Measure.cs 51 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. public class ThreadStatusEventArgs
  26. {
  27. //状态
  28. public string State
  29. {
  30. get { return m_state; }
  31. set { m_state = value; }
  32. }
  33. private string m_state;
  34. //时间
  35. public DateTime Time
  36. {
  37. get { return m_time; }
  38. set { m_time = value; }
  39. }
  40. private DateTime m_time;
  41. //步骤代码
  42. public String Step_Code
  43. {
  44. get { return step_Code; }
  45. set { step_Code = value; }
  46. }
  47. private String step_Code;
  48. //其他消息
  49. public String Message
  50. {
  51. get { return this.message; }
  52. set { this.message = value; }
  53. }
  54. private String message;
  55. //孔名
  56. public String HoleName
  57. {
  58. get { return this.holeName; }
  59. set { this.holeName = value; }
  60. }
  61. private String holeName;
  62. //图片信息
  63. public class PictureInformation
  64. {
  65. public String Picture_FullPath
  66. {
  67. get { return picture_FullPath; }
  68. set { picture_FullPath = value; }
  69. }
  70. private String picture_FullPath;
  71. public double Work_Voltage
  72. {
  73. get { return work_Voltage; }
  74. set { work_Voltage = value; }
  75. }
  76. private double work_Voltage;
  77. public double Magnification
  78. {
  79. get { return magnification; }
  80. set { magnification = value; }
  81. }
  82. private double magnification;
  83. public double Work_Distance
  84. {
  85. get { return work_Distance; }
  86. set { work_Distance = value; }
  87. }
  88. private double work_Distance;
  89. public String Work_Status
  90. {
  91. get { return work_Status; }
  92. set { work_Status = value; }
  93. }
  94. private String work_Status;
  95. }
  96. //图片信息实例类
  97. public PictureInformation Picture_Information
  98. {
  99. get { return picture_Information; }
  100. set { picture_Information = value; }
  101. }
  102. private PictureInformation picture_Information;
  103. //图像信息
  104. public class ImageInformation
  105. {
  106. public int Method_Name
  107. {
  108. get { return method_Name; }
  109. set { method_Name = value; }
  110. }
  111. private int method_Name;
  112. public Source_Img_Degree_Direction SIDD;
  113. public Cut_Position CP;
  114. public Cut_Success CS;
  115. public Trapezoid_Top_Center_Position TTCP;
  116. public Auto_Foucs AF;
  117. public Auto_Stigmatic AS;
  118. public Center_Position_OffsetAngle_Direction CPOD;
  119. public Measure_Size MS;
  120. public ImageInformation()
  121. {
  122. SIDD = new Source_Img_Degree_Direction();
  123. CP = new Cut_Position();
  124. CS = new Cut_Success();
  125. TTCP = new Trapezoid_Top_Center_Position();
  126. AF = new Auto_Foucs();
  127. AS = new Auto_Stigmatic();
  128. CPOD = new Center_Position_OffsetAngle_Direction();
  129. MS = new Measure_Size();
  130. }
  131. //1-计算原始图像偏移角度及方向
  132. public class Source_Img_Degree_Direction
  133. {
  134. public Boolean Is_Image = false;
  135. public double Degree
  136. {
  137. get { return degree; }
  138. set { degree = value; }
  139. }
  140. private double degree;
  141. public int Direction
  142. {
  143. get { return direction; }
  144. set { direction = value; }
  145. }
  146. private int direction;
  147. public int State
  148. {
  149. get { return state; }
  150. set { state = value; }
  151. }
  152. private int state;
  153. }
  154. //2-计算切割点位置
  155. public class Cut_Position
  156. {
  157. public Boolean Is_Image = false;
  158. public double Offsetx
  159. {
  160. get { return offsetx; }
  161. set { offsetx = value; }
  162. }
  163. private double offsetx;
  164. public double Offsety
  165. {
  166. get { return offsety; }
  167. set { offsety = value; }
  168. }
  169. private double offsety;
  170. public int State
  171. {
  172. get { return state; }
  173. set { state = value; }
  174. }
  175. private int state;
  176. }
  177. //3-是否切割成功
  178. public class Cut_Success
  179. {
  180. public Boolean Is_Image = false;
  181. public int State
  182. {
  183. get { return state; }
  184. set { state = value; }
  185. }
  186. private int state;
  187. }
  188. //4-计算切割后图像梯形区域上边中心点坐标
  189. public class Trapezoid_Top_Center_Position
  190. {
  191. public Boolean Is_Image = false;
  192. public double TopCenterX
  193. {
  194. get { return topCenterX; }
  195. set { topCenterX = value; }
  196. }
  197. private double topCenterX;
  198. public double TopCenterY
  199. {
  200. get { return topCenterY; }
  201. set { topCenterY = value; }
  202. }
  203. private double topCenterY;
  204. public int State
  205. {
  206. get { return state; }
