Measure.cs 40 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. public class ThreadStatusEventArgs
  26. {
  27. public string State
  28. {
  29. get { return m_state; }
  30. set { m_state = value; }
  31. }
  32. private string m_state;
  33. public DateTime Time
  34. {
  35. get { return m_time; }
  36. set { m_time = value; }
  37. }
  38. private DateTime m_time;
  39. public ThreadStatusEventArgs(string a_State)
  40. {
  41. this.m_state = a_State;
  42. }
  43. }
  44. public class CutHolesStatusEventArgs
  45. {
  46. public string State
  47. {
  48. get { return m_state; }
  49. set { m_state = value; }
  50. }
  51. private string m_state;
  52. public string HoleName
  53. {
  54. get { return m_holeName; }
  55. set { m_holeName = value; }
  56. }
  57. private string m_holeName;
  58. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  59. {
  60. this.m_state = a_state;
  61. this.m_holeName = a_holeName;
  62. }
  63. }
  64. public class Measure
  65. {
  66. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  67. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  68. //全局只有一个fatorySEM
  69. static FactoryHardware factorySEM = FactoryHardware.Instance;
  70. ISEMControl iSEM = factorySEM.ISEM;
  71. //@的作用是不用转义字符\\只打一个就行
  72. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  73. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  74. const String ImageName3 = @"ImageFIB600X2.tif";
  75. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  76. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  77. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  78. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  79. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  80. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  81. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  82. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  83. const String ElyDeposition = @"Deposition.ely"; //沉积
  84. const String ElyCrossSection = @"CrossSection.ely"; //切割
  85. const float fMin = (float)0.0000002; //单位是米
  86. int m_nWorkHoleNo = -1;
  87. //测量文件
  88. private MeasureFile m_measureFile;
  89. public MeasureFile MeasureFile
  90. {
  91. get { return this.m_measureFile; }
  92. set { this.m_measureFile = value; }
  93. }
  94. //测量的切割孔
  95. private List<MeasureData.CutHole> m_cutHoles;
  96. public List<MeasureData.CutHole> cutHoles
  97. {
  98. get { return this.m_cutHoles; }
  99. set { this.m_cutHoles = value; }
  100. }
  101. //工作文件夹
  102. private string m_WorkingFolder;
  103. public string WorkingFolder
  104. {
  105. get { return this.m_WorkingFolder; }
  106. set { this.m_WorkingFolder = value; }
  107. }
  108. //程序当前路径
  109. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  110. //线程状态
  111. private ThreadStatus m_ThreadStatus;
  112. public ThreadStatus TStatus
  113. {
  114. get { return this.m_ThreadStatus; }
  115. set { this.m_ThreadStatus = value; }
  116. }
  117. //测量参数
  118. private MeasureParam m_MsParam;
  119. public MeasureParam MeasParam
  120. {
  121. get { return this.m_MsParam; }
  122. set { this.m_MsParam = value; }
  123. }
  124. //构造函数
  125. public Measure()
  126. {
  127. Init();
  128. }
  129. private void Init()
