Measure.cs 271 KB

12345678910111213141516171819202122232425262728293031323334353637383940414243444546474849505152535455565758596061626364656667686970717273747576777879808182838485868788899091929394959697989910010110210310410510610710810911011111211311411511611711811912012112212312412512612712812913013113213313413513613713813914014114214314414514614714814915015115215315415515615715815916016116216316416516616716816917017117217317417517617717817918018118218318418518618718818919019119219319419519619719819920020120220320420520620720820921021121221321421521621721821922022122222322422522622722822923023123223323423523623723823924024124224324424524624724824925025125225325425525625725825926026126226326426526626726826927027127227327427527627727827928028128228328428528628728828929029129229329429529629729829930030130230330430530630730830931031131231331431531631731831932032132232332432532632732832933033133233333433533633733833934034134234334434534634734834935035135235335435535635735835936036136236336436536636736836937037137237337437537637737837938038138238338438538638738838939039139239339439539639739839940040140240340440540640740840941041141241341441541641741841942042142242342442542642742842943043143243343443543643743843944044144244344444544644744844945045145245345445545645745845946046146246346446546646746846947047147247347447547647747847948048148248348448548648748848949049149249349449549649749849950050150250350450550650750850951051151251351451551651751851952052152252352452552652752852953053153253353453553653753853954054154254354454554654754854955055155255355455555655755855956056156256356456556656756856957057157257357457557657757857958058158258358458558658758858959059159259359459559659759859960060160260360460560660760860961061161261361461561661761861962062162262362462562662762862963063163263363463563663763863964064164264364464564664764864965065165265365465565665765865966066166266366466566666766866967067167267367467567667767867968068168268368468568668768868969069169269369469569669769869970070170270370470570670770870971071171271371471571671771871972072172272372472572672772872973073173273373473573673773873974074174274374474574674774874975075175275375475575675775875976076176276376476576676776876977077177277377477577677777877978078178278378478578678778878979079179279379479579679779879980080180280380480580680780880981081181281381481581681781881982082182282382482582682782882983083183283383483583683783883984084184284384484584684784884985085185285385485585685785885986086186286386486586686786886987087187287387487587687787887988088188288388488588688788888989089189289389489589689789889990090190290390490590690790890991091191291391491591691791891992092192292392492592692792892993093193293393493593693793893994094194294394494594694794894995095195295395495595695795895996096196296396496596696796896997097197297397497597697797897998098198298398498598698798898999099199299399499599699799899910001001100210031004100510061007100810091010101110121013101410151016101710181019102010211022102310241025102610271028102910301031103210331034103510361037103810391040104110421043104410451046104710481049105010511052105310541055105610571058105910601061106210631064106510661067106810691070107110721073107410751076107710781079108010811082108310841085108610871088108910901091109210931094109510961097109810991100110111021103110411051106110711081109111011111112111311141115111611171118111911201121112211231124112511261127112811291130113111321133113411351136113711381139114011411142114311441145114611471148114911501151115211531154115511561157115811591160116111621163116411651166116711681169117011711172117311741175117611771178117911801181118211831184118511861187118811891190119111921193119411951196119711981199120012011202120312041205120612071208120912101211121212131214121512161217121812191220122112221223122412251226122712281229123012311232123312341235123612371238123912401241124212431244124512461247124812491250125112521253125412551256125712581259126012611262126312641265126612671268126912701271127212731274127512761277127812791280128112821283128412851286128712881289129012911292129312941295129612971298129913001301130213031304130513061307130813091310131113121313131413151316131713181319132013211322132313241325132613271328132913301331133213331334133513361337133813391340134113421343134413451346134713481349135013511352135313541355135613571358135913601361136213631364136513661367136813691370137113721373137413751376137713781379138013811382138313841385138613871388138913901391139213931394139513961397139813991400140114021403140414051406140714081409141014111412141314141415141614171418141914201421142214231424142514261427142814291430143114321433143414351436143714381439144014411442144314441445144614471448144914501451145214531454145514561457145814591460146114621463146414651466146714681469147014711472147314741475147614771478147914801481148214831484148514861487148814891490149114921493149414951496149714981499150015011502150315041505150615071508150915101511151215131514151515161517151815191520152115221523152415251526152715281529153015311532153315341535153615371538153915401541154215431544154515461547154815491550155115521553155415551556155715581559156015611562156315641565156615671568156915701571157215731574157515761577157815791580158115821583158415851586158715881589159015911592159315941595159615971598159916001601160216031604160516061607160816091610161116121613161416151616161716181619162016211622162316241625162616271628162916301631163216331634163516361637163816391640164116421643164416451646164716481649165016511652165316541655165616571658165916601661166216631664166516661667166816691670167116721673167416751676167716781679168016811682168316841685168616871688168916901691169216931694169516961697169816991700170117021703170417051706170717081709171017111712171317141715171617171718171917201721172217231724172517261727172817291730173117321733173417351736173717381739174017411742174317441745174617471748174917501751175217531754175517561757175817591760176117621763176417651766176717681769177017711772177317741775177617771778177917801781178217831784178517861787178817891790179117921793179417951796179717981799180018011802180318041805180618071808180918101811181218131814181518161817181818191820182118221823182418251826182718281829183018311832183318341835183618371838183918401841184218431844184518461847184818491850185118521853185418551856185718581859186018611862186318641865186618671868186918701871187218731874187518761877187818791880188118821883188418851886188718881889189018911892189318941895189618971898189919001901190219031904190519061907190819091910191119121913191419151916191719181919192019211922192319241925192619271928192919301931193219331934193519361937193819391940194119421943194419451946194719481949195019511952195319541955195619571958195919601961196219631964196519661967196819691970197119721973197419751976197719781979198019811982198319841985198619871988198919901991199219931994199519961997199819992000200120022003200420052006200720082009201020112012201320142015201620172018201920202021202220232024202520262027202820292030203120322033203420352036203720382039204020412042204320442045204620472048204920502051205220532054205520562057205820592060206120622063206420652066206720682069207020712072207320742075207620772078207920802081208220832084208520862087208820892090209120922093209420952096209720982099210021012102210321042105210621072108210921102111211221132114211521162117211821192120212121222123212421252126212721282129213021312132213321342135213621372138213921402141214221432144214521462147214821492150215121522153215421552156215721582159216021612162216321642165216621672168216921702171217221732174217521762177217821792180218121822183218421852186218721882189219021912192219321942195219621972198219922002201220222032204220522062207220822092210221122122213221422152216221722182219222022212222222322242225222622272228222922302231223222332234223522362237223822392240224122422243224422452246224722482249225022512252225322542255225622572258225922602261226222632264226522662267226822692270227122722273227422752276227722782279228022812282228322842285228622872288228922902291229222932294229522962297229822992300230123022303230423052306230723082309231023112312231323142315231623172318231923202321232223232324232523262327232823292330233123322333233423352336233723382339234023412342234323442345234623472348234923502351235223532354235523562357235823592360236123622363236423652366236723682369237023712372237323742375237623772378237923802381238223832384238523862387238823892390239123922393239423952396239723982399240024012402240324042405240624072408240924102411241224132414241524162417241824192420242124222423242424252426242724282429243024312432243324342435243624372438243924402441244224432444244524462447244824492450245124522453245424552456245724582459246024612462246324642465246624672468246924702471247224732474247524762477247824792480248124822483248424852486248724882489249024912492249324942495249624972498249925002501250225032504250525062507250825092510251125122513251425152516251725182519252025212522252325242525252625272528252925302531253225332534253525362537253825392540254125422543254425452546254725482549255025512552255325542555255625572558255925602561256225632564256525662567256825692570257125722573257425752576257725782579258025812582258325842585258625872588258925902591259225932594259525962597259825992600260126022603260426052606260726082609261026112612261326142615261626172618261926202621262226232624262526262627262826292630263126322633263426352636263726382639264026412642264326442645264626472648264926502651265226532654265526562657265826592660266126622663266426652666266726682669267026712672267326742675267626772678267926802681268226832684268526862687268826892690269126922693269426952696269726982699270027012702270327042705270627072708270927102711271227132714271527162717271827192720272127222723272427252726272727282729273027312732273327342735273627372738273927402741274227432744274527462747274827492750275127522753275427552756275727582759276027612762276327642765276627672768276927702771277227732774277527762777277827792780278127822783278427852786278727882789279027912792279327942795279627972798279928002801280228032804280528062807280828092810281128122813281428152816281728182819282028212822282328242825282628272828282928302831283228332834283528362837283828392840284128422843284428452846284728482849285028512852285328542855285628572858285928602861286228632864286528662867286828692870287128722873287428752876287728782879288028812882288328842885288628872888288928902891289228932894289528962897289828992900290129022903290429052906290729082909291029112912291329142915291629172918291929202921292229232924292529262927292829292930293129322933293429352936293729382939294029412942294329442945294629472948294929502951295229532954295529562957295829592960296129622963296429652966296729682969297029712972297329742975297629772978297929802981298229832984298529862987298829892990299129922993299429952996299729982999300030013002300330043005300630073008300930103011301230133014301530163017301830193020302130223023302430253026302730283029303030313032303330343035303630373038303930403041304230433044304530463047304830493050305130523053305430553056305730583059306030613062306330643065306630673068306930703071307230733074307530763077307830793080308130823083308430853086308730883089309030913092309330943095309630973098309931003101310231033104310531063107310831093110311131123113311431153116311731183119312031213122312331243125312631273128312931303131313231333134313531363137313831393140314131423143314431453146314731483149315031513152315331543155315631573158315931603161316231633164316531663167316831693170317131723173317431753176317731783179318031813182318331843185318631873188318931903191319231933194319531963197319831993200320132023203320432053206320732083209321032113212321332143215321632173218321932203221322232233224322532263227322832293230323132323233323432353236323732383239324032413242324332443245324632473248324932503251325232533254325532563257325832593260326132623263326432653266326732683269327032713272327332743275327632773278327932803281328232833284328532863287328832893290329132923293329432953296329732983299330033013302330333043305330633073308330933103311331233133314331533163317331833193320332133223323332433253326332733283329333033313332333333343335333633373338333933403341334233433344334533463347334833493350335133523353335433553356335733583359336033613362336333643365336633673368336933703371337233733374337533763377337833793380338133823383338433853386338733883389339033913392339333943395339633973398339934003401340234033404340534063407340834093410341134123413341434153416341734183419342034213422342334243425342634273428342934303431343234333434343534363437343834393440344134423443344434453446344734483449345034513452345334543455345634573458345934603461346234633464346534663467346834693470347134723473347434753476347734783479348034813482348334843485348634873488348934903491349234933494349534963497349834993500350135023503350435053506350735083509351035113512351335143515351635173518351935203521352235233524352535263527352835293530353135323533353435353536353735383539354035413542354335443545354635473548354935503551355235533554355535563557355835593560356135623563356435653566356735683569357035713572357335743575357635773578357935803581358235833584358535863587358835893590359135923593359435953596359735983599360036013602360336043605360636073608360936103611361236133614361536163617361836193620362136223623362436253626362736283629363036313632363336343635363636373638363936403641364236433644364536463647364836493650365136523653365436553656365736583659366036613662366336643665366636673668366936703671367236733674367536763677367836793680368136823683368436853686368736883689369036913692369336943695369636973698369937003701370237033704370537063707370837093710371137123713371437153716371737183719372037213722372337243725372637273728372937303731373237333734373537363737373837393740374137423743374437453746374737483749375037513752375337543755375637573758375937603761376237633764376537663767376837693770377137723773377437753776377737783779378037813782378337843785378637873788378937903791379237933794379537963797379837993800380138023803380438053806380738083809381038113812381338143815381638173818381938203821382238233824382538263827382838293830383138323833383438353836383738383839384038413842384338443845384638473848384938503851385238533854385538563857385838593860386138623863386438653866386738683869387038713872387338743875387638773878387938803881388238833884388538863887388838893890389138923893389438953896389738983899390039013902390339043905390639073908390939103911391239133914391539163917391839193920392139223923392439253926392739283929393039313932393339343935393639373938393939403941394239433944394539463947394839493950395139523953395439553956395739583959396039613962396339643965396639673968396939703971397239733974397539763977397839793980398139823983398439853986398739883989399039913992399339943995399639973998399940004001400240034004400540064007400840094010401140124013401440154016401740184019402040214022402340244025402640274028402940304031403240334034403540364037403840394040404140424043404440454046404740484049405040514052405340544055405640574058405940604061406240634064406540664067406840694070407140724073407440754076407740784079408040814082408340844085408640874088408940904091409240934094409540964097409840994100410141024103410441054106410741084109411041114112411341144115411641174118411941204121412241234124412541264127412841294130413141324133413441354136413741384139414041414142414341444145414641474148414941504151415241534154415541564157415841594160416141624163416441654166416741684169417041714172417341744175417641774178417941804181418241834184418541864187418841894190419141924193419441954196419741984199420042014202420342044205420642074208420942104211421242134214421542164217421842194220422142224223422442254226422742284229423042314232423342344235423642374238423942404241424242434244424542464247424842494250425142524253425442554256425742584259426042614262426342644265426642674268426942704271427242734274427542764277427842794280428142824283428442854286428742884289429042914292429342944295429642974298429943004301430243034304430543064307430843094310431143124313431443154316431743184319432043214322432343244325432643274328432943304331433243334334433543364337433843394340434143424343434443454346434743484349435043514352435343544355435643574358435943604361436243634364436543664367436843694370437143724373437443754376437743784379438043814382438343844385438643874388438943904391439243934394439543964397439843994400440144024403440444054406440744084409441044114412441344144415441644174418441944204421442244234424442544264427442844294430443144324433443444354436443744384439444044414442444344444445444644474448444944504451445244534454445544564457445844594460446144624463446444654466446744684469447044714472447344744475447644774478447944804481448244834484448544864487448844894490449144924493449444954496449744984499450045014502450345044505450645074508450945104511451245134514451545164517451845194520452145224523452445254526452745284529453045314532453345344535453645374538453945404541454245434544454545464547454845494550455145524553455445554556455745584559456045614562456345644565456645674568456945704571457245734574457545764577457845794580458145824583458445854586458745884589459045914592459345944595459645974598459946004601460246034604460546064607460846094610461146124613461446154616461746184619462046214622462346244625462646274628462946304631463246334634463546364637463846394640464146424643464446454646464746484649465046514652465346544655465646574658465946604661466246634664466546664667466846694670467146724673467446754676467746784679468046814682468346844685468646874688468946904691469246934694469546964697469846994700470147024703470447054706470747084709471047114712471347144715471647174718471947204721472247234724472547264727472847294730473147324733473447354736473747384739474047414742474347444745474647474748474947504751475247534754475547564757475847594760476147624763476447654766476747684769477047714772477347744775477647774778477947804781478247834784478547864787478847894790479147924793479447954796479747984799480048014802480348044805480648074808480948104811481248134814481548164817481848194820482148224823482448254826482748284829483048314832483348344835483648374838483948404841484248434844484548464847484848494850485148524853485448554856485748584859486048614862486348644865486648674868486948704871487248734874487548764877487848794880488148824883488448854886488748884889489048914892489348944895489648974898489949004901490249034904490549064907490849094910491149124913491449154916491749184919492049214922492349244925492649274928492949304931493249334934493549364937493849394940494149424943494449454946494749484949495049514952495349544955495649574958495949604961496249634964496549664967496849694970497149724973497449754976497749784979498049814982498349844985498649874988498949904991499249934994499549964997499849995000500150025003500450055006500750085009501050115012501350145015501650175018501950205021502250235024502550265027502850295030503150325033503450355036503750385039504050415042504350445045504650475048504950505051505250535054505550565057505850595060506150625063506450655066506750685069507050715072507350745075507650775078507950805081508250835084508550865087508850895090509150925093509450955096509750985099510051015102510351045105510651075108510951105111511251135114511551165117511851195120512151225123512451255126512751285129513051315132513351345135513651375138513951405141514251435144514551465147514851495150515151525153515451555156515751585159516051615162516351645165516651675168516951705171517251735174517551765177517851795180518151825183518451855186518751885189519051915192519351945195519651975198519952005201520252035204520552065207520852095210521152125213521452155216521752185219522052215222522352245225522652275228522952305231523252335234523552365237523852395240524152425243524452455246524752485249525052515252525352545255525652575258525952605261526252635264526552665267526852695270527152725273527452755276527752785279528052815282528352845285528652875288528952905291529252935294529552965297529852995300530153025303530453055306530753085309531053115312531353145315531653175318531953205321532253235324532553265327532853295330533153325333533453355336533753385339534053415342534353445345534653475348534953505351535253535354535553565357535853595360536153625363536453655366536753685369537053715372537353745375537653775378537953805381538253835384538553865387538853895390539153925393539453955396539753985399540054015402540354045405540654075408540954105411541254135414541554165417541854195420542154225423542454255426542754285429543054315432543354345435543654375438543954405441544254435444544554465447544854495450545154525453545454555456545754585459546054615462546354645465546654675468546954705471547254735474547554765477547854795480548154825483548454855486548754885489549054915492549354945495549654975498549955005501550255035504550555065507550855095510551155125513551455155516551755185519552055215522552355245525552655275528552955305531553255335534553555365537553855395540554155425543554455455546554755485549555055515552555355545555555655575558555955605561556255635564556555665567556855695570557155725573557455755576557755785579558055815582558355845585558655875588558955905591559255935594559555965597559855995600560156025603560456055606560756085609561056115612561356145615561656175618561956205621562256235624562556265627562856295630563156325633563456355636563756385639564056415642564356445645564656475648564956505651565256535654565556565657565856595660566156625663566456655666566756685669567056715672567356745675567656775678567956805681568256835684568556865687568856895690569156925693569456955696569756985699570057015702570357045705570657075708570957105711571257135714571557165717571857195720572157225723572457255726572757285729573057315732573357345735573657375738573957405741574257435744574557465747574857495750575157525753575457555756575757585759576057615762576357645765576657675768576957705771577257735774577557765777577857795780578157825783578457855786578757885789579057915792579357945795579657975798579958005801580258035804580558065807580858095810581158125813581458155816581758185819582058215822582358245825582658275828582958305831583258335834583558365837583858395840584158425843584458455846584758485849585058515852585358545855585658575858585958605861586258635864586558665867586858695870587158725873587458755876587758785879588058815882588358845885588658875888588958905891589258935894589558965897589858995900590159025903590459055906590759085909591059115912591359145915591659175918591959205921592259235924592559265927592859295930593159325933593459355936593759385939594059415942594359445945594659475948594959505951595259535954595559565957595859595960596159625963596459655966596759685969597059715972597359745975597659775978597959805981598259835984598559865987598859895990599159925993599459955996599759985999600060016002600360046005600660076008600960106011601260136014601560166017601860196020602160226023602460256026602760286029603060316032603360346035603660376038603960406041604260436044604560466047604860496050605160526053605460556056605760586059606060616062606360646065606660676068606960706071607260736074607560766077607860796080608160826083608460856086608760886089609060916092609360946095609660976098609961006101610261036104610561066107610861096110611161126113611461156116611761186119612061216122612361246125612661276128612961306131613261336134613561366137613861396140614161426143614461456146614761486149615061516152615361546155615661576158615961606161616261636164616561666167616861696170617161726173617461756176617761786179618061816182618361846185618661876188618961906191619261936194619561966197619861996200620162026203620462056206620762086209621062116212621362146215621662176218621962206221622262236224622562266227622862296230623162326233623462356236623762386239624062416242624362446245624662476248624962506251625262536254625562566257625862596260626162626263626462656266626762686269627062716272627362746275627662776278627962806281628262836284628562866287628862896290629162926293629462956296629762986299630063016302630363046305630663076308630963106311631263136314631563166317631863196320632163226323632463256326632763286329633063316332633363346335633663376338633963406341634263436344634563466347634863496350635163526353635463556356635763586359636063616362636363646365636663676368636963706371637263736374637563766377637863796380638163826383638463856386638763886389639063916392639363946395639663976398639964006401640264036404640564066407640864096410641164126413641464156416641764186419642064216422642364246425642664276428642964306431643264336434643564366437643864396440644164426443644464456446644764486449645064516452645364546455645664576458645964606461646264636464646564666467646864696470647164726473647464756476647764786479648064816482648364846485648664876488648964906491649264936494649564966497649864996500650165026503650465056506650765086509651065116512651365146515651665176518651965206521652265236524652565266527652865296530653165326533653465356536653765386539654065416542654365446545654665476548654965506551655265536554655565566557655865596560656165626563656465656566656765686569657065716572657365746575657665776578657965806581658265836584658565866587658865896590659165926593659465956596659765986599660066016602660366046605660666076608660966106611661266136614661566166617661866196620662166226623662466256626662766286629663066316632663366346635663666376638663966406641664266436644664566466647664866496650665166526653665466556656665766586659666066616662666366646665666666676668666966706671667266736674667566766677667866796680668166826683668466856686668766886689669066916692669366946695669666976698669967006701670267036704670567066707670867096710671167126713671467156716671767186719672067216722672367246725672667276728672967306731673267336734673567366737673867396740674167426743674467456746674767486749675067516752675367546755675667576758675967606761676267636764676567666767676867696770677167726773677467756776677767786779678067816782678367846785678667876788678967906791679267936794679567966797679867996800680168026803680468056806680768086809681068116812681368146815681668176818681968206821682268236824682568266827682868296830683168326833
