Measure.cs 268 KB

12345678910111213141516171819202122232425262728293031323334353637383940414243444546474849505152535455565758596061626364656667686970717273747576777879808182838485868788899091929394959697989910010110210310410510610710810911011111211311411511611711811912012112212312412512612712812913013113213313413513613713813914014114214314414514614714814915015115215315415515615715815916016116216316416516616716816917017117217317417517617717817918018118218318418518618718818919019119219319419519619719819920020120220320420520620720820921021121221321421521621721821922022122222322422522622722822923023123223323423523623723823924024124224324424524624724824925025125225325425525625725825926026126226326426526626726826927027127227327427527627727827928028128228328428528628728828929029129229329429529629729829930030130230330430530630730830931031131231331431531631731831932032132232332432532632732832933033133233333433533633733833934034134234334434534634734834935035135235335435535635735835936036136236336436536636736836937037137237337437537637737837938038138238338438538638738838939039139239339439539639739839940040140240340440540640740840941041141241341441541641741841942042142242342442542642742842943043143243343443543643743843944044144244344444544644744844945045145245345445545645745845946046146246346446546646746846947047147247347447547647747847948048148248348448548648748848949049149249349449549649749849950050150250350450550650750850951051151251351451551651751851952052152252352452552652752852953053153253353453553653753853954054154254354454554654754854955055155255355455555655755855956056156256356456556656756856957057157257357457557657757857958058158258358458558658758858959059159259359459559659759859960060160260360460560660760860961061161261361461561661761861962062162262362462562662762862963063163263363463563663763863964064164264364464564664764864965065165265365465565665765865966066166266366466566666766866967067167267367467567667767867968068168268368468568668768868969069169269369469569669769869970070170270370470570670770870971071171271371471571671771871972072172272372472572672772872973073173273373473573673773873974074174274374474574674774874975075175275375475575675775875976076176276376476576676776876977077177277377477577677777877978078178278378478578678778878979079179279379479579679779879980080180280380480580680780880981081181281381481581681781881982082182282382482582682782882983083183283383483583683783883984084184284384484584684784884985085185285385485585685785885986086186286386486586686786886987087187287387487587687787887988088188288388488588688788888989089189289389489589689789889990090190290390490590690790890991091191291391491591691791891992092192292392492592692792892993093193293393493593693793893994094194294394494594694794894995095195295395495595695795895996096196296396496596696796896997097197297397497597697797897998098198298398498598698798898999099199299399499599699799899910001001100210031004100510061007100810091010101110121013101410151016101710181019102010211022102310241025102610271028102910301031103210331034103510361037103810391040104110421043104410451046104710481049105010511052105310541055105610571058105910601061106210631064106510661067106810691070107110721073107410751076107710781079108010811082108310841085108610871088108910901091109210931094109510961097109810991100110111021103110411051106110711081109111011111112111311141115111611171118111911201121112211231124112511261127112811291130113111321133113411351136113711381139114011411142114311441145114611471148114911501151115211531154115511561157115811591160116111621163116411651166116711681169117011711172117311741175117611771178117911801181118211831184118511861187118811891190119111921193119411951196119711981199120012011202120312041205120612071208120912101211121212131214121512161217121812191220122112221223122412251226122712281229123012311232123312341235123612371238123912401241124212431244124512461247124812491250125112521253125412551256125712581259126012611262126312641265126612671268126912701271127212731274127512761277127812791280128112821283128412851286128712881289129012911292129312941295129612971298129913001301130213031304130513061307130813091310131113121313131413151316131713181319132013211322132313241325132613271328132913301331133213331334133513361337133813391340134113421343134413451346134713481349135013511352135313541355135613571358135913601361136213631364136513661367136813691370137113721373137413751376137713781379138013811382138313841385138613871388138913901391139213931394139513961397139813991400140114021403140414051406140714081409141014111412141314141415141614171418141914201421142214231424142514261427142814291430143114321433143414351436143714381439144014411442144314441445144614471448144914501451145214531454145514561457145814591460146114621463146414651466146714681469147014711472147314741475147614771478147914801481148214831484148514861487148814891490149114921493149414951496149714981499150015011502150315041505150615071508150915101511151215131514151515161517151815191520152115221523152415251526152715281529153015311532153315341535153615371538153915401541154215431544154515461547154815491550155115521553155415551556155715581559156015611562156315641565156615671568156915701571157215731574157515761577157815791580158115821583158415851586158715881589159015911592159315941595159615971598159916001601160216031604160516061607160816091610161116121613161416151616161716181619162016211622162316241625162616271628162916301631163216331634163516361637163816391640164116421643164416451646164716481649165016511652165316541655165616571658165916601661166216631664166516661667166816691670167116721673167416751676167716781679168016811682168316841685168616871688168916901691169216931694169516961697169816991700170117021703170417051706170717081709171017111712171317141715171617171718171917201721172217231724172517261727172817291730173117321733173417351736173717381739174017411742174317441745174617471748174917501751175217531754175517561757175817591760176117621763176417651766176717681769177017711772177317741775177617771778177917801781178217831784178517861787178817891790179117921793179417951796179717981799180018011802180318041805180618071808180918101811181218131814181518161817181818191820182118221823182418251826182718281829183018311832183318341835183618371838183918401841184218431844184518461847184818491850185118521853185418551856185718581859186018611862186318641865186618671868186918701871187218731874187518761877187818791880188118821883188418851886188718881889189018911892189318941895189618971898189919001901190219031904190519061907190819091910191119121913191419151916191719181919192019211922192319241925192619271928192919301931193219331934193519361937193819391940194119421943194419451946194719481949195019511952195319541955195619571958195919601961196219631964196519661967196819691970197119721973197419751976197719781979198019811982198319841985198619871988198919901991199219931994199519961997199819992000200120022003200420052006200720082009201020112012201320142015201620172018201920202021202220232024202520262027202820292030203120322033203420352036203720382039204020412042204320442045204620472048204920502051205220532054205520562057205820592060206120622063206420652066206720682069207020712072207320742075207620772078207920802081208220832084208520862087208820892090209120922093209420952096209720982099210021012102210321042105210621072108210921102111211221132114211521162117211821192120212121222123212421252126212721282129213021312132213321342135213621372138213921402141214221432144214521462147214821492150215121522153215421552156215721582159216021612162216321642165216621672168216921702171217221732174217521762177217821792180218121822183218421852186218721882189219021912192219321942195219621972198219922002201220222032204220522062207220822092210221122122213221422152216221722182219222022212222222322242225222622272228222922302231223222332234223522362237223822392240224122422243224422452246224722482249225022512252225322542255225622572258225922602261226222632264226522662267226822692270227122722273227422752276227722782279228022812282228322842285228622872288228922902291229222932294229522962297229822992300230123022303230423052306230723082309231023112312231323142315231623172318231923202321232223232324232523262327232823292330233123322333233423352336233723382339234023412342234323442345234623472348234923502351235223532354235523562357235823592360236123622363236423652366236723682369237023712372237323742375237623772378237923802381238223832384238523862387238823892390239123922393239423952396239723982399240024012402240324042405240624072408240924102411241224132414241524162417241824192420242124222423242424252426242724282429243024312432243324342435243624372438243924402441244224432444244524462447244824492450245124522453245424552456245724582459246024612462246324642465246624672468246924702471247224732474247524762477247824792480248124822483248424852486248724882489249024912492249324942495249624972498249925002501250225032504250525062507250825092510251125122513251425152516251725182519252025212522252325242525252625272528252925302531253225332534253525362537253825392540254125422543254425452546254725482549255025512552255325542555255625572558255925602561256225632564256525662567256825692570257125722573257425752576257725782579258025812582258325842585258625872588258925902591259225932594259525962597259825992600260126022603260426052606260726082609261026112612261326142615261626172618261926202621262226232624262526262627262826292630263126322633263426352636263726382639264026412642264326442645264626472648264926502651265226532654265526562657265826592660266126622663266426652666266726682669267026712672267326742675267626772678267926802681268226832684268526862687268826892690269126922693269426952696269726982699270027012702270327042705270627072708270927102711271227132714271527162717271827192720272127222723272427252726272727282729273027312732273327342735273627372738273927402741274227432744274527462747274827492750275127522753275427552756275727582759276027612762276327642765276627672768276927702771277227732774277527762777277827792780278127822783278427852786278727882789279027912792279327942795279627972798279928002801280228032804280528062807280828092810281128122813281428152816281728182819282028212822282328242825282628272828282928302831283228332834283528362837283828392840284128422843284428452846284728482849285028512852285328542855285628572858285928602861286228632864286528662867286828692870287128722873287428752876287728782879288028812882288328842885288628872888288928902891289228932894289528962897289828992900290129022903290429052906290729082909291029112912291329142915291629172918291929202921292229232924292529262927292829292930293129322933293429352936293729382939294029412942294329442945294629472948294929502951295229532954295529562957295829592960296129622963296429652966296729682969297029712972297329742975297629772978297929802981298229832984298529862987298829892990299129922993299429952996299729982999300030013002300330043005300630073008300930103011301230133014301530163017301830193020302130223023302430253026302730283029303030313032303330343035303630373038303930403041304230433044304530463047304830493050305130523053305430553056305730583059306030613062306330643065306630673068306930703071307230733074307530763077307830793080308130823083308430853086308730883089309030913092309330943095309630973098309931003101310231033104310531063107310831093110311131123113311431153116311731183119312031213122312331243125312631273128312931303131313231333134313531363137313831393140314131423143314431453146314731483149315031513152315331543155315631573158315931603161316231633164316531663167316831693170317131723173317431753176317731783179318031813182318331843185318631873188318931903191319231933194319531963197319831993200320132023203320432053206320732083209321032113212321332143215321632173218321932203221322232233224322532263227322832293230323132323233323432353236323732383239324032413242324332443245324632473248324932503251325232533254325532563257325832593260326132623263326432653266326732683269327032713272327332743275327632773278327932803281328232833284328532863287328832893290329132923293329432953296329732983299330033013302330333043305330633073308330933103311331233133314331533163317331833193320332133223323332433253326332733283329333033313332333333343335333633373338333933403341334233433344334533463347334833493350335133523353335433553356335733583359336033613362336333643365336633673368336933703371337233733374337533763377337833793380338133823383338433853386338733883389339033913392339333943395339633973398339934003401340234033404340534063407340834093410341134123413341434153416341734183419342034213422342334243425342634273428342934303431343234333434343534363437343834393440344134423443344434453446344734483449345034513452345334543455345634573458345934603461346234633464346534663467346834693470347134723473347434753476347734783479348034813482348334843485348634873488348934903491349234933494349534963497349834993500350135023503350435053506350735083509351035113512351335143515351635173518351935203521352235233524352535263527352835293530353135323533353435353536353735383539354035413542354335443545354635473548354935503551355235533554355535563557355835593560356135623563356435653566356735683569357035713572357335743575357635773578357935803581358235833584358535863587358835893590359135923593359435953596359735983599360036013602360336043605360636073608360936103611361236133614361536163617361836193620362136223623362436253626362736283629363036313632363336343635363636373638363936403641364236433644364536463647364836493650365136523653365436553656365736583659366036613662366336643665366636673668366936703671367236733674367536763677367836793680368136823683368436853686368736883689369036913692369336943695369636973698369937003701370237033704370537063707370837093710371137123713371437153716371737183719372037213722372337243725372637273728372937303731373237333734373537363737373837393740374137423743374437453746374737483749375037513752375337543755375637573758375937603761376237633764376537663767376837693770377137723773377437753776377737783779378037813782378337843785378637873788378937903791379237933794379537963797379837993800380138023803380438053806380738083809381038113812381338143815381638173818381938203821382238233824382538263827382838293830383138323833383438353836383738383839384038413842384338443845384638473848384938503851385238533854385538563857385838593860386138623863386438653866386738683869387038713872387338743875387638773878387938803881388238833884388538863887388838893890389138923893389438953896389738983899390039013902390339043905390639073908390939103911391239133914391539163917391839193920392139223923392439253926392739283929393039313932393339343935393639373938393939403941394239433944394539463947394839493950395139523953395439553956395739583959396039613962396339643965396639673968396939703971397239733974397539763977397839793980398139823983398439853986398739883989399039913992399339943995399639973998399940004001400240034004400540064007400840094010401140124013401440154016401740184019402040214022402340244025402640274028402940304031403240334034403540364037403840394040404140424043404440454046404740484049405040514052405340544055405640574058405940604061406240634064406540664067406840694070407140724073407440754076407740784079408040814082408340844085408640874088408940904091409240934094409540964097409840994100410141024103410441054106410741084109411041114112411341144115411641174118411941204121412241234124412541264127412841294130413141324133413441354136413741384139414041414142414341444145414641474148414941504151415241534154415541564157415841594160416141624163416441654166416741684169417041714172417341744175417641774178417941804181418241834184418541864187418841894190419141924193419441954196419741984199420042014202420342044205420642074208420942104211421242134214421542164217421842194220422142224223422442254226422742284229423042314232423342344235423642374238423942404241424242434244424542464247424842494250425142524253425442554256425742584259426042614262426342644265426642674268426942704271427242734274427542764277427842794280428142824283428442854286428742884289429042914292429342944295429642974298429943004301430243034304430543064307430843094310431143124313431443154316431743184319432043214322432343244325432643274328432943304331433243334334433543364337433843394340434143424343434443454346434743484349435043514352435343544355435643574358435943604361436243634364436543664367436843694370437143724373437443754376437743784379438043814382438343844385438643874388438943904391439243934394439543964397439843994400440144024403440444054406440744084409441044114412441344144415441644174418441944204421442244234424442544264427442844294430443144324433443444354436443744384439444044414442444344444445444644474448444944504451445244534454445544564457445844594460446144624463446444654466446744684469447044714472447344744475447644774478447944804481448244834484448544864487448844894490449144924493449444954496449744984499450045014502450345044505450645074508450945104511451245134514451545164517451845194520452145224523452445254526452745284529453045314532453345344535453645374538453945404541454245434544454545464547454845494550455145524553455445554556455745584559456045614562456345644565456645674568456945704571457245734574457545764577457845794580458145824583458445854586458745884589459045914592459345944595459645974598459946004601460246034604460546064607460846094610461146124613461446154616461746184619462046214622462346244625462646274628462946304631463246334634463546364637463846394640464146424643464446454646464746484649465046514652465346544655465646574658465946604661466246634664466546664667466846694670467146724673467446754676467746784679468046814682468346844685468646874688468946904691469246934694469546964697469846994700470147024703470447054706470747084709471047114712471347144715471647174718471947204721472247234724472547264727472847294730473147324733473447354736473747384739474047414742474347444745474647474748474947504751475247534754475547564757475847594760476147624763476447654766476747684769477047714772477347744775477647774778477947804781478247834784478547864787478847894790479147924793479447954796479747984799480048014802480348044805480648074808480948104811481248134814481548164817481848194820482148224823482448254826482748284829483048314832483348344835483648374838483948404841484248434844484548464847484848494850485148524853485448554856485748584859486048614862486348644865486648674868486948704871487248734874487548764877487848794880488148824883488448854886488748884889489048914892489348944895489648974898489949004901490249034904490549064907490849094910491149124913491449154916491749184919492049214922492349244925492649274928492949304931493249334934493549364937493849394940494149424943494449454946494749484949495049514952495349544955495649574958495949604961496249634964496549664967496849694970497149724973497449754976497749784979498049814982498349844985498649874988498949904991499249934994499549964997499849995000500150025003500450055006500750085009501050115012501350145015501650175018501950205021502250235024502550265027502850295030503150325033503450355036503750385039504050415042504350445045504650475048504950505051505250535054505550565057505850595060506150625063506450655066506750685069507050715072507350745075507650775078507950805081508250835084508550865087508850895090509150925093509450955096509750985099510051015102510351045105510651075108510951105111511251135114511551165117511851195120512151225123512451255126512751285129513051315132513351345135513651375138513951405141514251435144514551465147514851495150515151525153515451555156515751585159516051615162516351645165516651675168516951705171517251735174517551765177517851795180518151825183518451855186518751885189519051915192519351945195519651975198519952005201520252035204520552065207520852095210521152125213521452155216521752185219522052215222522352245225522652275228522952305231523252335234523552365237523852395240524152425243524452455246524752485249525052515252525352545255525652575258525952605261526252635264526552665267526852695270527152725273527452755276527752785279528052815282528352845285528652875288528952905291529252935294529552965297529852995300530153025303530453055306530753085309531053115312531353145315531653175318531953205321532253235324532553265327532853295330533153325333533453355336533753385339534053415342534353445345534653475348534953505351535253535354535553565357535853595360536153625363536453655366536753685369537053715372537353745375537653775378537953805381538253835384538553865387538853895390539153925393539453955396539753985399540054015402540354045405540654075408540954105411541254135414541554165417541854195420542154225423542454255426542754285429543054315432543354345435543654375438543954405441544254435444544554465447544854495450545154525453545454555456545754585459546054615462546354645465546654675468546954705471547254735474547554765477547854795480548154825483548454855486548754885489549054915492549354945495549654975498549955005501550255035504550555065507550855095510551155125513551455155516551755185519552055215522552355245525552655275528552955305531553255335534553555365537553855395540554155425543554455455546554755485549555055515552555355545555555655575558555955605561556255635564556555665567556855695570557155725573557455755576557755785579558055815582558355845585558655875588558955905591559255935594559555965597559855995600560156025603560456055606560756085609561056115612561356145615561656175618561956205621562256235624562556265627562856295630563156325633563456355636563756385639564056415642564356445645564656475648564956505651565256535654565556565657565856595660566156625663566456655666566756685669567056715672567356745675567656775678567956805681568256835684568556865687568856895690569156925693569456955696569756985699570057015702570357045705570657075708570957105711571257135714571557165717571857195720572157225723572457255726572757285729573057315732573357345735573657375738573957405741574257435744574557465747574857495750575157525753575457555756575757585759576057615762576357645765576657675768576957705771577257735774577557765777577857795780578157825783578457855786578757885789579057915792579357945795579657975798579958005801580258035804580558065807580858095810581158125813581458155816581758185819582058215822582358245825582658275828582958305831583258335834583558365837583858395840584158425843584458455846584758485849585058515852585358545855585658575858585958605861586258635864586558665867586858695870587158725873587458755876587758785879588058815882588358845885588658875888588958905891589258935894589558965897589858995900590159025903590459055906590759085909591059115912591359145915591659175918591959205921592259235924592559265927592859295930593159325933593459355936593759385939594059415942594359445945594659475948594959505951595259535954595559565957595859595960596159625963596459655966596759685969597059715972597359745975597659775978597959805981598259835984598559865987598859895990599159925993599459955996599759985999600060016002600360046005600660076008600960106011601260136014601560166017601860196020602160226023602460256026602760286029603060316032603360346035603660376038603960406041604260436044604560466047604860496050605160526053605460556056605760586059606060616062606360646065606660676068606960706071607260736074607560766077607860796080608160826083608460856086608760886089609060916092609360946095609660976098609961006101610261036104610561066107610861096110611161126113611461156116611761186119612061216122612361246125612661276128612961306131613261336134613561366137613861396140614161426143614461456146614761486149615061516152615361546155615661576158615961606161616261636164616561666167616861696170617161726173617461756176617761786179618061816182618361846185618661876188618961906191619261936194619561966197619861996200620162026203620462056206620762086209621062116212621362146215621662176218621962206221622262236224622562266227622862296230623162326233623462356236623762386239624062416242624362446245624662476248624962506251625262536254625562566257625862596260626162626263626462656266626762686269627062716272627362746275627662776278627962806281628262836284628562866287628862896290629162926293629462956296629762986299630063016302630363046305630663076308630963106311631263136314631563166317631863196320632163226323632463256326632763286329633063316332633363346335633663376338633963406341634263436344634563466347634863496350635163526353635463556356635763586359636063616362636363646365636663676368636963706371637263736374637563766377637863796380638163826383638463856386638763886389639063916392639363946395639663976398639964006401640264036404640564066407640864096410641164126413641464156416641764186419642064216422642364246425642664276428642964306431643264336434643564366437643864396440644164426443644464456446644764486449645064516452645364546455645664576458645964606461646264636464646564666467646864696470647164726473647464756476647764786479648064816482648364846485648664876488648964906491649264936494649564966497649864996500650165026503650465056506650765086509651065116512651365146515651665176518651965206521652265236524652565266527652865296530653165326533653465356536653765386539654065416542654365446545654665476548654965506551655265536554655565566557655865596560656165626563656465656566656765686569657065716572657365746575657665776578657965806581658265836584658565866587658865896590659165926593659465956596659765986599660066016602660366046605660666076608660966106611661266136614661566166617661866196620662166226623662466256626662766286629663066316632663366346635663666376638663966406641664266436644664566466647664866496650665166526653665466556656665766586659666066616662666366646665666666676668666966706671667266736674667566766677667866796680668166826683668466856686668766886689669066916692669366946695669666976698669967006701670267036704670567066707670867096710671167126713671467156716671767186719672067216722672367246725672667276728672967306731673267336734673567366737673867396740674167426743674467456746674767486749675067516752675367546755675667576758675967606761676267636764676567666767676867696770677167726773677467756776677767786779678067816782678367846785678667876788678967906791679267936794679567966797679867996800680168026803680468056806