  130. {
  131. MeasParam = new MeasureParam();
  132. TStatus = new ThreadStatus();
  133. cutHoles = new List<MeasureData.CutHole>();
  134. }
  135. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  136. public bool InitMeas(MeasureFile a_measureFile)
  137. {
  138. m_measureFile = a_measureFile;
  139. List<CutHole> listHoles = m_measureFile.ListCutHole;
  140. foreach (CutHole h in listHoles)
  141. {
  142. if (h.SWITCH == true)
  143. {
  144. m_cutHoles.Add(h);
  145. }
  146. }
  147. if (m_cutHoles.Count == 0)
  148. return false;
  149. this.m_MsParam = m_measureFile.MParam;
  150. return true;
  151. }
  152. public void SendMsg(string a_StrMsg)
  153. {
  154. ThreadStatusEventArgs arg = new ThreadStatusEventArgs(a_StrMsg);
  155. arg.Time = DateTime.Now;
  156. SendThreadStatus(this, arg);
  157. }
  158. //测量流程
  159. public void DoMeasure()
  160. {
  161. //创建线程的测量状态的更新
  162. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  163. if (SendThreadStatus != null)
  164. {
  165. SendMsg("开始测量。");
  166. }
  167. //检查硬件连接是否正常
  168. if (!ConnectHardware())
  169. {
  170. SendMsg("连接硬件失败。");
  171. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  172. return;
  173. }
  174. SendMsg("硬件连接成功。");
  175. //设置工作文件夹
  176. if (!SetWorkingFolderStr())
  177. {
  178. SendMsg("设置工作文件夹失败");
  179. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  180. return;
  181. }
  182. SendMsg("创建工作文件路径为" + WorkingFolder);
  183. float[] firstPosition;
  184. for (int i = 0; i < m_cutHoles.Count; i++)
  185. {
  186. m_nWorkHoleNo = i;
  187. if (i == 0)
  188. {
  189. SendMsg("第一个切孔开始测量");
  190. firstPosition = iSEM.GetStagePosition();
  191. //第一个孔的测试
  192. FirstHole();
  193. }
  194. else
  195. {
  196. //非第一个孔的测试
  197. SendMsg("第" + i.ToString() + "个切孔开始测量");
  198. OtherHole();
  199. }
  200. }
  201. }
  202. //检查硬件连接是否正常
  203. public bool ConnectHardware()
  204. {
  205. //返回硬件的连接状态
  206. return iSEM.ConnectStatus();
  207. }
  208. //设置工作文件夹
  209. public bool SetWorkingFolderStr()
  210. {
  211. WorkingFolder = m_measureFile.FilePath;
  212. return true;
  213. ////获取工作文件路径
  214. //string pathName = m_measureFile.FilePath;
  215. ////判断工作文件路径是否为空或无效
  216. //if (string.IsNullOrEmpty(pathName))
  217. //{
  218. // SendMsg("路径无效");
  219. // return false;
  220. //}
  221. ////文件未保存
  222. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  223. //{
  224. // SendMsg("工程文件未保存");
  225. // return false;
  226. //}
  227. ////获取工作文件所在文件夹
  228. //string folder = System.IO.Path.GetDirectoryName(pathName);
  229. //if (string.IsNullOrEmpty(folder))
  230. //{
  231. // SendMsg("工程文件无效");
  232. // return false;
  233. //}
  234. //WorkingFolder += @"\\";
  235. //LogManager.Init(WorkingFolder);
  236. //return false;
  237. }
  238. //插入PT针
  239. public bool InsertPT()
  240. {
  241. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  242. SendMsg("调用宏插入PT针宏文件" + fn);
  243. iSEM.CMDMCFFilename(fn);
  244. //延时1s??
  245. Thread.Sleep(1000);
  246. return true;
  247. }
  248. //撤出PT针
  249. public bool RetractPT()
  250. {
  251. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  252. SendMsg("调用宏撤出PT针宏文件" + fn);
  253. iSEM.CMDMCFFilename(fn);
  254. //延时1s??
