Measure.cs 50 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. public class ThreadStatusEventArgs
  26. {
  27. public string State
  28. {
  29. get { return m_state; }
  30. set { m_state = value; }
  31. }
  32. private string m_state;
  33. public DateTime Time
  34. {
  35. get { return m_time; }
  36. set { m_time = value; }
  37. }
  38. private DateTime m_time;
  39. public String Step_Code
  40. {
  41. get { return step_Code; }
  42. set { step_Code = value; }
  43. }
  44. private String step_Code;
  45. //图片信息
  46. public class PictureInformation
  47. {
  48. public String Picture_FullPath
  49. {
  50. get { return picture_FullPath; }
  51. set { picture_FullPath = value; }
  52. }
  53. private String picture_FullPath;
  54. public double Work_Voltage
  55. {
  56. get { return work_Voltage; }
  57. set { work_Voltage = value; }
  58. }
  59. private double work_Voltage;
  60. public double Magnification
  61. {
  62. get { return magnification; }
  63. set { magnification = value; }
  64. }
  65. private double magnification;
  66. public double Work_Distance
  67. {
  68. get { return work_Distance; }
  69. set { work_Distance = value; }
  70. }
  71. private double work_Distance;
  72. public String Work_Status
  73. {
  74. get { return work_Status; }
  75. set { work_Status = value; }
  76. }
  77. private String work_Status;
  78. }
  79. //图片信息实例类
  80. public PictureInformation Picture_Information
  81. {
  82. get { return picture_Information; }
  83. set { picture_Information = value; }
  84. }
  85. private PictureInformation picture_Information;
  86. //图像信息
  87. public class ImageInformation
  88. {
  89. public int Method_Name
  90. {
  91. get { return method_Name; }
  92. set { method_Name = value; }
  93. }
  94. private int method_Name;
  95. public Source_Img_Degree_Direction SIDD;
  96. public Cut_Position CP;
  97. public Cut_Success CS;
  98. public Trapezoid_Top_Center_Position TTCP;
  99. public Auto_Foucs AF;
  100. public Auto_Stigmatic AS;
  101. public Center_Position_OffsetAngle_Direction CPOD;
  102. public Measure_Size MS;
  103. public ImageInformation()
  104. {
  105. SIDD = new Source_Img_Degree_Direction();
  106. CP = new Cut_Position();
  107. CS = new Cut_Success();
  108. TTCP = new Trapezoid_Top_Center_Position();
  109. AF = new Auto_Foucs();
  110. AS = new Auto_Stigmatic();
  111. CPOD = new Center_Position_OffsetAngle_Direction();
  112. MS = new Measure_Size();
  113. }
  114. //1-计算原始图像偏移角度及方向
  115. public class Source_Img_Degree_Direction
  116. {
  117. public Boolean Is_Image = false;
  118. public double Degree
  119. {
  120. get { return degree; }
  121. set { degree = value; }
  122. }
  123. private double degree;
  124. public int Direction
  125. {
  126. get { return direction; }
  127. set { direction = value; }
  128. }
  129. private int direction;
  130. public int State
  131. {
  132. get { return state; }
  133. set { state = value; }
  134. }
  135. private int state;
  136. }
  137. //2-计算切割点位置
  138. public class Cut_Position
  139. {
  140. public Boolean Is_Image = false;
  141. public double Offsetx
  142. {
  143. get { return offsetx; }
  144. set { offsetx = value; }
  145. }
  146. private double offsetx;
  147. public double Offsety
  148. {
  149. get { return offsety; }
  150. set { offsety = value; }
  151. }
  152. private double offsety;
  153. public int State
  154. {
  155. get { return state; }
  156. set { state = value; }
  157. }
  158. private int state;
  159. }
  160. //3-是否切割成功
  161. public class Cut_Success
  162. {
  163. public Boolean Is_Image = false;
  164. public int State
  165. {
  166. get { return state; }
  167. set { state = value; }
  168. }
  169. private int state;
  170. }
  171. //4-计算切割后图像梯形区域上边中心点坐标
  172. public class Trapezoid_Top_Center_Position
  173. {
  174. public Boolean Is_Image = false;
  175. public double TopCenterX
  176. {
  177. get { return topCenterX; }
  178. set { topCenterX = value; }
  179. }
  180. private double topCenterX;
  181. public double TopCenterY
  182. {
  183. get { return topCenterY; }
  184. set { topCenterY = value; }
  185. }
  186. private double topCenterY;
  187. public int State
  188. {
  189. get { return state; }
  190. set { state = value; }
  191. }
  192. private int state;
  193. }
  194. //5-自动对焦
  195. public class Auto_Foucs
  196. {
  197. public Boolean Is_Image = true;
  198. public String Img_Path
