Measure.cs 51 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. public class ThreadStatusEventArgs
  26. {
  27. //状态
  28. public string State
  29. {
  30. get { return m_state; }
  31. set { m_state = value; }
  32. }
  33. private string m_state;
  34. //时间
  35. public DateTime Time
  36. {
  37. get { return m_time; }
  38. set { m_time = value; }
  39. }
  40. private DateTime m_time;
  41. //步骤代码
  42. public String Step_Code
  43. {
  44. get { return step_Code; }
  45. set { step_Code = value; }
  46. }
  47. private String step_Code;
  48. //其他消息
  49. public String Message
  50. {
  51. get { return this.message; }
  52. set { this.message = value; }
  53. }
  54. private String message;
  55. //孔名
  56. public String HoleName
  57. {
  58. get { return this.holeName; }
  59. set { this.holeName = value; }
  60. }
  61. private String holeName;
  62. //图片信息
  63. public class PictureInformation
  64. {
  65. public String Picture_FullPath
  66. {
  67. get { return picture_FullPath; }
  68. set { picture_FullPath = value; }
  69. }
  70. private String picture_FullPath;
  71. public double Work_Voltage
  72. {
  73. get { return work_Voltage; }
  74. set { work_Voltage = value; }
  75. }
  76. private double work_Voltage;
  77. public double Magnification
  78. {
  79. get { return magnification; }
  80. set { magnification = value; }
  81. }
  82. private double magnification;
  83. public double Work_Distance
  84. {
  85. get { return work_Distance; }
  86. set { work_Distance = value; }
  87. }
  88. private double work_Distance;
  89. public String Work_Status
  90. {
  91. get { return work_Status; }
  92. set { work_Status = value; }
  93. }
  94. private String work_Status;
  95. }
  96. //图片信息实例类
  97. public PictureInformation Picture_Information
  98. {
  99. get { return picture_Information; }
  100. set { picture_Information = value; }
  101. }
  102. private PictureInformation picture_Information;
  103. //图像信息
  104. public class ImageInformation
  105. {
  106. public int Method_Name
  107. {
  108. get { return method_Name; }
  109. set { method_Name = value; }
  110. }
  111. private int method_Name;
  112. public Source_Img_Degree_Direction SIDD;
  113. public Cut_Position CP;
  114. public Cut_Success CS;
  115. public Trapezoid_Top_Center_Position TTCP;
  116. public Auto_Foucs AF;
  117. public Auto_Stigmatic AS;
  118. public Center_Position_OffsetAngle_Direction CPOD;
  119. public Measure_Size MS;
  120. public ImageInformation()
  121. {
  122. SIDD = new Source_Img_Degree_Direction();
  123. CP = new Cut_Position();
  124. CS = new Cut_Success();
  125. TTCP = new Trapezoid_Top_Center_Position();
  126. AF = new Auto_Foucs();
  127. AS = new Auto_Stigmatic();
  128. CPOD = new Center_Position_OffsetAngle_Direction();
  129. MS = new Measure_Size();
  130. }
  131. //1-计算原始图像偏移角度及方向
  132. public class Source_Img_Degree_Direction
  133. {
  134. public Boolean Is_Image = false;
  135. public double Degree
  136. {
  137. get { return degree; }
  138. set { degree = value; }
  139. }
  140. private double degree;
  141. public int Direction
  142. {
  143. get { return direction; }
  144. set { direction = value; }
  145. }
  146. private int direction;
  147. public int State
  148. {
  149. get { return state; }
  150. set { state = value; }
  151. }
  152. private int state;
  153. }
  154. //2-计算切割点位置
  155. public class Cut_Position
  156. {
  157. public Boolean Is_Image = false;
  158. public double Offsetx
  159. {
  160. get { return offsetx; }
  161. set { offsetx = value; }
  162. }
  163. private double offsetx;
  164. public double Offsety
  165. {
  166. get { return offsety; }
  167. set { offsety = value; }
  168. }
  169. private double offsety;
  170. public int State
  171. {
  172. get { return state; }
  173. set { state = value; }
  174. }
  175. private int state;
  176. }
  177. //3-是否切割成功
  178. public class Cut_Success
  179. {
  180. public Boolean Is_Image = false;
  181. public int State
  182. {
  183. get { return state; }
  184. set { state = value; }
  185. }
  186. private int state;
  187. }
  188. //4-计算切割后图像梯形区域上边中心点坐标
  189. public class Trapezoid_Top_Center_Position
  190. {
  191. public Boolean Is_Image = false;
  192. public double TopCenterX
  193. {
  194. get { return topCenterX; }
  195. set { topCenterX = value; }
  196. }
  197. private double topCenterX;
  198. public double TopCenterY
  199. {
  200. get { return topCenterY; }
  201. set { topCenterY = value; }
  202. }
  203. private double topCenterY;
  204. public int State
  205. {
  206. get { return state; }
  207. set { state = value; }
  208. }
  209. private int state;
  210. }
