Measure.cs 266 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. #region 变量定义
  321. //Web接口类
  322. public WebResult wr = null;
  323. //SmartSEM远程路径
  324. public String RemoteELYPath = "";
  325. public String RemoteMLFPath = "";
  326. //扫描周期
  327. private float cycle_time = 0;
  328. //人工干预
  329. public int hand_intervene = 2;
  330. //样品台保护值
  331. public float X_Min = 0;
  332. public float X_Max = 0.13f;
  333. public float Y_Min = 0;
  334. public float Y_Max = 0.13f;
  335. public float Z_Min = 0;
  336. public float Z_Max = 0.05f;
  337. public float T_Min = -4;
  338. public float T_Max = 70;
  339. public float R_Min = -380;
  340. public float R_Max = 380;
  341. public float M_Min = 0;
  342. public float M_Max = 0.012f;
  343. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  344. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  345. //定义一个全局的消息类
  346. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  347. //全局只有一个fatorySEM
  348. static FactoryHardware factorySEM = FactoryHardware.Instance;
  349. ISEMControl iSEM = factorySEM.ISEM;
  350. //@的作用是不用转义字符\\只打一个就行
  351. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  352. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  354. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  355. const String ImageName31 = @"FIBBefore.tif";
  356. const String ImageName32 = @"FIBAfter.tif";
  357. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  358. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  359. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  360. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  361. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  362. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  364. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  365. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  366. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  367. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  368. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  369. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  370. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  371. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  372. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  373. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  374. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  375. const String ElyDeposition = @"Deposition.ely"; //沉积
  376. const String ElyCrossSection = @"CrossSection.ely"; //切割
  377. const float fMin = (float)0.0000002; //单位是米
  378. const float fSateyZ = (float)0.03;//单位是米
  379. public Boolean key_stop = false;
  380. String focus_path = "";
  381. String FIBfocus_path = "";
  382. String StigX_path = "";
  383. String StigY_path = "";
  384. String EDS_path = "";
  385. String data_path = "";
  386. int m_nWorkHoleNo = -1;
  387. //测量文件
  388. private MeasureFile m_measureFile;
  389. public MeasureFile MeasureFile
  390. {
  391. get { return this.m_measureFile; }
  392. set { this.m_measureFile = value; }
  393. }
  394. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  395. private List<MeasureData.CutHole> m_cutHoles;
  396. public List<MeasureData.CutHole> cutHoles
  397. {
  398. get { return this.m_cutHoles; }
  399. set { this.m_cutHoles = value; }
  400. }
  401. //工作文件夹
  402. private string m_WorkingFolder;
  403. public string WorkingFolder
  404. {
  405. get { return this.m_WorkingFolder; }
  406. set { this.m_WorkingFolder = value; }
  407. }
  408. //程序当前路径
  409. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  410. //线程状态
  411. private ThreadStatus m_ThreadStatus;
  412. public ThreadStatus TStatus
  413. {
  414. get { return this.m_ThreadStatus; }
  415. set { this.m_ThreadStatus = value; }
  416. }
  417. #endregion
  418. //构造函数
  419. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  420. {
  421. LogManager.AddHardwareLog("进入构造函数", true);
  422. TStatus = new ThreadStatus();
  423. cutHoles = new List<MeasureData.CutHole>();
  424. //配置远程连接
  425. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  426. }
  427. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  428. public bool InitMeas(MeasureFile a_measureFile)
  429. {
  430. LogManager.AddHardwareLog("进入初始化函数", true);
  431. m_measureFile = a_measureFile;
  432. List<CutHole> listHoles = m_measureFile.ListCutHole;
  433. foreach (CutHole h in listHoles)
  434. {
  435. if (h.SWITCH == true)
  436. {
  437. m_cutHoles.Add(h);
  438. }
  439. }
  440. if (m_cutHoles.Count == 0)
  441. return false;
  442. if (m_measureFile.MParam.EDS == true)
  443. {
  444. LogManager.AddHardwareLog("能谱分析", true);
  445. Init_MeasDB();
  446. }
  447. return true;
  448. }
  449. //给前台UI发送消息步骤
  450. public void SendMsg(string step_code)
  451. {
  452. arg.Step_Code = step_code;
  453. arg.Time = DateTime.Now;
  454. SendThreadStatus(this, arg);
  455. }
  456. //给前台UI发送孔状态信息
  457. public void SendCutHoleMsg(string a_state, string a_holeName)
  458. {
  459. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  460. arg.HoleName = a_holeName;
  461. arg.State = a_state;
  462. SendCutHolesStatus(this, arg);
  463. }
  464. //测量流程
  465. public void DoMeasure()
  466. {
  467. //创建线程的测量状态的更新
  468. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  469. LogManager.AddHardwareLog("测量线程:开始测量",true);
  470. //检查硬件连接是否正常
  471. LogManager.AddHardwareLog("测量线程:连接硬件", true);
  472. if (!ConnectHardware())
  473. {
  474. MessageBox.Show("连接电镜失败!","重要错误",MessageBoxButtons.OK,MessageBoxIcon.Error);
  475. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  476. LogManager.AddHardwareLog("测量线程报错:连接硬件硬件连接失败", false);
  477. return;
  478. }
  479. //设置工作文件夹
  480. LogManager.AddHardwareLog("测量线程:设置工作文件夹", true);
  481. if (!SetWorkingFolderStr())
  482. {
  483. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  484. LogManager.AddHardwareLog("测量线程报错:设置文件夹失败", false);
  485. return;
  486. }
  487. //设置SmartSEM远程路径
  488. iSEM.SetRemoteELYPath(RemoteELYPath);
  489. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  490. //增加EDS控制
  491. //将停止键复位
  492. key_stop = false;
  493. //开始测量就将模式设置为SEM
  494. LogManager.AddHardwareLog("测量线程:切换到SEM模式", true);
  495. if (!iSEM.CmdFIBModeSEM())
  496. {
  497. LogManager.AddHardwareLog("测量线程报错:开始切换到SEM模式失败。", false);
  498. return;
  499. }
  500. arg.Picture_Information.Work_Status = "SEM";
  501. //设置扫描周期
  502. LogManager.AddHardwareLog("测量线程:设置图像扫描周期为对焦周期", true);
  503. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  504. Thread.Sleep(200);
  505. cycle_time = iSEM.GetCycleTime();
  506. if (cycle_time == 0)
  507. {
  508. LogManager.AddHardwareLog("测量线程报错:获取扫描周期时间失败", false);
  509. return;
  510. }
  511. Thread.Sleep((int)cycle_time +100);
  512. //开始做各个孔的检测
  513. for (int i = 0; i < m_cutHoles.Count; i++)
  514. {
  515. //自动亮度对比度
  516. LogManager.AddHardwareLog("测量线程:开启自动亮度,对比度调节", true);
  517. iSEM.SetAutoBright(100);
  518. Thread.Sleep(200);
  519. iSEM.SetAutoContrast(100);
  520. Thread.Sleep(200);
  521. //LogManager.AddHardwareLog("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  522. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  523. {
  524. LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  525. return;
  526. }
  527. Thread.Sleep(5000);
  528. LogManager.AddHardwareLog("测量线程:测试第"+i.ToString()+"个分析点。", true);
  529. //记录测量序号和孔名
  530. m_nWorkHoleNo = i;
  531. arg.HoleName = m_cutHoles[i].HoleName;
  532. //最终数据存放目录
  533. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  534. //对焦数据存放目录
  535. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  536. m_measureFile.MParam.AutoFocus.Path = focus_path;
  537. if (!Directory.Exists(focus_path))
  538. {
  539. Directory.CreateDirectory(focus_path);
  540. }
  541. //StigX数据存放目录
  542. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  543. m_measureFile.MParam.AutoStigX.Path = StigX_path;
  544. if (!Directory.Exists(StigX_path))
  545. {
  546. Directory.CreateDirectory(StigX_path);
  547. }
  548. //StigY数据存放目录
  549. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  550. m_measureFile.MParam.AutoStigY.Path = StigY_path;
  551. if (!Directory.Exists(StigY_path))
  552. {
  553. Directory.CreateDirectory(StigY_path);
  554. }
  555. //EDS数据存放路径
  556. if (m_measureFile.MParam.EDS == true)
  557. {
  558. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  559. m_measureFile.MParam.EDSP.Path = EDS_path;
  560. if (!Directory.Exists(EDS_path))
  561. {
  562. Directory.CreateDirectory(EDS_path);
  563. }
  564. }
  565. //判断孔状态
  566. if (m_cutHoles[i].STATE != State.Ready)
  567. {
  568. LogManager.AddHardwareLog("测试孔"+ m_cutHoles[i].HoleName+"状态非就绪,不予测量。", true);
  569. continue;
  570. }
  571. //20201127增加Scanrotate Off
  572. iSEM.SetScanRotationOff();
  573. Thread.Sleep(200);
  574. //20.光束等复位
  575. iSEM.SetBeamShiftX(0);
  576. Thread.Sleep(200);
  577. iSEM.SetBeamShiftY(0);
  578. Thread.Sleep(200);
  579. //开始循环工作
  580. if (i == 0)
  581. {
  582. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName+"开始测量。", true);
  583. m_cutHoles[i].START = DateTime.Now;
  584. //切孔操作-开始
  585. m_cutHoles[i].STATE = State.InProcess;
  586. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  587. LogManager.AddHardwareLog("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  588. + m_cutHoles[0].Position.X.ToString()+","
  589. + m_cutHoles[0].Position.Y.ToString()+","
  590. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  591. #region 坐标恢复
  592. //0、先移动Z轴到比较低的位置上。
  593. if (m_measureFile.MParam.Title)//如果是倾斜样品台,移动Z轴
  594. {
  595. if (!iSEM.SetStageGotoZ(fSateyZ))
  596. {
  597. arg.State = false;
  598. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  599. SendMsg("1-0");
  600. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  601. m_cutHoles[i].STATE = State.Failed;
  602. m_cutHoles[i].END = DateTime.Now;
  603. m_measureFile.Save();
  604. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  605. Thread.Sleep(3000);
  606. continue;
  607. }
  608. while (true)
  609. {
  610. Thread.Sleep(4000);
  611. if (iSEM.GetStageIs() == 0)
  612. {
  613. break;
  614. }
  615. }
  616. //判断是否停止进程
  617. if (key_stop)
  618. {
  619. m_cutHoles[i].STATE = State.Failed;
  620. m_cutHoles[i].END = DateTime.Now;
  621. m_measureFile.Save();
  622. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  623. LogManager.AddHardwareLog("停止键被按下", true);
  624. return;
  625. }
  626. }
  627. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  628. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  629. {
  630. arg.State = false;
  631. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  632. SendMsg("1-0");
  633. LogManager.AddHardwareLog("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  634. m_cutHoles[i].STATE = State.Failed;
  635. m_cutHoles[i].END = DateTime.Now;
  636. m_measureFile.Save();
  637. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  638. Thread.Sleep(3000);
  639. continue;
  640. }
  641. while (true)
  642. {
  643. Thread.Sleep(4000);
  644. if (iSEM.GetStageIs() == 0)
  645. {
  646. break;
  647. }
  648. }
  649. //判断是否停止进程
  650. if (key_stop)
  651. {
  652. m_cutHoles[i].STATE = State.Failed;
  653. m_cutHoles[i].END = DateTime.Now;
  654. m_measureFile.Save();
  655. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  656. LogManager.AddHardwareLog("停止键被按下", true);
  657. return;
  658. }
  659. //2、移动XY轴
  660. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  661. {
  662. arg.State = false;
  663. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  664. SendMsg("1-0");
  665. LogManager.AddHardwareLog("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  666. + m_cutHoles[0].Position.X.ToString() + ","
  667. + m_cutHoles[0].Position.Y.ToString()+ ")", false);
  668. m_cutHoles[i].STATE = State.Failed;
  669. m_cutHoles[i].END = DateTime.Now;
  670. m_measureFile.Save();
  671. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  672. Thread.Sleep(3000);
  673. continue;
  674. }
  675. while (true)
  676. {
  677. Thread.Sleep(4000);
  678. if (iSEM.GetStageIs() == 0)
  679. {
  680. break;
  681. }
  682. }
  683. //判断是否停止进程
  684. if (key_stop)
  685. {
  686. m_cutHoles[i].STATE = State.Failed;
  687. m_cutHoles[i].END = DateTime.Now;
  688. m_measureFile.Save();
  689. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  690. LogManager.AddHardwareLog("停止键被按下", true);
  691. return;
  692. }
  693. //3、恢复Z轴
  694. if (m_measureFile.MParam.Title)
  695. {
  696. //恢复Z轴
  697. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  698. {
  699. arg.State = false;
  700. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  701. SendMsg("1-0");
  702. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  703. m_cutHoles[i].STATE = State.Failed;
  704. m_cutHoles[i].END = DateTime.Now;
  705. m_measureFile.Save();
  706. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  707. Thread.Sleep(3000);
  708. continue;
  709. }
  710. while (true)
  711. {
  712. Thread.Sleep(4000);
  713. if (iSEM.GetStageIs() == 0)
  714. {
  715. break;
  716. }
  717. }
  718. //判断是否停止进程
  719. if (key_stop)
  720. {
  721. LogManager.AddHardwareLog("停止键按下。", true);
  722. m_cutHoles[i].STATE = State.Failed;
  723. m_cutHoles[i].END = DateTime.Now;
  724. m_measureFile.Save();
  725. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  726. return;
  727. }
  728. }
  729. arg.State = true;
  730. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  731. SendMsg("1-0");
  732. //4、设置WD
  733. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  734. Thread.Sleep(1000);
  735. #endregion
  736. //第一个点开始测量
  737. if (FirstHole())
  738. {
  739. //保存文件,将测量状态更改
  740. m_cutHoles[i].STATE = State.Success;
  741. m_cutHoles[i].END = DateTime.Now;
  742. m_measureFile.Save();
  743. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  744. }
  745. //失败
  746. else
  747. {
  748. m_cutHoles[i].STATE = State.Failed;
  749. m_cutHoles[i].END = DateTime.Now;
  750. m_measureFile.Save();
  751. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  752. }
  753. }
  754. else
  755. {
  756. //其他孔的测量
  757. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  758. m_cutHoles[i].START = DateTime.Now;
  759. m_cutHoles[i].STATE = State.InProcess;
  760. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  761. //其他孔测量之前的初始化
  762. if (!OtherHole_Init())
  763. {
  764. arg.State = false;
  765. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  766. SendMsg("1-0");
  767. Thread.Sleep(3000);
  768. LogManager.AddHardwareLog("测量线程:" + arg.Message, true);
  769. continue;
  770. }
  771. arg.State = true;
  772. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  773. SendMsg("1-0");
  774. //其他孔开始测量
  775. if (OtherHole())
  776. {
  777. //保存文件,将测量状态更改
  778. m_cutHoles[i].STATE = State.Success;
  779. m_cutHoles[i].END = DateTime.Now;
  780. m_measureFile.Save();
  781. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  782. }
  783. //失败
  784. else
  785. {
  786. m_cutHoles[i].STATE = State.Failed;
  787. m_cutHoles[i].END = DateTime.Now;
  788. m_measureFile.Save();
  789. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  790. }
  791. }
  792. if(key_stop)
  793. {
  794. m_cutHoles[i].END = DateTime.Now;
  795. m_cutHoles[i].STATE = State.Ready;
  796. m_measureFile.Save();
  797. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  798. arg.Message = "用户停止测量";
  799. SendMsg("0-0");
  800. break;
  801. }
  802. //两个点之间更换,加延时以便完成显示
  803. Thread.Sleep(3000);
  804. }
  805. }
  806. //检查硬件连接是否正常
  807. public bool ConnectHardware()
  808. {
  809. //返回硬件的连接状态
  810. return iSEM.ConnectStatus();
  811. }
  812. //设置工作文件夹
  813. public bool SetWorkingFolderStr()
  814. {
  815. WorkingFolder = m_measureFile.FilePath;
  816. return true;
  817. }
  818. //插入PT针
  819. public bool InsertPT()
  820. {
  821. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  822. //SendMsg("调用宏插入PT针宏文件" + fn);
  823. iSEM.CMDMCFFilename(fn);
  824. //延时1s??
  825. Thread.Sleep(1000);
  826. return true;
  827. }
  828. //撤出PT针
  829. public bool RetractPT()
  830. {
  831. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  832. //SendMsg("调用宏撤出PT针宏文件" + fn);
  833. iSEM.CMDMCFFilename(fn);
  834. //延时1s??
