Measure.cs 71 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using WebManager;
  16. using OpenCvSharp;
  17. namespace MeasureThread
  18. {
  19. //图片模式
  20. public enum ImageMode
  21. {
  22. FIB,
  23. SEM
  24. }
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. public class ThreadStatusEventArgs
  28. {
  29. //状态
  30. public string State
  31. {
  32. get { return m_state; }
  33. set { m_state = value; }
  34. }
  35. private string m_state;
  36. //时间
  37. public DateTime Time
  38. {
  39. get { return m_time; }
  40. set { m_time = value; }
  41. }
  42. private DateTime m_time;
  43. //步骤代码
  44. public String Step_Code
  45. {
  46. get { return step_Code; }
  47. set { step_Code = value; }
  48. }
  49. private String step_Code;
  50. //其他消息
  51. public String Message
  52. {
  53. get { return this.message; }
  54. set { this.message = value; }
  55. }
  56. private String message;
  57. //孔名
  58. public String HoleName
  59. {
  60. get { return this.holeName; }
  61. set { this.holeName = value; }
  62. }
  63. private String holeName;
  64. //图片信息
  65. public class PictureInformation
  66. {
  67. public String Picture_FullPath
  68. {
  69. get { return picture_FullPath; }
  70. set { picture_FullPath = value; }
  71. }
  72. private String picture_FullPath;
  73. public double Work_Voltage
  74. {
  75. get { return work_Voltage; }
  76. set { work_Voltage = value; }
  77. }
  78. private double work_Voltage;
  79. public double Magnification
  80. {
  81. get { return magnification; }
  82. set { magnification = value; }
  83. }
  84. private double magnification;
  85. public double Work_Distance
  86. {
  87. get { return work_Distance; }
  88. set { work_Distance = value; }
  89. }
  90. private double work_Distance;
  91. public String Work_Status
  92. {
  93. get { return work_Status; }
  94. set { work_Status = value; }
  95. }
  96. private String work_Status;
  97. }
  98. //图片信息实例类
  99. public PictureInformation Picture_Information
  100. {
  101. get { return picture_Information; }
  102. set { picture_Information = value; }
  103. }
  104. private PictureInformation picture_Information;
  105. //图像信息
  106. public class ImageInformation
  107. {
  108. public int Method_Name
  109. {
  110. get { return method_Name; }
  111. set { method_Name = value; }
  112. }
  113. private int method_Name;
  114. public Source_Img_Degree_Direction SIDD;
  115. public Cut_Position CP;
  116. public Cut_Success CS;
  117. public Trapezoid_Top_Center_Position TTCP;
  118. public Auto_Foucs AF;
  119. public Auto_Stigmatic AS;
  120. public Center_Position_OffsetAngle_Direction CPOD;
  121. public Measure_Size MS;
  122. public ImageInformation()
  123. {
  124. SIDD = new Source_Img_Degree_Direction();
  125. CP = new Cut_Position();
  126. CS = new Cut_Success();
  127. TTCP = new Trapezoid_Top_Center_Position();
  128. AF = new Auto_Foucs();
  129. AS = new Auto_Stigmatic();
  130. CPOD = new Center_Position_OffsetAngle_Direction();
  131. MS = new Measure_Size();
  132. }
  133. //1-计算原始图像偏移角度及方向
  134. public class Source_Img_Degree_Direction
  135. {
  136. public Boolean Is_Image = false;
  137. public double Degree
  138. {
  139. get { return degree; }
  140. set { degree = value; }
  141. }
  142. private double degree;
  143. public int Direction
  144. {
  145. get { return direction; }
  146. set { direction = value; }
  147. }
  148. private int direction;
  149. public int State
  150. {
  151. get { return state; }
  152. set { state = value; }
  153. }
  154. private int state;
  155. }
  156. //2-计算切割点位置
  157. public class Cut_Position
  158. {
  159. public Boolean Is_Image = false;
  160. public double Offsetx
  161. {
  162. get { return offsetx; }
  163. set { offsetx = value; }
  164. }
  165. private double offsetx;
  166. public double Offsety
  167. {
  168. get { return offsety; }
  169. set { offsety = value; }
  170. }
  171. private double offsety;
  172. public int State
  173. {
  174. get { return state; }
  175. set { state = value; }
  176. }
  177. private int state;
  178. }
  179. //3-是否切割成功
  180. public class Cut_Success
  181. {
  182. public Boolean Is_Image = false;
  183. public int State
  184. {
  185. get { return state; }
  186. set { state = value; }
  187. }
  188. private int state;
  189. }
  190. //4-计算切割后图像梯形区域上边中心点坐标
  191. public class Trapezoid_Top_Center_Position
  192. {
  193. public Boolean Is_Image = false;
  194. public double TopCenterX
  195. {
  196. get { return topCenterX; }
  197. set { topCenterX = value; }
  198. }
  199. private double topCenterX;
  200. public double TopCenterY
  201. {
  202. get { return topCenterY; }
  203. set { topCenterY = value; }
  204. }
  205. private double topCenterY;
  206. public int State
  207. {
  208. get { return state; }
  209. set { state = value; }
  210. }
  211. private int state;
  212. }
  213. //5-自动对焦
  214. public class Auto_Foucs
  215. {
  216. public Boolean Is_Image = true;
  217. public String Img_Path
  218. {
  219. get { return img_Path; }
  220. set { img_Path = value; }
  221. }
  222. private String img_Path;
  223. }
  224. //6-自动像闪
  225. public class Auto_Stigmatic
  226. {
  227. public Boolean Is_Image = true;
  228. public String Img_Path
  229. {
  230. get { return img_Path; }
  231. set { img_Path = value; }
  232. }
  233. private String img_Path;
  234. }
  235. //7-计算切割面区域中心坐标,以及偏移角度及方向
  236. public class Center_Position_OffsetAngle_Direction
  237. {
  238. public Boolean Is_Image = false;
  239. public double CenterX
  240. {
  241. get { return centerX; }
  242. set { centerX = value; }
  243. }
  244. private double centerX;
  245. public double CenterY
  246. {
  247. get { return centerY; }
  248. set { centerY = value; }
  249. }
  250. private double centerY;
  251. public double Degree
  252. {
  253. get { return degree; }
  254. set { degree = value; }
  255. }
  256. private double degree;
  257. public int Direction
  258. {
  259. get { return direction; }
  260. set { direction = value; }
  261. }
  262. private int direction;
  263. public int State
  264. {
  265. get { return state; }
  266. set { state = value; }
  267. }
  268. private int state;
  269. }
  270. //8-测量尺寸
  271. public class Measure_Size
  272. {
  273. public Boolean Is_Image = false;
  274. public int State
  275. {
  276. get { return state; }
  277. set { state = value; }
  278. }
  279. private int state;
  280. }
  281. }
  282. //图像信息实例类
  283. public ImageInformation Image_Information
  284. {
  285. get { return image_Information; }
  286. set { image_Information = value; }
  287. }
  288. private ImageInformation image_Information;
  289. public ThreadStatusEventArgs(string a_State)
  290. {
  291. picture_Information = new PictureInformation();
  292. image_Information = new ImageInformation();
  293. }
  294. }
  295. public class CutHolesStatusEventArgs
  296. {
  297. public string State
  298. {
  299. get { return m_state; }
  300. set { m_state = value; }
  301. }
  302. private string m_state;
  303. public string HoleName
  304. {
  305. get { return m_holeName; }
  306. set { m_holeName = value; }
  307. }
  308. private string m_holeName;
  309. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  310. {
  311. this.m_state = a_state;
  312. this.m_holeName = a_holeName;
  313. }
  314. }
