Measure.cs 51 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. public class ThreadStatusEventArgs
  26. {
  27. //状态
  28. public string State
  29. {
  30. get { return m_state; }
  31. set { m_state = value; }
  32. }
  33. private string m_state;
  34. //时间
  35. public DateTime Time
  36. {
  37. get { return m_time; }
  38. set { m_time = value; }
  39. }
  40. private DateTime m_time;
  41. //步骤代码
  42. public String Step_Code
  43. {
  44. get { return step_Code; }
  45. set { step_Code = value; }
  46. }
  47. private String step_Code;
  48. //其他消息
  49. public String Message
  50. {
  51. get { return this.message; }
  52. set { this.message = value; }
  53. }
  54. private String message;
  55. //孔名
  56. public String HoleName
  57. {
  58. get { return this.holeName; }
  59. set { this.holeName = value; }
  60. }
  61. private String holeName;
  62. //图片信息
  63. public class PictureInformation
  64. {
  65. public String Picture_FullPath
  66. {
  67. get { return picture_FullPath; }
  68. set { picture_FullPath = value; }
  69. }
  70. private String picture_FullPath;
  71. public double Work_Voltage
  72. {
  73. get { return work_Voltage; }
  74. set { work_Voltage = value; }
  75. }
  76. private double work_Voltage;
  77. public double Magnification
  78. {
  79. get { return magnification; }
  80. set { magnification = value; }
  81. }
  82. private double magnification;
  83. public double Work_Distance
  84. {
  85. get { return work_Distance; }
  86. set { work_Distance = value; }
  87. }
  88. private double work_Distance;
  89. public String Work_Status
  90. {
  91. get { return work_Status; }
  92. set { work_Status = value; }
  93. }
  94. private String work_Status;
  95. }
  96. //图片信息实例类
  97. public PictureInformation Picture_Information
  98. {
  99. get { return picture_Information; }
  100. set { picture_Information = value; }
  101. }
  102. private PictureInformation picture_Information;
  103. //图像信息
  104. public class ImageInformation
  105. {
  106. public int Method_Name
  107. {
  108. get { return method_Name; }
  109. set { method_Name = value; }
  110. }
  111. private int method_Name;
  112. public Source_Img_Degree_Direction SIDD;
  113. public Cut_Position CP;
  114. public Cut_Success CS;
  115. public Trapezoid_Top_Center_Position TTCP;
  116. public Auto_Foucs AF;
  117. public Auto_Stigmatic AS;
  118. public Center_Position_OffsetAngle_Direction CPOD;
  119. public Measure_Size MS;
  120. public ImageInformation()
  121. {
  122. SIDD = new Source_Img_Degree_Direction();
  123. CP = new Cut_Position();
  124. CS = new Cut_Success();
  125. TTCP = new Trapezoid_Top_Center_Position();
  126. AF = new Auto_Foucs();
  127. AS = new Auto_Stigmatic();
  128. CPOD = new Center_Position_OffsetAngle_Direction();
  129. MS = new Measure_Size();
  130. }
  131. //1-计算原始图像偏移角度及方向
  132. public class Source_Img_Degree_Direction
  133. {
  134. public Boolean Is_Image = false;
  135. public double Degree
  136. {
  137. get { return degree; }
  138. set { degree = value; }
  139. }
  140. private double degree;
  141. public int Direction
  142. {
  143. get { return direction; }
  144. set { direction = value; }
  145. }
  146. private int direction;
  147. public int State
  148. {
  149. get { return state; }
  150. set { state = value; }
  151. }
  152. private int state;
  153. }
  154. //2-计算切割点位置
  155. public class Cut_Position
  156. {
  157. public Boolean Is_Image = false;
  158. public double Offsetx
  159. {
  160. get { return offsetx; }
  161. set { offsetx = value; }
  162. }
  163. private double offsetx;
  164. public double Offsety
  165. {
  166. get { return offsety; }
  167. set { offsety = value; }
  168. }
  169. private double offsety;
  170. public int State
  171. {
  172. get { return state; }
  173. set { state = value; }
  174. }
  175. private int state;
  176. }
  177. //3-是否切割成功
  178. public class Cut_Success
  179. {
  180. public Boolean Is_Image = false;
  181. public int State
  182. {
  183. get { return state; }
  184. set { state = value; }
  185. }
  186. private int state;
  187. }
  188. //4-计算切割后图像梯形区域上边中心点坐标
  189. public class Trapezoid_Top_Center_Position
  190. {
  191. public Boolean Is_Image = false;
  192. public double TopCenterX
  193. {
  194. get { return topCenterX; }
  195. set { topCenterX = value; }
  196. }
  197. private double topCenterX;
  198. public double TopCenterY
  199. {
  200. get { return topCenterY; }
  201. set { topCenterY = value; }
  202. }
  203. private double topCenterY;
  204. public int State
  205. {
  206. get { return state; }
  207. set { state = value; }
  208. }
  209. private int state;
