//时间:20200610
//作者:郝爽
//功能:测量线程
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Windows.Forms;
using System.Threading;
using System.IO;
using SmartSEMControl;
using MeasureData;
using FileManager;
using WebManager;
using OpenCvSharp;
namespace MeasureThread
{
//图片模式
public enum ImageMode
{
FIB,
SEM
}
public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
public class ThreadStatusEventArgs
{
//状态
public Boolean State
{
get { return m_state; }
set { m_state = value; }
}
private Boolean m_state;
//时间
public DateTime Time
{
get { return m_time; }
set { m_time = value; }
}
private DateTime m_time;
//步骤代码
public String Step_Code
{
get { return step_Code; }
set { step_Code = value; }
}
private String step_Code;
//其他消息
public String Message
{
get { return this.message; }
set { this.message = value; }
}
private String message;
//孔名
public String HoleName
{
get { return this.holeName; }
set { this.holeName = value; }
}
private String holeName;
//图片信息
public class PictureInformation
{
public String Picture_FullPath
{
get { return picture_FullPath; }
set { picture_FullPath = value; }
}
private String picture_FullPath;
public double Work_Voltage
{
get { return work_Voltage; }
set { work_Voltage = value; }
}
private double work_Voltage;
public double Magnification
{
get { return magnification; }
set { magnification = value; }
}
private double magnification;
public double Work_Distance
{
get { return work_Distance; }
set { work_Distance = value; }
}
private double work_Distance;
public String Work_Status
{
get { return work_Status; }
set { work_Status = value; }
}
private String work_Status;
}
//图片信息实例类
public PictureInformation Picture_Information
{
get { return picture_Information; }
set { picture_Information = value; }
}
private PictureInformation picture_Information;
//图像信息
public class ImageInformation
{
public int Method_Name
{
get { return method_Name; }
set { method_Name = value; }
}
private int method_Name;
public Source_Img_Degree_Direction SIDD;
public Cut_Position CP;
public Cut_Success CS;
public Trapezoid_Top_Center_Position TTCP;
public Auto_Foucs AF;
public Auto_Stigmatic AS;
public Center_Position_OffsetAngle_Direction CPOD;
public Measure_Size MS;
public ImageInformation()
{
SIDD = new Source_Img_Degree_Direction();
CP = new Cut_Position();
CS = new Cut_Success();
TTCP = new Trapezoid_Top_Center_Position();
AF = new Auto_Foucs();
AS = new Auto_Stigmatic();
CPOD = new Center_Position_OffsetAngle_Direction();
MS = new Measure_Size();
}
//1-计算原始图像偏移角度及方向
public class Source_Img_Degree_Direction
{
public Boolean Is_Image = false;
public double Degree
{
get { return degree; }
set { degree = value; }
}
private double degree;
public int Direction
{
get { return direction; }
set { direction = value; }
}
private int direction;
public int State
{
get { return state; }
set { state = value; }
}
private int state;
}
//2-计算切割点位置
public class Cut_Position
{
public Boolean Is_Image = false;
public double Offsetx
{
get { return offsetx; }
set { offsetx = value; }
}
private double offsetx;
public double Offsety
{
get { return offsety; }
set { offsety = value; }
}
private double offsety;
public int State
{
get { return state; }
set { state = value; }
}
private int state;
}
//3-是否切割成功
public class Cut_Success
{
public Boolean Is_Image = false;
public int State
{
get { return state; }
set { state = value; }
}
private int state;
}
//4-计算切割后图像梯形区域上边中心点坐标
public class Trapezoid_Top_Center_Position
{
public Boolean Is_Image = false;
public double TopCenterX
{
get { return topCenterX; }
set { topCenterX = value; }
}
private double topCenterX;
public double TopCenterY
{
get { return topCenterY; }
set { topCenterY = value; }
}
private double topCenterY;
public int State
{
get { return state; }
set { state = value; }
}
private int state;
}
//5-自动对焦
public class Auto_Foucs
{
public Boolean Is_Image = true;
public String Img_Path
{
get { return img_Path; }
set { img_Path = value; }
}
private String img_Path;
}
//6-自动像闪
public class Auto_Stigmatic
{
public Boolean Is_Image = true;
public String Img_Path
{
get { return img_Path; }
set { img_Path = value; }
}
private String img_Path;
}
//7-计算切割面区域中心坐标,以及偏移角度及方向
public class Center_Position_OffsetAngle_Direction
{
public Boolean Is_Image = false;
public double CenterX
{
get { return centerX; }
set { centerX = value; }
}
private double centerX;
public double CenterY
{
get { return centerY; }
set { centerY = value; }
}
private double centerY;
public double Degree
{
get { return degree; }
set { degree = value; }
}
private double degree;
public int Direction
{
get { return direction; }
set { direction = value; }
}
private int direction;
public int State
{
get { return state; }
set { state = value; }
}
private int state;
}
//8-测量尺寸
public class Measure_Size
{
public Boolean Is_Image = false;
public int State
{
get { return state; }
set { state = value; }
}
private int state;
}
}
//图像信息实例类
public ImageInformation Image_Information
{
get { return image_Information; }
set { image_Information = value; }
}
private ImageInformation image_Information;
public ThreadStatusEventArgs(string a_State)
{
picture_Information = new PictureInformation();
image_Information = new ImageInformation();
}
}
public class CutHolesStatusEventArgs
{
public string State
{
get { return m_state; }
set { m_state = value; }
}
private string m_state;
public string HoleName
{
get { return m_holeName; }
set { m_holeName = value; }
}
private string m_holeName;
public CutHolesStatusEventArgs(string a_state, string a_holeName)
{
this.m_state = a_state;
this.m_holeName = a_holeName;
}
}
public class Measure
{
///
/// 图像拉直算法
///
/// 倾斜角度
/// 圆心坐标x
/// 圆心坐标y
/// 倾斜情况下帧图的坐标x
/// 倾斜情况下帧图的坐标y
/// 复位到原位置需要移动的x值(返回值)
