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- //时间:20200610
- //作者:王琦
- //功能:SmartSEM remote API控制
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Runtime.InteropServices;
- using System.Text;
- using System.Threading.Tasks;
- using APILib;
- using System.Threading;
- namespace SmartSEMControl
- {
- //可能遇到的错误提示部分??在log加入之后添加
- class SmartSEM : ISEMControl
- {
- #region 模拟参数
- //放大缩小
- private String AP_MAG = "AP_MAG";
- //焦距
- private String AP_WD = "AP_WD";
- //亮度
- private String AP_BRIGHTNESS = "AP_BRIGHTNESS";
- //对比度
- private String AP_CONTRAST = "AP_CONTRAST";
- //亮度目标
- private String AP_AUTO_BRIGHT = "AP_AUTO_BRIGHT";
- //对比度目标
- private String AP_AUTO_CONTRAST = "AP_AUTO_CONTRAST";
- //消像散X轴
- private String AP_STIG_X = "AP_STIG_X";
- //消像散Y轴
- private String AP_STIG_Y = "AP_STIG_Y";
- //角度补偿
- private String AP_TILT_ANGLE = "AP_TILT_ANGLE";
- //SEM移动X
- private String AP_BEAMSHIFT_X = "AP_BEAMSHIFT_X";
- //SEM移动Y
- private String AP_BEAMSHIFT_Y = "AP_BEAMSHIFT_Y";
- //X轴移动到
- private String AP_STAGE_GOTO_X = "AP_STAGE_GOTO_X";
- //Y轴移动到
- private String AP_STAGE_GOTO_Y = "AP_STAGE_GOTO_Y";
- //Z轴移动到
- private String AP_STAGE_GOTO_Z = "AP_STAGE_GOTO_Z";
- //T轴移动到
- private String AP_STAGE_GOTO_T = "AP_STAGE_GOTO_T";
- //R轴移动到
- private String AP_STAGE_GOTO_R = "AP_STAGE_GOTO_R";
- //M轴移动到
- private String AP_STAGE_GOTO_M = "AP_STAGE_GOTO_M";
- //Scan Rotate角度
- private String AP_SCANROTATION = "AP_SCANROTATION";
- //像素大小
- private String AP_PIXEL_SIZE = "AP_PIXEL_SIZE";
- //X轴坐标
- private String AP_STAGE_AT_X = "AP_STAGE_AT_X";
- //Y轴坐标
- private String AP_STAGE_AT_Y = "AP_STAGE_AT_Y";
- //Z轴坐标
- private String AP_STAGE_AT_Z = "AP_STAGE_AT_Z";
- //T轴坐标
- private String AP_STAGE_AT_T = "AP_STAGE_AT_T";
- //R轴坐标
- private String AP_STAGE_AT_R = "AP_STAGE_AT_R";
- //M轴坐标
- private String AP_STAGE_AT_M = "AP_STAGE_AT_M";
- #endregion
- #region 数字参数
- //Scan Rotate开关
- private String DP_SCAN_ROT = "DP_SCAN_ROT";
- //取消电子束校正
- private String DP_TILT_CORRECTION = "DP_TILT_CORRECTION";
- //自动亮度对比度
- private String DP_AUTO_VIDEO = "DP_AUTO_VIDEO";
- //图像解冻
- private String DP_FROZEN = "DP_FROZEN";
- //图像类型切换
- private String DP_DETECTOR_TYPE = "DP_DETECTOR_TYPE";
- //图像大小
- private String DP_IMAGE_STORE = "DP_IMAGE_STORE";
- //样品台状态
- private String DP_STAGE_IS = "DP_STAGE_IS";
- //自动函数状态
- private String DP_AUTO_FUNCTION = "DP_AUTO_FUNCTION";
- #endregion
- #region 命令
- //开启电压
- private String CMD_BEAM_ON = "CMD_BEAM_ON";
- //关闭电压
- private String CMD_EHT_OFF = "CMD_EHT_OFF";
- //自动对焦1
- private String CMD_AUTO_FOCUS_COARSE = "CMD_AUTO_FOCUS_COARSE";
- //自动对焦2
- private String CMD_AUTO_FOCUS_FINE = "CMD_AUTO_FOCUS_FINE";
- //自动消像散
- private String CMD_AUTO_STIG = "CMD_AUTO_STIG";
- #endregion
- #region 宏文件命令
- private String MCF_FILENAME = "MCF_";
- #endregion
- #region APILib
- private Api CZEMApi = new Api();
- private Boolean m_bInitialised = false;
- #endregion
- #region 构造函数
- public SmartSEM()
- {
- Init();
- }
- #endregion
- #region 设备初始化
- /// <summary>
- /// 设备初始化
- /// </summary>
- /// <returns>return:true or false</returns>
- public Boolean Init()
- {
- long lrt = 0;
- #if ROMOTE
- lrt = CZEMApi.InitialiseRemoting();
