//时间:20200610
//作者:王琦
//功能:SmartSEM remote API控制
using System;
using System.Collections.Generic;
using System.Linq;
using System.Runtime.InteropServices;
using System.Text;
using System.Threading.Tasks;
using APILib;
using System.Threading;
using System.IO;
using FileManager;
namespace SmartSEMControl
{
//可能遇到的错误提示部分??在log加入之后添加
class SmartSEM : ISEMControl
{
#region 返回错误代码枚举
private enum ZeissErrorCode
{
// Failed to translate parameter into an id
API_E_GET_TRANSLATE_FAIL = 1000,
// Failed to get analogue value
API_E_GET_AP_FAIL = 1001,
// Failed to get digital value
API_E_GET_DP_FAIL = 1002,
// Parameter supplied is not analogue nor digital
API_E_GET_BAD_PARAMETER = 1003,
// Failed to translate parameter into an id
API_E_SET_TRANSLATE_FAIL = 1004,
// Failed to set a digital state
API_E_SET_STATE_FAIL = 1005,
// Failed to set a float value
API_E_SET_FLOAT_FAIL = 1006,
// Value supplied is too low
API_E_SET_FLOAT_LIMIT_LOW = 1007,
// Value supplied is too high
API_E_SET_FLOAT_LIMIT_HIGH = 1008,
// Value supplied is is of wrong type
API_E_SET_BAD_VALUE = 1009,
// Parameter supplied is not analogue nor digital
API_E_SET_BAD_PARAMETER = 1010,
// Failed to translate command into an id
API_E_EXEC_TRANSLATE_FAIL = 1011,
// Failed to execute command=
API_E_EXEC_CMD_FAIL = 1012,
// Failed to execute file macro
API_E_EXEC_MCF_FAIL = 1013,
// Failed to execute library macro
API_E_EXEC_MCL_FAIL = 1014,
// Command supplied is not implemented
API_E_EXEC_BAD_COMMAND = 1015,
// Grab command failed
API_E_GRAB_FAIL = 1016,
// Get Stage position failed
API_E_GET_STAGE_FAIL = 1017,
// Move Stage position failed
API_E_MOVE_STAGE_FAIL = 1018,
// API not initialised
API_E_NOT_INITIALISED = 1019,
// Failed to translate parameter to an id
API_E_NOTIFY_TRANSLATE_FAIL = 1020,
// Set notification failed
API_E_NOTIFY_SET_FAIL = 1021,
// Get limits failed
API_E_GET_LIMITS_FAIL = 1022,
// Get multiple parameters failed
API_E_GET_MULTI_FAIL = 1023,
// Set multiple parameters failed
API_E_SET_MULTI_FAIL = 1024,
// Missing API license
API_E_NOT_LICENSED = 1025,
// Reserved or not implemented
API_E_NOT_IMPLEMENTED = 1026,
// Failed to get user name (Remoting Interface only)
API_E_GET_USER_NAME_FAIL = 1027,
// Failed to get user idle state (Remoting Interface only)
API_E_GET_USER_IDLE_FAIL = 1028,
// Failed to get the last remoting connection error string (Remoting Interface Only)
API_E_GET_LAST_REMOTING_CONNECT_ERROR_FAIL = 1029,
// Failed to remotely logon to the EM Server (username and password may be incorrect or EM Server is not running or User is already logged on
API_E_EMSERVER_LOGON_FAILED = 1030,
// Failed to start the EM Server - this may be because the Server is already running or has an internal error.
API_E_EMSERVER_START_FAILED = 1031,
// The command or parameter is currently disabled (you cannot execute or set it).
API_E_PARAMETER_IS_DISABLED = 1032,
// Remoting incorrectly configured, use RConfigure to correct
API_E_REMOTING_NOT_CONFIGURED = 2027,
// Remoting did not connect to the server
API_E_REMOTING_FAILED_TO_CONNECT = 2028,
// Remoting could not start (unknown reason)
API_E_REMOTING_COULD_NOT_CREATE_INTERFACE = 2029,
// Remoting: Remote server is not running currently.
API_E_REMOTING_EMSERVER_NOT_RUNNING = 2030,
// Remoting: Remote server has no user logged in
API_E_REMOTING_NO_USER_LOGGED_IN = 2031,
// Internal Defines, although they may be useful in your own program. TRS.
API_FIRST_REMOTING_ERROR_CODE = API_E_REMOTING_NOT_CONFIGURED,
API_LAST_REMOTING_ERROR_CODE = API_E_REMOTING_NO_USER_LOGGED_IN,
API_FIRST_ERROR_CODE = API_E_GET_TRANSLATE_FAIL,
API_LAST_ERROR_CODE = API_E_REMOTING_NO_USER_LOGGED_IN
}
#endregion
#region 固定参数
//判断这个文件夹是否存在20200826
private readonly String ELYPATH = @"C:\ProgramData\Carl Zeiss\SmartFIB\API\Drop\";
private readonly String ELYFILENAME = "ApiLayout.ely";
private readonly String MLFPATH = @"C:\ProgramData\Carl Zeiss\SmartSEM\User\Service\";
private readonly String MLFFILENAME = "Opton.MLF";
#endregion
#region 模拟参数
//放大缩小
private readonly String AP_MAG = "AP_MAG";
//焦距
private readonly String AP_WD = "AP_WD";
//亮度
private readonly String AP_BRIGHTNESS = "AP_BRIGHTNESS";
//对比度
private readonly String AP_CONTRAST = "AP_CONTRAST";
//亮度目标
private readonly String AP_AUTO_BRIGHT = "AP_AUTO_BRIGHT";
//对比度目标
private readonly String AP_AUTO_CONTRAST = "AP_AUTO_CONTRAST";
//消像散X轴
private readonly String AP_STIG_X = "AP_STIG_X";
//消像散Y轴
private readonly String AP_STIG_Y = "AP_STIG_Y";
//角度补偿
private readonly String AP_TILT_ANGLE = "AP_TILT_ANGLE";
//SEM移动X
private readonly String AP_BEAMSHIFT_X = "AP_BEAMSHIFT_X";
//SEM移动Y
private readonly String AP_BEAMSHIFT_Y = "AP_BEAMSHIFT_Y";
//X轴移动到
private readonly String AP_STAGE_GOTO_X = "AP_STAGE_GOTO_X";
//Y轴移动到
private readonly String AP_STAGE_GOTO_Y = "AP_STAGE_GOTO_Y";
//Z轴移动到
private readonly String AP_STAGE_GOTO_Z = "AP_STAGE_GOTO_Z";
//T轴移动到
private readonly String AP_STAGE_GOTO_T = "AP_STAGE_GOTO_T";
//R轴移动到
private readonly String AP_STAGE_GOTO_R = "AP_STAGE_GOTO_R";
//M轴移动到
private readonly String AP_STAGE_GOTO_M = "AP_STAGE_GOTO_M";
//Scan Rotate角度
private readonly String AP_SCANROTATION = "AP_SCANROTATION";
//像素大小
private readonly String AP_PIXEL_SIZE = "AP_PIXEL_SIZE";
//X轴坐标
private readonly String AP_STAGE_AT_X = "AP_STAGE_AT_X";
//Y轴坐标
private readonly String AP_STAGE_AT_Y = "AP_STAGE_AT_Y";
//Z轴坐标
private readonly String AP_STAGE_AT_Z = "AP_STAGE_AT_Z";
//T轴坐标
