Measure.cs 87 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. using WebManager;
  16. using OpenCvSharp;
  17. namespace MeasureThread
  18. {
  19. //图片模式
  20. public enum ImageMode
  21. {
  22. FIB,
  23. SEM
  24. }
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. public class ThreadStatusEventArgs
  28. {
  29. //状态
  30. public Boolean State
  31. {
  32. get { return m_state; }
  33. set { m_state = value; }
  34. }
  35. private Boolean m_state;
  36. //时间
  37. public DateTime Time
  38. {
  39. get { return m_time; }
  40. set { m_time = value; }
  41. }
  42. private DateTime m_time;
  43. //步骤代码
  44. public String Step_Code
  45. {
  46. get { return step_Code; }
  47. set { step_Code = value; }
  48. }
  49. private String step_Code;
  50. //其他消息
  51. public String Message
  52. {
  53. get { return this.message; }
  54. set { this.message = value; }
  55. }
  56. private String message;
  57. //孔名
  58. public String HoleName
  59. {
  60. get { return this.holeName; }
  61. set { this.holeName = value; }
  62. }
  63. private String holeName;
  64. //图片信息
  65. public class PictureInformation
  66. {
  67. public String Picture_FullPath
  68. {
  69. get { return picture_FullPath; }
  70. set { picture_FullPath = value; }
  71. }
  72. private String picture_FullPath;
  73. public double Work_Voltage
  74. {
  75. get { return work_Voltage; }
  76. set { work_Voltage = value; }
  77. }
  78. private double work_Voltage;
  79. public double Magnification
  80. {
  81. get { return magnification; }
  82. set { magnification = value; }
  83. }
  84. private double magnification;
  85. public double Work_Distance
  86. {
  87. get { return work_Distance; }
  88. set { work_Distance = value; }
  89. }
  90. private double work_Distance;
  91. public String Work_Status
  92. {
  93. get { return work_Status; }
  94. set { work_Status = value; }
  95. }
  96. private String work_Status;
  97. }
  98. //图片信息实例类
  99. public PictureInformation Picture_Information
  100. {
  101. get { return picture_Information; }
  102. set { picture_Information = value; }
  103. }
  104. private PictureInformation picture_Information;
  105. //图像信息
  106. public class ImageInformation
  107. {
  108. public int Method_Name
  109. {
  110. get { return method_Name; }
  111. set { method_Name = value; }
  112. }
  113. private int method_Name;
  114. public Source_Img_Degree_Direction SIDD;
  115. public Cut_Position CP;
  116. public Cut_Success CS;
  117. public Trapezoid_Top_Center_Position TTCP;
  118. public Auto_Foucs AF;
  119. public Auto_Stigmatic AS;
  120. public Center_Position_OffsetAngle_Direction CPOD;
  121. public Measure_Size MS;
  122. public ImageInformation()
  123. {
  124. SIDD = new Source_Img_Degree_Direction();
  125. CP = new Cut_Position();
  126. CS = new Cut_Success();
  127. TTCP = new Trapezoid_Top_Center_Position();
  128. AF = new Auto_Foucs();
  129. AS = new Auto_Stigmatic();
  130. CPOD = new Center_Position_OffsetAngle_Direction();
  131. MS = new Measure_Size();
  132. }
  133. //1-计算原始图像偏移角度及方向
  134. public class Source_Img_Degree_Direction
  135. {
  136. public Boolean Is_Image = false;
  137. public double Degree
  138. {
  139. get { return degree; }
  140. set { degree = value; }
  141. }
  142. private double degree;
  143. public int Direction
  144. {
  145. get { return direction; }
  146. set { direction = value; }
  147. }
  148. private int direction;
  149. public int State
  150. {
  151. get { return state; }
  152. set { state = value; }
  153. }
  154. private int state;
  155. }
  156. //2-计算切割点位置
  157. public class Cut_Position
  158. {
  159. public Boolean Is_Image = false;
  160. public double Offsetx
  161. {
  162. get { return offsetx; }
  163. set { offsetx = value; }
  164. }
  165. private double offsetx;
  166. public double Offsety
  167. {
  168. get { return offsety; }
  169. set { offsety = value; }
  170. }
  171. private double offsety;
  172. public int State
  173. {
  174. get { return state; }
  175. set { state = value; }
  176. }
  177. private int state;
  178. }
  179. //3-是否切割成功
  180. public class Cut_Success
  181. {
  182. public Boolean Is_Image = false;
  183. public int State
  184. {
  185. get { return state; }
  186. set { state = value; }
  187. }
  188. private int state;
  189. }
  190. //4-计算切割后图像梯形区域上边中心点坐标
  191. public class Trapezoid_Top_Center_Position
  192. {
  193. public Boolean Is_Image = false;
  194. public double TopCenterX
  195. {
  196. get { return topCenterX; }
  197. set { topCenterX = value; }
  198. }
  199. private double topCenterX;
  200. public double TopCenterY
  201. {
  202. get { return topCenterY; }
  203. set { topCenterY = value; }
  204. }
  205. private double topCenterY;
  206. public int State
  207. {
  208. get { return state; }
  209. set { state = value; }
  210. }
  211. private int state;
  212. }
  213. //5-自动对焦
  214. public class Auto_Foucs
  215. {
  216. public Boolean Is_Image = true;
  217. public String Img_Path
  218. {
  219. get { return img_Path; }
  220. set { img_Path = value; }
  221. }
  222. private String img_Path;
  223. }
  224. //6-自动像闪
  225. public class Auto_Stigmatic
  226. {
  227. public Boolean Is_Image = true;
  228. public String Img_Path
  229. {
  230. get { return img_Path; }
  231. set { img_Path = value; }
  232. }
  233. private String img_Path;
  234. }
  235. //7-计算切割面区域中心坐标,以及偏移角度及方向
  236. public class Center_Position_OffsetAngle_Direction
  237. {
  238. public Boolean Is_Image = false;
  239. public double CenterX
  240. {
  241. get { return centerX; }
  242. set { centerX = value; }
  243. }
  244. private double centerX;
  245. public double CenterY
  246. {
  247. get { return centerY; }
  248. set { centerY = value; }
  249. }
  250. private double centerY;
  251. public double Degree
  252. {
  253. get { return degree; }
  254. set { degree = value; }
  255. }
  256. private double degree;
  257. public int Direction
  258. {
  259. get { return direction; }
  260. set { direction = value; }
  261. }
  262. private int direction;
  263. public int State
  264. {
  265. get { return state; }
  266. set { state = value; }
  267. }
  268. private int state;
  269. }
  270. //8-测量尺寸
  271. public class Measure_Size
  272. {
  273. public Boolean Is_Image = false;
  274. public int State
  275. {
  276. get { return state; }
  277. set { state = value; }
  278. }
  279. private int state;
  280. }
  281. }
  282. //图像信息实例类
  283. public ImageInformation Image_Information
  284. {
  285. get { return image_Information; }
  286. set { image_Information = value; }
  287. }
  288. private ImageInformation image_Information;
  289. public ThreadStatusEventArgs(string a_State)
  290. {
  291. picture_Information = new PictureInformation();
  292. image_Information = new ImageInformation();
  293. }
  294. }
  295. public class CutHolesStatusEventArgs
  296. {
  297. public string State
  298. {
  299. get { return m_state; }
  300. set { m_state = value; }
  301. }
  302. private string m_state;
  303. public string HoleName
  304. {
  305. get { return m_holeName; }
  306. set { m_holeName = value; }
  307. }
  308. private string m_holeName;
  309. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  310. {
  311. this.m_state = a_state;
  312. this.m_holeName = a_holeName;
  313. }
  314. }
  315. public class Measure
  316. {
  317. /// <summary>
  318. /// 图像拉直算法
  319. /// </summary>
  320. /// <param name="Slope">倾斜角度</param>
  321. /// <param name="x0">圆心坐标x</param>
  322. /// <param name="y0">圆心坐标y</param>
  323. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  324. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  325. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  326. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  327. /// <returns></returns>
  328. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  329. {
  330. try
  331. {
  332. double xr = x1 - x0;//倾斜图到中心的距离差x
  333. double yr = y1 - y0;//倾斜图到中心的距离差y
  334. double R = Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  335. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  336. double k = Math.Atan(y1 / x1) / Math.PI * 180;//x1,y1的直角三角形圆心角度
