SmartSEM.cs 31 KB

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  1. //时间:20200610
  2. //作者:王琦
  3. //功能:SmartSEM remote API控制
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Runtime.InteropServices;
  8. using System.Text;
  9. using System.Threading.Tasks;
  10. using APILib;
  11. using System.Threading;
  12. namespace SmartSEMControl
  13. {
  14. //可能遇到的错误提示部分??在log加入之后添加
  15. class SmartSEM : ISEMControl
  16. {
  17. #region 模拟参数
  18. //放大缩小
  19. private String AP_MAG = "AP_MAG";
  20. //焦距
  21. private String AP_WD = "AP_WD";
  22. //亮度
  23. private String AP_BRIGHTNESS = "AP_BRIGHTNESS";
  24. //对比度
  25. private String AP_CONTRAST = "AP_CONTRAST";
  26. //亮度目标
  27. private String AP_AUTO_BRIGHT = "AP_AUTO_BRIGHT";
  28. //对比度目标
  29. private String AP_AUTO_CONTRAST = "AP_AUTO_CONTRAST";
  30. //消像散X轴
  31. private String AP_STIG_X = "AP_STIG_X";
  32. //消像散Y轴
  33. private String AP_STIG_Y = "AP_STIG_Y";
  34. //角度补偿
  35. private String AP_TILT_ANGLE = "AP_TILT_ANGLE";
  36. //SEM移动X
  37. private String AP_BEAMSHIFT_X = "AP_BEAMSHIFT_X";
  38. //SEM移动Y
  39. private String AP_BEAMSHIFT_Y = "AP_BEAMSHIFT_Y";
  40. //X轴移动到
  41. private String AP_STAGE_GOTO_X = "AP_STAGE_GOTO_X";
  42. //Y轴移动到
  43. private String AP_STAGE_GOTO_Y = "AP_STAGE_GOTO_Y";
  44. //Z轴移动到
  45. private String AP_STAGE_GOTO_Z = "AP_STAGE_GOTO_Z";
  46. //T轴移动到
  47. private String AP_STAGE_GOTO_T = "AP_STAGE_GOTO_T";
  48. //R轴移动到
  49. private String AP_STAGE_GOTO_R = "AP_STAGE_GOTO_R";
  50. //M轴移动到
  51. private String AP_STAGE_GOTO_M = "AP_STAGE_GOTO_M";
  52. //Scan Rotate角度
  53. private String AP_SCANROTATION = "AP_SCANROTATION";
  54. //像素大小
  55. private String AP_PIXEL_SIZE = "AP_PIXEL_SIZE";
  56. //X轴坐标
  57. private String AP_STAGE_AT_X = "AP_STAGE_AT_X";
  58. //Y轴坐标
  59. private String AP_STAGE_AT_Y = "AP_STAGE_AT_Y";
  60. //Z轴坐标
  61. private String AP_STAGE_AT_Z = "AP_STAGE_AT_Z";
  62. //T轴坐标
  63. private String AP_STAGE_AT_T = "AP_STAGE_AT_T";
  64. //R轴坐标
  65. private String AP_STAGE_AT_R = "AP_STAGE_AT_R";
  66. //M轴坐标
  67. private String AP_STAGE_AT_M = "AP_STAGE_AT_M";
  68. #endregion
  69. #region 数字参数
  70. //Scan Rotate开关
  71. private String DP_SCAN_ROT = "DP_SCAN_ROT";
  72. //取消电子束校正
  73. private String DP_TILT_CORRECTION = "DP_TILT_CORRECTION";
  74. //自动亮度对比度
  75. private String DP_AUTO_VIDEO = "DP_AUTO_VIDEO";
  76. //图像解冻
  77. private String DP_FROZEN = "DP_FROZEN";
  78. //图像类型切换
  79. private String DP_DETECTOR_TYPE = "DP_DETECTOR_TYPE";
  80. //图像大小
  81. private String DP_IMAGE_STORE = "DP_IMAGE_STORE";
  82. //样品台状态
  83. private String DP_STAGE_IS = "DP_STAGE_IS";
  84. //自动函数状态
  85. private String DP_AUTO_FUNCTION = "DP_AUTO_FUNCTION";
  86. #endregion
  87. #region 命令
  88. //开启电压
  89. private String CMD_BEAM_ON = "CMD_BEAM_ON";
  90. //关闭电压
  91. private String CMD_EHT_OFF = "CMD_EHT_OFF";
  92. //自动对焦1
  93. private String CMD_AUTO_FOCUS_COARSE = "CMD_AUTO_FOCUS_COARSE";
  94. //自动对焦2
  95. private String CMD_AUTO_FOCUS_FINE = "CMD_AUTO_FOCUS_FINE";
  96. //自动消像散
  97. private String CMD_AUTO_STIG = "CMD_AUTO_STIG";
  98. #endregion
  99. #region 宏文件命令
  100. private String MCF_FILENAME = "MCF_";
  101. #endregion
  102. #region APILib
