Measure.cs 87 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. NLog.Logger log;
  321. #region 变量定义
  322. //Web接口类
  323. public ImageProcess ImagePro = null;
  324. //SmartSEM远程路径
  325. public String RemoteELYPath = "";
  326. public String RemoteMLFPath = "";
  327. //扫描周期
  328. private float cycle_time = 0;
  329. //人工干预
  330. public int hand_intervene = 2;
  331. //样品台保护值
  332. public float X_Min = 0;
  333. public float X_Max = 0.13f;
  334. public float Y_Min = 0;
  335. public float Y_Max = 0.13f;
  336. public float Z_Min = 0;
  337. public float Z_Max = 0.05f;
  338. public float T_Min = -4;
  339. public float T_Max = 70;
  340. public float R_Min = -380;
  341. public float R_Max = 380;
  342. public float M_Min = 0;
  343. public float M_Max = 0.012f;
  344. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  345. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  346. //定义一个全局的消息类
  347. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  348. //全局只有一个fatorySEM
  349. static FactoryHardware factorySEM = FactoryHardware.Instance;
  350. ISEMControl iSEM = factorySEM.ISEM;
  351. //@的作用是不用转义字符\\只打一个就行
  352. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  354. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  355. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  356. const String ImageName31 = @"FIBBefore.tif";
  357. const String ImageName32 = @"FIBAfter.tif";
  358. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  359. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  360. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  361. const String ImageName7 = @"BeforeImage.tif";//计算感兴趣的区域
  362. //const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  363. //const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  364. //const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  365. //const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  366. //const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  367. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  368. //const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  369. //const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  370. //const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  371. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  372. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  373. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  374. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  375. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  376. const String ElyDeposition = @"Deposition.ely"; //沉积
  377. const String ElyCrossSection = @"CrossSection.ely"; //切割
  378. const float fMin = (float)0.0000002; //单位是米
  379. private Locate m_locate;
  380. private Focus m_focuse;
  381. private Photo m_photo;
  382. private ArgSend mArgSend;
  383. public Boolean key_stop = false;
  384. FibWork m_FibWork;
  385. PTWork m_PTWork;
  386. //int m_nWorkHoleNo = -1;
  387. public ThreadStatusEventArgs GetArgs()
  388. {
  389. return arg;
  390. }
  391. //测量文件
  392. private MeasureFile m_measureFile;
  393. public MeasureFile MeasureFile
  394. {
  395. get { return this.m_measureFile; }
  396. set { this.m_measureFile = value; }
  397. }
  398. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  399. private List<MeasureData.CutHole> m_cutHoles;
  400. public List<MeasureData.CutHole> cutHoles
  401. {
  402. get { return this.m_cutHoles; }
  403. set { this.m_cutHoles = value; }
  404. }
  405. public MeasureParam MParam//测量参数对象
  406. {
  407. get { return this.m_measureFile.MParam; }
  408. //set { this.m_measureParam = value; }
  409. }
  410. //工作文件夹
  411. private string m_WorkingFolder;
  412. public string mWorkingFolder
  413. {
  414. get { return this.m_WorkingFolder; }
  415. set { this.m_WorkingFolder = value; }
  416. }
  417. //程序当前路径
  418. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  419. //线程状态
  420. private ThreadStatus m_ThreadStatus;
  421. public ThreadStatus TStatus
  422. {
  423. get { return this.m_ThreadStatus; }
  424. set { this.m_ThreadStatus = value; }
  425. }
  426. #endregion
  427. //构造函数
  428. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  429. {
  430. log = NLog.LogManager.GetCurrentClassLogger();
  431. TStatus = new ThreadStatus();
  432. cutHoles = new List<MeasureData.CutHole>();
  433. //配置远程连接
  434. ImagePro = new ImageProcess(webServerIP, webServerPort, webServerUrl);
  435. m_locate = new Locate(iSEM);
  436. m_focuse = new Focus(iSEM);
  437. m_photo = new Photo(iSEM);
  438. mArgSend = new ArgSend(this, iSEM);
  439. }
  440. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  441. public bool InitMeasure(MeasureFile a_measureFile)
  442. {
  443. log.Info("进入初始化函数");
  444. m_measureFile = a_measureFile;
  445. var p = m_measureFile.MParam;
  446. p.FindCrossMagnification = p.Location_Magnification / 3;
  447. if (p.SampleName == "3") p.FindCrossMagnification = 400;
  448. if (p.SampleName == "4") p.FindCrossMagnification = 300;
  449. if (p.SampleName == "5") p.FindCrossMagnification = 300;
  450. if (p.FindCrossMagnification < 200)
  451. {
  452. p.FindCrossMagnification = 200;
  453. }
  454. List<CutHole> listHoles = m_measureFile.ListCutHole;
  455. foreach (CutHole h in listHoles)
  456. {
  457. if (h.SWITCH == true)
  458. {
  459. m_cutHoles.Add(h);
  460. }
  461. }
  462. if (m_cutHoles.Count == 0) return false;
  463. if (MParam.EDS == true)
  464. {
  465. log.Info("要进行能谱分析,初始化Xray数据库", true);
  466. Init_MeasDB();
  467. }
  468. //设置工作文件夹
  469. mWorkingFolder = m_measureFile.FilePath;
  470. for(int i=0;i<m_cutHoles.Count;i++)
  471. {
  472. m_cutHoles[i].InitPath(i, mWorkingFolder);
  473. }
  474. //检查硬件连接是否正常
  475. if (!iSEM.ConnectStatus())
  476. {
  477. MessageBox.Show("连接电镜失败!", "重要错误", MessageBoxButtons.OK, MessageBoxIcon.Error);
  478. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  479. log.Error("测量线程报错:连接硬件硬件连接失败", false);
  480. return false;
  481. }
  482. //设置SmartSEM远程路径
  483. iSEM.SetRemoteELYPath(RemoteELYPath);
  484. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  485. m_FibWork = new FibWork(iSEM, MParam.FIBTemp);
  486. m_PTWork = new PTWork(iSEM, MParam.PTTemp);
  487. iSEM.SetScanRotationOff();
  488. Thread.Sleep(200);
  489. //20.光束等复位
  490. iSEM.SetBeamShiftX(0);
  491. Thread.Sleep(200);
  492. iSEM.SetBeamShiftY(0);
  493. Thread.Sleep(200);
  494. return true;
  495. }
  496. //给前台UI发送消息步骤
  497. public void SendMsg(string step_code)
  498. {
  499. arg.Step_Code = step_code;
  500. arg.Time = DateTime.Now;
  501. SendThreadStatus(this, arg);
  502. }
  503. //给前台UI发送孔状态信息
  504. public void SendCutHoleMsg(string a_state, string a_holeName)
