Measure.cs 41 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. public class ThreadStatusEventArgs
  26. {
  27. public string State
  28. {
  29. get { return m_state; }
  30. set { m_state = value; }
  31. }
  32. private string m_state;
  33. public DateTime Time
  34. {
  35. get { return m_time; }
  36. set { m_time = value; }
  37. }
  38. private DateTime m_time;
  39. public ThreadStatusEventArgs(string a_State)
  40. {
  41. this.m_state = a_State;
  42. }
  43. }
  44. public class CutHolesStatusEventArgs
  45. {
  46. public string State
  47. {
  48. get { return m_state; }
  49. set { m_state = value; }
  50. }
  51. private string m_state;
  52. public string HoleName
  53. {
  54. get { return m_holeName; }
  55. set { m_holeName = value; }
  56. }
  57. private string m_holeName;
  58. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  59. {
  60. this.m_state = a_state;
  61. this.m_holeName = a_holeName;
  62. }
  63. }
  64. public class Measure
  65. {
  66. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  67. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  68. //全局只有一个fatorySEM
  69. static FactoryHardware factorySEM = FactoryHardware.Instance;
  70. ISEMControl iSEM = factorySEM.ISEM;
  71. //@的作用是不用转义字符\\只打一个就行
  72. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  73. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  74. const String ImageName3 = @"ImageFIB600X2.tif";
  75. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  76. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  77. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  78. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  79. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  80. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  81. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  82. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  83. const String ElyDeposition = @"Deposition.ely"; //沉积
  84. const String ElyCrossSection = @"CrossSection.ely"; //切割
  85. const float fMin = (float)0.0000002; //单位是米
  86. int m_nWorkHoleNo = -1;
  87. //测量文件
  88. private MeasureFile m_measureFile;
  89. public MeasureFile MeasureFile
  90. {
  91. get { return this.m_measureFile; }
  92. set { this.m_measureFile = value; }
  93. }
  94. //测量的切割孔
  95. private List<MeasureData.CutHole> m_cutHoles;
  96. public List<MeasureData.CutHole> cutHoles
  97. {
  98. get { return this.m_cutHoles; }
  99. set { this.m_cutHoles = value; }
  100. }
  101. //工作文件夹
  102. private string m_WorkingFolder;
  103. public string WorkingFolder
  104. {
  105. get { return this.m_WorkingFolder; }
  106. set { this.m_WorkingFolder = value; }
  107. }
  108. //程序当前路径
  109. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  110. //线程状态
  111. private ThreadStatus m_ThreadStatus;
  112. public ThreadStatus TStatus
  113. {
  114. get { return this.m_ThreadStatus; }
  115. set { this.m_ThreadStatus = value; }
  116. }
  117. //测量参数
  118. private MeasureParam m_MsParam;
  119. public MeasureParam MeasParam
  120. {
  121. get { return this.m_MsParam; }
  122. set { this.m_MsParam = value; }
  123. }
  124. //构造函数
  125. public Measure()
  126. {
  127. Init();
  128. }
  129. private void Init()
  130. {
  131. MeasParam = new MeasureParam();
  132. TStatus = new ThreadStatus();
  133. cutHoles = new List<MeasureData.CutHole>();
  134. }
  135. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  136. public bool InitMeas(MeasureFile a_measureFile)
  137. {
