Measure.cs 53 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. public class ThreadStatusEventArgs
  26. {
  27. //状态
  28. public string State
  29. {
  30. get { return m_state; }
  31. set { m_state = value; }
  32. }
  33. private string m_state;
  34. //时间
  35. public DateTime Time
  36. {
  37. get { return m_time; }
  38. set { m_time = value; }
  39. }
  40. private DateTime m_time;
  41. //步骤代码
  42. public String Step_Code
  43. {
  44. get { return step_Code; }
  45. set { step_Code = value; }
  46. }
  47. private String step_Code;
  48. //其他消息
  49. public String Message
  50. {
  51. get { return this.message; }
  52. set { this.message = value; }
  53. }
  54. private String message;
  55. //孔名
  56. public String HoleName
  57. {
  58. get { return this.holeName; }
  59. set { this.holeName = value; }
  60. }
  61. private String holeName;
  62. //图片信息
  63. public class PictureInformation
  64. {
  65. public String Picture_FullPath
  66. {
  67. get { return picture_FullPath; }
  68. set { picture_FullPath = value; }
  69. }
  70. private String picture_FullPath;
  71. public double Work_Voltage
  72. {
  73. get { return work_Voltage; }
  74. set { work_Voltage = value; }
  75. }
  76. private double work_Voltage;
  77. public double Magnification
  78. {
  79. get { return magnification; }
  80. set { magnification = value; }
  81. }
  82. private double magnification;
  83. public double Work_Distance
  84. {
  85. get { return work_Distance; }
  86. set { work_Distance = value; }
  87. }
  88. private double work_Distance;
  89. public String Work_Status
  90. {
  91. get { return work_Status; }
  92. set { work_Status = value; }
  93. }
  94. private String work_Status;
  95. }
  96. //图片信息实例类
  97. public PictureInformation Picture_Information
  98. {
  99. get { return picture_Information; }
  100. set { picture_Information = value; }
  101. }
  102. private PictureInformation picture_Information;
  103. //图像信息
  104. public class ImageInformation
  105. {
  106. public int Method_Name
  107. {
  108. get { return method_Name; }
  109. set { method_Name = value; }
  110. }
  111. private int method_Name;
  112. public Source_Img_Degree_Direction SIDD;
  113. public Cut_Position CP;
  114. public Cut_Success CS;
  115. public Trapezoid_Top_Center_Position TTCP;
  116. public Auto_Foucs AF;
  117. public Auto_Stigmatic AS;
  118. public Center_Position_OffsetAngle_Direction CPOD;
  119. public Measure_Size MS;
  120. public ImageInformation()
  121. {
  122. SIDD = new Source_Img_Degree_Direction();
  123. CP = new Cut_Position();
  124. CS = new Cut_Success();
  125. TTCP = new Trapezoid_Top_Center_Position();
  126. AF = new Auto_Foucs();
  127. AS = new Auto_Stigmatic();
  128. CPOD = new Center_Position_OffsetAngle_Direction();
  129. MS = new Measure_Size();
  130. }
  131. //1-计算原始图像偏移角度及方向
  132. public class Source_Img_Degree_Direction
  133. {
  134. public Boolean Is_Image = false;
  135. public double Degree
  136. {
  137. get { return degree; }
  138. set { degree = value; }
  139. }
  140. private double degree;
  141. public int Direction
  142. {
  143. get { return direction; }
  144. set { direction = value; }
  145. }
  146. private int direction;
  147. public int State
  148. {
  149. get { return state; }
  150. set { state = value; }
  151. }
  152. private int state;
  153. }
  154. //2-计算切割点位置
  155. public class Cut_Position
  156. {
  157. public Boolean Is_Image = false;
  158. public double Offsetx
  159. {
  160. get { return offsetx; }
  161. set { offsetx = value; }
  162. }
  163. private double offsetx;
  164. public double Offsety
  165. {
  166. get { return offsety; }
  167. set { offsety = value; }
  168. }
  169. private double offsety;
  170. public int State
  171. {
  172. get { return state; }
  173. set { state = value; }
  174. }
  175. private int state;
  176. }
  177. //3-是否切割成功
  178. public class Cut_Success
  179. {
  180. public Boolean Is_Image = false;
  181. public int State
  182. {
  183. get { return state; }
  184. set { state = value; }
  185. }
  186. private int state;
  187. }
  188. //4-计算切割后图像梯形区域上边中心点坐标
  189. public class Trapezoid_Top_Center_Position
  190. {
  191. public Boolean Is_Image = false;
  192. public double TopCenterX
  193. {
  194. get { return topCenterX; }
  195. set { topCenterX = value; }
  196. }
  197. private double topCenterX;
  198. public double TopCenterY
  199. {
  200. get { return topCenterY; }
  201. set { topCenterY = value; }
  202. }
  203. private double topCenterY;
  204. public int State
  205. {
  206. get { return state; }
  207. set { state = value; }
  208. }
  209. private int state;
  210. }
  211. //5-自动对焦
  212. public class Auto_Foucs
  213. {
  214. public Boolean Is_Image = true;
  215. public String Img_Path
  216. {
  217. get { return img_Path; }
  218. set { img_Path = value; }
  219. }
  220. private String img_Path;
  221. }
  222. //6-自动像闪
  223. public class Auto_Stigmatic
  224. {
  225. public Boolean Is_Image = true;
  226. public String Img_Path
  227. {
  228. get { return img_Path; }
