Measure.cs 59 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using OpenCvSharp;
  16. namespace MeasureThread
  17. {
  18. //图片模式
  19. public enum ImageMode
  20. {
  21. FIB,
  22. SEM
  23. }
  24. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  25. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  26. public class ThreadStatusEventArgs
  27. {
  28. //状态
  29. public string State
  30. {
  31. get { return m_state; }
  32. set { m_state = value; }
  33. }
  34. private string m_state;
  35. //时间
  36. public DateTime Time
  37. {
  38. get { return m_time; }
  39. set { m_time = value; }
  40. }
  41. private DateTime m_time;
  42. //步骤代码
  43. public String Step_Code
  44. {
  45. get { return step_Code; }
  46. set { step_Code = value; }
  47. }
  48. private String step_Code;
  49. //其他消息
  50. public String Message
  51. {
  52. get { return this.message; }
  53. set { this.message = value; }
  54. }
  55. private String message;
  56. //孔名
  57. public String HoleName
  58. {
  59. get { return this.holeName; }
  60. set { this.holeName = value; }
  61. }
  62. private String holeName;
  63. //图片信息
  64. public class PictureInformation
  65. {
  66. public String Picture_FullPath
  67. {
  68. get { return picture_FullPath; }
  69. set { picture_FullPath = value; }
  70. }
  71. private String picture_FullPath;
  72. public double Work_Voltage
  73. {
  74. get { return work_Voltage; }
  75. set { work_Voltage = value; }
  76. }
  77. private double work_Voltage;
  78. public double Magnification
  79. {
  80. get { return magnification; }
  81. set { magnification = value; }
  82. }
  83. private double magnification;
  84. public double Work_Distance
  85. {
  86. get { return work_Distance; }
  87. set { work_Distance = value; }
  88. }
  89. private double work_Distance;
  90. public String Work_Status
  91. {
  92. get { return work_Status; }
  93. set { work_Status = value; }
  94. }
  95. private String work_Status;
  96. }
  97. //图片信息实例类
  98. public PictureInformation Picture_Information
  99. {
  100. get { return picture_Information; }
  101. set { picture_Information = value; }
  102. }
  103. private PictureInformation picture_Information;
  104. //图像信息
  105. public class ImageInformation
  106. {
  107. public int Method_Name
  108. {
  109. get { return method_Name; }
  110. set { method_Name = value; }
  111. }
  112. private int method_Name;
  113. public Source_Img_Degree_Direction SIDD;
  114. public Cut_Position CP;
  115. public Cut_Success CS;
  116. public Trapezoid_Top_Center_Position TTCP;
  117. public Auto_Foucs AF;
  118. public Auto_Stigmatic AS;
  119. public Center_Position_OffsetAngle_Direction CPOD;
  120. public Measure_Size MS;
  121. public ImageInformation()
  122. {
  123. SIDD = new Source_Img_Degree_Direction();
  124. CP = new Cut_Position();
  125. CS = new Cut_Success();
  126. TTCP = new Trapezoid_Top_Center_Position();
  127. AF = new Auto_Foucs();
  128. AS = new Auto_Stigmatic();
  129. CPOD = new Center_Position_OffsetAngle_Direction();
  130. MS = new Measure_Size();
  131. }
  132. //1-计算原始图像偏移角度及方向
  133. public class Source_Img_Degree_Direction
  134. {
  135. public Boolean Is_Image = false;
  136. public double Degree
  137. {
  138. get { return degree; }
  139. set { degree = value; }
  140. }
  141. private double degree;
  142. public int Direction
  143. {
  144. get { return direction; }
  145. set { direction = value; }
  146. }
  147. private int direction;
  148. public int State
  149. {
  150. get { return state; }
  151. set { state = value; }
  152. }
  153. private int state;
  154. }
  155. //2-计算切割点位置
  156. public class Cut_Position
  157. {
  158. public Boolean Is_Image = false;
  159. public double Offsetx
  160. {
  161. get { return offsetx; }
  162. set { offsetx = value; }
  163. }
  164. private double offsetx;
  165. public double Offsety
  166. {
  167. get { return offsety; }
  168. set { offsety = value; }
  169. }
  170. private double offsety;
  171. public int State
  172. {
  173. get { return state; }
  174. set { state = value; }
  175. }
  176. private int state;
  177. }
  178. //3-是否切割成功
  179. public class Cut_Success
  180. {
  181. public Boolean Is_Image = false;
  182. public int State
  183. {
  184. get { return state; }
  185. set { state = value; }
  186. }
  187. private int state;
  188. }
  189. //4-计算切割后图像梯形区域上边中心点坐标
  190. public class Trapezoid_Top_Center_Position
  191. {
  192. public Boolean Is_Image = false;
  193. public double TopCenterX
  194. {
  195. get { return topCenterX; }
  196. set { topCenterX = value; }
  197. }
  198. private double topCenterX;
  199. public double TopCenterY
  200. {
  201. get { return topCenterY; }
  202. set { topCenterY = value; }
  203. }
  204. private double topCenterY;
  205. public int State
  206. {
  207. get { return state; }
  208. set { state = value; }
  209. }
  210. private int state;
  211. }
  212. //5-自动对焦
  213. public class Auto_Foucs
  214. {
  215. public Boolean Is_Image = true;
  216. public String Img_Path
  217. {
  218. get { return img_Path; }
  219. set { img_Path = value; }
  220. }
  221. private String img_Path;
  222. }
  223. //6-自动像闪
  224. public class Auto_Stigmatic
  225. {
  226. public Boolean Is_Image = true;
  227. public String Img_Path
  228. {
  229. get { return img_Path; }
  230. set { img_Path = value; }
  231. }
  232. private String img_Path;
