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|
- //时间:20200610
- //作者:郝爽
- //功能:测量线程
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using System.Windows.Forms;
- using System.Threading;
- using System.IO;
- using System.Drawing;
- using System.Xml;
- using SmartSEMControl;
- using MeasureData;
- using FileManager;
- using WebManager;
- using OpenCvSharp;
- using DBManager;
- using Extender;
- using CookComputing.XmlRpc;
- namespace MeasureThread
- {
- #region 信息定义
- public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
- public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
- //测量线程状态
- public class ThreadStatusEventArgs
- {
- //状态
- public Boolean State
- {
- get { return m_state; }
- set { m_state = value; }
- }
- private Boolean m_state;
- //时间
- public DateTime Time
- {
- get { return m_time; }
- set { m_time = value; }
- }
- private DateTime m_time;
- //步骤代码
- public String Step_Code
- {
- get { return step_Code; }
- set { step_Code = value; }
- }
- private String step_Code;
- //其他消息
- public String Message
- {
- get { return this.message; }
- set { this.message = value; }
- }
- private String message;
- //孔名
- public String HoleName
- {
- get { return this.holeName; }
- set { this.holeName = value; }
- }
- private String holeName;
- //图片信息
- public class PictureInformation
- {
- public String Picture_FullPath
- {
- get { return picture_FullPath; }
- set { picture_FullPath = value; }
- }
- private String picture_FullPath;
- public double Work_Voltage
- {
- get { return work_Voltage; }
- set { work_Voltage = value; }
- }
- private double work_Voltage;
- public double Magnification
- {
- get { return magnification; }
- set { magnification = value; }
- }
- private double magnification;
- public double Work_Distance
- {
- get { return work_Distance; }
- set { work_Distance = value; }
- }
- private double work_Distance;
- public String Work_Status
- {
- get { return work_Status; }
- set { work_Status = value; }
- }
- private String work_Status;
- }
- //图片信息实例类
- public PictureInformation Picture_Information
- {
- get { return picture_Information; }
- set { picture_Information = value; }
- }
- private PictureInformation picture_Information;
- //图像处理信息
- public class ImageInformation
- {
- public int Method_Name
- {
- get { return method_Name; }
- set { method_Name = value; }
- }
- private int method_Name;
- public Source_Img_Degree_Direction SIDD;
- public Cut_Position CP;
- public Cut_Success CS;
- public Trapezoid_Top_Center_Position TTCP;
- public Auto_Foucs AF;
- public Auto_Stigmatic AS;
- public Center_Position_OffsetAngle_Direction CPOD;
- public Measure_Size MS;
- public ImageInformation()
- {
- SIDD = new Source_Img_Degree_Direction();
- CP = new Cut_Position();
- CS = new Cut_Success();
- TTCP = new Trapezoid_Top_Center_Position();
- AF = new Auto_Foucs();
- AS = new Auto_Stigmatic();
- CPOD = new Center_Position_OffsetAngle_Direction();
- MS = new Measure_Size();
- }
- //1-计算原始图像偏移角度及方向
- public class Source_Img_Degree_Direction
- {
- public Boolean Is_Image = false;
- public double Degree
- {
- get { return degree; }
- set { degree = value; }
- }
- private double degree;
- public int Direction
- {
- get { return direction; }
- set { direction = value; }
- }
- private int direction;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //2-计算切割点位置
- public class Cut_Position
- {
- public Boolean Is_Image = false;
- public double Offsetx
- {
- get { return offsetx; }
- set { offsetx = value; }
- }
- private double offsetx;
- public double Offsety
- {
- get { return offsety; }
- set { offsety = value; }
- }
- private double offsety;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //3-是否切割成功
- public class Cut_Success
- {
- public Boolean Is_Image = false;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //4-计算切割后图像梯形区域上边中心点坐标
- public class Trapezoid_Top_Center_Position
- {
- public Boolean Is_Image = false;
- public double TopCenterX
- {
- get { return topCenterX; }
- set { topCenterX = value; }
- }
- private double topCenterX;
- public double TopCenterY
- {
- get { return topCenterY; }
- set { topCenterY = value; }
- }
- private double topCenterY;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //5-自动对焦
- public class Auto_Foucs
- {
- public Boolean Is_Image = true;
- public String Img_Path
- {
- get { return img_Path; }
- set { img_Path = value; }
- }
- private String img_Path;
- }
- //6-自动像闪
- public class Auto_Stigmatic
- {
- public Boolean Is_Image = true;
- public String Img_Path
- {
- get { return img_Path; }
- set { img_Path = value; }
- }
- private String img_Path;
- }
- //7-计算切割面区域中心坐标,以及偏移角度及方向
- public class Center_Position_OffsetAngle_Direction
- {
- public Boolean Is_Image = false;
- public double CenterX
- {
- get { return centerX; }
- set { centerX = value; }
- }
- private double centerX;
- public double CenterY
- {
- get { return centerY; }
- set { centerY = value; }
- }
- private double centerY;
- public double Degree
- {
- get { return degree; }
- set { degree = value; }
- }
- private double degree;
- public int Direction
- {
- get { return direction; }
- set { direction = value; }
- }
- private int direction;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //8-测量尺寸
- public class Measure_Size
- {
- public Boolean Is_Image = false;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- }
- //图像处理信息实例类
- public ImageInformation Image_Information
- {
- get { return image_Information; }
- set { image_Information = value; }
- }
- private ImageInformation image_Information;
- public ThreadStatusEventArgs(string a_State)
- {
- picture_Information = new PictureInformation();
- image_Information = new ImageInformation();
- }
- }
- //切孔状态
- public class CutHolesStatusEventArgs
- {
- public string State
- {
- get { return m_state; }
- set { m_state = value; }
- }
- private string m_state;
- public string HoleName
- {
- get { return m_holeName; }
- set { m_holeName = value; }
- }
- private string m_holeName;
- public CutHolesStatusEventArgs(string a_state, string a_holeName)
- {
- this.m_state = a_state;
- this.m_holeName = a_holeName;
- }
- }
- #endregion
- public class Measure
- {
- #region 变量定义
- //Web接口类
- public WebResult wr = null;
- //SmartSEM远程路径
- public String RemoteELYPath = "";
- public String RemoteMLFPath = "";
- //扫描周期
- private float cycle_time = 0;
- //人工干预
- public int hand_intervene = 2;
- //样品台保护值
- public float X_Min = 0;
- public float X_Max = 0.13f;
- public float Y_Min = 0;
- public float Y_Max = 0.13f;
- public float Z_Min = 0;
- public float Z_Max = 0.05f;
- public float T_Min = -4;
- public float T_Max = 70;
- public float R_Min = -380;
- public float R_Max = 380;
- public float M_Min = 0;
- public float M_Max = 0.012f;
- public event ThreadStatusHandler SendThreadStatus; // 声明事件
- public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
- //定义一个全局的消息类
- ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
- //全局只有一个fatorySEM
- static FactoryHardware factorySEM = FactoryHardware.Instance;
- ISEMControl iSEM = factorySEM.ISEM;
- //@的作用是不用转义字符\\只打一个就行
- const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
- const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
- //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
- const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
- const String ImageName31 = @"FIBBefore.tif";
- const String ImageName32 = @"FIBAfter.tif";
- const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
- const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
- const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
- const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
- const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
- const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
- const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
- const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
- const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
- const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
- const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
- const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
- const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
- const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
- const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
- const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
- const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
- const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
- const String ElyDeposition = @"Deposition.ely"; //沉积
- const String ElyCrossSection = @"CrossSection.ely"; //切割
- const float fMin = (float)0.0000002; //单位是米
- const float fSateyZ = (float)0.03;//单位是米
- public Boolean key_stop = false;
- String focus_path = "";
- String FIBfocus_path = "";
- String StigX_path = "";
- String StigY_path = "";
- String EDS_path = "";
- String data_path = "";
- int m_nWorkHoleNo = -1;
- //测量文件
- private MeasureFile m_measureFile;
- public MeasureFile MeasureFile
- {
- get { return this.m_measureFile; }
- set { this.m_measureFile = value; }
- }
- //测量的切割孔,这个切孔的状态要保存的测量文件中去
- private List<MeasureData.CutHole> m_cutHoles;
- public List<MeasureData.CutHole> cutHoles
- {
- get { return this.m_cutHoles; }
- set { this.m_cutHoles = value; }
- }
- //工作文件夹
- private string m_WorkingFolder;
- public string WorkingFolder
- {
- get { return this.m_WorkingFolder; }
- set { this.m_WorkingFolder = value; }
- }
- //程序当前路径
- private string m_ProgramFolder = Directory.GetCurrentDirectory();
- //线程状态
- private ThreadStatus m_ThreadStatus;
- public ThreadStatus TStatus
- {
- get { return this.m_ThreadStatus; }
- set { this.m_ThreadStatus = value; }
- }
- #endregion
- //构造函数
- public Measure(String webServerIP, String webServerPort, String webServerUrl)
- {
- LogManager.AddHardwareLog("进入构造函数", true);
- TStatus = new ThreadStatus();
- cutHoles = new List<MeasureData.CutHole>();
- //配置远程连接
- wr = new WebResult(webServerIP,webServerPort,webServerUrl);
- }
- //初始化测量业务, 读测量文件,判断是否有可测试的切孔
- public bool InitMeas(MeasureFile a_measureFile)
- {
- LogManager.AddHardwareLog("进入初始化函数", true);
- m_measureFile = a_measureFile;
- List<CutHole> listHoles = m_measureFile.ListCutHole;
- foreach (CutHole h in listHoles)
- {
- if (h.SWITCH == true)
- {
- m_cutHoles.Add(h);
- }
- }
-
- if (m_cutHoles.Count == 0)
- return false;
- if (m_measureFile.MParam.EDS == true)
- {
- LogManager.AddHardwareLog("能谱分析", true);
- Init_MeasDB();
- }
- return true;
- }
- //给前台UI发送消息步骤
- public void SendMsg(string step_code)
- {
- arg.Step_Code = step_code;
- arg.Time = DateTime.Now;
- SendThreadStatus(this, arg);
- }
- //给前台UI发送孔状态信息
- public void SendCutHoleMsg(string a_state, string a_holeName)
- {
- CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
- arg.HoleName = a_holeName;
- arg.State = a_state;
- SendCutHolesStatus(this, arg);
- }
- //测量流程
- public void DoMeasure()
- {
- //创建线程的测量状态的更新
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
- LogManager.AddHardwareLog("测量线程:开始测量",true);
- //检查硬件连接是否正常
- LogManager.AddHardwareLog("测量线程:连接硬件", true);
- if (!ConnectHardware())
- {
- MessageBox.Show("连接电镜失败!","重要错误",MessageBoxButtons.OK,MessageBoxIcon.Error);
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
- LogManager.AddHardwareLog("测量线程报错:连接硬件硬件连接失败", false);
- return;
- }
- //设置工作文件夹
- LogManager.AddHardwareLog("测量线程:设置工作文件夹", true);
- if (!SetWorkingFolderStr())
- {
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
- LogManager.AddHardwareLog("测量线程报错:设置文件夹失败", false);
- return;
- }
- //设置SmartSEM远程路径
- iSEM.SetRemoteELYPath(RemoteELYPath);
- iSEM.SetRemoteMLFPath(RemoteMLFPath);
- //增加EDS控制
- //将停止键复位
- key_stop = false;
- //开始测量就将模式设置为SEM
- LogManager.AddHardwareLog("测量线程:切换到SEM模式", true);
- if (!iSEM.CmdFIBModeSEM())
- {
- LogManager.AddHardwareLog("测量线程报错:开始切换到SEM模式失败。", false);
- return;
- }
- arg.Picture_Information.Work_Status = "SEM";
- //设置扫描周期
- LogManager.AddHardwareLog("测量线程:设置图像扫描周期为对焦周期", true);
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- if (cycle_time == 0)
- {
- LogManager.AddHardwareLog("测量线程报错:获取扫描周期时间失败", false);
- return;
- }
- Thread.Sleep((int)cycle_time +100);
- //开始做各个孔的检测
- for (int i = 0; i < m_cutHoles.Count; i++)
- {
- //自动亮度对比度
- LogManager.AddHardwareLog("测量线程:开启自动亮度,对比度调节", true);
- iSEM.SetAutoBright(100);
- Thread.Sleep(200);
- iSEM.SetAutoContrast(100);
- Thread.Sleep(200);
- //LogManager.AddHardwareLog("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
- if (!iSEM.SetAutoVideoBrightnessAndContrast())
- {
- LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
- return;
- }
- Thread.Sleep(5000);
- LogManager.AddHardwareLog("测量线程:测试第"+i.ToString()+"个分析点。", true);
- //记录测量序号和孔名
- m_nWorkHoleNo = i;
- arg.HoleName = m_cutHoles[i].HoleName;
- //最终数据存放目录
- data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
- //对焦数据存放目录
- focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
- m_measureFile.MParam.AutoFocus.Path = focus_path;
- if (!Directory.Exists(focus_path))
- {
- Directory.CreateDirectory(focus_path);
- }
- //StigX数据存放目录
- StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
- m_measureFile.MParam.AutoStigX.Path = StigX_path;
- if (!Directory.Exists(StigX_path))
- {
- Directory.CreateDirectory(StigX_path);
- }
- //StigY数据存放目录
- StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
- m_measureFile.MParam.AutoStigY.Path = StigY_path;
- if (!Directory.Exists(StigY_path))
- {
- Directory.CreateDirectory(StigY_path);
- }
- //EDS数据存放路径
- if (m_measureFile.MParam.EDS == true)
- {
- EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
- m_measureFile.MParam.EDSP.Path = EDS_path;
- if (!Directory.Exists(EDS_path))
- {
- Directory.CreateDirectory(EDS_path);
- }
- }
- //判断孔状态
- if (m_cutHoles[i].STATE != State.Ready)
- {
- LogManager.AddHardwareLog("测试孔"+ m_cutHoles[i].HoleName+"状态非就绪,不予测量。", true);
- continue;
- }
- //20201127增加Scanrotate Off
- iSEM.SetScanRotationOff();
- Thread.Sleep(200);
- //20.光束等复位
- iSEM.SetBeamShiftX(0);
- Thread.Sleep(200);
- iSEM.SetBeamShiftY(0);
- Thread.Sleep(200);
- //开始循环工作
- if (i == 0)
- {
- LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName+"开始测量。", true);
- m_cutHoles[i].START = DateTime.Now;
- //切孔操作-开始
- m_cutHoles[i].STATE = State.InProcess;
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- LogManager.AddHardwareLog("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
- + m_cutHoles[0].Position.X.ToString()+","
- + m_cutHoles[0].Position.Y.ToString()+","
- + m_cutHoles[0].Position.Z.ToString() + ")", true);
- #region 坐标恢复
- //0、先移动Z轴到比较低的位置上。
- if (m_measureFile.MParam.Title)//如果是倾斜样品台,移动Z轴
- {
- if (!iSEM.SetStageGotoZ(fSateyZ))
- {
- arg.State = false;
- arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
- SendMsg("1-0");
- LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
- m_cutHoles[i].STATE = State.Failed;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- Thread.Sleep(3000);
- continue;
- }
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- m_cutHoles[i].STATE = State.Failed;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- LogManager.AddHardwareLog("停止键被按下", true);
- return;
- }
- }
- //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
- if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
- {
- arg.State = false;
- arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
- SendMsg("1-0");
- LogManager.AddHardwareLog("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
- m_cutHoles[i].STATE = State.Failed;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- Thread.Sleep(3000);
- continue;
- }
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- m_cutHoles[i].STATE = State.Failed;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- LogManager.AddHardwareLog("停止键被按下", true);
- return;
- }
- //2、移动XY轴
- if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
- {
- arg.State = false;
- arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
- SendMsg("1-0");
- LogManager.AddHardwareLog("测量线程报错:样品台XY轴移动失败,(X,Y)为"
- + m_cutHoles[0].Position.X.ToString() + ","
- + m_cutHoles[0].Position.Y.ToString()+ ")", false);
- m_cutHoles[i].STATE = State.Failed;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- Thread.Sleep(3000);
- continue;
- }
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- m_cutHoles[i].STATE = State.Failed;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- LogManager.AddHardwareLog("停止键被按下", true);
- return;
- }
- //3、恢复Z轴
- if (m_measureFile.MParam.Title)
- {
- //恢复Z轴
- if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
- {
- arg.State = false;
- arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
- SendMsg("1-0");
- LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
- m_cutHoles[i].STATE = State.Failed;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- Thread.Sleep(3000);
- continue;
- }
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下。", true);
- m_cutHoles[i].STATE = State.Failed;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- return;
- }
- }
- arg.State = true;
- arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
- SendMsg("1-0");
- //4、设置WD
- iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
- Thread.Sleep(1000);
- #endregion
- //第一个点开始测量
- if (FirstHole())
- {
- //保存文件,将测量状态更改
- m_cutHoles[i].STATE = State.Success;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- }
- //失败
- else
- {
- m_cutHoles[i].STATE = State.Failed;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- }
- }
- else
- {
- //其他孔的测量
- LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
