Measure.cs 77 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using WebManager;
  16. using OpenCvSharp;
  17. namespace MeasureThread
  18. {
  19. //图片模式
  20. public enum ImageMode
  21. {
  22. FIB,
  23. SEM
  24. }
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. public class ThreadStatusEventArgs
  28. {
  29. //状态
  30. public string State
  31. {
  32. get { return m_state; }
  33. set { m_state = value; }
  34. }
  35. private string m_state;
  36. //时间
  37. public DateTime Time
  38. {
  39. get { return m_time; }
  40. set { m_time = value; }
  41. }
  42. private DateTime m_time;
  43. //步骤代码
  44. public String Step_Code
  45. {
  46. get { return step_Code; }
  47. set { step_Code = value; }
  48. }
  49. private String step_Code;
  50. //其他消息
  51. public String Message
  52. {
  53. get { return this.message; }
  54. set { this.message = value; }
  55. }
  56. private String message;
  57. //孔名
  58. public String HoleName
  59. {
  60. get { return this.holeName; }
  61. set { this.holeName = value; }
  62. }
  63. private String holeName;
  64. //图片信息
  65. public class PictureInformation
  66. {
  67. public String Picture_FullPath
  68. {
  69. get { return picture_FullPath; }
  70. set { picture_FullPath = value; }
  71. }
  72. private String picture_FullPath;
  73. public double Work_Voltage
  74. {
  75. get { return work_Voltage; }
  76. set { work_Voltage = value; }
  77. }
  78. private double work_Voltage;
  79. public double Magnification
  80. {
  81. get { return magnification; }
  82. set { magnification = value; }
  83. }
  84. private double magnification;
  85. public double Work_Distance
  86. {
  87. get { return work_Distance; }
  88. set { work_Distance = value; }
  89. }
  90. private double work_Distance;
  91. public String Work_Status
  92. {
  93. get { return work_Status; }
  94. set { work_Status = value; }
  95. }
  96. private String work_Status;
  97. }
  98. //图片信息实例类
  99. public PictureInformation Picture_Information
  100. {
  101. get { return picture_Information; }
  102. set { picture_Information = value; }
  103. }
  104. private PictureInformation picture_Information;
  105. //图像信息
  106. public class ImageInformation
  107. {
  108. public int Method_Name
  109. {
  110. get { return method_Name; }
  111. set { method_Name = value; }
  112. }
  113. private int method_Name;
  114. public Source_Img_Degree_Direction SIDD;
  115. public Cut_Position CP;
  116. public Cut_Success CS;
  117. public Trapezoid_Top_Center_Position TTCP;
  118. public Auto_Foucs AF;
  119. public Auto_Stigmatic AS;
  120. public Center_Position_OffsetAngle_Direction CPOD;
  121. public Measure_Size MS;
  122. public ImageInformation()
  123. {
  124. SIDD = new Source_Img_Degree_Direction();
  125. CP = new Cut_Position();
  126. CS = new Cut_Success();
  127. TTCP = new Trapezoid_Top_Center_Position();
  128. AF = new Auto_Foucs();
  129. AS = new Auto_Stigmatic();
  130. CPOD = new Center_Position_OffsetAngle_Direction();
  131. MS = new Measure_Size();
  132. }
  133. //1-计算原始图像偏移角度及方向
  134. public class Source_Img_Degree_Direction
  135. {
  136. public Boolean Is_Image = false;
  137. public double Degree
  138. {
  139. get { return degree; }
  140. set { degree = value; }
  141. }
  142. private double degree;
  143. public int Direction
  144. {
  145. get { return direction; }
  146. set { direction = value; }
  147. }
  148. private int direction;
  149. public int State
  150. {
  151. get { return state; }
  152. set { state = value; }
  153. }
  154. private int state;
  155. }
  156. //2-计算切割点位置
  157. public class Cut_Position
  158. {
  159. public Boolean Is_Image = false;
  160. public double Offsetx
  161. {
  162. get { return offsetx; }
  163. set { offsetx = value; }
  164. }
  165. private double offsetx;
  166. public double Offsety
  167. {
  168. get { return offsety; }
  169. set { offsety = value; }
  170. }
  171. private double offsety;
  172. public int State
  173. {
  174. get { return state; }
  175. set { state = value; }
  176. }
  177. private int state;
  178. }
  179. //3-是否切割成功
  180. public class Cut_Success
  181. {
  182. public Boolean Is_Image = false;
  183. public int State
  184. {
  185. get { return state; }
  186. set { state = value; }
  187. }
  188. private int state;
  189. }
  190. //4-计算切割后图像梯形区域上边中心点坐标
  191. public class Trapezoid_Top_Center_Position
  192. {
  193. public Boolean Is_Image = false;
  194. public double TopCenterX
  195. {
  196. get { return topCenterX; }
  197. set { topCenterX = value; }
  198. }
  199. private double topCenterX;
  200. public double TopCenterY
  201. {
  202. get { return topCenterY; }
  203. set { topCenterY = value; }
  204. }
  205. private double topCenterY;
  206. public int State
  207. {
  208. get { return state; }
  209. set { state = value; }
  210. }
  211. private int state;
  212. }
  213. //5-自动对焦
  214. public class Auto_Foucs
  215. {
  216. public Boolean Is_Image = true;
  217. public String Img_Path
  218. {
  219. get { return img_Path; }
  220. set { img_Path = value; }
  221. }
  222. private String img_Path;
  223. }
  224. //6-自动像闪
  225. public class Auto_Stigmatic
  226. {
  227. public Boolean Is_Image = true;
  228. public String Img_Path
  229. {
  230. get { return img_Path; }
  231. set { img_Path = value; }
  232. }
  233. private String img_Path;
  234. }
  235. //7-计算切割面区域中心坐标,以及偏移角度及方向
  236. public class Center_Position_OffsetAngle_Direction
  237. {
  238. public Boolean Is_Image = false;
  239. public double CenterX
  240. {
  241. get { return centerX; }
  242. set { centerX = value; }
  243. }
  244. private double centerX;
  245. public double CenterY
  246. {
  247. get { return centerY; }
  248. set { centerY = value; }
  249. }
  250. private double centerY;
  251. public double Degree
  252. {
  253. get { return degree; }
  254. set { degree = value; }
  255. }
  256. private double degree;
  257. public int Direction
  258. {
  259. get { return direction; }
  260. set { direction = value; }
  261. }
  262. private int direction;
  263. public int State
  264. {
  265. get { return state; }
  266. set { state = value; }
  267. }
  268. private int state;
  269. }
  270. //8-测量尺寸
  271. public class Measure_Size
  272. {
  273. public Boolean Is_Image = false;
  274. public int State
  275. {
  276. get { return state; }
  277. set { state = value; }
  278. }
  279. private int state;
  280. }
  281. }
  282. //图像信息实例类
  283. public ImageInformation Image_Information
  284. {
  285. get { return image_Information; }
  286. set { image_Information = value; }
  287. }
  288. private ImageInformation image_Information;
  289. public ThreadStatusEventArgs(string a_State)
  290. {
  291. picture_Information = new PictureInformation();
  292. image_Information = new ImageInformation();
  293. }
  294. }
  295. public class CutHolesStatusEventArgs
  296. {
  297. public string State
  298. {
  299. get { return m_state; }
  300. set { m_state = value; }
  301. }
  302. private string m_state;
  303. public string HoleName
  304. {
  305. get { return m_holeName; }
  306. set { m_holeName = value; }
  307. }
  308. private string m_holeName;
  309. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  310. {
  311. this.m_state = a_state;
  312. this.m_holeName = a_holeName;
  313. }
  314. }
  315. public class Measure
  316. {
  317. /// <summary>
  318. /// 图像拉直算法
  319. /// </summary>
  320. /// <param name="Slope">倾斜角度</param>
  321. /// <param name="x0">圆心坐标x</param>
  322. /// <param name="y0">圆心坐标y</param>
  323. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  324. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  325. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  326. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  327. /// <returns></returns>
