Measure.cs 275 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074107510761077107810791080108110821083108410851086108710881089109010911092109310941095109610971098109911001101110211031104110511061107110811091110111111121113111411151116111711181119112011211122112311241125112611271128112911301131113211331134113511361137113811391140114111421143114411451146114711481149115011511152115311541155115611571158115911601161116211631164116511661167116811691170117111721173117411751176117711781179118011811182118311841185118611871188118911901191119211931194119511961197119811991200120112021203120412051206120712081209121012111212121312141215121612171218121912201221122212231224122512261227122812291230123112321233123412351236123712381239124012411242124312441245124612471248124912501251125212531254125512561257125812591260126112621263126412651266126712681269127012711272127312741275127612771278127912801281128212831284128512861287128812891290129112921293129412951296129712981299130013011302130313041305130613071308130913101311131213131314131513161317131813191320132113221323132413251326132713281329133013311332133313341335133613371338133913401341134213431344134513461347134813491350135113521353135413551356135713581359136013611362136313641365136613671368136913701371137213731374137513761377137813791380138113821383138413851386138713881389139013911392139313941395139613971398139914001401140214031404140514061407140814091410141114121413141414151416141714181419142014211422142314241425142614271428142914301431143214331434143514361437143814391440144114421443144414451446144714481449145014511452145314541455145614571458145914601461146214631464146514661467146814691470147114721473147414751476147714781479148014811482148314841485148614871488148914901491149214931494149514961497149814991500150115021503150415051506150715081509151015111512151315141515151615171518151915201521152215231524152515261527152815291530153115321533153415351536153715381539154015411542154315441545154615471548154915501551155215531554155515561557155815591560156115621563156415651566156715681569157015711572157315741575157615771578157915801581158215831584158515861587158815891590159115921593159415951596159715981599160016011602160316041605160616071608160916101611161216131614161516161617161816191620162116221623162416251626162716281629163016311632163316341635163616371638163916401641164216431644164516461647164816491650165116521653165416551656165716581659166016611662166316641665166616671668166916701671167216731674167516761677167816791680168116821683168416851686168716881689169016911692169316941695169616971698169917001701170217031704170517061707170817091710171117121713171417151716171717181719172017211722172317241725172617271728172917301731173217331734173517361737173817391740174117421743174417451746174717481749175017511752175317541755175617571758175917601761176217631764176517661767176817691770177117721773177417751776177717781779178017811782178317841785178617871788178917901791179217931794179517961797179817991800180118021803180418051806180718081809181018111812181318141815181618171818181918201821182218231824182518261827182818291830183118321833183418351836183718381839184018411842184318441845184618471848184918501851185218531854185518561857185818591860186118621863186418651866186718681869187018711872187318741875187618771878187918801881188218831884188518861887188818891890189118921893189418951896189718981899190019011902190319041905190619071908190919101911191219131914191519161917191819191920192119221923192419251926192719281929193019311932193319341935193619371938193919401941194219431944194519461947194819491950195119521953195419551956195719581959196019611962196319641965196619671968196919701971197219731974197519761977197819791980198119821983198419851986198719881989199019911992199319941995199619971998199920002001200220032004200520062007200820092010201120122013201420152016201720182019202020212022202320242025202620272028202920302031203220332034203520362037203820392040204120422043204420452046204720482049205020512052205320542055205620572058205920602061206220632064206520662067206820692070207120722073207420752076207720782079208020812082208320842085208620872088208920902091209220932094209520962097209820992100210121022103210421052106210721082109211021112112211321142115211621172118211921202121212221232124212521262127212821292130213121322133213421352136213721382139214021412142214321442145214621472148214921502151215221532154215521562157215821592160216121622163216421652166216721682169217021712172217321742175217621772178217921802181218221832184218521862187218821892190219121922193219421952196219721982199220022012202220322042205220622072208220922102211221222132214221522162217221822192220222122222223222422252226222722282229223022312232223322342235223622372238223922402241224222432244224522462247224822492250225122522253225422552256225722582259226022612262226322642265226622672268226922702271227222732274227522762277227822792280228122822283228422852286228722882289229022912292229322942295229622972298229923002301230223032304230523062307230823092310231123122313231423152316231723182319232023212322232323242325232623272328232923302331233223332334233523362337233823392340234123422343234423452346234723482349235023512352235323542355235623572358235923602361236223632364236523662367236823692370237123722373237423752376237723782379238023812382238323842385238623872388238923902391239223932394239523962397239823992400240124022403240424052406240724082409241024112412241324142415241624172418241924202421242224232424242524262427242824292430243124322433243424352436243724382439244024412442244324442445244624472448244924502451245224532454245524562457245824592460246124622463246424652466246724682469247024712472247324742475247624772478247924802481248224832484248524862487248824892490249124922493249424952496249724982499250025012502250325042505250625072508250925102511251225132514251525162517251825192520252125222523252425252526252725282529253025312532253325342535253625372538253925402541254225432544254525462547254825492550255125522553255425552556255725582559256025612562256325642565256625672568256925702571257225732574257525762577257825792580258125822583258425852586258725882589259025912592259325942595259625972598259926002601260226032604260526062607260826092610261126122613261426152616261726182619262026212622262326242625262626272628262926302631263226332634263526362637263826392640264126422643264426452646264726482649265026512652265326542655265626572658265926602661266226632664266526662667266826692670267126722673267426752676267726782679268026812682268326842685268626872688268926902691269226932694269526962697269826992700270127022703270427052706270727082709271027112712271327142715271627172718271927202721272227232724272527262727272827292730273127322733273427352736273727382739274027412742274327442745274627472748274927502751275227532754275527562757275827592760276127622763276427652766276727682769277027712772277327742775277627772778277927802781278227832784278527862787278827892790279127922793279427952796279727982799280028012802280328042805280628072808280928102811281228132814281528162817281828192820282128222823282428252826282728282829283028312832283328342835283628372838283928402841284228432844284528462847284828492850285128522853285428552856285728582859286028612862286328642865286628672868286928702871287228732874287528762877287828792880288128822883288428852886288728882889289028912892289328942895289628972898289929002901290229032904290529062907290829092910291129122913291429152916291729182919292029212922292329242925292629272928292929302931293229332934293529362937293829392940294129422943294429452946294729482949295029512952295329542955295629572958295929602961296229632964296529662967296829692970297129722973297429752976297729782979298029812982298329842985298629872988298929902991299229932994299529962997299829993000300130023003300430053006300730083009301030113012301330143015301630173018301930203021302230233024302530263027302830293030303130323033303430353036303730383039304030413042304330443045304630473048304930503051305230533054305530563057305830593060306130623063306430653066306730683069307030713072307330743075307630773078307930803081308230833084308530863087308830893090309130923093309430953096309730983099310031013102310331043105310631073108310931103111311231133114311531163117311831193120312131223123312431253126312731283129313031313132313331343135313631373138313931403141314231433144314531463147314831493150315131523153315431553156315731583159316031613162316331643165316631673168316931703171317231733174317531763177317831793180318131823183318431853186318731883189319031913192319331943195319631973198319932003201320232033204320532063207320832093210321132123213321432153216321732183219322032213222322332243225322632273228322932303231323232333234323532363237323832393240324132423243324432453246324732483249325032513252325332543255325632573258325932603261326232633264326532663267326832693270327132723273327432753276327732783279328032813282328332843285328632873288328932903291329232933294329532963297329832993300330133023303330433053306330733083309331033113312331333143315331633173318331933203321332233233324332533263327332833293330333133323333333433353336333733383339334033413342334333443345334633473348334933503351335233533354335533563357335833593360336133623363336433653366336733683369337033713372337333743375337633773378337933803381338233833384338533863387338833893390339133923393339433953396339733983399340034013402340334043405340634073408340934103411341234133414341534163417341834193420342134223423342434253426342734283429343034313432343334343435343634373438343934403441344234433444344534463447344834493450345134523453345434553456345734583459346034613462346334643465346634673468346934703471347234733474347534763477347834793480348134823483348434853486348734883489349034913492349334943495349634973498349935003501350235033504350535063507350835093510351135123513351435153516351735183519352035213522352335243525352635273528352935303531353235333534353535363537353835393540354135423543354435453546354735483549355035513552355335543555355635573558355935603561356235633564356535663567356835693570357135723573357435753576357735783579358035813582358335843585358635873588358935903591359235933594359535963597359835993600360136023603360436053606360736083609361036113612361336143615361636173618361936203621362236233624362536263627362836293630363136323633363436353636363736383639364036413642364336443645364636473648364936503651365236533654365536563657365836593660366136623663366436653666366736683669367036713672367336743675367636773678367936803681368236833684368536863687368836893690369136923693369436953696369736983699370037013702370337043705370637073708370937103711371237133714371537163717371837193720372137223723372437253726372737283729373037313732373337343735373637373738373937403741374237433744374537463747374837493750375137523753375437553756375737583759376037613762376337643765376637673768376937703771377237733774377537763777377837793780378137823783378437853786378737883789379037913792379337943795379637973798379938003801380238033804380538063807380838093810381138123813381438153816381738183819382038213822382338243825382638273828382938303831383238333834383538363837383838393840384138423843384438453846384738483849385038513852385338543855385638573858385938603861386238633864386538663867386838693870387138723873387438753876387738783879388038813882388338843885388638873888388938903891389238933894389538963897389838993900390139023903390439053906390739083909391039113912391339143915391639173918391939203921392239233924392539263927392839293930393139323933393439353936393739383939394039413942394339443945394639473948394939503951395239533954395539563957395839593960396139623963396439653966396739683969397039713972397339743975397639773978397939803981398239833984398539863987398839893990399139923993399439953996399739983999400040014002400340044005400640074008400940104011401240134014401540164017401840194020402140224023402440254026402740284029403040314032403340344035403640374038403940404041404240434044404540464047404840494050405140524053405440554056405740584059406040614062406340644065406640674068406940704071407240734074407540764077407840794080408140824083408440854086408740884089409040914092409340944095409640974098409941004101410241034104410541064107410841094110411141124113411441154116411741184119412041214122412341244125412641274128412941304131413241334134413541364137413841394140414141424143414441454146414741484149415041514152415341544155415641574158415941604161416241634164416541664167416841694170417141724173417441754176417741784179418041814182418341844185418641874188418941904191419241934194419541964197419841994200420142024203420442054206420742084209421042114212421342144215421642174218421942204221422242234224422542264227422842294230423142324233423442354236423742384239424042414242424342444245424642474248424942504251425242534254425542564257425842594260426142624263426442654266426742684269427042714272427342744275427642774278427942804281428242834284428542864287428842894290429142924293429442954296429742984299430043014302430343044305430643074308430943104311431243134314431543164317431843194320432143224323432443254326432743284329433043314332433343344335433643374338433943404341434243434344434543464347434843494350435143524353435443554356435743584359436043614362436343644365436643674368436943704371437243734374437543764377437843794380438143824383438443854386438743884389439043914392439343944395439643974398439944004401440244034404440544064407440844094410441144124413441444154416441744184419442044214422442344244425442644274428442944304431443244334434443544364437443844394440444144424443444444454446444744484449445044514452445344544455445644574458445944604461446244634464446544664467446844694470447144724473447444754476447744784479448044814482448344844485448644874488448944904491449244934494449544964497449844994500450145024503450445054506450745084509451045114512451345144515451645174518451945204521452245234524452545264527452845294530453145324533453445354536453745384539454045414542454345444545454645474548454945504551455245534554455545564557455845594560456145624563456445654566456745684569457045714572457345744575457645774578457945804581458245834584458545864587458845894590459145924593459445954596459745984599460046014602460346044605460646074608460946104611461246134614461546164617461846194620462146224623462446254626462746284629463046314632463346344635463646374638463946404641464246434644464546464647464846494650465146524653465446554656465746584659466046614662466346644665466646674668466946704671467246734674467546764677467846794680468146824683468446854686468746884689469046914692469346944695469646974698469947004701470247034704470547064707470847094710471147124713471447154716471747184719472047214722472347244725472647274728472947304731473247334734473547364737473847394740474147424743474447454746474747484749475047514752475347544755475647574758475947604761476247634764476547664767476847694770477147724773477447754776477747784779478047814782478347844785478647874788478947904791479247934794479547964797479847994800480148024803480448054806480748084809481048114812481348144815481648174818481948204821482248234824482548264827482848294830483148324833483448354836483748384839484048414842484348444845484648474848484948504851485248534854485548564857485848594860486148624863486448654866486748684869487048714872487348744875487648774878487948804881488248834884488548864887488848894890489148924893489448954896489748984899490049014902490349044905490649074908490949104911491249134914491549164917491849194920492149224923492449254926492749284929493049314932493349344935493649374938493949404941494249434944494549464947494849494950495149524953495449554956495749584959496049614962496349644965496649674968496949704971497249734974497549764977497849794980498149824983498449854986498749884989499049914992499349944995499649974998499950005001500250035004500550065007500850095010501150125013501450155016501750185019502050215022502350245025502650275028502950305031503250335034503550365037503850395040504150425043504450455046504750485049505050515052505350545055505650575058505950605061506250635064506550665067506850695070507150725073507450755076507750785079508050815082508350845085508650875088508950905091509250935094509550965097509850995100510151025103510451055106510751085109511051115112511351145115511651175118511951205121512251235124512551265127512851295130513151325133513451355136513751385139514051415142514351445145514651475148514951505151515251535154515551565157515851595160516151625163516451655166516751685169517051715172517351745175517651775178517951805181518251835184518551865187518851895190519151925193519451955196519751985199520052015202520352045205520652075208520952105211521252135214521552165217521852195220522152225223522452255226522752285229523052315232523352345235523652375238523952405241524252435244524552465247524852495250525152525253525452555256525752585259526052615262526352645265526652675268526952705271527252735274527552765277527852795280528152825283528452855286528752885289529052915292529352945295529652975298529953005301530253035304530553065307530853095310531153125313531453155316531753185319532053215322532353245325532653275328532953305331533253335334533553365337533853395340534153425343534453455346534753485349535053515352535353545355535653575358535953605361536253635364536553665367536853695370537153725373537453755376537753785379538053815382538353845385538653875388538953905391539253935394539553965397539853995400540154025403540454055406540754085409541054115412541354145415541654175418541954205421542254235424542554265427542854295430543154325433543454355436543754385439544054415442544354445445544654475448544954505451545254535454545554565457545854595460546154625463546454655466546754685469547054715472547354745475547654775478547954805481548254835484548554865487548854895490549154925493549454955496549754985499550055015502550355045505550655075508550955105511551255135514551555165517551855195520552155225523552455255526552755285529553055315532553355345535553655375538553955405541554255435544554555465547554855495550555155525553555455555556555755585559556055615562556355645565556655675568556955705571557255735574557555765577557855795580558155825583558455855586558755885589559055915592559355945595559655975598559956005601560256035604560556065607560856095610561156125613561456155616561756185619562056215622562356245625562656275628562956305631563256335634563556365637563856395640564156425643564456455646564756485649565056515652565356545655565656575658565956605661566256635664566556665667566856695670567156725673567456755676567756785679568056815682568356845685568656875688568956905691569256935694569556965697569856995700570157025703570457055706570757085709571057115712571357145715571657175718571957205721572257235724572557265727572857295730573157325733573457355736573757385739574057415742574357445745574657475748574957505751575257535754575557565757575857595760576157625763576457655766576757685769577057715772577357745775577657775778577957805781578257835784578557865787578857895790579157925793579457955796579757985799580058015802580358045805580658075808580958105811581258135814581558165817581858195820582158225823582458255826582758285829583058315832583358345835583658375838583958405841584258435844584558465847584858495850585158525853585458555856585758585859586058615862586358645865586658675868586958705871587258735874587558765877587858795880588158825883588458855886588758885889589058915892589358945895589658975898589959005901590259035904590559065907590859095910591159125913591459155916591759185919592059215922592359245925592659275928592959305931593259335934593559365937593859395940594159425943594459455946594759485949595059515952595359545955595659575958595959605961596259635964596559665967596859695970597159725973597459755976597759785979598059815982598359845985598659875988598959905991599259935994599559965997599859996000600160026003600460056006600760086009601060116012601360146015601660176018601960206021602260236024602560266027602860296030603160326033603460356036603760386039604060416042604360446045604660476048604960506051605260536054605560566057605860596060606160626063606460656066606760686069607060716072607360746075607660776078607960806081608260836084608560866087608860896090609160926093609460956096609760986099610061016102610361046105610661076108610961106111611261136114611561166117611861196120612161226123612461256126612761286129613061316132613361346135613661376138613961406141614261436144614561466147614861496150615161526153615461556156615761586159616061616162616361646165616661676168616961706171617261736174617561766177617861796180618161826183618461856186618761886189619061916192619361946195619661976198619962006201620262036204620562066207620862096210621162126213621462156216621762186219622062216222622362246225622662276228622962306231623262336234623562366237623862396240624162426243624462456246624762486249625062516252625362546255625662576258625962606261626262636264626562666267626862696270627162726273627462756276627762786279628062816282628362846285628662876288628962906291629262936294629562966297629862996300630163026303630463056306630763086309631063116312631363146315631663176318631963206321632263236324632563266327632863296330633163326333633463356336633763386339634063416342634363446345634663476348634963506351635263536354635563566357635863596360636163626363636463656366636763686369637063716372637363746375637663776378637963806381638263836384638563866387638863896390639163926393639463956396639763986399640064016402640364046405640664076408640964106411641264136414641564166417641864196420642164226423642464256426642764286429643064316432643364346435643664376438643964406441644264436444644564466447644864496450645164526453645464556456645764586459646064616462646364646465646664676468646964706471647264736474647564766477647864796480648164826483648464856486648764886489649064916492649364946495649664976498649965006501650265036504650565066507650865096510651165126513651465156516651765186519652065216522652365246525652665276528652965306531653265336534653565366537653865396540654165426543654465456546654765486549655065516552655365546555655665576558655965606561656265636564656565666567656865696570657165726573657465756576657765786579658065816582658365846585658665876588658965906591659265936594659565966597659865996600660166026603660466056606660766086609661066116612661366146615661666176618661966206621662266236624662566266627662866296630663166326633663466356636663766386639664066416642664366446645664666476648664966506651665266536654665566566657665866596660666166626663666466656666666766686669667066716672667366746675667666776678667966806681668266836684668566866687668866896690669166926693669466956696669766986699670067016702670367046705670667076708670967106711671267136714671567166717671867196720672167226723672467256726672767286729673067316732673367346735673667376738673967406741674267436744674567466747674867496750675167526753675467556756675767586759676067616762676367646765676667676768676967706771677267736774677567766777677867796780678167826783678467856786678767886789679067916792679367946795679667976798679968006801680268036804680568066807680868096810681168126813681468156816681768186819682068216822682368246825682668276828682968306831683268336834683568366837683868396840684168426843684468456846684768486849685068516852685368546855685668576858685968606861686268636864686568666867686868696870687168726873687468756876687768786879688068816882688368846885688668876888688968906891
  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. #region 变量定义
  321. //Web接口类
  322. public WebResult wr = null;
  323. //SmartSEM远程路径
  324. public String RemoteELYPath = "";
  325. public String RemoteMLFPath = "";
  326. //扫描周期
  327. private float cycle_time = 0;
  328. //人工干预
  329. public int hand_intervene = 2;
  330. //样品台保护值
  331. public float X_Min = 0;
  332. public float X_Max = 0.13f;
  333. public float Y_Min = 0;
  334. public float Y_Max = 0.13f;
  335. public float Z_Min = 0;
  336. public float Z_Max = 0.05f;
  337. public float T_Min = -4;
  338. public float T_Max = 70;
  339. public float R_Min = -380;
  340. public float R_Max = 380;
  341. public float M_Min = 0;
  342. public float M_Max = 0.012f;
  343. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  344. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  345. //定义一个全局的消息类
  346. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  347. //全局只有一个fatorySEM
  348. static FactoryHardware factorySEM = FactoryHardware.Instance;
  349. ISEMControl iSEM = factorySEM.ISEM;
  350. //@的作用是不用转义字符\\只打一个就行
  351. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  352. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  354. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  355. const String ImageName31 = @"FIBBefore.tif";
  356. const String ImageName32 = @"FIBAfter.tif";
  357. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  358. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  359. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  360. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  361. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  362. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  364. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  365. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  366. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  367. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  368. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  369. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  370. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  371. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  372. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  373. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  374. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  375. const String ElyDeposition = @"Deposition.ely"; //沉积