  229. set { img_Path = value; }
  230. }
  231. private String img_Path;
  232. }
  233. //7-计算切割面区域中心坐标,以及偏移角度及方向
  234. public class Center_Position_OffsetAngle_Direction
  235. {
  236. public Boolean Is_Image = false;
  237. public double CenterX
  238. {
  239. get { return centerX; }
  240. set { centerX = value; }
  241. }
  242. private double centerX;
  243. public double CenterY
  244. {
  245. get { return centerY; }
  246. set { centerY = value; }
  247. }
  248. private double centerY;
  249. public double Degree
  250. {
  251. get { return degree; }
  252. set { degree = value; }
  253. }
  254. private double degree;
  255. public int Direction
  256. {
  257. get { return direction; }
  258. set { direction = value; }
  259. }
  260. private int direction;
  261. public int State
  262. {
  263. get { return state; }
  264. set { state = value; }
  265. }
  266. private int state;
  267. }
  268. //8-测量尺寸
  269. public class Measure_Size
  270. {
  271. public Boolean Is_Image = false;
  272. public int State
  273. {
  274. get { return state; }
  275. set { state = value; }
  276. }
  277. private int state;
  278. }
  279. }
  280. //图像信息实例类
  281. public ImageInformation Image_Information
  282. {
  283. get { return image_Information; }
  284. set { image_Information = value; }
  285. }
  286. private ImageInformation image_Information;
  287. public ThreadStatusEventArgs(string a_State)
  288. {
  289. picture_Information = new PictureInformation();
  290. image_Information = new ImageInformation();
  291. }
  292. }
  293. public class CutHolesStatusEventArgs
  294. {
  295. public string State
  296. {
  297. get { return m_state; }
  298. set { m_state = value; }
  299. }
  300. private string m_state;
  301. public string HoleName
  302. {
  303. get { return m_holeName; }
  304. set { m_holeName = value; }
  305. }
  306. private string m_holeName;
  307. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  308. {
  309. this.m_state = a_state;
  310. this.m_holeName = a_holeName;
  311. }
  312. }
  313. public class Measure
  314. {
  315. /// <summary>
  316. /// 图像拉直算法
  317. /// </summary>
  318. /// <param name="Slope">倾斜角度</param>
  319. /// <param name="x0">圆心坐标x</param>
  320. /// <param name="y0">圆心坐标y</param>
  321. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  322. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  323. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  324. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  325. /// <returns></returns>
  326. public bool Straightening(double Slope, int x0, int y0, int x1, int y1, ref int Hx, ref int Hy)
  327. {
  328. try
  329. {
  330. double xr = x1 - x0;//倾斜图到中心的距离差x
  331. double yr = y1 - y0;//倾斜图到中心的距离差y
  332. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  333. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  334. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  335. double k_S = k - Slope;//通过夹角差求x2,y2
  336. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  337. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  338. if (Slope > 0 || Slope < 0)
  339. {
  340. Hx = x1 - x2;
  341. Hy = y1 - y2;
  342. }
  343. else
  344. {
  345. Hx = 0;
  346. Hy = 0;
  347. }
  348. return true;
  349. }
  350. catch (Exception)
  351. {
  352. return false;
  353. }
  354. }
  355. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  356. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  357. //定义一个全局的消息类
  358. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  359. //全局只有一个fatorySEM
  360. static FactoryHardware factorySEM = FactoryHardware.Instance;
  361. ISEMControl iSEM = factorySEM.ISEM;
  362. //@的作用是不用转义字符\\只打一个就行
  363. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  364. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  365. const String ImageName3 = @"ImageFIB600X2.tif";
  366. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  367. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  368. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  369. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  370. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  371. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  372. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  373. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  374. const String ElyDeposition = @"Deposition.ely"; //沉积
  375. const String ElyCrossSection = @"CrossSection.ely"; //切割
  376. const float fMin = (float)0.0000002; //单位是米
  377. int m_nWorkHoleNo = -1;
  378. //测量文件
  379. private MeasureFile m_measureFile;
  380. public MeasureFile MeasureFile
  381. {
  382. get { return this.m_measureFile; }
  383. set { this.m_measureFile = value; }
  384. }
  385. //测量的切割孔
  386. private List<MeasureData.CutHole> m_cutHoles;
  387. public List<MeasureData.CutHole> cutHoles
  388. {
  389. get { return this.m_cutHoles; }
  390. set { this.m_cutHoles = value; }
  391. }
  392. //工作文件夹
  393. private string m_WorkingFolder;
  394. public string WorkingFolder
  395. {