private readonly String AP_STAGE_AT_T = "AP_STAGE_AT_T";
//R轴坐标
private readonly String AP_STAGE_AT_R = "AP_STAGE_AT_R";
//M轴坐标
private readonly String AP_STAGE_AT_M = "AP_STAGE_AT_M";
//FIB缩放
private readonly String AP_FIB_MAGNIFICATION = "AP_FIB_MAGNIFICATION";
//FIB焦距
private readonly String AP_FIB_OBJECTIVE_POTENTIAL = "AP_FIB_OBJECTIVE_POTENTIAL";
//FIB消像散X
private readonly String AP_FIB_STIGMATOR_X = "AP_FIB_STIGMATOR_X";
//FIB消像散Y
private readonly String AP_FIB_STIGMATOR_Y = "AP_FIB_STIGMATOR_Y";
//FIB光束移动X
private readonly String AP_FIB_BEAM_SHIFT_X = "AP_FIB_BEAM_SHIFT_X";
//FIB光束移动Y
private readonly String AP_FIB_BEAM_SHIFT_Y = "AP_FIB_BEAM_SHIFT_Y";
#endregion
#region 数字参数
//Scan Rotate开关
private readonly String DP_SCAN_ROT = "DP_SCAN_ROT";
//取消电子束校正
private readonly String DP_TILT_CORRECTION = "DP_TILT_CORRECTION";
//自动亮度对比度
private readonly String DP_AUTO_VIDEO = "DP_AUTO_VIDEO";
//图像解冻
private readonly String DP_FROZEN = "DP_FROZEN";
//图像类型切换
private readonly String DP_DETECTOR_TYPE = "DP_DETECTOR_TYPE";
//图像大小
private readonly String DP_IMAGE_STORE = "DP_IMAGE_STORE";
//样品台状态
private readonly String DP_STAGE_IS = "DP_STAGE_IS";
//自动函数状态
private readonly String DP_AUTO_FUNCTION = "DP_AUTO_FUNCTION";
//FIB模式
private readonly String DP_FIB_MODE = "DP_FIB_MODE";
//FIB_IMAGING
private readonly String DP_FIB_IMAGING = "DP_FIB_IMAGING";
//FIB状态
private readonly String DP_SMARTFIB_API_STATUS = "DP_SMARTFIB_API_STATUS";
//FIB,ELY文件确认前,需要将该变量置为2->FIB
private readonly String DP_PATTERNING_MODE = "DP_PATTERNING_MODE";
#endregion
#region 命令
//开启电压
private readonly String CMD_BEAM_ON = "CMD_BEAM_ON";
//关闭电压
private readonly String CMD_EHT_OFF = "CMD_EHT_OFF";
//自动对焦1
private readonly String CMD_AUTO_FOCUS_COARSE = "CMD_AUTO_FOCUS_COARSE";
//自动对焦2
private readonly String CMD_AUTO_FOCUS_FINE = "CMD_AUTO_FOCUS_FINE";
//自动消像散
private readonly String CMD_AUTO_STIG = "CMD_AUTO_STIG";
//样品台急停
private readonly String CMD_STAGE_ABORT = "CMD_STAGE_ABORT";
//FIB模式选择
private readonly String CMD_FIB_MODE_SEM = "CMD_FIB_MODE_SEM";
private readonly String CMD_FIB_MODE_FIB = "CMD_FIB_MODE_FIB";
private readonly String CMD_FIB_MODE_MILL = "CMD_FIB_MODE_MILL";
private readonly String CMD_FIB_MODE_SEM_FIB = "CMD_FIB_MODE_SEM_FIB";
private readonly String CMD_FIB_MODE_MILL_SEM = "CMD_FIB_MODE_MILL_SEM";
private readonly String CMD_FIB_MODE_EXT = "CMD_FIB_MODE_EXT";
private readonly String CMD_FIB_MODE_EXT_SEM = "CMD_FIB_MODE_EXT_SEM";
private readonly String CMD_FIB_MODE_ARGON_SEM = "CMD_FIB_MODE_ARGON_SEM";
private readonly String CMD_FIB_MODE_DRIFT_SEM = "CMD_FIB_MODE_DRIFT_SEM";
private readonly String CMD_FIB_MODE_DRIFT_FIB = "CMD_FIB_MODE_DRIFT_FIB";
private readonly String CMD_FIB_MODE_ARGON = "CMD_FIB_MODE_ARGON";
//FIB加载.ely文件命令
private readonly String CMD_SMARTFIB_LOAD_ELY = "CMD_SMARTFIB_LOAD_ELY";
//FIB确认.ely文件命令
private readonly String CMD_SMARTFIB_PREPARE_EXPOSURE = "CMD_SMARTFIB_PREPARE_EXPOSURE";
//FIB开始.ley文件命令
private readonly String CMD_FIB_START_MILLING = "CMD_FIB_START_MILLING";
#endregion
#region 宏文件命令
private readonly String MCF_FILENAME = "MCF_";
#endregion
#region APILib
private Api CZEMApi = new Api();
private Boolean m_bInitialised = false;
#endregion
#region 构造函数
public SmartSEM()
{
LogManager.InitHardwareLog();
Init();
//判断ELY默认文件夹是否存在
if(!Directory.Exists(ELYPATH))
{
Directory.CreateDirectory(ELYPATH);
}
if (!Directory.Exists(MLFPATH))
{
Directory.CreateDirectory(MLFPATH);
}
}
#endregion
#region 设备初始化
///
/// 设备初始化
///
/// return:true or false
public Boolean Init()
{
long lrt = 0;
#if ROMOTE
lrt = CZEMApi.InitialiseRemoting();
#else
lrt = CZEMApi.Initialise("");
#endif
if (lrt != 0)
{
LogManager.AddHardwareLog("CZEMApi.Initialise Faild - " + ErrorToString(lrt), false);
m_bInitialised = false;
return false;
}
else
{
LogManager.AddHardwareLog("CZEMApi.Initialise Success!", true);
m_bInitialised = true;
return true;
}
}
#endregion
#region 设备远程初始化
///
/// 设备远程初始化
///
/// return:true or false
public Boolean InitRemoting()
{
long lrt = CZEMApi.InitialiseRemoting();
if (lrt != 0)
{
m_bInitialised = false;
return false;
}
else
{
m_bInitialised = true;
return true;
}
}
#endregion
#region 连接状态
public Boolean ConnectStatus()
{
return m_bInitialised;
}
#endregion
#region 关闭设备
///
/// 关闭设备
///
/// true or false
public Boolean Dispose()
{
if (m_bInitialised)
{
long lrt = CZEMApi.ClosingControl();
if (lrt != 0)
{
LogManager.AddHardwareLog("CZEMApi.ClosingControl Faild - " + ErrorToString(lrt), false);
return false;
}
else
{
LogManager.AddHardwareLog("CZEMApi.ClosingControl Success!", true);
m_bInitialised = false;
return true;
}
}
else
{
return false;
}
}
#endregion
#region 读参数函数
private Boolean ReadParams(String str_param, ref float value)
{
if (m_bInitialised)
{
object varfloat = new VariantWrapper((float)0.0f);
long lrt = CZEMApi.Get(str_param, ref varfloat);
if (lrt != 0)
{
LogManager.AddHardwareLog("Get " + str_param + " Faild - " + ErrorToString(lrt), false);
return false;
}
else
{
value = Convert.ToSingle(varfloat);
return true;
}
}
else
{
LogManager.AddHardwareLog("ReadParams m_bInitialised = false", false);
return false;
}
}
#endregion
#region 写模拟参数函数
private Boolean WriteParams(String str_param, float value)
{
if (m_bInitialised)
{
//先取范围
object varMin = new VariantWrapper((float)0.0f);
object varMax = new VariantWrapper((float)0.0f);
long lrt = CZEMApi.GetLimits(str_param, ref varMin, ref varMax);
if (lrt != 0)
{
LogManager.AddHardwareLog("GetLimits " + str_param + " Faild - " + ErrorToString(lrt), false);
