Measure.cs 51 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. public class ThreadStatusEventArgs
  26. {
  27. //状态
  28. public string State
  29. {
  30. get { return m_state; }
  31. set { m_state = value; }
  32. }
  33. private string m_state;
  34. //时间
  35. public DateTime Time
  36. {
  37. get { return m_time; }
  38. set { m_time = value; }
  39. }
  40. private DateTime m_time;
  41. //步骤代码
  42. public String Step_Code
  43. {
  44. get { return step_Code; }
  45. set { step_Code = value; }
  46. }
  47. private String step_Code;
  48. //其他消息
  49. public String Message
  50. {
  51. get { return this.message; }
  52. set { this.message = value; }
  53. }
  54. private String message;
  55. //孔名
  56. public String HoleName
  57. {
  58. get { return this.holeName; }
  59. set { this.holeName = value; }
  60. }
  61. private String holeName;
  62. //图片信息
  63. public class PictureInformation
  64. {
  65. public String Picture_FullPath
  66. {
  67. get { return picture_FullPath; }
  68. set { picture_FullPath = value; }
  69. }
  70. private String picture_FullPath;
  71. public double Work_Voltage
  72. {
  73. get { return work_Voltage; }
  74. set { work_Voltage = value; }
  75. }
  76. private double work_Voltage;
  77. public double Magnification
  78. {
  79. get { return magnification; }
  80. set { magnification = value; }
  81. }
  82. private double magnification;
  83. public double Work_Distance
  84. {
  85. get { return work_Distance; }
  86. set { work_Distance = value; }
  87. }
  88. private double work_Distance;
  89. public String Work_Status
  90. {
  91. get { return work_Status; }
  92. set { work_Status = value; }
  93. }
  94. private String work_Status;
  95. }
  96. //图片信息实例类
  97. public PictureInformation Picture_Information
  98. {
  99. get { return picture_Information; }
  100. set { picture_Information = value; }
  101. }
  102. private PictureInformation picture_Information;
  103. //图像信息
  104. public class ImageInformation
  105. {
  106. public int Method_Name
  107. {
  108. get { return method_Name; }
  109. set { method_Name = value; }
  110. }
  111. private int method_Name;
  112. public Source_Img_Degree_Direction SIDD;
  113. public Cut_Position CP;
  114. public Cut_Success CS;
  115. public Trapezoid_Top_Center_Position TTCP;
  116. public Auto_Foucs AF;
  117. public Auto_Stigmatic AS;
  118. public Center_Position_OffsetAngle_Direction CPOD;
  119. public Measure_Size MS;
  120. public ImageInformation()
  121. {
  122. SIDD = new Source_Img_Degree_Direction();
  123. CP = new Cut_Position();
  124. CS = new Cut_Success();
  125. TTCP = new Trapezoid_Top_Center_Position();
  126. AF = new Auto_Foucs();
  127. AS = new Auto_Stigmatic();
  128. CPOD = new Center_Position_OffsetAngle_Direction();
  129. MS = new Measure_Size();
  130. }
  131. //1-计算原始图像偏移角度及方向
  132. public class Source_Img_Degree_Direction
  133. {
  134. public Boolean Is_Image = false;
  135. public double Degree
  136. {
  137. get { return degree; }
  138. set { degree = value; }
  139. }
  140. private double degree;
  141. public int Direction
  142. {
  143. get { return direction; }
  144. set { direction = value; }
  145. }
  146. private int direction;
  147. public int State
  148. {
  149. get { return state; }
  150. set { state = value; }
  151. }
  152. private int state;
  153. }
  154. //2-计算切割点位置
  155. public class Cut_Position
  156. {
  157. public Boolean Is_Image = false;
  158. public double Offsetx
  159. {
  160. get { return offsetx; }
  161. set { offsetx = value; }
  162. }
  163. private double offsetx;
  164. public double Offsety
  165. {
  166. get { return offsety; }
  167. set { offsety = value; }
  168. }
  169. private double offsety;
  170. public int State
  171. {
  172. get { return state; }
  173. set { state = value; }
  174. }
  175. private int state;
  176. }
  177. //3-是否切割成功
  178. public class Cut_Success
  179. {
  180. public Boolean Is_Image = false;
  181. public int State
  182. {
  183. get { return state; }
  184. set { state = value; }
  185. }
  186. private int state;
  187. }
  188. //4-计算切割后图像梯形区域上边中心点坐标
  189. public class Trapezoid_Top_Center_Position
  190. {
  191. public Boolean Is_Image = false;
  192. public double TopCenterX
  193. {
  194. get { return topCenterX; }
  195. set { topCenterX = value; }
  196. }
  197. private double topCenterX;
  198. public double TopCenterY
  199. {
  200. get { return topCenterY; }
  201. set { topCenterY = value; }
  202. }
  203. private double topCenterY;
  204. public int State
  205. {
  206. get { return state; }
  207. set { state = value; }
  208. }