/// 复位到原位置需要移动的y值(返回值)
///
public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
{
try
{
double xr = x1 - x0;//倾斜图到中心的距离差x
double yr = y1 - y0;//倾斜图到中心的距离差y
double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
//double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
double k_S = k - Slope;//通过夹角差求x2,y2
int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
if (Slope > 0 || Slope < 0)
{
Hx = x1 - x2;
Hy = y1 - y2;
}
else
{
Hx = 0;
Hy = 0;
}
return true;
}
catch (Exception)
{
return false;
}
}
public WebResult wr = null;
public event ThreadStatusHandler SendThreadStatus; // 声明事件
public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
//定义一个全局的消息类
ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
//全局只有一个fatorySEM
static FactoryHardware factorySEM = FactoryHardware.Instance;
ISEMControl iSEM = factorySEM.ISEM;
//@的作用是不用转义字符\\只打一个就行
const String ImageName1 = @"ImageSEMH.tif"; //传给客户,作水平校正
const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
const String ImageName31 = @"ImageFIBBefore.tif";
const String ImageName32 = @"ImageFIBAfter.tif";
const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
const String ElyDeposition = @"Deposition.ely"; //沉积
const String ElyCrossSection = @"CrossSection.ely"; //切割
const float fMin = (float)0.0000002; //单位是米
public Boolean key_stop = false;
String focus_path = "";
String data_path = "";
int m_nWorkHoleNo = -1;
//测量文件
private MeasureFile m_measureFile;
public MeasureFile MeasureFile
{
get { return this.m_measureFile; }
set { this.m_measureFile = value; }
}
//测量的切割孔
private List m_cutHoles;
public List cutHoles
{
get { return this.m_cutHoles; }
set { this.m_cutHoles = value; }
}
//工作文件夹
private string m_WorkingFolder;
public string WorkingFolder
{
get { return this.m_WorkingFolder; }
set { this.m_WorkingFolder = value; }
}
//程序当前路径
private string m_ProgramFolder = Directory.GetCurrentDirectory();
//线程状态
private ThreadStatus m_ThreadStatus;
public ThreadStatus TStatus
{
get { return this.m_ThreadStatus; }
set { this.m_ThreadStatus = value; }
}
//测量参数
private MeasureParam m_MsParam;
public MeasureParam MeasParam
{
get { return this.m_MsParam; }
set { this.m_MsParam = value; }
}
//构造函数
public Measure(String webServerIP, String webServerPort, String webServerUrl)
{
MeasParam = new MeasureParam();
TStatus = new ThreadStatus();
cutHoles = new List();
//配置远程连接
wr = new WebResult(webServerIP,webServerPort,webServerUrl);
}
//初始化测量业务, 读测量文件,判断是否有可测试的切孔
public bool InitMeas(MeasureFile a_measureFile)
{
m_measureFile = a_measureFile;
List listHoles = m_measureFile.ListCutHole;
foreach (CutHole h in listHoles)
{
if (h.SWITCH == true)
{
m_cutHoles.Add(h);
}
}
if (m_cutHoles.Count == 0)
return false;
this.m_MsParam = m_measureFile.MParam;
return true;
}
public void SendMsg(string step_code)
{
arg.Step_Code = step_code;
arg.Time = DateTime.Now;
SendThreadStatus(this, arg);
}
public void SendCutHoleMsg(string a_state, string a_holeName)
{
CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
arg.HoleName = a_holeName;
arg.State = a_state;
SendCutHolesStatus(this, arg);
}
//测量流程
public void DoMeasure()
{
//创建线程的测量状态的更新
this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
if (SendThreadStatus != null)
{
//SendMsg("开始测量。");
}
LogManager.AddHardwareLog("开始测量",true);
//检查硬件连接是否正常
if (!ConnectHardware())
{
//SendMsg("连接硬件失败。");
this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
return;
}
//SendMsg("硬件连接成功。");
//设置工作文件夹
if (!SetWorkingFolderStr())
{
//SendMsg("设置工作文件夹失败");
this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
return;
}
//SendMsg("创建工作文件路径为" + WorkingFolder);
float[] firstPosition;
//将停止键复位
key_stop = false;
for (int i = 0; i < m_cutHoles.Count; i++)
{
m_nWorkHoleNo = i;
arg.HoleName = m_cutHoles[i].HoleName;
//创建文件夹,孔名文件夹结构
//最终数据存放目录
data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
//对焦数据存放目录
focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
m_MsParam.AutoFocus.Path = focus_path;
if (!Directory.Exists(focus_path))
{
Directory.CreateDirectory(focus_path);
}
//判断孔状态
if(m_cutHoles[i].STATE != State.Ready)
{
continue;
}
//开始循环工作
if (i == 0)
{
m_cutHoles[i].START = DateTime.Now;
//SendMsg("第一个切孔开始测量");
//切孔操作-开始
m_cutHoles[i].STATE = State.InProcess;
//SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
firstPosition = iSEM.GetStagePosition();
//第一个孔的测试
//成功
if(FirstHole())
{
//保存文件,将测量状态更改
m_cutHoles[i].STATE = State.Success;
m_cutHoles[i].END = DateTime.Now;
m_measureFile.Save();
}
//失败
else
{
m_cutHoles[i].STATE = State.Failed;
m_cutHoles[i].END = DateTime.Now;
m_measureFile.Save();
}
//切孔操作-完成
//SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
}
else
{
m_cutHoles[i].START = DateTime.Now;
//非第一个孔的测试
//SendMsg("第" + i.ToString() + "个切孔开始测量");
//切孔操作-开始
//SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
m_cutHoles[i].STATE = State.InProcess;
SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
//其他孔的测试
//成功
if (OtherHole())
{
//保存文件,将测量状态更改
m_cutHoles[i].STATE = State.Success;
m_cutHoles[i].END = DateTime.Now;
m_measureFile.Save();
}
//失败
else
{
m_cutHoles[i].STATE = State.Failed;
m_cutHoles[i].END = DateTime.Now;
m_measureFile.Save();
}
//切孔操作-完成
//SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
}
if(key_stop)
{
m_cutHoles[i].END = DateTime.Now;
m_cutHoles[i].STATE = State.Ready;
m_measureFile.Save();
arg.Message = "用户停止测量";
SendMsg("0-0");
break;
}
}
}
//检查硬件连接是否正常
public bool ConnectHardware()
{
//返回硬件的连接状态
return iSEM.ConnectStatus();
}
//设置工作文件夹
public bool SetWorkingFolderStr()
{
WorkingFolder = m_measureFile.FilePath;
return true;
}
//插入PT针
public bool InsertPT()
{
string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
//SendMsg("调用宏插入PT针宏文件" + fn);
iSEM.CMDMCFFilename(fn);
//延时1s??