  396. get { return this.m_WorkingFolder; }
  397. set { this.m_WorkingFolder = value; }
  398. }
  399. //程序当前路径
  400. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  401. //线程状态
  402. private ThreadStatus m_ThreadStatus;
  403. public ThreadStatus TStatus
  404. {
  405. get { return this.m_ThreadStatus; }
  406. set { this.m_ThreadStatus = value; }
  407. }
  408. //测量参数
  409. private MeasureParam m_MsParam;
  410. public MeasureParam MeasParam
  411. {
  412. get { return this.m_MsParam; }
  413. set { this.m_MsParam = value; }
  414. }
  415. //构造函数
  416. public Measure()
  417. {
  418. Init();
  419. }
  420. private void Init()
  421. {
  422. MeasParam = new MeasureParam();
  423. TStatus = new ThreadStatus();
  424. cutHoles = new List<MeasureData.CutHole>();
  425. }
  426. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  427. public bool InitMeas(MeasureFile a_measureFile)
  428. {
  429. m_measureFile = a_measureFile;
  430. List<CutHole> listHoles = m_measureFile.ListCutHole;
  431. foreach (CutHole h in listHoles)
  432. {
  433. if (h.SWITCH == true)
  434. {
  435. m_cutHoles.Add(h);
  436. }
  437. }
  438. if (m_cutHoles.Count == 0)
  439. return false;
  440. this.m_MsParam = m_measureFile.MParam;
  441. return true;
  442. }
  443. public void SendMsg(string step_code)
  444. {
  445. arg.Step_Code = step_code;
  446. arg.Time = DateTime.Now;
  447. switch(step_code)
  448. {
  449. //拍照
  450. case "1-3":
  451. case "1-9":
  452. case "1-16":
  453. case "1-24":
  454. //电压、放大倍数、工作距离、位置信息、图片路径
  455. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  456. arg.Picture_Information.Work_Status = "SEM";
  457. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  458. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  459. break;
  460. case "1-10":
  461. case "1-18":
  462. //获取偏移信息
  463. break;
  464. case "1-12":
  465. case "1-20":
  466. //验证移动准备性
  467. break;
  468. case "1-26":
  469. //取消电子束校正并初始化
  470. break;
  471. default:
  472. arg.State = "1";
  473. break;
  474. }
  475. SendThreadStatus(this, arg);
  476. }
  477. public void SendCutHoleMsg(string a_state, string a_holeName)
  478. {
  479. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  480. arg.HoleName = a_holeName;
  481. arg.State = a_state;
  482. SendCutHolesStatus(this, arg);
  483. }
  484. //测量流程
  485. public void DoMeasure()
  486. {
  487. //创建线程的测量状态的更新
  488. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  489. if (SendThreadStatus != null)
  490. {
  491. SendMsg("开始测量。");
  492. }
  493. //检查硬件连接是否正常
  494. if (!ConnectHardware())
  495. {
  496. SendMsg("连接硬件失败。");
  497. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  498. return;
  499. }
  500. SendMsg("硬件连接成功。");
  501. //设置工作文件夹
  502. if (!SetWorkingFolderStr())
  503. {
  504. SendMsg("设置工作文件夹失败");
  505. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  506. return;
  507. }
  508. SendMsg("创建工作文件路径为" + WorkingFolder);
  509. float[] firstPosition;
  510. for (int i = 0; i < m_cutHoles.Count; i++)
  511. {
  512. m_nWorkHoleNo = i;
  513. arg.HoleName = cutHoles[m_nWorkHoleNo].HoleName;
  514. if (i == 0)
  515. {
  516. SendMsg("第一个切孔开始测量");
  517. //切孔操作-开始
  518. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  519. firstPosition = iSEM.GetStagePosition();
  520. //第一个孔的测试
  521. FirstHole();
  522. //切孔操作-完成
  523. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  524. }
  525. else
  526. {
  527. //非第一个孔的测试
  528. SendMsg("第" + i.ToString() + "个切孔开始测量");
  529. //切孔操作-开始
  530. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  531. OtherHole();
  532. //切孔操作-完成
  533. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  534. }
  535. }
  536. }
  537. //检查硬件连接是否正常
  538. public bool ConnectHardware()
  539. {
  540. //返回硬件的连接状态
  541. return iSEM.ConnectStatus();
  542. }
  543. //设置工作文件夹
  544. public bool SetWorkingFolderStr()
  545. {
  546. WorkingFolder = m_measureFile.FilePath;
  547. return true;
  548. ////获取工作文件路径
  549. //string pathName = m_measureFile.FilePath;
  550. ////判断工作文件路径是否为空或无效
  551. //if (string.IsNullOrEmpty(pathName))
  552. //{
  553. // SendMsg("路径无效");
  554. // return false;
  555. //}
  556. ////文件未保存
  557. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  558. //{
  559. // SendMsg("工程文件未保存");
  560. // return false;
  561. //}
  562. ////获取工作文件所在文件夹
  563. //string folder = System.IO.Path.GetDirectoryName(pathName);
  564. //if (string.IsNullOrEmpty(folder))
  565. //{
  566. // SendMsg("工程文件无效");
  567. // return false;
  568. //}
  569. //WorkingFolder += @"\\";
  570. //LogManager.Init(WorkingFolder);
  571. //return false;
  572. }
  573. //插入PT针
  574. public bool InsertPT()
  575. {
  576. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  577. SendMsg("调用宏插入PT针宏文件" + fn);
  578. iSEM.CMDMCFFilename(fn);
  579. //延时1s??
  580. Thread.Sleep(1000);
  581. return true;
  582. }
  583. //撤出PT针
  584. public bool RetractPT()
  585. {
  586. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  587. SendMsg("调用宏撤出PT针宏文件" + fn);
  588. iSEM.CMDMCFFilename(fn);
  589. //延时1s??