- m_cutHoles[i].START = DateTime.Now;
- m_cutHoles[i].STATE = State.InProcess;
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- //其他孔测量之前的初始化
- if (!OtherHole_Init())
- {
- arg.State = false;
- arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
- SendMsg("1-0");
- Thread.Sleep(3000);
- LogManager.AddHardwareLog("测量线程:" + arg.Message, true);
- continue;
- }
- arg.State = true;
- arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
- SendMsg("1-0");
- //其他孔开始测量
- if (OtherHole())
- {
- //保存文件,将测量状态更改
- m_cutHoles[i].STATE = State.Success;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- }
- //失败
- else
- {
- m_cutHoles[i].STATE = State.Failed;
- m_cutHoles[i].END = DateTime.Now;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- }
- }
- if(key_stop)
- {
- m_cutHoles[i].END = DateTime.Now;
- m_cutHoles[i].STATE = State.Ready;
- m_measureFile.Save();
- SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
- arg.Message = "用户停止测量";
- SendMsg("0-0");
- break;
- }
- //两个点之间更换,加延时以便完成显示
- Thread.Sleep(3000);
- }
- }
- //检查硬件连接是否正常
- public bool ConnectHardware()
- {
- //返回硬件的连接状态
- return iSEM.ConnectStatus();
- }
- //设置工作文件夹
- public bool SetWorkingFolderStr()
- {
- WorkingFolder = m_measureFile.FilePath;
- return true;
- }
- //插入PT针
- public bool InsertPT()
- {
- string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
- //SendMsg("调用宏插入PT针宏文件" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(1000);
- return true;
- }
- //撤出PT针
- public bool RetractPT()
- {
- string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
- //SendMsg("调用宏撤出PT针宏文件" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(1000);
- return true;
- }
- //PT沉积
- public bool PTWork()
- {
- //执行PT沉积的ELY文件
- if (!ExcuteEly(m_measureFile.MParam.PTTemp))
- {
- return false;
- }
- //等待沉积完成
- while (true)
- {
- Thread.Sleep(7000);
- if (iSEM.GetFIBMode() == 0)
- {
- break;
- }
- }
- return true;
- }
- //FIB切割
- public bool FIBWork()
- {
- //执行PT沉积的ELY文件
- if (!ExcuteEly(m_measureFile.MParam.FIBTemp))
- {
- return false;
- }
- //等待切割完成
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetFIBMode() == 0)
- {
- break;
- }
- }
- return true;
- }
- //执行ELY文件的步骤
- public bool ExcuteEly(string a_filename)
- {
- //执行ELy文件有三个动作
- //1. 选择ELY文件
- //SendMsg("选择ELY文件");
- if (!iSEM.CmdFIBLoadELY(a_filename))
- {
- //SendMsg("选择ELY文件失败");
- return false;
- }
- Thread.Sleep(1000);
- //2. 确认ELY文件
- //SendMsg("确认ELY文件");
- if (!iSEM.CmdFIBEXPOSUREELY())
- {
- //SendMsg("确认ELY文件失败");
- return false;
- }
- Thread.Sleep(1000);
- //3. 执行ELY文件
- //SendMsg("执行ELY文件");
- if (!iSEM.CmdFIBSTARTELY())
- {
- //SendMsg("执行ELY文件失败");
- return false;
- }
- Thread.Sleep(1000);
- return true;
- }
-
- /// <summary>
- ///13. 自动 定位功能,沉积
- /// </summary>
- /// <returns></returns>
- public bool GetPoistion()
- {
- float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
- int state = 1;
- LogManager.AddHardwareLog("测量线程:13.自动定位、沉积-功能自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString(), true);
- Thread.Sleep(200);
- //1.控制SEM放大600X
- if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
- {
- arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
- arg.State = false;
- SendMsg("1-6");
- LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "控制失败", false);
- return false;
- }
- Thread.Sleep(200);
- if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
- {
- arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
- arg.State = false;
- SendMsg("1-6");
- LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString() + "控制失败", false);
- return false;
- }
- float current = iSEM.GetMagnification();
- while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
- {
- iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- arg.State = true;
- arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
- SendMsg("1-6");
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下。", true);
- return false;
- }
- //判断是否为仅拍照,不是则执行FIB操作
- if (!m_measureFile.MParam.Is_Photograph)
- {
- LogManager.AddHardwareLog("测量线程:切换到FIB模式。", true);
- //6.设置FIB拍照参数——扫描时间、束流等
- //7.控制FIB自动亮度、对比度
- Thread.Sleep(200);
- if (!iSEM.CmdFIBModeFIB())
- {
- arg.Message = "FIB模式切换失败";
- arg.State = false;
- SendMsg("1-8");
- LogManager.AddHardwareLog("测量线程报错:切换到FIB模式失败。", false);
- return false;
- }
- arg.State = true;
- arg.Picture_Information.Work_Status = "FIB";
- arg.Message = "FIB模式切换成功";
- SendMsg("1-8");
- Thread.Sleep(1000);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下。", true);
- return false;
- }
- //8.控制FIB拍照
- //9.保存照片======更改路径
- //20201103,FIB使用定位的放大倍数
- String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
- arg.Picture_Information.Picture_FullPath = fileName2;
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(200);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(200);
- arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
- Thread.Sleep(200);
- //FIB的放大位数,将来会改
- LogManager.AddHardwareLog("测量线程:设置FIB放大倍数"+ m_measureFile.MParam.Location_Magnification.ToString(), true);
- //20201103,FIB使用定位的放大倍数
- if (!iSEM.SetFIBMagnification(m_measureFile.MParam.Location_Magnification))
- {
- arg.Message = "FIB放大倍数设置失败";
- arg.State = false;
- SendMsg("1-9");
- LogManager.AddHardwareLog("测量线程失败:FIB放大倍数设置失败。", false);
- return false;
- }
- arg.Message = "FIB放大倍数设置成功";
- arg.State = true;
- SendMsg("1-9");
- Thread.Sleep(200);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下。", true);
- return false;
- }
- //4、设置WD
- iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
- Thread.Sleep(1000);
- //20201127增加自动亮度对比度
- if(m_measureFile.MParam.FIBDo)
- {
- if(m_measureFile.MParam.FIBAutoBC)
- {
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
- float m_TempBrightness = 50.0f;
- float m_TempContrast = 30.0f;
- if (m_measureFile.MParam.SampleName == "3")
- {
- m_TempBrightness = 50.0f;
- m_TempContrast = 30.0f;
- iSEM.SetAutoVideoOff();
- Thread.Sleep(200);
- iSEM.SetBrightness(m_TempBrightness); //50.0f
- Thread.Sleep(200);
- iSEM.SetContrast(m_TempContrast); //30.0f
- Thread.Sleep(200);
- }
- else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
- {
- iSEM.SetAutoVideoBrightnessAndContrast();
- //20201128陈工建议增加
- Thread.Sleep(200);
- iSEM.SetAutoBright(100);
- Thread.Sleep(200);
- iSEM.SetAutoContrast(100);
- Thread.Sleep(5000);
- }
- }
- else
- {
- iSEM.SetAutoVideoOff();
- Thread.Sleep(200);
- iSEM.SetBrightness(m_measureFile.MParam.FIBB);
- Thread.Sleep(200);
- iSEM.SetContrast(m_measureFile.MParam.FIBC);
- Thread.Sleep(200);
- }
-
- }
- //拍照前改变速度,延时
- iSEM.CloseReduced();
- Thread.Sleep(200);
- //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
- //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- if (!GetImage(fileName2))
- {
- arg.Message = "FIB拍照失败";
- arg.State = false;
- SendMsg("1-11");
- LogManager.AddHardwareLog("测量线程报错:FIB拍照失败。", false);
- return false;
- }
- arg.State = true;
- arg.Picture_Information.Picture_FullPath = fileName2;
- arg.Message = "FIB拍照成功";
- SendMsg("1-11");
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下。", true);
- return false;
- }
- iSEM.CmdFIBModeSEM();
- Thread.Sleep(200);
- //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
- LogManager.AddHardwareLog("测量线程:调用图像处理接口,准备移动样品台", true);
- LogManager.AddHardwareLog("文件名=" + fileName2, true);
- LogManager.AddHardwareLog("样品类型=" + m_measureFile.MParam.SampleName, true);
- LogManager.AddHardwareLog("供应商名称=" + m_measureFile.MParam.Firm, true);
- wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x1, out y1, out x2, out y2, out state);
- LogManager.AddHardwareLog("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString()+")", true);
- LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
- if (state == 1)
- {
- //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
- float xc = (x1 + x2)/2;
- float yc = (y1 + y2)/2;
- x0 = xc - 512;
- y0 = 384 - yc;
- LogManager.AddHardwareLog("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
- px = iSEM.GetPixelSize();
- //修改FIB切割的ELY文件坐标
- XmlDocument xmlDoc = new XmlDocument();
- xmlDoc.Load(m_measureFile.MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
- XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
- if (xns != null)
- {
- XmlAttributeCollection attributeCol = xns.Attributes;
- //遍历自己点属性
- double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
- LogManager.AddHardwareLog("XML-Width_a = " + width_a.ToString(), true);
- foreach (XmlAttribute attri in attributeCol)
- {
- if (attri.Name == "x")
- {
- attri.InnerText = ((x0 * px)*1000000 - width_a).ToString();
- LogManager.AddHardwareLog("XML-TopLeft-X = " + attri.InnerText, true);
- }
- else if (attri.Name == "y")
- {
- attri.InnerText = ((y0 * px)*1000000-2.791).ToString();
- LogManager.AddHardwareLog("XML-TopLeft-Y = " + attri.InnerText, true);
- }
- }
- }
- xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
- if (xns != null)
- {
- XmlAttributeCollection attributeCol = xns.Attributes;
- double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
- //遍历自己点属性
- foreach (XmlAttribute attri in attributeCol)
- {
- if (attri.Name == "x")
- {
- attri.InnerText = ((x0 * px)*1000000 - width).ToString();
- }
- else if (attri.Name == "y")
- {
- attri.InnerText = (((y0 * px) *1000000) + 2 - 2.791).ToString();
- }
- }
- }
- xmlDoc.Save(m_measureFile.MParam.FIBTemp);//保存的该XML文件,否则更新无效
- //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
- if (m_measureFile.MParam.PT)
- {
- xmlDoc = new XmlDocument();
- xmlDoc.Load(m_measureFile.MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
- xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
- if (xns != null)
- {
- XmlAttributeCollection attributeCol = xns.Attributes;
- double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
- //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
- double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
- //遍历自己点属性
- foreach (XmlAttribute attri in attributeCol)
- {
- if (attri.Name == "x")
- {
- attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
- }
- else if (attri.Name == "y")
- {
- attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
- }
- }
- }
- xmlDoc.Save(m_measureFile.MParam.PTTemp);
- }
- if (hand_intervene == 1)
- {
- MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
- }
- }
- else
- {
- arg.Message = "图像接口参数state返回值为零";
- arg.State = false;
- SendMsg("1-12");
- if (hand_intervene == 1)
- {
- if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
- {
- return false;
- }
- }
- else
- {
- LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
- return false;
- }
- LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
- return false;
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //11.自动工具样品类型参数确定是否需要PT沉积
- if (m_measureFile.MParam.PT)
- {
- if (!iSEM.CmdFIBModeFIB())
- {
- LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
- return false;
- }
- Thread.Sleep(200);
- //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
- if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
- {
- LogManager.AddHardwareLog("测量线程:插入PT针" + arg.Message, true);
- if (!InsertPT())
- {
- arg.Message = "插入PT针失败";
- arg.State = false;
- SendMsg("1-13");
- LogManager.AddHardwareLog("测量线程报错:"+ arg.Message, false);
- return false;
- }
- arg.State = true;
- arg.Message = "插入PT针成功";
- SendMsg("1-13");
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //3. 根据坐标进行PT沉积
- if (!PTWork())
- {
- arg.Message = "PT沉积失败";
- arg.State = false;
- SendMsg("1-14");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- arg.State = true;
- arg.Message = "PT沉积成功";
- SendMsg("1-14");
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //15.根据样品类型决定是否撤出PT针
- if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
- {
- if (!RetractPT())
- {
- arg.Message = "撤出PT针失败";
- arg.State = false;
- SendMsg("1-15");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- arg.State = true;
- arg.Message = "撤出PT针成功";
- SendMsg("1-15");
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- if (!iSEM.CmdFIBModeSEM())
- {
- //arg.Message = "切割前SEM拍照失败。";
- //arg.State = false;
- //SendMsg("1-17");
- LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
- return false;
- }
- }
- }
- //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
- float[] firstPosition = iSEM.GetStagePosition();
- m_cutHoles[0].Position.X = firstPosition[0];
- m_cutHoles[0].Position.Y = firstPosition[1];
- m_cutHoles[0].Position.Z = firstPosition[2];
- m_cutHoles[0].Position.T = firstPosition[3];
- m_cutHoles[0].Position.R = firstPosition[4];
- m_cutHoles[0].Position.M = firstPosition[5];
- //这里要调用文件保存功能
- arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
- + firstPosition[1].ToString() + ","
- + firstPosition[2].ToString() + ","
- + firstPosition[3].ToString() + ","
- + firstPosition[4].ToString() + ","
- + firstPosition[5].ToString() + ")";
- arg.State = true;
- SendMsg("1-16");
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- return true;
- }
- /// <summary>
- /// 14. FIB切割
- /// </summary>
- /// <returns></returns>
- public bool FIBCross()
- {
- int state = 0;
- #if CHECK
- float mag = m_measureFile.MParam.Location_Magnification / 3;
- if (mag < 200)
- {
- mag = 200;
- }
- String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
-
- iSEM.SetMagnification(mag);
- Thread.Sleep(2000);
- iSEM.CmdSaveRate();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
-
- if (!GetImage(fileName1))
- {
- arg.Message = "切割前SEM拍照失败。";
- arg.State = false;
- SendMsg("1-17");
- LogManager.AddHardwareLog("测量线程报错:SEM切割前图像拍照失败", false);
- return false;
- }
- iSEM.CmdFocusRate();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- arg.Message = "切割前SEM拍照成功。";
- arg.Picture_Information.Picture_FullPath = fileName1;
- arg.State = true;
- SendMsg("1-17");
- #endif
- if (!iSEM.CmdFIBModeFIB())
- {
- arg.Message = "切换到FIB模式失败。";
- arg.State = false;
- SendMsg("1-18");
- LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
- return false;
- }
- arg.Message = "切换到FIB模式成功。";
- arg.State = true;
- SendMsg("1-18");
- Thread.Sleep(1000);
- iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
- float current = iSEM.GetMagnification();
- while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
- {
- iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- Thread.Sleep(2000);
- //14.自动控制FIB切割
- //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
- //2.控制FIB进行切割
- //以上1、2步全部用ELY文件代替
- if (!FIBWork())
- {
- arg.Message = "FIB切割失败";
- arg.State = false;
- SendMsg("1-19");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- arg.State = true;
- arg.Message = "FIB切割成功";
- SendMsg("1-19");
- Thread.Sleep(300);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //做切割后SEM的拍照
- LogManager.AddHardwareLog("测量线程:切割后SEM拍照", true);
- if (!iSEM.CmdFIBModeSEM())
- {
- //arg.Message = "切割后SEM拍照失败。";
- //arg.State = false;
- //SendMsg("1-20");
- LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
- return false;
- }
- Thread.Sleep(1000);
- #if CHECK
- String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
- iSEM.SetMagnification(mag);
- Thread.Sleep(2000);
- iSEM.CmdSaveRate();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- if (!GetImage(fileName2))
- {
- arg.Message = "切割后SEM拍照失败。";
- arg.State = false;
- SendMsg("1-20");
- LogManager.AddHardwareLog("测量线程报错:SEM切割后图像拍照失败", false);
- return false;
- }
- arg.Picture_Information.Picture_FullPath = fileName2;
- arg.Message = "切割后SEM拍照成功。";
- arg.State = true;
- SendMsg("1-20");
- iSEM.CmdFocusRate();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
- wr.Img_Cut_Success(fileName1, fileName2, out state);
- LogManager.AddHardwareLog("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
- if (state == 0)
- {
- LogManager.AddHardwareLog("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
- arg.Message = "图像接口参数state返回值为零";
- arg.State = false;
- SendMsg("1-22");
- if (hand_intervene == 1)
- {
- if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
- {
- return false;
- }
- }
- else
- {
- return false;
-
- }
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- }
- arg.State = true;
- LogManager.AddHardwareLog("验证切割准确性成功。", true);
- arg.Message = "FIB切割校验成功";
- SendMsg("1-22");
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下。", true);
- return false;
- }
- #endif
- return true;
- }
- /// <summary>
- /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
- /// </summary>
- /// <returns></returns>
- public bool FindCross()
- {
- float x2 = 0, y2 = 0;
- int state = 0;
- //切换到SEM模式
- if (!iSEM.CmdFIBModeSEM())
- {
- arg.Message = "SEM模式切换失败";
- arg.State = false;
- SendMsg("1-23");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- arg.State = true;
- arg.Message = "SEM模式切换成功";
- SendMsg("1-23");
- arg.Picture_Information.Work_Status = "SEM";
- Thread.Sleep(1000);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //1.控制SEM放大到300倍
- if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
- {
- arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
- arg.State = false;
- SendMsg("1-24");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- Thread.Sleep(200);
- //iSEM.SetAutoVideoBrightnessAndContrast();
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
- float m_TempBrightness = 50.0f;
- float m_TempContrast = 30.0f;
- if (m_measureFile.MParam.SampleName == "3")
- {
- m_TempBrightness = 48.0f;
- m_TempContrast = 29.0f;
- }
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
- iSEM.SetAutoVideoOff();
- Thread.Sleep(200);
- iSEM.SetBrightness(m_TempBrightness); //50.0f
- Thread.Sleep(200);