Thread.Sleep(1000);
return true;
}
//撤出PT针
public bool RetractPT()
{
string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
//SendMsg("调用宏撤出PT针宏文件" + fn);
iSEM.CMDMCFFilename(fn);
//延时1s??
Thread.Sleep(1000);
return true;
}
//PT沉积
public bool PTWork()
{
//执行PT沉积的ELY文件
string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
//SendMsg("执行PT沉积Ely文件:" + fn);
if (!ExcuteEly(fn))
{
return false;
}
//等待沉积完成
while (true)
{
Thread.Sleep(10000);
if (iSEM.GetFIBMode() == 0)
{
break;
}
}
return true;
}
//FIB切割
public bool FIBWork()
{
//执行PT沉积的ELY文件
string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
//SendMsg("执行FIB切割Ely文件:" + fn);
if (!ExcuteEly(fn))
{
return false;
}
//等待切割完成
while (true)
{
Thread.Sleep(10000);
if (iSEM.GetFIBMode() == 0)
{
break;
}
}
return true;
}
//执行ELY文件的步骤
public bool ExcuteEly(string a_filename)
{
//执行ELy文件有三个动作
//1. 选择ELY文件
//SendMsg("选择ELY文件");
if (!iSEM.CmdFIBLoadELY(a_filename))
{
//SendMsg("选择ELY文件失败");
return false;
}
Thread.Sleep(1000);
//2. 确认ELY文件
//SendMsg("确认ELY文件");
if (!iSEM.CmdFIBEXPOSUREELY())
{
//SendMsg("确认ELY文件失败");
return false;
}
Thread.Sleep(1000);
//3. 执行ELY文件
//SendMsg("执行ELY文件");
if (!iSEM.CmdFIBSTARTELY())
{
//SendMsg("执行ELY文件失败");
return false;
}
Thread.Sleep(1000);
return true;
}
//执行自动对焦
public bool ImageFocus(String step_code)
{
if (m_measureFile.MParam.FocusMode == 1)//手动
{
if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
{
}
else
{
return false;
}
}
else if(m_measureFile.MParam.FocusMode == 2)//自有自动
{
//郝工增加自动对焦算法
//处理文件夹
if (Directory.Exists(focus_path))
{
Directory.Delete(focus_path, true);
}
Thread.Sleep(3000);
arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
Thread.Sleep(1000);
arg.Picture_Information.Magnification = iSEM.GetMagnification();
Thread.Sleep(1000);
//再创建文件夹
Directory.CreateDirectory(focus_path);
//1、对焦参数类,2、输出工作距离
int wd = 0;
AutoFocus(m_MsParam.AutoFocus, out wd, step_code);
//LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
//设置工作距离
iSEM.SetWorkingDistance((float)(wd * 0.00000001));
//设置完工作距离后必须延迟5秒
Thread.Sleep(5000);
//处理图片位置
//File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
}
else if(m_MsParam.FocusMode == 3) //客户自动
{
//后期和客户对接接口
List filenames = new List();
String retfilename = wr.Img_Auto_Focus(filenames);
}
else //蔡司自动对焦
{
iSEM.CmdAutoFocusCoarse();
while(true)
{
Thread.Sleep(10000);
if(0 == iSEM.GetAutoFunction())
{
break;
}
}
iSEM.CmdAutoFocusFine();
while (true)
{
Thread.Sleep(10000);
if (0 == iSEM.GetAutoFunction())
{
break;
}
}
}
return true;
}
///
///13. 自动 定位功能,沉积
///
///
public bool GetPoistion(Boolean isFirst)
{
float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
int state = 0;
//切换到SEM模式
if (!iSEM.CmdFIBModeSEM())
{
arg.Message = "SEM模式切换失败";
arg.State = false;
SendMsg("1-1");
return false;
}
//1.控制SEM放大600X
arg.Picture_Information.Work_Status = "SEM";
if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage))
{
arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败";
arg.State = false;
SendMsg("1-1");
return false;
}
if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
{
arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
arg.State = false;
SendMsg("1-1");
return false;
}
arg.State = true;
arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
SendMsg("1-1");
//判断是否停止进程
if (key_stop)
{
return false;
}
//2.控制SEM自动对焦、亮度、对比度
if(ImageFocus("1-2"))
{
arg.Message = "自动对焦完成";
arg.State = true;
SendMsg("1-2");
}
else
{
arg.Message = "自动对焦失败";
arg.State = false;
SendMsg("1-2");
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
if (!isFirst)
{
if (!TiltCorrection(54))
{
arg.Message = "设置SEM进行角度补偿54度失败";
arg.State = false;
SendMsg("1-3");
return false;
}
Thread.Sleep(5000);
arg.State = true;
arg.Message = "设置SEM进行角度补偿54度成功";
SendMsg("1-3");
//判断是否停止进程
if (key_stop)
{
return false;
}
}
else
{
Thread.Sleep(2000);
arg.State = true;
arg.Message = "设置SEM进行角度补偿54度成功";
SendMsg("1-3");
}
//4.控制SEM拍照,5保存照片=====需要更改路径
String fileName1 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
arg.Picture_Information.Picture_FullPath = fileName1;
arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
Thread.Sleep(1000);
arg.Picture_Information.Magnification = iSEM.GetMagnification();
Thread.Sleep(1000);
arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
Thread.Sleep(1000);
if (!GetImage(ImageMode.SEM, fileName1))
{
arg.Message = "SEM拍照失败";
arg.State = false;
SendMsg("1-4");
return false;
}
arg.State = true;
arg.Message = "SEM拍照成功";
SendMsg("1-4");
Thread.Sleep(3000);
//判断是否停止进程
if (key_stop)
{
return false;
}
//判断是否为仅拍照,不是则执行FIB操作
if (!m_MsParam.Is_Photograph)
{
//6.设置FIB拍照参数——扫描时间、束流等
//7.控制FIB自动亮度、对比度
if (!iSEM.CmdFIBModeFIB())
{
arg.Message = "FIB模式切换失败";
arg.State = false;
SendMsg("1-5");
return false;
}
arg.State = true;
arg.Picture_Information.Work_Status = "FIB";
arg.Message = "FIB模式切换成功";
SendMsg("1-5");
Thread.Sleep(10000);
//判断是否停止进程
if (key_stop)
{
return false;
}
//8.控制FIB拍照
//9.保存照片======更改路径
String fileName2 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
arg.Picture_Information.Picture_FullPath = fileName2;
arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
Thread.Sleep(1000);
arg.Picture_Information.Magnification = iSEM.GetMagnification();
Thread.Sleep(1000);
arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
Thread.Sleep(1000);
if (!GetImage(ImageMode.FIB, fileName2))