  590. Thread.Sleep(1000);
  591. return true;
  592. }
  593. //PT沉积
  594. public bool PTWork()
  595. {
  596. //执行PT沉积的ELY文件
  597. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  598. SendMsg("执行PT沉积Ely文件:" + fn);
  599. if (!ExcuteEly(fn))
  600. {
  601. return false;
  602. }
  603. //等待沉积完成
  604. while (true)
  605. {
  606. Thread.Sleep(10000);
  607. if (iSEM.GetFIBMode() == 0)
  608. {
  609. break;
  610. }
  611. }
  612. return true;
  613. }
  614. //FIB切割
  615. public bool FIBWork()
  616. {
  617. //执行PT沉积的ELY文件
  618. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  619. SendMsg("执行FIB切割Ely文件:" + fn);
  620. if (!ExcuteEly(fn))
  621. {
  622. return false;
  623. }
  624. //等待切割完成
  625. while (true)
  626. {
  627. Thread.Sleep(10000);
  628. if (iSEM.GetFIBMode() == 0)
  629. {
  630. break;
  631. }
  632. }
  633. return true;
  634. }
  635. public bool ExcuteEly(string a_filename)
  636. {
  637. //执行ELy文件有三个动作
  638. //1. 选择ELY文件
  639. SendMsg("选择ELY文件");
  640. if (!iSEM.CmdFIBLoadELY(a_filename))
  641. {
  642. SendMsg("选择ELY文件失败");
  643. return false;
  644. }
  645. Thread.Sleep(1000);
  646. //2. 确认ELY文件
  647. SendMsg("确认ELY文件");
  648. if (!iSEM.CmdFIBEXPOSUREELY())
  649. {
  650. SendMsg("确认ELY文件失败");
  651. return false;
  652. }
  653. Thread.Sleep(1000);
  654. //3. 执行ELY文件
  655. SendMsg("执行ELY文件");
  656. if (!iSEM.CmdFIBSTARTELY())
  657. {
  658. SendMsg("执行ELY文件失败");
  659. return false;
  660. }
  661. Thread.Sleep(1000);
  662. return true;
  663. }
  664. /// <summary>
  665. ///13. 自动 定位功能
  666. /// </summary>
  667. /// <returns></returns>
  668. public bool GetPoistion()
  669. {
  670. //SendMsg("自动定位");
  671. //13.自动定位切割
  672. {
  673. //1.控制SEM放大600X
  674. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  675. {
  676. return false;
  677. }
  678. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString("0.0") + "倍";
  679. SendMsg("1-1");
  680. //2.控制SEM自动对焦、亮度、对比度
  681. // if (!MeasParam.FocusMode)
  682. {
  683. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  684. {
  685. arg.Message = "自动对焦完成";
  686. SendMsg("1-2");
  687. //return true;
  688. }
  689. else
  690. {
  691. arg.Message = "自动对焦失败";
  692. SendMsg("1-2");
  693. return false;
  694. }
  695. //弹出手动对焦的窗口
  696. }
  697. //else
  698. //{
  699. // //调用自动对焦模块
  700. //}
  701. //3.设置SEM进行角度补偿54度
  702. //if (!TiltCorrection(54))
  703. //{
  704. // SendMsg("设置SEM进行角度补偿54度");
  705. // return false;
  706. //}
  707. //arg.Message = "设置校正54度";
  708. //SendMsg("1-15");
  709. //Thread.Sleep(5000);
  710. //4.控制SEM拍照
  711. //5.保存照片
  712. {
  713. //1. 创建目录,已经完成
  714. //2. 设置图片名称
  715. //3. 保存图片1
  716. WorkingFolder = m_measureFile.FilePath;
  717. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  718. arg.Picture_Information.Picture_FullPath = fileName1;
  719. if (!GetImage(ImageMode.SEM, fileName1))
  720. {
  721. arg.Message = "SEM拍照失败";
  722. SendMsg("1-3");
  723. return false;
  724. }
  725. arg.Message = "SEM拍照成功";
  726. SendMsg("1-3");
  727. Thread.Sleep(3000);
  728. }
  729. //6.设置FIB拍照参数——扫描时间、束流等
  730. //7.控制FIB自动亮度、对比度
  731. SendMsg("切换FIB控制");
  732. if (!iSEM.CmdFIBModeFIB())
  733. {
  734. SendMsg("FIB模式切换失败");
  735. return false;
  736. }
  737. Thread.Sleep(10000);
  738. //8.控制FIB拍照
  739. //9.保存照片
  740. SendMsg("FIB拍照");
  741. {
  742. //1. 设置图片名称
  743. //2. 保存图片2
  744. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  745. if (!GetImage(ImageMode.FIB, fileName2))
  746. {
  747. SendMsg("FIB拍照失败");
  748. return false;
  749. }
  750. Thread.Sleep(3000);
  751. }
  752. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  753. SendMsg("调用识别位置");
  754. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  755. {
  756. SendMsg("移动已完成");
  757. //return true;
  758. }
  759. else
  760. {
  761. SendMsg("移动已失败");
  762. return false;
  763. }
  764. SendMsg("进行PT沉积");
  765. //11.自动工具样品类型参数确定是否需要PT沉积
  766. {
  767. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  768. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  769. //3. 根据坐标进行PT沉积
  770. if (!PTWork())
  771. {
  772. SendMsg("PT沉积失败");
  773. return false;
  774. }
  775. }
  776. return true;
  777. //模拟为客户返回的坐标值
  778. float x0 = 0, y0 = 0;
  779. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  780. //12.根据梯形坐标控制FIB调整到中心位置
  781. if (!iSEM.MoveStageXY(x0, y0))
  782. {
  783. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  784. return false;
  785. }
  786. //电镜移动是有一个延时的操作的?