  315. public class Measure
  316. {
  317. /// <summary>
  318. /// 图像拉直算法
  319. /// </summary>
  320. /// <param name="Slope">倾斜角度</param>
  321. /// <param name="x0">圆心坐标x</param>
  322. /// <param name="y0">圆心坐标y</param>
  323. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  324. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  325. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  326. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  327. /// <returns></returns>
  328. public bool Straightening(double Slope, int x0, int y0, int x1, int y1, ref int Hx, ref int Hy)
  329. {
  330. try
  331. {
  332. double xr = x1 - x0;//倾斜图到中心的距离差x
  333. double yr = y1 - y0;//倾斜图到中心的距离差y
  334. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  335. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  336. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  337. double k_S = k - Slope;//通过夹角差求x2,y2
  338. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  339. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  340. if (Slope > 0 || Slope < 0)
  341. {
  342. Hx = x1 - x2;
  343. Hy = y1 - y2;
  344. }
  345. else
  346. {
  347. Hx = 0;
  348. Hy = 0;
  349. }
  350. return true;
  351. }
  352. catch (Exception)
  353. {
  354. return false;
  355. }
  356. }
  357. public WebResult wr = null;
  358. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  359. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  360. //定义一个全局的消息类
  361. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  362. //全局只有一个fatorySEM
  363. static FactoryHardware factorySEM = FactoryHardware.Instance;
  364. ISEMControl iSEM = factorySEM.ISEM;
  365. //@的作用是不用转义字符\\只打一个就行
  366. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  367. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  368. const String ImageName3 = @"ImageFIB600X2.tif";
  369. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  370. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  371. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  372. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  373. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  374. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  375. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  376. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  377. const String ElyDeposition = @"Deposition.ely"; //沉积
  378. const String ElyCrossSection = @"CrossSection.ely"; //切割
  379. const float fMin = (float)0.0000002; //单位是米
  380. int m_nWorkHoleNo = -1;
  381. //测量文件
  382. private MeasureFile m_measureFile;
  383. public MeasureFile MeasureFile
  384. {
  385. get { return this.m_measureFile; }
  386. set { this.m_measureFile = value; }
  387. }
  388. //测量的切割孔
  389. private List<MeasureData.CutHole> m_cutHoles;
  390. public List<MeasureData.CutHole> cutHoles
  391. {
  392. get { return this.m_cutHoles; }
  393. set { this.m_cutHoles = value; }
  394. }
  395. //工作文件夹
  396. private string m_WorkingFolder;
  397. public string WorkingFolder
  398. {
  399. get { return this.m_WorkingFolder; }
  400. set { this.m_WorkingFolder = value; }
  401. }
  402. //程序当前路径
  403. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  404. //线程状态
  405. private ThreadStatus m_ThreadStatus;
  406. public ThreadStatus TStatus
  407. {
  408. get { return this.m_ThreadStatus; }
  409. set { this.m_ThreadStatus = value; }
  410. }
  411. //测量参数
  412. private MeasureParam m_MsParam;
  413. public MeasureParam MeasParam
  414. {
  415. get { return this.m_MsParam; }
  416. set { this.m_MsParam = value; }
  417. }
  418. //
  419. //构造函数
  420. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  421. {
  422. MeasParam = new MeasureParam();
  423. TStatus = new ThreadStatus();
  424. cutHoles = new List<MeasureData.CutHole>();
  425. //配置远程连接
  426. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  427. }
  428. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  429. public bool InitMeas(MeasureFile a_measureFile)
  430. {
  431. m_measureFile = a_measureFile;
  432. List<CutHole> listHoles = m_measureFile.ListCutHole;
  433. foreach (CutHole h in listHoles)
  434. {
  435. if (h.SWITCH == true)
  436. {
  437. m_cutHoles.Add(h);
  438. }
  439. }
  440. if (m_cutHoles.Count == 0)
  441. return false;
  442. this.m_MsParam = m_measureFile.MParam;
  443. return true;
  444. }
  445. public void SendMsg(string step_code)
  446. {
  447. arg.State = step_code;
  448. SendThreadStatus(this, arg);
  449. }
  450. public void SendMsg1(string step_code)
  451. {
  452. arg.Step_Code = step_code;
  453. arg.Time = DateTime.Now;
  454. switch(step_code)
  455. {
  456. //拍照
  457. case "1-5":
  458. case "1-7":
  459. case "1-16":
  460. case "1-24":
  461. //电压、放大倍数、工作距离、位置信息、图片路径
  462. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  463. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  464. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  465. break;
  466. case "1-10":
  467. case "1-18":
  468. //获取偏移信息
  469. break;
  470. case "1-12":
  471. case "1-20":
  472. //验证移动准备性
  473. break;
  474. case "1-26":
  475. //取消电子束校正并初始化
  476. break;
  477. default:
  478. arg.State = "1";
  479. break;
  480. }
  481. SendThreadStatus(this, arg);
  482. }
  483. public void SendCutHoleMsg(string a_state, string a_holeName)
  484. {
  485. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  486. arg.HoleName = a_holeName;
  487. arg.State = a_state;
  488. SendCutHolesStatus(this, arg);
  489. }
  490. //测量流程
  491. public void DoMeasure()
  492. {
  493. //创建线程的测量状态的更新
  494. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  495. if (SendThreadStatus != null)
  496. {
  497. SendMsg("开始测量。");
  498. }
  499. //检查硬件连接是否正常
  500. if (!ConnectHardware())
  501. {
  502. SendMsg("连接硬件失败。");
  503. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  504. return;
  505. }
  506. SendMsg("硬件连接成功。");
  507. //设置工作文件夹
  508. if (!SetWorkingFolderStr())
  509. {
  510. SendMsg("设置工作文件夹失败");
  511. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  512. return;
  513. }
  514. SendMsg("创建工作文件路径为" + WorkingFolder);
  515. float[] firstPosition;
  516. for (int i = 0; i < m_cutHoles.Count; i++)
  517. {
  518. m_nWorkHoleNo = i;
  519. arg.HoleName = cutHoles[m_nWorkHoleNo].HoleName;
  520. if (i == 0)
  521. {
  522. SendMsg("第一个切孔开始测量");
  523. //切孔操作-开始
  524. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  525. firstPosition = iSEM.GetStagePosition();
  526. //第一个孔的测试
  527. FirstHole();
  528. //切孔操作-完成
  529. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  530. }
  531. else
  532. {
  533. //非第一个孔的测试
  534. SendMsg("第" + i.ToString() + "个切孔开始测量");
  535. //切孔操作-开始
  536. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  537. OtherHole();
  538. //切孔操作-完成
  539. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  540. }
  541. }
  542. }
  543. //检查硬件连接是否正常
  544. public bool ConnectHardware()
  545. {
  546. //返回硬件的连接状态
  547. return iSEM.ConnectStatus();
  548. }
  549. //设置工作文件夹
  550. public bool SetWorkingFolderStr()
  551. {
  552. WorkingFolder = m_measureFile.FilePath;
  553. return true;
  554. }
  555. //插入PT针
  556. public bool InsertPT()
  557. {
  558. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  559. //SendMsg("调用宏插入PT针宏文件" + fn);
  560. iSEM.CMDMCFFilename(fn);
  561. //延时1s??