  207. set { state = value; }
  208. }
  209. private int state;
  210. }
  211. //5-自动对焦
  212. public class Auto_Foucs
  213. {
  214. public Boolean Is_Image = true;
  215. public String Img_Path
  216. {
  217. get { return img_Path; }
  218. set { img_Path = value; }
  219. }
  220. private String img_Path;
  221. }
  222. //6-自动像闪
  223. public class Auto_Stigmatic
  224. {
  225. public Boolean Is_Image = true;
  226. public String Img_Path
  227. {
  228. get { return img_Path; }
  229. set { img_Path = value; }
  230. }
  231. private String img_Path;
  232. }
  233. //7-计算切割面区域中心坐标,以及偏移角度及方向
  234. public class Center_Position_OffsetAngle_Direction
  235. {
  236. public Boolean Is_Image = false;
  237. public double CenterX
  238. {
  239. get { return centerX; }
  240. set { centerX = value; }
  241. }
  242. private double centerX;
  243. public double CenterY
  244. {
  245. get { return centerY; }
  246. set { centerY = value; }
  247. }
  248. private double centerY;
  249. public double Degree
  250. {
  251. get { return degree; }
  252. set { degree = value; }
  253. }
  254. private double degree;
  255. public int Direction
  256. {
  257. get { return direction; }
  258. set { direction = value; }
  259. }
  260. private int direction;
  261. public int State
  262. {
  263. get { return state; }
  264. set { state = value; }
  265. }
  266. private int state;
  267. }
  268. //8-测量尺寸
  269. public class Measure_Size
  270. {
  271. public Boolean Is_Image = false;
  272. public int State
  273. {
  274. get { return state; }
  275. set { state = value; }
  276. }
  277. private int state;
  278. }
  279. }
  280. //图像信息实例类
  281. public ImageInformation Image_Information
  282. {
  283. get { return image_Information; }
  284. set { image_Information = value; }
  285. }
  286. private ImageInformation image_Information;
  287. public ThreadStatusEventArgs(string a_State)
  288. {
  289. this.m_state = a_State;
  290. picture_Information = new PictureInformation();
  291. image_Information = new ImageInformation();
  292. }
  293. }
  294. public class CutHolesStatusEventArgs
  295. {
  296. public string State
  297. {
  298. get { return m_state; }
  299. set { m_state = value; }
  300. }
  301. private string m_state;
  302. public string HoleName
  303. {
  304. get { return m_holeName; }
  305. set { m_holeName = value; }
  306. }
  307. private string m_holeName;
  308. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  309. {
  310. this.m_state = a_state;
  311. this.m_holeName = a_holeName;
  312. }
  313. }
  314. public class Measure
  315. {
  316. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  317. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  318. //全局只有一个fatorySEM
  319. static FactoryHardware factorySEM = FactoryHardware.Instance;
  320. ISEMControl iSEM = factorySEM.ISEM;
  321. //@的作用是不用转义字符\\只打一个就行
  322. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  323. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  324. const String ImageName3 = @"ImageFIB600X2.tif";
  325. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  326. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  327. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  328. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  329. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  330. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  331. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  332. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  333. const String ElyDeposition = @"Deposition.ely"; //沉积
  334. const String ElyCrossSection = @"CrossSection.ely"; //切割
  335. const float fMin = (float)0.0000002; //单位是米
  336. int m_nWorkHoleNo = -1;
  337. //测量文件
  338. private MeasureFile m_measureFile;
  339. public MeasureFile MeasureFile
  340. {
  341. get { return this.m_measureFile; }
  342. set { this.m_measureFile = value; }
  343. }
  344. //测量的切割孔
  345. private List<MeasureData.CutHole> m_cutHoles;
  346. public List<MeasureData.CutHole> cutHoles
  347. {
  348. get { return this.m_cutHoles; }
  349. set { this.m_cutHoles = value; }
  350. }
  351. //工作文件夹
  352. private string m_WorkingFolder;
  353. public string WorkingFolder
  354. {
  355. get { return this.m_WorkingFolder; }
  356. set { this.m_WorkingFolder = value; }
  357. }
  358. //程序当前路径
  359. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  360. //线程状态
  361. private ThreadStatus m_ThreadStatus;
  362. public ThreadStatus TStatus
  363. {
  364. get { return this.m_ThreadStatus; }
  365. set { this.m_ThreadStatus = value; }
  366. }
  367. //测量参数
