Measure.cs 81 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using WebManager;
  16. using OpenCvSharp;
  17. namespace MeasureThread
  18. {
  19. //图片模式
  20. public enum ImageMode
  21. {
  22. FIB,
  23. SEM
  24. }
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. public class ThreadStatusEventArgs
  28. {
  29. //状态
  30. public string State
  31. {
  32. get { return m_state; }
  33. set { m_state = value; }
  34. }
  35. private string m_state;
  36. //时间
  37. public DateTime Time
  38. {
  39. get { return m_time; }
  40. set { m_time = value; }
  41. }
  42. private DateTime m_time;
  43. //步骤代码
  44. public String Step_Code
  45. {
  46. get { return step_Code; }
  47. set { step_Code = value; }
  48. }
  49. private String step_Code;
  50. //其他消息
  51. public String Message
  52. {
  53. get { return this.message; }
  54. set { this.message = value; }
  55. }
  56. private String message;
  57. //孔名
  58. public String HoleName
  59. {
  60. get { return this.holeName; }
  61. set { this.holeName = value; }
  62. }
  63. private String holeName;
  64. //图片信息
  65. public class PictureInformation
  66. {
  67. public String Picture_FullPath
  68. {
  69. get { return picture_FullPath; }
  70. set { picture_FullPath = value; }
  71. }
  72. private String picture_FullPath;
  73. public double Work_Voltage
  74. {
  75. get { return work_Voltage; }
  76. set { work_Voltage = value; }
  77. }
  78. private double work_Voltage;
  79. public double Magnification
  80. {
  81. get { return magnification; }
  82. set { magnification = value; }
  83. }
  84. private double magnification;
  85. public double Work_Distance
  86. {
  87. get { return work_Distance; }
  88. set { work_Distance = value; }
  89. }
  90. private double work_Distance;
  91. public String Work_Status
  92. {
  93. get { return work_Status; }
  94. set { work_Status = value; }
  95. }
  96. private String work_Status;
  97. }
  98. //图片信息实例类
  99. public PictureInformation Picture_Information
  100. {
  101. get { return picture_Information; }
  102. set { picture_Information = value; }
  103. }
  104. private PictureInformation picture_Information;
  105. //图像信息
  106. public class ImageInformation
  107. {
  108. public int Method_Name
  109. {
  110. get { return method_Name; }
  111. set { method_Name = value; }
  112. }
  113. private int method_Name;
  114. public Source_Img_Degree_Direction SIDD;
  115. public Cut_Position CP;
  116. public Cut_Success CS;
  117. public Trapezoid_Top_Center_Position TTCP;
  118. public Auto_Foucs AF;
  119. public Auto_Stigmatic AS;
  120. public Center_Position_OffsetAngle_Direction CPOD;
  121. public Measure_Size MS;
  122. public ImageInformation()
  123. {
  124. SIDD = new Source_Img_Degree_Direction();
  125. CP = new Cut_Position();
  126. CS = new Cut_Success();
  127. TTCP = new Trapezoid_Top_Center_Position();
  128. AF = new Auto_Foucs();
  129. AS = new Auto_Stigmatic();
  130. CPOD = new Center_Position_OffsetAngle_Direction();
  131. MS = new Measure_Size();
  132. }
  133. //1-计算原始图像偏移角度及方向
  134. public class Source_Img_Degree_Direction
  135. {
  136. public Boolean Is_Image = false;
  137. public double Degree
  138. {
  139. get { return degree; }
  140. set { degree = value; }
  141. }
  142. private double degree;
  143. public int Direction
  144. {
  145. get { return direction; }
  146. set { direction = value; }
  147. }
  148. private int direction;
  149. public int State
  150. {
  151. get { return state; }
  152. set { state = value; }
  153. }
  154. private int state;
  155. }
  156. //2-计算切割点位置
  157. public class Cut_Position
  158. {
  159. public Boolean Is_Image = false;
  160. public double Offsetx
  161. {
  162. get { return offsetx; }
  163. set { offsetx = value; }
  164. }
  165. private double offsetx;
  166. public double Offsety
  167. {
  168. get { return offsety; }
  169. set { offsety = value; }
  170. }
  171. private double offsety;
  172. public int State
  173. {
  174. get { return state; }
  175. set { state = value; }
  176. }
  177. private int state;
  178. }
  179. //3-是否切割成功
  180. public class Cut_Success
  181. {
  182. public Boolean Is_Image = false;
  183. public int State
  184. {
  185. get { return state; }
  186. set { state = value; }
  187. }
  188. private int state;
  189. }
  190. //4-计算切割后图像梯形区域上边中心点坐标
  191. public class Trapezoid_Top_Center_Position
  192. {
  193. public Boolean Is_Image = false;
  194. public double TopCenterX
  195. {
  196. get { return topCenterX; }
  197. set { topCenterX = value; }
  198. }
  199. private double topCenterX;
  200. public double TopCenterY
  201. {
  202. get { return topCenterY; }
  203. set { topCenterY = value; }
  204. }
  205. private double topCenterY;
  206. public int State
  207. {
  208. get { return state; }
  209. set { state = value; }
  210. }
  211. private int state;
  212. }
  213. //5-自动对焦
  214. public class Auto_Foucs
  215. {
  216. public Boolean Is_Image = true;
  217. public String Img_Path
  218. {
  219. get { return img_Path; }
  220. set { img_Path = value; }
  221. }
  222. private String img_Path;
  223. }
  224. //6-自动像闪
  225. public class Auto_Stigmatic
  226. {
  227. public Boolean Is_Image = true;
  228. public String Img_Path
  229. {
  230. get { return img_Path; }
  231. set { img_Path = value; }
  232. }
  233. private String img_Path;
  234. }
  235. //7-计算切割面区域中心坐标,以及偏移角度及方向
  236. public class Center_Position_OffsetAngle_Direction
  237. {
  238. public Boolean Is_Image = false;
  239. public double CenterX
  240. {
  241. get { return centerX; }
  242. set { centerX = value; }
  243. }
  244. private double centerX;
  245. public double CenterY
  246. {
  247. get { return centerY; }
  248. set { centerY = value; }
  249. }
  250. private double centerY;
  251. public double Degree
  252. {
  253. get { return degree; }
  254. set { degree = value; }
  255. }
  256. private double degree;
  257. public int Direction
  258. {
  259. get { return direction; }
  260. set { direction = value; }
  261. }
  262. private int direction;
  263. public int State
  264. {
  265. get { return state; }
  266. set { state = value; }
  267. }
  268. private int state;
  269. }
  270. //8-测量尺寸
  271. public class Measure_Size
  272. {
  273. public Boolean Is_Image = false;
  274. public int State
  275. {
  276. get { return state; }
  277. set { state = value; }
  278. }
  279. private int state;
  280. }
  281. }
  282. //图像信息实例类
  283. public ImageInformation Image_Information
  284. {
  285. get { return image_Information; }
  286. set { image_Information = value; }
  287. }
  288. private ImageInformation image_Information;
  289. public ThreadStatusEventArgs(string a_State)
  290. {
  291. picture_Information = new PictureInformation();
  292. image_Information = new ImageInformation();
  293. }
  294. }
  295. public class CutHolesStatusEventArgs
  296. {
  297. public string State
  298. {
  299. get { return m_state; }
  300. set { m_state = value; }
  301. }
  302. private string m_state;
  303. public string HoleName
  304. {
  305. get { return m_holeName; }
  306. set { m_holeName = value; }
  307. }
  308. private string m_holeName;
  309. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  310. {
  311. this.m_state = a_state;
  312. this.m_holeName = a_holeName;
  313. }
  314. }
  315. public class Measure
  316. {
  317. /// <summary>
  318. /// 图像拉直算法
  319. /// </summary>
  320. /// <param name="Slope">倾斜角度</param>
  321. /// <param name="x0">圆心坐标x</param>
  322. /// <param name="y0">圆心坐标y</param>
  323. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  324. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  325. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  326. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  327. /// <returns></returns>
  328. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  329. {