  328. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  329. {
  330. try
  331. {
  332. double xr = x1 - x0;//倾斜图到中心的距离差x
  333. double yr = y1 - y0;//倾斜图到中心的距离差y
  334. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  335. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  336. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  337. double k_S = k - Slope;//通过夹角差求x2,y2
  338. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  339. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  340. if (Slope > 0 || Slope < 0)
  341. {
  342. Hx = x1 - x2;
  343. Hy = y1 - y2;
  344. }
  345. else
  346. {
  347. Hx = 0;
  348. Hy = 0;
  349. }
  350. return true;
  351. }
  352. catch (Exception)
  353. {
  354. return false;
  355. }
  356. }
  357. public WebResult wr = null;
  358. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  359. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  360. //定义一个全局的消息类
  361. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  362. //全局只有一个fatorySEM
  363. static FactoryHardware factorySEM = FactoryHardware.Instance;
  364. ISEMControl iSEM = factorySEM.ISEM;
  365. //@的作用是不用转义字符\\只打一个就行
  366. const String ImageName1 = @"ImageSEMH.tif"; //传给客户,作水平校正
  367. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  368. const String ImageName31 = @"ImageFIBBefore.tif";
  369. const String ImageName32 = @"ImageFIBAfter.tif";
  370. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  371. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  372. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  373. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  374. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  375. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  376. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  377. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  378. const String ElyDeposition = @"Deposition.ely"; //沉积
  379. const String ElyCrossSection = @"CrossSection.ely"; //切割
  380. const float fMin = (float)0.0000002; //单位是米
  381. public Boolean key_stop = false;
  382. String focus_path = "";
  383. String data_path = "";
  384. int m_nWorkHoleNo = -1;
  385. //测量文件
  386. private MeasureFile m_measureFile;
  387. public MeasureFile MeasureFile
  388. {
  389. get { return this.m_measureFile; }
  390. set { this.m_measureFile = value; }
  391. }
  392. //测量的切割孔
  393. private List<MeasureData.CutHole> m_cutHoles;
  394. public List<MeasureData.CutHole> cutHoles
  395. {
  396. get { return this.m_cutHoles; }
  397. set { this.m_cutHoles = value; }
  398. }
  399. //工作文件夹
  400. private string m_WorkingFolder;
  401. public string WorkingFolder
  402. {
  403. get { return this.m_WorkingFolder; }
  404. set { this.m_WorkingFolder = value; }
  405. }
  406. //程序当前路径
  407. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  408. //线程状态
  409. private ThreadStatus m_ThreadStatus;
  410. public ThreadStatus TStatus
  411. {
  412. get { return this.m_ThreadStatus; }
  413. set { this.m_ThreadStatus = value; }
  414. }
  415. //测量参数
  416. private MeasureParam m_MsParam;
  417. public MeasureParam MeasParam
  418. {
  419. get { return this.m_MsParam; }
  420. set { this.m_MsParam = value; }
  421. }
  422. //
  423. //构造函数
  424. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  425. {
  426. MeasParam = new MeasureParam();
  427. TStatus = new ThreadStatus();
  428. cutHoles = new List<MeasureData.CutHole>();
  429. //配置远程连接
  430. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  431. }
  432. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  433. public bool InitMeas(MeasureFile a_measureFile)
  434. {
  435. m_measureFile = a_measureFile;
  436. List<CutHole> listHoles = m_measureFile.ListCutHole;
  437. foreach (CutHole h in listHoles)
  438. {
  439. if (h.SWITCH == true)
  440. {
  441. m_cutHoles.Add(h);
  442. }
  443. }
  444. if (m_cutHoles.Count == 0)
  445. return false;
  446. this.m_MsParam = m_measureFile.MParam;
  447. return true;
  448. }
  449. public void SendMsg(string step_code)
  450. {
  451. arg.State = step_code;
  452. SendThreadStatus(this, arg);
  453. }
  454. public void SendMsg1(string step_code)
  455. {
  456. arg.Step_Code = step_code;
  457. arg.Time = DateTime.Now;
  458. switch(step_code)
  459. {
  460. //拍照
  461. case "1-5":
  462. case "1-7":
  463. case "1-16":
  464. case "1-24":
  465. //电压、放大倍数、工作距离、位置信息、图片路径
  466. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  467. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  468. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  469. break;
  470. case "1-10":
  471. case "1-18":
  472. //获取偏移信息
  473. break;
  474. case "1-12":
  475. case "1-20":
  476. //验证移动准备性
  477. break;
  478. case "1-26":
  479. //取消电子束校正并初始化
  480. break;
  481. default:
  482. arg.State = "1";
  483. break;
  484. }
  485. SendThreadStatus(this, arg);
  486. }
  487. public void SendCutHoleMsg(string a_state, string a_holeName)
  488. {
  489. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  490. arg.HoleName = a_holeName;
  491. arg.State = a_state;
  492. SendCutHolesStatus(this, arg);
  493. }
  494. //测量流程
  495. public void DoMeasure()
  496. {
  497. //创建线程的测量状态的更新
  498. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  499. if (SendThreadStatus != null)
  500. {
  501. SendMsg("开始测量。");
  502. }
  503. LogManager.AddHardwareLog("开始测量",true);
  504. //检查硬件连接是否正常
  505. if (!ConnectHardware())
  506. {
  507. SendMsg("连接硬件失败。");
  508. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  509. return;
  510. }
  511. //SendMsg("硬件连接成功。");
  512. //设置工作文件夹
  513. if (!SetWorkingFolderStr())
  514. {
  515. //SendMsg("设置工作文件夹失败");
  516. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  517. return;
  518. }
  519. SendMsg("创建工作文件路径为" + WorkingFolder);
  520. float[] firstPosition;
  521. //将停止键复位
  522. key_stop = false;
  523. for (int i = 0; i < m_cutHoles.Count; i++)
  524. {
  525. m_nWorkHoleNo = i;
  526. arg.HoleName = m_cutHoles[i].HoleName;
  527. //创建文件夹,孔名文件夹结构
  528. //最终数据存放目录
  529. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  530. //对焦数据存放目录
  531. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  532. m_MsParam.AutoFocus.Path = focus_path;
  533. if (!Directory.Exists(focus_path))
  534. {
  535. Directory.CreateDirectory(focus_path);
  536. }
  537. //判断孔状态
  538. if(m_cutHoles[i].STATE != State.Unmeasured)
  539. {
  540. continue;
  541. }
  542. //开始循环工作
  543. if (i == 0)
  544. {
  545. //SendMsg("第一个切孔开始测量");
  546. //切孔操作-开始
  547. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  548. firstPosition = iSEM.GetStagePosition();
  549. //第一个孔的测试
  550. //成功
  551. if(FirstHole())
  552. {
  553. //保存文件,将测量状态更改
  554. m_cutHoles[i].STATE = State.Success;
  555. m_measureFile.Save();
  556. }
  557. //失败
  558. else
  559. {
  560. m_cutHoles[i].STATE = State.Failed;
  561. m_measureFile.Save();
  562. }
  563. //切孔操作-完成
  564. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  565. }
  566. else
  567. {
  568. //非第一个孔的测试
  569. SendMsg("第" + i.ToString() + "个切孔开始测量");
  570. //切孔操作-开始
  571. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  572. OtherHole();
  573. //切孔操作-完成
  574. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  575. }
  576. if(key_stop)
  577. {
  578. m_cutHoles[i].STATE = State.Unmeasured;
  579. m_measureFile.Save();
  580. break;
  581. }
  582. }
  583. }
  584. //检查硬件连接是否正常
  585. public bool ConnectHardware()
  586. {
  587. //返回硬件的连接状态
  588. return iSEM.ConnectStatus();
  589. }
  590. //设置工作文件夹
  591. public bool SetWorkingFolderStr()
  592. {
  593. WorkingFolder = m_measureFile.FilePath;
  594. return true;
  595. }
  596. //插入PT针
  597. public bool InsertPT()
  598. {
  599. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  600. //SendMsg("调用宏插入PT针宏文件" + fn);
  601. iSEM.CMDMCFFilename(fn);
  602. //延时1s??