  233. }
  234. //7-计算切割面区域中心坐标,以及偏移角度及方向
  235. public class Center_Position_OffsetAngle_Direction
  236. {
  237. public Boolean Is_Image = false;
  238. public double CenterX
  239. {
  240. get { return centerX; }
  241. set { centerX = value; }
  242. }
  243. private double centerX;
  244. public double CenterY
  245. {
  246. get { return centerY; }
  247. set { centerY = value; }
  248. }
  249. private double centerY;
  250. public double Degree
  251. {
  252. get { return degree; }
  253. set { degree = value; }
  254. }
  255. private double degree;
  256. public int Direction
  257. {
  258. get { return direction; }
  259. set { direction = value; }
  260. }
  261. private int direction;
  262. public int State
  263. {
  264. get { return state; }
  265. set { state = value; }
  266. }
  267. private int state;
  268. }
  269. //8-测量尺寸
  270. public class Measure_Size
  271. {
  272. public Boolean Is_Image = false;
  273. public int State
  274. {
  275. get { return state; }
  276. set { state = value; }
  277. }
  278. private int state;
  279. }
  280. }
  281. //图像信息实例类
  282. public ImageInformation Image_Information
  283. {
  284. get { return image_Information; }
  285. set { image_Information = value; }
  286. }
  287. private ImageInformation image_Information;
  288. public ThreadStatusEventArgs(string a_State)
  289. {
  290. picture_Information = new PictureInformation();
  291. image_Information = new ImageInformation();
  292. }
  293. }
  294. public class CutHolesStatusEventArgs
  295. {
  296. public string State
  297. {
  298. get { return m_state; }
  299. set { m_state = value; }
  300. }
  301. private string m_state;
  302. public string HoleName
  303. {
  304. get { return m_holeName; }
  305. set { m_holeName = value; }
  306. }
  307. private string m_holeName;
  308. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  309. {
  310. this.m_state = a_state;
  311. this.m_holeName = a_holeName;
  312. }
  313. }
  314. public class Measure
  315. {
  316. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  317. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  318. //定义一个全局的消息类
  319. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  320. //全局只有一个fatorySEM
  321. static FactoryHardware factorySEM = FactoryHardware.Instance;
  322. ISEMControl iSEM = factorySEM.ISEM;
  323. //@的作用是不用转义字符\\只打一个就行
  324. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  325. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  326. const String ImageName3 = @"ImageFIB600X2.tif";
  327. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  328. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  329. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  330. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  331. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  332. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  333. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  334. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  335. const String ElyDeposition = @"Deposition.ely"; //沉积
  336. const String ElyCrossSection = @"CrossSection.ely"; //切割
  337. const float fMin = (float)0.0000002; //单位是米
  338. int m_nWorkHoleNo = -1;
  339. //测量文件
  340. private MeasureFile m_measureFile;
  341. public MeasureFile MeasureFile
  342. {
  343. get { return this.m_measureFile; }
  344. set { this.m_measureFile = value; }
  345. }
  346. //测量的切割孔
  347. private List<MeasureData.CutHole> m_cutHoles;
  348. public List<MeasureData.CutHole> cutHoles
  349. {
  350. get { return this.m_cutHoles; }
  351. set { this.m_cutHoles = value; }
  352. }
  353. //工作文件夹
  354. private string m_WorkingFolder;
  355. public string WorkingFolder
  356. {
  357. get { return this.m_WorkingFolder; }
  358. set { this.m_WorkingFolder = value; }
  359. }
  360. //程序当前路径
  361. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  362. //线程状态
  363. private ThreadStatus m_ThreadStatus;
  364. public ThreadStatus TStatus
  365. {
  366. get { return this.m_ThreadStatus; }
  367. set { this.m_ThreadStatus = value; }
  368. }
  369. //测量参数
  370. private MeasureParam m_MsParam;
  371. public MeasureParam MeasParam
  372. {
  373. get { return this.m_MsParam; }
  374. set { this.m_MsParam = value; }
  375. }
  376. //构造函数
  377. public Measure()
  378. {
  379. Init();
  380. }
  381. private void Init()
  382. {
  383. MeasParam = new MeasureParam();
  384. TStatus = new ThreadStatus();
  385. cutHoles = new List<MeasureData.CutHole>();
  386. }
  387. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  388. public bool InitMeas(MeasureFile a_measureFile)
  389. {
  390. m_measureFile = a_measureFile;
  391. List<CutHole> listHoles = m_measureFile.ListCutHole;
  392. foreach (CutHole h in listHoles)
  393. {
  394. if (h.SWITCH == true)
  395. {
  396. m_cutHoles.Add(h);
  397. }
  398. }
  399. if (m_cutHoles.Count == 0)
  400. return false;
  401. this.m_MsParam = m_measureFile.MParam;
  402. return true;
  403. }
  404. public void SendMsg(string step_code)
  405. {
  406. arg.State = step_code;
  407. SendThreadStatus(this, arg);
  408. }
  409. public void SendMsg1(string step_code)
  410. {
  411. arg.Step_Code = step_code;
  412. arg.Time = DateTime.Now;
  413. switch(step_code)
  414. {
  415. //拍照
  416. case "1-3":
  417. case "1-9":
  418. case "1-16":
  419. case "1-24":
  420. //电压、放大倍数、工作距离、位置信息、图片路径