  337. double k_S = k - Slope;//通过夹角差求x2,y2
  338. int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  339. int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  340. if (Slope > 0 || Slope < 0)
  341. {
  342. Hx = x1 - x2;
  343. Hy = y1 - y2;
  344. }
  345. else
  346. {
  347. Hx = 0;
  348. Hy = 0;
  349. }
  350. return true;
  351. }
  352. catch (Exception)
  353. {
  354. return false;
  355. }
  356. }
  357. //Web接口类
  358. public WebResult wr = null;
  359. //样品台保护值
  360. public float X_Min = 0;
  361. public float X_Max = 0.13f;
  362. public float Y_Min = 0;
  363. public float Y_Max = 0.13f;
  364. public float Z_Min = 0;
  365. public float Z_Max = 0.05f;
  366. public float T_Min = -4;
  367. public float T_Max = 70;
  368. public float R_Min = -380;
  369. public float R_Max = 380;
  370. public float M_Min = 0;
  371. public float M_Max = 0.012f;
  372. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  373. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  374. //定义一个全局的消息类
  375. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  376. //全局只有一个fatorySEM
  377. static FactoryHardware factorySEM = FactoryHardware.Instance;
  378. ISEMControl iSEM = factorySEM.ISEM;
  379. //@的作用是不用转义字符\\只打一个就行
  380. const String ImageName1 = @"ImageSEMH.tif"; //传给客户,作水平校正
  381. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  382. const String ImageName31 = @"ImageFIBBefore.tif";
  383. const String ImageName32 = @"ImageFIBAfter.tif";
  384. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  385. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  386. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  387. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  388. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  389. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  390. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  391. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  392. const String ElyDeposition = @"Deposition.ely"; //沉积
  393. const String ElyCrossSection = @"CrossSection.ely"; //切割
  394. const float fMin = (float)0.0000002; //单位是米
  395. public Boolean key_stop = false;
  396. String focus_path = "";
  397. String data_path = "";
  398. int m_nWorkHoleNo = -1;
  399. //测量文件
  400. private MeasureFile m_measureFile;
  401. public MeasureFile MeasureFile
  402. {
  403. get { return this.m_measureFile; }
  404. set { this.m_measureFile = value; }
  405. }
  406. //测量的切割孔
  407. private List<MeasureData.CutHole> m_cutHoles;
  408. public List<MeasureData.CutHole> cutHoles
  409. {
  410. get { return this.m_cutHoles; }
  411. set { this.m_cutHoles = value; }
  412. }
  413. //工作文件夹
  414. private string m_WorkingFolder;
  415. public string WorkingFolder
  416. {
  417. get { return this.m_WorkingFolder; }
  418. set { this.m_WorkingFolder = value; }
  419. }
  420. //程序当前路径
  421. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  422. //线程状态
  423. private ThreadStatus m_ThreadStatus;
  424. public ThreadStatus TStatus
  425. {
  426. get { return this.m_ThreadStatus; }
  427. set { this.m_ThreadStatus = value; }
  428. }
  429. //测量参数
  430. private MeasureParam m_MsParam;
  431. public MeasureParam MeasParam
  432. {
  433. get { return this.m_MsParam; }
  434. set { this.m_MsParam = value; }
  435. }
  436. //构造函数
  437. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  438. {
  439. MeasParam = new MeasureParam();
  440. TStatus = new ThreadStatus();
  441. cutHoles = new List<MeasureData.CutHole>();
  442. //配置远程连接
  443. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  444. }
  445. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  446. public bool InitMeas(MeasureFile a_measureFile)
  447. {
  448. m_measureFile = a_measureFile;
  449. List<CutHole> listHoles = m_measureFile.ListCutHole;
  450. foreach (CutHole h in listHoles)
  451. {
  452. if (h.SWITCH == true)
  453. {
  454. m_cutHoles.Add(h);
  455. }
  456. }
  457. if (m_cutHoles.Count == 0)
  458. return false;
  459. this.m_MsParam = m_measureFile.MParam;
  460. return true;
  461. }
  462. public void SendMsg(string step_code)
  463. {
  464. arg.Step_Code = step_code;
  465. arg.Time = DateTime.Now;
  466. SendThreadStatus(this, arg);
  467. }
  468. public void SendCutHoleMsg(string a_state, string a_holeName)
  469. {
  470. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  471. arg.HoleName = a_holeName;
  472. arg.State = a_state;
  473. SendCutHolesStatus(this, arg);
  474. }
  475. //测量流程
  476. public void DoMeasure()
  477. {
  478. //创建线程的测量状态的更新
  479. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  480. if (SendThreadStatus != null)
  481. {
  482. //SendMsg("开始测量。");
  483. }
  484. LogManager.AddHardwareLog("开始测量",true);
  485. //检查硬件连接是否正常
  486. if (!ConnectHardware())
  487. {
  488. //SendMsg("连接硬件失败。");
  489. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  490. return;
  491. }
  492. //SendMsg("硬件连接成功。");
  493. //设置工作文件夹
  494. if (!SetWorkingFolderStr())
  495. {
  496. //SendMsg("设置工作文件夹失败");
  497. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  498. return;
  499. }
  500. //SendMsg("创建工作文件路径为" + WorkingFolder);
  501. float[] firstPosition;
  502. //将停止键复位
  503. key_stop = false;
  504. for (int i = 0; i < m_cutHoles.Count; i++)
  505. {
  506. m_nWorkHoleNo = i;
  507. arg.HoleName = m_cutHoles[i].HoleName;
  508. //创建文件夹,孔名文件夹结构
  509. //最终数据存放目录
  510. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  511. //对焦数据存放目录
  512. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  513. m_MsParam.AutoFocus.Path = focus_path;
  514. if (!Directory.Exists(focus_path))
  515. {
  516. Directory.CreateDirectory(focus_path);
  517. }
  518. //判断孔状态
  519. if(m_cutHoles[i].STATE != State.Ready)
  520. {
  521. continue;
  522. }
  523. //开始循环工作
  524. if (i == 0)
  525. {
  526. m_cutHoles[i].START = DateTime.Now;
  527. //SendMsg("第一个切孔开始测量");
  528. //切孔操作-开始
  529. m_cutHoles[i].STATE = State.InProcess;
  530. //SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  531. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  532. firstPosition = iSEM.GetStagePosition();
  533. //第一个孔的测试
  534. //成功
  535. if(FirstHole())
  536. {
  537. //保存文件,将测量状态更改
  538. m_cutHoles[i].STATE = State.Success;
  539. m_cutHoles[i].END = DateTime.Now;
  540. m_measureFile.Save();
  541. }
  542. //失败
  543. else
  544. {
  545. m_cutHoles[i].STATE = State.Failed;
  546. m_cutHoles[i].END = DateTime.Now;
  547. m_measureFile.Save();
  548. }
  549. //切孔操作-完成
  550. //SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  551. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  552. }
  553. else
  554. {
  555. m_cutHoles[i].START = DateTime.Now;
  556. //非第一个孔的测试
  557. //SendMsg("第" + i.ToString() + "个切孔开始测量");
  558. //切孔操作-开始
  559. //SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  560. m_cutHoles[i].STATE = State.InProcess;
  561. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  562. //其他孔的测试
  563. //成功
  564. if (OtherHole())
  565. {
  566. //保存文件,将测量状态更改
  567. m_cutHoles[i].STATE = State.Success;
  568. m_cutHoles[i].END = DateTime.Now;
  569. m_measureFile.Save();
  570. }
  571. //失败
  572. else
  573. {
  574. m_cutHoles[i].STATE = State.Failed;
  575. m_cutHoles[i].END = DateTime.Now;
  576. m_measureFile.Save();
  577. }
  578. //切孔操作-完成
  579. //SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  580. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  581. }
  582. if(key_stop)
  583. {
  584. m_cutHoles[i].END = DateTime.Now;
  585. m_cutHoles[i].STATE = State.Ready;
  586. m_measureFile.Save();
  587. arg.Message = "用户停止测量";
  588. SendMsg("0-0");
  589. break;
  590. }
  591. }
  592. }
  593. //检查硬件连接是否正常
  594. public bool ConnectHardware()
  595. {
  596. //返回硬件的连接状态
  597. return iSEM.ConnectStatus();
  598. }
  599. //设置工作文件夹
  600. public bool SetWorkingFolderStr()
  601. {
  602. WorkingFolder = m_measureFile.FilePath;
  603. return true;
  604. }
  605. //插入PT针
  606. public bool InsertPT()
  607. {
  608. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  609. //SendMsg("调用宏插入PT针宏文件" + fn);
  610. iSEM.CMDMCFFilename(fn);
  611. //延时1s??
