Measure.cs 83 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using WebManager;
  16. using OpenCvSharp;
  17. namespace MeasureThread
  18. {
  19. //图片模式
  20. public enum ImageMode
  21. {
  22. FIB,
  23. SEM
  24. }
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. public class ThreadStatusEventArgs
  28. {
  29. //状态
  30. public Boolean State
  31. {
  32. get { return m_state; }
  33. set { m_state = value; }
  34. }
  35. private Boolean m_state;
  36. //时间
  37. public DateTime Time
  38. {
  39. get { return m_time; }
  40. set { m_time = value; }
  41. }
  42. private DateTime m_time;
  43. //步骤代码
  44. public String Step_Code
  45. {
  46. get { return step_Code; }
  47. set { step_Code = value; }
  48. }
  49. private String step_Code;
  50. //其他消息
  51. public String Message
  52. {
  53. get { return this.message; }
  54. set { this.message = value; }
  55. }
  56. private String message;
  57. //孔名
  58. public String HoleName
  59. {
  60. get { return this.holeName; }
  61. set { this.holeName = value; }
  62. }
  63. private String holeName;
  64. //图片信息
  65. public class PictureInformation
  66. {
  67. public String Picture_FullPath
  68. {
  69. get { return picture_FullPath; }
  70. set { picture_FullPath = value; }
  71. }
  72. private String picture_FullPath;
  73. public double Work_Voltage
  74. {
  75. get { return work_Voltage; }
  76. set { work_Voltage = value; }
  77. }
  78. private double work_Voltage;
  79. public double Magnification
  80. {
  81. get { return magnification; }
  82. set { magnification = value; }
  83. }
  84. private double magnification;
  85. public double Work_Distance
  86. {
  87. get { return work_Distance; }
  88. set { work_Distance = value; }
  89. }
  90. private double work_Distance;
  91. public String Work_Status
  92. {
  93. get { return work_Status; }
  94. set { work_Status = value; }
  95. }
  96. private String work_Status;
  97. }
  98. //图片信息实例类
  99. public PictureInformation Picture_Information
  100. {
  101. get { return picture_Information; }
  102. set { picture_Information = value; }
  103. }
  104. private PictureInformation picture_Information;
  105. //图像信息
  106. public class ImageInformation
  107. {
  108. public int Method_Name
  109. {
  110. get { return method_Name; }
  111. set { method_Name = value; }
  112. }
  113. private int method_Name;
  114. public Source_Img_Degree_Direction SIDD;
  115. public Cut_Position CP;
  116. public Cut_Success CS;
  117. public Trapezoid_Top_Center_Position TTCP;
  118. public Auto_Foucs AF;
  119. public Auto_Stigmatic AS;
  120. public Center_Position_OffsetAngle_Direction CPOD;
  121. public Measure_Size MS;
  122. public ImageInformation()
  123. {
  124. SIDD = new Source_Img_Degree_Direction();
  125. CP = new Cut_Position();
  126. CS = new Cut_Success();
  127. TTCP = new Trapezoid_Top_Center_Position();
  128. AF = new Auto_Foucs();
  129. AS = new Auto_Stigmatic();
  130. CPOD = new Center_Position_OffsetAngle_Direction();
  131. MS = new Measure_Size();
  132. }
  133. //1-计算原始图像偏移角度及方向
  134. public class Source_Img_Degree_Direction
  135. {
  136. public Boolean Is_Image = false;
  137. public double Degree
  138. {
  139. get { return degree; }
  140. set { degree = value; }
  141. }
  142. private double degree;
  143. public int Direction
  144. {
  145. get { return direction; }
  146. set { direction = value; }
  147. }
  148. private int direction;
  149. public int State
  150. {
  151. get { return state; }
  152. set { state = value; }
  153. }
  154. private int state;
  155. }
  156. //2-计算切割点位置
  157. public class Cut_Position
  158. {
  159. public Boolean Is_Image = false;
  160. public double Offsetx
  161. {
  162. get { return offsetx; }
  163. set { offsetx = value; }
  164. }
  165. private double offsetx;
  166. public double Offsety
  167. {
  168. get { return offsety; }
  169. set { offsety = value; }
  170. }
  171. private double offsety;
  172. public int State
  173. {
  174. get { return state; }
  175. set { state = value; }
  176. }
  177. private int state;
  178. }
  179. //3-是否切割成功
  180. public class Cut_Success
  181. {
  182. public Boolean Is_Image = false;
  183. public int State
  184. {
  185. get { return state; }
  186. set { state = value; }
  187. }
  188. private int state;
  189. }
  190. //4-计算切割后图像梯形区域上边中心点坐标
  191. public class Trapezoid_Top_Center_Position
  192. {
  193. public Boolean Is_Image = false;
  194. public double TopCenterX
  195. {
  196. get { return topCenterX; }
  197. set { topCenterX = value; }
  198. }
  199. private double topCenterX;
  200. public double TopCenterY
  201. {
  202. get { return topCenterY; }
  203. set { topCenterY = value; }
  204. }
  205. private double topCenterY;
  206. public int State
  207. {
  208. get { return state; }
  209. set { state = value; }
  210. }
  211. private int state;
  212. }
  213. //5-自动对焦
  214. public class Auto_Foucs
  215. {
  216. public Boolean Is_Image = true;
  217. public String Img_Path
  218. {
  219. get { return img_Path; }
  220. set { img_Path = value; }
  221. }
  222. private String img_Path;
  223. }
  224. //6-自动像闪
  225. public class Auto_Stigmatic
  226. {
  227. public Boolean Is_Image = true;
  228. public String Img_Path
  229. {
  230. get { return img_Path; }
  231. set { img_Path = value; }
  232. }
  233. private String img_Path;
  234. }
  235. //7-计算切割面区域中心坐标,以及偏移角度及方向
  236. public class Center_Position_OffsetAngle_Direction
  237. {
  238. public Boolean Is_Image = false;
  239. public double CenterX
  240. {
  241. get { return centerX; }
  242. set { centerX = value; }
  243. }
  244. private double centerX;
  245. public double CenterY
  246. {
  247. get { return centerY; }
  248. set { centerY = value; }
  249. }
  250. private double centerY;
  251. public double Degree
  252. {
  253. get { return degree; }
  254. set { degree = value; }
  255. }
  256. private double degree;
  257. public int Direction
  258. {
  259. get { return direction; }
  260. set { direction = value; }
  261. }
  262. private int direction;
  263. public int State
  264. {
  265. get { return state; }
  266. set { state = value; }
  267. }
  268. private int state;
  269. }
  270. //8-测量尺寸
  271. public class Measure_Size
  272. {
  273. public Boolean Is_Image = false;
  274. public int State
  275. {
  276. get { return state; }
  277. set { state = value; }
  278. }
  279. private int state;
  280. }
  281. }
  282. //图像信息实例类
  283. public ImageInformation Image_Information
  284. {
  285. get { return image_Information; }
  286. set { image_Information = value; }
  287. }
  288. private ImageInformation image_Information;
  289. public ThreadStatusEventArgs(string a_State)
  290. {
  291. picture_Information = new PictureInformation();
  292. image_Information = new ImageInformation();
  293. }
  294. }
  295. public class CutHolesStatusEventArgs
  296. {
  297. public string State
  298. {
  299. get { return m_state; }
  300. set { m_state = value; }
  301. }
  302. private string m_state;
  303. public string HoleName
  304. {
  305. get { return m_holeName; }
  306. set { m_holeName = value; }
  307. }
  308. private string m_holeName;
  309. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  310. {
  311. this.m_state = a_state;
  312. this.m_holeName = a_holeName;
  313. }
  314. }
  315. public class Measure
  316. {
  317. /// <summary>
  318. /// 图像拉直算法
  319. /// </summary>
  320. /// <param name="Slope">倾斜角度</param>
  321. /// <param name="x0">圆心坐标x</param>
  322. /// <param name="y0">圆心坐标y</param>
  323. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  324. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  325. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  326. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  327. /// <returns></returns>