  211. //5-自动对焦
  212. public class Auto_Foucs
  213. {
  214. public Boolean Is_Image = true;
  215. public String Img_Path
  216. {
  217. get { return img_Path; }
  218. set { img_Path = value; }
  219. }
  220. private String img_Path;
  221. }
  222. //6-自动像闪
  223. public class Auto_Stigmatic
  224. {
  225. public Boolean Is_Image = true;
  226. public String Img_Path
  227. {
  228. get { return img_Path; }
  229. set { img_Path = value; }
  230. }
  231. private String img_Path;
  232. }
  233. //7-计算切割面区域中心坐标,以及偏移角度及方向
  234. public class Center_Position_OffsetAngle_Direction
  235. {
  236. public Boolean Is_Image = false;
  237. public double CenterX
  238. {
  239. get { return centerX; }
  240. set { centerX = value; }
  241. }
  242. private double centerX;
  243. public double CenterY
  244. {
  245. get { return centerY; }
  246. set { centerY = value; }
  247. }
  248. private double centerY;
  249. public double Degree
  250. {
  251. get { return degree; }
  252. set { degree = value; }
  253. }
  254. private double degree;
  255. public int Direction
  256. {
  257. get { return direction; }
  258. set { direction = value; }
  259. }
  260. private int direction;
  261. public int State
  262. {
  263. get { return state; }
  264. set { state = value; }
  265. }
  266. private int state;
  267. }
  268. //8-测量尺寸
  269. public class Measure_Size
  270. {
  271. public Boolean Is_Image = false;
  272. public int State
  273. {
  274. get { return state; }
  275. set { state = value; }
  276. }
  277. private int state;
  278. }
  279. }
  280. //图像信息实例类
  281. public ImageInformation Image_Information
  282. {
  283. get { return image_Information; }
  284. set { image_Information = value; }
  285. }
  286. private ImageInformation image_Information;
  287. public ThreadStatusEventArgs(string a_State)
  288. {
  289. this.m_state = a_State;
  290. picture_Information = new PictureInformation();
  291. image_Information = new ImageInformation();
  292. }
  293. }
  294. public class CutHolesStatusEventArgs
  295. {
  296. public string State
  297. {
  298. get { return m_state; }
  299. set { m_state = value; }
  300. }
  301. private string m_state;
  302. public string HoleName
  303. {
  304. get { return m_holeName; }
  305. set { m_holeName = value; }
  306. }
  307. private string m_holeName;
  308. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  309. {
  310. this.m_state = a_state;
  311. this.m_holeName = a_holeName;
  312. }
  313. }
  314. public class Measure
  315. {
  316. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  317. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  318. //定义一个全局的消息类
  319. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  320. //全局只有一个fatorySEM
  321. static FactoryHardware factorySEM = FactoryHardware.Instance;
  322. ISEMControl iSEM = factorySEM.ISEM;
  323. //@的作用是不用转义字符\\只打一个就行
  324. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  325. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  326. const String ImageName3 = @"ImageFIB600X2.tif";
  327. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  328. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  329. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  330. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  331. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  332. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  333. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  334. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  335. const String ElyDeposition = @"Deposition.ely"; //沉积
  336. const String ElyCrossSection = @"CrossSection.ely"; //切割
  337. const float fMin = (float)0.0000002; //单位是米
  338. int m_nWorkHoleNo = -1;
  339. //测量文件
  340. private MeasureFile m_measureFile;
  341. public MeasureFile MeasureFile
  342. {
  343. get { return this.m_measureFile; }
  344. set { this.m_measureFile = value; }
  345. }
  346. //测量的切割孔
  347. private List<MeasureData.CutHole> m_cutHoles;
  348. public List<MeasureData.CutHole> cutHoles
  349. {
  350. get { return this.m_cutHoles; }
  351. set { this.m_cutHoles = value; }
  352. }
  353. //工作文件夹
  354. private string m_WorkingFolder;
  355. public string WorkingFolder
  356. {
  357. get { return this.m_WorkingFolder; }
  358. set { this.m_WorkingFolder = value; }
  359. }
  360. //程序当前路径
  361. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  362. //线程状态
  363. private ThreadStatus m_ThreadStatus;
  364. public ThreadStatus TStatus
  365. {
  366. get { return this.m_ThreadStatus; }
  367. set { this.m_ThreadStatus = value; }
  368. }
  369. //测量参数
  370. private MeasureParam m_MsParam;
  371. public MeasureParam MeasParam
