Measure.cs 41 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. public class ThreadStatusEventArgs
  26. {
  27. public string State
  28. {
  29. get { return m_state; }
  30. set { m_state = value; }
  31. }
  32. private string m_state;
  33. public DateTime Time
  34. {
  35. get { return m_time; }
  36. set { m_time = value; }
  37. }
  38. private DateTime m_time;
  39. public ThreadStatusEventArgs(string a_State)
  40. {
  41. this.m_state = a_State;
  42. }
  43. }
  44. public class CutHolesStatusEventArgs
  45. {
  46. public string State
  47. {
  48. get { return m_state; }
  49. set { m_state = value; }
  50. }
  51. private string m_state;
  52. public string HoleName
  53. {
  54. get { return m_holeName; }
  55. set { m_holeName = value; }
  56. }
  57. private string m_holeName;
  58. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  59. {
  60. this.m_state = a_state;
  61. this.m_holeName = a_holeName;
  62. }
  63. }
  64. public class Measure
  65. {
  66. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  67. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  68. //全局只有一个fatorySEM
  69. static FactoryHardware factorySEM = FactoryHardware.Instance;
  70. ISEMControl iSEM = factorySEM.ISEM;
  71. //@的作用是不用转义字符\\只打一个就行
  72. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  73. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  74. const String ImageName3 = @"ImageFIB600X2.tif";
  75. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  76. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  77. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  78. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  79. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  80. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  81. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  82. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  83. const String ElyDeposition = @"Deposition.ely"; //沉积
  84. const String ElyCrossSection = @"CrossSection.ely"; //切割
  85. const float fMin = (float)0.0000002; //单位是米
  86. int m_nWorkHoleNo = -1;
  87. //测量文件
  88. private MeasureFile m_measureFile;
  89. public MeasureFile MeasureFile
  90. {
  91. get { return this.m_measureFile; }
  92. set { this.m_measureFile = value; }
  93. }
  94. //测量的切割孔
  95. private List<MeasureData.CutHole> m_cutHoles;
  96. public List<MeasureData.CutHole> cutHoles
  97. {
  98. get { return this.m_cutHoles; }
  99. set { this.m_cutHoles = value; }
  100. }
  101. //工作文件夹
  102. private string m_WorkingFolder;
  103. public string WorkingFolder
  104. {
  105. get { return this.m_WorkingFolder; }
  106. set { this.m_WorkingFolder = value; }
  107. }
  108. //程序当前路径
  109. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  110. //线程状态
  111. private ThreadStatus m_ThreadStatus;
  112. public ThreadStatus TStatus
  113. {
  114. get { return this.m_ThreadStatus; }
  115. set { this.m_ThreadStatus = value; }
  116. }
  117. //测量参数
  118. private MeasureParam m_MsParam;
  119. public MeasureParam MeasParam
  120. {
  121. get { return this.m_MsParam; }
  122. set { this.m_MsParam = value; }
  123. }
  124. //构造函数
  125. public Measure()
  126. {
  127. Init();
  128. }
  129. private void Init()
  130. {
  131. MeasParam = new MeasureParam();
  132. TStatus = new ThreadStatus();
  133. cutHoles = new List<MeasureData.CutHole>();
  134. }