  210. }
  211. //5-自动对焦
  212. public class Auto_Foucs
  213. {
  214. public Boolean Is_Image = true;
  215. public String Img_Path
  216. {
  217. get { return img_Path; }
  218. set { img_Path = value; }
  219. }
  220. private String img_Path;
  221. }
  222. //6-自动像闪
  223. public class Auto_Stigmatic
  224. {
  225. public Boolean Is_Image = true;
  226. public String Img_Path
  227. {
  228. get { return img_Path; }
  229. set { img_Path = value; }
  230. }
  231. private String img_Path;
  232. }
  233. //7-计算切割面区域中心坐标,以及偏移角度及方向
  234. public class Center_Position_OffsetAngle_Direction
  235. {
  236. public Boolean Is_Image = false;
  237. public double CenterX
  238. {
  239. get { return centerX; }
  240. set { centerX = value; }
  241. }
  242. private double centerX;
  243. public double CenterY
  244. {
  245. get { return centerY; }
  246. set { centerY = value; }
  247. }
  248. private double centerY;
  249. public double Degree
  250. {
  251. get { return degree; }
  252. set { degree = value; }
  253. }
  254. private double degree;
  255. public int Direction
  256. {
  257. get { return direction; }
  258. set { direction = value; }
  259. }
  260. private int direction;
  261. public int State
  262. {
  263. get { return state; }
  264. set { state = value; }
  265. }
  266. private int state;
  267. }
  268. //8-测量尺寸
  269. public class Measure_Size
  270. {
  271. public Boolean Is_Image = false;
  272. public int State
  273. {
  274. get { return state; }
  275. set { state = value; }
  276. }
  277. private int state;
  278. }
  279. }
  280. //图像信息实例类
  281. public ImageInformation Image_Information
  282. {
  283. get { return image_Information; }
  284. set { image_Information = value; }
  285. }
  286. private ImageInformation image_Information;
  287. public ThreadStatusEventArgs(string a_State)
  288. {
  289. picture_Information = new PictureInformation();
  290. image_Information = new ImageInformation();
  291. }
  292. }
  293. public class CutHolesStatusEventArgs
  294. {
  295. public string State
  296. {
  297. get { return m_state; }
  298. set { m_state = value; }
  299. }
  300. private string m_state;
  301. public string HoleName
  302. {
  303. get { return m_holeName; }
  304. set { m_holeName = value; }
  305. }
  306. private string m_holeName;
  307. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  308. {
  309. this.m_state = a_state;
  310. this.m_holeName = a_holeName;
  311. }
  312. }
  313. public class Measure
  314. {
  315. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  316. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  317. //定义一个全局的消息类
  318. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  319. //全局只有一个fatorySEM
  320. static FactoryHardware factorySEM = FactoryHardware.Instance;
  321. ISEMControl iSEM = factorySEM.ISEM;
  322. //@的作用是不用转义字符\\只打一个就行
  323. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  324. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  325. const String ImageName3 = @"ImageFIB600X2.tif";
  326. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  327. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  328. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  329. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  330. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  331. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  332. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  333. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  334. const String ElyDeposition = @"Deposition.ely"; //沉积
  335. const String ElyCrossSection = @"CrossSection.ely"; //切割
  336. const float fMin = (float)0.0000002; //单位是米
  337. int m_nWorkHoleNo = -1;
  338. //测量文件
  339. private MeasureFile m_measureFile;
  340. public MeasureFile MeasureFile
  341. {
  342. get { return this.m_measureFile; }
  343. set { this.m_measureFile = value; }
  344. }
  345. //测量的切割孔
  346. private List<MeasureData.CutHole> m_cutHoles;
  347. public List<MeasureData.CutHole> cutHoles
  348. {
  349. get { return this.m_cutHoles; }
  350. set { this.m_cutHoles = value; }
  351. }
  352. //工作文件夹
  353. private string m_WorkingFolder;
  354. public string WorkingFolder
  355. {
  356. get { return this.m_WorkingFolder; }
  357. set { this.m_WorkingFolder = value; }
  358. }
  359. //程序当前路径
  360. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  361. //线程状态
  362. private ThreadStatus m_ThreadStatus;
  363. public ThreadStatus TStatus
  364. {
  365. get { return this.m_ThreadStatus; }
  366. set { this.m_ThreadStatus = value; }
  367. }
  368. //测量参数
  369. private MeasureParam m_MsParam;
