Measure.cs 265 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. NLog.Logger log;
  321. #region 变量定义
  322. //Web接口类
  323. public WebResult wr = null;
  324. //SmartSEM远程路径
  325. public String RemoteELYPath = "";
  326. public String RemoteMLFPath = "";
  327. //扫描周期
  328. private float cycle_time = 0;
  329. //人工干预
  330. public int hand_intervene = 2;
  331. //样品台保护值
  332. public float X_Min = 0;
  333. public float X_Max = 0.13f;
  334. public float Y_Min = 0;
  335. public float Y_Max = 0.13f;
  336. public float Z_Min = 0;
  337. public float Z_Max = 0.05f;
  338. public float T_Min = -4;
  339. public float T_Max = 70;
  340. public float R_Min = -380;
  341. public float R_Max = 380;
  342. public float M_Min = 0;
  343. public float M_Max = 0.012f;
  344. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  345. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  346. //定义一个全局的消息类
  347. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  348. //全局只有一个fatorySEM
  349. static FactoryHardware factorySEM = FactoryHardware.Instance;
  350. ISEMControl iSEM = factorySEM.ISEM;
  351. //@的作用是不用转义字符\\只打一个就行
  352. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  354. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  355. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  356. const String ImageName31 = @"FIBBefore.tif";
  357. const String ImageName32 = @"FIBAfter.tif";
  358. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  359. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  360. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  361. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  362. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  364. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  365. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  366. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  367. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  368. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  369. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  370. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  371. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  372. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  373. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  374. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  375. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  376. const String ElyDeposition = @"Deposition.ely"; //沉积
  377. const String ElyCrossSection = @"CrossSection.ely"; //切割
  378. const float fMin = (float)0.0000002; //单位是米
  379. const float fSateyZ = (float)0.03;//单位是米
  380. public Boolean key_stop = false;
  381. String focus_path = "";
  382. String FIBfocus_path = "";
  383. String StigX_path = "";
  384. String StigY_path = "";
  385. String EDS_path = "";
  386. String data_path = "";
  387. int m_nWorkHoleNo = -1;
  388. //测量文件
  389. private MeasureFile m_measureFile;
  390. public MeasureFile MeasureFile
  391. {
  392. get { return this.m_measureFile; }
  393. set { this.m_measureFile = value; }
  394. }
  395. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  396. private List<MeasureData.CutHole> m_cutHoles;
  397. public List<MeasureData.CutHole> cutHoles
  398. {
  399. get { return this.m_cutHoles; }
  400. set { this.m_cutHoles = value; }
  401. }
  402. public MeasureParam MParam//测量参数对象
  403. {
  404. get { return this.m_measureFile.MParam; }
  405. //set { this.m_measureParam = value; }
  406. }
  407. //工作文件夹
  408. private string m_WorkingFolder;
  409. public string WorkingFolder
  410. {
  411. get { return this.m_WorkingFolder; }
  412. set { this.m_WorkingFolder = value; }
  413. }
  414. //程序当前路径
  415. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  416. //线程状态
  417. private ThreadStatus m_ThreadStatus;
  418. public ThreadStatus TStatus
  419. {
  420. get { return this.m_ThreadStatus; }
  421. set { this.m_ThreadStatus = value; }
  422. }
  423. #endregion
  424. //构造函数
  425. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  426. {
  427. log = NLog.LogManager.GetCurrentClassLogger();
  428. TStatus = new ThreadStatus();
  429. cutHoles = new List<MeasureData.CutHole>();
  430. //配置远程连接
  431. wr = new WebResult(webServerIP, webServerPort, webServerUrl);
  432. }
  433. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  434. public bool InitMeas(MeasureFile a_measureFile)
  435. {
  436. log.Info("进入初始化函数");
  437. m_measureFile = a_measureFile;
  438. List<CutHole> listHoles = m_measureFile.ListCutHole;
  439. foreach (CutHole h in listHoles)
  440. {
  441. if (h.SWITCH == true)
  442. {
  443. m_cutHoles.Add(h);
  444. }
  445. }
  446. if (m_cutHoles.Count == 0)
  447. return false;
  448. if (MParam.EDS == true)
  449. {
  450. log.Info("进行能谱分析", true);
  451. Init_MeasDB();
  452. }
  453. return true;
  454. }
  455. //给前台UI发送消息步骤
  456. public void SendMsg(string step_code)
  457. {
  458. arg.Step_Code = step_code;
  459. arg.Time = DateTime.Now;
  460. SendThreadStatus(this, arg);
  461. }
  462. //给前台UI发送孔状态信息
  463. public void SendCutHoleMsg(string a_state, string a_holeName)
  464. {
  465. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  466. arg.HoleName = a_holeName;
  467. arg.State = a_state;
  468. SendCutHolesStatus(this, arg);
  469. }
  470. //测量流程
  471. public void DoMeasure()
  472. {
  473. //创建线程的测量状态的更新
  474. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  475. //检查硬件连接是否正常
  476. log.Warn("测量线程:开始连接硬件...", true);
  477. if (!ConnectHardware())
  478. {
  479. MessageBox.Show("连接电镜失败!", "重要错误", MessageBoxButtons.OK, MessageBoxIcon.Error);
  480. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  481. log.Error("测量线程报错:连接硬件硬件连接失败", false);
  482. return;
  483. }
  484. //设置工作文件夹
  485. SetWorkingFolderStr();
  486. //设置SmartSEM远程路径
  487. iSEM.SetRemoteELYPath(RemoteELYPath);
  488. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  489. //增加EDS控制
  490. //将停止键复位
  491. key_stop = false;
  492. //开始测量就将模式设置为SEM
  493. log.Info("测量线程:开始切换到SEM模式", true);
  494. if (!iSEM.CmdFIBModeSEM())
  495. {
  496. log.Error("测量线程报错:开始切换到SEM模式失败。", false);
  497. return;
  498. }
  499. arg.Picture_Information.Work_Status = "SEM";
  500. //设置扫描周期
  501. log.Info("测量线程:设置电镜图像扫描周期为对焦接口程序适合的扫描周期", true);
  502. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  503. Thread.Sleep(200);
  504. cycle_time = iSEM.GetCycleTime();
  505. if (cycle_time == 0)
  506. {
  507. log.Error("测量线程报错:获取扫描周期时间失败", false);
  508. return;
  509. }
  510. Thread.Sleep((int)cycle_time + 100);
  511. //开始做各个孔的检测
  512. for (int i = 0; i < m_cutHoles.Count; i++)
  513. {
  514. //自动亮度对比度
  515. log.Info("测量线程:开启自动亮度,对比度调节", true);
  516. iSEM.SetAutoBright(100);
  517. Thread.Sleep(200);
  518. iSEM.SetAutoContrast(100);
  519. Thread.Sleep(200);
  520. //log.Info("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  521. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  522. {
  523. log.Error("测量线程报错:开始设置自动亮度、对比度失败。", false);
  524. return;
  525. }
  526. Thread.Sleep(5000);
  527. log.Warn("测量线程:测试第" + i.ToString() + "个分析点。", true);
  528. //记录测量序号和孔名
  529. m_nWorkHoleNo = i;
  530. arg.HoleName = m_cutHoles[i].HoleName;
  531. //最终数据存放目录
  532. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  533. //对焦数据存放目录
  534. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  535. MParam.AutoFocus.Path = focus_path;
  536. if (!Directory.Exists(focus_path))
  537. {
  538. Directory.CreateDirectory(focus_path);
  539. }
  540. //StigX数据存放目录
  541. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  542. MParam.AutoStigX.Path = StigX_path;
  543. if (!Directory.Exists(StigX_path))
  544. {
  545. Directory.CreateDirectory(StigX_path);
  546. }
  547. //StigY数据存放目录
  548. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  549. MParam.AutoStigY.Path = StigY_path;
  550. if (!Directory.Exists(StigY_path))
  551. {
  552. Directory.CreateDirectory(StigY_path);
  553. }
  554. //EDS数据存放路径
  555. if (MParam.EDS == true)
  556. {
  557. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  558. MParam.EDSParam.Path = EDS_path;
  559. if (!Directory.Exists(EDS_path))
  560. {
  561. Directory.CreateDirectory(EDS_path);
  562. }
  563. }
  564. //判断孔状态
  565. if (m_cutHoles[i].STATE != State.Ready)
  566. {
  567. log.Warn("测试孔" + m_cutHoles[i].HoleName + "状态非就绪,不予测量。", true);
  568. continue;
  569. }
  570. //20201127增加Scanrotate Off
  571. iSEM.SetScanRotationOff();
  572. Thread.Sleep(200);
  573. //20.光束等复位
  574. iSEM.SetBeamShiftX(0);
  575. Thread.Sleep(200);
  576. iSEM.SetBeamShiftY(0);
  577. Thread.Sleep(200);
  578. //开始循环工作
  579. if (i == 0)
  580. {
  581. log.Warn("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  582. m_cutHoles[i].START = DateTime.Now;
  583. //切孔操作-开始
  584. m_cutHoles[i].STATE = State.InProcess;
  585. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  586. log.Warn("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  587. + m_cutHoles[0].Position.X.ToString() + ","
  588. + m_cutHoles[0].Position.Y.ToString() + ","
  589. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  590. #region 坐标恢复
  591. //0、先移动Z轴到比较低的位置上。
  592. if (MParam.Tilt)//如果是倾斜样品台,移动Z轴
  593. {
  594. if (!iSEM.SetStageGotoZ(fSateyZ))
  595. {
  596. arg.State = false;
  597. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  598. SendMsg("0-0");
  599. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  600. m_cutHoles[i].STATE = State.Failed;
  601. m_cutHoles[i].END = DateTime.Now;
  602. m_measureFile.Save();
  603. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  604. Thread.Sleep(3000);
  605. continue;
  606. }
  607. while (true)
  608. {
  609. Thread.Sleep(4000);
  610. if (iSEM.GetStageIs() == 0)
  611. {
  612. break;
  613. }
  614. }
  615. //判断是否停止进程
  616. if (key_stop)
  617. {
  618. m_cutHoles[i].STATE = State.Failed;
  619. m_cutHoles[i].END = DateTime.Now;
  620. m_measureFile.Save();
  621. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  622. log.Info("停止键被按下", true);
  623. return;
  624. }
  625. }
  626. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  627. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  628. {
  629. arg.State = false;
  630. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  631. SendMsg("0-0");
  632. log.Error("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  633. m_cutHoles[i].STATE = State.Failed;
  634. m_cutHoles[i].END = DateTime.Now;
  635. m_measureFile.Save();
  636. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  637. Thread.Sleep(3000);
  638. continue;
  639. }
  640. while (true)
  641. {
  642. Thread.Sleep(4000);
  643. if (iSEM.GetStageIs() == 0)
  644. {
  645. break;
  646. }
  647. }
  648. //判断是否停止进程
  649. if (key_stop)
  650. {
  651. m_cutHoles[i].STATE = State.Failed;
  652. m_cutHoles[i].END = DateTime.Now;
  653. m_measureFile.Save();
  654. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  655. log.Info("停止键被按下", true);
  656. return;
  657. }
  658. //2、移动XY轴
  659. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  660. {
  661. arg.State = false;
  662. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  663. SendMsg("0-0");
  664. log.Error("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  665. + m_cutHoles[0].Position.X.ToString() + ","
  666. + m_cutHoles[0].Position.Y.ToString() + ")", false);
  667. m_cutHoles[i].STATE = State.Failed;
  668. m_cutHoles[i].END = DateTime.Now;
  669. m_measureFile.Save();
  670. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  671. Thread.Sleep(3000);
  672. continue;
  673. }
  674. while (true)
  675. {
  676. Thread.Sleep(4000);
  677. if (iSEM.GetStageIs() == 0)
  678. {
  679. break;
  680. }
  681. }
  682. //判断是否停止进程
  683. if (key_stop)
  684. {
  685. m_cutHoles[i].STATE = State.Failed;
  686. m_cutHoles[i].END = DateTime.Now;
  687. m_measureFile.Save();
  688. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  689. log.Info("停止键被按下", true);
  690. return;
  691. }
  692. //3、恢复Z轴
  693. if (MParam.Tilt)
  694. {
  695. //恢复Z轴
  696. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  697. {
  698. arg.State = false;
  699. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  700. SendMsg("0-0");
  701. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  702. m_cutHoles[i].STATE = State.Failed;
  703. m_cutHoles[i].END = DateTime.Now;
  704. m_measureFile.Save();
  705. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  706. Thread.Sleep(3000);
  707. continue;
  708. }
  709. while (true)
  710. {
  711. Thread.Sleep(4000);
  712. if (iSEM.GetStageIs() == 0)
  713. {
  714. break;
  715. }
  716. }
  717. //判断是否停止进程
  718. if (key_stop)
  719. {
  720. log.Info("停止键按下。", true);
  721. m_cutHoles[i].STATE = State.Failed;
  722. m_cutHoles[i].END = DateTime.Now;
  723. m_measureFile.Save();
  724. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  725. return;
  726. }
  727. }
  728. arg.State = true;
  729. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  730. SendMsg("0-0");
  731. //4、设置WD
  732. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  733. Thread.Sleep(1000);
  734. #endregion
  735. //第一个点开始测量
  736. if (FirstHole())
  737. {
  738. //保存文件,将测量状态更改
  739. m_cutHoles[i].STATE = State.Success;
  740. m_cutHoles[i].END = DateTime.Now;
  741. m_measureFile.Save();
  742. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  743. }
  744. //失败
  745. else
  746. {
  747. m_cutHoles[i].STATE = State.Failed;
  748. m_cutHoles[i].END = DateTime.Now;
  749. m_measureFile.Save();
  750. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  751. }
  752. }
  753. else
  754. {
  755. //其他孔的测量
  756. log.Info("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  757. m_cutHoles[i].START = DateTime.Now;
  758. m_cutHoles[i].STATE = State.InProcess;
  759. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  760. //其他孔测量之前的初始化
  761. if (!OtherHole_Init())
  762. {
  763. arg.State = false;
  764. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  765. SendMsg("0-0");
  766. Thread.Sleep(3000);
  767. log.Info("测量线程:" + arg.Message, true);
  768. continue;
  769. }
  770. arg.State = true;
  771. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  772. SendMsg("0-0");
  773. //其他孔开始测量
  774. if (OtherHole())
  775. {
  776. //保存文件,将测量状态更改
  777. m_cutHoles[i].STATE = State.Success;
  778. m_cutHoles[i].END = DateTime.Now;
  779. m_measureFile.Save();
  780. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  781. }
  782. //失败
  783. else
  784. {
  785. m_cutHoles[i].STATE = State.Failed;
  786. m_cutHoles[i].END = DateTime.Now;
  787. m_measureFile.Save();
  788. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  789. }
  790. }
  791. if (key_stop)
  792. {
  793. m_cutHoles[i].END = DateTime.Now;
  794. m_cutHoles[i].STATE = State.Ready;
  795. m_measureFile.Save();
  796. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  797. arg.Message = "用户停止测量";
  798. SendMsg("0-0");
  799. break;
  800. }
  801. //两个点之间更换,加延时以便完成显示
  802. Thread.Sleep(3000);
  803. }
  804. }
  805. //检查硬件连接是否正常
  806. public bool ConnectHardware()
  807. {
  808. //返回硬件的连接状态
  809. return iSEM.ConnectStatus();
  810. }
  811. //设置工作文件夹
  812. public bool SetWorkingFolderStr()
  813. {
  814. WorkingFolder = m_measureFile.FilePath;
  815. return true;
  816. }
  817. //插入PT针
  818. public bool InsertPT()
  819. {
  820. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  821. //SendMsg("调用宏插入PT针宏文件" + fn);
  822. iSEM.CMDMCFFilename(fn);
  823. //延时1s??
  824. Thread.Sleep(1000);
  825. return true;
  826. }
  827. //撤出PT针
  828. public bool RetractPT()
  829. {
  830. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  831. //SendMsg("调用宏撤出PT针宏文件" + fn);
  832. iSEM.CMDMCFFilename(fn);
  833. //延时1s??
  834. Thread.Sleep(1000);
  835. return true;
  836. }
  837. //PT沉积
  838. public bool PTWork()
  839. {
  840. //执行PT沉积的ELY文件
  841. if (!ExcuteEly(MParam.PTTemp))
  842. {
  843. return false;
  844. }
  845. //等待沉积完成
  846. while (true)
  847. {
  848. Thread.Sleep(7000);
  849. if (iSEM.GetFIBMode() == 0)
  850. {
  851. break;
  852. }
  853. }
  854. return true;
  855. }
  856. //FIB切割
  857. public bool FIBWork()
  858. {
  859. //执行PT沉积的ELY文件
  860. if (!ExcuteEly(MParam.FIBTemp))
  861. {
  862. return false;
  863. }
  864. //等待切割完成
  865. while (true)
  866. {
  867. Thread.Sleep(10000);
  868. if (iSEM.GetFIBMode() == 0)
  869. {
  870. break;
  871. }
  872. }
  873. return true;
  874. }
  875. //执行ELY文件的步骤
  876. public bool ExcuteEly(string a_filename)
  877. {
  878. //执行ELy文件有三个动作
  879. //1. 选择ELY文件
  880. //SendMsg("选择ELY文件");
  881. if (!iSEM.CmdFIBLoadELY(a_filename))
  882. {
  883. //SendMsg("选择ELY文件失败");
  884. return false;
  885. }
  886. Thread.Sleep(1000);
  887. //2. 确认ELY文件
  888. //SendMsg("确认ELY文件");
  889. if (!iSEM.CmdFIBEXPOSUREELY())
  890. {
  891. //SendMsg("确认ELY文件失败");
  892. return false;
  893. }
  894. Thread.Sleep(1000);
  895. //3. 执行ELY文件
  896. //SendMsg("执行ELY文件");
  897. if (!iSEM.CmdFIBSTARTELY())
  898. {
  899. //SendMsg("执行ELY文件失败");
  900. return false;
  901. }
  902. Thread.Sleep(1000);
  903. return true;
  904. }
  905. /// <summary>
  906. ///13. 自动 定位功能,沉积
  907. /// </summary>
  908. /// <returns></returns>
  909. public bool GetPoistion()
  910. {
  911. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  912. int state = 1;
  913. log.Info("测量线程:13.自动定位、沉积-功能自动定位电压" + MParam.Location_Voltage.ToString() + "自动定位放大倍数" + MParam.Location_Magnification.ToString(), true);
  914. Thread.Sleep(200);
  915. //1.控制SEM放大600X
  916. if (!iSEM.SetSEMVoltage(MParam.Location_Voltage))
  917. {
  918. arg.Message = "电压设置" + MParam.Location_Voltage.ToString("0.0") + "失败";
  919. arg.State = false;
  920. SendMsg("2-0");
  921. log.Error("测量线程报错:13.自动定位、沉积-自动定位电压" + MParam.Location_Voltage.ToString() + "控制失败", false);
  922. return false;
  923. }
  924. Thread.Sleep(200);
  925. if (!iSEM.SetMagnification(MParam.Location_Magnification))
  926. {
  927. arg.Message = "放大" + MParam.Location_Magnification.ToString("0.0") + "倍失败";
  928. arg.State = false;
  929. SendMsg("2-0");
  930. log.Error("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + MParam.Location_Magnification.ToString() + "控制失败", false);
  931. return false;
  932. }
  933. float current = iSEM.GetMagnification();
  934. while (Math.Abs(current - MParam.Location_Magnification) > 1)
  935. {
  936. iSEM.SetMagnification(MParam.Location_Magnification);
  937. Thread.Sleep(200);
  938. current = iSEM.GetMagnification();
  939. }
  940. arg.State = true;
  941. arg.Message = "放大" + MParam.Location_Magnification.ToString("0.0") + "倍成功";
  942. SendMsg("2-0");
  943. //判断是否停止进程
  944. if (key_stop)
  945. {
  946. log.Info("停止键按下。", true);
  947. return false;
  948. }
  949. //判断是否为仅拍照,不是则执行FIB操作
  950. if (!MParam.Is_Photograph)
  951. {
  952. log.Info("测量线程:切换到FIB模式。", true);
  953. //6.设置FIB拍照参数——扫描时间、束流等
  954. //7.控制FIB自动亮度、对比度
  955. Thread.Sleep(200);
  956. if (!iSEM.CmdFIBModeFIB())
  957. {
  958. arg.Message = "FIB模式切换失败";
  959. arg.State = false;
  960. SendMsg("2-1");
  961. log.Error("测量线程报错:切换到FIB模式失败。", false);
  962. return false;
  963. }
  964. arg.State = true;
  965. arg.Picture_Information.Work_Status = "FIB";
  966. arg.Message = "FIB模式切换成功";
  967. SendMsg("2-1");
  968. Thread.Sleep(1000);
  969. //判断是否停止进程
  970. if (key_stop)
  971. {
  972. log.Info("停止键按下。", true);
  973. return false;
  974. }
  975. //8.控制FIB拍照
  976. //9.保存照片======更改路径
  977. //20201103,FIB使用定位的放大倍数
  978. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  979. arg.Picture_Information.Picture_FullPath = fileName2;
  980. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  981. Thread.Sleep(200);
  982. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  983. Thread.Sleep(200);
  984. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  985. Thread.Sleep(200);
  986. //FIB的放大位数,将来会改
  987. log.Info("测量线程:设置FIB放大倍数" + MParam.Location_Magnification.ToString(), true);
  988. //20201103,FIB使用定位的放大倍数
  989. if (!iSEM.SetFIBMagnification(MParam.Location_Magnification))
  990. {
  991. arg.Message = "FIB放大倍数设置失败";
  992. arg.State = false;
  993. SendMsg("2-2");
  994. log.Error("测量线程失败:FIB放大倍数设置失败。", false);
  995. return false;
  996. }
  997. arg.Message = "FIB放大倍数设置成功";
  998. arg.State = true;
  999. SendMsg("2-2");
  1000. Thread.Sleep(200);
  1001. //判断是否停止进程
  1002. if (key_stop)
  1003. {
  1004. log.Info("停止键按下。", true);
  1005. return false;
  1006. }
  1007. //4、设置WD
  1008. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1009. Thread.Sleep(1000);
  1010. //20201127增加自动亮度对比度
  1011. if (MParam.FIBDo)
  1012. {
  1013. if (MParam.FIBAutoBC)
  1014. {
  1015. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1016. float m_TempBrightness = 50.0f;
  1017. float m_TempContrast = 30.0f;
  1018. if (MParam.SampleName == "3" || MParam.SampleName == "1")
  1019. {
  1020. m_TempBrightness = 50.0f;
  1021. m_TempContrast = 30.0f;
  1022. iSEM.SetAutoVideoOff();
  1023. Thread.Sleep(200);
  1024. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1025. Thread.Sleep(200);
  1026. iSEM.SetContrast(m_TempContrast); //30.0f
  1027. Thread.Sleep(200);
  1028. }
  1029. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1030. {
  1031. iSEM.SetAutoVideoBrightnessAndContrast();
  1032. //20201128陈工建议增加
  1033. Thread.Sleep(200);
  1034. iSEM.SetAutoBright(100);
  1035. Thread.Sleep(200);
  1036. iSEM.SetAutoContrast(100);
  1037. Thread.Sleep(5000);
  1038. }
  1039. }
  1040. else
  1041. {
  1042. iSEM.SetAutoVideoOff();
  1043. Thread.Sleep(200);
  1044. iSEM.SetBrightness(MParam.FIBB);
  1045. Thread.Sleep(200);
  1046. iSEM.SetContrast(MParam.FIBC);
  1047. Thread.Sleep(200);
  1048. }
  1049. }
  1050. //拍照前改变速度,延时
  1051. iSEM.CloseReduced();
  1052. Thread.Sleep(200);
