Measure.cs 85 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using WebManager;
  16. using OpenCvSharp;
  17. namespace MeasureThread
  18. {
  19. //图片模式
  20. public enum ImageMode
  21. {
  22. FIB,
  23. SEM
  24. }
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. public class ThreadStatusEventArgs
  28. {
  29. //状态
  30. public Boolean State
  31. {
  32. get { return m_state; }
  33. set { m_state = value; }
  34. }
  35. private Boolean m_state;
  36. //时间
  37. public DateTime Time
  38. {
  39. get { return m_time; }
  40. set { m_time = value; }
  41. }
  42. private DateTime m_time;
  43. //步骤代码
  44. public String Step_Code
  45. {
  46. get { return step_Code; }
  47. set { step_Code = value; }
  48. }
  49. private String step_Code;
  50. //其他消息
  51. public String Message
  52. {
  53. get { return this.message; }
  54. set { this.message = value; }
  55. }
  56. private String message;
  57. //孔名
  58. public String HoleName
  59. {
  60. get { return this.holeName; }
  61. set { this.holeName = value; }
  62. }
  63. private String holeName;
  64. //图片信息
  65. public class PictureInformation
  66. {
  67. public String Picture_FullPath
  68. {
  69. get { return picture_FullPath; }
  70. set { picture_FullPath = value; }
  71. }
  72. private String picture_FullPath;
  73. public double Work_Voltage
  74. {
  75. get { return work_Voltage; }
  76. set { work_Voltage = value; }
  77. }
  78. private double work_Voltage;
  79. public double Magnification
  80. {
  81. get { return magnification; }
  82. set { magnification = value; }
  83. }
  84. private double magnification;
  85. public double Work_Distance
  86. {
  87. get { return work_Distance; }
  88. set { work_Distance = value; }
  89. }
  90. private double work_Distance;
  91. public String Work_Status
  92. {
  93. get { return work_Status; }
  94. set { work_Status = value; }
  95. }
  96. private String work_Status;
  97. }
  98. //图片信息实例类
  99. public PictureInformation Picture_Information
  100. {
  101. get { return picture_Information; }
  102. set { picture_Information = value; }
  103. }
  104. private PictureInformation picture_Information;
  105. //图像信息
  106. public class ImageInformation
  107. {
  108. public int Method_Name
  109. {
  110. get { return method_Name; }
  111. set { method_Name = value; }
  112. }
  113. private int method_Name;
  114. public Source_Img_Degree_Direction SIDD;
  115. public Cut_Position CP;
  116. public Cut_Success CS;
  117. public Trapezoid_Top_Center_Position TTCP;
  118. public Auto_Foucs AF;
  119. public Auto_Stigmatic AS;
  120. public Center_Position_OffsetAngle_Direction CPOD;
  121. public Measure_Size MS;
  122. public ImageInformation()
  123. {
  124. SIDD = new Source_Img_Degree_Direction();
  125. CP = new Cut_Position();
  126. CS = new Cut_Success();
  127. TTCP = new Trapezoid_Top_Center_Position();
  128. AF = new Auto_Foucs();
  129. AS = new Auto_Stigmatic();
  130. CPOD = new Center_Position_OffsetAngle_Direction();
  131. MS = new Measure_Size();
  132. }
  133. //1-计算原始图像偏移角度及方向
  134. public class Source_Img_Degree_Direction
  135. {
  136. public Boolean Is_Image = false;
  137. public double Degree
  138. {
  139. get { return degree; }
  140. set { degree = value; }
  141. }
  142. private double degree;
  143. public int Direction
  144. {
  145. get { return direction; }
  146. set { direction = value; }
  147. }
  148. private int direction;
  149. public int State
  150. {
  151. get { return state; }
  152. set { state = value; }
  153. }
  154. private int state;
  155. }
  156. //2-计算切割点位置
  157. public class Cut_Position
  158. {
  159. public Boolean Is_Image = false;
  160. public double Offsetx
  161. {
  162. get { return offsetx; }
  163. set { offsetx = value; }
  164. }
  165. private double offsetx;
  166. public double Offsety
  167. {
  168. get { return offsety; }
  169. set { offsety = value; }
  170. }
  171. private double offsety;
  172. public int State
  173. {
  174. get { return state; }
  175. set { state = value; }
  176. }
  177. private int state;
  178. }
  179. //3-是否切割成功
  180. public class Cut_Success
  181. {
  182. public Boolean Is_Image = false;
  183. public int State
  184. {
  185. get { return state; }
  186. set { state = value; }
  187. }
  188. private int state;
  189. }
  190. //4-计算切割后图像梯形区域上边中心点坐标
  191. public class Trapezoid_Top_Center_Position
  192. {
  193. public Boolean Is_Image = false;
  194. public double TopCenterX
  195. {
  196. get { return topCenterX; }
  197. set { topCenterX = value; }
  198. }
  199. private double topCenterX;
  200. public double TopCenterY
  201. {
  202. get { return topCenterY; }
  203. set { topCenterY = value; }
  204. }
  205. private double topCenterY;
  206. public int State
  207. {
  208. get { return state; }
  209. set { state = value; }
  210. }
  211. private int state;
  212. }
  213. //5-自动对焦
  214. public class Auto_Foucs
  215. {
  216. public Boolean Is_Image = true;
  217. public String Img_Path
  218. {
  219. get { return img_Path; }
  220. set { img_Path = value; }
  221. }
  222. private String img_Path;
  223. }
  224. //6-自动像闪
  225. public class Auto_Stigmatic
  226. {
  227. public Boolean Is_Image = true;
  228. public String Img_Path
  229. {
  230. get { return img_Path; }
  231. set { img_Path = value; }
  232. }
  233. private String img_Path;
  234. }
  235. //7-计算切割面区域中心坐标,以及偏移角度及方向
  236. public class Center_Position_OffsetAngle_Direction
  237. {
  238. public Boolean Is_Image = false;
  239. public double CenterX
  240. {
  241. get { return centerX; }
  242. set { centerX = value; }
  243. }
  244. private double centerX;
  245. public double CenterY
  246. {
  247. get { return centerY; }
  248. set { centerY = value; }
  249. }
  250. private double centerY;
  251. public double Degree
  252. {
  253. get { return degree; }
  254. set { degree = value; }
  255. }
  256. private double degree;
  257. public int Direction
  258. {
  259. get { return direction; }
  260. set { direction = value; }
  261. }
  262. private int direction;
  263. public int State
  264. {
  265. get { return state; }
  266. set { state = value; }
  267. }
  268. private int state;
  269. }
  270. //8-测量尺寸
  271. public class Measure_Size
  272. {
  273. public Boolean Is_Image = false;
  274. public int State
  275. {
  276. get { return state; }
  277. set { state = value; }
  278. }
  279. private int state;
  280. }
  281. }
  282. //图像信息实例类
  283. public ImageInformation Image_Information
  284. {
  285. get { return image_Information; }
  286. set { image_Information = value; }
  287. }
  288. private ImageInformation image_Information;
  289. public ThreadStatusEventArgs(string a_State)
  290. {
  291. picture_Information = new PictureInformation();
  292. image_Information = new ImageInformation();
  293. }
  294. }
  295. public class CutHolesStatusEventArgs
  296. {
  297. public string State
  298. {
  299. get { return m_state; }
  300. set { m_state = value; }
  301. }
  302. private string m_state;
  303. public string HoleName
  304. {
  305. get { return m_holeName; }
  306. set { m_holeName = value; }
  307. }
  308. private string m_holeName;
  309. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  310. {
  311. this.m_state = a_state;
  312. this.m_holeName = a_holeName;
  313. }
  314. }
  315. public class Measure
  316. {
  317. /// <summary>
  318. /// 图像拉直算法
  319. /// </summary>
  320. /// <param name="Slope">倾斜角度</param>
  321. /// <param name="x0">圆心坐标x</param>
  322. /// <param name="y0">圆心坐标y</param>
  323. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  324. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  325. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  326. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  327. /// <returns></returns>
