Measure.cs 87 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using WebManager;
  16. using OpenCvSharp;
  17. namespace MeasureThread
  18. {
  19. //图片模式
  20. public enum ImageMode
  21. {
  22. FIB,
  23. SEM
  24. }
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. public class ThreadStatusEventArgs
  28. {
  29. //状态
  30. public Boolean State
  31. {
  32. get { return m_state; }
  33. set { m_state = value; }
  34. }
  35. private Boolean m_state;
  36. //时间
  37. public DateTime Time
  38. {
  39. get { return m_time; }
  40. set { m_time = value; }
  41. }
  42. private DateTime m_time;
  43. //步骤代码
  44. public String Step_Code
  45. {
  46. get { return step_Code; }
  47. set { step_Code = value; }
  48. }
  49. private String step_Code;
  50. //其他消息
  51. public String Message
  52. {
  53. get { return this.message; }
  54. set { this.message = value; }
  55. }
  56. private String message;
  57. //孔名
  58. public String HoleName
  59. {
  60. get { return this.holeName; }
  61. set { this.holeName = value; }
  62. }
  63. private String holeName;
  64. //图片信息
  65. public class PictureInformation
  66. {
  67. public String Picture_FullPath
  68. {
  69. get { return picture_FullPath; }
  70. set { picture_FullPath = value; }
  71. }
  72. private String picture_FullPath;
  73. public double Work_Voltage
  74. {
  75. get { return work_Voltage; }
  76. set { work_Voltage = value; }
  77. }
  78. private double work_Voltage;
  79. public double Magnification
  80. {
  81. get { return magnification; }
  82. set { magnification = value; }
  83. }
  84. private double magnification;
  85. public double Work_Distance
  86. {
  87. get { return work_Distance; }
  88. set { work_Distance = value; }
  89. }
  90. private double work_Distance;
  91. public String Work_Status
  92. {
  93. get { return work_Status; }
  94. set { work_Status = value; }
  95. }
  96. private String work_Status;
  97. }
  98. //图片信息实例类
  99. public PictureInformation Picture_Information
  100. {
  101. get { return picture_Information; }
  102. set { picture_Information = value; }
  103. }
  104. private PictureInformation picture_Information;
  105. //图像信息
  106. public class ImageInformation
  107. {
  108. public int Method_Name
  109. {
  110. get { return method_Name; }
  111. set { method_Name = value; }
  112. }
  113. private int method_Name;
  114. public Source_Img_Degree_Direction SIDD;
  115. public Cut_Position CP;
  116. public Cut_Success CS;
  117. public Trapezoid_Top_Center_Position TTCP;
  118. public Auto_Foucs AF;
  119. public Auto_Stigmatic AS;
  120. public Center_Position_OffsetAngle_Direction CPOD;
  121. public Measure_Size MS;
  122. public ImageInformation()
  123. {
  124. SIDD = new Source_Img_Degree_Direction();
  125. CP = new Cut_Position();
  126. CS = new Cut_Success();
  127. TTCP = new Trapezoid_Top_Center_Position();
  128. AF = new Auto_Foucs();
  129. AS = new Auto_Stigmatic();
  130. CPOD = new Center_Position_OffsetAngle_Direction();
  131. MS = new Measure_Size();
  132. }
  133. //1-计算原始图像偏移角度及方向
  134. public class Source_Img_Degree_Direction
  135. {
  136. public Boolean Is_Image = false;
  137. public double Degree
  138. {
  139. get { return degree; }
  140. set { degree = value; }
  141. }
  142. private double degree;
  143. public int Direction
  144. {
  145. get { return direction; }
  146. set { direction = value; }
  147. }
  148. private int direction;
  149. public int State
  150. {
  151. get { return state; }
  152. set { state = value; }
  153. }
  154. private int state;
  155. }
  156. //2-计算切割点位置
  157. public class Cut_Position
  158. {
  159. public Boolean Is_Image = false;
  160. public double Offsetx
  161. {
  162. get { return offsetx; }
  163. set { offsetx = value; }
  164. }
  165. private double offsetx;
  166. public double Offsety
  167. {
  168. get { return offsety; }
  169. set { offsety = value; }
  170. }
  171. private double offsety;
  172. public int State
  173. {
  174. get { return state; }
  175. set { state = value; }
  176. }
  177. private int state;
  178. }
  179. //3-是否切割成功
  180. public class Cut_Success
  181. {
  182. public Boolean Is_Image = false;
  183. public int State
  184. {
  185. get { return state; }
  186. set { state = value; }
  187. }
  188. private int state;
  189. }
  190. //4-计算切割后图像梯形区域上边中心点坐标
  191. public class Trapezoid_Top_Center_Position
  192. {
  193. public Boolean Is_Image = false;
  194. public double TopCenterX
  195. {
  196. get { return topCenterX; }
  197. set { topCenterX = value; }
  198. }
  199. private double topCenterX;
  200. public double TopCenterY
  201. {
  202. get { return topCenterY; }
  203. set { topCenterY = value; }
  204. }
  205. private double topCenterY;
  206. public int State
  207. {
  208. get { return state; }
  209. set { state = value; }
  210. }
  211. private int state;
  212. }
  213. //5-自动对焦
  214. public class Auto_Foucs
  215. {
  216. public Boolean Is_Image = true;
  217. public String Img_Path
  218. {
  219. get { return img_Path; }
  220. set { img_Path = value; }
  221. }
  222. private String img_Path;
  223. }
  224. //6-自动像闪
  225. public class Auto_Stigmatic
  226. {
  227. public Boolean Is_Image = true;
  228. public String Img_Path
  229. {
  230. get { return img_Path; }
  231. set { img_Path = value; }
  232. }
  233. private String img_Path;
  234. }
  235. //7-计算切割面区域中心坐标,以及偏移角度及方向
  236. public class Center_Position_OffsetAngle_Direction
  237. {
  238. public Boolean Is_Image = false;
  239. public double CenterX
  240. {
  241. get { return centerX; }
  242. set { centerX = value; }
  243. }
  244. private double centerX;
  245. public double CenterY
  246. {
  247. get { return centerY; }
  248. set { centerY = value; }
  249. }
  250. private double centerY;
  251. public double Degree
  252. {
  253. get { return degree; }
  254. set { degree = value; }
  255. }
  256. private double degree;
  257. public int Direction
  258. {
  259. get { return direction; }
  260. set { direction = value; }
  261. }
  262. private int direction;
  263. public int State
  264. {
  265. get { return state; }
  266. set { state = value; }
  267. }
  268. private int state;
  269. }
  270. //8-测量尺寸
  271. public class Measure_Size
  272. {
  273. public Boolean Is_Image = false;
  274. public int State
  275. {
  276. get { return state; }
  277. set { state = value; }
  278. }
  279. private int state;
  280. }
  281. }
  282. //图像信息实例类
  283. public ImageInformation Image_Information
  284. {
  285. get { return image_Information; }
  286. set { image_Information = value; }
  287. }
  288. private ImageInformation image_Information;
  289. public ThreadStatusEventArgs(string a_State)
  290. {
  291. picture_Information = new PictureInformation();
  292. image_Information = new ImageInformation();
  293. }
  294. }
  295. public class CutHolesStatusEventArgs
  296. {
  297. public string State
  298. {
  299. get { return m_state; }
  300. set { m_state = value; }
  301. }
  302. private string m_state;
  303. public string HoleName
  304. {
  305. get { return m_holeName; }
  306. set { m_holeName = value; }
  307. }
  308. private string m_holeName;
  309. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  310. {
  311. this.m_state = a_state;
  312. this.m_holeName = a_holeName;
  313. }
  314. }
  315. public class Measure
  316. {
  317. /// <summary>
  318. /// 图像拉直算法
  319. /// </summary>
  320. /// <param name="Slope">倾斜角度</param>
  321. /// <param name="x0">圆心坐标x</param>
  322. /// <param name="y0">圆心坐标y</param>
  323. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  324. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  325. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  326. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  327. /// <returns></returns>
  328. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  329. {
  330. try
  331. {
  332. double xr = x1 - x0;//倾斜图到中心的距离差x
  333. double yr = y1 - y0;//倾斜图到中心的距离差y
  334. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  335. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  336. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  337. double k_S = k - Slope;//通过夹角差求x2,y2
  338. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  339. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  340. if (Slope > 0 || Slope < 0)
