Measure.cs 277 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. using HOZProject.Helpers;
  23. namespace MeasureThread
  24. {
  25. #region 信息定义
  26. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  27. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  28. //测量线程状态
  29. public class ThreadStatusEventArgs
  30. {
  31. //状态
  32. public Boolean State
  33. {
  34. get { return m_state; }
  35. set { m_state = value; }
  36. }
  37. private Boolean m_state;
  38. //时间
  39. public DateTime Time
  40. {
  41. get { return m_time; }
  42. set { m_time = value; }
  43. }
  44. private DateTime m_time;
  45. //步骤代码
  46. public String Step_Code
  47. {
  48. get { return step_Code; }
  49. set { step_Code = value; }
  50. }
  51. private String step_Code;
  52. //其他消息
  53. public String Message
  54. {
  55. get { return this.message; }
  56. set { this.message = value; }
  57. }
  58. private String message;
  59. //孔名
  60. public String HoleName
  61. {
  62. get { return this.holeName; }
  63. set { this.holeName = value; }
  64. }
  65. private String holeName;
  66. //图片信息
  67. public class PictureInformation
  68. {
  69. public String Picture_FullPath
  70. {
  71. get { return picture_FullPath; }
  72. set { picture_FullPath = value; }
  73. }
  74. private String picture_FullPath;
  75. public double Work_Voltage
  76. {
  77. get { return work_Voltage; }
  78. set { work_Voltage = value; }
  79. }
  80. private double work_Voltage;
  81. public double Magnification
  82. {
  83. get { return magnification; }
  84. set { magnification = value; }
  85. }
  86. private double magnification;
  87. public double Work_Distance
  88. {
  89. get { return work_Distance; }
  90. set { work_Distance = value; }
  91. }
  92. private double work_Distance;
  93. public String Work_Status
  94. {
  95. get { return work_Status; }
  96. set { work_Status = value; }
  97. }
  98. private String work_Status;
  99. }
  100. //图片信息实例类
  101. public PictureInformation Picture_Information
  102. {
  103. get { return picture_Information; }
  104. set { picture_Information = value; }
  105. }
  106. private PictureInformation picture_Information;
  107. //图像处理信息
  108. public class ImageInformation
  109. {
  110. public int Method_Name
  111. {
  112. get { return method_Name; }
  113. set { method_Name = value; }
  114. }
  115. private int method_Name;
  116. public Source_Img_Degree_Direction SIDD;
  117. public Cut_Position CP;
  118. public Cut_Success CS;
  119. public Trapezoid_Top_Center_Position TTCP;
  120. public Auto_Foucs AF;
  121. public Auto_Stigmatic AS;
  122. public Center_Position_OffsetAngle_Direction CPOD;
  123. public Measure_Size MS;
  124. public ImageInformation()
  125. {
  126. SIDD = new Source_Img_Degree_Direction();
  127. CP = new Cut_Position();
  128. CS = new Cut_Success();
  129. TTCP = new Trapezoid_Top_Center_Position();
  130. AF = new Auto_Foucs();
  131. AS = new Auto_Stigmatic();
  132. CPOD = new Center_Position_OffsetAngle_Direction();
  133. MS = new Measure_Size();
  134. }
  135. //1-计算原始图像偏移角度及方向
  136. public class Source_Img_Degree_Direction
  137. {
  138. public Boolean Is_Image = false;
  139. public double Degree
  140. {
  141. get { return degree; }
  142. set { degree = value; }
  143. }
  144. private double degree;
  145. public int Direction
  146. {
  147. get { return direction; }
  148. set { direction = value; }
  149. }
  150. private int direction;
  151. public int State
  152. {
  153. get { return state; }
  154. set { state = value; }
  155. }
  156. private int state;
  157. }
  158. //2-计算切割点位置
  159. public class Cut_Position
  160. {
  161. public Boolean Is_Image = false;
  162. public double Offsetx
  163. {
  164. get { return offsetx; }
  165. set { offsetx = value; }
  166. }
  167. private double offsetx;
  168. public double Offsety
  169. {
  170. get { return offsety; }
  171. set { offsety = value; }
  172. }
  173. private double offsety;
  174. public int State
  175. {
  176. get { return state; }
  177. set { state = value; }
  178. }
  179. private int state;
  180. }
  181. //3-是否切割成功
  182. public class Cut_Success
  183. {
  184. public Boolean Is_Image = false;
  185. public int State
  186. {
  187. get { return state; }
  188. set { state = value; }
  189. }
  190. private int state;
  191. }
  192. //4-计算切割后图像梯形区域上边中心点坐标
  193. public class Trapezoid_Top_Center_Position
  194. {
  195. public Boolean Is_Image = false;
  196. public double TopCenterX
  197. {
  198. get { return topCenterX; }
  199. set { topCenterX = value; }
  200. }
  201. private double topCenterX;
  202. public double TopCenterY
  203. {
  204. get { return topCenterY; }
  205. set { topCenterY = value; }
  206. }
  207. private double topCenterY;
  208. public int State
  209. {
  210. get { return state; }
  211. set { state = value; }
  212. }
  213. private int state;
  214. }
  215. //5-自动对焦
  216. public class Auto_Foucs
  217. {
  218. public Boolean Is_Image = true;
  219. public String Img_Path
  220. {
  221. get { return img_Path; }
  222. set { img_Path = value; }
  223. }
  224. private String img_Path;
  225. }
  226. //6-自动像闪
  227. public class Auto_Stigmatic
  228. {
  229. public Boolean Is_Image = true;
  230. public String Img_Path
  231. {
  232. get { return img_Path; }
  233. set { img_Path = value; }
  234. }
  235. private String img_Path;
  236. }
  237. //7-计算切割面区域中心坐标,以及偏移角度及方向
  238. public class Center_Position_OffsetAngle_Direction
  239. {
  240. public Boolean Is_Image = false;
  241. public double CenterX
  242. {
  243. get { return centerX; }
  244. set { centerX = value; }
  245. }
  246. private double centerX;
  247. public double CenterY
  248. {
  249. get { return centerY; }
  250. set { centerY = value; }
  251. }
  252. private double centerY;
  253. public double Degree
  254. {
  255. get { return degree; }
  256. set { degree = value; }
  257. }
  258. private double degree;
  259. public int Direction
  260. {
  261. get { return direction; }
  262. set { direction = value; }
  263. }
  264. private int direction;
  265. public int State
  266. {
  267. get { return state; }
  268. set { state = value; }
  269. }
  270. private int state;
  271. }
  272. //8-测量尺寸
  273. public class Measure_Size
  274. {
  275. public Boolean Is_Image = false;
  276. public int State
  277. {
  278. get { return state; }
  279. set { state = value; }
  280. }
  281. private int state;
  282. }
  283. }
  284. //图像处理信息实例类
  285. public ImageInformation Image_Information
  286. {
  287. get { return image_Information; }
  288. set { image_Information = value; }
  289. }
  290. private ImageInformation image_Information;
  291. public ThreadStatusEventArgs(string a_State)
  292. {
  293. picture_Information = new PictureInformation();
  294. image_Information = new ImageInformation();
  295. }
  296. }
  297. //切孔状态
  298. public class CutHolesStatusEventArgs
  299. {
  300. public string State
  301. {
  302. get { return m_state; }
  303. set { m_state = value; }
  304. }
  305. private string m_state;
  306. public string HoleName
  307. {
  308. get { return m_holeName; }
  309. set { m_holeName = value; }
  310. }
  311. private string m_holeName;
  312. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  313. {
  314. this.m_state = a_state;
  315. this.m_holeName = a_holeName;
  316. }
  317. }
  318. #endregion
  319. public class Measure
  320. {
  321. #region 变量定义
  322. //Web接口类
  323. public WebResult wr = null;
  324. //SmartSEM远程路径
  325. public String RemoteELYPath = "";
  326. public String RemoteMLFPath = "";
  327. //扫描周期
  328. private float cycle_time = 0;
  329. //人工干预
  330. public int hand_intervene = 2;
  331. //样品台保护值
  332. public float X_Min = 0;
  333. public float X_Max = 0.13f;
  334. public float Y_Min = 0;
  335. public float Y_Max = 0.13f;
  336. public float Z_Min = 0;
  337. public float Z_Max = 0.05f;
  338. public float T_Min = -4;
  339. public float T_Max = 70;
  340. public float R_Min = -380;
  341. public float R_Max = 380;
  342. public float M_Min = 0;
  343. public float M_Max = 0.012f;
  344. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  345. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  346. //定义一个全局的消息类
  347. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  348. //全局只有一个fatorySEM
  349. static FactoryHardware factorySEM = FactoryHardware.Instance;
  350. ISEMControl iSEM = factorySEM.ISEM;
  351. //@的作用是不用转义字符\\只打一个就行
  352. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  354. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  355. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  356. const String ImageName31 = @"FIBBefore.tif";
  357. const String ImageName32 = @"FIBAfter.tif";
  358. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  359. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  360. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  361. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  362. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  364. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  365. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  366. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  367. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  368. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  369. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  370. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  371. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  372. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  373. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  374. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  375. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  376. const String ElyDeposition = @"Deposition.ely"; //沉积
  377. const String ElyCrossSection = @"CrossSection.ely"; //切割
  378. const float fMin = (float)0.0000002; //单位是米
  379. const float fSateyZ = (float)0.03;//单位是米
  380. public Boolean key_stop = false;
  381. String focus_path = "";
  382. String FIBfocus_path = "";
  383. String StigX_path = "";
  384. String StigY_path = "";
  385. String EDS_path = "";
  386. String data_path = "";
  387. int m_nWorkHoleNo = -1;
  388. //测量文件
  389. private MeasureFile m_measureFile;
  390. public MeasureFile MeasureFile
  391. {
  392. get { return this.m_measureFile; }
  393. set { this.m_measureFile = value; }
  394. }
  395. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  396. private List<MeasureData.CutHole> m_cutHoles;
  397. public List<MeasureData.CutHole> cutHoles
  398. {
  399. get { return this.m_cutHoles; }
  400. set { this.m_cutHoles = value; }
  401. }
  402. //工作文件夹
  403. private string m_WorkingFolder;
  404. public string WorkingFolder
  405. {
  406. get { return this.m_WorkingFolder; }
  407. set { this.m_WorkingFolder = value; }
  408. }
  409. //程序当前路径
  410. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  411. //线程状态
  412. private ThreadStatus m_ThreadStatus;
  413. public ThreadStatus TStatus
  414. {
  415. get { return this.m_ThreadStatus; }
  416. set { this.m_ThreadStatus = value; }
  417. }
  418. #endregion
  419. //构造函数
  420. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  421. {
  422. LogManager.AddHardwareLog("进入构造函数", true);
  423. TStatus = new ThreadStatus();
  424. cutHoles = new List<MeasureData.CutHole>();
  425. //配置远程连接
  426. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  427. }
  428. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  429. public bool InitMeas(MeasureFile a_measureFile)
  430. {
  431. LogManager.AddHardwareLog("进入初始化函数", true);
  432. m_measureFile = a_measureFile;
  433. List<CutHole> listHoles = m_measureFile.ListCutHole;
  434. foreach (CutHole h in listHoles)
  435. {
  436. if (h.SWITCH == true)
  437. {
  438. m_cutHoles.Add(h);
  439. }
  440. }
  441. if (m_cutHoles.Count == 0)
  442. return false;
  443. if (m_measureFile.MParam.EDS == true)
  444. {
  445. LogManager.AddHardwareLog("能谱分析", true);
  446. Init_MeasDB();
  447. }
  448. return true;
  449. }
  450. //给前台UI发送消息步骤
  451. public void SendMsg(string step_code)
  452. {
  453. arg.Step_Code = step_code;
  454. arg.Time = DateTime.Now;
  455. SendThreadStatus(this, arg);
  456. }
  457. //给前台UI发送孔状态信息
  458. public void SendCutHoleMsg(string a_state, string a_holeName)
  459. {
  460. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  461. arg.HoleName = a_holeName;
  462. arg.State = a_state;
  463. SendCutHolesStatus(this, arg);
  464. }
  465. //测量流程
  466. public void DoMeasure()
  467. {
  468. //创建线程的测量状态的更新
  469. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  470. LogManager.AddHardwareLog("测量线程:开始测量",true);
  471. //检查硬件连接是否正常
  472. LogManager.AddHardwareLog("测量线程:连接硬件", true);
  473. if (!ConnectHardware())
  474. {
  475. MessageBox.Show("连接电镜失败!","重要错误",MessageBoxButtons.OK,MessageBoxIcon.Error);
  476. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  477. LogManager.AddHardwareLog("测量线程报错:连接硬件硬件连接失败", false);
  478. return;
  479. }
  480. //设置工作文件夹
  481. LogManager.AddHardwareLog("测量线程:设置工作文件夹", true);
  482. if (!SetWorkingFolderStr())
  483. {
  484. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  485. LogManager.AddHardwareLog("测量线程报错:设置文件夹失败", false);
  486. return;
  487. }
  488. //设置SmartSEM远程路径
  489. iSEM.SetRemoteELYPath(RemoteELYPath);
  490. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  491. //增加EDS控制
  492. //将停止键复位
  493. key_stop = false;
  494. //开始测量就将模式设置为SEM
  495. LogManager.AddHardwareLog("测量线程:切换到SEM模式", true);
  496. if (!iSEM.CmdFIBModeSEM())
  497. {
  498. LogManager.AddHardwareLog("测量线程报错:开始切换到SEM模式失败。", false);
  499. return;
  500. }
  501. arg.Picture_Information.Work_Status = "SEM";
  502. //设置扫描周期
  503. LogManager.AddHardwareLog("测量线程:设置图像扫描周期为对焦周期", true);
  504. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  505. Thread.Sleep(200);
  506. cycle_time = iSEM.GetCycleTime();
  507. if (cycle_time == 0)
  508. {
  509. LogManager.AddHardwareLog("测量线程报错:获取扫描周期时间失败", false);
  510. return;
  511. }
  512. Thread.Sleep((int)cycle_time +100);
  513. //开始做各个孔的检测
  514. for (int i = 0; i < m_cutHoles.Count; i++)
  515. {
  516. //自动亮度对比度
  517. LogManager.AddHardwareLog("测量线程:开启自动亮度,对比度调节", true);
  518. iSEM.SetAutoBright(100);
  519. Thread.Sleep(200);
  520. iSEM.SetAutoContrast(100);
  521. Thread.Sleep(200);
  522. //LogManager.AddHardwareLog("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  523. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  524. {
  525. LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  526. return;
  527. }
  528. Thread.Sleep(5000);
  529. LogManager.AddHardwareLog("测量线程:测试第"+i.ToString()+"个分析点。", true);
  530. //记录测量序号和孔名
  531. m_nWorkHoleNo = i;
  532. arg.HoleName = m_cutHoles[i].HoleName;
  533. //最终数据存放目录
  534. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  535. //对焦数据存放目录
  536. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  537. m_measureFile.MParam.AutoFocus.Path = focus_path;
  538. if (!Directory.Exists(focus_path))
  539. {
  540. Directory.CreateDirectory(focus_path);
  541. }
  542. //StigX数据存放目录
  543. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  544. m_measureFile.MParam.AutoStigX.Path = StigX_path;
  545. if (!Directory.Exists(StigX_path))
  546. {
  547. Directory.CreateDirectory(StigX_path);
  548. }
  549. //StigY数据存放目录
  550. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  551. m_measureFile.MParam.AutoStigY.Path = StigY_path;
  552. if (!Directory.Exists(StigY_path))
  553. {
  554. Directory.CreateDirectory(StigY_path);
  555. }
  556. //EDS数据存放路径
  557. if (m_measureFile.MParam.EDS == true)
  558. {
  559. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  560. m_measureFile.MParam.EDSP.Path = EDS_path;
  561. if (!Directory.Exists(EDS_path))
  562. {
  563. Directory.CreateDirectory(EDS_path);
  564. }
  565. }
  566. //判断孔状态
  567. if (m_cutHoles[i].STATE != State.Ready)
  568. {
  569. LogManager.AddHardwareLog("测试孔"+ m_cutHoles[i].HoleName+"状态非就绪,不予测量。", true);
  570. continue;
  571. }
  572. //20201127增加Scanrotate Off
  573. iSEM.SetScanRotationOff();
  574. Thread.Sleep(200);
  575. //20.光束等复位
  576. iSEM.SetBeamShiftX(0);
  577. Thread.Sleep(200);
  578. iSEM.SetBeamShiftY(0);
  579. Thread.Sleep(200);
  580. //开始循环工作
  581. if (i == 0)
  582. {
  583. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName+"开始测量。", true);
  584. m_cutHoles[i].START = DateTime.Now;
  585. //切孔操作-开始
  586. m_cutHoles[i].STATE = State.InProcess;
  587. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  588. LogManager.AddHardwareLog("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  589. + m_cutHoles[0].Position.X.ToString()+","
  590. + m_cutHoles[0].Position.Y.ToString()+","
  591. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  592. #region 坐标恢复
  593. //0、先移动Z轴到比较低的位置上。
  594. if (m_measureFile.MParam.Title)//如果是倾斜样品台,移动Z轴
  595. {
  596. if (!iSEM.SetStageGotoZ(fSateyZ))
  597. {
  598. arg.State = false;
  599. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  600. SendMsg("1-0");
  601. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  602. m_cutHoles[i].STATE = State.Failed;
  603. m_cutHoles[i].END = DateTime.Now;
  604. m_measureFile.Save();
  605. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  606. Thread.Sleep(3000);
  607. continue;
  608. }
  609. while (true)
  610. {
  611. Thread.Sleep(4000);
  612. if (iSEM.GetStageIs() == 0)
  613. {
  614. break;
  615. }
  616. }
  617. //判断是否停止进程
  618. if (key_stop)
  619. {
  620. m_cutHoles[i].STATE = State.Failed;
  621. m_cutHoles[i].END = DateTime.Now;
  622. m_measureFile.Save();
  623. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  624. LogManager.AddHardwareLog("停止键被按下", true);
  625. return;
  626. }
  627. }
  628. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  629. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  630. {
  631. arg.State = false;
  632. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  633. SendMsg("1-0");
  634. LogManager.AddHardwareLog("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  635. m_cutHoles[i].STATE = State.Failed;
  636. m_cutHoles[i].END = DateTime.Now;
  637. m_measureFile.Save();
  638. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  639. Thread.Sleep(3000);
  640. continue;
  641. }
  642. while (true)
  643. {
  644. Thread.Sleep(4000);
  645. if (iSEM.GetStageIs() == 0)
  646. {
  647. break;
  648. }
  649. }
  650. //判断是否停止进程
  651. if (key_stop)
  652. {
  653. m_cutHoles[i].STATE = State.Failed;
  654. m_cutHoles[i].END = DateTime.Now;
  655. m_measureFile.Save();
  656. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  657. LogManager.AddHardwareLog("停止键被按下", true);
  658. return;
  659. }
  660. //2、移动XY轴
  661. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  662. {
  663. arg.State = false;
  664. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  665. SendMsg("1-0");
  666. LogManager.AddHardwareLog("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  667. + m_cutHoles[0].Position.X.ToString() + ","
  668. + m_cutHoles[0].Position.Y.ToString()+ ")", false);
  669. m_cutHoles[i].STATE = State.Failed;
  670. m_cutHoles[i].END = DateTime.Now;
  671. m_measureFile.Save();
  672. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  673. Thread.Sleep(3000);
  674. continue;
  675. }
  676. while (true)
  677. {
  678. Thread.Sleep(4000);
  679. if (iSEM.GetStageIs() == 0)
  680. {
  681. break;
  682. }
  683. }
  684. //判断是否停止进程
  685. if (key_stop)
  686. {
  687. m_cutHoles[i].STATE = State.Failed;
  688. m_cutHoles[i].END = DateTime.Now;
  689. m_measureFile.Save();
  690. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  691. LogManager.AddHardwareLog("停止键被按下", true);
  692. return;
  693. }
  694. //3、恢复Z轴
  695. if (m_measureFile.MParam.Title)
  696. {
  697. //恢复Z轴
  698. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  699. {
  700. arg.State = false;
  701. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  702. SendMsg("1-0");
  703. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  704. m_cutHoles[i].STATE = State.Failed;
  705. m_cutHoles[i].END = DateTime.Now;
  706. m_measureFile.Save();
  707. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  708. Thread.Sleep(3000);
  709. continue;
  710. }
  711. while (true)
  712. {
  713. Thread.Sleep(4000);
  714. if (iSEM.GetStageIs() == 0)
  715. {
  716. break;
  717. }
  718. }
  719. //判断是否停止进程
  720. if (key_stop)
  721. {
  722. LogManager.AddHardwareLog("停止键按下。", true);
  723. m_cutHoles[i].STATE = State.Failed;
  724. m_cutHoles[i].END = DateTime.Now;
  725. m_measureFile.Save();
  726. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  727. return;
  728. }
  729. }
  730. arg.State = true;
  731. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  732. SendMsg("1-0");
  733. //4、设置WD
  734. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  735. Thread.Sleep(1000);
  736. #endregion
  737. //第一个点开始测量
  738. if (FirstHole())
  739. {
  740. //保存文件,将测量状态更改
  741. m_cutHoles[i].STATE = State.Success;
  742. m_cutHoles[i].END = DateTime.Now;
  743. m_measureFile.Save();
  744. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  745. }
  746. //失败
  747. else
  748. {
  749. m_cutHoles[i].STATE = State.Failed;
  750. m_cutHoles[i].END = DateTime.Now;
  751. m_measureFile.Save();
  752. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  753. }
  754. }
  755. else
  756. {
  757. //其他孔的测量
  758. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  759. m_cutHoles[i].START = DateTime.Now;
  760. m_cutHoles[i].STATE = State.InProcess;
  761. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  762. //其他孔测量之前的初始化
  763. if (!OtherHole_Init())
  764. {
  765. arg.State = false;
  766. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  767. SendMsg("1-0");
  768. Thread.Sleep(3000);
  769. LogManager.AddHardwareLog("测量线程:" + arg.Message, true);
  770. continue;
  771. }
  772. arg.State = true;
  773. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  774. SendMsg("1-0");
  775. //其他孔开始测量
  776. if (OtherHole())
  777. {
  778. //保存文件,将测量状态更改
  779. m_cutHoles[i].STATE = State.Success;
  780. m_cutHoles[i].END = DateTime.Now;
  781. m_measureFile.Save();
  782. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  783. }
  784. //失败
  785. else
  786. {
  787. m_cutHoles[i].STATE = State.Failed;
  788. m_cutHoles[i].END = DateTime.Now;
  789. m_measureFile.Save();
  790. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  791. }
  792. }
  793. if(key_stop)
  794. {
  795. m_cutHoles[i].END = DateTime.Now;
  796. m_cutHoles[i].STATE = State.Ready;
  797. m_measureFile.Save();
  798. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  799. arg.Message = "用户停止测量";
  800. SendMsg("0-0");
  801. break;
  802. }
  803. //两个点之间更换,加延时以便完成显示
  804. Thread.Sleep(3000);
  805. }
  806. }
  807. //检查硬件连接是否正常
  808. public bool ConnectHardware()
  809. {
  810. //返回硬件的连接状态
  811. return iSEM.ConnectStatus();
  812. }
  813. //设置工作文件夹
  814. public bool SetWorkingFolderStr()
  815. {
  816. WorkingFolder = m_measureFile.FilePath;
  817. return true;
  818. }
  819. //插入PT针
  820. public bool InsertPT()
  821. {
  822. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  823. //SendMsg("调用宏插入PT针宏文件" + fn);
  824. iSEM.CMDMCFFilename(fn);
  825. //延时1s??
  826. Thread.Sleep(1000);
  827. return true;
  828. }
  829. //撤出PT针
  830. public bool RetractPT()
  831. {
  832. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  833. //SendMsg("调用宏撤出PT针宏文件" + fn);
  834. iSEM.CMDMCFFilename(fn);
  835. //延时1s??