  787. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  788. float x1 = iSEM.GetStageAtX();
  789. float y1 = iSEM.GetStageAtY();
  790. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  791. {
  792. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  793. return false;
  794. }
  795. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  796. float[] firstPosition = iSEM.GetStagePosition();
  797. //这里要调用文件保存功能
  798. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  799. + firstPosition[1].ToString() + ","
  800. + firstPosition[2].ToString() + ","
  801. + firstPosition[3].ToString() + ","
  802. + firstPosition[4].ToString() + ","
  803. + firstPosition[5].ToString() + ")");
  804. }
  805. return false;
  806. }
  807. /// <summary>
  808. /// 14. FIB切割
  809. /// </summary>
  810. /// <returns></returns>
  811. public bool FIBCross()
  812. {
  813. //14.自动控制FIB切割
  814. {
  815. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  816. //2.控制FIB进行切割
  817. SendMsg("FIB切割");
  818. if (!FIBWork())
  819. {
  820. SendMsg("FIB切割失败");
  821. return false;
  822. }
  823. Thread.Sleep(5000);
  824. //3.控制FIB拍照600X
  825. //4.保存图片
  826. {
  827. //1.设置图片名称
  828. //2.保存图片3
  829. WorkingFolder = m_measureFile.FilePath;
  830. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  831. SendMsg("SEM拍照存储到" + fileName3);
  832. if (!GetImage(ImageMode.FIB, fileName3))
  833. {
  834. SendMsg("FIB拍照失败");
  835. return false;
  836. }
  837. Thread.Sleep(3000);
  838. }
  839. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  840. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  841. }
  842. return true;
  843. }
  844. /// <summary>
  845. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  846. /// </summary>
  847. /// <returns></returns>
  848. public bool FindCross()
  849. {
  850. //16.自动调整SEM找到切割位置
  851. {
  852. //1.控制SEM放大到300倍
  853. if (!iSEM.SetMagnification(300))
  854. {
  855. return false;
  856. }
  857. //2.控制SEM自动对焦、亮度、对比度-接口
  858. if (!MeasParam.FocusMode)
  859. {
  860. //弹出手动对焦的窗口
  861. }
  862. else
  863. {
  864. //调用自动对焦模块
  865. }
  866. Thread.Sleep(5000);
  867. //3.控制SEM拍照
  868. String fileName4 = WorkingFolder + ImageName4;
  869. if (!GetImage(ImageMode.SEM, fileName4))
  870. {
  871. return false;
  872. }
  873. Thread.Sleep(3000);
  874. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  875. float x4 = 0, y4 = 0;
  876. float angle = 0;
  877. //5.根据坐标控制SEM移动到切孔位置,居中
  878. if (!iSEM.MoveStageXY(x4, y4))
  879. {
  880. return false;
  881. }
  882. if (!iSEM.SetScanRotation(angle))
  883. {
  884. return false;
  885. }
  886. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  887. //float x5 = iSEM.GetStageAtX();
  888. //float y5 = iSEM.GetStageAtY();
  889. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  890. //{
  891. // return false;
  892. //}
  893. }
  894. return true;
  895. }
  896. public bool CommonWork()
  897. {
  898. SendMsg("插入PT针");
  899. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  900. //if (firstHole.PT == true)
  901. {
  902. if (!InsertPT())
  903. {
  904. SendMsg("插入PT针失败");
  905. return false;
  906. }
  907. }
  908. //13. 自动 定位功能
  909. SendMsg("自动定位切割位置");
  910. if (!GetPoistion())
  911. {
  912. SendMsg("自动定位切割位置失败");
  913. return false;
  914. }
  915. //14.自动控制FIB切割
  916. SendMsg("FIB切割");
  917. if (!FIBCross())
  918. {
  919. SendMsg("FIB切割失败");
  920. return false;
  921. }
  922. //{
  923. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  924. // //2.控制FIB进行切割
  925. // //3.控制FIB拍照600X
  926. // //4.保存图片
  927. // {
  928. // //1.设置图片名称
  929. // //2.保存图片3
  930. // String fileName3 = WorkingFolder + ImageName3;
  931. // if (!GetImage(ImageMode.FIB, fileName3))
  932. // {
  933. // return false;
  934. // }
  935. // }
  936. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  937. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  938. //}
  939. //15.根据样品类型决定是否撤出PT针
  940. SendMsg("撤出PT针");
  941. //if (firstHole.PT == false)
  942. //{
  943. if (!RetractPT())
  944. {
  945. SendMsg("撤出PT针失败");
  946. return false;
  947. }
  948. //}
  949. // 16.找到切割位置
  950. SendMsg("找到切割位置");
  951. //17.自动控制SEM拍截面照
  952. SendMsg("观测层高");
  953. SendMsg("切换SEM控制");
  954. if (!iSEM.CmdFIBModeSEM())
  955. {
  956. SendMsg("SEM模式切换失败");
  957. return false;
  958. }
  959. Thread.Sleep(10000);
  960. SendMsg("放大6000倍");
  961. if (!iSEM.SetMagnification(6000))
  962. {
  963. SendMsg("放大倍数调整失败");
  964. return false;
  965. }
  966. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  967. {
  968. SendMsg("拍摄照片完成");
  969. //return true;
  970. }
  971. else
  972. {
  973. SendMsg("拍摄照片失败");
  974. return false;
  975. }
  976. SendMsg("图像校正36度");
  977. //3.设置SEM角度补偿cos36度
  978. if (!TiltCorrection(36))
  979. {
  980. return false;
  981. }
  982. Thread.Sleep(3000);
  983. string fn;
  984. //用宏抓一般图
  985. Thread.Sleep(5000);
  986. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  987. SendMsg("用宏抓一般图" + fn);
  988. iSEM.CMDMCFFilename(fn);
  989. //延时1s??