  370. public MeasureParam MeasParam
  371. {
  372. get { return this.m_MsParam; }
  373. set { this.m_MsParam = value; }
  374. }
  375. //构造函数
  376. public Measure()
  377. {
  378. Init();
  379. }
  380. private void Init()
  381. {
  382. MeasParam = new MeasureParam();
  383. TStatus = new ThreadStatus();
  384. cutHoles = new List<MeasureData.CutHole>();
  385. }
  386. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  387. public bool InitMeas(MeasureFile a_measureFile)
  388. {
  389. m_measureFile = a_measureFile;
  390. List<CutHole> listHoles = m_measureFile.ListCutHole;
  391. foreach (CutHole h in listHoles)
  392. {
  393. if (h.SWITCH == true)
  394. {
  395. m_cutHoles.Add(h);
  396. }
  397. }
  398. if (m_cutHoles.Count == 0)
  399. return false;
  400. this.m_MsParam = m_measureFile.MParam;
  401. return true;
  402. }
  403. public void SendMsg(string step_code)
  404. {
  405. arg.Step_Code = step_code;
  406. arg.Time = DateTime.Now;
  407. switch(step_code)
  408. {
  409. //拍照
  410. case "1-3":
  411. case "1-9":
  412. case "1-16":
  413. case "1-24":
  414. //电压、放大倍数、工作距离、位置信息、图片路径
  415. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  416. arg.Picture_Information.Work_Status = "SEM";
  417. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  418. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  419. arg.HoleName = cutHoles[m_nWorkHoleNo].HoleName;
  420. break;
  421. case "1-10":
  422. case "1-18":
  423. //获取偏移信息
  424. break;
  425. case "1-12":
  426. case "1-20":
  427. //验证移动准备性
  428. break;
  429. case "1-26":
  430. //取消电子束校正并初始化
  431. break;
  432. default:
  433. arg.State = "1";
  434. break;
  435. }
  436. SendThreadStatus(this, arg);
  437. }
  438. public void SendCutHoleMsg(string a_state, string a_holeName)
  439. {
  440. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  441. arg.HoleName = a_holeName;
  442. arg.State = a_state;
  443. SendCutHolesStatus(this, arg);
  444. }
  445. //测量流程
  446. public void DoMeasure()
  447. {
  448. //创建线程的测量状态的更新
  449. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  450. if (SendThreadStatus != null)
  451. {
  452. SendMsg("开始测量。");
  453. }
  454. //检查硬件连接是否正常
  455. if (!ConnectHardware())
  456. {
  457. SendMsg("连接硬件失败。");
  458. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  459. return;
  460. }
  461. SendMsg("硬件连接成功。");
  462. //设置工作文件夹
  463. if (!SetWorkingFolderStr())
  464. {
  465. SendMsg("设置工作文件夹失败");
  466. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  467. return;
  468. }
  469. SendMsg("创建工作文件路径为" + WorkingFolder);
  470. float[] firstPosition;
  471. for (int i = 0; i < m_cutHoles.Count; i++)
  472. {
  473. m_nWorkHoleNo = i;
  474. if (i == 0)
  475. {
  476. SendMsg("第一个切孔开始测量");
  477. //切孔操作-开始
  478. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  479. firstPosition = iSEM.GetStagePosition();
  480. //第一个孔的测试
  481. FirstHole();
  482. //切孔操作-完成
  483. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  484. }
  485. else
  486. {
  487. //非第一个孔的测试
  488. SendMsg("第" + i.ToString() + "个切孔开始测量");
  489. //切孔操作-开始
  490. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  491. OtherHole();
  492. //切孔操作-完成
  493. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  494. }
  495. }
  496. }
  497. //检查硬件连接是否正常
  498. public bool ConnectHardware()
  499. {
  500. //返回硬件的连接状态
  501. return iSEM.ConnectStatus();
  502. }
  503. //设置工作文件夹
  504. public bool SetWorkingFolderStr()
  505. {
  506. WorkingFolder = m_measureFile.FilePath;
  507. return true;
  508. ////获取工作文件路径
  509. //string pathName = m_measureFile.FilePath;
  510. ////判断工作文件路径是否为空或无效
  511. //if (string.IsNullOrEmpty(pathName))
  512. //{
  513. // SendMsg("路径无效");
  514. // return false;
  515. //}
  516. ////文件未保存
  517. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  518. //{
  519. // SendMsg("工程文件未保存");
  520. // return false;
  521. //}
  522. ////获取工作文件所在文件夹
  523. //string folder = System.IO.Path.GetDirectoryName(pathName);
  524. //if (string.IsNullOrEmpty(folder))
  525. //{
  526. // SendMsg("工程文件无效");
  527. // return false;
  528. //}
  529. //WorkingFolder += @"\\";
  530. //LogManager.Init(WorkingFolder);
  531. //return false;
  532. }
  533. //插入PT针
  534. public bool InsertPT()
  535. {
  536. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  537. SendMsg("调用宏插入PT针宏文件" + fn);
  538. iSEM.CMDMCFFilename(fn);
  539. //延时1s??
  540. Thread.Sleep(1000);
  541. return true;
  542. }
  543. //撤出PT针
  544. public bool RetractPT()
  545. {
  546. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  547. SendMsg("调用宏撤出PT针宏文件" + fn);
  548. iSEM.CMDMCFFilename(fn);
  549. //延时1s??
