Measure.cs 71 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using WebManager;
  16. using OpenCvSharp;
  17. namespace MeasureThread
  18. {
  19. //图片模式
  20. public enum ImageMode
  21. {
  22. FIB,
  23. SEM
  24. }
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. public class ThreadStatusEventArgs
  28. {
  29. //状态
  30. public string State
  31. {
  32. get { return m_state; }
  33. set { m_state = value; }
  34. }
  35. private string m_state;
  36. //时间
  37. public DateTime Time
  38. {
  39. get { return m_time; }
  40. set { m_time = value; }
  41. }
  42. private DateTime m_time;
  43. //步骤代码
  44. public String Step_Code
  45. {
  46. get { return step_Code; }
  47. set { step_Code = value; }
  48. }
  49. private String step_Code;
  50. //其他消息
  51. public String Message
  52. {
  53. get { return this.message; }
  54. set { this.message = value; }
  55. }
  56. private String message;
  57. //孔名
  58. public String HoleName
  59. {
  60. get { return this.holeName; }
  61. set { this.holeName = value; }
  62. }
  63. private String holeName;
  64. //图片信息
  65. public class PictureInformation
  66. {
  67. public String Picture_FullPath
  68. {
  69. get { return picture_FullPath; }
  70. set { picture_FullPath = value; }
  71. }
  72. private String picture_FullPath;
  73. public double Work_Voltage
  74. {
  75. get { return work_Voltage; }
  76. set { work_Voltage = value; }
  77. }
  78. private double work_Voltage;
  79. public double Magnification
  80. {
  81. get { return magnification; }
  82. set { magnification = value; }
  83. }
  84. private double magnification;
  85. public double Work_Distance
  86. {
  87. get { return work_Distance; }
  88. set { work_Distance = value; }
  89. }
  90. private double work_Distance;
  91. public String Work_Status
  92. {
  93. get { return work_Status; }
  94. set { work_Status = value; }
  95. }
  96. private String work_Status;
  97. }
  98. //图片信息实例类
  99. public PictureInformation Picture_Information
  100. {
  101. get { return picture_Information; }
  102. set { picture_Information = value; }
  103. }
  104. private PictureInformation picture_Information;
  105. //图像信息
  106. public class ImageInformation
  107. {
  108. public int Method_Name
  109. {
  110. get { return method_Name; }
  111. set { method_Name = value; }
  112. }
  113. private int method_Name;
  114. public Source_Img_Degree_Direction SIDD;
  115. public Cut_Position CP;
  116. public Cut_Success CS;
  117. public Trapezoid_Top_Center_Position TTCP;
  118. public Auto_Foucs AF;
  119. public Auto_Stigmatic AS;
  120. public Center_Position_OffsetAngle_Direction CPOD;
  121. public Measure_Size MS;
  122. public ImageInformation()
  123. {
  124. SIDD = new Source_Img_Degree_Direction();
  125. CP = new Cut_Position();
  126. CS = new Cut_Success();
  127. TTCP = new Trapezoid_Top_Center_Position();
  128. AF = new Auto_Foucs();
  129. AS = new Auto_Stigmatic();
  130. CPOD = new Center_Position_OffsetAngle_Direction();
  131. MS = new Measure_Size();
  132. }
  133. //1-计算原始图像偏移角度及方向
  134. public class Source_Img_Degree_Direction
  135. {
  136. public Boolean Is_Image = false;
  137. public double Degree
  138. {
  139. get { return degree; }
  140. set { degree = value; }
  141. }
  142. private double degree;
  143. public int Direction
  144. {
  145. get { return direction; }
  146. set { direction = value; }
  147. }
  148. private int direction;
  149. public int State
  150. {
  151. get { return state; }
  152. set { state = value; }
  153. }
  154. private int state;
  155. }
  156. //2-计算切割点位置
  157. public class Cut_Position
  158. {
  159. public Boolean Is_Image = false;
  160. public double Offsetx
  161. {
  162. get { return offsetx; }
  163. set { offsetx = value; }
  164. }
  165. private double offsetx;
  166. public double Offsety
  167. {
  168. get { return offsety; }
  169. set { offsety = value; }
  170. }
  171. private double offsety;
  172. public int State
  173. {
  174. get { return state; }
  175. set { state = value; }
  176. }
  177. private int state;
  178. }
  179. //3-是否切割成功
  180. public class Cut_Success
  181. {
  182. public Boolean Is_Image = false;
  183. public int State
  184. {
  185. get { return state; }
  186. set { state = value; }
  187. }
  188. private int state;
  189. }
  190. //4-计算切割后图像梯形区域上边中心点坐标
  191. public class Trapezoid_Top_Center_Position
  192. {
  193. public Boolean Is_Image = false;
  194. public double TopCenterX
  195. {
  196. get { return topCenterX; }
  197. set { topCenterX = value; }
  198. }
  199. private double topCenterX;
  200. public double TopCenterY
  201. {
  202. get { return topCenterY; }
  203. set { topCenterY = value; }
  204. }
  205. private double topCenterY;
  206. public int State
  207. {
  208. get { return state; }
  209. set { state = value; }
  210. }
  211. private int state;
  212. }
  213. //5-自动对焦
  214. public class Auto_Foucs
  215. {
  216. public Boolean Is_Image = true;
  217. public String Img_Path
  218. {
  219. get { return img_Path; }
  220. set { img_Path = value; }
  221. }
  222. private String img_Path;
  223. }
  224. //6-自动像闪
  225. public class Auto_Stigmatic
  226. {
  227. public Boolean Is_Image = true;
  228. public String Img_Path
  229. {
  230. get { return img_Path; }
  231. set { img_Path = value; }
  232. }
  233. private String img_Path;
  234. }
  235. //7-计算切割面区域中心坐标,以及偏移角度及方向
  236. public class Center_Position_OffsetAngle_Direction
  237. {
  238. public Boolean Is_Image = false;
  239. public double CenterX
  240. {
  241. get { return centerX; }
  242. set { centerX = value; }
  243. }
  244. private double centerX;
  245. public double CenterY
  246. {
  247. get { return centerY; }
  248. set { centerY = value; }
  249. }
  250. private double centerY;
  251. public double Degree
  252. {
  253. get { return degree; }
  254. set { degree = value; }
  255. }
  256. private double degree;
  257. public int Direction
  258. {
  259. get { return direction; }
  260. set { direction = value; }
  261. }
  262. private int direction;
  263. public int State
  264. {
  265. get { return state; }
  266. set { state = value; }
  267. }
  268. private int state;
  269. }
  270. //8-测量尺寸
  271. public class Measure_Size
  272. {
  273. public Boolean Is_Image = false;
  274. public int State
  275. {
  276. get { return state; }
  277. set { state = value; }
  278. }
  279. private int state;
  280. }
  281. }
  282. //图像信息实例类
  283. public ImageInformation Image_Information
  284. {
  285. get { return image_Information; }
  286. set { image_Information = value; }
  287. }
  288. private ImageInformation image_Information;
  289. public ThreadStatusEventArgs(string a_State)
  290. {
  291. picture_Information = new PictureInformation();
  292. image_Information = new ImageInformation();
  293. }
  294. }
  295. public class CutHolesStatusEventArgs
  296. {
  297. public string State
  298. {
  299. get { return m_state; }
  300. set { m_state = value; }
  301. }
  302. private string m_state;
  303. public string HoleName
  304. {
  305. get { return m_holeName; }
  306. set { m_holeName = value; }
  307. }
  308. private string m_holeName;
  309. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  310. {
  311. this.m_state = a_state;
  312. this.m_holeName = a_holeName;
  313. }
