Measure.cs 270 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. NLog.Logger log;
  321. #region 变量定义
  322. //Web接口类
  323. public WebResult wr = null;
  324. //SmartSEM远程路径
  325. public String RemoteELYPath = "";
  326. public String RemoteMLFPath = "";
  327. //扫描周期
  328. private float cycle_time = 0;
  329. //人工干预
  330. public int hand_intervene = 2;
  331. //样品台保护值
  332. public float X_Min = 0;
  333. public float X_Max = 0.13f;
  334. public float Y_Min = 0;
  335. public float Y_Max = 0.13f;
  336. public float Z_Min = 0;
  337. public float Z_Max = 0.05f;
  338. public float T_Min = -4;
  339. public float T_Max = 70;
  340. public float R_Min = -380;
  341. public float R_Max = 380;
  342. public float M_Min = 0;
  343. public float M_Max = 0.012f;
  344. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  345. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  346. //定义一个全局的消息类
  347. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  348. //全局只有一个fatorySEM
  349. static FactoryHardware factorySEM = FactoryHardware.Instance;
  350. ISEMControl iSEM = factorySEM.ISEM;
  351. //@的作用是不用转义字符\\只打一个就行
  352. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  354. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  355. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  356. const String ImageName31 = @"FIBBefore.tif";
  357. const String ImageName32 = @"FIBAfter.tif";
  358. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  359. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  360. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  361. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  362. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  364. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  365. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  366. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  367. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  368. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  369. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  370. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  371. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  372. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  373. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  374. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  375. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  376. const String ElyDeposition = @"Deposition.ely"; //沉积
  377. const String ElyCrossSection = @"CrossSection.ely"; //切割
  378. const float fMin = (float)0.0000002; //单位是米
  379. const float fSateyZ = (float)0.03;//单位是米
  380. public Boolean key_stop = false;
  381. String focus_path = "";
  382. String FIBfocus_path = "";
  383. String StigX_path = "";
  384. String StigY_path = "";
  385. String EDS_path = "";
  386. String data_path = "";
  387. int m_nWorkHoleNo = -1;
  388. //测量文件
  389. private MeasureFile m_measureFile;
  390. public MeasureFile MeasureFile
  391. {
  392. get { return this.m_measureFile; }
  393. set { this.m_measureFile = value; }
  394. }
  395. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  396. private List<MeasureData.CutHole> m_cutHoles;
  397. public List<MeasureData.CutHole> cutHoles
  398. {
  399. get { return this.m_cutHoles; }
  400. set { this.m_cutHoles = value; }
  401. }
  402. //工作文件夹
  403. private string m_WorkingFolder;
  404. public string WorkingFolder
  405. {
  406. get { return this.m_WorkingFolder; }
  407. set { this.m_WorkingFolder = value; }
  408. }
  409. //程序当前路径
  410. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  411. //线程状态
  412. private ThreadStatus m_ThreadStatus;
  413. public ThreadStatus TStatus
  414. {
  415. get { return this.m_ThreadStatus; }
  416. set { this.m_ThreadStatus = value; }
  417. }
  418. #endregion
  419. //构造函数
  420. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  421. {
  422. log = NLog.LogManager.GetCurrentClassLogger();
  423. TStatus = new ThreadStatus();
  424. cutHoles = new List<MeasureData.CutHole>();
  425. //配置远程连接
  426. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  427. }
  428. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  429. public bool InitMeas(MeasureFile a_measureFile)
  430. {
  431. log.Info("进入初始化函数");
  432. m_measureFile = a_measureFile;
  433. List<CutHole> listHoles = m_measureFile.ListCutHole;
  434. foreach (CutHole h in listHoles)
  435. {
  436. if (h.SWITCH == true)
  437. {
  438. m_cutHoles.Add(h);
  439. }
  440. }
  441. if (m_cutHoles.Count == 0)
  442. return false;
  443. if (m_measureFile.MParam.EDS == true)
  444. {
  445. log.Info("能谱分析", true);
  446. Init_MeasDB();
  447. }
  448. return true;
  449. }
  450. //给前台UI发送消息步骤
  451. public void SendMsg(string step_code)
  452. {
  453. arg.Step_Code = step_code;
  454. arg.Time = DateTime.Now;
  455. SendThreadStatus(this, arg);
  456. }
  457. //给前台UI发送孔状态信息
  458. public void SendCutHoleMsg(string a_state, string a_holeName)
  459. {
  460. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  461. arg.HoleName = a_holeName;
  462. arg.State = a_state;
  463. SendCutHolesStatus(this, arg);
  464. }
  465. //测量流程
  466. public void DoMeasure()
  467. {
  468. //创建线程的测量状态的更新
  469. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  470. //检查硬件连接是否正常
  471. log.Warn("测量线程:开始连接硬件...", true);
  472. if (!ConnectHardware())
  473. {
  474. MessageBox.Show("连接电镜失败!","重要错误",MessageBoxButtons.OK,MessageBoxIcon.Error);
  475. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  476. log.Error("测量线程报错:连接硬件硬件连接失败", false);
  477. return;
  478. }
  479. //设置工作文件夹
  480. SetWorkingFolderStr();
  481. //设置SmartSEM远程路径
  482. iSEM.SetRemoteELYPath(RemoteELYPath);
  483. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  484. //增加EDS控制
  485. //将停止键复位
  486. key_stop = false;
  487. //开始测量就将模式设置为SEM
  488. log.Info("测量线程:开始切换到SEM模式", true);
  489. if (!iSEM.CmdFIBModeSEM())
  490. {
  491. log.Error("测量线程报错:开始切换到SEM模式失败。", false);
  492. return;
  493. }
  494. arg.Picture_Information.Work_Status = "SEM";
  495. //设置扫描周期
  496. log.Info("测量线程:设置电镜图像扫描周期为对焦接口程序适合的扫描周期", true);
  497. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  498. Thread.Sleep(200);
  499. cycle_time = iSEM.GetCycleTime();
  500. if (cycle_time == 0)
  501. {
  502. log.Error("测量线程报错:获取扫描周期时间失败", false);
  503. return;
  504. }
  505. Thread.Sleep((int)cycle_time +100);
  506. //开始做各个孔的检测
  507. for (int i = 0; i < m_cutHoles.Count; i++)
  508. {
  509. //自动亮度对比度
  510. log.Info("测量线程:开启自动亮度,对比度调节", true);
  511. iSEM.SetAutoBright(100);
  512. Thread.Sleep(200);
  513. iSEM.SetAutoContrast(100);
  514. Thread.Sleep(200);
  515. //log.Info("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  516. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  517. {
  518. log.Error("测量线程报错:开始设置自动亮度、对比度失败。", false);
  519. return;
  520. }
  521. Thread.Sleep(5000);
  522. log.Warn("测量线程:测试第"+i.ToString()+"个分析点。", true);
  523. //记录测量序号和孔名
  524. m_nWorkHoleNo = i;
  525. arg.HoleName = m_cutHoles[i].HoleName;
  526. //最终数据存放目录
  527. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  528. //对焦数据存放目录
  529. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  530. m_measureFile.MParam.AutoFocus.Path = focus_path;
  531. if (!Directory.Exists(focus_path))
  532. {
  533. Directory.CreateDirectory(focus_path);
  534. }
  535. //StigX数据存放目录
  536. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  537. m_measureFile.MParam.AutoStigX.Path = StigX_path;
  538. if (!Directory.Exists(StigX_path))
  539. {
  540. Directory.CreateDirectory(StigX_path);
  541. }
  542. //StigY数据存放目录
  543. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  544. m_measureFile.MParam.AutoStigY.Path = StigY_path;
  545. if (!Directory.Exists(StigY_path))
  546. {
  547. Directory.CreateDirectory(StigY_path);
  548. }
  549. //EDS数据存放路径
  550. if (m_measureFile.MParam.EDS == true)
  551. {
  552. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  553. m_measureFile.MParam.EDSP.Path = EDS_path;
  554. if (!Directory.Exists(EDS_path))
  555. {
  556. Directory.CreateDirectory(EDS_path);
  557. }
  558. }
  559. //判断孔状态
  560. if (m_cutHoles[i].STATE != State.Ready)
  561. {
  562. log.Warn("测试孔"+ m_cutHoles[i].HoleName+"状态非就绪,不予测量。", true);
  563. continue;
  564. }
  565. //20201127增加Scanrotate Off
  566. iSEM.SetScanRotationOff();
  567. Thread.Sleep(200);
  568. //20.光束等复位
  569. iSEM.SetBeamShiftX(0);
  570. Thread.Sleep(200);
  571. iSEM.SetBeamShiftY(0);
  572. Thread.Sleep(200);
  573. //开始循环工作
  574. if (i == 0)
  575. {
  576. log.Warn("测量线程:分析点" + m_cutHoles[i].HoleName+"开始测量。", true);
  577. m_cutHoles[i].START = DateTime.Now;
  578. //切孔操作-开始
  579. m_cutHoles[i].STATE = State.InProcess;
  580. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  581. log.Warn("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  582. + m_cutHoles[0].Position.X.ToString()+","
  583. + m_cutHoles[0].Position.Y.ToString()+","
  584. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  585. #region 坐标恢复
  586. //0、先移动Z轴到比较低的位置上。
  587. if (m_measureFile.MParam.Tilt)//如果是倾斜样品台,移动Z轴
  588. {
  589. if (!iSEM.SetStageGotoZ(fSateyZ))
  590. {
  591. arg.State = false;
  592. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  593. SendMsg("1-0");
  594. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  595. m_cutHoles[i].STATE = State.Failed;
  596. m_cutHoles[i].END = DateTime.Now;
  597. m_measureFile.Save();
  598. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  599. Thread.Sleep(3000);
  600. continue;
  601. }
  602. while (true)
  603. {
  604. Thread.Sleep(4000);
  605. if (iSEM.GetStageIs() == 0)
  606. {
  607. break;
  608. }
  609. }
  610. //判断是否停止进程
  611. if (key_stop)
  612. {
  613. m_cutHoles[i].STATE = State.Failed;
  614. m_cutHoles[i].END = DateTime.Now;
  615. m_measureFile.Save();
  616. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  617. log.Info("停止键被按下", true);
  618. return;
  619. }
  620. }
  621. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  622. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  623. {
  624. arg.State = false;
  625. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  626. SendMsg("1-0");
  627. log.Error("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  628. m_cutHoles[i].STATE = State.Failed;
  629. m_cutHoles[i].END = DateTime.Now;
  630. m_measureFile.Save();
  631. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  632. Thread.Sleep(3000);
  633. continue;
  634. }
  635. while (true)
  636. {
  637. Thread.Sleep(4000);
  638. if (iSEM.GetStageIs() == 0)
  639. {
  640. break;
  641. }
  642. }
  643. //判断是否停止进程
  644. if (key_stop)
  645. {
  646. m_cutHoles[i].STATE = State.Failed;
  647. m_cutHoles[i].END = DateTime.Now;
  648. m_measureFile.Save();
  649. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  650. log.Info("停止键被按下", true);
  651. return;
  652. }
  653. //2、移动XY轴
  654. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  655. {
  656. arg.State = false;
  657. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  658. SendMsg("1-0");
  659. log.Error("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  660. + m_cutHoles[0].Position.X.ToString() + ","
  661. + m_cutHoles[0].Position.Y.ToString()+ ")", false);
  662. m_cutHoles[i].STATE = State.Failed;
  663. m_cutHoles[i].END = DateTime.Now;
  664. m_measureFile.Save();
  665. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  666. Thread.Sleep(3000);
  667. continue;
  668. }
  669. while (true)
  670. {
  671. Thread.Sleep(4000);
  672. if (iSEM.GetStageIs() == 0)
  673. {
  674. break;
  675. }
  676. }
  677. //判断是否停止进程
  678. if (key_stop)
  679. {
  680. m_cutHoles[i].STATE = State.Failed;
  681. m_cutHoles[i].END = DateTime.Now;
  682. m_measureFile.Save();
  683. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  684. log.Info("停止键被按下", true);
  685. return;
  686. }
  687. //3、恢复Z轴
  688. if (m_measureFile.MParam.Tilt)
  689. {
  690. //恢复Z轴
  691. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  692. {
  693. arg.State = false;
  694. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  695. SendMsg("1-0");
  696. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  697. m_cutHoles[i].STATE = State.Failed;
  698. m_cutHoles[i].END = DateTime.Now;
  699. m_measureFile.Save();
  700. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  701. Thread.Sleep(3000);
  702. continue;
  703. }
  704. while (true)
  705. {
  706. Thread.Sleep(4000);
  707. if (iSEM.GetStageIs() == 0)
  708. {
  709. break;
  710. }
  711. }
  712. //判断是否停止进程
  713. if (key_stop)
  714. {
  715. log.Info("停止键按下。", true);
  716. m_cutHoles[i].STATE = State.Failed;
  717. m_cutHoles[i].END = DateTime.Now;
  718. m_measureFile.Save();
  719. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  720. return;
  721. }
  722. }
  723. arg.State = true;
  724. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  725. SendMsg("1-0");
  726. //4、设置WD
  727. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  728. Thread.Sleep(1000);
  729. #endregion
  730. //第一个点开始测量
  731. if (FirstHole())
  732. {
  733. //保存文件,将测量状态更改
  734. m_cutHoles[i].STATE = State.Success;
  735. m_cutHoles[i].END = DateTime.Now;
  736. m_measureFile.Save();
  737. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  738. }
  739. //失败
  740. else
  741. {
  742. m_cutHoles[i].STATE = State.Failed;
  743. m_cutHoles[i].END = DateTime.Now;
  744. m_measureFile.Save();
  745. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  746. }
  747. }
  748. else
  749. {
  750. //其他孔的测量
  751. log.Info("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  752. m_cutHoles[i].START = DateTime.Now;
  753. m_cutHoles[i].STATE = State.InProcess;
  754. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  755. //其他孔测量之前的初始化
  756. if (!OtherHole_Init())
  757. {
  758. arg.State = false;
  759. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  760. SendMsg("1-0");
  761. Thread.Sleep(3000);
  762. log.Info("测量线程:" + arg.Message, true);
  763. continue;
  764. }
  765. arg.State = true;
  766. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  767. SendMsg("1-0");
  768. //其他孔开始测量
  769. if (OtherHole())
  770. {
  771. //保存文件,将测量状态更改
  772. m_cutHoles[i].STATE = State.Success;
  773. m_cutHoles[i].END = DateTime.Now;
  774. m_measureFile.Save();
  775. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  776. }
  777. //失败
  778. else
  779. {
  780. m_cutHoles[i].STATE = State.Failed;
  781. m_cutHoles[i].END = DateTime.Now;
  782. m_measureFile.Save();
  783. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  784. }
  785. }
  786. if(key_stop)
  787. {
  788. m_cutHoles[i].END = DateTime.Now;
  789. m_cutHoles[i].STATE = State.Ready;
  790. m_measureFile.Save();
  791. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  792. arg.Message = "用户停止测量";
  793. SendMsg("0-0");
  794. break;
  795. }
  796. //两个点之间更换,加延时以便完成显示
  797. Thread.Sleep(3000);
  798. }
  799. }
  800. //检查硬件连接是否正常
  801. public bool ConnectHardware()
  802. {
  803. //返回硬件的连接状态
  804. return iSEM.ConnectStatus();
  805. }
  806. //设置工作文件夹
  807. public bool SetWorkingFolderStr()
  808. {
  809. WorkingFolder = m_measureFile.FilePath;
  810. return true;
  811. }
  812. //插入PT针
  813. public bool InsertPT()
  814. {
  815. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  816. //SendMsg("调用宏插入PT针宏文件" + fn);
  817. iSEM.CMDMCFFilename(fn);
  818. //延时1s??
  819. Thread.Sleep(1000);
  820. return true;
  821. }
  822. //撤出PT针
  823. public bool RetractPT()
  824. {
  825. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  826. //SendMsg("调用宏撤出PT针宏文件" + fn);
  827. iSEM.CMDMCFFilename(fn);
  828. //延时1s??
  829. Thread.Sleep(1000);
  830. return true;
  831. }
  832. //PT沉积
  833. public bool PTWork()
  834. {
  835. //执行PT沉积的ELY文件
  836. if (!ExcuteEly(m_measureFile.MParam.PTTemp))
  837. {
  838. return false;
  839. }
  840. //等待沉积完成
  841. while (true)
  842. {
  843. Thread.Sleep(7000);
  844. if (iSEM.GetFIBMode() == 0)
  845. {
  846. break;
  847. }
  848. }
  849. return true;
  850. }
  851. //FIB切割
  852. public bool FIBWork()
  853. {
  854. //执行PT沉积的ELY文件
  855. if (!ExcuteEly(m_measureFile.MParam.FIBTemp))
  856. {
  857. return false;
  858. }
  859. //等待切割完成
  860. while (true)
  861. {
  862. Thread.Sleep(10000);
  863. if (iSEM.GetFIBMode() == 0)
  864. {
  865. break;
  866. }
  867. }
  868. return true;
  869. }
  870. //执行ELY文件的步骤
  871. public bool ExcuteEly(string a_filename)
  872. {
  873. //执行ELy文件有三个动作
  874. //1. 选择ELY文件
  875. //SendMsg("选择ELY文件");
  876. if (!iSEM.CmdFIBLoadELY(a_filename))
  877. {
  878. //SendMsg("选择ELY文件失败");
  879. return false;
  880. }
  881. Thread.Sleep(1000);
  882. //2. 确认ELY文件
  883. //SendMsg("确认ELY文件");
  884. if (!iSEM.CmdFIBEXPOSUREELY())
  885. {
  886. //SendMsg("确认ELY文件失败");
  887. return false;
  888. }
  889. Thread.Sleep(1000);
  890. //3. 执行ELY文件
  891. //SendMsg("执行ELY文件");
  892. if (!iSEM.CmdFIBSTARTELY())
  893. {
  894. //SendMsg("执行ELY文件失败");
  895. return false;
  896. }
  897. Thread.Sleep(1000);
  898. return true;
  899. }
  900. /// <summary>
  901. ///13. 自动 定位功能,沉积
  902. /// </summary>
  903. /// <returns></returns>
  904. public bool GetPoistion()
  905. {
  906. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  907. int state = 1;
  908. log.Info("测量线程:13.自动定位、沉积-功能自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString(), true);
  909. Thread.Sleep(200);
  910. //1.控制SEM放大600X
  911. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  912. {
  913. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  914. arg.State = false;
  915. SendMsg("1-6");
  916. log.Error("测量线程报错:13.自动定位、沉积-自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "控制失败", false);
  917. return false;
  918. }
  919. Thread.Sleep(200);
  920. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  921. {
  922. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  923. arg.State = false;
  924. SendMsg("1-6");
  925. log.Error("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString() + "控制失败", false);
  926. return false;
  927. }
  928. float current = iSEM.GetMagnification();
  929. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  930. {
  931. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  932. Thread.Sleep(200);
  933. current = iSEM.GetMagnification();
  934. }
  935. arg.State = true;
  936. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  937. SendMsg("1-6");
  938. //判断是否停止进程
  939. if (key_stop)
  940. {
  941. log.Info("停止键按下。", true);
  942. return false;
  943. }
  944. //判断是否为仅拍照,不是则执行FIB操作
  945. if (!m_measureFile.MParam.Is_Photograph)
  946. {
  947. log.Info("测量线程:切换到FIB模式。", true);
  948. //6.设置FIB拍照参数——扫描时间、束流等
  949. //7.控制FIB自动亮度、对比度
  950. Thread.Sleep(200);
  951. if (!iSEM.CmdFIBModeFIB())
  952. {
  953. arg.Message = "FIB模式切换失败";
  954. arg.State = false;
  955. SendMsg("1-8");
  956. log.Error("测量线程报错:切换到FIB模式失败。", false);
  957. return false;
  958. }
  959. arg.State = true;
  960. arg.Picture_Information.Work_Status = "FIB";
  961. arg.Message = "FIB模式切换成功";
  962. SendMsg("1-8");
  963. Thread.Sleep(1000);
  964. //判断是否停止进程
  965. if (key_stop)
  966. {
  967. log.Info("停止键按下。", true);
  968. return false;
  969. }
  970. //8.控制FIB拍照
  971. //9.保存照片======更改路径
  972. //20201103,FIB使用定位的放大倍数
  973. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  974. arg.Picture_Information.Picture_FullPath = fileName2;
  975. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  976. Thread.Sleep(200);
  977. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  978. Thread.Sleep(200);
  979. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  980. Thread.Sleep(200);
  981. //FIB的放大位数,将来会改
  982. log.Info("测量线程:设置FIB放大倍数"+ m_measureFile.MParam.Location_Magnification.ToString(), true);
  983. //20201103,FIB使用定位的放大倍数
  984. if (!iSEM.SetFIBMagnification(m_measureFile.MParam.Location_Magnification))
  985. {
  986. arg.Message = "FIB放大倍数设置失败";
  987. arg.State = false;
  988. SendMsg("1-9");
  989. log.Error("测量线程失败:FIB放大倍数设置失败。", false);
  990. return false;
  991. }
  992. arg.Message = "FIB放大倍数设置成功";
  993. arg.State = true;
  994. SendMsg("1-9");
  995. Thread.Sleep(200);
  996. //判断是否停止进程
  997. if (key_stop)
  998. {
  999. log.Info("停止键按下。", true);
  1000. return false;
  1001. }
  1002. //4、设置WD
  1003. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1004. Thread.Sleep(1000);
  1005. //20201127增加自动亮度对比度
  1006. if(m_measureFile.MParam.FIBDo)
  1007. {
  1008. if(m_measureFile.MParam.FIBAutoBC)
  1009. {
  1010. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1011. float m_TempBrightness = 50.0f;
  1012. float m_TempContrast = 30.0f;
  1013. if (m_measureFile.MParam.SampleName == "3")
  1014. {
  1015. m_TempBrightness = 50.0f;
  1016. m_TempContrast = 30.0f;
  1017. iSEM.SetAutoVideoOff();
  1018. Thread.Sleep(200);
  1019. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1020. Thread.Sleep(200);
  1021. iSEM.SetContrast(m_TempContrast); //30.0f
  1022. Thread.Sleep(200);
  1023. }
  1024. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1025. {
  1026. iSEM.SetAutoVideoBrightnessAndContrast();
  1027. //20201128陈工建议增加
  1028. Thread.Sleep(200);
  1029. iSEM.SetAutoBright(100);
  1030. Thread.Sleep(200);
  1031. iSEM.SetAutoContrast(100);
  1032. Thread.Sleep(5000);
  1033. }
  1034. }
  1035. else
  1036. {
  1037. iSEM.SetAutoVideoOff();
  1038. Thread.Sleep(200);
  1039. iSEM.SetBrightness(m_measureFile.MParam.FIBB);
  1040. Thread.Sleep(200);
  1041. iSEM.SetContrast(m_measureFile.MParam.FIBC);
  1042. Thread.Sleep(200);
  1043. }
  1044. }
  1045. //拍照前改变速度,延时
  1046. iSEM.CloseReduced();
  1047. Thread.Sleep(200);
  1048. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1049. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1050. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1051. Thread.Sleep(200);
  1052. cycle_time = iSEM.GetCycleTime();
  1053. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1054. if (!GetImage(fileName2))
  1055. {
  1056. arg.Message = "FIB拍照失败";
  1057. arg.State = false;
  1058. SendMsg("1-11");
  1059. log.Error("测量线程报错:FIB拍照失败。", false);
  1060. return false;
  1061. }
  1062. arg.State = true;
  1063. arg.Picture_Information.Picture_FullPath = fileName2;
  1064. arg.Message = "FIB拍照成功";
  1065. SendMsg("1-11");
  1066. Thread.Sleep(200);
  1067. SendMsg("1-16");
  1068. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1069. Thread.Sleep(200);
  1070. cycle_time = iSEM.GetCycleTime();
  1071. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1072. //判断是否停止进程
  1073. if (key_stop)
  1074. {
  1075. log.Info("停止键按下。", true);
  1076. return false;
  1077. }
  1078. iSEM.CmdFIBModeSEM();
  1079. Thread.Sleep(200);
  1080. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1081. log.Info("测量线程:调用图像处理接口,准备移动样品台", true);
  1082. log.Info("文件名=" + fileName2, true);
  1083. log.Info("样品类型=" + m_measureFile.MParam.SampleName, true);
  1084. log.Info("供应商名称=" + m_measureFile.MParam.Firm, true);
  1085. wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1086. log.Info("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString()+")", true);
  1087. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1088. if (state == 1)
  1089. {