  328. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  329. {
  330. try
  331. {
  332. double xr = x1 - x0;//倾斜图到中心的距离差x
  333. double yr = y1 - y0;//倾斜图到中心的距离差y
  334. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  335. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  336. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  337. double k_S = k - Slope;//通过夹角差求x2,y2
  338. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  339. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  340. if (Slope > 0 || Slope < 0)
  341. {
  342. Hx = x1 - x2;
  343. Hy = y1 - y2;
  344. }
  345. else
  346. {
  347. Hx = 0;
  348. Hy = 0;
  349. }
  350. return true;
  351. }
  352. catch (Exception)
  353. {
  354. return false;
  355. }
  356. }
  357. public WebResult wr = null;
  358. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  359. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  360. //定义一个全局的消息类
  361. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  362. //全局只有一个fatorySEM
  363. static FactoryHardware factorySEM = FactoryHardware.Instance;
  364. ISEMControl iSEM = factorySEM.ISEM;
  365. //@的作用是不用转义字符\\只打一个就行
  366. const String ImageName1 = @"ImageSEMH.tif"; //传给客户,作水平校正
  367. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  368. const String ImageName31 = @"ImageFIBBefore.tif";
  369. const String ImageName32 = @"ImageFIBAfter.tif";
  370. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  371. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  372. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  373. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  374. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  375. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  376. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  377. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  378. const String ElyDeposition = @"Deposition.ely"; //沉积
  379. const String ElyCrossSection = @"CrossSection.ely"; //切割
  380. const float fMin = (float)0.0000002; //单位是米
  381. public Boolean key_stop = false;
  382. String focus_path = "";
  383. String data_path = "";
  384. int m_nWorkHoleNo = -1;
  385. //测量文件
  386. private MeasureFile m_measureFile;
  387. public MeasureFile MeasureFile
  388. {
  389. get { return this.m_measureFile; }
  390. set { this.m_measureFile = value; }
  391. }
  392. //测量的切割孔
  393. private List<MeasureData.CutHole> m_cutHoles;
  394. public List<MeasureData.CutHole> cutHoles
  395. {
  396. get { return this.m_cutHoles; }
  397. set { this.m_cutHoles = value; }
  398. }
  399. //工作文件夹
  400. private string m_WorkingFolder;
  401. public string WorkingFolder
  402. {
  403. get { return this.m_WorkingFolder; }
  404. set { this.m_WorkingFolder = value; }
  405. }
  406. //程序当前路径
  407. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  408. //线程状态
  409. private ThreadStatus m_ThreadStatus;
  410. public ThreadStatus TStatus
  411. {
  412. get { return this.m_ThreadStatus; }
  413. set { this.m_ThreadStatus = value; }
  414. }
  415. //测量参数
  416. private MeasureParam m_MsParam;
  417. public MeasureParam MeasParam
  418. {
  419. get { return this.m_MsParam; }
  420. set { this.m_MsParam = value; }
  421. }
  422. //构造函数
  423. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  424. {
  425. MeasParam = new MeasureParam();
  426. TStatus = new ThreadStatus();
  427. cutHoles = new List<MeasureData.CutHole>();
  428. //配置远程连接
  429. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  430. }
  431. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  432. public bool InitMeas(MeasureFile a_measureFile)
  433. {
  434. m_measureFile = a_measureFile;
  435. List<CutHole> listHoles = m_measureFile.ListCutHole;
  436. foreach (CutHole h in listHoles)
  437. {
  438. if (h.SWITCH == true)
  439. {
  440. m_cutHoles.Add(h);
  441. }
  442. }
  443. if (m_cutHoles.Count == 0)
  444. return false;
  445. this.m_MsParam = m_measureFile.MParam;
  446. return true;
  447. }
  448. public void SendMsg(string step_code)
  449. {
  450. arg.Step_Code = step_code;
  451. arg.Time = DateTime.Now;
  452. SendThreadStatus(this, arg);
  453. }
  454. public void SendCutHoleMsg(string a_state, string a_holeName)
  455. {
  456. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  457. arg.HoleName = a_holeName;
  458. arg.State = a_state;
  459. SendCutHolesStatus(this, arg);
  460. }
  461. //测量流程
  462. public void DoMeasure()
  463. {
  464. //创建线程的测量状态的更新
  465. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  466. if (SendThreadStatus != null)
  467. {
  468. //SendMsg("开始测量。");
  469. }
  470. LogManager.AddHardwareLog("开始测量",true);
  471. //检查硬件连接是否正常
  472. if (!ConnectHardware())
  473. {
  474. //SendMsg("连接硬件失败。");
  475. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  476. return;
  477. }
  478. //SendMsg("硬件连接成功。");
  479. //设置工作文件夹
  480. if (!SetWorkingFolderStr())
  481. {
  482. //SendMsg("设置工作文件夹失败");
  483. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  484. return;
  485. }
  486. //SendMsg("创建工作文件路径为" + WorkingFolder);
  487. float[] firstPosition;
  488. //将停止键复位
  489. key_stop = false;
  490. for (int i = 0; i < m_cutHoles.Count; i++)
  491. {
  492. m_nWorkHoleNo = i;
  493. arg.HoleName = m_cutHoles[i].HoleName;
  494. //创建文件夹,孔名文件夹结构
  495. //最终数据存放目录
  496. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  497. //对焦数据存放目录
  498. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  499. m_MsParam.AutoFocus.Path = focus_path;
  500. if (!Directory.Exists(focus_path))
  501. {
  502. Directory.CreateDirectory(focus_path);
  503. }
  504. //判断孔状态
  505. if(m_cutHoles[i].STATE != State.Unmeasured)
  506. {
  507. continue;
  508. }
  509. //开始循环工作
  510. if (i == 0)
  511. {
  512. //SendMsg("第一个切孔开始测量");
  513. //切孔操作-开始
  514. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  515. firstPosition = iSEM.GetStagePosition();
  516. //第一个孔的测试
  517. m_cutHoles[i].START = DateTime.Now;
  518. //成功
  519. if(FirstHole())
  520. {
  521. //保存文件,将测量状态更改
  522. m_cutHoles[i].STATE = State.Success;
  523. m_cutHoles[i].END = DateTime.Now;
  524. m_measureFile.Save();
  525. }
  526. //失败
  527. else
  528. {
  529. m_cutHoles[i].STATE = State.Failed;
  530. m_cutHoles[i].END = DateTime.Now;
  531. m_measureFile.Save();
  532. }
  533. //切孔操作-完成
  534. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  535. }
  536. else
  537. {
  538. //非第一个孔的测试
  539. //SendMsg("第" + i.ToString() + "个切孔开始测量");
  540. //切孔操作-开始
  541. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  542. //其他孔的测试
  543. //成功
  544. if (OtherHole())
  545. {
  546. //保存文件,将测量状态更改
  547. m_cutHoles[i].STATE = State.Success;
  548. m_measureFile.Save();
  549. }
  550. //失败
  551. else
  552. {
  553. m_cutHoles[i].STATE = State.Failed;
  554. m_measureFile.Save();
  555. }
  556. //切孔操作-完成
  557. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  558. }
  559. if(key_stop)
  560. {
  561. m_cutHoles[i].END = DateTime.Now;
  562. m_cutHoles[i].STATE = State.Unmeasured;
  563. m_measureFile.Save();
  564. arg.Message = "用户停止测量";
  565. SendMsg("0-0");
  566. break;
  567. }
  568. }
  569. }
  570. //检查硬件连接是否正常
  571. public bool ConnectHardware()
  572. {
  573. //返回硬件的连接状态
  574. return iSEM.ConnectStatus();
  575. }
  576. //设置工作文件夹
  577. public bool SetWorkingFolderStr()
  578. {
  579. WorkingFolder = m_measureFile.FilePath;
  580. return true;
  581. }
  582. //插入PT针
  583. public bool InsertPT()
  584. {
  585. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  586. //SendMsg("调用宏插入PT针宏文件" + fn);
  587. iSEM.CMDMCFFilename(fn);
  588. //延时1s??
  589. Thread.Sleep(1000);
  590. return true;
  591. }
  592. //撤出PT针
  593. public bool RetractPT()
  594. {
  595. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  596. //SendMsg("调用宏撤出PT针宏文件" + fn);
  597. iSEM.CMDMCFFilename(fn);
  598. //延时1s??