  138. m_measureFile = a_measureFile;
  139. List<CutHole> listHoles = m_measureFile.ListCutHole;
  140. foreach (CutHole h in listHoles)
  141. {
  142. if (h.SWITCH == true)
  143. {
  144. m_cutHoles.Add(h);
  145. }
  146. }
  147. if (m_cutHoles.Count == 0)
  148. return false;
  149. this.m_MsParam = m_measureFile.MParam;
  150. return true;
  151. }
  152. public void SendMsg(string a_StrMsg)
  153. {
  154. ThreadStatusEventArgs arg = new ThreadStatusEventArgs(a_StrMsg);
  155. arg.Time = DateTime.Now;
  156. SendThreadStatus(this, arg);
  157. }
  158. public void SendCutHoleMsg(string a_state, string a_holeName)
  159. {
  160. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  161. arg.HoleName = a_holeName;
  162. arg.State = a_state;
  163. SendCutHolesStatus(this, arg);
  164. }
  165. //测量流程
  166. public void DoMeasure()
  167. {
  168. //创建线程的测量状态的更新
  169. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  170. if (SendThreadStatus != null)
  171. {
  172. SendMsg("开始测量。");
  173. }
  174. //检查硬件连接是否正常
  175. if (!ConnectHardware())
  176. {
  177. SendMsg("连接硬件失败。");
  178. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  179. return;
  180. }
  181. SendMsg("硬件连接成功。");
  182. //设置工作文件夹
  183. if (!SetWorkingFolderStr())
  184. {
  185. SendMsg("设置工作文件夹失败");
  186. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  187. return;
  188. }
  189. SendMsg("创建工作文件路径为" + WorkingFolder);
  190. float[] firstPosition;
  191. for (int i = 0; i < m_cutHoles.Count; i++)
  192. {
  193. m_nWorkHoleNo = i;
  194. if (i == 0)
  195. {
  196. SendMsg("第一个切孔开始测量");
  197. //切孔操作-开始
  198. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  199. firstPosition = iSEM.GetStagePosition();
  200. //第一个孔的测试
  201. FirstHole();
  202. //切孔操作-完成
  203. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  204. }
  205. else
  206. {
  207. //非第一个孔的测试
  208. SendMsg("第" + i.ToString() + "个切孔开始测量");
  209. //切孔操作-开始
  210. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  211. OtherHole();
  212. //切孔操作-完成
  213. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  214. }
  215. }
  216. }
  217. //检查硬件连接是否正常
  218. public bool ConnectHardware()
  219. {
  220. //返回硬件的连接状态
  221. return iSEM.ConnectStatus();
  222. }
  223. //设置工作文件夹
  224. public bool SetWorkingFolderStr()
  225. {
  226. WorkingFolder = m_measureFile.FilePath;
  227. return true;
  228. ////获取工作文件路径
  229. //string pathName = m_measureFile.FilePath;
  230. ////判断工作文件路径是否为空或无效
  231. //if (string.IsNullOrEmpty(pathName))
  232. //{
  233. // SendMsg("路径无效");
  234. // return false;
  235. //}
  236. ////文件未保存
  237. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  238. //{
  239. // SendMsg("工程文件未保存");
  240. // return false;
  241. //}
  242. ////获取工作文件所在文件夹
  243. //string folder = System.IO.Path.GetDirectoryName(pathName);
  244. //if (string.IsNullOrEmpty(folder))
  245. //{
  246. // SendMsg("工程文件无效");
  247. // return false;
  248. //}
  249. //WorkingFolder += @"\\";
  250. //LogManager.Init(WorkingFolder);
  251. //return false;
  252. }
  253. //插入PT针
  254. public bool InsertPT()
  255. {
  256. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  257. SendMsg("调用宏插入PT针宏文件" + fn);
  258. iSEM.CMDMCFFilename(fn);
  259. //延时1s??
  260. Thread.Sleep(1000);
  261. return true;
  262. }
  263. //撤出PT针
  264. public bool RetractPT()
  265. {
  266. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  267. SendMsg("调用宏撤出PT针宏文件" + fn);
  268. iSEM.CMDMCFFilename(fn);
  269. //延时1s??
