//时间： //作者： //功能：单元测试功能 using System; using System.Collections.Generic; using System.ComponentModel; using System.Data; using System.Drawing; using System.Linq; using System.Runtime.InteropServices; using System.Text; using System.Threading; using System.Threading.Tasks; using System.Windows.Forms; using System.Configuration; using System.IO; using SmartSEMControl; using FileManager; using System.Xml; using MeasureData; using WebManager; using MeasureThread; namespace HOZProject { public partial class FormUnitControl : Form { #region 系统参数 //全局只有一个fatorySEM static FactoryHardware factorySEM = FactoryHardware.Instance; ISEMControl iSEM = factorySEM.ISEM; //static FactoryHardware factorySEM = null; //ISEMControl iSEM = null; public XmlManager xmg = new XmlManager(); private String path = Directory.GetCurrentDirectory(); private int st_flag = 0; ImageProcess wr = new ImageProcess(ConfigurationManager.AppSettings["WebServerIP"].ToString(), ConfigurationManager.AppSettings["WebServerPort"].ToString(), ConfigurationManager.AppSettings["WebServerUrl"].ToString()); String[] sT; String[] firms; Configuration config = ConfigurationManager.OpenExeConfiguration(ConfigurationUserLevel.None); #endregion #region 构造函数 public FormUnitControl() { InitializeComponent(); Control.CheckForIllegalCrossThreadCalls = false; //if(iSEM.ConnectStatus()) //{ // float ret = iSEM.GetFIBIMAGING(); // if(ret==0) // { // btnSEM.BackColor = Color.Lime; // } // else if(ret==1) // { // btnFIB.BackColor = Color.Lime; // panelFIB.Visible = true; // } // else if(ret==2) // { // btnMILL.BackColor = Color.Lime; // } //} ////Calling Notification for updated status //CZEMApi.Notify += new _EMApiEvents_NotifyEventHandler(CZEMApi_Notify); //CZEMApi.NotifyWithCurrentValue += new _EMApiEvents_NotifyWithCurrentValueEventHandler(CZEMApi_NotifyWithCurrentValue); //加载参数 } #endregion #region 缩放Get private void btnenlargeGet_Click(object sender, EventArgs e) { float ret = iSEM.GetMagnification(); if (float.IsNaN(ret)) { txtenlargeSet.Text = "NaN"; txtenlargeSet.Enabled = false; btnenlargeSet.Enabled = false; } else { txtenlargeSet.Text = ret.ToString(); btnenlargeSet.Enabled = true; } } #endregion #region 缩放Set private void btnenlargeSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtenlargeSet.Text, out set)) { iSEM.SetMagnification(set); } } #endregion #region 焦距Get private void btnWDGet_Click(object sender, EventArgs e) { float ret = iSEM.GetWorkingDistance(); if (float.IsNaN(ret)) { txtWDSet.Text = "NaN"; txtWDSet.Enabled = false; btnWDSet.Enabled = false; } else { txtWDSet.Text = ret.ToString(); btnWDSet.Enabled = true; } } #endregion #region 焦距Set private void btnWDSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtWDSet.Text, out set)) { iSEM.SetWorkingDistance(set); } } #endregion #region 亮度Get private void btnBrightnessGet_Click(object sender, EventArgs e) { float ret = iSEM.GetBrightness(); if (float.IsNaN(ret)) { txtBrightnessSet.Text = "NaN"; txtBrightnessSet.Enabled = false; btnBrightnessSet.Enabled = false; } else { txtBrightnessSet.Text = ret.ToString(); btnBrightnessSet.Enabled = true; } } #endregion #region 亮度Set private void btnBrightnessSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtBrightnessSet.Text, out set)) { iSEM.SetBrightness(set); } } #endregion #region 对比度Get private void btnContrastGet_Click(object sender, EventArgs e) { float ret = iSEM.GetContrast(); if (float.IsNaN(ret)) { txtContrastSet.Text = "NaN"; txtContrastSet.Enabled = false; btnContrastSet.Enabled = false; } else { txtContrastSet.Text = ret.ToString(); btnContrastSet.Enabled = true; } } #endregion #region 对比度Set private void btnContrastSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtContrastSet.Text, out set)) { iSEM.SetContrast(set); } } #endregion #region 消像散X Get private void btnAstigmatismXGet_Click(object sender, EventArgs e) { float ret = iSEM.GetAstigmatismX(); if (float.IsNaN(ret)) { txtAstigmatismXSet.Text = "NaN"; txtAstigmatismXSet.Enabled = false; btnAstigmatismXSet.Enabled = false; } else { txtAstigmatismXSet.Text = ret.ToString(); btnAstigmatismXSet.Enabled = true; } } #endregion #region 消像散X Set private void btnAstigmatismXSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtAstigmatismXSet.Text, out set)) { iSEM.SetAstigmatismX(set); } } #endregion #region 消像散Y Get private void btnAstigmatismYGet_Click(object sender, EventArgs e) { float ret = iSEM.GetAstigmatismY(); if (float.IsNaN(ret)) { txtAstigmatismYSet.Text = "NaN"; txtAstigmatismYSet.Enabled = false; btnAstigmatismYSet.Enabled = false; } else { txtAstigmatismYSet.Text = ret.ToString(); btnAstigmatismYSet.Enabled = true; } } #endregion #region 消像散Y Set private void btnAstigmatismYSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtAstigmatismYSet.Text, out set)) { iSEM.SetAstigmatismY(set); } } #endregion #region 角度补偿Get private void btnTiltAngleGet_Click(object sender, EventArgs e) { float ret = iSEM.GetTiltAngle(); if (float.IsNaN(ret)) { txtTiltAngleSet.Text = "NaN"; txtTiltAngleSet.Enabled = false; btnTiltAngleSet.Enabled = false; } else { txtTiltAngleSet.Text = ret.ToString(); btnTiltAngleSet.Enabled = true; } } #endregion #region 角度补偿Set private void btnTiltAngleSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtTiltAngleSet.Text, out set)) { //iSEM.SetTiltAngleOn(); iSEM.SetTiltAngle(set); } } #endregion #region 抓取图像 private void btnGrabImage_Click(object sender, EventArgs e) { SaveFileDialog sfd = new SaveFileDialog(); sfd.Title = "图像保存位置："; sfd.FileName = "test.tif"; sfd.Filter = "TIF文件|*.tif"; if (sfd.ShowDialog() == DialogResult.OK) { string fn = sfd.FileName; iSEM.GrabImage(fn, 0, 0, 1024, 768, 0); } } #endregion #region ScanRotate Get private void btnScanRotationGet_Click(object sender, EventArgs e) { float ret = iSEM.GetScanRotation(); if (float.IsNaN(ret)) { txtScanRotationSet.Text = "NaN"; txtScanRotationSet.Enabled = false; btnScanRotationSet.Enabled = false; } else { txtScanRotationSet.Text = ret.ToString(); btnScanRotationSet.Enabled = true; } } #endregion #region ScanRotate Set private void btnScanRotationSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtScanRotationSet.Text, out set)) { //iSEM.SetScanRotationOn(); iSEM.SetScanRotation(set); } } #endregion #region PixelSize Get private void btnPixelSizeGet_Click(object sender, EventArgs e) { float ret = iSEM.GetPixelSize(); if (float.IsNaN(ret)) { lblPixelSizeGet.Text = "NaN"; } else { lblPixelSizeGet.Text = ret.ToString(); } } #endregion #region 电子束 private void btnTiltCorrXGet_Click(object sender, EventArgs e) { float ret = iSEM.GetBeamShiftX(); if (float.IsNaN(ret)) { txtTiltCorrX.Text = "NaN"; txtTiltCorrX.Enabled = false; btnTiltCorrXSet.Enabled = false; } else { txtTiltCorrX.Text = ret.ToString(); btnTiltCorrXSet.Enabled = true; } } private void btnTiltCorrXSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtTiltCorrX.Text, out set)) { iSEM.SetBeamShiftX(set); } } private void btnTiltCorrYGet_Click(object sender, EventArgs e) { float ret = iSEM.GetBeamShiftY(); if (float.IsNaN(ret)) { txtTiltCorrY.Text = "NaN"; txtTiltCorrY.Enabled = false; btnTiltCorrYSet.Enabled = false; } else { txtTiltCorrY.Text = ret.ToString(); btnTiltCorrYSet.Enabled = true; } } private void btnTiltCorrYSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtTiltCorrY.Text, out set)) { iSEM.SetBeamShiftY(set); } } #endregion #region 开启电压 private void btnOpenVoltage_Click(object sender, EventArgs e) { iSEM.CmdOpenVoltage(); } #endregion #region 关闭电压 private void btnCloseVoltage_Click(object sender, EventArgs e) { iSEM.CmdCloseVoltage(); } #endregion #region 电子束校正 private void btnTiltCorr_Click(object sender, EventArgs e) { float ret = iSEM.GetTiltCorrection(); if (float.IsNaN(ret)) { btnTiltCorr.BackColor = Color.Red; } else { if(ret==0) { btnTiltCorr.BackColor = Color.Blue; iSEM.SetTiltCorrectionOn(); btnTiltCorr.Text = "电子束状态：On"; } else { btnTiltCorr.BackColor = Color.Lime; iSEM.SetTiltCorrectionOff(); btnTiltCorr.Text = "电子束状态：Off"; } } } #endregion #region 样品台位置获取 private void btnStageGetX_Click(object sender, EventArgs e) { float ret = iSEM.GetStageAtX(); if (float.IsNaN(ret)) { lblStageX.Text = "NaN"; } else { lblStageX.Text = ret.ToString(); } } private void btnStageGetY_Click(object sender, EventArgs e) { float ret = iSEM.GetStageAtY(); if (float.IsNaN(ret)) { lblStageY.Text = "NaN"; } else { lblStageY.Text = ret.ToString(); } } private void btnStageGetZ_Click(object sender, EventArgs e) { float ret = iSEM.GetStageAtZ(); if (float.IsNaN(ret)) { lblStageZ.Text = "NaN"; } else { lblStageZ.Text = ret.ToString(); } } private void btnStageGetT_Click(object sender, EventArgs e) { float ret = iSEM.GetStageAtT(); if (float.IsNaN(ret)) { lblStageT.Text = "NaN"; } else { lblStageT.Text = ret.ToString(); } } private void btnStageGetR_Click(object sender, EventArgs e) { float ret = iSEM.GetStageAtR(); if (float.IsNaN(ret)) { lblStageR.Text = "NaN"; } else { lblStageR.Text = ret.ToString(); } } private void btnStageGetM_Click(object sender, EventArgs e) { float ret = iSEM.GetStageAtM(); if (float.IsNaN(ret)) { lblStageM.Text = "NaN"; } else { lblStageM.Text = ret.ToString(); } } #endregion #region 样品台位置设置 private void btnStageSetX_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtStageX.Text, out set)) { iSEM.SetStageGotoX(set); } } private void btnStageSetY_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtStageY.Text, out set)) { iSEM.SetStageGotoY(set); } } private void btnStageSetZ_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtStageZ.Text, out set)) { iSEM.SetStageGotoZ(set); } } private void btnStageSetT_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtStageT.Text, out set)) { iSEM.SetStageGotoT(set); } } private void btnStageSetR_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtStageR.Text, out set)) { iSEM.SetStageGotoR(set); } } private void btnStageSetM_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtStageM.Text, out set)) { iSEM.SetStageGotoM(set); } } #endregion #region 获取样品台位置数组 private void btnGetStagePosition_Click(object sender, EventArgs e) { float[] pt = iSEM.GetStagePosition(); if (!float.IsNaN(pt[0])) { lblStageX.Text = pt[0].ToString(); } if (!float.IsNaN(pt[1])) { lblStageY.Text = pt[1].ToString(); } if (!float.IsNaN(pt[2])) { lblStageZ.Text = pt[2].ToString(); } if (!float.IsNaN(pt[3])) { lblStageT.Text = pt[3].ToString(); } if (!float.IsNaN(pt[4])) { lblStageR.Text = pt[4].ToString(); } if (!float.IsNaN(pt[5])) { lblStageM.Text = pt[5].ToString(); } } #endregion #region 窗体关闭 private void FormUnitControl_FormClosing(object sender, FormClosingEventArgs e) { if(iSEM!=null) { iSEM.Dispose(); } } #endregion #region 宏文件 private void btnCMDMCF_Click(object sender, EventArgs e) { iSEM.CMDMCFFilename("OPTON"); } #endregion #region 读取Xml文件 private void btnReadXml_Click(object sender, EventArgs e) { MeasureFile mf = new MeasureFile(); XmlDocument doc = new XmlDocument(); doc.Load("test_opton.msf");//载入xml文件 XmlNode root = doc.SelectSingleNode("XMLData"); mf.Serialize(false, doc, root); doc.Save("test_opton.msf"); } #endregion #region 写入Xml文件 private void btnWriteXml_Click(object sender, EventArgs e) { MeasureFile mf = new MeasureFile(); mf.FileName = path + "\\test_opton.msf"; mf.FilePath = path; CutHole ch = new CutHole(); //ch.OPT = Operation.Image; ch.START = System.DateTime.Now; ch.END = System.DateTime.Now.AddHours(2); ch.STATE = State.Success; ch.SWITCH = true; SemPosition sp = new SemPosition(); sp.X = 11; sp.Y = 22; sp.Z = 33; sp.T = 44; sp.R = 55; sp.M = 66; ch.Position = sp; mf.ListCutHole.Add(ch); ch = new CutHole(); //ch.OPT = Operation.Image; ch.START = System.DateTime.Now; ch.END = System.DateTime.Now.AddHours(2); ch.STATE = State.Success; ch.SWITCH = true; sp = new SemPosition(); sp.X = 12; sp.Y = 34; sp.Z = 56; sp.T = 78; sp.R = 90; sp.M = 55; ch.Position = sp; mf.ListCutHole.Add(ch); MeasureParam md = new MeasureParam(); md.SampleType = "aaaaaa"; md.IfPT = true; md.RemotePTOriginalEly = "bbbbb"; md.RemoteFIBOriginalEly = "cccc"; //md.FocusMode = 2; mf.MParam = md; mf.New(); //XmlDocument doc = new XmlDocument(); //doc.Load(mf.FilePath+"\\" + mf.FileName);//载入xml文件 //XmlNode root = doc.SelectSingleNode("XMLData"); //mf.Serialize(true, doc, root); //doc.Save("test.aaa"); } #endregion #region SEM模式 private void btnSEM_Click(object sender, EventArgs e) { if(iSEM.CmdFIBModeSEM()) { btnFIB.BackColor = SystemColors.Control; btnSEM.BackColor = Color.Lime; btnMILL.BackColor = SystemColors.Control; panelFIB.Visible = false; } } #endregion #region FIB模式 private void btnFIB_Click(object sender, EventArgs e) { if(iSEM.CmdFIBModeFIB()) { btnFIB.BackColor = Color.Lime; btnSEM.BackColor = SystemColors.Control; btnMILL.BackColor = SystemColors.Control; panelFIB.Visible = true; } } #endregion #region MILL模式 private void btnMILL_Click(object sender, EventArgs e) { if(iSEM.CmdFIBModeMILL()) { btnFIB.BackColor = SystemColors.Control; btnSEM.BackColor = SystemColors.Control; btnMILL.BackColor = Color.Lime; } } #endregion #region 自动对焦1 private void btnAutoFocus1_Click(object sender, EventArgs e) { //抓图1 iSEM.GrabImage(path + "\\test1.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test1.tif")) { FileStream fileStream = new FileStream(path + "\\test1.tif", FileMode.Open, FileAccess.Read); pictureBox1.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } Thread.Sleep(1000); iSEM.CmdAutoFocusCoarse(); btnAutoFocus1.BackColor = Color.Red; st_flag = 1; Thread.Sleep(1000); Thread thread = new Thread(AutoFunction); thread.Start(); } #endregion #region 自动函数监测线程 private void AutoFunction() { float ret = 111; Boolean state = false; while(true) { Thread.Sleep(1000); ret = iSEM.GetAutoFunction(); if(ret==0) { if (st_flag == 1 && state == true) { btnAutoFocus1.BackColor = Color.Lime; Thread.Sleep(1000); //抓图1 iSEM.GrabImage(path + "\\test2.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test2.tif")) { FileStream fileStream = new FileStream(path + "\\test2.tif", FileMode.Open, FileAccess.Read); pictureBox2.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } break; } else if(st_flag==2 && state) { btnAutoFocus2.BackColor = Color.Lime; Thread.Sleep(1000); //抓图1 iSEM.GrabImage(path + "\\test2.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test2.tif")) { FileStream fileStream = new FileStream(path + "\\test2.tif", FileMode.Open, FileAccess.Read); pictureBox2.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } break; } else if (st_flag == 3) { btnAutoBrightness.BackColor = Color.Lime; Thread.Sleep(1000); //抓图1 iSEM.GrabImage(path + "\\test2.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test2.tif")) { FileStream fileStream = new FileStream(path + "\\test2.tif", FileMode.Open, FileAccess.Read); pictureBox2.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } break; } else if (st_flag == 4) { btnAutoContrast.BackColor = Color.Lime; Thread.Sleep(1000); //抓图1 iSEM.GrabImage(path + "\\test2.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test2.tif")) { FileStream fileStream = new FileStream(path + "\\test2.tif", FileMode.Open, FileAccess.Read); pictureBox2.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } break; } else if (st_flag == 5) { btnAutoBrightness.BackColor = Color.Lime; btnAutoContrast.BackColor = Color.Lime; btnAutoBC.BackColor = Color.Lime; Thread.Sleep(1000); //抓图1 iSEM.GrabImage(path + "\\test2.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test2.tif")) { FileStream fileStream = new FileStream(path + "\\test2.tif", FileMode.Open, FileAccess.Read); pictureBox2.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } break; } else if (st_flag == 6 && state) { btnAutoBCCancle.BackColor = Color.Lime; Thread.Sleep(1000); //抓图1 iSEM.GrabImage(path + "\\test2.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test2.tif")) { FileStream fileStream = new FileStream(path + "\\test2.tif", FileMode.Open, FileAccess.Read); pictureBox2.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } break; } else if (st_flag == 7 && state) { btnAutoStig.BackColor = Color.Lime; Thread.Sleep(1000); //抓图1 iSEM.GrabImage(path + "\\test2.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test2.tif")) { FileStream fileStream = new FileStream(path + "\\test2.tif", FileMode.Open, FileAccess.Read); pictureBox2.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } break; } ////抓图1 //iSEM.GrabImage(path + "\\test2.tif", 0, 0, 1024, 768, 0); //if (File.Exists(path + "\\test2.tif")) //{ // FileStream fileStream = new FileStream(path + "\\test2.tif", FileMode.Open, FileAccess.Read); // pictureBox2.Image = Image.FromStream(fileStream); // fileStream.Close(); // fileStream.Dispose(); //} } else if(ret>0 && ret<12) { state = true; } } } #endregion #region 自动对焦2 private void btnAutoFocus2_Click(object sender, EventArgs e) { //抓图1 iSEM.GrabImage(path + "\\test1.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test1.tif")) { FileStream fileStream = new FileStream(path + "\\test1.tif", FileMode.Open, FileAccess.Read); pictureBox1.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } Thread.Sleep(1000); iSEM.CmdAutoFocusFine(); btnAutoFocus2.BackColor = Color.Red; st_flag = 2; Thread.Sleep(1000); Thread thread = new Thread(AutoFunction); thread.Start(); } #endregion #region 自动亮度、对比度 private void btnAutoBrightness_Click(object sender, EventArgs e) { //抓图1 iSEM.GrabImage(path + "\\test1.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test1.tif")) { FileStream fileStream = new FileStream(path + "\\test1.tif", FileMode.Open, FileAccess.Read); pictureBox1.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } Thread.Sleep(1000); iSEM.SetAutoVideoBrightness(); btnAutoBrightness.BackColor = Color.Red; st_flag = 3; Thread.Sleep(1000); Thread thread = new Thread(AutoFunction); thread.Start(); } private void btnAutoContrast_Click(object sender, EventArgs e) { //抓图1 iSEM.GrabImage(path + "\\test1.