  599. Thread.Sleep(1000);
  600. return true;
  601. }
  602. //PT沉积
  603. public bool PTWork()
  604. {
  605. //执行PT沉积的ELY文件
  606. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  607. //SendMsg("执行PT沉积Ely文件:" + fn);
  608. if (!ExcuteEly(fn))
  609. {
  610. return false;
  611. }
  612. //等待沉积完成
  613. while (true)
  614. {
  615. Thread.Sleep(10000);
  616. if (iSEM.GetFIBMode() == 0)
  617. {
  618. break;
  619. }
  620. }
  621. return true;
  622. }
  623. //FIB切割
  624. public bool FIBWork()
  625. {
  626. //执行PT沉积的ELY文件
  627. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  628. //SendMsg("执行FIB切割Ely文件:" + fn);
  629. if (!ExcuteEly(fn))
  630. {
  631. return false;
  632. }
  633. //等待切割完成
  634. while (true)
  635. {
  636. Thread.Sleep(10000);
  637. if (iSEM.GetFIBMode() == 0)
  638. {
  639. break;
  640. }
  641. }
  642. return true;
  643. }
  644. //执行ELY文件的步骤
  645. public bool ExcuteEly(string a_filename)
  646. {
  647. //执行ELy文件有三个动作
  648. //1. 选择ELY文件
  649. //SendMsg("选择ELY文件");
  650. if (!iSEM.CmdFIBLoadELY(a_filename))
  651. {
  652. //SendMsg("选择ELY文件失败");
  653. return false;
  654. }
  655. Thread.Sleep(1000);
  656. //2. 确认ELY文件
  657. //SendMsg("确认ELY文件");
  658. if (!iSEM.CmdFIBEXPOSUREELY())
  659. {
  660. //SendMsg("确认ELY文件失败");
  661. return false;
  662. }
  663. Thread.Sleep(1000);
  664. //3. 执行ELY文件
  665. //SendMsg("执行ELY文件");
  666. if (!iSEM.CmdFIBSTARTELY())
  667. {
  668. //SendMsg("执行ELY文件失败");
  669. return false;
  670. }
  671. Thread.Sleep(1000);
  672. return true;
  673. }
  674. //执行自动对焦
  675. public bool ImageFocus(String step_code)
  676. {
  677. if (m_measureFile.MParam.FocusMode == 1)//手动
  678. {
  679. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  680. {
  681. }
  682. else
  683. {
  684. return false;
  685. }
  686. }
  687. else if(m_measureFile.MParam.FocusMode == 2)//自有自动
  688. {
  689. //郝工增加自动对焦算法
  690. //处理文件夹
  691. if (Directory.Exists(focus_path))
  692. {
  693. Directory.Delete(focus_path, true);
  694. }
  695. Thread.Sleep(3000);
  696. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  697. Thread.Sleep(1000);
  698. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  699. Thread.Sleep(1000);
  700. //再创建文件夹
  701. Directory.CreateDirectory(focus_path);
  702. //1、对焦参数类,2、输出工作距离
  703. int wd = 0;
  704. AutoFocus(m_MsParam.AutoFocus, out wd, step_code);
  705. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  706. //设置工作距离
  707. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  708. //设置完工作距离后必须延迟5秒
  709. Thread.Sleep(5000);
  710. //处理图片位置
  711. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  712. }
  713. else if(m_MsParam.FocusMode == 3) //客户自动
  714. {
  715. //后期和客户对接接口
  716. List<string> filenames = new List<string>();
  717. String retfilename = wr.Img_Auto_Focus(filenames);
  718. }
  719. else //蔡司自动对焦
  720. {
  721. iSEM.CmdAutoFocusCoarse();
  722. while(true)
  723. {
  724. Thread.Sleep(10000);
  725. if(0 == iSEM.GetAutoFunction())
  726. {
  727. break;
  728. }
  729. }
  730. iSEM.CmdAutoFocusFine();
  731. while (true)
  732. {
  733. Thread.Sleep(10000);
  734. if (0 == iSEM.GetAutoFunction())
  735. {
  736. break;
  737. }
  738. }
  739. }
  740. return true;
  741. }
  742. /// <summary>
  743. ///13. 自动 定位功能,沉积
  744. /// </summary>
  745. /// <returns></returns>
  746. public bool GetPoistion(Boolean isFirst)
  747. {
  748. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  749. int state = 0;
  750. //1.控制SEM放大600X
  751. arg.Picture_Information.Work_Status = "SEM";
  752. if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage))
  753. {
  754. arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败";
  755. arg.State = false;
  756. SendMsg("1-1");
  757. return false;
  758. }
  759. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  760. {
  761. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  762. arg.State = false;
  763. SendMsg("1-1");
  764. return false;
  765. }
  766. arg.State = true;
  767. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  768. SendMsg("1-1");
  769. //判断是否停止进程
  770. if (key_stop)
  771. {
  772. return false;
  773. }
  774. //2.控制SEM自动对焦、亮度、对比度
  775. if(ImageFocus("1-2"))
  776. {
  777. arg.Message = "自动对焦完成";
  778. arg.State = true;
  779. SendMsg("1-2");
  780. }
  781. else
  782. {
  783. arg.Message = "自动对焦失败";
  784. arg.State = false;
  785. SendMsg("1-2");
  786. }
  787. //判断是否停止进程
  788. if (key_stop)
  789. {
  790. return false;
  791. }
  792. //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
  793. if (!isFirst)
  794. {
  795. if (!TiltCorrection(54))
  796. {
  797. arg.Message = "设置SEM进行角度补偿54度失败";
  798. arg.State = false;
  799. SendMsg("1-3");
  800. return false;
  801. }
  802. Thread.Sleep(5000);
  803. arg.State = true;
  804. arg.Message = "设置SEM进行角度补偿54度成功";
  805. SendMsg("1-3");
  806. //判断是否停止进程
  807. if (key_stop)
  808. {
  809. return false;
  810. }
  811. }
  812. else
  813. {
  814. Thread.Sleep(2000);
  815. arg.State = true;
  816. arg.Message = "设置SEM进行角度补偿54度成功";
  817. SendMsg("1-3");
  818. }
  819. //4.控制SEM拍照,5保存照片=====需要更改路径
  820. String fileName1 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  821. arg.Picture_Information.Picture_FullPath = fileName1;
  822. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  823. Thread.Sleep(1000);
  824. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  825. Thread.Sleep(1000);
  826. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  827. Thread.Sleep(1000);
  828. if (!GetImage(ImageMode.SEM, fileName1))
  829. {
  830. arg.Message = "SEM拍照失败";
  831. arg.State = false;
  832. SendMsg("1-4");
  833. return false;
  834. }
  835. arg.State = true;
  836. arg.Message = "SEM拍照成功";
  837. SendMsg("1-4");
  838. Thread.Sleep(3000);
  839. //判断是否停止进程
  840. if (key_stop)
  841. {
  842. return false;
  843. }
  844. //判断是否为仅拍照,不是则执行FIB操作
  845. if (!m_MsParam.Is_Photograph)
  846. {
  847. //6.设置FIB拍照参数——扫描时间、束流等
  848. //7.控制FIB自动亮度、对比度
  849. if (!iSEM.CmdFIBModeFIB())
  850. {
  851. arg.Message = "FIB模式切换失败";
  852. arg.State = false;
  853. SendMsg("1-5");
  854. return false;
  855. }
  856. arg.State = true;
  857. arg.Picture_Information.Work_Status = "FIB";
  858. arg.Message = "FIB模式切换成功";
  859. SendMsg("1-5");
  860. Thread.Sleep(10000);
  861. //判断是否停止进程
  862. if (key_stop)
  863. {
  864. return false;
  865. }
  866. //8.控制FIB拍照
  867. //9.保存照片======更改路径
  868. String fileName2 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  869. arg.Picture_Information.Picture_FullPath = fileName2;
  870. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  871. Thread.Sleep(1000);
  872. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  873. Thread.Sleep(1000);
  874. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  875. Thread.Sleep(1000);
  876. if (!GetImage(ImageMode.FIB, fileName2))
  877. {
  878. arg.Message = "FIB拍照失败";
  879. arg.State = false;
  880. SendMsg("1-6");
  881. return false;
  882. }
  883. arg.State = true;
  884. arg.Message = "FIB拍照成功";
  885. SendMsg("1-6");
  886. Thread.Sleep(3000);
  887. //判断是否停止进程
  888. if (key_stop)
  889. {
  890. return false;
  891. }
  892. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  893. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  894. {
  895. arg.Message = "样品台移动到指定位置";
  896. arg.State = true;
  897. SendMsg("1-7");
  898. }
  899. else
  900. {
  901. wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  902. if (state == 1)