  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. #region 变量定义
  321. //Web接口类
  322. public WebResult wr = null;
  323. //SmartSEM远程路径
  324. public String RemoteELYPath = "";
  325. public String RemoteMLFPath = "";
  326. //扫描周期
  327. private float cycle_time = 0;
  328. //人工干预
  329. public int hand_intervene = 2;
  330. //样品台保护值
  331. public float X_Min = 0;
  332. public float X_Max = 0.13f;
  333. public float Y_Min = 0;
  334. public float Y_Max = 0.13f;
  335. public float Z_Min = 0;
  336. public float Z_Max = 0.05f;
  337. public float T_Min = -4;
  338. public float T_Max = 70;
  339. public float R_Min = -380;
  340. public float R_Max = 380;
  341. public float M_Min = 0;
  342. public float M_Max = 0.012f;
  343. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  344. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  345. //定义一个全局的消息类
  346. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  347. //全局只有一个fatorySEM
  348. static FactoryHardware factorySEM = FactoryHardware.Instance;
  349. ISEMControl iSEM = factorySEM.ISEM;
  350. //@的作用是不用转义字符\\只打一个就行
  351. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  352. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  354. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  355. const String ImageName31 = @"FIBBefore.tif";
  356. const String ImageName32 = @"FIBAfter.tif";
  357. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  358. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  359. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  360. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  361. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  362. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  364. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  365. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  366. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  367. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  368. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  369. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  370. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  371. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  372. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  373. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  374. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  375. const String ElyDeposition = @"Deposition.ely"; //沉积
  376. const String ElyCrossSection = @"CrossSection.ely"; //切割
  377. const float fMin = (float)0.0000002; //单位是米
  378. const float fSateyZ = (float)0.03;//单位是米
  379. public Boolean key_stop = false;
  380. String focus_path = "";
  381. String FIBfocus_path = "";
  382. String StigX_path = "";
  383. String StigY_path = "";
  384. String EDS_path = "";
  385. String data_path = "";
  386. int m_nWorkHoleNo = -1;
  387. //测量文件
  388. private MeasureFile m_measureFile;
  389. public MeasureFile MeasureFile
  390. {
  391. get { return this.m_measureFile; }
  392. set { this.m_measureFile = value; }
  393. }
  394. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  395. private List<MeasureData.CutHole> m_cutHoles;
  396. public List<MeasureData.CutHole> cutHoles
  397. {
  398. get { return this.m_cutHoles; }
  399. set { this.m_cutHoles = value; }
  400. }
  401. //工作文件夹
  402. private string m_WorkingFolder;
  403. public string WorkingFolder
  404. {
  405. get { return this.m_WorkingFolder; }
  406. set { this.m_WorkingFolder = value; }
  407. }
  408. //程序当前路径
  409. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  410. //线程状态
  411. private ThreadStatus m_ThreadStatus;
  412. public ThreadStatus TStatus
  413. {
  414. get { return this.m_ThreadStatus; }
  415. set { this.m_ThreadStatus = value; }
  416. }
  417. #endregion
  418. //构造函数
  419. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  420. {
  421. LogManager.AddHardwareLog("进入构造函数", true);
  422. TStatus = new ThreadStatus();
  423. cutHoles = new List<MeasureData.CutHole>();
  424. //配置远程连接
  425. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  426. }
  427. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  428. public bool InitMeas(MeasureFile a_measureFile)
  429. {
  430. LogManager.AddHardwareLog("进入初始化函数", true);
  431. m_measureFile = a_measureFile;
  432. List<CutHole> listHoles = m_measureFile.ListCutHole;
  433. foreach (CutHole h in listHoles)
  434. {
  435. if (h.SWITCH == true)
  436. {
  437. m_cutHoles.Add(h);
  438. }
  439. }
  440. if (m_cutHoles.Count == 0)
  441. return false;
  442. if (m_measureFile.MParam.EDS == true)
  443. {
  444. LogManager.AddHardwareLog("能谱分析", true);
  445. Init_MeasDB();
  446. }
  447. return true;
  448. }
  449. //给前台UI发送消息步骤
  450. public void SendMsg(string step_code)
  451. {
  452. arg.Step_Code = step_code;
  453. arg.Time = DateTime.Now;
  454. SendThreadStatus(this, arg);
  455. }
  456. //给前台UI发送孔状态信息
  457. public void SendCutHoleMsg(string a_state, string a_holeName)
  458. {
  459. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  460. arg.HoleName = a_holeName;
  461. arg.State = a_state;
  462. SendCutHolesStatus(this, arg);
  463. }
  464. //测量流程
  465. public void DoMeasure()
  466. {
  467. //创建线程的测量状态的更新
  468. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  469. LogManager.AddHardwareLog("测量线程:开始测量",true);
  470. //检查硬件连接是否正常
  471. LogManager.AddHardwareLog("测量线程:连接硬件", true);
  472. if (!ConnectHardware())
  473. {
  474. MessageBox.Show("连接电镜失败!","重要错误",MessageBoxButtons.OK,MessageBoxIcon.Error);
  475. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  476. LogManager.AddHardwareLog("测量线程报错:连接硬件硬件连接失败", false);
  477. return;
  478. }
  479. //设置工作文件夹
  480. LogManager.AddHardwareLog("测量线程:设置工作文件夹", true);
  481. if (!SetWorkingFolderStr())
  482. {
  483. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  484. LogManager.AddHardwareLog("测量线程报错:设置文件夹失败", false);
  485. return;
  486. }
  487. //设置SmartSEM远程路径
  488. iSEM.SetRemoteELYPath(RemoteELYPath);
  489. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  490. //增加EDS控制
  491. //将停止键复位
  492. key_stop = false;
  493. //开始测量就将模式设置为SEM
  494. LogManager.AddHardwareLog("测量线程:切换到SEM模式", true);
  495. if (!iSEM.CmdFIBModeSEM())
  496. {
  497. LogManager.AddHardwareLog("测量线程报错:开始切换到SEM模式失败。", false);
  498. return;
  499. }
  500. arg.Picture_Information.Work_Status = "SEM";
  501. //设置扫描周期
  502. LogManager.AddHardwareLog("测量线程:设置图像扫描周期为对焦周期", true);
  503. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  504. Thread.Sleep(200);
  505. cycle_time = iSEM.GetCycleTime();
  506. if (cycle_time == 0)
  507. {
  508. LogManager.AddHardwareLog("测量线程报错:获取扫描周期时间失败", false);
  509. return;
  510. }
  511. Thread.Sleep((int)cycle_time +100);
  512. //开始做各个孔的检测
  513. for (int i = 0; i < m_cutHoles.Count; i++)
  514. {
  515. //自动亮度对比度
  516. LogManager.AddHardwareLog("测量线程:开启自动亮度,对比度调节", true);
  517. iSEM.SetAutoBright(100);
  518. Thread.Sleep(200);
  519. iSEM.SetAutoContrast(100);
  520. Thread.Sleep(200);
  521. //LogManager.AddHardwareLog("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  522. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  523. {
  524. LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  525. return;
  526. }
  527. Thread.Sleep(5000);
  528. LogManager.AddHardwareLog("测量线程:测试第"+i.ToString()+"个分析点。", true);
  529. //记录测量序号和孔名
  530. m_nWorkHoleNo = i;
  531. arg.HoleName = m_cutHoles[i].HoleName;
  532. //最终数据存放目录
  533. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  534. //对焦数据存放目录
  535. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  536. m_measureFile.MParam.AutoFocus.Path = focus_path;
  537. if (!Directory.Exists(focus_path))
  538. {
  539. Directory.CreateDirectory(focus_path);
  540. }
  541. //StigX数据存放目录
  542. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  543. m_measureFile.MParam.AutoStigX.Path = StigX_path;
  544. if (!Directory.Exists(StigX_path))
  545. {
  546. Directory.CreateDirectory(StigX_path);
  547. }
  548. //StigY数据存放目录
  549. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  550. m_measureFile.MParam.AutoStigY.Path = StigY_path;
  551. if (!Directory.Exists(StigY_path))
  552. {
  553. Directory.CreateDirectory(StigY_path);
  554. }
  555. //EDS数据存放路径
  556. if (m_measureFile.MParam.EDS == true)
  557. {
  558. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  559. m_measureFile.MParam.EDSP.Path = EDS_path;
  560. if (!Directory.Exists(EDS_path))
  561. {
  562. Directory.CreateDirectory(EDS_path);
  563. }
  564. }
  565. //判断孔状态
  566. if (m_cutHoles[i].STATE != State.Ready)
  567. {
  568. LogManager.AddHardwareLog("测试孔"+ m_cutHoles[i].HoleName+"状态非就绪,不予测量。", true);
  569. continue;
  570. }
  571. //20201127增加Scanrotate Off
  572. iSEM.SetScanRotationOff();
  573. Thread.Sleep(200);
  574. //20.光束等复位
  575. iSEM.SetBeamShiftX(0);
  576. Thread.Sleep(200);
  577. iSEM.SetBeamShiftY(0);
  578. Thread.Sleep(200);
  579. //开始循环工作
  580. if (i == 0)
  581. {
  582. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName+"开始测量。", true);
  583. m_cutHoles[i].START = DateTime.Now;
  584. //切孔操作-开始
  585. m_cutHoles[i].STATE = State.InProcess;
  586. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  587. LogManager.AddHardwareLog("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  588. + m_cutHoles[0].Position.X.ToString()+","
  589. + m_cutHoles[0].Position.Y.ToString()+","
  590. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  591. #region 坐标恢复
  592. //0、先移动Z轴到比较低的位置上。
  593. if (m_measureFile.MParam.Title)//如果是倾斜样品台,移动Z轴
  594. {
  595. if (!iSEM.SetStageGotoZ(fSateyZ))
  596. {
  597. arg.State = false;
  598. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  599. SendMsg("1-0");
  600. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  601. m_cutHoles[i].STATE = State.Failed;
  602. m_cutHoles[i].END = DateTime.Now;
  603. m_measureFile.Save();
  604. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  605. Thread.Sleep(3000);
  606. continue;
  607. }
  608. while (true)
  609. {
  610. Thread.Sleep(4000);
  611. if (iSEM.GetStageIs() == 0)
  612. {
  613. break;
  614. }
  615. }
  616. //判断是否停止进程
  617. if (key_stop)
  618. {
  619. m_cutHoles[i].STATE = State.Failed;
  620. m_cutHoles[i].END = DateTime.Now;
  621. m_measureFile.Save();
  622. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  623. LogManager.AddHardwareLog("停止键被按下", true);
  624. return;
  625. }
  626. }
  627. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  628. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  629. {
  630. arg.State = false;
  631. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  632. SendMsg("1-0");
  633. LogManager.AddHardwareLog("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  634. m_cutHoles[i].STATE = State.Failed;
  635. m_cutHoles[i].END = DateTime.Now;
  636. m_measureFile.Save();
  637. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  638. Thread.Sleep(3000);
  639. continue;
  640. }
  641. while (true)
  642. {
  643. Thread.Sleep(4000);
  644. if (iSEM.GetStageIs() == 0)
  645. {
  646. break;
  647. }
  648. }
  649. //判断是否停止进程
  650. if (key_stop)
  651. {
  652. m_cutHoles[i].STATE = State.Failed;
  653. m_cutHoles[i].END = DateTime.Now;
  654. m_measureFile.Save();
  655. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  656. LogManager.AddHardwareLog("停止键被按下", true);
  657. return;
  658. }
  659. //2、移动XY轴
  660. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  661. {
  662. arg.State = false;
  663. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  664. SendMsg("1-0");
  665. LogManager.AddHardwareLog("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  666. + m_cutHoles[0].Position.X.ToString() + ","
  667. + m_cutHoles[0].Position.Y.ToString()+ ")", false);
  668. m_cutHoles[i].STATE = State.Failed;
  669. m_cutHoles[i].END = DateTime.Now;
  670. m_measureFile.Save();
  671. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  672. Thread.Sleep(3000);
  673. continue;
  674. }
  675. while (true)
  676. {
  677. Thread.Sleep(4000);
  678. if (iSEM.GetStageIs() == 0)
  679. {
  680. break;
  681. }
  682. }
  683. //判断是否停止进程
  684. if (key_stop)
  685. {
  686. m_cutHoles[i].STATE = State.Failed;
  687. m_cutHoles[i].END = DateTime.Now;
  688. m_measureFile.Save();
  689. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  690. LogManager.AddHardwareLog("停止键被按下", true);
  691. return;
  692. }
  693. //3、恢复Z轴
  694. if (m_measureFile.MParam.Title)
  695. {
  696. //恢复Z轴
  697. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  698. {
  699. arg.State = false;
  700. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  701. SendMsg("1-0");
  702. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  703. m_cutHoles[i].STATE = State.Failed;
  704. m_cutHoles[i].END = DateTime.Now;
  705. m_measureFile.Save();
  706. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  707. Thread.Sleep(3000);
  708. continue;
  709. }
  710. while (true)
  711. {
  712. Thread.Sleep(4000);
  713. if (iSEM.GetStageIs() == 0)
  714. {
  715. break;
  716. }
  717. }
  718. //判断是否停止进程
  719. if (key_stop)
  720. {
  721. LogManager.AddHardwareLog("停止键按下。", true);
  722. m_cutHoles[i].STATE = State.Failed;
  723. m_cutHoles[i].END = DateTime.Now;
  724. m_measureFile.Save();
  725. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  726. return;
  727. }
  728. }
  729. arg.State = true;
  730. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  731. SendMsg("1-0");
  732. //4、设置WD
  733. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  734. Thread.Sleep(1000);
  735. #endregion
  736. //第一个点开始测量
  737. if (FirstHole())
  738. {
  739. //保存文件,将测量状态更改
  740. m_cutHoles[i].STATE = State.Success;
  741. m_cutHoles[i].END = DateTime.Now;
  742. m_measureFile.Save();
  743. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  744. }
  745. //失败
  746. else
  747. {
  748. m_cutHoles[i].STATE = State.Failed;
  749. m_cutHoles[i].END = DateTime.Now;
  750. m_measureFile.Save();
  751. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  752. }
  753. }
  754. else
  755. {
  756. //其他孔的测量
  757. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  758. m_cutHoles[i].START = DateTime.Now;
  759. m_cutHoles[i].STATE = State.InProcess;
  760. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  761. //其他孔测量之前的初始化
  762. if (!OtherHole_Init())
  763. {
  764. arg.State = false;
  765. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  766. SendMsg("1-0");
  767. Thread.Sleep(3000);
  768. LogManager.AddHardwareLog("测量线程:" + arg.Message, true);
  769. continue;
  770. }
  771. arg.State = true;
  772. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  773. SendMsg("1-0");
  774. //其他孔开始测量
  775. if (OtherHole())
  776. {
  777. //保存文件,将测量状态更改
  778. m_cutHoles[i].STATE = State.Success;
  779. m_cutHoles[i].END = DateTime.Now;
  780. m_measureFile.Save();
  781. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  782. }
  783. //失败
  784. else
  785. {
  786. m_cutHoles[i].STATE = State.Failed;
  787. m_cutHoles[i].END = DateTime.Now;
  788. m_measureFile.Save();
  789. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  790. }
  791. }
  792. if(key_stop)
  793. {
  794. m_cutHoles[i].END = DateTime.Now;
  795. m_cutHoles[i].STATE = State.Ready;
  796. m_measureFile.Save();
  797. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  798. arg.Message = "用户停止测量";
  799. SendMsg("0-0");
  800. break;
  801. }
  802. //两个点之间更换,加延时以便完成显示
  803. Thread.Sleep(3000);
  804. }
  805. }
  806. //检查硬件连接是否正常
  807. public bool ConnectHardware()
  808. {
  809. //返回硬件的连接状态
  810. return iSEM.ConnectStatus();
  811. }
  812. //设置工作文件夹
  813. public bool SetWorkingFolderStr()
  814. {
  815. WorkingFolder = m_measureFile.FilePath;
  816. return true;
  817. }
  818. //插入PT针
  819. public bool InsertPT()
  820. {
  821. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  822. //SendMsg("调用宏插入PT针宏文件" + fn);
  823. iSEM.CMDMCFFilename(fn);
  824. //延时1s??
  825. Thread.Sleep(1000);
  826. return true;
  827. }
  828. //撤出PT针
  829. public bool RetractPT()
  830. {
  831. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  832. //SendMsg("调用宏撤出PT针宏文件" + fn);
  833. iSEM.CMDMCFFilename(fn);
  834. //延时1s??
  835. Thread.Sleep(1000);
  836. return true;
  837. }
  838. //PT沉积
  839. public bool PTWork()
  840. {
  841. //执行PT沉积的ELY文件
  842. if (!ExcuteEly(m_measureFile.MParam.PTTemp))
  843. {
  844. return false;
  845. }
  846. //等待沉积完成
  847. while (true)
  848. {
  849. Thread.Sleep(7000);
  850. if (iSEM.GetFIBMode() == 0)
  851. {
  852. break;
  853. }
  854. }
  855. return true;
  856. }
  857. //FIB切割
  858. public bool FIBWork()
  859. {
  860. //执行PT沉积的ELY文件
  861. if (!ExcuteEly(m_measureFile.MParam.FIBTemp))
  862. {
  863. return false;
  864. }
  865. //等待切割完成
  866. while (true)
  867. {
  868. Thread.Sleep(10000);
  869. if (iSEM.GetFIBMode() == 0)
  870. {
  871. break;
  872. }
  873. }
  874. return true;
  875. }
  876. //执行ELY文件的步骤
  877. public bool ExcuteEly(string a_filename)
  878. {
  879. //执行ELy文件有三个动作
  880. //1. 选择ELY文件
  881. //SendMsg("选择ELY文件");
  882. if (!iSEM.CmdFIBLoadELY(a_filename))
  883. {
  884. //SendMsg("选择ELY文件失败");
  885. return false;
  886. }
  887. Thread.Sleep(1000);
  888. //2. 确认ELY文件
  889. //SendMsg("确认ELY文件");
  890. if (!iSEM.CmdFIBEXPOSUREELY())
  891. {
  892. //SendMsg("确认ELY文件失败");
  893. return false;
  894. }
  895. Thread.Sleep(1000);
  896. //3. 执行ELY文件
  897. //SendMsg("执行ELY文件");
  898. if (!iSEM.CmdFIBSTARTELY())
  899. {
  900. //SendMsg("执行ELY文件失败");
  901. return false;
  902. }
  903. Thread.Sleep(1000);
  904. return true;
  905. }
  906. /// <summary>
  907. ///13. 自动 定位功能,沉积
  908. /// </summary>
  909. /// <returns></returns>
  910. public bool GetPoistion()
  911. {
  912. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  913. int state = 1;
  914. LogManager.AddHardwareLog("测量线程:13.自动定位、沉积-功能自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString(), true);
  915. Thread.Sleep(200);
  916. //1.控制SEM放大600X
  917. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  918. {
  919. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  920. arg.State = false;
  921. SendMsg("1-6");
  922. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "控制失败", false);
  923. return false;
  924. }
  925. Thread.Sleep(200);
  926. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  927. {
  928. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  929. arg.State = false;
  930. SendMsg("1-6");
  931. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString() + "控制失败", false);
  932. return false;
  933. }
  934. float current = iSEM.GetMagnification();
  935. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  936. {
  937. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  938. Thread.Sleep(200);
  939. current = iSEM.GetMagnification();
  940. }
  941. arg.State = true;
  942. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  943. SendMsg("1-6");
  944. //判断是否停止进程
  945. if (key_stop)
  946. {
  947. LogManager.AddHardwareLog("停止键按下。", true);
  948. return false;
  949. }
  950. //判断是否为仅拍照,不是则执行FIB操作
  951. if (!m_measureFile.MParam.Is_Photograph)
  952. {
  953. LogManager.AddHardwareLog("测量线程:切换到FIB模式。", true);
  954. //6.设置FIB拍照参数——扫描时间、束流等
  955. //7.控制FIB自动亮度、对比度
  956. Thread.Sleep(200);
  957. if (!iSEM.CmdFIBModeFIB())
  958. {
  959. arg.Message = "FIB模式切换失败";
  960. arg.State = false;
  961. SendMsg("1-8");
  962. LogManager.AddHardwareLog("测量线程报错:切换到FIB模式失败。", false);
  963. return false;
  964. }
  965. arg.State = true;
  966. arg.Picture_Information.Work_Status = "FIB";
  967. arg.Message = "FIB模式切换成功";
  968. SendMsg("1-8");
  969. Thread.Sleep(1000);
  970. //判断是否停止进程
  971. if (key_stop)
  972. {
  973. LogManager.AddHardwareLog("停止键按下。", true);
  974. return false;
  975. }
  976. //8.控制FIB拍照
  977. //9.保存照片======更改路径
  978. //20201103,FIB使用定位的放大倍数
  979. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  980. arg.Picture_Information.Picture_FullPath = fileName2;
  981. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  982. Thread.Sleep(200);
  983. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  984. Thread.Sleep(200);
  985. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  986. Thread.Sleep(200);
  987. //FIB的放大位数,将来会改
  988. LogManager.AddHardwareLog("测量线程:设置FIB放大倍数"+ m_measureFile.MParam.Location_Magnification.ToString(), true);
  989. //20201103,FIB使用定位的放大倍数
  990. if (!iSEM.SetFIBMagnification(m_measureFile.MParam.Location_Magnification))
  991. {
  992. arg.Message = "FIB放大倍数设置失败";
  993. arg.State = false;
  994. SendMsg("1-9");
  995. LogManager.AddHardwareLog("测量线程失败:FIB放大倍数设置失败。", false);
  996. return false;
  997. }
  998. arg.Message = "FIB放大倍数设置成功";
  999. arg.State = true;
  1000. SendMsg("1-9");
  1001. Thread.Sleep(200);
  1002. //判断是否停止进程
  1003. if (key_stop)
  1004. {
  1005. LogManager.AddHardwareLog("停止键按下。", true);
  1006. return false;
  1007. }
  1008. //4、设置WD
  1009. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1010. Thread.Sleep(1000);
  1011. //20201127增加自动亮度对比度
  1012. if(m_measureFile.MParam.FIBDo)
  1013. {
  1014. if(m_measureFile.MParam.FIBAutoBC)
  1015. {
  1016. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1017. float m_TempBrightness = 50.0f;
  1018. float m_TempContrast = 30.0f;
  1019. if (m_measureFile.MParam.SampleName == "3")
  1020. {
  1021. m_TempBrightness = 50.0f;
  1022. m_TempContrast = 30.0f;
  1023. iSEM.SetAutoVideoOff();
  1024. Thread.Sleep(200);
  1025. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1026. Thread.Sleep(200);
  1027. iSEM.SetContrast(m_TempContrast); //30.0f
  1028. Thread.Sleep(200);
  1029. }
  1030. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1031. {
  1032. iSEM.SetAutoVideoBrightnessAndContrast();
  1033. //20201128陈工建议增加
  1034. Thread.Sleep(200);
  1035. iSEM.SetAutoBright(100);
  1036. Thread.Sleep(200);
  1037. iSEM.SetAutoContrast(100);
  1038. Thread.Sleep(5000);
  1039. }
  1040. }
  1041. else
  1042. {
  1043. iSEM.SetAutoVideoOff();
  1044. Thread.Sleep(200);
  1045. iSEM.SetBrightness(m_measureFile.MParam.FIBB);
  1046. Thread.Sleep(200);
  1047. iSEM.SetContrast(m_measureFile.MParam.FIBC);
  1048. Thread.Sleep(200);
  1049. }
  1050. }
  1051. //拍照前改变速度,延时
  1052. iSEM.CloseReduced();
  1053. Thread.Sleep(200);
  1054. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1055. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1056. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1057. Thread.Sleep(200);
  1058. cycle_time = iSEM.GetCycleTime();
  1059. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1060. if (!GetImage(fileName2))
  1061. {
  1062. arg.Message = "FIB拍照失败";
  1063. arg.State = false;
  1064. SendMsg("1-11");
  1065. LogManager.AddHardwareLog("测量线程报错:FIB拍照失败。", false);
  1066. return false;
  1067. }
  1068. arg.State = true;
  1069. arg.Picture_Information.Picture_FullPath = fileName2;
  1070. arg.Message = "FIB拍照成功";
  1071. SendMsg("1-11");
  1072. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1073. Thread.Sleep(200);
  1074. cycle_time = iSEM.GetCycleTime();
  1075. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1076. //判断是否停止进程
  1077. if (key_stop)
  1078. {
  1079. LogManager.AddHardwareLog("停止键按下。", true);
  1080. return false;
  1081. }
  1082. iSEM.CmdFIBModeSEM();
  1083. Thread.Sleep(200);
  1084. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1085. LogManager.AddHardwareLog("测量线程:调用图像处理接口,准备移动样品台", true);
  1086. LogManager.AddHardwareLog("文件名=" + fileName2, true);
  1087. LogManager.AddHardwareLog("样品类型=" + m_measureFile.MParam.SampleName, true);
  1088. LogManager.AddHardwareLog("供应商名称=" + m_measureFile.MParam.Firm, true);
  1089. wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1090. LogManager.AddHardwareLog("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString()+")", true);
  1091. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1092. if (state == 1)
  1093. {
  1094. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1095. float xc = (x1 + x2)/2;
  1096. float yc = (y1 + y2)/2;
  1097. x0 = xc - 512;
  1098. y0 = 384 - yc;
  1099. LogManager.AddHardwareLog("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1100. px = iSEM.GetPixelSize();
  1101. //修改FIB切割的ELY文件坐标
  1102. XmlDocument xmlDoc = new XmlDocument();
  1103. xmlDoc.Load(m_measureFile.MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1104. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1105. if (xns != null)
  1106. {