  103. private Api CZEMApi = new Api();
  104. private Boolean m_bInitialised = false;
  105. #endregion
  106. #region 构造函数
  107. public SmartSEM()
  108. {
  109. Init();
  110. }
  111. #endregion
  112. #region 设备初始化
  113. /// <summary>
  114. /// 设备初始化
  115. /// </summary>
  116. /// <returns>return:true or false</returns>
  117. public Boolean Init()
  118. {
  119. long lrt = 0;
  120. #if ROMOTE
  121. lrt = CZEMApi.InitialiseRemoting();
  122. #else
  123. lrt = CZEMApi.Initialise("");
  124. #endif
  125. if (lrt != 0)
  126. {
  127. m_bInitialised = false;
  128. return false;
  129. }
  130. else
  131. {
  132. m_bInitialised = true;
  133. return true;
  134. }
  135. }
  136. #endregion
  137. #region 设备远程初始化
  138. /// <summary>
  139. /// 设备远程初始化
  140. /// </summary>
  141. /// <returns>return:true or false</returns>
  142. public Boolean InitRemoting()
  143. {
  144. long lrt = CZEMApi.InitialiseRemoting();
  145. if (lrt != 0)
  146. {
  147. m_bInitialised = false;
  148. return false;
  149. }
  150. else
  151. {
  152. m_bInitialised = true;
  153. return true;
  154. }
  155. }
  156. #endregion
  157. #region 连接状态
  158. public Boolean ConnectStatus()
  159. {
  160. return m_bInitialised;
  161. }
  162. #endregion
  163. #region 关闭设备
  164. /// <summary>
  165. /// 关闭设备
  166. /// </summary>
  167. /// <returns>true or false</returns>
  168. public Boolean Dispose()
  169. {
  170. if (m_bInitialised)
  171. {
  172. long lrt = CZEMApi.ClosingControl();
  173. if (lrt != 0)
  174. {
  175. return false;
  176. }
  177. else
  178. {
  179. m_bInitialised = false;
  180. return true;
  181. }
  182. }
  183. else
  184. {
  185. return false;
  186. }
  187. }
  188. #endregion
  189. #region 读参数函数
  190. private Boolean ReadParams(String str_param, ref float value)
  191. {
  192. if (m_bInitialised)
  193. {
  194. object varfloat = new VariantWrapper((float)0.0f);
  195. long lrt = CZEMApi.Get(str_param, ref varfloat);
  196. if (lrt != 0)
  197. {
  198. return false;
  199. }
  200. else
  201. {
  202. value = Convert.ToSingle(varfloat);
  203. return true;
  204. }
  205. }
  206. else
  207. {
  208. return false;
  209. }
  210. }
  211. #endregion
  212. #region 写模拟参数函数
  213. private Boolean WriteParams(String str_param, float value)
  214. {
  215. if (m_bInitialised)
  216. {
  217. //先取范围
  218. object varMin = new VariantWrapper((float)0.0f);
  219. object varMax = new VariantWrapper((float)0.0f);
  220. long lrt = CZEMApi.GetLimits(str_param, ref varMin, ref varMax);
  221. if (lrt != 0)
  222. {
  223. return false;
  224. }
  225. if (value <= Convert.ToSingle(varMax) && value >= Convert.ToSingle(varMin))
  226. {
  227. object varFloat = new VariantWrapper(value);
  228. lrt = CZEMApi.Set(str_param, ref varFloat);// set value
  229. if (lrt != 0)
  230. {
  231. return false;
  232. }
  233. return true;
  234. }
  235. else
  236. {
  237. return false;
  238. }
  239. }
  240. else
  241. {
  242. return false;
  243. }
  244. }
  245. #endregion
  246. #region 写数字参数函数
  247. private Boolean WriteDataParams(String str_param, float value)
  248. {
  249. if (m_bInitialised)
  250. {
  251. object varFloat = new VariantWrapper(value);