- #else
- lrt = CZEMApi.Initialise("");
- #endif
- if (lrt != 0)
- {
- m_bInitialised = false;
- return false;
- }
- else
- {
- m_bInitialised = true;
- return true;
- }
- }
- #endregion
- #region 设备远程初始化
- /// <summary>
- /// 设备远程初始化
- /// </summary>
- /// <returns>return:true or false</returns>
- public Boolean InitRemoting()
- {
- long lrt = CZEMApi.InitialiseRemoting();
- if (lrt != 0)
- {
- m_bInitialised = false;
- return false;
- }
- else
- {
- m_bInitialised = true;
- return true;
- }
- }
- #endregion
- #region 连接状态
- public Boolean ConnectStatus()
- {
- return m_bInitialised;
- }
- #endregion
- #region 关闭设备
- /// <summary>
- /// 关闭设备
- /// </summary>
- /// <returns>true or false</returns>
- public Boolean Dispose()
- {
- if (m_bInitialised)
- {
- long lrt = CZEMApi.ClosingControl();
- if (lrt != 0)
- {
- return false;
- }
- else
- {
- m_bInitialised = false;
- return true;
- }
- }
- else
- {
- return false;
- }
- }
- #endregion
- #region 读参数函数
- private Boolean ReadParams(String str_param, ref float value)
- {
- if (m_bInitialised)
- {
- object varfloat = new VariantWrapper((float)0.0f);
- long lrt = CZEMApi.Get(str_param, ref varfloat);
- if (lrt != 0)
- {
- return false;
- }
- else
- {
- value = Convert.ToSingle(varfloat);
- return true;
- }
- }
- else
- {
- return false;
- }
- }
- #endregion
- #region 写模拟参数函数
- private Boolean WriteParams(String str_param, float value)
- {
- if (m_bInitialised)
- {
- //先取范围
- object varMin = new VariantWrapper((float)0.0f);
- object varMax = new VariantWrapper((float)0.0f);
- long lrt = CZEMApi.GetLimits(str_param, ref varMin, ref varMax);
- if (lrt != 0)
- {
- return false;
- }
- if (value <= Convert.ToSingle(varMax) && value >= Convert.ToSingle(varMin))
- {
- object varFloat = new VariantWrapper(value);
- lrt = CZEMApi.Set(str_param, ref varFloat);// set value
- if (lrt != 0)
- {
- return false;
- }
- return true;
- }
- else
- {
- return false;
- }
- }
- else
- {
- return false;
- }
- }
- #endregion
- #region 写数字参数函数
- private Boolean WriteDataParams(String str_param, float value)
- {
- if (m_bInitialised)
- {
- object varFloat = new VariantWrapper(value);
- long lrt = CZEMApi.Set(str_param, ref varFloat);// set value
- if (lrt != 0)
- {
- return false;
- }
- return true;
- }
- else
- {
- return false;
- }
- }
- #endregion
- #region 执行命令
- private Boolean ExecuteCmd(String cmd)
- {
- if (m_bInitialised)
- {
- long lrt = CZEMApi.Execute(cmd);// execute command
- if (lrt != 0)
- {
- return false;
- }
- else
- {
- return true;
- }
- }
- else
- {
- return false;
- }
- }
- #endregion
- #region 放大缩小
- /// <summary>
- /// 读取缩放倍数
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetMagnification()
- {
- float ret = 0;
- if(ReadParams(AP_MAG, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置缩放倍数
- /// </summary>
- /// <param name="set">倍数</param>
- /// <returns>true or false</returns>
- public Boolean SetMagnification(float set)
- {
- return WriteParams(AP_MAG, set);
- }
- #endregion
- #region 焦距
- /// <summary>
- /// 读取工作距离
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetWorkingDistance()
- {
- float ret = 0;
- if (ReadParams(AP_WD, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置焦距