  612. Thread.Sleep(1000);
  613. return true;
  614. }
  615. //撤出PT针
  616. public bool RetractPT()
  617. {
  618. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  619. //SendMsg("调用宏撤出PT针宏文件" + fn);
  620. iSEM.CMDMCFFilename(fn);
  621. //延时1s??
  622. Thread.Sleep(1000);
  623. return true;
  624. }
  625. //PT沉积
  626. public bool PTWork()
  627. {
  628. //执行PT沉积的ELY文件
  629. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  630. //SendMsg("执行PT沉积Ely文件:" + fn);
  631. if (!ExcuteEly(fn))
  632. {
  633. return false;
  634. }
  635. //等待沉积完成
  636. while (true)
  637. {
  638. Thread.Sleep(10000);
  639. if (iSEM.GetFIBMode() == 0)
  640. {
  641. break;
  642. }
  643. }
  644. return true;
  645. }
  646. //FIB切割
  647. public bool FIBWork()
  648. {
  649. //执行PT沉积的ELY文件
  650. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  651. //SendMsg("执行FIB切割Ely文件:" + fn);
  652. if (!ExcuteEly(fn))
  653. {
  654. return false;
  655. }
  656. //等待切割完成
  657. while (true)
  658. {
  659. Thread.Sleep(10000);
  660. if (iSEM.GetFIBMode() == 0)
  661. {
  662. break;
  663. }
  664. }
  665. return true;
  666. }
  667. //执行ELY文件的步骤
  668. public bool ExcuteEly(string a_filename)
  669. {
  670. //执行ELy文件有三个动作
  671. //1. 选择ELY文件
  672. //SendMsg("选择ELY文件");
  673. if (!iSEM.CmdFIBLoadELY(a_filename))
  674. {
  675. //SendMsg("选择ELY文件失败");
  676. return false;
  677. }
  678. Thread.Sleep(1000);
  679. //2. 确认ELY文件
  680. //SendMsg("确认ELY文件");
  681. if (!iSEM.CmdFIBEXPOSUREELY())
  682. {
  683. //SendMsg("确认ELY文件失败");
  684. return false;
  685. }
  686. Thread.Sleep(1000);
  687. //3. 执行ELY文件
  688. //SendMsg("执行ELY文件");
  689. if (!iSEM.CmdFIBSTARTELY())
  690. {
  691. //SendMsg("执行ELY文件失败");
  692. return false;
  693. }
  694. Thread.Sleep(1000);
  695. return true;
  696. }
  697. //执行自动对焦
  698. public bool ImageFocus(String step_code)
  699. {
  700. if (m_measureFile.MParam.FocusMode == 1)//手动
  701. {
  702. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  703. {
  704. }
  705. else
  706. {
  707. return false;
  708. }
  709. }
  710. else if(m_measureFile.MParam.FocusMode == 2)//自有自动
  711. {
  712. //郝工增加自动对焦算法
  713. //处理文件夹
  714. if (Directory.Exists(focus_path))
  715. {
  716. Directory.Delete(focus_path, true);
  717. }
  718. Thread.Sleep(3000);
  719. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  720. Thread.Sleep(1000);
  721. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  722. Thread.Sleep(1000);
  723. //再创建文件夹
  724. Directory.CreateDirectory(focus_path);
  725. //1、对焦参数类,2、输出工作距离
  726. int wd = 0;
  727. AutoFocus(m_MsParam.AutoFocus, out wd, step_code);
  728. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  729. //设置工作距离
  730. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  731. //设置完工作距离后必须延迟5秒
  732. Thread.Sleep(5000);
  733. //处理图片位置
  734. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  735. }
  736. else if(m_MsParam.FocusMode == 3) //客户自动
  737. {
  738. //后期和客户对接接口
  739. List<string> filenames = new List<string>();
  740. String retfilename = wr.Img_Auto_Focus(filenames);
  741. }
  742. else //蔡司自动对焦
  743. {
  744. iSEM.CmdAutoFocusCoarse();
  745. while(true)
  746. {
  747. Thread.Sleep(10000);
  748. if(0 == iSEM.GetAutoFunction())
  749. {
  750. break;
  751. }
  752. }
  753. iSEM.CmdAutoFocusFine();
  754. while (true)
  755. {
  756. Thread.Sleep(10000);
  757. if (0 == iSEM.GetAutoFunction())
  758. {
  759. break;
  760. }
  761. }
  762. }
  763. return true;
  764. }
  765. /// <summary>
  766. ///13. 自动 定位功能,沉积
  767. /// </summary>
  768. /// <returns></returns>
  769. public bool GetPoistion(Boolean isFirst)
  770. {
  771. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  772. int state = 0;
  773. //切换到SEM模式
  774. if (!iSEM.CmdFIBModeSEM())
  775. {
  776. arg.Message = "SEM模式切换失败";
  777. arg.State = false;
  778. SendMsg("1-1");
  779. return false;
  780. }
  781. //1.控制SEM放大600X
  782. arg.Picture_Information.Work_Status = "SEM";
  783. if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage))
  784. {
  785. arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败";
  786. arg.State = false;
  787. SendMsg("1-1");
  788. return false;
  789. }
  790. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  791. {
  792. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  793. arg.State = false;
  794. SendMsg("1-1");
  795. return false;
  796. }
  797. arg.State = true;
  798. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  799. SendMsg("1-1");
  800. //判断是否停止进程
  801. if (key_stop)
  802. {
  803. return false;
  804. }
  805. //2.控制SEM自动对焦、亮度、对比度
  806. if(ImageFocus("1-2"))
  807. {
  808. arg.Message = "自动对焦完成";
  809. arg.State = true;
  810. SendMsg("1-2");
  811. }
  812. else
  813. {
  814. arg.Message = "自动对焦失败";
  815. arg.State = false;
  816. SendMsg("1-2");
  817. }
  818. //判断是否停止进程
  819. if (key_stop)
  820. {
  821. return false;
  822. }
  823. //3.第一次不需要进行角度补偿,其他需要设置SEM进行角度补偿54度
  824. if (!isFirst)
  825. {
  826. if (!TiltCorrection(54))
  827. {
  828. arg.Message = "设置SEM进行角度补偿54度失败";
  829. arg.State = false;
  830. SendMsg("1-3");
  831. return false;
  832. }
  833. Thread.Sleep(5000);
  834. arg.State = true;
  835. arg.Message = "设置SEM进行角度补偿54度成功";
  836. SendMsg("1-3");
  837. //判断是否停止进程
  838. if (key_stop)
  839. {
  840. return false;
  841. }
  842. }
  843. else
  844. {
  845. Thread.Sleep(2000);
  846. arg.State = true;
  847. arg.Message = "设置SEM进行角度补偿54度成功";
  848. SendMsg("1-3");
  849. }
  850. //4.控制SEM拍照,5保存照片=====需要更改路径
  851. String fileName1 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  852. arg.Picture_Information.Picture_FullPath = fileName1;
  853. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  854. Thread.Sleep(1000);
  855. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  856. Thread.Sleep(1000);
  857. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  858. Thread.Sleep(1000);
  859. if (!GetImage(ImageMode.SEM, fileName1))
  860. {
  861. arg.Message = "SEM拍照失败";
  862. arg.State = false;
  863. SendMsg("1-4");
  864. return false;
  865. }
  866. arg.State = true;
  867. arg.Message = "SEM拍照成功";
  868. SendMsg("1-4");
  869. Thread.Sleep(3000);
  870. //判断是否停止进程
  871. if (key_stop)
  872. {
  873. return false;
  874. }
  875. //判断是否为仅拍照,不是则执行FIB操作
  876. if (!m_MsParam.Is_Photograph)
  877. {
  878. //6.设置FIB拍照参数——扫描时间、束流等
  879. //7.控制FIB自动亮度、对比度
  880. if (!iSEM.CmdFIBModeFIB())
  881. {
  882. arg.Message = "FIB模式切换失败";
  883. arg.State = false;
  884. SendMsg("1-5");
  885. return false;
  886. }
  887. arg.State = true;
  888. arg.Picture_Information.Work_Status = "FIB";
  889. arg.Message = "FIB模式切换成功";
  890. SendMsg("1-5");
  891. Thread.Sleep(10000);
  892. //判断是否停止进程
  893. if (key_stop)
  894. {
  895. return false;
  896. }
  897. //8.控制FIB拍照
  898. //9.保存照片======更改路径
