Measure.cs 252 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. #region 变量定义
  321. //Web接口类
  322. public WebResult wr = null;
  323. //SmartSEM远程路径
  324. public String RemoteELYPath = "";
  325. public String RemoteMLFPath = "";
  326. //扫描周期
  327. private float cycle_time = 0;
  328. //人工干预
  329. public int hand_intervene = 2;
  330. //样品台保护值
  331. public float X_Min = 0;
  332. public float X_Max = 0.13f;
  333. public float Y_Min = 0;
  334. public float Y_Max = 0.13f;
  335. public float Z_Min = 0;
  336. public float Z_Max = 0.05f;
  337. public float T_Min = -4;
  338. public float T_Max = 70;
  339. public float R_Min = -380;
  340. public float R_Max = 380;
  341. public float M_Min = 0;
  342. public float M_Max = 0.012f;
  343. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  344. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  345. //定义一个全局的消息类
  346. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  347. //全局只有一个fatorySEM
  348. static FactoryHardware factorySEM = FactoryHardware.Instance;
  349. ISEMControl iSEM = factorySEM.ISEM;
  350. //@的作用是不用转义字符\\只打一个就行
  351. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  352. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  354. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  355. const String ImageName31 = @"FIBBefore.tif";
  356. const String ImageName32 = @"FIBAfter.tif";
  357. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  358. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  359. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  360. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  361. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  362. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  364. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  365. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  366. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  367. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  368. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  369. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  370. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  371. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  372. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  373. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  374. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  375. const String ElyDeposition = @"Deposition.ely"; //沉积
  376. const String ElyCrossSection = @"CrossSection.ely"; //切割
  377. const float fMin = (float)0.0000002; //单位是米
  378. const float fSateyZ = (float)0.03;//单位是米
  379. public Boolean key_stop = false;
  380. String focus_path = "";
  381. String FIBfocus_path = "";
  382. String StigX_path = "";
  383. String StigY_path = "";
  384. String EDS_path = "";
  385. String data_path = "";
  386. int m_nWorkHoleNo = -1;
  387. //测量文件
  388. private MeasureFile m_measureFile;
  389. public MeasureFile MeasureFile
  390. {
  391. get { return this.m_measureFile; }
  392. set { this.m_measureFile = value; }
  393. }
  394. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  395. private List<MeasureData.CutHole> m_cutHoles;
  396. public List<MeasureData.CutHole> cutHoles
  397. {
  398. get { return this.m_cutHoles; }
  399. set { this.m_cutHoles = value; }
  400. }
  401. //工作文件夹
  402. private string m_WorkingFolder;
  403. public string WorkingFolder
  404. {
  405. get { return this.m_WorkingFolder; }
  406. set { this.m_WorkingFolder = value; }
  407. }
  408. //程序当前路径
  409. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  410. //线程状态
  411. private ThreadStatus m_ThreadStatus;
  412. public ThreadStatus TStatus
  413. {
  414. get { return this.m_ThreadStatus; }
  415. set { this.m_ThreadStatus = value; }
  416. }
  417. #endregion
  418. //构造函数
  419. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  420. {
  421. LogManager.AddHardwareLog("进入构造函数", true);
  422. TStatus = new ThreadStatus();
  423. cutHoles = new List<MeasureData.CutHole>();
  424. //配置远程连接
  425. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  426. }
  427. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  428. public bool InitMeas(MeasureFile a_measureFile)
  429. {
  430. LogManager.AddHardwareLog("进入初始化函数", true);
  431. m_measureFile = a_measureFile;
  432. List<CutHole> listHoles = m_measureFile.ListCutHole;
  433. foreach (CutHole h in listHoles)
  434. {
  435. if (h.SWITCH == true)
  436. {
  437. m_cutHoles.Add(h);
  438. }
  439. }
  440. if (m_cutHoles.Count == 0)
  441. return false;
  442. if (m_measureFile.MParam.EDS == true)
  443. {
  444. LogManager.AddHardwareLog("能谱分析", true);
  445. Init_MeasDB();
  446. }
  447. return true;
  448. }
  449. //给前台UI发送消息步骤
  450. public void SendMsg(string step_code)
  451. {
  452. arg.Step_Code = step_code;
  453. arg.Time = DateTime.Now;
  454. SendThreadStatus(this, arg);
  455. }
  456. //给前台UI发送孔状态信息
  457. public void SendCutHoleMsg(string a_state, string a_holeName)
  458. {
  459. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  460. arg.HoleName = a_holeName;
  461. arg.State = a_state;
  462. SendCutHolesStatus(this, arg);
  463. }
  464. //测量流程
  465. public void DoMeasure()
  466. {
  467. //创建线程的测量状态的更新
  468. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  469. LogManager.AddHardwareLog("测量线程:开始测量",true);
  470. //检查硬件连接是否正常
  471. LogManager.AddHardwareLog("测量线程:连接硬件", true);
  472. if (!ConnectHardware())
  473. {
  474. MessageBox.Show("连接电镜失败!","重要错误",MessageBoxButtons.OK,MessageBoxIcon.Error);
  475. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  476. LogManager.AddHardwareLog("测量线程报错:连接硬件硬件连接失败", false);
  477. return;
  478. }
  479. //设置工作文件夹
  480. LogManager.AddHardwareLog("测量线程:设置工作文件夹", true);
  481. if (!SetWorkingFolderStr())
  482. {
  483. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  484. LogManager.AddHardwareLog("测量线程报错:设置文件夹失败", false);
  485. return;
  486. }
  487. //设置SmartSEM远程路径
  488. iSEM.SetRemoteELYPath(RemoteELYPath);
  489. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  490. //增加EDS控制
  491. //将停止键复位
  492. key_stop = false;
  493. //开始测量就将模式设置为SEM
  494. LogManager.AddHardwareLog("测量线程:切换到SEM模式", true);
  495. if (!iSEM.CmdFIBModeSEM())
  496. {
  497. LogManager.AddHardwareLog("测量线程报错:开始切换到SEM模式失败。", false);
  498. return;
  499. }
  500. arg.Picture_Information.Work_Status = "SEM";
  501. //设置扫描周期
  502. LogManager.AddHardwareLog("测量线程:设置图像扫描周期为对焦周期", true);
  503. iSEM.CmdFocusRate(4);
  504. Thread.Sleep(200);
  505. cycle_time = iSEM.GetCycleTime();
  506. if (cycle_time == 0)
  507. {
  508. LogManager.AddHardwareLog("测量线程报错:获取扫描周期时间失败", false);
  509. return;
  510. }
  511. Thread.Sleep((int)cycle_time +100);
  512. //开始做各个孔的检测
  513. for (int i = 0; i < m_cutHoles.Count; i++)
  514. {
  515. //自动亮度对比度
  516. LogManager.AddHardwareLog("测量线程:开启自动亮度,对比度调节", true);
  517. iSEM.SetAutoBright(100);
  518. Thread.Sleep(200);
  519. iSEM.SetAutoContrast(100);
  520. Thread.Sleep(200);
  521. //LogManager.AddHardwareLog("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  522. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  523. {
  524. LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  525. return;
  526. }
  527. Thread.Sleep(5000);
  528. LogManager.AddHardwareLog("测量线程:测试第"+i.ToString()+"个分析点。", true);
  529. //记录测量序号和孔名
  530. m_nWorkHoleNo = i;
  531. arg.HoleName = m_cutHoles[i].HoleName;
  532. //最终数据存放目录
  533. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  534. //对焦数据存放目录
  535. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  536. m_measureFile.MParam.AutoFocus.Path = focus_path;
  537. if (!Directory.Exists(focus_path))
  538. {
  539. Directory.CreateDirectory(focus_path);
  540. }
  541. //StigX数据存放目录
  542. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  543. m_measureFile.MParam.AutoStigX.Path = StigX_path;
  544. if (!Directory.Exists(StigX_path))
  545. {
  546. Directory.CreateDirectory(StigX_path);
  547. }
  548. //StigY数据存放目录
  549. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  550. m_measureFile.MParam.AutoStigY.Path = StigY_path;
  551. if (!Directory.Exists(StigY_path))
  552. {
  553. Directory.CreateDirectory(StigY_path);
  554. }
  555. //EDS数据存放路径
  556. if (m_measureFile.MParam.EDS == true)
  557. {
  558. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  559. m_measureFile.MParam.EDSP.Path = EDS_path;
  560. if (!Directory.Exists(EDS_path))
  561. {
  562. Directory.CreateDirectory(EDS_path);
  563. }
  564. }
  565. //判断孔状态
  566. if (m_cutHoles[i].STATE != State.Ready)
  567. {
  568. LogManager.AddHardwareLog("测试孔"+ m_cutHoles[i].HoleName+"状态非就绪,不予测量。", true);
  569. continue;
  570. }
  571. //20201127增加Scanrotate Off
  572. iSEM.SetScanRotationOff();
  573. Thread.Sleep(200);
  574. //20.光束等复位
  575. iSEM.SetBeamShiftX(0);
  576. Thread.Sleep(200);
  577. iSEM.SetBeamShiftY(0);
  578. Thread.Sleep(200);
  579. //开始循环工作
  580. if (i == 0)
  581. {
  582. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName+"开始测量。", true);
  583. m_cutHoles[i].START = DateTime.Now;
  584. //切孔操作-开始
  585. m_cutHoles[i].STATE = State.InProcess;
  586. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  587. LogManager.AddHardwareLog("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  588. + m_cutHoles[0].Position.X.ToString()+","
  589. + m_cutHoles[0].Position.Y.ToString()+","
  590. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  591. #region 坐标恢复
  592. //0、先移动Z轴到比较低的位置上。
  593. if (m_measureFile.MParam.Title)//如果是倾斜样品台,移动Z轴
  594. {
  595. if (!iSEM.SetStageGotoZ(fSateyZ))
  596. {
  597. arg.State = false;
  598. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  599. SendMsg("1-0");
  600. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  601. m_cutHoles[i].STATE = State.Failed;
  602. m_cutHoles[i].END = DateTime.Now;
  603. m_measureFile.Save();
  604. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  605. Thread.Sleep(3000);
  606. continue;
  607. }
  608. while (true)
  609. {
  610. Thread.Sleep(4000);
  611. if (iSEM.GetStageIs() == 0)
  612. {
  613. break;
  614. }
  615. }
  616. //判断是否停止进程
  617. if (key_stop)
  618. {
  619. m_cutHoles[i].STATE = State.Failed;
  620. m_cutHoles[i].END = DateTime.Now;
  621. m_measureFile.Save();
  622. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  623. LogManager.AddHardwareLog("停止键被按下", true);
  624. return;
  625. }
  626. }
  627. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  628. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  629. {
  630. arg.State = false;
  631. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  632. SendMsg("1-0");
  633. LogManager.AddHardwareLog("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  634. m_cutHoles[i].STATE = State.Failed;
  635. m_cutHoles[i].END = DateTime.Now;
  636. m_measureFile.Save();
  637. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  638. Thread.Sleep(3000);
  639. continue;
  640. }
  641. while (true)
  642. {
  643. Thread.Sleep(4000);
  644. if (iSEM.GetStageIs() == 0)
  645. {
  646. break;
  647. }
  648. }
  649. //判断是否停止进程
  650. if (key_stop)
  651. {
  652. m_cutHoles[i].STATE = State.Failed;
  653. m_cutHoles[i].END = DateTime.Now;
  654. m_measureFile.Save();
  655. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  656. LogManager.AddHardwareLog("停止键被按下", true);
  657. return;
  658. }
  659. //2、移动XY轴
  660. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  661. {
  662. arg.State = false;
  663. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  664. SendMsg("1-0");
  665. LogManager.AddHardwareLog("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  666. + m_cutHoles[0].Position.X.ToString() + ","
  667. + m_cutHoles[0].Position.Y.ToString()+ ")", false);
  668. m_cutHoles[i].STATE = State.Failed;
  669. m_cutHoles[i].END = DateTime.Now;
  670. m_measureFile.Save();
  671. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  672. Thread.Sleep(3000);
  673. continue;
  674. }
  675. while (true)
  676. {
  677. Thread.Sleep(4000);
  678. if (iSEM.GetStageIs() == 0)
  679. {
  680. break;
  681. }
  682. }
  683. //判断是否停止进程
  684. if (key_stop)
  685. {
  686. m_cutHoles[i].STATE = State.Failed;
  687. m_cutHoles[i].END = DateTime.Now;
  688. m_measureFile.Save();
  689. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  690. LogManager.AddHardwareLog("停止键被按下", true);
  691. return;
  692. }
  693. //3、恢复Z轴
  694. if (m_measureFile.MParam.Title)
  695. {
  696. //恢复Z轴
  697. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  698. {
  699. arg.State = false;
  700. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  701. SendMsg("1-0");
  702. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  703. m_cutHoles[i].STATE = State.Failed;
  704. m_cutHoles[i].END = DateTime.Now;
  705. m_measureFile.Save();
  706. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  707. Thread.Sleep(3000);
  708. continue;
  709. }
  710. while (true)
  711. {
  712. Thread.Sleep(4000);
  713. if (iSEM.GetStageIs() == 0)
  714. {
  715. break;
  716. }
  717. }
  718. //判断是否停止进程
  719. if (key_stop)
  720. {
  721. LogManager.AddHardwareLog("停止键按下。", true);
  722. m_cutHoles[i].STATE = State.Failed;
  723. m_cutHoles[i].END = DateTime.Now;
  724. m_measureFile.Save();
  725. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  726. return;
  727. }
  728. }
  729. arg.State = true;
  730. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  731. SendMsg("1-0");
  732. //4、设置WD
  733. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  734. Thread.Sleep(1000);
  735. #endregion
  736. //第一个点开始测量
  737. if (FirstHole())
  738. {
  739. //保存文件,将测量状态更改
  740. m_cutHoles[i].STATE = State.Success;
  741. m_cutHoles[i].END = DateTime.Now;
  742. m_measureFile.Save();
  743. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  744. }
  745. //失败
  746. else
  747. {
  748. m_cutHoles[i].STATE = State.Failed;
  749. m_cutHoles[i].END = DateTime.Now;
  750. m_measureFile.Save();
  751. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  752. }
  753. }
  754. else
  755. {
  756. //其他孔的测量
  757. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  758. m_cutHoles[i].START = DateTime.Now;
  759. m_cutHoles[i].STATE = State.InProcess;
  760. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  761. //其他孔测量之前的初始化
  762. if (!OtherHole_Init())
  763. {
  764. arg.State = false;
  765. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  766. SendMsg("1-0");
  767. Thread.Sleep(3000);
  768. LogManager.AddHardwareLog("测量线程:" + arg.Message, true);
  769. continue;
  770. }
  771. arg.State = true;
  772. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  773. SendMsg("1-0");
  774. //其他孔开始测量
  775. if (OtherHole())
  776. {
  777. //保存文件,将测量状态更改
  778. m_cutHoles[i].STATE = State.Success;
  779. m_cutHoles[i].END = DateTime.Now;
  780. m_measureFile.Save();
  781. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  782. }
  783. //失败
  784. else
  785. {
  786. m_cutHoles[i].STATE = State.Failed;
  787. m_cutHoles[i].END = DateTime.Now;
  788. m_measureFile.Save();
  789. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  790. }
  791. }
  792. if(key_stop)
  793. {
  794. m_cutHoles[i].END = DateTime.Now;
  795. m_cutHoles[i].STATE = State.Ready;
  796. m_measureFile.Save();
  797. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  798. arg.Message = "用户停止测量";
  799. SendMsg("0-0");
  800. break;
  801. }
  802. //两个点之间更换,加延时以便完成显示
  803. Thread.Sleep(3000);
  804. }
  805. }
  806. //检查硬件连接是否正常
  807. public bool ConnectHardware()
  808. {
  809. //返回硬件的连接状态
  810. return iSEM.ConnectStatus();
  811. }
  812. //设置工作文件夹
  813. public bool SetWorkingFolderStr()
  814. {
  815. WorkingFolder = m_measureFile.FilePath;
  816. return true;
  817. }
  818. //插入PT针
  819. public bool InsertPT()
  820. {
  821. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  822. //SendMsg("调用宏插入PT针宏文件" + fn);
  823. iSEM.CMDMCFFilename(fn);
  824. //延时1s??
  825. Thread.Sleep(1000);
  826. return true;
  827. }
  828. //撤出PT针
  829. public bool RetractPT()
  830. {
  831. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  832. //SendMsg("调用宏撤出PT针宏文件" + fn);
  833. iSEM.CMDMCFFilename(fn);
  834. //延时1s??