- iSEM.SetContrast(m_TempContrast); //30.0f
- Thread.Sleep(2000);
- float mag = m_measureFile.MParam.Location_Magnification / 3;
- if (mag < 200)
- {
- //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
- if (m_measureFile.MParam.SampleName == "3")
- mag = 400;
- else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
- mag = 200;
- }
- if (!iSEM.SetMagnification(mag))
- {
- arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
- arg.State = false;
- SendMsg("1-24");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- Thread.Sleep(200);
- float current = iSEM.GetMagnification();
- Thread.Sleep(200);
- while (Math.Abs(current - mag) > 2)
- {
- iSEM.SetMagnification(mag);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- Thread.Sleep(200);
- }
- arg.State = true;
- arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
- SendMsg("1-24");
- Thread.Sleep(2000);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //3.控制SEM拍照
- String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
- arg.Picture_Information.Picture_FullPath = fileName4;
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(200);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(200);
- arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
- Thread.Sleep(200);
- //拍照前改变速度,延时
- //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
- //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- if (!GetImage(fileName4))
- {
- arg.State = false;
- arg.Message = "SEM拍照找切割位置失败";
- SendMsg("1-25");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- arg.Picture_Information.Picture_FullPath = fileName4;
- arg.State = true;
- arg.Message = "SEM拍照成功";
- SendMsg("1-25");
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //4.将照片传给客户,获取偏移坐标,以及偏移角度
- //5.根据坐标控制SEM移动到切孔位置,居中
- LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
- LogManager.AddHardwareLog("文件名=" + fileName4, true);
- wr.Img_Trapezoid_Top_Center_Position(fileName4,Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
- LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
- LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
- if (state == 1)
- {
- //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
- if (!MoveToPixByMoveStage(x2, y2))
- {
- arg.State = false;
- arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
- SendMsg("1-26");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- arg.State = true;
- arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
- SendMsg("1-26");
- //高倍到低倍不进行对焦
- //拍照前改变速度,延时
- //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
- //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
- if (!GetImage(fileName10))
- {
- //arg.State = false;
- //arg.Message = "SEM拍照失败";
- //SendMsg("1-25");
- //return false;
- LogManager.AddHardwareLog("测量线程报错:找到已切割的位置拍照失败", true);
- }
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- if (hand_intervene == 1)
- {
- MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
- }
- }
- else
- {
- arg.Message = "图像接口参数state返回值为零";
- arg.State = false;
- SendMsg("1-26");
- if (hand_intervene == 1)
- {
- if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
- {
- return false;
- }
- }
- else
- {
- return false;
- }
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- return true;
- }
- /// <summary>
- /// 17.自动控制SEM拍截面照
- /// </summary>
- /// <returns></returns>
- public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
- {
- int state = 0;
- #region 设置拍照的电压
- LogManager.AddHardwareLog("测量线程:设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true);
- //1、放大倍数参数photograph_
- if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Photograph_Voltage))
- {
- arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败";
- arg.State = false;
- SendMsg("1-27");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- //add
- #endregion
- Thread.Sleep(200);
- #region 设置拍照的放大倍数
- LogManager.AddHardwareLog("测量线程:设置拍照放大倍数====" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
- if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
- {
- arg.Message = "放大倍数调整失败";
- arg.State = false;
- SendMsg("1-27");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- float set = m_measureFile.MParam.Photograph_Magnification;
- float current = iSEM.GetMagnification();
- while(Math.Abs(current- set) > 1)
- {
- iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
-
- arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString()+ "成功";
- arg.State = true;
- SendMsg("1-27");
- Thread.Sleep(3000 + (Int32)cycle_time);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- #endregion
- #region 拍摄矩形的切割孔,使用拍照的放大倍数
- //if(!iSEM.SetAutoVideoBrightnessAndContrast())
- //{
- // LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
- // return false;
- //}
- //Thread.Sleep(5000);
- //2.控制SEM自动对焦、亮度、对比度-接口
- //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
- if ((m_measureFile.MParam.SampleName == "2")||(m_measureFile.MParam.SampleName == "3"))
- iSEM.SetReduced(402, 128, 500, 500);
- else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
- iSEM.SetReduced(402, 128, 340, 256);
- Thread.Sleep(200);
- //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
- //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
- if (!iSEM.SetAutoVideoOff())
- {
- LogManager.AddHardwareLog("测量线程报错:关闭自动亮度对比度失败", false);
- return false;
- }
- Thread.Sleep(5000);
- LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
- LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
- if (ImageFocus1(false))
- {
- arg.Message = "自动对焦完成";
- arg.State = true;
- SendMsg("1-28");
- }
- else
- {
- arg.Message = "自动对焦失败";
- arg.State = false;
- SendMsg("1-28");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
- iSEM.CloseReduced();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(200 + Convert.ToInt32(cycle_time));
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
- float m_TempBrightness = 50.0f;
- float m_TempContrast = 30.0f;
- if (m_measureFile.MParam.SampleName == "3")
- {
- m_TempBrightness = 50f;
- m_TempContrast = 29f;
- iSEM.SetBrightness(m_TempBrightness); //50.0f
- Thread.Sleep(200);
- iSEM.SetContrast(m_TempContrast); //30.0f
- Thread.Sleep(200);
- }
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
- if (!iSEM.SetAutoVideoBrightnessAndContrast())
- {
- LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
- return false;
- }
- Thread.Sleep(5000);
- //3、设置SEM补偿角度
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString()+"度", true);
- if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
- {
- arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
- arg.State = false;
- SendMsg("1-29");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- arg.State = true;
- arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
- SendMsg("1-29");
- Thread.Sleep(200);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", false);
- return false;
- }
- }
- //4、拍照,5、保存照片
- String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
- arg.Picture_Information.Picture_FullPath = fileName5;
- arg.Picture_Information.Work_Status = "SEM";
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(200);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(200);
- arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
- Thread.Sleep(200);
- //拍照前改变速度,延时
- //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
- //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time)*2);
- if (!GetImage(fileName5))
- {
- arg.Message = "SEM拍照失败";
- arg.State = false;
- SendMsg("1-30");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- arg.Picture_Information.Picture_FullPath = fileName5;
- arg.State = true;
- arg.Message = "SEM拍照成功";
- SendMsg("1-30");
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- #endregion
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- #region 对当前矩形进行旋转校正
- //8,计算切割面区域偏移角度及方向
- float degree = 0;
- int direction = 0;
-
- wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
- LogManager.AddHardwareLog("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
- LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
- //接口返回像素,*pixelsize,得到坐标点。判断移动方式
- if (state == 1)
- {
- //梯形角度
- iSEM.SetScanRotationOn();
- Thread.Sleep(200);
- //20201128陈工要求,谭博返回角度*0.7
- iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
- Thread.Sleep(200);
- arg.State = true;
- arg.Message = "图像接口返回角度为:" + degree.ToString();
- SendMsg("1-31");
- if (hand_intervene == 1)
- {
- MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
- }
- }
- else
- {
- arg.Message = "图像接口参数State返回值为零";
- arg.State = false;
- SendMsg("1-31");
- if(hand_intervene == 1)
- {
- if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
- {
- return false;
- }
- }
- else
- {
- //return false;
- }
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- Thread.Sleep(200);
- //12拍照
- String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
- arg.Picture_Information.Picture_FullPath = fileName6;
- arg.Picture_Information.Work_Status = "SEM";
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(200);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(200);
- arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
- Thread.Sleep(200);
- //拍照前改变速度,延时
- //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
- //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- if (!GetImage(fileName6))
- {
- arg.Message = "SEM拍照失败";
- arg.State = false;
- SendMsg("1-33");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- arg.Picture_Information.Picture_FullPath = fileName6;
- arg.State = true;
- arg.Message = "SEM拍照成功";
- SendMsg("1-33");
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- #endregion
- #region 获取两个位置上及放大倍数
- //计算两个测量区域坐标
- List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
- List<float> mag = new List<float>();
- System.Drawing.Point ct0;
- float mag1, mag2, magMax;
- //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
- wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
- LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
- ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
- "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
- "输入产品" + m_measureFile.MParam.Firm.ToString()
- + "输出中心点1为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
- + ",输出放大倍数1==" + mag[0]
- + "倍,输出中心点2为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
- + "输出放大倍数2==" + mag[0]
- + "倍,输出中心点3为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
- #endregion
- if (state == 1 && ct.Count != 0 && mag.Count != 0)
- {
- arg.State = true;
- arg.Message = "获取位置及放大倍数成功";
- SendMsg("1-34");
- #region 记录初始设置的BeamShift的百分比和样品台XY位置
- float xs = iSEM.GetBeamShiftX();
- Thread.Sleep(200);
- float ys = iSEM.GetBeamShiftY();
- Thread.Sleep(200);
- float xpCur = iSEM.GetStageAtX();
- Thread.Sleep(200);
- float ypCur = iSEM.GetStageAtY();
- Thread.Sleep(200);
- LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
- + "y=" + ys.ToString() + ","
- + "原来样品台的位置x= " + xpCur.ToString()
- + "y=" + ypCur.ToString(), true);
- #endregion
- //找到放大倍数最大值
- magMax = mag[0];
- for (int m = 1; m < mag.Count; m++)
- {
- if (mag[m] > magMax)
- {
- magMax = mag[m];
- }
- }
- #region 移动到梯形左上角
- //20201127将视野移动到梯形左上角位置
- MoveToPix(ct0.X, ct0.Y);
- LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
- + "," + ct0.Y.ToString() + ")", true);
- //关闭自动亮度对比度
- iSEM.SetAutoVideoOff();
- Thread.Sleep(2000);
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
-
- if (m_measureFile.MParam.SampleName == "3")
- {
- m_TempBrightness = 50f;
- m_TempContrast = 29f;
- iSEM.SetBrightness(m_TempBrightness); //50.0f
- Thread.Sleep(200);
- iSEM.SetContrast(m_TempContrast); //30.0f
- Thread.Sleep(200);
- }
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
- //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
- if ( m_measureFile.MParam.SampleName == "3")
- {
- iSEM.SetReduced(402, 128, 500, 500);
- }else
- {
- iSEM.SetReduced(402, 128, 340, 256);
- }
-
-
- Thread.Sleep(200);
- //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
- //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- //放大到6000倍
- iSEM.SetMagnification(magMax / 2);
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- set = magMax / 2;
- current = iSEM.GetMagnification();
- while (Math.Abs(current - set) > 1)
- {
- iSEM.SetMagnification(set);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- LogManager.AddHardwareLog("========测量线程:开始自动聚焦--6000倍!", true);
- //自动对焦
- if (!ImageFocus1(true))
- {
- LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦失败!", true);
- return false;
- }
- LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦成功!", true);
- ////自动消像散
- //if (!ImageStig1())
- //{
- // return false;
- //}
- //放大到10000倍
- iSEM.SetMagnification(magMax);
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- set = magMax;
- current = iSEM.GetMagnification();
- while (Math.Abs(current - set) > 1)
- {
- iSEM.SetMagnification(set);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- LogManager.AddHardwareLog("========测量线程:开始自动聚焦--12000倍!", true);
- //自动对焦
- if (!ImageFocus1(true))
- {
- LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦失败!", true);
- return false;
- }
- LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦成功!", true);
- ////自动消像散
- //if (!ImageStig1())
- //{
- // return false;
- //}
- ////放大到20000倍
- //iSEM.SetMagnification(magMax*2);
- //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- //set = magMax*2;
- //current = iSEM.GetMagnification();
- //while (Math.Abs(current - set) > 1)
- //{
- // iSEM.SetMagnification(set);
- // Thread.Sleep(200);
- // current = iSEM.GetMagnification();
- //}
- ////自动对焦
- //if (!ImageFocus1())
- //{
- // return false;
- //}
-
- iSEM.CloseReduced();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- #endregion
- #region 循环拍照
- for (int n = 0; n < ct.Count; n++)
- {
- #region 恢复到拍照的状态
- iSEM.SetStageGotoX(xpCur);
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- iSEM.SetStageGotoY(ypCur);
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //恢复原来的放大倍数
- if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
- {
- LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
- return false;
- }
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- set = m_measureFile.MParam.Photograph_Magnification;
- current = iSEM.GetMagnification();
- while (Math.Abs(current - set) > 1)
- {
- iSEM.SetMagnification(set);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- //恢复BeamShift的百分比值
- iSEM.SetBeamShiftX(xs);
- Thread.Sleep(200);
- iSEM.SetBeamShiftY(ys);
- Thread.Sleep(200);
- #endregion
- #region 移动到指定点位置
- if (!MoveToPix(ct[n].X, ct[n].Y))
- {
- arg.State = false;
- arg.Message = "移动到第一个点位置失败";
- SendMsg("1-" + (35 + n).ToString());
- //移动到第一个点失败
- LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
- }
- LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
- + "," + ct[n].Y.ToString() + ")", true);
- #endregion
- #region 如果是第一个点,则1W倍对焦
- if (n == 0)
- {
- ////在第一个点上放大1W倍对焦
- //if (!iSEM.SetMagnification(mag[n]))
- //{
- // LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
- // return false;
- //}
- //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- //while (true)
- //{
- // current = iSEM.GetMagnification();
- // if (Math.Abs(current - mag[n]) < 1)
- // {
- // Thread.Sleep(200);
- // break;
- // }
- // Thread.Sleep(200);
- // iSEM.SetMagnification(set);
- // Thread.Sleep(200);
- //}
- //if (m_measureFile.MParam.SampleName == "2")
- //{
- // //窗口对焦
- // iSEM.SetReduced1(340, 1, 340, 256);
- // Thread.Sleep(200);
- // iSEM.CmdFocusRate();
- // Thread.Sleep(200);
- // cycle_time = iSEM.GetCycleTime();
- // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- // //自动对焦
- // if (!ImageFocus1(false))
- // {
- // return false;
- // }
- // //恢复全屏
- // iSEM.CloseReduced();
- // Thread.Sleep(200);
- // cycle_time = iSEM.GetCycleTime();
- // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- //}
- //else
- //{
- // //窗口对焦
- // //iSEM.SetReduced(402, 128, 800, 600);
- // //Thread.Sleep(200);
- // iSEM.CmdFocusRate();
- // Thread.Sleep(200);
- // cycle_time = iSEM.GetCycleTime();
- // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- // //自动对焦
- // if (!ImageFocus1(false))
- // {
- // return false;
- // }
- // //恢复全屏
- // //iSEM.CloseReduced();
- // //Thread.Sleep(200);
- // cycle_time = iSEM.GetCycleTime();
- // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- //}
- LogManager.AddHardwareLog("========测量线程:进入内部观察,不对焦!", true);
- //增亮图像
- iSEM.SetAutoVideoOff();
- Thread.Sleep(200);
- float currentBright = iSEM.GetBrightness();
- Thread.Sleep(200);
- float currentContrast = iSEM.GetContrast();
- Thread.Sleep(200);
- iSEM.SetBrightness(currentBright + 2);
- Thread.Sleep(200);
- iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
- Thread.Sleep(200);
- }
- #endregion
- //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
- if((m_measureFile.MParam.SampleName=="3")&&(n==0))
- {
- if (!GetImageFromSEM(mag[n]/2))
- LogManager.AddHardwareLog("测量线程报错:第一个区域放大一半倍数" + (mag[n]/2).ToString() + "控制失败", true);
- }
- //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
- #region 拍照
- if (!iSEM.SetMagnification(mag[n]))
- {
- arg.State = false;
- arg.Message = "移动到第一个点位置拍照失败";
- SendMsg("1-35");
- LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
- return false;
- }
- LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成!", true);
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- set = mag[n];
- current = iSEM.GetMagnification();
- while (Math.Abs(current - set) > 1)
- {
- iSEM.SetMagnification(set);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- //获取像素大小