  836. Thread.Sleep(1000);
  837. return true;
  838. }
  839. //PT沉积
  840. public bool PTWork()
  841. {
  842. //执行PT沉积的ELY文件
  843. if (!ExcuteEly(m_measureFile.MParam.PTTemp))
  844. {
  845. return false;
  846. }
  847. //等待沉积完成
  848. while (true)
  849. {
  850. Thread.Sleep(7000);
  851. if (iSEM.GetFIBMode() == 0)
  852. {
  853. break;
  854. }
  855. }
  856. return true;
  857. }
  858. //FIB切割
  859. public bool FIBWork()
  860. {
  861. //执行PT沉积的ELY文件
  862. if (!ExcuteEly(m_measureFile.MParam.FIBTemp))
  863. {
  864. return false;
  865. }
  866. //等待切割完成
  867. while (true)
  868. {
  869. Thread.Sleep(10000);
  870. if (iSEM.GetFIBMode() == 0)
  871. {
  872. break;
  873. }
  874. }
  875. return true;
  876. }
  877. //执行ELY文件的步骤
  878. public bool ExcuteEly(string a_filename)
  879. {
  880. //执行ELy文件有三个动作
  881. //1. 选择ELY文件
  882. //SendMsg("选择ELY文件");
  883. if (!iSEM.CmdFIBLoadELY(a_filename))
  884. {
  885. //SendMsg("选择ELY文件失败");
  886. return false;
  887. }
  888. Thread.Sleep(1000);
  889. //2. 确认ELY文件
  890. //SendMsg("确认ELY文件");
  891. if (!iSEM.CmdFIBEXPOSUREELY())
  892. {
  893. //SendMsg("确认ELY文件失败");
  894. return false;
  895. }
  896. Thread.Sleep(1000);
  897. //3. 执行ELY文件
  898. //SendMsg("执行ELY文件");
  899. if (!iSEM.CmdFIBSTARTELY())
  900. {
  901. //SendMsg("执行ELY文件失败");
  902. return false;
  903. }
  904. Thread.Sleep(1000);
  905. return true;
  906. }
  907. /// <summary>
  908. ///13. 自动 定位功能,沉积
  909. /// </summary>
  910. /// <returns></returns>
  911. public bool GetPoistion()
  912. {
  913. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  914. int state = 1;
  915. LogManager.AddHardwareLog("测量线程:13.自动定位、沉积-功能自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString(), true);
  916. Thread.Sleep(200);
  917. //1.控制SEM放大600X
  918. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  919. {
  920. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  921. arg.State = false;
  922. SendMsg("1-6");
  923. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "控制失败", false);
  924. return false;
  925. }
  926. Thread.Sleep(200);
  927. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  928. {
  929. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  930. arg.State = false;
  931. SendMsg("1-6");
  932. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString() + "控制失败", false);
  933. return false;
  934. }
  935. float current = iSEM.GetMagnification();
  936. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  937. {
  938. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  939. Thread.Sleep(200);
  940. current = iSEM.GetMagnification();
  941. }
  942. arg.State = true;
  943. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  944. SendMsg("1-6");
  945. //判断是否停止进程
  946. if (key_stop)
  947. {
  948. LogManager.AddHardwareLog("停止键按下。", true);
  949. return false;
  950. }
  951. //判断是否为仅拍照,不是则执行FIB操作
  952. if (!m_measureFile.MParam.Is_Photograph)
  953. {
  954. LogManager.AddHardwareLog("测量线程:切换到FIB模式。", true);
  955. //6.设置FIB拍照参数——扫描时间、束流等
  956. //7.控制FIB自动亮度、对比度
  957. Thread.Sleep(200);
  958. if (!iSEM.CmdFIBModeFIB())
  959. {
  960. arg.Message = "FIB模式切换失败";
  961. arg.State = false;
  962. SendMsg("1-8");
  963. LogManager.AddHardwareLog("测量线程报错:切换到FIB模式失败。", false);
  964. return false;
  965. }
  966. arg.State = true;
  967. arg.Picture_Information.Work_Status = "FIB";
  968. arg.Message = "FIB模式切换成功";
  969. SendMsg("1-8");
  970. Thread.Sleep(1000);
  971. //判断是否停止进程
  972. if (key_stop)
  973. {
  974. LogManager.AddHardwareLog("停止键按下。", true);
  975. return false;
  976. }
  977. //8.控制FIB拍照
  978. //9.保存照片======更改路径
  979. //20201103,FIB使用定位的放大倍数
  980. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  981. arg.Picture_Information.Picture_FullPath = fileName2;
  982. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  983. Thread.Sleep(200);
  984. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  985. Thread.Sleep(200);
  986. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  987. Thread.Sleep(200);
  988. //FIB的放大位数,将来会改
  989. LogManager.AddHardwareLog("测量线程:设置FIB放大倍数"+ m_measureFile.MParam.Location_Magnification.ToString(), true);
  990. //20201103,FIB使用定位的放大倍数
  991. if (!iSEM.SetFIBMagnification(m_measureFile.MParam.Location_Magnification))
  992. {
  993. arg.Message = "FIB放大倍数设置失败";
  994. arg.State = false;
  995. SendMsg("1-9");
  996. LogManager.AddHardwareLog("测量线程失败:FIB放大倍数设置失败。", false);
  997. return false;
  998. }
  999. arg.Message = "FIB放大倍数设置成功";
  1000. arg.State = true;
  1001. SendMsg("1-9");
  1002. Thread.Sleep(200);
  1003. //判断是否停止进程
  1004. if (key_stop)
  1005. {
  1006. LogManager.AddHardwareLog("停止键按下。", true);
  1007. return false;
  1008. }
  1009. //4、设置WD
  1010. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1011. Thread.Sleep(1000);
  1012. //20201127增加自动亮度对比度
  1013. if(m_measureFile.MParam.FIBDo)
  1014. {
  1015. if(m_measureFile.MParam.FIBAutoBC)
  1016. {
  1017. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1018. float m_TempBrightness = 50.0f;
  1019. float m_TempContrast = 30.0f;
  1020. if (m_measureFile.MParam.SampleName == "3")
  1021. {
  1022. m_TempBrightness = 50.0f;
  1023. m_TempContrast = 30.0f;
  1024. iSEM.SetAutoVideoOff();
  1025. Thread.Sleep(200);
  1026. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1027. Thread.Sleep(200);
  1028. iSEM.SetContrast(m_TempContrast); //30.0f
  1029. Thread.Sleep(200);
  1030. }
  1031. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1032. {
  1033. iSEM.SetAutoVideoBrightnessAndContrast();
  1034. //20201128陈工建议增加
  1035. Thread.Sleep(200);
  1036. iSEM.SetAutoBright(100);
  1037. Thread.Sleep(200);
  1038. iSEM.SetAutoContrast(100);
  1039. Thread.Sleep(5000);
  1040. }
  1041. }
  1042. else
  1043. {
  1044. iSEM.SetAutoVideoOff();
  1045. Thread.Sleep(200);
  1046. iSEM.SetBrightness(m_measureFile.MParam.FIBB);
  1047. Thread.Sleep(200);
  1048. iSEM.SetContrast(m_measureFile.MParam.FIBC);
  1049. Thread.Sleep(200);
  1050. }
  1051. }
  1052. //拍照前改变速度,延时
  1053. iSEM.CloseReduced();
  1054. Thread.Sleep(200);
  1055. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1056. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1057. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1058. Thread.Sleep(200);
  1059. cycle_time = iSEM.GetCycleTime();
  1060. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1061. if (!GetImage(fileName2))
  1062. {
  1063. arg.Message = "FIB拍照失败";
  1064. arg.State = false;
  1065. SendMsg("1-11");
  1066. LogManager.AddHardwareLog("测量线程报错:FIB拍照失败。", false);
  1067. return false;
  1068. }
  1069. arg.State = true;
  1070. arg.Picture_Information.Picture_FullPath = fileName2;
  1071. arg.Message = "FIB拍照成功";
  1072. SendMsg("1-11");
  1073. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1074. Thread.Sleep(200);
  1075. cycle_time = iSEM.GetCycleTime();
  1076. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1077. //判断是否停止进程
  1078. if (key_stop)
  1079. {
  1080. LogManager.AddHardwareLog("停止键按下。", true);
  1081. return false;
  1082. }
  1083. iSEM.CmdFIBModeSEM();
  1084. Thread.Sleep(200);
  1085. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1086. LogManager.AddHardwareLog("测量线程:调用图像处理接口,准备移动样品台", true);
  1087. LogManager.AddHardwareLog("文件名=" + fileName2, true);
  1088. LogManager.AddHardwareLog("样品类型=" + m_measureFile.MParam.SampleName, true);
  1089. LogManager.AddHardwareLog("供应商名称=" + m_measureFile.MParam.Firm, true);
  1090. wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1091. LogManager.AddHardwareLog("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString()+")", true);
  1092. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1093. if (state == 1)
  1094. {
  1095. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1096. float xc = (x1 + x2)/2;
  1097. float yc = (y1 + y2)/2;
  1098. x0 = xc - 512;
  1099. y0 = 384 - yc;
  1100. LogManager.AddHardwareLog("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1101. px = iSEM.GetPixelSize();
  1102. //修改FIB切割的ELY文件坐标
  1103. XmlDocument xmlDoc = new XmlDocument();
  1104. xmlDoc.Load(m_measureFile.MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1105. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1106. if (xns != null)
  1107. {
  1108. XmlAttributeCollection attributeCol = xns.Attributes;
  1109. //遍历自己点属性
  1110. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1111. LogManager.AddHardwareLog("XML-Width_a = " + width_a.ToString(), true);
  1112. foreach (XmlAttribute attri in attributeCol)
  1113. {
  1114. if (attri.Name == "x")
  1115. {
  1116. attri.InnerText = ((x0 * px)*1000000 - width_a).ToString();
  1117. LogManager.AddHardwareLog("XML-TopLeft-X = " + attri.InnerText, true);
  1118. }
  1119. else if (attri.Name == "y")
  1120. {
  1121. attri.InnerText = ((y0 * px)*1000000-2.791).ToString();
  1122. LogManager.AddHardwareLog("XML-TopLeft-Y = " + attri.InnerText, true);
  1123. }
  1124. }
  1125. }
  1126. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1127. if (xns != null)
  1128. {
  1129. XmlAttributeCollection attributeCol = xns.Attributes;
  1130. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1131. //遍历自己点属性
  1132. foreach (XmlAttribute attri in attributeCol)
  1133. {
  1134. if (attri.Name == "x")
  1135. {
  1136. attri.InnerText = ((x0 * px)*1000000 - width).ToString();
  1137. }
  1138. else if (attri.Name == "y")
  1139. {
  1140. attri.InnerText = (((y0 * px) *1000000) + 2 - 2.791).ToString();
  1141. }
  1142. }
  1143. }
  1144. xmlDoc.Save(m_measureFile.MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1145. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1146. if (m_measureFile.MParam.PT)
  1147. {
  1148. xmlDoc = new XmlDocument();
  1149. xmlDoc.Load(m_measureFile.MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1150. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1151. if (xns != null)
  1152. {
  1153. XmlAttributeCollection attributeCol = xns.Attributes;
  1154. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1155. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1156. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1157. //遍历自己点属性
  1158. foreach (XmlAttribute attri in attributeCol)
  1159. {
  1160. if (attri.Name == "x")
  1161. {
  1162. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1163. }
  1164. else if (attri.Name == "y")
  1165. {
  1166. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1167. }
  1168. }
  1169. }
  1170. xmlDoc.Save(m_measureFile.MParam.PTTemp);
  1171. }
  1172. if (hand_intervene == 1)
  1173. {
  1174. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1175. }
  1176. }
  1177. else
  1178. {
  1179. arg.Message = "图像接口参数state返回值为零";
  1180. arg.State = false;
  1181. SendMsg("1-12");
  1182. if (hand_intervene == 1)
  1183. {
  1184. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1185. {
  1186. return false;
  1187. }
  1188. }
  1189. else
  1190. {
  1191. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1192. return false;
  1193. }
  1194. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1195. return false;
  1196. }
  1197. //判断是否停止进程
  1198. if (key_stop)
  1199. {
  1200. LogManager.AddHardwareLog("停止键按下", true);
  1201. return false;
  1202. }
  1203. //11.自动工具样品类型参数确定是否需要PT沉积
  1204. if (m_measureFile.MParam.PT)
  1205. {
  1206. if (!iSEM.CmdFIBModeFIB())
  1207. {
  1208. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1209. return false;
  1210. }
  1211. Thread.Sleep(200);
  1212. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1213. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1214. {
  1215. LogManager.AddHardwareLog("测量线程:插入PT针" + arg.Message, true);
  1216. if (!InsertPT())
  1217. {
  1218. arg.Message = "插入PT针失败";
  1219. arg.State = false;
  1220. SendMsg("1-13");
  1221. LogManager.AddHardwareLog("测量线程报错:"+ arg.Message, false);
  1222. return false;
  1223. }
  1224. arg.State = true;
  1225. arg.Message = "插入PT针成功";
  1226. SendMsg("1-13");
  1227. }
  1228. //判断是否停止进程
  1229. if (key_stop)
  1230. {
  1231. LogManager.AddHardwareLog("停止键按下", true);
  1232. return false;
  1233. }
  1234. //3. 根据坐标进行PT沉积
  1235. if (!PTWork())
  1236. {
  1237. arg.Message = "PT沉积失败";
  1238. arg.State = false;
  1239. SendMsg("1-14");
  1240. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1241. return false;
  1242. }
  1243. arg.State = true;
  1244. arg.Message = "PT沉积成功";
  1245. SendMsg("1-14");
  1246. //判断是否停止进程
  1247. if (key_stop)
  1248. {
  1249. LogManager.AddHardwareLog("停止键按下", true);
  1250. return false;
  1251. }
  1252. //15.根据样品类型决定是否撤出PT针
  1253. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1254. {
  1255. if (!RetractPT())
  1256. {
  1257. arg.Message = "撤出PT针失败";
  1258. arg.State = false;
  1259. SendMsg("1-15");
  1260. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1261. return false;
  1262. }
  1263. arg.State = true;
  1264. arg.Message = "撤出PT针成功";
  1265. SendMsg("1-15");
  1266. }
  1267. //判断是否停止进程
  1268. if (key_stop)
  1269. {
  1270. LogManager.AddHardwareLog("停止键按下", true);
  1271. return false;
  1272. }
  1273. if (!iSEM.CmdFIBModeSEM())
  1274. {
  1275. //arg.Message = "切割前SEM拍照失败。";
  1276. //arg.State = false;
  1277. //SendMsg("1-17");
  1278. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1279. return false;
  1280. }
  1281. }
  1282. }
  1283. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1284. float[] firstPosition = iSEM.GetStagePosition();
  1285. m_cutHoles[0].Position.X = firstPosition[0];
  1286. m_cutHoles[0].Position.Y = firstPosition[1];
  1287. m_cutHoles[0].Position.Z = firstPosition[2];
  1288. m_cutHoles[0].Position.T = firstPosition[3];
  1289. m_cutHoles[0].Position.R = firstPosition[4];
  1290. m_cutHoles[0].Position.M = firstPosition[5];
  1291. //这里要调用文件保存功能
  1292. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1293. + firstPosition[1].ToString() + ","
  1294. + firstPosition[2].ToString() + ","
  1295. + firstPosition[3].ToString() + ","
  1296. + firstPosition[4].ToString() + ","
  1297. + firstPosition[5].ToString() + ")";
  1298. arg.State = true;
  1299. SendMsg("1-16");
  1300. //判断是否停止进程
  1301. if (key_stop)
  1302. {
  1303. LogManager.AddHardwareLog("停止键按下", true);
  1304. return false;
  1305. }
  1306. return true;
  1307. }
  1308. /// <summary>
  1309. /// 14. FIB切割
  1310. /// </summary>
  1311. /// <returns></returns>
  1312. public bool FIBCross()
  1313. {
  1314. int state = 0;
  1315. #if CHECK
  1316. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1317. if (mag < 200)
  1318. {
  1319. mag = 200;
  1320. }
  1321. String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
  1322. iSEM.SetMagnification(mag);
  1323. Thread.Sleep(2000);
  1324. iSEM.CmdSaveRate();
  1325. Thread.Sleep(200);
  1326. cycle_time = iSEM.GetCycleTime();
  1327. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1328. if (!GetImage(fileName1))
  1329. {
  1330. arg.Message = "切割前SEM拍照失败。";
  1331. arg.State = false;
  1332. SendMsg("1-17");
  1333. LogManager.AddHardwareLog("测量线程报错:SEM切割前图像拍照失败", false);
  1334. return false;
  1335. }
  1336. iSEM.CmdFocusRate();
  1337. Thread.Sleep(200);
  1338. cycle_time = iSEM.GetCycleTime();
  1339. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1340. arg.Message = "切割前SEM拍照成功。";
  1341. arg.Picture_Information.Picture_FullPath = fileName1;
  1342. arg.State = true;
  1343. SendMsg("1-17");
  1344. #endif
  1345. if (!iSEM.CmdFIBModeFIB())
  1346. {
  1347. arg.Message = "切换到FIB模式失败。";
  1348. arg.State = false;
  1349. SendMsg("1-18");
  1350. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1351. return false;
  1352. }
  1353. arg.Message = "切换到FIB模式成功。";
  1354. arg.State = true;
  1355. SendMsg("1-18");
  1356. Thread.Sleep(1000);
  1357. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1358. float current = iSEM.GetMagnification();
  1359. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  1360. {
  1361. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1362. Thread.Sleep(200);
  1363. current = iSEM.GetMagnification();
  1364. }
  1365. Thread.Sleep(2000);
  1366. //14.自动控制FIB切割
  1367. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1368. //2.控制FIB进行切割
  1369. //以上1、2步全部用ELY文件代替
  1370. if (!FIBWork())
  1371. {
  1372. arg.Message = "FIB切割失败";
  1373. arg.State = false;
  1374. SendMsg("1-19");
  1375. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1376. return false;
  1377. }
  1378. arg.State = true;
  1379. arg.Message = "FIB切割成功";
  1380. SendMsg("1-19");
  1381. Thread.Sleep(300);
  1382. //判断是否停止进程
  1383. if (key_stop)
  1384. {
  1385. LogManager.AddHardwareLog("停止键按下", true);
  1386. return false;
  1387. }
  1388. //做切割后SEM的拍照
  1389. LogManager.AddHardwareLog("测量线程:切割后SEM拍照", true);
  1390. if (!iSEM.CmdFIBModeSEM())
  1391. {
  1392. //arg.Message = "切割后SEM拍照失败。";
  1393. //arg.State = false;
  1394. //SendMsg("1-20");
  1395. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1396. return false;
  1397. }
  1398. Thread.Sleep(1000);
  1399. #if CHECK
  1400. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
  1401. iSEM.SetMagnification(mag);
  1402. Thread.Sleep(2000);
  1403. iSEM.CmdSaveRate();
  1404. Thread.Sleep(200);
  1405. cycle_time = iSEM.GetCycleTime();
  1406. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1407. if (!GetImage(fileName2))
  1408. {
  1409. arg.Message = "切割后SEM拍照失败。";
  1410. arg.State = false;
  1411. SendMsg("1-20");
  1412. LogManager.AddHardwareLog("测量线程报错:SEM切割后图像拍照失败", false);
  1413. return false;
  1414. }
  1415. arg.Picture_Information.Picture_FullPath = fileName2;
  1416. arg.Message = "切割后SEM拍照成功。";
  1417. arg.State = true;
  1418. SendMsg("1-20");
  1419. iSEM.CmdFocusRate();
  1420. Thread.Sleep(200);
  1421. cycle_time = iSEM.GetCycleTime();
  1422. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1423. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1424. wr.Img_Cut_Success(fileName1, fileName2, out state);
  1425. LogManager.AddHardwareLog("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
  1426. if (state == 0)
  1427. {
  1428. LogManager.AddHardwareLog("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
  1429. arg.Message = "图像接口参数state返回值为零";
  1430. arg.State = false;
  1431. SendMsg("1-22");
  1432. if (hand_intervene == 1)
  1433. {
  1434. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1435. {
  1436. return false;
  1437. }
  1438. }
  1439. else
  1440. {
  1441. return false;
  1442. }
  1443. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1444. }
  1445. arg.State = true;
  1446. LogManager.AddHardwareLog("验证切割准确性成功。", true);
  1447. arg.Message = "FIB切割校验成功";
  1448. SendMsg("1-22");
  1449. //判断是否停止进程
  1450. if (key_stop)
  1451. {
  1452. LogManager.AddHardwareLog("停止键按下。", true);
  1453. return false;
  1454. }
  1455. #endif
  1456. return true;
  1457. }
  1458. /// <summary>
  1459. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1460. /// </summary>
  1461. /// <returns></returns>
  1462. public bool FindCross()
  1463. {
  1464. float x2 = 0, y2 = 0;
  1465. int state = 0;
  1466. //切换到SEM模式
  1467. if (!iSEM.CmdFIBModeSEM())
  1468. {
  1469. arg.Message = "SEM模式切换失败";
  1470. arg.State = false;
  1471. SendMsg("1-23");
  1472. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1473. return false;
  1474. }
  1475. arg.State = true;
  1476. arg.Message = "SEM模式切换成功";
  1477. SendMsg("1-23");
  1478. arg.Picture_Information.Work_Status = "SEM";
  1479. Thread.Sleep(1000);
  1480. //判断是否停止进程
  1481. if (key_stop)
  1482. {
  1483. LogManager.AddHardwareLog("停止键按下", true);
  1484. return false;
  1485. }
  1486. //1.控制SEM放大到300倍
  1487. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  1488. {
  1489. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  1490. arg.State = false;
  1491. SendMsg("1-24");
  1492. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1493. return false;
  1494. }
  1495. Thread.Sleep(200);
  1496. //iSEM.SetAutoVideoBrightnessAndContrast();
  1497. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1498. float m_TempBrightness = 50.0f;
  1499. float m_TempContrast = 30.0f;
  1500. if (m_measureFile.MParam.SampleName == "3")
  1501. {
  1502. m_TempBrightness = 48.0f;
  1503. m_TempContrast = 29.0f;
  1504. }
  1505. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1506. iSEM.SetAutoVideoOff();
  1507. Thread.Sleep(200);
  1508. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1509. Thread.Sleep(200);
  1510. iSEM.SetContrast(m_TempContrast); //30.0f
  1511. Thread.Sleep(2000);
  1512. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1513. if (mag < 200)
  1514. {
  1515. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1516. if (m_measureFile.MParam.SampleName == "3")
  1517. mag = 400;
  1518. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1519. mag = 200;
  1520. }
  1521. if (!iSEM.SetMagnification(mag))
  1522. {
  1523. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1524. arg.State = false;
  1525. SendMsg("1-24");
  1526. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1527. return false;
  1528. }
  1529. Thread.Sleep(200);
  1530. float current = iSEM.GetMagnification();
  1531. Thread.Sleep(200);
  1532. while (Math.Abs(current - mag) > 2)
  1533. {
  1534. iSEM.SetMagnification(mag);
  1535. Thread.Sleep(200);
  1536. current = iSEM.GetMagnification();
  1537. Thread.Sleep(200);
  1538. }
  1539. arg.State = true;
  1540. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1541. SendMsg("1-24");
  1542. Thread.Sleep(2000);
  1543. //判断是否停止进程
  1544. if (key_stop)
  1545. {
  1546. LogManager.AddHardwareLog("停止键按下", true);
  1547. return false;
  1548. }
  1549. //3.控制SEM拍照
  1550. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1551. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1552. String fileName4 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName4;
  1553. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1554. LogManager.AddHardwareLog("fileName4====================" + fileName4, true);
  1555. arg.Picture_Information.Picture_FullPath = fileName4;
  1556. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1557. Thread.Sleep(200);
  1558. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1559. Thread.Sleep(200);
  1560. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1561. Thread.Sleep(200);
  1562. //拍照前改变速度,延时
  1563. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1564. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1565. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1566. Thread.Sleep(200);
  1567. cycle_time = iSEM.GetCycleTime();
  1568. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1569. if (!GetImage(fileName4))
  1570. {
  1571. arg.State = false;
  1572. arg.Message = "SEM拍照找切割位置失败";
  1573. SendMsg("1-25");
  1574. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1575. return false;
  1576. }
  1577. arg.Picture_Information.Picture_FullPath = fileName4;
  1578. arg.State = true;
  1579. arg.Message = "SEM拍照成功";
  1580. SendMsg("1-25");
  1581. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1582. Thread.Sleep(200);
  1583. cycle_time = iSEM.GetCycleTime();
  1584. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1585. //判断是否停止进程
  1586. if (key_stop)
  1587. {
  1588. return false;
  1589. }
  1590. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1591. //5.根据坐标控制SEM移动到切孔位置,居中
  1592. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  1593. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  1594. wr.Img_Trapezoid_Top_Center_Position(fileName4,Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  1595. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1596. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1597. if (state == 1)