  372. {
  373. get { return this.m_MsParam; }
  374. set { this.m_MsParam = value; }
  375. }
  376. //构造函数
  377. public Measure()
  378. {
  379. Init();
  380. }
  381. private void Init()
  382. {
  383. MeasParam = new MeasureParam();
  384. TStatus = new ThreadStatus();
  385. cutHoles = new List<MeasureData.CutHole>();
  386. }
  387. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  388. public bool InitMeas(MeasureFile a_measureFile)
  389. {
  390. m_measureFile = a_measureFile;
  391. List<CutHole> listHoles = m_measureFile.ListCutHole;
  392. foreach (CutHole h in listHoles)
  393. {
  394. if (h.SWITCH == true)
  395. {
  396. m_cutHoles.Add(h);
  397. }
  398. }
  399. if (m_cutHoles.Count == 0)
  400. return false;
  401. this.m_MsParam = m_measureFile.MParam;
  402. return true;
  403. }
  404. public void SendMsg(string step_code)
  405. {
  406. arg.Step_Code = step_code;
  407. arg.Time = DateTime.Now;
  408. switch(step_code)
  409. {
  410. //拍照
  411. case "1-3":
  412. case "1-9":
  413. case "1-16":
  414. case "1-24":
  415. //电压、放大倍数、工作距离、位置信息、图片路径
  416. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  417. arg.Picture_Information.Work_Status = "SEM";
  418. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  419. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  420. arg.HoleName = cutHoles[m_nWorkHoleNo].HoleName;
  421. break;
  422. case "1-10":
  423. case "1-18":
  424. //获取偏移信息
  425. break;
  426. case "1-12":
  427. case "1-20":
  428. //验证移动准备性
  429. break;
  430. case "1-26":
  431. //取消电子束校正并初始化
  432. break;
  433. default:
  434. arg.Step_Code = "0-0";
  435. arg.Message = step_code;
  436. break;
  437. }
  438. SendThreadStatus(this, arg);
  439. }
  440. public void SendCutHoleMsg(string a_state, string a_holeName)
  441. {
  442. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  443. arg.HoleName = a_holeName;
  444. arg.State = a_state;
  445. SendCutHolesStatus(this, arg);
  446. }
  447. //测量流程
  448. public void DoMeasure()
  449. {
  450. //创建线程的测量状态的更新
  451. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  452. if (SendThreadStatus != null)
  453. {
  454. SendMsg("开始测量。");
  455. }
  456. //检查硬件连接是否正常
  457. if (!ConnectHardware())
  458. {
  459. SendMsg("连接硬件失败。");
  460. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  461. return;
  462. }
  463. SendMsg("硬件连接成功。");
  464. //设置工作文件夹
  465. if (!SetWorkingFolderStr())
  466. {
  467. SendMsg("设置工作文件夹失败");
  468. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  469. return;
  470. }
  471. SendMsg("创建工作文件路径为" + WorkingFolder);
  472. float[] firstPosition;
  473. for (int i = 0; i < m_cutHoles.Count; i++)
  474. {
  475. m_nWorkHoleNo = i;
  476. if (i == 0)
  477. {
  478. SendMsg("第一个切孔开始测量");
  479. //切孔操作-开始
  480. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  481. firstPosition = iSEM.GetStagePosition();
  482. //第一个孔的测试
  483. FirstHole();
  484. //切孔操作-完成
  485. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  486. }
  487. else
  488. {
  489. //非第一个孔的测试
  490. SendMsg("第" + i.ToString() + "个切孔开始测量");
  491. //切孔操作-开始
  492. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  493. OtherHole();
  494. //切孔操作-完成
  495. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  496. }
  497. }
  498. }
  499. //检查硬件连接是否正常
  500. public bool ConnectHardware()
  501. {
  502. //返回硬件的连接状态
  503. return iSEM.ConnectStatus();
  504. }
  505. //设置工作文件夹
  506. public bool SetWorkingFolderStr()
  507. {
  508. WorkingFolder = m_measureFile.FilePath;
  509. return true;
  510. ////获取工作文件路径
  511. //string pathName = m_measureFile.FilePath;
  512. ////判断工作文件路径是否为空或无效
  513. //if (string.IsNullOrEmpty(pathName))
  514. //{
  515. // SendMsg("路径无效");
  516. // return false;
  517. //}
  518. ////文件未保存
  519. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  520. //{
  521. // SendMsg("工程文件未保存");
  522. // return false;
  523. //}
  524. ////获取工作文件所在文件夹
  525. //string folder = System.IO.Path.GetDirectoryName(pathName);
  526. //if (string.IsNullOrEmpty(folder))
  527. //{
  528. // SendMsg("工程文件无效");
  529. // return false;
  530. //}
  531. //WorkingFolder += @"\\";
  532. //LogManager.Init(WorkingFolder);
  533. //return false;
  534. }
  535. //插入PT针
  536. public bool InsertPT()
  537. {
  538. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  539. SendMsg("调用宏插入PT针宏文件" + fn);
  540. iSEM.CMDMCFFilename(fn);
  541. //延时1s??
  542. Thread.Sleep(1000);
  543. return true;
  544. }
  545. //撤出PT针
  546. public bool RetractPT()
  547. {
  548. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  549. SendMsg("调用宏撤出PT针宏文件" + fn);
  550. iSEM.CMDMCFFilename(fn);
  551. //延时1s??
