//时间：20200610 //作者：王琦 //功能：SmartSEM remote API控制 using System; using System.Collections.Generic; using System.Linq; using System.Runtime.InteropServices; using System.Text; using System.Threading.Tasks; using APILib; using System.Threading; using System.IO; using FileManager; namespace SmartSEMControl { //可能遇到的错误提示部分？？在log加入之后添加 class SmartSEM : ISEMControl { private NLog.Logger log; #region 返回错误代码枚举 private enum ZeissErrorCode { // Failed to translate parameter into an id API_E_GET_TRANSLATE_FAIL = 1000, // Failed to get analogue value API_E_GET_AP_FAIL = 1001, // Failed to get digital value API_E_GET_DP_FAIL = 1002, // Parameter supplied is not analogue nor digital API_E_GET_BAD_PARAMETER = 1003, // Failed to translate parameter into an id API_E_SET_TRANSLATE_FAIL = 1004, // Failed to set a digital state API_E_SET_STATE_FAIL = 1005, // Failed to set a float value API_E_SET_FLOAT_FAIL = 1006, // Value supplied is too low API_E_SET_FLOAT_LIMIT_LOW = 1007, // Value supplied is too high API_E_SET_FLOAT_LIMIT_HIGH = 1008, // Value supplied is is of wrong type API_E_SET_BAD_VALUE = 1009, // Parameter supplied is not analogue nor digital API_E_SET_BAD_PARAMETER = 1010, // Failed to translate command into an id API_E_EXEC_TRANSLATE_FAIL = 1011, // Failed to execute command= API_E_EXEC_CMD_FAIL = 1012, // Failed to execute file macro API_E_EXEC_MCF_FAIL = 1013, // Failed to execute library macro API_E_EXEC_MCL_FAIL = 1014, // Command supplied is not implemented API_E_EXEC_BAD_COMMAND = 1015, // Grab command failed API_E_GRAB_FAIL = 1016, // Get Stage position failed API_E_GET_STAGE_FAIL = 1017, // Move Stage position failed API_E_MOVE_STAGE_FAIL = 1018, // API not initialised API_E_NOT_INITIALISED = 1019, // Failed to translate parameter to an id API_E_NOTIFY_TRANSLATE_FAIL = 1020, // Set notification failed API_E_NOTIFY_SET_FAIL = 1021, // Get limits failed API_E_GET_LIMITS_FAIL = 1022, // Get multiple parameters failed API_E_GET_MULTI_FAIL = 1023, // Set multiple parameters failed API_E_SET_MULTI_FAIL = 1024, // Missing API license API_E_NOT_LICENSED = 1025, // Reserved or not implemented API_E_NOT_IMPLEMENTED = 1026, // Failed to get user name (Remoting Interface only) API_E_GET_USER_NAME_FAIL = 1027, // Failed to get user idle state (Remoting Interface only) API_E_GET_USER_IDLE_FAIL = 1028, // Failed to get the last remoting connection error string (Remoting Interface Only) API_E_GET_LAST_REMOTING_CONNECT_ERROR_FAIL = 1029, // Failed to remotely logon to the EM Server (username and password may be incorrect or EM Server is not running or User is already logged on API_E_EMSERVER_LOGON_FAILED = 1030, // Failed to start the EM Server - this may be because the Server is already running or has an internal error. API_E_EMSERVER_START_FAILED = 1031, // The command or parameter is currently disabled (you cannot execute or set it). API_E_PARAMETER_IS_DISABLED = 1032, // Remoting incorrectly configured, use RConfigure to correct API_E_REMOTING_NOT_CONFIGURED = 2027, // Remoting did not connect to the server API_E_REMOTING_FAILED_TO_CONNECT = 2028, // Remoting could not start (unknown reason) API_E_REMOTING_COULD_NOT_CREATE_INTERFACE = 2029, // Remoting: Remote server is not running currently. API_E_REMOTING_EMSERVER_NOT_RUNNING = 2030, // Remoting: Remote server has no user logged in API_E_REMOTING_NO_USER_LOGGED_IN = 2031, // Internal Defines, although they may be useful in your own program. TRS. API_FIRST_REMOTING_ERROR_CODE = API_E_REMOTING_NOT_CONFIGURED, API_LAST_REMOTING_ERROR_CODE = API_E_REMOTING_NO_USER_LOGGED_IN, API_FIRST_ERROR_CODE = API_E_GET_TRANSLATE_FAIL, API_LAST_ERROR_CODE = API_E_REMOTING_NO_USER_LOGGED_IN } #endregion #region 固定参数 //判断这个文件夹是否存在20200826 //private readonly String ELYPATH = @"C:\ProgramData\Carl Zeiss\SmartFIB\API\Drop\"; private readonly String ELYFILENAME = "ApiLayout.ely"; //private readonly String MLFPATH = @"C:\ProgramData\Carl Zeiss\SmartSEM\User\Service\"; private readonly String MLFFILENAME = "Opton.MLF"; private String REMOTEDesELYPATH = @""; private String REMOTEDesMLFPATH = @""; #endregion #region 模拟参数 //放大缩小 private readonly String AP_MAG = "AP_MAG"; //焦距 private readonly String AP_WD = "AP_WD"; //亮度 private readonly String AP_BRIGHTNESS = "AP_BRIGHTNESS"; //对比度 private readonly String AP_CONTRAST = "AP_CONTRAST"; //亮度目标 private readonly String AP_AUTO_BRIGHT = "AP_AUTO_BRIGHT"; //对比度目标 private readonly String AP_AUTO_CONTRAST = "AP_AUTO_CONTRAST"; //消像散X轴 private readonly String AP_STIG_X = "AP_STIG_X"; //消像散Y轴 private readonly String AP_STIG_Y = "AP_STIG_Y"; //角度补偿 private readonly String AP_TILT_ANGLE = "AP_TILT_ANGLE"; //SEM移动X private readonly String AP_BEAMSHIFT_X = "AP_BEAMSHIFT_X"; //SEM移动Y private readonly String AP_BEAMSHIFT_Y = "AP_BEAMSHIFT_Y"; //X轴移动到 private readonly String AP_STAGE_GOTO_X = "AP_STAGE_GOTO_X"; //Y轴移动到 private readonly String AP_STAGE_GOTO_Y = "AP_STAGE_GOTO_Y"; //Z轴移动到 private readonly String AP_STAGE_GOTO_Z = "AP_STAGE_GOTO_Z"; //T轴移动到 private readonly String AP_STAGE_GOTO_T = "AP_STAGE_GOTO_T"; //R轴移动到 private readonly String AP_STAGE_GOTO_R = "AP_STAGE_GOTO_R"; //M轴移动到 private readonly String AP_STAGE_GOTO_M = "AP_STAGE_GOTO_M"; //Scan Rotate角度 private readonly String AP_SCANROTATION = "AP_SCANROTATION"; //像素大小 private readonly String AP_PIXEL_SIZE = "AP_PIXEL_SIZE"; //X轴坐标 private readonly String AP_STAGE_AT_X = "AP_STAGE_AT_X"; //Y轴坐标 private readonly String AP_STAGE_AT_Y = "AP_STAGE_AT_Y"; //Z轴坐标 private readonly String AP_STAGE_AT_Z = "AP_STAGE_AT_Z"; //T轴坐标 private readonly String AP_STAGE_AT_T = "AP_STAGE_AT_T"; //R轴坐标 private readonly String AP_STAGE_AT_R = "AP_STAGE_AT_R"; //M轴坐标 private readonly String AP_STAGE_AT_M = "AP_STAGE_AT_M"; //扫描周期 private readonly String AP_FRAME_TIME = "AP_FRAME_TIME"; //FIB缩放 private readonly String AP_FIB_MAGNIFICATION = "AP_FIB_MAGNIFICATION"; //FIB焦距 private readonly String AP_FIB_OBJECTIVE_POTENTIAL = "AP_FIB_OBJECTIVE_POTENTIAL"; //FIB消像散X private readonly String AP_FIB_STIGMATOR_X = "AP_FIB_STIGMATOR_X"; //FIB消像散Y private readonly String AP_FIB_STIGMATOR_Y = "AP_FIB_STIGMATOR_Y"; //FIB光束移动X private readonly String AP_FIB_BEAM_SHIFT_X = "AP_FIB_BEAM_SHIFT_X"; //FIB光束移动Y private