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test1.tif")) { FileStream fileStream = new FileStream(path + "\\test1.tif", FileMode.Open, FileAccess.Read); pictureBox1.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } Thread.Sleep(1000); iSEM.SetAutoVideoContrast(); btnAutoContrast.BackColor = Color.Red; st_flag = 4; Thread.Sleep(1000); Thread thread = new Thread(AutoFunction); thread.Start(); } private void btnAutoBC_Click(object sender, EventArgs e) { //抓图1 iSEM.GrabImage(path + "\\test1.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test1.tif")) { FileStream fileStream = new FileStream(path + "\\test1.tif", FileMode.Open, FileAccess.Read); pictureBox1.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } Thread.Sleep(1000); iSEM.SetAutoVideoBrightnessAndContrast(); btnAutoBrightness.BackColor = Color.Red; btnAutoContrast.BackColor = Color.Red; btnAutoBC.BackColor = Color.Red; st_flag = 5; Thread.Sleep(1000); Thread thread = new Thread(AutoFunction); thread.Start(); } private void btnAutoBCCancle_Click(object sender, EventArgs e) { iSEM.SetAutoVideoOff(); btnAutoBCCancle.BackColor = Color.Red; st_flag = 6; Thread.Sleep(1000); Thread thread = new Thread(AutoFunction); thread.Start(); } #endregion #region 自动消像散 private void btnAutoStig_Click(object sender, EventArgs e) { //抓图1 iSEM.GrabImage(path + "\\test1.tif", 0, 0, 1024, 768, 0); if (File.Exists(path + "\\test1.tif")) { FileStream fileStream = new FileStream(path + "\\test1.tif", FileMode.Open, FileAccess.Read); pictureBox1.Image = Image.FromStream(fileStream); fileStream.Close(); fileStream.Dispose(); } Thread.Sleep(1000); iSEM.CmdAutoStig(); btnAutoStig.BackColor = Color.Red; st_flag = 7; Thread.Sleep(1000); Thread thread = new Thread(AutoFunction); thread.Start(); } #endregion #region FIB缩放Get private void btnFIBMagGet_Click(object sender, EventArgs e) { float ret = iSEM.GetFIBMagnification(); if (float.IsNaN(ret)) { txtFIBMag.Text = "NaN"; txtFIBMag.Enabled = false; btnFIBMagSet.Enabled = false; } else { txtFIBMag.Text = ret.ToString(); btnFIBMagSet.Enabled = true; } } #endregion #region FIB缩放Set private void btnFIBMagSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtFIBMag.Text, out set)) { iSEM.SetFIBMagnification(set); } } #endregion #region FIB焦距Get private void btnFIBWDGet_Click(object sender, EventArgs e) { float ret = iSEM.GetFIBObjectivePotential(); if (float.IsNaN(ret)) { txtFIBWD.Text = "NaN"; txtFIBWD.Enabled = false; btnFIBWDSet.Enabled = false; } else { txtFIBWD.Text = ret.ToString(); btnFIBWDSet.Enabled = true; } } #endregion #region FIB焦距Set private void btnFIBWDSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtFIBWD.Text, out set)) { iSEM.SetFIBObjectivePotential(set); } } #endregion #region FIB电子束移动 private void btnFIBBeamShiftXGet_Click(object sender, EventArgs e) { float ret = iSEM.GetFIBBeamShiftX(); if (float.IsNaN(ret)) { txtFIBBeamShiftX.Text = "NaN"; txtFIBBeamShiftX.Enabled = false; btnFIBBeamShiftXSet.Enabled = false; } else { txtFIBBeamShiftX.Text = ret.ToString(); btnFIBBeamShiftXSet.Enabled = true; } } private void btnFIBBeamShiftXSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtFIBBeamShiftX.Text, out set)) { iSEM.SetFIBBeamShiftX(set); } } private void btnFIBBeamShiftYGet_Click(object sender, EventArgs e) { float ret = iSEM.GetFIBBeamShiftY(); if (float.IsNaN(ret)) { txtFIBBeamShiftY.Text = "NaN"; txtFIBBeamShiftY.Enabled = false; btnFIBBeamShiftYSet.Enabled = false; } else { txtFIBBeamShiftY.Text = ret.ToString(); btnFIBBeamShiftYSet.Enabled = true; } } private void btnFIBBeamShiftYSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtFIBBeamShiftY.Text, out set)) { iSEM.SetFIBBeamShiftY(set); } } #endregion #region 执行宏文件 private void btnMCF_Click(object sender, EventArgs e) { OpenFileDialog sfd = new OpenFileDialog(); sfd.Title = "选择宏文件："; sfd.InitialDirectory = @"C:\ProgramData\Carl Zeiss\SmartSEM\User\Default"; sfd.Filter = "MLF文件|*.MLF"; if (sfd.ShowDialog() == DialogResult.OK) { //string fn = Path.GetFileNameWithoutExtension(sfd.FileName).ToUpper(); iSEM.SetRemoteDesMLFPath(@"\\192.168.1.197\wq\"); iSEM.CMDMCFFilename(sfd.FileName); } } #endregion #region FIB消像散 private void btnFIBAstigmatismXGet_Click(object sender, EventArgs e) { float ret = iSEM.GetFIBAstigmatismX(); if (float.IsNaN(ret)) { txtFIBAstigmatismX.Text = "NaN"; txtFIBAstigmatismX.Enabled = false; btnFIBAstigmatismXSet.Enabled = false; } else { txtFIBAstigmatismX.Text = ret.ToString(); btnFIBAstigmatismXSet.Enabled = true; } } private void btnFIBAstigmatismXSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtFIBAstigmatismX.Text, out set)) { iSEM.SetFIBAstigmatismX(set); } } private void btnFIBAstigmatismYGet_Click(object sender, EventArgs e) { float ret = iSEM.GetFIBAstigmatismY(); if (float.IsNaN(ret)) { txtFIBAstigmatismY.Text = "NaN"; txtFIBAstigmatismY.Enabled = false; btnFIBAstigmatismYSet.Enabled = false; } else { txtFIBAstigmatismY.Text = ret.ToString(); btnFIBAstigmatismYSet.Enabled = true; } } private void btnFIBAstigmatismYSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtFIBAstigmatismY.Text, out set)) { iSEM.SetFIBAstigmatismY(set); } } #endregion #region 移动样品台XY private void btnMoveXY_Click(object sender, EventArgs e) { float setx = 0; float sety = 0; if (!float.TryParse(txtStageX.Text, out setx)) { return; } if(!float.TryParse(txtStageY.Text,out sety)) { return; } btnMoveXY.BackColor = Color.Red; iSEM.MoveStageXY(setx, sety); Thread.Sleep(500); Thread th = new Thread(MoveStagexy); th.Start(); } private void MoveStagexy() { float ret = 111; while(true) { ret = iSEM.GetStageIs(); if(ret==0) { btnMoveXY.BackColor = Color.Lime; break; } } } #endregion #region 获取分辨率 private void btnImageStoreGet_Click(object sender, EventArgs e) { int[] ret = iSEM.GetImageStore(); lblImageStore.Text = ret[0].ToString() + "*" + ret[1].ToString(); } #endregion #region 设置分辨率 private void btnImageStoreSet_Click(object sender, EventArgs e) { if (cmbImageStore.SelectedIndex > -1 && cmbImageStore.SelectedIndex < 12) { iSEM.SetImageStore(cmbImageStore.SelectedIndex); } } #endregion #region 样品台急停 private void btnAbort_Click(object sender, EventArgs e) { iSEM.CmdStageAbort(); } #endregion private void btnLive_Click(object sender, EventArgs e) { iSEM.ImageLive(); } private void btnFrozen_Click(object sender, EventArgs e) { iSEM.ImageFrozen(); } private void btnExeEly_Click(object sender, EventArgs e) { OpenFileDialog sfd = new OpenFileDialog(); sfd.Title = "选择ELY文件："; //sfd.InitialDirectory = @"C:\ProgramData\Carl Zeiss\SmartSEM\User\Default"; sfd.Filter = "ELY文件|*.ELY"; if (sfd.ShowDialog() == DialogResult.OK) { iSEM.SetRemoteDesELYPath(@"\\192.168.1.197\wq\"); iSEM.CmdFIBLoadELY(sfd.FileName); } } private void btnExeEly2_Click(object sender, EventArgs e) { iSEM.CmdFIBEXPOSUREELY(); } private void btnFIBStatus_Click(object sender, EventArgs e) { btnFIBStatus.Text = iSEM.GetFIBMode().ToString(); } private void btnPost1_Click(object sender, EventArgs e) { float degree = 0; int direction = 0; int state = 0; wr.Img_OffsetAngle_Direction(txtaddr.Text,Convert.ToInt32(txtTypee.Text),txtfirm.Text, out degree, out direction, out state); lbldegree1.Text = degree.ToString("0.0"); lbldirection1.Text = direction.ToString(); lblstate1.Text = state.ToString(); } private void btnPost2_Click(object sender, EventArgs e) { float offsetx1 = 0; float offsety1 = 0; float offsetx2 = 0; float offsety2 = 0; int state = 0; wr.Img_Cut_Position(txtaddr.Text, Convert.ToInt32(txtTypee.Text), txtfirm.Text, out offsetx1, out offsety1, out offsetx2, out offsety2, out state); lbllocationx1.Text = offsetx1.ToString("0.0"); lbllocationy1.Text = offsety1.ToString("0.0"); lbllocationx2.Text = offsetx2.ToString("0.0"); lbllocationy2.Text = offsety2.ToString("0.0"); lblstate2.Text = state.ToString(); } private void btnPost3_Click(object sender, EventArgs e) { int state = 0; wr.Img_Cut_Success(txtaddr.Text, txtaddr2.Text, out state); lblstate3.Text = state.ToString(); } private void btnPost4_Click(object sender, EventArgs e) { float offsetx = 0; float offsety = 0; int state = 0; //wr.Img_Trapezoid_Top_Center_Position(txtaddr.Text, out offsetx, out offsety, out state); lbltopcx.Text = offsetx.ToString("0.0"); lbltopcy.Text = offsety.ToString("0.0"); lblstate4.Text = state.ToString(); } private void btnPost5_Click(object sender, EventArgs e) { List filenames = new List(); filenames.Add("1111111"); filenames.Add("2222222"); filenames.Add("3333333"); lblfocuspath.Text = wr.Img_Auto_Focus(filenames); } private void btnPost6_Click(object sender, EventArgs e) { List filenames = new List(); filenames.Add("1111111"); filenames.Add("2222222"); filenames.Add("3333333"); lblstigpath.Text = wr.Img_Auto_Focus(filenames); } private void btnPost7_Click(object sender, EventArgs e) { float degree = 0; int direction = 0; int state = 0; wr.Img_Center_Position_OffsetAngle_Direction(txtaddr.Text, Convert.ToInt32(txtTypee.Text), txtfirm.Text, out degree, out direction, out state); //lblcenterx.Text = offsetx.ToString("0.0"); //lblcentery.Text = offsety.ToString("0.0"); lbldegree2.Text = degree.ToString(); lbldirection2.Text = direction.ToString(); lblstate7.Text = state.ToString(); } private void btnPost9_Click(object sender, EventArgs e) { int state = 0; wr.Img_Measure_Size(txtaddr.Text, txtaddr2.Text,0.000001f,0.000002f,"D:\\", Convert.ToInt32(txtTypee.Text), txtfirm.Text,out state); lblstate9.Text = state.ToString(); } private void btnScanRotationSetLock_Click(object sender, EventArgs e) { iSEM.SetScanRotationOff(); } private void button1_Click_1(object sender, EventArgs e) { iSEM.SetTiltAngleOff(); } private void btnTiltAngleSetOn_Click(object sender, EventArgs e) { iSEM.SetTiltAngleOn(); } private void btnScanRotationSetOn_Click(object sender, EventArgs e) { iSEM.SetScanRotationOn(); } private void btnExeEly3_Click(object sender, EventArgs e) { iSEM.CmdFIBSTARTELY(); } private void btnCreateConfig_Click(object sender, EventArgs e) { MeasureParam cfm = new MeasureParam(); cfm.IsShotSectionToRun = chkWIsP.Checked; cfm.IfPT = chkWPT.Checked; cfm.RemotePTOriginalEly = txtWPTF.Text; cfm.RemoteFIBOriginalEly = txtWFIBF.Text; cfm.Straighten_Magnification = Convert.ToSingle(cbbWLZ.Text); cfm.Location_Magnification = Convert.ToSingle(cbbWQGF.Text); cfm.Voltage = Convert.ToSingle(cbbWQGD.Text); cfm.Photograph_Magnification = Convert.ToSingle(cbbWPZF.Text); cfm.Photograph_Voltage = Convert.ToSingle(cbbWPZD.Text); //if(cbbWXZ.SelectedIndex==0) //{ // cfm.Correction_Angle = 36; //} //else //{ // cfm.Correction_Angle = 54; //} cfm.SampleType = cbbWYP.Text; cfm.Firm = cbbWCS.Text; ConfigFile cf = new ConfigFile(cfm); cf.Save(@"E:\test.cfg"); List _sT = sT.ToList(); if(_sT.IndexOf(cbbWYP.Text)<0) { _sT.Add(cbbWYP.Text); sT = _sT.ToArray(); string wsT = ""; for(int i=0;i _firms = firms.ToList(); if (_firms.IndexOf(cbbWCS.Text) < 0) { _firms.Add(cbbWCS.Text); firms = _firms.ToArray(); string wFirms = ""; for (int i = 0; i < firms.Length; i++) { wFirms += firms[i] + ","; } wFirms = wFirms.Substring(0, wFirms.Length - 1); config.AppSettings.Settings["Firm"].Value = wFirms; } config.Save(ConfigurationSaveMode.Modified); ConfigurationManager.RefreshSection("appSettings");//重新加载新的配置文件 reloadconfig(); } private void btnReadConfig_Click(object sender, EventArgs e) { MeasureParam cfm = new MeasureParam(); ConfigFile cf = new ConfigFile(cfm); cf.Read(@"E:\test.cfg"); chkRIsP.Checked = cfm.IsShotSectionToRun; chkRPT.Checked = cfm.IfPT; txtRPTF.Text = cfm.RemotePTOriginalEly; txtRFIBF.Text = cfm.RemoteFIBOriginalEly; txtRLZ.Text = cfm.Straighten_Magnification.ToString(); txtRQGF.Text = cfm.Location_Magnification.ToString(); txtRQGD.Text = cfm.Voltage.ToString(); txtRPZF.Text = cfm.Photograph_Magnification.ToString(); txtRPZD.Text = cfm.Photograph_Voltage.ToString(); //txtRXZ.Text = cfm.Correction_Angle.ToString(); txtRYP.Text = cfm.SampleType; txtRCS.Text = cfm.Firm; } private void FormUnitControl_Load(object sender, EventArgs e) { reloadconfig(); cbbWYP.SelectedIndex = 0; cbbWCS.SelectedIndex = 