  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. NLog.Logger log;
  321. #region 变量定义
  322. //Web接口类
  323. public WebResult wr = null;
  324. //SmartSEM远程路径
  325. public String RemoteELYPath = "";
  326. public String RemoteMLFPath = "";
  327. //扫描周期
  328. private float cycle_time = 0;
  329. //人工干预
  330. public int hand_intervene = 2;
  331. //样品台保护值
  332. public float X_Min = 0;
  333. public float X_Max = 0.13f;
  334. public float Y_Min = 0;
  335. public float Y_Max = 0.13f;
  336. public float Z_Min = 0;
  337. public float Z_Max = 0.05f;
  338. public float T_Min = -4;
  339. public float T_Max = 70;
  340. public float R_Min = -380;
  341. public float R_Max = 380;
  342. public float M_Min = 0;
  343. public float M_Max = 0.012f;
  344. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  345. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  346. //定义一个全局的消息类
  347. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  348. //全局只有一个fatorySEM
  349. static FactoryHardware factorySEM = FactoryHardware.Instance;
  350. ISEMControl iSEM = factorySEM.ISEM;
  351. //@的作用是不用转义字符\\只打一个就行
  352. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  354. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  355. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  356. const String ImageName31 = @"FIBBefore.tif";
  357. const String ImageName32 = @"FIBAfter.tif";
  358. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  359. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  360. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  361. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  362. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  364. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  365. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  366. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  367. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  368. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  369. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  370. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  371. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  372. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  373. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  374. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  375. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  376. const String ElyDeposition = @"Deposition.ely"; //沉积
  377. const String ElyCrossSection = @"CrossSection.ely"; //切割
  378. const float fMin = (float)0.0000002; //单位是米
  379. const float fSateyZ = (float)0.03;//单位是米
  380. public Boolean key_stop = false;
  381. String focus_path = "";
  382. String FIBfocus_path = "";
  383. String StigX_path = "";
  384. String StigY_path = "";
  385. String EDS_path = "";
  386. String data_path = "";
  387. int m_nWorkHoleNo = -1;
  388. //测量文件
  389. private MeasureFile m_measureFile;
  390. public MeasureFile MeasureFile
  391. {
  392. get { return this.m_measureFile; }
  393. set { this.m_measureFile = value; }
  394. }
  395. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  396. private List<MeasureData.CutHole> m_cutHoles;
  397. public List<MeasureData.CutHole> cutHoles
  398. {
  399. get { return this.m_cutHoles; }
  400. set { this.m_cutHoles = value; }
  401. }
  402. //工作文件夹
  403. private string m_WorkingFolder;
  404. public string WorkingFolder
  405. {
  406. get { return this.m_WorkingFolder; }
  407. set { this.m_WorkingFolder = value; }
  408. }
  409. //程序当前路径
  410. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  411. //线程状态
  412. private ThreadStatus m_ThreadStatus;
  413. public ThreadStatus TStatus
  414. {
  415. get { return this.m_ThreadStatus; }
  416. set { this.m_ThreadStatus = value; }
  417. }
  418. #endregion
  419. //构造函数
  420. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  421. {
  422. log = NLog.LogManager.GetCurrentClassLogger();
  423. TStatus = new ThreadStatus();
  424. cutHoles = new List<MeasureData.CutHole>();
  425. //配置远程连接
  426. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  427. }
  428. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  429. public bool InitMeas(MeasureFile a_measureFile)
  430. {
  431. log.Info("进入初始化函数");
  432. m_measureFile = a_measureFile;
  433. List<CutHole> listHoles = m_measureFile.ListCutHole;
  434. foreach (CutHole h in listHoles)
  435. {
  436. if (h.SWITCH == true)
  437. {
  438. m_cutHoles.Add(h);
  439. }
  440. }
  441. if (m_cutHoles.Count == 0)
  442. return false;
  443. if (m_measureFile.MParam.EDS == true)
  444. {
  445. log.Info("进行能谱分析", true);
  446. Init_MeasDB();
  447. }
  448. return true;
  449. }
  450. //给前台UI发送消息步骤
  451. public void SendMsg(string step_code)
  452. {
  453. arg.Step_Code = step_code;
  454. arg.Time = DateTime.Now;
  455. SendThreadStatus(this, arg);
  456. }
  457. //给前台UI发送孔状态信息
  458. public void SendCutHoleMsg(string a_state, string a_holeName)
  459. {
  460. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  461. arg.HoleName = a_holeName;
  462. arg.State = a_state;
  463. SendCutHolesStatus(this, arg);
  464. }
  465. //测量流程
  466. public void DoMeasure()
  467. {
  468. //创建线程的测量状态的更新
  469. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  470. //检查硬件连接是否正常
  471. log.Warn("测量线程:开始连接硬件...", true);
  472. if (!ConnectHardware())
  473. {
  474. MessageBox.Show("连接电镜失败!","重要错误",MessageBoxButtons.OK,MessageBoxIcon.Error);
  475. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  476. log.Error("测量线程报错:连接硬件硬件连接失败", false);
  477. return;
  478. }
  479. //设置工作文件夹
  480. SetWorkingFolderStr();
  481. //设置SmartSEM远程路径
  482. iSEM.SetRemoteELYPath(RemoteELYPath);
  483. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  484. //增加EDS控制
  485. //将停止键复位
  486. key_stop = false;
  487. //开始测量就将模式设置为SEM
  488. log.Info("测量线程:开始切换到SEM模式", true);
  489. if (!iSEM.CmdFIBModeSEM())
  490. {
  491. log.Error("测量线程报错:开始切换到SEM模式失败。", false);
  492. return;
  493. }
  494. arg.Picture_Information.Work_Status = "SEM";
  495. //设置扫描周期
  496. log.Info("测量线程:设置电镜图像扫描周期为对焦接口程序适合的扫描周期", true);
  497. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  498. Thread.Sleep(200);
  499. cycle_time = iSEM.GetCycleTime();
  500. if (cycle_time == 0)
  501. {
  502. log.Error("测量线程报错:获取扫描周期时间失败", false);
  503. return;
  504. }
  505. Thread.Sleep((int)cycle_time +100);
  506. //开始做各个孔的检测
  507. for (int i = 0; i < m_cutHoles.Count; i++)
  508. {
  509. //自动亮度对比度
  510. log.Info("测量线程:开启自动亮度,对比度调节", true);
  511. iSEM.SetAutoBright(100);
  512. Thread.Sleep(200);
  513. iSEM.SetAutoContrast(100);
  514. Thread.Sleep(200);
  515. //log.Info("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  516. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  517. {
  518. log.Error("测量线程报错:开始设置自动亮度、对比度失败。", false);
  519. return;
  520. }
  521. Thread.Sleep(5000);
  522. log.Warn("测量线程:测试第"+i.ToString()+"个分析点。", true);
  523. //记录测量序号和孔名
  524. m_nWorkHoleNo = i;
  525. arg.HoleName = m_cutHoles[i].HoleName;
  526. //最终数据存放目录
  527. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  528. //对焦数据存放目录
  529. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  530. m_measureFile.MParam.AutoFocus.Path = focus_path;
  531. if (!Directory.Exists(focus_path))
  532. {
  533. Directory.CreateDirectory(focus_path);
  534. }
  535. //StigX数据存放目录
  536. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  537. m_measureFile.MParam.AutoStigX.Path = StigX_path;
  538. if (!Directory.Exists(StigX_path))
  539. {
  540. Directory.CreateDirectory(StigX_path);
  541. }
  542. //StigY数据存放目录
  543. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  544. m_measureFile.MParam.AutoStigY.Path = StigY_path;
  545. if (!Directory.Exists(StigY_path))
  546. {
  547. Directory.CreateDirectory(StigY_path);
  548. }
  549. //EDS数据存放路径
  550. if (m_measureFile.MParam.EDS == true)
  551. {
  552. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  553. m_measureFile.MParam.EDSParam.Path = EDS_path;
  554. if (!Directory.Exists(EDS_path))
  555. {
  556. Directory.CreateDirectory(EDS_path);
  557. }
  558. }
  559. //判断孔状态
  560. if (m_cutHoles[i].STATE != State.Ready)
  561. {
  562. log.Warn("测试孔"+ m_cutHoles[i].HoleName+"状态非就绪,不予测量。", true);
  563. continue;
  564. }
  565. //20201127增加Scanrotate Off
  566. iSEM.SetScanRotationOff();
  567. Thread.Sleep(200);
  568. //20.光束等复位
  569. iSEM.SetBeamShiftX(0);
  570. Thread.Sleep(200);
  571. iSEM.SetBeamShiftY(0);
  572. Thread.Sleep(200);
  573. //开始循环工作
  574. if (i == 0)
  575. {
  576. log.Warn("测量线程:分析点" + m_cutHoles[i].HoleName+"开始测量。", true);
  577. m_cutHoles[i].START = DateTime.Now;
  578. //切孔操作-开始
  579. m_cutHoles[i].STATE = State.InProcess;
  580. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  581. log.Warn("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  582. + m_cutHoles[0].Position.X.ToString()+","
  583. + m_cutHoles[0].Position.Y.ToString()+","
  584. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  585. #region 坐标恢复
  586. //0、先移动Z轴到比较低的位置上。
  587. if (m_measureFile.MParam.Tilt)//如果是倾斜样品台,移动Z轴
  588. {
  589. if (!iSEM.SetStageGotoZ(fSateyZ))
  590. {
  591. arg.State = false;
  592. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  593. SendMsg("1-0");
  594. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  595. m_cutHoles[i].STATE = State.Failed;
  596. m_cutHoles[i].END = DateTime.Now;
  597. m_measureFile.Save();
  598. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  599. Thread.Sleep(3000);
  600. continue;
  601. }
  602. while (true)
  603. {
  604. Thread.Sleep(4000);
  605. if (iSEM.GetStageIs() == 0)
  606. {
  607. break;
  608. }
  609. }
  610. //判断是否停止进程
  611. if (key_stop)
  612. {
  613. m_cutHoles[i].STATE = State.Failed;
  614. m_cutHoles[i].END = DateTime.Now;
  615. m_measureFile.Save();
  616. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  617. log.Info("停止键被按下", true);
  618. return;
  619. }
  620. }
  621. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  622. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  623. {
  624. arg.State = false;
  625. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  626. SendMsg("1-0");
  627. log.Error("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  628. m_cutHoles[i].STATE = State.Failed;
  629. m_cutHoles[i].END = DateTime.Now;
  630. m_measureFile.Save();
  631. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  632. Thread.Sleep(3000);
  633. continue;
  634. }
  635. while (true)
  636. {
  637. Thread.Sleep(4000);
  638. if (iSEM.GetStageIs() == 0)
  639. {
  640. break;
  641. }
  642. }
  643. //判断是否停止进程
  644. if (key_stop)
  645. {
  646. m_cutHoles[i].STATE = State.Failed;
  647. m_cutHoles[i].END = DateTime.Now;
  648. m_measureFile.Save();
  649. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  650. log.Info("停止键被按下", true);
  651. return;
  652. }
  653. //2、移动XY轴
  654. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  655. {
  656. arg.State = false;
  657. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  658. SendMsg("1-0");
  659. log.Error("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  660. + m_cutHoles[0].Position.X.ToString() + ","
  661. + m_cutHoles[0].Position.Y.ToString()+ ")", false);
  662. m_cutHoles[i].STATE = State.Failed;
  663. m_cutHoles[i].END = DateTime.Now;
  664. m_measureFile.Save();
  665. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  666. Thread.Sleep(3000);
  667. continue;
  668. }
  669. while (true)
  670. {
  671. Thread.Sleep(4000);
  672. if (iSEM.GetStageIs() == 0)
  673. {
  674. break;
  675. }
  676. }
  677. //判断是否停止进程
  678. if (key_stop)
  679. {
  680. m_cutHoles[i].STATE = State.Failed;
  681. m_cutHoles[i].END = DateTime.Now;
  682. m_measureFile.Save();
  683. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  684. log.Info("停止键被按下", true);
  685. return;
  686. }
  687. //3、恢复Z轴
  688. if (m_measureFile.MParam.Tilt)
  689. {
  690. //恢复Z轴
  691. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  692. {
  693. arg.State = false;
  694. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  695. SendMsg("1-0");
  696. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  697. m_cutHoles[i].STATE = State.Failed;
  698. m_cutHoles[i].END = DateTime.Now;
  699. m_measureFile.Save();
  700. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  701. Thread.Sleep(3000);
  702. continue;
  703. }
  704. while (true)
  705. {
  706. Thread.Sleep(4000);
  707. if (iSEM.GetStageIs() == 0)
  708. {
  709. break;
  710. }
  711. }
  712. //判断是否停止进程
  713. if (key_stop)
  714. {
  715. log.Info("停止键按下。", true);
  716. m_cutHoles[i].STATE = State.Failed;
  717. m_cutHoles[i].END = DateTime.Now;
  718. m_measureFile.Save();
  719. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  720. return;
  721. }
  722. }
  723. arg.State = true;
  724. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  725. SendMsg("1-0");
  726. //4、设置WD
  727. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  728. Thread.Sleep(1000);
  729. #endregion
  730. //第一个点开始测量
  731. if (FirstHole())
  732. {
  733. //保存文件,将测量状态更改
  734. m_cutHoles[i].STATE = State.Success;
  735. m_cutHoles[i].END = DateTime.Now;
  736. m_measureFile.Save();
  737. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  738. }
  739. //失败
  740. else
  741. {
  742. m_cutHoles[i].STATE = State.Failed;
  743. m_cutHoles[i].END = DateTime.Now;
  744. m_measureFile.Save();
  745. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  746. }
  747. }
  748. else
  749. {
  750. //其他孔的测量
  751. log.Info("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  752. m_cutHoles[i].START = DateTime.Now;
  753. m_cutHoles[i].STATE = State.InProcess;
  754. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  755. //其他孔测量之前的初始化
  756. if (!OtherHole_Init())
  757. {
  758. arg.State = false;
  759. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  760. SendMsg("1-0");
  761. Thread.Sleep(3000);
  762. log.Info("测量线程:" + arg.Message, true);
  763. continue;
  764. }
  765. arg.State = true;
  766. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  767. SendMsg("1-0");
  768. //其他孔开始测量
  769. if (OtherHole())
  770. {
  771. //保存文件,将测量状态更改
  772. m_cutHoles[i].STATE = State.Success;
  773. m_cutHoles[i].END = DateTime.Now;
  774. m_measureFile.Save();
  775. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  776. }
  777. //失败
  778. else
  779. {
  780. m_cutHoles[i].STATE = State.Failed;
  781. m_cutHoles[i].END = DateTime.Now;
  782. m_measureFile.Save();
  783. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  784. }
  785. }
  786. if(key_stop)
  787. {
  788. m_cutHoles[i].END = DateTime.Now;
  789. m_cutHoles[i].STATE = State.Ready;
  790. m_measureFile.Save();
  791. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  792. arg.Message = "用户停止测量";
  793. SendMsg("0-0");
  794. break;
  795. }
  796. //两个点之间更换,加延时以便完成显示
  797. Thread.Sleep(3000);
  798. }
  799. }
  800. //检查硬件连接是否正常
  801. public bool ConnectHardware()
  802. {
  803. //返回硬件的连接状态
  804. return iSEM.ConnectStatus();
  805. }
  806. //设置工作文件夹
  807. public bool SetWorkingFolderStr()
  808. {
  809. WorkingFolder = m_measureFile.FilePath;
  810. return true;
  811. }
  812. //插入PT针
  813. public bool InsertPT()
  814. {
  815. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  816. //SendMsg("调用宏插入PT针宏文件" + fn);
  817. iSEM.CMDMCFFilename(fn);
  818. //延时1s??
  819. Thread.Sleep(1000);
  820. return true;
  821. }
  822. //撤出PT针
  823. public bool RetractPT()
  824. {
  825. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  826. //SendMsg("调用宏撤出PT针宏文件" + fn);
  827. iSEM.CMDMCFFilename(fn);
  828. //延时1s??
  829. Thread.Sleep(1000);
  830. return true;
  831. }
  832. //PT沉积
  833. public bool PTWork()
  834. {
  835. //执行PT沉积的ELY文件
  836. if (!ExcuteEly(m_measureFile.MParam.PTTemp))
  837. {
  838. return false;
  839. }
  840. //等待沉积完成
  841. while (true)
  842. {
  843. Thread.Sleep(7000);
  844. if (iSEM.GetFIBMode() == 0)
  845. {
  846. break;
  847. }
  848. }
  849. return true;
  850. }
  851. //FIB切割
  852. public bool FIBWork()
  853. {
  854. //执行PT沉积的ELY文件
  855. if (!ExcuteEly(m_measureFile.MParam.FIBTemp))
  856. {
  857. return false;
  858. }
  859. //等待切割完成
  860. while (true)
  861. {
  862. Thread.Sleep(10000);
  863. if (iSEM.GetFIBMode() == 0)
  864. {
  865. break;
  866. }
  867. }
  868. return true;
  869. }
  870. //执行ELY文件的步骤
  871. public bool ExcuteEly(string a_filename)
  872. {
  873. //执行ELy文件有三个动作
  874. //1. 选择ELY文件
  875. //SendMsg("选择ELY文件");
  876. if (!iSEM.CmdFIBLoadELY(a_filename))
  877. {
  878. //SendMsg("选择ELY文件失败");
  879. return false;
  880. }
  881. Thread.Sleep(1000);
  882. //2. 确认ELY文件
  883. //SendMsg("确认ELY文件");
  884. if (!iSEM.CmdFIBEXPOSUREELY())
  885. {
  886. //SendMsg("确认ELY文件失败");
  887. return false;
  888. }
  889. Thread.Sleep(1000);
  890. //3. 执行ELY文件
  891. //SendMsg("执行ELY文件");
  892. if (!iSEM.CmdFIBSTARTELY())
  893. {
  894. //SendMsg("执行ELY文件失败");
  895. return false;
  896. }
  897. Thread.Sleep(1000);
  898. return true;
  899. }
  900. /// <summary>
  901. ///13. 自动 定位功能,沉积
  902. /// </summary>
  903. /// <returns></returns>
  904. public bool GetPoistion()
  905. {
  906. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  907. int state = 1;
  908. log.Info("测量线程:13.自动定位、沉积-功能自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString(), true);
  909. Thread.Sleep(200);
  910. //1.控制SEM放大600X
  911. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  912. {
  913. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  914. arg.State = false;
  915. SendMsg("1-6");
  916. log.Error("测量线程报错:13.自动定位、沉积-自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "控制失败", false);
  917. return false;
  918. }
  919. Thread.Sleep(200);
  920. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  921. {
  922. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  923. arg.State = false;
  924. SendMsg("1-6");
  925. log.Error("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString() + "控制失败", false);
  926. return false;
  927. }
  928. float current = iSEM.GetMagnification();
  929. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  930. {
  931. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  932. Thread.Sleep(200);
  933. current = iSEM.GetMagnification();
  934. }
  935. arg.State = true;
  936. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  937. SendMsg("1-6");
  938. //判断是否停止进程
  939. if (key_stop)
  940. {
  941. log.Info("停止键按下。", true);
  942. return false;
  943. }
  944. //判断是否为仅拍照,不是则执行FIB操作
  945. if (!m_measureFile.MParam.Is_Photograph)
  946. {
  947. log.Info("测量线程:切换到FIB模式。", true);
  948. //6.设置FIB拍照参数——扫描时间、束流等
  949. //7.控制FIB自动亮度、对比度
  950. Thread.Sleep(200);
  951. if (!iSEM.CmdFIBModeFIB())
  952. {
  953. arg.Message = "FIB模式切换失败";
  954. arg.State = false;
  955. SendMsg("1-8");
  956. log.Error("测量线程报错:切换到FIB模式失败。", false);
  957. return false;
  958. }
  959. arg.State = true;
  960. arg.Picture_Information.Work_Status = "FIB";
  961. arg.Message = "FIB模式切换成功";
  962. SendMsg("1-8");
  963. Thread.Sleep(1000);
  964. //判断是否停止进程
  965. if (key_stop)
  966. {
  967. log.Info("停止键按下。", true);
  968. return false;
  969. }
  970. //8.控制FIB拍照
  971. //9.保存照片======更改路径
  972. //20201103,FIB使用定位的放大倍数
  973. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  974. arg.Picture_Information.Picture_FullPath = fileName2;
  975. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  976. Thread.Sleep(200);
  977. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  978. Thread.Sleep(200);
  979. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  980. Thread.Sleep(200);
  981. //FIB的放大位数,将来会改
  982. log.Info("测量线程:设置FIB放大倍数"+ m_measureFile.MParam.Location_Magnification.ToString(), true);
  983. //20201103,FIB使用定位的放大倍数
  984. if (!iSEM.SetFIBMagnification(m_measureFile.MParam.Location_Magnification))
  985. {
  986. arg.Message = "FIB放大倍数设置失败";
  987. arg.State = false;
  988. SendMsg("1-9");
  989. log.Error("测量线程失败:FIB放大倍数设置失败。", false);
  990. return false;
  991. }
  992. arg.Message = "FIB放大倍数设置成功";
  993. arg.State = true;
  994. SendMsg("1-9");
  995. Thread.Sleep(200);
  996. //判断是否停止进程
  997. if (key_stop)
  998. {
  999. log.Info("停止键按下。", true);
  1000. return false;
  1001. }
  1002. //4、设置WD
  1003. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1004. Thread.Sleep(1000);
  1005. //20201127增加自动亮度对比度
  1006. if(m_measureFile.MParam.FIBDo)
  1007. {
  1008. if(m_measureFile.MParam.FIBAutoBC)
  1009. {
  1010. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1011. float m_TempBrightness = 50.0f;
  1012. float m_TempContrast = 30.0f;
  1013. if (m_measureFile.MParam.SampleName == "3" || m_measureFile.MParam.SampleName == "1")
  1014. {
  1015. m_TempBrightness = 50.0f;
  1016. m_TempContrast = 30.0f;
  1017. iSEM.SetAutoVideoOff();
  1018. Thread.Sleep(200);
  1019. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1020. Thread.Sleep(200);
  1021. iSEM.SetContrast(m_TempContrast); //30.0f
  1022. Thread.Sleep(200);
  1023. }
  1024. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1025. {
  1026. iSEM.SetAutoVideoBrightnessAndContrast();
  1027. //20201128陈工建议增加
  1028. Thread.Sleep(200);
  1029. iSEM.SetAutoBright(100);
  1030. Thread.Sleep(200);
  1031. iSEM.SetAutoContrast(100);
  1032. Thread.Sleep(5000);
  1033. }
  1034. }
  1035. else
  1036. {
  1037. iSEM.SetAutoVideoOff();
  1038. Thread.Sleep(200);
  1039. iSEM.SetBrightness(m_measureFile.MParam.FIBB);
  1040. Thread.Sleep(200);
  1041. iSEM.SetContrast(m_measureFile.MParam.FIBC);
  1042. Thread.Sleep(200);
  1043. }
  1044. }
  1045. //拍照前改变速度,延时
  1046. iSEM.CloseReduced();
  1047. Thread.Sleep(200);
  1048. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1049. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1050. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1051. Thread.Sleep(200);
  1052. cycle_time = iSEM.GetCycleTime();
  1053. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1054. if (!GetImage(fileName2))
  1055. {
  1056. arg.Message = "FIB拍照失败";
  1057. arg.State = false;
  1058. SendMsg("1-11");
  1059. log.Error("测量线程报错:FIB拍照失败。", false);
  1060. return false;
  1061. }
  1062. arg.State = true;
  1063. arg.Picture_Information.Picture_FullPath = fileName2;
  1064. arg.Message = "FIB拍照成功";
  1065. SendMsg("1-11");
  1066. Thread.Sleep(200);
  1067. SendMsg("1-16");
  1068. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1069. Thread.Sleep(200);
  1070. cycle_time = iSEM.GetCycleTime();
  1071. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1072. //判断是否停止进程
  1073. if (key_stop)
  1074. {
  1075. log.Info("停止键按下。", true);
  1076. return false;
  1077. }
  1078. iSEM.CmdFIBModeSEM();
  1079. Thread.Sleep(200);
  1080. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1081. log.Info("测量线程:调用图像处理接口,准备移动样品台", true);
  1082. log.Info("文件名=" + fileName2, true);
  1083. log.Info("样品类型=" + m_measureFile.MParam.SampleName, true);
  1084. log.Info("供应商名称=" + m_measureFile.MParam.Firm, true);
  1085. wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1086. log.Info("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString()+")", true);
  1087. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1088. if (state == 1)
  1089. {
  1090. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1091. float xc = (x1 + x2)/2;
  1092. float yc = (y1 + y2)/2;
  1093. x0 = xc - 512;
  1094. y0 = 384 - yc;
  1095. log.Info("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1096. px = iSEM.GetPixelSize();
  1097. //修改FIB切割的ELY文件坐标
  1098. XmlDocument xmlDoc = new XmlDocument();
  1099. xmlDoc.Load(m_measureFile.MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1100. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1101. if (xns != null)
  1102. {
  1103. XmlAttributeCollection attributeCol = xns.Attributes;
  1104. //遍历自己点属性
  1105. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1106. log.Info("XML-Width_a = " + width_a.ToString(), true);
  1107. foreach (XmlAttribute attri in attributeCol)
  1108. {
  1109. if (attri.Name == "x")
  1110. {
  1111. attri.InnerText = ((x0 * px)*1000000 - width_a).ToString();
  1112. log.Info("XML-TopLeft-X = " + attri.InnerText, true);
  1113. }
  1114. else if (attri.Name == "y")
  1115. {
  1116. attri.InnerText = ((y0 * px)*1000000-2.791).ToString();
  1117. log.Info("XML-TopLeft-Y = " + attri.InnerText, true);
  1118. }
  1119. }
  1120. }
  1121. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1122. if (xns != null)
  1123. {
  1124. XmlAttributeCollection attributeCol = xns.Attributes;