- /// </summary>
- /// <param name="set">焦距</param>
- /// <returns>true or false</returns>
- public Boolean SetWorkingDistance(float set)
- {
- return WriteParams(AP_WD, set);
- }
- #endregion
- #region 亮度
- /// <summary>
- /// 读取亮度
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetBrightness()
- {
- float ret = 0;
- if (ReadParams(AP_BRIGHTNESS, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置亮度
- /// </summary>
- /// <param name="set">亮度</param>
- /// <returns>true or false</returns>
- public Boolean SetBrightness(float set)
- {
- return WriteParams(AP_BRIGHTNESS, set);
- }
- #endregion
- #region 对比度
- /// <summary>
- /// 读取对比度
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetContrast()
- {
- float ret = 0;
- if (ReadParams(AP_CONTRAST, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置对比度
- /// </summary>
- /// <param name="set">对比度</param>
- /// <returns>true or false</returns>
- public Boolean SetContrast(float set)
- {
- return WriteParams(AP_CONTRAST, set);
- }
- #endregion
- #region 自动亮度对比度
- /// <summary>
- /// 读取自动亮度对比度状态
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetAutoVideo()
- {
- float ret = 0;
- if (ReadParams(DP_AUTO_VIDEO, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置自动亮度对比度状态
- /// </summary>
- /// <param name="set">0:off;1:B(亮度);2:C(对比度);3:BC</param>
- /// <returns>true or false</returns>
- public Boolean SetAutoVideoOff()
- {
- return WriteDataParams(DP_AUTO_VIDEO, (float)0);
- }
- public Boolean SetAutoVideoBrightness()
- {
- return WriteDataParams(DP_AUTO_VIDEO, (float)1);
- }
- public Boolean SetAutoVideoContrast()
- {
- return WriteDataParams(DP_AUTO_VIDEO, (float)2);
- }
- public Boolean SetAutoVideoBrightnessAndContrast()
- {
- return WriteDataParams(DP_AUTO_VIDEO, (float)3);
- }
- #endregion
- #region 亮度目标
- /// <summary>
- /// 读取亮度目标
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetAutoBright()
- {
- float ret = 0;
- if (ReadParams(AP_AUTO_BRIGHT, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置亮度目标
- /// </summary>
- /// <param name="set">亮度</param>
- /// <returns>true or false</returns>
- public Boolean SetAutoBright(float set)
- {
- return WriteParams(AP_AUTO_BRIGHT, set);
- }
- #endregion
- #region 对比度目标
- /// <summary>
- /// 读取对比度目标
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetAutoContrast()
- {
- float ret = 0;
- if (ReadParams(AP_AUTO_CONTRAST, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置对比度目标
- /// </summary>
- /// <param name="set">对比度目标</param>
- /// <returns>true or false</returns>
- public Boolean SetAutoContrast(float set)
- {
- return WriteParams(AP_AUTO_CONTRAST, set);
- }
- #endregion
- #region 消像散
- /// <summary>
- /// 读取消像散X
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetAstigmatismX()
- {
- float ret = 0;
- if (ReadParams(AP_STIG_X, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 读取消像散Y
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetAstigmatismY()
- {
- float ret = 0;
- if (ReadParams(AP_STIG_Y, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置消像散X
- /// </summary>
- /// <param name="set">对比度</param>
- /// <returns>true or false</returns>
- public Boolean SetAstigmatismX(float set)
- {