  562. Thread.Sleep(1000);
  563. return true;
  564. }
  565. //撤出PT针
  566. public bool RetractPT()
  567. {
  568. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  569. //SendMsg("调用宏撤出PT针宏文件" + fn);
  570. iSEM.CMDMCFFilename(fn);
  571. //延时1s??
  572. Thread.Sleep(1000);
  573. return true;
  574. }
  575. //PT沉积
  576. public bool PTWork()
  577. {
  578. //执行PT沉积的ELY文件
  579. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  580. //SendMsg("执行PT沉积Ely文件:" + fn);
  581. if (!ExcuteEly(fn))
  582. {
  583. return false;
  584. }
  585. //等待沉积完成
  586. while (true)
  587. {
  588. Thread.Sleep(10000);
  589. if (iSEM.GetFIBMode() == 0)
  590. {
  591. break;
  592. }
  593. }
  594. return true;
  595. }
  596. //FIB切割
  597. public bool FIBWork()
  598. {
  599. //执行PT沉积的ELY文件
  600. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  601. //SendMsg("执行FIB切割Ely文件:" + fn);
  602. if (!ExcuteEly(fn))
  603. {
  604. return false;
  605. }
  606. //等待切割完成
  607. while (true)
  608. {
  609. Thread.Sleep(10000);
  610. if (iSEM.GetFIBMode() == 0)
  611. {
  612. break;
  613. }
  614. }
  615. return true;
  616. }
  617. //执行ELY文件的步骤
  618. public bool ExcuteEly(string a_filename)
  619. {
  620. //执行ELy文件有三个动作
  621. //1. 选择ELY文件
  622. //SendMsg("选择ELY文件");
  623. if (!iSEM.CmdFIBLoadELY(a_filename))
  624. {
  625. //SendMsg("选择ELY文件失败");
  626. return false;
  627. }
  628. Thread.Sleep(1000);
  629. //2. 确认ELY文件
  630. //SendMsg("确认ELY文件");
  631. if (!iSEM.CmdFIBEXPOSUREELY())
  632. {
  633. //SendMsg("确认ELY文件失败");
  634. return false;
  635. }
  636. Thread.Sleep(1000);
  637. //3. 执行ELY文件
  638. //SendMsg("执行ELY文件");
  639. if (!iSEM.CmdFIBSTARTELY())
  640. {
  641. //SendMsg("执行ELY文件失败");
  642. return false;
  643. }
  644. Thread.Sleep(1000);
  645. return true;
  646. }
  647. /// <summary>
  648. ///13. 自动 定位功能,沉积
  649. /// </summary>
  650. /// <returns></returns>
  651. public bool GetPoistion(Boolean isFirst)
  652. {
  653. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  654. int state = 0;
  655. //SendMsg("自动定位");
  656. //13.自动定位切割
  657. {
  658. //1.控制SEM放大600X
  659. arg.State = "SEM";
  660. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  661. {
  662. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  663. SendMsg("1-2");
  664. return false;
  665. }
  666. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  667. SendMsg("1-2");
  668. //2.控制SEM自动对焦、亮度、对比度
  669. if (m_measureFile.MParam.FocusMode==1)//手动
  670. {
  671. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  672. {
  673. arg.Message = "自动对焦完成";
  674. SendMsg("1-3");
  675. //return true;
  676. }
  677. else
  678. {
  679. arg.Message = "自动对焦失败";
  680. SendMsg("1-3");
  681. return false;
  682. }
  683. }
  684. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  685. {
  686. //郝工增加自动对焦算法
  687. }
  688. else //客户自动
  689. {
  690. //后期和客户对接接口
  691. List<string> filenames = new List<string>();
  692. String retfilename = wr.Img_Auto_Focus(filenames);
  693. }
  694. //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
  695. if (!isFirst)
  696. {
  697. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  698. {
  699. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  700. SendMsg("1-4");
  701. return false;
  702. }
  703. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  704. SendMsg("1-4");
  705. Thread.Sleep(5000);
  706. }
  707. //4.控制SEM拍照,5保存照片
  708. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  709. arg.Picture_Information.Picture_FullPath = fileName1;
  710. arg.Picture_Information.Work_Status = "SEM";
  711. if (!GetImage(ImageMode.SEM, fileName1))
  712. {
  713. arg.Message = "SEM拍照失败";
  714. SendMsg("1-5");
  715. return false;
  716. }
  717. arg.Message = "SEM拍照成功";
  718. SendMsg("1-5");
  719. Thread.Sleep(3000);
  720. //判断是否为仅拍照,不是则执行FIB操作
  721. if (!m_MsParam.Is_Photograph)
  722. {
  723. //6.设置FIB拍照参数——扫描时间、束流等
  724. //7.控制FIB自动亮度、对比度
  725. if (!iSEM.CmdFIBModeFIB())
  726. {
  727. arg.Message = "FIB模式切换失败";
  728. SendMsg("1-6");
  729. return false;
  730. }
  731. arg.Message = "FIB模式切换成功";
  732. SendMsg("1-6");
  733. Thread.Sleep(10000);
  734. //8.控制FIB拍照
  735. //9.保存照片
  736. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  737. arg.Picture_Information.Picture_FullPath = fileName1;
  738. arg.Picture_Information.Work_Status = "FIB";
  739. if (!GetImage(ImageMode.FIB, fileName2))
  740. {
  741. arg.Message = "FIB拍照失败";
  742. SendMsg("1-7");
  743. return false;
  744. }
  745. arg.Message = "FIB拍照成功";
  746. SendMsg("1-7");
  747. Thread.Sleep(3000);
  748. //这里需要确认是否对FIB的参数进行设置:电压和放大倍数等
  749. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  750. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  751. {
  752. arg.Message = "样品台移动到指定位置";
  753. SendMsg("1-8");
  754. }
  755. else
  756. {
  757. wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  758. if (state == 1)
  759. {
  760. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  761. if (!iSEM.MoveStageXY(x1, y1))
  762. {
  763. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  764. SendMsg("1-8");
  765. return false;
  766. }
  767. //判断是否移动完成
  768. while (true)
  769. {
  770. Thread.Sleep(5000);
  771. if (iSEM.GetStageIs() == 0)
  772. {
  773. break;
  774. }
  775. }
  776. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  777. SendMsg("1-8");
  778. }
  779. else
  780. {
  781. arg.Message = "样品台移动失败";
  782. SendMsg("1-8");
  783. return false;
  784. }
  785. }
  786. //11.自动工具样品类型参数确定是否需要PT沉积
  787. if (m_MsParam.PT)
  788. {
  789. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  790. //第10步已经移动好位置