  1125. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1126. //遍历自己点属性
  1127. foreach (XmlAttribute attri in attributeCol)
  1128. {
  1129. if (attri.Name == "x")
  1130. {
  1131. attri.InnerText = ((x0 * px)*1000000 - width).ToString();
  1132. }
  1133. else if (attri.Name == "y")
  1134. {
  1135. attri.InnerText = (((y0 * px) *1000000) + 2 - 2.791).ToString();
  1136. }
  1137. }
  1138. }
  1139. xmlDoc.Save(m_measureFile.MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1140. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1141. if (m_measureFile.MParam.PT)
  1142. {
  1143. xmlDoc = new XmlDocument();
  1144. xmlDoc.Load(m_measureFile.MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1145. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1146. if (xns != null)
  1147. {
  1148. XmlAttributeCollection attributeCol = xns.Attributes;
  1149. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1150. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1151. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1152. //遍历自己点属性
  1153. foreach (XmlAttribute attri in attributeCol)
  1154. {
  1155. if (attri.Name == "x")
  1156. {
  1157. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1158. }
  1159. else if (attri.Name == "y")
  1160. {
  1161. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1162. }
  1163. }
  1164. }
  1165. xmlDoc.Save(m_measureFile.MParam.PTTemp);
  1166. }
  1167. if (hand_intervene == 1)
  1168. {
  1169. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1170. }
  1171. }
  1172. else
  1173. {
  1174. arg.Message = "图像接口参数state返回值为零";
  1175. arg.State = false;
  1176. SendMsg("1-12");
  1177. if (hand_intervene == 1)
  1178. {
  1179. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1180. {
  1181. return false;
  1182. }
  1183. }
  1184. else
  1185. {
  1186. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1187. return false;
  1188. }
  1189. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1190. return false;
  1191. }
  1192. //判断是否停止进程
  1193. if (key_stop)
  1194. {
  1195. log.Info("停止键按下", true);
  1196. return false;
  1197. }
  1198. //11.自动工具样品类型参数确定是否需要PT沉积
  1199. if (m_measureFile.MParam.PT)
  1200. {
  1201. if (!iSEM.CmdFIBModeFIB())
  1202. {
  1203. log.Error("测量线程报错:切换到SEM模式失败", false);
  1204. return false;
  1205. }
  1206. Thread.Sleep(200);
  1207. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1208. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1209. {
  1210. log.Info("测量线程:插入PT针" + arg.Message, true);
  1211. if (!InsertPT())
  1212. {
  1213. arg.Message = "插入PT针失败";
  1214. arg.State = false;
  1215. SendMsg("1-13");
  1216. log.Error("测量线程报错:"+ arg.Message, false);
  1217. return false;
  1218. }
  1219. arg.State = true;
  1220. arg.Message = "插入PT针成功";
  1221. SendMsg("1-13");
  1222. }
  1223. //判断是否停止进程
  1224. if (key_stop)
  1225. {
  1226. log.Info("停止键按下", true);
  1227. return false;
  1228. }
  1229. //3. 根据坐标进行PT沉积
  1230. if (!PTWork())
  1231. {
  1232. arg.Message = "PT沉积失败";
  1233. arg.State = false;
  1234. SendMsg("1-14");
  1235. log.Error("测量线程报错:" + arg.Message, false);
  1236. return false;
  1237. }
  1238. arg.State = true;
  1239. arg.Message = "PT沉积成功";
  1240. SendMsg("1-14");
  1241. //判断是否停止进程
  1242. if (key_stop)
  1243. {
  1244. log.Info("停止键按下", true);
  1245. return false;
  1246. }
  1247. //15.根据样品类型决定是否撤出PT针
  1248. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1249. {
  1250. if (!RetractPT())
  1251. {
  1252. arg.Message = "撤出PT针失败";
  1253. arg.State = false;
  1254. SendMsg("1-15");
  1255. log.Error("测量线程报错:" + arg.Message, false);
  1256. return false;
  1257. }
  1258. arg.State = true;
  1259. arg.Message = "撤出PT针成功";
  1260. SendMsg("1-15");
  1261. }
  1262. //判断是否停止进程
  1263. if (key_stop)
  1264. {
  1265. log.Info("停止键按下", true);
  1266. return false;
  1267. }
  1268. if (!iSEM.CmdFIBModeSEM())
  1269. {
  1270. //arg.Message = "切割前SEM拍照失败。";
  1271. //arg.State = false;
  1272. //SendMsg("1-17");
  1273. log.Error("测量线程报错:切换到SEM模式失败", false);
  1274. return false;
  1275. }
  1276. }
  1277. }
  1278. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1279. float[] firstPosition = iSEM.GetStagePosition();
  1280. m_cutHoles[0].Position.X = firstPosition[0];
  1281. m_cutHoles[0].Position.Y = firstPosition[1];
  1282. m_cutHoles[0].Position.Z = firstPosition[2];
  1283. m_cutHoles[0].Position.T = firstPosition[3];
  1284. m_cutHoles[0].Position.R = firstPosition[4];
  1285. m_cutHoles[0].Position.M = firstPosition[5];
  1286. //这里要调用文件保存功能
  1287. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1288. + firstPosition[1].ToString() + ","
  1289. + firstPosition[2].ToString() + ","
  1290. + firstPosition[3].ToString() + ","
  1291. + firstPosition[4].ToString() + ","
  1292. + firstPosition[5].ToString() + ")";
  1293. arg.State = true;
  1294. SendMsg("1-16");
  1295. //判断是否停止进程
  1296. if (key_stop)
  1297. {
  1298. log.Info("停止键按下", true);
  1299. return false;
  1300. }
  1301. return true;
  1302. }
  1303. /// <summary>
  1304. /// 14. FIB切割
  1305. /// </summary>
  1306. /// <returns></returns>
  1307. public bool FIBCross()
  1308. {
  1309. int state = 0;
  1310. #if CHECK
  1311. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1312. if (mag < 200)
  1313. {
  1314. mag = 200;
  1315. }
  1316. String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
  1317. iSEM.SetMagnification(mag);
  1318. Thread.Sleep(2000);
  1319. iSEM.CmdSaveRate();
  1320. Thread.Sleep(200);
  1321. cycle_time = iSEM.GetCycleTime();
  1322. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1323. if (!GetImage(fileName1))
  1324. {
  1325. arg.Message = "切割前SEM拍照失败。";
  1326. arg.State = false;
  1327. SendMsg("1-17");
  1328. log.Info("测量线程报错:SEM切割前图像拍照失败", false);
  1329. return false;
  1330. }
  1331. iSEM.CmdFocusRate();
  1332. Thread.Sleep(200);
  1333. cycle_time = iSEM.GetCycleTime();
  1334. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1335. arg.Message = "切割前SEM拍照成功。";
  1336. arg.Picture_Information.Picture_FullPath = fileName1;
  1337. arg.State = true;
  1338. SendMsg("1-17");
  1339. #endif
  1340. if (!iSEM.CmdFIBModeFIB())
  1341. {
  1342. arg.Message = "切换到FIB模式失败。";
  1343. arg.State = false;
  1344. SendMsg("1-18");
  1345. log.Error("测量线程报错:切换到SEM模式失败", false);
  1346. return false;
  1347. }
  1348. arg.Message = "切换到FIB模式成功。";
  1349. arg.State = true;
  1350. SendMsg("1-18");
  1351. Thread.Sleep(1000);
  1352. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1353. float current = iSEM.GetMagnification();
  1354. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  1355. {
  1356. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1357. Thread.Sleep(200);
  1358. current = iSEM.GetMagnification();
  1359. }
  1360. Thread.Sleep(2000);
  1361. //14.自动控制FIB切割
  1362. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1363. //2.控制FIB进行切割
  1364. //以上1、2步全部用ELY文件代替
  1365. if (!FIBWork())
  1366. {
  1367. arg.Message = "FIB切割失败";
  1368. arg.State = false;
  1369. SendMsg("1-19");
  1370. log.Error("测量线程报错:" + arg.Message, false);
  1371. return false;
  1372. }
  1373. arg.State = true;
  1374. arg.Message = "FIB切割成功";
  1375. SendMsg("1-19");
  1376. Thread.Sleep(300);
  1377. //判断是否停止进程
  1378. if (key_stop)
  1379. {
  1380. log.Info("停止键按下", true);
  1381. return false;
  1382. }
  1383. //做切割后SEM的拍照
  1384. log.Info("测量线程:切割后SEM拍照", true);
  1385. if (!iSEM.CmdFIBModeSEM())
  1386. {
  1387. //arg.Message = "切割后SEM拍照失败。";
  1388. //arg.State = false;
  1389. //SendMsg("1-20");
  1390. log.Error("测量线程报错:切换到SEM模式失败", false);
  1391. return false;
  1392. }
  1393. Thread.Sleep(1000);
  1394. #if CHECK
  1395. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
  1396. iSEM.SetMagnification(mag);
  1397. Thread.Sleep(2000);
  1398. iSEM.CmdSaveRate();
  1399. Thread.Sleep(200);
  1400. cycle_time = iSEM.GetCycleTime();
  1401. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1402. if (!GetImage(fileName2))
  1403. {
  1404. arg.Message = "切割后SEM拍照失败。";
  1405. arg.State = false;
  1406. SendMsg("1-20");
  1407. log.Info("测量线程报错:SEM切割后图像拍照失败", false);
  1408. return false;
  1409. }
  1410. arg.Picture_Information.Picture_FullPath = fileName2;
  1411. arg.Message = "切割后SEM拍照成功。";
  1412. arg.State = true;
  1413. SendMsg("1-20");
  1414. iSEM.CmdFocusRate();
  1415. Thread.Sleep(200);
  1416. cycle_time = iSEM.GetCycleTime();
  1417. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1418. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1419. wr.Img_Cut_Success(fileName1, fileName2, out state);
  1420. log.Info("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
  1421. if (state == 0)
  1422. {
  1423. log.Info("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
  1424. arg.Message = "图像接口参数state返回值为零";
  1425. arg.State = false;
  1426. SendMsg("1-22");
  1427. if (hand_intervene == 1)
  1428. {
  1429. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1430. {
  1431. return false;
  1432. }
  1433. }
  1434. else
  1435. {
  1436. return false;
  1437. }
  1438. log.Info("测量线程报错:" + arg.Message, false);
  1439. }
  1440. arg.State = true;
  1441. log.Info("验证切割准确性成功。", true);
  1442. arg.Message = "FIB切割校验成功";
  1443. SendMsg("1-22");
  1444. //判断是否停止进程
  1445. if (key_stop)
  1446. {
  1447. log.Info("停止键按下。", true);
  1448. return false;
  1449. }
  1450. #endif
  1451. return true;
  1452. }
  1453. /// <summary>
  1454. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1455. /// </summary>
  1456. /// <returns></returns>
  1457. public bool FindCross()
  1458. {
  1459. float x2 = 0, y2 = 0;
  1460. int state = 0;
  1461. //切换到SEM模式
  1462. if (!iSEM.CmdFIBModeSEM())
  1463. {
  1464. arg.Message = "SEM模式切换失败";
  1465. arg.State = false;
  1466. SendMsg("1-23");
  1467. log.Error("测量线程报错:" + arg.Message, false);
  1468. return false;
  1469. }
  1470. arg.State = true;
  1471. arg.Message = "SEM模式切换成功";
  1472. SendMsg("1-23");
  1473. arg.Picture_Information.Work_Status = "SEM";
  1474. Thread.Sleep(1000);
  1475. //判断是否停止进程
  1476. if (key_stop)
  1477. {
  1478. log.Info("停止键按下", true);
  1479. return false;
  1480. }
  1481. //1.控制SEM放大到300倍
  1482. log.Info("能谱电压设置:" + m_measureFile.MParam.Location_Voltage.ToString("0.0"));
  1483. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  1484. {
  1485. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  1486. arg.State = false;
  1487. SendMsg("1-24");
  1488. log.Error("测量线程报错:" + arg.Message, false);
  1489. return false;
  1490. }
  1491. Thread.Sleep(200);
  1492. //iSEM.SetAutoVideoBrightnessAndContrast();
  1493. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1494. float m_TempBrightness = 50.0f;
  1495. float m_TempContrast = 30.0f;
  1496. if (m_measureFile.MParam.SampleName == "3")
  1497. {
  1498. m_TempBrightness = 48.0f;
  1499. m_TempContrast = 29.0f;
  1500. }
  1501. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1502. iSEM.SetAutoVideoOff();
  1503. Thread.Sleep(200);
  1504. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1505. Thread.Sleep(200);
  1506. iSEM.SetContrast(m_TempContrast); //30.0f
  1507. Thread.Sleep(2000);
  1508. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1509. if (mag < 200)
  1510. {
  1511. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1512. if (m_measureFile.MParam.SampleName == "3")
  1513. mag = 400;
  1514. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1515. mag = 200;
  1516. }
  1517. if (!iSEM.SetMagnification(mag))
  1518. {
  1519. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1520. arg.State = false;
  1521. SendMsg("1-24");
  1522. log.Error("测量线程报错:" + arg.Message, false);
  1523. return false;
  1524. }
  1525. Thread.Sleep(200);
  1526. float current = iSEM.GetMagnification();
  1527. Thread.Sleep(200);
  1528. while (Math.Abs(current - mag) > 2)
  1529. {
  1530. iSEM.SetMagnification(mag);
  1531. Thread.Sleep(200);
  1532. current = iSEM.GetMagnification();
  1533. Thread.Sleep(200);
  1534. }
  1535. arg.State = true;
  1536. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1537. SendMsg("1-24");
  1538. Thread.Sleep(2000);
  1539. //判断是否停止进程
  1540. if (key_stop)
  1541. {
  1542. log.Info("停止键按下", true);
  1543. return false;
  1544. }
  1545. //3.控制SEM拍照
  1546. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1547. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1548. String fileName4 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName4;
  1549. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1550. log.Info("fileName4====================" + fileName4, true);
  1551. arg.Picture_Information.Picture_FullPath = fileName4;
  1552. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1553. Thread.Sleep(200);
  1554. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1555. Thread.Sleep(200);
  1556. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1557. Thread.Sleep(200);
  1558. //拍照前改变速度,延时
  1559. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1560. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1561. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1562. Thread.Sleep(200);
  1563. cycle_time = iSEM.GetCycleTime();
  1564. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1565. if (!GetImage(fileName4))
  1566. {
  1567. arg.State = false;
  1568. arg.Message = "SEM拍照找切割位置失败";
  1569. SendMsg("1-25");
  1570. log.Error("测量线程报错:" + arg.Message, false);
  1571. return false;
  1572. }
  1573. arg.Picture_Information.Picture_FullPath = fileName4;
  1574. arg.State = true;
  1575. arg.Message = "SEM拍照成功";
  1576. SendMsg("1-25");
  1577. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1578. Thread.Sleep(200);
  1579. cycle_time = iSEM.GetCycleTime();
  1580. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1581. //判断是否停止进程
  1582. if (key_stop)
  1583. {
  1584. return false;
  1585. }
  1586. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1587. //5.根据坐标控制SEM移动到切孔位置,居中
  1588. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  1589. log.Info("文件名=" + fileName4, true);
  1590. wr.Img_Trapezoid_Top_Center_Position(fileName4,Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  1591. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1592. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1593. if (state == 1)
  1594. {
  1595. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1596. if (!MoveToPixByMoveStage(x2, y2))
  1597. {
  1598. arg.State = false;
  1599. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1600. SendMsg("1-26");
  1601. log.Error("测量线程报错:" + arg.Message, false);
  1602. return false;
  1603. }
  1604. //判断是否移动完成
  1605. while (true)
  1606. {
  1607. Thread.Sleep(4000);
  1608. if (iSEM.GetStageIs() == 0)
  1609. {
  1610. break;
  1611. }
  1612. }
  1613. arg.State = true;
  1614. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1615. SendMsg("1-26");
  1616. //高倍到低倍不进行对焦
  1617. //拍照前改变速度,延时
  1618. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1619. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1620. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1621. Thread.Sleep(200);
  1622. cycle_time = iSEM.GetCycleTime();
  1623. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1624. //String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1625. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1626. String fileName10 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName10;
  1627. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1628. log.Info("fileName10====================" + fileName10, true);
  1629. if (!GetImage(fileName10))
  1630. {
  1631. //arg.State = false;
  1632. //arg.Message = "SEM拍照失败";
  1633. //SendMsg("1-25");
  1634. //return false;
  1635. log.Error("测量线程报错:找到已切割的位置拍照失败", false);
  1636. }
  1637. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1638. Thread.Sleep(200);
  1639. cycle_time = iSEM.GetCycleTime();
  1640. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1641. if (hand_intervene == 1)
  1642. {
  1643. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1644. }
  1645. }
  1646. else
  1647. {
  1648. arg.Message = "图像接口参数state返回值为零";
  1649. arg.State = false;
  1650. SendMsg("1-26");
  1651. if (hand_intervene == 1)
  1652. {
  1653. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1654. {
  1655. return false;
  1656. }
  1657. }
  1658. else
  1659. {
  1660. return false;
  1661. }
  1662. log.Error("测量线程报错:" + arg.Message, false);
  1663. return false;
  1664. }
  1665. //判断是否停止进程
  1666. if (key_stop)
  1667. {
  1668. log.Info("停止键按下", true);
  1669. return false;
  1670. }
  1671. return true;
  1672. }
  1673. /// <summary>
  1674. /// 17.自动控制SEM拍截面照
  1675. /// </summary>
  1676. /// <returns></returns>
  1677. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1678. {
  1679. int state = 0;
  1680. #region 设置拍照的电压
  1681. log.Info("测量线程:设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true);
  1682. //1、放大倍数参数photograph_
  1683. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Photograph_Voltage))
  1684. {
  1685. arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1686. arg.State = false;
  1687. SendMsg("1-27");
  1688. log.Error("测量线程报错:" + arg.Message, false);
  1689. return false;
  1690. }
  1691. //add
  1692. #endregion
  1693. Thread.Sleep(200);
  1694. #region 设置拍照的放大倍数
  1695. log.Info("测量线程:设置拍照放大倍数====" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  1696. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  1697. {
  1698. arg.Message = "放大倍数调整失败";
  1699. arg.State = false;
  1700. SendMsg("1-27");
  1701. log.Error("测量线程报错:" + arg.Message, false);
  1702. return false;
  1703. }
  1704. float set = m_measureFile.MParam.Photograph_Magnification;
  1705. float current = iSEM.GetMagnification();
  1706. while(Math.Abs(current- set) > 1)
  1707. {
  1708. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  1709. Thread.Sleep(200);
  1710. current = iSEM.GetMagnification();
  1711. }
  1712. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString()+ "成功";
  1713. arg.State = true;
  1714. SendMsg("1-27");
  1715. Thread.Sleep(3000 + (Int32)cycle_time);
  1716. //判断是否停止进程
  1717. if (key_stop)
  1718. {
  1719. log.Info("停止键按下", true);
  1720. return false;
  1721. }
  1722. #endregion
  1723. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1724. //if(!iSEM.SetAutoVideoBrightnessAndContrast())
  1725. //{
  1726. // log.Info("测量线程报错:自动开启亮度对比度失败", false);
  1727. // return false;
  1728. //}
  1729. //Thread.Sleep(5000);
  1730. //2.控制SEM自动对焦、亮度、对比度-接口
  1731. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1732. if ((m_measureFile.MParam.SampleName == "2")||(m_measureFile.MParam.SampleName == "3"))
  1733. iSEM.SetReduced(402, 128, 600, 600);
  1734. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1735. iSEM.SetReduced(402, 128, 600, 600);
  1736. Thread.Sleep(200);
  1737. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1738. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1739. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1740. Thread.Sleep(200);
  1741. cycle_time = iSEM.GetCycleTime();
  1742. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1743. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1744. if (!iSEM.SetAutoVideoOff())
  1745. {
  1746. log.Error("测量线程报错:关闭自动亮度对比度失败", false);
  1747. return false;
  1748. }
  1749. Thread.Sleep(5000);
  1750. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1751. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1752. if (ImageFocus1(false))
  1753. {
  1754. arg.Message = "自动对焦完成";
  1755. arg.State = true;
  1756. SendMsg("1-28");
  1757. }
  1758. else
  1759. {
  1760. arg.Message = "自动对焦失败";
  1761. arg.State = false;
  1762. SendMsg("1-28");
  1763. log.Error("测量线程报错:" + arg.Message, false);
  1764. return false;
  1765. }
  1766. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1767. iSEM.CloseReduced();
  1768. Thread.Sleep(200);
  1769. cycle_time = iSEM.GetCycleTime();
  1770. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1771. //判断是否停止进程
  1772. if (key_stop)
  1773. {
  1774. log.Info("停止键按下", true);
  1775. return false;
  1776. }
  1777. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1778. float m_TempBrightness = 50.0f;
  1779. float m_TempContrast = 30.0f;
  1780. if (m_measureFile.MParam.SampleName == "3")
  1781. {
  1782. m_TempBrightness = 50f;
  1783. m_TempContrast = 29f;
  1784. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1785. Thread.Sleep(200);
  1786. iSEM.SetContrast(m_TempContrast); //30.0f
  1787. Thread.Sleep(200);
  1788. }
  1789. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1790. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1791. {
  1792. log.Error("测量线程报错:自动开启亮度对比度失败", false);
  1793. return false;
  1794. }
  1795. Thread.Sleep(5000);
  1796. //3、设置SEM补偿角度
  1797. if (m_measureFile.MParam.Is_Photograph == false)
  1798. {
  1799. log.Info("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString()+"度", true);
  1800. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1801. {
  1802. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1803. arg.State = false;
  1804. SendMsg("1-29");
  1805. log.Error("测量线程报错:" + arg.Message, false);
  1806. return false;
  1807. }
  1808. arg.State = true;
  1809. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1810. SendMsg("1-29");
  1811. Thread.Sleep(200);
  1812. //判断是否停止进程
  1813. if (key_stop)
  1814. {
  1815. log.Error("停止键按下", false);
  1816. return false;
  1817. }
  1818. }
  1819. //4、拍照,5、保存照片
  1820. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1821. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1822. String fileName5 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  1823. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1824. log.Info("fileName5====================" + fileName5, true);
  1825. arg.Picture_Information.Picture_FullPath = fileName5;
  1826. arg.Picture_Information.Work_Status = "SEM";
  1827. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1828. Thread.Sleep(200);
  1829. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1830. Thread.Sleep(200);
  1831. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1832. Thread.Sleep(200);
  1833. //拍照前改变速度,延时
  1834. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1835. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1836. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1837. Thread.Sleep(200);
  1838. cycle_time = iSEM.GetCycleTime();
  1839. Thread.Sleep(Convert.ToInt32(cycle_time)*2);
  1840. if (!GetImage(fileName5))
  1841. {
  1842. arg.Message = "SEM拍照失败";
  1843. arg.State = false;
  1844. SendMsg("1-30");
  1845. log.Error("测量线程报错:" + arg.Message, false);
  1846. return false;
  1847. }
  1848. arg.Picture_Information.Picture_FullPath = fileName5;
  1849. arg.State = true;
  1850. arg.Message = "SEM拍照成功";
  1851. SendMsg("1-30");
  1852. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1853. Thread.Sleep(200);
  1854. cycle_time = iSEM.GetCycleTime();
  1855. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1856. //判断是否停止进程
  1857. if (key_stop)
  1858. {
  1859. log.Info("停止键按下", true);
  1860. return false;
  1861. }
  1862. #endregion
  1863. if (m_measureFile.MParam.Is_Photograph == false)
  1864. {
  1865. #region 对当前矩形进行旋转校正
  1866. //8,计算切割面区域偏移角度及方向
  1867. float degree = 0;
  1868. int direction = 0;
  1869. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  1870. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1871. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1872. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1873. if (state == 1)
  1874. {
  1875. //梯形角度
  1876. iSEM.SetScanRotationOn();
  1877. Thread.Sleep(200);
  1878. //20201128陈工要求,谭博返回角度*0.7
  1879. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  1880. Thread.Sleep(200);
  1881. arg.State = true;
  1882. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1883. SendMsg("1-31");
  1884. if (hand_intervene == 1)
  1885. {
  1886. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1887. }
  1888. }
  1889. else
  1890. {
  1891. arg.Message = "图像接口参数State返回值为零";
  1892. arg.State = false;
  1893. SendMsg("1-31");
  1894. if(hand_intervene == 1)
  1895. {
  1896. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1897. {
  1898. return false;
  1899. }
  1900. }
  1901. else
  1902. {
  1903. //return false;
  1904. }
  1905. log.Error("测量线程报错:" + arg.Message, false);
  1906. }
  1907. //判断是否停止进程
  1908. if (key_stop)
  1909. {
  1910. log.Info("停止键按下", true);
  1911. return false;
  1912. }
  1913. Thread.Sleep(200);
  1914. //12拍照
  1915. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1916. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1917. String fileName6 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  1918. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1919. log.Info("fileName6====================" + fileName6, true);
  1920. arg.Picture_Information.Picture_FullPath = fileName6;
  1921. arg.Picture_Information.Work_Status = "SEM";
  1922. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1923. Thread.Sleep(200);
  1924. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1925. Thread.Sleep(200);
  1926. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1927. Thread.Sleep(200);
  1928. //拍照前改变速度,延时