  209. private int state;
  210. }
  211. //5-自动对焦
  212. public class Auto_Foucs
  213. {
  214. public Boolean Is_Image = true;
  215. public String Img_Path
  216. {
  217. get { return img_Path; }
  218. set { img_Path = value; }
  219. }
  220. private String img_Path;
  221. }
  222. //6-自动像闪
  223. public class Auto_Stigmatic
  224. {
  225. public Boolean Is_Image = true;
  226. public String Img_Path
  227. {
  228. get { return img_Path; }
  229. set { img_Path = value; }
  230. }
  231. private String img_Path;
  232. }
  233. //7-计算切割面区域中心坐标,以及偏移角度及方向
  234. public class Center_Position_OffsetAngle_Direction
  235. {
  236. public Boolean Is_Image = false;
  237. public double CenterX
  238. {
  239. get { return centerX; }
  240. set { centerX = value; }
  241. }
  242. private double centerX;
  243. public double CenterY
  244. {
  245. get { return centerY; }
  246. set { centerY = value; }
  247. }
  248. private double centerY;
  249. public double Degree
  250. {
  251. get { return degree; }
  252. set { degree = value; }
  253. }
  254. private double degree;
  255. public int Direction
  256. {
  257. get { return direction; }
  258. set { direction = value; }
  259. }
  260. private int direction;
  261. public int State
  262. {
  263. get { return state; }
  264. set { state = value; }
  265. }
  266. private int state;
  267. }
  268. //8-测量尺寸
  269. public class Measure_Size
  270. {
  271. public Boolean Is_Image = false;
  272. public int State
  273. {
  274. get { return state; }
  275. set { state = value; }
  276. }
  277. private int state;
  278. }
  279. }
  280. //图像信息实例类
  281. public ImageInformation Image_Information
  282. {
  283. get { return image_Information; }
  284. set { image_Information = value; }
  285. }
  286. private ImageInformation image_Information;
  287. public ThreadStatusEventArgs(string a_State)
  288. {
  289. this.m_state = a_State;
  290. picture_Information = new PictureInformation();
  291. image_Information = new ImageInformation();
  292. }
  293. }
  294. public class CutHolesStatusEventArgs
  295. {
  296. public string State
  297. {
  298. get { return m_state; }
  299. set { m_state = value; }
  300. }
  301. private string m_state;
  302. public string HoleName
  303. {
  304. get { return m_holeName; }
  305. set { m_holeName = value; }
  306. }
  307. private string m_holeName;
  308. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  309. {
  310. this.m_state = a_state;
  311. this.m_holeName = a_holeName;
  312. }
  313. }
  314. public class Measure
  315. {
  316. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  317. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  318. //全局只有一个fatorySEM
  319. static FactoryHardware factorySEM = FactoryHardware.Instance;
  320. ISEMControl iSEM = factorySEM.ISEM;
  321. //@的作用是不用转义字符\\只打一个就行
  322. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  323. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  324. const String ImageName3 = @"ImageFIB600X2.tif";
  325. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  326. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  327. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  328. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  329. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  330. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  331. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  332. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  333. const String ElyDeposition = @"Deposition.ely"; //沉积
  334. const String ElyCrossSection = @"CrossSection.ely"; //切割
  335. const float fMin = (float)0.0000002; //单位是米
  336. int m_nWorkHoleNo = -1;
  337. //测量文件
  338. private MeasureFile m_measureFile;
  339. public MeasureFile MeasureFile
  340. {
  341. get { return this.m_measureFile; }
  342. set { this.m_measureFile = value; }
  343. }
  344. //测量的切割孔
  345. private List<MeasureData.CutHole> m_cutHoles;
  346. public List<MeasureData.CutHole> cutHoles
  347. {
  348. get { return this.m_cutHoles; }
  349. set { this.m_cutHoles = value; }
  350. }
  351. //工作文件夹
  352. private string m_WorkingFolder;
  353. public string WorkingFolder
  354. {
  355. get { return this.m_WorkingFolder; }
  356. set { this.m_WorkingFolder = value; }
  357. }
  358. //程序当前路径
  359. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  360. //线程状态
  361. private ThreadStatus m_ThreadStatus;
  362. public ThreadStatus TStatus
  363. {
  364. get { return this.m_ThreadStatus; }
  365. set { this.m_ThreadStatus = value; }
  366. }
  367. //测量参数
  368. private MeasureParam m_MsParam;
  369. public MeasureParam MeasParam
  370. {