  1598. {
  1599. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1600. if (!MoveToPixByMoveStage(x2, y2))
  1601. {
  1602. arg.State = false;
  1603. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1604. SendMsg("1-26");
  1605. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1606. return false;
  1607. }
  1608. //判断是否移动完成
  1609. while (true)
  1610. {
  1611. Thread.Sleep(4000);
  1612. if (iSEM.GetStageIs() == 0)
  1613. {
  1614. break;
  1615. }
  1616. }
  1617. arg.State = true;
  1618. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1619. SendMsg("1-26");
  1620. //高倍到低倍不进行对焦
  1621. //拍照前改变速度,延时
  1622. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1623. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1624. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1625. Thread.Sleep(200);
  1626. cycle_time = iSEM.GetCycleTime();
  1627. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1628. //String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1629. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1630. String fileName10 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName10;
  1631. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1632. LogManager.AddHardwareLog("fileName10====================" + fileName10, true);
  1633. if (!GetImage(fileName10))
  1634. {
  1635. //arg.State = false;
  1636. //arg.Message = "SEM拍照失败";
  1637. //SendMsg("1-25");
  1638. //return false;
  1639. LogManager.AddHardwareLog("测量线程报错:找到已切割的位置拍照失败", true);
  1640. }
  1641. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1642. Thread.Sleep(200);
  1643. cycle_time = iSEM.GetCycleTime();
  1644. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1645. if (hand_intervene == 1)
  1646. {
  1647. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1648. }
  1649. }
  1650. else
  1651. {
  1652. arg.Message = "图像接口参数state返回值为零";
  1653. arg.State = false;
  1654. SendMsg("1-26");
  1655. if (hand_intervene == 1)
  1656. {
  1657. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1658. {
  1659. return false;
  1660. }
  1661. }
  1662. else
  1663. {
  1664. return false;
  1665. }
  1666. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1667. return false;
  1668. }
  1669. //判断是否停止进程
  1670. if (key_stop)
  1671. {
  1672. LogManager.AddHardwareLog("停止键按下", true);
  1673. return false;
  1674. }
  1675. return true;
  1676. }
  1677. /// <summary>
  1678. /// 17.自动控制SEM拍截面照
  1679. /// </summary>
  1680. /// <returns></returns>
  1681. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1682. {
  1683. int state = 0;
  1684. #region 设置拍照的电压
  1685. LogManager.AddHardwareLog("测量线程:设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true);
  1686. //1、放大倍数参数photograph_
  1687. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Photograph_Voltage))
  1688. {
  1689. arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1690. arg.State = false;
  1691. SendMsg("1-27");
  1692. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1693. return false;
  1694. }
  1695. //add
  1696. #endregion
  1697. Thread.Sleep(200);
  1698. #region 设置拍照的放大倍数
  1699. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数====" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  1700. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  1701. {
  1702. arg.Message = "放大倍数调整失败";
  1703. arg.State = false;
  1704. SendMsg("1-27");
  1705. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1706. return false;
  1707. }
  1708. float set = m_measureFile.MParam.Photograph_Magnification;
  1709. float current = iSEM.GetMagnification();
  1710. while(Math.Abs(current- set) > 1)
  1711. {
  1712. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  1713. Thread.Sleep(200);
  1714. current = iSEM.GetMagnification();
  1715. }
  1716. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString()+ "成功";
  1717. arg.State = true;
  1718. SendMsg("1-27");
  1719. Thread.Sleep(3000 + (Int32)cycle_time);
  1720. //判断是否停止进程
  1721. if (key_stop)
  1722. {
  1723. LogManager.AddHardwareLog("停止键按下", true);
  1724. return false;
  1725. }
  1726. #endregion
  1727. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1728. //if(!iSEM.SetAutoVideoBrightnessAndContrast())
  1729. //{
  1730. // LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1731. // return false;
  1732. //}
  1733. //Thread.Sleep(5000);
  1734. //2.控制SEM自动对焦、亮度、对比度-接口
  1735. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1736. if ((m_measureFile.MParam.SampleName == "2")||(m_measureFile.MParam.SampleName == "3"))
  1737. iSEM.SetReduced(402, 128, 500, 500);
  1738. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1739. iSEM.SetReduced(402, 128, 340, 256);
  1740. Thread.Sleep(200);
  1741. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1742. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1743. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1744. Thread.Sleep(200);
  1745. cycle_time = iSEM.GetCycleTime();
  1746. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1747. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1748. if (!iSEM.SetAutoVideoOff())
  1749. {
  1750. LogManager.AddHardwareLog("测量线程报错:关闭自动亮度对比度失败", false);
  1751. return false;
  1752. }
  1753. Thread.Sleep(5000);
  1754. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1755. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1756. if (ImageFocus1(false))
  1757. {
  1758. arg.Message = "自动对焦完成";
  1759. arg.State = true;
  1760. SendMsg("1-28");
  1761. }
  1762. else
  1763. {
  1764. arg.Message = "自动对焦失败";
  1765. arg.State = false;
  1766. SendMsg("1-28");
  1767. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1768. return false;
  1769. }
  1770. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1771. iSEM.CloseReduced();
  1772. Thread.Sleep(200);
  1773. cycle_time = iSEM.GetCycleTime();
  1774. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1775. //判断是否停止进程
  1776. if (key_stop)
  1777. {
  1778. LogManager.AddHardwareLog("停止键按下", true);
  1779. return false;
  1780. }
  1781. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1782. float m_TempBrightness = 50.0f;
  1783. float m_TempContrast = 30.0f;
  1784. if (m_measureFile.MParam.SampleName == "3")
  1785. {
  1786. m_TempBrightness = 50f;
  1787. m_TempContrast = 29f;
  1788. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1789. Thread.Sleep(200);
  1790. iSEM.SetContrast(m_TempContrast); //30.0f
  1791. Thread.Sleep(200);
  1792. }
  1793. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1794. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1795. {
  1796. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1797. return false;
  1798. }
  1799. Thread.Sleep(5000);
  1800. //3、设置SEM补偿角度
  1801. if (m_measureFile.MParam.Is_Photograph == false)
  1802. {
  1803. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString()+"度", true);
  1804. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1805. {
  1806. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1807. arg.State = false;
  1808. SendMsg("1-29");
  1809. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1810. return false;
  1811. }
  1812. arg.State = true;
  1813. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1814. SendMsg("1-29");
  1815. Thread.Sleep(200);
  1816. //判断是否停止进程
  1817. if (key_stop)
  1818. {
  1819. LogManager.AddHardwareLog("停止键按下", false);
  1820. return false;
  1821. }
  1822. }
  1823. //4、拍照,5、保存照片
  1824. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1825. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1826. String fileName5 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  1827. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1828. LogManager.AddHardwareLog("fileName5====================" + fileName5, true);
  1829. arg.Picture_Information.Picture_FullPath = fileName5;
  1830. arg.Picture_Information.Work_Status = "SEM";
  1831. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1832. Thread.Sleep(200);
  1833. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1834. Thread.Sleep(200);
  1835. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1836. Thread.Sleep(200);
  1837. //拍照前改变速度,延时
  1838. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1839. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1840. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1841. Thread.Sleep(200);
  1842. cycle_time = iSEM.GetCycleTime();
  1843. Thread.Sleep(Convert.ToInt32(cycle_time)*2);
  1844. if (!GetImage(fileName5))
  1845. {
  1846. arg.Message = "SEM拍照失败";
  1847. arg.State = false;
  1848. SendMsg("1-30");
  1849. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1850. return false;
  1851. }
  1852. arg.Picture_Information.Picture_FullPath = fileName5;
  1853. arg.State = true;
  1854. arg.Message = "SEM拍照成功";
  1855. SendMsg("1-30");
  1856. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1857. Thread.Sleep(200);
  1858. cycle_time = iSEM.GetCycleTime();
  1859. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1860. //判断是否停止进程
  1861. if (key_stop)
  1862. {
  1863. LogManager.AddHardwareLog("停止键按下", true);
  1864. return false;
  1865. }
  1866. #endregion
  1867. if (m_measureFile.MParam.Is_Photograph == false)
  1868. {
  1869. #region 对当前矩形进行旋转校正
  1870. //8,计算切割面区域偏移角度及方向
  1871. float degree = 0;
  1872. int direction = 0;
  1873. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  1874. LogManager.AddHardwareLog("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1875. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1876. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1877. if (state == 1)
  1878. {
  1879. //梯形角度
  1880. iSEM.SetScanRotationOn();
  1881. Thread.Sleep(200);
  1882. //20201128陈工要求,谭博返回角度*0.7
  1883. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  1884. Thread.Sleep(200);
  1885. arg.State = true;
  1886. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1887. SendMsg("1-31");
  1888. if (hand_intervene == 1)
  1889. {
  1890. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1891. }
  1892. }
  1893. else
  1894. {
  1895. arg.Message = "图像接口参数State返回值为零";
  1896. arg.State = false;
  1897. SendMsg("1-31");
  1898. if(hand_intervene == 1)
  1899. {
  1900. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1901. {
  1902. return false;
  1903. }
  1904. }
  1905. else
  1906. {
  1907. //return false;
  1908. }
  1909. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1910. }
  1911. //判断是否停止进程
  1912. if (key_stop)
  1913. {
  1914. LogManager.AddHardwareLog("停止键按下", true);
  1915. return false;
  1916. }
  1917. Thread.Sleep(200);
  1918. //12拍照
  1919. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1920. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1921. String fileName6 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  1922. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1923. LogManager.AddHardwareLog("fileName6====================" + fileName6, true);
  1924. arg.Picture_Information.Picture_FullPath = fileName6;
  1925. arg.Picture_Information.Work_Status = "SEM";
  1926. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1927. Thread.Sleep(200);
  1928. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1929. Thread.Sleep(200);
  1930. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1931. Thread.Sleep(200);
  1932. //拍照前改变速度,延时
  1933. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1934. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1935. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1936. Thread.Sleep(200);
  1937. cycle_time = iSEM.GetCycleTime();
  1938. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1939. if (!GetImage(fileName6))
  1940. {
  1941. arg.Message = "SEM拍照失败";
  1942. arg.State = false;
  1943. SendMsg("1-33");
  1944. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1945. return false;
  1946. }
  1947. arg.Picture_Information.Picture_FullPath = fileName6;
  1948. arg.State = true;
  1949. arg.Message = "SEM拍照成功";
  1950. SendMsg("1-33");
  1951. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1952. Thread.Sleep(200);
  1953. cycle_time = iSEM.GetCycleTime();
  1954. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1955. //判断是否停止进程
  1956. if (key_stop)
  1957. {
  1958. LogManager.AddHardwareLog("停止键按下", true);
  1959. return false;
  1960. }
  1961. #endregion
  1962. #region 获取两个位置上及放大倍数
  1963. //计算两个测量区域坐标
  1964. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1965. List<float> mag = new List<float>();
  1966. System.Drawing.Point ct0;
  1967. float mag1, mag2, magMax;
  1968. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1969. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  1970. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  1971. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1972. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  1973. "输入产品" + m_measureFile.MParam.Firm.ToString()
  1974. + "输出中心点1为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  1975. + ",输出放大倍数1==" + mag[0]
  1976. + "倍,输出中心点2为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  1977. + "输出放大倍数2==" + mag[0]
  1978. + "倍,输出中心点3为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1979. #endregion
  1980. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1981. {
  1982. arg.State = true;
  1983. arg.Message = "获取位置及放大倍数成功";
  1984. SendMsg("1-34");
  1985. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1986. float xs = iSEM.GetBeamShiftX();
  1987. Thread.Sleep(200);
  1988. float ys = iSEM.GetBeamShiftY();
  1989. Thread.Sleep(200);
  1990. float xpCur = iSEM.GetStageAtX();
  1991. Thread.Sleep(200);
  1992. float ypCur = iSEM.GetStageAtY();
  1993. Thread.Sleep(200);
  1994. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  1995. + "y=" + ys.ToString() + ","
  1996. + "原来样品台的位置x= " + xpCur.ToString()
  1997. + "y=" + ypCur.ToString(), true);
  1998. #endregion
  1999. //找到放大倍数最大值
  2000. magMax = mag[0];
  2001. for (int m = 1; m < mag.Count; m++)
  2002. {
  2003. if (mag[m] > magMax)
  2004. {
  2005. magMax = mag[m];
  2006. }
  2007. }
  2008. #region 移动到梯形左上角
  2009. //20201127将视野移动到梯形左上角位置
  2010. MoveToPix(ct0.X, ct0.Y);
  2011. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  2012. + "," + ct0.Y.ToString() + ")", true);
  2013. //关闭自动亮度对比度
  2014. iSEM.SetAutoVideoOff();
  2015. Thread.Sleep(2000);
  2016. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2017. if (m_measureFile.MParam.SampleName == "3")
  2018. {
  2019. m_TempBrightness = 50f;
  2020. m_TempContrast = 29f;
  2021. iSEM.SetBrightness(m_TempBrightness); //50.0f
  2022. Thread.Sleep(200);
  2023. iSEM.SetContrast(m_TempContrast); //30.0f
  2024. Thread.Sleep(200);
  2025. }
  2026. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  2027. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  2028. if ( m_measureFile.MParam.SampleName == "3")
  2029. {
  2030. iSEM.SetReduced(402, 128, 480, 450);
  2031. }else
  2032. {
  2033. iSEM.SetReduced(402, 128, 340, 256);
  2034. }
  2035. Thread.Sleep(200);
  2036. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  2037. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2038. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  2039. Thread.Sleep(200);
  2040. cycle_time = iSEM.GetCycleTime();
  2041. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2042. //放大到6000倍
  2043. iSEM.SetMagnification(magMax / 2);
  2044. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2045. set = magMax / 2;
  2046. current = iSEM.GetMagnification();
  2047. while (Math.Abs(current - set) > 1)
  2048. {
  2049. iSEM.SetMagnification(set);
  2050. Thread.Sleep(200);
  2051. current = iSEM.GetMagnification();
  2052. }
  2053. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--6000倍!", true);
  2054. if (m_measureFile.MParam.SampleName == "3")
  2055. {
  2056. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  2057. iSEM.SetBrightness(50.0f); //50.0f
  2058. Thread.Sleep(200);
  2059. iSEM.SetContrast(30.0f); //30.0f
  2060. Thread.Sleep(200);
  2061. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  2062. }
  2063. //自动对焦
  2064. if (!ImageFocus1(true))
  2065. {
  2066. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦失败!", true);
  2067. return false;
  2068. }
  2069. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦成功!", true);
  2070. ////自动消像散
  2071. //if (!ImageStig1())
  2072. //{
  2073. // return false;
  2074. //}
  2075. //放大到10000倍
  2076. iSEM.SetMagnification(magMax);
  2077. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2078. set = magMax;
  2079. current = iSEM.GetMagnification();
  2080. while (Math.Abs(current - set) > 1)
  2081. {
  2082. iSEM.SetMagnification(set);
  2083. Thread.Sleep(200);
  2084. current = iSEM.GetMagnification();
  2085. }
  2086. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--12000倍!", true);
  2087. //自动对焦
  2088. if (!ImageFocus1(true))
  2089. {
  2090. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦失败!", true);
  2091. return false;
  2092. }
  2093. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦成功!", true);
  2094. ////自动消像散
  2095. //if (!ImageStig1())
  2096. //{
  2097. // return false;
  2098. //}
  2099. ////放大到20000倍
  2100. //iSEM.SetMagnification(magMax*2);
  2101. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2102. //set = magMax*2;
  2103. //current = iSEM.GetMagnification();
  2104. //while (Math.Abs(current - set) > 1)
  2105. //{
  2106. // iSEM.SetMagnification(set);
  2107. // Thread.Sleep(200);
  2108. // current = iSEM.GetMagnification();
  2109. //}
  2110. ////自动对焦
  2111. //if (!ImageFocus1())
  2112. //{
  2113. // return false;
  2114. //}
  2115. iSEM.CloseReduced();
  2116. Thread.Sleep(200);
  2117. cycle_time = iSEM.GetCycleTime();
  2118. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2119. #endregion
  2120. #region 循环拍照
  2121. for (int n = 0; n < ct.Count; n++)
  2122. {
  2123. #region 恢复到拍照的状态
  2124. iSEM.SetStageGotoX(xpCur);
  2125. while (true)
  2126. {
  2127. Thread.Sleep(4000);
  2128. if (iSEM.GetStageIs() == 0)
  2129. {
  2130. break;
  2131. }
  2132. }
  2133. iSEM.SetStageGotoY(ypCur);
  2134. while (true)
  2135. {
  2136. Thread.Sleep(4000);
  2137. if (iSEM.GetStageIs() == 0)
  2138. {
  2139. break;
  2140. }
  2141. }
  2142. //恢复原来的放大倍数
  2143. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  2144. {
  2145. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2146. return false;
  2147. }
  2148. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2149. set = m_measureFile.MParam.Photograph_Magnification;
  2150. current = iSEM.GetMagnification();
  2151. while (Math.Abs(current - set) > 1)
  2152. {
  2153. iSEM.SetMagnification(set);
  2154. Thread.Sleep(200);
  2155. current = iSEM.GetMagnification();
  2156. }
  2157. //恢复BeamShift的百分比值
  2158. iSEM.SetBeamShiftX(xs);
  2159. Thread.Sleep(200);
  2160. iSEM.SetBeamShiftY(ys);
  2161. Thread.Sleep(200);
  2162. #endregion
  2163. #region 移动到指定点位置
  2164. if (!MoveToPix(ct[n].X, ct[n].Y))
  2165. {
  2166. arg.State = false;
  2167. arg.Message = "移动到第一个点位置失败";
  2168. SendMsg("1-" + (35 + n).ToString());
  2169. //移动到第一个点失败
  2170. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2171. }
  2172. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2173. + "," + ct[n].Y.ToString() + ")", true);
  2174. #endregion
  2175. #region 如果是第一个点,则1W倍对焦
  2176. if (n == 0)
  2177. {
  2178. ////在第一个点上放大1W倍对焦
  2179. //if (!iSEM.SetMagnification(mag[n]))
  2180. //{
  2181. // LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2182. // return false;
  2183. //}
  2184. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2185. //while (true)
  2186. //{
  2187. // current = iSEM.GetMagnification();
  2188. // if (Math.Abs(current - mag[n]) < 1)
  2189. // {
  2190. // Thread.Sleep(200);
  2191. // break;
  2192. // }
  2193. // Thread.Sleep(200);
  2194. // iSEM.SetMagnification(set);
  2195. // Thread.Sleep(200);
  2196. //}
  2197. //if (m_measureFile.MParam.SampleName == "2")
  2198. //{
  2199. // //窗口对焦
  2200. // iSEM.SetReduced1(340, 1, 340, 256);
  2201. // Thread.Sleep(200);
  2202. // iSEM.CmdFocusRate();
  2203. // Thread.Sleep(200);
  2204. // cycle_time = iSEM.GetCycleTime();
  2205. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2206. // //自动对焦
  2207. // if (!ImageFocus1(false))
  2208. // {
  2209. // return false;
  2210. // }
  2211. // //恢复全屏
  2212. // iSEM.CloseReduced();
  2213. // Thread.Sleep(200);
  2214. // cycle_time = iSEM.GetCycleTime();
  2215. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2216. //}
  2217. //else
  2218. //{
  2219. // //窗口对焦
  2220. // //iSEM.SetReduced(402, 128, 800, 600);
  2221. // //Thread.Sleep(200);
  2222. // iSEM.CmdFocusRate();
  2223. // Thread.Sleep(200);
  2224. // cycle_time = iSEM.GetCycleTime();
  2225. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2226. // //自动对焦
  2227. // if (!ImageFocus1(false))
  2228. // {
  2229. // return false;
  2230. // }
  2231. // //恢复全屏
  2232. // //iSEM.CloseReduced();
  2233. // //Thread.Sleep(200);
  2234. // cycle_time = iSEM.GetCycleTime();
  2235. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2236. //}
  2237. LogManager.AddHardwareLog("========测量线程:进入内部观察,不对焦!", true);
  2238. //增亮图像
  2239. iSEM.SetAutoVideoOff();
  2240. Thread.Sleep(200);
  2241. float currentBright = iSEM.GetBrightness();
  2242. Thread.Sleep(200);
  2243. float currentContrast = iSEM.GetContrast();
  2244. Thread.Sleep(200);
  2245. //add by sun 2020-12-17 黄工觉得太亮
  2246. int m_BrightMore = 2;
  2247. int m_ContrastMore = 2;
  2248. if (m_measureFile.MParam.SampleName == "3")
  2249. {
  2250. m_BrightMore = 0;
  2251. m_ContrastMore = 0;
  2252. }
  2253. //add by sun 2020-12-17 黄工觉得太亮 end
  2254. iSEM.SetBrightness(currentBright + m_BrightMore);
  2255. Thread.Sleep(200);
  2256. iSEM.SetContrast(currentContrast + m_ContrastMore);
  2257. Thread.Sleep(200);
  2258. }
  2259. #endregion
  2260. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  2261. //if((m_measureFile.MParam.SampleName=="3")&&(n==0))
  2262. //{
  2263. // if (!GetImageFromSEM(mag[n]/2))
  2264. // LogManager.AddHardwareLog("测量线程报错:第一个区域放大一半倍数" + (mag[n]/2).ToString() + "控制失败", true);
  2265. //}
  2266. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  2267. #region 拍照
  2268. if (!iSEM.SetMagnification(mag[n]))
  2269. {
  2270. arg.State = false;
  2271. arg.Message = "移动到第一个点位置拍照失败";
  2272. SendMsg("1-35");
  2273. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2274. return false;
  2275. }
  2276. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成!", true);
  2277. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2278. set = mag[n];
  2279. current = iSEM.GetMagnification();
  2280. while (Math.Abs(current - set) > 1)
  2281. {
  2282. iSEM.SetMagnification(set);
  2283. Thread.Sleep(200);
  2284. current = iSEM.GetMagnification();
  2285. }
  2286. //获取像素大小
  2287. lsize.Add(iSEM.GetPixelSize());
  2288. Thread.Sleep(200);
  2289. //String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2290. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  2291. String fileName7 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag[n].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + n.ToString() + "-" + ImageNameTwo_1;
  2292. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  2293. LogManager.AddHardwareLog("fileName7====================" + fileName7, true);
  2294. arg.Picture_Information.Picture_FullPath = fileName7;
  2295. arg.Picture_Information.Work_Status = "SEM";
  2296. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2297. Thread.Sleep(200);
  2298. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2299. Thread.Sleep(200);