  791. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  792. x0 = iSEM.GetStageAtX();
  793. y0 = iSEM.GetStageAtY();
  794. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  795. {
  796. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
  797. SendMsg("1-9");
  798. return false;
  799. }
  800. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
  801. SendMsg("1-9");
  802. //3. 根据坐标进行PT沉积
  803. if (!PTWork())
  804. {
  805. arg.Message = "PT沉积失败";
  806. SendMsg("1-10");
  807. return false;
  808. }
  809. arg.Message = "PT沉积成功";
  810. SendMsg("1-10");
  811. }
  812. }
  813. //12.根据梯形坐标控制FIB调整到中心位置
  814. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  815. //以上两步已经将程序移动到11内部去做
  816. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  817. float[] firstPosition = iSEM.GetStagePosition();
  818. //这里要调用文件保存功能
  819. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  820. + firstPosition[1].ToString() + ","
  821. + firstPosition[2].ToString() + ","
  822. + firstPosition[3].ToString() + ","
  823. + firstPosition[4].ToString() + ","
  824. + firstPosition[5].ToString() + ")";
  825. SendMsg("1-11");
  826. }
  827. return true;
  828. }
  829. /// <summary>
  830. /// 14. FIB切割
  831. /// </summary>
  832. /// <returns></returns>
  833. public bool FIBCross()
  834. {
  835. //14.自动控制FIB切割
  836. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  837. //2.控制FIB进行切割
  838. //以上1、2步全部用ELY文件代替
  839. if (!FIBWork())
  840. {
  841. arg.Message = "FIB切割失败";
  842. SendMsg("1-12");
  843. return false;
  844. }
  845. arg.Message = "FIB切割成功";
  846. SendMsg("1-12");
  847. Thread.Sleep(5000);
  848. //3.控制FIB拍照600X
  849. //这里如何控制
  850. //4.保存图片
  851. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  852. arg.Picture_Information.Picture_FullPath = fileName3;
  853. arg.Picture_Information.Work_Status = "FIB";
  854. if (!GetImage(ImageMode.FIB, fileName3))
  855. {
  856. arg.Message = "FIB拍照失败";
  857. SendMsg("1-14");
  858. return false;
  859. }
  860. arg.Message = "FIB拍照成功";
  861. SendMsg("1-14");
  862. Thread.Sleep(3000);
  863. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  864. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  865. return true;
  866. }
  867. /// <summary>
  868. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  869. /// </summary>
  870. /// <returns></returns>
  871. public bool FindCross()
  872. {
  873. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  874. float angle = 0;
  875. int direction = 0;
  876. int state = 0;
  877. //1.控制SEM放大到300倍
  878. arg.State = "SEM";
  879. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  880. {
  881. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString("0.0") + "倍失败";
  882. SendMsg("1-18");
  883. return false;
  884. }
  885. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString("0.0") + "倍成功";
  886. SendMsg("1-18");
  887. //2.控制SEM自动对焦、亮度、对比度-接口
  888. if (m_measureFile.MParam.FocusMode == 1)//手动
  889. {
  890. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  891. {
  892. arg.Message = "自动对焦完成";
  893. SendMsg("1-19");
  894. //return true;
  895. }
  896. else
  897. {
  898. arg.Message = "自动对焦失败";
  899. SendMsg("1-19");
  900. return false;
  901. }
  902. }
  903. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  904. {
  905. //郝工增加自动对焦算法
  906. }
  907. else //客户自动
  908. {
  909. //后期和客户对接接口
  910. List<string> filenames = new List<string>();
  911. String retfilename = wr.Img_Auto_Focus(filenames);
  912. }
  913. Thread.Sleep(5000);
  914. //原来这里有3是角度补偿
  915. //3.控制SEM拍照
  916. String fileName4 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
  917. arg.Picture_Information.Picture_FullPath = fileName4;
  918. arg.Picture_Information.Work_Status = "SEM";
  919. if (!GetImage(ImageMode.SEM, fileName4))
  920. {
  921. arg.Message = "SEM拍照失败";
  922. SendMsg("1-20");
  923. return false;
  924. }
  925. arg.Message = "SEM拍照成功";
  926. SendMsg("1-20");
  927. Thread.Sleep(3000);
  928. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  929. //5.根据坐标控制SEM移动到切孔位置,居中
  930. //这里是否用到拉直操作,我没有加
  931. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  932. {
  933. arg.Message = "样品台移动到指定位置";
  934. SendMsg("1-21");
  935. }
  936. else
  937. {
  938. wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
  939. if (state == 1)
  940. {
  941. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  942. if (!iSEM.MoveStageXY(x1, y1))
  943. {
  944. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  945. SendMsg("1-21");
  946. return false;
  947. }
  948. //判断是否移动完成
  949. while (true)
  950. {
  951. Thread.Sleep(5000);
  952. if (iSEM.GetStageIs() == 0)
  953. {
  954. break;
  955. }
  956. }
  957. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  958. SendMsg("1-21");
  959. }
  960. else
  961. {
  962. arg.Message = "样品台移动失败";
  963. SendMsg("1-21");
  964. return false;
  965. }
  966. }
  967. if (!iSEM.SetScanRotation(angle))
  968. {
  969. arg.Message = "调整角度失败";
  970. SendMsg("1-22");
  971. return false;
  972. }
  973. arg.Message = "调整角度成功";
  974. SendMsg("1-22");
  975. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  976. //float x5 = iSEM.GetStageAtX();
  977. //float y5 = iSEM.GetStageAtY();
  978. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  979. //{
  980. // return false;
  981. //}
  982. return true;
  983. }
  984. /// <summary>
  985. /// 17.自动控制SEM拍截面照
  986. /// </summary>
  987. /// <returns></returns>
  988. public bool ShotSection()
  989. {
  990. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  991. int state = 0;
  992. //切换到SEM模式