  552. Thread.Sleep(1000);
  553. return true;
  554. }
  555. //PT沉积
  556. public bool PTWork()
  557. {
  558. //执行PT沉积的ELY文件
  559. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  560. SendMsg("执行PT沉积Ely文件:" + fn);
  561. if (!ExcuteEly(fn))
  562. {
  563. return false;
  564. }
  565. //等待沉积完成
  566. while (true)
  567. {
  568. Thread.Sleep(10000);
  569. if (iSEM.GetFIBMode() == 0)
  570. {
  571. break;
  572. }
  573. }
  574. return true;
  575. }
  576. //FIB切割
  577. public bool FIBWork()
  578. {
  579. //执行PT沉积的ELY文件
  580. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  581. SendMsg("执行FIB切割Ely文件:" + fn);
  582. if (!ExcuteEly(fn))
  583. {
  584. return false;
  585. }
  586. //等待切割完成
  587. while (true)
  588. {
  589. Thread.Sleep(10000);
  590. if (iSEM.GetFIBMode() == 0)
  591. {
  592. break;
  593. }
  594. }
  595. return true;
  596. }
  597. public bool ExcuteEly(string a_filename)
  598. {
  599. //执行ELy文件有三个动作
  600. //1. 选择ELY文件
  601. SendMsg("选择ELY文件");
  602. if (!iSEM.CmdFIBLoadELY(a_filename))
  603. {
  604. SendMsg("选择ELY文件失败");
  605. return false;
  606. }
  607. Thread.Sleep(1000);
  608. //2. 确认ELY文件
  609. SendMsg("确认ELY文件");
  610. if (!iSEM.CmdFIBEXPOSUREELY())
  611. {
  612. SendMsg("确认ELY文件失败");
  613. return false;
  614. }
  615. Thread.Sleep(1000);
  616. //3. 执行ELY文件
  617. SendMsg("执行ELY文件");
  618. if (!iSEM.CmdFIBSTARTELY())
  619. {
  620. SendMsg("执行ELY文件失败");
  621. return false;
  622. }
  623. Thread.Sleep(1000);
  624. return true;
  625. }
  626. /// <summary>
  627. ///13. 自动 定位功能
  628. /// </summary>
  629. /// <returns></returns>
  630. public bool GetPoistion()
  631. {
  632. SendMsg("自动定位");
  633. //13.自动定位切割
  634. {
  635. SendMsg("放大600倍");
  636. //1.控制SEM放大600X
  637. if (!iSEM.SetMagnification(600))
  638. {
  639. return false;
  640. }
  641. //2.控制SEM自动对焦、亮度、对比度
  642. // if (!MeasParam.FocusMode)
  643. {
  644. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  645. {
  646. SendMsg("拍摄照片完成");
  647. //return true;
  648. }
  649. else
  650. {
  651. SendMsg("拍摄照片失败");
  652. return false;
  653. }
  654. //弹出手动对焦的窗口
  655. }
  656. //else
  657. //{
  658. // //调用自动对焦模块
  659. //}
  660. //3.设置SEM进行角度补偿54度
  661. SendMsg("设置校正54度");
  662. if (!TiltCorrection(54))
  663. {
  664. SendMsg("设置SEM进行角度补偿54度");
  665. return false;
  666. }
  667. Thread.Sleep(5000);
  668. //4.控制SEM拍照
  669. SendMsg("SEM拍照");
  670. //5.保存照片
  671. {
  672. //1. 创建目录,已经完成
  673. //2. 设置图片名称
  674. //3. 保存图片1
  675. WorkingFolder = m_measureFile.FilePath;
  676. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  677. arg.Picture_Information.Picture_FullPath = fileName1;
  678. if (!GetImage(ImageMode.SEM, fileName1))
  679. {
  680. SendMsg("SEM拍照失败");
  681. return false;
  682. }
  683. SendMsg("1-3");
  684. Thread.Sleep(3000);
  685. }
  686. //6.设置FIB拍照参数——扫描时间、束流等
  687. //7.控制FIB自动亮度、对比度
  688. SendMsg("切换FIB控制");
  689. if (!iSEM.CmdFIBModeFIB())
  690. {
  691. SendMsg("FIB模式切换失败");
  692. return false;
  693. }
  694. Thread.Sleep(10000);
  695. //8.控制FIB拍照
  696. //9.保存照片
  697. SendMsg("FIB拍照");
  698. {
  699. //1. 设置图片名称
  700. //2. 保存图片2
  701. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  702. if (!GetImage(ImageMode.FIB, fileName2))
  703. {
  704. SendMsg("FIB拍照失败");
  705. return false;
  706. }
  707. Thread.Sleep(3000);
  708. }
  709. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  710. SendMsg("调用识别位置");
  711. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  712. {
  713. SendMsg("移动已完成");
  714. //return true;
  715. }
  716. else
  717. {
  718. SendMsg("移动已失败");
  719. return false;
  720. }
  721. SendMsg("进行PT沉积");
  722. //11.自动工具样品类型参数确定是否需要PT沉积
  723. {
  724. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  725. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  726. //3. 根据坐标进行PT沉积
  727. if (!PTWork())
  728. {
  729. SendMsg("PT沉积失败");
  730. return false;
  731. }
  732. }
  733. return true;
  734. //模拟为客户返回的坐标值
  735. float x0 = 0, y0 = 0;
  736. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  737. //12.根据梯形坐标控制FIB调整到中心位置
  738. if (!iSEM.MoveStageXY(x0, y0))
  739. {
  740. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  741. return false;
  742. }
  743. //电镜移动是有一个延时的操作的?