  252. long lrt = CZEMApi.Set(str_param, ref varFloat);// set value
  253. if (lrt != 0)
  254. {
  255. return false;
  256. }
  257. return true;
  258. }
  259. else
  260. {
  261. return false;
  262. }
  263. }
  264. #endregion
  265. #region 执行命令
  266. private Boolean ExecuteCmd(String cmd)
  267. {
  268. if (m_bInitialised)
  269. {
  270. long lrt = CZEMApi.Execute(cmd);// execute command
  271. if (lrt != 0)
  272. {
  273. return false;
  274. }
  275. else
  276. {
  277. return true;
  278. }
  279. }
  280. else
  281. {
  282. return false;
  283. }
  284. }
  285. #endregion
  286. #region 放大缩小
  287. /// <summary>
  288. /// 读取缩放倍数
  289. /// </summary>
  290. /// <returns>true:float or false:NaN</returns>
  291. public float GetMagnification()
  292. {
  293. float ret = 0;
  294. if(ReadParams(AP_MAG, ref ret))
  295. {
  296. return ret;
  297. }
  298. else
  299. {
  300. return float.NaN;
  301. }
  302. }
  303. /// <summary>
  304. /// 设置缩放倍数
  305. /// </summary>
  306. /// <param name="set">倍数</param>
  307. /// <returns>true or false</returns>
  308. public Boolean SetMagnification(float set)
  309. {
  310. return WriteParams(AP_MAG, set);
  311. }
  312. #endregion
  313. #region 焦距
  314. /// <summary>
  315. /// 读取工作距离
  316. /// </summary>
  317. /// <returns>true:float or false:NaN</returns>
  318. public float GetWorkingDistance()
  319. {
  320. float ret = 0;
  321. if (ReadParams(AP_WD, ref ret))
  322. {
  323. return ret;
  324. }
  325. else
  326. {
  327. return float.NaN;
  328. }
  329. }
  330. /// <summary>
  331. /// 设置焦距
  332. /// </summary>
  333. /// <param name="set">焦距</param>
  334. /// <returns>true or false</returns>
  335. public Boolean SetWorkingDistance(float set)
  336. {
  337. return WriteParams(AP_WD, set);
  338. }
  339. #endregion
  340. #region 亮度
  341. /// <summary>
  342. /// 读取亮度
  343. /// </summary>
  344. /// <returns>true:float or false:NaN</returns>
  345. public float GetBrightness()
  346. {
  347. float ret = 0;
  348. if (ReadParams(AP_BRIGHTNESS, ref ret))
  349. {
  350. return ret;
  351. }
  352. else
  353. {
  354. return float.NaN;
  355. }
  356. }
  357. /// <summary>
  358. /// 设置亮度
  359. /// </summary>
  360. /// <param name="set">亮度</param>
  361. /// <returns>true or false</returns>
  362. public Boolean SetBrightness(float set)
  363. {
  364. return WriteParams(AP_BRIGHTNESS, set);
  365. }
  366. #endregion
  367. #region 对比度
  368. /// <summary>
  369. /// 读取对比度
  370. /// </summary>
  371. /// <returns>true:float or false:NaN</returns>
  372. public float GetContrast()
  373. {
  374. float ret = 0;
  375. if (ReadParams(AP_CONTRAST, ref ret))
  376. {
  377. return ret;
  378. }
  379. else
  380. {
  381. return float.NaN;
  382. }
  383. }
  384. /// <summary>
  385. /// 设置对比度
  386. /// </summary>
  387. /// <param name="set">对比度</param>
  388. /// <returns>true or false</returns>
  389. public Boolean SetContrast(float set)
  390. {
  391. return WriteParams(AP_CONTRAST, set);
  392. }
  393. #endregion
  394. #region 自动亮度对比度
  395. /// <summary>
  396. /// 读取自动亮度对比度状态
  397. /// </summary>
  398. /// <returns>true:float or false:NaN</returns>
  399. public float GetAutoVideo()