{
arg.Message = "FIB拍照失败";
arg.State = false;
SendMsg("1-6");
return false;
}
arg.State = true;
arg.Message = "FIB拍照成功";
SendMsg("1-6");
Thread.Sleep(3000);
//判断是否停止进程
if (key_stop)
{
return false;
}
//10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
{
arg.Message = "样品台移动到指定位置";
arg.State = true;
SendMsg("1-7");
}
else
{
wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
if (state == 1)
{
//1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
if (!iSEM.MoveStageXY(x1, y1))
{
arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
arg.State = false;
SendMsg("1-7");
return false;
}
//判断是否移动完成
while (true)
{
Thread.Sleep(5000);
if (iSEM.GetStageIs() == 0)
{
break;
}
}
arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
arg.State = true;
SendMsg("1-7");
}
else
{
arg.Message = "样品台移动失败";
arg.State = false;
SendMsg("1-7");
return false;
}
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//11.自动工具样品类型参数确定是否需要PT沉积
if (m_MsParam.PT)
{
//1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
//第10步已经移动好位置
//2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
x0 = iSEM.GetStageAtX();
y0 = iSEM.GetStageAtY();
if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
{
arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
arg.State = false;
SendMsg("1-8");
return false;
}
arg.State = true;
arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
SendMsg("1-8");
//判断是否停止进程
if (key_stop)
{
return false;
}
//3. 根据坐标进行PT沉积
if (!PTWork())
{
arg.Message = "PT沉积失败";
arg.State = false;
SendMsg("1-9");
return false;
}
arg.State = true;
arg.Message = "PT沉积成功";
SendMsg("1-9");
//判断是否停止进程
if (key_stop)
{
return false;
}
}
}
//12.根据梯形坐标控制FIB调整到中心位置
//13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
//以上两步已经将程序移动到11内部去做
//14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
float[] firstPosition = iSEM.GetStagePosition();
m_cutHoles[0].Position.X = firstPosition[0];
m_cutHoles[0].Position.Y = firstPosition[1];
m_cutHoles[0].Position.Z = firstPosition[2];
m_cutHoles[0].Position.T = firstPosition[3];
m_cutHoles[0].Position.R = firstPosition[4];
m_cutHoles[0].Position.M = firstPosition[5];
//这里要调用文件保存功能
arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
+ firstPosition[1].ToString() + ","
+ firstPosition[2].ToString() + ","
+ firstPosition[3].ToString() + ","
+ firstPosition[4].ToString() + ","
+ firstPosition[5].ToString() + ")";
arg.State = true;
SendMsg("1-10");
//判断是否停止进程
if (key_stop)
{
return false;
}
return true;
}
///
/// 14. FIB切割
///
///
public bool FIBCross()
{
int state = 0;
//切之前拍照保存,,
String fileName31 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName31;
arg.Picture_Information.Picture_FullPath = fileName31;
arg.Picture_Information.Work_Status = "FIB";
arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
Thread.Sleep(1000);
arg.Picture_Information.Magnification = iSEM.GetMagnification();
Thread.Sleep(1000);
arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
Thread.Sleep(1000);
if (!GetImage(ImageMode.FIB, fileName31))
{
arg.Message = "FIB切割前拍照失败";
arg.State = false;
SendMsg("1-11");
return false;
}
arg.State = true;
arg.Message = "FIB切割前拍照成功";
SendMsg("1-11");
//判断是否停止进程
if (key_stop)
{
return false;
}
//14.自动控制FIB切割
//1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
//2.控制FIB进行切割
//以上1、2步全部用ELY文件代替
if (!FIBWork())
{
arg.Message = "FIB切割失败";
arg.State = false;
SendMsg("1-12");
return false;
}
arg.State = true;
arg.Message = "FIB切割成功";
SendMsg("1-12");
Thread.Sleep(5000);
//判断是否停止进程
if (key_stop)
{
return false;
}
//3.控制FIB拍照600X
//底层没有控制方法。
//4.保存图片
String fileName32 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName32;
arg.Picture_Information.Picture_FullPath = fileName32;
arg.Picture_Information.Work_Status = "FIB";
arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
Thread.Sleep(1000);
arg.Picture_Information.Magnification = iSEM.GetMagnification();
Thread.Sleep(1000);
arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
Thread.Sleep(1000);
if (!GetImage(ImageMode.FIB, fileName32))
{
arg.Message = "FIB切割后拍照失败";
arg.State = false;
SendMsg("1-13");
return false;
}
arg.State = true;
arg.Message = "FIB切割后拍照成功";
SendMsg("1-13");
Thread.Sleep(3000);
//判断是否停止进程
if (key_stop)
{
return false;
}
//5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
wr.Img_Cut_Success(fileName31, fileName32, out state);
if(state == 0)
{
arg.Message = "FIB切割校验失败";
arg.State = false;
SendMsg("1-14");
return false;
}
arg.State = true;
arg.Message = "FIB切割校验成功";
SendMsg("1-14");
//判断是否停止进程
if (key_stop)
{
return false;
}
//6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
//拍完照自动解冻,这里不做处理。
return true;
}
///
/// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
///
///
public bool FindCross()
{
float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
float angle = 0;
int direction = 0;
int state = 0;
//切换到SEM模式
if (!iSEM.CmdFIBModeSEM())
{
arg.Message = "SEM模式切换失败";
arg.State = false;
SendMsg("1-16");
return false;
}
arg.State = true;
arg.Message = "SEM模式切换成功";
SendMsg("1-16");
arg.Picture_Information.Work_Status = "SEM";
Thread.Sleep(10000);
//判断是否停止进程
if (key_stop)
{
return false;
}
//1.控制SEM放大到300倍
if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage))
{
arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败";
arg.State = false;
SendMsg("1-17");
return false;
}