  550. Thread.Sleep(1000);
  551. return true;
  552. }
  553. //PT沉积
  554. public bool PTWork()
  555. {
  556. //执行PT沉积的ELY文件
  557. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  558. SendMsg("执行PT沉积Ely文件:" + fn);
  559. if (!ExcuteEly(fn))
  560. {
  561. return false;
  562. }
  563. //等待沉积完成
  564. while (true)
  565. {
  566. Thread.Sleep(10000);
  567. if (iSEM.GetFIBMode() == 0)
  568. {
  569. break;
  570. }
  571. }
  572. return true;
  573. }
  574. //FIB切割
  575. public bool FIBWork()
  576. {
  577. //执行PT沉积的ELY文件
  578. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  579. SendMsg("执行FIB切割Ely文件:" + fn);
  580. if (!ExcuteEly(fn))
  581. {
  582. return false;
  583. }
  584. //等待切割完成
  585. while (true)
  586. {
  587. Thread.Sleep(10000);
  588. if (iSEM.GetFIBMode() == 0)
  589. {
  590. break;
  591. }
  592. }
  593. return true;
  594. }
  595. public bool ExcuteEly(string a_filename)
  596. {
  597. //执行ELy文件有三个动作
  598. //1. 选择ELY文件
  599. SendMsg("选择ELY文件");
  600. if (!iSEM.CmdFIBLoadELY(a_filename))
  601. {
  602. SendMsg("选择ELY文件失败");
  603. return false;
  604. }
  605. Thread.Sleep(1000);
  606. //2. 确认ELY文件
  607. SendMsg("确认ELY文件");
  608. if (!iSEM.CmdFIBEXPOSUREELY())
  609. {
  610. SendMsg("确认ELY文件失败");
  611. return false;
  612. }
  613. Thread.Sleep(1000);
  614. //3. 执行ELY文件
  615. SendMsg("执行ELY文件");
  616. if (!iSEM.CmdFIBSTARTELY())
  617. {
  618. SendMsg("执行ELY文件失败");
  619. return false;
  620. }
  621. Thread.Sleep(1000);
  622. return true;
  623. }
  624. /// <summary>
  625. ///13. 自动 定位功能
  626. /// </summary>
  627. /// <returns></returns>
  628. public bool GetPoistion()
  629. {
  630. //SendMsg("自动定位");
  631. //13.自动定位切割
  632. {
  633. //1.控制SEM放大600X
  634. if (!iSEM.SetMagnification(600))
  635. {
  636. return false;
  637. }
  638. arg.Message = "放大600倍";
  639. SendMsg("1-1");
  640. //2.控制SEM自动对焦、亮度、对比度
  641. // if (!MeasParam.FocusMode)
  642. {
  643. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  644. {
  645. arg.Message = "自动对焦完成";
  646. SendMsg("1-2");
  647. //return true;
  648. }
  649. else
  650. {
  651. arg.Message = "自动对焦失败";
  652. SendMsg("1-2");
  653. return false;
  654. }
  655. //弹出手动对焦的窗口
  656. }
  657. //else
  658. //{
  659. // //调用自动对焦模块
  660. //}
  661. //3.设置SEM进行角度补偿54度
  662. //if (!TiltCorrection(54))
  663. //{
  664. // SendMsg("设置SEM进行角度补偿54度");
  665. // return false;
  666. //}
  667. //arg.Message = "设置校正54度";
  668. //SendMsg("1-15");
  669. //Thread.Sleep(5000);
  670. //4.控制SEM拍照
  671. //5.保存照片
  672. {
  673. //1. 创建目录,已经完成
  674. //2. 设置图片名称
  675. //3. 保存图片1
  676. WorkingFolder = m_measureFile.FilePath;
  677. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  678. arg.Picture_Information.Picture_FullPath = fileName1;
  679. if (!GetImage(ImageMode.SEM, fileName1))
  680. {
  681. SendMsg("SEM拍照失败");
  682. return false;
  683. }
  684. arg.Message = "SEM拍照";
  685. SendMsg("1-3");
  686. Thread.Sleep(3000);
  687. }
  688. //6.设置FIB拍照参数——扫描时间、束流等
  689. //7.控制FIB自动亮度、对比度
  690. SendMsg("切换FIB控制");
  691. if (!iSEM.CmdFIBModeFIB())
  692. {
  693. SendMsg("FIB模式切换失败");
  694. return false;
  695. }
  696. Thread.Sleep(10000);
  697. //8.控制FIB拍照
  698. //9.保存照片
  699. SendMsg("FIB拍照");
  700. {
  701. //1. 设置图片名称
  702. //2. 保存图片2
  703. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  704. if (!GetImage(ImageMode.FIB, fileName2))
  705. {
  706. SendMsg("FIB拍照失败");
  707. return false;
  708. }
  709. Thread.Sleep(3000);
  710. }
  711. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  712. SendMsg("调用识别位置");
  713. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  714. {
  715. SendMsg("移动已完成");
  716. //return true;
  717. }
  718. else
  719. {
  720. SendMsg("移动已失败");
  721. return false;
  722. }
  723. SendMsg("进行PT沉积");
  724. //11.自动工具样品类型参数确定是否需要PT沉积
  725. {
  726. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  727. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  728. //3. 根据坐标进行PT沉积
  729. if (!PTWork())
  730. {
  731. SendMsg("PT沉积失败");
  732. return false;
  733. }
  734. }
  735. return true;
  736. //模拟为客户返回的坐标值
  737. float x0 = 0, y0 = 0;
  738. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  739. //12.根据梯形坐标控制FIB调整到中心位置
  740. if (!iSEM.MoveStageXY(x0, y0))
  741. {
  742. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  743. return false;
  744. }
  745. //电镜移动是有一个延时的操作的?