  835. Thread.Sleep(1000);
  836. return true;
  837. }
  838. //PT沉积
  839. public bool PTWork()
  840. {
  841. //执行PT沉积的ELY文件
  842. if (!ExcuteEly(m_measureFile.MParam.PTTemp))
  843. {
  844. return false;
  845. }
  846. //等待沉积完成
  847. while (true)
  848. {
  849. Thread.Sleep(7000);
  850. if (iSEM.GetFIBMode() == 0)
  851. {
  852. break;
  853. }
  854. }
  855. return true;
  856. }
  857. //FIB切割
  858. public bool FIBWork()
  859. {
  860. //执行PT沉积的ELY文件
  861. if (!ExcuteEly(m_measureFile.MParam.FIBTemp))
  862. {
  863. return false;
  864. }
  865. //等待切割完成
  866. while (true)
  867. {
  868. Thread.Sleep(10000);
  869. if (iSEM.GetFIBMode() == 0)
  870. {
  871. break;
  872. }
  873. }
  874. return true;
  875. }
  876. //执行ELY文件的步骤
  877. public bool ExcuteEly(string a_filename)
  878. {
  879. //执行ELy文件有三个动作
  880. //1. 选择ELY文件
  881. //SendMsg("选择ELY文件");
  882. if (!iSEM.CmdFIBLoadELY(a_filename))
  883. {
  884. //SendMsg("选择ELY文件失败");
  885. return false;
  886. }
  887. Thread.Sleep(1000);
  888. //2. 确认ELY文件
  889. //SendMsg("确认ELY文件");
  890. if (!iSEM.CmdFIBEXPOSUREELY())
  891. {
  892. //SendMsg("确认ELY文件失败");
  893. return false;
  894. }
  895. Thread.Sleep(1000);
  896. //3. 执行ELY文件
  897. //SendMsg("执行ELY文件");
  898. if (!iSEM.CmdFIBSTARTELY())
  899. {
  900. //SendMsg("执行ELY文件失败");
  901. return false;
  902. }
  903. Thread.Sleep(1000);
  904. return true;
  905. }
  906. /// <summary>
  907. ///13. 自动 定位功能,沉积
  908. /// </summary>
  909. /// <returns></returns>
  910. public bool GetPoistion()
  911. {
  912. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  913. int state = 1;
  914. LogManager.AddHardwareLog("测量线程:13.自动定位、沉积-功能自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString(), true);
  915. Thread.Sleep(200);
  916. //1.控制SEM放大600X
  917. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  918. {
  919. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  920. arg.State = false;
  921. SendMsg("1-6");
  922. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "控制失败", false);
  923. return false;
  924. }
  925. Thread.Sleep(200);
  926. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  927. {
  928. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  929. arg.State = false;
  930. SendMsg("1-6");
  931. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString() + "控制失败", false);
  932. return false;
  933. }
  934. float current = iSEM.GetMagnification();
  935. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  936. {
  937. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  938. Thread.Sleep(200);
  939. current = iSEM.GetMagnification();
  940. }
  941. arg.State = true;
  942. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  943. SendMsg("1-6");
  944. //判断是否停止进程
  945. if (key_stop)
  946. {
  947. LogManager.AddHardwareLog("停止键按下。", true);
  948. return false;
  949. }
  950. //判断是否为仅拍照,不是则执行FIB操作
  951. if (!m_measureFile.MParam.Is_Photograph)
  952. {
  953. LogManager.AddHardwareLog("测量线程:切换到FIB模式。", true);
  954. //6.设置FIB拍照参数——扫描时间、束流等
  955. //7.控制FIB自动亮度、对比度
  956. Thread.Sleep(200);
  957. if (!iSEM.CmdFIBModeFIB())
  958. {
  959. arg.Message = "FIB模式切换失败";
  960. arg.State = false;
  961. SendMsg("1-8");
  962. LogManager.AddHardwareLog("测量线程报错:切换到FIB模式失败。", false);
  963. return false;
  964. }
  965. arg.State = true;
  966. arg.Picture_Information.Work_Status = "FIB";
  967. arg.Message = "FIB模式切换成功";
  968. SendMsg("1-8");
  969. Thread.Sleep(1000);
  970. //判断是否停止进程
  971. if (key_stop)
  972. {
  973. LogManager.AddHardwareLog("停止键按下。", true);
  974. return false;
  975. }
  976. //8.控制FIB拍照
  977. //9.保存照片======更改路径
  978. //20201103,FIB使用定位的放大倍数
  979. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  980. arg.Picture_Information.Picture_FullPath = fileName2;
  981. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  982. Thread.Sleep(200);
  983. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  984. Thread.Sleep(200);
  985. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  986. Thread.Sleep(200);
  987. //FIB的放大位数,将来会改
  988. LogManager.AddHardwareLog("测量线程:设置FIB放大倍数"+ m_measureFile.MParam.Location_Magnification.ToString(), true);
  989. //20201103,FIB使用定位的放大倍数
  990. if (!iSEM.SetFIBMagnification(m_measureFile.MParam.Location_Magnification))
  991. {
  992. arg.Message = "FIB放大倍数设置失败";
  993. arg.State = false;
  994. SendMsg("1-9");
  995. LogManager.AddHardwareLog("测量线程失败:FIB放大倍数设置失败。", false);
  996. return false;
  997. }
  998. arg.Message = "FIB放大倍数设置成功";
  999. arg.State = true;
  1000. SendMsg("1-9");
  1001. Thread.Sleep(200);
  1002. //判断是否停止进程
  1003. if (key_stop)
  1004. {
  1005. LogManager.AddHardwareLog("停止键按下。", true);
  1006. return false;
  1007. }
  1008. //4、设置WD
  1009. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1010. Thread.Sleep(1000);
  1011. //20201127增加自动亮度对比度
  1012. if(m_measureFile.MParam.FIBDo)
  1013. {
  1014. if(m_measureFile.MParam.FIBAutoBC)
  1015. {
  1016. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1017. float m_TempBrightness = 50.0f;
  1018. float m_TempContrast = 30.0f;
  1019. if (m_measureFile.MParam.SampleName == "3")
  1020. {
  1021. m_TempBrightness = 50.0f;
  1022. m_TempContrast = 30.0f;
  1023. iSEM.SetAutoVideoOff();
  1024. Thread.Sleep(200);
  1025. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1026. Thread.Sleep(200);
  1027. iSEM.SetContrast(m_TempContrast); //30.0f
  1028. Thread.Sleep(200);
  1029. }
  1030. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1031. {
  1032. iSEM.SetAutoVideoBrightnessAndContrast();
  1033. //20201128陈工建议增加
  1034. Thread.Sleep(200);
  1035. iSEM.SetAutoBright(100);
  1036. Thread.Sleep(200);
  1037. iSEM.SetAutoContrast(100);
  1038. Thread.Sleep(5000);
  1039. }
  1040. }
  1041. else
  1042. {
  1043. iSEM.SetAutoVideoOff();
  1044. Thread.Sleep(200);
  1045. iSEM.SetBrightness(m_measureFile.MParam.FIBB);
  1046. Thread.Sleep(200);
  1047. iSEM.SetContrast(m_measureFile.MParam.FIBC);
  1048. Thread.Sleep(200);
  1049. }
  1050. }
  1051. //拍照前改变速度,延时
  1052. iSEM.CloseReduced();
  1053. Thread.Sleep(200);
  1054. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1055. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1056. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1057. Thread.Sleep(200);
  1058. cycle_time = iSEM.GetCycleTime();
  1059. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1060. if (!GetImage(fileName2))
  1061. {
  1062. arg.Message = "FIB拍照失败";
  1063. arg.State = false;
  1064. SendMsg("1-11");
  1065. LogManager.AddHardwareLog("测量线程报错:FIB拍照失败。", false);
  1066. return false;
  1067. }
  1068. arg.State = true;
  1069. arg.Picture_Information.Picture_FullPath = fileName2;
  1070. arg.Message = "FIB拍照成功";
  1071. SendMsg("1-11");
  1072. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1073. Thread.Sleep(200);
  1074. cycle_time = iSEM.GetCycleTime();
  1075. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1076. //判断是否停止进程
  1077. if (key_stop)
  1078. {
  1079. LogManager.AddHardwareLog("停止键按下。", true);
  1080. return false;
  1081. }
  1082. iSEM.CmdFIBModeSEM();
  1083. Thread.Sleep(200);
  1084. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1085. LogManager.AddHardwareLog("测量线程:调用图像处理接口,准备移动样品台", true);
  1086. LogManager.AddHardwareLog("文件名=" + fileName2, true);
  1087. LogManager.AddHardwareLog("样品类型=" + m_measureFile.MParam.SampleName, true);
  1088. LogManager.AddHardwareLog("供应商名称=" + m_measureFile.MParam.Firm, true);
  1089. wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1090. LogManager.AddHardwareLog("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString()+")", true);
  1091. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1092. if (state == 1)
  1093. {
  1094. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1095. float xc = (x1 + x2)/2;
  1096. float yc = (y1 + y2)/2;
  1097. x0 = xc - 512;
  1098. y0 = 384 - yc;
  1099. LogManager.AddHardwareLog("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1100. px = iSEM.GetPixelSize();
  1101. //修改FIB切割的ELY文件坐标
  1102. XmlDocument xmlDoc = new XmlDocument();
  1103. xmlDoc.Load(m_measureFile.MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1104. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1105. if (xns != null)
  1106. {
  1107. XmlAttributeCollection attributeCol = xns.Attributes;
  1108. //遍历自己点属性
  1109. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1110. LogManager.AddHardwareLog("XML-Width_a = " + width_a.ToString(), true);
  1111. foreach (XmlAttribute attri in attributeCol)
  1112. {
  1113. if (attri.Name == "x")
  1114. {
  1115. attri.InnerText = ((x0 * px)*1000000 - width_a).ToString();
  1116. LogManager.AddHardwareLog("XML-TopLeft-X = " + attri.InnerText, true);
  1117. }
  1118. else if (attri.Name == "y")
  1119. {
  1120. attri.InnerText = ((y0 * px)*1000000-2.791).ToString();
  1121. LogManager.AddHardwareLog("XML-TopLeft-Y = " + attri.InnerText, true);
  1122. }
  1123. }
  1124. }
  1125. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1126. if (xns != null)
  1127. {
  1128. XmlAttributeCollection attributeCol = xns.Attributes;
  1129. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1130. //遍历自己点属性
  1131. foreach (XmlAttribute attri in attributeCol)
  1132. {
  1133. if (attri.Name == "x")
  1134. {
  1135. attri.InnerText = ((x0 * px)*1000000 - width).ToString();
  1136. }
  1137. else if (attri.Name == "y")
  1138. {
  1139. attri.InnerText = (((y0 * px) *1000000) + 2 - 2.791).ToString();
  1140. }
  1141. }
  1142. }
  1143. xmlDoc.Save(m_measureFile.MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1144. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1145. if (m_measureFile.MParam.PT)
  1146. {
  1147. xmlDoc = new XmlDocument();
  1148. xmlDoc.Load(m_measureFile.MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1149. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1150. if (xns != null)
  1151. {
  1152. XmlAttributeCollection attributeCol = xns.Attributes;
  1153. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1154. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1155. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1156. //遍历自己点属性
  1157. foreach (XmlAttribute attri in attributeCol)
  1158. {
  1159. if (attri.Name == "x")
  1160. {
  1161. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1162. }
  1163. else if (attri.Name == "y")
  1164. {
  1165. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1166. }
  1167. }
  1168. }
  1169. xmlDoc.Save(m_measureFile.MParam.PTTemp);
  1170. }
  1171. if (hand_intervene == 1)
  1172. {
  1173. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1174. }
  1175. }
  1176. else
  1177. {
  1178. arg.Message = "图像接口参数state返回值为零";
  1179. arg.State = false;
  1180. SendMsg("1-12");
  1181. if (hand_intervene == 1)
  1182. {
  1183. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1184. {
  1185. return false;
  1186. }
  1187. }
  1188. else
  1189. {
  1190. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1191. return false;
  1192. }
  1193. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1194. return false;
  1195. }
  1196. //判断是否停止进程
  1197. if (key_stop)
  1198. {
  1199. LogManager.AddHardwareLog("停止键按下", true);
  1200. return false;
  1201. }
  1202. //11.自动工具样品类型参数确定是否需要PT沉积
  1203. if (m_measureFile.MParam.PT)
  1204. {
  1205. if (!iSEM.CmdFIBModeFIB())
  1206. {
  1207. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1208. return false;
  1209. }
  1210. Thread.Sleep(200);
  1211. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1212. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1213. {
  1214. LogManager.AddHardwareLog("测量线程:插入PT针" + arg.Message, true);
  1215. if (!InsertPT())
  1216. {
  1217. arg.Message = "插入PT针失败";
  1218. arg.State = false;
  1219. SendMsg("1-13");
  1220. LogManager.AddHardwareLog("测量线程报错:"+ arg.Message, false);
  1221. return false;
  1222. }
  1223. arg.State = true;
  1224. arg.Message = "插入PT针成功";
  1225. SendMsg("1-13");
  1226. }
  1227. //判断是否停止进程
  1228. if (key_stop)
  1229. {
  1230. LogManager.AddHardwareLog("停止键按下", true);
  1231. return false;
  1232. }
  1233. //3. 根据坐标进行PT沉积
  1234. if (!PTWork())
  1235. {
  1236. arg.Message = "PT沉积失败";
  1237. arg.State = false;
  1238. SendMsg("1-14");
  1239. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1240. return false;
  1241. }
  1242. arg.State = true;
  1243. arg.Message = "PT沉积成功";
  1244. SendMsg("1-14");
  1245. //判断是否停止进程
  1246. if (key_stop)
  1247. {
  1248. LogManager.AddHardwareLog("停止键按下", true);
  1249. return false;
  1250. }
  1251. //15.根据样品类型决定是否撤出PT针
  1252. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1253. {
  1254. if (!RetractPT())
  1255. {
  1256. arg.Message = "撤出PT针失败";
  1257. arg.State = false;
  1258. SendMsg("1-15");
  1259. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1260. return false;
  1261. }
  1262. arg.State = true;
  1263. arg.Message = "撤出PT针成功";
  1264. SendMsg("1-15");
  1265. }
  1266. //判断是否停止进程
  1267. if (key_stop)
  1268. {
  1269. LogManager.AddHardwareLog("停止键按下", true);
  1270. return false;
  1271. }
  1272. if (!iSEM.CmdFIBModeSEM())
  1273. {
  1274. //arg.Message = "切割前SEM拍照失败。";
  1275. //arg.State = false;
  1276. //SendMsg("1-17");
  1277. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1278. return false;
  1279. }
  1280. }
  1281. }
  1282. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1283. float[] firstPosition = iSEM.GetStagePosition();
  1284. m_cutHoles[0].Position.X = firstPosition[0];
  1285. m_cutHoles[0].Position.Y = firstPosition[1];
  1286. m_cutHoles[0].Position.Z = firstPosition[2];
  1287. m_cutHoles[0].Position.T = firstPosition[3];
  1288. m_cutHoles[0].Position.R = firstPosition[4];
  1289. m_cutHoles[0].Position.M = firstPosition[5];
  1290. //这里要调用文件保存功能
  1291. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1292. + firstPosition[1].ToString() + ","
  1293. + firstPosition[2].ToString() + ","
  1294. + firstPosition[3].ToString() + ","
  1295. + firstPosition[4].ToString() + ","
  1296. + firstPosition[5].ToString() + ")";
  1297. arg.State = true;
  1298. SendMsg("1-16");
  1299. //判断是否停止进程
  1300. if (key_stop)
  1301. {
  1302. LogManager.AddHardwareLog("停止键按下", true);
  1303. return false;
  1304. }
  1305. return true;
  1306. }
  1307. /// <summary>
  1308. /// 14. FIB切割
  1309. /// </summary>
  1310. /// <returns></returns>
  1311. public bool FIBCross()
  1312. {
  1313. int state = 0;
  1314. #if CHECK
  1315. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1316. if (mag < 200)
  1317. {
  1318. mag = 200;
  1319. }
  1320. String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
  1321. iSEM.SetMagnification(mag);
  1322. Thread.Sleep(2000);
  1323. iSEM.CmdSaveRate();
  1324. Thread.Sleep(200);
  1325. cycle_time = iSEM.GetCycleTime();
  1326. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1327. if (!GetImage(fileName1))
  1328. {
  1329. arg.Message = "切割前SEM拍照失败。";
  1330. arg.State = false;
  1331. SendMsg("1-17");
  1332. LogManager.AddHardwareLog("测量线程报错:SEM切割前图像拍照失败", false);
  1333. return false;
  1334. }
  1335. iSEM.CmdFocusRate();
  1336. Thread.Sleep(200);
  1337. cycle_time = iSEM.GetCycleTime();
  1338. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1339. arg.Message = "切割前SEM拍照成功。";
  1340. arg.Picture_Information.Picture_FullPath = fileName1;
  1341. arg.State = true;
  1342. SendMsg("1-17");
  1343. #endif
  1344. if (!iSEM.CmdFIBModeFIB())
  1345. {
  1346. arg.Message = "切换到FIB模式失败。";
  1347. arg.State = false;
  1348. SendMsg("1-18");
  1349. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1350. return false;
  1351. }
  1352. arg.Message = "切换到FIB模式成功。";
  1353. arg.State = true;
  1354. SendMsg("1-18");
  1355. Thread.Sleep(1000);
  1356. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1357. float current = iSEM.GetMagnification();
  1358. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  1359. {
  1360. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1361. Thread.Sleep(200);
  1362. current = iSEM.GetMagnification();
  1363. }
  1364. Thread.Sleep(2000);
  1365. //14.自动控制FIB切割
  1366. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1367. //2.控制FIB进行切割
  1368. //以上1、2步全部用ELY文件代替
  1369. if (!FIBWork())
  1370. {
  1371. arg.Message = "FIB切割失败";
  1372. arg.State = false;
  1373. SendMsg("1-19");
  1374. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1375. return false;
  1376. }
  1377. arg.State = true;
  1378. arg.Message = "FIB切割成功";
  1379. SendMsg("1-19");
  1380. Thread.Sleep(300);
  1381. //判断是否停止进程
  1382. if (key_stop)
  1383. {
  1384. LogManager.AddHardwareLog("停止键按下", true);
  1385. return false;
  1386. }
  1387. //做切割后SEM的拍照
  1388. LogManager.AddHardwareLog("测量线程:切割后SEM拍照", true);
  1389. if (!iSEM.CmdFIBModeSEM())
  1390. {
  1391. //arg.Message = "切割后SEM拍照失败。";
  1392. //arg.State = false;
  1393. //SendMsg("1-20");
  1394. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1395. return false;
  1396. }
  1397. Thread.Sleep(1000);
  1398. #if CHECK
  1399. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
  1400. iSEM.SetMagnification(mag);
  1401. Thread.Sleep(2000);
  1402. iSEM.CmdSaveRate();
  1403. Thread.Sleep(200);
  1404. cycle_time = iSEM.GetCycleTime();
  1405. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1406. if (!GetImage(fileName2))
  1407. {
  1408. arg.Message = "切割后SEM拍照失败。";
  1409. arg.State = false;
  1410. SendMsg("1-20");
  1411. LogManager.AddHardwareLog("测量线程报错:SEM切割后图像拍照失败", false);
  1412. return false;
  1413. }
  1414. arg.Picture_Information.Picture_FullPath = fileName2;
  1415. arg.Message = "切割后SEM拍照成功。";
  1416. arg.State = true;
  1417. SendMsg("1-20");
  1418. iSEM.CmdFocusRate();
  1419. Thread.Sleep(200);
  1420. cycle_time = iSEM.GetCycleTime();
  1421. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1422. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1423. wr.Img_Cut_Success(fileName1, fileName2, out state);
  1424. LogManager.AddHardwareLog("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
  1425. if (state == 0)
  1426. {
  1427. LogManager.AddHardwareLog("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
  1428. arg.Message = "图像接口参数state返回值为零";
  1429. arg.State = false;
  1430. SendMsg("1-22");
  1431. if (hand_intervene == 1)
  1432. {
  1433. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1434. {
  1435. return false;
  1436. }
  1437. }
  1438. else
  1439. {
  1440. return false;
  1441. }
  1442. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1443. }
  1444. arg.State = true;
  1445. LogManager.AddHardwareLog("验证切割准确性成功。", true);
  1446. arg.Message = "FIB切割校验成功";
  1447. SendMsg("1-22");
  1448. //判断是否停止进程
  1449. if (key_stop)
  1450. {
  1451. LogManager.AddHardwareLog("停止键按下。", true);
  1452. return false;
  1453. }
  1454. #endif
  1455. return true;
  1456. }
  1457. /// <summary>
  1458. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1459. /// </summary>
  1460. /// <returns></returns>
  1461. public bool FindCross()
  1462. {
  1463. float x2 = 0, y2 = 0;
  1464. int state = 0;
  1465. //切换到SEM模式
  1466. if (!iSEM.CmdFIBModeSEM())
  1467. {
  1468. arg.Message = "SEM模式切换失败";
  1469. arg.State = false;
  1470. SendMsg("1-23");
  1471. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1472. return false;
  1473. }
  1474. arg.State = true;
  1475. arg.Message = "SEM模式切换成功";
  1476. SendMsg("1-23");
  1477. arg.Picture_Information.Work_Status = "SEM";
  1478. Thread.Sleep(1000);
  1479. //判断是否停止进程
  1480. if (key_stop)
  1481. {
  1482. LogManager.AddHardwareLog("停止键按下", true);
  1483. return false;
  1484. }
  1485. //1.控制SEM放大到300倍
  1486. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  1487. {
  1488. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  1489. arg.State = false;
  1490. SendMsg("1-24");
  1491. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1492. return false;
  1493. }
  1494. Thread.Sleep(200);
  1495. //iSEM.SetAutoVideoBrightnessAndContrast();
  1496. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1497. float m_TempBrightness = 50.0f;
  1498. float m_TempContrast = 30.0f;
  1499. if (m_measureFile.MParam.SampleName == "3")
  1500. {
  1501. m_TempBrightness = 48.0f;
  1502. m_TempContrast = 29.0f;
  1503. }
  1504. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1505. iSEM.SetAutoVideoOff();
  1506. Thread.Sleep(200);
  1507. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1508. Thread.Sleep(200);
  1509. iSEM.SetContrast(m_TempContrast); //30.0f
  1510. Thread.Sleep(2000);
  1511. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1512. if (mag < 200)
  1513. {
  1514. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1515. if (m_measureFile.MParam.SampleName == "3")
  1516. mag = 400;
  1517. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1518. mag = 200;
  1519. }
  1520. if (!iSEM.SetMagnification(mag))
  1521. {
  1522. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1523. arg.State = false;
  1524. SendMsg("1-24");
  1525. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1526. return false;
  1527. }
  1528. Thread.Sleep(200);
  1529. float current = iSEM.GetMagnification();
  1530. Thread.Sleep(200);
  1531. while (Math.Abs(current - mag) > 2)
  1532. {
  1533. iSEM.SetMagnification(mag);
  1534. Thread.Sleep(200);
  1535. current = iSEM.GetMagnification();
  1536. Thread.Sleep(200);
  1537. }
  1538. arg.State = true;
  1539. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1540. SendMsg("1-24");
  1541. Thread.Sleep(2000);
  1542. //判断是否停止进程
  1543. if (key_stop)
  1544. {
  1545. LogManager.AddHardwareLog("停止键按下", true);
  1546. return false;
  1547. }
  1548. //3.控制SEM拍照
  1549. String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1550. arg.Picture_Information.Picture_FullPath = fileName4;
  1551. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1552. Thread.Sleep(200);
  1553. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1554. Thread.Sleep(200);
  1555. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1556. Thread.Sleep(200);
  1557. //拍照前改变速度,延时
  1558. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1559. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1560. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1561. Thread.Sleep(200);
  1562. cycle_time = iSEM.GetCycleTime();
  1563. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1564. if (!GetImage(fileName4))
  1565. {
  1566. arg.State = false;
  1567. arg.Message = "SEM拍照找切割位置失败";
  1568. SendMsg("1-25");
  1569. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1570. return false;
  1571. }
  1572. arg.Picture_Information.Picture_FullPath = fileName4;
  1573. arg.State = true;