  903. {
  904. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  905. if (!iSEM.MoveStageXY(x1, y1))
  906. {
  907. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  908. arg.State = false;
  909. SendMsg("1-7");
  910. return false;
  911. }
  912. //判断是否移动完成
  913. while (true)
  914. {
  915. Thread.Sleep(5000);
  916. if (iSEM.GetStageIs() == 0)
  917. {
  918. break;
  919. }
  920. }
  921. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  922. arg.State = true;
  923. SendMsg("1-7");
  924. }
  925. else
  926. {
  927. arg.Message = "样品台移动失败";
  928. arg.State = false;
  929. SendMsg("1-7");
  930. return false;
  931. }
  932. }
  933. //判断是否停止进程
  934. if (key_stop)
  935. {
  936. return false;
  937. }
  938. //11.自动工具样品类型参数确定是否需要PT沉积
  939. if (m_MsParam.PT)
  940. {
  941. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  942. //第10步已经移动好位置
  943. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  944. x0 = iSEM.GetStageAtX();
  945. y0 = iSEM.GetStageAtY();
  946. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  947. {
  948. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
  949. arg.State = false;
  950. SendMsg("1-8");
  951. return false;
  952. }
  953. arg.State = true;
  954. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
  955. SendMsg("1-8");
  956. //判断是否停止进程
  957. if (key_stop)
  958. {
  959. return false;
  960. }
  961. //3. 根据坐标进行PT沉积
  962. if (!PTWork())
  963. {
  964. arg.Message = "PT沉积失败";
  965. arg.State = false;
  966. SendMsg("1-9");
  967. return false;
  968. }
  969. arg.State = true;
  970. arg.Message = "PT沉积成功";
  971. SendMsg("1-9");
  972. //判断是否停止进程
  973. if (key_stop)
  974. {
  975. return false;
  976. }
  977. }
  978. }
  979. //12.根据梯形坐标控制FIB调整到中心位置
  980. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  981. //以上两步已经将程序移动到11内部去做
  982. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  983. float[] firstPosition = iSEM.GetStagePosition();
  984. m_cutHoles[0].Position.X = firstPosition[0];
  985. m_cutHoles[0].Position.Y = firstPosition[1];
  986. m_cutHoles[0].Position.Z = firstPosition[2];
  987. m_cutHoles[0].Position.T = firstPosition[3];
  988. m_cutHoles[0].Position.R = firstPosition[4];
  989. m_cutHoles[0].Position.M = firstPosition[5];
  990. //这里要调用文件保存功能
  991. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  992. + firstPosition[1].ToString() + ","
  993. + firstPosition[2].ToString() + ","
  994. + firstPosition[3].ToString() + ","
  995. + firstPosition[4].ToString() + ","
  996. + firstPosition[5].ToString() + ")";
  997. arg.State = true;
  998. SendMsg("1-10");
  999. //判断是否停止进程
  1000. if (key_stop)
  1001. {
  1002. return false;
  1003. }
  1004. return true;
  1005. }
  1006. /// <summary>
  1007. /// 14. FIB切割
  1008. /// </summary>
  1009. /// <returns></returns>
  1010. public bool FIBCross()
  1011. {
  1012. int state = 0;
  1013. //切之前拍照保存,,
  1014. String fileName31 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName31;
  1015. arg.Picture_Information.Picture_FullPath = fileName31;
  1016. arg.Picture_Information.Work_Status = "FIB";
  1017. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1018. Thread.Sleep(1000);
  1019. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1020. Thread.Sleep(1000);
  1021. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1022. Thread.Sleep(1000);
  1023. if (!GetImage(ImageMode.FIB, fileName31))
  1024. {
  1025. arg.Message = "FIB切割前拍照失败";
  1026. arg.State = false;
  1027. SendMsg("1-11");
  1028. return false;
  1029. }
  1030. arg.State = true;
  1031. arg.Message = "FIB切割前拍照成功";
  1032. SendMsg("1-11");
  1033. //判断是否停止进程
  1034. if (key_stop)
  1035. {
  1036. return false;
  1037. }
  1038. //14.自动控制FIB切割
  1039. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1040. //2.控制FIB进行切割
  1041. //以上1、2步全部用ELY文件代替
  1042. if (!FIBWork())
  1043. {
  1044. arg.Message = "FIB切割失败";
  1045. arg.State = false;
  1046. SendMsg("1-12");
  1047. return false;
  1048. }
  1049. arg.State = true;
  1050. arg.Message = "FIB切割成功";
  1051. SendMsg("1-12");
  1052. Thread.Sleep(5000);
  1053. //判断是否停止进程
  1054. if (key_stop)
  1055. {
  1056. return false;
  1057. }
  1058. //3.控制FIB拍照600X
  1059. //底层没有控制方法。
  1060. //4.保存图片
  1061. String fileName32 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName32;
  1062. arg.Picture_Information.Picture_FullPath = fileName32;
  1063. arg.Picture_Information.Work_Status = "FIB";
  1064. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1065. Thread.Sleep(1000);
  1066. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1067. Thread.Sleep(1000);
  1068. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1069. Thread.Sleep(1000);
  1070. if (!GetImage(ImageMode.FIB, fileName32))
  1071. {
  1072. arg.Message = "FIB切割后拍照失败";
  1073. arg.State = false;
  1074. SendMsg("1-13");
  1075. return false;
  1076. }
  1077. arg.State = true;
  1078. arg.Message = "FIB切割后拍照成功";
  1079. SendMsg("1-13");
  1080. Thread.Sleep(3000);
  1081. //判断是否停止进程
  1082. if (key_stop)
  1083. {
  1084. return false;
  1085. }
  1086. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1087. wr.Img_Cut_Success(fileName31, fileName32, out state);
  1088. if(state == 0)
  1089. {
  1090. arg.Message = "FIB切割校验失败";
  1091. arg.State = false;
  1092. SendMsg("1-14");
  1093. return false;
  1094. }
  1095. arg.State = true;
  1096. arg.Message = "FIB切割校验成功";
  1097. SendMsg("1-14");
  1098. //判断是否停止进程
  1099. if (key_stop)
  1100. {
  1101. return false;
  1102. }
  1103. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1104. //拍完照自动解冻,这里不做处理。
  1105. return true;
  1106. }
  1107. /// <summary>
  1108. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1109. /// </summary>
  1110. /// <returns></returns>
  1111. public bool FindCross()
  1112. {
  1113. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1114. float angle = 0;
  1115. int direction = 0;
  1116. int state = 0;
  1117. //切换到SEM模式
  1118. if (!iSEM.CmdFIBModeSEM())
  1119. {
  1120. arg.Message = "SEM模式切换失败";
  1121. arg.State = false;
  1122. SendMsg("1-16");
  1123. return false;
  1124. }
  1125. arg.State = true;
  1126. arg.Message = "SEM模式切换成功";
  1127. SendMsg("1-16");
  1128. arg.Picture_Information.Work_Status = "SEM";
  1129. Thread.Sleep(10000);
  1130. //判断是否停止进程
  1131. if (key_stop)
  1132. {
  1133. return false;
  1134. }
  1135. //1.控制SEM放大到300倍
  1136. if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage))
  1137. {
  1138. arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败";
  1139. arg.State = false;
  1140. SendMsg("1-17");
  1141. return false;
  1142. }
  1143. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/2))
  1144. {
  1145. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 2).ToString("0.0") + "倍失败";
  1146. arg.State = false;
  1147. SendMsg("1-17");
  1148. return false;
  1149. }
  1150. arg.State = true;
  1151. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/2).ToString("0.0") + "倍成功";
  1152. SendMsg("1-17");
  1153. //判断是否停止进程
  1154. if (key_stop)
  1155. {
  1156. return false;
  1157. }
  1158. //2.控制SEM自动对焦、亮度、对比度-接口,,将自动对焦提出单独函数调用
  1159. if (ImageFocus("1-18"))
  1160. {
  1161. arg.Message = "自动对焦完成";
  1162. arg.State = true;
  1163. SendMsg("1-18");
  1164. }
  1165. else
  1166. {
  1167. arg.Message = "自动对焦失败";
  1168. arg.State = false;
  1169. SendMsg("1-18");
  1170. }
  1171. Thread.Sleep(5000);
  1172. //判断是否停止进程
  1173. if (key_stop)
  1174. {
  1175. return false;
  1176. }
  1177. //3.控制SEM拍照