  1929. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1930. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1931. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1932. Thread.Sleep(200);
  1933. cycle_time = iSEM.GetCycleTime();
  1934. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1935. if (!GetImage(fileName6))
  1936. {
  1937. arg.Message = "SEM拍照失败";
  1938. arg.State = false;
  1939. SendMsg("1-33");
  1940. log.Error("测量线程报错:" + arg.Message, false);
  1941. return false;
  1942. }
  1943. arg.Picture_Information.Picture_FullPath = fileName6;
  1944. arg.State = true;
  1945. arg.Message = "SEM拍照成功";
  1946. SendMsg("1-33");
  1947. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1948. Thread.Sleep(200);
  1949. cycle_time = iSEM.GetCycleTime();
  1950. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1951. //判断是否停止进程
  1952. if (key_stop)
  1953. {
  1954. log.Info("停止键按下", true);
  1955. return false;
  1956. }
  1957. #endregion
  1958. #region 获取两个位置上及放大倍数
  1959. //计算两个测量区域坐标
  1960. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1961. List<float> mag = new List<float>();
  1962. System.Drawing.Point ct0;
  1963. float mag1, mag2, magMax;
  1964. //log.Info("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1965. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  1966. string s="";
  1967. for (int i = 0; i < ct.Count; i++)
  1968. {
  1969. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  1970. + "放大倍数=" + mag[i];
  1971. }
  1972. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  1973. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1974. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  1975. "输入厂商" + m_measureFile.MParam.Firm.ToString()+
  1976. s+
  1977. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1978. #endregion
  1979. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1980. {
  1981. arg.State = true;
  1982. arg.Message = "获取位置及放大倍数成功";
  1983. SendMsg("1-34");
  1984. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1985. float xs = iSEM.GetBeamShiftX();
  1986. Thread.Sleep(200);
  1987. float ys = iSEM.GetBeamShiftY();
  1988. Thread.Sleep(200);
  1989. float xpCur = iSEM.GetStageAtX();
  1990. Thread.Sleep(200);
  1991. float ypCur = iSEM.GetStageAtY();
  1992. Thread.Sleep(200);
  1993. log.Info("测量线程:原来的光束偏移量x = " + xs.ToString()
  1994. + "y=" + ys.ToString() + ","
  1995. + "原来样品台的位置x= " + xpCur.ToString()
  1996. + "y=" + ypCur.ToString(), true);
  1997. #endregion
  1998. //找到放大倍数最大值
  1999. magMax = mag[0];
  2000. for (int m = 1; m < mag.Count; m++)
  2001. {
  2002. if (mag[m] > magMax)
  2003. {
  2004. magMax = mag[m];
  2005. }
  2006. }
  2007. #region 移动到梯形左上角
  2008. //20201127将视野移动到梯形左上角位置
  2009. MoveToPix(ct0.X, ct0.Y);
  2010. log.Info("测量线程:移动到对焦点( " + ct0.X.ToString()
  2011. + "," + ct0.Y.ToString() + ")", true);
  2012. //关闭自动亮度对比度
  2013. iSEM.SetAutoVideoOff();
  2014. Thread.Sleep(2000);
  2015. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2016. if (m_measureFile.MParam.SampleName == "3")
  2017. {
  2018. m_TempBrightness = 50f;
  2019. m_TempContrast = 29f;
  2020. iSEM.SetBrightness(m_TempBrightness); //50.0f
  2021. Thread.Sleep(200);
  2022. iSEM.SetContrast(m_TempContrast); //30.0f
  2023. Thread.Sleep(200);
  2024. }
  2025. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  2026. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  2027. if ( m_measureFile.MParam.SampleName == "3")
  2028. {
  2029. iSEM.SetReduced(402, 128, 480, 450);
  2030. }else
  2031. {
  2032. iSEM.SetReduced(402, 128, 480, 450);
  2033. }
  2034. Thread.Sleep(200);
  2035. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  2036. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2037. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  2038. Thread.Sleep(200);
  2039. cycle_time = iSEM.GetCycleTime();
  2040. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2041. //放大到6000倍
  2042. iSEM.SetMagnification(magMax / 2);
  2043. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2044. set = magMax / 2;
  2045. current = iSEM.GetMagnification();
  2046. while (Math.Abs(current - set) > 1)
  2047. {
  2048. iSEM.SetMagnification(set);
  2049. Thread.Sleep(200);
  2050. current = iSEM.GetMagnification();
  2051. }
  2052. log.Info("========测量线程:开始自动聚焦 "+set.ToString()+"倍", true);
  2053. if (m_measureFile.MParam.SampleName == "3")
  2054. {
  2055. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  2056. iSEM.SetBrightness(50.0f); //50.0f
  2057. Thread.Sleep(200);
  2058. iSEM.SetContrast(30.0f); //30.0f
  2059. Thread.Sleep(200);
  2060. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  2061. }
  2062. //自动对焦
  2063. if (!ImageFocus1(true))
  2064. {
  2065. log.Error("========测量线程:自动聚焦失败!"+ set.ToString() + "倍", false);
  2066. return false;
  2067. }
  2068. log.Info("========测量线程:自动聚焦成功!"+ set.ToString() + "倍", true);
  2069. ////自动消像散
  2070. //if (!ImageStig1())
  2071. //{
  2072. // return false;
  2073. //}
  2074. //放大到10000倍
  2075. iSEM.SetMagnification(magMax);
  2076. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2077. set = magMax;
  2078. current = iSEM.GetMagnification();
  2079. while (Math.Abs(current - set) > 1)
  2080. {
  2081. iSEM.SetMagnification(set);
  2082. Thread.Sleep(200);
  2083. current = iSEM.GetMagnification();
  2084. }
  2085. log.Info("========测量线程:开始自动聚焦 " + set.ToString() + "倍", true);
  2086. //自动对焦
  2087. if (!ImageFocus1(true))
  2088. {
  2089. log.Info("========测量线程:自动聚焦失败!" + set.ToString() + "倍", true);
  2090. return false;
  2091. }
  2092. log.Info("========测量线程:自动聚焦成功!" + set.ToString() + "倍", true);
  2093. ////自动消像散
  2094. //if (!ImageStig1())
  2095. //{
  2096. // return false;
  2097. //}
  2098. ////放大到20000倍
  2099. //iSEM.SetMagnification(magMax*2);
  2100. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2101. //set = magMax*2;
  2102. //current = iSEM.GetMagnification();
  2103. //while (Math.Abs(current - set) > 1)
  2104. //{
  2105. // iSEM.SetMagnification(set);
  2106. // Thread.Sleep(200);
  2107. // current = iSEM.GetMagnification();
  2108. //}
  2109. ////自动对焦
  2110. //if (!ImageFocus1())
  2111. //{
  2112. // return false;
  2113. //}
  2114. iSEM.CloseReduced();
  2115. Thread.Sleep(200);
  2116. cycle_time = iSEM.GetCycleTime();
  2117. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2118. #endregion
  2119. #region 循环拍照
  2120. for (int n = 0; n < ct.Count; n++)
  2121. {
  2122. #region 恢复到拍照的状态
  2123. iSEM.SetStageGotoX(xpCur);
  2124. while (true)
  2125. {
  2126. Thread.Sleep(4000);
  2127. if (iSEM.GetStageIs() == 0)
  2128. {
  2129. break;
  2130. }
  2131. }
  2132. iSEM.SetStageGotoY(ypCur);
  2133. while (true)
  2134. {
  2135. Thread.Sleep(4000);
  2136. if (iSEM.GetStageIs() == 0)
  2137. {
  2138. break;
  2139. }
  2140. }
  2141. //恢复原来的放大倍数
  2142. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  2143. {
  2144. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2145. return false;
  2146. }
  2147. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2148. set = m_measureFile.MParam.Photograph_Magnification;
  2149. current = iSEM.GetMagnification();
  2150. while (Math.Abs(current - set) > 1)
  2151. {
  2152. iSEM.SetMagnification(set);
  2153. Thread.Sleep(200);
  2154. current = iSEM.GetMagnification();
  2155. }
  2156. //恢复BeamShift的百分比值
  2157. iSEM.SetBeamShiftX(xs);
  2158. Thread.Sleep(200);
  2159. iSEM.SetBeamShiftY(ys);
  2160. Thread.Sleep(200);
  2161. #endregion
  2162. #region 移动到指定点位置
  2163. if (!MoveToPix(ct[n].X, ct[n].Y))
  2164. {
  2165. arg.State = false;
  2166. arg.Message = "移动到第一个点位置失败";
  2167. SendMsg("1-" + (35 + n).ToString());
  2168. //移动到第一个点失败
  2169. log.Error("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2170. }
  2171. log.Info("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2172. + "," + ct[n].Y.ToString() + ")", true);
  2173. #endregion
  2174. #region 如果是第一个点,则1W倍对焦
  2175. if (n == 0)
  2176. {
  2177. ////在第一个点上放大1W倍对焦
  2178. //if (!iSEM.SetMagnification(mag[n]))
  2179. //{
  2180. // log.Info("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2181. // return false;
  2182. //}
  2183. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2184. //while (true)
  2185. //{
  2186. // current = iSEM.GetMagnification();
  2187. // if (Math.Abs(current - mag[n]) < 1)
  2188. // {
  2189. // Thread.Sleep(200);
  2190. // break;
  2191. // }
  2192. // Thread.Sleep(200);
  2193. // iSEM.SetMagnification(set);
  2194. // Thread.Sleep(200);
  2195. //}
  2196. //if (m_measureFile.MParam.SampleName == "2")
  2197. //{
  2198. // //窗口对焦
  2199. // iSEM.SetReduced1(340, 1, 340, 256);
  2200. // Thread.Sleep(200);
  2201. // iSEM.CmdFocusRate();
  2202. // Thread.Sleep(200);
  2203. // cycle_time = iSEM.GetCycleTime();
  2204. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2205. // //自动对焦
  2206. // if (!ImageFocus1(false))
  2207. // {
  2208. // return false;
  2209. // }
  2210. // //恢复全屏
  2211. // iSEM.CloseReduced();
  2212. // Thread.Sleep(200);
  2213. // cycle_time = iSEM.GetCycleTime();
  2214. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2215. //}
  2216. //else
  2217. //{
  2218. // //窗口对焦
  2219. // //iSEM.SetReduced(402, 128, 800, 600);
  2220. // //Thread.Sleep(200);
  2221. // iSEM.CmdFocusRate();
  2222. // Thread.Sleep(200);
  2223. // cycle_time = iSEM.GetCycleTime();
  2224. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2225. // //自动对焦
  2226. // if (!ImageFocus1(false))
  2227. // {
  2228. // return false;
  2229. // }
  2230. // //恢复全屏
  2231. // //iSEM.CloseReduced();
  2232. // //Thread.Sleep(200);
  2233. // cycle_time = iSEM.GetCycleTime();
  2234. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2235. //}
  2236. log.Info("========测量线程:进入内部观察,不对焦!", true);
  2237. //增亮图像
  2238. iSEM.SetAutoVideoOff();
  2239. Thread.Sleep(200);
  2240. float currentBright = iSEM.GetBrightness();
  2241. Thread.Sleep(200);
  2242. float currentContrast = iSEM.GetContrast();
  2243. Thread.Sleep(200);
  2244. //add by sun 2020-12-17 黄工觉得太亮
  2245. int m_BrightMore = 2;
  2246. int m_ContrastMore = 2;
  2247. if (m_measureFile.MParam.SampleName == "3")
  2248. {
  2249. m_BrightMore = 0;
  2250. m_ContrastMore = 0;
  2251. }
  2252. //add by sun 2020-12-17 黄工觉得太亮 end
  2253. iSEM.SetBrightness(currentBright + m_BrightMore);
  2254. Thread.Sleep(200);
  2255. iSEM.SetContrast(currentContrast + m_ContrastMore);
  2256. Thread.Sleep(200);
  2257. }
  2258. #endregion
  2259. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  2260. //if((m_measureFile.MParam.SampleName=="3")&&(n==0))
  2261. //{
  2262. // if (!GetImageFromSEM(mag[n]/2))
  2263. // log.Info("测量线程报错:第一个区域放大一半倍数" + (mag[n]/2).ToString() + "控制失败", true);
  2264. //}
  2265. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  2266. #region 拍照
  2267. if (!iSEM.SetMagnification(mag[n]))
  2268. {
  2269. arg.State = false;
  2270. arg.Message = "移动到第一个点位置拍照失败";
  2271. SendMsg("1-35");
  2272. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2273. return false;
  2274. }
  2275. log.Info("========测量线程:移动到第一个点位置拍照完成!", true);
  2276. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2277. set = mag[n];
  2278. current = iSEM.GetMagnification();
  2279. while (Math.Abs(current - set) > 1)
  2280. {
  2281. iSEM.SetMagnification(set);
  2282. Thread.Sleep(200);
  2283. current = iSEM.GetMagnification();
  2284. }
  2285. //获取像素大小
  2286. lsize.Add(iSEM.GetPixelSize());
  2287. Thread.Sleep(200);
  2288. //String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2289. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  2290. String fileName7 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag[n].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + n.ToString() + "-" + ImageNameTwo_1;
  2291. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  2292. log.Info("fileName7====================" + fileName7, true);
  2293. arg.Picture_Information.Picture_FullPath = fileName7;
  2294. arg.Picture_Information.Work_Status = "SEM";
  2295. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2296. Thread.Sleep(200);
  2297. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2298. Thread.Sleep(200);
  2299. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2300. Thread.Sleep(200);
  2301. //拍照前改变速度,延时
  2302. iSEM.CmdLineScan();
  2303. Thread.Sleep(200);
  2304. cycle_time = iSEM.GetCycleTime();
  2305. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2306. if (!GetImage(fileName7))
  2307. {
  2308. arg.State = false;
  2309. arg.Message = "移动到第一个点位置失败";
  2310. SendMsg("1-35");
  2311. log.Error("测量线程报错:" + arg.Message, false);
  2312. return false;
  2313. }
  2314. log.Info("========测量线程:移动到第一个点位置完成!", true);
  2315. iSEM.CmdPixelScan();
  2316. Thread.Sleep(200);
  2317. limg_path.Add(fileName7);
  2318. arg.Picture_Information.Picture_FullPath = fileName7;
  2319. arg.State = true;
  2320. arg.Message = "移动到第一个点位置拍照成功";
  2321. SendMsg("1-35");
  2322. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2323. Thread.Sleep(200);
  2324. cycle_time = iSEM.GetCycleTime();
  2325. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2326. // add by zjx 在测量图上显示放大倍数和像素大小等信息
  2327. float size = iSEM.GetPixelSize();
  2328. SaveMeasDataPic(fileName7,mag[n], size);
  2329. // add by zjx 在测量图上显示放大倍数和像素大小等信息 end
  2330. #endregion
  2331. }
  2332. #endregion
  2333. if (hand_intervene == 1)
  2334. {
  2335. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2336. }
  2337. }
  2338. else
  2339. {
  2340. if (hand_intervene == 1)
  2341. {
  2342. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2343. {
  2344. // return false;
  2345. }
  2346. }
  2347. else
  2348. {
  2349. //return false;
  2350. }
  2351. arg.State = false;
  2352. arg.Message = "获取位置及放大倍数失败";
  2353. SendMsg("1-34");
  2354. log.Error("测量线程报错:" + arg.Message, false);
  2355. }
  2356. //判断是否停止进程
  2357. if (key_stop)
  2358. {
  2359. log.Info("停止键按下", true);
  2360. return false;
  2361. }
  2362. }
  2363. ////14光束复位和Rotation关闭开关
  2364. //arg.Message = "光束复位成功";
  2365. //arg.State = true;
  2366. //SendMsg("1-36");
  2367. iSEM.SetTiltAngleOff();
  2368. Thread.Sleep(200);
  2369. iSEM.SetScanRotationOff();
  2370. Thread.Sleep(200);
  2371. iSEM.SetBeamShiftX(0);
  2372. Thread.Sleep(200);
  2373. iSEM.SetBeamShiftY(0);
  2374. Thread.Sleep(200);
  2375. //判断是否停止进程
  2376. if (key_stop)
  2377. {
  2378. return false;
  2379. }
  2380. return true;
  2381. }
  2382. //第一个孔的测试过程
  2383. public bool FirstHole()
  2384. {
  2385. // add by zjx 2020-12-18 为了测试只做能谱部分
  2386. if (m_measureFile.MParam.IsonlyEDSForDebug == true)
  2387. {
  2388. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2389. log.Warn("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2390. if (!SetVoltageAndIPROBE())
  2391. {
  2392. log.Error("测量线程:第一孔=====设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", false);
  2393. return false;
  2394. }
  2395. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2396. //设置拉直的放大倍数
  2397. log.Info("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), true);
  2398. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2399. {
  2400. log.Error("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), false);
  2401. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2402. arg.State = false;
  2403. SendMsg("1-1");
  2404. return false;
  2405. }
  2406. float current = iSEM.GetMagnification();
  2407. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2408. {
  2409. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2410. Thread.Sleep(200);
  2411. current = iSEM.GetMagnification();
  2412. }
  2413. arg.Message = "拉直放大倍数设置成功!";
  2414. arg.State = true;
  2415. SendMsg("1-1");
  2416. Thread.Sleep(2000);
  2417. //自动化流程-每个点都需要补偿54度
  2418. if (m_measureFile.MParam.Is_Photograph == false)
  2419. {
  2420. log.Info("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2421. if (!TiltCorrection(54.0f))
  2422. {
  2423. log.Error("测量线程报错:倾斜补偿角度为54度失败", false);
  2424. arg.Message = "角度补偿54度失败!";
  2425. arg.State = false;
  2426. SendMsg("1-2");
  2427. return false;
  2428. }
  2429. arg.Message = "角度补偿54度成功!";
  2430. arg.State = true;
  2431. SendMsg("1-2");
  2432. Thread.Sleep(1000);
  2433. //判断是否停止进程
  2434. if (key_stop)
  2435. {
  2436. log.Info("停止键按下", true);
  2437. return false;
  2438. }
  2439. }
  2440. // 2是5/6类样品,不需要拉直
  2441. if (m_measureFile.MParam.SampleName != "2")
  2442. {
  2443. log.Warn("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2444. if (!Straighten_Handle())
  2445. {
  2446. log.Info("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2447. return false;
  2448. }
  2449. log.Info("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2450. //判断是否停止进程
  2451. if (key_stop)
  2452. {
  2453. log.Info("停止键按下。", true);
  2454. return false;
  2455. }
  2456. }
  2457. else
  2458. {
  2459. arg.Message = "拉直操作自动对焦成功!";
  2460. arg.State = true;
  2461. SendMsg("1-3");
  2462. Thread.Sleep(1000);
  2463. arg.Message = "拉直拍照成功!";
  2464. arg.Picture_Information.Picture_FullPath = "";
  2465. arg.State = true;
  2466. SendMsg("1-4");
  2467. Thread.Sleep(1000);
  2468. arg.Message = "拉直操作完成";
  2469. arg.State = true;
  2470. SendMsg("1-5");
  2471. Thread.Sleep(1000);
  2472. }
  2473. //13. 自动 定位功能
  2474. log.Warn("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2475. if (!GetPoistion())
  2476. {
  2477. log.Error("测量线程报错:自动定位失败,程序退出。", false);
  2478. return false;
  2479. }
  2480. log.Info("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2481. //判断是否停止进程
  2482. if (key_stop)
  2483. {
  2484. log.Info("停止键按下。", true);
  2485. return false;
  2486. }
  2487. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2488. if (m_measureFile.MParam.Is_Photograph == false)
  2489. {
  2490. if (m_measureFile.MParam.IsCutingForDebug)
  2491. {
  2492. log.Warn("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!==" + m_measureFile.MParam.IsCutingForDebug, true);
  2493. if (!FIBCross())
  2494. {
  2495. log.Error("测量线程报错:自动控制FIB切割失败。", false);
  2496. return false;
  2497. }
  2498. log.Info("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2499. }
  2500. }
  2501. //del by sun 2020-12-15 temp end
  2502. //判断是否停止进程
  2503. if (key_stop)
  2504. {
  2505. return false;
  2506. }
  2507. //16.找到切割位置
  2508. if (m_measureFile.MParam.Is_Photograph == false)
  2509. {
  2510. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2511. if (!FindCross())
  2512. {
  2513. return false;
  2514. }
  2515. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2516. //判断是否停止进程
  2517. if (key_stop)
  2518. {
  2519. return false;
  2520. }
  2521. }
  2522. log.Warn("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2523. //将过程17最后的拍照图片提出给18步进行调用
  2524. List<String> limg_path = new List<string>();
  2525. List<float> lsize = new List<float>();
  2526. //17.自动控制SEM拍截面照
  2527. if (!ShotSection(ref limg_path, ref lsize))
  2528. {
  2529. log.Error("拍截面照失败!");
  2530. return false;
  2531. }
  2532. log.Info("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2533. //判断是否停止进程
  2534. if (key_stop)
  2535. {
  2536. return false;
  2537. }
  2538. //这段是临时的
  2539. //arg.State = true;
  2540. //arg.Message = "测量尺寸成功";
  2541. //SendMsg("1-40");
  2542. //18.自动层高分析
  2543. if (m_measureFile.MParam.Is_Photograph == false)
  2544. {
  2545. log.Warn("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2546. float size = iSEM.GetPixelSize();
  2547. int state = 1;
  2548. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2549. if (state == 0)
  2550. {
  2551. arg.Message = "测量尺寸失败";
  2552. arg.State = false;
  2553. SendMsg("1-40");
  2554. return false;
  2555. }
  2556. arg.State = true;
  2557. arg.Message = "测量尺寸成功";
  2558. SendMsg("1-40");
  2559. log.Info("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2560. }
  2561. }
  2562. //add by zjx 2020-12-18 为了测试只做能谱部分 end
  2563. //19.能谱分析
  2564. if (m_measureFile.MParam.EDS)
  2565. {
  2566. log.Warn("测量线程:第一个孔的测试过程-19.能谱分析开始===" + m_measureFile.MParam.EDS, true);
  2567. EDS_Analysis();
  2568. log.Info("测量线程:第一个孔的测试过程-19.能谱分析结束===" + m_measureFile.MParam.EDS, true);
  2569. }
  2570. //20.复位
  2571. log.Info("===========测量线程:20.复位开始", true);
  2572. BeamShiftReset();
  2573. return true;
  2574. }
  2575. //非第一个孔的测试过程
  2576. public bool OtherHole()
  2577. {
  2578. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2579. log.Warn("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2580. if (!SetVoltageAndIPROBE())
  2581. {
  2582. log.Error("测量线程:非第一孔==设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", false);
  2583. return false;
  2584. }
  2585. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2586. //设置拉直的放大倍数
  2587. log.Info("设置拉直放大倍数!");
  2588. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2589. {
  2590. log.Error("拉直放大倍数设置失败,程序退出。", false);
  2591. arg.Message = "拉直放大倍数设置失败!";
  2592. arg.State = false;
  2593. SendMsg("1-1");
  2594. return false;
  2595. }
  2596. float current = iSEM.GetMagnification();
  2597. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2598. {
  2599. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2600. Thread.Sleep(200);
  2601. current = iSEM.GetMagnification();
  2602. }
  2603. arg.Message = "拉直放大倍数设置成功!";
  2604. arg.State = true;
  2605. SendMsg("1-1");
  2606. Thread.Sleep(2000);
  2607. //自动化流程-每个点都需要补偿54度
  2608. if (m_measureFile.MParam.Is_Photograph == false)
  2609. {
  2610. log.Info("角度补偿54度!");
  2611. if (!TiltCorrection(54.0f))
  2612. {
  2613. arg.Message = "角度补偿54度失败!";
  2614. arg.State = false;
  2615. SendMsg("1-2");
  2616. return false;
  2617. }
  2618. arg.Message = "角度补偿54度成功!";
  2619. arg.State = true;
  2620. SendMsg("1-2");
  2621. Thread.Sleep(2000);
  2622. //判断是否停止进程
  2623. if (key_stop)
  2624. {
  2625. return false;
  2626. }
  2627. }
  2628. if (m_measureFile.MParam.SampleName != "2")
  2629. {
  2630. log.Warn("开始进行拉直操作!");
  2631. if (!Straighten_Handle())
  2632. {
  2633. log.Info("测量线程报错:拉直操作失败。", true);
  2634. return false;
  2635. }
  2636. //判断是否停止进程
  2637. if (key_stop)
  2638. {
  2639. log.Info("停止键按下。", true);
  2640. return false;
  2641. }
  2642. }
  2643. else
  2644. {
  2645. arg.Message = "拉直操作自动对焦成功!";
  2646. arg.State = true;
  2647. SendMsg("1-3");
  2648. Thread.Sleep(1000);
  2649. arg.Message = "拉直拍照成功!";
  2650. arg.Picture_Information.Picture_FullPath = "";
  2651. arg.State = true;
  2652. SendMsg("1-4");
  2653. Thread.Sleep(1000);
  2654. arg.Message = "拉直操作完成";
  2655. arg.State = true;
  2656. SendMsg("1-5");
  2657. }
  2658. //13. 自动 定位功能
  2659. log.Info("开始进行自动定位!");
  2660. if (!GetPoistion())
  2661. {
  2662. return false;
  2663. }
  2664. //判断是否停止进程
  2665. if (key_stop)
  2666. {
  2667. return false;
  2668. }
  2669. //14.自动控制FIB切割
  2670. if (m_measureFile.MParam.Is_Photograph == false)
  2671. {
  2672. log.Warn("开始进行FIB切割!");
  2673. if (!FIBCross())
  2674. {
  2675. return false;
  2676. }
  2677. }
  2678. //判断是否停止进程
  2679. if (key_stop)
  2680. {
  2681. return false;
  2682. }
  2683. // 16.找到切割位置
  2684. if (m_measureFile.MParam.Is_Photograph == false)
  2685. {
  2686. log.Warn("开始找切割位置!");
  2687. if (!FindCross())
  2688. {
  2689. return false;
  2690. }
  2691. //判断是否停止进程
  2692. if (key_stop)
  2693. {
  2694. return false;
  2695. }
  2696. }
  2697. //将过程17最后的拍照图片提出给18步进行调用
  2698. List<String> limg_path = new List<string>();
  2699. List<float> lsize = new List<float>();
  2700. //17.自动控制SEM拍截面照
  2701. log.Warn("开始控制SEM拍截面照!");
  2702. if (!ShotSection(ref limg_path, ref lsize))
  2703. {
  2704. //return false;
  2705. }
  2706. //判断是否停止进程
  2707. if (key_stop)
  2708. {
  2709. return false;
  2710. }
  2711. //这段是临时的
  2712. //arg.State = true;
  2713. //arg.Message = "测量尺寸成功";
  2714. //SendMsg("1-40");
  2715. //18.自动层高分析
  2716. if (m_measureFile.MParam.Is_Photograph == false)
  2717. {
  2718. log.Warn("开始进行层高分析!");
  2719. float size = iSEM.GetPixelSize();
  2720. int state = 1;
  2721. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2722. if (state == 0)
  2723. {
  2724. arg.Message = "测量尺寸失败";
  2725. arg.State = false;
  2726. SendMsg("1-40");
  2727. return false;
  2728. }
  2729. arg.State = true;
  2730. arg.Message = "测量尺寸成功";
  2731. SendMsg("1-40");
  2732. }
  2733. //19.能谱分析
  2734. if (m_measureFile.MParam.EDS)
  2735. {
  2736. log.Warn("开始进行能谱分析!");
  2737. EDS_Analysis();
  2738. }
  2739. //20.复位 del by sun 2020-12-15
  2740. //BeamShiftReset();
  2741. //del by sun 2020-12-15 end
  2742. return true;
  2743. }
  2744. //测试完第一个孔后的样品台初始化操作。
  2745. //再调用CommonWork执行非第一个孔的测试过程
  2746. public bool OtherHole_Init()
  2747. {
  2748. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2749. #region 初始化
  2750. //1、不只拍照,且不是倾斜观测,则移动T轴
  2751. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Tilt == false)
  2752. {
  2753. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2754. if (!iSEM.SetStageGotoT(0))
  2755. {
  2756. log.Error("样品台归零失败", false);
  2757. return false;
  2758. }
  2759. while (true)
  2760. {
  2761. Thread.Sleep(5000);
  2762. if (iSEM.GetStageIs() == 0)
  2763. {
  2764. break;
  2765. }
  2766. }
  2767. //判断是否停止进程
  2768. if (key_stop)
  2769. {
  2770. log.Info("停止键按下", true);
  2771. return false;
  2772. }
  2773. }
  2774. //2、如果是倾斜观测,则移动Z轴
  2775. if(m_measureFile.MParam.Tilt==true)