  1107. XmlAttributeCollection attributeCol = xns.Attributes;
  1108. //遍历自己点属性
  1109. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1110. LogManager.AddHardwareLog("XML-Width_a = " + width_a.ToString(), true);
  1111. foreach (XmlAttribute attri in attributeCol)
  1112. {
  1113. if (attri.Name == "x")
  1114. {
  1115. attri.InnerText = ((x0 * px)*1000000 - width_a).ToString();
  1116. LogManager.AddHardwareLog("XML-TopLeft-X = " + attri.InnerText, true);
  1117. }
  1118. else if (attri.Name == "y")
  1119. {
  1120. attri.InnerText = ((y0 * px)*1000000-2.791).ToString();
  1121. LogManager.AddHardwareLog("XML-TopLeft-Y = " + attri.InnerText, true);
  1122. }
  1123. }
  1124. }
  1125. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1126. if (xns != null)
  1127. {
  1128. XmlAttributeCollection attributeCol = xns.Attributes;
  1129. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1130. //遍历自己点属性
  1131. foreach (XmlAttribute attri in attributeCol)
  1132. {
  1133. if (attri.Name == "x")
  1134. {
  1135. attri.InnerText = ((x0 * px)*1000000 - width).ToString();
  1136. }
  1137. else if (attri.Name == "y")
  1138. {
  1139. attri.InnerText = (((y0 * px) *1000000) + 2 - 2.791).ToString();
  1140. }
  1141. }
  1142. }
  1143. xmlDoc.Save(m_measureFile.MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1144. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1145. if (m_measureFile.MParam.PT)
  1146. {
  1147. xmlDoc = new XmlDocument();
  1148. xmlDoc.Load(m_measureFile.MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1149. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1150. if (xns != null)
  1151. {
  1152. XmlAttributeCollection attributeCol = xns.Attributes;
  1153. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1154. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1155. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1156. //遍历自己点属性
  1157. foreach (XmlAttribute attri in attributeCol)
  1158. {
  1159. if (attri.Name == "x")
  1160. {
  1161. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1162. }
  1163. else if (attri.Name == "y")
  1164. {
  1165. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1166. }
  1167. }
  1168. }
  1169. xmlDoc.Save(m_measureFile.MParam.PTTemp);
  1170. }
  1171. if (hand_intervene == 1)
  1172. {
  1173. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1174. }
  1175. }
  1176. else
  1177. {
  1178. arg.Message = "图像接口参数state返回值为零";
  1179. arg.State = false;
  1180. SendMsg("1-12");
  1181. if (hand_intervene == 1)
  1182. {
  1183. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1184. {
  1185. return false;
  1186. }
  1187. }
  1188. else
  1189. {
  1190. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1191. return false;
  1192. }
  1193. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1194. return false;
  1195. }
  1196. //判断是否停止进程
  1197. if (key_stop)
  1198. {
  1199. LogManager.AddHardwareLog("停止键按下", true);
  1200. return false;
  1201. }
  1202. //11.自动工具样品类型参数确定是否需要PT沉积
  1203. if (m_measureFile.MParam.PT)
  1204. {
  1205. if (!iSEM.CmdFIBModeFIB())
  1206. {
  1207. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1208. return false;
  1209. }
  1210. Thread.Sleep(200);
  1211. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1212. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1213. {
  1214. LogManager.AddHardwareLog("测量线程:插入PT针" + arg.Message, true);
  1215. if (!InsertPT())
  1216. {
  1217. arg.Message = "插入PT针失败";
  1218. arg.State = false;
  1219. SendMsg("1-13");
  1220. LogManager.AddHardwareLog("测量线程报错:"+ arg.Message, false);
  1221. return false;
  1222. }
  1223. arg.State = true;
  1224. arg.Message = "插入PT针成功";
  1225. SendMsg("1-13");
  1226. }
  1227. //判断是否停止进程
  1228. if (key_stop)
  1229. {
  1230. LogManager.AddHardwareLog("停止键按下", true);
  1231. return false;
  1232. }
  1233. //3. 根据坐标进行PT沉积
  1234. if (!PTWork())
  1235. {
  1236. arg.Message = "PT沉积失败";
  1237. arg.State = false;
  1238. SendMsg("1-14");
  1239. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1240. return false;
  1241. }
  1242. arg.State = true;
  1243. arg.Message = "PT沉积成功";
  1244. SendMsg("1-14");
  1245. //判断是否停止进程
  1246. if (key_stop)
  1247. {
  1248. LogManager.AddHardwareLog("停止键按下", true);
  1249. return false;
  1250. }
  1251. //15.根据样品类型决定是否撤出PT针
  1252. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1253. {
  1254. if (!RetractPT())
  1255. {
  1256. arg.Message = "撤出PT针失败";
  1257. arg.State = false;
  1258. SendMsg("1-15");
  1259. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1260. return false;
  1261. }
  1262. arg.State = true;
  1263. arg.Message = "撤出PT针成功";
  1264. SendMsg("1-15");
  1265. }
  1266. //判断是否停止进程
  1267. if (key_stop)
  1268. {
  1269. LogManager.AddHardwareLog("停止键按下", true);
  1270. return false;
  1271. }
  1272. if (!iSEM.CmdFIBModeSEM())
  1273. {
  1274. //arg.Message = "切割前SEM拍照失败。";
  1275. //arg.State = false;
  1276. //SendMsg("1-17");
  1277. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1278. return false;
  1279. }
  1280. }
  1281. }
  1282. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1283. float[] firstPosition = iSEM.GetStagePosition();
  1284. m_cutHoles[0].Position.X = firstPosition[0];
  1285. m_cutHoles[0].Position.Y = firstPosition[1];
  1286. m_cutHoles[0].Position.Z = firstPosition[2];
  1287. m_cutHoles[0].Position.T = firstPosition[3];
  1288. m_cutHoles[0].Position.R = firstPosition[4];
  1289. m_cutHoles[0].Position.M = firstPosition[5];
  1290. //这里要调用文件保存功能
  1291. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1292. + firstPosition[1].ToString() + ","
  1293. + firstPosition[2].ToString() + ","
  1294. + firstPosition[3].ToString() + ","
  1295. + firstPosition[4].ToString() + ","
  1296. + firstPosition[5].ToString() + ")";
  1297. arg.State = true;
  1298. SendMsg("1-16");
  1299. //判断是否停止进程
  1300. if (key_stop)
  1301. {
  1302. LogManager.AddHardwareLog("停止键按下", true);
  1303. return false;
  1304. }
  1305. return true;
  1306. }
  1307. /// <summary>
  1308. /// 14. FIB切割
  1309. /// </summary>
  1310. /// <returns></returns>
  1311. public bool FIBCross()
  1312. {
  1313. int state = 0;
  1314. #if CHECK
  1315. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1316. if (mag < 200)
  1317. {
  1318. mag = 200;
  1319. }
  1320. String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
  1321. iSEM.SetMagnification(mag);
  1322. Thread.Sleep(2000);
  1323. iSEM.CmdSaveRate();
  1324. Thread.Sleep(200);
  1325. cycle_time = iSEM.GetCycleTime();
  1326. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1327. if (!GetImage(fileName1))
  1328. {
  1329. arg.Message = "切割前SEM拍照失败。";
  1330. arg.State = false;
  1331. SendMsg("1-17");
  1332. LogManager.AddHardwareLog("测量线程报错:SEM切割前图像拍照失败", false);
  1333. return false;
  1334. }
  1335. iSEM.CmdFocusRate();
  1336. Thread.Sleep(200);
  1337. cycle_time = iSEM.GetCycleTime();
  1338. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1339. arg.Message = "切割前SEM拍照成功。";
  1340. arg.Picture_Information.Picture_FullPath = fileName1;
  1341. arg.State = true;
  1342. SendMsg("1-17");
  1343. #endif
  1344. if (!iSEM.CmdFIBModeFIB())
  1345. {
  1346. arg.Message = "切换到FIB模式失败。";
  1347. arg.State = false;
  1348. SendMsg("1-18");
  1349. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1350. return false;
  1351. }
  1352. arg.Message = "切换到FIB模式成功。";
  1353. arg.State = true;
  1354. SendMsg("1-18");
  1355. Thread.Sleep(1000);
  1356. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1357. float current = iSEM.GetMagnification();
  1358. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  1359. {
  1360. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1361. Thread.Sleep(200);
  1362. current = iSEM.GetMagnification();
  1363. }
  1364. Thread.Sleep(2000);
  1365. //14.自动控制FIB切割
  1366. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1367. //2.控制FIB进行切割
  1368. //以上1、2步全部用ELY文件代替
  1369. if (!FIBWork())
  1370. {
  1371. arg.Message = "FIB切割失败";
  1372. arg.State = false;
  1373. SendMsg("1-19");
  1374. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1375. return false;
  1376. }
  1377. arg.State = true;
  1378. arg.Message = "FIB切割成功";
  1379. SendMsg("1-19");
  1380. Thread.Sleep(300);
  1381. //判断是否停止进程
  1382. if (key_stop)
  1383. {
  1384. LogManager.AddHardwareLog("停止键按下", true);
  1385. return false;
  1386. }
  1387. //做切割后SEM的拍照
  1388. LogManager.AddHardwareLog("测量线程:切割后SEM拍照", true);
  1389. if (!iSEM.CmdFIBModeSEM())
  1390. {
  1391. //arg.Message = "切割后SEM拍照失败。";
  1392. //arg.State = false;
  1393. //SendMsg("1-20");
  1394. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1395. return false;
  1396. }
  1397. Thread.Sleep(1000);
  1398. #if CHECK
  1399. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
  1400. iSEM.SetMagnification(mag);
  1401. Thread.Sleep(2000);
  1402. iSEM.CmdSaveRate();
  1403. Thread.Sleep(200);
  1404. cycle_time = iSEM.GetCycleTime();
  1405. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1406. if (!GetImage(fileName2))
  1407. {
  1408. arg.Message = "切割后SEM拍照失败。";
  1409. arg.State = false;
  1410. SendMsg("1-20");
  1411. LogManager.AddHardwareLog("测量线程报错:SEM切割后图像拍照失败", false);
  1412. return false;
  1413. }
  1414. arg.Picture_Information.Picture_FullPath = fileName2;
  1415. arg.Message = "切割后SEM拍照成功。";
  1416. arg.State = true;
  1417. SendMsg("1-20");
  1418. iSEM.CmdFocusRate();
  1419. Thread.Sleep(200);
  1420. cycle_time = iSEM.GetCycleTime();
  1421. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1422. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1423. wr.Img_Cut_Success(fileName1, fileName2, out state);
  1424. LogManager.AddHardwareLog("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
  1425. if (state == 0)
  1426. {
  1427. LogManager.AddHardwareLog("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
  1428. arg.Message = "图像接口参数state返回值为零";
  1429. arg.State = false;
  1430. SendMsg("1-22");
  1431. if (hand_intervene == 1)
  1432. {
  1433. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1434. {
  1435. return false;
  1436. }
  1437. }
  1438. else
  1439. {
  1440. return false;
  1441. }
  1442. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1443. }
  1444. arg.State = true;
  1445. LogManager.AddHardwareLog("验证切割准确性成功。", true);
  1446. arg.Message = "FIB切割校验成功";
  1447. SendMsg("1-22");
  1448. //判断是否停止进程
  1449. if (key_stop)
  1450. {
  1451. LogManager.AddHardwareLog("停止键按下。", true);
  1452. return false;
  1453. }
  1454. #endif
  1455. return true;
  1456. }
  1457. /// <summary>
  1458. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1459. /// </summary>
  1460. /// <returns></returns>
  1461. public bool FindCross()
  1462. {
  1463. float x2 = 0, y2 = 0;
  1464. int state = 0;
  1465. //切换到SEM模式
  1466. if (!iSEM.CmdFIBModeSEM())
  1467. {
  1468. arg.Message = "SEM模式切换失败";
  1469. arg.State = false;
  1470. SendMsg("1-23");
  1471. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1472. return false;
  1473. }
  1474. arg.State = true;
  1475. arg.Message = "SEM模式切换成功";
  1476. SendMsg("1-23");
  1477. arg.Picture_Information.Work_Status = "SEM";
  1478. Thread.Sleep(1000);
  1479. //判断是否停止进程
  1480. if (key_stop)
  1481. {
  1482. LogManager.AddHardwareLog("停止键按下", true);
  1483. return false;
  1484. }
  1485. //1.控制SEM放大到300倍
  1486. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  1487. {
  1488. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  1489. arg.State = false;
  1490. SendMsg("1-24");
  1491. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1492. return false;
  1493. }
  1494. Thread.Sleep(200);
  1495. //iSEM.SetAutoVideoBrightnessAndContrast();
  1496. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1497. float m_TempBrightness = 50.0f;
  1498. float m_TempContrast = 30.0f;
  1499. if (m_measureFile.MParam.SampleName == "3")
  1500. {
  1501. m_TempBrightness = 48.0f;
  1502. m_TempContrast = 29.0f;
  1503. }
  1504. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1505. iSEM.SetAutoVideoOff();
  1506. Thread.Sleep(200);
  1507. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1508. Thread.Sleep(200);
  1509. iSEM.SetContrast(m_TempContrast); //30.0f
  1510. Thread.Sleep(2000);
  1511. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1512. if (mag < 200)
  1513. {
  1514. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1515. if (m_measureFile.MParam.SampleName == "3")
  1516. mag = 400;
  1517. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1518. mag = 200;
  1519. }
  1520. if (!iSEM.SetMagnification(mag))
  1521. {
  1522. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1523. arg.State = false;
  1524. SendMsg("1-24");
  1525. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1526. return false;
  1527. }
  1528. Thread.Sleep(200);
  1529. float current = iSEM.GetMagnification();
  1530. Thread.Sleep(200);
  1531. while (Math.Abs(current - mag) > 2)
  1532. {
  1533. iSEM.SetMagnification(mag);
  1534. Thread.Sleep(200);
  1535. current = iSEM.GetMagnification();
  1536. Thread.Sleep(200);
  1537. }
  1538. arg.State = true;
  1539. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1540. SendMsg("1-24");
  1541. Thread.Sleep(2000);
  1542. //判断是否停止进程
  1543. if (key_stop)
  1544. {
  1545. LogManager.AddHardwareLog("停止键按下", true);
  1546. return false;
  1547. }
  1548. //3.控制SEM拍照
  1549. String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1550. arg.Picture_Information.Picture_FullPath = fileName4;
  1551. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1552. Thread.Sleep(200);
  1553. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1554. Thread.Sleep(200);
  1555. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1556. Thread.Sleep(200);
  1557. //拍照前改变速度,延时
  1558. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1559. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1560. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1561. Thread.Sleep(200);
  1562. cycle_time = iSEM.GetCycleTime();
  1563. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1564. if (!GetImage(fileName4))
  1565. {
  1566. arg.State = false;
  1567. arg.Message = "SEM拍照找切割位置失败";
  1568. SendMsg("1-25");
  1569. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1570. return false;
  1571. }
  1572. arg.Picture_Information.Picture_FullPath = fileName4;
  1573. arg.State = true;
  1574. arg.Message = "SEM拍照成功";
  1575. SendMsg("1-25");
  1576. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1577. Thread.Sleep(200);
  1578. cycle_time = iSEM.GetCycleTime();
  1579. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1580. //判断是否停止进程
  1581. if (key_stop)
  1582. {
  1583. return false;
  1584. }
  1585. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1586. //5.根据坐标控制SEM移动到切孔位置,居中
  1587. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  1588. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  1589. wr.Img_Trapezoid_Top_Center_Position(fileName4,Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  1590. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1591. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1592. if (state == 1)
  1593. {
  1594. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1595. if (!MoveToPixByMoveStage(x2, y2))
  1596. {
  1597. arg.State = false;
  1598. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1599. SendMsg("1-26");
  1600. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1601. return false;
  1602. }
  1603. //判断是否移动完成
  1604. while (true)
  1605. {
  1606. Thread.Sleep(4000);
  1607. if (iSEM.GetStageIs() == 0)
  1608. {
  1609. break;
  1610. }
  1611. }
  1612. arg.State = true;
  1613. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1614. SendMsg("1-26");
  1615. //高倍到低倍不进行对焦
  1616. //拍照前改变速度,延时
  1617. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1618. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1619. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1620. Thread.Sleep(200);
  1621. cycle_time = iSEM.GetCycleTime();
  1622. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1623. String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1624. if (!GetImage(fileName10))
  1625. {
  1626. //arg.State = false;
  1627. //arg.Message = "SEM拍照失败";
  1628. //SendMsg("1-25");
  1629. //return false;
  1630. LogManager.AddHardwareLog("测量线程报错:找到已切割的位置拍照失败", true);
  1631. }
  1632. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1633. Thread.Sleep(200);
  1634. cycle_time = iSEM.GetCycleTime();
  1635. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1636. if (hand_intervene == 1)
  1637. {
  1638. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1639. }
  1640. }
  1641. else
  1642. {
  1643. arg.Message = "图像接口参数state返回值为零";
  1644. arg.State = false;
  1645. SendMsg("1-26");
  1646. if (hand_intervene == 1)
  1647. {
  1648. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1649. {
  1650. return false;
  1651. }
  1652. }
  1653. else
  1654. {
  1655. return false;
  1656. }
  1657. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1658. return false;
  1659. }
  1660. //判断是否停止进程
  1661. if (key_stop)
  1662. {
  1663. LogManager.AddHardwareLog("停止键按下", true);
  1664. return false;
  1665. }
  1666. return true;
  1667. }
  1668. /// <summary>
  1669. /// 17.自动控制SEM拍截面照
  1670. /// </summary>
  1671. /// <returns></returns>
  1672. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1673. {
  1674. int state = 0;
  1675. #region 设置拍照的电压
  1676. LogManager.AddHardwareLog("测量线程:设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true);
  1677. //1、放大倍数参数photograph_
  1678. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Photograph_Voltage))
  1679. {
  1680. arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1681. arg.State = false;
  1682. SendMsg("1-27");
  1683. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1684. return false;
  1685. }
  1686. //add
  1687. #endregion
  1688. Thread.Sleep(200);
  1689. #region 设置拍照的放大倍数
  1690. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数====" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  1691. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  1692. {
  1693. arg.Message = "放大倍数调整失败";
  1694. arg.State = false;
  1695. SendMsg("1-27");
  1696. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1697. return false;
  1698. }
  1699. float set = m_measureFile.MParam.Photograph_Magnification;
  1700. float current = iSEM.GetMagnification();
  1701. while(Math.Abs(current- set) > 1)
  1702. {
  1703. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  1704. Thread.Sleep(200);
  1705. current = iSEM.GetMagnification();
  1706. }
  1707. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString()+ "成功";
  1708. arg.State = true;
  1709. SendMsg("1-27");
  1710. Thread.Sleep(3000 + (Int32)cycle_time);
  1711. //判断是否停止进程
  1712. if (key_stop)
  1713. {
  1714. LogManager.AddHardwareLog("停止键按下", true);
  1715. return false;
  1716. }
  1717. #endregion
  1718. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1719. //if(!iSEM.SetAutoVideoBrightnessAndContrast())
  1720. //{
  1721. // LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1722. // return false;
  1723. //}
  1724. //Thread.Sleep(5000);
  1725. //2.控制SEM自动对焦、亮度、对比度-接口
  1726. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1727. if ((m_measureFile.MParam.SampleName == "2")||(m_measureFile.MParam.SampleName == "3"))
  1728. iSEM.SetReduced(402, 128, 500, 500);
  1729. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1730. iSEM.SetReduced(402, 128, 340, 256);
  1731. Thread.Sleep(200);
  1732. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1733. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1734. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1735. Thread.Sleep(200);
  1736. cycle_time = iSEM.GetCycleTime();
  1737. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1738. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1739. if (!iSEM.SetAutoVideoOff())
  1740. {
  1741. LogManager.AddHardwareLog("测量线程报错:关闭自动亮度对比度失败", false);
  1742. return false;
  1743. }
  1744. Thread.Sleep(5000);
  1745. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1746. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1747. if (ImageFocus1(false))
  1748. {
  1749. arg.Message = "自动对焦完成";
  1750. arg.State = true;
  1751. SendMsg("1-28");
  1752. }
  1753. else
  1754. {
  1755. arg.Message = "自动对焦失败";
  1756. arg.State = false;
  1757. SendMsg("1-28");
  1758. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1759. return false;
  1760. }
  1761. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1762. iSEM.CloseReduced();
  1763. Thread.Sleep(200);
  1764. cycle_time = iSEM.GetCycleTime();
  1765. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1766. //判断是否停止进程
  1767. if (key_stop)
  1768. {
  1769. LogManager.AddHardwareLog("停止键按下", true);
  1770. return false;
  1771. }
  1772. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1773. float m_TempBrightness = 50.0f;
  1774. float m_TempContrast = 30.0f;
  1775. if (m_measureFile.MParam.SampleName == "3")
  1776. {
  1777. m_TempBrightness = 50f;
  1778. m_TempContrast = 29f;
  1779. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1780. Thread.Sleep(200);
  1781. iSEM.SetContrast(m_TempContrast); //30.0f
  1782. Thread.Sleep(200);
  1783. }
  1784. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1785. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1786. {
  1787. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1788. return false;
  1789. }
  1790. Thread.Sleep(5000);
  1791. //3、设置SEM补偿角度
  1792. if (m_measureFile.MParam.Is_Photograph == false)
  1793. {
  1794. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString()+"度", true);
  1795. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1796. {
  1797. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1798. arg.State = false;
  1799. SendMsg("1-29");
  1800. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1801. return false;
  1802. }
  1803. arg.State = true;
  1804. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1805. SendMsg("1-29");
  1806. Thread.Sleep(200);
  1807. //判断是否停止进程
  1808. if (key_stop)
  1809. {
  1810. LogManager.AddHardwareLog("停止键按下", false);
  1811. return false;
  1812. }
  1813. }
  1814. //4、拍照,5、保存照片
  1815. String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1816. arg.Picture_Information.Picture_FullPath = fileName5;
  1817. arg.Picture_Information.Work_Status = "SEM";
  1818. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1819. Thread.Sleep(200);
  1820. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1821. Thread.Sleep(200);
  1822. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1823. Thread.Sleep(200);
  1824. //拍照前改变速度,延时
  1825. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1826. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1827. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1828. Thread.Sleep(200);
  1829. cycle_time = iSEM.GetCycleTime();
  1830. Thread.Sleep(Convert.ToInt32(cycle_time)*2);
  1831. if (!GetImage(fileName5))
  1832. {
  1833. arg.Message = "SEM拍照失败";
  1834. arg.State = false;
  1835. SendMsg("1-30");
  1836. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1837. return false;
  1838. }
  1839. arg.Picture_Information.Picture_FullPath = fileName5;
  1840. arg.State = true;
  1841. arg.Message = "SEM拍照成功";
  1842. SendMsg("1-30");
  1843. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1844. Thread.Sleep(200);
  1845. cycle_time = iSEM.GetCycleTime();
  1846. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1847. //判断是否停止进程
  1848. if (key_stop)
  1849. {
  1850. LogManager.AddHardwareLog("停止键按下", true);
  1851. return false;
  1852. }
  1853. #endregion
  1854. if (m_measureFile.MParam.Is_Photograph == false)
  1855. {
  1856. #region 对当前矩形进行旋转校正
  1857. //8,计算切割面区域偏移角度及方向
  1858. float degree = 0;
  1859. int direction = 0;
  1860. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  1861. LogManager.AddHardwareLog("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1862. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1863. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1864. if (state == 1)
  1865. {
  1866. //梯形角度
  1867. iSEM.SetScanRotationOn();
  1868. Thread.Sleep(200);
  1869. //20201128陈工要求,谭博返回角度*0.7
  1870. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  1871. Thread.Sleep(200);
  1872. arg.State = true;
  1873. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1874. SendMsg("1-31");
  1875. if (hand_intervene == 1)
  1876. {
  1877. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1878. }
  1879. }
  1880. else
  1881. {
  1882. arg.Message = "图像接口参数State返回值为零";
  1883. arg.State = false;
  1884. SendMsg("1-31");
  1885. if(hand_intervene == 1)
  1886. {
  1887. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1888. {
  1889. return false;
  1890. }
  1891. }
  1892. else
  1893. {
  1894. //return false;
  1895. }
  1896. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1897. }
  1898. //判断是否停止进程
  1899. if (key_stop)
  1900. {
  1901. LogManager.AddHardwareLog("停止键按下", true);
  1902. return false;
  1903. }
  1904. Thread.Sleep(200);
  1905. //12拍照