  400. {
  401. float ret = 0;
  402. if (ReadParams(DP_AUTO_VIDEO, ref ret))
  403. {
  404. return ret;
  405. }
  406. else
  407. {
  408. return float.NaN;
  409. }
  410. }
  411. /// <summary>
  412. /// 设置自动亮度对比度状态
  413. /// </summary>
  414. /// <param name="set">0:off;1:B(亮度);2:C(对比度);3:BC</param>
  415. /// <returns>true or false</returns>
  416. public Boolean SetAutoVideoOff()
  417. {
  418. return WriteDataParams(DP_AUTO_VIDEO, (float)0);
  419. }
  420. public Boolean SetAutoVideoBrightness()
  421. {
  422. return WriteDataParams(DP_AUTO_VIDEO, (float)1);
  423. }
  424. public Boolean SetAutoVideoContrast()
  425. {
  426. return WriteDataParams(DP_AUTO_VIDEO, (float)2);
  427. }
  428. public Boolean SetAutoVideoBrightnessAndContrast()
  429. {
  430. return WriteDataParams(DP_AUTO_VIDEO, (float)3);
  431. }
  432. #endregion
  433. #region 亮度目标
  434. /// <summary>
  435. /// 读取亮度目标
  436. /// </summary>
  437. /// <returns>true:float or false:NaN</returns>
  438. public float GetAutoBright()
  439. {
  440. float ret = 0;
  441. if (ReadParams(AP_AUTO_BRIGHT, ref ret))
  442. {
  443. return ret;
  444. }
  445. else
  446. {
  447. return float.NaN;
  448. }
  449. }
  450. /// <summary>
  451. /// 设置亮度目标
  452. /// </summary>
  453. /// <param name="set">亮度</param>
  454. /// <returns>true or false</returns>
  455. public Boolean SetAutoBright(float set)
  456. {
  457. return WriteParams(AP_AUTO_BRIGHT, set);
  458. }
  459. #endregion
  460. #region 对比度目标
  461. /// <summary>
  462. /// 读取对比度目标
  463. /// </summary>
  464. /// <returns>true:float or false:NaN</returns>
  465. public float GetAutoContrast()
  466. {
  467. float ret = 0;
  468. if (ReadParams(AP_AUTO_CONTRAST, ref ret))
  469. {
  470. return ret;
  471. }
  472. else
  473. {
  474. return float.NaN;
  475. }
  476. }
  477. /// <summary>
  478. /// 设置对比度目标
  479. /// </summary>
  480. /// <param name="set">对比度目标</param>
  481. /// <returns>true or false</returns>
  482. public Boolean SetAutoContrast(float set)
  483. {
  484. return WriteParams(AP_AUTO_CONTRAST, set);
  485. }
  486. #endregion
  487. #region 消像散
  488. /// <summary>
  489. /// 读取消像散X
  490. /// </summary>
  491. /// <returns>true:float or false:NaN</returns>
  492. public float GetAstigmatismX()
  493. {
  494. float ret = 0;
  495. if (ReadParams(AP_STIG_X, ref ret))
  496. {
  497. return ret;
  498. }
  499. else
  500. {
  501. return float.NaN;
  502. }
  503. }
  504. /// <summary>
  505. /// 读取消像散Y
  506. /// </summary>
  507. /// <returns>true:float or false:NaN</returns>
  508. public float GetAstigmatismY()
  509. {
  510. float ret = 0;
  511. if (ReadParams(AP_STIG_Y, ref ret))
  512. {
  513. return ret;
  514. }
  515. else
  516. {
  517. return float.NaN;
  518. }
  519. }
  520. /// <summary>
  521. /// 设置消像散X
  522. /// </summary>
  523. /// <param name="set">对比度</param>
  524. /// <returns>true or false</returns>
  525. public Boolean SetAstigmatismX(float set)
  526. {
  527. return WriteParams(AP_STIG_X, set);
  528. }
  529. /// <summary>
  530. /// 设置消像散Y
  531. /// </summary>
  532. /// <param name="set">对比度</param>
  533. /// <returns>true or false</returns>
  534. public Boolean SetAstigmatismY(float set)