if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/2))
{
arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 2).ToString("0.0") + "倍失败";
arg.State = false;
SendMsg("1-17");
return false;
}
arg.State = true;
arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/2).ToString("0.0") + "倍成功";
SendMsg("1-17");
//判断是否停止进程
if (key_stop)
{
return false;
}
//2.控制SEM自动对焦、亮度、对比度-接口,,将自动对焦提出单独函数调用
if (ImageFocus("1-18"))
{
arg.Message = "自动对焦完成";
arg.State = true;
SendMsg("1-18");
}
else
{
arg.Message = "自动对焦失败";
arg.State = false;
SendMsg("1-18");
}
Thread.Sleep(5000);
//判断是否停止进程
if (key_stop)
{
return false;
}
//3.控制SEM拍照
String fileName4 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
arg.Picture_Information.Picture_FullPath = fileName4;
arg.Picture_Information.Work_Status = "SEM";
arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
Thread.Sleep(1000);
arg.Picture_Information.Magnification = iSEM.GetMagnification();
Thread.Sleep(1000);
arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
Thread.Sleep(1000);
if (!GetImage(ImageMode.SEM, fileName4))
{
arg.State = false;
arg.Message = "SEM拍照失败";
SendMsg("1-19");
return false;
}
arg.State = true;
arg.Message = "SEM拍照成功";
SendMsg("1-19");
Thread.Sleep(3000);
//判断是否停止进程
if (key_stop)
{
return false;
}
//4.将照片传给客户,获取偏移坐标,以及偏移角度
//5.根据坐标控制SEM移动到切孔位置,居中
//这里是否用到拉直操作,我没有加
if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
{
arg.State = true;
arg.Message = "样品台移动到指定位置";
SendMsg("1-20");
}
else
{
wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName,
m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
if (state == 1)
{
//拉直操作
Straightening(angle, 65, 65, x1, y1, ref x2, ref y2);
//1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
if (!iSEM.MoveStageXY(x2, y2))
{
arg.State = false;
arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
SendMsg("1-20");
return false;
}
//判断是否移动完成
while (true)
{
Thread.Sleep(5000);
if (iSEM.GetStageIs() == 0)
{
break;
}
}
arg.State = true;
arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
SendMsg("1-20");
}
else
{
arg.Message = "样品台移动失败";
arg.State = false;
SendMsg("1-20");
return false;
}
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
x0 = iSEM.GetStageAtX();
y0 = iSEM.GetStageAtY();
if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
{
arg.Message = "位置校验失败";
arg.State = false;
SendMsg("1-21");
return false;
}
arg.State = true;
arg.Message = "位置校验成功";
SendMsg("1-21");
//判断是否停止进程
if (key_stop)
{
return false;
}
return true;
}
///
/// 17.自动控制SEM拍截面照
///
///
public bool ShotSection(ref String image18)
{
float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
int state = 0;
//1、放大6000倍,放大倍数参数photograph_
if (!iSEM.SetSEMVoltage(m_MsParam.Photograph_Voltage))
{
arg.Message = "电压设置" + m_MsParam.Photograph_Voltage.ToString("0.0") + "失败";
arg.State = false;
SendMsg("1-22");
return false;
}
if (!iSEM.SetMagnification(m_MsParam.Photograph_Magnification))
{
arg.Message = "放大倍数调整失败";
arg.State = false;
SendMsg("1-22");
return false;
}
arg.Message = "放大倍数调整成功";
arg.State = true;
SendMsg("1-22");
//判断是否停止进程
if (key_stop)
{
return false;
}
//2.控制SEM自动对焦、亮度、对比度-接口
if (ImageFocus("1-23"))
{
arg.Message = "自动对焦完成";
arg.State = true;
SendMsg("1-23");
}
else
{
arg.Message = "自动对焦失败";
arg.State = false;
SendMsg("1-23");
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//3、设置SEM补偿角度
if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
{
arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
arg.State = false;
SendMsg("1-24");
return false;
}
arg.State = true;
arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
SendMsg("1-24");
Thread.Sleep(5000);
//判断是否停止进程
if (key_stop)
{
return false;
}
//4、拍照,5、保存照片
String fileName5 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
arg.Picture_Information.Picture_FullPath = fileName5;
arg.Picture_Information.Work_Status = "SEM";
arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
Thread.Sleep(1000);
arg.Picture_Information.Magnification = iSEM.GetMagnification();
Thread.Sleep(1000);
arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
Thread.Sleep(1000);
if (!GetImage(ImageMode.SEM, fileName5))
{
arg.Message = "SEM拍照失败";
arg.State = false;
SendMsg("1-25");
return false;
}
arg.State = true;
arg.Message = "SEM拍照成功";
SendMsg("1-25");
Thread.Sleep(3000);
//判断是否停止进程
if (key_stop)
{
return false;
}
//6、获取偏移坐标,7、移动到位
if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
{
arg.Message = "样品台移动到指定位置";
arg.State = true;
SendMsg("1-26");
}
else
{
//8,图像T形
wr.Img_Trapezoid_Top_Center_Position(fileName5, out x1, out y1, out state);
//接口返回像素,*pixelsize,得到坐标点。判断移动方式
if (state == 1)
{
//1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
if (!iSEM.MoveStageXY(x1, y1))
{
arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
arg.State = false;
SendMsg("1-26");
return false;
}
//判断是否移动完成
while (true)
{
Thread.Sleep(5000);
if (iSEM.GetStageIs() == 0)
{
break;
}
}
arg.State = true;
arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
SendMsg("1-26");
}
else
{
arg.Message = "样品台移动失败";
arg.State = false;
SendMsg("1-26");
return false;
}
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//8、验证移动准确性
x0 = iSEM.GetStageAtX();
y0 = iSEM.GetStageAtY();
if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
{
arg.Message = "位置校验失败";
arg.State = false;
SendMsg("1-27");
return false;
}
