Measure.cs 87 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using WebManager;
  16. using OpenCvSharp;
  17. namespace MeasureThread
  18. {
  19. //图片模式
  20. public enum ImageMode
  21. {
  22. FIB,
  23. SEM
  24. }
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. public class ThreadStatusEventArgs
  28. {
  29. //状态
  30. public Boolean State
  31. {
  32. get { return m_state; }
  33. set { m_state = value; }
  34. }
  35. private Boolean m_state;
  36. //时间
  37. public DateTime Time
  38. {
  39. get { return m_time; }
  40. set { m_time = value; }
  41. }
  42. private DateTime m_time;
  43. //步骤代码
  44. public String Step_Code
  45. {
  46. get { return step_Code; }
  47. set { step_Code = value; }
  48. }
  49. private String step_Code;
  50. //其他消息
  51. public String Message
  52. {
  53. get { return this.message; }
  54. set { this.message = value; }
  55. }
  56. private String message;
  57. //孔名
  58. public String HoleName
  59. {
  60. get { return this.holeName; }
  61. set { this.holeName = value; }
  62. }
  63. private String holeName;
  64. //图片信息
  65. public class PictureInformation
  66. {
  67. public String Picture_FullPath
  68. {
  69. get { return picture_FullPath; }
  70. set { picture_FullPath = value; }
  71. }
  72. private String picture_FullPath;
  73. public double Work_Voltage
  74. {
  75. get { return work_Voltage; }
  76. set { work_Voltage = value; }
  77. }
  78. private double work_Voltage;
  79. public double Magnification
  80. {
  81. get { return magnification; }
  82. set { magnification = value; }
  83. }
  84. private double magnification;
  85. public double Work_Distance
  86. {
  87. get { return work_Distance; }
  88. set { work_Distance = value; }
  89. }
  90. private double work_Distance;
  91. public String Work_Status
  92. {
  93. get { return work_Status; }
  94. set { work_Status = value; }
  95. }
  96. private String work_Status;
  97. }
  98. //图片信息实例类
  99. public PictureInformation Picture_Information
  100. {
  101. get { return picture_Information; }
  102. set { picture_Information = value; }
  103. }
  104. private PictureInformation picture_Information;
  105. //图像信息
  106. public class ImageInformation
  107. {
  108. public int Method_Name
  109. {
  110. get { return method_Name; }
  111. set { method_Name = value; }
  112. }
  113. private int method_Name;
  114. public Source_Img_Degree_Direction SIDD;
  115. public Cut_Position CP;
  116. public Cut_Success CS;
  117. public Trapezoid_Top_Center_Position TTCP;
  118. public Auto_Foucs AF;
  119. public Auto_Stigmatic AS;
  120. public Center_Position_OffsetAngle_Direction CPOD;
  121. public Measure_Size MS;
  122. public ImageInformation()
  123. {
  124. SIDD = new Source_Img_Degree_Direction();
  125. CP = new Cut_Position();
  126. CS = new Cut_Success();
  127. TTCP = new Trapezoid_Top_Center_Position();
  128. AF = new Auto_Foucs();
  129. AS = new Auto_Stigmatic();
  130. CPOD = new Center_Position_OffsetAngle_Direction();
  131. MS = new Measure_Size();
  132. }
  133. //1-计算原始图像偏移角度及方向
  134. public class Source_Img_Degree_Direction
  135. {
  136. public Boolean Is_Image = false;
  137. public double Degree
  138. {
  139. get { return degree; }
  140. set { degree = value; }
  141. }
  142. private double degree;
  143. public int Direction
  144. {
  145. get { return direction; }
  146. set { direction = value; }
  147. }
  148. private int direction;
  149. public int State
  150. {
  151. get { return state; }
  152. set { state = value; }
  153. }
  154. private int state;
  155. }
  156. //2-计算切割点位置
  157. public class Cut_Position
  158. {
  159. public Boolean Is_Image = false;
  160. public double Offsetx
  161. {
  162. get { return offsetx; }
  163. set { offsetx = value; }
  164. }
  165. private double offsetx;
  166. public double Offsety
  167. {
  168. get { return offsety; }
  169. set { offsety = value; }
  170. }
  171. private double offsety;
  172. public int State
  173. {
  174. get { return state; }
  175. set { state = value; }
  176. }
  177. private int state;
  178. }
  179. //3-是否切割成功
  180. public class Cut_Success
  181. {
  182. public Boolean Is_Image = false;
  183. public int State
  184. {
  185. get { return state; }
  186. set { state = value; }
  187. }
  188. private int state;
  189. }
  190. //4-计算切割后图像梯形区域上边中心点坐标
  191. public class Trapezoid_Top_Center_Position
  192. {
  193. public Boolean Is_Image = false;
  194. public double TopCenterX
  195. {
  196. get { return topCenterX; }
  197. set { topCenterX = value; }
  198. }
  199. private double topCenterX;
  200. public double TopCenterY
  201. {
  202. get { return topCenterY; }
  203. set { topCenterY = value; }
  204. }
  205. private double topCenterY;
  206. public int State
  207. {
  208. get { return state; }
  209. set { state = value; }
  210. }
  211. private int state;
  212. }
  213. //5-自动对焦
  214. public class Auto_Foucs
  215. {
  216. public Boolean Is_Image = true;
  217. public String Img_Path
  218. {
  219. get { return img_Path; }
  220. set { img_Path = value; }
  221. }
  222. private String img_Path;
  223. }
  224. //6-自动像闪
  225. public class Auto_Stigmatic
  226. {
  227. public Boolean Is_Image = true;
  228. public String Img_Path
  229. {
  230. get { return img_Path; }
  231. set { img_Path = value; }
  232. }
  233. private String img_Path;
  234. }
  235. //7-计算切割面区域中心坐标,以及偏移角度及方向
  236. public class Center_Position_OffsetAngle_Direction
  237. {
  238. public Boolean Is_Image = false;
  239. public double CenterX
  240. {
  241. get { return centerX; }
  242. set { centerX = value; }
  243. }
  244. private double centerX;
  245. public double CenterY
  246. {
  247. get { return centerY; }
  248. set { centerY = value; }
  249. }
  250. private double centerY;
  251. public double Degree
  252. {
  253. get { return degree; }
  254. set { degree = value; }
  255. }
  256. private double degree;
  257. public int Direction
  258. {
  259. get { return direction; }
  260. set { direction = value; }
  261. }
  262. private int direction;
  263. public int State
  264. {
  265. get { return state; }
  266. set { state = value; }
  267. }
  268. private int state;
  269. }
  270. //8-测量尺寸
  271. public class Measure_Size
  272. {
  273. public Boolean Is_Image = false;
  274. public int State
  275. {
  276. get { return state; }
  277. set { state = value; }
  278. }
  279. private int state;
  280. }
  281. }
  282. //图像信息实例类
  283. public ImageInformation Image_Information
  284. {
  285. get { return image_Information; }
  286. set { image_Information = value; }
  287. }
  288. private ImageInformation image_Information;
  289. public ThreadStatusEventArgs(string a_State)
  290. {
  291. picture_Information = new PictureInformation();
  292. image_Information = new ImageInformation();
  293. }
  294. }
  295. public class CutHolesStatusEventArgs
  296. {
  297. public string State
  298. {
  299. get { return m_state; }
  300. set { m_state = value; }
  301. }
  302. private string m_state;
  303. public string HoleName
  304. {
  305. get { return m_holeName; }
  306. set { m_holeName = value; }
  307. }
  308. private string m_holeName;
  309. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  310. {
  311. this.m_state = a_state;
  312. this.m_holeName = a_holeName;
  313. }
  314. }
  315. public class Measure
  316. {
  317. /// <summary>
  318. /// 图像拉直算法
  319. /// </summary>
  320. /// <param name="Slope">倾斜角度</param>
  321. /// <param name="x0">圆心坐标x</param>
  322. /// <param name="y0">圆心坐标y</param>
  323. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  324. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  325. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  326. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  327. /// <returns></returns>
  328. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  329. {
  330. try
  331. {
  332. double xr = x1 - x0;//倾斜图到中心的距离差x
  333. double yr = y1 - y0;//倾斜图到中心的距离差y
  334. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  335. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  336. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  337. double k_S = k - Slope;//通过夹角差求x2,y2
  338. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  339. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  340. if (Slope > 0 || Slope < 0)
  341. {
  342. Hx = x1 - x2;