  1090. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1091. float xc = (x1 + x2)/2;
  1092. float yc = (y1 + y2)/2;
  1093. x0 = xc - 512;
  1094. y0 = 384 - yc;
  1095. log.Info("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1096. px = iSEM.GetPixelSize();
  1097. //修改FIB切割的ELY文件坐标
  1098. XmlDocument xmlDoc = new XmlDocument();
  1099. xmlDoc.Load(m_measureFile.MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1100. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1101. if (xns != null)
  1102. {
  1103. XmlAttributeCollection attributeCol = xns.Attributes;
  1104. //遍历自己点属性
  1105. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1106. log.Info("XML-Width_a = " + width_a.ToString(), true);
  1107. foreach (XmlAttribute attri in attributeCol)
  1108. {
  1109. if (attri.Name == "x")
  1110. {
  1111. attri.InnerText = ((x0 * px)*1000000 - width_a).ToString();
  1112. log.Info("XML-TopLeft-X = " + attri.InnerText, true);
  1113. }
  1114. else if (attri.Name == "y")
  1115. {
  1116. attri.InnerText = ((y0 * px)*1000000-2.791).ToString();
  1117. log.Info("XML-TopLeft-Y = " + attri.InnerText, true);
  1118. }
  1119. }
  1120. }
  1121. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1122. if (xns != null)
  1123. {
  1124. XmlAttributeCollection attributeCol = xns.Attributes;
  1125. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1126. //遍历自己点属性
  1127. foreach (XmlAttribute attri in attributeCol)
  1128. {
  1129. if (attri.Name == "x")
  1130. {
  1131. attri.InnerText = ((x0 * px)*1000000 - width).ToString();
  1132. }
  1133. else if (attri.Name == "y")
  1134. {
  1135. attri.InnerText = (((y0 * px) *1000000) + 2 - 2.791).ToString();
  1136. }
  1137. }
  1138. }
  1139. xmlDoc.Save(m_measureFile.MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1140. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1141. if (m_measureFile.MParam.PT)
  1142. {
  1143. xmlDoc = new XmlDocument();
  1144. xmlDoc.Load(m_measureFile.MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1145. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1146. if (xns != null)
  1147. {
  1148. XmlAttributeCollection attributeCol = xns.Attributes;
  1149. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1150. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1151. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1152. //遍历自己点属性
  1153. foreach (XmlAttribute attri in attributeCol)
  1154. {
  1155. if (attri.Name == "x")
  1156. {
  1157. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1158. }
  1159. else if (attri.Name == "y")
  1160. {
  1161. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1162. }
  1163. }
  1164. }
  1165. xmlDoc.Save(m_measureFile.MParam.PTTemp);
  1166. }
  1167. if (hand_intervene == 1)
  1168. {
  1169. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1170. }
  1171. }
  1172. else
  1173. {
  1174. arg.Message = "图像接口参数state返回值为零";
  1175. arg.State = false;
  1176. SendMsg("1-12");
  1177. if (hand_intervene == 1)
  1178. {
  1179. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1180. {
  1181. return false;
  1182. }
  1183. }
  1184. else
  1185. {
  1186. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1187. return false;
  1188. }
  1189. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1190. return false;
  1191. }
  1192. //判断是否停止进程
  1193. if (key_stop)
  1194. {
  1195. log.Info("停止键按下", true);
  1196. return false;
  1197. }
  1198. //11.自动工具样品类型参数确定是否需要PT沉积
  1199. if (m_measureFile.MParam.PT)
  1200. {
  1201. if (!iSEM.CmdFIBModeFIB())
  1202. {
  1203. log.Error("测量线程报错:切换到SEM模式失败", false);
  1204. return false;
  1205. }
  1206. Thread.Sleep(200);
  1207. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1208. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1209. {
  1210. log.Info("测量线程:插入PT针" + arg.Message, true);
  1211. if (!InsertPT())
  1212. {
  1213. arg.Message = "插入PT针失败";
  1214. arg.State = false;
  1215. SendMsg("1-13");
  1216. log.Error("测量线程报错:"+ arg.Message, false);
  1217. return false;
  1218. }
  1219. arg.State = true;
  1220. arg.Message = "插入PT针成功";
  1221. SendMsg("1-13");
  1222. }
  1223. //判断是否停止进程
  1224. if (key_stop)
  1225. {
  1226. log.Info("停止键按下", true);
  1227. return false;
  1228. }
  1229. //3. 根据坐标进行PT沉积
  1230. if (!PTWork())
  1231. {
  1232. arg.Message = "PT沉积失败";
  1233. arg.State = false;
  1234. SendMsg("1-14");
  1235. log.Error("测量线程报错:" + arg.Message, false);
  1236. return false;
  1237. }
  1238. arg.State = true;
  1239. arg.Message = "PT沉积成功";
  1240. SendMsg("1-14");
  1241. //判断是否停止进程
  1242. if (key_stop)
  1243. {
  1244. log.Info("停止键按下", true);
  1245. return false;
  1246. }
  1247. //15.根据样品类型决定是否撤出PT针
  1248. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1249. {
  1250. if (!RetractPT())
  1251. {
  1252. arg.Message = "撤出PT针失败";
  1253. arg.State = false;
  1254. SendMsg("1-15");
  1255. log.Error("测量线程报错:" + arg.Message, false);
  1256. return false;
  1257. }
  1258. arg.State = true;
  1259. arg.Message = "撤出PT针成功";
  1260. SendMsg("1-15");
  1261. }
  1262. //判断是否停止进程
  1263. if (key_stop)
  1264. {
  1265. log.Info("停止键按下", true);
  1266. return false;
  1267. }
  1268. if (!iSEM.CmdFIBModeSEM())
  1269. {
  1270. //arg.Message = "切割前SEM拍照失败。";
  1271. //arg.State = false;
  1272. //SendMsg("1-17");
  1273. log.Error("测量线程报错:切换到SEM模式失败", false);
  1274. return false;
  1275. }
  1276. }
  1277. }
  1278. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1279. float[] firstPosition = iSEM.GetStagePosition();
  1280. m_cutHoles[0].Position.X = firstPosition[0];
  1281. m_cutHoles[0].Position.Y = firstPosition[1];
  1282. m_cutHoles[0].Position.Z = firstPosition[2];
  1283. m_cutHoles[0].Position.T = firstPosition[3];
  1284. m_cutHoles[0].Position.R = firstPosition[4];
  1285. m_cutHoles[0].Position.M = firstPosition[5];
  1286. //这里要调用文件保存功能
  1287. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1288. + firstPosition[1].ToString() + ","
  1289. + firstPosition[2].ToString() + ","
  1290. + firstPosition[3].ToString() + ","
  1291. + firstPosition[4].ToString() + ","
  1292. + firstPosition[5].ToString() + ")";
  1293. arg.State = true;
  1294. SendMsg("1-16");
  1295. //判断是否停止进程
  1296. if (key_stop)
  1297. {
  1298. log.Info("停止键按下", true);
  1299. return false;
  1300. }
  1301. return true;
  1302. }
  1303. /// <summary>
  1304. /// 14. FIB切割
  1305. /// </summary>
  1306. /// <returns></returns>
  1307. public bool FIBCross()
  1308. {
  1309. int state = 0;
  1310. #if CHECK
  1311. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1312. if (mag < 200)
  1313. {
  1314. mag = 200;
  1315. }
  1316. String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
  1317. iSEM.SetMagnification(mag);
  1318. Thread.Sleep(2000);
  1319. iSEM.CmdSaveRate();
  1320. Thread.Sleep(200);
  1321. cycle_time = iSEM.GetCycleTime();
  1322. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1323. if (!GetImage(fileName1))
  1324. {
  1325. arg.Message = "切割前SEM拍照失败。";
  1326. arg.State = false;
  1327. SendMsg("1-17");
  1328. log.Info("测量线程报错:SEM切割前图像拍照失败", false);
  1329. return false;
  1330. }
  1331. iSEM.CmdFocusRate();
  1332. Thread.Sleep(200);
  1333. cycle_time = iSEM.GetCycleTime();
  1334. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1335. arg.Message = "切割前SEM拍照成功。";
  1336. arg.Picture_Information.Picture_FullPath = fileName1;
  1337. arg.State = true;
  1338. SendMsg("1-17");
  1339. #endif
  1340. if (!iSEM.CmdFIBModeFIB())
  1341. {
  1342. arg.Message = "切换到FIB模式失败。";
  1343. arg.State = false;
  1344. SendMsg("1-18");
  1345. log.Error("测量线程报错:切换到SEM模式失败", false);
  1346. return false;
  1347. }
  1348. arg.Message = "切换到FIB模式成功。";
  1349. arg.State = true;
  1350. SendMsg("1-18");
  1351. Thread.Sleep(1000);
  1352. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1353. float current = iSEM.GetMagnification();
  1354. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  1355. {
  1356. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1357. Thread.Sleep(200);
  1358. current = iSEM.GetMagnification();
  1359. }
  1360. Thread.Sleep(2000);
  1361. //14.自动控制FIB切割
  1362. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1363. //2.控制FIB进行切割
  1364. //以上1、2步全部用ELY文件代替
  1365. if (!FIBWork())
  1366. {
  1367. arg.Message = "FIB切割失败";
  1368. arg.State = false;
  1369. SendMsg("1-19");
  1370. log.Error("测量线程报错:" + arg.Message, false);
  1371. return false;
  1372. }
  1373. arg.State = true;
  1374. arg.Message = "FIB切割成功";
  1375. SendMsg("1-19");
  1376. Thread.Sleep(300);
  1377. //判断是否停止进程
  1378. if (key_stop)
  1379. {
  1380. log.Info("停止键按下", true);
  1381. return false;
  1382. }
  1383. //做切割后SEM的拍照
  1384. log.Info("测量线程:切割后SEM拍照", true);
  1385. if (!iSEM.CmdFIBModeSEM())
  1386. {
  1387. //arg.Message = "切割后SEM拍照失败。";
  1388. //arg.State = false;
  1389. //SendMsg("1-20");
  1390. log.Error("测量线程报错:切换到SEM模式失败", false);
  1391. return false;
  1392. }
  1393. Thread.Sleep(1000);
  1394. #if CHECK
  1395. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
  1396. iSEM.SetMagnification(mag);
  1397. Thread.Sleep(2000);
  1398. iSEM.CmdSaveRate();
  1399. Thread.Sleep(200);
  1400. cycle_time = iSEM.GetCycleTime();
  1401. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1402. if (!GetImage(fileName2))
  1403. {
  1404. arg.Message = "切割后SEM拍照失败。";
  1405. arg.State = false;
  1406. SendMsg("1-20");
  1407. log.Info("测量线程报错:SEM切割后图像拍照失败", false);
  1408. return false;
  1409. }
  1410. arg.Picture_Information.Picture_FullPath = fileName2;
  1411. arg.Message = "切割后SEM拍照成功。";
  1412. arg.State = true;
  1413. SendMsg("1-20");
  1414. iSEM.CmdFocusRate();
  1415. Thread.Sleep(200);
  1416. cycle_time = iSEM.GetCycleTime();
  1417. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1418. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1419. wr.Img_Cut_Success(fileName1, fileName2, out state);
  1420. log.Info("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
  1421. if (state == 0)
  1422. {
  1423. log.Info("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
  1424. arg.Message = "图像接口参数state返回值为零";
  1425. arg.State = false;
  1426. SendMsg("1-22");
  1427. if (hand_intervene == 1)
  1428. {
  1429. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1430. {
  1431. return false;
  1432. }
  1433. }
  1434. else
  1435. {
  1436. return false;
  1437. }
  1438. log.Info("测量线程报错:" + arg.Message, false);
  1439. }
  1440. arg.State = true;
  1441. log.Info("验证切割准确性成功。", true);
  1442. arg.Message = "FIB切割校验成功";
  1443. SendMsg("1-22");
  1444. //判断是否停止进程
  1445. if (key_stop)
  1446. {
  1447. log.Info("停止键按下。", true);
  1448. return false;
  1449. }
  1450. #endif
  1451. return true;
  1452. }
  1453. /// <summary>
  1454. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1455. /// </summary>
  1456. /// <returns></returns>
  1457. public bool FindCross()
  1458. {
  1459. float x2 = 0, y2 = 0;
  1460. int state = 0;
  1461. //切换到SEM模式
  1462. if (!iSEM.CmdFIBModeSEM())
  1463. {
  1464. arg.Message = "SEM模式切换失败";
  1465. arg.State = false;
  1466. SendMsg("1-23");
  1467. log.Error("测量线程报错:" + arg.Message, false);
  1468. return false;
  1469. }
  1470. arg.State = true;
  1471. arg.Message = "SEM模式切换成功";
  1472. SendMsg("1-23");
  1473. arg.Picture_Information.Work_Status = "SEM";
  1474. Thread.Sleep(1000);
  1475. //判断是否停止进程
  1476. if (key_stop)
  1477. {
  1478. log.Info("停止键按下", true);
  1479. return false;
  1480. }
  1481. //1.控制SEM放大到300倍
  1482. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  1483. {
  1484. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  1485. arg.State = false;
  1486. SendMsg("1-24");
  1487. log.Error("测量线程报错:" + arg.Message, false);
  1488. return false;
  1489. }
  1490. Thread.Sleep(200);
  1491. //iSEM.SetAutoVideoBrightnessAndContrast();
  1492. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1493. float m_TempBrightness = 50.0f;
  1494. float m_TempContrast = 30.0f;
  1495. if (m_measureFile.MParam.SampleName == "3")
  1496. {
  1497. m_TempBrightness = 48.0f;
  1498. m_TempContrast = 29.0f;
  1499. }
  1500. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1501. iSEM.SetAutoVideoOff();
  1502. Thread.Sleep(200);
  1503. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1504. Thread.Sleep(200);
  1505. iSEM.SetContrast(m_TempContrast); //30.0f
  1506. Thread.Sleep(2000);
  1507. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1508. if (mag < 200)
  1509. {
  1510. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1511. if (m_measureFile.MParam.SampleName == "3")
  1512. mag = 400;
  1513. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1514. mag = 200;
  1515. }
  1516. if (!iSEM.SetMagnification(mag))
  1517. {
  1518. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1519. arg.State = false;
  1520. SendMsg("1-24");
  1521. log.Error("测量线程报错:" + arg.Message, false);
  1522. return false;
  1523. }
  1524. Thread.Sleep(200);
  1525. float current = iSEM.GetMagnification();
  1526. Thread.Sleep(200);
  1527. while (Math.Abs(current - mag) > 2)
  1528. {
  1529. iSEM.SetMagnification(mag);
  1530. Thread.Sleep(200);
  1531. current = iSEM.GetMagnification();
  1532. Thread.Sleep(200);
  1533. }
  1534. arg.State = true;
  1535. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1536. SendMsg("1-24");
  1537. Thread.Sleep(2000);
  1538. //判断是否停止进程
  1539. if (key_stop)
  1540. {
  1541. log.Info("停止键按下", true);
  1542. return false;
  1543. }
  1544. //3.控制SEM拍照
  1545. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1546. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1547. String fileName4 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName4;
  1548. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1549. log.Info("fileName4====================" + fileName4, true);
  1550. arg.Picture_Information.Picture_FullPath = fileName4;
  1551. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1552. Thread.Sleep(200);
  1553. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1554. Thread.Sleep(200);
  1555. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1556. Thread.Sleep(200);
  1557. //拍照前改变速度,延时
  1558. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1559. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1560. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1561. Thread.Sleep(200);
  1562. cycle_time = iSEM.GetCycleTime();
  1563. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1564. if (!GetImage(fileName4))
  1565. {
  1566. arg.State = false;
  1567. arg.Message = "SEM拍照找切割位置失败";
  1568. SendMsg("1-25");
  1569. log.Error("测量线程报错:" + arg.Message, false);
  1570. return false;
  1571. }
  1572. arg.Picture_Information.Picture_FullPath = fileName4;
  1573. arg.State = true;
  1574. arg.Message = "SEM拍照成功";
  1575. SendMsg("1-25");
  1576. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1577. Thread.Sleep(200);
  1578. cycle_time = iSEM.GetCycleTime();
  1579. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1580. //判断是否停止进程
  1581. if (key_stop)
  1582. {
  1583. return false;
  1584. }
  1585. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1586. //5.根据坐标控制SEM移动到切孔位置,居中
  1587. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  1588. log.Info("文件名=" + fileName4, true);
  1589. wr.Img_Trapezoid_Top_Center_Position(fileName4,Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  1590. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1591. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1592. if (state == 1)
  1593. {
  1594. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1595. if (!MoveToPixByMoveStage(x2, y2))
  1596. {
  1597. arg.State = false;
  1598. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1599. SendMsg("1-26");
  1600. log.Error("测量线程报错:" + arg.Message, false);
  1601. return false;
  1602. }
  1603. //判断是否移动完成
  1604. while (true)
  1605. {
  1606. Thread.Sleep(4000);
  1607. if (iSEM.GetStageIs() == 0)
  1608. {
  1609. break;
  1610. }
  1611. }
  1612. arg.State = true;
  1613. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1614. SendMsg("1-26");
  1615. //高倍到低倍不进行对焦
  1616. //拍照前改变速度,延时
  1617. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1618. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1619. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1620. Thread.Sleep(200);
  1621. cycle_time = iSEM.GetCycleTime();
  1622. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1623. //String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1624. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1625. String fileName10 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName10;
  1626. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1627. log.Info("fileName10====================" + fileName10, true);
  1628. if (!GetImage(fileName10))
  1629. {
  1630. //arg.State = false;
  1631. //arg.Message = "SEM拍照失败";
  1632. //SendMsg("1-25");
  1633. //return false;
  1634. log.Info("测量线程报错:找到已切割的位置拍照失败", true);
  1635. }
  1636. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1637. Thread.Sleep(200);
  1638. cycle_time = iSEM.GetCycleTime();
  1639. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1640. if (hand_intervene == 1)
  1641. {
  1642. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1643. }
  1644. }
  1645. else
  1646. {
  1647. arg.Message = "图像接口参数state返回值为零";
  1648. arg.State = false;
  1649. SendMsg("1-26");
  1650. if (hand_intervene == 1)
  1651. {
  1652. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1653. {
  1654. return false;
  1655. }
  1656. }
  1657. else
  1658. {
  1659. return false;
  1660. }
  1661. log.Error("测量线程报错:" + arg.Message, false);
  1662. return false;
  1663. }
  1664. //判断是否停止进程
  1665. if (key_stop)
  1666. {
  1667. log.Info("停止键按下", true);
  1668. return false;
  1669. }
  1670. return true;
  1671. }
  1672. /// <summary>
  1673. /// 17.自动控制SEM拍截面照
  1674. /// </summary>
  1675. /// <returns></returns>
  1676. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1677. {
  1678. int state = 0;
  1679. #region 设置拍照的电压
  1680. log.Info("测量线程:设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true);
  1681. //1、放大倍数参数photograph_
  1682. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Photograph_Voltage))
  1683. {
  1684. arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1685. arg.State = false;
  1686. SendMsg("1-27");
  1687. log.Error("测量线程报错:" + arg.Message, false);
  1688. return false;
  1689. }
  1690. //add
  1691. #endregion
  1692. Thread.Sleep(200);
  1693. #region 设置拍照的放大倍数
  1694. log.Info("测量线程:设置拍照放大倍数====" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  1695. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  1696. {
  1697. arg.Message = "放大倍数调整失败";
  1698. arg.State = false;
  1699. SendMsg("1-27");
  1700. log.Error("测量线程报错:" + arg.Message, false);
  1701. return false;
  1702. }
  1703. float set = m_measureFile.MParam.Photograph_Magnification;
  1704. float current = iSEM.GetMagnification();
  1705. while(Math.Abs(current- set) > 1)
  1706. {
  1707. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  1708. Thread.Sleep(200);
  1709. current = iSEM.GetMagnification();
  1710. }
  1711. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString()+ "成功";
  1712. arg.State = true;
  1713. SendMsg("1-27");
  1714. Thread.Sleep(3000 + (Int32)cycle_time);
  1715. //判断是否停止进程
  1716. if (key_stop)
  1717. {
  1718. log.Info("停止键按下", true);
  1719. return false;
  1720. }
  1721. #endregion
  1722. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1723. //if(!iSEM.SetAutoVideoBrightnessAndContrast())
  1724. //{
  1725. // log.Info("测量线程报错:自动开启亮度对比度失败", false);
  1726. // return false;
  1727. //}
  1728. //Thread.Sleep(5000);
  1729. //2.控制SEM自动对焦、亮度、对比度-接口
  1730. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1731. if ((m_measureFile.MParam.SampleName == "2")||(m_measureFile.MParam.SampleName == "3"))
  1732. iSEM.SetReduced(402, 128, 600, 600);
  1733. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1734. iSEM.SetReduced(402, 128, 340, 256);
  1735. Thread.Sleep(200);
  1736. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1737. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1738. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1739. Thread.Sleep(200);
  1740. cycle_time = iSEM.GetCycleTime();
  1741. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1742. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1743. if (!iSEM.SetAutoVideoOff())
  1744. {
  1745. log.Error("测量线程报错:关闭自动亮度对比度失败", false);
  1746. return false;
  1747. }
  1748. Thread.Sleep(5000);
  1749. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1750. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1751. if (ImageFocus1(false))
  1752. {
  1753. arg.Message = "自动对焦完成";
  1754. arg.State = true;
  1755. SendMsg("1-28");
  1756. }
  1757. else
  1758. {
  1759. arg.Message = "自动对焦失败";
  1760. arg.State = false;
  1761. SendMsg("1-28");
  1762. log.Error("测量线程报错:" + arg.Message, false);
  1763. return false;
  1764. }
  1765. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1766. iSEM.CloseReduced();
  1767. Thread.Sleep(200);
  1768. cycle_time = iSEM.GetCycleTime();
  1769. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1770. //判断是否停止进程
  1771. if (key_stop)
  1772. {
  1773. log.Info("停止键按下", true);
  1774. return false;
  1775. }
  1776. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1777. float m_TempBrightness = 50.0f;
  1778. float m_TempContrast = 30.0f;
  1779. if (m_measureFile.MParam.SampleName == "3")
  1780. {
  1781. m_TempBrightness = 50f;
  1782. m_TempContrast = 29f;
  1783. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1784. Thread.Sleep(200);
  1785. iSEM.SetContrast(m_TempContrast); //30.0f
  1786. Thread.Sleep(200);
  1787. }
  1788. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1789. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1790. {
  1791. log.Error("测量线程报错:自动开启亮度对比度失败", false);
  1792. return false;
  1793. }
  1794. Thread.Sleep(5000);
  1795. //3、设置SEM补偿角度
  1796. if (m_measureFile.MParam.Is_Photograph == false)
  1797. {
  1798. log.Info("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString()+"度", true);
  1799. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1800. {
  1801. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1802. arg.State = false;
  1803. SendMsg("1-29");
  1804. log.Error("测量线程报错:" + arg.Message, false);
  1805. return false;
  1806. }
  1807. arg.State = true;
  1808. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1809. SendMsg("1-29");
  1810. Thread.Sleep(200);
  1811. //判断是否停止进程
  1812. if (key_stop)
  1813. {
  1814. log.Error("停止键按下", false);
  1815. return false;
  1816. }
  1817. }
  1818. //4、拍照,5、保存照片
  1819. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1820. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1821. String fileName5 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  1822. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1823. log.Info("fileName5====================" + fileName5, true);
  1824. arg.Picture_Information.Picture_FullPath = fileName5;
  1825. arg.Picture_Information.Work_Status = "SEM";
  1826. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1827. Thread.Sleep(200);
  1828. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1829. Thread.Sleep(200);