  899. String fileName2 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  900. arg.Picture_Information.Picture_FullPath = fileName2;
  901. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  902. Thread.Sleep(1000);
  903. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  904. Thread.Sleep(1000);
  905. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  906. Thread.Sleep(1000);
  907. if (!GetImage(ImageMode.FIB, fileName2))
  908. {
  909. arg.Message = "FIB拍照失败";
  910. arg.State = false;
  911. SendMsg("1-6");
  912. return false;
  913. }
  914. arg.State = true;
  915. arg.Message = "FIB拍照成功";
  916. SendMsg("1-6");
  917. Thread.Sleep(3000);
  918. //判断是否停止进程
  919. if (key_stop)
  920. {
  921. return false;
  922. }
  923. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  924. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  925. {
  926. arg.Message = "样品台移动到指定位置";
  927. arg.State = true;
  928. SendMsg("1-7");
  929. }
  930. else
  931. {
  932. wr.Img_Cut_Position(fileName2, m_MsParam.SampleName, m_MsParam.Firm, out x1, out y1, out x2, out y2, out state);
  933. if (state == 1)
  934. {
  935. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  936. if (!iSEM.MoveStageXY(x1, y1))
  937. {
  938. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  939. arg.State = false;
  940. SendMsg("1-7");
  941. return false;
  942. }
  943. //判断是否移动完成
  944. while (true)
  945. {
  946. Thread.Sleep(5000);
  947. if (iSEM.GetStageIs() == 0)
  948. {
  949. break;
  950. }
  951. }
  952. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  953. arg.State = true;
  954. SendMsg("1-7");
  955. }
  956. else
  957. {
  958. arg.Message = "样品台移动失败";
  959. arg.State = false;
  960. SendMsg("1-7");
  961. return false;
  962. }
  963. }
  964. //判断是否停止进程
  965. if (key_stop)
  966. {
  967. return false;
  968. }
  969. //11.自动工具样品类型参数确定是否需要PT沉积
  970. if (m_MsParam.PT)
  971. {
  972. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  973. //第10步已经移动好位置
  974. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  975. x0 = iSEM.GetStageAtX();
  976. y0 = iSEM.GetStageAtY();
  977. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  978. {
  979. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败";
  980. arg.State = false;
  981. SendMsg("1-8");
  982. return false;
  983. }
  984. arg.State = true;
  985. arg.Message = "目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动成功";
  986. SendMsg("1-8");
  987. //判断是否停止进程
  988. if (key_stop)
  989. {
  990. return false;
  991. }
  992. //3. 根据坐标进行PT沉积
  993. if (!PTWork())
  994. {
  995. arg.Message = "PT沉积失败";
  996. arg.State = false;
  997. SendMsg("1-9");
  998. return false;
  999. }
  1000. arg.State = true;
  1001. arg.Message = "PT沉积成功";
  1002. SendMsg("1-9");
  1003. //判断是否停止进程
  1004. if (key_stop)
  1005. {
  1006. return false;
  1007. }
  1008. }
  1009. }
  1010. //12.根据梯形坐标控制FIB调整到中心位置
  1011. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1012. //以上两步已经将程序移动到11内部去做
  1013. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1014. float[] firstPosition = iSEM.GetStagePosition();
  1015. m_cutHoles[0].Position.X = firstPosition[0];
  1016. m_cutHoles[0].Position.Y = firstPosition[1];
  1017. m_cutHoles[0].Position.Z = firstPosition[2];
  1018. m_cutHoles[0].Position.T = firstPosition[3];
  1019. m_cutHoles[0].Position.R = firstPosition[4];
  1020. m_cutHoles[0].Position.M = firstPosition[5];
  1021. //这里要调用文件保存功能
  1022. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1023. + firstPosition[1].ToString() + ","
  1024. + firstPosition[2].ToString() + ","
  1025. + firstPosition[3].ToString() + ","
  1026. + firstPosition[4].ToString() + ","
  1027. + firstPosition[5].ToString() + ")";
  1028. arg.State = true;
  1029. SendMsg("1-10");
  1030. //判断是否停止进程
  1031. if (key_stop)
  1032. {
  1033. return false;
  1034. }
  1035. return true;
  1036. }
  1037. /// <summary>
  1038. /// 14. FIB切割
  1039. /// </summary>
  1040. /// <returns></returns>
  1041. public bool FIBCross()
  1042. {
  1043. int state = 0;
  1044. //切之前拍照保存,,
  1045. String fileName31 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName31;
  1046. arg.Picture_Information.Picture_FullPath = fileName31;
  1047. arg.Picture_Information.Work_Status = "FIB";
  1048. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1049. Thread.Sleep(1000);
  1050. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1051. Thread.Sleep(1000);
  1052. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1053. Thread.Sleep(1000);
  1054. if (!GetImage(ImageMode.FIB, fileName31))
  1055. {
  1056. arg.Message = "FIB切割前拍照失败";
  1057. arg.State = false;
  1058. SendMsg("1-11");
  1059. return false;
  1060. }
  1061. arg.State = true;
  1062. arg.Message = "FIB切割前拍照成功";
  1063. SendMsg("1-11");
  1064. //判断是否停止进程
  1065. if (key_stop)
  1066. {
  1067. return false;
  1068. }
  1069. //14.自动控制FIB切割
  1070. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1071. //2.控制FIB进行切割
  1072. //以上1、2步全部用ELY文件代替
  1073. if (!FIBWork())
  1074. {
  1075. arg.Message = "FIB切割失败";
  1076. arg.State = false;
  1077. SendMsg("1-12");
  1078. return false;
  1079. }
  1080. arg.State = true;
  1081. arg.Message = "FIB切割成功";
  1082. SendMsg("1-12");
  1083. Thread.Sleep(5000);
  1084. //判断是否停止进程
  1085. if (key_stop)
  1086. {
  1087. return false;
  1088. }
  1089. //3.控制FIB拍照600X
  1090. //底层没有控制方法。
  1091. //4.保存图片
  1092. String fileName32 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName32;
  1093. arg.Picture_Information.Picture_FullPath = fileName32;
  1094. arg.Picture_Information.Work_Status = "FIB";
  1095. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1096. Thread.Sleep(1000);
  1097. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1098. Thread.Sleep(1000);
  1099. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1100. Thread.Sleep(1000);
  1101. if (!GetImage(ImageMode.FIB, fileName32))
  1102. {
  1103. arg.Message = "FIB切割后拍照失败";
  1104. arg.State = false;
  1105. SendMsg("1-13");
  1106. return false;
  1107. }
  1108. arg.State = true;
  1109. arg.Message = "FIB切割后拍照成功";
  1110. SendMsg("1-13");
  1111. Thread.Sleep(3000);
  1112. //判断是否停止进程
  1113. if (key_stop)
  1114. {
  1115. return false;
  1116. }
  1117. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1118. wr.Img_Cut_Success(fileName31, fileName32, out state);
  1119. if(state == 0)
  1120. {
  1121. arg.Message = "FIB切割校验失败";
  1122. arg.State = false;
  1123. SendMsg("1-14");
  1124. return false;
  1125. }
  1126. arg.State = true;
  1127. arg.Message = "FIB切割校验成功";
  1128. SendMsg("1-14");
  1129. //判断是否停止进程
  1130. if (key_stop)
  1131. {
  1132. return false;
  1133. }
  1134. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1135. //拍完照自动解冻,这里不做处理。
  1136. return true;
  1137. }
  1138. /// <summary>
  1139. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1140. /// </summary>