  343. Hy = y1 - y2;
  344. }
  345. else
  346. {
  347. Hx = 0;
  348. Hy = 0;
  349. }
  350. return true;
  351. }
  352. catch (Exception)
  353. {
  354. return false;
  355. }
  356. }
  357. //Web接口类
  358. public WebResult wr = null;
  359. //样品台保护值
  360. public float X_Min = 0;
  361. public float X_Max = 0.13f;
  362. public float Y_Min = 0;
  363. public float Y_Max = 0.13f;
  364. public float Z_Min = 0;
  365. public float Z_Max = 0.05f;
  366. public float T_Min = -4;
  367. public float T_Max = 70;
  368. public float R_Min = -380;
  369. public float R_Max = 380;
  370. public float M_Min = 0;
  371. public float M_Max = 0.012f;
  372. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  373. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  374. //定义一个全局的消息类
  375. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  376. //全局只有一个fatorySEM
  377. static FactoryHardware factorySEM = FactoryHardware.Instance;
  378. ISEMControl iSEM = factorySEM.ISEM;
  379. //@的作用是不用转义字符\\只打一个就行
  380. const String ImageName1 = @"ImageSEMH.tif"; //传给客户,作水平校正
  381. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  382. const String ImageName31 = @"ImageFIBBefore.tif";
  383. const String ImageName32 = @"ImageFIBAfter.tif";
  384. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  385. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  386. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  387. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  388. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  389. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  390. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  391. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  392. const String ElyDeposition = @"Deposition.ely"; //沉积
  393. const String ElyCrossSection = @"CrossSection.ely"; //切割
  394. const float fMin = (float)0.0000002; //单位是米
  395. public Boolean key_stop = false;
  396. String focus_path = "";
  397. String data_path = "";
  398. int m_nWorkHoleNo = -1;
  399. //测量文件
  400. private MeasureFile m_measureFile;
  401. public MeasureFile MeasureFile
  402. {
  403. get { return this.m_measureFile; }
  404. set { this.m_measureFile = value; }
  405. }
  406. //测量的切割孔
  407. private List<MeasureData.CutHole> m_cutHoles;
  408. public List<MeasureData.CutHole> cutHoles
  409. {
  410. get { return this.m_cutHoles; }
  411. set { this.m_cutHoles = value; }
  412. }
  413. //工作文件夹
  414. private string m_WorkingFolder;
  415. public string WorkingFolder
  416. {
  417. get { return this.m_WorkingFolder; }
  418. set { this.m_WorkingFolder = value; }
  419. }
  420. //程序当前路径
  421. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  422. //线程状态
  423. private ThreadStatus m_ThreadStatus;
  424. public ThreadStatus TStatus
  425. {
  426. get { return this.m_ThreadStatus; }
  427. set { this.m_ThreadStatus = value; }
  428. }
  429. //测量参数
  430. private MeasureParam m_MsParam;
  431. public MeasureParam MeasParam
  432. {
  433. get { return this.m_MsParam; }
  434. set { this.m_MsParam = value; }
  435. }
  436. //构造函数
  437. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  438. {
  439. MeasParam = new MeasureParam();
  440. TStatus = new ThreadStatus();
  441. cutHoles = new List<MeasureData.CutHole>();
  442. //配置远程连接
  443. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  444. }
  445. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  446. public bool InitMeas(MeasureFile a_measureFile)
  447. {
  448. m_measureFile = a_measureFile;
  449. List<CutHole> listHoles = m_measureFile.ListCutHole;
  450. foreach (CutHole h in listHoles)
  451. {
  452. if (h.SWITCH == true)
  453. {
  454. m_cutHoles.Add(h);
  455. }
  456. }
  457. if (m_cutHoles.Count == 0)
  458. return false;
  459. this.m_MsParam = m_measureFile.MParam;
  460. return true;
  461. }
  462. public void SendMsg(string step_code)
  463. {
  464. arg.Step_Code = step_code;
  465. arg.Time = DateTime.Now;
  466. SendThreadStatus(this, arg);
  467. }
  468. public void SendCutHoleMsg(string a_state, string a_holeName)
  469. {
  470. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  471. arg.HoleName = a_holeName;
  472. arg.State = a_state;
  473. SendCutHolesStatus(this, arg);
  474. }
  475. //测量流程
  476. public void DoMeasure()
  477. {
  478. //创建线程的测量状态的更新
  479. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  480. if (SendThreadStatus != null)
  481. {
  482. //SendMsg("开始测量。");
  483. }
  484. LogManager.AddHardwareLog("开始测量",true);
  485. //检查硬件连接是否正常
  486. if (!ConnectHardware())
  487. {
  488. //SendMsg("连接硬件失败。");
  489. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  490. return;
  491. }
  492. //SendMsg("硬件连接成功。");
  493. //设置工作文件夹
  494. if (!SetWorkingFolderStr())
  495. {
  496. //SendMsg("设置工作文件夹失败");
  497. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  498. return;
  499. }
  500. //SendMsg("创建工作文件路径为" + WorkingFolder);
  501. float[] firstPosition;
  502. //将停止键复位
  503. key_stop = false;
  504. for (int i = 0; i < m_cutHoles.Count; i++)
  505. {
  506. m_nWorkHoleNo = i;
  507. arg.HoleName = m_cutHoles[i].HoleName;
  508. //创建文件夹,孔名文件夹结构
  509. //最终数据存放目录
  510. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  511. //对焦数据存放目录
  512. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  513. m_MsParam.AutoFocus.Path = focus_path;
  514. if (!Directory.Exists(focus_path))
  515. {
  516. Directory.CreateDirectory(focus_path);
  517. }
  518. //判断孔状态
  519. if(m_cutHoles[i].STATE != State.Ready)
  520. {
  521. continue;
  522. }
  523. //开始循环工作
  524. if (i == 0)
  525. {
  526. m_cutHoles[i].START = DateTime.Now;
  527. //SendMsg("第一个切孔开始测量");
  528. //切孔操作-开始
  529. m_cutHoles[i].STATE = State.InProcess;
  530. //SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  531. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  532. firstPosition = iSEM.GetStagePosition();
  533. //第一个孔的测试
  534. //成功
  535. if(FirstHole())
  536. {
  537. //保存文件,将测量状态更改
  538. m_cutHoles[i].STATE = State.Success;
  539. m_cutHoles[i].END = DateTime.Now;
  540. m_measureFile.Save();
  541. }
  542. //失败
  543. else
  544. {
  545. m_cutHoles[i].STATE = State.Failed;
  546. m_cutHoles[i].END = DateTime.Now;
  547. m_measureFile.Save();
  548. }
  549. //切孔操作-完成
  550. //SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  551. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  552. }
  553. else
  554. {
  555. //其他孔测量之前的初始化
  556. if (!OtherHole_Init())
  557. {
  558. arg.Message = "当前测量点位置初始失败!";
  559. arg.State = false;
  560. SendMsg("0-1");
  561. Thread.Sleep(5000);
  562. continue;
  563. }
  564. //其他孔的测量
  565. m_cutHoles[i].START = DateTime.Now;
  566. //非第一个孔的测试
  567. //SendMsg("第" + i.ToString() + "个切孔开始测量");
  568. //切孔操作-开始
  569. //SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  570. m_cutHoles[i].STATE = State.InProcess;
  571. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  572. //其他孔的测试
  573. //成功
  574. if (OtherHole())
  575. {
  576. //保存文件,将测量状态更改
  577. m_cutHoles[i].STATE = State.Success;
  578. m_cutHoles[i].END = DateTime.Now;
  579. m_measureFile.Save();
  580. }
  581. //失败
  582. else
  583. {
  584. m_cutHoles[i].STATE = State.Failed;
  585. m_cutHoles[i].END = DateTime.Now;
  586. m_measureFile.Save();
  587. }
  588. //切孔操作-完成
  589. //SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  590. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  591. }
  592. if(key_stop)
  593. {
  594. m_cutHoles[i].END = DateTime.Now;
  595. m_cutHoles[i].STATE = State.Ready;
  596. m_measureFile.Save();
  597. arg.Message = "用户停止测量";
  598. SendMsg("0-0");
  599. break;
  600. }
  601. }
  602. }
  603. //检查硬件连接是否正常
  604. public bool ConnectHardware()
  605. {
  606. //返回硬件的连接状态
  607. return iSEM.ConnectStatus();
  608. }
  609. //设置工作文件夹
  610. public bool SetWorkingFolderStr()
  611. {
  612. WorkingFolder = m_measureFile.FilePath;
  613. return true;
  614. }
  615. //插入PT针
  616. public bool InsertPT()
  617. {
  618. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  619. //SendMsg("调用宏插入PT针宏文件" + fn);
  620. iSEM.CMDMCFFilename(fn);
  621. //延时1s??
  622. Thread.Sleep(1000);
  623. return true;
  624. }
  625. //撤出PT针
  626. public bool RetractPT()
  627. {
  628. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  629. //SendMsg("调用宏撤出PT针宏文件" + fn);
  630. iSEM.CMDMCFFilename(fn);
  631. //延时1s??
