Measure.cs 174 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. NLog.Logger log;
  321. #region 变量定义
  322. //Web接口类
  323. public ImageProcess ImagePro = null;
  324. //SmartSEM远程路径
  325. public String RemoteELYPath = "";
  326. public String RemoteMLFPath = "";
  327. //扫描周期
  328. private float cycle_time = 0;
  329. //人工干预
  330. public int hand_intervene = 2;
  331. //样品台保护值
  332. public float X_Min = 0;
  333. public float X_Max = 0.13f;
  334. public float Y_Min = 0;
  335. public float Y_Max = 0.13f;
  336. public float Z_Min = 0;
  337. public float Z_Max = 0.05f;
  338. public float T_Min = -4;
  339. public float T_Max = 70;
  340. public float R_Min = -380;
  341. public float R_Max = 380;
  342. public float M_Min = 0;
  343. public float M_Max = 0.012f;
  344. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  345. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  346. //定义一个全局的消息类
  347. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  348. //全局只有一个fatorySEM
  349. static FactoryHardware factorySEM = FactoryHardware.Instance;
  350. ISEMControl iSEM = factorySEM.ISEM;
  351. //@的作用是不用转义字符\\只打一个就行
  352. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  354. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  355. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  356. const String ImageName31 = @"FIBBefore.tif";
  357. const String ImageName32 = @"FIBAfter.tif";
  358. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  359. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  360. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  361. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  362. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  364. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  365. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  366. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  367. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  368. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  369. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  370. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  371. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  372. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  373. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  374. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  375. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  376. const String ElyDeposition = @"Deposition.ely"; //沉积
  377. const String ElyCrossSection = @"CrossSection.ely"; //切割
  378. const float fMin = (float)0.0000002; //单位是米
  379. const float fSateyZ = (float)0.03;//单位是米
  380. public Boolean key_stop = false;
  381. String focus_path = "";
  382. String FIBfocus_path = "";
  383. String StigX_path = "";
  384. String StigY_path = "";
  385. String EDS_path = "";
  386. String data_path = "";
  387. int m_nWorkHoleNo = -1;
  388. //测量文件
  389. private MeasureFile m_measureFile;
  390. public MeasureFile MeasureFile
  391. {
  392. get { return this.m_measureFile; }
  393. set { this.m_measureFile = value; }
  394. }
  395. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  396. private List<MeasureData.CutHole> m_cutHoles;
  397. public List<MeasureData.CutHole> cutHoles
  398. {
  399. get { return this.m_cutHoles; }
  400. set { this.m_cutHoles = value; }
  401. }
  402. public MeasureParam MParam//测量参数对象
  403. {
  404. get { return this.m_measureFile.MParam; }
  405. //set { this.m_measureParam = value; }
  406. }
  407. //工作文件夹
  408. private string m_WorkingFolder;
  409. public string WorkingFolder
  410. {
  411. get { return this.m_WorkingFolder; }
  412. set { this.m_WorkingFolder = value; }
  413. }
  414. //程序当前路径
  415. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  416. //线程状态
  417. private ThreadStatus m_ThreadStatus;
  418. public ThreadStatus TStatus
  419. {
  420. get { return this.m_ThreadStatus; }
  421. set { this.m_ThreadStatus = value; }
  422. }
  423. #endregion
  424. //构造函数
  425. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  426. {
  427. log = NLog.LogManager.GetCurrentClassLogger();
  428. TStatus = new ThreadStatus();
  429. cutHoles = new List<MeasureData.CutHole>();
  430. //配置远程连接
  431. ImagePro = new ImageProcess(webServerIP, webServerPort, webServerUrl);
  432. }
  433. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  434. public bool InitMeas(MeasureFile a_measureFile)
  435. {
  436. log.Info("进入初始化函数");
  437. m_measureFile = a_measureFile;
  438. List<CutHole> listHoles = m_measureFile.ListCutHole;
  439. foreach (CutHole h in listHoles)
  440. {
  441. if (h.SWITCH == true)
  442. {
  443. m_cutHoles.Add(h);
  444. }
  445. }
  446. if (m_cutHoles.Count == 0)
  447. return false;
  448. if (MParam.EDS == true)
  449. {
  450. log.Info("进行能谱分析,初始化Xray数据库", true);
  451. Init_MeasDB();
  452. }
  453. return true;
  454. }
  455. //给前台UI发送消息步骤
  456. public void SendMsg(string step_code)
  457. {
  458. arg.Step_Code = step_code;
  459. arg.Time = DateTime.Now;
  460. SendThreadStatus(this, arg);
  461. }
  462. //给前台UI发送孔状态信息
  463. public void SendCutHoleMsg(string a_state, string a_holeName)
  464. {
  465. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  466. arg.HoleName = a_holeName;
  467. arg.State = a_state;
  468. SendCutHolesStatus(this, arg);
  469. }
  470. //测量流程
  471. public void DoMeasure()
  472. {
  473. //创建线程的测量状态的更新
  474. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  475. //检查硬件连接是否正常
  476. log.Warn("测量线程:开始连接硬件...", true);
  477. if (!ConnectHardware())
  478. {
  479. MessageBox.Show("连接电镜失败!", "重要错误", MessageBoxButtons.OK, MessageBoxIcon.Error);
  480. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  481. log.Error("测量线程报错:连接硬件硬件连接失败", false);
  482. return;
  483. }
  484. //设置工作文件夹
  485. SetWorkingFolderStr();
  486. //设置SmartSEM远程路径
  487. iSEM.SetRemoteELYPath(RemoteELYPath);
  488. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  489. //增加EDS控制
  490. //将停止键复位
  491. key_stop = false;
  492. //开始测量就将模式设置为SEM
  493. log.Info("测量线程:开始切换到SEM模式", true);
  494. if (!iSEM.CmdFIBModeSEM())
  495. {
  496. log.Error("测量线程报错:开始切换到SEM模式失败。", false);
  497. return;
  498. }
  499. arg.Picture_Information.Work_Status = "SEM";
  500. //设置扫描周期
  501. log.Info("测量线程:设置电镜图像扫描周期为对焦接口程序适合的扫描周期", true);
  502. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  503. Thread.Sleep(200);
  504. cycle_time = iSEM.GetCycleTime();
  505. if (cycle_time == 0)
  506. {
  507. log.Error("测量线程报错:获取扫描周期时间失败", false);
  508. return;
  509. }
  510. Thread.Sleep((int)cycle_time + 100);
  511. //开始做各个孔的检测
  512. for (int i = 0; i < m_cutHoles.Count; i++)
  513. {
  514. //自动亮度对比度
  515. log.Info("测量线程:开启自动亮度,对比度调节", true);
  516. iSEM.SetAutoBright(100);
  517. Thread.Sleep(200);
  518. iSEM.SetAutoContrast(100);
  519. Thread.Sleep(200);
  520. //log.Info("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  521. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  522. {
  523. log.Error("测量线程报错:开始设置自动亮度、对比度失败。", false);
  524. return;
  525. }
  526. Thread.Sleep(5000);
  527. log.Warn("测量线程:测试第" + i.ToString() + "个分析点。", true);
  528. //记录测量序号和孔名
  529. m_nWorkHoleNo = i;
  530. arg.HoleName = m_cutHoles[i].HoleName;
  531. //最终数据存放目录
  532. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  533. //对焦数据存放目录
  534. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  535. MParam.AutoFocus.Path = focus_path;
  536. if (!Directory.Exists(focus_path))
  537. {
  538. Directory.CreateDirectory(focus_path);
  539. }
  540. //StigX数据存放目录
  541. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  542. MParam.AutoStigX.Path = StigX_path;
  543. if (!Directory.Exists(StigX_path))
  544. {
  545. Directory.CreateDirectory(StigX_path);
  546. }
  547. //StigY数据存放目录
  548. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  549. MParam.AutoStigY.Path = StigY_path;
  550. if (!Directory.Exists(StigY_path))
  551. {
  552. Directory.CreateDirectory(StigY_path);
  553. }
  554. //EDS数据存放路径
  555. if (MParam.EDS == true)
  556. {
  557. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  558. MParam.EDSParam.Path = EDS_path;
  559. if (!Directory.Exists(EDS_path))
  560. {
  561. Directory.CreateDirectory(EDS_path);
  562. }
  563. }
  564. //判断孔状态
  565. if (m_cutHoles[i].STATE != State.Ready)
  566. {
  567. log.Warn("测试孔" + m_cutHoles[i].HoleName + "状态非就绪,不予测量。", true);
  568. continue;
  569. }
  570. //20201127增加Scanrotate Off
  571. iSEM.SetScanRotationOff();
  572. Thread.Sleep(200);
  573. //20.光束等复位
  574. iSEM.SetBeamShiftX(0);
  575. Thread.Sleep(200);
  576. iSEM.SetBeamShiftY(0);
  577. Thread.Sleep(200);
  578. //开始循环工作
  579. if (i == 0)
  580. {
  581. log.Warn("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  582. m_cutHoles[i].START = DateTime.Now;
  583. //切孔操作-开始
  584. m_cutHoles[i].STATE = State.InProcess;
  585. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  586. log.Warn("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  587. + m_cutHoles[0].Position.X.ToString() + ","
  588. + m_cutHoles[0].Position.Y.ToString() + ","
  589. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  590. #region 坐标恢复
  591. //0、先移动Z轴到比较低的位置上。
  592. if (MParam.Tilt)//如果是倾斜样品台,移动Z轴
  593. {
  594. if (!iSEM.SetStageGotoZ(fSateyZ))
  595. {
  596. arg.State = false;
  597. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  598. SendMsg("0-0");
  599. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  600. m_cutHoles[i].STATE = State.Failed;
  601. m_cutHoles[i].END = DateTime.Now;
  602. m_measureFile.Save();
  603. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  604. Thread.Sleep(3000);
  605. continue;
  606. }
  607. while (true)
  608. {
  609. Thread.Sleep(4000);
  610. if (iSEM.GetStageIs() == 0)
  611. {
  612. break;
  613. }
  614. }
  615. //判断是否停止进程
  616. if (key_stop)
  617. {
  618. m_cutHoles[i].STATE = State.Failed;
  619. m_cutHoles[i].END = DateTime.Now;
  620. m_measureFile.Save();
  621. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  622. log.Info("停止键被按下", true);
  623. return;
  624. }
  625. }
  626. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  627. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  628. {
  629. arg.State = false;
  630. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  631. SendMsg("0-0");
  632. log.Error("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  633. m_cutHoles[i].STATE = State.Failed;
  634. m_cutHoles[i].END = DateTime.Now;
  635. m_measureFile.Save();
  636. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  637. Thread.Sleep(3000);
  638. continue;
  639. }
  640. while (true)
  641. {
  642. Thread.Sleep(4000);
  643. if (iSEM.GetStageIs() == 0)
  644. {
  645. break;
  646. }
  647. }
  648. //判断是否停止进程
  649. if (key_stop)
  650. {
  651. m_cutHoles[i].STATE = State.Failed;
  652. m_cutHoles[i].END = DateTime.Now;
  653. m_measureFile.Save();
  654. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  655. log.Info("停止键被按下", true);
  656. return;
  657. }
  658. //2、移动XY轴
  659. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  660. {
  661. arg.State = false;
  662. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  663. SendMsg("0-0");
  664. log.Error("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  665. + m_cutHoles[0].Position.X.ToString() + ","
  666. + m_cutHoles[0].Position.Y.ToString() + ")", false);
  667. m_cutHoles[i].STATE = State.Failed;
  668. m_cutHoles[i].END = DateTime.Now;
  669. m_measureFile.Save();
  670. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  671. Thread.Sleep(3000);
  672. continue;
  673. }
  674. while (true)
  675. {
  676. Thread.Sleep(4000);
  677. if (iSEM.GetStageIs() == 0)
  678. {
  679. break;
  680. }
  681. }
  682. //判断是否停止进程
  683. if (key_stop)
  684. {
  685. m_cutHoles[i].STATE = State.Failed;
  686. m_cutHoles[i].END = DateTime.Now;
  687. m_measureFile.Save();
  688. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  689. log.Info("停止键被按下", true);
  690. return;
  691. }
  692. //3、恢复Z轴
  693. if (MParam.Tilt)
  694. {
  695. //恢复Z轴
  696. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  697. {
  698. arg.State = false;
  699. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  700. SendMsg("0-0");
  701. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  702. m_cutHoles[i].STATE = State.Failed;
  703. m_cutHoles[i].END = DateTime.Now;
  704. m_measureFile.Save();
  705. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  706. Thread.Sleep(3000);
  707. continue;
  708. }
  709. while (true)
  710. {
  711. Thread.Sleep(4000);
  712. if (iSEM.GetStageIs() == 0)
  713. {
  714. break;
  715. }
  716. }
  717. //判断是否停止进程
  718. if (key_stop)
  719. {
  720. log.Info("停止键按下。", true);
  721. m_cutHoles[i].STATE = State.Failed;
  722. m_cutHoles[i].END = DateTime.Now;
  723. m_measureFile.Save();
  724. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  725. return;
  726. }
  727. }
  728. arg.State = true;
  729. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  730. SendMsg("0-0");
  731. //4、设置WD
  732. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  733. Thread.Sleep(1000);
  734. #endregion
  735. //第一个点开始测量
  736. if (FirstHole())
  737. {
  738. //保存文件,将测量状态更改
  739. m_cutHoles[i].STATE = State.Success;
  740. m_cutHoles[i].END = DateTime.Now;
  741. m_measureFile.Save();
  742. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  743. }
  744. //失败
  745. else
  746. {
  747. m_cutHoles[i].STATE = State.Failed;
  748. m_cutHoles[i].END = DateTime.Now;
  749. m_measureFile.Save();
  750. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  751. }
  752. }
  753. else
  754. {
  755. //其他孔的测量
  756. log.Info("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  757. m_cutHoles[i].START = DateTime.Now;
  758. m_cutHoles[i].STATE = State.InProcess;
  759. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  760. //其他孔测量之前的初始化
  761. if (!OtherHole_Init())
  762. {
  763. arg.State = false;
  764. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  765. SendMsg("0-0");
  766. Thread.Sleep(3000);
  767. log.Info("测量线程:" + arg.Message, true);
  768. continue;
  769. }
  770. arg.State = true;
  771. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  772. SendMsg("0-0");
  773. //其他孔开始测量
  774. if (OtherHole())
  775. {
  776. //保存文件,将测量状态更改
  777. m_cutHoles[i].STATE = State.Success;
  778. m_cutHoles[i].END = DateTime.Now;
  779. m_measureFile.Save();
  780. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  781. }
  782. //失败
  783. else
  784. {
  785. m_cutHoles[i].STATE = State.Failed;
  786. m_cutHoles[i].END = DateTime.Now;
  787. m_measureFile.Save();
  788. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  789. }
  790. }
  791. if (key_stop)
  792. {
  793. m_cutHoles[i].END = DateTime.Now;
  794. m_cutHoles[i].STATE = State.Ready;
  795. m_measureFile.Save();
  796. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  797. arg.Message = "用户停止测量";
  798. SendMsg("0-0");
  799. break;
  800. }
  801. //两个点之间更换,加延时以便完成显示
  802. Thread.Sleep(3000);
  803. }
  804. }
  805. //检查硬件连接是否正常
  806. public bool ConnectHardware()
  807. {
  808. //返回硬件的连接状态
  809. return iSEM.ConnectStatus();
  810. }
  811. //设置工作文件夹
  812. public bool SetWorkingFolderStr()
  813. {
  814. WorkingFolder = m_measureFile.FilePath;
  815. return true;
  816. }
  817. //插入PT针
  818. public bool InsertPT()
  819. {
  820. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  821. //SendMsg("调用宏插入PT针宏文件" + fn);
  822. iSEM.CMDMCFFilename(fn);
  823. //延时1s??