  1906. String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1907. arg.Picture_Information.Picture_FullPath = fileName6;
  1908. arg.Picture_Information.Work_Status = "SEM";
  1909. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1910. Thread.Sleep(200);
  1911. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1912. Thread.Sleep(200);
  1913. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1914. Thread.Sleep(200);
  1915. //拍照前改变速度,延时
  1916. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1917. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1918. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1919. Thread.Sleep(200);
  1920. cycle_time = iSEM.GetCycleTime();
  1921. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1922. if (!GetImage(fileName6))
  1923. {
  1924. arg.Message = "SEM拍照失败";
  1925. arg.State = false;
  1926. SendMsg("1-33");
  1927. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1928. return false;
  1929. }
  1930. arg.Picture_Information.Picture_FullPath = fileName6;
  1931. arg.State = true;
  1932. arg.Message = "SEM拍照成功";
  1933. SendMsg("1-33");
  1934. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1935. Thread.Sleep(200);
  1936. cycle_time = iSEM.GetCycleTime();
  1937. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1938. //判断是否停止进程
  1939. if (key_stop)
  1940. {
  1941. LogManager.AddHardwareLog("停止键按下", true);
  1942. return false;
  1943. }
  1944. #endregion
  1945. #region 获取两个位置上及放大倍数
  1946. //计算两个测量区域坐标
  1947. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1948. List<float> mag = new List<float>();
  1949. System.Drawing.Point ct0;
  1950. float mag1, mag2, magMax;
  1951. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1952. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  1953. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  1954. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1955. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  1956. "输入产品" + m_measureFile.MParam.Firm.ToString()
  1957. + "输出中心点1为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  1958. + ",输出放大倍数1==" + mag[0]
  1959. + "倍,输出中心点2为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  1960. + "输出放大倍数2==" + mag[0]
  1961. + "倍,输出中心点3为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1962. #endregion
  1963. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1964. {
  1965. arg.State = true;
  1966. arg.Message = "获取位置及放大倍数成功";
  1967. SendMsg("1-34");
  1968. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1969. float xs = iSEM.GetBeamShiftX();
  1970. Thread.Sleep(200);
  1971. float ys = iSEM.GetBeamShiftY();
  1972. Thread.Sleep(200);
  1973. float xpCur = iSEM.GetStageAtX();
  1974. Thread.Sleep(200);
  1975. float ypCur = iSEM.GetStageAtY();
  1976. Thread.Sleep(200);
  1977. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  1978. + "y=" + ys.ToString() + ","
  1979. + "原来样品台的位置x= " + xpCur.ToString()
  1980. + "y=" + ypCur.ToString(), true);
  1981. #endregion
  1982. //找到放大倍数最大值
  1983. magMax = mag[0];
  1984. for (int m = 1; m < mag.Count; m++)
  1985. {
  1986. if (mag[m] > magMax)
  1987. {
  1988. magMax = mag[m];
  1989. }
  1990. }
  1991. #region 移动到梯形左上角
  1992. //20201127将视野移动到梯形左上角位置
  1993. MoveToPix(ct0.X, ct0.Y);
  1994. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  1995. + "," + ct0.Y.ToString() + ")", true);
  1996. //关闭自动亮度对比度
  1997. iSEM.SetAutoVideoOff();
  1998. Thread.Sleep(2000);
  1999. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2000. if (m_measureFile.MParam.SampleName == "3")
  2001. {
  2002. m_TempBrightness = 50f;
  2003. m_TempContrast = 29f;
  2004. iSEM.SetBrightness(m_TempBrightness); //50.0f
  2005. Thread.Sleep(200);
  2006. iSEM.SetContrast(m_TempContrast); //30.0f
  2007. Thread.Sleep(200);
  2008. }
  2009. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  2010. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  2011. if ( m_measureFile.MParam.SampleName == "3")
  2012. {
  2013. iSEM.SetReduced(402, 128, 400, 256);
  2014. }else
  2015. {
  2016. iSEM.SetReduced(402, 128, 340, 256);
  2017. }
  2018. Thread.Sleep(200);
  2019. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  2020. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2021. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  2022. Thread.Sleep(200);
  2023. cycle_time = iSEM.GetCycleTime();
  2024. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2025. //放大到6000倍
  2026. iSEM.SetMagnification(magMax / 2);
  2027. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2028. set = magMax / 2;
  2029. current = iSEM.GetMagnification();
  2030. while (Math.Abs(current - set) > 1)
  2031. {
  2032. iSEM.SetMagnification(set);
  2033. Thread.Sleep(200);
  2034. current = iSEM.GetMagnification();
  2035. }
  2036. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--6000倍!", true);
  2037. //自动对焦
  2038. if (!ImageFocus1(true))
  2039. {
  2040. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦失败!", true);
  2041. return false;
  2042. }
  2043. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦成功!", true);
  2044. ////自动消像散
  2045. //if (!ImageStig1())
  2046. //{
  2047. // return false;
  2048. //}
  2049. //放大到10000倍
  2050. iSEM.SetMagnification(magMax);
  2051. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2052. set = magMax;
  2053. current = iSEM.GetMagnification();
  2054. while (Math.Abs(current - set) > 1)
  2055. {
  2056. iSEM.SetMagnification(set);
  2057. Thread.Sleep(200);
  2058. current = iSEM.GetMagnification();
  2059. }
  2060. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--12000倍!", true);
  2061. //自动对焦
  2062. if (!ImageFocus1(true))
  2063. {
  2064. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦失败!", true);
  2065. return false;
  2066. }
  2067. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦成功!", true);
  2068. ////自动消像散
  2069. //if (!ImageStig1())
  2070. //{
  2071. // return false;
  2072. //}
  2073. ////放大到20000倍
  2074. //iSEM.SetMagnification(magMax*2);
  2075. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2076. //set = magMax*2;
  2077. //current = iSEM.GetMagnification();
  2078. //while (Math.Abs(current - set) > 1)
  2079. //{
  2080. // iSEM.SetMagnification(set);
  2081. // Thread.Sleep(200);
  2082. // current = iSEM.GetMagnification();
  2083. //}
  2084. ////自动对焦
  2085. //if (!ImageFocus1())
  2086. //{
  2087. // return false;
  2088. //}
  2089. iSEM.CloseReduced();
  2090. Thread.Sleep(200);
  2091. cycle_time = iSEM.GetCycleTime();
  2092. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2093. #endregion
  2094. #region 循环拍照
  2095. for (int n = 0; n < ct.Count; n++)
  2096. {
  2097. #region 恢复到拍照的状态
  2098. iSEM.SetStageGotoX(xpCur);
  2099. while (true)
  2100. {
  2101. Thread.Sleep(4000);
  2102. if (iSEM.GetStageIs() == 0)
  2103. {
  2104. break;
  2105. }
  2106. }
  2107. iSEM.SetStageGotoY(ypCur);
  2108. while (true)
  2109. {
  2110. Thread.Sleep(4000);
  2111. if (iSEM.GetStageIs() == 0)
  2112. {
  2113. break;
  2114. }
  2115. }
  2116. //恢复原来的放大倍数
  2117. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  2118. {
  2119. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2120. return false;
  2121. }
  2122. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2123. set = m_measureFile.MParam.Photograph_Magnification;
  2124. current = iSEM.GetMagnification();
  2125. while (Math.Abs(current - set) > 1)
  2126. {
  2127. iSEM.SetMagnification(set);
  2128. Thread.Sleep(200);
  2129. current = iSEM.GetMagnification();
  2130. }
  2131. //恢复BeamShift的百分比值
  2132. iSEM.SetBeamShiftX(xs);
  2133. Thread.Sleep(200);
  2134. iSEM.SetBeamShiftY(ys);
  2135. Thread.Sleep(200);
  2136. #endregion
  2137. #region 移动到指定点位置
  2138. if (!MoveToPix(ct[n].X, ct[n].Y))
  2139. {
  2140. arg.State = false;
  2141. arg.Message = "移动到第一个点位置失败";
  2142. SendMsg("1-" + (35 + n).ToString());
  2143. //移动到第一个点失败
  2144. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2145. }
  2146. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2147. + "," + ct[n].Y.ToString() + ")", true);
  2148. #endregion
  2149. #region 如果是第一个点,则1W倍对焦
  2150. if (n == 0)
  2151. {
  2152. ////在第一个点上放大1W倍对焦
  2153. //if (!iSEM.SetMagnification(mag[n]))
  2154. //{
  2155. // LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2156. // return false;
  2157. //}
  2158. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2159. //while (true)
  2160. //{
  2161. // current = iSEM.GetMagnification();
  2162. // if (Math.Abs(current - mag[n]) < 1)
  2163. // {
  2164. // Thread.Sleep(200);
  2165. // break;
  2166. // }
  2167. // Thread.Sleep(200);
  2168. // iSEM.SetMagnification(set);
  2169. // Thread.Sleep(200);
  2170. //}
  2171. //if (m_measureFile.MParam.SampleName == "2")
  2172. //{
  2173. // //窗口对焦
  2174. // iSEM.SetReduced1(340, 1, 340, 256);
  2175. // Thread.Sleep(200);
  2176. // iSEM.CmdFocusRate();
  2177. // Thread.Sleep(200);
  2178. // cycle_time = iSEM.GetCycleTime();
  2179. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2180. // //自动对焦
  2181. // if (!ImageFocus1(false))
  2182. // {
  2183. // return false;
  2184. // }
  2185. // //恢复全屏
  2186. // iSEM.CloseReduced();
  2187. // Thread.Sleep(200);
  2188. // cycle_time = iSEM.GetCycleTime();
  2189. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2190. //}
  2191. //else
  2192. //{
  2193. // //窗口对焦
  2194. // //iSEM.SetReduced(402, 128, 800, 600);
  2195. // //Thread.Sleep(200);
  2196. // iSEM.CmdFocusRate();
  2197. // Thread.Sleep(200);
  2198. // cycle_time = iSEM.GetCycleTime();
  2199. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2200. // //自动对焦
  2201. // if (!ImageFocus1(false))
  2202. // {
  2203. // return false;
  2204. // }
  2205. // //恢复全屏
  2206. // //iSEM.CloseReduced();
  2207. // //Thread.Sleep(200);
  2208. // cycle_time = iSEM.GetCycleTime();
  2209. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2210. //}
  2211. LogManager.AddHardwareLog("========测量线程:进入内部观察,不对焦!", true);
  2212. //增亮图像
  2213. iSEM.SetAutoVideoOff();
  2214. Thread.Sleep(200);
  2215. float currentBright = iSEM.GetBrightness();
  2216. Thread.Sleep(200);
  2217. float currentContrast = iSEM.GetContrast();
  2218. Thread.Sleep(200);
  2219. //add by sun 2020-12-17 黄工觉得太亮
  2220. int m_BrightMore = 2;
  2221. int m_ContrastMore = 2;
  2222. if (m_measureFile.MParam.SampleName == "3")
  2223. {
  2224. m_BrightMore = 0;
  2225. m_ContrastMore = 0;
  2226. }
  2227. //add by sun 2020-12-17 黄工觉得太亮 end
  2228. iSEM.SetBrightness(currentBright + m_BrightMore);
  2229. Thread.Sleep(200);
  2230. iSEM.SetContrast(currentContrast + m_ContrastMore);
  2231. Thread.Sleep(200);
  2232. }
  2233. #endregion
  2234. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  2235. if((m_measureFile.MParam.SampleName=="3")&&(n==0))
  2236. {
  2237. if (!GetImageFromSEM(mag[n]/2))
  2238. LogManager.AddHardwareLog("测量线程报错:第一个区域放大一半倍数" + (mag[n]/2).ToString() + "控制失败", true);
  2239. }
  2240. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  2241. #region 拍照
  2242. if (!iSEM.SetMagnification(mag[n]))
  2243. {
  2244. arg.State = false;
  2245. arg.Message = "移动到第一个点位置拍照失败";
  2246. SendMsg("1-35");
  2247. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2248. return false;
  2249. }
  2250. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成!", true);
  2251. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2252. set = mag[n];
  2253. current = iSEM.GetMagnification();
  2254. while (Math.Abs(current - set) > 1)
  2255. {
  2256. iSEM.SetMagnification(set);
  2257. Thread.Sleep(200);
  2258. current = iSEM.GetMagnification();
  2259. }
  2260. //获取像素大小
  2261. lsize.Add(iSEM.GetPixelSize());
  2262. Thread.Sleep(200);
  2263. String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2264. arg.Picture_Information.Picture_FullPath = fileName7;
  2265. arg.Picture_Information.Work_Status = "SEM";
  2266. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2267. Thread.Sleep(200);
  2268. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2269. Thread.Sleep(200);
  2270. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2271. Thread.Sleep(200);
  2272. //拍照前改变速度,延时
  2273. iSEM.CmdLineScan();
  2274. Thread.Sleep(200);
  2275. cycle_time = iSEM.GetCycleTime();
  2276. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2277. if (!GetImage(fileName7))
  2278. {
  2279. arg.State = false;
  2280. arg.Message = "移动到第一个点位置失败";
  2281. SendMsg("1-35");
  2282. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2283. return false;
  2284. }
  2285. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  2286. iSEM.CmdPixelScan();
  2287. Thread.Sleep(200);
  2288. limg_path.Add(fileName7);
  2289. arg.Picture_Information.Picture_FullPath = fileName7;
  2290. arg.State = true;
  2291. arg.Message = "移动到第一个点位置拍照成功";
  2292. SendMsg("1-35");
  2293. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2294. Thread.Sleep(200);
  2295. cycle_time = iSEM.GetCycleTime();
  2296. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2297. #endregion
  2298. }
  2299. #endregion
  2300. if (hand_intervene == 1)
  2301. {
  2302. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2303. }
  2304. }
  2305. else
  2306. {
  2307. if (hand_intervene == 1)
  2308. {
  2309. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2310. {
  2311. // return false;
  2312. }
  2313. }
  2314. else
  2315. {
  2316. //return false;
  2317. }
  2318. arg.State = false;
  2319. arg.Message = "获取位置及放大倍数失败";
  2320. SendMsg("1-34");
  2321. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2322. }
  2323. //判断是否停止进程
  2324. if (key_stop)
  2325. {
  2326. LogManager.AddHardwareLog("停止键按下", true);
  2327. return false;
  2328. }
  2329. }
  2330. ////14光束复位和Rotation关闭开关
  2331. //arg.Message = "光束复位成功";
  2332. //arg.State = true;
  2333. //SendMsg("1-36");
  2334. iSEM.SetTiltAngleOff();
  2335. Thread.Sleep(200);
  2336. iSEM.SetScanRotationOff();
  2337. Thread.Sleep(200);
  2338. iSEM.SetBeamShiftX(0);
  2339. Thread.Sleep(200);
  2340. iSEM.SetBeamShiftY(0);
  2341. Thread.Sleep(200);
  2342. //判断是否停止进程
  2343. if (key_stop)
  2344. {
  2345. return false;
  2346. }
  2347. return true;
  2348. }
  2349. //第一个孔的测试过程
  2350. public bool FirstHole()
  2351. {
  2352. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2353. LogManager.AddHardwareLog("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2354. if (!SetVoltageAndIPROBE())
  2355. {
  2356. LogManager.AddHardwareLog("测量线程:第一孔=====设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2357. return false;
  2358. }
  2359. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2360. //设置拉直的放大倍数
  2361. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), true);
  2362. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2363. {
  2364. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), false);
  2365. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2366. arg.State = false;
  2367. SendMsg("1-1");
  2368. return false;
  2369. }
  2370. float current = iSEM.GetMagnification();
  2371. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2372. {
  2373. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2374. Thread.Sleep(200);
  2375. current = iSEM.GetMagnification();
  2376. }
  2377. arg.Message = "拉直放大倍数设置成功!";
  2378. arg.State = true;
  2379. SendMsg("1-1");
  2380. Thread.Sleep(2000);
  2381. //自动化流程-每个点都需要补偿54度
  2382. if (m_measureFile.MParam.Is_Photograph == false)
  2383. {
  2384. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2385. if (!TiltCorrection(54.0f))
  2386. {
  2387. LogManager.AddHardwareLog("测量线程报错:倾斜补偿角度为54度失败", false);
  2388. arg.Message = "角度补偿54度失败!";
  2389. arg.State = false;
  2390. SendMsg("1-2");
  2391. return false;
  2392. }
  2393. arg.Message = "角度补偿54度成功!";
  2394. arg.State = true;
  2395. SendMsg("1-2");
  2396. Thread.Sleep(1000);
  2397. //判断是否停止进程
  2398. if (key_stop)
  2399. {
  2400. LogManager.AddHardwareLog("停止键按下", true);
  2401. return false;
  2402. }
  2403. }
  2404. // 2是5/6类样品,不需要拉直
  2405. if (m_measureFile.MParam.SampleName != "2")
  2406. {
  2407. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2408. if (!Straighten_Handle())
  2409. {
  2410. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2411. return false;
  2412. }
  2413. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2414. //判断是否停止进程
  2415. if (key_stop)
  2416. {
  2417. LogManager.AddHardwareLog("停止键按下。", true);
  2418. return false;
  2419. }
  2420. }
  2421. else
  2422. {
  2423. arg.Message = "拉直操作自动对焦成功!";
  2424. arg.State = true;
  2425. SendMsg("1-3");
  2426. Thread.Sleep(1000);
  2427. arg.Message = "拉直拍照成功!";
  2428. arg.Picture_Information.Picture_FullPath = "";
  2429. arg.State = true;
  2430. SendMsg("1-4");
  2431. Thread.Sleep(1000);
  2432. arg.Message = "拉直操作完成";
  2433. arg.State = true;
  2434. SendMsg("1-5");
  2435. Thread.Sleep(1000);
  2436. }
  2437. //13. 自动 定位功能
  2438. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2439. if (!GetPoistion())
  2440. {
  2441. LogManager.AddHardwareLog("测量线程报错:自动定位失败,程序退出。", false);
  2442. return false;
  2443. }
  2444. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2445. //判断是否停止进程
  2446. if (key_stop)
  2447. {
  2448. LogManager.AddHardwareLog("停止键按下。", true);
  2449. return false;
  2450. }
  2451. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2452. if (m_measureFile.MParam.Is_Photograph == false)
  2453. {
  2454. if (m_measureFile.MParam.IsCutingForDebug)
  2455. {
  2456. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!=="+ m_measureFile.MParam.IsCutingForDebug, true);
  2457. if (!FIBCross())
  2458. {
  2459. LogManager.AddHardwareLog("测量线程报错:自动控制FIB切割失败。", false);
  2460. return false;
  2461. }
  2462. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2463. }
  2464. }
  2465. //del by sun 2020-12-15 temp end
  2466. //判断是否停止进程
  2467. if (key_stop)
  2468. {
  2469. return false;
  2470. }
  2471. //16.找到切割位置
  2472. if (m_measureFile.MParam.Is_Photograph == false)
  2473. {
  2474. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2475. if (!FindCross())
  2476. {
  2477. return false;
  2478. }
  2479. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2480. //判断是否停止进程
  2481. if (key_stop)
  2482. {
  2483. return false;
  2484. }
  2485. }
  2486. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2487. //将过程17最后的拍照图片提出给18步进行调用
  2488. List<String> limg_path = new List<string>();
  2489. List<float> lsize = new List<float>();
  2490. //17.自动控制SEM拍截面照
  2491. if (!ShotSection(ref limg_path, ref lsize))
  2492. {
  2493. //return false;
  2494. }
  2495. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2496. //判断是否停止进程
  2497. if (key_stop)
  2498. {
  2499. return false;
  2500. }
  2501. //这段是临时的
  2502. //arg.State = true;
  2503. //arg.Message = "测量尺寸成功";
  2504. //SendMsg("1-40");
  2505. //18.自动层高分析
  2506. if (m_measureFile.MParam.Is_Photograph == false)
  2507. {
  2508. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2509. float size = iSEM.GetPixelSize();
  2510. int state = 1;
  2511. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2512. if (state == 0)
  2513. {
  2514. arg.Message = "测量尺寸失败";
  2515. arg.State = false;
  2516. SendMsg("1-40");
  2517. return false;
  2518. }
  2519. arg.State = true;
  2520. arg.Message = "测量尺寸成功";
  2521. SendMsg("1-40");
  2522. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2523. }
  2524. //19.能谱分析
  2525. if (m_measureFile.MParam.EDS)
  2526. {
  2527. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析开始===" + m_measureFile.MParam.EDS, true);
  2528. EDSAnalysis();
  2529. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析结束===" + m_measureFile.MParam.EDS, true);
  2530. }
  2531. //20.复位
  2532. LogManager.AddHardwareLog("===========测量线程:20.复位开始", true);
  2533. BeamShiftReset();
  2534. return true;
  2535. }
  2536. //非第一个孔的测试过程
  2537. public bool OtherHole()
  2538. {
  2539. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2540. LogManager.AddHardwareLog("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2541. if (!SetVoltageAndIPROBE())
  2542. {
  2543. LogManager.AddHardwareLog("测量线程:非第一孔==设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2544. return false;
  2545. }
  2546. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2547. //设置拉直的放大倍数
  2548. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2549. {
  2550. LogManager.AddHardwareLog("拉直放大倍数设置失败,程序退出。", true);
  2551. arg.Message = "拉直放大倍数设置失败!";
  2552. arg.State = false;
  2553. SendMsg("1-1");
  2554. return false;
  2555. }
  2556. float current = iSEM.GetMagnification();
  2557. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2558. {
  2559. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2560. Thread.Sleep(200);
  2561. current = iSEM.GetMagnification();
  2562. }
  2563. arg.Message = "拉直放大倍数设置成功!";
  2564. arg.State = true;
  2565. SendMsg("1-1");
  2566. Thread.Sleep(2000);
  2567. //自动化流程-每个点都需要补偿54度
  2568. if (m_measureFile.MParam.Is_Photograph == false)
  2569. {
  2570. if (!TiltCorrection(54.0f))
  2571. {
  2572. arg.Message = "角度补偿54度失败!";
  2573. arg.State = false;
  2574. SendMsg("1-2");
  2575. return false;
  2576. }
  2577. arg.Message = "角度补偿54度成功!";
  2578. arg.State = true;
  2579. SendMsg("1-2");
  2580. Thread.Sleep(2000);
  2581. //判断是否停止进程
  2582. if (key_stop)
  2583. {
  2584. return false;
  2585. }
  2586. }
  2587. if (m_measureFile.MParam.SampleName != "2")
  2588. {
  2589. if (!Straighten_Handle())
  2590. {
  2591. LogManager.AddHardwareLog("测量线程报错:拉直操作失败。", true);
  2592. return false;
  2593. }
  2594. //判断是否停止进程
  2595. if (key_stop)
  2596. {
  2597. LogManager.AddHardwareLog("停止键按下。", true);
  2598. return false;
  2599. }
  2600. }
  2601. else
  2602. {
  2603. arg.Message = "拉直操作自动对焦成功!";
  2604. arg.State = true;
  2605. SendMsg("1-3");
  2606. Thread.Sleep(1000);
  2607. arg.Message = "拉直拍照成功!";
  2608. arg.Picture_Information.Picture_FullPath = "";
  2609. arg.State = true;
  2610. SendMsg("1-4");
  2611. Thread.Sleep(1000);
  2612. arg.Message = "拉直操作完成";
  2613. arg.State = true;
  2614. SendMsg("1-5");
  2615. }
  2616. //13. 自动 定位功能
  2617. if (!GetPoistion())
  2618. {
  2619. return false;
  2620. }
  2621. //判断是否停止进程
  2622. if (key_stop)
  2623. {
  2624. return false;
  2625. }
  2626. //14.自动控制FIB切割
  2627. if (m_measureFile.MParam.Is_Photograph == false)
  2628. {
  2629. if (!FIBCross())
  2630. {
  2631. return false;
  2632. }
  2633. }
  2634. //判断是否停止进程
  2635. if (key_stop)
  2636. {
  2637. return false;
  2638. }
  2639. // 16.找到切割位置
  2640. if (m_measureFile.MParam.Is_Photograph == false)
  2641. {
  2642. if (!FindCross())
  2643. {
  2644. return false;
  2645. }
  2646. //判断是否停止进程
  2647. if (key_stop)
  2648. {
  2649. return false;
  2650. }
  2651. }
  2652. //将过程17最后的拍照图片提出给18步进行调用
  2653. List<String> limg_path = new List<string>();
  2654. List<float> lsize = new List<float>();
  2655. //17.自动控制SEM拍截面照
  2656. if (!ShotSection(ref limg_path, ref lsize))
  2657. {
  2658. //return false;
  2659. }
  2660. //判断是否停止进程
  2661. if (key_stop)
  2662. {
  2663. return false;
  2664. }
  2665. //这段是临时的
  2666. //arg.State = true;
  2667. //arg.Message = "测量尺寸成功";
  2668. //SendMsg("1-40");
  2669. //18.自动层高分析
  2670. if (m_measureFile.MParam.Is_Photograph == false)
  2671. {
  2672. float size = iSEM.GetPixelSize();
  2673. int state = 1;
  2674. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2675. if (state == 0)
  2676. {
  2677. arg.Message = "测量尺寸失败";
  2678. arg.State = false;
  2679. SendMsg("1-40");
  2680. return false;
  2681. }
  2682. arg.State = true;
  2683. arg.Message = "测量尺寸成功";
  2684. SendMsg("1-40");
  2685. }
  2686. //19.能谱分析
  2687. if (m_measureFile.MParam.EDS)
  2688. {
  2689. EDSAnalysis();
  2690. }
  2691. //20.复位 del by sun 2020-12-15
  2692. //BeamShiftReset();
  2693. //del by sun 2020-12-15 end
  2694. return true;
  2695. }
  2696. //测试完第一个孔后的样品台初始化操作。
  2697. //再调用CommonWork执行非第一个孔的测试过程
  2698. public bool OtherHole_Init()
  2699. {
  2700. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2701. #region 初始化
  2702. //1、不只拍照,且不是倾斜观测,则移动T轴
  2703. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2704. {
  2705. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2706. if (!iSEM.SetStageGotoT(0))
  2707. {
  2708. LogManager.AddHardwareLog("样品台归零失败", false);
  2709. return false;
  2710. }
  2711. while (true)
  2712. {
  2713. Thread.Sleep(5000);
  2714. if (iSEM.GetStageIs() == 0)
  2715. {
  2716. break;
  2717. }
  2718. }
  2719. //判断是否停止进程
  2720. if (key_stop)
  2721. {
  2722. LogManager.AddHardwareLog("停止键按下", true);
  2723. return false;
  2724. }
  2725. }
  2726. //2、如果是倾斜观测,则移动Z轴
  2727. if(m_measureFile.MParam.Title==true)
  2728. {
  2729. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2730. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_measureFile.MParam.ZDistance/1000))
  2731. //20201109, Z轴降到安全的位置上
  2732. if(!iSEM.SetStageGotoZ(fSateyZ))
  2733. {
  2734. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2735. return false;
  2736. }
  2737. while (true)
  2738. {
  2739. Thread.Sleep(5000);
  2740. if (iSEM.GetStageIs() == 0)
  2741. {
  2742. break;
  2743. }
  2744. }
  2745. //判断是否停止进程
  2746. if (key_stop)
  2747. {