  535. {
  536. return WriteParams(AP_STIG_Y, set);
  537. }
  538. #endregion
  539. #region 角度补偿
  540. /// <summary>
  541. /// 读取角度补偿
  542. /// </summary>
  543. /// <returns>true:float or false:NaN</returns>
  544. public float GetTiltAngle()
  545. {
  546. float ret = 0;
  547. if (ReadParams(AP_TILT_ANGLE, ref ret))
  548. {
  549. return ret;
  550. }
  551. else
  552. {
  553. return float.NaN;
  554. }
  555. }
  556. /// <summary>
  557. /// 设置角度补偿
  558. /// </summary>
  559. /// <param name="set">角度补偿</param>
  560. /// <returns>true or false</returns>
  561. public Boolean SetTiltAngle(float set)
  562. {
  563. Boolean ret = false;
  564. ret = WriteDataParams(DP_TILT_CORRECTION, 1);
  565. ret = WriteParams(AP_TILT_ANGLE, set);
  566. ret = WriteDataParams(DP_TILT_CORRECTION, 0);
  567. return ret;
  568. }
  569. #endregion
  570. #region 图像大小
  571. public int[] GetImageStore()
  572. {
  573. int[] i_ret = new int[2];
  574. float ret = 0;
  575. if (ReadParams(DP_IMAGE_STORE, ref ret))
  576. {
  577. switch(ret)
  578. {
  579. case 0:
  580. i_ret[0] = 1024;
  581. i_ret[1] = 768;
  582. break;
  583. case 1:
  584. i_ret[0] = 512;
  585. i_ret[1] = 384;
  586. break;
  587. case 2:
  588. i_ret[0] = 2048;
  589. i_ret[1] = 1536;
  590. break;
  591. case 3:
  592. i_ret[0] = 3072;
  593. i_ret[1] = 2304;
  594. break;
  595. case 4:
  596. i_ret[0] = 4096;
  597. i_ret[1] = 3072;
  598. break;
  599. case 5:
  600. i_ret[0] = 5120;
  601. i_ret[1] = 3840;
  602. break;
  603. case 6:
  604. i_ret[0] = 6144;
  605. i_ret[1] = 4608;
  606. break;
  607. case 7:
  608. i_ret[0] = 8192;
  609. i_ret[1] = 6144;
  610. break;
  611. case 8:
  612. i_ret[0] = 12288;
  613. i_ret[1] = 9216;
  614. break;
  615. case 9:
  616. i_ret[0] = 16384;
  617. i_ret[1] = 12288;
  618. break;
  619. case 10:
  620. i_ret[0] = 24576;
  621. i_ret[1] = 18432;
  622. break;
  623. case 11:
  624. i_ret[0] = 32768;
  625. i_ret[1] = 24576;
  626. break;
  627. default:
  628. i_ret[0] = 0;
  629. i_ret[1] = 0;
  630. break;
  631. }
  632. }
  633. else
  634. {
  635. i_ret[0] = 0;
  636. i_ret[1] = 0;
  637. }
  638. return i_ret;
  639. }
  640. public Boolean SetImageStore(float set)
  641. {
  642. return WriteDataParams("DP_IMAGE_STORE", set);
  643. }
  644. #endregion
  645. #region 抓取图像
  646. /// <summary>
  647. /// 抓取图像
  648. /// </summary>
  649. /// <returns>true:float or false:NaN</returns>
  650. public Boolean GrabImage(String filename, short xoff,short yoff, short width,short height,short type)
  651. {
  652. if (m_bInitialised)
  653. {
  654. long lrt = CZEMApi.Grab(xoff, yoff, width, height, type, filename);
  655. if (lrt != 0)
  656. {
  657. return false;
  658. }
  659. else
  660. {
  661. ImageFrozen();
  662. return true;
  663. }
  664. }
  665. else
  666. {
  667. return false;
  668. }
  669. }
  670. #endregion
  671. #region 图像解冻
  672. public Boolean ImageFrozen()
  673. {
  674. return WriteDataParams(DP_FROZEN, (float)1);
  675. }
  676. public Boolean ImageLive()
  677. {
  678. return WriteDataParams(DP_FROZEN, (float)0);
  679. }
  680. #endregion
  681. #region 图像类型切换
  682. public Boolean DetectorType(float set)
  683. {