  835. Thread.Sleep(1000);
  836. return true;
  837. }
  838. //PT沉积
  839. public bool PTWork()
  840. {
  841. //执行PT沉积的ELY文件
  842. if (!ExcuteEly(m_measureFile.MParam.PTTemp))
  843. {
  844. return false;
  845. }
  846. //等待沉积完成
  847. while (true)
  848. {
  849. Thread.Sleep(7000);
  850. if (iSEM.GetFIBMode() == 0)
  851. {
  852. break;
  853. }
  854. }
  855. return true;
  856. }
  857. //FIB切割
  858. public bool FIBWork()
  859. {
  860. //执行PT沉积的ELY文件
  861. if (!ExcuteEly(m_measureFile.MParam.FIBTemp))
  862. {
  863. return false;
  864. }
  865. //等待切割完成
  866. while (true)
  867. {
  868. Thread.Sleep(10000);
  869. if (iSEM.GetFIBMode() == 0)
  870. {
  871. break;
  872. }
  873. }
  874. return true;
  875. }
  876. //执行ELY文件的步骤
  877. public bool ExcuteEly(string a_filename)
  878. {
  879. //执行ELy文件有三个动作
  880. //1. 选择ELY文件
  881. //SendMsg("选择ELY文件");
  882. if (!iSEM.CmdFIBLoadELY(a_filename))
  883. {
  884. //SendMsg("选择ELY文件失败");
  885. return false;
  886. }
  887. Thread.Sleep(1000);
  888. //2. 确认ELY文件
  889. //SendMsg("确认ELY文件");
  890. if (!iSEM.CmdFIBEXPOSUREELY())
  891. {
  892. //SendMsg("确认ELY文件失败");
  893. return false;
  894. }
  895. Thread.Sleep(1000);
  896. //3. 执行ELY文件
  897. //SendMsg("执行ELY文件");
  898. if (!iSEM.CmdFIBSTARTELY())
  899. {
  900. //SendMsg("执行ELY文件失败");
  901. return false;
  902. }
  903. Thread.Sleep(1000);
  904. return true;
  905. }
  906. /// <summary>
  907. ///13. 自动 定位功能,沉积
  908. /// </summary>
  909. /// <returns></returns>
  910. public bool GetPoistion()
  911. {
  912. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  913. int state = 1;
  914. LogManager.AddHardwareLog("测量线程:13.自动定位、沉积-功能自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString(), true);
  915. Thread.Sleep(200);
  916. //1.控制SEM放大600X
  917. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  918. {
  919. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  920. arg.State = false;
  921. SendMsg("1-6");
  922. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "控制失败", false);
  923. return false;
  924. }
  925. Thread.Sleep(200);
  926. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  927. {
  928. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  929. arg.State = false;
  930. SendMsg("1-6");
  931. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString() + "控制失败", false);
  932. return false;
  933. }
  934. float current = iSEM.GetMagnification();
  935. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  936. {
  937. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  938. Thread.Sleep(200);
  939. current = iSEM.GetMagnification();
  940. }
  941. arg.State = true;
  942. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  943. SendMsg("1-6");
  944. //判断是否停止进程
  945. if (key_stop)
  946. {
  947. LogManager.AddHardwareLog("停止键按下。", true);
  948. return false;
  949. }
  950. //判断是否为仅拍照,不是则执行FIB操作
  951. if (!m_measureFile.MParam.Is_Photograph)
  952. {
  953. LogManager.AddHardwareLog("测量线程:切换到FIB模式。", true);
  954. //6.设置FIB拍照参数——扫描时间、束流等
  955. //7.控制FIB自动亮度、对比度
  956. Thread.Sleep(200);
  957. if (!iSEM.CmdFIBModeFIB())
  958. {
  959. arg.Message = "FIB模式切换失败";
  960. arg.State = false;
  961. SendMsg("1-8");
  962. LogManager.AddHardwareLog("测量线程报错:切换到FIB模式失败。", false);
  963. return false;
  964. }
  965. arg.State = true;
  966. arg.Picture_Information.Work_Status = "FIB";
  967. arg.Message = "FIB模式切换成功";
  968. SendMsg("1-8");
  969. Thread.Sleep(1000);
  970. //判断是否停止进程
  971. if (key_stop)
  972. {
  973. LogManager.AddHardwareLog("停止键按下。", true);
  974. return false;
  975. }
  976. //8.控制FIB拍照
  977. //9.保存照片======更改路径
  978. //20201103,FIB使用定位的放大倍数
  979. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  980. arg.Picture_Information.Picture_FullPath = fileName2;
  981. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  982. Thread.Sleep(200);
  983. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  984. Thread.Sleep(200);
  985. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  986. Thread.Sleep(200);
  987. //FIB的放大位数,将来会改
  988. LogManager.AddHardwareLog("测量线程:设置FIB放大倍数"+ m_measureFile.MParam.Location_Magnification.ToString(), true);
  989. //20201103,FIB使用定位的放大倍数
  990. if (!iSEM.SetFIBMagnification(m_measureFile.MParam.Location_Magnification))
  991. {
  992. arg.Message = "FIB放大倍数设置失败";
  993. arg.State = false;
  994. SendMsg("1-9");
  995. LogManager.AddHardwareLog("测量线程失败:FIB放大倍数设置失败。", false);
  996. return false;
  997. }
  998. arg.Message = "FIB放大倍数设置成功";
  999. arg.State = true;
  1000. SendMsg("1-9");
  1001. Thread.Sleep(200);
  1002. //判断是否停止进程
  1003. if (key_stop)
  1004. {
  1005. LogManager.AddHardwareLog("停止键按下。", true);
  1006. return false;
  1007. }
  1008. //4、设置WD
  1009. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1010. Thread.Sleep(1000);
  1011. //20201127增加自动亮度对比度
  1012. if(m_measureFile.MParam.FIBDo)
  1013. {
  1014. if(m_measureFile.MParam.FIBAutoBC)
  1015. {
  1016. iSEM.SetAutoVideoBrightnessAndContrast();
  1017. //20201128陈工建议增加
  1018. Thread.Sleep(200);
  1019. iSEM.SetAutoBright(100);
  1020. Thread.Sleep(200);
  1021. iSEM.SetAutoContrast(100);
  1022. Thread.Sleep(5000);
  1023. }
  1024. else
  1025. {
  1026. iSEM.SetAutoVideoOff();
  1027. Thread.Sleep(200);
  1028. iSEM.SetBrightness(m_measureFile.MParam.FIBB);
  1029. Thread.Sleep(200);
  1030. iSEM.SetContrast(m_measureFile.MParam.FIBC);
  1031. Thread.Sleep(200);
  1032. }
  1033. }
  1034. //拍照前改变速度,延时
  1035. iSEM.CloseReduced();
  1036. Thread.Sleep(200);
  1037. iSEM.CmdSaveRate();
  1038. Thread.Sleep(200);
  1039. cycle_time = iSEM.GetCycleTime();
  1040. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1041. if (!GetImage(fileName2))
  1042. {
  1043. arg.Message = "FIB拍照失败";
  1044. arg.State = false;
  1045. SendMsg("1-11");
  1046. LogManager.AddHardwareLog("测量线程报错:FIB拍照失败。", false);
  1047. return false;
  1048. }
  1049. arg.State = true;
  1050. arg.Picture_Information.Picture_FullPath = fileName2;
  1051. arg.Message = "FIB拍照成功";
  1052. SendMsg("1-11");
  1053. iSEM.CmdFocusRate(4);
  1054. Thread.Sleep(200);
  1055. cycle_time = iSEM.GetCycleTime();
  1056. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1057. //判断是否停止进程
  1058. if (key_stop)
  1059. {
  1060. LogManager.AddHardwareLog("停止键按下。", true);
  1061. return false;
  1062. }
  1063. iSEM.CmdFIBModeSEM();
  1064. Thread.Sleep(200);
  1065. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1066. LogManager.AddHardwareLog("测量线程:调用图像处理接口,准备移动样品台", true);
  1067. LogManager.AddHardwareLog("文件名=" + fileName2, true);
  1068. LogManager.AddHardwareLog("样品类型=" + m_measureFile.MParam.SampleName, true);
  1069. LogManager.AddHardwareLog("供应商名称=" + m_measureFile.MParam.Firm, true);
  1070. wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1071. LogManager.AddHardwareLog("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString()+")", true);
  1072. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1073. if (state == 1)
  1074. {
  1075. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1076. float xc = (x1 + x2)/2;
  1077. float yc = (y1 + y2)/2;
  1078. x0 = xc - 512;
  1079. y0 = 384 - yc;
  1080. LogManager.AddHardwareLog("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1081. px = iSEM.GetPixelSize();
  1082. //修改FIB切割的ELY文件坐标
  1083. XmlDocument xmlDoc = new XmlDocument();
  1084. xmlDoc.Load(m_measureFile.MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1085. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1086. if (xns != null)
  1087. {
  1088. XmlAttributeCollection attributeCol = xns.Attributes;
  1089. //遍历自己点属性
  1090. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1091. LogManager.AddHardwareLog("XML-Width_a = " + width_a.ToString(), true);
  1092. foreach (XmlAttribute attri in attributeCol)
  1093. {
  1094. if (attri.Name == "x")
  1095. {
  1096. attri.InnerText = ((x0 * px)*1000000 - width_a).ToString();
  1097. LogManager.AddHardwareLog("XML-TopLeft-X = " + attri.InnerText, true);
  1098. }
  1099. else if (attri.Name == "y")
  1100. {
  1101. attri.InnerText = ((y0 * px)*1000000-2.791).ToString();
  1102. LogManager.AddHardwareLog("XML-TopLeft-Y = " + attri.InnerText, true);
  1103. }
  1104. }
  1105. }
  1106. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1107. if (xns != null)
  1108. {
  1109. XmlAttributeCollection attributeCol = xns.Attributes;
  1110. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1111. //遍历自己点属性
  1112. foreach (XmlAttribute attri in attributeCol)
  1113. {
  1114. if (attri.Name == "x")
  1115. {
  1116. attri.InnerText = ((x0 * px)*1000000 - width).ToString();
  1117. }
  1118. else if (attri.Name == "y")
  1119. {
  1120. attri.InnerText = (((y0 * px) *1000000) + 2 - 2.791).ToString();
  1121. }
  1122. }
  1123. }
  1124. xmlDoc.Save(m_measureFile.MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1125. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1126. if (m_measureFile.MParam.PT)
  1127. {
  1128. xmlDoc = new XmlDocument();
  1129. xmlDoc.Load(m_measureFile.MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1130. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1131. if (xns != null)
  1132. {
  1133. XmlAttributeCollection attributeCol = xns.Attributes;
  1134. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1135. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1136. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1137. //遍历自己点属性
  1138. foreach (XmlAttribute attri in attributeCol)
  1139. {
  1140. if (attri.Name == "x")
  1141. {
  1142. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1143. }
  1144. else if (attri.Name == "y")
  1145. {
  1146. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1147. }
  1148. }
  1149. }
  1150. xmlDoc.Save(m_measureFile.MParam.PTTemp);
  1151. }
  1152. if (hand_intervene == 1)
  1153. {
  1154. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1155. }
  1156. }
  1157. else
  1158. {
  1159. arg.Message = "图像接口参数state返回值为零";
  1160. arg.State = false;
  1161. SendMsg("1-12");
  1162. if (hand_intervene == 1)
  1163. {
  1164. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1165. {
  1166. return false;
  1167. }
  1168. }
  1169. else
  1170. {
  1171. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1172. return false;
  1173. }
  1174. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1175. return false;
  1176. }
  1177. //判断是否停止进程
  1178. if (key_stop)
  1179. {
  1180. LogManager.AddHardwareLog("停止键按下", true);
  1181. return false;
  1182. }
  1183. //11.自动工具样品类型参数确定是否需要PT沉积
  1184. if (m_measureFile.MParam.PT)
  1185. {
  1186. if (!iSEM.CmdFIBModeFIB())
  1187. {
  1188. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1189. return false;
  1190. }
  1191. Thread.Sleep(200);
  1192. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1193. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1194. {
  1195. LogManager.AddHardwareLog("测量线程:插入PT针" + arg.Message, true);
  1196. if (!InsertPT())
  1197. {
  1198. arg.Message = "插入PT针失败";
  1199. arg.State = false;
  1200. SendMsg("1-13");
  1201. LogManager.AddHardwareLog("测量线程报错:"+ arg.Message, false);
  1202. return false;
  1203. }
  1204. arg.State = true;
  1205. arg.Message = "插入PT针成功";
  1206. SendMsg("1-13");
  1207. }
  1208. //判断是否停止进程
  1209. if (key_stop)
  1210. {
  1211. LogManager.AddHardwareLog("停止键按下", true);
  1212. return false;
  1213. }
  1214. //3. 根据坐标进行PT沉积
  1215. if (!PTWork())
  1216. {
  1217. arg.Message = "PT沉积失败";
  1218. arg.State = false;
  1219. SendMsg("1-14");
  1220. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1221. return false;
  1222. }
  1223. arg.State = true;
  1224. arg.Message = "PT沉积成功";
  1225. SendMsg("1-14");
  1226. //判断是否停止进程
  1227. if (key_stop)
  1228. {
  1229. LogManager.AddHardwareLog("停止键按下", true);
  1230. return false;
  1231. }
  1232. //15.根据样品类型决定是否撤出PT针
  1233. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1234. {
  1235. if (!RetractPT())
  1236. {
  1237. arg.Message = "撤出PT针失败";
  1238. arg.State = false;
  1239. SendMsg("1-15");
  1240. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1241. return false;
  1242. }
  1243. arg.State = true;
  1244. arg.Message = "撤出PT针成功";
  1245. SendMsg("1-15");
  1246. }
  1247. //判断是否停止进程
  1248. if (key_stop)
  1249. {
  1250. LogManager.AddHardwareLog("停止键按下", true);
  1251. return false;
  1252. }
  1253. if (!iSEM.CmdFIBModeSEM())
  1254. {
  1255. //arg.Message = "切割前SEM拍照失败。";
  1256. //arg.State = false;
  1257. //SendMsg("1-17");
  1258. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1259. return false;
  1260. }
  1261. }
  1262. }
  1263. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1264. float[] firstPosition = iSEM.GetStagePosition();
  1265. m_cutHoles[0].Position.X = firstPosition[0];
  1266. m_cutHoles[0].Position.Y = firstPosition[1];
  1267. m_cutHoles[0].Position.Z = firstPosition[2];
  1268. m_cutHoles[0].Position.T = firstPosition[3];
  1269. m_cutHoles[0].Position.R = firstPosition[4];
  1270. m_cutHoles[0].Position.M = firstPosition[5];
  1271. //这里要调用文件保存功能
  1272. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1273. + firstPosition[1].ToString() + ","
  1274. + firstPosition[2].ToString() + ","
  1275. + firstPosition[3].ToString() + ","
  1276. + firstPosition[4].ToString() + ","
  1277. + firstPosition[5].ToString() + ")";
  1278. arg.State = true;
  1279. SendMsg("1-16");
  1280. //判断是否停止进程
  1281. if (key_stop)
  1282. {
  1283. LogManager.AddHardwareLog("停止键按下", true);
  1284. return false;
  1285. }
  1286. return true;
  1287. }
  1288. /// <summary>
  1289. /// 14. FIB切割
  1290. /// </summary>
  1291. /// <returns></returns>
  1292. public bool FIBCross()
  1293. {
  1294. int state = 0;
  1295. #if CHECK
  1296. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1297. if (mag < 200)
  1298. {
  1299. mag = 200;
  1300. }
  1301. String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
  1302. iSEM.SetMagnification(mag);
  1303. Thread.Sleep(2000);
  1304. iSEM.CmdSaveRate();
  1305. Thread.Sleep(200);
  1306. cycle_time = iSEM.GetCycleTime();
  1307. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1308. if (!GetImage(fileName1))
  1309. {
  1310. arg.Message = "切割前SEM拍照失败。";
  1311. arg.State = false;
  1312. SendMsg("1-17");
  1313. LogManager.AddHardwareLog("测量线程报错:SEM切割前图像拍照失败", false);
  1314. return false;
  1315. }
  1316. iSEM.CmdFocusRate();
  1317. Thread.Sleep(200);
  1318. cycle_time = iSEM.GetCycleTime();
  1319. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1320. arg.Message = "切割前SEM拍照成功。";
  1321. arg.Picture_Information.Picture_FullPath = fileName1;
  1322. arg.State = true;
  1323. SendMsg("1-17");
  1324. #endif
  1325. if (!iSEM.CmdFIBModeFIB())
  1326. {
  1327. arg.Message = "切换到FIB模式失败。";
  1328. arg.State = false;
  1329. SendMsg("1-18");
  1330. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1331. return false;
  1332. }
  1333. arg.Message = "切换到FIB模式成功。";
  1334. arg.State = true;
  1335. SendMsg("1-18");
  1336. Thread.Sleep(1000);
  1337. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1338. float current = iSEM.GetMagnification();
  1339. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  1340. {
  1341. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1342. Thread.Sleep(200);
  1343. current = iSEM.GetMagnification();
  1344. }
  1345. Thread.Sleep(2000);
  1346. //14.自动控制FIB切割
  1347. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1348. //2.控制FIB进行切割
  1349. //以上1、2步全部用ELY文件代替
  1350. if (!FIBWork())
  1351. {
  1352. arg.Message = "FIB切割失败";
  1353. arg.State = false;
  1354. SendMsg("1-19");
  1355. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1356. return false;
  1357. }
  1358. arg.State = true;
  1359. arg.Message = "FIB切割成功";
  1360. SendMsg("1-19");
  1361. Thread.Sleep(300);
  1362. //判断是否停止进程
  1363. if (key_stop)
  1364. {
  1365. LogManager.AddHardwareLog("停止键按下", true);
  1366. return false;
  1367. }
  1368. //做切割后SEM的拍照
  1369. LogManager.AddHardwareLog("测量线程:切割后SEM拍照", true);
  1370. if (!iSEM.CmdFIBModeSEM())
  1371. {
  1372. //arg.Message = "切割后SEM拍照失败。";
  1373. //arg.State = false;
  1374. //SendMsg("1-20");
  1375. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1376. return false;
  1377. }
  1378. Thread.Sleep(1000);
  1379. #if CHECK
  1380. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
  1381. iSEM.SetMagnification(mag);
  1382. Thread.Sleep(2000);
  1383. iSEM.CmdSaveRate();
  1384. Thread.Sleep(200);
  1385. cycle_time = iSEM.GetCycleTime();
  1386. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1387. if (!GetImage(fileName2))
  1388. {
  1389. arg.Message = "切割后SEM拍照失败。";
  1390. arg.State = false;
  1391. SendMsg("1-20");
  1392. LogManager.AddHardwareLog("测量线程报错:SEM切割后图像拍照失败", false);
  1393. return false;
  1394. }
  1395. arg.Picture_Information.Picture_FullPath = fileName2;
  1396. arg.Message = "切割后SEM拍照成功。";
  1397. arg.State = true;
  1398. SendMsg("1-20");
  1399. iSEM.CmdFocusRate();
  1400. Thread.Sleep(200);
  1401. cycle_time = iSEM.GetCycleTime();
  1402. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1403. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1404. wr.Img_Cut_Success(fileName1, fileName2, out state);
  1405. LogManager.AddHardwareLog("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
  1406. if (state == 0)
  1407. {
  1408. LogManager.AddHardwareLog("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
  1409. arg.Message = "图像接口参数state返回值为零";
  1410. arg.State = false;
  1411. SendMsg("1-22");
  1412. if (hand_intervene == 1)
  1413. {
  1414. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1415. {
  1416. return false;
  1417. }
  1418. }
  1419. else
  1420. {
  1421. return false;
  1422. }
  1423. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1424. }
  1425. arg.State = true;
  1426. LogManager.AddHardwareLog("验证切割准确性成功。", true);
  1427. arg.Message = "FIB切割校验成功";
  1428. SendMsg("1-22");
  1429. //判断是否停止进程
  1430. if (key_stop)
  1431. {
  1432. LogManager.AddHardwareLog("停止键按下。", true);
  1433. return false;
  1434. }
  1435. #endif
  1436. return true;
  1437. }
  1438. /// <summary>
  1439. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1440. /// </summary>
  1441. /// <returns></returns>
  1442. public bool FindCross()
  1443. {
  1444. float x2 = 0, y2 = 0;
  1445. int state = 0;
  1446. //切换到SEM模式
  1447. if (!iSEM.CmdFIBModeSEM())
  1448. {
  1449. arg.Message = "SEM模式切换失败";
  1450. arg.State = false;
  1451. SendMsg("1-23");
  1452. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1453. return false;
  1454. }
  1455. arg.State = true;
  1456. arg.Message = "SEM模式切换成功";
  1457. SendMsg("1-23");
  1458. arg.Picture_Information.Work_Status = "SEM";
  1459. Thread.Sleep(1000);
  1460. //判断是否停止进程
  1461. if (key_stop)
  1462. {
  1463. LogManager.AddHardwareLog("停止键按下", true);
  1464. return false;
  1465. }
  1466. //1.控制SEM放大到300倍
  1467. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  1468. {
  1469. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  1470. arg.State = false;
  1471. SendMsg("1-24");
  1472. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1473. return false;
  1474. }
  1475. Thread.Sleep(200);
  1476. //iSEM.SetAutoVideoBrightnessAndContrast();
  1477. iSEM.SetAutoVideoOff();
  1478. Thread.Sleep(200);
  1479. iSEM.SetBrightness(50.0f);
  1480. Thread.Sleep(200);
  1481. iSEM.SetContrast(30.0f);
  1482. Thread.Sleep(5000);
  1483. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1484. if (mag < 200)
  1485. {
  1486. mag = 200;
  1487. }
  1488. if (!iSEM.SetMagnification(mag))
  1489. {
  1490. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1491. arg.State = false;
  1492. SendMsg("1-24");
  1493. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1494. return false;
  1495. }
  1496. Thread.Sleep(200);
  1497. float current = iSEM.GetMagnification();
  1498. Thread.Sleep(200);
  1499. while (Math.Abs(current - mag) > 2)
  1500. {
  1501. iSEM.SetMagnification(mag);
  1502. Thread.Sleep(200);
  1503. current = iSEM.GetMagnification();
  1504. Thread.Sleep(200);
  1505. }
  1506. arg.State = true;
  1507. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1508. SendMsg("1-24");
  1509. Thread.Sleep(2000);
  1510. //判断是否停止进程
  1511. if (key_stop)
  1512. {
  1513. LogManager.AddHardwareLog("停止键按下", true);
  1514. return false;
  1515. }
  1516. //3.控制SEM拍照
  1517. String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1518. arg.Picture_Information.Picture_FullPath = fileName4;
  1519. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1520. Thread.Sleep(200);
  1521. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1522. Thread.Sleep(200);
  1523. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1524. Thread.Sleep(200);
  1525. //拍照前改变速度,延时
  1526. iSEM.CmdSaveRate();
  1527. Thread.Sleep(200);
  1528. cycle_time = iSEM.GetCycleTime();
  1529. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1530. if (!GetImage(fileName4))
  1531. {
  1532. arg.State = false;
  1533. arg.Message = "SEM拍照找切割位置失败";
  1534. SendMsg("1-25");
  1535. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1536. return false;
  1537. }
  1538. arg.Picture_Information.Picture_FullPath = fileName4;
  1539. arg.State = true;
  1540. arg.Message = "SEM拍照成功";
  1541. SendMsg("1-25");
  1542. iSEM.CmdFocusRate(4);
  1543. Thread.Sleep(200);