  632. Thread.Sleep(1000);
  633. return true;
  634. }
  635. //PT沉积
  636. public bool PTWork()
  637. {
  638. //执行PT沉积的ELY文件
  639. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  640. //SendMsg("执行PT沉积Ely文件:" + fn);
  641. if (!ExcuteEly(fn))
  642. {
  643. return false;
  644. }
  645. //等待沉积完成
  646. while (true)
  647. {
  648. Thread.Sleep(10000);
  649. if (iSEM.GetFIBMode() == 0)
  650. {
  651. break;
  652. }
  653. }
  654. return true;
  655. }
  656. //FIB切割
  657. public bool FIBWork()
  658. {
  659. //执行PT沉积的ELY文件
  660. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  661. //SendMsg("执行FIB切割Ely文件:" + fn);
  662. if (!ExcuteEly(fn))
  663. {
  664. return false;
  665. }
  666. //等待切割完成
  667. while (true)
  668. {
  669. Thread.Sleep(10000);
  670. if (iSEM.GetFIBMode() == 0)
  671. {
  672. break;
  673. }
  674. }
  675. return true;
  676. }
  677. //执行ELY文件的步骤
  678. public bool ExcuteEly(string a_filename)
  679. {
  680. //执行ELy文件有三个动作
  681. //1. 选择ELY文件
  682. //SendMsg("选择ELY文件");
  683. if (!iSEM.CmdFIBLoadELY(a_filename))
  684. {
  685. //SendMsg("选择ELY文件失败");
  686. return false;
  687. }
  688. Thread.Sleep(1000);
  689. //2. 确认ELY文件
  690. //SendMsg("确认ELY文件");
  691. if (!iSEM.CmdFIBEXPOSUREELY())
  692. {
  693. //SendMsg("确认ELY文件失败");
  694. return false;
  695. }
  696. Thread.Sleep(1000);
  697. //3. 执行ELY文件
  698. //SendMsg("执行ELY文件");
  699. if (!iSEM.CmdFIBSTARTELY())
  700. {
  701. //SendMsg("执行ELY文件失败");
  702. return false;
  703. }
  704. Thread.Sleep(1000);
  705. return true;
  706. }
  707. //执行自动对焦
  708. public bool ImageFocus(String step_code)
  709. {
  710. if (m_measureFile.MParam.FocusMode == 1)//手动
  711. {
  712. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  713. {
  714. }
  715. else
  716. {
  717. return false;
  718. }
  719. }
  720. else if(m_measureFile.MParam.FocusMode == 2)//自有自动
  721. {
  722. //郝工增加自动对焦算法
  723. //处理文件夹
  724. if (Directory.Exists(focus_path))
  725. {
  726. Directory.Delete(focus_path, true);
  727. }
  728. Thread.Sleep(3000);
  729. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  730. Thread.Sleep(1000);
  731. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  732. Thread.Sleep(1000);
  733. //再创建文件夹
  734. Directory.CreateDirectory(focus_path);
  735. //1、对焦参数类,2、输出工作距离
  736. int wd = 0;
  737. AutoFocus(m_MsParam.AutoFocus, out wd, step_code);
  738. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  739. //设置工作距离
  740. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  741. //设置完工作距离后必须延迟5秒
  742. Thread.Sleep(5000);
  743. //处理图片位置
  744. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  745. }
  746. else if(m_MsParam.FocusMode == 3) //客户自动
  747. {
  748. //后期和客户对接接口
  749. List<string> filenames = new List<string>();
  750. String retfilename = wr.Img_Auto_Focus(filenames);
  751. }
  752. else //蔡司自动对焦
  753. {
  754. iSEM.CmdAutoFocusCoarse();
  755. while(true)
  756. {
  757. Thread.Sleep(10000);
  758. if(0 == iSEM.GetAutoFunction())
  759. {
  760. break;
  761. }
  762. }
  763. iSEM.CmdAutoFocusFine();
  764. while (true)
  765. {
  766. Thread.Sleep(10000);
  767. if (0 == iSEM.GetAutoFunction())
  768. {
  769. break;
  770. }
  771. }
  772. }
  773. return true;
  774. }
  775. /// <summary>
  776. ///13. 自动 定位功能,沉积
  777. /// </summary>
  778. /// <returns></returns>
  779. public bool GetPoistion(Boolean isFirst)
  780. {
  781. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  782. int state = 0;
  783. //切换到SEM模式
  784. if (!iSEM.CmdFIBModeSEM())
  785. {
  786. arg.Message = "SEM模式切换失败";
  787. arg.State = false;
  788. SendMsg("1-1");
  789. return false;
  790. }
  791. //1.控制SEM放大600X
  792. arg.Picture_Information.Work_Status = "SEM";
  793. if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage))
  794. {
  795. arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败";
  796. arg.State = false;
  797. SendMsg("1-1");
  798. return false;
  799. }
  800. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  801. {
  802. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  803. arg.State = false;
  804. SendMsg("1-1");
  805. return false;
  806. }
  807. arg.State = true;
  808. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  809. SendMsg("1-1");
  810. //判断是否停止进程
  811. if (key_stop)
  812. {
  813. return false;
  814. }
  815. //2.控制SEM自动对焦、亮度、对比度
  816. if(ImageFocus("1-2"))
  817. {
  818. arg.Message = "自动对焦完成";
  819. arg.State = true;
  820. SendMsg("1-2");
  821. }
  822. else
  823. {
  824. arg.Message = "自动对焦失败";
  825. arg.State = false;
  826. SendMsg("1-2");
  827. }
  828. //判断是否停止进程
  829. if (key_stop)
  830. {
  831. return false;
  832. }
  833. //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
  834. if (!isFirst)
  835. {
  836. if (!TiltCorrection(54))
  837. {
  838. arg.Message = "设置SEM进行角度补偿54度失败";
  839. arg.State = false;
  840. SendMsg("1-3");
  841. return false;
  842. }
  843. Thread.Sleep(5000);
  844. arg.State = true;
  845. arg.Message = "设置SEM进行角度补偿54度成功";
  846. SendMsg("1-3");
  847. //判断是否停止进程
  848. if (key_stop)
  849. {
  850. return false;
  851. }
  852. }
  853. else
  854. {
  855. Thread.Sleep(2000);
  856. arg.State = true;
  857. arg.Message = "设置SEM进行角度补偿54度成功";
  858. SendMsg("1-3");
  859. }
  860. //4.控制SEM拍照,5保存照片=====需要更改路径
  861. String fileName1 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  862. arg.Picture_Information.Picture_FullPath = fileName1;
  863. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  864. Thread.Sleep(1000);
  865. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  866. Thread.Sleep(1000);
  867. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  868. Thread.Sleep(1000);
  869. if (!GetImage(ImageMode.SEM, fileName1))
  870. {
  871. arg.Message = "SEM拍照失败";
  872. arg.State = false;
  873. SendMsg("1-4");
  874. return false;
  875. }
  876. arg.State = true;
  877. arg.Message = "SEM拍照成功";
  878. SendMsg("1-4");
  879. Thread.Sleep(3000);
  880. //判断是否停止进程
  881. if (key_stop)
  882. {
  883. return false;
  884. }
  885. //判断是否为仅拍照,不是则执行FIB操作
  886. if (!m_MsParam.Is_Photograph)
  887. {
  888. //6.设置FIB拍照参数——扫描时间、束流等
  889. //7.控制FIB自动亮度、对比度
  890. if (!iSEM.CmdFIBModeFIB())
  891. {
  892. arg.Message = "FIB模式切换失败";
  893. arg.State = false;
  894. SendMsg("1-5");
  895. return false;
  896. }
  897. arg.State = true;
  898. arg.Picture_Information.Work_Status = "FIB";
  899. arg.Message = "FIB模式切换成功";
  900. SendMsg("1-5");
  901. Thread.Sleep(10000);
  902. //判断是否停止进程
  903. if (key_stop)
  904. {
  905. return false;
  906. }
  907. //8.控制FIB拍照
  908. //9.保存照片======更改路径
  909. String fileName2 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  910. arg.Picture_Information.Picture_FullPath = fileName2;
  911. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  912. Thread.Sleep(1000);
  913. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  914. Thread.Sleep(1000);
  915. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  916. Thread.Sleep(1000);
  917. if (!GetImage(ImageMode.FIB, fileName2))
  918. {
  919. arg.Message = "FIB拍照失败";
  920. arg.State = false;
  921. SendMsg("1-6");
  922. return false;
  923. }
  924. arg.State = true;
  925. arg.Message = "FIB拍照成功";
  926. SendMsg("1-6");
  927. Thread.Sleep(3000);
  928. //判断是否停止进程
  929. if (key_stop)
  930. {
  931. return false;
  932. }
  933. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  934. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  935. {
  936. arg.Message = "样品台移动到指定位置";
  937. arg.State = true;
  938. SendMsg("1-7");
  939. }
  940. else
  941. {