  314. }
  315. public class Measure
  316. {
  317. /// <summary>
  318. /// 图像拉直算法
  319. /// </summary>
  320. /// <param name="Slope">倾斜角度</param>
  321. /// <param name="x0">圆心坐标x</param>
  322. /// <param name="y0">圆心坐标y</param>
  323. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  324. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  325. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  326. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  327. /// <returns></returns>
  328. public bool Straightening(double Slope, int x0, int y0, int x1, int y1, ref int Hx, ref int Hy)
  329. {
  330. try
  331. {
  332. double xr = x1 - x0;//倾斜图到中心的距离差x
  333. double yr = y1 - y0;//倾斜图到中心的距离差y
  334. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  335. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  336. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  337. double k_S = k - Slope;//通过夹角差求x2,y2
  338. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  339. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  340. if (Slope > 0 || Slope < 0)
  341. {
  342. Hx = x1 - x2;
  343. Hy = y1 - y2;
  344. }
  345. else
  346. {
  347. Hx = 0;
  348. Hy = 0;
  349. }
  350. return true;
  351. }
  352. catch (Exception)
  353. {
  354. return false;
  355. }
  356. }
  357. public WebResult wr = null;
  358. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  359. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  360. //定义一个全局的消息类
  361. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  362. //全局只有一个fatorySEM
  363. static FactoryHardware factorySEM = FactoryHardware.Instance;
  364. ISEMControl iSEM = factorySEM.ISEM;
  365. //@的作用是不用转义字符\\只打一个就行
  366. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  367. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  368. const String ImageName3 = @"ImageFIB600X2.tif";
  369. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  370. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  371. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  372. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  373. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  374. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  375. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  376. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  377. const String ElyDeposition = @"Deposition.ely"; //沉积
  378. const String ElyCrossSection = @"CrossSection.ely"; //切割
  379. const float fMin = (float)0.0000002; //单位是米
  380. int m_nWorkHoleNo = -1;
  381. //测量文件
  382. private MeasureFile m_measureFile;
  383. public MeasureFile MeasureFile
  384. {
  385. get { return this.m_measureFile; }
  386. set { this.m_measureFile = value; }
  387. }
  388. //测量的切割孔
  389. private List<MeasureData.CutHole> m_cutHoles;
  390. public List<MeasureData.CutHole> cutHoles
  391. {
  392. get { return this.m_cutHoles; }
  393. set { this.m_cutHoles = value; }
  394. }
  395. //工作文件夹
  396. private string m_WorkingFolder;
  397. public string WorkingFolder
  398. {
  399. get { return this.m_WorkingFolder; }
  400. set { this.m_WorkingFolder = value; }
  401. }
  402. //程序当前路径
  403. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  404. //线程状态
  405. private ThreadStatus m_ThreadStatus;
  406. public ThreadStatus TStatus
  407. {
  408. get { return this.m_ThreadStatus; }
  409. set { this.m_ThreadStatus = value; }
  410. }
  411. //测量参数
  412. private MeasureParam m_MsParam;
  413. public MeasureParam MeasParam
  414. {
  415. get { return this.m_MsParam; }
  416. set { this.m_MsParam = value; }
  417. }
  418. //构造函数
  419. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  420. {
  421. MeasParam = new MeasureParam();
  422. TStatus = new ThreadStatus();
  423. cutHoles = new List<MeasureData.CutHole>();
  424. //配置远程连接
  425. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  426. }
  427. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  428. public bool InitMeas(MeasureFile a_measureFile)
  429. {
  430. m_measureFile = a_measureFile;
  431. List<CutHole> listHoles = m_measureFile.ListCutHole;
  432. foreach (CutHole h in listHoles)
  433. {
  434. if (h.SWITCH == true)
  435. {
  436. m_cutHoles.Add(h);
  437. }
  438. }
  439. if (m_cutHoles.Count == 0)
  440. return false;
  441. this.m_MsParam = m_measureFile.MParam;
  442. return true;
  443. }
  444. public void SendMsg(string step_code)
  445. {
  446. arg.State = step_code;
  447. SendThreadStatus(this, arg);
  448. }
  449. public void SendMsg1(string step_code)
  450. {
  451. arg.Step_Code = step_code;
  452. arg.Time = DateTime.Now;
  453. switch(step_code)
  454. {
  455. //拍照
  456. case "1-5":
  457. case "1-7":
  458. case "1-16":
  459. case "1-24":
  460. //电压、放大倍数、工作距离、位置信息、图片路径
  461. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  462. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  463. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  464. break;
  465. case "1-10":
  466. case "1-18":
  467. //获取偏移信息
  468. break;
  469. case "1-12":
  470. case "1-20":
  471. //验证移动准备性
  472. break;
  473. case "1-26":
  474. //取消电子束校正并初始化
  475. break;
  476. default:
  477. arg.State = "1";
  478. break;
  479. }
  480. SendThreadStatus(this, arg);
  481. }
  482. public void SendCutHoleMsg(string a_state, string a_holeName)
  483. {
  484. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  485. arg.HoleName = a_holeName;
  486. arg.State = a_state;
  487. SendCutHolesStatus(this, arg);
  488. }
  489. //测量流程
  490. public void DoMeasure()
  491. {
  492. //创建线程的测量状态的更新
  493. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  494. if (SendThreadStatus != null)
  495. {
  496. SendMsg("开始测量。");
  497. }
  498. //检查硬件连接是否正常
  499. if (!ConnectHardware())
  500. {
  501. SendMsg("连接硬件失败。");
  502. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  503. return;
  504. }
  505. SendMsg("硬件连接成功。");
  506. //设置工作文件夹
  507. if (!SetWorkingFolderStr())
  508. {
  509. SendMsg("设置工作文件夹失败");
  510. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  511. return;
  512. }
  513. SendMsg("创建工作文件路径为" + WorkingFolder);
  514. float[] firstPosition;
  515. for (int i = 0; i < m_cutHoles.Count; i++)
  516. {
  517. m_nWorkHoleNo = i;
  518. arg.HoleName = cutHoles[m_nWorkHoleNo].HoleName;
  519. if (i == 0)
  520. {
  521. SendMsg("第一个切孔开始测量");
  522. //切孔操作-开始
  523. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  524. firstPosition = iSEM.GetStagePosition();
  525. //第一个孔的测试
  526. FirstHole();
  527. //切孔操作-完成
  528. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  529. }
  530. else
  531. {
  532. //非第一个孔的测试
  533. SendMsg("第" + i.ToString() + "个切孔开始测量");
  534. //切孔操作-开始
  535. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  536. OtherHole();
  537. //切孔操作-完成
  538. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  539. }
  540. }
  541. }
  542. //检查硬件连接是否正常
  543. public bool ConnectHardware()
  544. {
  545. //返回硬件的连接状态
  546. return iSEM.ConnectStatus();
  547. }
  548. //设置工作文件夹
  549. public bool SetWorkingFolderStr()
  550. {
  551. WorkingFolder = m_measureFile.FilePath;
  552. return true;
  553. }
  554. //插入PT针
  555. public bool InsertPT()
  556. {
  557. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  558. //SendMsg("调用宏插入PT针宏文件" + fn);
  559. iSEM.CMDMCFFilename(fn);
  560. //延时1s??