  746. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  747. float x1 = iSEM.GetStageAtX();
  748. float y1 = iSEM.GetStageAtY();
  749. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  750. {
  751. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  752. return false;
  753. }
  754. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  755. float[] firstPosition = iSEM.GetStagePosition();
  756. //这里要调用文件保存功能
  757. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  758. + firstPosition[1].ToString() + ","
  759. + firstPosition[2].ToString() + ","
  760. + firstPosition[3].ToString() + ","
  761. + firstPosition[4].ToString() + ","
  762. + firstPosition[5].ToString() + ")");
  763. }
  764. return false;
  765. }
  766. /// <summary>
  767. /// 14. FIB切割
  768. /// </summary>
  769. /// <returns></returns>
  770. public bool FIBCross()
  771. {
  772. //14.自动控制FIB切割
  773. {
  774. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  775. //2.控制FIB进行切割
  776. SendMsg("FIB切割");
  777. if (!FIBWork())
  778. {
  779. SendMsg("FIB切割失败");
  780. return false;
  781. }
  782. Thread.Sleep(5000);
  783. //3.控制FIB拍照600X
  784. //4.保存图片
  785. {
  786. //1.设置图片名称
  787. //2.保存图片3
  788. WorkingFolder = m_measureFile.FilePath;
  789. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  790. SendMsg("SEM拍照存储到" + fileName3);
  791. if (!GetImage(ImageMode.FIB, fileName3))
  792. {
  793. SendMsg("FIB拍照失败");
  794. return false;
  795. }
  796. Thread.Sleep(3000);
  797. }
  798. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  799. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  800. }
  801. return true;
  802. }
  803. /// <summary>
  804. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  805. /// </summary>
  806. /// <returns></returns>
  807. public bool FindCross()
  808. {
  809. //16.自动调整SEM找到切割位置
  810. {
  811. //1.控制SEM放大到300倍
  812. if (!iSEM.SetMagnification(300))
  813. {
  814. return false;
  815. }
  816. //2.控制SEM自动对焦、亮度、对比度-接口
  817. if (!MeasParam.FocusMode)
  818. {
  819. //弹出手动对焦的窗口
  820. }
  821. else
  822. {
  823. //调用自动对焦模块
  824. }
  825. Thread.Sleep(5000);
  826. //3.控制SEM拍照
  827. String fileName4 = WorkingFolder + ImageName4;
  828. if (!GetImage(ImageMode.SEM, fileName4))
  829. {
  830. return false;
  831. }
  832. Thread.Sleep(3000);
  833. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  834. float x4 = 0, y4 = 0;
  835. float angle = 0;
  836. //5.根据坐标控制SEM移动到切孔位置,居中
  837. if (!iSEM.MoveStageXY(x4, y4))
  838. {
  839. return false;
  840. }
  841. if (!iSEM.SetScanRotation(angle))
  842. {
  843. return false;
  844. }
  845. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  846. //float x5 = iSEM.GetStageAtX();
  847. //float y5 = iSEM.GetStageAtY();
  848. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  849. //{
  850. // return false;
  851. //}
  852. }
  853. return true;
  854. }
  855. public bool CommonWork()
  856. {
  857. SendMsg("插入PT针");
  858. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  859. //if (firstHole.PT == true)
  860. {
  861. if (!InsertPT())
  862. {
  863. SendMsg("插入PT针失败");
  864. return false;
  865. }
  866. }
  867. //13. 自动 定位功能
  868. SendMsg("自动定位切割位置");
  869. if (!GetPoistion())
  870. {
  871. SendMsg("自动定位切割位置失败");
  872. return false;
  873. }
  874. //14.自动控制FIB切割
  875. SendMsg("FIB切割");
  876. if (!FIBCross())
  877. {
  878. SendMsg("FIB切割失败");
  879. return false;
  880. }
  881. //{
  882. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  883. // //2.控制FIB进行切割
  884. // //3.控制FIB拍照600X
  885. // //4.保存图片
  886. // {
  887. // //1.设置图片名称
  888. // //2.保存图片3
  889. // String fileName3 = WorkingFolder + ImageName3;
  890. // if (!GetImage(ImageMode.FIB, fileName3))
  891. // {
  892. // return false;
  893. // }
  894. // }
  895. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  896. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  897. //}
  898. //15.根据样品类型决定是否撤出PT针
  899. SendMsg("撤出PT针");
  900. //if (firstHole.PT == false)
  901. //{
  902. if (!RetractPT())
  903. {
  904. SendMsg("撤出PT针失败");
  905. return false;
  906. }
  907. //}
  908. // 16.找到切割位置
  909. SendMsg("找到切割位置");
  910. //17.自动控制SEM拍截面照
  911. SendMsg("观测层高");
  912. SendMsg("切换SEM控制");
  913. if (!iSEM.CmdFIBModeSEM())
  914. {
  915. SendMsg("SEM模式切换失败");
  916. return false;
  917. }
  918. Thread.Sleep(10000);
  919. SendMsg("放大6000倍");
  920. if (!iSEM.SetMagnification(6000))
  921. {
  922. SendMsg("放大倍数调整失败");
  923. return false;
  924. }
  925. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  926. {
  927. SendMsg("拍摄照片完成");
  928. //return true;
  929. }
  930. else
  931. {
  932. SendMsg("拍摄照片失败");
  933. return false;
  934. }
  935. SendMsg("图像校正36度");
  936. //3.设置SEM角度补偿cos36度
  937. if (!TiltCorrection(36))
  938. {
  939. return false;
  940. }
  941. Thread.Sleep(3000);
  942. string fn;
  943. //用宏抓一般图
  944. Thread.Sleep(5000);
  945. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  946. SendMsg("用宏抓一般图" + fn);
  947. iSEM.CMDMCFFilename(fn);
  948. //延时1s??