  328. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  329. {
  330. try
  331. {
  332. double xr = x1 - x0;//倾斜图到中心的距离差x
  333. double yr = y1 - y0;//倾斜图到中心的距离差y
  334. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  335. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  336. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  337. double k_S = k - Slope;//通过夹角差求x2,y2
  338. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  339. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  340. if (Slope > 0 || Slope < 0)
  341. {
  342. Hx = x1 - x2;
  343. Hy = y1 - y2;
  344. }
  345. else
  346. {
  347. Hx = 0;
  348. Hy = 0;
  349. }
  350. return true;
  351. }
  352. catch (Exception)
  353. {
  354. return false;
  355. }
  356. }
  357. public WebResult wr = null;
  358. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  359. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  360. //定义一个全局的消息类
  361. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  362. //全局只有一个fatorySEM
  363. static FactoryHardware factorySEM = FactoryHardware.Instance;
  364. ISEMControl iSEM = factorySEM.ISEM;
  365. //@的作用是不用转义字符\\只打一个就行
  366. const String ImageName1 = @"ImageSEMH.tif"; //传给客户,作水平校正
  367. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  368. const String ImageName31 = @"ImageFIBBefore.tif";
  369. const String ImageName32 = @"ImageFIBAfter.tif";
  370. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  371. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  372. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  373. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  374. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  375. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  376. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  377. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  378. const String ElyDeposition = @"Deposition.ely"; //沉积
  379. const String ElyCrossSection = @"CrossSection.ely"; //切割
  380. const float fMin = (float)0.0000002; //单位是米
  381. public Boolean key_stop = false;
  382. String focus_path = "";
  383. String data_path = "";
  384. int m_nWorkHoleNo = -1;
  385. //测量文件
  386. private MeasureFile m_measureFile;
  387. public MeasureFile MeasureFile
  388. {
  389. get { return this.m_measureFile; }
  390. set { this.m_measureFile = value; }
  391. }
  392. //测量的切割孔
  393. private List<MeasureData.CutHole> m_cutHoles;
  394. public List<MeasureData.CutHole> cutHoles
  395. {
  396. get { return this.m_cutHoles; }
  397. set { this.m_cutHoles = value; }
  398. }
  399. //工作文件夹
  400. private string m_WorkingFolder;
  401. public string WorkingFolder
  402. {
  403. get { return this.m_WorkingFolder; }
  404. set { this.m_WorkingFolder = value; }
  405. }
  406. //程序当前路径
  407. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  408. //线程状态
  409. private ThreadStatus m_ThreadStatus;
  410. public ThreadStatus TStatus
  411. {
  412. get { return this.m_ThreadStatus; }
  413. set { this.m_ThreadStatus = value; }
  414. }
  415. //测量参数
  416. private MeasureParam m_MsParam;
  417. public MeasureParam MeasParam
  418. {
  419. get { return this.m_MsParam; }
  420. set { this.m_MsParam = value; }
  421. }
  422. //构造函数
  423. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  424. {
  425. MeasParam = new MeasureParam();
  426. TStatus = new ThreadStatus();
  427. cutHoles = new List<MeasureData.CutHole>();
  428. //配置远程连接
  429. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  430. }
  431. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  432. public bool InitMeas(MeasureFile a_measureFile)
  433. {
  434. m_measureFile = a_measureFile;
  435. List<CutHole> listHoles = m_measureFile.ListCutHole;
  436. foreach (CutHole h in listHoles)
  437. {
  438. if (h.SWITCH == true)
  439. {
  440. m_cutHoles.Add(h);
  441. }
  442. }
  443. if (m_cutHoles.Count == 0)
  444. return false;
  445. this.m_MsParam = m_measureFile.MParam;
  446. return true;
  447. }
  448. public void SendMsg(string step_code)
  449. {
  450. arg.Step_Code = step_code;
  451. arg.Time = DateTime.Now;
  452. SendThreadStatus(this, arg);
  453. }
  454. public void SendCutHoleMsg(string a_state, string a_holeName)
  455. {
  456. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  457. arg.HoleName = a_holeName;
  458. arg.State = a_state;
  459. SendCutHolesStatus(this, arg);
  460. }
  461. //测量流程
  462. public void DoMeasure()
  463. {
  464. //创建线程的测量状态的更新
  465. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  466. if (SendThreadStatus != null)
  467. {
  468. //SendMsg("开始测量。");
  469. }
  470. LogManager.AddHardwareLog("开始测量",true);
  471. //检查硬件连接是否正常
  472. if (!ConnectHardware())
  473. {
  474. //SendMsg("连接硬件失败。");
  475. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  476. return;
  477. }
  478. //SendMsg("硬件连接成功。");
  479. //设置工作文件夹
  480. if (!SetWorkingFolderStr())
  481. {
  482. //SendMsg("设置工作文件夹失败");
  483. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  484. return;
  485. }
  486. //SendMsg("创建工作文件路径为" + WorkingFolder);
  487. float[] firstPosition;
  488. //将停止键复位
  489. key_stop = false;
  490. for (int i = 0; i < m_cutHoles.Count; i++)
  491. {
  492. m_nWorkHoleNo = i;
  493. arg.HoleName = m_cutHoles[i].HoleName;
  494. //创建文件夹,孔名文件夹结构
  495. //最终数据存放目录
  496. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  497. //对焦数据存放目录
  498. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  499. m_MsParam.AutoFocus.Path = focus_path;
  500. if (!Directory.Exists(focus_path))
  501. {
  502. Directory.CreateDirectory(focus_path);
  503. }
  504. //判断孔状态
  505. if(m_cutHoles[i].STATE != State.Unmeasured)
  506. {
  507. continue;
  508. }
  509. //开始循环工作
  510. if (i == 0)
  511. {
  512. //SendMsg("第一个切孔开始测量");
  513. //切孔操作-开始
  514. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  515. firstPosition = iSEM.GetStagePosition();
  516. //第一个孔的测试
  517. //成功
  518. if(FirstHole())
  519. {
  520. //保存文件,将测量状态更改
  521. m_cutHoles[i].STATE = State.Success;
  522. m_measureFile.Save();
  523. }
  524. //失败
  525. else
  526. {
  527. m_cutHoles[i].STATE = State.Failed;
  528. m_measureFile.Save();
  529. }
  530. //切孔操作-完成
  531. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  532. }
  533. else
  534. {
  535. //非第一个孔的测试
  536. //SendMsg("第" + i.ToString() + "个切孔开始测量");
  537. //切孔操作-开始
  538. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  539. //其他孔的测试
  540. //成功
  541. if (OtherHole())
  542. {
  543. //保存文件,将测量状态更改
  544. m_cutHoles[i].STATE = State.Success;
  545. m_measureFile.Save();
  546. }
  547. //失败
  548. else
  549. {
  550. m_cutHoles[i].STATE = State.Failed;
  551. m_measureFile.Save();
  552. }
  553. //切孔操作-完成
  554. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  555. }
  556. if(key_stop)
  557. {
  558. m_cutHoles[i].STATE = State.Unmeasured;
  559. m_measureFile.Save();
  560. arg.Message = "用户停止测量";
  561. SendMsg("0-0");
  562. break;
  563. }
  564. }
  565. }
  566. //检查硬件连接是否正常
  567. public bool ConnectHardware()
  568. {
  569. //返回硬件的连接状态
  570. return iSEM.ConnectStatus();
  571. }
  572. //设置工作文件夹
  573. public bool SetWorkingFolderStr()
  574. {
  575. WorkingFolder = m_measureFile.FilePath;
  576. return true;
  577. }
  578. //插入PT针
  579. public bool InsertPT()
  580. {
  581. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  582. //SendMsg("调用宏插入PT针宏文件" + fn);
  583. iSEM.CMDMCFFilename(fn);
  584. //延时1s??
  585. Thread.Sleep(1000);
  586. return true;
  587. }
  588. //撤出PT针
  589. public bool RetractPT()
  590. {
  591. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  592. //SendMsg("调用宏撤出PT针宏文件" + fn);
  593. iSEM.CMDMCFFilename(fn);
  594. //延时1s??