return false;
}
if (value <= Convert.ToSingle(varMax) && value >= Convert.ToSingle(varMin))
{
object varFloat = new VariantWrapper(value);
lrt = CZEMApi.Set(str_param, ref varFloat);// set value
if (lrt != 0)
{
LogManager.AddHardwareLog("Set " + str_param + " Faild - " + ErrorToString(lrt), false);
return false;
}
return true;
}
else
{
LogManager.AddHardwareLog("Set " + str_param + " Faild - Out to range", false);
return false;
}
}
else
{
LogManager.AddHardwareLog("ReadParams m_bInitialised = false", false);
return false;
}
}
#endregion
#region 写数字参数函数
private Boolean WriteDataParams(String str_param, float value)
{
if (m_bInitialised)
{
object varFloat = new VariantWrapper(value);
long lrt = CZEMApi.Set(str_param, ref varFloat);// set value
if (lrt != 0)
{
LogManager.AddHardwareLog("Set " + str_param + " Faild - " + ErrorToString(lrt), false);
return false;
}
return true;
}
else
{
LogManager.AddHardwareLog("ReadParams m_bInitialised = false", false);
return false;
}
}
#endregion
#region 执行命令
private Boolean ExecuteCmd(String cmd)
{
if (m_bInitialised)
{
long lrt = CZEMApi.Execute(cmd);// execute command
if (lrt != 0)
{
LogManager.AddHardwareLog("ExecuteCmd " + cmd + " Faild - " + ErrorToString(lrt), false);
return false;
}
else
{
return true;
}
}
else
{
return false;
}
}
#endregion
#region SEM缩放
///
/// 读取缩放倍数
///
/// true:float or false:NaN
public float GetMagnification()
{
float ret = 0;
if(ReadParams(AP_MAG, ref ret))
{
LogManager.AddHardwareLog("GetMagnification " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetMagnification Faild!", false);
return float.NaN;
}
}
///
/// 设置缩放倍数
///
/// 倍数
/// true or false
public Boolean SetMagnification(float set)
{
Boolean ret = WriteParams(AP_MAG, set);
LogManager.AddHardwareLog("SetMagnification = " + set.ToString(), ret);
return ret;
}
#endregion
#region SEM焦距
///
/// 读取工作距离
///
/// true:float or false:NaN
public float GetWorkingDistance()
{
float ret = 0;
if (ReadParams(AP_WD, ref ret))
{
LogManager.AddHardwareLog("GetWorkingDistance " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetWorkingDistance Faild!", false);
return float.NaN;
}
}
///
/// 设置焦距
///
/// 焦距
/// true or false
public Boolean SetWorkingDistance(float set)
{
Boolean ret = WriteParams(AP_WD, set);
LogManager.AddHardwareLog("SetWorkingDistance = " + set.ToString(), ret);
return ret;
}
#endregion
#region 亮度
///
/// 读取亮度
///
/// true:float or false:NaN
public float GetBrightness()
{
float ret = 0;
if (ReadParams(AP_BRIGHTNESS, ref ret))
{
LogManager.AddHardwareLog("GetBrightness " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetBrightness Faild!", false);
return float.NaN;
}
}
///
/// 设置亮度
///
/// 亮度
/// true or false
public Boolean SetBrightness(float set)
{
Boolean ret = WriteParams(AP_BRIGHTNESS, set);
LogManager.AddHardwareLog("SetBrightness = " + set.ToString(), ret);
return ret;
}
#endregion
#region 对比度
///
/// 读取对比度
///
/// true:float or false:NaN
public float GetContrast()
{
float ret = 0;
if (ReadParams(AP_CONTRAST, ref ret))
{
LogManager.AddHardwareLog("GetContrast " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetContrast Faild!", false);
return float.NaN;
}
}
///
/// 设置对比度
///
/// 对比度
/// true or false
public Boolean SetContrast(float set)
{
Boolean ret = WriteParams(AP_CONTRAST, set);
LogManager.AddHardwareLog("SetContrast = " + set.ToString(), ret);
return ret;
}
#endregion
#region 自动亮度对比度
///
/// 读取自动亮度对比度状态
///
/// true:float or false:NaN
public float GetAutoVideo()
{
float ret = 0;
if (ReadParams(DP_AUTO_VIDEO, ref ret))
{
LogManager.AddHardwareLog("GetAutoVideo " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetAutoVideo Faild!", false);
return float.NaN;
}
}
///
/// 设置自动亮度对比度状态
///
/// 0:off;1:B(亮度);2:C(对比度);3:BC
/// true or false
public Boolean SetAutoVideoOff()
{
Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)0);
LogManager.AddHardwareLog("SetAutoVideoOff", ret);
return ret;
}
public Boolean SetAutoVideoBrightness()
{
Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)1);
LogManager.AddHardwareLog("SetAutoVideoBrightness", ret);
return ret;
}
public Boolean SetAutoVideoContrast()
{
Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)2);
LogManager.AddHardwareLog("SetAutoVideoContrast", ret);
return ret;
}
public Boolean SetAutoVideoBrightnessAndContrast()
{
Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)3);
LogManager.AddHardwareLog("SetAutoVideoBrightnessAndContrast", ret);
return ret;
}
#endregion
#region 亮度目标
///
/// 读取亮度目标
///
/// true:float or false:NaN
public float GetAutoBright()
{
float ret = 0;
if (ReadParams(AP_AUTO_BRIGHT, ref ret))
{
LogManager.AddHardwareLog("GetAutoBright " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetAutoBright Faild!", false);
return float.NaN;
}
}
///
/// 设置亮度目标
///
/// 亮度
/// true or false
public Boolean SetAutoBright(float set)
{
Boolean ret = WriteParams(AP_AUTO_BRIGHT, set);
LogManager.AddHardwareLog("SetAutoBright = " + set.ToString(), ret);
return ret;
}
#endregion
#region 对比度目标
///
/// 读取对比度目标
///
/// true:float or false:NaN
public float GetAutoContrast()
{
float ret = 0;
if (ReadParams(AP_AUTO_CONTRAST, ref ret))
{
LogManager.AddHardwareLog("GetAutoContrast " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetAutoContrast Faild!", false);
return float.NaN;
}
}
///
/// 设置对比度目标
///
/// 对比度目标
/// true or false
public Boolean SetAutoContrast(float set)
{
Boolean ret = WriteParams(AP_AUTO_CONTRAST, set);