  255. Thread.Sleep(1000);
  256. return true;
  257. }
  258. //PT沉积
  259. public bool PTWork()
  260. {
  261. //执行PT沉积的ELY文件
  262. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  263. SendMsg("执行PT沉积Ely文件:" + fn);
  264. if (!ExcuteEly(fn))
  265. {
  266. return false;
  267. }
  268. //等待沉积完成
  269. while (true)
  270. {
  271. Thread.Sleep(10000);
  272. if (iSEM.GetFIBMode() == 0)
  273. {
  274. break;
  275. }
  276. }
  277. return true;
  278. }
  279. //FIB切割
  280. public bool FIBWork()
  281. {
  282. //执行PT沉积的ELY文件
  283. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  284. SendMsg("执行FIB切割Ely文件:" + fn);
  285. if (!ExcuteEly(fn))
  286. {
  287. return false;
  288. }
  289. //等待切割完成
  290. while (true)
  291. {
  292. Thread.Sleep(10000);
  293. if (iSEM.GetFIBMode() == 0)
  294. {
  295. break;
  296. }
  297. }
  298. return true;
  299. }
  300. public bool ExcuteEly(string a_filename)
  301. {
  302. //执行ELy文件有三个动作
  303. //1. 选择ELY文件
  304. SendMsg("选择ELY文件");
  305. if (!iSEM.CmdFIBLoadELY(a_filename))
  306. {
  307. SendMsg("选择ELY文件失败");
  308. return false;
  309. }
  310. Thread.Sleep(1000);
  311. //2. 确认ELY文件
  312. SendMsg("确认ELY文件");
  313. if (!iSEM.CmdFIBEXPOSUREELY())
  314. {
  315. SendMsg("确认ELY文件失败");
  316. return false;
  317. }
  318. Thread.Sleep(1000);
  319. //3. 执行ELY文件
  320. SendMsg("执行ELY文件");
  321. if (!iSEM.CmdFIBSTARTELY())
  322. {
  323. SendMsg("执行ELY文件失败");
  324. return false;
  325. }
  326. Thread.Sleep(1000);
  327. return true;
  328. }
  329. /// <summary>
  330. ///13. 自动 定位功能
  331. /// </summary>
  332. /// <returns></returns>
  333. public bool GetPoistion()
  334. {
  335. SendMsg("自动定位");
  336. //13.自动定位切割
  337. {
  338. SendMsg("放大600倍");
  339. //1.控制SEM放大600X
  340. if (!iSEM.SetMagnification(600))
  341. {
  342. return false;
  343. }
  344. //2.控制SEM自动对焦、亮度、对比度
  345. // if (!MeasParam.FocusMode)
  346. {
  347. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  348. {
  349. SendMsg("拍摄照片完成");
  350. //return true;
  351. }
  352. else
  353. {
  354. SendMsg("拍摄照片失败");
  355. return false;
  356. }
  357. //弹出手动对焦的窗口
  358. }
  359. //else
  360. //{
  361. // //调用自动对焦模块
  362. //}
  363. //3.设置SEM进行角度补偿54度
  364. SendMsg("设置校正54度");
  365. if (!TiltCorrection(54))
  366. {
  367. SendMsg("设置SEM进行角度补偿54度");
  368. return false;
  369. }
  370. Thread.Sleep(5000);
  371. //4.控制SEM拍照
  372. SendMsg("SEM拍照");
  373. //5.保存照片
  374. {
  375. //1. 创建目录,已经完成
  376. //2. 设置图片名称
  377. //3. 保存图片1
  378. WorkingFolder = m_measureFile.FilePath;
  379. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  380. SendMsg("SEM拍照存储到" + fileName1);
  381. if (!GetImage(ImageMode.SEM, fileName1))
  382. {
  383. SendMsg("SEM拍照失败");
  384. return false;
  385. }
  386. Thread.Sleep(3000);
  387. }
  388. //6.设置FIB拍照参数——扫描时间、束流等
  389. //7.控制FIB自动亮度、对比度
  390. SendMsg("切换FIB控制");
  391. if (!iSEM.CmdFIBModeFIB())
  392. {
  393. SendMsg("FIB模式切换失败");
  394. return false;
  395. }
  396. Thread.Sleep(10000);
  397. //8.控制FIB拍照
  398. //9.保存照片
  399. SendMsg("FIB拍照");
  400. {
  401. //1. 设置图片名称
  402. //2. 保存图片2
  403. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  404. if (!GetImage(ImageMode.FIB, fileName2))
  405. {
  406. SendMsg("FIB拍照失败");
  407. return false;
  408. }
  409. Thread.Sleep(3000);
  410. }
  411. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  412. SendMsg("调用识别位置");
  413. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  414. {
  415. SendMsg("移动已完成");
  416. //return true;
  417. }
  418. else
  419. {
  420. SendMsg("移动已失败");
  421. return false;
  422. }
  423. SendMsg("进行PT沉积");
  424. //11.自动工具样品类型参数确定是否需要PT沉积
  425. {
  426. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  427. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  428. //3. 根据坐标进行PT沉积
  429. if (!PTWork())
  430. {
  431. SendMsg("PT沉积失败");
  432. return false;
  433. }
  434. }
  435. return true;
  436. //模拟为客户返回的坐标值
  437. float x0 = 0, y0 = 0;
  438. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  439. //12.根据梯形坐标控制FIB调整到中心位置
  440. if (!iSEM.MoveStageXY(x0, y0))
  441. {
  442. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  443. return false;
  444. }
  445. //电镜移动是有一个延时的操作的?