  1141. /// <returns></returns>
  1142. public bool FindCross()
  1143. {
  1144. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1145. float angle = 0;
  1146. int direction = 0;
  1147. int state = 0;
  1148. //切换到SEM模式
  1149. if (!iSEM.CmdFIBModeSEM())
  1150. {
  1151. arg.Message = "SEM模式切换失败";
  1152. arg.State = false;
  1153. SendMsg("1-16");
  1154. return false;
  1155. }
  1156. arg.State = true;
  1157. arg.Message = "SEM模式切换成功";
  1158. SendMsg("1-16");
  1159. arg.Picture_Information.Work_Status = "SEM";
  1160. Thread.Sleep(10000);
  1161. //判断是否停止进程
  1162. if (key_stop)
  1163. {
  1164. return false;
  1165. }
  1166. //1.控制SEM放大到300倍
  1167. if (!iSEM.SetSEMVoltage(m_MsParam.Location_Voltage))
  1168. {
  1169. arg.Message = "电压设置" + m_MsParam.Location_Voltage.ToString("0.0") + "失败";
  1170. arg.State = false;
  1171. SendMsg("1-17");
  1172. return false;
  1173. }
  1174. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification/2))
  1175. {
  1176. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification / 2).ToString("0.0") + "倍失败";
  1177. arg.State = false;
  1178. SendMsg("1-17");
  1179. return false;
  1180. }
  1181. arg.State = true;
  1182. arg.Message = "放大" + (m_measureFile.MParam.Location_Magnification/2).ToString("0.0") + "倍成功";
  1183. SendMsg("1-17");
  1184. //判断是否停止进程
  1185. if (key_stop)
  1186. {
  1187. return false;
  1188. }
  1189. //2.控制SEM自动对焦、亮度、对比度-接口,,将自动对焦提出单独函数调用
  1190. if (ImageFocus("1-18"))
  1191. {
  1192. arg.Message = "自动对焦完成";
  1193. arg.State = true;
  1194. SendMsg("1-18");
  1195. }
  1196. else
  1197. {
  1198. arg.Message = "自动对焦失败";
  1199. arg.State = false;
  1200. SendMsg("1-18");
  1201. }
  1202. Thread.Sleep(5000);
  1203. //判断是否停止进程
  1204. if (key_stop)
  1205. {
  1206. return false;
  1207. }
  1208. //3.控制SEM拍照
  1209. String fileName4 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName4;
  1210. arg.Picture_Information.Picture_FullPath = fileName4;
  1211. arg.Picture_Information.Work_Status = "SEM";
  1212. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1213. Thread.Sleep(1000);
  1214. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1215. Thread.Sleep(1000);
  1216. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1217. Thread.Sleep(1000);
  1218. if (!GetImage(ImageMode.SEM, fileName4))
  1219. {
  1220. arg.State = false;
  1221. arg.Message = "SEM拍照失败";
  1222. SendMsg("1-19");
  1223. return false;
  1224. }
  1225. arg.State = true;
  1226. arg.Message = "SEM拍照成功";
  1227. SendMsg("1-19");
  1228. Thread.Sleep(3000);
  1229. //判断是否停止进程
  1230. if (key_stop)
  1231. {
  1232. return false;
  1233. }
  1234. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1235. //5.根据坐标控制SEM移动到切孔位置,居中
  1236. //这里是否用到拉直操作,我没有加
  1237. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1238. {
  1239. arg.State = true;
  1240. arg.Message = "样品台移动到指定位置";
  1241. SendMsg("1-20");
  1242. }
  1243. else
  1244. {
  1245. wr.Img_Center_Position_OffsetAngle_Direction(fileName4, m_MsParam.SampleName,
  1246. m_MsParam.Firm, out x1, out y1, out angle, out direction, out state);
  1247. if (state == 1)
  1248. {
  1249. //拉直操作
  1250. iSEM.SetScanRotationOn();
  1251. Thread.Sleep(1000);
  1252. iSEM.SetScanRotation(angle);
  1253. Thread.Sleep(5000);
  1254. //Straightening(angle, 65, 65, x1, y1, ref x2, ref y2);
  1255. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1256. if (!iSEM.MoveStageXY(x2, y2))
  1257. {
  1258. arg.State = false;
  1259. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1260. SendMsg("1-20");
  1261. return false;
  1262. }
  1263. //判断是否移动完成
  1264. while (true)
  1265. {
  1266. Thread.Sleep(5000);
  1267. if (iSEM.GetStageIs() == 0)
  1268. {
  1269. break;
  1270. }
  1271. }
  1272. arg.State = true;
  1273. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1274. SendMsg("1-20");
  1275. }
  1276. else
  1277. {
  1278. arg.Message = "样品台移动失败";
  1279. arg.State = false;
  1280. SendMsg("1-20");
  1281. return false;
  1282. }
  1283. }
  1284. //判断是否停止进程
  1285. if (key_stop)
  1286. {
  1287. return false;
  1288. }
  1289. //6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1290. x0 = iSEM.GetStageAtX();
  1291. y0 = iSEM.GetStageAtY();
  1292. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1293. {
  1294. arg.Message = "位置校验失败";
  1295. arg.State = false;
  1296. SendMsg("1-21");
  1297. return false;
  1298. }
  1299. arg.State = true;
  1300. arg.Message = "位置校验成功";
  1301. SendMsg("1-21");
  1302. //判断是否停止进程
  1303. if (key_stop)
  1304. {
  1305. return false;
  1306. }
  1307. return true;
  1308. }
  1309. /// <summary>
  1310. /// 17.自动控制SEM拍截面照
  1311. /// </summary>
  1312. /// <returns></returns>
  1313. public bool ShotSection(ref String image18)
  1314. {
  1315. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0;
  1316. int state = 0;
  1317. //1、放大6000倍,放大倍数参数photograph_
  1318. if (!iSEM.SetSEMVoltage(m_MsParam.Photograph_Voltage))
  1319. {
  1320. arg.Message = "电压设置" + m_MsParam.Photograph_Voltage.ToString("0.0") + "失败";
  1321. arg.State = false;
  1322. SendMsg("1-22");
  1323. return false;
  1324. }
  1325. if (!iSEM.SetMagnification(m_MsParam.Photograph_Magnification))
  1326. {
  1327. arg.Message = "放大倍数调整失败";
  1328. arg.State = false;
  1329. SendMsg("1-22");
  1330. return false;
  1331. }
  1332. arg.Message = "放大倍数调整成功";
  1333. arg.State = true;
  1334. SendMsg("1-22");
  1335. //判断是否停止进程
  1336. if (key_stop)
  1337. {
  1338. return false;
  1339. }
  1340. //2.控制SEM自动对焦、亮度、对比度-接口
  1341. if (ImageFocus("1-23"))
  1342. {
  1343. arg.Message = "自动对焦完成";
  1344. arg.State = true;
  1345. SendMsg("1-23");
  1346. }
  1347. else
  1348. {
  1349. arg.Message = "自动对焦失败";
  1350. arg.State = false;
  1351. SendMsg("1-23");
  1352. }
  1353. //判断是否停止进程
  1354. if (key_stop)
  1355. {
  1356. return false;
  1357. }
  1358. //3、设置SEM补偿角度
  1359. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1360. {
  1361. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1362. arg.State = false;
  1363. SendMsg("1-24");
  1364. return false;
  1365. }
  1366. arg.State = true;
  1367. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1368. SendMsg("1-24");
  1369. Thread.Sleep(5000);
  1370. //判断是否停止进程
  1371. if (key_stop)
  1372. {
  1373. return false;
  1374. }
  1375. //4、拍照,5、保存照片
  1376. String fileName5 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName5;
  1377. arg.Picture_Information.Picture_FullPath = fileName5;
  1378. arg.Picture_Information.Work_Status = "SEM";
  1379. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1380. Thread.Sleep(1000);
  1381. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1382. Thread.Sleep(1000);
  1383. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1384. Thread.Sleep(1000);
  1385. if (!GetImage(ImageMode.SEM, fileName5))
  1386. {