  199. {
  200. get { return img_Path; }
  201. set { img_Path = value; }
  202. }
  203. private String img_Path;
  204. }
  205. //6-自动像闪
  206. public class Auto_Stigmatic
  207. {
  208. public Boolean Is_Image = true;
  209. public String Img_Path
  210. {
  211. get { return img_Path; }
  212. set { img_Path = value; }
  213. }
  214. private String img_Path;
  215. }
  216. //7-计算切割面区域中心坐标,以及偏移角度及方向
  217. public class Center_Position_OffsetAngle_Direction
  218. {
  219. public Boolean Is_Image = false;
  220. public double CenterX
  221. {
  222. get { return centerX; }
  223. set { centerX = value; }
  224. }
  225. private double centerX;
  226. public double CenterY
  227. {
  228. get { return centerY; }
  229. set { centerY = value; }
  230. }
  231. private double centerY;
  232. public double Degree
  233. {
  234. get { return degree; }
  235. set { degree = value; }
  236. }
  237. private double degree;
  238. public int Direction
  239. {
  240. get { return direction; }
  241. set { direction = value; }
  242. }
  243. private int direction;
  244. public int State
  245. {
  246. get { return state; }
  247. set { state = value; }
  248. }
  249. private int state;
  250. }
  251. //8-测量尺寸
  252. public class Measure_Size
  253. {
  254. public Boolean Is_Image = false;
  255. public int State
  256. {
  257. get { return state; }
  258. set { state = value; }
  259. }
  260. private int state;
  261. }
  262. }
  263. //图像信息实例类
  264. public ImageInformation Image_Information
  265. {
  266. get { return image_Information; }
  267. set { image_Information = value; }
  268. }
  269. private ImageInformation image_Information;
  270. public ThreadStatusEventArgs(string a_State)
  271. {
  272. this.m_state = a_State;
  273. picture_Information = new PictureInformation();
  274. image_Information = new ImageInformation();
  275. }
  276. }
  277. public class CutHolesStatusEventArgs
  278. {
  279. public string State
  280. {
  281. get { return m_state; }
  282. set { m_state = value; }
  283. }
  284. private string m_state;
  285. public string HoleName
  286. {
  287. get { return m_holeName; }
  288. set { m_holeName = value; }
  289. }
  290. private string m_holeName;
  291. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  292. {
  293. this.m_state = a_state;
  294. this.m_holeName = a_holeName;
  295. }
  296. }
  297. public class Measure
  298. {
  299. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  300. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  301. //全局只有一个fatorySEM
  302. static FactoryHardware factorySEM = FactoryHardware.Instance;
  303. ISEMControl iSEM = factorySEM.ISEM;
  304. //@的作用是不用转义字符\\只打一个就行
  305. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  306. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  307. const String ImageName3 = @"ImageFIB600X2.tif";
  308. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  309. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  310. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  311. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  312. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  313. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  314. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  315. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  316. const String ElyDeposition = @"Deposition.ely"; //沉积
  317. const String ElyCrossSection = @"CrossSection.ely"; //切割
  318. const float fMin = (float)0.0000002; //单位是米
  319. int m_nWorkHoleNo = -1;
  320. //测量文件
  321. private MeasureFile m_measureFile;
  322. public MeasureFile MeasureFile
  323. {
  324. get { return this.m_measureFile; }
  325. set { this.m_measureFile = value; }
  326. }
  327. //测量的切割孔
  328. private List<MeasureData.CutHole> m_cutHoles;
  329. public List<MeasureData.CutHole> cutHoles
  330. {
  331. get { return this.m_cutHoles; }
  332. set { this.m_cutHoles = value; }
  333. }
  334. //工作文件夹
  335. private string m_WorkingFolder;
  336. public string WorkingFolder
  337. {
  338. get { return this.m_WorkingFolder; }
  339. set { this.m_WorkingFolder = value; }
  340. }
  341. //程序当前路径
  342. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  343. //线程状态
  344. private ThreadStatus m_ThreadStatus;
  345. public ThreadStatus TStatus
  346. {
  347. get { return this.m_ThreadStatus; }
  348. set { this.m_ThreadStatus = value; }
  349. }
  350. //测量参数