  421. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  422. arg.Picture_Information.Work_Status = "SEM";
  423. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  424. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  425. break;
  426. case "1-10":
  427. case "1-18":
  428. //获取偏移信息
  429. break;
  430. case "1-12":
  431. case "1-20":
  432. //验证移动准备性
  433. break;
  434. case "1-26":
  435. //取消电子束校正并初始化
  436. break;
  437. default:
  438. arg.State = "1";
  439. break;
  440. }
  441. SendThreadStatus(this, arg);
  442. }
  443. public void SendCutHoleMsg(string a_state, string a_holeName)
  444. {
  445. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  446. arg.HoleName = a_holeName;
  447. arg.State = a_state;
  448. SendCutHolesStatus(this, arg);
  449. }
  450. //测量流程
  451. public void DoMeasure()
  452. {
  453. //创建线程的测量状态的更新
  454. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  455. if (SendThreadStatus != null)
  456. {
  457. SendMsg("开始测量。");
  458. }
  459. //检查硬件连接是否正常
  460. if (!ConnectHardware())
  461. {
  462. SendMsg("连接硬件失败。");
  463. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  464. return;
  465. }
  466. SendMsg("硬件连接成功。");
  467. //设置工作文件夹
  468. if (!SetWorkingFolderStr())
  469. {
  470. SendMsg("设置工作文件夹失败");
  471. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  472. return;
  473. }
  474. SendMsg("创建工作文件路径为" + WorkingFolder);
  475. float[] firstPosition;
  476. for (int i = 0; i < m_cutHoles.Count; i++)
  477. {
  478. m_nWorkHoleNo = i;
  479. arg.HoleName = cutHoles[m_nWorkHoleNo].HoleName;
  480. if (i == 0)
  481. {
  482. SendMsg("第一个切孔开始测量");
  483. //切孔操作-开始
  484. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  485. firstPosition = iSEM.GetStagePosition();
  486. //第一个孔的测试
  487. FirstHole();
  488. //切孔操作-完成
  489. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  490. }
  491. else
  492. {
  493. //非第一个孔的测试
  494. SendMsg("第" + i.ToString() + "个切孔开始测量");
  495. //切孔操作-开始
  496. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  497. OtherHole();
  498. //切孔操作-完成
  499. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  500. }
  501. }
  502. }
  503. //检查硬件连接是否正常
  504. public bool ConnectHardware()
  505. {
  506. //返回硬件的连接状态
  507. return iSEM.ConnectStatus();
  508. }
  509. //设置工作文件夹
  510. public bool SetWorkingFolderStr()
  511. {
  512. WorkingFolder = m_measureFile.FilePath;
  513. return true;
  514. ////获取工作文件路径
  515. //string pathName = m_measureFile.FilePath;
  516. ////判断工作文件路径是否为空或无效
  517. //if (string.IsNullOrEmpty(pathName))
  518. //{
  519. // SendMsg("路径无效");
  520. // return false;
  521. //}
  522. ////文件未保存
  523. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  524. //{
  525. // SendMsg("工程文件未保存");
  526. // return false;
  527. //}
  528. ////获取工作文件所在文件夹
  529. //string folder = System.IO.Path.GetDirectoryName(pathName);
  530. //if (string.IsNullOrEmpty(folder))
  531. //{
  532. // SendMsg("工程文件无效");
  533. // return false;
  534. //}
  535. //WorkingFolder += @"\\";
  536. //LogManager.Init(WorkingFolder);
  537. //return false;
  538. }
  539. //插入PT针
  540. public bool InsertPT()
  541. {
  542. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  543. SendMsg("调用宏插入PT针宏文件" + fn);
  544. iSEM.CMDMCFFilename(fn);
  545. //延时1s??
  546. Thread.Sleep(1000);
  547. return true;
  548. }
  549. //撤出PT针
  550. public bool RetractPT()
  551. {
  552. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  553. SendMsg("调用宏撤出PT针宏文件" + fn);
  554. iSEM.CMDMCFFilename(fn);
  555. //延时1s??
  556. Thread.Sleep(1000);
  557. return true;
  558. }
  559. //PT沉积
  560. public bool PTWork()
  561. {
  562. //执行PT沉积的ELY文件
  563. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  564. SendMsg("执行PT沉积Ely文件:" + fn);
  565. if (!ExcuteEly(fn))
  566. {
  567. return false;
  568. }
  569. //等待沉积完成
  570. while (true)
  571. {
  572. Thread.Sleep(10000);
  573. if (iSEM.GetFIBMode() == 0)
  574. {
  575. break;
  576. }
  577. }
  578. return true;
  579. }
  580. //FIB切割
  581. public bool FIBWork()
  582. {
  583. //执行PT沉积的ELY文件
  584. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  585. SendMsg("执行FIB切割Ely文件:" + fn);
  586. if (!ExcuteEly(fn))
  587. {
  588. return false;
  589. }
  590. //等待切割完成
  591. while (true)
  592. {
  593. Thread.Sleep(10000);
  594. if (iSEM.GetFIBMode() == 0)
  595. {
  596. break;
  597. }
  598. }
  599. return true;
  600. }
  601. public bool ExcuteEly(string a_filename)
  602. {
  603. //执行ELy文件有三个动作
  604. //1. 选择ELY文件
  605. SendMsg("选择ELY文件");
  606. if (!iSEM.CmdFIBLoadELY(a_filename))
  607. {
  608. SendMsg("选择ELY文件失败");
  609. return false;
  610. }
  611. Thread.Sleep(1000);
  612. //2. 确认ELY文件
  613. SendMsg("确认ELY文件");
  614. if (!iSEM.CmdFIBEXPOSUREELY())
  615. {
  616. SendMsg("确认ELY文件失败");
  617. return false;
  618. }
  619. Thread.Sleep(1000);
  620. //3. 执行ELY文件
  621. SendMsg("执行ELY文件");
  622. if (!iSEM.CmdFIBSTARTELY())
  623. {
  624. SendMsg("执行ELY文件失败");
  625. return false;
  626. }
  627. Thread.Sleep(1000);
  628. return true;
  629. }
  630. /// <summary>
  631. ///13. 自动 定位功能
  632. /// </summary>
  633. /// <returns></returns>
  634. public bool GetPoistion()
  635. {
  636. //SendMsg("自动定位");
  637. //13.自动定位切割
  638. {
  639. //1.控制SEM放大600X
  640. if (!iSEM.SetMagnification(600))
  641. {
  642. return false;
  643. }
  644. arg.Message = "放大600倍";