- lsize.Add(iSEM.GetPixelSize());
- Thread.Sleep(200);
- String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
- arg.Picture_Information.Picture_FullPath = fileName7;
- arg.Picture_Information.Work_Status = "SEM";
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(200);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(200);
- arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
- Thread.Sleep(200);
- //拍照前改变速度,延时
- iSEM.CmdLineScan();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- if (!GetImage(fileName7))
- {
- arg.State = false;
- arg.Message = "移动到第一个点位置失败";
- SendMsg("1-35");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
- iSEM.CmdPixelScan();
- Thread.Sleep(200);
- limg_path.Add(fileName7);
- arg.Picture_Information.Picture_FullPath = fileName7;
- arg.State = true;
- arg.Message = "移动到第一个点位置拍照成功";
- SendMsg("1-35");
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- #endregion
- }
- #endregion
- if (hand_intervene == 1)
- {
- MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
- }
- }
- else
- {
- if (hand_intervene == 1)
- {
- if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
- {
- // return false;
- }
- }
- else
- {
- //return false;
- }
- arg.State = false;
- arg.Message = "获取位置及放大倍数失败";
- SendMsg("1-34");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- }
- ////14光束复位和Rotation关闭开关
- //arg.Message = "光束复位成功";
- //arg.State = true;
- //SendMsg("1-36");
- iSEM.SetTiltAngleOff();
- Thread.Sleep(200);
- iSEM.SetScanRotationOff();
- Thread.Sleep(200);
- iSEM.SetBeamShiftX(0);
- Thread.Sleep(200);
- iSEM.SetBeamShiftY(0);
- Thread.Sleep(200);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- return true;
- }
- //第一个孔的测试过程
- public bool FirstHole()
- {
- //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
- LogManager.AddHardwareLog("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
- if (!SetVoltageAndIPROBE())
- {
- LogManager.AddHardwareLog("测量线程:第一孔=====设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
- return false;
- }
- //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
- //设置拉直的放大倍数
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), true);
- if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
- {
- LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), false);
- arg.Message = "测量线程报错:拉直放大倍数设置失败!";
- arg.State = false;
- SendMsg("1-1");
- return false;
- }
- float current = iSEM.GetMagnification();
- while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
- {
- iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- arg.Message = "拉直放大倍数设置成功!";
- arg.State = true;
- SendMsg("1-1");
- Thread.Sleep(2000);
- //自动化流程-每个点都需要补偿54度
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
- if (!TiltCorrection(54.0f))
- {
- LogManager.AddHardwareLog("测量线程报错:倾斜补偿角度为54度失败", false);
- arg.Message = "角度补偿54度失败!";
- arg.State = false;
- SendMsg("1-2");
- return false;
- }
- arg.Message = "角度补偿54度成功!";
- arg.State = true;
- SendMsg("1-2");
- Thread.Sleep(1000);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- }
- // 2是5/6类样品,不需要拉直
- if (m_measureFile.MParam.SampleName != "2")
- {
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作开始!", true);
- if (!Straighten_Handle())
- {
- LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
- return false;
- }
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作结束!", true);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下。", true);
- return false;
- }
- }
- else
- {
- arg.Message = "拉直操作自动对焦成功!";
- arg.State = true;
- SendMsg("1-3");
- Thread.Sleep(1000);
- arg.Message = "拉直拍照成功!";
- arg.Picture_Information.Picture_FullPath = "";
- arg.State = true;
- SendMsg("1-4");
- Thread.Sleep(1000);
- arg.Message = "拉直操作完成";
- arg.State = true;
- SendMsg("1-5");
- Thread.Sleep(1000);
- }
- //13. 自动 定位功能
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位开始!", true);
- if (!GetPoistion())
- {
- LogManager.AddHardwareLog("测量线程报错:自动定位失败,程序退出。", false);
- return false;
- }
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位结束!", true);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下。", true);
- return false;
- }
- //14.自动控制FIB切割 del by sun 2020-12-15 temp
- //if (m_measureFile.MParam.Is_Photograph == false)
- //{
- // LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!", true);
- // if (!FIBCross())
- // {
- // LogManager.AddHardwareLog("测量线程报错:自动控制FIB切割失败。", false);
- // return false;
- // }
- // LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
- //}
- //del by sun 2020-12-15 temp end
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //16.找到切割位置
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
- if (!FindCross())
- {
- return false;
- }
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- }
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
- //将过程17最后的拍照图片提出给18步进行调用
- List<String> limg_path = new List<string>();
- List<float> lsize = new List<float>();
- //17.自动控制SEM拍截面照
- if (!ShotSection(ref limg_path, ref lsize))
- {
- //return false;
- }
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //这段是临时的
- //arg.State = true;
- //arg.Message = "测量尺寸成功";
- //SendMsg("1-40");
-
- //18.自动层高分析
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
- float size = iSEM.GetPixelSize();
- int state = 1;
- wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
- if (state == 0)
- {
- arg.Message = "测量尺寸失败";
- arg.State = false;
- SendMsg("1-40");
- return false;
- }
- arg.State = true;
- arg.Message = "测量尺寸成功";
- SendMsg("1-40");
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
- }
-
- //19.能谱分析
- if (m_measureFile.MParam.EDS)
- {
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析开始===" + m_measureFile.MParam.EDS, true);
- EDSAnalysis();
- LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析结束===" + m_measureFile.MParam.EDS, true);
- }
- //20.复位
- LogManager.AddHardwareLog("===========测量线程:20.复位开始", true);
- BeamShiftReset();
- return true;
- }
- //非第一个孔的测试过程
- public bool OtherHole()
- {
- //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
- LogManager.AddHardwareLog("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
- if (!SetVoltageAndIPROBE())
- {
- LogManager.AddHardwareLog("测量线程:非第一孔==设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
- return false;
- }
- //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
- //设置拉直的放大倍数
- if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
- {
- LogManager.AddHardwareLog("拉直放大倍数设置失败,程序退出。", true);
- arg.Message = "拉直放大倍数设置失败!";
- arg.State = false;
- SendMsg("1-1");
- return false;
- }
- float current = iSEM.GetMagnification();
- while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
- {
- iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- arg.Message = "拉直放大倍数设置成功!";
- arg.State = true;
- SendMsg("1-1");
- Thread.Sleep(2000);
- //自动化流程-每个点都需要补偿54度
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- if (!TiltCorrection(54.0f))
- {
- arg.Message = "角度补偿54度失败!";
- arg.State = false;
- SendMsg("1-2");
- return false;
- }
- arg.Message = "角度补偿54度成功!";
- arg.State = true;
- SendMsg("1-2");
- Thread.Sleep(2000);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- }
- if (m_measureFile.MParam.SampleName != "2")
- {
- if (!Straighten_Handle())
- {
- LogManager.AddHardwareLog("测量线程报错:拉直操作失败。", true);
- return false;
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下。", true);
- return false;
- }
- }
- else
- {
- arg.Message = "拉直操作自动对焦成功!";
- arg.State = true;
- SendMsg("1-3");
- Thread.Sleep(1000);
- arg.Message = "拉直拍照成功!";
- arg.Picture_Information.Picture_FullPath = "";
- arg.State = true;
- SendMsg("1-4");
- Thread.Sleep(1000);
- arg.Message = "拉直操作完成";
- arg.State = true;
- SendMsg("1-5");
- }
- //13. 自动 定位功能
- if (!GetPoistion())
- {
- return false;
- }
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //14.自动控制FIB切割
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- if (!FIBCross())
- {
- return false;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- // 16.找到切割位置
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- if (!FindCross())
- {
- return false;
- }
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- }
- //将过程17最后的拍照图片提出给18步进行调用
- List<String> limg_path = new List<string>();
- List<float> lsize = new List<float>();
- //17.自动控制SEM拍截面照
- if (!ShotSection(ref limg_path, ref lsize))
- {
- //return false;
- }
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //这段是临时的
- //arg.State = true;
- //arg.Message = "测量尺寸成功";
- //SendMsg("1-40");
- //18.自动层高分析
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- float size = iSEM.GetPixelSize();
- int state = 1;
- wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
- if (state == 0)
- {
- arg.Message = "测量尺寸失败";
- arg.State = false;
- SendMsg("1-40");
- return false;
- }
- arg.State = true;
- arg.Message = "测量尺寸成功";
- SendMsg("1-40");
- }
- //19.能谱分析
- if (m_measureFile.MParam.EDS)
- {
- EDSAnalysis();
- }
- //20.复位 del by sun 2020-12-15
- //BeamShiftReset();
- //del by sun 2020-12-15 end
- return true;
- }
- //测试完第一个孔后的样品台初始化操作。
- //再调用CommonWork执行非第一个孔的测试过程
- public bool OtherHole_Init()
- {
- CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
- #region 初始化
- //1、不只拍照,且不是倾斜观测,则移动T轴
- if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
- {
- //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
- if (!iSEM.SetStageGotoT(0))
- {
- LogManager.AddHardwareLog("样品台归零失败", false);
- return false;
- }
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- }
- //2、如果是倾斜观测,则移动Z轴
- if(m_measureFile.MParam.Title==true)
- {
- //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
- //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_measureFile.MParam.ZDistance/1000))
- //20201109, Z轴降到安全的位置上
- if(!iSEM.SetStageGotoZ(fSateyZ))
- {
- LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
- return false;
- }
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- }
- //3. 根据光镜坐标控制样品台移动
- if (!iSEM.SetStageGotoR(currentHole.Position.R))
- {
- //SendMsg("移动失败");
- LogManager.AddHardwareLog("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
- return false;
- }
- LogManager.AddHardwareLog("移动R轴到="+ currentHole.Position.R.ToString(), true);
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
- {
- //SendMsg("移动失败");
- LogManager.AddHardwareLog("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString()+"," +currentHole.Position.X.ToString()+")", false);
- return false;
- }
- LogManager.AddHardwareLog("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //4、倾斜观测时恢复Z轴
- if (m_measureFile.MParam.Title == true)
- {
- //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
- if (currentHole.Position.Z > 0.043)
- {
- LogManager.AddHardwareLog("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
- return false;
- }
- if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
- {
- LogManager.AddHardwareLog("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
- return false;
- }
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- }
- //5. 控制样品台,调整T轴54度、M/Z/R轴不变
- if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
- {
- if (!iSEM.SetStageGotoT(54))
- {
- LogManager.AddHardwareLog("测量线程报错:校正54度有误", true);
- return false;
- }
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //4、设置WD
- iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
- Thread.Sleep(1000);
- #endregion
- return true;
- }
- //初始化拉直操作
- public bool Straighten_Handle()
- {
- if (m_measureFile.MParam.Title)
- {
- //倾斜样品台,SEM视野是黑色的
- LogManager.AddHardwareLog("测量线程:恢复到工作位置后重新调亮图像。", true);
- if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
- {
- LogManager.AddHardwareLog("测量线程报错:重新设置到标准工作距离失败。", false);
- return false;
- }
- Thread.Sleep(7000); //自动亮度对比度使用
-
- }
- //1、自动对焦
- LogManager.AddHardwareLog("测量线程报错:拉直操作前自动对焦开始", true);
- iSEM.SetReduced(402, 128, 340, 256);
- Thread.Sleep(200);
- //add by sun 2020-12-15
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
- //add by sun 2020-12-15 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
- float m_TempBrightness = 50.0f;
- float m_TempContrast = 30.0f;
- if (m_measureFile.MParam.SampleName == "3")
- {
- m_TempBrightness = 48.0f;
- m_TempContrast = 29.0f;
- }
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
- iSEM.SetAutoVideoOff();
- Thread.Sleep(200);
- iSEM.SetBrightness(m_TempBrightness);//50.0f
- Thread.Sleep(200);
- iSEM.SetContrast(m_TempContrast);//30.0f
- Thread.Sleep(200);
- if (!ImageFocus1(false))
- {
- LogManager.AddHardwareLog("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
- arg.Message = "拉直操作自动对焦失败!";
- arg.State = false;
- SendMsg("1-3");
- return false;
- }
- iSEM.CloseReduced();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- iSEM.SetAutoVideoBrightnessAndContrast();
- Thread.Sleep(5000);
- arg.Message = "拉直操作自动对焦成功!";
- arg.State = true;
- SendMsg("1-3");
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下。", true);
- return false;
- }
- //2、拍张照片
- String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
- LogManager.AddHardwareLog("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
- //拍照前改变速度,延时
- //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
- //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- if (!GetImage(fileName0))
- {
- LogManager.AddHardwareLog("测量线程报错:拉直拍照失败", false);
- arg.Message = "拉直拍照失败";
- arg.State = false;
- SendMsg("1-4");
- return false;
- }
- arg.Message = "拉直拍照成功!";
- arg.Picture_Information.Picture_FullPath = fileName0;
- arg.State = true;
- SendMsg("1-4");
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- //3、华为接口,获取旋转角度
- float degree = 0;
- int direction = 0;
- int state = 1;
- wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
- LogManager.AddHardwareLog("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
- LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
- LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
- if (state == 0)
- {
- LogManager.AddHardwareLog("测量线程:图像处理接口参数state返回为零" ,false);
- arg.Message = "图像处理接口参数state返回为零";
- arg.State = false;
- SendMsg("1-5");
- if (hand_intervene == 1)
- {
- if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
- {
- return false;
- }
- }
- else
- {
- return false;
- }
- return false;
- }
- if (direction == 2)
- {
- degree = -degree;
- }
- if (degree != 0)
- {
- //4、拉直,旋转R轴
- LogManager.AddHardwareLog("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
- //选择之前,先降Z轴
- float Zpos = iSEM.GetStageAtZ();
- Thread.Sleep(200);
- LogManager.AddHardwareLog("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
- if (!iSEM.SetStageGotoZ(fSateyZ))
- {
- LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
- return false;
- }
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- iSEM.SetStageDeltaR(degree);
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- if (!iSEM.SetStageGotoZ(Zpos))
- {
- LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
- return false;
- }
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //4、设置WD
- iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
- Thread.Sleep(1000);
- }
- arg.Message = "拉直操作完成";
- arg.State = true;
- SendMsg("1-5");
- return true;
- }
- //角度补偿
- public bool TiltCorrection(float a_fAngle)
- {
- if (!iSEM.SetTiltAngleOn())
- {
- return false;
- }
- Thread.Sleep(200);
- //恢复原始状态
- if (!iSEM.SetTiltAngle(a_fAngle))
- {
- return false;
- }
- return true;
- }
- //拍图
- public bool GetImage(String a_fileName)
- {
- LogManager.AddHardwareLog("获取分辨率开始!", true);
- //3. 获取分辨率
- int[] ImageSize = iSEM.GetImageStore();
- if (ImageSize[0] == 0 || ImageSize[1] == 0)
- {
- return false;
- }
- short width = (short)ImageSize[0];
- short height = (short)ImageSize[1];
- LogManager.AddHardwareLog("获取分辨率结束!"+ a_fileName +"===="+ width+ "*"+height, true);
- //4. 抓图
- if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
- {
- LogManager.AddHardwareLog("抓图失败!", true);
- return false;
- }
- return true;
- }
- //拍图1
- public bool GetImage1(String a_fileName)
- {
- //3. 获取分辨率
- int[] ImageSize = iSEM.GetImageStore();
- if (ImageSize[0] == 0 || ImageSize[1] == 0)
- {
- return false;
- }
- short width = (short)ImageSize[0];
- short height = (short)ImageSize[1];
- //4. 抓图
- if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
- {
- return false;
- }
- return true;
- }
- #region 算法设计
- //执行自动对焦
- public bool ImageFocus()
- {
- if (m_measureFile.MParam.FocusMode == 1)//手动
- {
- if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- }
- else
- {
- return false;
- }
- }
- else if (m_measureFile.MParam.FocusMode == 2)//自有自动
- {
- //郝工增加自动对焦算法
- //处理文件夹
- if (Directory.Exists(focus_path))
- {
- Directory.Delete(focus_path, true);
- }
- Thread.Sleep(3000);
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(1000);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(1000);
- //再创建文件夹
- Directory.CreateDirectory(focus_path);
- //1、对焦参数类,2、输出工作距离
- int wd = 0;
- //20201015 根据当前的工作距离重新计算对焦位置
- float currentWd = iSEM.GetWorkingDistance();
- //m_measureFile.MParam.AutoFocus.UP = currentWd * 1000000 - m_measureFile.MParam.AutoFocus.Step;
- //m_measureFile.MParam.AutoFocus.Down = currentWd * 1000000 + m_measureFile.MParam.AutoFocus.Step;
- Thread.Sleep(2000);
- float currentMag = iSEM.GetMagnification();
- Thread.Sleep(2000);
- FocusParam pFoucs = new FocusParam();
- if (currentMag <= m_measureFile.MParam.Photograph_Magnification)
- {
- pFoucs = m_measureFile.MParam.AutoFocus;
- pFoucs.UP = 5050;
- pFoucs.Down = 5150;
- pFoucs.Step = 50;
- pFoucs.fStep = 10;
- pFoucs.Range = 50;
- //4、设置WD
- iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