LogManager.AddHardwareLog("SetAutoContrast = " + set.ToString(), ret);
return ret;
}
#endregion
#region SEM消像散
///
/// 读取消像散X
///
/// true:float or false:NaN
public float GetAstigmatismX()
{
float ret = 0;
if (ReadParams(AP_STIG_X, ref ret))
{
LogManager.AddHardwareLog("GetAstigmatismX " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetAstigmatismX Faild!", false);
return float.NaN;
}
}
///
/// 读取消像散Y
///
/// true:float or false:NaN
public float GetAstigmatismY()
{
float ret = 0;
if (ReadParams(AP_STIG_Y, ref ret))
{
LogManager.AddHardwareLog("GetAstigmatismY " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetAstigmatismY Faild!", false);
return float.NaN;
}
}
///
/// 设置消像散X
///
/// 对比度
/// true or false
public Boolean SetAstigmatismX(float set)
{
Boolean ret = WriteParams(AP_STIG_X, set);
LogManager.AddHardwareLog("SetAstigmatismX = " + set.ToString(), ret);
return ret;
}
///
/// 设置消像散Y
///
/// 对比度
/// true or false
public Boolean SetAstigmatismY(float set)
{
Boolean ret = WriteParams(AP_STIG_Y, set);
LogManager.AddHardwareLog("SetAstigmatismY = " +set.ToString(), ret);
return ret;
}
#endregion
#region 角度补偿
///
/// 读取角度补偿
///
/// true:float or false:NaN
public float GetTiltAngle()
{
float ret = 0;
if (ReadParams(AP_TILT_ANGLE, ref ret))
{
LogManager.AddHardwareLog("GetTiltAngle " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetTiltAngle Faild!", false);
return float.NaN;
}
}
///
/// 角度补偿解锁
///
///
public Boolean SetTiltAngleOn()
{
Boolean ret = WriteDataParams(DP_TILT_CORRECTION, 1);
LogManager.AddHardwareLog("Set DP_TILT_CORRECTION = 1.", ret);
return ret;
}
///
/// 角度补偿锁定
///
///
public Boolean SetTiltAngleOff()
{
Boolean ret = WriteDataParams(DP_TILT_CORRECTION, 0);
LogManager.AddHardwareLog("Set DP_TILT_CORRECTION = 0.", ret);
return ret;
}
///
/// 设置角度补偿
///
/// 角度补偿
/// true or false
public Boolean SetTiltAngle(float set)
{
Boolean ret = false;
//ret = WriteDataParams(DP_TILT_CORRECTION, 1);
//LogManager.AddHardwareLog("Set DP_TILT_CORRECTION = 1.", ret);
ret = WriteParams(AP_TILT_ANGLE, set);
LogManager.AddHardwareLog("SetTiltAngle = " + set.ToString(), ret);
//ret = WriteDataParams(DP_TILT_CORRECTION, 0);
//LogManager.AddHardwareLog("Set DP_TILT_CORRECTION = 0.", ret);
return ret;
}
#endregion
#region 图像大小
public int[] GetImageStore()
{
int[] i_ret = new int[2];
float ret = 0;
if (ReadParams(DP_IMAGE_STORE, ref ret))
{
switch (ret)
{
case 0:
i_ret[0] = 1024;
i_ret[1] = 768;
break;
case 1:
i_ret[0] = 512;
i_ret[1] = 384;
break;
case 2:
i_ret[0] = 2048;
i_ret[1] = 1536;
break;
case 3:
i_ret[0] = 3072;
i_ret[1] = 2304;
break;
case 4:
i_ret[0] = 4096;
i_ret[1] = 3072;
break;
case 5:
i_ret[0] = 5120;
i_ret[1] = 3840;
break;
case 6:
i_ret[0] = 6144;
i_ret[1] = 4608;
break;
case 7:
i_ret[0] = 8192;
i_ret[1] = 6144;
break;
case 8:
i_ret[0] = 12288;
i_ret[1] = 9216;
break;
case 9:
i_ret[0] = 16384;
i_ret[1] = 12288;
break;
case 10:
i_ret[0] = 24576;
i_ret[1] = 18432;
break;
case 11:
i_ret[0] = 32768;
i_ret[1] = 24576;
break;
default:
i_ret[0] = 0;
i_ret[1] = 0;
break;
}
LogManager.AddHardwareLog("GetImageStore=" + i_ret[0].ToString() + "*" + i_ret[1].ToString(), true);
}
else
{
LogManager.AddHardwareLog("GetImageStore Faild!", false);
i_ret[0] = 0;
i_ret[1] = 0;
}
return i_ret;
}
public Boolean SetImageStore(float set)
{
Boolean ret = WriteDataParams("DP_IMAGE_STORE", set);
LogManager.AddHardwareLog("SetImageStore = " + set.ToString(), ret);
return ret;
}
#endregion
#region 抓取图像
///
/// 抓取图像
///
/// true:float or false:NaN
public Boolean GrabImage(String filename, short xoff,short yoff, short width,short height,short type)
{
if (m_bInitialised)
{
long lrt = CZEMApi.Grab(xoff, yoff, width, height, type, filename);
if (lrt != 0)
{
LogManager.AddHardwareLog("GrabImage Faild!", false);
return false;
}
else
{
LogManager.AddHardwareLog("GrabImage Filename=" + filename + ",x,y,w,h,type=" + xoff.ToString() + "," +
yoff.ToString() + "," + width.ToString() + "," + height.ToString() + "," + type.ToString(), true);
float sta = GetImageFrozen();
if (sta == 1)
{
ImageLive();
}
return true;
}
}
else
{
LogManager.AddHardwareLog("GrabImage m_bInitialised = False!", false);
return false;
}
}
#endregion
#region 图像解冻
public float GetImageFrozen()
{
float ret = 0;
if (ReadParams(DP_FROZEN, ref ret))
{
LogManager.AddHardwareLog("GetImageFrozen " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetImageFrozen Faild!", false);
return float.NaN;
}
}
public Boolean ImageFrozen()
{
Boolean ret = WriteDataParams(DP_FROZEN, (float)1);
LogManager.AddHardwareLog("ImageFrozen!", ret);
return ret;
}
public Boolean ImageLive()
{
Boolean ret = WriteDataParams(DP_FROZEN, (float)0);
LogManager.AddHardwareLog("ImageLive!", ret);
return ret;
}
#endregion
#region 图像类型切换
public Boolean DetectorType(float set)
{
Boolean ret = WriteDataParams(DP_DETECTOR_TYPE, set);
LogManager.AddHardwareLog("DetectorType = " + set.ToString(), ret);
return ret;
}
#endregion
#region SEM电子束移动接口
///
/// 获取电子束移动接口X
///
/// true:float or false:NaN
public float GetBeamShiftX()
{
float ret = 0;
if (ReadParams(AP_BEAMSHIFT_X, ref ret))
{
LogManager.AddHardwareLog("GetBeamShiftX " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetBeamShiftX Faild!", false);
return float.NaN;
}
}
///
/// 获取电子束移动接口Y
///
/// true:float or false:NaN
public float GetBeamShiftY()
{
float ret = 0;
if (ReadParams(AP_BEAMSHIFT_Y, ref ret))
{
LogManager.AddHardwareLog("GetBeamShiftY " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetBeamShiftY Faild!", false);