  645. SendMsg("1-1");
  646. //2.控制SEM自动对焦、亮度、对比度
  647. // if (!MeasParam.FocusMode)
  648. {
  649. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  650. {
  651. arg.Message = "自动对焦完成";
  652. SendMsg("1-2");
  653. //return true;
  654. }
  655. else
  656. {
  657. arg.Message = "自动对焦失败";
  658. SendMsg("1-2");
  659. return false;
  660. }
  661. //弹出手动对焦的窗口
  662. }
  663. //else
  664. //{
  665. // //调用自动对焦模块
  666. //}
  667. //3.设置SEM进行角度补偿54度
  668. //if (!TiltCorrection(54))
  669. //{
  670. // SendMsg("设置SEM进行角度补偿54度");
  671. // return false;
  672. //}
  673. //arg.Message = "设置校正54度";
  674. //SendMsg("1-15");
  675. //Thread.Sleep(5000);
  676. //4.控制SEM拍照
  677. //5.保存照片
  678. {
  679. //1. 创建目录,已经完成
  680. //2. 设置图片名称
  681. //3. 保存图片1
  682. WorkingFolder = m_measureFile.FilePath;
  683. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  684. arg.Picture_Information.Picture_FullPath = fileName1;
  685. if (!GetImage(ImageMode.SEM, fileName1))
  686. {
  687. SendMsg("SEM拍照失败");
  688. return false;
  689. }
  690. arg.Message = "SEM拍照";
  691. SendMsg("1-3");
  692. Thread.Sleep(3000);
  693. }
  694. //6.设置FIB拍照参数——扫描时间、束流等
  695. //7.控制FIB自动亮度、对比度
  696. SendMsg("切换FIB控制");
  697. if (!iSEM.CmdFIBModeFIB())
  698. {
  699. SendMsg("FIB模式切换失败");
  700. return false;
  701. }
  702. Thread.Sleep(10000);
  703. //8.控制FIB拍照
  704. //9.保存照片
  705. SendMsg("FIB拍照");
  706. {
  707. //1. 设置图片名称
  708. //2. 保存图片2
  709. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  710. if (!GetImage(ImageMode.FIB, fileName2))
  711. {
  712. SendMsg("FIB拍照失败");
  713. return false;
  714. }
  715. Thread.Sleep(3000);
  716. }
  717. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  718. SendMsg("调用识别位置");
  719. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  720. {
  721. SendMsg("移动已完成");
  722. //return true;
  723. }
  724. else
  725. {
  726. SendMsg("移动已失败");
  727. return false;
  728. }
  729. SendMsg("进行PT沉积");
  730. //11.自动工具样品类型参数确定是否需要PT沉积
  731. {
  732. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  733. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  734. //3. 根据坐标进行PT沉积
  735. if (!PTWork())
  736. {
  737. SendMsg("PT沉积失败");
  738. return false;
  739. }
  740. }
  741. return true;
  742. //模拟为客户返回的坐标值
  743. float x0 = 0, y0 = 0;
  744. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  745. //12.根据梯形坐标控制FIB调整到中心位置
  746. if (!iSEM.MoveStageXY(x0, y0))
  747. {
  748. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  749. return false;
  750. }
  751. //电镜移动是有一个延时的操作的?
  752. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  753. float x1 = iSEM.GetStageAtX();
  754. float y1 = iSEM.GetStageAtY();
  755. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  756. {
  757. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  758. return false;
  759. }
  760. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  761. float[] firstPosition = iSEM.GetStagePosition();
  762. //这里要调用文件保存功能
  763. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  764. + firstPosition[1].ToString() + ","
  765. + firstPosition[2].ToString() + ","
  766. + firstPosition[3].ToString() + ","
  767. + firstPosition[4].ToString() + ","
  768. + firstPosition[5].ToString() + ")");
  769. }
  770. return false;
  771. }
  772. /// <summary>
  773. /// 14. FIB切割
  774. /// </summary>
  775. /// <returns></returns>
  776. public bool FIBCross()
  777. {
  778. //14.自动控制FIB切割
  779. {
  780. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  781. //2.控制FIB进行切割
  782. SendMsg("FIB切割");
  783. if (!FIBWork())
  784. {
  785. SendMsg("FIB切割失败");
  786. return false;
  787. }
  788. Thread.Sleep(5000);
  789. //3.控制FIB拍照600X
  790. //4.保存图片
  791. {
  792. //1.设置图片名称
  793. //2.保存图片3
  794. WorkingFolder = m_measureFile.FilePath;
  795. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  796. SendMsg("SEM拍照存储到" + fileName3);
  797. if (!GetImage(ImageMode.FIB, fileName3))
  798. {
  799. SendMsg("FIB拍照失败");
  800. return false;
  801. }
  802. Thread.Sleep(3000);
  803. }
  804. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  805. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  806. }
  807. return true;
  808. }
  809. /// <summary>
  810. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  811. /// </summary>
  812. /// <returns></returns>
  813. public bool FindCross()
  814. {
  815. //16.自动调整SEM找到切割位置
  816. {
  817. //1.控制SEM放大到300倍
  818. if (!iSEM.SetMagnification(300))
  819. {
  820. return false;
  821. }
  822. //2.控制SEM自动对焦、亮度、对比度-接口
  823. if (!MeasParam.FocusMode)
  824. {
  825. //弹出手动对焦的窗口
  826. }
  827. else
  828. {
  829. //调用自动对焦模块
  830. }
  831. Thread.Sleep(5000);
  832. //3.控制SEM拍照
  833. String fileName4 = WorkingFolder + ImageName4;
  834. if (!GetImage(ImageMode.SEM, fileName4))
  835. {
  836. return false;
  837. }
  838. Thread.Sleep(3000);
  839. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  840. float x4 = 0, y4 = 0;
  841. float angle = 0;
  842. //5.根据坐标控制SEM移动到切孔位置,居中
  843. if (!iSEM.MoveStageXY(x4, y4))
  844. {
  845. return false;
  846. }
  847. if (!iSEM.SetScanRotation(angle))
  848. {
  849. return false;
  850. }
  851. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  852. //float x5 = iSEM.GetStageAtX();
  853. //float y5 = iSEM.GetStageAtY();
  854. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  855. //{
  856. // return false;