  993. if (!iSEM.CmdFIBModeSEM())
  994. {
  995. //SendMsg("SEM模式切换失败");
  996. return false;
  997. }
  998. arg.State = "SEM";
  999. Thread.Sleep(10000);
  1000. //1、放大6000倍
  1001. if (!iSEM.SetMagnification(6000))
  1002. {
  1003. arg.Message = "放大倍数调整失败";
  1004. SendMsg("1-25");
  1005. return false;
  1006. }
  1007. arg.Message = "放大倍数调整成功";
  1008. SendMsg("1-25");
  1009. //2.控制SEM自动对焦、亮度、对比度-接口
  1010. if (m_measureFile.MParam.FocusMode == 1)//手动
  1011. {
  1012. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  1013. {
  1014. arg.Message = "自动对焦完成";
  1015. SendMsg("1-26");
  1016. //return true;
  1017. }
  1018. else
  1019. {
  1020. arg.Message = "自动对焦失败";
  1021. SendMsg("1-26");
  1022. return false;
  1023. }
  1024. }
  1025. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  1026. {
  1027. //郝工增加自动对焦算法
  1028. }
  1029. else //客户自动
  1030. {
  1031. //后期和客户对接接口
  1032. List<string> filenames = new List<string>();
  1033. String retfilename = wr.Img_Auto_Focus(filenames);
  1034. }
  1035. //3、设置SEM补偿角度
  1036. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1037. {
  1038. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1039. SendMsg("1-27");
  1040. return false;
  1041. }
  1042. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1043. SendMsg("1-27");
  1044. Thread.Sleep(5000);
  1045. //4、拍照,5、保存照片
  1046. String fileName5 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
  1047. arg.Picture_Information.Picture_FullPath = fileName5;
  1048. arg.Picture_Information.Work_Status = "SEM";
  1049. if (!GetImage(ImageMode.SEM, fileName5))
  1050. {
  1051. arg.Message = "SEM拍照失败";
  1052. SendMsg("1-28");
  1053. return false;
  1054. }
  1055. arg.Message = "SEM拍照成功";
  1056. SendMsg("1-28");
  1057. Thread.Sleep(3000);
  1058. //6、获取偏移坐标,7、移动到位
  1059. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1060. {
  1061. arg.Message = "样品台移动到指定位置";
  1062. SendMsg("1-29");
  1063. }
  1064. else
  1065. {
  1066. // wr.Img_Cut_Position(fileName5, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  1067. if (state == 1)
  1068. {
  1069. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1070. if (!iSEM.MoveStageXY(x1, y1))
  1071. {
  1072. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1073. SendMsg("1-29");
  1074. return false;
  1075. }
  1076. //判断是否移动完成
  1077. while (true)
  1078. {
  1079. Thread.Sleep(5000);
  1080. if (iSEM.GetStageIs() == 0)
  1081. {
  1082. break;
  1083. }
  1084. }
  1085. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1086. SendMsg("1-29");
  1087. }
  1088. else
  1089. {
  1090. arg.Message = "样品台移动失败";
  1091. SendMsg("1-8");
  1092. return false;
  1093. }
  1094. }
  1095. //8、验证移动准确性
  1096. //9、
  1097. return true;
  1098. }
  1099. public bool CommonWork()
  1100. {
  1101. SendMsg("插入PT针");
  1102. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1103. //if (firstHole.PT == true)
  1104. {
  1105. if (!InsertPT())
  1106. {
  1107. SendMsg("插入PT针失败");
  1108. return false;
  1109. }
  1110. }
  1111. //13. 自动 定位功能
  1112. SendMsg("自动定位切割位置");
  1113. if (!GetPoistion(false))
  1114. {
  1115. SendMsg("自动定位切割位置失败");
  1116. return false;
  1117. }
  1118. //14.自动控制FIB切割
  1119. SendMsg("FIB切割");
  1120. if (!FIBCross())
  1121. {
  1122. SendMsg("FIB切割失败");
  1123. return false;
  1124. }
  1125. //{
  1126. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1127. // //2.控制FIB进行切割
  1128. // //3.控制FIB拍照600X
  1129. // //4.保存图片
  1130. // {
  1131. // //1.设置图片名称
  1132. // //2.保存图片3
  1133. // String fileName3 = WorkingFolder + ImageName3;
  1134. // if (!GetImage(ImageMode.FIB, fileName3))
  1135. // {
  1136. // return false;
  1137. // }
  1138. // }
  1139. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1140. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1141. //}
  1142. //15.根据样品类型决定是否撤出PT针
  1143. SendMsg("撤出PT针");
  1144. //if (firstHole.PT == false)
  1145. //{
  1146. if (!RetractPT())
  1147. {
  1148. SendMsg("撤出PT针失败");
  1149. return false;
  1150. }
  1151. //}
  1152. // 16.找到切割位置
  1153. SendMsg("找到切割位置");
  1154. //17.自动控制SEM拍截面照
  1155. SendMsg("观测层高");
  1156. SendMsg("切换SEM控制");
  1157. if (!iSEM.CmdFIBModeSEM())
  1158. {
  1159. SendMsg("SEM模式切换失败");
  1160. return false;
  1161. }
  1162. Thread.Sleep(10000);
  1163. SendMsg("放大6000倍");
  1164. if (!iSEM.SetMagnification(6000))
  1165. {
  1166. SendMsg("放大倍数调整失败");
  1167. return false;
  1168. }
  1169. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1170. {
  1171. SendMsg("拍摄照片完成");
  1172. //return true;
  1173. }
  1174. else
  1175. {
  1176. SendMsg("拍摄照片失败");
  1177. return false;
  1178. }
  1179. SendMsg("图像校正36度");
  1180. //3.设置SEM角度补偿cos36度
  1181. if (!TiltCorrection(36))
  1182. {
  1183. return false;
  1184. }
  1185. Thread.Sleep(3000);
  1186. string fn;
  1187. //用宏抓一般图
  1188. Thread.Sleep(5000);
  1189. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1190. SendMsg("用宏抓一般图" + fn);
  1191. iSEM.CMDMCFFilename(fn);
  1192. //延时1s??
  1193. Thread.Sleep(5000);
  1194. //用宏抓好图
  1195. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1196. SendMsg("用宏抓好图" + fn);
  1197. iSEM.CMDMCFFilename(fn);
  1198. //延时1s??
  1199. Thread.Sleep(30000);
  1200. Thread.Sleep(10000);
  1201. WorkingFolder = m_measureFile.FilePath;
  1202. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1203. SendMsg("SEM拍照存储到" + fileName6);
  1204. if (!GetImage(ImageMode.SEM, fileName6))
  1205. {
  1206. SendMsg("SEM拍照失败");
  1207. return false;
  1208. }
  1209. //用宏抓标志图
  1210. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1211. SendMsg("用宏抓标志图" + fn);
  1212. iSEM.CMDMCFFilename(fn);
  1213. //延时1s??