  446. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  447. float x1 = iSEM.GetStageAtX();
  448. float y1 = iSEM.GetStageAtY();
  449. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  450. {
  451. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  452. return false;
  453. }
  454. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  455. float[] firstPosition = iSEM.GetStagePosition();
  456. //这里要调用文件保存功能
  457. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  458. + firstPosition[1].ToString() + ","
  459. + firstPosition[2].ToString() + ","
  460. + firstPosition[3].ToString() + ","
  461. + firstPosition[4].ToString() + ","
  462. + firstPosition[5].ToString() + ")");
  463. }
  464. return false;
  465. }
  466. /// <summary>
  467. /// 14. FIB切割
  468. /// </summary>
  469. /// <returns></returns>
  470. public bool FIBCross()
  471. {
  472. //14.自动控制FIB切割
  473. {
  474. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  475. //2.控制FIB进行切割
  476. SendMsg("FIB切割");
  477. if (!FIBWork())
  478. {
  479. SendMsg("FIB切割失败");
  480. return false;
  481. }
  482. Thread.Sleep(5000);
  483. //3.控制FIB拍照600X
  484. //4.保存图片
  485. {
  486. //1.设置图片名称
  487. //2.保存图片3
  488. WorkingFolder = m_measureFile.FilePath;
  489. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  490. SendMsg("SEM拍照存储到" + fileName3);
  491. if (!GetImage(ImageMode.FIB, fileName3))
  492. {
  493. SendMsg("FIB拍照失败");
  494. return false;
  495. }
  496. Thread.Sleep(3000);
  497. }
  498. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  499. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  500. }
  501. return true;
  502. }
  503. /// <summary>
  504. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  505. /// </summary>
  506. /// <returns></returns>
  507. public bool FindCross()
  508. {
  509. //16.自动调整SEM找到切割位置
  510. {
  511. //1.控制SEM放大到300倍
  512. if (!iSEM.SetMagnification(300))
  513. {
  514. return false;
  515. }
  516. //2.控制SEM自动对焦、亮度、对比度-接口
  517. if (!MeasParam.FocusMode)
  518. {
  519. //弹出手动对焦的窗口
  520. }
  521. else
  522. {
  523. //调用自动对焦模块
  524. }
  525. Thread.Sleep(5000);
  526. //3.控制SEM拍照
  527. String fileName4 = WorkingFolder + ImageName4;
  528. if (!GetImage(ImageMode.SEM, fileName4))
  529. {
  530. return false;
  531. }
  532. Thread.Sleep(3000);
  533. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  534. float x4 = 0, y4 = 0;
  535. float angle = 0;
  536. //5.根据坐标控制SEM移动到切孔位置,居中
  537. if (!iSEM.MoveStageXY(x4, y4))
  538. {
  539. return false;
  540. }
  541. if (!iSEM.SetScanRotation(angle))
  542. {
  543. return false;
  544. }
  545. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  546. //float x5 = iSEM.GetStageAtX();
  547. //float y5 = iSEM.GetStageAtY();
  548. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  549. //{
  550. // return false;