  2748. LogManager.AddHardwareLog("停止键按下", true);
  2749. return false;
  2750. }
  2751. }
  2752. //3. 根据光镜坐标控制样品台移动
  2753. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2754. {
  2755. //SendMsg("移动失败");
  2756. LogManager.AddHardwareLog("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2757. return false;
  2758. }
  2759. LogManager.AddHardwareLog("移动R轴到="+ currentHole.Position.R.ToString(), true);
  2760. while (true)
  2761. {
  2762. Thread.Sleep(5000);
  2763. if (iSEM.GetStageIs() == 0)
  2764. {
  2765. break;
  2766. }
  2767. }
  2768. //判断是否停止进程
  2769. if (key_stop)
  2770. {
  2771. LogManager.AddHardwareLog("停止键按下", true);
  2772. return false;
  2773. }
  2774. if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2775. {
  2776. //SendMsg("移动失败");
  2777. LogManager.AddHardwareLog("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString()+"," +currentHole.Position.X.ToString()+")", false);
  2778. return false;
  2779. }
  2780. LogManager.AddHardwareLog("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2781. while (true)
  2782. {
  2783. Thread.Sleep(10000);
  2784. if (iSEM.GetStageIs() == 0)
  2785. {
  2786. break;
  2787. }
  2788. }
  2789. //判断是否停止进程
  2790. if (key_stop)
  2791. {
  2792. LogManager.AddHardwareLog("停止键按下", true);
  2793. return false;
  2794. }
  2795. //4、倾斜观测时恢复Z轴
  2796. if (m_measureFile.MParam.Title == true)
  2797. {
  2798. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2799. if (currentHole.Position.Z > 0.043)
  2800. {
  2801. LogManager.AddHardwareLog("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2802. return false;
  2803. }
  2804. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2805. {
  2806. LogManager.AddHardwareLog("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2807. return false;
  2808. }
  2809. while (true)
  2810. {
  2811. Thread.Sleep(5000);
  2812. if (iSEM.GetStageIs() == 0)
  2813. {
  2814. break;
  2815. }
  2816. }
  2817. //判断是否停止进程
  2818. if (key_stop)
  2819. {
  2820. LogManager.AddHardwareLog("停止键按下", true);
  2821. return false;
  2822. }
  2823. }
  2824. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2825. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2826. {
  2827. if (!iSEM.SetStageGotoT(54))
  2828. {
  2829. LogManager.AddHardwareLog("测量线程报错:校正54度有误", true);
  2830. return false;
  2831. }
  2832. while (true)
  2833. {
  2834. Thread.Sleep(5000);
  2835. if (iSEM.GetStageIs() == 0)
  2836. {
  2837. break;
  2838. }
  2839. }
  2840. }
  2841. //判断是否停止进程
  2842. if (key_stop)
  2843. {
  2844. LogManager.AddHardwareLog("停止键按下", true);
  2845. return false;
  2846. }
  2847. //4、设置WD
  2848. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2849. Thread.Sleep(1000);
  2850. #endregion
  2851. return true;
  2852. }
  2853. //初始化拉直操作
  2854. public bool Straighten_Handle()
  2855. {
  2856. if (m_measureFile.MParam.Title)
  2857. {
  2858. //倾斜样品台,SEM视野是黑色的
  2859. LogManager.AddHardwareLog("测量线程:恢复到工作位置后重新调亮图像。", true);
  2860. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2861. {
  2862. LogManager.AddHardwareLog("测量线程报错:重新设置到标准工作距离失败。", false);
  2863. return false;
  2864. }
  2865. Thread.Sleep(7000); //自动亮度对比度使用
  2866. }
  2867. //1、自动对焦
  2868. LogManager.AddHardwareLog("测量线程报错:拉直操作前自动对焦开始", true);
  2869. iSEM.SetReduced(402, 128, 340, 256);
  2870. Thread.Sleep(200);
  2871. //add by sun 2020-12-15
  2872. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2873. //add by sun 2020-12-15 end
  2874. Thread.Sleep(200);
  2875. cycle_time = iSEM.GetCycleTime();
  2876. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2877. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2878. float m_TempBrightness = 50.0f;
  2879. float m_TempContrast = 30.0f;
  2880. if (m_measureFile.MParam.SampleName == "3")
  2881. {
  2882. m_TempBrightness = 48.0f;
  2883. m_TempContrast = 29.0f;
  2884. }
  2885. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2886. iSEM.SetAutoVideoOff();
  2887. Thread.Sleep(200);
  2888. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2889. Thread.Sleep(200);
  2890. iSEM.SetContrast(m_TempContrast);//30.0f
  2891. Thread.Sleep(200);
  2892. if (!ImageFocus1(false))
  2893. {
  2894. LogManager.AddHardwareLog("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2895. arg.Message = "拉直操作自动对焦失败!";
  2896. arg.State = false;
  2897. SendMsg("1-3");
  2898. return false;
  2899. }
  2900. iSEM.CloseReduced();
  2901. Thread.Sleep(200);
  2902. cycle_time = iSEM.GetCycleTime();
  2903. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2904. iSEM.SetAutoVideoBrightnessAndContrast();
  2905. Thread.Sleep(5000);
  2906. arg.Message = "拉直操作自动对焦成功!";
  2907. arg.State = true;
  2908. SendMsg("1-3");
  2909. //判断是否停止进程
  2910. if (key_stop)
  2911. {
  2912. LogManager.AddHardwareLog("停止键按下。", true);
  2913. return false;
  2914. }
  2915. //2、拍张照片
  2916. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2917. LogManager.AddHardwareLog("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2918. //拍照前改变速度,延时
  2919. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2920. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2921. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2922. Thread.Sleep(200);
  2923. cycle_time = iSEM.GetCycleTime();
  2924. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2925. if (!GetImage(fileName0))
  2926. {
  2927. LogManager.AddHardwareLog("测量线程报错:拉直拍照失败", false);
  2928. arg.Message = "拉直拍照失败";
  2929. arg.State = false;
  2930. SendMsg("1-4");
  2931. return false;
  2932. }
  2933. arg.Message = "拉直拍照成功!";
  2934. arg.Picture_Information.Picture_FullPath = fileName0;
  2935. arg.State = true;
  2936. SendMsg("1-4");
  2937. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2938. Thread.Sleep(200);
  2939. cycle_time = iSEM.GetCycleTime();
  2940. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2941. //3、华为接口,获取旋转角度
  2942. float degree = 0;
  2943. int direction = 0;
  2944. int state = 1;
  2945. wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  2946. LogManager.AddHardwareLog("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  2947. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2948. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2949. if (state == 0)
  2950. {
  2951. LogManager.AddHardwareLog("测量线程:图像处理接口参数state返回为零" ,false);
  2952. arg.Message = "图像处理接口参数state返回为零";
  2953. arg.State = false;
  2954. SendMsg("1-5");
  2955. if (hand_intervene == 1)
  2956. {
  2957. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2958. {
  2959. return false;
  2960. }
  2961. }
  2962. else
  2963. {
  2964. return false;
  2965. }
  2966. return false;
  2967. }
  2968. if (direction == 2)
  2969. {
  2970. degree = -degree;
  2971. }
  2972. if (degree != 0)
  2973. {
  2974. //4、拉直,旋转R轴
  2975. LogManager.AddHardwareLog("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  2976. //选择之前,先降Z轴
  2977. float Zpos = iSEM.GetStageAtZ();
  2978. Thread.Sleep(200);
  2979. LogManager.AddHardwareLog("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  2980. if (!iSEM.SetStageGotoZ(fSateyZ))
  2981. {
  2982. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2983. return false;
  2984. }
  2985. while (true)
  2986. {
  2987. Thread.Sleep(4000);
  2988. if (iSEM.GetStageIs() == 0)
  2989. {
  2990. break;
  2991. }
  2992. }
  2993. //判断是否停止进程
  2994. if (key_stop)
  2995. {
  2996. LogManager.AddHardwareLog("停止键按下", true);
  2997. return false;
  2998. }
  2999. iSEM.SetStageDeltaR(degree);
  3000. while (true)
  3001. {
  3002. Thread.Sleep(4000);
  3003. if (iSEM.GetStageIs() == 0)
  3004. {
  3005. break;
  3006. }
  3007. }
  3008. if (!iSEM.SetStageGotoZ(Zpos))
  3009. {
  3010. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  3011. return false;
  3012. }
  3013. while (true)
  3014. {
  3015. Thread.Sleep(4000);
  3016. if (iSEM.GetStageIs() == 0)
  3017. {
  3018. break;
  3019. }
  3020. }
  3021. //判断是否停止进程
  3022. if (key_stop)
  3023. {
  3024. LogManager.AddHardwareLog("停止键按下", true);
  3025. return false;
  3026. }
  3027. //4、设置WD
  3028. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3029. Thread.Sleep(1000);
  3030. }
  3031. arg.Message = "拉直操作完成";
  3032. arg.State = true;
  3033. SendMsg("1-5");
  3034. return true;
  3035. }
  3036. //角度补偿
  3037. public bool TiltCorrection(float a_fAngle)
  3038. {
  3039. if (!iSEM.SetTiltAngleOn())
  3040. {
  3041. return false;
  3042. }
  3043. Thread.Sleep(200);
  3044. //恢复原始状态
  3045. if (!iSEM.SetTiltAngle(a_fAngle))
  3046. {
  3047. return false;
  3048. }
  3049. return true;
  3050. }
  3051. //拍图
  3052. public bool GetImage(String a_fileName)
  3053. {
  3054. LogManager.AddHardwareLog("获取分辨率开始!", true);
  3055. //3. 获取分辨率
  3056. int[] ImageSize = iSEM.GetImageStore();
  3057. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3058. {
  3059. return false;
  3060. }
  3061. short width = (short)ImageSize[0];
  3062. short height = (short)ImageSize[1];
  3063. LogManager.AddHardwareLog("获取分辨率结束!"+ a_fileName +"===="+ width+ "*"+height, true);
  3064. //4. 抓图
  3065. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  3066. {
  3067. LogManager.AddHardwareLog("抓图失败!", true);
  3068. return false;
  3069. }
  3070. return true;
  3071. }
  3072. //拍图1
  3073. public bool GetImage1(String a_fileName)
  3074. {
  3075. //3. 获取分辨率
  3076. int[] ImageSize = iSEM.GetImageStore();
  3077. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3078. {
  3079. return false;
  3080. }
  3081. short width = (short)ImageSize[0];
  3082. short height = (short)ImageSize[1];
  3083. //4. 抓图
  3084. if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
  3085. {
  3086. return false;
  3087. }
  3088. return true;
  3089. }
  3090. #region 算法设计
  3091. //执行自动对焦
  3092. public bool ImageFocus()
  3093. {
  3094. if (m_measureFile.MParam.FocusMode == 1)//手动
  3095. {
  3096. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3097. {
  3098. }
  3099. else
  3100. {
  3101. return false;
  3102. }
  3103. }
  3104. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3105. {
  3106. //郝工增加自动对焦算法
  3107. //处理文件夹
  3108. if (Directory.Exists(focus_path))
  3109. {
  3110. Directory.Delete(focus_path, true);
  3111. }
  3112. Thread.Sleep(3000);
  3113. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3114. Thread.Sleep(1000);
  3115. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3116. Thread.Sleep(1000);
  3117. //再创建文件夹
  3118. Directory.CreateDirectory(focus_path);
  3119. //1、对焦参数类,2、输出工作距离
  3120. int wd = 0;
  3121. //20201015 根据当前的工作距离重新计算对焦位置
  3122. float currentWd = iSEM.GetWorkingDistance();
  3123. //m_measureFile.MParam.AutoFocus.UP = currentWd * 1000000 - m_measureFile.MParam.AutoFocus.Step;
  3124. //m_measureFile.MParam.AutoFocus.Down = currentWd * 1000000 + m_measureFile.MParam.AutoFocus.Step;
  3125. Thread.Sleep(2000);
  3126. float currentMag = iSEM.GetMagnification();
  3127. Thread.Sleep(2000);
  3128. FocusParam pFoucs = new FocusParam();
  3129. if (currentMag <= m_measureFile.MParam.Photograph_Magnification)
  3130. {
  3131. pFoucs = m_measureFile.MParam.AutoFocus;
  3132. pFoucs.UP = 5050;
  3133. pFoucs.Down = 5150;
  3134. pFoucs.Step = 50;
  3135. pFoucs.fStep = 10;
  3136. pFoucs.Range = 50;
  3137. //4、设置WD
  3138. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3139. Thread.Sleep(1000);
  3140. }
  3141. else
  3142. {
  3143. pFoucs = m_measureFile.MParam.AutoFocus;
  3144. pFoucs.UP = 5000;
  3145. pFoucs.Down = 5200;
  3146. pFoucs.Step = 10;
  3147. pFoucs.fStep = 5;
  3148. pFoucs.Range = 50;
  3149. //4、设置WD
  3150. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3151. Thread.Sleep(1000);
  3152. }
  3153. //LogManager.AddHardwareLog("修改对焦参数", true);
  3154. AutoFocus(pFoucs, out wd);
  3155. LogManager.AddHardwareLog("自动调节算法输出"+ (wd * 0.00000001).ToString(), true);
  3156. //设置工作距离
  3157. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  3158. //设置完工作距离后必须延迟5秒
  3159. Thread.Sleep(5000);
  3160. //处理图片位置
  3161. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3162. }
  3163. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3164. {
  3165. //后期和客户对接接口
  3166. List<string> filenames = new List<string>();
  3167. String retfilename = wr.Img_Auto_Focus(filenames);
  3168. }
  3169. else //蔡司自动对焦
  3170. {
  3171. iSEM.CmdAutoFocusCoarse();
  3172. while (true)
  3173. {
  3174. Thread.Sleep(10000);
  3175. if (0 == iSEM.GetAutoFunction())
  3176. {
  3177. break;
  3178. }
  3179. }
  3180. iSEM.CmdAutoFocusFine();
  3181. while (true)
  3182. {
  3183. Thread.Sleep(10000);
  3184. if (0 == iSEM.GetAutoFunction())
  3185. {
  3186. break;
  3187. }
  3188. }
  3189. }
  3190. return true;
  3191. }
  3192. //执行自动对焦
  3193. public bool ImageFocus1(Boolean Is_Stig)
  3194. {
  3195. if (m_measureFile.MParam.FocusMode == 1)//手动
  3196. {
  3197. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3198. {
  3199. }
  3200. else
  3201. {
  3202. return false;
  3203. }
  3204. }
  3205. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3206. {
  3207. #region 执行蔡司自动对焦程序
  3208. //服务地址
  3209. string snumstr = @"http://192.168.1.101:8123";
  3210. // 调用方法;只对焦不消像散
  3211. if (Is_Stig)
  3212. {
  3213. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);
  3214. if (focusstig != "success")
  3215. {
  3216. LogManager.AddHardwareLog("对焦失败" + focusstig , true);
  3217. return false;
  3218. }
  3219. }
  3220. else
  3221. {
  3222. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);
  3223. if (onlyfocus != "success")
  3224. {
  3225. return false;
  3226. }
  3227. }
  3228. #endregion
  3229. }
  3230. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3231. {
  3232. //后期和客户对接接口
  3233. List<string> filenames = new List<string>();
  3234. String retfilename = wr.Img_Auto_Focus(filenames);
  3235. }
  3236. else //蔡司自动对焦
  3237. {
  3238. iSEM.CmdAutoFocusCoarse();
  3239. while (true)
  3240. {
  3241. Thread.Sleep(10000);
  3242. if (0 == iSEM.GetAutoFunction())
  3243. {
  3244. break;
  3245. }
  3246. }
  3247. iSEM.CmdAutoFocusFine();
  3248. while (true)
  3249. {
  3250. Thread.Sleep(10000);
  3251. if (0 == iSEM.GetAutoFunction())
  3252. {
  3253. break;
  3254. }
  3255. }
  3256. }
  3257. return true;
  3258. }
  3259. //执行自动消像散
  3260. public bool ImageStig()
  3261. {
  3262. if (m_measureFile.MParam.FocusMode == 1)//手动
  3263. {
  3264. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3265. {
  3266. }
  3267. else
  3268. {
  3269. return false;
  3270. }
  3271. }
  3272. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3273. {
  3274. //郝工增加自动对焦算法
  3275. //处理文件夹
  3276. if (Directory.Exists(StigX_path))
  3277. {
  3278. Directory.Delete(StigX_path, true);
  3279. }
  3280. Thread.Sleep(3000);
  3281. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3282. Thread.Sleep(1000);
  3283. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3284. Thread.Sleep(1000);
  3285. //再创建文件夹
  3286. Directory.CreateDirectory(StigX_path);
  3287. //1、对焦参数类,2、输出像散值
  3288. int stigX = 0;
  3289. //根据当前的stigX重新计算像散值
  3290. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3291. //m_measureFile.MParam.AutoStigX.Step = 10; //像散的步长为10
  3292. //m_measureFile.MParam.AutoStigX.UP = currentStigX - m_measureFile.MParam.AutoStigX.Step;
  3293. //m_measureFile.MParam.AutoStigX.Down = currentStigX + m_measureFile.MParam.AutoStigX.Step;
  3294. //设置工作距离
  3295. iSEM.SetAstigmatismX((float)0);
  3296. //设置完工作距离后必须延迟5秒
  3297. Thread.Sleep(5000);
  3298. //LogManager.AddHardwareLog("修改消像散参数", true);
  3299. AutoStig(m_measureFile.MParam.AutoStigX, out stigX);
  3300. LogManager.AddHardwareLog("自动消散算法输出X"+ (stigX * 0.01).ToString(), true);
  3301. //设置工作距离
  3302. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3303. //设置完工作距离后必须延迟5秒
  3304. Thread.Sleep(5000);
  3305. //处理图片位置
  3306. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3307. //处理文件夹
  3308. if (Directory.Exists(StigY_path))
  3309. {
  3310. Directory.Delete(StigY_path, true);
  3311. }
  3312. Thread.Sleep(3000);
  3313. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3314. Thread.Sleep(1000);
  3315. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3316. Thread.Sleep(1000);
  3317. //再创建文件夹
  3318. Directory.CreateDirectory(StigY_path);
  3319. //1、对焦参数类,2、输出像散值
  3320. int stigY = 0;
  3321. //根据当前的stigX重新计算像散值
  3322. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3323. //m_measureFile.MParam.AutoStigY.Step = 10; //像散的步长为10
  3324. //m_measureFile.MParam.AutoStigY.UP = m_measureFile.MParam.AutoStigY.;
  3325. //m_measureFile.MParam.AutoStigY.Down = m_measureFile.MParam.AutoStigY.Step;
  3326. iSEM.SetAstigmatismY((float)0);
  3327. Thread.Sleep(2000);
  3328. LogManager.AddHardwareLog("修改消像散参数", true);
  3329. AutoStig(m_measureFile.MParam.AutoStigY, out stigY);
  3330. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3331. //设置工作距离
  3332. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3333. //设置完工作距离后必须延迟5秒
  3334. Thread.Sleep(5000);
  3335. }
  3336. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3337. {
  3338. //后期和客户对接接口
  3339. List<string> filenames = new List<string>();
  3340. String retfilename = wr.Img_Auto_Focus(filenames);
  3341. }
  3342. else //蔡司自动对焦
  3343. {
  3344. iSEM.CmdAutoFocusCoarse();
  3345. while (true)
  3346. {
  3347. Thread.Sleep(10000);
  3348. if (0 == iSEM.GetAutoFunction())
  3349. {
  3350. break;
  3351. }
  3352. }
  3353. iSEM.CmdAutoFocusFine();
  3354. while (true)
  3355. {
  3356. Thread.Sleep(10000);
  3357. if (0 == iSEM.GetAutoFunction())
  3358. {
  3359. break;
  3360. }
  3361. }
  3362. }
  3363. return true;
  3364. }
  3365. //自动聚焦
  3366. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  3367. {
  3368. a_nWd = 0;
  3369. float wd = iSEM.GetWorkingDistance();
  3370. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3371. if (a_param == null)
  3372. {
  3373. LogManager.AddHardwareLog("空参数", true);
  3374. return false;
  3375. }
  3376. string path = a_param.Path;
  3377. if (!Directory.Exists(path))
  3378. {
  3379. LogManager.AddHardwareLog("文件夹丢失", true);
  3380. return false;
  3381. }
  3382. string path_coarse = a_param.Path + "\\Coarse";
  3383. if (!Directory.Exists(path_coarse))
  3384. {
  3385. Directory.CreateDirectory(path_coarse);
  3386. }
  3387. string path_fine = a_param.Path + "\\Fine";
  3388. if (!Directory.Exists(path_fine))
  3389. {
  3390. Directory.CreateDirectory(path_fine);
  3391. }
  3392. //1. 拍照
  3393. //1.1, 粗拍照
  3394. //1.1.1, 根据参数计算拍照次数
  3395. double nUp = a_param.UP * 100.0 ;
  3396. double nDown = a_param.Down * 100.0;
  3397. double nStep = a_param.Step * 100.0;
  3398. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3399. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3400. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3401. //粗拍照
  3402. for (int i = 0; i < nTimes; i++)
  3403. {
  3404. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  3405. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3406. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3407. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3408. int swd = cWd / 100;
  3409. //SendMsg("wd = " + swd.ToString() +"um");
  3410. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3411. arg.Picture_Information.Picture_FullPath = fileName;
  3412. if (!GetImage(fileName))
  3413. {
  3414. return false;
  3415. }
  3416. //arg.State = true;
  3417. //arg.Message = "自动对焦";
  3418. //SendMsg("0-9");
  3419. //判断是否停止进程
  3420. if (key_stop)
  3421. {
  3422. return false;
  3423. }
  3424. //Thread.Sleep(3000);
  3425. }
  3426. //1.2, 选定细拍照的工作距离
  3427. int CorWd = 510000;
  3428. ChooseBest(path_coarse,out CorWd);
  3429. if (CorWd == -1)
  3430. CorWd = 510000;
  3431. else
  3432. a_nWd = CorWd;
  3433. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3434. //1.3, 细拍照
  3435. if ( (CorWd - a_param.Range * 100.0) <=0)
  3436. {
  3437. return false;
  3438. }
  3439. double nfUp = CorWd - a_param.Range * 100.0;
  3440. double nfStep = a_param.fStep * 100.0;
  3441. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3442. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3443. for (int i = 0; i < nfTimes; i++)
  3444. {
  3445. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3446. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3447. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3448. Thread.Sleep(Convert.ToInt32(cycle_time)+100);
  3449. int swd = cWd / 100;
  3450. //SendMsg("wd = " + swd.ToString() + "um");
  3451. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3452. arg.Picture_Information.Picture_FullPath = fileName;
  3453. if (!GetImage(fileName))
  3454. {
  3455. return false;
  3456. }
  3457. //arg.State = true;
  3458. //arg.Message = "自动对焦";
  3459. //SendMsg("0-9");
  3460. //判断是否停止进程
  3461. if (key_stop)
  3462. {
  3463. return false;
  3464. }
  3465. //Thread.Sleep(2000);
  3466. }
  3467. int fineWd = CorWd;
  3468. ChooseBest(path_fine, out fineWd);
  3469. //SendMsg("wd fine max = " + fineWd.ToString());
  3470. if (fineWd == -1)
  3471. a_nWd = CorWd;
  3472. else
  3473. a_nWd = fineWd;
  3474. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3475. //arg.State = true;
  3476. //arg.Message = "自动对焦";
  3477. //SendMsg(step_code);
  3478. return true;
  3479. }
  3480. //自动聚焦1
  3481. public bool AutoFocus1(FocusParam a_param, out int a_nWd)
  3482. {
  3483. a_nWd = 0;
  3484. float wd = iSEM.GetWorkingDistance();
  3485. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3486. if (a_param == null)
  3487. {
  3488. LogManager.AddHardwareLog("空参数", true);
  3489. return false;
  3490. }
  3491. string path = a_param.Path;
  3492. if (!Directory.Exists(path))
  3493. {
  3494. LogManager.AddHardwareLog("文件夹丢失", true);
  3495. return false;
  3496. }
  3497. string path_coarse = a_param.Path + "\\Coarse";
  3498. if (!Directory.Exists(path_coarse))
  3499. {
  3500. Directory.CreateDirectory(path_coarse);
  3501. }
  3502. string path_fine = a_param.Path + "\\Fine";
  3503. if (!Directory.Exists(path_fine))
  3504. {
  3505. Directory.CreateDirectory(path_fine);
  3506. }
  3507. //1. 拍照
  3508. //1.1, 粗拍照
  3509. //1.1.1, 根据参数计算拍照次数
  3510. double nUp = a_param.UP * 100.0;
  3511. double nDown = a_param.Down * 100.0;
  3512. double nStep = a_param.Step * 100.0;
  3513. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3514. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3515. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3516. //粗拍照
  3517. for (int i = 0; i < nTimes; i++)
  3518. {
  3519. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3520. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3521. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3522. Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
  3523. int swd = cWd / 100;
  3524. //SendMsg("wd = " + swd.ToString() +"um");
  3525. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3526. //arg.Picture_Information.Picture_FullPath = fileName;
  3527. if (!GetImage1(fileName))
  3528. {
  3529. return false;
  3530. }
  3531. //arg.State = true;
  3532. //arg.Message = "自动对焦";
  3533. //SendMsg(step_code);
  3534. //判断是否停止进程
  3535. if (key_stop)
  3536. {
  3537. return false;
  3538. }
  3539. //Thread.Sleep(3000);
  3540. }
  3541. //1.2, 选定细拍照的工作距离
  3542. int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3543. ChooseBest(path_coarse, out CorWd);
  3544. if (CorWd == -1)
  3545. CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3546. else
  3547. a_nWd = CorWd;
  3548. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3549. //1.3, 细拍照
  3550. if ((CorWd - a_param.Range * 100.0) <= 0)
  3551. {
  3552. return false;
  3553. }
  3554. double nfUp = CorWd - a_param.Range * 100.0;
  3555. double nfStep = a_param.fStep * 100.0;
  3556. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3557. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3558. for (int i = 0; i < nfTimes; i++)
  3559. {
  3560. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3561. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3562. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3563. Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
  3564. int swd = cWd / 100;
  3565. //SendMsg("wd = " + swd.ToString() + "um");
  3566. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3567. //arg.Picture_Information.Picture_FullPath = fileName;
  3568. if (!GetImage1(fileName))
  3569. {
  3570. return false;
  3571. }
  3572. //arg.State = true;
  3573. //arg.Message = "自动对焦";
  3574. //SendMsg(step_code);
  3575. //判断是否停止进程
  3576. if (key_stop)
  3577. {
  3578. return false;
  3579. }
  3580. //Thread.Sleep(2000);
  3581. }
  3582. int fineWd = CorWd;
  3583. ChooseBest(path_fine, out fineWd);
  3584. //SendMsg("wd fine max = " + fineWd.ToString());
  3585. if (fineWd == -1)
  3586. a_nWd = CorWd;
  3587. else
  3588. a_nWd = fineWd;
  3589. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3590. //arg.State = true;
  3591. //arg.Message = "自动对焦";
  3592. //SendMsg("0-9");
  3593. return true;
  3594. }
  3595. //自动消像散 AutoStig
  3596. public bool AutoStig(FocusParam a_param, out int a_nWd)
  3597. {
  3598. a_nWd = 0;
  3599. float wd = 0;
  3600. if (a_param.TYPE == 2)
  3601. {
  3602. wd = iSEM.GetAstigmatismX();
