Measure.cs 83 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using WebManager;
  16. using OpenCvSharp;
  17. namespace MeasureThread
  18. {
  19. //图片模式
  20. public enum ImageMode
  21. {
  22. FIB,
  23. SEM
  24. }
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. public class ThreadStatusEventArgs
  28. {
  29. //状态
  30. public Boolean State
  31. {
  32. get { return m_state; }
  33. set { m_state = value; }
  34. }
  35. private Boolean m_state;
  36. //时间
  37. public DateTime Time
  38. {
  39. get { return m_time; }
  40. set { m_time = value; }
  41. }
  42. private DateTime m_time;
  43. //步骤代码
  44. public String Step_Code
  45. {
  46. get { return step_Code; }
  47. set { step_Code = value; }
  48. }
  49. private String step_Code;
  50. //其他消息
  51. public String Message
  52. {
  53. get { return this.message; }
  54. set { this.message = value; }
  55. }
  56. private String message;
  57. //孔名
  58. public String HoleName
  59. {
  60. get { return this.holeName; }
  61. set { this.holeName = value; }
  62. }
  63. private String holeName;
  64. //图片信息
  65. public class PictureInformation
  66. {
  67. public String Picture_FullPath
  68. {
  69. get { return picture_FullPath; }
  70. set { picture_FullPath = value; }
  71. }
  72. private String picture_FullPath;
  73. public double Work_Voltage
  74. {
  75. get { return work_Voltage; }
  76. set { work_Voltage = value; }
  77. }
  78. private double work_Voltage;
  79. public double Magnification
  80. {
  81. get { return magnification; }
  82. set { magnification = value; }
  83. }
  84. private double magnification;
  85. public double Work_Distance
  86. {
  87. get { return work_Distance; }
  88. set { work_Distance = value; }
  89. }
  90. private double work_Distance;
  91. public String Work_Status
  92. {
  93. get { return work_Status; }
  94. set { work_Status = value; }
  95. }
  96. private String work_Status;
  97. }
  98. //图片信息实例类
  99. public PictureInformation Picture_Information
  100. {
  101. get { return picture_Information; }
  102. set { picture_Information = value; }
  103. }
  104. private PictureInformation picture_Information;
  105. //图像信息
  106. public class ImageInformation
  107. {
  108. public int Method_Name
  109. {
  110. get { return method_Name; }
  111. set { method_Name = value; }
  112. }
  113. private int method_Name;
  114. public Source_Img_Degree_Direction SIDD;
  115. public Cut_Position CP;
  116. public Cut_Success CS;
  117. public Trapezoid_Top_Center_Position TTCP;
  118. public Auto_Foucs AF;
  119. public Auto_Stigmatic AS;
  120. public Center_Position_OffsetAngle_Direction CPOD;
  121. public Measure_Size MS;
  122. public ImageInformation()
  123. {
  124. SIDD = new Source_Img_Degree_Direction();
  125. CP = new Cut_Position();
  126. CS = new Cut_Success();
  127. TTCP = new Trapezoid_Top_Center_Position();
  128. AF = new Auto_Foucs();
  129. AS = new Auto_Stigmatic();
  130. CPOD = new Center_Position_OffsetAngle_Direction();
  131. MS = new Measure_Size();
  132. }
  133. //1-计算原始图像偏移角度及方向
  134. public class Source_Img_Degree_Direction
  135. {
  136. public Boolean Is_Image = false;
  137. public double Degree
  138. {
  139. get { return degree; }
  140. set { degree = value; }
  141. }
  142. private double degree;
  143. public int Direction
  144. {
  145. get { return direction; }
  146. set { direction = value; }
  147. }
  148. private int direction;
  149. public int State
  150. {
  151. get { return state; }
  152. set { state = value; }
  153. }
  154. private int state;
  155. }
  156. //2-计算切割点位置
  157. public class Cut_Position
  158. {
  159. public Boolean Is_Image = false;
  160. public double Offsetx
  161. {
  162. get { return offsetx; }
  163. set { offsetx = value; }
  164. }
  165. private double offsetx;
  166. public double Offsety
  167. {
  168. get { return offsety; }
  169. set { offsety = value; }
  170. }
  171. private double offsety;
  172. public int State
  173. {
  174. get { return state; }
  175. set { state = value; }
  176. }
  177. private int state;
  178. }
  179. //3-是否切割成功
  180. public class Cut_Success
  181. {
  182. public Boolean Is_Image = false;
  183. public int State
  184. {
  185. get { return state; }
  186. set { state = value; }
  187. }
  188. private int state;
  189. }
  190. //4-计算切割后图像梯形区域上边中心点坐标
  191. public class Trapezoid_Top_Center_Position
  192. {
  193. public Boolean Is_Image = false;
  194. public double TopCenterX
  195. {
  196. get { return topCenterX; }
  197. set { topCenterX = value; }
  198. }
  199. private double topCenterX;
  200. public double TopCenterY
  201. {
  202. get { return topCenterY; }
  203. set { topCenterY = value; }
  204. }
  205. private double topCenterY;
  206. public int State
  207. {
  208. get { return state; }
  209. set { state = value; }
  210. }
  211. private int state;
  212. }
  213. //5-自动对焦
  214. public class Auto_Foucs
  215. {
  216. public Boolean Is_Image = true;
  217. public String Img_Path
  218. {
  219. get { return img_Path; }
  220. set { img_Path = value; }
  221. }
  222. private String img_Path;
  223. }
  224. //6-自动像闪
  225. public class Auto_Stigmatic
  226. {
  227. public Boolean Is_Image = true;
  228. public String Img_Path
  229. {
  230. get { return img_Path; }
  231. set { img_Path = value; }
  232. }
  233. private String img_Path;
  234. }
  235. //7-计算切割面区域中心坐标,以及偏移角度及方向
  236. public class Center_Position_OffsetAngle_Direction
  237. {
  238. public Boolean Is_Image = false;
  239. public double CenterX
  240. {
  241. get { return centerX; }
  242. set { centerX = value; }
  243. }
  244. private double centerX;
  245. public double CenterY
  246. {
  247. get { return centerY; }
  248. set { centerY = value; }
  249. }
  250. private double centerY;
  251. public double Degree
  252. {
  253. get { return degree; }
  254. set { degree = value; }
  255. }
  256. private double degree;
  257. public int Direction
  258. {
  259. get { return direction; }
  260. set { direction = value; }
  261. }
  262. private int direction;
  263. public int State
  264. {
  265. get { return state; }
  266. set { state = value; }
  267. }
  268. private int state;
  269. }
  270. //8-测量尺寸
  271. public class Measure_Size
  272. {
  273. public Boolean Is_Image = false;
  274. public int State
  275. {
  276. get { return state; }
  277. set { state = value; }
  278. }
  279. private int state;
  280. }
  281. }
  282. //图像信息实例类
  283. public ImageInformation Image_Information
  284. {
  285. get { return image_Information; }
  286. set { image_Information = value; }
  287. }
  288. private ImageInformation image_Information;
  289. public ThreadStatusEventArgs(string a_State)
  290. {
  291. picture_Information = new PictureInformation();
  292. image_Information = new ImageInformation();
  293. }
  294. }
  295. public class CutHolesStatusEventArgs
  296. {
  297. public string State
  298. {
  299. get { return m_state; }
  300. set { m_state = value; }
  301. }
  302. private string m_state;
  303. public string HoleName
  304. {
  305. get { return m_holeName; }
  306. set { m_holeName = value; }
  307. }
  308. private string m_holeName;
  309. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  310. {
  311. this.m_state = a_state;
  312. this.m_holeName = a_holeName;
  313. }
  314. }
  315. public class Measure
  316. {
  317. /// <summary>
  318. /// 图像拉直算法
  319. /// </summary>
  320. /// <param name="Slope">倾斜角度</param>
  321. /// <param name="x0">圆心坐标x</param>
  322. /// <param name="y0">圆心坐标y</param>
  323. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  324. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  325. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  326. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  327. /// <returns></returns>
  328. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  329. {
  330. try
  331. {
  332. double xr = x1 - x0;//倾斜图到中心的距离差x
  333. double yr = y1 - y0;//倾斜图到中心的距离差y