  376. const String ElyCrossSection = @"CrossSection.ely"; //切割
  377. const float fMin = (float)0.0000002; //单位是米
  378. const float fSateyZ = (float)0.03;//单位是米
  379. public Boolean key_stop = false;
  380. String focus_path = "";
  381. String FIBfocus_path = "";
  382. String StigX_path = "";
  383. String StigY_path = "";
  384. String EDS_path = "";
  385. String data_path = "";
  386. int m_nWorkHoleNo = -1;
  387. //测量文件
  388. private MeasureFile m_measureFile;
  389. public MeasureFile MeasureFile
  390. {
  391. get { return this.m_measureFile; }
  392. set { this.m_measureFile = value; }
  393. }
  394. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  395. private List<MeasureData.CutHole> m_cutHoles;
  396. public List<MeasureData.CutHole> cutHoles
  397. {
  398. get { return this.m_cutHoles; }
  399. set { this.m_cutHoles = value; }
  400. }
  401. //工作文件夹
  402. private string m_WorkingFolder;
  403. public string WorkingFolder
  404. {
  405. get { return this.m_WorkingFolder; }
  406. set { this.m_WorkingFolder = value; }
  407. }
  408. //程序当前路径
  409. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  410. //线程状态
  411. private ThreadStatus m_ThreadStatus;
  412. public ThreadStatus TStatus
  413. {
  414. get { return this.m_ThreadStatus; }
  415. set { this.m_ThreadStatus = value; }
  416. }
  417. #endregion
  418. //构造函数
  419. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  420. {
  421. LogManager.AddHardwareLog("进入构造函数", true);
  422. TStatus = new ThreadStatus();
  423. cutHoles = new List<MeasureData.CutHole>();
  424. //配置远程连接
  425. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  426. }
  427. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  428. public bool InitMeas(MeasureFile a_measureFile)
  429. {
  430. LogManager.AddHardwareLog("进入初始化函数", true);
  431. m_measureFile = a_measureFile;
  432. List<CutHole> listHoles = m_measureFile.ListCutHole;
  433. foreach (CutHole h in listHoles)
  434. {
  435. if (h.SWITCH == true)
  436. {
  437. m_cutHoles.Add(h);
  438. }
  439. }
  440. if (m_cutHoles.Count == 0)
  441. return false;
  442. if (m_measureFile.MParam.EDS == true)
  443. {
  444. LogManager.AddHardwareLog("能谱分析", true);
  445. Init_MeasDB();
  446. }
  447. return true;
  448. }
  449. //给前台UI发送消息步骤
  450. public void SendMsg(string step_code)
  451. {
  452. arg.Step_Code = step_code;
  453. arg.Time = DateTime.Now;
  454. SendThreadStatus(this, arg);
  455. }
  456. //给前台UI发送孔状态信息
  457. public void SendCutHoleMsg(string a_state, string a_holeName)
  458. {
  459. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  460. arg.HoleName = a_holeName;
  461. arg.State = a_state;
  462. SendCutHolesStatus(this, arg);
  463. }
  464. //测量流程
  465. public void DoMeasure()
  466. {
  467. //创建线程的测量状态的更新
  468. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  469. LogManager.AddHardwareLog("测量线程:开始测量",true);
  470. //检查硬件连接是否正常
  471. LogManager.AddHardwareLog("测量线程:连接硬件", true);
  472. if (!ConnectHardware())
  473. {
  474. MessageBox.Show("连接电镜失败!","重要错误",MessageBoxButtons.OK,MessageBoxIcon.Error);
  475. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  476. LogManager.AddHardwareLog("测量线程报错:连接硬件硬件连接失败", false);
  477. return;
  478. }
  479. //设置工作文件夹
  480. LogManager.AddHardwareLog("测量线程:设置工作文件夹", true);
  481. if (!SetWorkingFolderStr())
  482. {
  483. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  484. LogManager.AddHardwareLog("测量线程报错:设置文件夹失败", false);
  485. return;
  486. }
  487. //设置SmartSEM远程路径
  488. iSEM.SetRemoteELYPath(RemoteELYPath);
  489. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  490. //增加EDS控制
  491. //将停止键复位
  492. key_stop = false;
  493. //开始测量就将模式设置为SEM
  494. LogManager.AddHardwareLog("测量线程:切换到SEM模式", true);
  495. if (!iSEM.CmdFIBModeSEM())
  496. {
  497. LogManager.AddHardwareLog("测量线程报错:开始切换到SEM模式失败。", false);
  498. return;
  499. }
  500. arg.Picture_Information.Work_Status = "SEM";
  501. //设置扫描周期
  502. LogManager.AddHardwareLog("测量线程:设置图像扫描周期为对焦周期", true);
  503. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  504. Thread.Sleep(200);
  505. cycle_time = iSEM.GetCycleTime();
  506. if (cycle_time == 0)
  507. {
  508. LogManager.AddHardwareLog("测量线程报错:获取扫描周期时间失败", false);
  509. return;
  510. }
  511. Thread.Sleep((int)cycle_time +100);
  512. //开始做各个孔的检测
  513. for (int i = 0; i < m_cutHoles.Count; i++)
  514. {
  515. //自动亮度对比度
  516. LogManager.AddHardwareLog("测量线程:开启自动亮度,对比度调节", true);
  517. iSEM.SetAutoBright(100);
  518. Thread.Sleep(200);
  519. iSEM.SetAutoContrast(100);
  520. Thread.Sleep(200);
  521. //LogManager.AddHardwareLog("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  522. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  523. {
  524. LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  525. return;
  526. }
  527. Thread.Sleep(5000);
  528. LogManager.AddHardwareLog("测量线程:测试第"+i.ToString()+"个分析点。", true);
  529. //记录测量序号和孔名
  530. m_nWorkHoleNo = i;
  531. arg.HoleName = m_cutHoles[i].HoleName;
  532. //最终数据存放目录
  533. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  534. //对焦数据存放目录
  535. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  536. m_measureFile.MParam.AutoFocus.Path = focus_path;
  537. if (!Directory.Exists(focus_path))
  538. {
  539. Directory.CreateDirectory(focus_path);
  540. }
  541. //StigX数据存放目录
  542. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  543. m_measureFile.MParam.AutoStigX.Path = StigX_path;
  544. if (!Directory.Exists(StigX_path))
  545. {
  546. Directory.CreateDirectory(StigX_path);
  547. }
  548. //StigY数据存放目录
  549. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  550. m_measureFile.MParam.AutoStigY.Path = StigY_path;
  551. if (!Directory.Exists(StigY_path))
  552. {
  553. Directory.CreateDirectory(StigY_path);
  554. }
  555. //EDS数据存放路径
  556. if (m_measureFile.MParam.EDS == true)
  557. {
  558. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  559. m_measureFile.MParam.EDSP.Path = EDS_path;
  560. if (!Directory.Exists(EDS_path))
  561. {
  562. Directory.CreateDirectory(EDS_path);
  563. }
  564. }
  565. //判断孔状态
  566. if (m_cutHoles[i].STATE != State.Ready)
  567. {
  568. LogManager.AddHardwareLog("测试孔"+ m_cutHoles[i].HoleName+"状态非就绪,不予测量。", true);
  569. continue;
  570. }
  571. //20201127增加Scanrotate Off
  572. iSEM.SetScanRotationOff();
  573. Thread.Sleep(200);
  574. //20.光束等复位
  575. iSEM.SetBeamShiftX(0);
  576. Thread.Sleep(200);
  577. iSEM.SetBeamShiftY(0);
  578. Thread.Sleep(200);
  579. //开始循环工作
  580. if (i == 0)
  581. {
  582. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName+"开始测量。", true);
  583. m_cutHoles[i].START = DateTime.Now;
  584. //切孔操作-开始
  585. m_cutHoles[i].STATE = State.InProcess;
  586. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  587. LogManager.AddHardwareLog("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  588. + m_cutHoles[0].Position.X.ToString()+","
  589. + m_cutHoles[0].Position.Y.ToString()+","
  590. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  591. #region 坐标恢复
  592. //0、先移动Z轴到比较低的位置上。
  593. if (m_measureFile.MParam.Title)//如果是倾斜样品台,移动Z轴
  594. {
  595. if (!iSEM.SetStageGotoZ(fSateyZ))
  596. {
  597. arg.State = false;
  598. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  599. SendMsg("1-0");
  600. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  601. m_cutHoles[i].STATE = State.Failed;
  602. m_cutHoles[i].END = DateTime.Now;
  603. m_measureFile.Save();
  604. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  605. Thread.Sleep(3000);
  606. continue;
  607. }
  608. while (true)
  609. {
  610. Thread.Sleep(4000);
  611. if (iSEM.GetStageIs() == 0)
  612. {
  613. break;
  614. }
  615. }
  616. //判断是否停止进程
  617. if (key_stop)
  618. {
  619. m_cutHoles[i].STATE = State.Failed;
  620. m_cutHoles[i].END = DateTime.Now;
  621. m_measureFile.Save();
  622. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  623. LogManager.AddHardwareLog("停止键被按下", true);
  624. return;
  625. }
  626. }
  627. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  628. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  629. {
  630. arg.State = false;
  631. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  632. SendMsg("1-0");
  633. LogManager.AddHardwareLog("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  634. m_cutHoles[i].STATE = State.Failed;
  635. m_cutHoles[i].END = DateTime.Now;
  636. m_measureFile.Save();
  637. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  638. Thread.Sleep(3000);
  639. continue;
  640. }
  641. while (true)
  642. {
  643. Thread.Sleep(4000);
  644. if (iSEM.GetStageIs() == 0)
  645. {
  646. break;
  647. }
  648. }
  649. //判断是否停止进程
  650. if (key_stop)
  651. {
  652. m_cutHoles[i].STATE = State.Failed;
  653. m_cutHoles[i].END = DateTime.Now;
  654. m_measureFile.Save();
  655. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  656. LogManager.AddHardwareLog("停止键被按下", true);
  657. return;
  658. }
  659. //2、移动XY轴
  660. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  661. {
  662. arg.State = false;
  663. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  664. SendMsg("1-0");
  665. LogManager.AddHardwareLog("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  666. + m_cutHoles[0].Position.X.ToString() + ","
  667. + m_cutHoles[0].Position.Y.ToString()+ ")", false);
  668. m_cutHoles[i].STATE = State.Failed;
  669. m_cutHoles[i].END = DateTime.Now;
  670. m_measureFile.Save();
  671. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  672. Thread.Sleep(3000);
  673. continue;
  674. }
  675. while (true)
  676. {
  677. Thread.Sleep(4000);
  678. if (iSEM.GetStageIs() == 0)
  679. {
  680. break;
  681. }
  682. }
  683. //判断是否停止进程
  684. if (key_stop)
  685. {
  686. m_cutHoles[i].STATE = State.Failed;
  687. m_cutHoles[i].END = DateTime.Now;
  688. m_measureFile.Save();
  689. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  690. LogManager.AddHardwareLog("停止键被按下", true);
  691. return;
  692. }
  693. //3、恢复Z轴
  694. if (m_measureFile.MParam.Title)
  695. {
  696. //恢复Z轴
  697. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  698. {
  699. arg.State = false;
  700. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  701. SendMsg("1-0");
  702. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  703. m_cutHoles[i].STATE = State.Failed;
  704. m_cutHoles[i].END = DateTime.Now;
  705. m_measureFile.Save();
  706. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  707. Thread.Sleep(3000);
  708. continue;
  709. }
  710. while (true)
  711. {
  712. Thread.Sleep(4000);
  713. if (iSEM.GetStageIs() == 0)
  714. {
  715. break;
  716. }
  717. }
  718. //判断是否停止进程
  719. if (key_stop)
  720. {
  721. LogManager.AddHardwareLog("停止键按下。", true);
  722. m_cutHoles[i].STATE = State.Failed;
  723. m_cutHoles[i].END = DateTime.Now;
  724. m_measureFile.Save();
  725. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  726. return;
  727. }
  728. }
  729. arg.State = true;
  730. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  731. SendMsg("1-0");
  732. //4、设置WD
  733. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  734. Thread.Sleep(1000);
  735. #endregion
  736. //第一个点开始测量
  737. if (FirstHole())
  738. {
  739. //保存文件,将测量状态更改
  740. m_cutHoles[i].STATE = State.Success;
  741. m_cutHoles[i].END = DateTime.Now;
  742. m_measureFile.Save();
  743. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  744. }
  745. //失败
  746. else
  747. {
  748. m_cutHoles[i].STATE = State.Failed;
  749. m_cutHoles[i].END = DateTime.Now;
  750. m_measureFile.Save();
  751. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  752. }
  753. }
  754. else
  755. {
  756. //其他孔的测量
  757. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  758. m_cutHoles[i].START = DateTime.Now;
  759. m_cutHoles[i].STATE = State.InProcess;
  760. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  761. //其他孔测量之前的初始化
  762. if (!OtherHole_Init())
  763. {
  764. arg.State = false;
  765. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  766. SendMsg("1-0");
  767. Thread.Sleep(3000);
  768. LogManager.AddHardwareLog("测量线程:" + arg.Message, true);
  769. continue;
  770. }
  771. arg.State = true;
  772. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  773. SendMsg("1-0");
  774. //其他孔开始测量
  775. if (OtherHole())
  776. {
  777. //保存文件,将测量状态更改
  778. m_cutHoles[i].STATE = State.Success;
  779. m_cutHoles[i].END = DateTime.Now;
  780. m_measureFile.Save();
  781. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  782. }
  783. //失败
  784. else
  785. {
  786. m_cutHoles[i].STATE = State.Failed;
  787. m_cutHoles[i].END = DateTime.Now;
  788. m_measureFile.Save();
  789. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  790. }
  791. }
  792. if(key_stop)
  793. {
  794. m_cutHoles[i].END = DateTime.Now;
  795. m_cutHoles[i].STATE = State.Ready;
  796. m_measureFile.Save();
  797. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  798. arg.Message = "用户停止测量";
  799. SendMsg("0-0");
  800. break;
  801. }
  802. //两个点之间更换,加延时以便完成显示
  803. Thread.Sleep(3000);
  804. }
  805. }
  806. //检查硬件连接是否正常
  807. public bool ConnectHardware()
  808. {
  809. //返回硬件的连接状态
  810. return iSEM.ConnectStatus();
  811. }
  812. //设置工作文件夹
  813. public bool SetWorkingFolderStr()
  814. {
  815. WorkingFolder = m_measureFile.FilePath;
  816. return true;
  817. }
  818. //插入PT针
  819. public bool InsertPT()
  820. {
  821. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  822. //SendMsg("调用宏插入PT针宏文件" + fn);
  823. iSEM.CMDMCFFilename(fn);
  824. //延时1s??
  825. Thread.Sleep(1000);
  826. return true;
  827. }
  828. //撤出PT针
  829. public bool RetractPT()
  830. {
  831. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  832. //SendMsg("调用宏撤出PT针宏文件" + fn);
  833. iSEM.CMDMCFFilename(fn);
  834. //延时1s??
  835. Thread.Sleep(1000);
  836. return true;
  837. }
  838. //PT沉积
  839. public bool PTWork()
  840. {
  841. //执行PT沉积的ELY文件
  842. if (!ExcuteEly(m_measureFile.MParam.PTTemp))
  843. {
  844. return false;
  845. }
  846. //等待沉积完成
  847. while (true)
  848. {
  849. Thread.Sleep(7000);
  850. if (iSEM.GetFIBMode() == 0)
  851. {
  852. break;
  853. }
  854. }
  855. return true;
  856. }
  857. //FIB切割
  858. public bool FIBWork()
  859. {
  860. //执行PT沉积的ELY文件
  861. if (!ExcuteEly(m_measureFile.MParam.FIBTemp))
  862. {
  863. return false;
  864. }
  865. //等待切割完成
  866. while (true)
  867. {
  868. Thread.Sleep(10000);
  869. if (iSEM.GetFIBMode() == 0)
  870. {
  871. break;
  872. }
  873. }
  874. return true;
  875. }
  876. //执行ELY文件的步骤
  877. public bool ExcuteEly(string a_filename)
  878. {
  879. //执行ELy文件有三个动作
  880. //1. 选择ELY文件
  881. //SendMsg("选择ELY文件");
  882. if (!iSEM.CmdFIBLoadELY(a_filename))
  883. {
  884. //SendMsg("选择ELY文件失败");
  885. return false;
  886. }
  887. Thread.Sleep(1000);
  888. //2. 确认ELY文件
  889. //SendMsg("确认ELY文件");
  890. if (!iSEM.CmdFIBEXPOSUREELY())
  891. {
  892. //SendMsg("确认ELY文件失败");
  893. return false;
  894. }
  895. Thread.Sleep(1000);
  896. //3. 执行ELY文件
  897. //SendMsg("执行ELY文件");
  898. if (!iSEM.CmdFIBSTARTELY())
  899. {
  900. //SendMsg("执行ELY文件失败");
  901. return false;
  902. }
  903. Thread.Sleep(1000);
  904. return true;
  905. }
  906. /// <summary>
  907. ///13. 自动 定位功能,沉积
  908. /// </summary>
  909. /// <returns></returns>
  910. public bool GetPoistion()
  911. {
  912. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  913. int state = 1;
  914. LogManager.AddHardwareLog("测量线程:13.自动定位、沉积-功能自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString(), true);
  915. Thread.Sleep(200);
  916. //1.控制SEM放大600X
  917. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  918. {
  919. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  920. arg.State = false;
  921. SendMsg("1-6");
  922. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "控制失败", false);
  923. return false;
  924. }
  925. Thread.Sleep(200);
  926. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  927. {
  928. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  929. arg.State = false;
  930. SendMsg("1-6");
  931. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString() + "控制失败", false);
  932. return false;
  933. }
  934. float current = iSEM.GetMagnification();
  935. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  936. {
  937. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  938. Thread.Sleep(200);
  939. current = iSEM.GetMagnification();
  940. }
  941. arg.State = true;
  942. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  943. SendMsg("1-6");
  944. //判断是否停止进程
  945. if (key_stop)
  946. {
  947. LogManager.AddHardwareLog("停止键按下。", true);
  948. return false;
  949. }
  950. //判断是否为仅拍照,不是则执行FIB操作
  951. if (!m_measureFile.MParam.Is_Photograph)
  952. {
  953. LogManager.AddHardwareLog("测量线程:切换到FIB模式。", true);
  954. //6.设置FIB拍照参数——扫描时间、束流等
  955. //7.控制FIB自动亮度、对比度
  956. Thread.Sleep(200);
  957. if (!iSEM.CmdFIBModeFIB())
  958. {
  959. arg.Message = "FIB模式切换失败";
  960. arg.State = false;
  961. SendMsg("1-8");
  962. LogManager.AddHardwareLog("测量线程报错:切换到FIB模式失败。", false);
  963. return false;
  964. }
  965. arg.State = true;
  966. arg.Picture_Information.Work_Status = "FIB";
  967. arg.Message = "FIB模式切换成功";
  968. SendMsg("1-8");
  969. Thread.Sleep(1000);
  970. //判断是否停止进程
  971. if (key_stop)
  972. {
  973. LogManager.AddHardwareLog("停止键按下。", true);
  974. return false;
  975. }
  976. //8.控制FIB拍照
  977. //9.保存照片======更改路径
  978. //20201103,FIB使用定位的放大倍数
  979. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  980. arg.Picture_Information.Picture_FullPath = fileName2;
  981. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  982. Thread.Sleep(200);
  983. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  984. Thread.Sleep(200);
  985. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  986. Thread.Sleep(200);
  987. //FIB的放大位数,将来会改
  988. LogManager.AddHardwareLog("测量线程:设置FIB放大倍数"+ m_measureFile.MParam.Location_Magnification.ToString(), true);
  989. //20201103,FIB使用定位的放大倍数
  990. if (!iSEM.SetFIBMagnification(m_measureFile.MParam.Location_Magnification))
  991. {
  992. arg.Message = "FIB放大倍数设置失败";
  993. arg.State = false;
  994. SendMsg("1-9");
  995. LogManager.AddHardwareLog("测量线程失败:FIB放大倍数设置失败。", false);
  996. return false;
  997. }
  998. arg.Message = "FIB放大倍数设置成功";
  999. arg.State = true;
  1000. SendMsg("1-9");
  1001. Thread.Sleep(200);
  1002. //判断是否停止进程
  1003. if (key_stop)
  1004. {
  1005. LogManager.AddHardwareLog("停止键按下。", true);
  1006. return false;
  1007. }
  1008. //4、设置WD
  1009. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1010. Thread.Sleep(1000);
  1011. //20201127增加自动亮度对比度
  1012. if(m_measureFile.MParam.FIBDo)
  1013. {
  1014. if(m_measureFile.MParam.FIBAutoBC)
  1015. {
  1016. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1017. float m_TempBrightness = 50.0f;
  1018. float m_TempContrast = 30.0f;
  1019. if (m_measureFile.MParam.SampleName == "3")
  1020. {
  1021. m_TempBrightness = 50.0f;
  1022. m_TempContrast = 30.0f;
  1023. iSEM.SetAutoVideoOff();
  1024. Thread.Sleep(200);
  1025. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1026. Thread.Sleep(200);
  1027. iSEM.SetContrast(m_TempContrast); //30.0f
  1028. Thread.Sleep(200);
  1029. }
  1030. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1031. {
  1032. iSEM.SetAutoVideoBrightnessAndContrast();
  1033. //20201128陈工建议增加
  1034. Thread.Sleep(200);
  1035. iSEM.SetAutoBright(100);
  1036. Thread.Sleep(200);
  1037. iSEM.SetAutoContrast(100);
  1038. Thread.Sleep(5000);
  1039. }
  1040. }
  1041. else
  1042. {
  1043. iSEM.SetAutoVideoOff();
  1044. Thread.Sleep(200);
  1045. iSEM.SetBrightness(m_measureFile.MParam.FIBB);
  1046. Thread.Sleep(200);
  1047. iSEM.SetContrast(m_measureFile.MParam.FIBC);
  1048. Thread.Sleep(200);
  1049. }
  1050. }
  1051. //拍照前改变速度,延时
  1052. iSEM.CloseReduced();
  1053. Thread.Sleep(200);
  1054. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1055. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1056. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1057. Thread.Sleep(200);
  1058. cycle_time = iSEM.GetCycleTime();
  1059. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1060. if (!GetImage(fileName2))
  1061. {
  1062. arg.Message = "FIB拍照失败";
  1063. arg.State = false;
  1064. SendMsg("1-11");
  1065. LogManager.AddHardwareLog("测量线程报错:FIB拍照失败。", false);
  1066. return false;
  1067. }
  1068. arg.State = true;
  1069. arg.Picture_Information.Picture_FullPath = fileName2;
  1070. arg.Message = "FIB拍照成功";
  1071. SendMsg("1-11");
  1072. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1073. Thread.Sleep(200);
  1074. cycle_time = iSEM.GetCycleTime();
  1075. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1076. //判断是否停止进程
  1077. if (key_stop)
  1078. {
  1079. LogManager.AddHardwareLog("停止键按下。", true);
  1080. return false;
  1081. }
  1082. iSEM.CmdFIBModeSEM();
  1083. Thread.Sleep(200);
  1084. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1085. LogManager.AddHardwareLog("测量线程:调用图像处理接口,准备移动样品台", true);
  1086. LogManager.AddHardwareLog("文件名=" + fileName2, true);
  1087. LogManager.AddHardwareLog("样品类型=" + m_measureFile.MParam.SampleName, true);
  1088. LogManager.AddHardwareLog("供应商名称=" + m_measureFile.MParam.Firm, true);
  1089. wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1090. LogManager.AddHardwareLog("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString()+")", true);
  1091. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1092. if (state == 1)
  1093. {
  1094. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1095. float xc = (x1 + x2)/2;
  1096. float yc = (y1 + y2)/2;
  1097. x0 = xc - 512;
  1098. y0 = 384 - yc;
  1099. LogManager.AddHardwareLog("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1100. px = iSEM.GetPixelSize();
  1101. //修改FIB切割的ELY文件坐标
  1102. XmlDocument xmlDoc = new XmlDocument();
  1103. xmlDoc.Load(m_measureFile.MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1104. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1105. if (xns != null)
  1106. {
  1107. XmlAttributeCollection attributeCol = xns.Attributes;
  1108. //遍历自己点属性
  1109. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1110. LogManager.AddHardwareLog("XML-Width_a = " + width_a.ToString(), true);
  1111. foreach (XmlAttribute attri in attributeCol)
  1112. {
  1113. if (attri.Name == "x")
  1114. {
  1115. attri.InnerText = ((x0 * px)*1000000 - width_a).ToString();
  1116. LogManager.AddHardwareLog("XML-TopLeft-X = " + attri.InnerText, true);
  1117. }
  1118. else if (attri.Name == "y")
  1119. {
  1120. attri.InnerText = ((y0 * px)*1000000-2.791).ToString();
  1121. LogManager.AddHardwareLog("XML-TopLeft-Y = " + attri.InnerText, true);
  1122. }
  1123. }
  1124. }
  1125. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1126. if (xns != null)
  1127. {
  1128. XmlAttributeCollection attributeCol = xns.Attributes;
  1129. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1130. //遍历自己点属性
  1131. foreach (XmlAttribute attri in attributeCol)
  1132. {
  1133. if (attri.Name == "x")
  1134. {
  1135. attri.InnerText = ((x0 * px)*1000000 - width).ToString();
  1136. }
  1137. else if (attri.Name == "y")
  1138. {
  1139. attri.InnerText = (((y0 * px) *1000000) + 2 - 2.791).ToString();
  1140. }
  1141. }
  1142. }
  1143. xmlDoc.Save(m_measureFile.MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1144. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1145. if (m_measureFile.MParam.PT)
  1146. {
  1147. xmlDoc = new XmlDocument();
  1148. xmlDoc.Load(m_measureFile.MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1149. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1150. if (xns != null)
  1151. {
  1152. XmlAttributeCollection attributeCol = xns.Attributes;
  1153. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1154. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1155. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1156. //遍历自己点属性
  1157. foreach (XmlAttribute attri in attributeCol)
  1158. {
  1159. if (attri.Name == "x")
  1160. {
  1161. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1162. }
  1163. else if (attri.Name == "y")
  1164. {
  1165. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1166. }
  1167. }
  1168. }
  1169. xmlDoc.Save(m_measureFile.MParam.PTTemp);
  1170. }
  1171. if (hand_intervene == 1)
  1172. {
  1173. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1174. }
  1175. }
  1176. else
  1177. {
  1178. arg.Message = "图像接口参数state返回值为零";
  1179. arg.State = false;
  1180. SendMsg("1-12");
  1181. if (hand_intervene == 1)
  1182. {
  1183. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1184. {
  1185. return false;
  1186. }
  1187. }
  1188. else
  1189. {
  1190. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1191. return false;
  1192. }
  1193. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1194. return false;
  1195. }
  1196. //判断是否停止进程
  1197. if (key_stop)
  1198. {
  1199. LogManager.AddHardwareLog("停止键按下", true);
  1200. return false;
  1201. }
  1202. //11.自动工具样品类型参数确定是否需要PT沉积
  1203. if (m_measureFile.MParam.PT)
  1204. {
  1205. if (!iSEM.CmdFIBModeFIB())
  1206. {
  1207. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1208. return false;
  1209. }
  1210. Thread.Sleep(200);