0; cbbWXZ.SelectedIndex = 0; this.chart1.Series[0].Points.Clear(); } private void reloadconfig() { String sample_Type = ConfigurationManager.AppSettings["Sample_Type"]; String firm = ConfigurationManager.AppSettings["Firm"]; sT = sample_Type.Split(','); cbbWYP.Items.Clear(); for (int i = 0; i < sT.Length; i++) { cbbWYP.Items.Add(sT[i]); } firms = firm.Split(','); cbbWCS.Items.Clear(); for (int i = 0; i < firms.Length; i++) { cbbWCS.Items.Add(firms[i]); } } private void btnPsFile_Click(object sender, EventArgs e) { OpenFileDialog sfd = new OpenFileDialog(); sfd.Title = "选择位置文件："; //sfd.InitialDirectory = @"C:\ProgramData\Carl Zeiss\SmartSEM\User\Default"; sfd.Filter = "TXT文件|*.TXT"; if (sfd.ShowDialog() == DialogResult.OK) { //Console.WriteLine(sfd.FileName); StreamReader sr = new StreamReader(sfd.FileName, Encoding.Default); String line = ""; sr.ReadLine(); sr.ReadLine(); sr.ReadLine(); sr.ReadLine(); line = sr.ReadLine(); sr.Close(); sr.Dispose(); String[] lines = line.Split(','); double x = Convert.ToDouble(lines[1]); double y = Convert.ToDouble(lines[2]); chart1.Series[0].Points.AddXY(x, y); chart1.Series[0].Points[0].Label = x.ToString("0.000") + "," + y.ToString("0.000"); } } private void btnrect_Click(object sender, EventArgs e) { this.chart1.Series[0].Points.Clear(); List xpoints = new List(); List ypoints = new List(); //排列数 int rag = Convert.ToInt32(txtarray.Text); //间距 float dist = Convert.ToSingle(txtdistance.Text); //中心点x,y轴坐标 float cx = Convert.ToSingle(txtx.Text); float cy = Convert.ToSingle(txty.Text); //所有点集合 List ptfs = new List(); ptfs = AnalysisPosition(cx, cy, Convert.ToSingle(txtsample1x.Text), Convert.ToSingle(txtsample1y.Text), dist, rag); for(int i=0;i0) // { // tx = dist * j * Math.Sin(angle); // ty = dist * j * Math.Cos(angle); // xpoints.Add(tx + xpoints[0]); // ypoints.Add(ypoints[0] - ty); // chart1.Series[0].Points.AddXY(xpoints[xpoints.Count-1], ypoints[ypoints.Count-1]); // chart1.Series[0].Points[chart1.Series[0].Points.Count - 1].Label = xpoints[xpoints.Count - 1].ToString("0.000") + "," + ypoints[ypoints.Count - 1].ToString("0.000"); // } // //计算每行其他点的坐标 // for (int i = 1; i < rag; i++) // { // tx = dist * i * Math.Cos(angle); // ty = dist * i * Math.Sin(angle); // xpoints.Add(tx + xpoints[j * rag]); // ypoints.Add(ty + ypoints[j * rag]); // chart1.Series[0].Points.AddXY(xpoints[xpoints.Count - 1], ypoints[ypoints.Count - 1]); // chart1.Series[0].Points[chart1.Series[0].Points.Count - 1].Label = xpoints[xpoints.Count - 1].ToString("0.000") + "," + ypoints[ypoints.Count - 1].ToString("0.000"); // } //} } /// /// 分析点坐标 /// /// 中心点X轴坐标 /// 中心点Y轴坐标 /// 第一个点X轴坐标 /// 第一个点Y轴坐标 /// 点与点的距离 /// 行、列数 /// 计算生成所有X轴坐标 /// 计算生成所有Y轴坐标 public List AnalysisPosition(float centerX, float centerY, float firstX, float firstY, float distance, int rag) { //求样品1的水平角度 double angle = 0; //清空所有点信息 List ptsx = new List(); List ptsy = new List(); //将第一个点加入到点信息中 ptsx.Add(firstX); ptsy.Add(firstY); //计算第一个点与X轴的交角度数 angle = Math.Atan2(ptsy[0] - centerY, centerX - ptsx[0]) * 180 / Math.PI; //这里是求与第一个点横向排列的其他点的移动角度 //就是按45度向左向右移动的度 angle = 45 - angle; angle = angle * Math.PI / 180; float tx = 0; float ty = 0; for (int j = 0; j < rag; j++) { //计算每行第一个点的坐标 if (j > 0) { tx = (float)(distance * j * Math.Sin(angle)); ty = (float)(distance * j * Math.Cos(angle)); ptsx.Add(tx + ptsx[0]); ptsy.Add(ptsy[0] - ty); } //计算每行其他点的坐标 for (int i = 1; i < rag; i++) { tx = (float)(distance * i * Math.Cos(angle)); ty = (float)(distance * i * Math.Sin(angle)); ptsx.Add(tx + ptsx[j * rag]); ptsy.Add(ty + ptsy[j * rag]); } } List pts = new List(); for (int i = 0; i < ptsx.Count; i++) { //增加的点 PointF pf = new PointF(); pf.X = ptsx[i]; pf.Y = ptsy[i]; pts.Add(pf); } return pts; } private void btn30_Click(object sender, EventArgs e) { txtsample1x.Text = "21.7"; txtsample1y.Text = "90"; btnrect_Click(null, null); } private void btn45_Click(object sender, EventArgs e) { txtsample1x.Text = "29.65"; txtsample1y.Text = "100.35"; btnrect_Click(null, null); } private void btn60_Click(object sender, EventArgs e) { txtsample1x.Text = "40"; txtsample1y.Text = "108.3"; btnrect_Click(null, null); } private void button2_Click(object sender, EventArgs e) { float ret = iSEM.GetSEMVoltage(); if (float.IsNaN(ret)) { txtVoltage.Text = "NaN"; txtVoltage.Enabled = false; button2.Enabled = false; } else { txtVoltage.Text = ret.ToString(); button2.Enabled = true; } } private void button1_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtVoltage.Text, out set)) { iSEM.SetSEMVoltage(set); } } /// 图像拉直算法 /// /// 倾斜角度 /// 圆心坐标x /// 圆心坐标y /// 倾斜情况下帧图的坐标x /// 倾斜情况下帧图的坐标y /// 复位到原位置需要移动的x值(返回值) /// 复位到原位置需要移动的y值(返回值) /// public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy) { try { float xr = x1 - x0;//倾斜图到中心的距离差x float yr = y1 - y0;//倾斜图到中心的距离差y float R =(float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度 //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度 float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度 float k_S = k - Slope;//通过夹角差求x2,y2 //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R); //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R); float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R); float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R); if (Slope > 0 || Slope < 0) { Hx = x0 + x2; Hy = y0 + y2; } else { Hx = 0; Hy = 0; } return true; } catch (Exception) { return false; } } private void button3_Click(object sender, EventArgs e) { float x1 = 0, y1 = 0; Straightening(45, 48.156f, 49.968f, (float)31.679, (float)58.870, ref x1, ref y1); button3.Text = x1.ToString("0.00") + "\n" + y1.ToString("0.00"); } private void btntest_Click(object sender, EventArgs e) { //FileStream fs = new FileStream(txtaddr.Text, FileMode.Create, FileAccess.Write); //StreamWriter sw = new StreamWriter(fs); //sw.WriteLine("aaaa"); //sw.Close(); //sw.Dispose(); //fs.Close(); //fs.Dispose(); File.Copy(txtaddr2.Text, txtaddr.Text, true); } private void button4_Click(object sender, EventArgs