  1830. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1831. Thread.Sleep(200);
  1832. //拍照前改变速度,延时
  1833. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1834. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1835. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1836. Thread.Sleep(200);
  1837. cycle_time = iSEM.GetCycleTime();
  1838. Thread.Sleep(Convert.ToInt32(cycle_time)*2);
  1839. if (!GetImage(fileName5))
  1840. {
  1841. arg.Message = "SEM拍照失败";
  1842. arg.State = false;
  1843. SendMsg("1-30");
  1844. log.Error("测量线程报错:" + arg.Message, false);
  1845. return false;
  1846. }
  1847. arg.Picture_Information.Picture_FullPath = fileName5;
  1848. arg.State = true;
  1849. arg.Message = "SEM拍照成功";
  1850. SendMsg("1-30");
  1851. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1852. Thread.Sleep(200);
  1853. cycle_time = iSEM.GetCycleTime();
  1854. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1855. //判断是否停止进程
  1856. if (key_stop)
  1857. {
  1858. log.Info("停止键按下", true);
  1859. return false;
  1860. }
  1861. #endregion
  1862. if (m_measureFile.MParam.Is_Photograph == false)
  1863. {
  1864. #region 对当前矩形进行旋转校正
  1865. //8,计算切割面区域偏移角度及方向
  1866. float degree = 0;
  1867. int direction = 0;
  1868. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  1869. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1870. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1871. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1872. if (state == 1)
  1873. {
  1874. //梯形角度
  1875. iSEM.SetScanRotationOn();
  1876. Thread.Sleep(200);
  1877. //20201128陈工要求,谭博返回角度*0.7
  1878. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  1879. Thread.Sleep(200);
  1880. arg.State = true;
  1881. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1882. SendMsg("1-31");
  1883. if (hand_intervene == 1)
  1884. {
  1885. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1886. }
  1887. }
  1888. else
  1889. {
  1890. arg.Message = "图像接口参数State返回值为零";
  1891. arg.State = false;
  1892. SendMsg("1-31");
  1893. if(hand_intervene == 1)
  1894. {
  1895. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1896. {
  1897. return false;
  1898. }
  1899. }
  1900. else
  1901. {
  1902. //return false;
  1903. }
  1904. log.Error("测量线程报错:" + arg.Message, false);
  1905. }
  1906. //判断是否停止进程
  1907. if (key_stop)
  1908. {
  1909. log.Info("停止键按下", true);
  1910. return false;
  1911. }
  1912. Thread.Sleep(200);
  1913. //12拍照
  1914. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1915. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1916. String fileName6 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  1917. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1918. log.Info("fileName6====================" + fileName6, true);
  1919. arg.Picture_Information.Picture_FullPath = fileName6;
  1920. arg.Picture_Information.Work_Status = "SEM";
  1921. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1922. Thread.Sleep(200);
  1923. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1924. Thread.Sleep(200);
  1925. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1926. Thread.Sleep(200);
  1927. //拍照前改变速度,延时
  1928. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1929. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1930. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1931. Thread.Sleep(200);
  1932. cycle_time = iSEM.GetCycleTime();
  1933. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1934. if (!GetImage(fileName6))
  1935. {
  1936. arg.Message = "SEM拍照失败";
  1937. arg.State = false;
  1938. SendMsg("1-33");
  1939. log.Error("测量线程报错:" + arg.Message, false);
  1940. return false;
  1941. }
  1942. arg.Picture_Information.Picture_FullPath = fileName6;
  1943. arg.State = true;
  1944. arg.Message = "SEM拍照成功";
  1945. SendMsg("1-33");
  1946. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1947. Thread.Sleep(200);
  1948. cycle_time = iSEM.GetCycleTime();
  1949. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1950. //判断是否停止进程
  1951. if (key_stop)
  1952. {
  1953. log.Info("停止键按下", true);
  1954. return false;
  1955. }
  1956. #endregion
  1957. #region 获取两个位置上及放大倍数
  1958. //计算两个测量区域坐标
  1959. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1960. List<float> mag = new List<float>();
  1961. System.Drawing.Point ct0;
  1962. float mag1, mag2, magMax;
  1963. //log.Info("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1964. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  1965. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  1966. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1967. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  1968. "输入产品" + m_measureFile.MParam.Firm.ToString()
  1969. + "输出中心点1为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  1970. + ",输出放大倍数1==" + mag[0]
  1971. + "倍,输出中心点2为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  1972. + "输出放大倍数2==" + mag[0]
  1973. + "倍,输出中心点3为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1974. #endregion
  1975. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1976. {
  1977. arg.State = true;
  1978. arg.Message = "获取位置及放大倍数成功";
  1979. SendMsg("1-34");
  1980. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1981. float xs = iSEM.GetBeamShiftX();
  1982. Thread.Sleep(200);
  1983. float ys = iSEM.GetBeamShiftY();
  1984. Thread.Sleep(200);
  1985. float xpCur = iSEM.GetStageAtX();
  1986. Thread.Sleep(200);
  1987. float ypCur = iSEM.GetStageAtY();
  1988. Thread.Sleep(200);
  1989. log.Info("测量线程:原来的光束偏移量x = " + xs.ToString()
  1990. + "y=" + ys.ToString() + ","
  1991. + "原来样品台的位置x= " + xpCur.ToString()
  1992. + "y=" + ypCur.ToString(), true);
  1993. #endregion
  1994. //找到放大倍数最大值
  1995. magMax = mag[0];
  1996. for (int m = 1; m < mag.Count; m++)
  1997. {
  1998. if (mag[m] > magMax)
  1999. {
  2000. magMax = mag[m];
  2001. }
  2002. }
  2003. #region 移动到梯形左上角
  2004. //20201127将视野移动到梯形左上角位置
  2005. MoveToPix(ct0.X, ct0.Y);
  2006. log.Info("测量线程:移动到对焦点( " + ct0.X.ToString()
  2007. + "," + ct0.Y.ToString() + ")", true);
  2008. //关闭自动亮度对比度
  2009. iSEM.SetAutoVideoOff();
  2010. Thread.Sleep(2000);
  2011. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2012. if (m_measureFile.MParam.SampleName == "3")
  2013. {
  2014. m_TempBrightness = 50f;
  2015. m_TempContrast = 29f;
  2016. iSEM.SetBrightness(m_TempBrightness); //50.0f
  2017. Thread.Sleep(200);
  2018. iSEM.SetContrast(m_TempContrast); //30.0f
  2019. Thread.Sleep(200);
  2020. }
  2021. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  2022. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  2023. if ( m_measureFile.MParam.SampleName == "3")
  2024. {
  2025. iSEM.SetReduced(402, 128, 480, 450);
  2026. }else
  2027. {
  2028. iSEM.SetReduced(402, 128, 340, 256);
  2029. }
  2030. Thread.Sleep(200);
  2031. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  2032. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2033. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  2034. Thread.Sleep(200);
  2035. cycle_time = iSEM.GetCycleTime();
  2036. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2037. //放大到6000倍
  2038. iSEM.SetMagnification(magMax / 2);
  2039. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2040. set = magMax / 2;
  2041. current = iSEM.GetMagnification();
  2042. while (Math.Abs(current - set) > 1)
  2043. {
  2044. iSEM.SetMagnification(set);
  2045. Thread.Sleep(200);
  2046. current = iSEM.GetMagnification();
  2047. }
  2048. log.Info("========测量线程:开始自动聚焦--6000倍!", true);
  2049. if (m_measureFile.MParam.SampleName == "3")
  2050. {
  2051. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  2052. iSEM.SetBrightness(50.0f); //50.0f
  2053. Thread.Sleep(200);
  2054. iSEM.SetContrast(30.0f); //30.0f
  2055. Thread.Sleep(200);
  2056. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  2057. }
  2058. //自动对焦
  2059. if (!ImageFocus1(true))
  2060. {
  2061. log.Info("========测量线程:6000倍自动聚焦失败!", true);
  2062. return false;
  2063. }
  2064. log.Info("========测量线程:6000倍自动聚焦成功!", true);
  2065. ////自动消像散
  2066. //if (!ImageStig1())
  2067. //{
  2068. // return false;
  2069. //}
  2070. //放大到10000倍
  2071. iSEM.SetMagnification(magMax);
  2072. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2073. set = magMax;
  2074. current = iSEM.GetMagnification();
  2075. while (Math.Abs(current - set) > 1)
  2076. {
  2077. iSEM.SetMagnification(set);
  2078. Thread.Sleep(200);
  2079. current = iSEM.GetMagnification();
  2080. }
  2081. log.Info("========测量线程:开始自动聚焦--12000倍!", true);
  2082. //自动对焦
  2083. if (!ImageFocus1(true))
  2084. {
  2085. log.Info("========测量线程:12000倍自动聚焦失败!", true);
  2086. return false;
  2087. }
  2088. log.Info("========测量线程:12000倍自动聚焦成功!", true);
  2089. ////自动消像散
  2090. //if (!ImageStig1())
  2091. //{
  2092. // return false;
  2093. //}
  2094. ////放大到20000倍
  2095. //iSEM.SetMagnification(magMax*2);
  2096. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2097. //set = magMax*2;
  2098. //current = iSEM.GetMagnification();
  2099. //while (Math.Abs(current - set) > 1)
  2100. //{
  2101. // iSEM.SetMagnification(set);
  2102. // Thread.Sleep(200);
  2103. // current = iSEM.GetMagnification();
  2104. //}
  2105. ////自动对焦
  2106. //if (!ImageFocus1())
  2107. //{
  2108. // return false;
  2109. //}
  2110. iSEM.CloseReduced();
  2111. Thread.Sleep(200);
  2112. cycle_time = iSEM.GetCycleTime();
  2113. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2114. #endregion
  2115. #region 循环拍照
  2116. for (int n = 0; n < ct.Count; n++)
  2117. {
  2118. #region 恢复到拍照的状态
  2119. iSEM.SetStageGotoX(xpCur);
  2120. while (true)
  2121. {
  2122. Thread.Sleep(4000);
  2123. if (iSEM.GetStageIs() == 0)
  2124. {
  2125. break;
  2126. }
  2127. }
  2128. iSEM.SetStageGotoY(ypCur);
  2129. while (true)
  2130. {
  2131. Thread.Sleep(4000);
  2132. if (iSEM.GetStageIs() == 0)
  2133. {
  2134. break;
  2135. }
  2136. }
  2137. //恢复原来的放大倍数
  2138. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  2139. {
  2140. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2141. return false;
  2142. }
  2143. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2144. set = m_measureFile.MParam.Photograph_Magnification;
  2145. current = iSEM.GetMagnification();
  2146. while (Math.Abs(current - set) > 1)
  2147. {
  2148. iSEM.SetMagnification(set);
  2149. Thread.Sleep(200);
  2150. current = iSEM.GetMagnification();
  2151. }
  2152. //恢复BeamShift的百分比值
  2153. iSEM.SetBeamShiftX(xs);
  2154. Thread.Sleep(200);
  2155. iSEM.SetBeamShiftY(ys);
  2156. Thread.Sleep(200);
  2157. #endregion
  2158. #region 移动到指定点位置
  2159. if (!MoveToPix(ct[n].X, ct[n].Y))
  2160. {
  2161. arg.State = false;
  2162. arg.Message = "移动到第一个点位置失败";
  2163. SendMsg("1-" + (35 + n).ToString());
  2164. //移动到第一个点失败
  2165. log.Error("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2166. }
  2167. log.Info("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2168. + "," + ct[n].Y.ToString() + ")", true);
  2169. #endregion
  2170. #region 如果是第一个点,则1W倍对焦
  2171. if (n == 0)
  2172. {
  2173. ////在第一个点上放大1W倍对焦
  2174. //if (!iSEM.SetMagnification(mag[n]))
  2175. //{
  2176. // log.Info("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2177. // return false;
  2178. //}
  2179. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2180. //while (true)
  2181. //{
  2182. // current = iSEM.GetMagnification();
  2183. // if (Math.Abs(current - mag[n]) < 1)
  2184. // {
  2185. // Thread.Sleep(200);
  2186. // break;
  2187. // }
  2188. // Thread.Sleep(200);
  2189. // iSEM.SetMagnification(set);
  2190. // Thread.Sleep(200);
  2191. //}
  2192. //if (m_measureFile.MParam.SampleName == "2")
  2193. //{
  2194. // //窗口对焦
  2195. // iSEM.SetReduced1(340, 1, 340, 256);
  2196. // Thread.Sleep(200);
  2197. // iSEM.CmdFocusRate();
  2198. // Thread.Sleep(200);
  2199. // cycle_time = iSEM.GetCycleTime();
  2200. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2201. // //自动对焦
  2202. // if (!ImageFocus1(false))
  2203. // {
  2204. // return false;
  2205. // }
  2206. // //恢复全屏
  2207. // iSEM.CloseReduced();
  2208. // Thread.Sleep(200);
  2209. // cycle_time = iSEM.GetCycleTime();
  2210. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2211. //}
  2212. //else
  2213. //{
  2214. // //窗口对焦
  2215. // //iSEM.SetReduced(402, 128, 800, 600);
  2216. // //Thread.Sleep(200);
  2217. // iSEM.CmdFocusRate();
  2218. // Thread.Sleep(200);
  2219. // cycle_time = iSEM.GetCycleTime();
  2220. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2221. // //自动对焦
  2222. // if (!ImageFocus1(false))
  2223. // {
  2224. // return false;
  2225. // }
  2226. // //恢复全屏
  2227. // //iSEM.CloseReduced();
  2228. // //Thread.Sleep(200);
  2229. // cycle_time = iSEM.GetCycleTime();
  2230. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2231. //}
  2232. log.Info("========测量线程:进入内部观察,不对焦!", true);
  2233. //增亮图像
  2234. iSEM.SetAutoVideoOff();
  2235. Thread.Sleep(200);
  2236. float currentBright = iSEM.GetBrightness();
  2237. Thread.Sleep(200);
  2238. float currentContrast = iSEM.GetContrast();
  2239. Thread.Sleep(200);
  2240. //add by sun 2020-12-17 黄工觉得太亮
  2241. int m_BrightMore = 2;
  2242. int m_ContrastMore = 2;
  2243. if (m_measureFile.MParam.SampleName == "3")
  2244. {
  2245. m_BrightMore = 0;
  2246. m_ContrastMore = 0;
  2247. }
  2248. //add by sun 2020-12-17 黄工觉得太亮 end
  2249. iSEM.SetBrightness(currentBright + m_BrightMore);
  2250. Thread.Sleep(200);
  2251. iSEM.SetContrast(currentContrast + m_ContrastMore);
  2252. Thread.Sleep(200);
  2253. }
  2254. #endregion
  2255. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  2256. //if((m_measureFile.MParam.SampleName=="3")&&(n==0))
  2257. //{
  2258. // if (!GetImageFromSEM(mag[n]/2))
  2259. // log.Info("测量线程报错:第一个区域放大一半倍数" + (mag[n]/2).ToString() + "控制失败", true);
  2260. //}
  2261. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  2262. #region 拍照
  2263. if (!iSEM.SetMagnification(mag[n]))
  2264. {
  2265. arg.State = false;
  2266. arg.Message = "移动到第一个点位置拍照失败";
  2267. SendMsg("1-35");
  2268. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2269. return false;
  2270. }
  2271. log.Info("========测量线程:移动到第一个点位置拍照完成!", true);
  2272. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2273. set = mag[n];
  2274. current = iSEM.GetMagnification();
  2275. while (Math.Abs(current - set) > 1)
  2276. {
  2277. iSEM.SetMagnification(set);
  2278. Thread.Sleep(200);
  2279. current = iSEM.GetMagnification();
  2280. }
  2281. //获取像素大小
  2282. lsize.Add(iSEM.GetPixelSize());
  2283. Thread.Sleep(200);
  2284. //String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2285. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  2286. String fileName7 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag[n].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + n.ToString() + "-" + ImageNameTwo_1;
  2287. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  2288. log.Info("fileName7====================" + fileName7, true);
  2289. arg.Picture_Information.Picture_FullPath = fileName7;
  2290. arg.Picture_Information.Work_Status = "SEM";
  2291. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2292. Thread.Sleep(200);
  2293. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2294. Thread.Sleep(200);
  2295. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2296. Thread.Sleep(200);
  2297. //拍照前改变速度,延时
  2298. iSEM.CmdLineScan();
  2299. Thread.Sleep(200);
  2300. cycle_time = iSEM.GetCycleTime();
  2301. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2302. if (!GetImage(fileName7))
  2303. {
  2304. arg.State = false;
  2305. arg.Message = "移动到第一个点位置失败";
  2306. SendMsg("1-35");
  2307. log.Error("测量线程报错:" + arg.Message, false);
  2308. return false;
  2309. }
  2310. log.Info("========测量线程:移动到第一个点位置完成!", true);
  2311. iSEM.CmdPixelScan();
  2312. Thread.Sleep(200);
  2313. limg_path.Add(fileName7);
  2314. arg.Picture_Information.Picture_FullPath = fileName7;
  2315. arg.State = true;
  2316. arg.Message = "移动到第一个点位置拍照成功";
  2317. SendMsg("1-35");
  2318. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2319. Thread.Sleep(200);
  2320. cycle_time = iSEM.GetCycleTime();
  2321. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2322. // add by zjx 在测量图上显示放大倍数和像素大小等信息
  2323. float size = iSEM.GetPixelSize();
  2324. SaveMeasDataPic(fileName7,mag[n], size);
  2325. // add by zjx 在测量图上显示放大倍数和像素大小等信息 end
  2326. #endregion
  2327. }
  2328. #endregion
  2329. if (hand_intervene == 1)
  2330. {
  2331. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2332. }
  2333. }
  2334. else
  2335. {
  2336. if (hand_intervene == 1)
  2337. {
  2338. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2339. {
  2340. // return false;
  2341. }
  2342. }
  2343. else
  2344. {
  2345. //return false;
  2346. }
  2347. arg.State = false;
  2348. arg.Message = "获取位置及放大倍数失败";
  2349. SendMsg("1-34");
  2350. log.Error("测量线程报错:" + arg.Message, false);
  2351. }
  2352. //判断是否停止进程
  2353. if (key_stop)
  2354. {
  2355. log.Info("停止键按下", true);
  2356. return false;
  2357. }
  2358. }
  2359. ////14光束复位和Rotation关闭开关
  2360. //arg.Message = "光束复位成功";
  2361. //arg.State = true;
  2362. //SendMsg("1-36");
  2363. iSEM.SetTiltAngleOff();
  2364. Thread.Sleep(200);
  2365. iSEM.SetScanRotationOff();
  2366. Thread.Sleep(200);
  2367. iSEM.SetBeamShiftX(0);
  2368. Thread.Sleep(200);
  2369. iSEM.SetBeamShiftY(0);
  2370. Thread.Sleep(200);
  2371. //判断是否停止进程
  2372. if (key_stop)
  2373. {
  2374. return false;
  2375. }
  2376. return true;
  2377. }
  2378. //第一个孔的测试过程
  2379. public bool FirstHole()
  2380. {
  2381. // add by zjx 2020-12-18 为了测试只做能谱部分
  2382. if (m_measureFile.MParam.IsonlyEDSForDebug == true)
  2383. {
  2384. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2385. log.Warn("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2386. if (!SetVoltageAndIPROBE())
  2387. {
  2388. log.Error("测量线程:第一孔=====设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", false);
  2389. return false;
  2390. }
  2391. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2392. //设置拉直的放大倍数
  2393. log.Info("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), true);
  2394. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2395. {
  2396. log.Error("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), false);
  2397. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2398. arg.State = false;
  2399. SendMsg("1-1");
  2400. return false;
  2401. }
  2402. float current = iSEM.GetMagnification();
  2403. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2404. {
  2405. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2406. Thread.Sleep(200);
  2407. current = iSEM.GetMagnification();
  2408. }
  2409. arg.Message = "拉直放大倍数设置成功!";
  2410. arg.State = true;
  2411. SendMsg("1-1");
  2412. Thread.Sleep(2000);
  2413. //自动化流程-每个点都需要补偿54度
  2414. if (m_measureFile.MParam.Is_Photograph == false)
  2415. {
  2416. log.Info("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2417. if (!TiltCorrection(54.0f))
  2418. {
  2419. log.Error("测量线程报错:倾斜补偿角度为54度失败", false);
  2420. arg.Message = "角度补偿54度失败!";
  2421. arg.State = false;
  2422. SendMsg("1-2");
  2423. return false;
  2424. }
  2425. arg.Message = "角度补偿54度成功!";
  2426. arg.State = true;
  2427. SendMsg("1-2");
  2428. Thread.Sleep(1000);
  2429. //判断是否停止进程
  2430. if (key_stop)
  2431. {
  2432. log.Info("停止键按下", true);
  2433. return false;
  2434. }
  2435. }
  2436. // 2是5/6类样品,不需要拉直
  2437. if (m_measureFile.MParam.SampleName != "2")
  2438. {
  2439. log.Warn("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2440. if (!Straighten_Handle())
  2441. {
  2442. log.Info("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2443. return false;
  2444. }
  2445. log.Info("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2446. //判断是否停止进程
  2447. if (key_stop)
  2448. {
  2449. log.Info("停止键按下。", true);
  2450. return false;
  2451. }
  2452. }
  2453. else
  2454. {
  2455. arg.Message = "拉直操作自动对焦成功!";
  2456. arg.State = true;
  2457. SendMsg("1-3");
  2458. Thread.Sleep(1000);
  2459. arg.Message = "拉直拍照成功!";
  2460. arg.Picture_Information.Picture_FullPath = "";
  2461. arg.State = true;
  2462. SendMsg("1-4");
  2463. Thread.Sleep(1000);
  2464. arg.Message = "拉直操作完成";
  2465. arg.State = true;
  2466. SendMsg("1-5");
  2467. Thread.Sleep(1000);
  2468. }
  2469. //13. 自动 定位功能
  2470. log.Warn("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2471. if (!GetPoistion())
  2472. {
  2473. log.Error("测量线程报错:自动定位失败,程序退出。", false);
  2474. return false;
  2475. }
  2476. log.Info("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2477. //判断是否停止进程
  2478. if (key_stop)
  2479. {
  2480. log.Info("停止键按下。", true);
  2481. return false;
  2482. }
  2483. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2484. if (m_measureFile.MParam.Is_Photograph == false)
  2485. {
  2486. if (m_measureFile.MParam.IsCutingForDebug)
  2487. {
  2488. log.Warn("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!==" + m_measureFile.MParam.IsCutingForDebug, true);
  2489. if (!FIBCross())
  2490. {
  2491. log.Error("测量线程报错:自动控制FIB切割失败。", false);
  2492. return false;
  2493. }
  2494. log.Info("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2495. }
  2496. }
  2497. //del by sun 2020-12-15 temp end
  2498. //判断是否停止进程
  2499. if (key_stop)
  2500. {
  2501. return false;
  2502. }
  2503. //16.找到切割位置
  2504. if (m_measureFile.MParam.Is_Photograph == false)
  2505. {
  2506. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2507. if (!FindCross())
  2508. {
  2509. return false;
  2510. }
  2511. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2512. //判断是否停止进程
  2513. if (key_stop)
  2514. {
  2515. return false;
  2516. }
  2517. }
  2518. log.Warn("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2519. //将过程17最后的拍照图片提出给18步进行调用
  2520. List<String> limg_path = new List<string>();
  2521. List<float> lsize = new List<float>();
  2522. //17.自动控制SEM拍截面照
  2523. if (!ShotSection(ref limg_path, ref lsize))
  2524. {
  2525. //return false;
  2526. }
  2527. log.Info("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2528. //判断是否停止进程
  2529. if (key_stop)
  2530. {
  2531. return false;
  2532. }
  2533. //这段是临时的
  2534. //arg.State = true;
  2535. //arg.Message = "测量尺寸成功";
  2536. //SendMsg("1-40");
  2537. //18.自动层高分析
  2538. if (m_measureFile.MParam.Is_Photograph == false)
  2539. {
  2540. log.Warn("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2541. float size = iSEM.GetPixelSize();
  2542. int state = 1;
  2543. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2544. if (state == 0)
  2545. {
  2546. arg.Message = "测量尺寸失败";
  2547. arg.State = false;
  2548. SendMsg("1-40");
  2549. return false;
  2550. }
  2551. arg.State = true;
  2552. arg.Message = "测量尺寸成功";
  2553. SendMsg("1-40");
  2554. log.Info("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2555. }
  2556. }
  2557. //add by zjx 2020-12-18 为了测试只做能谱部分 end
  2558. //19.能谱分析
  2559. if (m_measureFile.MParam.EDS)
  2560. {
  2561. log.Warn("测量线程:第一个孔的测试过程-19.能谱分析开始===" + m_measureFile.MParam.EDS, true);
  2562. EDSAnalysis();
  2563. log.Info("测量线程:第一个孔的测试过程-19.能谱分析结束===" + m_measureFile.MParam.EDS, true);
  2564. }
  2565. //20.复位
  2566. log.Info("===========测量线程:20.复位开始", true);