  341. {
  342. Hx = x1 - x2;
  343. Hy = y1 - y2;
  344. }
  345. else
  346. {
  347. Hx = 0;
  348. Hy = 0;
  349. }
  350. return true;
  351. }
  352. catch (Exception)
  353. {
  354. return false;
  355. }
  356. }
  357. //Web接口类
  358. public WebResult wr = null;
  359. //样品台保护值
  360. public float X_Min = 0;
  361. public float X_Max = 0.13f;
  362. public float Y_Min = 0;
  363. public float Y_Max = 0.13f;
  364. public float Z_Min = 0;
  365. public float Z_Max = 0.05f;
  366. public float T_Min = -4;
  367. public float T_Max = 70;
  368. public float R_Min = -380;
  369. public float R_Max = 380;
  370. public float M_Min = 0;
  371. public float M_Max = 0.012f;
  372. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  373. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  374. //定义一个全局的消息类
  375. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  376. //全局只有一个fatorySEM
  377. static FactoryHardware factorySEM = FactoryHardware.Instance;
  378. ISEMControl iSEM = factorySEM.ISEM;
  379. //@的作用是不用转义字符\\只打一个就行
  380. const String ImageName1 = @"ImageSEMH.tif"; //传给客户,作水平校正
  381. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  382. const String ImageName31 = @"ImageFIBBefore.tif";
  383. const String ImageName32 = @"ImageFIBAfter.tif";
  384. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  385. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  386. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  387. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  388. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  389. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  390. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  391. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  392. const String ElyDeposition = @"Deposition.ely"; //沉积
  393. const String ElyCrossSection = @"CrossSection.ely"; //切割
  394. const float fMin = (float)0.0000002; //单位是米
  395. public Boolean key_stop = false;
  396. String focus_path = "";
  397. String data_path = "";
  398. int m_nWorkHoleNo = -1;
  399. //测量文件
  400. private MeasureFile m_measureFile;
  401. public MeasureFile MeasureFile
  402. {
  403. get { return this.m_measureFile; }
  404. set { this.m_measureFile = value; }
  405. }
  406. //测量的切割孔
  407. private List<MeasureData.CutHole> m_cutHoles;
  408. public List<MeasureData.CutHole> cutHoles
  409. {
  410. get { return this.m_cutHoles; }
  411. set { this.m_cutHoles = value; }
  412. }
  413. //工作文件夹
  414. private string m_WorkingFolder;
  415. public string WorkingFolder
  416. {
  417. get { return this.m_WorkingFolder; }
  418. set { this.m_WorkingFolder = value; }
  419. }
  420. //程序当前路径
  421. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  422. //线程状态
  423. private ThreadStatus m_ThreadStatus;
  424. public ThreadStatus TStatus
  425. {
  426. get { return this.m_ThreadStatus; }
  427. set { this.m_ThreadStatus = value; }
  428. }
  429. //测量参数
  430. private MeasureParam m_MsParam;
  431. public MeasureParam MeasParam
  432. {
  433. get { return this.m_MsParam; }
  434. set { this.m_MsParam = value; }
  435. }
  436. //构造函数
  437. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  438. {
  439. MeasParam = new MeasureParam();
  440. TStatus = new ThreadStatus();
  441. cutHoles = new List<MeasureData.CutHole>();
  442. //配置远程连接
  443. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  444. }
  445. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  446. public bool InitMeas(MeasureFile a_measureFile)
  447. {
  448. m_measureFile = a_measureFile;
  449. List<CutHole> listHoles = m_measureFile.ListCutHole;
  450. foreach (CutHole h in listHoles)
  451. {
  452. if (h.SWITCH == true)
  453. {
  454. m_cutHoles.Add(h);
  455. }
  456. }
  457. if (m_cutHoles.Count == 0)
  458. return false;
  459. this.m_MsParam = m_measureFile.MParam;
  460. return true;
  461. }
  462. public void SendMsg(string step_code)
  463. {
  464. arg.Step_Code = step_code;
  465. arg.Time = DateTime.Now;
  466. SendThreadStatus(this, arg);
  467. }
  468. public void SendCutHoleMsg(string a_state, string a_holeName)
  469. {
  470. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  471. arg.HoleName = a_holeName;
  472. arg.State = a_state;
  473. SendCutHolesStatus(this, arg);
  474. }
  475. //测量流程
  476. public void DoMeasure()
  477. {
  478. //创建线程的测量状态的更新
  479. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  480. if (SendThreadStatus != null)
  481. {
  482. //SendMsg("开始测量。");
  483. }
  484. LogManager.AddHardwareLog("开始测量",true);
  485. //检查硬件连接是否正常
  486. if (!ConnectHardware())
  487. {
  488. //SendMsg("连接硬件失败。");
  489. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  490. return;
  491. }
  492. //SendMsg("硬件连接成功。");
  493. //设置工作文件夹
  494. if (!SetWorkingFolderStr())
  495. {
  496. //SendMsg("设置工作文件夹失败");
  497. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  498. return;
  499. }
  500. //SendMsg("创建工作文件路径为" + WorkingFolder);
  501. float[] firstPosition;
  502. //将停止键复位
  503. key_stop = false;
  504. for (int i = 0; i < m_cutHoles.Count; i++)
  505. {
  506. m_nWorkHoleNo = i;
  507. arg.HoleName = m_cutHoles[i].HoleName;
  508. //创建文件夹,孔名文件夹结构
  509. //最终数据存放目录
  510. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  511. //对焦数据存放目录
  512. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  513. m_MsParam.AutoFocus.Path = focus_path;
  514. if (!Directory.Exists(focus_path))
  515. {
  516. Directory.CreateDirectory(focus_path);
  517. }
  518. //判断孔状态
  519. if(m_cutHoles[i].STATE != State.Ready)
  520. {
  521. continue;
  522. }
  523. //开始循环工作
  524. if (i == 0)
  525. {
  526. m_cutHoles[i].START = DateTime.Now;
  527. //SendMsg("第一个切孔开始测量");
  528. //切孔操作-开始
  529. m_cutHoles[i].STATE = State.InProcess;
  530. //SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  531. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  532. firstPosition = iSEM.GetStagePosition();
  533. //第一个孔的测试
  534. //成功
  535. if(FirstHole())
  536. {
  537. //保存文件,将测量状态更改
  538. m_cutHoles[i].STATE = State.Success;
  539. m_cutHoles[i].END = DateTime.Now;
  540. m_measureFile.Save();
  541. }
  542. //失败
  543. else
  544. {
  545. m_cutHoles[i].STATE = State.Failed;
  546. m_cutHoles[i].END = DateTime.Now;
  547. m_measureFile.Save();
  548. }
  549. //切孔操作-完成
  550. //SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  551. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  552. }
  553. else
  554. {
  555. //其他孔测量之前的初始化
  556. if (!OtherHole_Init())
  557. {
  558. arg.Message = "当前测量点位置初始失败!";
  559. SendMsg("0-1");
  560. continue;
  561. }
  562. //其他孔的测量
  563. m_cutHoles[i].START = DateTime.Now;
  564. //非第一个孔的测试
  565. //SendMsg("第" + i.ToString() + "个切孔开始测量");
  566. //切孔操作-开始
  567. //SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  568. m_cutHoles[i].STATE = State.InProcess;
  569. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  570. //其他孔的测试
  571. //成功
  572. if (OtherHole())
  573. {
  574. //保存文件,将测量状态更改
  575. m_cutHoles[i].STATE = State.Success;
  576. m_cutHoles[i].END = DateTime.Now;
  577. m_measureFile.Save();
  578. }
  579. //失败
  580. else
  581. {
  582. m_cutHoles[i].STATE = State.Failed;
  583. m_cutHoles[i].END = DateTime.Now;
  584. m_measureFile.Save();
  585. }
  586. //切孔操作-完成
  587. //SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  588. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  589. }
  590. if(key_stop)
  591. {
  592. m_cutHoles[i].END = DateTime.Now;
  593. m_cutHoles[i].STATE = State.Ready;
  594. m_measureFile.Save();
  595. arg.Message = "用户停止测量";
  596. SendMsg("0-0");
  597. break;
  598. }
  599. }
  600. }
  601. //检查硬件连接是否正常
  602. public bool ConnectHardware()
  603. {
  604. //返回硬件的连接状态
  605. return iSEM.ConnectStatus();
  606. }
  607. //设置工作文件夹
  608. public bool SetWorkingFolderStr()
  609. {
  610. WorkingFolder = m_measureFile.FilePath;
  611. return true;
  612. }
  613. //插入PT针
  614. public bool InsertPT()
  615. {
  616. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  617. //SendMsg("调用宏插入PT针宏文件" + fn);
  618. iSEM.CMDMCFFilename(fn);
  619. //延时1s??
  620. Thread.Sleep(1000);
  621. return true;
  622. }
  623. //撤出PT针
  624. public bool RetractPT()
  625. {
  626. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  627. //SendMsg("调用宏撤出PT针宏文件" + fn);
  628. iSEM.CMDMCFFilename(fn);
  629. //延时1s??