  2776. {
  2777. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2778. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_measureFile.MParam.ZDistance/1000))
  2779. //20201109, Z轴降到安全的位置上
  2780. if(!iSEM.SetStageGotoZ(fSateyZ))
  2781. {
  2782. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2783. return false;
  2784. }
  2785. while (true)
  2786. {
  2787. Thread.Sleep(5000);
  2788. if (iSEM.GetStageIs() == 0)
  2789. {
  2790. break;
  2791. }
  2792. }
  2793. //判断是否停止进程
  2794. if (key_stop)
  2795. {
  2796. log.Info("停止键按下", true);
  2797. return false;
  2798. }
  2799. }
  2800. //3. 根据光镜坐标控制样品台移动
  2801. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2802. {
  2803. //SendMsg("移动失败");
  2804. log.Error("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2805. return false;
  2806. }
  2807. log.Info("移动R轴到="+ currentHole.Position.R.ToString(), true);
  2808. while (true)
  2809. {
  2810. Thread.Sleep(5000);
  2811. if (iSEM.GetStageIs() == 0)
  2812. {
  2813. break;
  2814. }
  2815. }
  2816. //判断是否停止进程
  2817. if (key_stop)
  2818. {
  2819. log.Info("停止键按下", true);
  2820. return false;
  2821. }
  2822. if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2823. {
  2824. //SendMsg("移动失败");
  2825. log.Error("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString()+"," +currentHole.Position.X.ToString()+")", false);
  2826. return false;
  2827. }
  2828. log.Info("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2829. while (true)
  2830. {
  2831. Thread.Sleep(10000);
  2832. if (iSEM.GetStageIs() == 0)
  2833. {
  2834. break;
  2835. }
  2836. }
  2837. //判断是否停止进程
  2838. if (key_stop)
  2839. {
  2840. log.Info("停止键按下", true);
  2841. return false;
  2842. }
  2843. //4、倾斜观测时恢复Z轴
  2844. if (m_measureFile.MParam.Tilt == true)
  2845. {
  2846. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2847. if (currentHole.Position.Z > 0.043)
  2848. {
  2849. log.Error("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2850. return false;
  2851. }
  2852. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2853. {
  2854. log.Error("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2855. return false;
  2856. }
  2857. while (true)
  2858. {
  2859. Thread.Sleep(5000);
  2860. if (iSEM.GetStageIs() == 0)
  2861. {
  2862. break;
  2863. }
  2864. }
  2865. //判断是否停止进程
  2866. if (key_stop)
  2867. {
  2868. log.Info("停止键按下", true);
  2869. return false;
  2870. }
  2871. }
  2872. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2873. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Tilt == false)
  2874. {
  2875. if (!iSEM.SetStageGotoT(54))
  2876. {
  2877. log.Info("测量线程报错:校正54度有误", true);
  2878. return false;
  2879. }
  2880. while (true)
  2881. {
  2882. Thread.Sleep(5000);
  2883. if (iSEM.GetStageIs() == 0)
  2884. {
  2885. break;
  2886. }
  2887. }
  2888. }
  2889. //判断是否停止进程
  2890. if (key_stop)
  2891. {
  2892. log.Info("停止键按下", true);
  2893. return false;
  2894. }
  2895. //4、设置WD
  2896. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2897. Thread.Sleep(1000);
  2898. #endregion
  2899. return true;
  2900. }
  2901. //初始化拉直操作
  2902. public bool Straighten_Handle()
  2903. {
  2904. if (m_measureFile.MParam.Tilt)
  2905. {
  2906. //倾斜样品台,SEM视野是黑色的
  2907. log.Info("测量线程:恢复到工作位置后重新调亮图像。", true);
  2908. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2909. {
  2910. log.Error("测量线程报错:重新设置到标准工作距离失败。", false);
  2911. return false;
  2912. }
  2913. Thread.Sleep(7000); //自动亮度对比度使用
  2914. }
  2915. //1、自动对焦
  2916. log.Info("测量线程报错:拉直操作前自动对焦开始", true);
  2917. iSEM.SetReduced(402, 128, 400, 400);
  2918. Thread.Sleep(200);
  2919. //add by sun 2020-12-15
  2920. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2921. //add by sun 2020-12-15 end
  2922. Thread.Sleep(200);
  2923. cycle_time = iSEM.GetCycleTime();
  2924. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2925. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2926. float m_TempBrightness = 50.0f;
  2927. float m_TempContrast = 30.0f;
  2928. if (m_measureFile.MParam.SampleName == "3")
  2929. {
  2930. m_TempBrightness = 48.0f;
  2931. m_TempContrast = 29.0f;
  2932. }
  2933. //add by sun 2020-12-18 解决1(3\4)类样品拉直太白造成无法拉直问题
  2934. if (m_measureFile.MParam.SampleName == "1")
  2935. {
  2936. m_TempBrightness = 50.0f;
  2937. m_TempContrast = 29.0f;
  2938. }
  2939. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2940. iSEM.SetAutoVideoOff();
  2941. Thread.Sleep(200);
  2942. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2943. Thread.Sleep(200);
  2944. iSEM.SetContrast(m_TempContrast);//30.0f
  2945. Thread.Sleep(200);
  2946. if (!ImageFocus1(false))
  2947. {
  2948. log.Error("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2949. arg.Message = "拉直操作自动对焦失败!";
  2950. arg.State = false;
  2951. SendMsg("1-3");
  2952. return false;
  2953. }
  2954. iSEM.CloseReduced();
  2955. Thread.Sleep(200);
  2956. cycle_time = iSEM.GetCycleTime();
  2957. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2958. iSEM.SetAutoVideoBrightnessAndContrast();
  2959. Thread.Sleep(5000);
  2960. arg.Message = "拉直操作自动对焦成功!";
  2961. arg.State = true;
  2962. SendMsg("1-3");
  2963. //判断是否停止进程
  2964. if (key_stop)
  2965. {
  2966. log.Info("停止键按下。", true);
  2967. return false;
  2968. }
  2969. //2、拍张照片
  2970. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2971. log.Info("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2972. //拍照前改变速度,延时
  2973. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2974. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2975. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2976. Thread.Sleep(200);
  2977. cycle_time = iSEM.GetCycleTime();
  2978. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2979. if (!GetImage(fileName0))
  2980. {
  2981. log.Error("测量线程报错:拉直拍照失败", false);
  2982. arg.Message = "拉直拍照失败";
  2983. arg.State = false;
  2984. SendMsg("1-4");
  2985. return false;
  2986. }
  2987. arg.Message = "拉直拍照成功!";
  2988. arg.Picture_Information.Picture_FullPath = fileName0;
  2989. arg.State = true;
  2990. SendMsg("1-4");
  2991. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2992. Thread.Sleep(200);
  2993. cycle_time = iSEM.GetCycleTime();
  2994. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2995. //3、华为接口,获取旋转角度
  2996. float degree = 0;
  2997. int direction = 0;
  2998. int state = 1;
  2999. wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  3000. log.Info("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  3001. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  3002. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  3003. if (state == 0)
  3004. {
  3005. log.Info("测量线程:图像处理接口参数state返回为零" ,false);
  3006. arg.Message = "图像处理接口参数state返回为零";
  3007. arg.State = false;
  3008. SendMsg("1-5");
  3009. if (hand_intervene == 1)
  3010. {
  3011. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  3012. {
  3013. return false;
  3014. }
  3015. }
  3016. else
  3017. {
  3018. return false;
  3019. }
  3020. return false;
  3021. }
  3022. if (direction == 2)
  3023. {
  3024. degree = -degree;
  3025. }
  3026. if (degree != 0)
  3027. {
  3028. //4、拉直,旋转R轴
  3029. log.Info("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  3030. //选择之前,先降Z轴
  3031. float Zpos = iSEM.GetStageAtZ();
  3032. Thread.Sleep(200);
  3033. log.Info("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  3034. if (!iSEM.SetStageGotoZ(fSateyZ))
  3035. {
  3036. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  3037. return false;
  3038. }
  3039. while (true)
  3040. {
  3041. Thread.Sleep(4000);
  3042. if (iSEM.GetStageIs() == 0)
  3043. {
  3044. break;
  3045. }
  3046. }
  3047. //判断是否停止进程
  3048. if (key_stop)
  3049. {
  3050. log.Info("停止键按下", true);
  3051. return false;
  3052. }
  3053. iSEM.SetStageDeltaR(degree);
  3054. while (true)
  3055. {
  3056. Thread.Sleep(4000);
  3057. if (iSEM.GetStageIs() == 0)
  3058. {
  3059. break;
  3060. }
  3061. }
  3062. if (!iSEM.SetStageGotoZ(Zpos))
  3063. {
  3064. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  3065. return false;
  3066. }
  3067. while (true)
  3068. {
  3069. Thread.Sleep(4000);
  3070. if (iSEM.GetStageIs() == 0)
  3071. {
  3072. break;
  3073. }
  3074. }
  3075. //判断是否停止进程
  3076. if (key_stop)
  3077. {
  3078. log.Info("停止键按下", true);
  3079. return false;
  3080. }
  3081. //4、设置WD
  3082. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3083. Thread.Sleep(1000);
  3084. }
  3085. arg.Message = "拉直操作完成";
  3086. arg.State = true;
  3087. SendMsg("1-5");
  3088. return true;
  3089. }
  3090. //角度补偿
  3091. public bool TiltCorrection(float a_fAngle)
  3092. {
  3093. if (!iSEM.SetTiltAngleOn())
  3094. {
  3095. return false;
  3096. }
  3097. Thread.Sleep(200);
  3098. //恢复原始状态
  3099. if (!iSEM.SetTiltAngle(a_fAngle))
  3100. {
  3101. return false;
  3102. }
  3103. return true;
  3104. }
  3105. //拍图
  3106. public bool GetImage(String a_fileName)
  3107. {
  3108. log.Info("获取分辨率开始!", true);
  3109. //3. 获取分辨率
  3110. int[] ImageSize = iSEM.GetImageStore();
  3111. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3112. {
  3113. return false;
  3114. }
  3115. short width = (short)ImageSize[0];
  3116. short height = (short)ImageSize[1];
  3117. log.Info("获取分辨率结束!"+ a_fileName +"===="+ width+ "*"+height, true);
  3118. //4. 抓图
  3119. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  3120. {
  3121. log.Info("抓图失败!", true);
  3122. return false;
  3123. }
  3124. return true;
  3125. }
  3126. //拍图1
  3127. public bool GetImage1(String a_fileName)
  3128. {
  3129. //3. 获取分辨率
  3130. int[] ImageSize = iSEM.GetImageStore();
  3131. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3132. {
  3133. return false;
  3134. }
  3135. short width = (short)ImageSize[0];
  3136. short height = (short)ImageSize[1];
  3137. //4. 抓图
  3138. if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
  3139. {
  3140. return false;
  3141. }
  3142. return true;
  3143. }
  3144. #region 算法设计
  3145. //执行自动对焦
  3146. public bool ImageFocus()
  3147. {
  3148. if (m_measureFile.MParam.FocusMode == 1)//手动
  3149. {
  3150. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3151. {
  3152. }
  3153. else
  3154. {
  3155. return false;
  3156. }
  3157. }
  3158. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3159. {
  3160. //郝工增加自动对焦算法
  3161. //处理文件夹
  3162. if (Directory.Exists(focus_path))
  3163. {
  3164. Directory.Delete(focus_path, true);
  3165. }
  3166. Thread.Sleep(3000);
  3167. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3168. Thread.Sleep(1000);
  3169. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3170. Thread.Sleep(1000);
  3171. //再创建文件夹
  3172. Directory.CreateDirectory(focus_path);
  3173. //1、对焦参数类,2、输出工作距离
  3174. int wd = 0;
  3175. //20201015 根据当前的工作距离重新计算对焦位置
  3176. float currentWd = iSEM.GetWorkingDistance();
  3177. //m_measureFile.MParam.AutoFocus.UP = currentWd * 1000000 - m_measureFile.MParam.AutoFocus.Step;
  3178. //m_measureFile.MParam.AutoFocus.Down = currentWd * 1000000 + m_measureFile.MParam.AutoFocus.Step;
  3179. Thread.Sleep(2000);
  3180. float currentMag = iSEM.GetMagnification();
  3181. Thread.Sleep(2000);
  3182. FocusParam pFoucs = new FocusParam();
  3183. if (currentMag <= m_measureFile.MParam.Photograph_Magnification)
  3184. {
  3185. pFoucs = m_measureFile.MParam.AutoFocus;
  3186. pFoucs.UP = 5050;
  3187. pFoucs.Down = 5150;
  3188. pFoucs.Step = 50;
  3189. pFoucs.fStep = 10;
  3190. pFoucs.Range = 50;
  3191. //4、设置WD
  3192. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3193. Thread.Sleep(1000);
  3194. }
  3195. else
  3196. {
  3197. pFoucs = m_measureFile.MParam.AutoFocus;
  3198. pFoucs.UP = 5000;
  3199. pFoucs.Down = 5200;
  3200. pFoucs.Step = 10;
  3201. pFoucs.fStep = 5;
  3202. pFoucs.Range = 50;
  3203. //4、设置WD
  3204. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3205. Thread.Sleep(1000);
  3206. }
  3207. //log.Info("修改对焦参数", true);
  3208. AutoFocus(pFoucs, out wd);
  3209. log.Info("自动调节算法输出"+ (wd * 0.00000001).ToString(), true);
  3210. //设置工作距离
  3211. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  3212. //设置完工作距离后必须延迟5秒
  3213. Thread.Sleep(5000);
  3214. //处理图片位置
  3215. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3216. }
  3217. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3218. {
  3219. //后期和客户对接接口
  3220. List<string> filenames = new List<string>();
  3221. String retfilename = wr.Img_Auto_Focus(filenames);
  3222. }
  3223. else //蔡司自动对焦
  3224. {
  3225. iSEM.CmdAutoFocusCoarse();
  3226. while (true)
  3227. {
  3228. Thread.Sleep(10000);
  3229. if (0 == iSEM.GetAutoFunction())
  3230. {
  3231. break;
  3232. }
  3233. }
  3234. iSEM.CmdAutoFocusFine();
  3235. while (true)
  3236. {
  3237. Thread.Sleep(10000);
  3238. if (0 == iSEM.GetAutoFunction())
  3239. {
  3240. break;
  3241. }
  3242. }
  3243. }
  3244. return true;
  3245. }
  3246. //执行自动对焦
  3247. public bool ImageFocus1(Boolean Is_Stig)
  3248. {
  3249. if (m_measureFile.MParam.FocusMode == 1)//手动
  3250. {
  3251. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3252. {
  3253. }
  3254. else
  3255. {
  3256. return false;
  3257. }
  3258. }
  3259. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3260. {
  3261. #region 执行蔡司自动对焦程序
  3262. //服务地址
  3263. string snumstr = @"http://192.168.1.101:8123";
  3264. // 调用方法;只对焦不消像散
  3265. if (Is_Stig)
  3266. {
  3267. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);
  3268. if (focusstig != "success")
  3269. {
  3270. log.Error("对焦失败" + focusstig , false);
  3271. return false;
  3272. }
  3273. }
  3274. else
  3275. {
  3276. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);
  3277. if (onlyfocus != "success")
  3278. {
  3279. return false;
  3280. }
  3281. }
  3282. #endregion
  3283. }
  3284. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3285. {
  3286. //后期和客户对接接口
  3287. List<string> filenames = new List<string>();
  3288. String retfilename = wr.Img_Auto_Focus(filenames);
  3289. }
  3290. else //蔡司自动对焦
  3291. {
  3292. iSEM.CmdAutoFocusCoarse();
  3293. while (true)
  3294. {
  3295. Thread.Sleep(10000);
  3296. if (0 == iSEM.GetAutoFunction())
  3297. {
  3298. break;
  3299. }
  3300. }
  3301. iSEM.CmdAutoFocusFine();
  3302. while (true)
  3303. {
  3304. Thread.Sleep(10000);
  3305. if (0 == iSEM.GetAutoFunction())
  3306. {
  3307. break;
  3308. }
  3309. }
  3310. }
  3311. return true;
  3312. }
  3313. //执行自动消像散
  3314. public bool ImageStig()
  3315. {
  3316. if (m_measureFile.MParam.FocusMode == 1)//手动
  3317. {
  3318. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3319. {
  3320. }
  3321. else
  3322. {
  3323. return false;
  3324. }
  3325. }
  3326. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3327. {
  3328. //郝工增加自动对焦算法
  3329. //处理文件夹
  3330. if (Directory.Exists(StigX_path))
  3331. {
  3332. Directory.Delete(StigX_path, true);
  3333. }
  3334. Thread.Sleep(3000);
  3335. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3336. Thread.Sleep(1000);
  3337. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3338. Thread.Sleep(1000);
  3339. //再创建文件夹
  3340. Directory.CreateDirectory(StigX_path);
  3341. //1、对焦参数类,2、输出像散值
  3342. int stigX = 0;
  3343. //根据当前的stigX重新计算像散值
  3344. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3345. //m_measureFile.MParam.AutoStigX.Step = 10; //像散的步长为10
  3346. //m_measureFile.MParam.AutoStigX.UP = currentStigX - m_measureFile.MParam.AutoStigX.Step;
  3347. //m_measureFile.MParam.AutoStigX.Down = currentStigX + m_measureFile.MParam.AutoStigX.Step;
  3348. //设置工作距离
  3349. iSEM.SetAstigmatismX((float)0);
  3350. //设置完工作距离后必须延迟5秒
  3351. Thread.Sleep(5000);
  3352. //log.Info("修改消像散参数", true);
  3353. AutoStig(m_measureFile.MParam.AutoStigX, out stigX);
  3354. log.Info("自动消散算法输出X"+ (stigX * 0.01).ToString(), true);
  3355. //设置工作距离
  3356. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3357. //设置完工作距离后必须延迟5秒
  3358. Thread.Sleep(5000);
  3359. //处理图片位置
  3360. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3361. //处理文件夹
  3362. if (Directory.Exists(StigY_path))
  3363. {
  3364. Directory.Delete(StigY_path, true);
  3365. }
  3366. Thread.Sleep(3000);
  3367. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3368. Thread.Sleep(1000);
  3369. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3370. Thread.Sleep(1000);
  3371. //再创建文件夹
  3372. Directory.CreateDirectory(StigY_path);
  3373. //1、对焦参数类,2、输出像散值
  3374. int stigY = 0;
  3375. //根据当前的stigX重新计算像散值
  3376. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3377. //m_measureFile.MParam.AutoStigY.Step = 10; //像散的步长为10
  3378. //m_measureFile.MParam.AutoStigY.UP = m_measureFile.MParam.AutoStigY.;
  3379. //m_measureFile.MParam.AutoStigY.Down = m_measureFile.MParam.AutoStigY.Step;
  3380. iSEM.SetAstigmatismY((float)0);
  3381. Thread.Sleep(2000);
  3382. log.Info("修改消像散参数", true);
  3383. AutoStig(m_measureFile.MParam.AutoStigY, out stigY);
  3384. log.Info("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3385. //设置工作距离
  3386. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3387. //设置完工作距离后必须延迟5秒
  3388. Thread.Sleep(5000);
  3389. }
  3390. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3391. {
  3392. //后期和客户对接接口
  3393. List<string> filenames = new List<string>();
  3394. String retfilename = wr.Img_Auto_Focus(filenames);
  3395. }
  3396. else //蔡司自动对焦
  3397. {
  3398. iSEM.CmdAutoFocusCoarse();
  3399. while (true)
  3400. {
  3401. Thread.Sleep(10000);
  3402. if (0 == iSEM.GetAutoFunction())
  3403. {
  3404. break;
  3405. }
  3406. }
  3407. iSEM.CmdAutoFocusFine();
  3408. while (true)
  3409. {
  3410. Thread.Sleep(10000);
  3411. if (0 == iSEM.GetAutoFunction())
  3412. {
  3413. break;
  3414. }
  3415. }
  3416. }
  3417. return true;
  3418. }
  3419. //自动聚焦
  3420. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  3421. {
  3422. a_nWd = 0;
  3423. float wd = iSEM.GetWorkingDistance();
  3424. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3425. if (a_param == null)
  3426. {
  3427. log.Info("空参数", true);
  3428. return false;
  3429. }
  3430. string path = a_param.Path;
  3431. if (!Directory.Exists(path))
  3432. {
  3433. log.Info("文件夹丢失", true);
  3434. return false;
  3435. }
  3436. string path_coarse = a_param.Path + "\\Coarse";
  3437. if (!Directory.Exists(path_coarse))
  3438. {
  3439. Directory.CreateDirectory(path_coarse);
  3440. }
  3441. string path_fine = a_param.Path + "\\Fine";
  3442. if (!Directory.Exists(path_fine))
  3443. {
  3444. Directory.CreateDirectory(path_fine);
  3445. }
  3446. //1. 拍照
  3447. //1.1, 粗拍照
  3448. //1.1.1, 根据参数计算拍照次数
  3449. double nUp = a_param.UP * 100.0 ;
  3450. double nDown = a_param.Down * 100.0;
  3451. double nStep = a_param.Step * 100.0;
  3452. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3453. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3454. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3455. //粗拍照
  3456. for (int i = 0; i < nTimes; i++)
  3457. {
  3458. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  3459. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3460. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3461. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3462. int swd = cWd / 100;
  3463. //SendMsg("wd = " + swd.ToString() +"um");
  3464. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3465. arg.Picture_Information.Picture_FullPath = fileName;
  3466. if (!GetImage(fileName))
  3467. {
  3468. return false;
  3469. }
  3470. //arg.State = true;
  3471. //arg.Message = "自动对焦";
  3472. //SendMsg("0-9");
  3473. //判断是否停止进程
  3474. if (key_stop)
  3475. {
  3476. return false;
  3477. }
  3478. //Thread.Sleep(3000);
  3479. }
  3480. //1.2, 选定细拍照的工作距离
  3481. int CorWd = 510000;
  3482. ChooseBest(path_coarse,out CorWd);
  3483. if (CorWd == -1)
  3484. CorWd = 510000;
  3485. else
  3486. a_nWd = CorWd;
  3487. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3488. //1.3, 细拍照
  3489. if ( (CorWd - a_param.Range * 100.0) <=0)
  3490. {
  3491. return false;
  3492. }
  3493. double nfUp = CorWd - a_param.Range * 100.0;
  3494. double nfStep = a_param.fStep * 100.0;
  3495. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3496. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3497. for (int i = 0; i < nfTimes; i++)
  3498. {
  3499. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3500. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3501. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3502. Thread.Sleep(Convert.ToInt32(cycle_time)+100);
  3503. int swd = cWd / 100;
  3504. //SendMsg("wd = " + swd.ToString() + "um");
  3505. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3506. arg.Picture_Information.Picture_FullPath = fileName;
  3507. if (!GetImage(fileName))
  3508. {
  3509. return false;
  3510. }
  3511. //arg.State = true;
  3512. //arg.Message = "自动对焦";
  3513. //SendMsg("0-9");
  3514. //判断是否停止进程
  3515. if (key_stop)
  3516. {
  3517. return false;
  3518. }
  3519. //Thread.Sleep(2000);
  3520. }
  3521. int fineWd = CorWd;
  3522. ChooseBest(path_fine, out fineWd);
  3523. //SendMsg("wd fine max = " + fineWd.ToString());
  3524. if (fineWd == -1)
  3525. a_nWd = CorWd;
  3526. else
  3527. a_nWd = fineWd;
  3528. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3529. //arg.State = true;
  3530. //arg.Message = "自动对焦";
  3531. //SendMsg(step_code);
  3532. return true;
  3533. }
  3534. //自动聚焦1
  3535. public bool AutoFocus1(FocusParam a_param, out int a_nWd)
  3536. {
  3537. a_nWd = 0;
  3538. float wd = iSEM.GetWorkingDistance();
  3539. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3540. if (a_param == null)
  3541. {
  3542. log.Info("空参数", true);
  3543. return false;
  3544. }
  3545. string path = a_param.Path;
  3546. if (!Directory.Exists(path))
  3547. {
  3548. log.Info("文件夹丢失", true);
  3549. return false;
  3550. }
  3551. string path_coarse = a_param.Path + "\\Coarse";
  3552. if (!Directory.Exists(path_coarse))
  3553. {
  3554. Directory.CreateDirectory(path_coarse);
  3555. }
  3556. string path_fine = a_param.Path + "\\Fine";
  3557. if (!Directory.Exists(path_fine))
  3558. {
  3559. Directory.CreateDirectory(path_fine);
  3560. }
  3561. //1. 拍照
  3562. //1.1, 粗拍照
  3563. //1.1.1, 根据参数计算拍照次数
  3564. double nUp = a_param.UP * 100.0;
  3565. double nDown = a_param.Down * 100.0;
  3566. double nStep = a_param.Step * 100.0;
  3567. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3568. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3569. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3570. //粗拍照
  3571. for (int i = 0; i < nTimes; i++)
  3572. {
  3573. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3574. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3575. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3576. Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
  3577. int swd = cWd / 100;
  3578. //SendMsg("wd = " + swd.ToString() +"um");
  3579. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3580. //arg.Picture_Information.Picture_FullPath = fileName;
  3581. if (!GetImage1(fileName))
  3582. {
  3583. return false;
  3584. }
  3585. //arg.State = true;
  3586. //arg.Message = "自动对焦";
  3587. //SendMsg(step_code);
  3588. //判断是否停止进程
  3589. if (key_stop)
  3590. {
  3591. return false;
  3592. }
  3593. //Thread.Sleep(3000);
  3594. }
  3595. //1.2, 选定细拍照的工作距离
  3596. int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3597. ChooseBest(path_coarse, out CorWd);
  3598. if (CorWd == -1)
  3599. CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3600. else
  3601. a_nWd = CorWd;
  3602. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3603. //1.3, 细拍照
  3604. if ((CorWd - a_param.Range * 100.0) <= 0)
  3605. {
  3606. return false;
  3607. }
  3608. double nfUp = CorWd - a_param.Range * 100.0;
  3609. double nfStep = a_param.fStep * 100.0;
  3610. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3611. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3612. for (int i = 0; i < nfTimes; i++)
  3613. {
  3614. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3615. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3616. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3617. Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
  3618. int swd = cWd / 100;
  3619. //SendMsg("wd = " + swd.ToString() + "um");
  3620. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3621. //arg.Picture_Information.Picture_FullPath = fileName;
  3622. if (!GetImage1(fileName))
  3623. {
  3624. return false;
  3625. }
  3626. //arg.State = true;
  3627. //arg.Message = "自动对焦";
  3628. //SendMsg(step_code);
  3629. //判断是否停止进程
  3630. if (key_stop)
  3631. {
  3632. return false;
  3633. }
  3634. //Thread.Sleep(2000);
  3635. }
  3636. int fineWd = CorWd;
  3637. ChooseBest(path_fine, out fineWd);
  3638. //SendMsg("wd fine max = " + fineWd.ToString());
  3639. if (fineWd == -1)
  3640. a_nWd = CorWd;
  3641. else
  3642. a_nWd = fineWd;
  3643. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3644. //arg.State = true;
  3645. //arg.Message = "自动对焦";
  3646. //SendMsg("0-9");
  3647. return true;
  3648. }
  3649. //自动消像散 AutoStig
  3650. public bool AutoStig(FocusParam a_param, out int a_nWd)
  3651. {
  3652. a_nWd = 0;
  3653. float wd = 0;
  3654. if (a_param.TYPE == 2)