  1574. arg.Message = "SEM拍照成功";
  1575. SendMsg("1-25");
  1576. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1577. Thread.Sleep(200);
  1578. cycle_time = iSEM.GetCycleTime();
  1579. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1580. //判断是否停止进程
  1581. if (key_stop)
  1582. {
  1583. return false;
  1584. }
  1585. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1586. //5.根据坐标控制SEM移动到切孔位置,居中
  1587. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  1588. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  1589. wr.Img_Trapezoid_Top_Center_Position(fileName4,Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  1590. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1591. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1592. if (state == 1)
  1593. {
  1594. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1595. if (!MoveToPixByMoveStage(x2, y2))
  1596. {
  1597. arg.State = false;
  1598. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1599. SendMsg("1-26");
  1600. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1601. return false;
  1602. }
  1603. //判断是否移动完成
  1604. while (true)
  1605. {
  1606. Thread.Sleep(4000);
  1607. if (iSEM.GetStageIs() == 0)
  1608. {
  1609. break;
  1610. }
  1611. }
  1612. arg.State = true;
  1613. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1614. SendMsg("1-26");
  1615. //高倍到低倍不进行对焦
  1616. //拍照前改变速度,延时
  1617. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1618. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1619. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1620. Thread.Sleep(200);
  1621. cycle_time = iSEM.GetCycleTime();
  1622. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1623. String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1624. if (!GetImage(fileName10))
  1625. {
  1626. //arg.State = false;
  1627. //arg.Message = "SEM拍照失败";
  1628. //SendMsg("1-25");
  1629. //return false;
  1630. LogManager.AddHardwareLog("测量线程报错:找到已切割的位置拍照失败", true);
  1631. }
  1632. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1633. Thread.Sleep(200);
  1634. cycle_time = iSEM.GetCycleTime();
  1635. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1636. if (hand_intervene == 1)
  1637. {
  1638. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1639. }
  1640. }
  1641. else
  1642. {
  1643. arg.Message = "图像接口参数state返回值为零";
  1644. arg.State = false;
  1645. SendMsg("1-26");
  1646. if (hand_intervene == 1)
  1647. {
  1648. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1649. {
  1650. return false;
  1651. }
  1652. }
  1653. else
  1654. {
  1655. return false;
  1656. }
  1657. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1658. return false;
  1659. }
  1660. //判断是否停止进程
  1661. if (key_stop)
  1662. {
  1663. LogManager.AddHardwareLog("停止键按下", true);
  1664. return false;
  1665. }
  1666. return true;
  1667. }
  1668. /// <summary>
  1669. /// 17.自动控制SEM拍截面照
  1670. /// </summary>
  1671. /// <returns></returns>
  1672. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1673. {
  1674. int state = 0;
  1675. #region 设置拍照的电压
  1676. LogManager.AddHardwareLog("测量线程:设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true);
  1677. //1、放大倍数参数photograph_
  1678. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Photograph_Voltage))
  1679. {
  1680. arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1681. arg.State = false;
  1682. SendMsg("1-27");
  1683. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1684. return false;
  1685. }
  1686. //add
  1687. #endregion
  1688. Thread.Sleep(200);
  1689. #region 设置拍照的放大倍数
  1690. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数====" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  1691. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  1692. {
  1693. arg.Message = "放大倍数调整失败";
  1694. arg.State = false;
  1695. SendMsg("1-27");
  1696. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1697. return false;
  1698. }
  1699. float set = m_measureFile.MParam.Photograph_Magnification;
  1700. float current = iSEM.GetMagnification();
  1701. while(Math.Abs(current- set) > 1)
  1702. {
  1703. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  1704. Thread.Sleep(200);
  1705. current = iSEM.GetMagnification();
  1706. }
  1707. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString()+ "成功";
  1708. arg.State = true;
  1709. SendMsg("1-27");
  1710. Thread.Sleep(3000 + (Int32)cycle_time);
  1711. //判断是否停止进程
  1712. if (key_stop)
  1713. {
  1714. LogManager.AddHardwareLog("停止键按下", true);
  1715. return false;
  1716. }
  1717. #endregion
  1718. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1719. //if(!iSEM.SetAutoVideoBrightnessAndContrast())
  1720. //{
  1721. // LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1722. // return false;
  1723. //}
  1724. //Thread.Sleep(5000);
  1725. //2.控制SEM自动对焦、亮度、对比度-接口
  1726. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1727. if ((m_measureFile.MParam.SampleName == "2")||(m_measureFile.MParam.SampleName == "3"))
  1728. iSEM.SetReduced(402, 128, 500, 500);
  1729. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1730. iSEM.SetReduced(402, 128, 340, 256);
  1731. Thread.Sleep(200);
  1732. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1733. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1734. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1735. Thread.Sleep(200);
  1736. cycle_time = iSEM.GetCycleTime();
  1737. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1738. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1739. if (!iSEM.SetAutoVideoOff())
  1740. {
  1741. LogManager.AddHardwareLog("测量线程报错:关闭自动亮度对比度失败", false);
  1742. return false;
  1743. }
  1744. Thread.Sleep(5000);
  1745. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1746. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1747. if (ImageFocus1(false))
  1748. {
  1749. arg.Message = "自动对焦完成";
  1750. arg.State = true;
  1751. SendMsg("1-28");
  1752. }
  1753. else
  1754. {
  1755. arg.Message = "自动对焦失败";
  1756. arg.State = false;
  1757. SendMsg("1-28");
  1758. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1759. return false;
  1760. }
  1761. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1762. iSEM.CloseReduced();
  1763. Thread.Sleep(200);
  1764. cycle_time = iSEM.GetCycleTime();
  1765. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1766. //判断是否停止进程
  1767. if (key_stop)
  1768. {
  1769. LogManager.AddHardwareLog("停止键按下", true);
  1770. return false;
  1771. }
  1772. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1773. float m_TempBrightness = 50.0f;
  1774. float m_TempContrast = 30.0f;
  1775. if (m_measureFile.MParam.SampleName == "3")
  1776. {
  1777. m_TempBrightness = 50f;
  1778. m_TempContrast = 29f;
  1779. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1780. Thread.Sleep(200);
  1781. iSEM.SetContrast(m_TempContrast); //30.0f
  1782. Thread.Sleep(200);
  1783. }
  1784. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1785. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1786. {
  1787. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1788. return false;
  1789. }
  1790. Thread.Sleep(5000);
  1791. //3、设置SEM补偿角度
  1792. if (m_measureFile.MParam.Is_Photograph == false)
  1793. {
  1794. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString()+"度", true);
  1795. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1796. {
  1797. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1798. arg.State = false;
  1799. SendMsg("1-29");
  1800. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1801. return false;
  1802. }
  1803. arg.State = true;
  1804. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1805. SendMsg("1-29");
  1806. Thread.Sleep(200);
  1807. //判断是否停止进程
  1808. if (key_stop)
  1809. {
  1810. LogManager.AddHardwareLog("停止键按下", false);
  1811. return false;
  1812. }
  1813. }
  1814. //4、拍照,5、保存照片
  1815. String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1816. arg.Picture_Information.Picture_FullPath = fileName5;
  1817. arg.Picture_Information.Work_Status = "SEM";
  1818. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1819. Thread.Sleep(200);
  1820. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1821. Thread.Sleep(200);
  1822. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1823. Thread.Sleep(200);
  1824. //拍照前改变速度,延时
  1825. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1826. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1827. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1828. Thread.Sleep(200);
  1829. cycle_time = iSEM.GetCycleTime();
  1830. Thread.Sleep(Convert.ToInt32(cycle_time)*2);
  1831. if (!GetImage(fileName5))
  1832. {
  1833. arg.Message = "SEM拍照失败";
  1834. arg.State = false;
  1835. SendMsg("1-30");
  1836. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1837. return false;
  1838. }
  1839. arg.Picture_Information.Picture_FullPath = fileName5;
  1840. arg.State = true;
  1841. arg.Message = "SEM拍照成功";
  1842. SendMsg("1-30");
  1843. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1844. Thread.Sleep(200);
  1845. cycle_time = iSEM.GetCycleTime();
  1846. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1847. //判断是否停止进程
  1848. if (key_stop)
  1849. {
  1850. LogManager.AddHardwareLog("停止键按下", true);
  1851. return false;
  1852. }
  1853. #endregion
  1854. if (m_measureFile.MParam.Is_Photograph == false)
  1855. {
  1856. #region 对当前矩形进行旋转校正
  1857. //8,计算切割面区域偏移角度及方向
  1858. float degree = 0;
  1859. int direction = 0;
  1860. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  1861. LogManager.AddHardwareLog("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1862. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1863. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1864. if (state == 1)
  1865. {
  1866. //梯形角度
  1867. iSEM.SetScanRotationOn();
  1868. Thread.Sleep(200);
  1869. //20201128陈工要求,谭博返回角度*0.7
  1870. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  1871. Thread.Sleep(200);
  1872. arg.State = true;
  1873. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1874. SendMsg("1-31");
  1875. if (hand_intervene == 1)
  1876. {
  1877. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1878. }
  1879. }
  1880. else
  1881. {
  1882. arg.Message = "图像接口参数State返回值为零";
  1883. arg.State = false;
  1884. SendMsg("1-31");
  1885. if(hand_intervene == 1)
  1886. {
  1887. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1888. {
  1889. return false;
  1890. }
  1891. }
  1892. else
  1893. {
  1894. //return false;
  1895. }
  1896. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1897. }
  1898. //判断是否停止进程
  1899. if (key_stop)
  1900. {
  1901. LogManager.AddHardwareLog("停止键按下", true);
  1902. return false;
  1903. }
  1904. Thread.Sleep(200);
  1905. //12拍照
  1906. String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1907. arg.Picture_Information.Picture_FullPath = fileName6;
  1908. arg.Picture_Information.Work_Status = "SEM";
  1909. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1910. Thread.Sleep(200);
  1911. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1912. Thread.Sleep(200);
  1913. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1914. Thread.Sleep(200);
  1915. //拍照前改变速度,延时
  1916. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1917. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1918. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1919. Thread.Sleep(200);
  1920. cycle_time = iSEM.GetCycleTime();
  1921. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1922. if (!GetImage(fileName6))
  1923. {
  1924. arg.Message = "SEM拍照失败";
  1925. arg.State = false;
  1926. SendMsg("1-33");
  1927. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1928. return false;
  1929. }
  1930. arg.Picture_Information.Picture_FullPath = fileName6;
  1931. arg.State = true;
  1932. arg.Message = "SEM拍照成功";
  1933. SendMsg("1-33");
  1934. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1935. Thread.Sleep(200);
  1936. cycle_time = iSEM.GetCycleTime();
  1937. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1938. //判断是否停止进程
  1939. if (key_stop)
  1940. {
  1941. LogManager.AddHardwareLog("停止键按下", true);
  1942. return false;
  1943. }
  1944. #endregion
  1945. #region 获取两个位置上及放大倍数
  1946. //计算两个测量区域坐标
  1947. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1948. List<float> mag = new List<float>();
  1949. System.Drawing.Point ct0;
  1950. float mag1, mag2, magMax;
  1951. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1952. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  1953. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  1954. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1955. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  1956. "输入产品" + m_measureFile.MParam.Firm.ToString()
  1957. + "输出中心点1为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  1958. + ",输出放大倍数1==" + mag[0]
  1959. + "倍,输出中心点2为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  1960. + "输出放大倍数2==" + mag[0]
  1961. + "倍,输出中心点3为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1962. #endregion
  1963. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1964. {
  1965. arg.State = true;
  1966. arg.Message = "获取位置及放大倍数成功";
  1967. SendMsg("1-34");
  1968. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1969. float xs = iSEM.GetBeamShiftX();
  1970. Thread.Sleep(200);
  1971. float ys = iSEM.GetBeamShiftY();
  1972. Thread.Sleep(200);
  1973. float xpCur = iSEM.GetStageAtX();
  1974. Thread.Sleep(200);
  1975. float ypCur = iSEM.GetStageAtY();
  1976. Thread.Sleep(200);
  1977. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  1978. + "y=" + ys.ToString() + ","
  1979. + "原来样品台的位置x= " + xpCur.ToString()
  1980. + "y=" + ypCur.ToString(), true);
  1981. #endregion
  1982. //找到放大倍数最大值
  1983. magMax = mag[0];
  1984. for (int m = 1; m < mag.Count; m++)
  1985. {
  1986. if (mag[m] > magMax)
  1987. {
  1988. magMax = mag[m];
  1989. }
  1990. }
  1991. #region 移动到梯形左上角
  1992. //20201127将视野移动到梯形左上角位置
  1993. MoveToPix(ct0.X, ct0.Y);
  1994. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  1995. + "," + ct0.Y.ToString() + ")", true);
  1996. //关闭自动亮度对比度
  1997. iSEM.SetAutoVideoOff();
  1998. Thread.Sleep(2000);
  1999. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2000. if (m_measureFile.MParam.SampleName == "3")
  2001. {
  2002. m_TempBrightness = 50f;
  2003. m_TempContrast = 29f;
  2004. iSEM.SetBrightness(m_TempBrightness); //50.0f
  2005. Thread.Sleep(200);
  2006. iSEM.SetContrast(m_TempContrast); //30.0f
  2007. Thread.Sleep(200);
  2008. }
  2009. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  2010. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  2011. if ( m_measureFile.MParam.SampleName == "3")
  2012. {
  2013. iSEM.SetReduced(402, 128, 500, 500);
  2014. }else
  2015. {
  2016. iSEM.SetReduced(402, 128, 340, 256);
  2017. }
  2018. Thread.Sleep(200);
  2019. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  2020. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2021. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  2022. Thread.Sleep(200);
  2023. cycle_time = iSEM.GetCycleTime();
  2024. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2025. //放大到6000倍
  2026. iSEM.SetMagnification(magMax / 2);
  2027. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2028. set = magMax / 2;
  2029. current = iSEM.GetMagnification();
  2030. while (Math.Abs(current - set) > 1)
  2031. {
  2032. iSEM.SetMagnification(set);
  2033. Thread.Sleep(200);
  2034. current = iSEM.GetMagnification();
  2035. }
  2036. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--6000倍!", true);
  2037. //自动对焦
  2038. if (!ImageFocus1(true))
  2039. {
  2040. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦失败!", true);
  2041. return false;
  2042. }
  2043. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦成功!", true);
  2044. ////自动消像散
  2045. //if (!ImageStig1())
  2046. //{
  2047. // return false;
  2048. //}
  2049. //放大到10000倍
  2050. iSEM.SetMagnification(magMax);
  2051. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2052. set = magMax;
  2053. current = iSEM.GetMagnification();
  2054. while (Math.Abs(current - set) > 1)
  2055. {
  2056. iSEM.SetMagnification(set);
  2057. Thread.Sleep(200);
  2058. current = iSEM.GetMagnification();
  2059. }
  2060. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--12000倍!", true);
  2061. //自动对焦
  2062. if (!ImageFocus1(true))
  2063. {
  2064. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦失败!", true);
  2065. return false;
  2066. }
  2067. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦成功!", true);
  2068. ////自动消像散
  2069. //if (!ImageStig1())
  2070. //{
  2071. // return false;
  2072. //}
  2073. ////放大到20000倍
  2074. //iSEM.SetMagnification(magMax*2);
  2075. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2076. //set = magMax*2;
  2077. //current = iSEM.GetMagnification();
  2078. //while (Math.Abs(current - set) > 1)
  2079. //{
  2080. // iSEM.SetMagnification(set);
  2081. // Thread.Sleep(200);
  2082. // current = iSEM.GetMagnification();
  2083. //}
  2084. ////自动对焦
  2085. //if (!ImageFocus1())
  2086. //{
  2087. // return false;
  2088. //}
  2089. iSEM.CloseReduced();
  2090. Thread.Sleep(200);
  2091. cycle_time = iSEM.GetCycleTime();
  2092. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2093. #endregion
  2094. #region 循环拍照
  2095. for (int n = 0; n < ct.Count; n++)
  2096. {
  2097. #region 恢复到拍照的状态
  2098. iSEM.SetStageGotoX(xpCur);
  2099. while (true)
  2100. {
  2101. Thread.Sleep(4000);
  2102. if (iSEM.GetStageIs() == 0)
  2103. {
  2104. break;
  2105. }
  2106. }
  2107. iSEM.SetStageGotoY(ypCur);
  2108. while (true)
  2109. {
  2110. Thread.Sleep(4000);
  2111. if (iSEM.GetStageIs() == 0)
  2112. {
  2113. break;
  2114. }
  2115. }
  2116. //恢复原来的放大倍数
  2117. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  2118. {
  2119. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2120. return false;
  2121. }
  2122. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2123. set = m_measureFile.MParam.Photograph_Magnification;
  2124. current = iSEM.GetMagnification();
  2125. while (Math.Abs(current - set) > 1)
  2126. {
  2127. iSEM.SetMagnification(set);
  2128. Thread.Sleep(200);
  2129. current = iSEM.GetMagnification();
  2130. }
  2131. //恢复BeamShift的百分比值
  2132. iSEM.SetBeamShiftX(xs);
  2133. Thread.Sleep(200);
  2134. iSEM.SetBeamShiftY(ys);
  2135. Thread.Sleep(200);
  2136. #endregion
  2137. #region 移动到指定点位置
  2138. if (!MoveToPix(ct[n].X, ct[n].Y))
  2139. {
  2140. arg.State = false;
  2141. arg.Message = "移动到第一个点位置失败";
  2142. SendMsg("1-" + (35 + n).ToString());
  2143. //移动到第一个点失败
  2144. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2145. }
  2146. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2147. + "," + ct[n].Y.ToString() + ")", true);
  2148. #endregion
  2149. #region 如果是第一个点,则1W倍对焦
  2150. if (n == 0)
  2151. {
  2152. ////在第一个点上放大1W倍对焦
  2153. //if (!iSEM.SetMagnification(mag[n]))
  2154. //{
  2155. // LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2156. // return false;
  2157. //}
  2158. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2159. //while (true)
  2160. //{
  2161. // current = iSEM.GetMagnification();
  2162. // if (Math.Abs(current - mag[n]) < 1)
  2163. // {
  2164. // Thread.Sleep(200);
  2165. // break;
  2166. // }
  2167. // Thread.Sleep(200);
  2168. // iSEM.SetMagnification(set);
  2169. // Thread.Sleep(200);
  2170. //}
  2171. //if (m_measureFile.MParam.SampleName == "2")
  2172. //{
  2173. // //窗口对焦
  2174. // iSEM.SetReduced1(340, 1, 340, 256);
  2175. // Thread.Sleep(200);
  2176. // iSEM.CmdFocusRate();
  2177. // Thread.Sleep(200);
  2178. // cycle_time = iSEM.GetCycleTime();
  2179. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2180. // //自动对焦
  2181. // if (!ImageFocus1(false))
  2182. // {
  2183. // return false;
  2184. // }
  2185. // //恢复全屏
  2186. // iSEM.CloseReduced();
  2187. // Thread.Sleep(200);
  2188. // cycle_time = iSEM.GetCycleTime();
  2189. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2190. //}
  2191. //else
  2192. //{
  2193. // //窗口对焦
  2194. // //iSEM.SetReduced(402, 128, 800, 600);
  2195. // //Thread.Sleep(200);
  2196. // iSEM.CmdFocusRate();
  2197. // Thread.Sleep(200);
  2198. // cycle_time = iSEM.GetCycleTime();
  2199. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2200. // //自动对焦
  2201. // if (!ImageFocus1(false))
  2202. // {
  2203. // return false;
  2204. // }
  2205. // //恢复全屏
  2206. // //iSEM.CloseReduced();
  2207. // //Thread.Sleep(200);
  2208. // cycle_time = iSEM.GetCycleTime();
  2209. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2210. //}
  2211. LogManager.AddHardwareLog("========测量线程:进入内部观察,不对焦!", true);
  2212. //增亮图像
  2213. iSEM.SetAutoVideoOff();
  2214. Thread.Sleep(200);
  2215. float currentBright = iSEM.GetBrightness();
  2216. Thread.Sleep(200);
  2217. float currentContrast = iSEM.GetContrast();
  2218. Thread.Sleep(200);
  2219. iSEM.SetBrightness(currentBright + 2);
  2220. Thread.Sleep(200);
  2221. iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
  2222. Thread.Sleep(200);
  2223. }
  2224. #endregion
  2225. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  2226. if((m_measureFile.MParam.SampleName=="3")&&(n==0))
  2227. {
  2228. if (!GetImageFromSEM(mag[n]/2))
  2229. LogManager.AddHardwareLog("测量线程报错:第一个区域放大一半倍数" + (mag[n]/2).ToString() + "控制失败", true);
  2230. }
  2231. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  2232. #region 拍照
  2233. if (!iSEM.SetMagnification(mag[n]))
  2234. {
  2235. arg.State = false;
  2236. arg.Message = "移动到第一个点位置拍照失败";
  2237. SendMsg("1-35");
  2238. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2239. return false;
  2240. }
  2241. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成!", true);
  2242. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2243. set = mag[n];
  2244. current = iSEM.GetMagnification();
  2245. while (Math.Abs(current - set) > 1)
  2246. {
  2247. iSEM.SetMagnification(set);
  2248. Thread.Sleep(200);
  2249. current = iSEM.GetMagnification();
  2250. }
  2251. //获取像素大小
  2252. lsize.Add(iSEM.GetPixelSize());
  2253. Thread.Sleep(200);
  2254. String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2255. arg.Picture_Information.Picture_FullPath = fileName7;
  2256. arg.Picture_Information.Work_Status = "SEM";
  2257. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2258. Thread.Sleep(200);
  2259. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2260. Thread.Sleep(200);
  2261. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2262. Thread.Sleep(200);