readonly String AP_FIB_BEAM_SHIFT_Y = "AP_FIB_BEAM_SHIFT_Y"; //SEM电压 private readonly String AP_MANUALKV = "AP_MANUALKV"; //SEM电流 private readonly String AP_IPROBE = "AP_IPROBE"; //拉直 private readonly String AP_STAGE_DELTA_R = "AP_STAGE_DELTA_R"; //光束移动位置值 private readonly String AP_BEAM_OFFSET_X = "AP_BEAM_OFFSET_X"; private readonly String AP_BEAM_OFFSET_Y = "AP_BEAM_OFFSET_Y"; private readonly String AP_NR_COEF = "AP_NR_COEF"; #endregion #region 数字参数 private readonly String DP_SCANRATE = "DP_SCANRATE"; //Scan Rotate开关 private readonly String DP_SCAN_ROT = "DP_SCAN_ROT"; //取消电子束校正 private readonly String DP_TILT_CORRECTION = "DP_TILT_CORRECTION"; //自动亮度对比度 private readonly String DP_AUTO_VIDEO = "DP_AUTO_VIDEO"; //图像解冻 private readonly String DP_FROZEN = "DP_FROZEN"; //图像类型切换 private readonly String DP_DETECTOR_TYPE = "DP_DETECTOR_TYPE"; //图像大小 private readonly String DP_IMAGE_STORE = "DP_IMAGE_STORE"; //样品台状态 private readonly String DP_STAGE_IS = "DP_STAGE_IS"; //自动函数状态 private readonly String DP_AUTO_FUNCTION = "DP_AUTO_FUNCTION"; //FIB模式 private readonly String DP_FIB_MODE = "DP_FIB_MODE"; //FIB_IMAGING private readonly String DP_FIB_IMAGING = "DP_FIB_IMAGING"; //FIB状态 private readonly String DP_SMARTFIB_API_STATUS = "DP_SMARTFIB_API_STATUS"; //FIB,ELY文件确认前，需要将该变量置为2->FIB private readonly String DP_PATTERNING_MODE = "DP_PATTERNING_MODE"; #endregion #region 命令 //20201016 设置图像速度 CMD_SCANRATE0...CMD_SCANRATE15 private readonly String CMD_SCANRATE3 = "CMD_SCANRATE3"; private readonly String CMD_SCANRATE4 = "CMD_SCANRATE4"; //add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 private readonly String CMD_SCANRATE5 = "CMD_SCANRATE5"; private readonly String CMD_SCANRATE6 = "CMD_SCANRATE6"; //add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 private readonly String CMD_SCANRATE7 = "CMD_SCANRATE7"; private readonly String CMD_SCANRATE8 = "CMD_SCANRATE8"; private readonly String CMD_SCANRATE9 = "CMD_SCANRATE9"; private readonly String CMD_SCANRATE10 = "CMD_SCANRATE10"; private readonly String CMD_LINE_AVG = "CMD_LINE_AVG"; private readonly String CMD_PIXNR = "CMD_PIXNR"; //开启电压 private readonly String CMD_BEAM_ON = "CMD_BEAM_ON"; //关闭电压 private readonly String CMD_EHT_OFF = "CMD_EHT_OFF"; //自动对焦1 private readonly String CMD_AUTO_FOCUS_COARSE = "CMD_AUTO_FOCUS_COARSE"; //自动对焦2 private readonly String CMD_AUTO_FOCUS_FINE = "CMD_AUTO_FOCUS_FINE"; //自动消像散 private readonly String CMD_AUTO_STIG = "CMD_AUTO_STIG"; //样品台急停 private readonly String CMD_STAGE_ABORT = "CMD_STAGE_ABORT"; //FIB模式选择 private readonly String CMD_FIB_MODE_SEM = "CMD_FIB_MODE_SEM"; private readonly String CMD_FIB_MODE_FIB = "CMD_FIB_MODE_FIB"; private readonly String CMD_FIB_MODE_MILL = "CMD_FIB_MODE_MILL"; private readonly String CMD_FIB_MODE_SEM_FIB = "CMD_FIB_MODE_SEM_FIB"; private readonly String CMD_FIB_MODE_MILL_SEM = "CMD_FIB_MODE_MILL_SEM"; private readonly String CMD_FIB_MODE_EXT = "CMD_FIB_MODE_EXT"; private readonly String CMD_FIB_MODE_EXT_SEM = "CMD_FIB_MODE_EXT_SEM"; private readonly String CMD_FIB_MODE_ARGON_SEM = "CMD_FIB_MODE_ARGON_SEM"; private readonly String CMD_FIB_MODE_DRIFT_SEM = "CMD_FIB_MODE_DRIFT_SEM"; private readonly String CMD_FIB_MODE_DRIFT_FIB = "CMD_FIB_MODE_DRIFT_FIB"; private readonly String CMD_FIB_MODE_ARGON = "CMD_FIB_MODE_ARGON"; //FIB加载.ely文件命令 private readonly String CMD_SMARTFIB_LOAD_ELY = "CMD_SMARTFIB_LOAD_ELY"; //FIB确认.ely文件命令 private readonly String CMD_SMARTFIB_PREPARE_EXPOSURE = "CMD_SMARTFIB_PREPARE_EXPOSURE"; //FIB开始.ley文件命令 private readonly String CMD_FIB_START_MILLING = "CMD_FIB_START_MILLING"; #endregion #region 宏文件命令 private readonly String MCF_FILENAME = "MCF_"; #endregion #region APILib private Api CZEMApi = new Api(); private Boolean m_bInitialised = false; #endregion #region 构造函数 public SmartSEM() { //LogManager.InitHardwareLog(); Init(); //判断ELY默认文件夹是否存在 //if(!Directory.Exists(ELYPATH)) //{ // Directory.CreateDirectory(ELYPATH); //} //if (!Directory.Exists(MLFPATH)) //{ // Directory.CreateDirectory(MLFPATH); //} } #endregion #region 设备初始化 /// /// 设备初始化 /// /// return:true or false public Boolean Init() { log = NLog.LogManager.GetCurrentClassLogger(); long lrt = 0; #if ROMOTE lrt = CZEMApi.InitialiseRemoting(); #else lrt = CZEMApi.Initialise(""); #endif if (lrt != 0) { log.Error("CZEMApi.Initialise Faild - " + ErrorToString(lrt), false); m_bInitialised = false; return false; } else { m_bInitialised = true; float testmag = GetMagnification(); if(!float.IsNaN(testmag)) { log.Info("CZEMApi.Initialise Success!", true); return true; } else { log.Error("CZEMApi.Initialise Faild - Disconnect", false); m_bInitialised = false; return false; } } } #endregion #region 设备远程初始化 /// /// 设备远程初始化 /// /// return:true or false public Boolean InitRemoting() { long lrt = CZEMApi.InitialiseRemoting(); if (lrt != 0) { m_bInitialised = false; return false; } else { m_bInitialised = true; return true; } } #endregion #region 连接状态 public Boolean ConnectStatus() { return m_bInitialised; } #endregion #region 关闭设备 /// /// 关闭设备 /// /// true or false public Boolean Dispose() { if (m_bInitialised) { long lrt = CZEMApi.ClosingControl(); if (lrt != 0) { log.Error("CZEMApi.ClosingControl Faild - " + ErrorToString(lrt), false); return false; } else { log.Info("CZEMApi.ClosingControl Success!", true); m_bInitialised = false; return true; } } else { return false; } } #endregion #region 读参数函数 private Boolean ReadParams(String str_param, ref float value) { if (m_bInitialised) { object varfloat = new VariantWrapper((float)0.0f); long lrt = CZEMApi.Get(str_param, ref varfloat); if (lrt != 0) { log.Error("Get " + str_param + " Faild - " + ErrorToString(lrt), false); return false; } else { value = Convert.ToSingle(varfloat); return true; } } else { log.Error("ReadParams m_bInitialised = false", false); return false; } } #endregion #region 写模拟参数函数 private Boolean WriteParams(String str_param, float value) { if (m_bInitialised) { //先取范围 object varMin = new VariantWrapper((float)0.0f); object varMax = new VariantWrapper((float)0.0f); long lrt = CZEMApi.GetLimits(str_param, ref varMin, ref varMax); if (lrt != 0) { log.Error("GetLimits " + str_param + " Faild - " + ErrorToString(lrt), false); return