  561. Thread.Sleep(1000);
  562. return true;
  563. }
  564. //撤出PT针
  565. public bool RetractPT()
  566. {
  567. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  568. //SendMsg("调用宏撤出PT针宏文件" + fn);
  569. iSEM.CMDMCFFilename(fn);
  570. //延时1s??
  571. Thread.Sleep(1000);
  572. return true;
  573. }
  574. //PT沉积
  575. public bool PTWork()
  576. {
  577. //执行PT沉积的ELY文件
  578. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  579. //SendMsg("执行PT沉积Ely文件:" + fn);
  580. if (!ExcuteEly(fn))
  581. {
  582. return false;
  583. }
  584. //等待沉积完成
  585. while (true)
  586. {
  587. Thread.Sleep(10000);
  588. if (iSEM.GetFIBMode() == 0)
  589. {
  590. break;
  591. }
  592. }
  593. return true;
  594. }
  595. //FIB切割
  596. public bool FIBWork()
  597. {
  598. //执行PT沉积的ELY文件
  599. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  600. //SendMsg("执行FIB切割Ely文件:" + fn);
  601. if (!ExcuteEly(fn))
  602. {
  603. return false;
  604. }
  605. //等待切割完成
  606. while (true)
  607. {
  608. Thread.Sleep(10000);
  609. if (iSEM.GetFIBMode() == 0)
  610. {
  611. break;
  612. }
  613. }
  614. return true;
  615. }
  616. //执行ELY文件的步骤
  617. public bool ExcuteEly(string a_filename)
  618. {
  619. //执行ELy文件有三个动作
  620. //1. 选择ELY文件
  621. //SendMsg("选择ELY文件");
  622. if (!iSEM.CmdFIBLoadELY(a_filename))
  623. {
  624. //SendMsg("选择ELY文件失败");
  625. return false;
  626. }
  627. Thread.Sleep(1000);
  628. //2. 确认ELY文件
  629. //SendMsg("确认ELY文件");
  630. if (!iSEM.CmdFIBEXPOSUREELY())
  631. {
  632. //SendMsg("确认ELY文件失败");
  633. return false;
  634. }
  635. Thread.Sleep(1000);
  636. //3. 执行ELY文件
  637. //SendMsg("执行ELY文件");
  638. if (!iSEM.CmdFIBSTARTELY())
  639. {
  640. //SendMsg("执行ELY文件失败");
  641. return false;
  642. }
  643. Thread.Sleep(1000);
  644. return true;
  645. }
  646. /// <summary>
  647. ///13. 自动 定位功能,沉积
  648. /// </summary>
  649. /// <returns></returns>
  650. public bool GetPoistion(Boolean isFirst)
  651. {
  652. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  653. int state = 0;
  654. //SendMsg("自动定位");
  655. //13.自动定位切割
  656. {
  657. //1.控制SEM放大600X
  658. arg.State = "SEM";
  659. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  660. {
  661. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString("0.0") + "倍失败";
  662. SendMsg("1-2");
  663. return false;
  664. }
  665. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString("0.0") + "倍成功";
  666. SendMsg("1-2");
  667. //2.控制SEM自动对焦、亮度、对比度
  668. if (m_measureFile.MParam.FocusMode==1)//手动
  669. {
  670. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  671. {
  672. arg.Message = "自动对焦完成";
  673. SendMsg("1-3");
  674. //return true;
  675. }
  676. else
  677. {
  678. arg.Message = "自动对焦失败";
  679. SendMsg("1-3");
  680. return false;
  681. }
  682. }
  683. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  684. {
  685. //郝工增加自动对焦算法
  686. }
  687. else //客户自动
  688. {
  689. //后期和客户对接接口
  690. List<string> filenames = new List<string>();
  691. String retfilename = wr.Img_Auto_Focus(filenames);
  692. }
  693. //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
  694. if (!isFirst)
  695. {
  696. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  697. {
  698. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  699. SendMsg("1-4");
  700. return false;
  701. }
  702. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  703. SendMsg("1-4");
  704. Thread.Sleep(5000);
  705. }
  706. //4.控制SEM拍照,5保存照片
  707. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  708. arg.Picture_Information.Picture_FullPath = fileName1;
  709. arg.Picture_Information.Work_Status = "SEM";
  710. if (!GetImage(ImageMode.SEM, fileName1))
  711. {
  712. arg.Message = "SEM拍照失败";
  713. SendMsg("1-5");
  714. return false;
  715. }
  716. arg.Message = "SEM拍照成功";
  717. SendMsg("1-5");
  718. Thread.Sleep(3000);
  719. //判断是否为仅拍照,不是则执行FIB操作
  720. if (!m_MsParam.Is_Photograph)
  721. {
  722. //6.设置FIB拍照参数——扫描时间、束流等
  723. //7.控制FIB自动亮度、对比度
  724. if (!iSEM.CmdFIBModeFIB())
  725. {
  726. arg.Message = "FIB模式切换失败";
  727. SendMsg("1-6");
  728. return false;
  729. }
  730. arg.Message = "FIB模式切换成功";
  731. SendMsg("1-6");
  732. Thread.Sleep(10000);
  733. //8.控制FIB拍照
  734. //9.保存照片
  735. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  736. arg.Picture_Information.Picture_FullPath = fileName1;
  737. arg.Picture_Information.Work_Status = "FIB";
  738. if (!GetImage(ImageMode.FIB, fileName2))
  739. {
  740. arg.Message = "FIB拍照失败";
  741. SendMsg("1-7");
  742. return false;
  743. }
  744. arg.Message = "FIB拍照成功";
  745. SendMsg("1-7");
  746. Thread.Sleep(3000);
  747. //这里需要确认是否对FIB的参数进行设置:电压和放大倍数等
  748. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  749. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  750. {
  751. arg.Message = "样品台移动到指定位置";
  752. SendMsg("1-8");
  753. }
  754. else
  755. {
  756. wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  757. if (state == 1)
  758. {
  759. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  760. if (!iSEM.MoveStageXY(x1, y1))
  761. {
  762. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  763. SendMsg("1-8");
  764. return false;
  765. }
  766. //判断是否移动完成
  767. while (true)
  768. {
  769. Thread.Sleep(5000);
  770. if (iSEM.GetStageIs() == 0)
  771. {
  772. break;
  773. }
  774. }
  775. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  776. SendMsg("1-8");
  777. }
  778. else
  779. {
  780. arg.Message = "样品台移动失败";
  781. SendMsg("1-8");
  782. return false;
  783. }
  784. }
  785. //11.自动工具样品类型参数确定是否需要PT沉积
  786. if (m_MsParam.PT)
  787. {