  2263. //拍照前改变速度,延时
  2264. iSEM.CmdLineScan();
  2265. Thread.Sleep(200);
  2266. cycle_time = iSEM.GetCycleTime();
  2267. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2268. if (!GetImage(fileName7))
  2269. {
  2270. arg.State = false;
  2271. arg.Message = "移动到第一个点位置失败";
  2272. SendMsg("1-35");
  2273. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2274. return false;
  2275. }
  2276. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  2277. iSEM.CmdPixelScan();
  2278. Thread.Sleep(200);
  2279. limg_path.Add(fileName7);
  2280. arg.Picture_Information.Picture_FullPath = fileName7;
  2281. arg.State = true;
  2282. arg.Message = "移动到第一个点位置拍照成功";
  2283. SendMsg("1-35");
  2284. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2285. Thread.Sleep(200);
  2286. cycle_time = iSEM.GetCycleTime();
  2287. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2288. #endregion
  2289. }
  2290. #endregion
  2291. if (hand_intervene == 1)
  2292. {
  2293. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2294. }
  2295. }
  2296. else
  2297. {
  2298. if (hand_intervene == 1)
  2299. {
  2300. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2301. {
  2302. // return false;
  2303. }
  2304. }
  2305. else
  2306. {
  2307. //return false;
  2308. }
  2309. arg.State = false;
  2310. arg.Message = "获取位置及放大倍数失败";
  2311. SendMsg("1-34");
  2312. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2313. }
  2314. //判断是否停止进程
  2315. if (key_stop)
  2316. {
  2317. LogManager.AddHardwareLog("停止键按下", true);
  2318. return false;
  2319. }
  2320. }
  2321. ////14光束复位和Rotation关闭开关
  2322. //arg.Message = "光束复位成功";
  2323. //arg.State = true;
  2324. //SendMsg("1-36");
  2325. iSEM.SetTiltAngleOff();
  2326. Thread.Sleep(200);
  2327. iSEM.SetScanRotationOff();
  2328. Thread.Sleep(200);
  2329. iSEM.SetBeamShiftX(0);
  2330. Thread.Sleep(200);
  2331. iSEM.SetBeamShiftY(0);
  2332. Thread.Sleep(200);
  2333. //判断是否停止进程
  2334. if (key_stop)
  2335. {
  2336. return false;
  2337. }
  2338. return true;
  2339. }
  2340. //第一个孔的测试过程
  2341. public bool FirstHole()
  2342. {
  2343. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2344. LogManager.AddHardwareLog("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2345. if (!SetVoltageAndIPROBE())
  2346. {
  2347. LogManager.AddHardwareLog("测量线程:第一孔=====设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2348. return false;
  2349. }
  2350. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2351. //设置拉直的放大倍数
  2352. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), true);
  2353. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2354. {
  2355. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), false);
  2356. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2357. arg.State = false;
  2358. SendMsg("1-1");
  2359. return false;
  2360. }
  2361. float current = iSEM.GetMagnification();
  2362. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2363. {
  2364. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2365. Thread.Sleep(200);
  2366. current = iSEM.GetMagnification();
  2367. }
  2368. arg.Message = "拉直放大倍数设置成功!";
  2369. arg.State = true;
  2370. SendMsg("1-1");
  2371. Thread.Sleep(2000);
  2372. //自动化流程-每个点都需要补偿54度
  2373. if (m_measureFile.MParam.Is_Photograph == false)
  2374. {
  2375. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2376. if (!TiltCorrection(54.0f))
  2377. {
  2378. LogManager.AddHardwareLog("测量线程报错:倾斜补偿角度为54度失败", false);
  2379. arg.Message = "角度补偿54度失败!";
  2380. arg.State = false;
  2381. SendMsg("1-2");
  2382. return false;
  2383. }
  2384. arg.Message = "角度补偿54度成功!";
  2385. arg.State = true;
  2386. SendMsg("1-2");
  2387. Thread.Sleep(1000);
  2388. //判断是否停止进程
  2389. if (key_stop)
  2390. {
  2391. LogManager.AddHardwareLog("停止键按下", true);
  2392. return false;
  2393. }
  2394. }
  2395. // 2是5/6类样品,不需要拉直
  2396. if (m_measureFile.MParam.SampleName != "2")
  2397. {
  2398. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2399. if (!Straighten_Handle())
  2400. {
  2401. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2402. return false;
  2403. }
  2404. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2405. //判断是否停止进程
  2406. if (key_stop)
  2407. {
  2408. LogManager.AddHardwareLog("停止键按下。", true);
  2409. return false;
  2410. }
  2411. }
  2412. else
  2413. {
  2414. arg.Message = "拉直操作自动对焦成功!";
  2415. arg.State = true;
  2416. SendMsg("1-3");
  2417. Thread.Sleep(1000);
  2418. arg.Message = "拉直拍照成功!";
  2419. arg.Picture_Information.Picture_FullPath = "";
  2420. arg.State = true;
  2421. SendMsg("1-4");
  2422. Thread.Sleep(1000);
  2423. arg.Message = "拉直操作完成";
  2424. arg.State = true;
  2425. SendMsg("1-5");
  2426. Thread.Sleep(1000);
  2427. }
  2428. //13. 自动 定位功能
  2429. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2430. if (!GetPoistion())
  2431. {
  2432. LogManager.AddHardwareLog("测量线程报错:自动定位失败,程序退出。", false);
  2433. return false;
  2434. }
  2435. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2436. //判断是否停止进程
  2437. if (key_stop)
  2438. {
  2439. LogManager.AddHardwareLog("停止键按下。", true);
  2440. return false;
  2441. }
  2442. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2443. //if (m_measureFile.MParam.Is_Photograph == false)
  2444. //{
  2445. // LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!", true);
  2446. // if (!FIBCross())
  2447. // {
  2448. // LogManager.AddHardwareLog("测量线程报错:自动控制FIB切割失败。", false);
  2449. // return false;
  2450. // }
  2451. // LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2452. //}
  2453. //del by sun 2020-12-15 temp end
  2454. //判断是否停止进程
  2455. if (key_stop)
  2456. {
  2457. return false;
  2458. }
  2459. //16.找到切割位置
  2460. if (m_measureFile.MParam.Is_Photograph == false)
  2461. {
  2462. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2463. if (!FindCross())
  2464. {
  2465. return false;
  2466. }
  2467. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2468. //判断是否停止进程
  2469. if (key_stop)
  2470. {
  2471. return false;
  2472. }
  2473. }
  2474. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2475. //将过程17最后的拍照图片提出给18步进行调用
  2476. List<String> limg_path = new List<string>();
  2477. List<float> lsize = new List<float>();
  2478. //17.自动控制SEM拍截面照
  2479. if (!ShotSection(ref limg_path, ref lsize))
  2480. {
  2481. //return false;
  2482. }
  2483. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2484. //判断是否停止进程
  2485. if (key_stop)
  2486. {
  2487. return false;
  2488. }
  2489. //这段是临时的
  2490. //arg.State = true;
  2491. //arg.Message = "测量尺寸成功";
  2492. //SendMsg("1-40");
  2493. //18.自动层高分析
  2494. if (m_measureFile.MParam.Is_Photograph == false)
  2495. {
  2496. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2497. float size = iSEM.GetPixelSize();
  2498. int state = 1;
  2499. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2500. if (state == 0)
  2501. {
  2502. arg.Message = "测量尺寸失败";
  2503. arg.State = false;
  2504. SendMsg("1-40");
  2505. return false;
  2506. }
  2507. arg.State = true;
  2508. arg.Message = "测量尺寸成功";
  2509. SendMsg("1-40");
  2510. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2511. }
  2512. //19.能谱分析
  2513. if (m_measureFile.MParam.EDS)
  2514. {
  2515. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析开始===" + m_measureFile.MParam.EDS, true);
  2516. EDSAnalysis();
  2517. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析结束===" + m_measureFile.MParam.EDS, true);
  2518. }
  2519. //20.复位
  2520. LogManager.AddHardwareLog("===========测量线程:20.复位开始", true);
  2521. BeamShiftReset();
  2522. return true;
  2523. }
  2524. //非第一个孔的测试过程
  2525. public bool OtherHole()
  2526. {
  2527. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2528. LogManager.AddHardwareLog("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2529. if (!SetVoltageAndIPROBE())
  2530. {
  2531. LogManager.AddHardwareLog("测量线程:非第一孔==设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2532. return false;
  2533. }
  2534. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2535. //设置拉直的放大倍数
  2536. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2537. {
  2538. LogManager.AddHardwareLog("拉直放大倍数设置失败,程序退出。", true);
  2539. arg.Message = "拉直放大倍数设置失败!";
  2540. arg.State = false;
  2541. SendMsg("1-1");
  2542. return false;
  2543. }
  2544. float current = iSEM.GetMagnification();
  2545. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2546. {
  2547. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2548. Thread.Sleep(200);
  2549. current = iSEM.GetMagnification();
  2550. }
  2551. arg.Message = "拉直放大倍数设置成功!";
  2552. arg.State = true;
  2553. SendMsg("1-1");
  2554. Thread.Sleep(2000);
  2555. //自动化流程-每个点都需要补偿54度
  2556. if (m_measureFile.MParam.Is_Photograph == false)
  2557. {
  2558. if (!TiltCorrection(54.0f))
  2559. {
  2560. arg.Message = "角度补偿54度失败!";
  2561. arg.State = false;
  2562. SendMsg("1-2");
  2563. return false;
  2564. }
  2565. arg.Message = "角度补偿54度成功!";
  2566. arg.State = true;
  2567. SendMsg("1-2");
  2568. Thread.Sleep(2000);
  2569. //判断是否停止进程
  2570. if (key_stop)
  2571. {
  2572. return false;
  2573. }
  2574. }
  2575. if (m_measureFile.MParam.SampleName != "2")
  2576. {
  2577. if (!Straighten_Handle())
  2578. {
  2579. LogManager.AddHardwareLog("测量线程报错:拉直操作失败。", true);
  2580. return false;
  2581. }
  2582. //判断是否停止进程
  2583. if (key_stop)
  2584. {
  2585. LogManager.AddHardwareLog("停止键按下。", true);
  2586. return false;
  2587. }
  2588. }
  2589. else
  2590. {
  2591. arg.Message = "拉直操作自动对焦成功!";
  2592. arg.State = true;
  2593. SendMsg("1-3");
  2594. Thread.Sleep(1000);
  2595. arg.Message = "拉直拍照成功!";
  2596. arg.Picture_Information.Picture_FullPath = "";
  2597. arg.State = true;
  2598. SendMsg("1-4");
  2599. Thread.Sleep(1000);
  2600. arg.Message = "拉直操作完成";
  2601. arg.State = true;
  2602. SendMsg("1-5");
  2603. }
  2604. //13. 自动 定位功能
  2605. if (!GetPoistion())
  2606. {
  2607. return false;
  2608. }
  2609. //判断是否停止进程
  2610. if (key_stop)
  2611. {
  2612. return false;
  2613. }
  2614. //14.自动控制FIB切割
  2615. if (m_measureFile.MParam.Is_Photograph == false)
  2616. {
  2617. if (!FIBCross())
  2618. {
  2619. return false;
  2620. }
  2621. }
  2622. //判断是否停止进程
  2623. if (key_stop)
  2624. {
  2625. return false;
  2626. }
  2627. // 16.找到切割位置
  2628. if (m_measureFile.MParam.Is_Photograph == false)
  2629. {
  2630. if (!FindCross())
  2631. {
  2632. return false;
  2633. }
  2634. //判断是否停止进程
  2635. if (key_stop)
  2636. {
  2637. return false;
  2638. }
  2639. }
  2640. //将过程17最后的拍照图片提出给18步进行调用
  2641. List<String> limg_path = new List<string>();
  2642. List<float> lsize = new List<float>();
  2643. //17.自动控制SEM拍截面照
  2644. if (!ShotSection(ref limg_path, ref lsize))
  2645. {
  2646. //return false;
  2647. }
  2648. //判断是否停止进程
  2649. if (key_stop)
  2650. {
  2651. return false;
  2652. }
  2653. //这段是临时的
  2654. //arg.State = true;
  2655. //arg.Message = "测量尺寸成功";
  2656. //SendMsg("1-40");
  2657. //18.自动层高分析
  2658. if (m_measureFile.MParam.Is_Photograph == false)
  2659. {
  2660. float size = iSEM.GetPixelSize();
  2661. int state = 1;
  2662. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2663. if (state == 0)
  2664. {
  2665. arg.Message = "测量尺寸失败";
  2666. arg.State = false;
  2667. SendMsg("1-40");
  2668. return false;
  2669. }
  2670. arg.State = true;
  2671. arg.Message = "测量尺寸成功";
  2672. SendMsg("1-40");
  2673. }
  2674. //19.能谱分析
  2675. if (m_measureFile.MParam.EDS)
  2676. {
  2677. EDSAnalysis();
  2678. }
  2679. //20.复位 del by sun 2020-12-15
  2680. //BeamShiftReset();
  2681. //del by sun 2020-12-15 end
  2682. return true;
  2683. }
  2684. //测试完第一个孔后的样品台初始化操作。
  2685. //再调用CommonWork执行非第一个孔的测试过程
  2686. public bool OtherHole_Init()
  2687. {
  2688. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2689. #region 初始化
  2690. //1、不只拍照,且不是倾斜观测,则移动T轴
  2691. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2692. {
  2693. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2694. if (!iSEM.SetStageGotoT(0))
  2695. {
  2696. LogManager.AddHardwareLog("样品台归零失败", false);
  2697. return false;
  2698. }
  2699. while (true)
  2700. {
  2701. Thread.Sleep(5000);
  2702. if (iSEM.GetStageIs() == 0)
  2703. {
  2704. break;
  2705. }
  2706. }
  2707. //判断是否停止进程
  2708. if (key_stop)
  2709. {
  2710. LogManager.AddHardwareLog("停止键按下", true);
  2711. return false;
  2712. }
  2713. }
  2714. //2、如果是倾斜观测,则移动Z轴
  2715. if(m_measureFile.MParam.Title==true)
  2716. {
  2717. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2718. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_measureFile.MParam.ZDistance/1000))
  2719. //20201109, Z轴降到安全的位置上
  2720. if(!iSEM.SetStageGotoZ(fSateyZ))
  2721. {
  2722. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2723. return false;
  2724. }
  2725. while (true)
  2726. {
  2727. Thread.Sleep(5000);
  2728. if (iSEM.GetStageIs() == 0)
  2729. {
  2730. break;
  2731. }
  2732. }
  2733. //判断是否停止进程
  2734. if (key_stop)
  2735. {
  2736. LogManager.AddHardwareLog("停止键按下", true);
  2737. return false;
  2738. }
  2739. }
  2740. //3. 根据光镜坐标控制样品台移动
  2741. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2742. {
  2743. //SendMsg("移动失败");
  2744. LogManager.AddHardwareLog("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2745. return false;
  2746. }
  2747. LogManager.AddHardwareLog("移动R轴到="+ currentHole.Position.R.ToString(), true);
  2748. while (true)
  2749. {
  2750. Thread.Sleep(5000);
  2751. if (iSEM.GetStageIs() == 0)
  2752. {
  2753. break;
  2754. }
  2755. }
  2756. //判断是否停止进程
  2757. if (key_stop)
  2758. {
  2759. LogManager.AddHardwareLog("停止键按下", true);
  2760. return false;
  2761. }
  2762. if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2763. {
  2764. //SendMsg("移动失败");
  2765. LogManager.AddHardwareLog("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString()+"," +currentHole.Position.X.ToString()+")", false);
  2766. return false;
  2767. }
  2768. LogManager.AddHardwareLog("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2769. while (true)
  2770. {
  2771. Thread.Sleep(10000);
  2772. if (iSEM.GetStageIs() == 0)
  2773. {
  2774. break;
  2775. }
  2776. }
  2777. //判断是否停止进程
  2778. if (key_stop)
  2779. {
  2780. LogManager.AddHardwareLog("停止键按下", true);
  2781. return false;
  2782. }
  2783. //4、倾斜观测时恢复Z轴
  2784. if (m_measureFile.MParam.Title == true)
  2785. {
  2786. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2787. if (currentHole.Position.Z > 0.043)
  2788. {
  2789. LogManager.AddHardwareLog("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2790. return false;
  2791. }
  2792. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2793. {
  2794. LogManager.AddHardwareLog("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2795. return false;
  2796. }
  2797. while (true)
  2798. {
  2799. Thread.Sleep(5000);
  2800. if (iSEM.GetStageIs() == 0)
  2801. {
  2802. break;
  2803. }
  2804. }
  2805. //判断是否停止进程
  2806. if (key_stop)
  2807. {
  2808. LogManager.AddHardwareLog("停止键按下", true);
  2809. return false;
  2810. }
  2811. }
  2812. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2813. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2814. {
  2815. if (!iSEM.SetStageGotoT(54))
  2816. {
  2817. LogManager.AddHardwareLog("测量线程报错:校正54度有误", true);
  2818. return false;
  2819. }
  2820. while (true)
  2821. {
  2822. Thread.Sleep(5000);
  2823. if (iSEM.GetStageIs() == 0)
  2824. {
  2825. break;
  2826. }
  2827. }
  2828. }
  2829. //判断是否停止进程
  2830. if (key_stop)
  2831. {
  2832. LogManager.AddHardwareLog("停止键按下", true);
  2833. return false;
  2834. }
  2835. //4、设置WD
  2836. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2837. Thread.Sleep(1000);
  2838. #endregion
  2839. return true;
  2840. }
  2841. //初始化拉直操作
  2842. public bool Straighten_Handle()
  2843. {
  2844. if (m_measureFile.MParam.Title)
  2845. {
  2846. //倾斜样品台,SEM视野是黑色的
  2847. LogManager.AddHardwareLog("测量线程:恢复到工作位置后重新调亮图像。", true);
  2848. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2849. {
  2850. LogManager.AddHardwareLog("测量线程报错:重新设置到标准工作距离失败。", false);
  2851. return false;
  2852. }
  2853. Thread.Sleep(7000); //自动亮度对比度使用
  2854. }
  2855. //1、自动对焦
  2856. LogManager.AddHardwareLog("测量线程报错:拉直操作前自动对焦开始", true);
  2857. iSEM.SetReduced(402, 128, 340, 256);
  2858. Thread.Sleep(200);
  2859. //add by sun 2020-12-15
  2860. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2861. //add by sun 2020-12-15 end
  2862. Thread.Sleep(200);
  2863. cycle_time = iSEM.GetCycleTime();
  2864. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2865. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2866. float m_TempBrightness = 50.0f;
  2867. float m_TempContrast = 30.0f;
  2868. if (m_measureFile.MParam.SampleName == "3")
  2869. {
  2870. m_TempBrightness = 48.0f;
  2871. m_TempContrast = 29.0f;
  2872. }
  2873. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2874. iSEM.SetAutoVideoOff();
  2875. Thread.Sleep(200);
  2876. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2877. Thread.Sleep(200);
  2878. iSEM.SetContrast(m_TempContrast);//30.0f
  2879. Thread.Sleep(200);
  2880. if (!ImageFocus1(false))
  2881. {
  2882. LogManager.AddHardwareLog("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2883. arg.Message = "拉直操作自动对焦失败!";
  2884. arg.State = false;
  2885. SendMsg("1-3");
  2886. return false;
  2887. }
  2888. iSEM.CloseReduced();
  2889. Thread.Sleep(200);
  2890. cycle_time = iSEM.GetCycleTime();
  2891. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2892. iSEM.SetAutoVideoBrightnessAndContrast();
  2893. Thread.Sleep(5000);
  2894. arg.Message = "拉直操作自动对焦成功!";
  2895. arg.State = true;
  2896. SendMsg("1-3");
  2897. //判断是否停止进程
  2898. if (key_stop)
  2899. {
  2900. LogManager.AddHardwareLog("停止键按下。", true);
  2901. return false;
  2902. }
  2903. //2、拍张照片
  2904. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2905. LogManager.AddHardwareLog("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2906. //拍照前改变速度,延时
  2907. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2908. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2909. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2910. Thread.Sleep(200);
  2911. cycle_time = iSEM.GetCycleTime();
  2912. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2913. if (!GetImage(fileName0))
  2914. {
  2915. LogManager.AddHardwareLog("测量线程报错:拉直拍照失败", false);
  2916. arg.Message = "拉直拍照失败";
  2917. arg.State = false;
  2918. SendMsg("1-4");
  2919. return false;
  2920. }
  2921. arg.Message = "拉直拍照成功!";
  2922. arg.Picture_Information.Picture_FullPath = fileName0;
  2923. arg.State = true;
  2924. SendMsg("1-4");
  2925. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2926. Thread.Sleep(200);
  2927. cycle_time = iSEM.GetCycleTime();
  2928. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2929. //3、华为接口,获取旋转角度
  2930. float degree = 0;
  2931. int direction = 0;
  2932. int state = 1;
  2933. wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  2934. LogManager.AddHardwareLog("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  2935. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2936. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2937. if (state == 0)
  2938. {
  2939. LogManager.AddHardwareLog("测量线程:图像处理接口参数state返回为零" ,false);
  2940. arg.Message = "图像处理接口参数state返回为零";
  2941. arg.State = false;
  2942. SendMsg("1-5");
  2943. if (hand_intervene == 1)
  2944. {
  2945. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2946. {
  2947. return false;
  2948. }
  2949. }
  2950. else
  2951. {
  2952. return false;
  2953. }
  2954. return false;
  2955. }
  2956. if (direction == 2)
  2957. {
  2958. degree = -degree;
  2959. }
  2960. if (degree != 0)
  2961. {
  2962. //4、拉直,旋转R轴
  2963. LogManager.AddHardwareLog("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  2964. //选择之前,先降Z轴
  2965. float Zpos = iSEM.GetStageAtZ();
  2966. Thread.Sleep(200);
  2967. LogManager.AddHardwareLog("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  2968. if (!iSEM.SetStageGotoZ(fSateyZ))
  2969. {
  2970. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2971. return false;
  2972. }
  2973. while (true)
  2974. {
  2975. Thread.Sleep(4000);
  2976. if (iSEM.GetStageIs() == 0)
  2977. {
  2978. break;
  2979. }
  2980. }
  2981. //判断是否停止进程
  2982. if (key_stop)
  2983. {
  2984. LogManager.AddHardwareLog("停止键按下", true);
  2985. return false;
  2986. }
  2987. iSEM.SetStageDeltaR(degree);
  2988. while (true)
  2989. {
  2990. Thread.Sleep(4000);
  2991. if (iSEM.GetStageIs() == 0)
  2992. {
  2993. break;
  2994. }
  2995. }
  2996. if (!iSEM.SetStageGotoZ(Zpos))
  2997. {
  2998. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2999. return false;
  3000. }
  3001. while (true)
  3002. {
  3003. Thread.Sleep(4000);
  3004. if (iSEM.GetStageIs() == 0)
  3005. {
  3006. break;
  3007. }
  3008. }
  3009. //判断是否停止进程
  3010. if (key_stop)
  3011. {
  3012. LogManager.AddHardwareLog("停止键按下", true);
  3013. return false;
  3014. }
  3015. //4、设置WD
  3016. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3017. Thread.Sleep(1000);
  3018. }
  3019. arg.Message = "拉直操作完成";
  3020. arg.State = true;
  3021. SendMsg("1-5");
  3022. return true;
  3023. }
  3024. //角度补偿
  3025. public bool TiltCorrection(float a_fAngle)
  3026. {
  3027. if (!iSEM.SetTiltAngleOn())
  3028. {
  3029. return false;
  3030. }
  3031. Thread.Sleep(200);
  3032. //恢复原始状态
  3033. if (!iSEM.SetTiltAngle(a_fAngle))
  3034. {
  3035. return false;
  3036. }
  3037. return true;
  3038. }
  3039. //拍图
  3040. public bool GetImage(String a_fileName)
  3041. {
  3042. LogManager.AddHardwareLog("获取分辨率开始!", true);
  3043. //3. 获取分辨率
  3044. int[] ImageSize = iSEM.GetImageStore();
  3045. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3046. {
  3047. return false;
  3048. }
  3049. short width = (short)ImageSize[0];
  3050. short height = (short)ImageSize[1];
  3051. LogManager.AddHardwareLog("获取分辨率结束!"+ a_fileName +"===="+ width+ "*"+height, true);
  3052. //4. 抓图
  3053. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  3054. {
  3055. LogManager.AddHardwareLog("抓图失败!", true);
  3056. return false;
  3057. }
  3058. return true;
  3059. }
  3060. //拍图1
  3061. public bool GetImage1(String a_fileName)
  3062. {
  3063. //3. 获取分辨率
  3064. int[] ImageSize = iSEM.GetImageStore();
  3065. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3066. {
  3067. return false;
  3068. }
  3069. short width = (short)ImageSize[0];
  3070. short height = (short)ImageSize[1];
  3071. //4. 抓图
  3072. if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