  1211. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1212. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1213. {
  1214. LogManager.AddHardwareLog("测量线程:插入PT针" + arg.Message, true);
  1215. if (!InsertPT())
  1216. {
  1217. arg.Message = "插入PT针失败";
  1218. arg.State = false;
  1219. SendMsg("1-13");
  1220. LogManager.AddHardwareLog("测量线程报错:"+ arg.Message, false);
  1221. return false;
  1222. }
  1223. arg.State = true;
  1224. arg.Message = "插入PT针成功";
  1225. SendMsg("1-13");
  1226. }
  1227. //判断是否停止进程
  1228. if (key_stop)
  1229. {
  1230. LogManager.AddHardwareLog("停止键按下", true);
  1231. return false;
  1232. }
  1233. //3. 根据坐标进行PT沉积
  1234. if (!PTWork())
  1235. {
  1236. arg.Message = "PT沉积失败";
  1237. arg.State = false;
  1238. SendMsg("1-14");
  1239. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1240. return false;
  1241. }
  1242. arg.State = true;
  1243. arg.Message = "PT沉积成功";
  1244. SendMsg("1-14");
  1245. //判断是否停止进程
  1246. if (key_stop)
  1247. {
  1248. LogManager.AddHardwareLog("停止键按下", true);
  1249. return false;
  1250. }
  1251. //15.根据样品类型决定是否撤出PT针
  1252. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1253. {
  1254. if (!RetractPT())
  1255. {
  1256. arg.Message = "撤出PT针失败";
  1257. arg.State = false;
  1258. SendMsg("1-15");
  1259. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1260. return false;
  1261. }
  1262. arg.State = true;
  1263. arg.Message = "撤出PT针成功";
  1264. SendMsg("1-15");
  1265. }
  1266. //判断是否停止进程
  1267. if (key_stop)
  1268. {
  1269. LogManager.AddHardwareLog("停止键按下", true);
  1270. return false;
  1271. }
  1272. if (!iSEM.CmdFIBModeSEM())
  1273. {
  1274. //arg.Message = "切割前SEM拍照失败。";
  1275. //arg.State = false;
  1276. //SendMsg("1-17");
  1277. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1278. return false;
  1279. }
  1280. }
  1281. }
  1282. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1283. float[] firstPosition = iSEM.GetStagePosition();
  1284. m_cutHoles[0].Position.X = firstPosition[0];
  1285. m_cutHoles[0].Position.Y = firstPosition[1];
  1286. m_cutHoles[0].Position.Z = firstPosition[2];
  1287. m_cutHoles[0].Position.T = firstPosition[3];
  1288. m_cutHoles[0].Position.R = firstPosition[4];
  1289. m_cutHoles[0].Position.M = firstPosition[5];
  1290. //这里要调用文件保存功能
  1291. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1292. + firstPosition[1].ToString() + ","
  1293. + firstPosition[2].ToString() + ","
  1294. + firstPosition[3].ToString() + ","
  1295. + firstPosition[4].ToString() + ","
  1296. + firstPosition[5].ToString() + ")";
  1297. arg.State = true;
  1298. SendMsg("1-16");
  1299. //判断是否停止进程
  1300. if (key_stop)
  1301. {
  1302. LogManager.AddHardwareLog("停止键按下", true);
  1303. return false;
  1304. }
  1305. return true;
  1306. }
  1307. /// <summary>
  1308. /// 14. FIB切割
  1309. /// </summary>
  1310. /// <returns></returns>
  1311. public bool FIBCross()
  1312. {
  1313. int state = 0;
  1314. #if CHECK
  1315. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1316. if (mag < 200)
  1317. {
  1318. mag = 200;
  1319. }
  1320. String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
  1321. iSEM.SetMagnification(mag);
  1322. Thread.Sleep(2000);
  1323. iSEM.CmdSaveRate();
  1324. Thread.Sleep(200);
  1325. cycle_time = iSEM.GetCycleTime();
  1326. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1327. if (!GetImage(fileName1))
  1328. {
  1329. arg.Message = "切割前SEM拍照失败。";
  1330. arg.State = false;
  1331. SendMsg("1-17");
  1332. LogManager.AddHardwareLog("测量线程报错:SEM切割前图像拍照失败", false);
  1333. return false;
  1334. }
  1335. iSEM.CmdFocusRate();
  1336. Thread.Sleep(200);
  1337. cycle_time = iSEM.GetCycleTime();
  1338. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1339. arg.Message = "切割前SEM拍照成功。";
  1340. arg.Picture_Information.Picture_FullPath = fileName1;
  1341. arg.State = true;
  1342. SendMsg("1-17");
  1343. #endif
  1344. if (!iSEM.CmdFIBModeFIB())
  1345. {
  1346. arg.Message = "切换到FIB模式失败。";
  1347. arg.State = false;
  1348. SendMsg("1-18");
  1349. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1350. return false;
  1351. }
  1352. arg.Message = "切换到FIB模式成功。";
  1353. arg.State = true;
  1354. SendMsg("1-18");
  1355. Thread.Sleep(1000);
  1356. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1357. float current = iSEM.GetMagnification();
  1358. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  1359. {
  1360. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1361. Thread.Sleep(200);
  1362. current = iSEM.GetMagnification();
  1363. }
  1364. Thread.Sleep(2000);
  1365. //14.自动控制FIB切割
  1366. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1367. //2.控制FIB进行切割
  1368. //以上1、2步全部用ELY文件代替
  1369. if (!FIBWork())
  1370. {
  1371. arg.Message = "FIB切割失败";
  1372. arg.State = false;
  1373. SendMsg("1-19");
  1374. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1375. return false;
  1376. }
  1377. arg.State = true;
  1378. arg.Message = "FIB切割成功";
  1379. SendMsg("1-19");
  1380. Thread.Sleep(300);
  1381. //判断是否停止进程
  1382. if (key_stop)
  1383. {
  1384. LogManager.AddHardwareLog("停止键按下", true);
  1385. return false;
  1386. }
  1387. //做切割后SEM的拍照
  1388. LogManager.AddHardwareLog("测量线程:切割后SEM拍照", true);
  1389. if (!iSEM.CmdFIBModeSEM())
  1390. {
  1391. //arg.Message = "切割后SEM拍照失败。";
  1392. //arg.State = false;
  1393. //SendMsg("1-20");
  1394. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1395. return false;
  1396. }
  1397. Thread.Sleep(1000);
  1398. #if CHECK
  1399. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
  1400. iSEM.SetMagnification(mag);
  1401. Thread.Sleep(2000);
  1402. iSEM.CmdSaveRate();
  1403. Thread.Sleep(200);
  1404. cycle_time = iSEM.GetCycleTime();
  1405. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1406. if (!GetImage(fileName2))
  1407. {
  1408. arg.Message = "切割后SEM拍照失败。";
  1409. arg.State = false;
  1410. SendMsg("1-20");
  1411. LogManager.AddHardwareLog("测量线程报错:SEM切割后图像拍照失败", false);
  1412. return false;
  1413. }
  1414. arg.Picture_Information.Picture_FullPath = fileName2;
  1415. arg.Message = "切割后SEM拍照成功。";
  1416. arg.State = true;
  1417. SendMsg("1-20");
  1418. iSEM.CmdFocusRate();
  1419. Thread.Sleep(200);
  1420. cycle_time = iSEM.GetCycleTime();
  1421. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1422. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1423. wr.Img_Cut_Success(fileName1, fileName2, out state);
  1424. LogManager.AddHardwareLog("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
  1425. if (state == 0)
  1426. {
  1427. LogManager.AddHardwareLog("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
  1428. arg.Message = "图像接口参数state返回值为零";
  1429. arg.State = false;
  1430. SendMsg("1-22");
  1431. if (hand_intervene == 1)
  1432. {
  1433. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1434. {
  1435. return false;
  1436. }
  1437. }
  1438. else
  1439. {
  1440. return false;
  1441. }
  1442. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1443. }
  1444. arg.State = true;
  1445. LogManager.AddHardwareLog("验证切割准确性成功。", true);
  1446. arg.Message = "FIB切割校验成功";
  1447. SendMsg("1-22");
  1448. //判断是否停止进程
  1449. if (key_stop)
  1450. {
  1451. LogManager.AddHardwareLog("停止键按下。", true);
  1452. return false;
  1453. }
  1454. #endif
  1455. return true;
  1456. }
  1457. /// <summary>
  1458. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1459. /// </summary>
  1460. /// <returns></returns>
  1461. public bool FindCross()
  1462. {
  1463. float x2 = 0, y2 = 0;
  1464. int state = 0;
  1465. //切换到SEM模式
  1466. if (!iSEM.CmdFIBModeSEM())
  1467. {
  1468. arg.Message = "SEM模式切换失败";
  1469. arg.State = false;
  1470. SendMsg("1-23");
  1471. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1472. return false;
  1473. }
  1474. arg.State = true;
  1475. arg.Message = "SEM模式切换成功";
  1476. SendMsg("1-23");
  1477. arg.Picture_Information.Work_Status = "SEM";
  1478. Thread.Sleep(1000);
  1479. //判断是否停止进程
  1480. if (key_stop)
  1481. {
  1482. LogManager.AddHardwareLog("停止键按下", true);
  1483. return false;
  1484. }
  1485. //1.控制SEM放大到300倍
  1486. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  1487. {
  1488. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  1489. arg.State = false;
  1490. SendMsg("1-24");
  1491. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1492. return false;
  1493. }
  1494. Thread.Sleep(200);
  1495. //iSEM.SetAutoVideoBrightnessAndContrast();
  1496. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1497. float m_TempBrightness = 50.0f;
  1498. float m_TempContrast = 30.0f;
  1499. if (m_measureFile.MParam.SampleName == "3")
  1500. {
  1501. m_TempBrightness = 48.0f;
  1502. m_TempContrast = 29.0f;
  1503. }
  1504. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1505. iSEM.SetAutoVideoOff();
  1506. Thread.Sleep(200);
  1507. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1508. Thread.Sleep(200);
  1509. iSEM.SetContrast(m_TempContrast); //30.0f
  1510. Thread.Sleep(2000);
  1511. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1512. if (mag < 200)
  1513. {
  1514. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1515. if (m_measureFile.MParam.SampleName == "3")
  1516. mag = 400;
  1517. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1518. mag = 200;
  1519. }
  1520. if (!iSEM.SetMagnification(mag))
  1521. {
  1522. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1523. arg.State = false;
  1524. SendMsg("1-24");
  1525. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1526. return false;
  1527. }
  1528. Thread.Sleep(200);
  1529. float current = iSEM.GetMagnification();
  1530. Thread.Sleep(200);
  1531. while (Math.Abs(current - mag) > 2)
  1532. {
  1533. iSEM.SetMagnification(mag);
  1534. Thread.Sleep(200);
  1535. current = iSEM.GetMagnification();
  1536. Thread.Sleep(200);
  1537. }
  1538. arg.State = true;
  1539. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1540. SendMsg("1-24");
  1541. Thread.Sleep(2000);
  1542. //判断是否停止进程
  1543. if (key_stop)
  1544. {
  1545. LogManager.AddHardwareLog("停止键按下", true);
  1546. return false;
  1547. }
  1548. //3.控制SEM拍照
  1549. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1550. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1551. String fileName4 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName4;
  1552. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1553. LogManager.AddHardwareLog("fileName4====================" + fileName4, true);
  1554. arg.Picture_Information.Picture_FullPath = fileName4;
  1555. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1556. Thread.Sleep(200);
  1557. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1558. Thread.Sleep(200);
  1559. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1560. Thread.Sleep(200);
  1561. //拍照前改变速度,延时
  1562. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1563. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1564. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1565. Thread.Sleep(200);
  1566. cycle_time = iSEM.GetCycleTime();
  1567. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1568. if (!GetImage(fileName4))
  1569. {
  1570. arg.State = false;
  1571. arg.Message = "SEM拍照找切割位置失败";
  1572. SendMsg("1-25");
  1573. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1574. return false;
  1575. }
  1576. arg.Picture_Information.Picture_FullPath = fileName4;
  1577. arg.State = true;
  1578. arg.Message = "SEM拍照成功";
  1579. SendMsg("1-25");
  1580. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1581. Thread.Sleep(200);
  1582. cycle_time = iSEM.GetCycleTime();
  1583. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1584. //判断是否停止进程
  1585. if (key_stop)
  1586. {
  1587. return false;
  1588. }
  1589. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1590. //5.根据坐标控制SEM移动到切孔位置,居中
  1591. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  1592. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  1593. wr.Img_Trapezoid_Top_Center_Position(fileName4,Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  1594. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1595. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1596. if (state == 1)
  1597. {
  1598. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1599. if (!MoveToPixByMoveStage(x2, y2))
  1600. {
  1601. arg.State = false;
  1602. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1603. SendMsg("1-26");
  1604. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1605. return false;
  1606. }
  1607. //判断是否移动完成
  1608. while (true)
  1609. {
  1610. Thread.Sleep(4000);
  1611. if (iSEM.GetStageIs() == 0)
  1612. {
  1613. break;
  1614. }
  1615. }
  1616. arg.State = true;
  1617. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1618. SendMsg("1-26");
  1619. //高倍到低倍不进行对焦
  1620. //拍照前改变速度,延时
  1621. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1622. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1623. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1624. Thread.Sleep(200);
  1625. cycle_time = iSEM.GetCycleTime();
  1626. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1627. //String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1628. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1629. String fileName10 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName10;
  1630. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1631. LogManager.AddHardwareLog("fileName10====================" + fileName10, true);
  1632. if (!GetImage(fileName10))
  1633. {
  1634. //arg.State = false;
  1635. //arg.Message = "SEM拍照失败";
  1636. //SendMsg("1-25");
  1637. //return false;
  1638. LogManager.AddHardwareLog("测量线程报错:找到已切割的位置拍照失败", true);
  1639. }
  1640. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1641. Thread.Sleep(200);
  1642. cycle_time = iSEM.GetCycleTime();
  1643. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1644. if (hand_intervene == 1)
  1645. {
  1646. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1647. }
  1648. }
  1649. else
  1650. {
  1651. arg.Message = "图像接口参数state返回值为零";
  1652. arg.State = false;
  1653. SendMsg("1-26");
  1654. if (hand_intervene == 1)
  1655. {
  1656. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1657. {
  1658. return false;
  1659. }
  1660. }
  1661. else
  1662. {
  1663. return false;
  1664. }
  1665. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1666. return false;
  1667. }
  1668. //判断是否停止进程
  1669. if (key_stop)
  1670. {
  1671. LogManager.AddHardwareLog("停止键按下", true);
  1672. return false;
  1673. }
  1674. return true;
  1675. }
  1676. /// <summary>
  1677. /// 17.自动控制SEM拍截面照
  1678. /// </summary>
  1679. /// <returns></returns>
  1680. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1681. {
  1682. int state = 0;
  1683. #region 设置拍照的电压
  1684. LogManager.AddHardwareLog("测量线程:设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true);
  1685. //1、放大倍数参数photograph_
  1686. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Photograph_Voltage))
  1687. {
  1688. arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1689. arg.State = false;
  1690. SendMsg("1-27");
  1691. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1692. return false;
  1693. }
  1694. //add
  1695. #endregion
  1696. Thread.Sleep(200);
  1697. #region 设置拍照的放大倍数
  1698. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数====" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  1699. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  1700. {
  1701. arg.Message = "放大倍数调整失败";
  1702. arg.State = false;
  1703. SendMsg("1-27");
  1704. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1705. return false;
  1706. }
  1707. float set = m_measureFile.MParam.Photograph_Magnification;
  1708. float current = iSEM.GetMagnification();
  1709. while(Math.Abs(current- set) > 1)
  1710. {
  1711. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  1712. Thread.Sleep(200);
  1713. current = iSEM.GetMagnification();
  1714. }
  1715. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString()+ "成功";
  1716. arg.State = true;
  1717. SendMsg("1-27");
  1718. Thread.Sleep(3000 + (Int32)cycle_time);
  1719. //判断是否停止进程
  1720. if (key_stop)
  1721. {
  1722. LogManager.AddHardwareLog("停止键按下", true);
  1723. return false;
  1724. }
  1725. #endregion
  1726. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1727. //if(!iSEM.SetAutoVideoBrightnessAndContrast())
  1728. //{
  1729. // LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1730. // return false;
  1731. //}
  1732. //Thread.Sleep(5000);
  1733. //2.控制SEM自动对焦、亮度、对比度-接口
  1734. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1735. if ((m_measureFile.MParam.SampleName == "2")||(m_measureFile.MParam.SampleName == "3"))
  1736. iSEM.SetReduced(402, 128, 500, 500);
  1737. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1738. iSEM.SetReduced(402, 128, 340, 256);
  1739. Thread.Sleep(200);
  1740. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1741. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1742. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1743. Thread.Sleep(200);
  1744. cycle_time = iSEM.GetCycleTime();
  1745. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1746. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1747. if (!iSEM.SetAutoVideoOff())
  1748. {
  1749. LogManager.AddHardwareLog("测量线程报错:关闭自动亮度对比度失败", false);
  1750. return false;
  1751. }
  1752. Thread.Sleep(5000);
  1753. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1754. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1755. if (ImageFocus1(false))
  1756. {
  1757. arg.Message = "自动对焦完成";
  1758. arg.State = true;
  1759. SendMsg("1-28");
  1760. }
  1761. else
  1762. {
  1763. arg.Message = "自动对焦失败";
  1764. arg.State = false;
  1765. SendMsg("1-28");
  1766. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1767. return false;
  1768. }
  1769. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1770. iSEM.CloseReduced();
  1771. Thread.Sleep(200);
  1772. cycle_time = iSEM.GetCycleTime();
  1773. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1774. //判断是否停止进程
  1775. if (key_stop)
  1776. {
  1777. LogManager.AddHardwareLog("停止键按下", true);
  1778. return false;
  1779. }
  1780. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1781. float m_TempBrightness = 50.0f;
  1782. float m_TempContrast = 30.0f;
  1783. if (m_measureFile.MParam.SampleName == "3")
  1784. {
  1785. m_TempBrightness = 50f;
  1786. m_TempContrast = 29f;
  1787. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1788. Thread.Sleep(200);
  1789. iSEM.SetContrast(m_TempContrast); //30.0f
  1790. Thread.Sleep(200);
  1791. }
  1792. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1793. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1794. {
  1795. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1796. return false;
  1797. }
  1798. Thread.Sleep(5000);
  1799. //3、设置SEM补偿角度
  1800. if (m_measureFile.MParam.Is_Photograph == false)
  1801. {
  1802. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString()+"度", true);
  1803. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1804. {
  1805. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1806. arg.State = false;
  1807. SendMsg("1-29");
  1808. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1809. return false;
  1810. }
  1811. arg.State = true;
  1812. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1813. SendMsg("1-29");
  1814. Thread.Sleep(200);
  1815. //判断是否停止进程
  1816. if (key_stop)
  1817. {
  1818. LogManager.AddHardwareLog("停止键按下", false);
  1819. return false;
  1820. }
  1821. }
  1822. //4、拍照,5、保存照片
  1823. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1824. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1825. String fileName5 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  1826. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1827. LogManager.AddHardwareLog("fileName5====================" + fileName5, true);
  1828. arg.Picture_Information.Picture_FullPath = fileName5;
  1829. arg.Picture_Information.Work_Status = "SEM";
  1830. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1831. Thread.Sleep(200);
  1832. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1833. Thread.Sleep(200);
  1834. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1835. Thread.Sleep(200);
  1836. //拍照前改变速度,延时
  1837. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1838. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1839. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1840. Thread.Sleep(200);
  1841. cycle_time = iSEM.GetCycleTime();
  1842. Thread.Sleep(Convert.ToInt32(cycle_time)*2);
  1843. if (!GetImage(fileName5))
  1844. {
  1845. arg.Message = "SEM拍照失败";
  1846. arg.State = false;
  1847. SendMsg("1-30");
  1848. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1849. return false;
  1850. }
  1851. arg.Picture_Information.Picture_FullPath = fileName5;
  1852. arg.State = true;
  1853. arg.Message = "SEM拍照成功";
  1854. SendMsg("1-30");
  1855. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1856. Thread.Sleep(200);
  1857. cycle_time = iSEM.GetCycleTime();
  1858. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1859. //判断是否停止进程
  1860. if (key_stop)
  1861. {
  1862. LogManager.AddHardwareLog("停止键按下", true);
  1863. return false;
  1864. }
  1865. #endregion
  1866. if (m_measureFile.MParam.Is_Photograph == false)
  1867. {
  1868. #region 对当前矩形进行旋转校正
  1869. //8,计算切割面区域偏移角度及方向
  1870. float degree = 0;
  1871. int direction = 0;
  1872. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  1873. LogManager.AddHardwareLog("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1874. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1875. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1876. if (state == 1)
  1877. {
  1878. //梯形角度
  1879. iSEM.SetScanRotationOn();
  1880. Thread.Sleep(200);
  1881. //20201128陈工要求,谭博返回角度*0.7
  1882. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  1883. Thread.Sleep(200);
  1884. arg.State = true;
  1885. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1886. SendMsg("1-31");
  1887. if (hand_intervene == 1)
  1888. {
  1889. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1890. }
  1891. }
  1892. else
  1893. {
  1894. arg.Message = "图像接口参数State返回值为零";
  1895. arg.State = false;
  1896. SendMsg("1-31");
  1897. if(hand_intervene == 1)
  1898. {
  1899. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1900. {
  1901. return false;
  1902. }
  1903. }
  1904. else
  1905. {
  1906. //return false;
  1907. }
  1908. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1909. }
  1910. //判断是否停止进程
  1911. if (key_stop)
  1912. {
  1913. LogManager.AddHardwareLog("停止键按下", true);
  1914. return false;
  1915. }
  1916. Thread.Sleep(200);
  1917. //12拍照
  1918. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1919. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1920. String fileName6 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  1921. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1922. LogManager.AddHardwareLog("fileName6====================" + fileName6, true);
  1923. arg.Picture_Information.Picture_FullPath = fileName6;
  1924. arg.Picture_Information.Work_Status = "SEM";
  1925. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1926. Thread.Sleep(200);
  1927. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1928. Thread.Sleep(200);
  1929. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1930. Thread.Sleep(200);
  1931. //拍照前改变速度,延时
  1932. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1933. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1934. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1935. Thread.Sleep(200);
  1936. cycle_time = iSEM.GetCycleTime();
  1937. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1938. if (!GetImage(fileName6))
  1939. {
  1940. arg.Message = "SEM拍照失败";
  1941. arg.State = false;
  1942. SendMsg("1-33");
  1943. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1944. return false;
  1945. }
  1946. arg.Picture_Information.Picture_FullPath = fileName6;
  1947. arg.State = true;
  1948. arg.Message = "SEM拍照成功";
  1949. SendMsg("1-33");
  1950. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1951. Thread.Sleep(200);
  1952. cycle_time = iSEM.GetCycleTime();
  1953. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1954. //判断是否停止进程
  1955. if (key_stop)
  1956. {
  1957. LogManager.AddHardwareLog("停止键按下", true);
  1958. return false;
  1959. }
  1960. #endregion
  1961. #region 获取两个位置上及放大倍数
  1962. //计算两个测量区域坐标
  1963. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1964. List<float> mag = new List<float>();
  1965. System.Drawing.Point ct0;
  1966. float mag1, mag2, magMax;
  1967. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1968. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  1969. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  1970. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1971. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  1972. "输入产品" + m_measureFile.MParam.Firm.ToString()
  1973. + "输出中心点1为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  1974. + ",输出放大倍数1==" + mag[0]
  1975. + "倍,输出中心点2为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  1976. + "输出放大倍数2==" + mag[0]
  1977. + "倍,输出中心点3为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1978. #endregion
  1979. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1980. {
  1981. arg.State = true;
  1982. arg.Message = "获取位置及放大倍数成功";