  505. {
  506. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  507. arg.HoleName = a_holeName;
  508. arg.State = a_state;
  509. SendCutHolesStatus(this, arg);
  510. }
  511. //测量流程
  512. public void DoMeasure()
  513. {
  514. //创建线程的测量状态的更新
  515. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  516. //将停止键复位
  517. key_stop = false;
  518. //开始测量就将模式设置为SEM
  519. log.Info("测量线程:开始切换到SEM模式", true);
  520. if (!iSEM.CmdFIBModeSEM())
  521. {
  522. log.Error("测量线程报错:开始切换到SEM模式失败。", false);
  523. return;
  524. }
  525. arg.Picture_Information.Work_Status = "SEM";
  526. //开始做各个孔的测量
  527. for (int currHoleNo = 0; currHoleNo < m_cutHoles.Count; currHoleNo++)
  528. {
  529. var currHole = m_cutHoles[currHoleNo];
  530. //判断孔状态
  531. if (currHole.STATE != State.Ready)
  532. {
  533. log.Warn("测试孔" + currHole.HoleName + "状态非就绪,不予测量。", true);
  534. continue;
  535. }
  536. log.Warn("测量线程:第"+ currHoleNo.ToString() + "分析点,名称:" + currHole.HoleName + " 开始测量。", true);
  537. currHole.START = DateTime.Now;
  538. currHole.STATE = State.InProcess;
  539. SendCutHoleMsg(((int)currHole.STATE).ToString(), currHole.HoleName);
  540. //开始测量
  541. if (!HoleMeasure(currHole))
  542. {
  543. currHole.STATE = State.Failed;
  544. currHole.END = DateTime.Now;
  545. m_measureFile.Save();
  546. SendCutHoleMsg(((int)currHole.STATE).ToString(), currHole.HoleName);
  547. }
  548. //保存文件,将测量状态更改
  549. currHole.STATE = State.Success;
  550. currHole.END = DateTime.Now;
  551. m_measureFile.Save();
  552. SendCutHoleMsg(((int)currHole.STATE).ToString(), currHole.HoleName);
  553. if (key_stop)
  554. {
  555. log.Error("用户停止测量");
  556. break;
  557. }
  558. //两个点之间更换,加延时以便完成显示
  559. Thread.Sleep(3000);
  560. }
  561. }
  562. /// <summary>
  563. ///13. 自动 定位功能,沉积
  564. /// </summary>
  565. /// <returns></returns>
  566. public bool GetFIBAndPTPoistion(CutHole currHole)
  567. {
  568. float px = 0;
  569. int state = 1;
  570. log.Info("测量线程:FIB自动定位放大倍数" + MParam.Location_Magnification.ToString(), true);
  571. Thread.Sleep(200);
  572. if (!m_focuse.SetMagnification(MParam.Location_Magnification))
  573. {
  574. log.Error("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + MParam.Location_Magnification.ToString() + "控制失败", false);
  575. return false;
  576. }
  577. arg.State = true;
  578. arg.Message = "放大" + MParam.Location_Magnification.ToString("0.0") + "倍成功";
  579. SendMsg("2-0");
  580. //判断是否停止进程
  581. if (key_stop)
  582. {
  583. log.Info("停止键按下。", true);
  584. return false;
  585. }
  586. log.Info("测量线程:切换到FIB模式。", true);
  587. //6.设置FIB拍照参数——扫描时间、束流等
  588. //7.控制FIB自动亮度、对比度
  589. Thread.Sleep(200);
  590. if (!iSEM.CmdFIBModeFIB())
  591. {
  592. log.Error("测量线程报错:切换到FIB模式失败。", false);
  593. return false;
  594. }
  595. arg.State = true;
  596. arg.Picture_Information.Work_Status = "FIB";
  597. arg.Message = "FIB模式切换成功";
  598. SendMsg("2-1");
  599. Thread.Sleep(1000);
  600. //判断是否停止进程
  601. if (key_stop)
  602. {
  603. log.Info("停止键按下。", true);
  604. return false;
  605. }
  606. //刷亮度对比度
  607. iSEM.CmdFocusScanSpeed("CMD_SCANRATE4");//iSEM.CmdSaveRate();
  608. Thread.Sleep(200);
  609. iSEM.SetAutoBright(100);
  610. Thread.Sleep(200);
  611. iSEM.SetAutoContrast(100);
  612. iSEM.SetAutoVideoBrightnessAndContrast();
  613. Thread.Sleep(10000);
  614. iSEM.SetAutoVideoOff();
  615. //8.控制FIB拍照
  616. Thread.Sleep(200);
  617. String fileName2 = currHole.data_path + "\\" + currHole.HoleName + "_" + MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  618. m_photo.GetParam().Mag = MParam.Location_Magnification;
  619. m_photo.GetParam().savePath = fileName2;
  620. if (!m_photo.TakePhoto())
  621. {
  622. log.Error("测量线程报错:FIB拍照失败。", false);
  623. return false;
  624. }
  625. mArgSend.SendArgumentToScreen("2-3", "FIB拍照成功",fileName2);
  626. //判断是否停止进程
  627. if (key_stop)
  628. {
  629. log.Info("停止键按下。", true);
  630. return false;
  631. }
  632. float x1=0,y1=0, x2=0, y2=0;
  633. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  634. log.Info("测量线程:调用图像处理接口,准备移动样品台", true);
  635. log.Info("文件名=" + fileName2, true);
  636. log.Info("样品类型=" + MParam.SampleName, true);
  637. log.Info("供应商名称=" + MParam.Firm, true);
  638. ImagePro.Img_Cut_Position(fileName2, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x1, out y1, out x2, out y2, out state);
  639. log.Info("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString() + ")", true);
  640. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  641. if (state == 1)
  642. {
  643. m_FibWork.ModifyCutTemplate(x1, y1 ,x2, y2);
  644. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  645. if (MParam.PT)
  646. {
  647. m_PTWork.ModifyPTTemp(x1,y1,x2,y2);
  648. }
  649. }
  650. else
  651. {
  652. log.Error("测量线程报错:自动定位图像接口返回0", false);
  653. return false;
  654. }
  655. iSEM.CmdFIBModeSEM();
  656. Thread.Sleep(200);
  657. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  658. //float[] firstPosition = iSEM.GetStagePosition();
  659. //m_cutHoles[0].Position.X = firstPosition[0];
  660. //m_cutHoles[0].Position.Y = firstPosition[1];
  661. //m_cutHoles[0].Position.Z = firstPosition[2];
  662. //m_cutHoles[0].Position.T = firstPosition[3];
  663. //m_cutHoles[0].Position.R = firstPosition[4];
  664. //m_cutHoles[0].Position.M = firstPosition[5];
  665. ////这里要调用文件保存功能
  666. //arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  667. // + firstPosition[1].ToString() + ","
  668. // + firstPosition[2].ToString() + ","
  669. // + firstPosition[3].ToString() + ","
  670. // + firstPosition[4].ToString() + ","
  671. // + firstPosition[5].ToString() + ")";
  672. if (key_stop)
  673. {
  674. log.Info("停止键按下", true);
  675. return false;
  676. }
  677. return true;
  678. }
  679. /// <summary>
  680. /// 14. FIB切割
  681. /// </summary>
  682. /// <returns></returns>
  683. public bool FIBCross()
  684. {
  685. int state = 0;
  686. if (!iSEM.CmdFIBModeFIB())
  687. {
  688. log.Error("测量线程报错:切换到SEM模式失败", false);
  689. return false;
  690. }
  691. arg.Message = "切换到FIB模式成功。";
  692. arg.State = true;
  693. SendMsg("2-7");
  694. Thread.Sleep(1000);
  695. m_focuse.SetMagnification(MParam.Location_Magnification);
  696. //14.自动控制FIB切割
  697. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  698. //2.控制FIB进行切割
  699. //以上1、2步全部用ELY文件代替
  700. if (!m_FibWork.DoFIBWork())
  701. {
  702. log.Error("测量线程报错:" + arg.Message, false);
  703. return false;
  704. }
  705. arg.State = true;
  706. arg.Message = "FIB切割成功";
  707. SendMsg("2-8");
  708. Thread.Sleep(300);
  709. //判断是否停止进程
  710. if (key_stop)
  711. {
  712. log.Info("停止键按下", true);
  713. return false;
  714. }
  715. //做切割后SEM的拍照