  824. Thread.Sleep(1000);
  825. return true;
  826. }
  827. //撤出PT针
  828. public bool RetractPT()
  829. {
  830. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  831. //SendMsg("调用宏撤出PT针宏文件" + fn);
  832. iSEM.CMDMCFFilename(fn);
  833. //延时1s??
  834. Thread.Sleep(1000);
  835. return true;
  836. }
  837. //PT沉积
  838. public bool PTWork()
  839. {
  840. //执行PT沉积的ELY文件
  841. if (!ExcuteEly(MParam.PTTemp))
  842. {
  843. return false;
  844. }
  845. //等待沉积完成
  846. while (true)
  847. {
  848. Thread.Sleep(7000);
  849. if (iSEM.GetFIBMode() == 0)
  850. {
  851. break;
  852. }
  853. }
  854. return true;
  855. }
  856. //FIB切割
  857. public bool FIBWork()
  858. {
  859. //执行PT沉积的ELY文件
  860. if (!ExcuteEly(MParam.FIBTemp))
  861. {
  862. return false;
  863. }
  864. //等待切割完成
  865. while (true)
  866. {
  867. Thread.Sleep(10000);
  868. if (iSEM.GetFIBMode() == 0)
  869. {
  870. break;
  871. }
  872. }
  873. return true;
  874. }
  875. //执行ELY文件的步骤
  876. public bool ExcuteEly(string a_filename)
  877. {
  878. //执行ELy文件有三个动作
  879. //1. 选择ELY文件
  880. //SendMsg("选择ELY文件");
  881. if (!iSEM.CmdFIBLoadELY(a_filename))
  882. {
  883. //SendMsg("选择ELY文件失败");
  884. return false;
  885. }
  886. Thread.Sleep(1000);
  887. //2. 确认ELY文件
  888. //SendMsg("确认ELY文件");
  889. if (!iSEM.CmdFIBEXPOSUREELY())
  890. {
  891. //SendMsg("确认ELY文件失败");
  892. return false;
  893. }
  894. Thread.Sleep(1000);
  895. //3. 执行ELY文件
  896. //SendMsg("执行ELY文件");
  897. if (!iSEM.CmdFIBSTARTELY())
  898. {
  899. //SendMsg("执行ELY文件失败");
  900. return false;
  901. }
  902. Thread.Sleep(1000);
  903. return true;
  904. }
  905. /// <summary>
  906. ///13. 自动 定位功能,沉积
  907. /// </summary>
  908. /// <returns></returns>
  909. public bool GetPoistion()
  910. {
  911. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  912. int state = 1;
  913. log.Info("测量线程:13.自动定位、沉积-功能自动定位电压" + MParam.Location_Voltage.ToString() + "自动定位放大倍数" + MParam.Location_Magnification.ToString(), true);
  914. Thread.Sleep(200);
  915. //1.控制SEM放大600X
  916. if (!iSEM.SetSEMVoltage(MParam.Location_Voltage))
  917. {
  918. arg.Message = "电压设置" + MParam.Location_Voltage.ToString("0.0") + "失败";
  919. arg.State = false;
  920. SendMsg("2-0");
  921. log.Error("测量线程报错:13.自动定位、沉积-自动定位电压" + MParam.Location_Voltage.ToString() + "控制失败", false);
  922. return false;
  923. }
  924. Thread.Sleep(200);
  925. if (!iSEM.SetMagnification(MParam.Location_Magnification))
  926. {
  927. arg.Message = "放大" + MParam.Location_Magnification.ToString("0.0") + "倍失败";
  928. arg.State = false;
  929. SendMsg("2-0");
  930. log.Error("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + MParam.Location_Magnification.ToString() + "控制失败", false);
  931. return false;
  932. }
  933. float current = iSEM.GetMagnification();
  934. while (Math.Abs(current - MParam.Location_Magnification) > 1)
  935. {
  936. iSEM.SetMagnification(MParam.Location_Magnification);
  937. Thread.Sleep(200);
  938. current = iSEM.GetMagnification();
  939. }
  940. arg.State = true;
  941. arg.Message = "放大" + MParam.Location_Magnification.ToString("0.0") + "倍成功";
  942. SendMsg("2-0");
  943. //判断是否停止进程
  944. if (key_stop)
  945. {
  946. log.Info("停止键按下。", true);
  947. return false;
  948. }
  949. //判断是否为仅拍照,不是则执行FIB操作
  950. if (!MParam.Is_Photograph)
  951. {
  952. log.Info("测量线程:切换到FIB模式。", true);
  953. //6.设置FIB拍照参数——扫描时间、束流等
  954. //7.控制FIB自动亮度、对比度
  955. Thread.Sleep(200);
  956. if (!iSEM.CmdFIBModeFIB())
  957. {
  958. arg.Message = "FIB模式切换失败";
  959. arg.State = false;
  960. SendMsg("2-1");
  961. log.Error("测量线程报错:切换到FIB模式失败。", false);
  962. return false;
  963. }
  964. arg.State = true;
  965. arg.Picture_Information.Work_Status = "FIB";
  966. arg.Message = "FIB模式切换成功";
  967. SendMsg("2-1");
  968. Thread.Sleep(1000);
  969. //判断是否停止进程
  970. if (key_stop)
  971. {
  972. log.Info("停止键按下。", true);
  973. return false;
  974. }
  975. //8.控制FIB拍照
  976. //9.保存照片======更改路径
  977. //20201103,FIB使用定位的放大倍数
  978. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  979. arg.Picture_Information.Picture_FullPath = fileName2;
  980. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  981. Thread.Sleep(200);
  982. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  983. Thread.Sleep(200);
  984. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  985. Thread.Sleep(200);
  986. //FIB的放大位数,将来会改
  987. log.Info("测量线程:设置FIB放大倍数" + MParam.Location_Magnification.ToString(), true);
  988. //20201103,FIB使用定位的放大倍数
  989. if (!iSEM.SetFIBMagnification(MParam.Location_Magnification))
  990. {
  991. arg.Message = "FIB放大倍数设置失败";
  992. arg.State = false;
  993. SendMsg("2-2");
  994. log.Error("测量线程失败:FIB放大倍数设置失败。", false);
  995. return false;
  996. }
  997. arg.Message = "FIB放大倍数设置成功";
  998. arg.State = true;
  999. SendMsg("2-2");
  1000. Thread.Sleep(200);
  1001. //判断是否停止进程
  1002. if (key_stop)
  1003. {
  1004. log.Info("停止键按下。", true);
  1005. return false;
  1006. }
  1007. //4、设置WD
  1008. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1009. Thread.Sleep(1000);
  1010. //20201127增加自动亮度对比度
  1011. if (MParam.FIBDo)
  1012. {
  1013. if (MParam.FIBAutoBC)
  1014. {
  1015. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1016. float m_TempBrightness = 50.0f;
  1017. float m_TempContrast = 30.0f;
  1018. if (MParam.SampleName == "3" || MParam.SampleName == "1")
  1019. {
  1020. m_TempBrightness = 50.0f;
  1021. m_TempContrast = 30.0f;
  1022. iSEM.SetAutoVideoOff();
  1023. Thread.Sleep(200);
  1024. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1025. Thread.Sleep(200);
  1026. iSEM.SetContrast(m_TempContrast); //30.0f
  1027. Thread.Sleep(200);
  1028. }
  1029. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1030. {
  1031. iSEM.SetAutoVideoBrightnessAndContrast();
  1032. //20201128陈工建议增加
  1033. Thread.Sleep(200);
  1034. iSEM.SetAutoBright(100);
  1035. Thread.Sleep(200);
  1036. iSEM.SetAutoContrast(100);
  1037. Thread.Sleep(5000);
  1038. }
  1039. }
  1040. else
  1041. {
  1042. iSEM.SetAutoVideoOff();
  1043. Thread.Sleep(200);
  1044. iSEM.SetBrightness(MParam.FIBB);
  1045. Thread.Sleep(200);
  1046. iSEM.SetContrast(MParam.FIBC);
  1047. Thread.Sleep(200);
  1048. }
  1049. }
  1050. //拍照前改变速度,延时
  1051. iSEM.CloseReduced();
  1052. Thread.Sleep(200);
  1053. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1054. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1055. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1056. Thread.Sleep(200);
  1057. cycle_time = iSEM.GetCycleTime();
  1058. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1059. if (!GetImage(fileName2))
  1060. {
  1061. arg.Message = "FIB拍照失败";
  1062. arg.State = false;
  1063. SendMsg("2-3");
  1064. log.Error("测量线程报错:FIB拍照失败。", false);
  1065. return false;
  1066. }
  1067. arg.State = true;
  1068. arg.Picture_Information.Picture_FullPath = fileName2;
  1069. arg.Message = "FIB拍照成功";
  1070. SendMsg("2-3");
  1071. Thread.Sleep(200);
  1072. //SendMsg("1-16");
  1073. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1074. Thread.Sleep(200);
  1075. cycle_time = iSEM.GetCycleTime();
  1076. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1077. //判断是否停止进程
  1078. if (key_stop)
  1079. {
  1080. log.Info("停止键按下。", true);
  1081. return false;
  1082. }
  1083. iSEM.CmdFIBModeSEM();
  1084. Thread.Sleep(200);
  1085. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1086. log.Info("测量线程:调用图像处理接口,准备移动样品台", true);
  1087. log.Info("文件名=" + fileName2, true);
  1088. log.Info("样品类型=" + MParam.SampleName, true);
  1089. log.Info("供应商名称=" + MParam.Firm, true);
  1090. ImagePro.Img_Cut_Position(fileName2, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1091. log.Info("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString() + ")", true);
  1092. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1093. if (state == 1)
  1094. {
  1095. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1096. float xc = (x1 + x2) / 2;
  1097. float yc = (y1 + y2) / 2;
  1098. x0 = xc - 512;
  1099. y0 = 384 - yc;
  1100. log.Info("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1101. px = iSEM.GetPixelSize();
  1102. //修改FIB切割的ELY文件坐标
  1103. XmlDocument xmlDoc = new XmlDocument();
  1104. xmlDoc.Load(MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1105. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1106. if (xns != null)
  1107. {
  1108. XmlAttributeCollection attributeCol = xns.Attributes;
  1109. //遍历自己点属性
  1110. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1111. log.Info("XML-Width_a = " + width_a.ToString(), true);
  1112. foreach (XmlAttribute attri in attributeCol)
  1113. {
  1114. if (attri.Name == "x")
  1115. {
  1116. attri.InnerText = ((x0 * px) * 1000000 - width_a).ToString();
  1117. log.Info("XML-TopLeft-X = " + attri.InnerText, true);
  1118. }
  1119. else if (attri.Name == "y")
  1120. {
  1121. attri.InnerText = ((y0 * px) * 1000000 - 2.791).ToString();
  1122. log.Info("XML-TopLeft-Y = " + attri.InnerText, true);
  1123. }
  1124. }
  1125. }
  1126. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1127. if (xns != null)
  1128. {
  1129. XmlAttributeCollection attributeCol = xns.Attributes;
  1130. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1131. //遍历自己点属性
  1132. foreach (XmlAttribute attri in attributeCol)
  1133. {
  1134. if (attri.Name == "x")
  1135. {
  1136. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1137. }
  1138. else if (attri.Name == "y")
  1139. {
  1140. attri.InnerText = (((y0 * px) * 1000000) + 2 - 2.791).ToString();
  1141. }
  1142. }
  1143. }
  1144. xmlDoc.Save(MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1145. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1146. if (MParam.PT)
  1147. {
  1148. xmlDoc = new XmlDocument();
  1149. xmlDoc.Load(MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1150. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1151. if (xns != null)
  1152. {
  1153. XmlAttributeCollection attributeCol = xns.Attributes;
  1154. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1155. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1156. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1157. //遍历自己点属性
  1158. foreach (XmlAttribute attri in attributeCol)
  1159. {
  1160. if (attri.Name == "x")
  1161. {
  1162. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1163. }
  1164. else if (attri.Name == "y")
  1165. {
  1166. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1167. }
  1168. }
  1169. }
  1170. xmlDoc.Save(MParam.PTTemp);
  1171. }
  1172. if (hand_intervene == 1)
  1173. {
  1174. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1175. }
  1176. }
  1177. else
  1178. {
  1179. arg.Message = "图像接口参数state返回值为零";
  1180. arg.State = false;
  1181. //SendMsg("1-12");
  1182. if (hand_intervene == 1)
  1183. {
  1184. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1185. {
  1186. return false;
  1187. }
  1188. }
  1189. else
  1190. {
  1191. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1192. return false;
  1193. }
  1194. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1195. return false;
  1196. }
  1197. //判断是否停止进程
  1198. if (key_stop)
  1199. {
  1200. log.Info("停止键按下", true);
  1201. return false;
  1202. }
  1203. //11.自动工具样品类型参数确定是否需要PT沉积
  1204. if (MParam.PT)
  1205. {
  1206. if (!iSEM.CmdFIBModeFIB())
  1207. {
  1208. log.Error("测量线程报错:切换到SEM模式失败", false);
  1209. return false;
  1210. }
  1211. Thread.Sleep(200);
  1212. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1213. if (MParam.Is_Photograph == false && MParam.PT == true)
  1214. {
  1215. log.Info("测量线程:插入PT针" + arg.Message, true);
  1216. if (!InsertPT())
  1217. {
  1218. arg.Message = "插入PT针失败";
  1219. arg.State = false;
  1220. SendMsg("2-4");
  1221. log.Error("测量线程报错:" + arg.Message, false);
  1222. return false;
  1223. }
  1224. arg.State = true;
  1225. arg.Message = "插入PT针成功";
  1226. SendMsg("2-4");
  1227. }
  1228. //判断是否停止进程
  1229. if (key_stop)
  1230. {
  1231. log.Info("停止键按下", true);
  1232. return false;
  1233. }
  1234. //3. 根据坐标进行PT沉积
  1235. if (!PTWork())
  1236. {
  1237. arg.Message = "PT沉积失败";
  1238. arg.State = false;
  1239. SendMsg("2-5");
  1240. log.Error("测量线程报错:" + arg.Message, false);
  1241. return false;
  1242. }
  1243. arg.State = true;
  1244. arg.Message = "PT沉积成功";
  1245. SendMsg("2-5");
  1246. //判断是否停止进程
  1247. if (key_stop)
  1248. {
  1249. log.Info("停止键按下", true);
  1250. return false;
  1251. }
  1252. //15.根据样品类型决定是否撤出PT针
  1253. if (MParam.Is_Photograph == false && MParam.PT == true)
  1254. {
  1255. if (!RetractPT())
  1256. {
  1257. arg.Message = "撤出PT针失败";
  1258. arg.State = false;
  1259. SendMsg("2-6");
  1260. log.Error("测量线程报错:" + arg.Message, false);
  1261. return false;
  1262. }
  1263. arg.State = true;
  1264. arg.Message = "撤出PT针成功";
  1265. SendMsg("2-6");
  1266. }
  1267. //判断是否停止进程
  1268. if (key_stop)
  1269. {
  1270. log.Info("停止键按下", true);
  1271. return false;
  1272. }
  1273. if (!iSEM.CmdFIBModeSEM())
  1274. {
  1275. //arg.Message = "切割前SEM拍照失败。";
  1276. //arg.State = false;
  1277. //SendMsg("1-17");
  1278. log.Error("测量线程报错:切换到SEM模式失败", false);
  1279. return false;
  1280. }
  1281. }
  1282. }
  1283. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1284. float[] firstPosition = iSEM.GetStagePosition();
  1285. m_cutHoles[0].Position.X = firstPosition[0];
  1286. m_cutHoles[0].Position.Y = firstPosition[1];
  1287. m_cutHoles[0].Position.Z = firstPosition[2];
  1288. m_cutHoles[0].Position.T = firstPosition[3];
  1289. m_cutHoles[0].Position.R = firstPosition[4];
  1290. m_cutHoles[0].Position.M = firstPosition[5];
  1291. //这里要调用文件保存功能
  1292. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1293. + firstPosition[1].ToString() + ","
  1294. + firstPosition[2].ToString() + ","
  1295. + firstPosition[3].ToString() + ","
  1296. + firstPosition[4].ToString() + ","
  1297. + firstPosition[5].ToString() + ")";
  1298. arg.State = true;
  1299. //SendMsg("1-16");
  1300. //判断是否停止进程
  1301. if (key_stop)
  1302. {
  1303. log.Info("停止键按下", true);
  1304. return false;
  1305. }
  1306. return true;
  1307. }
  1308. /// <summary>
  1309. /// 14. FIB切割
  1310. /// </summary>
  1311. /// <returns></returns>
  1312. public bool FIBCross()
  1313. {
  1314. int state = 0;
  1315. if (!iSEM.CmdFIBModeFIB())
  1316. {
  1317. arg.Message = "切换到FIB模式失败。";
  1318. arg.State = false;
  1319. SendMsg("2-7");