  3655. {
  3656. wd = iSEM.GetAstigmatismX();
  3657. }
  3658. else if (a_param.TYPE == 3)
  3659. {
  3660. wd = iSEM.GetAstigmatismY();
  3661. }
  3662. else
  3663. {
  3664. log.Info("自动消像散参数设置有误", true);
  3665. return false;
  3666. }
  3667. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3668. if (a_param == null)
  3669. {
  3670. log.Info("空参数", true);
  3671. return false;
  3672. }
  3673. string path = a_param.Path;
  3674. if (!Directory.Exists(path))
  3675. {
  3676. log.Error("文件夹丢失", false);
  3677. return false;
  3678. }
  3679. string path_coarse = a_param.Path + "\\Coarse";
  3680. if (!Directory.Exists(path_coarse))
  3681. {
  3682. Directory.CreateDirectory(path_coarse);
  3683. }
  3684. string path_fine = a_param.Path + "\\Fine";
  3685. if (!Directory.Exists(path_fine))
  3686. {
  3687. Directory.CreateDirectory(path_fine);
  3688. }
  3689. //1. 拍照
  3690. //1.1, 粗拍照
  3691. //1.1.1, 根据参数计算拍照次数
  3692. double nUp = a_param.UP * 100.0;
  3693. double nDown = a_param.Down * 100.0;
  3694. double nStep = a_param.Step * 100.0;
  3695. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3696. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3697. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3698. //粗拍照
  3699. for (int i = 0; i < nTimes; i++)
  3700. {
  3701. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3702. if (a_param.TYPE == 2)
  3703. {
  3704. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3705. }
  3706. else if (a_param.TYPE == 3)
  3707. {
  3708. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3709. }
  3710. else
  3711. {
  3712. log.Info("自动消像散参数设置有误", true);
  3713. return false;
  3714. }
  3715. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3716. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3717. int swd = cWd / 100;
  3718. //SendMsg("wd = " + swd.ToString() +"um");
  3719. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3720. arg.Picture_Information.Picture_FullPath = fileName;
  3721. if (!GetImage(fileName))
  3722. {
  3723. return false;
  3724. }
  3725. arg.State = true;
  3726. arg.Message = "自动像散";
  3727. SendMsg("0-8");
  3728. //判断是否停止进程
  3729. if (key_stop)
  3730. {
  3731. return false;
  3732. }
  3733. //Thread.Sleep(3000);
  3734. }
  3735. //1.2, 选定细拍照的工作距离
  3736. int CorWd;
  3737. ChooseBest(path_coarse, out CorWd);
  3738. if (CorWd == -1)
  3739. {
  3740. a_nWd = 0;
  3741. }
  3742. else
  3743. {
  3744. a_nWd = CorWd;
  3745. }
  3746. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3747. //1.3, 细拍照
  3748. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3749. {
  3750. return false;
  3751. }
  3752. double nfUp = 0;
  3753. if (a_param.Range >= 0)
  3754. nfUp = CorWd - a_param.Range * 100.0;
  3755. else
  3756. nfUp = CorWd + a_param.Range * 100.0;
  3757. double nfStep = a_param.fStep * 100.0;
  3758. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3759. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3760. for (int i = 0; i < nfTimes; i++)
  3761. {
  3762. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3763. if (a_param.TYPE == 2)
  3764. {
  3765. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3766. }
  3767. else if (a_param.TYPE == 3)
  3768. {
  3769. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3770. }
  3771. else
  3772. {
  3773. log.Info("自动消像散参数设置有误", true);
  3774. return false;
  3775. }
  3776. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3777. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3778. int swd = cWd / 100;
  3779. //SendMsg("wd = " + swd.ToString() + "um");
  3780. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3781. arg.Picture_Information.Picture_FullPath = fileName;
  3782. if (!GetImage(fileName))
  3783. {
  3784. return false;
  3785. }
  3786. arg.State = true;
  3787. arg.Message = "自动像散";
  3788. SendMsg("0-8");
  3789. //判断是否停止进程
  3790. if (key_stop)
  3791. {
  3792. return false;
  3793. }
  3794. //Thread.Sleep(2000);
  3795. }
  3796. int fineWd = CorWd;
  3797. ChooseBest(path_fine, out fineWd);
  3798. //SendMsg("wd fine max = " + fineWd.ToString());
  3799. if(fineWd == -1)
  3800. a_nWd = CorWd;
  3801. else
  3802. a_nWd = fineWd;
  3803. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3804. //arg.State = true;
  3805. //arg.Message = "自动像散";
  3806. //SendMsg(step_code);
  3807. return true;
  3808. }
  3809. //执行自动消像散1
  3810. public bool ImageStig1()
  3811. {
  3812. if (m_measureFile.MParam.FocusMode == 1)//手动
  3813. {
  3814. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3815. {
  3816. }
  3817. else
  3818. {
  3819. return false;
  3820. }
  3821. }
  3822. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3823. {
  3824. //郝工增加自动对焦算法
  3825. //处理文件夹
  3826. if (Directory.Exists(StigX_path))
  3827. {
  3828. Directory.Delete(StigX_path, true);
  3829. }
  3830. Thread.Sleep(3000);
  3831. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3832. Thread.Sleep(200);
  3833. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3834. Thread.Sleep(200);
  3835. //再创建文件夹
  3836. Directory.CreateDirectory(StigX_path);
  3837. //1、对焦参数类,2、输出像散值
  3838. int stigX = 0;
  3839. //根据当前的stigX重新计算像散值
  3840. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3841. //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
  3842. //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
  3843. //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
  3844. //设置工作距离
  3845. currentStigX = iSEM.GetAstigmatismX();
  3846. Thread.Sleep(1000);
  3847. FocusParam pFocus = new FocusParam();
  3848. pFocus = m_measureFile.MParam.AutoStigX;
  3849. float old_up = m_measureFile.MParam.AutoStigX.UP;
  3850. float old_down = m_measureFile.MParam.AutoStigX.Down;
  3851. float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3852. pFocus.UP = currentStigX - setvalue;
  3853. pFocus.Down = currentStigX + setvalue;
  3854. //m_measureFile.MParam.AutoStigX.Step = 1;
  3855. //m_measureFile.MParam.AutoStigX.Range = (float)0.5;
  3856. //m_measureFile.MParam.AutoStigX.fStep = (float)0.1;
  3857. log.Info("消像散参数: up = "+pFocus.UP+",down = " + pFocus.Down+ ",step =" + pFocus.Step + ",rang ="+ pFocus.Range + ",fstep = " + pFocus.fStep, true);
  3858. //log.Info("修改消像散参数", true);
  3859. AutoStig1(pFocus, out stigX);
  3860. m_measureFile.MParam.AutoStigX.UP = old_up;
  3861. m_measureFile.MParam.AutoStigX.Down = old_down;
  3862. log.Info("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3863. //设置工作距离
  3864. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3865. //设置完工作距离后必须延迟5秒
  3866. Thread.Sleep(5000);
  3867. //处理图片位置
  3868. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3869. //处理文件夹
  3870. if (Directory.Exists(StigY_path))
  3871. {
  3872. Directory.Delete(StigY_path, true);
  3873. }
  3874. Thread.Sleep(3000);
  3875. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3876. Thread.Sleep(200);
  3877. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3878. Thread.Sleep(200);
  3879. //再创建文件夹
  3880. Directory.CreateDirectory(StigY_path);
  3881. //1、对焦参数类,2、输出像散值
  3882. int stigY = 0;
  3883. //根据当前的stigX重新计算像散值
  3884. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3885. //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
  3886. //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
  3887. //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
  3888. currentStigY = iSEM.GetAstigmatismY();
  3889. Thread.Sleep(1000);
  3890. //m_measureFile.MParam.AutoStigY.UP = currentStigY - setvalue;
  3891. //m_measureFile.MParam.AutoStigY.Down = currentStigY + setvalue;
  3892. //m_measureFile.MParam.AutoStigY.Step = 1;
  3893. //m_measureFile.MParam.AutoStigY.Range = (float)0.5;
  3894. //m_measureFile.MParam.AutoStigY.fStep = (float)0.1;
  3895. FocusParam pFocusY = new FocusParam();
  3896. pFocusY = m_measureFile.MParam.AutoStigY;
  3897. float old_upY = m_measureFile.MParam.AutoStigY.UP;
  3898. float old_downY = m_measureFile.MParam.AutoStigY.Down;
  3899. //float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3900. pFocusY.UP = currentStigY - setvalue;
  3901. pFocusY.Down = currentStigY + setvalue;
  3902. log.Info("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
  3903. AutoStig1(pFocusY, out stigY);
  3904. m_measureFile.MParam.AutoStigY.UP = old_upY;
  3905. m_measureFile.MParam.AutoStigY.Down = old_downY;
  3906. log.Info("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3907. //设置工作距离
  3908. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3909. //设置完工作距离后必须延迟5秒
  3910. Thread.Sleep(5000);
  3911. }
  3912. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3913. {
  3914. //后期和客户对接接口
  3915. List<string> filenames = new List<string>();
  3916. String retfilename = wr.Img_Auto_Focus(filenames);
  3917. }
  3918. else //蔡司自动对焦
  3919. {
  3920. iSEM.CmdAutoFocusCoarse();
  3921. while (true)
  3922. {
  3923. Thread.Sleep(10000);
  3924. if (0 == iSEM.GetAutoFunction())
  3925. {
  3926. break;
  3927. }
  3928. }
  3929. iSEM.CmdAutoFocusFine();
  3930. while (true)
  3931. {
  3932. Thread.Sleep(10000);
  3933. if (0 == iSEM.GetAutoFunction())
  3934. {
  3935. break;
  3936. }
  3937. }
  3938. }
  3939. return true;
  3940. }
  3941. //自动消像散 AutoStig1
  3942. public bool AutoStig1(FocusParam a_param, out int a_nWd)
  3943. {
  3944. a_nWd = 0;
  3945. float wd = 0;
  3946. if (a_param.TYPE == 2)
  3947. {
  3948. wd = iSEM.GetAstigmatismX();
  3949. }
  3950. else if (a_param.TYPE == 3)
  3951. {
  3952. wd = iSEM.GetAstigmatismY();
  3953. }
  3954. else
  3955. {
  3956. log.Info("自动消像散参数设置有误", true);
  3957. return false;
  3958. }
  3959. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3960. if (a_param == null)
  3961. {
  3962. log.Info("空参数", true);
  3963. return false;
  3964. }
  3965. string path = a_param.Path;
  3966. if (!Directory.Exists(path))
  3967. {
  3968. log.Info("文件夹丢失", true);
  3969. return false;
  3970. }
  3971. string path_coarse = a_param.Path + "\\Coarse";
  3972. if (!Directory.Exists(path_coarse))
  3973. {
  3974. Directory.CreateDirectory(path_coarse);
  3975. }
  3976. string path_fine = a_param.Path + "\\Fine";
  3977. if (!Directory.Exists(path_fine))
  3978. {
  3979. Directory.CreateDirectory(path_fine);
  3980. }
  3981. //1. 拍照
  3982. //1.1, 粗拍照
  3983. //1.1.1, 根据参数计算拍照次数
  3984. double nUp = a_param.UP * 100.0;
  3985. double nDown = a_param.Down * 100.0;
  3986. double nStep = a_param.Step * 100.0;
  3987. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3988. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3989. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3990. //粗拍照
  3991. for (int i = 0; i < nTimes; i++)
  3992. {
  3993. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3994. if (a_param.TYPE == 2)
  3995. {
  3996. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3997. }
  3998. else if (a_param.TYPE == 3)
  3999. {
  4000. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  4001. }
  4002. else
  4003. {
  4004. log.Info("自动消像散参数设置有误", true);
  4005. return false;
  4006. }
  4007. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4008. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4009. int swd = cWd / 100;
  4010. //SendMsg("wd = " + swd.ToString() +"um");
  4011. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4012. arg.Picture_Information.Picture_FullPath = fileName;
  4013. if (!GetImage1(fileName))
  4014. {
  4015. return false;
  4016. }
  4017. //arg.State = true;
  4018. //arg.Message = "自动像散";
  4019. //SendMsg(step_code);
  4020. //判断是否停止进程
  4021. if (key_stop)
  4022. {
  4023. return false;
  4024. }
  4025. //Thread.Sleep(3000);
  4026. }
  4027. //1.2, 选定细拍照的工作距离
  4028. int CorWd;
  4029. ChooseBest(path_coarse, out CorWd);
  4030. if (CorWd == -1)
  4031. {
  4032. a_nWd = 0;
  4033. }
  4034. else
  4035. {
  4036. a_nWd = CorWd;
  4037. }
  4038. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4039. //1.3, 细拍照
  4040. if ((CorWd - a_param.Range * 100.0) <= -10000)
  4041. {
  4042. return false;
  4043. }
  4044. double nfUp = 0;
  4045. if (a_param.Range >= 0)
  4046. nfUp = CorWd - a_param.Range * 100.0;
  4047. else
  4048. nfUp = CorWd + a_param.Range * 100.0;
  4049. double nfStep = a_param.fStep * 100.0;
  4050. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4051. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4052. for (int i = 0; i < nfTimes; i++)
  4053. {
  4054. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4055. if (a_param.TYPE == 2)
  4056. {
  4057. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  4058. }
  4059. else if (a_param.TYPE == 3)
  4060. {
  4061. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  4062. }
  4063. else
  4064. {
  4065. log.Info("自动消像散参数设置有误", true);
  4066. return false;
  4067. }
  4068. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4069. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4070. int swd = cWd / 100;
  4071. //SendMsg("wd = " + swd.ToString() + "um");
  4072. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4073. arg.Picture_Information.Picture_FullPath = fileName;
  4074. if (!GetImage1(fileName))
  4075. {
  4076. return false;
  4077. }
  4078. //arg.State = true;
  4079. //arg.Message = "自动像散";
  4080. //SendMsg(step_code);
  4081. //判断是否停止进程
  4082. if (key_stop)
  4083. {
  4084. return false;
  4085. }
  4086. //Thread.Sleep(2000);
  4087. }
  4088. int fineWd = CorWd;
  4089. ChooseBest(path_fine, out fineWd);
  4090. //SendMsg("wd fine max = " + fineWd.ToString());
  4091. if (fineWd == -1)
  4092. a_nWd = CorWd;
  4093. else
  4094. a_nWd = fineWd;
  4095. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4096. //arg.State = true;
  4097. //arg.Message = "自动像散";
  4098. //SendMsg("0-9");
  4099. return true;
  4100. }
  4101. //自动FIB对焦 AutoFIBFocus
  4102. public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
  4103. {
  4104. a_nWd = 0;
  4105. float wd = 0;
  4106. if (a_param.TYPE == 4)
  4107. {
  4108. wd = iSEM.GetFIBObjectivePotential();
  4109. }
  4110. else
  4111. {
  4112. log.Error("FIB自动聚焦参数设置有误", false);
  4113. return false;
  4114. }
  4115. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  4116. if (a_param == null)
  4117. {
  4118. log.Error("空参数", false);
  4119. return false;
  4120. }
  4121. string path = a_param.Path;
  4122. if (!Directory.Exists(path))
  4123. {
  4124. log.Error("文件夹丢失", false);
  4125. return false;
  4126. }
  4127. string path_coarse = a_param.Path + "\\Coarse";
  4128. if (!Directory.Exists(path_coarse))
  4129. {
  4130. Directory.CreateDirectory(path_coarse);
  4131. }
  4132. string path_fine = a_param.Path + "\\Fine";
  4133. if (!Directory.Exists(path_fine))
  4134. {
  4135. Directory.CreateDirectory(path_fine);
  4136. }
  4137. //1. 拍照
  4138. //1.1, 粗拍照
  4139. //1.1.1, 根据参数计算拍照次数
  4140. double nUp = a_param.UP * 100.0;
  4141. double nDown = a_param.Down * 100.0;
  4142. double nStep = a_param.Step * 100.0;
  4143. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  4144. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  4145. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  4146. //粗拍照
  4147. for (int i = 0; i < nTimes; i++)
  4148. {
  4149. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  4150. if (a_param.TYPE == 4)
  4151. {
  4152. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4153. }
  4154. else
  4155. {
  4156. log.Error("FIB对焦参数设置有误,对焦类型错", false);
  4157. return false;
  4158. }
  4159. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4160. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4161. int swd = cWd / 100;
  4162. //SendMsg("wd = " + swd.ToString() +"um");
  4163. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4164. arg.Picture_Information.Picture_FullPath = fileName;
  4165. if (!GetImage(fileName))
  4166. {
  4167. return false;
  4168. }
  4169. arg.State = true;
  4170. arg.Message = "FIB自动对焦";
  4171. SendMsg(step_code);
  4172. //判断是否停止进程
  4173. if (key_stop)
  4174. {
  4175. return false;
  4176. }
  4177. //Thread.Sleep(3000);
  4178. }
  4179. //1.2, 选定细拍照的工作距离
  4180. int CorWd;
  4181. ChooseBest(path_coarse, out CorWd);
  4182. a_nWd = CorWd;
  4183. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4184. //1.3, 细拍照
  4185. if ((CorWd - a_param.Range * 100.0) <0)
  4186. {
  4187. return false;
  4188. }
  4189. double nfUp = CorWd - a_param.Range * 100.0;
  4190. double nfStep = a_param.fStep * 100.0;
  4191. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4192. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4193. for (int i = 0; i < nfTimes; i++)
  4194. {
  4195. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4196. if (a_param.TYPE == 4)
  4197. {
  4198. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4199. }
  4200. else
  4201. {
  4202. log.Error("自动消像散参数设置有误", false);
  4203. return false;
  4204. }
  4205. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4206. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4207. int swd = cWd / 100;
  4208. //SendMsg("wd = " + swd.ToString() + "um");
  4209. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4210. arg.Picture_Information.Picture_FullPath = fileName;
  4211. if (!GetImage(fileName))
  4212. {
  4213. return false;
  4214. }
  4215. arg.State = true;
  4216. arg.Message = "FIB自动对焦";
  4217. SendMsg(step_code);
  4218. //判断是否停止进程
  4219. if (key_stop)
  4220. {
  4221. return false;
  4222. }
  4223. //Thread.Sleep(2000);
  4224. }
  4225. int fineWd;
  4226. ChooseBest(path_fine, out fineWd);
  4227. //SendMsg("wd fine max = " + fineWd.ToString());
  4228. a_nWd = fineWd;
  4229. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4230. return true;
  4231. }
  4232. //LoG算子计算
  4233. private double LoGMean(string a_strImgPath)
  4234. {
  4235. //读入Img文件
  4236. if (!File.Exists(a_strImgPath))
  4237. {
  4238. return 0;
  4239. }
  4240. Mat src, gray_src;
  4241. int kernel_size = 3;
  4242. src = Cv2.ImRead(a_strImgPath);
  4243. gray_src = new Mat();
  4244. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4245. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4246. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4247. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4248. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  4249. Cv2.ConvertScaleAbs(src, src);
  4250. //图像的平均灰度
  4251. double meanValue = 0.0;
  4252. meanValue = Cv2.Mean(src)[0];
  4253. return meanValue;
  4254. }
  4255. //梯度计算
  4256. private double Tenengrad(string a_strImgPath)
  4257. {
  4258. //读入Img文件
  4259. if (!File.Exists(a_strImgPath))
  4260. {
  4261. return 0;
  4262. }
  4263. Mat src;
  4264. src = Cv2.ImRead(a_strImgPath);
  4265. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4266. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4267. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4268. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4269. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  4270. //图像的平均灰度
  4271. double meanValue = 0.0;
  4272. meanValue = Cv2.Mean(src)[0];
  4273. return meanValue;
  4274. }
  4275. //梯度计算
  4276. private double TTgrad(string a_strImgPath)
  4277. {
  4278. //读入Img文件
  4279. if (!File.Exists(a_strImgPath))
  4280. {
  4281. return 0;
  4282. }
  4283. Mat src;
  4284. src = Cv2.ImRead(a_strImgPath);
  4285. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4286. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4287. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4288. Mat scalex = new Mat();
  4289. Mat scaley = new Mat();
  4290. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  4291. Cv2.ConvertScaleAbs(src, scalex);
  4292. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  4293. Cv2.ConvertScaleAbs(src, scaley);
  4294. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  4295. //图像的平均灰度
  4296. double meanValue = 0.0;
  4297. meanValue = Cv2.Mean(src)[0];
  4298. return meanValue;
  4299. }
  4300. //三选二算法
  4301. private bool ChooseBest(string a_strImgPath, out int a_nWd)
  4302. {
  4303. a_nWd = -1;
  4304. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  4305. float[] values = new float[files.Length];
  4306. double smax1 = LoGMean(files[0]);
  4307. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  4308. double smax2 = Tenengrad(files[0]);
  4309. int wdmax2 = wdmax1;
  4310. double smax3 = TTgrad(files[0]);
  4311. int wdmax3 = wdmax1;
  4312. int x = 0;
  4313. foreach (var file in files)
  4314. {
  4315. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  4316. double svalue1 = LoGMean(file);
  4317. double svalue2 = Tenengrad(file);
  4318. double svalue3 = TTgrad(file);
  4319. if (smax1 < svalue1)
  4320. {
  4321. smax1 = svalue1;
  4322. wdmax1 = wd;
  4323. }
  4324. if (smax2 < svalue2)
  4325. {
  4326. smax2 = svalue2;
  4327. wdmax2 = wd;
  4328. }
  4329. if (smax3 < svalue3)
  4330. {
  4331. smax3 = svalue3;
  4332. wdmax3 = wd;
  4333. }
  4334. x++;
  4335. }
  4336. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  4337. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  4338. {
  4339. a_nWd = wdmax1;
  4340. //SendMsg("焦距 = " + wdmax1.ToString());
  4341. }
  4342. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  4343. {
  4344. a_nWd = wdmax2;
  4345. //SendMsg("焦距 = " + wdmax2.ToString());
  4346. }
  4347. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  4348. {
  4349. a_nWd = wdmax3;
  4350. //SendMsg("焦距 = " + wdmax3.ToString());
  4351. }
  4352. else
  4353. {
  4354. //SendMsg("对焦失败。");
  4355. return false;
  4356. }
  4357. return true;
  4358. }
  4359. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  4360. bool MoveToPixByMoveStage(float xc, float yc)
  4361. {
  4362. //单位是m/pix
  4363. float XpixSize = iSEM.GetPixelSize();
  4364. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4365. float YpixSize = iSEM.GetPixelSize();///(float)m_measureFile.MParam.PixelSizeCor);
  4366. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4367. Thread.Sleep(500);
  4368. //0:width, 1:height
  4369. int[] imageSize = iSEM.GetImageStore();
  4370. int width = imageSize[0] / 2;
  4371. int height = imageSize[1] / 2;
  4372. log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4373. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4374. float deltX = (xc - (float)width) * XpixSize;
  4375. float deltY = (yc - (float)height) * YpixSize;
  4376. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  4377. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  4378. float xpCur = iSEM.GetStageAtX();
  4379. float ypCur = iSEM.GetStageAtY();
  4380. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4381. float xpNew = xpCur - deltX;
  4382. float ypNew = ypCur + deltY;
  4383. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4384. //计算光束偏移值:
  4385. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  4386. {
  4387. log.Info("X方向移动样品台", true);
  4388. if (!iSEM.SetStageGotoX(xpNew))
  4389. {
  4390. return false;
  4391. }
  4392. //判断是否移动完成
  4393. while (true)
  4394. {
  4395. Thread.Sleep(5000);
  4396. if (iSEM.GetStageIs() == 0)
  4397. {
  4398. break;
  4399. }
  4400. }
  4401. }
  4402. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  4403. {
  4404. log.Info("Y方向移动样品台", true);
  4405. if (!iSEM.SetStageGotoY(ypNew))
  4406. {
  4407. return false;
  4408. }
  4409. //判断是否移动完成
  4410. while (true)
  4411. {
  4412. Thread.Sleep(5000);
  4413. if (iSEM.GetStageIs() == 0)
  4414. {
  4415. break;
  4416. }
  4417. }
  4418. }
  4419. return true;
  4420. }
  4421. //移动到像素位置
  4422. bool MoveToPix(float xc, float yc)
  4423. {
  4424. //单位是m/pix
  4425. float XpixSize = iSEM.GetPixelSize();
  4426. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel",true);
  4427. float YpixSize = (XpixSize/(float)m_measureFile.MParam.PixelSizeCor);
  4428. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4429. Thread.Sleep(200);
  4430. //0:width, 1:height
  4431. int[] imageSize = iSEM.GetImageStore();
  4432. int width = imageSize[0]/2;
  4433. int height = imageSize[1]/2;
  4434. log.Info("目标像素是(" + xc.ToString()+ ","+ yc.ToString() + ")", true);
  4435. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4436. float deltX = (xc - (float)width) * XpixSize;
  4437. float deltY = (yc - (float)height) * YpixSize;
  4438. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  4439. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  4440. float xpCur = iSEM.GetStageAtX();
  4441. Thread.Sleep(200);
  4442. float ypCur = iSEM.GetStageAtY();
  4443. log.Info("当前位置(" + xpCur.ToString()+ "," + ypCur.ToString() + "),单位m", true);
  4444. float xpNew = xpCur - deltX;
  4445. float ypNew = ypCur + deltY;
  4446. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4447. //计算最大偏移量
  4448. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4449. Thread.Sleep(200);
  4450. iSEM.SetBeamShiftX(100);
  4451. Thread.Sleep(200);
  4452. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4453. Thread.Sleep(200);
  4454. iSEM.SetBeamShiftX(beamXCur);
  4455. Thread.Sleep(200);
  4456. //计算光束偏移值:
  4457. float beamX = iSEM.GetBeamOffsetX();
  4458. log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4459. beamX = (-deltX + beamX);
  4460. log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4461. if( ((beamX <= beamXMax) && (beamX >=0)) ||
  4462. ((beamX >= -beamXMax)&& (beamX < 0)))
  4463. {