  1053. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1054. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1055. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1056. Thread.Sleep(200);
  1057. cycle_time = iSEM.GetCycleTime();
  1058. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1059. if (!GetImage(fileName2))
  1060. {
  1061. arg.Message = "FIB拍照失败";
  1062. arg.State = false;
  1063. SendMsg("2-3");
  1064. log.Error("测量线程报错:FIB拍照失败。", false);
  1065. return false;
  1066. }
  1067. arg.State = true;
  1068. arg.Picture_Information.Picture_FullPath = fileName2;
  1069. arg.Message = "FIB拍照成功";
  1070. SendMsg("2-3");
  1071. Thread.Sleep(200);
  1072. //SendMsg("1-16");
  1073. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1074. Thread.Sleep(200);
  1075. cycle_time = iSEM.GetCycleTime();
  1076. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1077. //判断是否停止进程
  1078. if (key_stop)
  1079. {
  1080. log.Info("停止键按下。", true);
  1081. return false;
  1082. }
  1083. iSEM.CmdFIBModeSEM();
  1084. Thread.Sleep(200);
  1085. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1086. log.Info("测量线程:调用图像处理接口,准备移动样品台", true);
  1087. log.Info("文件名=" + fileName2, true);
  1088. log.Info("样品类型=" + MParam.SampleName, true);
  1089. log.Info("供应商名称=" + MParam.Firm, true);
  1090. wr.Img_Cut_Position(fileName2, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1091. log.Info("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString() + ")", true);
  1092. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1093. if (state == 1)
  1094. {
  1095. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1096. float xc = (x1 + x2) / 2;
  1097. float yc = (y1 + y2) / 2;
  1098. x0 = xc - 512;
  1099. y0 = 384 - yc;
  1100. log.Info("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1101. px = iSEM.GetPixelSize();
  1102. //修改FIB切割的ELY文件坐标
  1103. XmlDocument xmlDoc = new XmlDocument();
  1104. xmlDoc.Load(MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1105. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1106. if (xns != null)
  1107. {
  1108. XmlAttributeCollection attributeCol = xns.Attributes;
  1109. //遍历自己点属性
  1110. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1111. log.Info("XML-Width_a = " + width_a.ToString(), true);
  1112. foreach (XmlAttribute attri in attributeCol)
  1113. {
  1114. if (attri.Name == "x")
  1115. {
  1116. attri.InnerText = ((x0 * px) * 1000000 - width_a).ToString();
  1117. log.Info("XML-TopLeft-X = " + attri.InnerText, true);
  1118. }
  1119. else if (attri.Name == "y")
  1120. {
  1121. attri.InnerText = ((y0 * px) * 1000000 - 2.791).ToString();
  1122. log.Info("XML-TopLeft-Y = " + attri.InnerText, true);
  1123. }
  1124. }
  1125. }
  1126. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1127. if (xns != null)
  1128. {
  1129. XmlAttributeCollection attributeCol = xns.Attributes;
  1130. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1131. //遍历自己点属性
  1132. foreach (XmlAttribute attri in attributeCol)
  1133. {
  1134. if (attri.Name == "x")
  1135. {
  1136. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1137. }
  1138. else if (attri.Name == "y")
  1139. {
  1140. attri.InnerText = (((y0 * px) * 1000000) + 2 - 2.791).ToString();
  1141. }
  1142. }
  1143. }
  1144. xmlDoc.Save(MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1145. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1146. if (MParam.PT)
  1147. {
  1148. xmlDoc = new XmlDocument();
  1149. xmlDoc.Load(MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1150. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1151. if (xns != null)
  1152. {
  1153. XmlAttributeCollection attributeCol = xns.Attributes;
  1154. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1155. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1156. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1157. //遍历自己点属性
  1158. foreach (XmlAttribute attri in attributeCol)
  1159. {
  1160. if (attri.Name == "x")
  1161. {
  1162. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1163. }
  1164. else if (attri.Name == "y")
  1165. {
  1166. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1167. }
  1168. }
  1169. }
  1170. xmlDoc.Save(MParam.PTTemp);
  1171. }
  1172. if (hand_intervene == 1)
  1173. {
  1174. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1175. }
  1176. }
  1177. else
  1178. {
  1179. arg.Message = "图像接口参数state返回值为零";
  1180. arg.State = false;
  1181. //SendMsg("1-12");
  1182. if (hand_intervene == 1)
  1183. {
  1184. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1185. {
  1186. return false;
  1187. }
  1188. }
  1189. else
  1190. {
  1191. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1192. return false;
  1193. }
  1194. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1195. return false;
  1196. }
  1197. //判断是否停止进程
  1198. if (key_stop)
  1199. {
  1200. log.Info("停止键按下", true);
  1201. return false;
  1202. }
  1203. //11.自动工具样品类型参数确定是否需要PT沉积
  1204. if (MParam.PT)
  1205. {
  1206. if (!iSEM.CmdFIBModeFIB())
  1207. {
  1208. log.Error("测量线程报错:切换到SEM模式失败", false);
  1209. return false;
  1210. }
  1211. Thread.Sleep(200);
  1212. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1213. if (MParam.Is_Photograph == false && MParam.PT == true)
  1214. {
  1215. log.Info("测量线程:插入PT针" + arg.Message, true);
  1216. if (!InsertPT())
  1217. {
  1218. arg.Message = "插入PT针失败";
  1219. arg.State = false;
  1220. SendMsg("2-4");
  1221. log.Error("测量线程报错:" + arg.Message, false);
  1222. return false;
  1223. }
  1224. arg.State = true;
  1225. arg.Message = "插入PT针成功";
  1226. SendMsg("2-4");
  1227. }
  1228. //判断是否停止进程
  1229. if (key_stop)
  1230. {
  1231. log.Info("停止键按下", true);
  1232. return false;
  1233. }
  1234. //3. 根据坐标进行PT沉积
  1235. if (!PTWork())
  1236. {
  1237. arg.Message = "PT沉积失败";
  1238. arg.State = false;
  1239. SendMsg("2-5");
  1240. log.Error("测量线程报错:" + arg.Message, false);
  1241. return false;
  1242. }
  1243. arg.State = true;
  1244. arg.Message = "PT沉积成功";
  1245. SendMsg("2-5");
  1246. //判断是否停止进程
  1247. if (key_stop)
  1248. {
  1249. log.Info("停止键按下", true);
  1250. return false;
  1251. }
  1252. //15.根据样品类型决定是否撤出PT针
  1253. if (MParam.Is_Photograph == false && MParam.PT == true)
  1254. {
  1255. if (!RetractPT())
  1256. {
  1257. arg.Message = "撤出PT针失败";
  1258. arg.State = false;
  1259. SendMsg("2-6");
  1260. log.Error("测量线程报错:" + arg.Message, false);
  1261. return false;
  1262. }
  1263. arg.State = true;
  1264. arg.Message = "撤出PT针成功";
  1265. SendMsg("2-6");
  1266. }
  1267. //判断是否停止进程
  1268. if (key_stop)
  1269. {
  1270. log.Info("停止键按下", true);
  1271. return false;
  1272. }
  1273. if (!iSEM.CmdFIBModeSEM())
  1274. {
  1275. //arg.Message = "切割前SEM拍照失败。";
  1276. //arg.State = false;
  1277. //SendMsg("1-17");
  1278. log.Error("测量线程报错:切换到SEM模式失败", false);
  1279. return false;
  1280. }
  1281. }
  1282. }
  1283. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1284. float[] firstPosition = iSEM.GetStagePosition();
  1285. m_cutHoles[0].Position.X = firstPosition[0];
  1286. m_cutHoles[0].Position.Y = firstPosition[1];
  1287. m_cutHoles[0].Position.Z = firstPosition[2];
  1288. m_cutHoles[0].Position.T = firstPosition[3];
  1289. m_cutHoles[0].Position.R = firstPosition[4];
  1290. m_cutHoles[0].Position.M = firstPosition[5];
  1291. //这里要调用文件保存功能
  1292. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1293. + firstPosition[1].ToString() + ","
  1294. + firstPosition[2].ToString() + ","
  1295. + firstPosition[3].ToString() + ","
  1296. + firstPosition[4].ToString() + ","
  1297. + firstPosition[5].ToString() + ")";
  1298. arg.State = true;
  1299. //SendMsg("1-16");
  1300. //判断是否停止进程
  1301. if (key_stop)
  1302. {
  1303. log.Info("停止键按下", true);
  1304. return false;
  1305. }
  1306. return true;
  1307. }
  1308. /// <summary>
  1309. /// 14. FIB切割
  1310. /// </summary>
  1311. /// <returns></returns>
  1312. public bool FIBCross()
  1313. {
  1314. int state = 0;
  1315. #if CHECK
  1316. float mag = MParam.Location_Magnification / 3;
  1317. if (mag < 200)
  1318. {
  1319. mag = 200;
  1320. }
  1321. String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
  1322. iSEM.SetMagnification(mag);
  1323. Thread.Sleep(2000);
  1324. iSEM.CmdSaveRate();
  1325. Thread.Sleep(200);
  1326. cycle_time = iSEM.GetCycleTime();
  1327. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1328. if (!GetImage(fileName1))
  1329. {
  1330. arg.Message = "切割前SEM拍照失败。";
  1331. arg.State = false;
  1332. SendMsg("1-17");
  1333. log.Info("测量线程报错:SEM切割前图像拍照失败", false);
  1334. return false;
  1335. }
  1336. iSEM.CmdFocusRate();
  1337. Thread.Sleep(200);
  1338. cycle_time = iSEM.GetCycleTime();
  1339. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1340. arg.Message = "切割前SEM拍照成功。";
  1341. arg.Picture_Information.Picture_FullPath = fileName1;
  1342. arg.State = true;
  1343. SendMsg("1-17");
  1344. #endif
  1345. if (!iSEM.CmdFIBModeFIB())
  1346. {
  1347. arg.Message = "切换到FIB模式失败。";
  1348. arg.State = false;
  1349. SendMsg("2-7");
  1350. log.Error("测量线程报错:切换到SEM模式失败", false);
  1351. return false;
  1352. }
  1353. arg.Message = "切换到FIB模式成功。";
  1354. arg.State = true;
  1355. SendMsg("2-7");
  1356. Thread.Sleep(1000);
  1357. iSEM.SetMagnification(MParam.Location_Magnification);
  1358. float current = iSEM.GetMagnification();
  1359. while (Math.Abs(current - MParam.Location_Magnification) > 1)
  1360. {
  1361. iSEM.SetMagnification(MParam.Location_Magnification);
  1362. Thread.Sleep(200);
  1363. current = iSEM.GetMagnification();
  1364. }
  1365. Thread.Sleep(2000);
  1366. //14.自动控制FIB切割
  1367. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1368. //2.控制FIB进行切割
  1369. //以上1、2步全部用ELY文件代替
  1370. if (!FIBWork())
  1371. {
  1372. arg.Message = "FIB切割失败";
  1373. arg.State = false;
  1374. SendMsg("2-8");
  1375. log.Error("测量线程报错:" + arg.Message, false);
  1376. return false;
  1377. }
  1378. arg.State = true;
  1379. arg.Message = "FIB切割成功";
  1380. SendMsg("2-8");
  1381. Thread.Sleep(300);
  1382. //判断是否停止进程
  1383. if (key_stop)
  1384. {
  1385. log.Info("停止键按下", true);
  1386. return false;
  1387. }
  1388. //做切割后SEM的拍照
  1389. log.Info("测量线程:切割后SEM拍照", true);
  1390. if (!iSEM.CmdFIBModeSEM())
  1391. {
  1392. //arg.Message = "切割后SEM拍照失败。";
  1393. //arg.State = false;
  1394. //SendMsg("1-20");
  1395. log.Error("测量线程报错:切换到SEM模式失败", false);
  1396. return false;
  1397. }
  1398. Thread.Sleep(1000);
  1399. #if CHECK
  1400. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
  1401. iSEM.SetMagnification(mag);
  1402. Thread.Sleep(2000);
  1403. iSEM.CmdSaveRate();
  1404. Thread.Sleep(200);
  1405. cycle_time = iSEM.GetCycleTime();
  1406. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1407. if (!GetImage(fileName2))
  1408. {
  1409. arg.Message = "切割后SEM拍照失败。";
  1410. arg.State = false;
  1411. SendMsg("1-20");
  1412. log.Info("测量线程报错:SEM切割后图像拍照失败", false);
  1413. return false;
  1414. }
  1415. arg.Picture_Information.Picture_FullPath = fileName2;
  1416. arg.Message = "切割后SEM拍照成功。";
  1417. arg.State = true;
  1418. SendMsg("1-20");
  1419. iSEM.CmdFocusRate();
  1420. Thread.Sleep(200);
  1421. cycle_time = iSEM.GetCycleTime();
  1422. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1423. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1424. wr.Img_Cut_Success(fileName1, fileName2, out state);
  1425. log.Info("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
  1426. if (state == 0)
  1427. {
  1428. log.Info("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
  1429. arg.Message = "图像接口参数state返回值为零";
  1430. arg.State = false;
  1431. SendMsg("1-22");
  1432. if (hand_intervene == 1)
  1433. {
  1434. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1435. {
  1436. return false;
  1437. }
  1438. }
  1439. else
  1440. {
  1441. return false;
  1442. }
  1443. log.Info("测量线程报错:" + arg.Message, false);
  1444. }
  1445. arg.State = true;
  1446. log.Info("验证切割准确性成功。", true);
  1447. arg.Message = "FIB切割校验成功";
  1448. SendMsg("1-22");
  1449. //判断是否停止进程
  1450. if (key_stop)
  1451. {
  1452. log.Info("停止键按下。", true);
  1453. return false;
  1454. }
  1455. #endif
  1456. return true;
  1457. }
  1458. /// <summary>
  1459. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1460. /// </summary>
  1461. /// <returns></returns>
  1462. public bool FindCross()
  1463. {
  1464. float x2 = 0, y2 = 0;
  1465. int state = 0;
  1466. //切换到SEM模式
  1467. if (!iSEM.CmdFIBModeSEM())
  1468. {
  1469. arg.Message = "SEM模式切换失败";
  1470. arg.State = false;
  1471. SendMsg("3-0");
  1472. log.Error("测量线程报错:" + arg.Message, false);
  1473. return false;
  1474. }
  1475. arg.State = true;
  1476. arg.Message = "SEM模式切换成功";
  1477. SendMsg("3-0");
  1478. arg.Picture_Information.Work_Status = "SEM";
  1479. Thread.Sleep(1000);
  1480. //判断是否停止进程
  1481. if (key_stop)
  1482. {
  1483. log.Info("停止键按下", true);
  1484. return false;
  1485. }
  1486. //1.控制SEM放大到300倍
  1487. log.Info("能谱电压设置:" + MParam.Location_Voltage.ToString("0.0"));
  1488. if (!iSEM.SetSEMVoltage(MParam.Location_Voltage))
  1489. {
  1490. arg.Message = "电压设置" + MParam.Location_Voltage.ToString("0.0") + "失败";
  1491. arg.State = false;
  1492. SendMsg("3-1");
  1493. log.Error("测量线程报错:" + arg.Message, false);
  1494. return false;
  1495. }
  1496. Thread.Sleep(200);
  1497. //iSEM.SetAutoVideoBrightnessAndContrast();
  1498. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1499. float m_TempBrightness = 50.0f;
  1500. float m_TempContrast = 30.0f;
  1501. if (MParam.SampleName == "3")
  1502. {
  1503. m_TempBrightness = 48.0f;
  1504. m_TempContrast = 29.0f;
  1505. }
  1506. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1507. iSEM.SetAutoVideoOff();
  1508. Thread.Sleep(200);
  1509. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1510. Thread.Sleep(200);
  1511. iSEM.SetContrast(m_TempContrast); //30.0f
  1512. Thread.Sleep(2000);
  1513. float mag = MParam.Location_Magnification / 3;
  1514. if (mag < 200)
  1515. {
  1516. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1517. if (MParam.SampleName == "3")
  1518. mag = 400;
  1519. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1520. mag = 200;
  1521. }
  1522. if (!iSEM.SetMagnification(mag))
  1523. {
  1524. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1525. arg.State = false;
  1526. SendMsg("3-1");
  1527. log.Error("测量线程报错:" + arg.Message, false);
  1528. return false;
  1529. }
  1530. Thread.Sleep(200);
  1531. float current = iSEM.GetMagnification();
  1532. Thread.Sleep(200);
  1533. while (Math.Abs(current - mag) > 2)
  1534. {
  1535. iSEM.SetMagnification(mag);
  1536. Thread.Sleep(200);
  1537. current = iSEM.GetMagnification();
  1538. Thread.Sleep(200);
  1539. }
  1540. arg.State = true;
  1541. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1542. SendMsg("3-1");
  1543. Thread.Sleep(2000);
  1544. //判断是否停止进程
  1545. if (key_stop)
  1546. {
  1547. log.Info("停止键按下", true);
  1548. return false;
  1549. }
  1550. //3.控制SEM拍照
  1551. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1552. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1553. String fileName4 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName4;
  1554. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1555. log.Info("fileName4====================" + fileName4, true);
  1556. arg.Picture_Information.Picture_FullPath = fileName4;
  1557. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1558. Thread.Sleep(200);
  1559. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1560. Thread.Sleep(200);
  1561. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1562. Thread.Sleep(200);
  1563. //拍照前改变速度,延时
  1564. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1565. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1566. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1567. Thread.Sleep(200);
  1568. cycle_time = iSEM.GetCycleTime();
  1569. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1570. if (!GetImage(fileName4))
  1571. {
  1572. arg.State = false;
  1573. arg.Message = "SEM拍照找切割位置失败";
  1574. SendMsg("3-2");
  1575. log.Error("测量线程报错:" + arg.Message, false);
  1576. return false;
  1577. }
  1578. arg.Picture_Information.Picture_FullPath = fileName4;
  1579. arg.State = true;
  1580. arg.Message = "SEM拍照成功";
  1581. SendMsg("3-2");
  1582. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1583. Thread.Sleep(200);
  1584. cycle_time = iSEM.GetCycleTime();
  1585. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1586. //判断是否停止进程
  1587. if (key_stop)
  1588. {
  1589. return false;
  1590. }
  1591. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1592. //5.根据坐标控制SEM移动到切孔位置,居中
  1593. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  1594. log.Info("文件名=" + fileName4, true);
  1595. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x2, out y2, out state);
  1596. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1597. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1598. if (state == 1)
  1599. {
  1600. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1601. if (!MoveToPixByMoveStage(x2, y2))
  1602. {
  1603. arg.State = false;
  1604. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1605. SendMsg("3-3");
  1606. log.Error("测量线程报错:" + arg.Message, false);
  1607. return false;
  1608. }
  1609. //判断是否移动完成
  1610. while (true)
  1611. {
  1612. Thread.Sleep(4000);
  1613. if (iSEM.GetStageIs() == 0)
  1614. {
  1615. break;
  1616. }
  1617. }
  1618. arg.State = true;
  1619. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1620. SendMsg("3-3");
  1621. //高倍到低倍不进行对焦
  1622. //拍照前改变速度,延时
  1623. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1624. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1625. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1626. Thread.Sleep(200);
  1627. cycle_time = iSEM.GetCycleTime();
  1628. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1629. //String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1630. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1631. String fileName10 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName10;
  1632. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1633. log.Info("fileName10====================" + fileName10, true);
  1634. if (!GetImage(fileName10))
  1635. {
  1636. //arg.State = false;
  1637. //arg.Message = "SEM拍照失败";
  1638. //SendMsg("3-2");
  1639. //return false;
  1640. log.Error("测量线程报错:找到已切割的位置拍照失败", false);
  1641. }
  1642. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1643. Thread.Sleep(200);
  1644. cycle_time = iSEM.GetCycleTime();
  1645. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1646. if (hand_intervene == 1)
  1647. {
  1648. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1649. }
  1650. }
  1651. else
  1652. {
  1653. arg.Message = "图像接口参数state返回值为零";
  1654. arg.State = false;
  1655. SendMsg("3-3");
  1656. if (hand_intervene == 1)
  1657. {
  1658. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1659. {
  1660. return false;
  1661. }
  1662. }
  1663. else
  1664. {
  1665. return false;
  1666. }
  1667. log.Error("测量线程报错:" + arg.Message, false);
  1668. return false;
  1669. }
  1670. //判断是否停止进程
  1671. if (key_stop)
  1672. {
  1673. log.Info("停止键按下", true);
  1674. return false;
  1675. }
  1676. return true;
  1677. }
  1678. /// <summary>
  1679. /// 17.自动控制SEM拍截面照
  1680. /// </summary>
  1681. /// <returns></returns>
  1682. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1683. {
  1684. int state = 0;
  1685. #region 设置拍照的电压
  1686. log.Info("测量线程:设置拍照电压" + MParam.Photograph_Voltage.ToString(), true);
  1687. //1、放大倍数参数photograph_
  1688. if (!iSEM.SetSEMVoltage(MParam.Photograph_Voltage))
  1689. {
  1690. arg.Message = "电压设置" + MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1691. arg.State = false;
  1692. SendMsg("3-4");
  1693. log.Error("测量线程报错:" + arg.Message, false);
  1694. return false;
  1695. }
  1696. //add
  1697. #endregion
  1698. Thread.Sleep(200);
  1699. #region 设置拍照的放大倍数
  1700. log.Info("测量线程:设置拍照放大倍数====" + MParam.Photograph_Magnification.ToString(), true);
  1701. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  1702. {
  1703. arg.Message = "放大倍数调整失败";
  1704. arg.State = false;
  1705. SendMsg("3-4");
  1706. log.Error("测量线程报错:" + arg.Message, false);
  1707. return false;
  1708. }
  1709. float set = MParam.Photograph_Magnification;
  1710. float current = iSEM.GetMagnification();
  1711. while (Math.Abs(current - set) > 1)
  1712. {
  1713. iSEM.SetMagnification(MParam.Photograph_Magnification);
  1714. Thread.Sleep(200);
  1715. current = iSEM.GetMagnification();
  1716. }
  1717. arg.Message = "放大" + MParam.Photograph_Magnification.ToString() + "成功";
  1718. arg.State = true;
  1719. SendMsg("3-4");
  1720. Thread.Sleep(3000 + (Int32)cycle_time);
  1721. //判断是否停止进程
  1722. if (key_stop)
  1723. {
  1724. log.Info("停止键按下", true);
  1725. return false;
  1726. }
  1727. #endregion
  1728. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1729. //if(!iSEM.SetAutoVideoBrightnessAndContrast())
  1730. //{
  1731. // log.Info("测量线程报错:自动开启亮度对比度失败", false);
  1732. // return false;
  1733. //}
  1734. //Thread.Sleep(5000);
  1735. //2.控制SEM自动对焦、亮度、对比度-接口
  1736. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1737. if ((MParam.SampleName == "2") || (MParam.SampleName == "3"))
  1738. iSEM.SetReduced(402, 128, 600, 600);
  1739. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1740. iSEM.SetReduced(402, 128, 600, 600);
  1741. Thread.Sleep(200);
  1742. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1743. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1744. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1745. Thread.Sleep(200);
  1746. cycle_time = iSEM.GetCycleTime();
  1747. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1748. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1749. if (!iSEM.SetAutoVideoOff())
