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- //时间:20200610
- //作者:郝爽
- //功能:测量线程
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using SmartSEMControl;
- using MeasureData;
- namespace MeasureThread
- {
- public enum ImageMode
- {
- FIB,
- SEM
- }
- //层间通讯数据包
- public struct ST_MSTMsg
- {
- //线程状态
- public struct STMThreadStatus
- {
- public int iMThreadStatus;
- public string cMsrStartTime;
- public string cMsrEndTime;
- };
- //切孔状态
- public struct STMSampleStatus
- {
- public int iMeasureSampleStatus;
- public string cSampleName;
- };
- public STMThreadStatus STMThreadStu;
- public STMSampleStatus STMSampleStu;
- };
- public class Measure
- {
- public delegate void ProgressEventHandler(ST_MSTMsg msg);
- public event ProgressEventHandler ProgressEvent;
- //全局只有一个fatorySEM
- static FactoryHardware factorySEM = FactoryHardware.Instance;
- ISEMControl iSEM = factorySEM.ISEM;
- const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
- const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
- const String ImageName3 = @"ImageFIB600X2.tif";
- const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
- const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
- const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
- const float fMin = (float)0.0000002; //单位是米
- //测量文件
- private MeasureFile m_measureFile;
- public MeasureFile MeasureFile
- {
- get { return this.m_measureFile; }
- set { this.m_measureFile = value; }
- }
- //测量的切割孔
- private List<MeasureData.CutHole> m_cutHoles;
- public List<MeasureData.CutHole> cutHoles
- {
- get { return this.m_cutHoles; }
- set { this.m_cutHoles = value; }
- }
- //工作文件夹
- private string m_WorkingFolder;
- public string WorkingFolder
- {
- get { return this.m_WorkingFolder; }
- set { this.m_WorkingFolder = value; }
- }
- //线程状态
- private ThreadStatus m_ThreadStatus;
- public ThreadStatus TStatus
- {
- get { return this.m_ThreadStatus; }
- set { this.m_ThreadStatus = value; }
- }
- //测量参数
- private MeasureParam m_MsParam;
- public MeasureParam MeasParam
- {
- get { return this.m_MsParam; }
- set { this.m_MsParam = value; }
- }
- //构造函数
- public Measure()
- {
- Init();
- }
- private void Init()
- {
- MeasParam = new MeasureParam();
- TStatus = new ThreadStatus();
- cutHoles = new List<MeasureData.CutHole>();
- }
- //初始化测量业务, 读测量文件,判断是否有可测试的切孔
- public bool InitMeas(MeasureFile a_measureFile)
- {
- m_measureFile = a_measureFile;
- List<CutHole> listHoles = m_measureFile.ListCutHole;
- foreach (CutHole h in listHoles )
- {
- if (h.SWITCH == true)
- {
- m_cutHoles.Add(h);
- }
- }
- if(m_cutHoles.Count == 0)
- return false;
- this.m_MsParam = m_measureFile.MParam;
- return true;
- }
- //测量流程
- public void DoMeasure()
- {
- //创建线程的测量状态的更新
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
- //将这个开始时间传递给主界面
- //检查硬件连接是否正常
- if (!ConnectHardware())
- {
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
- return;
- }
- //设置工作文件夹
- if (!SetWorkingFolderStr())
- {
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
- return;
- }
- float[] firstPosition;
- for (int i = 0; i < m_cutHoles.Count; i++)
- {
- if (i == 0)
- {
- firstPosition = iSEM.GetStagePosition();
- }
- else
- {
- }
- }
- //第一个孔的测试
- FirstHole();
- //非第一个孔的测试
- OtherHole();
- }
- //检查硬件连接是否正常
- public bool ConnectHardware()
- {
- //返回硬件的连接状态
- return iSEM.ConnectStatus();
- }
- //设置工作文件夹
- public bool SetWorkingFolderStr()
- {
- //获取工作文件路径
- string pathName = m_measureFile.FilePath;
- //判断工作文件路径是否为空或无效
- if (string.IsNullOrEmpty(pathName))
- {
- return false;
- }
- //文件未保存
- else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