  2300. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2301. Thread.Sleep(200);
  2302. //拍照前改变速度,延时
  2303. iSEM.CmdLineScan();
  2304. Thread.Sleep(200);
  2305. cycle_time = iSEM.GetCycleTime();
  2306. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2307. if (!GetImage(fileName7))
  2308. {
  2309. arg.State = false;
  2310. arg.Message = "移动到第一个点位置失败";
  2311. SendMsg("1-35");
  2312. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2313. return false;
  2314. }
  2315. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  2316. iSEM.CmdPixelScan();
  2317. Thread.Sleep(200);
  2318. limg_path.Add(fileName7);
  2319. arg.Picture_Information.Picture_FullPath = fileName7;
  2320. arg.State = true;
  2321. arg.Message = "移动到第一个点位置拍照成功";
  2322. SendMsg("1-35");
  2323. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2324. Thread.Sleep(200);
  2325. cycle_time = iSEM.GetCycleTime();
  2326. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2327. // add by zjx 在测量图上显示放大倍数和像素大小等信息
  2328. float size = iSEM.GetPixelSize();
  2329. SaveMeasDataPic(fileName7,mag[n], size);
  2330. // add by zjx 在测量图上显示放大倍数和像素大小等信息 end
  2331. #endregion
  2332. }
  2333. #endregion
  2334. if (hand_intervene == 1)
  2335. {
  2336. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2337. }
  2338. }
  2339. else
  2340. {
  2341. if (hand_intervene == 1)
  2342. {
  2343. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2344. {
  2345. // return false;
  2346. }
  2347. }
  2348. else
  2349. {
  2350. //return false;
  2351. }
  2352. arg.State = false;
  2353. arg.Message = "获取位置及放大倍数失败";
  2354. SendMsg("1-34");
  2355. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2356. }
  2357. //判断是否停止进程
  2358. if (key_stop)
  2359. {
  2360. LogManager.AddHardwareLog("停止键按下", true);
  2361. return false;
  2362. }
  2363. }
  2364. ////14光束复位和Rotation关闭开关
  2365. //arg.Message = "光束复位成功";
  2366. //arg.State = true;
  2367. //SendMsg("1-36");
  2368. iSEM.SetTiltAngleOff();
  2369. Thread.Sleep(200);
  2370. iSEM.SetScanRotationOff();
  2371. Thread.Sleep(200);
  2372. iSEM.SetBeamShiftX(0);
  2373. Thread.Sleep(200);
  2374. iSEM.SetBeamShiftY(0);
  2375. Thread.Sleep(200);
  2376. //判断是否停止进程
  2377. if (key_stop)
  2378. {
  2379. return false;
  2380. }
  2381. return true;
  2382. }
  2383. //第一个孔的测试过程
  2384. public bool FirstHole()
  2385. {
  2386. // add by zjx 2020-12-18 为了测试只做能谱部分
  2387. if (m_measureFile.MParam.IsonlyEDSForDebug == false)
  2388. {
  2389. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2390. LogManager.AddHardwareLog("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2391. if (!SetVoltageAndIPROBE())
  2392. {
  2393. LogManager.AddHardwareLog("测量线程:第一孔=====设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2394. return false;
  2395. }
  2396. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2397. //设置拉直的放大倍数
  2398. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), true);
  2399. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2400. {
  2401. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), false);
  2402. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2403. arg.State = false;
  2404. SendMsg("1-1");
  2405. return false;
  2406. }
  2407. float current = iSEM.GetMagnification();
  2408. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2409. {
  2410. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2411. Thread.Sleep(200);
  2412. current = iSEM.GetMagnification();
  2413. }
  2414. arg.Message = "拉直放大倍数设置成功!";
  2415. arg.State = true;
  2416. SendMsg("1-1");
  2417. Thread.Sleep(2000);
  2418. //自动化流程-每个点都需要补偿54度
  2419. if (m_measureFile.MParam.Is_Photograph == false)
  2420. {
  2421. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2422. if (!TiltCorrection(54.0f))
  2423. {
  2424. LogManager.AddHardwareLog("测量线程报错:倾斜补偿角度为54度失败", false);
  2425. arg.Message = "角度补偿54度失败!";
  2426. arg.State = false;
  2427. SendMsg("1-2");
  2428. return false;
  2429. }
  2430. arg.Message = "角度补偿54度成功!";
  2431. arg.State = true;
  2432. SendMsg("1-2");
  2433. Thread.Sleep(1000);
  2434. //判断是否停止进程
  2435. if (key_stop)
  2436. {
  2437. LogManager.AddHardwareLog("停止键按下", true);
  2438. return false;
  2439. }
  2440. }
  2441. // 2是5/6类样品,不需要拉直
  2442. if (m_measureFile.MParam.SampleName != "2")
  2443. {
  2444. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2445. if (!Straighten_Handle())
  2446. {
  2447. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2448. return false;
  2449. }
  2450. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2451. //判断是否停止进程
  2452. if (key_stop)
  2453. {
  2454. LogManager.AddHardwareLog("停止键按下。", true);
  2455. return false;
  2456. }
  2457. }
  2458. else
  2459. {
  2460. arg.Message = "拉直操作自动对焦成功!";
  2461. arg.State = true;
  2462. SendMsg("1-3");
  2463. Thread.Sleep(1000);
  2464. arg.Message = "拉直拍照成功!";
  2465. arg.Picture_Information.Picture_FullPath = "";
  2466. arg.State = true;
  2467. SendMsg("1-4");
  2468. Thread.Sleep(1000);
  2469. arg.Message = "拉直操作完成";
  2470. arg.State = true;
  2471. SendMsg("1-5");
  2472. Thread.Sleep(1000);
  2473. }
  2474. //13. 自动 定位功能
  2475. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2476. if (!GetPoistion())
  2477. {
  2478. LogManager.AddHardwareLog("测量线程报错:自动定位失败,程序退出。", false);
  2479. return false;
  2480. }
  2481. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2482. //判断是否停止进程
  2483. if (key_stop)
  2484. {
  2485. LogManager.AddHardwareLog("停止键按下。", true);
  2486. return false;
  2487. }
  2488. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2489. if (m_measureFile.MParam.Is_Photograph == false)
  2490. {
  2491. if (m_measureFile.MParam.IsCutingForDebug)
  2492. {
  2493. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!==" + m_measureFile.MParam.IsCutingForDebug, true);
  2494. if (!FIBCross())
  2495. {
  2496. LogManager.AddHardwareLog("测量线程报错:自动控制FIB切割失败。", false);
  2497. return false;
  2498. }
  2499. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2500. }
  2501. }
  2502. //del by sun 2020-12-15 temp end
  2503. //判断是否停止进程
  2504. if (key_stop)
  2505. {
  2506. return false;
  2507. }
  2508. //16.找到切割位置
  2509. if (m_measureFile.MParam.Is_Photograph == false)
  2510. {
  2511. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2512. if (!FindCross())
  2513. {
  2514. return false;
  2515. }
  2516. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2517. //判断是否停止进程
  2518. if (key_stop)
  2519. {
  2520. return false;
  2521. }
  2522. }
  2523. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2524. //将过程17最后的拍照图片提出给18步进行调用
  2525. List<String> limg_path = new List<string>();
  2526. List<float> lsize = new List<float>();
  2527. //17.自动控制SEM拍截面照
  2528. if (!ShotSection(ref limg_path, ref lsize))
  2529. {
  2530. //return false;
  2531. }
  2532. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2533. //判断是否停止进程
  2534. if (key_stop)
  2535. {
  2536. return false;
  2537. }
  2538. //这段是临时的
  2539. //arg.State = true;
  2540. //arg.Message = "测量尺寸成功";
  2541. //SendMsg("1-40");
  2542. //18.自动层高分析
  2543. if (m_measureFile.MParam.Is_Photograph == false)
  2544. {
  2545. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2546. float size = iSEM.GetPixelSize();
  2547. int state = 1;
  2548. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2549. if (state == 0)
  2550. {
  2551. arg.Message = "测量尺寸失败";
  2552. arg.State = false;
  2553. SendMsg("1-40");
  2554. return false;
  2555. }
  2556. arg.State = true;
  2557. arg.Message = "测量尺寸成功";
  2558. SendMsg("1-40");
  2559. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2560. }
  2561. }
  2562. //add by zjx 2020-12-18 为了测试只做能谱部分 end
  2563. //19.能谱分析
  2564. if (m_measureFile.MParam.EDS)
  2565. {
  2566. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析开始===" + m_measureFile.MParam.EDS, true);
  2567. EDSAnalysis();
  2568. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析结束===" + m_measureFile.MParam.EDS, true);
  2569. }
  2570. //20.复位
  2571. LogManager.AddHardwareLog("===========测量线程:20.复位开始", true);
  2572. BeamShiftReset();
  2573. return true;
  2574. }
  2575. //非第一个孔的测试过程
  2576. public bool OtherHole()
  2577. {
  2578. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2579. LogManager.AddHardwareLog("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2580. if (!SetVoltageAndIPROBE())
  2581. {
  2582. LogManager.AddHardwareLog("测量线程:非第一孔==设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2583. return false;
  2584. }
  2585. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2586. //设置拉直的放大倍数
  2587. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2588. {
  2589. LogManager.AddHardwareLog("拉直放大倍数设置失败,程序退出。", true);
  2590. arg.Message = "拉直放大倍数设置失败!";
  2591. arg.State = false;
  2592. SendMsg("1-1");
  2593. return false;
  2594. }
  2595. float current = iSEM.GetMagnification();
  2596. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2597. {
  2598. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2599. Thread.Sleep(200);
  2600. current = iSEM.GetMagnification();
  2601. }
  2602. arg.Message = "拉直放大倍数设置成功!";
  2603. arg.State = true;
  2604. SendMsg("1-1");
  2605. Thread.Sleep(2000);
  2606. //自动化流程-每个点都需要补偿54度
  2607. if (m_measureFile.MParam.Is_Photograph == false)
  2608. {
  2609. if (!TiltCorrection(54.0f))
  2610. {
  2611. arg.Message = "角度补偿54度失败!";
  2612. arg.State = false;
  2613. SendMsg("1-2");
  2614. return false;
  2615. }
  2616. arg.Message = "角度补偿54度成功!";
  2617. arg.State = true;
  2618. SendMsg("1-2");
  2619. Thread.Sleep(2000);
  2620. //判断是否停止进程
  2621. if (key_stop)
  2622. {
  2623. return false;
  2624. }
  2625. }
  2626. if (m_measureFile.MParam.SampleName != "2")
  2627. {
  2628. if (!Straighten_Handle())
  2629. {
  2630. LogManager.AddHardwareLog("测量线程报错:拉直操作失败。", true);
  2631. return false;
  2632. }
  2633. //判断是否停止进程
  2634. if (key_stop)
  2635. {
  2636. LogManager.AddHardwareLog("停止键按下。", true);
  2637. return false;
  2638. }
  2639. }
  2640. else
  2641. {
  2642. arg.Message = "拉直操作自动对焦成功!";
  2643. arg.State = true;
  2644. SendMsg("1-3");
  2645. Thread.Sleep(1000);
  2646. arg.Message = "拉直拍照成功!";
  2647. arg.Picture_Information.Picture_FullPath = "";
  2648. arg.State = true;
  2649. SendMsg("1-4");
  2650. Thread.Sleep(1000);
  2651. arg.Message = "拉直操作完成";
  2652. arg.State = true;
  2653. SendMsg("1-5");
  2654. }
  2655. //13. 自动 定位功能
  2656. if (!GetPoistion())
  2657. {
  2658. return false;
  2659. }
  2660. //判断是否停止进程
  2661. if (key_stop)
  2662. {
  2663. return false;
  2664. }
  2665. //14.自动控制FIB切割
  2666. if (m_measureFile.MParam.Is_Photograph == false)
  2667. {
  2668. if (!FIBCross())
  2669. {
  2670. return false;
  2671. }
  2672. }
  2673. //判断是否停止进程
  2674. if (key_stop)
  2675. {
  2676. return false;
  2677. }
  2678. // 16.找到切割位置
  2679. if (m_measureFile.MParam.Is_Photograph == false)
  2680. {
  2681. if (!FindCross())
  2682. {
  2683. return false;
  2684. }
  2685. //判断是否停止进程
  2686. if (key_stop)
  2687. {
  2688. return false;
  2689. }
  2690. }
  2691. //将过程17最后的拍照图片提出给18步进行调用
  2692. List<String> limg_path = new List<string>();
  2693. List<float> lsize = new List<float>();
  2694. //17.自动控制SEM拍截面照
  2695. if (!ShotSection(ref limg_path, ref lsize))
  2696. {
  2697. //return false;
  2698. }
  2699. //判断是否停止进程
  2700. if (key_stop)
  2701. {
  2702. return false;
  2703. }
  2704. //这段是临时的
  2705. //arg.State = true;
  2706. //arg.Message = "测量尺寸成功";
  2707. //SendMsg("1-40");
  2708. //18.自动层高分析
  2709. if (m_measureFile.MParam.Is_Photograph == false)
  2710. {
  2711. float size = iSEM.GetPixelSize();
  2712. int state = 1;
  2713. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2714. if (state == 0)
  2715. {
  2716. arg.Message = "测量尺寸失败";
  2717. arg.State = false;
  2718. SendMsg("1-40");
  2719. return false;
  2720. }
  2721. arg.State = true;
  2722. arg.Message = "测量尺寸成功";
  2723. SendMsg("1-40");
  2724. }
  2725. //19.能谱分析
  2726. if (m_measureFile.MParam.EDS)
  2727. {
  2728. EDSAnalysis();
  2729. }
  2730. //20.复位 del by sun 2020-12-15
  2731. //BeamShiftReset();
  2732. //del by sun 2020-12-15 end
  2733. return true;
  2734. }
  2735. //测试完第一个孔后的样品台初始化操作。
  2736. //再调用CommonWork执行非第一个孔的测试过程
  2737. public bool OtherHole_Init()
  2738. {
  2739. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2740. #region 初始化
  2741. //1、不只拍照,且不是倾斜观测,则移动T轴
  2742. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2743. {
  2744. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2745. if (!iSEM.SetStageGotoT(0))
  2746. {
  2747. LogManager.AddHardwareLog("样品台归零失败", false);
  2748. return false;
  2749. }
  2750. while (true)
  2751. {
  2752. Thread.Sleep(5000);
  2753. if (iSEM.GetStageIs() == 0)
  2754. {
  2755. break;
  2756. }
  2757. }
  2758. //判断是否停止进程
  2759. if (key_stop)
  2760. {
  2761. LogManager.AddHardwareLog("停止键按下", true);
  2762. return false;
  2763. }
  2764. }
  2765. //2、如果是倾斜观测,则移动Z轴
  2766. if(m_measureFile.MParam.Title==true)
  2767. {
  2768. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2769. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_measureFile.MParam.ZDistance/1000))
  2770. //20201109, Z轴降到安全的位置上
  2771. if(!iSEM.SetStageGotoZ(fSateyZ))
  2772. {
  2773. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2774. return false;
  2775. }
  2776. while (true)
  2777. {
  2778. Thread.Sleep(5000);
  2779. if (iSEM.GetStageIs() == 0)
  2780. {
  2781. break;
  2782. }
  2783. }
  2784. //判断是否停止进程
  2785. if (key_stop)
  2786. {
  2787. LogManager.AddHardwareLog("停止键按下", true);
  2788. return false;
  2789. }
  2790. }
  2791. //3. 根据光镜坐标控制样品台移动
  2792. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2793. {
  2794. //SendMsg("移动失败");
  2795. LogManager.AddHardwareLog("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2796. return false;
  2797. }
  2798. LogManager.AddHardwareLog("移动R轴到="+ currentHole.Position.R.ToString(), true);
  2799. while (true)
  2800. {
  2801. Thread.Sleep(5000);
  2802. if (iSEM.GetStageIs() == 0)
  2803. {
  2804. break;
  2805. }
  2806. }
  2807. //判断是否停止进程
  2808. if (key_stop)
  2809. {
  2810. LogManager.AddHardwareLog("停止键按下", true);
  2811. return false;
  2812. }
  2813. if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2814. {
  2815. //SendMsg("移动失败");
  2816. LogManager.AddHardwareLog("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString()+"," +currentHole.Position.X.ToString()+")", false);
  2817. return false;
  2818. }
  2819. LogManager.AddHardwareLog("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2820. while (true)
  2821. {
  2822. Thread.Sleep(10000);
  2823. if (iSEM.GetStageIs() == 0)
  2824. {
  2825. break;
  2826. }
  2827. }
  2828. //判断是否停止进程
  2829. if (key_stop)
  2830. {
  2831. LogManager.AddHardwareLog("停止键按下", true);
  2832. return false;
  2833. }
  2834. //4、倾斜观测时恢复Z轴
  2835. if (m_measureFile.MParam.Title == true)
  2836. {
  2837. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2838. if (currentHole.Position.Z > 0.043)
  2839. {
  2840. LogManager.AddHardwareLog("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2841. return false;
  2842. }
  2843. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2844. {
  2845. LogManager.AddHardwareLog("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2846. return false;
  2847. }
  2848. while (true)
  2849. {
  2850. Thread.Sleep(5000);
  2851. if (iSEM.GetStageIs() == 0)
  2852. {
  2853. break;
  2854. }
  2855. }
  2856. //判断是否停止进程
  2857. if (key_stop)
  2858. {
  2859. LogManager.AddHardwareLog("停止键按下", true);
  2860. return false;
  2861. }
  2862. }
  2863. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2864. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2865. {
  2866. if (!iSEM.SetStageGotoT(54))
  2867. {
  2868. LogManager.AddHardwareLog("测量线程报错:校正54度有误", true);
  2869. return false;
  2870. }
  2871. while (true)
  2872. {
  2873. Thread.Sleep(5000);
  2874. if (iSEM.GetStageIs() == 0)
  2875. {
  2876. break;
  2877. }
  2878. }
  2879. }
  2880. //判断是否停止进程
  2881. if (key_stop)
  2882. {
  2883. LogManager.AddHardwareLog("停止键按下", true);
  2884. return false;
  2885. }
  2886. //4、设置WD
  2887. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2888. Thread.Sleep(1000);
  2889. #endregion
  2890. return true;
  2891. }
  2892. //初始化拉直操作
  2893. public bool Straighten_Handle()
  2894. {
  2895. if (m_measureFile.MParam.Title)
  2896. {
  2897. //倾斜样品台,SEM视野是黑色的
  2898. LogManager.AddHardwareLog("测量线程:恢复到工作位置后重新调亮图像。", true);
  2899. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2900. {
  2901. LogManager.AddHardwareLog("测量线程报错:重新设置到标准工作距离失败。", false);
  2902. return false;
  2903. }
  2904. Thread.Sleep(7000); //自动亮度对比度使用
  2905. }
  2906. //1、自动对焦
  2907. LogManager.AddHardwareLog("测量线程报错:拉直操作前自动对焦开始", true);
  2908. iSEM.SetReduced(402, 128, 340, 256);
  2909. Thread.Sleep(200);
  2910. //add by sun 2020-12-15
  2911. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2912. //add by sun 2020-12-15 end
  2913. Thread.Sleep(200);
  2914. cycle_time = iSEM.GetCycleTime();
  2915. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2916. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2917. float m_TempBrightness = 50.0f;
  2918. float m_TempContrast = 30.0f;
  2919. if (m_measureFile.MParam.SampleName == "3")
  2920. {
  2921. m_TempBrightness = 48.0f;
  2922. m_TempContrast = 29.0f;
  2923. }
  2924. //add by sun 2020-12-18 解决1类样品拉直太白造成无法拉直问题
  2925. if (m_measureFile.MParam.SampleName == "1")
  2926. {
  2927. m_TempBrightness = 50.0f;
  2928. m_TempContrast = 29.0f;
  2929. }
  2930. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2931. iSEM.SetAutoVideoOff();
  2932. Thread.Sleep(200);
  2933. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2934. Thread.Sleep(200);
  2935. iSEM.SetContrast(m_TempContrast);//30.0f
  2936. Thread.Sleep(200);
  2937. if (!ImageFocus1(false))
  2938. {
  2939. LogManager.AddHardwareLog("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2940. arg.Message = "拉直操作自动对焦失败!";
  2941. arg.State = false;
  2942. SendMsg("1-3");
  2943. return false;
  2944. }
  2945. iSEM.CloseReduced();
  2946. Thread.Sleep(200);
  2947. cycle_time = iSEM.GetCycleTime();
  2948. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2949. iSEM.SetAutoVideoBrightnessAndContrast();
  2950. Thread.Sleep(5000);
  2951. arg.Message = "拉直操作自动对焦成功!";
  2952. arg.State = true;
  2953. SendMsg("1-3");
  2954. //判断是否停止进程
  2955. if (key_stop)
  2956. {
  2957. LogManager.AddHardwareLog("停止键按下。", true);
  2958. return false;
  2959. }
  2960. //2、拍张照片
  2961. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2962. LogManager.AddHardwareLog("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2963. //拍照前改变速度,延时
  2964. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2965. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2966. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2967. Thread.Sleep(200);
  2968. cycle_time = iSEM.GetCycleTime();
  2969. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2970. if (!GetImage(fileName0))
  2971. {
  2972. LogManager.AddHardwareLog("测量线程报错:拉直拍照失败", false);
  2973. arg.Message = "拉直拍照失败";
  2974. arg.State = false;
  2975. SendMsg("1-4");
  2976. return false;
  2977. }
  2978. arg.Message = "拉直拍照成功!";
  2979. arg.Picture_Information.Picture_FullPath = fileName0;
  2980. arg.State = true;
  2981. SendMsg("1-4");
  2982. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2983. Thread.Sleep(200);
  2984. cycle_time = iSEM.GetCycleTime();
  2985. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2986. //3、华为接口,获取旋转角度
  2987. float degree = 0;
  2988. int direction = 0;
  2989. int state = 1;
  2990. wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  2991. LogManager.AddHardwareLog("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  2992. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2993. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2994. if (state == 0)
  2995. {
  2996. LogManager.AddHardwareLog("测量线程:图像处理接口参数state返回为零" ,false);
  2997. arg.Message = "图像处理接口参数state返回为零";
  2998. arg.State = false;
  2999. SendMsg("1-5");
  3000. if (hand_intervene == 1)
  3001. {
  3002. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  3003. {
  3004. return false;
  3005. }
  3006. }
  3007. else
  3008. {
  3009. return false;
  3010. }
  3011. return false;
  3012. }
  3013. if (direction == 2)
  3014. {
  3015. degree = -degree;
  3016. }
  3017. if (degree != 0)
  3018. {
  3019. //4、拉直,旋转R轴
  3020. LogManager.AddHardwareLog("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  3021. //选择之前,先降Z轴
  3022. float Zpos = iSEM.GetStageAtZ();
  3023. Thread.Sleep(200);
  3024. LogManager.AddHardwareLog("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  3025. if (!iSEM.SetStageGotoZ(fSateyZ))
  3026. {
  3027. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  3028. return false;
  3029. }
  3030. while (true)
  3031. {
  3032. Thread.Sleep(4000);
  3033. if (iSEM.GetStageIs() == 0)
  3034. {
  3035. break;
  3036. }
  3037. }
  3038. //判断是否停止进程
  3039. if (key_stop)
  3040. {
  3041. LogManager.AddHardwareLog("停止键按下", true);
  3042. return false;
  3043. }
  3044. iSEM.SetStageDeltaR(degree);
  3045. while (true)
  3046. {
  3047. Thread.Sleep(4000);
  3048. if (iSEM.GetStageIs() == 0)
  3049. {
  3050. break;
  3051. }
  3052. }
  3053. if (!iSEM.SetStageGotoZ(Zpos))
  3054. {
  3055. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  3056. return false;
  3057. }
  3058. while (true)
  3059. {
  3060. Thread.Sleep(4000);
  3061. if (iSEM.GetStageIs() == 0)
  3062. {
  3063. break;
  3064. }
  3065. }
  3066. //判断是否停止进程
  3067. if (key_stop)
  3068. {
  3069. LogManager.AddHardwareLog("停止键按下", true);
  3070. return false;
  3071. }
  3072. //4、设置WD
  3073. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3074. Thread.Sleep(1000);
  3075. }
  3076. arg.Message = "拉直操作完成";
  3077. arg.State = true;
  3078. SendMsg("1-5");
  3079. return true;
  3080. }
  3081. //角度补偿
  3082. public bool TiltCorrection(float a_fAngle)
  3083. {
  3084. if (!iSEM.SetTiltAngleOn())
  3085. {
  3086. return false;
  3087. }
  3088. Thread.Sleep(200);
  3089. //恢复原始状态
  3090. if (!iSEM.SetTiltAngle(a_fAngle))
  3091. {
  3092. return false;
  3093. }
  3094. return true;
  3095. }
  3096. //拍图
  3097. public bool GetImage(String a_fileName)
  3098. {
  3099. LogManager.AddHardwareLog("获取分辨率开始!", true);
  3100. //3. 获取分辨率
  3101. int[] ImageSize = iSEM.GetImageStore();
  3102. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3103. {
  3104. return false;
  3105. }
  3106. short width = (short)ImageSize[0];
  3107. short height = (short)ImageSize[1];
  3108. LogManager.AddHardwareLog("获取分辨率结束!"+ a_fileName +"===="+ width+ "*"+height, true);
  3109. //4. 抓图
  3110. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  3111. {
  3112. LogManager.AddHardwareLog("抓图失败!", true);
  3113. return false;
  3114. }
  3115. return true;
  3116. }
  3117. //拍图1
  3118. public bool GetImage1(String a_fileName)
  3119. {
  3120. //3. 获取分辨率
  3121. int[] ImageSize = iSEM.GetImageStore();
  3122. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3123. {
  3124. return false;
  3125. }
  3126. short width = (short)ImageSize[0];
  3127. short height = (short)ImageSize[1];
  3128. //4. 抓图
  3129. if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
  3130. {
  3131. return false;
  3132. }
  3133. return true;
  3134. }
  3135. #region 算法设计
  3136. //执行自动对焦
  3137. public bool ImageFocus()
  3138. {
  3139. if (m_measureFile.MParam.FocusMode == 1)//手动
  3140. {
  3141. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3142. {
  3143. }
  3144. else