e) { iSEM.SetWorkingDistance(0.006f); Thread.Sleep(8000); iSEM.GrabImage("D:\\HOZ1.0\\6.tif", 0, 0, 1024, 768, 0); Thread.Sleep(3000); iSEM.SetWorkingDistance(0.007f); Thread.Sleep(8000); iSEM.GrabImage("D:\\HOZ1.0\\7.tif", 0, 0, 1024, 768, 0); Thread.Sleep(3000); iSEM.SetWorkingDistance(0.0073f); Thread.Sleep(8000); iSEM.GrabImage("D:\\HOZ1.0\\73.tif", 0, 0, 1024, 768, 0); Thread.Sleep(3000); } //移动到像素位置 bool MoveToPix(float sx,float sy,float xc, float yc,float ps,out float nx,out float ny) { int width = 1024/2; int height = 768/2; float deltX = (xc - (float)width) * ps; float deltY = (yc - (float)height) * ps; float xpCur = sx; float ypCur = sy; float xpNew = xpCur - deltX; float ypNew = ypCur - deltY; nx = xpNew; ny = ypNew; //if (deltX > 10)//使用移动样品台实现 //{ // if (!iSEM.SetStageGotoX(xpNew)) // { // return false; // } // //判断是否移动完成 // while (true) // { // Thread.Sleep(5000); // if (iSEM.GetStageIs() == 0) // { // break; // } // } // //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败"; // //arg.State = true; // //SendMsg("1-7"); //} //else//使用移动光束实现 //{ // float beamX = deltX * (float)0.66; // if (!iSEM.SetBeamShiftX(beamX)) // { // return false; // } //} //if (deltY > 10)//使用移动样品台实现 //{ // if (!iSEM.SetStageGotoY(ypNew)) // { // return false; // } // //判断是否移动完成 // while (true) // { // Thread.Sleep(5000); // if (iSEM.GetStageIs() == 0) // { // break; // } // } //} //else//使用移动光束实现 //{ // float beamY = deltY * (float)0.671; // if (!iSEM.SetBeamShiftY(beamY)) // { // return false; // } //} return true; } private void btnimgv_Click(object sender, EventArgs e) { float sx = 0, sy = 0; float x1 = 0, y1 = 0; float nx = 0, ny = 0; float ps = 0; sx = Convert.ToSingle(txtstagenx.Text); sy = Convert.ToSingle(txtstageny.Text); x1 = Convert.ToSingle(txtimgx.Text); y1 = Convert.ToSingle(txtimgy.Text); ps = Convert.ToSingle(txtps.Text); MoveToPix(sx,sy,x1, y1, ps,out nx,out ny); txtstagevx.Text = nx.ToString("0.000000"); txtstagevy.Text = ny.ToString("0.000000"); } private void btnPost8_Click(object sender, EventArgs e) { System.Drawing.Point pt1, pt2, pt3; float mag1 = 0, mag2 = 0; int state = 0; wr.Img_Two_Region_Position(txtaddr.Text, Convert.ToInt32(txtTypee.Text), txtfirm.Text, out pt1, out mag1, out pt2, out mag2, out pt3, out state); if(state==1) { lblcenter1.Text = pt1.X.ToString() + "," + pt1.Y.ToString(); lblcenter2.Text = pt2.X.ToString() + "," + pt2.Y.ToString(); lblMag1.Text = mag1.ToString(); lblMag2.Text = mag2.ToString(); lblstate8.Text = state.ToString(); } else { lblstate8.Text = "0"; lblcenter1.Text = ""; lblcenter2.Text = ""; lblMag1.Text = ""; lblMag2.Text = ""; } } private void button5_Click(object sender, EventArgs e) { XmlDocument xmlDoc = new XmlDocument(); xmlDoc.Load(@"E:\HOZ\test3.ely");//加载baixml文件，xmlpath 为XML文件的路径du XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID"); if (xns != null) { XmlAttributeCollection attributeCol = xns.Attributes; //遍历自己点属性 foreach (XmlAttribute attri in attributeCol) { if (attri.Name == "x") { attri.InnerText = "123"; } else if (attri.Name == "y") { attri.InnerText = "321"; } ////获取每个节点属性的key,value值 //string name = attri.Name; //string value = attri.Value; //Console.WriteLine("{0}={1}", name, value); } } xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT"); if (xns != null) { XmlAttributeCollection attributeCol = xns.Attributes; //遍历自己点属性 foreach (XmlAttribute attri in attributeCol) { if (attri.Name == "x") { attri.InnerText = "123"; } else if (attri.Name == "y") { attri.InnerText = "323"; } ////获取每个节点属性的key,value值 //string name = attri.Name; //string value = attri.Value; //Console.WriteLine("{0}={1}", name, value); } } xmlDoc.Save(@"E:\HOZ\test3.ely");//保存的该XML文件,否则更新无效 xmlDoc = new XmlDocument(); xmlDoc.Load(@"E:\HOZ\test2.ely");//加载baixml文件，xmlpath 为XML文件的路径du xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT"); if (xns != null) { XmlAttributeCollection attributeCol = xns.Attributes; //遍历自己点属性 foreach (XmlAttribute attri in attributeCol) { if (attri.Name == "x") { attri.InnerText = "123"; } else if (attri.Name == "y") { attri.InnerText = "321"; } ////获取每个节点属性的key,value值 //string name = attri.Name; //string value = attri.Value; //Console.WriteLine("{0}={1}", name, value); } } xmlDoc.Save(@"E:\HOZ\test2.ely");//保存的该XML文件,否则更新无效 } private void button6_Click(object sender, EventArgs e) { int x1, x2, y1, y2; x1 = Convert.ToInt32(textBox1.Text); y1 = Convert.ToInt32(textBox2.Text); x2 = x1 - (1024 / 2); y2 = (768 / 2) - y1; button6.Text=x2.ToString() + "," + y2.ToString(); } private void btnDRSet_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtDRSet.Text, out set)) { iSEM.SetStageDeltaR(set); } } private void btnDeltaR_Click(object sender, EventArgs e) { float set = 0; if (float.TryParse(txtDRSet.Text, out set)) { iSEM.SetStageDeltaR(set); } } private void button9_Click(object sender, EventArgs e) { OpenFileDialog sfd = new OpenFileDialog(); sfd.Title = "选择ELY文件："; //sfd.InitialDirectory = @"C:\ProgramData\Carl Zeiss\SmartSEM\User\Default"; sfd.Filter = "ELY文件|*.ELY"; if (sfd.ShowDialog() == DialogResult.OK) { double x1 = 0, y1 = 0, x2 = 0, y2 = 0; x1 = Convert.ToDouble(txtelyx.Text); y1 = Convert.ToDouble(txtelyy.Text); x2 = x1 - 512; y2 = 384 - y1; float px = iSEM.GetPixelSize(); XmlDocument xmlDoc = new XmlDocument(); xmlDoc.Load(sfd.FileName);//加载baixml文件，xmlpath 为XML文件的路径du XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID"); if (xns != null) { XmlAttributeCollection attributeCol = xns.Attributes; //遍历自己点属性 foreach (XmlAttribute attri in attributeCol) { if (attri.Name == "x") { attri.InnerText = ((x2 * px) * 1000000).ToString(); } else if (attri.Name == "y") { attri.InnerText = ((y2 * px) * 1000000).ToString(); } ////获取每个节点属性的key,value值 //string name = attri.Name; //string value = attri.Value; //Console.WriteLine("{0}={1}", name, value); } } xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT"); if (xns != null) { XmlAttributeCollection attributeCol = xns.Attributes; //遍历自己点属性 