  857. //}
  858. }
  859. return true;
  860. }
  861. public bool CommonWork()
  862. {
  863. SendMsg("插入PT针");
  864. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  865. //if (firstHole.PT == true)
  866. {
  867. if (!InsertPT())
  868. {
  869. SendMsg("插入PT针失败");
  870. return false;
  871. }
  872. }
  873. //13. 自动 定位功能
  874. SendMsg("自动定位切割位置");
  875. if (!GetPoistion())
  876. {
  877. SendMsg("自动定位切割位置失败");
  878. return false;
  879. }
  880. //14.自动控制FIB切割
  881. SendMsg("FIB切割");
  882. if (!FIBCross())
  883. {
  884. SendMsg("FIB切割失败");
  885. return false;
  886. }
  887. //{
  888. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  889. // //2.控制FIB进行切割
  890. // //3.控制FIB拍照600X
  891. // //4.保存图片
  892. // {
  893. // //1.设置图片名称
  894. // //2.保存图片3
  895. // String fileName3 = WorkingFolder + ImageName3;
  896. // if (!GetImage(ImageMode.FIB, fileName3))
  897. // {
  898. // return false;
  899. // }
  900. // }
  901. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  902. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  903. //}
  904. //15.根据样品类型决定是否撤出PT针
  905. SendMsg("撤出PT针");
  906. //if (firstHole.PT == false)
  907. //{
  908. if (!RetractPT())
  909. {
  910. SendMsg("撤出PT针失败");
  911. return false;
  912. }
  913. //}
  914. // 16.找到切割位置
  915. SendMsg("找到切割位置");
  916. //17.自动控制SEM拍截面照
  917. SendMsg("观测层高");
  918. SendMsg("切换SEM控制");
  919. if (!iSEM.CmdFIBModeSEM())
  920. {
  921. SendMsg("SEM模式切换失败");
  922. return false;
  923. }
  924. Thread.Sleep(10000);
  925. SendMsg("放大6000倍");
  926. if (!iSEM.SetMagnification(6000))
  927. {
  928. SendMsg("放大倍数调整失败");
  929. return false;
  930. }
  931. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  932. {
  933. SendMsg("拍摄照片完成");
  934. //return true;
  935. }
  936. else
  937. {
  938. SendMsg("拍摄照片失败");
  939. return false;
  940. }
  941. SendMsg("图像校正36度");
  942. //3.设置SEM角度补偿cos36度
  943. if (!TiltCorrection(36))
  944. {
  945. return false;
  946. }
  947. Thread.Sleep(3000);
  948. string fn;
  949. //用宏抓一般图
  950. Thread.Sleep(5000);
  951. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  952. SendMsg("用宏抓一般图" + fn);
  953. iSEM.CMDMCFFilename(fn);
  954. //延时1s??
  955. Thread.Sleep(5000);
  956. //用宏抓好图
  957. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  958. SendMsg("用宏抓好图" + fn);
  959. iSEM.CMDMCFFilename(fn);
  960. //延时1s??
  961. Thread.Sleep(30000);
  962. Thread.Sleep(10000);
  963. WorkingFolder = m_measureFile.FilePath;
  964. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  965. SendMsg("SEM拍照存储到" + fileName6);
  966. if (!GetImage(ImageMode.SEM, fileName6))
  967. {
  968. SendMsg("SEM拍照失败");
  969. return false;
  970. }
  971. //用宏抓标志图
  972. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  973. SendMsg("用宏抓标志图" + fn);
  974. iSEM.CMDMCFFilename(fn);
  975. //延时1s??
  976. Thread.Sleep(30000);
  977. //恢复简单抓图
  978. Thread.Sleep(5000);
  979. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  980. SendMsg("用宏抓一般图" + fn);
  981. iSEM.CMDMCFFilename(fn);
  982. SendMsg("所有图结束");
  983. return true;
  984. }
  985. //第一个孔的测试过程
  986. public bool FirstHole()
  987. {
  988. MeasureData.CutHole firstHole = m_cutHoles[0];
  989. SendMsg("插入PT针");
  990. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  991. //if (firstHole.PT == true)
  992. {
  993. if (!InsertPT())
  994. {
  995. SendMsg("插入PT针失败");
  996. return false;
  997. }
  998. }
  999. //13. 自动 定位功能
  1000. SendMsg("自动定位切割位置");
  1001. if (!GetPoistion())
  1002. {
  1003. SendMsg("自动定位切割位置失败");
  1004. return false;
  1005. }
  1006. //14.自动控制FIB切割
  1007. SendMsg("FIB切割");
  1008. if (!FIBCross())
  1009. {
  1010. SendMsg("FIB切割失败");
  1011. return false;
  1012. }
  1013. //{
  1014. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1015. // //2.控制FIB进行切割
  1016. // //3.控制FIB拍照600X
  1017. // //4.保存图片
  1018. // {
  1019. // //1.设置图片名称
  1020. // //2.保存图片3
  1021. // String fileName3 = WorkingFolder + ImageName3;
  1022. // if (!GetImage(ImageMode.FIB, fileName3))
  1023. // {
  1024. // return false;
  1025. // }
  1026. // }
  1027. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1028. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1029. //}
  1030. //15.根据样品类型决定是否撤出PT针
  1031. SendMsg("撤出PT针");
  1032. //if (firstHole.PT == false)
  1033. //{
  1034. if (!RetractPT())
  1035. {
  1036. SendMsg("撤出PT针失败");
  1037. return false;
  1038. }
  1039. //}
  1040. // 16.找到切割位置
  1041. SendMsg("找到切割位置");
  1042. //17.自动控制SEM拍截面照
  1043. SendMsg("观测层高");
  1044. SendMsg("切换SEM控制");
  1045. if (!iSEM.CmdFIBModeSEM())
  1046. {
  1047. SendMsg("SEM模式切换失败");
  1048. return false;
  1049. }
  1050. Thread.Sleep(10000);
  1051. SendMsg("放大6000倍");
  1052. if (!iSEM.SetMagnification(6000))
  1053. {
  1054. SendMsg("放大倍数调整失败");
  1055. return false;
  1056. }
  1057. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1058. {
  1059. SendMsg("拍摄照片完成");
  1060. //return true;
  1061. }
  1062. else
  1063. {
  1064. SendMsg("拍摄照片失败");
  1065. return false;
  1066. }
  1067. SendMsg("图像校正36度");
  1068. //3.设置SEM角度补偿cos36度
  1069. if (!TiltCorrection(36))
  1070. {
  1071. return false;
  1072. }
  1073. Thread.Sleep(3000);
  1074. string fn;
  1075. //用宏抓一般图
  1076. Thread.Sleep(5000);
  1077. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1078. SendMsg("用宏抓一般图" + fn);
  1079. iSEM.CMDMCFFilename(fn);
  1080. //延时1s??