  135. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  136. public bool InitMeas(MeasureFile a_measureFile)
  137. {
  138. m_measureFile = a_measureFile;
  139. List<CutHole> listHoles = m_measureFile.ListCutHole;
  140. foreach (CutHole h in listHoles)
  141. {
  142. if (h.SWITCH == true)
  143. {
  144. m_cutHoles.Add(h);
  145. }
  146. }
  147. if (m_cutHoles.Count == 0)
  148. return false;
  149. this.m_MsParam = m_measureFile.MParam;
  150. return true;
  151. }
  152. public void SendMsg(string a_StrMsg)
  153. {
  154. ThreadStatusEventArgs arg = new ThreadStatusEventArgs(a_StrMsg);
  155. arg.Time = DateTime.Now;
  156. SendThreadStatus(this, arg);
  157. }
  158. public void SendCutHoleMsg(string a_state, string a_holeName)
  159. {
  160. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  161. arg.HoleName = "";
  162. arg.State = "";
  163. SendCutHolesStatus(this, arg);
  164. }
  165. //测量流程
  166. public void DoMeasure()
  167. {
  168. //创建线程的测量状态的更新
  169. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  170. if (SendThreadStatus != null)
  171. {
  172. SendMsg("开始测量。");
  173. }
  174. //检查硬件连接是否正常
  175. if (!ConnectHardware())
  176. {
  177. SendMsg("连接硬件失败。");
  178. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  179. return;
  180. }
  181. SendMsg("硬件连接成功。");
  182. //设置工作文件夹
  183. if (!SetWorkingFolderStr())
  184. {
  185. SendMsg("设置工作文件夹失败");
  186. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  187. return;
  188. }
  189. SendMsg("创建工作文件路径为" + WorkingFolder);
  190. float[] firstPosition;
  191. for (int i = 0; i < m_cutHoles.Count; i++)
  192. {
  193. m_nWorkHoleNo = i;
  194. if (i == 0)
  195. {
  196. SendMsg("第一个切孔开始测量");
  197. SendCutHoleMsg("1", m_cutHoles[i].HoleName);
  198. firstPosition = iSEM.GetStagePosition();
  199. //第一个孔的测试
  200. FirstHole();
  201. }
  202. else
  203. {
  204. //非第一个孔的测试
  205. SendMsg("第" + i.ToString() + "个切孔开始测量");
  206. SendCutHoleMsg("1", m_cutHoles[i].HoleName);
  207. OtherHole();
  208. }
  209. }
  210. }
  211. //检查硬件连接是否正常
  212. public bool ConnectHardware()
  213. {
  214. //返回硬件的连接状态
  215. return iSEM.ConnectStatus();
  216. }
  217. //设置工作文件夹
  218. public bool SetWorkingFolderStr()
  219. {
  220. WorkingFolder = m_measureFile.FilePath;
  221. return true;
  222. ////获取工作文件路径
  223. //string pathName = m_measureFile.FilePath;
  224. ////判断工作文件路径是否为空或无效
  225. //if (string.IsNullOrEmpty(pathName))
  226. //{
  227. // SendMsg("路径无效");
  228. // return false;
  229. //}
  230. ////文件未保存
  231. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  232. //{
  233. // SendMsg("工程文件未保存");
  234. // return false;
  235. //}
  236. ////获取工作文件所在文件夹
  237. //string folder = System.IO.Path.GetDirectoryName(pathName);
  238. //if (string.IsNullOrEmpty(folder))
  239. //{
  240. // SendMsg("工程文件无效");
  241. // return false;
  242. //}
  243. //WorkingFolder += @"\\";
  244. //LogManager.Init(WorkingFolder);
  245. //return false;
  246. }
  247. //插入PT针
  248. public bool InsertPT()
  249. {
  250. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  251. SendMsg("调用宏插入PT针宏文件" + fn);
  252. iSEM.CMDMCFFilename(fn);
  253. //延时1s??
  254. Thread.Sleep(1000);
  255. return true;
  256. }
  257. //撤出PT针
  258. public bool RetractPT()
  259. {
  260. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  261. SendMsg("调用宏撤出PT针宏文件" + fn);
  262. iSEM.CMDMCFFilename(fn);
  263. //延时1s??