  1387. arg.Message = "SEM拍照失败";
  1388. arg.State = false;
  1389. SendMsg("1-25");
  1390. return false;
  1391. }
  1392. arg.State = true;
  1393. arg.Message = "SEM拍照成功";
  1394. SendMsg("1-25");
  1395. Thread.Sleep(3000);
  1396. //判断是否停止进程
  1397. if (key_stop)
  1398. {
  1399. return false;
  1400. }
  1401. //6、获取偏移坐标,7、移动到位
  1402. if (DialogResult.Yes == MessageBox.Show("是否手动移动样品台到指定位置?\n如果点击取消则会调用Web接口。", "确认消息", MessageBoxButtons.YesNo))
  1403. {
  1404. arg.Message = "样品台移动到指定位置";
  1405. arg.State = true;
  1406. SendMsg("1-26");
  1407. }
  1408. else
  1409. {
  1410. //8,图像T形
  1411. wr.Img_Trapezoid_Top_Center_Position(fileName5, out x1, out y1, out state);
  1412. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1413. if (state == 1)
  1414. {
  1415. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1416. if (!iSEM.MoveStageXY(x1, y1))
  1417. {
  1418. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1419. arg.State = false;
  1420. SendMsg("1-26");
  1421. return false;
  1422. }
  1423. //判断是否移动完成
  1424. while (true)
  1425. {
  1426. Thread.Sleep(5000);
  1427. if (iSEM.GetStageIs() == 0)
  1428. {
  1429. break;
  1430. }
  1431. }
  1432. arg.State = true;
  1433. arg.Message = "移动到新(" + x1.ToString() + "," + y1.ToString() + ")位置失败";
  1434. SendMsg("1-26");
  1435. }
  1436. else
  1437. {
  1438. arg.Message = "样品台移动失败";
  1439. arg.State = false;
  1440. SendMsg("1-26");
  1441. return false;
  1442. }
  1443. }
  1444. //判断是否停止进程
  1445. if (key_stop)
  1446. {
  1447. return false;
  1448. }
  1449. //8、验证移动准确性
  1450. x0 = iSEM.GetStageAtX();
  1451. y0 = iSEM.GetStageAtY();
  1452. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  1453. {
  1454. arg.Message = "位置校验失败";
  1455. arg.State = false;
  1456. SendMsg("1-27");
  1457. return false;
  1458. }
  1459. arg.State = true;
  1460. arg.Message = "位置校验成功";
  1461. SendMsg("1-27");
  1462. //判断是否停止进程
  1463. if (key_stop)
  1464. {
  1465. return false;
  1466. }
  1467. //9、-10不操作
  1468. //11、自动对焦。与之前操作相同
  1469. if (ImageFocus("1-28"))
  1470. {
  1471. arg.Message = "自动对焦完成";
  1472. arg.State = true;
  1473. SendMsg("1-28");
  1474. }
  1475. else
  1476. {
  1477. arg.Message = "自动对焦失败";
  1478. arg.State = false;
  1479. SendMsg("1-28");
  1480. }
  1481. //判断是否停止进程
  1482. if (key_stop)
  1483. {
  1484. return false;
  1485. }
  1486. Thread.Sleep(2000);
  1487. //12拍照
  1488. String fileName6 = data_path + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1489. arg.Picture_Information.Picture_FullPath = fileName6;
  1490. arg.Picture_Information.Work_Status = "SEM";
  1491. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1492. Thread.Sleep(1000);
  1493. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1494. Thread.Sleep(1000);
  1495. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1496. Thread.Sleep(1000);
  1497. if (!GetImage(ImageMode.SEM, fileName6))
  1498. {
  1499. arg.Message = "SEM拍照失败";
  1500. arg.State = false;
  1501. SendMsg("1-29");
  1502. return false;
  1503. }
  1504. arg.State = true;
  1505. image18 = fileName6;
  1506. arg.Message = "SEM拍照成功";
  1507. SendMsg("1-29");
  1508. Thread.Sleep(3000);
  1509. //判断是否停止进程
  1510. if (key_stop)
  1511. {
  1512. return false;
  1513. }
  1514. //14光束复位和Rotation关闭开关
  1515. iSEM.SetScanRotationOff();
  1516. Thread.Sleep(1000);
  1517. iSEM.SetBeamShiftX(0);
  1518. Thread.Sleep(1000);
  1519. iSEM.SetBeamShiftY(0);
  1520. Thread.Sleep(3000);
  1521. arg.Message = "光束复位成功";
  1522. arg.State = true;
  1523. SendMsg("1-30");
  1524. //判断是否停止进程
  1525. if (key_stop)
  1526. {
  1527. return false;
  1528. }
  1529. return true;
  1530. }
  1531. //第一个孔的测试过程
  1532. public bool FirstHole()
  1533. {
  1534. MeasureData.CutHole firstHole = m_cutHoles[0];
  1535. //首先默认为SEM模式
  1536. arg.Picture_Information.Work_Status = "SEM";
  1537. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1538. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1539. {
  1540. if (!InsertPT())
  1541. {
  1542. arg.Message = "插入PT针失败";
  1543. arg.State = false;
  1544. SendMsg("1-0");
  1545. return false;
  1546. }
  1547. arg.State = true;
  1548. arg.Message = "插入PT针成功";
  1549. SendMsg("1-0");
  1550. }
  1551. //判断是否停止进程
  1552. if (key_stop)
  1553. {
  1554. return false;
  1555. }
  1556. //13. 自动 定位功能
  1557. if (!GetPoistion(true))
  1558. {
  1559. return false;
  1560. }
  1561. //判断是否停止进程
  1562. if (key_stop)
  1563. {
  1564. return false;
  1565. }
  1566. //14.自动控制FIB切割
  1567. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1568. {
  1569. if (!FIBCross())
  1570. {
  1571. return false;
  1572. }
  1573. }
  1574. //判断是否停止进程
  1575. if (key_stop)
  1576. {
  1577. return false;
  1578. }
  1579. //15.根据样品类型决定是否撤出PT针
  1580. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1581. {
  1582. if (!RetractPT())
  1583. {
  1584. arg.Message = "撤出PT针失败";
  1585. arg.State = false;
  1586. SendMsg("1-15");
  1587. return false;
  1588. }
  1589. arg.State = true;
  1590. arg.Message = "撤出PT针成功";
  1591. SendMsg("1-15");
  1592. }
  1593. //判断是否停止进程
  1594. if (key_stop)
  1595. {
  1596. return false;
  1597. }
  1598. // 16.找到切割位置
  1599. if (m_MsParam.Is_Photograph == false)
  1600. {
  1601. if (!FindCross())
  1602. {
  1603. return false;
  1604. }
  1605. //判断是否停止进程
  1606. if (key_stop)
  1607. {
  1608. return false;
  1609. }
  1610. }
  1611. //将过程17最后的拍照图片提出给18步进行调用
  1612. String img18 = "";
  1613. //17.自动控制SEM拍截面照
  1614. if (!ShotSection(ref img18))
  1615. {
  1616. return false;
  1617. }
  1618. //判断是否停止进程
  1619. if (key_stop)
  1620. {
  1621. return false;
  1622. }
  1623. //18.自动层高分析
  1624. if (m_MsParam.Is_Photograph == false)
  1625. {
  1626. float size = iSEM.GetPixelSize();
  1627. float mag = iSEM.GetMagnification();
  1628. int state = 0;
  1629. wr.Img_Measure_Size(img18, mag, size, out state);
  1630. if (state == 0)
  1631. {
  1632. arg.Message = "测量尺寸失败";
  1633. arg.State = false;
  1634. SendMsg("1-31");
  1635. return false;
  1636. }
  1637. arg.State = true;
  1638. arg.Message = "测量尺寸成功";
  1639. SendMsg("1-31");
  1640. }
  1641. #region 测试程序
  1642. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  1643. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  1644. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1645. //{
  1646. // SendMsg("拍摄照片完成");
  1647. // //return true;
  1648. //}
  1649. //else
  1650. //{
  1651. // SendMsg("拍摄照片失败");
  1652. // return false;
  1653. //}
  1654. //SendMsg("图像校正36度");
  1655. ////3.设置SEM角度补偿cos36度
  1656. //if (!TiltCorrection(36))
  1657. //{
  1658. // return false;
  1659. //}
  1660. //Thread.Sleep(3000);
  1661. //string fn;
  1662. //用宏抓一般图
  1663. //Thread.Sleep(5000);
  1664. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1665. //SendMsg("用宏抓一般图" + fn);
  1666. //iSEM.CMDMCFFilename(fn);
  1667. ////延时1s??
