HOZ/MeasureThread/Locate.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading;
using System.Threading.Tasks;
using NLog;
using SmartSEMControl;

namespace MeasureThread
{
    class Locate : ILocate
    {
        NLog.Logger log;
        private LocateParam prm;
        private ISEMControl iSEM;

        public Locate( LocateParam prm, ISEMControl iSEM)
        {
            this.log = NLog.LogManager.GetCurrentClassLogger();
           
            this.log = log ?? throw new ArgumentNullException(nameof(log));
            this.prm = prm ?? throw new ArgumentNullException(nameof(prm));
            this.iSEM = iSEM ?? throw new ArgumentNullException(nameof(iSEM));
        }

       
        //移动到像素位置，这里要靠移动样品台实现，当位移量小于3um时，不予移动
        bool MoveToPixByMoveStage(float xc, float yc)
        {
            //单位是m/pix
            float XpixSize = iSEM.GetPixelSize();
            log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
            float YpixSize = iSEM.GetPixelSize()/prm.PixelSize_Y_cur;///(float)MParam.PixelSizeCor);
            log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);

            Thread.Sleep(500);
            //0:width, 1:height
            int[] imageSize = iSEM.GetImageStore();

            int width = imageSize[0] / 2;
            int height = imageSize[1] / 2;

            log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
            log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);

            float deltX = (xc - (float)width) * XpixSize;
            float deltY = (yc - (float)height) * YpixSize;

            log.Info("x位移量 = " + deltX.ToString() + "m", true);
            log.Info("y位移量 = " + deltY.ToString() + "m", true);

            float xpCur = iSEM.GetStageAtX();
            float ypCur = iSEM.GetStageAtY();

            log.Info("当前位置（" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);

            float xpNew = xpCur - deltX;
            float ypNew = ypCur + deltY;

            log.Info("目标位置（" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);

            //计算光束偏移值：
            //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
            {
                log.Info("X方向移动样品台", true);

                if (!iSEM.SetStageGotoX(xpNew))
                {
                    return false;
                }

                //判断是否移动完成
                while (true)
                {
                    Thread.Sleep(5000);
                    if (iSEM.GetStageIs() == 0)
                    {
                        break;
                    }
                }
            }

            //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
            {
                log.Info("Y方向移动样品台", true);

                if (!iSEM.SetStageGotoY(ypNew))
                {
                    return false;
                }

                //判断是否移动完成
                while (true)
                {
                    Thread.Sleep(5000);
                    if (iSEM.GetStageIs() == 0)
                    {
                        break;
                    }
                }
            }

            return true;
        }
        //移动到像素位置
        bool MoveToPix(float xc, float yc)
        {

            //单位是m/pix
            float XpixSize = iSEM.GetPixelSize();

            log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
            float YpixSize = (XpixSize / prm.PixelSize_Y_cur);
            log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);

            Thread.Sleep(200);
            //0:width, 1:height
            int[] imageSize = iSEM.GetImageStore();

            int width = imageSize[0] / 2;
            int height = imageSize[1] / 2;

            log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
            log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);

            float deltX = (xc - (float)width) * XpixSize;
            float deltY = (yc - (float)height) * YpixSize;

            log.Info("x位移量 = " + deltX.ToString() + "m", true);
            log.Info("y位移量 = " + deltY.ToString() + "m", true);

            float xpCur = iSEM.GetStageAtX();
            Thread.Sleep(200);
            float ypCur = iSEM.GetStageAtY();

            log.Info("当前位置（" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);

            float xpNew = xpCur - deltX;
            float ypNew = ypCur + deltY;

            log.Info("目标位置（" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);

            //计算最大偏移量
            float beamXCur = iSEM.GetBeamShiftX();//单位是%
            Thread.Sleep(200);
            iSEM.SetBeamShiftX(100);
            Thread.Sleep(200);
            float beamXMax = iSEM.GetBeamOffsetX();//单位是m
            Thread.Sleep(200);
            iSEM.SetBeamShiftX(beamXCur);
            Thread.Sleep(200);
            //计算光束偏移值：
            float beamX = iSEM.GetBeamOffsetX();
            log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);

            beamX = (-deltX + beamX);
            log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);

            if (((beamX <= beamXMax) && (beamX >= 0)) ||
                ((beamX >= -beamXMax) && (beamX < 0)))
            {
                log.Info("X方向移动光束", true);
                float beamXShift = beamX * 100 / beamXMax;
                log.Info("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
                if (!iSEM.SetBeamShiftX(beamXShift))//if (!iSEM.SetBeamOffsetX(beamX))
                {
                    log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
                    return false;
                }
            }
            else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
            {
                log.Info("X方向移动样品台", true);

                if (!iSEM.SetStageGotoX(xpNew))
                {
                    return false;
                }

                //判断是否移动完成
                while (true)
                {
                    Thread.Sleep(4000);
                    if (iSEM.GetStageIs() == 0)
                    {
                        break;
                    }
                }
            }

            float beamY = iSEM.GetBeamOffsetY();
            log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);

            beamY = (-deltY + beamY);
            log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);

            //计算最大偏移量
            float beamYCur = iSEM.GetBeamShiftY();//单位是%
            Thread.Sleep(200);
            iSEM.SetBeamShiftY(100);
            Thread.Sleep(200);
            float beamYMax = iSEM.GetBeamOffsetY();//单位是m
            Thread.Sleep(200);
            iSEM.SetBeamShiftY(beamYCur);
            Thread.Sleep(200);
            if (((beamY <= beamYMax) && (beamY >= 0)) ||
                ((beamY >= -beamYMax) && (beamY < 0)))
            {
                log.Info("Y方向移动光束", true);
                float beamYShift = beamY * 100 / beamYMax;
                log.Info("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
                //if(!iSEM.SetBeamOffsetY(beamY))
                if (!iSEM.SetBeamShiftY(beamYShift))
                {
                    log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
                    return false;
                }
            }
            else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
            {
                log.Info("Y方向移动样品台", true);

                if (!iSEM.SetStageGotoY(ypNew))
                {
                    return false;
                }

                //判断是否移动完成
                while (true)
                {
                    Thread.Sleep(4000);
                    if (iSEM.GetStageIs() == 0)
                    {
                        break;
                    }
                }

            }

            return true;
        }

        public bool DoLocateByMoveStage()
        {
           return MoveToPixByMoveStage(prm.PositionX, prm.PositionY);
        }

        public bool DoLocateByShiftBeam()
        {
            return MoveToPix(prm.PositionX, prm.PositionY);
        }
    }
}