  334. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  335. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  336. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  337. double k_S = k - Slope;//通过夹角差求x2,y2
  338. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  339. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  340. if (Slope > 0 || Slope < 0)
  341. {
  342. Hx = x1 - x2;
  343. Hy = y1 - y2;
  344. }
  345. else
  346. {
  347. Hx = 0;
  348. Hy = 0;
  349. }
  350. return true;
  351. }
  352. catch (Exception)
  353. {
  354. return false;
  355. }
  356. }
  357. public WebResult wr = null;
  358. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  359. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  360. //定义一个全局的消息类
  361. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  362. //全局只有一个fatorySEM
  363. static FactoryHardware factorySEM = FactoryHardware.Instance;
  364. ISEMControl iSEM = factorySEM.ISEM;
  365. //@的作用是不用转义字符\\只打一个就行
  366. const String ImageName1 = @"ImageSEMH.tif"; //传给客户,作水平校正
  367. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  368. const String ImageName31 = @"ImageFIBBefore.tif";
  369. const String ImageName32 = @"ImageFIBAfter.tif";
  370. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  371. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  372. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  373. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  374. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  375. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  376. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  377. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  378. const String ElyDeposition = @"Deposition.ely"; //沉积
  379. const String ElyCrossSection = @"CrossSection.ely"; //切割
  380. const float fMin = (float)0.0000002; //单位是米
  381. public Boolean key_stop = false;
  382. String focus_path = "";
  383. String data_path = "";
  384. int m_nWorkHoleNo = -1;
  385. //测量文件
  386. private MeasureFile m_measureFile;
  387. public MeasureFile MeasureFile
  388. {
  389. get { return this.m_measureFile; }
  390. set { this.m_measureFile = value; }
  391. }
  392. //测量的切割孔
  393. private List<MeasureData.CutHole> m_cutHoles;
  394. public List<MeasureData.CutHole> cutHoles
  395. {
  396. get { return this.m_cutHoles; }
  397. set { this.m_cutHoles = value; }
  398. }
  399. //工作文件夹
  400. private string m_WorkingFolder;
  401. public string WorkingFolder
  402. {
  403. get { return this.m_WorkingFolder; }
  404. set { this.m_WorkingFolder = value; }
  405. }
  406. //程序当前路径
  407. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  408. //线程状态
  409. private ThreadStatus m_ThreadStatus;
  410. public ThreadStatus TStatus
  411. {
  412. get { return this.m_ThreadStatus; }
  413. set { this.m_ThreadStatus = value; }
  414. }
  415. //测量参数
  416. private MeasureParam m_MsParam;
  417. public MeasureParam MeasParam
  418. {
  419. get { return this.m_MsParam; }
  420. set { this.m_MsParam = value; }
  421. }
  422. //
  423. //构造函数
  424. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  425. {
  426. MeasParam = new MeasureParam();
  427. TStatus = new ThreadStatus();
  428. cutHoles = new List<MeasureData.CutHole>();
  429. //配置远程连接
  430. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  431. }
  432. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  433. public bool InitMeas(MeasureFile a_measureFile)
  434. {
  435. m_measureFile = a_measureFile;
  436. List<CutHole> listHoles = m_measureFile.ListCutHole;
  437. foreach (CutHole h in listHoles)
  438. {
  439. if (h.SWITCH == true)
  440. {
  441. m_cutHoles.Add(h);
  442. }
  443. }
  444. if (m_cutHoles.Count == 0)
  445. return false;
  446. this.m_MsParam = m_measureFile.MParam;
  447. return true;
  448. }
  449. public void SendMsg(string step_code)
  450. {
  451. arg.Step_Code = step_code;
  452. arg.Time = DateTime.Now;
  453. //switch(step_code)
  454. //{
  455. // //拍照
  456. // case "1-4":
  457. // case "1-6":
  458. // case "1-11":
  459. // case "1-13":
  460. // case "1-19":
  461. // case "1-25":
  462. // case "1-29":
  463. // //电压、放大倍数、工作距离、位置信息、图片路径
  464. // break;
  465. // case "1-10":
  466. // case "1-18":
  467. // //获取偏移信息
  468. // break;
  469. // case "1-12":
  470. // case "1-20":
  471. // //验证移动准备性
  472. // break;
  473. // case "1-26":
  474. // //取消电子束校正并初始化
  475. // break;
  476. // default:
  477. // arg.State = "1";
  478. // break;
  479. //}
  480. SendThreadStatus(this, arg);
  481. }
  482. public void SendCutHoleMsg(string a_state, string a_holeName)
  483. {
  484. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  485. arg.HoleName = a_holeName;
  486. arg.State = a_state;
  487. SendCutHolesStatus(this, arg);
  488. }
  489. //测量流程
  490. public void DoMeasure()
  491. {
  492. //创建线程的测量状态的更新
  493. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  494. if (SendThreadStatus != null)
  495. {
  496. //SendMsg("开始测量。");
  497. }
  498. LogManager.AddHardwareLog("开始测量",true);
  499. //检查硬件连接是否正常
  500. if (!ConnectHardware())
  501. {
  502. //SendMsg("连接硬件失败。");
  503. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  504. return;
  505. }
  506. //SendMsg("硬件连接成功。");
  507. //设置工作文件夹
  508. if (!SetWorkingFolderStr())
  509. {
  510. //SendMsg("设置工作文件夹失败");
  511. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  512. return;
  513. }
  514. //SendMsg("创建工作文件路径为" + WorkingFolder);
  515. float[] firstPosition;
  516. //将停止键复位
  517. key_stop = false;
  518. for (int i = 0; i < m_cutHoles.Count; i++)
  519. {
  520. m_nWorkHoleNo = i;
  521. arg.HoleName = m_cutHoles[i].HoleName;
  522. //创建文件夹,孔名文件夹结构
  523. //最终数据存放目录
  524. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  525. //对焦数据存放目录
  526. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  527. m_MsParam.AutoFocus.Path = focus_path;
  528. if (!Directory.Exists(focus_path))
  529. {
  530. Directory.CreateDirectory(focus_path);
  531. }
  532. //判断孔状态
  533. if(m_cutHoles[i].STATE != State.Unmeasured)
  534. {
  535. continue;
  536. }
  537. //开始循环工作
  538. if (i == 0)
  539. {
  540. //SendMsg("第一个切孔开始测量");
  541. //切孔操作-开始
  542. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  543. firstPosition = iSEM.GetStagePosition();
  544. //第一个孔的测试
  545. //成功
  546. if(FirstHole())
  547. {
  548. //保存文件,将测量状态更改
  549. m_cutHoles[i].STATE = State.Success;
  550. m_measureFile.Save();
  551. }
  552. //失败
  553. else
  554. {
  555. m_cutHoles[i].STATE = State.Failed;
  556. m_measureFile.Save();
  557. }
  558. //切孔操作-完成
  559. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  560. }
  561. else
  562. {
  563. //非第一个孔的测试
  564. SendMsg("第" + i.ToString() + "个切孔开始测量");
  565. //切孔操作-开始
  566. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  567. //其他孔的测试
  568. //成功
  569. if (OtherHole())
  570. {
  571. //保存文件,将测量状态更改
  572. m_cutHoles[i].STATE = State.Success;
  573. m_measureFile.Save();
  574. }
  575. //失败
  576. else
  577. {
  578. m_cutHoles[i].STATE = State.Failed;
  579. m_measureFile.Save();
  580. }
  581. //切孔操作-完成
  582. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  583. }
  584. if(key_stop)
  585. {
  586. m_cutHoles[i].STATE = State.Unmeasured;
  587. m_measureFile.Save();
  588. break;
  589. }
  590. }
  591. }
  592. //检查硬件连接是否正常
  593. public bool ConnectHardware()
  594. {
  595. //返回硬件的连接状态
  596. return iSEM.ConnectStatus();
  597. }
  598. //设置工作文件夹
  599. public bool SetWorkingFolderStr()
  600. {
  601. WorkingFolder = m_measureFile.FilePath;
  602. return true;
  603. }
  604. //插入PT针
  605. public bool InsertPT()
  606. {
  607. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  608. //SendMsg("调用宏插入PT针宏文件" + fn);
  609. iSEM.CMDMCFFilename(fn);
  610. //延时1s??
  611. Thread.Sleep(1000);
  612. return true;
  613. }
  614. //撤出PT针
  615. public bool RetractPT()
  616. {
  617. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  618. //SendMsg("调用宏撤出PT针宏文件" + fn);
  619. iSEM.CMDMCFFilename(fn);
  620. //延时1s??