  371. get { return this.m_MsParam; }
  372. set { this.m_MsParam = value; }
  373. }
  374. //构造函数
  375. public Measure()
  376. {
  377. Init();
  378. }
  379. private void Init()
  380. {
  381. MeasParam = new MeasureParam();
  382. TStatus = new ThreadStatus();
  383. cutHoles = new List<MeasureData.CutHole>();
  384. }
  385. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  386. public bool InitMeas(MeasureFile a_measureFile)
  387. {
  388. m_measureFile = a_measureFile;
  389. List<CutHole> listHoles = m_measureFile.ListCutHole;
  390. foreach (CutHole h in listHoles)
  391. {
  392. if (h.SWITCH == true)
  393. {
  394. m_cutHoles.Add(h);
  395. }
  396. }
  397. if (m_cutHoles.Count == 0)
  398. return false;
  399. this.m_MsParam = m_measureFile.MParam;
  400. return true;
  401. }
  402. public void SendMsg(string step_code)
  403. {
  404. ThreadStatusEventArgs arg = new ThreadStatusEventArgs(step_code);
  405. arg.Time = DateTime.Now;
  406. switch(step_code)
  407. {
  408. //拍照
  409. case "1-3":
  410. case "1-9":
  411. case "1-16":
  412. case "1-24":
  413. //电压、放大倍数、工作距离、位置信息、图片路径
  414. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  415. arg.Picture_Information.Work_Status = "SEM";
  416. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  417. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  418. break;
  419. case "1-10":
  420. case "1-18":
  421. //获取偏移信息
  422. break;
  423. case "1-12":
  424. case "1-20":
  425. //验证移动准备性
  426. break;
  427. case "1-26":
  428. //取消电子束校正并初始化
  429. break;
  430. default:
  431. arg.Step_Code = "0-0";
  432. arg.Message = step_code;
  433. break;
  434. }
  435. SendThreadStatus(this, arg);
  436. }
  437. public void SendCutHoleMsg(string a_state, string a_holeName)
  438. {
  439. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  440. arg.HoleName = a_holeName;
  441. arg.State = a_state;
  442. SendCutHolesStatus(this, arg);
  443. }
  444. //测量流程
  445. public void DoMeasure()
  446. {
  447. //创建线程的测量状态的更新
  448. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  449. if (SendThreadStatus != null)
  450. {
  451. SendMsg("开始测量。");
  452. }
  453. //检查硬件连接是否正常
  454. if (!ConnectHardware())
  455. {
  456. SendMsg("连接硬件失败。");
  457. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  458. return;
  459. }
  460. SendMsg("硬件连接成功。");
  461. //设置工作文件夹
  462. if (!SetWorkingFolderStr())
  463. {
  464. SendMsg("设置工作文件夹失败");
  465. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  466. return;
  467. }
  468. SendMsg("创建工作文件路径为" + WorkingFolder);
  469. float[] firstPosition;
  470. for (int i = 0; i < m_cutHoles.Count; i++)
  471. {
  472. m_nWorkHoleNo = i;
  473. if (i == 0)
  474. {
  475. SendMsg("第一个切孔开始测量");
  476. //切孔操作-开始
  477. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  478. firstPosition = iSEM.GetStagePosition();
  479. //第一个孔的测试
  480. FirstHole();
  481. //切孔操作-完成
  482. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  483. }
  484. else
  485. {
  486. //非第一个孔的测试
  487. SendMsg("第" + i.ToString() + "个切孔开始测量");
  488. //切孔操作-开始
  489. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  490. OtherHole();
  491. //切孔操作-完成
  492. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  493. }
  494. }
  495. }
  496. //检查硬件连接是否正常
  497. public bool ConnectHardware()
  498. {
  499. //返回硬件的连接状态
  500. return iSEM.ConnectStatus();
  501. }
  502. //设置工作文件夹
  503. public bool SetWorkingFolderStr()
  504. {
  505. WorkingFolder = m_measureFile.FilePath;
  506. return true;
  507. ////获取工作文件路径
  508. //string pathName = m_measureFile.FilePath;
  509. ////判断工作文件路径是否为空或无效
  510. //if (string.IsNullOrEmpty(pathName))
  511. //{
  512. // SendMsg("路径无效");
  513. // return false;
  514. //}
  515. ////文件未保存
  516. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  517. //{
  518. // SendMsg("工程文件未保存");
  519. // return false;
  520. //}
  521. ////获取工作文件所在文件夹
  522. //string folder = System.IO.Path.GetDirectoryName(pathName);
  523. //if (string.IsNullOrEmpty(folder))
  524. //{
  525. // SendMsg("工程文件无效");
  526. // return false;
  527. //}
  528. //WorkingFolder += @"\\";
  529. //LogManager.Init(WorkingFolder);
  530. //return false;
  531. }
  532. //插入PT针
  533. public bool InsertPT()
  534. {
  535. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  536. SendMsg("调用宏插入PT针宏文件" + fn);
  537. iSEM.CMDMCFFilename(fn);
  538. //延时1s??
  539. Thread.Sleep(1000);
  540. return true;
  541. }
  542. //撤出PT针
  543. public bool RetractPT()
  544. {
  545. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  546. SendMsg("调用宏撤出PT针宏文件" + fn);
  547. iSEM.CMDMCFFilename(fn);
  548. //延时1s??