  264. Thread.Sleep(1000);
  265. return true;
  266. }
  267. //PT沉积
  268. public bool PTWork()
  269. {
  270. //执行PT沉积的ELY文件
  271. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  272. SendMsg("执行PT沉积Ely文件:" + fn);
  273. if (!ExcuteEly(fn))
  274. {
  275. return false;
  276. }
  277. //等待沉积完成
  278. while (true)
  279. {
  280. Thread.Sleep(10000);
  281. if (iSEM.GetFIBMode() == 0)
  282. {
  283. break;
  284. }
  285. }
  286. return true;
  287. }
  288. //FIB切割
  289. public bool FIBWork()
  290. {
  291. //执行PT沉积的ELY文件
  292. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  293. SendMsg("执行FIB切割Ely文件:" + fn);
  294. if (!ExcuteEly(fn))
  295. {
  296. return false;
  297. }
  298. //等待切割完成
  299. while (true)
  300. {
  301. Thread.Sleep(10000);
  302. if (iSEM.GetFIBMode() == 0)
  303. {
  304. break;
  305. }
  306. }
  307. return true;
  308. }
  309. public bool ExcuteEly(string a_filename)
  310. {
  311. //执行ELy文件有三个动作
  312. //1. 选择ELY文件
  313. SendMsg("选择ELY文件");
  314. if (!iSEM.CmdFIBLoadELY(a_filename))
  315. {
  316. SendMsg("选择ELY文件失败");
  317. return false;
  318. }
  319. Thread.Sleep(1000);
  320. //2. 确认ELY文件
  321. SendMsg("确认ELY文件");
  322. if (!iSEM.CmdFIBEXPOSUREELY())
  323. {
  324. SendMsg("确认ELY文件失败");
  325. return false;
  326. }
  327. Thread.Sleep(1000);
  328. //3. 执行ELY文件
  329. SendMsg("执行ELY文件");
  330. if (!iSEM.CmdFIBSTARTELY())
  331. {
  332. SendMsg("执行ELY文件失败");
  333. return false;
  334. }
  335. Thread.Sleep(1000);
  336. return true;
  337. }
  338. /// <summary>
  339. ///13. 自动 定位功能
  340. /// </summary>
  341. /// <returns></returns>
  342. public bool GetPoistion()
  343. {
  344. SendMsg("自动定位");
  345. //13.自动定位切割
  346. {
  347. SendMsg("放大600倍");
  348. //1.控制SEM放大600X
  349. if (!iSEM.SetMagnification(600))
  350. {
  351. return false;
  352. }
  353. //2.控制SEM自动对焦、亮度、对比度
  354. // if (!MeasParam.FocusMode)
  355. {
  356. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  357. {
  358. SendMsg("拍摄照片完成");
  359. //return true;
  360. }
  361. else
  362. {
  363. SendMsg("拍摄照片失败");
  364. return false;
  365. }
  366. //弹出手动对焦的窗口
  367. }
  368. //else
  369. //{
  370. // //调用自动对焦模块
  371. //}
  372. //3.设置SEM进行角度补偿54度
  373. SendMsg("设置校正54度");
  374. if (!TiltCorrection(54))
  375. {
  376. SendMsg("设置SEM进行角度补偿54度");
  377. return false;
  378. }
  379. Thread.Sleep(5000);
  380. //4.控制SEM拍照
  381. SendMsg("SEM拍照");
  382. //5.保存照片
  383. {
  384. //1. 创建目录,已经完成
  385. //2. 设置图片名称
  386. //3. 保存图片1
  387. WorkingFolder = m_measureFile.FilePath;
  388. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  389. SendMsg("SEM拍照存储到" + fileName1);
  390. if (!GetImage(ImageMode.SEM, fileName1))
  391. {
  392. SendMsg("SEM拍照失败");
  393. return false;
  394. }
  395. Thread.Sleep(3000);
  396. }
  397. //6.设置FIB拍照参数——扫描时间、束流等
  398. //7.控制FIB自动亮度、对比度
  399. SendMsg("切换FIB控制");
  400. if (!iSEM.CmdFIBModeFIB())
  401. {
  402. SendMsg("FIB模式切换失败");
  403. return false;
  404. }
  405. Thread.Sleep(10000);
  406. //8.控制FIB拍照
  407. //9.保存照片
  408. SendMsg("FIB拍照");
  409. {
  410. //1. 设置图片名称
  411. //2. 保存图片2
  412. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  413. if (!GetImage(ImageMode.FIB, fileName2))
  414. {
  415. SendMsg("FIB拍照失败");
  416. return false;
  417. }
  418. Thread.Sleep(3000);
  419. }
  420. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  421. SendMsg("调用识别位置");
  422. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  423. {
  424. SendMsg("移动已完成");
  425. //return true;
  426. }
  427. else
  428. {
  429. SendMsg("移动已失败");
  430. return false;
  431. }
  432. SendMsg("进行PT沉积");
  433. //11.自动工具样品类型参数确定是否需要PT沉积
  434. {
  435. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  436. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  437. //3. 根据坐标进行PT沉积
  438. if (!PTWork())
  439. {
  440. SendMsg("PT沉积失败");
  441. return false;
  442. }
  443. }
  444. return true;
  445. //模拟为客户返回的坐标值
  446. float x0 = 0, y0 = 0;
  447. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  448. //12.根据梯形坐标控制FIB调整到中心位置
  449. if (!iSEM.MoveStageXY(x0, y0))
  450. {
  451. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  452. return false;
  453. }
  454. //电镜移动是有一个延时的操作的?