  1178. String fileName4 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
  1179. arg.Picture_Information.Picture_FullPath = fileName4;
  1180. arg.Picture_Information.Work_Status = "SEM";
  1181. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1182. Thread.Sleep(1000);
  1183. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1184. Thread.Sleep(1000);
  1185. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1186. Thread.Sleep(1000);
  1187. if (!GetImage(ImageMode.SEM, fileName4))
  1188. {
  1189. arg.State = false;
  1190. arg.Message = "SEM拍照失败";
  1191. SendMsg("1-19");
  1192. return false;
  1193. }
  1194. arg.State = true;
  1195. arg.Message = "SEM拍照成功";
  1196. SendMsg("1-19");
  1197. Thread.Sleep(3000);
  1198. //判断是否停止进程
  1199. if (key_stop)
  1200. {
  1201. return false;
  1202. }
  1203. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1204. //5.根据坐标控制SEM移动到切孔位置,居中
  1205. //这里是否用到拉直操作,我没有加
  1206. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1207. {
  1208. arg.State = true;
  1209. arg.Message = "样品台移动到指定位置";
  1210. SendMsg("1-20");
  1211. }
  1212. else
  1213. {
  1214. wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName,
  1215. m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
  1216. if (state == 1)
  1217. {
  1218. //拉直操作
  1219. Straightening(angle, 65, 65, x1, y1, ref x2, ref y2);
  1220. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1221. if (!iSEM.MoveStageXY(x2, y2))
  1222. {
  1223. arg.State = false;
  1224. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1225. SendMsg("1-20");
  1226. return false;
  1227. }
  1228. //判断是否移动完成
  1229. while (true)
  1230. {
  1231. Thread.Sleep(5000);
  1232. if (iSEM.GetStageIs() == 0)
  1233. {
  1234. break;
  1235. }
  1236. }
  1237. arg.State = true;
  1238. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1239. SendMsg("1-20");
  1240. }
  1241. else
  1242. {
  1243. arg.Message = "样品台移动失败";
  1244. arg.State = false;
  1245. SendMsg("1-20");
  1246. return false;
  1247. }
  1248. }
  1249. //判断是否停止进程
  1250. if (key_stop)
  1251. {
  1252. return false;
  1253. }
  1254. //6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1255. x0 = iSEM.GetStageAtX();
  1256. y0 = iSEM.GetStageAtY();
  1257. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1258. {
  1259. arg.Message = "位置校验失败";
  1260. arg.State = false;
  1261. SendMsg("1-21");
  1262. return false;
  1263. }
  1264. arg.State = true;
  1265. arg.Message = "位置校验成功";
  1266. SendMsg("1-21");
  1267. //判断是否停止进程
  1268. if (key_stop)
  1269. {
  1270. return false;
  1271. }
  1272. return true;
  1273. }
  1274. /// <summary>
  1275. /// 17.自动控制SEM拍截面照
  1276. /// </summary>
  1277. /// <returns></returns>
  1278. public bool ShotSection(ref String image18)
  1279. {
  1280. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1281. int state = 0;
  1282. //1、放大6000倍,放大倍数参数photograph_
  1283. if (!iSEM.SetSEMVoltage(m_MsParam.Photograph_Voltage))
  1284. {
  1285. arg.Message = "电压设置" + m_MsParam.Photograph_Voltage.ToString("0.0") + "失败";
  1286. arg.State = false;
  1287. SendMsg("1-22");
  1288. return false;
  1289. }
  1290. if (!iSEM.SetMagnification(m_MsParam.Photograph_Magnification))
  1291. {
  1292. arg.Message = "放大倍数调整失败";
  1293. arg.State = false;
  1294. SendMsg("1-22");
  1295. return false;
  1296. }
  1297. arg.Message = "放大倍数调整成功";
  1298. arg.State = true;
  1299. SendMsg("1-22");
  1300. //判断是否停止进程
  1301. if (key_stop)
  1302. {
  1303. return false;
  1304. }
  1305. //2.控制SEM自动对焦、亮度、对比度-接口
  1306. if (ImageFocus("1-23"))
  1307. {
  1308. arg.Message = "自动对焦完成";
  1309. arg.State = true;
  1310. SendMsg("1-23");
  1311. }
  1312. else
  1313. {
  1314. arg.Message = "自动对焦失败";
  1315. arg.State = false;
  1316. SendMsg("1-23");
  1317. }
  1318. //判断是否停止进程
  1319. if (key_stop)
  1320. {
  1321. return false;
  1322. }
  1323. //3、设置SEM补偿角度
  1324. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1325. {
  1326. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1327. arg.State = false;
  1328. SendMsg("1-24");
  1329. return false;
  1330. }
  1331. arg.State = true;
  1332. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1333. SendMsg("1-24");
  1334. Thread.Sleep(5000);
  1335. //判断是否停止进程
  1336. if (key_stop)
  1337. {
  1338. return false;
  1339. }
  1340. //4、拍照,5、保存照片
  1341. String fileName5 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
  1342. arg.Picture_Information.Picture_FullPath = fileName5;
  1343. arg.Picture_Information.Work_Status = "SEM";
  1344. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1345. Thread.Sleep(1000);
  1346. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1347. Thread.Sleep(1000);
  1348. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1349. Thread.Sleep(1000);
  1350. if (!GetImage(ImageMode.SEM, fileName5))
  1351. {
  1352. arg.Message = "SEM拍照失败";
  1353. arg.State = false;
  1354. SendMsg("1-25");
  1355. return false;
  1356. }
  1357. arg.State = true;
  1358. arg.Message = "SEM拍照成功";
  1359. SendMsg("1-25");
  1360. Thread.Sleep(3000);
  1361. //判断是否停止进程
  1362. if (key_stop)
  1363. {
  1364. return false;
  1365. }
  1366. //6、获取偏移坐标,7、移动到位
  1367. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1368. {
  1369. arg.Message = "样品台移动到指定位置";
  1370. arg.State = true;
  1371. SendMsg("1-26");
  1372. }
  1373. else
  1374. {
  1375. //8,图像T形
  1376. wr.Img_Trapezoid_Top_Center_Position(fileName5, out x1, out y1, out state);
  1377. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1378. if (state == 1)
  1379. {
  1380. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1381. if (!iSEM.MoveStageXY(x1, y1))
  1382. {
  1383. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1384. arg.State = false;
  1385. SendMsg("1-26");
  1386. return false;
  1387. }
  1388. //判断是否移动完成
  1389. while (true)
  1390. {
  1391. Thread.Sleep(5000);
  1392. if (iSEM.GetStageIs() == 0)
  1393. {
  1394. break;
  1395. }
  1396. }
  1397. arg.State = true;
  1398. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1399. SendMsg("1-26");
  1400. }
  1401. else
  1402. {
  1403. arg.Message = "样品台移动失败";
  1404. arg.State = false;
  1405. SendMsg("1-26");
  1406. return false;
  1407. }
  1408. }
  1409. //判断是否停止进程
  1410. if (key_stop)
  1411. {
  1412. return false;
  1413. }
  1414. //8、验证移动准确性
  1415. x0 = iSEM.GetStageAtX();
  1416. y0 = iSEM.GetStageAtY();
  1417. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1418. {
  1419. arg.Message = "位置校验失败";
  1420. arg.State = false;
  1421. SendMsg("1-27");
  1422. return false;
  1423. }
  1424. arg.State = true;
  1425. arg.Message = "位置校验成功";
  1426. SendMsg("1-27");
  1427. //判断是否停止进程
  1428. if (key_stop)
  1429. {
  1430. return false;
  1431. }
  1432. //9、-10不操作
  1433. //11、自动对焦。与之前操作相同
  1434. if (ImageFocus("1-28"))
  1435. {
  1436. arg.Message = "自动对焦完成";
  1437. arg.State = true;
  1438. SendMsg("1-28");
  1439. }
  1440. else
  1441. {
  1442. arg.Message = "自动对焦失败";
  1443. arg.State = false;
  1444. SendMsg("1-28");
  1445. }
  1446. //判断是否停止进程
  1447. if (key_stop)
  1448. {
  1449. return false;
  1450. }
  1451. //12拍照
  1452. String fileName6 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1453. arg.Picture_Information.Picture_FullPath = fileName6;
  1454. arg.Picture_Information.Work_Status = "SEM";
  1455. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1456. Thread.Sleep(1000);
  1457. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1458. Thread.Sleep(1000);