foreach (XmlAttribute attri in attributeCol) { if (attri.Name == "x") { attri.InnerText = ((x2 * px) * 1000000).ToString(); } else if (attri.Name == "y") { attri.InnerText = ((y2 * px) * 1000000 + 2).ToString(); } ////获取每个节点属性的key,value值 //string name = attri.Name; //string value = attri.Value; //Console.WriteLine("{0}={1}", name, value); } } xmlDoc.Save(sfd.FileName);//保存的该XML文件,否则更新无效 iSEM.CmdFIBLoadELY(sfd.FileName); } } //移动到像素位置 bool MoveToPix(float xc, float yc) { //单位是m/pix float pixSize = iSEM.GetPixelSize(); LogManager.AddHardwareLog("像素尺寸=" + pixSize.ToString() + "m/pixel", true); Thread.Sleep(500); //0:width, 1:height int[] imageSize = iSEM.GetImageStore(); int width = imageSize[0] / 2; int height = imageSize[1] / 2; LogManager.AddHardwareLog("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true); LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true); float deltX = (xc - (float)width) * pixSize; float deltY = (yc - (float)height) * pixSize; LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true); LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true); float xpCur = iSEM.GetStageAtX(); float ypCur = iSEM.GetStageAtY(); LogManager.AddHardwareLog("当前位置（" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true); float xpNew = xpCur - deltX; float ypNew = ypCur + deltY; LogManager.AddHardwareLog("目标位置（" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true); //计算最大偏移量 float beamXCur = iSEM.GetBeamShiftX();//单位是% iSEM.SetBeamShiftX(100); float beamXMax = iSEM.GetBeamOffsetX();//单位是m iSEM.SetBeamShiftX(beamXCur); //计算光束偏移值： float beamX = iSEM.GetBeamOffsetX(); LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true); beamX = (-deltX + beamX); LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true); if (beamX < beamXMax || beamX < -beamXMax) { LogManager.AddHardwareLog("X方向移动光束", true); float beamXShift = beamX * 100 / beamXMax; if (!iSEM.SetBeamShiftX(beamXShift)) { LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true); return false; } } else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现 { LogManager.AddHardwareLog("X方向移动样品台", true); if (!iSEM.SetStageGotoX(xpNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } } float beamY = iSEM.GetBeamOffsetY(); LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true); beamY = (-deltY + beamY); LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true); //计算最大偏移量 float beamYCur = iSEM.GetBeamShiftY();//单位是% iSEM.SetBeamShiftY(100); float beamYMax = iSEM.GetBeamOffsetY();//单位是m iSEM.SetBeamShiftY(beamYCur); if (beamY < beamYMax || beamY < -beamYMax) { LogManager.AddHardwareLog("Y方向移动光束", true); float beamYShift = beamY * 100 / beamYMax; if (!iSEM.SetBeamShiftY(beamY)) { LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true); return false; } } else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现 { LogManager.AddHardwareLog("Y方向移动样品台", true); if (!iSEM.SetStageGotoY(ypNew)) { return false; } //判断是否移动完成 while (true) { Thread.Sleep(5000); if (iSEM.GetStageIs() == 0) { break; } } //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败"; //arg.State = true; //SendMsg("1-7"); } return true; } private void button10_Click(object sender, EventArgs e) { MoveToPix(Convert.ToSingle(txtTx.Text), Convert.ToSingle(txtTy.Text)); } float cycle_time = 0; private void button11_Click(object sender, EventArgs e) { iSEM.SetReduced(256, 192, 512, 512); Thread.Sleep(100); iSEM.CmdFocusRate(4); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(200 + Convert.ToInt32(cycle_time)); //放大到10000倍 iSEM.SetMagnification(10000); Thread.Sleep(200 + Convert.ToInt32(cycle_time)); //自动亮度对比度 iSEM.SetAutoVideoBrightnessAndContrast(); Thread.Sleep(5000); //自动对焦 if (Directory.Exists(txtFocus.Text)) { Directory.Delete(txtFocus.Text, true); } Thread.Sleep(3000); //再创建文件夹 Directory.CreateDirectory(txtFocus.Text); //1、对焦参数类，2、输出工作距离 int wd = 0; //20201015 根据当前的工作距离重新计算对焦位置 float currentWd = iSEM.GetWorkingDistance();//0.0154m =15.4mm = 15400um MeasureFile m_measureFile = new MeasureFile(); //设置工作距离 iSEM.SetWorkingDistance((float)(wd * 0.00000001)); //设置完工作距离后必须延迟5秒 Thread.Sleep(2000); //放大倍数5000 iSEM.SetMagnification(5000); Thread.Sleep(200 + Convert.ToInt32(cycle_time)); //自动消像散 //if (!ImageStig1()) //{ // MessageBox.Show("消像散失败"); //} //放大到10000倍 iSEM.SetMagnification(10000); Thread.Sleep(200 + Convert.ToInt32(cycle_time)); //自动消像散 //if (!ImageStig1()) //{ // MessageBox.Show("消像散失败"); //} //增亮图像 iSEM.SetAutoVideoOff(); Thread.Sleep(200); float currentBright = iSEM.GetBrightness(); Thread.Sleep(200); float currentContrast = iSEM.GetContrast(); Thread.Sleep(200); iSEM.SetBrightness(currentBright + 1); Thread.Sleep(500); iSEM.SetContrast(currentContrast + 1); Thread.Sleep(500); iSEM.CloseReduced(); Thread.Sleep(200); cycle_time = iSEM.GetCycleTime(); Thread.Sleep(200 + Convert.ToInt32(cycle_time)); } private void button12_Click(object sender, EventArgs e) { ltPoints.Items.Clear(); List pts = new List(); int state = 0; wr.EDS_Param_Points(txtPicPath.Text, 1, 0, "N-BOE", out pts, out state); foreach(Point pt in pts) { ltPoints.Items.Add(pt.X.ToString() + "," + pt.Y.ToString()); } button12.Text = pts.Count.ToString(); } private void button13_Click(object sender, EventArgs e) { ltLines.Items.Clear(); List pts = new List(); int state = 0; //wr.EDS_Param_Lines(txtPicPath.Text, 1, 0, "N-BOE", out pts, out state); foreach (Point pt in pts) { ltLines.Items.Add(pt.X.ToString() + "," + pt.Y.ToString()); } button13.Text = pts.Count.ToString(); } private void button14_Click(object sender, EventArgs e) { Point pt = new Point(); int w = 0; int h = 0; int state = 0; wr.EDS_Param_Areas(txtPicPath.Text, 1, 0, "N-BOE", out pt, out w, out h, out state); lblEDSX.Text = pt.X.ToString(); lblEDSY.Text = pt.Y.ToString(); lblEDSW.Text = w.ToString(); lblEDSH.Text = h.ToString(); } private void button15_Click(object sender, EventArgs e) { iSEM.SetReduced(256, 192, Convert.ToInt32(textBox3.Text), Convert.ToInt32(textBox4.Text)); } } }