  4464. log.Info("X方向移动光束", true);
  4465. float beamXShift = beamX * 100 / beamXMax;
  4466. log.Info("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  4467. if (!iSEM.SetBeamShiftX(beamXShift))//if (!iSEM.SetBeamOffsetX(beamX))
  4468. {
  4469. log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4470. return false;
  4471. }
  4472. }
  4473. else if(deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4474. {
  4475. log.Info("X方向移动样品台", true);
  4476. if (!iSEM.SetStageGotoX(xpNew))
  4477. {
  4478. return false;
  4479. }
  4480. //判断是否移动完成
  4481. while (true)
  4482. {
  4483. Thread.Sleep(4000);
  4484. if (iSEM.GetStageIs() == 0)
  4485. {
  4486. break;
  4487. }
  4488. }
  4489. }
  4490. float beamY = iSEM.GetBeamOffsetY();
  4491. log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4492. beamY = (-deltY + beamY);
  4493. log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4494. //计算最大偏移量
  4495. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4496. Thread.Sleep(200);
  4497. iSEM.SetBeamShiftY(100);
  4498. Thread.Sleep(200);
  4499. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4500. Thread.Sleep(200);
  4501. iSEM.SetBeamShiftY(beamYCur);
  4502. Thread.Sleep(200);
  4503. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  4504. ((beamY >= -beamYMax) && (beamY < 0)))
  4505. {
  4506. log.Info("Y方向移动光束", true);
  4507. float beamYShift = beamY * 100 / beamYMax;
  4508. log.Info("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  4509. //if(!iSEM.SetBeamOffsetY(beamY))
  4510. if (!iSEM.SetBeamShiftY(beamYShift))
  4511. {
  4512. log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4513. return false;
  4514. }
  4515. }
  4516. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4517. {
  4518. log.Info("Y方向移动样品台", true);
  4519. if (!iSEM.SetStageGotoY(ypNew))
  4520. {
  4521. return false;
  4522. }
  4523. //判断是否移动完成
  4524. while (true)
  4525. {
  4526. Thread.Sleep(4000);
  4527. if (iSEM.GetStageIs() == 0)
  4528. {
  4529. break;
  4530. }
  4531. }
  4532. }
  4533. return true;
  4534. }
  4535. //自动亮度对比度调节
  4536. //自动亮度对比度
  4537. public bool AutoBC(String step)
  4538. {
  4539. arg.Message = "自动亮度对比度";
  4540. arg.State = true;
  4541. SendMsg("1-10");
  4542. iSEM.SetAutoBright(100);
  4543. iSEM.SetAutoContrast(100);
  4544. //log.Info("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
  4545. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  4546. {
  4547. log.Info("开始设置自动亮度、对比度失败,程序退出。", true);
  4548. return false;
  4549. }
  4550. Thread.Sleep(5000);
  4551. int i = 0;
  4552. float bright = iSEM.GetBrightness();
  4553. float contrast = iSEM.GetContrast();
  4554. //最多调节30s,30s没调节好,认为调节失败
  4555. for (i = 0; i < 5; i++)
  4556. {
  4557. bright = iSEM.GetBrightness();
  4558. contrast = iSEM.GetContrast();
  4559. if ((bright >= 40 && bright <= 60)
  4560. && (contrast >= 35 && contrast <= 40))
  4561. break;
  4562. Thread.Sleep(5000);
  4563. }
  4564. bright = iSEM.GetBrightness();
  4565. contrast = iSEM.GetContrast();
  4566. if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
  4567. && i == 5)
  4568. {
  4569. log.Info("亮度对比度调节时间过长", true);
  4570. return false;
  4571. }
  4572. iSEM.SetAutoBright(100);
  4573. iSEM.SetAutoContrast(100);
  4574. //log.Info("SEM模式自动亮度目标50,自动对比度目标30.", true);
  4575. return true;
  4576. }
  4577. //执行FIB自动对焦,FIBFocus
  4578. //执行自动消像散
  4579. public bool FIBFocus(String step_code)
  4580. {
  4581. if (m_measureFile.MParam.FocusMode == 1)//手动
  4582. {
  4583. if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  4584. {
  4585. }
  4586. else
  4587. {
  4588. return false;
  4589. }
  4590. }
  4591. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  4592. {
  4593. //郝工增加自动对焦算法
  4594. //处理文件夹
  4595. if (Directory.Exists(FIBfocus_path))
  4596. {
  4597. Directory.Delete(FIBfocus_path, true);
  4598. }
  4599. Thread.Sleep(3000);
  4600. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  4601. Thread.Sleep(1000);
  4602. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  4603. Thread.Sleep(1000);
  4604. //再创建文件夹
  4605. Directory.CreateDirectory(FIBfocus_path);
  4606. //1、对焦参数类,2、输出对焦值
  4607. int FIBFocus = 0;
  4608. //根据当前的stigX重新计算像散值
  4609. float currentFIBFocus = iSEM.GetFIBObjectivePotential();
  4610. //m_measureFile.MParam.FIBFocus.Step = 10; //像散的步长为10
  4611. m_measureFile.MParam.FIBFocus.UP = currentFIBFocus - m_measureFile.MParam.FIBFocus.Step;
  4612. m_measureFile.MParam.FIBFocus.Down = currentFIBFocus + m_measureFile.MParam.FIBFocus.Step;
  4613. log.Info("修改FIB自动对焦参数", true);
  4614. AutoFIBFocus(m_measureFile.MParam.FIBFocus, out FIBFocus, step_code);
  4615. //log.Info("算法输出"+ wd.ToString(), true);
  4616. //设置工作距离
  4617. iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
  4618. //设置完工作距离后必须延迟5秒
  4619. Thread.Sleep(5000);
  4620. //处理图片位置
  4621. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  4622. }
  4623. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  4624. {
  4625. //后期和客户对接接口
  4626. List<string> filenames = new List<string>();
  4627. String retfilename = wr.Img_Auto_Focus(filenames);
  4628. }
  4629. else //蔡司自动对焦
  4630. {
  4631. iSEM.CmdAutoFocusCoarse();
  4632. while (true)
  4633. {
  4634. Thread.Sleep(10000);
  4635. if (0 == iSEM.GetAutoFunction())
  4636. {
  4637. break;
  4638. }
  4639. }
  4640. iSEM.CmdAutoFocusFine();
  4641. while (true)
  4642. {
  4643. Thread.Sleep(10000);
  4644. if (0 == iSEM.GetAutoFunction())
  4645. {
  4646. break;
  4647. }
  4648. }
  4649. }
  4650. return true;
  4651. }
  4652. /// 图像拉直算法
  4653. /// </summary>
  4654. /// <param name="Slope">倾斜角度</param>
  4655. /// <param name="x0">圆心坐标x</param>
  4656. /// <param name="y0">圆心坐标y</param>
  4657. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  4658. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  4659. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  4660. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  4661. /// <returns></returns>
  4662. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  4663. {
  4664. try
  4665. {
  4666. float xr = x1 - x0;//倾斜图到中心的距离差x
  4667. float yr = y1 - y0;//倾斜图到中心的距离差y
  4668. float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  4669. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  4670. float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
  4671. float k_S = k - Slope;//通过夹角差求x2,y2
  4672. //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  4673. //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  4674. float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
  4675. float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
  4676. if (Slope > 0 || Slope < 0)
  4677. {
  4678. Hx = x0 + x2;
  4679. Hy = y0 + y2;
  4680. }
  4681. else
  4682. {
  4683. Hx = 0;
  4684. Hy = 0;
  4685. }
  4686. return true;
  4687. }
  4688. catch (Exception)
  4689. {
  4690. return false;
  4691. }
  4692. }
  4693. // 放大倍数差校正
  4694. public bool MagComp(float oldMag, float newMag)
  4695. {
  4696. //开启电压校正时进行电压校正
  4697. if (m_measureFile.MParam.MagComp)
  4698. {
  4699. int oldLevel = -1, newLevel = -1;
  4700. float deltX = 0, deltY = 0;
  4701. if (oldMag < m_measureFile.MParam.MagRange1)
  4702. {
  4703. oldLevel = 1;
  4704. }
  4705. else if ((oldMag <= m_measureFile.MParam.MagRange2)
  4706. && (oldMag > m_measureFile.MParam.MagRange1))
  4707. {
  4708. oldLevel = 2;
  4709. }
  4710. else if ((oldMag <= m_measureFile.MParam.MagRange3)
  4711. && (oldMag > m_measureFile.MParam.MagRange2))
  4712. {
  4713. oldLevel = 3;
  4714. }
  4715. else if ((oldMag <= m_measureFile.MParam.MagRange4)
  4716. && (oldMag > m_measureFile.MParam.MagRange3))
  4717. {
  4718. oldLevel = 4;
  4719. }
  4720. if (newMag < m_measureFile.MParam.MagRange1)
  4721. {
  4722. newLevel = 1;
  4723. }
  4724. else if ((newMag <= m_measureFile.MParam.MagRange2)
  4725. && (newMag > m_measureFile.MParam.MagRange1))
  4726. {
  4727. newLevel = 2;
  4728. }
  4729. else if ((newMag <= m_measureFile.MParam.MagRange3)
  4730. && (newMag > m_measureFile.MParam.MagRange2))
  4731. {
  4732. newLevel = 3;
  4733. }
  4734. else if ((newMag <= m_measureFile.MParam.MagRange4)
  4735. && (newMag > m_measureFile.MParam.MagRange3))
  4736. {
  4737. newLevel = 4;
  4738. }
  4739. if (oldLevel != newLevel)
  4740. {
  4741. if (oldLevel == 1)
  4742. {
  4743. switch (newLevel)
  4744. {
  4745. case 1:
  4746. break;
  4747. case 2:
  4748. deltX = m_measureFile.MParam.MagCompX1;
  4749. deltY = m_measureFile.MParam.MagCompY1;
  4750. break;
  4751. case 3:
  4752. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2;
  4753. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2;
  4754. break;
  4755. case 4:
  4756. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4757. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4758. break;
  4759. }
  4760. }
  4761. else if (oldLevel == 2)
  4762. {
  4763. switch (newLevel)
  4764. {
  4765. case 1:
  4766. deltX = -m_measureFile.MParam.MagCompX1;
  4767. deltY = -m_measureFile.MParam.MagCompY1;
  4768. break;
  4769. case 2:
  4770. break;
  4771. case 3:
  4772. deltX = m_measureFile.MParam.MagCompX2;
  4773. deltY = m_measureFile.MParam.MagCompY2;
  4774. break;
  4775. case 4:
  4776. deltX = m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4777. deltY = m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4778. break;
  4779. }
  4780. }
  4781. else if (oldLevel == 3)
  4782. {
  4783. switch (newLevel)
  4784. {
  4785. case 1:
  4786. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2;
  4787. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2;
  4788. break;
  4789. case 2:
  4790. deltX = -m_measureFile.MParam.MagCompX2;
  4791. deltY = -m_measureFile.MParam.MagCompY2;
  4792. break;
  4793. case 3:
  4794. break;
  4795. case 4:
  4796. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4797. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompX3;
  4798. break;
  4799. }
  4800. }
  4801. else if (oldLevel == 4)
  4802. {
  4803. switch (newLevel)
  4804. {
  4805. case 1:
  4806. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4807. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4808. break;
  4809. case 2:
  4810. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4811. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4812. break;
  4813. case 3:
  4814. deltX = -m_measureFile.MParam.MagCompX3;
  4815. deltY = -m_measureFile.MParam.MagCompY3;
  4816. break;
  4817. case 4:
  4818. break;
  4819. }
  4820. }
  4821. //通过移动光束校正便宜量
  4822. //单位是m/pix
  4823. float pixSize = iSEM.GetPixelSize();
  4824. log.Info("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
  4825. Thread.Sleep(500);
  4826. float xpCur = iSEM.GetStageAtX();
  4827. float ypCur = iSEM.GetStageAtY();
  4828. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4829. float xpNew = xpCur - deltX;
  4830. float ypNew = ypCur + deltY;
  4831. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4832. //计算最大偏移量
  4833. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4834. iSEM.SetBeamShiftX(100);
  4835. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4836. iSEM.SetBeamShiftX(beamXCur);
  4837. //计算光束偏移值:
  4838. float beamX = iSEM.GetBeamOffsetX();
  4839. log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4840. beamX = (-deltX + beamX);
  4841. log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4842. if (beamX < beamXMax || beamX < -beamXMax)
  4843. {
  4844. log.Info("X方向移动光束", true);
  4845. float beamXShift = beamX * 100 / beamXMax;
  4846. if (!iSEM.SetBeamShiftX(beamXShift))
  4847. {
  4848. log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4849. return false;
  4850. }
  4851. }
  4852. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4853. {
  4854. log.Info("X方向移动样品台", true);
  4855. if (!iSEM.SetStageGotoX(xpNew))
  4856. {
  4857. return false;
  4858. }
  4859. //判断是否移动完成
  4860. while (true)
  4861. {
  4862. Thread.Sleep(5000);
  4863. if (iSEM.GetStageIs() == 0)
  4864. {
  4865. break;
  4866. }
  4867. }
  4868. }
  4869. float beamY = iSEM.GetBeamOffsetY();
  4870. log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4871. beamY = (-deltY + beamY);
  4872. log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4873. //计算最大偏移量
  4874. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4875. iSEM.SetBeamShiftY(100);
  4876. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4877. iSEM.SetBeamShiftY(beamYCur);
  4878. if (beamY < beamYMax || beamY < -beamYMax)
  4879. {
  4880. log.Info("Y方向移动光束", true);
  4881. float beamYShift = beamY * 100 / beamYMax;
  4882. if (!iSEM.SetBeamShiftY(beamY))
  4883. {
  4884. log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4885. return false;
  4886. }
  4887. }
  4888. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4889. {
  4890. log.Info("Y方向移动样品台", true);
  4891. if (!iSEM.SetStageGotoY(ypNew))
  4892. {
  4893. return false;
  4894. }
  4895. //判断是否移动完成
  4896. while (true)
  4897. {
  4898. Thread.Sleep(5000);
  4899. if (iSEM.GetStageIs() == 0)
  4900. {
  4901. break;
  4902. }
  4903. }
  4904. }
  4905. }
  4906. }
  4907. return true;
  4908. }
  4909. #endregion
  4910. #region 能谱所有参数
  4911. //全局只有一个Extender
  4912. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  4913. public IExtenderControl iExtender=null;
  4914. const int ScanFieldSize = 1142;
  4915. MeasureDB m_MeasDB = null;
  4916. int m_nXrayId = 0;
  4917. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  4918. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  4919. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  4920. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  4921. /// <summary>
  4922. /// 做能谱分析
  4923. /// </summary>
  4924. /// <param name="a_FieldID">分析点视场ID,索引号</param>
  4925. /// <param name="a_FieldName">分析点视场名称</param>
  4926. /// <param name="a_FieldImagePositionID">分析点的视场位置ID,图像处理会返回多个Xray分析点,但我们这里只取第一个点所在的视场</param>
  4927. /// <returns>成功或失败</returns>
  4928. public bool DoEDS(int a_FieldID, string a_FieldName, int a_FieldImagePositionID)
  4929. {
  4930. try
  4931. {
  4932. //XrayID记录
  4933. log.Info("程序进入EDS测量!", true);
  4934. iExtender = factoryExtender.IExtender;
  4935. Thread.Sleep(500);
  4936. EDSParam param = m_measureFile.MParam.EDSParam;
  4937. double dDwellTime = param.DwellTime;
  4938. int nImageType = param.ImageType;
  4939. double dScanSizes = param.ScanSize;
  4940. log.Info("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  4941. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  4942. string path = EDS_path;
  4943. string edsfn = path + "\\" + a_FieldImagePositionID.ToString() + "_" + ImageNameEDS;
  4944. log.Info("EDS_PATH=" + edsfn, true);
  4945. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);//get the field eds image where the anylysis point locate.
  4946. //arg.State = false;
  4947. arg.Message = "";
  4948. arg.Picture_Information.Picture_FullPath = edsfn;
  4949. SendMsg("EDSPic");
  4950. //送给客户,计算感兴趣的区域
  4951. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  4952. List<System.Drawing.Point> LinesStartPoint = new List<System.Drawing.Point>();
  4953. List<List<Segment>> listFeature = new List<List<Segment>>();
  4954. List<int> lines_height = new List<int>();
  4955. System.Drawing.Point area_pt = new System.Drawing.Point();
  4956. int width = 1;
  4957. int height = 1;
  4958. int AreasNo = 0;
  4959. long[] XrayData;
  4960. Dictionary<string, double> listElement ;
  4961. int xrayCollectMode = param.XrayCollectMode;
  4962. switch (xrayCollectMode)
  4963. {
  4964. case 0://point mode
  4965. //点数据
  4966. int state = 0;
  4967. wr.EDS_Param_Points(edsfn, a_FieldImagePositionID, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listPoints, out state);
  4968. if (state == 0)
  4969. {
  4970. log.Error("点采集失败", false);
  4971. return false;
  4972. }
  4973. log.Info("返回 listPoints=" + listPoints.Count.ToString() , true);
  4974. if (!m_MeasDB.InsertAnylysisField(a_FieldID, a_FieldName, EDS_path, listPoints.Count, listFeature.Count, a_FieldImagePositionID))
  4975. {
  4976. log.Error("插入分析视场失败", false);
  4977. }
  4978. iExtender.BeginMultipleAquisition();
  4979. Thread.Sleep(100);
  4980. //点采集
  4981. m_nXrayId = 0;
  4982. foreach (System.Drawing.Point pt in listPoints)
  4983. {
  4984. XrayData = new long[2000];
  4985. listElement = new Dictionary<string, double>();
  4986. double realPointX, realPointY;
  4987. double currentPixelSize = iSEM.GetPixelSize();
  4988. log.Info("当前PixelSize:" + currentPixelSize.ToString());
  4989. realPointX = Convert.ToDouble(pt.X * currentPixelSize);
  4990. realPointY = pt.Y * currentPixelSize;
  4991. if (iExtender.XrayPointCollecting(param.PointTime, realPointX, realPointY, out XrayData, out listElement))
  4992. {
  4993. string ele = "";
  4994. foreach (var s in listElement)
  4995. {
  4996. ele += s.ToString();
  4997. }
  4998. log.Info("采集点:(" + pt.X.ToString() + ":" + pt.Y.ToString() + ") 元素:" + ele);
  4999. //写入数据库
  5000. m_nXrayId++;
  5001. log.Info("点采集结束,写入数据库开始--" + m_nXrayId.ToString(), true);
  5002. Boolean ret = m_MeasDB.InsertAPointXray(a_FieldID, m_nXrayId, pt.X, pt.Y, XrayData, listElement, a_FieldImagePositionID);
  5003. Thread.Sleep(1000);
  5004. }
  5005. }
  5006. iExtender.EndMultipleAquisition();
  5007. break;
  5008. case 1://line mode
  5009. log.Info("线扫描", true);
  5010. state = 0;
  5011. wr.EDS_Param_Lines(edsfn, a_FieldImagePositionID, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out LinesStartPoint, out lines_height, out state);
  5012. string sp="";
  5013. foreach (System.Drawing.Point p in LinesStartPoint)
  5014. {
  5015. sp += "(" + p.X + "," + p.Y + ")";
  5016. }
  5017. log.Info("线返回数据,lines=" + LinesStartPoint.Count.ToString()+ " "+sp, true);
  5018. if (state == 1)
  5019. {
  5020. //将线转换为segment数据
  5021. log.Info("将线转换为segment数据", true);
  5022. List<Segment> segments = new List<Segment>();
  5023. for (int i = 0; i < LinesStartPoint.Count; i++)
  5024. {
  5025. segments.Clear();
  5026. for (int j = 0; j <= lines_height[i]; j++)
  5027. {
  5028. Segment segment = new Segment();
  5029. segment.X = LinesStartPoint[i].X;
  5030. segment.Y = LinesStartPoint[i].Y+j ;
  5031. segment.Length = 1;
  5032. segments.Add(segment);
  5033. }
  5034. listFeature.Add(segments);
  5035. }
  5036. }
  5037. else
  5038. {
  5039. log.Error("线扫图片处理失败", false);
  5040. return false;
  5041. }
  5042. //线采集
  5043. iExtender.BeginMultipleAquisition();
  5044. Thread.Sleep(100);
  5045. for(int i=0;i<listFeature.Count;i++)
  5046. {
  5047. List<Segment> listSeg = listFeature[i];
  5048. XrayData = new long[2000];
  5049. listElement = new Dictionary<string, double>();
  5050. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  5051. {
  5052. string ele = "";
  5053. foreach (var s in listElement)
  5054. {
  5055. ele += s.ToString();
  5056. }
  5057. log.Info("采集时间=" + param.AreaTime.ToString(), true);
  5058. log.Info("("+listSeg[0].X+","+listSeg[0].Y+") height="+lines_height[i]+" 元素:" + ele);
  5059. log.Info("线采集结束,写入数据库开始", true);
  5060. //写入数据库
  5061. m_nXrayId++;
  5062. AreasNo++;
  5063. m_MeasDB.InsertAAreaXay(a_FieldID, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  5064. }
  5065. else
  5066. {
  5067. log.Error("线扫xray失败");
  5068. }
  5069. }
  5070. iExtender.EndMultipleAquisition();
  5071. break;
  5072. case 2: //area mode
  5073. //面数据
  5074. state = 0;
  5075. wr.EDS_Param_Areas(edsfn, a_FieldImagePositionID, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out area_pt, out width, out height, out state);
  5076. log.Info("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  5077. if (state == 1)
  5078. {
  5079. //将面转换为segment数据
  5080. List<Segment> segments = new List<Segment>();
  5081. for (int j = 0; j <= height; j++)
  5082. {
  5083. Segment segment = new Segment();
  5084. segment.X = area_pt.X;
  5085. segment.Y = area_pt.Y + j;
  5086. segment.Length = width;
  5087. segments.Add(segment);
  5088. }
  5089. listFeature.Add(segments);
  5090. }
  5091. else
  5092. {
  5093. log.Error("面扫图片处理失败", false);
  5094. return false;
  5095. }
  5096. //面采集
  5097. iExtender.BeginMultipleAquisition();
  5098. Thread.Sleep(100);
  5099. foreach (List<Segment> listSeg in listFeature)
  5100. {
  5101. XrayData = new long[2000];
  5102. listElement = new Dictionary<string, double>();
  5103. log.Info("AreaTime=" + param.AreaTime.ToString(), true);
  5104. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  5105. {
  5106. string ele = "";
  5107. foreach (var s in listElement)
  5108. {
  5109. ele += s.ToString();
  5110. }
  5111. log.Info(" 元素:" + ele);
  5112. log.Info("面采集结束,写入数据库开始", true);
  5113. //写入数据库
  5114. m_nXrayId++;
  5115. AreasNo++;
  5116. m_MeasDB.InsertAAreaXay(a_FieldID, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  5117. }
  5118. else
  5119. {
  5120. log.Error("面扫xray失败");
  5121. }
  5122. }
  5123. iExtender.EndMultipleAquisition();
  5124. break;
  5125. }
  5126. //存储数据
  5127. //向分析点数据库更新
  5128. }
  5129. catch (Exception e)
  5130. {
  5131. iExtender.EndMultipleAquisition();
  5132. log.Error(e.Message, false);
  5133. return false;
  5134. }
  5135. return true;
  5136. }
  5137. /// <summary>
  5138. /// 初始化数据库
  5139. /// </summary>
  5140. public void Init_MeasDB()
  5141. {
  5142. m_MeasDB = new MeasureDB(m_measureFile);
  5143. }
  5144. /// <summary>
  5145. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  5146. /// </summary>
  5147. /// <returns></returns>
  5148. public bool EDS_FindCross()
  5149. {
  5150. float x2 = 0, y2 = 0;
  5151. int state = 0;
  5152. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5153. //float m_TempBrightness = 50.0f;
  5154. //float m_TempContrast = 30.0f;
  5155. //if (m_measureFile.MParam.SampleName == "3")
  5156. //{
  5157. // m_TempBrightness = 48.0f;
  5158. // m_TempContrast = 29.0f;
  5159. //}
  5160. //else if (m_measureFile.MParam.SampleName == "0")
  5161. //{
  5162. // m_TempBrightness = 50.0f;
  5163. // m_TempContrast = 28.0f;
  5164. //}
  5165. ////add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5166. //iSEM.SetAutoVideoOff();
  5167. //Thread.Sleep(200);
  5168. //iSEM.SetBrightness(m_TempBrightness);//50.0f
  5169. //Thread.Sleep(200);
  5170. //iSEM.SetContrast(m_TempContrast);//30.0f
  5171. //Thread.Sleep(200);
  5172. //1.控制SEM放大到300倍
  5173. //float mag = m_measureFile.MParam.Photograph_Magnification / 3;
  5174. float mag = 400;
  5175. // float mag = 200;
  5176. if (mag < 200)
  5177. {
  5178. mag = 200;
  5179. }
  5180. if (!iSEM.SetMagnification(mag))
  5181. {
  5182. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  5183. arg.State = false;
  5184. SendMsg("1-24");
  5185. log.Error("测量线程报错:" + arg.Message, false);
  5186. return false;
  5187. }
  5188. Thread.Sleep(200);
  5189. float current = iSEM.GetMagnification();
  5190. Thread.Sleep(200);
  5191. while (Math.Abs(current - mag) > 2)
  5192. {
  5193. iSEM.SetMagnification(mag);
  5194. Thread.Sleep(200);
  5195. current = iSEM.GetMagnification();
  5196. Thread.Sleep(200);
  5197. }
  5198. Thread.Sleep(2000);
  5199. //判断是否停止进程
  5200. if (key_stop)
  5201. {
  5202. log.Info("停止键按下", true);
  5203. return false;
  5204. }
  5205. //3.控制SEM拍照
  5206. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
  5207. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5208. String fileName4 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS4;
  5209. log.Info("fileName4=============" + fileName4, true);
  5210. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5211. arg.Picture_Information.Picture_FullPath = fileName4;
  5212. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5213. Thread.Sleep(200);
  5214. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5215. Thread.Sleep(200);
  5216. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5217. Thread.Sleep(200);
  5218. //拍照前改变速度,延时
  5219. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5220. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5221. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5222. Thread.Sleep(200);
  5223. cycle_time = iSEM.GetCycleTime();
  5224. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5225. if (!GetImage(fileName4))
  5226. {
  5227. arg.State = false;
  5228. arg.Message = "SEM拍照找切割位置失败";
  5229. //SendMsg("1-25");
  5230. log.Error("测量线程报错:" + arg.Message, false);
  5231. return false;
  5232. }
  5233. //arg.Picture_Information.Picture_FullPath = fileName4;
  5234. arg.State = true;
  5235. arg.Message = "SEM拍照成功";
  5236. log.Info("测量线程" + arg.Message, false);
  5237. //SendMsg("1-25");
  5238. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5239. Thread.Sleep(200);
  5240. cycle_time = iSEM.GetCycleTime();
  5241. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5242. //判断是否停止进程
  5243. if (key_stop)
  5244. {
  5245. return false;
  5246. }
  5247. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  5248. //5.根据坐标控制SEM移动到切孔位置,居中
  5249. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  5250. log.Info("文件名=" + fileName4, true);
  5251. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  5252. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  5253. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  5254. if (state == 1)