  3073. {
  3074. return false;
  3075. }
  3076. return true;
  3077. }
  3078. #region 算法设计
  3079. //执行自动对焦
  3080. public bool ImageFocus()
  3081. {
  3082. if (m_measureFile.MParam.FocusMode == 1)//手动
  3083. {
  3084. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3085. {
  3086. }
  3087. else
  3088. {
  3089. return false;
  3090. }
  3091. }
  3092. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3093. {
  3094. //郝工增加自动对焦算法
  3095. //处理文件夹
  3096. if (Directory.Exists(focus_path))
  3097. {
  3098. Directory.Delete(focus_path, true);
  3099. }
  3100. Thread.Sleep(3000);
  3101. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3102. Thread.Sleep(1000);
  3103. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3104. Thread.Sleep(1000);
  3105. //再创建文件夹
  3106. Directory.CreateDirectory(focus_path);
  3107. //1、对焦参数类,2、输出工作距离
  3108. int wd = 0;
  3109. //20201015 根据当前的工作距离重新计算对焦位置
  3110. float currentWd = iSEM.GetWorkingDistance();
  3111. //m_measureFile.MParam.AutoFocus.UP = currentWd * 1000000 - m_measureFile.MParam.AutoFocus.Step;
  3112. //m_measureFile.MParam.AutoFocus.Down = currentWd * 1000000 + m_measureFile.MParam.AutoFocus.Step;
  3113. Thread.Sleep(2000);
  3114. float currentMag = iSEM.GetMagnification();
  3115. Thread.Sleep(2000);
  3116. FocusParam pFoucs = new FocusParam();
  3117. if (currentMag <= m_measureFile.MParam.Photograph_Magnification)
  3118. {
  3119. pFoucs = m_measureFile.MParam.AutoFocus;
  3120. pFoucs.UP = 5050;
  3121. pFoucs.Down = 5150;
  3122. pFoucs.Step = 50;
  3123. pFoucs.fStep = 10;
  3124. pFoucs.Range = 50;
  3125. //4、设置WD
  3126. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3127. Thread.Sleep(1000);
  3128. }
  3129. else
  3130. {
  3131. pFoucs = m_measureFile.MParam.AutoFocus;
  3132. pFoucs.UP = 5000;
  3133. pFoucs.Down = 5200;
  3134. pFoucs.Step = 10;
  3135. pFoucs.fStep = 5;
  3136. pFoucs.Range = 50;
  3137. //4、设置WD
  3138. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3139. Thread.Sleep(1000);
  3140. }
  3141. //LogManager.AddHardwareLog("修改对焦参数", true);
  3142. AutoFocus(pFoucs, out wd);
  3143. LogManager.AddHardwareLog("自动调节算法输出"+ (wd * 0.00000001).ToString(), true);
  3144. //设置工作距离
  3145. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  3146. //设置完工作距离后必须延迟5秒
  3147. Thread.Sleep(5000);
  3148. //处理图片位置
  3149. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3150. }
  3151. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3152. {
  3153. //后期和客户对接接口
  3154. List<string> filenames = new List<string>();
  3155. String retfilename = wr.Img_Auto_Focus(filenames);
  3156. }
  3157. else //蔡司自动对焦
  3158. {
  3159. iSEM.CmdAutoFocusCoarse();
  3160. while (true)
  3161. {
  3162. Thread.Sleep(10000);
  3163. if (0 == iSEM.GetAutoFunction())
  3164. {
  3165. break;
  3166. }
  3167. }
  3168. iSEM.CmdAutoFocusFine();
  3169. while (true)
  3170. {
  3171. Thread.Sleep(10000);
  3172. if (0 == iSEM.GetAutoFunction())
  3173. {
  3174. break;
  3175. }
  3176. }
  3177. }
  3178. return true;
  3179. }
  3180. //执行自动对焦
  3181. public bool ImageFocus1(Boolean Is_Stig)
  3182. {
  3183. if (m_measureFile.MParam.FocusMode == 1)//手动
  3184. {
  3185. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3186. {
  3187. }
  3188. else
  3189. {
  3190. return false;
  3191. }
  3192. }
  3193. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3194. {
  3195. #region 执行蔡司自动对焦程序
  3196. //服务地址
  3197. string snumstr = @"http://192.168.1.101:8123";
  3198. // 调用方法;只对焦不消像散
  3199. if (Is_Stig)
  3200. {
  3201. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);
  3202. if (focusstig != "success")
  3203. {
  3204. LogManager.AddHardwareLog("对焦失败" + focusstig , true);
  3205. return false;
  3206. }
  3207. }
  3208. else
  3209. {
  3210. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);
  3211. if (onlyfocus != "success")
  3212. {
  3213. return false;
  3214. }
  3215. }
  3216. #endregion
  3217. }
  3218. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3219. {
  3220. //后期和客户对接接口
  3221. List<string> filenames = new List<string>();
  3222. String retfilename = wr.Img_Auto_Focus(filenames);
  3223. }
  3224. else //蔡司自动对焦
  3225. {
  3226. iSEM.CmdAutoFocusCoarse();
  3227. while (true)
  3228. {
  3229. Thread.Sleep(10000);
  3230. if (0 == iSEM.GetAutoFunction())
  3231. {
  3232. break;
  3233. }
  3234. }
  3235. iSEM.CmdAutoFocusFine();
  3236. while (true)
  3237. {
  3238. Thread.Sleep(10000);
  3239. if (0 == iSEM.GetAutoFunction())
  3240. {
  3241. break;
  3242. }
  3243. }
  3244. }
  3245. return true;
  3246. }
  3247. //执行自动消像散
  3248. public bool ImageStig()
  3249. {
  3250. if (m_measureFile.MParam.FocusMode == 1)//手动
  3251. {
  3252. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3253. {
  3254. }
  3255. else
  3256. {
  3257. return false;
  3258. }
  3259. }
  3260. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3261. {
  3262. //郝工增加自动对焦算法
  3263. //处理文件夹
  3264. if (Directory.Exists(StigX_path))
  3265. {
  3266. Directory.Delete(StigX_path, true);
  3267. }
  3268. Thread.Sleep(3000);
  3269. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3270. Thread.Sleep(1000);
  3271. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3272. Thread.Sleep(1000);
  3273. //再创建文件夹
  3274. Directory.CreateDirectory(StigX_path);
  3275. //1、对焦参数类,2、输出像散值
  3276. int stigX = 0;
  3277. //根据当前的stigX重新计算像散值
  3278. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3279. //m_measureFile.MParam.AutoStigX.Step = 10; //像散的步长为10
  3280. //m_measureFile.MParam.AutoStigX.UP = currentStigX - m_measureFile.MParam.AutoStigX.Step;
  3281. //m_measureFile.MParam.AutoStigX.Down = currentStigX + m_measureFile.MParam.AutoStigX.Step;
  3282. //设置工作距离
  3283. iSEM.SetAstigmatismX((float)0);
  3284. //设置完工作距离后必须延迟5秒
  3285. Thread.Sleep(5000);
  3286. //LogManager.AddHardwareLog("修改消像散参数", true);
  3287. AutoStig(m_measureFile.MParam.AutoStigX, out stigX);
  3288. LogManager.AddHardwareLog("自动消散算法输出X"+ (stigX * 0.01).ToString(), true);
  3289. //设置工作距离
  3290. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3291. //设置完工作距离后必须延迟5秒
  3292. Thread.Sleep(5000);
  3293. //处理图片位置
  3294. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3295. //处理文件夹
  3296. if (Directory.Exists(StigY_path))
  3297. {
  3298. Directory.Delete(StigY_path, true);
  3299. }
  3300. Thread.Sleep(3000);
  3301. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3302. Thread.Sleep(1000);
  3303. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3304. Thread.Sleep(1000);
  3305. //再创建文件夹
  3306. Directory.CreateDirectory(StigY_path);
  3307. //1、对焦参数类,2、输出像散值
  3308. int stigY = 0;
  3309. //根据当前的stigX重新计算像散值
  3310. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3311. //m_measureFile.MParam.AutoStigY.Step = 10; //像散的步长为10
  3312. //m_measureFile.MParam.AutoStigY.UP = m_measureFile.MParam.AutoStigY.;
  3313. //m_measureFile.MParam.AutoStigY.Down = m_measureFile.MParam.AutoStigY.Step;
  3314. iSEM.SetAstigmatismY((float)0);
  3315. Thread.Sleep(2000);
  3316. LogManager.AddHardwareLog("修改消像散参数", true);
  3317. AutoStig(m_measureFile.MParam.AutoStigY, out stigY);
  3318. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3319. //设置工作距离
  3320. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3321. //设置完工作距离后必须延迟5秒
  3322. Thread.Sleep(5000);
  3323. }
  3324. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3325. {
  3326. //后期和客户对接接口
  3327. List<string> filenames = new List<string>();
  3328. String retfilename = wr.Img_Auto_Focus(filenames);
  3329. }
  3330. else //蔡司自动对焦
  3331. {
  3332. iSEM.CmdAutoFocusCoarse();
  3333. while (true)
  3334. {
  3335. Thread.Sleep(10000);
  3336. if (0 == iSEM.GetAutoFunction())
  3337. {
  3338. break;
  3339. }
  3340. }
  3341. iSEM.CmdAutoFocusFine();
  3342. while (true)
  3343. {
  3344. Thread.Sleep(10000);
  3345. if (0 == iSEM.GetAutoFunction())
  3346. {
  3347. break;
  3348. }
  3349. }
  3350. }
  3351. return true;
  3352. }
  3353. //自动聚焦
  3354. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  3355. {
  3356. a_nWd = 0;
  3357. float wd = iSEM.GetWorkingDistance();
  3358. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3359. if (a_param == null)
  3360. {
  3361. LogManager.AddHardwareLog("空参数", true);
  3362. return false;
  3363. }
  3364. string path = a_param.Path;
  3365. if (!Directory.Exists(path))
  3366. {
  3367. LogManager.AddHardwareLog("文件夹丢失", true);
  3368. return false;
  3369. }
  3370. string path_coarse = a_param.Path + "\\Coarse";
  3371. if (!Directory.Exists(path_coarse))
  3372. {
  3373. Directory.CreateDirectory(path_coarse);
  3374. }
  3375. string path_fine = a_param.Path + "\\Fine";
  3376. if (!Directory.Exists(path_fine))
  3377. {
  3378. Directory.CreateDirectory(path_fine);
  3379. }
  3380. //1. 拍照
  3381. //1.1, 粗拍照
  3382. //1.1.1, 根据参数计算拍照次数
  3383. double nUp = a_param.UP * 100.0 ;
  3384. double nDown = a_param.Down * 100.0;
  3385. double nStep = a_param.Step * 100.0;
  3386. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3387. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3388. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3389. //粗拍照
  3390. for (int i = 0; i < nTimes; i++)
  3391. {
  3392. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  3393. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3394. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3395. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3396. int swd = cWd / 100;
  3397. //SendMsg("wd = " + swd.ToString() +"um");
  3398. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3399. arg.Picture_Information.Picture_FullPath = fileName;
  3400. if (!GetImage(fileName))
  3401. {
  3402. return false;
  3403. }
  3404. //arg.State = true;
  3405. //arg.Message = "自动对焦";
  3406. //SendMsg("0-9");
  3407. //判断是否停止进程
  3408. if (key_stop)
  3409. {
  3410. return false;
  3411. }
  3412. //Thread.Sleep(3000);
  3413. }
  3414. //1.2, 选定细拍照的工作距离
  3415. int CorWd = 510000;
  3416. ChooseBest(path_coarse,out CorWd);
  3417. if (CorWd == -1)
  3418. CorWd = 510000;
  3419. else
  3420. a_nWd = CorWd;
  3421. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3422. //1.3, 细拍照
  3423. if ( (CorWd - a_param.Range * 100.0) <=0)
  3424. {
  3425. return false;
  3426. }
  3427. double nfUp = CorWd - a_param.Range * 100.0;
  3428. double nfStep = a_param.fStep * 100.0;
  3429. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3430. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3431. for (int i = 0; i < nfTimes; i++)
  3432. {
  3433. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3434. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3435. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3436. Thread.Sleep(Convert.ToInt32(cycle_time)+100);
  3437. int swd = cWd / 100;
  3438. //SendMsg("wd = " + swd.ToString() + "um");
  3439. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3440. arg.Picture_Information.Picture_FullPath = fileName;
  3441. if (!GetImage(fileName))
  3442. {
  3443. return false;
  3444. }
  3445. //arg.State = true;
  3446. //arg.Message = "自动对焦";
  3447. //SendMsg("0-9");
  3448. //判断是否停止进程
  3449. if (key_stop)
  3450. {
  3451. return false;
  3452. }
  3453. //Thread.Sleep(2000);
  3454. }
  3455. int fineWd = CorWd;
  3456. ChooseBest(path_fine, out fineWd);
  3457. //SendMsg("wd fine max = " + fineWd.ToString());
  3458. if (fineWd == -1)
  3459. a_nWd = CorWd;
  3460. else
  3461. a_nWd = fineWd;
  3462. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3463. //arg.State = true;
  3464. //arg.Message = "自动对焦";
  3465. //SendMsg(step_code);
  3466. return true;
  3467. }
  3468. //自动聚焦1
  3469. public bool AutoFocus1(FocusParam a_param, out int a_nWd)
  3470. {
  3471. a_nWd = 0;
  3472. float wd = iSEM.GetWorkingDistance();
  3473. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3474. if (a_param == null)
  3475. {
  3476. LogManager.AddHardwareLog("空参数", true);
  3477. return false;
  3478. }
  3479. string path = a_param.Path;
  3480. if (!Directory.Exists(path))
  3481. {
  3482. LogManager.AddHardwareLog("文件夹丢失", true);
  3483. return false;
  3484. }
  3485. string path_coarse = a_param.Path + "\\Coarse";
  3486. if (!Directory.Exists(path_coarse))
  3487. {
  3488. Directory.CreateDirectory(path_coarse);
  3489. }
  3490. string path_fine = a_param.Path + "\\Fine";
  3491. if (!Directory.Exists(path_fine))
  3492. {
  3493. Directory.CreateDirectory(path_fine);
  3494. }
  3495. //1. 拍照
  3496. //1.1, 粗拍照
  3497. //1.1.1, 根据参数计算拍照次数
  3498. double nUp = a_param.UP * 100.0;
  3499. double nDown = a_param.Down * 100.0;
  3500. double nStep = a_param.Step * 100.0;
  3501. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3502. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3503. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3504. //粗拍照
  3505. for (int i = 0; i < nTimes; i++)
  3506. {
  3507. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3508. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3509. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3510. Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
  3511. int swd = cWd / 100;
  3512. //SendMsg("wd = " + swd.ToString() +"um");
  3513. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3514. //arg.Picture_Information.Picture_FullPath = fileName;
  3515. if (!GetImage1(fileName))
  3516. {
  3517. return false;
  3518. }
  3519. //arg.State = true;
  3520. //arg.Message = "自动对焦";
  3521. //SendMsg(step_code);
  3522. //判断是否停止进程
  3523. if (key_stop)
  3524. {
  3525. return false;
  3526. }
  3527. //Thread.Sleep(3000);
  3528. }
  3529. //1.2, 选定细拍照的工作距离
  3530. int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3531. ChooseBest(path_coarse, out CorWd);
  3532. if (CorWd == -1)
  3533. CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3534. else
  3535. a_nWd = CorWd;
  3536. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3537. //1.3, 细拍照
  3538. if ((CorWd - a_param.Range * 100.0) <= 0)
  3539. {
  3540. return false;
  3541. }
  3542. double nfUp = CorWd - a_param.Range * 100.0;
  3543. double nfStep = a_param.fStep * 100.0;
  3544. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3545. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3546. for (int i = 0; i < nfTimes; i++)
  3547. {
  3548. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3549. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3550. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3551. Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
  3552. int swd = cWd / 100;
  3553. //SendMsg("wd = " + swd.ToString() + "um");
  3554. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3555. //arg.Picture_Information.Picture_FullPath = fileName;
  3556. if (!GetImage1(fileName))
  3557. {
  3558. return false;
  3559. }
  3560. //arg.State = true;
  3561. //arg.Message = "自动对焦";
  3562. //SendMsg(step_code);
  3563. //判断是否停止进程
  3564. if (key_stop)
  3565. {
  3566. return false;
  3567. }
  3568. //Thread.Sleep(2000);
  3569. }
  3570. int fineWd = CorWd;
  3571. ChooseBest(path_fine, out fineWd);
  3572. //SendMsg("wd fine max = " + fineWd.ToString());
  3573. if (fineWd == -1)
  3574. a_nWd = CorWd;
  3575. else
  3576. a_nWd = fineWd;
  3577. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3578. //arg.State = true;
  3579. //arg.Message = "自动对焦";
  3580. //SendMsg("0-9");
  3581. return true;
  3582. }
  3583. //自动消像散 AutoStig
  3584. public bool AutoStig(FocusParam a_param, out int a_nWd)
  3585. {
  3586. a_nWd = 0;
  3587. float wd = 0;
  3588. if (a_param.TYPE == 2)
  3589. {
  3590. wd = iSEM.GetAstigmatismX();
  3591. }
  3592. else if (a_param.TYPE == 3)
  3593. {
  3594. wd = iSEM.GetAstigmatismY();
  3595. }
  3596. else
  3597. {
  3598. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3599. return false;
  3600. }
  3601. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3602. if (a_param == null)
  3603. {
  3604. LogManager.AddHardwareLog("空参数", true);
  3605. return false;
  3606. }
  3607. string path = a_param.Path;
  3608. if (!Directory.Exists(path))
  3609. {
  3610. LogManager.AddHardwareLog("文件夹丢失", true);
  3611. return false;
  3612. }
  3613. string path_coarse = a_param.Path + "\\Coarse";
  3614. if (!Directory.Exists(path_coarse))
  3615. {
  3616. Directory.CreateDirectory(path_coarse);
  3617. }
  3618. string path_fine = a_param.Path + "\\Fine";
  3619. if (!Directory.Exists(path_fine))
  3620. {
  3621. Directory.CreateDirectory(path_fine);
  3622. }
  3623. //1. 拍照
  3624. //1.1, 粗拍照
  3625. //1.1.1, 根据参数计算拍照次数
  3626. double nUp = a_param.UP * 100.0;
  3627. double nDown = a_param.Down * 100.0;
  3628. double nStep = a_param.Step * 100.0;
  3629. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3630. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3631. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3632. //粗拍照
  3633. for (int i = 0; i < nTimes; i++)
  3634. {
  3635. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3636. if (a_param.TYPE == 2)
  3637. {
  3638. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3639. }
  3640. else if (a_param.TYPE == 3)
  3641. {
  3642. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3643. }
  3644. else
  3645. {
  3646. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3647. return false;
  3648. }
  3649. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3650. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3651. int swd = cWd / 100;
  3652. //SendMsg("wd = " + swd.ToString() +"um");
  3653. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3654. arg.Picture_Information.Picture_FullPath = fileName;
  3655. if (!GetImage(fileName))
  3656. {
  3657. return false;
  3658. }
  3659. arg.State = true;
  3660. arg.Message = "自动像散";
  3661. SendMsg("0-8");
  3662. //判断是否停止进程
  3663. if (key_stop)
  3664. {
  3665. return false;
  3666. }
  3667. //Thread.Sleep(3000);
  3668. }
  3669. //1.2, 选定细拍照的工作距离
  3670. int CorWd;
  3671. ChooseBest(path_coarse, out CorWd);
  3672. if (CorWd == -1)
  3673. {
  3674. a_nWd = 0;
  3675. }
  3676. else
  3677. {
  3678. a_nWd = CorWd;
  3679. }
  3680. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3681. //1.3, 细拍照
  3682. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3683. {
  3684. return false;
  3685. }
  3686. double nfUp = 0;
  3687. if (a_param.Range >= 0)
  3688. nfUp = CorWd - a_param.Range * 100.0;
  3689. else
  3690. nfUp = CorWd + a_param.Range * 100.0;
  3691. double nfStep = a_param.fStep * 100.0;
  3692. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3693. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3694. for (int i = 0; i < nfTimes; i++)
  3695. {
  3696. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3697. if (a_param.TYPE == 2)
  3698. {
  3699. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3700. }
  3701. else if (a_param.TYPE == 3)
  3702. {
  3703. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3704. }
  3705. else
  3706. {
  3707. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3708. return false;
  3709. }
  3710. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3711. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3712. int swd = cWd / 100;
  3713. //SendMsg("wd = " + swd.ToString() + "um");
  3714. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3715. arg.Picture_Information.Picture_FullPath = fileName;
  3716. if (!GetImage(fileName))
  3717. {
  3718. return false;
  3719. }
  3720. arg.State = true;
  3721. arg.Message = "自动像散";
  3722. SendMsg("0-8");
  3723. //判断是否停止进程
  3724. if (key_stop)
  3725. {
  3726. return false;
  3727. }
  3728. //Thread.Sleep(2000);
  3729. }
  3730. int fineWd = CorWd;
  3731. ChooseBest(path_fine, out fineWd);
  3732. //SendMsg("wd fine max = " + fineWd.ToString());
  3733. if(fineWd == -1)
  3734. a_nWd = CorWd;
  3735. else
  3736. a_nWd = fineWd;
  3737. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3738. //arg.State = true;
  3739. //arg.Message = "自动像散";
  3740. //SendMsg(step_code);
  3741. return true;
  3742. }
  3743. //执行自动消像散1
  3744. public bool ImageStig1()
  3745. {
  3746. if (m_measureFile.MParam.FocusMode == 1)//手动
  3747. {
  3748. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3749. {
  3750. }
  3751. else
  3752. {
  3753. return false;
  3754. }
  3755. }
  3756. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3757. {
  3758. //郝工增加自动对焦算法
  3759. //处理文件夹
  3760. if (Directory.Exists(StigX_path))
  3761. {
  3762. Directory.Delete(StigX_path, true);
  3763. }
  3764. Thread.Sleep(3000);
  3765. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3766. Thread.Sleep(200);
  3767. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3768. Thread.Sleep(200);
  3769. //再创建文件夹
  3770. Directory.CreateDirectory(StigX_path);
  3771. //1、对焦参数类,2、输出像散值
  3772. int stigX = 0;
  3773. //根据当前的stigX重新计算像散值
  3774. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3775. //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
  3776. //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
  3777. //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
  3778. //设置工作距离
  3779. currentStigX = iSEM.GetAstigmatismX();
  3780. Thread.Sleep(1000);
  3781. FocusParam pFocus = new FocusParam();
  3782. pFocus = m_measureFile.MParam.AutoStigX;
  3783. float old_up = m_measureFile.MParam.AutoStigX.UP;
  3784. float old_down = m_measureFile.MParam.AutoStigX.Down;
  3785. float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3786. pFocus.UP = currentStigX - setvalue;
  3787. pFocus.Down = currentStigX + setvalue;
  3788. //m_measureFile.MParam.AutoStigX.Step = 1;
  3789. //m_measureFile.MParam.AutoStigX.Range = (float)0.5;
  3790. //m_measureFile.MParam.AutoStigX.fStep = (float)0.1;
  3791. LogManager.AddHardwareLog("消像散参数: up = "+pFocus.UP+",down = " + pFocus.Down+ ",step =" + pFocus.Step + ",rang ="+ pFocus.Range + ",fstep = " + pFocus.fStep, true);
  3792. //LogManager.AddHardwareLog("修改消像散参数", true);
  3793. AutoStig1(pFocus, out stigX);
  3794. m_measureFile.MParam.AutoStigX.UP = old_up;
  3795. m_measureFile.MParam.AutoStigX.Down = old_down;
  3796. LogManager.AddHardwareLog("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3797. //设置工作距离
  3798. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3799. //设置完工作距离后必须延迟5秒
  3800. Thread.Sleep(5000);
  3801. //处理图片位置
  3802. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3803. //处理文件夹
  3804. if (Directory.Exists(StigY_path))
  3805. {
  3806. Directory.Delete(StigY_path, true);
  3807. }
  3808. Thread.Sleep(3000);
  3809. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3810. Thread.Sleep(200);
  3811. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3812. Thread.Sleep(200);
  3813. //再创建文件夹