  330. try
  331. {
  332. double xr = x1 - x0;//倾斜图到中心的距离差x
  333. double yr = y1 - y0;//倾斜图到中心的距离差y
  334. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  335. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  336. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  337. double k_S = k - Slope;//通过夹角差求x2,y2
  338. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  339. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  340. if (Slope > 0 || Slope < 0)
  341. {
  342. Hx = x1 - x2;
  343. Hy = y1 - y2;
  344. }
  345. else
  346. {
  347. Hx = 0;
  348. Hy = 0;
  349. }
  350. return true;
  351. }
  352. catch (Exception)
  353. {
  354. return false;
  355. }
  356. }
  357. public WebResult wr = null;
  358. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  359. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  360. //定义一个全局的消息类
  361. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  362. //全局只有一个fatorySEM
  363. static FactoryHardware factorySEM = FactoryHardware.Instance;
  364. ISEMControl iSEM = factorySEM.ISEM;
  365. //@的作用是不用转义字符\\只打一个就行
  366. const String ImageName1 = @"ImageSEMH.tif"; //传给客户,作水平校正
  367. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  368. const String ImageName31 = @"ImageFIBBefore.tif";
  369. const String ImageName32 = @"ImageFIBAfter.tif";
  370. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  371. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  372. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  373. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  374. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  375. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  376. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  377. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  378. const String ElyDeposition = @"Deposition.ely"; //沉积
  379. const String ElyCrossSection = @"CrossSection.ely"; //切割
  380. const float fMin = (float)0.0000002; //单位是米
  381. public Boolean key_stop = false;
  382. String focus_path = "";
  383. String data_path = "";
  384. int m_nWorkHoleNo = -1;
  385. //测量文件
  386. private MeasureFile m_measureFile;
  387. public MeasureFile MeasureFile
  388. {
  389. get { return this.m_measureFile; }
  390. set { this.m_measureFile = value; }
  391. }
  392. //测量的切割孔
  393. private List<MeasureData.CutHole> m_cutHoles;
  394. public List<MeasureData.CutHole> cutHoles
  395. {
  396. get { return this.m_cutHoles; }
  397. set { this.m_cutHoles = value; }
  398. }
  399. //工作文件夹
  400. private string m_WorkingFolder;
  401. public string WorkingFolder
  402. {
  403. get { return this.m_WorkingFolder; }
  404. set { this.m_WorkingFolder = value; }
  405. }
  406. //程序当前路径
  407. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  408. //线程状态
  409. private ThreadStatus m_ThreadStatus;
  410. public ThreadStatus TStatus
  411. {
  412. get { return this.m_ThreadStatus; }
  413. set { this.m_ThreadStatus = value; }
  414. }
  415. //测量参数
  416. private MeasureParam m_MsParam;
  417. public MeasureParam MeasParam
  418. {
  419. get { return this.m_MsParam; }
  420. set { this.m_MsParam = value; }
  421. }
  422. //
  423. //构造函数
  424. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  425. {
  426. MeasParam = new MeasureParam();
  427. TStatus = new ThreadStatus();
  428. cutHoles = new List<MeasureData.CutHole>();
  429. //配置远程连接
  430. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  431. }
  432. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  433. public bool InitMeas(MeasureFile a_measureFile)
  434. {
  435. m_measureFile = a_measureFile;
  436. List<CutHole> listHoles = m_measureFile.ListCutHole;
  437. foreach (CutHole h in listHoles)
  438. {
  439. if (h.SWITCH == true)
  440. {
  441. m_cutHoles.Add(h);
  442. }
  443. }
  444. if (m_cutHoles.Count == 0)
  445. return false;
  446. this.m_MsParam = m_measureFile.MParam;
  447. return true;
  448. }
  449. public void SendMsg(string step_code)
  450. {
  451. arg.Step_Code = step_code;
  452. arg.Time = DateTime.Now;
  453. //switch(step_code)
  454. //{
  455. // //拍照
  456. // case "1-4":
  457. // case "1-6":
  458. // case "1-11":
  459. // case "1-13":
  460. // case "1-19":
  461. // case "1-25":
  462. // case "1-29":
  463. // //电压、放大倍数、工作距离、位置信息、图片路径
  464. // break;
  465. // case "1-10":
  466. // case "1-18":
  467. // //获取偏移信息
  468. // break;
  469. // case "1-12":
  470. // case "1-20":
  471. // //验证移动准备性
  472. // break;
  473. // case "1-26":
  474. // //取消电子束校正并初始化
  475. // break;
  476. // default:
  477. // arg.State = "1";
  478. // break;
  479. //}
  480. SendThreadStatus(this, arg);
  481. }
  482. public void SendCutHoleMsg(string a_state, string a_holeName)
  483. {
  484. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  485. arg.HoleName = a_holeName;
  486. arg.State = a_state;
  487. SendCutHolesStatus(this, arg);
  488. }
  489. //测量流程
  490. public void DoMeasure()
  491. {
  492. //创建线程的测量状态的更新
  493. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  494. if (SendThreadStatus != null)
  495. {
  496. //SendMsg("开始测量。");
  497. }
  498. LogManager.AddHardwareLog("开始测量",true);
  499. //检查硬件连接是否正常
  500. if (!ConnectHardware())
  501. {
  502. //SendMsg("连接硬件失败。");
  503. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  504. return;
  505. }
  506. //SendMsg("硬件连接成功。");
  507. //设置工作文件夹
  508. if (!SetWorkingFolderStr())
  509. {
  510. //SendMsg("设置工作文件夹失败");
  511. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  512. return;
  513. }
  514. //SendMsg("创建工作文件路径为" + WorkingFolder);
  515. float[] firstPosition;
  516. //将停止键复位
  517. key_stop = false;
  518. for (int i = 0; i < m_cutHoles.Count; i++)
  519. {
  520. m_nWorkHoleNo = i;
  521. arg.HoleName = m_cutHoles[i].HoleName;
  522. //创建文件夹,孔名文件夹结构
  523. //最终数据存放目录
  524. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  525. //对焦数据存放目录
  526. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  527. m_MsParam.AutoFocus.Path = focus_path;
  528. if (!Directory.Exists(focus_path))
  529. {
  530. Directory.CreateDirectory(focus_path);
  531. }
  532. //判断孔状态
  533. if(m_cutHoles[i].STATE != State.Unmeasured)
  534. {
  535. continue;
  536. }
  537. //开始循环工作
  538. if (i == 0)
  539. {
  540. //SendMsg("第一个切孔开始测量");
  541. //切孔操作-开始
  542. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  543. firstPosition = iSEM.GetStagePosition();
  544. //第一个孔的测试
  545. //成功
  546. if(FirstHole())
  547. {
  548. //保存文件,将测量状态更改
  549. m_cutHoles[i].STATE = State.Success;
  550. m_measureFile.Save();
  551. }
  552. //失败
  553. else
  554. {
  555. m_cutHoles[i].STATE = State.Failed;
  556. m_measureFile.Save();
  557. }
  558. //切孔操作-完成
  559. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  560. }
  561. else
  562. {
  563. //非第一个孔的测试
  564. SendMsg("第" + i.ToString() + "个切孔开始测量");
  565. //切孔操作-开始
  566. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  567. //其他孔的测试
  568. //成功
  569. if (OtherHole())
  570. {
  571. //保存文件,将测量状态更改
  572. m_cutHoles[i].STATE = State.Success;
  573. m_measureFile.Save();
  574. }
  575. //失败
  576. else
  577. {
  578. m_cutHoles[i].STATE = State.Failed;
  579. m_measureFile.Save();
  580. }
  581. //切孔操作-完成
  582. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  583. }
  584. if(key_stop)
  585. {
  586. m_cutHoles[i].STATE = State.Unmeasured;
  587. m_measureFile.Save();
  588. break;
  589. }
  590. }
  591. }
  592. //检查硬件连接是否正常
  593. public bool ConnectHardware()
  594. {
  595. //返回硬件的连接状态
  596. return iSEM.ConnectStatus();
  597. }
  598. //设置工作文件夹
  599. public bool SetWorkingFolderStr()
  600. {
  601. WorkingFolder = m_measureFile.FilePath;
  602. return true;
  603. }
  604. //插入PT针
  605. public bool InsertPT()
  606. {
  607. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  608. //SendMsg("调用宏插入PT针宏文件" + fn);
  609. iSEM.CMDMCFFilename(fn);
  610. //延时1s??