  744. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  745. float x1 = iSEM.GetStageAtX();
  746. float y1 = iSEM.GetStageAtY();
  747. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  748. {
  749. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  750. return false;
  751. }
  752. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  753. float[] firstPosition = iSEM.GetStagePosition();
  754. //这里要调用文件保存功能
  755. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  756. + firstPosition[1].ToString() + ","
  757. + firstPosition[2].ToString() + ","
  758. + firstPosition[3].ToString() + ","
  759. + firstPosition[4].ToString() + ","
  760. + firstPosition[5].ToString() + ")");
  761. }
  762. return false;
  763. }
  764. /// <summary>
  765. /// 14. FIB切割
  766. /// </summary>
  767. /// <returns></returns>
  768. public bool FIBCross()
  769. {
  770. //14.自动控制FIB切割
  771. {
  772. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  773. //2.控制FIB进行切割
  774. SendMsg("FIB切割");
  775. if (!FIBWork())
  776. {
  777. SendMsg("FIB切割失败");
  778. return false;
  779. }
  780. Thread.Sleep(5000);
  781. //3.控制FIB拍照600X
  782. //4.保存图片
  783. {
  784. //1.设置图片名称
  785. //2.保存图片3
  786. WorkingFolder = m_measureFile.FilePath;
  787. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  788. SendMsg("SEM拍照存储到" + fileName3);
  789. if (!GetImage(ImageMode.FIB, fileName3))
  790. {
  791. SendMsg("FIB拍照失败");
  792. return false;
  793. }
  794. Thread.Sleep(3000);
  795. }
  796. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  797. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  798. }
  799. return true;
  800. }
  801. /// <summary>
  802. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  803. /// </summary>
  804. /// <returns></returns>
  805. public bool FindCross()
  806. {
  807. //16.自动调整SEM找到切割位置
  808. {
  809. //1.控制SEM放大到300倍
  810. if (!iSEM.SetMagnification(300))
  811. {
  812. return false;
  813. }
  814. //2.控制SEM自动对焦、亮度、对比度-接口
  815. if (!MeasParam.FocusMode)
  816. {
  817. //弹出手动对焦的窗口
  818. }
  819. else
  820. {
  821. //调用自动对焦模块
  822. }
  823. Thread.Sleep(5000);
  824. //3.控制SEM拍照
  825. String fileName4 = WorkingFolder + ImageName4;
  826. if (!GetImage(ImageMode.SEM, fileName4))
  827. {
  828. return false;
  829. }
  830. Thread.Sleep(3000);
  831. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  832. float x4 = 0, y4 = 0;
  833. float angle = 0;
  834. //5.根据坐标控制SEM移动到切孔位置,居中
  835. if (!iSEM.MoveStageXY(x4, y4))
  836. {
  837. return false;
  838. }
  839. if (!iSEM.SetScanRotation(angle))
  840. {
  841. return false;
  842. }
  843. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  844. //float x5 = iSEM.GetStageAtX();
  845. //float y5 = iSEM.GetStageAtY();
  846. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  847. //{
  848. // return false;
  849. //}
  850. }
  851. return true;
  852. }
  853. public bool CommonWork()
  854. {
  855. SendMsg("插入PT针");
  856. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  857. //if (firstHole.PT == true)
  858. {
  859. if (!InsertPT())
  860. {
  861. SendMsg("插入PT针失败");
  862. return false;
  863. }
  864. }
  865. //13. 自动 定位功能
  866. SendMsg("自动定位切割位置");
  867. if (!GetPoistion())
  868. {
  869. SendMsg("自动定位切割位置失败");
  870. return false;
  871. }
  872. //14.自动控制FIB切割
  873. SendMsg("FIB切割");
  874. if (!FIBCross())
  875. {
  876. SendMsg("FIB切割失败");
  877. return false;
  878. }
  879. //{
  880. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  881. // //2.控制FIB进行切割
  882. // //3.控制FIB拍照600X
  883. // //4.保存图片
  884. // {
  885. // //1.设置图片名称
  886. // //2.保存图片3
  887. // String fileName3 = WorkingFolder + ImageName3;
  888. // if (!GetImage(ImageMode.FIB, fileName3))
  889. // {
  890. // return false;
  891. // }
  892. // }
  893. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  894. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  895. //}
  896. //15.根据样品类型决定是否撤出PT针
  897. SendMsg("撤出PT针");
  898. //if (firstHole.PT == false)
  899. //{
  900. if (!RetractPT())
  901. {
  902. SendMsg("撤出PT针失败");
  903. return false;
  904. }
  905. //}
  906. // 16.找到切割位置
  907. SendMsg("找到切割位置");
  908. //17.自动控制SEM拍截面照
  909. SendMsg("观测层高");
  910. SendMsg("切换SEM控制");
  911. if (!iSEM.CmdFIBModeSEM())
  912. {
  913. SendMsg("SEM模式切换失败");
  914. return false;
  915. }
  916. Thread.Sleep(10000);
  917. SendMsg("放大6000倍");
  918. if (!iSEM.SetMagnification(6000))
  919. {
  920. SendMsg("放大倍数调整失败");
  921. return false;
  922. }
  923. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  924. {
  925. SendMsg("拍摄照片完成");
  926. //return true;
  927. }
  928. else
  929. {
  930. SendMsg("拍摄照片失败");
  931. return false;
  932. }
  933. SendMsg("图像校正36度");
  934. //3.设置SEM角度补偿cos36度
  935. if (!TiltCorrection(36))
  936. {
  937. return false;
  938. }
  939. Thread.Sleep(3000);
  940. string fn;
  941. //用宏抓一般图
  942. Thread.Sleep(5000);
  943. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  944. SendMsg("用宏抓一般图" + fn);
  945. iSEM.CMDMCFFilename(fn);
  946. //延时1s??