  716. log.Info("测量线程:切割后SEM拍照", true);
  717. if (!iSEM.CmdFIBModeSEM())
  718. {
  719. log.Error("测量线程报错:切换到SEM模式失败", false);
  720. return false;
  721. }
  722. Thread.Sleep(1000);
  723. mArgSend.SendArgumentToScreen("3-0", "SEM模式切换成功");
  724. return true;
  725. }
  726. /// <summary>
  727. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  728. /// </summary>
  729. /// <returns></returns>
  730. public bool FindCross(CutHole currHole)
  731. {
  732. float x2 = 0, y2 = 0;
  733. int state = 0;
  734. //切换到SEM模式
  735. if (!iSEM.CmdFIBModeSEM())
  736. {
  737. log.Error("测量线程报错:" + arg.Message, false);
  738. return false;
  739. }
  740. Thread.Sleep(1000);
  741. if (key_stop)
  742. {
  743. log.Info("停止键按下", true);
  744. return false;
  745. }
  746. String fileName4 = currHole.data_path + "\\" + MParam.Firm + "-" + MParam.FindCrossMagnification.ToString("0") + "-" +currHole.HoleName + "-" + ImageName4;
  747. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  748. log.Info("fileName4=" + fileName4, true);
  749. float mag = MParam.FindCrossMagnification;
  750. m_photo.GetParam().Mag = mag;
  751. m_photo.GetParam().savePath = fileName4;
  752. m_photo.TakePhoto();
  753. //arg.Message = "SEM拍照成功";
  754. mArgSend.SendArgumentToScreen("3-2", "SEM拍照成功", fileName4);
  755. if (key_stop)
  756. {
  757. return false;
  758. }
  759. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  760. //5.根据坐标控制SEM移动到切孔位置,居中
  761. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  762. log.Info("文件名=" + fileName4, true);
  763. ImagePro.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x2, out y2, out state);
  764. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  765. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  766. if (state == 1)
  767. {
  768. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  769. if (!m_locate.MoveToPixByMoveStage(x2, y2))
  770. {
  771. log.Error("测量线程报错:" + arg.Message, false);
  772. return false;
  773. }
  774. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  775. mArgSend.SendArgumentToScreen("3-3",arg.Message);
  776. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  777. // String fileName10 = currHole.data_path + "\\" + MParam.Firm + "-" + MParam.Location_Magnification.ToString("0") + "-" + currHole.HoleName + "-" + ImageName10;
  778. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  779. //log.Info("fileName10====================" + fileName10, true);
  780. //m_photo.GetParam().savePath = fileName10;
  781. }
  782. else
  783. {
  784. log.Error("测量线程报错:" + arg.Message, false);
  785. return false;
  786. }
  787. //判断是否停止进程
  788. return true;
  789. }
  790. /// <summary>
  791. /// 17.自动控制SEM拍截面照
  792. /// </summary>
  793. /// <returns></returns>
  794. public bool ShotSection(CutHole currHole,ref List<String> limg_path, ref List<float> lsize)
  795. {
  796. int state = 0;
  797. #region 对焦
  798. Focusparam fprm = new Focusparam()
  799. {
  800. voltage = MParam.Photograph_Voltage,
  801. mag = MParam.Photograph_Magnification,
  802. reduceWindowPos = new System.Drawing.Point(402, 128),
  803. reduceWinHeight = 600,
  804. reduceWinWidth = 600,
  805. ScanSpeed = MParam.ScanSpeedFocus,
  806. IfAutoBrightnessAndContrast = true,
  807. brightness = 50.0f,
  808. contrast = 30.0f,
  809. delayTime = 500,
  810. Iprobe = 0.2f,
  811. tiltCorrAngle = 54,
  812. workingDis = 5.0f,
  813. };
  814. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  815. float m_TempBrightness=50f;
  816. float m_TempContrast=30f;
  817. fprm.brightness = m_TempBrightness;
  818. fprm.contrast = m_TempContrast;
  819. m_focuse.setFocusParam(fprm);
  820. m_focuse.DoFocusBySetMainParameter();
  821. Thread.Sleep(200);
  822. if (key_stop)
  823. {
  824. log.Info("停止键按下", true);
  825. return false;
  826. }
  827. //4、拍照,5、保存照片
  828. string fileName6 =currHole.data_path + "\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + currHole.HoleName + "-" + ImageName6;
  829. log.Info("fileName6=" + fileName6, true);
  830. PhotoParam phop = new PhotoParam()
  831. {
  832. Mag = MParam.Photograph_Magnification,
  833. savePath=fileName6,
  834. };
  835. m_photo.SetPhotoParam(phop);
  836. if (!m_photo.TakePhoto())
  837. {
  838. log.Error("测量线程报错:" + arg.Message, false);
  839. return false;
  840. }
  841. mArgSend.SendArgumentToScreen("3-7", "SEM拍照成功", fileName6);
  842. //判断是否停止进程
  843. if (key_stop)
  844. {
  845. log.Info("停止键按下", true);
  846. return false;
  847. }
  848. #endregion
  849. if (MParam.Is_Photograph == false)
  850. {
  851. #region 获取两个位置上及放大倍数
  852. //计算两个测量区域坐标
  853. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  854. List<float> mag = new List<float>();
  855. System.Drawing.Point ct0;
  856. float magMax;
  857. //log.Info("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  858. ImagePro.Img_Measure_Region_Position(fileName6, Convert.ToInt32(MParam.SampleName), MParam.Firm, out ct, out mag, out ct0, out state);
  859. string s = "";
  860. for (int i = 0; i < ct.Count; i++)
  861. {
  862. s += " 输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  863. + "放大倍数=" + mag[i];
  864. }
  865. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  866. ",计算放大区域坐标,输入图像" + fileName6.ToString() +
  867. "输入样品 " + Convert.ToInt32(MParam.SampleName) +
  868. " 输入厂商" + MParam.Firm.ToString() +
  869. s +
  870. " 输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  871. #endregion
  872. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  873. {
  874. mArgSend.SendArgumentToScreen("3-10", "获取位置及放大倍数成功");
  875. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  876. m_locate.RecordCurrentBeamShiftAndStagePosition();
  877. #endregion
  878. //找到放大倍数最大值
  879. magMax = mag[0];
  880. for (int m = 1; m < mag.Count; m++)
  881. {
  882. if (mag[m] > magMax)
  883. {
  884. magMax = mag[m];
  885. }
  886. }
  887. #region 移动到梯形左上角
  888. //20201127将视野移动到梯形左上角位置
  889. m_locate.MoveToPix(ct0.X, ct0.Y,MParam.PixelSizeCor);
  890. log.Info("测量线程:移动到对焦点( " + ct0.X.ToString()
  891. + "," + ct0.Y.ToString() + ")", true);
  892. Thread.Sleep(200);
  893. //循环升级对焦,每次放大3000倍
  894. int startmag=7000;
  895. if (magMax < 7000)
  896. {
  897. startmag =(int) magMax;
  898. }
  899. for (int curmag= startmag; curmag < magMax+3000; curmag += 5000)
  900. {
  901. fprm.IfAutoBrightnessAndContrast = true;
  902. fprm.reduceWinHeight = 480;
  903. fprm.reduceWinWidth = 450;
  904. fprm.tiltCorrAngle = 36;
  905. fprm.ScanSpeed = MParam.ScanSpeedFocus;
  906. fprm.mag = curmag;
  907. m_focuse.setFocusParam(fprm);
  908. m_focuse.DoFocusBySetMainParameter();
  909. }
  910. #endregion
  911. m_photo.EnforceContrast() ;//enter inside,enforce the brightness.