  788. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  789. //第10步已经移动好位置
  790. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  791. x0 = iSEM.GetStageAtX();
  792. y0 = iSEM.GetStageAtY();
  793. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  794. {
  795. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
  796. SendMsg("1-9");
  797. return false;
  798. }
  799. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
  800. SendMsg("1-9");
  801. //3. 根据坐标进行PT沉积
  802. if (!PTWork())
  803. {
  804. arg.Message = "PT沉积失败";
  805. SendMsg("1-10");
  806. return false;
  807. }
  808. arg.Message = "PT沉积成功";
  809. SendMsg("1-10");
  810. }
  811. }
  812. //12.根据梯形坐标控制FIB调整到中心位置
  813. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  814. //以上两步已经将程序移动到11内部去做
  815. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  816. float[] firstPosition = iSEM.GetStagePosition();
  817. //这里要调用文件保存功能
  818. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  819. + firstPosition[1].ToString() + ","
  820. + firstPosition[2].ToString() + ","
  821. + firstPosition[3].ToString() + ","
  822. + firstPosition[4].ToString() + ","
  823. + firstPosition[5].ToString() + ")";
  824. SendMsg("1-11");
  825. }
  826. return true;
  827. }
  828. /// <summary>
  829. /// 14. FIB切割
  830. /// </summary>
  831. /// <returns></returns>
  832. public bool FIBCross()
  833. {
  834. //14.自动控制FIB切割
  835. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  836. //2.控制FIB进行切割
  837. //以上1、2步全部用ELY文件代替
  838. if (!FIBWork())
  839. {
  840. arg.Message = "FIB切割失败";
  841. SendMsg("1-12");
  842. return false;
  843. }
  844. arg.Message = "FIB切割成功";
  845. SendMsg("1-12");
  846. Thread.Sleep(5000);
  847. //3.控制FIB拍照600X
  848. //这里如何控制
  849. //4.保存图片
  850. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  851. arg.Picture_Information.Picture_FullPath = fileName3;
  852. arg.Picture_Information.Work_Status = "FIB";
  853. if (!GetImage(ImageMode.FIB, fileName3))
  854. {
  855. arg.Message = "FIB拍照失败";
  856. SendMsg("1-14");
  857. return false;
  858. }
  859. arg.Message = "FIB拍照成功";
  860. SendMsg("1-14");
  861. Thread.Sleep(3000);
  862. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  863. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  864. return true;
  865. }
  866. /// <summary>
  867. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  868. /// </summary>
  869. /// <returns></returns>
  870. public bool FindCross()
  871. {
  872. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  873. float angle = 0;
  874. int direction = 0;
  875. int state = 0;
  876. //1.控制SEM放大到300倍
  877. arg.State = "SEM";
  878. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  879. {
  880. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString("0.0") + "倍失败";
  881. SendMsg("1-18");
  882. return false;
  883. }
  884. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString("0.0") + "倍成功";
  885. SendMsg("1-18");
  886. //2.控制SEM自动对焦、亮度、对比度-接口
  887. if (m_measureFile.MParam.FocusMode == 1)//手动
  888. {
  889. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  890. {
  891. arg.Message = "自动对焦完成";
  892. SendMsg("1-19");
  893. //return true;
  894. }
  895. else
  896. {
  897. arg.Message = "自动对焦失败";
  898. SendMsg("1-19");
  899. return false;
  900. }
  901. }
  902. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  903. {
  904. //郝工增加自动对焦算法
  905. }
  906. else //客户自动
  907. {
  908. //后期和客户对接接口
  909. List<string> filenames = new List<string>();
  910. String retfilename = wr.Img_Auto_Focus(filenames);
  911. }
  912. Thread.Sleep(5000);
  913. //原来这里有3是角度补偿
  914. //3.控制SEM拍照
  915. String fileName4 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
  916. arg.Picture_Information.Picture_FullPath = fileName4;
  917. arg.Picture_Information.Work_Status = "SEM";
  918. if (!GetImage(ImageMode.SEM, fileName4))
  919. {
  920. arg.Message = "SEM拍照失败";
  921. SendMsg("1-20");
  922. return false;
  923. }
  924. arg.Message = "SEM拍照成功";
  925. SendMsg("1-20");
  926. Thread.Sleep(3000);
  927. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  928. //5.根据坐标控制SEM移动到切孔位置,居中
  929. //这里是否用到拉直操作,我没有加
  930. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  931. {
  932. arg.Message = "样品台移动到指定位置";
  933. SendMsg("1-21");
  934. }
  935. else
  936. {
  937. wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
  938. if (state == 1)
  939. {
  940. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  941. if (!iSEM.MoveStageXY(x1, y1))
  942. {
  943. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  944. SendMsg("1-21");
  945. return false;
  946. }
  947. //判断是否移动完成
  948. while (true)
  949. {
  950. Thread.Sleep(5000);
  951. if (iSEM.GetStageIs() == 0)
  952. {
  953. break;
  954. }
  955. }
  956. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  957. SendMsg("1-21");
  958. }
  959. else
  960. {
  961. arg.Message = "样品台移动失败";
  962. SendMsg("1-21");
  963. return false;
  964. }
  965. }
  966. if (!iSEM.SetScanRotation(angle))
  967. {
  968. arg.Message = "调整角度失败";
  969. SendMsg("1-22");
  970. return false;
  971. }
  972. arg.Message = "调整角度成功";
  973. SendMsg("1-22");
  974. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  975. //float x5 = iSEM.GetStageAtX();
  976. //float y5 = iSEM.GetStageAtY();
  977. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  978. //{
  979. // return false;
  980. //}
  981. return true;
  982. }
  983. /// <summary>
  984. /// 17.自动控制SEM拍截面照
  985. /// </summary>
  986. /// <returns></returns>
  987. public bool ShotSection()
  988. {
  989. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  990. int state = 0;
  991. //切换到SEM模式