  1459. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1460. Thread.Sleep(1000);
  1461. if (!GetImage(ImageMode.SEM, fileName6))
  1462. {
  1463. arg.Message = "SEM拍照失败";
  1464. arg.State = false;
  1465. SendMsg("1-29");
  1466. return false;
  1467. }
  1468. Thread.Sleep(3000);
  1469. arg.State = true;
  1470. image18 = fileName6;
  1471. arg.Message = "SEM拍照成功";
  1472. SendMsg("1-29");
  1473. //判断是否停止进程
  1474. if (key_stop)
  1475. {
  1476. return false;
  1477. }
  1478. //14光束复位
  1479. iSEM.SetBeamShiftX(0);
  1480. iSEM.SetBeamShiftY(0);
  1481. Thread.Sleep(3000);
  1482. arg.Message = "光束复位成功";
  1483. arg.State = true;
  1484. SendMsg("1-30");
  1485. //判断是否停止进程
  1486. if (key_stop)
  1487. {
  1488. return false;
  1489. }
  1490. return true;
  1491. }
  1492. //第一个孔的测试过程
  1493. public bool FirstHole()
  1494. {
  1495. MeasureData.CutHole firstHole = m_cutHoles[0];
  1496. //首先默认为SEM模式
  1497. arg.Picture_Information.Work_Status = "SEM";
  1498. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1499. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1500. {
  1501. if (!InsertPT())
  1502. {
  1503. arg.Message = "插入PT针失败";
  1504. arg.State = false;
  1505. SendMsg("1-0");
  1506. return false;
  1507. }
  1508. arg.State = true;
  1509. arg.Message = "插入PT针成功";
  1510. SendMsg("1-0");
  1511. }
  1512. //判断是否停止进程
  1513. if (key_stop)
  1514. {
  1515. return false;
  1516. }
  1517. //13. 自动 定位功能
  1518. if (!GetPoistion(true))
  1519. {
  1520. return false;
  1521. }
  1522. //判断是否停止进程
  1523. if (key_stop)
  1524. {
  1525. return false;
  1526. }
  1527. //14.自动控制FIB切割
  1528. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1529. {
  1530. if (!FIBCross())
  1531. {
  1532. return false;
  1533. }
  1534. }
  1535. //判断是否停止进程
  1536. if (key_stop)
  1537. {
  1538. return false;
  1539. }
  1540. //15.根据样品类型决定是否撤出PT针
  1541. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1542. {
  1543. if (!RetractPT())
  1544. {
  1545. arg.Message = "撤出PT针失败";
  1546. arg.State = false;
  1547. SendMsg("1-15");
  1548. return false;
  1549. }
  1550. arg.State = true;
  1551. arg.Message = "撤出PT针成功";
  1552. SendMsg("1-15");
  1553. }
  1554. //判断是否停止进程
  1555. if (key_stop)
  1556. {
  1557. return false;
  1558. }
  1559. // 16.找到切割位置
  1560. if (m_MsParam.Is_Photograph == false)
  1561. {
  1562. if (!FindCross())
  1563. {
  1564. return false;
  1565. }
  1566. //判断是否停止进程
  1567. if (key_stop)
  1568. {
  1569. return false;
  1570. }
  1571. }
  1572. //将过程17最后的拍照图片提出给18步进行调用
  1573. String img18 = "";
  1574. //17.自动控制SEM拍截面照
  1575. if (!ShotSection(ref img18))
  1576. {
  1577. return false;
  1578. }
  1579. //判断是否停止进程
  1580. if (key_stop)
  1581. {
  1582. return false;
  1583. }
  1584. //18.自动层高分析
  1585. if (m_MsParam.Is_Photograph == false)
  1586. {
  1587. float size = iSEM.GetPixelSize();
  1588. float mag = iSEM.GetMagnification();
  1589. int state = 0;
  1590. wr.Img_Measure_Size(img18, mag, size, out state);
  1591. if (state == 0)
  1592. {
  1593. arg.Message = "测量尺寸失败";
  1594. arg.State = false;
  1595. SendMsg("1-31");
  1596. return false;
  1597. }
  1598. arg.State = true;
  1599. arg.Message = "测量尺寸成功";
  1600. SendMsg("1-31");
  1601. }
  1602. #region 测试程序
  1603. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  1604. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  1605. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1606. //{
  1607. // SendMsg("拍摄照片完成");
  1608. // //return true;
  1609. //}
  1610. //else
  1611. //{
  1612. // SendMsg("拍摄照片失败");
  1613. // return false;
  1614. //}
  1615. //SendMsg("图像校正36度");
  1616. ////3.设置SEM角度补偿cos36度
  1617. //if (!TiltCorrection(36))
  1618. //{
  1619. // return false;
  1620. //}
  1621. //Thread.Sleep(3000);
  1622. //string fn;
  1623. //用宏抓一般图
  1624. //Thread.Sleep(5000);
  1625. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1626. //SendMsg("用宏抓一般图" + fn);
  1627. //iSEM.CMDMCFFilename(fn);
  1628. ////延时1s??
  1629. //Thread.Sleep(5000);
  1630. ////用宏抓好图
  1631. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1632. //SendMsg("用宏抓好图" + fn);
  1633. //iSEM.CMDMCFFilename(fn);
  1634. ////延时1s??
  1635. //Thread.Sleep(30000);
  1636. //Thread.Sleep(10000);
  1637. //WorkingFolder = m_measureFile.FilePath;
  1638. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1639. //SendMsg("SEM拍照存储到" + fileName6);
  1640. //if (!GetImage(ImageMode.SEM, fileName6))
  1641. //{
  1642. // SendMsg("SEM拍照失败");
  1643. // return false;
  1644. //}
  1645. ////用宏抓标志图
  1646. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1647. //SendMsg("用宏抓标志图" + fn);
  1648. //iSEM.CMDMCFFilename(fn);
  1649. ////延时1s??
  1650. //Thread.Sleep(30000);
  1651. //Thread.Sleep(5000);
  1652. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1653. //SendMsg("用宏抓一般图" + fn);
  1654. //iSEM.CMDMCFFilename(fn);
  1655. ////延时1s??
  1656. //Thread.Sleep(5000);
  1657. //SendMsg("所有图结束");
  1658. ////17.自动控制SEM拍截面照
  1659. //{
  1660. // //1.控制SEM放大到指定参数大小范围,6000x
  1661. // if (!iSEM.SetMagnification(6000))
  1662. // {
  1663. // return false;
  1664. // }
  1665. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1666. // if (!MeasParam.FocusMode)
  1667. // {
  1668. // //弹出手动对焦的窗口
  1669. // }
  1670. // else
  1671. // {
  1672. // //调用自动对焦模块
  1673. // }
  1674. // //3.设置SEM角度补偿cos36度
  1675. // if (!TiltCorrection(36))
  1676. // {
  1677. // return false;
  1678. // }
  1679. // //4.控制SEM拍照
  1680. // //5.保存照片4
  1681. // String fileName5 = WorkingFolder + ImageName5;
  1682. // if (!GetImage(ImageMode.SEM, fileName5))
  1683. // {
  1684. // return false;
  1685. // }
  1686. // //6.将照片传给客户,获取偏移坐标
  1687. // float x6 = 0, y6 = 0;
  1688. // float angle1 = 0;
  1689. // float mage = 10000;
  1690. // //7.根据坐标控制SEM移动到分析位置
  1691. // if (!iSEM.MoveStageXY(x6, y6))
  1692. // {
  1693. // return false;
  1694. // }
  1695. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1696. // float x7 = iSEM.GetStageAtX();
  1697. // float y7 = iSEM.GetStageAtY();
  1698. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1699. // {
  1700. // return false;
  1701. // }
  1702. // //9.控制SEM平行校正,并记录校正前初始值
  1703. // float foldAnagle = iSEM.GetScanRotation();
  1704. // if (foldAnagle == float.NaN)
  1705. // {
  1706. // return false;
  1707. // }
  1708. // if (!iSEM.SetScanRotation(angle1))
  1709. // {
  1710. // return false;
  1711. // }
  1712. // //10.控制SEM放大到指定参数大小范围
  1713. // if (!iSEM.SetMagnification(mage))
  1714. // {
  1715. // return false;
  1716. // }
  1717. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1718. // if (!MeasParam.FocusMode)
  1719. // {
  1720. // //弹出手动对焦的窗口
  1721. // }
  1722. // else
  1723. // {
  1724. // //调用自动对焦模块
  1725. // }
  1726. // //12.控制SEM对分析位置拍照
  1727. // String fileName6 = WorkingFolder + ImageName6;
  1728. // if (!GetImage(ImageMode.SEM, fileName6))
  1729. // {
  1730. // return false;
  1731. // }
  1732. // //13.保存照片
  1733. // //14.控制SEM取消电子束校正,回到初始值
  1734. // if (!iSEM.SetScanRotation(foldAnagle))
  1735. // {
  1736. // return false;
  1737. // }
  1738. //}
  1739. ////18.自动层高分析
  1740. //{
  1741. // //1.获取SEM Pixel Size给客户传入参数
  1742. // if (iSEM.GetPixelSize() == float.NaN)
  1743. // {
  1744. // return false;
  1745. // }
  1746. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1747. //}
  1748. ////19.自动能谱分析
  1749. //{
  1750. // //1. 确定能谱位置
  1751. // //2. 控制牛津打能谱
  1752. // //3. 能谱分析——面扫+线扫描
  1753. //}
  1754. #endregion
  1755. return true;
  1756. }
  1757. //非第一个孔的测试过程