  595. Thread.Sleep(1000);
  596. return true;
  597. }
  598. //PT沉积
  599. public bool PTWork()
  600. {
  601. //执行PT沉积的ELY文件
  602. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  603. //SendMsg("执行PT沉积Ely文件:" + fn);
  604. if (!ExcuteEly(fn))
  605. {
  606. return false;
  607. }
  608. //等待沉积完成
  609. while (true)
  610. {
  611. Thread.Sleep(10000);
  612. if (iSEM.GetFIBMode() == 0)
  613. {
  614. break;
  615. }
  616. }
  617. return true;
  618. }
  619. //FIB切割
  620. public bool FIBWork()
  621. {
  622. //执行PT沉积的ELY文件
  623. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  624. //SendMsg("执行FIB切割Ely文件:" + fn);
  625. if (!ExcuteEly(fn))
  626. {
  627. return false;
  628. }
  629. //等待切割完成
  630. while (true)
  631. {
  632. Thread.Sleep(10000);
  633. if (iSEM.GetFIBMode() == 0)
  634. {
  635. break;
  636. }
  637. }
  638. return true;
  639. }
  640. //执行ELY文件的步骤
  641. public bool ExcuteEly(string a_filename)
  642. {
  643. //执行ELy文件有三个动作
  644. //1. 选择ELY文件
  645. //SendMsg("选择ELY文件");
  646. if (!iSEM.CmdFIBLoadELY(a_filename))
  647. {
  648. //SendMsg("选择ELY文件失败");
  649. return false;
  650. }
  651. Thread.Sleep(1000);
  652. //2. 确认ELY文件
  653. //SendMsg("确认ELY文件");
  654. if (!iSEM.CmdFIBEXPOSUREELY())
  655. {
  656. //SendMsg("确认ELY文件失败");
  657. return false;
  658. }
  659. Thread.Sleep(1000);
  660. //3. 执行ELY文件
  661. //SendMsg("执行ELY文件");
  662. if (!iSEM.CmdFIBSTARTELY())
  663. {
  664. //SendMsg("执行ELY文件失败");
  665. return false;
  666. }
  667. Thread.Sleep(1000);
  668. return true;
  669. }
  670. //执行自动对焦
  671. public bool ImageFocus()
  672. {
  673. if (m_measureFile.MParam.FocusMode == 1)//手动
  674. {
  675. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  676. {
  677. }
  678. else
  679. {
  680. return false;
  681. }
  682. }
  683. else if(m_measureFile.MParam.FocusMode == 2)//自有自动
  684. {
  685. //郝工增加自动对焦算法
  686. //处理文件夹
  687. if (Directory.Exists(focus_path))
  688. {
  689. Directory.Delete(focus_path, true);
  690. }
  691. Thread.Sleep(5000);
  692. Directory.CreateDirectory(focus_path);
  693. //1、对焦参数类,2、输出工作距离
  694. int wd = 0;
  695. AutoFocus(m_MsParam.AutoFocus, out wd);
  696. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  697. //设置工作距离
  698. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  699. //设置完工作距离后必须延迟5秒
  700. Thread.Sleep(5000);
  701. //处理图片位置
  702. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  703. }
  704. else if(m_MsParam.FocusMode == 3) //客户自动
  705. {
  706. //后期和客户对接接口
  707. List<string> filenames = new List<string>();
  708. String retfilename = wr.Img_Auto_Focus(filenames);
  709. }
  710. else //蔡司自动对焦
  711. {
  712. iSEM.CmdAutoFocusCoarse();
  713. while(true)
  714. {
  715. Thread.Sleep(10000);
  716. if(0 == iSEM.GetAutoFunction())
  717. {
  718. break;
  719. }
  720. }
  721. iSEM.CmdAutoFocusFine();
  722. while (true)
  723. {
  724. Thread.Sleep(10000);
  725. if (0 == iSEM.GetAutoFunction())
  726. {
  727. break;
  728. }
  729. }
  730. }
  731. return true;
  732. }
  733. /// <summary>
  734. ///13. 自动 定位功能,沉积
  735. /// </summary>
  736. /// <returns></returns>
  737. public bool GetPoistion(Boolean isFirst)
  738. {
  739. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  740. int state = 0;
  741. //1.控制SEM放大600X
  742. arg.Picture_Information.Work_Status = "FIB";
  743. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  744. {
  745. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  746. arg.State = false;
  747. SendMsg("1-1");
  748. return false;
  749. }
  750. arg.State = true;
  751. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  752. SendMsg("1-1");
  753. //判断是否停止进程
  754. if (key_stop)
  755. {
  756. return false;
  757. }
  758. //2.控制SEM自动对焦、亮度、对比度
  759. if(ImageFocus())
  760. {
  761. arg.Message = "自动对焦完成";
  762. arg.State = true;
  763. SendMsg("1-2");
  764. }
  765. else
  766. {
  767. arg.Message = "自动对焦失败";
  768. arg.State = false;
  769. SendMsg("1-2");
  770. }
  771. //判断是否停止进程
  772. if (key_stop)
  773. {
  774. return false;
  775. }
  776. //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
  777. if (!isFirst)
  778. {
  779. if (!TiltCorrection(54))
  780. {
  781. arg.Message = "设置SEM进行角度补偿54度失败";
  782. arg.State = false;
  783. SendMsg("1-3");
  784. return false;
  785. }
  786. Thread.Sleep(5000);
  787. arg.State = true;
  788. arg.Message = "设置SEM进行角度补偿54度成功";
  789. SendMsg("1-3");
  790. //判断是否停止进程
  791. if (key_stop)
  792. {
  793. return false;
  794. }
  795. }
  796. else
  797. {
  798. Thread.Sleep(2000);
  799. arg.State = true;
  800. arg.Message = "设置SEM进行角度补偿54度成功";
  801. SendMsg("1-3");
  802. }
  803. //4.控制SEM拍照,5保存照片=====需要更改路径
  804. String fileName1 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  805. arg.Picture_Information.Picture_FullPath = fileName1;
  806. arg.Picture_Information.Work_Status = "SEM";
  807. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  808. Thread.Sleep(1000);
  809. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  810. Thread.Sleep(1000);
  811. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  812. Thread.Sleep(1000);
  813. if (!GetImage(ImageMode.SEM, fileName1))
  814. {
  815. arg.Message = "SEM拍照失败";
  816. arg.State = false;
  817. SendMsg("1-4");
  818. return false;
  819. }
  820. arg.State = true;
  821. arg.Message = "SEM拍照成功";
  822. SendMsg("1-4");
  823. Thread.Sleep(3000);
  824. //判断是否停止进程
  825. if (key_stop)
  826. {
  827. return false;
  828. }
  829. //判断是否为仅拍照,不是则执行FIB操作
  830. if (!m_MsParam.Is_Photograph)
  831. {
  832. //6.设置FIB拍照参数——扫描时间、束流等
  833. //7.控制FIB自动亮度、对比度
  834. if (!iSEM.CmdFIBModeFIB())
  835. {
  836. arg.Message = "FIB模式切换失败";
  837. arg.State = false;
  838. SendMsg("1-5");
  839. return false;
  840. }
  841. arg.State = true;
  842. arg.Picture_Information.Work_Status = "FIB";
  843. arg.Message = "FIB模式切换成功";
  844. SendMsg("1-5");
  845. Thread.Sleep(10000);
  846. //判断是否停止进程
  847. if (key_stop)
  848. {
  849. return false;
  850. }
  851. //8.控制FIB拍照
  852. //9.保存照片======更改路径
  853. String fileName2 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  854. arg.Picture_Information.Picture_FullPath = fileName2;
  855. arg.Picture_Information.Work_Status = "FIB";
  856. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  857. Thread.Sleep(1000);
  858. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  859. Thread.Sleep(1000);
  860. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  861. Thread.Sleep(1000);
  862. if (!GetImage(ImageMode.FIB, fileName2))
  863. {
  864. arg.Message = "FIB拍照失败";
  865. arg.State = false;
  866. SendMsg("1-6");
  867. return false;
  868. }
  869. arg.State = true;
  870. arg.Message = "FIB拍照成功";
  871. SendMsg("1-6");
  872. Thread.Sleep(3000);
  873. //判断是否停止进程
  874. if (key_stop)
  875. {
  876. return false;
  877. }
  878. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  879. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  880. {
  881. arg.Message = "样品台移动到指定位置";
  882. arg.State = true;
  883. SendMsg("1-7");
  884. }
  885. else
  886. {
  887. wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  888. if (state == 1)
  889. {
  890. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  891. if (!iSEM.MoveStageXY(x1, y1))
  892. {
