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- //时间:20200610
- //作者:郝爽
- //功能:测量线程
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using System.Windows.Forms;
- using System.Threading;
- using System.IO;
- using SmartSEMControl;
- using MeasureData;
- using FileManager;
- using WebManager;
- using OpenCvSharp;
- namespace MeasureThread
- {
- //图片模式
- public enum ImageMode
- {
- FIB,
- SEM
- }
- public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
- public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
- public class ThreadStatusEventArgs
- {
- //状态
- public string State
- {
- get { return m_state; }
- set { m_state = value; }
- }
- private string m_state;
- //时间
- public DateTime Time
- {
- get { return m_time; }
- set { m_time = value; }
- }
- private DateTime m_time;
- //步骤代码
- public String Step_Code
- {
- get { return step_Code; }
- set { step_Code = value; }
- }
- private String step_Code;
- //其他消息
- public String Message
- {
- get { return this.message; }
- set { this.message = value; }
- }
- private String message;
- //孔名
- public String HoleName
- {
- get { return this.holeName; }
- set { this.holeName = value; }
- }
- private String holeName;
- //图片信息
- public class PictureInformation
- {
- public String Picture_FullPath
- {
- get { return picture_FullPath; }
- set { picture_FullPath = value; }
- }
- private String picture_FullPath;
- public double Work_Voltage
- {
- get { return work_Voltage; }
- set { work_Voltage = value; }
- }
- private double work_Voltage;
- public double Magnification
- {
- get { return magnification; }
- set { magnification = value; }
- }
- private double magnification;
- public double Work_Distance
- {
- get { return work_Distance; }
- set { work_Distance = value; }
- }
- private double work_Distance;
- public String Work_Status
- {
- get { return work_Status; }
- set { work_Status = value; }
- }
- private String work_Status;
- }
- //图片信息实例类
- public PictureInformation Picture_Information
- {
- get { return picture_Information; }
- set { picture_Information = value; }
- }
- private PictureInformation picture_Information;
- //图像信息
- public class ImageInformation
- {
- public int Method_Name
- {
- get { return method_Name; }
- set { method_Name = value; }
- }
- private int method_Name;
- public Source_Img_Degree_Direction SIDD;
- public Cut_Position CP;
- public Cut_Success CS;
- public Trapezoid_Top_Center_Position TTCP;
- public Auto_Foucs AF;
- public Auto_Stigmatic AS;
- public Center_Position_OffsetAngle_Direction CPOD;
- public Measure_Size MS;
- public ImageInformation()
- {
- SIDD = new Source_Img_Degree_Direction();
- CP = new Cut_Position();
- CS = new Cut_Success();
- TTCP = new Trapezoid_Top_Center_Position();
- AF = new Auto_Foucs();
- AS = new Auto_Stigmatic();
- CPOD = new Center_Position_OffsetAngle_Direction();
- MS = new Measure_Size();
- }
- //1-计算原始图像偏移角度及方向
- public class Source_Img_Degree_Direction
- {
- public Boolean Is_Image = false;
- public double Degree
- {
- get { return degree; }
- set { degree = value; }
- }
- private double degree;
- public int Direction
- {
- get { return direction; }
- set { direction = value; }
- }
- private int direction;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //2-计算切割点位置
- public class Cut_Position
- {
- public Boolean Is_Image = false;
- public double Offsetx
- {
- get { return offsetx; }
- set { offsetx = value; }
- }
- private double offsetx;
- public double Offsety
- {
- get { return offsety; }
- set { offsety = value; }
- }
- private double offsety;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //3-是否切割成功
- public class Cut_Success
- {
- public Boolean Is_Image = false;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //4-计算切割后图像梯形区域上边中心点坐标
- public class Trapezoid_Top_Center_Position
- {
- public Boolean Is_Image = false;
- public double TopCenterX
- {
- get { return topCenterX; }
- set { topCenterX = value; }
- }
- private double topCenterX;
- public double TopCenterY
- {
- get { return topCenterY; }
- set { topCenterY = value; }
- }
- private double topCenterY;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //5-自动对焦
- public class Auto_Foucs
- {
- public Boolean Is_Image = true;
- public String Img_Path
- {
- get { return img_Path; }
- set { img_Path = value; }
- }
- private String img_Path;
- }
- //6-自动像闪
- public class Auto_Stigmatic
- {
- public Boolean Is_Image = true;
- public String Img_Path
- {
- get { return img_Path; }
- set { img_Path = value; }
- }
- private String img_Path;
- }
- //7-计算切割面区域中心坐标,以及偏移角度及方向
- public class Center_Position_OffsetAngle_Direction
- {
- public Boolean Is_Image = false;
- public double CenterX
- {
- get { return centerX; }
- set { centerX = value; }
- }
- private double centerX;
- public double CenterY
- {
- get { return centerY; }
- set { centerY = value; }
- }
- private double centerY;
- public double Degree
- {
- get { return degree; }
- set { degree = value; }
- }
- private double degree;
- public int Direction
- {
- get { return direction; }