arg.State = true;
arg.Message = "位置校验成功";
SendMsg("1-27");
//判断是否停止进程
if (key_stop)
{
return false;
}
//9、-10不操作
//11、自动对焦。与之前操作相同
if (ImageFocus("1-28"))
{
arg.Message = "自动对焦完成";
arg.State = true;
SendMsg("1-28");
}
else
{
arg.Message = "自动对焦失败";
arg.State = false;
SendMsg("1-28");
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//12拍照
String fileName6 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
arg.Picture_Information.Picture_FullPath = fileName6;
arg.Picture_Information.Work_Status = "SEM";
arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
Thread.Sleep(1000);
arg.Picture_Information.Magnification = iSEM.GetMagnification();
Thread.Sleep(1000);
arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
Thread.Sleep(1000);
if (!GetImage(ImageMode.SEM, fileName6))
{
arg.Message = "SEM拍照失败";
arg.State = false;
SendMsg("1-29");
return false;
}
Thread.Sleep(3000);
arg.State = true;
image18 = fileName6;
arg.Message = "SEM拍照成功";
SendMsg("1-29");
//判断是否停止进程
if (key_stop)
{
return false;
}
//14光束复位
iSEM.SetBeamShiftX(0);
iSEM.SetBeamShiftY(0);
Thread.Sleep(3000);
arg.Message = "光束复位成功";
arg.State = true;
SendMsg("1-30");
//判断是否停止进程
if (key_stop)
{
return false;
}
return true;
}
//第一个孔的测试过程
public bool FirstHole()
{
MeasureData.CutHole firstHole = m_cutHoles[0];
//首先默认为SEM模式
arg.Picture_Information.Work_Status = "SEM";
//12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
{
if (!InsertPT())
{
arg.Message = "插入PT针失败";
arg.State = false;
SendMsg("1-0");
return false;
}
arg.State = true;
arg.Message = "插入PT针成功";
SendMsg("1-0");
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//13. 自动 定位功能
if (!GetPoistion(true))
{
return false;
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//14.自动控制FIB切割
if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
{
if (!FIBCross())
{
return false;
}
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//15.根据样品类型决定是否撤出PT针
if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
{
if (!RetractPT())
{
arg.Message = "撤出PT针失败";
arg.State = false;
SendMsg("1-15");
return false;
}
arg.State = true;
arg.Message = "撤出PT针成功";
SendMsg("1-15");
}
//判断是否停止进程
if (key_stop)
{
return false;
}
// 16.找到切割位置
if (m_MsParam.Is_Photograph == false)
{
if (!FindCross())
{
return false;
}
//判断是否停止进程
if (key_stop)
{
return false;
}
}
//将过程17最后的拍照图片提出给18步进行调用
String img18 = "";
//17.自动控制SEM拍截面照
if (!ShotSection(ref img18))
{
return false;
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//18.自动层高分析
if (m_MsParam.Is_Photograph == false)
{
float size = iSEM.GetPixelSize();
float mag = iSEM.GetMagnification();
int state = 0;
wr.Img_Measure_Size(img18, mag, size, out state);
if (state == 0)
{
arg.Message = "测量尺寸失败";
arg.State = false;
SendMsg("1-31");
return false;
}
arg.State = true;
arg.Message = "测量尺寸成功";
SendMsg("1-31");
}
#region 测试程序
//最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
//中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
//if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
//{
// SendMsg("拍摄照片完成");
// //return true;
//}
//else
//{
// SendMsg("拍摄照片失败");
// return false;
//}
//SendMsg("图像校正36度");
////3.设置SEM角度补偿cos36度
//if (!TiltCorrection(36))
//{
// return false;
//}
//Thread.Sleep(3000);
//string fn;
//用宏抓一般图
//Thread.Sleep(5000);
//fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
//SendMsg("用宏抓一般图" + fn);
//iSEM.CMDMCFFilename(fn);
////延时1s??
//Thread.Sleep(5000);
////用宏抓好图
//fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
//SendMsg("用宏抓好图" + fn);
//iSEM.CMDMCFFilename(fn);
////延时1s??
//Thread.Sleep(30000);
//Thread.Sleep(10000);
//WorkingFolder = m_measureFile.FilePath;
//String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
//SendMsg("SEM拍照存储到" + fileName6);
//if (!GetImage(ImageMode.SEM, fileName6))
//{
// SendMsg("SEM拍照失败");
// return false;
//}
////用宏抓标志图
//fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
//SendMsg("用宏抓标志图" + fn);
//iSEM.CMDMCFFilename(fn);
////延时1s??
//Thread.Sleep(30000);
//Thread.Sleep(5000);
//fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
//SendMsg("用宏抓一般图" + fn);
//iSEM.CMDMCFFilename(fn);
////延时1s??
//Thread.Sleep(5000);
//SendMsg("所有图结束");
////17.自动控制SEM拍截面照
//{
// //1.控制SEM放大到指定参数大小范围,6000x
// if (!iSEM.SetMagnification(6000))
// {
// return false;
// }
// //2.控制SEM自动对焦、消像散、亮度、对比度
// if (!MeasParam.FocusMode)
// {
// //弹出手动对焦的窗口
// }
// else
// {
// //调用自动对焦模块
// }
// //3.设置SEM角度补偿cos36度
// if (!TiltCorrection(36))
// {
// return false;
// }
// //4.控制SEM拍照
// //5.保存照片4
// String fileName5 = WorkingFolder + ImageName5;
// if (!GetImage(ImageMode.SEM, fileName5))
// {
// return false;
// }
// //6.将照片传给客户,获取偏移坐标
// float x6 = 0, y6 = 0;
// float angle1 = 0;
// float mage = 10000;
// //7.根据坐标控制SEM移动到分析位置
// if (!iSEM.MoveStageXY(x6, y6))
// {
// return false;
// }
// //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
// float x7 = iSEM.GetStageAtX();
// float y7 = iSEM.GetStageAtY();
// if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
// {
// return false;
// }
// //9.控制SEM平行校正,并记录校正前初始值
// float foldAnagle = iSEM.GetScanRotation();
// if (foldAnagle == float.NaN)
// {
// return false;
// }
// if (!iSEM.SetScanRotation(angle1))
// {
// return false;
// }
// //10.控制SEM放大到指定参数大小范围
// if (!iSEM.SetMagnification(mage))
// {
// return false;
// }
// //11.控制SEM自动对焦、消像散、亮度、对比度
// if (!MeasParam.FocusMode)