  992. if (!iSEM.CmdFIBModeSEM())
  993. {
  994. //SendMsg("SEM模式切换失败");
  995. return false;
  996. }
  997. arg.State = "SEM";
  998. Thread.Sleep(10000);
  999. //1、放大6000倍
  1000. if (!iSEM.SetMagnification(6000))
  1001. {
  1002. arg.Message = "放大倍数调整失败";
  1003. SendMsg("1-25");
  1004. return false;
  1005. }
  1006. arg.Message = "放大倍数调整成功";
  1007. SendMsg("1-25");
  1008. //2.控制SEM自动对焦、亮度、对比度-接口
  1009. if (m_measureFile.MParam.FocusMode == 1)//手动
  1010. {
  1011. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  1012. {
  1013. arg.Message = "自动对焦完成";
  1014. SendMsg("1-26");
  1015. //return true;
  1016. }
  1017. else
  1018. {
  1019. arg.Message = "自动对焦失败";
  1020. SendMsg("1-26");
  1021. return false;
  1022. }
  1023. }
  1024. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  1025. {
  1026. //郝工增加自动对焦算法
  1027. }
  1028. else //客户自动
  1029. {
  1030. //后期和客户对接接口
  1031. List<string> filenames = new List<string>();
  1032. String retfilename = wr.Img_Auto_Focus(filenames);
  1033. }
  1034. //3、设置SEM补偿角度
  1035. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1036. {
  1037. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1038. SendMsg("1-27");
  1039. return false;
  1040. }
  1041. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1042. SendMsg("1-27");
  1043. Thread.Sleep(5000);
  1044. //4、拍照,5、保存照片
  1045. String fileName5 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
  1046. arg.Picture_Information.Picture_FullPath = fileName5;
  1047. arg.Picture_Information.Work_Status = "SEM";
  1048. if (!GetImage(ImageMode.SEM, fileName5))
  1049. {
  1050. arg.Message = "SEM拍照失败";
  1051. SendMsg("1-28");
  1052. return false;
  1053. }
  1054. arg.Message = "SEM拍照成功";
  1055. SendMsg("1-28");
  1056. Thread.Sleep(3000);
  1057. //6、获取偏移坐标,7、移动到位
  1058. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1059. {
  1060. arg.Message = "样品台移动到指定位置";
  1061. SendMsg("1-29");
  1062. }
  1063. else
  1064. {
  1065. // wr.Img_Cut_Position(fileName5, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  1066. if (state == 1)
  1067. {
  1068. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1069. if (!iSEM.MoveStageXY(x1, y1))
  1070. {
  1071. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1072. SendMsg("1-29");
  1073. return false;
  1074. }
  1075. //判断是否移动完成
  1076. while (true)
  1077. {
  1078. Thread.Sleep(5000);
  1079. if (iSEM.GetStageIs() == 0)
  1080. {
  1081. break;
  1082. }
  1083. }
  1084. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1085. SendMsg("1-29");
  1086. }
  1087. else
  1088. {
  1089. arg.Message = "样品台移动失败";
  1090. SendMsg("1-8");
  1091. return false;
  1092. }
  1093. }
  1094. //8、验证移动准确性
  1095. //9、
  1096. return true;
  1097. }
  1098. public bool CommonWork()
  1099. {
  1100. SendMsg("插入PT针");
  1101. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1102. //if (firstHole.PT == true)
  1103. {
  1104. if (!InsertPT())
  1105. {
  1106. SendMsg("插入PT针失败");
  1107. return false;
  1108. }
  1109. }
  1110. //13. 自动 定位功能
  1111. SendMsg("自动定位切割位置");
  1112. if (!GetPoistion(false))
  1113. {
  1114. SendMsg("自动定位切割位置失败");
  1115. return false;
  1116. }
  1117. //14.自动控制FIB切割
  1118. SendMsg("FIB切割");
  1119. if (!FIBCross())
  1120. {
  1121. SendMsg("FIB切割失败");
  1122. return false;
  1123. }
  1124. //{
  1125. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1126. // //2.控制FIB进行切割
  1127. // //3.控制FIB拍照600X
  1128. // //4.保存图片
  1129. // {
  1130. // //1.设置图片名称
  1131. // //2.保存图片3
  1132. // String fileName3 = WorkingFolder + ImageName3;
  1133. // if (!GetImage(ImageMode.FIB, fileName3))
  1134. // {
  1135. // return false;
  1136. // }
  1137. // }
  1138. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1139. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1140. //}
  1141. //15.根据样品类型决定是否撤出PT针
  1142. SendMsg("撤出PT针");
  1143. //if (firstHole.PT == false)
  1144. //{
  1145. if (!RetractPT())
  1146. {
  1147. SendMsg("撤出PT针失败");
  1148. return false;
  1149. }
  1150. //}
  1151. // 16.找到切割位置
  1152. SendMsg("找到切割位置");
  1153. //17.自动控制SEM拍截面照
  1154. SendMsg("观测层高");
  1155. SendMsg("切换SEM控制");
  1156. if (!iSEM.CmdFIBModeSEM())
  1157. {
  1158. SendMsg("SEM模式切换失败");
  1159. return false;
  1160. }
  1161. Thread.Sleep(10000);
  1162. SendMsg("放大6000倍");
  1163. if (!iSEM.SetMagnification(6000))
  1164. {
  1165. SendMsg("放大倍数调整失败");
  1166. return false;
  1167. }
  1168. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1169. {
  1170. SendMsg("拍摄照片完成");
  1171. //return true;
  1172. }
  1173. else
  1174. {
  1175. SendMsg("拍摄照片失败");
  1176. return false;
  1177. }
  1178. SendMsg("图像校正36度");
  1179. //3.设置SEM角度补偿cos36度
  1180. if (!TiltCorrection(36))
  1181. {
  1182. return false;
  1183. }
  1184. Thread.Sleep(3000);
  1185. string fn;
  1186. //用宏抓一般图
  1187. Thread.Sleep(5000);
  1188. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1189. SendMsg("用宏抓一般图" + fn);
  1190. iSEM.CMDMCFFilename(fn);
  1191. //延时1s??
  1192. Thread.Sleep(5000);
  1193. //用宏抓好图
  1194. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1195. SendMsg("用宏抓好图" + fn);
  1196. iSEM.CMDMCFFilename(fn);
  1197. //延时1s??
  1198. Thread.Sleep(30000);
  1199. Thread.Sleep(10000);
  1200. WorkingFolder = m_measureFile.FilePath;
  1201. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1202. SendMsg("SEM拍照存储到" + fileName6);
  1203. if (!GetImage(ImageMode.SEM, fileName6))
  1204. {
  1205. SendMsg("SEM拍照失败");
  1206. return false;
  1207. }
  1208. //用宏抓标志图
  1209. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1210. SendMsg("用宏抓标志图" + fn);
  1211. iSEM.CMDMCFFilename(fn);
  1212. //延时1s??