- set { direction = value; }
- }
- private int direction;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //8-测量尺寸
- public class Measure_Size
- {
- public Boolean Is_Image = false;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- }
- //图像信息实例类
- public ImageInformation Image_Information
- {
- get { return image_Information; }
- set { image_Information = value; }
- }
- private ImageInformation image_Information;
- public ThreadStatusEventArgs(string a_State)
- {
- picture_Information = new PictureInformation();
- image_Information = new ImageInformation();
- }
- }
- public class CutHolesStatusEventArgs
- {
- public string State
- {
- get { return m_state; }
- set { m_state = value; }
- }
- private string m_state;
- public string HoleName
- {
- get { return m_holeName; }
- set { m_holeName = value; }
- }
- private string m_holeName;
- public CutHolesStatusEventArgs(string a_state, string a_holeName)
- {
- this.m_state = a_state;
- this.m_holeName = a_holeName;
- }
- }
- public class Measure
- {
- /// <summary>
- /// 图像拉直算法
- /// </summary>
- /// <param name="Slope">倾斜角度</param>
- /// <param name="x0">圆心坐标x</param>
- /// <param name="y0">圆心坐标y</param>
- /// <param name="x1">倾斜情况下帧图的坐标x</param>
- /// <param name="y1">倾斜情况下帧图的坐标y</param>
- /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
- /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
- /// <returns></returns>
- public bool Straightening(double Slope, int x0, int y0, int x1, int y1, ref int Hx, ref int Hy)
- {
- try
- {
- double xr = x1 - x0;//倾斜图到中心的距离差x
- double yr = y1 - y0;//倾斜图到中心的距离差y
- double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
- //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
- double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
- double k_S = k - Slope;//通过夹角差求x2,y2
- int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
- int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
- if (Slope > 0 || Slope < 0)
- {
- Hx = x1 - x2;
- Hy = y1 - y2;
- }
- else
- {
- Hx = 0;
- Hy = 0;
- }
- return true;
- }
- catch (Exception)
- {
- return false;
- }
- }
- public WebResult wr = null;
- public event ThreadStatusHandler SendThreadStatus; // 声明事件
- public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
- //定义一个全局的消息类
- ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
- //全局只有一个fatorySEM
- static FactoryHardware factorySEM = FactoryHardware.Instance;
- ISEMControl iSEM = factorySEM.ISEM;
- //@的作用是不用转义字符\\只打一个就行
- const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
- const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
- const String ImageName3 = @"ImageFIB600X2.tif";
- const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
- const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
- const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
- const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
- const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
- const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
- const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
- const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
- const String ElyDeposition = @"Deposition.ely"; //沉积
- const String ElyCrossSection = @"CrossSection.ely"; //切割
- const float fMin = (float)0.0000002; //单位是米
- Boolean comm_state = false;
- int m_nWorkHoleNo = -1;
- //测量文件
- private MeasureFile m_measureFile;
- public MeasureFile MeasureFile
- {
- get { return this.m_measureFile; }
- set { this.m_measureFile = value; }
- }
- //测量的切割孔
- private List<MeasureData.CutHole> m_cutHoles;
- public List<MeasureData.CutHole> cutHoles
- {
- get { return this.m_cutHoles; }
- set { this.m_cutHoles = value; }
- }
- //工作文件夹
- private string m_WorkingFolder;
- public string WorkingFolder
- {
- get { return this.m_WorkingFolder; }
- set { this.m_WorkingFolder = value; }
- }
- //程序当前路径
- private string m_ProgramFolder = Directory.GetCurrentDirectory();
- //线程状态
- private ThreadStatus m_ThreadStatus;
- public ThreadStatus TStatus
- {
- get { return this.m_ThreadStatus; }
- set { this.m_ThreadStatus = value; }
- }
- //测量参数
- private MeasureParam m_MsParam;
- public MeasureParam MeasParam
- {
- get { return this.m_MsParam; }
- set { this.m_MsParam = value; }
- }
- //构造函数
- public Measure(String webServerIP, String webServerPort, String webServerUrl)
- {
- MeasParam = new MeasureParam();
- TStatus = new ThreadStatus();
- cutHoles = new List<MeasureData.CutHole>();
- //配置远程连接
- wr = new WebResult(webServerIP,webServerPort,webServerUrl);
- }
- //初始化测量业务, 读测量文件,判断是否有可测试的切孔
- public bool InitMeas(MeasureFile a_measureFile)
- {
- m_measureFile = a_measureFile;
- List<CutHole> listHoles = m_measureFile.ListCutHole;
- foreach (CutHole h in listHoles)
- {
- if (h.SWITCH == true)
- {
- m_cutHoles.Add(h);
- }
- }
- if (m_cutHoles.Count == 0)
- return false;
- this.m_MsParam = m_measureFile.MParam;
- return true;
- }
- public void SendMsg(string step_code)
- {
- arg.State = step_code;
- SendThreadStatus(this, arg);
- }
- public void SendMsg1(string step_code)