false; } if (value <= Convert.ToSingle(varMax) && value >= Convert.ToSingle(varMin)) { object varFloat = new VariantWrapper(value); lrt = CZEMApi.Set(str_param, ref varFloat);// set value if (lrt != 0) { log.Error("Set " + str_param + " Faild - " + ErrorToString(lrt), false); return false; } return true; } else { log.Error("Set " + str_param + " Faild - Out to range", false); return false; } } else { log.Error("ReadParams m_bInitialised = false", false); return false; } } #endregion #region 写数字参数函数 private Boolean WriteDataParams(String str_param, float value) { if (m_bInitialised) { object varFloat = new VariantWrapper(value); long lrt = CZEMApi.Set(str_param, ref varFloat);// set value if (lrt != 0) { log.Error("Set " + str_param + " Faild - " + ErrorToString(lrt), false); return false; } return true; } else { log.Error("ReadParams m_bInitialised = false", false); return false; } } #endregion #region 执行命令 private Boolean ExecuteCmd(String cmd) { if (m_bInitialised) { long lrt = CZEMApi.Execute(cmd);// execute command if (lrt != 0) { log.Error("ExecuteCmd " + cmd + " Faild - " + ErrorToString(lrt), false); return false; } else { return true; } } else { return false; } } #endregion #region SEM缩放 /// /// 读取缩放倍数 /// /// true:float or false:NaN public float GetMagnification() { float ret = 0; if(ReadParams(AP_MAG, ref ret)) { log.Info("GetMagnification " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetMagnification Faild!", false); return float.NaN; } } /// /// 设置缩放倍数 /// /// 倍数 /// true or false public Boolean SetMagnification(float set) { Boolean ret = WriteParams(AP_MAG, set); log.Info("SetMagnification = " + set.ToString(), ret); return ret; } #endregion #region SEM焦距 /// /// 读取工作距离 /// /// true:float or false:NaN public float GetWorkingDistance() { float ret = 0; if (ReadParams(AP_WD, ref ret)) { log.Info("GetWorkingDistance " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetWorkingDistance Faild!", false); return float.NaN; } } /// /// 设置焦距 /// /// 焦距 /// true or false public Boolean SetWorkingDistance(float set) { Boolean ret = WriteParams(AP_WD, set); log.Info("SetWorkingDistance = " + set.ToString(), ret); return ret; } #endregion #region 亮度 /// /// 读取亮度 /// /// true:float or false:NaN public float GetBrightness() { float ret = 0; if (ReadParams(AP_BRIGHTNESS, ref ret)) { log.Info("GetBrightness " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetBrightness Faild!", false); return float.NaN; } } /// /// 设置亮度 /// /// 亮度 /// true or false public Boolean SetBrightness(float set) { Boolean ret = WriteParams(AP_BRIGHTNESS, set); log.Info("SetBrightness = " + set.ToString(), ret); return ret; } #endregion #region 对比度 /// /// 读取对比度 /// /// true:float or false:NaN public float GetContrast() { float ret = 0; if (ReadParams(AP_CONTRAST, ref ret)) { log.Info("GetContrast " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetContrast Faild!", false); return float.NaN; } } /// /// 设置对比度 /// /// 对比度 /// true or false public Boolean SetContrast(float set) { Boolean ret = WriteParams(AP_CONTRAST, set); log.Info("SetContrast = " + set.ToString(), ret); return ret; } #endregion #region 自动亮度对比度 /// /// 读取自动亮度对比度状态 /// /// true:float or false:NaN public float GetAutoVideo() { float ret = 0; if (ReadParams(DP_AUTO_VIDEO, ref ret)) { log.Info("GetAutoVideo " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetAutoVideo Faild!", false); return float.NaN; } } /// /// 设置自动亮度对比度状态 /// /// 0:off;1:B(亮度);2:C(对比度);3:BC /// true or false public Boolean SetAutoVideoOff() { Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)0); log.Info("SetAutoVideoOff", ret); return ret; } public Boolean SetAutoVideoBrightness() { Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)1); log.Info("SetAutoVideoBrightness", ret); return ret; } public Boolean SetAutoVideoContrast() { Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)2); log.Info("SetAutoVideoContrast", ret); return ret; } public Boolean SetAutoVideoBrightnessAndContrast() { Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)3); log.Info("SetAutoVideoBrightnessAndContrast", ret); return ret; } #endregion #region 亮度目标 /// /// 读取亮度目标 /// /// true:float or false:NaN public float GetAutoBright() { float ret = 0; if (ReadParams(AP_AUTO_BRIGHT, ref ret)) { log.Info("GetAutoBright " + ret.ToString() + " Success!", true); return ret; } else { log.Info("GetAutoBright Faild!", false); return float.NaN; } } /// /// 设置亮度目标 /// /// 亮度 /// true or false public Boolean SetAutoBright(float set) { Boolean ret = WriteParams(AP_AUTO_BRIGHT, set); log.Info("SetAutoBright = " + set.ToString(), ret); return ret; } #endregion #region 对比度目标 /// /// 读取对比度目标 /// /// true:float or false:NaN public float GetAutoContrast() { float ret = 0; if (ReadParams(AP_AUTO_CONTRAST, ref ret)) { log.Info("GetAutoContrast " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetAutoContrast Faild!", false); return float.NaN; } } /// /// 设置对比度目标 /// /// 对比度目标 /// true or false public Boolean SetAutoContrast(float set) { Boolean ret = WriteParams(AP_AUTO_CONTRAST, set); log.Info("SetAutoContrast = " + set.ToString(), ret); return ret; } #endregion #region SEM消像散 /// /// 读取消像散X /// /// true:float or false:NaN public float GetAstigmatismX() { float ret = 0; if (ReadParams(AP_STIG_X, ref ret)) { log.Info("GetAstigmatismX " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetAstigmatismX Faild!", false); return float.NaN; } } /// /// 读取消像散Y /// /// true:float or false:NaN public float GetAstigmatismY() { float ret = 0; if (ReadParams(AP_STIG_Y, ref ret)) { log.Info("GetAstigmatismY " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetAstigmatismY Faild!", false); return float.NaN; } } /// /// 设置消像散X /// /// 对比度 /// true or false public Boolean SetAstigmatismX(float set) { Boolean ret = WriteParams(AP_STIG_X, set); log.Info("SetAstigmatismX = " + set.ToString(), ret); return ret; } /// /// 设置消像散Y /// /// 对比度 /// true or false public Boolean SetAstigmatismY(float set) { Boolean ret = WriteParams(AP_STIG_Y, set); log.Info("SetAstigmatismY = " +set.ToString(), ret); return ret; } #endregion #region 角度补偿 /// /// 读取角度补偿 /// /// true:float or false:NaN public float GetTiltAngle() { float ret = 0; if (ReadParams(AP_TILT_ANGLE, ref ret)) { log.Info("GetTiltAngle " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetTiltAngle Faild!", false); return float.NaN; } } /// /// 角度补偿解锁 /// /// public Boolean SetTiltAngleOn() { Boolean ret = WriteDataParams(DP_TILT_CORRECTION, 1); log.Info("Set DP_TILT_CORRECTION = 1.", ret); return ret; } /// /// 角度补偿锁定 /// /// public Boolean SetTiltAngleOff() { Boolean ret = WriteDataParams(DP_TILT_CORRECTION, 0); log.Info("Set DP_TILT_CORRECTION = 0.", ret); return ret; } /// /// 设置角度补偿 /// /// 角度补偿 /// true or false public Boolean SetTiltAngle(float set) { Boolean ret = false; //ret = WriteDataParams(DP_TILT_CORRECTION, 1); //log.Info("Set DP_TILT_CORRECTION = 1.", ret); ret = WriteParams(AP_TILT_ANGLE, set); log.Info("SetTiltAngle = " + set.ToString(), ret); //ret = WriteDataParams(DP_TILT_CORRECTION, 0); //log.Info("Set DP_TILT_CORRECTION = 0.", ret); return ret; } #endregion #region 图像大小 public int[] GetImageStore() { int[] i_ret = new int[2]; float ret = 0; if (ReadParams(DP_IMAGE_STORE, ref ret)) { switch (ret) { case 0: i_ret[0] = 1024; i_ret[1] = 768; break; case 1: i_ret[0] = 512; i_ret[1] = 384; break; case 2: i_ret[0] = 2048; i_ret[1] = 1536; break; case 3: i_ret[0] = 3072; i_ret[1] = 2304; break; case 4: i_ret[0] = 4096; i_ret[1] = 3072; break; case 5: i_ret[0] = 5120; i_ret[1] = 3840; break; case 6: i_ret[0] = 6144; i_ret[1] = 4608; break; case 7: i_ret[0] = 8192; i_ret[1] = 6144; break; case 8: i_ret[0] = 12288; i_ret[1] = 9216; break; case 9: i_ret[0] = 16384; i_ret[1] = 12288; break; case 10: i_ret[0] = 24576; i_ret[1] = 18432; break; case 11: i_ret[0] = 32768; i_ret[1] = 24576; break; default: i_ret[0] = 0; i_ret[1] = 0; break; } log.Info("GetImageStore=" + i_ret[0].ToString() + "*" + i_ret[1].ToString(), true); } else { log.Error("GetImageStore Faild!", false); i_ret[0] = 0; i_ret[1] = 0; } return i_ret; } public Boolean SetImageStore(float set) { Boolean ret = WriteDataParams("DP_IMAGE_STORE", set); log.Info("SetImageStore = " + set.ToString(), ret); return ret; } #endregion #region 扫描周期 public float GetCycleTime() { float ret = 0; if (ReadParams(AP_FRAME_TIME, ref ret)) { log.Info("GetCycleTime=" + ret.ToString(), true); } else { log.Error("GetCycleTime Faild!", false); } return ret; } #endregion #region SEM电压 /// /// 读取电压 /// /// true:float or false:NaN public float GetSEMVoltage() { float ret = 0; if (ReadParams(AP_MANUALKV, ref ret)) { log.Info("SEM_Voltage " + ret.ToString() + " Success!", true); return ret; } else { log.Error("SEM_Voltage Faild!", false); return float.NaN; } } /// /// 设置电压 /// /// 电压 /// true or false public Boolean SetSEMVoltage(float set) { Boolean ret = WriteParams(AP_MANUALKV, set); log.Info("SetSEMVoltage = " + set.ToString(), ret); return ret; } #endregion #region SEM电流 /// /// 读取电流 /// /// true:float or false:NaN public float GetSEMIPROBE() { float ret = 0; if (ReadParams(AP_IPROBE, ref ret)) { log.Info("SEM_IPROBE " + ret.ToString() + " Success!", true); return ret; } else { log.Error("SEM_IPROBE Faild!", false); return float.NaN; } } /// /// 设置电流 /// /// 电流 /// true or false public Boolean SetSEMIPROBE(float set) { Boolean ret = WriteParams(AP_IPROBE, set); log.Info("SetSEMIPROBE = " + set.ToString(), ret); return ret; } #endregion #region 抓取图像 /// /// 抓取图像 /// /// true:float or false:NaN public Boolean GrabImage(String filename, short xoff,short yoff, short width,short height,short type) { if (m_bInitialised) { long lrt = CZEMApi.Grab(xoff, yoff, width, height, type, filename); if (lrt != 0) { log.Error("GrabImage Faild!", false); return false; } else { log.Info("GrabImage Filename=" + filename + ",x,y,w,h,type=" + xoff.ToString() + "," + yoff.ToString() + "," + width.ToString() + "," + height.ToString() + "," + type.ToString(), true); while (true) { Thread.Sleep(1000); float sta = GetImageFrozen(); if (sta == 1) { log.Info("ImageLive", true); ImageLive(); break; } } return true; } } else { log.Error("GrabImage m_bInitialised = False!", false); return false; } } #endregion #region 小面积抓取图像 /// /// 小面积抓取图像 /// /// true:float or false:NaN public Boolean GrabZoneImage(String filename, short xoff, short yoff, short width, short height, short type) { if (m_bInitialised) { float frametime = 0; ReadParams("AP_FRAME_TIME", ref frametime); ExecuteCmd("CMD_UNFREEZE_ZONE"); Thread.Sleep((int)frametime + 200); ExecuteCmd("CMD_FREEZE_ZONE"); Thread.Sleep((int)frametime + 200); CZEMApi.Grab(xoff, yoff, width, height, type, filename); return true; } else { log.Error("GrabImage m_bInitialised = False!", false); return false; } } #endregion #region 图像解冻 public float GetImageFrozen() { float ret = 0; if (ReadParams(DP_FROZEN, ref ret)) { log.Info("GetImageFrozen " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetImageFrozen Faild!", false); return float.NaN; } } public Boolean ImageFrozen() { Boolean ret = WriteDataParams(DP_FROZEN, (float)1); log.Info("ImageFrozen!", ret); return ret; } public Boolean ImageLive() { Boolean ret = WriteDataParams(DP_FROZEN, (float)0); log.Info("ImageLive!", ret); return ret; } #endregion #region 图像类型切换 public Boolean DetectorType(float set) { Boolean ret = WriteDataParams(DP_DETECTOR_TYPE, set); log.Info("DetectorType = " + set.ToString(), ret); return ret; } #endregion #region SEM电子束移动接口 /// /// 获取电子束移动接口X /// /// true:float or false:NaN public float GetBeamShiftX() { float ret = 0; if (ReadParams(AP_BEAMSHIFT_X, ref ret)) { log.Info("GetBeamShiftX " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetBeamShiftX Faild!", false); return float.NaN; } } /// /// 获取电子束移动接口Y /// /// true:float or false:NaN public float GetBeamShiftY() { float ret = 0; if (ReadParams(AP_BEAMSHIFT_Y, ref ret)) { log.Info("GetBeamShiftY " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetBeamShiftY Faild!", false); return float.NaN; } } /// /// 设置电子束移动接口X /// /// X坐标 /// true or false public Boolean SetBeamShiftX(float set) { Boolean ret = WriteParams(AP_BEAMSHIFT_X, set); log.Info("SetBeamShiftX=" + set.ToString(), ret); return ret; } /// /// 设置电子束移动接口Y /// /// X坐标 /// true or false public Boolean SetBeamShiftY(float set) { Boolean ret = WriteParams(AP_BEAMSHIFT_Y, set); log.Info("SetBeamShiftY=" + set.ToString(), ret); return