  1320. log.Error("测量线程报错:切换到SEM模式失败", false);
  1321. return false;
  1322. }
  1323. arg.Message = "切换到FIB模式成功。";
  1324. arg.State = true;
  1325. SendMsg("2-7");
  1326. Thread.Sleep(1000);
  1327. iSEM.SetMagnification(MParam.Location_Magnification);
  1328. float current = iSEM.GetMagnification();
  1329. while (Math.Abs(current - MParam.Location_Magnification) > 1)
  1330. {
  1331. iSEM.SetMagnification(MParam.Location_Magnification);
  1332. Thread.Sleep(200);
  1333. current = iSEM.GetMagnification();
  1334. }
  1335. Thread.Sleep(2000);
  1336. //14.自动控制FIB切割
  1337. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1338. //2.控制FIB进行切割
  1339. //以上1、2步全部用ELY文件代替
  1340. if (!FIBWork())
  1341. {
  1342. arg.Message = "FIB切割失败";
  1343. arg.State = false;
  1344. SendMsg("2-8");
  1345. log.Error("测量线程报错:" + arg.Message, false);
  1346. return false;
  1347. }
  1348. arg.State = true;
  1349. arg.Message = "FIB切割成功";
  1350. SendMsg("2-8");
  1351. Thread.Sleep(300);
  1352. //判断是否停止进程
  1353. if (key_stop)
  1354. {
  1355. log.Info("停止键按下", true);
  1356. return false;
  1357. }
  1358. //做切割后SEM的拍照
  1359. log.Info("测量线程:切割后SEM拍照", true);
  1360. if (!iSEM.CmdFIBModeSEM())
  1361. {
  1362. log.Error("测量线程报错:切换到SEM模式失败", false);
  1363. return false;
  1364. }
  1365. Thread.Sleep(1000);
  1366. return true;
  1367. }
  1368. /// <summary>
  1369. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1370. /// </summary>
  1371. /// <returns></returns>
  1372. public bool FindCross()
  1373. {
  1374. float x2 = 0, y2 = 0;
  1375. int state = 0;
  1376. //切换到SEM模式
  1377. if (!iSEM.CmdFIBModeSEM())
  1378. {
  1379. arg.Message = "SEM模式切换失败";
  1380. arg.State = false;
  1381. SendMsg("3-0");
  1382. log.Error("测量线程报错:" + arg.Message, false);
  1383. return false;
  1384. }
  1385. arg.State = true;
  1386. arg.Message = "SEM模式切换成功";
  1387. SendMsg("3-0");
  1388. arg.Picture_Information.Work_Status = "SEM";
  1389. Thread.Sleep(1000);
  1390. //判断是否停止进程
  1391. if (key_stop)
  1392. {
  1393. log.Info("停止键按下", true);
  1394. return false;
  1395. }
  1396. //1.控制SEM放大到300倍
  1397. log.Info("能谱电压设置:" + MParam.Location_Voltage.ToString("0.0"));
  1398. if (!iSEM.SetSEMVoltage(MParam.Location_Voltage))
  1399. {
  1400. arg.Message = "电压设置" + MParam.Location_Voltage.ToString("0.0") + "失败";
  1401. arg.State = false;
  1402. SendMsg("3-1");
  1403. log.Error("测量线程报错:" + arg.Message, false);
  1404. return false;
  1405. }
  1406. Thread.Sleep(200);
  1407. //iSEM.SetAutoVideoBrightnessAndContrast();
  1408. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1409. float m_TempBrightness = 50.0f;
  1410. float m_TempContrast = 30.0f;
  1411. if (MParam.SampleName == "3")
  1412. {
  1413. m_TempBrightness = 48.0f;
  1414. m_TempContrast = 29.0f;
  1415. }
  1416. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1417. iSEM.SetAutoVideoOff();
  1418. Thread.Sleep(200);
  1419. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1420. Thread.Sleep(200);
  1421. iSEM.SetContrast(m_TempContrast); //30.0f
  1422. Thread.Sleep(2000);
  1423. float mag = MParam.Location_Magnification / 3;
  1424. if (mag < 200)
  1425. {
  1426. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1427. if (MParam.SampleName == "3")
  1428. mag = 400;
  1429. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1430. mag = 200;
  1431. }
  1432. if (!iSEM.SetMagnification(mag))
  1433. {
  1434. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1435. arg.State = false;
  1436. SendMsg("3-1");
  1437. log.Error("测量线程报错:" + arg.Message, false);
  1438. return false;
  1439. }
  1440. Thread.Sleep(200);
  1441. float current = iSEM.GetMagnification();
  1442. Thread.Sleep(200);
  1443. while (Math.Abs(current - mag) > 2)
  1444. {
  1445. iSEM.SetMagnification(mag);
  1446. Thread.Sleep(200);
  1447. current = iSEM.GetMagnification();
  1448. Thread.Sleep(200);
  1449. }
  1450. arg.State = true;
  1451. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1452. SendMsg("3-1");
  1453. Thread.Sleep(2000);
  1454. //判断是否停止进程
  1455. if (key_stop)
  1456. {
  1457. log.Info("停止键按下", true);
  1458. return false;
  1459. }
  1460. //3.控制SEM拍照
  1461. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1462. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1463. String fileName4 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName4;
  1464. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1465. log.Info("fileName4====================" + fileName4, true);
  1466. arg.Picture_Information.Picture_FullPath = fileName4;
  1467. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1468. Thread.Sleep(200);
  1469. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1470. Thread.Sleep(200);
  1471. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1472. Thread.Sleep(200);
  1473. //拍照前改变速度,延时
  1474. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1475. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1476. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1477. Thread.Sleep(200);
  1478. cycle_time = iSEM.GetCycleTime();
  1479. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1480. if (!GetImage(fileName4))
  1481. {
  1482. arg.State = false;
  1483. arg.Message = "SEM拍照找切割位置失败";
  1484. SendMsg("3-2");
  1485. log.Error("测量线程报错:" + arg.Message, false);
  1486. return false;
  1487. }
  1488. arg.Picture_Information.Picture_FullPath = fileName4;
  1489. arg.State = true;
  1490. arg.Message = "SEM拍照成功";
  1491. SendMsg("3-2");
  1492. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1493. Thread.Sleep(200);
  1494. cycle_time = iSEM.GetCycleTime();
  1495. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1496. //判断是否停止进程
  1497. if (key_stop)
  1498. {
  1499. return false;
  1500. }
  1501. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1502. //5.根据坐标控制SEM移动到切孔位置,居中
  1503. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  1504. log.Info("文件名=" + fileName4, true);
  1505. ImagePro.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x2, out y2, out state);
  1506. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1507. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1508. if (state == 1)
  1509. {
  1510. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1511. if (!MoveToPixByMoveStage(x2, y2))
  1512. {
  1513. arg.State = false;
  1514. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1515. SendMsg("3-3");
  1516. log.Error("测量线程报错:" + arg.Message, false);
  1517. return false;
  1518. }
  1519. //判断是否移动完成
  1520. while (true)
  1521. {
  1522. Thread.Sleep(4000);
  1523. if (iSEM.GetStageIs() == 0)
  1524. {
  1525. break;
  1526. }
  1527. }
  1528. arg.State = true;
  1529. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1530. SendMsg("3-3");
  1531. //高倍到低倍不进行对焦
  1532. //拍照前改变速度,延时
  1533. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1534. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1535. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1536. Thread.Sleep(200);
  1537. cycle_time = iSEM.GetCycleTime();
  1538. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1539. //String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1540. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1541. String fileName10 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName10;
  1542. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1543. log.Info("fileName10====================" + fileName10, true);
  1544. if (!GetImage(fileName10))
  1545. {
  1546. log.Error("测量线程报错:找到已切割的位置拍照失败", false);
  1547. }
  1548. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1549. Thread.Sleep(200);
  1550. cycle_time = iSEM.GetCycleTime();
  1551. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1552. if (hand_intervene == 1)
  1553. {
  1554. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1555. }
  1556. }
  1557. else
  1558. {
  1559. arg.Message = "图像接口参数state返回值为零";
  1560. arg.State = false;
  1561. SendMsg("3-3");
  1562. if (hand_intervene == 1)
  1563. {
  1564. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1565. {
  1566. return false;
  1567. }
  1568. }
  1569. else
  1570. {
  1571. return false;
  1572. }
  1573. log.Error("测量线程报错:" + arg.Message, false);
  1574. return false;
  1575. }
  1576. //判断是否停止进程
  1577. if (key_stop)
  1578. {
  1579. log.Info("停止键按下", true);
  1580. return false;
  1581. }
  1582. return true;
  1583. }
  1584. /// <summary>
  1585. /// 17.自动控制SEM拍截面照
  1586. /// </summary>
  1587. /// <returns></returns>
  1588. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1589. {
  1590. int state = 0;
  1591. #region 设置拍照的电压
  1592. log.Info("测量线程:设置拍照电压" + MParam.Photograph_Voltage.ToString(), true);
  1593. //1、放大倍数参数photograph_
  1594. if (!iSEM.SetSEMVoltage(MParam.Photograph_Voltage))
  1595. {
  1596. arg.Message = "电压设置" + MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1597. arg.State = false;
  1598. SendMsg("3-4");
  1599. log.Error("测量线程报错:" + arg.Message, false);
  1600. return false;
  1601. }
  1602. //add
  1603. #endregion
  1604. Thread.Sleep(200);
  1605. #region 设置拍照的放大倍数
  1606. log.Info("测量线程:设置拍照放大倍数====" + MParam.Photograph_Magnification.ToString(), true);
  1607. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  1608. {
  1609. arg.Message = "放大倍数调整失败";
  1610. arg.State = false;
  1611. SendMsg("3-4");
  1612. log.Error("测量线程报错:" + arg.Message, false);
  1613. return false;
  1614. }
  1615. float set = MParam.Photograph_Magnification;
  1616. float current = iSEM.GetMagnification();
  1617. while (Math.Abs(current - set) > 1)
  1618. {
  1619. iSEM.SetMagnification(MParam.Photograph_Magnification);
  1620. Thread.Sleep(200);
  1621. current = iSEM.GetMagnification();
  1622. }
  1623. arg.Message = "放大" + MParam.Photograph_Magnification.ToString() + "成功";
  1624. arg.State = true;
  1625. SendMsg("3-4");
  1626. Thread.Sleep(3000 + (Int32)cycle_time);
  1627. //判断是否停止进程
  1628. if (key_stop)
  1629. {
  1630. log.Info("停止键按下", true);
  1631. return false;
  1632. }
  1633. #endregion
  1634. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1635. //2.控制SEM自动对焦、亮度、对比度-接口
  1636. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1637. if ((MParam.SampleName == "2") || (MParam.SampleName == "3"))
  1638. iSEM.SetReduced(402, 128, 600, 600);
  1639. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1640. iSEM.SetReduced(402, 128, 600, 600);
  1641. Thread.Sleep(200);
  1642. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1643. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1644. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1645. Thread.Sleep(200);
  1646. cycle_time = iSEM.GetCycleTime();
  1647. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1648. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1649. if (!iSEM.SetAutoVideoOff())
  1650. {
  1651. log.Error("测量线程报错:关闭自动亮度对比度失败", false);
  1652. return false;
  1653. }
  1654. Thread.Sleep(5000);
  1655. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1656. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1657. if (ImageFocus1(true))
  1658. {
  1659. arg.Message = "自动对焦完成";
  1660. arg.State = true;
  1661. SendMsg("3-5");
  1662. }
  1663. else
  1664. {
  1665. arg.Message = "自动对焦失败";
  1666. arg.State = false;
  1667. SendMsg("3-5");
  1668. log.Error("测量线程报错:" + arg.Message, false);
  1669. return false;
  1670. }
  1671. Thread.Sleep(1000);
  1672. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1673. iSEM.CloseReduced();
  1674. Thread.Sleep(200);
  1675. cycle_time = iSEM.GetCycleTime();
  1676. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1677. //判断是否停止进程
  1678. if (key_stop)
  1679. {
  1680. log.Info("停止键按下", true);
  1681. return false;
  1682. }
  1683. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1684. float m_TempBrightness = 50.0f;
  1685. float m_TempContrast = 30.0f;
  1686. if (MParam.SampleName == "3")
  1687. {
  1688. m_TempBrightness = 50f;
  1689. m_TempContrast = 29f;
  1690. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1691. Thread.Sleep(200);
  1692. iSEM.SetContrast(m_TempContrast); //30.0f
  1693. Thread.Sleep(200);
  1694. }
  1695. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1696. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1697. {
  1698. log.Error("测量线程报错:自动开启亮度对比度失败", false);
  1699. return false;
  1700. }
  1701. Thread.Sleep(5000);
  1702. //3、设置SEM补偿角度
  1703. if (MParam.Is_Photograph == false)
  1704. {
  1705. log.Info("测量线程:角度补偿" + MParam.Correction_Angle.ToString() + "度", true);
  1706. if (!TiltCorrection(MParam.Correction_Angle))
  1707. {
  1708. arg.Message = "设置SEM进行角度补偿" + MParam.Correction_Angle.ToString("0") + "度失败";
  1709. arg.State = false;
  1710. SendMsg("3-6");
  1711. log.Error("测量线程报错:" + arg.Message, false);
  1712. return false;
  1713. }
  1714. arg.State = true;
  1715. arg.Message = "设置SEM进行角度补偿" + MParam.Correction_Angle.ToString("0") + "度成功";
  1716. SendMsg("3-6");
  1717. Thread.Sleep(200);
  1718. //判断是否停止进程
  1719. if (key_stop)
  1720. {
  1721. log.Error("停止键按下", false);
  1722. return false;
  1723. }
  1724. }
  1725. //4、拍照,5、保存照片
  1726. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1727. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1728. String fileName5 = data_path + "\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  1729. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1730. log.Info("fileName5====================" + fileName5, true);
  1731. arg.Picture_Information.Picture_FullPath = fileName5;
  1732. arg.Picture_Information.Work_Status = "SEM";
  1733. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1734. Thread.Sleep(200);
  1735. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1736. Thread.Sleep(200);
  1737. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1738. Thread.Sleep(200);
  1739. //拍照前改变速度,延时
  1740. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1741. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1742. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1743. Thread.Sleep(200);
  1744. cycle_time = iSEM.GetCycleTime();
  1745. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  1746. if (!GetImage(fileName5))
  1747. {
  1748. arg.Message = "SEM拍照失败";
  1749. arg.State = false;
  1750. SendMsg("3-7");
  1751. log.Error("测量线程报错:" + arg.Message, false);
  1752. return false;
  1753. }
  1754. arg.Picture_Information.Picture_FullPath = fileName5;
  1755. arg.State = true;
  1756. arg.Message = "SEM拍照成功";