  1668. //Thread.Sleep(5000);
  1669. ////用宏抓好图
  1670. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1671. //SendMsg("用宏抓好图" + fn);
  1672. //iSEM.CMDMCFFilename(fn);
  1673. ////延时1s??
  1674. //Thread.Sleep(30000);
  1675. //Thread.Sleep(10000);
  1676. //WorkingFolder = m_measureFile.FilePath;
  1677. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1678. //SendMsg("SEM拍照存储到" + fileName6);
  1679. //if (!GetImage(ImageMode.SEM, fileName6))
  1680. //{
  1681. // SendMsg("SEM拍照失败");
  1682. // return false;
  1683. //}
  1684. ////用宏抓标志图
  1685. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1686. //SendMsg("用宏抓标志图" + fn);
  1687. //iSEM.CMDMCFFilename(fn);
  1688. ////延时1s??
  1689. //Thread.Sleep(30000);
  1690. //Thread.Sleep(5000);
  1691. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1692. //SendMsg("用宏抓一般图" + fn);
  1693. //iSEM.CMDMCFFilename(fn);
  1694. ////延时1s??
  1695. //Thread.Sleep(5000);
  1696. //SendMsg("所有图结束");
  1697. ////17.自动控制SEM拍截面照
  1698. //{
  1699. // //1.控制SEM放大到指定参数大小范围,6000x
  1700. // if (!iSEM.SetMagnification(6000))
  1701. // {
  1702. // return false;
  1703. // }
  1704. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1705. // if (!MeasParam.FocusMode)
  1706. // {
  1707. // //弹出手动对焦的窗口
  1708. // }
  1709. // else
  1710. // {
  1711. // //调用自动对焦模块
  1712. // }
  1713. // //3.设置SEM角度补偿cos36度
  1714. // if (!TiltCorrection(36))
  1715. // {
  1716. // return false;
  1717. // }
  1718. // //4.控制SEM拍照
  1719. // //5.保存照片4
  1720. // String fileName5 = WorkingFolder + ImageName5;
  1721. // if (!GetImage(ImageMode.SEM, fileName5))
  1722. // {
  1723. // return false;
  1724. // }
  1725. // //6.将照片传给客户,获取偏移坐标
  1726. // float x6 = 0, y6 = 0;
  1727. // float angle1 = 0;
  1728. // float mage = 10000;
  1729. // //7.根据坐标控制SEM移动到分析位置
  1730. // if (!iSEM.MoveStageXY(x6, y6))
  1731. // {
  1732. // return false;
  1733. // }
  1734. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1735. // float x7 = iSEM.GetStageAtX();
  1736. // float y7 = iSEM.GetStageAtY();
  1737. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1738. // {
  1739. // return false;
  1740. // }
  1741. // //9.控制SEM平行校正,并记录校正前初始值
  1742. // float foldAnagle = iSEM.GetScanRotation();
  1743. // if (foldAnagle == float.NaN)
  1744. // {
  1745. // return false;
  1746. // }
  1747. // if (!iSEM.SetScanRotation(angle1))
  1748. // {
  1749. // return false;
  1750. // }
  1751. // //10.控制SEM放大到指定参数大小范围
  1752. // if (!iSEM.SetMagnification(mage))
  1753. // {
  1754. // return false;
  1755. // }
  1756. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1757. // if (!MeasParam.FocusMode)
  1758. // {
  1759. // //弹出手动对焦的窗口
  1760. // }
  1761. // else
  1762. // {
  1763. // //调用自动对焦模块
  1764. // }
  1765. // //12.控制SEM对分析位置拍照
  1766. // String fileName6 = WorkingFolder + ImageName6;
  1767. // if (!GetImage(ImageMode.SEM, fileName6))
  1768. // {
  1769. // return false;
  1770. // }
  1771. // //13.保存照片
  1772. // //14.控制SEM取消电子束校正,回到初始值
  1773. // if (!iSEM.SetScanRotation(foldAnagle))
  1774. // {
  1775. // return false;
  1776. // }
  1777. //}
  1778. ////18.自动层高分析
  1779. //{
  1780. // //1.获取SEM Pixel Size给客户传入参数
  1781. // if (iSEM.GetPixelSize() == float.NaN)
  1782. // {
  1783. // return false;
  1784. // }
  1785. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1786. //}
  1787. ////19.自动能谱分析
  1788. //{
  1789. // //1. 确定能谱位置
  1790. // //2. 控制牛津打能谱
  1791. // //3. 能谱分析——面扫+线扫描
  1792. //}
  1793. #endregion
  1794. return true;
  1795. }
  1796. //非第一个孔的测试过程
  1797. public bool CommonWork()
  1798. {
  1799. //首先默认为SEM模式
  1800. arg.Picture_Information.Work_Status = "SEM";
  1801. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1802. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1803. {
  1804. if (!InsertPT())
  1805. {
  1806. arg.Message = "插入PT针失败";
  1807. SendMsg("1-0");
  1808. return false;
  1809. }
  1810. arg.Message = "插入PT针成功";
  1811. SendMsg("1-0");
  1812. }
  1813. //判断是否停止进程
  1814. if (key_stop)
  1815. {
  1816. return false;
  1817. }
  1818. //13. 自动 定位功能
  1819. if (!GetPoistion(false))
  1820. {
  1821. return false;
  1822. }
  1823. //判断是否停止进程
  1824. if (key_stop)
  1825. {
  1826. return false;
  1827. }
  1828. //14.自动控制FIB切割
  1829. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1830. {
  1831. if (!FIBCross())
  1832. {
  1833. return false;
  1834. }
  1835. }
  1836. //判断是否停止进程
  1837. if (key_stop)
  1838. {
  1839. return false;
  1840. }
  1841. //15.根据样品类型决定是否撤出PT针
  1842. if (m_MsParam.Is_Photograph == false && m_MsParam.PT == true)
  1843. {
  1844. if (!RetractPT())
  1845. {
  1846. arg.Message = "撤出PT针失败";
  1847. SendMsg("1-15");
  1848. return false;
  1849. }
  1850. arg.Message = "撤出PT针成功";
  1851. SendMsg("1-15");
  1852. }
  1853. //判断是否停止进程
  1854. if (key_stop)
  1855. {
  1856. return false;
  1857. }
  1858. // 16.找到切割位置
  1859. if (m_MsParam.Is_Photograph == false)
  1860. {
  1861. if (!FindCross())
  1862. {
  1863. return false;
  1864. }
  1865. //判断是否停止进程
  1866. if (key_stop)
  1867. {
  1868. return false;
  1869. }
  1870. }
  1871. //将过程17最后的拍照图片提出给18步进行调用
  1872. String img18 = "";
  1873. //17.自动控制SEM拍截面照
  1874. if (!ShotSection(ref img18))
  1875. {
  1876. return false;
  1877. }
  1878. //判断是否停止进程
  1879. if (key_stop)
  1880. {
  1881. return false;
  1882. }
  1883. //18.自动层高分析
  1884. if (m_MsParam.Is_Photograph == false)
  1885. {
  1886. float size = iSEM.GetPixelSize();
  1887. float mag = iSEM.GetMagnification();
  1888. int state = 0;
  1889. wr.Img_Measure_Size(img18, mag, size, out state);
  1890. if (state == 0)
  1891. {
  1892. arg.Message = "测量尺寸失败";
  1893. SendMsg("1-31");
  1894. return false;
  1895. }
  1896. arg.Message = "测量尺寸成功";
  1897. SendMsg("1-31");
  1898. }
  1899. #region 测试程序
  1900. //string fn;
  1901. //用宏抓一般图
  1902. //Thread.Sleep(5000);
  1903. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1904. //SendMsg("用宏抓一般图" + fn);
  1905. //iSEM.CMDMCFFilename(fn);
  1906. ////延时1s??