  455. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  456. float x1 = iSEM.GetStageAtX();
  457. float y1 = iSEM.GetStageAtY();
  458. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  459. {
  460. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  461. return false;
  462. }
  463. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  464. float[] firstPosition = iSEM.GetStagePosition();
  465. //这里要调用文件保存功能
  466. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  467. + firstPosition[1].ToString() + ","
  468. + firstPosition[2].ToString() + ","
  469. + firstPosition[3].ToString() + ","
  470. + firstPosition[4].ToString() + ","
  471. + firstPosition[5].ToString() + ")");
  472. }
  473. return false;
  474. }
  475. /// <summary>
  476. /// 14. FIB切割
  477. /// </summary>
  478. /// <returns></returns>
  479. public bool FIBCross()
  480. {
  481. //14.自动控制FIB切割
  482. {
  483. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  484. //2.控制FIB进行切割
  485. SendMsg("FIB切割");
  486. if (!FIBWork())
  487. {
  488. SendMsg("FIB切割失败");
  489. return false;
  490. }
  491. Thread.Sleep(5000);
  492. //3.控制FIB拍照600X
  493. //4.保存图片
  494. {
  495. //1.设置图片名称
  496. //2.保存图片3
  497. WorkingFolder = m_measureFile.FilePath;
  498. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  499. SendMsg("SEM拍照存储到" + fileName3);
  500. if (!GetImage(ImageMode.FIB, fileName3))
  501. {
  502. SendMsg("FIB拍照失败");
  503. return false;
  504. }
  505. Thread.Sleep(3000);
  506. }
  507. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  508. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  509. }
  510. return true;
  511. }
  512. /// <summary>
  513. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  514. /// </summary>
  515. /// <returns></returns>
  516. public bool FindCross()
  517. {
  518. //16.自动调整SEM找到切割位置
  519. {
  520. //1.控制SEM放大到300倍
  521. if (!iSEM.SetMagnification(300))
  522. {
  523. return false;
  524. }
  525. //2.控制SEM自动对焦、亮度、对比度-接口
  526. if (!MeasParam.FocusMode)
  527. {
  528. //弹出手动对焦的窗口
  529. }
  530. else
  531. {
  532. //调用自动对焦模块
  533. }
  534. Thread.Sleep(5000);
  535. //3.控制SEM拍照
  536. String fileName4 = WorkingFolder + ImageName4;
  537. if (!GetImage(ImageMode.SEM, fileName4))
  538. {
  539. return false;
  540. }
  541. Thread.Sleep(3000);
  542. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  543. float x4 = 0, y4 = 0;
  544. float angle = 0;
  545. //5.根据坐标控制SEM移动到切孔位置,居中
  546. if (!iSEM.MoveStageXY(x4, y4))
  547. {
  548. return false;
  549. }
  550. if (!iSEM.SetScanRotation(angle))
  551. {
  552. return false;
  553. }
  554. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  555. //float x5 = iSEM.GetStageAtX();
  556. //float y5 = iSEM.GetStageAtY();
  557. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  558. //{
  559. // return false;