  1757. SendMsg("3-7");
  1758. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1759. Thread.Sleep(200);
  1760. cycle_time = iSEM.GetCycleTime();
  1761. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1762. //判断是否停止进程
  1763. if (key_stop)
  1764. {
  1765. log.Info("停止键按下", true);
  1766. return false;
  1767. }
  1768. #endregion
  1769. if (MParam.Is_Photograph == false)
  1770. {
  1771. #region 对当前矩形进行旋转校正
  1772. //8,计算切割面区域偏移角度及方向
  1773. float degree = 0;
  1774. int direction = 0;
  1775. ImagePro.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  1776. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1777. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1778. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1779. if (state == 1)
  1780. {
  1781. //梯形角度
  1782. iSEM.SetScanRotationOn();
  1783. Thread.Sleep(200);
  1784. //20201128陈工要求,谭博返回角度*0.7
  1785. iSEM.SetScanRotation(Convert.ToSingle(degree * MParam.ScanRotCor));
  1786. Thread.Sleep(200);
  1787. arg.State = true;
  1788. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1789. SendMsg("3-8");
  1790. if (hand_intervene == 1)
  1791. {
  1792. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1793. }
  1794. }
  1795. else
  1796. {
  1797. arg.Message = "图像接口参数State返回值为零";
  1798. arg.State = false;
  1799. SendMsg("3-8");
  1800. if (hand_intervene == 1)
  1801. {
  1802. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1803. {
  1804. return false;
  1805. }
  1806. }
  1807. else
  1808. {
  1809. //return false;
  1810. }
  1811. log.Error("测量线程报错:" + arg.Message, false);
  1812. }
  1813. //判断是否停止进程
  1814. if (key_stop)
  1815. {
  1816. log.Info("停止键按下", true);
  1817. return false;
  1818. }
  1819. Thread.Sleep(200);
  1820. //12拍照
  1821. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1822. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1823. String fileName6 = data_path + "\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  1824. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1825. log.Info("fileName6====================" + fileName6, true);
  1826. arg.Picture_Information.Picture_FullPath = fileName6;
  1827. arg.Picture_Information.Work_Status = "SEM";
  1828. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1829. Thread.Sleep(200);
  1830. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1831. Thread.Sleep(200);
  1832. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1833. Thread.Sleep(200);
  1834. //拍照前改变速度,延时
  1835. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1836. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1837. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1838. Thread.Sleep(200);
  1839. cycle_time = iSEM.GetCycleTime();
  1840. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1841. if (!GetImage(fileName6))
  1842. {
  1843. arg.Message = "SEM拍照失败";
  1844. arg.State = false;
  1845. SendMsg("3-9");
  1846. log.Error("测量线程报错:" + arg.Message, false);
  1847. return false;
  1848. }
  1849. arg.Picture_Information.Picture_FullPath = fileName6;
  1850. arg.State = true;
  1851. arg.Message = "SEM拍照成功";
  1852. SendMsg("3-9");
  1853. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1854. Thread.Sleep(200);
  1855. cycle_time = iSEM.GetCycleTime();
  1856. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1857. //判断是否停止进程
  1858. if (key_stop)
  1859. {
  1860. log.Info("停止键按下", true);
  1861. return false;
  1862. }
  1863. #endregion
  1864. #region 获取两个位置上及放大倍数
  1865. //计算两个测量区域坐标
  1866. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1867. List<float> mag = new List<float>();
  1868. System.Drawing.Point ct0;
  1869. float mag1, mag2, magMax;
  1870. //log.Info("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1871. ImagePro.Img_Measure_Region_Position(fileName6, Convert.ToInt32(MParam.SampleName), MParam.Firm, out ct, out mag, out ct0, out state);
  1872. string s = "";
  1873. for (int i = 0; i < ct.Count; i++)
  1874. {
  1875. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  1876. + "放大倍数=" + mag[i];
  1877. }
  1878. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  1879. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1880. "输入样品" + Convert.ToInt32(MParam.SampleName) +
  1881. "输入厂商" + MParam.Firm.ToString() +
  1882. s +
  1883. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1884. #endregion
  1885. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1886. {
  1887. arg.State = true;
  1888. arg.Message = "获取位置及放大倍数成功";
  1889. SendMsg("3-10");
  1890. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1891. float xs = iSEM.GetBeamShiftX();
  1892. Thread.Sleep(200);
  1893. float ys = iSEM.GetBeamShiftY();
  1894. Thread.Sleep(200);
  1895. float xpCur = iSEM.GetStageAtX();
  1896. Thread.Sleep(200);
  1897. float ypCur = iSEM.GetStageAtY();
  1898. Thread.Sleep(200);
  1899. log.Info("测量线程:原来的光束偏移量x = " + xs.ToString()
  1900. + "y=" + ys.ToString() + ","
  1901. + "原来样品台的位置x= " + xpCur.ToString()
  1902. + "y=" + ypCur.ToString(), true);
  1903. #endregion
  1904. //找到放大倍数最大值
  1905. magMax = mag[0];
  1906. for (int m = 1; m < mag.Count; m++)
  1907. {
  1908. if (mag[m] > magMax)
  1909. {
  1910. magMax = mag[m];
  1911. }
  1912. }
  1913. #region 移动到梯形左上角
  1914. //20201127将视野移动到梯形左上角位置
  1915. MoveToPix(ct0.X, ct0.Y);
  1916. log.Info("测量线程:移动到对焦点( " + ct0.X.ToString()
  1917. + "," + ct0.Y.ToString() + ")", true);
  1918. //关闭自动亮度对比度
  1919. iSEM.SetAutoVideoOff();
  1920. Thread.Sleep(2000);
  1921. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1922. if (MParam.SampleName == "3")
  1923. {
  1924. m_TempBrightness = 50f;
  1925. m_TempContrast = 29f;
  1926. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1927. Thread.Sleep(200);
  1928. iSEM.SetContrast(m_TempContrast); //30.0f
  1929. Thread.Sleep(200);
  1930. }
  1931. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1932. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  1933. if (MParam.SampleName == "3")
  1934. {
  1935. iSEM.SetReduced(402, 128, 480, 450);
  1936. }
  1937. else
  1938. {
  1939. iSEM.SetReduced(402, 128, 480, 450);
  1940. }
  1941. Thread.Sleep(200);
  1942. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1943. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1944. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1945. Thread.Sleep(200);
  1946. cycle_time = iSEM.GetCycleTime();
  1947. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1948. //放大到6000倍
  1949. iSEM.SetMagnification(magMax / 2);
  1950. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1951. set = magMax / 2;
  1952. current = iSEM.GetMagnification();
  1953. while (Math.Abs(current - set) > 1)
  1954. {
  1955. iSEM.SetMagnification(set);
  1956. Thread.Sleep(200);
  1957. current = iSEM.GetMagnification();
  1958. }
  1959. log.Info("========测量线程:开始自动聚焦 " + set.ToString() + "倍", true);
  1960. if (MParam.SampleName == "3")
  1961. {
  1962. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  1963. iSEM.SetBrightness(50.0f); //50.0f
  1964. Thread.Sleep(200);
  1965. iSEM.SetContrast(30.0f); //30.0f
  1966. Thread.Sleep(200);
  1967. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  1968. }
  1969. //自动对焦
  1970. if (!ImageFocus1(true))
  1971. {
  1972. log.Error("========测量线程:自动聚焦失败!" + set.ToString() + "倍", false);
  1973. return false;
  1974. }
  1975. log.Info("========测量线程:自动聚焦成功!" + set.ToString() + "倍", true);
  1976. Thread.Sleep(1000);
  1977. //放大到10000倍
  1978. iSEM.SetMagnification(magMax);
  1979. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1980. set = magMax;
  1981. current = iSEM.GetMagnification();
  1982. while (Math.Abs(current - set) > 1)
  1983. {
  1984. iSEM.SetMagnification(set);
  1985. Thread.Sleep(200);
  1986. current = iSEM.GetMagnification();
  1987. }
  1988. log.Info("========测量线程:开始自动聚焦 " + set.ToString() + "倍", true);
  1989. //自动对焦
  1990. if (!ImageFocus1(true))
  1991. {
  1992. log.Info("========测量线程:自动聚焦失败!" + set.ToString() + "倍", true);
  1993. return false;
  1994. }
  1995. log.Info("========测量线程:自动聚焦成功!" + set.ToString() + "倍", true);
  1996. Thread.Sleep(1000);
  1997. iSEM.CloseReduced();
  1998. Thread.Sleep(200);
  1999. cycle_time = iSEM.GetCycleTime();
  2000. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2001. #endregion
  2002. #region 循环拍照
  2003. for (int n = 0; n < ct.Count; n++)
  2004. {
  2005. #region 恢复到拍照的状态
  2006. iSEM.SetStageGotoX(xpCur);
  2007. while (true)
  2008. {
  2009. Thread.Sleep(4000);
  2010. if (iSEM.GetStageIs() == 0)
  2011. {
  2012. break;
  2013. }
  2014. }
  2015. iSEM.SetStageGotoY(ypCur);
  2016. while (true)
  2017. {
  2018. Thread.Sleep(4000);
  2019. if (iSEM.GetStageIs() == 0)
  2020. {
  2021. break;
  2022. }
  2023. }
  2024. //恢复原来的放大倍数
  2025. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  2026. {
  2027. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2028. return false;
  2029. }
  2030. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2031. set = MParam.Photograph_Magnification;
  2032. current = iSEM.GetMagnification();
  2033. while (Math.Abs(current - set) > 1)
  2034. {
  2035. iSEM.SetMagnification(set);
  2036. Thread.Sleep(200);
  2037. current = iSEM.GetMagnification();
  2038. }
  2039. //恢复BeamShift的百分比值
  2040. iSEM.SetBeamShiftX(xs);
  2041. Thread.Sleep(200);
  2042. iSEM.SetBeamShiftY(ys);
  2043. Thread.Sleep(200);
  2044. #endregion
  2045. #region 移动到指定点位置
  2046. if (!MoveToPix(ct[n].X, ct[n].Y))
  2047. {
  2048. arg.State = false;
  2049. arg.Message = "移动到第一个点位置失败";
  2050. SendMsg("1-" + (35 + n).ToString());
  2051. //移动到第一个点失败
  2052. log.Error("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2053. }
  2054. log.Info("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2055. + "," + ct[n].Y.ToString() + ")", true);
  2056. #endregion
  2057. #region 如果是第一个点,则1W倍对焦
  2058. if (n == 0)
  2059. {
  2060. log.Info("========测量线程:进入内部观察,不对焦!", true);
  2061. //增亮图像
  2062. iSEM.SetAutoVideoOff();
  2063. Thread.Sleep(200);
  2064. float currentBright = iSEM.GetBrightness();
  2065. Thread.Sleep(200);
  2066. float currentContrast = iSEM.GetContrast();
  2067. Thread.Sleep(200);
  2068. //add by sun 2020-12-17 黄工觉得太亮
  2069. int m_BrightMore = 2;
  2070. int m_ContrastMore = 2;
  2071. if (MParam.SampleName == "3")
  2072. {
  2073. m_BrightMore = 0;
  2074. m_ContrastMore = 0;
  2075. }
  2076. //add by sun 2020-12-17 黄工觉得太亮 end
  2077. iSEM.SetBrightness(currentBright + m_BrightMore);
  2078. Thread.Sleep(200);
  2079. iSEM.SetContrast(currentContrast + m_ContrastMore);
  2080. Thread.Sleep(200);
  2081. }
  2082. #endregion
  2083. #region 拍照
  2084. if (!iSEM.SetMagnification(mag[n]))
  2085. {
  2086. arg.State = false;
  2087. arg.Message = "移动到第一个点位置拍照失败";
  2088. SendMsg("3-11");
  2089. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2090. return false;
  2091. }
  2092. log.Info("========测量线程:移动到第一个点位置拍照完成!", true);
  2093. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2094. set = mag[n];
  2095. current = iSEM.GetMagnification();
  2096. while (Math.Abs(current - set) > 1)
  2097. {
  2098. iSEM.SetMagnification(set);
  2099. Thread.Sleep(200);
  2100. current = iSEM.GetMagnification();
  2101. }
  2102. //获取像素大小
  2103. lsize.Add(iSEM.GetPixelSize());
  2104. Thread.Sleep(200);
  2105. //String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2106. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  2107. String fileName7 = data_path + "\\" + MParam.Firm + "-" + mag[n].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + n.ToString() + "-" + ImageNameTwo_1;
  2108. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  2109. log.Info("fileName7====================" + fileName7, true);
  2110. arg.Picture_Information.Picture_FullPath = fileName7;
  2111. arg.Picture_Information.Work_Status = "SEM";
  2112. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2113. Thread.Sleep(200);
  2114. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2115. Thread.Sleep(200);
  2116. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2117. Thread.Sleep(200);
  2118. //拍照前改变速度,延时
  2119. iSEM.CmdLineScan();
  2120. Thread.Sleep(200);
  2121. cycle_time = iSEM.GetCycleTime();
  2122. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2123. if (!GetImage(fileName7))
  2124. {
  2125. arg.State = false;
  2126. arg.Message = "移动到第一个点位置失败";
  2127. SendMsg("3-11");
  2128. log.Error("测量线程报错:" + arg.Message, false);
  2129. return false;
  2130. }
  2131. log.Info("========测量线程:移动到第一个点位置完成!", true);
  2132. iSEM.CmdPixelScan();
  2133. Thread.Sleep(200);
  2134. limg_path.Add(fileName7);
  2135. arg.Picture_Information.Picture_FullPath = fileName7;
  2136. arg.State = true;
  2137. arg.Message = "移动到第一个点位置拍照成功";
  2138. SendMsg("3-11");
  2139. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2140. Thread.Sleep(200);
  2141. cycle_time = iSEM.GetCycleTime();
  2142. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2143. // add by zjx 在测量图上显示放大倍数和像素大小等信息
  2144. float size = iSEM.GetPixelSize();
  2145. SaveMeasDataPic(fileName7, mag[n], size);
  2146. // add by zjx 在测量图上显示放大倍数和像素大小等信息 end
  2147. #endregion
  2148. }
  2149. #endregion
  2150. if (hand_intervene == 1)
  2151. {
  2152. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2153. }
  2154. }
  2155. else
  2156. {
  2157. if (hand_intervene == 1)
  2158. {
  2159. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2160. {
  2161. // return false;
  2162. }
  2163. }
  2164. else
  2165. {
  2166. //return false;
  2167. }
  2168. arg.State = false;
  2169. arg.Message = "获取位置及放大倍数失败";
  2170. SendMsg("3-10");
  2171. log.Error("测量线程报错:" + arg.Message, false);
  2172. }
  2173. //判断是否停止进程
  2174. if (key_stop)
  2175. {
  2176. log.Info("停止键按下", true);
  2177. return false;
  2178. }
  2179. }
  2180. iSEM.SetTiltAngleOff();
  2181. Thread.Sleep(200);
  2182. iSEM.SetScanRotationOff();
  2183. Thread.Sleep(200);
  2184. iSEM.SetBeamShiftX(0);
  2185. Thread.Sleep(200);
  2186. iSEM.SetBeamShiftY(0);
  2187. Thread.Sleep(200);
  2188. //判断是否停止进程
  2189. if (key_stop)
  2190. {
  2191. return false;
  2192. }
  2193. return true;
  2194. }
  2195. //第一个孔的测试过程
  2196. public bool FirstHole()
  2197. {
  2198. // add by zjx 2020-12-18 为了测试只做能谱部分
  2199. if (MParam.IsonlyEDSForDebug == true)
  2200. {
  2201. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2202. log.Warn("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  2203. if (!SetVoltageAndIPROBE())
  2204. {