  1758. public bool CommonWork()
  1759. {
  1760. //首先默认为SEM模式
  1761. arg.Picture_Information.Work_Status = "SEM";
  1762. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1763. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1764. {
  1765. if (!InsertPT())
  1766. {
  1767. arg.Message = "插入PT针失败";
  1768. SendMsg("1-0");
  1769. return false;
  1770. }
  1771. arg.Message = "插入PT针成功";
  1772. SendMsg("1-0");
  1773. }
  1774. //判断是否停止进程
  1775. if (key_stop)
  1776. {
  1777. return false;
  1778. }
  1779. //13. 自动 定位功能
  1780. if (!GetPoistion(false))
  1781. {
  1782. return false;
  1783. }
  1784. //判断是否停止进程
  1785. if (key_stop)
  1786. {
  1787. return false;
  1788. }
  1789. //14.自动控制FIB切割
  1790. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1791. {
  1792. if (!FIBCross())
  1793. {
  1794. return false;
  1795. }
  1796. }
  1797. //判断是否停止进程
  1798. if (key_stop)
  1799. {
  1800. return false;
  1801. }
  1802. //15.根据样品类型决定是否撤出PT针
  1803. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1804. {
  1805. if (!RetractPT())
  1806. {
  1807. arg.Message = "撤出PT针失败";
  1808. SendMsg("1-15");
  1809. return false;
  1810. }
  1811. arg.Message = "撤出PT针成功";
  1812. SendMsg("1-15");
  1813. }
  1814. //判断是否停止进程
  1815. if (key_stop)
  1816. {
  1817. return false;
  1818. }
  1819. // 16.找到切割位置
  1820. if (m_MsParam.Is_Photograph == false)
  1821. {
  1822. if (!FindCross())
  1823. {
  1824. return false;
  1825. }
  1826. //判断是否停止进程
  1827. if (key_stop)
  1828. {
  1829. return false;
  1830. }
  1831. }
  1832. //将过程17最后的拍照图片提出给18步进行调用
  1833. String img18 = "";
  1834. //17.自动控制SEM拍截面照
  1835. if (!ShotSection(ref img18))
  1836. {
  1837. return false;
  1838. }
  1839. //判断是否停止进程
  1840. if (key_stop)
  1841. {
  1842. return false;
  1843. }
  1844. //18.自动层高分析
  1845. if (m_MsParam.Is_Photograph == false)
  1846. {
  1847. float size = iSEM.GetPixelSize();
  1848. float mag = iSEM.GetMagnification();
  1849. int state = 0;
  1850. wr.Img_Measure_Size(img18, mag, size, out state);
  1851. if (state == 0)
  1852. {
  1853. arg.Message = "测量尺寸失败";
  1854. SendMsg("1-31");
  1855. return false;
  1856. }
  1857. arg.Message = "测量尺寸成功";
  1858. SendMsg("1-31");
  1859. }
  1860. #region 测试程序
  1861. //string fn;
  1862. //用宏抓一般图
  1863. //Thread.Sleep(5000);
  1864. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1865. //SendMsg("用宏抓一般图" + fn);
  1866. //iSEM.CMDMCFFilename(fn);
  1867. ////延时1s??
  1868. //Thread.Sleep(5000);
  1869. ////用宏抓好图
  1870. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1871. //SendMsg("用宏抓好图" + fn);
  1872. //iSEM.CMDMCFFilename(fn);
  1873. ////延时1s??
  1874. //Thread.Sleep(30000);
  1875. //Thread.Sleep(10000);
  1876. //WorkingFolder = m_measureFile.FilePath;
  1877. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1878. //SendMsg("SEM拍照存储到" + fileName6);
  1879. //if (!GetImage(ImageMode.SEM, fileName6))
  1880. //{
  1881. // SendMsg("SEM拍照失败");
  1882. // return false;
  1883. //}
  1884. ////用宏抓标志图
  1885. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1886. //SendMsg("用宏抓标志图" + fn);
  1887. //iSEM.CMDMCFFilename(fn);
  1888. ////延时1s??
  1889. //Thread.Sleep(30000);
  1890. ////恢复简单抓图
  1891. //Thread.Sleep(5000);
  1892. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1893. //SendMsg("用宏抓一般图" + fn);
  1894. //iSEM.CMDMCFFilename(fn);
  1895. //SendMsg("所有图结束");
  1896. #endregion
  1897. return true;
  1898. }
  1899. //测试完第一个孔后的样品台初始化操作。
  1900. //再调用CommonWork执行非第一个孔的测试过程
  1901. public bool OtherHole()
  1902. {
  1903. //SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1904. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1905. #region 1. 初始化
  1906. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1907. //读取图像冻结状态
  1908. float ffrozen = iSEM.GetImageFrozen();
  1909. if (ffrozen == float.NaN)
  1910. {
  1911. return false;
  1912. }
  1913. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1914. {
  1915. //SendMsg("样品台恢复到水平");
  1916. //return true;
  1917. }
  1918. else
  1919. {
  1920. //SendMsg("禁止样品台恢复到水平");
  1921. return false;
  1922. }
  1923. //2. 调节样品1号孔的样品台6轴坐标
  1924. //3. 将样品1号孔坐标2存入数据库
  1925. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1926. if (!iSEM.SetStageGotoT(0))
  1927. {
  1928. return false;
  1929. }
  1930. while (true)
  1931. {
  1932. Thread.Sleep(10000);
  1933. if (iSEM.GetStageIs() == 0)
  1934. {
  1935. break;
  1936. }
  1937. }
  1938. //5. 获取光镜2号孔XY坐标
  1939. //SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1940. //6. 根据光镜坐标控制样品台移动
  1941. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1942. {
  1943. //SendMsg("移动失败");
  1944. return false;
  1945. }
  1946. while (true)
  1947. {
  1948. Thread.Sleep(10000);
  1949. if (iSEM.GetStageIs() == 0)
  1950. {
  1951. break;
  1952. }
  1953. }
  1954. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1955. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1956. {
  1957. //SendMsg("样品台旋转");
  1958. //return true;
  1959. }
  1960. else
  1961. {
  1962. //SendMsg("禁止样品台旋转");
  1963. return false;
  1964. }
  1965. if (!iSEM.SetStageGotoT(54))
  1966. {
  1967. return false;
  1968. }
  1969. while (true)
  1970. {
  1971. Thread.Sleep(10000);
  1972. if (iSEM.GetStageIs() == 0)
  1973. {
  1974. break;
  1975. }
  1976. }
  1977. //SendMsg("拉直操作");
  1978. #endregion
  1979. //其他操作与第一个孔相同
  1980. if (!CommonWork())
  1981. {
  1982. return false;
  1983. }
  1984. //2. 定位切割
  1985. {
  1986. //1. 拉直操作
  1987. {
  1988. //1.1 控制SEM进行拍照
  1989. //1.2 图片传给客户,返回偏移角度
  1990. //1.3 根据返回角度,控制样品台转动
  1991. }
  1992. //2. 与1号孔13步相同
  1993. }
  1994. return true;
  1995. }
  1996. //角度补偿
  1997. public bool TiltCorrection(float a_fAngle)
  1998. {
  1999. //记录原来电镜的状态
  2000. // bool bTilt = false;
  2001. //float fOldTilt = iSEM.GetTiltCorrection();
  2002. //if (fOldTilt == float.NaN)
  2003. //{
  2004. // return false;
  2005. //}
  2006. //else if (fOldTilt == 1)
  2007. //{
  2008. // bTilt = true;
  2009. //}
  2010. //else if (fOldTilt == 0)
  2011. //{
  2012. // bTilt = false;
  2013. //}
  2014. //float fOldAngle = iSEM.GetTiltAngle();
  2015. //if (fOldAngle == float.NaN)
  2016. //{
  2017. // return false;
  2018. //}
  2019. //开启校正
  2020. //SendMsg("开启校正");
  2021. if (!iSEM.SetTiltAngleOn())
  2022. {
  2023. return false;
  2024. }
  2025. //设置校正角度
  2026. //if (!iSEM.SetTiltAngle(fOldAngle))
  2027. //{
  2028. // return false;
  2029. //}
  2030. //恢复原始状态
  2031. //SendMsg("校正角度"+ a_fAngle.ToString());
  2032. if (!iSEM.SetTiltAngle(a_fAngle))
  2033. {
  2034. return false;
  2035. }
  2036. //if (bTilt)
  2037. //{
  2038. // if (!iSEM.SetTiltCorrectionOn())
  2039. // {
  2040. // return false;
  2041. // }
  2042. //}
  2043. //else
  2044. //{
  2045. // if (!iSEM.SetTiltCorrectionOff())
  2046. // {
  2047. // return false;
  2048. // }
  2049. //}
  2050. return true;
  2051. }
  2052. //拍图
  2053. public bool GetImage(ImageMode a_mode, String a_fileName)
  2054. {
  2055. //1. 图像解冻
  2056. float foldFrozen = iSEM.GetImageFrozen();
  2057. if (foldFrozen == float.NaN)
  2058. {
  2059. return false;
  2060. }
  2061. if (!iSEM.ImageLive())
  2062. {
  2063. return false;
  2064. }
  2065. //2. 确认图像模式
  2066. if (ImageMode.SEM == a_mode)
  2067. {
  2068. if (!iSEM.CmdFIBModeSEM())
  2069. {
  2070. return false;
  2071. }
  2072. }
  2073. else if (ImageMode.FIB == a_mode)
  2074. {
  2075. if (!iSEM.CmdFIBModeFIB())
  2076. {
  2077. return false;
  2078. }
  2079. }
  2080. else
  2081. {