  630. Thread.Sleep(1000);
  631. return true;
  632. }
  633. //PT沉积
  634. public bool PTWork()
  635. {
  636. //执行PT沉积的ELY文件
  637. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  638. //SendMsg("执行PT沉积Ely文件:" + fn);
  639. if (!ExcuteEly(fn))
  640. {
  641. return false;
  642. }
  643. //等待沉积完成
  644. while (true)
  645. {
  646. Thread.Sleep(10000);
  647. if (iSEM.GetFIBMode() == 0)
  648. {
  649. break;
  650. }
  651. }
  652. return true;
  653. }
  654. //FIB切割
  655. public bool FIBWork()
  656. {
  657. //执行PT沉积的ELY文件
  658. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  659. //SendMsg("执行FIB切割Ely文件:" + fn);
  660. if (!ExcuteEly(fn))
  661. {
  662. return false;
  663. }
  664. //等待切割完成
  665. while (true)
  666. {
  667. Thread.Sleep(10000);
  668. if (iSEM.GetFIBMode() == 0)
  669. {
  670. break;
  671. }
  672. }
  673. return true;
  674. }
  675. //执行ELY文件的步骤
  676. public bool ExcuteEly(string a_filename)
  677. {
  678. //执行ELy文件有三个动作
  679. //1. 选择ELY文件
  680. //SendMsg("选择ELY文件");
  681. if (!iSEM.CmdFIBLoadELY(a_filename))
  682. {
  683. //SendMsg("选择ELY文件失败");
  684. return false;
  685. }
  686. Thread.Sleep(1000);
  687. //2. 确认ELY文件
  688. //SendMsg("确认ELY文件");
  689. if (!iSEM.CmdFIBEXPOSUREELY())
  690. {
  691. //SendMsg("确认ELY文件失败");
  692. return false;
  693. }
  694. Thread.Sleep(1000);
  695. //3. 执行ELY文件
  696. //SendMsg("执行ELY文件");
  697. if (!iSEM.CmdFIBSTARTELY())
  698. {
  699. //SendMsg("执行ELY文件失败");
  700. return false;
  701. }
  702. Thread.Sleep(1000);
  703. return true;
  704. }
  705. //执行自动对焦
  706. public bool ImageFocus(String step_code)
  707. {
  708. if (m_measureFile.MParam.FocusMode == 1)//手动
  709. {
  710. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  711. {
  712. }
  713. else
  714. {
  715. return false;
  716. }
  717. }
  718. else if(m_measureFile.MParam.FocusMode == 2)//自有自动
  719. {
  720. //郝工增加自动对焦算法
  721. //处理文件夹
  722. if (Directory.Exists(focus_path))
  723. {
  724. Directory.Delete(focus_path, true);
  725. }
  726. Thread.Sleep(3000);
  727. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  728. Thread.Sleep(1000);
  729. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  730. Thread.Sleep(1000);
  731. //再创建文件夹
  732. Directory.CreateDirectory(focus_path);
  733. //1、对焦参数类,2、输出工作距离
  734. int wd = 0;
  735. AutoFocus(m_MsParam.AutoFocus, out wd, step_code);
  736. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  737. //设置工作距离
  738. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  739. //设置完工作距离后必须延迟5秒
  740. Thread.Sleep(5000);
  741. //处理图片位置
  742. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  743. }
  744. else if(m_MsParam.FocusMode == 3) //客户自动
  745. {
  746. //后期和客户对接接口
  747. List<string> filenames = new List<string>();
  748. String retfilename = wr.Img_Auto_Focus(filenames);
  749. }
  750. else //蔡司自动对焦
  751. {
  752. iSEM.CmdAutoFocusCoarse();
  753. while(true)
  754. {
  755. Thread.Sleep(10000);
  756. if(0 == iSEM.GetAutoFunction())
  757. {
  758. break;
  759. }
  760. }
  761. iSEM.CmdAutoFocusFine();
  762. while (true)
  763. {
  764. Thread.Sleep(10000);
  765. if (0 == iSEM.GetAutoFunction())
  766. {
  767. break;
  768. }
  769. }
  770. }
  771. return true;
  772. }
  773. /// <summary>
  774. ///13. 自动 定位功能,沉积
  775. /// </summary>
  776. /// <returns></returns>
  777. public bool GetPoistion(Boolean isFirst)
  778. {
  779. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  780. int state = 0;
  781. //切换到SEM模式
  782. if (!iSEM.CmdFIBModeSEM())
  783. {
  784. arg.Message = "SEM模式切换失败";
  785. arg.State = false;
  786. SendMsg("1-1");
  787. return false;
  788. }
  789. //1.控制SEM放大600X
  790. arg.Picture_Information.Work_Status = "SEM";
  791. if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage))
  792. {
  793. arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败";
  794. arg.State = false;
  795. SendMsg("1-1");
  796. return false;
  797. }
  798. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  799. {
  800. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  801. arg.State = false;
  802. SendMsg("1-1");
  803. return false;
  804. }
  805. arg.State = true;
  806. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  807. SendMsg("1-1");
  808. //判断是否停止进程
  809. if (key_stop)
  810. {
  811. return false;
  812. }
  813. //2.控制SEM自动对焦、亮度、对比度
  814. if(ImageFocus("1-2"))
  815. {
  816. arg.Message = "自动对焦完成";
  817. arg.State = true;
  818. SendMsg("1-2");
  819. }
  820. else
  821. {
  822. arg.Message = "自动对焦失败";
  823. arg.State = false;
  824. SendMsg("1-2");
  825. }
  826. //判断是否停止进程
  827. if (key_stop)
  828. {
  829. return false;
  830. }
  831. //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
  832. if (!isFirst)
  833. {
  834. if (!TiltCorrection(54))
  835. {
  836. arg.Message = "设置SEM进行角度补偿54度失败";
  837. arg.State = false;
  838. SendMsg("1-3");
  839. return false;
  840. }
  841. Thread.Sleep(5000);
  842. arg.State = true;
  843. arg.Message = "设置SEM进行角度补偿54度成功";
  844. SendMsg("1-3");
  845. //判断是否停止进程
  846. if (key_stop)
  847. {
  848. return false;
  849. }
  850. }
  851. else
  852. {
  853. Thread.Sleep(2000);
  854. arg.State = true;
  855. arg.Message = "设置SEM进行角度补偿54度成功";
  856. SendMsg("1-3");
  857. }
  858. //4.控制SEM拍照,5保存照片=====需要更改路径
  859. String fileName1 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  860. arg.Picture_Information.Picture_FullPath = fileName1;
  861. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  862. Thread.Sleep(1000);
  863. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  864. Thread.Sleep(1000);
  865. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  866. Thread.Sleep(1000);
  867. if (!GetImage(ImageMode.SEM, fileName1))
  868. {
  869. arg.Message = "SEM拍照失败";
  870. arg.State = false;
  871. SendMsg("1-4");
  872. return false;
  873. }
  874. arg.State = true;
  875. arg.Message = "SEM拍照成功";
  876. SendMsg("1-4");
  877. Thread.Sleep(3000);
  878. //判断是否停止进程
  879. if (key_stop)
  880. {
  881. return false;
  882. }
  883. //判断是否为仅拍照,不是则执行FIB操作
  884. if (!m_MsParam.Is_Photograph)
  885. {
  886. //6.设置FIB拍照参数——扫描时间、束流等
  887. //7.控制FIB自动亮度、对比度
  888. if (!iSEM.CmdFIBModeFIB())
  889. {
  890. arg.Message = "FIB模式切换失败";
  891. arg.State = false;
  892. SendMsg("1-5");
  893. return false;
  894. }
  895. arg.State = true;
  896. arg.Picture_Information.Work_Status = "FIB";
  897. arg.Message = "FIB模式切换成功";
  898. SendMsg("1-5");
  899. Thread.Sleep(10000);
  900. //判断是否停止进程
  901. if (key_stop)
  902. {
  903. return false;
  904. }
  905. //8.控制FIB拍照
  906. //9.保存照片======更改路径
  907. String fileName2 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  908. arg.Picture_Information.Picture_FullPath = fileName2;
  909. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  910. Thread.Sleep(1000);
  911. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  912. Thread.Sleep(1000);
  913. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  914. Thread.Sleep(1000);
  915. if (!GetImage(ImageMode.FIB, fileName2))
  916. {
  917. arg.Message = "FIB拍照失败";
  918. arg.State = false;
  919. SendMsg("1-6");
  920. return false;
  921. }
  922. arg.State = true;
  923. arg.Message = "FIB拍照成功";
  924. SendMsg("1-6");
  925. Thread.Sleep(3000);
  926. //判断是否停止进程
  927. if (key_stop)
  928. {
  929. return false;
  930. }
  931. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  932. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  933. {
  934. arg.Message = "样品台移动到指定位置";
  935. arg.State = true;
  936. SendMsg("1-7");
  937. }
  938. else
  939. {