  893. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  894. arg.State = false;
  895. SendMsg("1-7");
  896. return false;
  897. }
  898. //判断是否移动完成
  899. while (true)
  900. {
  901. Thread.Sleep(5000);
  902. if (iSEM.GetStageIs() == 0)
  903. {
  904. break;
  905. }
  906. }
  907. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  908. arg.State = true;
  909. SendMsg("1-7");
  910. }
  911. else
  912. {
  913. arg.Message = "样品台移动失败";
  914. arg.State = false;
  915. SendMsg("1-7");
  916. return false;
  917. }
  918. }
  919. //判断是否停止进程
  920. if (key_stop)
  921. {
  922. return false;
  923. }
  924. //11.自动工具样品类型参数确定是否需要PT沉积
  925. if (m_MsParam.PT)
  926. {
  927. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  928. //第10步已经移动好位置
  929. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  930. x0 = iSEM.GetStageAtX();
  931. y0 = iSEM.GetStageAtY();
  932. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  933. {
  934. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
  935. arg.State = false;
  936. SendMsg("1-8");
  937. return false;
  938. }
  939. arg.State = true;
  940. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
  941. SendMsg("1-8");
  942. //判断是否停止进程
  943. if (key_stop)
  944. {
  945. return false;
  946. }
  947. //3. 根据坐标进行PT沉积
  948. if (!PTWork())
  949. {
  950. arg.Message = "PT沉积失败";
  951. arg.State = false;
  952. SendMsg("1-9");
  953. return false;
  954. }
  955. arg.State = true;
  956. arg.Message = "PT沉积成功";
  957. SendMsg("1-9");
  958. //判断是否停止进程
  959. if (key_stop)
  960. {
  961. return false;
  962. }
  963. }
  964. }
  965. //12.根据梯形坐标控制FIB调整到中心位置
  966. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  967. //以上两步已经将程序移动到11内部去做
  968. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  969. float[] firstPosition = iSEM.GetStagePosition();
  970. m_cutHoles[0].Position.X = firstPosition[0];
  971. m_cutHoles[0].Position.Y = firstPosition[1];
  972. m_cutHoles[0].Position.Z = firstPosition[2];
  973. m_cutHoles[0].Position.T = firstPosition[3];
  974. m_cutHoles[0].Position.R = firstPosition[4];
  975. m_cutHoles[0].Position.M = firstPosition[5];
  976. //这里要调用文件保存功能
  977. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  978. + firstPosition[1].ToString() + ","
  979. + firstPosition[2].ToString() + ","
  980. + firstPosition[3].ToString() + ","
  981. + firstPosition[4].ToString() + ","
  982. + firstPosition[5].ToString() + ")";
  983. arg.State = true;
  984. SendMsg("1-10");
  985. //判断是否停止进程
  986. if (key_stop)
  987. {
  988. return false;
  989. }
  990. return true;
  991. }
  992. /// <summary>
  993. /// 14. FIB切割
  994. /// </summary>
  995. /// <returns></returns>
  996. public bool FIBCross()
  997. {
  998. int state = 0;
  999. //切之前拍照保存,,
  1000. String fileName31 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName31;
  1001. arg.Picture_Information.Picture_FullPath = fileName31;
  1002. arg.Picture_Information.Work_Status = "FIB";
  1003. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1004. Thread.Sleep(1000);
  1005. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1006. Thread.Sleep(1000);
  1007. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1008. Thread.Sleep(1000);
  1009. if (!GetImage(ImageMode.FIB, fileName31))
  1010. {
  1011. arg.Message = "FIB切割前拍照失败";
  1012. arg.State = false;
  1013. SendMsg("1-11");
  1014. return false;
  1015. }
  1016. arg.State = true;
  1017. arg.Message = "FIB切割前拍照成功";
  1018. SendMsg("1-11");
  1019. //判断是否停止进程
  1020. if (key_stop)
  1021. {
  1022. return false;
  1023. }
  1024. //14.自动控制FIB切割
  1025. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1026. //2.控制FIB进行切割
  1027. //以上1、2步全部用ELY文件代替
  1028. if (!FIBWork())
  1029. {
  1030. arg.Message = "FIB切割失败";
  1031. arg.State = false;
  1032. SendMsg("1-12");
  1033. return false;
  1034. }
  1035. arg.State = true;
  1036. arg.Message = "FIB切割成功";
  1037. SendMsg("1-12");
  1038. Thread.Sleep(5000);
  1039. //判断是否停止进程
  1040. if (key_stop)
  1041. {
  1042. return false;
  1043. }
  1044. //3.控制FIB拍照600X
  1045. //底层没有控制方法。
  1046. //4.保存图片
  1047. String fileName32 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName32;
  1048. arg.Picture_Information.Picture_FullPath = fileName32;
  1049. arg.Picture_Information.Work_Status = "FIB";
  1050. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1051. Thread.Sleep(1000);
  1052. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1053. Thread.Sleep(1000);
  1054. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1055. Thread.Sleep(1000);
  1056. if (!GetImage(ImageMode.FIB, fileName32))
  1057. {
  1058. arg.Message = "FIB切割后拍照失败";
  1059. arg.State = false;
  1060. SendMsg("1-13");
  1061. return false;
  1062. }
  1063. arg.State = true;
  1064. arg.Message = "FIB切割后拍照成功";
  1065. SendMsg("1-13");
  1066. Thread.Sleep(3000);
  1067. //判断是否停止进程
  1068. if (key_stop)
  1069. {
  1070. return false;
  1071. }
  1072. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1073. wr.Img_Cut_Success(fileName31, fileName32, out state);
  1074. if(state == 0)
  1075. {
  1076. arg.Message = "FIB切割校验失败";
  1077. arg.State = false;
  1078. SendMsg("1-14");
  1079. return false;
  1080. }
  1081. arg.State = true;
  1082. arg.Message = "FIB切割校验成功";
  1083. SendMsg("1-14");
  1084. //判断是否停止进程
  1085. if (key_stop)
  1086. {
  1087. return false;
  1088. }
  1089. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1090. //拍完照自动解冻,这里不做处理。
  1091. return true;
  1092. }
  1093. /// <summary>
  1094. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1095. /// </summary>
  1096. /// <returns></returns>
  1097. public bool FindCross()
  1098. {
  1099. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1100. float angle = 0;
  1101. int direction = 0;
  1102. int state = 0;
  1103. //切换到SEM模式
  1104. if (!iSEM.CmdFIBModeSEM())
  1105. {
  1106. arg.Message = "SEM模式切换失败";
  1107. arg.State = false;
  1108. SendMsg("1-16");
  1109. return false;
  1110. }
  1111. arg.State = true;
  1112. arg.Message = "SEM模式切换成功";
  1113. SendMsg("1-16");
  1114. arg.Picture_Information.Work_Status = "SEM";
  1115. Thread.Sleep(10000);
  1116. //判断是否停止进程
  1117. if (key_stop)
  1118. {
  1119. return false;
  1120. }
  1121. //1.控制SEM放大到300倍
  1122. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/2))
  1123. {
  1124. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 2).ToString("0.0") + "倍失败";
  1125. arg.State = false;
  1126. SendMsg("1-17");
  1127. return false;
  1128. }
  1129. arg.State = true;
  1130. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/2).ToString("0.0") + "倍成功";
  1131. SendMsg("1-17");
  1132. //判断是否停止进程
  1133. if (key_stop)
  1134. {
  1135. return false;
  1136. }
  1137. //2.控制SEM自动对焦、亮度、对比度-接口,,将自动对焦提出单独函数调用
  1138. if (ImageFocus())
  1139. {
  1140. arg.Message = "自动对焦完成";
  1141. arg.State = true;
  1142. SendMsg("1-18");
  1143. }
  1144. else
  1145. {
  1146. arg.Message = "自动对焦失败";
  1147. arg.State = false;
  1148. SendMsg("1-18");
  1149. }
  1150. Thread.Sleep(5000);
  1151. //判断是否停止进程
  1152. if (key_stop)
  1153. {
  1154. return false;
  1155. }
  1156. //3.控制SEM拍照
  1157. String fileName4 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
  1158. arg.Picture_Information.Picture_FullPath = fileName4;