  611. Thread.Sleep(1000);
  612. return true;
  613. }
  614. //撤出PT针
  615. public bool RetractPT()
  616. {
  617. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  618. //SendMsg("调用宏撤出PT针宏文件" + fn);
  619. iSEM.CMDMCFFilename(fn);
  620. //延时1s??
  621. Thread.Sleep(1000);
  622. return true;
  623. }
  624. //PT沉积
  625. public bool PTWork()
  626. {
  627. //执行PT沉积的ELY文件
  628. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  629. //SendMsg("执行PT沉积Ely文件:" + fn);
  630. if (!ExcuteEly(fn))
  631. {
  632. return false;
  633. }
  634. //等待沉积完成
  635. while (true)
  636. {
  637. Thread.Sleep(10000);
  638. if (iSEM.GetFIBMode() == 0)
  639. {
  640. break;
  641. }
  642. }
  643. return true;
  644. }
  645. //FIB切割
  646. public bool FIBWork()
  647. {
  648. //执行PT沉积的ELY文件
  649. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  650. //SendMsg("执行FIB切割Ely文件:" + fn);
  651. if (!ExcuteEly(fn))
  652. {
  653. return false;
  654. }
  655. //等待切割完成
  656. while (true)
  657. {
  658. Thread.Sleep(10000);
  659. if (iSEM.GetFIBMode() == 0)
  660. {
  661. break;
  662. }
  663. }
  664. return true;
  665. }
  666. //执行ELY文件的步骤
  667. public bool ExcuteEly(string a_filename)
  668. {
  669. //执行ELy文件有三个动作
  670. //1. 选择ELY文件
  671. //SendMsg("选择ELY文件");
  672. if (!iSEM.CmdFIBLoadELY(a_filename))
  673. {
  674. //SendMsg("选择ELY文件失败");
  675. return false;
  676. }
  677. Thread.Sleep(1000);
  678. //2. 确认ELY文件
  679. //SendMsg("确认ELY文件");
  680. if (!iSEM.CmdFIBEXPOSUREELY())
  681. {
  682. //SendMsg("确认ELY文件失败");
  683. return false;
  684. }
  685. Thread.Sleep(1000);
  686. //3. 执行ELY文件
  687. //SendMsg("执行ELY文件");
  688. if (!iSEM.CmdFIBSTARTELY())
  689. {
  690. //SendMsg("执行ELY文件失败");
  691. return false;
  692. }
  693. Thread.Sleep(1000);
  694. return true;
  695. }
  696. //执行自动对焦
  697. public bool ImageFocus()
  698. {
  699. if (m_measureFile.MParam.FocusMode == 1)//手动
  700. {
  701. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  702. {
  703. return true;
  704. }
  705. else
  706. {
  707. return false;
  708. }
  709. }
  710. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  711. {
  712. //郝工增加自动对焦算法
  713. //处理文件夹
  714. if(Directory.Exists(focus_path))
  715. {
  716. Directory.Delete(focus_path,true);
  717. }
  718. Directory.CreateDirectory(focus_path);
  719. //1、对焦参数类,2、输出工作距离
  720. int wd = 0;
  721. AutoFocus(m_MsParam.AutoFocus, out wd);
  722. LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  723. //设置工作距离
  724. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  725. return true;
  726. //处理图片位置
  727. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  728. }
  729. else if (m_MsParam.FocusMode == 3) //客户自动
  730. {
  731. //后期和客户对接接口
  732. List<string> filenames = new List<string>();
  733. String retfilename = wr.Img_Auto_Focus(filenames);
  734. }
  735. else //蔡司自动对焦
  736. {
  737. }
  738. return true;
  739. }
  740. /// <summary>
  741. ///13. 自动 定位功能,沉积
  742. /// </summary>
  743. /// <returns></returns>
  744. public bool GetPoistion(Boolean isFirst)
  745. {
  746. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  747. int state = 0;
  748. //1.控制SEM放大600X
  749. arg.State = "SEM";
  750. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  751. {
  752. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  753. SendMsg("1-1");
  754. return false;
  755. }
  756. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  757. SendMsg("1-1");
  758. //判断是否停止进程
  759. if (key_stop)
  760. {
  761. return false;
  762. }
  763. //2.控制SEM自动对焦、亮度、对比度
  764. if(ImageFocus())
  765. {
  766. arg.Message = "自动对焦完成";
  767. SendMsg("1-2");
  768. }
  769. else
  770. {
  771. arg.Message = "自动对焦失败";
  772. SendMsg("1-2");
  773. }
  774. //判断是否停止进程
  775. if (key_stop)
  776. {
  777. return false;
  778. }
  779. //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
  780. if (!isFirst)
  781. {
  782. if (!TiltCorrection(54))
  783. {
  784. arg.Message = "设置SEM进行角度补偿54度失败";
  785. SendMsg("1-3");
  786. return false;
  787. }
  788. arg.Message = "设置SEM进行角度补偿54度成功";
  789. SendMsg("1-3");
  790. Thread.Sleep(5000);
  791. //判断是否停止进程
  792. if (key_stop)
  793. {
  794. return false;
  795. }
  796. }
  797. //4.控制SEM拍照,5保存照片=====需要更改路径
  798. String fileName1 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  799. arg.Picture_Information.Picture_FullPath = fileName1;
  800. arg.Picture_Information.Work_Status = "SEM";
  801. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  802. Thread.Sleep(1000);
  803. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  804. Thread.Sleep(1000);
  805. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  806. Thread.Sleep(1000);
  807. if (!GetImage(ImageMode.SEM, fileName1))
  808. {
  809. arg.Message = "SEM拍照失败";
  810. SendMsg("1-5");
  811. return false;
  812. }
  813. arg.Message = "SEM拍照成功";
  814. SendMsg("1-4");
  815. Thread.Sleep(3000);
  816. //判断是否停止进程
  817. if (key_stop)
  818. {
  819. return false;
  820. }
  821. //判断是否为仅拍照,不是则执行FIB操作
  822. if (!m_MsParam.Is_Photograph)
  823. {
  824. //6.设置FIB拍照参数——扫描时间、束流等
  825. //7.控制FIB自动亮度、对比度
  826. if (!iSEM.CmdFIBModeFIB())
  827. {
  828. arg.Message = "FIB模式切换失败";
  829. SendMsg("1-5");
  830. return false;
  831. }
  832. arg.State = "FIB";
  833. arg.Message = "FIB模式切换成功";
  834. SendMsg("1-5");
  835. Thread.Sleep(10000);
  836. //判断是否停止进程
  837. if (key_stop)
  838. {
  839. return false;
  840. }
  841. //8.控制FIB拍照
  842. //9.保存照片======更改路径
  843. String fileName2 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  844. arg.Picture_Information.Picture_FullPath = fileName2;
  845. arg.Picture_Information.Work_Status = "FIB";
  846. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  847. Thread.Sleep(1000);
  848. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  849. Thread.Sleep(1000);
  850. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  851. Thread.Sleep(1000);
  852. if (!GetImage(ImageMode.FIB, fileName2))
  853. {
  854. arg.Message = "FIB拍照失败";
  855. SendMsg("1-6");
  856. return false;
  857. }
  858. arg.Message = "FIB拍照成功";
  859. SendMsg("1-6");
  860. Thread.Sleep(3000);
  861. //判断是否停止进程
  862. if (key_stop)
  863. {
  864. return false;
  865. }
  866. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  867. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  868. {
  869. arg.Message = "样品台移动到指定位置";
  870. SendMsg("1-7");
  871. }
  872. else
  873. {
  874. wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  875. if (state == 1)
  876. {
  877. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  878. if (!iSEM.MoveStageXY(x1, y1))
  879. {
  880. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  881. SendMsg("1-7");
  882. return false;
  883. }
  884. //判断是否移动完成
  885. while (true)
  886. {
  887. Thread.Sleep(5000);
  888. if (iSEM.GetStageIs() == 0)
  889. {
  890. break;
  891. }
  892. }
  893. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  894. SendMsg("1-7");