  990. Thread.Sleep(5000);
  991. //用宏抓好图
  992. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  993. SendMsg("用宏抓好图" + fn);
  994. iSEM.CMDMCFFilename(fn);
  995. //延时1s??
  996. Thread.Sleep(30000);
  997. Thread.Sleep(10000);
  998. WorkingFolder = m_measureFile.FilePath;
  999. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1000. SendMsg("SEM拍照存储到" + fileName6);
  1001. if (!GetImage(ImageMode.SEM, fileName6))
  1002. {
  1003. SendMsg("SEM拍照失败");
  1004. return false;
  1005. }
  1006. //用宏抓标志图
  1007. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1008. SendMsg("用宏抓标志图" + fn);
  1009. iSEM.CMDMCFFilename(fn);
  1010. //延时1s??
  1011. Thread.Sleep(30000);
  1012. //恢复简单抓图
  1013. Thread.Sleep(5000);
  1014. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1015. SendMsg("用宏抓一般图" + fn);
  1016. iSEM.CMDMCFFilename(fn);
  1017. SendMsg("所有图结束");
  1018. return true;
  1019. }
  1020. //第一个孔的测试过程
  1021. public bool FirstHole()
  1022. {
  1023. MeasureData.CutHole firstHole = m_cutHoles[0];
  1024. SendMsg("插入PT针");
  1025. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1026. //if (firstHole.PT == true)
  1027. {
  1028. if (!InsertPT())
  1029. {
  1030. SendMsg("插入PT针失败");
  1031. return false;
  1032. }
  1033. }
  1034. //13. 自动 定位功能
  1035. SendMsg("自动定位切割位置");
  1036. if (!GetPoistion())
  1037. {
  1038. SendMsg("自动定位切割位置失败");
  1039. return false;
  1040. }
  1041. //14.自动控制FIB切割
  1042. SendMsg("FIB切割");
  1043. if (!FIBCross())
  1044. {
  1045. SendMsg("FIB切割失败");
  1046. return false;
  1047. }
  1048. //{
  1049. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1050. // //2.控制FIB进行切割
  1051. // //3.控制FIB拍照600X
  1052. // //4.保存图片
  1053. // {
  1054. // //1.设置图片名称
  1055. // //2.保存图片3
  1056. // String fileName3 = WorkingFolder + ImageName3;
  1057. // if (!GetImage(ImageMode.FIB, fileName3))
  1058. // {
  1059. // return false;
  1060. // }
  1061. // }
  1062. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1063. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1064. //}
  1065. //15.根据样品类型决定是否撤出PT针
  1066. SendMsg("撤出PT针");
  1067. //if (firstHole.PT == false)
  1068. //{
  1069. if (!RetractPT())
  1070. {
  1071. SendMsg("撤出PT针失败");
  1072. return false;
  1073. }
  1074. //}
  1075. // 16.找到切割位置
  1076. SendMsg("找到切割位置");
  1077. //17.自动控制SEM拍截面照
  1078. SendMsg("观测层高");
  1079. SendMsg("切换SEM控制");
  1080. if (!iSEM.CmdFIBModeSEM())
  1081. {
  1082. SendMsg("SEM模式切换失败");
  1083. return false;
  1084. }
  1085. Thread.Sleep(10000);
  1086. SendMsg("放大6000倍");
  1087. if (!iSEM.SetMagnification(6000))
  1088. {
  1089. SendMsg("放大倍数调整失败");
  1090. return false;
  1091. }
  1092. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1093. {
  1094. SendMsg("拍摄照片完成");
  1095. //return true;
  1096. }
  1097. else
  1098. {
  1099. SendMsg("拍摄照片失败");
  1100. return false;
  1101. }
  1102. SendMsg("图像校正36度");
  1103. //3.设置SEM角度补偿cos36度
  1104. if (!TiltCorrection(36))
  1105. {
  1106. return false;
  1107. }
  1108. Thread.Sleep(3000);
  1109. string fn;
  1110. //用宏抓一般图
  1111. Thread.Sleep(5000);
  1112. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1113. SendMsg("用宏抓一般图" + fn);
  1114. iSEM.CMDMCFFilename(fn);
  1115. //延时1s??
  1116. Thread.Sleep(5000);
  1117. //用宏抓好图
  1118. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1119. SendMsg("用宏抓好图" + fn);
  1120. iSEM.CMDMCFFilename(fn);
  1121. //延时1s??