  949. Thread.Sleep(5000);
  950. //用宏抓好图
  951. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  952. SendMsg("用宏抓好图" + fn);
  953. iSEM.CMDMCFFilename(fn);
  954. //延时1s??
  955. Thread.Sleep(30000);
  956. Thread.Sleep(10000);
  957. WorkingFolder = m_measureFile.FilePath;
  958. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  959. SendMsg("SEM拍照存储到" + fileName6);
  960. if (!GetImage(ImageMode.SEM, fileName6))
  961. {
  962. SendMsg("SEM拍照失败");
  963. return false;
  964. }
  965. //用宏抓标志图
  966. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  967. SendMsg("用宏抓标志图" + fn);
  968. iSEM.CMDMCFFilename(fn);
  969. //延时1s??
  970. Thread.Sleep(30000);
  971. //恢复简单抓图
  972. Thread.Sleep(5000);
  973. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  974. SendMsg("用宏抓一般图" + fn);
  975. iSEM.CMDMCFFilename(fn);
  976. SendMsg("所有图结束");
  977. return true;
  978. }
  979. //第一个孔的测试过程
  980. public bool FirstHole()
  981. {
  982. MeasureData.CutHole firstHole = m_cutHoles[0];
  983. SendMsg("插入PT针");
  984. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  985. //if (firstHole.PT == true)
  986. {
  987. if (!InsertPT())
  988. {
  989. SendMsg("插入PT针失败");
  990. return false;
  991. }
  992. }
  993. //13. 自动 定位功能
  994. SendMsg("自动定位切割位置");
  995. if (!GetPoistion())
  996. {
  997. SendMsg("自动定位切割位置失败");
  998. return false;
  999. }
  1000. //14.自动控制FIB切割
  1001. SendMsg("FIB切割");
  1002. if (!FIBCross())
  1003. {
  1004. SendMsg("FIB切割失败");
  1005. return false;
  1006. }
  1007. //{
  1008. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1009. // //2.控制FIB进行切割
  1010. // //3.控制FIB拍照600X
  1011. // //4.保存图片
  1012. // {
  1013. // //1.设置图片名称
  1014. // //2.保存图片3
  1015. // String fileName3 = WorkingFolder + ImageName3;
  1016. // if (!GetImage(ImageMode.FIB, fileName3))
  1017. // {
  1018. // return false;
  1019. // }
  1020. // }
  1021. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1022. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1023. //}
  1024. //15.根据样品类型决定是否撤出PT针
  1025. SendMsg("撤出PT针");
  1026. //if (firstHole.PT == false)
  1027. //{
  1028. if (!RetractPT())
  1029. {
  1030. SendMsg("撤出PT针失败");
  1031. return false;
  1032. }
  1033. //}
  1034. // 16.找到切割位置
  1035. SendMsg("找到切割位置");
  1036. //17.自动控制SEM拍截面照
  1037. SendMsg("观测层高");
  1038. SendMsg("切换SEM控制");
  1039. if (!iSEM.CmdFIBModeSEM())
  1040. {
  1041. SendMsg("SEM模式切换失败");
  1042. return false;
  1043. }
  1044. Thread.Sleep(10000);
  1045. SendMsg("放大6000倍");
  1046. if (!iSEM.SetMagnification(6000))
  1047. {
  1048. SendMsg("放大倍数调整失败");
  1049. return false;
  1050. }
  1051. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1052. {
  1053. SendMsg("拍摄照片完成");
  1054. //return true;
  1055. }
  1056. else
  1057. {
  1058. SendMsg("拍摄照片失败");
  1059. return false;
  1060. }
  1061. SendMsg("图像校正36度");
  1062. //3.设置SEM角度补偿cos36度
  1063. if (!TiltCorrection(36))
  1064. {
  1065. return false;
  1066. }
  1067. Thread.Sleep(3000);
  1068. string fn;
  1069. //用宏抓一般图
  1070. Thread.Sleep(5000);
  1071. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1072. SendMsg("用宏抓一般图" + fn);
  1073. iSEM.CMDMCFFilename(fn);
  1074. //延时1s??
  1075. Thread.Sleep(5000);
  1076. //用宏抓好图
  1077. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1078. SendMsg("用宏抓好图" + fn);
  1079. iSEM.CMDMCFFilename(fn);
  1080. //延时1s??
  1081. Thread.Sleep(30000);
  1082. Thread.Sleep(10000);
  1083. WorkingFolder = m_measureFile.FilePath;
  1084. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1085. SendMsg("SEM拍照存储到" + fileName6);
  1086. if (!GetImage(ImageMode.SEM, fileName6))
  1087. {
  1088. SendMsg("SEM拍照失败");
  1089. return false;
  1090. }
  1091. //用宏抓标志图
  1092. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1093. SendMsg("用宏抓标志图" + fn);
  1094. iSEM.CMDMCFFilename(fn);
  1095. //延时1s??