  2082. return false;
  2083. }
  2084. //3. 获取分辨率
  2085. int[] ImageSize = iSEM.GetImageStore();
  2086. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2087. {
  2088. return false;
  2089. }
  2090. short width = (short)ImageSize[0];
  2091. short height = (short)ImageSize[1];
  2092. //4. 抓图
  2093. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  2094. {
  2095. return false;
  2096. }
  2097. //5. 恢复初始状态
  2098. if (foldFrozen == 0)
  2099. {
  2100. if (!iSEM.ImageLive())
  2101. {
  2102. return false;
  2103. }
  2104. }
  2105. else if (foldFrozen == 1)
  2106. {
  2107. if (!iSEM.ImageFrozen())
  2108. {
  2109. return false;
  2110. }
  2111. }
  2112. return true;
  2113. }
  2114. //自动聚焦
  2115. public bool AutoFocus(FocusParam a_param, out int a_nWd, String step_code)
  2116. {
  2117. a_nWd = 0;
  2118. float wd = iSEM.GetWorkingDistance();
  2119. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  2120. if (a_param == null)
  2121. {
  2122. return false;
  2123. }
  2124. string path = a_param.Path;
  2125. if (!Directory.Exists(path))
  2126. {
  2127. return false;
  2128. }
  2129. string path_coarse = a_param.Path + "\\Coarse";
  2130. if (!Directory.Exists(path_coarse))
  2131. {
  2132. Directory.CreateDirectory(path_coarse);
  2133. }
  2134. string path_fine = a_param.Path + "\\Fine";
  2135. if (!Directory.Exists(path_fine))
  2136. {
  2137. Directory.CreateDirectory(path_fine);
  2138. }
  2139. //1. 拍照
  2140. //1.1, 粗拍照
  2141. //1.1.1, 根据参数计算拍照次数
  2142. double nUp = a_param.UP * 100.0 ;
  2143. double nDown = a_param.Down * 100.0;
  2144. double nStep = a_param.Step * 100.0;
  2145. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  2146. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  2147. //粗拍照
  2148. for (int i = 0; i < nTimes; i++)
  2149. {
  2150. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  2151. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2152. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  2153. Thread.Sleep(8000);
  2154. int swd = cWd / 100;
  2155. //SendMsg("wd = " + swd.ToString() +"um");
  2156. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  2157. arg.Picture_Information.Picture_FullPath = fileName;
  2158. if (!GetImage(ImageMode.SEM, fileName))
  2159. {
  2160. return false;
  2161. }
  2162. SendMsg(step_code);
  2163. }
  2164. //1.2, 选定细拍照的工作距离
  2165. int CorWd;
  2166. ChooseBest(path_coarse,out CorWd);
  2167. a_nWd = CorWd;
  2168. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  2169. //1.3, 细拍照
  2170. if ( (CorWd - a_param.Range * 100.0) <=0)
  2171. {
  2172. return false;
  2173. }
  2174. double nfUp = CorWd - a_param.Range * 100.0;
  2175. double nfStep = a_param.fStep * 100.0;
  2176. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  2177. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  2178. for (int i = 0; i < nfTimes; i++)
  2179. {
  2180. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  2181. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2182. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  2183. Thread.Sleep(8000);
  2184. int swd = cWd / 100;
  2185. //SendMsg("wd = " + swd.ToString() + "um");
  2186. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  2187. arg.Picture_Information.Picture_FullPath = fileName;
  2188. if (!GetImage(ImageMode.SEM, fileName))
  2189. {
  2190. return false;
  2191. }
  2192. SendMsg(step_code);
  2193. }
  2194. int fineWd;
  2195. ChooseBest(path_fine, out fineWd);
  2196. //SendMsg("wd fine max = " + fineWd.ToString());
  2197. a_nWd = fineWd;
  2198. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  2199. return true;
  2200. }
  2201. //LoG算子计算
  2202. private double LoGMean(string a_strImgPath)
  2203. {
  2204. //读入Img文件
  2205. if (!File.Exists(a_strImgPath))
  2206. {
  2207. return 0;
  2208. }
  2209. Mat src, gray_src;
  2210. int kernel_size = 3;
  2211. src = Cv2.ImRead(a_strImgPath);
  2212. gray_src = new Mat();
  2213. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2214. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2215. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2216. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2217. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  2218. Cv2.ConvertScaleAbs(src, src);
  2219. //图像的平均灰度
  2220. double meanValue = 0.0;
  2221. meanValue = Cv2.Mean(src)[0];
  2222. return meanValue;
  2223. }
  2224. //梯度计算
  2225. private double Tenengrad(string a_strImgPath)
  2226. {
  2227. //读入Img文件
  2228. if (!File.Exists(a_strImgPath))
  2229. {
  2230. return 0;
  2231. }
  2232. Mat src;
  2233. src = Cv2.ImRead(a_strImgPath);
  2234. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2235. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2236. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2237. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2238. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  2239. //图像的平均灰度
  2240. double meanValue = 0.0;
  2241. meanValue = Cv2.Mean(src)[0];
  2242. return meanValue;
  2243. }
  2244. //梯度计算
  2245. private double TTgrad(string a_strImgPath)
  2246. {
  2247. //读入Img文件
  2248. if (!File.Exists(a_strImgPath))
  2249. {
  2250. return 0;
  2251. }
  2252. Mat src;
  2253. src = Cv2.ImRead(a_strImgPath);
  2254. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2255. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2256. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2257. Mat scalex = new Mat();
  2258. Mat scaley = new Mat();
  2259. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  2260. Cv2.ConvertScaleAbs(src, scalex);
  2261. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  2262. Cv2.ConvertScaleAbs(src, scaley);
  2263. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  2264. //图像的平均灰度
  2265. double meanValue = 0.0;
  2266. meanValue = Cv2.Mean(src)[0];
  2267. return meanValue;
  2268. }
  2269. //三选二算法
  2270. private void ChooseBest(string a_strImgPath, out int a_nWd)
  2271. {
  2272. a_nWd = -1;
  2273. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  2274. float[] values = new float[files.Length];
  2275. double smax1 = LoGMean(files[0]);
  2276. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  2277. double smax2 = Tenengrad(files[0]);
  2278. int wdmax2 = wdmax1;
  2279. double smax3 = TTgrad(files[0]);
  2280. int wdmax3 = wdmax1;
  2281. int x = 0;
  2282. foreach (var file in files)
  2283. {
  2284. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  2285. double svalue1 = LoGMean(file);
  2286. double svalue2 = Tenengrad(file);
  2287. double svalue3 = TTgrad(file);
  2288. if (smax1 < svalue1)
  2289. {
  2290. smax1 = svalue1;
  2291. wdmax1 = wd;
  2292. }
  2293. if (smax2 < svalue2)
  2294. {
  2295. smax2 = svalue2;
  2296. wdmax2 = wd;
  2297. }
  2298. if (smax3 < svalue3)
  2299. {
  2300. smax3 = svalue3;
  2301. wdmax3 = wd;
  2302. }
  2303. x++;
  2304. }
  2305. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  2306. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  2307. {
  2308. a_nWd = wdmax1;
  2309. //SendMsg("焦距 = " + wdmax1.ToString());
  2310. }
  2311. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  2312. {
  2313. a_nWd = wdmax2;
  2314. //SendMsg("焦距 = " + wdmax2.ToString());
  2315. }
  2316. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  2317. {
  2318. a_nWd = wdmax3;
  2319. //SendMsg("焦距 = " + wdmax3.ToString());
  2320. }
  2321. else
  2322. {
  2323. //SendMsg("对焦失败。");
  2324. }
  2325. }
  2326. }
  2327. }