  351. private MeasureParam m_MsParam;
  352. public MeasureParam MeasParam
  353. {
  354. get { return this.m_MsParam; }
  355. set { this.m_MsParam = value; }
  356. }
  357. //构造函数
  358. public Measure()
  359. {
  360. Init();
  361. }
  362. private void Init()
  363. {
  364. MeasParam = new MeasureParam();
  365. TStatus = new ThreadStatus();
  366. cutHoles = new List<MeasureData.CutHole>();
  367. }
  368. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  369. public bool InitMeas(MeasureFile a_measureFile)
  370. {
  371. m_measureFile = a_measureFile;
  372. List<CutHole> listHoles = m_measureFile.ListCutHole;
  373. foreach (CutHole h in listHoles)
  374. {
  375. if (h.SWITCH == true)
  376. {
  377. m_cutHoles.Add(h);
  378. }
  379. }
  380. if (m_cutHoles.Count == 0)
  381. return false;
  382. this.m_MsParam = m_measureFile.MParam;
  383. return true;
  384. }
  385. public void SendMsg(string step_code)
  386. {
  387. ThreadStatusEventArgs arg = new ThreadStatusEventArgs(step_code);
  388. arg.Time = DateTime.Now;
  389. switch(step_code)
  390. {
  391. //拍照
  392. case "1-3":
  393. //电压、放大倍数、工作距离、位置信息、图片路径
  394. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  395. arg.Picture_Information.Work_Status = "SEM";
  396. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  397. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  398. break;
  399. case "1-1":
  400. break;
  401. }
  402. SendThreadStatus(this, arg);
  403. }
  404. public void SendCutHoleMsg(string a_state, string a_holeName)
  405. {
  406. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  407. arg.HoleName = a_holeName;
  408. arg.State = a_state;
  409. SendCutHolesStatus(this, arg);
  410. }
  411. //测量流程
  412. public void DoMeasure()
  413. {
  414. //创建线程的测量状态的更新
  415. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  416. if (SendThreadStatus != null)
  417. {
  418. SendMsg("开始测量。");
  419. }
  420. //检查硬件连接是否正常
  421. if (!ConnectHardware())
  422. {
  423. SendMsg("连接硬件失败。");
  424. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  425. return;
  426. }
  427. SendMsg("硬件连接成功。");
  428. //设置工作文件夹
  429. if (!SetWorkingFolderStr())
  430. {
  431. SendMsg("设置工作文件夹失败");
  432. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  433. return;
  434. }
  435. SendMsg("创建工作文件路径为" + WorkingFolder);
  436. float[] firstPosition;
  437. for (int i = 0; i < m_cutHoles.Count; i++)
  438. {
  439. m_nWorkHoleNo = i;
  440. if (i == 0)
  441. {
  442. SendMsg("第一个切孔开始测量");
  443. //切孔操作-开始
  444. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  445. firstPosition = iSEM.GetStagePosition();
  446. //第一个孔的测试
  447. FirstHole();
  448. //切孔操作-完成
  449. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  450. }
  451. else
  452. {
  453. //非第一个孔的测试
  454. SendMsg("第" + i.ToString() + "个切孔开始测量");
  455. //切孔操作-开始
  456. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  457. OtherHole();
  458. //切孔操作-完成
  459. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  460. }
  461. }
  462. }
  463. //检查硬件连接是否正常
  464. public bool ConnectHardware()
  465. {
  466. //返回硬件的连接状态
  467. return iSEM.ConnectStatus();
  468. }
  469. //设置工作文件夹
  470. public bool SetWorkingFolderStr()
  471. {
  472. WorkingFolder = m_measureFile.FilePath;
  473. return true;
  474. ////获取工作文件路径
  475. //string pathName = m_measureFile.FilePath;
  476. ////判断工作文件路径是否为空或无效
  477. //if (string.IsNullOrEmpty(pathName))
  478. //{
  479. // SendMsg("路径无效");
  480. // return false;
  481. //}
  482. ////文件未保存
  483. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  484. //{
  485. // SendMsg("工程文件未保存");
  486. // return false;
  487. //}
  488. ////获取工作文件所在文件夹
  489. //string folder = System.IO.Path.GetDirectoryName(pathName);
  490. //if (string.IsNullOrEmpty(folder))
  491. //{
  492. // SendMsg("工程文件无效");
  493. // return false;
  494. //}
  495. //WorkingFolder += @"\\";
  496. //LogManager.Init(WorkingFolder);
  497. //return false;
  498. }
  499. //插入PT针
  500. public bool InsertPT()
  501. {
  502. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  503. SendMsg("调用宏插入PT针宏文件" + fn);
  504. iSEM.CMDMCFFilename(fn);
  505. //延时1s??
  506. Thread.Sleep(1000);
  507. return true;
  508. }
  509. //撤出PT针
  510. public bool RetractPT()
  511. {
  512. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  513. SendMsg("调用宏撤出PT针宏文件" + fn);
  514. iSEM.CMDMCFFilename(fn);
  515. //延时1s??