- {
- arg.Step_Code = step_code;
- arg.Time = DateTime.Now;
- switch(step_code)
- {
- //拍照
- case "1-5":
- case "1-7":
- case "1-16":
- case "1-24":
- //电压、放大倍数、工作距离、位置信息、图片路径
- arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
- arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
- arg.Picture_Information.Magnification = iSEM.GetMagnification();
- break;
- case "1-10":
- case "1-18":
- //获取偏移信息
- break;
- case "1-12":
- case "1-20":
- //验证移动准备性
- break;
- case "1-26":
- //取消电子束校正并初始化
- break;
- default:
- arg.State = "1";
- break;
- }
- SendThreadStatus(this, arg);
- }
- public void SendCutHoleMsg(string a_state, string a_holeName)
- {
- CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
- arg.HoleName = a_holeName;
- arg.State = a_state;
- SendCutHolesStatus(this, arg);
- }
- //测量流程
- public void DoMeasure()
- {
- //创建线程的测量状态的更新
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
- if (SendThreadStatus != null)
- {
- SendMsg("开始测量。");
- }
- //检查硬件连接是否正常
- if (!ConnectHardware())
- {
- SendMsg("连接硬件失败。");
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
- return;
- }
- SendMsg("硬件连接成功。");
- //设置工作文件夹
- if (!SetWorkingFolderStr())
- {
- SendMsg("设置工作文件夹失败");
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
- return;
- }
- SendMsg("创建工作文件路径为" + WorkingFolder);
- float[] firstPosition;
- for (int i = 0; i < m_cutHoles.Count; i++)
- {
- m_nWorkHoleNo = i;
- arg.HoleName = m_cutHoles[i].HoleName;
- //创建文件夹,孔名文件夹结构
- //判断孔状态
- if(m_cutHoles[i].STATE != State.Unmeasured)
- {
- continue;
- }
- if (i == 0)
- {
- SendMsg("第一个切孔开始测量");
- //切孔操作-开始
- SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
- firstPosition = iSEM.GetStagePosition();
- //第一个孔的测试
- FirstHole();
- //切孔操作-完成
- SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
- }
- else
- {
- //非第一个孔的测试
- SendMsg("第" + i.ToString() + "个切孔开始测量");
- //切孔操作-开始
- SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
- OtherHole();
- //切孔操作-完成
- SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
- }
- }
- }
- //检查硬件连接是否正常
- public bool ConnectHardware()
- {
- //返回硬件的连接状态
- return iSEM.ConnectStatus();
- }
- //设置工作文件夹
- public bool SetWorkingFolderStr()
- {
- WorkingFolder = m_measureFile.FilePath;
- return true;
- }
- //插入PT针
- public bool InsertPT()
- {
- string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
- //SendMsg("调用宏插入PT针宏文件" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(1000);
- return true;
- }
- //撤出PT针
- public bool RetractPT()
- {
- string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
- //SendMsg("调用宏撤出PT针宏文件" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(1000);
- return true;
- }
- //PT沉积
- public bool PTWork()
- {
- //执行PT沉积的ELY文件
- string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
- //SendMsg("执行PT沉积Ely文件:" + fn);
- if (!ExcuteEly(fn))
- {
- return false;
- }
- //等待沉积完成
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetFIBMode() == 0)
- {
- break;
- }
- }
- return true;
- }
- //FIB切割
- public bool FIBWork()
- {
- //执行PT沉积的ELY文件
- string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
- //SendMsg("执行FIB切割Ely文件:" + fn);
- if (!ExcuteEly(fn))
- {
- return false;
- }
- //等待切割完成
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetFIBMode() == 0)
- {
- break;
- }
- }
- return true;
- }
- //执行ELY文件的步骤
- public bool ExcuteEly(string a_filename)
- {
- //执行ELy文件有三个动作
- //1. 选择ELY文件
- //SendMsg("选择ELY文件");
- if (!iSEM.CmdFIBLoadELY(a_filename))
- {
- //SendMsg("选择ELY文件失败");
- return false;
- }
- Thread.Sleep(1000);
- //2. 确认ELY文件
- //SendMsg("确认ELY文件");
- if (!iSEM.CmdFIBEXPOSUREELY())
- {
- //SendMsg("确认ELY文件失败");
- return false;
- }
- Thread.Sleep(1000);
- //3. 执行ELY文件
- //SendMsg("执行ELY文件");
- if (!iSEM.CmdFIBSTARTELY())
- {
- //SendMsg("执行ELY文件失败");
- return false;
- }
- Thread.Sleep(1000);
- return true;
- }
- /// <summary>
- ///13. 自动 定位功能,沉积
- /// </summary>
- /// <returns></returns>
- public bool GetPoistion(Boolean isFirst)
- {
- float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
- int state = 0;
- //SendMsg("自动定位");
- //13.自动定位切割
- {
- //1.控制SEM放大600X
- arg.State = "SEM";
- if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
- {
- arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
- SendMsg("1-2");
- return false;
- }
- arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
- SendMsg("1-2");
- //2.控制SEM自动对焦、亮度、对比度
- if (m_measureFile.MParam.FocusMode==1)//手动
- {
- if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- arg.Message = "自动对焦完成";
- SendMsg("1-3");
- //return true;
- }
- else
- {
- arg.Message = "自动对焦失败";
- SendMsg("1-3");
- return false;
- }
- }
- else if (m_measureFile.MParam.FocusMode == 2)//自有自动
- {
- //郝工增加自动对焦算法
- //1、对焦参数类,2、输出工作距离
- //AutoFocus()
- //获取焦距,设置工作距离
- }
- else if(m_MsParam.FocusMode==3) //客户自动
- {
- //后期和客户对接接口
- List<string> filenames = new List<string>();
- String retfilename = wr.Img_Auto_Focus(filenames);
- }
- else //蔡司自动对焦
- {
- }
- //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
- if (!isFirst)
- {