  1081. Thread.Sleep(5000);
  1082. //用宏抓好图
  1083. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1084. SendMsg("用宏抓好图" + fn);
  1085. iSEM.CMDMCFFilename(fn);
  1086. //延时1s??
  1087. Thread.Sleep(30000);
  1088. Thread.Sleep(10000);
  1089. WorkingFolder = m_measureFile.FilePath;
  1090. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1091. SendMsg("SEM拍照存储到" + fileName6);
  1092. if (!GetImage(ImageMode.SEM, fileName6))
  1093. {
  1094. SendMsg("SEM拍照失败");
  1095. return false;
  1096. }
  1097. //用宏抓标志图
  1098. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1099. SendMsg("用宏抓标志图" + fn);
  1100. iSEM.CMDMCFFilename(fn);
  1101. //延时1s??
  1102. Thread.Sleep(30000);
  1103. Thread.Sleep(5000);
  1104. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1105. SendMsg("用宏抓一般图" + fn);
  1106. iSEM.CMDMCFFilename(fn);
  1107. //延时1s??
  1108. Thread.Sleep(5000);
  1109. SendMsg("所有图结束");
  1110. ////17.自动控制SEM拍截面照
  1111. //{
  1112. // //1.控制SEM放大到指定参数大小范围,6000x
  1113. // if (!iSEM.SetMagnification(6000))
  1114. // {
  1115. // return false;
  1116. // }
  1117. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1118. // if (!MeasParam.FocusMode)
  1119. // {
  1120. // //弹出手动对焦的窗口
  1121. // }
  1122. // else
  1123. // {
  1124. // //调用自动对焦模块
  1125. // }
  1126. // //3.设置SEM角度补偿cos36度
  1127. // if (!TiltCorrection(36))
  1128. // {
  1129. // return false;
  1130. // }
  1131. // //4.控制SEM拍照
  1132. // //5.保存照片4
  1133. // String fileName5 = WorkingFolder + ImageName5;
  1134. // if (!GetImage(ImageMode.SEM, fileName5))
  1135. // {
  1136. // return false;
  1137. // }
  1138. // //6.将照片传给客户,获取偏移坐标
  1139. // float x6 = 0, y6 = 0;
  1140. // float angle1 = 0;
  1141. // float mage = 10000;
  1142. // //7.根据坐标控制SEM移动到分析位置
  1143. // if (!iSEM.MoveStageXY(x6, y6))
  1144. // {
  1145. // return false;
  1146. // }
  1147. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1148. // float x7 = iSEM.GetStageAtX();
  1149. // float y7 = iSEM.GetStageAtY();
  1150. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1151. // {
  1152. // return false;
  1153. // }
  1154. // //9.控制SEM平行校正,并记录校正前初始值
  1155. // float foldAnagle = iSEM.GetScanRotation();
  1156. // if (foldAnagle == float.NaN)
  1157. // {
  1158. // return false;
  1159. // }
  1160. // if (!iSEM.SetScanRotation(angle1))
  1161. // {
  1162. // return false;
  1163. // }
  1164. // //10.控制SEM放大到指定参数大小范围
  1165. // if (!iSEM.SetMagnification(mage))
  1166. // {
  1167. // return false;
  1168. // }
  1169. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1170. // if (!MeasParam.FocusMode)
  1171. // {
  1172. // //弹出手动对焦的窗口
  1173. // }
  1174. // else
  1175. // {
  1176. // //调用自动对焦模块
  1177. // }
  1178. // //12.控制SEM对分析位置拍照
  1179. // String fileName6 = WorkingFolder + ImageName6;
  1180. // if (!GetImage(ImageMode.SEM, fileName6))
  1181. // {
  1182. // return false;
  1183. // }
  1184. // //13.保存照片
  1185. // //14.控制SEM取消电子束校正,回到初始值
  1186. // if (!iSEM.SetScanRotation(foldAnagle))
  1187. // {
  1188. // return false;
  1189. // }
  1190. //}
  1191. ////18.自动层高分析
  1192. //{
  1193. // //1.获取SEM Pixel Size给客户传入参数
  1194. // if (iSEM.GetPixelSize() == float.NaN)
  1195. // {
  1196. // return false;
  1197. // }
  1198. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1199. //}
  1200. ////19.自动能谱分析
  1201. //{
  1202. // //1. 确定能谱位置
  1203. // //2. 控制牛津打能谱
  1204. // //3. 能谱分析——面扫+线扫描
  1205. //}
  1206. return true;
  1207. }
  1208. //非第一个孔的测试过程
  1209. public void OtherHole()
  1210. {
  1211. //for (int i = 1; i < m_cutHoles.Count; i++)
  1212. //{
  1213. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1214. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1215. //1. 初始化
  1216. {
  1217. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1218. //读取图像冻结状态
  1219. float ffrozen = iSEM.GetImageFrozen();
  1220. if (ffrozen == float.NaN)
  1221. {
  1222. return;
  1223. }
  1224. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1225. {
  1226. SendMsg("样品台恢复到水平");
  1227. //return true;
  1228. }
  1229. else
  1230. {
  1231. SendMsg("禁止样品台恢复到水平");
  1232. return;
  1233. }
  1234. //2. 调节样品1号孔的样品台6轴坐标
  1235. //3. 将样品1号孔坐标2存入数据库
  1236. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1237. if (!iSEM.SetStageGotoT(0))
  1238. {
  1239. return;
  1240. }
  1241. while (true)
  1242. {
  1243. Thread.Sleep(10000);
  1244. if (iSEM.GetStageIs() == 0)
  1245. {
  1246. break;
  1247. }
  1248. }
  1249. //5. 获取光镜2号孔XY坐标
  1250. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1251. //6. 根据光镜坐标控制样品台移动
  1252. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1253. {
  1254. SendMsg("移动失败");
  1255. }
  1256. while (true)
  1257. {
  1258. Thread.Sleep(10000);
  1259. if (iSEM.GetStageIs() == 0)
  1260. {
  1261. break;
  1262. }
  1263. }
  1264. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1265. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1266. {