  270. Thread.Sleep(1000);
  271. return true;
  272. }
  273. //PT沉积
  274. public bool PTWork()
  275. {
  276. //执行PT沉积的ELY文件
  277. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  278. SendMsg("执行PT沉积Ely文件:" + fn);
  279. if (!ExcuteEly(fn))
  280. {
  281. return false;
  282. }
  283. //等待沉积完成
  284. while (true)
  285. {
  286. Thread.Sleep(10000);
  287. if (iSEM.GetFIBMode() == 0)
  288. {
  289. break;
  290. }
  291. }
  292. return true;
  293. }
  294. //FIB切割
  295. public bool FIBWork()
  296. {
  297. //执行PT沉积的ELY文件
  298. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  299. SendMsg("执行FIB切割Ely文件:" + fn);
  300. if (!ExcuteEly(fn))
  301. {
  302. return false;
  303. }
  304. //等待切割完成
  305. while (true)
  306. {
  307. Thread.Sleep(10000);
  308. if (iSEM.GetFIBMode() == 0)
  309. {
  310. break;
  311. }
  312. }
  313. return true;
  314. }
  315. public bool ExcuteEly(string a_filename)
  316. {
  317. //执行ELy文件有三个动作
  318. //1. 选择ELY文件
  319. SendMsg("选择ELY文件");
  320. if (!iSEM.CmdFIBLoadELY(a_filename))
  321. {
  322. SendMsg("选择ELY文件失败");
  323. return false;
  324. }
  325. Thread.Sleep(1000);
  326. //2. 确认ELY文件
  327. SendMsg("确认ELY文件");
  328. if (!iSEM.CmdFIBEXPOSUREELY())
  329. {
  330. SendMsg("确认ELY文件失败");
  331. return false;
  332. }
  333. Thread.Sleep(1000);
  334. //3. 执行ELY文件
  335. SendMsg("执行ELY文件");
  336. if (!iSEM.CmdFIBSTARTELY())
  337. {
  338. SendMsg("执行ELY文件失败");
  339. return false;
  340. }
  341. Thread.Sleep(1000);
  342. return true;
  343. }
  344. /// <summary>
  345. ///13. 自动 定位功能
  346. /// </summary>
  347. /// <returns></returns>
  348. public bool GetPoistion()
  349. {
  350. SendMsg("自动定位");
  351. //13.自动定位切割
  352. {
  353. SendMsg("放大600倍");
  354. //1.控制SEM放大600X
  355. if (!iSEM.SetMagnification(600))
  356. {
  357. return false;
  358. }
  359. //2.控制SEM自动对焦、亮度、对比度
  360. // if (!MeasParam.FocusMode)
  361. {
  362. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  363. {
  364. SendMsg("拍摄照片完成");
  365. //return true;
  366. }
  367. else
  368. {
  369. SendMsg("拍摄照片失败");
  370. return false;
  371. }
  372. //弹出手动对焦的窗口
  373. }
  374. //else
  375. //{
  376. // //调用自动对焦模块
  377. //}
  378. //3.设置SEM进行角度补偿54度
  379. SendMsg("设置校正54度");
  380. if (!TiltCorrection(54))
  381. {
  382. SendMsg("设置SEM进行角度补偿54度");
  383. return false;
  384. }
  385. Thread.Sleep(5000);
  386. //4.控制SEM拍照
  387. SendMsg("SEM拍照");
  388. //5.保存照片
  389. {
  390. //1. 创建目录,已经完成
  391. //2. 设置图片名称
  392. //3. 保存图片1
  393. WorkingFolder = m_measureFile.FilePath;
  394. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  395. SendMsg("SEM拍照存储到" + fileName1);
  396. if (!GetImage(ImageMode.SEM, fileName1))
  397. {
  398. SendMsg("SEM拍照失败");
  399. return false;
  400. }
  401. Thread.Sleep(3000);
  402. }
  403. //6.设置FIB拍照参数——扫描时间、束流等
  404. //7.控制FIB自动亮度、对比度
  405. SendMsg("切换FIB控制");
  406. if (!iSEM.CmdFIBModeFIB())
  407. {
  408. SendMsg("FIB模式切换失败");
  409. return false;
  410. }
  411. Thread.Sleep(10000);
  412. //8.控制FIB拍照
  413. //9.保存照片
  414. SendMsg("FIB拍照");
  415. {
  416. //1. 设置图片名称
  417. //2. 保存图片2
  418. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  419. if (!GetImage(ImageMode.FIB, fileName2))
  420. {
  421. SendMsg("FIB拍照失败");
  422. return false;
  423. }
  424. Thread.Sleep(3000);
  425. }
  426. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  427. SendMsg("调用识别位置");
  428. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  429. {
  430. SendMsg("移动已完成");
  431. //return true;
  432. }
  433. else
  434. {
  435. SendMsg("移动已失败");
  436. return false;
  437. }
  438. SendMsg("进行PT沉积");
  439. //11.自动工具样品类型参数确定是否需要PT沉积
  440. {
  441. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  442. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  443. //3. 根据坐标进行PT沉积
  444. if (!PTWork())
  445. {
  446. SendMsg("PT沉积失败");
  447. return false;
  448. }
  449. }
  450. return true;
  451. //模拟为客户返回的坐标值
  452. float x0 = 0, y0 = 0;
  453. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  454. //12.根据梯形坐标控制FIB调整到中心位置
  455. if (!iSEM.MoveStageXY(x0, y0))
  456. {
  457. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  458. return false;
  459. }
  460. //电镜移动是有一个延时的操作的?