  2205. log.Error("测量线程:第一孔=====设置电压电流失败!目前是第 " + MParam.SampleName + " 类!", false);
  2206. return false;
  2207. }
  2208. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2209. //设置拉直的放大倍数
  2210. log.Info("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + MParam.Stretch_Magnification.ToString(), true);
  2211. if (!iSEM.SetMagnification(MParam.Stretch_Magnification))
  2212. {
  2213. log.Error("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + MParam.Stretch_Magnification.ToString(), false);
  2214. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2215. arg.State = false;
  2216. SendMsg("0-1");
  2217. return false;
  2218. }
  2219. float current = iSEM.GetMagnification();
  2220. while (Math.Abs(current - MParam.Stretch_Magnification) > 1)
  2221. {
  2222. iSEM.SetMagnification(MParam.Stretch_Magnification);
  2223. Thread.Sleep(200);
  2224. current = iSEM.GetMagnification();
  2225. }
  2226. arg.Message = "拉直放大倍数设置成功!";
  2227. arg.State = true;
  2228. SendMsg("0-1");
  2229. Thread.Sleep(2000);
  2230. //自动化流程-每个点都需要补偿54度
  2231. if (MParam.Is_Photograph == false)
  2232. {
  2233. log.Info("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2234. if (!TiltCorrection(54.0f))
  2235. {
  2236. log.Error("测量线程报错:倾斜补偿角度为54度失败", false);
  2237. arg.Message = "角度补偿54度失败!";
  2238. arg.State = false;
  2239. SendMsg("0-2");
  2240. return false;
  2241. }
  2242. arg.Message = "角度补偿54度成功!";
  2243. arg.State = true;
  2244. SendMsg("0-2");
  2245. Thread.Sleep(1000);
  2246. //判断是否停止进程
  2247. if (key_stop)
  2248. {
  2249. log.Info("停止键按下", true);
  2250. return false;
  2251. }
  2252. }
  2253. // 2是5/6类样品,不需要拉直
  2254. if (MParam.SampleName != "2")
  2255. {
  2256. log.Warn("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2257. if (!Straighten_Handle())
  2258. {
  2259. log.Info("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2260. return false;
  2261. }
  2262. log.Info("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2263. //判断是否停止进程
  2264. if (key_stop)
  2265. {
  2266. log.Info("停止键按下。", true);
  2267. return false;
  2268. }
  2269. }
  2270. else
  2271. {
  2272. arg.Message = "拉直操作自动对焦成功!";
  2273. arg.State = true;
  2274. SendMsg("1-0");
  2275. Thread.Sleep(1000);
  2276. arg.Message = "拉直拍照成功!";
  2277. arg.Picture_Information.Picture_FullPath = "";
  2278. arg.State = true;
  2279. SendMsg("1-1");
  2280. Thread.Sleep(1000);
  2281. arg.Message = "拉直操作完成";
  2282. arg.State = true;
  2283. SendMsg("1-2");
  2284. Thread.Sleep(1000);
  2285. }
  2286. //13. 自动 定位功能 PT沉积
  2287. log.Warn("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2288. if (!GetPoistion())
  2289. {
  2290. log.Error("测量线程报错:自动定位失败,程序退出。", false);
  2291. return false;
  2292. }
  2293. log.Info("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2294. //判断是否停止进程
  2295. if (key_stop)
  2296. {
  2297. log.Info("停止键按下。", true);
  2298. return false;
  2299. }
  2300. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2301. if (MParam.Is_Photograph == false)
  2302. {
  2303. if (MParam.IsCutingForDebug)
  2304. {
  2305. log.Warn("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!==" + MParam.IsCutingForDebug, true);
  2306. if (!FIBCross())
  2307. {
  2308. log.Error("测量线程报错:自动控制FIB切割失败。", false);
  2309. return false;
  2310. }
  2311. log.Info("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2312. }
  2313. }
  2314. //del by sun 2020-12-15 temp end
  2315. //判断是否停止进程
  2316. if (key_stop)
  2317. {
  2318. return false;
  2319. }
  2320. //16.找到切割位置
  2321. if (MParam.Is_Photograph == false)
  2322. {
  2323. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2324. if (!FindCross())
  2325. {
  2326. return false;
  2327. }
  2328. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2329. //判断是否停止进程
  2330. if (key_stop)
  2331. {
  2332. return false;
  2333. }
  2334. }
  2335. log.Warn("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2336. //将过程17最后的拍照图片提出给18步进行调用
  2337. List<String> limg_path = new List<string>();
  2338. List<float> lsize = new List<float>();
  2339. //17.自动控制SEM拍截面照
  2340. if (!ShotSection(ref limg_path, ref lsize))
  2341. {
  2342. log.Error("拍截面照失败!");
  2343. return false;
  2344. }
  2345. log.Info("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2346. //判断是否停止进程
  2347. if (key_stop)
  2348. {
  2349. return false;
  2350. }
  2351. //18.自动层高分析
  2352. if (MParam.Is_Photograph == false)
  2353. {
  2354. log.Warn("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2355. float size = iSEM.GetPixelSize();
  2356. int state = 1;
  2357. ImagePro.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(MParam.SampleName), MParam.Firm, out state);
  2358. if (state == 0)
  2359. {
  2360. arg.Message = "测量尺寸失败";
  2361. arg.State = false;
  2362. SendMsg("3-12");
  2363. return false;
  2364. }
  2365. arg.State = true;
  2366. arg.Message = "测量尺寸成功";
  2367. SendMsg("3-12");
  2368. log.Info("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2369. }
  2370. }
  2371. //add by zjx 2020-12-18 为了测试只做能谱部分 end
  2372. //19.能谱分析
  2373. if (MParam.EDS)
  2374. {
  2375. log.Warn("测量线程:第一个孔的测试过程-19.能谱分析开始===" + MParam.EDS, true);
  2376. EDS_Analysis();
  2377. log.Info("测量线程:第一个孔的测试过程-19.能谱分析结束===" + MParam.EDS, true);
  2378. }
  2379. //20.复位
  2380. log.Info("===========测量线程:20.复位开始", true);
  2381. BeamShiftReset();
  2382. return true;
  2383. }
  2384. //非第一个孔的测试过程
  2385. public bool OtherHole()
  2386. {
  2387. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2388. log.Warn("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  2389. if (!SetVoltageAndIPROBE())
  2390. {
  2391. log.Error("测量线程:非第一孔==设置电压电流失败!目前是第 " + MParam.SampleName + " 类!", false);
  2392. return false;
  2393. }
  2394. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2395. //设置拉直的放大倍数
  2396. log.Info("设置拉直放大倍数!");
  2397. if (!iSEM.SetMagnification(MParam.Stretch_Magnification))
  2398. {
  2399. log.Error("拉直放大倍数设置失败,程序退出。", false);
  2400. arg.Message = "拉直放大倍数设置失败!";
  2401. arg.State = false;
  2402. SendMsg("0-1");
  2403. return false;
  2404. }
  2405. float current = iSEM.GetMagnification();
  2406. while (Math.Abs(current - MParam.Stretch_Magnification) > 1)
  2407. {
  2408. iSEM.SetMagnification(MParam.Stretch_Magnification);
  2409. Thread.Sleep(200);
  2410. current = iSEM.GetMagnification();
  2411. }
  2412. arg.Message = "拉直放大倍数设置成功!";
  2413. arg.State = true;
  2414. SendMsg("0-1");
  2415. Thread.Sleep(2000);
  2416. //自动化流程-每个点都需要补偿54度
  2417. if (MParam.Is_Photograph == false)
  2418. {
  2419. log.Info("角度补偿54度!");
  2420. if (!TiltCorrection(54.0f))
  2421. {
  2422. arg.Message = "角度补偿54度失败!";
  2423. arg.State = false;
  2424. SendMsg("0-2");
  2425. return false;
  2426. }
  2427. arg.Message = "角度补偿54度成功!";
  2428. arg.State = true;
  2429. SendMsg("0-2");
  2430. Thread.Sleep(2000);
  2431. //判断是否停止进程
  2432. if (key_stop)
  2433. {
  2434. return false;
  2435. }
  2436. }
  2437. if (MParam.SampleName != "2")
  2438. {
  2439. log.Warn("开始进行拉直操作!");
  2440. if (!Straighten_Handle())
  2441. {
  2442. log.Info("测量线程报错:拉直操作失败。", true);
  2443. return false;
  2444. }
  2445. //判断是否停止进程
  2446. if (key_stop)
  2447. {
  2448. log.Info("停止键按下。", true);
  2449. return false;
  2450. }
  2451. }
  2452. else
  2453. {
  2454. arg.Message = "拉直操作自动对焦成功!";
  2455. arg.State = true;
  2456. SendMsg("1-0");
  2457. Thread.Sleep(1000);
  2458. arg.Message = "拉直拍照成功!";
  2459. arg.Picture_Information.Picture_FullPath = "";
  2460. arg.State = true;
  2461. SendMsg("1-1");
  2462. Thread.Sleep(1000);
  2463. arg.Message = "拉直操作完成";
  2464. arg.State = true;
  2465. SendMsg("1-2");
  2466. }
  2467. //13. 自动 定位功能
  2468. log.Info("开始进行自动定位!");
  2469. if (!GetPoistion())
  2470. {
  2471. return false;
  2472. }
  2473. //判断是否停止进程
  2474. if (key_stop)
  2475. {
  2476. return false;
  2477. }
  2478. //14.自动控制FIB切割
  2479. if (MParam.Is_Photograph == false)
  2480. {
  2481. log.Warn("开始进行FIB切割!");
  2482. if (!FIBCross())
  2483. {
  2484. return false;
  2485. }
  2486. }
  2487. //判断是否停止进程
  2488. if (key_stop)
  2489. {
  2490. return false;
  2491. }
  2492. // 16.找到切割位置
  2493. if (MParam.Is_Photograph == false)
  2494. {
  2495. log.Warn("开始找切割位置!");
  2496. if (!FindCross())
  2497. {
  2498. return false;
  2499. }
  2500. //判断是否停止进程
  2501. if (key_stop)
  2502. {
  2503. return false;
  2504. }
  2505. }
  2506. //将过程17最后的拍照图片提出给18步进行调用
  2507. List<String> limg_path = new List<string>();
  2508. List<float> lsize = new List<float>();
  2509. //17.自动控制SEM拍截面照
  2510. log.Warn("开始控制SEM拍截面照!");
  2511. if (!ShotSection(ref limg_path, ref lsize))
  2512. {
  2513. //return false;
  2514. }
  2515. //判断是否停止进程
  2516. if (key_stop)
  2517. {
  2518. return false;
  2519. }
  2520. //18.自动层高分析
  2521. if (MParam.Is_Photograph == false)
  2522. {
  2523. log.Warn("开始进行层高分析!");
  2524. float size = iSEM.GetPixelSize();
  2525. int state = 1;
  2526. ImagePro.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(MParam.SampleName), MParam.Firm, out state);
  2527. if (state == 0)
  2528. {
  2529. arg.Message = "测量尺寸失败";
  2530. arg.State = false;
  2531. SendMsg("3-12");
  2532. return false;
  2533. }
  2534. arg.State = true;
  2535. arg.Message = "测量尺寸成功";
  2536. SendMsg("3-12");
  2537. }
  2538. //19.能谱分析
  2539. if (MParam.EDS)
  2540. {
  2541. log.Warn("开始进行能谱分析!");
  2542. EDS_Analysis();
  2543. }
  2544. return true;
  2545. }
  2546. //测试完第一个孔后的样品台初始化操作。
  2547. //再调用CommonWork执行非第一个孔的测试过程
  2548. public bool OtherHole_Init()
  2549. {
  2550. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2551. #region 初始化
  2552. //1、不只拍照,且不是倾斜观测,则移动T轴
  2553. if (MParam.Is_Photograph == false && MParam.Tilt == false)
  2554. {
  2555. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2556. if (!iSEM.SetStageGotoT(0))
  2557. {
  2558. log.Error("样品台归零失败", false);
  2559. return false;
  2560. }
  2561. while (true)
  2562. {
  2563. Thread.Sleep(5000);
  2564. if (iSEM.GetStageIs() == 0)
  2565. {
  2566. break;
  2567. }
  2568. }
  2569. //判断是否停止进程
  2570. if (key_stop)
  2571. {
  2572. log.Info("停止键按下", true);
  2573. return false;
  2574. }
  2575. }
  2576. //2、如果是倾斜观测,则移动Z轴
  2577. if (MParam.Tilt == true)
  2578. {
  2579. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2580. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - MParam.ZDistance/1000))
  2581. //20201109, Z轴降到安全的位置上
  2582. if (!iSEM.SetStageGotoZ(fSateyZ))
  2583. {
  2584. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2585. return false;
  2586. }
  2587. while (true)
  2588. {
  2589. Thread.Sleep(5000);
  2590. if (iSEM.GetStageIs() == 0)
  2591. {
  2592. break;
  2593. }
  2594. }
  2595. //判断是否停止进程
  2596. if (key_stop)
  2597. {
  2598. log.Info("停止键按下", true);
  2599. return false;
  2600. }
  2601. }
  2602. //3. 根据光镜坐标控制样品台移动
  2603. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2604. {
  2605. //SendMsg("移动失败");
  2606. log.Error("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2607. return false;
  2608. }
  2609. log.Info("移动R轴到=" + currentHole.Position.R.ToString(), true);
  2610. while (true)
  2611. {
  2612. Thread.Sleep(5000);
  2613. if (iSEM.GetStageIs() == 0)
  2614. {
  2615. break;
  2616. }
  2617. }
  2618. //判断是否停止进程
  2619. if (key_stop)
  2620. {
  2621. log.Info("停止键按下", true);
  2622. return false;
  2623. }
  2624. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2625. {
  2626. //SendMsg("移动失败");
  2627. log.Error("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString() + "," + currentHole.Position.X.ToString() + ")", false);
  2628. return false;
  2629. }
  2630. log.Info("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2631. while (true)
  2632. {
  2633. Thread.Sleep(10000);
  2634. if (iSEM.GetStageIs() == 0)
  2635. {
  2636. break;
  2637. }
  2638. }
  2639. //判断是否停止进程
  2640. if (key_stop)
  2641. {
  2642. log.Info("停止键按下", true);
  2643. return false;
  2644. }
  2645. //4、倾斜观测时恢复Z轴
  2646. if (MParam.Tilt == true)
  2647. {
  2648. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2649. if (currentHole.Position.Z > 0.043)
  2650. {
  2651. log.Error("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2652. return false;
  2653. }
  2654. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2655. {
  2656. log.Error("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2657. return false;
  2658. }
  2659. while (true)
  2660. {
  2661. Thread.Sleep(5000);
  2662. if (iSEM.GetStageIs() == 0)
  2663. {
  2664. break;
  2665. }
  2666. }
  2667. //判断是否停止进程
  2668. if (key_stop)
  2669. {
  2670. log.Info("停止键按下", true);
  2671. return false;
  2672. }
  2673. }
  2674. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2675. if (MParam.Is_Photograph == false && MParam.Tilt == false)
  2676. {
  2677. if (!iSEM.SetStageGotoT(54))
  2678. {
  2679. log.Info("测量线程报错:校正54度有误", true);
  2680. return false;
  2681. }
  2682. while (true)
  2683. {
  2684. Thread.Sleep(5000);
  2685. if (iSEM.GetStageIs() == 0)
  2686. {
  2687. break;
  2688. }
  2689. }
  2690. }
  2691. //判断是否停止进程
  2692. if (key_stop)
  2693. {
  2694. log.Info("停止键按下", true);
  2695. return false;
  2696. }
  2697. //4、设置WD
  2698. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2699. Thread.Sleep(1000);
  2700. #endregion
  2701. return true;
  2702. }
  2703. //初始化拉直操作
  2704. public bool Straighten_Handle()
  2705. {
  2706. if (MParam.Tilt)
  2707. {
  2708. //倾斜样品台,SEM视野是黑色的
  2709. log.Info("测量线程:恢复到工作位置后重新调亮图像。", true);
  2710. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2711. {
  2712. log.Error("测量线程报错:重新设置到标准工作距离失败。", false);
  2713. return false;
  2714. }
  2715. Thread.Sleep(7000); //自动亮度对比度使用
  2716. }
  2717. //1、自动对焦
  2718. log.Info("测量线程:拉直操作前自动对焦开始", true);
  2719. iSEM.SetReduced(402, 128, 400, 400);
  2720. Thread.Sleep(200);
  2721. //add by sun 2020-12-15
  2722. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2723. //add by sun 2020-12-15 end
  2724. Thread.Sleep(200);
  2725. cycle_time = iSEM.GetCycleTime();
  2726. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2727. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2728. float m_TempBrightness = 50.0f;
  2729. float m_TempContrast = 30.0f;
  2730. if (MParam.SampleName == "3")
  2731. {
  2732. m_TempBrightness = 48.0f;
  2733. m_TempContrast = 29.0f;
  2734. }
  2735. //add by sun 2020-12-18 解决1(3\4)类样品拉直太白造成无法拉直问题
  2736. if (MParam.SampleName == "1")
  2737. {