- if (!TiltCorrection(54))
- {
- arg.Message = "设置SEM进行角度补偿54度失败";
- SendMsg("1-4");
- return false;
- }
- arg.Message = "设置SEM进行角度补偿54度成功";
- SendMsg("1-4");
- Thread.Sleep(5000);
- }
- //4.控制SEM拍照,5保存照片=====需要更改路径
- String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
- arg.Picture_Information.Picture_FullPath = fileName1;
- arg.Picture_Information.Work_Status = "SEM";
- if (!GetImage(ImageMode.SEM, fileName1))
- {
- arg.Message = "SEM拍照失败";
- SendMsg("1-5");
- return false;
- }
- arg.Message = "SEM拍照成功";
- SendMsg("1-5");
- Thread.Sleep(3000);
- //判断是否为仅拍照,不是则执行FIB操作
- if (!m_MsParam.Is_Photograph)
- {
- //6.设置FIB拍照参数——扫描时间、束流等
- //7.控制FIB自动亮度、对比度
- if (!iSEM.CmdFIBModeFIB())
- {
- arg.Message = "FIB模式切换失败";
- SendMsg("1-6");
- return false;
- }
- arg.Message = "FIB模式切换成功";
- SendMsg("1-6");
- Thread.Sleep(10000);
- //8.控制FIB拍照
- //9.保存照片======更改路径
- String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
- arg.Picture_Information.Picture_FullPath = fileName1;
- arg.Picture_Information.Work_Status = "FIB";
- if (!GetImage(ImageMode.FIB, fileName2))
- {
- arg.Message = "FIB拍照失败";
- SendMsg("1-7");
- return false;
- }
- arg.Message = "FIB拍照成功";
- SendMsg("1-7");
- Thread.Sleep(3000);
- //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
- if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
- {
- arg.Message = "样品台移动到指定位置";
- SendMsg("1-8");
- }
- else
- {
- wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
- if (state == 1)
- {
- //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
- if (!iSEM.MoveStageXY(x1, y1))
- {
- arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
- SendMsg("1-8");
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
- SendMsg("1-8");
- }
- else
- {
- arg.Message = "样品台移动失败";
- SendMsg("1-8");
- return false;
- }
- }
- //11.自动工具样品类型参数确定是否需要PT沉积
- if (m_MsParam.PT)
- {
- //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
- //第10步已经移动好位置
- //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
- x0 = iSEM.GetStageAtX();
- y0 = iSEM.GetStageAtY();
- if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
- {
- arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
- SendMsg("1-9");
- return false;
- }
- arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
- SendMsg("1-9");
- //3. 根据坐标进行PT沉积
- if (!PTWork())
- {
- arg.Message = "PT沉积失败";
- SendMsg("1-10");
- return false;
- }
- arg.Message = "PT沉积成功";
- SendMsg("1-10");
- }
- }
- //12.根据梯形坐标控制FIB调整到中心位置
- //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
- //以上两步已经将程序移动到11内部去做
- //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
- float[] firstPosition = iSEM.GetStagePosition();
- m_cutHoles[0].Position.X = firstPosition[0];
- m_cutHoles[0].Position.Y = firstPosition[1];
- m_cutHoles[0].Position.Z = firstPosition[2];
- m_cutHoles[0].Position.T = firstPosition[3];
- m_cutHoles[0].Position.R = firstPosition[4];
- m_cutHoles[0].Position.M = firstPosition[5];
- //这里要调用文件保存功能
- arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
- + firstPosition[1].ToString() + ","
- + firstPosition[2].ToString() + ","
- + firstPosition[3].ToString() + ","
- + firstPosition[4].ToString() + ","
- + firstPosition[5].ToString() + ")";
- SendMsg("1-11");
- }
- return true;
- }
- /// <summary>
- /// 14. FIB切割
- /// </summary>
- /// <returns></returns>
- public bool FIBCross()
- {
- //切之前拍照保存,,
- //14.自动控制FIB切割
- //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
- //2.控制FIB进行切割
- //以上1、2步全部用ELY文件代替
- if (!FIBWork())
- {
- arg.Message = "FIB切割失败";
- SendMsg("1-12");
- return false;
- }
- arg.Message = "FIB切割成功";
- SendMsg("1-12");
-
- Thread.Sleep(5000);
- //3.控制FIB拍照600X
- //底层没有控制方法。
- //4.保存图片
- String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
- arg.Picture_Information.Picture_FullPath = fileName3;
- arg.Picture_Information.Work_Status = "FIB";
- if (!GetImage(ImageMode.FIB, fileName3))
- {
- arg.Message = "FIB拍照失败";
- SendMsg("1-14");
- return false;
- }
- arg.Message = "FIB拍照成功";
- SendMsg("1-14");
- Thread.Sleep(3000);
- //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
- //和华为对接接口
- //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
- //拍完照自动解冻,这里不做处理。
- return true;
- }
- /// <summary>
- /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
- /// </summary>
- /// <returns></returns>
- public bool FindCross()
- {
- float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
- float angle = 0;
- int direction = 0;
- int state = 0;
- //切换到SEM模式
- if (!iSEM.CmdFIBModeSEM())
- {
- //SendMsg("SEM模式切换失败");
- return false;
- }
- arg.State = "SEM";
- Thread.Sleep(10000);
- //1.控制SEM放大到300倍
- arg.State = "SEM";
- if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/2))
- {
- arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 2).ToString("0.0") + "倍失败";
- SendMsg("1-18");
- return false;
- }
- arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/2).ToString("0.0") + "倍成功";
- SendMsg("1-18");
- //2.控制SEM自动对焦、亮度、对比度-接口,,将自动对焦提出单独函数调用
- //对焦前,先清理文件夹focus
- if (m_measureFile.MParam.FocusMode == 1)//手动
- {