- Thread.Sleep(1000);
- }
- else
- {
- pFoucs = m_measureFile.MParam.AutoFocus;
- pFoucs.UP = 5000;
- pFoucs.Down = 5200;
- pFoucs.Step = 10;
- pFoucs.fStep = 5;
- pFoucs.Range = 50;
- //4、设置WD
- iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
- Thread.Sleep(1000);
- }
- //LogManager.AddHardwareLog("修改对焦参数", true);
- AutoFocus(pFoucs, out wd);
- LogManager.AddHardwareLog("自动调节算法输出"+ (wd * 0.00000001).ToString(), true);
- //设置工作距离
- iSEM.SetWorkingDistance((float)(wd * 0.00000001));
- //设置完工作距离后必须延迟5秒
- Thread.Sleep(5000);
- //处理图片位置
- //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
- }
- else if (m_measureFile.MParam.FocusMode == 3) //客户自动
- {
- //后期和客户对接接口
- List<string> filenames = new List<string>();
- String retfilename = wr.Img_Auto_Focus(filenames);
- }
- else //蔡司自动对焦
- {
- iSEM.CmdAutoFocusCoarse();
- while (true)
- {
- Thread.Sleep(10000);
- if (0 == iSEM.GetAutoFunction())
- {
- break;
- }
- }
- iSEM.CmdAutoFocusFine();
- while (true)
- {
- Thread.Sleep(10000);
- if (0 == iSEM.GetAutoFunction())
- {
- break;
- }
- }
- }
- return true;
- }
- //执行自动对焦
- public bool ImageFocus1(Boolean Is_Stig)
- {
- if (m_measureFile.MParam.FocusMode == 1)//手动
- {
- if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- }
- else
- {
- return false;
- }
- }
- else if (m_measureFile.MParam.FocusMode == 2)//自有自动
- {
- #region 执行蔡司自动对焦程序
- //服务地址
- string snumstr = @"http://192.168.1.101:8123";
- // 调用方法;只对焦不消像散
- if (Is_Stig)
- {
- string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);
- if (focusstig != "success")
- {
- LogManager.AddHardwareLog("对焦失败" + focusstig , true);
- return false;
- }
- }
- else
- {
- string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);
- if (onlyfocus != "success")
- {
- return false;
- }
- }
- #endregion
- }
- else if (m_measureFile.MParam.FocusMode == 3) //客户自动
- {
- //后期和客户对接接口
- List<string> filenames = new List<string>();
- String retfilename = wr.Img_Auto_Focus(filenames);
- }
- else //蔡司自动对焦
- {
- iSEM.CmdAutoFocusCoarse();
- while (true)
- {
- Thread.Sleep(10000);
- if (0 == iSEM.GetAutoFunction())
- {
- break;
- }
- }
- iSEM.CmdAutoFocusFine();
- while (true)
- {
- Thread.Sleep(10000);
- if (0 == iSEM.GetAutoFunction())
- {
- break;
- }
- }
- }
- return true;
- }
- //执行自动消像散
- public bool ImageStig()
- {
- if (m_measureFile.MParam.FocusMode == 1)//手动
- {
- if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- }
- else
- {
- return false;
- }
- }
- else if (m_measureFile.MParam.FocusMode == 2)//自有自动
- {
- //郝工增加自动对焦算法
- //处理文件夹
- if (Directory.Exists(StigX_path))
- {
- Directory.Delete(StigX_path, true);
- }
- Thread.Sleep(3000);
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(1000);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(1000);
- //再创建文件夹
- Directory.CreateDirectory(StigX_path);
- //1、对焦参数类,2、输出像散值
- int stigX = 0;
- //根据当前的stigX重新计算像散值
- float currentStigX = 0;// iSEM.GetAstigmatismX();
- //m_measureFile.MParam.AutoStigX.Step = 10; //像散的步长为10
- //m_measureFile.MParam.AutoStigX.UP = currentStigX - m_measureFile.MParam.AutoStigX.Step;
- //m_measureFile.MParam.AutoStigX.Down = currentStigX + m_measureFile.MParam.AutoStigX.Step;
- //设置工作距离
- iSEM.SetAstigmatismX((float)0);
- //设置完工作距离后必须延迟5秒
- Thread.Sleep(5000);
- //LogManager.AddHardwareLog("修改消像散参数", true);
- AutoStig(m_measureFile.MParam.AutoStigX, out stigX);
- LogManager.AddHardwareLog("自动消散算法输出X"+ (stigX * 0.01).ToString(), true);
- //设置工作距离
- iSEM.SetAstigmatismX((float)(stigX * 0.01));
- //设置完工作距离后必须延迟5秒
- Thread.Sleep(5000);
- //处理图片位置
- //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
- //处理文件夹
- if (Directory.Exists(StigY_path))
- {
- Directory.Delete(StigY_path, true);
- }
- Thread.Sleep(3000);
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(1000);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(1000);
- //再创建文件夹
- Directory.CreateDirectory(StigY_path);
- //1、对焦参数类,2、输出像散值
- int stigY = 0;
- //根据当前的stigX重新计算像散值
- float currentStigY = 0;// iSEM.GetAstigmatismY();
- //m_measureFile.MParam.AutoStigY.Step = 10; //像散的步长为10
- //m_measureFile.MParam.AutoStigY.UP = m_measureFile.MParam.AutoStigY.;
- //m_measureFile.MParam.AutoStigY.Down = m_measureFile.MParam.AutoStigY.Step;
- iSEM.SetAstigmatismY((float)0);
- Thread.Sleep(2000);
- LogManager.AddHardwareLog("修改消像散参数", true);
- AutoStig(m_measureFile.MParam.AutoStigY, out stigY);
- LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
- //设置工作距离
- iSEM.SetAstigmatismY((float)(stigY * 0.01));
- //设置完工作距离后必须延迟5秒
- Thread.Sleep(5000);
- }
- else if (m_measureFile.MParam.FocusMode == 3) //客户自动
- {
- //后期和客户对接接口
- List<string> filenames = new List<string>();
- String retfilename = wr.Img_Auto_Focus(filenames);
- }
- else //蔡司自动对焦
- {
- iSEM.CmdAutoFocusCoarse();
- while (true)
- {
- Thread.Sleep(10000);
- if (0 == iSEM.GetAutoFunction())
- {
- break;
- }
- }
- iSEM.CmdAutoFocusFine();
- while (true)
- {
- Thread.Sleep(10000);
- if (0 == iSEM.GetAutoFunction())
- {
- break;
- }
- }
- }
- return true;
- }
- //自动聚焦
- public bool AutoFocus(FocusParam a_param, out int a_nWd)
- {
- a_nWd = 0;
- float wd = iSEM.GetWorkingDistance();
- a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
- if (a_param == null)
- {
- LogManager.AddHardwareLog("空参数", true);
- return false;
- }
- string path = a_param.Path;
- if (!Directory.Exists(path))
- {
- LogManager.AddHardwareLog("文件夹丢失", true);
- return false;
- }
- string path_coarse = a_param.Path + "\\Coarse";
- if (!Directory.Exists(path_coarse))
- {
- Directory.CreateDirectory(path_coarse);
- }
- string path_fine = a_param.Path + "\\Fine";
- if (!Directory.Exists(path_fine))
- {
- Directory.CreateDirectory(path_fine);
- }
- //1. 拍照
- //1.1, 粗拍照
- //1.1.1, 根据参数计算拍照次数
- double nUp = a_param.UP * 100.0 ;
- double nDown = a_param.Down * 100.0;
- double nStep = a_param.Step * 100.0;
- double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
- LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
- //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
-
- //粗拍照
- for (int i = 0; i < nTimes; i++)
- {
- int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
- iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
- arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- int swd = cWd / 100;
- //SendMsg("wd = " + swd.ToString() +"um");
- String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
- arg.Picture_Information.Picture_FullPath = fileName;
- if (!GetImage(fileName))
- {
- return false;
- }
- //arg.State = true;
- //arg.Message = "自动对焦";
- //SendMsg("0-9");
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //Thread.Sleep(3000);
- }
- //1.2, 选定细拍照的工作距离
- int CorWd = 510000;
- ChooseBest(path_coarse,out CorWd);
- if (CorWd == -1)
- CorWd = 510000;
- else
- a_nWd = CorWd;
- //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
-
- //1.3, 细拍照
- if ( (CorWd - a_param.Range * 100.0) <=0)
- {
- return false;
- }
- double nfUp = CorWd - a_param.Range * 100.0;
- double nfStep = a_param.fStep * 100.0;
- double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
- //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
-
- for (int i = 0; i < nfTimes; i++)
- {
- int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
- iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
- arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
- Thread.Sleep(Convert.ToInt32(cycle_time)+100);
- int swd = cWd / 100;
- //SendMsg("wd = " + swd.ToString() + "um");
- String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
- arg.Picture_Information.Picture_FullPath = fileName;
- if (!GetImage(fileName))
- {
- return false;
- }
- //arg.State = true;
- //arg.Message = "自动对焦";
- //SendMsg("0-9");
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //Thread.Sleep(2000);
- }
- int fineWd = CorWd;
- ChooseBest(path_fine, out fineWd);
- //SendMsg("wd fine max = " + fineWd.ToString());
- if (fineWd == -1)
- a_nWd = CorWd;
- else
- a_nWd = fineWd;
- //SendMsg("细选工作距离wd = " + a_nWd.ToString());
- //arg.State = true;
- //arg.Message = "自动对焦";
- //SendMsg(step_code);
- return true;
- }
- //自动聚焦1
- public bool AutoFocus1(FocusParam a_param, out int a_nWd)
- {
- a_nWd = 0;
- float wd = iSEM.GetWorkingDistance();
- a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
- if (a_param == null)
- {
- LogManager.AddHardwareLog("空参数", true);
- return false;
- }
- string path = a_param.Path;
- if (!Directory.Exists(path))
- {
- LogManager.AddHardwareLog("文件夹丢失", true);
- return false;
- }
- string path_coarse = a_param.Path + "\\Coarse";
- if (!Directory.Exists(path_coarse))
- {
- Directory.CreateDirectory(path_coarse);
- }
- string path_fine = a_param.Path + "\\Fine";
- if (!Directory.Exists(path_fine))
- {
- Directory.CreateDirectory(path_fine);
- }
- //1. 拍照
- //1.1, 粗拍照
- //1.1.1, 根据参数计算拍照次数
- double nUp = a_param.UP * 100.0;
- double nDown = a_param.Down * 100.0;
- double nStep = a_param.Step * 100.0;
- double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
- LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
- //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
- //粗拍照
- for (int i = 0; i < nTimes; i++)
- {
- int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
- iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
- //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
- Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
- int swd = cWd / 100;
- //SendMsg("wd = " + swd.ToString() +"um");
- String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
- //arg.Picture_Information.Picture_FullPath = fileName;
- if (!GetImage1(fileName))
- {
- return false;
- }
- //arg.State = true;
- //arg.Message = "自动对焦";
- //SendMsg(step_code);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //Thread.Sleep(3000);
- }
- //1.2, 选定细拍照的工作距离
- int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
- ChooseBest(path_coarse, out CorWd);
- if (CorWd == -1)
- CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
- else
- a_nWd = CorWd;
- //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
- //1.3, 细拍照
- if ((CorWd - a_param.Range * 100.0) <= 0)
- {
- return false;
- }
- double nfUp = CorWd - a_param.Range * 100.0;
- double nfStep = a_param.fStep * 100.0;
- double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
- //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
- for (int i = 0; i < nfTimes; i++)
- {
- int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
- iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
- //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
- Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
- int swd = cWd / 100;
- //SendMsg("wd = " + swd.ToString() + "um");
- String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
- //arg.Picture_Information.Picture_FullPath = fileName;
- if (!GetImage1(fileName))
- {
- return false;
- }
- //arg.State = true;
- //arg.Message = "自动对焦";
- //SendMsg(step_code);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //Thread.Sleep(2000);
- }
- int fineWd = CorWd;
- ChooseBest(path_fine, out fineWd);
- //SendMsg("wd fine max = " + fineWd.ToString());
- if (fineWd == -1)
- a_nWd = CorWd;
- else
- a_nWd = fineWd;
- //SendMsg("细选工作距离wd = " + a_nWd.ToString());
- //arg.State = true;
- //arg.Message = "自动对焦";
- //SendMsg("0-9");
- return true;
- }
- //自动消像散 AutoStig
- public bool AutoStig(FocusParam a_param, out int a_nWd)
- {
- a_nWd = 0;
- float wd = 0;
- if (a_param.TYPE == 2)
- {
- wd = iSEM.GetAstigmatismX();
- }
- else if (a_param.TYPE == 3)
- {
- wd = iSEM.GetAstigmatismY();
- }
- else
- {
- LogManager.AddHardwareLog("自动消像散参数设置有误", true);
- return false;
- }
-
- a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
- if (a_param == null)
- {
- LogManager.AddHardwareLog("空参数", true);
- return false;
- }
- string path = a_param.Path;
- if (!Directory.Exists(path))
- {
- LogManager.AddHardwareLog("文件夹丢失", true);
- return false;
- }
- string path_coarse = a_param.Path + "\\Coarse";
- if (!Directory.Exists(path_coarse))
- {
- Directory.CreateDirectory(path_coarse);
- }
- string path_fine = a_param.Path + "\\Fine";
- if (!Directory.Exists(path_fine))
- {
- Directory.CreateDirectory(path_fine);
- }
- //1. 拍照
- //1.1, 粗拍照
- //1.1.1, 根据参数计算拍照次数
- double nUp = a_param.UP * 100.0;
- double nDown = a_param.Down * 100.0;
- double nStep = a_param.Step * 100.0;
- double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
- LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
- //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
- //粗拍照
- for (int i = 0; i < nTimes; i++)
- {
- int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
- if (a_param.TYPE == 2)
- {
- iSEM.SetAstigmatismX((float)(cWd * 0.01));
- }
- else if (a_param.TYPE == 3)
- {
- iSEM.SetAstigmatismY((float)(cWd * 0.01));
- }
- else
- {
- LogManager.AddHardwareLog("自动消像散参数设置有误", true);
- return false;
- }
- //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- int swd = cWd / 100;
- //SendMsg("wd = " + swd.ToString() +"um");
- String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
- arg.Picture_Information.Picture_FullPath = fileName;
- if (!GetImage(fileName))
- {
- return false;
- }
- arg.State = true;
- arg.Message = "自动像散";
- SendMsg("0-8");
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //Thread.Sleep(3000);
- }
- //1.2, 选定细拍照的工作距离
- int CorWd;
- ChooseBest(path_coarse, out CorWd);
- if (CorWd == -1)
- {
- a_nWd = 0;
- }
- else
- {
- a_nWd = CorWd;
- }
- //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
- //1.3, 细拍照
- if ((CorWd - a_param.Range * 100.0) <= -10000)
- {
- return false;
- }
- double nfUp = 0;
- if (a_param.Range >= 0)
- nfUp = CorWd - a_param.Range * 100.0;
- else
- nfUp = CorWd + a_param.Range * 100.0;
- double nfStep = a_param.fStep * 100.0;
- double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
- //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
- for (int i = 0; i < nfTimes; i++)
- {
- int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
- if (a_param.TYPE == 2)
- {
- iSEM.SetAstigmatismX((float)(cWd * 0.01));
- }
- else if (a_param.TYPE == 3)
- {
- iSEM.SetAstigmatismY((float)(cWd * 0.01));
- }
- else
- {
- LogManager.AddHardwareLog("自动消像散参数设置有误", true);
- return false;
- }
- //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- int swd = cWd / 100;
- //SendMsg("wd = " + swd.ToString() + "um");
- String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
- arg.Picture_Information.Picture_FullPath = fileName;
- if (!GetImage(fileName))
- {
- return false;
- }
- arg.State = true;
- arg.Message = "自动像散";
- SendMsg("0-8");
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //Thread.Sleep(2000);
- }
- int fineWd = CorWd;
- ChooseBest(path_fine, out fineWd);
- //SendMsg("wd fine max = " + fineWd.ToString());
- if(fineWd == -1)
- a_nWd = CorWd;
- else
- a_nWd = fineWd;
- //SendMsg("细选工作距离wd = " + a_nWd.ToString());
- //arg.State = true;
- //arg.Message = "自动像散";
- //SendMsg(step_code);
- return true;
- }
- //执行自动消像散1
- public bool ImageStig1()
- {
- if (m_measureFile.MParam.FocusMode == 1)//手动
- {
- if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- }
- else
- {
- return false;
- }
- }
- else if (m_measureFile.MParam.FocusMode == 2)//自有自动
- {
- //郝工增加自动对焦算法
- //处理文件夹
- if (Directory.Exists(StigX_path))
- {
- Directory.Delete(StigX_path, true);
- }
- Thread.Sleep(3000);
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(200);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(200);
- //再创建文件夹
- Directory.CreateDirectory(StigX_path);
- //1、对焦参数类,2、输出像散值
- int stigX = 0;
- //根据当前的stigX重新计算像散值
- float currentStigX = 0;// iSEM.GetAstigmatismX();
- //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
- //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
- //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
- //设置工作距离
- currentStigX = iSEM.GetAstigmatismX();
- Thread.Sleep(1000);
- FocusParam pFocus = new FocusParam();
- pFocus = m_measureFile.MParam.AutoStigX;
- float old_up = m_measureFile.MParam.AutoStigX.UP;
- float old_down = m_measureFile.MParam.AutoStigX.Down;
- float setvalue = m_measureFile.MParam.AutoStigX.UP;
- pFocus.UP = currentStigX - setvalue;
- pFocus.Down = currentStigX + setvalue;
- //m_measureFile.MParam.AutoStigX.Step = 1;
- //m_measureFile.MParam.AutoStigX.Range = (float)0.5;
- //m_measureFile.MParam.AutoStigX.fStep = (float)0.1;
- LogManager.AddHardwareLog("消像散参数: up = "+pFocus.UP+",down = " + pFocus.Down+ ",step =" + pFocus.Step + ",rang ="+ pFocus.Range + ",fstep = " + pFocus.fStep, true);
- //LogManager.AddHardwareLog("修改消像散参数", true);
- AutoStig1(pFocus, out stigX);
- m_measureFile.MParam.AutoStigX.UP = old_up;
- m_measureFile.MParam.AutoStigX.Down = old_down;
- LogManager.AddHardwareLog("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
- //设置工作距离
- iSEM.SetAstigmatismX((float)(stigX * 0.01));
- //设置完工作距离后必须延迟5秒
- Thread.Sleep(5000);
- //处理图片位置
- //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
- //处理文件夹
- if (Directory.Exists(StigY_path))
- {
- Directory.Delete(StigY_path, true);
- }
- Thread.Sleep(3000);
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(200);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(200);
- //再创建文件夹
- Directory.CreateDirectory(StigY_path);
- //1、对焦参数类,2、输出像散值
- int stigY = 0;
- //根据当前的stigX重新计算像散值
- float currentStigY = 0;// iSEM.GetAstigmatismY();
- //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
- //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
- //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
- currentStigY = iSEM.GetAstigmatismY();
- Thread.Sleep(1000);