  621. Thread.Sleep(1000);
  622. return true;
  623. }
  624. //PT沉积
  625. public bool PTWork()
  626. {
  627. //执行PT沉积的ELY文件
  628. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  629. //SendMsg("执行PT沉积Ely文件:" + fn);
  630. if (!ExcuteEly(fn))
  631. {
  632. return false;
  633. }
  634. //等待沉积完成
  635. while (true)
  636. {
  637. Thread.Sleep(10000);
  638. if (iSEM.GetFIBMode() == 0)
  639. {
  640. break;
  641. }
  642. }
  643. return true;
  644. }
  645. //FIB切割
  646. public bool FIBWork()
  647. {
  648. //执行PT沉积的ELY文件
  649. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  650. //SendMsg("执行FIB切割Ely文件:" + fn);
  651. if (!ExcuteEly(fn))
  652. {
  653. return false;
  654. }
  655. //等待切割完成
  656. while (true)
  657. {
  658. Thread.Sleep(10000);
  659. if (iSEM.GetFIBMode() == 0)
  660. {
  661. break;
  662. }
  663. }
  664. return true;
  665. }
  666. //执行ELY文件的步骤
  667. public bool ExcuteEly(string a_filename)
  668. {
  669. //执行ELy文件有三个动作
  670. //1. 选择ELY文件
  671. //SendMsg("选择ELY文件");
  672. if (!iSEM.CmdFIBLoadELY(a_filename))
  673. {
  674. //SendMsg("选择ELY文件失败");
  675. return false;
  676. }
  677. Thread.Sleep(1000);
  678. //2. 确认ELY文件
  679. //SendMsg("确认ELY文件");
  680. if (!iSEM.CmdFIBEXPOSUREELY())
  681. {
  682. //SendMsg("确认ELY文件失败");
  683. return false;
  684. }
  685. Thread.Sleep(1000);
  686. //3. 执行ELY文件
  687. //SendMsg("执行ELY文件");
  688. if (!iSEM.CmdFIBSTARTELY())
  689. {
  690. //SendMsg("执行ELY文件失败");
  691. return false;
  692. }
  693. Thread.Sleep(1000);
  694. return true;
  695. }
  696. //执行自动对焦
  697. public bool ImageFocus()
  698. {
  699. if (m_measureFile.MParam.FocusMode == 1)//手动
  700. {
  701. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  702. {
  703. }
  704. else
  705. {
  706. return false;
  707. }
  708. }
  709. else if(m_measureFile.MParam.FocusMode == 2)//自有自动
  710. {
  711. //郝工增加自动对焦算法
  712. //处理文件夹
  713. if (Directory.Exists(focus_path))
  714. {
  715. Directory.Delete(focus_path, true);
  716. }
  717. Directory.CreateDirectory(focus_path);
  718. //1、对焦参数类,2、输出工作距离
  719. int wd = 0;
  720. AutoFocus(m_MsParam.AutoFocus, out wd);
  721. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  722. //设置工作距离
  723. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  724. //处理图片位置
  725. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  726. }
  727. else if(m_MsParam.FocusMode == 3) //客户自动
  728. {
  729. //后期和客户对接接口
  730. List<string> filenames = new List<string>();
  731. String retfilename = wr.Img_Auto_Focus(filenames);
  732. }
  733. else //蔡司自动对焦
  734. {
  735. }
  736. return true;
  737. }
  738. /// <summary>
  739. ///13. 自动 定位功能,沉积
  740. /// </summary>
  741. /// <returns></returns>
  742. public bool GetPoistion(Boolean isFirst)
  743. {
  744. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  745. int state = 0;
  746. //1.控制SEM放大600X
  747. arg.Picture_Information.Work_Status = "FIB";
  748. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  749. {
  750. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  751. arg.State = false;
  752. SendMsg("1-1");
  753. return false;
  754. }
  755. arg.State = true;
  756. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  757. SendMsg("1-1");
  758. //判断是否停止进程
  759. if (key_stop)
  760. {
  761. return false;
  762. }
  763. //2.控制SEM自动对焦、亮度、对比度
  764. if(ImageFocus())
  765. {
  766. arg.Message = "自动对焦完成";
  767. arg.State = true;
  768. SendMsg("1-2");
  769. }
  770. else
  771. {
  772. arg.Message = "自动对焦失败";
  773. arg.State = false;
  774. SendMsg("1-2");
  775. }
  776. //判断是否停止进程
  777. if (key_stop)
  778. {
  779. return false;
  780. }
  781. //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
  782. if (!isFirst)
  783. {
  784. if (!TiltCorrection(54))
  785. {
  786. arg.Message = "设置SEM进行角度补偿54度失败";
  787. arg.State = false;
  788. SendMsg("1-3");
  789. return false;
  790. }
  791. arg.State = true;
  792. arg.Message = "设置SEM进行角度补偿54度成功";
  793. SendMsg("1-3");
  794. Thread.Sleep(5000);
  795. //判断是否停止进程
  796. if (key_stop)
  797. {
  798. return false;
  799. }
  800. }
  801. //4.控制SEM拍照,5保存照片=====需要更改路径
  802. String fileName1 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  803. arg.Picture_Information.Picture_FullPath = fileName1;
  804. arg.Picture_Information.Work_Status = "SEM";
  805. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  806. Thread.Sleep(1000);
  807. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  808. Thread.Sleep(1000);
  809. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  810. Thread.Sleep(1000);
  811. if (!GetImage(ImageMode.SEM, fileName1))
  812. {
  813. arg.Message = "SEM拍照失败";
  814. arg.State = false;
  815. SendMsg("1-4");
  816. return false;
  817. }
  818. arg.State = true;
  819. arg.Message = "SEM拍照成功";
  820. SendMsg("1-4");
  821. Thread.Sleep(3000);
  822. //判断是否停止进程
  823. if (key_stop)
  824. {
  825. return false;
  826. }
  827. //判断是否为仅拍照,不是则执行FIB操作
  828. if (!m_MsParam.Is_Photograph)
  829. {
  830. //6.设置FIB拍照参数——扫描时间、束流等
  831. //7.控制FIB自动亮度、对比度
  832. if (!iSEM.CmdFIBModeFIB())
  833. {
  834. arg.Message = "FIB模式切换失败";
  835. arg.State = false;
  836. SendMsg("1-5");
  837. return false;
  838. }
  839. arg.State = true;
  840. arg.Picture_Information.Work_Status = "FIB";
  841. arg.Message = "FIB模式切换成功";
  842. SendMsg("1-5");
  843. Thread.Sleep(10000);
  844. //判断是否停止进程
  845. if (key_stop)
  846. {
  847. return false;
  848. }
  849. //8.控制FIB拍照
  850. //9.保存照片======更改路径
  851. String fileName2 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  852. arg.Picture_Information.Picture_FullPath = fileName2;
  853. arg.Picture_Information.Work_Status = "FIB";
  854. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  855. Thread.Sleep(1000);
  856. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  857. Thread.Sleep(1000);
  858. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  859. Thread.Sleep(1000);
  860. if (!GetImage(ImageMode.FIB, fileName2))
  861. {
  862. arg.Message = "FIB拍照失败";
  863. arg.State = false;
  864. SendMsg("1-6");
  865. return false;
  866. }
  867. arg.State = true;
  868. arg.Message = "FIB拍照成功";
  869. SendMsg("1-6");
  870. Thread.Sleep(3000);
  871. //判断是否停止进程
  872. if (key_stop)
  873. {
  874. return false;
  875. }
  876. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  877. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  878. {
  879. arg.Message = "样品台移动到指定位置";
  880. arg.State = true;
  881. SendMsg("1-7");
  882. }
  883. else
  884. {
  885. wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  886. if (state == 1)
  887. {
  888. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  889. if (!iSEM.MoveStageXY(x1, y1))
  890. {
  891. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  892. arg.State = false;
  893. SendMsg("1-7");
  894. return false;
  895. }
  896. //判断是否移动完成
  897. while (true)
  898. {
  899. Thread.Sleep(5000);
  900. if (iSEM.GetStageIs() == 0)
  901. {
  902. break;
  903. }
  904. }
  905. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  906. arg.State = true;
  907. SendMsg("1-7");
  908. }
  909. else
  910. {
  911. arg.Message = "样品台移动失败";
  912. arg.State = false;