  942. wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  943. if (state == 1)
  944. {
  945. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  946. if (!iSEM.MoveStageXY(x1, y1))
  947. {
  948. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  949. arg.State = false;
  950. SendMsg("1-7");
  951. return false;
  952. }
  953. //判断是否移动完成
  954. while (true)
  955. {
  956. Thread.Sleep(5000);
  957. if (iSEM.GetStageIs() == 0)
  958. {
  959. break;
  960. }
  961. }
  962. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  963. arg.State = true;
  964. SendMsg("1-7");
  965. }
  966. else
  967. {
  968. arg.Message = "样品台移动失败";
  969. arg.State = false;
  970. SendMsg("1-7");
  971. return false;
  972. }
  973. }
  974. //判断是否停止进程
  975. if (key_stop)
  976. {
  977. return false;
  978. }
  979. //11.自动工具样品类型参数确定是否需要PT沉积
  980. if (m_MsParam.PT)
  981. {
  982. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  983. //第10步已经移动好位置
  984. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  985. x0 = iSEM.GetStageAtX();
  986. y0 = iSEM.GetStageAtY();
  987. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  988. {
  989. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
  990. arg.State = false;
  991. SendMsg("1-8");
  992. return false;
  993. }
  994. arg.State = true;
  995. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
  996. SendMsg("1-8");
  997. //判断是否停止进程
  998. if (key_stop)
  999. {
  1000. return false;
  1001. }
  1002. //3. 根据坐标进行PT沉积
  1003. if (!PTWork())
  1004. {
  1005. arg.Message = "PT沉积失败";
  1006. arg.State = false;
  1007. SendMsg("1-9");
  1008. return false;
  1009. }
  1010. arg.State = true;
  1011. arg.Message = "PT沉积成功";
  1012. SendMsg("1-9");
  1013. //判断是否停止进程
  1014. if (key_stop)
  1015. {
  1016. return false;
  1017. }
  1018. }
  1019. }
  1020. //12.根据梯形坐标控制FIB调整到中心位置
  1021. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1022. //以上两步已经将程序移动到11内部去做
  1023. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1024. float[] firstPosition = iSEM.GetStagePosition();
  1025. m_cutHoles[0].Position.X = firstPosition[0];
  1026. m_cutHoles[0].Position.Y = firstPosition[1];
  1027. m_cutHoles[0].Position.Z = firstPosition[2];
  1028. m_cutHoles[0].Position.T = firstPosition[3];
  1029. m_cutHoles[0].Position.R = firstPosition[4];
  1030. m_cutHoles[0].Position.M = firstPosition[5];
  1031. //这里要调用文件保存功能
  1032. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1033. + firstPosition[1].ToString() + ","
  1034. + firstPosition[2].ToString() + ","
  1035. + firstPosition[3].ToString() + ","
  1036. + firstPosition[4].ToString() + ","
  1037. + firstPosition[5].ToString() + ")";
  1038. arg.State = true;
  1039. SendMsg("1-10");
  1040. //判断是否停止进程
  1041. if (key_stop)
  1042. {
  1043. return false;
  1044. }
  1045. return true;
  1046. }
  1047. /// <summary>
  1048. /// 14. FIB切割
  1049. /// </summary>
  1050. /// <returns></returns>
  1051. public bool FIBCross()
  1052. {
  1053. int state = 0;
  1054. //切之前拍照保存,,
  1055. String fileName31 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName31;
  1056. arg.Picture_Information.Picture_FullPath = fileName31;
  1057. arg.Picture_Information.Work_Status = "FIB";
  1058. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1059. Thread.Sleep(1000);
  1060. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1061. Thread.Sleep(1000);
  1062. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1063. Thread.Sleep(1000);
  1064. if (!GetImage(ImageMode.FIB, fileName31))
  1065. {
  1066. arg.Message = "FIB切割前拍照失败";
  1067. arg.State = false;
  1068. SendMsg("1-11");
  1069. return false;
  1070. }
  1071. arg.State = true;
  1072. arg.Message = "FIB切割前拍照成功";
  1073. SendMsg("1-11");
  1074. //判断是否停止进程
  1075. if (key_stop)
  1076. {
  1077. return false;
  1078. }
  1079. //14.自动控制FIB切割
  1080. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1081. //2.控制FIB进行切割
  1082. //以上1、2步全部用ELY文件代替
  1083. if (!FIBWork())
  1084. {
  1085. arg.Message = "FIB切割失败";
  1086. arg.State = false;
  1087. SendMsg("1-12");
  1088. return false;
  1089. }
  1090. arg.State = true;
  1091. arg.Message = "FIB切割成功";
  1092. SendMsg("1-12");
  1093. Thread.Sleep(5000);
  1094. //判断是否停止进程
  1095. if (key_stop)
  1096. {
  1097. return false;
  1098. }
  1099. //3.控制FIB拍照600X
  1100. //底层没有控制方法。
  1101. //4.保存图片
  1102. String fileName32 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName32;
  1103. arg.Picture_Information.Picture_FullPath = fileName32;
  1104. arg.Picture_Information.Work_Status = "FIB";
  1105. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1106. Thread.Sleep(1000);
  1107. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1108. Thread.Sleep(1000);
  1109. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1110. Thread.Sleep(1000);
  1111. if (!GetImage(ImageMode.FIB, fileName32))
  1112. {
  1113. arg.Message = "FIB切割后拍照失败";
  1114. arg.State = false;
  1115. SendMsg("1-13");
  1116. return false;
  1117. }
  1118. arg.State = true;
  1119. arg.Message = "FIB切割后拍照成功";
  1120. SendMsg("1-13");
  1121. Thread.Sleep(3000);
  1122. //判断是否停止进程
  1123. if (key_stop)
  1124. {
  1125. return false;
  1126. }
  1127. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1128. wr.Img_Cut_Success(fileName31, fileName32, out state);
  1129. if(state == 0)
  1130. {
  1131. arg.Message = "FIB切割校验失败";
  1132. arg.State = false;
  1133. SendMsg("1-14");
  1134. return false;
  1135. }
  1136. arg.State = true;
  1137. arg.Message = "FIB切割校验成功";
  1138. SendMsg("1-14");
  1139. //判断是否停止进程
  1140. if (key_stop)
  1141. {
  1142. return false;
  1143. }
  1144. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1145. //拍完照自动解冻,这里不做处理。
  1146. return true;
  1147. }
  1148. /// <summary>
  1149. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1150. /// </summary>
  1151. /// <returns></returns>
  1152. public bool FindCross()
  1153. {
  1154. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1155. float angle = 0;
  1156. int direction = 0;
  1157. int state = 0;
  1158. //切换到SEM模式
  1159. if (!iSEM.CmdFIBModeSEM())
  1160. {
  1161. arg.Message = "SEM模式切换失败";
  1162. arg.State = false;
  1163. SendMsg("1-16");
  1164. return false;
  1165. }
  1166. arg.State = true;
  1167. arg.Message = "SEM模式切换成功";
  1168. SendMsg("1-16");
  1169. arg.Picture_Information.Work_Status = "SEM";
  1170. Thread.Sleep(10000);
  1171. //判断是否停止进程
  1172. if (key_stop)
  1173. {
  1174. return false;
  1175. }
  1176. //1.控制SEM放大到300倍
  1177. if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage))
  1178. {
  1179. arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败";
  1180. arg.State = false;
  1181. SendMsg("1-17");
  1182. return false;
  1183. }
  1184. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/2))
  1185. {
  1186. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 2).ToString("0.0") + "倍失败";
  1187. arg.State = false;
  1188. SendMsg("1-17");
  1189. return false;
  1190. }
  1191. arg.State = true;
  1192. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/2).ToString("0.0") + "倍成功";
  1193. SendMsg("1-17");
  1194. //判断是否停止进程
  1195. if (key_stop)
  1196. {
  1197. return false;
  1198. }
  1199. //2.控制SEM自动对焦、亮度、对比度-接口,,将自动对焦提出单独函数调用
  1200. if (ImageFocus("1-18"))
  1201. {
  1202. arg.Message = "自动对焦完成";
  1203. arg.State = true;
  1204. SendMsg("1-18");
  1205. }
  1206. else
  1207. {
  1208. arg.Message = "自动对焦失败";
  1209. arg.State = false;
  1210. SendMsg("1-18");
  1211. }
  1212. Thread.Sleep(5000);
  1213. //判断是否停止进程
  1214. if (key_stop)
  1215. {
  1216. return false;
  1217. }
  1218. //3.控制SEM拍照