  947. Thread.Sleep(5000);
  948. //用宏抓好图
  949. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  950. SendMsg("用宏抓好图" + fn);
  951. iSEM.CMDMCFFilename(fn);
  952. //延时1s??
  953. Thread.Sleep(30000);
  954. Thread.Sleep(10000);
  955. WorkingFolder = m_measureFile.FilePath;
  956. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  957. SendMsg("SEM拍照存储到" + fileName6);
  958. if (!GetImage(ImageMode.SEM, fileName6))
  959. {
  960. SendMsg("SEM拍照失败");
  961. return false;
  962. }
  963. //用宏抓标志图
  964. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  965. SendMsg("用宏抓标志图" + fn);
  966. iSEM.CMDMCFFilename(fn);
  967. //延时1s??
  968. Thread.Sleep(30000);
  969. //恢复简单抓图
  970. Thread.Sleep(5000);
  971. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  972. SendMsg("用宏抓一般图" + fn);
  973. iSEM.CMDMCFFilename(fn);
  974. SendMsg("所有图结束");
  975. return true;
  976. }
  977. //第一个孔的测试过程
  978. public bool FirstHole()
  979. {
  980. MeasureData.CutHole firstHole = m_cutHoles[0];
  981. SendMsg("插入PT针");
  982. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  983. //if (firstHole.PT == true)
  984. {
  985. if (!InsertPT())
  986. {
  987. SendMsg("插入PT针失败");
  988. return false;
  989. }
  990. }
  991. //13. 自动 定位功能
  992. SendMsg("自动定位切割位置");
  993. if (!GetPoistion())
  994. {
  995. SendMsg("自动定位切割位置失败");
  996. return false;
  997. }
  998. //14.自动控制FIB切割
  999. SendMsg("FIB切割");
  1000. if (!FIBCross())
  1001. {
  1002. SendMsg("FIB切割失败");
  1003. return false;
  1004. }
  1005. //{
  1006. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1007. // //2.控制FIB进行切割
  1008. // //3.控制FIB拍照600X
  1009. // //4.保存图片
  1010. // {
  1011. // //1.设置图片名称
  1012. // //2.保存图片3
  1013. // String fileName3 = WorkingFolder + ImageName3;
  1014. // if (!GetImage(ImageMode.FIB, fileName3))
  1015. // {
  1016. // return false;
  1017. // }
  1018. // }
  1019. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1020. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1021. //}
  1022. //15.根据样品类型决定是否撤出PT针
  1023. SendMsg("撤出PT针");
  1024. //if (firstHole.PT == false)
  1025. //{
  1026. if (!RetractPT())
  1027. {
  1028. SendMsg("撤出PT针失败");
  1029. return false;
  1030. }
  1031. //}
  1032. // 16.找到切割位置
  1033. SendMsg("找到切割位置");
  1034. //17.自动控制SEM拍截面照
  1035. SendMsg("观测层高");
  1036. SendMsg("切换SEM控制");
  1037. if (!iSEM.CmdFIBModeSEM())
  1038. {
  1039. SendMsg("SEM模式切换失败");
  1040. return false;
  1041. }
  1042. Thread.Sleep(10000);
  1043. SendMsg("放大6000倍");
  1044. if (!iSEM.SetMagnification(6000))
  1045. {
  1046. SendMsg("放大倍数调整失败");
  1047. return false;
  1048. }
  1049. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1050. {
  1051. SendMsg("拍摄照片完成");
  1052. //return true;
  1053. }
  1054. else
  1055. {
  1056. SendMsg("拍摄照片失败");
  1057. return false;
  1058. }
  1059. SendMsg("图像校正36度");
  1060. //3.设置SEM角度补偿cos36度
  1061. if (!TiltCorrection(36))
  1062. {
  1063. return false;
  1064. }
  1065. Thread.Sleep(3000);
  1066. string fn;
  1067. //用宏抓一般图
  1068. Thread.Sleep(5000);
  1069. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1070. SendMsg("用宏抓一般图" + fn);
  1071. iSEM.CMDMCFFilename(fn);
  1072. //延时1s??
  1073. Thread.Sleep(5000);
  1074. //用宏抓好图
  1075. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1076. SendMsg("用宏抓好图" + fn);
  1077. iSEM.CMDMCFFilename(fn);
  1078. //延时1s??
  1079. Thread.Sleep(30000);
  1080. Thread.Sleep(10000);
  1081. WorkingFolder = m_measureFile.FilePath;
  1082. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1083. SendMsg("SEM拍照存储到" + fileName6);
  1084. if (!GetImage(ImageMode.SEM, fileName6))
  1085. {
  1086. SendMsg("SEM拍照失败");
  1087. return false;
  1088. }
  1089. //用宏抓标志图
  1090. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1091. SendMsg("用宏抓标志图" + fn);
  1092. iSEM.CMDMCFFilename(fn);
  1093. //延时1s??