  895. }
  896. else
  897. {
  898. arg.Message = "样品台移动失败";
  899. SendMsg("1-7");
  900. return false;
  901. }
  902. }
  903. //判断是否停止进程
  904. if (key_stop)
  905. {
  906. return false;
  907. }
  908. //11.自动工具样品类型参数确定是否需要PT沉积
  909. if (m_MsParam.PT)
  910. {
  911. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  912. //第10步已经移动好位置
  913. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  914. x0 = iSEM.GetStageAtX();
  915. y0 = iSEM.GetStageAtY();
  916. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  917. {
  918. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
  919. SendMsg("1-8");
  920. return false;
  921. }
  922. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
  923. SendMsg("1-8");
  924. //判断是否停止进程
  925. if (key_stop)
  926. {
  927. return false;
  928. }
  929. //3. 根据坐标进行PT沉积
  930. if (!PTWork())
  931. {
  932. arg.Message = "PT沉积失败";
  933. SendMsg("1-9");
  934. return false;
  935. }
  936. arg.Message = "PT沉积成功";
  937. SendMsg("1-9");
  938. //判断是否停止进程
  939. if (key_stop)
  940. {
  941. return false;
  942. }
  943. }
  944. }
  945. //12.根据梯形坐标控制FIB调整到中心位置
  946. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  947. //以上两步已经将程序移动到11内部去做
  948. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  949. float[] firstPosition = iSEM.GetStagePosition();
  950. m_cutHoles[0].Position.X = firstPosition[0];
  951. m_cutHoles[0].Position.Y = firstPosition[1];
  952. m_cutHoles[0].Position.Z = firstPosition[2];
  953. m_cutHoles[0].Position.T = firstPosition[3];
  954. m_cutHoles[0].Position.R = firstPosition[4];
  955. m_cutHoles[0].Position.M = firstPosition[5];
  956. //这里要调用文件保存功能
  957. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  958. + firstPosition[1].ToString() + ","
  959. + firstPosition[2].ToString() + ","
  960. + firstPosition[3].ToString() + ","
  961. + firstPosition[4].ToString() + ","
  962. + firstPosition[5].ToString() + ")";
  963. SendMsg("1-10");
  964. //判断是否停止进程
  965. if (key_stop)
  966. {
  967. return false;
  968. }
  969. return true;
  970. }
  971. /// <summary>
  972. /// 14. FIB切割
  973. /// </summary>
  974. /// <returns></returns>
  975. public bool FIBCross()
  976. {
  977. int state = 0;
  978. //切之前拍照保存,,
  979. String fileName31 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName31;
  980. arg.Picture_Information.Picture_FullPath = fileName31;
  981. arg.Picture_Information.Work_Status = "FIB";
  982. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  983. Thread.Sleep(1000);
  984. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  985. Thread.Sleep(1000);
  986. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  987. Thread.Sleep(1000);
  988. if (!GetImage(ImageMode.FIB, fileName31))
  989. {
  990. arg.Message = "FIB切割前拍照失败";
  991. SendMsg("1-11");
  992. return false;
  993. }
  994. arg.Message = "FIB切割前拍照成功";
  995. SendMsg("1-11");
  996. //判断是否停止进程
  997. if (key_stop)
  998. {
  999. return false;
  1000. }
  1001. //14.自动控制FIB切割
  1002. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1003. //2.控制FIB进行切割
  1004. //以上1、2步全部用ELY文件代替
  1005. if (!FIBWork())
  1006. {
  1007. arg.Message = "FIB切割失败";
  1008. SendMsg("1-12");
  1009. return false;
  1010. }
  1011. arg.Message = "FIB切割成功";
  1012. SendMsg("1-12");
  1013. Thread.Sleep(5000);
  1014. //判断是否停止进程
  1015. if (key_stop)
  1016. {
  1017. return false;
  1018. }
  1019. //3.控制FIB拍照600X
  1020. //底层没有控制方法。
  1021. //4.保存图片
  1022. String fileName32 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName32;
  1023. arg.Picture_Information.Picture_FullPath = fileName32;
  1024. arg.Picture_Information.Work_Status = "FIB";
  1025. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1026. Thread.Sleep(1000);
  1027. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1028. Thread.Sleep(1000);
  1029. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1030. Thread.Sleep(1000);
  1031. if (!GetImage(ImageMode.FIB, fileName32))
  1032. {
  1033. arg.Message = "FIB切割后拍照失败";
  1034. SendMsg("1-13");
  1035. return false;
  1036. }
  1037. arg.Message = "FIB切割后拍照成功";
  1038. SendMsg("1-13");
  1039. Thread.Sleep(3000);
  1040. //判断是否停止进程
  1041. if (key_stop)
  1042. {
  1043. return false;
  1044. }
  1045. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1046. wr.Img_Cut_Success(fileName31, fileName32, out state);
  1047. if(state == 0)
  1048. {
  1049. arg.Message = "FIB切割校验失败";
  1050. SendMsg("1-14");
  1051. return false;
  1052. }
  1053. arg.Message = "FIB切割校验成功";
  1054. SendMsg("1-14");
  1055. //判断是否停止进程
  1056. if (key_stop)
  1057. {
  1058. return false;
  1059. }
  1060. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1061. //拍完照自动解冻,这里不做处理。
  1062. return true;
  1063. }
  1064. /// <summary>
  1065. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1066. /// </summary>
  1067. /// <returns></returns>
  1068. public bool FindCross()
  1069. {
  1070. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1071. float angle = 0;
  1072. int direction = 0;
  1073. int state = 0;
  1074. //切换到SEM模式
  1075. if (!iSEM.CmdFIBModeSEM())
  1076. {
  1077. arg.Message = "SEM模式切换失败";
  1078. SendMsg("1-16");
  1079. return false;
  1080. }
  1081. arg.Message = "SEM模式切换成功";
  1082. SendMsg("1-16");
  1083. arg.State = "SEM";
  1084. Thread.Sleep(10000);
  1085. //判断是否停止进程
  1086. if (key_stop)
  1087. {
  1088. return false;
  1089. }
  1090. //1.控制SEM放大到300倍
  1091. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/2))
  1092. {
  1093. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 2).ToString("0.0") + "倍失败";
  1094. SendMsg("1-17");
  1095. return false;
  1096. }
  1097. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/2).ToString("0.0") + "倍成功";
  1098. SendMsg("1-17");
  1099. //判断是否停止进程
  1100. if (key_stop)
  1101. {
  1102. return false;
  1103. }
  1104. //2.控制SEM自动对焦、亮度、对比度-接口,,将自动对焦提出单独函数调用
  1105. if (ImageFocus())
  1106. {
  1107. arg.Message = "自动对焦完成";
  1108. SendMsg("1-18");
  1109. }
  1110. else
  1111. {
  1112. arg.Message = "自动对焦失败";
  1113. SendMsg("1-18");
  1114. }
  1115. Thread.Sleep(5000);
  1116. //判断是否停止进程
  1117. if (key_stop)
  1118. {
  1119. return false;
  1120. }
  1121. //3.控制SEM拍照
  1122. String fileName4 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
  1123. arg.Picture_Information.Picture_FullPath = fileName4;
  1124. arg.Picture_Information.Work_Status = "SEM";
  1125. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1126. Thread.Sleep(1000);
  1127. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1128. Thread.Sleep(1000);
  1129. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1130. Thread.Sleep(1000);
  1131. if (!GetImage(ImageMode.SEM, fileName4))
  1132. {
  1133. arg.Message = "SEM拍照失败";
  1134. SendMsg("1-19");
  1135. return false;
  1136. }
  1137. arg.Message = "SEM拍照成功";
  1138. SendMsg("1-19");
  1139. Thread.Sleep(3000);
  1140. //判断是否停止进程
  1141. if (key_stop)
  1142. {
  1143. return false;