  1214. Thread.Sleep(30000);
  1215. //恢复简单抓图
  1216. Thread.Sleep(5000);
  1217. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1218. SendMsg("用宏抓一般图" + fn);
  1219. iSEM.CMDMCFFilename(fn);
  1220. SendMsg("所有图结束");
  1221. return true;
  1222. }
  1223. //第一个孔的测试过程
  1224. public bool FirstHole()
  1225. {
  1226. MeasureData.CutHole firstHole = m_cutHoles[0];
  1227. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1228. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1229. {
  1230. if (!InsertPT())
  1231. {
  1232. arg.Message = "插入PT针失败";
  1233. SendMsg("1-0");
  1234. return false;
  1235. }
  1236. arg.Message = "插入PT针成功";
  1237. SendMsg("1-0");
  1238. }
  1239. //13. 自动 定位功能
  1240. if (!GetPoistion(true))
  1241. {
  1242. arg.Message = "自动定位切割位置失败";
  1243. SendMsg("1-1");
  1244. return false;
  1245. }
  1246. arg.Message = "自动定位切割位置成功";
  1247. SendMsg("1-1");
  1248. //14.自动控制FIB切割
  1249. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1250. {
  1251. if (!FIBCross())
  1252. {
  1253. arg.Message = "FIB切割失败";
  1254. SendMsg("1-16");
  1255. return false;
  1256. }
  1257. arg.Message = "FIB切割成功";
  1258. SendMsg("1-16");
  1259. }
  1260. //15.根据样品类型决定是否撤出PT针
  1261. if(m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1262. {
  1263. if (!RetractPT())
  1264. {
  1265. arg.Message = "撤出PT针失败";
  1266. SendMsg("1-17");
  1267. return false;
  1268. }
  1269. arg.Message = "撤出PT针成功";
  1270. SendMsg("1-17");
  1271. }
  1272. // 16.找到切割位置
  1273. if(m_MsParam.Is_Photograph == false)
  1274. {
  1275. if (!FindCross())
  1276. {
  1277. arg.Message = "找到切割位置失败";
  1278. SendMsg("1-24");
  1279. return false;
  1280. }
  1281. arg.Message = "找到切割位置成功";
  1282. SendMsg("1-24");
  1283. }
  1284. //17.自动控制SEM拍截面照
  1285. if(m_MsParam.Is_Photograph == false)
  1286. {
  1287. if (!ShotSection())
  1288. {
  1289. arg.Message = "自动控制SEM拍截面照失败";
  1290. SendMsg("1-33");
  1291. return false;
  1292. }
  1293. arg.Message = "自动控制SEM拍截面照成功";
  1294. SendMsg("1-33");
  1295. }
  1296. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1297. //{
  1298. // SendMsg("拍摄照片完成");
  1299. // //return true;
  1300. //}
  1301. //else
  1302. //{
  1303. // SendMsg("拍摄照片失败");
  1304. // return false;
  1305. //}
  1306. //SendMsg("图像校正36度");
  1307. ////3.设置SEM角度补偿cos36度
  1308. //if (!TiltCorrection(36))
  1309. //{
  1310. // return false;
  1311. //}
  1312. //Thread.Sleep(3000);
  1313. string fn;
  1314. //用宏抓一般图
  1315. Thread.Sleep(5000);
  1316. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1317. SendMsg("用宏抓一般图" + fn);
  1318. iSEM.CMDMCFFilename(fn);
  1319. //延时1s??
  1320. Thread.Sleep(5000);
  1321. //用宏抓好图
  1322. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1323. SendMsg("用宏抓好图" + fn);
  1324. iSEM.CMDMCFFilename(fn);
  1325. //延时1s??
  1326. Thread.Sleep(30000);
  1327. Thread.Sleep(10000);
  1328. WorkingFolder = m_measureFile.FilePath;
  1329. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1330. SendMsg("SEM拍照存储到" + fileName6);
  1331. if (!GetImage(ImageMode.SEM, fileName6))
  1332. {
  1333. SendMsg("SEM拍照失败");
  1334. return false;
  1335. }
  1336. //用宏抓标志图
  1337. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1338. SendMsg("用宏抓标志图" + fn);
  1339. iSEM.CMDMCFFilename(fn);
  1340. //延时1s??
  1341. Thread.Sleep(30000);
  1342. Thread.Sleep(5000);
  1343. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1344. SendMsg("用宏抓一般图" + fn);
  1345. iSEM.CMDMCFFilename(fn);
  1346. //延时1s??
  1347. Thread.Sleep(5000);
  1348. SendMsg("所有图结束");
  1349. ////17.自动控制SEM拍截面照
  1350. //{
  1351. // //1.控制SEM放大到指定参数大小范围,6000x
  1352. // if (!iSEM.SetMagnification(6000))
  1353. // {
  1354. // return false;
  1355. // }
  1356. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1357. // if (!MeasParam.FocusMode)
  1358. // {
  1359. // //弹出手动对焦的窗口
  1360. // }
  1361. // else
  1362. // {
  1363. // //调用自动对焦模块
  1364. // }
  1365. // //3.设置SEM角度补偿cos36度
  1366. // if (!TiltCorrection(36))
  1367. // {
  1368. // return false;
  1369. // }
  1370. // //4.控制SEM拍照
  1371. // //5.保存照片4
  1372. // String fileName5 = WorkingFolder + ImageName5;
  1373. // if (!GetImage(ImageMode.SEM, fileName5))
  1374. // {
  1375. // return false;
  1376. // }
  1377. // //6.将照片传给客户,获取偏移坐标
  1378. // float x6 = 0, y6 = 0;
  1379. // float angle1 = 0;
  1380. // float mage = 10000;
  1381. // //7.根据坐标控制SEM移动到分析位置
  1382. // if (!iSEM.MoveStageXY(x6, y6))
  1383. // {
  1384. // return false;
  1385. // }
  1386. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1387. // float x7 = iSEM.GetStageAtX();
  1388. // float y7 = iSEM.GetStageAtY();
  1389. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1390. // {
  1391. // return false;
  1392. // }
  1393. // //9.控制SEM平行校正,并记录校正前初始值
  1394. // float foldAnagle = iSEM.GetScanRotation();
  1395. // if (foldAnagle == float.NaN)
  1396. // {
  1397. // return false;
  1398. // }
  1399. // if (!iSEM.SetScanRotation(angle1))
  1400. // {
  1401. // return false;
  1402. // }
  1403. // //10.控制SEM放大到指定参数大小范围
  1404. // if (!iSEM.SetMagnification(mage))
  1405. // {
  1406. // return false;
  1407. // }
  1408. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1409. // if (!MeasParam.FocusMode)
  1410. // {
  1411. // //弹出手动对焦的窗口
  1412. // }
  1413. // else
  1414. // {
  1415. // //调用自动对焦模块
  1416. // }
  1417. // //12.控制SEM对分析位置拍照
  1418. // String fileName6 = WorkingFolder + ImageName6;
  1419. // if (!GetImage(ImageMode.SEM, fileName6))
  1420. // {
  1421. // return false;
  1422. // }
  1423. // //13.保存照片
  1424. // //14.控制SEM取消电子束校正,回到初始值
  1425. // if (!iSEM.SetScanRotation(foldAnagle))
  1426. // {
  1427. // return false;
  1428. // }
  1429. //}
  1430. ////18.自动层高分析
  1431. //{
  1432. // //1.获取SEM Pixel Size给客户传入参数