  1159. arg.Picture_Information.Work_Status = "SEM";
  1160. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1161. Thread.Sleep(1000);
  1162. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1163. Thread.Sleep(1000);
  1164. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1165. Thread.Sleep(1000);
  1166. if (!GetImage(ImageMode.SEM, fileName4))
  1167. {
  1168. arg.State = false;
  1169. arg.Message = "SEM拍照失败";
  1170. SendMsg("1-19");
  1171. return false;
  1172. }
  1173. arg.State = true;
  1174. arg.Message = "SEM拍照成功";
  1175. SendMsg("1-19");
  1176. Thread.Sleep(3000);
  1177. //判断是否停止进程
  1178. if (key_stop)
  1179. {
  1180. return false;
  1181. }
  1182. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1183. //5.根据坐标控制SEM移动到切孔位置,居中
  1184. //这里是否用到拉直操作,我没有加
  1185. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1186. {
  1187. arg.State = true;
  1188. arg.Message = "样品台移动到指定位置";
  1189. SendMsg("1-20");
  1190. }
  1191. else
  1192. {
  1193. wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName,
  1194. m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
  1195. if (state == 1)
  1196. {
  1197. //拉直操作
  1198. Straightening(angle, 65, 65, x1, y1, ref x2, ref y2);
  1199. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1200. if (!iSEM.MoveStageXY(x2, y2))
  1201. {
  1202. arg.State = false;
  1203. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1204. SendMsg("1-20");
  1205. return false;
  1206. }
  1207. //判断是否移动完成
  1208. while (true)
  1209. {
  1210. Thread.Sleep(5000);
  1211. if (iSEM.GetStageIs() == 0)
  1212. {
  1213. break;
  1214. }
  1215. }
  1216. arg.State = true;
  1217. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1218. SendMsg("1-20");
  1219. }
  1220. else
  1221. {
  1222. arg.Message = "样品台移动失败";
  1223. arg.State = false;
  1224. SendMsg("1-20");
  1225. return false;
  1226. }
  1227. }
  1228. //判断是否停止进程
  1229. if (key_stop)
  1230. {
  1231. return false;
  1232. }
  1233. //6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1234. x0 = iSEM.GetStageAtX();
  1235. y0 = iSEM.GetStageAtY();
  1236. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1237. {
  1238. arg.Message = "位置校验失败";
  1239. arg.State = false;
  1240. SendMsg("1-21");
  1241. return false;
  1242. }
  1243. arg.State = true;
  1244. arg.Message = "位置校验成功";
  1245. SendMsg("1-21");
  1246. //判断是否停止进程
  1247. if (key_stop)
  1248. {
  1249. return false;
  1250. }
  1251. return true;
  1252. }
  1253. /// <summary>
  1254. /// 17.自动控制SEM拍截面照
  1255. /// </summary>
  1256. /// <returns></returns>
  1257. public bool ShotSection(ref String image18)
  1258. {
  1259. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1260. int state = 0;
  1261. //1、放大6000倍,放大倍数参数photograph_
  1262. if (!iSEM.SetMagnification(m_MsParam.Photograph_Magnification))
  1263. {
  1264. arg.Message = "放大倍数调整失败";
  1265. arg.State = false;
  1266. SendMsg("1-22");
  1267. return false;
  1268. }
  1269. arg.Message = "放大倍数调整成功";
  1270. arg.State = true;
  1271. SendMsg("1-22");
  1272. //判断是否停止进程
  1273. if (key_stop)
  1274. {
  1275. return false;
  1276. }
  1277. //2.控制SEM自动对焦、亮度、对比度-接口
  1278. if (ImageFocus())
  1279. {
  1280. arg.Message = "自动对焦完成";
  1281. arg.State = true;
  1282. SendMsg("1-23");
  1283. }
  1284. else
  1285. {
  1286. arg.Message = "自动对焦失败";
  1287. arg.State = false;
  1288. SendMsg("1-23");
  1289. }
  1290. //判断是否停止进程
  1291. if (key_stop)
  1292. {
  1293. return false;
  1294. }
  1295. //3、设置SEM补偿角度
  1296. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1297. {
  1298. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1299. arg.State = false;
  1300. SendMsg("1-24");
  1301. return false;
  1302. }
  1303. arg.State = true;
  1304. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1305. SendMsg("1-24");
  1306. Thread.Sleep(5000);
  1307. //判断是否停止进程
  1308. if (key_stop)
  1309. {
  1310. return false;
  1311. }
  1312. //4、拍照,5、保存照片
  1313. String fileName5 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
  1314. arg.Picture_Information.Picture_FullPath = fileName5;
  1315. arg.Picture_Information.Work_Status = "SEM";
  1316. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1317. Thread.Sleep(1000);
  1318. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1319. Thread.Sleep(1000);
  1320. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1321. Thread.Sleep(1000);
  1322. if (!GetImage(ImageMode.SEM, fileName5))
  1323. {
  1324. arg.Message = "SEM拍照失败";
  1325. arg.State = false;
  1326. SendMsg("1-25");
  1327. return false;
  1328. }
  1329. arg.State = true;
  1330. arg.Message = "SEM拍照成功";
  1331. SendMsg("1-25");
  1332. Thread.Sleep(3000);
  1333. //判断是否停止进程
  1334. if (key_stop)
  1335. {
  1336. return false;
  1337. }
  1338. //6、获取偏移坐标,7、移动到位
  1339. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1340. {
  1341. arg.Message = "样品台移动到指定位置";
  1342. arg.State = true;
  1343. SendMsg("1-26");
  1344. }
  1345. else
  1346. {
  1347. //8,图像T形
  1348. wr.Img_Trapezoid_Top_Center_Position(fileName5, out x1, out y1, out state);
  1349. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1350. if (state == 1)
  1351. {
  1352. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1353. if (!iSEM.MoveStageXY(x1, y1))
  1354. {
  1355. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1356. arg.State = false;
  1357. SendMsg("1-26");
  1358. return false;
  1359. }
  1360. //判断是否移动完成
  1361. while (true)
  1362. {
  1363. Thread.Sleep(5000);
  1364. if (iSEM.GetStageIs() == 0)
  1365. {
  1366. break;
  1367. }
  1368. }
  1369. arg.State = true;
  1370. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1371. SendMsg("1-26");
  1372. }
  1373. else
  1374. {
  1375. arg.Message = "样品台移动失败";
  1376. arg.State = false;
  1377. SendMsg("1-26");
  1378. return false;
  1379. }
  1380. }
  1381. //判断是否停止进程
  1382. if (key_stop)
  1383. {
  1384. return false;
  1385. }
  1386. //8、验证移动准确性
  1387. x0 = iSEM.GetStageAtX();
  1388. y0 = iSEM.GetStageAtY();
  1389. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1390. {
  1391. arg.Message = "位置校验失败";
  1392. arg.State = false;
  1393. SendMsg("1-27");
  1394. return false;
  1395. }
  1396. arg.State = true;
  1397. arg.Message = "位置校验成功";
  1398. SendMsg("1-27");
  1399. //判断是否停止进程
  1400. if (key_stop)
  1401. {
  1402. return false;
  1403. }
  1404. //9、-10不操作
  1405. //11、自动对焦。与之前操作相同
  1406. if (ImageFocus())
  1407. {
  1408. arg.Message = "自动对焦完成";
  1409. arg.State = true;
  1410. SendMsg("1-28");
  1411. }
  1412. else
  1413. {
  1414. arg.Message = "自动对焦失败";
  1415. arg.State = false;
  1416. SendMsg("1-28");
  1417. }
  1418. //判断是否停止进程
  1419. if (key_stop)
  1420. {
  1421. return false;
  1422. }
  1423. //12拍照
  1424. String fileName6 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1425. arg.Picture_Information.Picture_FullPath = fileName6;
  1426. arg.Picture_Information.Work_Status = "SEM";
  1427. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1428. Thread.Sleep(1000);
  1429. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1430. Thread.Sleep(1000);
  1431. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1432. Thread.Sleep(1000);
  1433. if (!GetImage(ImageMode.SEM, fileName6))
  1434. {
  1435. arg.Message = "SEM拍照失败";
  1436. arg.State = false;