  461. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  462. float x1 = iSEM.GetStageAtX();
  463. float y1 = iSEM.GetStageAtY();
  464. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  465. {
  466. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  467. return false;
  468. }
  469. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  470. float[] firstPosition = iSEM.GetStagePosition();
  471. //这里要调用文件保存功能
  472. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  473. + firstPosition[1].ToString() + ","
  474. + firstPosition[2].ToString() + ","
  475. + firstPosition[3].ToString() + ","
  476. + firstPosition[4].ToString() + ","
  477. + firstPosition[5].ToString() + ")");
  478. }
  479. return false;
  480. }
  481. /// <summary>
  482. /// 14. FIB切割
  483. /// </summary>
  484. /// <returns></returns>
  485. public bool FIBCross()
  486. {
  487. //14.自动控制FIB切割
  488. {
  489. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  490. //2.控制FIB进行切割
  491. SendMsg("FIB切割");
  492. if (!FIBWork())
  493. {
  494. SendMsg("FIB切割失败");
  495. return false;
  496. }
  497. Thread.Sleep(5000);
  498. //3.控制FIB拍照600X
  499. //4.保存图片
  500. {
  501. //1.设置图片名称
  502. //2.保存图片3
  503. WorkingFolder = m_measureFile.FilePath;
  504. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  505. SendMsg("SEM拍照存储到" + fileName3);
  506. if (!GetImage(ImageMode.FIB, fileName3))
  507. {
  508. SendMsg("FIB拍照失败");
  509. return false;
  510. }
  511. Thread.Sleep(3000);
  512. }
  513. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  514. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  515. }
  516. return true;
  517. }
  518. /// <summary>
  519. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  520. /// </summary>
  521. /// <returns></returns>
  522. public bool FindCross()
  523. {
  524. //16.自动调整SEM找到切割位置
  525. {
  526. //1.控制SEM放大到300倍
  527. if (!iSEM.SetMagnification(300))
  528. {
  529. return false;
  530. }
  531. //2.控制SEM自动对焦、亮度、对比度-接口
  532. if (!MeasParam.FocusMode)
  533. {
  534. //弹出手动对焦的窗口
  535. }
  536. else
  537. {
  538. //调用自动对焦模块
  539. }
  540. Thread.Sleep(5000);
  541. //3.控制SEM拍照
  542. String fileName4 = WorkingFolder + ImageName4;
  543. if (!GetImage(ImageMode.SEM, fileName4))
  544. {
  545. return false;
  546. }
  547. Thread.Sleep(3000);
  548. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  549. float x4 = 0, y4 = 0;
  550. float angle = 0;
  551. //5.根据坐标控制SEM移动到切孔位置,居中
  552. if (!iSEM.MoveStageXY(x4, y4))
  553. {
  554. return false;
  555. }
  556. if (!iSEM.SetScanRotation(angle))
  557. {
  558. return false;
  559. }
  560. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  561. //float x5 = iSEM.GetStageAtX();
  562. //float y5 = iSEM.GetStageAtY();
  563. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  564. //{
  565. // return false;