  516. Thread.Sleep(1000);
  517. return true;
  518. }
  519. //PT沉积
  520. public bool PTWork()
  521. {
  522. //执行PT沉积的ELY文件
  523. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  524. SendMsg("执行PT沉积Ely文件:" + fn);
  525. if (!ExcuteEly(fn))
  526. {
  527. return false;
  528. }
  529. //等待沉积完成
  530. while (true)
  531. {
  532. Thread.Sleep(10000);
  533. if (iSEM.GetFIBMode() == 0)
  534. {
  535. break;
  536. }
  537. }
  538. return true;
  539. }
  540. //FIB切割
  541. public bool FIBWork()
  542. {
  543. //执行PT沉积的ELY文件
  544. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  545. SendMsg("执行FIB切割Ely文件:" + fn);
  546. if (!ExcuteEly(fn))
  547. {
  548. return false;
  549. }
  550. //等待切割完成
  551. while (true)
  552. {
  553. Thread.Sleep(10000);
  554. if (iSEM.GetFIBMode() == 0)
  555. {
  556. break;
  557. }
  558. }
  559. return true;
  560. }
  561. public bool ExcuteEly(string a_filename)
  562. {
  563. //执行ELy文件有三个动作
  564. //1. 选择ELY文件
  565. SendMsg("选择ELY文件");
  566. if (!iSEM.CmdFIBLoadELY(a_filename))
  567. {
  568. SendMsg("选择ELY文件失败");
  569. return false;
  570. }
  571. Thread.Sleep(1000);
  572. //2. 确认ELY文件
  573. SendMsg("确认ELY文件");
  574. if (!iSEM.CmdFIBEXPOSUREELY())
  575. {
  576. SendMsg("确认ELY文件失败");
  577. return false;
  578. }
  579. Thread.Sleep(1000);
  580. //3. 执行ELY文件
  581. SendMsg("执行ELY文件");
  582. if (!iSEM.CmdFIBSTARTELY())
  583. {
  584. SendMsg("执行ELY文件失败");
  585. return false;
  586. }
  587. Thread.Sleep(1000);
  588. return true;
  589. }
  590. /// <summary>
  591. ///13. 自动 定位功能
  592. /// </summary>
  593. /// <returns></returns>
  594. public bool GetPoistion()
  595. {
  596. SendMsg("自动定位");
  597. //13.自动定位切割
  598. {
  599. SendMsg("放大600倍");
  600. //1.控制SEM放大600X
  601. if (!iSEM.SetMagnification(600))
  602. {
  603. return false;
  604. }
  605. //2.控制SEM自动对焦、亮度、对比度
  606. // if (!MeasParam.FocusMode)
  607. {
  608. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  609. {
  610. SendMsg("拍摄照片完成");
  611. //return true;
  612. }
  613. else
  614. {
  615. SendMsg("拍摄照片失败");
  616. return false;
  617. }
  618. //弹出手动对焦的窗口
  619. }
  620. //else
  621. //{
  622. // //调用自动对焦模块
  623. //}
  624. //3.设置SEM进行角度补偿54度
  625. SendMsg("设置校正54度");
  626. if (!TiltCorrection(54))
  627. {
  628. SendMsg("设置SEM进行角度补偿54度");
  629. return false;
  630. }
  631. Thread.Sleep(5000);
  632. //4.控制SEM拍照
  633. SendMsg("SEM拍照");
  634. //5.保存照片
  635. {
  636. //1. 创建目录,已经完成
  637. //2. 设置图片名称
  638. //3. 保存图片1
  639. WorkingFolder = m_measureFile.FilePath;
  640. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  641. SendMsg("SEM拍照存储到" + fileName1);
  642. if (!GetImage(ImageMode.SEM, fileName1))
  643. {
  644. SendMsg("SEM拍照失败");
  645. return false;
  646. }
  647. Thread.Sleep(3000);
  648. }
  649. //6.设置FIB拍照参数——扫描时间、束流等
  650. //7.控制FIB自动亮度、对比度
  651. SendMsg("切换FIB控制");
  652. if (!iSEM.CmdFIBModeFIB())
  653. {
  654. SendMsg("FIB模式切换失败");
  655. return false;
  656. }
  657. Thread.Sleep(10000);
  658. //8.控制FIB拍照
  659. //9.保存照片
  660. SendMsg("FIB拍照");
  661. {
  662. //1. 设置图片名称
  663. //2. 保存图片2
  664. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  665. if (!GetImage(ImageMode.FIB, fileName2))
  666. {
  667. SendMsg("FIB拍照失败");
  668. return false;
  669. }
  670. Thread.Sleep(3000);
  671. }
  672. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  673. SendMsg("调用识别位置");
  674. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  675. {
  676. SendMsg("移动已完成");
  677. //return true;
  678. }
  679. else
  680. {
  681. SendMsg("移动已失败");
  682. return false;
  683. }
  684. SendMsg("进行PT沉积");
  685. //11.自动工具样品类型参数确定是否需要PT沉积
  686. {
  687. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  688. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  689. //3. 根据坐标进行PT沉积
  690. if (!PTWork())
  691. {
  692. SendMsg("PT沉积失败");
  693. return false;
  694. }
  695. }
  696. return true;
  697. //模拟为客户返回的坐标值
  698. float x0 = 0, y0 = 0;
  699. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  700. //12.根据梯形坐标控制FIB调整到中心位置
  701. if (!iSEM.MoveStageXY(x0, y0))
  702. {
  703. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  704. return false;
  705. }
  706. //电镜移动是有一个延时的操作的?