  3814. Directory.CreateDirectory(StigY_path);
  3815. //1、对焦参数类,2、输出像散值
  3816. int stigY = 0;
  3817. //根据当前的stigX重新计算像散值
  3818. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3819. //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
  3820. //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
  3821. //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
  3822. currentStigY = iSEM.GetAstigmatismY();
  3823. Thread.Sleep(1000);
  3824. //m_measureFile.MParam.AutoStigY.UP = currentStigY - setvalue;
  3825. //m_measureFile.MParam.AutoStigY.Down = currentStigY + setvalue;
  3826. //m_measureFile.MParam.AutoStigY.Step = 1;
  3827. //m_measureFile.MParam.AutoStigY.Range = (float)0.5;
  3828. //m_measureFile.MParam.AutoStigY.fStep = (float)0.1;
  3829. FocusParam pFocusY = new FocusParam();
  3830. pFocusY = m_measureFile.MParam.AutoStigY;
  3831. float old_upY = m_measureFile.MParam.AutoStigY.UP;
  3832. float old_downY = m_measureFile.MParam.AutoStigY.Down;
  3833. //float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3834. pFocusY.UP = currentStigY - setvalue;
  3835. pFocusY.Down = currentStigY + setvalue;
  3836. LogManager.AddHardwareLog("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
  3837. AutoStig1(pFocusY, out stigY);
  3838. m_measureFile.MParam.AutoStigY.UP = old_upY;
  3839. m_measureFile.MParam.AutoStigY.Down = old_downY;
  3840. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3841. //设置工作距离
  3842. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3843. //设置完工作距离后必须延迟5秒
  3844. Thread.Sleep(5000);
  3845. }
  3846. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3847. {
  3848. //后期和客户对接接口
  3849. List<string> filenames = new List<string>();
  3850. String retfilename = wr.Img_Auto_Focus(filenames);
  3851. }
  3852. else //蔡司自动对焦
  3853. {
  3854. iSEM.CmdAutoFocusCoarse();
  3855. while (true)
  3856. {
  3857. Thread.Sleep(10000);
  3858. if (0 == iSEM.GetAutoFunction())
  3859. {
  3860. break;
  3861. }
  3862. }
  3863. iSEM.CmdAutoFocusFine();
  3864. while (true)
  3865. {
  3866. Thread.Sleep(10000);
  3867. if (0 == iSEM.GetAutoFunction())
  3868. {
  3869. break;
  3870. }
  3871. }
  3872. }
  3873. return true;
  3874. }
  3875. //自动消像散 AutoStig1
  3876. public bool AutoStig1(FocusParam a_param, out int a_nWd)
  3877. {
  3878. a_nWd = 0;
  3879. float wd = 0;
  3880. if (a_param.TYPE == 2)
  3881. {
  3882. wd = iSEM.GetAstigmatismX();
  3883. }
  3884. else if (a_param.TYPE == 3)
  3885. {
  3886. wd = iSEM.GetAstigmatismY();
  3887. }
  3888. else
  3889. {
  3890. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3891. return false;
  3892. }
  3893. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3894. if (a_param == null)
  3895. {
  3896. LogManager.AddHardwareLog("空参数", true);
  3897. return false;
  3898. }
  3899. string path = a_param.Path;
  3900. if (!Directory.Exists(path))
  3901. {
  3902. LogManager.AddHardwareLog("文件夹丢失", true);
  3903. return false;
  3904. }
  3905. string path_coarse = a_param.Path + "\\Coarse";
  3906. if (!Directory.Exists(path_coarse))
  3907. {
  3908. Directory.CreateDirectory(path_coarse);
  3909. }
  3910. string path_fine = a_param.Path + "\\Fine";
  3911. if (!Directory.Exists(path_fine))
  3912. {
  3913. Directory.CreateDirectory(path_fine);
  3914. }
  3915. //1. 拍照
  3916. //1.1, 粗拍照
  3917. //1.1.1, 根据参数计算拍照次数
  3918. double nUp = a_param.UP * 100.0;
  3919. double nDown = a_param.Down * 100.0;
  3920. double nStep = a_param.Step * 100.0;
  3921. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3922. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3923. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3924. //粗拍照
  3925. for (int i = 0; i < nTimes; i++)
  3926. {
  3927. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3928. if (a_param.TYPE == 2)
  3929. {
  3930. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3931. }
  3932. else if (a_param.TYPE == 3)
  3933. {
  3934. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3935. }
  3936. else
  3937. {
  3938. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3939. return false;
  3940. }
  3941. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3942. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3943. int swd = cWd / 100;
  3944. //SendMsg("wd = " + swd.ToString() +"um");
  3945. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3946. arg.Picture_Information.Picture_FullPath = fileName;
  3947. if (!GetImage1(fileName))
  3948. {
  3949. return false;
  3950. }
  3951. //arg.State = true;
  3952. //arg.Message = "自动像散";
  3953. //SendMsg(step_code);
  3954. //判断是否停止进程
  3955. if (key_stop)
  3956. {
  3957. return false;
  3958. }
  3959. //Thread.Sleep(3000);
  3960. }
  3961. //1.2, 选定细拍照的工作距离
  3962. int CorWd;
  3963. ChooseBest(path_coarse, out CorWd);
  3964. if (CorWd == -1)
  3965. {
  3966. a_nWd = 0;
  3967. }
  3968. else
  3969. {
  3970. a_nWd = CorWd;
  3971. }
  3972. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3973. //1.3, 细拍照
  3974. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3975. {
  3976. return false;
  3977. }
  3978. double nfUp = 0;
  3979. if (a_param.Range >= 0)
  3980. nfUp = CorWd - a_param.Range * 100.0;
  3981. else
  3982. nfUp = CorWd + a_param.Range * 100.0;
  3983. double nfStep = a_param.fStep * 100.0;
  3984. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3985. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3986. for (int i = 0; i < nfTimes; i++)
  3987. {
  3988. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3989. if (a_param.TYPE == 2)
  3990. {
  3991. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3992. }
  3993. else if (a_param.TYPE == 3)
  3994. {
  3995. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3996. }
  3997. else
  3998. {
  3999. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4000. return false;
  4001. }
  4002. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4003. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4004. int swd = cWd / 100;
  4005. //SendMsg("wd = " + swd.ToString() + "um");
  4006. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4007. arg.Picture_Information.Picture_FullPath = fileName;
  4008. if (!GetImage1(fileName))
  4009. {
  4010. return false;
  4011. }
  4012. //arg.State = true;
  4013. //arg.Message = "自动像散";
  4014. //SendMsg(step_code);
  4015. //判断是否停止进程
  4016. if (key_stop)
  4017. {
  4018. return false;
  4019. }
  4020. //Thread.Sleep(2000);
  4021. }
  4022. int fineWd = CorWd;
  4023. ChooseBest(path_fine, out fineWd);
  4024. //SendMsg("wd fine max = " + fineWd.ToString());
  4025. if (fineWd == -1)
  4026. a_nWd = CorWd;
  4027. else
  4028. a_nWd = fineWd;
  4029. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4030. //arg.State = true;
  4031. //arg.Message = "自动像散";
  4032. //SendMsg("0-9");
  4033. return true;
  4034. }
  4035. //自动FIB对焦 AutoFIBFocus
  4036. public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
  4037. {
  4038. a_nWd = 0;
  4039. float wd = 0;
  4040. if (a_param.TYPE == 4)
  4041. {
  4042. wd = iSEM.GetFIBObjectivePotential();
  4043. }
  4044. else
  4045. {
  4046. LogManager.AddHardwareLog("FIB自动聚焦参数设置有误", true);
  4047. return false;
  4048. }
  4049. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  4050. if (a_param == null)
  4051. {
  4052. LogManager.AddHardwareLog("空参数", true);
  4053. return false;
  4054. }
  4055. string path = a_param.Path;
  4056. if (!Directory.Exists(path))
  4057. {
  4058. LogManager.AddHardwareLog("文件夹丢失", true);
  4059. return false;
  4060. }
  4061. string path_coarse = a_param.Path + "\\Coarse";
  4062. if (!Directory.Exists(path_coarse))
  4063. {
  4064. Directory.CreateDirectory(path_coarse);
  4065. }
  4066. string path_fine = a_param.Path + "\\Fine";
  4067. if (!Directory.Exists(path_fine))
  4068. {
  4069. Directory.CreateDirectory(path_fine);
  4070. }
  4071. //1. 拍照
  4072. //1.1, 粗拍照
  4073. //1.1.1, 根据参数计算拍照次数
  4074. double nUp = a_param.UP * 100.0;
  4075. double nDown = a_param.Down * 100.0;
  4076. double nStep = a_param.Step * 100.0;
  4077. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  4078. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  4079. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  4080. //粗拍照
  4081. for (int i = 0; i < nTimes; i++)
  4082. {
  4083. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  4084. if (a_param.TYPE == 4)
  4085. {
  4086. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4087. }
  4088. else
  4089. {
  4090. LogManager.AddHardwareLog("FIB对焦参数设置有误,对焦类型错", true);
  4091. return false;
  4092. }
  4093. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4094. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4095. int swd = cWd / 100;
  4096. //SendMsg("wd = " + swd.ToString() +"um");
  4097. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4098. arg.Picture_Information.Picture_FullPath = fileName;
  4099. if (!GetImage(fileName))
  4100. {
  4101. return false;
  4102. }
  4103. arg.State = true;
  4104. arg.Message = "FIB自动对焦";
  4105. SendMsg(step_code);
  4106. //判断是否停止进程
  4107. if (key_stop)
  4108. {
  4109. return false;
  4110. }
  4111. //Thread.Sleep(3000);
  4112. }
  4113. //1.2, 选定细拍照的工作距离
  4114. int CorWd;
  4115. ChooseBest(path_coarse, out CorWd);
  4116. a_nWd = CorWd;
  4117. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4118. //1.3, 细拍照
  4119. if ((CorWd - a_param.Range * 100.0) <0)
  4120. {
  4121. return false;
  4122. }
  4123. double nfUp = CorWd - a_param.Range * 100.0;
  4124. double nfStep = a_param.fStep * 100.0;
  4125. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4126. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4127. for (int i = 0; i < nfTimes; i++)
  4128. {
  4129. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4130. if (a_param.TYPE == 4)
  4131. {
  4132. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4133. }
  4134. else
  4135. {
  4136. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4137. return false;
  4138. }
  4139. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4140. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4141. int swd = cWd / 100;
  4142. //SendMsg("wd = " + swd.ToString() + "um");
  4143. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4144. arg.Picture_Information.Picture_FullPath = fileName;
  4145. if (!GetImage(fileName))
  4146. {
  4147. return false;
  4148. }
  4149. arg.State = true;
  4150. arg.Message = "FIB自动对焦";
  4151. SendMsg(step_code);
  4152. //判断是否停止进程
  4153. if (key_stop)
  4154. {
  4155. return false;
  4156. }
  4157. //Thread.Sleep(2000);
  4158. }
  4159. int fineWd;
  4160. ChooseBest(path_fine, out fineWd);
  4161. //SendMsg("wd fine max = " + fineWd.ToString());
  4162. a_nWd = fineWd;
  4163. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4164. return true;
  4165. }
  4166. //LoG算子计算
  4167. private double LoGMean(string a_strImgPath)
  4168. {
  4169. //读入Img文件
  4170. if (!File.Exists(a_strImgPath))
  4171. {
  4172. return 0;
  4173. }
  4174. Mat src, gray_src;
  4175. int kernel_size = 3;
  4176. src = Cv2.ImRead(a_strImgPath);
  4177. gray_src = new Mat();
  4178. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4179. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4180. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4181. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4182. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  4183. Cv2.ConvertScaleAbs(src, src);
  4184. //图像的平均灰度
  4185. double meanValue = 0.0;
  4186. meanValue = Cv2.Mean(src)[0];
  4187. return meanValue;
  4188. }
  4189. //梯度计算
  4190. private double Tenengrad(string a_strImgPath)
  4191. {
  4192. //读入Img文件
  4193. if (!File.Exists(a_strImgPath))
  4194. {
  4195. return 0;
  4196. }
  4197. Mat src;
  4198. src = Cv2.ImRead(a_strImgPath);
  4199. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4200. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4201. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4202. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4203. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  4204. //图像的平均灰度
  4205. double meanValue = 0.0;
  4206. meanValue = Cv2.Mean(src)[0];
  4207. return meanValue;
  4208. }
  4209. //梯度计算
  4210. private double TTgrad(string a_strImgPath)
  4211. {
  4212. //读入Img文件
  4213. if (!File.Exists(a_strImgPath))
  4214. {
  4215. return 0;
  4216. }
  4217. Mat src;
  4218. src = Cv2.ImRead(a_strImgPath);
  4219. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4220. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4221. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4222. Mat scalex = new Mat();
  4223. Mat scaley = new Mat();
  4224. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  4225. Cv2.ConvertScaleAbs(src, scalex);
  4226. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  4227. Cv2.ConvertScaleAbs(src, scaley);
  4228. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  4229. //图像的平均灰度
  4230. double meanValue = 0.0;
  4231. meanValue = Cv2.Mean(src)[0];
  4232. return meanValue;
  4233. }
  4234. //三选二算法
  4235. private bool ChooseBest(string a_strImgPath, out int a_nWd)
  4236. {
  4237. a_nWd = -1;
  4238. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  4239. float[] values = new float[files.Length];
  4240. double smax1 = LoGMean(files[0]);
  4241. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  4242. double smax2 = Tenengrad(files[0]);
  4243. int wdmax2 = wdmax1;
  4244. double smax3 = TTgrad(files[0]);
  4245. int wdmax3 = wdmax1;
  4246. int x = 0;
  4247. foreach (var file in files)
  4248. {
  4249. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  4250. double svalue1 = LoGMean(file);
  4251. double svalue2 = Tenengrad(file);
  4252. double svalue3 = TTgrad(file);
  4253. if (smax1 < svalue1)
  4254. {
  4255. smax1 = svalue1;
  4256. wdmax1 = wd;
  4257. }
  4258. if (smax2 < svalue2)
  4259. {
  4260. smax2 = svalue2;
  4261. wdmax2 = wd;
  4262. }
  4263. if (smax3 < svalue3)
  4264. {
  4265. smax3 = svalue3;
  4266. wdmax3 = wd;
  4267. }
  4268. x++;
  4269. }
  4270. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  4271. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  4272. {
  4273. a_nWd = wdmax1;
  4274. //SendMsg("焦距 = " + wdmax1.ToString());
  4275. }
  4276. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  4277. {
  4278. a_nWd = wdmax2;
  4279. //SendMsg("焦距 = " + wdmax2.ToString());
  4280. }
  4281. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  4282. {
  4283. a_nWd = wdmax3;
  4284. //SendMsg("焦距 = " + wdmax3.ToString());
  4285. }
  4286. else
  4287. {
  4288. //SendMsg("对焦失败。");
  4289. return false;
  4290. }
  4291. return true;
  4292. }
  4293. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  4294. bool MoveToPixByMoveStage(float xc, float yc)
  4295. {
  4296. //单位是m/pix
  4297. float XpixSize = iSEM.GetPixelSize();
  4298. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4299. float YpixSize = iSEM.GetPixelSize();///(float)m_measureFile.MParam.PixelSizeCor);
  4300. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4301. Thread.Sleep(500);
  4302. //0:width, 1:height
  4303. int[] imageSize = iSEM.GetImageStore();
  4304. int width = imageSize[0] / 2;
  4305. int height = imageSize[1] / 2;
  4306. LogManager.AddHardwareLog("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4307. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4308. float deltX = (xc - (float)width) * XpixSize;
  4309. float deltY = (yc - (float)height) * YpixSize;
  4310. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4311. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4312. float xpCur = iSEM.GetStageAtX();
  4313. float ypCur = iSEM.GetStageAtY();
  4314. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4315. float xpNew = xpCur - deltX;
  4316. float ypNew = ypCur + deltY;
  4317. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4318. //计算光束偏移值:
  4319. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  4320. {
  4321. LogManager.AddHardwareLog("X方向移动样品台", true);
  4322. if (!iSEM.SetStageGotoX(xpNew))
  4323. {
  4324. return false;
  4325. }
  4326. //判断是否移动完成
  4327. while (true)
  4328. {
  4329. Thread.Sleep(5000);
  4330. if (iSEM.GetStageIs() == 0)
  4331. {
  4332. break;
  4333. }
  4334. }
  4335. }
  4336. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  4337. {
  4338. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4339. if (!iSEM.SetStageGotoY(ypNew))
  4340. {
  4341. return false;
  4342. }
  4343. //判断是否移动完成
  4344. while (true)
  4345. {
  4346. Thread.Sleep(5000);
  4347. if (iSEM.GetStageIs() == 0)
  4348. {
  4349. break;
  4350. }
  4351. }
  4352. }
  4353. return true;
  4354. }
  4355. //移动到像素位置
  4356. bool MoveToPix(float xc, float yc)
  4357. {
  4358. //单位是m/pix
  4359. float XpixSize = iSEM.GetPixelSize();
  4360. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel",true);
  4361. float YpixSize = (XpixSize/(float)m_measureFile.MParam.PixelSizeCor);
  4362. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4363. Thread.Sleep(200);
  4364. //0:width, 1:height
  4365. int[] imageSize = iSEM.GetImageStore();
  4366. int width = imageSize[0]/2;
  4367. int height = imageSize[1]/2;
  4368. LogManager.AddHardwareLog("目标像素是(" + xc.ToString()+ ","+ yc.ToString() + ")", true);
  4369. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4370. float deltX = (xc - (float)width) * XpixSize;
  4371. float deltY = (yc - (float)height) * YpixSize;
  4372. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4373. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4374. float xpCur = iSEM.GetStageAtX();
  4375. Thread.Sleep(200);
  4376. float ypCur = iSEM.GetStageAtY();
  4377. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString()+ "," + ypCur.ToString() + "),单位m", true);
  4378. float xpNew = xpCur - deltX;
  4379. float ypNew = ypCur + deltY;
  4380. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4381. //计算最大偏移量
  4382. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4383. Thread.Sleep(200);
  4384. iSEM.SetBeamShiftX(100);
  4385. Thread.Sleep(200);
  4386. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4387. Thread.Sleep(200);
  4388. iSEM.SetBeamShiftX(beamXCur);
  4389. Thread.Sleep(200);
  4390. //计算光束偏移值:
  4391. float beamX = iSEM.GetBeamOffsetX();
  4392. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4393. beamX = (-deltX + beamX);
  4394. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4395. if( ((beamX <= beamXMax) && (beamX >=0)) ||
  4396. ((beamX >= -beamXMax)&& (beamX < 0)))
  4397. {
  4398. LogManager.AddHardwareLog("X方向移动光束", true);
  4399. float beamXShift = beamX * 100 / beamXMax;
  4400. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  4401. if (!iSEM.SetBeamShiftX(beamXShift))
  4402. //if (!iSEM.SetBeamOffsetX(beamX))
  4403. {
  4404. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4405. return false;
  4406. }
  4407. }
  4408. else if(deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4409. {
  4410. LogManager.AddHardwareLog("X方向移动样品台", true);
  4411. if (!iSEM.SetStageGotoX(xpNew))
  4412. {
  4413. return false;
  4414. }
  4415. //判断是否移动完成
  4416. while (true)
  4417. {
  4418. Thread.Sleep(4000);
  4419. if (iSEM.GetStageIs() == 0)
  4420. {
  4421. break;
  4422. }
  4423. }
  4424. }
  4425. float beamY = iSEM.GetBeamOffsetY();
  4426. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4427. beamY = (-deltY + beamY);
  4428. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4429. //计算最大偏移量
  4430. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4431. Thread.Sleep(200);
  4432. iSEM.SetBeamShiftY(100);
  4433. Thread.Sleep(200);
  4434. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4435. Thread.Sleep(200);
  4436. iSEM.SetBeamShiftY(beamYCur);
  4437. Thread.Sleep(200);
  4438. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  4439. ((beamY >= -beamYMax) && (beamY < 0)))
  4440. {
  4441. LogManager.AddHardwareLog("Y方向移动光束", true);
  4442. float beamYShift = beamY * 100 / beamYMax;
  4443. LogManager.AddHardwareLog("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  4444. //if(!iSEM.SetBeamOffsetY(beamY))
  4445. if (!iSEM.SetBeamShiftY(beamYShift))
  4446. {
  4447. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4448. return false;
  4449. }
  4450. }
  4451. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4452. {
  4453. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4454. if (!iSEM.SetStageGotoY(ypNew))
  4455. {
  4456. return false;
  4457. }
  4458. //判断是否移动完成
  4459. while (true)
  4460. {
  4461. Thread.Sleep(4000);
  4462. if (iSEM.GetStageIs() == 0)
  4463. {
  4464. break;
  4465. }
  4466. }
  4467. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4468. //arg.State = true;
  4469. //SendMsg("1-7");
  4470. }
  4471. return true;
  4472. }
  4473. //自动亮度对比度调节
  4474. //自动亮度对比度
  4475. public bool AutoBC(String step)
  4476. {
  4477. arg.Message = "自动亮度对比度";
  4478. arg.State = true;
  4479. SendMsg("1-10");
  4480. iSEM.SetAutoBright(100);
  4481. iSEM.SetAutoContrast(100);
  4482. //LogManager.AddHardwareLog("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
  4483. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  4484. {
  4485. LogManager.AddHardwareLog("开始设置自动亮度、对比度失败,程序退出。", true);
  4486. return false;
  4487. }
  4488. Thread.Sleep(5000);
  4489. int i = 0;
  4490. float bright = iSEM.GetBrightness();
  4491. float contrast = iSEM.GetContrast();
  4492. //最多调节30s,30s没调节好,认为调节失败
  4493. for (i = 0; i < 5; i++)
  4494. {
  4495. bright = iSEM.GetBrightness();
  4496. contrast = iSEM.GetContrast();
  4497. if ((bright >= 40 && bright <= 60)
  4498. && (contrast >= 35 && contrast <= 40))
  4499. break;
  4500. Thread.Sleep(5000);
  4501. }
  4502. bright = iSEM.GetBrightness();
  4503. contrast = iSEM.GetContrast();
  4504. if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
  4505. && i == 5)
  4506. {
  4507. LogManager.AddHardwareLog("亮度对比度调节时间过长", true);
  4508. return false;
  4509. }
  4510. iSEM.SetAutoBright(100);
  4511. iSEM.SetAutoContrast(100);
  4512. //LogManager.AddHardwareLog("SEM模式自动亮度目标50,自动对比度目标30.", true);
  4513. return true;
  4514. }
  4515. //执行FIB自动对焦,FIBFocus
  4516. //执行自动消像散
  4517. public bool FIBFocus(String step_code)
  4518. {
  4519. if (m_measureFile.MParam.FocusMode == 1)//手动
  4520. {
  4521. if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  4522. {
  4523. }
  4524. else
  4525. {
  4526. return false;
  4527. }
  4528. }
  4529. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  4530. {
  4531. //郝工增加自动对焦算法
  4532. //处理文件夹
  4533. if (Directory.Exists(FIBfocus_path))
  4534. {