  368. private MeasureParam m_MsParam;
  369. public MeasureParam MeasParam
  370. {
  371. get { return this.m_MsParam; }
  372. set { this.m_MsParam = value; }
  373. }
  374. //构造函数
  375. public Measure()
  376. {
  377. Init();
  378. }
  379. private void Init()
  380. {
  381. MeasParam = new MeasureParam();
  382. TStatus = new ThreadStatus();
  383. cutHoles = new List<MeasureData.CutHole>();
  384. }
  385. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  386. public bool InitMeas(MeasureFile a_measureFile)
  387. {
  388. m_measureFile = a_measureFile;
  389. List<CutHole> listHoles = m_measureFile.ListCutHole;
  390. foreach (CutHole h in listHoles)
  391. {
  392. if (h.SWITCH == true)
  393. {
  394. m_cutHoles.Add(h);
  395. }
  396. }
  397. if (m_cutHoles.Count == 0)
  398. return false;
  399. this.m_MsParam = m_measureFile.MParam;
  400. return true;
  401. }
  402. public void SendMsg(string step_code)
  403. {
  404. ThreadStatusEventArgs arg = new ThreadStatusEventArgs(step_code);
  405. arg.Time = DateTime.Now;
  406. switch(step_code)
  407. {
  408. //拍照
  409. case "1-3":
  410. case "1-9":
  411. //电压、放大倍数、工作距离、位置信息、图片路径
  412. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  413. arg.Picture_Information.Work_Status = "SEM";
  414. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  415. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  416. break;
  417. case "1-10":
  418. //获取偏移信息
  419. break;
  420. case "1-12":
  421. //验证移动准备性
  422. break;
  423. default:
  424. arg.Step_Code = "0-0";
  425. arg.Message = step_code;
  426. break;
  427. }
  428. SendThreadStatus(this, arg);
  429. }
  430. public void SendCutHoleMsg(string a_state, string a_holeName)
  431. {
  432. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  433. arg.HoleName = a_holeName;
  434. arg.State = a_state;
  435. SendCutHolesStatus(this, arg);
  436. }
  437. //测量流程
  438. public void DoMeasure()
  439. {
  440. //创建线程的测量状态的更新
  441. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  442. if (SendThreadStatus != null)
  443. {
  444. SendMsg("开始测量。");
  445. }
  446. //检查硬件连接是否正常
  447. if (!ConnectHardware())
  448. {
  449. SendMsg("连接硬件失败。");
  450. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  451. return;
  452. }
  453. SendMsg("硬件连接成功。");
  454. //设置工作文件夹
  455. if (!SetWorkingFolderStr())
  456. {
  457. SendMsg("设置工作文件夹失败");
  458. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  459. return;
  460. }
  461. SendMsg("创建工作文件路径为" + WorkingFolder);
  462. float[] firstPosition;
  463. for (int i = 0; i < m_cutHoles.Count; i++)
  464. {
  465. m_nWorkHoleNo = i;
  466. if (i == 0)
  467. {
  468. SendMsg("第一个切孔开始测量");
  469. //切孔操作-开始
  470. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  471. firstPosition = iSEM.GetStagePosition();
  472. //第一个孔的测试
  473. FirstHole();
  474. //切孔操作-完成
  475. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  476. }
  477. else
  478. {
  479. //非第一个孔的测试
  480. SendMsg("第" + i.ToString() + "个切孔开始测量");
  481. //切孔操作-开始
  482. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  483. OtherHole();
  484. //切孔操作-完成
  485. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  486. }
  487. }
  488. }
  489. //检查硬件连接是否正常
  490. public bool ConnectHardware()
  491. {
  492. //返回硬件的连接状态
  493. return iSEM.ConnectStatus();
  494. }
  495. //设置工作文件夹
  496. public bool SetWorkingFolderStr()
  497. {
  498. WorkingFolder = m_measureFile.FilePath;
  499. return true;
  500. ////获取工作文件路径
  501. //string pathName = m_measureFile.FilePath;
  502. ////判断工作文件路径是否为空或无效
  503. //if (string.IsNullOrEmpty(pathName))
  504. //{
  505. // SendMsg("路径无效");
  506. // return false;
  507. //}
  508. ////文件未保存
  509. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  510. //{
  511. // SendMsg("工程文件未保存");
  512. // return false;
  513. //}
  514. ////获取工作文件所在文件夹
  515. //string folder = System.IO.Path.GetDirectoryName(pathName);
  516. //if (string.IsNullOrEmpty(folder))
  517. //{
  518. // SendMsg("工程文件无效");
  519. // return false;
  520. //}
  521. //WorkingFolder += @"\\";
  522. //LogManager.Init(WorkingFolder);
  523. //return false;
  524. }
  525. //插入PT针
  526. public bool InsertPT()
  527. {
  528. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  529. SendMsg("调用宏插入PT针宏文件" + fn);
  530. iSEM.CMDMCFFilename(fn);
  531. //延时1s??
  532. Thread.Sleep(1000);
  533. return true;
  534. }
  535. //撤出PT针
  536. public bool RetractPT()
  537. {
  538. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  539. SendMsg("调用宏撤出PT针宏文件" + fn);
  540. iSEM.CMDMCFFilename(fn);
  541. //延时1s??