  1544. cycle_time = iSEM.GetCycleTime();
  1545. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1546. //判断是否停止进程
  1547. if (key_stop)
  1548. {
  1549. return false;
  1550. }
  1551. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1552. //5.根据坐标控制SEM移动到切孔位置,居中
  1553. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  1554. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  1555. wr.Img_Trapezoid_Top_Center_Position(fileName4,Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  1556. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1557. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1558. if (state == 1)
  1559. {
  1560. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1561. if (!MoveToPixByMoveStage(x2, y2))
  1562. {
  1563. arg.State = false;
  1564. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1565. SendMsg("1-26");
  1566. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1567. return false;
  1568. }
  1569. //判断是否移动完成
  1570. while (true)
  1571. {
  1572. Thread.Sleep(4000);
  1573. if (iSEM.GetStageIs() == 0)
  1574. {
  1575. break;
  1576. }
  1577. }
  1578. arg.State = true;
  1579. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1580. SendMsg("1-26");
  1581. //高倍到低倍不进行对焦
  1582. //拍照前改变速度,延时
  1583. iSEM.CmdSaveRate();
  1584. Thread.Sleep(200);
  1585. cycle_time = iSEM.GetCycleTime();
  1586. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1587. String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1588. if (!GetImage(fileName10))
  1589. {
  1590. //arg.State = false;
  1591. //arg.Message = "SEM拍照失败";
  1592. //SendMsg("1-25");
  1593. //return false;
  1594. LogManager.AddHardwareLog("测量线程报错:找到已切割的位置拍照失败", true);
  1595. }
  1596. iSEM.CmdFocusRate(4);
  1597. Thread.Sleep(200);
  1598. cycle_time = iSEM.GetCycleTime();
  1599. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1600. if (hand_intervene == 1)
  1601. {
  1602. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1603. }
  1604. }
  1605. else
  1606. {
  1607. arg.Message = "图像接口参数state返回值为零";
  1608. arg.State = false;
  1609. SendMsg("1-26");
  1610. if (hand_intervene == 1)
  1611. {
  1612. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1613. {
  1614. return false;
  1615. }
  1616. }
  1617. else
  1618. {
  1619. return false;
  1620. }
  1621. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1622. return false;
  1623. }
  1624. //判断是否停止进程
  1625. if (key_stop)
  1626. {
  1627. LogManager.AddHardwareLog("停止键按下", true);
  1628. return false;
  1629. }
  1630. return true;
  1631. }
  1632. /// <summary>
  1633. /// 17.自动控制SEM拍截面照
  1634. /// </summary>
  1635. /// <returns></returns>
  1636. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1637. {
  1638. int state = 0;
  1639. #region 设置拍照的电压
  1640. LogManager.AddHardwareLog("测量线程:设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true);
  1641. //1、放大倍数参数photograph_
  1642. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Photograph_Voltage))
  1643. {
  1644. arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1645. arg.State = false;
  1646. SendMsg("1-27");
  1647. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1648. return false;
  1649. }
  1650. #endregion
  1651. Thread.Sleep(200);
  1652. #region 设置拍照的放大倍数
  1653. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数====" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  1654. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  1655. {
  1656. arg.Message = "放大倍数调整失败";
  1657. arg.State = false;
  1658. SendMsg("1-27");
  1659. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1660. return false;
  1661. }
  1662. float set = m_measureFile.MParam.Photograph_Magnification;
  1663. float current = iSEM.GetMagnification();
  1664. while(Math.Abs(current- set) > 1)
  1665. {
  1666. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  1667. Thread.Sleep(200);
  1668. current = iSEM.GetMagnification();
  1669. }
  1670. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString()+ "成功";
  1671. arg.State = true;
  1672. SendMsg("1-27");
  1673. Thread.Sleep(3000 + (Int32)cycle_time);
  1674. //判断是否停止进程
  1675. if (key_stop)
  1676. {
  1677. LogManager.AddHardwareLog("停止键按下", true);
  1678. return false;
  1679. }
  1680. #endregion
  1681. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1682. //if(!iSEM.SetAutoVideoBrightnessAndContrast())
  1683. //{
  1684. // LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1685. // return false;
  1686. //}
  1687. //Thread.Sleep(5000);
  1688. //2.控制SEM自动对焦、亮度、对比度-接口
  1689. iSEM.SetReduced(402, 128, 340, 256);
  1690. Thread.Sleep(200);
  1691. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1692. iSEM.CmdFocusRate(5);
  1693. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1694. Thread.Sleep(200);
  1695. cycle_time = iSEM.GetCycleTime();
  1696. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1697. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1698. if (!iSEM.SetAutoVideoOff())
  1699. {
  1700. LogManager.AddHardwareLog("测量线程报错:关闭自动亮度对比度失败", false);
  1701. return false;
  1702. }
  1703. Thread.Sleep(5000);
  1704. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1705. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1706. if (ImageFocus1(false))
  1707. {
  1708. arg.Message = "自动对焦完成";
  1709. arg.State = true;
  1710. SendMsg("1-28");
  1711. }
  1712. else
  1713. {
  1714. arg.Message = "自动对焦失败";
  1715. arg.State = false;
  1716. SendMsg("1-28");
  1717. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1718. return false;
  1719. }
  1720. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1721. iSEM.CloseReduced();
  1722. Thread.Sleep(200);
  1723. cycle_time = iSEM.GetCycleTime();
  1724. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1725. //判断是否停止进程
  1726. if (key_stop)
  1727. {
  1728. LogManager.AddHardwareLog("停止键按下", true);
  1729. return false;
  1730. }
  1731. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1732. {
  1733. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1734. return false;
  1735. }
  1736. Thread.Sleep(5000);
  1737. //3、设置SEM补偿角度
  1738. if (m_measureFile.MParam.Is_Photograph == false)
  1739. {
  1740. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString()+"度", true);
  1741. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1742. {
  1743. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1744. arg.State = false;
  1745. SendMsg("1-29");
  1746. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1747. return false;
  1748. }
  1749. arg.State = true;
  1750. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1751. SendMsg("1-29");
  1752. Thread.Sleep(200);
  1753. //判断是否停止进程
  1754. if (key_stop)
  1755. {
  1756. LogManager.AddHardwareLog("停止键按下", false);
  1757. return false;
  1758. }
  1759. }
  1760. //4、拍照,5、保存照片
  1761. String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1762. arg.Picture_Information.Picture_FullPath = fileName5;
  1763. arg.Picture_Information.Work_Status = "SEM";
  1764. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1765. Thread.Sleep(200);
  1766. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1767. Thread.Sleep(200);
  1768. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1769. Thread.Sleep(200);
  1770. //拍照前改变速度,延时
  1771. iSEM.CmdSaveRate();
  1772. Thread.Sleep(200);
  1773. cycle_time = iSEM.GetCycleTime();
  1774. Thread.Sleep(Convert.ToInt32(cycle_time)*2);
  1775. if (!GetImage(fileName5))
  1776. {
  1777. arg.Message = "SEM拍照失败";
  1778. arg.State = false;
  1779. SendMsg("1-30");
  1780. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1781. return false;
  1782. }
  1783. arg.Picture_Information.Picture_FullPath = fileName5;
  1784. arg.State = true;
  1785. arg.Message = "SEM拍照成功";
  1786. SendMsg("1-30");
  1787. iSEM.CmdFocusRate(4);
  1788. Thread.Sleep(200);
  1789. cycle_time = iSEM.GetCycleTime();
  1790. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1791. //判断是否停止进程
  1792. if (key_stop)
  1793. {
  1794. LogManager.AddHardwareLog("停止键按下", true);
  1795. return false;
  1796. }
  1797. #endregion
  1798. if (m_measureFile.MParam.Is_Photograph == false)
  1799. {
  1800. #region 对当前矩形进行旋转校正
  1801. //8,计算切割面区域偏移角度及方向
  1802. float degree = 0;
  1803. int direction = 0;
  1804. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  1805. LogManager.AddHardwareLog("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1806. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1807. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1808. if (state == 1)
  1809. {
  1810. //梯形角度
  1811. iSEM.SetScanRotationOn();
  1812. Thread.Sleep(200);
  1813. //20201128陈工要求,谭博返回角度*0.7
  1814. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  1815. Thread.Sleep(200);
  1816. arg.State = true;
  1817. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1818. SendMsg("1-31");
  1819. if (hand_intervene == 1)
  1820. {
  1821. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1822. }
  1823. }
  1824. else
  1825. {
  1826. arg.Message = "图像接口参数State返回值为零";
  1827. arg.State = false;
  1828. SendMsg("1-31");
  1829. if(hand_intervene == 1)
  1830. {
  1831. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1832. {
  1833. return false;
  1834. }
  1835. }
  1836. else
  1837. {
  1838. //return false;
  1839. }
  1840. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1841. }
  1842. //判断是否停止进程
  1843. if (key_stop)
  1844. {
  1845. LogManager.AddHardwareLog("停止键按下", true);
  1846. return false;
  1847. }
  1848. Thread.Sleep(200);
  1849. //12拍照
  1850. String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1851. arg.Picture_Information.Picture_FullPath = fileName6;
  1852. arg.Picture_Information.Work_Status = "SEM";
  1853. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1854. Thread.Sleep(200);
  1855. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1856. Thread.Sleep(200);
  1857. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1858. Thread.Sleep(200);
  1859. //拍照前改变速度,延时
  1860. iSEM.CmdSaveRate();
  1861. Thread.Sleep(200);
  1862. cycle_time = iSEM.GetCycleTime();
  1863. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1864. if (!GetImage(fileName6))
  1865. {
  1866. arg.Message = "SEM拍照失败";
  1867. arg.State = false;
  1868. SendMsg("1-33");
  1869. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1870. return false;
  1871. }
  1872. arg.Picture_Information.Picture_FullPath = fileName6;
  1873. arg.State = true;
  1874. arg.Message = "SEM拍照成功";
  1875. SendMsg("1-33");
  1876. iSEM.CmdFocusRate(4);
  1877. Thread.Sleep(200);
  1878. cycle_time = iSEM.GetCycleTime();
  1879. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1880. //判断是否停止进程
  1881. if (key_stop)
  1882. {
  1883. LogManager.AddHardwareLog("停止键按下", true);
  1884. return false;
  1885. }
  1886. #endregion
  1887. #region 获取两个位置上及放大倍数
  1888. //计算两个测量区域坐标
  1889. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1890. List<float> mag = new List<float>();
  1891. System.Drawing.Point ct0;
  1892. float mag1, mag2, magMax;
  1893. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1894. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  1895. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  1896. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1897. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  1898. "输入产品" + m_measureFile.MParam.Firm.ToString()
  1899. + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  1900. + "输出放大倍数1" + mag[0]
  1901. + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  1902. + "输出放大倍数2" + mag[0]
  1903. + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1904. #endregion
  1905. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1906. {
  1907. arg.State = true;
  1908. arg.Message = "获取位置及放大倍数成功";
  1909. SendMsg("1-34");
  1910. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1911. float xs = iSEM.GetBeamShiftX();
  1912. Thread.Sleep(200);
  1913. float ys = iSEM.GetBeamShiftY();
  1914. Thread.Sleep(200);
  1915. float xpCur = iSEM.GetStageAtX();
  1916. Thread.Sleep(200);
  1917. float ypCur = iSEM.GetStageAtY();
  1918. Thread.Sleep(200);
  1919. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  1920. + "y=" + ys.ToString() + ","
  1921. + "原来样品台的位置x= " + xpCur.ToString()
  1922. + "y=" + ypCur.ToString(), true);
  1923. #endregion
  1924. //找到放大倍数最大值
  1925. magMax = mag[0];
  1926. for (int m = 1; m < mag.Count; m++)
  1927. {
  1928. if (mag[m] > magMax)
  1929. {
  1930. magMax = mag[m];
  1931. }
  1932. }
  1933. #region 移动到梯形左上角
  1934. //20201127将视野移动到梯形左上角位置
  1935. MoveToPix(ct0.X, ct0.Y);
  1936. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  1937. + "," + ct0.Y.ToString() + ")", true);
  1938. //关闭自动亮度对比度
  1939. iSEM.SetAutoVideoOff();
  1940. Thread.Sleep(2000);
  1941. iSEM.SetReduced(402, 128, 340, 256);
  1942. Thread.Sleep(200);
  1943. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1944. iSEM.CmdFocusRate(5);
  1945. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1946. Thread.Sleep(200);
  1947. cycle_time = iSEM.GetCycleTime();
  1948. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1949. //放大到10000倍
  1950. iSEM.SetMagnification(magMax / 2);
  1951. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1952. set = magMax / 2;
  1953. current = iSEM.GetMagnification();
  1954. while (Math.Abs(current - set) > 1)
  1955. {
  1956. iSEM.SetMagnification(set);
  1957. Thread.Sleep(200);
  1958. current = iSEM.GetMagnification();
  1959. }
  1960. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--6000倍!", true);
  1961. //自动对焦
  1962. if (!ImageFocus1(true))
  1963. {
  1964. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦失败!", true);
  1965. return false;
  1966. }
  1967. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦成功!", true);
  1968. ////自动消像散
  1969. //if (!ImageStig1())
  1970. //{
  1971. // return false;
  1972. //}
  1973. //放大到10000倍
  1974. iSEM.SetMagnification(magMax);
  1975. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1976. set = magMax;
  1977. current = iSEM.GetMagnification();
  1978. while (Math.Abs(current - set) > 1)
  1979. {
  1980. iSEM.SetMagnification(set);
  1981. Thread.Sleep(200);
  1982. current = iSEM.GetMagnification();
  1983. }
  1984. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--12000倍!", true);
  1985. //自动对焦
  1986. if (!ImageFocus1(true))
  1987. {
  1988. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦失败!", true);
  1989. return false;
  1990. }
  1991. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦成功!", true);
  1992. ////自动消像散
  1993. //if (!ImageStig1())
  1994. //{
  1995. // return false;
  1996. //}
  1997. ////放大到20000倍
  1998. //iSEM.SetMagnification(magMax*2);
  1999. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2000. //set = magMax*2;
  2001. //current = iSEM.GetMagnification();
  2002. //while (Math.Abs(current - set) > 1)
  2003. //{
  2004. // iSEM.SetMagnification(set);
  2005. // Thread.Sleep(200);
  2006. // current = iSEM.GetMagnification();
  2007. //}
  2008. ////自动对焦
  2009. //if (!ImageFocus1())
  2010. //{
  2011. // return false;
  2012. //}
  2013. iSEM.CloseReduced();
  2014. Thread.Sleep(200);
  2015. cycle_time = iSEM.GetCycleTime();
  2016. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2017. #endregion
  2018. #region 循环拍照
  2019. for (int n = 0; n < ct.Count; n++)
  2020. {
  2021. #region 恢复到拍照的状态
  2022. iSEM.SetStageGotoX(xpCur);
  2023. while (true)
  2024. {
  2025. Thread.Sleep(4000);
  2026. if (iSEM.GetStageIs() == 0)
  2027. {
  2028. break;
  2029. }
  2030. }
  2031. iSEM.SetStageGotoY(ypCur);
  2032. while (true)
  2033. {
  2034. Thread.Sleep(4000);
  2035. if (iSEM.GetStageIs() == 0)
  2036. {
  2037. break;
  2038. }
  2039. }
  2040. //恢复原来的放大倍数
  2041. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  2042. {
  2043. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2044. return false;
  2045. }
  2046. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2047. set = m_measureFile.MParam.Photograph_Magnification;
  2048. current = iSEM.GetMagnification();
  2049. while (Math.Abs(current - set) > 1)
  2050. {
  2051. iSEM.SetMagnification(set);
  2052. Thread.Sleep(200);
  2053. current = iSEM.GetMagnification();
  2054. }
  2055. //恢复BeamShift的百分比值
  2056. iSEM.SetBeamShiftX(xs);
  2057. Thread.Sleep(200);
  2058. iSEM.SetBeamShiftY(ys);
  2059. Thread.Sleep(200);
  2060. #endregion
  2061. #region 移动到指定点位置
  2062. if (!MoveToPix(ct[n].X, ct[n].Y))
  2063. {
  2064. arg.State = false;
  2065. arg.Message = "移动到第一个点位置失败";
  2066. SendMsg("1-" + (35 + n).ToString());
  2067. //移动到第一个点失败
  2068. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2069. }
  2070. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2071. + "," + ct[n].Y.ToString() + ")", true);
  2072. #endregion
  2073. #region 如果是第一个点,则1W倍对焦
  2074. if (n == 0)
  2075. {
  2076. ////在第一个点上放大1W倍对焦
  2077. //if (!iSEM.SetMagnification(mag[n]))
  2078. //{
  2079. // LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2080. // return false;
  2081. //}
  2082. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2083. //while (true)
  2084. //{
  2085. // current = iSEM.GetMagnification();
  2086. // if (Math.Abs(current - mag[n]) < 1)
  2087. // {
  2088. // Thread.Sleep(200);
  2089. // break;
  2090. // }
  2091. // Thread.Sleep(200);
  2092. // iSEM.SetMagnification(set);
  2093. // Thread.Sleep(200);
  2094. //}
  2095. //if (m_measureFile.MParam.SampleName == "2")
  2096. //{
  2097. // //窗口对焦
  2098. // iSEM.SetReduced1(340, 1, 340, 256);
  2099. // Thread.Sleep(200);
  2100. // iSEM.CmdFocusRate();
  2101. // Thread.Sleep(200);
  2102. // cycle_time = iSEM.GetCycleTime();
  2103. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2104. // //自动对焦
  2105. // if (!ImageFocus1(false))
  2106. // {
  2107. // return false;
  2108. // }
  2109. // //恢复全屏
  2110. // iSEM.CloseReduced();
  2111. // Thread.Sleep(200);
  2112. // cycle_time = iSEM.GetCycleTime();
  2113. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2114. //}
  2115. //else
  2116. //{
  2117. // //窗口对焦
  2118. // //iSEM.SetReduced(402, 128, 800, 600);
  2119. // //Thread.Sleep(200);
  2120. // iSEM.CmdFocusRate();
  2121. // Thread.Sleep(200);
  2122. // cycle_time = iSEM.GetCycleTime();
  2123. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2124. // //自动对焦
  2125. // if (!ImageFocus1(false))
  2126. // {
  2127. // return false;
  2128. // }
  2129. // //恢复全屏
  2130. // //iSEM.CloseReduced();
  2131. // //Thread.Sleep(200);
  2132. // cycle_time = iSEM.GetCycleTime();
  2133. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2134. //}
  2135. LogManager.AddHardwareLog("========测量线程:进入内部观察,不对焦!", true);
  2136. //增亮图像
  2137. iSEM.SetAutoVideoOff();
  2138. Thread.Sleep(200);
  2139. float currentBright = iSEM.GetBrightness();
  2140. Thread.Sleep(200);
  2141. float currentContrast = iSEM.GetContrast();
  2142. Thread.Sleep(200);
  2143. iSEM.SetBrightness(currentBright + 2);
  2144. Thread.Sleep(200);
  2145. iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
  2146. Thread.Sleep(200);
  2147. }
  2148. #endregion
  2149. #region 拍照
  2150. if (!iSEM.SetMagnification(mag[n]))
  2151. {
  2152. arg.State = false;
  2153. arg.Message = "移动到第一个点位置拍照失败";
  2154. SendMsg("1-35");
  2155. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2156. return false;
  2157. }
  2158. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成!", true);
  2159. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2160. set = mag[n];
  2161. current = iSEM.GetMagnification();
  2162. while (Math.Abs(current - set) > 1)
  2163. {
  2164. iSEM.SetMagnification(set);
  2165. Thread.Sleep(200);
  2166. current = iSEM.GetMagnification();
  2167. }
  2168. //获取像素大小
  2169. lsize.Add(iSEM.GetPixelSize());
  2170. Thread.Sleep(200);
  2171. String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2172. arg.Picture_Information.Picture_FullPath = fileName7;
  2173. arg.Picture_Information.Work_Status = "SEM";
  2174. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2175. Thread.Sleep(200);
  2176. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2177. Thread.Sleep(200);
  2178. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2179. Thread.Sleep(200);
  2180. //拍照前改变速度,延时
  2181. iSEM.CmdLineScan();
  2182. Thread.Sleep(200);
  2183. cycle_time = iSEM.GetCycleTime();
  2184. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2185. if (!GetImage(fileName7))
  2186. {
  2187. arg.State = false;
  2188. arg.Message = "移动到第一个点位置失败";
  2189. SendMsg("1-35");
  2190. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2191. return false;
  2192. }
  2193. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  2194. iSEM.CmdPixelScan();
  2195. Thread.Sleep(200);
  2196. limg_path.Add(fileName7);
  2197. arg.Picture_Information.Picture_FullPath = fileName7;
  2198. arg.State = true;
  2199. arg.Message = "移动到第一个点位置拍照成功";
  2200. SendMsg("1-35");
  2201. iSEM.CmdFocusRate(4);
  2202. Thread.Sleep(200);
  2203. cycle_time = iSEM.GetCycleTime();
  2204. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2205. #endregion
  2206. }
  2207. #endregion
  2208. if (hand_intervene == 1)
  2209. {
  2210. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2211. }
  2212. }
  2213. else
  2214. {
  2215. if (hand_intervene == 1)
  2216. {
  2217. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2218. {