  560. //}
  561. }
  562. return true;
  563. }
  564. public bool CommonWork()
  565. {
  566. SendMsg("插入PT针");
  567. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  568. //if (firstHole.PT == true)
  569. {
  570. if (!InsertPT())
  571. {
  572. SendMsg("插入PT针失败");
  573. return false;
  574. }
  575. }
  576. //13. 自动 定位功能
  577. SendMsg("自动定位切割位置");
  578. if (!GetPoistion())
  579. {
  580. SendMsg("自动定位切割位置失败");
  581. return false;
  582. }
  583. //14.自动控制FIB切割
  584. SendMsg("FIB切割");
  585. if (!FIBCross())
  586. {
  587. SendMsg("FIB切割失败");
  588. return false;
  589. }
  590. //{
  591. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  592. // //2.控制FIB进行切割
  593. // //3.控制FIB拍照600X
  594. // //4.保存图片
  595. // {
  596. // //1.设置图片名称
  597. // //2.保存图片3
  598. // String fileName3 = WorkingFolder + ImageName3;
  599. // if (!GetImage(ImageMode.FIB, fileName3))
  600. // {
  601. // return false;
  602. // }
  603. // }
  604. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  605. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  606. //}
  607. //15.根据样品类型决定是否撤出PT针
  608. SendMsg("撤出PT针");
  609. //if (firstHole.PT == false)
  610. //{
  611. if (!RetractPT())
  612. {
  613. SendMsg("撤出PT针失败");
  614. return false;
  615. }
  616. //}
  617. // 16.找到切割位置
  618. SendMsg("找到切割位置");
  619. //17.自动控制SEM拍截面照
  620. SendMsg("观测层高");
  621. SendMsg("切换SEM控制");
  622. if (!iSEM.CmdFIBModeSEM())
  623. {
  624. SendMsg("SEM模式切换失败");
  625. return false;
  626. }
  627. Thread.Sleep(10000);
  628. SendMsg("放大6000倍");
  629. if (!iSEM.SetMagnification(6000))
  630. {
  631. SendMsg("放大倍数调整失败");
  632. return false;
  633. }
  634. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  635. {
  636. SendMsg("拍摄照片完成");
  637. //return true;
  638. }
  639. else
  640. {
  641. SendMsg("拍摄照片失败");
  642. return false;
  643. }
  644. SendMsg("图像校正36度");
  645. //3.设置SEM角度补偿cos36度
  646. if (!TiltCorrection(36))
  647. {
  648. return false;
  649. }
  650. Thread.Sleep(3000);
  651. string fn;
  652. //用宏抓一般图
  653. Thread.Sleep(5000);
  654. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  655. SendMsg("用宏抓一般图" + fn);
  656. iSEM.CMDMCFFilename(fn);
  657. //延时1s??
  658. Thread.Sleep(5000);
  659. //用宏抓好图
  660. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  661. SendMsg("用宏抓好图" + fn);
  662. iSEM.CMDMCFFilename(fn);
  663. //延时1s??
  664. Thread.Sleep(30000);
  665. Thread.Sleep(10000);
  666. WorkingFolder = m_measureFile.FilePath;
  667. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  668. SendMsg("SEM拍照存储到" + fileName6);
  669. if (!GetImage(ImageMode.SEM, fileName6))
  670. {
  671. SendMsg("SEM拍照失败");
  672. return false;
  673. }
  674. //用宏抓标志图
  675. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  676. SendMsg("用宏抓标志图" + fn);
  677. iSEM.CMDMCFFilename(fn);
  678. //延时1s??