  4535. Directory.Delete(FIBfocus_path, true);
  4536. }
  4537. Thread.Sleep(3000);
  4538. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  4539. Thread.Sleep(1000);
  4540. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  4541. Thread.Sleep(1000);
  4542. //再创建文件夹
  4543. Directory.CreateDirectory(FIBfocus_path);
  4544. //1、对焦参数类,2、输出对焦值
  4545. int FIBFocus = 0;
  4546. //根据当前的stigX重新计算像散值
  4547. float currentFIBFocus = iSEM.GetFIBObjectivePotential();
  4548. //m_measureFile.MParam.FIBFocus.Step = 10; //像散的步长为10
  4549. m_measureFile.MParam.FIBFocus.UP = currentFIBFocus - m_measureFile.MParam.FIBFocus.Step;
  4550. m_measureFile.MParam.FIBFocus.Down = currentFIBFocus + m_measureFile.MParam.FIBFocus.Step;
  4551. LogManager.AddHardwareLog("修改FIB自动对焦参数", true);
  4552. AutoFIBFocus(m_measureFile.MParam.FIBFocus, out FIBFocus, step_code);
  4553. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  4554. //设置工作距离
  4555. iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
  4556. //设置完工作距离后必须延迟5秒
  4557. Thread.Sleep(5000);
  4558. //处理图片位置
  4559. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  4560. }
  4561. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  4562. {
  4563. //后期和客户对接接口
  4564. List<string> filenames = new List<string>();
  4565. String retfilename = wr.Img_Auto_Focus(filenames);
  4566. }
  4567. else //蔡司自动对焦
  4568. {
  4569. iSEM.CmdAutoFocusCoarse();
  4570. while (true)
  4571. {
  4572. Thread.Sleep(10000);
  4573. if (0 == iSEM.GetAutoFunction())
  4574. {
  4575. break;
  4576. }
  4577. }
  4578. iSEM.CmdAutoFocusFine();
  4579. while (true)
  4580. {
  4581. Thread.Sleep(10000);
  4582. if (0 == iSEM.GetAutoFunction())
  4583. {
  4584. break;
  4585. }
  4586. }
  4587. }
  4588. return true;
  4589. }
  4590. /// 图像拉直算法
  4591. /// </summary>
  4592. /// <param name="Slope">倾斜角度</param>
  4593. /// <param name="x0">圆心坐标x</param>
  4594. /// <param name="y0">圆心坐标y</param>
  4595. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  4596. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  4597. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  4598. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  4599. /// <returns></returns>
  4600. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  4601. {
  4602. try
  4603. {
  4604. float xr = x1 - x0;//倾斜图到中心的距离差x
  4605. float yr = y1 - y0;//倾斜图到中心的距离差y
  4606. float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  4607. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  4608. float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
  4609. float k_S = k - Slope;//通过夹角差求x2,y2
  4610. //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  4611. //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  4612. float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
  4613. float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
  4614. if (Slope > 0 || Slope < 0)
  4615. {
  4616. Hx = x0 + x2;
  4617. Hy = y0 + y2;
  4618. }
  4619. else
  4620. {
  4621. Hx = 0;
  4622. Hy = 0;
  4623. }
  4624. return true;
  4625. }
  4626. catch (Exception)
  4627. {
  4628. return false;
  4629. }
  4630. }
  4631. // 放大倍数差校正
  4632. public bool MagComp(float oldMag, float newMag)
  4633. {
  4634. //开启电压校正时进行电压校正
  4635. if (m_measureFile.MParam.MagComp)
  4636. {
  4637. int oldLevel = -1, newLevel = -1;
  4638. float deltX = 0, deltY = 0;
  4639. if (oldMag < m_measureFile.MParam.MagRange1)
  4640. {
  4641. oldLevel = 1;
  4642. }
  4643. else if ((oldMag <= m_measureFile.MParam.MagRange2)
  4644. && (oldMag > m_measureFile.MParam.MagRange1))
  4645. {
  4646. oldLevel = 2;
  4647. }
  4648. else if ((oldMag <= m_measureFile.MParam.MagRange3)
  4649. && (oldMag > m_measureFile.MParam.MagRange2))
  4650. {
  4651. oldLevel = 3;
  4652. }
  4653. else if ((oldMag <= m_measureFile.MParam.MagRange4)
  4654. && (oldMag > m_measureFile.MParam.MagRange3))
  4655. {
  4656. oldLevel = 4;
  4657. }
  4658. if (newMag < m_measureFile.MParam.MagRange1)
  4659. {
  4660. newLevel = 1;
  4661. }
  4662. else if ((newMag <= m_measureFile.MParam.MagRange2)
  4663. && (newMag > m_measureFile.MParam.MagRange1))
  4664. {
  4665. newLevel = 2;
  4666. }
  4667. else if ((newMag <= m_measureFile.MParam.MagRange3)
  4668. && (newMag > m_measureFile.MParam.MagRange2))
  4669. {
  4670. newLevel = 3;
  4671. }
  4672. else if ((newMag <= m_measureFile.MParam.MagRange4)
  4673. && (newMag > m_measureFile.MParam.MagRange3))
  4674. {
  4675. newLevel = 4;
  4676. }
  4677. if (oldLevel != newLevel)
  4678. {
  4679. if (oldLevel == 1)
  4680. {
  4681. switch (newLevel)
  4682. {
  4683. case 1:
  4684. break;
  4685. case 2:
  4686. deltX = m_measureFile.MParam.MagCompX1;
  4687. deltY = m_measureFile.MParam.MagCompY1;
  4688. break;
  4689. case 3:
  4690. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2;
  4691. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2;
  4692. break;
  4693. case 4:
  4694. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4695. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4696. break;
  4697. }
  4698. }
  4699. else if (oldLevel == 2)
  4700. {
  4701. switch (newLevel)
  4702. {
  4703. case 1:
  4704. deltX = -m_measureFile.MParam.MagCompX1;
  4705. deltY = -m_measureFile.MParam.MagCompY1;
  4706. break;
  4707. case 2:
  4708. break;
  4709. case 3:
  4710. deltX = m_measureFile.MParam.MagCompX2;
  4711. deltY = m_measureFile.MParam.MagCompY2;
  4712. break;
  4713. case 4:
  4714. deltX = m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4715. deltY = m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4716. break;
  4717. }
  4718. }
  4719. else if (oldLevel == 3)
  4720. {
  4721. switch (newLevel)
  4722. {
  4723. case 1:
  4724. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2;
  4725. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2;
  4726. break;
  4727. case 2:
  4728. deltX = -m_measureFile.MParam.MagCompX2;
  4729. deltY = -m_measureFile.MParam.MagCompY2;
  4730. break;
  4731. case 3:
  4732. break;
  4733. case 4:
  4734. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4735. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompX3;
  4736. break;
  4737. }
  4738. }
  4739. else if (oldLevel == 4)
  4740. {
  4741. switch (newLevel)
  4742. {
  4743. case 1:
  4744. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4745. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4746. break;
  4747. case 2:
  4748. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4749. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4750. break;
  4751. case 3:
  4752. deltX = -m_measureFile.MParam.MagCompX3;
  4753. deltY = -m_measureFile.MParam.MagCompY3;
  4754. break;
  4755. case 4:
  4756. break;
  4757. }
  4758. }
  4759. //通过移动光束校正便宜量
  4760. //单位是m/pix
  4761. float pixSize = iSEM.GetPixelSize();
  4762. LogManager.AddHardwareLog("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
  4763. Thread.Sleep(500);
  4764. float xpCur = iSEM.GetStageAtX();
  4765. float ypCur = iSEM.GetStageAtY();
  4766. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4767. float xpNew = xpCur - deltX;
  4768. float ypNew = ypCur + deltY;
  4769. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4770. //计算最大偏移量
  4771. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4772. iSEM.SetBeamShiftX(100);
  4773. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4774. iSEM.SetBeamShiftX(beamXCur);
  4775. //计算光束偏移值:
  4776. float beamX = iSEM.GetBeamOffsetX();
  4777. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4778. beamX = (-deltX + beamX);
  4779. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4780. if (beamX < beamXMax || beamX < -beamXMax)
  4781. {
  4782. LogManager.AddHardwareLog("X方向移动光束", true);
  4783. float beamXShift = beamX * 100 / beamXMax;
  4784. if (!iSEM.SetBeamShiftX(beamXShift))
  4785. {
  4786. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4787. return false;
  4788. }
  4789. }
  4790. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4791. {
  4792. LogManager.AddHardwareLog("X方向移动样品台", true);
  4793. if (!iSEM.SetStageGotoX(xpNew))
  4794. {
  4795. return false;
  4796. }
  4797. //判断是否移动完成
  4798. while (true)
  4799. {
  4800. Thread.Sleep(5000);
  4801. if (iSEM.GetStageIs() == 0)
  4802. {
  4803. break;
  4804. }
  4805. }
  4806. }
  4807. float beamY = iSEM.GetBeamOffsetY();
  4808. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4809. beamY = (-deltY + beamY);
  4810. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4811. //计算最大偏移量
  4812. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4813. iSEM.SetBeamShiftY(100);
  4814. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4815. iSEM.SetBeamShiftY(beamYCur);
  4816. if (beamY < beamYMax || beamY < -beamYMax)
  4817. {
  4818. LogManager.AddHardwareLog("Y方向移动光束", true);
  4819. float beamYShift = beamY * 100 / beamYMax;
  4820. if (!iSEM.SetBeamShiftY(beamY))
  4821. {
  4822. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4823. return false;
  4824. }
  4825. }
  4826. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4827. {
  4828. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4829. if (!iSEM.SetStageGotoY(ypNew))
  4830. {
  4831. return false;
  4832. }
  4833. //判断是否移动完成
  4834. while (true)
  4835. {
  4836. Thread.Sleep(5000);
  4837. if (iSEM.GetStageIs() == 0)
  4838. {
  4839. break;
  4840. }
  4841. }
  4842. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4843. //arg.State = true;
  4844. //SendMsg("1-7");
  4845. }
  4846. }
  4847. }
  4848. return true;
  4849. }
  4850. #endregion
  4851. #region 测试程序
  4852. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  4853. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  4854. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  4855. //{
  4856. // SendMsg("拍摄照片完成");
  4857. // //return true;
  4858. //}
  4859. //else
  4860. //{
  4861. // SendMsg("拍摄照片失败");
  4862. // return false;
  4863. //}
  4864. //SendMsg("图像校正36度");
  4865. ////3.设置SEM角度补偿cos36度
  4866. //if (!TiltCorrection(36))
  4867. //{
  4868. // return false;
  4869. //}
  4870. //Thread.Sleep(3000);
  4871. //string fn;
  4872. //用宏抓一般图
  4873. //Thread.Sleep(5000);
  4874. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4875. //SendMsg("用宏抓一般图" + fn);
  4876. //iSEM.CMDMCFFilename(fn);
  4877. ////延时1s??
  4878. //Thread.Sleep(5000);
  4879. ////用宏抓好图
  4880. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  4881. //SendMsg("用宏抓好图" + fn);
  4882. //iSEM.CMDMCFFilename(fn);
  4883. ////延时1s??
  4884. //Thread.Sleep(30000);
  4885. //Thread.Sleep(10000);
  4886. //WorkingFolder = m_measureFile.FilePath;
  4887. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  4888. //SendMsg("SEM拍照存储到" + fileName6);
  4889. //if (!GetImage(ImageMode.SEM, fileName6))
  4890. //{
  4891. // SendMsg("SEM拍照失败");
  4892. // return false;
  4893. //}
  4894. ////用宏抓标志图
  4895. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  4896. //SendMsg("用宏抓标志图" + fn);
  4897. //iSEM.CMDMCFFilename(fn);
  4898. ////延时1s??
  4899. //Thread.Sleep(30000);
  4900. //Thread.Sleep(5000);
  4901. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4902. //SendMsg("用宏抓一般图" + fn);
  4903. //iSEM.CMDMCFFilename(fn);
  4904. ////延时1s??
  4905. //Thread.Sleep(5000);
  4906. //SendMsg("所有图结束");
  4907. ////17.自动控制SEM拍截面照
  4908. //{
  4909. // //1.控制SEM放大到指定参数大小范围,6000x
  4910. // if (!iSEM.SetMagnification(6000))
  4911. // {
  4912. // return false;
  4913. // }
  4914. // //2.控制SEM自动对焦、消像散、亮度、对比度
  4915. // if (!MeasParam.FocusMode)
  4916. // {
  4917. // //弹出手动对焦的窗口
  4918. // }
  4919. // else
  4920. // {
  4921. // //调用自动对焦模块
  4922. // }
  4923. // //3.设置SEM角度补偿cos36度
  4924. // if (!TiltCorrection(36))
  4925. // {
  4926. // return false;
  4927. // }
  4928. // //4.控制SEM拍照
  4929. // //5.保存照片4
  4930. // String fileName5 = WorkingFolder + ImageName5;
  4931. // if (!GetImage(ImageMode.SEM, fileName5))
  4932. // {
  4933. // return false;
  4934. // }
  4935. // //6.将照片传给客户,获取偏移坐标
  4936. // float x6 = 0, y6 = 0;
  4937. // float angle1 = 0;
  4938. // float mage = 10000;
  4939. // //7.根据坐标控制SEM移动到分析位置
  4940. // if (!iSEM.MoveStageXY(x6, y6))
  4941. // {
  4942. // return false;
  4943. // }
  4944. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  4945. // float x7 = iSEM.GetStageAtX();
  4946. // float y7 = iSEM.GetStageAtY();
  4947. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  4948. // {
  4949. // return false;
  4950. // }
  4951. // //9.控制SEM平行校正,并记录校正前初始值
  4952. // float foldAnagle = iSEM.GetScanRotation();
  4953. // if (foldAnagle == float.NaN)
  4954. // {
  4955. // return false;
  4956. // }
  4957. // if (!iSEM.SetScanRotation(angle1))
  4958. // {
  4959. // return false;
  4960. // }
  4961. // //10.控制SEM放大到指定参数大小范围
  4962. // if (!iSEM.SetMagnification(mage))
  4963. // {
  4964. // return false;
  4965. // }
  4966. // //11.控制SEM自动对焦、消像散、亮度、对比度
  4967. // if (!MeasParam.FocusMode)
  4968. // {
  4969. // //弹出手动对焦的窗口
  4970. // }
  4971. // else
  4972. // {
  4973. // //调用自动对焦模块
  4974. // }
  4975. // //12.控制SEM对分析位置拍照
  4976. // String fileName6 = WorkingFolder + ImageName6;
  4977. // if (!GetImage(ImageMode.SEM, fileName6))
  4978. // {
  4979. // return false;
  4980. // }
  4981. // //13.保存照片
  4982. // //14.控制SEM取消电子束校正,回到初始值
  4983. // if (!iSEM.SetScanRotation(foldAnagle))
  4984. // {
  4985. // return false;
  4986. // }
  4987. //}
  4988. ////18.自动层高分析
  4989. //{
  4990. // //1.获取SEM Pixel Size给客户传入参数
  4991. // if (iSEM.GetPixelSize() == float.NaN)
  4992. // {
  4993. // return false;
  4994. // }
  4995. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  4996. //}
  4997. ////19.自动能谱分析
  4998. //{
  4999. // //1. 确定能谱位置
  5000. // //2. 控制牛津打能谱
  5001. // //3. 能谱分析——面扫+线扫描
  5002. //}
  5003. #endregion
  5004. #region 能谱所有参数
  5005. //全局只有一个Extender
  5006. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  5007. IExtenderControl iExtender = factoryExtender.IExtender;
  5008. MeasureDB m_MeasDB = null;
  5009. int m_nXrayId = 0;
  5010. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  5011. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  5012. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  5013. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  5014. /// <summary>
  5015. /// 做能谱分析
  5016. /// </summary>
  5017. /// <param name="a_PointNum">分析点ID,索引号</param>
  5018. /// <param name="PointsName">分析点名称</param>
  5019. /// <param name="num">分析点的位置ID</param>
  5020. /// <returns>成功或失败</returns>
  5021. public bool DoEDS(int a_PointNum, string PointsName, int num)
  5022. {
  5023. try
  5024. {
  5025. //XrayID记录
  5026. LogManager.AddHardwareLog("程序进入EDS测量!", true);
  5027. EDSParam param = m_measureFile.MParam.EDSP;
  5028. double dDwellTime = param.DwellTime;
  5029. int nImageType = param.ImageType;
  5030. double dScanSizes = param.ScanSize;
  5031. LogManager.AddHardwareLog("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  5032. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  5033. string path = EDS_path;
  5034. string edsfn = path + "\\" + num.ToString() + "_" + ImageNameEDS;
  5035. LogManager.AddHardwareLog("EDS_PATH=" + edsfn, true);
  5036. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);
  5037. //送给客户,计算感兴趣的区域
  5038. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  5039. List<System.Drawing.Point> listlines = new List<System.Drawing.Point>();
  5040. List<List<Segment>> listFeature = new List<List<Segment>>();
  5041. List<int> lines_height = new List<int>();
  5042. System.Drawing.Point area_pt = new System.Drawing.Point();
  5043. int width = 1;
  5044. int height = 1;
  5045. //点数据
  5046. int state = 0;
  5047. wr.EDS_Param_Points(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listPoints, out state);
  5048. if (state == 0)
  5049. {
  5050. LogManager.AddHardwareLog("点采集失败", true);
  5051. return false;
  5052. }
  5053. //线数据
  5054. LogManager.AddHardwareLog("线扫描", true);
  5055. state = 0;
  5056. wr.EDS_Param_Lines(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listlines, out lines_height, out state);
  5057. LogManager.AddHardwareLog("线返回数据" + listlines[0].X.ToString() + "," + listlines[0].Y.ToString() + ",lines_height=" + lines_height.Count.ToString(), true);
  5058. if (state == 1)
  5059. {
  5060. //将线转换为segment数据
  5061. LogManager.AddHardwareLog("将线转换为segment数据", true);
  5062. List<Segment> segments = new List<Segment>();
  5063. for (int i = 0; i < listlines.Count; i++)
  5064. {
  5065. for (int j = 0; j <= lines_height[i]; j++)
  5066. {
  5067. Segment segment = new Segment();
  5068. segment.X = listlines[0].X;
  5069. segment.Y = listlines[0].Y + j;
  5070. segment.Length = 1;
  5071. segments.Add(segment);
  5072. }
  5073. listFeature.Add(segments);
  5074. }
  5075. LogManager.AddHardwareLog("将线转换为segment数据完成", true);
  5076. }
  5077. else
  5078. {
  5079. LogManager.AddHardwareLog("线采集失败", true);
  5080. return false;
  5081. }
  5082. //面数据
  5083. state = 0;
  5084. wr.EDS_Param_Areas(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out area_pt, out width, out height, out state);
  5085. LogManager.AddHardwareLog("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  5086. if (state == 1)
  5087. {
  5088. //将面转换为segment数据
  5089. LogManager.AddHardwareLog("将面转换为segment数据", true);
  5090. List<Segment> segments = new List<Segment>();
  5091. for (int j = 0; j <= height; j++)
  5092. {
  5093. Segment segment = new Segment();
  5094. segment.X = area_pt.X;
  5095. segment.Y = area_pt.Y + j;
  5096. segment.Length = width;
  5097. segments.Add(segment);
  5098. }
  5099. listFeature.Add(segments);
  5100. LogManager.AddHardwareLog("将面转换为segment数据完成", true);
  5101. }
  5102. else
  5103. {
  5104. LogManager.AddHardwareLog("面采集失败", true);
  5105. return false;
  5106. }
  5107. //存储数据
  5108. //向分析点数据库更新
  5109. LogManager.AddHardwareLog("listPoints=" + listPoints.Count.ToString() + ",listFeature=" + listFeature.Count.ToString(), true);
  5110. if (!m_MeasDB.InsetAPoint(a_PointNum, PointsName, EDS_path, listPoints.Count, listFeature.Count, num))
  5111. {
  5112. LogManager.AddHardwareLog("插入分析点失败", true);
  5113. }
  5114. LogManager.AddHardwareLog("插入分析点成功", true);
  5115. int AreasNo = 0;
  5116. long[] XrayData = new long[2000];
  5117. Dictionary<string, double> listElement = new Dictionary<string, double>();
  5118. //点采集
  5119. foreach (System.Drawing.Point pt in listPoints)
  5120. {
  5121. XrayData = new long[2000];
  5122. listElement = new Dictionary<string, double>();
  5123. //LogManager.AddHardwareLog("点采集开始", true);
  5124. iExtender.XrayPointCollectiong(param.PointTime, pt.X, pt.Y, out XrayData, out listElement);
  5125. //写入数据库
  5126. m_nXrayId++;
  5127. Boolean ret = m_MeasDB.InsertAPointXay(a_PointNum, m_nXrayId, pt.X, pt.Y, XrayData, listElement, num);
  5128. LogManager.AddHardwareLog("点采集结束,写入数据库开始--" + m_nXrayId.ToString() + "," + ret.ToString(), true);
  5129. //LogManager.AddHardwareLog("点采集写入数据库结束", true);
  5130. if (m_nXrayId % 5 == 0)
  5131. {
  5132. Thread.Sleep(5000);
  5133. }
  5134. else
  5135. {
  5136. Thread.Sleep(1000);
  5137. }
  5138. }
  5139. //面采集
  5140. foreach (List<Segment> listSeg in listFeature)
  5141. {
  5142. XrayData = new long[2000];
  5143. listElement = new Dictionary<string, double>();
  5144. LogManager.AddHardwareLog("面采集开始", true);
  5145. LogManager.AddHardwareLog("AreaTime=" + param.AreaTime.ToString(), true);
  5146. iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement);
  5147. LogManager.AddHardwareLog("面采集结束,写入数据库开始", true);
  5148. //写入数据库
  5149. m_nXrayId++;
  5150. AreasNo++;
  5151. m_MeasDB.InsertAAreaXay(a_PointNum, m_nXrayId, AreasNo, listSeg, XrayData, listElement, num);
  5152. LogManager.AddHardwareLog("面采集写入数据库结束", true);
  5153. }
  5154. }
  5155. catch (Exception e)
  5156. {
  5157. LogManager.AddHardwareLog(e.Message, false);
  5158. }
  5159. return true;
  5160. }
  5161. /// <summary>
  5162. /// 初始化数据库
  5163. /// </summary>
  5164. public void Init_MeasDB()
  5165. {
  5166. m_MeasDB = new MeasureDB(m_measureFile);
  5167. }
  5168. /// <summary>
  5169. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  5170. /// </summary>
  5171. /// <returns></returns>
  5172. public bool EDS_FindCross()
  5173. {
  5174. float x2 = 0, y2 = 0;
  5175. int state = 0;
  5176. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5177. float m_TempBrightness = 50.0f;
  5178. float m_TempContrast = 30.0f;
  5179. if (m_measureFile.MParam.SampleName == "3")
  5180. {
  5181. m_TempBrightness = 48.0f;
  5182. m_TempContrast = 29.0f;
  5183. }
  5184. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5185. iSEM.SetAutoVideoOff();
  5186. Thread.Sleep(200);
  5187. iSEM.SetBrightness(m_TempBrightness);//50.0f
  5188. Thread.Sleep(200);
  5189. iSEM.SetContrast(m_TempContrast);//30.0f
  5190. Thread.Sleep(200);
  5191. //1.控制SEM放大到300倍
  5192. float mag = m_measureFile.MParam.Photograph_Magnification / 3;
  5193. if (mag < 200)
  5194. {
  5195. mag = 200;
  5196. }
  5197. if (!iSEM.SetMagnification(mag))
  5198. {
  5199. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  5200. arg.State = false;
  5201. SendMsg("1-24");
  5202. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5203. return false;
  5204. }
  5205. Thread.Sleep(200);
  5206. float current = iSEM.GetMagnification();
  5207. Thread.Sleep(200);
  5208. while (Math.Abs(current - mag) > 2)
  5209. {
  5210. iSEM.SetMagnification(mag);
  5211. Thread.Sleep(200);
  5212. current = iSEM.GetMagnification();
  5213. Thread.Sleep(200);
  5214. }
  5215. Thread.Sleep(2000);
  5216. //判断是否停止进程
  5217. if (key_stop)
  5218. {
  5219. LogManager.AddHardwareLog("停止键按下", true);
  5220. return false;
  5221. }
  5222. //3.控制SEM拍照
  5223. String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
  5224. arg.Picture_Information.Picture_FullPath = fileName4;
  5225. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5226. Thread.Sleep(200);
  5227. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5228. Thread.Sleep(200);
  5229. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5230. Thread.Sleep(200);
  5231. //拍照前改变速度,延时
  5232. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5233. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5234. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5235. Thread.Sleep(200);
  5236. cycle_time = iSEM.GetCycleTime();
  5237. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5238. if (!GetImage(fileName4))
  5239. {
  5240. //arg.State = false;
  5241. //arg.Message = "SEM拍照找切割位置失败";
  5242. //SendMsg("1-25");
  5243. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5244. return false;
  5245. }