  603. Thread.Sleep(1000);
  604. return true;
  605. }
  606. //撤出PT针
  607. public bool RetractPT()
  608. {
  609. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  610. //SendMsg("调用宏撤出PT针宏文件" + fn);
  611. iSEM.CMDMCFFilename(fn);
  612. //延时1s??
  613. Thread.Sleep(1000);
  614. return true;
  615. }
  616. //PT沉积
  617. public bool PTWork()
  618. {
  619. //执行PT沉积的ELY文件
  620. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  621. //SendMsg("执行PT沉积Ely文件:" + fn);
  622. if (!ExcuteEly(fn))
  623. {
  624. return false;
  625. }
  626. //等待沉积完成
  627. while (true)
  628. {
  629. Thread.Sleep(10000);
  630. if (iSEM.GetFIBMode() == 0)
  631. {
  632. break;
  633. }
  634. }
  635. return true;
  636. }
  637. //FIB切割
  638. public bool FIBWork()
  639. {
  640. //执行PT沉积的ELY文件
  641. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  642. //SendMsg("执行FIB切割Ely文件:" + fn);
  643. if (!ExcuteEly(fn))
  644. {
  645. return false;
  646. }
  647. //等待切割完成
  648. while (true)
  649. {
  650. Thread.Sleep(10000);
  651. if (iSEM.GetFIBMode() == 0)
  652. {
  653. break;
  654. }
  655. }
  656. return true;
  657. }
  658. //执行ELY文件的步骤
  659. public bool ExcuteEly(string a_filename)
  660. {
  661. //执行ELy文件有三个动作
  662. //1. 选择ELY文件
  663. //SendMsg("选择ELY文件");
  664. if (!iSEM.CmdFIBLoadELY(a_filename))
  665. {
  666. //SendMsg("选择ELY文件失败");
  667. return false;
  668. }
  669. Thread.Sleep(1000);
  670. //2. 确认ELY文件
  671. //SendMsg("确认ELY文件");
  672. if (!iSEM.CmdFIBEXPOSUREELY())
  673. {
  674. //SendMsg("确认ELY文件失败");
  675. return false;
  676. }
  677. Thread.Sleep(1000);
  678. //3. 执行ELY文件
  679. //SendMsg("执行ELY文件");
  680. if (!iSEM.CmdFIBSTARTELY())
  681. {
  682. //SendMsg("执行ELY文件失败");
  683. return false;
  684. }
  685. Thread.Sleep(1000);
  686. return true;
  687. }
  688. //执行自动对焦
  689. public bool ImageFocus()
  690. {
  691. if (m_measureFile.MParam.FocusMode == 1)//手动
  692. {
  693. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  694. {
  695. arg.Message = "自动对焦完成";
  696. SendMsg("1-3");
  697. }
  698. else
  699. {
  700. arg.Message = "自动对焦失败";
  701. SendMsg("1-3");
  702. return false;
  703. }
  704. }
  705. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  706. {
  707. //郝工增加自动对焦算法
  708. //处理文件夹
  709. if(Directory.Exists(focus_path))
  710. {
  711. Directory.Delete(focus_path,true);
  712. }
  713. Directory.CreateDirectory(focus_path);
  714. //1、对焦参数类,2、输出工作距离
  715. int wd = 0;
  716. AutoFocus(m_MsParam.AutoFocus, out wd);
  717. LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  718. //设置工作距离
  719. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  720. //处理图片位置
  721. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  722. }
  723. else if (m_MsParam.FocusMode == 3) //客户自动
  724. {
  725. //后期和客户对接接口
  726. List<string> filenames = new List<string>();
  727. String retfilename = wr.Img_Auto_Focus(filenames);
  728. }
  729. else //蔡司自动对焦
  730. {
  731. }
  732. return true;
  733. }
  734. /// <summary>
  735. ///13. 自动 定位功能,沉积
  736. /// </summary>
  737. /// <returns></returns>
  738. public bool GetPoistion(Boolean isFirst)
  739. {
  740. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  741. int state = 0;
  742. //1.控制SEM放大600X
  743. arg.State = "SEM";
  744. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  745. {
  746. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  747. SendMsg("1-2");
  748. return false;
  749. }
  750. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  751. SendMsg("1-2");
  752. //判断是否停止进程
  753. if (key_stop)
  754. {
  755. return false;
  756. }
  757. //2.控制SEM自动对焦、亮度、对比度
  758. ImageFocus();
  759. //判断是否停止进程
  760. if (key_stop)
  761. {
  762. return false;
  763. }
  764. //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
  765. if (!isFirst)
  766. {
  767. if (!TiltCorrection(54))
  768. {
  769. arg.Message = "设置SEM进行角度补偿54度失败";
  770. SendMsg("1-4");
  771. return false;
  772. }
  773. arg.Message = "设置SEM进行角度补偿54度成功";
  774. SendMsg("1-4");
  775. Thread.Sleep(5000);
  776. //判断是否停止进程
  777. if (key_stop)
  778. {
  779. return false;
  780. }
  781. }
  782. //4.控制SEM拍照,5保存照片=====需要更改路径
  783. String fileName1 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  784. arg.Picture_Information.Picture_FullPath = fileName1;
  785. arg.Picture_Information.Work_Status = "SEM";
  786. if (!GetImage(ImageMode.SEM, fileName1))
  787. {
  788. arg.Message = "SEM拍照失败";
  789. SendMsg("1-5");
  790. return false;
  791. }
  792. arg.Message = "SEM拍照成功";
  793. SendMsg("1-5");
  794. Thread.Sleep(3000);
  795. //判断是否停止进程
  796. if (key_stop)
  797. {
  798. return false;
  799. }
  800. //判断是否为仅拍照,不是则执行FIB操作
  801. if (!m_MsParam.Is_Photograph)
  802. {
  803. //6.设置FIB拍照参数——扫描时间、束流等
  804. //7.控制FIB自动亮度、对比度
  805. if (!iSEM.CmdFIBModeFIB())
  806. {
  807. arg.Message = "FIB模式切换失败";
  808. SendMsg("1-6");
  809. return false;
  810. }
  811. arg.State = "FIB";
  812. arg.Message = "FIB模式切换成功";
  813. SendMsg("1-6");
  814. Thread.Sleep(10000);
  815. //判断是否停止进程
  816. if (key_stop)
  817. {
  818. return false;
  819. }
  820. //8.控制FIB拍照
  821. //9.保存照片======更改路径
  822. String fileName2 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  823. arg.Picture_Information.Picture_FullPath = fileName1;
  824. arg.Picture_Information.Work_Status = "FIB";
  825. if (!GetImage(ImageMode.FIB, fileName2))
  826. {
  827. arg.Message = "FIB拍照失败";
  828. SendMsg("1-7");
  829. return false;
  830. }
  831. arg.Message = "FIB拍照成功";
  832. SendMsg("1-7");
  833. Thread.Sleep(3000);
  834. //判断是否停止进程
  835. if (key_stop)
  836. {
  837. return false;
  838. }
  839. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  840. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  841. {
  842. arg.Message = "样品台移动到指定位置";
  843. SendMsg("1-8");
  844. }
  845. else
  846. {
  847. wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  848. if (state == 1)
  849. {
  850. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  851. if (!iSEM.MoveStageXY(x1, y1))
  852. {
  853. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  854. SendMsg("1-8");
  855. return false;
  856. }
  857. //判断是否移动完成
  858. while (true)
  859. {
  860. Thread.Sleep(5000);
  861. if (iSEM.GetStageIs() == 0)
  862. {
  863. break;
  864. }
  865. }
  866. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  867. SendMsg("1-8");
  868. }
  869. else
  870. {
  871. arg.Message = "样品台移动失败";
  872. SendMsg("1-8");
  873. return false;
  874. }
  875. }
  876. //判断是否停止进程
  877. if (key_stop)
  878. {
  879. return false;
  880. }
  881. //11.自动工具样品类型参数确定是否需要PT沉积
  882. if (m_MsParam.PT)