  3603. }
  3604. else if (a_param.TYPE == 3)
  3605. {
  3606. wd = iSEM.GetAstigmatismY();
  3607. }
  3608. else
  3609. {
  3610. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3611. return false;
  3612. }
  3613. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3614. if (a_param == null)
  3615. {
  3616. LogManager.AddHardwareLog("空参数", true);
  3617. return false;
  3618. }
  3619. string path = a_param.Path;
  3620. if (!Directory.Exists(path))
  3621. {
  3622. LogManager.AddHardwareLog("文件夹丢失", true);
  3623. return false;
  3624. }
  3625. string path_coarse = a_param.Path + "\\Coarse";
  3626. if (!Directory.Exists(path_coarse))
  3627. {
  3628. Directory.CreateDirectory(path_coarse);
  3629. }
  3630. string path_fine = a_param.Path + "\\Fine";
  3631. if (!Directory.Exists(path_fine))
  3632. {
  3633. Directory.CreateDirectory(path_fine);
  3634. }
  3635. //1. 拍照
  3636. //1.1, 粗拍照
  3637. //1.1.1, 根据参数计算拍照次数
  3638. double nUp = a_param.UP * 100.0;
  3639. double nDown = a_param.Down * 100.0;
  3640. double nStep = a_param.Step * 100.0;
  3641. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3642. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3643. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3644. //粗拍照
  3645. for (int i = 0; i < nTimes; i++)
  3646. {
  3647. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3648. if (a_param.TYPE == 2)
  3649. {
  3650. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3651. }
  3652. else if (a_param.TYPE == 3)
  3653. {
  3654. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3655. }
  3656. else
  3657. {
  3658. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3659. return false;
  3660. }
  3661. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3662. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3663. int swd = cWd / 100;
  3664. //SendMsg("wd = " + swd.ToString() +"um");
  3665. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3666. arg.Picture_Information.Picture_FullPath = fileName;
  3667. if (!GetImage(fileName))
  3668. {
  3669. return false;
  3670. }
  3671. arg.State = true;
  3672. arg.Message = "自动像散";
  3673. SendMsg("0-8");
  3674. //判断是否停止进程
  3675. if (key_stop)
  3676. {
  3677. return false;
  3678. }
  3679. //Thread.Sleep(3000);
  3680. }
  3681. //1.2, 选定细拍照的工作距离
  3682. int CorWd;
  3683. ChooseBest(path_coarse, out CorWd);
  3684. if (CorWd == -1)
  3685. {
  3686. a_nWd = 0;
  3687. }
  3688. else
  3689. {
  3690. a_nWd = CorWd;
  3691. }
  3692. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3693. //1.3, 细拍照
  3694. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3695. {
  3696. return false;
  3697. }
  3698. double nfUp = 0;
  3699. if (a_param.Range >= 0)
  3700. nfUp = CorWd - a_param.Range * 100.0;
  3701. else
  3702. nfUp = CorWd + a_param.Range * 100.0;
  3703. double nfStep = a_param.fStep * 100.0;
  3704. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3705. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3706. for (int i = 0; i < nfTimes; i++)
  3707. {
  3708. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3709. if (a_param.TYPE == 2)
  3710. {
  3711. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3712. }
  3713. else if (a_param.TYPE == 3)
  3714. {
  3715. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3716. }
  3717. else
  3718. {
  3719. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3720. return false;
  3721. }
  3722. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3723. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3724. int swd = cWd / 100;
  3725. //SendMsg("wd = " + swd.ToString() + "um");
  3726. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3727. arg.Picture_Information.Picture_FullPath = fileName;
  3728. if (!GetImage(fileName))
  3729. {
  3730. return false;
  3731. }
  3732. arg.State = true;
  3733. arg.Message = "自动像散";
  3734. SendMsg("0-8");
  3735. //判断是否停止进程
  3736. if (key_stop)
  3737. {
  3738. return false;
  3739. }
  3740. //Thread.Sleep(2000);
  3741. }
  3742. int fineWd = CorWd;
  3743. ChooseBest(path_fine, out fineWd);
  3744. //SendMsg("wd fine max = " + fineWd.ToString());
  3745. if(fineWd == -1)
  3746. a_nWd = CorWd;
  3747. else
  3748. a_nWd = fineWd;
  3749. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3750. //arg.State = true;
  3751. //arg.Message = "自动像散";
  3752. //SendMsg(step_code);
  3753. return true;
  3754. }
  3755. //执行自动消像散1
  3756. public bool ImageStig1()
  3757. {
  3758. if (m_measureFile.MParam.FocusMode == 1)//手动
  3759. {
  3760. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3761. {
  3762. }
  3763. else
  3764. {
  3765. return false;
  3766. }
  3767. }
  3768. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3769. {
  3770. //郝工增加自动对焦算法
  3771. //处理文件夹
  3772. if (Directory.Exists(StigX_path))
  3773. {
  3774. Directory.Delete(StigX_path, true);
  3775. }
  3776. Thread.Sleep(3000);
  3777. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3778. Thread.Sleep(200);
  3779. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3780. Thread.Sleep(200);
  3781. //再创建文件夹
  3782. Directory.CreateDirectory(StigX_path);
  3783. //1、对焦参数类,2、输出像散值
  3784. int stigX = 0;
  3785. //根据当前的stigX重新计算像散值
  3786. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3787. //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
  3788. //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
  3789. //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
  3790. //设置工作距离
  3791. currentStigX = iSEM.GetAstigmatismX();
  3792. Thread.Sleep(1000);
  3793. FocusParam pFocus = new FocusParam();
  3794. pFocus = m_measureFile.MParam.AutoStigX;
  3795. float old_up = m_measureFile.MParam.AutoStigX.UP;
  3796. float old_down = m_measureFile.MParam.AutoStigX.Down;
  3797. float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3798. pFocus.UP = currentStigX - setvalue;
  3799. pFocus.Down = currentStigX + setvalue;
  3800. //m_measureFile.MParam.AutoStigX.Step = 1;
  3801. //m_measureFile.MParam.AutoStigX.Range = (float)0.5;
  3802. //m_measureFile.MParam.AutoStigX.fStep = (float)0.1;
  3803. LogManager.AddHardwareLog("消像散参数: up = "+pFocus.UP+",down = " + pFocus.Down+ ",step =" + pFocus.Step + ",rang ="+ pFocus.Range + ",fstep = " + pFocus.fStep, true);
  3804. //LogManager.AddHardwareLog("修改消像散参数", true);
  3805. AutoStig1(pFocus, out stigX);
  3806. m_measureFile.MParam.AutoStigX.UP = old_up;
  3807. m_measureFile.MParam.AutoStigX.Down = old_down;
  3808. LogManager.AddHardwareLog("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3809. //设置工作距离
  3810. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3811. //设置完工作距离后必须延迟5秒
  3812. Thread.Sleep(5000);
  3813. //处理图片位置
  3814. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3815. //处理文件夹
  3816. if (Directory.Exists(StigY_path))
  3817. {
  3818. Directory.Delete(StigY_path, true);
  3819. }
  3820. Thread.Sleep(3000);
  3821. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3822. Thread.Sleep(200);
  3823. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3824. Thread.Sleep(200);
  3825. //再创建文件夹
  3826. Directory.CreateDirectory(StigY_path);
  3827. //1、对焦参数类,2、输出像散值
  3828. int stigY = 0;
  3829. //根据当前的stigX重新计算像散值
  3830. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3831. //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
  3832. //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
  3833. //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
  3834. currentStigY = iSEM.GetAstigmatismY();
  3835. Thread.Sleep(1000);
  3836. //m_measureFile.MParam.AutoStigY.UP = currentStigY - setvalue;
  3837. //m_measureFile.MParam.AutoStigY.Down = currentStigY + setvalue;
  3838. //m_measureFile.MParam.AutoStigY.Step = 1;
  3839. //m_measureFile.MParam.AutoStigY.Range = (float)0.5;
  3840. //m_measureFile.MParam.AutoStigY.fStep = (float)0.1;
  3841. FocusParam pFocusY = new FocusParam();
  3842. pFocusY = m_measureFile.MParam.AutoStigY;
  3843. float old_upY = m_measureFile.MParam.AutoStigY.UP;
  3844. float old_downY = m_measureFile.MParam.AutoStigY.Down;
  3845. //float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3846. pFocusY.UP = currentStigY - setvalue;
  3847. pFocusY.Down = currentStigY + setvalue;
  3848. LogManager.AddHardwareLog("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
  3849. AutoStig1(pFocusY, out stigY);
  3850. m_measureFile.MParam.AutoStigY.UP = old_upY;
  3851. m_measureFile.MParam.AutoStigY.Down = old_downY;
  3852. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3853. //设置工作距离
  3854. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3855. //设置完工作距离后必须延迟5秒
  3856. Thread.Sleep(5000);
  3857. }
  3858. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3859. {
  3860. //后期和客户对接接口
  3861. List<string> filenames = new List<string>();
  3862. String retfilename = wr.Img_Auto_Focus(filenames);
  3863. }
  3864. else //蔡司自动对焦
  3865. {
  3866. iSEM.CmdAutoFocusCoarse();
  3867. while (true)
  3868. {
  3869. Thread.Sleep(10000);
  3870. if (0 == iSEM.GetAutoFunction())
  3871. {
  3872. break;
  3873. }
  3874. }
  3875. iSEM.CmdAutoFocusFine();
  3876. while (true)
  3877. {
  3878. Thread.Sleep(10000);
  3879. if (0 == iSEM.GetAutoFunction())
  3880. {
  3881. break;
  3882. }
  3883. }
  3884. }
  3885. return true;
  3886. }
  3887. //自动消像散 AutoStig1
  3888. public bool AutoStig1(FocusParam a_param, out int a_nWd)
  3889. {
  3890. a_nWd = 0;
  3891. float wd = 0;
  3892. if (a_param.TYPE == 2)
  3893. {
  3894. wd = iSEM.GetAstigmatismX();
  3895. }
  3896. else if (a_param.TYPE == 3)
  3897. {
  3898. wd = iSEM.GetAstigmatismY();
  3899. }
  3900. else
  3901. {
  3902. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3903. return false;
  3904. }
  3905. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3906. if (a_param == null)
  3907. {
  3908. LogManager.AddHardwareLog("空参数", true);
  3909. return false;
  3910. }
  3911. string path = a_param.Path;
  3912. if (!Directory.Exists(path))
  3913. {
  3914. LogManager.AddHardwareLog("文件夹丢失", true);
  3915. return false;
  3916. }
  3917. string path_coarse = a_param.Path + "\\Coarse";
  3918. if (!Directory.Exists(path_coarse))
  3919. {
  3920. Directory.CreateDirectory(path_coarse);
  3921. }
  3922. string path_fine = a_param.Path + "\\Fine";
  3923. if (!Directory.Exists(path_fine))
  3924. {
  3925. Directory.CreateDirectory(path_fine);
  3926. }
  3927. //1. 拍照
  3928. //1.1, 粗拍照
  3929. //1.1.1, 根据参数计算拍照次数
  3930. double nUp = a_param.UP * 100.0;
  3931. double nDown = a_param.Down * 100.0;
  3932. double nStep = a_param.Step * 100.0;
  3933. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3934. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3935. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3936. //粗拍照
  3937. for (int i = 0; i < nTimes; i++)
  3938. {
  3939. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3940. if (a_param.TYPE == 2)
  3941. {
  3942. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3943. }
  3944. else if (a_param.TYPE == 3)
  3945. {
  3946. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3947. }
  3948. else
  3949. {
  3950. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3951. return false;
  3952. }
  3953. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3954. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3955. int swd = cWd / 100;
  3956. //SendMsg("wd = " + swd.ToString() +"um");
  3957. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3958. arg.Picture_Information.Picture_FullPath = fileName;
  3959. if (!GetImage1(fileName))
  3960. {
  3961. return false;
  3962. }
  3963. //arg.State = true;
  3964. //arg.Message = "自动像散";
  3965. //SendMsg(step_code);
  3966. //判断是否停止进程
  3967. if (key_stop)
  3968. {
  3969. return false;
  3970. }
  3971. //Thread.Sleep(3000);
  3972. }
  3973. //1.2, 选定细拍照的工作距离
  3974. int CorWd;
  3975. ChooseBest(path_coarse, out CorWd);
  3976. if (CorWd == -1)
  3977. {
  3978. a_nWd = 0;
  3979. }
  3980. else
  3981. {
  3982. a_nWd = CorWd;
  3983. }
  3984. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3985. //1.3, 细拍照
  3986. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3987. {
  3988. return false;
  3989. }
  3990. double nfUp = 0;
  3991. if (a_param.Range >= 0)
  3992. nfUp = CorWd - a_param.Range * 100.0;
  3993. else
  3994. nfUp = CorWd + a_param.Range * 100.0;
  3995. double nfStep = a_param.fStep * 100.0;
  3996. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3997. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3998. for (int i = 0; i < nfTimes; i++)
  3999. {
  4000. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4001. if (a_param.TYPE == 2)
  4002. {
  4003. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  4004. }
  4005. else if (a_param.TYPE == 3)
  4006. {
  4007. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  4008. }
  4009. else
  4010. {
  4011. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4012. return false;
  4013. }
  4014. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4015. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4016. int swd = cWd / 100;
  4017. //SendMsg("wd = " + swd.ToString() + "um");
  4018. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4019. arg.Picture_Information.Picture_FullPath = fileName;
  4020. if (!GetImage1(fileName))
  4021. {
  4022. return false;
  4023. }
  4024. //arg.State = true;
  4025. //arg.Message = "自动像散";
  4026. //SendMsg(step_code);
  4027. //判断是否停止进程
  4028. if (key_stop)
  4029. {
  4030. return false;
  4031. }
  4032. //Thread.Sleep(2000);
  4033. }
  4034. int fineWd = CorWd;
  4035. ChooseBest(path_fine, out fineWd);
  4036. //SendMsg("wd fine max = " + fineWd.ToString());
  4037. if (fineWd == -1)
  4038. a_nWd = CorWd;
  4039. else
  4040. a_nWd = fineWd;
  4041. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4042. //arg.State = true;
  4043. //arg.Message = "自动像散";
  4044. //SendMsg("0-9");
  4045. return true;
  4046. }
  4047. //自动FIB对焦 AutoFIBFocus
  4048. public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
  4049. {
  4050. a_nWd = 0;
  4051. float wd = 0;
  4052. if (a_param.TYPE == 4)
  4053. {
  4054. wd = iSEM.GetFIBObjectivePotential();
  4055. }
  4056. else
  4057. {
  4058. LogManager.AddHardwareLog("FIB自动聚焦参数设置有误", true);
  4059. return false;
  4060. }
  4061. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  4062. if (a_param == null)
  4063. {
  4064. LogManager.AddHardwareLog("空参数", true);
  4065. return false;
  4066. }
  4067. string path = a_param.Path;
  4068. if (!Directory.Exists(path))
  4069. {
  4070. LogManager.AddHardwareLog("文件夹丢失", true);
  4071. return false;
  4072. }
  4073. string path_coarse = a_param.Path + "\\Coarse";
  4074. if (!Directory.Exists(path_coarse))
  4075. {
  4076. Directory.CreateDirectory(path_coarse);
  4077. }
  4078. string path_fine = a_param.Path + "\\Fine";
  4079. if (!Directory.Exists(path_fine))
  4080. {
  4081. Directory.CreateDirectory(path_fine);
  4082. }
  4083. //1. 拍照
  4084. //1.1, 粗拍照
  4085. //1.1.1, 根据参数计算拍照次数
  4086. double nUp = a_param.UP * 100.0;
  4087. double nDown = a_param.Down * 100.0;
  4088. double nStep = a_param.Step * 100.0;
  4089. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  4090. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  4091. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  4092. //粗拍照
  4093. for (int i = 0; i < nTimes; i++)
  4094. {
  4095. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  4096. if (a_param.TYPE == 4)
  4097. {
  4098. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4099. }
  4100. else
  4101. {
  4102. LogManager.AddHardwareLog("FIB对焦参数设置有误,对焦类型错", true);
  4103. return false;
  4104. }
  4105. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4106. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4107. int swd = cWd / 100;
  4108. //SendMsg("wd = " + swd.ToString() +"um");
  4109. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4110. arg.Picture_Information.Picture_FullPath = fileName;
  4111. if (!GetImage(fileName))
  4112. {
  4113. return false;
  4114. }
  4115. arg.State = true;
  4116. arg.Message = "FIB自动对焦";
  4117. SendMsg(step_code);
  4118. //判断是否停止进程
  4119. if (key_stop)
  4120. {
  4121. return false;
  4122. }
  4123. //Thread.Sleep(3000);
  4124. }
  4125. //1.2, 选定细拍照的工作距离
  4126. int CorWd;
  4127. ChooseBest(path_coarse, out CorWd);
  4128. a_nWd = CorWd;
  4129. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4130. //1.3, 细拍照
  4131. if ((CorWd - a_param.Range * 100.0) <0)
  4132. {
  4133. return false;
  4134. }
  4135. double nfUp = CorWd - a_param.Range * 100.0;
  4136. double nfStep = a_param.fStep * 100.0;
  4137. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4138. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4139. for (int i = 0; i < nfTimes; i++)
  4140. {
  4141. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4142. if (a_param.TYPE == 4)
  4143. {
  4144. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4145. }
  4146. else
  4147. {
  4148. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4149. return false;
  4150. }
  4151. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4152. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4153. int swd = cWd / 100;
  4154. //SendMsg("wd = " + swd.ToString() + "um");
  4155. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4156. arg.Picture_Information.Picture_FullPath = fileName;
  4157. if (!GetImage(fileName))
  4158. {
  4159. return false;
  4160. }
  4161. arg.State = true;
  4162. arg.Message = "FIB自动对焦";
  4163. SendMsg(step_code);
  4164. //判断是否停止进程
  4165. if (key_stop)
  4166. {
  4167. return false;
  4168. }
  4169. //Thread.Sleep(2000);
  4170. }
  4171. int fineWd;
  4172. ChooseBest(path_fine, out fineWd);
  4173. //SendMsg("wd fine max = " + fineWd.ToString());
  4174. a_nWd = fineWd;
  4175. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4176. return true;
  4177. }
  4178. //LoG算子计算
  4179. private double LoGMean(string a_strImgPath)
  4180. {
  4181. //读入Img文件
  4182. if (!File.Exists(a_strImgPath))
  4183. {
  4184. return 0;
  4185. }
  4186. Mat src, gray_src;
  4187. int kernel_size = 3;
  4188. src = Cv2.ImRead(a_strImgPath);
  4189. gray_src = new Mat();
  4190. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4191. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4192. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4193. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4194. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  4195. Cv2.ConvertScaleAbs(src, src);
  4196. //图像的平均灰度
  4197. double meanValue = 0.0;
  4198. meanValue = Cv2.Mean(src)[0];
  4199. return meanValue;
  4200. }
  4201. //梯度计算
  4202. private double Tenengrad(string a_strImgPath)
  4203. {
  4204. //读入Img文件
  4205. if (!File.Exists(a_strImgPath))
  4206. {
  4207. return 0;
  4208. }
  4209. Mat src;
  4210. src = Cv2.ImRead(a_strImgPath);
  4211. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4212. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4213. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4214. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4215. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  4216. //图像的平均灰度
  4217. double meanValue = 0.0;
  4218. meanValue = Cv2.Mean(src)[0];
  4219. return meanValue;
  4220. }
  4221. //梯度计算
  4222. private double TTgrad(string a_strImgPath)
  4223. {
  4224. //读入Img文件
  4225. if (!File.Exists(a_strImgPath))
  4226. {
  4227. return 0;
  4228. }
  4229. Mat src;
  4230. src = Cv2.ImRead(a_strImgPath);
  4231. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4232. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4233. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4234. Mat scalex = new Mat();
  4235. Mat scaley = new Mat();
  4236. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  4237. Cv2.ConvertScaleAbs(src, scalex);
  4238. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  4239. Cv2.ConvertScaleAbs(src, scaley);
  4240. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  4241. //图像的平均灰度
  4242. double meanValue = 0.0;
  4243. meanValue = Cv2.Mean(src)[0];
  4244. return meanValue;
  4245. }
  4246. //三选二算法
  4247. private bool ChooseBest(string a_strImgPath, out int a_nWd)
  4248. {
  4249. a_nWd = -1;
  4250. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  4251. float[] values = new float[files.Length];
  4252. double smax1 = LoGMean(files[0]);
  4253. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  4254. double smax2 = Tenengrad(files[0]);
  4255. int wdmax2 = wdmax1;
  4256. double smax3 = TTgrad(files[0]);
  4257. int wdmax3 = wdmax1;
  4258. int x = 0;
  4259. foreach (var file in files)
  4260. {
  4261. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  4262. double svalue1 = LoGMean(file);
  4263. double svalue2 = Tenengrad(file);
  4264. double svalue3 = TTgrad(file);
  4265. if (smax1 < svalue1)
  4266. {
  4267. smax1 = svalue1;
  4268. wdmax1 = wd;
  4269. }
  4270. if (smax2 < svalue2)
  4271. {
  4272. smax2 = svalue2;
  4273. wdmax2 = wd;
  4274. }
  4275. if (smax3 < svalue3)
  4276. {
  4277. smax3 = svalue3;
  4278. wdmax3 = wd;
  4279. }
  4280. x++;
  4281. }
  4282. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  4283. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  4284. {
  4285. a_nWd = wdmax1;
  4286. //SendMsg("焦距 = " + wdmax1.ToString());
  4287. }
  4288. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  4289. {
  4290. a_nWd = wdmax2;
  4291. //SendMsg("焦距 = " + wdmax2.ToString());
  4292. }
  4293. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  4294. {
  4295. a_nWd = wdmax3;
  4296. //SendMsg("焦距 = " + wdmax3.ToString());
  4297. }
  4298. else
  4299. {
  4300. //SendMsg("对焦失败。");
  4301. return false;
  4302. }
  4303. return true;
  4304. }
  4305. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  4306. bool MoveToPixByMoveStage(float xc, float yc)
  4307. {
  4308. //单位是m/pix
  4309. float XpixSize = iSEM.GetPixelSize();
  4310. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4311. float YpixSize = iSEM.GetPixelSize();///(float)m_measureFile.MParam.PixelSizeCor);
  4312. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4313. Thread.Sleep(500);
  4314. //0:width, 1:height
  4315. int[] imageSize = iSEM.GetImageStore();
  4316. int width = imageSize[0] / 2;
  4317. int height = imageSize[1] / 2;
  4318. LogManager.AddHardwareLog("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4319. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4320. float deltX = (xc - (float)width) * XpixSize;
  4321. float deltY = (yc - (float)height) * YpixSize;
  4322. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4323. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4324. float xpCur = iSEM.GetStageAtX();
  4325. float ypCur = iSEM.GetStageAtY();
  4326. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4327. float xpNew = xpCur - deltX;
  4328. float ypNew = ypCur + deltY;
  4329. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4330. //计算光束偏移值:
  4331. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  4332. {
  4333. LogManager.AddHardwareLog("X方向移动样品台", true);
  4334. if (!iSEM.SetStageGotoX(xpNew))
  4335. {
  4336. return false;
  4337. }
  4338. //判断是否移动完成
  4339. while (true)
  4340. {
  4341. Thread.Sleep(5000);
  4342. if (iSEM.GetStageIs() == 0)
  4343. {
  4344. break;
  4345. }
  4346. }
  4347. }
  4348. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  4349. {
  4350. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4351. if (!iSEM.SetStageGotoY(ypNew))
  4352. {
  4353. return false;
  4354. }
  4355. //判断是否移动完成
  4356. while (true)
  4357. {
  4358. Thread.Sleep(5000);
  4359. if (iSEM.GetStageIs() == 0)
  4360. {
  4361. break;
  4362. }
  4363. }
  4364. }
  4365. return true;
  4366. }
  4367. //移动到像素位置
  4368. bool MoveToPix(float xc, float yc)
  4369. {
  4370. //单位是m/pix
  4371. float XpixSize = iSEM.GetPixelSize();
  4372. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel",true);
  4373. float YpixSize = (XpixSize/(float)m_measureFile.MParam.PixelSizeCor);
  4374. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4375. Thread.Sleep(200);
  4376. //0:width, 1:height
  4377. int[] imageSize = iSEM.GetImageStore();
  4378. int width = imageSize[0]/2;
  4379. int height = imageSize[1]/2;
  4380. LogManager.AddHardwareLog("目标像素是(" + xc.ToString()+ ","+ yc.ToString() + ")", true);
  4381. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4382. float deltX = (xc - (float)width) * XpixSize;
  4383. float deltY = (yc - (float)height) * YpixSize;
  4384. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4385. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4386. float xpCur = iSEM.GetStageAtX();
  4387. Thread.Sleep(200);
  4388. float ypCur = iSEM.GetStageAtY();
  4389. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString()+ "," + ypCur.ToString() + "),单位m", true);
  4390. float xpNew = xpCur - deltX;
  4391. float ypNew = ypCur + deltY;
  4392. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4393. //计算最大偏移量
  4394. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4395. Thread.Sleep(200);
  4396. iSEM.SetBeamShiftX(100);
  4397. Thread.Sleep(200);