  1144. }
  1145. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1146. //5.根据坐标控制SEM移动到切孔位置,居中
  1147. //这里是否用到拉直操作,我没有加
  1148. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1149. {
  1150. arg.Message = "样品台移动到指定位置";
  1151. SendMsg("1-20");
  1152. }
  1153. else
  1154. {
  1155. wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName,
  1156. m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
  1157. if (state == 1)
  1158. {
  1159. //拉直操作
  1160. Straightening(angle, 65, 65, x1, y1, ref x2, ref y2);
  1161. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1162. if (!iSEM.MoveStageXY(x2, y2))
  1163. {
  1164. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1165. SendMsg("1-20");
  1166. return false;
  1167. }
  1168. //判断是否移动完成
  1169. while (true)
  1170. {
  1171. Thread.Sleep(5000);
  1172. if (iSEM.GetStageIs() == 0)
  1173. {
  1174. break;
  1175. }
  1176. }
  1177. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1178. SendMsg("1-20");
  1179. }
  1180. else
  1181. {
  1182. arg.Message = "样品台移动失败";
  1183. SendMsg("1-20");
  1184. return false;
  1185. }
  1186. }
  1187. //判断是否停止进程
  1188. if (key_stop)
  1189. {
  1190. return false;
  1191. }
  1192. //6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1193. x0 = iSEM.GetStageAtX();
  1194. y0 = iSEM.GetStageAtY();
  1195. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1196. {
  1197. arg.Message = "位置校验失败";
  1198. SendMsg("1-21");
  1199. return false;
  1200. }
  1201. arg.Message = "位置校验成功";
  1202. SendMsg("1-21");
  1203. //判断是否停止进程
  1204. if (key_stop)
  1205. {
  1206. return false;
  1207. }
  1208. return true;
  1209. }
  1210. /// <summary>
  1211. /// 17.自动控制SEM拍截面照
  1212. /// </summary>
  1213. /// <returns></returns>
  1214. public bool ShotSection(ref String image18)
  1215. {
  1216. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1217. int state = 0;
  1218. //1、放大6000倍,放大倍数参数photograph_
  1219. if (!iSEM.SetMagnification(m_MsParam.Photograph_Magnification))
  1220. {
  1221. arg.Message = "放大倍数调整失败";
  1222. SendMsg("1-22");
  1223. return false;
  1224. }
  1225. arg.Message = "放大倍数调整成功";
  1226. SendMsg("1-22");
  1227. //判断是否停止进程
  1228. if (key_stop)
  1229. {
  1230. return false;
  1231. }
  1232. //2.控制SEM自动对焦、亮度、对比度-接口
  1233. if (ImageFocus())
  1234. {
  1235. arg.Message = "自动对焦完成";
  1236. SendMsg("1-23");
  1237. }
  1238. else
  1239. {
  1240. arg.Message = "自动对焦失败";
  1241. SendMsg("1-23");
  1242. }
  1243. //判断是否停止进程
  1244. if (key_stop)
  1245. {
  1246. return false;
  1247. }
  1248. //3、设置SEM补偿角度
  1249. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1250. {
  1251. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1252. SendMsg("1-24");
  1253. return false;
  1254. }
  1255. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1256. SendMsg("1-24");
  1257. Thread.Sleep(5000);
  1258. //判断是否停止进程
  1259. if (key_stop)
  1260. {
  1261. return false;
  1262. }
  1263. //4、拍照,5、保存照片
  1264. String fileName5 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
  1265. arg.Picture_Information.Picture_FullPath = fileName5;
  1266. arg.Picture_Information.Work_Status = "SEM";
  1267. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1268. Thread.Sleep(1000);
  1269. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1270. Thread.Sleep(1000);
  1271. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1272. Thread.Sleep(1000);
  1273. if (!GetImage(ImageMode.SEM, fileName5))
  1274. {
  1275. arg.Message = "SEM拍照失败";
  1276. SendMsg("1-25");
  1277. return false;
  1278. }
  1279. arg.Message = "SEM拍照成功";
  1280. SendMsg("1-25");
  1281. Thread.Sleep(3000);
  1282. //判断是否停止进程
  1283. if (key_stop)
  1284. {
  1285. return false;
  1286. }
  1287. //6、获取偏移坐标,7、移动到位
  1288. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1289. {
  1290. arg.Message = "样品台移动到指定位置";
  1291. SendMsg("1-26");
  1292. }
  1293. else
  1294. {
  1295. //8,图像T形
  1296. wr.Img_Trapezoid_Top_Center_Position(fileName5, out x1, out y1, out state);
  1297. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1298. if (state == 1)
  1299. {
  1300. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1301. if (!iSEM.MoveStageXY(x1, y1))
  1302. {
  1303. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1304. SendMsg("1-26");
  1305. return false;
  1306. }
  1307. //判断是否移动完成
  1308. while (true)
  1309. {
  1310. Thread.Sleep(5000);
  1311. if (iSEM.GetStageIs() == 0)
  1312. {
  1313. break;
  1314. }
  1315. }
  1316. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1317. SendMsg("1-26");
  1318. }
  1319. else
  1320. {
  1321. arg.Message = "样品台移动失败";
  1322. SendMsg("1-26");
  1323. return false;
  1324. }
  1325. }
  1326. //判断是否停止进程
  1327. if (key_stop)
  1328. {
  1329. return false;
  1330. }
  1331. //8、验证移动准确性
  1332. x0 = iSEM.GetStageAtX();
  1333. y0 = iSEM.GetStageAtY();
  1334. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1335. {
  1336. arg.Message = "位置校验失败";
  1337. SendMsg("1-27");
  1338. return false;
  1339. }
  1340. arg.Message = "位置校验成功";
  1341. SendMsg("1-27");
  1342. //判断是否停止进程
  1343. if (key_stop)
  1344. {
  1345. return false;
  1346. }
  1347. //9、-10不操作
  1348. //11、自动对焦。与之前操作相同
  1349. if (ImageFocus())
  1350. {
  1351. arg.Message = "自动对焦完成";
  1352. SendMsg("1-28");
  1353. }
  1354. else
  1355. {
  1356. arg.Message = "自动对焦失败";
  1357. SendMsg("1-28");
  1358. }
  1359. //判断是否停止进程
  1360. if (key_stop)
  1361. {
  1362. return false;
  1363. }
  1364. //12拍照
  1365. String fileName6 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1366. arg.Picture_Information.Picture_FullPath = fileName6;
  1367. arg.Picture_Information.Work_Status = "SEM";
  1368. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1369. Thread.Sleep(1000);
  1370. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1371. Thread.Sleep(1000);
  1372. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1373. Thread.Sleep(1000);
  1374. if (!GetImage(ImageMode.SEM, fileName6))
  1375. {
  1376. arg.Message = "SEM拍照失败";
  1377. SendMsg("1-29");
  1378. return false;
  1379. }
  1380. image18 = fileName6;
  1381. arg.Message = "SEM拍照成功";
  1382. SendMsg("1-29");
  1383. Thread.Sleep(3000);
  1384. //判断是否停止进程
  1385. if (key_stop)
  1386. {
  1387. return false;
  1388. }
  1389. //14光束复位
  1390. iSEM.SetBeamShiftX(0);
  1391. iSEM.SetBeamShiftY(0);
  1392. Thread.Sleep(3000);
  1393. arg.Message = "光束复位成功";
  1394. SendMsg("1-30");
  1395. //判断是否停止进程
  1396. if (key_stop)
  1397. {
  1398. return false;
  1399. }
  1400. return true;
  1401. }
  1402. //第一个孔的测试过程
  1403. public bool FirstHole()
  1404. {
  1405. MeasureData.CutHole firstHole = m_cutHoles[0];
  1406. //首先默认为SEM模式
  1407. arg.State = "SEM";
  1408. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1409. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1410. {
  1411. if (!InsertPT())
  1412. {
  1413. arg.Message = "插入PT针失败";
  1414. SendMsg("1-0");
  1415. return false;