  679. Thread.Sleep(30000);
  680. //恢复简单抓图
  681. Thread.Sleep(5000);
  682. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  683. SendMsg("用宏抓一般图" + fn);
  684. iSEM.CMDMCFFilename(fn);
  685. SendMsg("所有图结束");
  686. return true;
  687. }
  688. //第一个孔的测试过程
  689. public bool FirstHole()
  690. {
  691. MeasureData.CutHole firstHole = m_cutHoles[0];
  692. SendMsg("插入PT针");
  693. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  694. //if (firstHole.PT == true)
  695. {
  696. if (!InsertPT())
  697. {
  698. SendMsg("插入PT针失败");
  699. return false;
  700. }
  701. }
  702. //13. 自动 定位功能
  703. SendMsg("自动定位切割位置");
  704. if (!GetPoistion())
  705. {
  706. SendMsg("自动定位切割位置失败");
  707. return false;
  708. }
  709. //14.自动控制FIB切割
  710. SendMsg("FIB切割");
  711. if (!FIBCross())
  712. {
  713. SendMsg("FIB切割失败");
  714. return false;
  715. }
  716. //{
  717. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  718. // //2.控制FIB进行切割
  719. // //3.控制FIB拍照600X
  720. // //4.保存图片
  721. // {
  722. // //1.设置图片名称
  723. // //2.保存图片3
  724. // String fileName3 = WorkingFolder + ImageName3;
  725. // if (!GetImage(ImageMode.FIB, fileName3))
  726. // {
  727. // return false;
  728. // }
  729. // }
  730. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  731. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  732. //}
  733. //15.根据样品类型决定是否撤出PT针
  734. SendMsg("撤出PT针");
  735. //if (firstHole.PT == false)
  736. //{
  737. if (!RetractPT())
  738. {
  739. SendMsg("撤出PT针失败");
  740. return false;
  741. }
  742. //}
  743. // 16.找到切割位置
  744. SendMsg("找到切割位置");
  745. //17.自动控制SEM拍截面照
  746. SendMsg("观测层高");
  747. SendMsg("切换SEM控制");
  748. if (!iSEM.CmdFIBModeSEM())
  749. {
  750. SendMsg("SEM模式切换失败");
  751. return false;
  752. }
  753. Thread.Sleep(10000);
  754. SendMsg("放大6000倍");
  755. if (!iSEM.SetMagnification(6000))
  756. {
  757. SendMsg("放大倍数调整失败");
  758. return false;
  759. }
  760. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  761. {
  762. SendMsg("拍摄照片完成");
  763. //return true;
  764. }
  765. else
  766. {
  767. SendMsg("拍摄照片失败");
  768. return false;
  769. }
  770. SendMsg("图像校正36度");
  771. //3.设置SEM角度补偿cos36度
  772. if (!TiltCorrection(36))
  773. {
  774. return false;
  775. }
  776. Thread.Sleep(3000);
  777. string fn;
  778. //用宏抓一般图
  779. Thread.Sleep(5000);
  780. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  781. SendMsg("用宏抓一般图" + fn);
  782. iSEM.CMDMCFFilename(fn);
  783. //延时1s??
  784. Thread.Sleep(5000);
  785. //用宏抓好图
  786. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  787. SendMsg("用宏抓好图" + fn);
  788. iSEM.CMDMCFFilename(fn);
  789. //延时1s??
  790. Thread.Sleep(30000);
  791. Thread.Sleep(10000);
  792. WorkingFolder = m_measureFile.FilePath;
  793. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  794. SendMsg("SEM拍照存储到" + fileName6);
  795. if (!GetImage(ImageMode.SEM, fileName6))
  796. {
  797. SendMsg("SEM拍照失败");
  798. return false;
  799. }
  800. //用宏抓标志图
  801. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  802. SendMsg("用宏抓标志图" + fn);
  803. iSEM.CMDMCFFilename(fn);
  804. //延时1s??
  805. Thread.Sleep(30000);
  806. Thread.Sleep(5000);
  807. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  808. SendMsg("用宏抓一般图" + fn);
  809. iSEM.CMDMCFFilename(fn);
  810. //延时1s??