ret; } #endregion #region SEM电子束移动距离接口 /// /// 获取电子束移动距离接口X值 /// /// true:float or false:NaN public float GetBeamOffsetX() { float ret = 0; if (ReadParams(AP_BEAM_OFFSET_X, ref ret)) { log.Info("AP_BEAM_OFFSET_X " + ret.ToString() + " Success!", true); return ret; } else { log.Error("AP_BEAM_OFFSET_X Faild!", false); return float.NaN; } } /// /// 获取电子束移动距离接口Y值 /// /// true:float or false:NaN public float GetBeamOffsetY() { float ret = 0; if (ReadParams(AP_BEAM_OFFSET_Y, ref ret)) { log.Info("AP_BEAM_OFFSET_Y " + ret.ToString() + " Success!", true); return ret; } else { log.Error("AP_BEAM_OFFSET_Y Faild!", false); return float.NaN; } } /// /// 设置电子束移动距离接口X值 /// /// X坐标 /// true or false public Boolean SetBeamOffsetX(float set) { Boolean ret = WriteParams(AP_BEAM_OFFSET_X, set); log.Info("AP_BEAM_OFFSET_X=" + set.ToString(), ret); return ret; } /// /// 设置电子束移动接口Y /// /// X坐标 /// true or false public Boolean SetBeamOffsetY(float set) { Boolean ret = WriteParams(AP_BEAM_OFFSET_Y, set); log.Info("AP_BEAM_OFFSET_Y=" + set.ToString(), ret); return ret; } #endregion #region 样品台移动接口 /// /// 返回样品台坐标数组 /// /// Lenght=6 public float[] GetStagePosition() { object retx = new VariantWrapper((float)0.0f); object rety = new VariantWrapper((float)0.0f); object retz = new VariantWrapper((float)0.0f); object rett = new VariantWrapper((float)0.0f); object retr = new VariantWrapper((float)0.0f); object retm = new VariantWrapper((float)0.0f); float[] ret = new float[6]; if (m_bInitialised) { CZEMApi.GetStagePosition(ref retx, ref rety, ref retz, ref rett, ref retr, ref retm); ret[0] = Convert.ToSingle(retx); ret[1] = Convert.ToSingle(rety); ret[2] = Convert.ToSingle(retz); ret[3] = Convert.ToSingle(rett); ret[4] = Convert.ToSingle(retr); ret[5] = Convert.ToSingle(retm); log.Info("GetStagePosition x,y,z,t,r,m = " + retx.ToString() + "," + rety.ToString() + "," + retz.ToString() + "," + rett.ToString() + "," + retr.ToString() + "," + retm.ToString(), true); } else { ret[0] = float.NaN; ret[1] = float.NaN; ret[2] = float.NaN; ret[3] = float.NaN; ret[4] = float.NaN; ret[5] = float.NaN; log.Error("GetStagePosition Faild!", false); } return ret; } /// /// 设置样品台坐标数组 /// /// Lenght=6 private Boolean SetStagePosition(float[] set) { if (m_bInitialised) { long lrt = CZEMApi.MoveStage(set[0], set[1], set[2], set[3], set[4], set[5]); if(lrt==0) { log.Info("SetStagePosition x,y,z,t,r,m = " + set[0].ToString() + "," + set[1].ToString() + "," + set[2].ToString() + "," + set[3].ToString() + "," + set[4].ToString() + "," + set[5].ToString(), true); return true; } else { log.Error("SetStagePosition Faild!", false); return false; } } else { log.Error("SetStagePosition m_bInitialised = false!", false); return false; } } /// /// 样品台位置 X轴 /// /// true:float or false:NaN public float GetStageAtX() { float ret = 0; if (ReadParams(AP_STAGE_AT_X, ref ret)) { log.Info("GetStageAtX Success!", true); return ret; } else { log.Error("GetStageAtX Faild!", false); return float.NaN; } } /// /// 样品台位置 Y轴 /// /// true:float or false:NaN public float GetStageAtY() { float ret = 0; if (ReadParams(AP_STAGE_AT_Y, ref ret)) { log.Info("GetStageAtY Success!", true); return ret; } else { log.Error("GetStageAtY Faild!", false); return float.NaN; } } /// /// 样品台位置 Z轴 /// /// true:float or false:NaN public float GetStageAtZ() { float ret = 0; if (ReadParams(AP_STAGE_AT_Z, ref ret)) { log.Info("GetStageAtZ Success!", true); return ret; } else { log.Error("GetStageAtZ Faild!", false); return float.NaN; } } /// /// 样品台位置 T轴 /// /// true:float or false:NaN public float GetStageAtT() { float ret = 0; if (ReadParams(AP_STAGE_AT_T, ref ret)) { log.Info("GetStageAtT Success!", true); return ret; } else { log.Error("GetStageAtT Faild!", false); return float.NaN; } } /// /// 样品台位置 R轴 /// /// true:float or false:NaN public float GetStageAtR() { float ret = 0; if (ReadParams(AP_STAGE_AT_R, ref ret)) { log.Info("GetStageAtR Success!", true); return ret; } else { log.Error("GetStageAtR Faild!", false); return float.NaN; } } /// /// 样品台位置 M轴 /// /// true:float or false:NaN public float GetStageAtM() { float ret = 0; if (ReadParams(AP_STAGE_AT_M, ref ret)) { log.Info("GetStageAtM Success!", true); return ret; } else { log.Error("GetStageAtM Faild!", false); return float.NaN; } } /// /// 样品台位置 X轴 /// /// X轴移动坐标 /// public Boolean SetStageGotoX(float set) { Boolean ret = WriteParams(AP_STAGE_GOTO_X, set); log.Info("SetStageGotoX = " + set.ToString(), ret); return ret; } /// /// 样品台位置 Y轴 /// /// Y轴移动坐标 /// public Boolean SetStageGotoY(float set) { Boolean ret = WriteParams(AP_STAGE_GOTO_Y, set); log.Info("SetStageGotoY = " + set.ToString(), ret); return ret; } /// /// 样品台位置 Z轴 /// /// Y轴移动坐标 /// public Boolean SetStageGotoZ(float set) { Boolean ret = WriteParams(AP_STAGE_GOTO_Z, set); log.Info("SetStageGotoZ = " + set.ToString(), ret); return ret; } /// /// 样品台位置 T轴 /// /// Y轴移动坐标 /// public Boolean SetStageGotoT(float set) { Boolean ret = WriteParams(AP_STAGE_GOTO_T, set); log.Info("SetStageGotoT = " + set.ToString(), ret); return ret; } /// /// 样品台位置 R轴 /// /// Y轴移动坐标 /// public Boolean SetStageGotoR(float set) { Boolean ret = WriteParams(AP_STAGE_GOTO_R, set); log.Info("SetStageGotoR = " + set.ToString(), ret); return ret; } /// /// 样品台位置 R轴拉直 /// /// R轴拉直角度 /// public Boolean SetStageDeltaR(float set) { Boolean ret = WriteParams(AP_STAGE_DELTA_R, set); log.Info("AP_STAGE_DELTA_R = " + set.ToString(), ret); return ret; } /// /// 样品台位置 M轴 /// /// M轴移动坐标 /// public Boolean SetStageGotoM(float set) { Boolean ret = WriteParams(AP_STAGE_GOTO_M, set); log.Info("SetStageGotoM = " + set.ToString(), ret); return ret; } #endregion #region 移动样品台XY轴 public Boolean MoveStageXY(float x,float y) { //先取范围 object xMin = new VariantWrapper((float)0.0f); object xMax = new VariantWrapper((float)0.0f); long lrt = CZEMApi.GetLimits(AP_STAGE_GOTO_X, ref xMin, ref xMax); if (lrt != 0) { log.Error("GetLimits AP_STAGE_GOTO_X Faild!", false); return false; } if (x > Convert.ToSingle(xMax) || x < Convert.ToSingle(xMin)) { log.Error("GetLimits AP_STAGE_GOTO_X Max,Min,x = " + xMax.ToString() + "," + xMin.ToString() + "," + x.ToString(), false); return false; } object