  940. wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  941. if (state == 1)
  942. {
  943. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  944. if (!iSEM.MoveStageXY(x1, y1))
  945. {
  946. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  947. arg.State = false;
  948. SendMsg("1-7");
  949. return false;
  950. }
  951. //判断是否移动完成
  952. while (true)
  953. {
  954. Thread.Sleep(5000);
  955. if (iSEM.GetStageIs() == 0)
  956. {
  957. break;
  958. }
  959. }
  960. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  961. arg.State = true;
  962. SendMsg("1-7");
  963. }
  964. else
  965. {
  966. arg.Message = "样品台移动失败";
  967. arg.State = false;
  968. SendMsg("1-7");
  969. return false;
  970. }
  971. }
  972. //判断是否停止进程
  973. if (key_stop)
  974. {
  975. return false;
  976. }
  977. //11.自动工具样品类型参数确定是否需要PT沉积
  978. if (m_MsParam.PT)
  979. {
  980. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  981. //第10步已经移动好位置
  982. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  983. x0 = iSEM.GetStageAtX();
  984. y0 = iSEM.GetStageAtY();
  985. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  986. {
  987. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
  988. arg.State = false;
  989. SendMsg("1-8");
  990. return false;
  991. }
  992. arg.State = true;
  993. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
  994. SendMsg("1-8");
  995. //判断是否停止进程
  996. if (key_stop)
  997. {
  998. return false;
  999. }
  1000. //3. 根据坐标进行PT沉积
  1001. if (!PTWork())
  1002. {
  1003. arg.Message = "PT沉积失败";
  1004. arg.State = false;
  1005. SendMsg("1-9");
  1006. return false;
  1007. }
  1008. arg.State = true;
  1009. arg.Message = "PT沉积成功";
  1010. SendMsg("1-9");
  1011. //判断是否停止进程
  1012. if (key_stop)
  1013. {
  1014. return false;
  1015. }
  1016. }
  1017. }
  1018. //12.根据梯形坐标控制FIB调整到中心位置
  1019. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1020. //以上两步已经将程序移动到11内部去做
  1021. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1022. float[] firstPosition = iSEM.GetStagePosition();
  1023. m_cutHoles[0].Position.X = firstPosition[0];
  1024. m_cutHoles[0].Position.Y = firstPosition[1];
  1025. m_cutHoles[0].Position.Z = firstPosition[2];
  1026. m_cutHoles[0].Position.T = firstPosition[3];
  1027. m_cutHoles[0].Position.R = firstPosition[4];
  1028. m_cutHoles[0].Position.M = firstPosition[5];
  1029. //这里要调用文件保存功能
  1030. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1031. + firstPosition[1].ToString() + ","
  1032. + firstPosition[2].ToString() + ","
  1033. + firstPosition[3].ToString() + ","
  1034. + firstPosition[4].ToString() + ","
  1035. + firstPosition[5].ToString() + ")";
  1036. arg.State = true;
  1037. SendMsg("1-10");
  1038. //判断是否停止进程
  1039. if (key_stop)
  1040. {
  1041. return false;
  1042. }
  1043. return true;
  1044. }
  1045. /// <summary>
  1046. /// 14. FIB切割
  1047. /// </summary>
  1048. /// <returns></returns>
  1049. public bool FIBCross()
  1050. {
  1051. int state = 0;
  1052. //切之前拍照保存,,
  1053. String fileName31 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName31;
  1054. arg.Picture_Information.Picture_FullPath = fileName31;
  1055. arg.Picture_Information.Work_Status = "FIB";
  1056. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1057. Thread.Sleep(1000);
  1058. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1059. Thread.Sleep(1000);
  1060. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1061. Thread.Sleep(1000);
  1062. if (!GetImage(ImageMode.FIB, fileName31))
  1063. {
  1064. arg.Message = "FIB切割前拍照失败";
  1065. arg.State = false;
  1066. SendMsg("1-11");
  1067. return false;
  1068. }
  1069. arg.State = true;
  1070. arg.Message = "FIB切割前拍照成功";
  1071. SendMsg("1-11");
  1072. //判断是否停止进程
  1073. if (key_stop)
  1074. {
  1075. return false;
  1076. }
  1077. //14.自动控制FIB切割
  1078. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1079. //2.控制FIB进行切割
  1080. //以上1、2步全部用ELY文件代替
  1081. if (!FIBWork())
  1082. {
  1083. arg.Message = "FIB切割失败";
  1084. arg.State = false;
  1085. SendMsg("1-12");
  1086. return false;
  1087. }
  1088. arg.State = true;
  1089. arg.Message = "FIB切割成功";
  1090. SendMsg("1-12");
  1091. Thread.Sleep(5000);
  1092. //判断是否停止进程
  1093. if (key_stop)
  1094. {
  1095. return false;
  1096. }
  1097. //3.控制FIB拍照600X
  1098. //底层没有控制方法。
  1099. //4.保存图片
  1100. String fileName32 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName32;
  1101. arg.Picture_Information.Picture_FullPath = fileName32;
  1102. arg.Picture_Information.Work_Status = "FIB";
  1103. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1104. Thread.Sleep(1000);
  1105. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1106. Thread.Sleep(1000);
  1107. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1108. Thread.Sleep(1000);
  1109. if (!GetImage(ImageMode.FIB, fileName32))
  1110. {
  1111. arg.Message = "FIB切割后拍照失败";
  1112. arg.State = false;
  1113. SendMsg("1-13");
  1114. return false;
  1115. }
  1116. arg.State = true;
  1117. arg.Message = "FIB切割后拍照成功";
  1118. SendMsg("1-13");
  1119. Thread.Sleep(3000);
  1120. //判断是否停止进程
  1121. if (key_stop)
  1122. {
  1123. return false;
  1124. }
  1125. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1126. wr.Img_Cut_Success(fileName31, fileName32, out state);
  1127. if(state == 0)
  1128. {
  1129. arg.Message = "FIB切割校验失败";
  1130. arg.State = false;
  1131. SendMsg("1-14");
  1132. return false;
  1133. }
  1134. arg.State = true;
  1135. arg.Message = "FIB切割校验成功";
  1136. SendMsg("1-14");
  1137. //判断是否停止进程
  1138. if (key_stop)
  1139. {
  1140. return false;
  1141. }
  1142. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1143. //拍完照自动解冻,这里不做处理。
  1144. return true;
  1145. }
  1146. /// <summary>
  1147. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1148. /// </summary>
  1149. /// <returns></returns>
  1150. public bool FindCross()
  1151. {
  1152. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1153. float angle = 0;
  1154. int direction = 0;
  1155. int state = 0;
  1156. //切换到SEM模式
  1157. if (!iSEM.CmdFIBModeSEM())
  1158. {
  1159. arg.Message = "SEM模式切换失败";
  1160. arg.State = false;
  1161. SendMsg("1-16");
  1162. return false;
  1163. }
  1164. arg.State = true;
  1165. arg.Message = "SEM模式切换成功";
  1166. SendMsg("1-16");
  1167. arg.Picture_Information.Work_Status = "SEM";
  1168. Thread.Sleep(10000);
  1169. //判断是否停止进程
  1170. if (key_stop)
  1171. {
  1172. return false;
  1173. }
  1174. //1.控制SEM放大到300倍
  1175. if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage))
  1176. {
  1177. arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败";
  1178. arg.State = false;
  1179. SendMsg("1-17");
  1180. return false;
  1181. }
  1182. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/2))
  1183. {
  1184. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 2).ToString("0.0") + "倍失败";
  1185. arg.State = false;
  1186. SendMsg("1-17");
  1187. return false;
  1188. }
  1189. arg.State = true;
  1190. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/2).ToString("0.0") + "倍成功";
  1191. SendMsg("1-17");
  1192. //判断是否停止进程
  1193. if (key_stop)
  1194. {
  1195. return false;
  1196. }
  1197. //2.控制SEM自动对焦、亮度、对比度-接口,,将自动对焦提出单独函数调用
  1198. if (ImageFocus("1-18"))
  1199. {
  1200. arg.Message = "自动对焦完成";
  1201. arg.State = true;
  1202. SendMsg("1-18");
  1203. }
  1204. else
  1205. {
  1206. arg.Message = "自动对焦失败";
  1207. arg.State = false;
  1208. SendMsg("1-18");
  1209. }
  1210. Thread.Sleep(5000);
  1211. //判断是否停止进程
  1212. if (key_stop)
  1213. {
  1214. return false;
  1215. }
  1216. //3.控制SEM拍照