  1096. Thread.Sleep(30000);
  1097. Thread.Sleep(5000);
  1098. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1099. SendMsg("用宏抓一般图" + fn);
  1100. iSEM.CMDMCFFilename(fn);
  1101. //延时1s??
  1102. Thread.Sleep(5000);
  1103. SendMsg("所有图结束");
  1104. ////17.自动控制SEM拍截面照
  1105. //{
  1106. // //1.控制SEM放大到指定参数大小范围,6000x
  1107. // if (!iSEM.SetMagnification(6000))
  1108. // {
  1109. // return false;
  1110. // }
  1111. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1112. // if (!MeasParam.FocusMode)
  1113. // {
  1114. // //弹出手动对焦的窗口
  1115. // }
  1116. // else
  1117. // {
  1118. // //调用自动对焦模块
  1119. // }
  1120. // //3.设置SEM角度补偿cos36度
  1121. // if (!TiltCorrection(36))
  1122. // {
  1123. // return false;
  1124. // }
  1125. // //4.控制SEM拍照
  1126. // //5.保存照片4
  1127. // String fileName5 = WorkingFolder + ImageName5;
  1128. // if (!GetImage(ImageMode.SEM, fileName5))
  1129. // {
  1130. // return false;
  1131. // }
  1132. // //6.将照片传给客户,获取偏移坐标
  1133. // float x6 = 0, y6 = 0;
  1134. // float angle1 = 0;
  1135. // float mage = 10000;
  1136. // //7.根据坐标控制SEM移动到分析位置
  1137. // if (!iSEM.MoveStageXY(x6, y6))
  1138. // {
  1139. // return false;
  1140. // }
  1141. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1142. // float x7 = iSEM.GetStageAtX();
  1143. // float y7 = iSEM.GetStageAtY();
  1144. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1145. // {
  1146. // return false;
  1147. // }
  1148. // //9.控制SEM平行校正,并记录校正前初始值
  1149. // float foldAnagle = iSEM.GetScanRotation();
  1150. // if (foldAnagle == float.NaN)
  1151. // {
  1152. // return false;
  1153. // }
  1154. // if (!iSEM.SetScanRotation(angle1))
  1155. // {
  1156. // return false;
  1157. // }
  1158. // //10.控制SEM放大到指定参数大小范围
  1159. // if (!iSEM.SetMagnification(mage))
  1160. // {
  1161. // return false;
  1162. // }
  1163. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1164. // if (!MeasParam.FocusMode)
  1165. // {
  1166. // //弹出手动对焦的窗口
  1167. // }
  1168. // else
  1169. // {
  1170. // //调用自动对焦模块
  1171. // }
  1172. // //12.控制SEM对分析位置拍照
  1173. // String fileName6 = WorkingFolder + ImageName6;
  1174. // if (!GetImage(ImageMode.SEM, fileName6))
  1175. // {
  1176. // return false;
  1177. // }
  1178. // //13.保存照片
  1179. // //14.控制SEM取消电子束校正,回到初始值
  1180. // if (!iSEM.SetScanRotation(foldAnagle))
  1181. // {
  1182. // return false;
  1183. // }
  1184. //}
  1185. ////18.自动层高分析
  1186. //{
  1187. // //1.获取SEM Pixel Size给客户传入参数
  1188. // if (iSEM.GetPixelSize() == float.NaN)
  1189. // {
  1190. // return false;
  1191. // }
  1192. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1193. //}
  1194. ////19.自动能谱分析
  1195. //{
  1196. // //1. 确定能谱位置
  1197. // //2. 控制牛津打能谱
  1198. // //3. 能谱分析——面扫+线扫描
  1199. //}
  1200. return true;
  1201. }
  1202. //非第一个孔的测试过程
  1203. public void OtherHole()
  1204. {
  1205. //for (int i = 1; i < m_cutHoles.Count; i++)
  1206. //{
  1207. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1208. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1209. //1. 初始化
  1210. {
  1211. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1212. //读取图像冻结状态
  1213. float ffrozen = iSEM.GetImageFrozen();
  1214. if (ffrozen == float.NaN)
  1215. {
  1216. return;
  1217. }
  1218. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1219. {
  1220. SendMsg("样品台恢复到水平");
  1221. //return true;
  1222. }
  1223. else
  1224. {
  1225. SendMsg("禁止样品台恢复到水平");
  1226. return;
  1227. }
  1228. //2. 调节样品1号孔的样品台6轴坐标
  1229. //3. 将样品1号孔坐标2存入数据库
  1230. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1231. if (!iSEM.SetStageGotoT(0))
  1232. {
  1233. return;
  1234. }
  1235. while (true)
  1236. {
  1237. Thread.Sleep(10000);
  1238. if (iSEM.GetStageIs() == 0)
  1239. {
  1240. break;
  1241. }
  1242. }
  1243. //5. 获取光镜2号孔XY坐标
  1244. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1245. //6. 根据光镜坐标控制样品台移动