  1983. SendMsg("1-34");
  1984. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1985. float xs = iSEM.GetBeamShiftX();
  1986. Thread.Sleep(200);
  1987. float ys = iSEM.GetBeamShiftY();
  1988. Thread.Sleep(200);
  1989. float xpCur = iSEM.GetStageAtX();
  1990. Thread.Sleep(200);
  1991. float ypCur = iSEM.GetStageAtY();
  1992. Thread.Sleep(200);
  1993. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  1994. + "y=" + ys.ToString() + ","
  1995. + "原来样品台的位置x= " + xpCur.ToString()
  1996. + "y=" + ypCur.ToString(), true);
  1997. #endregion
  1998. //找到放大倍数最大值
  1999. magMax = mag[0];
  2000. for (int m = 1; m < mag.Count; m++)
  2001. {
  2002. if (mag[m] > magMax)
  2003. {
  2004. magMax = mag[m];
  2005. }
  2006. }
  2007. #region 移动到梯形左上角
  2008. //20201127将视野移动到梯形左上角位置
  2009. MoveToPix(ct0.X, ct0.Y);
  2010. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  2011. + "," + ct0.Y.ToString() + ")", true);
  2012. //关闭自动亮度对比度
  2013. iSEM.SetAutoVideoOff();
  2014. Thread.Sleep(2000);
  2015. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2016. if (m_measureFile.MParam.SampleName == "3")
  2017. {
  2018. m_TempBrightness = 50f;
  2019. m_TempContrast = 29f;
  2020. iSEM.SetBrightness(m_TempBrightness); //50.0f
  2021. Thread.Sleep(200);
  2022. iSEM.SetContrast(m_TempContrast); //30.0f
  2023. Thread.Sleep(200);
  2024. }
  2025. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  2026. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  2027. if ( m_measureFile.MParam.SampleName == "3")
  2028. {
  2029. iSEM.SetReduced(402, 128, 480, 450);
  2030. }else
  2031. {
  2032. iSEM.SetReduced(402, 128, 340, 256);
  2033. }
  2034. Thread.Sleep(200);
  2035. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  2036. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2037. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  2038. Thread.Sleep(200);
  2039. cycle_time = iSEM.GetCycleTime();
  2040. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2041. //放大到6000倍
  2042. iSEM.SetMagnification(magMax / 2);
  2043. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2044. set = magMax / 2;
  2045. current = iSEM.GetMagnification();
  2046. while (Math.Abs(current - set) > 1)
  2047. {
  2048. iSEM.SetMagnification(set);
  2049. Thread.Sleep(200);
  2050. current = iSEM.GetMagnification();
  2051. }
  2052. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--6000倍!", true);
  2053. if (m_measureFile.MParam.SampleName == "3")
  2054. {
  2055. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  2056. iSEM.SetBrightness(50.0f); //50.0f
  2057. Thread.Sleep(200);
  2058. iSEM.SetContrast(30.0f); //30.0f
  2059. Thread.Sleep(200);
  2060. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  2061. }
  2062. //自动对焦
  2063. if (!ImageFocus1(true))
  2064. {
  2065. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦失败!", true);
  2066. return false;
  2067. }
  2068. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦成功!", true);
  2069. ////自动消像散
  2070. //if (!ImageStig1())
  2071. //{
  2072. // return false;
  2073. //}
  2074. //放大到10000倍
  2075. iSEM.SetMagnification(magMax);
  2076. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2077. set = magMax;
  2078. current = iSEM.GetMagnification();
  2079. while (Math.Abs(current - set) > 1)
  2080. {
  2081. iSEM.SetMagnification(set);
  2082. Thread.Sleep(200);
  2083. current = iSEM.GetMagnification();
  2084. }
  2085. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--12000倍!", true);
  2086. //自动对焦
  2087. if (!ImageFocus1(true))
  2088. {
  2089. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦失败!", true);
  2090. return false;
  2091. }
  2092. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦成功!", true);
  2093. ////自动消像散
  2094. //if (!ImageStig1())
  2095. //{
  2096. // return false;
  2097. //}
  2098. ////放大到20000倍
  2099. //iSEM.SetMagnification(magMax*2);
  2100. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2101. //set = magMax*2;
  2102. //current = iSEM.GetMagnification();
  2103. //while (Math.Abs(current - set) > 1)
  2104. //{
  2105. // iSEM.SetMagnification(set);
  2106. // Thread.Sleep(200);
  2107. // current = iSEM.GetMagnification();
  2108. //}
  2109. ////自动对焦
  2110. //if (!ImageFocus1())
  2111. //{
  2112. // return false;
  2113. //}
  2114. iSEM.CloseReduced();
  2115. Thread.Sleep(200);
  2116. cycle_time = iSEM.GetCycleTime();
  2117. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2118. #endregion
  2119. #region 循环拍照
  2120. for (int n = 0; n < ct.Count; n++)
  2121. {
  2122. #region 恢复到拍照的状态
  2123. iSEM.SetStageGotoX(xpCur);
  2124. while (true)
  2125. {
  2126. Thread.Sleep(4000);
  2127. if (iSEM.GetStageIs() == 0)
  2128. {
  2129. break;
  2130. }
  2131. }
  2132. iSEM.SetStageGotoY(ypCur);
  2133. while (true)
  2134. {
  2135. Thread.Sleep(4000);
  2136. if (iSEM.GetStageIs() == 0)
  2137. {
  2138. break;
  2139. }
  2140. }
  2141. //恢复原来的放大倍数
  2142. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  2143. {
  2144. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2145. return false;
  2146. }
  2147. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2148. set = m_measureFile.MParam.Photograph_Magnification;
  2149. current = iSEM.GetMagnification();
  2150. while (Math.Abs(current - set) > 1)
  2151. {
  2152. iSEM.SetMagnification(set);
  2153. Thread.Sleep(200);
  2154. current = iSEM.GetMagnification();
  2155. }
  2156. //恢复BeamShift的百分比值
  2157. iSEM.SetBeamShiftX(xs);
  2158. Thread.Sleep(200);
  2159. iSEM.SetBeamShiftY(ys);
  2160. Thread.Sleep(200);
  2161. #endregion
  2162. #region 移动到指定点位置
  2163. if (!MoveToPix(ct[n].X, ct[n].Y))
  2164. {
  2165. arg.State = false;
  2166. arg.Message = "移动到第一个点位置失败";
  2167. SendMsg("1-" + (35 + n).ToString());
  2168. //移动到第一个点失败
  2169. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2170. }
  2171. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2172. + "," + ct[n].Y.ToString() + ")", true);
  2173. #endregion
  2174. #region 如果是第一个点,则1W倍对焦
  2175. if (n == 0)
  2176. {
  2177. ////在第一个点上放大1W倍对焦
  2178. //if (!iSEM.SetMagnification(mag[n]))
  2179. //{
  2180. // LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2181. // return false;
  2182. //}
  2183. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2184. //while (true)
  2185. //{
  2186. // current = iSEM.GetMagnification();
  2187. // if (Math.Abs(current - mag[n]) < 1)
  2188. // {
  2189. // Thread.Sleep(200);
  2190. // break;
  2191. // }
  2192. // Thread.Sleep(200);
  2193. // iSEM.SetMagnification(set);
  2194. // Thread.Sleep(200);
  2195. //}
  2196. //if (m_measureFile.MParam.SampleName == "2")
  2197. //{
  2198. // //窗口对焦
  2199. // iSEM.SetReduced1(340, 1, 340, 256);
  2200. // Thread.Sleep(200);
  2201. // iSEM.CmdFocusRate();
  2202. // Thread.Sleep(200);
  2203. // cycle_time = iSEM.GetCycleTime();
  2204. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2205. // //自动对焦
  2206. // if (!ImageFocus1(false))
  2207. // {
  2208. // return false;
  2209. // }
  2210. // //恢复全屏
  2211. // iSEM.CloseReduced();
  2212. // Thread.Sleep(200);
  2213. // cycle_time = iSEM.GetCycleTime();
  2214. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2215. //}
  2216. //else
  2217. //{
  2218. // //窗口对焦
  2219. // //iSEM.SetReduced(402, 128, 800, 600);
  2220. // //Thread.Sleep(200);
  2221. // iSEM.CmdFocusRate();
  2222. // Thread.Sleep(200);
  2223. // cycle_time = iSEM.GetCycleTime();
  2224. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2225. // //自动对焦
  2226. // if (!ImageFocus1(false))
  2227. // {
  2228. // return false;
  2229. // }
  2230. // //恢复全屏
  2231. // //iSEM.CloseReduced();
  2232. // //Thread.Sleep(200);
  2233. // cycle_time = iSEM.GetCycleTime();
  2234. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2235. //}
  2236. LogManager.AddHardwareLog("========测量线程:进入内部观察,不对焦!", true);
  2237. //增亮图像
  2238. iSEM.SetAutoVideoOff();
  2239. Thread.Sleep(200);
  2240. float currentBright = iSEM.GetBrightness();
  2241. Thread.Sleep(200);
  2242. float currentContrast = iSEM.GetContrast();
  2243. Thread.Sleep(200);
  2244. //add by sun 2020-12-17 黄工觉得太亮
  2245. int m_BrightMore = 2;
  2246. int m_ContrastMore = 2;
  2247. if (m_measureFile.MParam.SampleName == "3")
  2248. {
  2249. m_BrightMore = 0;
  2250. m_ContrastMore = 0;
  2251. }
  2252. //add by sun 2020-12-17 黄工觉得太亮 end
  2253. iSEM.SetBrightness(currentBright + m_BrightMore);
  2254. Thread.Sleep(200);
  2255. iSEM.SetContrast(currentContrast + m_ContrastMore);
  2256. Thread.Sleep(200);
  2257. }
  2258. #endregion
  2259. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  2260. //if((m_measureFile.MParam.SampleName=="3")&&(n==0))
  2261. //{
  2262. // if (!GetImageFromSEM(mag[n]/2))
  2263. // LogManager.AddHardwareLog("测量线程报错:第一个区域放大一半倍数" + (mag[n]/2).ToString() + "控制失败", true);
  2264. //}
  2265. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  2266. #region 拍照
  2267. if (!iSEM.SetMagnification(mag[n]))
  2268. {
  2269. arg.State = false;
  2270. arg.Message = "移动到第一个点位置拍照失败";
  2271. SendMsg("1-35");
  2272. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2273. return false;
  2274. }
  2275. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成!", true);
  2276. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2277. set = mag[n];
  2278. current = iSEM.GetMagnification();
  2279. while (Math.Abs(current - set) > 1)
  2280. {
  2281. iSEM.SetMagnification(set);
  2282. Thread.Sleep(200);
  2283. current = iSEM.GetMagnification();
  2284. }
  2285. //获取像素大小
  2286. lsize.Add(iSEM.GetPixelSize());
  2287. Thread.Sleep(200);
  2288. //String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2289. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  2290. String fileName7 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag[n].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + n.ToString() + "-" + ImageNameTwo_1;
  2291. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  2292. LogManager.AddHardwareLog("fileName7====================" + fileName7, true);
  2293. arg.Picture_Information.Picture_FullPath = fileName7;
  2294. arg.Picture_Information.Work_Status = "SEM";
  2295. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2296. Thread.Sleep(200);
  2297. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2298. Thread.Sleep(200);
  2299. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2300. Thread.Sleep(200);
  2301. //拍照前改变速度,延时
  2302. iSEM.CmdLineScan();
  2303. Thread.Sleep(200);
  2304. cycle_time = iSEM.GetCycleTime();
  2305. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2306. if (!GetImage(fileName7))
  2307. {
  2308. arg.State = false;
  2309. arg.Message = "移动到第一个点位置失败";
  2310. SendMsg("1-35");
  2311. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2312. return false;
  2313. }
  2314. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  2315. iSEM.CmdPixelScan();
  2316. Thread.Sleep(200);
  2317. limg_path.Add(fileName7);
  2318. arg.Picture_Information.Picture_FullPath = fileName7;
  2319. arg.State = true;
  2320. arg.Message = "移动到第一个点位置拍照成功";
  2321. SendMsg("1-35");
  2322. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2323. Thread.Sleep(200);
  2324. cycle_time = iSEM.GetCycleTime();
  2325. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2326. // add by zjx 在测量图上显示放大倍数和像素大小等信息
  2327. float size = iSEM.GetPixelSize();
  2328. SaveMeasDataPic(fileName7,mag[n], size);
  2329. // add by zjx 在测量图上显示放大倍数和像素大小等信息 end
  2330. #endregion
  2331. }
  2332. #endregion
  2333. if (hand_intervene == 1)
  2334. {
  2335. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2336. }
  2337. }
  2338. else
  2339. {
  2340. if (hand_intervene == 1)
  2341. {
  2342. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2343. {
  2344. // return false;
  2345. }
  2346. }
  2347. else
  2348. {
  2349. //return false;
  2350. }
  2351. arg.State = false;
  2352. arg.Message = "获取位置及放大倍数失败";
  2353. SendMsg("1-34");
  2354. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2355. }
  2356. //判断是否停止进程
  2357. if (key_stop)
  2358. {
  2359. LogManager.AddHardwareLog("停止键按下", true);
  2360. return false;
  2361. }
  2362. }
  2363. ////14光束复位和Rotation关闭开关
  2364. //arg.Message = "光束复位成功";
  2365. //arg.State = true;
  2366. //SendMsg("1-36");
  2367. iSEM.SetTiltAngleOff();
  2368. Thread.Sleep(200);
  2369. iSEM.SetScanRotationOff();
  2370. Thread.Sleep(200);
  2371. iSEM.SetBeamShiftX(0);
  2372. Thread.Sleep(200);
  2373. iSEM.SetBeamShiftY(0);
  2374. Thread.Sleep(200);
  2375. //判断是否停止进程
  2376. if (key_stop)
  2377. {
  2378. return false;
  2379. }
  2380. return true;
  2381. }
  2382. //第一个孔的测试过程
  2383. public bool FirstHole()
  2384. {
  2385. // add by zjx 2020-12-18 为了测试只做能谱部分
  2386. if (m_measureFile.MParam.IsonlyEDSForDebug == false)
  2387. {
  2388. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2389. LogManager.AddHardwareLog("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2390. if (!SetVoltageAndIPROBE())
  2391. {
  2392. LogManager.AddHardwareLog("测量线程:第一孔=====设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2393. return false;
  2394. }
  2395. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2396. //设置拉直的放大倍数
  2397. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), true);
  2398. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2399. {
  2400. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), false);
  2401. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2402. arg.State = false;
  2403. SendMsg("1-1");
  2404. return false;
  2405. }
  2406. float current = iSEM.GetMagnification();
  2407. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2408. {
  2409. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2410. Thread.Sleep(200);
  2411. current = iSEM.GetMagnification();
  2412. }
  2413. arg.Message = "拉直放大倍数设置成功!";
  2414. arg.State = true;
  2415. SendMsg("1-1");
  2416. Thread.Sleep(2000);
  2417. //自动化流程-每个点都需要补偿54度
  2418. if (m_measureFile.MParam.Is_Photograph == false)
  2419. {
  2420. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2421. if (!TiltCorrection(54.0f))
  2422. {
  2423. LogManager.AddHardwareLog("测量线程报错:倾斜补偿角度为54度失败", false);
  2424. arg.Message = "角度补偿54度失败!";
  2425. arg.State = false;
  2426. SendMsg("1-2");
  2427. return false;
  2428. }
  2429. arg.Message = "角度补偿54度成功!";
  2430. arg.State = true;
  2431. SendMsg("1-2");
  2432. Thread.Sleep(1000);
  2433. //判断是否停止进程
  2434. if (key_stop)
  2435. {
  2436. LogManager.AddHardwareLog("停止键按下", true);
  2437. return false;
  2438. }
  2439. }
  2440. // 2是5/6类样品,不需要拉直
  2441. if (m_measureFile.MParam.SampleName != "2")
  2442. {
  2443. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2444. if (!Straighten_Handle())
  2445. {
  2446. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2447. return false;
  2448. }
  2449. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2450. //判断是否停止进程
  2451. if (key_stop)
  2452. {
  2453. LogManager.AddHardwareLog("停止键按下。", true);
  2454. return false;
  2455. }
  2456. }
  2457. else
  2458. {
  2459. arg.Message = "拉直操作自动对焦成功!";
  2460. arg.State = true;
  2461. SendMsg("1-3");
  2462. Thread.Sleep(1000);
  2463. arg.Message = "拉直拍照成功!";
  2464. arg.Picture_Information.Picture_FullPath = "";
  2465. arg.State = true;
  2466. SendMsg("1-4");
  2467. Thread.Sleep(1000);
  2468. arg.Message = "拉直操作完成";
  2469. arg.State = true;
  2470. SendMsg("1-5");
  2471. Thread.Sleep(1000);
  2472. }
  2473. //13. 自动 定位功能
  2474. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2475. if (!GetPoistion())
  2476. {
  2477. LogManager.AddHardwareLog("测量线程报错:自动定位失败,程序退出。", false);
  2478. return false;
  2479. }
  2480. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2481. //判断是否停止进程
  2482. if (key_stop)
  2483. {
  2484. LogManager.AddHardwareLog("停止键按下。", true);
  2485. return false;
  2486. }
  2487. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2488. if (m_measureFile.MParam.Is_Photograph == false)
  2489. {
  2490. if (m_measureFile.MParam.IsCutingForDebug)
  2491. {
  2492. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!==" + m_measureFile.MParam.IsCutingForDebug, true);
  2493. if (!FIBCross())
  2494. {
  2495. LogManager.AddHardwareLog("测量线程报错:自动控制FIB切割失败。", false);
  2496. return false;
  2497. }
  2498. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2499. }
  2500. }
  2501. //del by sun 2020-12-15 temp end
  2502. //判断是否停止进程
  2503. if (key_stop)
  2504. {
  2505. return false;
  2506. }
  2507. //16.找到切割位置
  2508. if (m_measureFile.MParam.Is_Photograph == false)
  2509. {
  2510. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2511. if (!FindCross())
  2512. {
  2513. return false;
  2514. }
  2515. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2516. //判断是否停止进程
  2517. if (key_stop)
  2518. {
  2519. return false;
  2520. }
  2521. }
  2522. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2523. //将过程17最后的拍照图片提出给18步进行调用
  2524. List<String> limg_path = new List<string>();
  2525. List<float> lsize = new List<float>();
  2526. //17.自动控制SEM拍截面照
  2527. if (!ShotSection(ref limg_path, ref lsize))
  2528. {
  2529. //return false;
  2530. }
  2531. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2532. //判断是否停止进程
  2533. if (key_stop)
  2534. {
  2535. return false;
  2536. }
  2537. //这段是临时的
  2538. //arg.State = true;
  2539. //arg.Message = "测量尺寸成功";
  2540. //SendMsg("1-40");
  2541. //18.自动层高分析
  2542. if (m_measureFile.MParam.Is_Photograph == false)
  2543. {
  2544. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2545. float size = iSEM.GetPixelSize();
  2546. int state = 1;
  2547. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2548. if (state == 0)
  2549. {
  2550. arg.Message = "测量尺寸失败";
  2551. arg.State = false;
  2552. SendMsg("1-40");
  2553. return false;
  2554. }
  2555. arg.State = true;
  2556. arg.Message = "测量尺寸成功";
  2557. SendMsg("1-40");
  2558. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2559. }
  2560. }
  2561. //add by zjx 2020-12-18 为了测试只做能谱部分 end
  2562. //19.能谱分析
  2563. if (m_measureFile.MParam.EDS)
  2564. {
  2565. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析开始===" + m_measureFile.MParam.EDS, true);
  2566. EDSAnalysis();
  2567. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析结束===" + m_measureFile.MParam.EDS, true);
  2568. }
  2569. //20.复位
  2570. LogManager.AddHardwareLog("===========测量线程:20.复位开始", true);
  2571. BeamShiftReset();
  2572. return true;
  2573. }
  2574. //非第一个孔的测试过程
  2575. public bool OtherHole()
  2576. {
  2577. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2578. LogManager.AddHardwareLog("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2579. if (!SetVoltageAndIPROBE())
  2580. {
  2581. LogManager.AddHardwareLog("测量线程:非第一孔==设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2582. return false;
  2583. }
  2584. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2585. //设置拉直的放大倍数
  2586. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2587. {
  2588. LogManager.AddHardwareLog("拉直放大倍数设置失败,程序退出。", true);
  2589. arg.Message = "拉直放大倍数设置失败!";
  2590. arg.State = false;
  2591. SendMsg("1-1");
  2592. return false;
  2593. }
  2594. float current = iSEM.GetMagnification();
  2595. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2596. {
  2597. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2598. Thread.Sleep(200);
  2599. current = iSEM.GetMagnification();
  2600. }
  2601. arg.Message = "拉直放大倍数设置成功!";
  2602. arg.State = true;
  2603. SendMsg("1-1");
  2604. Thread.Sleep(2000);
  2605. //自动化流程-每个点都需要补偿54度
  2606. if (m_measureFile.MParam.Is_Photograph == false)
  2607. {
  2608. if (!TiltCorrection(54.0f))
  2609. {
  2610. arg.Message = "角度补偿54度失败!";
  2611. arg.State = false;
  2612. SendMsg("1-2");
  2613. return false;
  2614. }
  2615. arg.Message = "角度补偿54度成功!";
  2616. arg.State = true;
  2617. SendMsg("1-2");
  2618. Thread.Sleep(2000);
  2619. //判断是否停止进程
  2620. if (key_stop)
  2621. {
  2622. return false;
  2623. }
  2624. }
  2625. if (m_measureFile.MParam.SampleName != "2")
  2626. {
  2627. if (!Straighten_Handle())
  2628. {
  2629. LogManager.AddHardwareLog("测量线程报错:拉直操作失败。", true);
  2630. return false;
  2631. }
  2632. //判断是否停止进程
  2633. if (key_stop)
  2634. {
  2635. LogManager.AddHardwareLog("停止键按下。", true);
  2636. return false;
  2637. }
  2638. }
  2639. else
  2640. {
  2641. arg.Message = "拉直操作自动对焦成功!";
  2642. arg.State = true;
  2643. SendMsg("1-3");
  2644. Thread.Sleep(1000);
  2645. arg.Message = "拉直拍照成功!";
  2646. arg.Picture_Information.Picture_FullPath = "";
  2647. arg.State = true;
  2648. SendMsg("1-4");
  2649. Thread.Sleep(1000);
  2650. arg.Message = "拉直操作完成";
  2651. arg.State = true;
  2652. SendMsg("1-5");
  2653. }
  2654. //13. 自动 定位功能
  2655. if (!GetPoistion())
  2656. {
  2657. return false;
  2658. }
  2659. //判断是否停止进程
  2660. if (key_stop)
  2661. {
  2662. return false;
  2663. }
  2664. //14.自动控制FIB切割
  2665. if (m_measureFile.MParam.Is_Photograph == false)
  2666. {
  2667. if (!FIBCross())
  2668. {
  2669. return false;
  2670. }
  2671. }
  2672. //判断是否停止进程
  2673. if (key_stop)
  2674. {
  2675. return false;
  2676. }
  2677. // 16.找到切割位置
  2678. if (m_measureFile.MParam.Is_Photograph == false)
  2679. {
  2680. if (!FindCross())
  2681. {
  2682. return false;
  2683. }
  2684. //判断是否停止进程
  2685. if (key_stop)
  2686. {
  2687. return false;
  2688. }
  2689. }
  2690. //将过程17最后的拍照图片提出给18步进行调用
  2691. List<String> limg_path = new List<string>();
  2692. List<float> lsize = new List<float>();
  2693. //17.自动控制SEM拍截面照
  2694. if (!ShotSection(ref limg_path, ref lsize))
  2695. {
  2696. //return false;
  2697. }
  2698. //判断是否停止进程
  2699. if (key_stop)
  2700. {
  2701. return false;
  2702. }
  2703. //这段是临时的
  2704. //arg.State = true;
  2705. //arg.Message = "测量尺寸成功";
  2706. //SendMsg("1-40");
  2707. //18.自动层高分析
  2708. if (m_measureFile.MParam.Is_Photograph == false)
  2709. {
  2710. float size = iSEM.GetPixelSize();
  2711. int state = 1;
  2712. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2713. if (state == 0)
  2714. {
  2715. arg.Message = "测量尺寸失败";
  2716. arg.State = false;
  2717. SendMsg("1-40");
  2718. return false;
  2719. }
  2720. arg.State = true;
  2721. arg.Message = "测量尺寸成功";
  2722. SendMsg("1-40");
  2723. }
  2724. //19.能谱分析
  2725. if (m_measureFile.MParam.EDS)
  2726. {
  2727. EDSAnalysis();
  2728. }
  2729. //20.复位 del by sun 2020-12-15
  2730. //BeamShiftReset();
  2731. //del by sun 2020-12-15 end
  2732. return true;
  2733. }
  2734. //测试完第一个孔后的样品台初始化操作。
  2735. //再调用CommonWork执行非第一个孔的测试过程
  2736. public bool OtherHole_Init()
  2737. {
  2738. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2739. #region 初始化
  2740. //1、不只拍照,且不是倾斜观测,则移动T轴
  2741. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2742. {
  2743. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2744. if (!iSEM.SetStageGotoT(0))
  2745. {
  2746. LogManager.AddHardwareLog("样品台归零失败", false);
  2747. return false;
  2748. }
  2749. while (true)
  2750. {
  2751. Thread.Sleep(5000);
  2752. if (iSEM.GetStageIs() == 0)
  2753. {
  2754. break;
  2755. }
  2756. }
  2757. //判断是否停止进程
  2758. if (key_stop)
  2759. {
  2760. LogManager.AddHardwareLog("停止键按下", true);
  2761. return false;
  2762. }
  2763. }
  2764. //2、如果是倾斜观测,则移动Z轴
  2765. if(m_measureFile.MParam.Title==true)
  2766. {
  2767. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2768. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_measureFile.MParam.ZDistance/1000))
  2769. //20201109, Z轴降到安全的位置上
  2770. if(!iSEM.SetStageGotoZ(fSateyZ))
  2771. {
  2772. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2773. return false;
  2774. }
  2775. while (true)
  2776. {
  2777. Thread.Sleep(5000);
  2778. if (iSEM.GetStageIs() == 0)
  2779. {
  2780. break;
  2781. }
  2782. }
  2783. //判断是否停止进程
  2784. if (key_stop)
  2785. {
  2786. LogManager.AddHardwareLog("停止键按下", true);
  2787. return false;
  2788. }
  2789. }
  2790. //3. 根据光镜坐标控制样品台移动
  2791. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2792. {
  2793. //SendMsg("移动失败");
  2794. LogManager.AddHardwareLog("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2795. return false;
  2796. }
  2797. LogManager.AddHardwareLog("移动R轴到="+ currentHole.Position.R.ToString(), true);
  2798. while (true)
  2799. {
  2800. Thread.Sleep(5000);
  2801. if (iSEM.GetStageIs() == 0)
  2802. {
  2803. break;
  2804. }
  2805. }
  2806. //判断是否停止进程
  2807. if (key_stop)
  2808. {
  2809. LogManager.AddHardwareLog("停止键按下", true);
  2810. return false;
  2811. }
  2812. if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2813. {
  2814. //SendMsg("移动失败");
  2815. LogManager.AddHardwareLog("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString()+"," +currentHole.Position.X.ToString()+")", false);
  2816. return false;
  2817. }
  2818. LogManager.AddHardwareLog("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2819. while (true)
  2820. {
  2821. Thread.Sleep(10000);
  2822. if (iSEM.GetStageIs() == 0)
  2823. {
  2824. break;
  2825. }
  2826. }
  2827. //判断是否停止进程
  2828. if (key_stop)
  2829. {
  2830. LogManager.AddHardwareLog("停止键按下", true);
  2831. return false;
  2832. }
  2833. //4、倾斜观测时恢复Z轴
  2834. if (m_measureFile.MParam.Title == true)
  2835. {
  2836. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2837. if (currentHole.Position.Z > 0.043)
  2838. {
  2839. LogManager.AddHardwareLog("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2840. return false;