  1750. {
  1751. log.Error("测量线程报错:关闭自动亮度对比度失败", false);
  1752. return false;
  1753. }
  1754. Thread.Sleep(5000);
  1755. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1756. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1757. if (ImageFocus1(false))
  1758. {
  1759. arg.Message = "自动对焦完成";
  1760. arg.State = true;
  1761. SendMsg("3-5");
  1762. }
  1763. else
  1764. {
  1765. arg.Message = "自动对焦失败";
  1766. arg.State = false;
  1767. SendMsg("3-5");
  1768. log.Error("测量线程报错:" + arg.Message, false);
  1769. return false;
  1770. }
  1771. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1772. iSEM.CloseReduced();
  1773. Thread.Sleep(200);
  1774. cycle_time = iSEM.GetCycleTime();
  1775. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1776. //判断是否停止进程
  1777. if (key_stop)
  1778. {
  1779. log.Info("停止键按下", true);
  1780. return false;
  1781. }
  1782. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1783. float m_TempBrightness = 50.0f;
  1784. float m_TempContrast = 30.0f;
  1785. if (MParam.SampleName == "3")
  1786. {
  1787. m_TempBrightness = 50f;
  1788. m_TempContrast = 29f;
  1789. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1790. Thread.Sleep(200);
  1791. iSEM.SetContrast(m_TempContrast); //30.0f
  1792. Thread.Sleep(200);
  1793. }
  1794. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1795. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1796. {
  1797. log.Error("测量线程报错:自动开启亮度对比度失败", false);
  1798. return false;
  1799. }
  1800. Thread.Sleep(5000);
  1801. //3、设置SEM补偿角度
  1802. if (MParam.Is_Photograph == false)
  1803. {
  1804. log.Info("测量线程:角度补偿" + MParam.Correction_Angle.ToString() + "度", true);
  1805. if (!TiltCorrection(MParam.Correction_Angle))
  1806. {
  1807. arg.Message = "设置SEM进行角度补偿" + MParam.Correction_Angle.ToString("0") + "度失败";
  1808. arg.State = false;
  1809. SendMsg("3-6");
  1810. log.Error("测量线程报错:" + arg.Message, false);
  1811. return false;
  1812. }
  1813. arg.State = true;
  1814. arg.Message = "设置SEM进行角度补偿" + MParam.Correction_Angle.ToString("0") + "度成功";
  1815. SendMsg("3-6");
  1816. Thread.Sleep(200);
  1817. //判断是否停止进程
  1818. if (key_stop)
  1819. {
  1820. log.Error("停止键按下", false);
  1821. return false;
  1822. }
  1823. }
  1824. //4、拍照,5、保存照片
  1825. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1826. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1827. String fileName5 = data_path + "\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  1828. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1829. log.Info("fileName5====================" + fileName5, true);
  1830. arg.Picture_Information.Picture_FullPath = fileName5;
  1831. arg.Picture_Information.Work_Status = "SEM";
  1832. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1833. Thread.Sleep(200);
  1834. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1835. Thread.Sleep(200);
  1836. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1837. Thread.Sleep(200);
  1838. //拍照前改变速度,延时
  1839. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1840. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1841. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1842. Thread.Sleep(200);
  1843. cycle_time = iSEM.GetCycleTime();
  1844. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  1845. if (!GetImage(fileName5))
  1846. {
  1847. arg.Message = "SEM拍照失败";
  1848. arg.State = false;
  1849. SendMsg("3-7");
  1850. log.Error("测量线程报错:" + arg.Message, false);
  1851. return false;
  1852. }
  1853. arg.Picture_Information.Picture_FullPath = fileName5;
  1854. arg.State = true;
  1855. arg.Message = "SEM拍照成功";
  1856. SendMsg("3-7");
  1857. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1858. Thread.Sleep(200);
  1859. cycle_time = iSEM.GetCycleTime();
  1860. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1861. //判断是否停止进程
  1862. if (key_stop)
  1863. {
  1864. log.Info("停止键按下", true);
  1865. return false;
  1866. }
  1867. #endregion
  1868. if (MParam.Is_Photograph == false)
  1869. {
  1870. #region 对当前矩形进行旋转校正
  1871. //8,计算切割面区域偏移角度及方向
  1872. float degree = 0;
  1873. int direction = 0;
  1874. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  1875. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1876. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1877. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1878. if (state == 1)
  1879. {
  1880. //梯形角度
  1881. iSEM.SetScanRotationOn();
  1882. Thread.Sleep(200);
  1883. //20201128陈工要求,谭博返回角度*0.7
  1884. iSEM.SetScanRotation(Convert.ToSingle(degree * MParam.ScanRotCor));
  1885. Thread.Sleep(200);
  1886. arg.State = true;
  1887. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1888. SendMsg("3-8");
  1889. if (hand_intervene == 1)
  1890. {
  1891. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1892. }
  1893. }
  1894. else
  1895. {
  1896. arg.Message = "图像接口参数State返回值为零";
  1897. arg.State = false;
  1898. SendMsg("3-8");
  1899. if (hand_intervene == 1)
  1900. {
  1901. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1902. {
  1903. return false;
  1904. }
  1905. }
  1906. else
  1907. {
  1908. //return false;
  1909. }
  1910. log.Error("测量线程报错:" + arg.Message, false);
  1911. }
  1912. //判断是否停止进程
  1913. if (key_stop)
  1914. {
  1915. log.Info("停止键按下", true);
  1916. return false;
  1917. }
  1918. Thread.Sleep(200);
  1919. //12拍照
  1920. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1921. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1922. String fileName6 = data_path + "\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  1923. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1924. log.Info("fileName6====================" + fileName6, true);
  1925. arg.Picture_Information.Picture_FullPath = fileName6;
  1926. arg.Picture_Information.Work_Status = "SEM";
  1927. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1928. Thread.Sleep(200);
  1929. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1930. Thread.Sleep(200);
  1931. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1932. Thread.Sleep(200);
  1933. //拍照前改变速度,延时
  1934. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1935. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1936. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1937. Thread.Sleep(200);
  1938. cycle_time = iSEM.GetCycleTime();
  1939. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1940. if (!GetImage(fileName6))
  1941. {
  1942. arg.Message = "SEM拍照失败";
  1943. arg.State = false;
  1944. SendMsg("3-9");
  1945. log.Error("测量线程报错:" + arg.Message, false);
  1946. return false;
  1947. }
  1948. arg.Picture_Information.Picture_FullPath = fileName6;
  1949. arg.State = true;
  1950. arg.Message = "SEM拍照成功";
  1951. SendMsg("3-9");
  1952. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1953. Thread.Sleep(200);
  1954. cycle_time = iSEM.GetCycleTime();
  1955. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1956. //判断是否停止进程
  1957. if (key_stop)
  1958. {
  1959. log.Info("停止键按下", true);
  1960. return false;
  1961. }
  1962. #endregion
  1963. #region 获取两个位置上及放大倍数
  1964. //计算两个测量区域坐标
  1965. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1966. List<float> mag = new List<float>();
  1967. System.Drawing.Point ct0;
  1968. float mag1, mag2, magMax;
  1969. //log.Info("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1970. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(MParam.SampleName), MParam.Firm, out ct, out mag, out ct0, out state);
  1971. string s = "";
  1972. for (int i = 0; i < ct.Count; i++)
  1973. {
  1974. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  1975. + "放大倍数=" + mag[i];
  1976. }
  1977. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  1978. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1979. "输入样品" + Convert.ToInt32(MParam.SampleName) +
  1980. "输入厂商" + MParam.Firm.ToString() +
  1981. s +
  1982. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1983. #endregion
  1984. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1985. {
  1986. arg.State = true;
  1987. arg.Message = "获取位置及放大倍数成功";
  1988. SendMsg("3-10");
  1989. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1990. float xs = iSEM.GetBeamShiftX();
  1991. Thread.Sleep(200);
  1992. float ys = iSEM.GetBeamShiftY();
  1993. Thread.Sleep(200);
  1994. float xpCur = iSEM.GetStageAtX();
  1995. Thread.Sleep(200);
  1996. float ypCur = iSEM.GetStageAtY();
  1997. Thread.Sleep(200);
  1998. log.Info("测量线程:原来的光束偏移量x = " + xs.ToString()
  1999. + "y=" + ys.ToString() + ","
  2000. + "原来样品台的位置x= " + xpCur.ToString()
  2001. + "y=" + ypCur.ToString(), true);
  2002. #endregion
  2003. //找到放大倍数最大值
  2004. magMax = mag[0];
  2005. for (int m = 1; m < mag.Count; m++)
  2006. {
  2007. if (mag[m] > magMax)
  2008. {
  2009. magMax = mag[m];
  2010. }
  2011. }
  2012. #region 移动到梯形左上角
  2013. //20201127将视野移动到梯形左上角位置
  2014. MoveToPix(ct0.X, ct0.Y);
  2015. log.Info("测量线程:移动到对焦点( " + ct0.X.ToString()
  2016. + "," + ct0.Y.ToString() + ")", true);
  2017. //关闭自动亮度对比度
  2018. iSEM.SetAutoVideoOff();
  2019. Thread.Sleep(2000);
  2020. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2021. if (MParam.SampleName == "3")
  2022. {
  2023. m_TempBrightness = 50f;
  2024. m_TempContrast = 29f;
  2025. iSEM.SetBrightness(m_TempBrightness); //50.0f
  2026. Thread.Sleep(200);
  2027. iSEM.SetContrast(m_TempContrast); //30.0f
  2028. Thread.Sleep(200);
  2029. }
  2030. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  2031. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  2032. if (MParam.SampleName == "3")
  2033. {
  2034. iSEM.SetReduced(402, 128, 480, 450);
  2035. }
  2036. else
  2037. {
  2038. iSEM.SetReduced(402, 128, 480, 450);
  2039. }
  2040. Thread.Sleep(200);
  2041. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  2042. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2043. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  2044. Thread.Sleep(200);
  2045. cycle_time = iSEM.GetCycleTime();
  2046. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2047. //放大到6000倍
  2048. iSEM.SetMagnification(magMax / 2);
  2049. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2050. set = magMax / 2;
  2051. current = iSEM.GetMagnification();
  2052. while (Math.Abs(current - set) > 1)
  2053. {
  2054. iSEM.SetMagnification(set);
  2055. Thread.Sleep(200);
  2056. current = iSEM.GetMagnification();
  2057. }
  2058. log.Info("========测量线程:开始自动聚焦 " + set.ToString() + "倍", true);
  2059. if (MParam.SampleName == "3")
  2060. {
  2061. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  2062. iSEM.SetBrightness(50.0f); //50.0f
  2063. Thread.Sleep(200);
  2064. iSEM.SetContrast(30.0f); //30.0f
  2065. Thread.Sleep(200);
  2066. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  2067. }
  2068. //自动对焦
  2069. if (!ImageFocus1(true))
  2070. {
  2071. log.Error("========测量线程:自动聚焦失败!" + set.ToString() + "倍", false);
  2072. return false;
  2073. }
  2074. log.Info("========测量线程:自动聚焦成功!" + set.ToString() + "倍", true);
  2075. ////自动消像散
  2076. //if (!ImageStig1())
  2077. //{
  2078. // return false;
  2079. //}
  2080. //放大到10000倍
  2081. iSEM.SetMagnification(magMax);
  2082. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2083. set = magMax;
  2084. current = iSEM.GetMagnification();
  2085. while (Math.Abs(current - set) > 1)
  2086. {
  2087. iSEM.SetMagnification(set);
  2088. Thread.Sleep(200);
  2089. current = iSEM.GetMagnification();
  2090. }
  2091. log.Info("========测量线程:开始自动聚焦 " + set.ToString() + "倍", true);
  2092. //自动对焦
  2093. if (!ImageFocus1(true))
  2094. {
  2095. log.Info("========测量线程:自动聚焦失败!" + set.ToString() + "倍", true);
  2096. return false;
  2097. }
  2098. log.Info("========测量线程:自动聚焦成功!" + set.ToString() + "倍", true);
  2099. ////自动消像散
  2100. //if (!ImageStig1())
  2101. //{
  2102. // return false;
  2103. //}
  2104. ////放大到20000倍
  2105. //iSEM.SetMagnification(magMax*2);
  2106. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2107. //set = magMax*2;
  2108. //current = iSEM.GetMagnification();
  2109. //while (Math.Abs(current - set) > 1)
  2110. //{
  2111. // iSEM.SetMagnification(set);
  2112. // Thread.Sleep(200);
  2113. // current = iSEM.GetMagnification();
  2114. //}
  2115. ////自动对焦
  2116. //if (!ImageFocus1())
  2117. //{
  2118. // return false;
  2119. //}
  2120. iSEM.CloseReduced();
  2121. Thread.Sleep(200);
  2122. cycle_time = iSEM.GetCycleTime();
  2123. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2124. #endregion
  2125. #region 循环拍照
  2126. for (int n = 0; n < ct.Count; n++)
  2127. {
  2128. #region 恢复到拍照的状态
  2129. iSEM.SetStageGotoX(xpCur);
  2130. while (true)
  2131. {
  2132. Thread.Sleep(4000);
  2133. if (iSEM.GetStageIs() == 0)
  2134. {
  2135. break;
  2136. }
  2137. }
  2138. iSEM.SetStageGotoY(ypCur);
  2139. while (true)
  2140. {
  2141. Thread.Sleep(4000);
  2142. if (iSEM.GetStageIs() == 0)
  2143. {
  2144. break;
  2145. }
  2146. }
  2147. //恢复原来的放大倍数
  2148. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  2149. {
  2150. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2151. return false;
  2152. }
  2153. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2154. set = MParam.Photograph_Magnification;
  2155. current = iSEM.GetMagnification();
  2156. while (Math.Abs(current - set) > 1)
  2157. {
  2158. iSEM.SetMagnification(set);
  2159. Thread.Sleep(200);
  2160. current = iSEM.GetMagnification();
  2161. }
  2162. //恢复BeamShift的百分比值
  2163. iSEM.SetBeamShiftX(xs);
  2164. Thread.Sleep(200);
  2165. iSEM.SetBeamShiftY(ys);
  2166. Thread.Sleep(200);
  2167. #endregion
  2168. #region 移动到指定点位置
  2169. if (!MoveToPix(ct[n].X, ct[n].Y))
  2170. {
  2171. arg.State = false;
  2172. arg.Message = "移动到第一个点位置失败";
  2173. SendMsg("1-" + (35 + n).ToString());
  2174. //移动到第一个点失败
  2175. log.Error("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2176. }
  2177. log.Info("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2178. + "," + ct[n].Y.ToString() + ")", true);
  2179. #endregion
  2180. #region 如果是第一个点,则1W倍对焦
  2181. if (n == 0)
  2182. {
  2183. ////在第一个点上放大1W倍对焦
  2184. //if (!iSEM.SetMagnification(mag[n]))
  2185. //{
  2186. // log.Info("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2187. // return false;
  2188. //}
  2189. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2190. //while (true)
  2191. //{
  2192. // current = iSEM.GetMagnification();
  2193. // if (Math.Abs(current - mag[n]) < 1)
  2194. // {
  2195. // Thread.Sleep(200);
  2196. // break;
  2197. // }
  2198. // Thread.Sleep(200);
  2199. // iSEM.SetMagnification(set);
  2200. // Thread.Sleep(200);
  2201. //}
  2202. //if (MParam.SampleName == "2")
  2203. //{
  2204. // //窗口对焦
  2205. // iSEM.SetReduced1(340, 1, 340, 256);
  2206. // Thread.Sleep(200);
  2207. // iSEM.CmdFocusRate();
  2208. // Thread.Sleep(200);
  2209. // cycle_time = iSEM.GetCycleTime();
  2210. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2211. // //自动对焦
  2212. // if (!ImageFocus1(false))
  2213. // {
  2214. // return false;
  2215. // }
  2216. // //恢复全屏
  2217. // iSEM.CloseReduced();
  2218. // Thread.Sleep(200);
  2219. // cycle_time = iSEM.GetCycleTime();
  2220. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2221. //}
  2222. //else
  2223. //{
  2224. // //窗口对焦
  2225. // //iSEM.SetReduced(402, 128, 800, 600);
  2226. // //Thread.Sleep(200);
  2227. // iSEM.CmdFocusRate();
  2228. // Thread.Sleep(200);
  2229. // cycle_time = iSEM.GetCycleTime();
  2230. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2231. // //自动对焦
  2232. // if (!ImageFocus1(false))
  2233. // {
  2234. // return false;
  2235. // }
  2236. // //恢复全屏
  2237. // //iSEM.CloseReduced();
  2238. // //Thread.Sleep(200);
  2239. // cycle_time = iSEM.GetCycleTime();
  2240. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2241. //}
  2242. log.Info("========测量线程:进入内部观察,不对焦!", true);
  2243. //增亮图像
  2244. iSEM.SetAutoVideoOff();
  2245. Thread.Sleep(200);
  2246. float currentBright = iSEM.GetBrightness();
  2247. Thread.Sleep(200);
  2248. float currentContrast = iSEM.GetContrast();
  2249. Thread.Sleep(200);
  2250. //add by sun 2020-12-17 黄工觉得太亮
  2251. int m_BrightMore = 2;
  2252. int m_ContrastMore = 2;
  2253. if (MParam.SampleName == "3")
  2254. {
  2255. m_BrightMore = 0;
  2256. m_ContrastMore = 0;
  2257. }
  2258. //add by sun 2020-12-17 黄工觉得太亮 end
  2259. iSEM.SetBrightness(currentBright + m_BrightMore);
  2260. Thread.Sleep(200);
  2261. iSEM.SetContrast(currentContrast + m_ContrastMore);
  2262. Thread.Sleep(200);
  2263. }
  2264. #endregion
  2265. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  2266. //if((MParam.SampleName=="3")&&(n==0))
  2267. //{
  2268. // if (!GetImageFromSEM(mag[n]/2))
  2269. // log.Info("测量线程报错:第一个区域放大一半倍数" + (mag[n]/2).ToString() + "控制失败", true);
  2270. //}
  2271. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  2272. #region 拍照
  2273. if (!iSEM.SetMagnification(mag[n]))
  2274. {
  2275. arg.State = false;
  2276. arg.Message = "移动到第一个点位置拍照失败";
  2277. SendMsg("3-11");
  2278. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2279. return false;
  2280. }
  2281. log.Info("========测量线程:移动到第一个点位置拍照完成!", true);
  2282. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2283. set = mag[n];
  2284. current = iSEM.GetMagnification();
  2285. while (Math.Abs(current - set) > 1)
  2286. {
  2287. iSEM.SetMagnification(set);
  2288. Thread.Sleep(200);
  2289. current = iSEM.GetMagnification();
  2290. }
  2291. //获取像素大小
  2292. lsize.Add(iSEM.GetPixelSize());
  2293. Thread.Sleep(200);
  2294. //String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2295. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  2296. String fileName7 = data_path + "\\" + MParam.Firm + "-" + mag[n].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + n.ToString() + "-" + ImageNameTwo_1;
  2297. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  2298. log.Info("fileName7====================" + fileName7, true);
  2299. arg.Picture_Information.Picture_FullPath = fileName7;
  2300. arg.Picture_Information.Work_Status = "SEM";
  2301. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2302. Thread.Sleep(200);
  2303. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2304. Thread.Sleep(200);
  2305. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2306. Thread.Sleep(200);
  2307. //拍照前改变速度,延时
  2308. iSEM.CmdLineScan();
  2309. Thread.Sleep(200);
  2310. cycle_time = iSEM.GetCycleTime();
  2311. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2312. if (!GetImage(fileName7))
  2313. {
  2314. arg.State = false;
  2315. arg.Message = "移动到第一个点位置失败";
  2316. SendMsg("3-11");
  2317. log.Error("测量线程报错:" + arg.Message, false);
  2318. return false;
  2319. }
  2320. log.Info("========测量线程:移动到第一个点位置完成!", true);
  2321. iSEM.CmdPixelScan();
  2322. Thread.Sleep(200);
  2323. limg_path.Add(fileName7);
  2324. arg.Picture_Information.Picture_FullPath = fileName7;
  2325. arg.State = true;
  2326. arg.Message = "移动到第一个点位置拍照成功";
  2327. SendMsg("3-11");
  2328. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2329. Thread.Sleep(200);
  2330. cycle_time = iSEM.GetCycleTime();
  2331. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2332. // add by zjx 在测量图上显示放大倍数和像素大小等信息
  2333. float size = iSEM.GetPixelSize();
  2334. SaveMeasDataPic(fileName7, mag[n], size);
  2335. // add by zjx 在测量图上显示放大倍数和像素大小等信息 end
  2336. #endregion
  2337. }
  2338. #endregion
  2339. if (hand_intervene == 1)
  2340. {
  2341. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2342. }
  2343. }
  2344. else
  2345. {
  2346. if (hand_intervene == 1)
  2347. {
  2348. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2349. {
  2350. // return false;
  2351. }
  2352. }
  2353. else
  2354. {
  2355. //return false;
  2356. }
  2357. arg.State = false;
  2358. arg.Message = "获取位置及放大倍数失败";
  2359. SendMsg("3-10");
  2360. log.Error("测量线程报错:" + arg.Message, false);
  2361. }
  2362. //判断是否停止进程
  2363. if (key_stop)
  2364. {
  2365. log.Info("停止键按下", true);
  2366. return false;
  2367. }
  2368. }
  2369. ////14光束复位和Rotation关闭开关
  2370. //arg.Message = "光束复位成功";
  2371. //arg.State = true;
  2372. //SendMsg("1-36");
  2373. iSEM.SetTiltAngleOff();
  2374. Thread.Sleep(200);
  2375. iSEM.SetScanRotationOff();
  2376. Thread.Sleep(200);
  2377. iSEM.SetBeamShiftX(0);
  2378. Thread.Sleep(200);
  2379. iSEM.SetBeamShiftY(0);
  2380. Thread.Sleep(200);
  2381. //判断是否停止进程
  2382. if (key_stop)
  2383. {
  2384. return false;
  2385. }
  2386. return true;
  2387. }
  2388. //第一个孔的测试过程
  2389. public bool FirstHole()
  2390. {
  2391. // add by zjx 2020-12-18 为了测试只做能谱部分
  2392. if (MParam.IsonlyEDSForDebug == true)
  2393. {
  2394. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2395. log.Warn("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  2396. if (!SetVoltageAndIPROBE())
  2397. {
  2398. log.Error("测量线程:第一孔=====设置电压电流失败!目前是第 " + MParam.SampleName + " 类!", false);
  2399. return false;
  2400. }
  2401. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2402. //设置拉直的放大倍数
  2403. log.Info("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + MParam.Stretch_Magnification.ToString(), true);
  2404. if (!iSEM.SetMagnification(MParam.Stretch_Magnification))
  2405. {
  2406. log.Error("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + MParam.Stretch_Magnification.ToString(), false);
  2407. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2408. arg.State = false;
  2409. SendMsg("0-1");
  2410. return false;
  2411. }
  2412. float current = iSEM.GetMagnification();
  2413. while (Math.Abs(current - MParam.Stretch_Magnification) > 1)
  2414. {
  2415. iSEM.SetMagnification(MParam.Stretch_Magnification);
  2416. Thread.Sleep(200);
  2417. current = iSEM.GetMagnification();
  2418. }
  2419. arg.Message = "拉直放大倍数设置成功!";
  2420. arg.State = true;
  2421. SendMsg("0-1");