  912. #region 循环拍照
  913. for (int n = 0; n < ct.Count; n++)
  914. {
  915. #region 恢复到拍照的状态
  916. m_locate.RestoreLastBeamShiftAndStagePosition();
  917. #endregion
  918. #region 移动到指定点位置
  919. LocateParam lprm = new LocateParam()
  920. {
  921. PositionX = ct[n].X,
  922. PositionY = ct[n].Y,
  923. PixelSize_Y_cur = MParam.PixelSizeCor,
  924. };
  925. if (!m_locate.MoveToPix(lprm.PositionX,lprm.PositionY,lprm.PixelSize_Y_cur))
  926. {
  927. //移动到第一个点失败
  928. log.Error("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  929. }
  930. log.Info("测量线程:移动到第1个点( " + ct[n].X.ToString()
  931. + "," + ct[n].Y.ToString() + ")", true);
  932. #endregion
  933. log.Info("测量线程:移动到第一个点位置完成!", true);
  934. #region 拍照
  935. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  936. String fileName7 = currHole.data_path + "\\" + MParam.Firm + "-" + mag[n].ToString() + "-" + currHole.HoleName + "-" + n.ToString() + "-" + ImageNameTwo_1;
  937. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  938. log.Info("fileName7=" + fileName7, true);
  939. if (n == 0)//如果是第一个观测点就做角度修正
  940. {
  941. String fileName5 = currHole.data_path + "\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + currHole.HoleName + "-" + ImageName5;
  942. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  943. log.Info("纠正前 fileName5=" + fileName5, true);
  944. m_photo.GetParam().savePath = fileName5;
  945. m_photo.GetParam().Mag = mag[n];
  946. m_photo.TakePhoto();
  947. //8,计算切割面区域偏移角度及方向
  948. float degree = 0;
  949. int direction = 0;
  950. ImagePro.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  951. log.Info("测量线程:拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  952. log.Info("样品" + currHole.HoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  953. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  954. if (state == 1)
  955. {
  956. //梯形角度
  957. iSEM.SetScanRotationOn();
  958. Thread.Sleep(200);
  959. //20201128陈工要求,谭博返回角度*0.7
  960. iSEM.SetScanRotation(Convert.ToSingle(degree * MParam.ScanRotCor));
  961. Thread.Sleep(200);
  962. string Message = "图像接口返回角度为:" + degree.ToString();
  963. mArgSend.SendArgumentToScreen("3-8", Message, fileName5);
  964. }
  965. else
  966. {
  967. log.Error("测量线程报错:" + arg.Message, false);
  968. }
  969. //纠正后再次拍照
  970. log.Info("纠正后拍照!");
  971. m_photo.GetParam().savePath = fileName7;
  972. m_photo.GetParam().Mag = mag[n];
  973. m_photo.TakePhoto();
  974. }
  975. else
  976. {
  977. m_photo.GetParam().savePath = fileName7;
  978. m_photo.GetParam().Mag = mag[n];
  979. m_photo.TakePhoto();
  980. }
  981. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  982. Thread.Sleep(200);
  983. cycle_time = iSEM.GetCycleTime();
  984. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  985. Thread.Sleep(200);
  986. mArgSend.SendArgumentToScreen("3-11", "移动到第"+n+"个点位置拍照成功",fileName7);
  987. // add by zjx 在测量图上显示放大倍数和像素大小等信息
  988. limg_path.Add(fileName7);
  989. //获取像素大小
  990. lsize.Add(iSEM.GetPixelSize());
  991. float size = iSEM.GetPixelSize();
  992. SaveMeasDataPic(fileName7, mag[n], size);
  993. Thread.Sleep(1000);
  994. #endregion
  995. }
  996. #endregion
  997. }
  998. else
  999. {
  1000. log.Error("测量线程报错:" + arg.Message, false);
  1001. }
  1002. //判断是否停止进程
  1003. if (key_stop)
  1004. {
  1005. log.Info("停止键按下", true);
  1006. return false;
  1007. }
  1008. }
  1009. iSEM.SetTiltAngleOff();
  1010. Thread.Sleep(200);
  1011. iSEM.SetScanRotationOff();
  1012. Thread.Sleep(200);
  1013. iSEM.SetBeamShiftX(0);
  1014. Thread.Sleep(200);
  1015. iSEM.SetBeamShiftY(0);
  1016. Thread.Sleep(200);
  1017. //判断是否停止进程
  1018. if (key_stop)
  1019. {
  1020. return false;
  1021. }
  1022. return true;
  1023. }
  1024. public bool HoleMeasure(CutHole currHole)
  1025. {
  1026. // add by zjx 2020-12-18 为了测试只做能谱部分
  1027. if (MParam.IsonlyEDSForDebug == true)
  1028. {
  1029. //第一步:位置恢复
  1030. #region 第一步:坐标恢复
  1031. log.Info("测量线程:恢复样品分析点位置(R,X,Y,Z) = (" + currHole.Position.R.ToString() + ","
  1032. + currHole.Position.X.ToString() + ","
  1033. + currHole.Position.Y.ToString() + ","
  1034. + currHole.Position.Z.ToString() + ")", true);
  1035. Locate lo = new Locate(iSEM);
  1036. lo.LocateCutHolePosition(currHole, MParam.Tilt);
  1037. if (!m_focuse.SetMagnification(MParam.Location_Magnification))
  1038. {
  1039. log.Error("测量线程报错:设置定位放大倍数" + MParam.Location_Magnification.ToString() + "控制失败", false);
  1040. return false;
  1041. }
  1042. if (key_stop)
  1043. {
  1044. log.Info("停止键被按下", true);
  1045. return false;
  1046. }
  1047. arg.HoleName = currHole.HoleName;
  1048. arg.State = true;
  1049. arg.Message = "样品台移动到观测点:" + currHole.HoleName + "的位置成功。";
  1050. SendMsg("0-0");
  1051. #endregion
  1052. //第二步:设置电流电压
  1053. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  1054. log.Warn("测量线程:设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  1055. if (!SetVoltageAndIPROBE())
  1056. {
  1057. log.Error("测量线程:设置电压电流失败!目前是第 " + MParam.SampleName + " 类!", false);
  1058. return false;
  1059. }
  1060. //第三步:自动化流程-每个点都需要补偿54度
  1061. if (MParam.Is_Photograph == false)
  1062. {
  1063. log.Info("测量线程:倾斜补偿角度为54度", true);
  1064. if (!m_focuse. TiltCorrection(54.0f))
  1065. {
  1066. log.Error("测量线程报错:倾斜补偿角度为54度失败", false);
  1067. return false;
  1068. }
  1069. arg.Message = "角度补偿54度成功!";
  1070. arg.State = true;
  1071. SendMsg("0-1");
  1072. //判断是否停止进程
  1073. if (key_stop)
  1074. {
  1075. log.Info("停止键按下", true);
  1076. return false;
  1077. }
  1078. }
  1079. //第四步:拉直 ( 2是5/6类样品,不需要拉直)
  1080. if (MParam.SampleName != "2")
  1081. {
  1082. log.Warn("测量线程:拉直操作开始!", true);
  1083. if (!Straighten_Handle(currHole))
  1084. {
  1085. log.Info("测量线程报错:拉直操作失败。", true);
  1086. return false;
  1087. }
  1088. log.Info("测量线程:拉直操作结束!", true);
  1089. //判断是否停止进程
  1090. if (key_stop)
  1091. {
  1092. log.Info("停止键按下。", true);
  1093. return false;
  1094. }
  1095. }
  1096. else
  1097. {
  1098. arg.Message = "拉直操作自动对焦成功!";
  1099. arg.State = true;
  1100. SendMsg("1-0");
  1101. Thread.Sleep(200);
  1102. arg.Message = "拉直拍照成功!";
  1103. arg.Picture_Information.Picture_FullPath = "";
  1104. arg.State = true;
  1105. SendMsg("1-1");
  1106. Thread.Sleep(200);
  1107. arg.Message = "拉直操作完成";
  1108. arg.State = true;
  1109. SendMsg("1-2");
  1110. Thread.Sleep(200);
  1111. }
  1112. //第五步: 定位功能 PT沉积
  1113. if (MParam.Is_Photograph==false)
  1114. {
  1115. log.Warn("测量线程:PIB切割自动定位开始!", true);
  1116. if (!GetFIBAndPTPoistion(currHole))
  1117. {
  1118. log.Error("测量线程报错:自动定位失败,程序退出。", false);
  1119. return false;
  1120. }
  1121. //11.自动工具样品类型参数确定是否需要PT沉积
  1122. log.Info("是否PT:" + MParam.PT.ToString());
  1123. if (MParam.PT)
  1124. {
  1125. arg.State = true;
  1126. arg.Message = "PT沉积";
  1127. SendMsg("2-4");
  1128. m_PTWork.DoWholePTWork();
  1129. }
  1130. }
  1131. log.Info("测量线程:自动定位结束!", true);
  1132. //判断是否停止进程
  1133. if (key_stop)
  1134. {