  549. Thread.Sleep(1000);
  550. return true;
  551. }
  552. //PT沉积
  553. public bool PTWork()
  554. {
  555. //执行PT沉积的ELY文件
  556. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  557. SendMsg("执行PT沉积Ely文件:" + fn);
  558. if (!ExcuteEly(fn))
  559. {
  560. return false;
  561. }
  562. //等待沉积完成
  563. while (true)
  564. {
  565. Thread.Sleep(10000);
  566. if (iSEM.GetFIBMode() == 0)
  567. {
  568. break;
  569. }
  570. }
  571. return true;
  572. }
  573. //FIB切割
  574. public bool FIBWork()
  575. {
  576. //执行PT沉积的ELY文件
  577. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  578. SendMsg("执行FIB切割Ely文件:" + fn);
  579. if (!ExcuteEly(fn))
  580. {
  581. return false;
  582. }
  583. //等待切割完成
  584. while (true)
  585. {
  586. Thread.Sleep(10000);
  587. if (iSEM.GetFIBMode() == 0)
  588. {
  589. break;
  590. }
  591. }
  592. return true;
  593. }
  594. public bool ExcuteEly(string a_filename)
  595. {
  596. //执行ELy文件有三个动作
  597. //1. 选择ELY文件
  598. SendMsg("选择ELY文件");
  599. if (!iSEM.CmdFIBLoadELY(a_filename))
  600. {
  601. SendMsg("选择ELY文件失败");
  602. return false;
  603. }
  604. Thread.Sleep(1000);
  605. //2. 确认ELY文件
  606. SendMsg("确认ELY文件");
  607. if (!iSEM.CmdFIBEXPOSUREELY())
  608. {
  609. SendMsg("确认ELY文件失败");
  610. return false;
  611. }
  612. Thread.Sleep(1000);
  613. //3. 执行ELY文件
  614. SendMsg("执行ELY文件");
  615. if (!iSEM.CmdFIBSTARTELY())
  616. {
  617. SendMsg("执行ELY文件失败");
  618. return false;
  619. }
  620. Thread.Sleep(1000);
  621. return true;
  622. }
  623. /// <summary>
  624. ///13. 自动 定位功能
  625. /// </summary>
  626. /// <returns></returns>
  627. public bool GetPoistion()
  628. {
  629. SendMsg("自动定位");
  630. //13.自动定位切割
  631. {
  632. SendMsg("放大600倍");
  633. //1.控制SEM放大600X
  634. if (!iSEM.SetMagnification(600))
  635. {
  636. return false;
  637. }
  638. //2.控制SEM自动对焦、亮度、对比度
  639. // if (!MeasParam.FocusMode)
  640. {
  641. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  642. {
  643. SendMsg("拍摄照片完成");
  644. //return true;
  645. }
  646. else
  647. {
  648. SendMsg("拍摄照片失败");
  649. return false;
  650. }
  651. //弹出手动对焦的窗口
  652. }
  653. //else
  654. //{
  655. // //调用自动对焦模块
  656. //}
  657. //3.设置SEM进行角度补偿54度
  658. SendMsg("设置校正54度");
  659. if (!TiltCorrection(54))
  660. {
  661. SendMsg("设置SEM进行角度补偿54度");
  662. return false;
  663. }
  664. Thread.Sleep(5000);
  665. //4.控制SEM拍照
  666. SendMsg("SEM拍照");
  667. //5.保存照片
  668. {
  669. //1. 创建目录,已经完成
  670. //2. 设置图片名称
  671. //3. 保存图片1
  672. WorkingFolder = m_measureFile.FilePath;
  673. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  674. SendMsg("SEM拍照存储到" + fileName1);
  675. if (!GetImage(ImageMode.SEM, fileName1))
  676. {
  677. SendMsg("SEM拍照失败");
  678. return false;
  679. }
  680. Thread.Sleep(3000);
  681. }
  682. //6.设置FIB拍照参数——扫描时间、束流等
  683. //7.控制FIB自动亮度、对比度
  684. SendMsg("切换FIB控制");
  685. if (!iSEM.CmdFIBModeFIB())
  686. {
  687. SendMsg("FIB模式切换失败");
  688. return false;
  689. }
  690. Thread.Sleep(10000);
  691. //8.控制FIB拍照
  692. //9.保存照片
  693. SendMsg("FIB拍照");
  694. {
  695. //1. 设置图片名称
  696. //2. 保存图片2
  697. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  698. if (!GetImage(ImageMode.FIB, fileName2))
  699. {
  700. SendMsg("FIB拍照失败");
  701. return false;
  702. }
  703. Thread.Sleep(3000);
  704. }
  705. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  706. SendMsg("调用识别位置");
  707. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  708. {
  709. SendMsg("移动已完成");
  710. //return true;
  711. }
  712. else
  713. {
  714. SendMsg("移动已失败");
  715. return false;
  716. }
  717. SendMsg("进行PT沉积");
  718. //11.自动工具样品类型参数确定是否需要PT沉积
  719. {
  720. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  721. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  722. //3. 根据坐标进行PT沉积
  723. if (!PTWork())
  724. {
  725. SendMsg("PT沉积失败");
  726. return false;
  727. }
  728. }
  729. return true;
  730. //模拟为客户返回的坐标值
  731. float x0 = 0, y0 = 0;
  732. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  733. //12.根据梯形坐标控制FIB调整到中心位置
  734. if (!iSEM.MoveStageXY(x0, y0))
  735. {
  736. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  737. return false;
  738. }
  739. //电镜移动是有一个延时的操作的?