- if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- arg.Message = "自动对焦完成";
- SendMsg("1-19");
- //return true;
- }
- else
- {
- arg.Message = "自动对焦失败";
- SendMsg("1-19");
- return false;
- }
- }
- else if (m_measureFile.MParam.FocusMode == 2)//自有自动
- {
- //郝工增加自动对焦算法
- }
- else //客户自动
- {
- //后期和客户对接接口
- List<string> filenames = new List<string>();
- String retfilename = wr.Img_Auto_Focus(filenames);
- }
- Thread.Sleep(5000);
- //3.控制SEM拍照
- String fileName4 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
- arg.Picture_Information.Picture_FullPath = fileName4;
- arg.Picture_Information.Work_Status = "SEM";
- if (!GetImage(ImageMode.SEM, fileName4))
- {
- arg.Message = "SEM拍照失败";
- SendMsg("1-20");
- return false;
- }
- arg.Message = "SEM拍照成功";
- SendMsg("1-20");
- Thread.Sleep(3000);
- //4.将照片传给客户,获取偏移坐标,以及偏移角度
- //5.根据坐标控制SEM移动到切孔位置,居中
- //这里是否用到拉直操作,我没有加
- if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
- {
- arg.Message = "样品台移动到指定位置";
- SendMsg("1-21");
- }
- else
- {
- wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
- if (state == 1)
- {
- //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
- if (!iSEM.MoveStageXY(x1, y1))
- {
- arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
- SendMsg("1-21");
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
- SendMsg("1-21");
- //拉直操作
- }
- else
- {
- arg.Message = "样品台移动失败";
- SendMsg("1-21");
- return false;
- }
- }
- if (!iSEM.SetScanRotation(angle))
- {
- arg.Message = "调整角度失败";
- SendMsg("1-22");
- return false;
- }
- arg.Message = "调整角度成功";
- SendMsg("1-22");
- ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
- //float x5 = iSEM.GetStageAtX();
- //float y5 = iSEM.GetStageAtY();
- //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
- //{
- // return false;
- //}
- return true;
- }
- /// <summary>
- /// 17.自动控制SEM拍截面照
- /// </summary>
- /// <returns></returns>
- public bool ShotSection()
- {
- float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
- int state = 0;
-
- //1、放大6000倍,放大倍数参数photograph_
- if (!iSEM.SetMagnification(6000))
- {
- arg.Message = "放大倍数调整失败";
- SendMsg("1-25");
- return false;
- }
- arg.Message = "放大倍数调整成功";
- SendMsg("1-25");
- //2.控制SEM自动对焦、亮度、对比度-接口
- if (m_measureFile.MParam.FocusMode == 1)//手动
- {
- if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- arg.Message = "自动对焦完成";
- SendMsg("1-26");
- //return true;
- }
- else
- {
- arg.Message = "自动对焦失败";
- SendMsg("1-26");
- return false;
- }
- }
- else if (m_measureFile.MParam.FocusMode == 2)//自有自动
- {
- //郝工增加自动对焦算法
- }
- else //客户自动
- {
- //后期和客户对接接口
- List<string> filenames = new List<string>();
- String retfilename = wr.Img_Auto_Focus(filenames);
- }
- //3、设置SEM补偿角度
- if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
- {
- arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
- SendMsg("1-27");
- return false;
- }
- arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
- SendMsg("1-27");
- Thread.Sleep(5000);
- //4、拍照,5、保存照片
- String fileName5 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
- arg.Picture_Information.Picture_FullPath = fileName5;
- arg.Picture_Information.Work_Status = "SEM";
- if (!GetImage(ImageMode.SEM, fileName5))
- {
- arg.Message = "SEM拍照失败";
- SendMsg("1-28");
- return false;
- }
- arg.Message = "SEM拍照成功";
- SendMsg("1-28");
- Thread.Sleep(3000);
- //6、获取偏移坐标,7、移动到位
- if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
- {
- arg.Message = "样品台移动到指定位置";
- SendMsg("1-29");
- }
- else
- {
- //8,图像T形
- // wr.Img_Cut_Position(fileName5, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
- //接口返回像素,*pixelsize,得到坐标点。判断移动方式
- if (state == 1)
- {
- //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
- if (!iSEM.MoveStageXY(x1, y1))
- {
- arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
- SendMsg("1-29");
- return false;
- }
- //判断是否移动完成
- while (true)
- {
- Thread.Sleep(5000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
- SendMsg("1-29");
- }
- else
- {
- arg.Message = "样品台移动失败";
- SendMsg("1-8");
- return false;
- }
- }
- //8、验证移动准确性
- //与之前验证相同
- //9、-10不操作
- //11、自动对焦。与之前操作相同
- //12拍照
- //14光束复位
- return true;
- }
- public bool CommonWork()
- {
- SendMsg("插入PT针");
- //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
- //if (firstHole.PT == true)
- {
- if (!InsertPT())
- {
- SendMsg("插入PT针失败");
- return false;
- }
- }
- //13. 自动 定位功能
- SendMsg("自动定位切割位置");
- if (!GetPoistion(false))
- {
- SendMsg("自动定位切割位置失败");
- return false;
- }
- //14.自动控制FIB切割
- SendMsg("FIB切割");
- if (!FIBCross())
- {
- SendMsg("FIB切割失败");
- return false;
- }
- //{
- // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
- // //2.控制FIB进行切割
- // //3.控制FIB拍照600X
- // //4.保存图片
- // {
- // //1.设置图片名称
- // //2.保存图片3
- // String fileName3 = WorkingFolder + ImageName3;
- // if (!GetImage(ImageMode.FIB, fileName3))
- // {
- // return false;
- // }
- // }
- // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
- // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
- //}
- //15.根据样品类型决定是否撤出PT针
- SendMsg("撤出PT针");