  2738. m_TempBrightness = 50.0f;
  2739. m_TempContrast = 29.0f;
  2740. }
  2741. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2742. iSEM.SetAutoVideoOff();
  2743. Thread.Sleep(200);
  2744. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2745. Thread.Sleep(200);
  2746. iSEM.SetContrast(m_TempContrast);//30.0f
  2747. Thread.Sleep(200);
  2748. if (!ImageFocus1(true))
  2749. {
  2750. log.Error("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2751. arg.Message = "拉直操作自动对焦失败!";
  2752. arg.State = false;
  2753. SendMsg("1-0");
  2754. return false;
  2755. }
  2756. Thread.Sleep(1000);
  2757. iSEM.CloseReduced();
  2758. Thread.Sleep(200);
  2759. cycle_time = iSEM.GetCycleTime();
  2760. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2761. iSEM.SetAutoVideoBrightnessAndContrast();
  2762. Thread.Sleep(5000);
  2763. arg.Message = "拉直操作自动对焦成功!";
  2764. arg.State = true;
  2765. SendMsg("1-0");
  2766. //判断是否停止进程
  2767. if (key_stop)
  2768. {
  2769. log.Info("停止键按下。", true);
  2770. return false;
  2771. }
  2772. //2、拍张照片
  2773. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2774. log.Info("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2775. //拍照前改变速度,延时
  2776. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2777. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2778. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2779. Thread.Sleep(200);
  2780. cycle_time = iSEM.GetCycleTime();
  2781. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2782. if (!GetImage(fileName0))
  2783. {
  2784. log.Error("测量线程报错:拉直拍照失败", false);
  2785. arg.Message = "拉直拍照失败";
  2786. arg.State = false;
  2787. SendMsg("1-1");
  2788. return false;
  2789. }
  2790. arg.Message = "拉直拍照成功!";
  2791. arg.Picture_Information.Picture_FullPath = fileName0;
  2792. arg.State = true;
  2793. SendMsg("1-1");
  2794. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2795. Thread.Sleep(200);
  2796. cycle_time = iSEM.GetCycleTime();
  2797. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2798. //3、华为接口,获取旋转角度
  2799. float degree = 0;
  2800. int direction = 0;
  2801. int state = 1;
  2802. ImagePro.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  2803. log.Info("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  2804. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  2805. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  2806. if (state == 0)
  2807. {
  2808. log.Info("测量线程:图像处理接口参数state返回为零", false);
  2809. arg.Message = "图像处理接口参数state返回为零";
  2810. arg.State = false;
  2811. SendMsg("1-2");
  2812. if (hand_intervene == 1)
  2813. {
  2814. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2815. {
  2816. return false;
  2817. }
  2818. }
  2819. else
  2820. {
  2821. return false;
  2822. }
  2823. return false;
  2824. }
  2825. if (direction == 2)
  2826. {
  2827. degree = -degree;
  2828. }
  2829. if (degree != 0)
  2830. {
  2831. //4、拉直,旋转R轴
  2832. log.Info("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  2833. //选择之前,先降Z轴
  2834. float Zpos = iSEM.GetStageAtZ();
  2835. Thread.Sleep(200);
  2836. log.Info("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  2837. if (!iSEM.SetStageGotoZ(fSateyZ))
  2838. {
  2839. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2840. return false;
  2841. }
  2842. while (true)
  2843. {
  2844. Thread.Sleep(4000);
  2845. if (iSEM.GetStageIs() == 0)
  2846. {
  2847. break;
  2848. }
  2849. }
  2850. //判断是否停止进程
  2851. if (key_stop)
  2852. {
  2853. log.Info("停止键按下", true);
  2854. return false;
  2855. }
  2856. iSEM.SetStageDeltaR(degree);
  2857. while (true)
  2858. {
  2859. Thread.Sleep(4000);
  2860. if (iSEM.GetStageIs() == 0)
  2861. {
  2862. break;
  2863. }
  2864. }
  2865. if (!iSEM.SetStageGotoZ(Zpos))
  2866. {
  2867. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2868. return false;
  2869. }
  2870. while (true)
  2871. {
  2872. Thread.Sleep(4000);
  2873. if (iSEM.GetStageIs() == 0)
  2874. {
  2875. break;
  2876. }
  2877. }
  2878. //判断是否停止进程
  2879. if (key_stop)
  2880. {
  2881. log.Info("停止键按下", true);
  2882. return false;
  2883. }
  2884. //4、设置WD
  2885. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2886. Thread.Sleep(1000);
  2887. }
  2888. arg.Message = "拉直操作完成";
  2889. arg.State = true;
  2890. SendMsg("1-2");
  2891. return true;
  2892. }
  2893. //角度补偿
  2894. public bool TiltCorrection(float a_fAngle)
  2895. {
  2896. if (!iSEM.SetTiltAngleOn())
  2897. {
  2898. return false;
  2899. }
  2900. Thread.Sleep(200);
  2901. //恢复原始状态
  2902. if (!iSEM.SetTiltAngle(a_fAngle))
  2903. {
  2904. return false;
  2905. }
  2906. return true;
  2907. }
  2908. //拍图
  2909. public bool GetImage(String a_fileName)
  2910. {
  2911. log.Info("获取分辨率开始!", true);
  2912. //3. 获取分辨率
  2913. int[] ImageSize = iSEM.GetImageStore();
  2914. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2915. {
  2916. return false;
  2917. }
  2918. short width = (short)ImageSize[0];
  2919. short height = (short)ImageSize[1];
  2920. log.Info("获取分辨率结束!" + a_fileName + "====" + width + "*" + height, true);
  2921. //4. 抓图
  2922. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  2923. {
  2924. log.Info("抓图失败!", true);
  2925. return false;
  2926. }
  2927. return true;
  2928. }
  2929. //执行自动对焦
  2930. public bool ImageFocus1(Boolean Is_Stig)
  2931. {
  2932. if (MParam.FocusMode == 1)//手动
  2933. {
  2934. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  2935. {
  2936. }
  2937. else
  2938. {
  2939. return false;
  2940. }
  2941. }
  2942. else if (MParam.FocusMode == 2)//自有自动
  2943. {
  2944. #region 执行蔡司自动对焦程序
  2945. //服务地址
  2946. string snumstr = @"http://192.168.1.101:8123";
  2947. bool normalized;
  2948. if (MParam.SampleName == "1")//第1大类代表3、4小类
  2949. {
  2950. normalized = false;
  2951. }
  2952. else
  2953. {
  2954. normalized = true;
  2955. }
  2956. // 调用方法;只对焦不消像散
  2957. if (Is_Stig)
  2958. {
  2959. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);//,normalized
  2960. if (focusstig != "success")
  2961. {
  2962. log.Error("对焦失败" + focusstig, false);
  2963. return false;
  2964. }
  2965. }
  2966. else
  2967. {
  2968. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);//,normalized
  2969. if (onlyfocus != "success")
  2970. {
  2971. return false;
  2972. }
  2973. }
  2974. #endregion
  2975. }
  2976. else if (MParam.FocusMode == 3) //客户自动
  2977. {
  2978. //后期和客户对接接口
  2979. List<string> filenames = new List<string>();
  2980. String retfilename = ImagePro.Img_Auto_Focus(filenames);
  2981. }
  2982. else //蔡司自动对焦
  2983. {
  2984. iSEM.CmdAutoFocusCoarse();
  2985. while (true)
  2986. {
  2987. Thread.Sleep(10000);
  2988. if (0 == iSEM.GetAutoFunction())
  2989. {
  2990. break;
  2991. }
  2992. }
  2993. iSEM.CmdAutoFocusFine();
  2994. while (true)
  2995. {
  2996. Thread.Sleep(10000);
  2997. if (0 == iSEM.GetAutoFunction())
  2998. {
  2999. break;
  3000. }
  3001. }
  3002. }
  3003. return true;
  3004. }
  3005. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  3006. bool MoveToPixByMoveStage(float xc, float yc)
  3007. {
  3008. //单位是m/pix
  3009. float XpixSize = iSEM.GetPixelSize();
  3010. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  3011. float YpixSize = iSEM.GetPixelSize();///(float)MParam.PixelSizeCor);
  3012. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  3013. Thread.Sleep(500);
  3014. //0:width, 1:height
  3015. int[] imageSize = iSEM.GetImageStore();
  3016. int width = imageSize[0] / 2;
  3017. int height = imageSize[1] / 2;
  3018. log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  3019. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  3020. float deltX = (xc - (float)width) * XpixSize;
  3021. float deltY = (yc - (float)height) * YpixSize;
  3022. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  3023. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  3024. float xpCur = iSEM.GetStageAtX();
  3025. float ypCur = iSEM.GetStageAtY();
  3026. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  3027. float xpNew = xpCur - deltX;
  3028. float ypNew = ypCur + deltY;
  3029. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  3030. //计算光束偏移值:
  3031. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  3032. {
  3033. log.Info("X方向移动样品台", true);
  3034. if (!iSEM.SetStageGotoX(xpNew))
  3035. {
  3036. return false;
  3037. }
  3038. //判断是否移动完成
  3039. while (true)
  3040. {
  3041. Thread.Sleep(5000);
  3042. if (iSEM.GetStageIs() == 0)
  3043. {
  3044. break;
  3045. }
  3046. }
  3047. }
  3048. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  3049. {
  3050. log.Info("Y方向移动样品台", true);
  3051. if (!iSEM.SetStageGotoY(ypNew))
  3052. {
  3053. return false;
  3054. }
  3055. //判断是否移动完成
  3056. while (true)
  3057. {
  3058. Thread.Sleep(5000);
  3059. if (iSEM.GetStageIs() == 0)
  3060. {
  3061. break;
  3062. }
  3063. }
  3064. }
  3065. return true;
  3066. }
  3067. //移动到像素位置
  3068. bool MoveToPix(float xc, float yc)
  3069. {
  3070. //单位是m/pix
  3071. float XpixSize = iSEM.GetPixelSize();
  3072. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  3073. float YpixSize = (XpixSize / (float)MParam.PixelSizeCor);
  3074. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  3075. Thread.Sleep(200);
  3076. //0:width, 1:height
  3077. int[] imageSize = iSEM.GetImageStore();
  3078. int width = imageSize[0] / 2;
  3079. int height = imageSize[1] / 2;
  3080. log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  3081. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  3082. float deltX = (xc - (float)width) * XpixSize;
  3083. float deltY = (yc - (float)height) * YpixSize;
  3084. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  3085. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  3086. float xpCur = iSEM.GetStageAtX();
  3087. Thread.Sleep(200);
  3088. float ypCur = iSEM.GetStageAtY();
  3089. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  3090. float xpNew = xpCur - deltX;
  3091. float ypNew = ypCur + deltY;
  3092. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  3093. //计算最大偏移量
  3094. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  3095. Thread.Sleep(200);
  3096. iSEM.SetBeamShiftX(100);
  3097. Thread.Sleep(200);
  3098. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  3099. Thread.Sleep(200);
  3100. iSEM.SetBeamShiftX(beamXCur);
  3101. Thread.Sleep(200);
  3102. //计算光束偏移值:
  3103. float beamX = iSEM.GetBeamOffsetX();
  3104. log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  3105. beamX = (-deltX + beamX);
  3106. log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  3107. if (((beamX <= beamXMax) && (beamX >= 0)) ||
  3108. ((beamX >= -beamXMax) && (beamX < 0)))
  3109. {
  3110. log.Info("X方向移动光束", true);
  3111. float beamXShift = beamX * 100 / beamXMax;
  3112. log.Info("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  3113. if (!iSEM.SetBeamShiftX(beamXShift))//if (!iSEM.SetBeamOffsetX(beamX))
  3114. {
  3115. log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  3116. return false;
  3117. }
  3118. }
  3119. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  3120. {
  3121. log.Info("X方向移动样品台", true);
  3122. if (!iSEM.SetStageGotoX(xpNew))
  3123. {
  3124. return false;
  3125. }
  3126. //判断是否移动完成
  3127. while (true)
  3128. {
  3129. Thread.Sleep(4000);
  3130. if (iSEM.GetStageIs() == 0)
  3131. {
  3132. break;
  3133. }
  3134. }
  3135. }
  3136. float beamY = iSEM.GetBeamOffsetY();
  3137. log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  3138. beamY = (-deltY + beamY);
  3139. log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  3140. //计算最大偏移量
  3141. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  3142. Thread.Sleep(200);
  3143. iSEM.SetBeamShiftY(100);
  3144. Thread.Sleep(200);
  3145. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  3146. Thread.Sleep(200);
  3147. iSEM.SetBeamShiftY(beamYCur);
  3148. Thread.Sleep(200);
  3149. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  3150. ((beamY >= -beamYMax) && (beamY < 0)))
  3151. {
  3152. log.Info("Y方向移动光束", true);
  3153. float beamYShift = beamY * 100 / beamYMax;
  3154. log.Info("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  3155. //if(!iSEM.SetBeamOffsetY(beamY))
  3156. if (!iSEM.SetBeamShiftY(beamYShift))
  3157. {
  3158. log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  3159. return false;
  3160. }
  3161. }
  3162. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  3163. {
  3164. log.Info("Y方向移动样品台", true);
  3165. if (!iSEM.SetStageGotoY(ypNew))
  3166. {
  3167. return false;
  3168. }
  3169. //判断是否移动完成
  3170. while (true)
  3171. {
  3172. Thread.Sleep(4000);
  3173. if (iSEM.GetStageIs() == 0)
  3174. {
  3175. break;
  3176. }
  3177. }
  3178. }
  3179. return true;
  3180. }
  3181. #region 能谱所有参数
  3182. //全局只有一个Extender
  3183. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  3184. public IExtenderControl iExtender = null;
  3185. const int ScanFieldSize = 1142;
  3186. MeasureDB m_MeasDB = null;
  3187. int m_nXrayId = 0;
  3188. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  3189. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  3190. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  3191. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  3192. /// <summary>
  3193. /// 做能谱分析
  3194. /// </summary>
  3195. /// <param name="a_CutHoleID">分析点视场ID,索引号</param>
  3196. /// <param name="a_CutHoleName">分析点视场名称</param>
  3197. /// <param name="a_FieldImagePositionID">分析点的视场位置ID,图像处理会返回多个Xray分析点,但我们这里只取第一个点所在的视场</param>
  3198. /// <returns>成功或失败</returns>
  3199. public bool DoEDS(int a_CutHoleID, string a_CutHoleName, int a_FieldImagePositionID)
  3200. {
  3201. try
  3202. {
  3203. //XrayID记录
  3204. log.Info("程序进入EDS测量!", true);
  3205. iExtender = factoryExtender.IExtender;
  3206. Thread.Sleep(500);
  3207. EDSParam param = MParam.EDSParam;
  3208. double dDwellTime = param.DwellTime;
  3209. int nImageType = param.ImageType;
  3210. double dScanSizes = param.ScanSize;
  3211. log.Info("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  3212. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  3213. string path = EDS_path;
  3214. string edsfn = path + "\\" + a_FieldImagePositionID.ToString() + "_" + ImageNameEDS;
  3215. log.Info("EDS_PATH=" + edsfn, true);
  3216. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);//get the field eds image where the anylysis point locate.