- {
- return false;
- }
- //获取工作文件所在文件夹
- string folder = System.IO.Path.GetDirectoryName(pathName);
- if (string.IsNullOrEmpty(folder))
- {
- return false;
- }
- WorkingFolder += @"\\";
- return false;
- }
- //第一个孔的测试过程
- public bool FirstHole()
- {
- MeasureData.CutHole firstHole = m_cutHoles[0];
- //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
- //if (firstHole.PT == true)
- //{
- // if (!iSEM.InsertPT())
- // {
- // return false;
- // }
- //}
- //13.自动定位切割
- {
- //1.控制SEM放大600X
- if (!iSEM.SetMagnification(600))
- {
- return false;
- }
- //2.控制SEM自动对焦、亮度、对比度
- if (!MeasParam.FocusMode)
- {
- //弹出手动对焦的窗口
- }
- else
- {
- //调用自动对焦模块
- }
- //3.设置SEM进行角度补偿54度
- if (!TiltCorrection(54))
- {
- return false;
- }
- //4.控制SEM拍照
- //5.保存照片
- {
- //1. 创建目录,已经完成
- //2. 设置图片名称
- //3. 保存图片1
- String fileName1 = WorkingFolder + ImageName1;
- if (!GetImage(ImageMode.SEM, fileName1))
- {
- return false;
- }
- }
- //6.设置FIB拍照参数——扫描时间、束流等
- //7.控制FIB自动亮度、对比度
- //8.控制FIB拍照
- //9.保存照片
- {
- //1. 设置图片名称
- //2. 保存图片2
- String fileName2 = WorkingFolder + ImageName2;
- if (!GetImage(ImageMode.FIB, fileName2))
- {
- return false;
- }
- }
- //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
-
- //11.自动工具样品类型参数确定是否需要PT沉积
- {
- //1. 根据客户PT沉积坐标控制FIB调整到中心位置
- //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
- //3. 根据坐标进行PT沉积
- }
- //模拟为客户返回的坐标值
- float x0 = 0, y0 = 0;
- //12.根据梯形坐标控制FIB调整到中心位置
- if (!iSEM.MoveStageXY(x0, y0))
- {
- return false;
- }
- //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
- float x1 = iSEM.GetStageAtX();
- float y1 = iSEM.GetStageAtY();
- if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
- {
- return false;
- }
- //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
- float[] firstPosition = iSEM.GetStagePosition();
- }
- //14.自动控制FIB切割
- {
- //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
- //2.控制FIB进行切割
- //3.控制FIB拍照600X
- //4.保存图片
- {
- //1.设置图片名称
- //2.保存图片3
- String fileName3 = WorkingFolder + ImageName3;
- if (!GetImage(ImageMode.FIB, fileName3))
- {
- return false;
- }
- }
- //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
- //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
- }
- //15.根据样品类型决定是否撤出PT针
- //if (firstHole.PT == false)
- //{
- // if (!iSEM.OutputPT())
- // {
- // return false;
- // }
- //}
- //16.自动调整SEM找到切割位置
- {
- //1.控制SEM放大到300倍
- if (!iSEM.SetMagnification(300))
- {
- return false;
- }
- //2.控制SEM自动对焦、亮度、对比度-接口
- if (!MeasParam.FocusMode)
- {
- //弹出手动对焦的窗口
- }
- else
- {
- //调用自动对焦模块
- }
- //3.控制SEM拍照
- String fileName4 = WorkingFolder + ImageName4;
- if (!GetImage(ImageMode.SEM, fileName4))
- {
- return false;
- }
- //4.将照片传给客户,获取偏移坐标,以及偏移角度
- float x4 = 0, y4 = 0;
- float angle = 0;
- //5.根据坐标控制SEM移动到切孔位置,居中
- if (!iSEM.MoveStageXY(x4, y4))
- {
- return false;
- }
- if (!iSEM.SetScanRotation(angle))
- {
- return false;
- }
- //6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
- float x5 = iSEM.GetStageAtX();
- float y5 = iSEM.GetStageAtY();
- if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
- {
- return false;
- }
- }
- //17.自动控制SEM拍截面照
- {
- //1.控制SEM放大到指定参数大小范围,6000x
- if (!iSEM.SetMagnification(6000))
- {
- return false;
- }
- //2.控制SEM自动对焦、消像散、亮度、对比度
- if (!MeasParam.FocusMode)
- {
- //弹出手动对焦的窗口
- }
- else
- {
- //调用自动对焦模块
- }
- //3.设置SEM角度补偿cos36度
- if (!TiltCorrection(36))
- {
- return false;
- }
- //4.控制SEM拍照
- //5.保存照片4
- String fileName5 = WorkingFolder + ImageName5;
- if (!GetImage(ImageMode.SEM, fileName5))
- {
- return false;
- }
- //6.将照片传给客户,获取偏移坐标
- float x6 = 0, y6 = 0;
- float angle1 = 0;
- float mage = 10000;
- //7.根据坐标控制SEM移动到分析位置