  1219. String fileName4 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
  1220. arg.Picture_Information.Picture_FullPath = fileName4;
  1221. arg.Picture_Information.Work_Status = "SEM";
  1222. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1223. Thread.Sleep(1000);
  1224. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1225. Thread.Sleep(1000);
  1226. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1227. Thread.Sleep(1000);
  1228. if (!GetImage(ImageMode.SEM, fileName4))
  1229. {
  1230. arg.State = false;
  1231. arg.Message = "SEM拍照失败";
  1232. SendMsg("1-19");
  1233. return false;
  1234. }
  1235. arg.State = true;
  1236. arg.Message = "SEM拍照成功";
  1237. SendMsg("1-19");
  1238. Thread.Sleep(3000);
  1239. //判断是否停止进程
  1240. if (key_stop)
  1241. {
  1242. return false;
  1243. }
  1244. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1245. //5.根据坐标控制SEM移动到切孔位置,居中
  1246. //这里是否用到拉直操作,我没有加
  1247. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1248. {
  1249. arg.State = true;
  1250. arg.Message = "样品台移动到指定位置";
  1251. SendMsg("1-20");
  1252. }
  1253. else
  1254. {
  1255. wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName,
  1256. m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
  1257. if (state == 1)
  1258. {
  1259. //拉直操作
  1260. iSEM.SetScanRotationOn();
  1261. Thread.Sleep(1000);
  1262. iSEM.SetScanRotation(angle);
  1263. Thread.Sleep(5000);
  1264. //Straightening(angle, 65, 65, x1, y1, ref x2, ref y2);
  1265. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1266. if (!iSEM.MoveStageXY(x2, y2))
  1267. {
  1268. arg.State = false;
  1269. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1270. SendMsg("1-20");
  1271. return false;
  1272. }
  1273. //判断是否移动完成
  1274. while (true)
  1275. {
  1276. Thread.Sleep(5000);
  1277. if (iSEM.GetStageIs() == 0)
  1278. {
  1279. break;
  1280. }
  1281. }
  1282. arg.State = true;
  1283. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1284. SendMsg("1-20");
  1285. }
  1286. else
  1287. {
  1288. arg.Message = "样品台移动失败";
  1289. arg.State = false;
  1290. SendMsg("1-20");
  1291. return false;
  1292. }
  1293. }
  1294. //判断是否停止进程
  1295. if (key_stop)
  1296. {
  1297. return false;
  1298. }
  1299. //6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1300. x0 = iSEM.GetStageAtX();
  1301. y0 = iSEM.GetStageAtY();
  1302. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1303. {
  1304. arg.Message = "位置校验失败";
  1305. arg.State = false;
  1306. SendMsg("1-21");
  1307. return false;
  1308. }
  1309. arg.State = true;
  1310. arg.Message = "位置校验成功";
  1311. SendMsg("1-21");
  1312. //判断是否停止进程
  1313. if (key_stop)
  1314. {
  1315. return false;
  1316. }
  1317. return true;
  1318. }
  1319. /// <summary>
  1320. /// 17.自动控制SEM拍截面照
  1321. /// </summary>
  1322. /// <returns></returns>
  1323. public bool ShotSection(ref String image18)
  1324. {
  1325. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1326. int state = 0;
  1327. //1、放大6000倍,放大倍数参数photograph_
  1328. if (!iSEM.SetSEMVoltage(m_MsParam.Photograph_Voltage))
  1329. {
  1330. arg.Message = "电压设置" + m_MsParam.Photograph_Voltage.ToString("0.0") + "失败";
  1331. arg.State = false;
  1332. SendMsg("1-22");
  1333. return false;
  1334. }
  1335. if (!iSEM.SetMagnification(m_MsParam.Photograph_Magnification))
  1336. {
  1337. arg.Message = "放大倍数调整失败";
  1338. arg.State = false;
  1339. SendMsg("1-22");
  1340. return false;
  1341. }
  1342. arg.Message = "放大倍数调整成功";
  1343. arg.State = true;
  1344. SendMsg("1-22");
  1345. //判断是否停止进程
  1346. if (key_stop)
  1347. {
  1348. return false;
  1349. }
  1350. //2.控制SEM自动对焦、亮度、对比度-接口
  1351. if (ImageFocus("1-23"))
  1352. {
  1353. arg.Message = "自动对焦完成";
  1354. arg.State = true;
  1355. SendMsg("1-23");
  1356. }
  1357. else
  1358. {
  1359. arg.Message = "自动对焦失败";
  1360. arg.State = false;
  1361. SendMsg("1-23");
  1362. }
  1363. //判断是否停止进程
  1364. if (key_stop)
  1365. {
  1366. return false;
  1367. }
  1368. //3、设置SEM补偿角度
  1369. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1370. {
  1371. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1372. arg.State = false;
  1373. SendMsg("1-24");
  1374. return false;
  1375. }
  1376. arg.State = true;
  1377. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1378. SendMsg("1-24");
  1379. Thread.Sleep(5000);
  1380. //判断是否停止进程
  1381. if (key_stop)
  1382. {
  1383. return false;
  1384. }
  1385. //4、拍照,5、保存照片
  1386. String fileName5 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
  1387. arg.Picture_Information.Picture_FullPath = fileName5;
  1388. arg.Picture_Information.Work_Status = "SEM";
  1389. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1390. Thread.Sleep(1000);
  1391. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1392. Thread.Sleep(1000);
  1393. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1394. Thread.Sleep(1000);
  1395. if (!GetImage(ImageMode.SEM, fileName5))
  1396. {
  1397. arg.Message = "SEM拍照失败";
  1398. arg.State = false;
  1399. SendMsg("1-25");
  1400. return false;
  1401. }
  1402. arg.State = true;
  1403. arg.Message = "SEM拍照成功";
  1404. SendMsg("1-25");
  1405. Thread.Sleep(3000);
  1406. //判断是否停止进程
  1407. if (key_stop)
  1408. {
  1409. return false;
  1410. }
  1411. //6、获取偏移坐标,7、移动到位
  1412. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1413. {
  1414. arg.Message = "样品台移动到指定位置";
  1415. arg.State = true;
  1416. SendMsg("1-26");
  1417. }
  1418. else
  1419. {
  1420. //8,图像T形
  1421. wr.Img_Trapezoid_Top_Center_Position(fileName5, out x1, out y1, out state);
  1422. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1423. if (state == 1)
  1424. {
  1425. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1426. if (!iSEM.MoveStageXY(x1, y1))
  1427. {
  1428. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1429. arg.State = false;
  1430. SendMsg("1-26");
  1431. return false;
  1432. }
  1433. //判断是否移动完成
  1434. while (true)
  1435. {
  1436. Thread.Sleep(5000);
  1437. if (iSEM.GetStageIs() == 0)
  1438. {
  1439. break;
  1440. }
  1441. }
  1442. arg.State = true;
  1443. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1444. SendMsg("1-26");
  1445. }
  1446. else
  1447. {
  1448. arg.Message = "样品台移动失败";
  1449. arg.State = false;
  1450. SendMsg("1-26");
  1451. return false;
  1452. }
  1453. }
  1454. //判断是否停止进程
  1455. if (key_stop)
  1456. {
  1457. return false;
  1458. }
  1459. //8、验证移动准确性
  1460. x0 = iSEM.GetStageAtX();
  1461. y0 = iSEM.GetStageAtY();
  1462. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1463. {
  1464. arg.Message = "位置校验失败";
  1465. arg.State = false;
  1466. SendMsg("1-27");
  1467. return false;
  1468. }
  1469. arg.State = true;
  1470. arg.Message = "位置校验成功";
  1471. SendMsg("1-27");
  1472. //判断是否停止进程
  1473. if (key_stop)
  1474. {
  1475. return false;
  1476. }
  1477. //9、-10不操作
  1478. //11、自动对焦。与之前操作相同
  1479. if (ImageFocus("1-28"))
  1480. {
  1481. arg.Message = "自动对焦完成";
  1482. arg.State = true;
  1483. SendMsg("1-28");
  1484. }
  1485. else
  1486. {
  1487. arg.Message = "自动对焦失败";
  1488. arg.State = false;
  1489. SendMsg("1-28");
  1490. }
  1491. //判断是否停止进程
  1492. if (key_stop)
  1493. {
  1494. return false;
  1495. }
  1496. Thread.Sleep(2000);
  1497. //12拍照
  1498. String fileName6 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1499. arg.Picture_Information.Picture_FullPath = fileName6;
  1500. arg.Picture_Information.Work_Status = "SEM";
  1501. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1502. Thread.Sleep(1000);
  1503. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1504. Thread.Sleep(1000);