  3217. arg.Picture_Information.Picture_FullPath = "";
  3218. arg.State = true;
  3219. SendMsg("4-5");//向界面发送指令:能谱拍照
  3220. //arg.State = false;
  3221. arg.Message = "";
  3222. arg.Picture_Information.Picture_FullPath = edsfn;
  3223. SendMsg("EDSPic");
  3224. //送给客户,计算感兴趣的区域
  3225. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  3226. List<System.Drawing.Point> LinesStartPoint = new List<System.Drawing.Point>();
  3227. List<List<Segment>> listFeature = new List<List<Segment>>();
  3228. List<int> lines_height = new List<int>();
  3229. System.Drawing.Point area_pt = new System.Drawing.Point();
  3230. int width = 1;
  3231. int height = 1;
  3232. int AreasNo = 0;
  3233. long[] XrayData;
  3234. Dictionary<string, double> listElement;
  3235. int xrayCollectMode = param.XrayCollectMode;
  3236. switch (xrayCollectMode)
  3237. {
  3238. case 0://point mode
  3239. //点数据
  3240. int state = 0;
  3241. ImagePro.EDS_Param_Points(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out listPoints, out state);
  3242. if (state == 0)
  3243. {
  3244. log.Error("点采集失败", false);
  3245. return false;
  3246. }
  3247. log.Info("返回 listPoints=" + listPoints.Count.ToString(), true);
  3248. if (!m_MeasDB.InsertAnylysisField(a_CutHoleID, a_CutHoleName, EDS_path, listPoints.Count, listFeature.Count, a_FieldImagePositionID))
  3249. {
  3250. log.Error("插入分析视场失败", false);
  3251. }
  3252. iExtender.BeginMultipleAquisition();
  3253. Thread.Sleep(100);
  3254. //点采集
  3255. m_nXrayId = 0;
  3256. foreach (System.Drawing.Point pt in listPoints)
  3257. {
  3258. XrayData = new long[2000];
  3259. listElement = new Dictionary<string, double>();
  3260. if (iExtender.XrayPointCollecting(param.PointTime, pt.X, pt.Y , out XrayData, out listElement))
  3261. {
  3262. string ele = "";
  3263. foreach (var s in listElement)
  3264. {
  3265. ele += s.ToString();
  3266. }
  3267. log.Info("采集点:(" + pt.X.ToString() + ":" + pt.Y.ToString() + ") 元素:" + ele);
  3268. //写入数据库
  3269. m_nXrayId++;
  3270. log.Info("点采集结束,写入数据库开始--" + m_nXrayId.ToString(), true);
  3271. Boolean ret = m_MeasDB.InsertAPointXray(a_CutHoleID, m_nXrayId, pt.X, pt.Y, XrayData, listElement, a_FieldImagePositionID);
  3272. Thread.Sleep(1000);
  3273. }
  3274. }
  3275. iExtender.EndMultipleAquisition();
  3276. break;
  3277. case 1://line mode
  3278. log.Info("线扫描", true);
  3279. state = 0;
  3280. ImagePro.EDS_Param_Lines(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out LinesStartPoint, out lines_height, out state);
  3281. string sp = "";
  3282. foreach (System.Drawing.Point p in LinesStartPoint)
  3283. {
  3284. sp += "(" + p.X + "," + p.Y + ")";
  3285. }
  3286. log.Info("线返回数据,lines=" + LinesStartPoint.Count.ToString() + " " + sp, true);
  3287. if (state == 1)
  3288. {
  3289. //将线转换为segment数据
  3290. log.Info("将线转换为segment数据", true);
  3291. for (int i = 0; i < LinesStartPoint.Count; i++)
  3292. {
  3293. List<Segment> segments = new List<Segment>();
  3294. for (int j = 0; j <= lines_height[i]; j++)
  3295. {
  3296. Segment segment = new Segment();
  3297. segment.X = LinesStartPoint[i].X;
  3298. segment.Y = LinesStartPoint[i].Y + j;
  3299. segment.Length = 1;
  3300. segments.Add(segment);
  3301. }
  3302. listFeature.Add(segments);
  3303. }
  3304. }
  3305. else
  3306. {
  3307. log.Error("线扫图片处理失败", false);
  3308. return false;
  3309. }
  3310. //线采集
  3311. iExtender.BeginMultipleAquisition();
  3312. Thread.Sleep(100);
  3313. for (int i = 0; i < listFeature.Count; i++)
  3314. {
  3315. List<Segment> listSeg = listFeature[i];
  3316. XrayData = new long[2000];
  3317. listElement = new Dictionary<string, double>();
  3318. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  3319. {
  3320. string ele = "";
  3321. foreach (var s in listElement)
  3322. {
  3323. ele += s.ToString();
  3324. }
  3325. log.Info("采集时间=" + param.AreaTime.ToString(), true);
  3326. log.Info("(" + listSeg[0].X + "," + listSeg[0].Y + ") height=" + lines_height[i] + " 元素:" + ele);
  3327. log.Info("线采集结束,写入数据库开始", true);
  3328. //写入数据库
  3329. m_nXrayId++;
  3330. AreasNo++;
  3331. m_MeasDB.InsertAAreaXay(a_CutHoleID, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  3332. }
  3333. else
  3334. {
  3335. log.Error("线扫xray失败");
  3336. }
  3337. }
  3338. iExtender.EndMultipleAquisition();
  3339. break;
  3340. case 2: //area mode
  3341. //面数据
  3342. state = 0;
  3343. ImagePro.EDS_Param_Areas(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out area_pt, out width, out height, out state);
  3344. log.Info("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  3345. if (state == 1)
  3346. {
  3347. //将面转换为segment数据
  3348. List<Segment> segments = new List<Segment>();
  3349. for (int j = 0; j <= height; j++)
  3350. {
  3351. Segment segment = new Segment();
  3352. segment.X = area_pt.X;
  3353. segment.Y = area_pt.Y + j;
  3354. segment.Length = width;
  3355. segments.Add(segment);
  3356. }
  3357. listFeature.Add(segments);
  3358. }
  3359. else
  3360. {
  3361. log.Error("面扫图片处理失败", false);
  3362. return false;
  3363. }
  3364. //面采集
  3365. iExtender.BeginMultipleAquisition();
  3366. Thread.Sleep(100);
  3367. foreach (List<Segment> listSeg in listFeature)
  3368. {
  3369. XrayData = new long[2000];
  3370. listElement = new Dictionary<string, double>();
  3371. log.Info("AreaTime=" + param.AreaTime.ToString(), true);
  3372. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  3373. {
  3374. string ele = "";
  3375. foreach (var s in listElement)
  3376. {
  3377. ele += s.ToString();
  3378. }
  3379. log.Info(" 元素:" + ele);
  3380. log.Info("面采集结束,写入数据库开始", true);
  3381. //写入数据库
  3382. m_nXrayId++;
  3383. AreasNo++;
  3384. m_MeasDB.InsertAAreaXay(a_CutHoleID, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  3385. }
  3386. else
  3387. {
  3388. log.Error("面扫xray失败");
  3389. }
  3390. }
  3391. iExtender.EndMultipleAquisition();
  3392. break;
  3393. }
  3394. //存储数据
  3395. //向分析点数据库更新
  3396. }
  3397. catch (Exception e)
  3398. {
  3399. iExtender.EndMultipleAquisition();
  3400. log.Error(e.Message, false);
  3401. return false;
  3402. }
  3403. return true;
  3404. }
  3405. /// <summary>
  3406. /// 初始化数据库
  3407. /// </summary>
  3408. public void Init_MeasDB()
  3409. {
  3410. m_MeasDB = new MeasureDB(m_measureFile);
  3411. }
  3412. /// <summary>
  3413. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  3414. /// </summary>
  3415. /// <returns></returns>
  3416. public bool EDS_FindCross()
  3417. {
  3418. float x2 = 0, y2 = 0;
  3419. int state = 0;
  3420. float mag = MParam.Photograph_Magnification / 3;
  3421. String fileName4 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS4;
  3422. PhotoParam prm = new PhotoParam()
  3423. {
  3424. Mag = mag,
  3425. savePath = fileName4,
  3426. scanSpeed= MParam.ScanSpeedHigh,
  3427. scanSpeedAfter=MParam.ScanSpeedNormal,
  3428. };
  3429. Photo pho = new Photo(prm,iSEM);
  3430. pho.TakePhoto();
  3431. arg.Picture_Information.Picture_FullPath = fileName4;
  3432. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3433. //Thread.Sleep(200);
  3434. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3435. //Thread.Sleep(200);
  3436. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  3437. //Thread.Sleep(200);
  3438. SendMsg("4-2");
  3439. //拍照前改变速度,延时
  3440. if (key_stop)
  3441. {
  3442. return false;
  3443. }
  3444. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  3445. //5.根据坐标控制SEM移动到切孔位置,居中
  3446. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  3447. log.Info("文件名=" + fileName4, true);
  3448. ImagePro.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x2, out y2, out state);
  3449. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  3450. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  3451. if (state == 1)
  3452. {
  3453. LocateParam lprm = new LocateParam()
  3454. {
  3455. PositionX = x2,
  3456. PositionY = y2,
  3457. PixelSize_Y_cur = MParam.PixelSizeCor ,
  3458. };
  3459. Locate loc = new Locate(lprm, iSEM);
  3460. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  3461. if (!loc.DoLocateByMoveStage())
  3462. {
  3463. log.Error("测量线程报错:" + arg.Message, false);
  3464. return false;
  3465. }
  3466. }
  3467. else
  3468. {
  3469. arg.Message = "图像接口参数state返回值为零";
  3470. arg.State = false;
  3471. //SendMsg("3-3");
  3472. if (hand_intervene == 1)
  3473. {
  3474. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  3475. {
  3476. return false;
  3477. }
  3478. }
  3479. else
  3480. {
  3481. return false;
  3482. }
  3483. log.Error("测量线程报错:" + arg.Message, false);
  3484. return false;
  3485. }
  3486. //判断是否停止进程
  3487. if (key_stop)
  3488. {
  3489. log.Info("停止键按下", true);
  3490. return false;
  3491. }
  3492. return true;
  3493. }
  3494. /// <summary>
  3495. /// 171.能谱第17步找点采集数据
  3496. /// </summary>
  3497. /// <returns></returns>
  3498. public bool EDS_ShotSection()
  3499. {
  3500. int state = 0;
  3501. log.Info("设置拍照放大倍数=" + MParam.Photograph_Magnification.ToString(), true);
  3502. Focusparam fprm = new Focusparam()
  3503. {
  3504. mag = MParam.Photograph_Magnification,
  3505. reduceWindowPos = new System.Drawing.Point(402, 128),
  3506. reduceWinHeight = 600,
  3507. reduceWinWidth = 600,
  3508. ScanSpeed = MParam.ScanSpeedFocus,
  3509. IfAutoBrightnessAndContrast = true,
  3510. delayTime=500,
  3511. voltage=7000,
  3512. Iprobe=0.5f,
  3513. workingDis=10,//unit mm
  3514. brightness =50,
  3515. contrast =29,
  3516. };
  3517. log.Info("自动对焦开始!", true);
  3518. Focus f = new Focus(fprm, iSEM);
  3519. f.DoFocus();
  3520. SendMsg("4-4");
  3521. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  3522. String fileName5 = data_path + "\\EDS\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  3523. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  3524. log.Info("fileName5=" + fileName5, true);
  3525. log.Info("开始拍摄截面照!");
  3526. PhotoParam phoPrm = new PhotoParam()
  3527. {
  3528. Mag = MParam.Photograph_Magnification,
  3529. savePath = fileName5,
  3530. scanSpeed = MParam.ScanSpeedHigh,
  3531. scanSpeedAfter = MParam.ScanSpeedNormal,
  3532. };
  3533. Photo pho = new Photo(phoPrm, iSEM);
  3534. pho.TakePhoto();
  3535. //判断是否停止进程
  3536. if (key_stop)
  3537. {
  3538. log.Info("停止键按下", true);
  3539. return false;
  3540. }
  3541. #endregion
  3542. if (MParam.Is_Photograph == false)//Is_Photograph 代表 是否是只拍照
  3543. {
  3544. #region 对当前矩形进行旋转校正
  3545. //8,计算切割面区域偏移角度及方向
  3546. float degree = 0;
  3547. int direction = 0;
  3548. ImagePro.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  3549. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  3550. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  3551. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  3552. if (state == 1)
  3553. {
  3554. //梯形角度
  3555. iSEM.SetScanRotationOn();
  3556. Thread.Sleep(200);
  3557. //20201128陈工要求,谭博返回角度*0.7
  3558. iSEM.SetScanRotation(Convert.ToSingle(degree * MParam.ScanRotCor));
  3559. Thread.Sleep(200);
  3560. arg.State = true;
  3561. arg.Message = "图像接口返回角度为:" + degree.ToString();