  551. //}
  552. }
  553. return true;
  554. }
  555. public bool CommonWork()
  556. {
  557. SendMsg("插入PT针");
  558. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  559. //if (firstHole.PT == true)
  560. {
  561. if (!InsertPT())
  562. {
  563. SendMsg("插入PT针失败");
  564. return false;
  565. }
  566. }
  567. //13. 自动 定位功能
  568. SendMsg("自动定位切割位置");
  569. if (!GetPoistion())
  570. {
  571. SendMsg("自动定位切割位置失败");
  572. return false;
  573. }
  574. //14.自动控制FIB切割
  575. SendMsg("FIB切割");
  576. if (!FIBCross())
  577. {
  578. SendMsg("FIB切割失败");
  579. return false;
  580. }
  581. //{
  582. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  583. // //2.控制FIB进行切割
  584. // //3.控制FIB拍照600X
  585. // //4.保存图片
  586. // {
  587. // //1.设置图片名称
  588. // //2.保存图片3
  589. // String fileName3 = WorkingFolder + ImageName3;
  590. // if (!GetImage(ImageMode.FIB, fileName3))
  591. // {
  592. // return false;
  593. // }
  594. // }
  595. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  596. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  597. //}
  598. //15.根据样品类型决定是否撤出PT针
  599. SendMsg("撤出PT针");
  600. //if (firstHole.PT == false)
  601. //{
  602. if (!RetractPT())
  603. {
  604. SendMsg("撤出PT针失败");
  605. return false;
  606. }
  607. //}
  608. // 16.找到切割位置
  609. SendMsg("找到切割位置");
  610. //17.自动控制SEM拍截面照
  611. SendMsg("观测层高");
  612. SendMsg("切换SEM控制");
  613. if (!iSEM.CmdFIBModeSEM())
  614. {
  615. SendMsg("SEM模式切换失败");
  616. return false;
  617. }
  618. Thread.Sleep(10000);
  619. SendMsg("放大6000倍");
  620. if (!iSEM.SetMagnification(6000))
  621. {
  622. SendMsg("放大倍数调整失败");
  623. return false;
  624. }
  625. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  626. {
  627. SendMsg("拍摄照片完成");
  628. //return true;
  629. }
  630. else
  631. {
  632. SendMsg("拍摄照片失败");
  633. return false;
  634. }
  635. SendMsg("图像校正36度");
  636. //3.设置SEM角度补偿cos36度
  637. if (!TiltCorrection(36))
  638. {
  639. return false;
  640. }
  641. Thread.Sleep(3000);
  642. string fn;
  643. //用宏抓一般图
  644. Thread.Sleep(5000);
  645. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  646. SendMsg("用宏抓一般图" + fn);
  647. iSEM.CMDMCFFilename(fn);
  648. //延时1s??
  649. Thread.Sleep(5000);
  650. //用宏抓好图
  651. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  652. SendMsg("用宏抓好图" + fn);
  653. iSEM.CMDMCFFilename(fn);
  654. //延时1s??
  655. Thread.Sleep(30000);
  656. Thread.Sleep(10000);
  657. WorkingFolder = m_measureFile.FilePath;
  658. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  659. SendMsg("SEM拍照存储到" + fileName6);
  660. if (!GetImage(ImageMode.SEM, fileName6))
  661. {
  662. SendMsg("SEM拍照失败");
  663. return false;
  664. }
  665. //用宏抓标志图
  666. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  667. SendMsg("用宏抓标志图" + fn);
  668. iSEM.CMDMCFFilename(fn);
  669. //延时1s??