  883. {
  884. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  885. //第10步已经移动好位置
  886. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  887. x0 = iSEM.GetStageAtX();
  888. y0 = iSEM.GetStageAtY();
  889. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  890. {
  891. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
  892. SendMsg("1-9");
  893. return false;
  894. }
  895. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
  896. SendMsg("1-9");
  897. //判断是否停止进程
  898. if (key_stop)
  899. {
  900. return false;
  901. }
  902. //3. 根据坐标进行PT沉积
  903. if (!PTWork())
  904. {
  905. arg.Message = "PT沉积失败";
  906. SendMsg("1-10");
  907. return false;
  908. }
  909. arg.Message = "PT沉积成功";
  910. SendMsg("1-10");
  911. //判断是否停止进程
  912. if (key_stop)
  913. {
  914. return false;
  915. }
  916. }
  917. }
  918. //12.根据梯形坐标控制FIB调整到中心位置
  919. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  920. //以上两步已经将程序移动到11内部去做
  921. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  922. float[] firstPosition = iSEM.GetStagePosition();
  923. m_cutHoles[0].Position.X = firstPosition[0];
  924. m_cutHoles[0].Position.Y = firstPosition[1];
  925. m_cutHoles[0].Position.Z = firstPosition[2];
  926. m_cutHoles[0].Position.T = firstPosition[3];
  927. m_cutHoles[0].Position.R = firstPosition[4];
  928. m_cutHoles[0].Position.M = firstPosition[5];
  929. //这里要调用文件保存功能
  930. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  931. + firstPosition[1].ToString() + ","
  932. + firstPosition[2].ToString() + ","
  933. + firstPosition[3].ToString() + ","
  934. + firstPosition[4].ToString() + ","
  935. + firstPosition[5].ToString() + ")";
  936. SendMsg("1-11");
  937. //判断是否停止进程
  938. if (key_stop)
  939. {
  940. return false;
  941. }
  942. return true;
  943. }
  944. /// <summary>
  945. /// 14. FIB切割
  946. /// </summary>
  947. /// <returns></returns>
  948. public bool FIBCross()
  949. {
  950. int state = 0;
  951. //切之前拍照保存,,
  952. String fileName31 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName31;
  953. arg.Picture_Information.Picture_FullPath = fileName31;
  954. arg.Picture_Information.Work_Status = "FIB";
  955. if (!GetImage(ImageMode.FIB, fileName31))
  956. {
  957. arg.Message = "FIB切割前拍照失败";
  958. SendMsg("1-14");
  959. return false;
  960. }
  961. arg.Message = "FIB切割前拍照成功";
  962. SendMsg("1-14");
  963. //判断是否停止进程
  964. if (key_stop)
  965. {
  966. return false;
  967. }
  968. //14.自动控制FIB切割
  969. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  970. //2.控制FIB进行切割
  971. //以上1、2步全部用ELY文件代替
  972. if (!FIBWork())
  973. {
  974. arg.Message = "FIB切割失败";
  975. SendMsg("1-12");
  976. return false;
  977. }
  978. arg.Message = "FIB切割成功";
  979. SendMsg("1-12");
  980. Thread.Sleep(5000);
  981. //判断是否停止进程
  982. if (key_stop)
  983. {
  984. return false;
  985. }
  986. //3.控制FIB拍照600X
  987. //底层没有控制方法。
  988. //4.保存图片
  989. String fileName32 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName32;
  990. arg.Picture_Information.Picture_FullPath = fileName32;
  991. arg.Picture_Information.Work_Status = "FIB";
  992. if (!GetImage(ImageMode.FIB, fileName32))
  993. {
  994. arg.Message = "FIB切割后拍照失败";
  995. SendMsg("1-14");
  996. return false;
  997. }
  998. arg.Message = "FIB切割后拍照成功";
  999. SendMsg("1-14");
  1000. Thread.Sleep(3000);
  1001. //判断是否停止进程
  1002. if (key_stop)
  1003. {
  1004. return false;
  1005. }
  1006. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1007. wr.Img_Cut_Success(fileName31, fileName32, out state);
  1008. if(state == 0)
  1009. {
  1010. arg.Message = "FIB切割校验失败";
  1011. SendMsg("1-14");
  1012. return false;
  1013. }
  1014. arg.Message = "FIB切割校验成功";
  1015. SendMsg("1-14");
  1016. //判断是否停止进程
  1017. if (key_stop)
  1018. {
  1019. return false;
  1020. }
  1021. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1022. //拍完照自动解冻,这里不做处理。
  1023. return true;
  1024. }
  1025. /// <summary>
  1026. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1027. /// </summary>
  1028. /// <returns></returns>
  1029. public bool FindCross()
  1030. {
  1031. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1032. float angle = 0;
  1033. int direction = 0;
  1034. int state = 0;
  1035. //切换到SEM模式
  1036. if (!iSEM.CmdFIBModeSEM())
  1037. {
  1038. //SendMsg("SEM模式切换失败");
  1039. return false;
  1040. }
  1041. arg.State = "SEM";
  1042. Thread.Sleep(10000);
  1043. //判断是否停止进程
  1044. if (key_stop)
  1045. {
  1046. return false;
  1047. }
  1048. //1.控制SEM放大到300倍
  1049. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/2))
  1050. {
  1051. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 2).ToString("0.0") + "倍失败";
  1052. SendMsg("1-18");
  1053. return false;
  1054. }
  1055. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/2).ToString("0.0") + "倍成功";
  1056. SendMsg("1-18");
  1057. //判断是否停止进程
  1058. if (key_stop)
  1059. {
  1060. return false;
  1061. }
  1062. //2.控制SEM自动对焦、亮度、对比度-接口,,将自动对焦提出单独函数调用
  1063. ImageFocus();
  1064. Thread.Sleep(5000);
  1065. //判断是否停止进程
  1066. if (key_stop)
  1067. {
  1068. return false;
  1069. }
  1070. //3.控制SEM拍照
  1071. String fileName4 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
  1072. arg.Picture_Information.Picture_FullPath = fileName4;
  1073. arg.Picture_Information.Work_Status = "SEM";
  1074. if (!GetImage(ImageMode.SEM, fileName4))
  1075. {
  1076. arg.Message = "SEM拍照失败";
  1077. SendMsg("1-20");
  1078. return false;
  1079. }
  1080. arg.Message = "SEM拍照成功";
  1081. SendMsg("1-20");
  1082. Thread.Sleep(3000);
  1083. //判断是否停止进程
  1084. if (key_stop)
  1085. {
  1086. return false;
  1087. }
  1088. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1089. //5.根据坐标控制SEM移动到切孔位置,居中
  1090. //这里是否用到拉直操作,我没有加
  1091. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1092. {
  1093. arg.Message = "样品台移动到指定位置";
  1094. SendMsg("1-21");
  1095. }
  1096. else
  1097. {
  1098. wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName,
  1099. m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
  1100. if (state == 1)
  1101. {
  1102. //拉直操作
  1103. Straightening(angle, 65, 65, x1, y1, ref x2, ref y2);
  1104. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1105. if (!iSEM.MoveStageXY(x2, y2))
  1106. {
  1107. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1108. SendMsg("1-21");
  1109. return false;
  1110. }
  1111. //判断是否移动完成
  1112. while (true)
  1113. {
  1114. Thread.Sleep(5000);
  1115. if (iSEM.GetStageIs() == 0)
  1116. {
  1117. break;
  1118. }
  1119. }
  1120. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1121. SendMsg("1-21");
  1122. }
  1123. else