  2567. BeamShiftReset();
  2568. return true;
  2569. }
  2570. //非第一个孔的测试过程
  2571. public bool OtherHole()
  2572. {
  2573. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2574. log.Warn("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2575. if (!SetVoltageAndIPROBE())
  2576. {
  2577. log.Error("测量线程:非第一孔==设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", false);
  2578. return false;
  2579. }
  2580. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2581. //设置拉直的放大倍数
  2582. log.Info("设置拉直放大倍数!");
  2583. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2584. {
  2585. log.Error("拉直放大倍数设置失败,程序退出。", false);
  2586. arg.Message = "拉直放大倍数设置失败!";
  2587. arg.State = false;
  2588. SendMsg("1-1");
  2589. return false;
  2590. }
  2591. float current = iSEM.GetMagnification();
  2592. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2593. {
  2594. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2595. Thread.Sleep(200);
  2596. current = iSEM.GetMagnification();
  2597. }
  2598. arg.Message = "拉直放大倍数设置成功!";
  2599. arg.State = true;
  2600. SendMsg("1-1");
  2601. Thread.Sleep(2000);
  2602. //自动化流程-每个点都需要补偿54度
  2603. if (m_measureFile.MParam.Is_Photograph == false)
  2604. {
  2605. log.Info("角度补偿54度!");
  2606. if (!TiltCorrection(54.0f))
  2607. {
  2608. arg.Message = "角度补偿54度失败!";
  2609. arg.State = false;
  2610. SendMsg("1-2");
  2611. return false;
  2612. }
  2613. arg.Message = "角度补偿54度成功!";
  2614. arg.State = true;
  2615. SendMsg("1-2");
  2616. Thread.Sleep(2000);
  2617. //判断是否停止进程
  2618. if (key_stop)
  2619. {
  2620. return false;
  2621. }
  2622. }
  2623. if (m_measureFile.MParam.SampleName != "2")
  2624. {
  2625. log.Warn("开始进行拉直操作!");
  2626. if (!Straighten_Handle())
  2627. {
  2628. log.Info("测量线程报错:拉直操作失败。", true);
  2629. return false;
  2630. }
  2631. //判断是否停止进程
  2632. if (key_stop)
  2633. {
  2634. log.Info("停止键按下。", true);
  2635. return false;
  2636. }
  2637. }
  2638. else
  2639. {
  2640. arg.Message = "拉直操作自动对焦成功!";
  2641. arg.State = true;
  2642. SendMsg("1-3");
  2643. Thread.Sleep(1000);
  2644. arg.Message = "拉直拍照成功!";
  2645. arg.Picture_Information.Picture_FullPath = "";
  2646. arg.State = true;
  2647. SendMsg("1-4");
  2648. Thread.Sleep(1000);
  2649. arg.Message = "拉直操作完成";
  2650. arg.State = true;
  2651. SendMsg("1-5");
  2652. }
  2653. //13. 自动 定位功能
  2654. log.Info("开始进行自动定位!");
  2655. if (!GetPoistion())
  2656. {
  2657. return false;
  2658. }
  2659. //判断是否停止进程
  2660. if (key_stop)
  2661. {
  2662. return false;
  2663. }
  2664. //14.自动控制FIB切割
  2665. if (m_measureFile.MParam.Is_Photograph == false)
  2666. {
  2667. log.Warn("开始进行FIB切割!");
  2668. if (!FIBCross())
  2669. {
  2670. return false;
  2671. }
  2672. }
  2673. //判断是否停止进程
  2674. if (key_stop)
  2675. {
  2676. return false;
  2677. }
  2678. // 16.找到切割位置
  2679. if (m_measureFile.MParam.Is_Photograph == false)
  2680. {
  2681. log.Warn("开始找切割位置!");
  2682. if (!FindCross())
  2683. {
  2684. return false;
  2685. }
  2686. //判断是否停止进程
  2687. if (key_stop)
  2688. {
  2689. return false;
  2690. }
  2691. }
  2692. //将过程17最后的拍照图片提出给18步进行调用
  2693. List<String> limg_path = new List<string>();
  2694. List<float> lsize = new List<float>();
  2695. //17.自动控制SEM拍截面照
  2696. log.Warn("开始控制SEM拍截面照!");
  2697. if (!ShotSection(ref limg_path, ref lsize))
  2698. {
  2699. //return false;
  2700. }
  2701. //判断是否停止进程
  2702. if (key_stop)
  2703. {
  2704. return false;
  2705. }
  2706. //这段是临时的
  2707. //arg.State = true;
  2708. //arg.Message = "测量尺寸成功";
  2709. //SendMsg("1-40");
  2710. //18.自动层高分析
  2711. if (m_measureFile.MParam.Is_Photograph == false)
  2712. {
  2713. log.Warn("开始进行层高分析!");
  2714. float size = iSEM.GetPixelSize();
  2715. int state = 1;
  2716. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2717. if (state == 0)
  2718. {
  2719. arg.Message = "测量尺寸失败";
  2720. arg.State = false;
  2721. SendMsg("1-40");
  2722. return false;
  2723. }
  2724. arg.State = true;
  2725. arg.Message = "测量尺寸成功";
  2726. SendMsg("1-40");
  2727. }
  2728. //19.能谱分析
  2729. if (m_measureFile.MParam.EDS)
  2730. {
  2731. log.Warn("开始进行能谱分析!");
  2732. EDSAnalysis();
  2733. }
  2734. //20.复位 del by sun 2020-12-15
  2735. //BeamShiftReset();
  2736. //del by sun 2020-12-15 end
  2737. return true;
  2738. }
  2739. //测试完第一个孔后的样品台初始化操作。
  2740. //再调用CommonWork执行非第一个孔的测试过程
  2741. public bool OtherHole_Init()
  2742. {
  2743. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2744. #region 初始化
  2745. //1、不只拍照,且不是倾斜观测,则移动T轴
  2746. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Tilt == false)
  2747. {
  2748. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2749. if (!iSEM.SetStageGotoT(0))
  2750. {
  2751. log.Error("样品台归零失败", false);
  2752. return false;
  2753. }
  2754. while (true)
  2755. {
  2756. Thread.Sleep(5000);
  2757. if (iSEM.GetStageIs() == 0)
  2758. {
  2759. break;
  2760. }
  2761. }
  2762. //判断是否停止进程
  2763. if (key_stop)
  2764. {
  2765. log.Info("停止键按下", true);
  2766. return false;
  2767. }
  2768. }
  2769. //2、如果是倾斜观测,则移动Z轴
  2770. if(m_measureFile.MParam.Tilt==true)
  2771. {
  2772. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2773. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_measureFile.MParam.ZDistance/1000))
  2774. //20201109, Z轴降到安全的位置上
  2775. if(!iSEM.SetStageGotoZ(fSateyZ))
  2776. {
  2777. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2778. return false;
  2779. }
  2780. while (true)
  2781. {
  2782. Thread.Sleep(5000);
  2783. if (iSEM.GetStageIs() == 0)
  2784. {
  2785. break;
  2786. }
  2787. }
  2788. //判断是否停止进程
  2789. if (key_stop)
  2790. {
  2791. log.Info("停止键按下", true);
  2792. return false;
  2793. }
  2794. }
  2795. //3. 根据光镜坐标控制样品台移动
  2796. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2797. {
  2798. //SendMsg("移动失败");
  2799. log.Error("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2800. return false;
  2801. }
  2802. log.Info("移动R轴到="+ currentHole.Position.R.ToString(), true);
  2803. while (true)
  2804. {
  2805. Thread.Sleep(5000);
  2806. if (iSEM.GetStageIs() == 0)
  2807. {
  2808. break;
  2809. }
  2810. }
  2811. //判断是否停止进程
  2812. if (key_stop)
  2813. {
  2814. log.Info("停止键按下", true);
  2815. return false;
  2816. }
  2817. if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2818. {
  2819. //SendMsg("移动失败");
  2820. log.Error("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString()+"," +currentHole.Position.X.ToString()+")", false);
  2821. return false;
  2822. }
  2823. log.Info("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2824. while (true)
  2825. {
  2826. Thread.Sleep(10000);
  2827. if (iSEM.GetStageIs() == 0)
  2828. {
  2829. break;
  2830. }
  2831. }
  2832. //判断是否停止进程
  2833. if (key_stop)
  2834. {
  2835. log.Info("停止键按下", true);
  2836. return false;
  2837. }
  2838. //4、倾斜观测时恢复Z轴
  2839. if (m_measureFile.MParam.Tilt == true)
  2840. {
  2841. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2842. if (currentHole.Position.Z > 0.043)
  2843. {
  2844. log.Error("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2845. return false;
  2846. }
  2847. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2848. {
  2849. log.Error("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2850. return false;
  2851. }
  2852. while (true)
  2853. {
  2854. Thread.Sleep(5000);
  2855. if (iSEM.GetStageIs() == 0)
  2856. {
  2857. break;
  2858. }
  2859. }
  2860. //判断是否停止进程
  2861. if (key_stop)
  2862. {
  2863. log.Info("停止键按下", true);
  2864. return false;
  2865. }
  2866. }
  2867. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2868. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Tilt == false)
  2869. {
  2870. if (!iSEM.SetStageGotoT(54))
  2871. {
  2872. log.Info("测量线程报错:校正54度有误", true);
  2873. return false;
  2874. }
  2875. while (true)
  2876. {
  2877. Thread.Sleep(5000);
  2878. if (iSEM.GetStageIs() == 0)
  2879. {
  2880. break;
  2881. }
  2882. }
  2883. }
  2884. //判断是否停止进程
  2885. if (key_stop)
  2886. {
  2887. log.Info("停止键按下", true);
  2888. return false;
  2889. }
  2890. //4、设置WD
  2891. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2892. Thread.Sleep(1000);
  2893. #endregion
  2894. return true;
  2895. }
  2896. //初始化拉直操作
  2897. public bool Straighten_Handle()
  2898. {
  2899. if (m_measureFile.MParam.Tilt)
  2900. {
  2901. //倾斜样品台,SEM视野是黑色的
  2902. log.Info("测量线程:恢复到工作位置后重新调亮图像。", true);
  2903. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2904. {
  2905. log.Error("测量线程报错:重新设置到标准工作距离失败。", false);
  2906. return false;
  2907. }
  2908. Thread.Sleep(7000); //自动亮度对比度使用
  2909. }
  2910. //1、自动对焦
  2911. log.Info("测量线程报错:拉直操作前自动对焦开始", true);
  2912. iSEM.SetReduced(402, 128, 340, 256);
  2913. Thread.Sleep(200);
  2914. //add by sun 2020-12-15
  2915. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2916. //add by sun 2020-12-15 end
  2917. Thread.Sleep(200);
  2918. cycle_time = iSEM.GetCycleTime();
  2919. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2920. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2921. float m_TempBrightness = 50.0f;
  2922. float m_TempContrast = 30.0f;
  2923. if (m_measureFile.MParam.SampleName == "3")
  2924. {
  2925. m_TempBrightness = 48.0f;
  2926. m_TempContrast = 29.0f;
  2927. }
  2928. //add by sun 2020-12-18 解决1类样品拉直太白造成无法拉直问题
  2929. if (m_measureFile.MParam.SampleName == "1")
  2930. {
  2931. m_TempBrightness = 50.0f;
  2932. m_TempContrast = 29.0f;
  2933. }
  2934. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2935. iSEM.SetAutoVideoOff();
  2936. Thread.Sleep(200);
  2937. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2938. Thread.Sleep(200);
  2939. iSEM.SetContrast(m_TempContrast);//30.0f
  2940. Thread.Sleep(200);
  2941. if (!ImageFocus1(false))
  2942. {
  2943. log.Error("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2944. arg.Message = "拉直操作自动对焦失败!";
  2945. arg.State = false;
  2946. SendMsg("1-3");
  2947. return false;
  2948. }
  2949. iSEM.CloseReduced();
  2950. Thread.Sleep(200);
  2951. cycle_time = iSEM.GetCycleTime();
  2952. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2953. iSEM.SetAutoVideoBrightnessAndContrast();
  2954. Thread.Sleep(5000);
  2955. arg.Message = "拉直操作自动对焦成功!";
  2956. arg.State = true;
  2957. SendMsg("1-3");
  2958. //判断是否停止进程
  2959. if (key_stop)
  2960. {
  2961. log.Info("停止键按下。", true);
  2962. return false;
  2963. }
  2964. //2、拍张照片
  2965. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2966. log.Info("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2967. //拍照前改变速度,延时
  2968. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2969. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2970. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2971. Thread.Sleep(200);
  2972. cycle_time = iSEM.GetCycleTime();
  2973. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2974. if (!GetImage(fileName0))
  2975. {
  2976. log.Error("测量线程报错:拉直拍照失败", false);
  2977. arg.Message = "拉直拍照失败";
  2978. arg.State = false;
  2979. SendMsg("1-4");
  2980. return false;
  2981. }
  2982. arg.Message = "拉直拍照成功!";
  2983. arg.Picture_Information.Picture_FullPath = fileName0;
  2984. arg.State = true;
  2985. SendMsg("1-4");
  2986. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2987. Thread.Sleep(200);
  2988. cycle_time = iSEM.GetCycleTime();
  2989. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2990. //3、华为接口,获取旋转角度
  2991. float degree = 0;
  2992. int direction = 0;
  2993. int state = 1;
  2994. wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  2995. log.Info("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  2996. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  2997. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  2998. if (state == 0)
  2999. {
  3000. log.Info("测量线程:图像处理接口参数state返回为零" ,false);
  3001. arg.Message = "图像处理接口参数state返回为零";
  3002. arg.State = false;
  3003. SendMsg("1-5");
  3004. if (hand_intervene == 1)
  3005. {
  3006. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  3007. {
  3008. return false;
  3009. }
  3010. }
  3011. else
  3012. {
  3013. return false;
  3014. }
  3015. return false;
  3016. }
  3017. if (direction == 2)
  3018. {
  3019. degree = -degree;
  3020. }
  3021. if (degree != 0)
  3022. {
  3023. //4、拉直,旋转R轴
  3024. log.Info("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  3025. //选择之前,先降Z轴
  3026. float Zpos = iSEM.GetStageAtZ();
  3027. Thread.Sleep(200);
  3028. log.Info("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  3029. if (!iSEM.SetStageGotoZ(fSateyZ))
  3030. {
  3031. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  3032. return false;
  3033. }
  3034. while (true)
  3035. {
  3036. Thread.Sleep(4000);
  3037. if (iSEM.GetStageIs() == 0)
  3038. {
  3039. break;
  3040. }
  3041. }
  3042. //判断是否停止进程
  3043. if (key_stop)
  3044. {
  3045. log.Info("停止键按下", true);
  3046. return false;
  3047. }
  3048. iSEM.SetStageDeltaR(degree);
  3049. while (true)
  3050. {
  3051. Thread.Sleep(4000);
  3052. if (iSEM.GetStageIs() == 0)
  3053. {
  3054. break;
  3055. }
  3056. }
  3057. if (!iSEM.SetStageGotoZ(Zpos))
  3058. {
  3059. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  3060. return false;
  3061. }
  3062. while (true)
  3063. {
  3064. Thread.Sleep(4000);
  3065. if (iSEM.GetStageIs() == 0)
  3066. {
  3067. break;
  3068. }
  3069. }
  3070. //判断是否停止进程
  3071. if (key_stop)
  3072. {
  3073. log.Info("停止键按下", true);
  3074. return false;
  3075. }
  3076. //4、设置WD
  3077. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3078. Thread.Sleep(1000);
  3079. }
  3080. arg.Message = "拉直操作完成";
  3081. arg.State = true;
  3082. SendMsg("1-5");
  3083. return true;
  3084. }
  3085. //角度补偿
  3086. public bool TiltCorrection(float a_fAngle)
  3087. {
  3088. if (!iSEM.SetTiltAngleOn())
  3089. {
  3090. return false;
  3091. }
  3092. Thread.Sleep(200);
  3093. //恢复原始状态
  3094. if (!iSEM.SetTiltAngle(a_fAngle))
  3095. {
  3096. return false;
  3097. }
  3098. return true;
  3099. }
  3100. //拍图
  3101. public bool GetImage(String a_fileName)
  3102. {
  3103. log.Info("获取分辨率开始!", true);
  3104. //3. 获取分辨率
  3105. int[] ImageSize = iSEM.GetImageStore();
  3106. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3107. {
  3108. return false;
  3109. }
  3110. short width = (short)ImageSize[0];
  3111. short height = (short)ImageSize[1];
  3112. log.Info("获取分辨率结束!"+ a_fileName +"===="+ width+ "*"+height, true);
  3113. //4. 抓图
  3114. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  3115. {
  3116. log.Info("抓图失败!", true);
  3117. return false;
  3118. }
  3119. return true;
  3120. }
  3121. //拍图1
  3122. public bool GetImage1(String a_fileName)
  3123. {
  3124. //3. 获取分辨率
  3125. int[] ImageSize = iSEM.GetImageStore();
  3126. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3127. {
  3128. return false;
  3129. }
  3130. short width = (short)ImageSize[0];
  3131. short height = (short)ImageSize[1];
  3132. //4. 抓图
  3133. if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
  3134. {
  3135. return false;
  3136. }
  3137. return true;
  3138. }
  3139. #region 算法设计
  3140. //执行自动对焦
  3141. public bool ImageFocus()
  3142. {
  3143. if (m_measureFile.MParam.FocusMode == 1)//手动
  3144. {
  3145. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3146. {
  3147. }
  3148. else
  3149. {
  3150. return false;
  3151. }
  3152. }
  3153. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3154. {
  3155. //郝工增加自动对焦算法
  3156. //处理文件夹
  3157. if (Directory.Exists(focus_path))
  3158. {
  3159. Directory.Delete(focus_path, true);
  3160. }
  3161. Thread.Sleep(3000);
  3162. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3163. Thread.Sleep(1000);
  3164. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3165. Thread.Sleep(1000);
  3166. //再创建文件夹
  3167. Directory.CreateDirectory(focus_path);
  3168. //1、对焦参数类,2、输出工作距离
  3169. int wd = 0;
  3170. //20201015 根据当前的工作距离重新计算对焦位置
  3171. float currentWd = iSEM.GetWorkingDistance();
  3172. //m_measureFile.MParam.AutoFocus.UP = currentWd * 1000000 - m_measureFile.MParam.AutoFocus.Step;
  3173. //m_measureFile.MParam.AutoFocus.Down = currentWd * 1000000 + m_measureFile.MParam.AutoFocus.Step;
  3174. Thread.Sleep(2000);
  3175. float currentMag = iSEM.GetMagnification();
  3176. Thread.Sleep(2000);
  3177. FocusParam pFoucs = new FocusParam();
  3178. if (currentMag <= m_measureFile.MParam.Photograph_Magnification)
  3179. {
  3180. pFoucs = m_measureFile.MParam.AutoFocus;
  3181. pFoucs.UP = 5050;
  3182. pFoucs.Down = 5150;
  3183. pFoucs.Step = 50;
  3184. pFoucs.fStep = 10;
  3185. pFoucs.Range = 50;
  3186. //4、设置WD
  3187. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3188. Thread.Sleep(1000);
  3189. }
  3190. else
  3191. {
  3192. pFoucs = m_measureFile.MParam.AutoFocus;
  3193. pFoucs.UP = 5000;
  3194. pFoucs.Down = 5200;
  3195. pFoucs.Step = 10;
  3196. pFoucs.fStep = 5;
  3197. pFoucs.Range = 50;
  3198. //4、设置WD
  3199. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3200. Thread.Sleep(1000);
  3201. }
  3202. //log.Info("修改对焦参数", true);
  3203. AutoFocus(pFoucs, out wd);
  3204. log.Info("自动调节算法输出"+ (wd * 0.00000001).ToString(), true);
  3205. //设置工作距离
  3206. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  3207. //设置完工作距离后必须延迟5秒
  3208. Thread.Sleep(5000);
  3209. //处理图片位置
  3210. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3211. }
  3212. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3213. {
  3214. //后期和客户对接接口
  3215. List<string> filenames = new List<string>();
  3216. String retfilename = wr.Img_Auto_Focus(filenames);
  3217. }
  3218. else //蔡司自动对焦
  3219. {
  3220. iSEM.CmdAutoFocusCoarse();
  3221. while (true)
  3222. {
  3223. Thread.Sleep(10000);
  3224. if (0 == iSEM.GetAutoFunction())
  3225. {
  3226. break;
  3227. }
  3228. }
  3229. iSEM.CmdAutoFocusFine();
  3230. while (true)
  3231. {
  3232. Thread.Sleep(10000);
  3233. if (0 == iSEM.GetAutoFunction())
  3234. {
  3235. break;
  3236. }
  3237. }
  3238. }
  3239. return true;
  3240. }
  3241. //执行自动对焦
  3242. public bool ImageFocus1(Boolean Is_Stig)
  3243. {
  3244. if (m_measureFile.MParam.FocusMode == 1)//手动
  3245. {
  3246. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3247. {
  3248. }
  3249. else
  3250. {
  3251. return false;
  3252. }
  3253. }
  3254. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3255. {
  3256. #region 执行蔡司自动对焦程序
  3257. //服务地址
  3258. string snumstr = @"http://192.168.1.101:8123";
  3259. // 调用方法;只对焦不消像散
  3260. if (Is_Stig)
  3261. {
  3262. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);
  3263. if (focusstig != "success")
  3264. {
  3265. log.Info("对焦失败" + focusstig , true);
  3266. return false;
  3267. }
  3268. }
  3269. else
  3270. {
  3271. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);
  3272. if (onlyfocus != "success")
  3273. {
  3274. return false;
  3275. }
  3276. }
  3277. #endregion
  3278. }
  3279. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3280. {
  3281. //后期和客户对接接口
  3282. List<string> filenames = new List<string>();
  3283. String retfilename = wr.Img_Auto_Focus(filenames);
  3284. }
  3285. else //蔡司自动对焦
  3286. {
  3287. iSEM.CmdAutoFocusCoarse();
  3288. while (true)
  3289. {
  3290. Thread.Sleep(10000);
  3291. if (0 == iSEM.GetAutoFunction())
  3292. {
  3293. break;
  3294. }
  3295. }
  3296. iSEM.CmdAutoFocusFine();
  3297. while (true)
  3298. {
  3299. Thread.Sleep(10000);
  3300. if (0 == iSEM.GetAutoFunction())
  3301. {
  3302. break;
  3303. }
  3304. }
  3305. }
  3306. return true;
  3307. }
  3308. //执行自动消像散
  3309. public bool ImageStig()
  3310. {
  3311. if (m_measureFile.MParam.FocusMode == 1)//手动
  3312. {
  3313. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3314. {
  3315. }
  3316. else
  3317. {
  3318. return false;
  3319. }
  3320. }
  3321. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3322. {
  3323. //郝工增加自动对焦算法
  3324. //处理文件夹
  3325. if (Directory.Exists(StigX_path))
  3326. {
  3327. Directory.Delete(StigX_path, true);
  3328. }
  3329. Thread.Sleep(3000);
  3330. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3331. Thread.Sleep(1000);
  3332. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3333. Thread.Sleep(1000);
  3334. //再创建文件夹
  3335. Directory.CreateDirectory(StigX_path);
  3336. //1、对焦参数类,2、输出像散值
  3337. int stigX = 0;
  3338. //根据当前的stigX重新计算像散值
  3339. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3340. //m_measureFile.MParam.AutoStigX.Step = 10; //像散的步长为10
  3341. //m_measureFile.MParam.AutoStigX.UP = currentStigX - m_measureFile.MParam.AutoStigX.Step;
  3342. //m_measureFile.MParam.AutoStigX.Down = currentStigX + m_measureFile.MParam.AutoStigX.Step;
  3343. //设置工作距离
  3344. iSEM.SetAstigmatismX((float)0);
  3345. //设置完工作距离后必须延迟5秒
  3346. Thread.Sleep(5000);
  3347. //log.Info("修改消像散参数", true);
  3348. AutoStig(m_measureFile.MParam.AutoStigX, out stigX);
  3349. log.Info("自动消散算法输出X"+ (stigX * 0.01).ToString(), true);
  3350. //设置工作距离
  3351. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3352. //设置完工作距离后必须延迟5秒
  3353. Thread.Sleep(5000);
  3354. //处理图片位置
  3355. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3356. //处理文件夹
  3357. if (Directory.Exists(StigY_path))
  3358. {
  3359. Directory.Delete(StigY_path, true);
  3360. }
  3361. Thread.Sleep(3000);
  3362. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3363. Thread.Sleep(1000);
  3364. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3365. Thread.Sleep(1000);
  3366. //再创建文件夹
  3367. Directory.CreateDirectory(StigY_path);
  3368. //1、对焦参数类,2、输出像散值
  3369. int stigY = 0;
  3370. //根据当前的stigX重新计算像散值
  3371. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3372. //m_measureFile.MParam.AutoStigY.Step = 10; //像散的步长为10
  3373. //m_measureFile.MParam.AutoStigY.UP = m_measureFile.MParam.AutoStigY.;
  3374. //m_measureFile.MParam.AutoStigY.Down = m_measureFile.MParam.AutoStigY.Step;
  3375. iSEM.SetAstigmatismY((float)0);
  3376. Thread.Sleep(2000);
  3377. log.Info("修改消像散参数", true);
  3378. AutoStig(m_measureFile.MParam.AutoStigY, out stigY);
  3379. log.Info("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3380. //设置工作距离
  3381. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3382. //设置完工作距离后必须延迟5秒
  3383. Thread.Sleep(5000);
  3384. }
  3385. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3386. {
  3387. //后期和客户对接接口
  3388. List<string> filenames = new List<string>();
  3389. String retfilename = wr.Img_Auto_Focus(filenames);
  3390. }
  3391. else //蔡司自动对焦
  3392. {
  3393. iSEM.CmdAutoFocusCoarse();
  3394. while (true)
  3395. {
  3396. Thread.Sleep(10000);
  3397. if (0 == iSEM.GetAutoFunction())
  3398. {
  3399. break;
  3400. }
  3401. }
  3402. iSEM.CmdAutoFocusFine();
  3403. while (true)
  3404. {
  3405. Thread.Sleep(10000);
  3406. if (0 == iSEM.GetAutoFunction())
  3407. {
  3408. break;
  3409. }
  3410. }
  3411. }
  3412. return true;
  3413. }
  3414. //自动聚焦
  3415. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  3416. {
  3417. a_nWd = 0;
  3418. float wd = iSEM.GetWorkingDistance();
  3419. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3420. if (a_param == null)
  3421. {
  3422. log.Info("空参数", true);
  3423. return false;
  3424. }
  3425. string path = a_param.Path;
  3426. if (!Directory.Exists(path))
  3427. {