- //if (firstHole.PT == false)
- //{
- if (!RetractPT())
- {
- SendMsg("撤出PT针失败");
- return false;
- }
- //}
- // 16.找到切割位置
- SendMsg("找到切割位置");
- //17.自动控制SEM拍截面照
- SendMsg("观测层高");
- SendMsg("切换SEM控制");
- if (!iSEM.CmdFIBModeSEM())
- {
- SendMsg("SEM模式切换失败");
- return false;
- }
- Thread.Sleep(10000);
- SendMsg("放大6000倍");
- if (!iSEM.SetMagnification(6000))
- {
- SendMsg("放大倍数调整失败");
- return false;
- }
- if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- SendMsg("拍摄照片完成");
- //return true;
- }
- else
- {
- SendMsg("拍摄照片失败");
- return false;
- }
- SendMsg("图像校正36度");
- //3.设置SEM角度补偿cos36度
- if (!TiltCorrection(36))
- {
- return false;
- }
- Thread.Sleep(3000);
- string fn;
- //用宏抓一般图
- Thread.Sleep(5000);
- fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
- SendMsg("用宏抓一般图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(5000);
- //用宏抓好图
- fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
- SendMsg("用宏抓好图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(30000);
- Thread.Sleep(10000);
- WorkingFolder = m_measureFile.FilePath;
- String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
- SendMsg("SEM拍照存储到" + fileName6);
- if (!GetImage(ImageMode.SEM, fileName6))
- {
- SendMsg("SEM拍照失败");
- return false;
- }
- //用宏抓标志图
- fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
- SendMsg("用宏抓标志图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(30000);
- //恢复简单抓图
- Thread.Sleep(5000);
- fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
- SendMsg("用宏抓一般图" + fn);
- iSEM.CMDMCFFilename(fn);
- SendMsg("所有图结束");
- return true;
- }
- //第一个孔的测试过程
- public bool FirstHole()
- {
- MeasureData.CutHole firstHole = m_cutHoles[0];
-
- //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
- if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
- {
- if (!InsertPT())
- {
- arg.Message = "插入PT针失败";
- SendMsg("1-0");
- return false;
- }
- arg.Message = "插入PT针成功";
- SendMsg("1-0");
- }
- //13. 自动 定位功能
- if (!GetPoistion(true))
- {
- arg.Message = "自动定位切割位置失败";
- SendMsg("1-1");
- return false;
- }
- arg.Message = "自动定位切割位置成功";
- SendMsg("1-1");
- //14.自动控制FIB切割
- if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
- {
- if (!FIBCross())
- {
- arg.Message = "FIB切割失败";
- SendMsg("1-16");
- return false;
- }
- arg.Message = "FIB切割成功";
- SendMsg("1-16");
- }
- //15.根据样品类型决定是否撤出PT针
- if(m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
- {
- if (!RetractPT())
- {
- arg.Message = "撤出PT针失败";
- SendMsg("1-17");
- return false;
- }
- arg.Message = "撤出PT针成功";
- SendMsg("1-17");
- }
- // 16.找到切割位置
- if(m_MsParam.Is_Photograph == false)
- {
- if (!FindCross())
- {
- arg.Message = "找到切割位置失败";
- SendMsg("1-24");
- return false;
- }
- arg.Message = "找到切割位置成功";
- SendMsg("1-24");
- }
- //17.自动控制SEM拍截面照
- if(m_MsParam.Is_Photograph == false)
- {
- if (!ShotSection())
- {
- arg.Message = "自动控制SEM拍截面照失败";
- SendMsg("1-33");
- return false;
- }
- arg.Message = "自动控制SEM拍截面照成功";
- SendMsg("1-33");
- }
- //18.自动层高分析
- //将17图片传给华为
- //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
- //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
- //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
- //{
- // SendMsg("拍摄照片完成");
- // //return true;
- //}
- //else
- //{
- // SendMsg("拍摄照片失败");
- // return false;
- //}
- //SendMsg("图像校正36度");
- ////3.设置SEM角度补偿cos36度
- //if (!TiltCorrection(36))
- //{
- // return false;
- //}
- //Thread.Sleep(3000);
- string fn;
- //用宏抓一般图
- Thread.Sleep(5000);
- fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
- SendMsg("用宏抓一般图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(5000);
- //用宏抓好图
- fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
- SendMsg("用宏抓好图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(30000);
- Thread.Sleep(10000);
- WorkingFolder = m_measureFile.FilePath;
- String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
- SendMsg("SEM拍照存储到" + fileName6);
- if (!GetImage(ImageMode.SEM, fileName6))
- {
- SendMsg("SEM拍照失败");
- return false;
- }
- //用宏抓标志图
- fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
- SendMsg("用宏抓标志图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(30000);
- Thread.Sleep(5000);
- fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
- SendMsg("用宏抓一般图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(5000);
- SendMsg("所有图结束");
- ////17.自动控制SEM拍截面照
- //{
- // //1.控制SEM放大到指定参数大小范围,6000x
- // if (!iSEM.SetMagnification(6000))
- // {
- // return false;
- // }
- // //2.控制SEM自动对焦、消像散、亮度、对比度
- // if (!MeasParam.FocusMode)
- // {
- // //弹出手动对焦的窗口
- // }
- // else
- // {
- // //调用自动对焦模块
- // }
- // //3.设置SEM角度补偿cos36度
- // if (!TiltCorrection(36))
- // {
- // return false;
- // }
- // //4.控制SEM拍照
- // //5.保存照片4
- // String fileName5 = WorkingFolder + ImageName5;
- // if (!GetImage(ImageMode.SEM, fileName5))
- // {
- // return false;
- // }
- // //6.将照片传给客户,获取偏移坐标
- // float x6 = 0, y6 = 0;
- // float angle1 = 0;
- // float mage = 10000;
- // //7.根据坐标控制SEM移动到分析位置
- // if (!iSEM.MoveStageXY(x6, y6))
- // {
- // return false;
- // }
- // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
- // float x7 = iSEM.GetStageAtX();
- // float y7 = iSEM.GetStageAtY();
- // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
- // {
- // return false;
- // }
- // //9.控制SEM平行校正,并记录校正前初始值
- // float foldAnagle = iSEM.GetScanRotation();
- // if (foldAnagle == float.NaN)
- // {
- // return false;
- // }
- // if (!iSEM.SetScanRotation(angle1))
- // {
- // return false;
- // }
- // //10.控制SEM放大到指定参数大小范围
- // if (!iSEM.SetMagnification(mage))
- // {
- // return false;
- // }
- // //11.控制SEM自动对焦、消像散、亮度、对比度
- // if (!MeasParam.FocusMode)
- // {
- // //弹出手动对焦的窗口
- // }
- // else
- // {
- // //调用自动对焦模块
- // }
- // //12.控制SEM对分析位置拍照
- // String fileName6 = WorkingFolder + ImageName6;
- // if (!GetImage(ImageMode.SEM, fileName6))
- // {
- // return false;
- // }
- // //13.保存照片
- // //14.控制SEM取消电子束校正,回到初始值
- // if (!iSEM.SetScanRotation(foldAnagle))
- // {
- // return false;
- // }
- //}
- ////18.自动层高分析
- //{
- // //1.获取SEM Pixel Size给客户传入参数
- // if (iSEM.GetPixelSize() == float.NaN)
- // {
- // return false;
- // }
- // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
- //}
- ////19.自动能谱分析
- //{
- // //1. 确定能谱位置
- // //2. 控制牛津打能谱
- // //3. 能谱分析——面扫+线扫描
- //}
- return true;
- }
- //非第一个孔的测试过程
- public void OtherHole()
- {
- //for (int i = 1; i < m_cutHoles.Count; i++)
- //{
- SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
- CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
- //1. 初始化
- {
- //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
- //读取图像冻结状态
- float ffrozen = iSEM.GetImageFrozen();
- if (ffrozen == float.NaN)
- {
- return;
- }
- if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
- {
- SendMsg("样品台恢复到水平");
- //return true;
- }
- else
- {
- SendMsg("禁止样品台恢复到水平");
- return;
- }
- //2. 调节样品1号孔的样品台6轴坐标
- //3. 将样品1号孔坐标2存入数据库
- //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
- if (!iSEM.SetStageGotoT(0))
- {
- return;
- }
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //5. 获取光镜2号孔XY坐标
- SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
-
- //6. 根据光镜坐标控制样品台移动
- if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
- {
- SendMsg("移动失败");
- }
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //7. 控制样品台,调整T轴54度、M/Z/R轴不变
- if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
- {
- SendMsg("样品台旋转");
- //return true;
- }
- else
- {
- SendMsg("禁止样品台旋转");
- return;
- }
- if (!iSEM.SetStageGotoT(54))
- {
- return;
- }
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- }
- SendMsg("拉直操作");
- SendMsg("其他操作与1号孔操作一致");
- if (!CommonWork())
- {
- return;
- }
- //2. 定位切割
- {
- //1. 拉直操作
- {
- //1.1 控制SEM进行拍照
- //1.2 图片传给客户,返回偏移角度
- //1.3 根据返回角度,控制样品台转动
- }
- //2. 与1号孔13步相同
- }
- //3. 以后步骤与1号孔以后步骤一致
- //}
- }
- //角度补偿
- public bool TiltCorrection(float a_fAngle)
- {
- //记录原来电镜的状态
- // bool bTilt = false;
- //float fOldTilt = iSEM.GetTiltCorrection();
- //if (fOldTilt == float.NaN)
- //{
- // return false;
- //}
- //else if (fOldTilt == 1)
- //{
- // bTilt = true;
- //}
- //else if (fOldTilt == 0)
- //{
- // bTilt = false;
- //}
- //float fOldAngle = iSEM.GetTiltAngle();
- //if (fOldAngle == float.NaN)
- //{
- // return false;
- //}
- //开启校正
- SendMsg("开启校正");
- if (!iSEM.SetTiltAngleOn())
- {
- return false;
- }
- //设置校正角度
- //if (!iSEM.SetTiltAngle(fOldAngle))
- //{
- // return false;
- //}
- //恢复原始状态
- SendMsg("校正角度"+ a_fAngle.ToString());
- if (!iSEM.SetTiltAngle(a_fAngle))
- {
- return false;
- }
- //if (bTilt)
- //{
- // if (!iSEM.SetTiltCorrectionOn())
- // {
- // return false;
- // }
- //}
- //else
- //{
- // if (!iSEM.SetTiltCorrectionOff())
- // {
- // return false;
- // }
- //}
- return true;
- }
- //拍图
- public bool GetImage(ImageMode a_mode, String a_fileName)
- {
- //1. 图像解冻
- float foldFrozen = iSEM.GetImageFrozen();
- if (foldFrozen == float.NaN)
- {
- return false;
- }
- if (!iSEM.ImageLive())
- {
- return false;
- }
- //2. 确认图像模式
- if (ImageMode.SEM == a_mode)
- {
- if (!iSEM.CmdFIBModeSEM())
- {
- return false;
- }
- }
- else if (ImageMode.FIB == a_mode)
- {
- if (!iSEM.CmdFIBModeFIB())
- {
- return false;
- }
- }
- else
- {
- return false;
- }
- //3. 获取分辨率
- int[] ImageSize = iSEM.GetImageStore();
- if (ImageSize[0] == 0 || ImageSize[1] == 0)
- {
- return false;
- }
- short width = (short)ImageSize[0];
- short height = (short)ImageSize[1];
- //4. 抓图
- if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
- {
- return false;
- }
- //5. 恢复初始状态
- if (foldFrozen == 0)
- {
- if (!iSEM.ImageLive())
- {
- return false;
- }
- }
- else if (foldFrozen == 1)
- {
- if (!iSEM.ImageFrozen())
- {
- return false;
- }
- }
- return true;
- }
- //自动聚焦
- public bool AutoFocus(FocusParam a_param, out int a_nWd)
- {
- a_nWd = 0;
- a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
- if (a_param == null)
- {
- return false;
- }
- string path = a_param.Path;
- if (!Directory.Exists(path))
- {
- return false;
- }
- string path_coarse = a_param.Path + "\\Coarse";
- if (!Directory.Exists(path_coarse))
- {
- Directory.CreateDirectory(path_coarse);
- }