  4398. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4399. Thread.Sleep(200);
  4400. iSEM.SetBeamShiftX(beamXCur);
  4401. Thread.Sleep(200);
  4402. //计算光束偏移值:
  4403. float beamX = iSEM.GetBeamOffsetX();
  4404. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4405. beamX = (-deltX + beamX);
  4406. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4407. if( ((beamX <= beamXMax) && (beamX >=0)) ||
  4408. ((beamX >= -beamXMax)&& (beamX < 0)))
  4409. {
  4410. LogManager.AddHardwareLog("X方向移动光束", true);
  4411. float beamXShift = beamX * 100 / beamXMax;
  4412. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  4413. if (!iSEM.SetBeamShiftX(beamXShift))
  4414. //if (!iSEM.SetBeamOffsetX(beamX))
  4415. {
  4416. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4417. return false;
  4418. }
  4419. }
  4420. else if(deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4421. {
  4422. LogManager.AddHardwareLog("X方向移动样品台", true);
  4423. if (!iSEM.SetStageGotoX(xpNew))
  4424. {
  4425. return false;
  4426. }
  4427. //判断是否移动完成
  4428. while (true)
  4429. {
  4430. Thread.Sleep(4000);
  4431. if (iSEM.GetStageIs() == 0)
  4432. {
  4433. break;
  4434. }
  4435. }
  4436. }
  4437. float beamY = iSEM.GetBeamOffsetY();
  4438. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4439. beamY = (-deltY + beamY);
  4440. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4441. //计算最大偏移量
  4442. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4443. Thread.Sleep(200);
  4444. iSEM.SetBeamShiftY(100);
  4445. Thread.Sleep(200);
  4446. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4447. Thread.Sleep(200);
  4448. iSEM.SetBeamShiftY(beamYCur);
  4449. Thread.Sleep(200);
  4450. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  4451. ((beamY >= -beamYMax) && (beamY < 0)))
  4452. {
  4453. LogManager.AddHardwareLog("Y方向移动光束", true);
  4454. float beamYShift = beamY * 100 / beamYMax;
  4455. LogManager.AddHardwareLog("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  4456. //if(!iSEM.SetBeamOffsetY(beamY))
  4457. if (!iSEM.SetBeamShiftY(beamYShift))
  4458. {
  4459. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4460. return false;
  4461. }
  4462. }
  4463. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4464. {
  4465. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4466. if (!iSEM.SetStageGotoY(ypNew))
  4467. {
  4468. return false;
  4469. }
  4470. //判断是否移动完成
  4471. while (true)
  4472. {
  4473. Thread.Sleep(4000);
  4474. if (iSEM.GetStageIs() == 0)
  4475. {
  4476. break;
  4477. }
  4478. }
  4479. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4480. //arg.State = true;
  4481. //SendMsg("1-7");
  4482. }
  4483. return true;
  4484. }
  4485. //自动亮度对比度调节
  4486. //自动亮度对比度
  4487. public bool AutoBC(String step)
  4488. {
  4489. arg.Message = "自动亮度对比度";
  4490. arg.State = true;
  4491. SendMsg("1-10");
  4492. iSEM.SetAutoBright(100);
  4493. iSEM.SetAutoContrast(100);
  4494. //LogManager.AddHardwareLog("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
  4495. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  4496. {
  4497. LogManager.AddHardwareLog("开始设置自动亮度、对比度失败,程序退出。", true);
  4498. return false;
  4499. }
  4500. Thread.Sleep(5000);
  4501. int i = 0;
  4502. float bright = iSEM.GetBrightness();
  4503. float contrast = iSEM.GetContrast();
  4504. //最多调节30s,30s没调节好,认为调节失败
  4505. for (i = 0; i < 5; i++)
  4506. {
  4507. bright = iSEM.GetBrightness();
  4508. contrast = iSEM.GetContrast();
  4509. if ((bright >= 40 && bright <= 60)
  4510. && (contrast >= 35 && contrast <= 40))
  4511. break;
  4512. Thread.Sleep(5000);
  4513. }
  4514. bright = iSEM.GetBrightness();
  4515. contrast = iSEM.GetContrast();
  4516. if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
  4517. && i == 5)
  4518. {
  4519. LogManager.AddHardwareLog("亮度对比度调节时间过长", true);
  4520. return false;
  4521. }
  4522. iSEM.SetAutoBright(100);
  4523. iSEM.SetAutoContrast(100);
  4524. //LogManager.AddHardwareLog("SEM模式自动亮度目标50,自动对比度目标30.", true);
  4525. return true;
  4526. }
  4527. //执行FIB自动对焦,FIBFocus
  4528. //执行自动消像散
  4529. public bool FIBFocus(String step_code)
  4530. {
  4531. if (m_measureFile.MParam.FocusMode == 1)//手动
  4532. {
  4533. if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  4534. {
  4535. }
  4536. else
  4537. {
  4538. return false;
  4539. }
  4540. }
  4541. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  4542. {
  4543. //郝工增加自动对焦算法
  4544. //处理文件夹
  4545. if (Directory.Exists(FIBfocus_path))
  4546. {
  4547. Directory.Delete(FIBfocus_path, true);
  4548. }
  4549. Thread.Sleep(3000);
  4550. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  4551. Thread.Sleep(1000);
  4552. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  4553. Thread.Sleep(1000);
  4554. //再创建文件夹
  4555. Directory.CreateDirectory(FIBfocus_path);
  4556. //1、对焦参数类,2、输出对焦值
  4557. int FIBFocus = 0;
  4558. //根据当前的stigX重新计算像散值
  4559. float currentFIBFocus = iSEM.GetFIBObjectivePotential();
  4560. //m_measureFile.MParam.FIBFocus.Step = 10; //像散的步长为10
  4561. m_measureFile.MParam.FIBFocus.UP = currentFIBFocus - m_measureFile.MParam.FIBFocus.Step;
  4562. m_measureFile.MParam.FIBFocus.Down = currentFIBFocus + m_measureFile.MParam.FIBFocus.Step;
  4563. LogManager.AddHardwareLog("修改FIB自动对焦参数", true);
  4564. AutoFIBFocus(m_measureFile.MParam.FIBFocus, out FIBFocus, step_code);
  4565. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  4566. //设置工作距离
  4567. iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
  4568. //设置完工作距离后必须延迟5秒
  4569. Thread.Sleep(5000);
  4570. //处理图片位置
  4571. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  4572. }
  4573. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  4574. {
  4575. //后期和客户对接接口
  4576. List<string> filenames = new List<string>();
  4577. String retfilename = wr.Img_Auto_Focus(filenames);
  4578. }
  4579. else //蔡司自动对焦
  4580. {
  4581. iSEM.CmdAutoFocusCoarse();
  4582. while (true)
  4583. {
  4584. Thread.Sleep(10000);
  4585. if (0 == iSEM.GetAutoFunction())
  4586. {
  4587. break;
  4588. }
  4589. }
  4590. iSEM.CmdAutoFocusFine();
  4591. while (true)
  4592. {
  4593. Thread.Sleep(10000);
  4594. if (0 == iSEM.GetAutoFunction())
  4595. {
  4596. break;
  4597. }
  4598. }
  4599. }
  4600. return true;
  4601. }
  4602. /// 图像拉直算法
  4603. /// </summary>
  4604. /// <param name="Slope">倾斜角度</param>
  4605. /// <param name="x0">圆心坐标x</param>
  4606. /// <param name="y0">圆心坐标y</param>
  4607. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  4608. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  4609. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  4610. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  4611. /// <returns></returns>
  4612. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  4613. {
  4614. try
  4615. {
  4616. float xr = x1 - x0;//倾斜图到中心的距离差x
  4617. float yr = y1 - y0;//倾斜图到中心的距离差y
  4618. float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  4619. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  4620. float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
  4621. float k_S = k - Slope;//通过夹角差求x2,y2
  4622. //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  4623. //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  4624. float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
  4625. float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
  4626. if (Slope > 0 || Slope < 0)
  4627. {
  4628. Hx = x0 + x2;
  4629. Hy = y0 + y2;
  4630. }
  4631. else
  4632. {
  4633. Hx = 0;
  4634. Hy = 0;
  4635. }
  4636. return true;
  4637. }
  4638. catch (Exception)
  4639. {
  4640. return false;
  4641. }
  4642. }
  4643. // 放大倍数差校正
  4644. public bool MagComp(float oldMag, float newMag)
  4645. {
  4646. //开启电压校正时进行电压校正
  4647. if (m_measureFile.MParam.MagComp)
  4648. {
  4649. int oldLevel = -1, newLevel = -1;
  4650. float deltX = 0, deltY = 0;
  4651. if (oldMag < m_measureFile.MParam.MagRange1)
  4652. {
  4653. oldLevel = 1;
  4654. }
  4655. else if ((oldMag <= m_measureFile.MParam.MagRange2)
  4656. && (oldMag > m_measureFile.MParam.MagRange1))
  4657. {
  4658. oldLevel = 2;
  4659. }
  4660. else if ((oldMag <= m_measureFile.MParam.MagRange3)
  4661. && (oldMag > m_measureFile.MParam.MagRange2))
  4662. {
  4663. oldLevel = 3;
  4664. }
  4665. else if ((oldMag <= m_measureFile.MParam.MagRange4)
  4666. && (oldMag > m_measureFile.MParam.MagRange3))
  4667. {
  4668. oldLevel = 4;
  4669. }
  4670. if (newMag < m_measureFile.MParam.MagRange1)
  4671. {
  4672. newLevel = 1;
  4673. }
  4674. else if ((newMag <= m_measureFile.MParam.MagRange2)
  4675. && (newMag > m_measureFile.MParam.MagRange1))
  4676. {
  4677. newLevel = 2;
  4678. }
  4679. else if ((newMag <= m_measureFile.MParam.MagRange3)
  4680. && (newMag > m_measureFile.MParam.MagRange2))
  4681. {
  4682. newLevel = 3;
  4683. }
  4684. else if ((newMag <= m_measureFile.MParam.MagRange4)
  4685. && (newMag > m_measureFile.MParam.MagRange3))
  4686. {
  4687. newLevel = 4;
  4688. }
  4689. if (oldLevel != newLevel)
  4690. {
  4691. if (oldLevel == 1)
  4692. {
  4693. switch (newLevel)
  4694. {
  4695. case 1:
  4696. break;
  4697. case 2:
  4698. deltX = m_measureFile.MParam.MagCompX1;
  4699. deltY = m_measureFile.MParam.MagCompY1;
  4700. break;
  4701. case 3:
  4702. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2;
  4703. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2;
  4704. break;
  4705. case 4:
  4706. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4707. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4708. break;
  4709. }
  4710. }
  4711. else if (oldLevel == 2)
  4712. {
  4713. switch (newLevel)
  4714. {
  4715. case 1:
  4716. deltX = -m_measureFile.MParam.MagCompX1;
  4717. deltY = -m_measureFile.MParam.MagCompY1;
  4718. break;
  4719. case 2:
  4720. break;
  4721. case 3:
  4722. deltX = m_measureFile.MParam.MagCompX2;
  4723. deltY = m_measureFile.MParam.MagCompY2;
  4724. break;
  4725. case 4:
  4726. deltX = m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4727. deltY = m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4728. break;
  4729. }
  4730. }
  4731. else if (oldLevel == 3)
  4732. {
  4733. switch (newLevel)
  4734. {
  4735. case 1:
  4736. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2;
  4737. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2;
  4738. break;
  4739. case 2:
  4740. deltX = -m_measureFile.MParam.MagCompX2;
  4741. deltY = -m_measureFile.MParam.MagCompY2;
  4742. break;
  4743. case 3:
  4744. break;
  4745. case 4:
  4746. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4747. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompX3;
  4748. break;
  4749. }
  4750. }
  4751. else if (oldLevel == 4)
  4752. {
  4753. switch (newLevel)
  4754. {
  4755. case 1:
  4756. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4757. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4758. break;
  4759. case 2:
  4760. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4761. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4762. break;
  4763. case 3:
  4764. deltX = -m_measureFile.MParam.MagCompX3;
  4765. deltY = -m_measureFile.MParam.MagCompY3;
  4766. break;
  4767. case 4:
  4768. break;
  4769. }
  4770. }
  4771. //通过移动光束校正便宜量
  4772. //单位是m/pix
  4773. float pixSize = iSEM.GetPixelSize();
  4774. LogManager.AddHardwareLog("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
  4775. Thread.Sleep(500);
  4776. float xpCur = iSEM.GetStageAtX();
  4777. float ypCur = iSEM.GetStageAtY();
  4778. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4779. float xpNew = xpCur - deltX;
  4780. float ypNew = ypCur + deltY;
  4781. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4782. //计算最大偏移量
  4783. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4784. iSEM.SetBeamShiftX(100);
  4785. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4786. iSEM.SetBeamShiftX(beamXCur);
  4787. //计算光束偏移值:
  4788. float beamX = iSEM.GetBeamOffsetX();
  4789. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4790. beamX = (-deltX + beamX);
  4791. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4792. if (beamX < beamXMax || beamX < -beamXMax)
  4793. {
  4794. LogManager.AddHardwareLog("X方向移动光束", true);
  4795. float beamXShift = beamX * 100 / beamXMax;
  4796. if (!iSEM.SetBeamShiftX(beamXShift))
  4797. {
  4798. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4799. return false;
  4800. }
  4801. }
  4802. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4803. {
  4804. LogManager.AddHardwareLog("X方向移动样品台", true);
  4805. if (!iSEM.SetStageGotoX(xpNew))
  4806. {
  4807. return false;
  4808. }
  4809. //判断是否移动完成
  4810. while (true)
  4811. {
  4812. Thread.Sleep(5000);
  4813. if (iSEM.GetStageIs() == 0)
  4814. {
  4815. break;
  4816. }
  4817. }
  4818. }
  4819. float beamY = iSEM.GetBeamOffsetY();
  4820. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4821. beamY = (-deltY + beamY);
  4822. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4823. //计算最大偏移量
  4824. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4825. iSEM.SetBeamShiftY(100);
  4826. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4827. iSEM.SetBeamShiftY(beamYCur);
  4828. if (beamY < beamYMax || beamY < -beamYMax)
  4829. {
  4830. LogManager.AddHardwareLog("Y方向移动光束", true);
  4831. float beamYShift = beamY * 100 / beamYMax;
  4832. if (!iSEM.SetBeamShiftY(beamY))
  4833. {
  4834. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4835. return false;
  4836. }
  4837. }
  4838. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4839. {
  4840. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4841. if (!iSEM.SetStageGotoY(ypNew))
  4842. {
  4843. return false;
  4844. }
  4845. //判断是否移动完成
  4846. while (true)
  4847. {
  4848. Thread.Sleep(5000);
  4849. if (iSEM.GetStageIs() == 0)
  4850. {
  4851. break;
  4852. }
  4853. }
  4854. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4855. //arg.State = true;
  4856. //SendMsg("1-7");
  4857. }
  4858. }
  4859. }
  4860. return true;
  4861. }
  4862. #endregion
  4863. #region 测试程序
  4864. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  4865. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  4866. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  4867. //{
  4868. // SendMsg("拍摄照片完成");
  4869. // //return true;
  4870. //}
  4871. //else
  4872. //{
  4873. // SendMsg("拍摄照片失败");
  4874. // return false;
  4875. //}
  4876. //SendMsg("图像校正36度");
  4877. ////3.设置SEM角度补偿cos36度
  4878. //if (!TiltCorrection(36))
  4879. //{
  4880. // return false;
  4881. //}
  4882. //Thread.Sleep(3000);
  4883. //string fn;
  4884. //用宏抓一般图
  4885. //Thread.Sleep(5000);
  4886. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4887. //SendMsg("用宏抓一般图" + fn);
  4888. //iSEM.CMDMCFFilename(fn);
  4889. ////延时1s??
  4890. //Thread.Sleep(5000);
  4891. ////用宏抓好图
  4892. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  4893. //SendMsg("用宏抓好图" + fn);
  4894. //iSEM.CMDMCFFilename(fn);
  4895. ////延时1s??
  4896. //Thread.Sleep(30000);
  4897. //Thread.Sleep(10000);
  4898. //WorkingFolder = m_measureFile.FilePath;
  4899. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  4900. //SendMsg("SEM拍照存储到" + fileName6);
  4901. //if (!GetImage(ImageMode.SEM, fileName6))
  4902. //{
  4903. // SendMsg("SEM拍照失败");
  4904. // return false;
  4905. //}
  4906. ////用宏抓标志图
  4907. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  4908. //SendMsg("用宏抓标志图" + fn);
  4909. //iSEM.CMDMCFFilename(fn);
  4910. ////延时1s??
  4911. //Thread.Sleep(30000);
  4912. //Thread.Sleep(5000);
  4913. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4914. //SendMsg("用宏抓一般图" + fn);
  4915. //iSEM.CMDMCFFilename(fn);
  4916. ////延时1s??
  4917. //Thread.Sleep(5000);
  4918. //SendMsg("所有图结束");
  4919. ////17.自动控制SEM拍截面照
  4920. //{
  4921. // //1.控制SEM放大到指定参数大小范围,6000x
  4922. // if (!iSEM.SetMagnification(6000))
  4923. // {
  4924. // return false;
  4925. // }
  4926. // //2.控制SEM自动对焦、消像散、亮度、对比度
  4927. // if (!MeasParam.FocusMode)
  4928. // {
  4929. // //弹出手动对焦的窗口
  4930. // }
  4931. // else
  4932. // {
  4933. // //调用自动对焦模块
  4934. // }
  4935. // //3.设置SEM角度补偿cos36度
  4936. // if (!TiltCorrection(36))
  4937. // {
  4938. // return false;
  4939. // }
  4940. // //4.控制SEM拍照
  4941. // //5.保存照片4
  4942. // String fileName5 = WorkingFolder + ImageName5;
  4943. // if (!GetImage(ImageMode.SEM, fileName5))
  4944. // {
  4945. // return false;
  4946. // }
  4947. // //6.将照片传给客户,获取偏移坐标
  4948. // float x6 = 0, y6 = 0;
  4949. // float angle1 = 0;
  4950. // float mage = 10000;
  4951. // //7.根据坐标控制SEM移动到分析位置
  4952. // if (!iSEM.MoveStageXY(x6, y6))
  4953. // {
  4954. // return false;
  4955. // }
  4956. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  4957. // float x7 = iSEM.GetStageAtX();
  4958. // float y7 = iSEM.GetStageAtY();
  4959. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  4960. // {
  4961. // return false;
  4962. // }
  4963. // //9.控制SEM平行校正,并记录校正前初始值
  4964. // float foldAnagle = iSEM.GetScanRotation();
  4965. // if (foldAnagle == float.NaN)
  4966. // {
  4967. // return false;
  4968. // }
  4969. // if (!iSEM.SetScanRotation(angle1))
  4970. // {
  4971. // return false;
  4972. // }
  4973. // //10.控制SEM放大到指定参数大小范围
  4974. // if (!iSEM.SetMagnification(mage))
  4975. // {
  4976. // return false;
  4977. // }
  4978. // //11.控制SEM自动对焦、消像散、亮度、对比度
  4979. // if (!MeasParam.FocusMode)
  4980. // {
  4981. // //弹出手动对焦的窗口
  4982. // }
  4983. // else
  4984. // {
  4985. // //调用自动对焦模块
  4986. // }
  4987. // //12.控制SEM对分析位置拍照
  4988. // String fileName6 = WorkingFolder + ImageName6;
  4989. // if (!GetImage(ImageMode.SEM, fileName6))
  4990. // {
  4991. // return false;
  4992. // }
  4993. // //13.保存照片
  4994. // //14.控制SEM取消电子束校正,回到初始值
  4995. // if (!iSEM.SetScanRotation(foldAnagle))
  4996. // {
  4997. // return false;
  4998. // }
  4999. //}
  5000. ////18.自动层高分析
  5001. //{
  5002. // //1.获取SEM Pixel Size给客户传入参数
  5003. // if (iSEM.GetPixelSize() == float.NaN)
  5004. // {
  5005. // return false;
  5006. // }
  5007. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  5008. //}
  5009. ////19.自动能谱分析
  5010. //{
  5011. // //1. 确定能谱位置
  5012. // //2. 控制牛津打能谱
  5013. // //3. 能谱分析——面扫+线扫描
  5014. //}
  5015. #endregion
  5016. #region 能谱所有参数
  5017. //全局只有一个Extender
  5018. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  5019. IExtenderControl iExtender = factoryExtender.IExtender;
  5020. MeasureDB m_MeasDB = null;
  5021. int m_nXrayId = 0;
  5022. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  5023. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  5024. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  5025. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  5026. /// <summary>
  5027. /// 做能谱分析
  5028. /// </summary>
  5029. /// <param name="a_PointNum">分析点ID,索引号</param>
  5030. /// <param name="PointsName">分析点名称</param>
  5031. /// <param name="num">分析点的位置ID</param>
  5032. /// <returns>成功或失败</returns>
  5033. public bool DoEDS(int a_PointNum, string PointsName, int num)
  5034. {
  5035. try
  5036. {
  5037. //XrayID记录
  5038. LogManager.AddHardwareLog("程序进入EDS测量!", true);
  5039. EDSParam param = m_measureFile.MParam.EDSP;
  5040. double dDwellTime = param.DwellTime;
  5041. int nImageType = param.ImageType;
  5042. double dScanSizes = param.ScanSize;
  5043. LogManager.AddHardwareLog("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  5044. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  5045. string path = EDS_path;
  5046. string edsfn = path + "\\" + num.ToString() + "_" + ImageNameEDS;
  5047. LogManager.AddHardwareLog("EDS_PATH=" + edsfn, true);
  5048. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);
  5049. //送给客户,计算感兴趣的区域
  5050. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  5051. List<System.Drawing.Point> listlines = new List<System.Drawing.Point>();
  5052. List<List<Segment>> listFeature = new List<List<Segment>>();
  5053. List<int> lines_height = new List<int>();
  5054. System.Drawing.Point area_pt = new System.Drawing.Point();
  5055. int width = 1;
  5056. int height = 1;
  5057. //点数据
  5058. int state = 0;
  5059. wr.EDS_Param_Points(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listPoints, out state);
  5060. if (state == 0)
  5061. {
  5062. LogManager.AddHardwareLog("点采集失败", true);
  5063. return false;
  5064. }
  5065. //线数据
  5066. LogManager.AddHardwareLog("线扫描", true);
  5067. state = 0;
  5068. wr.EDS_Param_Lines(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listlines, out lines_height, out state);
  5069. LogManager.AddHardwareLog("线返回数据" + listlines[0].X.ToString() + "," + listlines[0].Y.ToString() + ",lines_height=" + lines_height.Count.ToString(), true);
  5070. if (state == 1)
  5071. {
  5072. //将线转换为segment数据
  5073. LogManager.AddHardwareLog("将线转换为segment数据", true);
  5074. List<Segment> segments = new List<Segment>();
  5075. for (int i = 0; i < listlines.Count; i++)
  5076. {
  5077. for (int j = 0; j <= lines_height[i]; j++)
  5078. {
  5079. Segment segment = new Segment();
  5080. segment.X = listlines[0].X;
  5081. segment.Y = listlines[0].Y + j;
  5082. segment.Length = 1;
  5083. segments.Add(segment);
  5084. }
  5085. listFeature.Add(segments);
  5086. }
  5087. LogManager.AddHardwareLog("将线转换为segment数据完成", true);
  5088. }
  5089. else
  5090. {
  5091. LogManager.AddHardwareLog("线采集失败", true);
  5092. return false;
  5093. }
  5094. //面数据
  5095. state = 0;
  5096. wr.EDS_Param_Areas(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out area_pt, out width, out height, out state);
  5097. LogManager.AddHardwareLog("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  5098. if (state == 1)
  5099. {
  5100. //将面转换为segment数据
  5101. LogManager.AddHardwareLog("将面转换为segment数据", true);
  5102. List<Segment> segments = new List<Segment>();
  5103. for (int j = 0; j <= height; j++)
  5104. {
  5105. Segment segment = new Segment();
  5106. segment.X = area_pt.X;
  5107. segment.Y = area_pt.Y + j;
  5108. segment.Length = width;
  5109. segments.Add(segment);
  5110. }
  5111. listFeature.Add(segments);
  5112. LogManager.AddHardwareLog("将面转换为segment数据完成", true);
  5113. }
  5114. else
  5115. {
  5116. LogManager.AddHardwareLog("面采集失败", true);
  5117. return false;
  5118. }
  5119. //存储数据
  5120. //向分析点数据库更新
  5121. LogManager.AddHardwareLog("listPoints=" + listPoints.Count.ToString() + ",listFeature=" + listFeature.Count.ToString(), true);
  5122. if (!m_MeasDB.InsetAPoint(a_PointNum, PointsName, EDS_path, listPoints.Count, listFeature.Count, num))
  5123. {
  5124. LogManager.AddHardwareLog("插入分析点失败", true);
  5125. }
  5126. LogManager.AddHardwareLog("插入分析点成功", true);
  5127. int AreasNo = 0;
  5128. long[] XrayData = new long[2000];
  5129. Dictionary<string, double> listElement = new Dictionary<string, double>();
  5130. //点采集
  5131. foreach (System.Drawing.Point pt in listPoints)
  5132. {
  5133. XrayData = new long[2000];
  5134. listElement = new Dictionary<string, double>();
  5135. //LogManager.AddHardwareLog("点采集开始", true);
  5136. iExtender.XrayPointCollectiong(param.PointTime, pt.X, pt.Y, out XrayData, out listElement);
  5137. //写入数据库
  5138. m_nXrayId++;
  5139. Boolean ret = m_MeasDB.InsertAPointXay(a_PointNum, m_nXrayId, pt.X, pt.Y, XrayData, listElement, num);
  5140. LogManager.AddHardwareLog("点采集结束,写入数据库开始--" + m_nXrayId.ToString() + "," + ret.ToString(), true);
  5141. //LogManager.AddHardwareLog("点采集写入数据库结束", true);
  5142. if (m_nXrayId % 5 == 0)
  5143. {
  5144. Thread.Sleep(5000);
  5145. }
  5146. else
  5147. {
  5148. Thread.Sleep(1000);
  5149. }
  5150. }
  5151. //面采集
  5152. foreach (List<Segment> listSeg in listFeature)
  5153. {
  5154. XrayData = new long[2000];
  5155. listElement = new Dictionary<string, double>();
  5156. LogManager.AddHardwareLog("面采集开始", true);
  5157. LogManager.AddHardwareLog("AreaTime=" + param.AreaTime.ToString(), true);
  5158. iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement);
  5159. LogManager.AddHardwareLog("面采集结束,写入数据库开始", true);
  5160. //写入数据库
  5161. m_nXrayId++;
  5162. AreasNo++;
  5163. m_MeasDB.InsertAAreaXay(a_PointNum, m_nXrayId, AreasNo, listSeg, XrayData, listElement, num);
  5164. LogManager.AddHardwareLog("面采集写入数据库结束", true);
  5165. }
  5166. }
  5167. catch (Exception e)
  5168. {
  5169. LogManager.AddHardwareLog(e.Message, false);
  5170. }
  5171. return true;
  5172. }
  5173. /// <summary>
  5174. /// 初始化数据库
  5175. /// </summary>
  5176. public void Init_MeasDB()
  5177. {
  5178. m_MeasDB = new MeasureDB(m_measureFile);
  5179. }
  5180. /// <summary>
  5181. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  5182. /// </summary>
  5183. /// <returns></returns>
  5184. public bool EDS_FindCross()
  5185. {
  5186. float x2 = 0, y2 = 0;
  5187. int state = 0;
  5188. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5189. float m_TempBrightness = 50.0f;
  5190. float m_TempContrast = 30.0f;
  5191. if (m_measureFile.MParam.SampleName == "3")
  5192. {
  5193. m_TempBrightness = 48.0f;
  5194. m_TempContrast = 29.0f;
  5195. }
  5196. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5197. iSEM.SetAutoVideoOff();