  566. //}
  567. }
  568. return true;
  569. }
  570. public bool CommonWork()
  571. {
  572. SendMsg("插入PT针");
  573. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  574. //if (firstHole.PT == true)
  575. {
  576. if (!InsertPT())
  577. {
  578. SendMsg("插入PT针失败");
  579. return false;
  580. }
  581. }
  582. //13. 自动 定位功能
  583. SendMsg("自动定位切割位置");
  584. if (!GetPoistion())
  585. {
  586. SendMsg("自动定位切割位置失败");
  587. return false;
  588. }
  589. //14.自动控制FIB切割
  590. SendMsg("FIB切割");
  591. if (!FIBCross())
  592. {
  593. SendMsg("FIB切割失败");
  594. return false;
  595. }
  596. //{
  597. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  598. // //2.控制FIB进行切割
  599. // //3.控制FIB拍照600X
  600. // //4.保存图片
  601. // {
  602. // //1.设置图片名称
  603. // //2.保存图片3
  604. // String fileName3 = WorkingFolder + ImageName3;
  605. // if (!GetImage(ImageMode.FIB, fileName3))
  606. // {
  607. // return false;
  608. // }
  609. // }
  610. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  611. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  612. //}
  613. //15.根据样品类型决定是否撤出PT针
  614. SendMsg("撤出PT针");
  615. //if (firstHole.PT == false)
  616. //{
  617. if (!RetractPT())
  618. {
  619. SendMsg("撤出PT针失败");
  620. return false;
  621. }
  622. //}
  623. // 16.找到切割位置
  624. SendMsg("找到切割位置");
  625. //17.自动控制SEM拍截面照
  626. SendMsg("观测层高");
  627. SendMsg("切换SEM控制");
  628. if (!iSEM.CmdFIBModeSEM())
  629. {
  630. SendMsg("SEM模式切换失败");
  631. return false;
  632. }
  633. Thread.Sleep(10000);
  634. SendMsg("放大6000倍");
  635. if (!iSEM.SetMagnification(6000))
  636. {
  637. SendMsg("放大倍数调整失败");
  638. return false;
  639. }
  640. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  641. {
  642. SendMsg("拍摄照片完成");
  643. //return true;
  644. }
  645. else
  646. {
  647. SendMsg("拍摄照片失败");
  648. return false;
  649. }
  650. SendMsg("图像校正36度");
  651. //3.设置SEM角度补偿cos36度
  652. if (!TiltCorrection(36))
  653. {
  654. return false;
  655. }
  656. Thread.Sleep(3000);
  657. string fn;
  658. //用宏抓一般图
  659. Thread.Sleep(5000);
  660. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  661. SendMsg("用宏抓一般图" + fn);
  662. iSEM.CMDMCFFilename(fn);
  663. //延时1s??
  664. Thread.Sleep(5000);
  665. //用宏抓好图
  666. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  667. SendMsg("用宏抓好图" + fn);
  668. iSEM.CMDMCFFilename(fn);
  669. //延时1s??
  670. Thread.Sleep(30000);
  671. Thread.Sleep(10000);
  672. WorkingFolder = m_measureFile.FilePath;
  673. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  674. SendMsg("SEM拍照存储到" + fileName6);
  675. if (!GetImage(ImageMode.SEM, fileName6))
  676. {
  677. SendMsg("SEM拍照失败");
  678. return false;
  679. }
  680. //用宏抓标志图
  681. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  682. SendMsg("用宏抓标志图" + fn);
  683. iSEM.CMDMCFFilename(fn);
  684. //延时1s??