- string path_fine = a_param.Path + "\\Fine";
- if (!Directory.Exists(path_fine))
- {
- Directory.CreateDirectory(path_fine);
- }
- //1. 拍照
- //1.1, 粗拍照
- //1.1.1, 根据参数计算拍照次数
- double nUp = a_param.UP * 100.0 ;
- double nDown = a_param.Down * 100.0;
- double nStep = a_param.Step * 100.0;
- double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
- SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
- //粗拍照
- for (int i = 0; i < nTimes; i++)
- {
- int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
- iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
- Thread.Sleep(3000);
- int swd = cWd / 100;
- SendMsg("wd = " + swd.ToString() +"um");
- String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
- if (!GetImage(ImageMode.SEM, fileName))
- {
- return false;
- }
- Thread.Sleep(5000);
- }
- //1.2, 选定细拍照的工作距离
- int CorWd;
- ChooseBest(path_coarse,out CorWd);
- a_nWd = CorWd;
- SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
-
- //1.3, 细拍照
- if ( (CorWd - a_param.Range * 100.0) <=0)
- {
- return false;
- }
- double nfUp = CorWd - a_param.Range * 100.0;
- double nfStep = a_param.fStep * 100.0;
- double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
- SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
- for (int i = 0; i < nfTimes; i++)
- {
- int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
- iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
- Thread.Sleep(3000);
- int swd = cWd / 100;
- SendMsg("wd = " + swd.ToString() + "um");
- String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
- if (!GetImage(ImageMode.SEM, fileName))
- {
- return false;
- }
- Thread.Sleep(5000);
- }
- int fineWd;
- ChooseBest(path_coarse, out fineWd);
- SendMsg("wd fine max = " + fineWd.ToString());
- a_nWd = fineWd;
- SendMsg("细选工作距离wd = " + a_nWd.ToString());
- return true;
- }
- //LoG算子计算
- private double LoGMean(string a_strImgPath)
- {
- //读入Img文件
- if (!File.Exists(a_strImgPath))
- {
- return 0;
- }
- Mat src, gray_src;
- int kernel_size = 3;
- src = Cv2.ImRead(a_strImgPath);
- gray_src = new Mat();
- src.CvtColor(ColorConversionCodes.BGR2GRAY);
- Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
- Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
- Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
- Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
- Cv2.ConvertScaleAbs(src, src);
- //图像的平均灰度
- double meanValue = 0.0;
- meanValue = Cv2.Mean(src)[0];
- return meanValue;
- }
- //梯度计算
- private double Tenengrad(string a_strImgPath)
- {
- //读入Img文件
- if (!File.Exists(a_strImgPath))
- {
- return 0;
- }
- Mat src;
- src = Cv2.ImRead(a_strImgPath);
- src.CvtColor(ColorConversionCodes.BGR2GRAY);
- Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
- Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
- Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
- Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
- //图像的平均灰度
- double meanValue = 0.0;
- meanValue = Cv2.Mean(src)[0];
- return meanValue;
- }
- //梯度计算
- private double TTgrad(string a_strImgPath)
- {
- //读入Img文件
- if (!File.Exists(a_strImgPath))
- {
- return 0;
- }
- Mat src;
- src = Cv2.ImRead(a_strImgPath);
- src.CvtColor(ColorConversionCodes.BGR2GRAY);
- Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
- Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
- Mat scalex = new Mat();
- Mat scaley = new Mat();
- Cv2.Scharr(src, src, src.Depth(), 1, 0);
- Cv2.ConvertScaleAbs(src, scalex);
- Cv2.Scharr(src, src, src.Depth(), 0, 1);
- Cv2.ConvertScaleAbs(src, scaley);
- Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
- //图像的平均灰度
- double meanValue = 0.0;
- meanValue = Cv2.Mean(src)[0];
- return meanValue;
- }
- //三选二算法
- private void ChooseBest(string a_strImgPath, out int a_nWd)
- {
- a_nWd = -1;
- var files = Directory.GetFiles(a_strImgPath, "*.tif");
- float[] values = new float[files.Length];
- double smax1 = LoGMean(files[0]);
- int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
- double smax2 = Tenengrad(files[0]);
- int wdmax2 = wdmax1;
- double smax3 = TTgrad(files[0]);
- int wdmax3 = wdmax1;
- int x = 0;
- foreach (var file in files)
- {
- int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
- double svalue1 = LoGMean(file);
- double svalue2 = Tenengrad(file);
- double svalue3 = TTgrad(file);
- if (smax1 < svalue1)
- {
- smax1 = svalue1;
- wdmax1 = wd;
- }
- if (smax2 < svalue2)
- {
- smax2 = svalue2;
- wdmax2 = wd;
- }
- if (smax3 < svalue3)
- {
- smax3 = svalue3;
- wdmax3 = wd;
- }
- x++;
- }
- SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
- if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
- {
- a_nWd = wdmax1;
- SendMsg("焦距 = " + wdmax1.ToString());
- }
- else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
- {
- a_nWd = wdmax2;
- SendMsg("焦距 = " + wdmax2.ToString());
- }
- else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
- {
- a_nWd = wdmax3;
- SendMsg("焦距 = " + wdmax3.ToString());
- }
- else
- {
- SendMsg("对焦失败。");
- }
- }
- }
- }
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