  1416. }
  1417. arg.Message = "插入PT针成功";
  1418. SendMsg("1-0");
  1419. }
  1420. //判断是否停止进程
  1421. if (key_stop)
  1422. {
  1423. return false;
  1424. }
  1425. //13. 自动 定位功能
  1426. if (!GetPoistion(true))
  1427. {
  1428. return false;
  1429. }
  1430. //判断是否停止进程
  1431. if (key_stop)
  1432. {
  1433. return false;
  1434. }
  1435. //14.自动控制FIB切割
  1436. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1437. {
  1438. if (!FIBCross())
  1439. {
  1440. return false;
  1441. }
  1442. }
  1443. //判断是否停止进程
  1444. if (key_stop)
  1445. {
  1446. return false;
  1447. }
  1448. //15.根据样品类型决定是否撤出PT针
  1449. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1450. {
  1451. if (!RetractPT())
  1452. {
  1453. arg.Message = "撤出PT针失败";
  1454. SendMsg("1-15");
  1455. return false;
  1456. }
  1457. arg.Message = "撤出PT针成功";
  1458. SendMsg("1-15");
  1459. }
  1460. //判断是否停止进程
  1461. if (key_stop)
  1462. {
  1463. return false;
  1464. }
  1465. // 16.找到切割位置
  1466. if (!FindCross())
  1467. {
  1468. return false;
  1469. }
  1470. //判断是否停止进程
  1471. if (key_stop)
  1472. {
  1473. return false;
  1474. }
  1475. //将过程17最后的拍照图片提出给18步进行调用
  1476. String img18 = "";
  1477. //17.自动控制SEM拍截面照
  1478. if (m_MsParam.Is_Photograph == false)
  1479. {
  1480. if (!ShotSection(ref img18))
  1481. {
  1482. arg.Message = "自动控制SEM拍截面照失败";
  1483. SendMsg("1-33");
  1484. return false;
  1485. }
  1486. arg.Message = "自动控制SEM拍截面照成功";
  1487. SendMsg("1-33");
  1488. }
  1489. //判断是否停止进程
  1490. if (key_stop)
  1491. {
  1492. return false;
  1493. }
  1494. //18.自动层高分析
  1495. float size = iSEM.GetPixelSize();
  1496. float mag = iSEM.GetMagnification();
  1497. int state = 0;
  1498. wr.Img_Measure_Size(img18, mag, size, out state);
  1499. if(state==0)
  1500. {
  1501. arg.Message = "测量尺寸失败";
  1502. SendMsg("1-31");
  1503. return false;
  1504. }
  1505. arg.Message = "测量尺寸成功";
  1506. SendMsg("1-31");
  1507. #region 测试程序
  1508. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  1509. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  1510. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1511. //{
  1512. // SendMsg("拍摄照片完成");
  1513. // //return true;
  1514. //}
  1515. //else
  1516. //{
  1517. // SendMsg("拍摄照片失败");
  1518. // return false;
  1519. //}
  1520. //SendMsg("图像校正36度");
  1521. ////3.设置SEM角度补偿cos36度
  1522. //if (!TiltCorrection(36))
  1523. //{
  1524. // return false;
  1525. //}
  1526. //Thread.Sleep(3000);
  1527. //string fn;
  1528. //用宏抓一般图
  1529. //Thread.Sleep(5000);
  1530. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1531. //SendMsg("用宏抓一般图" + fn);
  1532. //iSEM.CMDMCFFilename(fn);
  1533. ////延时1s??
  1534. //Thread.Sleep(5000);
  1535. ////用宏抓好图
  1536. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1537. //SendMsg("用宏抓好图" + fn);
  1538. //iSEM.CMDMCFFilename(fn);
  1539. ////延时1s??
  1540. //Thread.Sleep(30000);
  1541. //Thread.Sleep(10000);
  1542. //WorkingFolder = m_measureFile.FilePath;
  1543. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1544. //SendMsg("SEM拍照存储到" + fileName6);
  1545. //if (!GetImage(ImageMode.SEM, fileName6))
  1546. //{
  1547. // SendMsg("SEM拍照失败");
  1548. // return false;
  1549. //}
  1550. ////用宏抓标志图
  1551. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1552. //SendMsg("用宏抓标志图" + fn);
  1553. //iSEM.CMDMCFFilename(fn);
  1554. ////延时1s??
  1555. //Thread.Sleep(30000);
  1556. //Thread.Sleep(5000);
  1557. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1558. //SendMsg("用宏抓一般图" + fn);
  1559. //iSEM.CMDMCFFilename(fn);
  1560. ////延时1s??
  1561. //Thread.Sleep(5000);
  1562. //SendMsg("所有图结束");
  1563. ////17.自动控制SEM拍截面照
  1564. //{
  1565. // //1.控制SEM放大到指定参数大小范围,6000x
  1566. // if (!iSEM.SetMagnification(6000))
  1567. // {
  1568. // return false;
  1569. // }
  1570. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1571. // if (!MeasParam.FocusMode)
  1572. // {
  1573. // //弹出手动对焦的窗口
  1574. // }
  1575. // else
  1576. // {
  1577. // //调用自动对焦模块
  1578. // }
  1579. // //3.设置SEM角度补偿cos36度
  1580. // if (!TiltCorrection(36))
  1581. // {
  1582. // return false;
  1583. // }
  1584. // //4.控制SEM拍照
  1585. // //5.保存照片4
  1586. // String fileName5 = WorkingFolder + ImageName5;
  1587. // if (!GetImage(ImageMode.SEM, fileName5))
  1588. // {
  1589. // return false;
  1590. // }
  1591. // //6.将照片传给客户,获取偏移坐标
  1592. // float x6 = 0, y6 = 0;
  1593. // float angle1 = 0;
  1594. // float mage = 10000;
  1595. // //7.根据坐标控制SEM移动到分析位置
  1596. // if (!iSEM.MoveStageXY(x6, y6))
  1597. // {
  1598. // return false;
  1599. // }
  1600. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1601. // float x7 = iSEM.GetStageAtX();
  1602. // float y7 = iSEM.GetStageAtY();
  1603. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1604. // {
  1605. // return false;
  1606. // }
  1607. // //9.控制SEM平行校正,并记录校正前初始值
  1608. // float foldAnagle = iSEM.GetScanRotation();
  1609. // if (foldAnagle == float.NaN)
  1610. // {
  1611. // return false;
  1612. // }
  1613. // if (!iSEM.SetScanRotation(angle1))
  1614. // {
  1615. // return false;
  1616. // }
  1617. // //10.控制SEM放大到指定参数大小范围
  1618. // if (!iSEM.SetMagnification(mage))
  1619. // {
  1620. // return false;
  1621. // }
  1622. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1623. // if (!MeasParam.FocusMode)
  1624. // {
  1625. // //弹出手动对焦的窗口
  1626. // }
  1627. // else
  1628. // {
  1629. // //调用自动对焦模块
  1630. // }
  1631. // //12.控制SEM对分析位置拍照
  1632. // String fileName6 = WorkingFolder + ImageName6;
  1633. // if (!GetImage(ImageMode.SEM, fileName6))
  1634. // {
  1635. // return false;
  1636. // }
  1637. // //13.保存照片
  1638. // //14.控制SEM取消电子束校正,回到初始值
  1639. // if (!iSEM.SetScanRotation(foldAnagle))
  1640. // {
  1641. // return false;
  1642. // }
  1643. //}
  1644. ////18.自动层高分析
  1645. //{
  1646. // //1.获取SEM Pixel Size给客户传入参数
  1647. // if (iSEM.GetPixelSize() == float.NaN)
  1648. // {
  1649. // return false;
  1650. // }
  1651. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1652. //}
  1653. ////19.自动能谱分析
  1654. //{
  1655. // //1. 确定能谱位置
  1656. // //2. 控制牛津打能谱
  1657. // //3. 能谱分析——面扫+线扫描
  1658. //}
  1659. #endregion
  1660. return true;
  1661. }
  1662. //非第一个孔的测试过程
  1663. public bool CommonWork()
  1664. {
  1665. //首先默认为SEM模式
  1666. arg.State = "SEM";
  1667. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1668. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1669. {
  1670. if (!InsertPT())
  1671. {
  1672. arg.Message = "插入PT针失败";
  1673. SendMsg("1-0");
  1674. return false;
  1675. }
  1676. arg.Message = "插入PT针成功";
  1677. SendMsg("1-0");
  1678. }
  1679. //判断是否停止进程
  1680. if (key_stop)
  1681. {
  1682. return false;
  1683. }
  1684. //13. 自动 定位功能
  1685. if (!GetPoistion(false))
  1686. {
  1687. return false;
  1688. }
  1689. //判断是否停止进程
  1690. if (key_stop)
  1691. {
  1692. return false;
  1693. }
  1694. //14.自动控制FIB切割
  1695. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1696. {