  670. Thread.Sleep(30000);
  671. //恢复简单抓图
  672. Thread.Sleep(5000);
  673. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  674. SendMsg("用宏抓一般图" + fn);
  675. iSEM.CMDMCFFilename(fn);
  676. SendMsg("所有图结束");
  677. return true;
  678. }
  679. //第一个孔的测试过程
  680. public bool FirstHole()
  681. {
  682. MeasureData.CutHole firstHole = m_cutHoles[0];
  683. SendMsg("插入PT针");
  684. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  685. //if (firstHole.PT == true)
  686. {
  687. if (!InsertPT())
  688. {
  689. SendMsg("插入PT针失败");
  690. return false;
  691. }
  692. }
  693. //13. 自动 定位功能
  694. SendMsg("自动定位切割位置");
  695. if (!GetPoistion())
  696. {
  697. SendMsg("自动定位切割位置失败");
  698. return false;
  699. }
  700. //14.自动控制FIB切割
  701. SendMsg("FIB切割");
  702. if (!FIBCross())
  703. {
  704. SendMsg("FIB切割失败");
  705. return false;
  706. }
  707. //{
  708. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  709. // //2.控制FIB进行切割
  710. // //3.控制FIB拍照600X
  711. // //4.保存图片
  712. // {
  713. // //1.设置图片名称
  714. // //2.保存图片3
  715. // String fileName3 = WorkingFolder + ImageName3;
  716. // if (!GetImage(ImageMode.FIB, fileName3))
  717. // {
  718. // return false;
  719. // }
  720. // }
  721. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  722. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  723. //}
  724. //15.根据样品类型决定是否撤出PT针
  725. SendMsg("撤出PT针");
  726. //if (firstHole.PT == false)
  727. //{
  728. if (!RetractPT())
  729. {
  730. SendMsg("撤出PT针失败");
  731. return false;
  732. }
  733. //}
  734. // 16.找到切割位置
  735. SendMsg("找到切割位置");
  736. //17.自动控制SEM拍截面照
  737. SendMsg("观测层高");
  738. SendMsg("切换SEM控制");
  739. if (!iSEM.CmdFIBModeSEM())
  740. {
  741. SendMsg("SEM模式切换失败");
  742. return false;
  743. }
  744. Thread.Sleep(10000);
  745. SendMsg("放大6000倍");
  746. if (!iSEM.SetMagnification(6000))
  747. {
  748. SendMsg("放大倍数调整失败");
  749. return false;
  750. }
  751. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  752. {
  753. SendMsg("拍摄照片完成");
  754. //return true;
  755. }
  756. else
  757. {
  758. SendMsg("拍摄照片失败");
  759. return false;
  760. }
  761. SendMsg("图像校正36度");
  762. //3.设置SEM角度补偿cos36度
  763. if (!TiltCorrection(36))
  764. {
  765. return false;
  766. }
  767. Thread.Sleep(3000);
  768. string fn;
  769. //用宏抓一般图
  770. Thread.Sleep(5000);
  771. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  772. SendMsg("用宏抓一般图" + fn);
  773. iSEM.CMDMCFFilename(fn);
  774. //延时1s??
  775. Thread.Sleep(5000);
  776. //用宏抓好图
  777. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  778. SendMsg("用宏抓好图" + fn);
  779. iSEM.CMDMCFFilename(fn);
  780. //延时1s??
  781. Thread.Sleep(30000);
  782. Thread.Sleep(10000);
  783. WorkingFolder = m_measureFile.FilePath;
  784. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  785. SendMsg("SEM拍照存储到" + fileName6);
  786. if (!GetImage(ImageMode.SEM, fileName6))
  787. {
  788. SendMsg("SEM拍照失败");
  789. return false;
  790. }
  791. //用宏抓标志图
  792. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  793. SendMsg("用宏抓标志图" + fn);
  794. iSEM.CMDMCFFilename(fn);
  795. //延时1s??
  796. Thread.Sleep(30000);
  797. Thread.Sleep(5000);
  798. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  799. SendMsg("用宏抓一般图" + fn);
  800. iSEM.CMDMCFFilename(fn);
  801. //延时1s??