return float.NaN;
}
}
///
/// 设置电子束移动接口X
///
/// X坐标
/// true or false
public Boolean SetBeamShiftX(float set)
{
Boolean ret = WriteParams(AP_BEAMSHIFT_X, set);
LogManager.AddHardwareLog("SetBeamShiftX=" + set.ToString(), ret);
return ret;
}
///
/// 设置电子束移动接口Y
///
/// X坐标
/// true or false
public Boolean SetBeamShiftY(float set)
{
Boolean ret = WriteParams(AP_BEAMSHIFT_Y, set);
LogManager.AddHardwareLog("SetBeamShiftY=" + set.ToString(), ret);
return ret;
}
#endregion
#region 样品台移动接口
///
/// 返回样品台坐标数组
///
/// Lenght=6
public float[] GetStagePosition()
{
object retx = new VariantWrapper((float)0.0f);
object rety = new VariantWrapper((float)0.0f);
object retz = new VariantWrapper((float)0.0f);
object rett = new VariantWrapper((float)0.0f);
object retr = new VariantWrapper((float)0.0f);
object retm = new VariantWrapper((float)0.0f);
float[] ret = new float[6];
if (m_bInitialised)
{
CZEMApi.GetStagePosition(ref retx, ref rety, ref retz, ref rett, ref retr, ref retm);
ret[0] = Convert.ToSingle(retx);
ret[1] = Convert.ToSingle(rety);
ret[2] = Convert.ToSingle(retz);
ret[3] = Convert.ToSingle(rett);
ret[4] = Convert.ToSingle(retr);
ret[5] = Convert.ToSingle(retm);
LogManager.AddHardwareLog("GetStagePosition x,y,z,t,r,m = " + retx.ToString() + "," + rety.ToString() +
"," + retz.ToString() + "," + rett.ToString() + "," + retr.ToString() + "," + retm.ToString(), true);
}
else
{
ret[0] = float.NaN;
ret[1] = float.NaN;
ret[2] = float.NaN;
ret[3] = float.NaN;
ret[4] = float.NaN;
ret[5] = float.NaN;
LogManager.AddHardwareLog("GetStagePosition Faild!", false);
}
return ret;
}
///
/// 设置样品台坐标数组
///
/// Lenght=6
private Boolean SetStagePosition(float[] set)
{
if (m_bInitialised)
{
long lrt = CZEMApi.MoveStage(set[0], set[1], set[2], set[3], set[4], set[5]);
if(lrt==0)
{
LogManager.AddHardwareLog("SetStagePosition x,y,z,t,r,m = " + set[0].ToString() + "," + set[1].ToString() +
"," + set[2].ToString() + "," + set[3].ToString() + "," + set[4].ToString() + "," + set[5].ToString(), true);
return true;
}
else
{
LogManager.AddHardwareLog("SetStagePosition Faild!", false);
return false;
}
}
else
{
LogManager.AddHardwareLog("SetStagePosition m_bInitialised = false!", false);
return false;
}
}
///
/// 样品台位置 X轴
///
/// true:float or false:NaN
public float GetStageAtX()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_X, ref ret))
{
LogManager.AddHardwareLog("GetStageAtX Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetStageAtX Faild!", false);
return float.NaN;
}
}
///
/// 样品台位置 Y轴
///
/// true:float or false:NaN
public float GetStageAtY()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_Y, ref ret))
{
LogManager.AddHardwareLog("GetStageAtY Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetStageAtY Faild!", false);
return float.NaN;
}
}
///
/// 样品台位置 Z轴
///
/// true:float or false:NaN
public float GetStageAtZ()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_Z, ref ret))
{
LogManager.AddHardwareLog("GetStageAtZ Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetStageAtZ Faild!", false);
return float.NaN;
}
}
///
/// 样品台位置 T轴
///
/// true:float or false:NaN
public float GetStageAtT()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_T, ref ret))
{
LogManager.AddHardwareLog("GetStageAtT Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetStageAtT Faild!", false);
return float.NaN;
}
}
///
/// 样品台位置 R轴
///
/// true:float or false:NaN
public float GetStageAtR()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_R, ref ret))
{
LogManager.AddHardwareLog("GetStageAtR Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetStageAtR Faild!", false);
return float.NaN;
}
}
///
/// 样品台位置 M轴
///
/// true:float or false:NaN
public float GetStageAtM()
{
float ret = 0;
if (ReadParams(AP_STAGE_AT_M, ref ret))
{
LogManager.AddHardwareLog("GetStageAtM Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetStageAtM Faild!", false);
return float.NaN;
}
}
///
/// 样品台位置 X轴
///
/// X轴移动坐标
///
public Boolean SetStageGotoX(float set)
{
Boolean ret = WriteParams(AP_STAGE_GOTO_X, set);
LogManager.AddHardwareLog("SetStageGotoX = " + set.ToString(), ret);
return ret;
}
///
/// 样品台位置 Y轴
///
/// Y轴移动坐标
///
public Boolean SetStageGotoY(float set)
{
Boolean ret = WriteParams(AP_STAGE_GOTO_Y, set);
LogManager.AddHardwareLog("SetStageGotoY = " + set.ToString(), ret);
return ret;
}
///
/// 样品台位置 Z轴
///
/// Y轴移动坐标
///
public Boolean SetStageGotoZ(float set)
{
Boolean ret = WriteParams(AP_STAGE_GOTO_Z, set);
LogManager.AddHardwareLog("SetStageGotoZ = " + set.ToString(), ret);
return ret;
}
///
/// 样品台位置 T轴
///
/// Y轴移动坐标
///
public Boolean SetStageGotoT(float set)
{
Boolean ret = WriteParams(AP_STAGE_GOTO_T, set);
LogManager.AddHardwareLog("SetStageGotoT = " + set.ToString(), ret);
return ret;
}
///
/// 样品台位置 R轴
///
/// Y轴移动坐标
///
public Boolean SetStageGotoR(float set)
{
Boolean ret = WriteParams(AP_STAGE_GOTO_R, set);
LogManager.AddHardwareLog("SetStageGotoR = " + set.ToString(), ret);
return ret;
}
///
/// 样品台位置 M轴
///
/// M轴移动坐标
///
public Boolean SetStageGotoM(float set)
{
Boolean ret = WriteParams(AP_STAGE_GOTO_M, set);
LogManager.AddHardwareLog("SetStageGotoM = " + set.ToString(), ret);
return ret;
}
#endregion
#region 移动样品台XY轴
public Boolean MoveStageXY(float x,float y)
{
//先取范围
object xMin = new VariantWrapper((float)0.0f);
object xMax = new VariantWrapper((float)0.0f);
long lrt = CZEMApi.GetLimits(AP_STAGE_GOTO_X, ref xMin, ref xMax);
