() { #region 记录初始设置的BeamShift的百分比和样品台XY位置 pr. xs = iSEM.GetBeamShiftX(); Thread.Sleep(200); pr. ys = iSEM.GetBeamShiftY(); Thread.Sleep(200); pr. xpCur = iSEM.GetStageAtX(); Thread.Sleep(200); pr. ypCur = iSEM.GetStageAtY(); Thread.Sleep(200); pr.magCur = iSEM.GetMagnification(); Thread.Sleep(500); log.Info("原来的光束偏移量x = " + pr.xs.ToString() + "y=" + pr.ys.ToString() + "," + "原来样品台的位置x= " +pr. xpCur.ToString() + "y=" + pr.ypCur.ToString(), true); #endregion } public void RestoreLastBeamShiftAndStagePosition() { #region 恢复到拍照的状态 log.Info("恢复到拍照的状态！"); iSEM.SetStageGotoX(pr.xpCur); while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } iSEM.SetStageGotoY(pr.ypCur); while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } //恢复BeamShift的百分比值 iSEM.SetBeamShiftX(pr.xs); Thread.Sleep(200); iSEM.SetBeamShiftY(pr.ys); Thread.Sleep(200); //恢复原来的放大倍数 log.Info("恢复原来的放大倍数！ " + pr.magCur); if (!iSEM.SetMagnification(pr.magCur)) { log.Error("恢复放大倍数失败", false); return; } float cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); #endregion } public enum ZAxisDirection { up=0, down=1 } public bool MoveZAxis(float value, ZAxisDirection d ) { if (value < Z_Min || value> Z_Max) { log.Info("Z轴位置设置超出范围.", true); return false; } float curZ = iSEM.GetStageAtZ(); log.Info("当前Z轴位置为" + curZ.ToString()); float targetZ; if (d == ZAxisDirection.up) { targetZ = curZ + value; } else { targetZ = curZ - value; } log.Info("将Z轴位置指定到：" + targetZ.ToString(), true); if (!iSEM.SetStageGotoZ(targetZ)) { log.Error("样品台Z轴移到位置失败", false); return false; } while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } Thread.Sleep(200); iSEM.CmdFocusScanSpeed("CMD_SCANRATE5"); //add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 end Thread.Sleep(200); float cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); return true; } public bool MoveRAxis(float value) { if (!iSEM.SetStageGotoR(value)) { return false; } while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } Thread.Sleep(200); iSEM.CmdFocusScanSpeed("CMD_SCANRATE5");//CmdFocusRate(5); //add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 end Thread.Sleep(200); float cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); return true; } public bool MoveZAxisByAbs(float value) { if (value < Z_Min || value > Z_Max) { log.Info("Z轴位置设置超出范围.", true); return false; } log.Info("将Z轴位置指定到：" + value.ToString(), true); if (!iSEM.SetStageGotoZ(value)) { log.Error("样品台Z轴移到位置失败", false); return false; } while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } Thread.Sleep(200); iSEM.CmdFocusScanSpeed("CMD_SCANRATE5");//CmdFocusRate(5); //add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 end Thread.Sleep(200); float cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); return true; } //移动到像素位置，这里要靠移动样品台实现，当位移量小于3um时，不予移动 private bool MoveToPixByMoveStage() { float xc = prm.PositionX; float yc = prm.PositionY; //单位是m/pix float XpixSize = iSEM.GetPixelSize(); log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true); float YpixSize = iSEM.GetPixelSize();///(float)MParam.PixelSizeCor); log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true); Thread.Sleep(500); //0:width, 1:height int[] imageSize = iSEM.GetImageStore(); int width = imageSize[0] / 2; int height = imageSize[1] / 2; log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true); log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true); float deltX = (xc - (float)width) * XpixSize; float deltY = (yc - (float)height) * YpixSize; log.Info("x位移量 = " + deltX.ToString() + "m", true); log.Info("y位移量 = " + deltY.ToString() + "m", true); float xpCur = iSEM.GetStageAtX(); float ypCur = iSEM.GetStageAtY(); log.Info("当前位置（" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true); float xpNew = xpCur - deltX; float ypNew = ypCur + deltY; log.Info("目标位置（" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true); log.Info("X方向移动样品台", true); if (!iSEM.SetStageGotoX(xpNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } log.Info("Y方向移动样品台", true); if (!iSEM.SetStageGotoY(ypNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } return true; } //移动到像素位置 private bool MoveToPix() { float xc = prm.PositionX; float yc = prm.PositionY; //单位是m/pix float XpixSize = iSEM.GetPixelSize(); log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true); float YpixSize = (XpixSize / prm.PixelSize_Y_cur); log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true); Thread.Sleep(200); //0:width, 1:height int[] imageSize = iSEM.GetImageStore(); int width = imageSize[0] / 2; int height = imageSize[1] / 2; log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true); log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true); float deltX = (xc - (float)width) * XpixSize; float deltY = (yc - (float)height) * YpixSize; log.Info("x位移量 = " + deltX.ToString() + "m", true); log.Info("y位移量 = " + deltY.ToString() + "m", true); float xpCur = iSEM.GetStageAtX(); Thread.Sleep(200); float ypCur = iSEM.GetStageAtY(); log.Info("当前位置（" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true); float xpNew = xpCur - deltX; float ypNew = ypCur + deltY; log.Info("目标位置（" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true); //计算最大偏移量 float beamXCur = iSEM.GetBeamShiftX();//单位是% Thread.Sleep(200); iSEM.SetBeamShiftX(100); Thread.Sleep(200); float beamXMax = iSEM.GetBeamOffsetX();//单位是m Thread.Sleep(200); iSEM.SetBeamShiftX(beamXCur); Thread.Sleep(200); //计算光束偏移值： float beamX = iSEM.GetBeamOffsetX(); log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true); beamX = (-deltX + beamX); log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true); if (((beamX <= beamXMax) && (beamX >= 0)) || ((beamX >= -beamXMax) && (beamX < 0))) { log.Info("X方向移动光束", true); float beamXShift = beamX * 100 / beamXMax; log.Info("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true); if (!iSEM.SetBeamShiftX(beamXShift))//if (!iSEM.SetBeamOffsetX(beamX)) { log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true); return false; } } else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现 { log.Info("X方向移动样品台", true); if (!iSEM.SetStageGotoX(xpNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } } float beamY = iSEM.GetBeamOffsetY(); log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true); beamY = (-deltY + beamY); log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true); //计算最大偏移量 float beamYCur = iSEM.GetBeamShiftY();//单位是% Thread.Sleep(200); iSEM.SetBeamShiftY(100); Thread.Sleep(200); float beamYMax = iSEM.GetBeamOffsetY();//单位是m Thread.Sleep(200); iSEM.SetBeamShiftY(beamYCur); Thread.Sleep(200); if (((beamY <= beamYMax) && (beamY >= 0)) || ((beamY >= -beamYMax) && (beamY < 0))) { log.Info("Y方向移动光束", true); float beamYShift = beamY * 100 / beamYMax; log.Info("Y方向光束偏移量" + beamYShift.ToString() + "%", true); //if(!iSEM.SetBeamOffsetY(beamY)) if (!iSEM.SetBeamShiftY(beamYShift)) { log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true); return false; } } else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现 { log.Info("Y方向移动样品台", true); if (!iSEM.SetStageGotoY(ypNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(1000); if (iSEM.GetStageIs() == 0) { break; } } } return true; } public bool MoveToPixByMoveStage(float x, float y) { if (prm == null) { prm = new LocateParam(); } this.prm.PositionX = x; this.prm.PositionY = y; MoveToPixByMoveStage(); Thread.Sleep(200); Thread.Sleep(200); iSEM.CmdFocusScanSpeed("CMD_SCANRATE5");//CmdFocusRate(5); //add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 end Thread.Sleep(200); float cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); return true; } public bool MoveToPix(float x,float y,float pixelSize_Y_cur) { if (prm == null) { prm = new LocateParam(); } this.prm.PositionX = x; this.prm.PositionY = y; this.prm.PixelSize_Y_cur = pixelSize_Y_cur; MoveToPix(); Thread.Sleep(200); iSEM.CmdFocusScanSpeed("CMD_SCANRATE5");//CmdFocusRate(5); //add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 end Thread.Sleep(200); float cycle_time = iSEM.GetCycleTime(); Thread.Sleep(100 + Convert.ToInt32(cycle_time)); return true; } public LocateParam GetParam() { if (prm == null) { prm = new LocateParam(); } return prm; } } }