  2219. // return false;
  2220. }
  2221. }
  2222. else
  2223. {
  2224. //return false;
  2225. }
  2226. arg.State = false;
  2227. arg.Message = "获取位置及放大倍数失败";
  2228. SendMsg("1-34");
  2229. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2230. }
  2231. //判断是否停止进程
  2232. if (key_stop)
  2233. {
  2234. LogManager.AddHardwareLog("停止键按下", true);
  2235. return false;
  2236. }
  2237. }
  2238. ////14光束复位和Rotation关闭开关
  2239. //arg.Message = "光束复位成功";
  2240. //arg.State = true;
  2241. //SendMsg("1-36");
  2242. iSEM.SetTiltAngleOff();
  2243. Thread.Sleep(200);
  2244. iSEM.SetScanRotationOff();
  2245. Thread.Sleep(200);
  2246. iSEM.SetBeamShiftX(0);
  2247. Thread.Sleep(200);
  2248. iSEM.SetBeamShiftY(0);
  2249. Thread.Sleep(200);
  2250. //判断是否停止进程
  2251. if (key_stop)
  2252. {
  2253. return false;
  2254. }
  2255. return true;
  2256. }
  2257. //第一个孔的测试过程
  2258. public bool FirstHole()
  2259. {
  2260. //设置拉直的放大倍数
  2261. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), true);
  2262. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2263. {
  2264. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), false);
  2265. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2266. arg.State = false;
  2267. SendMsg("1-1");
  2268. return false;
  2269. }
  2270. float current = iSEM.GetMagnification();
  2271. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2272. {
  2273. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2274. Thread.Sleep(200);
  2275. current = iSEM.GetMagnification();
  2276. }
  2277. arg.Message = "拉直放大倍数设置成功!";
  2278. arg.State = true;
  2279. SendMsg("1-1");
  2280. Thread.Sleep(2000);
  2281. //自动化流程-每个点都需要补偿54度
  2282. if (m_measureFile.MParam.Is_Photograph == false)
  2283. {
  2284. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2285. if (!TiltCorrection(54.0f))
  2286. {
  2287. LogManager.AddHardwareLog("测量线程报错:倾斜补偿角度为54度失败", false);
  2288. arg.Message = "角度补偿54度失败!";
  2289. arg.State = false;
  2290. SendMsg("1-2");
  2291. return false;
  2292. }
  2293. arg.Message = "角度补偿54度成功!";
  2294. arg.State = true;
  2295. SendMsg("1-2");
  2296. Thread.Sleep(1000);
  2297. //判断是否停止进程
  2298. if (key_stop)
  2299. {
  2300. LogManager.AddHardwareLog("停止键按下", true);
  2301. return false;
  2302. }
  2303. }
  2304. // by sun:2是5/6类样品,不需要拉直
  2305. if (m_measureFile.MParam.SampleName != "2")
  2306. {
  2307. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2308. if (!Straighten_Handle())
  2309. {
  2310. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2311. return false;
  2312. }
  2313. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2314. //判断是否停止进程
  2315. if (key_stop)
  2316. {
  2317. LogManager.AddHardwareLog("停止键按下。", true);
  2318. return false;
  2319. }
  2320. }
  2321. else
  2322. {
  2323. arg.Message = "拉直操作自动对焦成功!";
  2324. arg.State = true;
  2325. SendMsg("1-3");
  2326. Thread.Sleep(1000);
  2327. arg.Message = "拉直拍照成功!";
  2328. arg.Picture_Information.Picture_FullPath = "";
  2329. arg.State = true;
  2330. SendMsg("1-4");
  2331. Thread.Sleep(1000);
  2332. arg.Message = "拉直操作完成";
  2333. arg.State = true;
  2334. SendMsg("1-5");
  2335. Thread.Sleep(1000);
  2336. }
  2337. //13. 自动 定位功能
  2338. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2339. if (!GetPoistion())
  2340. {
  2341. LogManager.AddHardwareLog("测量线程报错:自动定位失败,程序退出。", false);
  2342. return false;
  2343. }
  2344. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2345. //判断是否停止进程
  2346. if (key_stop)
  2347. {
  2348. LogManager.AddHardwareLog("停止键按下。", true);
  2349. return false;
  2350. }
  2351. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2352. //if (m_measureFile.MParam.Is_Photograph == false)
  2353. //{
  2354. // LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!", true);
  2355. // if (!FIBCross())
  2356. // {
  2357. // LogManager.AddHardwareLog("测量线程报错:自动控制FIB切割失败。", false);
  2358. // return false;
  2359. // }
  2360. // LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2361. //}
  2362. //del by sun 2020-12-15 temp end
  2363. //判断是否停止进程
  2364. if (key_stop)
  2365. {
  2366. return false;
  2367. }
  2368. //16.找到切割位置
  2369. if (m_measureFile.MParam.Is_Photograph == false)
  2370. {
  2371. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2372. if (!FindCross())
  2373. {
  2374. return false;
  2375. }
  2376. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2377. //判断是否停止进程
  2378. if (key_stop)
  2379. {
  2380. return false;
  2381. }
  2382. }
  2383. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2384. //将过程17最后的拍照图片提出给18步进行调用
  2385. List<String> limg_path = new List<string>();
  2386. List<float> lsize = new List<float>();
  2387. //17.自动控制SEM拍截面照
  2388. if (!ShotSection(ref limg_path, ref lsize))
  2389. {
  2390. //return false;
  2391. }
  2392. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2393. //判断是否停止进程
  2394. if (key_stop)
  2395. {
  2396. return false;
  2397. }
  2398. //这段是临时的
  2399. //arg.State = true;
  2400. //arg.Message = "测量尺寸成功";
  2401. //SendMsg("1-40");
  2402. //18.自动层高分析
  2403. if (m_measureFile.MParam.Is_Photograph == false)
  2404. {
  2405. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2406. float size = iSEM.GetPixelSize();
  2407. int state = 1;
  2408. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2409. if (state == 0)
  2410. {
  2411. arg.Message = "测量尺寸失败";
  2412. arg.State = false;
  2413. SendMsg("1-40");
  2414. return false;
  2415. }
  2416. arg.State = true;
  2417. arg.Message = "测量尺寸成功";
  2418. SendMsg("1-40");
  2419. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2420. }
  2421. //19.能谱分析
  2422. if (m_measureFile.MParam.EDS)
  2423. {
  2424. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析开始===" + m_measureFile.MParam.EDS, true);
  2425. EDSAnalysis();
  2426. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析结束===" + m_measureFile.MParam.EDS, true);
  2427. }
  2428. //20.复位
  2429. LogManager.AddHardwareLog("===========测量线程:20.复位开始", true);
  2430. BeamShiftReset();
  2431. return true;
  2432. }
  2433. //非第一个孔的测试过程
  2434. public bool OtherHole()
  2435. {
  2436. //设置拉直的放大倍数
  2437. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2438. {
  2439. LogManager.AddHardwareLog("拉直放大倍数设置失败,程序退出。", true);
  2440. arg.Message = "拉直放大倍数设置失败!";
  2441. arg.State = false;
  2442. SendMsg("1-1");
  2443. return false;
  2444. }
  2445. float current = iSEM.GetMagnification();
  2446. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2447. {
  2448. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2449. Thread.Sleep(200);
  2450. current = iSEM.GetMagnification();
  2451. }
  2452. arg.Message = "拉直放大倍数设置成功!";
  2453. arg.State = true;
  2454. SendMsg("1-1");
  2455. Thread.Sleep(2000);
  2456. //自动化流程-每个点都需要补偿54度
  2457. if (m_measureFile.MParam.Is_Photograph == false)
  2458. {
  2459. if (!TiltCorrection(54.0f))
  2460. {
  2461. arg.Message = "角度补偿54度失败!";
  2462. arg.State = false;
  2463. SendMsg("1-2");
  2464. return false;
  2465. }
  2466. arg.Message = "角度补偿54度成功!";
  2467. arg.State = true;
  2468. SendMsg("1-2");
  2469. Thread.Sleep(2000);
  2470. //判断是否停止进程
  2471. if (key_stop)
  2472. {
  2473. return false;
  2474. }
  2475. }
  2476. if (m_measureFile.MParam.SampleName != "2")
  2477. {
  2478. if (!Straighten_Handle())
  2479. {
  2480. LogManager.AddHardwareLog("测量线程报错:拉直操作失败。", true);
  2481. return false;
  2482. }
  2483. //判断是否停止进程
  2484. if (key_stop)
  2485. {
  2486. LogManager.AddHardwareLog("停止键按下。", true);
  2487. return false;
  2488. }
  2489. }
  2490. else
  2491. {
  2492. arg.Message = "拉直操作自动对焦成功!";
  2493. arg.State = true;
  2494. SendMsg("1-3");
  2495. Thread.Sleep(1000);
  2496. arg.Message = "拉直拍照成功!";
  2497. arg.Picture_Information.Picture_FullPath = "";
  2498. arg.State = true;
  2499. SendMsg("1-4");
  2500. Thread.Sleep(1000);
  2501. arg.Message = "拉直操作完成";
  2502. arg.State = true;
  2503. SendMsg("1-5");
  2504. }
  2505. //13. 自动 定位功能
  2506. if (!GetPoistion())
  2507. {
  2508. return false;
  2509. }
  2510. //判断是否停止进程
  2511. if (key_stop)
  2512. {
  2513. return false;
  2514. }
  2515. //14.自动控制FIB切割
  2516. if (m_measureFile.MParam.Is_Photograph == false)
  2517. {
  2518. if (!FIBCross())
  2519. {
  2520. return false;
  2521. }
  2522. }
  2523. //判断是否停止进程
  2524. if (key_stop)
  2525. {
  2526. return false;
  2527. }
  2528. // 16.找到切割位置
  2529. if (m_measureFile.MParam.Is_Photograph == false)
  2530. {
  2531. if (!FindCross())
  2532. {
  2533. return false;
  2534. }
  2535. //判断是否停止进程
  2536. if (key_stop)
  2537. {
  2538. return false;
  2539. }
  2540. }
  2541. //将过程17最后的拍照图片提出给18步进行调用
  2542. List<String> limg_path = new List<string>();
  2543. List<float> lsize = new List<float>();
  2544. //17.自动控制SEM拍截面照
  2545. if (!ShotSection(ref limg_path, ref lsize))
  2546. {
  2547. //return false;
  2548. }
  2549. //判断是否停止进程
  2550. if (key_stop)
  2551. {
  2552. return false;
  2553. }
  2554. //这段是临时的
  2555. //arg.State = true;
  2556. //arg.Message = "测量尺寸成功";
  2557. //SendMsg("1-40");
  2558. //18.自动层高分析
  2559. if (m_measureFile.MParam.Is_Photograph == false)
  2560. {
  2561. float size = iSEM.GetPixelSize();
  2562. int state = 1;
  2563. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2564. if (state == 0)
  2565. {
  2566. arg.Message = "测量尺寸失败";
  2567. arg.State = false;
  2568. SendMsg("1-40");
  2569. return false;
  2570. }
  2571. arg.State = true;
  2572. arg.Message = "测量尺寸成功";
  2573. SendMsg("1-40");
  2574. }
  2575. //19.能谱分析
  2576. if (m_measureFile.MParam.EDS)
  2577. {
  2578. EDSAnalysis();
  2579. }
  2580. //20.复位 del by sun 2020-12-15
  2581. //BeamShiftReset();
  2582. //del by sun 2020-12-15 end
  2583. return true;
  2584. }
  2585. //测试完第一个孔后的样品台初始化操作。
  2586. //再调用CommonWork执行非第一个孔的测试过程
  2587. public bool OtherHole_Init()
  2588. {
  2589. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2590. #region 初始化
  2591. //1、不只拍照,且不是倾斜观测,则移动T轴
  2592. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2593. {
  2594. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2595. if (!iSEM.SetStageGotoT(0))
  2596. {
  2597. LogManager.AddHardwareLog("样品台归零失败", false);
  2598. return false;
  2599. }
  2600. while (true)
  2601. {
  2602. Thread.Sleep(5000);
  2603. if (iSEM.GetStageIs() == 0)
  2604. {
  2605. break;
  2606. }
  2607. }
  2608. //判断是否停止进程
  2609. if (key_stop)
  2610. {
  2611. LogManager.AddHardwareLog("停止键按下", true);
  2612. return false;
  2613. }
  2614. }
  2615. //2、如果是倾斜观测,则移动Z轴
  2616. if(m_measureFile.MParam.Title==true)
  2617. {
  2618. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2619. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_measureFile.MParam.ZDistance/1000))
  2620. //20201109, Z轴降到安全的位置上
  2621. if(!iSEM.SetStageGotoZ(fSateyZ))
  2622. {
  2623. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2624. return false;
  2625. }
  2626. while (true)
  2627. {
  2628. Thread.Sleep(5000);
  2629. if (iSEM.GetStageIs() == 0)
  2630. {
  2631. break;
  2632. }
  2633. }
  2634. //判断是否停止进程
  2635. if (key_stop)
  2636. {
  2637. LogManager.AddHardwareLog("停止键按下", true);
  2638. return false;
  2639. }
  2640. }
  2641. //3. 根据光镜坐标控制样品台移动
  2642. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2643. {
  2644. //SendMsg("移动失败");
  2645. LogManager.AddHardwareLog("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2646. return false;
  2647. }
  2648. LogManager.AddHardwareLog("移动R轴到="+ currentHole.Position.R.ToString(), true);
  2649. while (true)
  2650. {
  2651. Thread.Sleep(5000);
  2652. if (iSEM.GetStageIs() == 0)
  2653. {
  2654. break;
  2655. }
  2656. }
  2657. //判断是否停止进程
  2658. if (key_stop)
  2659. {
  2660. LogManager.AddHardwareLog("停止键按下", true);
  2661. return false;
  2662. }
  2663. if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2664. {
  2665. //SendMsg("移动失败");
  2666. LogManager.AddHardwareLog("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString()+"," +currentHole.Position.X.ToString()+")", false);
  2667. return false;
  2668. }
  2669. LogManager.AddHardwareLog("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2670. while (true)
  2671. {
  2672. Thread.Sleep(10000);
  2673. if (iSEM.GetStageIs() == 0)
  2674. {
  2675. break;
  2676. }
  2677. }
  2678. //判断是否停止进程
  2679. if (key_stop)
  2680. {
  2681. LogManager.AddHardwareLog("停止键按下", true);
  2682. return false;
  2683. }
  2684. //4、倾斜观测时恢复Z轴
  2685. if (m_measureFile.MParam.Title == true)
  2686. {
  2687. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2688. if (currentHole.Position.Z > 0.043)
  2689. {
  2690. LogManager.AddHardwareLog("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2691. return false;
  2692. }
  2693. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2694. {
  2695. LogManager.AddHardwareLog("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2696. return false;
  2697. }
  2698. while (true)
  2699. {
  2700. Thread.Sleep(5000);
  2701. if (iSEM.GetStageIs() == 0)
  2702. {
  2703. break;
  2704. }
  2705. }
  2706. //判断是否停止进程
  2707. if (key_stop)
  2708. {
  2709. LogManager.AddHardwareLog("停止键按下", true);
  2710. return false;
  2711. }
  2712. }
  2713. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2714. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2715. {
  2716. if (!iSEM.SetStageGotoT(54))
  2717. {
  2718. LogManager.AddHardwareLog("测量线程报错:校正54度有误", true);
  2719. return false;
  2720. }
  2721. while (true)
  2722. {
  2723. Thread.Sleep(5000);
  2724. if (iSEM.GetStageIs() == 0)
  2725. {
  2726. break;
  2727. }
  2728. }
  2729. }
  2730. //判断是否停止进程
  2731. if (key_stop)
  2732. {
  2733. LogManager.AddHardwareLog("停止键按下", true);
  2734. return false;
  2735. }
  2736. //4、设置WD
  2737. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2738. Thread.Sleep(1000);
  2739. #endregion
  2740. return true;
  2741. }
  2742. //初始化拉直操作
  2743. public bool Straighten_Handle()
  2744. {
  2745. if (m_measureFile.MParam.Title)
  2746. {
  2747. //倾斜样品台,SEM视野是黑色的
  2748. LogManager.AddHardwareLog("测量线程:恢复到工作位置后重新调亮图像。", true);
  2749. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2750. {
  2751. LogManager.AddHardwareLog("测量线程报错:重新设置到标准工作距离失败。", false);
  2752. return false;
  2753. }
  2754. Thread.Sleep(7000); //自动亮度对比度使用
  2755. }
  2756. //1、自动对焦
  2757. LogManager.AddHardwareLog("测量线程报错:拉直操作前自动对焦开始", true);
  2758. iSEM.SetReduced(402, 128, 340, 256);
  2759. Thread.Sleep(200);
  2760. //add by sun 2020-12-15
  2761. iSEM.CmdFocusRate(5);
  2762. //add by sun 2020-12-15 end
  2763. Thread.Sleep(200);
  2764. cycle_time = iSEM.GetCycleTime();
  2765. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2766. iSEM.SetAutoVideoOff();
  2767. Thread.Sleep(200);
  2768. iSEM.SetBrightness(50.0f);
  2769. Thread.Sleep(200);
  2770. iSEM.SetContrast(30.0f);
  2771. Thread.Sleep(200);
  2772. if (!ImageFocus1(false))
  2773. {
  2774. LogManager.AddHardwareLog("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2775. arg.Message = "拉直操作自动对焦失败!";
  2776. arg.State = false;
  2777. SendMsg("1-3");
  2778. return false;
  2779. }
  2780. iSEM.CloseReduced();
  2781. Thread.Sleep(200);
  2782. cycle_time = iSEM.GetCycleTime();
  2783. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2784. iSEM.SetAutoVideoBrightnessAndContrast();
  2785. Thread.Sleep(5000);
  2786. arg.Message = "拉直操作自动对焦成功!";
  2787. arg.State = true;
  2788. SendMsg("1-3");
  2789. //判断是否停止进程
  2790. if (key_stop)
  2791. {
  2792. LogManager.AddHardwareLog("停止键按下。", true);
  2793. return false;
  2794. }
  2795. //2、拍张照片
  2796. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2797. LogManager.AddHardwareLog("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2798. //拍照前改变速度,延时
  2799. iSEM.CmdSaveRate();
  2800. Thread.Sleep(200);
  2801. cycle_time = iSEM.GetCycleTime();
  2802. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2803. if (!GetImage(fileName0))
  2804. {
  2805. LogManager.AddHardwareLog("测量线程报错:拉直拍照失败", false);
  2806. arg.Message = "拉直拍照失败";
  2807. arg.State = false;
  2808. SendMsg("1-4");
  2809. return false;
  2810. }
  2811. arg.Message = "拉直拍照成功!";
  2812. arg.Picture_Information.Picture_FullPath = fileName0;
  2813. arg.State = true;
  2814. SendMsg("1-4");
  2815. iSEM.CmdFocusRate(4);
  2816. Thread.Sleep(200);
  2817. cycle_time = iSEM.GetCycleTime();
  2818. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2819. //3、华为接口,获取旋转角度
  2820. float degree = 0;
  2821. int direction = 0;
  2822. int state = 1;
  2823. wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  2824. LogManager.AddHardwareLog("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  2825. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2826. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2827. if (state == 0)
  2828. {
  2829. LogManager.AddHardwareLog("测量线程:图像处理接口参数state返回为零" ,false);
  2830. arg.Message = "图像处理接口参数state返回为零";
  2831. arg.State = false;
  2832. SendMsg("1-5");
  2833. if (hand_intervene == 1)
  2834. {
  2835. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2836. {
  2837. return false;
  2838. }
  2839. }
  2840. else
  2841. {
  2842. return false;
  2843. }
  2844. return false;
  2845. }
  2846. if (direction == 2)
  2847. {
  2848. degree = -degree;
  2849. }
  2850. if (degree != 0)
  2851. {
  2852. //4、拉直,旋转R轴
  2853. LogManager.AddHardwareLog("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  2854. //选择之前,先降Z轴
  2855. float Zpos = iSEM.GetStageAtZ();
  2856. Thread.Sleep(200);
  2857. LogManager.AddHardwareLog("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  2858. if (!iSEM.SetStageGotoZ(fSateyZ))
  2859. {
  2860. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2861. return false;
  2862. }
  2863. while (true)
  2864. {
  2865. Thread.Sleep(4000);
  2866. if (iSEM.GetStageIs() == 0)
  2867. {
  2868. break;
  2869. }
  2870. }
  2871. //判断是否停止进程
  2872. if (key_stop)
  2873. {
  2874. LogManager.AddHardwareLog("停止键按下", true);
  2875. return false;
  2876. }
  2877. iSEM.SetStageDeltaR(degree);
  2878. while (true)
  2879. {
  2880. Thread.Sleep(4000);
  2881. if (iSEM.GetStageIs() == 0)
  2882. {
  2883. break;
  2884. }
  2885. }
  2886. if (!iSEM.SetStageGotoZ(Zpos))
  2887. {
  2888. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2889. return false;
  2890. }
  2891. while (true)
  2892. {
  2893. Thread.Sleep(4000);
  2894. if (iSEM.GetStageIs() == 0)
  2895. {
  2896. break;
  2897. }
  2898. }
  2899. //判断是否停止进程
  2900. if (key_stop)
  2901. {
  2902. LogManager.AddHardwareLog("停止键按下", true);
  2903. return false;
  2904. }
  2905. //4、设置WD
  2906. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2907. Thread.Sleep(1000);
  2908. }
  2909. arg.Message = "拉直操作完成";
  2910. arg.State = true;
  2911. SendMsg("1-5");
  2912. return true;
  2913. }
  2914. //角度补偿
  2915. public bool TiltCorrection(float a_fAngle)
  2916. {
  2917. if (!iSEM.SetTiltAngleOn())
  2918. {
  2919. return false;
  2920. }
  2921. Thread.Sleep(200);
  2922. //恢复原始状态
  2923. if (!iSEM.SetTiltAngle(a_fAngle))
  2924. {
  2925. return false;
  2926. }
  2927. return true;
  2928. }
  2929. //拍图
  2930. public bool GetImage(String a_fileName)
  2931. {
  2932. //3. 获取分辨率
  2933. int[] ImageSize = iSEM.GetImageStore();
  2934. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2935. {
  2936. return false;
  2937. }
  2938. short width = (short)ImageSize[0];
  2939. short height = (short)ImageSize[1];
  2940. //4. 抓图
  2941. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  2942. {
  2943. return false;
  2944. }
  2945. return true;
  2946. }
  2947. //拍图1
  2948. public bool GetImage1(String a_fileName)
  2949. {
  2950. //3. 获取分辨率
  2951. int[] ImageSize = iSEM.GetImageStore();
  2952. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2953. {
  2954. return false;
  2955. }
  2956. short width = (short)ImageSize[0];
  2957. short height = (short)ImageSize[1];
  2958. //4. 抓图
  2959. if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
  2960. {
  2961. return false;
  2962. }
  2963. return true;
  2964. }
  2965. #region 算法设计
  2966. //执行自动对焦
  2967. public bool ImageFocus()
  2968. {
  2969. if (m_measureFile.MParam.FocusMode == 1)//手动
  2970. {
  2971. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  2972. {
  2973. }
  2974. else
  2975. {
  2976. return false;
  2977. }
  2978. }
  2979. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  2980. {
  2981. //郝工增加自动对焦算法
  2982. //处理文件夹
  2983. if (Directory.Exists(focus_path))
  2984. {
  2985. Directory.Delete(focus_path, true);
  2986. }
  2987. Thread.Sleep(3000);
  2988. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2989. Thread.Sleep(1000);
  2990. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2991. Thread.Sleep(1000);
  2992. //再创建文件夹
  2993. Directory.CreateDirectory(focus_path);
  2994. //1、对焦参数类,2、输出工作距离
  2995. int wd = 0;
  2996. //20201015 根据当前的工作距离重新计算对焦位置
  2997. float currentWd = iSEM.GetWorkingDistance();
  2998. //m_measureFile.MParam.AutoFocus.UP = currentWd * 1000000 - m_measureFile.MParam.AutoFocus.Step;
  2999. //m_measureFile.MParam.AutoFocus.Down = currentWd * 1000000 + m_measureFile.MParam.AutoFocus.Step;
  3000. Thread.Sleep(2000);
  3001. float currentMag = iSEM.GetMagnification();
  3002. Thread.Sleep(2000);
  3003. FocusParam pFoucs = new FocusParam();
  3004. if (currentMag <= m_measureFile.MParam.Photograph_Magnification)