  913. SendMsg("1-7");
  914. return false;
  915. }
  916. }
  917. //判断是否停止进程
  918. if (key_stop)
  919. {
  920. return false;
  921. }
  922. //11.自动工具样品类型参数确定是否需要PT沉积
  923. if (m_MsParam.PT)
  924. {
  925. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  926. //第10步已经移动好位置
  927. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  928. x0 = iSEM.GetStageAtX();
  929. y0 = iSEM.GetStageAtY();
  930. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  931. {
  932. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
  933. arg.State = false;
  934. SendMsg("1-8");
  935. return false;
  936. }
  937. arg.State = true;
  938. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
  939. SendMsg("1-8");
  940. //判断是否停止进程
  941. if (key_stop)
  942. {
  943. return false;
  944. }
  945. //3. 根据坐标进行PT沉积
  946. if (!PTWork())
  947. {
  948. arg.Message = "PT沉积失败";
  949. arg.State = false;
  950. SendMsg("1-9");
  951. return false;
  952. }
  953. arg.State = true;
  954. arg.Message = "PT沉积成功";
  955. SendMsg("1-9");
  956. //判断是否停止进程
  957. if (key_stop)
  958. {
  959. return false;
  960. }
  961. }
  962. }
  963. //12.根据梯形坐标控制FIB调整到中心位置
  964. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  965. //以上两步已经将程序移动到11内部去做
  966. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  967. float[] firstPosition = iSEM.GetStagePosition();
  968. m_cutHoles[0].Position.X = firstPosition[0];
  969. m_cutHoles[0].Position.Y = firstPosition[1];
  970. m_cutHoles[0].Position.Z = firstPosition[2];
  971. m_cutHoles[0].Position.T = firstPosition[3];
  972. m_cutHoles[0].Position.R = firstPosition[4];
  973. m_cutHoles[0].Position.M = firstPosition[5];
  974. //这里要调用文件保存功能
  975. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  976. + firstPosition[1].ToString() + ","
  977. + firstPosition[2].ToString() + ","
  978. + firstPosition[3].ToString() + ","
  979. + firstPosition[4].ToString() + ","
  980. + firstPosition[5].ToString() + ")";
  981. arg.State = true;
  982. SendMsg("1-10");
  983. //判断是否停止进程
  984. if (key_stop)
  985. {
  986. return false;
  987. }
  988. return true;
  989. }
  990. /// <summary>
  991. /// 14. FIB切割
  992. /// </summary>
  993. /// <returns></returns>
  994. public bool FIBCross()
  995. {
  996. int state = 0;
  997. //切之前拍照保存,,
  998. String fileName31 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName31;
  999. arg.Picture_Information.Picture_FullPath = fileName31;
  1000. arg.Picture_Information.Work_Status = "FIB";
  1001. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1002. Thread.Sleep(1000);
  1003. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1004. Thread.Sleep(1000);
  1005. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1006. Thread.Sleep(1000);
  1007. if (!GetImage(ImageMode.FIB, fileName31))
  1008. {
  1009. arg.Message = "FIB切割前拍照失败";
  1010. arg.State = false;
  1011. SendMsg("1-11");
  1012. return false;
  1013. }
  1014. arg.State = true;
  1015. arg.Message = "FIB切割前拍照成功";
  1016. SendMsg("1-11");
  1017. //判断是否停止进程
  1018. if (key_stop)
  1019. {
  1020. return false;
  1021. }
  1022. //14.自动控制FIB切割
  1023. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1024. //2.控制FIB进行切割
  1025. //以上1、2步全部用ELY文件代替
  1026. if (!FIBWork())
  1027. {
  1028. arg.Message = "FIB切割失败";
  1029. arg.State = false;
  1030. SendMsg("1-12");
  1031. return false;
  1032. }
  1033. arg.State = true;
  1034. arg.Message = "FIB切割成功";
  1035. SendMsg("1-12");
  1036. Thread.Sleep(5000);
  1037. //判断是否停止进程
  1038. if (key_stop)
  1039. {
  1040. return false;
  1041. }
  1042. //3.控制FIB拍照600X
  1043. //底层没有控制方法。
  1044. //4.保存图片
  1045. String fileName32 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName32;
  1046. arg.Picture_Information.Picture_FullPath = fileName32;
  1047. arg.Picture_Information.Work_Status = "FIB";
  1048. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1049. Thread.Sleep(1000);
  1050. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1051. Thread.Sleep(1000);
  1052. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1053. Thread.Sleep(1000);
  1054. if (!GetImage(ImageMode.FIB, fileName32))
  1055. {
  1056. arg.Message = "FIB切割后拍照失败";
  1057. arg.State = false;
  1058. SendMsg("1-13");
  1059. return false;
  1060. }
  1061. arg.State = true;
  1062. arg.Message = "FIB切割后拍照成功";
  1063. SendMsg("1-13");
  1064. Thread.Sleep(3000);
  1065. //判断是否停止进程
  1066. if (key_stop)
  1067. {
  1068. return false;
  1069. }
  1070. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1071. wr.Img_Cut_Success(fileName31, fileName32, out state);
  1072. if(state == 0)
  1073. {
  1074. arg.Message = "FIB切割校验失败";
  1075. arg.State = false;
  1076. SendMsg("1-14");
  1077. return false;
  1078. }
  1079. arg.State = true;
  1080. arg.Message = "FIB切割校验成功";
  1081. SendMsg("1-14");
  1082. //判断是否停止进程
  1083. if (key_stop)
  1084. {
  1085. return false;
  1086. }
  1087. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1088. //拍完照自动解冻,这里不做处理。
  1089. return true;
  1090. }
  1091. /// <summary>
  1092. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1093. /// </summary>
  1094. /// <returns></returns>
  1095. public bool FindCross()
  1096. {
  1097. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1098. float angle = 0;
  1099. int direction = 0;
  1100. int state = 0;
  1101. //切换到SEM模式
  1102. if (!iSEM.CmdFIBModeSEM())
  1103. {
  1104. arg.Message = "SEM模式切换失败";
  1105. arg.State = false;
  1106. SendMsg("1-16");
  1107. return false;
  1108. }
  1109. arg.State = true;
  1110. arg.Message = "SEM模式切换成功";
  1111. SendMsg("1-16");
  1112. arg.Picture_Information.Work_Status = "SEM";
  1113. Thread.Sleep(10000);
  1114. //判断是否停止进程
  1115. if (key_stop)
  1116. {
  1117. return false;
  1118. }
  1119. //1.控制SEM放大到300倍
  1120. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/2))
  1121. {
  1122. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 2).ToString("0.0") + "倍失败";
  1123. arg.State = false;
  1124. SendMsg("1-17");
  1125. return false;
  1126. }
  1127. arg.State = true;
  1128. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/2).ToString("0.0") + "倍成功";
  1129. SendMsg("1-17");
  1130. //判断是否停止进程
  1131. if (key_stop)
  1132. {
  1133. return false;
  1134. }
  1135. //2.控制SEM自动对焦、亮度、对比度-接口,,将自动对焦提出单独函数调用
  1136. if (ImageFocus())
  1137. {
  1138. arg.Message = "自动对焦完成";
  1139. arg.State = true;
  1140. SendMsg("1-18");
  1141. }
  1142. else
  1143. {
  1144. arg.Message = "自动对焦失败";
  1145. arg.State = false;
  1146. SendMsg("1-18");
  1147. }
  1148. Thread.Sleep(5000);
  1149. //判断是否停止进程
  1150. if (key_stop)
  1151. {
  1152. return false;
  1153. }
  1154. //3.控制SEM拍照
  1155. String fileName4 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
  1156. arg.Picture_Information.Picture_FullPath = fileName4;
  1157. arg.Picture_Information.Work_Status = "SEM";
  1158. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1159. Thread.Sleep(1000);
  1160. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1161. Thread.Sleep(1000);
  1162. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1163. Thread.Sleep(1000);
  1164. if (!GetImage(ImageMode.SEM, fileName4))
  1165. {
  1166. arg.State = false;
  1167. arg.Message = "SEM拍照失败";