  1135. log.Info("停止键按下。", true);
  1136. return false;
  1137. }
  1138. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  1139. if (MParam.Is_Photograph == false)
  1140. {
  1141. if (MParam.IsCutingForDebug)
  1142. {
  1143. log.Warn("测量线程:自动控制FIB切割开始!==" + MParam.IsCutingForDebug, true);
  1144. if (!FIBCross())
  1145. {
  1146. log.Error("测量线程报错:自动控制FIB切割失败。", false);
  1147. return false;
  1148. }
  1149. log.Info("测量线程:自动控制FIB切割结束!", true);
  1150. }
  1151. }
  1152. //del by sun 2020-12-15 temp end
  1153. //判断是否停止进程
  1154. if (key_stop)
  1155. {
  1156. return false;
  1157. }
  1158. //16.找到切割位置
  1159. if (MParam.Is_Photograph == false)
  1160. {
  1161. log.Info("测量线程:找到切割位置开始!移动到视野中心", true);
  1162. if (!FindCross(currHole))
  1163. {
  1164. return false;
  1165. }
  1166. log.Info("测量线程:找到切割位置结束!", true);
  1167. //判断是否停止进程
  1168. if (key_stop)
  1169. {
  1170. return false;
  1171. }
  1172. }
  1173. log.Warn("测量线程:自动控制SEM拍截面照开始", true);
  1174. //将过程17最后的拍照图片提出给18步进行调用
  1175. List<String> limg_path = new List<string>();
  1176. List<float> lsize = new List<float>();
  1177. //17.自动控制SEM拍截面照
  1178. if (!ShotSection(currHole,ref limg_path, ref lsize))
  1179. {
  1180. log.Error("拍截面照失败!");
  1181. return false;
  1182. }
  1183. log.Info("测量线程:自动控制SEM拍截面照结束!", true);
  1184. //判断是否停止进程
  1185. if (key_stop)
  1186. {
  1187. return false;
  1188. }
  1189. //18.自动层高分析
  1190. if (MParam.Is_Photograph == false)
  1191. {
  1192. log.Warn("测量线程:自动层高分析开始", true);
  1193. float size = iSEM.GetPixelSize();
  1194. int state = 1;
  1195. ImagePro.Img_Measure_Height(limg_path, lsize, currHole.data_path + "\\", Convert.ToInt32(MParam.SampleName), MParam.Firm, out state);
  1196. if (state == 0)
  1197. {
  1198. log.Error("层高分析失败!");
  1199. return false;
  1200. }
  1201. arg.State = true;
  1202. arg.Message = "层高分析成功";
  1203. SendMsg("3-12");
  1204. log.Info("测量线程:自动层高分析结束!", true);
  1205. }
  1206. }
  1207. //add by zjx 2020-12-18 为了测试只做能谱部分 end
  1208. //19.能谱分析
  1209. if (MParam.EDS)
  1210. {
  1211. if (currHole.HoleNo + 1 == m_cutHoles.Count)//最后样品分析点才跑能谱
  1212. {
  1213. log.Warn("测量线程:能谱分析开始===" + MParam.EDS, true);
  1214. EDS_Analysis(currHole);
  1215. log.Info("测量线程:能谱分析结束===" + MParam.EDS, true);
  1216. }
  1217. }
  1218. //20.复位
  1219. log.Info("测量线程:复位开始", true);
  1220. BeamShiftReset();
  1221. return true;
  1222. }
  1223. //初始化拉直操作
  1224. public bool Straighten_Handle(CutHole currHole)
  1225. {
  1226. //设置拉直的放大倍数
  1227. log.Info("测量线程:设置拉直放大倍数,放大倍数为" + MParam.Stretch_Magnification.ToString(), true);
  1228. if (!m_focuse.SetMagnification(MParam.Stretch_Magnification))
  1229. {
  1230. log.Error("测量线程报错:设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + MParam.Stretch_Magnification.ToString(), false);
  1231. return false;
  1232. }
  1233. arg.Message = "拉直放大倍数设置成功!";
  1234. arg.State = true;
  1235. SendMsg("0-2");
  1236. //1、自动对焦
  1237. log.Info("测量线程:拉直操作前自动对焦开始", true);
  1238. var p = new Focusparam();
  1239. p.IfAutoBrightnessAndContrast = true;
  1240. p.mag = MParam.Stretch_Magnification;
  1241. p.reduceWindowPos = new System.Drawing.Point(402, 128);
  1242. p.reduceWinWidth = 400;
  1243. p.reduceWinHeight = 400;
  1244. m_focuse.setFocusParam(p);
  1245. if (!m_focuse.DoFocusByNewMagnification(MParam.Stretch_Magnification))
  1246. {
  1247. log.Error("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  1248. return false;
  1249. }
  1250. Thread.Sleep(1000);
  1251. arg.Message = "拉直操作自动对焦成功!";
  1252. arg.State = true;
  1253. SendMsg("1-0");
  1254. //判断是否停止进程
  1255. if (key_stop)
  1256. {
  1257. log.Info("停止键按下。", true);
  1258. return false;
  1259. }
  1260. //2、拍张照片
  1261. String fileName0 = currHole.data_path + "\\" + currHole.HoleName + "_" + MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  1262. log.Info("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  1263. //拍照前改变速度,延时
  1264. m_photo.GetParam().Mag = p.mag;
  1265. m_photo.GetParam().savePath = fileName0;
  1266. if (!m_photo.TakePhoto())
  1267. {
  1268. log.Error("测量线程报错:拉直拍照失败", false);
  1269. return false;
  1270. }
  1271. arg.Message = "拉直拍照成功!";
  1272. arg.Picture_Information.Picture_FullPath = fileName0;
  1273. arg.State = true;
  1274. SendMsg("1-1");
  1275. //3、华为接口,获取旋转角度
  1276. float degree = 0;
  1277. int direction = 0;
  1278. int state = 1;
  1279. ImagePro.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  1280. log.Info("测量线程:使用图像处理接口:样品" + currHole.HoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  1281. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  1282. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  1283. if (state == 0)
  1284. {
  1285. log.Info("测量线程:图像处理接口参数state返回为零", false);
  1286. return false;
  1287. }
  1288. if (direction == 2)
  1289. {
  1290. degree = -degree;
  1291. }
  1292. if (degree != 0)
  1293. {
  1294. //4、拉直,旋转R轴
  1295. log.Info("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  1296. m_locate.RotateStageByDeltaR(degree);
  1297. //判断是否停止进程
  1298. if (key_stop)
  1299. {
  1300. log.Info("停止键按下", true);
  1301. return false;
  1302. }
  1303. }
  1304. arg.Message = "拉直操作完成";
  1305. arg.State = true;
  1306. SendMsg("1-2");
  1307. return true;
  1308. }
  1309. #region 能谱所有参数
  1310. //全局只有一个Extender
  1311. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  1312. public IExtenderControl iExtender = null;
  1313. const int ScanFieldSize = 1142;
  1314. MeasureDB m_MeasDB = null;
  1315. int m_nXrayId = 0;
  1316. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  1317. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  1318. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  1319. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  1320. /// <summary>
  1321. /// 做能谱分析
  1322. /// </summary>
  1323. /// <param name="a_CutHoleID">分析点视场ID,索引号</param>
  1324. /// <param name="a_CutHoleName">分析点视场名称</param>
  1325. /// <param name="a_FieldImagePositionID">分析点的视场位置ID,图像处理会返回多个Xray分析点,但我们这里只取第一个点所在的视场</param>
  1326. /// <returns>成功或失败</returns>
  1327. public bool DoEDS(CutHole currHole, int a_FieldImagePositionID)
  1328. {
  1329. try
  1330. {
  1331. string CutHoleName = currHole.HoleName;
  1332. //XrayID记录
  1333. log.Info("程序进入EDS测量!", true);
  1334. iExtender = factoryExtender.IExtender;
  1335. Thread.Sleep(500);
  1336. EDSParam param = MParam.EDSParam;
  1337. double dDwellTime = param.DwellTime;
  1338. int nImageType = param.ImageType;
  1339. double dScanSizes = param.ScanSize;
  1340. log.Info("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  1341. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  1342. string path = currHole.EDS_path;
  1343. string edsfn = path + "\\" + a_FieldImagePositionID.ToString() + "_" + ImageNameEDS;
  1344. log.Info("EDS_PATH=" + edsfn, true);
  1345. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);//get the field eds image where the anylysis point locate.