  3145. {
  3146. return false;
  3147. }
  3148. }
  3149. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3150. {
  3151. //郝工增加自动对焦算法
  3152. //处理文件夹
  3153. if (Directory.Exists(focus_path))
  3154. {
  3155. Directory.Delete(focus_path, true);
  3156. }
  3157. Thread.Sleep(3000);
  3158. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3159. Thread.Sleep(1000);
  3160. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3161. Thread.Sleep(1000);
  3162. //再创建文件夹
  3163. Directory.CreateDirectory(focus_path);
  3164. //1、对焦参数类,2、输出工作距离
  3165. int wd = 0;
  3166. //20201015 根据当前的工作距离重新计算对焦位置
  3167. float currentWd = iSEM.GetWorkingDistance();
  3168. //m_measureFile.MParam.AutoFocus.UP = currentWd * 1000000 - m_measureFile.MParam.AutoFocus.Step;
  3169. //m_measureFile.MParam.AutoFocus.Down = currentWd * 1000000 + m_measureFile.MParam.AutoFocus.Step;
  3170. Thread.Sleep(2000);
  3171. float currentMag = iSEM.GetMagnification();
  3172. Thread.Sleep(2000);
  3173. FocusParam pFoucs = new FocusParam();
  3174. if (currentMag <= m_measureFile.MParam.Photograph_Magnification)
  3175. {
  3176. pFoucs = m_measureFile.MParam.AutoFocus;
  3177. pFoucs.UP = 5050;
  3178. pFoucs.Down = 5150;
  3179. pFoucs.Step = 50;
  3180. pFoucs.fStep = 10;
  3181. pFoucs.Range = 50;
  3182. //4、设置WD
  3183. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3184. Thread.Sleep(1000);
  3185. }
  3186. else
  3187. {
  3188. pFoucs = m_measureFile.MParam.AutoFocus;
  3189. pFoucs.UP = 5000;
  3190. pFoucs.Down = 5200;
  3191. pFoucs.Step = 10;
  3192. pFoucs.fStep = 5;
  3193. pFoucs.Range = 50;
  3194. //4、设置WD
  3195. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3196. Thread.Sleep(1000);
  3197. }
  3198. //LogManager.AddHardwareLog("修改对焦参数", true);
  3199. AutoFocus(pFoucs, out wd);
  3200. LogManager.AddHardwareLog("自动调节算法输出"+ (wd * 0.00000001).ToString(), true);
  3201. //设置工作距离
  3202. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  3203. //设置完工作距离后必须延迟5秒
  3204. Thread.Sleep(5000);
  3205. //处理图片位置
  3206. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3207. }
  3208. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3209. {
  3210. //后期和客户对接接口
  3211. List<string> filenames = new List<string>();
  3212. String retfilename = wr.Img_Auto_Focus(filenames);
  3213. }
  3214. else //蔡司自动对焦
  3215. {
  3216. iSEM.CmdAutoFocusCoarse();
  3217. while (true)
  3218. {
  3219. Thread.Sleep(10000);
  3220. if (0 == iSEM.GetAutoFunction())
  3221. {
  3222. break;
  3223. }
  3224. }
  3225. iSEM.CmdAutoFocusFine();
  3226. while (true)
  3227. {
  3228. Thread.Sleep(10000);
  3229. if (0 == iSEM.GetAutoFunction())
  3230. {
  3231. break;
  3232. }
  3233. }
  3234. }
  3235. return true;
  3236. }
  3237. //执行自动对焦
  3238. public bool ImageFocus1(Boolean Is_Stig)
  3239. {
  3240. if (m_measureFile.MParam.FocusMode == 1)//手动
  3241. {
  3242. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3243. {
  3244. }
  3245. else
  3246. {
  3247. return false;
  3248. }
  3249. }
  3250. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3251. {
  3252. #region 执行蔡司自动对焦程序
  3253. //服务地址
  3254. string snumstr = @"http://192.168.1.101:8123";
  3255. // 调用方法;只对焦不消像散
  3256. if (Is_Stig)
  3257. {
  3258. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);
  3259. if (focusstig != "success")
  3260. {
  3261. LogManager.AddHardwareLog("对焦失败" + focusstig , true);
  3262. return false;
  3263. }
  3264. }
  3265. else
  3266. {
  3267. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);
  3268. if (onlyfocus != "success")
  3269. {
  3270. return false;
  3271. }
  3272. }
  3273. #endregion
  3274. }
  3275. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3276. {
  3277. //后期和客户对接接口
  3278. List<string> filenames = new List<string>();
  3279. String retfilename = wr.Img_Auto_Focus(filenames);
  3280. }
  3281. else //蔡司自动对焦
  3282. {
  3283. iSEM.CmdAutoFocusCoarse();
  3284. while (true)
  3285. {
  3286. Thread.Sleep(10000);
  3287. if (0 == iSEM.GetAutoFunction())
  3288. {
  3289. break;
  3290. }
  3291. }
  3292. iSEM.CmdAutoFocusFine();
  3293. while (true)
  3294. {
  3295. Thread.Sleep(10000);
  3296. if (0 == iSEM.GetAutoFunction())
  3297. {
  3298. break;
  3299. }
  3300. }
  3301. }
  3302. return true;
  3303. }
  3304. //执行自动消像散
  3305. public bool ImageStig()
  3306. {
  3307. if (m_measureFile.MParam.FocusMode == 1)//手动
  3308. {
  3309. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3310. {
  3311. }
  3312. else
  3313. {
  3314. return false;
  3315. }
  3316. }
  3317. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3318. {
  3319. //郝工增加自动对焦算法
  3320. //处理文件夹
  3321. if (Directory.Exists(StigX_path))
  3322. {
  3323. Directory.Delete(StigX_path, true);
  3324. }
  3325. Thread.Sleep(3000);
  3326. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3327. Thread.Sleep(1000);
  3328. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3329. Thread.Sleep(1000);
  3330. //再创建文件夹
  3331. Directory.CreateDirectory(StigX_path);
  3332. //1、对焦参数类,2、输出像散值
  3333. int stigX = 0;
  3334. //根据当前的stigX重新计算像散值
  3335. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3336. //m_measureFile.MParam.AutoStigX.Step = 10; //像散的步长为10
  3337. //m_measureFile.MParam.AutoStigX.UP = currentStigX - m_measureFile.MParam.AutoStigX.Step;
  3338. //m_measureFile.MParam.AutoStigX.Down = currentStigX + m_measureFile.MParam.AutoStigX.Step;
  3339. //设置工作距离
  3340. iSEM.SetAstigmatismX((float)0);
  3341. //设置完工作距离后必须延迟5秒
  3342. Thread.Sleep(5000);
  3343. //LogManager.AddHardwareLog("修改消像散参数", true);
  3344. AutoStig(m_measureFile.MParam.AutoStigX, out stigX);
  3345. LogManager.AddHardwareLog("自动消散算法输出X"+ (stigX * 0.01).ToString(), true);
  3346. //设置工作距离
  3347. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3348. //设置完工作距离后必须延迟5秒
  3349. Thread.Sleep(5000);
  3350. //处理图片位置
  3351. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3352. //处理文件夹
  3353. if (Directory.Exists(StigY_path))
  3354. {
  3355. Directory.Delete(StigY_path, true);
  3356. }
  3357. Thread.Sleep(3000);
  3358. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3359. Thread.Sleep(1000);
  3360. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3361. Thread.Sleep(1000);
  3362. //再创建文件夹
  3363. Directory.CreateDirectory(StigY_path);
  3364. //1、对焦参数类,2、输出像散值
  3365. int stigY = 0;
  3366. //根据当前的stigX重新计算像散值
  3367. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3368. //m_measureFile.MParam.AutoStigY.Step = 10; //像散的步长为10
  3369. //m_measureFile.MParam.AutoStigY.UP = m_measureFile.MParam.AutoStigY.;
  3370. //m_measureFile.MParam.AutoStigY.Down = m_measureFile.MParam.AutoStigY.Step;
  3371. iSEM.SetAstigmatismY((float)0);
  3372. Thread.Sleep(2000);
  3373. LogManager.AddHardwareLog("修改消像散参数", true);
  3374. AutoStig(m_measureFile.MParam.AutoStigY, out stigY);
  3375. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3376. //设置工作距离
  3377. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3378. //设置完工作距离后必须延迟5秒
  3379. Thread.Sleep(5000);
  3380. }
  3381. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3382. {
  3383. //后期和客户对接接口
  3384. List<string> filenames = new List<string>();
  3385. String retfilename = wr.Img_Auto_Focus(filenames);
  3386. }
  3387. else //蔡司自动对焦
  3388. {
  3389. iSEM.CmdAutoFocusCoarse();
  3390. while (true)
  3391. {
  3392. Thread.Sleep(10000);
  3393. if (0 == iSEM.GetAutoFunction())
  3394. {
  3395. break;
  3396. }
  3397. }
  3398. iSEM.CmdAutoFocusFine();
  3399. while (true)
  3400. {
  3401. Thread.Sleep(10000);
  3402. if (0 == iSEM.GetAutoFunction())
  3403. {
  3404. break;
  3405. }
  3406. }
  3407. }
  3408. return true;
  3409. }
  3410. //自动聚焦
  3411. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  3412. {
  3413. a_nWd = 0;
  3414. float wd = iSEM.GetWorkingDistance();
  3415. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3416. if (a_param == null)
  3417. {
  3418. LogManager.AddHardwareLog("空参数", true);
  3419. return false;
  3420. }
  3421. string path = a_param.Path;
  3422. if (!Directory.Exists(path))
  3423. {
  3424. LogManager.AddHardwareLog("文件夹丢失", true);
  3425. return false;
  3426. }
  3427. string path_coarse = a_param.Path + "\\Coarse";
  3428. if (!Directory.Exists(path_coarse))
  3429. {
  3430. Directory.CreateDirectory(path_coarse);
  3431. }
  3432. string path_fine = a_param.Path + "\\Fine";
  3433. if (!Directory.Exists(path_fine))
  3434. {
  3435. Directory.CreateDirectory(path_fine);
  3436. }
  3437. //1. 拍照
  3438. //1.1, 粗拍照
  3439. //1.1.1, 根据参数计算拍照次数
  3440. double nUp = a_param.UP * 100.0 ;
  3441. double nDown = a_param.Down * 100.0;
  3442. double nStep = a_param.Step * 100.0;
  3443. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3444. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3445. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3446. //粗拍照
  3447. for (int i = 0; i < nTimes; i++)
  3448. {
  3449. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  3450. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3451. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3452. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3453. int swd = cWd / 100;
  3454. //SendMsg("wd = " + swd.ToString() +"um");
  3455. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3456. arg.Picture_Information.Picture_FullPath = fileName;
  3457. if (!GetImage(fileName))
  3458. {
  3459. return false;
  3460. }
  3461. //arg.State = true;
  3462. //arg.Message = "自动对焦";
  3463. //SendMsg("0-9");
  3464. //判断是否停止进程
  3465. if (key_stop)
  3466. {
  3467. return false;
  3468. }
  3469. //Thread.Sleep(3000);
  3470. }
  3471. //1.2, 选定细拍照的工作距离
  3472. int CorWd = 510000;
  3473. ChooseBest(path_coarse,out CorWd);
  3474. if (CorWd == -1)
  3475. CorWd = 510000;
  3476. else
  3477. a_nWd = CorWd;
  3478. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3479. //1.3, 细拍照
  3480. if ( (CorWd - a_param.Range * 100.0) <=0)
  3481. {
  3482. return false;
  3483. }
  3484. double nfUp = CorWd - a_param.Range * 100.0;
  3485. double nfStep = a_param.fStep * 100.0;
  3486. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3487. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3488. for (int i = 0; i < nfTimes; i++)
  3489. {
  3490. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3491. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3492. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3493. Thread.Sleep(Convert.ToInt32(cycle_time)+100);
  3494. int swd = cWd / 100;
  3495. //SendMsg("wd = " + swd.ToString() + "um");
  3496. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3497. arg.Picture_Information.Picture_FullPath = fileName;
  3498. if (!GetImage(fileName))
  3499. {
  3500. return false;
  3501. }
  3502. //arg.State = true;
  3503. //arg.Message = "自动对焦";
  3504. //SendMsg("0-9");
  3505. //判断是否停止进程
  3506. if (key_stop)
  3507. {
  3508. return false;
  3509. }
  3510. //Thread.Sleep(2000);
  3511. }
  3512. int fineWd = CorWd;
  3513. ChooseBest(path_fine, out fineWd);
  3514. //SendMsg("wd fine max = " + fineWd.ToString());
  3515. if (fineWd == -1)
  3516. a_nWd = CorWd;
  3517. else
  3518. a_nWd = fineWd;
  3519. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3520. //arg.State = true;
  3521. //arg.Message = "自动对焦";
  3522. //SendMsg(step_code);
  3523. return true;
  3524. }
  3525. //自动聚焦1
  3526. public bool AutoFocus1(FocusParam a_param, out int a_nWd)
  3527. {
  3528. a_nWd = 0;
  3529. float wd = iSEM.GetWorkingDistance();
  3530. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3531. if (a_param == null)
  3532. {
  3533. LogManager.AddHardwareLog("空参数", true);
  3534. return false;
  3535. }
  3536. string path = a_param.Path;
  3537. if (!Directory.Exists(path))
  3538. {
  3539. LogManager.AddHardwareLog("文件夹丢失", true);
  3540. return false;
  3541. }
  3542. string path_coarse = a_param.Path + "\\Coarse";
  3543. if (!Directory.Exists(path_coarse))
  3544. {
  3545. Directory.CreateDirectory(path_coarse);
  3546. }
  3547. string path_fine = a_param.Path + "\\Fine";
  3548. if (!Directory.Exists(path_fine))
  3549. {
  3550. Directory.CreateDirectory(path_fine);
  3551. }
  3552. //1. 拍照
  3553. //1.1, 粗拍照
  3554. //1.1.1, 根据参数计算拍照次数
  3555. double nUp = a_param.UP * 100.0;
  3556. double nDown = a_param.Down * 100.0;
  3557. double nStep = a_param.Step * 100.0;
  3558. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3559. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3560. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3561. //粗拍照
  3562. for (int i = 0; i < nTimes; i++)
  3563. {
  3564. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3565. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3566. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3567. Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
  3568. int swd = cWd / 100;
  3569. //SendMsg("wd = " + swd.ToString() +"um");
  3570. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3571. //arg.Picture_Information.Picture_FullPath = fileName;
  3572. if (!GetImage1(fileName))
  3573. {
  3574. return false;
  3575. }
  3576. //arg.State = true;
  3577. //arg.Message = "自动对焦";
  3578. //SendMsg(step_code);
  3579. //判断是否停止进程
  3580. if (key_stop)
  3581. {
  3582. return false;
  3583. }
  3584. //Thread.Sleep(3000);
  3585. }
  3586. //1.2, 选定细拍照的工作距离
  3587. int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3588. ChooseBest(path_coarse, out CorWd);
  3589. if (CorWd == -1)
  3590. CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3591. else
  3592. a_nWd = CorWd;
  3593. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3594. //1.3, 细拍照
  3595. if ((CorWd - a_param.Range * 100.0) <= 0)
  3596. {
  3597. return false;
  3598. }
  3599. double nfUp = CorWd - a_param.Range * 100.0;
  3600. double nfStep = a_param.fStep * 100.0;
  3601. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3602. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3603. for (int i = 0; i < nfTimes; i++)
  3604. {
  3605. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3606. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3607. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3608. Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
  3609. int swd = cWd / 100;
  3610. //SendMsg("wd = " + swd.ToString() + "um");
  3611. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3612. //arg.Picture_Information.Picture_FullPath = fileName;
  3613. if (!GetImage1(fileName))
  3614. {
  3615. return false;
  3616. }
  3617. //arg.State = true;
  3618. //arg.Message = "自动对焦";
  3619. //SendMsg(step_code);
  3620. //判断是否停止进程
  3621. if (key_stop)
  3622. {
  3623. return false;
  3624. }
  3625. //Thread.Sleep(2000);
  3626. }
  3627. int fineWd = CorWd;
  3628. ChooseBest(path_fine, out fineWd);
  3629. //SendMsg("wd fine max = " + fineWd.ToString());
  3630. if (fineWd == -1)
  3631. a_nWd = CorWd;
  3632. else
  3633. a_nWd = fineWd;
  3634. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3635. //arg.State = true;
  3636. //arg.Message = "自动对焦";
  3637. //SendMsg("0-9");
  3638. return true;
  3639. }
  3640. //自动消像散 AutoStig
  3641. public bool AutoStig(FocusParam a_param, out int a_nWd)
  3642. {
  3643. a_nWd = 0;
  3644. float wd = 0;
  3645. if (a_param.TYPE == 2)
  3646. {
  3647. wd = iSEM.GetAstigmatismX();
  3648. }
  3649. else if (a_param.TYPE == 3)
  3650. {
  3651. wd = iSEM.GetAstigmatismY();
  3652. }
  3653. else
  3654. {
  3655. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3656. return false;
  3657. }
  3658. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3659. if (a_param == null)
  3660. {
  3661. LogManager.AddHardwareLog("空参数", true);
  3662. return false;
  3663. }
  3664. string path = a_param.Path;
  3665. if (!Directory.Exists(path))
  3666. {
  3667. LogManager.AddHardwareLog("文件夹丢失", true);
  3668. return false;
  3669. }
  3670. string path_coarse = a_param.Path + "\\Coarse";
  3671. if (!Directory.Exists(path_coarse))
  3672. {
  3673. Directory.CreateDirectory(path_coarse);
  3674. }
  3675. string path_fine = a_param.Path + "\\Fine";
  3676. if (!Directory.Exists(path_fine))
  3677. {
  3678. Directory.CreateDirectory(path_fine);
  3679. }
  3680. //1. 拍照
  3681. //1.1, 粗拍照
  3682. //1.1.1, 根据参数计算拍照次数
  3683. double nUp = a_param.UP * 100.0;
  3684. double nDown = a_param.Down * 100.0;
  3685. double nStep = a_param.Step * 100.0;
  3686. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3687. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3688. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3689. //粗拍照
  3690. for (int i = 0; i < nTimes; i++)
  3691. {
  3692. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3693. if (a_param.TYPE == 2)
  3694. {
  3695. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3696. }
  3697. else if (a_param.TYPE == 3)
  3698. {
  3699. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3700. }
  3701. else
  3702. {
  3703. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3704. return false;
  3705. }
  3706. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3707. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3708. int swd = cWd / 100;
  3709. //SendMsg("wd = " + swd.ToString() +"um");
  3710. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3711. arg.Picture_Information.Picture_FullPath = fileName;
  3712. if (!GetImage(fileName))
  3713. {
  3714. return false;
  3715. }
  3716. arg.State = true;
  3717. arg.Message = "自动像散";
  3718. SendMsg("0-8");
  3719. //判断是否停止进程
  3720. if (key_stop)
  3721. {
  3722. return false;
  3723. }
  3724. //Thread.Sleep(3000);
  3725. }
  3726. //1.2, 选定细拍照的工作距离
  3727. int CorWd;
  3728. ChooseBest(path_coarse, out CorWd);
  3729. if (CorWd == -1)
  3730. {
  3731. a_nWd = 0;
  3732. }
  3733. else
  3734. {
  3735. a_nWd = CorWd;
  3736. }
  3737. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3738. //1.3, 细拍照
  3739. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3740. {
  3741. return false;
  3742. }
  3743. double nfUp = 0;
  3744. if (a_param.Range >= 0)
  3745. nfUp = CorWd - a_param.Range * 100.0;
  3746. else
  3747. nfUp = CorWd + a_param.Range * 100.0;
  3748. double nfStep = a_param.fStep * 100.0;
  3749. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3750. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3751. for (int i = 0; i < nfTimes; i++)
  3752. {
  3753. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3754. if (a_param.TYPE == 2)
  3755. {
  3756. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3757. }
  3758. else if (a_param.TYPE == 3)
  3759. {
  3760. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3761. }
  3762. else
  3763. {
  3764. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3765. return false;
  3766. }
  3767. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3768. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3769. int swd = cWd / 100;
  3770. //SendMsg("wd = " + swd.ToString() + "um");
  3771. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3772. arg.Picture_Information.Picture_FullPath = fileName;
  3773. if (!GetImage(fileName))
  3774. {
  3775. return false;
  3776. }
  3777. arg.State = true;
  3778. arg.Message = "自动像散";
  3779. SendMsg("0-8");
  3780. //判断是否停止进程
  3781. if (key_stop)
  3782. {
  3783. return false;
  3784. }
  3785. //Thread.Sleep(2000);
  3786. }
  3787. int fineWd = CorWd;
  3788. ChooseBest(path_fine, out fineWd);
  3789. //SendMsg("wd fine max = " + fineWd.ToString());
  3790. if(fineWd == -1)
  3791. a_nWd = CorWd;
  3792. else
  3793. a_nWd = fineWd;
  3794. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3795. //arg.State = true;
  3796. //arg.Message = "自动像散";
  3797. //SendMsg(step_code);
  3798. return true;
  3799. }
  3800. //执行自动消像散1
  3801. public bool ImageStig1()
  3802. {
  3803. if (m_measureFile.MParam.FocusMode == 1)//手动
  3804. {
  3805. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3806. {
  3807. }
  3808. else
  3809. {
  3810. return false;
  3811. }
  3812. }
  3813. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3814. {
  3815. //郝工增加自动对焦算法
  3816. //处理文件夹
  3817. if (Directory.Exists(StigX_path))
  3818. {
  3819. Directory.Delete(StigX_path, true);
  3820. }
  3821. Thread.Sleep(3000);
  3822. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3823. Thread.Sleep(200);
  3824. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3825. Thread.Sleep(200);
  3826. //再创建文件夹
  3827. Directory.CreateDirectory(StigX_path);
  3828. //1、对焦参数类,2、输出像散值
  3829. int stigX = 0;
  3830. //根据当前的stigX重新计算像散值
  3831. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3832. //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
  3833. //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
  3834. //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
  3835. //设置工作距离
  3836. currentStigX = iSEM.GetAstigmatismX();
  3837. Thread.Sleep(1000);
  3838. FocusParam pFocus = new FocusParam();
  3839. pFocus = m_measureFile.MParam.AutoStigX;
  3840. float old_up = m_measureFile.MParam.AutoStigX.UP;
  3841. float old_down = m_measureFile.MParam.AutoStigX.Down;
  3842. float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3843. pFocus.UP = currentStigX - setvalue;
  3844. pFocus.Down = currentStigX + setvalue;
  3845. //m_measureFile.MParam.AutoStigX.Step = 1;
  3846. //m_measureFile.MParam.AutoStigX.Range = (float)0.5;
  3847. //m_measureFile.MParam.AutoStigX.fStep = (float)0.1;
  3848. LogManager.AddHardwareLog("消像散参数: up = "+pFocus.UP+",down = " + pFocus.Down+ ",step =" + pFocus.Step + ",rang ="+ pFocus.Range + ",fstep = " + pFocus.fStep, true);
  3849. //LogManager.AddHardwareLog("修改消像散参数", true);
  3850. AutoStig1(pFocus, out stigX);
  3851. m_measureFile.MParam.AutoStigX.UP = old_up;
  3852. m_measureFile.MParam.AutoStigX.Down = old_down;
  3853. LogManager.AddHardwareLog("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3854. //设置工作距离
  3855. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3856. //设置完工作距离后必须延迟5秒
  3857. Thread.Sleep(5000);
  3858. //处理图片位置
  3859. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3860. //处理文件夹
  3861. if (Directory.Exists(StigY_path))
  3862. {
  3863. Directory.Delete(StigY_path, true);
  3864. }
  3865. Thread.Sleep(3000);
  3866. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3867. Thread.Sleep(200);
  3868. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3869. Thread.Sleep(200);
  3870. //再创建文件夹
  3871. Directory.CreateDirectory(StigY_path);
  3872. //1、对焦参数类,2、输出像散值
  3873. int stigY = 0;
  3874. //根据当前的stigX重新计算像散值
  3875. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3876. //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
  3877. //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
  3878. //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
  3879. currentStigY = iSEM.GetAstigmatismY();
  3880. Thread.Sleep(1000);
  3881. //m_measureFile.MParam.AutoStigY.UP = currentStigY - setvalue;
  3882. //m_measureFile.MParam.AutoStigY.Down = currentStigY + setvalue;
  3883. //m_measureFile.MParam.AutoStigY.Step = 1;
  3884. //m_measureFile.MParam.AutoStigY.Range = (float)0.5;
  3885. //m_measureFile.MParam.AutoStigY.fStep = (float)0.1;
  3886. FocusParam pFocusY = new FocusParam();
  3887. pFocusY = m_measureFile.MParam.AutoStigY;
  3888. float old_upY = m_measureFile.MParam.AutoStigY.UP;
  3889. float old_downY = m_measureFile.MParam.AutoStigY.Down;
  3890. //float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3891. pFocusY.UP = currentStigY - setvalue;
  3892. pFocusY.Down = currentStigY + setvalue;
  3893. LogManager.AddHardwareLog("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
  3894. AutoStig1(pFocusY, out stigY);
  3895. m_measureFile.MParam.AutoStigY.UP = old_upY;