  1168. SendMsg("1-19");
  1169. return false;
  1170. }
  1171. arg.State = true;
  1172. arg.Message = "SEM拍照成功";
  1173. SendMsg("1-19");
  1174. Thread.Sleep(3000);
  1175. //判断是否停止进程
  1176. if (key_stop)
  1177. {
  1178. return false;
  1179. }
  1180. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1181. //5.根据坐标控制SEM移动到切孔位置,居中
  1182. //这里是否用到拉直操作,我没有加
  1183. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1184. {
  1185. arg.State = true;
  1186. arg.Message = "样品台移动到指定位置";
  1187. SendMsg("1-20");
  1188. }
  1189. else
  1190. {
  1191. wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName,
  1192. m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
  1193. if (state == 1)
  1194. {
  1195. //拉直操作
  1196. Straightening(angle, 65, 65, x1, y1, ref x2, ref y2);
  1197. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1198. if (!iSEM.MoveStageXY(x2, y2))
  1199. {
  1200. arg.State = false;
  1201. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1202. SendMsg("1-20");
  1203. return false;
  1204. }
  1205. //判断是否移动完成
  1206. while (true)
  1207. {
  1208. Thread.Sleep(5000);
  1209. if (iSEM.GetStageIs() == 0)
  1210. {
  1211. break;
  1212. }
  1213. }
  1214. arg.State = true;
  1215. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1216. SendMsg("1-20");
  1217. }
  1218. else
  1219. {
  1220. arg.Message = "样品台移动失败";
  1221. arg.State = false;
  1222. SendMsg("1-20");
  1223. return false;
  1224. }
  1225. }
  1226. //判断是否停止进程
  1227. if (key_stop)
  1228. {
  1229. return false;
  1230. }
  1231. //6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1232. x0 = iSEM.GetStageAtX();
  1233. y0 = iSEM.GetStageAtY();
  1234. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1235. {
  1236. arg.Message = "位置校验失败";
  1237. arg.State = false;
  1238. SendMsg("1-21");
  1239. return false;
  1240. }
  1241. arg.State = true;
  1242. arg.Message = "位置校验成功";
  1243. SendMsg("1-21");
  1244. //判断是否停止进程
  1245. if (key_stop)
  1246. {
  1247. return false;
  1248. }
  1249. return true;
  1250. }
  1251. /// <summary>
  1252. /// 17.自动控制SEM拍截面照
  1253. /// </summary>
  1254. /// <returns></returns>
  1255. public bool ShotSection(ref String image18)
  1256. {
  1257. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1258. int state = 0;
  1259. //1、放大6000倍,放大倍数参数photograph_
  1260. if (!iSEM.SetMagnification(m_MsParam.Photograph_Magnification))
  1261. {
  1262. arg.Message = "放大倍数调整失败";
  1263. arg.State = false;
  1264. SendMsg("1-22");
  1265. return false;
  1266. }
  1267. arg.Message = "放大倍数调整成功";
  1268. arg.State = true;
  1269. SendMsg("1-22");
  1270. //判断是否停止进程
  1271. if (key_stop)
  1272. {
  1273. return false;
  1274. }
  1275. //2.控制SEM自动对焦、亮度、对比度-接口
  1276. if (ImageFocus())
  1277. {
  1278. arg.Message = "自动对焦完成";
  1279. arg.State = true;
  1280. SendMsg("1-23");
  1281. }
  1282. else
  1283. {
  1284. arg.Message = "自动对焦失败";
  1285. arg.State = false;
  1286. SendMsg("1-23");
  1287. }
  1288. //判断是否停止进程
  1289. if (key_stop)
  1290. {
  1291. return false;
  1292. }
  1293. //3、设置SEM补偿角度
  1294. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1295. {
  1296. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1297. arg.State = false;
  1298. SendMsg("1-24");
  1299. return false;
  1300. }
  1301. arg.State = true;
  1302. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1303. SendMsg("1-24");
  1304. Thread.Sleep(5000);
  1305. //判断是否停止进程
  1306. if (key_stop)
  1307. {
  1308. return false;
  1309. }
  1310. //4、拍照,5、保存照片
  1311. String fileName5 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
  1312. arg.Picture_Information.Picture_FullPath = fileName5;
  1313. arg.Picture_Information.Work_Status = "SEM";
  1314. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1315. Thread.Sleep(1000);
  1316. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1317. Thread.Sleep(1000);
  1318. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1319. Thread.Sleep(1000);
  1320. if (!GetImage(ImageMode.SEM, fileName5))
  1321. {
  1322. arg.Message = "SEM拍照失败";
  1323. arg.State = false;
  1324. SendMsg("1-25");
  1325. return false;
  1326. }
  1327. arg.State = true;
  1328. arg.Message = "SEM拍照成功";
  1329. SendMsg("1-25");
  1330. Thread.Sleep(3000);
  1331. //判断是否停止进程
  1332. if (key_stop)
  1333. {
  1334. return false;
  1335. }
  1336. //6、获取偏移坐标,7、移动到位
  1337. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1338. {
  1339. arg.Message = "样品台移动到指定位置";
  1340. arg.State = true;
  1341. SendMsg("1-26");
  1342. }
  1343. else
  1344. {
  1345. //8,图像T形
  1346. wr.Img_Trapezoid_Top_Center_Position(fileName5, out x1, out y1, out state);
  1347. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1348. if (state == 1)
  1349. {
  1350. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1351. if (!iSEM.MoveStageXY(x1, y1))
  1352. {
  1353. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1354. arg.State = false;
  1355. SendMsg("1-26");
  1356. return false;
  1357. }
  1358. //判断是否移动完成
  1359. while (true)
  1360. {
  1361. Thread.Sleep(5000);
  1362. if (iSEM.GetStageIs() == 0)
  1363. {
  1364. break;
  1365. }
  1366. }
  1367. arg.State = true;
  1368. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1369. SendMsg("1-26");
  1370. }
  1371. else
  1372. {
  1373. arg.Message = "样品台移动失败";
  1374. arg.State = false;
  1375. SendMsg("1-26");
  1376. return false;
  1377. }
  1378. }
  1379. //判断是否停止进程
  1380. if (key_stop)
  1381. {
  1382. return false;
  1383. }
  1384. //8、验证移动准确性
  1385. x0 = iSEM.GetStageAtX();
  1386. y0 = iSEM.GetStageAtY();
  1387. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1388. {
  1389. arg.Message = "位置校验失败";
  1390. arg.State = false;
  1391. SendMsg("1-27");
  1392. return false;
  1393. }
  1394. arg.State = true;
  1395. arg.Message = "位置校验成功";
  1396. SendMsg("1-27");
  1397. //判断是否停止进程
  1398. if (key_stop)
  1399. {
  1400. return false;
  1401. }
  1402. //9、-10不操作
  1403. //11、自动对焦。与之前操作相同
  1404. if (ImageFocus())
  1405. {
  1406. arg.Message = "自动对焦完成";
  1407. arg.State = true;
  1408. SendMsg("1-28");
  1409. }
  1410. else
  1411. {
  1412. arg.Message = "自动对焦失败";
  1413. arg.State = false;
  1414. SendMsg("1-28");
  1415. }
  1416. //判断是否停止进程
  1417. if (key_stop)
  1418. {
  1419. return false;
  1420. }
  1421. //12拍照
  1422. String fileName6 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1423. arg.Picture_Information.Picture_FullPath = fileName6;
  1424. arg.Picture_Information.Work_Status = "SEM";
  1425. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1426. Thread.Sleep(1000);
  1427. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1428. Thread.Sleep(1000);
  1429. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1430. Thread.Sleep(1000);
  1431. if (!GetImage(ImageMode.SEM, fileName6))
  1432. {
  1433. arg.Message = "SEM拍照失败";
  1434. arg.State = false;
  1435. SendMsg("1-29");
  1436. return false;
  1437. }
  1438. arg.State = true;
  1439. image18 = fileName6;
  1440. arg.Message = "SEM拍照成功";
  1441. SendMsg("1-29");
  1442. Thread.Sleep(3000);
  1443. //判断是否停止进程
  1444. if (key_stop)
  1445. {
  1446. return false;
  1447. }
  1448. //14光束复位
  1449. iSEM.SetBeamShiftX(0);