  707. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  708. float x1 = iSEM.GetStageAtX();
  709. float y1 = iSEM.GetStageAtY();
  710. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  711. {
  712. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  713. return false;
  714. }
  715. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  716. float[] firstPosition = iSEM.GetStagePosition();
  717. //这里要调用文件保存功能
  718. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  719. + firstPosition[1].ToString() + ","
  720. + firstPosition[2].ToString() + ","
  721. + firstPosition[3].ToString() + ","
  722. + firstPosition[4].ToString() + ","
  723. + firstPosition[5].ToString() + ")");
  724. }
  725. return false;
  726. }
  727. /// <summary>
  728. /// 14. FIB切割
  729. /// </summary>
  730. /// <returns></returns>
  731. public bool FIBCross()
  732. {
  733. //14.自动控制FIB切割
  734. {
  735. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  736. //2.控制FIB进行切割
  737. SendMsg("FIB切割");
  738. if (!FIBWork())
  739. {
  740. SendMsg("FIB切割失败");
  741. return false;
  742. }
  743. Thread.Sleep(5000);
  744. //3.控制FIB拍照600X
  745. //4.保存图片
  746. {
  747. //1.设置图片名称
  748. //2.保存图片3
  749. WorkingFolder = m_measureFile.FilePath;
  750. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  751. SendMsg("SEM拍照存储到" + fileName3);
  752. if (!GetImage(ImageMode.FIB, fileName3))
  753. {
  754. SendMsg("FIB拍照失败");
  755. return false;
  756. }
  757. Thread.Sleep(3000);
  758. }
  759. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  760. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  761. }
  762. return true;
  763. }
  764. /// <summary>
  765. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  766. /// </summary>
  767. /// <returns></returns>
  768. public bool FindCross()
  769. {
  770. //16.自动调整SEM找到切割位置
  771. {
  772. //1.控制SEM放大到300倍
  773. if (!iSEM.SetMagnification(300))
  774. {
  775. return false;
  776. }
  777. //2.控制SEM自动对焦、亮度、对比度-接口
  778. if (!MeasParam.FocusMode)
  779. {
  780. //弹出手动对焦的窗口
  781. }
  782. else
  783. {
  784. //调用自动对焦模块
  785. }
  786. Thread.Sleep(5000);
  787. //3.控制SEM拍照
  788. String fileName4 = WorkingFolder + ImageName4;
  789. if (!GetImage(ImageMode.SEM, fileName4))
  790. {
  791. return false;
  792. }
  793. Thread.Sleep(3000);
  794. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  795. float x4 = 0, y4 = 0;
  796. float angle = 0;
  797. //5.根据坐标控制SEM移动到切孔位置,居中
  798. if (!iSEM.MoveStageXY(x4, y4))
  799. {
  800. return false;
  801. }
  802. if (!iSEM.SetScanRotation(angle))
  803. {
  804. return false;
  805. }
  806. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  807. //float x5 = iSEM.GetStageAtX();
  808. //float y5 = iSEM.GetStageAtY();
  809. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  810. //{
  811. // return false;
  812. //}
  813. }
  814. return true;
  815. }
  816. public bool CommonWork()
  817. {
  818. SendMsg("插入PT针");
  819. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  820. //if (firstHole.PT == true)
  821. {
  822. if (!InsertPT())
  823. {
  824. SendMsg("插入PT针失败");
  825. return false;
  826. }
  827. }
  828. //13. 自动 定位功能
  829. SendMsg("自动定位切割位置");
  830. if (!GetPoistion())
  831. {
  832. SendMsg("自动定位切割位置失败");
  833. return false;
  834. }
  835. //14.自动控制FIB切割
  836. SendMsg("FIB切割");
  837. if (!FIBCross())
  838. {
  839. SendMsg("FIB切割失败");
  840. return false;
  841. }
  842. //{
  843. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  844. // //2.控制FIB进行切割
  845. // //3.控制FIB拍照600X
  846. // //4.保存图片
  847. // {
  848. // //1.设置图片名称
  849. // //2.保存图片3
  850. // String fileName3 = WorkingFolder + ImageName3;
  851. // if (!GetImage(ImageMode.FIB, fileName3))
  852. // {
  853. // return false;
  854. // }
  855. // }
  856. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  857. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  858. //}
  859. //15.根据样品类型决定是否撤出PT针
  860. SendMsg("撤出PT针");
  861. //if (firstHole.PT == false)
  862. //{
  863. if (!RetractPT())
  864. {
  865. SendMsg("撤出PT针失败");
  866. return false;
  867. }
  868. //}
  869. // 16.找到切割位置
  870. SendMsg("找到切割位置");
  871. //17.自动控制SEM拍截面照
  872. SendMsg("观测层高");
  873. SendMsg("切换SEM控制");
  874. if (!iSEM.CmdFIBModeSEM())
  875. {
  876. SendMsg("SEM模式切换失败");
  877. return false;
  878. }
  879. Thread.Sleep(10000);
  880. SendMsg("放大6000倍");
  881. if (!iSEM.SetMagnification(6000))
  882. {
  883. SendMsg("放大倍数调整失败");
  884. return false;
  885. }
  886. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  887. {
  888. SendMsg("拍摄照片完成");
  889. //return true;
  890. }
  891. else
  892. {
  893. SendMsg("拍摄照片失败");
  894. return false;
  895. }
  896. SendMsg("图像校正36度");
  897. //3.设置SEM角度补偿cos36度
  898. if (!TiltCorrection(36))
  899. {
  900. return false;
  901. }
  902. Thread.Sleep(3000);
  903. string fn;
  904. //用宏抓一般图
  905. Thread.Sleep(5000);
  906. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  907. SendMsg("用宏抓一般图" + fn);
  908. iSEM.CMDMCFFilename(fn);
  909. //延时1s??