// {
// //弹出手动对焦的窗口
// }
// else
// {
// //调用自动对焦模块
// }
// //12.控制SEM对分析位置拍照
// String fileName6 = WorkingFolder + ImageName6;
// if (!GetImage(ImageMode.SEM, fileName6))
// {
// return false;
// }
// //13.保存照片
// //14.控制SEM取消电子束校正,回到初始值
// if (!iSEM.SetScanRotation(foldAnagle))
// {
// return false;
// }
//}
////18.自动层高分析
//{
// //1.获取SEM Pixel Size给客户传入参数
// if (iSEM.GetPixelSize() == float.NaN)
// {
// return false;
// }
// //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
//}
////19.自动能谱分析
//{
// //1. 确定能谱位置
// //2. 控制牛津打能谱
// //3. 能谱分析——面扫+线扫描
//}
#endregion
return true;
}
//非第一个孔的测试过程
public bool CommonWork()
{
//首先默认为SEM模式
arg.Picture_Information.Work_Status = "SEM";
//12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
{
if (!InsertPT())
{
arg.Message = "插入PT针失败";
SendMsg("1-0");
return false;
}
arg.Message = "插入PT针成功";
SendMsg("1-0");
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//13. 自动 定位功能
if (!GetPoistion(false))
{
return false;
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//14.自动控制FIB切割
if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
{
if (!FIBCross())
{
return false;
}
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//15.根据样品类型决定是否撤出PT针
if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
{
if (!RetractPT())
{
arg.Message = "撤出PT针失败";
SendMsg("1-15");
return false;
}
arg.Message = "撤出PT针成功";
SendMsg("1-15");
}
//判断是否停止进程
if (key_stop)
{
return false;
}
// 16.找到切割位置
if (m_MsParam.Is_Photograph == false)
{
if (!FindCross())
{
return false;
}
//判断是否停止进程
if (key_stop)
{
return false;
}
}
//将过程17最后的拍照图片提出给18步进行调用
String img18 = "";
//17.自动控制SEM拍截面照
if (!ShotSection(ref img18))
{
return false;
}
//判断是否停止进程
if (key_stop)
{
return false;
}
//18.自动层高分析
if (m_MsParam.Is_Photograph == false)
{
float size = iSEM.GetPixelSize();
float mag = iSEM.GetMagnification();
int state = 0;
wr.Img_Measure_Size(img18, mag, size, out state);
if (state == 0)
{
arg.Message = "测量尺寸失败";
SendMsg("1-31");
return false;
}
arg.Message = "测量尺寸成功";
SendMsg("1-31");
}
#region 测试程序
//string fn;
//用宏抓一般图
//Thread.Sleep(5000);
//fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
//SendMsg("用宏抓一般图" + fn);
//iSEM.CMDMCFFilename(fn);
////延时1s??
//Thread.Sleep(5000);
////用宏抓好图
//fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
//SendMsg("用宏抓好图" + fn);
//iSEM.CMDMCFFilename(fn);
////延时1s??
//Thread.Sleep(30000);
//Thread.Sleep(10000);
//WorkingFolder = m_measureFile.FilePath;
//String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
//SendMsg("SEM拍照存储到" + fileName6);
//if (!GetImage(ImageMode.SEM, fileName6))
//{
// SendMsg("SEM拍照失败");
// return false;
//}
////用宏抓标志图
//fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
//SendMsg("用宏抓标志图" + fn);
//iSEM.CMDMCFFilename(fn);
////延时1s??
//Thread.Sleep(30000);
////恢复简单抓图
//Thread.Sleep(5000);
//fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
//SendMsg("用宏抓一般图" + fn);
//iSEM.CMDMCFFilename(fn);
//SendMsg("所有图结束");
#endregion
return true;
}
//测试完第一个孔后的样品台初始化操作。
//再调用CommonWork执行非第一个孔的测试过程
public bool OtherHole()
{
//SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
#region 1. 初始化
//1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
//读取图像冻结状态
float ffrozen = iSEM.GetImageFrozen();
if (ffrozen == float.NaN)
{
return false;
}
if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
{
//SendMsg("样品台恢复到水平");
//return true;
}
else
{
//SendMsg("禁止样品台恢复到水平");
return false;
}
//2. 调节样品1号孔的样品台6轴坐标
//3. 将样品1号孔坐标2存入数据库
//4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
if (!iSEM.SetStageGotoT(0))
{
return false;
}
while (true)
{
Thread.Sleep(10000);
if (iSEM.GetStageIs() == 0)
{
break;
}
}
//5. 获取光镜2号孔XY坐标
//SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
//6. 根据光镜坐标控制样品台移动
if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
{
//SendMsg("移动失败");
return false;
}
while (true)
{
Thread.Sleep(10000);
if (iSEM.GetStageIs() == 0)
{
break;
}
}
//7. 控制样品台,调整T轴54度、M/Z/R轴不变
if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
{
//SendMsg("样品台旋转");
//return true;
}
else
{
//SendMsg("禁止样品台旋转");
return false;
}
if (!iSEM.SetStageGotoT(54))
{
return false;
}
while (true)
{
Thread.Sleep(10000);
if (iSEM.GetStageIs() == 0)
{
break;
}
}
//SendMsg("拉直操作");
#endregion
//其他操作与第一个孔相同
if (!CommonWork())
{
return false;
}
//2. 定位切割
{
//1. 拉直操作
{
//1.1 控制SEM进行拍照
//1.2 图片传给客户,返回偏移角度
//1.3 根据返回角度,控制样品台转动
}
//2. 与1号孔13步相同
}
return true;
}
//角度补偿
public bool TiltCorrection(float a_fAngle)
{
//记录原来电镜的状态
// bool bTilt = false;
//float fOldTilt = iSEM.GetTiltCorrection();
//if (fOldTilt == float.NaN)
//{
// return false;
//}
//else if (fOldTilt == 1)
//{
// bTilt = true;
//}
//else if (fOldTilt == 0)
//{
// bTilt = false;
//}
//float fOldAngle = iSEM.GetTiltAngle();
//if (fOldAngle == float.NaN)
//{
// return false;
//}
//开启校正
//SendMsg("开启校正");
if (!iSEM.SetTiltAngleOn())
{
return false;
}
//设置校正角度
//if (!iSEM.SetTiltAngle(fOldAngle))
//{
// return false;
//}
//恢复原始状态
//SendMsg("校正角度"+ a_fAngle.ToString());
if (!iSEM.SetTiltAngle(a_fAngle))
{
return false;
}
//if (bTilt)
//{
// if (!iSEM.SetTiltCorrectionOn())
// {
// return false;
// }
//}
//else
//{
// if (!iSEM.SetTiltCorrectionOff())
// {
// return false;
// }
//}
return true;
}
//拍图
public bool GetImage(ImageMode a_mode, String a_fileName)
{
//1. 图像解冻
float foldFrozen = iSEM.GetImageFrozen();