  1450. iSEM.SetBeamShiftY(0);
  1451. Thread.Sleep(3000);
  1452. arg.Message = "光束复位成功";
  1453. arg.State = true;
  1454. SendMsg("1-30");
  1455. //判断是否停止进程
  1456. if (key_stop)
  1457. {
  1458. return false;
  1459. }
  1460. return true;
  1461. }
  1462. //第一个孔的测试过程
  1463. public bool FirstHole()
  1464. {
  1465. MeasureData.CutHole firstHole = m_cutHoles[0];
  1466. //首先默认为SEM模式
  1467. arg.Picture_Information.Work_Status = "SEM";
  1468. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1469. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1470. {
  1471. if (!InsertPT())
  1472. {
  1473. arg.Message = "插入PT针失败";
  1474. SendMsg("1-0");
  1475. return false;
  1476. }
  1477. arg.Message = "插入PT针成功";
  1478. SendMsg("1-0");
  1479. }
  1480. //判断是否停止进程
  1481. if (key_stop)
  1482. {
  1483. return false;
  1484. }
  1485. //13. 自动 定位功能
  1486. if (!GetPoistion(true))
  1487. {
  1488. return false;
  1489. }
  1490. //判断是否停止进程
  1491. if (key_stop)
  1492. {
  1493. return false;
  1494. }
  1495. //14.自动控制FIB切割
  1496. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1497. {
  1498. if (!FIBCross())
  1499. {
  1500. return false;
  1501. }
  1502. }
  1503. //判断是否停止进程
  1504. if (key_stop)
  1505. {
  1506. return false;
  1507. }
  1508. //15.根据样品类型决定是否撤出PT针
  1509. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1510. {
  1511. if (!RetractPT())
  1512. {
  1513. arg.Message = "撤出PT针失败";
  1514. SendMsg("1-15");
  1515. return false;
  1516. }
  1517. arg.Message = "撤出PT针成功";
  1518. SendMsg("1-15");
  1519. }
  1520. //判断是否停止进程
  1521. if (key_stop)
  1522. {
  1523. return false;
  1524. }
  1525. // 16.找到切割位置
  1526. if (!FindCross())
  1527. {
  1528. return false;
  1529. }
  1530. //判断是否停止进程
  1531. if (key_stop)
  1532. {
  1533. return false;
  1534. }
  1535. //将过程17最后的拍照图片提出给18步进行调用
  1536. String img18 = "";
  1537. //17.自动控制SEM拍截面照
  1538. if (m_MsParam.Is_Photograph == false)
  1539. {
  1540. if (!ShotSection(ref img18))
  1541. {
  1542. arg.Message = "自动控制SEM拍截面照失败";
  1543. SendMsg("1-33");
  1544. return false;
  1545. }
  1546. arg.Message = "自动控制SEM拍截面照成功";
  1547. SendMsg("1-33");
  1548. }
  1549. //判断是否停止进程
  1550. if (key_stop)
  1551. {
  1552. return false;
  1553. }
  1554. //18.自动层高分析
  1555. float size = iSEM.GetPixelSize();
  1556. float mag = iSEM.GetMagnification();
  1557. int state = 0;
  1558. wr.Img_Measure_Size(img18, mag, size, out state);
  1559. if(state==0)
  1560. {
  1561. arg.Message = "测量尺寸失败";
  1562. SendMsg("1-31");
  1563. return false;
  1564. }
  1565. arg.Message = "测量尺寸成功";
  1566. SendMsg("1-31");
  1567. #region 测试程序
  1568. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  1569. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  1570. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1571. //{
  1572. // SendMsg("拍摄照片完成");
  1573. // //return true;
  1574. //}
  1575. //else
  1576. //{
  1577. // SendMsg("拍摄照片失败");
  1578. // return false;
  1579. //}
  1580. //SendMsg("图像校正36度");
  1581. ////3.设置SEM角度补偿cos36度
  1582. //if (!TiltCorrection(36))
  1583. //{
  1584. // return false;
  1585. //}
  1586. //Thread.Sleep(3000);
  1587. //string fn;
  1588. //用宏抓一般图
  1589. //Thread.Sleep(5000);
  1590. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1591. //SendMsg("用宏抓一般图" + fn);
  1592. //iSEM.CMDMCFFilename(fn);
  1593. ////延时1s??
  1594. //Thread.Sleep(5000);
  1595. ////用宏抓好图
  1596. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1597. //SendMsg("用宏抓好图" + fn);
  1598. //iSEM.CMDMCFFilename(fn);
  1599. ////延时1s??
  1600. //Thread.Sleep(30000);
  1601. //Thread.Sleep(10000);
  1602. //WorkingFolder = m_measureFile.FilePath;
  1603. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1604. //SendMsg("SEM拍照存储到" + fileName6);
  1605. //if (!GetImage(ImageMode.SEM, fileName6))
  1606. //{
  1607. // SendMsg("SEM拍照失败");
  1608. // return false;
  1609. //}
  1610. ////用宏抓标志图
  1611. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1612. //SendMsg("用宏抓标志图" + fn);
  1613. //iSEM.CMDMCFFilename(fn);
  1614. ////延时1s??
  1615. //Thread.Sleep(30000);
  1616. //Thread.Sleep(5000);
  1617. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1618. //SendMsg("用宏抓一般图" + fn);
  1619. //iSEM.CMDMCFFilename(fn);
  1620. ////延时1s??
  1621. //Thread.Sleep(5000);
  1622. //SendMsg("所有图结束");
  1623. ////17.自动控制SEM拍截面照
  1624. //{
  1625. // //1.控制SEM放大到指定参数大小范围,6000x
  1626. // if (!iSEM.SetMagnification(6000))
  1627. // {
  1628. // return false;
  1629. // }
  1630. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1631. // if (!MeasParam.FocusMode)
  1632. // {
  1633. // //弹出手动对焦的窗口
  1634. // }
  1635. // else
  1636. // {
  1637. // //调用自动对焦模块
  1638. // }
  1639. // //3.设置SEM角度补偿cos36度
  1640. // if (!TiltCorrection(36))
  1641. // {
  1642. // return false;
  1643. // }
  1644. // //4.控制SEM拍照
  1645. // //5.保存照片4
  1646. // String fileName5 = WorkingFolder + ImageName5;
  1647. // if (!GetImage(ImageMode.SEM, fileName5))
  1648. // {
  1649. // return false;
  1650. // }
  1651. // //6.将照片传给客户,获取偏移坐标
  1652. // float x6 = 0, y6 = 0;
  1653. // float angle1 = 0;
  1654. // float mage = 10000;
  1655. // //7.根据坐标控制SEM移动到分析位置
  1656. // if (!iSEM.MoveStageXY(x6, y6))
  1657. // {
  1658. // return false;
  1659. // }
  1660. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1661. // float x7 = iSEM.GetStageAtX();
  1662. // float y7 = iSEM.GetStageAtY();
  1663. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1664. // {
  1665. // return false;
  1666. // }
  1667. // //9.控制SEM平行校正,并记录校正前初始值
  1668. // float foldAnagle = iSEM.GetScanRotation();
  1669. // if (foldAnagle == float.NaN)
  1670. // {
  1671. // return false;
  1672. // }
  1673. // if (!iSEM.SetScanRotation(angle1))
  1674. // {
  1675. // return false;
  1676. // }
  1677. // //10.控制SEM放大到指定参数大小范围
  1678. // if (!iSEM.SetMagnification(mage))
  1679. // {
  1680. // return false;
  1681. // }
  1682. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1683. // if (!MeasParam.FocusMode)
  1684. // {
  1685. // //弹出手动对焦的窗口
  1686. // }
  1687. // else
  1688. // {
  1689. // //调用自动对焦模块
  1690. // }
  1691. // //12.控制SEM对分析位置拍照
  1692. // String fileName6 = WorkingFolder + ImageName6;
  1693. // if (!GetImage(ImageMode.SEM, fileName6))
  1694. // {
  1695. // return false;
  1696. // }
  1697. // //13.保存照片
  1698. // //14.控制SEM取消电子束校正,回到初始值
  1699. // if (!iSEM.SetScanRotation(foldAnagle))
  1700. // {
  1701. // return false;
  1702. // }
  1703. //}
  1704. ////18.自动层高分析
  1705. //{
  1706. // //1.获取SEM Pixel Size给客户传入参数
  1707. // if (iSEM.GetPixelSize() == float.NaN)
  1708. // {
  1709. // return false;
  1710. // }
  1711. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1712. //}
  1713. ////19.自动能谱分析
  1714. //{
  1715. // //1. 确定能谱位置
  1716. // //2. 控制牛津打能谱
  1717. // //3. 能谱分析——面扫+线扫描
  1718. //}
  1719. #endregion
  1720. return true;
  1721. }
  1722. //非第一个孔的测试过程
  1723. public bool CommonWork()
  1724. {
  1725. //首先默认为SEM模式
  1726. arg.Picture_Information.Work_Status = "SEM";
  1727. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1728. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1729. {
  1730. if (!InsertPT())
  1731. {
  1732. arg.Message = "插入PT针失败";
  1733. SendMsg("1-0");