  802. Thread.Sleep(5000);
  803. SendMsg("所有图结束");
  804. ////17.自动控制SEM拍截面照
  805. //{
  806. // //1.控制SEM放大到指定参数大小范围,6000x
  807. // if (!iSEM.SetMagnification(6000))
  808. // {
  809. // return false;
  810. // }
  811. // //2.控制SEM自动对焦、消像散、亮度、对比度
  812. // if (!MeasParam.FocusMode)
  813. // {
  814. // //弹出手动对焦的窗口
  815. // }
  816. // else
  817. // {
  818. // //调用自动对焦模块
  819. // }
  820. // //3.设置SEM角度补偿cos36度
  821. // if (!TiltCorrection(36))
  822. // {
  823. // return false;
  824. // }
  825. // //4.控制SEM拍照
  826. // //5.保存照片4
  827. // String fileName5 = WorkingFolder + ImageName5;
  828. // if (!GetImage(ImageMode.SEM, fileName5))
  829. // {
  830. // return false;
  831. // }
  832. // //6.将照片传给客户,获取偏移坐标
  833. // float x6 = 0, y6 = 0;
  834. // float angle1 = 0;
  835. // float mage = 10000;
  836. // //7.根据坐标控制SEM移动到分析位置
  837. // if (!iSEM.MoveStageXY(x6, y6))
  838. // {
  839. // return false;
  840. // }
  841. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  842. // float x7 = iSEM.GetStageAtX();
  843. // float y7 = iSEM.GetStageAtY();
  844. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  845. // {
  846. // return false;
  847. // }
  848. // //9.控制SEM平行校正,并记录校正前初始值
  849. // float foldAnagle = iSEM.GetScanRotation();
  850. // if (foldAnagle == float.NaN)
  851. // {
  852. // return false;
  853. // }
  854. // if (!iSEM.SetScanRotation(angle1))
  855. // {
  856. // return false;
  857. // }
  858. // //10.控制SEM放大到指定参数大小范围
  859. // if (!iSEM.SetMagnification(mage))
  860. // {
  861. // return false;
  862. // }
  863. // //11.控制SEM自动对焦、消像散、亮度、对比度
  864. // if (!MeasParam.FocusMode)
  865. // {
  866. // //弹出手动对焦的窗口
  867. // }
  868. // else
  869. // {
  870. // //调用自动对焦模块
  871. // }
  872. // //12.控制SEM对分析位置拍照
  873. // String fileName6 = WorkingFolder + ImageName6;
  874. // if (!GetImage(ImageMode.SEM, fileName6))
  875. // {
  876. // return false;
  877. // }
  878. // //13.保存照片
  879. // //14.控制SEM取消电子束校正,回到初始值
  880. // if (!iSEM.SetScanRotation(foldAnagle))
  881. // {
  882. // return false;
  883. // }
  884. //}
  885. ////18.自动层高分析
  886. //{
  887. // //1.获取SEM Pixel Size给客户传入参数
  888. // if (iSEM.GetPixelSize() == float.NaN)
  889. // {
  890. // return false;
  891. // }
  892. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  893. //}
  894. ////19.自动能谱分析
  895. //{
  896. // //1. 确定能谱位置
  897. // //2. 控制牛津打能谱
  898. // //3. 能谱分析——面扫+线扫描
  899. //}
  900. return true;
  901. }
  902. //非第一个孔的测试过程
  903. public void OtherHole()
  904. {
  905. //for (int i = 1; i < m_cutHoles.Count; i++)
  906. //{
  907. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  908. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  909. //1. 初始化
  910. {
  911. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  912. //读取图像冻结状态
  913. float ffrozen = iSEM.GetImageFrozen();
  914. if (ffrozen == float.NaN)
  915. {
  916. return;
  917. }
  918. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  919. {
  920. SendMsg("样品台恢复到水平");
  921. //return true;
  922. }
  923. else
  924. {
  925. SendMsg("禁止样品台恢复到水平");
  926. return;
  927. }
  928. //2. 调节样品1号孔的样品台6轴坐标
  929. //3. 将样品1号孔坐标2存入数据库
  930. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  931. if (!iSEM.SetStageGotoT(0))
  932. {
  933. return;
  934. }
  935. while (true)
  936. {
  937. Thread.Sleep(10000);
  938. if (iSEM.GetStageIs() == 0)
  939. {
  940. break;
  941. }
  942. }
  943. //5. 获取光镜2号孔XY坐标
  944. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  945. //6. 根据光镜坐标控制样品台移动