if (lrt != 0)
{
LogManager.AddHardwareLog("GetLimits AP_STAGE_GOTO_X Faild!", false);
return false;
}
if (x > Convert.ToSingle(xMax) || x < Convert.ToSingle(xMin))
{
LogManager.AddHardwareLog("GetLimits AP_STAGE_GOTO_X Max,Min,x = " + xMax.ToString() + "," + xMin.ToString() +
"," + x.ToString(), false);
return false;
}
object yMin = new VariantWrapper((float)0.0f);
object yMax = new VariantWrapper((float)0.0f);
lrt = CZEMApi.GetLimits(AP_STAGE_GOTO_Y, ref yMin, ref yMax);
if (lrt != 0)
{
LogManager.AddHardwareLog("GetLimits AP_STAGE_GOTO_Y Faild!", false);
return false;
}
if (y > Convert.ToSingle(yMax) || y < Convert.ToSingle(yMin))
{
LogManager.AddHardwareLog("GetLimits AP_STAGE_GOTO_Y Max,Min,y = " + yMax.ToString() + "," + yMin.ToString() +
"," + y.ToString(), false);
return false;
}
float[] gsp = GetStagePosition();
gsp[0] = x;
gsp[1] = y;
return SetStagePosition(gsp);
}
#endregion
#region 样品台急停
public Boolean CmdStageAbort()
{
Boolean ret = ExecuteCmd(CMD_STAGE_ABORT);
LogManager.AddHardwareLog("CmdStageAbort!", ret);
return ret;
}
#endregion
#region Scan Rotate角度接口
///
/// 获取Scan Rotate角度接口
///
/// true:float or false:NaN
public float GetScanRotation()
{
float ret = 0;
if (ReadParams(AP_SCANROTATION, ref ret))
{
LogManager.AddHardwareLog("GetScanRotation Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetScanRotation Faild!", false);
return float.NaN;
}
}
///
/// ScanRotation解锁
///
///
public Boolean SetScanRotationOn()
{
Boolean ret = WriteDataParams(DP_SCAN_ROT, 1);
LogManager.AddHardwareLog("SetScanRotation DP_SCAN_ROT = 1", ret);
return ret;
}
///
/// ScanRotation锁定
///
///
public Boolean SetScanRotationOff()
{
Boolean ret = WriteDataParams(DP_SCAN_ROT, 0);
LogManager.AddHardwareLog("SetScanRotation DP_SCAN_ROT = 0", ret);
return ret;
}
///
/// 设置Scan Rotate角度接口
///
/// 角度补偿
/// true or false
public Boolean SetScanRotation(float set)
{
Boolean ret = false;
//ret = WriteDataParams(DP_SCAN_ROT, 1);
//LogManager.AddHardwareLog("SetScanRotation DP_SCAN_ROT = 1", ret);
ret = WriteParams(AP_SCANROTATION, set);
LogManager.AddHardwareLog("SetScanRotation = " + set.ToString(), ret);
//ret = WriteDataParams(DP_SCAN_ROT, 0);
//LogManager.AddHardwareLog("SetScanRotation DP_SCAN_ROT = 0", ret);
return ret;
}
#endregion
#region 像素读取PixelSize
///
/// 获取Pixel Size 接口,只读
///
/// true:float or false:NaN
public float GetPixelSize()
{
float ret = 0;
if (ReadParams(AP_PIXEL_SIZE, ref ret))
{
LogManager.AddHardwareLog("GetPixelSize " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetPixelSize Faild!", false);
return float.NaN;
}
}
#endregion
#region 电子束校正设置
///
/// 读取电子束校正状态
///
///
public float GetTiltCorrection()
{
float ret = 0;
if (ReadParams(DP_TILT_CORRECTION, ref ret))
{
LogManager.AddHardwareLog("GetTiltCorrection " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetTiltCorrection Faild!", false);
return float.NaN;
}
}
///
/// 设置电子束校正状态
///
///
///
public Boolean SetTiltCorrectionOff()
{
Boolean ret = WriteDataParams(DP_TILT_CORRECTION, (float)0);
LogManager.AddHardwareLog("SetTiltCorrectionOff!", ret);
return ret;
}
public Boolean SetTiltCorrectionOn()
{
Boolean ret = WriteDataParams(DP_TILT_CORRECTION, (float)1);
LogManager.AddHardwareLog("SetTiltCorrectionOn!", ret);
return ret;
}
#endregion
#region 开启电压
public Boolean CmdOpenVoltage()
{
Boolean ret = ExecuteCmd(CMD_BEAM_ON);
LogManager.AddHardwareLog("CmdOpenVoltage!", ret);
return ret;
}
#endregion
#region 关闭电压
public Boolean CmdCloseVoltage()
{
Boolean ret = ExecuteCmd(CMD_EHT_OFF);
LogManager.AddHardwareLog("CmdCloseVoltage!", ret);
return ret;
}
#endregion
#region 自动对焦1
public Boolean CmdAutoFocusCoarse()
{
Boolean ret = ExecuteCmd(CMD_AUTO_FOCUS_COARSE);
LogManager.AddHardwareLog("CmdAutoFocusCoarse!", ret);
return ret;
}
#endregion
#region 自动对焦2
public Boolean CmdAutoFocusFine()
{
Boolean ret = ExecuteCmd(CMD_AUTO_FOCUS_FINE);
LogManager.AddHardwareLog("CmdAutoFocusFine!", ret);
return ret;
}
#endregion
#region 自动消像散
public Boolean CmdAutoStig()
{
Boolean ret = ExecuteCmd(CMD_AUTO_STIG);
LogManager.AddHardwareLog("CmdAutoStig!", ret);
return ret;
}
#endregion
#region 调用宏文件命令
public Boolean CMDMCFFilename(String _MLFFullFileName)
{
//String CMDMCF = MCF_FILENAME + filename;
//Boolean ret = ExecuteCmd(CMDMCF);
//LogManager.AddHardwareLog("CMDMCFFilename = " + filename, ret);
//return ret;
if (File.Exists(_MLFFullFileName) && Directory.Exists(MLFPATH))
{
//移动文件
if (_MLFFullFileName != (MLFPATH + MLFFILENAME))
{
File.Copy(_MLFFullFileName, MLFPATH + MLFFILENAME, true);
LogManager.AddHardwareLog("CmdFIBLoadMLF Copy FileName:" + _MLFFullFileName + " To " + MLFPATH + MLFFILENAME, true);
}
Boolean ret = ExecuteCmd(MCF_FILENAME + MLFFILENAME.Substring(0,MLFFILENAME.Length-4));
LogManager.AddHardwareLog("CmdFIBLoadMLF Success Execute " + _MLFFullFileName, true);
return ret;
}
else
{
LogManager.AddHardwareLog("CmdFIBLoadMLF Faild:" + _MLFFullFileName + " Is Not Exists!", false);
return false;
}
}
#endregion
#region 读取样品台状态
public float GetStageIs()
{
float ret = 0;
if (ReadParams(DP_STAGE_IS, ref ret))
{
LogManager.AddHardwareLog("GetStageIs " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetStageIs Faild!", false);
return float.NaN;
}
}
#endregion
#region 读取自动函数的状态
public float GetAutoFunction()
{
float ret = 0;
if (ReadParams(DP_AUTO_FUNCTION, ref ret))
{
LogManager.AddHardwareLog("GetAutoFunction " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetAutoFunction Faild!", false);