  3896. m_measureFile.MParam.AutoStigY.Down = old_downY;
  3897. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3898. //设置工作距离
  3899. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3900. //设置完工作距离后必须延迟5秒
  3901. Thread.Sleep(5000);
  3902. }
  3903. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3904. {
  3905. //后期和客户对接接口
  3906. List<string> filenames = new List<string>();
  3907. String retfilename = wr.Img_Auto_Focus(filenames);
  3908. }
  3909. else //蔡司自动对焦
  3910. {
  3911. iSEM.CmdAutoFocusCoarse();
  3912. while (true)
  3913. {
  3914. Thread.Sleep(10000);
  3915. if (0 == iSEM.GetAutoFunction())
  3916. {
  3917. break;
  3918. }
  3919. }
  3920. iSEM.CmdAutoFocusFine();
  3921. while (true)
  3922. {
  3923. Thread.Sleep(10000);
  3924. if (0 == iSEM.GetAutoFunction())
  3925. {
  3926. break;
  3927. }
  3928. }
  3929. }
  3930. return true;
  3931. }
  3932. //自动消像散 AutoStig1
  3933. public bool AutoStig1(FocusParam a_param, out int a_nWd)
  3934. {
  3935. a_nWd = 0;
  3936. float wd = 0;
  3937. if (a_param.TYPE == 2)
  3938. {
  3939. wd = iSEM.GetAstigmatismX();
  3940. }
  3941. else if (a_param.TYPE == 3)
  3942. {
  3943. wd = iSEM.GetAstigmatismY();
  3944. }
  3945. else
  3946. {
  3947. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3948. return false;
  3949. }
  3950. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3951. if (a_param == null)
  3952. {
  3953. LogManager.AddHardwareLog("空参数", true);
  3954. return false;
  3955. }
  3956. string path = a_param.Path;
  3957. if (!Directory.Exists(path))
  3958. {
  3959. LogManager.AddHardwareLog("文件夹丢失", true);
  3960. return false;
  3961. }
  3962. string path_coarse = a_param.Path + "\\Coarse";
  3963. if (!Directory.Exists(path_coarse))
  3964. {
  3965. Directory.CreateDirectory(path_coarse);
  3966. }
  3967. string path_fine = a_param.Path + "\\Fine";
  3968. if (!Directory.Exists(path_fine))
  3969. {
  3970. Directory.CreateDirectory(path_fine);
  3971. }
  3972. //1. 拍照
  3973. //1.1, 粗拍照
  3974. //1.1.1, 根据参数计算拍照次数
  3975. double nUp = a_param.UP * 100.0;
  3976. double nDown = a_param.Down * 100.0;
  3977. double nStep = a_param.Step * 100.0;
  3978. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3979. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3980. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3981. //粗拍照
  3982. for (int i = 0; i < nTimes; i++)
  3983. {
  3984. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3985. if (a_param.TYPE == 2)
  3986. {
  3987. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3988. }
  3989. else if (a_param.TYPE == 3)
  3990. {
  3991. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3992. }
  3993. else
  3994. {
  3995. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3996. return false;
  3997. }
  3998. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3999. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4000. int swd = cWd / 100;
  4001. //SendMsg("wd = " + swd.ToString() +"um");
  4002. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4003. arg.Picture_Information.Picture_FullPath = fileName;
  4004. if (!GetImage1(fileName))
  4005. {
  4006. return false;
  4007. }
  4008. //arg.State = true;
  4009. //arg.Message = "自动像散";
  4010. //SendMsg(step_code);
  4011. //判断是否停止进程
  4012. if (key_stop)
  4013. {
  4014. return false;
  4015. }
  4016. //Thread.Sleep(3000);
  4017. }
  4018. //1.2, 选定细拍照的工作距离
  4019. int CorWd;
  4020. ChooseBest(path_coarse, out CorWd);
  4021. if (CorWd == -1)
  4022. {
  4023. a_nWd = 0;
  4024. }
  4025. else
  4026. {
  4027. a_nWd = CorWd;
  4028. }
  4029. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4030. //1.3, 细拍照
  4031. if ((CorWd - a_param.Range * 100.0) <= -10000)
  4032. {
  4033. return false;
  4034. }
  4035. double nfUp = 0;
  4036. if (a_param.Range >= 0)
  4037. nfUp = CorWd - a_param.Range * 100.0;
  4038. else
  4039. nfUp = CorWd + a_param.Range * 100.0;
  4040. double nfStep = a_param.fStep * 100.0;
  4041. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4042. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4043. for (int i = 0; i < nfTimes; i++)
  4044. {
  4045. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4046. if (a_param.TYPE == 2)
  4047. {
  4048. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  4049. }
  4050. else if (a_param.TYPE == 3)
  4051. {
  4052. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  4053. }
  4054. else
  4055. {
  4056. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4057. return false;
  4058. }
  4059. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4060. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4061. int swd = cWd / 100;
  4062. //SendMsg("wd = " + swd.ToString() + "um");
  4063. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4064. arg.Picture_Information.Picture_FullPath = fileName;
  4065. if (!GetImage1(fileName))
  4066. {
  4067. return false;
  4068. }
  4069. //arg.State = true;
  4070. //arg.Message = "自动像散";
  4071. //SendMsg(step_code);
  4072. //判断是否停止进程
  4073. if (key_stop)
  4074. {
  4075. return false;
  4076. }
  4077. //Thread.Sleep(2000);
  4078. }
  4079. int fineWd = CorWd;
  4080. ChooseBest(path_fine, out fineWd);
  4081. //SendMsg("wd fine max = " + fineWd.ToString());
  4082. if (fineWd == -1)
  4083. a_nWd = CorWd;
  4084. else
  4085. a_nWd = fineWd;
  4086. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4087. //arg.State = true;
  4088. //arg.Message = "自动像散";
  4089. //SendMsg("0-9");
  4090. return true;
  4091. }
  4092. //自动FIB对焦 AutoFIBFocus
  4093. public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
  4094. {
  4095. a_nWd = 0;
  4096. float wd = 0;
  4097. if (a_param.TYPE == 4)
  4098. {
  4099. wd = iSEM.GetFIBObjectivePotential();
  4100. }
  4101. else
  4102. {
  4103. LogManager.AddHardwareLog("FIB自动聚焦参数设置有误", true);
  4104. return false;
  4105. }
  4106. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  4107. if (a_param == null)
  4108. {
  4109. LogManager.AddHardwareLog("空参数", true);
  4110. return false;
  4111. }
  4112. string path = a_param.Path;
  4113. if (!Directory.Exists(path))
  4114. {
  4115. LogManager.AddHardwareLog("文件夹丢失", true);
  4116. return false;
  4117. }
  4118. string path_coarse = a_param.Path + "\\Coarse";
  4119. if (!Directory.Exists(path_coarse))
  4120. {
  4121. Directory.CreateDirectory(path_coarse);
  4122. }
  4123. string path_fine = a_param.Path + "\\Fine";
  4124. if (!Directory.Exists(path_fine))
  4125. {
  4126. Directory.CreateDirectory(path_fine);
  4127. }
  4128. //1. 拍照
  4129. //1.1, 粗拍照
  4130. //1.1.1, 根据参数计算拍照次数
  4131. double nUp = a_param.UP * 100.0;
  4132. double nDown = a_param.Down * 100.0;
  4133. double nStep = a_param.Step * 100.0;
  4134. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  4135. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  4136. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  4137. //粗拍照
  4138. for (int i = 0; i < nTimes; i++)
  4139. {
  4140. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  4141. if (a_param.TYPE == 4)
  4142. {
  4143. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4144. }
  4145. else
  4146. {
  4147. LogManager.AddHardwareLog("FIB对焦参数设置有误,对焦类型错", true);
  4148. return false;
  4149. }
  4150. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4151. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4152. int swd = cWd / 100;
  4153. //SendMsg("wd = " + swd.ToString() +"um");
  4154. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4155. arg.Picture_Information.Picture_FullPath = fileName;
  4156. if (!GetImage(fileName))
  4157. {
  4158. return false;
  4159. }
  4160. arg.State = true;
  4161. arg.Message = "FIB自动对焦";
  4162. SendMsg(step_code);
  4163. //判断是否停止进程
  4164. if (key_stop)
  4165. {
  4166. return false;
  4167. }
  4168. //Thread.Sleep(3000);
  4169. }
  4170. //1.2, 选定细拍照的工作距离
  4171. int CorWd;
  4172. ChooseBest(path_coarse, out CorWd);
  4173. a_nWd = CorWd;
  4174. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4175. //1.3, 细拍照
  4176. if ((CorWd - a_param.Range * 100.0) <0)
  4177. {
  4178. return false;
  4179. }
  4180. double nfUp = CorWd - a_param.Range * 100.0;
  4181. double nfStep = a_param.fStep * 100.0;
  4182. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4183. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4184. for (int i = 0; i < nfTimes; i++)
  4185. {
  4186. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4187. if (a_param.TYPE == 4)
  4188. {
  4189. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4190. }
  4191. else
  4192. {
  4193. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4194. return false;
  4195. }
  4196. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4197. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4198. int swd = cWd / 100;
  4199. //SendMsg("wd = " + swd.ToString() + "um");
  4200. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4201. arg.Picture_Information.Picture_FullPath = fileName;
  4202. if (!GetImage(fileName))
  4203. {
  4204. return false;
  4205. }
  4206. arg.State = true;
  4207. arg.Message = "FIB自动对焦";
  4208. SendMsg(step_code);
  4209. //判断是否停止进程
  4210. if (key_stop)
  4211. {
  4212. return false;
  4213. }
  4214. //Thread.Sleep(2000);
  4215. }
  4216. int fineWd;
  4217. ChooseBest(path_fine, out fineWd);
  4218. //SendMsg("wd fine max = " + fineWd.ToString());
  4219. a_nWd = fineWd;
  4220. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4221. return true;
  4222. }
  4223. //LoG算子计算
  4224. private double LoGMean(string a_strImgPath)
  4225. {
  4226. //读入Img文件
  4227. if (!File.Exists(a_strImgPath))
  4228. {
  4229. return 0;
  4230. }
  4231. Mat src, gray_src;
  4232. int kernel_size = 3;
  4233. src = Cv2.ImRead(a_strImgPath);
  4234. gray_src = new Mat();
  4235. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4236. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4237. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4238. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4239. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  4240. Cv2.ConvertScaleAbs(src, src);
  4241. //图像的平均灰度
  4242. double meanValue = 0.0;
  4243. meanValue = Cv2.Mean(src)[0];
  4244. return meanValue;
  4245. }
  4246. //梯度计算
  4247. private double Tenengrad(string a_strImgPath)
  4248. {
  4249. //读入Img文件
  4250. if (!File.Exists(a_strImgPath))
  4251. {
  4252. return 0;
  4253. }
  4254. Mat src;
  4255. src = Cv2.ImRead(a_strImgPath);
  4256. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4257. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4258. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4259. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4260. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  4261. //图像的平均灰度
  4262. double meanValue = 0.0;
  4263. meanValue = Cv2.Mean(src)[0];
  4264. return meanValue;
  4265. }
  4266. //梯度计算
  4267. private double TTgrad(string a_strImgPath)
  4268. {
  4269. //读入Img文件
  4270. if (!File.Exists(a_strImgPath))
  4271. {
  4272. return 0;
  4273. }
  4274. Mat src;
  4275. src = Cv2.ImRead(a_strImgPath);
  4276. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4277. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4278. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4279. Mat scalex = new Mat();
  4280. Mat scaley = new Mat();
  4281. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  4282. Cv2.ConvertScaleAbs(src, scalex);
  4283. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  4284. Cv2.ConvertScaleAbs(src, scaley);
  4285. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  4286. //图像的平均灰度
  4287. double meanValue = 0.0;
  4288. meanValue = Cv2.Mean(src)[0];
  4289. return meanValue;
  4290. }
  4291. //三选二算法
  4292. private bool ChooseBest(string a_strImgPath, out int a_nWd)
  4293. {
  4294. a_nWd = -1;
  4295. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  4296. float[] values = new float[files.Length];
  4297. double smax1 = LoGMean(files[0]);
  4298. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  4299. double smax2 = Tenengrad(files[0]);
  4300. int wdmax2 = wdmax1;
  4301. double smax3 = TTgrad(files[0]);
  4302. int wdmax3 = wdmax1;
  4303. int x = 0;
  4304. foreach (var file in files)
  4305. {
  4306. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  4307. double svalue1 = LoGMean(file);
  4308. double svalue2 = Tenengrad(file);
  4309. double svalue3 = TTgrad(file);
  4310. if (smax1 < svalue1)
  4311. {
  4312. smax1 = svalue1;
  4313. wdmax1 = wd;
  4314. }
  4315. if (smax2 < svalue2)
  4316. {
  4317. smax2 = svalue2;
  4318. wdmax2 = wd;
  4319. }
  4320. if (smax3 < svalue3)
  4321. {
  4322. smax3 = svalue3;
  4323. wdmax3 = wd;
  4324. }
  4325. x++;
  4326. }
  4327. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  4328. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  4329. {
  4330. a_nWd = wdmax1;
  4331. //SendMsg("焦距 = " + wdmax1.ToString());
  4332. }
  4333. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  4334. {
  4335. a_nWd = wdmax2;
  4336. //SendMsg("焦距 = " + wdmax2.ToString());
  4337. }
  4338. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  4339. {
  4340. a_nWd = wdmax3;
  4341. //SendMsg("焦距 = " + wdmax3.ToString());
  4342. }
  4343. else
  4344. {
  4345. //SendMsg("对焦失败。");
  4346. return false;
  4347. }
  4348. return true;
  4349. }
  4350. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  4351. bool MoveToPixByMoveStage(float xc, float yc)
  4352. {
  4353. //单位是m/pix
  4354. float XpixSize = iSEM.GetPixelSize();
  4355. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4356. float YpixSize = iSEM.GetPixelSize();///(float)m_measureFile.MParam.PixelSizeCor);
  4357. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4358. Thread.Sleep(500);
  4359. //0:width, 1:height
  4360. int[] imageSize = iSEM.GetImageStore();
  4361. int width = imageSize[0] / 2;
  4362. int height = imageSize[1] / 2;
  4363. LogManager.AddHardwareLog("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4364. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4365. float deltX = (xc - (float)width) * XpixSize;
  4366. float deltY = (yc - (float)height) * YpixSize;
  4367. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4368. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4369. float xpCur = iSEM.GetStageAtX();
  4370. float ypCur = iSEM.GetStageAtY();
  4371. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4372. float xpNew = xpCur - deltX;
  4373. float ypNew = ypCur + deltY;
  4374. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4375. //计算光束偏移值:
  4376. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  4377. {
  4378. LogManager.AddHardwareLog("X方向移动样品台", true);
  4379. if (!iSEM.SetStageGotoX(xpNew))
  4380. {
  4381. return false;
  4382. }
  4383. //判断是否移动完成
  4384. while (true)
  4385. {
  4386. Thread.Sleep(5000);
  4387. if (iSEM.GetStageIs() == 0)
  4388. {
  4389. break;
  4390. }
  4391. }
  4392. }
  4393. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  4394. {
  4395. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4396. if (!iSEM.SetStageGotoY(ypNew))
  4397. {
  4398. return false;
  4399. }
  4400. //判断是否移动完成
  4401. while (true)
  4402. {
  4403. Thread.Sleep(5000);
  4404. if (iSEM.GetStageIs() == 0)
  4405. {
  4406. break;
  4407. }
  4408. }
  4409. }
  4410. return true;
  4411. }
  4412. //移动到像素位置
  4413. bool MoveToPix(float xc, float yc)
  4414. {
  4415. //单位是m/pix
  4416. float XpixSize = iSEM.GetPixelSize();
  4417. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel",true);
  4418. float YpixSize = (XpixSize/(float)m_measureFile.MParam.PixelSizeCor);
  4419. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4420. Thread.Sleep(200);
  4421. //0:width, 1:height
  4422. int[] imageSize = iSEM.GetImageStore();
  4423. int width = imageSize[0]/2;
  4424. int height = imageSize[1]/2;
  4425. LogManager.AddHardwareLog("目标像素是(" + xc.ToString()+ ","+ yc.ToString() + ")", true);
  4426. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4427. float deltX = (xc - (float)width) * XpixSize;
  4428. float deltY = (yc - (float)height) * YpixSize;
  4429. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4430. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4431. float xpCur = iSEM.GetStageAtX();
  4432. Thread.Sleep(200);
  4433. float ypCur = iSEM.GetStageAtY();
  4434. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString()+ "," + ypCur.ToString() + "),单位m", true);
  4435. float xpNew = xpCur - deltX;
  4436. float ypNew = ypCur + deltY;
  4437. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4438. //计算最大偏移量
  4439. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4440. Thread.Sleep(200);
  4441. iSEM.SetBeamShiftX(100);
  4442. Thread.Sleep(200);
  4443. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4444. Thread.Sleep(200);
  4445. iSEM.SetBeamShiftX(beamXCur);
  4446. Thread.Sleep(200);
  4447. //计算光束偏移值:
  4448. float beamX = iSEM.GetBeamOffsetX();
  4449. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4450. beamX = (-deltX + beamX);
  4451. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4452. if( ((beamX <= beamXMax) && (beamX >=0)) ||
  4453. ((beamX >= -beamXMax)&& (beamX < 0)))
  4454. {
  4455. LogManager.AddHardwareLog("X方向移动光束", true);
  4456. float beamXShift = beamX * 100 / beamXMax;
  4457. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  4458. if (!iSEM.SetBeamShiftX(beamXShift))
  4459. //if (!iSEM.SetBeamOffsetX(beamX))
  4460. {
  4461. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4462. return false;
  4463. }
  4464. }
  4465. else if(deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4466. {
  4467. LogManager.AddHardwareLog("X方向移动样品台", true);
  4468. if (!iSEM.SetStageGotoX(xpNew))
  4469. {
  4470. return false;
  4471. }
  4472. //判断是否移动完成
  4473. while (true)
  4474. {
  4475. Thread.Sleep(4000);
  4476. if (iSEM.GetStageIs() == 0)
  4477. {
  4478. break;
  4479. }
  4480. }
  4481. }
  4482. float beamY = iSEM.GetBeamOffsetY();
  4483. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4484. beamY = (-deltY + beamY);
  4485. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4486. //计算最大偏移量
  4487. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4488. Thread.Sleep(200);
  4489. iSEM.SetBeamShiftY(100);
  4490. Thread.Sleep(200);
  4491. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4492. Thread.Sleep(200);
  4493. iSEM.SetBeamShiftY(beamYCur);
  4494. Thread.Sleep(200);
  4495. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  4496. ((beamY >= -beamYMax) && (beamY < 0)))
  4497. {
  4498. LogManager.AddHardwareLog("Y方向移动光束", true);
  4499. float beamYShift = beamY * 100 / beamYMax;
  4500. LogManager.AddHardwareLog("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  4501. //if(!iSEM.SetBeamOffsetY(beamY))
  4502. if (!iSEM.SetBeamShiftY(beamYShift))
  4503. {
  4504. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4505. return false;
  4506. }
  4507. }
  4508. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4509. {
  4510. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4511. if (!iSEM.SetStageGotoY(ypNew))
  4512. {
  4513. return false;
  4514. }
  4515. //判断是否移动完成
  4516. while (true)
  4517. {
  4518. Thread.Sleep(4000);
  4519. if (iSEM.GetStageIs() == 0)
  4520. {
  4521. break;
  4522. }
  4523. }
  4524. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4525. //arg.State = true;
  4526. //SendMsg("1-7");
  4527. }
  4528. return true;
  4529. }
  4530. //自动亮度对比度调节
  4531. //自动亮度对比度
  4532. public bool AutoBC(String step)
  4533. {
  4534. arg.Message = "自动亮度对比度";
  4535. arg.State = true;
  4536. SendMsg("1-10");
  4537. iSEM.SetAutoBright(100);
  4538. iSEM.SetAutoContrast(100);
  4539. //LogManager.AddHardwareLog("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
  4540. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  4541. {
  4542. LogManager.AddHardwareLog("开始设置自动亮度、对比度失败,程序退出。", true);
  4543. return false;
  4544. }
  4545. Thread.Sleep(5000);
  4546. int i = 0;
  4547. float bright = iSEM.GetBrightness();
  4548. float contrast = iSEM.GetContrast();
  4549. //最多调节30s,30s没调节好,认为调节失败
  4550. for (i = 0; i < 5; i++)
  4551. {
  4552. bright = iSEM.GetBrightness();
  4553. contrast = iSEM.GetContrast();
  4554. if ((bright >= 40 && bright <= 60)
  4555. && (contrast >= 35 && contrast <= 40))
  4556. break;
  4557. Thread.Sleep(5000);
  4558. }
  4559. bright = iSEM.GetBrightness();
  4560. contrast = iSEM.GetContrast();
  4561. if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
  4562. && i == 5)
  4563. {
  4564. LogManager.AddHardwareLog("亮度对比度调节时间过长", true);
  4565. return false;
  4566. }
  4567. iSEM.SetAutoBright(100);
  4568. iSEM.SetAutoContrast(100);
  4569. //LogManager.AddHardwareLog("SEM模式自动亮度目标50,自动对比度目标30.", true);
  4570. return true;
  4571. }
  4572. //执行FIB自动对焦,FIBFocus
  4573. //执行自动消像散
  4574. public bool FIBFocus(String step_code)
  4575. {
  4576. if (m_measureFile.MParam.FocusMode == 1)//手动
  4577. {
  4578. if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  4579. {
  4580. }
  4581. else
  4582. {
  4583. return false;
  4584. }
  4585. }
  4586. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  4587. {
  4588. //郝工增加自动对焦算法
  4589. //处理文件夹
  4590. if (Directory.Exists(FIBfocus_path))
  4591. {
  4592. Directory.Delete(FIBfocus_path, true);
  4593. }
  4594. Thread.Sleep(3000);
  4595. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  4596. Thread.Sleep(1000);
  4597. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  4598. Thread.Sleep(1000);
  4599. //再创建文件夹
  4600. Directory.CreateDirectory(FIBfocus_path);
  4601. //1、对焦参数类,2、输出对焦值
  4602. int FIBFocus = 0;
  4603. //根据当前的stigX重新计算像散值
  4604. float currentFIBFocus = iSEM.GetFIBObjectivePotential();
  4605. //m_measureFile.MParam.FIBFocus.Step = 10; //像散的步长为10
  4606. m_measureFile.MParam.FIBFocus.UP = currentFIBFocus - m_measureFile.MParam.FIBFocus.Step;
  4607. m_measureFile.MParam.FIBFocus.Down = currentFIBFocus + m_measureFile.MParam.FIBFocus.Step;
  4608. LogManager.AddHardwareLog("修改FIB自动对焦参数", true);
  4609. AutoFIBFocus(m_measureFile.MParam.FIBFocus, out FIBFocus, step_code);
  4610. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  4611. //设置工作距离
  4612. iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
  4613. //设置完工作距离后必须延迟5秒
  4614. Thread.Sleep(5000);
  4615. //处理图片位置
  4616. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  4617. }
  4618. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  4619. {
  4620. //后期和客户对接接口
  4621. List<string> filenames = new List<string>();
  4622. String retfilename = wr.Img_Auto_Focus(filenames);
  4623. }
  4624. else //蔡司自动对焦
  4625. {
  4626. iSEM.CmdAutoFocusCoarse();
  4627. while (true)
  4628. {
  4629. Thread.Sleep(10000);
  4630. if (0 == iSEM.GetAutoFunction())
  4631. {
  4632. break;
  4633. }
  4634. }
  4635. iSEM.CmdAutoFocusFine();
  4636. while (true)
  4637. {
  4638. Thread.Sleep(10000);
  4639. if (0 == iSEM.GetAutoFunction())
  4640. {
  4641. break;
  4642. }
  4643. }
  4644. }
  4645. return true;
  4646. }
  4647. /// 图像拉直算法
  4648. /// </summary>
  4649. /// <param name="Slope">倾斜角度</param>
  4650. /// <param name="x0">圆心坐标x</param>
  4651. /// <param name="y0">圆心坐标y</param>
  4652. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  4653. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  4654. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  4655. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  4656. /// <returns></returns>
  4657. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  4658. {
  4659. try
  4660. {
  4661. float xr = x1 - x0;//倾斜图到中心的距离差x