- return WriteParams(AP_STIG_X, set);
- }
- /// <summary>
- /// 设置消像散Y
- /// </summary>
- /// <param name="set">对比度</param>
- /// <returns>true or false</returns>
- public Boolean SetAstigmatismY(float set)
- {
- return WriteParams(AP_STIG_Y, set);
- }
- #endregion
- #region 角度补偿
- /// <summary>
- /// 读取角度补偿
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetTiltAngle()
- {
- float ret = 0;
- if (ReadParams(AP_TILT_ANGLE, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置角度补偿
- /// </summary>
- /// <param name="set">角度补偿</param>
- /// <returns>true or false</returns>
- public Boolean SetTiltAngle(float set)
- {
- Boolean ret = false;
- ret = WriteDataParams(DP_TILT_CORRECTION, 1);
- ret = WriteParams(AP_TILT_ANGLE, set);
- ret = WriteDataParams(DP_TILT_CORRECTION, 0);
- return ret;
- }
- #endregion
- #region 图像大小
- public int[] GetImageStore()
- {
- int[] i_ret = new int[2];
- float ret = 0;
- if (ReadParams(DP_IMAGE_STORE, ref ret))
- {
- switch(ret)
- {
- case 0:
- i_ret[0] = 1024;
- i_ret[1] = 768;
- break;
- case 1:
- i_ret[0] = 512;
- i_ret[1] = 384;
- break;
- case 2:
- i_ret[0] = 2048;
- i_ret[1] = 1536;
- break;
- case 3:
- i_ret[0] = 3072;
- i_ret[1] = 2304;
- break;
- case 4:
- i_ret[0] = 4096;
- i_ret[1] = 3072;
- break;
- case 5:
- i_ret[0] = 5120;
- i_ret[1] = 3840;
- break;
- case 6:
- i_ret[0] = 6144;
- i_ret[1] = 4608;
- break;
- case 7:
- i_ret[0] = 8192;
- i_ret[1] = 6144;
- break;
- case 8:
- i_ret[0] = 12288;
- i_ret[1] = 9216;
- break;
- case 9:
- i_ret[0] = 16384;
- i_ret[1] = 12288;
- break;
- case 10:
- i_ret[0] = 24576;
- i_ret[1] = 18432;
- break;
- case 11:
- i_ret[0] = 32768;
- i_ret[1] = 24576;
- break;
- default:
- i_ret[0] = 0;
- i_ret[1] = 0;
- break;
- }
- }
- else
- {
- i_ret[0] = 0;
- i_ret[1] = 0;
- }
- return i_ret;
- }
- public Boolean SetImageStore(float set)
- {
- return WriteDataParams("DP_IMAGE_STORE", set);
- }
- #endregion
- #region 抓取图像
- /// <summary>
- /// 抓取图像
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public Boolean GrabImage(String filename, short xoff,short yoff, short width,short height,short type)
- {
- if (m_bInitialised)
- {
- long lrt = CZEMApi.Grab(xoff, yoff, width, height, type, filename);
- if (lrt != 0)
- {
- return false;
- }
- else
- {
- ImageFrozen();
- return true;
- }
- }
- else
- {
- return false;
- }
- }
- #endregion
- #region 图像解冻
- public Boolean ImageFrozen()
- {
- return WriteDataParams(DP_FROZEN, (float)1);
- }
- public Boolean ImageLive()
- {
- return WriteDataParams(DP_FROZEN, (float)0);
- }
- #endregion
- #region 图像类型切换
- public Boolean DetectorType(float set)
- {
- return WriteDataParams(DP_DETECTOR_TYPE, set);
- }
- #endregion
- #region 电子束移动接口
- /// <summary>
- /// 获取电子束移动接口X
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetBeamShiftX()
- {
- float ret = 0;
- if (ReadParams(AP_BEAMSHIFT_X, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 获取电子束移动接口Y
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetBeamShiftY()
- {
- float ret = 0;
- if (ReadParams(AP_BEAMSHIFT_Y, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置电子束移动接口X
- /// </summary>
- /// <param name="set">X坐标</param>
- /// <returns>true or false</returns>
- public Boolean SetBeamShiftX(float set)