  685. Thread.Sleep(30000);
  686. //恢复简单抓图
  687. Thread.Sleep(5000);
  688. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  689. SendMsg("用宏抓一般图" + fn);
  690. iSEM.CMDMCFFilename(fn);
  691. SendMsg("所有图结束");
  692. return true;
  693. }
  694. //第一个孔的测试过程
  695. public bool FirstHole()
  696. {
  697. MeasureData.CutHole firstHole = m_cutHoles[0];
  698. SendMsg("插入PT针");
  699. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  700. //if (firstHole.PT == true)
  701. {
  702. if (!InsertPT())
  703. {
  704. SendMsg("插入PT针失败");
  705. return false;
  706. }
  707. }
  708. //13. 自动 定位功能
  709. SendMsg("自动定位切割位置");
  710. if (!GetPoistion())
  711. {
  712. SendMsg("自动定位切割位置失败");
  713. return false;
  714. }
  715. //14.自动控制FIB切割
  716. SendMsg("FIB切割");
  717. if (!FIBCross())
  718. {
  719. SendMsg("FIB切割失败");
  720. return false;
  721. }
  722. //{
  723. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  724. // //2.控制FIB进行切割
  725. // //3.控制FIB拍照600X
  726. // //4.保存图片
  727. // {
  728. // //1.设置图片名称
  729. // //2.保存图片3
  730. // String fileName3 = WorkingFolder + ImageName3;
  731. // if (!GetImage(ImageMode.FIB, fileName3))
  732. // {
  733. // return false;
  734. // }
  735. // }
  736. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  737. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  738. //}
  739. //15.根据样品类型决定是否撤出PT针
  740. SendMsg("撤出PT针");
  741. //if (firstHole.PT == false)
  742. //{
  743. if (!RetractPT())
  744. {
  745. SendMsg("撤出PT针失败");
  746. return false;
  747. }
  748. //}
  749. // 16.找到切割位置
  750. SendMsg("找到切割位置");
  751. //17.自动控制SEM拍截面照
  752. SendMsg("观测层高");
  753. SendMsg("切换SEM控制");
  754. if (!iSEM.CmdFIBModeSEM())
  755. {
  756. SendMsg("SEM模式切换失败");
  757. return false;
  758. }
  759. Thread.Sleep(10000);
  760. SendMsg("放大6000倍");
  761. if (!iSEM.SetMagnification(6000))
  762. {
  763. SendMsg("放大倍数调整失败");
  764. return false;
  765. }
  766. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  767. {
  768. SendMsg("拍摄照片完成");
  769. //return true;
  770. }
  771. else
  772. {
  773. SendMsg("拍摄照片失败");
  774. return false;
  775. }
  776. SendMsg("图像校正36度");
  777. //3.设置SEM角度补偿cos36度
  778. if (!TiltCorrection(36))
  779. {
  780. return false;
  781. }
  782. Thread.Sleep(3000);
  783. string fn;
  784. //用宏抓一般图
  785. Thread.Sleep(5000);
  786. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  787. SendMsg("用宏抓一般图" + fn);
  788. iSEM.CMDMCFFilename(fn);
  789. //延时1s??
  790. Thread.Sleep(5000);
  791. //用宏抓好图
  792. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  793. SendMsg("用宏抓好图" + fn);
  794. iSEM.CMDMCFFilename(fn);
  795. //延时1s??
  796. Thread.Sleep(30000);
  797. Thread.Sleep(10000);
  798. WorkingFolder = m_measureFile.FilePath;
  799. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  800. SendMsg("SEM拍照存储到" + fileName6);
  801. if (!GetImage(ImageMode.SEM, fileName6))
  802. {
  803. SendMsg("SEM拍照失败");
  804. return false;
  805. }
  806. //用宏抓标志图
  807. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  808. SendMsg("用宏抓标志图" + fn);
  809. iSEM.CMDMCFFilename(fn);
  810. //延时1s??
  811. Thread.Sleep(30000);
  812. Thread.Sleep(5000);
  813. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  814. SendMsg("用宏抓一般图" + fn);
  815. iSEM.CMDMCFFilename(fn);
  816. //延时1s??