  1346. arg.Picture_Information.Picture_FullPath = "";
  1347. arg.State = true;
  1348. SendMsg("4-5");//向界面发送指令:能谱拍照
  1349. //arg.State = false;
  1350. arg.Message = "";
  1351. arg.Picture_Information.Picture_FullPath = edsfn;
  1352. SendMsg("EDSPic");
  1353. //送给客户,计算感兴趣的区域
  1354. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  1355. List<System.Drawing.Point> LinesStartPoint = new List<System.Drawing.Point>();
  1356. List<List<Segment>> listFeature = new List<List<Segment>>();
  1357. List<int> lines_height = new List<int>();
  1358. System.Drawing.Point area_pt = new System.Drawing.Point();
  1359. int width = 1;
  1360. int height = 1;
  1361. int AreasNo = 0;
  1362. long[] XrayData;
  1363. Dictionary<string, double> listElement;
  1364. int xrayCollectMode = param.XrayCollectMode;
  1365. switch (xrayCollectMode)
  1366. {
  1367. case 0://point mode
  1368. //点数据
  1369. int state = 0;
  1370. ImagePro.EDS_Param_Points(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out listPoints, out state);
  1371. if (state == 0)
  1372. {
  1373. log.Error("点采集失败", false);
  1374. return false;
  1375. }
  1376. log.Info("返回 listPoints=" + listPoints.Count.ToString(), true);
  1377. if (!m_MeasDB.InsertAnylysisField(currHole.HoleNo, CutHoleName, currHole.EDS_path, listPoints.Count, listFeature.Count, a_FieldImagePositionID))
  1378. {
  1379. log.Error("插入分析视场失败", false);
  1380. }
  1381. iExtender.BeginMultipleAquisition();
  1382. Thread.Sleep(100);
  1383. //点采集
  1384. m_nXrayId = 0;
  1385. foreach (System.Drawing.Point pt in listPoints)
  1386. {
  1387. XrayData = new long[2000];
  1388. listElement = new Dictionary<string, double>();
  1389. if (iExtender.XrayPointCollecting(param.PointTime, pt.X, pt.Y , out XrayData, out listElement))
  1390. {
  1391. string ele = "";
  1392. foreach (var s in listElement)
  1393. {
  1394. ele += s.ToString();
  1395. }
  1396. log.Info("采集点:(" + pt.X.ToString() + ":" + pt.Y.ToString() + ") 元素:" + ele);
  1397. //写入数据库
  1398. m_nXrayId++;
  1399. log.Info("点采集结束,写入数据库开始--" + m_nXrayId.ToString(), true);
  1400. Boolean ret = m_MeasDB.InsertAPointXray(currHole.HoleNo, m_nXrayId, pt.X, pt.Y, XrayData, listElement, a_FieldImagePositionID);
  1401. Thread.Sleep(1000);
  1402. }
  1403. }
  1404. iExtender.EndMultipleAquisition();
  1405. break;
  1406. case 1://line mode
  1407. log.Info("线扫描", true);
  1408. state = 0;
  1409. ImagePro.EDS_Param_Lines(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out LinesStartPoint, out lines_height, out state);
  1410. string sp = "";
  1411. foreach (System.Drawing.Point p in LinesStartPoint)
  1412. {
  1413. sp += "(" + p.X + "," + p.Y + ")";
  1414. }
  1415. log.Info("线返回数据,lines=" + LinesStartPoint.Count.ToString() + " " + sp, true);
  1416. if (state == 1)
  1417. {
  1418. //将线转换为segment数据
  1419. log.Info("将线转换为segment数据", true);
  1420. for (int i = 0; i < LinesStartPoint.Count; i++)
  1421. {
  1422. List<Segment> segments = new List<Segment>();
  1423. for (int j = 0; j <= lines_height[i]; j++)
  1424. {
  1425. Segment segment = new Segment();
  1426. segment.X = LinesStartPoint[i].X;
  1427. segment.Y = LinesStartPoint[i].Y + j;
  1428. segment.Length = 2;
  1429. segments.Add(segment);
  1430. }
  1431. listFeature.Add(segments);
  1432. }
  1433. }
  1434. else
  1435. {
  1436. log.Error("线扫图片处理失败", false);
  1437. return false;
  1438. }
  1439. //线采集
  1440. iExtender.BeginMultipleAquisition();
  1441. Thread.Sleep(100);
  1442. for (int i = 0; i < listFeature.Count; i++)
  1443. {
  1444. List<Segment> listSeg = listFeature[i];
  1445. XrayData = new long[2000];
  1446. listElement = new Dictionary<string, double>();
  1447. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  1448. {
  1449. string ele = "";
  1450. foreach (var s in listElement)
  1451. {
  1452. ele += s.ToString();
  1453. }
  1454. log.Info("采集时间=" + param.AreaTime.ToString(), true);
  1455. log.Info("(" + listSeg[0].X + "," + listSeg[0].Y + ") height=" + lines_height[i] + " 元素:" + ele);
  1456. log.Info("线采集结束,写入数据库开始", true);
  1457. //写入数据库
  1458. m_nXrayId++;
  1459. AreasNo++;
  1460. m_MeasDB.InsertAAreaXay(currHole.HoleNo, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  1461. }
  1462. else
  1463. {
  1464. log.Error("线扫xray失败");
  1465. }
  1466. }
  1467. iExtender.EndMultipleAquisition();
  1468. break;
  1469. case 2: //area mode
  1470. //面数据
  1471. state = 0;
  1472. ImagePro.EDS_Param_Areas(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out area_pt, out width, out height, out state);
  1473. log.Info("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  1474. if (state == 1)
  1475. {
  1476. //将面转换为segment数据
  1477. List<Segment> segments = new List<Segment>();
  1478. for (int j = 0; j <= height; j++)
  1479. {
  1480. Segment segment = new Segment();
  1481. segment.X = area_pt.X;
  1482. segment.Y = area_pt.Y + j;
  1483. segment.Length = width;
  1484. segments.Add(segment);
  1485. }
  1486. listFeature.Add(segments);
  1487. }
  1488. else
  1489. {
  1490. log.Error("面扫图片处理失败", false);
  1491. return false;
  1492. }
  1493. //面采集
  1494. iExtender.BeginMultipleAquisition();
  1495. Thread.Sleep(100);
  1496. foreach (List<Segment> listSeg in listFeature)
  1497. {
  1498. XrayData = new long[2000];
  1499. listElement = new Dictionary<string, double>();
  1500. log.Info("AreaTime=" + param.AreaTime.ToString(), true);
  1501. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  1502. {
  1503. string ele = "";
  1504. foreach (var s in listElement)
  1505. {
  1506. ele += s.ToString();
  1507. }
  1508. log.Info(" 元素:" + ele);
  1509. log.Info("面采集结束,写入数据库开始", true);
  1510. //写入数据库
  1511. m_nXrayId++;
  1512. AreasNo++;
  1513. m_MeasDB.InsertAAreaXay(currHole.HoleNo, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  1514. }