  542. Thread.Sleep(1000);
  543. return true;
  544. }
  545. //PT沉积
  546. public bool PTWork()
  547. {
  548. //执行PT沉积的ELY文件
  549. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  550. SendMsg("执行PT沉积Ely文件:" + fn);
  551. if (!ExcuteEly(fn))
  552. {
  553. return false;
  554. }
  555. //等待沉积完成
  556. while (true)
  557. {
  558. Thread.Sleep(10000);
  559. if (iSEM.GetFIBMode() == 0)
  560. {
  561. break;
  562. }
  563. }
  564. return true;
  565. }
  566. //FIB切割
  567. public bool FIBWork()
  568. {
  569. //执行PT沉积的ELY文件
  570. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  571. SendMsg("执行FIB切割Ely文件:" + fn);
  572. if (!ExcuteEly(fn))
  573. {
  574. return false;
  575. }
  576. //等待切割完成
  577. while (true)
  578. {
  579. Thread.Sleep(10000);
  580. if (iSEM.GetFIBMode() == 0)
  581. {
  582. break;
  583. }
  584. }
  585. return true;
  586. }
  587. public bool ExcuteEly(string a_filename)
  588. {
  589. //执行ELy文件有三个动作
  590. //1. 选择ELY文件
  591. SendMsg("选择ELY文件");
  592. if (!iSEM.CmdFIBLoadELY(a_filename))
  593. {
  594. SendMsg("选择ELY文件失败");
  595. return false;
  596. }
  597. Thread.Sleep(1000);
  598. //2. 确认ELY文件
  599. SendMsg("确认ELY文件");
  600. if (!iSEM.CmdFIBEXPOSUREELY())
  601. {
  602. SendMsg("确认ELY文件失败");
  603. return false;
  604. }
  605. Thread.Sleep(1000);
  606. //3. 执行ELY文件
  607. SendMsg("执行ELY文件");
  608. if (!iSEM.CmdFIBSTARTELY())
  609. {
  610. SendMsg("执行ELY文件失败");
  611. return false;
  612. }
  613. Thread.Sleep(1000);
  614. return true;
  615. }
  616. /// <summary>
  617. ///13. 自动 定位功能
  618. /// </summary>
  619. /// <returns></returns>
  620. public bool GetPoistion()
  621. {
  622. SendMsg("自动定位");
  623. //13.自动定位切割
  624. {
  625. SendMsg("放大600倍");
  626. //1.控制SEM放大600X
  627. if (!iSEM.SetMagnification(600))
  628. {
  629. return false;
  630. }
  631. //2.控制SEM自动对焦、亮度、对比度
  632. // if (!MeasParam.FocusMode)
  633. {
  634. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  635. {
  636. SendMsg("拍摄照片完成");
  637. //return true;
  638. }
  639. else
  640. {
  641. SendMsg("拍摄照片失败");
  642. return false;
  643. }
  644. //弹出手动对焦的窗口
  645. }
  646. //else
  647. //{
  648. // //调用自动对焦模块
  649. //}
  650. //3.设置SEM进行角度补偿54度
  651. SendMsg("设置校正54度");
  652. if (!TiltCorrection(54))
  653. {
  654. SendMsg("设置SEM进行角度补偿54度");
  655. return false;
  656. }
  657. Thread.Sleep(5000);
  658. //4.控制SEM拍照
  659. SendMsg("SEM拍照");
  660. //5.保存照片
  661. {
  662. //1. 创建目录,已经完成
  663. //2. 设置图片名称
  664. //3. 保存图片1
  665. WorkingFolder = m_measureFile.FilePath;
  666. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  667. SendMsg("SEM拍照存储到" + fileName1);
  668. if (!GetImage(ImageMode.SEM, fileName1))
  669. {
  670. SendMsg("SEM拍照失败");
  671. return false;
  672. }
  673. Thread.Sleep(3000);
  674. }
  675. //6.设置FIB拍照参数——扫描时间、束流等
  676. //7.控制FIB自动亮度、对比度
  677. SendMsg("切换FIB控制");
  678. if (!iSEM.CmdFIBModeFIB())
  679. {
  680. SendMsg("FIB模式切换失败");
  681. return false;
  682. }
  683. Thread.Sleep(10000);
  684. //8.控制FIB拍照
  685. //9.保存照片
  686. SendMsg("FIB拍照");
  687. {
  688. //1. 设置图片名称
  689. //2. 保存图片2
  690. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  691. if (!GetImage(ImageMode.FIB, fileName2))
  692. {
  693. SendMsg("FIB拍照失败");
  694. return false;
  695. }
  696. Thread.Sleep(3000);
  697. }
  698. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  699. SendMsg("调用识别位置");
  700. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  701. {
  702. SendMsg("移动已完成");
  703. //return true;
  704. }
  705. else
  706. {
  707. SendMsg("移动已失败");
  708. return false;
  709. }
  710. SendMsg("进行PT沉积");
  711. //11.自动工具样品类型参数确定是否需要PT沉积
  712. {
  713. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  714. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  715. //3. 根据坐标进行PT沉积
  716. if (!PTWork())
  717. {
  718. SendMsg("PT沉积失败");
  719. return false;
  720. }
  721. }
  722. return true;
  723. //模拟为客户返回的坐标值
  724. float x0 = 0, y0 = 0;
  725. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  726. //12.根据梯形坐标控制FIB调整到中心位置
  727. if (!iSEM.MoveStageXY(x0, y0))
  728. {
  729. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  730. return false;
  731. }
  732. //电镜移动是有一个延时的操作的?