  3428. log.Info("文件夹丢失", true);
  3429. return false;
  3430. }
  3431. string path_coarse = a_param.Path + "\\Coarse";
  3432. if (!Directory.Exists(path_coarse))
  3433. {
  3434. Directory.CreateDirectory(path_coarse);
  3435. }
  3436. string path_fine = a_param.Path + "\\Fine";
  3437. if (!Directory.Exists(path_fine))
  3438. {
  3439. Directory.CreateDirectory(path_fine);
  3440. }
  3441. //1. 拍照
  3442. //1.1, 粗拍照
  3443. //1.1.1, 根据参数计算拍照次数
  3444. double nUp = a_param.UP * 100.0 ;
  3445. double nDown = a_param.Down * 100.0;
  3446. double nStep = a_param.Step * 100.0;
  3447. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3448. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3449. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3450. //粗拍照
  3451. for (int i = 0; i < nTimes; i++)
  3452. {
  3453. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  3454. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3455. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3456. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3457. int swd = cWd / 100;
  3458. //SendMsg("wd = " + swd.ToString() +"um");
  3459. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3460. arg.Picture_Information.Picture_FullPath = fileName;
  3461. if (!GetImage(fileName))
  3462. {
  3463. return false;
  3464. }
  3465. //arg.State = true;
  3466. //arg.Message = "自动对焦";
  3467. //SendMsg("0-9");
  3468. //判断是否停止进程
  3469. if (key_stop)
  3470. {
  3471. return false;
  3472. }
  3473. //Thread.Sleep(3000);
  3474. }
  3475. //1.2, 选定细拍照的工作距离
  3476. int CorWd = 510000;
  3477. ChooseBest(path_coarse,out CorWd);
  3478. if (CorWd == -1)
  3479. CorWd = 510000;
  3480. else
  3481. a_nWd = CorWd;
  3482. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3483. //1.3, 细拍照
  3484. if ( (CorWd - a_param.Range * 100.0) <=0)
  3485. {
  3486. return false;
  3487. }
  3488. double nfUp = CorWd - a_param.Range * 100.0;
  3489. double nfStep = a_param.fStep * 100.0;
  3490. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3491. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3492. for (int i = 0; i < nfTimes; i++)
  3493. {
  3494. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3495. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3496. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3497. Thread.Sleep(Convert.ToInt32(cycle_time)+100);
  3498. int swd = cWd / 100;
  3499. //SendMsg("wd = " + swd.ToString() + "um");
  3500. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3501. arg.Picture_Information.Picture_FullPath = fileName;
  3502. if (!GetImage(fileName))
  3503. {
  3504. return false;
  3505. }
  3506. //arg.State = true;
  3507. //arg.Message = "自动对焦";
  3508. //SendMsg("0-9");
  3509. //判断是否停止进程
  3510. if (key_stop)
  3511. {
  3512. return false;
  3513. }
  3514. //Thread.Sleep(2000);
  3515. }
  3516. int fineWd = CorWd;
  3517. ChooseBest(path_fine, out fineWd);
  3518. //SendMsg("wd fine max = " + fineWd.ToString());
  3519. if (fineWd == -1)
  3520. a_nWd = CorWd;
  3521. else
  3522. a_nWd = fineWd;
  3523. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3524. //arg.State = true;
  3525. //arg.Message = "自动对焦";
  3526. //SendMsg(step_code);
  3527. return true;
  3528. }
  3529. //自动聚焦1
  3530. public bool AutoFocus1(FocusParam a_param, out int a_nWd)
  3531. {
  3532. a_nWd = 0;
  3533. float wd = iSEM.GetWorkingDistance();
  3534. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3535. if (a_param == null)
  3536. {
  3537. log.Info("空参数", true);
  3538. return false;
  3539. }
  3540. string path = a_param.Path;
  3541. if (!Directory.Exists(path))
  3542. {
  3543. log.Info("文件夹丢失", true);
  3544. return false;
  3545. }
  3546. string path_coarse = a_param.Path + "\\Coarse";
  3547. if (!Directory.Exists(path_coarse))
  3548. {
  3549. Directory.CreateDirectory(path_coarse);
  3550. }
  3551. string path_fine = a_param.Path + "\\Fine";
  3552. if (!Directory.Exists(path_fine))
  3553. {
  3554. Directory.CreateDirectory(path_fine);
  3555. }
  3556. //1. 拍照
  3557. //1.1, 粗拍照
  3558. //1.1.1, 根据参数计算拍照次数
  3559. double nUp = a_param.UP * 100.0;
  3560. double nDown = a_param.Down * 100.0;
  3561. double nStep = a_param.Step * 100.0;
  3562. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3563. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3564. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3565. //粗拍照
  3566. for (int i = 0; i < nTimes; i++)
  3567. {
  3568. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3569. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3570. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3571. Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
  3572. int swd = cWd / 100;
  3573. //SendMsg("wd = " + swd.ToString() +"um");
  3574. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3575. //arg.Picture_Information.Picture_FullPath = fileName;
  3576. if (!GetImage1(fileName))
  3577. {
  3578. return false;
  3579. }
  3580. //arg.State = true;
  3581. //arg.Message = "自动对焦";
  3582. //SendMsg(step_code);
  3583. //判断是否停止进程
  3584. if (key_stop)
  3585. {
  3586. return false;
  3587. }
  3588. //Thread.Sleep(3000);
  3589. }
  3590. //1.2, 选定细拍照的工作距离
  3591. int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3592. ChooseBest(path_coarse, out CorWd);
  3593. if (CorWd == -1)
  3594. CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3595. else
  3596. a_nWd = CorWd;
  3597. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3598. //1.3, 细拍照
  3599. if ((CorWd - a_param.Range * 100.0) <= 0)
  3600. {
  3601. return false;
  3602. }
  3603. double nfUp = CorWd - a_param.Range * 100.0;
  3604. double nfStep = a_param.fStep * 100.0;
  3605. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3606. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3607. for (int i = 0; i < nfTimes; i++)
  3608. {
  3609. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3610. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3611. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3612. Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
  3613. int swd = cWd / 100;
  3614. //SendMsg("wd = " + swd.ToString() + "um");
  3615. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3616. //arg.Picture_Information.Picture_FullPath = fileName;
  3617. if (!GetImage1(fileName))
  3618. {
  3619. return false;
  3620. }
  3621. //arg.State = true;
  3622. //arg.Message = "自动对焦";
  3623. //SendMsg(step_code);
  3624. //判断是否停止进程
  3625. if (key_stop)
  3626. {
  3627. return false;
  3628. }
  3629. //Thread.Sleep(2000);
  3630. }
  3631. int fineWd = CorWd;
  3632. ChooseBest(path_fine, out fineWd);
  3633. //SendMsg("wd fine max = " + fineWd.ToString());
  3634. if (fineWd == -1)
  3635. a_nWd = CorWd;
  3636. else
  3637. a_nWd = fineWd;
  3638. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3639. //arg.State = true;
  3640. //arg.Message = "自动对焦";
  3641. //SendMsg("0-9");
  3642. return true;
  3643. }
  3644. //自动消像散 AutoStig
  3645. public bool AutoStig(FocusParam a_param, out int a_nWd)
  3646. {
  3647. a_nWd = 0;
  3648. float wd = 0;
  3649. if (a_param.TYPE == 2)
  3650. {
  3651. wd = iSEM.GetAstigmatismX();
  3652. }
  3653. else if (a_param.TYPE == 3)
  3654. {
  3655. wd = iSEM.GetAstigmatismY();
  3656. }
  3657. else
  3658. {
  3659. log.Info("自动消像散参数设置有误", true);
  3660. return false;
  3661. }
  3662. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3663. if (a_param == null)
  3664. {
  3665. log.Info("空参数", true);
  3666. return false;
  3667. }
  3668. string path = a_param.Path;
  3669. if (!Directory.Exists(path))
  3670. {
  3671. log.Error("文件夹丢失", false);
  3672. return false;
  3673. }
  3674. string path_coarse = a_param.Path + "\\Coarse";
  3675. if (!Directory.Exists(path_coarse))
  3676. {
  3677. Directory.CreateDirectory(path_coarse);
  3678. }
  3679. string path_fine = a_param.Path + "\\Fine";
  3680. if (!Directory.Exists(path_fine))
  3681. {
  3682. Directory.CreateDirectory(path_fine);
  3683. }
  3684. //1. 拍照
  3685. //1.1, 粗拍照
  3686. //1.1.1, 根据参数计算拍照次数
  3687. double nUp = a_param.UP * 100.0;
  3688. double nDown = a_param.Down * 100.0;
  3689. double nStep = a_param.Step * 100.0;
  3690. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3691. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3692. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3693. //粗拍照
  3694. for (int i = 0; i < nTimes; i++)
  3695. {
  3696. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3697. if (a_param.TYPE == 2)
  3698. {
  3699. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3700. }
  3701. else if (a_param.TYPE == 3)
  3702. {
  3703. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3704. }
  3705. else
  3706. {
  3707. log.Info("自动消像散参数设置有误", true);
  3708. return false;
  3709. }
  3710. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3711. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3712. int swd = cWd / 100;
  3713. //SendMsg("wd = " + swd.ToString() +"um");
  3714. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3715. arg.Picture_Information.Picture_FullPath = fileName;
  3716. if (!GetImage(fileName))
  3717. {
  3718. return false;
  3719. }
  3720. arg.State = true;
  3721. arg.Message = "自动像散";
  3722. SendMsg("0-8");
  3723. //判断是否停止进程
  3724. if (key_stop)
  3725. {
  3726. return false;
  3727. }
  3728. //Thread.Sleep(3000);
  3729. }
  3730. //1.2, 选定细拍照的工作距离
  3731. int CorWd;
  3732. ChooseBest(path_coarse, out CorWd);
  3733. if (CorWd == -1)
  3734. {
  3735. a_nWd = 0;
  3736. }
  3737. else
  3738. {
  3739. a_nWd = CorWd;
  3740. }
  3741. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3742. //1.3, 细拍照
  3743. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3744. {
  3745. return false;
  3746. }
  3747. double nfUp = 0;
  3748. if (a_param.Range >= 0)
  3749. nfUp = CorWd - a_param.Range * 100.0;
  3750. else
  3751. nfUp = CorWd + a_param.Range * 100.0;
  3752. double nfStep = a_param.fStep * 100.0;
  3753. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3754. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3755. for (int i = 0; i < nfTimes; i++)
  3756. {
  3757. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3758. if (a_param.TYPE == 2)
  3759. {
  3760. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3761. }
  3762. else if (a_param.TYPE == 3)
  3763. {
  3764. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3765. }
  3766. else
  3767. {
  3768. log.Info("自动消像散参数设置有误", true);
  3769. return false;
  3770. }
  3771. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3772. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3773. int swd = cWd / 100;
  3774. //SendMsg("wd = " + swd.ToString() + "um");
  3775. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3776. arg.Picture_Information.Picture_FullPath = fileName;
  3777. if (!GetImage(fileName))
  3778. {
  3779. return false;
  3780. }
  3781. arg.State = true;
  3782. arg.Message = "自动像散";
  3783. SendMsg("0-8");
  3784. //判断是否停止进程
  3785. if (key_stop)
  3786. {
  3787. return false;
  3788. }
  3789. //Thread.Sleep(2000);
  3790. }
  3791. int fineWd = CorWd;
  3792. ChooseBest(path_fine, out fineWd);
  3793. //SendMsg("wd fine max = " + fineWd.ToString());
  3794. if(fineWd == -1)
  3795. a_nWd = CorWd;
  3796. else
  3797. a_nWd = fineWd;
  3798. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3799. //arg.State = true;
  3800. //arg.Message = "自动像散";
  3801. //SendMsg(step_code);
  3802. return true;
  3803. }
  3804. //执行自动消像散1
  3805. public bool ImageStig1()
  3806. {
  3807. if (m_measureFile.MParam.FocusMode == 1)//手动
  3808. {
  3809. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3810. {
  3811. }
  3812. else
  3813. {
  3814. return false;
  3815. }
  3816. }
  3817. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3818. {
  3819. //郝工增加自动对焦算法
  3820. //处理文件夹
  3821. if (Directory.Exists(StigX_path))
  3822. {
  3823. Directory.Delete(StigX_path, true);
  3824. }
  3825. Thread.Sleep(3000);
  3826. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3827. Thread.Sleep(200);
  3828. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3829. Thread.Sleep(200);
  3830. //再创建文件夹
  3831. Directory.CreateDirectory(StigX_path);
  3832. //1、对焦参数类,2、输出像散值
  3833. int stigX = 0;
  3834. //根据当前的stigX重新计算像散值
  3835. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3836. //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
  3837. //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
  3838. //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
  3839. //设置工作距离
  3840. currentStigX = iSEM.GetAstigmatismX();
  3841. Thread.Sleep(1000);
  3842. FocusParam pFocus = new FocusParam();
  3843. pFocus = m_measureFile.MParam.AutoStigX;
  3844. float old_up = m_measureFile.MParam.AutoStigX.UP;
  3845. float old_down = m_measureFile.MParam.AutoStigX.Down;
  3846. float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3847. pFocus.UP = currentStigX - setvalue;
  3848. pFocus.Down = currentStigX + setvalue;
  3849. //m_measureFile.MParam.AutoStigX.Step = 1;
  3850. //m_measureFile.MParam.AutoStigX.Range = (float)0.5;
  3851. //m_measureFile.MParam.AutoStigX.fStep = (float)0.1;
  3852. log.Info("消像散参数: up = "+pFocus.UP+",down = " + pFocus.Down+ ",step =" + pFocus.Step + ",rang ="+ pFocus.Range + ",fstep = " + pFocus.fStep, true);
  3853. //log.Info("修改消像散参数", true);
  3854. AutoStig1(pFocus, out stigX);
  3855. m_measureFile.MParam.AutoStigX.UP = old_up;
  3856. m_measureFile.MParam.AutoStigX.Down = old_down;
  3857. log.Info("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3858. //设置工作距离
  3859. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3860. //设置完工作距离后必须延迟5秒
  3861. Thread.Sleep(5000);
  3862. //处理图片位置
  3863. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3864. //处理文件夹
  3865. if (Directory.Exists(StigY_path))
  3866. {
  3867. Directory.Delete(StigY_path, true);
  3868. }
  3869. Thread.Sleep(3000);
  3870. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3871. Thread.Sleep(200);
  3872. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3873. Thread.Sleep(200);
  3874. //再创建文件夹
  3875. Directory.CreateDirectory(StigY_path);
  3876. //1、对焦参数类,2、输出像散值
  3877. int stigY = 0;
  3878. //根据当前的stigX重新计算像散值
  3879. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3880. //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
  3881. //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
  3882. //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
  3883. currentStigY = iSEM.GetAstigmatismY();
  3884. Thread.Sleep(1000);
  3885. //m_measureFile.MParam.AutoStigY.UP = currentStigY - setvalue;
  3886. //m_measureFile.MParam.AutoStigY.Down = currentStigY + setvalue;
  3887. //m_measureFile.MParam.AutoStigY.Step = 1;
  3888. //m_measureFile.MParam.AutoStigY.Range = (float)0.5;
  3889. //m_measureFile.MParam.AutoStigY.fStep = (float)0.1;
  3890. FocusParam pFocusY = new FocusParam();
  3891. pFocusY = m_measureFile.MParam.AutoStigY;
  3892. float old_upY = m_measureFile.MParam.AutoStigY.UP;
  3893. float old_downY = m_measureFile.MParam.AutoStigY.Down;
  3894. //float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3895. pFocusY.UP = currentStigY - setvalue;
  3896. pFocusY.Down = currentStigY + setvalue;
  3897. log.Info("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
  3898. AutoStig1(pFocusY, out stigY);
  3899. m_measureFile.MParam.AutoStigY.UP = old_upY;
  3900. m_measureFile.MParam.AutoStigY.Down = old_downY;
  3901. log.Info("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3902. //设置工作距离
  3903. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3904. //设置完工作距离后必须延迟5秒
  3905. Thread.Sleep(5000);
  3906. }
  3907. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3908. {
  3909. //后期和客户对接接口
  3910. List<string> filenames = new List<string>();
  3911. String retfilename = wr.Img_Auto_Focus(filenames);
  3912. }
  3913. else //蔡司自动对焦
  3914. {
  3915. iSEM.CmdAutoFocusCoarse();
  3916. while (true)
  3917. {
  3918. Thread.Sleep(10000);
  3919. if (0 == iSEM.GetAutoFunction())
  3920. {
  3921. break;
  3922. }
  3923. }
  3924. iSEM.CmdAutoFocusFine();
  3925. while (true)
  3926. {
  3927. Thread.Sleep(10000);
  3928. if (0 == iSEM.GetAutoFunction())
  3929. {
  3930. break;
  3931. }
  3932. }
  3933. }
  3934. return true;
  3935. }
  3936. //自动消像散 AutoStig1
  3937. public bool AutoStig1(FocusParam a_param, out int a_nWd)
  3938. {
  3939. a_nWd = 0;
  3940. float wd = 0;
  3941. if (a_param.TYPE == 2)
  3942. {
  3943. wd = iSEM.GetAstigmatismX();
  3944. }
  3945. else if (a_param.TYPE == 3)
  3946. {
  3947. wd = iSEM.GetAstigmatismY();
  3948. }
  3949. else
  3950. {
  3951. log.Info("自动消像散参数设置有误", true);
  3952. return false;
  3953. }
  3954. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3955. if (a_param == null)
  3956. {
  3957. log.Info("空参数", true);
  3958. return false;
  3959. }
  3960. string path = a_param.Path;
  3961. if (!Directory.Exists(path))
  3962. {
  3963. log.Info("文件夹丢失", true);
  3964. return false;
  3965. }
  3966. string path_coarse = a_param.Path + "\\Coarse";
  3967. if (!Directory.Exists(path_coarse))
  3968. {
  3969. Directory.CreateDirectory(path_coarse);
  3970. }
  3971. string path_fine = a_param.Path + "\\Fine";
  3972. if (!Directory.Exists(path_fine))
  3973. {
  3974. Directory.CreateDirectory(path_fine);
  3975. }
  3976. //1. 拍照
  3977. //1.1, 粗拍照
  3978. //1.1.1, 根据参数计算拍照次数
  3979. double nUp = a_param.UP * 100.0;
  3980. double nDown = a_param.Down * 100.0;
  3981. double nStep = a_param.Step * 100.0;
  3982. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3983. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3984. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3985. //粗拍照
  3986. for (int i = 0; i < nTimes; i++)
  3987. {
  3988. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3989. if (a_param.TYPE == 2)
  3990. {
  3991. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3992. }
  3993. else if (a_param.TYPE == 3)
  3994. {
  3995. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3996. }
  3997. else
  3998. {
  3999. log.Info("自动消像散参数设置有误", true);
  4000. return false;
  4001. }
  4002. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4003. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4004. int swd = cWd / 100;
  4005. //SendMsg("wd = " + swd.ToString() +"um");
  4006. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4007. arg.Picture_Information.Picture_FullPath = fileName;
  4008. if (!GetImage1(fileName))
  4009. {
  4010. return false;
  4011. }
  4012. //arg.State = true;
  4013. //arg.Message = "自动像散";
  4014. //SendMsg(step_code);
  4015. //判断是否停止进程
  4016. if (key_stop)
  4017. {
  4018. return false;
  4019. }
  4020. //Thread.Sleep(3000);
  4021. }
  4022. //1.2, 选定细拍照的工作距离
  4023. int CorWd;
  4024. ChooseBest(path_coarse, out CorWd);
  4025. if (CorWd == -1)
  4026. {
  4027. a_nWd = 0;
  4028. }
  4029. else
  4030. {
  4031. a_nWd = CorWd;
  4032. }
  4033. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4034. //1.3, 细拍照
  4035. if ((CorWd - a_param.Range * 100.0) <= -10000)
  4036. {
  4037. return false;
  4038. }
  4039. double nfUp = 0;
  4040. if (a_param.Range >= 0)
  4041. nfUp = CorWd - a_param.Range * 100.0;
  4042. else
  4043. nfUp = CorWd + a_param.Range * 100.0;
  4044. double nfStep = a_param.fStep * 100.0;
  4045. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4046. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4047. for (int i = 0; i < nfTimes; i++)
  4048. {
  4049. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4050. if (a_param.TYPE == 2)
  4051. {
  4052. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  4053. }
  4054. else if (a_param.TYPE == 3)
  4055. {
  4056. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  4057. }
  4058. else
  4059. {
  4060. log.Info("自动消像散参数设置有误", true);
  4061. return false;
  4062. }
  4063. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4064. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4065. int swd = cWd / 100;
  4066. //SendMsg("wd = " + swd.ToString() + "um");
  4067. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4068. arg.Picture_Information.Picture_FullPath = fileName;
  4069. if (!GetImage1(fileName))
  4070. {
  4071. return false;
  4072. }
  4073. //arg.State = true;
  4074. //arg.Message = "自动像散";
  4075. //SendMsg(step_code);
  4076. //判断是否停止进程
  4077. if (key_stop)
  4078. {
  4079. return false;
  4080. }
  4081. //Thread.Sleep(2000);
  4082. }
  4083. int fineWd = CorWd;
  4084. ChooseBest(path_fine, out fineWd);
  4085. //SendMsg("wd fine max = " + fineWd.ToString());
  4086. if (fineWd == -1)
  4087. a_nWd = CorWd;
  4088. else
  4089. a_nWd = fineWd;
  4090. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4091. //arg.State = true;
  4092. //arg.Message = "自动像散";
  4093. //SendMsg("0-9");
  4094. return true;
  4095. }
  4096. //自动FIB对焦 AutoFIBFocus
  4097. public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
  4098. {
  4099. a_nWd = 0;
  4100. float wd = 0;
  4101. if (a_param.TYPE == 4)
  4102. {
  4103. wd = iSEM.GetFIBObjectivePotential();
  4104. }
  4105. else
  4106. {
  4107. log.Error("FIB自动聚焦参数设置有误", false);
  4108. return false;
  4109. }
  4110. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  4111. if (a_param == null)
  4112. {
  4113. log.Error("空参数", false);
  4114. return false;
  4115. }
  4116. string path = a_param.Path;
  4117. if (!Directory.Exists(path))
  4118. {
  4119. log.Error("文件夹丢失", false);
  4120. return false;
  4121. }
  4122. string path_coarse = a_param.Path + "\\Coarse";
  4123. if (!Directory.Exists(path_coarse))
  4124. {
  4125. Directory.CreateDirectory(path_coarse);
  4126. }
  4127. string path_fine = a_param.Path + "\\Fine";
  4128. if (!Directory.Exists(path_fine))
  4129. {
  4130. Directory.CreateDirectory(path_fine);
  4131. }
  4132. //1. 拍照
  4133. //1.1, 粗拍照
  4134. //1.1.1, 根据参数计算拍照次数
  4135. double nUp = a_param.UP * 100.0;
  4136. double nDown = a_param.Down * 100.0;
  4137. double nStep = a_param.Step * 100.0;
  4138. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  4139. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  4140. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  4141. //粗拍照
  4142. for (int i = 0; i < nTimes; i++)
  4143. {
  4144. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  4145. if (a_param.TYPE == 4)
  4146. {
  4147. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4148. }
  4149. else
  4150. {
  4151. log.Error("FIB对焦参数设置有误,对焦类型错", false);
  4152. return false;
  4153. }
  4154. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4155. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4156. int swd = cWd / 100;
  4157. //SendMsg("wd = " + swd.ToString() +"um");
  4158. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4159. arg.Picture_Information.Picture_FullPath = fileName;
  4160. if (!GetImage(fileName))
  4161. {
  4162. return false;
  4163. }
  4164. arg.State = true;
  4165. arg.Message = "FIB自动对焦";
  4166. SendMsg(step_code);
  4167. //判断是否停止进程
  4168. if (key_stop)
  4169. {
  4170. return false;
  4171. }
  4172. //Thread.Sleep(3000);
  4173. }
  4174. //1.2, 选定细拍照的工作距离
  4175. int CorWd;
  4176. ChooseBest(path_coarse, out CorWd);
  4177. a_nWd = CorWd;
  4178. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4179. //1.3, 细拍照