  817. Thread.Sleep(5000);
  818. SendMsg("所有图结束");
  819. ////17.自动控制SEM拍截面照
  820. //{
  821. // //1.控制SEM放大到指定参数大小范围,6000x
  822. // if (!iSEM.SetMagnification(6000))
  823. // {
  824. // return false;
  825. // }
  826. // //2.控制SEM自动对焦、消像散、亮度、对比度
  827. // if (!MeasParam.FocusMode)
  828. // {
  829. // //弹出手动对焦的窗口
  830. // }
  831. // else
  832. // {
  833. // //调用自动对焦模块
  834. // }
  835. // //3.设置SEM角度补偿cos36度
  836. // if (!TiltCorrection(36))
  837. // {
  838. // return false;
  839. // }
  840. // //4.控制SEM拍照
  841. // //5.保存照片4
  842. // String fileName5 = WorkingFolder + ImageName5;
  843. // if (!GetImage(ImageMode.SEM, fileName5))
  844. // {
  845. // return false;
  846. // }
  847. // //6.将照片传给客户,获取偏移坐标
  848. // float x6 = 0, y6 = 0;
  849. // float angle1 = 0;
  850. // float mage = 10000;
  851. // //7.根据坐标控制SEM移动到分析位置
  852. // if (!iSEM.MoveStageXY(x6, y6))
  853. // {
  854. // return false;
  855. // }
  856. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  857. // float x7 = iSEM.GetStageAtX();
  858. // float y7 = iSEM.GetStageAtY();
  859. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  860. // {
  861. // return false;
  862. // }
  863. // //9.控制SEM平行校正,并记录校正前初始值
  864. // float foldAnagle = iSEM.GetScanRotation();
  865. // if (foldAnagle == float.NaN)
  866. // {
  867. // return false;
  868. // }
  869. // if (!iSEM.SetScanRotation(angle1))
  870. // {
  871. // return false;
  872. // }
  873. // //10.控制SEM放大到指定参数大小范围
  874. // if (!iSEM.SetMagnification(mage))
  875. // {
  876. // return false;
  877. // }
  878. // //11.控制SEM自动对焦、消像散、亮度、对比度
  879. // if (!MeasParam.FocusMode)
  880. // {
  881. // //弹出手动对焦的窗口
  882. // }
  883. // else
  884. // {
  885. // //调用自动对焦模块
  886. // }
  887. // //12.控制SEM对分析位置拍照
  888. // String fileName6 = WorkingFolder + ImageName6;
  889. // if (!GetImage(ImageMode.SEM, fileName6))
  890. // {
  891. // return false;
  892. // }
  893. // //13.保存照片
  894. // //14.控制SEM取消电子束校正,回到初始值
  895. // if (!iSEM.SetScanRotation(foldAnagle))
  896. // {
  897. // return false;
  898. // }
  899. //}
  900. ////18.自动层高分析
  901. //{
  902. // //1.获取SEM Pixel Size给客户传入参数
  903. // if (iSEM.GetPixelSize() == float.NaN)
  904. // {
  905. // return false;
  906. // }
  907. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  908. //}
  909. ////19.自动能谱分析
  910. //{
  911. // //1. 确定能谱位置
  912. // //2. 控制牛津打能谱
  913. // //3. 能谱分析——面扫+线扫描
  914. //}
  915. return true;
  916. }
  917. //非第一个孔的测试过程
  918. public void OtherHole()
  919. {
  920. //for (int i = 1; i < m_cutHoles.Count; i++)
  921. //{
  922. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  923. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  924. //1. 初始化
  925. {
  926. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  927. //读取图像冻结状态
  928. float ffrozen = iSEM.GetImageFrozen();
  929. if (ffrozen == float.NaN)
  930. {
  931. return;
  932. }
  933. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  934. {
  935. SendMsg("样品台恢复到水平");
  936. //return true;
  937. }
  938. else
  939. {
  940. SendMsg("禁止样品台恢复到水平");
  941. return;
  942. }
  943. //2. 调节样品1号孔的样品台6轴坐标
  944. //3. 将样品1号孔坐标2存入数据库
  945. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  946. if (!iSEM.SetStageGotoT(0))
  947. {
  948. return;
  949. }
  950. while (true)
  951. {
  952. Thread.Sleep(10000);
  953. if (iSEM.GetStageIs() == 0)
  954. {
  955. break;
  956. }
  957. }
  958. //5. 获取光镜2号孔XY坐标
  959. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  960. //6. 根据光镜坐标控制样品台移动
  961. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  962. {