  733. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  734. float x1 = iSEM.GetStageAtX();
  735. float y1 = iSEM.GetStageAtY();
  736. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  737. {
  738. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  739. return false;
  740. }
  741. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  742. float[] firstPosition = iSEM.GetStagePosition();
  743. //这里要调用文件保存功能
  744. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  745. + firstPosition[1].ToString() + ","
  746. + firstPosition[2].ToString() + ","
  747. + firstPosition[3].ToString() + ","
  748. + firstPosition[4].ToString() + ","
  749. + firstPosition[5].ToString() + ")");
  750. }
  751. return false;
  752. }
  753. /// <summary>
  754. /// 14. FIB切割
  755. /// </summary>
  756. /// <returns></returns>
  757. public bool FIBCross()
  758. {
  759. //14.自动控制FIB切割
  760. {
  761. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  762. //2.控制FIB进行切割
  763. SendMsg("FIB切割");
  764. if (!FIBWork())
  765. {
  766. SendMsg("FIB切割失败");
  767. return false;
  768. }
  769. Thread.Sleep(5000);
  770. //3.控制FIB拍照600X
  771. //4.保存图片
  772. {
  773. //1.设置图片名称
  774. //2.保存图片3
  775. WorkingFolder = m_measureFile.FilePath;
  776. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  777. SendMsg("SEM拍照存储到" + fileName3);
  778. if (!GetImage(ImageMode.FIB, fileName3))
  779. {
  780. SendMsg("FIB拍照失败");
  781. return false;
  782. }
  783. Thread.Sleep(3000);
  784. }
  785. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  786. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  787. }
  788. return true;
  789. }
  790. /// <summary>
  791. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  792. /// </summary>
  793. /// <returns></returns>
  794. public bool FindCross()
  795. {
  796. //16.自动调整SEM找到切割位置
  797. {
  798. //1.控制SEM放大到300倍
  799. if (!iSEM.SetMagnification(300))
  800. {
  801. return false;
  802. }
  803. //2.控制SEM自动对焦、亮度、对比度-接口
  804. if (!MeasParam.FocusMode)
  805. {
  806. //弹出手动对焦的窗口
  807. }
  808. else
  809. {
  810. //调用自动对焦模块
  811. }
  812. Thread.Sleep(5000);
  813. //3.控制SEM拍照
  814. String fileName4 = WorkingFolder + ImageName4;
  815. if (!GetImage(ImageMode.SEM, fileName4))
  816. {
  817. return false;
  818. }
  819. Thread.Sleep(3000);
  820. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  821. float x4 = 0, y4 = 0;
  822. float angle = 0;
  823. //5.根据坐标控制SEM移动到切孔位置,居中
  824. if (!iSEM.MoveStageXY(x4, y4))
  825. {
  826. return false;
  827. }
  828. if (!iSEM.SetScanRotation(angle))
  829. {
  830. return false;
  831. }
  832. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  833. //float x5 = iSEM.GetStageAtX();
  834. //float y5 = iSEM.GetStageAtY();
  835. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  836. //{
  837. // return false;
  838. //}
  839. }
  840. return true;
  841. }
  842. public bool CommonWork()
  843. {
  844. SendMsg("插入PT针");
  845. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  846. //if (firstHole.PT == true)
  847. {
  848. if (!InsertPT())
  849. {
  850. SendMsg("插入PT针失败");
  851. return false;
  852. }
  853. }
  854. //13. 自动 定位功能
  855. SendMsg("自动定位切割位置");
  856. if (!GetPoistion())
  857. {
  858. SendMsg("自动定位切割位置失败");
  859. return false;
  860. }
  861. //14.自动控制FIB切割
  862. SendMsg("FIB切割");
  863. if (!FIBCross())
  864. {
  865. SendMsg("FIB切割失败");
  866. return false;
  867. }
  868. //{
  869. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  870. // //2.控制FIB进行切割
  871. // //3.控制FIB拍照600X
  872. // //4.保存图片
  873. // {
  874. // //1.设置图片名称
  875. // //2.保存图片3
  876. // String fileName3 = WorkingFolder + ImageName3;
  877. // if (!GetImage(ImageMode.FIB, fileName3))
  878. // {
  879. // return false;
  880. // }
  881. // }
  882. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  883. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  884. //}
  885. //15.根据样品类型决定是否撤出PT针
  886. SendMsg("撤出PT针");
  887. //if (firstHole.PT == false)
  888. //{
  889. if (!RetractPT())
  890. {
  891. SendMsg("撤出PT针失败");
  892. return false;
  893. }
  894. //}
  895. // 16.找到切割位置
  896. SendMsg("找到切割位置");
  897. //17.自动控制SEM拍截面照
  898. SendMsg("观测层高");
  899. SendMsg("切换SEM控制");
  900. if (!iSEM.CmdFIBModeSEM())
  901. {
  902. SendMsg("SEM模式切换失败");
  903. return false;
  904. }
  905. Thread.Sleep(10000);
  906. SendMsg("放大6000倍");
  907. if (!iSEM.SetMagnification(6000))
  908. {
  909. SendMsg("放大倍数调整失败");
  910. return false;
  911. }
  912. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  913. {
  914. SendMsg("拍摄照片完成");
  915. //return true;
  916. }
  917. else
  918. {
  919. SendMsg("拍摄照片失败");
  920. return false;
  921. }
  922. SendMsg("图像校正36度");
  923. //3.设置SEM角度补偿cos36度
  924. if (!TiltCorrection(36))
  925. {
  926. return false;
  927. }
  928. Thread.Sleep(3000);
  929. string fn;
  930. //用宏抓一般图
  931. Thread.Sleep(5000);
  932. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  933. SendMsg("用宏抓一般图" + fn);
  934. iSEM.CMDMCFFilename(fn);
  935. //延时1s??