  1505. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1506. Thread.Sleep(1000);
  1507. if (!GetImage(ImageMode.SEM, fileName6))
  1508. {
  1509. arg.Message = "SEM拍照失败";
  1510. arg.State = false;
  1511. SendMsg("1-29");
  1512. return false;
  1513. }
  1514. arg.State = true;
  1515. image18 = fileName6;
  1516. arg.Message = "SEM拍照成功";
  1517. SendMsg("1-29");
  1518. Thread.Sleep(3000);
  1519. //判断是否停止进程
  1520. if (key_stop)
  1521. {
  1522. return false;
  1523. }
  1524. //14光束复位和Rotation关闭开关
  1525. iSEM.SetScanRotationOff();
  1526. Thread.Sleep(1000);
  1527. iSEM.SetBeamShiftX(0);
  1528. Thread.Sleep(1000);
  1529. iSEM.SetBeamShiftY(0);
  1530. Thread.Sleep(3000);
  1531. arg.Message = "光束复位成功";
  1532. arg.State = true;
  1533. SendMsg("1-30");
  1534. //判断是否停止进程
  1535. if (key_stop)
  1536. {
  1537. return false;
  1538. }
  1539. return true;
  1540. }
  1541. //第一个孔的测试过程
  1542. public bool FirstHole()
  1543. {
  1544. MeasureData.CutHole firstHole = m_cutHoles[0];
  1545. //首先默认为SEM模式
  1546. arg.Picture_Information.Work_Status = "SEM";
  1547. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1548. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1549. {
  1550. if (!InsertPT())
  1551. {
  1552. arg.Message = "插入PT针失败";
  1553. arg.State = false;
  1554. SendMsg("1-0");
  1555. return false;
  1556. }
  1557. arg.State = true;
  1558. arg.Message = "插入PT针成功";
  1559. SendMsg("1-0");
  1560. }
  1561. //判断是否停止进程
  1562. if (key_stop)
  1563. {
  1564. return false;
  1565. }
  1566. //13. 自动 定位功能
  1567. if (!GetPoistion(true))
  1568. {
  1569. return false;
  1570. }
  1571. //判断是否停止进程
  1572. if (key_stop)
  1573. {
  1574. return false;
  1575. }
  1576. //14.自动控制FIB切割
  1577. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1578. {
  1579. if (!FIBCross())
  1580. {
  1581. return false;
  1582. }
  1583. }
  1584. //判断是否停止进程
  1585. if (key_stop)
  1586. {
  1587. return false;
  1588. }
  1589. //15.根据样品类型决定是否撤出PT针
  1590. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1591. {
  1592. if (!RetractPT())
  1593. {
  1594. arg.Message = "撤出PT针失败";
  1595. arg.State = false;
  1596. SendMsg("1-15");
  1597. return false;
  1598. }
  1599. arg.State = true;
  1600. arg.Message = "撤出PT针成功";
  1601. SendMsg("1-15");
  1602. }
  1603. //判断是否停止进程
  1604. if (key_stop)
  1605. {
  1606. return false;
  1607. }
  1608. // 16.找到切割位置
  1609. if (m_MsParam.Is_Photograph == false)
  1610. {
  1611. if (!FindCross())
  1612. {
  1613. return false;
  1614. }
  1615. //判断是否停止进程
  1616. if (key_stop)
  1617. {
  1618. return false;
  1619. }
  1620. }
  1621. //将过程17最后的拍照图片提出给18步进行调用
  1622. String img18 = "";
  1623. //17.自动控制SEM拍截面照
  1624. if (!ShotSection(ref img18))
  1625. {
  1626. return false;
  1627. }
  1628. //判断是否停止进程
  1629. if (key_stop)
  1630. {
  1631. return false;
  1632. }
  1633. //18.自动层高分析
  1634. if (m_MsParam.Is_Photograph == false)
  1635. {
  1636. float size = iSEM.GetPixelSize();
  1637. float mag = iSEM.GetMagnification();
  1638. int state = 0;
  1639. wr.Img_Measure_Size(img18, mag, size, out state);
  1640. if (state == 0)
  1641. {
  1642. arg.Message = "测量尺寸失败";
  1643. arg.State = false;
  1644. SendMsg("1-31");
  1645. return false;
  1646. }
  1647. arg.State = true;
  1648. arg.Message = "测量尺寸成功";
  1649. SendMsg("1-31");
  1650. }
  1651. #region 测试程序
  1652. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  1653. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  1654. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1655. //{
  1656. // SendMsg("拍摄照片完成");
  1657. // //return true;
  1658. //}
  1659. //else
  1660. //{
  1661. // SendMsg("拍摄照片失败");
  1662. // return false;
  1663. //}
  1664. //SendMsg("图像校正36度");
  1665. ////3.设置SEM角度补偿cos36度
  1666. //if (!TiltCorrection(36))
  1667. //{
  1668. // return false;
  1669. //}
  1670. //Thread.Sleep(3000);
  1671. //string fn;
  1672. //用宏抓一般图
  1673. //Thread.Sleep(5000);
  1674. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1675. //SendMsg("用宏抓一般图" + fn);
  1676. //iSEM.CMDMCFFilename(fn);
  1677. ////延时1s??
  1678. //Thread.Sleep(5000);
  1679. ////用宏抓好图
  1680. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1681. //SendMsg("用宏抓好图" + fn);
  1682. //iSEM.CMDMCFFilename(fn);
  1683. ////延时1s??
  1684. //Thread.Sleep(30000);
  1685. //Thread.Sleep(10000);
  1686. //WorkingFolder = m_measureFile.FilePath;
  1687. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1688. //SendMsg("SEM拍照存储到" + fileName6);
  1689. //if (!GetImage(ImageMode.SEM, fileName6))
  1690. //{
  1691. // SendMsg("SEM拍照失败");
  1692. // return false;
  1693. //}
  1694. ////用宏抓标志图
  1695. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1696. //SendMsg("用宏抓标志图" + fn);
  1697. //iSEM.CMDMCFFilename(fn);
  1698. ////延时1s??
  1699. //Thread.Sleep(30000);
  1700. //Thread.Sleep(5000);
  1701. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1702. //SendMsg("用宏抓一般图" + fn);
  1703. //iSEM.CMDMCFFilename(fn);
  1704. ////延时1s??
  1705. //Thread.Sleep(5000);
  1706. //SendMsg("所有图结束");
  1707. ////17.自动控制SEM拍截面照
  1708. //{
  1709. // //1.控制SEM放大到指定参数大小范围,6000x
  1710. // if (!iSEM.SetMagnification(6000))
  1711. // {
  1712. // return false;
  1713. // }
  1714. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1715. // if (!MeasParam.FocusMode)
  1716. // {
  1717. // //弹出手动对焦的窗口
  1718. // }
  1719. // else
  1720. // {
  1721. // //调用自动对焦模块
  1722. // }
  1723. // //3.设置SEM角度补偿cos36度
  1724. // if (!TiltCorrection(36))
  1725. // {
  1726. // return false;
  1727. // }
  1728. // //4.控制SEM拍照
  1729. // //5.保存照片4
  1730. // String fileName5 = WorkingFolder + ImageName5;
  1731. // if (!GetImage(ImageMode.SEM, fileName5))
  1732. // {
  1733. // return false;
  1734. // }
  1735. // //6.将照片传给客户,获取偏移坐标
  1736. // float x6 = 0, y6 = 0;
  1737. // float angle1 = 0;
  1738. // float mage = 10000;
  1739. // //7.根据坐标控制SEM移动到分析位置
  1740. // if (!iSEM.MoveStageXY(x6, y6))
  1741. // {
  1742. // return false;
  1743. // }
  1744. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1745. // float x7 = iSEM.GetStageAtX();
  1746. // float y7 = iSEM.GetStageAtY();
  1747. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1748. // {
  1749. // return false;
  1750. // }
  1751. // //9.控制SEM平行校正,并记录校正前初始值
  1752. // float foldAnagle = iSEM.GetScanRotation();
  1753. // if (foldAnagle == float.NaN)
  1754. // {
  1755. // return false;
  1756. // }
  1757. // if (!iSEM.SetScanRotation(angle1))
  1758. // {
  1759. // return false;
  1760. // }
  1761. // //10.控制SEM放大到指定参数大小范围
  1762. // if (!iSEM.SetMagnification(mage))
  1763. // {
  1764. // return false;
  1765. // }
  1766. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1767. // if (!MeasParam.FocusMode)
  1768. // {
  1769. // //弹出手动对焦的窗口
  1770. // }
  1771. // else
  1772. // {
  1773. // //调用自动对焦模块
  1774. // }
  1775. // //12.控制SEM对分析位置拍照
  1776. // String fileName6 = WorkingFolder + ImageName6;
  1777. // if (!GetImage(ImageMode.SEM, fileName6))
  1778. // {
  1779. // return false;
  1780. // }
  1781. // //13.保存照片
  1782. // //14.控制SEM取消电子束校正,回到初始值
  1783. // if (!iSEM.SetScanRotation(foldAnagle))
  1784. // {
  1785. // return false;
  1786. // }
  1787. //}
  1788. ////18.自动层高分析
  1789. //{
  1790. // //1.获取SEM Pixel Size给客户传入参数
  1791. // if (iSEM.GetPixelSize() == float.NaN)
  1792. // {
  1793. // return false;
  1794. // }
  1795. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1796. //}
  1797. ////19.自动能谱分析
  1798. //{
  1799. // //1. 确定能谱位置
  1800. // //2. 控制牛津打能谱
  1801. // //3. 能谱分析——面扫+线扫描
  1802. //}
  1803. #endregion