  1094. Thread.Sleep(30000);
  1095. Thread.Sleep(5000);
  1096. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1097. SendMsg("用宏抓一般图" + fn);
  1098. iSEM.CMDMCFFilename(fn);
  1099. //延时1s??
  1100. Thread.Sleep(5000);
  1101. SendMsg("所有图结束");
  1102. ////17.自动控制SEM拍截面照
  1103. //{
  1104. // //1.控制SEM放大到指定参数大小范围,6000x
  1105. // if (!iSEM.SetMagnification(6000))
  1106. // {
  1107. // return false;
  1108. // }
  1109. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1110. // if (!MeasParam.FocusMode)
  1111. // {
  1112. // //弹出手动对焦的窗口
  1113. // }
  1114. // else
  1115. // {
  1116. // //调用自动对焦模块
  1117. // }
  1118. // //3.设置SEM角度补偿cos36度
  1119. // if (!TiltCorrection(36))
  1120. // {
  1121. // return false;
  1122. // }
  1123. // //4.控制SEM拍照
  1124. // //5.保存照片4
  1125. // String fileName5 = WorkingFolder + ImageName5;
  1126. // if (!GetImage(ImageMode.SEM, fileName5))
  1127. // {
  1128. // return false;
  1129. // }
  1130. // //6.将照片传给客户,获取偏移坐标
  1131. // float x6 = 0, y6 = 0;
  1132. // float angle1 = 0;
  1133. // float mage = 10000;
  1134. // //7.根据坐标控制SEM移动到分析位置
  1135. // if (!iSEM.MoveStageXY(x6, y6))
  1136. // {
  1137. // return false;
  1138. // }
  1139. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1140. // float x7 = iSEM.GetStageAtX();
  1141. // float y7 = iSEM.GetStageAtY();
  1142. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1143. // {
  1144. // return false;
  1145. // }
  1146. // //9.控制SEM平行校正,并记录校正前初始值
  1147. // float foldAnagle = iSEM.GetScanRotation();
  1148. // if (foldAnagle == float.NaN)
  1149. // {
  1150. // return false;
  1151. // }
  1152. // if (!iSEM.SetScanRotation(angle1))
  1153. // {
  1154. // return false;
  1155. // }
  1156. // //10.控制SEM放大到指定参数大小范围
  1157. // if (!iSEM.SetMagnification(mage))
  1158. // {
  1159. // return false;
  1160. // }
  1161. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1162. // if (!MeasParam.FocusMode)
  1163. // {
  1164. // //弹出手动对焦的窗口
  1165. // }
  1166. // else
  1167. // {
  1168. // //调用自动对焦模块
  1169. // }
  1170. // //12.控制SEM对分析位置拍照
  1171. // String fileName6 = WorkingFolder + ImageName6;
  1172. // if (!GetImage(ImageMode.SEM, fileName6))
  1173. // {
  1174. // return false;
  1175. // }
  1176. // //13.保存照片
  1177. // //14.控制SEM取消电子束校正,回到初始值
  1178. // if (!iSEM.SetScanRotation(foldAnagle))
  1179. // {
  1180. // return false;
  1181. // }
  1182. //}
  1183. ////18.自动层高分析
  1184. //{
  1185. // //1.获取SEM Pixel Size给客户传入参数
  1186. // if (iSEM.GetPixelSize() == float.NaN)
  1187. // {
  1188. // return false;
  1189. // }
  1190. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1191. //}
  1192. ////19.自动能谱分析
  1193. //{
  1194. // //1. 确定能谱位置
  1195. // //2. 控制牛津打能谱
  1196. // //3. 能谱分析——面扫+线扫描
  1197. //}
  1198. return true;
  1199. }
  1200. //非第一个孔的测试过程
  1201. public void OtherHole()
  1202. {
  1203. //for (int i = 1; i < m_cutHoles.Count; i++)
  1204. //{
  1205. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1206. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1207. //1. 初始化
  1208. {
  1209. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1210. //读取图像冻结状态
  1211. float ffrozen = iSEM.GetImageFrozen();
  1212. if (ffrozen == float.NaN)
  1213. {
  1214. return;
  1215. }
  1216. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1217. {
  1218. SendMsg("样品台恢复到水平");
  1219. //return true;
  1220. }
  1221. else
  1222. {
  1223. SendMsg("禁止样品台恢复到水平");
  1224. return;
  1225. }
  1226. //2. 调节样品1号孔的样品台6轴坐标
  1227. //3. 将样品1号孔坐标2存入数据库
  1228. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1229. if (!iSEM.SetStageGotoT(0))
  1230. {
  1231. return;
  1232. }
  1233. while (true)
  1234. {
  1235. Thread.Sleep(10000);
  1236. if (iSEM.GetStageIs() == 0)
  1237. {
  1238. break;
  1239. }
  1240. }
  1241. //5. 获取光镜2号孔XY坐标
  1242. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1243. //6. 根据光镜坐标控制样品台移动