  1217. String fileName4 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
  1218. arg.Picture_Information.Picture_FullPath = fileName4;
  1219. arg.Picture_Information.Work_Status = "SEM";
  1220. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1221. Thread.Sleep(1000);
  1222. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1223. Thread.Sleep(1000);
  1224. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1225. Thread.Sleep(1000);
  1226. if (!GetImage(ImageMode.SEM, fileName4))
  1227. {
  1228. arg.State = false;
  1229. arg.Message = "SEM拍照失败";
  1230. SendMsg("1-19");
  1231. return false;
  1232. }
  1233. arg.State = true;
  1234. arg.Message = "SEM拍照成功";
  1235. SendMsg("1-19");
  1236. Thread.Sleep(3000);
  1237. //判断是否停止进程
  1238. if (key_stop)
  1239. {
  1240. return false;
  1241. }
  1242. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1243. //5.根据坐标控制SEM移动到切孔位置,居中
  1244. //这里是否用到拉直操作,我没有加
  1245. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1246. {
  1247. arg.State = true;
  1248. arg.Message = "样品台移动到指定位置";
  1249. SendMsg("1-20");
  1250. }
  1251. else
  1252. {
  1253. wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName,
  1254. m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
  1255. if (state == 1)
  1256. {
  1257. //拉直操作
  1258. iSEM.SetScanRotationOn();
  1259. Thread.Sleep(1000);
  1260. iSEM.SetScanRotation(angle);
  1261. Thread.Sleep(5000);
  1262. //Straightening(angle, 65, 65, x1, y1, ref x2, ref y2);
  1263. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1264. if (!iSEM.MoveStageXY(x2, y2))
  1265. {
  1266. arg.State = false;
  1267. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1268. SendMsg("1-20");
  1269. return false;
  1270. }
  1271. //判断是否移动完成
  1272. while (true)
  1273. {
  1274. Thread.Sleep(5000);
  1275. if (iSEM.GetStageIs() == 0)
  1276. {
  1277. break;
  1278. }
  1279. }
  1280. arg.State = true;
  1281. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1282. SendMsg("1-20");
  1283. }
  1284. else
  1285. {
  1286. arg.Message = "样品台移动失败";
  1287. arg.State = false;
  1288. SendMsg("1-20");
  1289. return false;
  1290. }
  1291. }
  1292. //判断是否停止进程
  1293. if (key_stop)
  1294. {
  1295. return false;
  1296. }
  1297. //6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1298. x0 = iSEM.GetStageAtX();
  1299. y0 = iSEM.GetStageAtY();
  1300. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1301. {
  1302. arg.Message = "位置校验失败";
  1303. arg.State = false;
  1304. SendMsg("1-21");
  1305. return false;
  1306. }
  1307. arg.State = true;
  1308. arg.Message = "位置校验成功";
  1309. SendMsg("1-21");
  1310. //判断是否停止进程
  1311. if (key_stop)
  1312. {
  1313. return false;
  1314. }
  1315. return true;
  1316. }
  1317. /// <summary>
  1318. /// 17.自动控制SEM拍截面照
  1319. /// </summary>
  1320. /// <returns></returns>
  1321. public bool ShotSection(ref String image18)
  1322. {
  1323. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1324. int state = 0;
  1325. //1、放大6000倍,放大倍数参数photograph_
  1326. if (!iSEM.SetSEMVoltage(m_MsParam.Photograph_Voltage))
  1327. {
  1328. arg.Message = "电压设置" + m_MsParam.Photograph_Voltage.ToString("0.0") + "失败";
  1329. arg.State = false;
  1330. SendMsg("1-22");
  1331. return false;
  1332. }
  1333. if (!iSEM.SetMagnification(m_MsParam.Photograph_Magnification))
  1334. {
  1335. arg.Message = "放大倍数调整失败";
  1336. arg.State = false;
  1337. SendMsg("1-22");
  1338. return false;
  1339. }
  1340. arg.Message = "放大倍数调整成功";
  1341. arg.State = true;
  1342. SendMsg("1-22");
  1343. //判断是否停止进程
  1344. if (key_stop)
  1345. {
  1346. return false;
  1347. }
  1348. //2.控制SEM自动对焦、亮度、对比度-接口
  1349. if (ImageFocus("1-23"))
  1350. {
  1351. arg.Message = "自动对焦完成";
  1352. arg.State = true;
  1353. SendMsg("1-23");
  1354. }
  1355. else
  1356. {
  1357. arg.Message = "自动对焦失败";
  1358. arg.State = false;
  1359. SendMsg("1-23");
  1360. }
  1361. //判断是否停止进程
  1362. if (key_stop)
  1363. {
  1364. return false;
  1365. }
  1366. //3、设置SEM补偿角度
  1367. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1368. {
  1369. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1370. arg.State = false;
  1371. SendMsg("1-24");
  1372. return false;
  1373. }
  1374. arg.State = true;
  1375. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1376. SendMsg("1-24");
  1377. Thread.Sleep(5000);
  1378. //判断是否停止进程
  1379. if (key_stop)
  1380. {
  1381. return false;
  1382. }
  1383. //4、拍照,5、保存照片
  1384. String fileName5 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
  1385. arg.Picture_Information.Picture_FullPath = fileName5;
  1386. arg.Picture_Information.Work_Status = "SEM";
  1387. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1388. Thread.Sleep(1000);
  1389. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1390. Thread.Sleep(1000);
  1391. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1392. Thread.Sleep(1000);
  1393. if (!GetImage(ImageMode.SEM, fileName5))
  1394. {
  1395. arg.Message = "SEM拍照失败";
  1396. arg.State = false;
  1397. SendMsg("1-25");
  1398. return false;
  1399. }
  1400. arg.State = true;
  1401. arg.Message = "SEM拍照成功";
  1402. SendMsg("1-25");
  1403. Thread.Sleep(3000);
  1404. //判断是否停止进程
  1405. if (key_stop)
  1406. {
  1407. return false;
  1408. }
  1409. //6、获取偏移坐标,7、移动到位
  1410. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1411. {
  1412. arg.Message = "样品台移动到指定位置";
  1413. arg.State = true;
  1414. SendMsg("1-26");
  1415. }
  1416. else
  1417. {
  1418. //8,图像T形
  1419. wr.Img_Trapezoid_Top_Center_Position(fileName5, out x1, out y1, out state);
  1420. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1421. if (state == 1)
  1422. {
  1423. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1424. if (!iSEM.MoveStageXY(x1, y1))
  1425. {
  1426. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1427. arg.State = false;
  1428. SendMsg("1-26");
  1429. return false;
  1430. }
  1431. //判断是否移动完成
  1432. while (true)
  1433. {
  1434. Thread.Sleep(5000);
  1435. if (iSEM.GetStageIs() == 0)
  1436. {
  1437. break;
  1438. }
  1439. }
  1440. arg.State = true;
  1441. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1442. SendMsg("1-26");
  1443. }
  1444. else
  1445. {
  1446. arg.Message = "样品台移动失败";
  1447. arg.State = false;
  1448. SendMsg("1-26");
  1449. return false;
  1450. }
  1451. }
  1452. //判断是否停止进程
  1453. if (key_stop)
  1454. {
  1455. return false;
  1456. }
  1457. //8、验证移动准确性
  1458. x0 = iSEM.GetStageAtX();
  1459. y0 = iSEM.GetStageAtY();
  1460. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1461. {
  1462. arg.Message = "位置校验失败";
  1463. arg.State = false;
  1464. SendMsg("1-27");
  1465. return false;
  1466. }
  1467. arg.State = true;
  1468. arg.Message = "位置校验成功";
  1469. SendMsg("1-27");
  1470. //判断是否停止进程
  1471. if (key_stop)
  1472. {
  1473. return false;
  1474. }
  1475. //9、-10不操作
  1476. //11、自动对焦。与之前操作相同
  1477. if (ImageFocus("1-28"))
  1478. {
  1479. arg.Message = "自动对焦完成";
  1480. arg.State = true;
  1481. SendMsg("1-28");
  1482. }
  1483. else
  1484. {
  1485. arg.Message = "自动对焦失败";
  1486. arg.State = false;
  1487. SendMsg("1-28");
  1488. }
  1489. //判断是否停止进程
  1490. if (key_stop)
  1491. {
  1492. return false;
  1493. }
  1494. Thread.Sleep(2000);
  1495. //12拍照
  1496. String fileName6 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1497. arg.Picture_Information.Picture_FullPath = fileName6;
  1498. arg.Picture_Information.Work_Status = "SEM";
  1499. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1500. Thread.Sleep(1000);
  1501. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1502. Thread.Sleep(1000);