  4180. if ((CorWd - a_param.Range * 100.0) <0)
  4181. {
  4182. return false;
  4183. }
  4184. double nfUp = CorWd - a_param.Range * 100.0;
  4185. double nfStep = a_param.fStep * 100.0;
  4186. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4187. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4188. for (int i = 0; i < nfTimes; i++)
  4189. {
  4190. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4191. if (a_param.TYPE == 4)
  4192. {
  4193. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4194. }
  4195. else
  4196. {
  4197. log.Error("自动消像散参数设置有误", false);
  4198. return false;
  4199. }
  4200. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4201. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4202. int swd = cWd / 100;
  4203. //SendMsg("wd = " + swd.ToString() + "um");
  4204. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4205. arg.Picture_Information.Picture_FullPath = fileName;
  4206. if (!GetImage(fileName))
  4207. {
  4208. return false;
  4209. }
  4210. arg.State = true;
  4211. arg.Message = "FIB自动对焦";
  4212. SendMsg(step_code);
  4213. //判断是否停止进程
  4214. if (key_stop)
  4215. {
  4216. return false;
  4217. }
  4218. //Thread.Sleep(2000);
  4219. }
  4220. int fineWd;
  4221. ChooseBest(path_fine, out fineWd);
  4222. //SendMsg("wd fine max = " + fineWd.ToString());
  4223. a_nWd = fineWd;
  4224. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4225. return true;
  4226. }
  4227. //LoG算子计算
  4228. private double LoGMean(string a_strImgPath)
  4229. {
  4230. //读入Img文件
  4231. if (!File.Exists(a_strImgPath))
  4232. {
  4233. return 0;
  4234. }
  4235. Mat src, gray_src;
  4236. int kernel_size = 3;
  4237. src = Cv2.ImRead(a_strImgPath);
  4238. gray_src = new Mat();
  4239. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4240. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4241. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4242. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4243. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  4244. Cv2.ConvertScaleAbs(src, src);
  4245. //图像的平均灰度
  4246. double meanValue = 0.0;
  4247. meanValue = Cv2.Mean(src)[0];
  4248. return meanValue;
  4249. }
  4250. //梯度计算
  4251. private double Tenengrad(string a_strImgPath)
  4252. {
  4253. //读入Img文件
  4254. if (!File.Exists(a_strImgPath))
  4255. {
  4256. return 0;
  4257. }
  4258. Mat src;
  4259. src = Cv2.ImRead(a_strImgPath);
  4260. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4261. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4262. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4263. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4264. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  4265. //图像的平均灰度
  4266. double meanValue = 0.0;
  4267. meanValue = Cv2.Mean(src)[0];
  4268. return meanValue;
  4269. }
  4270. //梯度计算
  4271. private double TTgrad(string a_strImgPath)
  4272. {
  4273. //读入Img文件
  4274. if (!File.Exists(a_strImgPath))
  4275. {
  4276. return 0;
  4277. }
  4278. Mat src;
  4279. src = Cv2.ImRead(a_strImgPath);
  4280. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4281. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4282. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4283. Mat scalex = new Mat();
  4284. Mat scaley = new Mat();
  4285. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  4286. Cv2.ConvertScaleAbs(src, scalex);
  4287. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  4288. Cv2.ConvertScaleAbs(src, scaley);
  4289. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  4290. //图像的平均灰度
  4291. double meanValue = 0.0;
  4292. meanValue = Cv2.Mean(src)[0];
  4293. return meanValue;
  4294. }
  4295. //三选二算法
  4296. private bool ChooseBest(string a_strImgPath, out int a_nWd)
  4297. {
  4298. a_nWd = -1;
  4299. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  4300. float[] values = new float[files.Length];
  4301. double smax1 = LoGMean(files[0]);
  4302. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  4303. double smax2 = Tenengrad(files[0]);
  4304. int wdmax2 = wdmax1;
  4305. double smax3 = TTgrad(files[0]);
  4306. int wdmax3 = wdmax1;
  4307. int x = 0;
  4308. foreach (var file in files)
  4309. {
  4310. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  4311. double svalue1 = LoGMean(file);
  4312. double svalue2 = Tenengrad(file);
  4313. double svalue3 = TTgrad(file);
  4314. if (smax1 < svalue1)
  4315. {
  4316. smax1 = svalue1;
  4317. wdmax1 = wd;
  4318. }
  4319. if (smax2 < svalue2)
  4320. {
  4321. smax2 = svalue2;
  4322. wdmax2 = wd;
  4323. }
  4324. if (smax3 < svalue3)
  4325. {
  4326. smax3 = svalue3;
  4327. wdmax3 = wd;
  4328. }
  4329. x++;
  4330. }
  4331. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  4332. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  4333. {
  4334. a_nWd = wdmax1;
  4335. //SendMsg("焦距 = " + wdmax1.ToString());
  4336. }
  4337. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  4338. {
  4339. a_nWd = wdmax2;
  4340. //SendMsg("焦距 = " + wdmax2.ToString());
  4341. }
  4342. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  4343. {
  4344. a_nWd = wdmax3;
  4345. //SendMsg("焦距 = " + wdmax3.ToString());
  4346. }
  4347. else
  4348. {
  4349. //SendMsg("对焦失败。");
  4350. return false;
  4351. }
  4352. return true;
  4353. }
  4354. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  4355. bool MoveToPixByMoveStage(float xc, float yc)
  4356. {
  4357. //单位是m/pix
  4358. float XpixSize = iSEM.GetPixelSize();
  4359. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4360. float YpixSize = iSEM.GetPixelSize();///(float)m_measureFile.MParam.PixelSizeCor);
  4361. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4362. Thread.Sleep(500);
  4363. //0:width, 1:height
  4364. int[] imageSize = iSEM.GetImageStore();
  4365. int width = imageSize[0] / 2;
  4366. int height = imageSize[1] / 2;
  4367. log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4368. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4369. float deltX = (xc - (float)width) * XpixSize;
  4370. float deltY = (yc - (float)height) * YpixSize;
  4371. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  4372. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  4373. float xpCur = iSEM.GetStageAtX();
  4374. float ypCur = iSEM.GetStageAtY();
  4375. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4376. float xpNew = xpCur - deltX;
  4377. float ypNew = ypCur + deltY;
  4378. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4379. //计算光束偏移值:
  4380. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  4381. {
  4382. log.Info("X方向移动样品台", true);
  4383. if (!iSEM.SetStageGotoX(xpNew))
  4384. {
  4385. return false;
  4386. }
  4387. //判断是否移动完成
  4388. while (true)
  4389. {
  4390. Thread.Sleep(5000);
  4391. if (iSEM.GetStageIs() == 0)
  4392. {
  4393. break;
  4394. }
  4395. }
  4396. }
  4397. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  4398. {
  4399. log.Info("Y方向移动样品台", true);
  4400. if (!iSEM.SetStageGotoY(ypNew))
  4401. {
  4402. return false;
  4403. }
  4404. //判断是否移动完成
  4405. while (true)
  4406. {
  4407. Thread.Sleep(5000);
  4408. if (iSEM.GetStageIs() == 0)
  4409. {
  4410. break;
  4411. }
  4412. }
  4413. }
  4414. return true;
  4415. }
  4416. //移动到像素位置
  4417. bool MoveToPix(float xc, float yc)
  4418. {
  4419. //单位是m/pix
  4420. float XpixSize = iSEM.GetPixelSize();
  4421. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel",true);
  4422. float YpixSize = (XpixSize/(float)m_measureFile.MParam.PixelSizeCor);
  4423. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4424. Thread.Sleep(200);
  4425. //0:width, 1:height
  4426. int[] imageSize = iSEM.GetImageStore();
  4427. int width = imageSize[0]/2;
  4428. int height = imageSize[1]/2;
  4429. log.Info("目标像素是(" + xc.ToString()+ ","+ yc.ToString() + ")", true);
  4430. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4431. float deltX = (xc - (float)width) * XpixSize;
  4432. float deltY = (yc - (float)height) * YpixSize;
  4433. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  4434. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  4435. float xpCur = iSEM.GetStageAtX();
  4436. Thread.Sleep(200);
  4437. float ypCur = iSEM.GetStageAtY();
  4438. log.Info("当前位置(" + xpCur.ToString()+ "," + ypCur.ToString() + "),单位m", true);
  4439. float xpNew = xpCur - deltX;
  4440. float ypNew = ypCur + deltY;
  4441. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4442. //计算最大偏移量
  4443. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4444. Thread.Sleep(200);
  4445. iSEM.SetBeamShiftX(100);
  4446. Thread.Sleep(200);
  4447. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4448. Thread.Sleep(200);
  4449. iSEM.SetBeamShiftX(beamXCur);
  4450. Thread.Sleep(200);
  4451. //计算光束偏移值:
  4452. float beamX = iSEM.GetBeamOffsetX();
  4453. log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4454. beamX = (-deltX + beamX);
  4455. log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4456. if( ((beamX <= beamXMax) && (beamX >=0)) ||
  4457. ((beamX >= -beamXMax)&& (beamX < 0)))
  4458. {
  4459. log.Info("X方向移动光束", true);
  4460. float beamXShift = beamX * 100 / beamXMax;
  4461. log.Info("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  4462. if (!iSEM.SetBeamShiftX(beamXShift))
  4463. //if (!iSEM.SetBeamOffsetX(beamX))
  4464. {
  4465. log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4466. return false;
  4467. }
  4468. }
  4469. else if(deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4470. {
  4471. log.Info("X方向移动样品台", true);
  4472. if (!iSEM.SetStageGotoX(xpNew))
  4473. {
  4474. return false;
  4475. }
  4476. //判断是否移动完成
  4477. while (true)
  4478. {
  4479. Thread.Sleep(4000);
  4480. if (iSEM.GetStageIs() == 0)
  4481. {
  4482. break;
  4483. }
  4484. }
  4485. }
  4486. float beamY = iSEM.GetBeamOffsetY();
  4487. log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4488. beamY = (-deltY + beamY);
  4489. log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4490. //计算最大偏移量
  4491. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4492. Thread.Sleep(200);
  4493. iSEM.SetBeamShiftY(100);
  4494. Thread.Sleep(200);
  4495. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4496. Thread.Sleep(200);
  4497. iSEM.SetBeamShiftY(beamYCur);
  4498. Thread.Sleep(200);
  4499. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  4500. ((beamY >= -beamYMax) && (beamY < 0)))
  4501. {
  4502. log.Info("Y方向移动光束", true);
  4503. float beamYShift = beamY * 100 / beamYMax;
  4504. log.Info("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  4505. //if(!iSEM.SetBeamOffsetY(beamY))
  4506. if (!iSEM.SetBeamShiftY(beamYShift))
  4507. {
  4508. log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4509. return false;
  4510. }
  4511. }
  4512. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4513. {
  4514. log.Info("Y方向移动样品台", true);
  4515. if (!iSEM.SetStageGotoY(ypNew))
  4516. {
  4517. return false;
  4518. }
  4519. //判断是否移动完成
  4520. while (true)
  4521. {
  4522. Thread.Sleep(4000);
  4523. if (iSEM.GetStageIs() == 0)
  4524. {
  4525. break;
  4526. }
  4527. }
  4528. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4529. //arg.State = true;
  4530. //SendMsg("1-7");
  4531. }
  4532. return true;
  4533. }
  4534. //自动亮度对比度调节
  4535. //自动亮度对比度
  4536. public bool AutoBC(String step)
  4537. {
  4538. arg.Message = "自动亮度对比度";
  4539. arg.State = true;
  4540. SendMsg("1-10");
  4541. iSEM.SetAutoBright(100);
  4542. iSEM.SetAutoContrast(100);
  4543. //log.Info("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
  4544. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  4545. {
  4546. log.Info("开始设置自动亮度、对比度失败,程序退出。", true);
  4547. return false;
  4548. }
  4549. Thread.Sleep(5000);
  4550. int i = 0;
  4551. float bright = iSEM.GetBrightness();
  4552. float contrast = iSEM.GetContrast();
  4553. //最多调节30s,30s没调节好,认为调节失败
  4554. for (i = 0; i < 5; i++)
  4555. {
  4556. bright = iSEM.GetBrightness();
  4557. contrast = iSEM.GetContrast();
  4558. if ((bright >= 40 && bright <= 60)
  4559. && (contrast >= 35 && contrast <= 40))
  4560. break;
  4561. Thread.Sleep(5000);
  4562. }
  4563. bright = iSEM.GetBrightness();
  4564. contrast = iSEM.GetContrast();
  4565. if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
  4566. && i == 5)
  4567. {
  4568. log.Info("亮度对比度调节时间过长", true);
  4569. return false;
  4570. }
  4571. iSEM.SetAutoBright(100);
  4572. iSEM.SetAutoContrast(100);
  4573. //log.Info("SEM模式自动亮度目标50,自动对比度目标30.", true);
  4574. return true;
  4575. }
  4576. //执行FIB自动对焦,FIBFocus
  4577. //执行自动消像散
  4578. public bool FIBFocus(String step_code)
  4579. {
  4580. if (m_measureFile.MParam.FocusMode == 1)//手动
  4581. {
  4582. if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  4583. {
  4584. }
  4585. else
  4586. {
  4587. return false;
  4588. }
  4589. }
  4590. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  4591. {
  4592. //郝工增加自动对焦算法
  4593. //处理文件夹
  4594. if (Directory.Exists(FIBfocus_path))
  4595. {
  4596. Directory.Delete(FIBfocus_path, true);
  4597. }
  4598. Thread.Sleep(3000);
  4599. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  4600. Thread.Sleep(1000);
  4601. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  4602. Thread.Sleep(1000);
  4603. //再创建文件夹
  4604. Directory.CreateDirectory(FIBfocus_path);
  4605. //1、对焦参数类,2、输出对焦值
  4606. int FIBFocus = 0;
  4607. //根据当前的stigX重新计算像散值
  4608. float currentFIBFocus = iSEM.GetFIBObjectivePotential();
  4609. //m_measureFile.MParam.FIBFocus.Step = 10; //像散的步长为10
  4610. m_measureFile.MParam.FIBFocus.UP = currentFIBFocus - m_measureFile.MParam.FIBFocus.Step;
  4611. m_measureFile.MParam.FIBFocus.Down = currentFIBFocus + m_measureFile.MParam.FIBFocus.Step;
  4612. log.Info("修改FIB自动对焦参数", true);
  4613. AutoFIBFocus(m_measureFile.MParam.FIBFocus, out FIBFocus, step_code);
  4614. //log.Info("算法输出"+ wd.ToString(), true);
  4615. //设置工作距离
  4616. iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
  4617. //设置完工作距离后必须延迟5秒
  4618. Thread.Sleep(5000);
  4619. //处理图片位置
  4620. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  4621. }
  4622. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  4623. {
  4624. //后期和客户对接接口
  4625. List<string> filenames = new List<string>();
  4626. String retfilename = wr.Img_Auto_Focus(filenames);
  4627. }
  4628. else //蔡司自动对焦
  4629. {
  4630. iSEM.CmdAutoFocusCoarse();
  4631. while (true)
  4632. {
  4633. Thread.Sleep(10000);
  4634. if (0 == iSEM.GetAutoFunction())
  4635. {
  4636. break;
  4637. }
  4638. }
  4639. iSEM.CmdAutoFocusFine();
  4640. while (true)
  4641. {
  4642. Thread.Sleep(10000);
  4643. if (0 == iSEM.GetAutoFunction())
  4644. {
  4645. break;
  4646. }
  4647. }
  4648. }
  4649. return true;
  4650. }
  4651. /// 图像拉直算法
  4652. /// </summary>
  4653. /// <param name="Slope">倾斜角度</param>
  4654. /// <param name="x0">圆心坐标x</param>
  4655. /// <param name="y0">圆心坐标y</param>
  4656. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  4657. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  4658. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  4659. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  4660. /// <returns></returns>
  4661. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  4662. {
  4663. try
  4664. {
  4665. float xr = x1 - x0;//倾斜图到中心的距离差x
  4666. float yr = y1 - y0;//倾斜图到中心的距离差y
  4667. float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  4668. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  4669. float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
  4670. float k_S = k - Slope;//通过夹角差求x2,y2
  4671. //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  4672. //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  4673. float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
  4674. float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
  4675. if (Slope > 0 || Slope < 0)
  4676. {
  4677. Hx = x0 + x2;
  4678. Hy = y0 + y2;
  4679. }
  4680. else
  4681. {
  4682. Hx = 0;
  4683. Hy = 0;
  4684. }
  4685. return true;
  4686. }
  4687. catch (Exception)
  4688. {
  4689. return false;
  4690. }
  4691. }
  4692. // 放大倍数差校正
  4693. public bool MagComp(float oldMag, float newMag)
  4694. {
  4695. //开启电压校正时进行电压校正
  4696. if (m_measureFile.MParam.MagComp)
  4697. {
  4698. int oldLevel = -1, newLevel = -1;
  4699. float deltX = 0, deltY = 0;
  4700. if (oldMag < m_measureFile.MParam.MagRange1)
  4701. {
  4702. oldLevel = 1;
  4703. }
  4704. else if ((oldMag <= m_measureFile.MParam.MagRange2)
  4705. && (oldMag > m_measureFile.MParam.MagRange1))
  4706. {
  4707. oldLevel = 2;
  4708. }
  4709. else if ((oldMag <= m_measureFile.MParam.MagRange3)
  4710. && (oldMag > m_measureFile.MParam.MagRange2))
  4711. {
  4712. oldLevel = 3;
  4713. }
  4714. else if ((oldMag <= m_measureFile.MParam.MagRange4)
  4715. && (oldMag > m_measureFile.MParam.MagRange3))
  4716. {
  4717. oldLevel = 4;
  4718. }
  4719. if (newMag < m_measureFile.MParam.MagRange1)
  4720. {
  4721. newLevel = 1;
  4722. }
  4723. else if ((newMag <= m_measureFile.MParam.MagRange2)
  4724. && (newMag > m_measureFile.MParam.MagRange1))
  4725. {
  4726. newLevel = 2;
  4727. }
  4728. else if ((newMag <= m_measureFile.MParam.MagRange3)
  4729. && (newMag > m_measureFile.MParam.MagRange2))
  4730. {
  4731. newLevel = 3;
  4732. }
  4733. else if ((newMag <= m_measureFile.MParam.MagRange4)
  4734. && (newMag > m_measureFile.MParam.MagRange3))
  4735. {
  4736. newLevel = 4;
  4737. }
  4738. if (oldLevel != newLevel)
  4739. {
  4740. if (oldLevel == 1)
  4741. {
  4742. switch (newLevel)
  4743. {
  4744. case 1:
  4745. break;
  4746. case 2:
  4747. deltX = m_measureFile.MParam.MagCompX1;
  4748. deltY = m_measureFile.MParam.MagCompY1;
  4749. break;
  4750. case 3:
  4751. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2;
  4752. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2;
  4753. break;
  4754. case 4:
  4755. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4756. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4757. break;
  4758. }
  4759. }
  4760. else if (oldLevel == 2)
  4761. {
  4762. switch (newLevel)
  4763. {
  4764. case 1:
  4765. deltX = -m_measureFile.MParam.MagCompX1;
  4766. deltY = -m_measureFile.MParam.MagCompY1;
  4767. break;
  4768. case 2:
  4769. break;
  4770. case 3:
  4771. deltX = m_measureFile.MParam.MagCompX2;
  4772. deltY = m_measureFile.MParam.MagCompY2;
  4773. break;
  4774. case 4:
  4775. deltX = m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4776. deltY = m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4777. break;
  4778. }
  4779. }
  4780. else if (oldLevel == 3)
  4781. {
  4782. switch (newLevel)
  4783. {
  4784. case 1:
  4785. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2;
  4786. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2;
  4787. break;
  4788. case 2:
  4789. deltX = -m_measureFile.MParam.MagCompX2;
  4790. deltY = -m_measureFile.MParam.MagCompY2;
  4791. break;
  4792. case 3:
  4793. break;
  4794. case 4:
  4795. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4796. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompX3;
  4797. break;
  4798. }
  4799. }
  4800. else if (oldLevel == 4)
  4801. {
  4802. switch (newLevel)
  4803. {
  4804. case 1:
  4805. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4806. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4807. break;
  4808. case 2:
  4809. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4810. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4811. break;
  4812. case 3:
  4813. deltX = -m_measureFile.MParam.MagCompX3;
  4814. deltY = -m_measureFile.MParam.MagCompY3;
  4815. break;
  4816. case 4:
  4817. break;
  4818. }
  4819. }
  4820. //通过移动光束校正便宜量
  4821. //单位是m/pix
  4822. float pixSize = iSEM.GetPixelSize();
  4823. log.Info("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
  4824. Thread.Sleep(500);
  4825. float xpCur = iSEM.GetStageAtX();
  4826. float ypCur = iSEM.GetStageAtY();
  4827. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4828. float xpNew = xpCur - deltX;
  4829. float ypNew = ypCur + deltY;
  4830. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4831. //计算最大偏移量
  4832. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4833. iSEM.SetBeamShiftX(100);
  4834. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4835. iSEM.SetBeamShiftX(beamXCur);
  4836. //计算光束偏移值:
  4837. float beamX = iSEM.GetBeamOffsetX();
  4838. log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4839. beamX = (-deltX + beamX);
  4840. log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4841. if (beamX < beamXMax || beamX < -beamXMax)
  4842. {
  4843. log.Info("X方向移动光束", true);
  4844. float beamXShift = beamX * 100 / beamXMax;
  4845. if (!iSEM.SetBeamShiftX(beamXShift))
  4846. {
  4847. log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4848. return false;
  4849. }
  4850. }
  4851. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4852. {
  4853. log.Info("X方向移动样品台", true);
  4854. if (!iSEM.SetStageGotoX(xpNew))
  4855. {
  4856. return false;
  4857. }
  4858. //判断是否移动完成
  4859. while (true)
  4860. {
  4861. Thread.Sleep(5000);
  4862. if (iSEM.GetStageIs() == 0)
  4863. {
  4864. break;
  4865. }
  4866. }
  4867. }
  4868. float beamY = iSEM.GetBeamOffsetY();
  4869. log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4870. beamY = (-deltY + beamY);
  4871. log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4872. //计算最大偏移量
  4873. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4874. iSEM.SetBeamShiftY(100);
  4875. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4876. iSEM.SetBeamShiftY(beamYCur);
  4877. if (beamY < beamYMax || beamY < -beamYMax)
  4878. {
  4879. log.Info("Y方向移动光束", true);
  4880. float beamYShift = beamY * 100 / beamYMax;
  4881. if (!iSEM.SetBeamShiftY(beamY))
  4882. {
  4883. log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4884. return false;
  4885. }
  4886. }
  4887. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4888. {
  4889. log.Info("Y方向移动样品台", true);
  4890. if (!iSEM.SetStageGotoY(ypNew))
  4891. {
  4892. return false;
  4893. }
  4894. //判断是否移动完成
  4895. while (true)
  4896. {
  4897. Thread.Sleep(5000);
  4898. if (iSEM.GetStageIs() == 0)
  4899. {
  4900. break;
  4901. }
  4902. }
  4903. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4904. //arg.State = true;
  4905. //SendMsg("1-7");
  4906. }
  4907. }
  4908. }
  4909. return true;
  4910. }
  4911. #endregion
  4912. #region 测试程序
  4913. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  4914. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  4915. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  4916. //{
  4917. // SendMsg("拍摄照片完成");
  4918. // //return true;
  4919. //}
  4920. //else
  4921. //{
  4922. // SendMsg("拍摄照片失败");
  4923. // return false;
  4924. //}
  4925. //SendMsg("图像校正36度");
  4926. ////3.设置SEM角度补偿cos36度
  4927. //if (!TiltCorrection(36))
  4928. //{
  4929. // return false;
  4930. //}
  4931. //Thread.Sleep(3000);
  4932. //string fn;
  4933. //用宏抓一般图
  4934. //Thread.Sleep(5000);
  4935. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4936. //SendMsg("用宏抓一般图" + fn);
  4937. //iSEM.CMDMCFFilename(fn);
  4938. ////延时1s??