  3005. {
  3006. pFoucs = m_measureFile.MParam.AutoFocus;
  3007. pFoucs.UP = 5050;
  3008. pFoucs.Down = 5150;
  3009. pFoucs.Step = 50;
  3010. pFoucs.fStep = 10;
  3011. pFoucs.Range = 50;
  3012. //4、设置WD
  3013. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3014. Thread.Sleep(1000);
  3015. }
  3016. else
  3017. {
  3018. pFoucs = m_measureFile.MParam.AutoFocus;
  3019. pFoucs.UP = 5000;
  3020. pFoucs.Down = 5200;
  3021. pFoucs.Step = 10;
  3022. pFoucs.fStep = 5;
  3023. pFoucs.Range = 50;
  3024. //4、设置WD
  3025. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3026. Thread.Sleep(1000);
  3027. }
  3028. //LogManager.AddHardwareLog("修改对焦参数", true);
  3029. AutoFocus(pFoucs, out wd);
  3030. LogManager.AddHardwareLog("自动调节算法输出"+ (wd * 0.00000001).ToString(), true);
  3031. //设置工作距离
  3032. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  3033. //设置完工作距离后必须延迟5秒
  3034. Thread.Sleep(5000);
  3035. //处理图片位置
  3036. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3037. }
  3038. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3039. {
  3040. //后期和客户对接接口
  3041. List<string> filenames = new List<string>();
  3042. String retfilename = wr.Img_Auto_Focus(filenames);
  3043. }
  3044. else //蔡司自动对焦
  3045. {
  3046. iSEM.CmdAutoFocusCoarse();
  3047. while (true)
  3048. {
  3049. Thread.Sleep(10000);
  3050. if (0 == iSEM.GetAutoFunction())
  3051. {
  3052. break;
  3053. }
  3054. }
  3055. iSEM.CmdAutoFocusFine();
  3056. while (true)
  3057. {
  3058. Thread.Sleep(10000);
  3059. if (0 == iSEM.GetAutoFunction())
  3060. {
  3061. break;
  3062. }
  3063. }
  3064. }
  3065. return true;
  3066. }
  3067. //执行自动对焦
  3068. public bool ImageFocus1(Boolean Is_Stig)
  3069. {
  3070. if (m_measureFile.MParam.FocusMode == 1)//手动
  3071. {
  3072. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3073. {
  3074. }
  3075. else
  3076. {
  3077. return false;
  3078. }
  3079. }
  3080. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3081. {
  3082. #region 执行蔡司自动对焦程序
  3083. //服务地址
  3084. string snumstr = @"http://192.168.1.101:8123";
  3085. // 调用方法;只对焦不消像散
  3086. if (Is_Stig)
  3087. {
  3088. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);
  3089. if (focusstig != "success")
  3090. {
  3091. return false;
  3092. }
  3093. }
  3094. else
  3095. {
  3096. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);
  3097. if (onlyfocus != "success")
  3098. {
  3099. return false;
  3100. }
  3101. }
  3102. #endregion
  3103. }
  3104. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3105. {
  3106. //后期和客户对接接口
  3107. List<string> filenames = new List<string>();
  3108. String retfilename = wr.Img_Auto_Focus(filenames);
  3109. }
  3110. else //蔡司自动对焦
  3111. {
  3112. iSEM.CmdAutoFocusCoarse();
  3113. while (true)
  3114. {
  3115. Thread.Sleep(10000);
  3116. if (0 == iSEM.GetAutoFunction())
  3117. {
  3118. break;
  3119. }
  3120. }
  3121. iSEM.CmdAutoFocusFine();
  3122. while (true)
  3123. {
  3124. Thread.Sleep(10000);
  3125. if (0 == iSEM.GetAutoFunction())
  3126. {
  3127. break;
  3128. }
  3129. }
  3130. }
  3131. return true;
  3132. }
  3133. //执行自动消像散
  3134. public bool ImageStig()
  3135. {
  3136. if (m_measureFile.MParam.FocusMode == 1)//手动
  3137. {
  3138. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3139. {
  3140. }
  3141. else
  3142. {
  3143. return false;
  3144. }
  3145. }
  3146. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3147. {
  3148. //郝工增加自动对焦算法
  3149. //处理文件夹
  3150. if (Directory.Exists(StigX_path))
  3151. {
  3152. Directory.Delete(StigX_path, true);
  3153. }
  3154. Thread.Sleep(3000);
  3155. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3156. Thread.Sleep(1000);
  3157. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3158. Thread.Sleep(1000);
  3159. //再创建文件夹
  3160. Directory.CreateDirectory(StigX_path);
  3161. //1、对焦参数类,2、输出像散值
  3162. int stigX = 0;
  3163. //根据当前的stigX重新计算像散值
  3164. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3165. //m_measureFile.MParam.AutoStigX.Step = 10; //像散的步长为10
  3166. //m_measureFile.MParam.AutoStigX.UP = currentStigX - m_measureFile.MParam.AutoStigX.Step;
  3167. //m_measureFile.MParam.AutoStigX.Down = currentStigX + m_measureFile.MParam.AutoStigX.Step;
  3168. //设置工作距离
  3169. iSEM.SetAstigmatismX((float)0);
  3170. //设置完工作距离后必须延迟5秒
  3171. Thread.Sleep(5000);
  3172. //LogManager.AddHardwareLog("修改消像散参数", true);
  3173. AutoStig(m_measureFile.MParam.AutoStigX, out stigX);
  3174. LogManager.AddHardwareLog("自动消散算法输出X"+ (stigX * 0.01).ToString(), true);
  3175. //设置工作距离
  3176. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3177. //设置完工作距离后必须延迟5秒
  3178. Thread.Sleep(5000);
  3179. //处理图片位置
  3180. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3181. //处理文件夹
  3182. if (Directory.Exists(StigY_path))
  3183. {
  3184. Directory.Delete(StigY_path, true);
  3185. }
  3186. Thread.Sleep(3000);
  3187. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3188. Thread.Sleep(1000);
  3189. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3190. Thread.Sleep(1000);
  3191. //再创建文件夹
  3192. Directory.CreateDirectory(StigY_path);
  3193. //1、对焦参数类,2、输出像散值
  3194. int stigY = 0;
  3195. //根据当前的stigX重新计算像散值
  3196. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3197. //m_measureFile.MParam.AutoStigY.Step = 10; //像散的步长为10
  3198. //m_measureFile.MParam.AutoStigY.UP = m_measureFile.MParam.AutoStigY.;
  3199. //m_measureFile.MParam.AutoStigY.Down = m_measureFile.MParam.AutoStigY.Step;
  3200. iSEM.SetAstigmatismY((float)0);
  3201. Thread.Sleep(2000);
  3202. LogManager.AddHardwareLog("修改消像散参数", true);
  3203. AutoStig(m_measureFile.MParam.AutoStigY, out stigY);
  3204. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3205. //设置工作距离
  3206. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3207. //设置完工作距离后必须延迟5秒
  3208. Thread.Sleep(5000);
  3209. }
  3210. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3211. {
  3212. //后期和客户对接接口
  3213. List<string> filenames = new List<string>();
  3214. String retfilename = wr.Img_Auto_Focus(filenames);
  3215. }
  3216. else //蔡司自动对焦
  3217. {
  3218. iSEM.CmdAutoFocusCoarse();
  3219. while (true)
  3220. {
  3221. Thread.Sleep(10000);
  3222. if (0 == iSEM.GetAutoFunction())
  3223. {
  3224. break;
  3225. }
  3226. }
  3227. iSEM.CmdAutoFocusFine();
  3228. while (true)
  3229. {
  3230. Thread.Sleep(10000);
  3231. if (0 == iSEM.GetAutoFunction())
  3232. {
  3233. break;
  3234. }
  3235. }
  3236. }
  3237. return true;
  3238. }
  3239. //自动聚焦
  3240. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  3241. {
  3242. a_nWd = 0;
  3243. float wd = iSEM.GetWorkingDistance();
  3244. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3245. if (a_param == null)
  3246. {
  3247. LogManager.AddHardwareLog("空参数", true);
  3248. return false;
  3249. }
  3250. string path = a_param.Path;
  3251. if (!Directory.Exists(path))
  3252. {
  3253. LogManager.AddHardwareLog("文件夹丢失", true);
  3254. return false;
  3255. }
  3256. string path_coarse = a_param.Path + "\\Coarse";
  3257. if (!Directory.Exists(path_coarse))
  3258. {
  3259. Directory.CreateDirectory(path_coarse);
  3260. }
  3261. string path_fine = a_param.Path + "\\Fine";
  3262. if (!Directory.Exists(path_fine))
  3263. {
  3264. Directory.CreateDirectory(path_fine);
  3265. }
  3266. //1. 拍照
  3267. //1.1, 粗拍照
  3268. //1.1.1, 根据参数计算拍照次数
  3269. double nUp = a_param.UP * 100.0 ;
  3270. double nDown = a_param.Down * 100.0;
  3271. double nStep = a_param.Step * 100.0;
  3272. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3273. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3274. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3275. //粗拍照
  3276. for (int i = 0; i < nTimes; i++)
  3277. {
  3278. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  3279. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3280. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3281. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3282. int swd = cWd / 100;
  3283. //SendMsg("wd = " + swd.ToString() +"um");
  3284. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3285. arg.Picture_Information.Picture_FullPath = fileName;
  3286. if (!GetImage(fileName))
  3287. {
  3288. return false;
  3289. }
  3290. //arg.State = true;
  3291. //arg.Message = "自动对焦";
  3292. //SendMsg("0-9");
  3293. //判断是否停止进程
  3294. if (key_stop)
  3295. {
  3296. return false;
  3297. }
  3298. //Thread.Sleep(3000);
  3299. }
  3300. //1.2, 选定细拍照的工作距离
  3301. int CorWd = 510000;
  3302. ChooseBest(path_coarse,out CorWd);
  3303. if (CorWd == -1)
  3304. CorWd = 510000;
  3305. else
  3306. a_nWd = CorWd;
  3307. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3308. //1.3, 细拍照
  3309. if ( (CorWd - a_param.Range * 100.0) <=0)
  3310. {
  3311. return false;
  3312. }
  3313. double nfUp = CorWd - a_param.Range * 100.0;
  3314. double nfStep = a_param.fStep * 100.0;
  3315. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3316. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3317. for (int i = 0; i < nfTimes; i++)
  3318. {
  3319. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3320. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3321. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3322. Thread.Sleep(Convert.ToInt32(cycle_time)+100);
  3323. int swd = cWd / 100;
  3324. //SendMsg("wd = " + swd.ToString() + "um");
  3325. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3326. arg.Picture_Information.Picture_FullPath = fileName;
  3327. if (!GetImage(fileName))
  3328. {
  3329. return false;
  3330. }
  3331. //arg.State = true;
  3332. //arg.Message = "自动对焦";
  3333. //SendMsg("0-9");
  3334. //判断是否停止进程
  3335. if (key_stop)
  3336. {
  3337. return false;
  3338. }
  3339. //Thread.Sleep(2000);
  3340. }
  3341. int fineWd = CorWd;
  3342. ChooseBest(path_fine, out fineWd);
  3343. //SendMsg("wd fine max = " + fineWd.ToString());
  3344. if (fineWd == -1)
  3345. a_nWd = CorWd;
  3346. else
  3347. a_nWd = fineWd;
  3348. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3349. //arg.State = true;
  3350. //arg.Message = "自动对焦";
  3351. //SendMsg(step_code);
  3352. return true;
  3353. }
  3354. //自动聚焦1
  3355. public bool AutoFocus1(FocusParam a_param, out int a_nWd)
  3356. {
  3357. a_nWd = 0;
  3358. float wd = iSEM.GetWorkingDistance();
  3359. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3360. if (a_param == null)
  3361. {
  3362. LogManager.AddHardwareLog("空参数", true);
  3363. return false;
  3364. }
  3365. string path = a_param.Path;
  3366. if (!Directory.Exists(path))
  3367. {
  3368. LogManager.AddHardwareLog("文件夹丢失", true);
  3369. return false;
  3370. }
  3371. string path_coarse = a_param.Path + "\\Coarse";
  3372. if (!Directory.Exists(path_coarse))
  3373. {
  3374. Directory.CreateDirectory(path_coarse);
  3375. }
  3376. string path_fine = a_param.Path + "\\Fine";
  3377. if (!Directory.Exists(path_fine))
  3378. {
  3379. Directory.CreateDirectory(path_fine);
  3380. }
  3381. //1. 拍照
  3382. //1.1, 粗拍照
  3383. //1.1.1, 根据参数计算拍照次数
  3384. double nUp = a_param.UP * 100.0;
  3385. double nDown = a_param.Down * 100.0;
  3386. double nStep = a_param.Step * 100.0;
  3387. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3388. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3389. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3390. //粗拍照
  3391. for (int i = 0; i < nTimes; i++)
  3392. {
  3393. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3394. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3395. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3396. Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
  3397. int swd = cWd / 100;
  3398. //SendMsg("wd = " + swd.ToString() +"um");
  3399. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3400. //arg.Picture_Information.Picture_FullPath = fileName;
  3401. if (!GetImage1(fileName))
  3402. {
  3403. return false;
  3404. }
  3405. //arg.State = true;
  3406. //arg.Message = "自动对焦";
  3407. //SendMsg(step_code);
  3408. //判断是否停止进程
  3409. if (key_stop)
  3410. {
  3411. return false;
  3412. }
  3413. //Thread.Sleep(3000);
  3414. }
  3415. //1.2, 选定细拍照的工作距离
  3416. int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3417. ChooseBest(path_coarse, out CorWd);
  3418. if (CorWd == -1)
  3419. CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3420. else
  3421. a_nWd = CorWd;
  3422. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3423. //1.3, 细拍照
  3424. if ((CorWd - a_param.Range * 100.0) <= 0)
  3425. {
  3426. return false;
  3427. }
  3428. double nfUp = CorWd - a_param.Range * 100.0;
  3429. double nfStep = a_param.fStep * 100.0;
  3430. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3431. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3432. for (int i = 0; i < nfTimes; i++)
  3433. {
  3434. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3435. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3436. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3437. Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
  3438. int swd = cWd / 100;
  3439. //SendMsg("wd = " + swd.ToString() + "um");
  3440. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3441. //arg.Picture_Information.Picture_FullPath = fileName;
  3442. if (!GetImage1(fileName))
  3443. {
  3444. return false;
  3445. }
  3446. //arg.State = true;
  3447. //arg.Message = "自动对焦";
  3448. //SendMsg(step_code);
  3449. //判断是否停止进程
  3450. if (key_stop)
  3451. {
  3452. return false;
  3453. }
  3454. //Thread.Sleep(2000);
  3455. }
  3456. int fineWd = CorWd;
  3457. ChooseBest(path_fine, out fineWd);
  3458. //SendMsg("wd fine max = " + fineWd.ToString());
  3459. if (fineWd == -1)
  3460. a_nWd = CorWd;
  3461. else
  3462. a_nWd = fineWd;
  3463. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3464. //arg.State = true;
  3465. //arg.Message = "自动对焦";
  3466. //SendMsg("0-9");
  3467. return true;
  3468. }
  3469. //自动消像散 AutoStig
  3470. public bool AutoStig(FocusParam a_param, out int a_nWd)
  3471. {
  3472. a_nWd = 0;
  3473. float wd = 0;
  3474. if (a_param.TYPE == 2)
  3475. {
  3476. wd = iSEM.GetAstigmatismX();
  3477. }
  3478. else if (a_param.TYPE == 3)
  3479. {
  3480. wd = iSEM.GetAstigmatismY();
  3481. }
  3482. else
  3483. {
  3484. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3485. return false;
  3486. }
  3487. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3488. if (a_param == null)
  3489. {
  3490. LogManager.AddHardwareLog("空参数", true);
  3491. return false;
  3492. }
  3493. string path = a_param.Path;
  3494. if (!Directory.Exists(path))
  3495. {
  3496. LogManager.AddHardwareLog("文件夹丢失", true);
  3497. return false;
  3498. }
  3499. string path_coarse = a_param.Path + "\\Coarse";
  3500. if (!Directory.Exists(path_coarse))
  3501. {
  3502. Directory.CreateDirectory(path_coarse);
  3503. }
  3504. string path_fine = a_param.Path + "\\Fine";
  3505. if (!Directory.Exists(path_fine))
  3506. {
  3507. Directory.CreateDirectory(path_fine);
  3508. }
  3509. //1. 拍照
  3510. //1.1, 粗拍照
  3511. //1.1.1, 根据参数计算拍照次数
  3512. double nUp = a_param.UP * 100.0;
  3513. double nDown = a_param.Down * 100.0;
  3514. double nStep = a_param.Step * 100.0;
  3515. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3516. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3517. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3518. //粗拍照
  3519. for (int i = 0; i < nTimes; i++)
  3520. {
  3521. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3522. if (a_param.TYPE == 2)
  3523. {
  3524. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3525. }
  3526. else if (a_param.TYPE == 3)
  3527. {
  3528. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3529. }
  3530. else
  3531. {
  3532. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3533. return false;
  3534. }
  3535. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3536. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3537. int swd = cWd / 100;
  3538. //SendMsg("wd = " + swd.ToString() +"um");
  3539. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3540. arg.Picture_Information.Picture_FullPath = fileName;
  3541. if (!GetImage(fileName))
  3542. {
  3543. return false;
  3544. }
  3545. arg.State = true;
  3546. arg.Message = "自动像散";
  3547. SendMsg("0-8");
  3548. //判断是否停止进程
  3549. if (key_stop)
  3550. {
  3551. return false;
  3552. }
  3553. //Thread.Sleep(3000);
  3554. }
  3555. //1.2, 选定细拍照的工作距离
  3556. int CorWd;
  3557. ChooseBest(path_coarse, out CorWd);
  3558. if (CorWd == -1)
  3559. {
  3560. a_nWd = 0;
  3561. }
  3562. else
  3563. {
  3564. a_nWd = CorWd;
  3565. }
  3566. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3567. //1.3, 细拍照
  3568. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3569. {
  3570. return false;
  3571. }
  3572. double nfUp = 0;
  3573. if (a_param.Range >= 0)
  3574. nfUp = CorWd - a_param.Range * 100.0;
  3575. else
  3576. nfUp = CorWd + a_param.Range * 100.0;
  3577. double nfStep = a_param.fStep * 100.0;
  3578. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3579. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3580. for (int i = 0; i < nfTimes; i++)
  3581. {
  3582. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3583. if (a_param.TYPE == 2)
  3584. {
  3585. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3586. }
  3587. else if (a_param.TYPE == 3)
  3588. {
  3589. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3590. }
  3591. else
  3592. {
  3593. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3594. return false;
  3595. }
  3596. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3597. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3598. int swd = cWd / 100;
  3599. //SendMsg("wd = " + swd.ToString() + "um");
  3600. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3601. arg.Picture_Information.Picture_FullPath = fileName;
  3602. if (!GetImage(fileName))
  3603. {
  3604. return false;
  3605. }
  3606. arg.State = true;
  3607. arg.Message = "自动像散";
  3608. SendMsg("0-8");
  3609. //判断是否停止进程
  3610. if (key_stop)
  3611. {
  3612. return false;
  3613. }
  3614. //Thread.Sleep(2000);
  3615. }
  3616. int fineWd = CorWd;
  3617. ChooseBest(path_fine, out fineWd);
  3618. //SendMsg("wd fine max = " + fineWd.ToString());
  3619. if(fineWd == -1)
  3620. a_nWd = CorWd;
  3621. else
  3622. a_nWd = fineWd;
  3623. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3624. //arg.State = true;
  3625. //arg.Message = "自动像散";
  3626. //SendMsg(step_code);
  3627. return true;
  3628. }
  3629. //执行自动消像散1
  3630. public bool ImageStig1()
  3631. {
  3632. if (m_measureFile.MParam.FocusMode == 1)//手动
  3633. {
  3634. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3635. {
  3636. }
  3637. else
  3638. {
  3639. return false;
  3640. }
  3641. }
  3642. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3643. {
  3644. //郝工增加自动对焦算法
  3645. //处理文件夹
  3646. if (Directory.Exists(StigX_path))
  3647. {
  3648. Directory.Delete(StigX_path, true);
  3649. }
  3650. Thread.Sleep(3000);
  3651. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3652. Thread.Sleep(200);
  3653. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3654. Thread.Sleep(200);
  3655. //再创建文件夹
  3656. Directory.CreateDirectory(StigX_path);
  3657. //1、对焦参数类,2、输出像散值
  3658. int stigX = 0;
  3659. //根据当前的stigX重新计算像散值
  3660. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3661. //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
  3662. //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
  3663. //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
  3664. //设置工作距离
  3665. currentStigX = iSEM.GetAstigmatismX();
  3666. Thread.Sleep(1000);
  3667. FocusParam pFocus = new FocusParam();
  3668. pFocus = m_measureFile.MParam.AutoStigX;
  3669. float old_up = m_measureFile.MParam.AutoStigX.UP;
  3670. float old_down = m_measureFile.MParam.AutoStigX.Down;
  3671. float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3672. pFocus.UP = currentStigX - setvalue;
  3673. pFocus.Down = currentStigX + setvalue;
  3674. //m_measureFile.MParam.AutoStigX.Step = 1;
  3675. //m_measureFile.MParam.AutoStigX.Range = (float)0.5;
  3676. //m_measureFile.MParam.AutoStigX.fStep = (float)0.1;
  3677. LogManager.AddHardwareLog("消像散参数: up = "+pFocus.UP+",down = " + pFocus.Down+ ",step =" + pFocus.Step + ",rang ="+ pFocus.Range + ",fstep = " + pFocus.fStep, true);
  3678. //LogManager.AddHardwareLog("修改消像散参数", true);
  3679. AutoStig1(pFocus, out stigX);
  3680. m_measureFile.MParam.AutoStigX.UP = old_up;
  3681. m_measureFile.MParam.AutoStigX.Down = old_down;
  3682. LogManager.AddHardwareLog("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3683. //设置工作距离
  3684. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3685. //设置完工作距离后必须延迟5秒
  3686. Thread.Sleep(5000);
  3687. //处理图片位置
  3688. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3689. //处理文件夹
  3690. if (Directory.Exists(StigY_path))
  3691. {
  3692. Directory.Delete(StigY_path, true);
  3693. }
  3694. Thread.Sleep(3000);
  3695. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3696. Thread.Sleep(200);
  3697. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3698. Thread.Sleep(200);
  3699. //再创建文件夹
  3700. Directory.CreateDirectory(StigY_path);
  3701. //1、对焦参数类,2、输出像散值
  3702. int stigY = 0;