  1437. SendMsg("1-29");
  1438. return false;
  1439. }
  1440. arg.State = true;
  1441. image18 = fileName6;
  1442. arg.Message = "SEM拍照成功";
  1443. SendMsg("1-29");
  1444. Thread.Sleep(3000);
  1445. //判断是否停止进程
  1446. if (key_stop)
  1447. {
  1448. return false;
  1449. }
  1450. //14光束复位
  1451. iSEM.SetBeamShiftX(0);
  1452. iSEM.SetBeamShiftY(0);
  1453. Thread.Sleep(3000);
  1454. arg.Message = "光束复位成功";
  1455. arg.State = true;
  1456. SendMsg("1-30");
  1457. //判断是否停止进程
  1458. if (key_stop)
  1459. {
  1460. return false;
  1461. }
  1462. return true;
  1463. }
  1464. //第一个孔的测试过程
  1465. public bool FirstHole()
  1466. {
  1467. MeasureData.CutHole firstHole = m_cutHoles[0];
  1468. //首先默认为SEM模式
  1469. arg.Picture_Information.Work_Status = "SEM";
  1470. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1471. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1472. {
  1473. if (!InsertPT())
  1474. {
  1475. arg.Message = "插入PT针失败";
  1476. SendMsg("1-0");
  1477. return false;
  1478. }
  1479. arg.Message = "插入PT针成功";
  1480. SendMsg("1-0");
  1481. }
  1482. //判断是否停止进程
  1483. if (key_stop)
  1484. {
  1485. return false;
  1486. }
  1487. //13. 自动 定位功能
  1488. if (!GetPoistion(true))
  1489. {
  1490. return false;
  1491. }
  1492. //判断是否停止进程
  1493. if (key_stop)
  1494. {
  1495. return false;
  1496. }
  1497. //14.自动控制FIB切割
  1498. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1499. {
  1500. if (!FIBCross())
  1501. {
  1502. return false;
  1503. }
  1504. }
  1505. //判断是否停止进程
  1506. if (key_stop)
  1507. {
  1508. return false;
  1509. }
  1510. //15.根据样品类型决定是否撤出PT针
  1511. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1512. {
  1513. if (!RetractPT())
  1514. {
  1515. arg.Message = "撤出PT针失败";
  1516. SendMsg("1-15");
  1517. return false;
  1518. }
  1519. arg.Message = "撤出PT针成功";
  1520. SendMsg("1-15");
  1521. }
  1522. //判断是否停止进程
  1523. if (key_stop)
  1524. {
  1525. return false;
  1526. }
  1527. // 16.找到切割位置
  1528. if (m_MsParam.Is_Photograph == false)
  1529. {
  1530. if (!FindCross())
  1531. {
  1532. return false;
  1533. }
  1534. //判断是否停止进程
  1535. if (key_stop)
  1536. {
  1537. return false;
  1538. }
  1539. }
  1540. //将过程17最后的拍照图片提出给18步进行调用
  1541. String img18 = "";
  1542. //17.自动控制SEM拍截面照
  1543. if (!ShotSection(ref img18))
  1544. {
  1545. return false;
  1546. }
  1547. //判断是否停止进程
  1548. if (key_stop)
  1549. {
  1550. return false;
  1551. }
  1552. //18.自动层高分析
  1553. if (m_MsParam.Is_Photograph == false)
  1554. {
  1555. float size = iSEM.GetPixelSize();
  1556. float mag = iSEM.GetMagnification();
  1557. int state = 0;
  1558. wr.Img_Measure_Size(img18, mag, size, out state);
  1559. if (state == 0)
  1560. {
  1561. arg.Message = "测量尺寸失败";
  1562. SendMsg("1-31");
  1563. return false;
  1564. }
  1565. arg.Message = "测量尺寸成功";
  1566. SendMsg("1-31");
  1567. }
  1568. #region 测试程序
  1569. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  1570. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  1571. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1572. //{
  1573. // SendMsg("拍摄照片完成");
  1574. // //return true;
  1575. //}
  1576. //else
  1577. //{
  1578. // SendMsg("拍摄照片失败");
  1579. // return false;
  1580. //}
  1581. //SendMsg("图像校正36度");
  1582. ////3.设置SEM角度补偿cos36度
  1583. //if (!TiltCorrection(36))
  1584. //{
  1585. // return false;
  1586. //}
  1587. //Thread.Sleep(3000);
  1588. //string fn;
  1589. //用宏抓一般图
  1590. //Thread.Sleep(5000);
  1591. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1592. //SendMsg("用宏抓一般图" + fn);
  1593. //iSEM.CMDMCFFilename(fn);
  1594. ////延时1s??
  1595. //Thread.Sleep(5000);
  1596. ////用宏抓好图
  1597. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1598. //SendMsg("用宏抓好图" + fn);
  1599. //iSEM.CMDMCFFilename(fn);
  1600. ////延时1s??
  1601. //Thread.Sleep(30000);
  1602. //Thread.Sleep(10000);
  1603. //WorkingFolder = m_measureFile.FilePath;
  1604. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1605. //SendMsg("SEM拍照存储到" + fileName6);
  1606. //if (!GetImage(ImageMode.SEM, fileName6))
  1607. //{
  1608. // SendMsg("SEM拍照失败");
  1609. // return false;
  1610. //}
  1611. ////用宏抓标志图
  1612. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1613. //SendMsg("用宏抓标志图" + fn);
  1614. //iSEM.CMDMCFFilename(fn);
  1615. ////延时1s??
  1616. //Thread.Sleep(30000);
  1617. //Thread.Sleep(5000);
  1618. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1619. //SendMsg("用宏抓一般图" + fn);
  1620. //iSEM.CMDMCFFilename(fn);
  1621. ////延时1s??
  1622. //Thread.Sleep(5000);
  1623. //SendMsg("所有图结束");
  1624. ////17.自动控制SEM拍截面照
  1625. //{
  1626. // //1.控制SEM放大到指定参数大小范围,6000x
  1627. // if (!iSEM.SetMagnification(6000))
  1628. // {
  1629. // return false;
  1630. // }
  1631. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1632. // if (!MeasParam.FocusMode)
  1633. // {
  1634. // //弹出手动对焦的窗口
  1635. // }
  1636. // else
  1637. // {
  1638. // //调用自动对焦模块
  1639. // }
  1640. // //3.设置SEM角度补偿cos36度
  1641. // if (!TiltCorrection(36))
  1642. // {
  1643. // return false;
  1644. // }
  1645. // //4.控制SEM拍照
  1646. // //5.保存照片4
  1647. // String fileName5 = WorkingFolder + ImageName5;
  1648. // if (!GetImage(ImageMode.SEM, fileName5))
  1649. // {
  1650. // return false;
  1651. // }
  1652. // //6.将照片传给客户,获取偏移坐标
  1653. // float x6 = 0, y6 = 0;
  1654. // float angle1 = 0;
  1655. // float mage = 10000;
  1656. // //7.根据坐标控制SEM移动到分析位置
  1657. // if (!iSEM.MoveStageXY(x6, y6))
  1658. // {
  1659. // return false;
  1660. // }
  1661. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1662. // float x7 = iSEM.GetStageAtX();
  1663. // float y7 = iSEM.GetStageAtY();
  1664. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1665. // {
  1666. // return false;
  1667. // }
  1668. // //9.控制SEM平行校正,并记录校正前初始值
  1669. // float foldAnagle = iSEM.GetScanRotation();
  1670. // if (foldAnagle == float.NaN)
  1671. // {
  1672. // return false;
  1673. // }
  1674. // if (!iSEM.SetScanRotation(angle1))
  1675. // {
  1676. // return false;
  1677. // }
  1678. // //10.控制SEM放大到指定参数大小范围
  1679. // if (!iSEM.SetMagnification(mage))
  1680. // {
  1681. // return false;
  1682. // }
  1683. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1684. // if (!MeasParam.FocusMode)
  1685. // {
  1686. // //弹出手动对焦的窗口
  1687. // }
  1688. // else
  1689. // {
  1690. // //调用自动对焦模块
  1691. // }
  1692. // //12.控制SEM对分析位置拍照
  1693. // String fileName6 = WorkingFolder + ImageName6;
  1694. // if (!GetImage(ImageMode.SEM, fileName6))
  1695. // {
  1696. // return false;
  1697. // }
  1698. // //13.保存照片
  1699. // //14.控制SEM取消电子束校正,回到初始值
  1700. // if (!iSEM.SetScanRotation(foldAnagle))
  1701. // {
  1702. // return false;
  1703. // }
  1704. //}
  1705. ////18.自动层高分析
  1706. //{
  1707. // //1.获取SEM Pixel Size给客户传入参数
  1708. // if (iSEM.GetPixelSize() == float.NaN)
  1709. // {
  1710. // return false;
  1711. // }
  1712. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1713. //}
  1714. ////19.自动能谱分析
  1715. //{
  1716. // //1. 确定能谱位置
  1717. // //2. 控制牛津打能谱
  1718. // //3. 能谱分析——面扫+线扫描
  1719. //}
  1720. #endregion
  1721. return true;
  1722. }
  1723. //非第一个孔的测试过程
  1724. public bool CommonWork()
  1725. {
  1726. //首先默认为SEM模式
  1727. arg.Picture_Information.Work_Status = "SEM";