  4939. //Thread.Sleep(5000);
  4940. ////用宏抓好图
  4941. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  4942. //SendMsg("用宏抓好图" + fn);
  4943. //iSEM.CMDMCFFilename(fn);
  4944. ////延时1s??
  4945. //Thread.Sleep(30000);
  4946. //Thread.Sleep(10000);
  4947. //WorkingFolder = m_measureFile.FilePath;
  4948. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  4949. //SendMsg("SEM拍照存储到" + fileName6);
  4950. //if (!GetImage(ImageMode.SEM, fileName6))
  4951. //{
  4952. // SendMsg("SEM拍照失败");
  4953. // return false;
  4954. //}
  4955. ////用宏抓标志图
  4956. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  4957. //SendMsg("用宏抓标志图" + fn);
  4958. //iSEM.CMDMCFFilename(fn);
  4959. ////延时1s??
  4960. //Thread.Sleep(30000);
  4961. //Thread.Sleep(5000);
  4962. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4963. //SendMsg("用宏抓一般图" + fn);
  4964. //iSEM.CMDMCFFilename(fn);
  4965. ////延时1s??
  4966. //Thread.Sleep(5000);
  4967. //SendMsg("所有图结束");
  4968. ////17.自动控制SEM拍截面照
  4969. //{
  4970. // //1.控制SEM放大到指定参数大小范围,6000x
  4971. // if (!iSEM.SetMagnification(6000))
  4972. // {
  4973. // return false;
  4974. // }
  4975. // //2.控制SEM自动对焦、消像散、亮度、对比度
  4976. // if (!MeasParam.FocusMode)
  4977. // {
  4978. // //弹出手动对焦的窗口
  4979. // }
  4980. // else
  4981. // {
  4982. // //调用自动对焦模块
  4983. // }
  4984. // //3.设置SEM角度补偿cos36度
  4985. // if (!TiltCorrection(36))
  4986. // {
  4987. // return false;
  4988. // }
  4989. // //4.控制SEM拍照
  4990. // //5.保存照片4
  4991. // String fileName5 = WorkingFolder + ImageName5;
  4992. // if (!GetImage(ImageMode.SEM, fileName5))
  4993. // {
  4994. // return false;
  4995. // }
  4996. // //6.将照片传给客户,获取偏移坐标
  4997. // float x6 = 0, y6 = 0;
  4998. // float angle1 = 0;
  4999. // float mage = 10000;
  5000. // //7.根据坐标控制SEM移动到分析位置
  5001. // if (!iSEM.MoveStageXY(x6, y6))
  5002. // {
  5003. // return false;
  5004. // }
  5005. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  5006. // float x7 = iSEM.GetStageAtX();
  5007. // float y7 = iSEM.GetStageAtY();
  5008. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  5009. // {
  5010. // return false;
  5011. // }
  5012. // //9.控制SEM平行校正,并记录校正前初始值
  5013. // float foldAnagle = iSEM.GetScanRotation();
  5014. // if (foldAnagle == float.NaN)
  5015. // {
  5016. // return false;
  5017. // }
  5018. // if (!iSEM.SetScanRotation(angle1))
  5019. // {
  5020. // return false;
  5021. // }
  5022. // //10.控制SEM放大到指定参数大小范围
  5023. // if (!iSEM.SetMagnification(mage))
  5024. // {
  5025. // return false;
  5026. // }
  5027. // //11.控制SEM自动对焦、消像散、亮度、对比度
  5028. // if (!MeasParam.FocusMode)
  5029. // {
  5030. // //弹出手动对焦的窗口
  5031. // }
  5032. // else
  5033. // {
  5034. // //调用自动对焦模块
  5035. // }
  5036. // //12.控制SEM对分析位置拍照
  5037. // String fileName6 = WorkingFolder + ImageName6;
  5038. // if (!GetImage(ImageMode.SEM, fileName6))
  5039. // {
  5040. // return false;
  5041. // }
  5042. // //13.保存照片
  5043. // //14.控制SEM取消电子束校正,回到初始值
  5044. // if (!iSEM.SetScanRotation(foldAnagle))
  5045. // {
  5046. // return false;
  5047. // }
  5048. //}
  5049. ////18.自动层高分析
  5050. //{
  5051. // //1.获取SEM Pixel Size给客户传入参数
  5052. // if (iSEM.GetPixelSize() == float.NaN)
  5053. // {
  5054. // return false;
  5055. // }
  5056. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  5057. //}
  5058. ////19.自动能谱分析
  5059. //{
  5060. // //1. 确定能谱位置
  5061. // //2. 控制牛津打能谱
  5062. // //3. 能谱分析——面扫+线扫描
  5063. //}
  5064. #endregion
  5065. #region 能谱所有参数
  5066. //全局只有一个Extender
  5067. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  5068. IExtenderControl iExtender;
  5069. MeasureDB m_MeasDB = null;
  5070. int m_nXrayId = 0;
  5071. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  5072. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  5073. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  5074. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  5075. /// <summary>
  5076. /// 做能谱分析
  5077. /// </summary>
  5078. /// <param name="a_PointNum">分析点ID,索引号</param>
  5079. /// <param name="PointsName">分析点名称</param>
  5080. /// <param name="num">分析点的位置ID</param>
  5081. /// <returns>成功或失败</returns>
  5082. public bool DoEDS(int a_PointNum, string PointsName, int num)
  5083. {
  5084. try
  5085. {
  5086. iExtender = factoryExtender.IExtender;
  5087. //XrayID记录
  5088. log.Info("程序进入EDS测量!", true);
  5089. EDSParam param = m_measureFile.MParam.EDSP;
  5090. double dDwellTime = param.DwellTime;
  5091. int nImageType = param.ImageType;
  5092. double dScanSizes = param.ScanSize;
  5093. log.Info("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  5094. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  5095. string path = EDS_path;
  5096. string edsfn = path + "\\" + num.ToString() + "_" + ImageNameEDS;
  5097. log.Info("EDS_PATH=" + edsfn, true);
  5098. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);
  5099. //送给客户,计算感兴趣的区域
  5100. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  5101. List<System.Drawing.Point> listlines = new List<System.Drawing.Point>();
  5102. List<List<Segment>> listFeature = new List<List<Segment>>();
  5103. List<int> lines_height = new List<int>();
  5104. System.Drawing.Point area_pt = new System.Drawing.Point();
  5105. int width = 1;
  5106. int height = 1;
  5107. //点数据
  5108. int state = 0;
  5109. wr.EDS_Param_Points(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listPoints, out state);
  5110. if (state == 0)
  5111. {
  5112. log.Error("点采集失败", false);
  5113. return false;
  5114. }
  5115. //线数据
  5116. log.Info("线扫描", true);
  5117. state = 0;
  5118. wr.EDS_Param_Lines(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listlines, out lines_height, out state);
  5119. log.Info("线返回数据" + listlines[0].X.ToString() + "," + listlines[0].Y.ToString() + ",lines_height=" + lines_height.Count.ToString(), true);
  5120. if (state == 1)
  5121. {
  5122. //将线转换为segment数据
  5123. log.Info("将线转换为segment数据", true);
  5124. List<Segment> segments = new List<Segment>();
  5125. for (int i = 0; i < listlines.Count; i++)
  5126. {
  5127. for (int j = 0; j <= lines_height[i]; j++)
  5128. {
  5129. Segment segment = new Segment();
  5130. segment.X = listlines[0].X;
  5131. segment.Y = listlines[0].Y + j;
  5132. segment.Length = 1;
  5133. segments.Add(segment);
  5134. }
  5135. listFeature.Add(segments);
  5136. }
  5137. log.Info("将线转换为segment数据完成", true);
  5138. }
  5139. else
  5140. {
  5141. log.Error("线采集失败", false);
  5142. return false;
  5143. }
  5144. //面数据
  5145. state = 0;
  5146. wr.EDS_Param_Areas(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out area_pt, out width, out height, out state);
  5147. log.Info("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  5148. if (state == 1)
  5149. {
  5150. //将面转换为segment数据
  5151. log.Info("将面转换为segment数据", true);
  5152. List<Segment> segments = new List<Segment>();
  5153. for (int j = 0; j <= height; j++)
  5154. {
  5155. Segment segment = new Segment();
  5156. segment.X = area_pt.X;
  5157. segment.Y = area_pt.Y + j;
  5158. segment.Length = width;
  5159. segments.Add(segment);
  5160. }
  5161. listFeature.Add(segments);
  5162. log.Info("将面转换为segment数据完成", true);
  5163. }
  5164. else
  5165. {
  5166. log.Error("面采集失败", false);
  5167. return false;
  5168. }
  5169. //存储数据
  5170. //向分析点数据库更新
  5171. log.Info("listPoints=" + listPoints.Count.ToString() + ",listFeature=" + listFeature.Count.ToString(), true);
  5172. if (!m_MeasDB.InsetAPoint(a_PointNum, PointsName, EDS_path, listPoints.Count, listFeature.Count, num))
  5173. {
  5174. log.Error("插入分析点失败", false);
  5175. }
  5176. log.Info("插入分析点成功", true);
  5177. int AreasNo = 0;
  5178. long[] XrayData = new long[2000];
  5179. Dictionary<string, double> listElement = new Dictionary<string, double>();
  5180. //点采集
  5181. foreach (System.Drawing.Point pt in listPoints)
  5182. {
  5183. XrayData = new long[2000];
  5184. listElement = new Dictionary<string, double>();
  5185. //log.Info("点采集开始", true);
  5186. iExtender.XrayPointCollectiong(param.PointTime, pt.X, pt.Y, out XrayData, out listElement);
  5187. //写入数据库
  5188. m_nXrayId++;
  5189. Boolean ret = m_MeasDB.InsertAPointXay(a_PointNum, m_nXrayId, pt.X, pt.Y, XrayData, listElement, num);
  5190. log.Info("点采集结束,写入数据库开始--" + m_nXrayId.ToString() + "," + ret.ToString(), true);
  5191. //log.Info("点采集写入数据库结束", true);
  5192. if (m_nXrayId % 5 == 0)
  5193. {
  5194. Thread.Sleep(5000);
  5195. }
  5196. else
  5197. {
  5198. Thread.Sleep(1000);
  5199. }
  5200. }
  5201. //面采集
  5202. foreach (List<Segment> listSeg in listFeature)
  5203. {
  5204. XrayData = new long[2000];
  5205. listElement = new Dictionary<string, double>();
  5206. log.Info("面采集开始", true);
  5207. log.Info("AreaTime=" + param.AreaTime.ToString(), true);
  5208. iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement);
  5209. log.Info("面采集结束,写入数据库开始", true);
  5210. //写入数据库
  5211. m_nXrayId++;
  5212. AreasNo++;
  5213. m_MeasDB.InsertAAreaXay(a_PointNum, m_nXrayId, AreasNo, listSeg, XrayData, listElement, num);
  5214. log.Info("面采集写入数据库结束", true);
  5215. }
  5216. }
  5217. catch (Exception e)
  5218. {
  5219. log.Error(e.Message, false);
  5220. }
  5221. return true;
  5222. }
  5223. /// <summary>
  5224. /// 初始化数据库
  5225. /// </summary>
  5226. public void Init_MeasDB()
  5227. {
  5228. m_MeasDB = new MeasureDB(m_measureFile);
  5229. }
  5230. /// <summary>
  5231. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  5232. /// </summary>
  5233. /// <returns></returns>
  5234. public bool EDS_FindCross()
  5235. {
  5236. float x2 = 0, y2 = 0;
  5237. int state = 0;
  5238. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5239. float m_TempBrightness = 50.0f;
  5240. float m_TempContrast = 30.0f;
  5241. if (m_measureFile.MParam.SampleName == "3")
  5242. {
  5243. m_TempBrightness = 48.0f;
  5244. m_TempContrast = 29.0f;
  5245. }
  5246. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5247. iSEM.SetAutoVideoOff();
  5248. Thread.Sleep(200);
  5249. iSEM.SetBrightness(m_TempBrightness);//50.0f
  5250. Thread.Sleep(200);
  5251. iSEM.SetContrast(m_TempContrast);//30.0f
  5252. Thread.Sleep(200);
  5253. //1.控制SEM放大到300倍
  5254. float mag = m_measureFile.MParam.Photograph_Magnification / 3;
  5255. if (mag < 200)
  5256. {
  5257. mag = 200;
  5258. }
  5259. if (!iSEM.SetMagnification(mag))
  5260. {
  5261. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  5262. arg.State = false;
  5263. SendMsg("1-24");
  5264. log.Error("测量线程报错:" + arg.Message, false);
  5265. return false;
  5266. }
  5267. Thread.Sleep(200);
  5268. float current = iSEM.GetMagnification();
  5269. Thread.Sleep(200);
  5270. while (Math.Abs(current - mag) > 2)
  5271. {
  5272. iSEM.SetMagnification(mag);
  5273. Thread.Sleep(200);
  5274. current = iSEM.GetMagnification();
  5275. Thread.Sleep(200);
  5276. }
  5277. Thread.Sleep(2000);
  5278. //判断是否停止进程
  5279. if (key_stop)
  5280. {
  5281. log.Info("停止键按下", true);
  5282. return false;
  5283. }
  5284. //3.控制SEM拍照
  5285. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
  5286. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5287. String fileName4 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS4;
  5288. log.Info("fileName4=============" + fileName4, true);
  5289. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5290. arg.Picture_Information.Picture_FullPath = fileName4;
  5291. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5292. Thread.Sleep(200);
  5293. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5294. Thread.Sleep(200);
  5295. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5296. Thread.Sleep(200);
  5297. //拍照前改变速度,延时
  5298. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5299. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5300. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5301. Thread.Sleep(200);
  5302. cycle_time = iSEM.GetCycleTime();
  5303. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5304. if (!GetImage(fileName4))
  5305. {
  5306. //arg.State = false;
  5307. //arg.Message = "SEM拍照找切割位置失败";
  5308. //SendMsg("1-25");
  5309. log.Error("测量线程报错:" + arg.Message, false);
  5310. return false;
  5311. }
  5312. //arg.Picture_Information.Picture_FullPath = fileName4;
  5313. //arg.State = true;
  5314. //arg.Message = "SEM拍照成功";
  5315. //SendMsg("1-25");
  5316. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5317. Thread.Sleep(200);
  5318. cycle_time = iSEM.GetCycleTime();
  5319. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5320. //判断是否停止进程
  5321. if (key_stop)
  5322. {
  5323. return false;
  5324. }
  5325. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  5326. //5.根据坐标控制SEM移动到切孔位置,居中
  5327. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  5328. log.Info("文件名=" + fileName4, true);
  5329. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  5330. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  5331. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  5332. if (state == 1)
  5333. {
  5334. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  5335. if (!MoveToPixByMoveStage(x2, y2))
  5336. {
  5337. //arg.State = false;
  5338. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  5339. //SendMsg("1-26");
  5340. log.Error("测量线程报错:" + arg.Message, false);
  5341. return false;
  5342. }
  5343. //判断是否移动完成
  5344. while (true)
  5345. {
  5346. Thread.Sleep(4000);
  5347. if (iSEM.GetStageIs() == 0)
  5348. {
  5349. break;
  5350. }
  5351. }
  5352. //arg.State = true;
  5353. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  5354. //SendMsg("1-26");
  5355. //高倍到低倍不进行对焦
  5356. //拍照前改变速度,延时
  5357. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5358. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5359. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5360. Thread.Sleep(200);
  5361. cycle_time = iSEM.GetCycleTime();
  5362. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5363. if (hand_intervene == 1)
  5364. {
  5365. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5366. }
  5367. }
  5368. else
  5369. {
  5370. arg.Message = "图像接口参数state返回值为零";
  5371. arg.State = false;
  5372. SendMsg("1-26");
  5373. if (hand_intervene == 1)
  5374. {
  5375. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5376. {
  5377. return false;
  5378. }
  5379. }
  5380. else
  5381. {
  5382. return false;
  5383. }
  5384. log.Error("测量线程报错:" + arg.Message, false);
  5385. return false;
  5386. }
  5387. //判断是否停止进程
  5388. if (key_stop)
  5389. {
  5390. log.Info("停止键按下", true);
  5391. return false;
  5392. }
  5393. return true;
  5394. }
  5395. /// <summary>
  5396. /// 171.能谱第17步找点采集数据
  5397. /// </summary>
  5398. /// <returns></returns>
  5399. public bool EDS_ShotSection()
  5400. {
  5401. int state = 0;
  5402. #region 设置拍照的放大倍数
  5403. log.Info("测量线程:设置拍照放大倍数" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  5404. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5405. {
  5406. //arg.Message = "放大倍数调整失败";
  5407. //arg.State = false;
  5408. //SendMsg("1-27");
  5409. log.Error("测量线程报错:" + arg.Message, false);
  5410. return false;
  5411. }
  5412. float set = m_measureFile.MParam.Photograph_Magnification;
  5413. float current = iSEM.GetMagnification();
  5414. while (Math.Abs(current - set) > 1)
  5415. {
  5416. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  5417. Thread.Sleep(200);
  5418. current = iSEM.GetMagnification();
  5419. }
  5420. //arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString() + "成功";
  5421. //arg.State = true;
  5422. //SendMsg("1-27");
  5423. Thread.Sleep(3000 + (Int32)cycle_time);
  5424. //判断是否停止进程
  5425. if (key_stop)
  5426. {
  5427. log.Info("停止键按下", true);
  5428. return false;
  5429. }
  5430. #endregion
  5431. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  5432. //2.控制SEM自动对焦、亮度、对比度-接口
  5433. iSEM.SetReduced(402, 128, 340, 256);
  5434. Thread.Sleep(200);
  5435. //add by sun 2020-12-15
  5436. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//iSEM.CmdFocusRate(5);//
  5437. //add by sun 2020-12-15 end
  5438. Thread.Sleep(200);
  5439. cycle_time = iSEM.GetCycleTime();
  5440. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5441. if (!iSEM.SetAutoVideoOff())
  5442. {
  5443. log.Error("测量线程报错:自动开启亮度对比度失败", false);
  5444. return false;
  5445. }
  5446. Thread.Sleep(5000);
  5447. if (ImageFocus1(false))
  5448. {
  5449. //arg.Message = "自动对焦完成";
  5450. //arg.State = true;
  5451. //SendMsg("1-28");
  5452. }
  5453. else
  5454. {
  5455. //arg.Message = "自动对焦失败";
  5456. //arg.State = false;
  5457. //SendMsg("1-28");
  5458. log.Error("测量线程报错:" + arg.Message, false);
  5459. return false;
  5460. }
  5461. iSEM.CloseReduced();
  5462. Thread.Sleep(200);
  5463. cycle_time = iSEM.GetCycleTime();
  5464. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  5465. //判断是否停止进程
  5466. if (key_stop)
  5467. {
  5468. log.Info("停止键按下", true);
  5469. return false;
  5470. }
  5471. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5472. {
  5473. log.Error("测量线程报错:自动开启亮度对比度失败", false);
  5474. return false;
  5475. }
  5476. Thread.Sleep(5000);
  5477. //3、设置SEM补偿角度
  5478. if (m_measureFile.MParam.Is_Photograph == false)
  5479. {
  5480. log.Info("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString() + "度", true);
  5481. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  5482. {
  5483. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  5484. //arg.State = false;
  5485. //SendMsg("1-29");
  5486. log.Error("测量线程报错:" + arg.Message, false);
  5487. return false;
  5488. }
  5489. //arg.State = true;
  5490. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  5491. //SendMsg("1-29");
  5492. Thread.Sleep(200);
  5493. //判断是否停止进程
  5494. if (key_stop)
  5495. {
  5496. log.Error("停止键按下", false);
  5497. return false;
  5498. }
  5499. }
  5500. //4、拍照,5、保存照片
  5501. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS5;
  5502. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5503. String fileName5 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS5;
  5504. log.Error("fileName5==============="+ fileName5, false);
  5505. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5506. arg.Picture_Information.Picture_FullPath = fileName5;
  5507. arg.Picture_Information.Work_Status = "SEM";
  5508. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5509. Thread.Sleep(200);
  5510. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5511. Thread.Sleep(200);