- //m_measureFile.MParam.AutoStigY.UP = currentStigY - setvalue;
- //m_measureFile.MParam.AutoStigY.Down = currentStigY + setvalue;
- //m_measureFile.MParam.AutoStigY.Step = 1;
- //m_measureFile.MParam.AutoStigY.Range = (float)0.5;
- //m_measureFile.MParam.AutoStigY.fStep = (float)0.1;
- FocusParam pFocusY = new FocusParam();
- pFocusY = m_measureFile.MParam.AutoStigY;
- float old_upY = m_measureFile.MParam.AutoStigY.UP;
- float old_downY = m_measureFile.MParam.AutoStigY.Down;
- //float setvalue = m_measureFile.MParam.AutoStigX.UP;
- pFocusY.UP = currentStigY - setvalue;
- pFocusY.Down = currentStigY + setvalue;
- LogManager.AddHardwareLog("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
- AutoStig1(pFocusY, out stigY);
- m_measureFile.MParam.AutoStigY.UP = old_upY;
- m_measureFile.MParam.AutoStigY.Down = old_downY;
- LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
- //设置工作距离
- iSEM.SetAstigmatismY((float)(stigY * 0.01));
- //设置完工作距离后必须延迟5秒
- Thread.Sleep(5000);
- }
- else if (m_measureFile.MParam.FocusMode == 3) //客户自动
- {
- //后期和客户对接接口
- List<string> filenames = new List<string>();
- String retfilename = wr.Img_Auto_Focus(filenames);
- }
- else //蔡司自动对焦
- {
- iSEM.CmdAutoFocusCoarse();
- while (true)
- {
- Thread.Sleep(10000);
- if (0 == iSEM.GetAutoFunction())
- {
- break;
- }
- }
- iSEM.CmdAutoFocusFine();
- while (true)
- {
- Thread.Sleep(10000);
- if (0 == iSEM.GetAutoFunction())
- {
- break;
- }
- }
- }
- return true;
- }
- //自动消像散 AutoStig1
- public bool AutoStig1(FocusParam a_param, out int a_nWd)
- {
- a_nWd = 0;
- float wd = 0;
- if (a_param.TYPE == 2)
- {
- wd = iSEM.GetAstigmatismX();
- }
- else if (a_param.TYPE == 3)
- {
- wd = iSEM.GetAstigmatismY();
- }
- else
- {
- LogManager.AddHardwareLog("自动消像散参数设置有误", true);
- return false;
- }
- a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
- if (a_param == null)
- {
- LogManager.AddHardwareLog("空参数", true);
- return false;
- }
- string path = a_param.Path;
- if (!Directory.Exists(path))
- {
- LogManager.AddHardwareLog("文件夹丢失", true);
- return false;
- }
- string path_coarse = a_param.Path + "\\Coarse";
- if (!Directory.Exists(path_coarse))
- {
- Directory.CreateDirectory(path_coarse);
- }
- string path_fine = a_param.Path + "\\Fine";
- if (!Directory.Exists(path_fine))
- {
- Directory.CreateDirectory(path_fine);
- }
- //1. 拍照
- //1.1, 粗拍照
- //1.1.1, 根据参数计算拍照次数
- double nUp = a_param.UP * 100.0;
- double nDown = a_param.Down * 100.0;
- double nStep = a_param.Step * 100.0;
- double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
- LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
- //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
- //粗拍照
- for (int i = 0; i < nTimes; i++)
- {
- int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
- if (a_param.TYPE == 2)
- {
- iSEM.SetAstigmatismX((float)(cWd * 0.01));
- }
- else if (a_param.TYPE == 3)
- {
- iSEM.SetAstigmatismY((float)(cWd * 0.01));
- }
- else
- {
- LogManager.AddHardwareLog("自动消像散参数设置有误", true);
- return false;
- }
- //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- int swd = cWd / 100;
- //SendMsg("wd = " + swd.ToString() +"um");
- String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
- arg.Picture_Information.Picture_FullPath = fileName;
- if (!GetImage1(fileName))
- {
- return false;
- }
- //arg.State = true;
- //arg.Message = "自动像散";
- //SendMsg(step_code);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //Thread.Sleep(3000);
- }
- //1.2, 选定细拍照的工作距离
- int CorWd;
- ChooseBest(path_coarse, out CorWd);
- if (CorWd == -1)
- {
- a_nWd = 0;
- }
- else
- {
- a_nWd = CorWd;
- }
- //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
- //1.3, 细拍照
- if ((CorWd - a_param.Range * 100.0) <= -10000)
- {
- return false;
- }
- double nfUp = 0;
- if (a_param.Range >= 0)
- nfUp = CorWd - a_param.Range * 100.0;
- else
- nfUp = CorWd + a_param.Range * 100.0;
- double nfStep = a_param.fStep * 100.0;
- double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
- //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
- for (int i = 0; i < nfTimes; i++)
- {
- int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
- if (a_param.TYPE == 2)
- {
- iSEM.SetAstigmatismX((float)(cWd * 0.01));
- }
- else if (a_param.TYPE == 3)
- {
- iSEM.SetAstigmatismY((float)(cWd * 0.01));
- }
- else
- {
- LogManager.AddHardwareLog("自动消像散参数设置有误", true);
- return false;
- }
- //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- int swd = cWd / 100;
- //SendMsg("wd = " + swd.ToString() + "um");
- String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
- arg.Picture_Information.Picture_FullPath = fileName;
- if (!GetImage1(fileName))
- {
- return false;
- }
- //arg.State = true;
- //arg.Message = "自动像散";
- //SendMsg(step_code);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //Thread.Sleep(2000);
- }
- int fineWd = CorWd;
- ChooseBest(path_fine, out fineWd);
- //SendMsg("wd fine max = " + fineWd.ToString());
- if (fineWd == -1)
- a_nWd = CorWd;
- else
- a_nWd = fineWd;
- //SendMsg("细选工作距离wd = " + a_nWd.ToString());
- //arg.State = true;
- //arg.Message = "自动像散";
- //SendMsg("0-9");
- return true;
- }
- //自动FIB对焦 AutoFIBFocus
- public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
- {
- a_nWd = 0;
- float wd = 0;
- if (a_param.TYPE == 4)
- {
- wd = iSEM.GetFIBObjectivePotential();
- }
- else
- {
- LogManager.AddHardwareLog("FIB自动聚焦参数设置有误", true);
- return false;
- }
- a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
- if (a_param == null)
- {
- LogManager.AddHardwareLog("空参数", true);
- return false;
- }
- string path = a_param.Path;
- if (!Directory.Exists(path))
- {
- LogManager.AddHardwareLog("文件夹丢失", true);
- return false;
- }
- string path_coarse = a_param.Path + "\\Coarse";
- if (!Directory.Exists(path_coarse))
- {
- Directory.CreateDirectory(path_coarse);
- }
- string path_fine = a_param.Path + "\\Fine";
- if (!Directory.Exists(path_fine))
- {
- Directory.CreateDirectory(path_fine);
- }
- //1. 拍照
- //1.1, 粗拍照
- //1.1.1, 根据参数计算拍照次数
- double nUp = a_param.UP * 100.0;
- double nDown = a_param.Down * 100.0;
- double nStep = a_param.Step * 100.0;
- double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
- LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
- //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
- //粗拍照
- for (int i = 0; i < nTimes; i++)
- {
- int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
- if (a_param.TYPE == 4)
- {
- iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
- }
- else
- {
- LogManager.AddHardwareLog("FIB对焦参数设置有误,对焦类型错", true);
- return false;
- }
- //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- int swd = cWd / 100;
- //SendMsg("wd = " + swd.ToString() +"um");
- String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
- arg.Picture_Information.Picture_FullPath = fileName;
- if (!GetImage(fileName))
- {
- return false;
- }
- arg.State = true;
- arg.Message = "FIB自动对焦";
- SendMsg(step_code);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //Thread.Sleep(3000);
- }
- //1.2, 选定细拍照的工作距离
- int CorWd;
- ChooseBest(path_coarse, out CorWd);
- a_nWd = CorWd;
- //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
- //1.3, 细拍照
- if ((CorWd - a_param.Range * 100.0) <0)
- {
- return false;
- }
- double nfUp = CorWd - a_param.Range * 100.0;
- double nfStep = a_param.fStep * 100.0;
- double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
- //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
- for (int i = 0; i < nfTimes; i++)
- {
- int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
- if (a_param.TYPE == 4)
- {
- iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
- }
- else
- {
- LogManager.AddHardwareLog("自动消像散参数设置有误", true);
- return false;
- }
- //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
- Thread.Sleep(Convert.ToInt32(cycle_time) +100);
- int swd = cWd / 100;
- //SendMsg("wd = " + swd.ToString() + "um");
- String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
- arg.Picture_Information.Picture_FullPath = fileName;
- if (!GetImage(fileName))
- {
- return false;
- }
- arg.State = true;
- arg.Message = "FIB自动对焦";
- SendMsg(step_code);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //Thread.Sleep(2000);
- }
- int fineWd;
- ChooseBest(path_fine, out fineWd);
- //SendMsg("wd fine max = " + fineWd.ToString());
- a_nWd = fineWd;
- //SendMsg("细选工作距离wd = " + a_nWd.ToString());
- return true;
- }
- //LoG算子计算
- private double LoGMean(string a_strImgPath)
- {
- //读入Img文件
- if (!File.Exists(a_strImgPath))
- {
- return 0;
- }
- Mat src, gray_src;
- int kernel_size = 3;
- src = Cv2.ImRead(a_strImgPath);
- gray_src = new Mat();
- src.CvtColor(ColorConversionCodes.BGR2GRAY);
- Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
- Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
- Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
- Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
- Cv2.ConvertScaleAbs(src, src);
- //图像的平均灰度
- double meanValue = 0.0;
- meanValue = Cv2.Mean(src)[0];
- return meanValue;
- }
- //梯度计算
- private double Tenengrad(string a_strImgPath)
- {
- //读入Img文件
- if (!File.Exists(a_strImgPath))
- {
- return 0;
- }
- Mat src;
- src = Cv2.ImRead(a_strImgPath);
- src.CvtColor(ColorConversionCodes.BGR2GRAY);
- Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
- Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
- Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
- Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
- //图像的平均灰度
- double meanValue = 0.0;
- meanValue = Cv2.Mean(src)[0];
- return meanValue;
- }
- //梯度计算
- private double TTgrad(string a_strImgPath)
- {
- //读入Img文件
- if (!File.Exists(a_strImgPath))
- {
- return 0;
- }
- Mat src;
- src = Cv2.ImRead(a_strImgPath);
- src.CvtColor(ColorConversionCodes.BGR2GRAY);
- Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
- Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
- Mat scalex = new Mat();
- Mat scaley = new Mat();
- Cv2.Scharr(src, src, src.Depth(), 1, 0);
- Cv2.ConvertScaleAbs(src, scalex);
- Cv2.Scharr(src, src, src.Depth(), 0, 1);
- Cv2.ConvertScaleAbs(src, scaley);
- Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
- //图像的平均灰度
- double meanValue = 0.0;
- meanValue = Cv2.Mean(src)[0];
- return meanValue;
- }
- //三选二算法
- private bool ChooseBest(string a_strImgPath, out int a_nWd)
- {
- a_nWd = -1;
- var files = Directory.GetFiles(a_strImgPath, "*.tif");
- float[] values = new float[files.Length];
- double smax1 = LoGMean(files[0]);
- int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
- double smax2 = Tenengrad(files[0]);
- int wdmax2 = wdmax1;
- double smax3 = TTgrad(files[0]);
- int wdmax3 = wdmax1;
- int x = 0;
- foreach (var file in files)
- {
- int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
- double svalue1 = LoGMean(file);
- double svalue2 = Tenengrad(file);
- double svalue3 = TTgrad(file);
- if (smax1 < svalue1)
- {
- smax1 = svalue1;
- wdmax1 = wd;
- }
- if (smax2 < svalue2)
- {
- smax2 = svalue2;
- wdmax2 = wd;
- }
- if (smax3 < svalue3)
- {
- smax3 = svalue3;
- wdmax3 = wd;
- }
- x++;
- }
- //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
- if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
- {
- a_nWd = wdmax1;
- //SendMsg("焦距 = " + wdmax1.ToString());
- }
- else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
- {
- a_nWd = wdmax2;
- //SendMsg("焦距 = " + wdmax2.ToString());
- }
- else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
- {
- a_nWd = wdmax3;
- //SendMsg("焦距 = " + wdmax3.ToString());
- }
- else
- {
- //SendMsg("对焦失败。");
- return false;
- }
- return true;
- }
- //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
- bool MoveToPixByMoveStage(float xc, float yc)
- {
- //单位是m/pix
- float XpixSize = iSEM.GetPixelSize();
- LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
- float YpixSize = iSEM.GetPixelSize();///(float)m_measureFile.MParam.PixelSizeCor);
- LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
- Thread.Sleep(500);
- //0:width, 1:height
- int[] imageSize = iSEM.GetImageStore();
- int width = imageSize[0] / 2;
- int height = imageSize[1] / 2;
- LogManager.AddHardwareLog("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
- LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
- float deltX = (xc - (float)width) * XpixSize;
- float deltY = (yc - (float)height) * YpixSize;
- LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
- LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
- float xpCur = iSEM.GetStageAtX();
- float ypCur = iSEM.GetStageAtY();
- LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
- float xpNew = xpCur - deltX;
- float ypNew = ypCur + deltY;
- LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
- //计算光束偏移值:
- //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
- {
- LogManager.AddHardwareLog("X方向移动样品台", true);
- if (!iSEM.SetStageGotoX(xpNew))
- {
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- }
- //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
- {
- LogManager.AddHardwareLog("Y方向移动样品台", true);
- if (!iSEM.SetStageGotoY(ypNew))
- {
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- }
- return true;
- }
- //移动到像素位置
- bool MoveToPix(float xc, float yc)
- {
- //单位是m/pix
- float XpixSize = iSEM.GetPixelSize();
- LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel",true);
- float YpixSize = (XpixSize/(float)m_measureFile.MParam.PixelSizeCor);
- LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
- Thread.Sleep(200);
- //0:width, 1:height
- int[] imageSize = iSEM.GetImageStore();
- int width = imageSize[0]/2;
- int height = imageSize[1]/2;
- LogManager.AddHardwareLog("目标像素是(" + xc.ToString()+ ","+ yc.ToString() + ")", true);
- LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
- float deltX = (xc - (float)width) * XpixSize;
- float deltY = (yc - (float)height) * YpixSize;
- LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
- LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
- float xpCur = iSEM.GetStageAtX();
- Thread.Sleep(200);
- float ypCur = iSEM.GetStageAtY();
- LogManager.AddHardwareLog("当前位置(" + xpCur.ToString()+ "," + ypCur.ToString() + "),单位m", true);
- float xpNew = xpCur - deltX;
- float ypNew = ypCur + deltY;
- LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
- //计算最大偏移量
- float beamXCur = iSEM.GetBeamShiftX();//单位是%
- Thread.Sleep(200);
- iSEM.SetBeamShiftX(100);
- Thread.Sleep(200);
- float beamXMax = iSEM.GetBeamOffsetX();//单位是m
- Thread.Sleep(200);
- iSEM.SetBeamShiftX(beamXCur);
- Thread.Sleep(200);
- //计算光束偏移值:
- float beamX = iSEM.GetBeamOffsetX();
- LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
- beamX = (-deltX + beamX);
- LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
- if( ((beamX <= beamXMax) && (beamX >=0)) ||
- ((beamX >= -beamXMax)&& (beamX < 0)))
- {
- LogManager.AddHardwareLog("X方向移动光束", true);
- float beamXShift = beamX * 100 / beamXMax;
- LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
- if (!iSEM.SetBeamShiftX(beamXShift))
- //if (!iSEM.SetBeamOffsetX(beamX))
- {
- LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
- return false;
- }
- }
- else if(deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
- {
- LogManager.AddHardwareLog("X方向移动样品台", true);
- if (!iSEM.SetStageGotoX(xpNew))
- {
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- }
- float beamY = iSEM.GetBeamOffsetY();
- LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
- beamY = (-deltY + beamY);
- LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
- //计算最大偏移量
- float beamYCur = iSEM.GetBeamShiftY();//单位是%
- Thread.Sleep(200);
- iSEM.SetBeamShiftY(100);
- Thread.Sleep(200);
- float beamYMax = iSEM.GetBeamOffsetY();//单位是m
- Thread.Sleep(200);
- iSEM.SetBeamShiftY(beamYCur);
- Thread.Sleep(200);
- if (((beamY <= beamYMax) && (beamY >= 0)) ||
- ((beamY >= -beamYMax) && (beamY < 0)))
- {
- LogManager.AddHardwareLog("Y方向移动光束", true);
- float beamYShift = beamY * 100 / beamYMax;
- LogManager.AddHardwareLog("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
- //if(!iSEM.SetBeamOffsetY(beamY))
- if (!iSEM.SetBeamShiftY(beamYShift))
- {
- LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
- return false;
- }
- }
- else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
- {
- LogManager.AddHardwareLog("Y方向移动样品台", true);
- if (!iSEM.SetStageGotoY(ypNew))
- {
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
- //arg.State = true;
- //SendMsg("1-7");
- }
- return true;
- }
- //自动亮度对比度调节
- //自动亮度对比度
- public bool AutoBC(String step)
- {
- arg.Message = "自动亮度对比度";
- arg.State = true;
- SendMsg("1-10");
- iSEM.SetAutoBright(100);
- iSEM.SetAutoContrast(100);
- //LogManager.AddHardwareLog("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
- if (!iSEM.SetAutoVideoBrightnessAndContrast())
- {
- LogManager.AddHardwareLog("开始设置自动亮度、对比度失败,程序退出。", true);
- return false;
- }
- Thread.Sleep(5000);
- int i = 0;
- float bright = iSEM.GetBrightness();
- float contrast = iSEM.GetContrast();
- //最多调节30s,30s没调节好,认为调节失败
- for (i = 0; i < 5; i++)
- {
- bright = iSEM.GetBrightness();
- contrast = iSEM.GetContrast();
- if ((bright >= 40 && bright <= 60)
- && (contrast >= 35 && contrast <= 40))
- break;
- Thread.Sleep(5000);
- }
- bright = iSEM.GetBrightness();
- contrast = iSEM.GetContrast();
- if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
- && i == 5)
- {
- LogManager.AddHardwareLog("亮度对比度调节时间过长", true);
- return false;
- }
- iSEM.SetAutoBright(100);
- iSEM.SetAutoContrast(100);
- //LogManager.AddHardwareLog("SEM模式自动亮度目标50,自动对比度目标30.", true);
- return true;
- }
- //执行FIB自动对焦,FIBFocus