  4662. float yr = y1 - y0;//倾斜图到中心的距离差y
  4663. float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  4664. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  4665. float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
  4666. float k_S = k - Slope;//通过夹角差求x2,y2
  4667. //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  4668. //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  4669. float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
  4670. float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
  4671. if (Slope > 0 || Slope < 0)
  4672. {
  4673. Hx = x0 + x2;
  4674. Hy = y0 + y2;
  4675. }
  4676. else
  4677. {
  4678. Hx = 0;
  4679. Hy = 0;
  4680. }
  4681. return true;
  4682. }
  4683. catch (Exception)
  4684. {
  4685. return false;
  4686. }
  4687. }
  4688. // 放大倍数差校正
  4689. public bool MagComp(float oldMag, float newMag)
  4690. {
  4691. //开启电压校正时进行电压校正
  4692. if (m_measureFile.MParam.MagComp)
  4693. {
  4694. int oldLevel = -1, newLevel = -1;
  4695. float deltX = 0, deltY = 0;
  4696. if (oldMag < m_measureFile.MParam.MagRange1)
  4697. {
  4698. oldLevel = 1;
  4699. }
  4700. else if ((oldMag <= m_measureFile.MParam.MagRange2)
  4701. && (oldMag > m_measureFile.MParam.MagRange1))
  4702. {
  4703. oldLevel = 2;
  4704. }
  4705. else if ((oldMag <= m_measureFile.MParam.MagRange3)
  4706. && (oldMag > m_measureFile.MParam.MagRange2))
  4707. {
  4708. oldLevel = 3;
  4709. }
  4710. else if ((oldMag <= m_measureFile.MParam.MagRange4)
  4711. && (oldMag > m_measureFile.MParam.MagRange3))
  4712. {
  4713. oldLevel = 4;
  4714. }
  4715. if (newMag < m_measureFile.MParam.MagRange1)
  4716. {
  4717. newLevel = 1;
  4718. }
  4719. else if ((newMag <= m_measureFile.MParam.MagRange2)
  4720. && (newMag > m_measureFile.MParam.MagRange1))
  4721. {
  4722. newLevel = 2;
  4723. }
  4724. else if ((newMag <= m_measureFile.MParam.MagRange3)
  4725. && (newMag > m_measureFile.MParam.MagRange2))
  4726. {
  4727. newLevel = 3;
  4728. }
  4729. else if ((newMag <= m_measureFile.MParam.MagRange4)
  4730. && (newMag > m_measureFile.MParam.MagRange3))
  4731. {
  4732. newLevel = 4;
  4733. }
  4734. if (oldLevel != newLevel)
  4735. {
  4736. if (oldLevel == 1)
  4737. {
  4738. switch (newLevel)
  4739. {
  4740. case 1:
  4741. break;
  4742. case 2:
  4743. deltX = m_measureFile.MParam.MagCompX1;
  4744. deltY = m_measureFile.MParam.MagCompY1;
  4745. break;
  4746. case 3:
  4747. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2;
  4748. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2;
  4749. break;
  4750. case 4:
  4751. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4752. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4753. break;
  4754. }
  4755. }
  4756. else if (oldLevel == 2)
  4757. {
  4758. switch (newLevel)
  4759. {
  4760. case 1:
  4761. deltX = -m_measureFile.MParam.MagCompX1;
  4762. deltY = -m_measureFile.MParam.MagCompY1;
  4763. break;
  4764. case 2:
  4765. break;
  4766. case 3:
  4767. deltX = m_measureFile.MParam.MagCompX2;
  4768. deltY = m_measureFile.MParam.MagCompY2;
  4769. break;
  4770. case 4:
  4771. deltX = m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4772. deltY = m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4773. break;
  4774. }
  4775. }
  4776. else if (oldLevel == 3)
  4777. {
  4778. switch (newLevel)
  4779. {
  4780. case 1:
  4781. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2;
  4782. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2;
  4783. break;
  4784. case 2:
  4785. deltX = -m_measureFile.MParam.MagCompX2;
  4786. deltY = -m_measureFile.MParam.MagCompY2;
  4787. break;
  4788. case 3:
  4789. break;
  4790. case 4:
  4791. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4792. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompX3;
  4793. break;
  4794. }
  4795. }
  4796. else if (oldLevel == 4)
  4797. {
  4798. switch (newLevel)
  4799. {
  4800. case 1:
  4801. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4802. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4803. break;
  4804. case 2:
  4805. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4806. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4807. break;
  4808. case 3:
  4809. deltX = -m_measureFile.MParam.MagCompX3;
  4810. deltY = -m_measureFile.MParam.MagCompY3;
  4811. break;
  4812. case 4:
  4813. break;
  4814. }
  4815. }
  4816. //通过移动光束校正便宜量
  4817. //单位是m/pix
  4818. float pixSize = iSEM.GetPixelSize();
  4819. LogManager.AddHardwareLog("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
  4820. Thread.Sleep(500);
  4821. float xpCur = iSEM.GetStageAtX();
  4822. float ypCur = iSEM.GetStageAtY();
  4823. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4824. float xpNew = xpCur - deltX;
  4825. float ypNew = ypCur + deltY;
  4826. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4827. //计算最大偏移量
  4828. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4829. iSEM.SetBeamShiftX(100);
  4830. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4831. iSEM.SetBeamShiftX(beamXCur);
  4832. //计算光束偏移值:
  4833. float beamX = iSEM.GetBeamOffsetX();
  4834. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4835. beamX = (-deltX + beamX);
  4836. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4837. if (beamX < beamXMax || beamX < -beamXMax)
  4838. {
  4839. LogManager.AddHardwareLog("X方向移动光束", true);
  4840. float beamXShift = beamX * 100 / beamXMax;
  4841. if (!iSEM.SetBeamShiftX(beamXShift))
  4842. {
  4843. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4844. return false;
  4845. }
  4846. }
  4847. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4848. {
  4849. LogManager.AddHardwareLog("X方向移动样品台", true);
  4850. if (!iSEM.SetStageGotoX(xpNew))
  4851. {
  4852. return false;
  4853. }
  4854. //判断是否移动完成
  4855. while (true)
  4856. {
  4857. Thread.Sleep(5000);
  4858. if (iSEM.GetStageIs() == 0)
  4859. {
  4860. break;
  4861. }
  4862. }
  4863. }
  4864. float beamY = iSEM.GetBeamOffsetY();
  4865. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4866. beamY = (-deltY + beamY);
  4867. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4868. //计算最大偏移量
  4869. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4870. iSEM.SetBeamShiftY(100);
  4871. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4872. iSEM.SetBeamShiftY(beamYCur);
  4873. if (beamY < beamYMax || beamY < -beamYMax)
  4874. {
  4875. LogManager.AddHardwareLog("Y方向移动光束", true);
  4876. float beamYShift = beamY * 100 / beamYMax;
  4877. if (!iSEM.SetBeamShiftY(beamY))
  4878. {
  4879. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4880. return false;
  4881. }
  4882. }
  4883. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4884. {
  4885. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4886. if (!iSEM.SetStageGotoY(ypNew))
  4887. {
  4888. return false;
  4889. }
  4890. //判断是否移动完成
  4891. while (true)
  4892. {
  4893. Thread.Sleep(5000);
  4894. if (iSEM.GetStageIs() == 0)
  4895. {
  4896. break;
  4897. }
  4898. }
  4899. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4900. //arg.State = true;
  4901. //SendMsg("1-7");
  4902. }
  4903. }
  4904. }
  4905. return true;
  4906. }
  4907. #endregion
  4908. #region 测试程序
  4909. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  4910. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  4911. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  4912. //{
  4913. // SendMsg("拍摄照片完成");
  4914. // //return true;
  4915. //}
  4916. //else
  4917. //{
  4918. // SendMsg("拍摄照片失败");
  4919. // return false;
  4920. //}
  4921. //SendMsg("图像校正36度");
  4922. ////3.设置SEM角度补偿cos36度
  4923. //if (!TiltCorrection(36))
  4924. //{
  4925. // return false;
  4926. //}
  4927. //Thread.Sleep(3000);
  4928. //string fn;
  4929. //用宏抓一般图
  4930. //Thread.Sleep(5000);
  4931. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4932. //SendMsg("用宏抓一般图" + fn);
  4933. //iSEM.CMDMCFFilename(fn);
  4934. ////延时1s??
  4935. //Thread.Sleep(5000);
  4936. ////用宏抓好图
  4937. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  4938. //SendMsg("用宏抓好图" + fn);
  4939. //iSEM.CMDMCFFilename(fn);
  4940. ////延时1s??
  4941. //Thread.Sleep(30000);
  4942. //Thread.Sleep(10000);
  4943. //WorkingFolder = m_measureFile.FilePath;
  4944. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  4945. //SendMsg("SEM拍照存储到" + fileName6);
  4946. //if (!GetImage(ImageMode.SEM, fileName6))
  4947. //{
  4948. // SendMsg("SEM拍照失败");
  4949. // return false;
  4950. //}
  4951. ////用宏抓标志图
  4952. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  4953. //SendMsg("用宏抓标志图" + fn);
  4954. //iSEM.CMDMCFFilename(fn);
  4955. ////延时1s??
  4956. //Thread.Sleep(30000);
  4957. //Thread.Sleep(5000);
  4958. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4959. //SendMsg("用宏抓一般图" + fn);
  4960. //iSEM.CMDMCFFilename(fn);
  4961. ////延时1s??
  4962. //Thread.Sleep(5000);
  4963. //SendMsg("所有图结束");
  4964. ////17.自动控制SEM拍截面照
  4965. //{
  4966. // //1.控制SEM放大到指定参数大小范围,6000x
  4967. // if (!iSEM.SetMagnification(6000))
  4968. // {
  4969. // return false;
  4970. // }
  4971. // //2.控制SEM自动对焦、消像散、亮度、对比度
  4972. // if (!MeasParam.FocusMode)
  4973. // {
  4974. // //弹出手动对焦的窗口
  4975. // }
  4976. // else
  4977. // {
  4978. // //调用自动对焦模块
  4979. // }
  4980. // //3.设置SEM角度补偿cos36度
  4981. // if (!TiltCorrection(36))
  4982. // {
  4983. // return false;
  4984. // }
  4985. // //4.控制SEM拍照
  4986. // //5.保存照片4
  4987. // String fileName5 = WorkingFolder + ImageName5;
  4988. // if (!GetImage(ImageMode.SEM, fileName5))
  4989. // {
  4990. // return false;
  4991. // }
  4992. // //6.将照片传给客户,获取偏移坐标
  4993. // float x6 = 0, y6 = 0;
  4994. // float angle1 = 0;
  4995. // float mage = 10000;
  4996. // //7.根据坐标控制SEM移动到分析位置
  4997. // if (!iSEM.MoveStageXY(x6, y6))
  4998. // {
  4999. // return false;
  5000. // }
  5001. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  5002. // float x7 = iSEM.GetStageAtX();
  5003. // float y7 = iSEM.GetStageAtY();
  5004. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  5005. // {
  5006. // return false;
  5007. // }
  5008. // //9.控制SEM平行校正,并记录校正前初始值
  5009. // float foldAnagle = iSEM.GetScanRotation();
  5010. // if (foldAnagle == float.NaN)
  5011. // {
  5012. // return false;
  5013. // }
  5014. // if (!iSEM.SetScanRotation(angle1))
  5015. // {
  5016. // return false;
  5017. // }
  5018. // //10.控制SEM放大到指定参数大小范围
  5019. // if (!iSEM.SetMagnification(mage))
  5020. // {
  5021. // return false;
  5022. // }
  5023. // //11.控制SEM自动对焦、消像散、亮度、对比度
  5024. // if (!MeasParam.FocusMode)
  5025. // {
  5026. // //弹出手动对焦的窗口
  5027. // }
  5028. // else
  5029. // {
  5030. // //调用自动对焦模块
  5031. // }
  5032. // //12.控制SEM对分析位置拍照
  5033. // String fileName6 = WorkingFolder + ImageName6;
  5034. // if (!GetImage(ImageMode.SEM, fileName6))
  5035. // {
  5036. // return false;
  5037. // }
  5038. // //13.保存照片
  5039. // //14.控制SEM取消电子束校正,回到初始值
  5040. // if (!iSEM.SetScanRotation(foldAnagle))
  5041. // {
  5042. // return false;
  5043. // }
  5044. //}
  5045. ////18.自动层高分析
  5046. //{
  5047. // //1.获取SEM Pixel Size给客户传入参数
  5048. // if (iSEM.GetPixelSize() == float.NaN)
  5049. // {
  5050. // return false;
  5051. // }
  5052. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  5053. //}
  5054. ////19.自动能谱分析
  5055. //{
  5056. // //1. 确定能谱位置
  5057. // //2. 控制牛津打能谱
  5058. // //3. 能谱分析——面扫+线扫描
  5059. //}
  5060. #endregion
  5061. #region 能谱所有参数
  5062. //全局只有一个Extender
  5063. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  5064. IExtenderControl iExtender;
  5065. MeasureDB m_MeasDB = null;
  5066. int m_nXrayId = 0;
  5067. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  5068. const String ImageNameEDS3 = @"EDSImageTag.tif"; //EDS能谱图片
  5069. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  5070. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  5071. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  5072. /// <summary>
  5073. /// 做能谱分析
  5074. /// </summary>
  5075. /// <param name="a_PointNum">分析点ID,索引号</param>
  5076. /// <param name="PointsName">分析点名称</param>
  5077. /// <param name="num">分析点的位置ID</param>
  5078. /// <returns>成功或失败</returns>
  5079. public bool DoEDS(int a_PointNum, string PointsName, int num)
  5080. {
  5081. try
  5082. {
  5083. iExtender = factoryExtender.IExtender;
  5084. //XrayID记录
  5085. LogManager.AddHardwareLog("程序进入EDS测量!", true);
  5086. EDSParam param = m_measureFile.MParam.EDSP;
  5087. double dDwellTime = param.DwellTime;
  5088. int nImageType = param.ImageType;
  5089. double dScanSizes = param.ScanSize;
  5090. LogManager.AddHardwareLog("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  5091. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  5092. string path = EDS_path;
  5093. string edsfn = path + "\\" + num.ToString() + "_" + ImageNameEDS;
  5094. LogManager.AddHardwareLog("EDS_PATH=" + edsfn, true);
  5095. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);
  5096. //送给客户,计算感兴趣的区域
  5097. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  5098. List<System.Drawing.Point> listlines = new List<System.Drawing.Point>();
  5099. List<List<Segment>> listFeature = new List<List<Segment>>();
  5100. List<int> lines_height = new List<int>();
  5101. System.Drawing.Point area_pt = new System.Drawing.Point();
  5102. int width = 1;
  5103. int height = 1;
  5104. //点数据
  5105. int state = 0;
  5106. wr.EDS_Param_Points(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listPoints, out state);
  5107. if (state == 0)
  5108. {
  5109. LogManager.AddHardwareLog("点采集失败", true);
  5110. return false;
  5111. }
  5112. //20201223在图像上增加标注
  5113. List<DrawAnalysePoint> darwAPList = new List<DrawAnalysePoint>();
  5114. for (int i = 0; i < listPoints.Count; i++)
  5115. {
  5116. DrawAnalysePoint p = new DrawAnalysePoint();
  5117. p.Title = "谱图" + i.ToString();
  5118. p.Point = listPoints[i];
  5119. p.DrawType = DrawType.Point;
  5120. darwAPList.Add(p);
  5121. }
  5122. //线数据
  5123. LogManager.AddHardwareLog("线扫描", true);
  5124. state = 0;
  5125. wr.EDS_Param_Lines(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listlines, out lines_height, out state);
  5126. LogManager.AddHardwareLog("线返回数据" + listlines[0].X.ToString() + "," + listlines[0].Y.ToString() + ",lines_height=" + lines_height.Count.ToString(), true);
  5127. if (state == 1)
  5128. {
  5129. //将线转换为segment数据
  5130. LogManager.AddHardwareLog("将线转换为segment数据", true);
  5131. List<Segment> segments = new List<Segment>();
  5132. for (int i = 0; i < listlines.Count; i++)
  5133. {
  5134. List<System.Drawing.Point> linepoint = new List<System.Drawing.Point>();
  5135. for (int j = 0; j <= lines_height[i]; j++)
  5136. {
  5137. System.Drawing.Point p = new System.Drawing.Point();
  5138. Segment segment = new Segment();
  5139. segment.X = listlines[0].X;
  5140. segment.Y = listlines[0].Y + j;
  5141. segment.Length = 1;
  5142. segments.Add(segment);
  5143. p.X = segment.X;
  5144. p.Y = segment.Y;
  5145. linepoint.Add(p);
  5146. }
  5147. listFeature.Add(segments);
  5148. //20201223在图像上增加标注
  5149. DrawAnalysePoint l = new DrawAnalysePoint();
  5150. l.Title = "谱图" + (i+ listPoints.Count).ToString();
  5151. l.LinePoints = linepoint;
  5152. l.DrawType = DrawType.Line;
  5153. darwAPList.Add(l);
  5154. }
  5155. LogManager.AddHardwareLog("将线转换为segment数据完成", true);
  5156. }
  5157. else
  5158. {
  5159. LogManager.AddHardwareLog("线采集失败", true);
  5160. return false;
  5161. }
  5162. //面数据
  5163. state = 0;
  5164. wr.EDS_Param_Areas(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out area_pt, out width, out height, out state);
  5165. LogManager.AddHardwareLog("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  5166. if (state == 1)
  5167. {
  5168. //将面转换为segment数据
  5169. LogManager.AddHardwareLog("将面转换为segment数据", true);
  5170. List<Segment> segments = new List<Segment>();
  5171. for (int j = 0; j <= height; j++)
  5172. {
  5173. Segment segment = new Segment();
  5174. segment.X = area_pt.X;
  5175. segment.Y = area_pt.Y + j;
  5176. segment.Length = width;
  5177. segments.Add(segment);
  5178. }
  5179. listFeature.Add(segments);
  5180. LogManager.AddHardwareLog("将面转换为segment数据完成", true);
  5181. //20201223在图像上增加标注
  5182. DrawAnalysePoint a = new DrawAnalysePoint();
  5183. System.Drawing.Size asz = new System.Drawing.Size();
  5184. asz.Width = width;
  5185. asz.Height = height;
  5186. a.Point = area_pt;
  5187. a.Title = "谱图" + (1+listPoints.Count + listPoints.Count).ToString();
  5188. a.RectSize = asz;
  5189. a.DrawType = DrawType.Rectangle;
  5190. darwAPList.Add(a);
  5191. }
  5192. else
  5193. {
  5194. LogManager.AddHardwareLog("面采集失败", true);
  5195. return false;
  5196. }
  5197. //存储数据
  5198. //向分析点数据库更新
  5199. LogManager.AddHardwareLog("listPoints=" + listPoints.Count.ToString() + ",listFeature=" + listFeature.Count.ToString(), true);
  5200. if (!m_MeasDB.InsetAPoint(a_PointNum, PointsName, EDS_path, listPoints.Count, listFeature.Count, num))
  5201. {
  5202. LogManager.AddHardwareLog("插入分析点失败", true);
  5203. }
  5204. LogManager.AddHardwareLog("插入分析点成功", true);
  5205. int AreasNo = 0;
  5206. long[] XrayData = new long[2000];
  5207. Dictionary<string, double> listElement = new Dictionary<string, double>();
  5208. //点采集
  5209. foreach (System.Drawing.Point pt in listPoints)
  5210. {
  5211. XrayData = new long[2000];
  5212. listElement = new Dictionary<string, double>();
  5213. //LogManager.AddHardwareLog("点采集开始", true);
  5214. iExtender.XrayPointCollectiong(param.PointTime, pt.X, pt.Y, out XrayData, out listElement);
  5215. //写入数据库
  5216. m_nXrayId++;
  5217. Boolean ret = m_MeasDB.InsertAPointXay(a_PointNum, m_nXrayId, pt.X, pt.Y, XrayData, listElement, num);
  5218. LogManager.AddHardwareLog("点采集结束,写入数据库开始--" + m_nXrayId.ToString() + "," + ret.ToString(), true);
  5219. //LogManager.AddHardwareLog("点采集写入数据库结束", true);
  5220. if (m_nXrayId % 5 == 0)
  5221. {
  5222. Thread.Sleep(5000);
  5223. }
  5224. else
  5225. {
  5226. Thread.Sleep(1000);
  5227. }
  5228. }
  5229. //面采集
  5230. foreach (List<Segment> listSeg in listFeature)
  5231. {
  5232. XrayData = new long[2000];
  5233. listElement = new Dictionary<string, double>();
  5234. LogManager.AddHardwareLog("面采集开始", true);
  5235. LogManager.AddHardwareLog("AreaTime=" + param.AreaTime.ToString(), true);
  5236. iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement);
  5237. LogManager.AddHardwareLog("面采集结束,写入数据库开始", true);
  5238. //写入数据库
  5239. m_nXrayId++;
  5240. AreasNo++;
  5241. m_MeasDB.InsertAAreaXay(a_PointNum, m_nXrayId, AreasNo, listSeg, XrayData, listElement, num);
  5242. LogManager.AddHardwareLog("面采集写入数据库结束", true);
  5243. }
  5244. //20201223,生成图片
  5245. string edstag = path + "\\" + num.ToString() + "_" + ImageNameEDS3;
  5246. NewFunMethod fun = new NewFunMethod();
  5247. fun.GetBseAnalyticalSite(edsfn, darwAPList,edstag);
  5248. }
  5249. catch (Exception e)
  5250. {
  5251. LogManager.AddHardwareLog(e.Message, false);
  5252. }
  5253. return true;
  5254. }
  5255. /// <summary>
  5256. /// 初始化数据库
  5257. /// </summary>
  5258. public void Init_MeasDB()
  5259. {
  5260. m_MeasDB = new MeasureDB(m_measureFile);
  5261. }
  5262. /// <summary>
  5263. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  5264. /// </summary>
  5265. /// <returns></returns>
  5266. public bool EDS_FindCross()
  5267. {
  5268. float x2 = 0, y2 = 0;
  5269. int state = 0;
  5270. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5271. float m_TempBrightness = 50.0f;
  5272. float m_TempContrast = 30.0f;
  5273. if (m_measureFile.MParam.SampleName == "3")
  5274. {
  5275. m_TempBrightness = 48.0f;
  5276. m_TempContrast = 29.0f;
  5277. }
  5278. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5279. iSEM.SetAutoVideoOff();
  5280. Thread.Sleep(200);
  5281. iSEM.SetBrightness(m_TempBrightness);//50.0f
  5282. Thread.Sleep(200);
  5283. iSEM.SetContrast(m_TempContrast);//30.0f
  5284. Thread.Sleep(200);
  5285. //1.控制SEM放大到300倍
  5286. float mag = m_measureFile.MParam.Photograph_Magnification / 3;
  5287. if (mag < 200)
  5288. {
  5289. mag = 200;
  5290. }
  5291. if (!iSEM.SetMagnification(mag))
  5292. {
  5293. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  5294. arg.State = false;
  5295. SendMsg("1-24");
  5296. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5297. return false;
  5298. }
  5299. Thread.Sleep(200);
  5300. float current = iSEM.GetMagnification();
  5301. Thread.Sleep(200);
  5302. while (Math.Abs(current - mag) > 2)
  5303. {
  5304. iSEM.SetMagnification(mag);
  5305. Thread.Sleep(200);
  5306. current = iSEM.GetMagnification();
  5307. Thread.Sleep(200);
  5308. }
  5309. Thread.Sleep(2000);
  5310. //判断是否停止进程
  5311. if (key_stop)
  5312. {
  5313. LogManager.AddHardwareLog("停止键按下", true);
  5314. return false;
  5315. }
  5316. //3.控制SEM拍照
  5317. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
  5318. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5319. String fileName4 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS4;
  5320. LogManager.AddHardwareLog("fileName4=============" + fileName4, true);
  5321. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5322. arg.Picture_Information.Picture_FullPath = fileName4;
  5323. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5324. Thread.Sleep(200);
  5325. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5326. Thread.Sleep(200);
  5327. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5328. Thread.Sleep(200);
  5329. //拍照前改变速度,延时
  5330. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5331. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5332. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5333. Thread.Sleep(200);
  5334. cycle_time = iSEM.GetCycleTime();
  5335. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5336. if (!GetImage(fileName4))
  5337. {
  5338. //arg.State = false;
  5339. //arg.Message = "SEM拍照找切割位置失败";
  5340. //SendMsg("1-25");
  5341. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5342. return false;
  5343. }
  5344. //arg.Picture_Information.Picture_FullPath = fileName4;
  5345. //arg.State = true;
  5346. //arg.Message = "SEM拍照成功";
  5347. //SendMsg("1-25");
  5348. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5349. Thread.Sleep(200);
  5350. cycle_time = iSEM.GetCycleTime();
  5351. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5352. //判断是否停止进程
  5353. if (key_stop)
  5354. {
  5355. return false;
  5356. }
  5357. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  5358. //5.根据坐标控制SEM移动到切孔位置,居中
  5359. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  5360. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  5361. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  5362. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  5363. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  5364. if (state == 1)
  5365. {
  5366. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  5367. if (!MoveToPixByMoveStage(x2, y2))
  5368. {
  5369. //arg.State = false;
  5370. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  5371. //SendMsg("1-26");
  5372. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5373. return false;
  5374. }
  5375. //判断是否移动完成
  5376. while (true)
  5377. {
  5378. Thread.Sleep(4000);
  5379. if (iSEM.GetStageIs() == 0)
  5380. {
  5381. break;
  5382. }
  5383. }
  5384. //arg.State = true;
  5385. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  5386. //SendMsg("1-26");
  5387. //高倍到低倍不进行对焦
  5388. //拍照前改变速度,延时
  5389. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5390. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5391. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5392. Thread.Sleep(200);