  5198. Thread.Sleep(200);
  5199. iSEM.SetBrightness(m_TempBrightness);//50.0f
  5200. Thread.Sleep(200);
  5201. iSEM.SetContrast(m_TempContrast);//30.0f
  5202. Thread.Sleep(200);
  5203. //1.控制SEM放大到300倍
  5204. float mag = m_measureFile.MParam.Photograph_Magnification / 3;
  5205. if (mag < 200)
  5206. {
  5207. mag = 200;
  5208. }
  5209. if (!iSEM.SetMagnification(mag))
  5210. {
  5211. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  5212. arg.State = false;
  5213. SendMsg("1-24");
  5214. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5215. return false;
  5216. }
  5217. Thread.Sleep(200);
  5218. float current = iSEM.GetMagnification();
  5219. Thread.Sleep(200);
  5220. while (Math.Abs(current - mag) > 2)
  5221. {
  5222. iSEM.SetMagnification(mag);
  5223. Thread.Sleep(200);
  5224. current = iSEM.GetMagnification();
  5225. Thread.Sleep(200);
  5226. }
  5227. Thread.Sleep(2000);
  5228. //判断是否停止进程
  5229. if (key_stop)
  5230. {
  5231. LogManager.AddHardwareLog("停止键按下", true);
  5232. return false;
  5233. }
  5234. //3.控制SEM拍照
  5235. String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
  5236. arg.Picture_Information.Picture_FullPath = fileName4;
  5237. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5238. Thread.Sleep(200);
  5239. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5240. Thread.Sleep(200);
  5241. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5242. Thread.Sleep(200);
  5243. //拍照前改变速度,延时
  5244. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5245. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5246. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5247. Thread.Sleep(200);
  5248. cycle_time = iSEM.GetCycleTime();
  5249. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5250. if (!GetImage(fileName4))
  5251. {
  5252. //arg.State = false;
  5253. //arg.Message = "SEM拍照找切割位置失败";
  5254. //SendMsg("1-25");
  5255. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5256. return false;
  5257. }
  5258. //arg.Picture_Information.Picture_FullPath = fileName4;
  5259. //arg.State = true;
  5260. //arg.Message = "SEM拍照成功";
  5261. //SendMsg("1-25");
  5262. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5263. Thread.Sleep(200);
  5264. cycle_time = iSEM.GetCycleTime();
  5265. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5266. //判断是否停止进程
  5267. if (key_stop)
  5268. {
  5269. return false;
  5270. }
  5271. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  5272. //5.根据坐标控制SEM移动到切孔位置,居中
  5273. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  5274. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  5275. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  5276. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  5277. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  5278. if (state == 1)
  5279. {
  5280. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  5281. if (!MoveToPixByMoveStage(x2, y2))
  5282. {
  5283. //arg.State = false;
  5284. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  5285. //SendMsg("1-26");
  5286. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5287. return false;
  5288. }
  5289. //判断是否移动完成
  5290. while (true)
  5291. {
  5292. Thread.Sleep(4000);
  5293. if (iSEM.GetStageIs() == 0)
  5294. {
  5295. break;
  5296. }
  5297. }
  5298. //arg.State = true;
  5299. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  5300. //SendMsg("1-26");
  5301. //高倍到低倍不进行对焦
  5302. //拍照前改变速度,延时
  5303. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5304. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5305. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5306. Thread.Sleep(200);
  5307. cycle_time = iSEM.GetCycleTime();
  5308. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5309. if (hand_intervene == 1)
  5310. {
  5311. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5312. }
  5313. }
  5314. else
  5315. {
  5316. arg.Message = "图像接口参数state返回值为零";
  5317. arg.State = false;
  5318. SendMsg("1-26");
  5319. if (hand_intervene == 1)
  5320. {
  5321. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5322. {
  5323. return false;
  5324. }
  5325. }
  5326. else
  5327. {
  5328. return false;
  5329. }
  5330. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5331. return false;
  5332. }
  5333. //判断是否停止进程
  5334. if (key_stop)
  5335. {
  5336. LogManager.AddHardwareLog("停止键按下", true);
  5337. return false;
  5338. }
  5339. return true;
  5340. }
  5341. /// <summary>
  5342. /// 171.能谱第17步找点采集数据
  5343. /// </summary>
  5344. /// <returns></returns>
  5345. public bool EDS_ShotSection()
  5346. {
  5347. int state = 0;
  5348. #region 设置拍照的放大倍数
  5349. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  5350. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5351. {
  5352. //arg.Message = "放大倍数调整失败";
  5353. //arg.State = false;
  5354. //SendMsg("1-27");
  5355. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5356. return false;
  5357. }
  5358. float set = m_measureFile.MParam.Photograph_Magnification;
  5359. float current = iSEM.GetMagnification();
  5360. while (Math.Abs(current - set) > 1)
  5361. {
  5362. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  5363. Thread.Sleep(200);
  5364. current = iSEM.GetMagnification();
  5365. }
  5366. //arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString() + "成功";
  5367. //arg.State = true;
  5368. //SendMsg("1-27");
  5369. Thread.Sleep(3000 + (Int32)cycle_time);
  5370. //判断是否停止进程
  5371. if (key_stop)
  5372. {
  5373. LogManager.AddHardwareLog("停止键按下", true);
  5374. return false;
  5375. }
  5376. #endregion
  5377. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  5378. //2.控制SEM自动对焦、亮度、对比度-接口
  5379. iSEM.SetReduced(402, 128, 340, 256);
  5380. Thread.Sleep(200);
  5381. //add by sun 2020-12-15
  5382. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//iSEM.CmdFocusRate(5);//
  5383. //add by sun 2020-12-15 end
  5384. Thread.Sleep(200);
  5385. cycle_time = iSEM.GetCycleTime();
  5386. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5387. if (!iSEM.SetAutoVideoOff())
  5388. {
  5389. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5390. return false;
  5391. }
  5392. Thread.Sleep(5000);
  5393. if (ImageFocus1(false))
  5394. {
  5395. //arg.Message = "自动对焦完成";
  5396. //arg.State = true;
  5397. //SendMsg("1-28");
  5398. }
  5399. else
  5400. {
  5401. //arg.Message = "自动对焦失败";
  5402. //arg.State = false;
  5403. //SendMsg("1-28");
  5404. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5405. return false;
  5406. }
  5407. iSEM.CloseReduced();
  5408. Thread.Sleep(200);
  5409. cycle_time = iSEM.GetCycleTime();
  5410. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  5411. //判断是否停止进程
  5412. if (key_stop)
  5413. {
  5414. LogManager.AddHardwareLog("停止键按下", true);
  5415. return false;
  5416. }
  5417. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5418. {
  5419. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5420. return false;
  5421. }
  5422. Thread.Sleep(5000);
  5423. //3、设置SEM补偿角度
  5424. if (m_measureFile.MParam.Is_Photograph == false)
  5425. {
  5426. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString() + "度", true);
  5427. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  5428. {
  5429. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  5430. //arg.State = false;
  5431. //SendMsg("1-29");
  5432. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5433. return false;
  5434. }
  5435. //arg.State = true;
  5436. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  5437. //SendMsg("1-29");
  5438. Thread.Sleep(200);
  5439. //判断是否停止进程
  5440. if (key_stop)
  5441. {
  5442. LogManager.AddHardwareLog("停止键按下", false);
  5443. return false;
  5444. }
  5445. }
  5446. //4、拍照,5、保存照片
  5447. String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS5;
  5448. arg.Picture_Information.Picture_FullPath = fileName5;
  5449. arg.Picture_Information.Work_Status = "SEM";
  5450. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5451. Thread.Sleep(200);
  5452. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5453. Thread.Sleep(200);
  5454. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5455. Thread.Sleep(200);
  5456. //拍照前改变速度,延时
  5457. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5458. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5459. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5460. Thread.Sleep(200);
  5461. cycle_time = iSEM.GetCycleTime();
  5462. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  5463. if (!GetImage(fileName5))
  5464. {
  5465. //arg.Message = "SEM拍照失败";
  5466. //arg.State = false;
  5467. //SendMsg("1-30");
  5468. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5469. return false;
  5470. }
  5471. //arg.State = true;
  5472. //arg.Message = "SEM拍照成功";
  5473. //SendMsg("1-30");
  5474. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5475. Thread.Sleep(200);
  5476. cycle_time = iSEM.GetCycleTime();
  5477. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5478. //判断是否停止进程
  5479. if (key_stop)
  5480. {
  5481. LogManager.AddHardwareLog("停止键按下", true);
  5482. return false;
  5483. }
  5484. #endregion
  5485. if (m_measureFile.MParam.Is_Photograph == false)
  5486. {
  5487. #region 对当前矩形进行旋转校正
  5488. //8,计算切割面区域偏移角度及方向
  5489. float degree = 0;
  5490. int direction = 0;
  5491. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  5492. LogManager.AddHardwareLog("测量线程:拍照角度移动,输入图像" + ImageNameEDS5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  5493. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  5494. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  5495. if (state == 1)
  5496. {
  5497. //梯形角度
  5498. iSEM.SetScanRotationOn();
  5499. Thread.Sleep(200);
  5500. //20201128陈工要求,谭博返回角度*0.7
  5501. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  5502. Thread.Sleep(200);
  5503. //arg.State = true;
  5504. //arg.Message = "图像接口返回角度为:" + degree.ToString();
  5505. //SendMsg("1-31");
  5506. if (hand_intervene == 1)
  5507. {
  5508. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5509. }
  5510. }
  5511. else
  5512. {
  5513. //arg.Message = "图像接口参数State返回值为零";
  5514. //arg.State = false;
  5515. //SendMsg("1-31");
  5516. if (hand_intervene == 1)
  5517. {
  5518. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5519. {
  5520. return false;
  5521. }
  5522. }
  5523. else
  5524. {
  5525. //return false;
  5526. }
  5527. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5528. }
  5529. //判断是否停止进程
  5530. if (key_stop)
  5531. {
  5532. LogManager.AddHardwareLog("停止键按下", true);
  5533. return false;
  5534. }
  5535. Thread.Sleep(200);
  5536. //12拍照
  5537. String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS6;
  5538. arg.Picture_Information.Picture_FullPath = fileName6;
  5539. arg.Picture_Information.Work_Status = "SEM";
  5540. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5541. Thread.Sleep(200);
  5542. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5543. Thread.Sleep(200);
  5544. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5545. Thread.Sleep(200);
  5546. //拍照前改变速度,延时
  5547. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5548. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5549. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5550. Thread.Sleep(200);
  5551. cycle_time = iSEM.GetCycleTime();
  5552. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5553. if (!GetImage(fileName6))
  5554. {
  5555. //arg.Message = "SEM拍照失败";
  5556. //arg.State = false;
  5557. //SendMsg("1-33");
  5558. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5559. return false;
  5560. }
  5561. //arg.State = true;
  5562. //arg.Message = "SEM拍照成功";
  5563. //SendMsg("1-33");
  5564. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5565. Thread.Sleep(200);
  5566. cycle_time = iSEM.GetCycleTime();
  5567. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5568. //判断是否停止进程
  5569. if (key_stop)
  5570. {
  5571. LogManager.AddHardwareLog("停止键按下", true);
  5572. return false;
  5573. }
  5574. #endregion
  5575. #region 获取两个位置上及放大倍数
  5576. //计算两个测量区域坐标
  5577. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  5578. List<float> mag = new List<float>();
  5579. System.Drawing.Point ct0;
  5580. float magMax = 0;
  5581. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  5582. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  5583. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  5584. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  5585. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  5586. "输入产品" + m_measureFile.MParam.Firm.ToString()
  5587. + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  5588. + "输出放大倍数1" + mag[0]
  5589. + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  5590. + "输出放大倍数2" + mag[0]
  5591. + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  5592. #endregion
  5593. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  5594. {
  5595. //arg.State = true;
  5596. //arg.Message = "获取位置及放大倍数成功";
  5597. //SendMsg("1-34");
  5598. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  5599. float xs = iSEM.GetBeamShiftX();
  5600. Thread.Sleep(200);
  5601. float ys = iSEM.GetBeamShiftY();
  5602. Thread.Sleep(200);
  5603. float xpCur = iSEM.GetStageAtX();
  5604. Thread.Sleep(200);
  5605. float ypCur = iSEM.GetStageAtY();
  5606. Thread.Sleep(200);
  5607. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  5608. + "y=" + ys.ToString() + ","
  5609. + "原来样品台的位置x= " + xpCur.ToString()
  5610. + "y=" + ypCur.ToString(), true);
  5611. #endregion
  5612. #region 移动到梯形左上角
  5613. //找到放大倍数最大值
  5614. magMax = mag[0];
  5615. for (int m = 1; m < mag.Count; m++)
  5616. {
  5617. if (mag[m] > magMax)
  5618. {
  5619. magMax = mag[m];
  5620. }
  5621. }
  5622. //20201127将视野移动到梯形左上角位置
  5623. MoveToPix(ct0.X, ct0.Y);
  5624. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  5625. + "," + ct0.Y.ToString() + ")", true);
  5626. //关闭自动亮度对比度
  5627. iSEM.SetAutoVideoOff();
  5628. Thread.Sleep(2000);
  5629. iSEM.SetReduced(402, 128, 340, 256);
  5630. Thread.Sleep(200);
  5631. //add by sun 2020-12-15
  5632. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5633. //add by sun 2020-12-15 end
  5634. Thread.Sleep(200);
  5635. cycle_time = iSEM.GetCycleTime();
  5636. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5637. //放大到10000倍
  5638. iSEM.SetMagnification(magMax / 2);
  5639. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5640. set = magMax / 2;
  5641. current = iSEM.GetMagnification();
  5642. while (Math.Abs(current - set) > 1)
  5643. {
  5644. iSEM.SetMagnification(set);
  5645. Thread.Sleep(200);
  5646. current = iSEM.GetMagnification();
  5647. }
  5648. //自动对焦
  5649. if (!ImageFocus1(true))
  5650. {
  5651. return false;
  5652. }
  5653. //放大到10000倍
  5654. iSEM.SetMagnification(magMax);
  5655. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5656. set = magMax;
  5657. current = iSEM.GetMagnification();
  5658. while (Math.Abs(current - set) > 1)
  5659. {
  5660. iSEM.SetMagnification(set);
  5661. Thread.Sleep(200);
  5662. current = iSEM.GetMagnification();
  5663. }
  5664. //自动对焦
  5665. if (!ImageFocus1(true))
  5666. {
  5667. return false;
  5668. }
  5669. iSEM.CloseReduced();
  5670. Thread.Sleep(200);
  5671. cycle_time = iSEM.GetCycleTime();
  5672. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5673. #endregion
  5674. #region 恢复到拍照的状态
  5675. iSEM.SetStageGotoX(xpCur);
  5676. while (true)
  5677. {
  5678. Thread.Sleep(4000);
  5679. if (iSEM.GetStageIs() == 0)
  5680. {
  5681. break;
  5682. }
  5683. }
  5684. iSEM.SetStageGotoY(ypCur);
  5685. while (true)
  5686. {
  5687. Thread.Sleep(4000);
  5688. if (iSEM.GetStageIs() == 0)
  5689. {
  5690. break;
  5691. }
  5692. }
  5693. iSEM.CloseReduced();
  5694. Thread.Sleep(200);
  5695. cycle_time = iSEM.GetCycleTime();
  5696. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5697. //增亮图像
  5698. iSEM.SetAutoVideoOff();
  5699. Thread.Sleep(200);
  5700. float currentBright = iSEM.GetBrightness();
  5701. Thread.Sleep(200);
  5702. float currentContrast = iSEM.GetContrast();
  5703. Thread.Sleep(200);
  5704. iSEM.SetBrightness(currentBright + 2);
  5705. Thread.Sleep(200);
  5706. iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
  5707. Thread.Sleep(200);
  5708. #endregion
  5709. #region 循环拍照
  5710. for (int n = 0; n < ct.Count; n++)
  5711. {
  5712. #region 恢复到拍照的状态
  5713. iSEM.SetStageGotoX(xpCur);
  5714. while (true)
  5715. {
  5716. Thread.Sleep(4000);
  5717. if (iSEM.GetStageIs() == 0)
  5718. {
  5719. break;
  5720. }
  5721. }
  5722. iSEM.SetStageGotoY(ypCur);
  5723. while (true)
  5724. {
  5725. Thread.Sleep(4000);
  5726. if (iSEM.GetStageIs() == 0)
  5727. {
  5728. break;
  5729. }
  5730. }
  5731. //恢复原来的放大倍数
  5732. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5733. {
  5734. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5735. return false;
  5736. }
  5737. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5738. set = m_measureFile.MParam.Photograph_Magnification;
  5739. current = iSEM.GetMagnification();
  5740. while (Math.Abs(current - set) > 1)
  5741. {
  5742. iSEM.SetMagnification(set);
  5743. Thread.Sleep(200);
  5744. current = iSEM.GetMagnification();
  5745. }
  5746. //恢复BeamShift的百分比值
  5747. iSEM.SetBeamShiftX(xs);
  5748. Thread.Sleep(200);
  5749. iSEM.SetBeamShiftY(ys);
  5750. Thread.Sleep(200);
  5751. #endregion
  5752. #region 移动到指定点位置
  5753. if (!MoveToPix(ct[n].X, ct[n].Y))
  5754. {
  5755. arg.State = false;
  5756. arg.Message = "移动到第一个点位置失败";
  5757. SendMsg("1-" + (35 + n).ToString());
  5758. //移动到第一个点失败
  5759. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  5760. }
  5761. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  5762. + "," + ct[n].Y.ToString() + ")", true);
  5763. #endregion
  5764. #region 如果是第一个点,则1W倍对焦
  5765. if (n == 0)
  5766. {
  5767. }
  5768. #endregion
  5769. #region 拍照
  5770. if (!iSEM.SetMagnification(mag[n]))
  5771. {
  5772. arg.State = false;
  5773. arg.Message = "移动到第一个点位置拍照失败";
  5774. SendMsg("1-35");
  5775. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5776. return false;
  5777. }
  5778. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5779. set = mag[n];
  5780. current = iSEM.GetMagnification();
  5781. while (Math.Abs(current - set) > 1)
  5782. {
  5783. iSEM.SetMagnification(set);
  5784. Thread.Sleep(200);
  5785. current = iSEM.GetMagnification();
  5786. }
  5787. DoEDS(m_nWorkHoleNo + 1, cutHoles[m_nWorkHoleNo].HoleName, n + 1);
  5788. #endregion
  5789. }
  5790. #endregion
  5791. if (hand_intervene == 1)
  5792. {
  5793. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5794. }
  5795. }
  5796. else
  5797. {
  5798. if (hand_intervene == 1)
  5799. {
  5800. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5801. {
  5802. // return false;
  5803. }
  5804. }
  5805. else
  5806. {
  5807. //return false;
  5808. }
  5809. //arg.State = false;
  5810. //arg.Message = "获取位置及放大倍数失败";
  5811. //SendMsg("1-34");
  5812. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5813. }
  5814. //判断是否停止进程
  5815. if (key_stop)
  5816. {
  5817. LogManager.AddHardwareLog("停止键按下", true);
  5818. return false;
  5819. }
  5820. }
  5821. //判断是否停止进程
  5822. if (key_stop)
  5823. {
  5824. return false;
  5825. }
  5826. return true;
  5827. }
  5828. /// <summary>
  5829. /// 19.能谱分析
  5830. /// </summary>
  5831. /// <returns></returns>
  5832. public bool EDSAnalysis()
  5833. {
  5834. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  5835. if (m_measureFile.MParam.EDSZ < Z_Min || m_measureFile.MParam.EDSZ > Z_Max)
  5836. {
  5837. LogManager.AddHardwareLog("Z轴位置设置超出范围.", true);
  5838. return false;
  5839. }
  5840. LogManager.AddHardwareLog("将Z轴位置指定到:" + m_measureFile.MParam.EDSZ.ToString(), true);
  5841. if (!iSEM.SetStageGotoZ(m_measureFile.MParam.EDSZ))
  5842. {
  5843. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  5844. return false;
  5845. }
  5846. while (true)
  5847. {
  5848. Thread.Sleep(4000);
  5849. if (iSEM.GetStageIs() == 0)
  5850. {
  5851. break;
  5852. }
  5853. }
  5854. //判断是否停止进程
  5855. if (key_stop)
  5856. {
  5857. LogManager.AddHardwareLog("停止键按下", true);
  5858. return false;
  5859. }
  5860. //2.角度改为54度
  5861. iSEM.SetScanRotationOff();
  5862. Thread.Sleep(200);
  5863. //3.设置电压和电流
  5864. iSEM.SetSEMVoltage(m_measureFile.MParam.EDSV);
  5865. Thread.Sleep(2000);
  5866. iSEM.SetSEMIPROBE(m_measureFile.MParam.EDSA);
  5867. Thread.Sleep(500);
  5868. //4.自动亮度对比度 del by sun 2020-12-17
  5869. //iSEM.SetAutoBright(100);
  5870. //Thread.Sleep(200);
  5871. //iSEM.SetAutoContrast(100);
  5872. //Thread.Sleep(200);
  5873. //if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5874. //{
  5875. // LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  5876. // return false;
  5877. //}
  5878. //Thread.Sleep(5000);
  5879. //del by sun 2020-12-17
  5880. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5881. //关闭自动亮度对比度
  5882. iSEM.SetAutoVideoOff();
  5883. Thread.Sleep(2000);
  5884. float m_TempBrightness = 50f;
  5885. float m_TempContrast = 29f;
  5886. if (m_measureFile.MParam.SampleName == "3")
  5887. {
  5888. m_TempBrightness = 50f;
  5889. m_TempContrast = 29f;
  5890. }
  5891. iSEM.SetBrightness(m_TempBrightness); //50.0f
  5892. Thread.Sleep(200);
  5893. iSEM.SetContrast(m_TempContrast); //30.0f
  5894. Thread.Sleep(5000);
  5895. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5896. //5.自动对焦
  5897. iSEM.SetReduced(256, 192, 512, 512);
  5898. Thread.Sleep(200);
  5899. //add by sun 2020-12-15
  5900. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5901. //add by sun 2020-12-15 end
  5902. Thread.Sleep(200);
  5903. cycle_time = iSEM.GetCycleTime();
  5904. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5905. if (!ImageFocus1(false))
  5906. {
  5907. return false;
  5908. }
  5909. iSEM.CloseReduced();
  5910. Thread.Sleep(200);
  5911. cycle_time = iSEM.GetCycleTime();
  5912. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5913. //6.调用161步过程
  5914. if (!EDS_FindCross())
  5915. {
  5916. return false;
  5917. }
  5918. //7.调用171步过程
  5919. if (!EDS_ShotSection())
  5920. {
  5921. return false;
  5922. }
  5923. return true;
  5924. }
  5925. /// <summary>
  5926. /// 20.光束等复位
  5927. /// </summary>
  5928. public void BeamShiftReset()
  5929. {
  5930. iSEM.SetTiltAngleOff();
  5931. Thread.Sleep(200);
  5932. iSEM.SetScanRotationOff();
  5933. Thread.Sleep(200);
  5934. iSEM.SetBeamShiftX(0);
  5935. Thread.Sleep(200);
  5936. iSEM.SetBeamShiftY(0);
  5937. Thread.Sleep(200);
  5938. }
  5939. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  5940. #region 设置电压电流
  5941. public bool SetVoltageAndIPROBE()
  5942. {
  5943. LogManager.AddHardwareLog("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  5944. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  5945. bool mRet_VoltageFlag = false;
  5946. bool mRet_ElecFlag = false;
  5947. if (m_measureFile.MParam.SampleName != "3")
  5948. {
  5949. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  5950. Thread.Sleep(500);
  5951. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  5952. Thread.Sleep(500);
  5953. }
  5954. else
  5955. {
  5956. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  5957. Thread.Sleep(500);
  5958. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  5959. Thread.Sleep(500);
  5960. }
  5961. if (!mRet_VoltageFlag) return false;
  5962. if (!mRet_ElecFlag) return false;
  5963. LogManager.AddHardwareLog("测量线程:设置电压电流完成!" , true);
  5964. return true;
  5965. }
  5966. #endregion
  5967. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  5968. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  5969. #region 拍照
  5970. public bool GetImageFromSEM(float m_Mag) {
  5971. if (!iSEM.SetMagnification(m_Mag))
  5972. {
  5973. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + m_Mag.ToString() + "失败", false);
  5974. return false;
  5975. }
  5976. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成(一半倍数)!", true);
  5977. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5978. String m_FileName = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_Mag.ToString() + "_0_" + ImageNameTwo_1;
  5979. //arg.Picture_Information.Picture_FullPath = m_FileName;
  5980. //arg.Picture_Information.Work_Status = "SEM";
  5981. //arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5982. //Thread.Sleep(200);
  5983. //arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5984. //Thread.Sleep(200);
  5985. //arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5986. //Thread.Sleep(200);
  5987. //拍照前改变速度,延时
  5988. iSEM.CmdLineScan();
  5989. Thread.Sleep(200);
  5990. cycle_time = iSEM.GetCycleTime();
  5991. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5992. if (!GetImage(m_FileName))
  5993. {
  5994. LogManager.AddHardwareLog("测量线程报错:========" + arg.Message, false);
  5995. return false;
  5996. }
  5997. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  5998. return true;
  5999. }
  6000. #endregion
  6001. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  6002. #endregion
  6003. }
  6004. }