- if (!iSEM.MoveStageXY(x6, y6))
- {
- return false;
- }
- //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
- float x7 = iSEM.GetStageAtX();
- float y7 = iSEM.GetStageAtY();
- if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
- {
- return false;
- }
- //9.控制SEM平行校正,并记录校正前初始值
- float foldAnagle = iSEM.GetScanRotation();
- if (foldAnagle == float.NaN)
- {
- return false;
- }
- if (!iSEM.SetScanRotation(angle1))
- {
- return false;
- }
- //10.控制SEM放大到指定参数大小范围
- if (!iSEM.SetMagnification(mage))
- {
- return false;
- }
- //11.控制SEM自动对焦、消像散、亮度、对比度
- if (!MeasParam.FocusMode)
- {
- //弹出手动对焦的窗口
- }
- else
- {
- //调用自动对焦模块
- }
- //12.控制SEM对分析位置拍照
- String fileName6 = WorkingFolder + ImageName6;
- if (!GetImage(ImageMode.SEM, fileName6))
- {
- return false;
- }
- //13.保存照片
- //14.控制SEM取消电子束校正,回到初始值
- if (!iSEM.SetScanRotation(foldAnagle))
- {
- return false;
- }
- }
- //18.自动层高分析
- {
- //1.获取SEM Pixel Size给客户传入参数
- if (iSEM.GetPixelSize() == float.NaN)
- {
- return false;
- }
- //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
- }
- //19.自动能谱分析
- {
- //1. 确定能谱位置
- //2. 控制牛津打能谱
- //3. 能谱分析——面扫+线扫描
- }
- return true;
- }
- //非第一个孔的测试过程
- public void OtherHole()
- {
- for (int i = 1; i < m_cutHoles.Count; i++)
- {
- CutHole currentHole = m_cutHoles[i];
- //1. 初始化
- {
- //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
- //读取图像冻结状态
- float ffrozen = iSEM.GetImageFrozen();
- if (ffrozen == float.NaN)
- {
- return;
- }
- //2. 调节样品1号孔的样品台6轴坐标
- //3. 将样品1号孔坐标2存入数据库
- //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
- if (!iSEM.SetStageGotoT(0))
- {
- return;
- }
- //5. 获取光镜2号孔XY坐标
- //6. 根据光镜坐标控制样品台移动
- //7. 控制样品台,调整T轴54度、M/Z/R轴不变
- }
- //2. 定位切割
- {
- //1. 拉直操作
- {
- //1.1 控制SEM进行拍照
- //1.2 图片传给客户,返回偏移角度
- //1.3 根据返回角度,控制样品台转动
- }
- //2. 与1号孔13步相同
- }
- //3. 以后步骤与1号孔以后步骤一致
- }
- }
- //角度补偿
- public bool TiltCorrection(float a_fAngle)
- {
- //记录原来电镜的状态
- bool bTilt = false;
- float fOldTilt = iSEM.GetTiltCorrection();
- if (fOldTilt == float.NaN)
- {
- return false;
- }
- else if (fOldTilt == 1)
- {
- bTilt = true;
- }
- else if (fOldTilt == 0)
- {
- bTilt = false;
- }
- float fOldAngle = iSEM.GetTiltAngle();
- if (fOldAngle == float.NaN)
- {
- return false;
- }
- //开启校正
- if (!iSEM.SetTiltCorrectionOn())
- {
- return false;
- }
- //设置校正角度
- if (!iSEM.SetTiltAngle(fOldAngle))
- {
- return false;
- }
- //恢复原始状态
- if (!iSEM.SetTiltAngle(a_fAngle))
- {
- return false;
- }
- if (bTilt)
- {
- if (!iSEM.SetTiltCorrectionOn())
- {
- return false;
- }
- }
- else
- {
- if (!iSEM.SetTiltCorrectionOff())
- {
- return false;
- }
- }
- return true;
- }
- //拍图
- public bool GetImage(ImageMode a_mode, String a_fileName)
- {
- //1. 图像解冻
- float foldFrozen = iSEM.GetImageFrozen();
- if (foldFrozen == float.NaN)
- {
- return false;
- }
- if (!iSEM.ImageLive())
- {
- return false;
- }
- //2. 确认图像模式
- if (ImageMode.SEM == a_mode)
- {
- if (!iSEM.CmdFIBModeSEM())
- {
- return false;
- }
- }
- else if (ImageMode.FIB == a_mode)
- {
- if (!iSEM.CmdFIBModeFIB())
- {
- return false;
- }
- }
- else
- {
- return false;
- }
- //3. 获取分辨率
- int[] ImageSize = iSEM.GetImageStore();
- if (ImageSize[0] == 0 || ImageSize[1] == 0)
- {
- return false;
- }
- short width = (short)ImageSize[0];
- short height = (short)ImageSize[1];
- //4. 抓图
- if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
- {
- return false;
- }
- //5. 恢复初始状态
- if (foldFrozen == 0)
- {
- if (!iSEM.ImageLive())
- {
- return false;
- }
- }
- else if (foldFrozen == 1)
- {
- if (!iSEM.ImageFrozen())
- {
- return false;
- }
- }
- return true;
- }
- }
- }
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