  3562. log.Info(arg.Message);
  3563. }
  3564. else
  3565. {
  3566. arg.Message = "图像接口参数State返回值为零";
  3567. log.Error("测量线程报错:" + arg.Message, false);
  3568. }
  3569. //判断是否停止进程
  3570. if (key_stop)
  3571. {
  3572. log.Info("停止键按下", true);
  3573. return false;
  3574. }
  3575. Thread.Sleep(200);
  3576. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  3577. String fileName6 = data_path + "\\EDS\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  3578. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  3579. log.Info("fileName6=" + fileName6, true);
  3580. log.Info("纠正后拍照!");
  3581. PhotoParam phoprm = new PhotoParam()
  3582. {
  3583. Mag = MParam.Photograph_Magnification,
  3584. scanSpeed = MParam.ScanSpeedHigh,
  3585. scanSpeedAfter = MParam.ScanSpeedNormal,
  3586. savePath=fileName6,
  3587. };
  3588. Photo pho1 = new Photo(phoprm, iSEM);
  3589. pho1.TakePhoto();
  3590. if (key_stop)
  3591. {
  3592. log.Info("停止键按下", true);
  3593. return false;
  3594. }
  3595. #endregion
  3596. #region 获取两个位置上及放大倍数
  3597. //计算两个测量区域坐标
  3598. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  3599. List<float> mag = new List<float>();
  3600. System.Drawing.Point ct0;
  3601. float mag1, mag2, magMax;
  3602. log.Info("图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString(), true);
  3603. ImagePro.Img_Measure_Region_Position(fileName6, Convert.ToInt32(MParam.SampleName), MParam.Firm, out ct, out mag, out ct0, out state);
  3604. string s = "";
  3605. for (int i = 0; i < ct.Count; i++)
  3606. {
  3607. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  3608. + "放大倍数=" + mag[i];
  3609. }
  3610. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  3611. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  3612. "输入样品" + Convert.ToInt32(MParam.SampleName) +
  3613. "输入厂商" + MParam.Firm.ToString() +
  3614. s +
  3615. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  3616. #endregion
  3617. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  3618. {
  3619. //找到放大倍数最大值
  3620. magMax = mag[0];
  3621. for (int m = 1; m < mag.Count; m++)
  3622. {
  3623. if (mag[m] > magMax)
  3624. {
  3625. magMax = mag[m];
  3626. }
  3627. }
  3628. #region 移动到梯形左上角
  3629. //20201127将视野移动到梯形左上角位置
  3630. log.Warn("开始对焦 移动到对焦点( " + ct0.X.ToString()
  3631. + "," + ct0.Y.ToString() + ")", true);
  3632. //MoveToPix(ct0.X, ct0.Y);
  3633. LocateParam lprm = new LocateParam()
  3634. {
  3635. PositionX = ct0.X,
  3636. PositionY = ct0.Y,
  3637. PixelSize_Y_cur = MParam.PixelSizeCor ,
  3638. };
  3639. Locate loc = new Locate(lprm, iSEM);
  3640. loc.DoLocateByShiftBeam();
  3641. Focusparam fprm1 = new Focusparam()
  3642. {
  3643. mag = magMax / 4,
  3644. reduceWindowPos = new System.Drawing.Point(402, 128),
  3645. reduceWinHeight = 480,
  3646. reduceWinWidth = 450,
  3647. ScanSpeed = MParam.ScanSpeedFocus,
  3648. IfAutoBrightnessAndContrast = true,
  3649. delayTime = 500,
  3650. voltage = 7000,
  3651. Iprobe = 0.5f,
  3652. workingDis = 10 ,
  3653. brightness = 50,
  3654. contrast = 29,
  3655. };
  3656. log.Info("自动对焦开始!", true);
  3657. Focus f1 = new Focus(fprm, iSEM);
  3658. f1.DoFocus();
  3659. fprm.mag = magMax / 2;
  3660. log.Info("自动对焦开始!", true);
  3661. Focus f2= new Focus(fprm, iSEM);
  3662. f2.DoFocus();
  3663. #endregion
  3664. log.Warn("对焦完成,开始用能谱拍摄观测点照片!并分析图片以获得Xray点位置!");
  3665. log.Warn("移动到指定观测点!并准备打Xray");
  3666. LocateParam locp = new LocateParam()
  3667. {
  3668. PositionX=ct[0].X ,
  3669. PositionY=ct[0].Y,
  3670. PixelSize_Y_cur =MParam.PixelSizeCor ,
  3671. };
  3672. Locate loc2 = new Locate(locp, iSEM);
  3673. loc2.DoLocateByShiftBeam();
  3674. SendMsg("4-4");//向界面发送指令:放大并对拍摄点对焦
  3675. //#endregion
  3676. Thread.Sleep(200);
  3677. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  3678. #region 拍照
  3679. log.Info("进入内部观察,不对焦!", true);
  3680. log.Info("开始拍照,设置放大倍数" + mag[0]);
  3681. if (!iSEM.SetMagnification(mag[0]))
  3682. {
  3683. log.Error("移动到第一个点位置拍照失败", false);
  3684. return false;
  3685. }
  3686. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  3687. float set = mag[0];
  3688. float current = iSEM.GetMagnification();
  3689. //while (Math.Abs(current - set) > 1)
  3690. //{
  3691. // iSEM.SetMagnification(set);
  3692. // Thread.Sleep(200);
  3693. // current = iSEM.GetMagnification();
  3694. //}
  3695. Thread.Sleep(200);
  3696. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  3697. String fileName7 = data_path + "\\EDS\\" + MParam.Firm + "-" + mag[0].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-0-" + ImageNameTwo_1;
  3698. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  3699. log.Info("fileName7=" + fileName7, true);
  3700. arg.Picture_Information.Picture_FullPath = fileName7;
  3701. arg.Picture_Information.Work_Status = "SEM";
  3702. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3703. Thread.Sleep(200);
  3704. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3705. Thread.Sleep(200);
  3706. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  3707. Thread.Sleep(200);
  3708. //拍照前改变速度,延时
  3709. iSEM.CmdLineScan();
  3710. Thread.Sleep(200);
  3711. cycle_time = iSEM.GetCycleTime();
  3712. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3713. log.Warn("EDS获取指定观测点图片,并打Xray");
  3714. DoEDS(m_nWorkHoleNo, m_cutHoles[m_nWorkHoleNo].HoleName, 1);
  3715. log.Info("像素扫描:CmdPixelScan");
  3716. iSEM.CmdPixelScan();
  3717. Thread.Sleep(200);
  3718. log.Info("改变刷新率 " + MParam.ScanSpeedNormal);
  3719. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  3720. Thread.Sleep(200);
  3721. cycle_time = iSEM.GetCycleTime();
  3722. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3723. SendMsg("4-6");//向界面发生指令:采集能谱信息
  3724. }
  3725. #endregion
  3726. }
  3727. iSEM.SetTiltAngleOff();
  3728. Thread.Sleep(200);
  3729. iSEM.SetScanRotationOff();
  3730. Thread.Sleep(200);
  3731. iSEM.SetBeamShiftX(0);
  3732. Thread.Sleep(200);
  3733. iSEM.SetBeamShiftY(0);
  3734. Thread.Sleep(200);
  3735. //判断是否停止进程
  3736. return true;
  3737. }
  3738. /// <summary>
  3739. /// 19.能谱分析
  3740. /// </summary>
  3741. /// <returns></returns>
  3742. public bool EDS_Analysis()
  3743. {
  3744. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  3745. if (MParam.EDSZ < Z_Min || MParam.EDSZ > Z_Max)
  3746. {
  3747. log.Info("Z轴位置设置超出范围.", true);
  3748. return false;
  3749. }
  3750. log.Info("将Z轴位置指定到:" + MParam.EDSZ.ToString(), true);
  3751. if (!iSEM.SetStageGotoZ(MParam.EDSZ))
  3752. {
  3753. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  3754. return false;
  3755. }
  3756. while (true)
  3757. {
  3758. Thread.Sleep(2000);
  3759. if (iSEM.GetStageIs() == 0)
  3760. {
  3761. break;
  3762. }
  3763. }
  3764. //判断是否停止进程
  3765. if (key_stop)
  3766. {
  3767. log.Info("停止键按下", true);
  3768. return false;
  3769. }
  3770. SendMsg("4-0");
  3771. Thread.Sleep(200);
  3772. //2.角度改为54度
  3773. iSEM.SetScanRotationOff();
  3774. Focusparam focusPrm = new Focusparam()
  3775. {
  3776. voltage = 7000,
  3777. Iprobe = 0.5F,
  3778. IfAutoBrightnessAndContrast = true,
  3779. ScanSpeed = MParam.ScanSpeedHigh,
  3780. mag = 600,
  3781. reduceWindowPos = new System.Drawing.Point(256, 192),
  3782. reduceWinWidth = 512,
  3783. reduceWinHeight = 512,
  3784. workingDis = 10,//unit:mm
  3785. brightness=50,
  3786. contrast=29
  3787. };
  3788. SendMsg("4-1");
  3789. Focus f = new Focus(focusPrm, iSEM);
  3790. f.DoFocus();
  3791. log.Warn("开始梯形移到视野中心!");
  3792. if (!EDS_FindCross())
  3793. {
  3794. return false;
  3795. }
  3796. SendMsg("4-3");
  3797. Thread.Sleep(500);
  3798. //7.调用171步过程
  3799. log.Warn("开始打能谱图和打Xray!");
  3800. if (!EDS_ShotSection())
  3801. {
  3802. return false;
  3803. }
  3804. //SendMsg("4-3");//向界面发送指令:移动到拍摄点位置
  3805. Thread.Sleep(200);
  3806. return true;
  3807. }
  3808. /// <summary>
  3809. /// 20.光束等复位
  3810. /// </summary>
  3811. public void BeamShiftReset()
  3812. {
  3813. iSEM.SetTiltAngleOff();
  3814. Thread.Sleep(200);
  3815. iSEM.SetScanRotationOff();
  3816. Thread.Sleep(200);
  3817. iSEM.SetBeamShiftX(0);
  3818. Thread.Sleep(200);
  3819. iSEM.SetBeamShiftY(0);
  3820. Thread.Sleep(200);
  3821. }
  3822. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  3823. #region 设置电压电流
  3824. public bool SetVoltageAndIPROBE()
  3825. {
  3826. log.Info("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  3827. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  3828. bool mRet_VoltageFlag = false;
  3829. bool mRet_ElecFlag = false;
  3830. if (MParam.SampleName == "4" || MParam.SampleName == "5")
  3831. {
  3832. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  3833. Thread.Sleep(500);
  3834. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  3835. Thread.Sleep(500);
  3836. }
  3837. else if (MParam.SampleName == "3")
  3838. {
  3839. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  3840. Thread.Sleep(500);
  3841. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  3842. Thread.Sleep(500);
  3843. }
  3844. else
  3845. {
  3846. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  3847. Thread.Sleep(500);
  3848. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  3849. Thread.Sleep(500);
  3850. }
  3851. if (!mRet_VoltageFlag) return false;
  3852. if (!mRet_ElecFlag) return false;
  3853. log.Info("测量线程:设置电压电流完成!", true);
  3854. return true;
  3855. }
  3856. #endregion
  3857. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  3858. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  3859. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  3860. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息
  3861. public void SaveMeasDataPic(String picFullPath, float Mag, float pixelsize)
  3862. {
  3863. try
  3864. {
  3865. using (System.Drawing.Image img = Image.FromFile(picFullPath))
  3866. {
  3867. Bitmap bmp = new Bitmap(img.Width, img.Height);
  3868. using (Graphics g = Graphics.FromImage(bmp))
  3869. {
  3870. g.DrawImage(img, 0, 0, img.Width, img.Height);
  3871. String str = "Mag:" + Mag.ToString("0") + "X\tPixelSize:" + (pixelsize * 1000000).ToString("0.00") + "um";
  3872. Font font = new Font("宋体", 16, FontStyle.Bold);
  3873. SolidBrush sbrush = new SolidBrush(Color.LimeGreen);
  3874. g.DrawString(str, font, sbrush, new PointF(40, img.Height - 30));
  3875. }
  3876. System.Drawing.Imaging.BitmapData bmpData = bmp.LockBits(new Rectangle(0, 0, bmp.Width, bmp.Height), System.Drawing.Imaging.ImageLockMode.ReadOnly, System.Drawing.Imaging.PixelFormat.Format8bppIndexed);
  3877. Bitmap newBitmap = new Bitmap(img.Width, img.Height, bmpData.Stride, System.Drawing.Imaging.PixelFormat.Format8bppIndexed, bmpData.Scan0);
  3878. String path = Path.GetDirectoryName(picFullPath) +
  3879. Path.GetFileNameWithoutExtension(picFullPath) +
  3880. "_Data" + Path.GetExtension(picFullPath);
  3881. newBitmap.SetResolution(1, 1);
  3882. newBitmap.Save(path);
  3883. }
  3884. }
  3885. catch
  3886. {
  3887. log.Error("在测量图上显示放大倍数和像素大小信息失败", false);
  3888. }
  3889. }
  3890. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息 end
  3891. }
  3892. }