  3703. //根据当前的stigX重新计算像散值
  3704. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3705. //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
  3706. //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
  3707. //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
  3708. currentStigY = iSEM.GetAstigmatismY();
  3709. Thread.Sleep(1000);
  3710. //m_measureFile.MParam.AutoStigY.UP = currentStigY - setvalue;
  3711. //m_measureFile.MParam.AutoStigY.Down = currentStigY + setvalue;
  3712. //m_measureFile.MParam.AutoStigY.Step = 1;
  3713. //m_measureFile.MParam.AutoStigY.Range = (float)0.5;
  3714. //m_measureFile.MParam.AutoStigY.fStep = (float)0.1;
  3715. FocusParam pFocusY = new FocusParam();
  3716. pFocusY = m_measureFile.MParam.AutoStigY;
  3717. float old_upY = m_measureFile.MParam.AutoStigY.UP;
  3718. float old_downY = m_measureFile.MParam.AutoStigY.Down;
  3719. //float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3720. pFocusY.UP = currentStigY - setvalue;
  3721. pFocusY.Down = currentStigY + setvalue;
  3722. LogManager.AddHardwareLog("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
  3723. AutoStig1(pFocusY, out stigY);
  3724. m_measureFile.MParam.AutoStigY.UP = old_upY;
  3725. m_measureFile.MParam.AutoStigY.Down = old_downY;
  3726. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3727. //设置工作距离
  3728. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3729. //设置完工作距离后必须延迟5秒
  3730. Thread.Sleep(5000);
  3731. }
  3732. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3733. {
  3734. //后期和客户对接接口
  3735. List<string> filenames = new List<string>();
  3736. String retfilename = wr.Img_Auto_Focus(filenames);
  3737. }
  3738. else //蔡司自动对焦
  3739. {
  3740. iSEM.CmdAutoFocusCoarse();
  3741. while (true)
  3742. {
  3743. Thread.Sleep(10000);
  3744. if (0 == iSEM.GetAutoFunction())
  3745. {
  3746. break;
  3747. }
  3748. }
  3749. iSEM.CmdAutoFocusFine();
  3750. while (true)
  3751. {
  3752. Thread.Sleep(10000);
  3753. if (0 == iSEM.GetAutoFunction())
  3754. {
  3755. break;
  3756. }
  3757. }
  3758. }
  3759. return true;
  3760. }
  3761. //自动消像散 AutoStig1
  3762. public bool AutoStig1(FocusParam a_param, out int a_nWd)
  3763. {
  3764. a_nWd = 0;
  3765. float wd = 0;
  3766. if (a_param.TYPE == 2)
  3767. {
  3768. wd = iSEM.GetAstigmatismX();
  3769. }
  3770. else if (a_param.TYPE == 3)
  3771. {
  3772. wd = iSEM.GetAstigmatismY();
  3773. }
  3774. else
  3775. {
  3776. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3777. return false;
  3778. }
  3779. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3780. if (a_param == null)
  3781. {
  3782. LogManager.AddHardwareLog("空参数", true);
  3783. return false;
  3784. }
  3785. string path = a_param.Path;
  3786. if (!Directory.Exists(path))
  3787. {
  3788. LogManager.AddHardwareLog("文件夹丢失", true);
  3789. return false;
  3790. }
  3791. string path_coarse = a_param.Path + "\\Coarse";
  3792. if (!Directory.Exists(path_coarse))
  3793. {
  3794. Directory.CreateDirectory(path_coarse);
  3795. }
  3796. string path_fine = a_param.Path + "\\Fine";
  3797. if (!Directory.Exists(path_fine))
  3798. {
  3799. Directory.CreateDirectory(path_fine);
  3800. }
  3801. //1. 拍照
  3802. //1.1, 粗拍照
  3803. //1.1.1, 根据参数计算拍照次数
  3804. double nUp = a_param.UP * 100.0;
  3805. double nDown = a_param.Down * 100.0;
  3806. double nStep = a_param.Step * 100.0;
  3807. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3808. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3809. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3810. //粗拍照
  3811. for (int i = 0; i < nTimes; i++)
  3812. {
  3813. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3814. if (a_param.TYPE == 2)
  3815. {
  3816. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3817. }
  3818. else if (a_param.TYPE == 3)
  3819. {
  3820. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3821. }
  3822. else
  3823. {
  3824. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3825. return false;
  3826. }
  3827. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3828. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3829. int swd = cWd / 100;
  3830. //SendMsg("wd = " + swd.ToString() +"um");
  3831. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3832. arg.Picture_Information.Picture_FullPath = fileName;
  3833. if (!GetImage1(fileName))
  3834. {
  3835. return false;
  3836. }
  3837. //arg.State = true;
  3838. //arg.Message = "自动像散";
  3839. //SendMsg(step_code);
  3840. //判断是否停止进程
  3841. if (key_stop)
  3842. {
  3843. return false;
  3844. }
  3845. //Thread.Sleep(3000);
  3846. }
  3847. //1.2, 选定细拍照的工作距离
  3848. int CorWd;
  3849. ChooseBest(path_coarse, out CorWd);
  3850. if (CorWd == -1)
  3851. {
  3852. a_nWd = 0;
  3853. }
  3854. else
  3855. {
  3856. a_nWd = CorWd;
  3857. }
  3858. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3859. //1.3, 细拍照
  3860. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3861. {
  3862. return false;
  3863. }
  3864. double nfUp = 0;
  3865. if (a_param.Range >= 0)
  3866. nfUp = CorWd - a_param.Range * 100.0;
  3867. else
  3868. nfUp = CorWd + a_param.Range * 100.0;
  3869. double nfStep = a_param.fStep * 100.0;
  3870. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3871. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3872. for (int i = 0; i < nfTimes; i++)
  3873. {
  3874. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3875. if (a_param.TYPE == 2)
  3876. {
  3877. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3878. }
  3879. else if (a_param.TYPE == 3)
  3880. {
  3881. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3882. }
  3883. else
  3884. {
  3885. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3886. return false;
  3887. }
  3888. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3889. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3890. int swd = cWd / 100;
  3891. //SendMsg("wd = " + swd.ToString() + "um");
  3892. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3893. arg.Picture_Information.Picture_FullPath = fileName;
  3894. if (!GetImage1(fileName))
  3895. {
  3896. return false;
  3897. }
  3898. //arg.State = true;
  3899. //arg.Message = "自动像散";
  3900. //SendMsg(step_code);
  3901. //判断是否停止进程
  3902. if (key_stop)
  3903. {
  3904. return false;
  3905. }
  3906. //Thread.Sleep(2000);
  3907. }
  3908. int fineWd = CorWd;
  3909. ChooseBest(path_fine, out fineWd);
  3910. //SendMsg("wd fine max = " + fineWd.ToString());
  3911. if (fineWd == -1)
  3912. a_nWd = CorWd;
  3913. else
  3914. a_nWd = fineWd;
  3915. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3916. //arg.State = true;
  3917. //arg.Message = "自动像散";
  3918. //SendMsg("0-9");
  3919. return true;
  3920. }
  3921. //自动FIB对焦 AutoFIBFocus
  3922. public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
  3923. {
  3924. a_nWd = 0;
  3925. float wd = 0;
  3926. if (a_param.TYPE == 4)
  3927. {
  3928. wd = iSEM.GetFIBObjectivePotential();
  3929. }
  3930. else
  3931. {
  3932. LogManager.AddHardwareLog("FIB自动聚焦参数设置有误", true);
  3933. return false;
  3934. }
  3935. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3936. if (a_param == null)
  3937. {
  3938. LogManager.AddHardwareLog("空参数", true);
  3939. return false;
  3940. }
  3941. string path = a_param.Path;
  3942. if (!Directory.Exists(path))
  3943. {
  3944. LogManager.AddHardwareLog("文件夹丢失", true);
  3945. return false;
  3946. }
  3947. string path_coarse = a_param.Path + "\\Coarse";
  3948. if (!Directory.Exists(path_coarse))
  3949. {
  3950. Directory.CreateDirectory(path_coarse);
  3951. }
  3952. string path_fine = a_param.Path + "\\Fine";
  3953. if (!Directory.Exists(path_fine))
  3954. {
  3955. Directory.CreateDirectory(path_fine);
  3956. }
  3957. //1. 拍照
  3958. //1.1, 粗拍照
  3959. //1.1.1, 根据参数计算拍照次数
  3960. double nUp = a_param.UP * 100.0;
  3961. double nDown = a_param.Down * 100.0;
  3962. double nStep = a_param.Step * 100.0;
  3963. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3964. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3965. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3966. //粗拍照
  3967. for (int i = 0; i < nTimes; i++)
  3968. {
  3969. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3970. if (a_param.TYPE == 4)
  3971. {
  3972. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  3973. }
  3974. else
  3975. {
  3976. LogManager.AddHardwareLog("FIB对焦参数设置有误,对焦类型错", true);
  3977. return false;
  3978. }
  3979. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3980. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3981. int swd = cWd / 100;
  3982. //SendMsg("wd = " + swd.ToString() +"um");
  3983. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3984. arg.Picture_Information.Picture_FullPath = fileName;
  3985. if (!GetImage(fileName))
  3986. {
  3987. return false;
  3988. }
  3989. arg.State = true;
  3990. arg.Message = "FIB自动对焦";
  3991. SendMsg(step_code);
  3992. //判断是否停止进程
  3993. if (key_stop)
  3994. {
  3995. return false;
  3996. }
  3997. //Thread.Sleep(3000);
  3998. }
  3999. //1.2, 选定细拍照的工作距离
  4000. int CorWd;
  4001. ChooseBest(path_coarse, out CorWd);
  4002. a_nWd = CorWd;
  4003. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4004. //1.3, 细拍照
  4005. if ((CorWd - a_param.Range * 100.0) <0)
  4006. {
  4007. return false;
  4008. }
  4009. double nfUp = CorWd - a_param.Range * 100.0;
  4010. double nfStep = a_param.fStep * 100.0;
  4011. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4012. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4013. for (int i = 0; i < nfTimes; i++)
  4014. {
  4015. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4016. if (a_param.TYPE == 4)
  4017. {
  4018. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4019. }
  4020. else
  4021. {
  4022. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4023. return false;
  4024. }
  4025. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4026. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4027. int swd = cWd / 100;
  4028. //SendMsg("wd = " + swd.ToString() + "um");
  4029. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4030. arg.Picture_Information.Picture_FullPath = fileName;
  4031. if (!GetImage(fileName))
  4032. {
  4033. return false;
  4034. }
  4035. arg.State = true;
  4036. arg.Message = "FIB自动对焦";
  4037. SendMsg(step_code);
  4038. //判断是否停止进程
  4039. if (key_stop)
  4040. {
  4041. return false;
  4042. }
  4043. //Thread.Sleep(2000);
  4044. }
  4045. int fineWd;
  4046. ChooseBest(path_fine, out fineWd);
  4047. //SendMsg("wd fine max = " + fineWd.ToString());
  4048. a_nWd = fineWd;
  4049. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4050. return true;
  4051. }
  4052. //LoG算子计算
  4053. private double LoGMean(string a_strImgPath)
  4054. {
  4055. //读入Img文件
  4056. if (!File.Exists(a_strImgPath))
  4057. {
  4058. return 0;
  4059. }
  4060. Mat src, gray_src;
  4061. int kernel_size = 3;
  4062. src = Cv2.ImRead(a_strImgPath);
  4063. gray_src = new Mat();
  4064. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4065. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4066. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4067. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4068. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  4069. Cv2.ConvertScaleAbs(src, src);
  4070. //图像的平均灰度
  4071. double meanValue = 0.0;
  4072. meanValue = Cv2.Mean(src)[0];
  4073. return meanValue;
  4074. }
  4075. //梯度计算
  4076. private double Tenengrad(string a_strImgPath)
  4077. {
  4078. //读入Img文件
  4079. if (!File.Exists(a_strImgPath))
  4080. {
  4081. return 0;
  4082. }
  4083. Mat src;
  4084. src = Cv2.ImRead(a_strImgPath);
  4085. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4086. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4087. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4088. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4089. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  4090. //图像的平均灰度
  4091. double meanValue = 0.0;
  4092. meanValue = Cv2.Mean(src)[0];
  4093. return meanValue;
  4094. }
  4095. //梯度计算
  4096. private double TTgrad(string a_strImgPath)
  4097. {
  4098. //读入Img文件
  4099. if (!File.Exists(a_strImgPath))
  4100. {
  4101. return 0;
  4102. }
  4103. Mat src;
  4104. src = Cv2.ImRead(a_strImgPath);
  4105. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4106. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4107. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4108. Mat scalex = new Mat();
  4109. Mat scaley = new Mat();
  4110. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  4111. Cv2.ConvertScaleAbs(src, scalex);
  4112. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  4113. Cv2.ConvertScaleAbs(src, scaley);
  4114. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  4115. //图像的平均灰度
  4116. double meanValue = 0.0;
  4117. meanValue = Cv2.Mean(src)[0];
  4118. return meanValue;
  4119. }
  4120. //三选二算法
  4121. private bool ChooseBest(string a_strImgPath, out int a_nWd)
  4122. {
  4123. a_nWd = -1;
  4124. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  4125. float[] values = new float[files.Length];
  4126. double smax1 = LoGMean(files[0]);
  4127. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  4128. double smax2 = Tenengrad(files[0]);
  4129. int wdmax2 = wdmax1;
  4130. double smax3 = TTgrad(files[0]);
  4131. int wdmax3 = wdmax1;
  4132. int x = 0;
  4133. foreach (var file in files)
  4134. {
  4135. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  4136. double svalue1 = LoGMean(file);
  4137. double svalue2 = Tenengrad(file);
  4138. double svalue3 = TTgrad(file);
  4139. if (smax1 < svalue1)
  4140. {
  4141. smax1 = svalue1;
  4142. wdmax1 = wd;
  4143. }
  4144. if (smax2 < svalue2)
  4145. {
  4146. smax2 = svalue2;
  4147. wdmax2 = wd;
  4148. }
  4149. if (smax3 < svalue3)
  4150. {
  4151. smax3 = svalue3;
  4152. wdmax3 = wd;
  4153. }
  4154. x++;
  4155. }
  4156. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  4157. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  4158. {
  4159. a_nWd = wdmax1;
  4160. //SendMsg("焦距 = " + wdmax1.ToString());
  4161. }
  4162. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  4163. {
  4164. a_nWd = wdmax2;
  4165. //SendMsg("焦距 = " + wdmax2.ToString());
  4166. }
  4167. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  4168. {
  4169. a_nWd = wdmax3;
  4170. //SendMsg("焦距 = " + wdmax3.ToString());
  4171. }
  4172. else
  4173. {
  4174. //SendMsg("对焦失败。");
  4175. return false;
  4176. }
  4177. return true;
  4178. }
  4179. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  4180. bool MoveToPixByMoveStage(float xc, float yc)
  4181. {
  4182. //单位是m/pix
  4183. float XpixSize = iSEM.GetPixelSize();
  4184. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4185. float YpixSize = iSEM.GetPixelSize();///(float)m_measureFile.MParam.PixelSizeCor);
  4186. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4187. Thread.Sleep(500);
  4188. //0:width, 1:height
  4189. int[] imageSize = iSEM.GetImageStore();
  4190. int width = imageSize[0] / 2;
  4191. int height = imageSize[1] / 2;
  4192. LogManager.AddHardwareLog("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4193. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4194. float deltX = (xc - (float)width) * XpixSize;
  4195. float deltY = (yc - (float)height) * YpixSize;
  4196. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4197. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4198. float xpCur = iSEM.GetStageAtX();
  4199. float ypCur = iSEM.GetStageAtY();
  4200. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4201. float xpNew = xpCur - deltX;
  4202. float ypNew = ypCur + deltY;
  4203. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4204. //计算光束偏移值:
  4205. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  4206. {
  4207. LogManager.AddHardwareLog("X方向移动样品台", true);
  4208. if (!iSEM.SetStageGotoX(xpNew))
  4209. {
  4210. return false;
  4211. }
  4212. //判断是否移动完成
  4213. while (true)
  4214. {
  4215. Thread.Sleep(5000);
  4216. if (iSEM.GetStageIs() == 0)
  4217. {
  4218. break;
  4219. }
  4220. }
  4221. }
  4222. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  4223. {
  4224. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4225. if (!iSEM.SetStageGotoY(ypNew))
  4226. {
  4227. return false;
  4228. }
  4229. //判断是否移动完成
  4230. while (true)
  4231. {
  4232. Thread.Sleep(5000);
  4233. if (iSEM.GetStageIs() == 0)
  4234. {
  4235. break;
  4236. }
  4237. }
  4238. }
  4239. return true;
  4240. }
  4241. //移动到像素位置
  4242. bool MoveToPix(float xc, float yc)
  4243. {
  4244. //单位是m/pix
  4245. float XpixSize = iSEM.GetPixelSize();
  4246. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel",true);
  4247. float YpixSize = (XpixSize/(float)m_measureFile.MParam.PixelSizeCor);
  4248. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4249. Thread.Sleep(200);
  4250. //0:width, 1:height
  4251. int[] imageSize = iSEM.GetImageStore();
  4252. int width = imageSize[0]/2;
  4253. int height = imageSize[1]/2;
  4254. LogManager.AddHardwareLog("目标像素是(" + xc.ToString()+ ","+ yc.ToString() + ")", true);
  4255. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4256. float deltX = (xc - (float)width) * XpixSize;
  4257. float deltY = (yc - (float)height) * YpixSize;
  4258. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4259. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4260. float xpCur = iSEM.GetStageAtX();
  4261. Thread.Sleep(200);
  4262. float ypCur = iSEM.GetStageAtY();
  4263. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString()+ "," + ypCur.ToString() + "),单位m", true);
  4264. float xpNew = xpCur - deltX;
  4265. float ypNew = ypCur + deltY;
  4266. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4267. //计算最大偏移量
  4268. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4269. Thread.Sleep(200);
  4270. iSEM.SetBeamShiftX(100);
  4271. Thread.Sleep(200);
  4272. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4273. Thread.Sleep(200);
  4274. iSEM.SetBeamShiftX(beamXCur);
  4275. Thread.Sleep(200);
  4276. //计算光束偏移值:
  4277. float beamX = iSEM.GetBeamOffsetX();
  4278. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4279. beamX = (-deltX + beamX);
  4280. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4281. if( ((beamX <= beamXMax) && (beamX >=0)) ||
  4282. ((beamX >= -beamXMax)&& (beamX < 0)))
  4283. {
  4284. LogManager.AddHardwareLog("X方向移动光束", true);
  4285. float beamXShift = beamX * 100 / beamXMax;
  4286. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  4287. if (!iSEM.SetBeamShiftX(beamXShift))
  4288. //if (!iSEM.SetBeamOffsetX(beamX))
  4289. {
  4290. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4291. return false;
  4292. }
  4293. }
  4294. else if(deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4295. {
  4296. LogManager.AddHardwareLog("X方向移动样品台", true);
  4297. if (!iSEM.SetStageGotoX(xpNew))
  4298. {
  4299. return false;
  4300. }
  4301. //判断是否移动完成
  4302. while (true)
  4303. {
  4304. Thread.Sleep(4000);
  4305. if (iSEM.GetStageIs() == 0)
  4306. {
  4307. break;
  4308. }
  4309. }
  4310. }
  4311. float beamY = iSEM.GetBeamOffsetY();
  4312. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4313. beamY = (-deltY + beamY);
  4314. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4315. //计算最大偏移量
  4316. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4317. Thread.Sleep(200);
  4318. iSEM.SetBeamShiftY(100);
  4319. Thread.Sleep(200);
  4320. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4321. Thread.Sleep(200);
  4322. iSEM.SetBeamShiftY(beamYCur);
  4323. Thread.Sleep(200);
  4324. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  4325. ((beamY >= -beamYMax) && (beamY < 0)))
  4326. {
  4327. LogManager.AddHardwareLog("Y方向移动光束", true);
  4328. float beamYShift = beamY * 100 / beamYMax;
  4329. LogManager.AddHardwareLog("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  4330. //if(!iSEM.SetBeamOffsetY(beamY))
  4331. if (!iSEM.SetBeamShiftY(beamYShift))
  4332. {
  4333. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4334. return false;
  4335. }
  4336. }
  4337. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4338. {
  4339. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4340. if (!iSEM.SetStageGotoY(ypNew))
  4341. {
  4342. return false;
  4343. }
  4344. //判断是否移动完成
  4345. while (true)
  4346. {
  4347. Thread.Sleep(4000);
  4348. if (iSEM.GetStageIs() == 0)
  4349. {
  4350. break;
  4351. }
  4352. }
  4353. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4354. //arg.State = true;
  4355. //SendMsg("1-7");
  4356. }
  4357. return true;
  4358. }
  4359. //自动亮度对比度调节
  4360. //自动亮度对比度
  4361. public bool AutoBC(String step)
  4362. {
  4363. arg.Message = "自动亮度对比度";
  4364. arg.State = true;
  4365. SendMsg("1-10");
  4366. iSEM.SetAutoBright(100);
  4367. iSEM.SetAutoContrast(100);
  4368. //LogManager.AddHardwareLog("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
  4369. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  4370. {
  4371. LogManager.AddHardwareLog("开始设置自动亮度、对比度失败,程序退出。", true);
  4372. return false;
  4373. }
  4374. Thread.Sleep(5000);
  4375. int i = 0;
  4376. float bright = iSEM.GetBrightness();
  4377. float contrast = iSEM.GetContrast();