  2841. }
  2842. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2843. {
  2844. LogManager.AddHardwareLog("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2845. return false;
  2846. }
  2847. while (true)
  2848. {
  2849. Thread.Sleep(5000);
  2850. if (iSEM.GetStageIs() == 0)
  2851. {
  2852. break;
  2853. }
  2854. }
  2855. //判断是否停止进程
  2856. if (key_stop)
  2857. {
  2858. LogManager.AddHardwareLog("停止键按下", true);
  2859. return false;
  2860. }
  2861. }
  2862. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2863. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2864. {
  2865. if (!iSEM.SetStageGotoT(54))
  2866. {
  2867. LogManager.AddHardwareLog("测量线程报错:校正54度有误", true);
  2868. return false;
  2869. }
  2870. while (true)
  2871. {
  2872. Thread.Sleep(5000);
  2873. if (iSEM.GetStageIs() == 0)
  2874. {
  2875. break;
  2876. }
  2877. }
  2878. }
  2879. //判断是否停止进程
  2880. if (key_stop)
  2881. {
  2882. LogManager.AddHardwareLog("停止键按下", true);
  2883. return false;
  2884. }
  2885. //4、设置WD
  2886. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2887. Thread.Sleep(1000);
  2888. #endregion
  2889. return true;
  2890. }
  2891. //初始化拉直操作
  2892. public bool Straighten_Handle()
  2893. {
  2894. if (m_measureFile.MParam.Title)
  2895. {
  2896. //倾斜样品台,SEM视野是黑色的
  2897. LogManager.AddHardwareLog("测量线程:恢复到工作位置后重新调亮图像。", true);
  2898. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2899. {
  2900. LogManager.AddHardwareLog("测量线程报错:重新设置到标准工作距离失败。", false);
  2901. return false;
  2902. }
  2903. Thread.Sleep(7000); //自动亮度对比度使用
  2904. }
  2905. //1、自动对焦
  2906. LogManager.AddHardwareLog("测量线程报错:拉直操作前自动对焦开始", true);
  2907. iSEM.SetReduced(402, 128, 340, 256);
  2908. Thread.Sleep(200);
  2909. //add by sun 2020-12-15
  2910. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2911. //add by sun 2020-12-15 end
  2912. Thread.Sleep(200);
  2913. cycle_time = iSEM.GetCycleTime();
  2914. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2915. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2916. float m_TempBrightness = 50.0f;
  2917. float m_TempContrast = 30.0f;
  2918. if (m_measureFile.MParam.SampleName == "3")
  2919. {
  2920. m_TempBrightness = 48.0f;
  2921. m_TempContrast = 29.0f;
  2922. }
  2923. //add by sun 2020-12-18 解决1类样品拉直太白造成无法拉直问题
  2924. if (m_measureFile.MParam.SampleName == "1")
  2925. {
  2926. m_TempBrightness = 50.0f;
  2927. m_TempContrast = 29.0f;
  2928. }
  2929. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2930. iSEM.SetAutoVideoOff();
  2931. Thread.Sleep(200);
  2932. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2933. Thread.Sleep(200);
  2934. iSEM.SetContrast(m_TempContrast);//30.0f
  2935. Thread.Sleep(200);
  2936. if (!ImageFocus1(false))
  2937. {
  2938. LogManager.AddHardwareLog("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2939. arg.Message = "拉直操作自动对焦失败!";
  2940. arg.State = false;
  2941. SendMsg("1-3");
  2942. return false;
  2943. }
  2944. iSEM.CloseReduced();
  2945. Thread.Sleep(200);
  2946. cycle_time = iSEM.GetCycleTime();
  2947. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2948. iSEM.SetAutoVideoBrightnessAndContrast();
  2949. Thread.Sleep(5000);
  2950. arg.Message = "拉直操作自动对焦成功!";
  2951. arg.State = true;
  2952. SendMsg("1-3");
  2953. //判断是否停止进程
  2954. if (key_stop)
  2955. {
  2956. LogManager.AddHardwareLog("停止键按下。", true);
  2957. return false;
  2958. }
  2959. //2、拍张照片
  2960. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2961. LogManager.AddHardwareLog("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2962. //拍照前改变速度,延时
  2963. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2964. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2965. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2966. Thread.Sleep(200);
  2967. cycle_time = iSEM.GetCycleTime();
  2968. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2969. if (!GetImage(fileName0))
  2970. {
  2971. LogManager.AddHardwareLog("测量线程报错:拉直拍照失败", false);
  2972. arg.Message = "拉直拍照失败";
  2973. arg.State = false;
  2974. SendMsg("1-4");
  2975. return false;
  2976. }
  2977. arg.Message = "拉直拍照成功!";
  2978. arg.Picture_Information.Picture_FullPath = fileName0;
  2979. arg.State = true;
  2980. SendMsg("1-4");
  2981. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2982. Thread.Sleep(200);
  2983. cycle_time = iSEM.GetCycleTime();
  2984. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2985. //3、华为接口,获取旋转角度
  2986. float degree = 0;
  2987. int direction = 0;
  2988. int state = 1;
  2989. wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  2990. LogManager.AddHardwareLog("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  2991. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2992. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2993. if (state == 0)
  2994. {
  2995. LogManager.AddHardwareLog("测量线程:图像处理接口参数state返回为零" ,false);
  2996. arg.Message = "图像处理接口参数state返回为零";
  2997. arg.State = false;
  2998. SendMsg("1-5");
  2999. if (hand_intervene == 1)
  3000. {
  3001. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  3002. {
  3003. return false;
  3004. }
  3005. }
  3006. else
  3007. {
  3008. return false;
  3009. }
  3010. return false;
  3011. }
  3012. if (direction == 2)
  3013. {
  3014. degree = -degree;
  3015. }
  3016. if (degree != 0)
  3017. {
  3018. //4、拉直,旋转R轴
  3019. LogManager.AddHardwareLog("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  3020. //选择之前,先降Z轴
  3021. float Zpos = iSEM.GetStageAtZ();
  3022. Thread.Sleep(200);
  3023. LogManager.AddHardwareLog("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  3024. if (!iSEM.SetStageGotoZ(fSateyZ))
  3025. {
  3026. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  3027. return false;
  3028. }
  3029. while (true)
  3030. {
  3031. Thread.Sleep(4000);
  3032. if (iSEM.GetStageIs() == 0)
  3033. {
  3034. break;
  3035. }
  3036. }
  3037. //判断是否停止进程
  3038. if (key_stop)
  3039. {
  3040. LogManager.AddHardwareLog("停止键按下", true);
  3041. return false;
  3042. }
  3043. iSEM.SetStageDeltaR(degree);
  3044. while (true)
  3045. {
  3046. Thread.Sleep(4000);
  3047. if (iSEM.GetStageIs() == 0)
  3048. {
  3049. break;
  3050. }
  3051. }
  3052. if (!iSEM.SetStageGotoZ(Zpos))
  3053. {
  3054. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  3055. return false;
  3056. }
  3057. while (true)
  3058. {
  3059. Thread.Sleep(4000);
  3060. if (iSEM.GetStageIs() == 0)
  3061. {
  3062. break;
  3063. }
  3064. }
  3065. //判断是否停止进程
  3066. if (key_stop)
  3067. {
  3068. LogManager.AddHardwareLog("停止键按下", true);
  3069. return false;
  3070. }
  3071. //4、设置WD
  3072. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3073. Thread.Sleep(1000);
  3074. }
  3075. arg.Message = "拉直操作完成";
  3076. arg.State = true;
  3077. SendMsg("1-5");
  3078. return true;
  3079. }
  3080. //角度补偿
  3081. public bool TiltCorrection(float a_fAngle)
  3082. {
  3083. if (!iSEM.SetTiltAngleOn())
  3084. {
  3085. return false;
  3086. }
  3087. Thread.Sleep(200);
  3088. //恢复原始状态
  3089. if (!iSEM.SetTiltAngle(a_fAngle))
  3090. {
  3091. return false;
  3092. }
  3093. return true;
  3094. }
  3095. //拍图
  3096. public bool GetImage(String a_fileName)
  3097. {
  3098. LogManager.AddHardwareLog("获取分辨率开始!", true);
  3099. //3. 获取分辨率
  3100. int[] ImageSize = iSEM.GetImageStore();
  3101. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3102. {
  3103. return false;
  3104. }
  3105. short width = (short)ImageSize[0];
  3106. short height = (short)ImageSize[1];
  3107. LogManager.AddHardwareLog("获取分辨率结束!"+ a_fileName +"===="+ width+ "*"+height, true);
  3108. //4. 抓图
  3109. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  3110. {
  3111. LogManager.AddHardwareLog("抓图失败!", true);
  3112. return false;
  3113. }
  3114. return true;
  3115. }
  3116. //拍图1
  3117. public bool GetImage1(String a_fileName)
  3118. {
  3119. //3. 获取分辨率
  3120. int[] ImageSize = iSEM.GetImageStore();
  3121. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3122. {
  3123. return false;
  3124. }
  3125. short width = (short)ImageSize[0];
  3126. short height = (short)ImageSize[1];
  3127. //4. 抓图
  3128. if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
  3129. {
  3130. return false;
  3131. }
  3132. return true;
  3133. }
  3134. #region 算法设计
  3135. //执行自动对焦
  3136. public bool ImageFocus()
  3137. {
  3138. if (m_measureFile.MParam.FocusMode == 1)//手动
  3139. {
  3140. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3141. {
  3142. }
  3143. else
  3144. {
  3145. return false;
  3146. }
  3147. }
  3148. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3149. {
  3150. //郝工增加自动对焦算法
  3151. //处理文件夹
  3152. if (Directory.Exists(focus_path))
  3153. {
  3154. Directory.Delete(focus_path, true);
  3155. }
  3156. Thread.Sleep(3000);
  3157. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3158. Thread.Sleep(1000);
  3159. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3160. Thread.Sleep(1000);
  3161. //再创建文件夹
  3162. Directory.CreateDirectory(focus_path);
  3163. //1、对焦参数类,2、输出工作距离
  3164. int wd = 0;
  3165. //20201015 根据当前的工作距离重新计算对焦位置
  3166. float currentWd = iSEM.GetWorkingDistance();
  3167. //m_measureFile.MParam.AutoFocus.UP = currentWd * 1000000 - m_measureFile.MParam.AutoFocus.Step;
  3168. //m_measureFile.MParam.AutoFocus.Down = currentWd * 1000000 + m_measureFile.MParam.AutoFocus.Step;
  3169. Thread.Sleep(2000);
  3170. float currentMag = iSEM.GetMagnification();
  3171. Thread.Sleep(2000);
  3172. FocusParam pFoucs = new FocusParam();
  3173. if (currentMag <= m_measureFile.MParam.Photograph_Magnification)
  3174. {
  3175. pFoucs = m_measureFile.MParam.AutoFocus;
  3176. pFoucs.UP = 5050;
  3177. pFoucs.Down = 5150;
  3178. pFoucs.Step = 50;
  3179. pFoucs.fStep = 10;
  3180. pFoucs.Range = 50;
  3181. //4、设置WD
  3182. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3183. Thread.Sleep(1000);
  3184. }
  3185. else
  3186. {
  3187. pFoucs = m_measureFile.MParam.AutoFocus;
  3188. pFoucs.UP = 5000;
  3189. pFoucs.Down = 5200;
  3190. pFoucs.Step = 10;
  3191. pFoucs.fStep = 5;
  3192. pFoucs.Range = 50;
  3193. //4、设置WD
  3194. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3195. Thread.Sleep(1000);
  3196. }
  3197. //LogManager.AddHardwareLog("修改对焦参数", true);
  3198. AutoFocus(pFoucs, out wd);
  3199. LogManager.AddHardwareLog("自动调节算法输出"+ (wd * 0.00000001).ToString(), true);
  3200. //设置工作距离
  3201. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  3202. //设置完工作距离后必须延迟5秒
  3203. Thread.Sleep(5000);
  3204. //处理图片位置
  3205. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3206. }
  3207. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3208. {
  3209. //后期和客户对接接口
  3210. List<string> filenames = new List<string>();
  3211. String retfilename = wr.Img_Auto_Focus(filenames);
  3212. }
  3213. else //蔡司自动对焦
  3214. {
  3215. iSEM.CmdAutoFocusCoarse();
  3216. while (true)
  3217. {
  3218. Thread.Sleep(10000);
  3219. if (0 == iSEM.GetAutoFunction())
  3220. {
  3221. break;
  3222. }
  3223. }
  3224. iSEM.CmdAutoFocusFine();
  3225. while (true)
  3226. {
  3227. Thread.Sleep(10000);
  3228. if (0 == iSEM.GetAutoFunction())
  3229. {
  3230. break;
  3231. }
  3232. }
  3233. }
  3234. return true;
  3235. }
  3236. //执行自动对焦
  3237. public bool ImageFocus1(Boolean Is_Stig)
  3238. {
  3239. if (m_measureFile.MParam.FocusMode == 1)//手动
  3240. {
  3241. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3242. {
  3243. }
  3244. else
  3245. {
  3246. return false;
  3247. }
  3248. }
  3249. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3250. {
  3251. #region 执行蔡司自动对焦程序
  3252. //服务地址
  3253. string snumstr = @"http://192.168.1.101:8123";
  3254. // 调用方法;只对焦不消像散
  3255. if (Is_Stig)
  3256. {
  3257. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);
  3258. if (focusstig != "success")
  3259. {
  3260. LogManager.AddHardwareLog("对焦失败" + focusstig , true);
  3261. return false;
  3262. }
  3263. }
  3264. else
  3265. {
  3266. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);
  3267. if (onlyfocus != "success")
  3268. {
  3269. return false;
  3270. }
  3271. }
  3272. #endregion
  3273. }
  3274. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3275. {
  3276. //后期和客户对接接口
  3277. List<string> filenames = new List<string>();
  3278. String retfilename = wr.Img_Auto_Focus(filenames);
  3279. }
  3280. else //蔡司自动对焦
  3281. {
  3282. iSEM.CmdAutoFocusCoarse();
  3283. while (true)
  3284. {
  3285. Thread.Sleep(10000);
  3286. if (0 == iSEM.GetAutoFunction())
  3287. {
  3288. break;
  3289. }
  3290. }
  3291. iSEM.CmdAutoFocusFine();
  3292. while (true)
  3293. {
  3294. Thread.Sleep(10000);
  3295. if (0 == iSEM.GetAutoFunction())
  3296. {
  3297. break;
  3298. }
  3299. }
  3300. }
  3301. return true;
  3302. }
  3303. //执行自动消像散
  3304. public bool ImageStig()
  3305. {
  3306. if (m_measureFile.MParam.FocusMode == 1)//手动
  3307. {
  3308. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3309. {
  3310. }
  3311. else
  3312. {
  3313. return false;
  3314. }
  3315. }
  3316. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3317. {
  3318. //郝工增加自动对焦算法
  3319. //处理文件夹
  3320. if (Directory.Exists(StigX_path))
  3321. {
  3322. Directory.Delete(StigX_path, true);
  3323. }
  3324. Thread.Sleep(3000);
  3325. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3326. Thread.Sleep(1000);
  3327. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3328. Thread.Sleep(1000);
  3329. //再创建文件夹
  3330. Directory.CreateDirectory(StigX_path);
  3331. //1、对焦参数类,2、输出像散值
  3332. int stigX = 0;
  3333. //根据当前的stigX重新计算像散值
  3334. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3335. //m_measureFile.MParam.AutoStigX.Step = 10; //像散的步长为10
  3336. //m_measureFile.MParam.AutoStigX.UP = currentStigX - m_measureFile.MParam.AutoStigX.Step;
  3337. //m_measureFile.MParam.AutoStigX.Down = currentStigX + m_measureFile.MParam.AutoStigX.Step;
  3338. //设置工作距离
  3339. iSEM.SetAstigmatismX((float)0);
  3340. //设置完工作距离后必须延迟5秒
  3341. Thread.Sleep(5000);
  3342. //LogManager.AddHardwareLog("修改消像散参数", true);
  3343. AutoStig(m_measureFile.MParam.AutoStigX, out stigX);
  3344. LogManager.AddHardwareLog("自动消散算法输出X"+ (stigX * 0.01).ToString(), true);
  3345. //设置工作距离
  3346. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3347. //设置完工作距离后必须延迟5秒
  3348. Thread.Sleep(5000);
  3349. //处理图片位置
  3350. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3351. //处理文件夹
  3352. if (Directory.Exists(StigY_path))
  3353. {
  3354. Directory.Delete(StigY_path, true);
  3355. }
  3356. Thread.Sleep(3000);
  3357. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3358. Thread.Sleep(1000);
  3359. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3360. Thread.Sleep(1000);
  3361. //再创建文件夹
  3362. Directory.CreateDirectory(StigY_path);
  3363. //1、对焦参数类,2、输出像散值
  3364. int stigY = 0;
  3365. //根据当前的stigX重新计算像散值
  3366. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3367. //m_measureFile.MParam.AutoStigY.Step = 10; //像散的步长为10
  3368. //m_measureFile.MParam.AutoStigY.UP = m_measureFile.MParam.AutoStigY.;
  3369. //m_measureFile.MParam.AutoStigY.Down = m_measureFile.MParam.AutoStigY.Step;
  3370. iSEM.SetAstigmatismY((float)0);
  3371. Thread.Sleep(2000);
  3372. LogManager.AddHardwareLog("修改消像散参数", true);
  3373. AutoStig(m_measureFile.MParam.AutoStigY, out stigY);
  3374. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3375. //设置工作距离
  3376. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3377. //设置完工作距离后必须延迟5秒
  3378. Thread.Sleep(5000);
  3379. }
  3380. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3381. {
  3382. //后期和客户对接接口
  3383. List<string> filenames = new List<string>();
  3384. String retfilename = wr.Img_Auto_Focus(filenames);
  3385. }
  3386. else //蔡司自动对焦
  3387. {
  3388. iSEM.CmdAutoFocusCoarse();
  3389. while (true)
  3390. {
  3391. Thread.Sleep(10000);
  3392. if (0 == iSEM.GetAutoFunction())
  3393. {
  3394. break;
  3395. }
  3396. }
  3397. iSEM.CmdAutoFocusFine();
  3398. while (true)
  3399. {
  3400. Thread.Sleep(10000);
  3401. if (0 == iSEM.GetAutoFunction())
  3402. {
  3403. break;
  3404. }
  3405. }
  3406. }
  3407. return true;
  3408. }
  3409. //自动聚焦
  3410. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  3411. {
  3412. a_nWd = 0;
  3413. float wd = iSEM.GetWorkingDistance();
  3414. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3415. if (a_param == null)
  3416. {
  3417. LogManager.AddHardwareLog("空参数", true);
  3418. return false;
  3419. }
  3420. string path = a_param.Path;
  3421. if (!Directory.Exists(path))
  3422. {
  3423. LogManager.AddHardwareLog("文件夹丢失", true);
  3424. return false;
  3425. }
  3426. string path_coarse = a_param.Path + "\\Coarse";
  3427. if (!Directory.Exists(path_coarse))
  3428. {
  3429. Directory.CreateDirectory(path_coarse);
  3430. }
  3431. string path_fine = a_param.Path + "\\Fine";
  3432. if (!Directory.Exists(path_fine))
  3433. {
  3434. Directory.CreateDirectory(path_fine);
  3435. }
  3436. //1. 拍照
  3437. //1.1, 粗拍照
  3438. //1.1.1, 根据参数计算拍照次数
  3439. double nUp = a_param.UP * 100.0 ;
  3440. double nDown = a_param.Down * 100.0;
  3441. double nStep = a_param.Step * 100.0;
  3442. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3443. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3444. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3445. //粗拍照
  3446. for (int i = 0; i < nTimes; i++)
  3447. {
  3448. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  3449. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3450. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3451. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3452. int swd = cWd / 100;
  3453. //SendMsg("wd = " + swd.ToString() +"um");
  3454. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3455. arg.Picture_Information.Picture_FullPath = fileName;
  3456. if (!GetImage(fileName))
  3457. {
  3458. return false;
  3459. }
  3460. //arg.State = true;
  3461. //arg.Message = "自动对焦";
  3462. //SendMsg("0-9");
  3463. //判断是否停止进程
  3464. if (key_stop)
  3465. {
  3466. return false;
  3467. }
  3468. //Thread.Sleep(3000);
  3469. }
  3470. //1.2, 选定细拍照的工作距离
  3471. int CorWd = 510000;
  3472. ChooseBest(path_coarse,out CorWd);
  3473. if (CorWd == -1)
  3474. CorWd = 510000;
  3475. else
  3476. a_nWd = CorWd;
  3477. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3478. //1.3, 细拍照
  3479. if ( (CorWd - a_param.Range * 100.0) <=0)
  3480. {
  3481. return false;
  3482. }
  3483. double nfUp = CorWd - a_param.Range * 100.0;
  3484. double nfStep = a_param.fStep * 100.0;
  3485. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3486. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3487. for (int i = 0; i < nfTimes; i++)
  3488. {
  3489. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3490. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3491. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3492. Thread.Sleep(Convert.ToInt32(cycle_time)+100);
  3493. int swd = cWd / 100;
  3494. //SendMsg("wd = " + swd.ToString() + "um");
  3495. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3496. arg.Picture_Information.Picture_FullPath = fileName;
  3497. if (!GetImage(fileName))
  3498. {
  3499. return false;
  3500. }
  3501. //arg.State = true;
  3502. //arg.Message = "自动对焦";
  3503. //SendMsg("0-9");
  3504. //判断是否停止进程
  3505. if (key_stop)
  3506. {
  3507. return false;
  3508. }
  3509. //Thread.Sleep(2000);
  3510. }
  3511. int fineWd = CorWd;
  3512. ChooseBest(path_fine, out fineWd);
  3513. //SendMsg("wd fine max = " + fineWd.ToString());
  3514. if (fineWd == -1)
  3515. a_nWd = CorWd;
  3516. else
  3517. a_nWd = fineWd;
  3518. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3519. //arg.State = true;
  3520. //arg.Message = "自动对焦";
  3521. //SendMsg(step_code);
  3522. return true;
  3523. }
  3524. //自动聚焦1
  3525. public bool AutoFocus1(FocusParam a_param, out int a_nWd)
  3526. {
  3527. a_nWd = 0;
  3528. float wd = iSEM.GetWorkingDistance();
  3529. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3530. if (a_param == null)
  3531. {
  3532. LogManager.AddHardwareLog("空参数", true);
  3533. return false;
  3534. }
  3535. string path = a_param.Path;
  3536. if (!Directory.Exists(path))
  3537. {
  3538. LogManager.AddHardwareLog("文件夹丢失", true);
  3539. return false;
  3540. }
  3541. string path_coarse = a_param.Path + "\\Coarse";
  3542. if (!Directory.Exists(path_coarse))
  3543. {
  3544. Directory.CreateDirectory(path_coarse);
  3545. }
  3546. string path_fine = a_param.Path + "\\Fine";
  3547. if (!Directory.Exists(path_fine))
  3548. {
  3549. Directory.CreateDirectory(path_fine);
  3550. }
  3551. //1. 拍照
  3552. //1.1, 粗拍照
  3553. //1.1.1, 根据参数计算拍照次数
  3554. double nUp = a_param.UP * 100.0;
  3555. double nDown = a_param.Down * 100.0;
  3556. double nStep = a_param.Step * 100.0;
  3557. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3558. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3559. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3560. //粗拍照
  3561. for (int i = 0; i < nTimes; i++)
  3562. {
  3563. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3564. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3565. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3566. Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
  3567. int swd = cWd / 100;
  3568. //SendMsg("wd = " + swd.ToString() +"um");
  3569. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3570. //arg.Picture_Information.Picture_FullPath = fileName;
  3571. if (!GetImage1(fileName))
  3572. {
  3573. return false;
  3574. }
  3575. //arg.State = true;
  3576. //arg.Message = "自动对焦";
  3577. //SendMsg(step_code);
  3578. //判断是否停止进程
  3579. if (key_stop)
  3580. {
  3581. return false;
  3582. }
  3583. //Thread.Sleep(3000);
  3584. }
  3585. //1.2, 选定细拍照的工作距离
  3586. int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3587. ChooseBest(path_coarse, out CorWd);
  3588. if (CorWd == -1)
  3589. CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3590. else
  3591. a_nWd = CorWd;
  3592. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3593. //1.3, 细拍照
  3594. if ((CorWd - a_param.Range * 100.0) <= 0)
  3595. {
  3596. return false;
  3597. }
  3598. double nfUp = CorWd - a_param.Range * 100.0;
  3599. double nfStep = a_param.fStep * 100.0;
  3600. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3601. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3602. for (int i = 0; i < nfTimes; i++)
  3603. {
  3604. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3605. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3606. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3607. Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
  3608. int swd = cWd / 100;
  3609. //SendMsg("wd = " + swd.ToString() + "um");
  3610. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3611. //arg.Picture_Information.Picture_FullPath = fileName;
  3612. if (!GetImage1(fileName))
  3613. {
  3614. return false;
  3615. }
  3616. //arg.State = true;
  3617. //arg.Message = "自动对焦";
  3618. //SendMsg(step_code);
  3619. //判断是否停止进程
  3620. if (key_stop)
  3621. {
  3622. return false;
  3623. }
  3624. //Thread.Sleep(2000);
  3625. }
  3626. int fineWd = CorWd;
  3627. ChooseBest(path_fine, out fineWd);
  3628. //SendMsg("wd fine max = " + fineWd.ToString());
  3629. if (fineWd == -1)
  3630. a_nWd = CorWd;
  3631. else
  3632. a_nWd = fineWd;
  3633. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3634. //arg.State = true;
  3635. //arg.Message = "自动对焦";
  3636. //SendMsg("0-9");
  3637. return true;
  3638. }
  3639. //自动消像散 AutoStig
  3640. public bool AutoStig(FocusParam a_param, out int a_nWd)
  3641. {
  3642. a_nWd = 0;
  3643. float wd = 0;
  3644. if (a_param.TYPE == 2)
  3645. {
  3646. wd = iSEM.GetAstigmatismX();
  3647. }
  3648. else if (a_param.TYPE == 3)
  3649. {
  3650. wd = iSEM.GetAstigmatismY();
  3651. }
  3652. else
  3653. {
  3654. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3655. return false;
  3656. }
  3657. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3658. if (a_param == null)
  3659. {
  3660. LogManager.AddHardwareLog("空参数", true);
  3661. return false;
  3662. }
  3663. string path = a_param.Path;
  3664. if (!Directory.Exists(path))
  3665. {
  3666. LogManager.AddHardwareLog("文件夹丢失", true);
  3667. return false;
  3668. }
  3669. string path_coarse = a_param.Path + "\\Coarse";
  3670. if (!Directory.Exists(path_coarse))
  3671. {
  3672. Directory.CreateDirectory(path_coarse);
  3673. }
  3674. string path_fine = a_param.Path + "\\Fine";
  3675. if (!Directory.Exists(path_fine))
  3676. {
  3677. Directory.CreateDirectory(path_fine);
  3678. }
  3679. //1. 拍照
  3680. //1.1, 粗拍照
  3681. //1.1.1, 根据参数计算拍照次数
  3682. double nUp = a_param.UP * 100.0;
  3683. double nDown = a_param.Down * 100.0;
  3684. double nStep = a_param.Step * 100.0;
  3685. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3686. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3687. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3688. //粗拍照
  3689. for (int i = 0; i < nTimes; i++)
  3690. {
  3691. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3692. if (a_param.TYPE == 2)
  3693. {
  3694. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3695. }
  3696. else if (a_param.TYPE == 3)
  3697. {
  3698. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3699. }
  3700. else
  3701. {