  811. Thread.Sleep(5000);
  812. SendMsg("所有图结束");
  813. ////17.自动控制SEM拍截面照
  814. //{
  815. // //1.控制SEM放大到指定参数大小范围,6000x
  816. // if (!iSEM.SetMagnification(6000))
  817. // {
  818. // return false;
  819. // }
  820. // //2.控制SEM自动对焦、消像散、亮度、对比度
  821. // if (!MeasParam.FocusMode)
  822. // {
  823. // //弹出手动对焦的窗口
  824. // }
  825. // else
  826. // {
  827. // //调用自动对焦模块
  828. // }
  829. // //3.设置SEM角度补偿cos36度
  830. // if (!TiltCorrection(36))
  831. // {
  832. // return false;
  833. // }
  834. // //4.控制SEM拍照
  835. // //5.保存照片4
  836. // String fileName5 = WorkingFolder + ImageName5;
  837. // if (!GetImage(ImageMode.SEM, fileName5))
  838. // {
  839. // return false;
  840. // }
  841. // //6.将照片传给客户,获取偏移坐标
  842. // float x6 = 0, y6 = 0;
  843. // float angle1 = 0;
  844. // float mage = 10000;
  845. // //7.根据坐标控制SEM移动到分析位置
  846. // if (!iSEM.MoveStageXY(x6, y6))
  847. // {
  848. // return false;
  849. // }
  850. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  851. // float x7 = iSEM.GetStageAtX();
  852. // float y7 = iSEM.GetStageAtY();
  853. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  854. // {
  855. // return false;
  856. // }
  857. // //9.控制SEM平行校正,并记录校正前初始值
  858. // float foldAnagle = iSEM.GetScanRotation();
  859. // if (foldAnagle == float.NaN)
  860. // {
  861. // return false;
  862. // }
  863. // if (!iSEM.SetScanRotation(angle1))
  864. // {
  865. // return false;
  866. // }
  867. // //10.控制SEM放大到指定参数大小范围
  868. // if (!iSEM.SetMagnification(mage))
  869. // {
  870. // return false;
  871. // }
  872. // //11.控制SEM自动对焦、消像散、亮度、对比度
  873. // if (!MeasParam.FocusMode)
  874. // {
  875. // //弹出手动对焦的窗口
  876. // }
  877. // else
  878. // {
  879. // //调用自动对焦模块
  880. // }
  881. // //12.控制SEM对分析位置拍照
  882. // String fileName6 = WorkingFolder + ImageName6;
  883. // if (!GetImage(ImageMode.SEM, fileName6))
  884. // {
  885. // return false;
  886. // }
  887. // //13.保存照片
  888. // //14.控制SEM取消电子束校正,回到初始值
  889. // if (!iSEM.SetScanRotation(foldAnagle))
  890. // {
  891. // return false;
  892. // }
  893. //}
  894. ////18.自动层高分析
  895. //{
  896. // //1.获取SEM Pixel Size给客户传入参数
  897. // if (iSEM.GetPixelSize() == float.NaN)
  898. // {
  899. // return false;
  900. // }
  901. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  902. //}
  903. ////19.自动能谱分析
  904. //{
  905. // //1. 确定能谱位置
  906. // //2. 控制牛津打能谱
  907. // //3. 能谱分析——面扫+线扫描
  908. //}
  909. return true;
  910. }
  911. //非第一个孔的测试过程
  912. public void OtherHole()
  913. {
  914. //for (int i = 1; i < m_cutHoles.Count; i++)
  915. //{
  916. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  917. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  918. //1. 初始化
  919. {
  920. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  921. //读取图像冻结状态
  922. float ffrozen = iSEM.GetImageFrozen();
  923. if (ffrozen == float.NaN)
  924. {
  925. return;
  926. }
  927. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  928. {
  929. SendMsg("样品台恢复到水平");
  930. //return true;
  931. }
  932. else
  933. {
  934. SendMsg("禁止样品台恢复到水平");
  935. return;
  936. }
  937. //2. 调节样品1号孔的样品台6轴坐标
  938. //3. 将样品1号孔坐标2存入数据库
  939. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  940. if (!iSEM.SetStageGotoT(0))
  941. {
  942. return;
  943. }
  944. while (true)
  945. {
  946. Thread.Sleep(10000);
  947. if (iSEM.GetStageIs() == 0)
  948. {
  949. break;
  950. }
  951. }
  952. //5. 获取光镜2号孔XY坐标
  953. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  954. //6. 根据光镜坐标控制样品台移动
  955. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  956. {