  4378. //最多调节30s,30s没调节好,认为调节失败
  4379. for (i = 0; i < 5; i++)
  4380. {
  4381. bright = iSEM.GetBrightness();
  4382. contrast = iSEM.GetContrast();
  4383. if ((bright >= 40 && bright <= 60)
  4384. && (contrast >= 35 && contrast <= 40))
  4385. break;
  4386. Thread.Sleep(5000);
  4387. }
  4388. bright = iSEM.GetBrightness();
  4389. contrast = iSEM.GetContrast();
  4390. if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
  4391. && i == 5)
  4392. {
  4393. LogManager.AddHardwareLog("亮度对比度调节时间过长", true);
  4394. return false;
  4395. }
  4396. iSEM.SetAutoBright(100);
  4397. iSEM.SetAutoContrast(100);
  4398. //LogManager.AddHardwareLog("SEM模式自动亮度目标50,自动对比度目标30.", true);
  4399. return true;
  4400. }
  4401. //执行FIB自动对焦,FIBFocus
  4402. //执行自动消像散
  4403. public bool FIBFocus(String step_code)
  4404. {
  4405. if (m_measureFile.MParam.FocusMode == 1)//手动
  4406. {
  4407. if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  4408. {
  4409. }
  4410. else
  4411. {
  4412. return false;
  4413. }
  4414. }
  4415. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  4416. {
  4417. //郝工增加自动对焦算法
  4418. //处理文件夹
  4419. if (Directory.Exists(FIBfocus_path))
  4420. {
  4421. Directory.Delete(FIBfocus_path, true);
  4422. }
  4423. Thread.Sleep(3000);
  4424. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  4425. Thread.Sleep(1000);
  4426. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  4427. Thread.Sleep(1000);
  4428. //再创建文件夹
  4429. Directory.CreateDirectory(FIBfocus_path);
  4430. //1、对焦参数类,2、输出对焦值
  4431. int FIBFocus = 0;
  4432. //根据当前的stigX重新计算像散值
  4433. float currentFIBFocus = iSEM.GetFIBObjectivePotential();
  4434. //m_measureFile.MParam.FIBFocus.Step = 10; //像散的步长为10
  4435. m_measureFile.MParam.FIBFocus.UP = currentFIBFocus - m_measureFile.MParam.FIBFocus.Step;
  4436. m_measureFile.MParam.FIBFocus.Down = currentFIBFocus + m_measureFile.MParam.FIBFocus.Step;
  4437. LogManager.AddHardwareLog("修改FIB自动对焦参数", true);
  4438. AutoFIBFocus(m_measureFile.MParam.FIBFocus, out FIBFocus, step_code);
  4439. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  4440. //设置工作距离
  4441. iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
  4442. //设置完工作距离后必须延迟5秒
  4443. Thread.Sleep(5000);
  4444. //处理图片位置
  4445. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  4446. }
  4447. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  4448. {
  4449. //后期和客户对接接口
  4450. List<string> filenames = new List<string>();
  4451. String retfilename = wr.Img_Auto_Focus(filenames);
  4452. }
  4453. else //蔡司自动对焦
  4454. {
  4455. iSEM.CmdAutoFocusCoarse();
  4456. while (true)
  4457. {
  4458. Thread.Sleep(10000);
  4459. if (0 == iSEM.GetAutoFunction())
  4460. {
  4461. break;
  4462. }
  4463. }
  4464. iSEM.CmdAutoFocusFine();
  4465. while (true)
  4466. {
  4467. Thread.Sleep(10000);
  4468. if (0 == iSEM.GetAutoFunction())
  4469. {
  4470. break;
  4471. }
  4472. }
  4473. }
  4474. return true;
  4475. }
  4476. /// 图像拉直算法
  4477. /// </summary>
  4478. /// <param name="Slope">倾斜角度</param>
  4479. /// <param name="x0">圆心坐标x</param>
  4480. /// <param name="y0">圆心坐标y</param>
  4481. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  4482. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  4483. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  4484. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  4485. /// <returns></returns>
  4486. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  4487. {
  4488. try
  4489. {
  4490. float xr = x1 - x0;//倾斜图到中心的距离差x
  4491. float yr = y1 - y0;//倾斜图到中心的距离差y
  4492. float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  4493. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  4494. float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
  4495. float k_S = k - Slope;//通过夹角差求x2,y2
  4496. //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  4497. //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  4498. float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
  4499. float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
  4500. if (Slope > 0 || Slope < 0)
  4501. {
  4502. Hx = x0 + x2;
  4503. Hy = y0 + y2;
  4504. }
  4505. else
  4506. {
  4507. Hx = 0;
  4508. Hy = 0;
  4509. }
  4510. return true;
  4511. }
  4512. catch (Exception)
  4513. {
  4514. return false;
  4515. }
  4516. }
  4517. // 放大倍数差校正
  4518. public bool MagComp(float oldMag, float newMag)
  4519. {
  4520. //开启电压校正时进行电压校正
  4521. if (m_measureFile.MParam.MagComp)
  4522. {
  4523. int oldLevel = -1, newLevel = -1;
  4524. float deltX = 0, deltY = 0;
  4525. if (oldMag < m_measureFile.MParam.MagRange1)
  4526. {
  4527. oldLevel = 1;
  4528. }
  4529. else if ((oldMag <= m_measureFile.MParam.MagRange2)
  4530. && (oldMag > m_measureFile.MParam.MagRange1))
  4531. {
  4532. oldLevel = 2;
  4533. }
  4534. else if ((oldMag <= m_measureFile.MParam.MagRange3)
  4535. && (oldMag > m_measureFile.MParam.MagRange2))
  4536. {
  4537. oldLevel = 3;
  4538. }
  4539. else if ((oldMag <= m_measureFile.MParam.MagRange4)
  4540. && (oldMag > m_measureFile.MParam.MagRange3))
  4541. {
  4542. oldLevel = 4;
  4543. }
  4544. if (newMag < m_measureFile.MParam.MagRange1)
  4545. {
  4546. newLevel = 1;
  4547. }
  4548. else if ((newMag <= m_measureFile.MParam.MagRange2)
  4549. && (newMag > m_measureFile.MParam.MagRange1))
  4550. {
  4551. newLevel = 2;
  4552. }
  4553. else if ((newMag <= m_measureFile.MParam.MagRange3)
  4554. && (newMag > m_measureFile.MParam.MagRange2))
  4555. {
  4556. newLevel = 3;
  4557. }
  4558. else if ((newMag <= m_measureFile.MParam.MagRange4)
  4559. && (newMag > m_measureFile.MParam.MagRange3))
  4560. {
  4561. newLevel = 4;
  4562. }
  4563. if (oldLevel != newLevel)
  4564. {
  4565. if (oldLevel == 1)
  4566. {
  4567. switch (newLevel)
  4568. {
  4569. case 1:
  4570. break;
  4571. case 2:
  4572. deltX = m_measureFile.MParam.MagCompX1;
  4573. deltY = m_measureFile.MParam.MagCompY1;
  4574. break;
  4575. case 3:
  4576. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2;
  4577. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2;
  4578. break;
  4579. case 4:
  4580. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4581. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4582. break;
  4583. }
  4584. }
  4585. else if (oldLevel == 2)
  4586. {
  4587. switch (newLevel)
  4588. {
  4589. case 1:
  4590. deltX = -m_measureFile.MParam.MagCompX1;
  4591. deltY = -m_measureFile.MParam.MagCompY1;
  4592. break;
  4593. case 2:
  4594. break;
  4595. case 3:
  4596. deltX = m_measureFile.MParam.MagCompX2;
  4597. deltY = m_measureFile.MParam.MagCompY2;
  4598. break;
  4599. case 4:
  4600. deltX = m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4601. deltY = m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4602. break;
  4603. }
  4604. }
  4605. else if (oldLevel == 3)
  4606. {
  4607. switch (newLevel)
  4608. {
  4609. case 1:
  4610. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2;
  4611. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2;
  4612. break;
  4613. case 2:
  4614. deltX = -m_measureFile.MParam.MagCompX2;
  4615. deltY = -m_measureFile.MParam.MagCompY2;
  4616. break;
  4617. case 3:
  4618. break;
  4619. case 4:
  4620. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4621. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompX3;
  4622. break;
  4623. }
  4624. }
  4625. else if (oldLevel == 4)
  4626. {
  4627. switch (newLevel)
  4628. {
  4629. case 1:
  4630. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4631. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4632. break;
  4633. case 2:
  4634. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4635. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4636. break;
  4637. case 3:
  4638. deltX = -m_measureFile.MParam.MagCompX3;
  4639. deltY = -m_measureFile.MParam.MagCompY3;
  4640. break;
  4641. case 4:
  4642. break;
  4643. }
  4644. }
  4645. //通过移动光束校正便宜量
  4646. //单位是m/pix
  4647. float pixSize = iSEM.GetPixelSize();
  4648. LogManager.AddHardwareLog("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
  4649. Thread.Sleep(500);
  4650. float xpCur = iSEM.GetStageAtX();
  4651. float ypCur = iSEM.GetStageAtY();
  4652. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4653. float xpNew = xpCur - deltX;
  4654. float ypNew = ypCur + deltY;
  4655. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4656. //计算最大偏移量
  4657. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4658. iSEM.SetBeamShiftX(100);
  4659. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4660. iSEM.SetBeamShiftX(beamXCur);
  4661. //计算光束偏移值:
  4662. float beamX = iSEM.GetBeamOffsetX();
  4663. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4664. beamX = (-deltX + beamX);
  4665. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4666. if (beamX < beamXMax || beamX < -beamXMax)
  4667. {
  4668. LogManager.AddHardwareLog("X方向移动光束", true);
  4669. float beamXShift = beamX * 100 / beamXMax;
  4670. if (!iSEM.SetBeamShiftX(beamXShift))
  4671. {
  4672. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4673. return false;
  4674. }
  4675. }
  4676. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4677. {
  4678. LogManager.AddHardwareLog("X方向移动样品台", true);
  4679. if (!iSEM.SetStageGotoX(xpNew))
  4680. {
  4681. return false;
  4682. }
  4683. //判断是否移动完成
  4684. while (true)
  4685. {
  4686. Thread.Sleep(5000);
  4687. if (iSEM.GetStageIs() == 0)
  4688. {
  4689. break;
  4690. }
  4691. }
  4692. }
  4693. float beamY = iSEM.GetBeamOffsetY();
  4694. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4695. beamY = (-deltY + beamY);
  4696. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4697. //计算最大偏移量
  4698. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4699. iSEM.SetBeamShiftY(100);
  4700. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4701. iSEM.SetBeamShiftY(beamYCur);
  4702. if (beamY < beamYMax || beamY < -beamYMax)
  4703. {
  4704. LogManager.AddHardwareLog("Y方向移动光束", true);
  4705. float beamYShift = beamY * 100 / beamYMax;
  4706. if (!iSEM.SetBeamShiftY(beamY))
  4707. {
  4708. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4709. return false;
  4710. }
  4711. }
  4712. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4713. {
  4714. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4715. if (!iSEM.SetStageGotoY(ypNew))
  4716. {
  4717. return false;
  4718. }
  4719. //判断是否移动完成
  4720. while (true)
  4721. {
  4722. Thread.Sleep(5000);
  4723. if (iSEM.GetStageIs() == 0)
  4724. {
  4725. break;
  4726. }
  4727. }
  4728. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4729. //arg.State = true;
  4730. //SendMsg("1-7");
  4731. }
  4732. }
  4733. }
  4734. return true;
  4735. }
  4736. #endregion
  4737. #region 测试程序
  4738. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  4739. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  4740. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  4741. //{
  4742. // SendMsg("拍摄照片完成");
  4743. // //return true;
  4744. //}
  4745. //else
  4746. //{
  4747. // SendMsg("拍摄照片失败");
  4748. // return false;
  4749. //}
  4750. //SendMsg("图像校正36度");
  4751. ////3.设置SEM角度补偿cos36度
  4752. //if (!TiltCorrection(36))
  4753. //{
  4754. // return false;
  4755. //}
  4756. //Thread.Sleep(3000);
  4757. //string fn;
  4758. //用宏抓一般图
  4759. //Thread.Sleep(5000);
  4760. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4761. //SendMsg("用宏抓一般图" + fn);
  4762. //iSEM.CMDMCFFilename(fn);
  4763. ////延时1s??
  4764. //Thread.Sleep(5000);
  4765. ////用宏抓好图
  4766. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  4767. //SendMsg("用宏抓好图" + fn);
  4768. //iSEM.CMDMCFFilename(fn);
  4769. ////延时1s??
  4770. //Thread.Sleep(30000);
  4771. //Thread.Sleep(10000);
  4772. //WorkingFolder = m_measureFile.FilePath;
  4773. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  4774. //SendMsg("SEM拍照存储到" + fileName6);
  4775. //if (!GetImage(ImageMode.SEM, fileName6))
  4776. //{
  4777. // SendMsg("SEM拍照失败");
  4778. // return false;
  4779. //}
  4780. ////用宏抓标志图
  4781. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  4782. //SendMsg("用宏抓标志图" + fn);
  4783. //iSEM.CMDMCFFilename(fn);
  4784. ////延时1s??
  4785. //Thread.Sleep(30000);
  4786. //Thread.Sleep(5000);
  4787. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4788. //SendMsg("用宏抓一般图" + fn);
  4789. //iSEM.CMDMCFFilename(fn);
  4790. ////延时1s??
  4791. //Thread.Sleep(5000);
  4792. //SendMsg("所有图结束");
  4793. ////17.自动控制SEM拍截面照
  4794. //{
  4795. // //1.控制SEM放大到指定参数大小范围,6000x
  4796. // if (!iSEM.SetMagnification(6000))
  4797. // {
  4798. // return false;
  4799. // }
  4800. // //2.控制SEM自动对焦、消像散、亮度、对比度
  4801. // if (!MeasParam.FocusMode)
  4802. // {
  4803. // //弹出手动对焦的窗口
  4804. // }
  4805. // else
  4806. // {
  4807. // //调用自动对焦模块
  4808. // }
  4809. // //3.设置SEM角度补偿cos36度
  4810. // if (!TiltCorrection(36))
  4811. // {
  4812. // return false;
  4813. // }
  4814. // //4.控制SEM拍照
  4815. // //5.保存照片4
  4816. // String fileName5 = WorkingFolder + ImageName5;
  4817. // if (!GetImage(ImageMode.SEM, fileName5))
  4818. // {
  4819. // return false;
  4820. // }
  4821. // //6.将照片传给客户,获取偏移坐标
  4822. // float x6 = 0, y6 = 0;
  4823. // float angle1 = 0;
  4824. // float mage = 10000;
  4825. // //7.根据坐标控制SEM移动到分析位置
  4826. // if (!iSEM.MoveStageXY(x6, y6))
  4827. // {
  4828. // return false;
  4829. // }
  4830. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  4831. // float x7 = iSEM.GetStageAtX();
  4832. // float y7 = iSEM.GetStageAtY();
  4833. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  4834. // {
  4835. // return false;
  4836. // }
  4837. // //9.控制SEM平行校正,并记录校正前初始值
  4838. // float foldAnagle = iSEM.GetScanRotation();
  4839. // if (foldAnagle == float.NaN)
  4840. // {
  4841. // return false;
  4842. // }
  4843. // if (!iSEM.SetScanRotation(angle1))
  4844. // {
  4845. // return false;
  4846. // }
  4847. // //10.控制SEM放大到指定参数大小范围
  4848. // if (!iSEM.SetMagnification(mage))
  4849. // {
  4850. // return false;
  4851. // }
  4852. // //11.控制SEM自动对焦、消像散、亮度、对比度
  4853. // if (!MeasParam.FocusMode)
  4854. // {
  4855. // //弹出手动对焦的窗口
  4856. // }
  4857. // else
  4858. // {
  4859. // //调用自动对焦模块
  4860. // }
  4861. // //12.控制SEM对分析位置拍照
  4862. // String fileName6 = WorkingFolder + ImageName6;
  4863. // if (!GetImage(ImageMode.SEM, fileName6))
  4864. // {
  4865. // return false;
  4866. // }
  4867. // //13.保存照片
  4868. // //14.控制SEM取消电子束校正,回到初始值
  4869. // if (!iSEM.SetScanRotation(foldAnagle))
  4870. // {
  4871. // return false;
  4872. // }
  4873. //}
  4874. ////18.自动层高分析
  4875. //{
  4876. // //1.获取SEM Pixel Size给客户传入参数
  4877. // if (iSEM.GetPixelSize() == float.NaN)
  4878. // {
  4879. // return false;
  4880. // }
  4881. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  4882. //}
  4883. ////19.自动能谱分析
  4884. //{
  4885. // //1. 确定能谱位置
  4886. // //2. 控制牛津打能谱
  4887. // //3. 能谱分析——面扫+线扫描
  4888. //}
  4889. #endregion
  4890. #region 能谱所有参数
  4891. //全局只有一个Extender
  4892. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  4893. IExtenderControl iExtender = factoryExtender.IExtender;
  4894. MeasureDB m_MeasDB = null;
  4895. int m_nXrayId = 0;
  4896. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  4897. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  4898. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  4899. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  4900. /// <summary>
  4901. /// 做能谱分析
  4902. /// </summary>
  4903. /// <param name="a_PointNum">分析点ID,索引号</param>
  4904. /// <param name="PointsName">分析点名称</param>
  4905. /// <param name="num">分析点的位置ID</param>
  4906. /// <returns>成功或失败</returns>
  4907. public bool DoEDS(int a_PointNum, string PointsName, int num)
  4908. {
  4909. try
  4910. {
  4911. //XrayID记录
  4912. LogManager.AddHardwareLog("程序进入EDS测量!", true);
  4913. EDSParam param = m_measureFile.MParam.EDSP;
  4914. double dDwellTime = param.DwellTime;
  4915. int nImageType = param.ImageType;
  4916. double dScanSizes = param.ScanSize;
  4917. LogManager.AddHardwareLog("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  4918. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  4919. string path = EDS_path;
  4920. string edsfn = path + "\\" + num.ToString() + "_" + ImageNameEDS;
  4921. LogManager.AddHardwareLog("EDS_PATH=" + edsfn, true);
  4922. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);
  4923. //送给客户,计算感兴趣的区域
  4924. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  4925. List<System.Drawing.Point> listlines = new List<System.Drawing.Point>();
  4926. List<List<Segment>> listFeature = new List<List<Segment>>();
  4927. List<int> lines_height = new List<int>();
  4928. System.Drawing.Point area_pt = new System.Drawing.Point();
  4929. int width = 1;
  4930. int height = 1;
  4931. //点数据
  4932. int state = 0;
  4933. wr.EDS_Param_Points(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listPoints, out state);
  4934. if (state == 0)
  4935. {
  4936. LogManager.AddHardwareLog("点采集失败", true);
  4937. return false;
  4938. }
  4939. //线数据
  4940. LogManager.AddHardwareLog("线扫描", true);
  4941. state = 0;
  4942. wr.EDS_Param_Lines(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listlines, out lines_height, out state);
  4943. LogManager.AddHardwareLog("线返回数据" + listlines[0].X.ToString() + "," + listlines[0].Y.ToString() + ",lines_height=" + lines_height.Count.ToString(), true);
  4944. if (state == 1)
  4945. {
  4946. //将线转换为segment数据
  4947. LogManager.AddHardwareLog("将线转换为segment数据", true);
  4948. List<Segment> segments = new List<Segment>();
  4949. for (int i = 0; i < listlines.Count; i++)
  4950. {
  4951. for (int j = 0; j <= lines_height[i]; j++)
  4952. {
  4953. Segment segment = new Segment();
  4954. segment.X = listlines[0].X;
  4955. segment.Y = listlines[0].Y + j;
  4956. segment.Length = 1;
  4957. segments.Add(segment);
  4958. }
  4959. listFeature.Add(segments);
  4960. }
  4961. LogManager.AddHardwareLog("将线转换为segment数据完成", true);
  4962. }
  4963. else
  4964. {
  4965. LogManager.AddHardwareLog("线采集失败", true);
  4966. return false;
  4967. }
  4968. //面数据
  4969. state = 0;
  4970. wr.EDS_Param_Areas(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out area_pt, out width, out height, out state);
  4971. LogManager.AddHardwareLog("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  4972. if (state == 1)
  4973. {
  4974. //将面转换为segment数据
  4975. LogManager.AddHardwareLog("将面转换为segment数据", true);
  4976. List<Segment> segments = new List<Segment>();
  4977. for (int j = 0; j <= height; j++)
  4978. {
  4979. Segment segment = new Segment();
  4980. segment.X = area_pt.X;
  4981. segment.Y = area_pt.Y + j;
  4982. segment.Length = width;
  4983. segments.Add(segment);
  4984. }
  4985. listFeature.Add(segments);
  4986. LogManager.AddHardwareLog("将面转换为segment数据完成", true);
  4987. }
  4988. else
  4989. {
  4990. LogManager.AddHardwareLog("面采集失败", true);
  4991. return false;
  4992. }
  4993. //存储数据
  4994. //向分析点数据库更新
  4995. LogManager.AddHardwareLog("listPoints=" + listPoints.Count.ToString() + ",listFeature=" + listFeature.Count.ToString(), true);
  4996. if (!m_MeasDB.InsetAPoint(a_PointNum, PointsName, EDS_path, listPoints.Count, listFeature.Count, num))
  4997. {
  4998. LogManager.AddHardwareLog("插入分析点失败", true);
  4999. }
  5000. LogManager.AddHardwareLog("插入分析点成功", true);
  5001. int AreasNo = 0;
  5002. long[] XrayData = new long[2000];
  5003. Dictionary<string, double> listElement = new Dictionary<string, double>();
  5004. //点采集
  5005. foreach (System.Drawing.Point pt in listPoints)
  5006. {
  5007. XrayData = new long[2000];
  5008. listElement = new Dictionary<string, double>();
  5009. //LogManager.AddHardwareLog("点采集开始", true);
  5010. iExtender.XrayPointCollectiong(param.PointTime, pt.X, pt.Y, out XrayData, out listElement);
  5011. //写入数据库
  5012. m_nXrayId++;
  5013. Boolean ret = m_MeasDB.InsertAPointXay(a_PointNum, m_nXrayId, pt.X, pt.Y, XrayData, listElement, num);
  5014. LogManager.AddHardwareLog("点采集结束,写入数据库开始--" + m_nXrayId.ToString() + "," + ret.ToString(), true);
  5015. //LogManager.AddHardwareLog("点采集写入数据库结束", true);
  5016. if (m_nXrayId % 5 == 0)
  5017. {
  5018. Thread.Sleep(5000);
  5019. }
  5020. else
  5021. {
  5022. Thread.Sleep(1000);
  5023. }
  5024. }
  5025. //面采集
  5026. foreach (List<Segment> listSeg in listFeature)
  5027. {
  5028. XrayData = new long[2000];
  5029. listElement = new Dictionary<string, double>();
  5030. LogManager.AddHardwareLog("面采集开始", true);
  5031. LogManager.AddHardwareLog("AreaTime=" + param.AreaTime.ToString(), true);
  5032. iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement);
  5033. LogManager.AddHardwareLog("面采集结束,写入数据库开始", true);
  5034. //写入数据库
  5035. m_nXrayId++;
  5036. AreasNo++;
  5037. m_MeasDB.InsertAAreaXay(a_PointNum, m_nXrayId, AreasNo, listSeg, XrayData, listElement, num);
  5038. LogManager.AddHardwareLog("面采集写入数据库结束", true);
  5039. }
  5040. }
  5041. catch (Exception e)
  5042. {
  5043. LogManager.AddHardwareLog(e.Message, false);
  5044. }
  5045. return true;
  5046. }
  5047. /// <summary>
  5048. /// 初始化数据库
  5049. /// </summary>
  5050. public void Init_MeasDB()
  5051. {
  5052. m_MeasDB = new MeasureDB(m_measureFile);
  5053. }
  5054. /// <summary>
  5055. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  5056. /// </summary>