  1503. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1504. Thread.Sleep(1000);
  1505. if (!GetImage(ImageMode.SEM, fileName6))
  1506. {
  1507. arg.Message = "SEM拍照失败";
  1508. arg.State = false;
  1509. SendMsg("1-29");
  1510. return false;
  1511. }
  1512. arg.State = true;
  1513. image18 = fileName6;
  1514. arg.Message = "SEM拍照成功";
  1515. SendMsg("1-29");
  1516. Thread.Sleep(3000);
  1517. //判断是否停止进程
  1518. if (key_stop)
  1519. {
  1520. return false;
  1521. }
  1522. //14光束复位和Rotation关闭开关
  1523. iSEM.SetScanRotationOff();
  1524. Thread.Sleep(1000);
  1525. iSEM.SetBeamShiftX(0);
  1526. Thread.Sleep(1000);
  1527. iSEM.SetBeamShiftY(0);
  1528. Thread.Sleep(3000);
  1529. arg.Message = "光束复位成功";
  1530. arg.State = true;
  1531. SendMsg("1-30");
  1532. //判断是否停止进程
  1533. if (key_stop)
  1534. {
  1535. return false;
  1536. }
  1537. return true;
  1538. }
  1539. //第一个孔的测试过程
  1540. public bool FirstHole()
  1541. {
  1542. MeasureData.CutHole firstHole = m_cutHoles[0];
  1543. //首先默认为SEM模式
  1544. arg.Picture_Information.Work_Status = "SEM";
  1545. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1546. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1547. {
  1548. if (!InsertPT())
  1549. {
  1550. arg.Message = "插入PT针失败";
  1551. arg.State = false;
  1552. SendMsg("1-0");
  1553. return false;
  1554. }
  1555. arg.State = true;
  1556. arg.Message = "插入PT针成功";
  1557. SendMsg("1-0");
  1558. }
  1559. //判断是否停止进程
  1560. if (key_stop)
  1561. {
  1562. return false;
  1563. }
  1564. //13. 自动 定位功能
  1565. if (!GetPoistion(true))
  1566. {
  1567. return false;
  1568. }
  1569. //判断是否停止进程
  1570. if (key_stop)
  1571. {
  1572. return false;
  1573. }
  1574. //14.自动控制FIB切割
  1575. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1576. {
  1577. if (!FIBCross())
  1578. {
  1579. return false;
  1580. }
  1581. }
  1582. //判断是否停止进程
  1583. if (key_stop)
  1584. {
  1585. return false;
  1586. }
  1587. //15.根据样品类型决定是否撤出PT针
  1588. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1589. {
  1590. if (!RetractPT())
  1591. {
  1592. arg.Message = "撤出PT针失败";
  1593. arg.State = false;
  1594. SendMsg("1-15");
  1595. return false;
  1596. }
  1597. arg.State = true;
  1598. arg.Message = "撤出PT针成功";
  1599. SendMsg("1-15");
  1600. }
  1601. //判断是否停止进程
  1602. if (key_stop)
  1603. {
  1604. return false;
  1605. }
  1606. // 16.找到切割位置
  1607. if (m_MsParam.Is_Photograph == false)
  1608. {
  1609. if (!FindCross())
  1610. {
  1611. return false;
  1612. }
  1613. //判断是否停止进程
  1614. if (key_stop)
  1615. {
  1616. return false;
  1617. }
  1618. }
  1619. //将过程17最后的拍照图片提出给18步进行调用
  1620. String img18 = "";
  1621. //17.自动控制SEM拍截面照
  1622. if (!ShotSection(ref img18))
  1623. {
  1624. return false;
  1625. }
  1626. //判断是否停止进程
  1627. if (key_stop)
  1628. {
  1629. return false;
  1630. }
  1631. //18.自动层高分析
  1632. if (m_MsParam.Is_Photograph == false)
  1633. {
  1634. float size = iSEM.GetPixelSize();
  1635. float mag = iSEM.GetMagnification();
  1636. int state = 0;
  1637. wr.Img_Measure_Size(img18, mag, size, out state);
  1638. if (state == 0)
  1639. {
  1640. arg.Message = "测量尺寸失败";
  1641. arg.State = false;
  1642. SendMsg("1-31");
  1643. return false;
  1644. }
  1645. arg.State = true;
  1646. arg.Message = "测量尺寸成功";
  1647. SendMsg("1-31");
  1648. }
  1649. #region 测试程序
  1650. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  1651. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  1652. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1653. //{
  1654. // SendMsg("拍摄照片完成");
  1655. // //return true;
  1656. //}
  1657. //else
  1658. //{
  1659. // SendMsg("拍摄照片失败");
  1660. // return false;
  1661. //}
  1662. //SendMsg("图像校正36度");
  1663. ////3.设置SEM角度补偿cos36度
  1664. //if (!TiltCorrection(36))
  1665. //{
  1666. // return false;
  1667. //}
  1668. //Thread.Sleep(3000);
  1669. //string fn;
  1670. //用宏抓一般图
  1671. //Thread.Sleep(5000);
  1672. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1673. //SendMsg("用宏抓一般图" + fn);
  1674. //iSEM.CMDMCFFilename(fn);
  1675. ////延时1s??
  1676. //Thread.Sleep(5000);
  1677. ////用宏抓好图
  1678. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1679. //SendMsg("用宏抓好图" + fn);
  1680. //iSEM.CMDMCFFilename(fn);
  1681. ////延时1s??
  1682. //Thread.Sleep(30000);
  1683. //Thread.Sleep(10000);
  1684. //WorkingFolder = m_measureFile.FilePath;
  1685. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1686. //SendMsg("SEM拍照存储到" + fileName6);
  1687. //if (!GetImage(ImageMode.SEM, fileName6))
  1688. //{
  1689. // SendMsg("SEM拍照失败");
  1690. // return false;
  1691. //}
  1692. ////用宏抓标志图
  1693. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1694. //SendMsg("用宏抓标志图" + fn);
  1695. //iSEM.CMDMCFFilename(fn);
  1696. ////延时1s??
  1697. //Thread.Sleep(30000);
  1698. //Thread.Sleep(5000);
  1699. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1700. //SendMsg("用宏抓一般图" + fn);
  1701. //iSEM.CMDMCFFilename(fn);
  1702. ////延时1s??
  1703. //Thread.Sleep(5000);
  1704. //SendMsg("所有图结束");
  1705. ////17.自动控制SEM拍截面照
  1706. //{
  1707. // //1.控制SEM放大到指定参数大小范围,6000x
  1708. // if (!iSEM.SetMagnification(6000))
  1709. // {
  1710. // return false;
  1711. // }
  1712. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1713. // if (!MeasParam.FocusMode)
  1714. // {
  1715. // //弹出手动对焦的窗口
  1716. // }
  1717. // else
  1718. // {
  1719. // //调用自动对焦模块
  1720. // }
  1721. // //3.设置SEM角度补偿cos36度
  1722. // if (!TiltCorrection(36))
  1723. // {
  1724. // return false;
  1725. // }
  1726. // //4.控制SEM拍照
  1727. // //5.保存照片4
  1728. // String fileName5 = WorkingFolder + ImageName5;
  1729. // if (!GetImage(ImageMode.SEM, fileName5))
  1730. // {
  1731. // return false;
  1732. // }
  1733. // //6.将照片传给客户,获取偏移坐标
  1734. // float x6 = 0, y6 = 0;
  1735. // float angle1 = 0;
  1736. // float mage = 10000;
  1737. // //7.根据坐标控制SEM移动到分析位置
  1738. // if (!iSEM.MoveStageXY(x6, y6))
  1739. // {
  1740. // return false;
  1741. // }
  1742. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1743. // float x7 = iSEM.GetStageAtX();
  1744. // float y7 = iSEM.GetStageAtY();
  1745. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1746. // {
  1747. // return false;
  1748. // }
  1749. // //9.控制SEM平行校正,并记录校正前初始值
  1750. // float foldAnagle = iSEM.GetScanRotation();
  1751. // if (foldAnagle == float.NaN)
  1752. // {
  1753. // return false;
  1754. // }
  1755. // if (!iSEM.SetScanRotation(angle1))
  1756. // {
  1757. // return false;
  1758. // }
  1759. // //10.控制SEM放大到指定参数大小范围
  1760. // if (!iSEM.SetMagnification(mage))
  1761. // {
  1762. // return false;
  1763. // }
  1764. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1765. // if (!MeasParam.FocusMode)
  1766. // {
  1767. // //弹出手动对焦的窗口
  1768. // }
  1769. // else
  1770. // {
  1771. // //调用自动对焦模块
  1772. // }
  1773. // //12.控制SEM对分析位置拍照
  1774. // String fileName6 = WorkingFolder + ImageName6;
  1775. // if (!GetImage(ImageMode.SEM, fileName6))
  1776. // {
  1777. // return false;
  1778. // }
  1779. // //13.保存照片
  1780. // //14.控制SEM取消电子束校正,回到初始值
  1781. // if (!iSEM.SetScanRotation(foldAnagle))
  1782. // {
  1783. // return false;
  1784. // }
  1785. //}
  1786. ////18.自动层高分析
  1787. //{
  1788. // //1.获取SEM Pixel Size给客户传入参数
  1789. // if (iSEM.GetPixelSize() == float.NaN)
  1790. // {
  1791. // return false;
  1792. // }
  1793. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1794. //}
  1795. ////19.自动能谱分析
  1796. //{
  1797. // //1. 确定能谱位置
  1798. // //2. 控制牛津打能谱
  1799. // //3. 能谱分析——面扫+线扫描
  1800. //}
  1801. #endregion