  2422. Thread.Sleep(2000);
  2423. //自动化流程-每个点都需要补偿54度
  2424. if (MParam.Is_Photograph == false)
  2425. {
  2426. log.Info("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2427. if (!TiltCorrection(54.0f))
  2428. {
  2429. log.Error("测量线程报错:倾斜补偿角度为54度失败", false);
  2430. arg.Message = "角度补偿54度失败!";
  2431. arg.State = false;
  2432. SendMsg("0-2");
  2433. return false;
  2434. }
  2435. arg.Message = "角度补偿54度成功!";
  2436. arg.State = true;
  2437. SendMsg("0-2");
  2438. Thread.Sleep(1000);
  2439. //判断是否停止进程
  2440. if (key_stop)
  2441. {
  2442. log.Info("停止键按下", true);
  2443. return false;
  2444. }
  2445. }
  2446. // 2是5/6类样品,不需要拉直
  2447. if (MParam.SampleName != "2")
  2448. {
  2449. log.Warn("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2450. if (!Straighten_Handle())
  2451. {
  2452. log.Info("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2453. return false;
  2454. }
  2455. log.Info("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2456. //判断是否停止进程
  2457. if (key_stop)
  2458. {
  2459. log.Info("停止键按下。", true);
  2460. return false;
  2461. }
  2462. }
  2463. else
  2464. {
  2465. arg.Message = "拉直操作自动对焦成功!";
  2466. arg.State = true;
  2467. SendMsg("1-0");
  2468. Thread.Sleep(1000);
  2469. arg.Message = "拉直拍照成功!";
  2470. arg.Picture_Information.Picture_FullPath = "";
  2471. arg.State = true;
  2472. SendMsg("1-1");
  2473. Thread.Sleep(1000);
  2474. arg.Message = "拉直操作完成";
  2475. arg.State = true;
  2476. SendMsg("1-2");
  2477. Thread.Sleep(1000);
  2478. }
  2479. //13. 自动 定位功能 PT沉积
  2480. log.Warn("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2481. if (!GetPoistion())
  2482. {
  2483. log.Error("测量线程报错:自动定位失败,程序退出。", false);
  2484. return false;
  2485. }
  2486. log.Info("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2487. //判断是否停止进程
  2488. if (key_stop)
  2489. {
  2490. log.Info("停止键按下。", true);
  2491. return false;
  2492. }
  2493. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2494. if (MParam.Is_Photograph == false)
  2495. {
  2496. if (MParam.IsCutingForDebug)
  2497. {
  2498. log.Warn("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!==" + MParam.IsCutingForDebug, true);
  2499. if (!FIBCross())
  2500. {
  2501. log.Error("测量线程报错:自动控制FIB切割失败。", false);
  2502. return false;
  2503. }
  2504. log.Info("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2505. }
  2506. }
  2507. //del by sun 2020-12-15 temp end
  2508. //判断是否停止进程
  2509. if (key_stop)
  2510. {
  2511. return false;
  2512. }
  2513. //16.找到切割位置
  2514. if (MParam.Is_Photograph == false)
  2515. {
  2516. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2517. if (!FindCross())
  2518. {
  2519. return false;
  2520. }
  2521. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2522. //判断是否停止进程
  2523. if (key_stop)
  2524. {
  2525. return false;
  2526. }
  2527. }
  2528. log.Warn("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2529. //将过程17最后的拍照图片提出给18步进行调用
  2530. List<String> limg_path = new List<string>();
  2531. List<float> lsize = new List<float>();
  2532. //17.自动控制SEM拍截面照
  2533. if (!ShotSection(ref limg_path, ref lsize))
  2534. {
  2535. log.Error("拍截面照失败!");
  2536. return false;
  2537. }
  2538. log.Info("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2539. //判断是否停止进程
  2540. if (key_stop)
  2541. {
  2542. return false;
  2543. }
  2544. //这段是临时的
  2545. //arg.State = true;
  2546. //arg.Message = "测量尺寸成功";
  2547. //SendMsg("1-40");
  2548. //18.自动层高分析
  2549. if (MParam.Is_Photograph == false)
  2550. {
  2551. log.Warn("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2552. float size = iSEM.GetPixelSize();
  2553. int state = 1;
  2554. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(MParam.SampleName), MParam.Firm, out state);
  2555. if (state == 0)
  2556. {
  2557. arg.Message = "测量尺寸失败";
  2558. arg.State = false;
  2559. SendMsg("3-12");
  2560. return false;
  2561. }
  2562. arg.State = true;
  2563. arg.Message = "测量尺寸成功";
  2564. SendMsg("3-12");
  2565. log.Info("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2566. }
  2567. }
  2568. //add by zjx 2020-12-18 为了测试只做能谱部分 end
  2569. //19.能谱分析
  2570. if (MParam.EDS)
  2571. {
  2572. log.Warn("测量线程:第一个孔的测试过程-19.能谱分析开始===" + MParam.EDS, true);
  2573. EDS_Analysis();
  2574. log.Info("测量线程:第一个孔的测试过程-19.能谱分析结束===" + MParam.EDS, true);
  2575. }
  2576. //20.复位
  2577. log.Info("===========测量线程:20.复位开始", true);
  2578. BeamShiftReset();
  2579. return true;
  2580. }
  2581. //非第一个孔的测试过程
  2582. public bool OtherHole()
  2583. {
  2584. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2585. log.Warn("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  2586. if (!SetVoltageAndIPROBE())
  2587. {
  2588. log.Error("测量线程:非第一孔==设置电压电流失败!目前是第 " + MParam.SampleName + " 类!", false);
  2589. return false;
  2590. }
  2591. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2592. //设置拉直的放大倍数
  2593. log.Info("设置拉直放大倍数!");
  2594. if (!iSEM.SetMagnification(MParam.Stretch_Magnification))
  2595. {
  2596. log.Error("拉直放大倍数设置失败,程序退出。", false);
  2597. arg.Message = "拉直放大倍数设置失败!";
  2598. arg.State = false;
  2599. SendMsg("0-1");
  2600. return false;
  2601. }
  2602. float current = iSEM.GetMagnification();
  2603. while (Math.Abs(current - MParam.Stretch_Magnification) > 1)
  2604. {
  2605. iSEM.SetMagnification(MParam.Stretch_Magnification);
  2606. Thread.Sleep(200);
  2607. current = iSEM.GetMagnification();
  2608. }
  2609. arg.Message = "拉直放大倍数设置成功!";
  2610. arg.State = true;
  2611. SendMsg("0-1");
  2612. Thread.Sleep(2000);
  2613. //自动化流程-每个点都需要补偿54度
  2614. if (MParam.Is_Photograph == false)
  2615. {
  2616. log.Info("角度补偿54度!");
  2617. if (!TiltCorrection(54.0f))
  2618. {
  2619. arg.Message = "角度补偿54度失败!";
  2620. arg.State = false;
  2621. SendMsg("0-2");
  2622. return false;
  2623. }
  2624. arg.Message = "角度补偿54度成功!";
  2625. arg.State = true;
  2626. SendMsg("0-2");
  2627. Thread.Sleep(2000);
  2628. //判断是否停止进程
  2629. if (key_stop)
  2630. {
  2631. return false;
  2632. }
  2633. }
  2634. if (MParam.SampleName != "2")
  2635. {
  2636. log.Warn("开始进行拉直操作!");
  2637. if (!Straighten_Handle())
  2638. {
  2639. log.Info("测量线程报错:拉直操作失败。", true);
  2640. return false;
  2641. }
  2642. //判断是否停止进程
  2643. if (key_stop)
  2644. {
  2645. log.Info("停止键按下。", true);
  2646. return false;
  2647. }
  2648. }
  2649. else
  2650. {
  2651. arg.Message = "拉直操作自动对焦成功!";
  2652. arg.State = true;
  2653. SendMsg("1-0");
  2654. Thread.Sleep(1000);
  2655. arg.Message = "拉直拍照成功!";
  2656. arg.Picture_Information.Picture_FullPath = "";
  2657. arg.State = true;
  2658. SendMsg("1-1");
  2659. Thread.Sleep(1000);
  2660. arg.Message = "拉直操作完成";
  2661. arg.State = true;
  2662. SendMsg("1-2");
  2663. }
  2664. //13. 自动 定位功能
  2665. log.Info("开始进行自动定位!");
  2666. if (!GetPoistion())
  2667. {
  2668. return false;
  2669. }
  2670. //判断是否停止进程
  2671. if (key_stop)
  2672. {
  2673. return false;
  2674. }
  2675. //14.自动控制FIB切割
  2676. if (MParam.Is_Photograph == false)
  2677. {
  2678. log.Warn("开始进行FIB切割!");
  2679. if (!FIBCross())
  2680. {
  2681. return false;
  2682. }
  2683. }
  2684. //判断是否停止进程
  2685. if (key_stop)
  2686. {
  2687. return false;
  2688. }
  2689. // 16.找到切割位置
  2690. if (MParam.Is_Photograph == false)
  2691. {
  2692. log.Warn("开始找切割位置!");
  2693. if (!FindCross())
  2694. {
  2695. return false;
  2696. }
  2697. //判断是否停止进程
  2698. if (key_stop)
  2699. {
  2700. return false;
  2701. }
  2702. }
  2703. //将过程17最后的拍照图片提出给18步进行调用
  2704. List<String> limg_path = new List<string>();
  2705. List<float> lsize = new List<float>();
  2706. //17.自动控制SEM拍截面照
  2707. log.Warn("开始控制SEM拍截面照!");
  2708. if (!ShotSection(ref limg_path, ref lsize))
  2709. {
  2710. //return false;
  2711. }
  2712. //判断是否停止进程
  2713. if (key_stop)
  2714. {
  2715. return false;
  2716. }
  2717. //这段是临时的
  2718. //arg.State = true;
  2719. //arg.Message = "测量尺寸成功";
  2720. //SendMsg("1-40");
  2721. //18.自动层高分析
  2722. if (MParam.Is_Photograph == false)
  2723. {
  2724. log.Warn("开始进行层高分析!");
  2725. float size = iSEM.GetPixelSize();
  2726. int state = 1;
  2727. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(MParam.SampleName), MParam.Firm, out state);
  2728. if (state == 0)
  2729. {
  2730. arg.Message = "测量尺寸失败";
  2731. arg.State = false;
  2732. SendMsg("3-12");
  2733. return false;
  2734. }
  2735. arg.State = true;
  2736. arg.Message = "测量尺寸成功";
  2737. SendMsg("3-12");
  2738. }
  2739. //19.能谱分析
  2740. if (MParam.EDS)
  2741. {
  2742. log.Warn("开始进行能谱分析!");
  2743. EDS_Analysis();
  2744. }
  2745. //20.复位 del by sun 2020-12-15
  2746. //BeamShiftReset();
  2747. //del by sun 2020-12-15 end
  2748. return true;
  2749. }
  2750. //测试完第一个孔后的样品台初始化操作。
  2751. //再调用CommonWork执行非第一个孔的测试过程
  2752. public bool OtherHole_Init()
  2753. {
  2754. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2755. #region 初始化
  2756. //1、不只拍照,且不是倾斜观测,则移动T轴
  2757. if (MParam.Is_Photograph == false && MParam.Tilt == false)
  2758. {
  2759. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2760. if (!iSEM.SetStageGotoT(0))
  2761. {
  2762. log.Error("样品台归零失败", false);
  2763. return false;
  2764. }
  2765. while (true)
  2766. {
  2767. Thread.Sleep(5000);
  2768. if (iSEM.GetStageIs() == 0)
  2769. {
  2770. break;
  2771. }
  2772. }
  2773. //判断是否停止进程
  2774. if (key_stop)
  2775. {
  2776. log.Info("停止键按下", true);
  2777. return false;
  2778. }
  2779. }
  2780. //2、如果是倾斜观测,则移动Z轴
  2781. if (MParam.Tilt == true)
  2782. {
  2783. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2784. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - MParam.ZDistance/1000))
  2785. //20201109, Z轴降到安全的位置上
  2786. if (!iSEM.SetStageGotoZ(fSateyZ))
  2787. {
  2788. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2789. return false;
  2790. }
  2791. while (true)
  2792. {
  2793. Thread.Sleep(5000);
  2794. if (iSEM.GetStageIs() == 0)
  2795. {
  2796. break;
  2797. }
  2798. }
  2799. //判断是否停止进程
  2800. if (key_stop)
  2801. {
  2802. log.Info("停止键按下", true);
  2803. return false;
  2804. }
  2805. }
  2806. //3. 根据光镜坐标控制样品台移动
  2807. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2808. {
  2809. //SendMsg("移动失败");
  2810. log.Error("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2811. return false;
  2812. }
  2813. log.Info("移动R轴到=" + currentHole.Position.R.ToString(), true);
  2814. while (true)
  2815. {
  2816. Thread.Sleep(5000);
  2817. if (iSEM.GetStageIs() == 0)
  2818. {
  2819. break;
  2820. }
  2821. }
  2822. //判断是否停止进程
  2823. if (key_stop)
  2824. {
  2825. log.Info("停止键按下", true);
  2826. return false;
  2827. }
  2828. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2829. {
  2830. //SendMsg("移动失败");
  2831. log.Error("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString() + "," + currentHole.Position.X.ToString() + ")", false);
  2832. return false;
  2833. }
  2834. log.Info("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2835. while (true)
  2836. {
  2837. Thread.Sleep(10000);
  2838. if (iSEM.GetStageIs() == 0)
  2839. {
  2840. break;
  2841. }
  2842. }
  2843. //判断是否停止进程
  2844. if (key_stop)
  2845. {
  2846. log.Info("停止键按下", true);
  2847. return false;
  2848. }
  2849. //4、倾斜观测时恢复Z轴
  2850. if (MParam.Tilt == true)
  2851. {
  2852. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2853. if (currentHole.Position.Z > 0.043)
  2854. {
  2855. log.Error("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2856. return false;
  2857. }
  2858. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2859. {
  2860. log.Error("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2861. return false;
  2862. }
  2863. while (true)
  2864. {
  2865. Thread.Sleep(5000);
  2866. if (iSEM.GetStageIs() == 0)
  2867. {
  2868. break;
  2869. }
  2870. }
  2871. //判断是否停止进程
  2872. if (key_stop)
  2873. {
  2874. log.Info("停止键按下", true);
  2875. return false;
  2876. }
  2877. }
  2878. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2879. if (MParam.Is_Photograph == false && MParam.Tilt == false)
  2880. {
  2881. if (!iSEM.SetStageGotoT(54))
  2882. {
  2883. log.Info("测量线程报错:校正54度有误", true);
  2884. return false;
  2885. }
  2886. while (true)
  2887. {
  2888. Thread.Sleep(5000);
  2889. if (iSEM.GetStageIs() == 0)
  2890. {
  2891. break;
  2892. }
  2893. }
  2894. }
  2895. //判断是否停止进程
  2896. if (key_stop)
  2897. {
  2898. log.Info("停止键按下", true);
  2899. return false;
  2900. }
  2901. //4、设置WD
  2902. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2903. Thread.Sleep(1000);
  2904. #endregion
  2905. return true;
  2906. }
  2907. //初始化拉直操作
  2908. public bool Straighten_Handle()
  2909. {
  2910. if (MParam.Tilt)
  2911. {
  2912. //倾斜样品台,SEM视野是黑色的
  2913. log.Info("测量线程:恢复到工作位置后重新调亮图像。", true);
  2914. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2915. {
  2916. log.Error("测量线程报错:重新设置到标准工作距离失败。", false);
  2917. return false;
  2918. }
  2919. Thread.Sleep(7000); //自动亮度对比度使用
  2920. }
  2921. //1、自动对焦
  2922. log.Info("测量线程:拉直操作前自动对焦开始", true);
  2923. iSEM.SetReduced(402, 128, 400, 400);
  2924. Thread.Sleep(200);
  2925. //add by sun 2020-12-15
  2926. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2927. //add by sun 2020-12-15 end
  2928. Thread.Sleep(200);
  2929. cycle_time = iSEM.GetCycleTime();
  2930. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2931. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2932. float m_TempBrightness = 50.0f;
  2933. float m_TempContrast = 30.0f;
  2934. if (MParam.SampleName == "3")
  2935. {
  2936. m_TempBrightness = 48.0f;
  2937. m_TempContrast = 29.0f;
  2938. }
  2939. //add by sun 2020-12-18 解决1(3\4)类样品拉直太白造成无法拉直问题
  2940. if (MParam.SampleName == "1")
  2941. {
  2942. m_TempBrightness = 50.0f;
  2943. m_TempContrast = 29.0f;
  2944. }
  2945. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2946. iSEM.SetAutoVideoOff();
  2947. Thread.Sleep(200);
  2948. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2949. Thread.Sleep(200);
  2950. iSEM.SetContrast(m_TempContrast);//30.0f
  2951. Thread.Sleep(200);
  2952. if (!ImageFocus1(false))
  2953. {
  2954. log.Error("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2955. arg.Message = "拉直操作自动对焦失败!";
  2956. arg.State = false;
  2957. SendMsg("1-0");
  2958. return false;
  2959. }
  2960. iSEM.CloseReduced();
  2961. Thread.Sleep(200);
  2962. cycle_time = iSEM.GetCycleTime();
  2963. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2964. iSEM.SetAutoVideoBrightnessAndContrast();
  2965. Thread.Sleep(5000);
  2966. arg.Message = "拉直操作自动对焦成功!";
  2967. arg.State = true;
  2968. SendMsg("1-0");
  2969. //判断是否停止进程
  2970. if (key_stop)
  2971. {
  2972. log.Info("停止键按下。", true);
  2973. return false;
  2974. }
  2975. //2、拍张照片
  2976. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2977. log.Info("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2978. //拍照前改变速度,延时
  2979. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2980. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2981. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2982. Thread.Sleep(200);
  2983. cycle_time = iSEM.GetCycleTime();
  2984. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2985. if (!GetImage(fileName0))
  2986. {
  2987. log.Error("测量线程报错:拉直拍照失败", false);
  2988. arg.Message = "拉直拍照失败";
  2989. arg.State = false;
  2990. SendMsg("1-1");
  2991. return false;
  2992. }
  2993. arg.Message = "拉直拍照成功!";
  2994. arg.Picture_Information.Picture_FullPath = fileName0;
  2995. arg.State = true;
  2996. SendMsg("1-1");
  2997. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2998. Thread.Sleep(200);
  2999. cycle_time = iSEM.GetCycleTime();
  3000. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3001. //3、华为接口,获取旋转角度
  3002. float degree = 0;
  3003. int direction = 0;
  3004. int state = 1;
  3005. wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  3006. log.Info("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  3007. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  3008. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  3009. if (state == 0)
  3010. {
  3011. log.Info("测量线程:图像处理接口参数state返回为零", false);
  3012. arg.Message = "图像处理接口参数state返回为零";
  3013. arg.State = false;
  3014. SendMsg("1-2");
  3015. if (hand_intervene == 1)
  3016. {
  3017. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  3018. {
  3019. return false;
  3020. }
  3021. }
  3022. else
  3023. {
  3024. return false;
  3025. }
  3026. return false;
  3027. }
  3028. if (direction == 2)
  3029. {
  3030. degree = -degree;
  3031. }
  3032. if (degree != 0)
  3033. {
  3034. //4、拉直,旋转R轴
  3035. log.Info("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  3036. //选择之前,先降Z轴
  3037. float Zpos = iSEM.GetStageAtZ();
  3038. Thread.Sleep(200);
  3039. log.Info("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  3040. if (!iSEM.SetStageGotoZ(fSateyZ))
  3041. {
  3042. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  3043. return false;
  3044. }
  3045. while (true)
  3046. {
  3047. Thread.Sleep(4000);
  3048. if (iSEM.GetStageIs() == 0)
  3049. {
  3050. break;
  3051. }
  3052. }
  3053. //判断是否停止进程
  3054. if (key_stop)
  3055. {
  3056. log.Info("停止键按下", true);
  3057. return false;
  3058. }
  3059. iSEM.SetStageDeltaR(degree);
  3060. while (true)
  3061. {
  3062. Thread.Sleep(4000);
  3063. if (iSEM.GetStageIs() == 0)
  3064. {
  3065. break;
  3066. }
  3067. }
  3068. if (!iSEM.SetStageGotoZ(Zpos))
  3069. {
  3070. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  3071. return false;
  3072. }
  3073. while (true)
  3074. {
  3075. Thread.Sleep(4000);
  3076. if (iSEM.GetStageIs() == 0)
  3077. {
  3078. break;
  3079. }
  3080. }
  3081. //判断是否停止进程
  3082. if (key_stop)
  3083. {
  3084. log.Info("停止键按下", true);
  3085. return false;
  3086. }
  3087. //4、设置WD
  3088. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3089. Thread.Sleep(1000);
  3090. }
  3091. arg.Message = "拉直操作完成";
  3092. arg.State = true;
  3093. SendMsg("1-2");
  3094. return true;
  3095. }
  3096. //角度补偿
  3097. public bool TiltCorrection(float a_fAngle)
  3098. {
  3099. if (!iSEM.SetTiltAngleOn())
  3100. {
  3101. return false;
  3102. }
  3103. Thread.Sleep(200);
  3104. //恢复原始状态
  3105. if (!iSEM.SetTiltAngle(a_fAngle))
  3106. {
  3107. return false;
  3108. }
  3109. return true;
  3110. }
  3111. //拍图
  3112. public bool GetImage(String a_fileName)
  3113. {
  3114. log.Info("获取分辨率开始!", true);
  3115. //3. 获取分辨率
  3116. int[] ImageSize = iSEM.GetImageStore();
  3117. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3118. {
  3119. return false;
  3120. }
  3121. short width = (short)ImageSize[0];
  3122. short height = (short)ImageSize[1];
  3123. log.Info("获取分辨率结束!" + a_fileName + "====" + width + "*" + height, true);
  3124. //4. 抓图
  3125. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  3126. {
  3127. log.Info("抓图失败!", true);
  3128. return false;
  3129. }
  3130. return true;
  3131. }
  3132. //拍图1
  3133. public bool GetImage1(String a_fileName)
  3134. {
  3135. //3. 获取分辨率
  3136. int[] ImageSize = iSEM.GetImageStore();
  3137. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3138. {
  3139. return false;
  3140. }
  3141. short width = (short)ImageSize[0];
  3142. short height = (short)ImageSize[1];
  3143. //4. 抓图
  3144. if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
  3145. {
  3146. return false;
  3147. }
  3148. return true;
  3149. }
  3150. #region 算法设计
  3151. //执行自动对焦
  3152. public bool ImageFocus()
  3153. {
  3154. if (MParam.FocusMode == 1)//手动
  3155. {
  3156. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3157. {
  3158. }
  3159. else
  3160. {
  3161. return false;
  3162. }
  3163. }
  3164. else if (MParam.FocusMode == 2)//自有自动
  3165. {
  3166. //郝工增加自动对焦算法
  3167. //处理文件夹
  3168. if (Directory.Exists(focus_path))
  3169. {
  3170. Directory.Delete(focus_path, true);
  3171. }
  3172. Thread.Sleep(3000);
  3173. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3174. Thread.Sleep(1000);
  3175. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3176. Thread.Sleep(1000);
  3177. //再创建文件夹
  3178. Directory.CreateDirectory(focus_path);
  3179. //1、对焦参数类,2、输出工作距离
  3180. int wd = 0;
  3181. //20201015 根据当前的工作距离重新计算对焦位置
  3182. float currentWd = iSEM.GetWorkingDistance();
  3183. //MParam.AutoFocus.UP = currentWd * 1000000 - MParam.AutoFocus.Step;
  3184. //MParam.AutoFocus.Down = currentWd * 1000000 + MParam.AutoFocus.Step;
  3185. Thread.Sleep(2000);
  3186. float currentMag = iSEM.GetMagnification();
  3187. Thread.Sleep(2000);
  3188. FocusParam pFoucs = new FocusParam();
  3189. if (currentMag <= MParam.Photograph_Magnification)
  3190. {
  3191. pFoucs = MParam.AutoFocus;
  3192. pFoucs.UP = 5050;
  3193. pFoucs.Down = 5150;
  3194. pFoucs.Step = 50;
  3195. pFoucs.fStep = 10;
  3196. pFoucs.Range = 50;
  3197. //4、设置WD
  3198. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3199. Thread.Sleep(1000);
  3200. }
  3201. else
  3202. {
  3203. pFoucs = MParam.AutoFocus;
  3204. pFoucs.UP = 5000;
  3205. pFoucs.Down = 5200;
  3206. pFoucs.Step = 10;
  3207. pFoucs.fStep = 5;
  3208. pFoucs.Range = 50;
  3209. //4、设置WD
  3210. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3211. Thread.Sleep(1000);
  3212. }
  3213. //log.Info("修改对焦参数", true);
  3214. AutoFocus(pFoucs, out wd);
  3215. log.Info("自动调节算法输出" + (wd * 0.00000001).ToString(), true);
  3216. //设置工作距离
  3217. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  3218. //设置完工作距离后必须延迟5秒
  3219. Thread.Sleep(5000);
  3220. //处理图片位置
  3221. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3222. }
  3223. else if (MParam.FocusMode == 3) //客户自动
  3224. {
  3225. //后期和客户对接接口
  3226. List<string> filenames = new List<string>();
  3227. String retfilename = wr.Img_Auto_Focus(filenames);
  3228. }
  3229. else //蔡司自动对焦
  3230. {
  3231. iSEM.CmdAutoFocusCoarse();
  3232. while (true)