  1122. Thread.Sleep(30000);
  1123. Thread.Sleep(10000);
  1124. WorkingFolder = m_measureFile.FilePath;
  1125. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1126. SendMsg("SEM拍照存储到" + fileName6);
  1127. if (!GetImage(ImageMode.SEM, fileName6))
  1128. {
  1129. SendMsg("SEM拍照失败");
  1130. return false;
  1131. }
  1132. //用宏抓标志图
  1133. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1134. SendMsg("用宏抓标志图" + fn);
  1135. iSEM.CMDMCFFilename(fn);
  1136. //延时1s??
  1137. Thread.Sleep(30000);
  1138. Thread.Sleep(5000);
  1139. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1140. SendMsg("用宏抓一般图" + fn);
  1141. iSEM.CMDMCFFilename(fn);
  1142. //延时1s??
  1143. Thread.Sleep(5000);
  1144. SendMsg("所有图结束");
  1145. ////17.自动控制SEM拍截面照
  1146. //{
  1147. // //1.控制SEM放大到指定参数大小范围,6000x
  1148. // if (!iSEM.SetMagnification(6000))
  1149. // {
  1150. // return false;
  1151. // }
  1152. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1153. // if (!MeasParam.FocusMode)
  1154. // {
  1155. // //弹出手动对焦的窗口
  1156. // }
  1157. // else
  1158. // {
  1159. // //调用自动对焦模块
  1160. // }
  1161. // //3.设置SEM角度补偿cos36度
  1162. // if (!TiltCorrection(36))
  1163. // {
  1164. // return false;
  1165. // }
  1166. // //4.控制SEM拍照
  1167. // //5.保存照片4
  1168. // String fileName5 = WorkingFolder + ImageName5;
  1169. // if (!GetImage(ImageMode.SEM, fileName5))
  1170. // {
  1171. // return false;
  1172. // }
  1173. // //6.将照片传给客户,获取偏移坐标
  1174. // float x6 = 0, y6 = 0;
  1175. // float angle1 = 0;
  1176. // float mage = 10000;
  1177. // //7.根据坐标控制SEM移动到分析位置
  1178. // if (!iSEM.MoveStageXY(x6, y6))
  1179. // {
  1180. // return false;
  1181. // }
  1182. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1183. // float x7 = iSEM.GetStageAtX();
  1184. // float y7 = iSEM.GetStageAtY();
  1185. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1186. // {
  1187. // return false;
  1188. // }
  1189. // //9.控制SEM平行校正,并记录校正前初始值
  1190. // float foldAnagle = iSEM.GetScanRotation();
  1191. // if (foldAnagle == float.NaN)
  1192. // {
  1193. // return false;
  1194. // }
  1195. // if (!iSEM.SetScanRotation(angle1))
  1196. // {
  1197. // return false;
  1198. // }
  1199. // //10.控制SEM放大到指定参数大小范围
  1200. // if (!iSEM.SetMagnification(mage))
  1201. // {
  1202. // return false;
  1203. // }
  1204. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1205. // if (!MeasParam.FocusMode)
  1206. // {
  1207. // //弹出手动对焦的窗口
  1208. // }
  1209. // else
  1210. // {
  1211. // //调用自动对焦模块
  1212. // }
  1213. // //12.控制SEM对分析位置拍照
  1214. // String fileName6 = WorkingFolder + ImageName6;
  1215. // if (!GetImage(ImageMode.SEM, fileName6))
  1216. // {
  1217. // return false;
  1218. // }
  1219. // //13.保存照片
  1220. // //14.控制SEM取消电子束校正,回到初始值
  1221. // if (!iSEM.SetScanRotation(foldAnagle))
  1222. // {
  1223. // return false;
  1224. // }
  1225. //}
  1226. ////18.自动层高分析
  1227. //{
  1228. // //1.获取SEM Pixel Size给客户传入参数
  1229. // if (iSEM.GetPixelSize() == float.NaN)
  1230. // {
  1231. // return false;
  1232. // }
  1233. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1234. //}
  1235. ////19.自动能谱分析
  1236. //{
  1237. // //1. 确定能谱位置
  1238. // //2. 控制牛津打能谱
  1239. // //3. 能谱分析——面扫+线扫描
  1240. //}
  1241. return true;
  1242. }
  1243. //非第一个孔的测试过程
  1244. public void OtherHole()
  1245. {
  1246. //for (int i = 1; i < m_cutHoles.Count; i++)
  1247. //{
  1248. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1249. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1250. //1. 初始化
  1251. {
  1252. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1253. //读取图像冻结状态
  1254. float ffrozen = iSEM.GetImageFrozen();
  1255. if (ffrozen == float.NaN)
  1256. {
  1257. return;
  1258. }
  1259. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1260. {
  1261. SendMsg("样品台恢复到水平");
  1262. //return true;
  1263. }
  1264. else
  1265. {
  1266. SendMsg("禁止样品台恢复到水平");
  1267. return;
  1268. }
  1269. //2. 调节样品1号孔的样品台6轴坐标
  1270. //3. 将样品1号孔坐标2存入数据库
  1271. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1272. if (!iSEM.SetStageGotoT(0))
  1273. {