  1802. return true;
  1803. }
  1804. //非第一个孔的测试过程
  1805. public bool OtherHole()
  1806. {
  1807. //首先默认为SEM模式
  1808. arg.Picture_Information.Work_Status = "SEM";
  1809. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1810. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1811. {
  1812. if (!InsertPT())
  1813. {
  1814. arg.Message = "插入PT针失败";
  1815. SendMsg("1-0");
  1816. return false;
  1817. }
  1818. arg.Message = "插入PT针成功";
  1819. SendMsg("1-0");
  1820. }
  1821. //判断是否停止进程
  1822. if (key_stop)
  1823. {
  1824. return false;
  1825. }
  1826. //13. 自动 定位功能
  1827. if (!GetPoistion(false))
  1828. {
  1829. return false;
  1830. }
  1831. //判断是否停止进程
  1832. if (key_stop)
  1833. {
  1834. return false;
  1835. }
  1836. //14.自动控制FIB切割
  1837. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1838. {
  1839. if (!FIBCross())
  1840. {
  1841. return false;
  1842. }
  1843. }
  1844. //判断是否停止进程
  1845. if (key_stop)
  1846. {
  1847. return false;
  1848. }
  1849. //15.根据样品类型决定是否撤出PT针
  1850. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1851. {
  1852. if (!RetractPT())
  1853. {
  1854. arg.Message = "撤出PT针失败";
  1855. SendMsg("1-15");
  1856. return false;
  1857. }
  1858. arg.Message = "撤出PT针成功";
  1859. SendMsg("1-15");
  1860. }
  1861. //判断是否停止进程
  1862. if (key_stop)
  1863. {
  1864. return false;
  1865. }
  1866. // 16.找到切割位置
  1867. if (m_MsParam.Is_Photograph == false)
  1868. {
  1869. if (!FindCross())
  1870. {
  1871. return false;
  1872. }
  1873. //判断是否停止进程
  1874. if (key_stop)
  1875. {
  1876. return false;
  1877. }
  1878. }
  1879. //将过程17最后的拍照图片提出给18步进行调用
  1880. String img18 = "";
  1881. //17.自动控制SEM拍截面照
  1882. if (!ShotSection(ref img18))
  1883. {
  1884. return false;
  1885. }
  1886. //判断是否停止进程
  1887. if (key_stop)
  1888. {
  1889. return false;
  1890. }
  1891. //18.自动层高分析
  1892. if (m_MsParam.Is_Photograph == false)
  1893. {
  1894. float size = iSEM.GetPixelSize();
  1895. float mag = iSEM.GetMagnification();
  1896. int state = 0;
  1897. wr.Img_Measure_Size(img18, mag, size, out state);
  1898. if (state == 0)
  1899. {
  1900. arg.Message = "测量尺寸失败";
  1901. SendMsg("1-31");
  1902. return false;
  1903. }
  1904. arg.Message = "测量尺寸成功";
  1905. SendMsg("1-31");
  1906. }
  1907. #region 测试程序
  1908. //string fn;
  1909. //用宏抓一般图
  1910. //Thread.Sleep(5000);
  1911. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1912. //SendMsg("用宏抓一般图" + fn);
  1913. //iSEM.CMDMCFFilename(fn);
  1914. ////延时1s??
  1915. //Thread.Sleep(5000);
  1916. ////用宏抓好图
  1917. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1918. //SendMsg("用宏抓好图" + fn);
  1919. //iSEM.CMDMCFFilename(fn);
  1920. ////延时1s??
  1921. //Thread.Sleep(30000);
  1922. //Thread.Sleep(10000);
  1923. //WorkingFolder = m_measureFile.FilePath;
  1924. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1925. //SendMsg("SEM拍照存储到" + fileName6);
  1926. //if (!GetImage(ImageMode.SEM, fileName6))
  1927. //{
  1928. // SendMsg("SEM拍照失败");
  1929. // return false;
  1930. //}
  1931. ////用宏抓标志图
  1932. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1933. //SendMsg("用宏抓标志图" + fn);
  1934. //iSEM.CMDMCFFilename(fn);
  1935. ////延时1s??
  1936. //Thread.Sleep(30000);
  1937. ////恢复简单抓图
  1938. //Thread.Sleep(5000);
  1939. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1940. //SendMsg("用宏抓一般图" + fn);
  1941. //iSEM.CMDMCFFilename(fn);
  1942. //SendMsg("所有图结束");
  1943. #endregion
  1944. return true;
  1945. }
  1946. //测试完第一个孔后的样品台初始化操作。
  1947. //再调用CommonWork执行非第一个孔的测试过程
  1948. public bool OtherHole_Init()
  1949. {
  1950. //SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1951. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1952. #region 1. 初始化
  1953. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1954. //读取图像冻结状态
  1955. float ffrozen = iSEM.GetImageFrozen();
  1956. if (ffrozen == float.NaN)
  1957. {
  1958. return false;
  1959. }
  1960. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1961. {
  1962. //SendMsg("样品台恢复到水平");
  1963. //return true;
  1964. }
  1965. else
  1966. {
  1967. //SendMsg("禁止样品台恢复到水平");
  1968. return false;
  1969. }
  1970. //判断是否停止进程
  1971. if (key_stop)
  1972. {
  1973. return false;
  1974. }
  1975. //2. 调节样品1号孔的样品台6轴坐标
  1976. //3. 将样品1号孔坐标2存入数据库
  1977. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1978. if (!iSEM.SetStageGotoT(0))
  1979. {
  1980. return false;
  1981. }
  1982. while (true)
  1983. {
  1984. Thread.Sleep(10000);
  1985. if (iSEM.GetStageIs() == 0)
  1986. {
  1987. break;
  1988. }
  1989. }
  1990. //判断是否停止进程
  1991. if (key_stop)
  1992. {
  1993. return false;
  1994. }
  1995. //5. 获取光镜2号孔XY坐标
  1996. //SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1997. //6. 根据光镜坐标控制样品台移动
  1998. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1999. {
  2000. //SendMsg("移动失败");
  2001. return false;
  2002. }
  2003. while (true)
  2004. {
  2005. Thread.Sleep(10000);
  2006. if (iSEM.GetStageIs() == 0)
  2007. {
  2008. break;
  2009. }
  2010. }
  2011. //判断是否停止进程
  2012. if (key_stop)
  2013. {
  2014. return false;
  2015. }
  2016. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  2017. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  2018. {
  2019. //SendMsg("样品台旋转");
  2020. //return true;
  2021. }
  2022. else
  2023. {
  2024. //SendMsg("禁止样品台旋转");
  2025. return false;
  2026. }
  2027. if (!iSEM.SetStageGotoT(54))
  2028. {
  2029. return false;
  2030. }
  2031. while (true)
  2032. {
  2033. Thread.Sleep(10000);
  2034. if (iSEM.GetStageIs() == 0)
  2035. {
  2036. break;
  2037. }
  2038. }
  2039. //判断是否停止进程
  2040. if (key_stop)
  2041. {
  2042. return false;
  2043. }
  2044. //SendMsg("拉直操作");
  2045. #endregion
  2046. //其他操作与第一个孔相同
  2047. if (!OtherHole())
  2048. {
  2049. return false;
  2050. }
  2051. return true;
  2052. }
  2053. //角度补偿
  2054. public bool TiltCorrection(float a_fAngle)
  2055. {
  2056. //记录原来电镜的状态
  2057. // bool bTilt = false;
  2058. //float fOldTilt = iSEM.GetTiltCorrection();
  2059. //if (fOldTilt == float.NaN)
  2060. //{
  2061. // return false;
  2062. //}
  2063. //else if (fOldTilt == 1)
  2064. //{
  2065. // bTilt = true;
  2066. //}
  2067. //else if (fOldTilt == 0)
  2068. //{
  2069. // bTilt = false;
  2070. //}
  2071. //float fOldAngle = iSEM.GetTiltAngle();
  2072. //if (fOldAngle == float.NaN)
  2073. //{
  2074. // return false;
  2075. //}
  2076. //开启校正
  2077. //SendMsg("开启校正");
  2078. if (!iSEM.SetTiltAngleOn())
  2079. {
  2080. return false;
  2081. }
  2082. //设置校正角度
  2083. //if (!iSEM.SetTiltAngle(fOldAngle))
  2084. //{
  2085. // return false;
  2086. //}
  2087. //恢复原始状态
  2088. //SendMsg("校正角度"+ a_fAngle.ToString());
  2089. if (!iSEM.SetTiltAngle(a_fAngle))
  2090. {
  2091. return false;
  2092. }
  2093. //if (bTilt)
  2094. //{
  2095. // if (!iSEM.SetTiltCorrectionOn())
  2096. // {
  2097. // return false;
  2098. // }
  2099. //}
  2100. //else
  2101. //{
  2102. // if (!iSEM.SetTiltCorrectionOff())
  2103. // {
  2104. // return false;
  2105. // }
  2106. //}
  2107. return true;
  2108. }
  2109. //拍图
  2110. public bool GetImage(ImageMode a_mode, String a_fileName)
  2111. {
  2112. //1. 图像解冻
  2113. float foldFrozen = iSEM.GetImageFrozen();
  2114. if (foldFrozen == float.NaN)
  2115. {
  2116. return false;
  2117. }
  2118. if (!iSEM.ImageLive())
  2119. {
  2120. return false;
  2121. }
  2122. //2. 确认图像模式
  2123. if (ImageMode.SEM == a_mode)
  2124. {
  2125. if (!iSEM.CmdFIBModeSEM())
  2126. {
  2127. return false;
  2128. }
  2129. }
  2130. else if (ImageMode.FIB == a_mode)
  2131. {