  936. Thread.Sleep(5000);
  937. //用宏抓好图
  938. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  939. SendMsg("用宏抓好图" + fn);
  940. iSEM.CMDMCFFilename(fn);
  941. //延时1s??
  942. Thread.Sleep(30000);
  943. Thread.Sleep(10000);
  944. WorkingFolder = m_measureFile.FilePath;
  945. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  946. SendMsg("SEM拍照存储到" + fileName6);
  947. if (!GetImage(ImageMode.SEM, fileName6))
  948. {
  949. SendMsg("SEM拍照失败");
  950. return false;
  951. }
  952. //用宏抓标志图
  953. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  954. SendMsg("用宏抓标志图" + fn);
  955. iSEM.CMDMCFFilename(fn);
  956. //延时1s??
  957. Thread.Sleep(30000);
  958. //恢复简单抓图
  959. Thread.Sleep(5000);
  960. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  961. SendMsg("用宏抓一般图" + fn);
  962. iSEM.CMDMCFFilename(fn);
  963. SendMsg("所有图结束");
  964. return true;
  965. }
  966. //第一个孔的测试过程
  967. public bool FirstHole()
  968. {
  969. MeasureData.CutHole firstHole = m_cutHoles[0];
  970. SendMsg("插入PT针");
  971. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  972. //if (firstHole.PT == true)
  973. {
  974. if (!InsertPT())
  975. {
  976. SendMsg("插入PT针失败");
  977. return false;
  978. }
  979. }
  980. //13. 自动 定位功能
  981. SendMsg("自动定位切割位置");
  982. if (!GetPoistion())
  983. {
  984. SendMsg("自动定位切割位置失败");
  985. return false;
  986. }
  987. //14.自动控制FIB切割
  988. SendMsg("FIB切割");
  989. if (!FIBCross())
  990. {
  991. SendMsg("FIB切割失败");
  992. return false;
  993. }
  994. //{
  995. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  996. // //2.控制FIB进行切割
  997. // //3.控制FIB拍照600X
  998. // //4.保存图片
  999. // {
  1000. // //1.设置图片名称
  1001. // //2.保存图片3
  1002. // String fileName3 = WorkingFolder + ImageName3;
  1003. // if (!GetImage(ImageMode.FIB, fileName3))
  1004. // {
  1005. // return false;
  1006. // }
  1007. // }
  1008. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1009. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1010. //}
  1011. //15.根据样品类型决定是否撤出PT针
  1012. SendMsg("撤出PT针");
  1013. //if (firstHole.PT == false)
  1014. //{
  1015. if (!RetractPT())
  1016. {
  1017. SendMsg("撤出PT针失败");
  1018. return false;
  1019. }
  1020. //}
  1021. // 16.找到切割位置
  1022. SendMsg("找到切割位置");
  1023. //17.自动控制SEM拍截面照
  1024. SendMsg("观测层高");
  1025. SendMsg("切换SEM控制");
  1026. if (!iSEM.CmdFIBModeSEM())
  1027. {
  1028. SendMsg("SEM模式切换失败");
  1029. return false;
  1030. }
  1031. Thread.Sleep(10000);
  1032. SendMsg("放大6000倍");
  1033. if (!iSEM.SetMagnification(6000))
  1034. {
  1035. SendMsg("放大倍数调整失败");
  1036. return false;
  1037. }
  1038. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1039. {
  1040. SendMsg("拍摄照片完成");
  1041. //return true;
  1042. }
  1043. else
  1044. {
  1045. SendMsg("拍摄照片失败");
  1046. return false;
  1047. }
  1048. SendMsg("图像校正36度");
  1049. //3.设置SEM角度补偿cos36度
  1050. if (!TiltCorrection(36))
  1051. {
  1052. return false;
  1053. }
  1054. Thread.Sleep(3000);
  1055. string fn;
  1056. //用宏抓一般图
  1057. Thread.Sleep(5000);
  1058. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1059. SendMsg("用宏抓一般图" + fn);
  1060. iSEM.CMDMCFFilename(fn);
  1061. //延时1s??
  1062. Thread.Sleep(5000);
  1063. //用宏抓好图
  1064. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1065. SendMsg("用宏抓好图" + fn);
  1066. iSEM.CMDMCFFilename(fn);
  1067. //延时1s??
  1068. Thread.Sleep(30000);
  1069. Thread.Sleep(10000);
  1070. WorkingFolder = m_measureFile.FilePath;
  1071. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1072. SendMsg("SEM拍照存储到" + fileName6);
  1073. if (!GetImage(ImageMode.SEM, fileName6))
  1074. {
  1075. SendMsg("SEM拍照失败");
  1076. return false;
  1077. }
  1078. //用宏抓标志图
  1079. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1080. SendMsg("用宏抓标志图" + fn);
  1081. iSEM.CMDMCFFilename(fn);
  1082. //延时1s??