  1804. return true;
  1805. }
  1806. //非第一个孔的测试过程
  1807. public bool OtherHole()
  1808. {
  1809. //首先默认为SEM模式
  1810. arg.Picture_Information.Work_Status = "SEM";
  1811. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1812. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1813. {
  1814. if (!InsertPT())
  1815. {
  1816. arg.Message = "插入PT针失败";
  1817. SendMsg("1-0");
  1818. return false;
  1819. }
  1820. arg.Message = "插入PT针成功";
  1821. SendMsg("1-0");
  1822. }
  1823. //判断是否停止进程
  1824. if (key_stop)
  1825. {
  1826. return false;
  1827. }
  1828. //13. 自动 定位功能
  1829. if (!GetPoistion(false))
  1830. {
  1831. return false;
  1832. }
  1833. //判断是否停止进程
  1834. if (key_stop)
  1835. {
  1836. return false;
  1837. }
  1838. //14.自动控制FIB切割
  1839. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1840. {
  1841. if (!FIBCross())
  1842. {
  1843. return false;
  1844. }
  1845. }
  1846. //判断是否停止进程
  1847. if (key_stop)
  1848. {
  1849. return false;
  1850. }
  1851. //15.根据样品类型决定是否撤出PT针
  1852. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1853. {
  1854. if (!RetractPT())
  1855. {
  1856. arg.Message = "撤出PT针失败";
  1857. SendMsg("1-15");
  1858. return false;
  1859. }
  1860. arg.Message = "撤出PT针成功";
  1861. SendMsg("1-15");
  1862. }
  1863. //判断是否停止进程
  1864. if (key_stop)
  1865. {
  1866. return false;
  1867. }
  1868. // 16.找到切割位置
  1869. if (m_MsParam.Is_Photograph == false)
  1870. {
  1871. if (!FindCross())
  1872. {
  1873. return false;
  1874. }
  1875. //判断是否停止进程
  1876. if (key_stop)
  1877. {
  1878. return false;
  1879. }
  1880. }
  1881. //将过程17最后的拍照图片提出给18步进行调用
  1882. String img18 = "";
  1883. //17.自动控制SEM拍截面照
  1884. if (!ShotSection(ref img18))
  1885. {
  1886. return false;
  1887. }
  1888. //判断是否停止进程
  1889. if (key_stop)
  1890. {
  1891. return false;
  1892. }
  1893. //18.自动层高分析
  1894. if (m_MsParam.Is_Photograph == false)
  1895. {
  1896. float size = iSEM.GetPixelSize();
  1897. float mag = iSEM.GetMagnification();
  1898. int state = 0;
  1899. wr.Img_Measure_Size(img18, mag, size, out state);
  1900. if (state == 0)
  1901. {
  1902. arg.Message = "测量尺寸失败";
  1903. SendMsg("1-31");
  1904. return false;
  1905. }
  1906. arg.Message = "测量尺寸成功";
  1907. SendMsg("1-31");
  1908. }
  1909. #region 测试程序
  1910. //string fn;
  1911. //用宏抓一般图
  1912. //Thread.Sleep(5000);
  1913. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1914. //SendMsg("用宏抓一般图" + fn);
  1915. //iSEM.CMDMCFFilename(fn);
  1916. ////延时1s??
  1917. //Thread.Sleep(5000);
  1918. ////用宏抓好图
  1919. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1920. //SendMsg("用宏抓好图" + fn);
  1921. //iSEM.CMDMCFFilename(fn);
  1922. ////延时1s??
  1923. //Thread.Sleep(30000);
  1924. //Thread.Sleep(10000);
  1925. //WorkingFolder = m_measureFile.FilePath;
  1926. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1927. //SendMsg("SEM拍照存储到" + fileName6);
  1928. //if (!GetImage(ImageMode.SEM, fileName6))
  1929. //{
  1930. // SendMsg("SEM拍照失败");
  1931. // return false;
  1932. //}
  1933. ////用宏抓标志图
  1934. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1935. //SendMsg("用宏抓标志图" + fn);
  1936. //iSEM.CMDMCFFilename(fn);
  1937. ////延时1s??
  1938. //Thread.Sleep(30000);
  1939. ////恢复简单抓图
  1940. //Thread.Sleep(5000);
  1941. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1942. //SendMsg("用宏抓一般图" + fn);
  1943. //iSEM.CMDMCFFilename(fn);
  1944. //SendMsg("所有图结束");
  1945. #endregion
  1946. return true;
  1947. }
  1948. //测试完第一个孔后的样品台初始化操作。
  1949. //再调用CommonWork执行非第一个孔的测试过程
  1950. public bool OtherHole_Init()
  1951. {
  1952. //SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1953. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1954. #region 1. 初始化
  1955. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1956. //读取图像冻结状态
  1957. float ffrozen = iSEM.GetImageFrozen();
  1958. if (ffrozen == float.NaN)
  1959. {
  1960. return false;
  1961. }
  1962. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1963. {
  1964. //SendMsg("样品台恢复到水平");
  1965. //return true;
  1966. }
  1967. else
  1968. {
  1969. //SendMsg("禁止样品台恢复到水平");
  1970. return false;
  1971. }
  1972. //判断是否停止进程
  1973. if (key_stop)
  1974. {
  1975. return false;
  1976. }
  1977. //2. 调节样品1号孔的样品台6轴坐标
  1978. //3. 将样品1号孔坐标2存入数据库
  1979. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1980. if (!iSEM.SetStageGotoT(0))
  1981. {
  1982. return false;
  1983. }
  1984. while (true)
  1985. {
  1986. Thread.Sleep(10000);
  1987. if (iSEM.GetStageIs() == 0)
  1988. {
  1989. break;
  1990. }
  1991. }
  1992. //判断是否停止进程
  1993. if (key_stop)
  1994. {
  1995. return false;
  1996. }
  1997. //5. 获取光镜2号孔XY坐标
  1998. //SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1999. //6. 根据光镜坐标控制样品台移动
  2000. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2001. {
  2002. //SendMsg("移动失败");
  2003. return false;
  2004. }
  2005. while (true)
  2006. {
  2007. Thread.Sleep(10000);
  2008. if (iSEM.GetStageIs() == 0)
  2009. {
  2010. break;
  2011. }
  2012. }
  2013. //判断是否停止进程
  2014. if (key_stop)
  2015. {
  2016. return false;
  2017. }
  2018. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  2019. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  2020. {
  2021. //SendMsg("样品台旋转");
  2022. //return true;
  2023. }
  2024. else
  2025. {
  2026. //SendMsg("禁止样品台旋转");
  2027. return false;
  2028. }
  2029. if (!iSEM.SetStageGotoT(54))
  2030. {
  2031. return false;
  2032. }
  2033. while (true)
  2034. {
  2035. Thread.Sleep(10000);
  2036. if (iSEM.GetStageIs() == 0)
  2037. {
  2038. break;
  2039. }
  2040. }
  2041. //判断是否停止进程
  2042. if (key_stop)
  2043. {
  2044. return false;
  2045. }
  2046. //SendMsg("拉直操作");
  2047. #endregion
  2048. //其他操作与第一个孔相同
  2049. if (!OtherHole())
  2050. {
  2051. return false;
  2052. }
  2053. return true;
  2054. }
  2055. //角度补偿
  2056. public bool TiltCorrection(float a_fAngle)
  2057. {
  2058. //记录原来电镜的状态
  2059. // bool bTilt = false;
  2060. //float fOldTilt = iSEM.GetTiltCorrection();
  2061. //if (fOldTilt == float.NaN)
  2062. //{
  2063. // return false;
  2064. //}
  2065. //else if (fOldTilt == 1)
  2066. //{
  2067. // bTilt = true;
  2068. //}
  2069. //else if (fOldTilt == 0)
  2070. //{
  2071. // bTilt = false;
  2072. //}
  2073. //float fOldAngle = iSEM.GetTiltAngle();
  2074. //if (fOldAngle == float.NaN)
  2075. //{
  2076. // return false;
  2077. //}
  2078. //开启校正
  2079. //SendMsg("开启校正");
  2080. if (!iSEM.SetTiltAngleOn())
  2081. {
  2082. return false;
  2083. }
  2084. //设置校正角度
  2085. //if (!iSEM.SetTiltAngle(fOldAngle))
  2086. //{
  2087. // return false;
  2088. //}
  2089. //恢复原始状态
  2090. //SendMsg("校正角度"+ a_fAngle.ToString());
  2091. if (!iSEM.SetTiltAngle(a_fAngle))
  2092. {
  2093. return false;
  2094. }
  2095. //if (bTilt)
  2096. //{
  2097. // if (!iSEM.SetTiltCorrectionOn())
  2098. // {
  2099. // return false;
  2100. // }
  2101. //}
  2102. //else
  2103. //{
  2104. // if (!iSEM.SetTiltCorrectionOff())
  2105. // {
  2106. // return false;
  2107. // }
  2108. //}
  2109. return true;
  2110. }
  2111. //拍图
  2112. public bool GetImage(ImageMode a_mode, String a_fileName)
  2113. {
  2114. //1. 图像解冻
  2115. float foldFrozen = iSEM.GetImageFrozen();
  2116. if (foldFrozen == float.NaN)
  2117. {
  2118. return false;
  2119. }
  2120. if (!iSEM.ImageLive())
  2121. {
  2122. return false;
  2123. }
  2124. //2. 确认图像模式
  2125. if (ImageMode.SEM == a_mode)
  2126. {
  2127. if (!iSEM.CmdFIBModeSEM())
  2128. {
  2129. return false;
  2130. }
  2131. }
  2132. else if (ImageMode.FIB == a_mode)
  2133. {