  1728. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1729. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1730. {
  1731. if (!InsertPT())
  1732. {
  1733. arg.Message = "插入PT针失败";
  1734. SendMsg("1-0");
  1735. return false;
  1736. }
  1737. arg.Message = "插入PT针成功";
  1738. SendMsg("1-0");
  1739. }
  1740. //判断是否停止进程
  1741. if (key_stop)
  1742. {
  1743. return false;
  1744. }
  1745. //13. 自动 定位功能
  1746. if (!GetPoistion(false))
  1747. {
  1748. return false;
  1749. }
  1750. //判断是否停止进程
  1751. if (key_stop)
  1752. {
  1753. return false;
  1754. }
  1755. //14.自动控制FIB切割
  1756. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1757. {
  1758. if (!FIBCross())
  1759. {
  1760. return false;
  1761. }
  1762. }
  1763. //判断是否停止进程
  1764. if (key_stop)
  1765. {
  1766. return false;
  1767. }
  1768. //15.根据样品类型决定是否撤出PT针
  1769. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1770. {
  1771. if (!RetractPT())
  1772. {
  1773. arg.Message = "撤出PT针失败";
  1774. SendMsg("1-15");
  1775. return false;
  1776. }
  1777. arg.Message = "撤出PT针成功";
  1778. SendMsg("1-15");
  1779. }
  1780. //判断是否停止进程
  1781. if (key_stop)
  1782. {
  1783. return false;
  1784. }
  1785. // 16.找到切割位置
  1786. if (m_MsParam.Is_Photograph == false)
  1787. {
  1788. if (!FindCross())
  1789. {
  1790. return false;
  1791. }
  1792. //判断是否停止进程
  1793. if (key_stop)
  1794. {
  1795. return false;
  1796. }
  1797. }
  1798. //将过程17最后的拍照图片提出给18步进行调用
  1799. String img18 = "";
  1800. //17.自动控制SEM拍截面照
  1801. if (!ShotSection(ref img18))
  1802. {
  1803. return false;
  1804. }
  1805. //判断是否停止进程
  1806. if (key_stop)
  1807. {
  1808. return false;
  1809. }
  1810. //18.自动层高分析
  1811. if (m_MsParam.Is_Photograph == false)
  1812. {
  1813. float size = iSEM.GetPixelSize();
  1814. float mag = iSEM.GetMagnification();
  1815. int state = 0;
  1816. wr.Img_Measure_Size(img18, mag, size, out state);
  1817. if (state == 0)
  1818. {
  1819. arg.Message = "测量尺寸失败";
  1820. SendMsg("1-31");
  1821. return false;
  1822. }
  1823. arg.Message = "测量尺寸成功";
  1824. SendMsg("1-31");
  1825. }
  1826. #region 测试程序
  1827. //string fn;
  1828. //用宏抓一般图
  1829. //Thread.Sleep(5000);
  1830. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1831. //SendMsg("用宏抓一般图" + fn);
  1832. //iSEM.CMDMCFFilename(fn);
  1833. ////延时1s??
  1834. //Thread.Sleep(5000);
  1835. ////用宏抓好图
  1836. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1837. //SendMsg("用宏抓好图" + fn);
  1838. //iSEM.CMDMCFFilename(fn);
  1839. ////延时1s??
  1840. //Thread.Sleep(30000);
  1841. //Thread.Sleep(10000);
  1842. //WorkingFolder = m_measureFile.FilePath;
  1843. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1844. //SendMsg("SEM拍照存储到" + fileName6);
  1845. //if (!GetImage(ImageMode.SEM, fileName6))
  1846. //{
  1847. // SendMsg("SEM拍照失败");
  1848. // return false;
  1849. //}
  1850. ////用宏抓标志图
  1851. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1852. //SendMsg("用宏抓标志图" + fn);
  1853. //iSEM.CMDMCFFilename(fn);
  1854. ////延时1s??
  1855. //Thread.Sleep(30000);
  1856. ////恢复简单抓图
  1857. //Thread.Sleep(5000);
  1858. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1859. //SendMsg("用宏抓一般图" + fn);
  1860. //iSEM.CMDMCFFilename(fn);
  1861. //SendMsg("所有图结束");
  1862. #endregion
  1863. return true;
  1864. }
  1865. //测试完第一个孔后的样品台初始化操作。
  1866. //再调用CommonWork执行非第一个孔的测试过程
  1867. public bool OtherHole()
  1868. {
  1869. //SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1870. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1871. #region 1. 初始化
  1872. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1873. //读取图像冻结状态
  1874. float ffrozen = iSEM.GetImageFrozen();
  1875. if (ffrozen == float.NaN)
  1876. {
  1877. return false;
  1878. }
  1879. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1880. {
  1881. //SendMsg("样品台恢复到水平");
  1882. //return true;
  1883. }
  1884. else
  1885. {
  1886. //SendMsg("禁止样品台恢复到水平");
  1887. return false;
  1888. }
  1889. //2. 调节样品1号孔的样品台6轴坐标
  1890. //3. 将样品1号孔坐标2存入数据库
  1891. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1892. if (!iSEM.SetStageGotoT(0))
  1893. {
  1894. return false;
  1895. }
  1896. while (true)
  1897. {
  1898. Thread.Sleep(10000);
  1899. if (iSEM.GetStageIs() == 0)
  1900. {
  1901. break;
  1902. }
  1903. }
  1904. //5. 获取光镜2号孔XY坐标
  1905. //SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1906. //6. 根据光镜坐标控制样品台移动
  1907. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1908. {
  1909. //SendMsg("移动失败");
  1910. return false;
  1911. }
  1912. while (true)
  1913. {
  1914. Thread.Sleep(10000);
  1915. if (iSEM.GetStageIs() == 0)
  1916. {
  1917. break;
  1918. }
  1919. }
  1920. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1921. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1922. {
  1923. //SendMsg("样品台旋转");
  1924. //return true;
  1925. }
  1926. else
  1927. {
  1928. //SendMsg("禁止样品台旋转");
  1929. return false;
  1930. }
  1931. if (!iSEM.SetStageGotoT(54))
  1932. {
  1933. return false;
  1934. }
  1935. while (true)
  1936. {
  1937. Thread.Sleep(10000);
  1938. if (iSEM.GetStageIs() == 0)
  1939. {
  1940. break;
  1941. }
  1942. }
  1943. //SendMsg("拉直操作");
  1944. #endregion
  1945. //其他操作与第一个孔相同
  1946. if (!CommonWork())
  1947. {
  1948. return false;
  1949. }
  1950. //2. 定位切割
  1951. {
  1952. //1. 拉直操作
  1953. {
  1954. //1.1 控制SEM进行拍照
  1955. //1.2 图片传给客户,返回偏移角度
  1956. //1.3 根据返回角度,控制样品台转动
  1957. }
  1958. //2. 与1号孔13步相同
  1959. }
  1960. return true;
  1961. }
  1962. //角度补偿
  1963. public bool TiltCorrection(float a_fAngle)
  1964. {
  1965. //记录原来电镜的状态
  1966. // bool bTilt = false;
  1967. //float fOldTilt = iSEM.GetTiltCorrection();
  1968. //if (fOldTilt == float.NaN)
  1969. //{
  1970. // return false;
  1971. //}
  1972. //else if (fOldTilt == 1)
  1973. //{
  1974. // bTilt = true;
  1975. //}
  1976. //else if (fOldTilt == 0)
  1977. //{
  1978. // bTilt = false;
  1979. //}
  1980. //float fOldAngle = iSEM.GetTiltAngle();
  1981. //if (fOldAngle == float.NaN)
  1982. //{
  1983. // return false;
  1984. //}
  1985. //开启校正
  1986. //SendMsg("开启校正");
  1987. if (!iSEM.SetTiltAngleOn())
  1988. {
  1989. return false;
  1990. }
  1991. //设置校正角度
  1992. //if (!iSEM.SetTiltAngle(fOldAngle))
  1993. //{
  1994. // return false;
  1995. //}
  1996. //恢复原始状态
  1997. //SendMsg("校正角度"+ a_fAngle.ToString());
  1998. if (!iSEM.SetTiltAngle(a_fAngle))
  1999. {
  2000. return false;
  2001. }
  2002. //if (bTilt)
  2003. //{
  2004. // if (!iSEM.SetTiltCorrectionOn())
  2005. // {
  2006. // return false;
  2007. // }
  2008. //}
  2009. //else
  2010. //{
  2011. // if (!iSEM.SetTiltCorrectionOff())
  2012. // {
  2013. // return false;
  2014. // }
  2015. //}
  2016. return true;
  2017. }
  2018. //拍图
  2019. public bool GetImage(ImageMode a_mode, String a_fileName)
  2020. {
  2021. //1. 图像解冻
  2022. float foldFrozen = iSEM.GetImageFrozen();
  2023. if (foldFrozen == float.NaN)
  2024. {
  2025. return false;
  2026. }
  2027. if (!iSEM.ImageLive())
  2028. {
  2029. return false;
  2030. }
  2031. //2. 确认图像模式
  2032. if (ImageMode.SEM == a_mode)
  2033. {
  2034. if (!iSEM.CmdFIBModeSEM())
  2035. {
  2036. return false;
  2037. }
  2038. }
  2039. else if (ImageMode.FIB == a_mode)
  2040. {