  1267. SendMsg("样品台旋转");
  1268. //return true;
  1269. }
  1270. else
  1271. {
  1272. SendMsg("禁止样品台旋转");
  1273. return;
  1274. }
  1275. if (!iSEM.SetStageGotoT(54))
  1276. {
  1277. return;
  1278. }
  1279. while (true)
  1280. {
  1281. Thread.Sleep(10000);
  1282. if (iSEM.GetStageIs() == 0)
  1283. {
  1284. break;
  1285. }
  1286. }
  1287. }
  1288. SendMsg("拉直操作");
  1289. SendMsg("其他操作与1号孔操作一致");
  1290. if (!CommonWork())
  1291. {
  1292. return;
  1293. }
  1294. //2. 定位切割
  1295. {
  1296. //1. 拉直操作
  1297. {
  1298. //1.1 控制SEM进行拍照
  1299. //1.2 图片传给客户,返回偏移角度
  1300. //1.3 根据返回角度,控制样品台转动
  1301. }
  1302. //2. 与1号孔13步相同
  1303. }
  1304. //3. 以后步骤与1号孔以后步骤一致
  1305. //}
  1306. }
  1307. //角度补偿
  1308. public bool TiltCorrection(float a_fAngle)
  1309. {
  1310. //记录原来电镜的状态
  1311. // bool bTilt = false;
  1312. //float fOldTilt = iSEM.GetTiltCorrection();
  1313. //if (fOldTilt == float.NaN)
  1314. //{
  1315. // return false;
  1316. //}
  1317. //else if (fOldTilt == 1)
  1318. //{
  1319. // bTilt = true;
  1320. //}
  1321. //else if (fOldTilt == 0)
  1322. //{
  1323. // bTilt = false;
  1324. //}
  1325. //float fOldAngle = iSEM.GetTiltAngle();
  1326. //if (fOldAngle == float.NaN)
  1327. //{
  1328. // return false;
  1329. //}
  1330. //开启校正
  1331. SendMsg("开启校正");
  1332. if (!iSEM.SetTiltAngleOn())
  1333. {
  1334. return false;
  1335. }
  1336. //设置校正角度
  1337. //if (!iSEM.SetTiltAngle(fOldAngle))
  1338. //{
  1339. // return false;
  1340. //}
  1341. //恢复原始状态
  1342. SendMsg("校正角度"+ a_fAngle.ToString());
  1343. if (!iSEM.SetTiltAngle(a_fAngle))
  1344. {
  1345. return false;
  1346. }
  1347. //if (bTilt)
  1348. //{
  1349. // if (!iSEM.SetTiltCorrectionOn())
  1350. // {
  1351. // return false;
  1352. // }
  1353. //}
  1354. //else
  1355. //{
  1356. // if (!iSEM.SetTiltCorrectionOff())
  1357. // {
  1358. // return false;
  1359. // }
  1360. //}
  1361. return true;
  1362. }
  1363. //拍图
  1364. public bool GetImage(ImageMode a_mode, String a_fileName)
  1365. {
  1366. //1. 图像解冻
  1367. float foldFrozen = iSEM.GetImageFrozen();
  1368. if (foldFrozen == float.NaN)
  1369. {
  1370. return false;
  1371. }
  1372. if (!iSEM.ImageLive())
  1373. {
  1374. return false;
  1375. }
  1376. //2. 确认图像模式
  1377. if (ImageMode.SEM == a_mode)
  1378. {
  1379. if (!iSEM.CmdFIBModeSEM())
  1380. {
  1381. return false;
  1382. }
  1383. }
  1384. else if (ImageMode.FIB == a_mode)
  1385. {
  1386. if (!iSEM.CmdFIBModeFIB())
  1387. {
  1388. return false;
  1389. }
  1390. }
  1391. else
  1392. {
  1393. return false;
  1394. }
  1395. //3. 获取分辨率
  1396. int[] ImageSize = iSEM.GetImageStore();
  1397. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1398. {
  1399. return false;
  1400. }
  1401. short width = (short)ImageSize[0];
  1402. short height = (short)ImageSize[1];
  1403. //4. 抓图
  1404. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1405. {
  1406. return false;
  1407. }
  1408. //5. 恢复初始状态
  1409. if (foldFrozen == 0)
  1410. {
  1411. if (!iSEM.ImageLive())
  1412. {
  1413. return false;
  1414. }
  1415. }
  1416. else if (foldFrozen == 1)
  1417. {
  1418. if (!iSEM.ImageFrozen())
  1419. {
  1420. return false;
  1421. }
  1422. }
  1423. return true;
  1424. }
  1425. //自动聚焦
  1426. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  1427. {
  1428. a_nWd = 0;
  1429. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1430. if (a_param == null)
  1431. {
  1432. return false;
  1433. }
  1434. string path = a_param.Path;
  1435. if (!Directory.Exists(path))
  1436. {
  1437. return false;
  1438. }
  1439. string path_coarse = a_param.Path + "\\Coarse";
  1440. if (!Directory.Exists(path_coarse))
  1441. {
  1442. Directory.CreateDirectory(path_coarse);
  1443. }
  1444. string path_fine = a_param.Path + "\\Fine";
  1445. if (!Directory.Exists(path_fine))
  1446. {
  1447. Directory.CreateDirectory(path_fine);
  1448. }
  1449. //1. 拍照
  1450. //1.1, 粗拍照
  1451. //1.1.1, 根据参数计算拍照次数
  1452. double nUp = a_param.UP * 100.0 ;
  1453. double nDown = a_param.Down * 100.0;
  1454. double nStep = a_param.Step * 100.0;
  1455. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  1456. SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  1457. //粗拍照
  1458. for (int i = 0; i < nTimes; i++)
  1459. {
  1460. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  1461. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  1462. Thread.Sleep(3000);
  1463. int swd = cWd / 100;
  1464. SendMsg("wd = " + swd.ToString() +"um");
  1465. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  1466. if (!GetImage(ImageMode.SEM, fileName))
  1467. {
  1468. return false;
  1469. }
  1470. Thread.Sleep(5000);
  1471. }
  1472. //1.2, 选定细拍照的工作距离
  1473. int CorWd;
  1474. ChooseBest(path_coarse,out CorWd);
  1475. a_nWd = CorWd;
  1476. SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  1477. //1.3, 细拍照