  910. Thread.Sleep(5000);
  911. //用宏抓好图
  912. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  913. SendMsg("用宏抓好图" + fn);
  914. iSEM.CMDMCFFilename(fn);
  915. //延时1s??
  916. Thread.Sleep(30000);
  917. Thread.Sleep(10000);
  918. WorkingFolder = m_measureFile.FilePath;
  919. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  920. SendMsg("SEM拍照存储到" + fileName6);
  921. if (!GetImage(ImageMode.SEM, fileName6))
  922. {
  923. SendMsg("SEM拍照失败");
  924. return false;
  925. }
  926. //用宏抓标志图
  927. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  928. SendMsg("用宏抓标志图" + fn);
  929. iSEM.CMDMCFFilename(fn);
  930. //延时1s??
  931. Thread.Sleep(30000);
  932. //恢复简单抓图
  933. Thread.Sleep(5000);
  934. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  935. SendMsg("用宏抓一般图" + fn);
  936. iSEM.CMDMCFFilename(fn);
  937. SendMsg("所有图结束");
  938. return true;
  939. }
  940. //第一个孔的测试过程
  941. public bool FirstHole()
  942. {
  943. MeasureData.CutHole firstHole = m_cutHoles[0];
  944. SendMsg("插入PT针");
  945. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  946. //if (firstHole.PT == true)
  947. {
  948. if (!InsertPT())
  949. {
  950. SendMsg("插入PT针失败");
  951. return false;
  952. }
  953. }
  954. //13. 自动 定位功能
  955. SendMsg("自动定位切割位置");
  956. if (!GetPoistion())
  957. {
  958. SendMsg("自动定位切割位置失败");
  959. return false;
  960. }
  961. //14.自动控制FIB切割
  962. SendMsg("FIB切割");
  963. if (!FIBCross())
  964. {
  965. SendMsg("FIB切割失败");
  966. return false;
  967. }
  968. //{
  969. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  970. // //2.控制FIB进行切割
  971. // //3.控制FIB拍照600X
  972. // //4.保存图片
  973. // {
  974. // //1.设置图片名称
  975. // //2.保存图片3
  976. // String fileName3 = WorkingFolder + ImageName3;
  977. // if (!GetImage(ImageMode.FIB, fileName3))
  978. // {
  979. // return false;
  980. // }
  981. // }
  982. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  983. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  984. //}
  985. //15.根据样品类型决定是否撤出PT针
  986. SendMsg("撤出PT针");
  987. //if (firstHole.PT == false)
  988. //{
  989. if (!RetractPT())
  990. {
  991. SendMsg("撤出PT针失败");
  992. return false;
  993. }
  994. //}
  995. // 16.找到切割位置
  996. SendMsg("找到切割位置");
  997. //17.自动控制SEM拍截面照
  998. SendMsg("观测层高");
  999. SendMsg("切换SEM控制");
  1000. if (!iSEM.CmdFIBModeSEM())
  1001. {
  1002. SendMsg("SEM模式切换失败");
  1003. return false;
  1004. }
  1005. Thread.Sleep(10000);
  1006. SendMsg("放大6000倍");
  1007. if (!iSEM.SetMagnification(6000))
  1008. {
  1009. SendMsg("放大倍数调整失败");
  1010. return false;
  1011. }
  1012. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1013. {
  1014. SendMsg("拍摄照片完成");
  1015. //return true;
  1016. }
  1017. else
  1018. {
  1019. SendMsg("拍摄照片失败");
  1020. return false;
  1021. }
  1022. SendMsg("图像校正36度");
  1023. //3.设置SEM角度补偿cos36度
  1024. if (!TiltCorrection(36))
  1025. {
  1026. return false;
  1027. }
  1028. Thread.Sleep(3000);
  1029. string fn;
  1030. //用宏抓一般图
  1031. Thread.Sleep(5000);
  1032. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1033. SendMsg("用宏抓一般图" + fn);
  1034. iSEM.CMDMCFFilename(fn);
  1035. //延时1s??
  1036. Thread.Sleep(5000);
  1037. //用宏抓好图
  1038. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1039. SendMsg("用宏抓好图" + fn);
  1040. iSEM.CMDMCFFilename(fn);
  1041. //延时1s??
  1042. Thread.Sleep(30000);
  1043. Thread.Sleep(10000);
  1044. WorkingFolder = m_measureFile.FilePath;
  1045. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1046. SendMsg("SEM拍照存储到" + fileName6);
  1047. if (!GetImage(ImageMode.SEM, fileName6))
  1048. {
  1049. SendMsg("SEM拍照失败");
  1050. return false;
  1051. }
  1052. //用宏抓标志图
  1053. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1054. SendMsg("用宏抓标志图" + fn);
  1055. iSEM.CMDMCFFilename(fn);
  1056. //延时1s??