yMin = new VariantWrapper((float)0.0f); object yMax = new VariantWrapper((float)0.0f); lrt = CZEMApi.GetLimits(AP_STAGE_GOTO_Y, ref yMin, ref yMax); if (lrt != 0) { log.Error("GetLimits AP_STAGE_GOTO_Y Faild!", false); return false; } if (y > Convert.ToSingle(yMax) || y < Convert.ToSingle(yMin)) { log.Error("GetLimits AP_STAGE_GOTO_Y Max,Min,y = " + yMax.ToString() + "," + yMin.ToString() + "," + y.ToString(), false); return false; } float[] gsp = GetStagePosition(); gsp[0] = x; gsp[1] = y; return SetStagePosition(gsp); } #endregion #region 样品台急停 public Boolean CmdStageAbort() { Boolean ret = ExecuteCmd(CMD_STAGE_ABORT); log.Info("CmdStageAbort!", ret); return ret; } #endregion #region Scan Rotate角度接口 /// /// 获取Scan Rotate角度接口 /// /// true:float or false:NaN public float GetScanRotation() { float ret = 0; if (ReadParams(AP_SCANROTATION, ref ret)) { log.Info("GetScanRotation Success!", true); return ret; } else { log.Error("GetScanRotation Faild!", false); return float.NaN; } } /// /// ScanRotation解锁 /// /// public Boolean SetScanRotationOn() { Boolean ret = WriteDataParams(DP_SCAN_ROT, 1); log.Info("SetScanRotation DP_SCAN_ROT = 1", ret); return ret; } /// /// ScanRotation锁定 /// /// public Boolean SetScanRotationOff() { Boolean ret = WriteDataParams(DP_SCAN_ROT, 0); log.Info("SetScanRotation DP_SCAN_ROT = 0", ret); return ret; } /// /// 设置Scan Rotate角度接口 /// /// 角度补偿 /// true or false public Boolean SetScanRotation(float set) { Boolean ret = false; //ret = WriteDataParams(DP_SCAN_ROT, 1); //log.Info("SetScanRotation DP_SCAN_ROT = 1", ret); ret = WriteParams(AP_SCANROTATION, set); log.Info("SetScanRotation = " + set.ToString(), ret); //ret = WriteDataParams(DP_SCAN_ROT, 0); //log.Info("SetScanRotation DP_SCAN_ROT = 0", ret); return ret; } #endregion #region 像素读取PixelSize /// /// 获取Pixel Size 接口,只读 /// /// true:float or false:NaN public float GetPixelSize() { float ret = 0; if (ReadParams(AP_PIXEL_SIZE, ref ret)) { log.Info("GetPixelSize " + ret.ToString() + " Success!", true); return ret; } else { log.Info("GetPixelSize Faild!", false); return float.NaN; } } #endregion #region 电子束校正设置 /// /// 读取电子束校正状态 /// /// public float GetTiltCorrection() { float ret = 0; if (ReadParams(DP_TILT_CORRECTION, ref ret)) { log.Info("GetTiltCorrection " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetTiltCorrection Faild!", false); return float.NaN; } } /// /// 设置电子束校正状态 /// /// /// public Boolean SetTiltCorrectionOff() { Boolean ret = WriteDataParams(DP_TILT_CORRECTION, (float)0); log.Info("SetTiltCorrectionOff!", ret); return ret; } public Boolean SetTiltCorrectionOn() { Boolean ret = WriteDataParams(DP_TILT_CORRECTION, (float)1); log.Info("SetTiltCorrectionOn!", ret); return ret; } #endregion #region 开启电压 public Boolean CmdOpenVoltage() { Boolean ret = ExecuteCmd(CMD_BEAM_ON); log.Info("CmdOpenVoltage!", ret); return ret; } #endregion #region 关闭电压 public Boolean CmdCloseVoltage() { Boolean ret = ExecuteCmd(CMD_EHT_OFF); log.Info("CmdCloseVoltage!", ret); return ret; } #endregion #region 自动对焦1 public Boolean CmdAutoFocusCoarse() { Boolean ret = ExecuteCmd(CMD_AUTO_FOCUS_COARSE); log.Info("CmdAutoFocusCoarse!", ret); return ret; } #endregion #region 自动对焦2 public Boolean CmdAutoFocusFine() { Boolean ret = ExecuteCmd(CMD_AUTO_FOCUS_FINE); log.Info("CmdAutoFocusFine!", ret); return ret; } #endregion #region 自动消像散 public Boolean CmdAutoStig() { Boolean ret = ExecuteCmd(CMD_AUTO_STIG); log.Info("CmdAutoStig!", ret); return ret; } #endregion #region 调用宏文件命令 public Boolean CMDMCFFilename(String _MLFFullFileName) { //String CMDMCF = MCF_FILENAME + filename; //Boolean ret = ExecuteCmd(CMDMCF); //log.Info("CMDMCFFilename = " + filename, ret); //return ret; if (File.Exists(_MLFFullFileName) ) { //移动文件 //if (_MLFFullFileName != (MLFPATH + MLFFILENAME)) //{ // File.Copy(_MLFFullFileName, MLFPATH + MLFFILENAME, true); // log.Info("CmdFIBLoadMLF Copy FileName：" + _MLFFullFileName + " To " + MLFPATH + MLFFILENAME, true); // try // { if (REMOTEDesMLFPATH != "") { File.Copy(_MLFFullFileName, REMOTEDesMLFPATH + MLFFILENAME, true); log.Info("CmdFIBLoadELY Success Execute " + _MLFFullFileName + "to " + REMOTEDesMLFPATH + MLFFILENAME); } // } // catch { } //} Boolean ret = ExecuteCmd(MCF_FILENAME + MLFFILENAME.Substring(0,MLFFILENAME.Length-4)); log.Info("CmdFIBLoadMLF Success Execute " + _MLFFullFileName, true); return ret; } else { log.Error("CmdFIBLoadMLF Faild：" + _MLFFullFileName + " Is Not Exists!", false); return false; } } #endregion #region 读取样品台状态 public float GetStageIs() { float ret = 0; if (ReadParams(DP_STAGE_IS, ref ret)) { log.Info("GetStageIs " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetStageIs Faild!", false); return float.NaN; } } #endregion #region 读取自动函数的状态 public float GetAutoFunction() { float ret = 0; if (ReadParams(DP_AUTO_FUNCTION, ref ret)) { log.Info("GetAutoFunction " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetAutoFunction Faild!", false); return float.NaN; } } #endregion #region FIB缩放 /// /// 读取缩放倍数 /// /// true:float or false:NaN public float GetFIBMagnification() { float ret = 0; if (ReadParams(AP_FIB_MAGNIFICATION, ref ret)) { log.Info("GetFIBMagnification " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetFIBMagnification Faild!", false); return float.NaN; } } /// /// 设置缩放倍数 /// /// 倍数 /// true or false public Boolean SetFIBMagnification(float set) { Boolean ret = WriteParams(AP_FIB_MAGNIFICATION, set); log.Info("GSetFIBMagnification = " + set.ToString(), ret); return ret; } #endregion #region FIB焦距 /// /// 读取工作距离AP_FIB_OBJECTIVE_POTENTIAL /// /// true:float or false:NaN public float GetFIBObjectivePotential() { float ret = 0; if (ReadParams(AP_FIB_OBJECTIVE_POTENTIAL, ref ret)) { log.Info("GetFIBObjectivePotential " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetFIBObjectivePotential Faild!", false); return float.NaN; } } /// /// 设置焦距 /// /// 焦距 /// true or false public Boolean SetFIBObjectivePotential(float set) { Boolean ret = WriteParams(AP_FIB_OBJECTIVE_POTENTIAL, set); log.Info("SetFIBObjectivePotential = " + set.ToString(), ret); return ret; } #endregion #region FIB消像散 /// /// 读取消像散X /// /// true:float or false:NaN public float GetFIBAstigmatismX() { float