  1124. {
  1125. arg.Message = "样品台移动失败";
  1126. SendMsg("1-21");
  1127. return false;
  1128. }
  1129. }
  1130. //判断是否停止进程
  1131. if (key_stop)
  1132. {
  1133. return false;
  1134. }
  1135. //6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1136. x0 = iSEM.GetStageAtX();
  1137. y0 = iSEM.GetStageAtY();
  1138. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1139. {
  1140. return false;
  1141. }
  1142. //判断是否停止进程
  1143. if (key_stop)
  1144. {
  1145. return false;
  1146. }
  1147. return true;
  1148. }
  1149. /// <summary>
  1150. /// 17.自动控制SEM拍截面照
  1151. /// </summary>
  1152. /// <returns></returns>
  1153. public bool ShotSection(ref String image18)
  1154. {
  1155. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1156. int state = 0;
  1157. //1、放大6000倍,放大倍数参数photograph_
  1158. if (!iSEM.SetMagnification(m_MsParam.Photograph_Magnification))
  1159. {
  1160. arg.Message = "放大倍数调整失败";
  1161. SendMsg("1-25");
  1162. return false;
  1163. }
  1164. arg.Message = "放大倍数调整成功";
  1165. SendMsg("1-25");
  1166. //判断是否停止进程
  1167. if (key_stop)
  1168. {
  1169. return false;
  1170. }
  1171. //2.控制SEM自动对焦、亮度、对比度-接口
  1172. ImageFocus();
  1173. //判断是否停止进程
  1174. if (key_stop)
  1175. {
  1176. return false;
  1177. }
  1178. //3、设置SEM补偿角度
  1179. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1180. {
  1181. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1182. SendMsg("1-27");
  1183. return false;
  1184. }
  1185. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1186. SendMsg("1-27");
  1187. Thread.Sleep(5000);
  1188. //判断是否停止进程
  1189. if (key_stop)
  1190. {
  1191. return false;
  1192. }
  1193. //4、拍照,5、保存照片
  1194. String fileName5 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
  1195. arg.Picture_Information.Picture_FullPath = fileName5;
  1196. arg.Picture_Information.Work_Status = "SEM";
  1197. if (!GetImage(ImageMode.SEM, fileName5))
  1198. {
  1199. arg.Message = "SEM拍照失败";
  1200. SendMsg("1-28");
  1201. return false;
  1202. }
  1203. arg.Message = "SEM拍照成功";
  1204. SendMsg("1-28");
  1205. Thread.Sleep(3000);
  1206. //判断是否停止进程
  1207. if (key_stop)
  1208. {
  1209. return false;
  1210. }
  1211. //6、获取偏移坐标,7、移动到位
  1212. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1213. {
  1214. arg.Message = "样品台移动到指定位置";
  1215. SendMsg("1-29");
  1216. }
  1217. else
  1218. {
  1219. //8,图像T形
  1220. wr.Img_Trapezoid_Top_Center_Position(fileName5, out x1, out y1, out state);
  1221. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1222. if (state == 1)
  1223. {
  1224. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1225. if (!iSEM.MoveStageXY(x1, y1))
  1226. {
  1227. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1228. SendMsg("1-29");
  1229. return false;
  1230. }
  1231. //判断是否移动完成
  1232. while (true)
  1233. {
  1234. Thread.Sleep(5000);
  1235. if (iSEM.GetStageIs() == 0)
  1236. {
  1237. break;
  1238. }
  1239. }
  1240. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1241. SendMsg("1-29");
  1242. }
  1243. else
  1244. {
  1245. arg.Message = "样品台移动失败";
  1246. SendMsg("1-8");
  1247. return false;
  1248. }
  1249. }
  1250. //判断是否停止进程
  1251. if (key_stop)
  1252. {
  1253. return false;
  1254. }
  1255. //8、验证移动准确性
  1256. x0 = iSEM.GetStageAtX();
  1257. y0 = iSEM.GetStageAtY();
  1258. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1259. {
  1260. return false;
  1261. }
  1262. //判断是否停止进程
  1263. if (key_stop)
  1264. {
  1265. return false;
  1266. }
  1267. //9、-10不操作
  1268. //11、自动对焦。与之前操作相同
  1269. ImageFocus();
  1270. //判断是否停止进程
  1271. if (key_stop)
  1272. {
  1273. return false;
  1274. }
  1275. //12拍照
  1276. String fileName6 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1277. arg.Picture_Information.Picture_FullPath = fileName6;
  1278. arg.Picture_Information.Work_Status = "SEM";
  1279. if (!GetImage(ImageMode.SEM, fileName6))
  1280. {
  1281. arg.Message = "SEM拍照失败";
  1282. SendMsg("1-28");
  1283. return false;
  1284. }
  1285. image18 = fileName6;
  1286. arg.Message = "SEM拍照成功";
  1287. SendMsg("1-28");
  1288. Thread.Sleep(3000);
  1289. //判断是否停止进程
  1290. if (key_stop)
  1291. {
  1292. return false;
  1293. }
  1294. //14光束复位
  1295. iSEM.SetBeamShiftX(0);
  1296. iSEM.SetBeamShiftY(0);
  1297. //判断是否停止进程
  1298. if (key_stop)
  1299. {
  1300. return false;
  1301. }
  1302. return true;
  1303. }
  1304. public bool CommonWork()
  1305. {
  1306. SendMsg("插入PT针");
  1307. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1308. //if (firstHole.PT == true)
  1309. {
  1310. if (!InsertPT())
  1311. {
  1312. SendMsg("插入PT针失败");
  1313. return false;
  1314. }
  1315. }
  1316. //13. 自动 定位功能
  1317. SendMsg("自动定位切割位置");
  1318. if (!GetPoistion(false))
  1319. {
  1320. SendMsg("自动定位切割位置失败");
  1321. return false;
  1322. }
  1323. //14.自动控制FIB切割
  1324. SendMsg("FIB切割");
  1325. if (!FIBCross())
  1326. {
  1327. SendMsg("FIB切割失败");
  1328. return false;
  1329. }
  1330. //{
  1331. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1332. // //2.控制FIB进行切割
  1333. // //3.控制FIB拍照600X
  1334. // //4.保存图片
  1335. // {
  1336. // //1.设置图片名称
  1337. // //2.保存图片3
  1338. // String fileName3 = WorkingFolder + ImageName3;
  1339. // if (!GetImage(ImageMode.FIB, fileName3))
  1340. // {
  1341. // return false;
  1342. // }
  1343. // }
  1344. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1345. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1346. //}
  1347. //15.根据样品类型决定是否撤出PT针
  1348. SendMsg("撤出PT针");
  1349. //if (firstHole.PT == false)
  1350. //{
  1351. if (!RetractPT())
  1352. {
  1353. SendMsg("撤出PT针失败");
  1354. return false;
  1355. }
  1356. //}
  1357. // 16.找到切割位置
  1358. SendMsg("找到切割位置");
  1359. //17.自动控制SEM拍截面照
  1360. SendMsg("观测层高");
  1361. SendMsg("切换SEM控制");
  1362. if (!iSEM.CmdFIBModeSEM())
  1363. {
  1364. SendMsg("SEM模式切换失败");
  1365. return false;
  1366. }
  1367. Thread.Sleep(10000);
  1368. SendMsg("放大6000倍");
  1369. if (!iSEM.SetMagnification(6000))
  1370. {
  1371. SendMsg("放大倍数调整失败");
  1372. return false;
  1373. }
  1374. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1375. {
  1376. SendMsg("拍摄照片完成");
  1377. //return true;
  1378. }
  1379. else
  1380. {
  1381. SendMsg("拍摄照片失败");
  1382. return false;
  1383. }
  1384. SendMsg("图像校正36度");
  1385. //3.设置SEM角度补偿cos36度
  1386. if (!TiltCorrection(36))
  1387. {
  1388. return false;
  1389. }
  1390. Thread.Sleep(3000);
  1391. string fn;
  1392. //用宏抓一般图
  1393. Thread.Sleep(5000);
  1394. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1395. SendMsg("用宏抓一般图" + fn);
  1396. iSEM.CMDMCFFilename(fn);
  1397. //延时1s??