  1697. if (!FIBCross())
  1698. {
  1699. return false;
  1700. }
  1701. }
  1702. //判断是否停止进程
  1703. if (key_stop)
  1704. {
  1705. return false;
  1706. }
  1707. //15.根据样品类型决定是否撤出PT针
  1708. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1709. {
  1710. if (!RetractPT())
  1711. {
  1712. arg.Message = "撤出PT针失败";
  1713. SendMsg("1-15");
  1714. return false;
  1715. }
  1716. arg.Message = "撤出PT针成功";
  1717. SendMsg("1-15");
  1718. }
  1719. //判断是否停止进程
  1720. if (key_stop)
  1721. {
  1722. return false;
  1723. }
  1724. // 16.找到切割位置
  1725. if (!FindCross())
  1726. {
  1727. return false;
  1728. }
  1729. //判断是否停止进程
  1730. if (key_stop)
  1731. {
  1732. return false;
  1733. }
  1734. //将过程17最后的拍照图片提出给18步进行调用
  1735. String img18 = "";
  1736. //17.自动控制SEM拍截面照
  1737. if (m_MsParam.Is_Photograph == false)
  1738. {
  1739. if (!ShotSection(ref img18))
  1740. {
  1741. arg.Message = "自动控制SEM拍截面照失败";
  1742. SendMsg("1-33");
  1743. return false;
  1744. }
  1745. arg.Message = "自动控制SEM拍截面照成功";
  1746. SendMsg("1-33");
  1747. }
  1748. //判断是否停止进程
  1749. if (key_stop)
  1750. {
  1751. return false;
  1752. }
  1753. //18.自动层高分析
  1754. float size = iSEM.GetPixelSize();
  1755. float mag = iSEM.GetMagnification();
  1756. int state = 0;
  1757. wr.Img_Measure_Size(img18, mag, size, out state);
  1758. if (state == 0)
  1759. {
  1760. arg.Message = "测量尺寸失败";
  1761. SendMsg("1-31");
  1762. return false;
  1763. }
  1764. arg.Message = "测量尺寸成功";
  1765. SendMsg("1-31");
  1766. #region 测试程序
  1767. //string fn;
  1768. //用宏抓一般图
  1769. //Thread.Sleep(5000);
  1770. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1771. //SendMsg("用宏抓一般图" + fn);
  1772. //iSEM.CMDMCFFilename(fn);
  1773. ////延时1s??
  1774. //Thread.Sleep(5000);
  1775. ////用宏抓好图
  1776. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1777. //SendMsg("用宏抓好图" + fn);
  1778. //iSEM.CMDMCFFilename(fn);
  1779. ////延时1s??
  1780. //Thread.Sleep(30000);
  1781. //Thread.Sleep(10000);
  1782. //WorkingFolder = m_measureFile.FilePath;
  1783. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1784. //SendMsg("SEM拍照存储到" + fileName6);
  1785. //if (!GetImage(ImageMode.SEM, fileName6))
  1786. //{
  1787. // SendMsg("SEM拍照失败");
  1788. // return false;
  1789. //}
  1790. ////用宏抓标志图
  1791. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1792. //SendMsg("用宏抓标志图" + fn);
  1793. //iSEM.CMDMCFFilename(fn);
  1794. ////延时1s??
  1795. //Thread.Sleep(30000);
  1796. ////恢复简单抓图
  1797. //Thread.Sleep(5000);
  1798. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1799. //SendMsg("用宏抓一般图" + fn);
  1800. //iSEM.CMDMCFFilename(fn);
  1801. //SendMsg("所有图结束");
  1802. #endregion
  1803. return true;
  1804. }
  1805. //测试完第一个孔后的样品台初始化操作。
  1806. //再调用CommonWork执行非第一个孔的测试过程
  1807. public bool OtherHole()
  1808. {
  1809. //SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1810. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1811. #region 1. 初始化
  1812. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1813. //读取图像冻结状态
  1814. float ffrozen = iSEM.GetImageFrozen();
  1815. if (ffrozen == float.NaN)
  1816. {
  1817. return false;
  1818. }
  1819. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1820. {
  1821. //SendMsg("样品台恢复到水平");
  1822. //return true;
  1823. }
  1824. else
  1825. {
  1826. //SendMsg("禁止样品台恢复到水平");
  1827. return false;
  1828. }
  1829. //2. 调节样品1号孔的样品台6轴坐标
  1830. //3. 将样品1号孔坐标2存入数据库
  1831. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1832. if (!iSEM.SetStageGotoT(0))
  1833. {
  1834. return false;
  1835. }
  1836. while (true)
  1837. {
  1838. Thread.Sleep(10000);
  1839. if (iSEM.GetStageIs() == 0)
  1840. {
  1841. break;
  1842. }
  1843. }
  1844. //5. 获取光镜2号孔XY坐标
  1845. //SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1846. //6. 根据光镜坐标控制样品台移动
  1847. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1848. {
  1849. //SendMsg("移动失败");
  1850. return false;
  1851. }
  1852. while (true)
  1853. {
  1854. Thread.Sleep(10000);
  1855. if (iSEM.GetStageIs() == 0)
  1856. {
  1857. break;
  1858. }
  1859. }
  1860. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1861. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1862. {
  1863. //SendMsg("样品台旋转");
  1864. //return true;
  1865. }
  1866. else
  1867. {
  1868. //SendMsg("禁止样品台旋转");
  1869. return false;
  1870. }
  1871. if (!iSEM.SetStageGotoT(54))
  1872. {
  1873. return false;
  1874. }
  1875. while (true)
  1876. {
  1877. Thread.Sleep(10000);
  1878. if (iSEM.GetStageIs() == 0)
  1879. {
  1880. break;
  1881. }
  1882. }
  1883. //SendMsg("拉直操作");
  1884. #endregion
  1885. //其他操作与第一个孔相同
  1886. if (!CommonWork())
  1887. {
  1888. return false;
  1889. }
  1890. //2. 定位切割
  1891. {
  1892. //1. 拉直操作
  1893. {
  1894. //1.1 控制SEM进行拍照
  1895. //1.2 图片传给客户,返回偏移角度
  1896. //1.3 根据返回角度,控制样品台转动
  1897. }
  1898. //2. 与1号孔13步相同
  1899. }
  1900. return true;
  1901. }
  1902. //角度补偿
  1903. public bool TiltCorrection(float a_fAngle)
  1904. {
  1905. //记录原来电镜的状态
  1906. // bool bTilt = false;
  1907. //float fOldTilt = iSEM.GetTiltCorrection();
  1908. //if (fOldTilt == float.NaN)
  1909. //{
  1910. // return false;
  1911. //}
  1912. //else if (fOldTilt == 1)
  1913. //{
  1914. // bTilt = true;
  1915. //}
  1916. //else if (fOldTilt == 0)
  1917. //{
  1918. // bTilt = false;
  1919. //}
  1920. //float fOldAngle = iSEM.GetTiltAngle();
  1921. //if (fOldAngle == float.NaN)
  1922. //{
  1923. // return false;
  1924. //}
  1925. //开启校正
  1926. SendMsg("开启校正");
  1927. if (!iSEM.SetTiltAngleOn())
  1928. {
  1929. return false;
  1930. }
  1931. //设置校正角度
  1932. //if (!iSEM.SetTiltAngle(fOldAngle))
  1933. //{
  1934. // return false;
  1935. //}
  1936. //恢复原始状态
  1937. SendMsg("校正角度"+ a_fAngle.ToString());
  1938. if (!iSEM.SetTiltAngle(a_fAngle))
  1939. {
  1940. return false;
  1941. }
  1942. //if (bTilt)
  1943. //{
  1944. // if (!iSEM.SetTiltCorrectionOn())
  1945. // {
  1946. // return false;
  1947. // }
  1948. //}
  1949. //else
  1950. //{
  1951. // if (!iSEM.SetTiltCorrectionOff())
  1952. // {
  1953. // return false;
  1954. // }
  1955. //}
  1956. return true;
  1957. }
  1958. //拍图
  1959. public bool GetImage(ImageMode a_mode, String a_fileName)
  1960. {
  1961. //1. 图像解冻
  1962. float foldFrozen = iSEM.GetImageFrozen();
  1963. if (foldFrozen == float.NaN)
  1964. {
  1965. return false;
  1966. }
  1967. if (!iSEM.ImageLive())
  1968. {
  1969. return false;
  1970. }
  1971. //2. 确认图像模式
  1972. if (ImageMode.SEM == a_mode)
  1973. {
  1974. if (!iSEM.CmdFIBModeSEM())
  1975. {
  1976. return false;
  1977. }
  1978. }
  1979. else if (ImageMode.FIB == a_mode)
  1980. {
  1981. if (!iSEM.CmdFIBModeFIB())
  1982. {
  1983. return false;
  1984. }
  1985. }
  1986. else
  1987. {
  1988. return false;
  1989. }
  1990. //3. 获取分辨率
  1991. int[] ImageSize = iSEM.GetImageStore();
  1992. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1993. {