- {
- return WriteParams(AP_BEAMSHIFT_X, set);
- }
- /// <summary>
- /// 设置电子束移动接口Y
- /// </summary>
- /// <param name="set">X坐标</param>
- /// <returns>true or false</returns>
- public Boolean SetBeamShiftY(float set)
- {
- return WriteParams(AP_BEAMSHIFT_Y, set);
- }
- #endregion
- #region 样品台移动接口
- /// <summary>
- /// 返回样品台坐标数组
- /// </summary>
- /// <returns>Lenght=6</returns>
- public float[] GetStagePosition()
- {
- object retx = new VariantWrapper((float)0.0f);
- object rety = new VariantWrapper((float)0.0f);
- object retz = new VariantWrapper((float)0.0f);
- object rett = new VariantWrapper((float)0.0f);
- object retr = new VariantWrapper((float)0.0f);
- object retm = new VariantWrapper((float)0.0f);
- float[] ret = new float[6];
- if (m_bInitialised)
- {
- CZEMApi.GetStagePosition(ref retx, ref rety, ref retz, ref rett, ref retr, ref retm);
- ret[0] = Convert.ToSingle(retx);
- ret[1] = Convert.ToSingle(rety);
- ret[2] = Convert.ToSingle(retz);
- ret[3] = Convert.ToSingle(rett);
- ret[4] = Convert.ToSingle(retr);
- ret[5] = Convert.ToSingle(retm);
- }
- else
- {
- ret[0] = float.NaN;
- ret[1] = float.NaN;
- ret[2] = float.NaN;
- ret[3] = float.NaN;
- ret[4] = float.NaN;
- ret[5] = float.NaN;
- }
- return ret;
- }
- /// <summary>
- /// 样品台位置 X轴
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetStageAtX()
- {
- float ret = 0;
- if (ReadParams(AP_STAGE_AT_X, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 样品台位置 Y轴
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetStageAtY()
- {
- float ret = 0;
- if (ReadParams(AP_STAGE_AT_Y, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 样品台位置 Z轴
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetStageAtZ()
- {
- float ret = 0;
- if (ReadParams(AP_STAGE_AT_Z, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 样品台位置 T轴
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetStageAtT()
- {
- float ret = 0;
- if (ReadParams(AP_STAGE_AT_T, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 样品台位置 R轴
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetStageAtR()
- {
- float ret = 0;
- if (ReadParams(AP_STAGE_AT_R, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 样品台位置 M轴
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetStageAtM()
- {
- float ret = 0;
- if (ReadParams(AP_STAGE_AT_M, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 样品台位置 X轴
- /// </summary>
- /// <param name="set">X轴移动坐标</param>
- /// <returns></returns>
- public Boolean SetStageGotoX(float set)
- {
- return WriteParams(AP_STAGE_GOTO_X, set);
- }
- /// <summary>
- /// 样品台位置 Y轴
- /// </summary>
- /// <param name="set">Y轴移动坐标</param>
- /// <returns></returns>
- public Boolean SetStageGotoY(float set)
- {
- return WriteParams(AP_STAGE_GOTO_Y, set);
- }
- /// <summary>
- /// 样品台位置 Z轴
- /// </summary>
- /// <param name="set">Y轴移动坐标</param>
- /// <returns></returns>
- public Boolean SetStageGotoZ(float set)
- {
- return WriteParams(AP_STAGE_GOTO_Z, set);
- }
- /// <summary>
- /// 样品台位置 T轴
- /// </summary>
- /// <param name="set">Y轴移动坐标</param>
- /// <returns></returns>
- public Boolean SetStageGotoT(float set)
- {
- return WriteParams(AP_STAGE_GOTO_T, set);
- }
- /// <summary>
- /// 样品台位置 R轴