  2132. if (!iSEM.CmdFIBModeFIB())
  2133. {
  2134. return false;
  2135. }
  2136. }
  2137. else
  2138. {
  2139. return false;
  2140. }
  2141. //3. 获取分辨率
  2142. int[] ImageSize = iSEM.GetImageStore();
  2143. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2144. {
  2145. return false;
  2146. }
  2147. short width = (short)ImageSize[0];
  2148. short height = (short)ImageSize[1];
  2149. //4. 抓图
  2150. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  2151. {
  2152. return false;
  2153. }
  2154. //5. 恢复初始状态
  2155. if (foldFrozen == 0)
  2156. {
  2157. if (!iSEM.ImageLive())
  2158. {
  2159. return false;
  2160. }
  2161. }
  2162. else if (foldFrozen == 1)
  2163. {
  2164. if (!iSEM.ImageFrozen())
  2165. {
  2166. return false;
  2167. }
  2168. }
  2169. return true;
  2170. }
  2171. //自动聚焦
  2172. public bool AutoFocus(FocusParam a_param, out int a_nWd, String step_code)
  2173. {
  2174. a_nWd = 0;
  2175. float wd = iSEM.GetWorkingDistance();
  2176. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  2177. if (a_param == null)
  2178. {
  2179. return false;
  2180. }
  2181. string path = a_param.Path;
  2182. if (!Directory.Exists(path))
  2183. {
  2184. return false;
  2185. }
  2186. string path_coarse = a_param.Path + "\\Coarse";
  2187. if (!Directory.Exists(path_coarse))
  2188. {
  2189. Directory.CreateDirectory(path_coarse);
  2190. }
  2191. string path_fine = a_param.Path + "\\Fine";
  2192. if (!Directory.Exists(path_fine))
  2193. {
  2194. Directory.CreateDirectory(path_fine);
  2195. }
  2196. //1. 拍照
  2197. //1.1, 粗拍照
  2198. //1.1.1, 根据参数计算拍照次数
  2199. double nUp = a_param.UP * 100.0 ;
  2200. double nDown = a_param.Down * 100.0;
  2201. double nStep = a_param.Step * 100.0;
  2202. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  2203. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  2204. //粗拍照
  2205. for (int i = 0; i < nTimes; i++)
  2206. {
  2207. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  2208. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2209. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  2210. Thread.Sleep(8000);
  2211. int swd = cWd / 100;
  2212. //SendMsg("wd = " + swd.ToString() +"um");
  2213. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  2214. arg.Picture_Information.Picture_FullPath = fileName;
  2215. if (!GetImage(ImageMode.SEM, fileName))
  2216. {
  2217. return false;
  2218. }
  2219. SendMsg(step_code);
  2220. }
  2221. //1.2, 选定细拍照的工作距离
  2222. int CorWd;
  2223. ChooseBest(path_coarse,out CorWd);
  2224. a_nWd = CorWd;
  2225. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  2226. //1.3, 细拍照
  2227. if ( (CorWd - a_param.Range * 100.0) <=0)
  2228. {
  2229. return false;
  2230. }
  2231. double nfUp = CorWd - a_param.Range * 100.0;
  2232. double nfStep = a_param.fStep * 100.0;
  2233. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  2234. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  2235. for (int i = 0; i < nfTimes; i++)
  2236. {
  2237. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  2238. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2239. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  2240. Thread.Sleep(8000);
  2241. int swd = cWd / 100;
  2242. //SendMsg("wd = " + swd.ToString() + "um");
  2243. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  2244. arg.Picture_Information.Picture_FullPath = fileName;
  2245. if (!GetImage(ImageMode.SEM, fileName))
  2246. {
  2247. return false;
  2248. }
  2249. SendMsg(step_code);
  2250. }
  2251. int fineWd;
  2252. ChooseBest(path_fine, out fineWd);
  2253. //SendMsg("wd fine max = " + fineWd.ToString());
  2254. a_nWd = fineWd;
  2255. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  2256. return true;
  2257. }
  2258. //LoG算子计算
  2259. private double LoGMean(string a_strImgPath)
  2260. {
  2261. //读入Img文件
  2262. if (!File.Exists(a_strImgPath))
  2263. {
  2264. return 0;
  2265. }
  2266. Mat src, gray_src;
  2267. int kernel_size = 3;
  2268. src = Cv2.ImRead(a_strImgPath);
  2269. gray_src = new Mat();
  2270. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2271. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2272. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2273. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2274. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  2275. Cv2.ConvertScaleAbs(src, src);
  2276. //图像的平均灰度
  2277. double meanValue = 0.0;
  2278. meanValue = Cv2.Mean(src)[0];
  2279. return meanValue;
  2280. }
  2281. //梯度计算
  2282. private double Tenengrad(string a_strImgPath)
  2283. {
  2284. //读入Img文件
  2285. if (!File.Exists(a_strImgPath))
  2286. {
  2287. return 0;
  2288. }
  2289. Mat src;
  2290. src = Cv2.ImRead(a_strImgPath);
  2291. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2292. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2293. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2294. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2295. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  2296. //图像的平均灰度
  2297. double meanValue = 0.0;
  2298. meanValue = Cv2.Mean(src)[0];
  2299. return meanValue;
  2300. }
  2301. //梯度计算
  2302. private double TTgrad(string a_strImgPath)
  2303. {
  2304. //读入Img文件
  2305. if (!File.Exists(a_strImgPath))
  2306. {
  2307. return 0;
  2308. }
  2309. Mat src;
  2310. src = Cv2.ImRead(a_strImgPath);
  2311. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2312. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2313. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2314. Mat scalex = new Mat();
  2315. Mat scaley = new Mat();
  2316. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  2317. Cv2.ConvertScaleAbs(src, scalex);
  2318. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  2319. Cv2.ConvertScaleAbs(src, scaley);
  2320. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  2321. //图像的平均灰度
  2322. double meanValue = 0.0;
  2323. meanValue = Cv2.Mean(src)[0];
  2324. return meanValue;
  2325. }
  2326. //三选二算法
  2327. private void ChooseBest(string a_strImgPath, out int a_nWd)
  2328. {
  2329. a_nWd = -1;
  2330. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  2331. float[] values = new float[files.Length];
  2332. double smax1 = LoGMean(files[0]);
  2333. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  2334. double smax2 = Tenengrad(files[0]);
  2335. int wdmax2 = wdmax1;
  2336. double smax3 = TTgrad(files[0]);
  2337. int wdmax3 = wdmax1;
  2338. int x = 0;
  2339. foreach (var file in files)
  2340. {
  2341. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  2342. double svalue1 = LoGMean(file);
  2343. double svalue2 = Tenengrad(file);
  2344. double svalue3 = TTgrad(file);
  2345. if (smax1 < svalue1)
  2346. {
  2347. smax1 = svalue1;
  2348. wdmax1 = wd;
  2349. }
  2350. if (smax2 < svalue2)
  2351. {
  2352. smax2 = svalue2;
  2353. wdmax2 = wd;
  2354. }
  2355. if (smax3 < svalue3)
  2356. {
  2357. smax3 = svalue3;
  2358. wdmax3 = wd;
  2359. }
  2360. x++;
  2361. }
  2362. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  2363. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  2364. {
  2365. a_nWd = wdmax1;
  2366. //SendMsg("焦距 = " + wdmax1.ToString());
  2367. }
  2368. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  2369. {
  2370. a_nWd = wdmax2;
  2371. //SendMsg("焦距 = " + wdmax2.ToString());
  2372. }
  2373. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  2374. {
  2375. a_nWd = wdmax3;
  2376. //SendMsg("焦距 = " + wdmax3.ToString());
  2377. }
  2378. else
  2379. {
  2380. //SendMsg("对焦失败。");
  2381. }
  2382. }
  2383. }
  2384. }