  3233. {
  3234. Thread.Sleep(10000);
  3235. if (0 == iSEM.GetAutoFunction())
  3236. {
  3237. break;
  3238. }
  3239. }
  3240. iSEM.CmdAutoFocusFine();
  3241. while (true)
  3242. {
  3243. Thread.Sleep(10000);
  3244. if (0 == iSEM.GetAutoFunction())
  3245. {
  3246. break;
  3247. }
  3248. }
  3249. }
  3250. return true;
  3251. }
  3252. //执行自动对焦
  3253. public bool ImageFocus1(Boolean Is_Stig)
  3254. {
  3255. if (MParam.FocusMode == 1)//手动
  3256. {
  3257. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3258. {
  3259. }
  3260. else
  3261. {
  3262. return false;
  3263. }
  3264. }
  3265. else if (MParam.FocusMode == 2)//自有自动
  3266. {
  3267. #region 执行蔡司自动对焦程序
  3268. //服务地址
  3269. string snumstr = @"http://192.168.1.101:8123";
  3270. // 调用方法;只对焦不消像散
  3271. if (Is_Stig)
  3272. {
  3273. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);
  3274. if (focusstig != "success")
  3275. {
  3276. log.Error("对焦失败" + focusstig, false);
  3277. return false;
  3278. }
  3279. }
  3280. else
  3281. {
  3282. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);
  3283. if (onlyfocus != "success")
  3284. {
  3285. return false;
  3286. }
  3287. }
  3288. #endregion
  3289. }
  3290. else if (MParam.FocusMode == 3) //客户自动
  3291. {
  3292. //后期和客户对接接口
  3293. List<string> filenames = new List<string>();
  3294. String retfilename = wr.Img_Auto_Focus(filenames);
  3295. }
  3296. else //蔡司自动对焦
  3297. {
  3298. iSEM.CmdAutoFocusCoarse();
  3299. while (true)
  3300. {
  3301. Thread.Sleep(10000);
  3302. if (0 == iSEM.GetAutoFunction())
  3303. {
  3304. break;
  3305. }
  3306. }
  3307. iSEM.CmdAutoFocusFine();
  3308. while (true)
  3309. {
  3310. Thread.Sleep(10000);
  3311. if (0 == iSEM.GetAutoFunction())
  3312. {
  3313. break;
  3314. }
  3315. }
  3316. }
  3317. return true;
  3318. }
  3319. //执行自动消像散
  3320. public bool ImageStig()
  3321. {
  3322. if (MParam.FocusMode == 1)//手动
  3323. {
  3324. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3325. {
  3326. }
  3327. else
  3328. {
  3329. return false;
  3330. }
  3331. }
  3332. else if (MParam.FocusMode == 2)//自有自动
  3333. {
  3334. //郝工增加自动对焦算法
  3335. //处理文件夹
  3336. if (Directory.Exists(StigX_path))
  3337. {
  3338. Directory.Delete(StigX_path, true);
  3339. }
  3340. Thread.Sleep(3000);
  3341. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3342. Thread.Sleep(1000);
  3343. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3344. Thread.Sleep(1000);
  3345. //再创建文件夹
  3346. Directory.CreateDirectory(StigX_path);
  3347. //1、对焦参数类,2、输出像散值
  3348. int stigX = 0;
  3349. //根据当前的stigX重新计算像散值
  3350. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3351. //MParam.AutoStigX.Step = 10; //像散的步长为10
  3352. //MParam.AutoStigX.UP = currentStigX - MParam.AutoStigX.Step;
  3353. //MParam.AutoStigX.Down = currentStigX + MParam.AutoStigX.Step;
  3354. //设置工作距离
  3355. iSEM.SetAstigmatismX((float)0);
  3356. //设置完工作距离后必须延迟5秒
  3357. Thread.Sleep(5000);
  3358. //log.Info("修改消像散参数", true);
  3359. AutoStig(MParam.AutoStigX, out stigX);
  3360. log.Info("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3361. //设置工作距离
  3362. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3363. //设置完工作距离后必须延迟5秒
  3364. Thread.Sleep(5000);
  3365. //处理图片位置
  3366. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3367. //处理文件夹
  3368. if (Directory.Exists(StigY_path))
  3369. {
  3370. Directory.Delete(StigY_path, true);
  3371. }
  3372. Thread.Sleep(3000);
  3373. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3374. Thread.Sleep(1000);
  3375. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3376. Thread.Sleep(1000);
  3377. //再创建文件夹
  3378. Directory.CreateDirectory(StigY_path);
  3379. //1、对焦参数类,2、输出像散值
  3380. int stigY = 0;
  3381. //根据当前的stigX重新计算像散值
  3382. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3383. //MParam.AutoStigY.Step = 10; //像散的步长为10
  3384. //MParam.AutoStigY.UP = MParam.AutoStigY.;
  3385. //MParam.AutoStigY.Down = MParam.AutoStigY.Step;
  3386. iSEM.SetAstigmatismY((float)0);
  3387. Thread.Sleep(2000);
  3388. log.Info("修改消像散参数", true);
  3389. AutoStig(MParam.AutoStigY, out stigY);
  3390. log.Info("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3391. //设置工作距离
  3392. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3393. //设置完工作距离后必须延迟5秒
  3394. Thread.Sleep(5000);
  3395. }
  3396. else if (MParam.FocusMode == 3) //客户自动
  3397. {
  3398. //后期和客户对接接口
  3399. List<string> filenames = new List<string>();
  3400. String retfilename = wr.Img_Auto_Focus(filenames);
  3401. }
  3402. else //蔡司自动对焦
  3403. {
  3404. iSEM.CmdAutoFocusCoarse();
  3405. while (true)
  3406. {
  3407. Thread.Sleep(10000);
  3408. if (0 == iSEM.GetAutoFunction())
  3409. {
  3410. break;
  3411. }
  3412. }
  3413. iSEM.CmdAutoFocusFine();
  3414. while (true)
  3415. {
  3416. Thread.Sleep(10000);
  3417. if (0 == iSEM.GetAutoFunction())
  3418. {
  3419. break;
  3420. }
  3421. }
  3422. }
  3423. return true;
  3424. }
  3425. //自动聚焦
  3426. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  3427. {
  3428. a_nWd = 0;
  3429. float wd = iSEM.GetWorkingDistance();
  3430. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3431. if (a_param == null)
  3432. {
  3433. log.Info("空参数", true);
  3434. return false;
  3435. }
  3436. string path = a_param.Path;
  3437. if (!Directory.Exists(path))
  3438. {
  3439. log.Info("文件夹丢失", true);
  3440. return false;
  3441. }
  3442. string path_coarse = a_param.Path + "\\Coarse";
  3443. if (!Directory.Exists(path_coarse))
  3444. {
  3445. Directory.CreateDirectory(path_coarse);
  3446. }
  3447. string path_fine = a_param.Path + "\\Fine";
  3448. if (!Directory.Exists(path_fine))
  3449. {
  3450. Directory.CreateDirectory(path_fine);
  3451. }
  3452. //1. 拍照
  3453. //1.1, 粗拍照
  3454. //1.1.1, 根据参数计算拍照次数
  3455. double nUp = a_param.UP * 100.0;
  3456. double nDown = a_param.Down * 100.0;
  3457. double nStep = a_param.Step * 100.0;
  3458. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3459. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3460. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3461. //粗拍照
  3462. for (int i = 0; i < nTimes; i++)
  3463. {
  3464. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3465. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3466. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3467. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3468. int swd = cWd / 100;
  3469. //SendMsg("wd = " + swd.ToString() +"um");
  3470. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3471. arg.Picture_Information.Picture_FullPath = fileName;
  3472. if (!GetImage(fileName))
  3473. {
  3474. return false;
  3475. }
  3476. //arg.State = true;
  3477. //arg.Message = "自动对焦";
  3478. //SendMsg("0-9");
  3479. //判断是否停止进程
  3480. if (key_stop)
  3481. {
  3482. return false;
  3483. }
  3484. //Thread.Sleep(3000);
  3485. }
  3486. //1.2, 选定细拍照的工作距离
  3487. int CorWd = 510000;
  3488. ChooseBest(path_coarse, out CorWd);
  3489. if (CorWd == -1)
  3490. CorWd = 510000;
  3491. else
  3492. a_nWd = CorWd;
  3493. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3494. //1.3, 细拍照
  3495. if ((CorWd - a_param.Range * 100.0) <= 0)
  3496. {
  3497. return false;
  3498. }
  3499. double nfUp = CorWd - a_param.Range * 100.0;
  3500. double nfStep = a_param.fStep * 100.0;
  3501. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3502. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3503. for (int i = 0; i < nfTimes; i++)
  3504. {
  3505. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3506. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3507. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3508. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3509. int swd = cWd / 100;
  3510. //SendMsg("wd = " + swd.ToString() + "um");
  3511. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3512. arg.Picture_Information.Picture_FullPath = fileName;
  3513. if (!GetImage(fileName))
  3514. {
  3515. return false;
  3516. }
  3517. //arg.State = true;
  3518. //arg.Message = "自动对焦";
  3519. //SendMsg("0-9");
  3520. //判断是否停止进程
  3521. if (key_stop)
  3522. {
  3523. return false;
  3524. }
  3525. //Thread.Sleep(2000);
  3526. }
  3527. int fineWd = CorWd;
  3528. ChooseBest(path_fine, out fineWd);
  3529. //SendMsg("wd fine max = " + fineWd.ToString());
  3530. if (fineWd == -1)
  3531. a_nWd = CorWd;
  3532. else
  3533. a_nWd = fineWd;
  3534. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3535. //arg.State = true;
  3536. //arg.Message = "自动对焦";
  3537. //SendMsg(step_code);
  3538. return true;
  3539. }
  3540. //自动聚焦1
  3541. public bool AutoFocus1(FocusParam a_param, out int a_nWd)
  3542. {
  3543. a_nWd = 0;
  3544. float wd = iSEM.GetWorkingDistance();
  3545. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3546. if (a_param == null)
  3547. {
  3548. log.Info("空参数", true);
  3549. return false;
  3550. }
  3551. string path = a_param.Path;
  3552. if (!Directory.Exists(path))
  3553. {
  3554. log.Info("文件夹丢失", true);
  3555. return false;
  3556. }
  3557. string path_coarse = a_param.Path + "\\Coarse";
  3558. if (!Directory.Exists(path_coarse))
  3559. {
  3560. Directory.CreateDirectory(path_coarse);
  3561. }
  3562. string path_fine = a_param.Path + "\\Fine";
  3563. if (!Directory.Exists(path_fine))
  3564. {
  3565. Directory.CreateDirectory(path_fine);
  3566. }
  3567. //1. 拍照
  3568. //1.1, 粗拍照
  3569. //1.1.1, 根据参数计算拍照次数
  3570. double nUp = a_param.UP * 100.0;
  3571. double nDown = a_param.Down * 100.0;
  3572. double nStep = a_param.Step * 100.0;
  3573. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3574. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3575. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3576. //粗拍照
  3577. for (int i = 0; i < nTimes; i++)
  3578. {
  3579. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3580. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3581. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3582. Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
  3583. int swd = cWd / 100;
  3584. //SendMsg("wd = " + swd.ToString() +"um");
  3585. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3586. //arg.Picture_Information.Picture_FullPath = fileName;
  3587. if (!GetImage1(fileName))
  3588. {
  3589. return false;
  3590. }
  3591. //arg.State = true;
  3592. //arg.Message = "自动对焦";
  3593. //SendMsg(step_code);
  3594. //判断是否停止进程
  3595. if (key_stop)
  3596. {
  3597. return false;
  3598. }
  3599. //Thread.Sleep(3000);
  3600. }
  3601. //1.2, 选定细拍照的工作距离
  3602. int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3603. ChooseBest(path_coarse, out CorWd);
  3604. if (CorWd == -1)
  3605. CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3606. else
  3607. a_nWd = CorWd;
  3608. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3609. //1.3, 细拍照
  3610. if ((CorWd - a_param.Range * 100.0) <= 0)
  3611. {
  3612. return false;
  3613. }
  3614. double nfUp = CorWd - a_param.Range * 100.0;
  3615. double nfStep = a_param.fStep * 100.0;
  3616. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3617. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3618. for (int i = 0; i < nfTimes; i++)
  3619. {
  3620. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3621. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3622. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3623. Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
  3624. int swd = cWd / 100;
  3625. //SendMsg("wd = " + swd.ToString() + "um");
  3626. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3627. //arg.Picture_Information.Picture_FullPath = fileName;
  3628. if (!GetImage1(fileName))
  3629. {
  3630. return false;
  3631. }
  3632. //arg.State = true;
  3633. //arg.Message = "自动对焦";
  3634. //SendMsg(step_code);
  3635. //判断是否停止进程
  3636. if (key_stop)
  3637. {
  3638. return false;
  3639. }
  3640. //Thread.Sleep(2000);
  3641. }
  3642. int fineWd = CorWd;
  3643. ChooseBest(path_fine, out fineWd);
  3644. //SendMsg("wd fine max = " + fineWd.ToString());
  3645. if (fineWd == -1)
  3646. a_nWd = CorWd;
  3647. else
  3648. a_nWd = fineWd;
  3649. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3650. //arg.State = true;
  3651. //arg.Message = "自动对焦";
  3652. //SendMsg("0-9");
  3653. return true;
  3654. }
  3655. //自动消像散 AutoStig
  3656. public bool AutoStig(FocusParam a_param, out int a_nWd)
  3657. {
  3658. a_nWd = 0;
  3659. float wd = 0;
  3660. if (a_param.TYPE == 2)
  3661. {
  3662. wd = iSEM.GetAstigmatismX();
  3663. }
  3664. else if (a_param.TYPE == 3)
  3665. {
  3666. wd = iSEM.GetAstigmatismY();
  3667. }
  3668. else
  3669. {
  3670. log.Info("自动消像散参数设置有误", true);
  3671. return false;
  3672. }
  3673. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3674. if (a_param == null)
  3675. {
  3676. log.Info("空参数", true);
  3677. return false;
  3678. }
  3679. string path = a_param.Path;
  3680. if (!Directory.Exists(path))
  3681. {
  3682. log.Error("文件夹丢失", false);
  3683. return false;
  3684. }
  3685. string path_coarse = a_param.Path + "\\Coarse";
  3686. if (!Directory.Exists(path_coarse))
  3687. {
  3688. Directory.CreateDirectory(path_coarse);
  3689. }
  3690. string path_fine = a_param.Path + "\\Fine";
  3691. if (!Directory.Exists(path_fine))
  3692. {
  3693. Directory.CreateDirectory(path_fine);
  3694. }
  3695. //1. 拍照
  3696. //1.1, 粗拍照
  3697. //1.1.1, 根据参数计算拍照次数
  3698. double nUp = a_param.UP * 100.0;
  3699. double nDown = a_param.Down * 100.0;
  3700. double nStep = a_param.Step * 100.0;
  3701. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3702. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3703. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3704. //粗拍照
  3705. for (int i = 0; i < nTimes; i++)
  3706. {
  3707. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3708. if (a_param.TYPE == 2)
  3709. {
  3710. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3711. }
  3712. else if (a_param.TYPE == 3)
  3713. {
  3714. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3715. }
  3716. else
  3717. {
  3718. log.Info("自动消像散参数设置有误", true);
  3719. return false;
  3720. }
  3721. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3722. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3723. int swd = cWd / 100;
  3724. //SendMsg("wd = " + swd.ToString() +"um");
  3725. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3726. arg.Picture_Information.Picture_FullPath = fileName;
  3727. if (!GetImage(fileName))
  3728. {
  3729. return false;
  3730. }
  3731. arg.State = true;
  3732. arg.Message = "自动像散";
  3733. SendMsg("0-8");
  3734. //判断是否停止进程
  3735. if (key_stop)
  3736. {
  3737. return false;
  3738. }
  3739. //Thread.Sleep(3000);
  3740. }
  3741. //1.2, 选定细拍照的工作距离
  3742. int CorWd;
  3743. ChooseBest(path_coarse, out CorWd);
  3744. if (CorWd == -1)
  3745. {
  3746. a_nWd = 0;
  3747. }
  3748. else
  3749. {
  3750. a_nWd = CorWd;
  3751. }
  3752. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3753. //1.3, 细拍照
  3754. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3755. {
  3756. return false;
  3757. }
  3758. double nfUp = 0;
  3759. if (a_param.Range >= 0)
  3760. nfUp = CorWd - a_param.Range * 100.0;
  3761. else
  3762. nfUp = CorWd + a_param.Range * 100.0;
  3763. double nfStep = a_param.fStep * 100.0;
  3764. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3765. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3766. for (int i = 0; i < nfTimes; i++)
  3767. {
  3768. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3769. if (a_param.TYPE == 2)
  3770. {
  3771. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3772. }
  3773. else if (a_param.TYPE == 3)
  3774. {
  3775. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3776. }
  3777. else
  3778. {
  3779. log.Info("自动消像散参数设置有误", true);
  3780. return false;
  3781. }
  3782. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3783. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3784. int swd = cWd / 100;
  3785. //SendMsg("wd = " + swd.ToString() + "um");
  3786. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3787. arg.Picture_Information.Picture_FullPath = fileName;
  3788. if (!GetImage(fileName))
  3789. {
  3790. return false;
  3791. }
  3792. arg.State = true;
  3793. arg.Message = "自动像散";
  3794. SendMsg("0-8");
  3795. //判断是否停止进程
  3796. if (key_stop)
  3797. {
  3798. return false;
  3799. }
  3800. //Thread.Sleep(2000);
  3801. }
  3802. int fineWd = CorWd;
  3803. ChooseBest(path_fine, out fineWd);
  3804. //SendMsg("wd fine max = " + fineWd.ToString());
  3805. if (fineWd == -1)
  3806. a_nWd = CorWd;
  3807. else
  3808. a_nWd = fineWd;
  3809. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3810. //arg.State = true;
  3811. //arg.Message = "自动像散";
  3812. //SendMsg(step_code);
  3813. return true;
  3814. }
  3815. //执行自动消像散1
  3816. public bool ImageStig1()
  3817. {
  3818. if (MParam.FocusMode == 1)//手动
  3819. {
  3820. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3821. {
  3822. }
  3823. else
  3824. {
  3825. return false;
  3826. }
  3827. }
  3828. else if (MParam.FocusMode == 2)//自有自动
  3829. {
  3830. //郝工增加自动对焦算法
  3831. //处理文件夹
  3832. if (Directory.Exists(StigX_path))
  3833. {
  3834. Directory.Delete(StigX_path, true);
  3835. }
  3836. Thread.Sleep(3000);
  3837. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3838. Thread.Sleep(200);
  3839. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3840. Thread.Sleep(200);
  3841. //再创建文件夹
  3842. Directory.CreateDirectory(StigX_path);
  3843. //1、对焦参数类,2、输出像散值
  3844. int stigX = 0;
  3845. //根据当前的stigX重新计算像散值
  3846. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3847. //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
  3848. //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
  3849. //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
  3850. //设置工作距离
  3851. currentStigX = iSEM.GetAstigmatismX();
  3852. Thread.Sleep(1000);
  3853. FocusParam pFocus = new FocusParam();
  3854. pFocus = MParam.AutoStigX;
  3855. float old_up = MParam.AutoStigX.UP;
  3856. float old_down = MParam.AutoStigX.Down;
  3857. float setvalue = MParam.AutoStigX.UP;
  3858. pFocus.UP = currentStigX - setvalue;
  3859. pFocus.Down = currentStigX + setvalue;
  3860. //MParam.AutoStigX.Step = 1;
  3861. //MParam.AutoStigX.Range = (float)0.5;
  3862. //MParam.AutoStigX.fStep = (float)0.1;
  3863. log.Info("消像散参数: up = " + pFocus.UP + ",down = " + pFocus.Down + ",step =" + pFocus.Step + ",rang =" + pFocus.Range + ",fstep = " + pFocus.fStep, true);
  3864. //log.Info("修改消像散参数", true);
  3865. AutoStig1(pFocus, out stigX);
  3866. MParam.AutoStigX.UP = old_up;
  3867. MParam.AutoStigX.Down = old_down;
  3868. log.Info("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3869. //设置工作距离
  3870. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3871. //设置完工作距离后必须延迟5秒
  3872. Thread.Sleep(5000);
  3873. //处理图片位置
  3874. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3875. //处理文件夹
  3876. if (Directory.Exists(StigY_path))
  3877. {
  3878. Directory.Delete(StigY_path, true);
  3879. }
  3880. Thread.Sleep(3000);
  3881. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3882. Thread.Sleep(200);
  3883. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3884. Thread.Sleep(200);
  3885. //再创建文件夹
  3886. Directory.CreateDirectory(StigY_path);
  3887. //1、对焦参数类,2、输出像散值
  3888. int stigY = 0;
  3889. //根据当前的stigX重新计算像散值
  3890. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3891. //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
  3892. //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
  3893. //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
  3894. currentStigY = iSEM.GetAstigmatismY();
  3895. Thread.Sleep(1000);
  3896. //MParam.AutoStigY.UP = currentStigY - setvalue;
  3897. //MParam.AutoStigY.Down = currentStigY + setvalue;
  3898. //MParam.AutoStigY.Step = 1;
  3899. //MParam.AutoStigY.Range = (float)0.5;
  3900. //MParam.AutoStigY.fStep = (float)0.1;
  3901. FocusParam pFocusY = new FocusParam();
  3902. pFocusY = MParam.AutoStigY;
  3903. float old_upY = MParam.AutoStigY.UP;
  3904. float old_downY = MParam.AutoStigY.Down;
  3905. //float setvalue = MParam.AutoStigX.UP;
  3906. pFocusY.UP = currentStigY - setvalue;
  3907. pFocusY.Down = currentStigY + setvalue;
  3908. log.Info("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
  3909. AutoStig1(pFocusY, out stigY);
  3910. MParam.AutoStigY.UP = old_upY;
  3911. MParam.AutoStigY.Down = old_downY;
  3912. log.Info("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3913. //设置工作距离
  3914. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3915. //设置完工作距离后必须延迟5秒
  3916. Thread.Sleep(5000);
  3917. }
  3918. else if (MParam.FocusMode == 3) //客户自动
  3919. {
  3920. //后期和客户对接接口
  3921. List<string> filenames = new List<string>();
  3922. String retfilename = wr.Img_Auto_Focus(filenames);
  3923. }
  3924. else //蔡司自动对焦
  3925. {
  3926. iSEM.CmdAutoFocusCoarse();
  3927. while (true)
  3928. {
  3929. Thread.Sleep(10000);
  3930. if (0 == iSEM.GetAutoFunction())
  3931. {
  3932. break;
  3933. }
  3934. }
  3935. iSEM.CmdAutoFocusFine();
  3936. while (true)
  3937. {
  3938. Thread.Sleep(10000);
  3939. if (0 == iSEM.GetAutoFunction())
  3940. {
  3941. break;
  3942. }
  3943. }
  3944. }
  3945. return true;
  3946. }
  3947. //自动消像散 AutoStig1
  3948. public bool AutoStig1(FocusParam a_param, out int a_nWd)
  3949. {
  3950. a_nWd = 0;
  3951. float wd = 0;
  3952. if (a_param.TYPE == 2)
  3953. {
  3954. wd = iSEM.GetAstigmatismX();
  3955. }
  3956. else if (a_param.TYPE == 3)
  3957. {
  3958. wd = iSEM.GetAstigmatismY();
  3959. }
  3960. else
  3961. {
  3962. log.Info("自动消像散参数设置有误", true);
  3963. return false;
  3964. }
  3965. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3966. if (a_param == null)
  3967. {