  684. return WriteDataParams(DP_DETECTOR_TYPE, set);
  685. }
  686. #endregion
  687. #region 电子束移动接口
  688. /// <summary>
  689. /// 获取电子束移动接口X
  690. /// </summary>
  691. /// <returns>true:float or false:NaN</returns>
  692. public float GetBeamShiftX()
  693. {
  694. float ret = 0;
  695. if (ReadParams(AP_BEAMSHIFT_X, ref ret))
  696. {
  697. return ret;
  698. }
  699. else
  700. {
  701. return float.NaN;
  702. }
  703. }
  704. /// <summary>
  705. /// 获取电子束移动接口Y
  706. /// </summary>
  707. /// <returns>true:float or false:NaN</returns>
  708. public float GetBeamShiftY()
  709. {
  710. float ret = 0;
  711. if (ReadParams(AP_BEAMSHIFT_Y, ref ret))
  712. {
  713. return ret;
  714. }
  715. else
  716. {
  717. return float.NaN;
  718. }
  719. }
  720. /// <summary>
  721. /// 设置电子束移动接口X
  722. /// </summary>
  723. /// <param name="set">X坐标</param>
  724. /// <returns>true or false</returns>
  725. public Boolean SetBeamShiftX(float set)
  726. {
  727. return WriteParams(AP_BEAMSHIFT_X, set);
  728. }
  729. /// <summary>
  730. /// 设置电子束移动接口Y
  731. /// </summary>
  732. /// <param name="set">X坐标</param>
  733. /// <returns>true or false</returns>
  734. public Boolean SetBeamShiftY(float set)
  735. {
  736. return WriteParams(AP_BEAMSHIFT_Y, set);
  737. }
  738. #endregion
  739. #region 样品台移动接口
  740. /// <summary>
  741. /// 返回样品台坐标数组
  742. /// </summary>
  743. /// <returns>Lenght=6</returns>
  744. public float[] GetStagePosition()
  745. {
  746. object retx = new VariantWrapper((float)0.0f);
  747. object rety = new VariantWrapper((float)0.0f);
  748. object retz = new VariantWrapper((float)0.0f);
  749. object rett = new VariantWrapper((float)0.0f);
  750. object retr = new VariantWrapper((float)0.0f);
  751. object retm = new VariantWrapper((float)0.0f);
  752. float[] ret = new float[6];
  753. if (m_bInitialised)
  754. {
  755. CZEMApi.GetStagePosition(ref retx, ref rety, ref retz, ref rett, ref retr, ref retm);
  756. ret[0] = Convert.ToSingle(retx);
  757. ret[1] = Convert.ToSingle(rety);
  758. ret[2] = Convert.ToSingle(retz);
  759. ret[3] = Convert.ToSingle(rett);
  760. ret[4] = Convert.ToSingle(retr);
  761. ret[5] = Convert.ToSingle(retm);
  762. }
  763. else
  764. {
  765. ret[0] = float.NaN;
  766. ret[1] = float.NaN;
  767. ret[2] = float.NaN;
  768. ret[3] = float.NaN;
  769. ret[4] = float.NaN;
  770. ret[5] = float.NaN;
  771. }
  772. return ret;
  773. }
  774. /// <summary>
  775. /// 样品台位置 X轴
  776. /// </summary>
  777. /// <returns>true:float or false:NaN</returns>
  778. public float GetStageAtX()
  779. {
  780. float ret = 0;
  781. if (ReadParams(AP_STAGE_AT_X, ref ret))
  782. {
  783. return ret;
  784. }
  785. else
  786. {
  787. return float.NaN;
  788. }
  789. }
  790. /// <summary>
  791. /// 样品台位置 Y轴
  792. /// </summary>
  793. /// <returns>true:float or false:NaN</returns>
  794. public float GetStageAtY()
  795. {
  796. float ret = 0;
  797. if (ReadParams(AP_STAGE_AT_Y, ref ret))
  798. {
  799. return ret;
  800. }
  801. else
  802. {
  803. return float.NaN;
  804. }
  805. }
  806. /// <summary>
  807. /// 样品台位置 Z轴
  808. /// </summary>
  809. /// <returns>true:float or false:NaN</returns>
  810. public float GetStageAtZ()