  1515. else
  1516. {
  1517. log.Error("面扫xray失败");
  1518. }
  1519. }
  1520. iExtender.EndMultipleAquisition();
  1521. break;
  1522. }
  1523. //存储数据
  1524. //向分析点数据库更新
  1525. }
  1526. catch (Exception e)
  1527. {
  1528. iExtender.EndMultipleAquisition();
  1529. log.Error(e.Message, false);
  1530. return false;
  1531. }
  1532. return true;
  1533. }
  1534. /// <summary>
  1535. /// 初始化数据库
  1536. /// </summary>
  1537. public void Init_MeasDB()
  1538. {
  1539. m_MeasDB = new MeasureDB(m_measureFile);
  1540. }
  1541. /// <summary>
  1542. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1543. /// </summary>
  1544. /// <returns></returns>
  1545. public bool EDS_FindCross(CutHole currHole)
  1546. {
  1547. float x2 = 0, y2 = 0;
  1548. int state = 0;
  1549. float tmag = MParam.Photograph_Magnification / 3;
  1550. if (tmag < 300)
  1551. {
  1552. tmag = 300;
  1553. }
  1554. Focusparam focusPrm = new Focusparam()
  1555. {
  1556. IfAutoBrightnessAndContrast = true,
  1557. ScanSpeed = MParam.ScanSpeedHigh,
  1558. mag = tmag,
  1559. reduceWindowPos = new System.Drawing.Point(256, 192),
  1560. reduceWinWidth = 400,
  1561. reduceWinHeight = 400,
  1562. workingDis = 10,//unit:mm
  1563. brightness = 50,
  1564. contrast = 29,
  1565. tiltCorrAngle = 54,
  1566. ifStig = false,
  1567. };
  1568. m_focuse.setFocusParam(focusPrm);
  1569. m_focuse.DoFocusBySetMainParameter();
  1570. float mag = tmag;
  1571. String fileName4 = currHole.data_path + "\\EDS\\" + MParam.Firm + " - " + mag.ToString("0") + "-" + currHole.HoleName + "-" + ImageNameEDS4;
  1572. PhotoParam prm = new PhotoParam()
  1573. {
  1574. Mag = mag,
  1575. savePath = fileName4,
  1576. };
  1577. m_photo.SetPhotoParam(prm);
  1578. m_photo.TakePhoto();
  1579. arg.Picture_Information.Picture_FullPath = fileName4;
  1580. mArgSend.SendArgumentToScreen("4-2", "", fileName4);
  1581. if (key_stop)
  1582. {
  1583. return false;
  1584. }
  1585. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1586. //5.根据坐标控制SEM移动到切孔位置,居中
  1587. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  1588. log.Info("文件名=" + fileName4, true);
  1589. ImagePro.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x2, out y2, out state);
  1590. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1591. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1592. if (state == 1)
  1593. {
  1594. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1595. if (!m_locate.MoveToPixByMoveStage(x2,y2))
  1596. {
  1597. log.Error("测量线程报错:" + arg.Message, false);
  1598. return false;
  1599. }
  1600. }
  1601. else
  1602. {
  1603. log.Error("测量线程报错:" + arg.Message, false);
  1604. return false;
  1605. }
  1606. //判断是否停止进程
  1607. if (key_stop)
  1608. {
  1609. log.Info("停止键按下", true);
  1610. return false;
  1611. }
  1612. Thread.Sleep(2000);
  1613. return true;
  1614. }
  1615. /// <summary>
  1616. /// 171.能谱第17步找点采集数据
  1617. /// </summary>
  1618. /// <returns></returns>
  1619. public bool EDS_ShotSection(CutHole currHole)
  1620. {
  1621. int state = 0;
  1622. Focusparam fprm = new Focusparam()
  1623. {
  1624. mag = MParam.Photograph_Magnification,
  1625. reduceWindowPos = new System.Drawing.Point(402, 128),
  1626. reduceWinHeight = 600,
  1627. reduceWinWidth = 600,
  1628. ScanSpeed = MParam.ScanSpeedFocus,
  1629. IfAutoBrightnessAndContrast = true,
  1630. delayTime = 500,
  1631. voltage = 7000,
  1632. Iprobe = 0.5f,
  1633. workingDis = 10,//unit mm
  1634. brightness = 50,
  1635. contrast = 29,
  1636. tiltCorrAngle = 54,
  1637. ifStig = false,
  1638. };
  1639. log.Info("自动对焦开始!", true);
  1640. m_focuse.setFocusParam(fprm);
  1641. m_focuse.DoFocusByNewMagnification(MParam.Photograph_Magnification);
  1642. SendMsg("4-4");
  1643. fprm.ifStig = false;
  1644. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1645. String fileName5 = currHole.data_path + "\\EDS\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + currHole.HoleName + "-" + ImageName5;
  1646. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1647. log.Info("fileName5=" + fileName5, true);
  1648. log.Info("开始拍摄截面照!");
  1649. PhotoParam phoPrm = new PhotoParam()
  1650. {
  1651. Mag = MParam.Photograph_Magnification,
  1652. savePath = fileName5,
  1653. };
  1654. //Photo pho = new Photo(phoPrm, iSEM);
  1655. m_photo.SetPhotoParam(phoPrm);
  1656. m_photo.TakePhoto();
  1657. //判断是否停止进程
  1658. if (key_stop)
  1659. {
  1660. log.Info("停止键按下", true);
  1661. return false;
  1662. }
  1663. #endregion
  1664. if (MParam.Is_Photograph == false)//Is_Photograph 代表 是否是只拍照
  1665. {
  1666. #region 获取两个位置上及放大倍数
  1667. //计算两个测量区域坐标
  1668. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1669. List<float> mag = new List<float>();
  1670. System.Drawing.Point ct0;
  1671. float magMax;
  1672. log.Info("图像处理接口,计算两个放大区域坐标,输入图像" + fileName5.ToString(), true);
  1673. ImagePro.Img_Measure_Region_Position(fileName5, Convert.ToInt32(MParam.SampleName), MParam.Firm, out ct, out mag, out ct0, out state);
  1674. string s = "";
  1675. for (int i = 0; i < ct.Count; i++)
  1676. {
  1677. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  1678. + "放大倍数=" + mag[i];
  1679. }
  1680. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  1681. ",计算两个放大区域坐标,输入图像" + fileName5.ToString() +
  1682. "输入样品" + Convert.ToInt32(MParam.SampleName) +
  1683. "输入厂商" + MParam.Firm.ToString() +
  1684. s +
  1685. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1686. #endregion
  1687. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1688. {
  1689. Locate recordPostion = new Locate(iSEM);
  1690. recordPostion.RecordCurrentBeamShiftAndStagePosition();
  1691. //找到第一个观测点放大倍数find the first anylysis point and the mag.