  1398. Thread.Sleep(5000);
  1399. //用宏抓好图
  1400. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1401. SendMsg("用宏抓好图" + fn);
  1402. iSEM.CMDMCFFilename(fn);
  1403. //延时1s??
  1404. Thread.Sleep(30000);
  1405. Thread.Sleep(10000);
  1406. WorkingFolder = m_measureFile.FilePath;
  1407. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1408. SendMsg("SEM拍照存储到" + fileName6);
  1409. if (!GetImage(ImageMode.SEM, fileName6))
  1410. {
  1411. SendMsg("SEM拍照失败");
  1412. return false;
  1413. }
  1414. //用宏抓标志图
  1415. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1416. SendMsg("用宏抓标志图" + fn);
  1417. iSEM.CMDMCFFilename(fn);
  1418. //延时1s??
  1419. Thread.Sleep(30000);
  1420. //恢复简单抓图
  1421. Thread.Sleep(5000);
  1422. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1423. SendMsg("用宏抓一般图" + fn);
  1424. iSEM.CMDMCFFilename(fn);
  1425. SendMsg("所有图结束");
  1426. return true;
  1427. }
  1428. //第一个孔的测试过程
  1429. public bool FirstHole()
  1430. {
  1431. MeasureData.CutHole firstHole = m_cutHoles[0];
  1432. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1433. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1434. {
  1435. if (!InsertPT())
  1436. {
  1437. arg.Message = "插入PT针失败";
  1438. SendMsg("1-0");
  1439. return false;
  1440. }
  1441. arg.Message = "插入PT针成功";
  1442. SendMsg("1-0");
  1443. }
  1444. //判断是否停止进程
  1445. if (key_stop)
  1446. {
  1447. return false;
  1448. }
  1449. //13. 自动 定位功能
  1450. if (!GetPoistion(true))
  1451. {
  1452. arg.Message = "自动定位切割位置失败";
  1453. SendMsg("1-1");
  1454. return false;
  1455. }
  1456. arg.Message = "自动定位切割位置成功";
  1457. SendMsg("1-1");
  1458. //判断是否停止进程
  1459. if (key_stop)
  1460. {
  1461. return false;
  1462. }
  1463. //14.自动控制FIB切割
  1464. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1465. {
  1466. if (!FIBCross())
  1467. {
  1468. arg.Message = "FIB切割失败";
  1469. SendMsg("1-16");
  1470. return false;
  1471. }
  1472. arg.Message = "FIB切割成功";
  1473. SendMsg("1-16");
  1474. }
  1475. //判断是否停止进程
  1476. if (key_stop)
  1477. {
  1478. return false;
  1479. }
  1480. //15.根据样品类型决定是否撤出PT针
  1481. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1482. {
  1483. if (!RetractPT())
  1484. {
  1485. arg.Message = "撤出PT针失败";
  1486. SendMsg("1-17");
  1487. return false;
  1488. }
  1489. arg.Message = "撤出PT针成功";
  1490. SendMsg("1-17");
  1491. }
  1492. //判断是否停止进程
  1493. if (key_stop)
  1494. {
  1495. return false;
  1496. }
  1497. // 16.找到切割位置
  1498. if (m_MsParam.Is_Photograph == false)
  1499. {
  1500. if (!FindCross())
  1501. {
  1502. arg.Message = "找到切割位置失败";
  1503. SendMsg("1-24");
  1504. return false;
  1505. }
  1506. arg.Message = "找到切割位置成功";
  1507. SendMsg("1-24");
  1508. }
  1509. //判断是否停止进程
  1510. if (key_stop)
  1511. {
  1512. return false;
  1513. }
  1514. //将过程17最后的拍照图片提出给18步进行调用
  1515. String img18 = "";
  1516. //17.自动控制SEM拍截面照
  1517. if (m_MsParam.Is_Photograph == false)
  1518. {
  1519. if (!ShotSection(ref img18))
  1520. {
  1521. arg.Message = "自动控制SEM拍截面照失败";
  1522. SendMsg("1-33");
  1523. return false;
  1524. }
  1525. arg.Message = "自动控制SEM拍截面照成功";
  1526. SendMsg("1-33");
  1527. }
  1528. //判断是否停止进程
  1529. if (key_stop)
  1530. {
  1531. return false;
  1532. }
  1533. //18.自动层高分析
  1534. float size = iSEM.GetPixelSize();
  1535. float mag = iSEM.GetMagnification();
  1536. int state = 0;
  1537. wr.Img_Measure_Size(img18, mag, size, out state);
  1538. if(state==0)
  1539. {
  1540. arg.Message = "测量尺寸失败";
  1541. SendMsg("1-35");
  1542. return false;
  1543. }
  1544. arg.Message = "测量尺寸成功";
  1545. SendMsg("1-35");
  1546. #region 测试程序
  1547. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  1548. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  1549. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1550. //{
  1551. // SendMsg("拍摄照片完成");
  1552. // //return true;
  1553. //}
  1554. //else
  1555. //{
  1556. // SendMsg("拍摄照片失败");
  1557. // return false;
  1558. //}
  1559. //SendMsg("图像校正36度");
  1560. ////3.设置SEM角度补偿cos36度
  1561. //if (!TiltCorrection(36))
  1562. //{
  1563. // return false;
  1564. //}
  1565. //Thread.Sleep(3000);
  1566. //string fn;
  1567. //用宏抓一般图
  1568. //Thread.Sleep(5000);
  1569. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1570. //SendMsg("用宏抓一般图" + fn);
  1571. //iSEM.CMDMCFFilename(fn);
  1572. ////延时1s??
  1573. //Thread.Sleep(5000);
  1574. ////用宏抓好图
  1575. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1576. //SendMsg("用宏抓好图" + fn);
  1577. //iSEM.CMDMCFFilename(fn);
  1578. ////延时1s??
  1579. //Thread.Sleep(30000);
  1580. //Thread.Sleep(10000);
  1581. //WorkingFolder = m_measureFile.FilePath;
  1582. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1583. //SendMsg("SEM拍照存储到" + fileName6);
  1584. //if (!GetImage(ImageMode.SEM, fileName6))
  1585. //{
  1586. // SendMsg("SEM拍照失败");
  1587. // return false;
  1588. //}
  1589. ////用宏抓标志图
  1590. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1591. //SendMsg("用宏抓标志图" + fn);
  1592. //iSEM.CMDMCFFilename(fn);
  1593. ////延时1s??
  1594. //Thread.Sleep(30000);
  1595. //Thread.Sleep(5000);
  1596. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1597. //SendMsg("用宏抓一般图" + fn);
  1598. //iSEM.CMDMCFFilename(fn);
  1599. ////延时1s??