ret = 0; if (ReadParams(AP_FIB_STIGMATOR_X, ref ret)) { log.Info("GetFIBAstigmatismX " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetFIBAstigmatismX Faild!", false); return float.NaN; } } /// /// 读取消像散Y /// /// true:float or false:NaN public float GetFIBAstigmatismY() { float ret = 0; if (ReadParams(AP_FIB_STIGMATOR_Y, ref ret)) { log.Info("GetFIBAstigmatismY " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetFIBAstigmatismY Faild!", false); return float.NaN; } } /// /// 设置消像散X /// /// 对比度 /// true or false public Boolean SetFIBAstigmatismX(float set) { Boolean ret = WriteParams(AP_FIB_STIGMATOR_X, set); log.Info("SetFIBAstigmatismX = " + set.ToString(), ret); return ret; } /// /// 设置消像散Y /// /// 对比度 /// true or false public Boolean SetFIBAstigmatismY(float set) { Boolean ret = WriteParams(AP_FIB_STIGMATOR_Y, set); log.Info("SetFIBAstigmatismY = " + set.ToString(), ret); return ret; } #endregion #region FIB电子束移动接口 /// /// 获取电子束移动接口X /// /// true:float or false:NaN public float GetFIBBeamShiftX() { float ret = 0; if (ReadParams(AP_FIB_BEAM_SHIFT_X, ref ret)) { log.Info("GetFIBBeamShiftX " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetFIBBeamShiftX Faild!", false); return float.NaN; } } /// /// 获取电子束移动接口Y /// /// true:float or false:NaN public float GetFIBBeamShiftY() { float ret = 0; if (ReadParams(AP_FIB_BEAM_SHIFT_Y, ref ret)) { log.Info("GetFIBBeamShiftY " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetFIBBeamShiftY Faild!", false); return float.NaN; } } /// /// 设置电子束移动接口X /// /// X坐标 /// true or false public Boolean SetFIBBeamShiftX(float set) { Boolean ret = WriteParams(AP_FIB_BEAM_SHIFT_X, set); log.Info("SetFIBBeamShiftX = " + set.ToString(), ret); return ret; } /// /// 设置电子束移动接口Y /// /// X坐标 /// true or false public Boolean SetFIBBeamShiftY(float set) { Boolean ret = WriteParams(AP_FIB_BEAM_SHIFT_Y, set); log.Info("SetFIBBeamShiftX = " + set.ToString(), ret); return ret; } #endregion #region FIB模式 /// /// 获取FIB模式 /// /// true:float or false:NaN public float GetFIBMode() { float ret = 0; if (ReadParams(DP_FIB_MODE, ref ret)) { log.Info("GetFIBMode " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetFIBMode Faild!", false); return float.NaN; } } #endregion #region 工作模式选择 //SEM模式 public Boolean CmdFIBModeSEM() { Boolean ret = ExecuteCmd(CMD_FIB_MODE_SEM); log.Info("CmdFIBModeSEM = SEM!", ret); return ret; } //FIB模式 public Boolean CmdFIBModeFIB() { Boolean ret = ExecuteCmd(CMD_FIB_MODE_FIB); log.Info("CmdFIBModeSEM = FIB!", ret); return ret; } //铣削模式 public Boolean CmdFIBModeMILL() { Boolean ret = ExecuteCmd(CMD_FIB_MODE_MILL); log.Info("CmdFIBModeSEM = MILL!", ret); return ret; } //SEM+FIB模式 public Boolean CmdFIBModeSEMAndFIB() { return ExecuteCmd(CMD_FIB_MODE_SEM_FIB); } //铣削+SEM模式 public Boolean CmdFIBModeMILLAndSEM() { return ExecuteCmd(CMD_FIB_MODE_MILL_SEM); } //EXT模式 public Boolean CmdFIBModeEXT() { return ExecuteCmd(CMD_FIB_MODE_EXT); } //EXT+SEM模式 public Boolean CmdFIBModeEXTAndSEM() { return ExecuteCmd(CMD_FIB_MODE_EXT_SEM); } //Argon(氩)+SEM模式 public Boolean CmdFIBModeARGONAndSEM() { return ExecuteCmd(CMD_FIB_MODE_ARGON_SEM); } //DRIFT(流)+SEM模式 public Boolean CmdFIBModeDRIFTAndSEM() { return ExecuteCmd(CMD_FIB_MODE_DRIFT_SEM); } //DRIFT(流)+FIB模式 public Boolean CmdFIBModeDRIFTAndFIB() { return ExecuteCmd(CMD_FIB_MODE_DRIFT_FIB); } //Argon(氩)模式 public Boolean CmdFIBModeARGON() { return ExecuteCmd(CMD_FIB_MODE_ARGON); } #endregion #region 工作模式读取 /// /// 工作模式读取 /// /// 0：SEM 1：FIB 2：MILL public float GetFIBIMAGING() { float ret = 0; if (ReadParams(DP_FIB_IMAGING, ref ret)) { log.Info("GetFIBIMAGING " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetFIBIMAGING Faild!", false); return float.NaN; } } #endregion #region FIB工作状态 public float GetFIBApiStatus() { float ret = 0; if (ReadParams(DP_SMARTFIB_API_STATUS, ref ret)) { log.Info("GetFIBApiStatus " + ret.ToString() + " Success!", true); return ret; } else { log.Error("GetFIBApiStatus Faild!", false); return float.NaN; } } #endregion #region FIB加载.ely文件 public Boolean CmdFIBLoadELY(String _ELYFullFileName) { if (File.Exists(_ELYFullFileName) ) { if (REMOTEDesELYPATH != "") { File.Copy(_ELYFullFileName, REMOTEDesELYPATH + ELYFILENAME, true); log.Info("copy " + _ELYFullFileName + " to " + REMOTEDesELYPATH + ELYFILENAME); } Boolean ret = ExecuteCmd(CMD_SMARTFIB_LOAD_ELY); log.Info("CmdFIBLoadELY Success Execute " + _ELYFullFileName, true); return ret; } else { log.Error("CmdFIBLoadELY Faild：" + _ELYFullFileName + " Is Not Exists!", false); return false; } } #endregion #region FIB确认.ely文件 public Boolean CmdFIBEXPOSUREELY() { Boolean ret = WriteDataParams(DP_PATTERNING_MODE, 2); log.Info("DP_PATTERNING_MODE = 2", ret); ret = ExecuteCmd(CMD_SMARTFIB_PREPARE_EXPOSURE); log.Info("CMD_SMARTFIB_PREPARE_EXPOSURE", ret); return ret; } #endregion #region FIB执行.ely文件 public Boolean CmdFIBSTARTELY() { Boolean ret = ExecuteCmd(CMD_FIB_START_MILLING); log.Info("CMD_FIB_START_MILLING", ret); return ret; } #endregion #region 错误代码转义 private String ErrorToString(long lError) { string strError; switch ((ZeissErrorCode)lError) { case 0: strError = "OK"; break; case ZeissErrorCode.API_E_GET_TRANSLATE_FAIL: strError = "Failed to translate parameter into an ID"; break; case ZeissErrorCode.API_E_GET_AP_FAIL: strError = "Failed to get analogue value"; break; case ZeissErrorCode.API_E_GET_DP_FAIL: strError = "Failed to get digital value"; break; case ZeissErrorCode.API_E_GET_BAD_PARAMETER: strError = "Parameter supplied is neither analogue nor digital"; break; case ZeissErrorCode.API_E_SET_TRANSLATE_FAIL: strError = "Failed to translate parameter into an ID"; break; case ZeissErrorCode.API_E_SET_STATE_FAIL: strError = "Failed to set a digital state"; break; case ZeissErrorCode.API_E_SET_FLOAT_FAIL: strError = "Failed to set a float value"; break; case ZeissErrorCode.API_E_SET_FLOAT_LIMIT_LOW: strError = "Value supplied is too low"; break; case ZeissErrorCode.API_E_SET_FLOAT_LIMIT_HIGH: strError = "Value supplied is too high"; break; case ZeissErrorCode.API_E_SET_BAD_VALUE: strError = "Value supplied is of wrong type"; break; case ZeissErrorCode.API_E_SET_BAD_PARAMETER: strError = "Parameter supplied is not