  2041. if (!iSEM.CmdFIBModeFIB())
  2042. {
  2043. return false;
  2044. }
  2045. }
  2046. else
  2047. {
  2048. return false;
  2049. }
  2050. //3. 获取分辨率
  2051. int[] ImageSize = iSEM.GetImageStore();
  2052. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2053. {
  2054. return false;
  2055. }
  2056. short width = (short)ImageSize[0];
  2057. short height = (short)ImageSize[1];
  2058. //4. 抓图
  2059. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  2060. {
  2061. return false;
  2062. }
  2063. //5. 恢复初始状态
  2064. if (foldFrozen == 0)
  2065. {
  2066. if (!iSEM.ImageLive())
  2067. {
  2068. return false;
  2069. }
  2070. }
  2071. else if (foldFrozen == 1)
  2072. {
  2073. if (!iSEM.ImageFrozen())
  2074. {
  2075. return false;
  2076. }
  2077. }
  2078. return true;
  2079. }
  2080. //自动聚焦
  2081. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  2082. {
  2083. a_nWd = 0;
  2084. float wd = iSEM.GetWorkingDistance();
  2085. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  2086. if (a_param == null)
  2087. {
  2088. return false;
  2089. }
  2090. string path = a_param.Path;
  2091. if (!Directory.Exists(path))
  2092. {
  2093. return false;
  2094. }
  2095. string path_coarse = a_param.Path + "\\Coarse";
  2096. if (!Directory.Exists(path_coarse))
  2097. {
  2098. Directory.CreateDirectory(path_coarse);
  2099. }
  2100. string path_fine = a_param.Path + "\\Fine";
  2101. if (!Directory.Exists(path_fine))
  2102. {
  2103. Directory.CreateDirectory(path_fine);
  2104. }
  2105. //1. 拍照
  2106. //1.1, 粗拍照
  2107. //1.1.1, 根据参数计算拍照次数
  2108. double nUp = a_param.UP * 100.0 ;
  2109. double nDown = a_param.Down * 100.0;
  2110. double nStep = a_param.Step * 100.0;
  2111. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  2112. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  2113. //粗拍照
  2114. for (int i = 0; i < nTimes; i++)
  2115. {
  2116. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  2117. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2118. Thread.Sleep(8000);
  2119. int swd = cWd / 100;
  2120. //SendMsg("wd = " + swd.ToString() +"um");
  2121. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  2122. if (!GetImage(ImageMode.SEM, fileName))
  2123. {
  2124. return false;
  2125. }
  2126. }
  2127. //1.2, 选定细拍照的工作距离
  2128. int CorWd;
  2129. ChooseBest(path_coarse,out CorWd);
  2130. a_nWd = CorWd;
  2131. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  2132. //1.3, 细拍照
  2133. if ( (CorWd - a_param.Range * 100.0) <=0)
  2134. {
  2135. return false;
  2136. }
  2137. double nfUp = CorWd - a_param.Range * 100.0;
  2138. double nfStep = a_param.fStep * 100.0;
  2139. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  2140. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  2141. for (int i = 0; i < nfTimes; i++)
  2142. {
  2143. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  2144. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2145. Thread.Sleep(8000);
  2146. int swd = cWd / 100;
  2147. //SendMsg("wd = " + swd.ToString() + "um");
  2148. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  2149. if (!GetImage(ImageMode.SEM, fileName))
  2150. {
  2151. return false;
  2152. }
  2153. }
  2154. int fineWd;
  2155. ChooseBest(path_fine, out fineWd);
  2156. //SendMsg("wd fine max = " + fineWd.ToString());
  2157. a_nWd = fineWd;
  2158. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  2159. return true;
  2160. }
  2161. //LoG算子计算
  2162. private double LoGMean(string a_strImgPath)
  2163. {
  2164. //读入Img文件
  2165. if (!File.Exists(a_strImgPath))
  2166. {
  2167. return 0;
  2168. }
  2169. Mat src, gray_src;
  2170. int kernel_size = 3;
  2171. src = Cv2.ImRead(a_strImgPath);
  2172. gray_src = new Mat();
  2173. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2174. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2175. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2176. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2177. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  2178. Cv2.ConvertScaleAbs(src, src);
  2179. //图像的平均灰度
  2180. double meanValue = 0.0;
  2181. meanValue = Cv2.Mean(src)[0];
  2182. return meanValue;
  2183. }
  2184. //梯度计算
  2185. private double Tenengrad(string a_strImgPath)
  2186. {
  2187. //读入Img文件
  2188. if (!File.Exists(a_strImgPath))
  2189. {
  2190. return 0;
  2191. }
  2192. Mat src;
  2193. src = Cv2.ImRead(a_strImgPath);
  2194. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2195. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2196. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2197. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2198. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  2199. //图像的平均灰度
  2200. double meanValue = 0.0;
  2201. meanValue = Cv2.Mean(src)[0];
  2202. return meanValue;
  2203. }
  2204. //梯度计算
  2205. private double TTgrad(string a_strImgPath)
  2206. {
  2207. //读入Img文件
  2208. if (!File.Exists(a_strImgPath))
  2209. {
  2210. return 0;
  2211. }
  2212. Mat src;
  2213. src = Cv2.ImRead(a_strImgPath);
  2214. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2215. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2216. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2217. Mat scalex = new Mat();
  2218. Mat scaley = new Mat();
  2219. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  2220. Cv2.ConvertScaleAbs(src, scalex);
  2221. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  2222. Cv2.ConvertScaleAbs(src, scaley);
  2223. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  2224. //图像的平均灰度
  2225. double meanValue = 0.0;
  2226. meanValue = Cv2.Mean(src)[0];
  2227. return meanValue;
  2228. }
  2229. //三选二算法
  2230. private void ChooseBest(string a_strImgPath, out int a_nWd)
  2231. {
  2232. a_nWd = -1;
  2233. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  2234. float[] values = new float[files.Length];
  2235. double smax1 = LoGMean(files[0]);
  2236. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  2237. double smax2 = Tenengrad(files[0]);
  2238. int wdmax2 = wdmax1;
  2239. double smax3 = TTgrad(files[0]);
  2240. int wdmax3 = wdmax1;
  2241. int x = 0;
  2242. foreach (var file in files)
  2243. {
  2244. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  2245. double svalue1 = LoGMean(file);
  2246. double svalue2 = Tenengrad(file);
  2247. double svalue3 = TTgrad(file);
  2248. if (smax1 < svalue1)
  2249. {
  2250. smax1 = svalue1;
  2251. wdmax1 = wd;
  2252. }
  2253. if (smax2 < svalue2)
  2254. {
  2255. smax2 = svalue2;
  2256. wdmax2 = wd;
  2257. }
  2258. if (smax3 < svalue3)
  2259. {
  2260. smax3 = svalue3;
  2261. wdmax3 = wd;
  2262. }
  2263. x++;
  2264. }
  2265. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  2266. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  2267. {
  2268. a_nWd = wdmax1;
  2269. //SendMsg("焦距 = " + wdmax1.ToString());
  2270. }
  2271. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  2272. {
  2273. a_nWd = wdmax2;
  2274. //SendMsg("焦距 = " + wdmax2.ToString());
  2275. }
  2276. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  2277. {
  2278. a_nWd = wdmax3;
  2279. //SendMsg("焦距 = " + wdmax3.ToString());
  2280. }
  2281. else
  2282. {
  2283. //SendMsg("对焦失败。");
  2284. }
  2285. }
  2286. }
  2287. }