  1083. Thread.Sleep(30000);
  1084. Thread.Sleep(5000);
  1085. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1086. SendMsg("用宏抓一般图" + fn);
  1087. iSEM.CMDMCFFilename(fn);
  1088. //延时1s??
  1089. Thread.Sleep(5000);
  1090. SendMsg("所有图结束");
  1091. ////17.自动控制SEM拍截面照
  1092. //{
  1093. // //1.控制SEM放大到指定参数大小范围,6000x
  1094. // if (!iSEM.SetMagnification(6000))
  1095. // {
  1096. // return false;
  1097. // }
  1098. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1099. // if (!MeasParam.FocusMode)
  1100. // {
  1101. // //弹出手动对焦的窗口
  1102. // }
  1103. // else
  1104. // {
  1105. // //调用自动对焦模块
  1106. // }
  1107. // //3.设置SEM角度补偿cos36度
  1108. // if (!TiltCorrection(36))
  1109. // {
  1110. // return false;
  1111. // }
  1112. // //4.控制SEM拍照
  1113. // //5.保存照片4
  1114. // String fileName5 = WorkingFolder + ImageName5;
  1115. // if (!GetImage(ImageMode.SEM, fileName5))
  1116. // {
  1117. // return false;
  1118. // }
  1119. // //6.将照片传给客户,获取偏移坐标
  1120. // float x6 = 0, y6 = 0;
  1121. // float angle1 = 0;
  1122. // float mage = 10000;
  1123. // //7.根据坐标控制SEM移动到分析位置
  1124. // if (!iSEM.MoveStageXY(x6, y6))
  1125. // {
  1126. // return false;
  1127. // }
  1128. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1129. // float x7 = iSEM.GetStageAtX();
  1130. // float y7 = iSEM.GetStageAtY();
  1131. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1132. // {
  1133. // return false;
  1134. // }
  1135. // //9.控制SEM平行校正,并记录校正前初始值
  1136. // float foldAnagle = iSEM.GetScanRotation();
  1137. // if (foldAnagle == float.NaN)
  1138. // {
  1139. // return false;
  1140. // }
  1141. // if (!iSEM.SetScanRotation(angle1))
  1142. // {
  1143. // return false;
  1144. // }
  1145. // //10.控制SEM放大到指定参数大小范围
  1146. // if (!iSEM.SetMagnification(mage))
  1147. // {
  1148. // return false;
  1149. // }
  1150. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1151. // if (!MeasParam.FocusMode)
  1152. // {
  1153. // //弹出手动对焦的窗口
  1154. // }
  1155. // else
  1156. // {
  1157. // //调用自动对焦模块
  1158. // }
  1159. // //12.控制SEM对分析位置拍照
  1160. // String fileName6 = WorkingFolder + ImageName6;
  1161. // if (!GetImage(ImageMode.SEM, fileName6))
  1162. // {
  1163. // return false;
  1164. // }
  1165. // //13.保存照片
  1166. // //14.控制SEM取消电子束校正,回到初始值
  1167. // if (!iSEM.SetScanRotation(foldAnagle))
  1168. // {
  1169. // return false;
  1170. // }
  1171. //}
  1172. ////18.自动层高分析
  1173. //{
  1174. // //1.获取SEM Pixel Size给客户传入参数
  1175. // if (iSEM.GetPixelSize() == float.NaN)
  1176. // {
  1177. // return false;
  1178. // }
  1179. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1180. //}
  1181. ////19.自动能谱分析
  1182. //{
  1183. // //1. 确定能谱位置
  1184. // //2. 控制牛津打能谱
  1185. // //3. 能谱分析——面扫+线扫描
  1186. //}
  1187. return true;
  1188. }
  1189. //非第一个孔的测试过程
  1190. public void OtherHole()
  1191. {
  1192. //for (int i = 1; i < m_cutHoles.Count; i++)
  1193. //{
  1194. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1195. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1196. //1. 初始化
  1197. {
  1198. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1199. //读取图像冻结状态
  1200. float ffrozen = iSEM.GetImageFrozen();
  1201. if (ffrozen == float.NaN)
  1202. {
  1203. return;
  1204. }
  1205. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1206. {
  1207. SendMsg("样品台恢复到水平");
  1208. //return true;
  1209. }
  1210. else
  1211. {
  1212. SendMsg("禁止样品台恢复到水平");
  1213. return;
  1214. }
  1215. //2. 调节样品1号孔的样品台6轴坐标
  1216. //3. 将样品1号孔坐标2存入数据库
  1217. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1218. if (!iSEM.SetStageGotoT(0))
  1219. {
  1220. return;
  1221. }
  1222. while (true)
  1223. {
  1224. Thread.Sleep(10000);
  1225. if (iSEM.GetStageIs() == 0)
  1226. {
  1227. break;
  1228. }
  1229. }
  1230. //5. 获取光镜2号孔XY坐标
  1231. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1232. //6. 根据光镜坐标控制样品台移动