return float.NaN;
}
}
#endregion
#region FIB缩放
///
/// 读取缩放倍数
///
/// true:float or false:NaN
public float GetFIBMagnification()
{
float ret = 0;
if (ReadParams(AP_FIB_MAGNIFICATION, ref ret))
{
LogManager.AddHardwareLog("GetFIBMagnification " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetFIBMagnification Faild!", false);
return float.NaN;
}
}
///
/// 设置缩放倍数
///
/// 倍数
/// true or false
public Boolean SetFIBMagnification(float set)
{
Boolean ret = WriteParams(AP_FIB_MAGNIFICATION, set);
LogManager.AddHardwareLog("GSetFIBMagnification = " + set.ToString(), ret);
return ret;
}
#endregion
#region FIB焦距
///
/// 读取工作距离AP_FIB_OBJECTIVE_POTENTIAL
///
/// true:float or false:NaN
public float GetFIBObjectivePotential()
{
float ret = 0;
if (ReadParams(AP_FIB_OBJECTIVE_POTENTIAL, ref ret))
{
LogManager.AddHardwareLog("GetFIBObjectivePotential " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetFIBObjectivePotential Faild!", false);
return float.NaN;
}
}
///
/// 设置焦距
///
/// 焦距
/// true or false
public Boolean SetFIBObjectivePotential(float set)
{
Boolean ret = WriteParams(AP_FIB_OBJECTIVE_POTENTIAL, set);
LogManager.AddHardwareLog("SetFIBObjectivePotential = " + set.ToString(), ret);
return ret;
}
#endregion
#region FIB消像散
///
/// 读取消像散X
///
/// true:float or false:NaN
public float GetFIBAstigmatismX()
{
float ret = 0;
if (ReadParams(AP_FIB_STIGMATOR_X, ref ret))
{
LogManager.AddHardwareLog("GetFIBAstigmatismX " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetFIBAstigmatismX Faild!", false);
return float.NaN;
}
}
///
/// 读取消像散Y
///
/// true:float or false:NaN
public float GetFIBAstigmatismY()
{
float ret = 0;
if (ReadParams(AP_FIB_STIGMATOR_Y, ref ret))
{
LogManager.AddHardwareLog("GetFIBAstigmatismY " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetFIBAstigmatismY Faild!", false);
return float.NaN;
}
}
///
/// 设置消像散X
///
/// 对比度
/// true or false
public Boolean SetFIBAstigmatismX(float set)
{
Boolean ret = WriteParams(AP_FIB_STIGMATOR_X, set);
LogManager.AddHardwareLog("SetFIBAstigmatismX = " + set.ToString(), ret);
return ret;
}
///
/// 设置消像散Y
///
/// 对比度
/// true or false
public Boolean SetFIBAstigmatismY(float set)
{
Boolean ret = WriteParams(AP_FIB_STIGMATOR_Y, set);
LogManager.AddHardwareLog("SetFIBAstigmatismY = " + set.ToString(), ret);
return ret;
}
#endregion
#region FIB电子束移动接口
///
/// 获取电子束移动接口X
///
/// true:float or false:NaN
public float GetFIBBeamShiftX()
{
float ret = 0;
if (ReadParams(AP_FIB_BEAM_SHIFT_X, ref ret))
{
LogManager.AddHardwareLog("GetFIBBeamShiftX " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetFIBBeamShiftX Faild!", false);
return float.NaN;
}
}
///
/// 获取电子束移动接口Y
///
/// true:float or false:NaN
public float GetFIBBeamShiftY()
{
float ret = 0;
if (ReadParams(AP_FIB_BEAM_SHIFT_Y, ref ret))
{
LogManager.AddHardwareLog("GetFIBBeamShiftY " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetFIBBeamShiftY Faild!", false);
return float.NaN;
}
}
///
/// 设置电子束移动接口X
///
/// X坐标
/// true or false
public Boolean SetFIBBeamShiftX(float set)
{
Boolean ret = WriteParams(AP_FIB_BEAM_SHIFT_X, set);
LogManager.AddHardwareLog("SetFIBBeamShiftX = " + set.ToString(), ret);
return ret;
}
///
/// 设置电子束移动接口Y
///
/// X坐标
/// true or false
public Boolean SetFIBBeamShiftY(float set)
{
Boolean ret = WriteParams(AP_FIB_BEAM_SHIFT_Y, set);
LogManager.AddHardwareLog("SetFIBBeamShiftX = " + set.ToString(), ret);
return ret;
}
#endregion
#region FIB模式
///
/// 获取FIB模式
///
/// true:float or false:NaN
public float GetFIBMode()
{
float ret = 0;
if (ReadParams(DP_FIB_MODE, ref ret))
{
LogManager.AddHardwareLog("GetFIBMode " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetFIBMode Faild!", false);
return float.NaN;
}
}
#endregion
#region 工作模式选择
//SEM模式
public Boolean CmdFIBModeSEM()
{
Boolean ret = ExecuteCmd(CMD_FIB_MODE_SEM);
LogManager.AddHardwareLog("CmdFIBModeSEM = SEM!", ret);
return ret;
}
//FIB模式
public Boolean CmdFIBModeFIB()
{
Boolean ret = ExecuteCmd(CMD_FIB_MODE_FIB);
LogManager.AddHardwareLog("CmdFIBModeSEM = FIB!", ret);
return ret;
}
//铣削模式
public Boolean CmdFIBModeMILL()
{
Boolean ret = ExecuteCmd(CMD_FIB_MODE_MILL);
LogManager.AddHardwareLog("CmdFIBModeSEM = MILL!", ret);
return ret;
}
//SEM+FIB模式
public Boolean CmdFIBModeSEMAndFIB()
{
return ExecuteCmd(CMD_FIB_MODE_SEM_FIB);
}
//铣削+SEM模式
public Boolean CmdFIBModeMILLAndSEM()
{
return ExecuteCmd(CMD_FIB_MODE_MILL_SEM);
}
//EXT模式
public Boolean CmdFIBModeEXT()
{
return ExecuteCmd(CMD_FIB_MODE_EXT);
}
//EXT+SEM模式
public Boolean CmdFIBModeEXTAndSEM()
{
return ExecuteCmd(CMD_FIB_MODE_EXT_SEM);
}
//Argon(氩)+SEM模式
public Boolean CmdFIBModeARGONAndSEM()
{
return ExecuteCmd(CMD_FIB_MODE_ARGON_SEM);
}
//DRIFT(流)+SEM模式
public Boolean CmdFIBModeDRIFTAndSEM()
{
return ExecuteCmd(CMD_FIB_MODE_DRIFT_SEM);
}
//DRIFT(流)+FIB模式
public Boolean CmdFIBModeDRIFTAndFIB()
{
return ExecuteCmd(CMD_FIB_MODE_DRIFT_FIB);
}
//Argon(氩)模式
public Boolean CmdFIBModeARGON()
{
return ExecuteCmd(CMD_FIB_MODE_ARGON);
}
#endregion
#region 工作模式读取
///
/// 工作模式读取
///
/// 0:SEM 1:FIB 2:MILL
public float GetFIBIMAGING()
{
float ret = 0;
if (ReadParams(DP_FIB_IMAGING, ref ret))
{
LogManager.AddHardwareLog("GetFIBIMAGING " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetFIBIMAGING Faild!", false);
return float.NaN;
}
}
#endregion
#region FIB工作状态
public float GetFIBApiStatus()
{
float ret = 0;
if (ReadParams(DP_SMARTFIB_API_STATUS, ref ret))
{
LogManager.AddHardwareLog("GetFIBApiStatus " + ret.ToString() + " Success!", true);