if (foldFrozen == float.NaN)
{
return false;
}
if (!iSEM.ImageLive())
{
return false;
}
//2. 确认图像模式
if (ImageMode.SEM == a_mode)
{
if (!iSEM.CmdFIBModeSEM())
{
return false;
}
}
else if (ImageMode.FIB == a_mode)
{
if (!iSEM.CmdFIBModeFIB())
{
return false;
}
}
else
{
return false;
}
//3. 获取分辨率
int[] ImageSize = iSEM.GetImageStore();
if (ImageSize[0] == 0 || ImageSize[1] == 0)
{
return false;
}
short width = (short)ImageSize[0];
short height = (short)ImageSize[1];
//4. 抓图
if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
{
return false;
}
//5. 恢复初始状态
if (foldFrozen == 0)
{
if (!iSEM.ImageLive())
{
return false;
}
}
else if (foldFrozen == 1)
{
if (!iSEM.ImageFrozen())
{
return false;
}
}
return true;
}
//自动聚焦
public bool AutoFocus(FocusParam a_param, out int a_nWd, String step_code)
{
a_nWd = 0;
float wd = iSEM.GetWorkingDistance();
a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
if (a_param == null)
{
return false;
}
string path = a_param.Path;
if (!Directory.Exists(path))
{
return false;
}
string path_coarse = a_param.Path + "\\Coarse";
if (!Directory.Exists(path_coarse))
{
Directory.CreateDirectory(path_coarse);
}
string path_fine = a_param.Path + "\\Fine";
if (!Directory.Exists(path_fine))
{
Directory.CreateDirectory(path_fine);
}
//1. 拍照
//1.1, 粗拍照
//1.1.1, 根据参数计算拍照次数
double nUp = a_param.UP * 100.0 ;
double nDown = a_param.Down * 100.0;
double nStep = a_param.Step * 100.0;
double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
//SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
//粗拍照
for (int i = 0; i < nTimes; i++)
{
int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
Thread.Sleep(8000);
int swd = cWd / 100;
//SendMsg("wd = " + swd.ToString() +"um");
String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
arg.Picture_Information.Picture_FullPath = fileName;
if (!GetImage(ImageMode.SEM, fileName))
{
return false;
}
SendMsg(step_code);
}
//1.2, 选定细拍照的工作距离
int CorWd;
ChooseBest(path_coarse,out CorWd);
a_nWd = CorWd;
//SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
//1.3, 细拍照
if ( (CorWd - a_param.Range * 100.0) <=0)
{
return false;
}
double nfUp = CorWd - a_param.Range * 100.0;
double nfStep = a_param.fStep * 100.0;
double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
//SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
for (int i = 0; i < nfTimes; i++)
{
int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
Thread.Sleep(8000);
int swd = cWd / 100;
//SendMsg("wd = " + swd.ToString() + "um");
String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
arg.Picture_Information.Picture_FullPath = fileName;
if (!GetImage(ImageMode.SEM, fileName))
{
return false;
}
SendMsg(step_code);
}
int fineWd;
ChooseBest(path_fine, out fineWd);
//SendMsg("wd fine max = " + fineWd.ToString());
a_nWd = fineWd;
//SendMsg("细选工作距离wd = " + a_nWd.ToString());
return true;
}
//LoG算子计算
private double LoGMean(string a_strImgPath)
{
//读入Img文件
if (!File.Exists(a_strImgPath))
{
return 0;
}
Mat src, gray_src;
int kernel_size = 3;
src = Cv2.ImRead(a_strImgPath);
gray_src = new Mat();
src.CvtColor(ColorConversionCodes.BGR2GRAY);
Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
Cv2.ConvertScaleAbs(src, src);
//图像的平均灰度
double meanValue = 0.0;
meanValue = Cv2.Mean(src)[0];
return meanValue;
}
//梯度计算
private double Tenengrad(string a_strImgPath)
{
//读入Img文件
if (!File.Exists(a_strImgPath))
{
return 0;
}
Mat src;
src = Cv2.ImRead(a_strImgPath);
src.CvtColor(ColorConversionCodes.BGR2GRAY);
Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
//图像的平均灰度
double meanValue = 0.0;
meanValue = Cv2.Mean(src)[0];
return meanValue;
}
//梯度计算
private double TTgrad(string a_strImgPath)
{
//读入Img文件
if (!File.Exists(a_strImgPath))
{
return 0;
}
Mat src;
src = Cv2.ImRead(a_strImgPath);
src.CvtColor(ColorConversionCodes.BGR2GRAY);
Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
Mat scalex = new Mat();
Mat scaley = new Mat();
Cv2.Scharr(src, src, src.Depth(), 1, 0);
Cv2.ConvertScaleAbs(src, scalex);
Cv2.Scharr(src, src, src.Depth(), 0, 1);
Cv2.ConvertScaleAbs(src, scaley);
Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
//图像的平均灰度
double meanValue = 0.0;
meanValue = Cv2.Mean(src)[0];
return meanValue;
}
//三选二算法
private void ChooseBest(string a_strImgPath, out int a_nWd)
{
a_nWd = -1;
var files = Directory.GetFiles(a_strImgPath, "*.tif");
float[] values = new float[files.Length];
double smax1 = LoGMean(files[0]);
int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
double smax2 = Tenengrad(files[0]);
int wdmax2 = wdmax1;
double smax3 = TTgrad(files[0]);
int wdmax3 = wdmax1;
int x = 0;
foreach (var file in files)
{
int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
double svalue1 = LoGMean(file);
double svalue2 = Tenengrad(file);
double svalue3 = TTgrad(file);
if (smax1 < svalue1)
{
smax1 = svalue1;
wdmax1 = wd;
}
if (smax2 < svalue2)
{
smax2 = svalue2;
wdmax2 = wd;
}
if (smax3 < svalue3)
{
smax3 = svalue3;
wdmax3 = wd;
}
x++;
}
//SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
{
a_nWd = wdmax1;
//SendMsg("焦距 = " + wdmax1.ToString());
}
else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
{
a_nWd = wdmax2;
//SendMsg("焦距 = " + wdmax2.ToString());
}
else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
{
a_nWd = wdmax3;
//SendMsg("焦距 = " + wdmax3.ToString());
}
else
{
//SendMsg("对焦失败。");
}
}
}
}