  740. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  741. float x1 = iSEM.GetStageAtX();
  742. float y1 = iSEM.GetStageAtY();
  743. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  744. {
  745. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  746. return false;
  747. }
  748. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  749. float[] firstPosition = iSEM.GetStagePosition();
  750. //这里要调用文件保存功能
  751. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  752. + firstPosition[1].ToString() + ","
  753. + firstPosition[2].ToString() + ","
  754. + firstPosition[3].ToString() + ","
  755. + firstPosition[4].ToString() + ","
  756. + firstPosition[5].ToString() + ")");
  757. }
  758. return false;
  759. }
  760. /// <summary>
  761. /// 14. FIB切割
  762. /// </summary>
  763. /// <returns></returns>
  764. public bool FIBCross()
  765. {
  766. //14.自动控制FIB切割
  767. {
  768. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  769. //2.控制FIB进行切割
  770. SendMsg("FIB切割");
  771. if (!FIBWork())
  772. {
  773. SendMsg("FIB切割失败");
  774. return false;
  775. }
  776. Thread.Sleep(5000);
  777. //3.控制FIB拍照600X
  778. //4.保存图片
  779. {
  780. //1.设置图片名称
  781. //2.保存图片3
  782. WorkingFolder = m_measureFile.FilePath;
  783. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  784. SendMsg("SEM拍照存储到" + fileName3);
  785. if (!GetImage(ImageMode.FIB, fileName3))
  786. {
  787. SendMsg("FIB拍照失败");
  788. return false;
  789. }
  790. Thread.Sleep(3000);
  791. }
  792. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  793. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  794. }
  795. return true;
  796. }
  797. /// <summary>
  798. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  799. /// </summary>
  800. /// <returns></returns>
  801. public bool FindCross()
  802. {
  803. //16.自动调整SEM找到切割位置
  804. {
  805. //1.控制SEM放大到300倍
  806. if (!iSEM.SetMagnification(300))
  807. {
  808. return false;
  809. }
  810. //2.控制SEM自动对焦、亮度、对比度-接口
  811. if (!MeasParam.FocusMode)
  812. {
  813. //弹出手动对焦的窗口
  814. }
  815. else
  816. {
  817. //调用自动对焦模块
  818. }
  819. Thread.Sleep(5000);
  820. //3.控制SEM拍照
  821. String fileName4 = WorkingFolder + ImageName4;
  822. if (!GetImage(ImageMode.SEM, fileName4))
  823. {
  824. return false;
  825. }
  826. Thread.Sleep(3000);
  827. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  828. float x4 = 0, y4 = 0;
  829. float angle = 0;
  830. //5.根据坐标控制SEM移动到切孔位置,居中
  831. if (!iSEM.MoveStageXY(x4, y4))
  832. {
  833. return false;
  834. }
  835. if (!iSEM.SetScanRotation(angle))
  836. {
  837. return false;
  838. }
  839. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  840. //float x5 = iSEM.GetStageAtX();
  841. //float y5 = iSEM.GetStageAtY();
  842. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  843. //{
  844. // return false;
  845. //}
  846. }
  847. return true;
  848. }
  849. public bool CommonWork()
  850. {
  851. SendMsg("插入PT针");
  852. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  853. //if (firstHole.PT == true)
  854. {
  855. if (!InsertPT())
  856. {
  857. SendMsg("插入PT针失败");
  858. return false;
  859. }
  860. }
  861. //13. 自动 定位功能
  862. SendMsg("自动定位切割位置");
  863. if (!GetPoistion())
  864. {
  865. SendMsg("自动定位切割位置失败");
  866. return false;
  867. }
  868. //14.自动控制FIB切割
  869. SendMsg("FIB切割");
  870. if (!FIBCross())
  871. {
  872. SendMsg("FIB切割失败");
  873. return false;
  874. }
  875. //{
  876. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  877. // //2.控制FIB进行切割
  878. // //3.控制FIB拍照600X
  879. // //4.保存图片
  880. // {
  881. // //1.设置图片名称
  882. // //2.保存图片3
  883. // String fileName3 = WorkingFolder + ImageName3;
  884. // if (!GetImage(ImageMode.FIB, fileName3))
  885. // {
  886. // return false;
  887. // }
  888. // }
  889. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  890. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  891. //}
  892. //15.根据样品类型决定是否撤出PT针
  893. SendMsg("撤出PT针");
  894. //if (firstHole.PT == false)
  895. //{
  896. if (!RetractPT())
  897. {
  898. SendMsg("撤出PT针失败");
  899. return false;
  900. }
  901. //}
  902. // 16.找到切割位置
  903. SendMsg("找到切割位置");
  904. //17.自动控制SEM拍截面照
  905. SendMsg("观测层高");
  906. SendMsg("切换SEM控制");
  907. if (!iSEM.CmdFIBModeSEM())
  908. {
  909. SendMsg("SEM模式切换失败");
  910. return false;
  911. }
  912. Thread.Sleep(10000);
  913. SendMsg("放大6000倍");
  914. if (!iSEM.SetMagnification(6000))
  915. {
  916. SendMsg("放大倍数调整失败");
  917. return false;
  918. }
  919. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  920. {
  921. SendMsg("拍摄照片完成");
  922. //return true;
  923. }
  924. else
  925. {
  926. SendMsg("拍摄照片失败");
  927. return false;
  928. }
  929. SendMsg("图像校正36度");
  930. //3.设置SEM角度补偿cos36度
  931. if (!TiltCorrection(36))
  932. {
  933. return false;
  934. }
  935. Thread.Sleep(3000);
  936. string fn;
  937. //用宏抓一般图
  938. Thread.Sleep(5000);
  939. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  940. SendMsg("用宏抓一般图" + fn);
  941. iSEM.CMDMCFFilename(fn);
  942. //延时1s??