  1274. return;
  1275. }
  1276. while (true)
  1277. {
  1278. Thread.Sleep(10000);
  1279. if (iSEM.GetStageIs() == 0)
  1280. {
  1281. break;
  1282. }
  1283. }
  1284. //5. 获取光镜2号孔XY坐标
  1285. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1286. //6. 根据光镜坐标控制样品台移动
  1287. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1288. {
  1289. SendMsg("移动失败");
  1290. }
  1291. while (true)
  1292. {
  1293. Thread.Sleep(10000);
  1294. if (iSEM.GetStageIs() == 0)
  1295. {
  1296. break;
  1297. }
  1298. }
  1299. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1300. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1301. {
  1302. SendMsg("样品台旋转");
  1303. //return true;
  1304. }
  1305. else
  1306. {
  1307. SendMsg("禁止样品台旋转");
  1308. return;
  1309. }
  1310. if (!iSEM.SetStageGotoT(54))
  1311. {
  1312. return;
  1313. }
  1314. while (true)
  1315. {
  1316. Thread.Sleep(10000);
  1317. if (iSEM.GetStageIs() == 0)
  1318. {
  1319. break;
  1320. }
  1321. }
  1322. }
  1323. SendMsg("拉直操作");
  1324. SendMsg("其他操作与1号孔操作一致");
  1325. if (!CommonWork())
  1326. {
  1327. return;
  1328. }
  1329. //2. 定位切割
  1330. {
  1331. //1. 拉直操作
  1332. {
  1333. //1.1 控制SEM进行拍照
  1334. //1.2 图片传给客户,返回偏移角度
  1335. //1.3 根据返回角度,控制样品台转动
  1336. }
  1337. //2. 与1号孔13步相同
  1338. }
  1339. //3. 以后步骤与1号孔以后步骤一致
  1340. //}
  1341. }
  1342. //角度补偿
  1343. public bool TiltCorrection(float a_fAngle)
  1344. {
  1345. //记录原来电镜的状态
  1346. // bool bTilt = false;
  1347. //float fOldTilt = iSEM.GetTiltCorrection();
  1348. //if (fOldTilt == float.NaN)
  1349. //{
  1350. // return false;
  1351. //}
  1352. //else if (fOldTilt == 1)
  1353. //{
  1354. // bTilt = true;
  1355. //}
  1356. //else if (fOldTilt == 0)
  1357. //{
  1358. // bTilt = false;
  1359. //}
  1360. //float fOldAngle = iSEM.GetTiltAngle();
  1361. //if (fOldAngle == float.NaN)
  1362. //{
  1363. // return false;
  1364. //}
  1365. //开启校正
  1366. SendMsg("开启校正");
  1367. if (!iSEM.SetTiltAngleOn())
  1368. {
  1369. return false;
  1370. }
  1371. //设置校正角度
  1372. //if (!iSEM.SetTiltAngle(fOldAngle))
  1373. //{
  1374. // return false;
  1375. //}
  1376. //恢复原始状态
  1377. SendMsg("校正角度"+ a_fAngle.ToString());
  1378. if (!iSEM.SetTiltAngle(a_fAngle))
  1379. {
  1380. return false;
  1381. }
  1382. //if (bTilt)
  1383. //{
  1384. // if (!iSEM.SetTiltCorrectionOn())
  1385. // {
  1386. // return false;
  1387. // }
  1388. //}
  1389. //else
  1390. //{
  1391. // if (!iSEM.SetTiltCorrectionOff())
  1392. // {
  1393. // return false;
  1394. // }
  1395. //}
  1396. return true;
  1397. }
  1398. //拍图
  1399. public bool GetImage(ImageMode a_mode, String a_fileName)
  1400. {
  1401. //1. 图像解冻
  1402. float foldFrozen = iSEM.GetImageFrozen();
  1403. if (foldFrozen == float.NaN)
  1404. {
  1405. return false;
  1406. }
  1407. if (!iSEM.ImageLive())
  1408. {
  1409. return false;
  1410. }
  1411. //2. 确认图像模式
  1412. if (ImageMode.SEM == a_mode)
  1413. {
  1414. if (!iSEM.CmdFIBModeSEM())
  1415. {
  1416. return false;
  1417. }
  1418. }
  1419. else if (ImageMode.FIB == a_mode)
  1420. {
  1421. if (!iSEM.CmdFIBModeFIB())
  1422. {
  1423. return false;
  1424. }
  1425. }
  1426. else
  1427. {
  1428. return false;
  1429. }
  1430. //3. 获取分辨率
  1431. int[] ImageSize = iSEM.GetImageStore();
  1432. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1433. {
  1434. return false;
  1435. }
  1436. short width = (short)ImageSize[0];
  1437. short height = (short)ImageSize[1];
  1438. //4. 抓图
  1439. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1440. {
  1441. return false;
  1442. }
  1443. //5. 恢复初始状态
  1444. if (foldFrozen == 0)
  1445. {
  1446. if (!iSEM.ImageLive())
  1447. {
  1448. return false;
  1449. }
  1450. }
  1451. else if (foldFrozen == 1)
  1452. {
  1453. if (!iSEM.ImageFrozen())
  1454. {
  1455. return false;
  1456. }
  1457. }
  1458. return true;
  1459. }
  1460. //自动聚焦
  1461. public bool AutoFocus(string a_strPath, out int a_nWd)
  1462. {
  1463. a_nWd = 0;
  1464. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1465. return true;
  1466. }
  1467. }
  1468. }