  1233. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1234. {
  1235. SendMsg("移动失败");
  1236. }
  1237. while (true)
  1238. {
  1239. Thread.Sleep(10000);
  1240. if (iSEM.GetStageIs() == 0)
  1241. {
  1242. break;
  1243. }
  1244. }
  1245. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1246. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1247. {
  1248. SendMsg("样品台旋转");
  1249. //return true;
  1250. }
  1251. else
  1252. {
  1253. SendMsg("禁止样品台旋转");
  1254. return;
  1255. }
  1256. if (!iSEM.SetStageGotoT(54))
  1257. {
  1258. return;
  1259. }
  1260. while (true)
  1261. {
  1262. Thread.Sleep(10000);
  1263. if (iSEM.GetStageIs() == 0)
  1264. {
  1265. break;
  1266. }
  1267. }
  1268. }
  1269. SendMsg("拉直操作");
  1270. SendMsg("其他操作与1号孔操作一致");
  1271. if (!CommonWork())
  1272. {
  1273. return;
  1274. }
  1275. //2. 定位切割
  1276. {
  1277. //1. 拉直操作
  1278. {
  1279. //1.1 控制SEM进行拍照
  1280. //1.2 图片传给客户,返回偏移角度
  1281. //1.3 根据返回角度,控制样品台转动
  1282. }
  1283. //2. 与1号孔13步相同
  1284. }
  1285. //3. 以后步骤与1号孔以后步骤一致
  1286. //}
  1287. }
  1288. //角度补偿
  1289. public bool TiltCorrection(float a_fAngle)
  1290. {
  1291. //记录原来电镜的状态
  1292. // bool bTilt = false;
  1293. //float fOldTilt = iSEM.GetTiltCorrection();
  1294. //if (fOldTilt == float.NaN)
  1295. //{
  1296. // return false;
  1297. //}
  1298. //else if (fOldTilt == 1)
  1299. //{
  1300. // bTilt = true;
  1301. //}
  1302. //else if (fOldTilt == 0)
  1303. //{
  1304. // bTilt = false;
  1305. //}
  1306. //float fOldAngle = iSEM.GetTiltAngle();
  1307. //if (fOldAngle == float.NaN)
  1308. //{
  1309. // return false;
  1310. //}
  1311. //开启校正
  1312. SendMsg("开启校正");
  1313. if (!iSEM.SetTiltAngleOn())
  1314. {
  1315. return false;
  1316. }
  1317. //设置校正角度
  1318. //if (!iSEM.SetTiltAngle(fOldAngle))
  1319. //{
  1320. // return false;
  1321. //}
  1322. //恢复原始状态
  1323. SendMsg("校正角度"+ a_fAngle.ToString());
  1324. if (!iSEM.SetTiltAngle(a_fAngle))
  1325. {
  1326. return false;
  1327. }
  1328. //if (bTilt)
  1329. //{
  1330. // if (!iSEM.SetTiltCorrectionOn())
  1331. // {
  1332. // return false;
  1333. // }
  1334. //}
  1335. //else
  1336. //{
  1337. // if (!iSEM.SetTiltCorrectionOff())
  1338. // {
  1339. // return false;
  1340. // }
  1341. //}
  1342. return true;
  1343. }
  1344. //拍图
  1345. public bool GetImage(ImageMode a_mode, String a_fileName)
  1346. {
  1347. //1. 图像解冻
  1348. float foldFrozen = iSEM.GetImageFrozen();
  1349. if (foldFrozen == float.NaN)
  1350. {
  1351. return false;
  1352. }
  1353. if (!iSEM.ImageLive())
  1354. {
  1355. return false;
  1356. }
  1357. //2. 确认图像模式
  1358. if (ImageMode.SEM == a_mode)
  1359. {
  1360. if (!iSEM.CmdFIBModeSEM())
  1361. {
  1362. return false;
  1363. }
  1364. }
  1365. else if (ImageMode.FIB == a_mode)
  1366. {
  1367. if (!iSEM.CmdFIBModeFIB())
  1368. {
  1369. return false;
  1370. }
  1371. }
  1372. else
  1373. {
  1374. return false;
  1375. }
  1376. //3. 获取分辨率
  1377. int[] ImageSize = iSEM.GetImageStore();
  1378. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1379. {
  1380. return false;
  1381. }
  1382. short width = (short)ImageSize[0];
  1383. short height = (short)ImageSize[1];
  1384. //4. 抓图
  1385. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1386. {
  1387. return false;
  1388. }
  1389. //5. 恢复初始状态
  1390. if (foldFrozen == 0)
  1391. {
  1392. if (!iSEM.ImageLive())
  1393. {
  1394. return false;
  1395. }
  1396. }
  1397. else if (foldFrozen == 1)
  1398. {
  1399. if (!iSEM.ImageFrozen())
  1400. {
  1401. return false;
  1402. }
  1403. }
  1404. return true;
  1405. }
  1406. //自动聚焦
  1407. public bool AutoFocus(string a_strPath, out int a_nWd)
  1408. {
  1409. a_nWd = 0;
  1410. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1411. return true;
  1412. }
  1413. }
  1414. }