  943. Thread.Sleep(5000);
  944. //用宏抓好图
  945. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  946. SendMsg("用宏抓好图" + fn);
  947. iSEM.CMDMCFFilename(fn);
  948. //延时1s??
  949. Thread.Sleep(30000);
  950. Thread.Sleep(10000);
  951. WorkingFolder = m_measureFile.FilePath;
  952. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  953. SendMsg("SEM拍照存储到" + fileName6);
  954. if (!GetImage(ImageMode.SEM, fileName6))
  955. {
  956. SendMsg("SEM拍照失败");
  957. return false;
  958. }
  959. //用宏抓标志图
  960. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  961. SendMsg("用宏抓标志图" + fn);
  962. iSEM.CMDMCFFilename(fn);
  963. //延时1s??
  964. Thread.Sleep(30000);
  965. //恢复简单抓图
  966. Thread.Sleep(5000);
  967. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  968. SendMsg("用宏抓一般图" + fn);
  969. iSEM.CMDMCFFilename(fn);
  970. SendMsg("所有图结束");
  971. return true;
  972. }
  973. //第一个孔的测试过程
  974. public bool FirstHole()
  975. {
  976. MeasureData.CutHole firstHole = m_cutHoles[0];
  977. SendMsg("插入PT针");
  978. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  979. //if (firstHole.PT == true)
  980. {
  981. if (!InsertPT())
  982. {
  983. SendMsg("插入PT针失败");
  984. return false;
  985. }
  986. }
  987. //13. 自动 定位功能
  988. SendMsg("自动定位切割位置");
  989. if (!GetPoistion())
  990. {
  991. SendMsg("自动定位切割位置失败");
  992. return false;
  993. }
  994. //14.自动控制FIB切割
  995. SendMsg("FIB切割");
  996. if (!FIBCross())
  997. {
  998. SendMsg("FIB切割失败");
  999. return false;
  1000. }
  1001. //{
  1002. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1003. // //2.控制FIB进行切割
  1004. // //3.控制FIB拍照600X
  1005. // //4.保存图片
  1006. // {
  1007. // //1.设置图片名称
  1008. // //2.保存图片3
  1009. // String fileName3 = WorkingFolder + ImageName3;
  1010. // if (!GetImage(ImageMode.FIB, fileName3))
  1011. // {
  1012. // return false;
  1013. // }
  1014. // }
  1015. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1016. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1017. //}
  1018. //15.根据样品类型决定是否撤出PT针
  1019. SendMsg("撤出PT针");
  1020. //if (firstHole.PT == false)
  1021. //{
  1022. if (!RetractPT())
  1023. {
  1024. SendMsg("撤出PT针失败");
  1025. return false;
  1026. }
  1027. //}
  1028. // 16.找到切割位置
  1029. SendMsg("找到切割位置");
  1030. //17.自动控制SEM拍截面照
  1031. SendMsg("观测层高");
  1032. SendMsg("切换SEM控制");
  1033. if (!iSEM.CmdFIBModeSEM())
  1034. {
  1035. SendMsg("SEM模式切换失败");
  1036. return false;
  1037. }
  1038. Thread.Sleep(10000);
  1039. SendMsg("放大6000倍");
  1040. if (!iSEM.SetMagnification(6000))
  1041. {
  1042. SendMsg("放大倍数调整失败");
  1043. return false;
  1044. }
  1045. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1046. {
  1047. SendMsg("拍摄照片完成");
  1048. //return true;
  1049. }
  1050. else
  1051. {
  1052. SendMsg("拍摄照片失败");
  1053. return false;
  1054. }
  1055. SendMsg("图像校正36度");
  1056. //3.设置SEM角度补偿cos36度
  1057. if (!TiltCorrection(36))
  1058. {
  1059. return false;
  1060. }
  1061. Thread.Sleep(3000);
  1062. string fn;
  1063. //用宏抓一般图
  1064. Thread.Sleep(5000);
  1065. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1066. SendMsg("用宏抓一般图" + fn);
  1067. iSEM.CMDMCFFilename(fn);
  1068. //延时1s??
  1069. Thread.Sleep(5000);
  1070. //用宏抓好图
  1071. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1072. SendMsg("用宏抓好图" + fn);
  1073. iSEM.CMDMCFFilename(fn);
  1074. //延时1s??
  1075. Thread.Sleep(30000);
  1076. Thread.Sleep(10000);
  1077. WorkingFolder = m_measureFile.FilePath;
  1078. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1079. SendMsg("SEM拍照存储到" + fileName6);
  1080. if (!GetImage(ImageMode.SEM, fileName6))
  1081. {
  1082. SendMsg("SEM拍照失败");
  1083. return false;
  1084. }
  1085. //用宏抓标志图
  1086. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1087. SendMsg("用宏抓标志图" + fn);
  1088. iSEM.CMDMCFFilename(fn);
  1089. //延时1s??
  1090. Thread.Sleep(30000);
  1091. Thread.Sleep(5000);
  1092. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1093. SendMsg("用宏抓一般图" + fn);
  1094. iSEM.CMDMCFFilename(fn);
  1095. //延时1s??