  1057. Thread.Sleep(30000);
  1058. Thread.Sleep(5000);
  1059. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1060. SendMsg("用宏抓一般图" + fn);
  1061. iSEM.CMDMCFFilename(fn);
  1062. //延时1s??
  1063. Thread.Sleep(5000);
  1064. SendMsg("所有图结束");
  1065. ////17.自动控制SEM拍截面照
  1066. //{
  1067. // //1.控制SEM放大到指定参数大小范围,6000x
  1068. // if (!iSEM.SetMagnification(6000))
  1069. // {
  1070. // return false;
  1071. // }
  1072. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1073. // if (!MeasParam.FocusMode)
  1074. // {
  1075. // //弹出手动对焦的窗口
  1076. // }
  1077. // else
  1078. // {
  1079. // //调用自动对焦模块
  1080. // }
  1081. // //3.设置SEM角度补偿cos36度
  1082. // if (!TiltCorrection(36))
  1083. // {
  1084. // return false;
  1085. // }
  1086. // //4.控制SEM拍照
  1087. // //5.保存照片4
  1088. // String fileName5 = WorkingFolder + ImageName5;
  1089. // if (!GetImage(ImageMode.SEM, fileName5))
  1090. // {
  1091. // return false;
  1092. // }
  1093. // //6.将照片传给客户,获取偏移坐标
  1094. // float x6 = 0, y6 = 0;
  1095. // float angle1 = 0;
  1096. // float mage = 10000;
  1097. // //7.根据坐标控制SEM移动到分析位置
  1098. // if (!iSEM.MoveStageXY(x6, y6))
  1099. // {
  1100. // return false;
  1101. // }
  1102. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1103. // float x7 = iSEM.GetStageAtX();
  1104. // float y7 = iSEM.GetStageAtY();
  1105. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1106. // {
  1107. // return false;
  1108. // }
  1109. // //9.控制SEM平行校正,并记录校正前初始值
  1110. // float foldAnagle = iSEM.GetScanRotation();
  1111. // if (foldAnagle == float.NaN)
  1112. // {
  1113. // return false;
  1114. // }
  1115. // if (!iSEM.SetScanRotation(angle1))
  1116. // {
  1117. // return false;
  1118. // }
  1119. // //10.控制SEM放大到指定参数大小范围
  1120. // if (!iSEM.SetMagnification(mage))
  1121. // {
  1122. // return false;
  1123. // }
  1124. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1125. // if (!MeasParam.FocusMode)
  1126. // {
  1127. // //弹出手动对焦的窗口
  1128. // }
  1129. // else
  1130. // {
  1131. // //调用自动对焦模块
  1132. // }
  1133. // //12.控制SEM对分析位置拍照
  1134. // String fileName6 = WorkingFolder + ImageName6;
  1135. // if (!GetImage(ImageMode.SEM, fileName6))
  1136. // {
  1137. // return false;
  1138. // }
  1139. // //13.保存照片
  1140. // //14.控制SEM取消电子束校正,回到初始值
  1141. // if (!iSEM.SetScanRotation(foldAnagle))
  1142. // {
  1143. // return false;
  1144. // }
  1145. //}
  1146. ////18.自动层高分析
  1147. //{
  1148. // //1.获取SEM Pixel Size给客户传入参数
  1149. // if (iSEM.GetPixelSize() == float.NaN)
  1150. // {
  1151. // return false;
  1152. // }
  1153. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1154. //}
  1155. ////19.自动能谱分析
  1156. //{
  1157. // //1. 确定能谱位置
  1158. // //2. 控制牛津打能谱
  1159. // //3. 能谱分析——面扫+线扫描
  1160. //}
  1161. return true;
  1162. }
  1163. //非第一个孔的测试过程
  1164. public void OtherHole()
  1165. {
  1166. //for (int i = 1; i < m_cutHoles.Count; i++)
  1167. //{
  1168. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1169. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1170. //1. 初始化
  1171. {
  1172. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1173. //读取图像冻结状态
  1174. float ffrozen = iSEM.GetImageFrozen();
  1175. if (ffrozen == float.NaN)
  1176. {
  1177. return;
  1178. }
  1179. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1180. {
  1181. SendMsg("样品台恢复到水平");
  1182. //return true;
  1183. }
  1184. else
  1185. {
  1186. SendMsg("禁止样品台恢复到水平");
  1187. return;
  1188. }
  1189. //2. 调节样品1号孔的样品台6轴坐标
  1190. //3. 将样品1号孔坐标2存入数据库
  1191. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1192. if (!iSEM.SetStageGotoT(0))
  1193. {
  1194. return;
  1195. }
  1196. while (true)
  1197. {
  1198. Thread.Sleep(10000);
  1199. if (iSEM.GetStageIs() == 0)
  1200. {
  1201. break;
  1202. }
  1203. }
  1204. //5. 获取光镜2号孔XY坐标
  1205. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1206. //6. 根据光镜坐标控制样品台移动