  3702. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3703. return false;
  3704. }
  3705. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3706. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3707. int swd = cWd / 100;
  3708. //SendMsg("wd = " + swd.ToString() +"um");
  3709. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3710. arg.Picture_Information.Picture_FullPath = fileName;
  3711. if (!GetImage(fileName))
  3712. {
  3713. return false;
  3714. }
  3715. arg.State = true;
  3716. arg.Message = "自动像散";
  3717. SendMsg("0-8");
  3718. //判断是否停止进程
  3719. if (key_stop)
  3720. {
  3721. return false;
  3722. }
  3723. //Thread.Sleep(3000);
  3724. }
  3725. //1.2, 选定细拍照的工作距离
  3726. int CorWd;
  3727. ChooseBest(path_coarse, out CorWd);
  3728. if (CorWd == -1)
  3729. {
  3730. a_nWd = 0;
  3731. }
  3732. else
  3733. {
  3734. a_nWd = CorWd;
  3735. }
  3736. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3737. //1.3, 细拍照
  3738. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3739. {
  3740. return false;
  3741. }
  3742. double nfUp = 0;
  3743. if (a_param.Range >= 0)
  3744. nfUp = CorWd - a_param.Range * 100.0;
  3745. else
  3746. nfUp = CorWd + a_param.Range * 100.0;
  3747. double nfStep = a_param.fStep * 100.0;
  3748. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3749. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3750. for (int i = 0; i < nfTimes; i++)
  3751. {
  3752. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3753. if (a_param.TYPE == 2)
  3754. {
  3755. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3756. }
  3757. else if (a_param.TYPE == 3)
  3758. {
  3759. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3760. }
  3761. else
  3762. {
  3763. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3764. return false;
  3765. }
  3766. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3767. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3768. int swd = cWd / 100;
  3769. //SendMsg("wd = " + swd.ToString() + "um");
  3770. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3771. arg.Picture_Information.Picture_FullPath = fileName;
  3772. if (!GetImage(fileName))
  3773. {
  3774. return false;
  3775. }
  3776. arg.State = true;
  3777. arg.Message = "自动像散";
  3778. SendMsg("0-8");
  3779. //判断是否停止进程
  3780. if (key_stop)
  3781. {
  3782. return false;
  3783. }
  3784. //Thread.Sleep(2000);
  3785. }
  3786. int fineWd = CorWd;
  3787. ChooseBest(path_fine, out fineWd);
  3788. //SendMsg("wd fine max = " + fineWd.ToString());
  3789. if(fineWd == -1)
  3790. a_nWd = CorWd;
  3791. else
  3792. a_nWd = fineWd;
  3793. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3794. //arg.State = true;
  3795. //arg.Message = "自动像散";
  3796. //SendMsg(step_code);
  3797. return true;
  3798. }
  3799. //执行自动消像散1
  3800. public bool ImageStig1()
  3801. {
  3802. if (m_measureFile.MParam.FocusMode == 1)//手动
  3803. {
  3804. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3805. {
  3806. }
  3807. else
  3808. {
  3809. return false;
  3810. }
  3811. }
  3812. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3813. {
  3814. //郝工增加自动对焦算法
  3815. //处理文件夹
  3816. if (Directory.Exists(StigX_path))
  3817. {
  3818. Directory.Delete(StigX_path, true);
  3819. }
  3820. Thread.Sleep(3000);
  3821. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3822. Thread.Sleep(200);
  3823. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3824. Thread.Sleep(200);
  3825. //再创建文件夹
  3826. Directory.CreateDirectory(StigX_path);
  3827. //1、对焦参数类,2、输出像散值
  3828. int stigX = 0;
  3829. //根据当前的stigX重新计算像散值
  3830. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3831. //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
  3832. //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
  3833. //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
  3834. //设置工作距离
  3835. currentStigX = iSEM.GetAstigmatismX();
  3836. Thread.Sleep(1000);
  3837. FocusParam pFocus = new FocusParam();
  3838. pFocus = m_measureFile.MParam.AutoStigX;
  3839. float old_up = m_measureFile.MParam.AutoStigX.UP;
  3840. float old_down = m_measureFile.MParam.AutoStigX.Down;
  3841. float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3842. pFocus.UP = currentStigX - setvalue;
  3843. pFocus.Down = currentStigX + setvalue;
  3844. //m_measureFile.MParam.AutoStigX.Step = 1;
  3845. //m_measureFile.MParam.AutoStigX.Range = (float)0.5;
  3846. //m_measureFile.MParam.AutoStigX.fStep = (float)0.1;
  3847. LogManager.AddHardwareLog("消像散参数: up = "+pFocus.UP+",down = " + pFocus.Down+ ",step =" + pFocus.Step + ",rang ="+ pFocus.Range + ",fstep = " + pFocus.fStep, true);
  3848. //LogManager.AddHardwareLog("修改消像散参数", true);
  3849. AutoStig1(pFocus, out stigX);
  3850. m_measureFile.MParam.AutoStigX.UP = old_up;
  3851. m_measureFile.MParam.AutoStigX.Down = old_down;
  3852. LogManager.AddHardwareLog("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3853. //设置工作距离
  3854. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3855. //设置完工作距离后必须延迟5秒
  3856. Thread.Sleep(5000);
  3857. //处理图片位置
  3858. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3859. //处理文件夹
  3860. if (Directory.Exists(StigY_path))
  3861. {
  3862. Directory.Delete(StigY_path, true);
  3863. }
  3864. Thread.Sleep(3000);
  3865. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3866. Thread.Sleep(200);
  3867. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3868. Thread.Sleep(200);
  3869. //再创建文件夹
  3870. Directory.CreateDirectory(StigY_path);
  3871. //1、对焦参数类,2、输出像散值
  3872. int stigY = 0;
  3873. //根据当前的stigX重新计算像散值
  3874. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3875. //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
  3876. //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
  3877. //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
  3878. currentStigY = iSEM.GetAstigmatismY();
  3879. Thread.Sleep(1000);
  3880. //m_measureFile.MParam.AutoStigY.UP = currentStigY - setvalue;
  3881. //m_measureFile.MParam.AutoStigY.Down = currentStigY + setvalue;
  3882. //m_measureFile.MParam.AutoStigY.Step = 1;
  3883. //m_measureFile.MParam.AutoStigY.Range = (float)0.5;
  3884. //m_measureFile.MParam.AutoStigY.fStep = (float)0.1;
  3885. FocusParam pFocusY = new FocusParam();
  3886. pFocusY = m_measureFile.MParam.AutoStigY;
  3887. float old_upY = m_measureFile.MParam.AutoStigY.UP;
  3888. float old_downY = m_measureFile.MParam.AutoStigY.Down;
  3889. //float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3890. pFocusY.UP = currentStigY - setvalue;
  3891. pFocusY.Down = currentStigY + setvalue;
  3892. LogManager.AddHardwareLog("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
  3893. AutoStig1(pFocusY, out stigY);
  3894. m_measureFile.MParam.AutoStigY.UP = old_upY;
  3895. m_measureFile.MParam.AutoStigY.Down = old_downY;
  3896. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3897. //设置工作距离
  3898. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3899. //设置完工作距离后必须延迟5秒
  3900. Thread.Sleep(5000);
  3901. }
  3902. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3903. {
  3904. //后期和客户对接接口
  3905. List<string> filenames = new List<string>();
  3906. String retfilename = wr.Img_Auto_Focus(filenames);
  3907. }
  3908. else //蔡司自动对焦
  3909. {
  3910. iSEM.CmdAutoFocusCoarse();
  3911. while (true)
  3912. {
  3913. Thread.Sleep(10000);
  3914. if (0 == iSEM.GetAutoFunction())
  3915. {
  3916. break;
  3917. }
  3918. }
  3919. iSEM.CmdAutoFocusFine();
  3920. while (true)
  3921. {
  3922. Thread.Sleep(10000);
  3923. if (0 == iSEM.GetAutoFunction())
  3924. {
  3925. break;
  3926. }
  3927. }
  3928. }
  3929. return true;
  3930. }
  3931. //自动消像散 AutoStig1
  3932. public bool AutoStig1(FocusParam a_param, out int a_nWd)
  3933. {
  3934. a_nWd = 0;
  3935. float wd = 0;
  3936. if (a_param.TYPE == 2)
  3937. {
  3938. wd = iSEM.GetAstigmatismX();
  3939. }
  3940. else if (a_param.TYPE == 3)
  3941. {
  3942. wd = iSEM.GetAstigmatismY();
  3943. }
  3944. else
  3945. {
  3946. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3947. return false;
  3948. }
  3949. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3950. if (a_param == null)
  3951. {
  3952. LogManager.AddHardwareLog("空参数", true);
  3953. return false;
  3954. }
  3955. string path = a_param.Path;
  3956. if (!Directory.Exists(path))
  3957. {
  3958. LogManager.AddHardwareLog("文件夹丢失", true);
  3959. return false;
  3960. }
  3961. string path_coarse = a_param.Path + "\\Coarse";
  3962. if (!Directory.Exists(path_coarse))
  3963. {
  3964. Directory.CreateDirectory(path_coarse);
  3965. }
  3966. string path_fine = a_param.Path + "\\Fine";
  3967. if (!Directory.Exists(path_fine))
  3968. {
  3969. Directory.CreateDirectory(path_fine);
  3970. }
  3971. //1. 拍照
  3972. //1.1, 粗拍照
  3973. //1.1.1, 根据参数计算拍照次数
  3974. double nUp = a_param.UP * 100.0;
  3975. double nDown = a_param.Down * 100.0;
  3976. double nStep = a_param.Step * 100.0;
  3977. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3978. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3979. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3980. //粗拍照
  3981. for (int i = 0; i < nTimes; i++)
  3982. {
  3983. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3984. if (a_param.TYPE == 2)
  3985. {
  3986. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3987. }
  3988. else if (a_param.TYPE == 3)
  3989. {
  3990. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3991. }
  3992. else
  3993. {
  3994. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3995. return false;
  3996. }
  3997. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3998. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3999. int swd = cWd / 100;
  4000. //SendMsg("wd = " + swd.ToString() +"um");
  4001. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4002. arg.Picture_Information.Picture_FullPath = fileName;
  4003. if (!GetImage1(fileName))
  4004. {
  4005. return false;
  4006. }
  4007. //arg.State = true;
  4008. //arg.Message = "自动像散";
  4009. //SendMsg(step_code);
  4010. //判断是否停止进程
  4011. if (key_stop)
  4012. {
  4013. return false;
  4014. }
  4015. //Thread.Sleep(3000);
  4016. }
  4017. //1.2, 选定细拍照的工作距离
  4018. int CorWd;
  4019. ChooseBest(path_coarse, out CorWd);
  4020. if (CorWd == -1)
  4021. {
  4022. a_nWd = 0;
  4023. }
  4024. else
  4025. {
  4026. a_nWd = CorWd;
  4027. }
  4028. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4029. //1.3, 细拍照
  4030. if ((CorWd - a_param.Range * 100.0) <= -10000)
  4031. {
  4032. return false;
  4033. }
  4034. double nfUp = 0;
  4035. if (a_param.Range >= 0)
  4036. nfUp = CorWd - a_param.Range * 100.0;
  4037. else
  4038. nfUp = CorWd + a_param.Range * 100.0;
  4039. double nfStep = a_param.fStep * 100.0;
  4040. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4041. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4042. for (int i = 0; i < nfTimes; i++)
  4043. {
  4044. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4045. if (a_param.TYPE == 2)
  4046. {
  4047. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  4048. }
  4049. else if (a_param.TYPE == 3)
  4050. {
  4051. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  4052. }
  4053. else
  4054. {
  4055. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4056. return false;
  4057. }
  4058. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4059. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4060. int swd = cWd / 100;
  4061. //SendMsg("wd = " + swd.ToString() + "um");
  4062. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4063. arg.Picture_Information.Picture_FullPath = fileName;
  4064. if (!GetImage1(fileName))
  4065. {
  4066. return false;
  4067. }
  4068. //arg.State = true;
  4069. //arg.Message = "自动像散";
  4070. //SendMsg(step_code);
  4071. //判断是否停止进程
  4072. if (key_stop)
  4073. {
  4074. return false;
  4075. }
  4076. //Thread.Sleep(2000);
  4077. }
  4078. int fineWd = CorWd;
  4079. ChooseBest(path_fine, out fineWd);
  4080. //SendMsg("wd fine max = " + fineWd.ToString());
  4081. if (fineWd == -1)
  4082. a_nWd = CorWd;
  4083. else
  4084. a_nWd = fineWd;
  4085. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4086. //arg.State = true;
  4087. //arg.Message = "自动像散";
  4088. //SendMsg("0-9");
  4089. return true;
  4090. }
  4091. //自动FIB对焦 AutoFIBFocus
  4092. public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
  4093. {
  4094. a_nWd = 0;
  4095. float wd = 0;
  4096. if (a_param.TYPE == 4)
  4097. {
  4098. wd = iSEM.GetFIBObjectivePotential();
  4099. }
  4100. else
  4101. {
  4102. LogManager.AddHardwareLog("FIB自动聚焦参数设置有误", true);
  4103. return false;
  4104. }
  4105. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  4106. if (a_param == null)
  4107. {
  4108. LogManager.AddHardwareLog("空参数", true);
  4109. return false;
  4110. }
  4111. string path = a_param.Path;
  4112. if (!Directory.Exists(path))
  4113. {
  4114. LogManager.AddHardwareLog("文件夹丢失", true);
  4115. return false;
  4116. }
  4117. string path_coarse = a_param.Path + "\\Coarse";
  4118. if (!Directory.Exists(path_coarse))
  4119. {
  4120. Directory.CreateDirectory(path_coarse);
  4121. }
  4122. string path_fine = a_param.Path + "\\Fine";
  4123. if (!Directory.Exists(path_fine))
  4124. {
  4125. Directory.CreateDirectory(path_fine);
  4126. }
  4127. //1. 拍照
  4128. //1.1, 粗拍照
  4129. //1.1.1, 根据参数计算拍照次数
  4130. double nUp = a_param.UP * 100.0;
  4131. double nDown = a_param.Down * 100.0;
  4132. double nStep = a_param.Step * 100.0;
  4133. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  4134. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  4135. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  4136. //粗拍照
  4137. for (int i = 0; i < nTimes; i++)
  4138. {
  4139. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  4140. if (a_param.TYPE == 4)
  4141. {
  4142. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4143. }
  4144. else
  4145. {
  4146. LogManager.AddHardwareLog("FIB对焦参数设置有误,对焦类型错", true);
  4147. return false;
  4148. }
  4149. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4150. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4151. int swd = cWd / 100;
  4152. //SendMsg("wd = " + swd.ToString() +"um");
  4153. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4154. arg.Picture_Information.Picture_FullPath = fileName;
  4155. if (!GetImage(fileName))
  4156. {
  4157. return false;
  4158. }
  4159. arg.State = true;
  4160. arg.Message = "FIB自动对焦";
  4161. SendMsg(step_code);
  4162. //判断是否停止进程
  4163. if (key_stop)
  4164. {
  4165. return false;
  4166. }
  4167. //Thread.Sleep(3000);
  4168. }
  4169. //1.2, 选定细拍照的工作距离
  4170. int CorWd;
  4171. ChooseBest(path_coarse, out CorWd);
  4172. a_nWd = CorWd;
  4173. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4174. //1.3, 细拍照
  4175. if ((CorWd - a_param.Range * 100.0) <0)
  4176. {
  4177. return false;
  4178. }
  4179. double nfUp = CorWd - a_param.Range * 100.0;
  4180. double nfStep = a_param.fStep * 100.0;
  4181. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4182. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4183. for (int i = 0; i < nfTimes; i++)
  4184. {
  4185. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4186. if (a_param.TYPE == 4)
  4187. {
  4188. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4189. }
  4190. else
  4191. {
  4192. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4193. return false;
  4194. }
  4195. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4196. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4197. int swd = cWd / 100;
  4198. //SendMsg("wd = " + swd.ToString() + "um");
  4199. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4200. arg.Picture_Information.Picture_FullPath = fileName;
  4201. if (!GetImage(fileName))
  4202. {
  4203. return false;
  4204. }
  4205. arg.State = true;
  4206. arg.Message = "FIB自动对焦";
  4207. SendMsg(step_code);
  4208. //判断是否停止进程
  4209. if (key_stop)
  4210. {
  4211. return false;
  4212. }
  4213. //Thread.Sleep(2000);
  4214. }
  4215. int fineWd;
  4216. ChooseBest(path_fine, out fineWd);
  4217. //SendMsg("wd fine max = " + fineWd.ToString());
  4218. a_nWd = fineWd;
  4219. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4220. return true;
  4221. }
  4222. //LoG算子计算
  4223. private double LoGMean(string a_strImgPath)
  4224. {
  4225. //读入Img文件
  4226. if (!File.Exists(a_strImgPath))
  4227. {
  4228. return 0;
  4229. }
  4230. Mat src, gray_src;
  4231. int kernel_size = 3;
  4232. src = Cv2.ImRead(a_strImgPath);
  4233. gray_src = new Mat();
  4234. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4235. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4236. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4237. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4238. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  4239. Cv2.ConvertScaleAbs(src, src);
  4240. //图像的平均灰度
  4241. double meanValue = 0.0;
  4242. meanValue = Cv2.Mean(src)[0];
  4243. return meanValue;
  4244. }
  4245. //梯度计算
  4246. private double Tenengrad(string a_strImgPath)
  4247. {
  4248. //读入Img文件
  4249. if (!File.Exists(a_strImgPath))
  4250. {
  4251. return 0;
  4252. }
  4253. Mat src;
  4254. src = Cv2.ImRead(a_strImgPath);
  4255. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4256. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4257. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4258. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4259. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  4260. //图像的平均灰度
  4261. double meanValue = 0.0;
  4262. meanValue = Cv2.Mean(src)[0];
  4263. return meanValue;
  4264. }
  4265. //梯度计算
  4266. private double TTgrad(string a_strImgPath)
  4267. {
  4268. //读入Img文件
  4269. if (!File.Exists(a_strImgPath))
  4270. {
  4271. return 0;
  4272. }
  4273. Mat src;
  4274. src = Cv2.ImRead(a_strImgPath);
  4275. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4276. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4277. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4278. Mat scalex = new Mat();
  4279. Mat scaley = new Mat();
  4280. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  4281. Cv2.ConvertScaleAbs(src, scalex);
  4282. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  4283. Cv2.ConvertScaleAbs(src, scaley);
  4284. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  4285. //图像的平均灰度
  4286. double meanValue = 0.0;
  4287. meanValue = Cv2.Mean(src)[0];
  4288. return meanValue;
  4289. }
  4290. //三选二算法
  4291. private bool ChooseBest(string a_strImgPath, out int a_nWd)
  4292. {
  4293. a_nWd = -1;
  4294. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  4295. float[] values = new float[files.Length];
  4296. double smax1 = LoGMean(files[0]);
  4297. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  4298. double smax2 = Tenengrad(files[0]);
  4299. int wdmax2 = wdmax1;
  4300. double smax3 = TTgrad(files[0]);
  4301. int wdmax3 = wdmax1;
  4302. int x = 0;
  4303. foreach (var file in files)
  4304. {
  4305. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  4306. double svalue1 = LoGMean(file);
  4307. double svalue2 = Tenengrad(file);
  4308. double svalue3 = TTgrad(file);
  4309. if (smax1 < svalue1)
  4310. {
  4311. smax1 = svalue1;
  4312. wdmax1 = wd;
  4313. }
  4314. if (smax2 < svalue2)
  4315. {
  4316. smax2 = svalue2;
  4317. wdmax2 = wd;
  4318. }
  4319. if (smax3 < svalue3)
  4320. {
  4321. smax3 = svalue3;
  4322. wdmax3 = wd;
  4323. }
  4324. x++;
  4325. }
  4326. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  4327. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  4328. {
  4329. a_nWd = wdmax1;
  4330. //SendMsg("焦距 = " + wdmax1.ToString());
  4331. }
  4332. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  4333. {
  4334. a_nWd = wdmax2;
  4335. //SendMsg("焦距 = " + wdmax2.ToString());
  4336. }
  4337. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  4338. {
  4339. a_nWd = wdmax3;
  4340. //SendMsg("焦距 = " + wdmax3.ToString());
  4341. }
  4342. else
  4343. {
  4344. //SendMsg("对焦失败。");
  4345. return false;
  4346. }
  4347. return true;
  4348. }
  4349. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  4350. bool MoveToPixByMoveStage(float xc, float yc)
  4351. {
  4352. //单位是m/pix
  4353. float XpixSize = iSEM.GetPixelSize();
  4354. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4355. float YpixSize = iSEM.GetPixelSize();///(float)m_measureFile.MParam.PixelSizeCor);
  4356. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4357. Thread.Sleep(500);
  4358. //0:width, 1:height
  4359. int[] imageSize = iSEM.GetImageStore();
  4360. int width = imageSize[0] / 2;
  4361. int height = imageSize[1] / 2;
  4362. LogManager.AddHardwareLog("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4363. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4364. float deltX = (xc - (float)width) * XpixSize;
  4365. float deltY = (yc - (float)height) * YpixSize;
  4366. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4367. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4368. float xpCur = iSEM.GetStageAtX();
  4369. float ypCur = iSEM.GetStageAtY();
  4370. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4371. float xpNew = xpCur - deltX;
  4372. float ypNew = ypCur + deltY;
  4373. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4374. //计算光束偏移值:
  4375. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  4376. {
  4377. LogManager.AddHardwareLog("X方向移动样品台", true);
  4378. if (!iSEM.SetStageGotoX(xpNew))
  4379. {
  4380. return false;
  4381. }
  4382. //判断是否移动完成
  4383. while (true)
  4384. {
  4385. Thread.Sleep(5000);
  4386. if (iSEM.GetStageIs() == 0)
  4387. {
  4388. break;
  4389. }
  4390. }
  4391. }
  4392. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  4393. {
  4394. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4395. if (!iSEM.SetStageGotoY(ypNew))
  4396. {
  4397. return false;
  4398. }
  4399. //判断是否移动完成
  4400. while (true)
  4401. {
  4402. Thread.Sleep(5000);
  4403. if (iSEM.GetStageIs() == 0)
  4404. {
  4405. break;
  4406. }
  4407. }
  4408. }
  4409. return true;
  4410. }
  4411. //移动到像素位置
  4412. bool MoveToPix(float xc, float yc)
  4413. {
  4414. //单位是m/pix
  4415. float XpixSize = iSEM.GetPixelSize();
  4416. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel",true);
  4417. float YpixSize = (XpixSize/(float)m_measureFile.MParam.PixelSizeCor);
  4418. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4419. Thread.Sleep(200);
  4420. //0:width, 1:height
  4421. int[] imageSize = iSEM.GetImageStore();
  4422. int width = imageSize[0]/2;
  4423. int height = imageSize[1]/2;
  4424. LogManager.AddHardwareLog("目标像素是(" + xc.ToString()+ ","+ yc.ToString() + ")", true);
  4425. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4426. float deltX = (xc - (float)width) * XpixSize;
  4427. float deltY = (yc - (float)height) * YpixSize;
  4428. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4429. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4430. float xpCur = iSEM.GetStageAtX();
  4431. Thread.Sleep(200);
  4432. float ypCur = iSEM.GetStageAtY();
  4433. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString()+ "," + ypCur.ToString() + "),单位m", true);
  4434. float xpNew = xpCur - deltX;
  4435. float ypNew = ypCur + deltY;
  4436. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4437. //计算最大偏移量
  4438. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4439. Thread.Sleep(200);
  4440. iSEM.SetBeamShiftX(100);
  4441. Thread.Sleep(200);
  4442. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4443. Thread.Sleep(200);
  4444. iSEM.SetBeamShiftX(beamXCur);
  4445. Thread.Sleep(200);
  4446. //计算光束偏移值:
  4447. float beamX = iSEM.GetBeamOffsetX();
  4448. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4449. beamX = (-deltX + beamX);
  4450. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4451. if( ((beamX <= beamXMax) && (beamX >=0)) ||
  4452. ((beamX >= -beamXMax)&& (beamX < 0)))
  4453. {
  4454. LogManager.AddHardwareLog("X方向移动光束", true);
  4455. float beamXShift = beamX * 100 / beamXMax;
  4456. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  4457. if (!iSEM.SetBeamShiftX(beamXShift))
  4458. //if (!iSEM.SetBeamOffsetX(beamX))
  4459. {
  4460. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4461. return false;
  4462. }
  4463. }
  4464. else if(deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4465. {
  4466. LogManager.AddHardwareLog("X方向移动样品台", true);
  4467. if (!iSEM.SetStageGotoX(xpNew))
  4468. {
  4469. return false;
  4470. }
  4471. //判断是否移动完成
  4472. while (true)
  4473. {
  4474. Thread.Sleep(4000);
  4475. if (iSEM.GetStageIs() == 0)
  4476. {
  4477. break;
  4478. }
  4479. }
  4480. }
  4481. float beamY = iSEM.GetBeamOffsetY();
  4482. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4483. beamY = (-deltY + beamY);
  4484. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4485. //计算最大偏移量
  4486. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4487. Thread.Sleep(200);
  4488. iSEM.SetBeamShiftY(100);
  4489. Thread.Sleep(200);
  4490. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4491. Thread.Sleep(200);
  4492. iSEM.SetBeamShiftY(beamYCur);
  4493. Thread.Sleep(200);
  4494. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  4495. ((beamY >= -beamYMax) && (beamY < 0)))
  4496. {
  4497. LogManager.AddHardwareLog("Y方向移动光束", true);