  1096. Thread.Sleep(5000);
  1097. SendMsg("所有图结束");
  1098. ////17.自动控制SEM拍截面照
  1099. //{
  1100. // //1.控制SEM放大到指定参数大小范围,6000x
  1101. // if (!iSEM.SetMagnification(6000))
  1102. // {
  1103. // return false;
  1104. // }
  1105. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1106. // if (!MeasParam.FocusMode)
  1107. // {
  1108. // //弹出手动对焦的窗口
  1109. // }
  1110. // else
  1111. // {
  1112. // //调用自动对焦模块
  1113. // }
  1114. // //3.设置SEM角度补偿cos36度
  1115. // if (!TiltCorrection(36))
  1116. // {
  1117. // return false;
  1118. // }
  1119. // //4.控制SEM拍照
  1120. // //5.保存照片4
  1121. // String fileName5 = WorkingFolder + ImageName5;
  1122. // if (!GetImage(ImageMode.SEM, fileName5))
  1123. // {
  1124. // return false;
  1125. // }
  1126. // //6.将照片传给客户,获取偏移坐标
  1127. // float x6 = 0, y6 = 0;
  1128. // float angle1 = 0;
  1129. // float mage = 10000;
  1130. // //7.根据坐标控制SEM移动到分析位置
  1131. // if (!iSEM.MoveStageXY(x6, y6))
  1132. // {
  1133. // return false;
  1134. // }
  1135. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1136. // float x7 = iSEM.GetStageAtX();
  1137. // float y7 = iSEM.GetStageAtY();
  1138. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1139. // {
  1140. // return false;
  1141. // }
  1142. // //9.控制SEM平行校正,并记录校正前初始值
  1143. // float foldAnagle = iSEM.GetScanRotation();
  1144. // if (foldAnagle == float.NaN)
  1145. // {
  1146. // return false;
  1147. // }
  1148. // if (!iSEM.SetScanRotation(angle1))
  1149. // {
  1150. // return false;
  1151. // }
  1152. // //10.控制SEM放大到指定参数大小范围
  1153. // if (!iSEM.SetMagnification(mage))
  1154. // {
  1155. // return false;
  1156. // }
  1157. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1158. // if (!MeasParam.FocusMode)
  1159. // {
  1160. // //弹出手动对焦的窗口
  1161. // }
  1162. // else
  1163. // {
  1164. // //调用自动对焦模块
  1165. // }
  1166. // //12.控制SEM对分析位置拍照
  1167. // String fileName6 = WorkingFolder + ImageName6;
  1168. // if (!GetImage(ImageMode.SEM, fileName6))
  1169. // {
  1170. // return false;
  1171. // }
  1172. // //13.保存照片
  1173. // //14.控制SEM取消电子束校正,回到初始值
  1174. // if (!iSEM.SetScanRotation(foldAnagle))
  1175. // {
  1176. // return false;
  1177. // }
  1178. //}
  1179. ////18.自动层高分析
  1180. //{
  1181. // //1.获取SEM Pixel Size给客户传入参数
  1182. // if (iSEM.GetPixelSize() == float.NaN)
  1183. // {
  1184. // return false;
  1185. // }
  1186. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1187. //}
  1188. ////19.自动能谱分析
  1189. //{
  1190. // //1. 确定能谱位置
  1191. // //2. 控制牛津打能谱
  1192. // //3. 能谱分析——面扫+线扫描
  1193. //}
  1194. return true;
  1195. }
  1196. //非第一个孔的测试过程
  1197. public void OtherHole()
  1198. {
  1199. //for (int i = 1; i < m_cutHoles.Count; i++)
  1200. //{
  1201. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1202. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1203. //1. 初始化
  1204. {
  1205. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1206. //读取图像冻结状态
  1207. float ffrozen = iSEM.GetImageFrozen();
  1208. if (ffrozen == float.NaN)
  1209. {
  1210. return;
  1211. }
  1212. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1213. {
  1214. SendMsg("样品台恢复到水平");
  1215. //return true;
  1216. }
  1217. else
  1218. {
  1219. SendMsg("禁止样品台恢复到水平");
  1220. return;
  1221. }
  1222. //2. 调节样品1号孔的样品台6轴坐标
  1223. //3. 将样品1号孔坐标2存入数据库
  1224. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1225. if (!iSEM.SetStageGotoT(0))
  1226. {
  1227. return;
  1228. }
  1229. while (true)
  1230. {
  1231. Thread.Sleep(10000);
  1232. if (iSEM.GetStageIs() == 0)
  1233. {
  1234. break;
  1235. }
  1236. }
  1237. //5. 获取光镜2号孔XY坐标
  1238. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1239. //6. 根据光镜坐标控制样品台移动
  1240. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1241. {
  1242. SendMsg("移动失败");
  1243. }
  1244. while (true)
  1245. {
  1246. Thread.Sleep(10000);
  1247. if (iSEM.GetStageIs() == 0)
  1248. {
  1249. break;
  1250. }
  1251. }