  946. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  947. {
  948. SendMsg("移动失败");
  949. }
  950. while (true)
  951. {
  952. Thread.Sleep(10000);
  953. if (iSEM.GetStageIs() == 0)
  954. {
  955. break;
  956. }
  957. }
  958. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  959. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  960. {
  961. SendMsg("样品台旋转");
  962. //return true;
  963. }
  964. else
  965. {
  966. SendMsg("禁止样品台旋转");
  967. return;
  968. }
  969. if (!iSEM.SetStageGotoT(54))
  970. {
  971. return;
  972. }
  973. while (true)
  974. {
  975. Thread.Sleep(10000);
  976. if (iSEM.GetStageIs() == 0)
  977. {
  978. break;
  979. }
  980. }
  981. }
  982. SendMsg("拉直操作");
  983. SendMsg("其他操作与1号孔操作一致");
  984. if (!CommonWork())
  985. {
  986. return;
  987. }
  988. //2. 定位切割
  989. {
  990. //1. 拉直操作
  991. {
  992. //1.1 控制SEM进行拍照
  993. //1.2 图片传给客户,返回偏移角度
  994. //1.3 根据返回角度,控制样品台转动
  995. }
  996. //2. 与1号孔13步相同
  997. }
  998. //3. 以后步骤与1号孔以后步骤一致
  999. //}
  1000. }
  1001. //角度补偿
  1002. public bool TiltCorrection(float a_fAngle)
  1003. {
  1004. //记录原来电镜的状态
  1005. // bool bTilt = false;
  1006. //float fOldTilt = iSEM.GetTiltCorrection();
  1007. //if (fOldTilt == float.NaN)
  1008. //{
  1009. // return false;
  1010. //}
  1011. //else if (fOldTilt == 1)
  1012. //{
  1013. // bTilt = true;
  1014. //}
  1015. //else if (fOldTilt == 0)
  1016. //{
  1017. // bTilt = false;
  1018. //}
  1019. //float fOldAngle = iSEM.GetTiltAngle();
  1020. //if (fOldAngle == float.NaN)
  1021. //{
  1022. // return false;
  1023. //}
  1024. //开启校正
  1025. SendMsg("开启校正");
  1026. if (!iSEM.SetTiltAngleOn())
  1027. {
  1028. return false;
  1029. }
  1030. //设置校正角度
  1031. //if (!iSEM.SetTiltAngle(fOldAngle))
  1032. //{
  1033. // return false;
  1034. //}
  1035. //恢复原始状态
  1036. SendMsg("校正角度"+ a_fAngle.ToString());
  1037. if (!iSEM.SetTiltAngle(a_fAngle))
  1038. {
  1039. return false;
  1040. }
  1041. //if (bTilt)
  1042. //{
  1043. // if (!iSEM.SetTiltCorrectionOn())
  1044. // {
  1045. // return false;
  1046. // }
  1047. //}
  1048. //else
  1049. //{
  1050. // if (!iSEM.SetTiltCorrectionOff())
  1051. // {
  1052. // return false;
  1053. // }
  1054. //}
  1055. return true;
  1056. }
  1057. //拍图
  1058. public bool GetImage(ImageMode a_mode, String a_fileName)
  1059. {
  1060. //1. 图像解冻
  1061. float foldFrozen = iSEM.GetImageFrozen();
  1062. if (foldFrozen == float.NaN)
  1063. {
  1064. return false;
  1065. }
  1066. if (!iSEM.ImageLive())
  1067. {
  1068. return false;
  1069. }
  1070. //2. 确认图像模式
  1071. if (ImageMode.SEM == a_mode)
  1072. {
  1073. if (!iSEM.CmdFIBModeSEM())
  1074. {
  1075. return false;
  1076. }
  1077. }
  1078. else if (ImageMode.FIB == a_mode)
  1079. {
  1080. if (!iSEM.CmdFIBModeFIB())
  1081. {
  1082. return false;
  1083. }
  1084. }
  1085. else
  1086. {
  1087. return false;
  1088. }
  1089. //3. 获取分辨率
  1090. int[] ImageSize = iSEM.GetImageStore();
  1091. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1092. {
  1093. return false;
  1094. }
  1095. short width = (short)ImageSize[0];
  1096. short height = (short)ImageSize[1];
  1097. //4. 抓图
  1098. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1099. {
  1100. return false;
  1101. }
  1102. //5. 恢复初始状态
  1103. if (foldFrozen == 0)
  1104. {
  1105. if (!iSEM.ImageLive())
  1106. {
  1107. return false;
  1108. }
  1109. }
  1110. else if (foldFrozen == 1)
  1111. {
  1112. if (!iSEM.ImageFrozen())
  1113. {
  1114. return false;
  1115. }
  1116. }
  1117. return true;
  1118. }
  1119. }
  1120. }