  811. {
  812. float ret = 0;
  813. if (ReadParams(AP_STAGE_AT_Z, ref ret))
  814. {
  815. return ret;
  816. }
  817. else
  818. {
  819. return float.NaN;
  820. }
  821. }
  822. /// <summary>
  823. /// 样品台位置 T轴
  824. /// </summary>
  825. /// <returns>true:float or false:NaN</returns>
  826. public float GetStageAtT()
  827. {
  828. float ret = 0;
  829. if (ReadParams(AP_STAGE_AT_T, ref ret))
  830. {
  831. return ret;
  832. }
  833. else
  834. {
  835. return float.NaN;
  836. }
  837. }
  838. /// <summary>
  839. /// 样品台位置 R轴
  840. /// </summary>
  841. /// <returns>true:float or false:NaN</returns>
  842. public float GetStageAtR()
  843. {
  844. float ret = 0;
  845. if (ReadParams(AP_STAGE_AT_R, ref ret))
  846. {
  847. return ret;
  848. }
  849. else
  850. {
  851. return float.NaN;
  852. }
  853. }
  854. /// <summary>
  855. /// 样品台位置 M轴
  856. /// </summary>
  857. /// <returns>true:float or false:NaN</returns>
  858. public float GetStageAtM()
  859. {
  860. float ret = 0;
  861. if (ReadParams(AP_STAGE_AT_M, ref ret))
  862. {
  863. return ret;
  864. }
  865. else
  866. {
  867. return float.NaN;
  868. }
  869. }
  870. /// <summary>
  871. /// 样品台位置 X轴
  872. /// </summary>
  873. /// <param name="set">X轴移动坐标</param>
  874. /// <returns></returns>
  875. public Boolean SetStageGotoX(float set)
  876. {
  877. return WriteParams(AP_STAGE_GOTO_X, set);
  878. }
  879. /// <summary>
  880. /// 样品台位置 Y轴
  881. /// </summary>
  882. /// <param name="set">Y轴移动坐标</param>
  883. /// <returns></returns>
  884. public Boolean SetStageGotoY(float set)
  885. {
  886. return WriteParams(AP_STAGE_GOTO_Y, set);
  887. }
  888. /// <summary>
  889. /// 样品台位置 Z轴
  890. /// </summary>
  891. /// <param name="set">Y轴移动坐标</param>
  892. /// <returns></returns>
  893. public Boolean SetStageGotoZ(float set)
  894. {
  895. return WriteParams(AP_STAGE_GOTO_Z, set);
  896. }
  897. /// <summary>
  898. /// 样品台位置 T轴
  899. /// </summary>
  900. /// <param name="set">Y轴移动坐标</param>
  901. /// <returns></returns>
  902. public Boolean SetStageGotoT(float set)
  903. {
  904. return WriteParams(AP_STAGE_GOTO_T, set);
  905. }
  906. /// <summary>
  907. /// 样品台位置 R轴
  908. /// </summary>
  909. /// <param name="set">Y轴移动坐标</param>
  910. /// <returns></returns>
  911. public Boolean SetStageGotoR(float set)
  912. {
  913. return WriteParams(AP_STAGE_GOTO_R, set);
  914. }
  915. /// <summary>
  916. /// 样品台位置 M轴
  917. /// </summary>
  918. /// <param name="set">M轴移动坐标</param>
  919. /// <returns></returns>
  920. public Boolean SetStageGotoM(float set)
  921. {
  922. return WriteParams(AP_STAGE_GOTO_M, set);
  923. }
  924. #endregion
  925. #region 移动样品台XY轴
  926. public Boolean MoveStageXY(float x,float y)
  927. {
  928. Boolean ret = false;
  929. ret = SetStageGotoX(x);
  930. ret = SetStageGotoY(y);
  931. return ret;
  932. }
  933. #endregion
  934. #region Scan Rotate角度接口
  935. /// <summary>
  936. /// 获取Scan Rotate角度接口
  937. /// </summary>
  938. /// <returns>true:float or false:NaN</returns>
  939. public float GetScanRotation()
  940. {
  941. float ret = 0;
  942. if (ReadParams(AP_SCANROTATION, ref ret))
  943. {
  944. return ret;
  945. }