- //执行自动消像散
- public bool FIBFocus(String step_code)
- {
- if (m_measureFile.MParam.FocusMode == 1)//手动
- {
- if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- }
- else
- {
- return false;
- }
- }
- else if (m_measureFile.MParam.FocusMode == 2)//自有自动
- {
- //郝工增加自动对焦算法
- //处理文件夹
- if (Directory.Exists(FIBfocus_path))
- {
- Directory.Delete(FIBfocus_path, true);
- }
- Thread.Sleep(3000);
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(1000);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(1000);
- //再创建文件夹
- Directory.CreateDirectory(FIBfocus_path);
- //1、对焦参数类,2、输出对焦值
- int FIBFocus = 0;
- //根据当前的stigX重新计算像散值
- float currentFIBFocus = iSEM.GetFIBObjectivePotential();
- //m_measureFile.MParam.FIBFocus.Step = 10; //像散的步长为10
- m_measureFile.MParam.FIBFocus.UP = currentFIBFocus - m_measureFile.MParam.FIBFocus.Step;
- m_measureFile.MParam.FIBFocus.Down = currentFIBFocus + m_measureFile.MParam.FIBFocus.Step;
- LogManager.AddHardwareLog("修改FIB自动对焦参数", true);
- AutoFIBFocus(m_measureFile.MParam.FIBFocus, out FIBFocus, step_code);
- //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
- //设置工作距离
- iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
- //设置完工作距离后必须延迟5秒
- Thread.Sleep(5000);
- //处理图片位置
- //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
- }
- else if (m_measureFile.MParam.FocusMode == 3) //客户自动
- {
- //后期和客户对接接口
- List<string> filenames = new List<string>();
- String retfilename = wr.Img_Auto_Focus(filenames);
- }
- else //蔡司自动对焦
- {
- iSEM.CmdAutoFocusCoarse();
- while (true)
- {
- Thread.Sleep(10000);
- if (0 == iSEM.GetAutoFunction())
- {
- break;
- }
- }
- iSEM.CmdAutoFocusFine();
- while (true)
- {
- Thread.Sleep(10000);
- if (0 == iSEM.GetAutoFunction())
- {
- break;
- }
- }
- }
- return true;
- }
- /// 图像拉直算法
- /// </summary>
- /// <param name="Slope">倾斜角度</param>
- /// <param name="x0">圆心坐标x</param>
- /// <param name="y0">圆心坐标y</param>
- /// <param name="x1">倾斜情况下帧图的坐标x</param>
- /// <param name="y1">倾斜情况下帧图的坐标y</param>
- /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
- /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
- /// <returns></returns>
- public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
- {
- try
- {
- float xr = x1 - x0;//倾斜图到中心的距离差x
- float yr = y1 - y0;//倾斜图到中心的距离差y
- float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
- //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
- float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
- float k_S = k - Slope;//通过夹角差求x2,y2
- //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
- //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
- float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
- float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
- if (Slope > 0 || Slope < 0)
- {
- Hx = x0 + x2;
- Hy = y0 + y2;
- }
- else
- {
- Hx = 0;
- Hy = 0;
- }
- return true;
- }
- catch (Exception)
- {
- return false;
- }
- }
- // 放大倍数差校正
- public bool MagComp(float oldMag, float newMag)
- {
- //开启电压校正时进行电压校正
- if (m_measureFile.MParam.MagComp)
- {
- int oldLevel = -1, newLevel = -1;
- float deltX = 0, deltY = 0;
- if (oldMag < m_measureFile.MParam.MagRange1)
- {
- oldLevel = 1;
- }
- else if ((oldMag <= m_measureFile.MParam.MagRange2)
- && (oldMag > m_measureFile.MParam.MagRange1))
- {
- oldLevel = 2;
- }
- else if ((oldMag <= m_measureFile.MParam.MagRange3)
- && (oldMag > m_measureFile.MParam.MagRange2))
- {
- oldLevel = 3;
- }
- else if ((oldMag <= m_measureFile.MParam.MagRange4)
- && (oldMag > m_measureFile.MParam.MagRange3))
- {
- oldLevel = 4;
- }
- if (newMag < m_measureFile.MParam.MagRange1)
- {
- newLevel = 1;
- }
- else if ((newMag <= m_measureFile.MParam.MagRange2)
- && (newMag > m_measureFile.MParam.MagRange1))
- {
- newLevel = 2;
- }
- else if ((newMag <= m_measureFile.MParam.MagRange3)
- && (newMag > m_measureFile.MParam.MagRange2))
- {
- newLevel = 3;
- }
- else if ((newMag <= m_measureFile.MParam.MagRange4)
- && (newMag > m_measureFile.MParam.MagRange3))
- {
- newLevel = 4;
- }
- if (oldLevel != newLevel)
- {
- if (oldLevel == 1)
- {
- switch (newLevel)
- {
- case 1:
- break;
- case 2:
- deltX = m_measureFile.MParam.MagCompX1;
- deltY = m_measureFile.MParam.MagCompY1;
- break;
- case 3:
- deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2;
- deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2;
- break;
- case 4:
- deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
- deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
- break;
- }
- }
- else if (oldLevel == 2)
- {
- switch (newLevel)
- {
- case 1:
- deltX = -m_measureFile.MParam.MagCompX1;
- deltY = -m_measureFile.MParam.MagCompY1;
- break;
- case 2:
- break;
- case 3:
- deltX = m_measureFile.MParam.MagCompX2;
- deltY = m_measureFile.MParam.MagCompY2;
- break;
- case 4:
- deltX = m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
- deltY = m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
- break;
- }
- }
- else if (oldLevel == 3)
- {
- switch (newLevel)
- {
- case 1:
- deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2;
- deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2;
- break;
- case 2:
- deltX = -m_measureFile.MParam.MagCompX2;
- deltY = -m_measureFile.MParam.MagCompY2;
- break;
- case 3:
- break;
- case 4:
- deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
- deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompX3;
- break;
- }
- }
- else if (oldLevel == 4)
- {
- switch (newLevel)
- {
- case 1:
- deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
- deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
- break;
- case 2:
- deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
- deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
- break;
- case 3:
- deltX = -m_measureFile.MParam.MagCompX3;
- deltY = -m_measureFile.MParam.MagCompY3;
- break;
- case 4:
- break;
- }
- }
- //通过移动光束校正便宜量
- //单位是m/pix
- float pixSize = iSEM.GetPixelSize();
- LogManager.AddHardwareLog("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
- Thread.Sleep(500);
- float xpCur = iSEM.GetStageAtX();
- float ypCur = iSEM.GetStageAtY();
- LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
- float xpNew = xpCur - deltX;
- float ypNew = ypCur + deltY;
- LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
- //计算最大偏移量
- float beamXCur = iSEM.GetBeamShiftX();//单位是%
- iSEM.SetBeamShiftX(100);
- float beamXMax = iSEM.GetBeamOffsetX();//单位是m
- iSEM.SetBeamShiftX(beamXCur);
- //计算光束偏移值:
- float beamX = iSEM.GetBeamOffsetX();
- LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
- beamX = (-deltX + beamX);
- LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
- if (beamX < beamXMax || beamX < -beamXMax)
- {
- LogManager.AddHardwareLog("X方向移动光束", true);
- float beamXShift = beamX * 100 / beamXMax;
- if (!iSEM.SetBeamShiftX(beamXShift))
- {
- LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
- return false;
- }
- }
- else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
- {
- LogManager.AddHardwareLog("X方向移动样品台", true);
- if (!iSEM.SetStageGotoX(xpNew))
- {
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- }
- float beamY = iSEM.GetBeamOffsetY();
- LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
- beamY = (-deltY + beamY);
- LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
- //计算最大偏移量
- float beamYCur = iSEM.GetBeamShiftY();//单位是%
- iSEM.SetBeamShiftY(100);
- float beamYMax = iSEM.GetBeamOffsetY();//单位是m
- iSEM.SetBeamShiftY(beamYCur);
- if (beamY < beamYMax || beamY < -beamYMax)
- {
- LogManager.AddHardwareLog("Y方向移动光束", true);
- float beamYShift = beamY * 100 / beamYMax;
- if (!iSEM.SetBeamShiftY(beamY))
- {
- LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
- return false;
- }
- }
- else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
- {
- LogManager.AddHardwareLog("Y方向移动样品台", true);
- if (!iSEM.SetStageGotoY(ypNew))
- {
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
- //arg.State = true;
- //SendMsg("1-7");
- }
- }
- }
- return true;
- }
- #endregion
- #region 测试程序
- //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
- //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
- //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
- //{
- // SendMsg("拍摄照片完成");
- // //return true;
- //}
- //else
- //{
- // SendMsg("拍摄照片失败");
- // return false;
- //}
- //SendMsg("图像校正36度");
- ////3.设置SEM角度补偿cos36度
- //if (!TiltCorrection(36))
- //{
- // return false;
- //}
- //Thread.Sleep(3000);
- //string fn;
- //用宏抓一般图
- //Thread.Sleep(5000);
- //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
- //SendMsg("用宏抓一般图" + fn);
- //iSEM.CMDMCFFilename(fn);
- ////延时1s??
- //Thread.Sleep(5000);
- ////用宏抓好图
- //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
- //SendMsg("用宏抓好图" + fn);
- //iSEM.CMDMCFFilename(fn);
- ////延时1s??
- //Thread.Sleep(30000);
- //Thread.Sleep(10000);
- //WorkingFolder = m_measureFile.FilePath;
- //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
- //SendMsg("SEM拍照存储到" + fileName6);
- //if (!GetImage(ImageMode.SEM, fileName6))
- //{
- // SendMsg("SEM拍照失败");
- // return false;
- //}
- ////用宏抓标志图
- //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
- //SendMsg("用宏抓标志图" + fn);
- //iSEM.CMDMCFFilename(fn);
- ////延时1s??
- //Thread.Sleep(30000);
- //Thread.Sleep(5000);
- //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
- //SendMsg("用宏抓一般图" + fn);
- //iSEM.CMDMCFFilename(fn);
- ////延时1s??
- //Thread.Sleep(5000);
- //SendMsg("所有图结束");
- ////17.自动控制SEM拍截面照
- //{
- // //1.控制SEM放大到指定参数大小范围,6000x
- // if (!iSEM.SetMagnification(6000))
- // {
- // return false;
- // }
- // //2.控制SEM自动对焦、消像散、亮度、对比度
- // if (!MeasParam.FocusMode)
- // {
- // //弹出手动对焦的窗口
- // }
- // else
- // {
- // //调用自动对焦模块
- // }
- // //3.设置SEM角度补偿cos36度
- // if (!TiltCorrection(36))
- // {
- // return false;
- // }
- // //4.控制SEM拍照
- // //5.保存照片4
- // String fileName5 = WorkingFolder + ImageName5;
- // if (!GetImage(ImageMode.SEM, fileName5))
- // {
- // return false;
- // }
- // //6.将照片传给客户,获取偏移坐标
- // float x6 = 0, y6 = 0;
- // float angle1 = 0;
- // float mage = 10000;
- // //7.根据坐标控制SEM移动到分析位置
- // if (!iSEM.MoveStageXY(x6, y6))
- // {
- // return false;
- // }
- // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
- // float x7 = iSEM.GetStageAtX();
- // float y7 = iSEM.GetStageAtY();
- // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
- // {
- // return false;
- // }
- // //9.控制SEM平行校正,并记录校正前初始值
- // float foldAnagle = iSEM.GetScanRotation();
- // if (foldAnagle == float.NaN)
- // {
- // return false;
- // }
- // if (!iSEM.SetScanRotation(angle1))
- // {
- // return false;
- // }
- // //10.控制SEM放大到指定参数大小范围
- // if (!iSEM.SetMagnification(mage))
- // {
- // return false;
- // }
- // //11.控制SEM自动对焦、消像散、亮度、对比度
- // if (!MeasParam.FocusMode)
- // {
- // //弹出手动对焦的窗口
- // }
- // else
- // {
- // //调用自动对焦模块
- // }
- // //12.控制SEM对分析位置拍照
- // String fileName6 = WorkingFolder + ImageName6;
- // if (!GetImage(ImageMode.SEM, fileName6))
- // {
- // return false;
- // }
- // //13.保存照片
- // //14.控制SEM取消电子束校正,回到初始值
- // if (!iSEM.SetScanRotation(foldAnagle))
- // {
- // return false;
- // }
- //}
- ////18.自动层高分析
- //{
- // //1.获取SEM Pixel Size给客户传入参数
- // if (iSEM.GetPixelSize() == float.NaN)
- // {
- // return false;
- // }
- // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
- //}
- ////19.自动能谱分析
- //{
- // //1. 确定能谱位置
- // //2. 控制牛津打能谱
- // //3. 能谱分析——面扫+线扫描
- //}
- #endregion
- #region 能谱所有参数
- //全局只有一个Extender
- static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
- IExtenderControl iExtender = factoryExtender.IExtender;
- MeasureDB m_MeasDB = null;
- int m_nXrayId = 0;
- const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
- const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
- const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
- const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
- /// <summary>
- /// 做能谱分析
- /// </summary>
- /// <param name="a_PointNum">分析点ID,索引号</param>
- /// <param name="PointsName">分析点名称</param>
- /// <param name="num">分析点的位置ID</param>
- /// <returns>成功或失败</returns>
- public bool DoEDS(int a_PointNum, string PointsName, int num)
- {
- try
- {
- //XrayID记录
- LogManager.AddHardwareLog("程序进入EDS测量!", true);
- EDSParam param = m_measureFile.MParam.EDSP;
- double dDwellTime = param.DwellTime;
- int nImageType = param.ImageType;
- double dScanSizes = param.ScanSize;
- LogManager.AddHardwareLog("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
- iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
- string path = EDS_path;
- string edsfn = path + "\\" + num.ToString() + "_" + ImageNameEDS;
- LogManager.AddHardwareLog("EDS_PATH=" + edsfn, true);
- iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);
- //送给客户,计算感兴趣的区域
- List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
- List<System.Drawing.Point> listlines = new List<System.Drawing.Point>();
- List<List<Segment>> listFeature = new List<List<Segment>>();
- List<int> lines_height = new List<int>();
- System.Drawing.Point area_pt = new System.Drawing.Point();
- int width = 1;
- int height = 1;
- //点数据
- int state = 0;
- wr.EDS_Param_Points(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listPoints, out state);
- if (state == 0)
- {
- LogManager.AddHardwareLog("点采集失败", true);
- return false;
- }
- //线数据
- LogManager.AddHardwareLog("线扫描", true);
- state = 0;
- wr.EDS_Param_Lines(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listlines, out lines_height, out state);
- LogManager.AddHardwareLog("线返回数据" + listlines[0].X.ToString() + "," + listlines[0].Y.ToString() + ",lines_height=" + lines_height.Count.ToString(), true);
- if (state == 1)
- {
- //将线转换为segment数据
- LogManager.AddHardwareLog("将线转换为segment数据", true);
- List<Segment> segments = new List<Segment>();
- for (int i = 0; i < listlines.Count; i++)
- {
- for (int j = 0; j <= lines_height[i]; j++)
- {
- Segment segment = new Segment();
- segment.X = listlines[0].X;
- segment.Y = listlines[0].Y + j;
- segment.Length = 1;
- segments.Add(segment);
- }
- listFeature.Add(segments);
- }
- LogManager.AddHardwareLog("将线转换为segment数据完成", true);
- }
- else
- {
- LogManager.AddHardwareLog("线采集失败", true);
- return false;
- }
- //面数据
- state = 0;
- wr.EDS_Param_Areas(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out area_pt, out width, out height, out state);
- LogManager.AddHardwareLog("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
- if (state == 1)
- {
- //将面转换为segment数据
- LogManager.AddHardwareLog("将面转换为segment数据", true);
- List<Segment> segments = new List<Segment>();
- for (int j = 0; j <= height; j++)
- {
- Segment segment = new Segment();
- segment.X = area_pt.X;
- segment.Y = area_pt.Y + j;
- segment.Length = width;
- segments.Add(segment);
- }
- listFeature.Add(segments);
- LogManager.AddHardwareLog("将面转换为segment数据完成", true);
- }
- else
- {
- LogManager.AddHardwareLog("面采集失败", true);
- return false;
- }
- //存储数据
- //向分析点数据库更新
- LogManager.AddHardwareLog("listPoints=" + listPoints.Count.ToString() + ",listFeature=" + listFeature.Count.ToString(), true);
- if (!m_MeasDB.InsetAPoint(a_PointNum, PointsName, EDS_path, listPoints.Count, listFeature.Count, num))
- {
- LogManager.AddHardwareLog("插入分析点失败", true);
- }
- LogManager.AddHardwareLog("插入分析点成功", true);
- int AreasNo = 0;
- long[] XrayData = new long[2000];
- Dictionary<string, double> listElement = new Dictionary<string, double>();
- //点采集
- foreach (System.Drawing.Point pt in listPoints)
- {
- XrayData = new long[2000];
- listElement = new Dictionary<string, double>();
- //LogManager.AddHardwareLog("点采集开始", true);
- iExtender.XrayPointCollectiong(param.PointTime, pt.X, pt.Y, out XrayData, out listElement);
- //写入数据库
- m_nXrayId++;
- Boolean ret = m_MeasDB.InsertAPointXay(a_PointNum, m_nXrayId, pt.X, pt.Y, XrayData, listElement, num);
- LogManager.AddHardwareLog("点采集结束,写入数据库开始--" + m_nXrayId.ToString() + "," + ret.ToString(), true);
- //LogManager.AddHardwareLog("点采集写入数据库结束", true);
- if (m_nXrayId % 5 == 0)
- {
- Thread.Sleep(5000);
- }
- else
- {
- Thread.Sleep(1000);
- }
- }
- //面采集
- foreach (List<Segment> listSeg in listFeature)
- {
- XrayData = new long[2000];
- listElement = new Dictionary<string, double>();
- LogManager.AddHardwareLog("面采集开始", true);
- LogManager.AddHardwareLog("AreaTime=" + param.AreaTime.ToString(), true);
- iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement);
- LogManager.AddHardwareLog("面采集结束,写入数据库开始", true);
- //写入数据库
- m_nXrayId++;
- AreasNo++;
- m_MeasDB.InsertAAreaXay(a_PointNum, m_nXrayId, AreasNo, listSeg, XrayData, listElement, num);
- LogManager.AddHardwareLog("面采集写入数据库结束", true);
- }
- }
- catch (Exception e)
- {
- LogManager.AddHardwareLog(e.Message, false);
- }
- return true;
- }
- /// <summary>
- /// 初始化数据库
- /// </summary>
- public void Init_MeasDB()
- {
- m_MeasDB = new MeasureDB(m_measureFile);
- }
- /// <summary>
- /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
- /// </summary>
- /// <returns></returns>
- public bool EDS_FindCross()
- {
- float x2 = 0, y2 = 0;
- int state = 0;
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
- float m_TempBrightness = 50.0f;
- float m_TempContrast = 30.0f;
- if (m_measureFile.MParam.SampleName == "3")
- {
- m_TempBrightness = 48.0f;
- m_TempContrast = 29.0f;
- }
- //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
- iSEM.SetAutoVideoOff();
- Thread.Sleep(200);
- iSEM.SetBrightness(m_TempBrightness);//50.0f
- Thread.Sleep(200);
- iSEM.SetContrast(m_TempContrast);//30.0f
- Thread.Sleep(200);
-
- //1.控制SEM放大到300倍
- float mag = m_measureFile.MParam.Photograph_Magnification / 3;