  957. SendMsg("移动失败");
  958. }
  959. while (true)
  960. {
  961. Thread.Sleep(10000);
  962. if (iSEM.GetStageIs() == 0)
  963. {
  964. break;
  965. }
  966. }
  967. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  968. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  969. {
  970. SendMsg("样品台旋转");
  971. //return true;
  972. }
  973. else
  974. {
  975. SendMsg("禁止样品台旋转");
  976. return;
  977. }
  978. if (!iSEM.SetStageGotoT(54))
  979. {
  980. return;
  981. }
  982. while (true)
  983. {
  984. Thread.Sleep(10000);
  985. if (iSEM.GetStageIs() == 0)
  986. {
  987. break;
  988. }
  989. }
  990. }
  991. SendMsg("拉直操作");
  992. SendMsg("其他操作与1号孔操作一致");
  993. if (!CommonWork())
  994. {
  995. return;
  996. }
  997. //2. 定位切割
  998. {
  999. //1. 拉直操作
  1000. {
  1001. //1.1 控制SEM进行拍照
  1002. //1.2 图片传给客户,返回偏移角度
  1003. //1.3 根据返回角度,控制样品台转动
  1004. }
  1005. //2. 与1号孔13步相同
  1006. }
  1007. //3. 以后步骤与1号孔以后步骤一致
  1008. //}
  1009. }
  1010. //角度补偿
  1011. public bool TiltCorrection(float a_fAngle)
  1012. {
  1013. //记录原来电镜的状态
  1014. // bool bTilt = false;
  1015. //float fOldTilt = iSEM.GetTiltCorrection();
  1016. //if (fOldTilt == float.NaN)
  1017. //{
  1018. // return false;
  1019. //}
  1020. //else if (fOldTilt == 1)
  1021. //{
  1022. // bTilt = true;
  1023. //}
  1024. //else if (fOldTilt == 0)
  1025. //{
  1026. // bTilt = false;
  1027. //}
  1028. //float fOldAngle = iSEM.GetTiltAngle();
  1029. //if (fOldAngle == float.NaN)
  1030. //{
  1031. // return false;
  1032. //}
  1033. //开启校正
  1034. SendMsg("开启校正");
  1035. if (!iSEM.SetTiltAngleOn())
  1036. {
  1037. return false;
  1038. }
  1039. //设置校正角度
  1040. //if (!iSEM.SetTiltAngle(fOldAngle))
  1041. //{
  1042. // return false;
  1043. //}
  1044. //恢复原始状态
  1045. SendMsg("校正角度"+ a_fAngle.ToString());
  1046. if (!iSEM.SetTiltAngle(a_fAngle))
  1047. {
  1048. return false;
  1049. }
  1050. //if (bTilt)
  1051. //{
  1052. // if (!iSEM.SetTiltCorrectionOn())
  1053. // {
  1054. // return false;
  1055. // }
  1056. //}
  1057. //else
  1058. //{
  1059. // if (!iSEM.SetTiltCorrectionOff())
  1060. // {
  1061. // return false;
  1062. // }
  1063. //}
  1064. return true;
  1065. }
  1066. //拍图
  1067. public bool GetImage(ImageMode a_mode, String a_fileName)
  1068. {
  1069. //1. 图像解冻
  1070. float foldFrozen = iSEM.GetImageFrozen();
  1071. if (foldFrozen == float.NaN)
  1072. {
  1073. return false;
  1074. }
  1075. if (!iSEM.ImageLive())
  1076. {
  1077. return false;
  1078. }
  1079. //2. 确认图像模式
  1080. if (ImageMode.SEM == a_mode)
  1081. {
  1082. if (!iSEM.CmdFIBModeSEM())
  1083. {
  1084. return false;
  1085. }
  1086. }
  1087. else if (ImageMode.FIB == a_mode)
  1088. {
  1089. if (!iSEM.CmdFIBModeFIB())
  1090. {
  1091. return false;
  1092. }
  1093. }
  1094. else
  1095. {
  1096. return false;
  1097. }
  1098. //3. 获取分辨率
  1099. int[] ImageSize = iSEM.GetImageStore();
  1100. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1101. {
  1102. return false;
  1103. }
  1104. short width = (short)ImageSize[0];
  1105. short height = (short)ImageSize[1];
  1106. //4. 抓图
  1107. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1108. {
  1109. return false;
  1110. }
  1111. //5. 恢复初始状态
  1112. if (foldFrozen == 0)
  1113. {
  1114. if (!iSEM.ImageLive())
  1115. {
  1116. return false;
  1117. }
  1118. }
  1119. else if (foldFrozen == 1)
  1120. {
  1121. if (!iSEM.ImageFrozen())
  1122. {
  1123. return false;
  1124. }
  1125. }
  1126. return true;
  1127. }
  1128. }
  1129. }