  1994. return false;
  1995. }
  1996. short width = (short)ImageSize[0];
  1997. short height = (short)ImageSize[1];
  1998. //4. 抓图
  1999. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  2000. {
  2001. return false;
  2002. }
  2003. //5. 恢复初始状态
  2004. if (foldFrozen == 0)
  2005. {
  2006. if (!iSEM.ImageLive())
  2007. {
  2008. return false;
  2009. }
  2010. }
  2011. else if (foldFrozen == 1)
  2012. {
  2013. if (!iSEM.ImageFrozen())
  2014. {
  2015. return false;
  2016. }
  2017. }
  2018. return true;
  2019. }
  2020. //自动聚焦
  2021. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  2022. {
  2023. a_nWd = 0;
  2024. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  2025. if (a_param == null)
  2026. {
  2027. return false;
  2028. }
  2029. string path = a_param.Path;
  2030. if (!Directory.Exists(path))
  2031. {
  2032. return false;
  2033. }
  2034. string path_coarse = a_param.Path + "\\Coarse";
  2035. if (!Directory.Exists(path_coarse))
  2036. {
  2037. Directory.CreateDirectory(path_coarse);
  2038. }
  2039. string path_fine = a_param.Path + "\\Fine";
  2040. if (!Directory.Exists(path_fine))
  2041. {
  2042. Directory.CreateDirectory(path_fine);
  2043. }
  2044. //1. 拍照
  2045. //1.1, 粗拍照
  2046. //1.1.1, 根据参数计算拍照次数
  2047. double nUp = a_param.UP * 100.0 ;
  2048. double nDown = a_param.Down * 100.0;
  2049. double nStep = a_param.Step * 100.0;
  2050. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  2051. SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  2052. //粗拍照
  2053. for (int i = 0; i < nTimes; i++)
  2054. {
  2055. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  2056. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2057. Thread.Sleep(8000);
  2058. int swd = cWd / 100;
  2059. SendMsg("wd = " + swd.ToString() +"um");
  2060. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  2061. if (!GetImage(ImageMode.SEM, fileName))
  2062. {
  2063. return false;
  2064. }
  2065. }
  2066. //1.2, 选定细拍照的工作距离
  2067. int CorWd;
  2068. ChooseBest(path_coarse,out CorWd);
  2069. a_nWd = CorWd;
  2070. SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  2071. //1.3, 细拍照
  2072. if ( (CorWd - a_param.Range * 100.0) <=0)
  2073. {
  2074. return false;
  2075. }
  2076. double nfUp = CorWd - a_param.Range * 100.0;
  2077. double nfStep = a_param.fStep * 100.0;
  2078. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  2079. SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  2080. for (int i = 0; i < nfTimes; i++)
  2081. {
  2082. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  2083. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2084. Thread.Sleep(8000);
  2085. int swd = cWd / 100;
  2086. SendMsg("wd = " + swd.ToString() + "um");
  2087. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  2088. if (!GetImage(ImageMode.SEM, fileName))
  2089. {
  2090. return false;
  2091. }
  2092. }
  2093. int fineWd;
  2094. ChooseBest(path_fine, out fineWd);
  2095. SendMsg("wd fine max = " + fineWd.ToString());
  2096. a_nWd = fineWd;
  2097. SendMsg("细选工作距离wd = " + a_nWd.ToString());
  2098. return true;
  2099. }
  2100. //LoG算子计算
  2101. private double LoGMean(string a_strImgPath)
  2102. {
  2103. //读入Img文件
  2104. if (!File.Exists(a_strImgPath))
  2105. {
  2106. return 0;
  2107. }
  2108. Mat src, gray_src;
  2109. int kernel_size = 3;
  2110. src = Cv2.ImRead(a_strImgPath);
  2111. gray_src = new Mat();
  2112. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2113. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2114. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2115. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2116. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  2117. Cv2.ConvertScaleAbs(src, src);
  2118. //图像的平均灰度
  2119. double meanValue = 0.0;
  2120. meanValue = Cv2.Mean(src)[0];
  2121. return meanValue;
  2122. }
  2123. //梯度计算
  2124. private double Tenengrad(string a_strImgPath)
  2125. {
  2126. //读入Img文件
  2127. if (!File.Exists(a_strImgPath))
  2128. {
  2129. return 0;
  2130. }
  2131. Mat src;
  2132. src = Cv2.ImRead(a_strImgPath);
  2133. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2134. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2135. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2136. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2137. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  2138. //图像的平均灰度
  2139. double meanValue = 0.0;
  2140. meanValue = Cv2.Mean(src)[0];
  2141. return meanValue;
  2142. }
  2143. //梯度计算
  2144. private double TTgrad(string a_strImgPath)
  2145. {
  2146. //读入Img文件
  2147. if (!File.Exists(a_strImgPath))
  2148. {
  2149. return 0;
  2150. }
  2151. Mat src;
  2152. src = Cv2.ImRead(a_strImgPath);
  2153. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2154. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2155. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2156. Mat scalex = new Mat();
  2157. Mat scaley = new Mat();
  2158. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  2159. Cv2.ConvertScaleAbs(src, scalex);
  2160. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  2161. Cv2.ConvertScaleAbs(src, scaley);
  2162. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  2163. //图像的平均灰度
  2164. double meanValue = 0.0;
  2165. meanValue = Cv2.Mean(src)[0];
  2166. return meanValue;
  2167. }
  2168. //三选二算法
  2169. private void ChooseBest(string a_strImgPath, out int a_nWd)
  2170. {
  2171. a_nWd = -1;
  2172. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  2173. float[] values = new float[files.Length];
  2174. double smax1 = LoGMean(files[0]);
  2175. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  2176. double smax2 = Tenengrad(files[0]);
  2177. int wdmax2 = wdmax1;
  2178. double smax3 = TTgrad(files[0]);
  2179. int wdmax3 = wdmax1;
  2180. int x = 0;
  2181. foreach (var file in files)
  2182. {
  2183. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  2184. double svalue1 = LoGMean(file);
  2185. double svalue2 = Tenengrad(file);
  2186. double svalue3 = TTgrad(file);
  2187. if (smax1 < svalue1)
  2188. {
  2189. smax1 = svalue1;
  2190. wdmax1 = wd;
  2191. }
  2192. if (smax2 < svalue2)
  2193. {
  2194. smax2 = svalue2;
  2195. wdmax2 = wd;
  2196. }
  2197. if (smax3 < svalue3)
  2198. {
  2199. smax3 = svalue3;
  2200. wdmax3 = wd;
  2201. }
  2202. x++;
  2203. }
  2204. SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  2205. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  2206. {
  2207. a_nWd = wdmax1;
  2208. SendMsg("焦距 = " + wdmax1.ToString());
  2209. }
  2210. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  2211. {
  2212. a_nWd = wdmax2;
  2213. SendMsg("焦距 = " + wdmax2.ToString());
  2214. }
  2215. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  2216. {
  2217. a_nWd = wdmax3;
  2218. SendMsg("焦距 = " + wdmax3.ToString());
  2219. }
  2220. else
  2221. {
  2222. SendMsg("对焦失败。");
  2223. }
  2224. }
  2225. }
  2226. }