- if (mag < 200)
- {
- mag = 200;
- }
- if (!iSEM.SetMagnification(mag))
- {
- arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
- arg.State = false;
- SendMsg("1-24");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- Thread.Sleep(200);
- float current = iSEM.GetMagnification();
- Thread.Sleep(200);
- while (Math.Abs(current - mag) > 2)
- {
- iSEM.SetMagnification(mag);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- Thread.Sleep(200);
- }
- Thread.Sleep(2000);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //3.控制SEM拍照
- String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
- arg.Picture_Information.Picture_FullPath = fileName4;
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(200);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(200);
- arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
- Thread.Sleep(200);
- //拍照前改变速度,延时
- //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
- //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- if (!GetImage(fileName4))
- {
- //arg.State = false;
- //arg.Message = "SEM拍照找切割位置失败";
- //SendMsg("1-25");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- //arg.Picture_Information.Picture_FullPath = fileName4;
- //arg.State = true;
- //arg.Message = "SEM拍照成功";
- //SendMsg("1-25");
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- //4.将照片传给客户,获取偏移坐标,以及偏移角度
- //5.根据坐标控制SEM移动到切孔位置,居中
- LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
- LogManager.AddHardwareLog("文件名=" + fileName4, true);
- wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
- LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
- LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
- if (state == 1)
- {
- //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
- if (!MoveToPixByMoveStage(x2, y2))
- {
- //arg.State = false;
- //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
- //SendMsg("1-26");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //arg.State = true;
- //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
- //SendMsg("1-26");
- //高倍到低倍不进行对焦
- //拍照前改变速度,延时
- //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
- //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- if (hand_intervene == 1)
- {
- MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
- }
- }
- else
- {
- arg.Message = "图像接口参数state返回值为零";
- arg.State = false;
- SendMsg("1-26");
- if (hand_intervene == 1)
- {
- if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
- {
- return false;
- }
- }
- else
- {
- return false;
- }
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- return true;
- }
- /// <summary>
- /// 171.能谱第17步找点采集数据
- /// </summary>
- /// <returns></returns>
- public bool EDS_ShotSection()
- {
- int state = 0;
- #region 设置拍照的放大倍数
- LogManager.AddHardwareLog("测量线程:设置拍照放大倍数" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
- if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
- {
- //arg.Message = "放大倍数调整失败";
- //arg.State = false;
- //SendMsg("1-27");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- float set = m_measureFile.MParam.Photograph_Magnification;
- float current = iSEM.GetMagnification();
- while (Math.Abs(current - set) > 1)
- {
- iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- //arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString() + "成功";
- //arg.State = true;
- //SendMsg("1-27");
- Thread.Sleep(3000 + (Int32)cycle_time);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- #endregion
- #region 拍摄矩形的切割孔,使用拍照的放大倍数
- //2.控制SEM自动对焦、亮度、对比度-接口
- iSEM.SetReduced(402, 128, 340, 256);
- Thread.Sleep(200);
- //add by sun 2020-12-15
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//iSEM.CmdFocusRate(5);//
- //add by sun 2020-12-15 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- if (!iSEM.SetAutoVideoOff())
- {
- LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
- return false;
- }
- Thread.Sleep(5000);
- if (ImageFocus1(false))
- {
- //arg.Message = "自动对焦完成";
- //arg.State = true;
- //SendMsg("1-28");
- }
- else
- {
- //arg.Message = "自动对焦失败";
- //arg.State = false;
- //SendMsg("1-28");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- iSEM.CloseReduced();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(200 + Convert.ToInt32(cycle_time));
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- if (!iSEM.SetAutoVideoBrightnessAndContrast())
- {
- LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
- return false;
- }
- Thread.Sleep(5000);
- //3、设置SEM补偿角度
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString() + "度", true);
- if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
- {
- //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
- //arg.State = false;
- //SendMsg("1-29");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- //arg.State = true;
- //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
- //SendMsg("1-29");
- Thread.Sleep(200);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", false);
- return false;
- }
- }
- //4、拍照,5、保存照片
- String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS5;
- arg.Picture_Information.Picture_FullPath = fileName5;
- arg.Picture_Information.Work_Status = "SEM";
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(200);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(200);
- arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
- Thread.Sleep(200);
- //拍照前改变速度,延时
- //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
- //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
- if (!GetImage(fileName5))
- {
- //arg.Message = "SEM拍照失败";
- //arg.State = false;
- //SendMsg("1-30");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- //arg.State = true;
- //arg.Message = "SEM拍照成功";
- //SendMsg("1-30");
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- #endregion
- if (m_measureFile.MParam.Is_Photograph == false)
- {
- #region 对当前矩形进行旋转校正
- //8,计算切割面区域偏移角度及方向
- float degree = 0;
- int direction = 0;
- wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
- LogManager.AddHardwareLog("测量线程:拍照角度移动,输入图像" + ImageNameEDS5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
- LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
- //接口返回像素,*pixelsize,得到坐标点。判断移动方式
- if (state == 1)
- {
- //梯形角度
- iSEM.SetScanRotationOn();
- Thread.Sleep(200);
- //20201128陈工要求,谭博返回角度*0.7
- iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
- Thread.Sleep(200);
- //arg.State = true;
- //arg.Message = "图像接口返回角度为:" + degree.ToString();
- //SendMsg("1-31");
- if (hand_intervene == 1)
- {
- MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
- }
- }
- else
- {
- //arg.Message = "图像接口参数State返回值为零";
- //arg.State = false;
- //SendMsg("1-31");
- if (hand_intervene == 1)
- {
- if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
- {
- return false;
- }
- }
- else
- {
- //return false;
- }
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- Thread.Sleep(200);
- //12拍照
- String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS6;
- arg.Picture_Information.Picture_FullPath = fileName6;
- arg.Picture_Information.Work_Status = "SEM";
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- Thread.Sleep(200);
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- Thread.Sleep(200);
- arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
- Thread.Sleep(200);
- //拍照前改变速度,延时
- //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
- //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- if (!GetImage(fileName6))
- {
- //arg.Message = "SEM拍照失败";
- //arg.State = false;
- //SendMsg("1-33");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- return false;
- }
- //arg.State = true;
- //arg.Message = "SEM拍照成功";
- //SendMsg("1-33");
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- #endregion
- #region 获取两个位置上及放大倍数
- //计算两个测量区域坐标
- List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
- List<float> mag = new List<float>();
- System.Drawing.Point ct0;
- float magMax = 0;
- //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
- wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
- LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
- ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
- "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
- "输入产品" + m_measureFile.MParam.Firm.ToString()
- + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
- + "输出放大倍数1" + mag[0]
- + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
- + "输出放大倍数2" + mag[0]
- + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
- #endregion
- if (state == 1 && ct.Count != 0 && mag.Count != 0)
- {
- //arg.State = true;
- //arg.Message = "获取位置及放大倍数成功";
- //SendMsg("1-34");
- #region 记录初始设置的BeamShift的百分比和样品台XY位置
- float xs = iSEM.GetBeamShiftX();
- Thread.Sleep(200);
- float ys = iSEM.GetBeamShiftY();
- Thread.Sleep(200);
- float xpCur = iSEM.GetStageAtX();
- Thread.Sleep(200);
- float ypCur = iSEM.GetStageAtY();
- Thread.Sleep(200);
- LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
- + "y=" + ys.ToString() + ","
- + "原来样品台的位置x= " + xpCur.ToString()
- + "y=" + ypCur.ToString(), true);
- #endregion
- #region 移动到梯形左上角
- //找到放大倍数最大值
- magMax = mag[0];
- for (int m = 1; m < mag.Count; m++)
- {
- if (mag[m] > magMax)
- {
- magMax = mag[m];
- }
- }
- //20201127将视野移动到梯形左上角位置
- MoveToPix(ct0.X, ct0.Y);
- LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
- + "," + ct0.Y.ToString() + ")", true);
- //关闭自动亮度对比度
- iSEM.SetAutoVideoOff();
- Thread.Sleep(2000);
- iSEM.SetReduced(402, 128, 340, 256);
- Thread.Sleep(200);
- //add by sun 2020-12-15
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
- //add by sun 2020-12-15 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- //放大到10000倍
- iSEM.SetMagnification(magMax / 2);
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- set = magMax / 2;
- current = iSEM.GetMagnification();
- while (Math.Abs(current - set) > 1)
- {
- iSEM.SetMagnification(set);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- //自动对焦
- if (!ImageFocus1(true))
- {
- return false;
- }
- //放大到10000倍
- iSEM.SetMagnification(magMax);
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- set = magMax;
- current = iSEM.GetMagnification();
- while (Math.Abs(current - set) > 1)
- {
- iSEM.SetMagnification(set);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- //自动对焦
- if (!ImageFocus1(true))
- {
- return false;
- }
- iSEM.CloseReduced();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- #endregion
- #region 恢复到拍照的状态
- iSEM.SetStageGotoX(xpCur);
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- iSEM.SetStageGotoY(ypCur);
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- iSEM.CloseReduced();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- //增亮图像
- iSEM.SetAutoVideoOff();
- Thread.Sleep(200);
- float currentBright = iSEM.GetBrightness();
- Thread.Sleep(200);
- float currentContrast = iSEM.GetContrast();
- Thread.Sleep(200);
- iSEM.SetBrightness(currentBright + 2);
- Thread.Sleep(200);
- iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
- Thread.Sleep(200);
- #endregion
- #region 循环拍照
- for (int n = 0; n < ct.Count; n++)
- {
- #region 恢复到拍照的状态
- iSEM.SetStageGotoX(xpCur);
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- iSEM.SetStageGotoY(ypCur);
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //恢复原来的放大倍数
- if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
- {
- LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
- return false;
- }
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- set = m_measureFile.MParam.Photograph_Magnification;
- current = iSEM.GetMagnification();
- while (Math.Abs(current - set) > 1)
- {
- iSEM.SetMagnification(set);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- //恢复BeamShift的百分比值
- iSEM.SetBeamShiftX(xs);
- Thread.Sleep(200);
- iSEM.SetBeamShiftY(ys);
- Thread.Sleep(200);
- #endregion
- #region 移动到指定点位置
- if (!MoveToPix(ct[n].X, ct[n].Y))
- {
- arg.State = false;
- arg.Message = "移动到第一个点位置失败";
- SendMsg("1-" + (35 + n).ToString());
- //移动到第一个点失败
- LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
- }
- LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
- + "," + ct[n].Y.ToString() + ")", true);
- #endregion
- #region 如果是第一个点,则1W倍对焦
- if (n == 0)
- {
-
- }
- #endregion
- #region 拍照
- if (!iSEM.SetMagnification(mag[n]))
- {
- arg.State = false;
- arg.Message = "移动到第一个点位置拍照失败";
- SendMsg("1-35");
- LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
- return false;
- }
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- set = mag[n];
- current = iSEM.GetMagnification();
- while (Math.Abs(current - set) > 1)
- {
- iSEM.SetMagnification(set);
- Thread.Sleep(200);
- current = iSEM.GetMagnification();
- }
- DoEDS(m_nWorkHoleNo + 1, cutHoles[m_nWorkHoleNo].HoleName, n + 1);
- #endregion
- }
- #endregion
- if (hand_intervene == 1)
- {
- MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
- }
- }
- else
- {
- if (hand_intervene == 1)
- {
- if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
- {
- // return false;
- }
- }
- else
- {
- //return false;
- }
- //arg.State = false;
- //arg.Message = "获取位置及放大倍数失败";
- //SendMsg("1-34");
- LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- return false;
- }
- return true;
- }
- /// <summary>
- /// 19.能谱分析
- /// </summary>
- /// <returns></returns>
- public bool EDSAnalysis()
- {
- //1.先降Z轴
- if (m_measureFile.MParam.EDSZ < Z_Min || m_measureFile.MParam.EDSZ > Z_Max)
- {
- LogManager.AddHardwareLog("Z轴位置设置超出范围.", true);
- }
- LogManager.AddHardwareLog("将Z轴位置指定到:" + m_measureFile.MParam.EDSZ.ToString(), true);
- //if (!iSEM.SetStageGotoZ(m_measureFile.MParam.EDSZ))
- //{
- // LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
- // return false;
- //}
- //设置WD add by sun 2020-12-16 能谱设置工作距离为10mm
- iSEM.SetWorkingDistance(m_measureFile.MParam.EDSZ);
- Thread.Sleep(1000);
- while (true)
- {
- Thread.Sleep(4000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //判断是否停止进程
- if (key_stop)
- {
- LogManager.AddHardwareLog("停止键按下", true);
- return false;
- }
- //2.角度改为54度
- iSEM.SetScanRotationOff();
- Thread.Sleep(200);
- //3.设置电压和电流
- iSEM.SetSEMVoltage(m_measureFile.MParam.EDSV);
- Thread.Sleep(2000);
- iSEM.SetSEMIPROBE(m_measureFile.MParam.EDSA);
- Thread.Sleep(500);
- //4.自动亮度对比度
- iSEM.SetAutoBright(100);
- Thread.Sleep(200);
- iSEM.SetAutoContrast(100);
- Thread.Sleep(200);
- if (!iSEM.SetAutoVideoBrightnessAndContrast())
- {
- LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
- return false;
- }
- Thread.Sleep(5000);
- //5.自动对焦
- iSEM.SetReduced(256, 192, 512, 512);
- Thread.Sleep(200);
- //add by sun 2020-12-15
- iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
- //add by sun 2020-12-15 end
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- if (!ImageFocus1(false))
- {
- return false;
- }
- iSEM.CloseReduced();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- //6.调用161步过程
- if (!EDS_FindCross())
- {
- return false;
- }
- //7.调用171步过程
- if (!EDS_ShotSection())
- {
- return false;
- }
- return true;
- }
- /// <summary>
- /// 20.光束等复位
- /// </summary>
- public void BeamShiftReset()
- {
- iSEM.SetTiltAngleOff();
- Thread.Sleep(200);
- iSEM.SetScanRotationOff();
- Thread.Sleep(200);
- iSEM.SetBeamShiftX(0);
- Thread.Sleep(200);
- iSEM.SetBeamShiftY(0);
- Thread.Sleep(200);
- }
- //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
- #region 设置电压电流
- public bool SetVoltageAndIPROBE()
- {
- LogManager.AddHardwareLog("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
- //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
- bool mRet_VoltageFlag = false;
- bool mRet_ElecFlag = false;
- if (m_measureFile.MParam.SampleName != "3")
- {
- mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
- Thread.Sleep(500);
- mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
- Thread.Sleep(500);
- }
- else
- {
- mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
- Thread.Sleep(500);
- mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
- Thread.Sleep(500);
- }
- if (!mRet_VoltageFlag) return false;
- if (!mRet_ElecFlag) return false;
- LogManager.AddHardwareLog("测量线程:设置电压电流完成!" , true);
- return true;
- }
- #endregion
- //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
- //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
- #region 拍照
- public bool GetImageFromSEM(float m_Mag) {
-
- if (!iSEM.SetMagnification(m_Mag))
- {
- LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + m_Mag.ToString() + "失败", false);
- return false;
- }
- LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成(一半倍数)!", true);
- Thread.Sleep(100 + Convert.ToInt32(cycle_time));
- String m_FileName = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_Mag.ToString() + "_0_" + ImageNameTwo_1;
- //arg.Picture_Information.Picture_FullPath = m_FileName;
- //arg.Picture_Information.Work_Status = "SEM";
- //arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- //Thread.Sleep(200);
- //arg.Picture_Information.Magnification = iSEM.GetMagnification();
- //Thread.Sleep(200);
- //arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
- //Thread.Sleep(200);
- //拍照前改变速度,延时
- iSEM.CmdLineScan();
- Thread.Sleep(200);
- cycle_time = iSEM.GetCycleTime();
- Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
- if (!GetImage(m_FileName))
- {
- LogManager.AddHardwareLog("测量线程报错:========" + arg.Message, false);
- return false;
- }
- LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
- return true;
- }
- #endregion
- //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
- #endregion
- }
- }
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