  1213. Thread.Sleep(30000);
  1214. //恢复简单抓图
  1215. Thread.Sleep(5000);
  1216. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1217. SendMsg("用宏抓一般图" + fn);
  1218. iSEM.CMDMCFFilename(fn);
  1219. SendMsg("所有图结束");
  1220. return true;
  1221. }
  1222. //第一个孔的测试过程
  1223. public bool FirstHole()
  1224. {
  1225. MeasureData.CutHole firstHole = m_cutHoles[0];
  1226. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1227. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1228. {
  1229. if (!InsertPT())
  1230. {
  1231. arg.Message = "插入PT针失败";
  1232. SendMsg("1-0");
  1233. return false;
  1234. }
  1235. arg.Message = "插入PT针成功";
  1236. SendMsg("1-0");
  1237. }
  1238. //13. 自动 定位功能
  1239. if (!GetPoistion(true))
  1240. {
  1241. arg.Message = "自动定位切割位置失败";
  1242. SendMsg("1-1");
  1243. return false;
  1244. }
  1245. arg.Message = "自动定位切割位置成功";
  1246. SendMsg("1-1");
  1247. //14.自动控制FIB切割
  1248. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1249. {
  1250. if (!FIBCross())
  1251. {
  1252. arg.Message = "FIB切割失败";
  1253. SendMsg("1-16");
  1254. return false;
  1255. }
  1256. arg.Message = "FIB切割成功";
  1257. SendMsg("1-16");
  1258. }
  1259. //15.根据样品类型决定是否撤出PT针
  1260. if(m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1261. {
  1262. if (!RetractPT())
  1263. {
  1264. arg.Message = "撤出PT针失败";
  1265. SendMsg("1-17");
  1266. return false;
  1267. }
  1268. arg.Message = "撤出PT针成功";
  1269. SendMsg("1-17");
  1270. }
  1271. // 16.找到切割位置
  1272. if(m_MsParam.Is_Photograph == false)
  1273. {
  1274. if (!FindCross())
  1275. {
  1276. arg.Message = "找到切割位置失败";
  1277. SendMsg("1-24");
  1278. return false;
  1279. }
  1280. arg.Message = "找到切割位置成功";
  1281. SendMsg("1-24");
  1282. }
  1283. //17.自动控制SEM拍截面照
  1284. if(m_MsParam.Is_Photograph == false)
  1285. {
  1286. if (!ShotSection())
  1287. {
  1288. arg.Message = "自动控制SEM拍截面照失败";
  1289. SendMsg("1-33");
  1290. return false;
  1291. }
  1292. arg.Message = "自动控制SEM拍截面照成功";
  1293. SendMsg("1-33");
  1294. }
  1295. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1296. //{
  1297. // SendMsg("拍摄照片完成");
  1298. // //return true;
  1299. //}
  1300. //else
  1301. //{
  1302. // SendMsg("拍摄照片失败");
  1303. // return false;
  1304. //}
  1305. //SendMsg("图像校正36度");
  1306. ////3.设置SEM角度补偿cos36度
  1307. //if (!TiltCorrection(36))
  1308. //{
  1309. // return false;
  1310. //}
  1311. //Thread.Sleep(3000);
  1312. string fn;
  1313. //用宏抓一般图
  1314. Thread.Sleep(5000);
  1315. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1316. SendMsg("用宏抓一般图" + fn);
  1317. iSEM.CMDMCFFilename(fn);
  1318. //延时1s??
  1319. Thread.Sleep(5000);
  1320. //用宏抓好图
  1321. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1322. SendMsg("用宏抓好图" + fn);
  1323. iSEM.CMDMCFFilename(fn);
  1324. //延时1s??
  1325. Thread.Sleep(30000);
  1326. Thread.Sleep(10000);
  1327. WorkingFolder = m_measureFile.FilePath;
  1328. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1329. SendMsg("SEM拍照存储到" + fileName6);
  1330. if (!GetImage(ImageMode.SEM, fileName6))
  1331. {
  1332. SendMsg("SEM拍照失败");
  1333. return false;
  1334. }
  1335. //用宏抓标志图
  1336. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1337. SendMsg("用宏抓标志图" + fn);
  1338. iSEM.CMDMCFFilename(fn);
  1339. //延时1s??
  1340. Thread.Sleep(30000);
  1341. Thread.Sleep(5000);
  1342. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1343. SendMsg("用宏抓一般图" + fn);
  1344. iSEM.CMDMCFFilename(fn);
  1345. //延时1s??
  1346. Thread.Sleep(5000);
  1347. SendMsg("所有图结束");
  1348. ////17.自动控制SEM拍截面照
  1349. //{
  1350. // //1.控制SEM放大到指定参数大小范围,6000x
  1351. // if (!iSEM.SetMagnification(6000))
  1352. // {
  1353. // return false;
  1354. // }
  1355. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1356. // if (!MeasParam.FocusMode)
  1357. // {
  1358. // //弹出手动对焦的窗口
  1359. // }
  1360. // else
  1361. // {
  1362. // //调用自动对焦模块
  1363. // }
  1364. // //3.设置SEM角度补偿cos36度
  1365. // if (!TiltCorrection(36))
  1366. // {
  1367. // return false;
  1368. // }
  1369. // //4.控制SEM拍照
  1370. // //5.保存照片4
  1371. // String fileName5 = WorkingFolder + ImageName5;
  1372. // if (!GetImage(ImageMode.SEM, fileName5))
  1373. // {
  1374. // return false;
  1375. // }
  1376. // //6.将照片传给客户,获取偏移坐标
  1377. // float x6 = 0, y6 = 0;
  1378. // float angle1 = 0;
  1379. // float mage = 10000;
  1380. // //7.根据坐标控制SEM移动到分析位置
  1381. // if (!iSEM.MoveStageXY(x6, y6))
  1382. // {
  1383. // return false;
  1384. // }
  1385. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1386. // float x7 = iSEM.GetStageAtX();
  1387. // float y7 = iSEM.GetStageAtY();
  1388. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1389. // {
  1390. // return false;
  1391. // }
  1392. // //9.控制SEM平行校正,并记录校正前初始值
  1393. // float foldAnagle = iSEM.GetScanRotation();
  1394. // if (foldAnagle == float.NaN)
  1395. // {
  1396. // return false;
  1397. // }
  1398. // if (!iSEM.SetScanRotation(angle1))
  1399. // {
  1400. // return false;
  1401. // }
  1402. // //10.控制SEM放大到指定参数大小范围
  1403. // if (!iSEM.SetMagnification(mage))
  1404. // {
  1405. // return false;
  1406. // }
  1407. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1408. // if (!MeasParam.FocusMode)
  1409. // {
  1410. // //弹出手动对焦的窗口
  1411. // }
  1412. // else
  1413. // {
  1414. // //调用自动对焦模块
  1415. // }
  1416. // //12.控制SEM对分析位置拍照
  1417. // String fileName6 = WorkingFolder + ImageName6;
  1418. // if (!GetImage(ImageMode.SEM, fileName6))
  1419. // {
  1420. // return false;
  1421. // }
  1422. // //13.保存照片
  1423. // //14.控制SEM取消电子束校正,回到初始值
  1424. // if (!iSEM.SetScanRotation(foldAnagle))
  1425. // {
  1426. // return false;
  1427. // }
  1428. //}
  1429. ////18.自动层高分析
  1430. //{
  1431. // //1.获取SEM Pixel Size给客户传入参数