  5255. {
  5256. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  5257. if (!MoveToPixByMoveStage(x2, y2))
  5258. {
  5259. //arg.State = false;
  5260. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  5261. //SendMsg("1-26");
  5262. log.Error("测量线程报错:" + arg.Message, false);
  5263. return false;
  5264. }
  5265. //判断是否移动完成
  5266. while (true)
  5267. {
  5268. Thread.Sleep(4000);
  5269. if (iSEM.GetStageIs() == 0)
  5270. {
  5271. break;
  5272. }
  5273. }
  5274. //arg.State = true;
  5275. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  5276. //SendMsg("1-26");
  5277. //高倍到低倍不进行对焦
  5278. //拍照前改变速度,延时
  5279. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5280. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5281. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5282. Thread.Sleep(200);
  5283. cycle_time = iSEM.GetCycleTime();
  5284. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5285. if (hand_intervene == 1)
  5286. {
  5287. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5288. }
  5289. }
  5290. else
  5291. {
  5292. arg.Message = "图像接口参数state返回值为零";
  5293. arg.State = false;
  5294. SendMsg("1-26");
  5295. if (hand_intervene == 1)
  5296. {
  5297. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5298. {
  5299. return false;
  5300. }
  5301. }
  5302. else
  5303. {
  5304. return false;
  5305. }
  5306. log.Error("测量线程报错:" + arg.Message, false);
  5307. return false;
  5308. }
  5309. //判断是否停止进程
  5310. if (key_stop)
  5311. {
  5312. log.Info("停止键按下", true);
  5313. return false;
  5314. }
  5315. return true;
  5316. }
  5317. /// <summary>
  5318. /// 171.能谱第17步找点采集数据
  5319. /// </summary>
  5320. /// <returns></returns>
  5321. public bool EDS_ShotSection()
  5322. {
  5323. int state = 0;
  5324. #region 设置拍照的电压
  5325. //log.Info("测量线程:设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true);
  5326. //1、放大倍数参数photograph_
  5327. //if (!iSEM.SetSEMVoltage(2000)) //m_measureFile.MParam.Photograph_Voltage
  5328. //{
  5329. // arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败";
  5330. // arg.State = false;
  5331. // SendMsg("1-27");
  5332. // log.Error("测量线程报错:" + arg.Message, false);
  5333. // return false;
  5334. //}
  5335. //add
  5336. #endregion
  5337. Thread.Sleep(200);
  5338. #region 设置拍照的放大倍数
  5339. log.Info("设置拍照放大倍数=" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  5340. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5341. {
  5342. arg.Message = "放大倍数调整失败";
  5343. log.Error(arg.Message, false);
  5344. return false;
  5345. }
  5346. float set = m_measureFile.MParam.Photograph_Magnification;
  5347. float current = iSEM.GetMagnification();
  5348. while (Math.Abs(current - set) > 1)
  5349. {
  5350. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  5351. Thread.Sleep(200);
  5352. current = iSEM.GetMagnification();
  5353. }
  5354. Thread.Sleep(3000 + (Int32)cycle_time);
  5355. //判断是否停止进程
  5356. if (key_stop)
  5357. {
  5358. log.Info("停止键按下", true);
  5359. return false;
  5360. }
  5361. #endregion
  5362. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  5363. //2.控制SEM自动对焦、亮度、对比度-接口
  5364. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  5365. if ((m_measureFile.MParam.SampleName == "2") || (m_measureFile.MParam.SampleName == "3"))
  5366. iSEM.SetReduced(402, 128, 600, 600);
  5367. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  5368. iSEM.SetReduced(402, 128, 340, 256);
  5369. Thread.Sleep(200);
  5370. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  5371. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5372. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  5373. Thread.Sleep(200);
  5374. cycle_time = iSEM.GetCycleTime();
  5375. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5376. //log.Info("关闭自动亮度对比度!", true);
  5377. //iSEM.SetAutoVideoOff();
  5378. //Thread.Sleep(5000);
  5379. log.Info("自动对焦开始!", true);
  5380. if (!ImageFocus1(false))
  5381. {
  5382. log.Error("自动对焦失败", false);
  5383. return false;
  5384. }
  5385. iSEM.CloseReduced();
  5386. Thread.Sleep(200);
  5387. cycle_time = iSEM.GetCycleTime();
  5388. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  5389. //判断是否停止进程
  5390. if (key_stop)
  5391. {
  5392. log.Info("停止键按下", true);
  5393. return false;
  5394. }
  5395. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5396. //float m_TempBrightness = 50.0f;
  5397. //float m_TempContrast = 30.0f;
  5398. //if (m_measureFile.MParam.SampleName == "3")
  5399. //{
  5400. // m_TempBrightness = 50f;
  5401. // m_TempContrast = 29f;
  5402. // iSEM.SetBrightness(m_TempBrightness); //50.0f
  5403. // Thread.Sleep(200);
  5404. // iSEM.SetContrast(m_TempContrast); //30.0f
  5405. // Thread.Sleep(200);
  5406. //}
  5407. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5408. log.Info("开启自动亮度对比度", false);
  5409. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5410. {
  5411. log.Error("开启自动亮度对比度失败", false);
  5412. return false;
  5413. }
  5414. Thread.Sleep(3000);
  5415. //3、设置SEM补偿角度
  5416. if (m_measureFile.MParam.Is_Photograph == false)
  5417. {
  5418. log.Info("角度补偿" + m_measureFile.MParam.Correction_Angle.ToString() + "度", true);
  5419. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  5420. {
  5421. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  5422. arg.State = false;
  5423. log.Error( arg.Message, false);
  5424. return false;
  5425. }
  5426. Thread.Sleep(200);
  5427. //判断是否停止进程
  5428. if (key_stop)
  5429. {
  5430. log.Error("停止键按下", false);
  5431. return false;
  5432. }
  5433. }
  5434. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5435. String fileName5 = data_path + "\\EDS\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  5436. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5437. log.Info("fileName5=" + fileName5, true);
  5438. arg.Picture_Information.Picture_FullPath = fileName5;
  5439. arg.Picture_Information.Work_Status = "SEM";
  5440. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5441. Thread.Sleep(200);
  5442. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5443. Thread.Sleep(200);
  5444. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5445. Thread.Sleep(200);
  5446. //拍照前改变速度,延时
  5447. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5448. log.Info("改变刷新率为 " + m_measureFile.MParam.ScanSpeedHigh);
  5449. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5450. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5451. Thread.Sleep(200);
  5452. cycle_time = iSEM.GetCycleTime();
  5453. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  5454. log.Info("开始拍摄截面照!");
  5455. if (!GetImage(fileName5))
  5456. {
  5457. arg.Message = "SEM拍照失败";
  5458. log.Error( arg.Message, false);
  5459. return false;
  5460. }
  5461. log.Info("改变刷新率为 " + m_measureFile.MParam.ScanSpeedNormal);
  5462. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5463. Thread.Sleep(200);
  5464. cycle_time = iSEM.GetCycleTime();
  5465. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5466. //判断是否停止进程
  5467. if (key_stop)
  5468. {
  5469. log.Info("停止键按下", true);
  5470. return false;
  5471. }
  5472. #endregion
  5473. if (m_measureFile.MParam.Is_Photograph == false)//Is_Photograph 代表 是否是只拍照
  5474. {
  5475. #region 对当前矩形进行旋转校正
  5476. //8,计算切割面区域偏移角度及方向
  5477. float degree = 0;
  5478. int direction = 0;
  5479. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  5480. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  5481. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  5482. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  5483. if (state == 1)
  5484. {
  5485. //梯形角度
  5486. iSEM.SetScanRotationOn();
  5487. Thread.Sleep(200);
  5488. //20201128陈工要求,谭博返回角度*0.7
  5489. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  5490. Thread.Sleep(200);
  5491. arg.State = true;
  5492. arg.Message = "图像接口返回角度为:" + degree.ToString();
  5493. SendMsg("1-31");
  5494. if (hand_intervene == 1)
  5495. {
  5496. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5497. }
  5498. }
  5499. else
  5500. {
  5501. arg.Message = "图像接口参数State返回值为零";
  5502. arg.State = false;
  5503. SendMsg("1-31");
  5504. if (hand_intervene == 1)
  5505. {
  5506. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5507. {
  5508. return false;
  5509. }
  5510. }
  5511. else
  5512. {
  5513. //return false;
  5514. }
  5515. log.Error("测量线程报错:" + arg.Message, false);
  5516. }
  5517. //判断是否停止进程
  5518. if (key_stop)
  5519. {
  5520. log.Info("停止键按下", true);
  5521. return false;
  5522. }
  5523. Thread.Sleep(200);
  5524. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5525. String fileName6 = data_path + "\\EDS\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  5526. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5527. log.Info("fileName6=" + fileName6, true);
  5528. arg.Picture_Information.Picture_FullPath = fileName6;
  5529. arg.Picture_Information.Work_Status = "SEM";
  5530. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5531. Thread.Sleep(200);
  5532. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5533. Thread.Sleep(200);
  5534. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5535. Thread.Sleep(200);
  5536. //拍照前改变速度,延时
  5537. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5538. log.Info("改变刷新率为 " + m_measureFile.MParam.ScanSpeedHigh);
  5539. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5540. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5541. Thread.Sleep(200);
  5542. cycle_time = iSEM.GetCycleTime();
  5543. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5544. log.Info("纠正后拍照!");
  5545. if (!GetImage(fileName6))
  5546. {
  5547. arg.Message = "SEM拍照失败";
  5548. log.Error( arg.Message, false);
  5549. return false;
  5550. }
  5551. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5552. Thread.Sleep(200);
  5553. cycle_time = iSEM.GetCycleTime();
  5554. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5555. //判断是否停止进程
  5556. if (key_stop)
  5557. {
  5558. log.Info("停止键按下", true);
  5559. return false;
  5560. }
  5561. #endregion
  5562. #region 获取两个位置上及放大倍数
  5563. //计算两个测量区域坐标
  5564. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  5565. List<float> mag = new List<float>();
  5566. System.Drawing.Point ct0;
  5567. float mag1, mag2, magMax;
  5568. log.Info("图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() , true);
  5569. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  5570. string s = "";
  5571. for (int i = 0; i < ct.Count; i++)
  5572. {
  5573. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  5574. + "放大倍数=" + mag[i];
  5575. }
  5576. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  5577. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  5578. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  5579. "输入厂商" + m_measureFile.MParam.Firm.ToString() +
  5580. s +
  5581. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  5582. #endregion
  5583. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  5584. {
  5585. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  5586. float xs = iSEM.GetBeamShiftX();
  5587. Thread.Sleep(200);
  5588. float ys = iSEM.GetBeamShiftY();
  5589. Thread.Sleep(200);
  5590. float xpCur = iSEM.GetStageAtX();
  5591. Thread.Sleep(200);
  5592. float ypCur = iSEM.GetStageAtY();
  5593. Thread.Sleep(200);
  5594. log.Info("原来的光束偏移量x = " + xs.ToString()
  5595. + "y=" + ys.ToString() + ","
  5596. + "原来样品台的位置x= " + xpCur.ToString()
  5597. + "y=" + ypCur.ToString(), true);
  5598. #endregion
  5599. //找到放大倍数最大值
  5600. magMax = mag[0];
  5601. for (int m = 1; m < mag.Count; m++)
  5602. {
  5603. if (mag[m] > magMax)
  5604. {
  5605. magMax = mag[m];
  5606. }
  5607. }
  5608. #region 移动到梯形左上角
  5609. //20201127将视野移动到梯形左上角位置
  5610. log.Warn("开始对焦 移动到对焦点( " + ct0.X.ToString()
  5611. + "," + ct0.Y.ToString() + ")", true);
  5612. MoveToPix(ct0.X, ct0.Y);
  5613. //关闭自动亮度对比度
  5614. //iSEM.SetAutoVideoOff();
  5615. //Thread.Sleep(2000);
  5616. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5617. //if (m_measureFile.MParam.SampleName == "3")
  5618. //{
  5619. // m_TempBrightness = 50f;
  5620. // m_TempContrast = 29f;
  5621. // iSEM.SetBrightness(m_TempBrightness); //50.0f
  5622. // Thread.Sleep(200);
  5623. // iSEM.SetContrast(m_TempContrast); //30.0f
  5624. // Thread.Sleep(200);
  5625. //}
  5626. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5627. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  5628. if (m_measureFile.MParam.SampleName == "3")
  5629. {
  5630. iSEM.SetReduced(402, 128, 480, 450);
  5631. }
  5632. else
  5633. {
  5634. iSEM.SetReduced(402, 128, 480, 450);
  5635. }
  5636. Thread.Sleep(200);
  5637. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  5638. log.Info("改变刷新率");
  5639. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5640. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  5641. Thread.Sleep(200);
  5642. cycle_time = iSEM.GetCycleTime();
  5643. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5644. //放大到6000倍
  5645. log.Info("放大到倍数" + magMax / 4);
  5646. iSEM.SetMagnification(magMax / 4);
  5647. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5648. set = magMax / 4;
  5649. current = iSEM.GetMagnification();
  5650. while (Math.Abs(current - set) > 1)
  5651. {
  5652. iSEM.SetMagnification(set);
  5653. Thread.Sleep(200);
  5654. current = iSEM.GetMagnification();
  5655. }
  5656. if (m_measureFile.MParam.SampleName == "3")
  5657. {
  5658. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  5659. iSEM.SetBrightness(50.0f); //50.0f
  5660. Thread.Sleep(200);
  5661. iSEM.SetContrast(30.0f); //30.0f
  5662. Thread.Sleep(200);
  5663. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  5664. }
  5665. //自动对焦
  5666. log.Info("开始自动聚焦 " + set.ToString() + "倍", true);
  5667. if (!ImageFocus1(true))
  5668. {
  5669. log.Error("========测量线程:自动聚焦失败!" + set.ToString() + "倍", false);
  5670. return false;
  5671. }
  5672. //放大到10000倍
  5673. log.Info("放大到倍数" + magMax/2);
  5674. iSEM.SetMagnification(magMax/2);
  5675. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5676. set = magMax/2;
  5677. current = iSEM.GetMagnification();
  5678. while (Math.Abs(current - set) > 1)
  5679. {
  5680. iSEM.SetMagnification(set);
  5681. Thread.Sleep(200);
  5682. current = iSEM.GetMagnification();
  5683. }
  5684. //自动对焦
  5685. log.Info("开始自动聚焦 " + set.ToString() + "倍", true);
  5686. if (!ImageFocus1(true))
  5687. {
  5688. log.Info("自动聚焦失败!" + set.ToString() + "倍", true);
  5689. return false;
  5690. }
  5691. iSEM.CloseReduced();
  5692. Thread.Sleep(200);
  5693. cycle_time = iSEM.GetCycleTime();
  5694. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5695. #endregion
  5696. log.Warn("对焦完成,开始用能谱拍摄观测点照片!并分析图片以获得Xray点位置!");
  5697. #region 恢复到拍照的状态
  5698. log.Info("恢复到拍照的状态!");
  5699. iSEM.SetStageGotoX(xpCur);
  5700. while (true)
  5701. {
  5702. Thread.Sleep(4000);
  5703. if (iSEM.GetStageIs() == 0)
  5704. {
  5705. break;
  5706. }
  5707. }
  5708. iSEM.SetStageGotoY(ypCur);
  5709. while (true)
  5710. {
  5711. Thread.Sleep(4000);
  5712. if (iSEM.GetStageIs() == 0)
  5713. {
  5714. break;
  5715. }
  5716. }
  5717. //恢复原来的放大倍数
  5718. log.Info("恢复原来的放大倍数!"+ m_measureFile.MParam.Photograph_Magnification);
  5719. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5720. {
  5721. log.Error("恢复放大倍数失败",false);
  5722. return false;
  5723. }
  5724. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5725. set = m_measureFile.MParam.Photograph_Magnification;
  5726. current = iSEM.GetMagnification();
  5727. while (Math.Abs(current - set) > 1)
  5728. {
  5729. iSEM.SetMagnification(set);
  5730. Thread.Sleep(200);
  5731. current = iSEM.GetMagnification();
  5732. }
  5733. //恢复BeamShift的百分比值
  5734. iSEM.SetBeamShiftX(xs);
  5735. Thread.Sleep(200);
  5736. iSEM.SetBeamShiftY(ys);
  5737. Thread.Sleep(200);
  5738. #endregion
  5739. log.Warn("移动到指定观测点!并准备打Xray");
  5740. if (!MoveToPix(ct[0].X, ct[0].Y))
  5741. {
  5742. log.Error("移动到第一个点位置失败", false);
  5743. }
  5744. Thread.Sleep(5000);//wait untill the auto brightness and auto contrast finished!
  5745. }
  5746. #endregion
  5747. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  5748. #region 拍照
  5749. log.Info("进入内部观察,不对焦!", true);
  5750. log.Info("开始拍照,设置放大倍数" + mag[0]);
  5751. if (!iSEM.SetMagnification(mag[0]))
  5752. {
  5753. log.Error("移动到第一个点位置拍照失败", false);
  5754. return false;
  5755. }
  5756. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5757. set = mag[0];
  5758. current = iSEM.GetMagnification();
  5759. while (Math.Abs(current - set) > 1)
  5760. {
  5761. iSEM.SetMagnification(set);
  5762. Thread.Sleep(200);
  5763. current = iSEM.GetMagnification();
  5764. }
  5765. Thread.Sleep(200);
  5766. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5767. String fileName7 = data_path + "\\EDS\\" + m_measureFile.MParam.Firm + "-" + mag[0].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-0-" + ImageNameTwo_1;
  5768. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5769. log.Info("fileName7=" + fileName7, true);
  5770. arg.Picture_Information.Picture_FullPath = fileName7;
  5771. arg.Picture_Information.Work_Status = "SEM";
  5772. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5773. Thread.Sleep(200);
  5774. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5775. Thread.Sleep(200);
  5776. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5777. Thread.Sleep(200);
  5778. //拍照前改变速度,延时
  5779. iSEM.CmdLineScan();
  5780. Thread.Sleep(200);
  5781. cycle_time = iSEM.GetCycleTime();
  5782. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5783. log.Warn("EDS获取指定观测点图片,并打Xray");
  5784. DoEDS(m_nWorkHoleNo, m_cutHoles[m_nWorkHoleNo].HoleName, 1);
  5785. log.Info("像素扫描:CmdPixelScan");
  5786. iSEM.CmdPixelScan();
  5787. Thread.Sleep(200);
  5788. log.Info("改变刷新率 " +m_measureFile.MParam.ScanSpeedNormal);
  5789. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5790. Thread.Sleep(200);
  5791. cycle_time = iSEM.GetCycleTime();
  5792. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5793. #endregion
  5794. }
  5795. iSEM.SetTiltAngleOff();
  5796. Thread.Sleep(200);
  5797. iSEM.SetScanRotationOff();
  5798. Thread.Sleep(200);
  5799. iSEM.SetBeamShiftX(0);
  5800. Thread.Sleep(200);
  5801. iSEM.SetBeamShiftY(0);
  5802. Thread.Sleep(200);
  5803. //判断是否停止进程
  5804. return true;
  5805. }
  5806. /// <summary>
  5807. /// 19.能谱分析
  5808. /// </summary>
  5809. /// <returns></returns>
  5810. public bool EDS_Analysis()
  5811. {
  5812. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  5813. if (m_measureFile.MParam.EDSZ < Z_Min || m_measureFile.MParam.EDSZ > Z_Max)
  5814. {
  5815. log.Info("Z轴位置设置超出范围.", true);
  5816. return false;
  5817. }
  5818. log.Info("将Z轴位置指定到:" + m_measureFile.MParam.EDSZ.ToString(), true);
  5819. if (!iSEM.SetStageGotoZ(m_measureFile.MParam.EDSZ))
  5820. {
  5821. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  5822. return false;
  5823. }
  5824. while (true)
  5825. {
  5826. Thread.Sleep(2000);
  5827. if (iSEM.GetStageIs() == 0)
  5828. {
  5829. break;
  5830. }
  5831. }
  5832. //判断是否停止进程
  5833. if (key_stop)
  5834. {
  5835. log.Info("停止键按下", true);
  5836. return false;
  5837. }
  5838. //2.角度改为54度
  5839. iSEM.SetScanRotationOff();
  5840. Thread.Sleep(200);
  5841. iSEM.SetSEMVoltage(7000);
  5842. Thread.Sleep(500);
  5843. iSEM.SetSEMIPROBE(0.5F / 1000000000);
  5844. Thread.Sleep(500);
  5845. iSEM.SetAutoVideoBrightnessAndContrast();
  5846. //iSEM.SetAutoVideoBrightness();
  5847. //iSEM.SetAutoVideoContrast();
  5848. Thread.Sleep(2000);
  5849. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5850. //关闭自动亮度对比度
  5851. //iSEM.SetAutoVideoOff();
  5852. //Thread.Sleep(1000);
  5853. //float m_TempBrightness = 50f;
  5854. //float m_TempContrast = 29f;
  5855. //if (m_measureFile.MParam.SampleName == "3")
  5856. //{
  5857. // m_TempBrightness = 50f;
  5858. // m_TempContrast = 29f;
  5859. //}
  5860. //else if (m_measureFile.MParam.SampleName == "0")
  5861. //{
  5862. // m_TempBrightness = 50f;
  5863. // m_TempContrast = 28f;
  5864. //}
  5865. //iSEM.SetBrightness(m_TempBrightness); //50.0f
  5866. //Thread.Sleep(200);
  5867. //iSEM.SetContrast(m_TempContrast); //30.0f
  5868. //Thread.Sleep(1000);
  5869. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5870. iSEM.SetMagnification(600);
  5871. Thread.Sleep(500);
  5872. //5.自动对焦
  5873. iSEM.SetReduced(256, 192, 512, 512);
  5874. Thread.Sleep(200);
  5875. //add by sun 2020-12-15
  5876. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5877. //add by sun 2020-12-15 end
  5878. Thread.Sleep(200);
  5879. cycle_time = iSEM.GetCycleTime();
  5880. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5881. if (!ImageFocus1(false))
  5882. {
  5883. return false;
  5884. }
  5885. iSEM.CloseReduced();
  5886. Thread.Sleep(200);
  5887. cycle_time = iSEM.GetCycleTime();
  5888. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5889. //6.调用161步过程
  5890. log.Warn("开始梯形移到视野中心!");
  5891. iSEM.SetMagnification(600);
  5892. Thread.Sleep(300);
  5893. if (!EDS_FindCross())
  5894. {
  5895. return false;
  5896. }
  5897. Thread.Sleep(500);
  5898. //7.调用171步过程
  5899. log.Warn("开始打能谱图和打Xray!");
  5900. if (!EDS_ShotSection())
  5901. {
  5902. return false;
  5903. }
  5904. return true;
  5905. }
  5906. /// <summary>
  5907. /// 20.光束等复位
  5908. /// </summary>
  5909. public void BeamShiftReset()
  5910. {
  5911. iSEM.SetTiltAngleOff();
  5912. Thread.Sleep(200);
  5913. iSEM.SetScanRotationOff();
  5914. Thread.Sleep(200);
  5915. iSEM.SetBeamShiftX(0);
  5916. Thread.Sleep(200);
  5917. iSEM.SetBeamShiftY(0);
  5918. Thread.Sleep(200);
  5919. }
  5920. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  5921. #region 设置电压电流
  5922. public bool SetVoltageAndIPROBE()
  5923. {
  5924. log.Info("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  5925. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  5926. bool mRet_VoltageFlag = false;
  5927. bool mRet_ElecFlag = false;
  5928. if (m_measureFile.MParam.SampleName != "3")
  5929. {
  5930. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  5931. Thread.Sleep(500);
  5932. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  5933. Thread.Sleep(500);
  5934. }
  5935. else
  5936. {
  5937. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  5938. Thread.Sleep(500);
  5939. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  5940. Thread.Sleep(500);
  5941. }
  5942. if (!mRet_VoltageFlag) return false;
  5943. if (!mRet_ElecFlag) return false;
  5944. log.Info("测量线程:设置电压电流完成!" , true);
  5945. return true;
  5946. }
  5947. #endregion
  5948. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  5949. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  5950. #region 拍照
  5951. public bool GetImageFromSEM(float a_Mag) {
  5952. log.Info("设置放大倍数"+a_Mag, true);
  5953. if (!iSEM.SetMagnification(a_Mag))
  5954. {
  5955. log.Error("设置放大倍数" + a_Mag.ToString() + "失败", false);
  5956. return false;
  5957. }
  5958. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5959. String m_FileName = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + a_Mag.ToString() + "_0_" + ImageNameTwo_1;
  5960. //拍照前改变速度,延时
  5961. iSEM.CmdLineScan();
  5962. Thread.Sleep(200);
  5963. cycle_time = iSEM.GetCycleTime();
  5964. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5965. if (!GetImage(m_FileName))
  5966. {
  5967. log.Error("测量线程报错:========" + arg.Message, false);
  5968. return false;
  5969. }
  5970. log.Info("========测量线程:移动到第一个点位置完成!", true);
  5971. return true;
  5972. }
  5973. #endregion
  5974. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  5975. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息
  5976. public void SaveMeasDataPic(String picFullPath,float Mag,float pixelsize)
  5977. {
  5978. try
  5979. {
  5980. using (System.Drawing.Image img = Image.FromFile(picFullPath))
  5981. {
  5982. //Bitmap bmp = new Bitmap(img.Width, img.Height);
  5983. // add by zjx 2020-12-24 根据客户要求把标尺的图片修改成8位颜色
  5984. Bitmap bmp = new Bitmap(img.Width, img.Height);
  5985. // add by zjx 2020-12-24 根据客户要求把标尺的图片修改成8位颜色 end
  5986. using (Graphics g = Graphics.FromImage(bmp))
  5987. {
  5988. g.DrawImage(img, 0, 0, img.Width, img.Height);
  5989. String str = "Mag:" + Mag.ToString("0") + "X\tPixelSize:" + (pixelsize * 1000000).ToString("0.00") + "um";
  5990. Font font =new Font("宋体", 16, FontStyle.Bold);
  5991. SolidBrush sbrush = new SolidBrush(Color.LimeGreen);
  5992. g.DrawString(str, font, sbrush, new PointF(40, img.Height - 30));
  5993. }
  5994. String path1 = Path.GetDirectoryName(picFullPath) + Path.GetFileNameWithoutExtension(picFullPath) + "_Data." + Path.GetExtension(picFullPath);
  5995. log.Info("Path.GetDirectoryName(picFullPath)==" + Path.GetDirectoryName(picFullPath) + "Path.GetFileNameWithoutExtension(picFullPath)==" + Path.GetFileNameWithoutExtension(picFullPath) + "Path.GetExtension(picFullPath)==" + Path.GetExtension(picFullPath), true);
  5996. log.Info("在测量图上显示放大倍数和像素大小信息==============="+ path1, true);
  5997. bmp.Save(path1);
  5998. }
  5999. }
  6000. catch
  6001. {
  6002. log.Error("在测量图上显示放大倍数和像素大小信息失败", false);
  6003. }
  6004. }
  6005. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息 end
  6006. }
  6007. }