  5393. cycle_time = iSEM.GetCycleTime();
  5394. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5395. if (hand_intervene == 1)
  5396. {
  5397. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5398. }
  5399. }
  5400. else
  5401. {
  5402. arg.Message = "图像接口参数state返回值为零";
  5403. arg.State = false;
  5404. SendMsg("1-26");
  5405. if (hand_intervene == 1)
  5406. {
  5407. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5408. {
  5409. return false;
  5410. }
  5411. }
  5412. else
  5413. {
  5414. return false;
  5415. }
  5416. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5417. return false;
  5418. }
  5419. //判断是否停止进程
  5420. if (key_stop)
  5421. {
  5422. LogManager.AddHardwareLog("停止键按下", true);
  5423. return false;
  5424. }
  5425. return true;
  5426. }
  5427. /// <summary>
  5428. /// 171.能谱第17步找点采集数据
  5429. /// </summary>
  5430. /// <returns></returns>
  5431. public bool EDS_ShotSection()
  5432. {
  5433. int state = 0;
  5434. #region 设置拍照的放大倍数
  5435. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  5436. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5437. {
  5438. //arg.Message = "放大倍数调整失败";
  5439. //arg.State = false;
  5440. //SendMsg("1-27");
  5441. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5442. return false;
  5443. }
  5444. float set = m_measureFile.MParam.Photograph_Magnification;
  5445. float current = iSEM.GetMagnification();
  5446. while (Math.Abs(current - set) > 1)
  5447. {
  5448. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  5449. Thread.Sleep(200);
  5450. current = iSEM.GetMagnification();
  5451. }
  5452. //arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString() + "成功";
  5453. //arg.State = true;
  5454. //SendMsg("1-27");
  5455. Thread.Sleep(3000 + (Int32)cycle_time);
  5456. //判断是否停止进程
  5457. if (key_stop)
  5458. {
  5459. LogManager.AddHardwareLog("停止键按下", true);
  5460. return false;
  5461. }
  5462. #endregion
  5463. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  5464. //2.控制SEM自动对焦、亮度、对比度-接口
  5465. iSEM.SetReduced(402, 128, 340, 256);
  5466. Thread.Sleep(200);
  5467. //add by sun 2020-12-15
  5468. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//iSEM.CmdFocusRate(5);//
  5469. //add by sun 2020-12-15 end
  5470. Thread.Sleep(200);
  5471. cycle_time = iSEM.GetCycleTime();
  5472. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5473. if (!iSEM.SetAutoVideoOff())
  5474. {
  5475. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5476. return false;
  5477. }
  5478. Thread.Sleep(5000);
  5479. if (ImageFocus1(false))
  5480. {
  5481. //arg.Message = "自动对焦完成";
  5482. //arg.State = true;
  5483. //SendMsg("1-28");
  5484. }
  5485. else
  5486. {
  5487. //arg.Message = "自动对焦失败";
  5488. //arg.State = false;
  5489. //SendMsg("1-28");
  5490. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5491. return false;
  5492. }
  5493. iSEM.CloseReduced();
  5494. Thread.Sleep(200);
  5495. cycle_time = iSEM.GetCycleTime();
  5496. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  5497. //判断是否停止进程
  5498. if (key_stop)
  5499. {
  5500. LogManager.AddHardwareLog("停止键按下", true);
  5501. return false;
  5502. }
  5503. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5504. {
  5505. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5506. return false;
  5507. }
  5508. Thread.Sleep(5000);
  5509. //3、设置SEM补偿角度
  5510. if (m_measureFile.MParam.Is_Photograph == false)
  5511. {
  5512. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString() + "度", true);
  5513. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  5514. {
  5515. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  5516. //arg.State = false;
  5517. //SendMsg("1-29");
  5518. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5519. return false;
  5520. }
  5521. //arg.State = true;
  5522. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  5523. //SendMsg("1-29");
  5524. Thread.Sleep(200);
  5525. //判断是否停止进程
  5526. if (key_stop)
  5527. {
  5528. LogManager.AddHardwareLog("停止键按下", false);
  5529. return false;
  5530. }
  5531. }
  5532. //4、拍照,5、保存照片
  5533. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS5;
  5534. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5535. String fileName5 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS5;
  5536. LogManager.AddHardwareLog("fileName5==============="+ fileName5, false);
  5537. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5538. arg.Picture_Information.Picture_FullPath = fileName5;
  5539. arg.Picture_Information.Work_Status = "SEM";
  5540. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5541. Thread.Sleep(200);
  5542. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5543. Thread.Sleep(200);
  5544. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5545. Thread.Sleep(200);
  5546. //拍照前改变速度,延时
  5547. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5548. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5549. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5550. Thread.Sleep(200);
  5551. cycle_time = iSEM.GetCycleTime();
  5552. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  5553. if (!GetImage(fileName5))
  5554. {
  5555. //arg.Message = "SEM拍照失败";
  5556. //arg.State = false;
  5557. //SendMsg("1-30");
  5558. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5559. return false;
  5560. }
  5561. //arg.State = true;
  5562. //arg.Message = "SEM拍照成功";
  5563. //SendMsg("1-30");
  5564. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5565. Thread.Sleep(200);
  5566. cycle_time = iSEM.GetCycleTime();
  5567. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5568. //判断是否停止进程
  5569. if (key_stop)
  5570. {
  5571. LogManager.AddHardwareLog("停止键按下", true);
  5572. return false;
  5573. }
  5574. #endregion
  5575. if (m_measureFile.MParam.Is_Photograph == false)
  5576. {
  5577. #region 对当前矩形进行旋转校正
  5578. //8,计算切割面区域偏移角度及方向
  5579. float degree = 0;
  5580. int direction = 0;
  5581. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  5582. LogManager.AddHardwareLog("测量线程:拍照角度移动,输入图像" + ImageNameEDS5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  5583. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  5584. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  5585. if (state == 1)
  5586. {
  5587. //梯形角度
  5588. iSEM.SetScanRotationOn();
  5589. Thread.Sleep(200);
  5590. //20201128陈工要求,谭博返回角度*0.7
  5591. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  5592. Thread.Sleep(200);
  5593. //arg.State = true;
  5594. //arg.Message = "图像接口返回角度为:" + degree.ToString();
  5595. //SendMsg("1-31");
  5596. if (hand_intervene == 1)
  5597. {
  5598. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5599. }
  5600. }
  5601. else
  5602. {
  5603. //arg.Message = "图像接口参数State返回值为零";
  5604. //arg.State = false;
  5605. //SendMsg("1-31");
  5606. if (hand_intervene == 1)
  5607. {
  5608. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5609. {
  5610. return false;
  5611. }
  5612. }
  5613. else
  5614. {
  5615. //return false;
  5616. }
  5617. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5618. }
  5619. //判断是否停止进程
  5620. if (key_stop)
  5621. {
  5622. LogManager.AddHardwareLog("停止键按下", true);
  5623. return false;
  5624. }
  5625. Thread.Sleep(200);
  5626. //12拍照
  5627. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS6;
  5628. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5629. String fileName6 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS6;
  5630. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5631. LogManager.AddHardwareLog("fileName6===================" + fileName6, true);
  5632. arg.Picture_Information.Picture_FullPath = fileName6;
  5633. arg.Picture_Information.Work_Status = "SEM";
  5634. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5635. Thread.Sleep(200);
  5636. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5637. Thread.Sleep(200);
  5638. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5639. Thread.Sleep(200);
  5640. //拍照前改变速度,延时
  5641. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5642. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5643. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5644. Thread.Sleep(200);
  5645. cycle_time = iSEM.GetCycleTime();
  5646. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5647. if (!GetImage(fileName6))
  5648. {
  5649. //arg.Message = "SEM拍照失败";
  5650. //arg.State = false;
  5651. //SendMsg("1-33");
  5652. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5653. return false;
  5654. }
  5655. //arg.State = true;
  5656. //arg.Message = "SEM拍照成功";
  5657. //SendMsg("1-33");
  5658. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5659. Thread.Sleep(200);
  5660. cycle_time = iSEM.GetCycleTime();
  5661. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5662. //判断是否停止进程
  5663. if (key_stop)
  5664. {
  5665. LogManager.AddHardwareLog("停止键按下", true);
  5666. return false;
  5667. }
  5668. #endregion
  5669. #region 获取两个位置上及放大倍数
  5670. //计算两个测量区域坐标
  5671. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  5672. List<float> mag = new List<float>();
  5673. System.Drawing.Point ct0;
  5674. float magMax = 0;
  5675. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  5676. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  5677. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  5678. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  5679. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  5680. "输入产品" + m_measureFile.MParam.Firm.ToString()
  5681. + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  5682. + "输出放大倍数1" + mag[0]
  5683. + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  5684. + "输出放大倍数2" + mag[0]
  5685. + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  5686. #endregion
  5687. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  5688. {
  5689. //arg.State = true;
  5690. //arg.Message = "获取位置及放大倍数成功";
  5691. //SendMsg("1-34");
  5692. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  5693. float xs = iSEM.GetBeamShiftX();
  5694. Thread.Sleep(200);
  5695. float ys = iSEM.GetBeamShiftY();
  5696. Thread.Sleep(200);
  5697. float xpCur = iSEM.GetStageAtX();
  5698. Thread.Sleep(200);
  5699. float ypCur = iSEM.GetStageAtY();
  5700. Thread.Sleep(200);
  5701. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  5702. + "y=" + ys.ToString() + ","
  5703. + "原来样品台的位置x= " + xpCur.ToString()
  5704. + "y=" + ypCur.ToString(), true);
  5705. #endregion
  5706. #region 移动到梯形左上角
  5707. //找到放大倍数最大值
  5708. magMax = mag[0];
  5709. for (int m = 1; m < mag.Count; m++)
  5710. {
  5711. if (mag[m] > magMax)
  5712. {
  5713. magMax = mag[m];
  5714. }
  5715. }
  5716. //20201127将视野移动到梯形左上角位置
  5717. MoveToPix(ct0.X, ct0.Y);
  5718. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  5719. + "," + ct0.Y.ToString() + ")", true);
  5720. //关闭自动亮度对比度
  5721. iSEM.SetAutoVideoOff();
  5722. Thread.Sleep(2000);
  5723. iSEM.SetReduced(402, 128, 340, 256);
  5724. Thread.Sleep(200);
  5725. //add by sun 2020-12-15
  5726. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5727. //add by sun 2020-12-15 end
  5728. Thread.Sleep(200);
  5729. cycle_time = iSEM.GetCycleTime();
  5730. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5731. //放大到10000倍
  5732. iSEM.SetMagnification(magMax / 2);
  5733. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5734. set = magMax / 2;
  5735. current = iSEM.GetMagnification();
  5736. while (Math.Abs(current - set) > 1)
  5737. {
  5738. iSEM.SetMagnification(set);
  5739. Thread.Sleep(200);
  5740. current = iSEM.GetMagnification();
  5741. }
  5742. //自动对焦
  5743. if (!ImageFocus1(true))
  5744. {
  5745. return false;
  5746. }
  5747. //放大到10000倍
  5748. iSEM.SetMagnification(magMax);
  5749. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5750. set = magMax;
  5751. current = iSEM.GetMagnification();
  5752. while (Math.Abs(current - set) > 1)
  5753. {
  5754. iSEM.SetMagnification(set);
  5755. Thread.Sleep(200);
  5756. current = iSEM.GetMagnification();
  5757. }
  5758. //自动对焦
  5759. if (!ImageFocus1(true))
  5760. {
  5761. return false;
  5762. }
  5763. iSEM.CloseReduced();
  5764. Thread.Sleep(200);
  5765. cycle_time = iSEM.GetCycleTime();
  5766. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5767. #endregion
  5768. #region 恢复到拍照的状态
  5769. iSEM.SetStageGotoX(xpCur);
  5770. while (true)
  5771. {
  5772. Thread.Sleep(4000);
  5773. if (iSEM.GetStageIs() == 0)
  5774. {
  5775. break;
  5776. }
  5777. }
  5778. iSEM.SetStageGotoY(ypCur);
  5779. while (true)
  5780. {
  5781. Thread.Sleep(4000);
  5782. if (iSEM.GetStageIs() == 0)
  5783. {
  5784. break;
  5785. }
  5786. }
  5787. iSEM.CloseReduced();
  5788. Thread.Sleep(200);
  5789. cycle_time = iSEM.GetCycleTime();
  5790. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5791. //增亮图像
  5792. iSEM.SetAutoVideoOff();
  5793. Thread.Sleep(200);
  5794. float currentBright = iSEM.GetBrightness();
  5795. Thread.Sleep(200);
  5796. float currentContrast = iSEM.GetContrast();
  5797. Thread.Sleep(200);
  5798. iSEM.SetBrightness(currentBright + 2);
  5799. Thread.Sleep(200);
  5800. iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
  5801. Thread.Sleep(200);
  5802. #endregion
  5803. #region 循环拍照
  5804. for (int n = 0; n < ct.Count; n++)
  5805. {
  5806. #region 恢复到拍照的状态
  5807. iSEM.SetStageGotoX(xpCur);
  5808. while (true)
  5809. {
  5810. Thread.Sleep(4000);
  5811. if (iSEM.GetStageIs() == 0)
  5812. {
  5813. break;
  5814. }
  5815. }
  5816. iSEM.SetStageGotoY(ypCur);
  5817. while (true)
  5818. {
  5819. Thread.Sleep(4000);
  5820. if (iSEM.GetStageIs() == 0)
  5821. {
  5822. break;
  5823. }
  5824. }
  5825. //恢复原来的放大倍数
  5826. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5827. {
  5828. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5829. return false;
  5830. }
  5831. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5832. set = m_measureFile.MParam.Photograph_Magnification;
  5833. current = iSEM.GetMagnification();
  5834. while (Math.Abs(current - set) > 1)
  5835. {
  5836. iSEM.SetMagnification(set);
  5837. Thread.Sleep(200);
  5838. current = iSEM.GetMagnification();
  5839. }
  5840. //恢复BeamShift的百分比值
  5841. iSEM.SetBeamShiftX(xs);
  5842. Thread.Sleep(200);
  5843. iSEM.SetBeamShiftY(ys);
  5844. Thread.Sleep(200);
  5845. #endregion
  5846. #region 移动到指定点位置
  5847. if (!MoveToPix(ct[n].X, ct[n].Y))
  5848. {
  5849. arg.State = false;
  5850. arg.Message = "移动到第一个点位置失败";
  5851. SendMsg("1-" + (35 + n).ToString());
  5852. //移动到第一个点失败
  5853. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  5854. }
  5855. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  5856. + "," + ct[n].Y.ToString() + ")", true);
  5857. #endregion
  5858. #region 如果是第一个点,则1W倍对焦
  5859. if (n == 0)
  5860. {
  5861. }
  5862. #endregion
  5863. #region 拍照
  5864. if (!iSEM.SetMagnification(mag[n]))
  5865. {
  5866. arg.State = false;
  5867. arg.Message = "移动到第一个点位置拍照失败";
  5868. SendMsg("1-35");
  5869. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5870. return false;
  5871. }
  5872. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5873. set = mag[n];
  5874. current = iSEM.GetMagnification();
  5875. while (Math.Abs(current - set) > 1)
  5876. {
  5877. iSEM.SetMagnification(set);
  5878. Thread.Sleep(200);
  5879. current = iSEM.GetMagnification();
  5880. }
  5881. DoEDS(m_nWorkHoleNo + 1, cutHoles[m_nWorkHoleNo].HoleName, n + 1);
  5882. #endregion
  5883. }
  5884. #endregion
  5885. if (hand_intervene == 1)
  5886. {
  5887. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5888. }
  5889. }
  5890. else
  5891. {
  5892. if (hand_intervene == 1)
  5893. {
  5894. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5895. {
  5896. // return false;
  5897. }
  5898. }
  5899. else
  5900. {
  5901. //return false;
  5902. }
  5903. //arg.State = false;
  5904. //arg.Message = "获取位置及放大倍数失败";
  5905. //SendMsg("1-34");
  5906. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5907. }
  5908. //判断是否停止进程
  5909. if (key_stop)
  5910. {
  5911. LogManager.AddHardwareLog("停止键按下", true);
  5912. return false;
  5913. }
  5914. }
  5915. //判断是否停止进程
  5916. if (key_stop)
  5917. {
  5918. return false;
  5919. }
  5920. return true;
  5921. }
  5922. /// <summary>
  5923. /// 19.能谱分析
  5924. /// </summary>
  5925. /// <returns></returns>
  5926. public bool EDSAnalysis()
  5927. {
  5928. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  5929. if (m_measureFile.MParam.EDSZ < Z_Min || m_measureFile.MParam.EDSZ > Z_Max)
  5930. {
  5931. LogManager.AddHardwareLog("Z轴位置设置超出范围.", true);
  5932. return false;
  5933. }
  5934. LogManager.AddHardwareLog("将Z轴位置指定到:" + m_measureFile.MParam.EDSZ.ToString(), true);
  5935. if (!iSEM.SetStageGotoZ(m_measureFile.MParam.EDSZ))
  5936. {
  5937. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  5938. return false;
  5939. }
  5940. while (true)
  5941. {
  5942. Thread.Sleep(4000);
  5943. if (iSEM.GetStageIs() == 0)
  5944. {
  5945. break;
  5946. }
  5947. }
  5948. //判断是否停止进程
  5949. if (key_stop)
  5950. {
  5951. LogManager.AddHardwareLog("停止键按下", true);
  5952. return false;
  5953. }
  5954. //2.角度改为54度
  5955. iSEM.SetScanRotationOff();
  5956. Thread.Sleep(200);
  5957. //3.设置电压和电流
  5958. iSEM.SetSEMVoltage(m_measureFile.MParam.EDSV);
  5959. Thread.Sleep(2000);
  5960. iSEM.SetSEMIPROBE(m_measureFile.MParam.EDSA);
  5961. Thread.Sleep(500);
  5962. //4.自动亮度对比度 del by sun 2020-12-17
  5963. //iSEM.SetAutoBright(100);
  5964. //Thread.Sleep(200);
  5965. //iSEM.SetAutoContrast(100);
  5966. //Thread.Sleep(200);
  5967. //if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5968. //{
  5969. // LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  5970. // return false;
  5971. //}
  5972. //Thread.Sleep(5000);
  5973. //del by sun 2020-12-17
  5974. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5975. //关闭自动亮度对比度
  5976. iSEM.SetAutoVideoOff();
  5977. Thread.Sleep(2000);
  5978. float m_TempBrightness = 50f;
  5979. float m_TempContrast = 29f;
  5980. if (m_measureFile.MParam.SampleName == "3")
  5981. {
  5982. m_TempBrightness = 50f;
  5983. m_TempContrast = 29f;
  5984. }
  5985. iSEM.SetBrightness(m_TempBrightness); //50.0f
  5986. Thread.Sleep(200);
  5987. iSEM.SetContrast(m_TempContrast); //30.0f
  5988. Thread.Sleep(5000);
  5989. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5990. //5.自动对焦
  5991. iSEM.SetReduced(256, 192, 512, 512);
  5992. Thread.Sleep(200);
  5993. //add by sun 2020-12-15
  5994. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5995. //add by sun 2020-12-15 end
  5996. Thread.Sleep(200);
  5997. cycle_time = iSEM.GetCycleTime();
  5998. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5999. if (!ImageFocus1(false))
  6000. {
  6001. return false;
  6002. }
  6003. iSEM.CloseReduced();
  6004. Thread.Sleep(200);
  6005. cycle_time = iSEM.GetCycleTime();
  6006. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  6007. //6.调用161步过程
  6008. if (!EDS_FindCross())
  6009. {
  6010. return false;
  6011. }
  6012. //7.调用171步过程
  6013. if (!EDS_ShotSection())
  6014. {
  6015. return false;
  6016. }
  6017. return true;
  6018. }
  6019. /// <summary>
  6020. /// 20.光束等复位
  6021. /// </summary>
  6022. public void BeamShiftReset()
  6023. {
  6024. iSEM.SetTiltAngleOff();
  6025. Thread.Sleep(200);
  6026. iSEM.SetScanRotationOff();
  6027. Thread.Sleep(200);
  6028. iSEM.SetBeamShiftX(0);
  6029. Thread.Sleep(200);
  6030. iSEM.SetBeamShiftY(0);
  6031. Thread.Sleep(200);
  6032. }
  6033. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  6034. #region 设置电压电流
  6035. public bool SetVoltageAndIPROBE()
  6036. {
  6037. LogManager.AddHardwareLog("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  6038. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  6039. bool mRet_VoltageFlag = false;
  6040. bool mRet_ElecFlag = false;
  6041. if (m_measureFile.MParam.SampleName != "3")
  6042. {
  6043. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  6044. Thread.Sleep(500);
  6045. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  6046. Thread.Sleep(500);
  6047. }
  6048. else
  6049. {
  6050. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  6051. Thread.Sleep(500);
  6052. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  6053. Thread.Sleep(500);
  6054. }
  6055. if (!mRet_VoltageFlag) return false;
  6056. if (!mRet_ElecFlag) return false;
  6057. LogManager.AddHardwareLog("测量线程:设置电压电流完成!" , true);
  6058. return true;
  6059. }
  6060. #endregion
  6061. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  6062. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  6063. #region 拍照
  6064. public bool GetImageFromSEM(float m_Mag) {
  6065. if (!iSEM.SetMagnification(m_Mag))
  6066. {
  6067. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + m_Mag.ToString() + "失败", false);
  6068. return false;
  6069. }
  6070. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成(一半倍数)!", true);
  6071. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  6072. String m_FileName = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_Mag.ToString() + "_0_" + ImageNameTwo_1;
  6073. //arg.Picture_Information.Picture_FullPath = m_FileName;
  6074. //arg.Picture_Information.Work_Status = "SEM";
  6075. //arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  6076. //Thread.Sleep(200);
  6077. //arg.Picture_Information.Magnification = iSEM.GetMagnification();
  6078. //Thread.Sleep(200);
  6079. //arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  6080. //Thread.Sleep(200);
  6081. //拍照前改变速度,延时
  6082. iSEM.CmdLineScan();
  6083. Thread.Sleep(200);
  6084. cycle_time = iSEM.GetCycleTime();
  6085. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  6086. if (!GetImage(m_FileName))
  6087. {
  6088. LogManager.AddHardwareLog("测量线程报错:========" + arg.Message, false);
  6089. return false;
  6090. }
  6091. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  6092. return true;
  6093. }
  6094. #endregion
  6095. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  6096. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息
  6097. public void SaveMeasDataPic(String picFullPath,float Mag,float pixelsize)
  6098. {
  6099. try
  6100. {
  6101. using (System.Drawing.Image img = Image.FromFile(picFullPath))
  6102. {
  6103. Bitmap bmp = new Bitmap(img.Width, img.Height);
  6104. using (Graphics g = Graphics.FromImage(bmp))
  6105. {
  6106. g.DrawImage(img, 0, 0, img.Width, img.Height);
  6107. String str = "Mag:" + Mag.ToString("0") + "X\tPixelSize:" + (pixelsize * 1000000).ToString("0.00") + "um";
  6108. Font font =new Font("宋体", 16, FontStyle.Bold);
  6109. SolidBrush sbrush = new SolidBrush(Color.LimeGreen);
  6110. g.DrawString(str, font, sbrush, new PointF(40, img.Height - 30));
  6111. }
  6112. String path1 = Path.GetDirectoryName(picFullPath) + Path.GetFileNameWithoutExtension(picFullPath) + "_Data." + Path.GetExtension(picFullPath);
  6113. LogManager.AddHardwareLog("Path.GetDirectoryName(picFullPath)==" + Path.GetDirectoryName(picFullPath) + "Path.GetFileNameWithoutExtension(picFullPath)==" + Path.GetFileNameWithoutExtension(picFullPath) + "Path.GetExtension(picFullPath)==" + Path.GetExtension(picFullPath), true);
  6114. LogManager.AddHardwareLog("在测量图上显示放大倍数和像素大小信息==============="+ path1, true);
  6115. bmp.Save(path1);
  6116. }
  6117. }
  6118. catch
  6119. {
  6120. LogManager.AddHardwareLog("在测量图上显示放大倍数和像素大小信息失败", true);
  6121. }
  6122. }
  6123. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息 end
  6124. #endregion
  6125. }
  6126. }