  4498. float beamYShift = beamY * 100 / beamYMax;
  4499. LogManager.AddHardwareLog("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  4500. //if(!iSEM.SetBeamOffsetY(beamY))
  4501. if (!iSEM.SetBeamShiftY(beamYShift))
  4502. {
  4503. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4504. return false;
  4505. }
  4506. }
  4507. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4508. {
  4509. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4510. if (!iSEM.SetStageGotoY(ypNew))
  4511. {
  4512. return false;
  4513. }
  4514. //判断是否移动完成
  4515. while (true)
  4516. {
  4517. Thread.Sleep(4000);
  4518. if (iSEM.GetStageIs() == 0)
  4519. {
  4520. break;
  4521. }
  4522. }
  4523. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4524. //arg.State = true;
  4525. //SendMsg("1-7");
  4526. }
  4527. return true;
  4528. }
  4529. //自动亮度对比度调节
  4530. //自动亮度对比度
  4531. public bool AutoBC(String step)
  4532. {
  4533. arg.Message = "自动亮度对比度";
  4534. arg.State = true;
  4535. SendMsg("1-10");
  4536. iSEM.SetAutoBright(100);
  4537. iSEM.SetAutoContrast(100);
  4538. //LogManager.AddHardwareLog("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
  4539. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  4540. {
  4541. LogManager.AddHardwareLog("开始设置自动亮度、对比度失败,程序退出。", true);
  4542. return false;
  4543. }
  4544. Thread.Sleep(5000);
  4545. int i = 0;
  4546. float bright = iSEM.GetBrightness();
  4547. float contrast = iSEM.GetContrast();
  4548. //最多调节30s,30s没调节好,认为调节失败
  4549. for (i = 0; i < 5; i++)
  4550. {
  4551. bright = iSEM.GetBrightness();
  4552. contrast = iSEM.GetContrast();
  4553. if ((bright >= 40 && bright <= 60)
  4554. && (contrast >= 35 && contrast <= 40))
  4555. break;
  4556. Thread.Sleep(5000);
  4557. }
  4558. bright = iSEM.GetBrightness();
  4559. contrast = iSEM.GetContrast();
  4560. if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
  4561. && i == 5)
  4562. {
  4563. LogManager.AddHardwareLog("亮度对比度调节时间过长", true);
  4564. return false;
  4565. }
  4566. iSEM.SetAutoBright(100);
  4567. iSEM.SetAutoContrast(100);
  4568. //LogManager.AddHardwareLog("SEM模式自动亮度目标50,自动对比度目标30.", true);
  4569. return true;
  4570. }
  4571. //执行FIB自动对焦,FIBFocus
  4572. //执行自动消像散
  4573. public bool FIBFocus(String step_code)
  4574. {
  4575. if (m_measureFile.MParam.FocusMode == 1)//手动
  4576. {
  4577. if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  4578. {
  4579. }
  4580. else
  4581. {
  4582. return false;
  4583. }
  4584. }
  4585. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  4586. {
  4587. //郝工增加自动对焦算法
  4588. //处理文件夹
  4589. if (Directory.Exists(FIBfocus_path))
  4590. {
  4591. Directory.Delete(FIBfocus_path, true);
  4592. }
  4593. Thread.Sleep(3000);
  4594. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  4595. Thread.Sleep(1000);
  4596. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  4597. Thread.Sleep(1000);
  4598. //再创建文件夹
  4599. Directory.CreateDirectory(FIBfocus_path);
  4600. //1、对焦参数类,2、输出对焦值
  4601. int FIBFocus = 0;
  4602. //根据当前的stigX重新计算像散值
  4603. float currentFIBFocus = iSEM.GetFIBObjectivePotential();
  4604. //m_measureFile.MParam.FIBFocus.Step = 10; //像散的步长为10
  4605. m_measureFile.MParam.FIBFocus.UP = currentFIBFocus - m_measureFile.MParam.FIBFocus.Step;
  4606. m_measureFile.MParam.FIBFocus.Down = currentFIBFocus + m_measureFile.MParam.FIBFocus.Step;
  4607. LogManager.AddHardwareLog("修改FIB自动对焦参数", true);
  4608. AutoFIBFocus(m_measureFile.MParam.FIBFocus, out FIBFocus, step_code);
  4609. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  4610. //设置工作距离
  4611. iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
  4612. //设置完工作距离后必须延迟5秒
  4613. Thread.Sleep(5000);
  4614. //处理图片位置
  4615. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  4616. }
  4617. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  4618. {
  4619. //后期和客户对接接口
  4620. List<string> filenames = new List<string>();
  4621. String retfilename = wr.Img_Auto_Focus(filenames);
  4622. }
  4623. else //蔡司自动对焦
  4624. {
  4625. iSEM.CmdAutoFocusCoarse();
  4626. while (true)
  4627. {
  4628. Thread.Sleep(10000);
  4629. if (0 == iSEM.GetAutoFunction())
  4630. {
  4631. break;
  4632. }
  4633. }
  4634. iSEM.CmdAutoFocusFine();
  4635. while (true)
  4636. {
  4637. Thread.Sleep(10000);
  4638. if (0 == iSEM.GetAutoFunction())
  4639. {
  4640. break;
  4641. }
  4642. }
  4643. }
  4644. return true;
  4645. }
  4646. /// 图像拉直算法
  4647. /// </summary>
  4648. /// <param name="Slope">倾斜角度</param>
  4649. /// <param name="x0">圆心坐标x</param>
  4650. /// <param name="y0">圆心坐标y</param>
  4651. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  4652. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  4653. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  4654. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  4655. /// <returns></returns>
  4656. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  4657. {
  4658. try
  4659. {
  4660. float xr = x1 - x0;//倾斜图到中心的距离差x
  4661. float yr = y1 - y0;//倾斜图到中心的距离差y
  4662. float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  4663. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  4664. float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
  4665. float k_S = k - Slope;//通过夹角差求x2,y2
  4666. //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  4667. //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  4668. float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
  4669. float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
  4670. if (Slope > 0 || Slope < 0)
  4671. {
  4672. Hx = x0 + x2;
  4673. Hy = y0 + y2;
  4674. }
  4675. else
  4676. {
  4677. Hx = 0;
  4678. Hy = 0;
  4679. }
  4680. return true;
  4681. }
  4682. catch (Exception)
  4683. {
  4684. return false;
  4685. }
  4686. }
  4687. // 放大倍数差校正
  4688. public bool MagComp(float oldMag, float newMag)
  4689. {
  4690. //开启电压校正时进行电压校正
  4691. if (m_measureFile.MParam.MagComp)
  4692. {
  4693. int oldLevel = -1, newLevel = -1;
  4694. float deltX = 0, deltY = 0;
  4695. if (oldMag < m_measureFile.MParam.MagRange1)
  4696. {
  4697. oldLevel = 1;
  4698. }
  4699. else if ((oldMag <= m_measureFile.MParam.MagRange2)
  4700. && (oldMag > m_measureFile.MParam.MagRange1))
  4701. {
  4702. oldLevel = 2;
  4703. }
  4704. else if ((oldMag <= m_measureFile.MParam.MagRange3)
  4705. && (oldMag > m_measureFile.MParam.MagRange2))
  4706. {
  4707. oldLevel = 3;
  4708. }
  4709. else if ((oldMag <= m_measureFile.MParam.MagRange4)
  4710. && (oldMag > m_measureFile.MParam.MagRange3))
  4711. {
  4712. oldLevel = 4;
  4713. }
  4714. if (newMag < m_measureFile.MParam.MagRange1)
  4715. {
  4716. newLevel = 1;
  4717. }
  4718. else if ((newMag <= m_measureFile.MParam.MagRange2)
  4719. && (newMag > m_measureFile.MParam.MagRange1))
  4720. {
  4721. newLevel = 2;
  4722. }
  4723. else if ((newMag <= m_measureFile.MParam.MagRange3)
  4724. && (newMag > m_measureFile.MParam.MagRange2))
  4725. {
  4726. newLevel = 3;
  4727. }
  4728. else if ((newMag <= m_measureFile.MParam.MagRange4)
  4729. && (newMag > m_measureFile.MParam.MagRange3))
  4730. {
  4731. newLevel = 4;
  4732. }
  4733. if (oldLevel != newLevel)
  4734. {
  4735. if (oldLevel == 1)
  4736. {
  4737. switch (newLevel)
  4738. {
  4739. case 1:
  4740. break;
  4741. case 2:
  4742. deltX = m_measureFile.MParam.MagCompX1;
  4743. deltY = m_measureFile.MParam.MagCompY1;
  4744. break;
  4745. case 3:
  4746. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2;
  4747. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2;
  4748. break;
  4749. case 4:
  4750. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4751. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4752. break;
  4753. }
  4754. }
  4755. else if (oldLevel == 2)
  4756. {
  4757. switch (newLevel)
  4758. {
  4759. case 1:
  4760. deltX = -m_measureFile.MParam.MagCompX1;
  4761. deltY = -m_measureFile.MParam.MagCompY1;
  4762. break;
  4763. case 2:
  4764. break;
  4765. case 3:
  4766. deltX = m_measureFile.MParam.MagCompX2;
  4767. deltY = m_measureFile.MParam.MagCompY2;
  4768. break;
  4769. case 4:
  4770. deltX = m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4771. deltY = m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4772. break;
  4773. }
  4774. }
  4775. else if (oldLevel == 3)
  4776. {
  4777. switch (newLevel)
  4778. {
  4779. case 1:
  4780. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2;
  4781. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2;
  4782. break;
  4783. case 2:
  4784. deltX = -m_measureFile.MParam.MagCompX2;
  4785. deltY = -m_measureFile.MParam.MagCompY2;
  4786. break;
  4787. case 3:
  4788. break;
  4789. case 4:
  4790. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4791. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompX3;
  4792. break;
  4793. }
  4794. }
  4795. else if (oldLevel == 4)
  4796. {
  4797. switch (newLevel)
  4798. {
  4799. case 1:
  4800. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4801. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4802. break;
  4803. case 2:
  4804. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4805. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4806. break;
  4807. case 3:
  4808. deltX = -m_measureFile.MParam.MagCompX3;
  4809. deltY = -m_measureFile.MParam.MagCompY3;
  4810. break;
  4811. case 4:
  4812. break;
  4813. }
  4814. }
  4815. //通过移动光束校正便宜量
  4816. //单位是m/pix
  4817. float pixSize = iSEM.GetPixelSize();
  4818. LogManager.AddHardwareLog("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
  4819. Thread.Sleep(500);
  4820. float xpCur = iSEM.GetStageAtX();
  4821. float ypCur = iSEM.GetStageAtY();
  4822. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4823. float xpNew = xpCur - deltX;
  4824. float ypNew = ypCur + deltY;
  4825. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4826. //计算最大偏移量
  4827. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4828. iSEM.SetBeamShiftX(100);
  4829. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4830. iSEM.SetBeamShiftX(beamXCur);
  4831. //计算光束偏移值:
  4832. float beamX = iSEM.GetBeamOffsetX();
  4833. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4834. beamX = (-deltX + beamX);
  4835. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4836. if (beamX < beamXMax || beamX < -beamXMax)
  4837. {
  4838. LogManager.AddHardwareLog("X方向移动光束", true);
  4839. float beamXShift = beamX * 100 / beamXMax;
  4840. if (!iSEM.SetBeamShiftX(beamXShift))
  4841. {
  4842. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4843. return false;
  4844. }
  4845. }
  4846. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4847. {
  4848. LogManager.AddHardwareLog("X方向移动样品台", true);
  4849. if (!iSEM.SetStageGotoX(xpNew))
  4850. {
  4851. return false;
  4852. }
  4853. //判断是否移动完成
  4854. while (true)
  4855. {
  4856. Thread.Sleep(5000);
  4857. if (iSEM.GetStageIs() == 0)
  4858. {
  4859. break;
  4860. }
  4861. }
  4862. }
  4863. float beamY = iSEM.GetBeamOffsetY();
  4864. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4865. beamY = (-deltY + beamY);
  4866. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4867. //计算最大偏移量
  4868. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4869. iSEM.SetBeamShiftY(100);
  4870. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4871. iSEM.SetBeamShiftY(beamYCur);
  4872. if (beamY < beamYMax || beamY < -beamYMax)
  4873. {
  4874. LogManager.AddHardwareLog("Y方向移动光束", true);
  4875. float beamYShift = beamY * 100 / beamYMax;
  4876. if (!iSEM.SetBeamShiftY(beamY))
  4877. {
  4878. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4879. return false;
  4880. }
  4881. }
  4882. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4883. {
  4884. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4885. if (!iSEM.SetStageGotoY(ypNew))
  4886. {
  4887. return false;
  4888. }
  4889. //判断是否移动完成
  4890. while (true)
  4891. {
  4892. Thread.Sleep(5000);
  4893. if (iSEM.GetStageIs() == 0)
  4894. {
  4895. break;
  4896. }
  4897. }
  4898. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4899. //arg.State = true;
  4900. //SendMsg("1-7");
  4901. }
  4902. }
  4903. }
  4904. return true;
  4905. }
  4906. #endregion
  4907. #region 测试程序
  4908. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  4909. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  4910. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  4911. //{
  4912. // SendMsg("拍摄照片完成");
  4913. // //return true;
  4914. //}
  4915. //else
  4916. //{
  4917. // SendMsg("拍摄照片失败");
  4918. // return false;
  4919. //}
  4920. //SendMsg("图像校正36度");
  4921. ////3.设置SEM角度补偿cos36度
  4922. //if (!TiltCorrection(36))
  4923. //{
  4924. // return false;
  4925. //}
  4926. //Thread.Sleep(3000);
  4927. //string fn;
  4928. //用宏抓一般图
  4929. //Thread.Sleep(5000);
  4930. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4931. //SendMsg("用宏抓一般图" + fn);
  4932. //iSEM.CMDMCFFilename(fn);
  4933. ////延时1s??
  4934. //Thread.Sleep(5000);
  4935. ////用宏抓好图
  4936. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  4937. //SendMsg("用宏抓好图" + fn);
  4938. //iSEM.CMDMCFFilename(fn);
  4939. ////延时1s??
  4940. //Thread.Sleep(30000);
  4941. //Thread.Sleep(10000);
  4942. //WorkingFolder = m_measureFile.FilePath;
  4943. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  4944. //SendMsg("SEM拍照存储到" + fileName6);
  4945. //if (!GetImage(ImageMode.SEM, fileName6))
  4946. //{
  4947. // SendMsg("SEM拍照失败");
  4948. // return false;
  4949. //}
  4950. ////用宏抓标志图
  4951. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  4952. //SendMsg("用宏抓标志图" + fn);
  4953. //iSEM.CMDMCFFilename(fn);
  4954. ////延时1s??
  4955. //Thread.Sleep(30000);
  4956. //Thread.Sleep(5000);
  4957. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4958. //SendMsg("用宏抓一般图" + fn);
  4959. //iSEM.CMDMCFFilename(fn);
  4960. ////延时1s??
  4961. //Thread.Sleep(5000);
  4962. //SendMsg("所有图结束");
  4963. ////17.自动控制SEM拍截面照
  4964. //{
  4965. // //1.控制SEM放大到指定参数大小范围,6000x
  4966. // if (!iSEM.SetMagnification(6000))
  4967. // {
  4968. // return false;
  4969. // }
  4970. // //2.控制SEM自动对焦、消像散、亮度、对比度
  4971. // if (!MeasParam.FocusMode)
  4972. // {
  4973. // //弹出手动对焦的窗口
  4974. // }
  4975. // else
  4976. // {
  4977. // //调用自动对焦模块
  4978. // }
  4979. // //3.设置SEM角度补偿cos36度
  4980. // if (!TiltCorrection(36))
  4981. // {
  4982. // return false;
  4983. // }
  4984. // //4.控制SEM拍照
  4985. // //5.保存照片4
  4986. // String fileName5 = WorkingFolder + ImageName5;
  4987. // if (!GetImage(ImageMode.SEM, fileName5))
  4988. // {
  4989. // return false;
  4990. // }
  4991. // //6.将照片传给客户,获取偏移坐标
  4992. // float x6 = 0, y6 = 0;
  4993. // float angle1 = 0;
  4994. // float mage = 10000;
  4995. // //7.根据坐标控制SEM移动到分析位置
  4996. // if (!iSEM.MoveStageXY(x6, y6))
  4997. // {
  4998. // return false;
  4999. // }
  5000. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  5001. // float x7 = iSEM.GetStageAtX();
  5002. // float y7 = iSEM.GetStageAtY();
  5003. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  5004. // {
  5005. // return false;
  5006. // }
  5007. // //9.控制SEM平行校正,并记录校正前初始值
  5008. // float foldAnagle = iSEM.GetScanRotation();
  5009. // if (foldAnagle == float.NaN)
  5010. // {
  5011. // return false;
  5012. // }
  5013. // if (!iSEM.SetScanRotation(angle1))
  5014. // {
  5015. // return false;
  5016. // }
  5017. // //10.控制SEM放大到指定参数大小范围
  5018. // if (!iSEM.SetMagnification(mage))
  5019. // {
  5020. // return false;
  5021. // }
  5022. // //11.控制SEM自动对焦、消像散、亮度、对比度
  5023. // if (!MeasParam.FocusMode)
  5024. // {
  5025. // //弹出手动对焦的窗口
  5026. // }
  5027. // else
  5028. // {
  5029. // //调用自动对焦模块
  5030. // }
  5031. // //12.控制SEM对分析位置拍照
  5032. // String fileName6 = WorkingFolder + ImageName6;
  5033. // if (!GetImage(ImageMode.SEM, fileName6))
  5034. // {
  5035. // return false;
  5036. // }
  5037. // //13.保存照片
  5038. // //14.控制SEM取消电子束校正,回到初始值
  5039. // if (!iSEM.SetScanRotation(foldAnagle))
  5040. // {
  5041. // return false;
  5042. // }
  5043. //}
  5044. ////18.自动层高分析
  5045. //{
  5046. // //1.获取SEM Pixel Size给客户传入参数
  5047. // if (iSEM.GetPixelSize() == float.NaN)
  5048. // {
  5049. // return false;
  5050. // }
  5051. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  5052. //}
  5053. ////19.自动能谱分析
  5054. //{
  5055. // //1. 确定能谱位置
  5056. // //2. 控制牛津打能谱
  5057. // //3. 能谱分析——面扫+线扫描
  5058. //}
  5059. #endregion
  5060. #region 能谱所有参数
  5061. //全局只有一个Extender
  5062. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  5063. IExtenderControl iExtender;
  5064. MeasureDB m_MeasDB = null;
  5065. int m_nXrayId = 0;
  5066. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  5067. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  5068. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  5069. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  5070. /// <summary>
  5071. /// 做能谱分析
  5072. /// </summary>
  5073. /// <param name="a_PointNum">分析点ID,索引号</param>
  5074. /// <param name="PointsName">分析点名称</param>
  5075. /// <param name="num">分析点的位置ID</param>
  5076. /// <returns>成功或失败</returns>
  5077. public bool DoEDS(int a_PointNum, string PointsName, int num)
  5078. {
  5079. try
  5080. {
  5081. iExtender = factoryExtender.IExtender;
  5082. //XrayID记录
  5083. LogManager.AddHardwareLog("程序进入EDS测量!", true);
  5084. EDSParam param = m_measureFile.MParam.EDSP;
  5085. double dDwellTime = param.DwellTime;
  5086. int nImageType = param.ImageType;
  5087. double dScanSizes = param.ScanSize;
  5088. LogManager.AddHardwareLog("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  5089. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  5090. string path = EDS_path;
  5091. string edsfn = path + "\\" + num.ToString() + "_" + ImageNameEDS;
  5092. LogManager.AddHardwareLog("EDS_PATH=" + edsfn, true);
  5093. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);
  5094. //送给客户,计算感兴趣的区域
  5095. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  5096. List<System.Drawing.Point> listlines = new List<System.Drawing.Point>();
  5097. List<List<Segment>> listFeature = new List<List<Segment>>();
  5098. List<int> lines_height = new List<int>();
  5099. System.Drawing.Point area_pt = new System.Drawing.Point();
  5100. int width = 1;
  5101. int height = 1;
  5102. //点数据
  5103. int state = 0;
  5104. wr.EDS_Param_Points(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listPoints, out state);
  5105. if (state == 0)
  5106. {
  5107. LogManager.AddHardwareLog("点采集失败", true);
  5108. return false;
  5109. }
  5110. //线数据
  5111. LogManager.AddHardwareLog("线扫描", true);
  5112. state = 0;
  5113. wr.EDS_Param_Lines(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listlines, out lines_height, out state);
  5114. LogManager.AddHardwareLog("线返回数据" + listlines[0].X.ToString() + "," + listlines[0].Y.ToString() + ",lines_height=" + lines_height.Count.ToString(), true);
  5115. if (state == 1)
  5116. {
  5117. //将线转换为segment数据
  5118. LogManager.AddHardwareLog("将线转换为segment数据", true);
  5119. List<Segment> segments = new List<Segment>();
  5120. for (int i = 0; i < listlines.Count; i++)
  5121. {
  5122. for (int j = 0; j <= lines_height[i]; j++)
  5123. {
  5124. Segment segment = new Segment();
  5125. segment.X = listlines[0].X;
  5126. segment.Y = listlines[0].Y + j;
  5127. segment.Length = 1;
  5128. segments.Add(segment);
  5129. }
  5130. listFeature.Add(segments);
  5131. }
  5132. LogManager.AddHardwareLog("将线转换为segment数据完成", true);
  5133. }
  5134. else
  5135. {
  5136. LogManager.AddHardwareLog("线采集失败", true);
  5137. return false;
  5138. }
  5139. //面数据
  5140. state = 0;
  5141. wr.EDS_Param_Areas(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out area_pt, out width, out height, out state);
  5142. LogManager.AddHardwareLog("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  5143. if (state == 1)
  5144. {
  5145. //将面转换为segment数据
  5146. LogManager.AddHardwareLog("将面转换为segment数据", true);
  5147. List<Segment> segments = new List<Segment>();
  5148. for (int j = 0; j <= height; j++)
  5149. {
  5150. Segment segment = new Segment();
  5151. segment.X = area_pt.X;
  5152. segment.Y = area_pt.Y + j;
  5153. segment.Length = width;
  5154. segments.Add(segment);
  5155. }
  5156. listFeature.Add(segments);
  5157. LogManager.AddHardwareLog("将面转换为segment数据完成", true);
  5158. }
  5159. else
  5160. {
  5161. LogManager.AddHardwareLog("面采集失败", true);
  5162. return false;
  5163. }
  5164. //存储数据
  5165. //向分析点数据库更新
  5166. LogManager.AddHardwareLog("listPoints=" + listPoints.Count.ToString() + ",listFeature=" + listFeature.Count.ToString(), true);
  5167. if (!m_MeasDB.InsetAPoint(a_PointNum, PointsName, EDS_path, listPoints.Count, listFeature.Count, num))
  5168. {
  5169. LogManager.AddHardwareLog("插入分析点失败", true);
  5170. }
  5171. LogManager.AddHardwareLog("插入分析点成功", true);
  5172. int AreasNo = 0;
  5173. long[] XrayData = new long[2000];
  5174. Dictionary<string, double> listElement = new Dictionary<string, double>();
  5175. //点采集
  5176. foreach (System.Drawing.Point pt in listPoints)
  5177. {
  5178. XrayData = new long[2000];
  5179. listElement = new Dictionary<string, double>();
  5180. //LogManager.AddHardwareLog("点采集开始", true);
  5181. iExtender.XrayPointCollectiong(param.PointTime, pt.X, pt.Y, out XrayData, out listElement);
  5182. //写入数据库
  5183. m_nXrayId++;
  5184. Boolean ret = m_MeasDB.InsertAPointXay(a_PointNum, m_nXrayId, pt.X, pt.Y, XrayData, listElement, num);
  5185. LogManager.AddHardwareLog("点采集结束,写入数据库开始--" + m_nXrayId.ToString() + "," + ret.ToString(), true);
  5186. //LogManager.AddHardwareLog("点采集写入数据库结束", true);
  5187. if (m_nXrayId % 5 == 0)
  5188. {
  5189. Thread.Sleep(5000);
  5190. }
  5191. else
  5192. {
  5193. Thread.Sleep(1000);
  5194. }
  5195. }
  5196. //面采集
  5197. foreach (List<Segment> listSeg in listFeature)
  5198. {
  5199. XrayData = new long[2000];
  5200. listElement = new Dictionary<string, double>();
  5201. LogManager.AddHardwareLog("面采集开始", true);
  5202. LogManager.AddHardwareLog("AreaTime=" + param.AreaTime.ToString(), true);
  5203. iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement);
  5204. LogManager.AddHardwareLog("面采集结束,写入数据库开始", true);
  5205. //写入数据库
  5206. m_nXrayId++;
  5207. AreasNo++;
  5208. m_MeasDB.InsertAAreaXay(a_PointNum, m_nXrayId, AreasNo, listSeg, XrayData, listElement, num);
  5209. LogManager.AddHardwareLog("面采集写入数据库结束", true);
  5210. }
  5211. }
  5212. catch (Exception e)
  5213. {
  5214. LogManager.AddHardwareLog(e.Message, false);
  5215. }
  5216. return true;
  5217. }
  5218. /// <summary>
  5219. /// 初始化数据库
  5220. /// </summary>
  5221. public void Init_MeasDB()
  5222. {
  5223. m_MeasDB = new MeasureDB(m_measureFile);
  5224. }
  5225. /// <summary>
  5226. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  5227. /// </summary>
  5228. /// <returns></returns>
  5229. public bool EDS_FindCross()
  5230. {
  5231. float x2 = 0, y2 = 0;
  5232. int state = 0;
  5233. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5234. float m_TempBrightness = 50.0f;
  5235. float m_TempContrast = 30.0f;
  5236. if (m_measureFile.MParam.SampleName == "3")
  5237. {
  5238. m_TempBrightness = 48.0f;
  5239. m_TempContrast = 29.0f;
  5240. }
  5241. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5242. iSEM.SetAutoVideoOff();
  5243. Thread.Sleep(200);
  5244. iSEM.SetBrightness(m_TempBrightness);//50.0f
  5245. Thread.Sleep(200);
  5246. iSEM.SetContrast(m_TempContrast);//30.0f
  5247. Thread.Sleep(200);
  5248. //1.控制SEM放大到300倍
  5249. float mag = m_measureFile.MParam.Photograph_Magnification / 3;
  5250. if (mag < 200)
  5251. {
  5252. mag = 200;
  5253. }
  5254. if (!iSEM.SetMagnification(mag))
  5255. {
  5256. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  5257. arg.State = false;
  5258. SendMsg("1-24");
  5259. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5260. return false;
  5261. }
  5262. Thread.Sleep(200);
  5263. float current = iSEM.GetMagnification();
  5264. Thread.Sleep(200);
  5265. while (Math.Abs(current - mag) > 2)
  5266. {
  5267. iSEM.SetMagnification(mag);
  5268. Thread.Sleep(200);
  5269. current = iSEM.GetMagnification();
  5270. Thread.Sleep(200);
  5271. }
  5272. Thread.Sleep(2000);
  5273. //判断是否停止进程
  5274. if (key_stop)
  5275. {
  5276. LogManager.AddHardwareLog("停止键按下", true);
  5277. return false;
  5278. }
  5279. //3.控制SEM拍照
  5280. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
  5281. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5282. String fileName4 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS4;
  5283. LogManager.AddHardwareLog("fileName4=============" + fileName4, true);
  5284. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5285. arg.Picture_Information.Picture_FullPath = fileName4;
  5286. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5287. Thread.Sleep(200);
  5288. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5289. Thread.Sleep(200);
  5290. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5291. Thread.Sleep(200);
  5292. //拍照前改变速度,延时
  5293. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5294. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5295. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5296. Thread.Sleep(200);
  5297. cycle_time = iSEM.GetCycleTime();
  5298. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5299. if (!GetImage(fileName4))
  5300. {
  5301. //arg.State = false;