analogue nor digital"; break; case ZeissErrorCode.API_E_EXEC_TRANSLATE_FAIL: strError = "Failed to translate command into an ID"; break; case ZeissErrorCode.API_E_EXEC_CMD_FAIL: strError = "Failed to execute command"; break; case ZeissErrorCode.API_E_EXEC_MCF_FAIL: strError = "Failed to execute file macro"; break; case ZeissErrorCode.API_E_EXEC_MCL_FAIL: strError = "Failed to execute library macro"; break; case ZeissErrorCode.API_E_EXEC_BAD_COMMAND: strError = "Command supplied is not implemented"; break; case ZeissErrorCode.API_E_GRAB_FAIL: strError = "Grab command failed"; break; case ZeissErrorCode.API_E_GET_STAGE_FAIL: strError = "Get Stage position failed"; break; case ZeissErrorCode.API_E_MOVE_STAGE_FAIL: strError = "Move Stage position failed"; break; case ZeissErrorCode.API_E_NOT_INITIALISED: strError = "API not initialised"; break; case ZeissErrorCode.API_E_NOTIFY_TRANSLATE_FAIL: // 1020L strError = "Failed to translate parameter to an ID"; break; case ZeissErrorCode.API_E_NOTIFY_SET_FAIL: strError = "Set notification failed"; break; case ZeissErrorCode.API_E_GET_LIMITS_FAIL: strError = "Get limits failed"; break; case ZeissErrorCode.API_E_GET_MULTI_FAIL: strError = "Get multiple parameters failed"; break; case ZeissErrorCode.API_E_SET_MULTI_FAIL: strError = "Set multiple parameters failed"; break; case ZeissErrorCode.API_E_NOT_LICENSED: strError = "Missing API license"; break; case ZeissErrorCode.API_E_NOT_IMPLEMENTED: strError = "Reserved or not implemented"; break; case ZeissErrorCode.API_E_GET_USER_NAME_FAIL: strError = "Failed to get user name"; break; case ZeissErrorCode.API_E_GET_USER_IDLE_FAIL: strError = "Failed to get user idle state"; break; case ZeissErrorCode.API_E_GET_LAST_REMOTING_CONNECT_ERROR_FAIL: strError = "Failed to get the last remoting connection error string"; break; case ZeissErrorCode.API_E_EMSERVER_LOGON_FAILED: strError = "Failed to remotely logon to the EM Server. Username and password may be incorrect or EM Server is not running or User is already logged on"; break; case ZeissErrorCode.API_E_EMSERVER_START_FAILED: strError = "Failed to start the EM Server. This may be because the Server is already running or has an internal error."; break; case ZeissErrorCode.API_E_REMOTING_NOT_CONFIGURED: strError = "Remoting incorrectly configured, use RConfigure to correct"; break; case ZeissErrorCode.API_E_REMOTING_FAILED_TO_CONNECT: strError = "Remoting did not connect to the server"; break; case ZeissErrorCode.API_E_REMOTING_COULD_NOT_CREATE_INTERFACE: strError = "Remoting could not start (unknown reason)"; break; case ZeissErrorCode.API_E_REMOTING_EMSERVER_NOT_RUNNING: strError = "EMServer is not running on the remote machine"; break; case ZeissErrorCode.API_E_REMOTING_NO_USER_LOGGED_IN: strError = "No user is logged into EM Server on the remote machine"; break; default: strError = string.Format("Unknown error code {0}", lError); break; } return strError; } #endregion //20201016 扫图速度 #region Focus rate add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 public Boolean CmdFocusRate(int mFocusSpeed) { string mTempSpeed = CMD_SCANRATE4; switch (mFocusSpeed) { case 3: mTempSpeed= CMD_SCANRATE3; break; case 4: mTempSpeed = CMD_SCANRATE4; break; case 5: mTempSpeed = CMD_SCANRATE5; break; case 6: mTempSpeed = CMD_SCANRATE6; break; case 7: mTempSpeed = CMD_SCANRATE7; break; case 8: mTempSpeed = CMD_SCANRATE8; break; case 9: mTempSpeed = CMD_SCANRATE9; break; case 10: mTempSpeed = CMD_SCANRATE10; break; default: break; } Boolean ret = ExecuteCmd(mTempSpeed); log.Info("调整扫描速度为====="+ mTempSpeed + "===是否成功"+ ret, true); //CMD_SCANRATE4! return ret; } public Boolean CmdFocusScanSpeed(String mFocusSpeed) { Boolean ret = ExecuteCmd(mFocusSpeed); log.Info("调整扫描速度为 " + mFocusSpeed + " " + ret.ToString(), true); return ret; } #endregion add by sun 2020-12-15 拍截面图调用蔡司接口时，要保证扫描速度5以上，自动亮度对比度功能关闭 end #region Save rate public Boolean CmdSaveRate() { //Boolean ret = ExecuteCmd(CMD_SCANRATE6); //log.Info("CMD_SCANRATE6!", ret); Boolean ret = ExecuteCmd(CMD_SCANRATE7); log.Info("CMD_SCANRATE7!", ret); //Boolean ret = ExecuteCmd(CMD_SCANRATE8); //log.Info("CMD_SCANRATE8!", ret); //Boolean ret = ExecuteCmd(CMD_SCANRATE9); //log.Info("CMD_SCANRATE9!", ret); return ret; } #endregion #region Save best rate public Boolean CmdSaveBestRate() { Boolean ret = ExecuteCmd(CMD_SCANRATE8); log.Info("CMD_SCANRATE8!", ret); return ret; } #endregion #region line scan public Boolean CmdLineScan() { Boolean ret = ExecuteCmd(CMD_LINE_AVG); log.Info("CMD_LINE_AVG!", ret); Thread.Sleep(200); CZEMApi.Set("DP_SCANRATE", new VariantWrapper((float)3)); Thread.Sleep(200); CZEMApi.Set("AP_NR_COEFF", new VariantWrapper((float)30)); Thread.Sleep(200); return ret; } #endregion #region pixel scan public Boolean CmdPixelScan() { Boolean ret = ExecuteCmd(CMD_PIXNR); log.Info("CMD_PIXNR!", ret); Thread.Sleep(200); CZEMApi.Set("DP_SCANRATE", new VariantWrapper((float)3)); Thread.Sleep(200); return ret; } #endregion //20201102 远程服务地址 public void SetRemoteDesELYPath(String path) { this.REMOTEDesELYPATH = path; } public void SetRemoteDesMLFPath(String path) { this.REMOTEDesMLFPATH = path; } public void SetReduced(int x, int y, int W, int H) { CZEMApi.Execute("CMD_MODE_NORMAL"); int X = (int)Math.Floor((double)((1024 - W) / 2.0)); int Y = (int)Math.Floor((double)((768 - H) / 2.0)); CZEMApi.Set("AP_RED_RASTER_W", new VariantWrapper((float)W)); CZEMApi.Set("AP_RED_RASTER_H", new VariantWrapper((float)H)); CZEMApi.Set("AP_RED_RASTER_POSN_X", new VariantWrapper((float)X)); CZEMApi.Set("AP_RED_RASTER_POSN_Y", new VariantWrapper((float)Y)); Thread.Sleep(100); CZEMApi.Execute("CMD_MODE_REDUCED"); Thread.Sleep(100); } public void SetReduced1(int x, int y, int W, int H) { CZEMApi.Execute("CMD_MODE_NORMAL"); CZEMApi.Set("AP_RED_RASTER_W", new VariantWrapper((float)W)); CZEMApi.Set("AP_RED_RASTER_H", new VariantWrapper((float)H)); CZEMApi.Set("AP_RED_RASTER_POSN_X", new VariantWrapper((float)x)); CZEMApi.Set("AP_RED_RASTER_POSN_Y", new VariantWrapper((float)y)); Thread.Sleep(100); CZEMApi.Execute("CMD_MODE_REDUCED"); Thread.Sleep(100); } public void CloseReduced() { CZEMApi.Execute("CMD_MODE_NORMAL"); Thread.Sleep(200); } } }