  1433. // if (iSEM.GetPixelSize() == float.NaN)
  1434. // {
  1435. // return false;
  1436. // }
  1437. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1438. //}
  1439. ////19.自动能谱分析
  1440. //{
  1441. // //1. 确定能谱位置
  1442. // //2. 控制牛津打能谱
  1443. // //3. 能谱分析——面扫+线扫描
  1444. //}
  1445. return true;
  1446. }
  1447. //非第一个孔的测试过程
  1448. public void OtherHole()
  1449. {
  1450. //for (int i = 1; i < m_cutHoles.Count; i++)
  1451. //{
  1452. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1453. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1454. //1. 初始化
  1455. {
  1456. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1457. //读取图像冻结状态
  1458. float ffrozen = iSEM.GetImageFrozen();
  1459. if (ffrozen == float.NaN)
  1460. {
  1461. return;
  1462. }
  1463. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1464. {
  1465. SendMsg("样品台恢复到水平");
  1466. //return true;
  1467. }
  1468. else
  1469. {
  1470. SendMsg("禁止样品台恢复到水平");
  1471. return;
  1472. }
  1473. //2. 调节样品1号孔的样品台6轴坐标
  1474. //3. 将样品1号孔坐标2存入数据库
  1475. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1476. if (!iSEM.SetStageGotoT(0))
  1477. {
  1478. return;
  1479. }
  1480. while (true)
  1481. {
  1482. Thread.Sleep(10000);
  1483. if (iSEM.GetStageIs() == 0)
  1484. {
  1485. break;
  1486. }
  1487. }
  1488. //5. 获取光镜2号孔XY坐标
  1489. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1490. //6. 根据光镜坐标控制样品台移动
  1491. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1492. {
  1493. SendMsg("移动失败");
  1494. }
  1495. while (true)
  1496. {
  1497. Thread.Sleep(10000);
  1498. if (iSEM.GetStageIs() == 0)
  1499. {
  1500. break;
  1501. }
  1502. }
  1503. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1504. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1505. {
  1506. SendMsg("样品台旋转");
  1507. //return true;
  1508. }
  1509. else
  1510. {
  1511. SendMsg("禁止样品台旋转");
  1512. return;
  1513. }
  1514. if (!iSEM.SetStageGotoT(54))
  1515. {
  1516. return;
  1517. }
  1518. while (true)
  1519. {
  1520. Thread.Sleep(10000);
  1521. if (iSEM.GetStageIs() == 0)
  1522. {
  1523. break;
  1524. }
  1525. }
  1526. }
  1527. SendMsg("拉直操作");
  1528. SendMsg("其他操作与1号孔操作一致");
  1529. if (!CommonWork())
  1530. {
  1531. return;
  1532. }
  1533. //2. 定位切割
  1534. {
  1535. //1. 拉直操作
  1536. {
  1537. //1.1 控制SEM进行拍照
  1538. //1.2 图片传给客户,返回偏移角度
  1539. //1.3 根据返回角度,控制样品台转动
  1540. }
  1541. //2. 与1号孔13步相同
  1542. }
  1543. //3. 以后步骤与1号孔以后步骤一致
  1544. //}
  1545. }
  1546. //角度补偿
  1547. public bool TiltCorrection(float a_fAngle)
  1548. {
  1549. //记录原来电镜的状态
  1550. // bool bTilt = false;
  1551. //float fOldTilt = iSEM.GetTiltCorrection();
  1552. //if (fOldTilt == float.NaN)
  1553. //{
  1554. // return false;
  1555. //}
  1556. //else if (fOldTilt == 1)
  1557. //{
  1558. // bTilt = true;
  1559. //}
  1560. //else if (fOldTilt == 0)
  1561. //{
  1562. // bTilt = false;
  1563. //}
  1564. //float fOldAngle = iSEM.GetTiltAngle();
  1565. //if (fOldAngle == float.NaN)
  1566. //{
  1567. // return false;
  1568. //}
  1569. //开启校正
  1570. SendMsg("开启校正");
  1571. if (!iSEM.SetTiltAngleOn())
  1572. {
  1573. return false;
  1574. }
  1575. //设置校正角度
  1576. //if (!iSEM.SetTiltAngle(fOldAngle))
  1577. //{
  1578. // return false;
  1579. //}
  1580. //恢复原始状态
  1581. SendMsg("校正角度"+ a_fAngle.ToString());
  1582. if (!iSEM.SetTiltAngle(a_fAngle))
  1583. {
  1584. return false;
  1585. }
  1586. //if (bTilt)
  1587. //{
  1588. // if (!iSEM.SetTiltCorrectionOn())
  1589. // {
  1590. // return false;
  1591. // }
  1592. //}
  1593. //else
  1594. //{
  1595. // if (!iSEM.SetTiltCorrectionOff())
  1596. // {
  1597. // return false;
  1598. // }
  1599. //}
  1600. return true;
  1601. }
  1602. //拍图
  1603. public bool GetImage(ImageMode a_mode, String a_fileName)
  1604. {
  1605. //1. 图像解冻
  1606. float foldFrozen = iSEM.GetImageFrozen();
  1607. if (foldFrozen == float.NaN)
  1608. {
  1609. return false;
  1610. }
  1611. if (!iSEM.ImageLive())
  1612. {
  1613. return false;
  1614. }
  1615. //2. 确认图像模式
  1616. if (ImageMode.SEM == a_mode)
  1617. {
  1618. if (!iSEM.CmdFIBModeSEM())
  1619. {
  1620. return false;
  1621. }
  1622. }
  1623. else if (ImageMode.FIB == a_mode)
  1624. {
  1625. if (!iSEM.CmdFIBModeFIB())
  1626. {
  1627. return false;
  1628. }
  1629. }
  1630. else
  1631. {
  1632. return false;
  1633. }
  1634. //3. 获取分辨率
  1635. int[] ImageSize = iSEM.GetImageStore();
  1636. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1637. {
  1638. return false;
  1639. }
  1640. short width = (short)ImageSize[0];
  1641. short height = (short)ImageSize[1];
  1642. //4. 抓图
  1643. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1644. {
  1645. return false;
  1646. }
  1647. //5. 恢复初始状态
  1648. if (foldFrozen == 0)
  1649. {
  1650. if (!iSEM.ImageLive())
  1651. {
  1652. return false;
  1653. }
  1654. }
  1655. else if (foldFrozen == 1)
  1656. {
  1657. if (!iSEM.ImageFrozen())
  1658. {
  1659. return false;
  1660. }
  1661. }
  1662. return true;
  1663. }
  1664. //自动聚焦
  1665. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  1666. {
  1667. a_nWd = 0;
  1668. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1669. if (a_param == null)
  1670. {
  1671. return false;
  1672. }
  1673. string path = a_param.Path;
  1674. if (!Directory.Exists(path))
  1675. {
  1676. return false;
  1677. }
  1678. string path_coarse = a_param.Path + "\\Coarse";
  1679. if (!Directory.Exists(path_coarse))
  1680. {
  1681. Directory.CreateDirectory(path_coarse);
  1682. }
  1683. string path_fine = a_param.Path + "\\Fine";
  1684. if (!Directory.Exists(path_fine))
  1685. {
  1686. Directory.CreateDirectory(path_fine);
  1687. }
  1688. //1. 拍照
  1689. //1.1, 粗拍照
  1690. //1.1.1, 根据参数计算拍照次数