  3968. log.Info("空参数", true);
  3969. return false;
  3970. }
  3971. string path = a_param.Path;
  3972. if (!Directory.Exists(path))
  3973. {
  3974. log.Info("文件夹丢失", true);
  3975. return false;
  3976. }
  3977. string path_coarse = a_param.Path + "\\Coarse";
  3978. if (!Directory.Exists(path_coarse))
  3979. {
  3980. Directory.CreateDirectory(path_coarse);
  3981. }
  3982. string path_fine = a_param.Path + "\\Fine";
  3983. if (!Directory.Exists(path_fine))
  3984. {
  3985. Directory.CreateDirectory(path_fine);
  3986. }
  3987. //1. 拍照
  3988. //1.1, 粗拍照
  3989. //1.1.1, 根据参数计算拍照次数
  3990. double nUp = a_param.UP * 100.0;
  3991. double nDown = a_param.Down * 100.0;
  3992. double nStep = a_param.Step * 100.0;
  3993. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3994. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3995. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3996. //粗拍照
  3997. for (int i = 0; i < nTimes; i++)
  3998. {
  3999. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  4000. if (a_param.TYPE == 2)
  4001. {
  4002. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  4003. }
  4004. else if (a_param.TYPE == 3)
  4005. {
  4006. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  4007. }
  4008. else
  4009. {
  4010. log.Info("自动消像散参数设置有误", true);
  4011. return false;
  4012. }
  4013. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4014. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4015. int swd = cWd / 100;
  4016. //SendMsg("wd = " + swd.ToString() +"um");
  4017. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4018. arg.Picture_Information.Picture_FullPath = fileName;
  4019. if (!GetImage1(fileName))
  4020. {
  4021. return false;
  4022. }
  4023. //arg.State = true;
  4024. //arg.Message = "自动像散";
  4025. //SendMsg(step_code);
  4026. //判断是否停止进程
  4027. if (key_stop)
  4028. {
  4029. return false;
  4030. }
  4031. //Thread.Sleep(3000);
  4032. }
  4033. //1.2, 选定细拍照的工作距离
  4034. int CorWd;
  4035. ChooseBest(path_coarse, out CorWd);
  4036. if (CorWd == -1)
  4037. {
  4038. a_nWd = 0;
  4039. }
  4040. else
  4041. {
  4042. a_nWd = CorWd;
  4043. }
  4044. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4045. //1.3, 细拍照
  4046. if ((CorWd - a_param.Range * 100.0) <= -10000)
  4047. {
  4048. return false;
  4049. }
  4050. double nfUp = 0;
  4051. if (a_param.Range >= 0)
  4052. nfUp = CorWd - a_param.Range * 100.0;
  4053. else
  4054. nfUp = CorWd + a_param.Range * 100.0;
  4055. double nfStep = a_param.fStep * 100.0;
  4056. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4057. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4058. for (int i = 0; i < nfTimes; i++)
  4059. {
  4060. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4061. if (a_param.TYPE == 2)
  4062. {
  4063. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  4064. }
  4065. else if (a_param.TYPE == 3)
  4066. {
  4067. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  4068. }
  4069. else
  4070. {
  4071. log.Info("自动消像散参数设置有误", true);
  4072. return false;
  4073. }
  4074. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4075. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4076. int swd = cWd / 100;
  4077. //SendMsg("wd = " + swd.ToString() + "um");
  4078. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4079. arg.Picture_Information.Picture_FullPath = fileName;
  4080. if (!GetImage1(fileName))
  4081. {
  4082. return false;
  4083. }
  4084. //arg.State = true;
  4085. //arg.Message = "自动像散";
  4086. //SendMsg(step_code);
  4087. //判断是否停止进程
  4088. if (key_stop)
  4089. {
  4090. return false;
  4091. }
  4092. //Thread.Sleep(2000);
  4093. }
  4094. int fineWd = CorWd;
  4095. ChooseBest(path_fine, out fineWd);
  4096. //SendMsg("wd fine max = " + fineWd.ToString());
  4097. if (fineWd == -1)
  4098. a_nWd = CorWd;
  4099. else
  4100. a_nWd = fineWd;
  4101. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4102. //arg.State = true;
  4103. //arg.Message = "自动像散";
  4104. //SendMsg("0-9");
  4105. return true;
  4106. }
  4107. //自动FIB对焦 AutoFIBFocus
  4108. public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
  4109. {
  4110. a_nWd = 0;
  4111. float wd = 0;
  4112. if (a_param.TYPE == 4)
  4113. {
  4114. wd = iSEM.GetFIBObjectivePotential();
  4115. }
  4116. else
  4117. {
  4118. log.Error("FIB自动聚焦参数设置有误", false);
  4119. return false;
  4120. }
  4121. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  4122. if (a_param == null)
  4123. {
  4124. log.Error("空参数", false);
  4125. return false;
  4126. }
  4127. string path = a_param.Path;
  4128. if (!Directory.Exists(path))
  4129. {
  4130. log.Error("文件夹丢失", false);
  4131. return false;
  4132. }
  4133. string path_coarse = a_param.Path + "\\Coarse";
  4134. if (!Directory.Exists(path_coarse))
  4135. {
  4136. Directory.CreateDirectory(path_coarse);
  4137. }
  4138. string path_fine = a_param.Path + "\\Fine";
  4139. if (!Directory.Exists(path_fine))
  4140. {
  4141. Directory.CreateDirectory(path_fine);
  4142. }
  4143. //1. 拍照
  4144. //1.1, 粗拍照
  4145. //1.1.1, 根据参数计算拍照次数
  4146. double nUp = a_param.UP * 100.0;
  4147. double nDown = a_param.Down * 100.0;
  4148. double nStep = a_param.Step * 100.0;
  4149. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  4150. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  4151. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  4152. //粗拍照
  4153. for (int i = 0; i < nTimes; i++)
  4154. {
  4155. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  4156. if (a_param.TYPE == 4)
  4157. {
  4158. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4159. }
  4160. else
  4161. {
  4162. log.Error("FIB对焦参数设置有误,对焦类型错", false);
  4163. return false;
  4164. }
  4165. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4166. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4167. int swd = cWd / 100;
  4168. //SendMsg("wd = " + swd.ToString() +"um");
  4169. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4170. arg.Picture_Information.Picture_FullPath = fileName;
  4171. if (!GetImage(fileName))
  4172. {
  4173. return false;
  4174. }
  4175. arg.State = true;
  4176. arg.Message = "FIB自动对焦";
  4177. SendMsg(step_code);
  4178. //判断是否停止进程
  4179. if (key_stop)
  4180. {
  4181. return false;
  4182. }
  4183. //Thread.Sleep(3000);
  4184. }
  4185. //1.2, 选定细拍照的工作距离
  4186. int CorWd;
  4187. ChooseBest(path_coarse, out CorWd);
  4188. a_nWd = CorWd;
  4189. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4190. //1.3, 细拍照
  4191. if ((CorWd - a_param.Range * 100.0) < 0)
  4192. {
  4193. return false;
  4194. }
  4195. double nfUp = CorWd - a_param.Range * 100.0;
  4196. double nfStep = a_param.fStep * 100.0;
  4197. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4198. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4199. for (int i = 0; i < nfTimes; i++)
  4200. {
  4201. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4202. if (a_param.TYPE == 4)
  4203. {
  4204. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4205. }
  4206. else
  4207. {
  4208. log.Error("自动消像散参数设置有误", false);
  4209. return false;
  4210. }
  4211. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4212. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4213. int swd = cWd / 100;
  4214. //SendMsg("wd = " + swd.ToString() + "um");
  4215. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4216. arg.Picture_Information.Picture_FullPath = fileName;
  4217. if (!GetImage(fileName))
  4218. {
  4219. return false;
  4220. }
  4221. arg.State = true;
  4222. arg.Message = "FIB自动对焦";
  4223. SendMsg(step_code);
  4224. //判断是否停止进程
  4225. if (key_stop)
  4226. {
  4227. return false;
  4228. }
  4229. //Thread.Sleep(2000);
  4230. }
  4231. int fineWd;
  4232. ChooseBest(path_fine, out fineWd);
  4233. //SendMsg("wd fine max = " + fineWd.ToString());
  4234. a_nWd = fineWd;
  4235. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4236. return true;
  4237. }
  4238. //LoG算子计算
  4239. private double LoGMean(string a_strImgPath)
  4240. {
  4241. //读入Img文件
  4242. if (!File.Exists(a_strImgPath))
  4243. {
  4244. return 0;
  4245. }
  4246. Mat src, gray_src;
  4247. int kernel_size = 3;
  4248. src = Cv2.ImRead(a_strImgPath);
  4249. gray_src = new Mat();
  4250. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4251. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4252. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4253. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4254. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  4255. Cv2.ConvertScaleAbs(src, src);
  4256. //图像的平均灰度
  4257. double meanValue = 0.0;
  4258. meanValue = Cv2.Mean(src)[0];
  4259. return meanValue;
  4260. }
  4261. //梯度计算
  4262. private double Tenengrad(string a_strImgPath)
  4263. {
  4264. //读入Img文件
  4265. if (!File.Exists(a_strImgPath))
  4266. {
  4267. return 0;
  4268. }
  4269. Mat src;
  4270. src = Cv2.ImRead(a_strImgPath);
  4271. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4272. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4273. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4274. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4275. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  4276. //图像的平均灰度
  4277. double meanValue = 0.0;
  4278. meanValue = Cv2.Mean(src)[0];
  4279. return meanValue;
  4280. }
  4281. //梯度计算
  4282. private double TTgrad(string a_strImgPath)
  4283. {
  4284. //读入Img文件
  4285. if (!File.Exists(a_strImgPath))
  4286. {
  4287. return 0;
  4288. }
  4289. Mat src;
  4290. src = Cv2.ImRead(a_strImgPath);
  4291. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4292. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4293. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4294. Mat scalex = new Mat();
  4295. Mat scaley = new Mat();
  4296. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  4297. Cv2.ConvertScaleAbs(src, scalex);
  4298. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  4299. Cv2.ConvertScaleAbs(src, scaley);
  4300. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  4301. //图像的平均灰度
  4302. double meanValue = 0.0;
  4303. meanValue = Cv2.Mean(src)[0];
  4304. return meanValue;
  4305. }
  4306. //三选二算法
  4307. private bool ChooseBest(string a_strImgPath, out int a_nWd)
  4308. {
  4309. a_nWd = -1;
  4310. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  4311. float[] values = new float[files.Length];
  4312. double smax1 = LoGMean(files[0]);
  4313. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  4314. double smax2 = Tenengrad(files[0]);
  4315. int wdmax2 = wdmax1;
  4316. double smax3 = TTgrad(files[0]);
  4317. int wdmax3 = wdmax1;
  4318. int x = 0;
  4319. foreach (var file in files)
  4320. {
  4321. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  4322. double svalue1 = LoGMean(file);
  4323. double svalue2 = Tenengrad(file);
  4324. double svalue3 = TTgrad(file);
  4325. if (smax1 < svalue1)
  4326. {
  4327. smax1 = svalue1;
  4328. wdmax1 = wd;
  4329. }
  4330. if (smax2 < svalue2)
  4331. {
  4332. smax2 = svalue2;
  4333. wdmax2 = wd;
  4334. }
  4335. if (smax3 < svalue3)
  4336. {
  4337. smax3 = svalue3;
  4338. wdmax3 = wd;
  4339. }
  4340. x++;
  4341. }
  4342. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  4343. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  4344. {
  4345. a_nWd = wdmax1;
  4346. //SendMsg("焦距 = " + wdmax1.ToString());
  4347. }
  4348. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  4349. {
  4350. a_nWd = wdmax2;
  4351. //SendMsg("焦距 = " + wdmax2.ToString());
  4352. }
  4353. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  4354. {
  4355. a_nWd = wdmax3;
  4356. //SendMsg("焦距 = " + wdmax3.ToString());
  4357. }
  4358. else
  4359. {
  4360. //SendMsg("对焦失败。");
  4361. return false;
  4362. }
  4363. return true;
  4364. }
  4365. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  4366. bool MoveToPixByMoveStage(float xc, float yc)
  4367. {
  4368. //单位是m/pix
  4369. float XpixSize = iSEM.GetPixelSize();
  4370. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4371. float YpixSize = iSEM.GetPixelSize();///(float)MParam.PixelSizeCor);
  4372. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4373. Thread.Sleep(500);
  4374. //0:width, 1:height
  4375. int[] imageSize = iSEM.GetImageStore();
  4376. int width = imageSize[0] / 2;
  4377. int height = imageSize[1] / 2;
  4378. log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4379. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4380. float deltX = (xc - (float)width) * XpixSize;
  4381. float deltY = (yc - (float)height) * YpixSize;
  4382. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  4383. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  4384. float xpCur = iSEM.GetStageAtX();
  4385. float ypCur = iSEM.GetStageAtY();
  4386. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4387. float xpNew = xpCur - deltX;
  4388. float ypNew = ypCur + deltY;
  4389. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4390. //计算光束偏移值:
  4391. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  4392. {
  4393. log.Info("X方向移动样品台", true);
  4394. if (!iSEM.SetStageGotoX(xpNew))
  4395. {
  4396. return false;
  4397. }
  4398. //判断是否移动完成
  4399. while (true)
  4400. {
  4401. Thread.Sleep(5000);
  4402. if (iSEM.GetStageIs() == 0)
  4403. {
  4404. break;
  4405. }
  4406. }
  4407. }
  4408. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  4409. {
  4410. log.Info("Y方向移动样品台", true);
  4411. if (!iSEM.SetStageGotoY(ypNew))
  4412. {
  4413. return false;
  4414. }
  4415. //判断是否移动完成
  4416. while (true)
  4417. {
  4418. Thread.Sleep(5000);
  4419. if (iSEM.GetStageIs() == 0)
  4420. {
  4421. break;
  4422. }
  4423. }
  4424. }
  4425. return true;
  4426. }
  4427. //移动到像素位置
  4428. bool MoveToPix(float xc, float yc)
  4429. {
  4430. //单位是m/pix
  4431. float XpixSize = iSEM.GetPixelSize();
  4432. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4433. float YpixSize = (XpixSize / (float)MParam.PixelSizeCor);
  4434. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4435. Thread.Sleep(200);
  4436. //0:width, 1:height
  4437. int[] imageSize = iSEM.GetImageStore();
  4438. int width = imageSize[0] / 2;
  4439. int height = imageSize[1] / 2;
  4440. log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4441. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4442. float deltX = (xc - (float)width) * XpixSize;
  4443. float deltY = (yc - (float)height) * YpixSize;
  4444. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  4445. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  4446. float xpCur = iSEM.GetStageAtX();
  4447. Thread.Sleep(200);
  4448. float ypCur = iSEM.GetStageAtY();
  4449. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4450. float xpNew = xpCur - deltX;
  4451. float ypNew = ypCur + deltY;
  4452. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4453. //计算最大偏移量
  4454. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4455. Thread.Sleep(200);
  4456. iSEM.SetBeamShiftX(100);
  4457. Thread.Sleep(200);
  4458. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4459. Thread.Sleep(200);
  4460. iSEM.SetBeamShiftX(beamXCur);
  4461. Thread.Sleep(200);
  4462. //计算光束偏移值:
  4463. float beamX = iSEM.GetBeamOffsetX();
  4464. log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4465. beamX = (-deltX + beamX);
  4466. log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4467. if (((beamX <= beamXMax) && (beamX >= 0)) ||
  4468. ((beamX >= -beamXMax) && (beamX < 0)))
  4469. {
  4470. log.Info("X方向移动光束", true);
  4471. float beamXShift = beamX * 100 / beamXMax;
  4472. log.Info("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  4473. if (!iSEM.SetBeamShiftX(beamXShift))//if (!iSEM.SetBeamOffsetX(beamX))
  4474. {
  4475. log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4476. return false;
  4477. }
  4478. }
  4479. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4480. {
  4481. log.Info("X方向移动样品台", true);
  4482. if (!iSEM.SetStageGotoX(xpNew))
  4483. {
  4484. return false;
  4485. }
  4486. //判断是否移动完成
  4487. while (true)
  4488. {
  4489. Thread.Sleep(4000);
  4490. if (iSEM.GetStageIs() == 0)
  4491. {
  4492. break;
  4493. }
  4494. }
  4495. }
  4496. float beamY = iSEM.GetBeamOffsetY();
  4497. log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4498. beamY = (-deltY + beamY);
  4499. log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4500. //计算最大偏移量
  4501. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4502. Thread.Sleep(200);
  4503. iSEM.SetBeamShiftY(100);
  4504. Thread.Sleep(200);
  4505. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4506. Thread.Sleep(200);
  4507. iSEM.SetBeamShiftY(beamYCur);
  4508. Thread.Sleep(200);
  4509. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  4510. ((beamY >= -beamYMax) && (beamY < 0)))
  4511. {
  4512. log.Info("Y方向移动光束", true);
  4513. float beamYShift = beamY * 100 / beamYMax;
  4514. log.Info("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  4515. //if(!iSEM.SetBeamOffsetY(beamY))
  4516. if (!iSEM.SetBeamShiftY(beamYShift))
  4517. {
  4518. log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4519. return false;
  4520. }
  4521. }
  4522. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4523. {
  4524. log.Info("Y方向移动样品台", true);
  4525. if (!iSEM.SetStageGotoY(ypNew))
  4526. {
  4527. return false;
  4528. }
  4529. //判断是否移动完成
  4530. while (true)
  4531. {
  4532. Thread.Sleep(4000);
  4533. if (iSEM.GetStageIs() == 0)
  4534. {
  4535. break;
  4536. }
  4537. }
  4538. }
  4539. return true;
  4540. }
  4541. //自动亮度对比度调节
  4542. //自动亮度对比度
  4543. public bool AutoBC(String step)
  4544. {
  4545. arg.Message = "自动亮度对比度";
  4546. arg.State = true;
  4547. //SendMsg("1-10");
  4548. iSEM.SetAutoBright(100);
  4549. iSEM.SetAutoContrast(100);
  4550. //log.Info("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
  4551. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  4552. {
  4553. log.Info("开始设置自动亮度、对比度失败,程序退出。", true);
  4554. return false;
  4555. }
  4556. Thread.Sleep(5000);
  4557. int i = 0;
  4558. float bright = iSEM.GetBrightness();
  4559. float contrast = iSEM.GetContrast();
  4560. //最多调节30s,30s没调节好,认为调节失败
  4561. for (i = 0; i < 5; i++)
  4562. {
  4563. bright = iSEM.GetBrightness();
  4564. contrast = iSEM.GetContrast();
  4565. if ((bright >= 40 && bright <= 60)
  4566. && (contrast >= 35 && contrast <= 40))
  4567. break;
  4568. Thread.Sleep(5000);
  4569. }
  4570. bright = iSEM.GetBrightness();
  4571. contrast = iSEM.GetContrast();
  4572. if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
  4573. && i == 5)
  4574. {
  4575. log.Info("亮度对比度调节时间过长", true);
  4576. return false;
  4577. }
  4578. iSEM.SetAutoBright(100);
  4579. iSEM.SetAutoContrast(100);
  4580. //log.Info("SEM模式自动亮度目标50,自动对比度目标30.", true);
  4581. return true;
  4582. }
  4583. //执行FIB自动对焦,FIBFocus
  4584. //执行自动消像散
  4585. public bool FIBFocus(String step_code)
  4586. {
  4587. if (MParam.FocusMode == 1)//手动
  4588. {
  4589. if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  4590. {
  4591. }
  4592. else
  4593. {
  4594. return false;
  4595. }
  4596. }
  4597. else if (MParam.FocusMode == 2)//自有自动
  4598. {
  4599. //郝工增加自动对焦算法
  4600. //处理文件夹
  4601. if (Directory.Exists(FIBfocus_path))
  4602. {
  4603. Directory.Delete(FIBfocus_path, true);
  4604. }
  4605. Thread.Sleep(3000);
  4606. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  4607. Thread.Sleep(1000);
  4608. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  4609. Thread.Sleep(1000);
  4610. //再创建文件夹
  4611. Directory.CreateDirectory(FIBfocus_path);
  4612. //1、对焦参数类,2、输出对焦值
  4613. int FIBFocus = 0;
  4614. //根据当前的stigX重新计算像散值
  4615. float currentFIBFocus = iSEM.GetFIBObjectivePotential();
  4616. //MParam.FIBFocus.Step = 10; //像散的步长为10
  4617. MParam.FIBFocus.UP = currentFIBFocus - MParam.FIBFocus.Step;
  4618. MParam.FIBFocus.Down = currentFIBFocus + MParam.FIBFocus.Step;
  4619. log.Info("修改FIB自动对焦参数", true);
  4620. AutoFIBFocus(MParam.FIBFocus, out FIBFocus, step_code);
  4621. //log.Info("算法输出"+ wd.ToString(), true);
  4622. //设置工作距离
  4623. iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
  4624. //设置完工作距离后必须延迟5秒
  4625. Thread.Sleep(5000);
  4626. //处理图片位置
  4627. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  4628. }
  4629. else if (MParam.FocusMode == 3) //客户自动
  4630. {
  4631. //后期和客户对接接口
  4632. List<string> filenames = new List<string>();
  4633. String retfilename = wr.Img_Auto_Focus(filenames);
  4634. }
  4635. else //蔡司自动对焦
  4636. {
  4637. iSEM.CmdAutoFocusCoarse();
  4638. while (true)
  4639. {
  4640. Thread.Sleep(10000);
  4641. if (0 == iSEM.GetAutoFunction())
  4642. {
  4643. break;
  4644. }
  4645. }
  4646. iSEM.CmdAutoFocusFine();
  4647. while (true)
  4648. {
  4649. Thread.Sleep(10000);
  4650. if (0 == iSEM.GetAutoFunction())
  4651. {
  4652. break;
  4653. }
  4654. }
  4655. }
  4656. return true;
  4657. }
  4658. /// 图像拉直算法
  4659. /// </summary>
  4660. /// <param name="Slope">倾斜角度</param>
  4661. /// <param name="x0">圆心坐标x</param>
  4662. /// <param name="y0">圆心坐标y</param>
  4663. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  4664. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  4665. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  4666. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  4667. /// <returns></returns>
  4668. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  4669. {
  4670. try
  4671. {
  4672. float xr = x1 - x0;//倾斜图到中心的距离差x
  4673. float yr = y1 - y0;//倾斜图到中心的距离差y
  4674. float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  4675. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  4676. float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
  4677. float k_S = k - Slope;//通过夹角差求x2,y2