  5246. //arg.Picture_Information.Picture_FullPath = fileName4;
  5247. //arg.State = true;
  5248. //arg.Message = "SEM拍照成功";
  5249. //SendMsg("1-25");
  5250. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5251. Thread.Sleep(200);
  5252. cycle_time = iSEM.GetCycleTime();
  5253. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5254. //判断是否停止进程
  5255. if (key_stop)
  5256. {
  5257. return false;
  5258. }
  5259. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  5260. //5.根据坐标控制SEM移动到切孔位置,居中
  5261. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  5262. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  5263. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  5264. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  5265. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  5266. if (state == 1)
  5267. {
  5268. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  5269. if (!MoveToPixByMoveStage(x2, y2))
  5270. {
  5271. //arg.State = false;
  5272. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  5273. //SendMsg("1-26");
  5274. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5275. return false;
  5276. }
  5277. //判断是否移动完成
  5278. while (true)
  5279. {
  5280. Thread.Sleep(4000);
  5281. if (iSEM.GetStageIs() == 0)
  5282. {
  5283. break;
  5284. }
  5285. }
  5286. //arg.State = true;
  5287. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  5288. //SendMsg("1-26");
  5289. //高倍到低倍不进行对焦
  5290. //拍照前改变速度,延时
  5291. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5292. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5293. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5294. Thread.Sleep(200);
  5295. cycle_time = iSEM.GetCycleTime();
  5296. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5297. if (hand_intervene == 1)
  5298. {
  5299. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5300. }
  5301. }
  5302. else
  5303. {
  5304. arg.Message = "图像接口参数state返回值为零";
  5305. arg.State = false;
  5306. SendMsg("1-26");
  5307. if (hand_intervene == 1)
  5308. {
  5309. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5310. {
  5311. return false;
  5312. }
  5313. }
  5314. else
  5315. {
  5316. return false;
  5317. }
  5318. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5319. return false;
  5320. }
  5321. //判断是否停止进程
  5322. if (key_stop)
  5323. {
  5324. LogManager.AddHardwareLog("停止键按下", true);
  5325. return false;
  5326. }
  5327. return true;
  5328. }
  5329. /// <summary>
  5330. /// 171.能谱第17步找点采集数据
  5331. /// </summary>
  5332. /// <returns></returns>
  5333. public bool EDS_ShotSection()
  5334. {
  5335. int state = 0;
  5336. #region 设置拍照的放大倍数
  5337. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  5338. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5339. {
  5340. //arg.Message = "放大倍数调整失败";
  5341. //arg.State = false;
  5342. //SendMsg("1-27");
  5343. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5344. return false;
  5345. }
  5346. float set = m_measureFile.MParam.Photograph_Magnification;
  5347. float current = iSEM.GetMagnification();
  5348. while (Math.Abs(current - set) > 1)
  5349. {
  5350. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  5351. Thread.Sleep(200);
  5352. current = iSEM.GetMagnification();
  5353. }
  5354. //arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString() + "成功";
  5355. //arg.State = true;
  5356. //SendMsg("1-27");
  5357. Thread.Sleep(3000 + (Int32)cycle_time);
  5358. //判断是否停止进程
  5359. if (key_stop)
  5360. {
  5361. LogManager.AddHardwareLog("停止键按下", true);
  5362. return false;
  5363. }
  5364. #endregion
  5365. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  5366. //2.控制SEM自动对焦、亮度、对比度-接口
  5367. iSEM.SetReduced(402, 128, 340, 256);
  5368. Thread.Sleep(200);
  5369. //add by sun 2020-12-15
  5370. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//iSEM.CmdFocusRate(5);//
  5371. //add by sun 2020-12-15 end
  5372. Thread.Sleep(200);
  5373. cycle_time = iSEM.GetCycleTime();
  5374. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5375. if (!iSEM.SetAutoVideoOff())
  5376. {
  5377. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5378. return false;
  5379. }
  5380. Thread.Sleep(5000);
  5381. if (ImageFocus1(false))
  5382. {
  5383. //arg.Message = "自动对焦完成";
  5384. //arg.State = true;
  5385. //SendMsg("1-28");
  5386. }
  5387. else
  5388. {
  5389. //arg.Message = "自动对焦失败";
  5390. //arg.State = false;
  5391. //SendMsg("1-28");
  5392. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5393. return false;
  5394. }
  5395. iSEM.CloseReduced();
  5396. Thread.Sleep(200);
  5397. cycle_time = iSEM.GetCycleTime();
  5398. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  5399. //判断是否停止进程
  5400. if (key_stop)
  5401. {
  5402. LogManager.AddHardwareLog("停止键按下", true);
  5403. return false;
  5404. }
  5405. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5406. {
  5407. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5408. return false;
  5409. }
  5410. Thread.Sleep(5000);
  5411. //3、设置SEM补偿角度
  5412. if (m_measureFile.MParam.Is_Photograph == false)
  5413. {
  5414. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString() + "度", true);
  5415. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  5416. {
  5417. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  5418. //arg.State = false;
  5419. //SendMsg("1-29");
  5420. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5421. return false;
  5422. }
  5423. //arg.State = true;
  5424. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  5425. //SendMsg("1-29");
  5426. Thread.Sleep(200);
  5427. //判断是否停止进程
  5428. if (key_stop)
  5429. {
  5430. LogManager.AddHardwareLog("停止键按下", false);
  5431. return false;
  5432. }
  5433. }
  5434. //4、拍照,5、保存照片
  5435. String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS5;
  5436. arg.Picture_Information.Picture_FullPath = fileName5;
  5437. arg.Picture_Information.Work_Status = "SEM";
  5438. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5439. Thread.Sleep(200);
  5440. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5441. Thread.Sleep(200);
  5442. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5443. Thread.Sleep(200);
  5444. //拍照前改变速度,延时
  5445. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5446. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5447. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5448. Thread.Sleep(200);
  5449. cycle_time = iSEM.GetCycleTime();
  5450. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  5451. if (!GetImage(fileName5))
  5452. {
  5453. //arg.Message = "SEM拍照失败";
  5454. //arg.State = false;
  5455. //SendMsg("1-30");
  5456. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5457. return false;
  5458. }
  5459. //arg.State = true;
  5460. //arg.Message = "SEM拍照成功";
  5461. //SendMsg("1-30");
  5462. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5463. Thread.Sleep(200);
  5464. cycle_time = iSEM.GetCycleTime();
  5465. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5466. //判断是否停止进程
  5467. if (key_stop)
  5468. {
  5469. LogManager.AddHardwareLog("停止键按下", true);
  5470. return false;
  5471. }
  5472. #endregion
  5473. if (m_measureFile.MParam.Is_Photograph == false)
  5474. {
  5475. #region 对当前矩形进行旋转校正
  5476. //8,计算切割面区域偏移角度及方向
  5477. float degree = 0;
  5478. int direction = 0;
  5479. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  5480. LogManager.AddHardwareLog("测量线程:拍照角度移动,输入图像" + ImageNameEDS5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  5481. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  5482. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  5483. if (state == 1)
  5484. {
  5485. //梯形角度
  5486. iSEM.SetScanRotationOn();
  5487. Thread.Sleep(200);
  5488. //20201128陈工要求,谭博返回角度*0.7
  5489. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  5490. Thread.Sleep(200);
  5491. //arg.State = true;
  5492. //arg.Message = "图像接口返回角度为:" + degree.ToString();
  5493. //SendMsg("1-31");
  5494. if (hand_intervene == 1)
  5495. {
  5496. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5497. }
  5498. }
  5499. else
  5500. {
  5501. //arg.Message = "图像接口参数State返回值为零";
  5502. //arg.State = false;
  5503. //SendMsg("1-31");
  5504. if (hand_intervene == 1)
  5505. {
  5506. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5507. {
  5508. return false;
  5509. }
  5510. }
  5511. else
  5512. {
  5513. //return false;
  5514. }
  5515. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5516. }
  5517. //判断是否停止进程
  5518. if (key_stop)
  5519. {
  5520. LogManager.AddHardwareLog("停止键按下", true);
  5521. return false;
  5522. }
  5523. Thread.Sleep(200);
  5524. //12拍照
  5525. String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS6;
  5526. arg.Picture_Information.Picture_FullPath = fileName6;
  5527. arg.Picture_Information.Work_Status = "SEM";
  5528. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5529. Thread.Sleep(200);
  5530. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5531. Thread.Sleep(200);
  5532. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5533. Thread.Sleep(200);
  5534. //拍照前改变速度,延时
  5535. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5536. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5537. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5538. Thread.Sleep(200);
  5539. cycle_time = iSEM.GetCycleTime();
  5540. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5541. if (!GetImage(fileName6))
  5542. {
  5543. //arg.Message = "SEM拍照失败";
  5544. //arg.State = false;
  5545. //SendMsg("1-33");
  5546. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5547. return false;
  5548. }
  5549. //arg.State = true;
  5550. //arg.Message = "SEM拍照成功";
  5551. //SendMsg("1-33");
  5552. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5553. Thread.Sleep(200);
  5554. cycle_time = iSEM.GetCycleTime();
  5555. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5556. //判断是否停止进程
  5557. if (key_stop)
  5558. {
  5559. LogManager.AddHardwareLog("停止键按下", true);
  5560. return false;
  5561. }
  5562. #endregion
  5563. #region 获取两个位置上及放大倍数
  5564. //计算两个测量区域坐标
  5565. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  5566. List<float> mag = new List<float>();
  5567. System.Drawing.Point ct0;
  5568. float magMax = 0;
  5569. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  5570. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  5571. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  5572. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  5573. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  5574. "输入产品" + m_measureFile.MParam.Firm.ToString()
  5575. + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  5576. + "输出放大倍数1" + mag[0]
  5577. + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  5578. + "输出放大倍数2" + mag[0]
  5579. + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  5580. #endregion
  5581. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  5582. {
  5583. //arg.State = true;
  5584. //arg.Message = "获取位置及放大倍数成功";
  5585. //SendMsg("1-34");
  5586. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  5587. float xs = iSEM.GetBeamShiftX();
  5588. Thread.Sleep(200);
  5589. float ys = iSEM.GetBeamShiftY();
  5590. Thread.Sleep(200);
  5591. float xpCur = iSEM.GetStageAtX();
  5592. Thread.Sleep(200);
  5593. float ypCur = iSEM.GetStageAtY();
  5594. Thread.Sleep(200);
  5595. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  5596. + "y=" + ys.ToString() + ","
  5597. + "原来样品台的位置x= " + xpCur.ToString()
  5598. + "y=" + ypCur.ToString(), true);
  5599. #endregion
  5600. #region 移动到梯形左上角
  5601. //找到放大倍数最大值
  5602. magMax = mag[0];
  5603. for (int m = 1; m < mag.Count; m++)
  5604. {
  5605. if (mag[m] > magMax)
  5606. {
  5607. magMax = mag[m];
  5608. }
  5609. }
  5610. //20201127将视野移动到梯形左上角位置
  5611. MoveToPix(ct0.X, ct0.Y);
  5612. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  5613. + "," + ct0.Y.ToString() + ")", true);
  5614. //关闭自动亮度对比度
  5615. iSEM.SetAutoVideoOff();
  5616. Thread.Sleep(2000);
  5617. iSEM.SetReduced(402, 128, 340, 256);
  5618. Thread.Sleep(200);
  5619. //add by sun 2020-12-15
  5620. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5621. //add by sun 2020-12-15 end
  5622. Thread.Sleep(200);
  5623. cycle_time = iSEM.GetCycleTime();
  5624. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5625. //放大到10000倍
  5626. iSEM.SetMagnification(magMax / 2);
  5627. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5628. set = magMax / 2;
  5629. current = iSEM.GetMagnification();
  5630. while (Math.Abs(current - set) > 1)
  5631. {
  5632. iSEM.SetMagnification(set);
  5633. Thread.Sleep(200);
  5634. current = iSEM.GetMagnification();
  5635. }
  5636. //自动对焦
  5637. if (!ImageFocus1(true))
  5638. {
  5639. return false;
  5640. }
  5641. //放大到10000倍
  5642. iSEM.SetMagnification(magMax);
  5643. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5644. set = magMax;
  5645. current = iSEM.GetMagnification();
  5646. while (Math.Abs(current - set) > 1)
  5647. {
  5648. iSEM.SetMagnification(set);
  5649. Thread.Sleep(200);
  5650. current = iSEM.GetMagnification();
  5651. }
  5652. //自动对焦
  5653. if (!ImageFocus1(true))
  5654. {
  5655. return false;
  5656. }
  5657. iSEM.CloseReduced();
  5658. Thread.Sleep(200);
  5659. cycle_time = iSEM.GetCycleTime();
  5660. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5661. #endregion
  5662. #region 恢复到拍照的状态
  5663. iSEM.SetStageGotoX(xpCur);
  5664. while (true)
  5665. {
  5666. Thread.Sleep(4000);
  5667. if (iSEM.GetStageIs() == 0)
  5668. {
  5669. break;
  5670. }
  5671. }
  5672. iSEM.SetStageGotoY(ypCur);
  5673. while (true)
  5674. {
  5675. Thread.Sleep(4000);
  5676. if (iSEM.GetStageIs() == 0)
  5677. {
  5678. break;
  5679. }
  5680. }
  5681. iSEM.CloseReduced();
  5682. Thread.Sleep(200);
  5683. cycle_time = iSEM.GetCycleTime();
  5684. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5685. //增亮图像
  5686. iSEM.SetAutoVideoOff();
  5687. Thread.Sleep(200);
  5688. float currentBright = iSEM.GetBrightness();
  5689. Thread.Sleep(200);
  5690. float currentContrast = iSEM.GetContrast();
  5691. Thread.Sleep(200);
  5692. iSEM.SetBrightness(currentBright + 2);
  5693. Thread.Sleep(200);
  5694. iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
  5695. Thread.Sleep(200);
  5696. #endregion
  5697. #region 循环拍照
  5698. for (int n = 0; n < ct.Count; n++)
  5699. {
  5700. #region 恢复到拍照的状态
  5701. iSEM.SetStageGotoX(xpCur);
  5702. while (true)
  5703. {
  5704. Thread.Sleep(4000);
  5705. if (iSEM.GetStageIs() == 0)
  5706. {
  5707. break;
  5708. }
  5709. }
  5710. iSEM.SetStageGotoY(ypCur);
  5711. while (true)
  5712. {
  5713. Thread.Sleep(4000);
  5714. if (iSEM.GetStageIs() == 0)
  5715. {
  5716. break;
  5717. }
  5718. }
  5719. //恢复原来的放大倍数
  5720. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5721. {
  5722. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5723. return false;
  5724. }
  5725. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5726. set = m_measureFile.MParam.Photograph_Magnification;
  5727. current = iSEM.GetMagnification();
  5728. while (Math.Abs(current - set) > 1)
  5729. {
  5730. iSEM.SetMagnification(set);
  5731. Thread.Sleep(200);
  5732. current = iSEM.GetMagnification();
  5733. }
  5734. //恢复BeamShift的百分比值
  5735. iSEM.SetBeamShiftX(xs);
  5736. Thread.Sleep(200);
  5737. iSEM.SetBeamShiftY(ys);
  5738. Thread.Sleep(200);
  5739. #endregion
  5740. #region 移动到指定点位置
  5741. if (!MoveToPix(ct[n].X, ct[n].Y))
  5742. {
  5743. arg.State = false;
  5744. arg.Message = "移动到第一个点位置失败";
  5745. SendMsg("1-" + (35 + n).ToString());
  5746. //移动到第一个点失败
  5747. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  5748. }
  5749. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  5750. + "," + ct[n].Y.ToString() + ")", true);
  5751. #endregion
  5752. #region 如果是第一个点,则1W倍对焦
  5753. if (n == 0)
  5754. {
  5755. }
  5756. #endregion
  5757. #region 拍照
  5758. if (!iSEM.SetMagnification(mag[n]))
  5759. {
  5760. arg.State = false;
  5761. arg.Message = "移动到第一个点位置拍照失败";
  5762. SendMsg("1-35");
  5763. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5764. return false;
  5765. }
  5766. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5767. set = mag[n];
  5768. current = iSEM.GetMagnification();
  5769. while (Math.Abs(current - set) > 1)
  5770. {
  5771. iSEM.SetMagnification(set);
  5772. Thread.Sleep(200);
  5773. current = iSEM.GetMagnification();
  5774. }
  5775. DoEDS(m_nWorkHoleNo + 1, cutHoles[m_nWorkHoleNo].HoleName, n + 1);
  5776. #endregion
  5777. }
  5778. #endregion
  5779. if (hand_intervene == 1)
  5780. {
  5781. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5782. }
  5783. }
  5784. else
  5785. {
  5786. if (hand_intervene == 1)
  5787. {
  5788. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5789. {
  5790. // return false;
  5791. }
  5792. }
  5793. else
  5794. {
  5795. //return false;
  5796. }
  5797. //arg.State = false;
  5798. //arg.Message = "获取位置及放大倍数失败";
  5799. //SendMsg("1-34");
  5800. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5801. }
  5802. //判断是否停止进程
  5803. if (key_stop)
  5804. {
  5805. LogManager.AddHardwareLog("停止键按下", true);
  5806. return false;
  5807. }
  5808. }
  5809. //判断是否停止进程
  5810. if (key_stop)
  5811. {
  5812. return false;
  5813. }
  5814. return true;
  5815. }
  5816. /// <summary>
  5817. /// 19.能谱分析
  5818. /// </summary>
  5819. /// <returns></returns>
  5820. public bool EDSAnalysis()
  5821. {
  5822. //1.先降Z轴
  5823. if (m_measureFile.MParam.EDSZ < Z_Min || m_measureFile.MParam.EDSZ > Z_Max)
  5824. {
  5825. LogManager.AddHardwareLog("Z轴位置设置超出范围.", true);
  5826. }
  5827. LogManager.AddHardwareLog("将Z轴位置指定到:" + m_measureFile.MParam.EDSZ.ToString(), true);
  5828. //if (!iSEM.SetStageGotoZ(m_measureFile.MParam.EDSZ))
  5829. //{
  5830. // LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  5831. // return false;
  5832. //}
  5833. //设置WD add by sun 2020-12-16 能谱设置工作距离为10mm
  5834. iSEM.SetWorkingDistance(m_measureFile.MParam.EDSZ);
  5835. Thread.Sleep(1000);
  5836. while (true)
  5837. {
  5838. Thread.Sleep(4000);
  5839. if (iSEM.GetStageIs() == 0)
  5840. {
  5841. break;
  5842. }
  5843. }
  5844. //判断是否停止进程
  5845. if (key_stop)
  5846. {
  5847. LogManager.AddHardwareLog("停止键按下", true);
  5848. return false;
  5849. }
  5850. //2.角度改为54度
  5851. iSEM.SetScanRotationOff();
  5852. Thread.Sleep(200);
  5853. //3.设置电压和电流
  5854. iSEM.SetSEMVoltage(m_measureFile.MParam.EDSV);
  5855. Thread.Sleep(2000);
  5856. iSEM.SetSEMIPROBE(m_measureFile.MParam.EDSA);
  5857. Thread.Sleep(500);
  5858. //4.自动亮度对比度
  5859. iSEM.SetAutoBright(100);
  5860. Thread.Sleep(200);
  5861. iSEM.SetAutoContrast(100);
  5862. Thread.Sleep(200);
  5863. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5864. {
  5865. LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  5866. return false;
  5867. }
  5868. Thread.Sleep(5000);
  5869. //5.自动对焦
  5870. iSEM.SetReduced(256, 192, 512, 512);
  5871. Thread.Sleep(200);
  5872. //add by sun 2020-12-15
  5873. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5874. //add by sun 2020-12-15 end
  5875. Thread.Sleep(200);
  5876. cycle_time = iSEM.GetCycleTime();
  5877. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5878. if (!ImageFocus1(false))
  5879. {
  5880. return false;
  5881. }
  5882. iSEM.CloseReduced();
  5883. Thread.Sleep(200);
  5884. cycle_time = iSEM.GetCycleTime();
  5885. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5886. //6.调用161步过程
  5887. if (!EDS_FindCross())
  5888. {
  5889. return false;
  5890. }
  5891. //7.调用171步过程
  5892. if (!EDS_ShotSection())
  5893. {
  5894. return false;
  5895. }
  5896. return true;
  5897. }
  5898. /// <summary>
  5899. /// 20.光束等复位
  5900. /// </summary>
  5901. public void BeamShiftReset()
  5902. {
  5903. iSEM.SetTiltAngleOff();
  5904. Thread.Sleep(200);
  5905. iSEM.SetScanRotationOff();
  5906. Thread.Sleep(200);
  5907. iSEM.SetBeamShiftX(0);
  5908. Thread.Sleep(200);
  5909. iSEM.SetBeamShiftY(0);
  5910. Thread.Sleep(200);
  5911. }
  5912. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  5913. #region 设置电压电流
  5914. public bool SetVoltageAndIPROBE()
  5915. {
  5916. LogManager.AddHardwareLog("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  5917. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  5918. bool mRet_VoltageFlag = false;
  5919. bool mRet_ElecFlag = false;
  5920. if (m_measureFile.MParam.SampleName != "3")
  5921. {
  5922. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  5923. Thread.Sleep(500);
  5924. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  5925. Thread.Sleep(500);
  5926. }
  5927. else
  5928. {
  5929. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  5930. Thread.Sleep(500);
  5931. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  5932. Thread.Sleep(500);
  5933. }
  5934. if (!mRet_VoltageFlag) return false;
  5935. if (!mRet_ElecFlag) return false;
  5936. LogManager.AddHardwareLog("测量线程:设置电压电流完成!" , true);
  5937. return true;
  5938. }
  5939. #endregion
  5940. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  5941. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  5942. #region 拍照
  5943. public bool GetImageFromSEM(float m_Mag) {
  5944. if (!iSEM.SetMagnification(m_Mag))
  5945. {
  5946. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + m_Mag.ToString() + "失败", false);
  5947. return false;
  5948. }
  5949. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成(一半倍数)!", true);
  5950. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5951. String m_FileName = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_Mag.ToString() + "_0_" + ImageNameTwo_1;
  5952. //arg.Picture_Information.Picture_FullPath = m_FileName;
  5953. //arg.Picture_Information.Work_Status = "SEM";
  5954. //arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5955. //Thread.Sleep(200);
  5956. //arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5957. //Thread.Sleep(200);
  5958. //arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5959. //Thread.Sleep(200);
  5960. //拍照前改变速度,延时
  5961. iSEM.CmdLineScan();
  5962. Thread.Sleep(200);
  5963. cycle_time = iSEM.GetCycleTime();
  5964. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5965. if (!GetImage(m_FileName))
  5966. {
  5967. LogManager.AddHardwareLog("测量线程报错:========" + arg.Message, false);
  5968. return false;
  5969. }
  5970. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  5971. return true;
  5972. }
  5973. #endregion
  5974. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  5975. #endregion
  5976. }
  5977. }