  1734. return false;
  1735. }
  1736. arg.Message = "插入PT针成功";
  1737. SendMsg("1-0");
  1738. }
  1739. //判断是否停止进程
  1740. if (key_stop)
  1741. {
  1742. return false;
  1743. }
  1744. //13. 自动 定位功能
  1745. if (!GetPoistion(false))
  1746. {
  1747. return false;
  1748. }
  1749. //判断是否停止进程
  1750. if (key_stop)
  1751. {
  1752. return false;
  1753. }
  1754. //14.自动控制FIB切割
  1755. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1756. {
  1757. if (!FIBCross())
  1758. {
  1759. return false;
  1760. }
  1761. }
  1762. //判断是否停止进程
  1763. if (key_stop)
  1764. {
  1765. return false;
  1766. }
  1767. //15.根据样品类型决定是否撤出PT针
  1768. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1769. {
  1770. if (!RetractPT())
  1771. {
  1772. arg.Message = "撤出PT针失败";
  1773. SendMsg("1-15");
  1774. return false;
  1775. }
  1776. arg.Message = "撤出PT针成功";
  1777. SendMsg("1-15");
  1778. }
  1779. //判断是否停止进程
  1780. if (key_stop)
  1781. {
  1782. return false;
  1783. }
  1784. // 16.找到切割位置
  1785. if (!FindCross())
  1786. {
  1787. return false;
  1788. }
  1789. //判断是否停止进程
  1790. if (key_stop)
  1791. {
  1792. return false;
  1793. }
  1794. //将过程17最后的拍照图片提出给18步进行调用
  1795. String img18 = "";
  1796. //17.自动控制SEM拍截面照
  1797. if (m_MsParam.Is_Photograph == false)
  1798. {
  1799. if (!ShotSection(ref img18))
  1800. {
  1801. arg.Message = "自动控制SEM拍截面照失败";
  1802. SendMsg("1-33");
  1803. return false;
  1804. }
  1805. arg.Message = "自动控制SEM拍截面照成功";
  1806. SendMsg("1-33");
  1807. }
  1808. //判断是否停止进程
  1809. if (key_stop)
  1810. {
  1811. return false;
  1812. }
  1813. //18.自动层高分析
  1814. float size = iSEM.GetPixelSize();
  1815. float mag = iSEM.GetMagnification();
  1816. int state = 0;
  1817. wr.Img_Measure_Size(img18, mag, size, out state);
  1818. if (state == 0)
  1819. {
  1820. arg.Message = "测量尺寸失败";
  1821. SendMsg("1-31");
  1822. return false;
  1823. }
  1824. arg.Message = "测量尺寸成功";
  1825. SendMsg("1-31");
  1826. #region 测试程序
  1827. //string fn;
  1828. //用宏抓一般图
  1829. //Thread.Sleep(5000);
  1830. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1831. //SendMsg("用宏抓一般图" + fn);
  1832. //iSEM.CMDMCFFilename(fn);
  1833. ////延时1s??
  1834. //Thread.Sleep(5000);
  1835. ////用宏抓好图
  1836. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1837. //SendMsg("用宏抓好图" + fn);
  1838. //iSEM.CMDMCFFilename(fn);
  1839. ////延时1s??
  1840. //Thread.Sleep(30000);
  1841. //Thread.Sleep(10000);
  1842. //WorkingFolder = m_measureFile.FilePath;
  1843. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1844. //SendMsg("SEM拍照存储到" + fileName6);
  1845. //if (!GetImage(ImageMode.SEM, fileName6))
  1846. //{
  1847. // SendMsg("SEM拍照失败");
  1848. // return false;
  1849. //}
  1850. ////用宏抓标志图
  1851. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1852. //SendMsg("用宏抓标志图" + fn);
  1853. //iSEM.CMDMCFFilename(fn);
  1854. ////延时1s??
  1855. //Thread.Sleep(30000);
  1856. ////恢复简单抓图
  1857. //Thread.Sleep(5000);
  1858. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1859. //SendMsg("用宏抓一般图" + fn);
  1860. //iSEM.CMDMCFFilename(fn);
  1861. //SendMsg("所有图结束");
  1862. #endregion
  1863. return true;
  1864. }
  1865. //测试完第一个孔后的样品台初始化操作。
  1866. //再调用CommonWork执行非第一个孔的测试过程
  1867. public bool OtherHole()
  1868. {
  1869. //SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1870. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1871. #region 1. 初始化
  1872. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1873. //读取图像冻结状态
  1874. float ffrozen = iSEM.GetImageFrozen();
  1875. if (ffrozen == float.NaN)
  1876. {
  1877. return false;
  1878. }
  1879. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1880. {
  1881. //SendMsg("样品台恢复到水平");
  1882. //return true;
  1883. }
  1884. else
  1885. {
  1886. //SendMsg("禁止样品台恢复到水平");
  1887. return false;
  1888. }
  1889. //2. 调节样品1号孔的样品台6轴坐标
  1890. //3. 将样品1号孔坐标2存入数据库
  1891. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1892. if (!iSEM.SetStageGotoT(0))
  1893. {
  1894. return false;
  1895. }
  1896. while (true)
  1897. {
  1898. Thread.Sleep(10000);
  1899. if (iSEM.GetStageIs() == 0)
  1900. {
  1901. break;
  1902. }
  1903. }
  1904. //5. 获取光镜2号孔XY坐标
  1905. //SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1906. //6. 根据光镜坐标控制样品台移动
  1907. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1908. {
  1909. //SendMsg("移动失败");
  1910. return false;
  1911. }
  1912. while (true)
  1913. {
  1914. Thread.Sleep(10000);
  1915. if (iSEM.GetStageIs() == 0)
  1916. {
  1917. break;
  1918. }
  1919. }
  1920. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1921. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1922. {
  1923. //SendMsg("样品台旋转");
  1924. //return true;
  1925. }
  1926. else
  1927. {
  1928. //SendMsg("禁止样品台旋转");
  1929. return false;
  1930. }
  1931. if (!iSEM.SetStageGotoT(54))
  1932. {
  1933. return false;
  1934. }
  1935. while (true)
  1936. {
  1937. Thread.Sleep(10000);
  1938. if (iSEM.GetStageIs() == 0)
  1939. {
  1940. break;
  1941. }
  1942. }
  1943. //SendMsg("拉直操作");
  1944. #endregion
  1945. //其他操作与第一个孔相同
  1946. if (!CommonWork())
  1947. {
  1948. return false;
  1949. }
  1950. //2. 定位切割
  1951. {
  1952. //1. 拉直操作
  1953. {
  1954. //1.1 控制SEM进行拍照
  1955. //1.2 图片传给客户,返回偏移角度
  1956. //1.3 根据返回角度,控制样品台转动
  1957. }
  1958. //2. 与1号孔13步相同
  1959. }
  1960. return true;
  1961. }
  1962. //角度补偿
  1963. public bool TiltCorrection(float a_fAngle)
  1964. {
  1965. //记录原来电镜的状态
  1966. // bool bTilt = false;
  1967. //float fOldTilt = iSEM.GetTiltCorrection();
  1968. //if (fOldTilt == float.NaN)
  1969. //{
  1970. // return false;
  1971. //}
  1972. //else if (fOldTilt == 1)
  1973. //{
  1974. // bTilt = true;
  1975. //}
  1976. //else if (fOldTilt == 0)
  1977. //{
  1978. // bTilt = false;
  1979. //}
  1980. //float fOldAngle = iSEM.GetTiltAngle();
  1981. //if (fOldAngle == float.NaN)
  1982. //{
  1983. // return false;
  1984. //}
  1985. //开启校正
  1986. SendMsg("开启校正");
  1987. if (!iSEM.SetTiltAngleOn())
  1988. {
  1989. return false;
  1990. }
  1991. //设置校正角度
  1992. //if (!iSEM.SetTiltAngle(fOldAngle))
  1993. //{
  1994. // return false;
  1995. //}
  1996. //恢复原始状态
  1997. SendMsg("校正角度"+ a_fAngle.ToString());
  1998. if (!iSEM.SetTiltAngle(a_fAngle))
  1999. {
  2000. return false;
  2001. }
  2002. //if (bTilt)
  2003. //{
  2004. // if (!iSEM.SetTiltCorrectionOn())
  2005. // {
  2006. // return false;
  2007. // }
  2008. //}
  2009. //else
  2010. //{
  2011. // if (!iSEM.SetTiltCorrectionOff())
  2012. // {
  2013. // return false;
  2014. // }
  2015. //}
  2016. return true;
  2017. }
  2018. //拍图
  2019. public bool GetImage(ImageMode a_mode, String a_fileName)
  2020. {
  2021. //1. 图像解冻
  2022. float foldFrozen = iSEM.GetImageFrozen();
  2023. if (foldFrozen == float.NaN)
  2024. {
  2025. return false;
  2026. }
  2027. if (!iSEM.ImageLive())
  2028. {
  2029. return false;
  2030. }
  2031. //2. 确认图像模式
  2032. if (ImageMode.SEM == a_mode)
  2033. {
  2034. if (!iSEM.CmdFIBModeSEM())
  2035. {
  2036. return false;
  2037. }
  2038. }
  2039. else if (ImageMode.FIB == a_mode)
  2040. {
  2041. if (!iSEM.CmdFIBModeFIB())
  2042. {
  2043. return false;
  2044. }
  2045. }