  1246. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1247. {
  1248. SendMsg("移动失败");
  1249. }
  1250. while (true)
  1251. {
  1252. Thread.Sleep(10000);
  1253. if (iSEM.GetStageIs() == 0)
  1254. {
  1255. break;
  1256. }
  1257. }
  1258. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1259. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1260. {
  1261. SendMsg("样品台旋转");
  1262. //return true;
  1263. }
  1264. else
  1265. {
  1266. SendMsg("禁止样品台旋转");
  1267. return;
  1268. }
  1269. if (!iSEM.SetStageGotoT(54))
  1270. {
  1271. return;
  1272. }
  1273. while (true)
  1274. {
  1275. Thread.Sleep(10000);
  1276. if (iSEM.GetStageIs() == 0)
  1277. {
  1278. break;
  1279. }
  1280. }
  1281. }
  1282. SendMsg("拉直操作");
  1283. SendMsg("其他操作与1号孔操作一致");
  1284. if (!CommonWork())
  1285. {
  1286. return;
  1287. }
  1288. //2. 定位切割
  1289. {
  1290. //1. 拉直操作
  1291. {
  1292. //1.1 控制SEM进行拍照
  1293. //1.2 图片传给客户,返回偏移角度
  1294. //1.3 根据返回角度,控制样品台转动
  1295. }
  1296. //2. 与1号孔13步相同
  1297. }
  1298. //3. 以后步骤与1号孔以后步骤一致
  1299. //}
  1300. }
  1301. //角度补偿
  1302. public bool TiltCorrection(float a_fAngle)
  1303. {
  1304. //记录原来电镜的状态
  1305. // bool bTilt = false;
  1306. //float fOldTilt = iSEM.GetTiltCorrection();
  1307. //if (fOldTilt == float.NaN)
  1308. //{
  1309. // return false;
  1310. //}
  1311. //else if (fOldTilt == 1)
  1312. //{
  1313. // bTilt = true;
  1314. //}
  1315. //else if (fOldTilt == 0)
  1316. //{
  1317. // bTilt = false;
  1318. //}
  1319. //float fOldAngle = iSEM.GetTiltAngle();
  1320. //if (fOldAngle == float.NaN)
  1321. //{
  1322. // return false;
  1323. //}
  1324. //开启校正
  1325. SendMsg("开启校正");
  1326. if (!iSEM.SetTiltAngleOn())
  1327. {
  1328. return false;
  1329. }
  1330. //设置校正角度
  1331. //if (!iSEM.SetTiltAngle(fOldAngle))
  1332. //{
  1333. // return false;
  1334. //}
  1335. //恢复原始状态
  1336. SendMsg("校正角度"+ a_fAngle.ToString());
  1337. if (!iSEM.SetTiltAngle(a_fAngle))
  1338. {
  1339. return false;
  1340. }
  1341. //if (bTilt)
  1342. //{
  1343. // if (!iSEM.SetTiltCorrectionOn())
  1344. // {
  1345. // return false;
  1346. // }
  1347. //}
  1348. //else
  1349. //{
  1350. // if (!iSEM.SetTiltCorrectionOff())
  1351. // {
  1352. // return false;
  1353. // }
  1354. //}
  1355. return true;
  1356. }
  1357. //拍图
  1358. public bool GetImage(ImageMode a_mode, String a_fileName)
  1359. {
  1360. //1. 图像解冻
  1361. float foldFrozen = iSEM.GetImageFrozen();
  1362. if (foldFrozen == float.NaN)
  1363. {
  1364. return false;
  1365. }
  1366. if (!iSEM.ImageLive())
  1367. {
  1368. return false;
  1369. }
  1370. //2. 确认图像模式
  1371. if (ImageMode.SEM == a_mode)
  1372. {
  1373. if (!iSEM.CmdFIBModeSEM())
  1374. {
  1375. return false;
  1376. }
  1377. }
  1378. else if (ImageMode.FIB == a_mode)
  1379. {
  1380. if (!iSEM.CmdFIBModeFIB())
  1381. {
  1382. return false;
  1383. }
  1384. }
  1385. else
  1386. {
  1387. return false;
  1388. }
  1389. //3. 获取分辨率
  1390. int[] ImageSize = iSEM.GetImageStore();
  1391. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1392. {
  1393. return false;
  1394. }
  1395. short width = (short)ImageSize[0];
  1396. short height = (short)ImageSize[1];
  1397. //4. 抓图
  1398. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1399. {
  1400. return false;
  1401. }
  1402. //5. 恢复初始状态
  1403. if (foldFrozen == 0)
  1404. {
  1405. if (!iSEM.ImageLive())
  1406. {
  1407. return false;
  1408. }
  1409. }
  1410. else if (foldFrozen == 1)
  1411. {
  1412. if (!iSEM.ImageFrozen())
  1413. {
  1414. return false;
  1415. }
  1416. }
  1417. return true;
  1418. }
  1419. //自动聚焦
  1420. public bool AutoFocus(string a_strPath, out int a_nWd)
  1421. {
  1422. a_nWd = 0;
  1423. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1424. return true;
  1425. }
  1426. }
  1427. }