  1252. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1253. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1254. {
  1255. SendMsg("样品台旋转");
  1256. //return true;
  1257. }
  1258. else
  1259. {
  1260. SendMsg("禁止样品台旋转");
  1261. return;
  1262. }
  1263. if (!iSEM.SetStageGotoT(54))
  1264. {
  1265. return;
  1266. }
  1267. while (true)
  1268. {
  1269. Thread.Sleep(10000);
  1270. if (iSEM.GetStageIs() == 0)
  1271. {
  1272. break;
  1273. }
  1274. }
  1275. }
  1276. SendMsg("拉直操作");
  1277. SendMsg("其他操作与1号孔操作一致");
  1278. if (!CommonWork())
  1279. {
  1280. return;
  1281. }
  1282. //2. 定位切割
  1283. {
  1284. //1. 拉直操作
  1285. {
  1286. //1.1 控制SEM进行拍照
  1287. //1.2 图片传给客户,返回偏移角度
  1288. //1.3 根据返回角度,控制样品台转动
  1289. }
  1290. //2. 与1号孔13步相同
  1291. }
  1292. //3. 以后步骤与1号孔以后步骤一致
  1293. //}
  1294. }
  1295. //角度补偿
  1296. public bool TiltCorrection(float a_fAngle)
  1297. {
  1298. //记录原来电镜的状态
  1299. // bool bTilt = false;
  1300. //float fOldTilt = iSEM.GetTiltCorrection();
  1301. //if (fOldTilt == float.NaN)
  1302. //{
  1303. // return false;
  1304. //}
  1305. //else if (fOldTilt == 1)
  1306. //{
  1307. // bTilt = true;
  1308. //}
  1309. //else if (fOldTilt == 0)
  1310. //{
  1311. // bTilt = false;
  1312. //}
  1313. //float fOldAngle = iSEM.GetTiltAngle();
  1314. //if (fOldAngle == float.NaN)
  1315. //{
  1316. // return false;
  1317. //}
  1318. //开启校正
  1319. SendMsg("开启校正");
  1320. if (!iSEM.SetTiltAngleOn())
  1321. {
  1322. return false;
  1323. }
  1324. //设置校正角度
  1325. //if (!iSEM.SetTiltAngle(fOldAngle))
  1326. //{
  1327. // return false;
  1328. //}
  1329. //恢复原始状态
  1330. SendMsg("校正角度"+ a_fAngle.ToString());
  1331. if (!iSEM.SetTiltAngle(a_fAngle))
  1332. {
  1333. return false;
  1334. }
  1335. //if (bTilt)
  1336. //{
  1337. // if (!iSEM.SetTiltCorrectionOn())
  1338. // {
  1339. // return false;
  1340. // }
  1341. //}
  1342. //else
  1343. //{
  1344. // if (!iSEM.SetTiltCorrectionOff())
  1345. // {
  1346. // return false;
  1347. // }
  1348. //}
  1349. return true;
  1350. }
  1351. //拍图
  1352. public bool GetImage(ImageMode a_mode, String a_fileName)
  1353. {
  1354. //1. 图像解冻
  1355. float foldFrozen = iSEM.GetImageFrozen();
  1356. if (foldFrozen == float.NaN)
  1357. {
  1358. return false;
  1359. }
  1360. if (!iSEM.ImageLive())
  1361. {
  1362. return false;
  1363. }
  1364. //2. 确认图像模式
  1365. if (ImageMode.SEM == a_mode)
  1366. {
  1367. if (!iSEM.CmdFIBModeSEM())
  1368. {
  1369. return false;
  1370. }
  1371. }
  1372. else if (ImageMode.FIB == a_mode)
  1373. {
  1374. if (!iSEM.CmdFIBModeFIB())
  1375. {
  1376. return false;
  1377. }
  1378. }
  1379. else
  1380. {
  1381. return false;
  1382. }
  1383. //3. 获取分辨率
  1384. int[] ImageSize = iSEM.GetImageStore();
  1385. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1386. {
  1387. return false;
  1388. }
  1389. short width = (short)ImageSize[0];
  1390. short height = (short)ImageSize[1];
  1391. //4. 抓图
  1392. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1393. {
  1394. return false;
  1395. }
  1396. //5. 恢复初始状态
  1397. if (foldFrozen == 0)
  1398. {
  1399. if (!iSEM.ImageLive())
  1400. {
  1401. return false;
  1402. }
  1403. }
  1404. else if (foldFrozen == 1)
  1405. {
  1406. if (!iSEM.ImageFrozen())
  1407. {
  1408. return false;
  1409. }
  1410. }
  1411. return true;
  1412. }
  1413. //自动聚焦
  1414. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  1415. {
  1416. a_nWd = 0;
  1417. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1418. if (a_param == null)
  1419. {
  1420. return false;
  1421. }
  1422. //1. 拍照
  1423. //1.1, 初拍照
  1424. //1.1.1, 根据参数计算拍照次数
  1425. //int n =
  1426. //3.控制SEM拍照
  1427. String fileName4 = WorkingFolder + ImageName4;
  1428. if (!GetImage(ImageMode.SEM, fileName4))
  1429. {
  1430. return false;
  1431. }
  1432. //1.2, 选定细拍照的工作距离
  1433. //1.3, 细拍照
  1434. //2. 计算评价函数
  1435. //3. 3选2策略获取工作距离
  1436. return true;
  1437. }
  1438. }
  1439. }