  5057. /// <returns></returns>
  5058. public bool EDS_FindCross()
  5059. {
  5060. float x2 = 0, y2 = 0;
  5061. int state = 0;
  5062. iSEM.SetAutoVideoOff();
  5063. Thread.Sleep(200);
  5064. iSEM.SetBrightness(50.0f);
  5065. Thread.Sleep(200);
  5066. iSEM.SetContrast(30.0f);
  5067. //1.控制SEM放大到300倍
  5068. float mag = m_measureFile.MParam.Photograph_Magnification / 3;
  5069. if (mag < 200)
  5070. {
  5071. mag = 200;
  5072. }
  5073. if (!iSEM.SetMagnification(mag))
  5074. {
  5075. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  5076. arg.State = false;
  5077. SendMsg("1-24");
  5078. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5079. return false;
  5080. }
  5081. Thread.Sleep(200);
  5082. float current = iSEM.GetMagnification();
  5083. Thread.Sleep(200);
  5084. while (Math.Abs(current - mag) > 2)
  5085. {
  5086. iSEM.SetMagnification(mag);
  5087. Thread.Sleep(200);
  5088. current = iSEM.GetMagnification();
  5089. Thread.Sleep(200);
  5090. }
  5091. Thread.Sleep(2000);
  5092. //判断是否停止进程
  5093. if (key_stop)
  5094. {
  5095. LogManager.AddHardwareLog("停止键按下", true);
  5096. return false;
  5097. }
  5098. //3.控制SEM拍照
  5099. String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
  5100. arg.Picture_Information.Picture_FullPath = fileName4;
  5101. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5102. Thread.Sleep(200);
  5103. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5104. Thread.Sleep(200);
  5105. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5106. Thread.Sleep(200);
  5107. //拍照前改变速度,延时
  5108. iSEM.CmdSaveRate();
  5109. Thread.Sleep(200);
  5110. cycle_time = iSEM.GetCycleTime();
  5111. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5112. if (!GetImage(fileName4))
  5113. {
  5114. //arg.State = false;
  5115. //arg.Message = "SEM拍照找切割位置失败";
  5116. //SendMsg("1-25");
  5117. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5118. return false;
  5119. }
  5120. //arg.Picture_Information.Picture_FullPath = fileName4;
  5121. //arg.State = true;
  5122. //arg.Message = "SEM拍照成功";
  5123. //SendMsg("1-25");
  5124. iSEM.CmdFocusRate(4);
  5125. Thread.Sleep(200);
  5126. cycle_time = iSEM.GetCycleTime();
  5127. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5128. //判断是否停止进程
  5129. if (key_stop)
  5130. {
  5131. return false;
  5132. }
  5133. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  5134. //5.根据坐标控制SEM移动到切孔位置,居中
  5135. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  5136. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  5137. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  5138. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  5139. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  5140. if (state == 1)
  5141. {
  5142. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  5143. if (!MoveToPixByMoveStage(x2, y2))
  5144. {
  5145. //arg.State = false;
  5146. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  5147. //SendMsg("1-26");
  5148. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5149. return false;
  5150. }
  5151. //判断是否移动完成
  5152. while (true)
  5153. {
  5154. Thread.Sleep(4000);
  5155. if (iSEM.GetStageIs() == 0)
  5156. {
  5157. break;
  5158. }
  5159. }
  5160. //arg.State = true;
  5161. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  5162. //SendMsg("1-26");
  5163. //高倍到低倍不进行对焦
  5164. //拍照前改变速度,延时
  5165. iSEM.CmdSaveRate();
  5166. Thread.Sleep(200);
  5167. cycle_time = iSEM.GetCycleTime();
  5168. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5169. if (hand_intervene == 1)
  5170. {
  5171. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5172. }
  5173. }
  5174. else
  5175. {
  5176. arg.Message = "图像接口参数state返回值为零";
  5177. arg.State = false;
  5178. SendMsg("1-26");
  5179. if (hand_intervene == 1)
  5180. {
  5181. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5182. {
  5183. return false;
  5184. }
  5185. }
  5186. else
  5187. {
  5188. return false;
  5189. }
  5190. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5191. return false;
  5192. }
  5193. //判断是否停止进程
  5194. if (key_stop)
  5195. {
  5196. LogManager.AddHardwareLog("停止键按下", true);
  5197. return false;
  5198. }
  5199. return true;
  5200. }
  5201. /// <summary>
  5202. /// 171.能谱第17步找点采集数据
  5203. /// </summary>
  5204. /// <returns></returns>
  5205. public bool EDS_ShotSection()
  5206. {
  5207. int state = 0;
  5208. #region 设置拍照的放大倍数
  5209. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  5210. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5211. {
  5212. //arg.Message = "放大倍数调整失败";
  5213. //arg.State = false;
  5214. //SendMsg("1-27");
  5215. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5216. return false;
  5217. }
  5218. float set = m_measureFile.MParam.Photograph_Magnification;
  5219. float current = iSEM.GetMagnification();
  5220. while (Math.Abs(current - set) > 1)
  5221. {
  5222. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  5223. Thread.Sleep(200);
  5224. current = iSEM.GetMagnification();
  5225. }
  5226. //arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString() + "成功";
  5227. //arg.State = true;
  5228. //SendMsg("1-27");
  5229. Thread.Sleep(3000 + (Int32)cycle_time);
  5230. //判断是否停止进程
  5231. if (key_stop)
  5232. {
  5233. LogManager.AddHardwareLog("停止键按下", true);
  5234. return false;
  5235. }
  5236. #endregion
  5237. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  5238. //2.控制SEM自动对焦、亮度、对比度-接口
  5239. iSEM.SetReduced(402, 128, 340, 256);
  5240. Thread.Sleep(200);
  5241. //add by sun 2020-12-15
  5242. iSEM.CmdFocusRate(5);
  5243. //add by sun 2020-12-15 end
  5244. Thread.Sleep(200);
  5245. cycle_time = iSEM.GetCycleTime();
  5246. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5247. if (!iSEM.SetAutoVideoOff())
  5248. {
  5249. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5250. return false;
  5251. }
  5252. Thread.Sleep(5000);
  5253. if (ImageFocus1(false))
  5254. {
  5255. //arg.Message = "自动对焦完成";
  5256. //arg.State = true;
  5257. //SendMsg("1-28");
  5258. }
  5259. else
  5260. {
  5261. //arg.Message = "自动对焦失败";
  5262. //arg.State = false;
  5263. //SendMsg("1-28");
  5264. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5265. return false;
  5266. }
  5267. iSEM.CloseReduced();
  5268. Thread.Sleep(200);
  5269. cycle_time = iSEM.GetCycleTime();
  5270. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  5271. //判断是否停止进程
  5272. if (key_stop)
  5273. {
  5274. LogManager.AddHardwareLog("停止键按下", true);
  5275. return false;
  5276. }
  5277. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5278. {
  5279. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5280. return false;
  5281. }
  5282. Thread.Sleep(5000);
  5283. //3、设置SEM补偿角度
  5284. if (m_measureFile.MParam.Is_Photograph == false)
  5285. {
  5286. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString() + "度", true);
  5287. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  5288. {
  5289. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  5290. //arg.State = false;
  5291. //SendMsg("1-29");
  5292. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5293. return false;
  5294. }
  5295. //arg.State = true;
  5296. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  5297. //SendMsg("1-29");
  5298. Thread.Sleep(200);
  5299. //判断是否停止进程
  5300. if (key_stop)
  5301. {
  5302. LogManager.AddHardwareLog("停止键按下", false);
  5303. return false;
  5304. }
  5305. }
  5306. //4、拍照,5、保存照片
  5307. String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS5;
  5308. arg.Picture_Information.Picture_FullPath = fileName5;
  5309. arg.Picture_Information.Work_Status = "SEM";
  5310. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5311. Thread.Sleep(200);
  5312. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5313. Thread.Sleep(200);
  5314. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5315. Thread.Sleep(200);
  5316. //拍照前改变速度,延时
  5317. iSEM.CmdSaveRate();
  5318. Thread.Sleep(200);
  5319. cycle_time = iSEM.GetCycleTime();
  5320. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  5321. if (!GetImage(fileName5))
  5322. {
  5323. //arg.Message = "SEM拍照失败";
  5324. //arg.State = false;
  5325. //SendMsg("1-30");
  5326. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5327. return false;
  5328. }
  5329. //arg.State = true;
  5330. //arg.Message = "SEM拍照成功";
  5331. //SendMsg("1-30");
  5332. iSEM.CmdFocusRate(4);
  5333. Thread.Sleep(200);
  5334. cycle_time = iSEM.GetCycleTime();
  5335. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5336. //判断是否停止进程
  5337. if (key_stop)
  5338. {
  5339. LogManager.AddHardwareLog("停止键按下", true);
  5340. return false;
  5341. }
  5342. #endregion
  5343. if (m_measureFile.MParam.Is_Photograph == false)
  5344. {
  5345. #region 对当前矩形进行旋转校正
  5346. //8,计算切割面区域偏移角度及方向
  5347. float degree = 0;
  5348. int direction = 0;
  5349. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  5350. LogManager.AddHardwareLog("测量线程:拍照角度移动,输入图像" + ImageNameEDS5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  5351. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  5352. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  5353. if (state == 1)
  5354. {
  5355. //梯形角度
  5356. iSEM.SetScanRotationOn();
  5357. Thread.Sleep(200);
  5358. //20201128陈工要求,谭博返回角度*0.7
  5359. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  5360. Thread.Sleep(200);
  5361. //arg.State = true;
  5362. //arg.Message = "图像接口返回角度为:" + degree.ToString();
  5363. //SendMsg("1-31");
  5364. if (hand_intervene == 1)
  5365. {
  5366. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5367. }
  5368. }
  5369. else
  5370. {
  5371. //arg.Message = "图像接口参数State返回值为零";
  5372. //arg.State = false;
  5373. //SendMsg("1-31");
  5374. if (hand_intervene == 1)
  5375. {
  5376. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5377. {
  5378. return false;
  5379. }
  5380. }
  5381. else
  5382. {
  5383. //return false;
  5384. }
  5385. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5386. }
  5387. //判断是否停止进程
  5388. if (key_stop)
  5389. {
  5390. LogManager.AddHardwareLog("停止键按下", true);
  5391. return false;
  5392. }
  5393. Thread.Sleep(200);
  5394. //12拍照
  5395. String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS6;
  5396. arg.Picture_Information.Picture_FullPath = fileName6;
  5397. arg.Picture_Information.Work_Status = "SEM";
  5398. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5399. Thread.Sleep(200);
  5400. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5401. Thread.Sleep(200);
  5402. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5403. Thread.Sleep(200);
  5404. //拍照前改变速度,延时
  5405. iSEM.CmdSaveRate();
  5406. Thread.Sleep(200);
  5407. cycle_time = iSEM.GetCycleTime();
  5408. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5409. if (!GetImage(fileName6))
  5410. {
  5411. //arg.Message = "SEM拍照失败";
  5412. //arg.State = false;
  5413. //SendMsg("1-33");
  5414. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5415. return false;
  5416. }
  5417. //arg.State = true;
  5418. //arg.Message = "SEM拍照成功";
  5419. //SendMsg("1-33");
  5420. iSEM.CmdFocusRate(4);
  5421. Thread.Sleep(200);
  5422. cycle_time = iSEM.GetCycleTime();
  5423. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5424. //判断是否停止进程
  5425. if (key_stop)
  5426. {
  5427. LogManager.AddHardwareLog("停止键按下", true);
  5428. return false;
  5429. }
  5430. #endregion
  5431. #region 获取两个位置上及放大倍数
  5432. //计算两个测量区域坐标
  5433. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  5434. List<float> mag = new List<float>();
  5435. System.Drawing.Point ct0;
  5436. float magMax = 0;
  5437. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  5438. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  5439. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  5440. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  5441. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  5442. "输入产品" + m_measureFile.MParam.Firm.ToString()
  5443. + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  5444. + "输出放大倍数1" + mag[0]
  5445. + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  5446. + "输出放大倍数2" + mag[0]
  5447. + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  5448. #endregion
  5449. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  5450. {
  5451. //arg.State = true;
  5452. //arg.Message = "获取位置及放大倍数成功";
  5453. //SendMsg("1-34");
  5454. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  5455. float xs = iSEM.GetBeamShiftX();
  5456. Thread.Sleep(200);
  5457. float ys = iSEM.GetBeamShiftY();
  5458. Thread.Sleep(200);
  5459. float xpCur = iSEM.GetStageAtX();
  5460. Thread.Sleep(200);
  5461. float ypCur = iSEM.GetStageAtY();
  5462. Thread.Sleep(200);
  5463. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  5464. + "y=" + ys.ToString() + ","
  5465. + "原来样品台的位置x= " + xpCur.ToString()
  5466. + "y=" + ypCur.ToString(), true);
  5467. #endregion
  5468. #region 移动到梯形左上角
  5469. //找到放大倍数最大值
  5470. magMax = mag[0];
  5471. for (int m = 1; m < mag.Count; m++)
  5472. {
  5473. if (mag[m] > magMax)
  5474. {
  5475. magMax = mag[m];
  5476. }
  5477. }
  5478. //20201127将视野移动到梯形左上角位置
  5479. MoveToPix(ct0.X, ct0.Y);
  5480. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  5481. + "," + ct0.Y.ToString() + ")", true);
  5482. //关闭自动亮度对比度
  5483. iSEM.SetAutoVideoOff();
  5484. Thread.Sleep(2000);
  5485. iSEM.SetReduced(402, 128, 340, 256);
  5486. Thread.Sleep(200);
  5487. //add by sun 2020-12-15
  5488. iSEM.CmdFocusRate(5);
  5489. //add by sun 2020-12-15 end
  5490. Thread.Sleep(200);
  5491. cycle_time = iSEM.GetCycleTime();
  5492. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5493. //放大到10000倍
  5494. iSEM.SetMagnification(magMax / 2);
  5495. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5496. set = magMax / 2;
  5497. current = iSEM.GetMagnification();
  5498. while (Math.Abs(current - set) > 1)
  5499. {
  5500. iSEM.SetMagnification(set);
  5501. Thread.Sleep(200);
  5502. current = iSEM.GetMagnification();
  5503. }
  5504. //自动对焦
  5505. if (!ImageFocus1(true))
  5506. {
  5507. return false;
  5508. }
  5509. //放大到10000倍
  5510. iSEM.SetMagnification(magMax);
  5511. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5512. set = magMax;
  5513. current = iSEM.GetMagnification();
  5514. while (Math.Abs(current - set) > 1)
  5515. {
  5516. iSEM.SetMagnification(set);
  5517. Thread.Sleep(200);
  5518. current = iSEM.GetMagnification();
  5519. }
  5520. //自动对焦
  5521. if (!ImageFocus1(true))
  5522. {
  5523. return false;
  5524. }
  5525. iSEM.CloseReduced();
  5526. Thread.Sleep(200);
  5527. cycle_time = iSEM.GetCycleTime();
  5528. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5529. #endregion
  5530. #region 恢复到拍照的状态
  5531. iSEM.SetStageGotoX(xpCur);
  5532. while (true)
  5533. {
  5534. Thread.Sleep(4000);
  5535. if (iSEM.GetStageIs() == 0)
  5536. {
  5537. break;
  5538. }
  5539. }
  5540. iSEM.SetStageGotoY(ypCur);
  5541. while (true)
  5542. {
  5543. Thread.Sleep(4000);
  5544. if (iSEM.GetStageIs() == 0)
  5545. {
  5546. break;
  5547. }
  5548. }
  5549. iSEM.CloseReduced();
  5550. Thread.Sleep(200);
  5551. cycle_time = iSEM.GetCycleTime();
  5552. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5553. //增亮图像
  5554. iSEM.SetAutoVideoOff();
  5555. Thread.Sleep(200);
  5556. float currentBright = iSEM.GetBrightness();
  5557. Thread.Sleep(200);
  5558. float currentContrast = iSEM.GetContrast();
  5559. Thread.Sleep(200);
  5560. iSEM.SetBrightness(currentBright + 2);
  5561. Thread.Sleep(200);
  5562. iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
  5563. Thread.Sleep(200);
  5564. #endregion
  5565. #region 循环拍照
  5566. for (int n = 0; n < ct.Count; n++)
  5567. {
  5568. #region 恢复到拍照的状态
  5569. iSEM.SetStageGotoX(xpCur);
  5570. while (true)
  5571. {
  5572. Thread.Sleep(4000);
  5573. if (iSEM.GetStageIs() == 0)
  5574. {
  5575. break;
  5576. }
  5577. }
  5578. iSEM.SetStageGotoY(ypCur);
  5579. while (true)
  5580. {
  5581. Thread.Sleep(4000);
  5582. if (iSEM.GetStageIs() == 0)
  5583. {
  5584. break;
  5585. }
  5586. }
  5587. //恢复原来的放大倍数
  5588. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5589. {
  5590. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5591. return false;
  5592. }
  5593. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5594. set = m_measureFile.MParam.Photograph_Magnification;
  5595. current = iSEM.GetMagnification();
  5596. while (Math.Abs(current - set) > 1)
  5597. {
  5598. iSEM.SetMagnification(set);
  5599. Thread.Sleep(200);
  5600. current = iSEM.GetMagnification();
  5601. }
  5602. //恢复BeamShift的百分比值
  5603. iSEM.SetBeamShiftX(xs);
  5604. Thread.Sleep(200);
  5605. iSEM.SetBeamShiftY(ys);
  5606. Thread.Sleep(200);
  5607. #endregion
  5608. #region 移动到指定点位置
  5609. if (!MoveToPix(ct[n].X, ct[n].Y))
  5610. {
  5611. arg.State = false;
  5612. arg.Message = "移动到第一个点位置失败";
  5613. SendMsg("1-" + (35 + n).ToString());
  5614. //移动到第一个点失败
  5615. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  5616. }
  5617. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  5618. + "," + ct[n].Y.ToString() + ")", true);
  5619. #endregion
  5620. #region 如果是第一个点,则1W倍对焦
  5621. if (n == 0)
  5622. {
  5623. }
  5624. #endregion
  5625. #region 拍照
  5626. if (!iSEM.SetMagnification(mag[n]))
  5627. {
  5628. arg.State = false;
  5629. arg.Message = "移动到第一个点位置拍照失败";
  5630. SendMsg("1-35");
  5631. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5632. return false;
  5633. }
  5634. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5635. set = mag[n];
  5636. current = iSEM.GetMagnification();
  5637. while (Math.Abs(current - set) > 1)
  5638. {
  5639. iSEM.SetMagnification(set);
  5640. Thread.Sleep(200);
  5641. current = iSEM.GetMagnification();
  5642. }
  5643. DoEDS(m_nWorkHoleNo + 1, cutHoles[m_nWorkHoleNo].HoleName, n + 1);
  5644. #endregion
  5645. }
  5646. #endregion
  5647. if (hand_intervene == 1)
  5648. {
  5649. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5650. }
  5651. }
  5652. else
  5653. {
  5654. if (hand_intervene == 1)
  5655. {
  5656. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5657. {
  5658. // return false;
  5659. }
  5660. }
  5661. else
  5662. {
  5663. //return false;
  5664. }
  5665. //arg.State = false;
  5666. //arg.Message = "获取位置及放大倍数失败";
  5667. //SendMsg("1-34");
  5668. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5669. }
  5670. //判断是否停止进程
  5671. if (key_stop)
  5672. {
  5673. LogManager.AddHardwareLog("停止键按下", true);
  5674. return false;
  5675. }
  5676. }
  5677. //判断是否停止进程
  5678. if (key_stop)
  5679. {
  5680. return false;
  5681. }
  5682. return true;
  5683. }
  5684. /// <summary>
  5685. /// 19.能谱分析
  5686. /// </summary>
  5687. /// <returns></returns>
  5688. public bool EDSAnalysis()
  5689. {
  5690. //1.先降Z轴
  5691. if (m_measureFile.MParam.EDSZ < Z_Min || m_measureFile.MParam.EDSZ > Z_Max)
  5692. {
  5693. LogManager.AddHardwareLog("Z轴位置设置超出范围.", true);
  5694. }
  5695. LogManager.AddHardwareLog("将Z轴位置指定到:" + m_measureFile.MParam.EDSZ.ToString(), true);
  5696. if (!iSEM.SetStageGotoZ(m_measureFile.MParam.EDSZ))
  5697. {
  5698. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  5699. return false;
  5700. }
  5701. while (true)
  5702. {
  5703. Thread.Sleep(4000);
  5704. if (iSEM.GetStageIs() == 0)
  5705. {
  5706. break;
  5707. }
  5708. }
  5709. //判断是否停止进程
  5710. if (key_stop)
  5711. {
  5712. LogManager.AddHardwareLog("停止键按下", true);
  5713. return false;
  5714. }
  5715. //2.角度改为54度
  5716. iSEM.SetScanRotationOff();
  5717. Thread.Sleep(200);
  5718. //3.设置电压和电流
  5719. iSEM.SetSEMVoltage(m_measureFile.MParam.EDSV);
  5720. Thread.Sleep(2000);
  5721. iSEM.SetSEMIPROBE(m_measureFile.MParam.EDSA);
  5722. Thread.Sleep(500);
  5723. //4.自动亮度对比度
  5724. iSEM.SetAutoBright(100);
  5725. Thread.Sleep(200);
  5726. iSEM.SetAutoContrast(100);
  5727. Thread.Sleep(200);
  5728. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5729. {
  5730. LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  5731. return false;
  5732. }
  5733. Thread.Sleep(5000);
  5734. //5.自动对焦
  5735. iSEM.SetReduced(256, 192, 512, 512);
  5736. Thread.Sleep(200);
  5737. //add by sun 2020-12-15
  5738. iSEM.CmdFocusRate(5);
  5739. //add by sun 2020-12-15 end
  5740. Thread.Sleep(200);
  5741. cycle_time = iSEM.GetCycleTime();
  5742. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5743. if (!ImageFocus1(false))
  5744. {
  5745. return false;
  5746. }
  5747. iSEM.CloseReduced();
  5748. Thread.Sleep(200);
  5749. cycle_time = iSEM.GetCycleTime();
  5750. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5751. //6.调用161步过程
  5752. if (!EDS_FindCross())
  5753. {
  5754. return false;
  5755. }
  5756. //7.调用171步过程
  5757. if (!EDS_ShotSection())
  5758. {
  5759. return false;
  5760. }
  5761. return true;
  5762. }
  5763. /// <summary>
  5764. /// 20.光束等复位
  5765. /// </summary>
  5766. public void BeamShiftReset()
  5767. {
  5768. iSEM.SetTiltAngleOff();
  5769. Thread.Sleep(200);
  5770. iSEM.SetScanRotationOff();
  5771. Thread.Sleep(200);
  5772. iSEM.SetBeamShiftX(0);
  5773. Thread.Sleep(200);
  5774. iSEM.SetBeamShiftY(0);
  5775. Thread.Sleep(200);
  5776. }
  5777. #endregion
  5778. }
  5779. }