  1600. //Thread.Sleep(5000);
  1601. //SendMsg("所有图结束");
  1602. ////17.自动控制SEM拍截面照
  1603. //{
  1604. // //1.控制SEM放大到指定参数大小范围,6000x
  1605. // if (!iSEM.SetMagnification(6000))
  1606. // {
  1607. // return false;
  1608. // }
  1609. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1610. // if (!MeasParam.FocusMode)
  1611. // {
  1612. // //弹出手动对焦的窗口
  1613. // }
  1614. // else
  1615. // {
  1616. // //调用自动对焦模块
  1617. // }
  1618. // //3.设置SEM角度补偿cos36度
  1619. // if (!TiltCorrection(36))
  1620. // {
  1621. // return false;
  1622. // }
  1623. // //4.控制SEM拍照
  1624. // //5.保存照片4
  1625. // String fileName5 = WorkingFolder + ImageName5;
  1626. // if (!GetImage(ImageMode.SEM, fileName5))
  1627. // {
  1628. // return false;
  1629. // }
  1630. // //6.将照片传给客户,获取偏移坐标
  1631. // float x6 = 0, y6 = 0;
  1632. // float angle1 = 0;
  1633. // float mage = 10000;
  1634. // //7.根据坐标控制SEM移动到分析位置
  1635. // if (!iSEM.MoveStageXY(x6, y6))
  1636. // {
  1637. // return false;
  1638. // }
  1639. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1640. // float x7 = iSEM.GetStageAtX();
  1641. // float y7 = iSEM.GetStageAtY();
  1642. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1643. // {
  1644. // return false;
  1645. // }
  1646. // //9.控制SEM平行校正,并记录校正前初始值
  1647. // float foldAnagle = iSEM.GetScanRotation();
  1648. // if (foldAnagle == float.NaN)
  1649. // {
  1650. // return false;
  1651. // }
  1652. // if (!iSEM.SetScanRotation(angle1))
  1653. // {
  1654. // return false;
  1655. // }
  1656. // //10.控制SEM放大到指定参数大小范围
  1657. // if (!iSEM.SetMagnification(mage))
  1658. // {
  1659. // return false;
  1660. // }
  1661. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1662. // if (!MeasParam.FocusMode)
  1663. // {
  1664. // //弹出手动对焦的窗口
  1665. // }
  1666. // else
  1667. // {
  1668. // //调用自动对焦模块
  1669. // }
  1670. // //12.控制SEM对分析位置拍照
  1671. // String fileName6 = WorkingFolder + ImageName6;
  1672. // if (!GetImage(ImageMode.SEM, fileName6))
  1673. // {
  1674. // return false;
  1675. // }
  1676. // //13.保存照片
  1677. // //14.控制SEM取消电子束校正,回到初始值
  1678. // if (!iSEM.SetScanRotation(foldAnagle))
  1679. // {
  1680. // return false;
  1681. // }
  1682. //}
  1683. ////18.自动层高分析
  1684. //{
  1685. // //1.获取SEM Pixel Size给客户传入参数
  1686. // if (iSEM.GetPixelSize() == float.NaN)
  1687. // {
  1688. // return false;
  1689. // }
  1690. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1691. //}
  1692. ////19.自动能谱分析
  1693. //{
  1694. // //1. 确定能谱位置
  1695. // //2. 控制牛津打能谱
  1696. // //3. 能谱分析——面扫+线扫描
  1697. //}
  1698. #endregion
  1699. return true;
  1700. }
  1701. //非第一个孔的测试过程
  1702. public void OtherHole()
  1703. {
  1704. //SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1705. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1706. #region 1. 初始化
  1707. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1708. //读取图像冻结状态
  1709. float ffrozen = iSEM.GetImageFrozen();
  1710. if (ffrozen == float.NaN)
  1711. {
  1712. return;
  1713. }
  1714. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1715. {
  1716. //SendMsg("样品台恢复到水平");
  1717. //return true;
  1718. }
  1719. else
  1720. {
  1721. //SendMsg("禁止样品台恢复到水平");
  1722. return;
  1723. }
  1724. //2. 调节样品1号孔的样品台6轴坐标
  1725. //3. 将样品1号孔坐标2存入数据库
  1726. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1727. if (!iSEM.SetStageGotoT(0))
  1728. {
  1729. return;
  1730. }
  1731. while (true)
  1732. {
  1733. Thread.Sleep(10000);
  1734. if (iSEM.GetStageIs() == 0)
  1735. {
  1736. break;
  1737. }
  1738. }
  1739. //5. 获取光镜2号孔XY坐标
  1740. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1741. //6. 根据光镜坐标控制样品台移动
  1742. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1743. {
  1744. SendMsg("移动失败");
  1745. }
  1746. while (true)
  1747. {
  1748. Thread.Sleep(10000);
  1749. if (iSEM.GetStageIs() == 0)
  1750. {
  1751. break;
  1752. }
  1753. }
  1754. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1755. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1756. {
  1757. SendMsg("样品台旋转");
  1758. //return true;
  1759. }
  1760. else
  1761. {
  1762. SendMsg("禁止样品台旋转");
  1763. return;
  1764. }
  1765. if (!iSEM.SetStageGotoT(54))
  1766. {
  1767. return;
  1768. }
  1769. while (true)
  1770. {
  1771. Thread.Sleep(10000);
  1772. if (iSEM.GetStageIs() == 0)
  1773. {
  1774. break;
  1775. }
  1776. }
  1777. #endregion
  1778. SendMsg("拉直操作");
  1779. SendMsg("其他操作与1号孔操作一致");
  1780. if (!CommonWork())
  1781. {
  1782. return;
  1783. }
  1784. //2. 定位切割
  1785. {
  1786. //1. 拉直操作
  1787. {
  1788. //1.1 控制SEM进行拍照
  1789. //1.2 图片传给客户,返回偏移角度
  1790. //1.3 根据返回角度,控制样品台转动
  1791. }
  1792. //2. 与1号孔13步相同
  1793. }
  1794. //3. 以后步骤与1号孔以后步骤一致
  1795. //}
  1796. }
  1797. //角度补偿
  1798. public bool TiltCorrection(float a_fAngle)
  1799. {
  1800. //记录原来电镜的状态
  1801. // bool bTilt = false;
  1802. //float fOldTilt = iSEM.GetTiltCorrection();
  1803. //if (fOldTilt == float.NaN)
  1804. //{
  1805. // return false;
  1806. //}
  1807. //else if (fOldTilt == 1)
  1808. //{
  1809. // bTilt = true;
  1810. //}
  1811. //else if (fOldTilt == 0)
  1812. //{
  1813. // bTilt = false;
  1814. //}
  1815. //float fOldAngle = iSEM.GetTiltAngle();
  1816. //if (fOldAngle == float.NaN)
  1817. //{
  1818. // return false;
  1819. //}
  1820. //开启校正
  1821. SendMsg("开启校正");
  1822. if (!iSEM.SetTiltAngleOn())
  1823. {
  1824. return false;
  1825. }
  1826. //设置校正角度
  1827. //if (!iSEM.SetTiltAngle(fOldAngle))
  1828. //{
  1829. // return false;
  1830. //}
  1831. //恢复原始状态
  1832. SendMsg("校正角度"+ a_fAngle.ToString());
  1833. if (!iSEM.SetTiltAngle(a_fAngle))
  1834. {
  1835. return false;
  1836. }
  1837. //if (bTilt)
  1838. //{
  1839. // if (!iSEM.SetTiltCorrectionOn())
  1840. // {
  1841. // return false;
  1842. // }
  1843. //}
  1844. //else
  1845. //{
  1846. // if (!iSEM.SetTiltCorrectionOff())
  1847. // {
  1848. // return false;
  1849. // }
  1850. //}
  1851. return true;
  1852. }
  1853. //拍图
  1854. public bool GetImage(ImageMode a_mode, String a_fileName)
  1855. {
  1856. //1. 图像解冻
  1857. float foldFrozen = iSEM.GetImageFrozen();
  1858. if (foldFrozen == float.NaN)
  1859. {
  1860. return false;
  1861. }
  1862. if (!iSEM.ImageLive())
  1863. {
  1864. return false;
  1865. }
  1866. //2. 确认图像模式
  1867. if (ImageMode.SEM == a_mode)
  1868. {
  1869. if (!iSEM.CmdFIBModeSEM())
  1870. {
  1871. return false;
  1872. }
  1873. }
  1874. else if (ImageMode.FIB == a_mode)
  1875. {
  1876. if (!iSEM.CmdFIBModeFIB())
  1877. {
  1878. return false;
  1879. }
  1880. }
  1881. else
  1882. {
  1883. return false;
  1884. }
  1885. //3. 获取分辨率
  1886. int[] ImageSize = iSEM.GetImageStore();
  1887. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1888. {
  1889. return false;
  1890. }
  1891. short width = (short)ImageSize[0];
  1892. short height = (short)ImageSize[1];