  2134. if (!iSEM.CmdFIBModeFIB())
  2135. {
  2136. return false;
  2137. }
  2138. }
  2139. else
  2140. {
  2141. return false;
  2142. }
  2143. //3. 获取分辨率
  2144. int[] ImageSize = iSEM.GetImageStore();
  2145. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2146. {
  2147. return false;
  2148. }
  2149. short width = (short)ImageSize[0];
  2150. short height = (short)ImageSize[1];
  2151. //4. 抓图
  2152. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  2153. {
  2154. return false;
  2155. }
  2156. //5. 恢复初始状态
  2157. if (foldFrozen == 0)
  2158. {
  2159. if (!iSEM.ImageLive())
  2160. {
  2161. return false;
  2162. }
  2163. }
  2164. else if (foldFrozen == 1)
  2165. {
  2166. if (!iSEM.ImageFrozen())
  2167. {
  2168. return false;
  2169. }
  2170. }
  2171. return true;
  2172. }
  2173. //自动聚焦
  2174. public bool AutoFocus(FocusParam a_param, out int a_nWd, String step_code)
  2175. {
  2176. a_nWd = 0;
  2177. float wd = iSEM.GetWorkingDistance();
  2178. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  2179. if (a_param == null)
  2180. {
  2181. return false;
  2182. }
  2183. string path = a_param.Path;
  2184. if (!Directory.Exists(path))
  2185. {
  2186. return false;
  2187. }
  2188. string path_coarse = a_param.Path + "\\Coarse";
  2189. if (!Directory.Exists(path_coarse))
  2190. {
  2191. Directory.CreateDirectory(path_coarse);
  2192. }
  2193. string path_fine = a_param.Path + "\\Fine";
  2194. if (!Directory.Exists(path_fine))
  2195. {
  2196. Directory.CreateDirectory(path_fine);
  2197. }
  2198. //1. 拍照
  2199. //1.1, 粗拍照
  2200. //1.1.1, 根据参数计算拍照次数
  2201. double nUp = a_param.UP * 100.0 ;
  2202. double nDown = a_param.Down * 100.0;
  2203. double nStep = a_param.Step * 100.0;
  2204. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  2205. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  2206. //粗拍照
  2207. for (int i = 0; i < nTimes; i++)
  2208. {
  2209. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  2210. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2211. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  2212. Thread.Sleep(8000);
  2213. int swd = cWd / 100;
  2214. //SendMsg("wd = " + swd.ToString() +"um");
  2215. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  2216. arg.Picture_Information.Picture_FullPath = fileName;
  2217. if (!GetImage(ImageMode.SEM, fileName))
  2218. {
  2219. return false;
  2220. }
  2221. SendMsg(step_code);
  2222. }
  2223. //1.2, 选定细拍照的工作距离
  2224. int CorWd;
  2225. ChooseBest(path_coarse,out CorWd);
  2226. a_nWd = CorWd;
  2227. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  2228. //1.3, 细拍照
  2229. if ( (CorWd - a_param.Range * 100.0) <=0)
  2230. {
  2231. return false;
  2232. }
  2233. double nfUp = CorWd - a_param.Range * 100.0;
  2234. double nfStep = a_param.fStep * 100.0;
  2235. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  2236. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  2237. for (int i = 0; i < nfTimes; i++)
  2238. {
  2239. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  2240. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2241. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  2242. Thread.Sleep(8000);
  2243. int swd = cWd / 100;
  2244. //SendMsg("wd = " + swd.ToString() + "um");
  2245. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  2246. arg.Picture_Information.Picture_FullPath = fileName;
  2247. if (!GetImage(ImageMode.SEM, fileName))
  2248. {
  2249. return false;
  2250. }
  2251. SendMsg(step_code);
  2252. }
  2253. int fineWd;
  2254. ChooseBest(path_fine, out fineWd);
  2255. //SendMsg("wd fine max = " + fineWd.ToString());
  2256. a_nWd = fineWd;
  2257. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  2258. return true;
  2259. }
  2260. //LoG算子计算
  2261. private double LoGMean(string a_strImgPath)
  2262. {
  2263. //读入Img文件
  2264. if (!File.Exists(a_strImgPath))
  2265. {
  2266. return 0;
  2267. }
  2268. Mat src, gray_src;
  2269. int kernel_size = 3;
  2270. src = Cv2.ImRead(a_strImgPath);
  2271. gray_src = new Mat();
  2272. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2273. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2274. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2275. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2276. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  2277. Cv2.ConvertScaleAbs(src, src);
  2278. //图像的平均灰度
  2279. double meanValue = 0.0;
  2280. meanValue = Cv2.Mean(src)[0];
  2281. return meanValue;
  2282. }
  2283. //梯度计算
  2284. private double Tenengrad(string a_strImgPath)
  2285. {
  2286. //读入Img文件
  2287. if (!File.Exists(a_strImgPath))
  2288. {
  2289. return 0;
  2290. }
  2291. Mat src;
  2292. src = Cv2.ImRead(a_strImgPath);
  2293. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2294. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2295. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2296. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2297. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  2298. //图像的平均灰度
  2299. double meanValue = 0.0;
  2300. meanValue = Cv2.Mean(src)[0];
  2301. return meanValue;
  2302. }
  2303. //梯度计算
  2304. private double TTgrad(string a_strImgPath)
  2305. {
  2306. //读入Img文件
  2307. if (!File.Exists(a_strImgPath))
  2308. {
  2309. return 0;
  2310. }
  2311. Mat src;
  2312. src = Cv2.ImRead(a_strImgPath);
  2313. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2314. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2315. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2316. Mat scalex = new Mat();
  2317. Mat scaley = new Mat();
  2318. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  2319. Cv2.ConvertScaleAbs(src, scalex);
  2320. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  2321. Cv2.ConvertScaleAbs(src, scaley);
  2322. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  2323. //图像的平均灰度
  2324. double meanValue = 0.0;
  2325. meanValue = Cv2.Mean(src)[0];
  2326. return meanValue;
  2327. }
  2328. //三选二算法
  2329. private void ChooseBest(string a_strImgPath, out int a_nWd)
  2330. {
  2331. a_nWd = -1;
  2332. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  2333. float[] values = new float[files.Length];
  2334. double smax1 = LoGMean(files[0]);
  2335. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  2336. double smax2 = Tenengrad(files[0]);
  2337. int wdmax2 = wdmax1;
  2338. double smax3 = TTgrad(files[0]);
  2339. int wdmax3 = wdmax1;
  2340. int x = 0;
  2341. foreach (var file in files)
  2342. {
  2343. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  2344. double svalue1 = LoGMean(file);
  2345. double svalue2 = Tenengrad(file);
  2346. double svalue3 = TTgrad(file);
  2347. if (smax1 < svalue1)
  2348. {
  2349. smax1 = svalue1;
  2350. wdmax1 = wd;
  2351. }
  2352. if (smax2 < svalue2)
  2353. {
  2354. smax2 = svalue2;
  2355. wdmax2 = wd;
  2356. }
  2357. if (smax3 < svalue3)
  2358. {
  2359. smax3 = svalue3;
  2360. wdmax3 = wd;
  2361. }
  2362. x++;
  2363. }
  2364. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  2365. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  2366. {
  2367. a_nWd = wdmax1;
  2368. //SendMsg("焦距 = " + wdmax1.ToString());
  2369. }
  2370. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  2371. {
  2372. a_nWd = wdmax2;
  2373. //SendMsg("焦距 = " + wdmax2.ToString());
  2374. }
  2375. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  2376. {
  2377. a_nWd = wdmax3;
  2378. //SendMsg("焦距 = " + wdmax3.ToString());
  2379. }
  2380. else
  2381. {
  2382. //SendMsg("对焦失败。");
  2383. }
  2384. }
  2385. }
  2386. }