  963. SendMsg("移动失败");
  964. }
  965. while (true)
  966. {
  967. Thread.Sleep(10000);
  968. if (iSEM.GetStageIs() == 0)
  969. {
  970. break;
  971. }
  972. }
  973. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  974. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  975. {
  976. SendMsg("样品台旋转");
  977. //return true;
  978. }
  979. else
  980. {
  981. SendMsg("禁止样品台旋转");
  982. return;
  983. }
  984. if (!iSEM.SetStageGotoT(54))
  985. {
  986. return;
  987. }
  988. while (true)
  989. {
  990. Thread.Sleep(10000);
  991. if (iSEM.GetStageIs() == 0)
  992. {
  993. break;
  994. }
  995. }
  996. }
  997. SendMsg("拉直操作");
  998. SendMsg("其他操作与1号孔操作一致");
  999. if (!CommonWork())
  1000. {
  1001. return;
  1002. }
  1003. //2. 定位切割
  1004. {
  1005. //1. 拉直操作
  1006. {
  1007. //1.1 控制SEM进行拍照
  1008. //1.2 图片传给客户,返回偏移角度
  1009. //1.3 根据返回角度,控制样品台转动
  1010. }
  1011. //2. 与1号孔13步相同
  1012. }
  1013. //3. 以后步骤与1号孔以后步骤一致
  1014. //}
  1015. }
  1016. //角度补偿
  1017. public bool TiltCorrection(float a_fAngle)
  1018. {
  1019. //记录原来电镜的状态
  1020. // bool bTilt = false;
  1021. //float fOldTilt = iSEM.GetTiltCorrection();
  1022. //if (fOldTilt == float.NaN)
  1023. //{
  1024. // return false;
  1025. //}
  1026. //else if (fOldTilt == 1)
  1027. //{
  1028. // bTilt = true;
  1029. //}
  1030. //else if (fOldTilt == 0)
  1031. //{
  1032. // bTilt = false;
  1033. //}
  1034. //float fOldAngle = iSEM.GetTiltAngle();
  1035. //if (fOldAngle == float.NaN)
  1036. //{
  1037. // return false;
  1038. //}
  1039. //开启校正
  1040. SendMsg("开启校正");
  1041. if (!iSEM.SetTiltAngleOn())
  1042. {
  1043. return false;
  1044. }
  1045. //设置校正角度
  1046. //if (!iSEM.SetTiltAngle(fOldAngle))
  1047. //{
  1048. // return false;
  1049. //}
  1050. //恢复原始状态
  1051. SendMsg("校正角度"+ a_fAngle.ToString());
  1052. if (!iSEM.SetTiltAngle(a_fAngle))
  1053. {
  1054. return false;
  1055. }
  1056. //if (bTilt)
  1057. //{
  1058. // if (!iSEM.SetTiltCorrectionOn())
  1059. // {
  1060. // return false;
  1061. // }
  1062. //}
  1063. //else
  1064. //{
  1065. // if (!iSEM.SetTiltCorrectionOff())
  1066. // {
  1067. // return false;
  1068. // }
  1069. //}
  1070. return true;
  1071. }
  1072. //拍图
  1073. public bool GetImage(ImageMode a_mode, String a_fileName)
  1074. {
  1075. //1. 图像解冻
  1076. float foldFrozen = iSEM.GetImageFrozen();
  1077. if (foldFrozen == float.NaN)
  1078. {
  1079. return false;
  1080. }
  1081. if (!iSEM.ImageLive())
  1082. {
  1083. return false;
  1084. }
  1085. //2. 确认图像模式
  1086. if (ImageMode.SEM == a_mode)
  1087. {
  1088. if (!iSEM.CmdFIBModeSEM())
  1089. {
  1090. return false;
  1091. }
  1092. }
  1093. else if (ImageMode.FIB == a_mode)
  1094. {
  1095. if (!iSEM.CmdFIBModeFIB())
  1096. {
  1097. return false;
  1098. }
  1099. }
  1100. else
  1101. {
  1102. return false;
  1103. }
  1104. //3. 获取分辨率
  1105. int[] ImageSize = iSEM.GetImageStore();
  1106. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1107. {
  1108. return false;
  1109. }
  1110. short width = (short)ImageSize[0];
  1111. short height = (short)ImageSize[1];
  1112. //4. 抓图
  1113. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1114. {
  1115. return false;
  1116. }
  1117. //5. 恢复初始状态
  1118. if (foldFrozen == 0)
  1119. {
  1120. if (!iSEM.ImageLive())
  1121. {
  1122. return false;
  1123. }
  1124. }
  1125. else if (foldFrozen == 1)
  1126. {
  1127. if (!iSEM.ImageFrozen())
  1128. {
  1129. return false;
  1130. }
  1131. }
  1132. return true;
  1133. }
  1134. }
  1135. }