  1432. // if (iSEM.GetPixelSize() == float.NaN)
  1433. // {
  1434. // return false;
  1435. // }
  1436. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1437. //}
  1438. ////19.自动能谱分析
  1439. //{
  1440. // //1. 确定能谱位置
  1441. // //2. 控制牛津打能谱
  1442. // //3. 能谱分析——面扫+线扫描
  1443. //}
  1444. return true;
  1445. }
  1446. //非第一个孔的测试过程
  1447. public void OtherHole()
  1448. {
  1449. //for (int i = 1; i < m_cutHoles.Count; i++)
  1450. //{
  1451. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1452. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1453. //1. 初始化
  1454. {
  1455. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1456. //读取图像冻结状态
  1457. float ffrozen = iSEM.GetImageFrozen();
  1458. if (ffrozen == float.NaN)
  1459. {
  1460. return;
  1461. }
  1462. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1463. {
  1464. SendMsg("样品台恢复到水平");
  1465. //return true;
  1466. }
  1467. else
  1468. {
  1469. SendMsg("禁止样品台恢复到水平");
  1470. return;
  1471. }
  1472. //2. 调节样品1号孔的样品台6轴坐标
  1473. //3. 将样品1号孔坐标2存入数据库
  1474. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1475. if (!iSEM.SetStageGotoT(0))
  1476. {
  1477. return;
  1478. }
  1479. while (true)
  1480. {
  1481. Thread.Sleep(10000);
  1482. if (iSEM.GetStageIs() == 0)
  1483. {
  1484. break;
  1485. }
  1486. }
  1487. //5. 获取光镜2号孔XY坐标
  1488. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1489. //6. 根据光镜坐标控制样品台移动
  1490. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1491. {
  1492. SendMsg("移动失败");
  1493. }
  1494. while (true)
  1495. {
  1496. Thread.Sleep(10000);
  1497. if (iSEM.GetStageIs() == 0)
  1498. {
  1499. break;
  1500. }
  1501. }
  1502. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1503. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1504. {
  1505. SendMsg("样品台旋转");
  1506. //return true;
  1507. }
  1508. else
  1509. {
  1510. SendMsg("禁止样品台旋转");
  1511. return;
  1512. }
  1513. if (!iSEM.SetStageGotoT(54))
  1514. {
  1515. return;
  1516. }
  1517. while (true)
  1518. {
  1519. Thread.Sleep(10000);
  1520. if (iSEM.GetStageIs() == 0)
  1521. {
  1522. break;
  1523. }
  1524. }
  1525. }
  1526. SendMsg("拉直操作");
  1527. SendMsg("其他操作与1号孔操作一致");
  1528. if (!CommonWork())
  1529. {
  1530. return;
  1531. }
  1532. //2. 定位切割
  1533. {
  1534. //1. 拉直操作
  1535. {
  1536. //1.1 控制SEM进行拍照
  1537. //1.2 图片传给客户,返回偏移角度
  1538. //1.3 根据返回角度,控制样品台转动
  1539. }
  1540. //2. 与1号孔13步相同
  1541. }
  1542. //3. 以后步骤与1号孔以后步骤一致
  1543. //}
  1544. }
  1545. //角度补偿
  1546. public bool TiltCorrection(float a_fAngle)
  1547. {
  1548. //记录原来电镜的状态
  1549. // bool bTilt = false;
  1550. //float fOldTilt = iSEM.GetTiltCorrection();
  1551. //if (fOldTilt == float.NaN)
  1552. //{
  1553. // return false;
  1554. //}
  1555. //else if (fOldTilt == 1)
  1556. //{
  1557. // bTilt = true;
  1558. //}
  1559. //else if (fOldTilt == 0)
  1560. //{
  1561. // bTilt = false;
  1562. //}
  1563. //float fOldAngle = iSEM.GetTiltAngle();
  1564. //if (fOldAngle == float.NaN)
  1565. //{
  1566. // return false;
  1567. //}
  1568. //开启校正
  1569. SendMsg("开启校正");
  1570. if (!iSEM.SetTiltAngleOn())
  1571. {
  1572. return false;
  1573. }
  1574. //设置校正角度
  1575. //if (!iSEM.SetTiltAngle(fOldAngle))
  1576. //{
  1577. // return false;
  1578. //}
  1579. //恢复原始状态
  1580. SendMsg("校正角度"+ a_fAngle.ToString());
  1581. if (!iSEM.SetTiltAngle(a_fAngle))
  1582. {
  1583. return false;
  1584. }
  1585. //if (bTilt)
  1586. //{
  1587. // if (!iSEM.SetTiltCorrectionOn())
  1588. // {
  1589. // return false;
  1590. // }
  1591. //}
  1592. //else
  1593. //{
  1594. // if (!iSEM.SetTiltCorrectionOff())
  1595. // {
  1596. // return false;
  1597. // }
  1598. //}
  1599. return true;
  1600. }
  1601. //拍图
  1602. public bool GetImage(ImageMode a_mode, String a_fileName)
  1603. {
  1604. //1. 图像解冻
  1605. float foldFrozen = iSEM.GetImageFrozen();
  1606. if (foldFrozen == float.NaN)
  1607. {
  1608. return false;
  1609. }
  1610. if (!iSEM.ImageLive())
  1611. {
  1612. return false;
  1613. }
  1614. //2. 确认图像模式
  1615. if (ImageMode.SEM == a_mode)
  1616. {
  1617. if (!iSEM.CmdFIBModeSEM())
  1618. {
  1619. return false;
  1620. }
  1621. }
  1622. else if (ImageMode.FIB == a_mode)
  1623. {
  1624. if (!iSEM.CmdFIBModeFIB())
  1625. {
  1626. return false;
  1627. }
  1628. }
  1629. else
  1630. {
  1631. return false;
  1632. }
  1633. //3. 获取分辨率
  1634. int[] ImageSize = iSEM.GetImageStore();
  1635. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1636. {
  1637. return false;
  1638. }
  1639. short width = (short)ImageSize[0];
  1640. short height = (short)ImageSize[1];
  1641. //4. 抓图
  1642. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1643. {
  1644. return false;
  1645. }
  1646. //5. 恢复初始状态
  1647. if (foldFrozen == 0)
  1648. {
  1649. if (!iSEM.ImageLive())
  1650. {
  1651. return false;
  1652. }
  1653. }
  1654. else if (foldFrozen == 1)
  1655. {
  1656. if (!iSEM.ImageFrozen())
  1657. {
  1658. return false;
  1659. }
  1660. }
  1661. return true;
  1662. }
  1663. //自动聚焦
  1664. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  1665. {
  1666. a_nWd = 0;
  1667. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1668. if (a_param == null)
  1669. {
  1670. return false;
  1671. }
  1672. string path = a_param.Path;
  1673. if (!Directory.Exists(path))
  1674. {
  1675. return false;
  1676. }
  1677. string path_coarse = a_param.Path + "\\Coarse";
  1678. if (!Directory.Exists(path_coarse))
  1679. {
  1680. Directory.CreateDirectory(path_coarse);
  1681. }
  1682. string path_fine = a_param.Path + "\\Fine";
  1683. if (!Directory.Exists(path_fine))
  1684. {
  1685. Directory.CreateDirectory(path_fine);
  1686. }
  1687. //1. 拍照
  1688. //1.1, 粗拍照
  1689. //1.1.1, 根据参数计算拍照次数