  1207. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1208. {
  1209. SendMsg("移动失败");
  1210. }
  1211. while (true)
  1212. {
  1213. Thread.Sleep(10000);
  1214. if (iSEM.GetStageIs() == 0)
  1215. {
  1216. break;
  1217. }
  1218. }
  1219. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1220. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1221. {
  1222. SendMsg("样品台旋转");
  1223. //return true;
  1224. }
  1225. else
  1226. {
  1227. SendMsg("禁止样品台旋转");
  1228. return;
  1229. }
  1230. if (!iSEM.SetStageGotoT(54))
  1231. {
  1232. return;
  1233. }
  1234. while (true)
  1235. {
  1236. Thread.Sleep(10000);
  1237. if (iSEM.GetStageIs() == 0)
  1238. {
  1239. break;
  1240. }
  1241. }
  1242. }
  1243. SendMsg("拉直操作");
  1244. SendMsg("其他操作与1号孔操作一致");
  1245. if (!CommonWork())
  1246. {
  1247. return;
  1248. }
  1249. //2. 定位切割
  1250. {
  1251. //1. 拉直操作
  1252. {
  1253. //1.1 控制SEM进行拍照
  1254. //1.2 图片传给客户,返回偏移角度
  1255. //1.3 根据返回角度,控制样品台转动
  1256. }
  1257. //2. 与1号孔13步相同
  1258. }
  1259. //3. 以后步骤与1号孔以后步骤一致
  1260. //}
  1261. }
  1262. //角度补偿
  1263. public bool TiltCorrection(float a_fAngle)
  1264. {
  1265. //记录原来电镜的状态
  1266. // bool bTilt = false;
  1267. //float fOldTilt = iSEM.GetTiltCorrection();
  1268. //if (fOldTilt == float.NaN)
  1269. //{
  1270. // return false;
  1271. //}
  1272. //else if (fOldTilt == 1)
  1273. //{
  1274. // bTilt = true;
  1275. //}
  1276. //else if (fOldTilt == 0)
  1277. //{
  1278. // bTilt = false;
  1279. //}
  1280. //float fOldAngle = iSEM.GetTiltAngle();
  1281. //if (fOldAngle == float.NaN)
  1282. //{
  1283. // return false;
  1284. //}
  1285. //开启校正
  1286. SendMsg("开启校正");
  1287. if (!iSEM.SetTiltAngleOn())
  1288. {
  1289. return false;
  1290. }
  1291. //设置校正角度
  1292. //if (!iSEM.SetTiltAngle(fOldAngle))
  1293. //{
  1294. // return false;
  1295. //}
  1296. //恢复原始状态
  1297. SendMsg("校正角度"+ a_fAngle.ToString());
  1298. if (!iSEM.SetTiltAngle(a_fAngle))
  1299. {
  1300. return false;
  1301. }
  1302. //if (bTilt)
  1303. //{
  1304. // if (!iSEM.SetTiltCorrectionOn())
  1305. // {
  1306. // return false;
  1307. // }
  1308. //}
  1309. //else
  1310. //{
  1311. // if (!iSEM.SetTiltCorrectionOff())
  1312. // {
  1313. // return false;
  1314. // }
  1315. //}
  1316. return true;
  1317. }
  1318. //拍图
  1319. public bool GetImage(ImageMode a_mode, String a_fileName)
  1320. {
  1321. //1. 图像解冻
  1322. float foldFrozen = iSEM.GetImageFrozen();
  1323. if (foldFrozen == float.NaN)
  1324. {
  1325. return false;
  1326. }
  1327. if (!iSEM.ImageLive())
  1328. {
  1329. return false;
  1330. }
  1331. //2. 确认图像模式
  1332. if (ImageMode.SEM == a_mode)
  1333. {
  1334. if (!iSEM.CmdFIBModeSEM())
  1335. {
  1336. return false;
  1337. }
  1338. }
  1339. else if (ImageMode.FIB == a_mode)
  1340. {
  1341. if (!iSEM.CmdFIBModeFIB())
  1342. {
  1343. return false;
  1344. }
  1345. }
  1346. else
  1347. {
  1348. return false;
  1349. }
  1350. //3. 获取分辨率
  1351. int[] ImageSize = iSEM.GetImageStore();
  1352. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1353. {
  1354. return false;
  1355. }
  1356. short width = (short)ImageSize[0];
  1357. short height = (short)ImageSize[1];
  1358. //4. 抓图
  1359. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1360. {
  1361. return false;
  1362. }
  1363. //5. 恢复初始状态
  1364. if (foldFrozen == 0)
  1365. {
  1366. if (!iSEM.ImageLive())
  1367. {
  1368. return false;
  1369. }
  1370. }
  1371. else if (foldFrozen == 1)
  1372. {
  1373. if (!iSEM.ImageFrozen())
  1374. {
  1375. return false;
  1376. }
  1377. }
  1378. return true;
  1379. }
  1380. //自动聚焦
  1381. public bool AutoFocus(string a_strPath, out int a_nWd)
  1382. {
  1383. a_nWd = 0;
  1384. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1385. return true;
  1386. }
  1387. }
  1388. }