  946. else
  947. {
  948. return float.NaN;
  949. }
  950. }
  951. /// <summary>
  952. /// 设置Scan Rotate角度接口
  953. /// </summary>
  954. /// <param name="set">角度补偿</param>
  955. /// <returns>true or false</returns>
  956. public Boolean SetScanRotation(float set)
  957. {
  958. Boolean ret = false;
  959. ret = WriteDataParams(DP_SCAN_ROT, 1);
  960. ret = WriteParams(AP_SCANROTATION, set);
  961. ret = WriteDataParams(DP_SCAN_ROT, 0);
  962. return ret;
  963. }
  964. #endregion
  965. #region 像素读取PixelSize
  966. /// <summary>
  967. /// 获取Pixel Size 接口,只读
  968. /// </summary>
  969. /// <returns>true:float or false:NaN</returns>
  970. public float GetPixelSize()
  971. {
  972. float ret = 0;
  973. if (ReadParams(AP_PIXEL_SIZE, ref ret))
  974. {
  975. return ret;
  976. }
  977. else
  978. {
  979. return float.NaN;
  980. }
  981. }
  982. #endregion
  983. #region 电子束校正设置
  984. /// <summary>
  985. /// 读取电子束校正状态
  986. /// </summary>
  987. /// <returns></returns>
  988. public float GetTiltCorrection()
  989. {
  990. float ret = 0;
  991. if (ReadParams(DP_TILT_CORRECTION, ref ret))
  992. {
  993. return ret;
  994. }
  995. else
  996. {
  997. return float.NaN;
  998. }
  999. }
  1000. /// <summary>
  1001. /// 设置电子束校正状态
  1002. /// </summary>
  1003. /// <param name="set"></param>
  1004. /// <returns></returns>
  1005. public Boolean SetTiltCorrectionOff()
  1006. {
  1007. return WriteDataParams(DP_TILT_CORRECTION, (float)0);
  1008. }
  1009. public Boolean SetTiltCorrectionOn()
  1010. {
  1011. return WriteDataParams(DP_TILT_CORRECTION, (float)1);
  1012. }
  1013. #endregion
  1014. #region 开启电压
  1015. public Boolean CmdOpenVoltage()
  1016. {
  1017. return ExecuteCmd(CMD_BEAM_ON);
  1018. }
  1019. #endregion
  1020. #region 关闭电压
  1021. public Boolean CmdCloseVoltage()
  1022. {
  1023. return ExecuteCmd(CMD_EHT_OFF);
  1024. }
  1025. #endregion
  1026. #region 自动对焦1
  1027. public Boolean CmdAutoFocusCoarse()
  1028. {
  1029. return ExecuteCmd(CMD_AUTO_FOCUS_COARSE);
  1030. }
  1031. #endregion
  1032. #region 自动对焦2
  1033. public Boolean CmdAutoFocusFine()
  1034. {
  1035. return ExecuteCmd(CMD_AUTO_FOCUS_FINE);
  1036. }
  1037. #endregion
  1038. #region 自动消像散
  1039. public Boolean CmdAutoStig()
  1040. {
  1041. return ExecuteCmd(CMD_AUTO_STIG);
  1042. }
  1043. #endregion
  1044. #region 调用宏文件命令
  1045. public Boolean CMDMCFFilename(String filename)
  1046. {
  1047. String CMDMCF = MCF_FILENAME + filename;
  1048. return ExecuteCmd(CMDMCF);
  1049. }
  1050. #endregion
  1051. #region 读取样品台状态
  1052. public float GetStageIs()
  1053. {
  1054. float ret = 0;
  1055. if (ReadParams(DP_STAGE_IS, ref ret))
  1056. {
  1057. return ret;
  1058. }
  1059. else
  1060. {
  1061. return float.NaN;
  1062. }
  1063. }
  1064. #endregion
  1065. #region 读取自动函数的状态
  1066. public float GetAutoFunction()
  1067. {
  1068. float ret = 0;
  1069. if (ReadParams(DP_AUTO_FUNCTION, ref ret))
  1070. {
  1071. return ret;
  1072. }
  1073. else
  1074. {
  1075. return float.NaN;
  1076. }
  1077. }
  1078. #endregion
  1079. public void InsertPT()
  1080. {
  1081. }
  1082. //PT针退出
  1083. public void OutputPT()
  1084. {
  1085. }
  1086. }
  1087. }