  5302. //arg.Message = "SEM拍照找切割位置失败";
  5303. //SendMsg("1-25");
  5304. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5305. return false;
  5306. }
  5307. //arg.Picture_Information.Picture_FullPath = fileName4;
  5308. //arg.State = true;
  5309. //arg.Message = "SEM拍照成功";
  5310. //SendMsg("1-25");
  5311. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5312. Thread.Sleep(200);
  5313. cycle_time = iSEM.GetCycleTime();
  5314. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5315. //判断是否停止进程
  5316. if (key_stop)
  5317. {
  5318. return false;
  5319. }
  5320. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  5321. //5.根据坐标控制SEM移动到切孔位置,居中
  5322. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  5323. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  5324. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  5325. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  5326. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  5327. if (state == 1)
  5328. {
  5329. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  5330. if (!MoveToPixByMoveStage(x2, y2))
  5331. {
  5332. //arg.State = false;
  5333. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  5334. //SendMsg("1-26");
  5335. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5336. return false;
  5337. }
  5338. //判断是否移动完成
  5339. while (true)
  5340. {
  5341. Thread.Sleep(4000);
  5342. if (iSEM.GetStageIs() == 0)
  5343. {
  5344. break;
  5345. }
  5346. }
  5347. //arg.State = true;
  5348. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  5349. //SendMsg("1-26");
  5350. //高倍到低倍不进行对焦
  5351. //拍照前改变速度,延时
  5352. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5353. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5354. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5355. Thread.Sleep(200);
  5356. cycle_time = iSEM.GetCycleTime();
  5357. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5358. if (hand_intervene == 1)
  5359. {
  5360. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5361. }
  5362. }
  5363. else
  5364. {
  5365. arg.Message = "图像接口参数state返回值为零";
  5366. arg.State = false;
  5367. SendMsg("1-26");
  5368. if (hand_intervene == 1)
  5369. {
  5370. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5371. {
  5372. return false;
  5373. }
  5374. }
  5375. else
  5376. {
  5377. return false;
  5378. }
  5379. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5380. return false;
  5381. }
  5382. //判断是否停止进程
  5383. if (key_stop)
  5384. {
  5385. LogManager.AddHardwareLog("停止键按下", true);
  5386. return false;
  5387. }
  5388. return true;
  5389. }
  5390. /// <summary>
  5391. /// 171.能谱第17步找点采集数据
  5392. /// </summary>
  5393. /// <returns></returns>
  5394. public bool EDS_ShotSection()
  5395. {
  5396. int state = 0;
  5397. #region 设置拍照的放大倍数
  5398. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  5399. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5400. {
  5401. //arg.Message = "放大倍数调整失败";
  5402. //arg.State = false;
  5403. //SendMsg("1-27");
  5404. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5405. return false;
  5406. }
  5407. float set = m_measureFile.MParam.Photograph_Magnification;
  5408. float current = iSEM.GetMagnification();
  5409. while (Math.Abs(current - set) > 1)
  5410. {
  5411. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  5412. Thread.Sleep(200);
  5413. current = iSEM.GetMagnification();
  5414. }
  5415. //arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString() + "成功";
  5416. //arg.State = true;
  5417. //SendMsg("1-27");
  5418. Thread.Sleep(3000 + (Int32)cycle_time);
  5419. //判断是否停止进程
  5420. if (key_stop)
  5421. {
  5422. LogManager.AddHardwareLog("停止键按下", true);
  5423. return false;
  5424. }
  5425. #endregion
  5426. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  5427. //2.控制SEM自动对焦、亮度、对比度-接口
  5428. iSEM.SetReduced(402, 128, 340, 256);
  5429. Thread.Sleep(200);
  5430. //add by sun 2020-12-15
  5431. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//iSEM.CmdFocusRate(5);//
  5432. //add by sun 2020-12-15 end
  5433. Thread.Sleep(200);
  5434. cycle_time = iSEM.GetCycleTime();
  5435. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5436. if (!iSEM.SetAutoVideoOff())
  5437. {
  5438. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5439. return false;
  5440. }
  5441. Thread.Sleep(5000);
  5442. if (ImageFocus1(false))
  5443. {
  5444. //arg.Message = "自动对焦完成";
  5445. //arg.State = true;
  5446. //SendMsg("1-28");
  5447. }
  5448. else
  5449. {
  5450. //arg.Message = "自动对焦失败";
  5451. //arg.State = false;
  5452. //SendMsg("1-28");
  5453. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5454. return false;
  5455. }
  5456. iSEM.CloseReduced();
  5457. Thread.Sleep(200);
  5458. cycle_time = iSEM.GetCycleTime();
  5459. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  5460. //判断是否停止进程
  5461. if (key_stop)
  5462. {
  5463. LogManager.AddHardwareLog("停止键按下", true);
  5464. return false;
  5465. }
  5466. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5467. {
  5468. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5469. return false;
  5470. }
  5471. Thread.Sleep(5000);
  5472. //3、设置SEM补偿角度
  5473. if (m_measureFile.MParam.Is_Photograph == false)
  5474. {
  5475. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString() + "度", true);
  5476. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  5477. {
  5478. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  5479. //arg.State = false;
  5480. //SendMsg("1-29");
  5481. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5482. return false;
  5483. }
  5484. //arg.State = true;
  5485. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  5486. //SendMsg("1-29");
  5487. Thread.Sleep(200);
  5488. //判断是否停止进程
  5489. if (key_stop)
  5490. {
  5491. LogManager.AddHardwareLog("停止键按下", false);
  5492. return false;
  5493. }
  5494. }
  5495. //4、拍照,5、保存照片
  5496. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS5;
  5497. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5498. String fileName5 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS5;
  5499. LogManager.AddHardwareLog("fileName5==============="+ fileName5, false);
  5500. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5501. arg.Picture_Information.Picture_FullPath = fileName5;
  5502. arg.Picture_Information.Work_Status = "SEM";
  5503. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5504. Thread.Sleep(200);
  5505. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5506. Thread.Sleep(200);
  5507. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5508. Thread.Sleep(200);
  5509. //拍照前改变速度,延时
  5510. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5511. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5512. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5513. Thread.Sleep(200);
  5514. cycle_time = iSEM.GetCycleTime();
  5515. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  5516. if (!GetImage(fileName5))
  5517. {
  5518. //arg.Message = "SEM拍照失败";
  5519. //arg.State = false;
  5520. //SendMsg("1-30");
  5521. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5522. return false;
  5523. }
  5524. //arg.State = true;
  5525. //arg.Message = "SEM拍照成功";
  5526. //SendMsg("1-30");
  5527. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5528. Thread.Sleep(200);
  5529. cycle_time = iSEM.GetCycleTime();
  5530. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5531. //判断是否停止进程
  5532. if (key_stop)
  5533. {
  5534. LogManager.AddHardwareLog("停止键按下", true);
  5535. return false;
  5536. }
  5537. #endregion
  5538. if (m_measureFile.MParam.Is_Photograph == false)
  5539. {
  5540. #region 对当前矩形进行旋转校正
  5541. //8,计算切割面区域偏移角度及方向
  5542. float degree = 0;
  5543. int direction = 0;
  5544. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  5545. LogManager.AddHardwareLog("测量线程:拍照角度移动,输入图像" + ImageNameEDS5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  5546. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  5547. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  5548. if (state == 1)
  5549. {
  5550. //梯形角度
  5551. iSEM.SetScanRotationOn();
  5552. Thread.Sleep(200);
  5553. //20201128陈工要求,谭博返回角度*0.7
  5554. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  5555. Thread.Sleep(200);
  5556. //arg.State = true;
  5557. //arg.Message = "图像接口返回角度为:" + degree.ToString();
  5558. //SendMsg("1-31");
  5559. if (hand_intervene == 1)
  5560. {
  5561. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5562. }
  5563. }
  5564. else
  5565. {
  5566. //arg.Message = "图像接口参数State返回值为零";
  5567. //arg.State = false;
  5568. //SendMsg("1-31");
  5569. if (hand_intervene == 1)
  5570. {
  5571. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5572. {
  5573. return false;
  5574. }
  5575. }
  5576. else
  5577. {
  5578. //return false;
  5579. }
  5580. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5581. }
  5582. //判断是否停止进程
  5583. if (key_stop)
  5584. {
  5585. LogManager.AddHardwareLog("停止键按下", true);
  5586. return false;
  5587. }
  5588. Thread.Sleep(200);
  5589. //12拍照
  5590. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS6;
  5591. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5592. String fileName6 = data_path + "\\" + m_measureFile.MParam.Firm + "-" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS6;
  5593. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5594. LogManager.AddHardwareLog("fileName6===================" + fileName6, true);
  5595. arg.Picture_Information.Picture_FullPath = fileName6;
  5596. arg.Picture_Information.Work_Status = "SEM";
  5597. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5598. Thread.Sleep(200);
  5599. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5600. Thread.Sleep(200);
  5601. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5602. Thread.Sleep(200);
  5603. //拍照前改变速度,延时
  5604. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5605. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5606. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5607. Thread.Sleep(200);
  5608. cycle_time = iSEM.GetCycleTime();
  5609. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5610. if (!GetImage(fileName6))
  5611. {
  5612. //arg.Message = "SEM拍照失败";
  5613. //arg.State = false;
  5614. //SendMsg("1-33");
  5615. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5616. return false;
  5617. }
  5618. //arg.State = true;
  5619. //arg.Message = "SEM拍照成功";
  5620. //SendMsg("1-33");
  5621. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5622. Thread.Sleep(200);
  5623. cycle_time = iSEM.GetCycleTime();
  5624. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5625. //判断是否停止进程
  5626. if (key_stop)
  5627. {
  5628. LogManager.AddHardwareLog("停止键按下", true);
  5629. return false;
  5630. }
  5631. #endregion
  5632. #region 获取两个位置上及放大倍数
  5633. //计算两个测量区域坐标
  5634. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  5635. List<float> mag = new List<float>();
  5636. System.Drawing.Point ct0;
  5637. float magMax = 0;
  5638. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  5639. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  5640. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  5641. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  5642. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  5643. "输入产品" + m_measureFile.MParam.Firm.ToString()
  5644. + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  5645. + "输出放大倍数1" + mag[0]
  5646. + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  5647. + "输出放大倍数2" + mag[0]
  5648. + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  5649. #endregion
  5650. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  5651. {
  5652. //arg.State = true;
  5653. //arg.Message = "获取位置及放大倍数成功";
  5654. //SendMsg("1-34");
  5655. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  5656. float xs = iSEM.GetBeamShiftX();
  5657. Thread.Sleep(200);
  5658. float ys = iSEM.GetBeamShiftY();
  5659. Thread.Sleep(200);
  5660. float xpCur = iSEM.GetStageAtX();
  5661. Thread.Sleep(200);
  5662. float ypCur = iSEM.GetStageAtY();
  5663. Thread.Sleep(200);
  5664. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  5665. + "y=" + ys.ToString() + ","
  5666. + "原来样品台的位置x= " + xpCur.ToString()
  5667. + "y=" + ypCur.ToString(), true);
  5668. #endregion
  5669. #region 移动到梯形左上角
  5670. //找到放大倍数最大值
  5671. magMax = mag[0];
  5672. for (int m = 1; m < mag.Count; m++)
  5673. {
  5674. if (mag[m] > magMax)
  5675. {
  5676. magMax = mag[m];
  5677. }
  5678. }
  5679. //20201127将视野移动到梯形左上角位置
  5680. MoveToPix(ct0.X, ct0.Y);
  5681. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  5682. + "," + ct0.Y.ToString() + ")", true);
  5683. //关闭自动亮度对比度
  5684. iSEM.SetAutoVideoOff();
  5685. Thread.Sleep(2000);
  5686. iSEM.SetReduced(402, 128, 340, 256);
  5687. Thread.Sleep(200);
  5688. //add by sun 2020-12-15
  5689. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5690. //add by sun 2020-12-15 end
  5691. Thread.Sleep(200);
  5692. cycle_time = iSEM.GetCycleTime();
  5693. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5694. //放大到10000倍
  5695. iSEM.SetMagnification(magMax / 2);
  5696. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5697. set = magMax / 2;
  5698. current = iSEM.GetMagnification();
  5699. while (Math.Abs(current - set) > 1)
  5700. {
  5701. iSEM.SetMagnification(set);
  5702. Thread.Sleep(200);
  5703. current = iSEM.GetMagnification();
  5704. }
  5705. //自动对焦
  5706. if (!ImageFocus1(true))
  5707. {
  5708. return false;
  5709. }
  5710. //放大到10000倍
  5711. iSEM.SetMagnification(magMax);
  5712. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5713. set = magMax;
  5714. current = iSEM.GetMagnification();
  5715. while (Math.Abs(current - set) > 1)
  5716. {
  5717. iSEM.SetMagnification(set);
  5718. Thread.Sleep(200);
  5719. current = iSEM.GetMagnification();
  5720. }
  5721. //自动对焦
  5722. if (!ImageFocus1(true))
  5723. {
  5724. return false;
  5725. }
  5726. iSEM.CloseReduced();
  5727. Thread.Sleep(200);
  5728. cycle_time = iSEM.GetCycleTime();
  5729. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5730. #endregion
  5731. #region 恢复到拍照的状态
  5732. iSEM.SetStageGotoX(xpCur);
  5733. while (true)
  5734. {
  5735. Thread.Sleep(4000);
  5736. if (iSEM.GetStageIs() == 0)
  5737. {
  5738. break;
  5739. }
  5740. }
  5741. iSEM.SetStageGotoY(ypCur);
  5742. while (true)
  5743. {
  5744. Thread.Sleep(4000);
  5745. if (iSEM.GetStageIs() == 0)
  5746. {
  5747. break;
  5748. }
  5749. }
  5750. iSEM.CloseReduced();
  5751. Thread.Sleep(200);
  5752. cycle_time = iSEM.GetCycleTime();
  5753. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5754. //增亮图像
  5755. iSEM.SetAutoVideoOff();
  5756. Thread.Sleep(200);
  5757. float currentBright = iSEM.GetBrightness();
  5758. Thread.Sleep(200);
  5759. float currentContrast = iSEM.GetContrast();
  5760. Thread.Sleep(200);
  5761. iSEM.SetBrightness(currentBright + 2);
  5762. Thread.Sleep(200);
  5763. iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
  5764. Thread.Sleep(200);
  5765. #endregion
  5766. #region 循环拍照
  5767. for (int n = 0; n < ct.Count; n++)
  5768. {
  5769. #region 恢复到拍照的状态
  5770. iSEM.SetStageGotoX(xpCur);
  5771. while (true)
  5772. {
  5773. Thread.Sleep(4000);
  5774. if (iSEM.GetStageIs() == 0)
  5775. {
  5776. break;
  5777. }
  5778. }
  5779. iSEM.SetStageGotoY(ypCur);
  5780. while (true)
  5781. {
  5782. Thread.Sleep(4000);
  5783. if (iSEM.GetStageIs() == 0)
  5784. {
  5785. break;
  5786. }
  5787. }
  5788. //恢复原来的放大倍数
  5789. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5790. {
  5791. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5792. return false;
  5793. }
  5794. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5795. set = m_measureFile.MParam.Photograph_Magnification;
  5796. current = iSEM.GetMagnification();
  5797. while (Math.Abs(current - set) > 1)
  5798. {
  5799. iSEM.SetMagnification(set);
  5800. Thread.Sleep(200);
  5801. current = iSEM.GetMagnification();
  5802. }
  5803. //恢复BeamShift的百分比值
  5804. iSEM.SetBeamShiftX(xs);
  5805. Thread.Sleep(200);
  5806. iSEM.SetBeamShiftY(ys);
  5807. Thread.Sleep(200);
  5808. #endregion
  5809. #region 移动到指定点位置
  5810. if (!MoveToPix(ct[n].X, ct[n].Y))
  5811. {
  5812. arg.State = false;
  5813. arg.Message = "移动到第一个点位置失败";
  5814. SendMsg("1-" + (35 + n).ToString());
  5815. //移动到第一个点失败
  5816. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  5817. }
  5818. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  5819. + "," + ct[n].Y.ToString() + ")", true);
  5820. #endregion
  5821. #region 如果是第一个点,则1W倍对焦
  5822. if (n == 0)
  5823. {
  5824. }
  5825. #endregion
  5826. #region 拍照
  5827. if (!iSEM.SetMagnification(mag[n]))
  5828. {
  5829. arg.State = false;
  5830. arg.Message = "移动到第一个点位置拍照失败";
  5831. SendMsg("1-35");
  5832. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5833. return false;
  5834. }
  5835. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5836. set = mag[n];
  5837. current = iSEM.GetMagnification();
  5838. while (Math.Abs(current - set) > 1)
  5839. {
  5840. iSEM.SetMagnification(set);
  5841. Thread.Sleep(200);
  5842. current = iSEM.GetMagnification();
  5843. }
  5844. DoEDS(m_nWorkHoleNo + 1, cutHoles[m_nWorkHoleNo].HoleName, n + 1);
  5845. #endregion
  5846. }
  5847. #endregion
  5848. if (hand_intervene == 1)
  5849. {
  5850. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5851. }
  5852. }
  5853. else
  5854. {
  5855. if (hand_intervene == 1)
  5856. {
  5857. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5858. {
  5859. // return false;
  5860. }
  5861. }
  5862. else
  5863. {
  5864. //return false;
  5865. }
  5866. //arg.State = false;
  5867. //arg.Message = "获取位置及放大倍数失败";
  5868. //SendMsg("1-34");
  5869. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5870. }
  5871. //判断是否停止进程
  5872. if (key_stop)
  5873. {
  5874. LogManager.AddHardwareLog("停止键按下", true);
  5875. return false;
  5876. }
  5877. }
  5878. //判断是否停止进程
  5879. if (key_stop)
  5880. {
  5881. return false;
  5882. }
  5883. return true;
  5884. }
  5885. /// <summary>
  5886. /// 19.能谱分析
  5887. /// </summary>
  5888. /// <returns></returns>
  5889. public bool EDSAnalysis()
  5890. {
  5891. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  5892. if (m_measureFile.MParam.EDSZ < Z_Min || m_measureFile.MParam.EDSZ > Z_Max)
  5893. {
  5894. LogManager.AddHardwareLog("Z轴位置设置超出范围.", true);
  5895. return false;
  5896. }
  5897. LogManager.AddHardwareLog("将Z轴位置指定到:" + m_measureFile.MParam.EDSZ.ToString(), true);
  5898. if (!iSEM.SetStageGotoZ(m_measureFile.MParam.EDSZ))
  5899. {
  5900. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  5901. return false;
  5902. }
  5903. while (true)
  5904. {
  5905. Thread.Sleep(4000);
  5906. if (iSEM.GetStageIs() == 0)
  5907. {
  5908. break;
  5909. }
  5910. }
  5911. //判断是否停止进程
  5912. if (key_stop)
  5913. {
  5914. LogManager.AddHardwareLog("停止键按下", true);
  5915. return false;
  5916. }
  5917. //2.角度改为54度
  5918. iSEM.SetScanRotationOff();
  5919. Thread.Sleep(200);
  5920. //3.设置电压和电流
  5921. iSEM.SetSEMVoltage(m_measureFile.MParam.EDSV);
  5922. Thread.Sleep(2000);
  5923. iSEM.SetSEMIPROBE(m_measureFile.MParam.EDSA);
  5924. Thread.Sleep(500);
  5925. //4.自动亮度对比度 del by sun 2020-12-17
  5926. //iSEM.SetAutoBright(100);
  5927. //Thread.Sleep(200);
  5928. //iSEM.SetAutoContrast(100);
  5929. //Thread.Sleep(200);
  5930. //if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5931. //{
  5932. // LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  5933. // return false;
  5934. //}
  5935. //Thread.Sleep(5000);
  5936. //del by sun 2020-12-17
  5937. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5938. //关闭自动亮度对比度
  5939. iSEM.SetAutoVideoOff();
  5940. Thread.Sleep(2000);
  5941. float m_TempBrightness = 50f;
  5942. float m_TempContrast = 29f;
  5943. if (m_measureFile.MParam.SampleName == "3")
  5944. {
  5945. m_TempBrightness = 50f;
  5946. m_TempContrast = 29f;
  5947. }
  5948. iSEM.SetBrightness(m_TempBrightness); //50.0f
  5949. Thread.Sleep(200);
  5950. iSEM.SetContrast(m_TempContrast); //30.0f
  5951. Thread.Sleep(5000);
  5952. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5953. //5.自动对焦
  5954. iSEM.SetReduced(256, 192, 512, 512);
  5955. Thread.Sleep(200);
  5956. //add by sun 2020-12-15
  5957. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5958. //add by sun 2020-12-15 end
  5959. Thread.Sleep(200);
  5960. cycle_time = iSEM.GetCycleTime();
  5961. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5962. if (!ImageFocus1(false))
  5963. {
  5964. return false;
  5965. }
  5966. iSEM.CloseReduced();
  5967. Thread.Sleep(200);
  5968. cycle_time = iSEM.GetCycleTime();
  5969. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5970. //6.调用161步过程
  5971. if (!EDS_FindCross())
  5972. {
  5973. return false;
  5974. }
  5975. //7.调用171步过程
  5976. if (!EDS_ShotSection())
  5977. {
  5978. return false;
  5979. }
  5980. return true;
  5981. }
  5982. /// <summary>
  5983. /// 20.光束等复位
  5984. /// </summary>
  5985. public void BeamShiftReset()
  5986. {
  5987. iSEM.SetTiltAngleOff();
  5988. Thread.Sleep(200);
  5989. iSEM.SetScanRotationOff();
  5990. Thread.Sleep(200);
  5991. iSEM.SetBeamShiftX(0);
  5992. Thread.Sleep(200);
  5993. iSEM.SetBeamShiftY(0);
  5994. Thread.Sleep(200);
  5995. }
  5996. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  5997. #region 设置电压电流
  5998. public bool SetVoltageAndIPROBE()
  5999. {
  6000. LogManager.AddHardwareLog("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  6001. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  6002. bool mRet_VoltageFlag = false;
  6003. bool mRet_ElecFlag = false;
  6004. if (m_measureFile.MParam.SampleName != "3")
  6005. {
  6006. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  6007. Thread.Sleep(500);
  6008. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  6009. Thread.Sleep(500);
  6010. }
  6011. else
  6012. {
  6013. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  6014. Thread.Sleep(500);
  6015. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  6016. Thread.Sleep(500);
  6017. }
  6018. if (!mRet_VoltageFlag) return false;
  6019. if (!mRet_ElecFlag) return false;
  6020. LogManager.AddHardwareLog("测量线程:设置电压电流完成!" , true);
  6021. return true;
  6022. }
  6023. #endregion
  6024. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  6025. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  6026. #region 拍照
  6027. public bool GetImageFromSEM(float m_Mag) {
  6028. if (!iSEM.SetMagnification(m_Mag))
  6029. {
  6030. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + m_Mag.ToString() + "失败", false);
  6031. return false;
  6032. }
  6033. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成(一半倍数)!", true);
  6034. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  6035. String m_FileName = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_Mag.ToString() + "_0_" + ImageNameTwo_1;
  6036. //arg.Picture_Information.Picture_FullPath = m_FileName;
  6037. //arg.Picture_Information.Work_Status = "SEM";
  6038. //arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  6039. //Thread.Sleep(200);
  6040. //arg.Picture_Information.Magnification = iSEM.GetMagnification();
  6041. //Thread.Sleep(200);
  6042. //arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  6043. //Thread.Sleep(200);
  6044. //拍照前改变速度,延时
  6045. iSEM.CmdLineScan();
  6046. Thread.Sleep(200);
  6047. cycle_time = iSEM.GetCycleTime();
  6048. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  6049. if (!GetImage(m_FileName))
  6050. {
  6051. LogManager.AddHardwareLog("测量线程报错:========" + arg.Message, false);
  6052. return false;
  6053. }
  6054. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  6055. return true;
  6056. }
  6057. #endregion
  6058. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  6059. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息
  6060. public void SaveMeasDataPic(String picFullPath,float Mag,float pixelsize)
  6061. {
  6062. try
  6063. {
  6064. using (System.Drawing.Image img = Image.FromFile(picFullPath))
  6065. {
  6066. Bitmap bmp = new Bitmap(img.Width, img.Height);
  6067. using (Graphics g = Graphics.FromImage(bmp))
  6068. {
  6069. g.DrawImage(img, 0, 0, img.Width, img.Height);
  6070. String str = "Mag:" + Mag.ToString("0") + "X\tPixelSize:" + (pixelsize * 1000000).ToString("0.00") + "um";
  6071. Font font =new Font("宋体", 16, FontStyle.Bold);
  6072. SolidBrush sbrush = new SolidBrush(Color.LimeGreen);
  6073. g.DrawString(str, font, sbrush, new PointF(40, img.Height - 30));
  6074. }
  6075. String path1 = Path.GetDirectoryName(picFullPath) + Path.GetFileNameWithoutExtension(picFullPath) + "_Data." + Path.GetExtension(picFullPath);
  6076. LogManager.AddHardwareLog("Path.GetDirectoryName(picFullPath)==" + Path.GetDirectoryName(picFullPath) + "Path.GetFileNameWithoutExtension(picFullPath)==" + Path.GetFileNameWithoutExtension(picFullPath) + "Path.GetExtension(picFullPath)==" + Path.GetExtension(picFullPath), true);
  6077. LogManager.AddHardwareLog("在测量图上显示放大倍数和像素大小信息==============="+ path1, true);
  6078. bmp.Save(path1);
  6079. }
  6080. }
  6081. catch
  6082. {
  6083. LogManager.AddHardwareLog("在测量图上显示放大倍数和像素大小信息失败", true);
  6084. }
  6085. }
  6086. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息 end
  6087. #endregion
  6088. }
  6089. }