return ret;
}
else
{
LogManager.AddHardwareLog("GetFIBApiStatus Faild!", false);
return float.NaN;
}
}
#endregion
#region FIB加载.ely文件
public Boolean CmdFIBLoadELY(String _ELYFullFileName)
{
if (File.Exists(_ELYFullFileName) && Directory.Exists(ELYPATH))
{
//移动文件
if(_ELYFullFileName != ( ELYPATH + ELYFILENAME ))
{
File.Copy(_ELYFullFileName, ELYPATH + ELYFILENAME, true);
LogManager.AddHardwareLog("CmdFIBLoadELY Copy FileName:" + _ELYFullFileName + " To " + ELYPATH + ELYFILENAME, true);
}
Boolean ret = ExecuteCmd(CMD_SMARTFIB_LOAD_ELY);
LogManager.AddHardwareLog("CmdFIBLoadELY Success Execute " + _ELYFullFileName, true);
return ret;
}
else
{
LogManager.AddHardwareLog("CmdFIBLoadELY Faild:" + _ELYFullFileName + " Is Not Exists!", false);
return false;
}
}
#endregion
#region FIB确认.ely文件
public Boolean CmdFIBEXPOSUREELY()
{
Boolean ret = WriteDataParams(DP_PATTERNING_MODE, 2);
LogManager.AddHardwareLog("DP_PATTERNING_MODE = 2", ret);
ret = ExecuteCmd(CMD_SMARTFIB_PREPARE_EXPOSURE);
LogManager.AddHardwareLog("CMD_SMARTFIB_PREPARE_EXPOSURE", ret);
return ret;
}
#endregion
#region FIB执行.ely文件
public Boolean CmdFIBSTARTELY()
{
Boolean ret = ExecuteCmd(CMD_FIB_START_MILLING);
LogManager.AddHardwareLog("CMD_FIB_START_MILLING", ret);
return ret;
}
#endregion
#region 错误代码转义
private String ErrorToString(long lError)
{
string strError;
switch ((ZeissErrorCode)lError)
{
case 0:
strError = "OK";
break;
case ZeissErrorCode.API_E_GET_TRANSLATE_FAIL:
strError = "Failed to translate parameter into an ID";
break;
case ZeissErrorCode.API_E_GET_AP_FAIL:
strError = "Failed to get analogue value";
break;
case ZeissErrorCode.API_E_GET_DP_FAIL:
strError = "Failed to get digital value";
break;
case ZeissErrorCode.API_E_GET_BAD_PARAMETER:
strError = "Parameter supplied is neither analogue nor digital";
break;
case ZeissErrorCode.API_E_SET_TRANSLATE_FAIL:
strError = "Failed to translate parameter into an ID";
break;
case ZeissErrorCode.API_E_SET_STATE_FAIL:
strError = "Failed to set a digital state";
break;
case ZeissErrorCode.API_E_SET_FLOAT_FAIL:
strError = "Failed to set a float value";
break;
case ZeissErrorCode.API_E_SET_FLOAT_LIMIT_LOW:
strError = "Value supplied is too low";
break;
case ZeissErrorCode.API_E_SET_FLOAT_LIMIT_HIGH:
strError = "Value supplied is too high";
break;
case ZeissErrorCode.API_E_SET_BAD_VALUE:
strError = "Value supplied is of wrong type";
break;
case ZeissErrorCode.API_E_SET_BAD_PARAMETER:
strError = "Parameter supplied is not analogue nor digital";
break;
case ZeissErrorCode.API_E_EXEC_TRANSLATE_FAIL:
strError = "Failed to translate command into an ID";
break;
case ZeissErrorCode.API_E_EXEC_CMD_FAIL:
strError = "Failed to execute command";
break;
case ZeissErrorCode.API_E_EXEC_MCF_FAIL:
strError = "Failed to execute file macro";
break;
case ZeissErrorCode.API_E_EXEC_MCL_FAIL:
strError = "Failed to execute library macro";
break;
case ZeissErrorCode.API_E_EXEC_BAD_COMMAND:
strError = "Command supplied is not implemented";
break;
case ZeissErrorCode.API_E_GRAB_FAIL:
strError = "Grab command failed";
break;
case ZeissErrorCode.API_E_GET_STAGE_FAIL:
strError = "Get Stage position failed";
break;
case ZeissErrorCode.API_E_MOVE_STAGE_FAIL:
strError = "Move Stage position failed";
break;
case ZeissErrorCode.API_E_NOT_INITIALISED:
strError = "API not initialised";
break;
case ZeissErrorCode.API_E_NOTIFY_TRANSLATE_FAIL: // 1020L
strError = "Failed to translate parameter to an ID";
break;
case ZeissErrorCode.API_E_NOTIFY_SET_FAIL:
strError = "Set notification failed";
break;
case ZeissErrorCode.API_E_GET_LIMITS_FAIL:
strError = "Get limits failed";
break;
case ZeissErrorCode.API_E_GET_MULTI_FAIL:
strError = "Get multiple parameters failed";
break;
case ZeissErrorCode.API_E_SET_MULTI_FAIL:
strError = "Set multiple parameters failed";
break;
case ZeissErrorCode.API_E_NOT_LICENSED:
strError = "Missing API license";
break;
case ZeissErrorCode.API_E_NOT_IMPLEMENTED:
strError = "Reserved or not implemented";
break;
case ZeissErrorCode.API_E_GET_USER_NAME_FAIL:
strError = "Failed to get user name";
break;
case ZeissErrorCode.API_E_GET_USER_IDLE_FAIL:
strError = "Failed to get user idle state";
break;
case ZeissErrorCode.API_E_GET_LAST_REMOTING_CONNECT_ERROR_FAIL:
strError = "Failed to get the last remoting connection error string";
break;
case ZeissErrorCode.API_E_EMSERVER_LOGON_FAILED:
strError = "Failed to remotely logon to the EM Server. Username and password may be incorrect or EM Server is not running or User is already logged on";
break;
case ZeissErrorCode.API_E_EMSERVER_START_FAILED:
strError = "Failed to start the EM Server. This may be because the Server is already running or has an internal error.";
break;
case ZeissErrorCode.API_E_REMOTING_NOT_CONFIGURED:
strError = "Remoting incorrectly configured, use RConfigure to correct";
break;
case ZeissErrorCode.API_E_REMOTING_FAILED_TO_CONNECT:
strError = "Remoting did not connect to the server";
break;
case ZeissErrorCode.API_E_REMOTING_COULD_NOT_CREATE_INTERFACE:
strError = "Remoting could not start (unknown reason)";
break;
case ZeissErrorCode.API_E_REMOTING_EMSERVER_NOT_RUNNING:
strError = "EMServer is not running on the remote machine";
break;
case ZeissErrorCode.API_E_REMOTING_NO_USER_LOGGED_IN:
strError = "No user is logged into EM Server on the remote machine";
break;
default:
strError = string.Format("Unknown error code {0}", lError);
break;
}
return strError;
}
#endregion
}
}