  1691. double nUp = a_param.UP * 100.0 ;
  1692. double nDown = a_param.Down * 100.0;
  1693. double nStep = a_param.Step * 100.0;
  1694. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  1695. SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  1696. //粗拍照
  1697. for (int i = 0; i < nTimes; i++)
  1698. {
  1699. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  1700. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  1701. Thread.Sleep(3000);
  1702. int swd = cWd / 100;
  1703. SendMsg("wd = " + swd.ToString() +"um");
  1704. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  1705. if (!GetImage(ImageMode.SEM, fileName))
  1706. {
  1707. return false;
  1708. }
  1709. Thread.Sleep(5000);
  1710. }
  1711. //1.2, 选定细拍照的工作距离
  1712. int CorWd;
  1713. ChooseBest(path_coarse,out CorWd);
  1714. a_nWd = CorWd;
  1715. SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  1716. //1.3, 细拍照
  1717. if ( (CorWd - a_param.Range * 100.0) <=0)
  1718. {
  1719. return false;
  1720. }
  1721. double nfUp = CorWd - a_param.Range * 100.0;
  1722. double nfStep = a_param.fStep * 100.0;
  1723. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  1724. SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  1725. for (int i = 0; i < nfTimes; i++)
  1726. {
  1727. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  1728. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  1729. Thread.Sleep(3000);
  1730. int swd = cWd / 100;
  1731. SendMsg("wd = " + swd.ToString() + "um");
  1732. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  1733. if (!GetImage(ImageMode.SEM, fileName))
  1734. {
  1735. return false;
  1736. }
  1737. Thread.Sleep(5000);
  1738. }
  1739. int fineWd;
  1740. ChooseBest(path_coarse, out fineWd);
  1741. SendMsg("wd fine max = " + fineWd.ToString());
  1742. a_nWd = fineWd;
  1743. SendMsg("细选工作距离wd = " + a_nWd.ToString());
  1744. return true;
  1745. }
  1746. //LoG算子计算
  1747. private double LoGMean(string a_strImgPath)
  1748. {
  1749. //读入Img文件
  1750. if (!File.Exists(a_strImgPath))
  1751. {
  1752. return 0;
  1753. }
  1754. Mat src, gray_src;
  1755. int kernel_size = 3;
  1756. src = Cv2.ImRead(a_strImgPath);
  1757. gray_src = new Mat();
  1758. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  1759. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  1760. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  1761. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  1762. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  1763. Cv2.ConvertScaleAbs(src, src);
  1764. //图像的平均灰度
  1765. double meanValue = 0.0;
  1766. meanValue = Cv2.Mean(src)[0];
  1767. return meanValue;
  1768. }
  1769. //梯度计算
  1770. private double Tenengrad(string a_strImgPath)
  1771. {
  1772. //读入Img文件
  1773. if (!File.Exists(a_strImgPath))
  1774. {
  1775. return 0;
  1776. }
  1777. Mat src;
  1778. src = Cv2.ImRead(a_strImgPath);
  1779. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  1780. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  1781. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  1782. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  1783. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  1784. //图像的平均灰度
  1785. double meanValue = 0.0;
  1786. meanValue = Cv2.Mean(src)[0];
  1787. return meanValue;
  1788. }
  1789. //梯度计算
  1790. private double TTgrad(string a_strImgPath)
  1791. {
  1792. //读入Img文件
  1793. if (!File.Exists(a_strImgPath))
  1794. {
  1795. return 0;
  1796. }
  1797. Mat src;
  1798. src = Cv2.ImRead(a_strImgPath);
  1799. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  1800. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  1801. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  1802. Mat scalex = new Mat();
  1803. Mat scaley = new Mat();
  1804. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  1805. Cv2.ConvertScaleAbs(src, scalex);
  1806. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  1807. Cv2.ConvertScaleAbs(src, scaley);
  1808. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  1809. //图像的平均灰度
  1810. double meanValue = 0.0;
  1811. meanValue = Cv2.Mean(src)[0];
  1812. return meanValue;
  1813. }
  1814. //三选二算法
  1815. private void ChooseBest(string a_strImgPath, out int a_nWd)
  1816. {
  1817. a_nWd = -1;
  1818. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  1819. float[] values = new float[files.Length];
  1820. double smax1 = LoGMean(files[0]);
  1821. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  1822. double smax2 = Tenengrad(files[0]);
  1823. int wdmax2 = wdmax1;
  1824. double smax3 = TTgrad(files[0]);
  1825. int wdmax3 = wdmax1;
  1826. int x = 0;
  1827. foreach (var file in files)
  1828. {
  1829. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  1830. double svalue1 = LoGMean(file);
  1831. double svalue2 = Tenengrad(file);
  1832. double svalue3 = TTgrad(file);
  1833. if (smax1 < svalue1)
  1834. {
  1835. smax1 = svalue1;
  1836. wdmax1 = wd;
  1837. }
  1838. if (smax2 < svalue2)
  1839. {
  1840. smax2 = svalue2;
  1841. wdmax2 = wd;
  1842. }
  1843. if (smax3 < svalue3)
  1844. {
  1845. smax3 = svalue3;
  1846. wdmax3 = wd;
  1847. }
  1848. x++;
  1849. }
  1850. SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  1851. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  1852. {
  1853. a_nWd = wdmax1;
  1854. SendMsg("焦距 = " + wdmax1.ToString());
  1855. }
  1856. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  1857. {
  1858. a_nWd = wdmax2;
  1859. SendMsg("焦距 = " + wdmax2.ToString());
  1860. }
  1861. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  1862. {
  1863. a_nWd = wdmax3;
  1864. SendMsg("焦距 = " + wdmax3.ToString());
  1865. }
  1866. else
  1867. {
  1868. SendMsg("对焦失败。");
  1869. }
  1870. }
  1871. }
  1872. }