  1244. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1245. {
  1246. SendMsg("移动失败");
  1247. }
  1248. while (true)
  1249. {
  1250. Thread.Sleep(10000);
  1251. if (iSEM.GetStageIs() == 0)
  1252. {
  1253. break;
  1254. }
  1255. }
  1256. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1257. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1258. {
  1259. SendMsg("样品台旋转");
  1260. //return true;
  1261. }
  1262. else
  1263. {
  1264. SendMsg("禁止样品台旋转");
  1265. return;
  1266. }
  1267. if (!iSEM.SetStageGotoT(54))
  1268. {
  1269. return;
  1270. }
  1271. while (true)
  1272. {
  1273. Thread.Sleep(10000);
  1274. if (iSEM.GetStageIs() == 0)
  1275. {
  1276. break;
  1277. }
  1278. }
  1279. }
  1280. SendMsg("拉直操作");
  1281. SendMsg("其他操作与1号孔操作一致");
  1282. if (!CommonWork())
  1283. {
  1284. return;
  1285. }
  1286. //2. 定位切割
  1287. {
  1288. //1. 拉直操作
  1289. {
  1290. //1.1 控制SEM进行拍照
  1291. //1.2 图片传给客户,返回偏移角度
  1292. //1.3 根据返回角度,控制样品台转动
  1293. }
  1294. //2. 与1号孔13步相同
  1295. }
  1296. //3. 以后步骤与1号孔以后步骤一致
  1297. //}
  1298. }
  1299. //角度补偿
  1300. public bool TiltCorrection(float a_fAngle)
  1301. {
  1302. //记录原来电镜的状态
  1303. // bool bTilt = false;
  1304. //float fOldTilt = iSEM.GetTiltCorrection();
  1305. //if (fOldTilt == float.NaN)
  1306. //{
  1307. // return false;
  1308. //}
  1309. //else if (fOldTilt == 1)
  1310. //{
  1311. // bTilt = true;
  1312. //}
  1313. //else if (fOldTilt == 0)
  1314. //{
  1315. // bTilt = false;
  1316. //}
  1317. //float fOldAngle = iSEM.GetTiltAngle();
  1318. //if (fOldAngle == float.NaN)
  1319. //{
  1320. // return false;
  1321. //}
  1322. //开启校正
  1323. SendMsg("开启校正");
  1324. if (!iSEM.SetTiltAngleOn())
  1325. {
  1326. return false;
  1327. }
  1328. //设置校正角度
  1329. //if (!iSEM.SetTiltAngle(fOldAngle))
  1330. //{
  1331. // return false;
  1332. //}
  1333. //恢复原始状态
  1334. SendMsg("校正角度"+ a_fAngle.ToString());
  1335. if (!iSEM.SetTiltAngle(a_fAngle))
  1336. {
  1337. return false;
  1338. }
  1339. //if (bTilt)
  1340. //{
  1341. // if (!iSEM.SetTiltCorrectionOn())
  1342. // {
  1343. // return false;
  1344. // }
  1345. //}
  1346. //else
  1347. //{
  1348. // if (!iSEM.SetTiltCorrectionOff())
  1349. // {
  1350. // return false;
  1351. // }
  1352. //}
  1353. return true;
  1354. }
  1355. //拍图
  1356. public bool GetImage(ImageMode a_mode, String a_fileName)
  1357. {
  1358. //1. 图像解冻
  1359. float foldFrozen = iSEM.GetImageFrozen();
  1360. if (foldFrozen == float.NaN)
  1361. {
  1362. return false;
  1363. }
  1364. if (!iSEM.ImageLive())
  1365. {
  1366. return false;
  1367. }
  1368. //2. 确认图像模式
  1369. if (ImageMode.SEM == a_mode)
  1370. {
  1371. if (!iSEM.CmdFIBModeSEM())
  1372. {
  1373. return false;
  1374. }
  1375. }
  1376. else if (ImageMode.FIB == a_mode)
  1377. {
  1378. if (!iSEM.CmdFIBModeFIB())
  1379. {
  1380. return false;
  1381. }
  1382. }
  1383. else
  1384. {
  1385. return false;
  1386. }
  1387. //3. 获取分辨率
  1388. int[] ImageSize = iSEM.GetImageStore();
  1389. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1390. {
  1391. return false;
  1392. }
  1393. short width = (short)ImageSize[0];
  1394. short height = (short)ImageSize[1];
  1395. //4. 抓图
  1396. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1397. {
  1398. return false;
  1399. }
  1400. //5. 恢复初始状态
  1401. if (foldFrozen == 0)
  1402. {
  1403. if (!iSEM.ImageLive())
  1404. {
  1405. return false;
  1406. }
  1407. }
  1408. else if (foldFrozen == 1)
  1409. {
  1410. if (!iSEM.ImageFrozen())
  1411. {
  1412. return false;
  1413. }
  1414. }
  1415. return true;
  1416. }
  1417. //自动聚焦
  1418. public bool AutoFocus(string a_strPath, out int a_nWd)
  1419. {
  1420. a_nWd = 0;
  1421. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1422. return true;
  1423. }
  1424. }
  1425. }