  2046. else
  2047. {
  2048. return false;
  2049. }
  2050. //3. 获取分辨率
  2051. int[] ImageSize = iSEM.GetImageStore();
  2052. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2053. {
  2054. return false;
  2055. }
  2056. short width = (short)ImageSize[0];
  2057. short height = (short)ImageSize[1];
  2058. //4. 抓图
  2059. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  2060. {
  2061. return false;
  2062. }
  2063. //5. 恢复初始状态
  2064. if (foldFrozen == 0)
  2065. {
  2066. if (!iSEM.ImageLive())
  2067. {
  2068. return false;
  2069. }
  2070. }
  2071. else if (foldFrozen == 1)
  2072. {
  2073. if (!iSEM.ImageFrozen())
  2074. {
  2075. return false;
  2076. }
  2077. }
  2078. return true;
  2079. }
  2080. //自动聚焦
  2081. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  2082. {
  2083. a_nWd = 0;
  2084. float wd = iSEM.GetWorkingDistance();
  2085. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  2086. if (a_param == null)
  2087. {
  2088. return false;
  2089. }
  2090. string path = a_param.Path;
  2091. if (!Directory.Exists(path))
  2092. {
  2093. return false;
  2094. }
  2095. string path_coarse = a_param.Path + "\\Coarse";
  2096. if (!Directory.Exists(path_coarse))
  2097. {
  2098. Directory.CreateDirectory(path_coarse);
  2099. }
  2100. string path_fine = a_param.Path + "\\Fine";
  2101. if (!Directory.Exists(path_fine))
  2102. {
  2103. Directory.CreateDirectory(path_fine);
  2104. }
  2105. //1. 拍照
  2106. //1.1, 粗拍照
  2107. //1.1.1, 根据参数计算拍照次数
  2108. double nUp = a_param.UP * 100.0 ;
  2109. double nDown = a_param.Down * 100.0;
  2110. double nStep = a_param.Step * 100.0;
  2111. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  2112. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  2113. //粗拍照
  2114. for (int i = 0; i < nTimes; i++)
  2115. {
  2116. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  2117. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2118. Thread.Sleep(8000);
  2119. int swd = cWd / 100;
  2120. //SendMsg("wd = " + swd.ToString() +"um");
  2121. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  2122. if (!GetImage(ImageMode.SEM, fileName))
  2123. {
  2124. return false;
  2125. }
  2126. }
  2127. //1.2, 选定细拍照的工作距离
  2128. int CorWd;
  2129. ChooseBest(path_coarse,out CorWd);
  2130. a_nWd = CorWd;
  2131. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  2132. //1.3, 细拍照
  2133. if ( (CorWd - a_param.Range * 100.0) <=0)
  2134. {
  2135. return false;
  2136. }
  2137. double nfUp = CorWd - a_param.Range * 100.0;
  2138. double nfStep = a_param.fStep * 100.0;
  2139. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  2140. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  2141. for (int i = 0; i < nfTimes; i++)
  2142. {
  2143. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  2144. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2145. Thread.Sleep(8000);
  2146. int swd = cWd / 100;
  2147. //SendMsg("wd = " + swd.ToString() + "um");
  2148. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  2149. if (!GetImage(ImageMode.SEM, fileName))
  2150. {
  2151. return false;
  2152. }
  2153. }
  2154. int fineWd;
  2155. ChooseBest(path_fine, out fineWd);
  2156. //SendMsg("wd fine max = " + fineWd.ToString());
  2157. a_nWd = fineWd;
  2158. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  2159. return true;
  2160. }
  2161. //LoG算子计算
  2162. private double LoGMean(string a_strImgPath)
  2163. {
  2164. //读入Img文件
  2165. if (!File.Exists(a_strImgPath))
  2166. {
  2167. return 0;
  2168. }
  2169. Mat src, gray_src;
  2170. int kernel_size = 3;
  2171. src = Cv2.ImRead(a_strImgPath);
  2172. gray_src = new Mat();
  2173. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2174. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2175. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2176. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2177. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  2178. Cv2.ConvertScaleAbs(src, src);
  2179. //图像的平均灰度
  2180. double meanValue = 0.0;
  2181. meanValue = Cv2.Mean(src)[0];
  2182. return meanValue;
  2183. }
  2184. //梯度计算
  2185. private double Tenengrad(string a_strImgPath)
  2186. {
  2187. //读入Img文件
  2188. if (!File.Exists(a_strImgPath))
  2189. {
  2190. return 0;
  2191. }
  2192. Mat src;
  2193. src = Cv2.ImRead(a_strImgPath);
  2194. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2195. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2196. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2197. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2198. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  2199. //图像的平均灰度
  2200. double meanValue = 0.0;
  2201. meanValue = Cv2.Mean(src)[0];
  2202. return meanValue;
  2203. }
  2204. //梯度计算
  2205. private double TTgrad(string a_strImgPath)
  2206. {
  2207. //读入Img文件
  2208. if (!File.Exists(a_strImgPath))
  2209. {
  2210. return 0;
  2211. }
  2212. Mat src;
  2213. src = Cv2.ImRead(a_strImgPath);
  2214. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2215. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2216. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2217. Mat scalex = new Mat();
  2218. Mat scaley = new Mat();
  2219. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  2220. Cv2.ConvertScaleAbs(src, scalex);
  2221. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  2222. Cv2.ConvertScaleAbs(src, scaley);
  2223. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  2224. //图像的平均灰度
  2225. double meanValue = 0.0;
  2226. meanValue = Cv2.Mean(src)[0];
  2227. return meanValue;
  2228. }
  2229. //三选二算法
  2230. private void ChooseBest(string a_strImgPath, out int a_nWd)
  2231. {
  2232. a_nWd = -1;
  2233. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  2234. float[] values = new float[files.Length];
  2235. double smax1 = LoGMean(files[0]);
  2236. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  2237. double smax2 = Tenengrad(files[0]);
  2238. int wdmax2 = wdmax1;
  2239. double smax3 = TTgrad(files[0]);
  2240. int wdmax3 = wdmax1;
  2241. int x = 0;
  2242. foreach (var file in files)
  2243. {
  2244. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  2245. double svalue1 = LoGMean(file);
  2246. double svalue2 = Tenengrad(file);
  2247. double svalue3 = TTgrad(file);
  2248. if (smax1 < svalue1)
  2249. {
  2250. smax1 = svalue1;
  2251. wdmax1 = wd;
  2252. }
  2253. if (smax2 < svalue2)
  2254. {
  2255. smax2 = svalue2;
  2256. wdmax2 = wd;
  2257. }
  2258. if (smax3 < svalue3)
  2259. {
  2260. smax3 = svalue3;
  2261. wdmax3 = wd;
  2262. }
  2263. x++;
  2264. }
  2265. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  2266. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  2267. {
  2268. a_nWd = wdmax1;
  2269. //SendMsg("焦距 = " + wdmax1.ToString());
  2270. }
  2271. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  2272. {
  2273. a_nWd = wdmax2;
  2274. //SendMsg("焦距 = " + wdmax2.ToString());
  2275. }
  2276. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  2277. {
  2278. a_nWd = wdmax3;
  2279. //SendMsg("焦距 = " + wdmax3.ToString());
  2280. }
  2281. else
  2282. {
  2283. //SendMsg("对焦失败。");
  2284. }
  2285. }
  2286. }
  2287. }