  1893. //4. 抓图
  1894. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1895. {
  1896. return false;
  1897. }
  1898. //5. 恢复初始状态
  1899. if (foldFrozen == 0)
  1900. {
  1901. if (!iSEM.ImageLive())
  1902. {
  1903. return false;
  1904. }
  1905. }
  1906. else if (foldFrozen == 1)
  1907. {
  1908. if (!iSEM.ImageFrozen())
  1909. {
  1910. return false;
  1911. }
  1912. }
  1913. return true;
  1914. }
  1915. //自动聚焦
  1916. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  1917. {
  1918. a_nWd = 0;
  1919. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1920. if (a_param == null)
  1921. {
  1922. return false;
  1923. }
  1924. string path = a_param.Path;
  1925. if (!Directory.Exists(path))
  1926. {
  1927. return false;
  1928. }
  1929. string path_coarse = a_param.Path + "\\Coarse";
  1930. if (!Directory.Exists(path_coarse))
  1931. {
  1932. Directory.CreateDirectory(path_coarse);
  1933. }
  1934. string path_fine = a_param.Path + "\\Fine";
  1935. if (!Directory.Exists(path_fine))
  1936. {
  1937. Directory.CreateDirectory(path_fine);
  1938. }
  1939. //1. 拍照
  1940. //1.1, 粗拍照
  1941. //1.1.1, 根据参数计算拍照次数
  1942. double nUp = a_param.UP * 100.0 ;
  1943. double nDown = a_param.Down * 100.0;
  1944. double nStep = a_param.Step * 100.0;
  1945. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  1946. SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  1947. //粗拍照
  1948. for (int i = 0; i < nTimes; i++)
  1949. {
  1950. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  1951. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  1952. Thread.Sleep(8000);
  1953. int swd = cWd / 100;
  1954. SendMsg("wd = " + swd.ToString() +"um");
  1955. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  1956. if (!GetImage(ImageMode.SEM, fileName))
  1957. {
  1958. return false;
  1959. }
  1960. }
  1961. //1.2, 选定细拍照的工作距离
  1962. int CorWd;
  1963. ChooseBest(path_coarse,out CorWd);
  1964. a_nWd = CorWd;
  1965. SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  1966. //1.3, 细拍照
  1967. if ( (CorWd - a_param.Range * 100.0) <=0)
  1968. {
  1969. return false;
  1970. }
  1971. double nfUp = CorWd - a_param.Range * 100.0;
  1972. double nfStep = a_param.fStep * 100.0;
  1973. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  1974. SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  1975. for (int i = 0; i < nfTimes; i++)
  1976. {
  1977. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  1978. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  1979. Thread.Sleep(8000);
  1980. int swd = cWd / 100;
  1981. SendMsg("wd = " + swd.ToString() + "um");
  1982. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  1983. if (!GetImage(ImageMode.SEM, fileName))
  1984. {
  1985. return false;
  1986. }
  1987. }
  1988. int fineWd;
  1989. ChooseBest(path_fine, out fineWd);
  1990. SendMsg("wd fine max = " + fineWd.ToString());
  1991. a_nWd = fineWd;
  1992. SendMsg("细选工作距离wd = " + a_nWd.ToString());
  1993. return true;
  1994. }
  1995. //LoG算子计算
  1996. private double LoGMean(string a_strImgPath)
  1997. {
  1998. //读入Img文件
  1999. if (!File.Exists(a_strImgPath))
  2000. {
  2001. return 0;
  2002. }
  2003. Mat src, gray_src;
  2004. int kernel_size = 3;
  2005. src = Cv2.ImRead(a_strImgPath);
  2006. gray_src = new Mat();
  2007. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2008. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2009. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2010. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2011. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  2012. Cv2.ConvertScaleAbs(src, src);
  2013. //图像的平均灰度
  2014. double meanValue = 0.0;
  2015. meanValue = Cv2.Mean(src)[0];
  2016. return meanValue;
  2017. }
  2018. //梯度计算
  2019. private double Tenengrad(string a_strImgPath)
  2020. {
  2021. //读入Img文件
  2022. if (!File.Exists(a_strImgPath))
  2023. {
  2024. return 0;
  2025. }
  2026. Mat src;
  2027. src = Cv2.ImRead(a_strImgPath);
  2028. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2029. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2030. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2031. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2032. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  2033. //图像的平均灰度
  2034. double meanValue = 0.0;
  2035. meanValue = Cv2.Mean(src)[0];
  2036. return meanValue;
  2037. }
  2038. //梯度计算
  2039. private double TTgrad(string a_strImgPath)
  2040. {
  2041. //读入Img文件
  2042. if (!File.Exists(a_strImgPath))
  2043. {
  2044. return 0;
  2045. }
  2046. Mat src;
  2047. src = Cv2.ImRead(a_strImgPath);
  2048. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2049. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2050. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2051. Mat scalex = new Mat();
  2052. Mat scaley = new Mat();
  2053. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  2054. Cv2.ConvertScaleAbs(src, scalex);
  2055. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  2056. Cv2.ConvertScaleAbs(src, scaley);
  2057. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  2058. //图像的平均灰度
  2059. double meanValue = 0.0;
  2060. meanValue = Cv2.Mean(src)[0];
  2061. return meanValue;
  2062. }
  2063. //三选二算法
  2064. private void ChooseBest(string a_strImgPath, out int a_nWd)
  2065. {
  2066. a_nWd = -1;
  2067. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  2068. float[] values = new float[files.Length];
  2069. double smax1 = LoGMean(files[0]);
  2070. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  2071. double smax2 = Tenengrad(files[0]);
  2072. int wdmax2 = wdmax1;
  2073. double smax3 = TTgrad(files[0]);
  2074. int wdmax3 = wdmax1;
  2075. int x = 0;
  2076. foreach (var file in files)
  2077. {
  2078. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  2079. double svalue1 = LoGMean(file);
  2080. double svalue2 = Tenengrad(file);
  2081. double svalue3 = TTgrad(file);
  2082. if (smax1 < svalue1)
  2083. {
  2084. smax1 = svalue1;
  2085. wdmax1 = wd;
  2086. }
  2087. if (smax2 < svalue2)
  2088. {
  2089. smax2 = svalue2;
  2090. wdmax2 = wd;
  2091. }
  2092. if (smax3 < svalue3)
  2093. {
  2094. smax3 = svalue3;
  2095. wdmax3 = wd;
  2096. }
  2097. x++;
  2098. }
  2099. SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  2100. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  2101. {
  2102. a_nWd = wdmax1;
  2103. SendMsg("焦距 = " + wdmax1.ToString());
  2104. }
  2105. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  2106. {
  2107. a_nWd = wdmax2;
  2108. SendMsg("焦距 = " + wdmax2.ToString());
  2109. }
  2110. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  2111. {
  2112. a_nWd = wdmax3;
  2113. SendMsg("焦距 = " + wdmax3.ToString());
  2114. }
  2115. else
  2116. {
  2117. SendMsg("对焦失败。");
  2118. }
  2119. }
  2120. }
  2121. }