  5512. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5513. Thread.Sleep(200);
  5514. //拍照前改变速度,延时
  5515. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5516. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5517. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5518. Thread.Sleep(200);
  5519. cycle_time = iSEM.GetCycleTime();
  5520. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  5521. if (!GetImage(fileName5))
  5522. {
  5523. //arg.Message = "SEM拍照失败";
  5524. //arg.State = false;
  5525. //SendMsg("1-30");
  5526. log.Error("测量线程报错:" + arg.Message, false);
  5527. return false;
  5528. }
  5529. //arg.State = true;
  5530. //arg.Message = "SEM拍照成功";
  5531. //SendMsg("1-30");
  5532. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5533. Thread.Sleep(200);
  5534. cycle_time = iSEM.GetCycleTime();
  5535. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5536. //判断是否停止进程
  5537. if (key_stop)
  5538. {
  5539. log.Info("停止键按下", true);
  5540. return false;
  5541. }
  5542. #endregion
  5543. if (m_measureFile.MParam.Is_Photograph == false)
  5544. {
  5545. #region 对当前矩形进行旋转校正
  5546. //8,计算切割面区域偏移角度及方向
  5547. float degree = 0;
  5548. int direction = 0;
  5549. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  5550. log.Info("测量线程:拍照角度移动,输入图像" + ImageNameEDS5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  5551. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  5552. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  5553. if (state == 1)
  5554. {
  5555. //梯形角度
  5556. iSEM.SetScanRotationOn();
  5557. Thread.Sleep(200);
  5558. //20201128陈工要求,谭博返回角度*0.7
  5559. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  5560. Thread.Sleep(200);
  5561. //arg.State = true;
  5562. //arg.Message = "图像接口返回角度为:" + degree.ToString();
  5563. //SendMsg("1-31");
  5564. if (hand_intervene == 1)
  5565. {
  5566. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5567. }
  5568. }
  5569. else
  5570. {
  5571. //arg.Message = "图像接口参数State返回值为零";
  5572. //arg.State = false;
  5573. //SendMsg("1-31");
  5574. if (hand_intervene == 1)
  5575. {
  5576. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5577. {
  5578. return false;
  5579. }
  5580. }
  5581. else
  5582. {
  5583. //return false;
  5584. }
  5585. log.Error("测量线程报错:" + arg.Message, false);
  5586. }
  5587. //判断是否停止进程
  5588. if (key_stop)
  5589. {
  5590. log.Info("停止键按下", true);
  5591. return false;
  5592. }
  5593. Thread.Sleep(200);
  5594. //12拍照
  5595. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS6;
  5596. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5597. String fileName6 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS6;
  5598. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5599. log.Info("fileName6===================" + fileName6, true);
  5600. arg.Picture_Information.Picture_FullPath = fileName6;
  5601. arg.Picture_Information.Work_Status = "SEM";
  5602. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5603. Thread.Sleep(200);
  5604. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5605. Thread.Sleep(200);
  5606. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5607. Thread.Sleep(200);
  5608. //拍照前改变速度,延时
  5609. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5610. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5611. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5612. Thread.Sleep(200);
  5613. cycle_time = iSEM.GetCycleTime();
  5614. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5615. if (!GetImage(fileName6))
  5616. {
  5617. //arg.Message = "SEM拍照失败";
  5618. //arg.State = false;
  5619. //SendMsg("1-33");
  5620. log.Error("测量线程报错:" + arg.Message, false);
  5621. return false;
  5622. }
  5623. //arg.State = true;
  5624. //arg.Message = "SEM拍照成功";
  5625. //SendMsg("1-33");
  5626. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5627. Thread.Sleep(200);
  5628. cycle_time = iSEM.GetCycleTime();
  5629. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5630. //判断是否停止进程
  5631. if (key_stop)
  5632. {
  5633. log.Info("停止键按下", true);
  5634. return false;
  5635. }
  5636. #endregion
  5637. #region 获取两个位置上及放大倍数
  5638. //计算两个测量区域坐标
  5639. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  5640. List<float> mag = new List<float>();
  5641. System.Drawing.Point ct0;
  5642. float magMax = 0;
  5643. //log.Info("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  5644. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  5645. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  5646. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  5647. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  5648. "输入产品" + m_measureFile.MParam.Firm.ToString()
  5649. + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  5650. + "输出放大倍数1" + mag[0]
  5651. + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  5652. + "输出放大倍数2" + mag[0]
  5653. + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  5654. #endregion
  5655. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  5656. {
  5657. //arg.State = true;
  5658. //arg.Message = "获取位置及放大倍数成功";
  5659. //SendMsg("1-34");
  5660. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  5661. float xs = iSEM.GetBeamShiftX();
  5662. Thread.Sleep(200);
  5663. float ys = iSEM.GetBeamShiftY();
  5664. Thread.Sleep(200);
  5665. float xpCur = iSEM.GetStageAtX();
  5666. Thread.Sleep(200);
  5667. float ypCur = iSEM.GetStageAtY();
  5668. Thread.Sleep(200);
  5669. log.Info("测量线程:原来的光束偏移量x = " + xs.ToString()
  5670. + "y=" + ys.ToString() + ","
  5671. + "原来样品台的位置x= " + xpCur.ToString()
  5672. + "y=" + ypCur.ToString(), true);
  5673. #endregion
  5674. #region 移动到梯形左上角
  5675. //找到放大倍数最大值
  5676. magMax = mag[0];
  5677. for (int m = 1; m < mag.Count; m++)
  5678. {
  5679. if (mag[m] > magMax)
  5680. {
  5681. magMax = mag[m];
  5682. }
  5683. }
  5684. //20201127将视野移动到梯形左上角位置
  5685. MoveToPix(ct0.X, ct0.Y);
  5686. log.Info("测量线程:移动到对焦点( " + ct0.X.ToString()
  5687. + "," + ct0.Y.ToString() + ")", true);
  5688. //关闭自动亮度对比度
  5689. iSEM.SetAutoVideoOff();
  5690. Thread.Sleep(2000);
  5691. iSEM.SetReduced(402, 128, 340, 256);
  5692. Thread.Sleep(200);
  5693. //add by sun 2020-12-15
  5694. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5695. //add by sun 2020-12-15 end
  5696. Thread.Sleep(200);
  5697. cycle_time = iSEM.GetCycleTime();
  5698. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5699. //放大到10000倍
  5700. iSEM.SetMagnification(magMax / 2);
  5701. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5702. set = magMax / 2;
  5703. current = iSEM.GetMagnification();
  5704. while (Math.Abs(current - set) > 1)
  5705. {
  5706. iSEM.SetMagnification(set);
  5707. Thread.Sleep(200);
  5708. current = iSEM.GetMagnification();
  5709. }
  5710. //自动对焦
  5711. if (!ImageFocus1(true))
  5712. {
  5713. return false;
  5714. }
  5715. //放大到10000倍
  5716. iSEM.SetMagnification(magMax);
  5717. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5718. set = magMax;
  5719. current = iSEM.GetMagnification();
  5720. while (Math.Abs(current - set) > 1)
  5721. {
  5722. iSEM.SetMagnification(set);
  5723. Thread.Sleep(200);
  5724. current = iSEM.GetMagnification();
  5725. }
  5726. //自动对焦
  5727. if (!ImageFocus1(true))
  5728. {
  5729. return false;
  5730. }
  5731. iSEM.CloseReduced();
  5732. Thread.Sleep(200);
  5733. cycle_time = iSEM.GetCycleTime();
  5734. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5735. #endregion
  5736. #region 恢复到拍照的状态
  5737. iSEM.SetStageGotoX(xpCur);
  5738. while (true)
  5739. {
  5740. Thread.Sleep(4000);
  5741. if (iSEM.GetStageIs() == 0)
  5742. {
  5743. break;
  5744. }
  5745. }
  5746. iSEM.SetStageGotoY(ypCur);
  5747. while (true)
  5748. {
  5749. Thread.Sleep(4000);
  5750. if (iSEM.GetStageIs() == 0)
  5751. {
  5752. break;
  5753. }
  5754. }
  5755. iSEM.CloseReduced();
  5756. Thread.Sleep(200);
  5757. cycle_time = iSEM.GetCycleTime();
  5758. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5759. //增亮图像
  5760. iSEM.SetAutoVideoOff();
  5761. Thread.Sleep(200);
  5762. float currentBright = iSEM.GetBrightness();
  5763. Thread.Sleep(200);
  5764. float currentContrast = iSEM.GetContrast();
  5765. Thread.Sleep(200);
  5766. iSEM.SetBrightness(currentBright + 2);
  5767. Thread.Sleep(200);
  5768. iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
  5769. Thread.Sleep(200);
  5770. #endregion
  5771. #region 循环拍照
  5772. for (int n = 0; n < ct.Count; n++)
  5773. {
  5774. #region 恢复到拍照的状态
  5775. iSEM.SetStageGotoX(xpCur);
  5776. while (true)
  5777. {
  5778. Thread.Sleep(4000);
  5779. if (iSEM.GetStageIs() == 0)
  5780. {
  5781. break;
  5782. }
  5783. }
  5784. iSEM.SetStageGotoY(ypCur);
  5785. while (true)
  5786. {
  5787. Thread.Sleep(4000);
  5788. if (iSEM.GetStageIs() == 0)
  5789. {
  5790. break;
  5791. }
  5792. }
  5793. //恢复原来的放大倍数
  5794. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5795. {
  5796. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5797. return false;
  5798. }
  5799. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5800. set = m_measureFile.MParam.Photograph_Magnification;
  5801. current = iSEM.GetMagnification();
  5802. while (Math.Abs(current - set) > 1)
  5803. {
  5804. iSEM.SetMagnification(set);
  5805. Thread.Sleep(200);
  5806. current = iSEM.GetMagnification();
  5807. }
  5808. //恢复BeamShift的百分比值
  5809. iSEM.SetBeamShiftX(xs);
  5810. Thread.Sleep(200);
  5811. iSEM.SetBeamShiftY(ys);
  5812. Thread.Sleep(200);
  5813. #endregion
  5814. #region 移动到指定点位置
  5815. if (!MoveToPix(ct[n].X, ct[n].Y))
  5816. {
  5817. arg.State = false;
  5818. arg.Message = "移动到第一个点位置失败";
  5819. SendMsg("1-" + (35 + n).ToString());
  5820. //移动到第一个点失败
  5821. log.Error("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  5822. }
  5823. log.Info("测量线程:移动到第1个点( " + ct[n].X.ToString()
  5824. + "," + ct[n].Y.ToString() + ")", true);
  5825. #endregion
  5826. #region 如果是第一个点,则1W倍对焦
  5827. if (n == 0)
  5828. {
  5829. }
  5830. #endregion
  5831. #region 拍照
  5832. if (!iSEM.SetMagnification(mag[n]))
  5833. {
  5834. arg.State = false;
  5835. arg.Message = "移动到第一个点位置拍照失败";
  5836. SendMsg("1-35");
  5837. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5838. return false;
  5839. }
  5840. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5841. set = mag[n];
  5842. current = iSEM.GetMagnification();
  5843. while (Math.Abs(current - set) > 1)
  5844. {
  5845. iSEM.SetMagnification(set);
  5846. Thread.Sleep(200);
  5847. current = iSEM.GetMagnification();
  5848. }
  5849. DoEDS(m_nWorkHoleNo + 1, cutHoles[m_nWorkHoleNo].HoleName, n + 1);
  5850. #endregion
  5851. }
  5852. #endregion
  5853. if (hand_intervene == 1)
  5854. {
  5855. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5856. }
  5857. }
  5858. else
  5859. {
  5860. if (hand_intervene == 1)
  5861. {
  5862. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5863. {
  5864. // return false;
  5865. }
  5866. }
  5867. else
  5868. {
  5869. //return false;
  5870. }
  5871. //arg.State = false;
  5872. //arg.Message = "获取位置及放大倍数失败";
  5873. //SendMsg("1-34");
  5874. log.Error("测量线程报错:" + arg.Message, false);
  5875. }
  5876. //判断是否停止进程
  5877. if (key_stop)
  5878. {
  5879. log.Info("停止键按下", true);
  5880. return false;
  5881. }
  5882. }
  5883. //判断是否停止进程
  5884. if (key_stop)
  5885. {
  5886. return false;
  5887. }
  5888. return true;
  5889. }
  5890. /// <summary>
  5891. /// 19.能谱分析
  5892. /// </summary>
  5893. /// <returns></returns>
  5894. public bool EDSAnalysis()
  5895. {
  5896. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  5897. if (m_measureFile.MParam.EDSZ < Z_Min || m_measureFile.MParam.EDSZ > Z_Max)
  5898. {
  5899. log.Info("Z轴位置设置超出范围.", true);
  5900. return false;
  5901. }
  5902. log.Info("将Z轴位置指定到:" + m_measureFile.MParam.EDSZ.ToString(), true);
  5903. if (!iSEM.SetStageGotoZ(m_measureFile.MParam.EDSZ))
  5904. {
  5905. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  5906. return false;
  5907. }
  5908. while (true)
  5909. {
  5910. Thread.Sleep(4000);
  5911. if (iSEM.GetStageIs() == 0)
  5912. {
  5913. break;
  5914. }
  5915. }
  5916. //判断是否停止进程
  5917. if (key_stop)
  5918. {
  5919. log.Info("停止键按下", true);
  5920. return false;
  5921. }
  5922. //2.角度改为54度
  5923. iSEM.SetScanRotationOff();
  5924. Thread.Sleep(200);
  5925. //3.设置电压和电流
  5926. iSEM.SetSEMVoltage(m_measureFile.MParam.EDSV);
  5927. Thread.Sleep(2000);
  5928. iSEM.SetSEMIPROBE(m_measureFile.MParam.EDSA);
  5929. Thread.Sleep(500);
  5930. //4.自动亮度对比度 del by sun 2020-12-17
  5931. //iSEM.SetAutoBright(100);
  5932. //Thread.Sleep(200);
  5933. //iSEM.SetAutoContrast(100);
  5934. //Thread.Sleep(200);
  5935. //if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5936. //{
  5937. // log.Info("测量线程报错:开始设置自动亮度、对比度失败。", false);
  5938. // return false;
  5939. //}
  5940. //Thread.Sleep(5000);
  5941. //del by sun 2020-12-17
  5942. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5943. //关闭自动亮度对比度
  5944. iSEM.SetAutoVideoOff();
  5945. Thread.Sleep(2000);
  5946. float m_TempBrightness = 50f;
  5947. float m_TempContrast = 29f;
  5948. if (m_measureFile.MParam.SampleName == "3")
  5949. {
  5950. m_TempBrightness = 50f;
  5951. m_TempContrast = 29f;
  5952. }
  5953. iSEM.SetBrightness(m_TempBrightness); //50.0f
  5954. Thread.Sleep(200);
  5955. iSEM.SetContrast(m_TempContrast); //30.0f
  5956. Thread.Sleep(5000);
  5957. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5958. //5.自动对焦
  5959. iSEM.SetReduced(256, 192, 512, 512);
  5960. Thread.Sleep(200);
  5961. //add by sun 2020-12-15
  5962. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5963. //add by sun 2020-12-15 end
  5964. Thread.Sleep(200);
  5965. cycle_time = iSEM.GetCycleTime();
  5966. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5967. if (!ImageFocus1(false))
  5968. {
  5969. return false;
  5970. }
  5971. iSEM.CloseReduced();
  5972. Thread.Sleep(200);
  5973. cycle_time = iSEM.GetCycleTime();
  5974. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5975. //6.调用161步过程
  5976. if (!EDS_FindCross())
  5977. {
  5978. return false;
  5979. }
  5980. //7.调用171步过程
  5981. if (!EDS_ShotSection())
  5982. {
  5983. return false;
  5984. }
  5985. return true;
  5986. }
  5987. /// <summary>
  5988. /// 20.光束等复位
  5989. /// </summary>
  5990. public void BeamShiftReset()
  5991. {
  5992. iSEM.SetTiltAngleOff();
  5993. Thread.Sleep(200);
  5994. iSEM.SetScanRotationOff();
  5995. Thread.Sleep(200);
  5996. iSEM.SetBeamShiftX(0);
  5997. Thread.Sleep(200);
  5998. iSEM.SetBeamShiftY(0);
  5999. Thread.Sleep(200);
  6000. }
  6001. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  6002. #region 设置电压电流
  6003. public bool SetVoltageAndIPROBE()
  6004. {
  6005. log.Info("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  6006. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  6007. bool mRet_VoltageFlag = false;
  6008. bool mRet_ElecFlag = false;
  6009. if (m_measureFile.MParam.SampleName != "3")
  6010. {
  6011. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  6012. Thread.Sleep(500);
  6013. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  6014. Thread.Sleep(500);
  6015. }
  6016. else
  6017. {
  6018. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  6019. Thread.Sleep(500);
  6020. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  6021. Thread.Sleep(500);
  6022. }
  6023. if (!mRet_VoltageFlag) return false;
  6024. if (!mRet_ElecFlag) return false;
  6025. log.Info("测量线程:设置电压电流完成!" , true);
  6026. return true;
  6027. }
  6028. #endregion
  6029. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  6030. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  6031. #region 拍照
  6032. public bool GetImageFromSEM(float m_Mag) {
  6033. if (!iSEM.SetMagnification(m_Mag))
  6034. {
  6035. log.Error("测量线程报错:第一个区域放大倍数" + m_Mag.ToString() + "失败", false);
  6036. return false;
  6037. }
  6038. log.Info("========测量线程:移动到第一个点位置拍照完成(一半倍数)!", true);
  6039. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  6040. String m_FileName = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_Mag.ToString() + "_0_" + ImageNameTwo_1;
  6041. //arg.Picture_Information.Picture_FullPath = m_FileName;
  6042. //arg.Picture_Information.Work_Status = "SEM";
  6043. //arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  6044. //Thread.Sleep(200);
  6045. //arg.Picture_Information.Magnification = iSEM.GetMagnification();
  6046. //Thread.Sleep(200);
  6047. //arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  6048. //Thread.Sleep(200);
  6049. //拍照前改变速度,延时
  6050. iSEM.CmdLineScan();
  6051. Thread.Sleep(200);
  6052. cycle_time = iSEM.GetCycleTime();
  6053. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  6054. if (!GetImage(m_FileName))
  6055. {
  6056. log.Error("测量线程报错:========" + arg.Message, false);
  6057. return false;
  6058. }
  6059. log.Info("========测量线程:移动到第一个点位置完成!", true);
  6060. return true;
  6061. }
  6062. #endregion
  6063. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  6064. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息
  6065. public void SaveMeasDataPic(String picFullPath,float Mag,float pixelsize)
  6066. {
  6067. try
  6068. {
  6069. using (System.Drawing.Image img = Image.FromFile(picFullPath))
  6070. {
  6071. Bitmap bmp = new Bitmap(img.Width, img.Height);
  6072. using (Graphics g = Graphics.FromImage(bmp))
  6073. {
  6074. g.DrawImage(img, 0, 0, img.Width, img.Height);
  6075. String str = "Mag:" + Mag.ToString("0") + "X\tPixelSize:" + (pixelsize * 1000000).ToString("0.00") + "um";
  6076. Font font =new Font("宋体", 16, FontStyle.Bold);
  6077. SolidBrush sbrush = new SolidBrush(Color.LimeGreen);
  6078. g.DrawString(str, font, sbrush, new PointF(40, img.Height - 30));
  6079. }
  6080. String path1 = Path.GetDirectoryName(picFullPath) + Path.GetFileNameWithoutExtension(picFullPath) + "_Data." + Path.GetExtension(picFullPath);
  6081. log.Info("Path.GetDirectoryName(picFullPath)==" + Path.GetDirectoryName(picFullPath) + "Path.GetFileNameWithoutExtension(picFullPath)==" + Path.GetFileNameWithoutExtension(picFullPath) + "Path.GetExtension(picFullPath)==" + Path.GetExtension(picFullPath), true);
  6082. log.Info("在测量图上显示放大倍数和像素大小信息==============="+ path1, true);
  6083. bmp.Save(path1);
  6084. }
  6085. }
  6086. catch
  6087. {
  6088. log.Error("在测量图上显示放大倍数和像素大小信息失败", false);
  6089. }
  6090. }
  6091. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息 end
  6092. #endregion
  6093. }
  6094. }