  4678. //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  4679. //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  4680. float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
  4681. float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
  4682. if (Slope > 0 || Slope < 0)
  4683. {
  4684. Hx = x0 + x2;
  4685. Hy = y0 + y2;
  4686. }
  4687. else
  4688. {
  4689. Hx = 0;
  4690. Hy = 0;
  4691. }
  4692. return true;
  4693. }
  4694. catch (Exception)
  4695. {
  4696. return false;
  4697. }
  4698. }
  4699. // 放大倍数差校正
  4700. public bool MagComp(float oldMag, float newMag)
  4701. {
  4702. //开启电压校正时进行电压校正
  4703. if (MParam.MagComp)
  4704. {
  4705. int oldLevel = -1, newLevel = -1;
  4706. float deltX = 0, deltY = 0;
  4707. if (oldMag < MParam.MagRange1)
  4708. {
  4709. oldLevel = 1;
  4710. }
  4711. else if ((oldMag <= MParam.MagRange2)
  4712. && (oldMag > MParam.MagRange1))
  4713. {
  4714. oldLevel = 2;
  4715. }
  4716. else if ((oldMag <= MParam.MagRange3)
  4717. && (oldMag > MParam.MagRange2))
  4718. {
  4719. oldLevel = 3;
  4720. }
  4721. else if ((oldMag <= MParam.MagRange4)
  4722. && (oldMag > MParam.MagRange3))
  4723. {
  4724. oldLevel = 4;
  4725. }
  4726. if (newMag < MParam.MagRange1)
  4727. {
  4728. newLevel = 1;
  4729. }
  4730. else if ((newMag <= MParam.MagRange2)
  4731. && (newMag > MParam.MagRange1))
  4732. {
  4733. newLevel = 2;
  4734. }
  4735. else if ((newMag <= MParam.MagRange3)
  4736. && (newMag > MParam.MagRange2))
  4737. {
  4738. newLevel = 3;
  4739. }
  4740. else if ((newMag <= MParam.MagRange4)
  4741. && (newMag > MParam.MagRange3))
  4742. {
  4743. newLevel = 4;
  4744. }
  4745. if (oldLevel != newLevel)
  4746. {
  4747. if (oldLevel == 1)
  4748. {
  4749. switch (newLevel)
  4750. {
  4751. case 1:
  4752. break;
  4753. case 2:
  4754. deltX = MParam.MagCompX1;
  4755. deltY = MParam.MagCompY1;
  4756. break;
  4757. case 3:
  4758. deltX = MParam.MagCompX1 + MParam.MagCompX2;
  4759. deltY = MParam.MagCompY1 + MParam.MagCompY2;
  4760. break;
  4761. case 4:
  4762. deltX = MParam.MagCompX1 + MParam.MagCompX2 + MParam.MagCompX3;
  4763. deltY = MParam.MagCompY1 + MParam.MagCompY2 + MParam.MagCompY3;
  4764. break;
  4765. }
  4766. }
  4767. else if (oldLevel == 2)
  4768. {
  4769. switch (newLevel)
  4770. {
  4771. case 1:
  4772. deltX = -MParam.MagCompX1;
  4773. deltY = -MParam.MagCompY1;
  4774. break;
  4775. case 2:
  4776. break;
  4777. case 3:
  4778. deltX = MParam.MagCompX2;
  4779. deltY = MParam.MagCompY2;
  4780. break;
  4781. case 4:
  4782. deltX = MParam.MagCompX2 + MParam.MagCompX3;
  4783. deltY = MParam.MagCompY2 + MParam.MagCompY3;
  4784. break;
  4785. }
  4786. }
  4787. else if (oldLevel == 3)
  4788. {
  4789. switch (newLevel)
  4790. {
  4791. case 1:
  4792. deltX = -MParam.MagCompX1 - MParam.MagCompX2;
  4793. deltY = -MParam.MagCompY1 - MParam.MagCompY2;
  4794. break;
  4795. case 2:
  4796. deltX = -MParam.MagCompX2;
  4797. deltY = -MParam.MagCompY2;
  4798. break;
  4799. case 3:
  4800. break;
  4801. case 4:
  4802. deltX = -MParam.MagCompX2 - MParam.MagCompX3;
  4803. deltY = -MParam.MagCompY2 - MParam.MagCompX3;
  4804. break;
  4805. }
  4806. }
  4807. else if (oldLevel == 4)
  4808. {
  4809. switch (newLevel)
  4810. {
  4811. case 1:
  4812. deltX = -MParam.MagCompX1 - MParam.MagCompX2 - MParam.MagCompX3;
  4813. deltY = -MParam.MagCompY1 - MParam.MagCompY2 - MParam.MagCompY3;
  4814. break;
  4815. case 2:
  4816. deltX = -MParam.MagCompX2 - MParam.MagCompX3;
  4817. deltY = -MParam.MagCompY2 - MParam.MagCompY3;
  4818. break;
  4819. case 3:
  4820. deltX = -MParam.MagCompX3;
  4821. deltY = -MParam.MagCompY3;
  4822. break;
  4823. case 4:
  4824. break;
  4825. }
  4826. }
  4827. //通过移动光束校正便宜量
  4828. //单位是m/pix
  4829. float pixSize = iSEM.GetPixelSize();
  4830. log.Info("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
  4831. Thread.Sleep(500);
  4832. float xpCur = iSEM.GetStageAtX();
  4833. float ypCur = iSEM.GetStageAtY();
  4834. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4835. float xpNew = xpCur - deltX;
  4836. float ypNew = ypCur + deltY;
  4837. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4838. //计算最大偏移量
  4839. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4840. iSEM.SetBeamShiftX(100);
  4841. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4842. iSEM.SetBeamShiftX(beamXCur);
  4843. //计算光束偏移值:
  4844. float beamX = iSEM.GetBeamOffsetX();
  4845. log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4846. beamX = (-deltX + beamX);
  4847. log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4848. if (beamX < beamXMax || beamX < -beamXMax)
  4849. {
  4850. log.Info("X方向移动光束", true);
  4851. float beamXShift = beamX * 100 / beamXMax;
  4852. if (!iSEM.SetBeamShiftX(beamXShift))
  4853. {
  4854. log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4855. return false;
  4856. }
  4857. }
  4858. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4859. {
  4860. log.Info("X方向移动样品台", true);
  4861. if (!iSEM.SetStageGotoX(xpNew))
  4862. {
  4863. return false;
  4864. }
  4865. //判断是否移动完成
  4866. while (true)
  4867. {
  4868. Thread.Sleep(5000);
  4869. if (iSEM.GetStageIs() == 0)
  4870. {
  4871. break;
  4872. }
  4873. }
  4874. }
  4875. float beamY = iSEM.GetBeamOffsetY();
  4876. log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4877. beamY = (-deltY + beamY);
  4878. log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4879. //计算最大偏移量
  4880. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4881. iSEM.SetBeamShiftY(100);
  4882. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4883. iSEM.SetBeamShiftY(beamYCur);
  4884. if (beamY < beamYMax || beamY < -beamYMax)
  4885. {
  4886. log.Info("Y方向移动光束", true);
  4887. float beamYShift = beamY * 100 / beamYMax;
  4888. if (!iSEM.SetBeamShiftY(beamY))
  4889. {
  4890. log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4891. return false;
  4892. }
  4893. }
  4894. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4895. {
  4896. log.Info("Y方向移动样品台", true);
  4897. if (!iSEM.SetStageGotoY(ypNew))
  4898. {
  4899. return false;
  4900. }
  4901. //判断是否移动完成
  4902. while (true)
  4903. {
  4904. Thread.Sleep(5000);
  4905. if (iSEM.GetStageIs() == 0)
  4906. {
  4907. break;
  4908. }
  4909. }
  4910. }
  4911. }
  4912. }
  4913. return true;
  4914. }
  4915. #endregion
  4916. #region 能谱所有参数
  4917. //全局只有一个Extender
  4918. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  4919. public IExtenderControl iExtender = null;
  4920. const int ScanFieldSize = 1142;
  4921. MeasureDB m_MeasDB = null;
  4922. int m_nXrayId = 0;
  4923. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  4924. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  4925. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  4926. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  4927. /// <summary>
  4928. /// 做能谱分析
  4929. /// </summary>
  4930. /// <param name="a_FieldID">分析点视场ID,索引号</param>
  4931. /// <param name="a_FieldName">分析点视场名称</param>
  4932. /// <param name="a_FieldImagePositionID">分析点的视场位置ID,图像处理会返回多个Xray分析点,但我们这里只取第一个点所在的视场</param>
  4933. /// <returns>成功或失败</returns>
  4934. public bool DoEDS(int a_FieldID, string a_FieldName, int a_FieldImagePositionID)
  4935. {
  4936. try
  4937. {
  4938. //XrayID记录
  4939. log.Info("程序进入EDS测量!", true);
  4940. iExtender = factoryExtender.IExtender;
  4941. Thread.Sleep(500);
  4942. EDSParam param = MParam.EDSParam;
  4943. double dDwellTime = param.DwellTime;
  4944. int nImageType = param.ImageType;
  4945. double dScanSizes = param.ScanSize;
  4946. log.Info("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  4947. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  4948. string path = EDS_path;
  4949. string edsfn = path + "\\" + a_FieldImagePositionID.ToString() + "_" + ImageNameEDS;
  4950. log.Info("EDS_PATH=" + edsfn, true);
  4951. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);//get the field eds image where the anylysis point locate.
  4952. SendMsg("4-5");//向界面发送指令:能谱拍照
  4953. //arg.State = false;
  4954. arg.Message = "";
  4955. arg.Picture_Information.Picture_FullPath = edsfn;
  4956. SendMsg("EDSPic");
  4957. //送给客户,计算感兴趣的区域
  4958. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  4959. List<System.Drawing.Point> LinesStartPoint = new List<System.Drawing.Point>();
  4960. List<List<Segment>> listFeature = new List<List<Segment>>();
  4961. List<int> lines_height = new List<int>();
  4962. System.Drawing.Point area_pt = new System.Drawing.Point();
  4963. int width = 1;
  4964. int height = 1;
  4965. int AreasNo = 0;
  4966. long[] XrayData;
  4967. Dictionary<string, double> listElement;
  4968. int xrayCollectMode = param.XrayCollectMode;
  4969. switch (xrayCollectMode)
  4970. {
  4971. case 0://point mode
  4972. //点数据
  4973. int state = 0;
  4974. wr.EDS_Param_Points(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out listPoints, out state);
  4975. if (state == 0)
  4976. {
  4977. log.Error("点采集失败", false);
  4978. return false;
  4979. }
  4980. log.Info("返回 listPoints=" + listPoints.Count.ToString(), true);
  4981. if (!m_MeasDB.InsertAnylysisField(a_FieldID, a_FieldName, EDS_path, listPoints.Count, listFeature.Count, a_FieldImagePositionID))
  4982. {
  4983. log.Error("插入分析视场失败", false);
  4984. }
  4985. iExtender.BeginMultipleAquisition();
  4986. Thread.Sleep(100);
  4987. //点采集
  4988. m_nXrayId = 0;
  4989. foreach (System.Drawing.Point pt in listPoints)
  4990. {
  4991. XrayData = new long[2000];
  4992. listElement = new Dictionary<string, double>();
  4993. double realPointX, realPointY;
  4994. double currentPixelSize = iSEM.GetPixelSize();
  4995. log.Info("当前PixelSize:" + currentPixelSize.ToString());
  4996. realPointX = Convert.ToDouble(pt.X * currentPixelSize);
  4997. realPointY = pt.Y * currentPixelSize;
  4998. if (iExtender.XrayPointCollecting(param.PointTime, realPointX, realPointY, out XrayData, out listElement))
  4999. {
  5000. string ele = "";
  5001. foreach (var s in listElement)
  5002. {
  5003. ele += s.ToString();
  5004. }
  5005. log.Info("采集点:(" + pt.X.ToString() + ":" + pt.Y.ToString() + ") 元素:" + ele);
  5006. //写入数据库
  5007. m_nXrayId++;
  5008. log.Info("点采集结束,写入数据库开始--" + m_nXrayId.ToString(), true);
  5009. Boolean ret = m_MeasDB.InsertAPointXray(a_FieldID, m_nXrayId, pt.X, pt.Y, XrayData, listElement, a_FieldImagePositionID);
  5010. Thread.Sleep(1000);
  5011. }
  5012. }
  5013. iExtender.EndMultipleAquisition();
  5014. break;
  5015. case 1://line mode
  5016. log.Info("线扫描", true);
  5017. state = 0;
  5018. wr.EDS_Param_Lines(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out LinesStartPoint, out lines_height, out state);
  5019. string sp = "";
  5020. foreach (System.Drawing.Point p in LinesStartPoint)
  5021. {
  5022. sp += "(" + p.X + "," + p.Y + ")";
  5023. }
  5024. log.Info("线返回数据,lines=" + LinesStartPoint.Count.ToString() + " " + sp, true);
  5025. if (state == 1)
  5026. {
  5027. //将线转换为segment数据
  5028. log.Info("将线转换为segment数据", true);
  5029. for (int i = 0; i < LinesStartPoint.Count; i++)
  5030. {
  5031. List<Segment> segments = new List<Segment>();
  5032. for (int j = 0; j <= lines_height[i]; j++)
  5033. {
  5034. Segment segment = new Segment();
  5035. segment.X = LinesStartPoint[i].X;
  5036. segment.Y = LinesStartPoint[i].Y + j;
  5037. segment.Length = 1;
  5038. segments.Add(segment);
  5039. }
  5040. listFeature.Add(segments);
  5041. }
  5042. }
  5043. else
  5044. {
  5045. log.Error("线扫图片处理失败", false);
  5046. return false;
  5047. }
  5048. //线采集
  5049. iExtender.BeginMultipleAquisition();
  5050. Thread.Sleep(100);
  5051. for (int i = 0; i < listFeature.Count; i++)
  5052. {
  5053. List<Segment> listSeg = listFeature[i];
  5054. XrayData = new long[2000];
  5055. listElement = new Dictionary<string, double>();
  5056. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  5057. {
  5058. string ele = "";
  5059. foreach (var s in listElement)
  5060. {
  5061. ele += s.ToString();
  5062. }
  5063. log.Info("采集时间=" + param.AreaTime.ToString(), true);
  5064. log.Info("(" + listSeg[0].X + "," + listSeg[0].Y + ") height=" + lines_height[i] + " 元素:" + ele);
  5065. log.Info("线采集结束,写入数据库开始", true);
  5066. //写入数据库
  5067. m_nXrayId++;
  5068. AreasNo++;
  5069. m_MeasDB.InsertAAreaXay(a_FieldID, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  5070. }
  5071. else
  5072. {
  5073. log.Error("线扫xray失败");
  5074. }
  5075. }
  5076. iExtender.EndMultipleAquisition();
  5077. break;
  5078. case 2: //area mode
  5079. //面数据
  5080. state = 0;
  5081. wr.EDS_Param_Areas(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out area_pt, out width, out height, out state);
  5082. log.Info("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  5083. if (state == 1)
  5084. {
  5085. //将面转换为segment数据
  5086. List<Segment> segments = new List<Segment>();
  5087. for (int j = 0; j <= height; j++)
  5088. {
  5089. Segment segment = new Segment();
  5090. segment.X = area_pt.X;
  5091. segment.Y = area_pt.Y + j;
  5092. segment.Length = width;
  5093. segments.Add(segment);
  5094. }
  5095. listFeature.Add(segments);
  5096. }
  5097. else
  5098. {
  5099. log.Error("面扫图片处理失败", false);
  5100. return false;
  5101. }
  5102. //面采集
  5103. iExtender.BeginMultipleAquisition();
  5104. Thread.Sleep(100);
  5105. foreach (List<Segment> listSeg in listFeature)
  5106. {
  5107. XrayData = new long[2000];
  5108. listElement = new Dictionary<string, double>();
  5109. log.Info("AreaTime=" + param.AreaTime.ToString(), true);
  5110. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  5111. {
  5112. string ele = "";
  5113. foreach (var s in listElement)
  5114. {
  5115. ele += s.ToString();
  5116. }
  5117. log.Info(" 元素:" + ele);
  5118. log.Info("面采集结束,写入数据库开始", true);
  5119. //写入数据库
  5120. m_nXrayId++;
  5121. AreasNo++;
  5122. m_MeasDB.InsertAAreaXay(a_FieldID, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  5123. }
  5124. else
  5125. {
  5126. log.Error("面扫xray失败");
  5127. }
  5128. }
  5129. iExtender.EndMultipleAquisition();
  5130. break;
  5131. }
  5132. //存储数据
  5133. //向分析点数据库更新
  5134. }
  5135. catch (Exception e)
  5136. {
  5137. iExtender.EndMultipleAquisition();
  5138. log.Error(e.Message, false);
  5139. return false;
  5140. }
  5141. return true;
  5142. }
  5143. /// <summary>
  5144. /// 初始化数据库
  5145. /// </summary>
  5146. public void Init_MeasDB()
  5147. {
  5148. m_MeasDB = new MeasureDB(m_measureFile);
  5149. }
  5150. /// <summary>
  5151. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  5152. /// </summary>
  5153. /// <returns></returns>
  5154. public bool EDS_FindCross()
  5155. {
  5156. float x2 = 0, y2 = 0;
  5157. int state = 0;
  5158. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5159. //float m_TempBrightness = 50.0f;
  5160. //float m_TempContrast = 30.0f;
  5161. //if (MParam.SampleName == "3")
  5162. //{
  5163. // m_TempBrightness = 48.0f;
  5164. // m_TempContrast = 29.0f;
  5165. //}
  5166. //else if (MParam.SampleName == "0")
  5167. //{
  5168. // m_TempBrightness = 50.0f;
  5169. // m_TempContrast = 28.0f;
  5170. //}
  5171. ////add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5172. //iSEM.SetAutoVideoOff();
  5173. //Thread.Sleep(200);
  5174. //iSEM.SetBrightness(m_TempBrightness);//50.0f
  5175. //Thread.Sleep(200);
  5176. //iSEM.SetContrast(m_TempContrast);//30.0f
  5177. //Thread.Sleep(200);
  5178. //1.控制SEM放大到300倍
  5179. //float mag = MParam.Photograph_Magnification / 3;
  5180. float mag = 400;
  5181. // float mag = 200;
  5182. if (mag < 200)
  5183. {
  5184. mag = 200;
  5185. }
  5186. if (!iSEM.SetMagnification(mag))
  5187. {
  5188. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  5189. arg.State = false;
  5190. //SendMsg("3-1");
  5191. log.Error("测量线程报错:" + arg.Message, false);
  5192. return false;
  5193. }
  5194. Thread.Sleep(200);
  5195. float current = iSEM.GetMagnification();
  5196. Thread.Sleep(200);
  5197. while (Math.Abs(current - mag) > 2)
  5198. {
  5199. iSEM.SetMagnification(mag);
  5200. Thread.Sleep(200);
  5201. current = iSEM.GetMagnification();
  5202. Thread.Sleep(200);
  5203. }
  5204. Thread.Sleep(2000);
  5205. //判断是否停止进程
  5206. if (key_stop)
  5207. {
  5208. log.Info("停止键按下", true);
  5209. return false;
  5210. }
  5211. //3.控制SEM拍照
  5212. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
  5213. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5214. String fileName4 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS4;
  5215. log.Info("fileName4=============" + fileName4, true);
  5216. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5217. arg.Picture_Information.Picture_FullPath = fileName4;
  5218. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5219. Thread.Sleep(200);
  5220. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5221. Thread.Sleep(200);
  5222. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5223. Thread.Sleep(200);
  5224. //拍照前改变速度,延时
  5225. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5226. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5227. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5228. Thread.Sleep(200);
  5229. cycle_time = iSEM.GetCycleTime();
  5230. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5231. if (!GetImage(fileName4))
  5232. {
  5233. arg.State = false;
  5234. arg.Message = "SEM拍照找切割位置失败";
  5235. //SendMsg("3-2");
  5236. log.Error("测量线程报错:" + arg.Message, false);
  5237. return false;
  5238. }
  5239. //arg.Picture_Information.Picture_FullPath = fileName4;
  5240. arg.State = true;
  5241. arg.Message = "SEM拍照成功";
  5242. log.Info("测量线程" + arg.Message, false);
  5243. //SendMsg("3-2");
  5244. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5245. Thread.Sleep(200);
  5246. cycle_time = iSEM.GetCycleTime();
  5247. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5248. //判断是否停止进程
  5249. if (key_stop)
  5250. {
  5251. return false;
  5252. }
  5253. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  5254. //5.根据坐标控制SEM移动到切孔位置,居中
  5255. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  5256. log.Info("文件名=" + fileName4, true);
  5257. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x2, out y2, out state);
  5258. SendMsg("4-2");
  5259. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  5260. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  5261. if (state == 1)
  5262. {
  5263. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  5264. if (!MoveToPixByMoveStage(x2, y2))
  5265. {
  5266. //arg.State = false;
  5267. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  5268. //SendMsg("3-3");
  5269. log.Error("测量线程报错:" + arg.Message, false);
  5270. return false;
  5271. }
  5272. //判断是否移动完成
  5273. while (true)
  5274. {
  5275. Thread.Sleep(4000);
  5276. if (iSEM.GetStageIs() == 0)
  5277. {
  5278. break;
  5279. }
  5280. }
  5281. //arg.State = true;
  5282. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  5283. //SendMsg("3-3");
  5284. //高倍到低倍不进行对焦
  5285. //拍照前改变速度,延时
  5286. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5287. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5288. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5289. Thread.Sleep(200);
  5290. cycle_time = iSEM.GetCycleTime();
  5291. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5292. if (hand_intervene == 1)
  5293. {
  5294. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5295. }
  5296. }
  5297. else
  5298. {
  5299. arg.Message = "图像接口参数state返回值为零";
  5300. arg.State = false;
  5301. //SendMsg("3-3");
  5302. if (hand_intervene == 1)
  5303. {
  5304. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5305. {
  5306. return false;
  5307. }
  5308. }
  5309. else
  5310. {
  5311. return false;
  5312. }
  5313. log.Error("测量线程报错:" + arg.Message, false);
  5314. return false;
  5315. }
  5316. //判断是否停止进程
  5317. if (key_stop)
  5318. {
  5319. log.Info("停止键按下", true);
  5320. return false;
  5321. }
  5322. return true;
  5323. }
  5324. /// <summary>
  5325. /// 171.能谱第17步找点采集数据
  5326. /// </summary>
  5327. /// <returns></returns>
  5328. public bool EDS_ShotSection()
  5329. {
  5330. int state = 0;
  5331. #region 设置拍照的电压
  5332. //log.Info("测量线程:设置拍照电压" + MParam.Photograph_Voltage.ToString(), true);
  5333. //1、放大倍数参数photograph_
  5334. //if (!iSEM.SetSEMVoltage(2000)) //MParam.Photograph_Voltage
  5335. //{
  5336. // arg.Message = "电压设置" + MParam.Photograph_Voltage.ToString("0.0") + "失败";
  5337. // arg.State = false;
  5338. // SendMsg("3-4");
  5339. // log.Error("测量线程报错:" + arg.Message, false);
  5340. // return false;
  5341. //}
  5342. //add
  5343. #endregion
  5344. Thread.Sleep(200);
  5345. #region 设置拍照的放大倍数
  5346. log.Info("设置拍照放大倍数=" + MParam.Photograph_Magnification.ToString(), true);
  5347. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  5348. {
  5349. arg.Message = "放大倍数调整失败";
  5350. log.Error(arg.Message, false);
  5351. return false;
  5352. }
  5353. float set = MParam.Photograph_Magnification;
  5354. float current = iSEM.GetMagnification();
  5355. while (Math.Abs(current - set) > 1)
  5356. {
  5357. iSEM.SetMagnification(MParam.Photograph_Magnification);
  5358. Thread.Sleep(200);
  5359. current = iSEM.GetMagnification();
  5360. }
  5361. Thread.Sleep(3000 + (Int32)cycle_time);
  5362. //判断是否停止进程
  5363. if (key_stop)
  5364. {
  5365. log.Info("停止键按下", true);
  5366. return false;
  5367. }
  5368. #endregion
  5369. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  5370. //2.控制SEM自动对焦、亮度、对比度-接口
  5371. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  5372. if ((MParam.SampleName == "2") || (MParam.SampleName == "3"))
  5373. iSEM.SetReduced(402, 128, 600, 600);
  5374. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  5375. iSEM.SetReduced(402, 128, 340, 256);
  5376. Thread.Sleep(200);