- /// </summary>
- /// <param name="set">Y轴移动坐标</param>
- /// <returns></returns>
- public Boolean SetStageGotoR(float set)
- {
- return WriteParams(AP_STAGE_GOTO_R, set);
- }
- /// <summary>
- /// 样品台位置 M轴
- /// </summary>
- /// <param name="set">M轴移动坐标</param>
- /// <returns></returns>
- public Boolean SetStageGotoM(float set)
- {
- return WriteParams(AP_STAGE_GOTO_M, set);
- }
- #endregion
- #region 移动样品台XY轴
- public Boolean MoveStageXY(float x,float y)
- {
- Boolean ret = false;
- ret = SetStageGotoX(x);
- ret = SetStageGotoY(y);
- return ret;
- }
- #endregion
- #region Scan Rotate角度接口
- /// <summary>
- /// 获取Scan Rotate角度接口
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetScanRotation()
- {
- float ret = 0;
- if (ReadParams(AP_SCANROTATION, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置Scan Rotate角度接口
- /// </summary>
- /// <param name="set">角度补偿</param>
- /// <returns>true or false</returns>
- public Boolean SetScanRotation(float set)
- {
- Boolean ret = false;
- ret = WriteDataParams(DP_SCAN_ROT, 1);
- ret = WriteParams(AP_SCANROTATION, set);
- ret = WriteDataParams(DP_SCAN_ROT, 0);
- return ret;
- }
- #endregion
- #region 像素读取PixelSize
- /// <summary>
- /// 获取Pixel Size 接口,只读
- /// </summary>
- /// <returns>true:float or false:NaN</returns>
- public float GetPixelSize()
- {
- float ret = 0;
- if (ReadParams(AP_PIXEL_SIZE, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- #endregion
- #region 电子束校正设置
- /// <summary>
- /// 读取电子束校正状态
- /// </summary>
- /// <returns></returns>
- public float GetTiltCorrection()
- {
- float ret = 0;
- if (ReadParams(DP_TILT_CORRECTION, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- /// <summary>
- /// 设置电子束校正状态
- /// </summary>
- /// <param name="set"></param>
- /// <returns></returns>
- public Boolean SetTiltCorrectionOff()
- {
- return WriteDataParams(DP_TILT_CORRECTION, (float)0);
- }
- public Boolean SetTiltCorrectionOn()
- {
- return WriteDataParams(DP_TILT_CORRECTION, (float)1);
- }
- #endregion
- #region 开启电压
- public Boolean CmdOpenVoltage()
- {
- return ExecuteCmd(CMD_BEAM_ON);
- }
- #endregion
- #region 关闭电压
- public Boolean CmdCloseVoltage()
- {
- return ExecuteCmd(CMD_EHT_OFF);
- }
- #endregion
- #region 自动对焦1
- public Boolean CmdAutoFocusCoarse()
- {
- return ExecuteCmd(CMD_AUTO_FOCUS_COARSE);
- }
- #endregion
- #region 自动对焦2
- public Boolean CmdAutoFocusFine()
- {
- return ExecuteCmd(CMD_AUTO_FOCUS_FINE);
- }
- #endregion
- #region 自动消像散
- public Boolean CmdAutoStig()
- {
- return ExecuteCmd(CMD_AUTO_STIG);
- }
- #endregion
- #region 调用宏文件命令
- public Boolean CMDMCFFilename(String filename)
- {
- String CMDMCF = MCF_FILENAME + filename;
- return ExecuteCmd(CMDMCF);
- }
- #endregion
- #region 读取样品台状态
- public float GetStageIs()
- {
- float ret = 0;
- if (ReadParams(DP_STAGE_IS, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- #endregion
- #region 读取自动函数的状态
- public float GetAutoFunction()
- {
- float ret = 0;
- if (ReadParams(DP_AUTO_FUNCTION, ref ret))
- {
- return ret;
- }
- else
- {
- return float.NaN;
- }
- }
- #endregion
- public void InsertPT()
- {
- }
- //PT针退出
- public void OutputPT()
- {
- }
- }
- }
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