  1692. magMax = mag[0];
  1693. #region 移动到梯形左上角
  1694. //20201127将视野移动到梯形左上角位置
  1695. log.Warn("开始对焦 移动到对焦点( " + ct0.X.ToString()
  1696. + "," + ct0.Y.ToString() + ")", true);
  1697. m_locate.MoveToPix(ct0.X,ct0.Y,MParam.PixelSizeCor);
  1698. Thread.Sleep(200);
  1699. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1700. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1701. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1702. cycle_time = iSEM.GetCycleTime();
  1703. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1704. Focusparam fprm1 = new Focusparam()
  1705. {
  1706. mag = magMax / 2,
  1707. reduceWindowPos = new System.Drawing.Point(402, 128),
  1708. reduceWinHeight = 600,
  1709. reduceWinWidth = 600,
  1710. ScanSpeed = MParam.ScanSpeedFocus,
  1711. IfAutoBrightnessAndContrast = true,
  1712. delayTime = 500,
  1713. voltage = 7000,
  1714. Iprobe = 0.5f,
  1715. workingDis = 10,
  1716. brightness = 49.4f,
  1717. contrast = 30.1f,
  1718. tiltCorrAngle = 36,
  1719. ifStig = false,
  1720. };
  1721. log.Info("自动对焦1开始!", true);
  1722. m_focuse.setFocusParam(fprm1);
  1723. m_focuse.DoFocusBySetMainParameter();
  1724. log.Info("自动对焦2开始!", true);
  1725. m_focuse.DoFocusByNewMagnification(magMax);
  1726. #endregion
  1727. log.Warn("对焦完成,开始用能谱拍摄观测点照片!并分析图片以获得Xray点位置!");
  1728. recordPostion.RestoreLastBeamShiftAndStagePosition();
  1729. log.Warn("移动到指定观测点!并准备打Xray");
  1730. m_locate.MoveToPix(ct[0].X,ct[0].Y,MParam.PixelSizeCor);
  1731. SendMsg("4-4");//向界面发送指令:放大并对拍摄点对焦
  1732. Thread.Sleep(500);
  1733. #region 拍照
  1734. //log.Info("进入内部观察,不对焦!", true);
  1735. //梯形角度
  1736. //if (Math.Abs(scanRotateAngle) > 0)
  1737. //{
  1738. // iSEM.SetScanRotationOn();
  1739. // Thread.Sleep(200);
  1740. // //20201128陈工要求,谭博返回角度*0.7
  1741. // iSEM.SetScanRotation(Convert.ToSingle(scanRotateAngle * 0.7));
  1742. // Thread.Sleep(200);
  1743. //}
  1744. log.Info("开始EDS拍照,设置放大倍数" + mag[0]);
  1745. m_focuse.SetMagnification(mag[0]);
  1746. // m_photo.EnforceContrast();
  1747. log.Warn("EDS获取指定观测点图片,并打Xray");
  1748. DoEDS(currHole, 1);
  1749. log.Info("像素扫描:CmdPixelScan");
  1750. iSEM.CmdPixelScan();
  1751. Thread.Sleep(200);
  1752. log.Info("改变刷新率 " + MParam.ScanSpeedNormal);
  1753. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1754. cycle_time = iSEM.GetCycleTime();
  1755. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1756. SendMsg("4-6");//向界面发生指令:采集能谱信息
  1757. }
  1758. #endregion
  1759. }
  1760. iSEM.SetTiltAngleOff();
  1761. Thread.Sleep(200);
  1762. iSEM.SetScanRotationOff();
  1763. Thread.Sleep(200);
  1764. iSEM.SetBeamShiftX(0);
  1765. Thread.Sleep(200);
  1766. iSEM.SetBeamShiftY(0);
  1767. Thread.Sleep(200);
  1768. //判断是否停止进程
  1769. return true;
  1770. }
  1771. /// <summary>
  1772. /// 19.能谱分析
  1773. /// </summary>
  1774. /// <returns></returns>
  1775. public bool EDS_Analysis(CutHole currHole)
  1776. {
  1777. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  1778. Locate lo = new Locate(iSEM);
  1779. lo.MoveZAxisByAbs(MParam.EDSZ);
  1780. //判断是否停止进程
  1781. if (key_stop)
  1782. {
  1783. log.Info("停止键按下", true);
  1784. return false;
  1785. }
  1786. SendMsg("4-0");
  1787. //2.角度补偿关闭
  1788. // iSEM.SetScanRotationOff();
  1789. //在层高分析时,角度补偿已经纠正,能谱分析不必再做
  1790. Thread.Sleep(200);
  1791. iSEM.SetSEMVoltage(7000);
  1792. Thread.Sleep(200);
  1793. iSEM.SetSEMIPROBE(0.5f / 1000000000);
  1794. Thread.Sleep(200);
  1795. SendMsg("4-1");
  1796. log.Warn("开始梯形移到视野中心!");
  1797. if (!EDS_FindCross(currHole))
  1798. {
  1799. return false;
  1800. }
  1801. SendMsg("4-3");
  1802. //7.调用171步过程
  1803. log.Warn("开始打能谱图和打Xray!");
  1804. if (!EDS_ShotSection(currHole))
  1805. {
  1806. return false;
  1807. }
  1808. return true;
  1809. }
  1810. /// <summary>
  1811. /// 20.光束等复位
  1812. /// </summary>
  1813. public void BeamShiftReset()
  1814. {
  1815. iSEM.SetTiltAngleOff();
  1816. Thread.Sleep(200);
  1817. iSEM.SetScanRotationOff();
  1818. Thread.Sleep(200);
  1819. iSEM.SetBeamShiftX(0);
  1820. Thread.Sleep(200);
  1821. iSEM.SetBeamShiftY(0);
  1822. Thread.Sleep(200);
  1823. }
  1824. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  1825. #region 设置电压电流
  1826. public bool SetVoltageAndIPROBE()
  1827. {
  1828. log.Info("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  1829. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  1830. bool mRet_VoltageFlag = false;
  1831. bool mRet_ElecFlag = false;
  1832. if (MParam.SampleName == "4" || MParam.SampleName == "5")
  1833. {
  1834. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  1835. Thread.Sleep(500);
  1836. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  1837. Thread.Sleep(500);
  1838. }
  1839. else if (MParam.SampleName == "3")
  1840. {
  1841. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  1842. Thread.Sleep(500);
  1843. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  1844. Thread.Sleep(500);
  1845. }
  1846. else
  1847. {
  1848. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  1849. Thread.Sleep(500);
  1850. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  1851. Thread.Sleep(500);
  1852. }
  1853. if (!mRet_VoltageFlag) return false;
  1854. if (!mRet_ElecFlag) return false;
  1855. log.Info("测量线程:设置电压电流完成!", true);
  1856. return true;
  1857. }
  1858. #endregion
  1859. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  1860. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  1861. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  1862. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息
  1863. public void SaveMeasDataPic(String picFullPath, float Mag, float pixelsize)
  1864. {
  1865. try
  1866. {
  1867. using (System.Drawing.Image img = Image.FromFile(picFullPath))
  1868. {
  1869. Bitmap bmp = new Bitmap(img.Width, img.Height);
  1870. using (Graphics g = Graphics.FromImage(bmp))
  1871. {
  1872. g.DrawImage(img, 0, 0, img.Width, img.Height);
  1873. String str = "Mag:" + Mag.ToString("0") + "X\tPixelSize:" + (pixelsize * 1000000).ToString("0.00") + "um";
  1874. Font font = new Font("宋体", 16, FontStyle.Bold);
  1875. SolidBrush sbrush = new SolidBrush(Color.LimeGreen);
  1876. g.DrawString(str, font, sbrush, new PointF(40, img.Height - 30));
  1877. }
  1878. System.Drawing.Imaging.BitmapData bmpData = bmp.LockBits(new Rectangle(0, 0, bmp.Width, bmp.Height), System.Drawing.Imaging.ImageLockMode.ReadOnly, System.Drawing.Imaging.PixelFormat.Format8bppIndexed);
  1879. Bitmap newBitmap = new Bitmap(img.Width, img.Height, bmpData.Stride, System.Drawing.Imaging.PixelFormat.Format8bppIndexed, bmpData.Scan0);
  1880. String path = Path.GetDirectoryName(picFullPath) +
  1881. Path.GetFileNameWithoutExtension(picFullPath) +
  1882. "_Data" + Path.GetExtension(picFullPath);
  1883. newBitmap.SetResolution(1, 1);
  1884. newBitmap.Save(path);
  1885. }
  1886. }
  1887. catch
  1888. {
  1889. log.Error("在测量图上显示放大倍数和像素大小信息失败", false);
  1890. }
  1891. }
  1892. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息 end
  1893. }
  1894. }