  5377. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  5378. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5379. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  5380. Thread.Sleep(200);
  5381. cycle_time = iSEM.GetCycleTime();
  5382. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5383. //log.Info("关闭自动亮度对比度!", true);
  5384. //iSEM.SetAutoVideoOff();
  5385. //Thread.Sleep(5000);
  5386. log.Info("自动对焦开始!", true);
  5387. if (!ImageFocus1(false))
  5388. {
  5389. log.Error("自动对焦失败", false);
  5390. return false;
  5391. }
  5392. iSEM.CloseReduced();
  5393. Thread.Sleep(200);
  5394. cycle_time = iSEM.GetCycleTime();
  5395. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  5396. //判断是否停止进程
  5397. if (key_stop)
  5398. {
  5399. log.Info("停止键按下", true);
  5400. return false;
  5401. }
  5402. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5403. //float m_TempBrightness = 50.0f;
  5404. //float m_TempContrast = 30.0f;
  5405. //if (MParam.SampleName == "3")
  5406. //{
  5407. // m_TempBrightness = 50f;
  5408. // m_TempContrast = 29f;
  5409. // iSEM.SetBrightness(m_TempBrightness); //50.0f
  5410. // Thread.Sleep(200);
  5411. // iSEM.SetContrast(m_TempContrast); //30.0f
  5412. // Thread.Sleep(200);
  5413. //}
  5414. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5415. log.Info("开启自动亮度对比度", false);
  5416. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5417. {
  5418. log.Error("开启自动亮度对比度失败", false);
  5419. return false;
  5420. }
  5421. Thread.Sleep(3000);
  5422. //3、设置SEM补偿角度
  5423. if (MParam.Is_Photograph == false)
  5424. {
  5425. log.Info("角度补偿" + MParam.Correction_Angle.ToString() + "度", true);
  5426. if (!TiltCorrection(MParam.Correction_Angle))
  5427. {
  5428. arg.Message = "设置SEM进行角度补偿" + MParam.Correction_Angle.ToString("0") + "度失败";
  5429. arg.State = false;
  5430. log.Error(arg.Message, false);
  5431. return false;
  5432. }
  5433. Thread.Sleep(200);
  5434. //判断是否停止进程
  5435. if (key_stop)
  5436. {
  5437. log.Error("停止键按下", false);
  5438. return false;
  5439. }
  5440. }
  5441. SendMsg("4-4");
  5442. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5443. String fileName5 = data_path + "\\EDS\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  5444. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5445. log.Info("fileName5=" + fileName5, true);
  5446. arg.Picture_Information.Picture_FullPath = fileName5;
  5447. arg.Picture_Information.Work_Status = "SEM";
  5448. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5449. Thread.Sleep(200);
  5450. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5451. Thread.Sleep(200);
  5452. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5453. Thread.Sleep(200);
  5454. //拍照前改变速度,延时
  5455. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5456. log.Info("改变刷新率为 " + MParam.ScanSpeedHigh);
  5457. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5458. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5459. Thread.Sleep(200);
  5460. cycle_time = iSEM.GetCycleTime();
  5461. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  5462. log.Info("开始拍摄截面照!");
  5463. if (!GetImage(fileName5))
  5464. {
  5465. arg.Message = "SEM拍照失败";
  5466. log.Error(arg.Message, false);
  5467. return false;
  5468. }
  5469. log.Info("改变刷新率为 " + MParam.ScanSpeedNormal);
  5470. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5471. Thread.Sleep(200);
  5472. cycle_time = iSEM.GetCycleTime();
  5473. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5474. //判断是否停止进程
  5475. if (key_stop)
  5476. {
  5477. log.Info("停止键按下", true);
  5478. return false;
  5479. }
  5480. #endregion
  5481. if (MParam.Is_Photograph == false)//Is_Photograph 代表 是否是只拍照
  5482. {
  5483. #region 对当前矩形进行旋转校正
  5484. //8,计算切割面区域偏移角度及方向
  5485. float degree = 0;
  5486. int direction = 0;
  5487. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  5488. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  5489. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  5490. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  5491. if (state == 1)
  5492. {
  5493. //梯形角度
  5494. iSEM.SetScanRotationOn();
  5495. Thread.Sleep(200);
  5496. //20201128陈工要求,谭博返回角度*0.7
  5497. iSEM.SetScanRotation(Convert.ToSingle(degree * MParam.ScanRotCor));
  5498. Thread.Sleep(200);
  5499. arg.State = true;
  5500. arg.Message = "图像接口返回角度为:" + degree.ToString();
  5501. //SendMsg("3-8");
  5502. if (hand_intervene == 1)
  5503. {
  5504. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5505. }
  5506. }
  5507. else
  5508. {
  5509. arg.Message = "图像接口参数State返回值为零";
  5510. arg.State = false;
  5511. //SendMsg("3-8");
  5512. if (hand_intervene == 1)
  5513. {
  5514. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5515. {
  5516. return false;
  5517. }
  5518. }
  5519. else
  5520. {
  5521. //return false;
  5522. }
  5523. log.Error("测量线程报错:" + arg.Message, false);
  5524. }
  5525. //判断是否停止进程
  5526. if (key_stop)
  5527. {
  5528. log.Info("停止键按下", true);
  5529. return false;
  5530. }
  5531. Thread.Sleep(200);
  5532. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5533. String fileName6 = data_path + "\\EDS\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  5534. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5535. log.Info("fileName6=" + fileName6, true);
  5536. arg.Picture_Information.Picture_FullPath = fileName6;
  5537. arg.Picture_Information.Work_Status = "SEM";
  5538. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5539. Thread.Sleep(200);
  5540. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5541. Thread.Sleep(200);
  5542. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5543. Thread.Sleep(200);
  5544. //拍照前改变速度,延时
  5545. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5546. log.Info("改变刷新率为 " + MParam.ScanSpeedHigh);
  5547. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5548. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5549. Thread.Sleep(200);
  5550. cycle_time = iSEM.GetCycleTime();
  5551. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5552. log.Info("纠正后拍照!");
  5553. if (!GetImage(fileName6))
  5554. {
  5555. arg.Message = "SEM拍照失败";
  5556. log.Error(arg.Message, false);
  5557. return false;
  5558. }
  5559. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5560. Thread.Sleep(200);
  5561. cycle_time = iSEM.GetCycleTime();
  5562. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5563. //判断是否停止进程
  5564. if (key_stop)
  5565. {
  5566. log.Info("停止键按下", true);
  5567. return false;
  5568. }
  5569. #endregion
  5570. #region 获取两个位置上及放大倍数
  5571. //计算两个测量区域坐标
  5572. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  5573. List<float> mag = new List<float>();
  5574. System.Drawing.Point ct0;
  5575. float mag1, mag2, magMax;
  5576. log.Info("图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString(), true);
  5577. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(MParam.SampleName), MParam.Firm, out ct, out mag, out ct0, out state);
  5578. string s = "";
  5579. for (int i = 0; i < ct.Count; i++)
  5580. {
  5581. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  5582. + "放大倍数=" + mag[i];
  5583. }
  5584. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  5585. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  5586. "输入样品" + Convert.ToInt32(MParam.SampleName) +
  5587. "输入厂商" + MParam.Firm.ToString() +
  5588. s +
  5589. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  5590. #endregion
  5591. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  5592. {
  5593. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  5594. float xs = iSEM.GetBeamShiftX();
  5595. Thread.Sleep(200);
  5596. float ys = iSEM.GetBeamShiftY();
  5597. Thread.Sleep(200);
  5598. float xpCur = iSEM.GetStageAtX();
  5599. Thread.Sleep(200);
  5600. float ypCur = iSEM.GetStageAtY();
  5601. Thread.Sleep(200);
  5602. log.Info("原来的光束偏移量x = " + xs.ToString()
  5603. + "y=" + ys.ToString() + ","
  5604. + "原来样品台的位置x= " + xpCur.ToString()
  5605. + "y=" + ypCur.ToString(), true);
  5606. #endregion
  5607. //找到放大倍数最大值
  5608. magMax = mag[0];
  5609. for (int m = 1; m < mag.Count; m++)
  5610. {
  5611. if (mag[m] > magMax)
  5612. {
  5613. magMax = mag[m];
  5614. }
  5615. }
  5616. #region 移动到梯形左上角
  5617. //20201127将视野移动到梯形左上角位置
  5618. log.Warn("开始对焦 移动到对焦点( " + ct0.X.ToString()
  5619. + "," + ct0.Y.ToString() + ")", true);
  5620. MoveToPix(ct0.X, ct0.Y);
  5621. //关闭自动亮度对比度
  5622. //iSEM.SetAutoVideoOff();
  5623. //Thread.Sleep(2000);
  5624. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5625. //if (MParam.SampleName == "3")
  5626. //{
  5627. // m_TempBrightness = 50f;
  5628. // m_TempContrast = 29f;
  5629. // iSEM.SetBrightness(m_TempBrightness); //50.0f
  5630. // Thread.Sleep(200);
  5631. // iSEM.SetContrast(m_TempContrast); //30.0f
  5632. // Thread.Sleep(200);
  5633. //}
  5634. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5635. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  5636. if (MParam.SampleName == "3")
  5637. {
  5638. iSEM.SetReduced(402, 128, 480, 450);
  5639. }
  5640. else
  5641. {
  5642. iSEM.SetReduced(402, 128, 480, 450);
  5643. }
  5644. Thread.Sleep(200);
  5645. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  5646. log.Info("改变刷新率");
  5647. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5648. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  5649. Thread.Sleep(200);
  5650. cycle_time = iSEM.GetCycleTime();
  5651. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5652. //放大到6000倍
  5653. log.Info("放大到倍数" + magMax / 4);
  5654. iSEM.SetMagnification(magMax / 4);
  5655. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5656. set = magMax / 4;
  5657. current = iSEM.GetMagnification();
  5658. while (Math.Abs(current - set) > 1)
  5659. {
  5660. iSEM.SetMagnification(set);
  5661. Thread.Sleep(200);
  5662. current = iSEM.GetMagnification();
  5663. }
  5664. if (MParam.SampleName == "3")
  5665. {
  5666. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  5667. iSEM.SetBrightness(50.0f); //50.0f
  5668. Thread.Sleep(200);
  5669. iSEM.SetContrast(30.0f); //30.0f
  5670. Thread.Sleep(200);
  5671. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  5672. }
  5673. //自动对焦
  5674. log.Info("开始自动聚焦 " + set.ToString() + "倍", true);
  5675. if (!ImageFocus1(true))
  5676. {
  5677. log.Error("========测量线程:自动聚焦失败!" + set.ToString() + "倍", false);
  5678. return false;
  5679. }
  5680. //放大到10000倍
  5681. log.Info("放大到倍数" + magMax / 2);
  5682. iSEM.SetMagnification(magMax / 2);
  5683. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5684. set = magMax / 2;
  5685. current = iSEM.GetMagnification();
  5686. while (Math.Abs(current - set) > 1)
  5687. {
  5688. iSEM.SetMagnification(set);
  5689. Thread.Sleep(200);
  5690. current = iSEM.GetMagnification();
  5691. }
  5692. //自动对焦
  5693. log.Info("开始自动聚焦 " + set.ToString() + "倍", true);
  5694. if (!ImageFocus1(true))
  5695. {
  5696. log.Info("自动聚焦失败!" + set.ToString() + "倍", true);
  5697. return false;
  5698. }
  5699. iSEM.CloseReduced();
  5700. Thread.Sleep(200);
  5701. cycle_time = iSEM.GetCycleTime();
  5702. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5703. #endregion
  5704. log.Warn("对焦完成,开始用能谱拍摄观测点照片!并分析图片以获得Xray点位置!");
  5705. #region 恢复到拍照的状态
  5706. log.Info("恢复到拍照的状态!");
  5707. iSEM.SetStageGotoX(xpCur);
  5708. while (true)
  5709. {
  5710. Thread.Sleep(4000);
  5711. if (iSEM.GetStageIs() == 0)
  5712. {
  5713. break;
  5714. }
  5715. }
  5716. iSEM.SetStageGotoY(ypCur);
  5717. while (true)
  5718. {
  5719. Thread.Sleep(4000);
  5720. if (iSEM.GetStageIs() == 0)
  5721. {
  5722. break;
  5723. }
  5724. }
  5725. //恢复原来的放大倍数
  5726. log.Info("恢复原来的放大倍数!" + MParam.Photograph_Magnification);
  5727. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  5728. {
  5729. log.Error("恢复放大倍数失败", false);
  5730. return false;
  5731. }
  5732. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5733. set = MParam.Photograph_Magnification;
  5734. current = iSEM.GetMagnification();
  5735. while (Math.Abs(current - set) > 1)
  5736. {
  5737. iSEM.SetMagnification(set);
  5738. Thread.Sleep(200);
  5739. current = iSEM.GetMagnification();
  5740. }
  5741. //恢复BeamShift的百分比值
  5742. iSEM.SetBeamShiftX(xs);
  5743. Thread.Sleep(200);
  5744. iSEM.SetBeamShiftY(ys);
  5745. Thread.Sleep(200);
  5746. #endregion
  5747. log.Warn("移动到指定观测点!并准备打Xray");
  5748. if (!MoveToPix(ct[0].X, ct[0].Y))
  5749. {
  5750. log.Error("移动到第一个点位置失败", false);
  5751. }
  5752. Thread.Sleep(5000);//wait untill the auto brightness and auto contrast finished!
  5753. }
  5754. #endregion
  5755. SendMsg("4-4");//向界面发送指令:放大并对拍摄点对焦
  5756. Thread.Sleep(200);
  5757. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  5758. #region 拍照
  5759. log.Info("进入内部观察,不对焦!", true);
  5760. log.Info("开始拍照,设置放大倍数" + mag[0]);
  5761. if (!iSEM.SetMagnification(mag[0]))
  5762. {
  5763. log.Error("移动到第一个点位置拍照失败", false);
  5764. return false;
  5765. }
  5766. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5767. set = mag[0];
  5768. current = iSEM.GetMagnification();
  5769. while (Math.Abs(current - set) > 1)
  5770. {
  5771. iSEM.SetMagnification(set);
  5772. Thread.Sleep(200);
  5773. current = iSEM.GetMagnification();
  5774. }
  5775. Thread.Sleep(200);
  5776. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5777. String fileName7 = data_path + "\\EDS\\" + MParam.Firm + "-" + mag[0].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-0-" + ImageNameTwo_1;
  5778. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5779. log.Info("fileName7=" + fileName7, true);
  5780. arg.Picture_Information.Picture_FullPath = fileName7;
  5781. arg.Picture_Information.Work_Status = "SEM";
  5782. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5783. Thread.Sleep(200);
  5784. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5785. Thread.Sleep(200);
  5786. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5787. Thread.Sleep(200);
  5788. //拍照前改变速度,延时
  5789. iSEM.CmdLineScan();
  5790. Thread.Sleep(200);
  5791. cycle_time = iSEM.GetCycleTime();
  5792. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5793. log.Warn("EDS获取指定观测点图片,并打Xray");
  5794. DoEDS(m_nWorkHoleNo, m_cutHoles[m_nWorkHoleNo].HoleName, 1);
  5795. log.Info("像素扫描:CmdPixelScan");
  5796. iSEM.CmdPixelScan();
  5797. Thread.Sleep(200);
  5798. log.Info("改变刷新率 " + MParam.ScanSpeedNormal);
  5799. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5800. Thread.Sleep(200);
  5801. cycle_time = iSEM.GetCycleTime();
  5802. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5803. SendMsg("4-6");//向界面发生指令:采集能谱信息
  5804. #endregion
  5805. }
  5806. iSEM.SetTiltAngleOff();
  5807. Thread.Sleep(200);
  5808. iSEM.SetScanRotationOff();
  5809. Thread.Sleep(200);
  5810. iSEM.SetBeamShiftX(0);
  5811. Thread.Sleep(200);
  5812. iSEM.SetBeamShiftY(0);
  5813. Thread.Sleep(200);
  5814. //判断是否停止进程
  5815. return true;
  5816. }
  5817. /// <summary>
  5818. /// 19.能谱分析
  5819. /// </summary>
  5820. /// <returns></returns>
  5821. public bool EDS_Analysis()
  5822. {
  5823. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  5824. if (MParam.EDSZ < Z_Min || MParam.EDSZ > Z_Max)
  5825. {
  5826. log.Info("Z轴位置设置超出范围.", true);
  5827. return false;
  5828. }
  5829. log.Info("将Z轴位置指定到:" + MParam.EDSZ.ToString(), true);
  5830. if (!iSEM.SetStageGotoZ(MParam.EDSZ))
  5831. {
  5832. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  5833. return false;
  5834. }
  5835. while (true)
  5836. {
  5837. Thread.Sleep(2000);
  5838. if (iSEM.GetStageIs() == 0)
  5839. {
  5840. break;
  5841. }
  5842. }
  5843. //判断是否停止进程
  5844. if (key_stop)
  5845. {
  5846. log.Info("停止键按下", true);
  5847. return false;
  5848. }
  5849. SendMsg("4-0");
  5850. Thread.Sleep(200);
  5851. //2.角度改为54度
  5852. iSEM.SetScanRotationOff();
  5853. Thread.Sleep(200);
  5854. iSEM.SetSEMVoltage(7000);
  5855. Thread.Sleep(500);
  5856. iSEM.SetSEMIPROBE(0.5F / 1000000000);
  5857. Thread.Sleep(500);
  5858. iSEM.SetAutoVideoBrightnessAndContrast();
  5859. //iSEM.SetAutoVideoBrightness();
  5860. //iSEM.SetAutoVideoContrast();
  5861. Thread.Sleep(2000);
  5862. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5863. //关闭自动亮度对比度
  5864. //iSEM.SetAutoVideoOff();
  5865. //Thread.Sleep(1000);
  5866. //float m_TempBrightness = 50f;
  5867. //float m_TempContrast = 29f;
  5868. //if (MParam.SampleName == "3")
  5869. //{
  5870. // m_TempBrightness = 50f;
  5871. // m_TempContrast = 29f;
  5872. //}
  5873. //else if (MParam.SampleName == "0")
  5874. //{
  5875. // m_TempBrightness = 50f;
  5876. // m_TempContrast = 28f;
  5877. //}
  5878. //iSEM.SetBrightness(m_TempBrightness); //50.0f
  5879. //Thread.Sleep(200);
  5880. //iSEM.SetContrast(m_TempContrast); //30.0f
  5881. //Thread.Sleep(1000);
  5882. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5883. iSEM.SetMagnification(600);
  5884. Thread.Sleep(500);
  5885. SendMsg("4-1");
  5886. Thread.Sleep(200);
  5887. //5.自动对焦
  5888. iSEM.SetReduced(256, 192, 512, 512);
  5889. Thread.Sleep(200);
  5890. //add by sun 2020-12-15
  5891. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5892. //add by sun 2020-12-15 end
  5893. Thread.Sleep(200);
  5894. cycle_time = iSEM.GetCycleTime();
  5895. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5896. if (!ImageFocus1(false))
  5897. {
  5898. return false;
  5899. }
  5900. iSEM.CloseReduced();
  5901. Thread.Sleep(200);
  5902. cycle_time = iSEM.GetCycleTime();
  5903. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5904. //SendMsg("4-2");
  5905. //6.调用161步过程
  5906. log.Warn("开始梯形移到视野中心!");
  5907. iSEM.SetMagnification(600);
  5908. Thread.Sleep(300);
  5909. if (!EDS_FindCross())
  5910. {
  5911. return false;
  5912. }
  5913. SendMsg("4-3");
  5914. Thread.Sleep(500);
  5915. //7.调用171步过程
  5916. log.Warn("开始打能谱图和打Xray!");
  5917. if (!EDS_ShotSection())
  5918. {
  5919. return false;
  5920. }
  5921. //SendMsg("4-3");//向界面发送指令:移动到拍摄点位置
  5922. Thread.Sleep(200);
  5923. return true;
  5924. }
  5925. /// <summary>
  5926. /// 20.光束等复位
  5927. /// </summary>
  5928. public void BeamShiftReset()
  5929. {
  5930. iSEM.SetTiltAngleOff();
  5931. Thread.Sleep(200);
  5932. iSEM.SetScanRotationOff();
  5933. Thread.Sleep(200);
  5934. iSEM.SetBeamShiftX(0);
  5935. Thread.Sleep(200);
  5936. iSEM.SetBeamShiftY(0);
  5937. Thread.Sleep(200);
  5938. }
  5939. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  5940. #region 设置电压电流
  5941. public bool SetVoltageAndIPROBE()
  5942. {
  5943. log.Info("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  5944. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  5945. bool mRet_VoltageFlag = false;
  5946. bool mRet_ElecFlag = false;
  5947. if (MParam.SampleName != "3")
  5948. {
  5949. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  5950. Thread.Sleep(500);
  5951. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  5952. Thread.Sleep(500);
  5953. }
  5954. else
  5955. {
  5956. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  5957. Thread.Sleep(500);
  5958. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  5959. Thread.Sleep(500);
  5960. }
  5961. if (!mRet_VoltageFlag) return false;
  5962. if (!mRet_ElecFlag) return false;
  5963. log.Info("测量线程:设置电压电流完成!", true);
  5964. return true;
  5965. }
  5966. #endregion
  5967. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  5968. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  5969. #region 拍照
  5970. public bool GetImageFromSEM(float a_Mag)
  5971. {
  5972. log.Info("设置放大倍数" + a_Mag, true);
  5973. if (!iSEM.SetMagnification(a_Mag))
  5974. {
  5975. log.Error("设置放大倍数" + a_Mag.ToString() + "失败", false);
  5976. return false;
  5977. }
  5978. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5979. String m_FileName = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + a_Mag.ToString() + "_0_" + ImageNameTwo_1;
  5980. //拍照前改变速度,延时
  5981. iSEM.CmdLineScan();
  5982. Thread.Sleep(200);
  5983. cycle_time = iSEM.GetCycleTime();
  5984. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5985. if (!GetImage(m_FileName))
  5986. {
  5987. log.Error("测量线程报错:========" + arg.Message, false);
  5988. return false;
  5989. }
  5990. log.Info("========测量线程:移动到第一个点位置完成!", true);
  5991. return true;
  5992. }
  5993. #endregion
  5994. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  5995. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息
  5996. public void SaveMeasDataPic(String picFullPath, float Mag, float pixelsize)
  5997. {
  5998. try
  5999. {
  6000. using (System.Drawing.Image img = Image.FromFile(picFullPath))
  6001. {
  6002. Bitmap bmp = new Bitmap(img.Width, img.Height);
  6003. using (Graphics g = Graphics.FromImage(bmp))
  6004. {
  6005. g.DrawImage(img, 0, 0, img.Width, img.Height);
  6006. String str = "Mag:" + Mag.ToString("0") + "X\tPixelSize:" + (pixelsize * 1000000).ToString("0.00") + "um";
  6007. Font font = new Font("宋体", 16, FontStyle.Bold);
  6008. SolidBrush sbrush = new SolidBrush(Color.LimeGreen);
  6009. g.DrawString(str, font, sbrush, new PointF(40, img.Height - 30));
  6010. }
  6011. System.Drawing.Imaging.BitmapData bmpData = bmp.LockBits(new Rectangle(0, 0, bmp.Width, bmp.Height), System.Drawing.Imaging.ImageLockMode.ReadOnly, System.Drawing.Imaging.PixelFormat.Format8bppIndexed);
  6012. Bitmap newBitmap = new Bitmap(img.Width, img.Height, bmpData.Stride, System.Drawing.Imaging.PixelFormat.Format8bppIndexed, bmpData.Scan0);
  6013. String path = Path.GetDirectoryName(picFullPath) +
  6014. Path.GetFileNameWithoutExtension(picFullPath) +
  6015. "_Data" + Path.GetExtension(picFullPath);
  6016. newBitmap.SetResolution(1, 1);
  6017. newBitmap.Save(path);
  6018. }
  6019. }
  6020. catch
  6021. {
  6022. log.Error("在测量图上显示放大倍数和像素大小信息失败", false);
  6023. }
  6024. }
  6025. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息 end
  6026. }
  6027. }