  1478. if ( (CorWd - a_param.Range * 100.0) <=0)
  1479. {
  1480. return false;
  1481. }
  1482. double nfUp = CorWd - a_param.Range * 100.0;
  1483. double nfStep = a_param.fStep * 100.0;
  1484. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  1485. SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  1486. for (int i = 0; i < nfTimes; i++)
  1487. {
  1488. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  1489. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  1490. Thread.Sleep(3000);
  1491. int swd = cWd / 100;
  1492. SendMsg("wd = " + swd.ToString() + "um");
  1493. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  1494. if (!GetImage(ImageMode.SEM, fileName))
  1495. {
  1496. return false;
  1497. }
  1498. Thread.Sleep(5000);
  1499. }
  1500. int fineWd;
  1501. ChooseBest(path_coarse, out fineWd);
  1502. SendMsg("wd fine max = " + fineWd.ToString());
  1503. a_nWd = fineWd;
  1504. SendMsg("细选工作距离wd = " + a_nWd.ToString());
  1505. return true;
  1506. }
  1507. //LoG算子计算
  1508. private double LoGMean(string a_strImgPath)
  1509. {
  1510. //读入Img文件
  1511. if (!File.Exists(a_strImgPath))
  1512. {
  1513. return 0;
  1514. }
  1515. Mat src, gray_src;
  1516. int kernel_size = 3;
  1517. src = Cv2.ImRead(a_strImgPath);
  1518. gray_src = new Mat();
  1519. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  1520. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  1521. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  1522. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  1523. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  1524. Cv2.ConvertScaleAbs(src, src);
  1525. //图像的平均灰度
  1526. double meanValue = 0.0;
  1527. meanValue = Cv2.Mean(src)[0];
  1528. return meanValue;
  1529. }
  1530. //梯度计算
  1531. private double Tenengrad(string a_strImgPath)
  1532. {
  1533. //读入Img文件
  1534. if (!File.Exists(a_strImgPath))
  1535. {
  1536. return 0;
  1537. }
  1538. Mat src;
  1539. src = Cv2.ImRead(a_strImgPath);
  1540. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  1541. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  1542. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  1543. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  1544. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  1545. //图像的平均灰度
  1546. double meanValue = 0.0;
  1547. meanValue = Cv2.Mean(src)[0];
  1548. return meanValue;
  1549. }
  1550. //梯度计算
  1551. private double TTgrad(string a_strImgPath)
  1552. {
  1553. //读入Img文件
  1554. if (!File.Exists(a_strImgPath))
  1555. {
  1556. return 0;
  1557. }
  1558. Mat src;
  1559. src = Cv2.ImRead(a_strImgPath);
  1560. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  1561. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  1562. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  1563. Mat scalex = new Mat();
  1564. Mat scaley = new Mat();
  1565. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  1566. Cv2.ConvertScaleAbs(src, scalex);
  1567. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  1568. Cv2.ConvertScaleAbs(src, scaley);
  1569. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  1570. //图像的平均灰度
  1571. double meanValue = 0.0;
  1572. meanValue = Cv2.Mean(src)[0];
  1573. return meanValue;
  1574. }
  1575. //三选二算法
  1576. private void ChooseBest(string a_strImgPath, out int a_nWd)
  1577. {
  1578. a_nWd = -1;
  1579. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  1580. float[] values = new float[files.Length];
  1581. double smax1 = LoGMean(files[0]);
  1582. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  1583. double smax2 = Tenengrad(files[0]);
  1584. int wdmax2 = wdmax1;
  1585. double smax3 = TTgrad(files[0]);
  1586. int wdmax3 = wdmax1;
  1587. int x = 0;
  1588. foreach (var file in files)
  1589. {
  1590. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  1591. double svalue1 = LoGMean(file);
  1592. double svalue2 = Tenengrad(file);
  1593. double svalue3 = TTgrad(file);
  1594. if (smax1 < svalue1)
  1595. {
  1596. smax1 = svalue1;
  1597. wdmax1 = wd;
  1598. }
  1599. if (smax2 < svalue2)
  1600. {
  1601. smax2 = svalue2;
  1602. wdmax2 = wd;
  1603. }
  1604. if (smax3 < svalue3)
  1605. {
  1606. smax3 = svalue3;
  1607. wdmax3 = wd;
  1608. }
  1609. x++;
  1610. }
  1611. SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  1612. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  1613. {
  1614. a_nWd = wdmax1;
  1615. SendMsg("焦距 = " + wdmax1.ToString());
  1616. }
  1617. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  1618. {
  1619. a_nWd = wdmax2;
  1620. SendMsg("焦距 = " + wdmax2.ToString());
  1621. }
  1622. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  1623. {
  1624. a_nWd = wdmax3;
  1625. SendMsg("焦距 = " + wdmax3.ToString());
  1626. }
  1627. else
  1628. {
  1629. SendMsg("对焦失败。");
  1630. }
  1631. }
  1632. }
  1633. }