  1690. double nUp = a_param.UP * 100.0 ;
  1691. double nDown = a_param.Down * 100.0;
  1692. double nStep = a_param.Step * 100.0;
  1693. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  1694. SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  1695. //粗拍照
  1696. for (int i = 0; i < nTimes; i++)
  1697. {
  1698. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  1699. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  1700. Thread.Sleep(3000);
  1701. int swd = cWd / 100;
  1702. SendMsg("wd = " + swd.ToString() +"um");
  1703. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  1704. if (!GetImage(ImageMode.SEM, fileName))
  1705. {
  1706. return false;
  1707. }
  1708. Thread.Sleep(5000);
  1709. }
  1710. //1.2, 选定细拍照的工作距离
  1711. int CorWd;
  1712. ChooseBest(path_coarse,out CorWd);
  1713. a_nWd = CorWd;
  1714. SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  1715. //1.3, 细拍照
  1716. if ( (CorWd - a_param.Range * 100.0) <=0)
  1717. {
  1718. return false;
  1719. }
  1720. double nfUp = CorWd - a_param.Range * 100.0;
  1721. double nfStep = a_param.fStep * 100.0;
  1722. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  1723. SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  1724. for (int i = 0; i < nfTimes; i++)
  1725. {
  1726. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  1727. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  1728. Thread.Sleep(3000);
  1729. int swd = cWd / 100;
  1730. SendMsg("wd = " + swd.ToString() + "um");
  1731. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  1732. if (!GetImage(ImageMode.SEM, fileName))
  1733. {
  1734. return false;
  1735. }
  1736. Thread.Sleep(5000);
  1737. }
  1738. int fineWd;
  1739. ChooseBest(path_coarse, out fineWd);
  1740. SendMsg("wd fine max = " + fineWd.ToString());
  1741. a_nWd = fineWd;
  1742. SendMsg("细选工作距离wd = " + a_nWd.ToString());
  1743. return true;
  1744. }
  1745. //LoG算子计算
  1746. private double LoGMean(string a_strImgPath)
  1747. {
  1748. //读入Img文件
  1749. if (!File.Exists(a_strImgPath))
  1750. {
  1751. return 0;
  1752. }
  1753. Mat src, gray_src;
  1754. int kernel_size = 3;
  1755. src = Cv2.ImRead(a_strImgPath);
  1756. gray_src = new Mat();
  1757. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  1758. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  1759. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  1760. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  1761. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  1762. Cv2.ConvertScaleAbs(src, src);
  1763. //图像的平均灰度
  1764. double meanValue = 0.0;
  1765. meanValue = Cv2.Mean(src)[0];
  1766. return meanValue;
  1767. }
  1768. //梯度计算
  1769. private double Tenengrad(string a_strImgPath)
  1770. {
  1771. //读入Img文件
  1772. if (!File.Exists(a_strImgPath))
  1773. {
  1774. return 0;
  1775. }
  1776. Mat src;
  1777. src = Cv2.ImRead(a_strImgPath);
  1778. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  1779. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  1780. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  1781. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  1782. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  1783. //图像的平均灰度
  1784. double meanValue = 0.0;
  1785. meanValue = Cv2.Mean(src)[0];
  1786. return meanValue;
  1787. }
  1788. //梯度计算
  1789. private double TTgrad(string a_strImgPath)
  1790. {
  1791. //读入Img文件
  1792. if (!File.Exists(a_strImgPath))
  1793. {
  1794. return 0;
  1795. }
  1796. Mat src;
  1797. src = Cv2.ImRead(a_strImgPath);
  1798. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  1799. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  1800. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  1801. Mat scalex = new Mat();
  1802. Mat scaley = new Mat();
  1803. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  1804. Cv2.ConvertScaleAbs(src, scalex);
  1805. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  1806. Cv2.ConvertScaleAbs(src, scaley);
  1807. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  1808. //图像的平均灰度
  1809. double meanValue = 0.0;
  1810. meanValue = Cv2.Mean(src)[0];
  1811. return meanValue;
  1812. }
  1813. //三选二算法
  1814. private void ChooseBest(string a_strImgPath, out int a_nWd)
  1815. {
  1816. a_nWd = -1;
  1817. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  1818. float[] values = new float[files.Length];
  1819. double smax1 = LoGMean(files[0]);
  1820. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  1821. double smax2 = Tenengrad(files[0]);
  1822. int wdmax2 = wdmax1;
  1823. double smax3 = TTgrad(files[0]);
  1824. int wdmax3 = wdmax1;
  1825. int x = 0;
  1826. foreach (var file in files)
  1827. {
  1828. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  1829. double svalue1 = LoGMean(file);
  1830. double svalue2 = Tenengrad(file);
  1831. double svalue3 = TTgrad(file);
  1832. if (smax1 < svalue1)
  1833. {
  1834. smax1 = svalue1;
  1835. wdmax1 = wd;
  1836. }
  1837. if (smax2 < svalue2)
  1838. {
  1839. smax2 = svalue2;
  1840. wdmax2 = wd;
  1841. }
  1842. if (smax3 < svalue3)
  1843. {
  1844. smax3 = svalue3;
  1845. wdmax3 = wd;
  1846. }
  1847. x++;
  1848. }
  1849. SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  1850. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  1851. {
  1852. a_nWd = wdmax1;
  1853. SendMsg("焦距 = " + wdmax1.ToString());
  1854. }
  1855. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  1856. {
  1857. a_nWd = wdmax2;
  1858. SendMsg("焦距 = " + wdmax2.ToString());
  1859. }
  1860. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  1861. {
  1862. a_nWd = wdmax3;
  1863. SendMsg("焦距 = " + wdmax3.ToString());
  1864. }
  1865. else
  1866. {
  1867. SendMsg("对焦失败。");
  1868. }
  1869. }
  1870. }
  1871. }