  1907. //Thread.Sleep(5000);
  1908. ////用宏抓好图
  1909. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1910. //SendMsg("用宏抓好图" + fn);
  1911. //iSEM.CMDMCFFilename(fn);
  1912. ////延时1s??
  1913. //Thread.Sleep(30000);
  1914. //Thread.Sleep(10000);
  1915. //WorkingFolder = m_measureFile.FilePath;
  1916. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1917. //SendMsg("SEM拍照存储到" + fileName6);
  1918. //if (!GetImage(ImageMode.SEM, fileName6))
  1919. //{
  1920. // SendMsg("SEM拍照失败");
  1921. // return false;
  1922. //}
  1923. ////用宏抓标志图
  1924. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1925. //SendMsg("用宏抓标志图" + fn);
  1926. //iSEM.CMDMCFFilename(fn);
  1927. ////延时1s??
  1928. //Thread.Sleep(30000);
  1929. ////恢复简单抓图
  1930. //Thread.Sleep(5000);
  1931. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1932. //SendMsg("用宏抓一般图" + fn);
  1933. //iSEM.CMDMCFFilename(fn);
  1934. //SendMsg("所有图结束");
  1935. #endregion
  1936. return true;
  1937. }
  1938. //测试完第一个孔后的样品台初始化操作。
  1939. //再调用CommonWork执行非第一个孔的测试过程
  1940. public bool OtherHole()
  1941. {
  1942. //SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1943. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1944. #region 1. 初始化
  1945. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1946. //读取图像冻结状态
  1947. float ffrozen = iSEM.GetImageFrozen();
  1948. if (ffrozen == float.NaN)
  1949. {
  1950. return false;
  1951. }
  1952. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1953. {
  1954. //SendMsg("样品台恢复到水平");
  1955. //return true;
  1956. }
  1957. else
  1958. {
  1959. //SendMsg("禁止样品台恢复到水平");
  1960. return false;
  1961. }
  1962. //判断是否停止进程
  1963. if (key_stop)
  1964. {
  1965. return false;
  1966. }
  1967. //2. 调节样品1号孔的样品台6轴坐标
  1968. //3. 将样品1号孔坐标2存入数据库
  1969. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1970. if (!iSEM.SetStageGotoT(0))
  1971. {
  1972. return false;
  1973. }
  1974. while (true)
  1975. {
  1976. Thread.Sleep(10000);
  1977. if (iSEM.GetStageIs() == 0)
  1978. {
  1979. break;
  1980. }
  1981. }
  1982. //判断是否停止进程
  1983. if (key_stop)
  1984. {
  1985. return false;
  1986. }
  1987. //5. 获取光镜2号孔XY坐标
  1988. //SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1989. //6. 根据光镜坐标控制样品台移动
  1990. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1991. {
  1992. //SendMsg("移动失败");
  1993. return false;
  1994. }
  1995. while (true)
  1996. {
  1997. Thread.Sleep(10000);
  1998. if (iSEM.GetStageIs() == 0)
  1999. {
  2000. break;
  2001. }
  2002. }
  2003. //判断是否停止进程
  2004. if (key_stop)
  2005. {
  2006. return false;
  2007. }
  2008. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  2009. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  2010. {
  2011. //SendMsg("样品台旋转");
  2012. //return true;
  2013. }
  2014. else
  2015. {
  2016. //SendMsg("禁止样品台旋转");
  2017. return false;
  2018. }
  2019. if (!iSEM.SetStageGotoT(54))
  2020. {
  2021. return false;
  2022. }
  2023. while (true)
  2024. {
  2025. Thread.Sleep(10000);
  2026. if (iSEM.GetStageIs() == 0)
  2027. {
  2028. break;
  2029. }
  2030. }
  2031. //判断是否停止进程
  2032. if (key_stop)
  2033. {
  2034. return false;
  2035. }
  2036. //SendMsg("拉直操作");
  2037. #endregion
  2038. //其他操作与第一个孔相同
  2039. if (!CommonWork())
  2040. {
  2041. return false;
  2042. }
  2043. return true;
  2044. }
  2045. //角度补偿
  2046. public bool TiltCorrection(float a_fAngle)
  2047. {
  2048. //记录原来电镜的状态
  2049. // bool bTilt = false;
  2050. //float fOldTilt = iSEM.GetTiltCorrection();
  2051. //if (fOldTilt == float.NaN)
  2052. //{
  2053. // return false;
  2054. //}
  2055. //else if (fOldTilt == 1)
  2056. //{
  2057. // bTilt = true;
  2058. //}
  2059. //else if (fOldTilt == 0)
  2060. //{
  2061. // bTilt = false;
  2062. //}
  2063. //float fOldAngle = iSEM.GetTiltAngle();
  2064. //if (fOldAngle == float.NaN)
  2065. //{
  2066. // return false;
  2067. //}
  2068. //开启校正
  2069. //SendMsg("开启校正");
  2070. if (!iSEM.SetTiltAngleOn())
  2071. {
  2072. return false;
  2073. }
  2074. //设置校正角度
  2075. //if (!iSEM.SetTiltAngle(fOldAngle))
  2076. //{
  2077. // return false;
  2078. //}
  2079. //恢复原始状态
  2080. //SendMsg("校正角度"+ a_fAngle.ToString());
  2081. if (!iSEM.SetTiltAngle(a_fAngle))
  2082. {
  2083. return false;
  2084. }
  2085. //if (bTilt)
  2086. //{
  2087. // if (!iSEM.SetTiltCorrectionOn())
  2088. // {
  2089. // return false;
  2090. // }
  2091. //}
  2092. //else
  2093. //{
  2094. // if (!iSEM.SetTiltCorrectionOff())
  2095. // {
  2096. // return false;
  2097. // }
  2098. //}
  2099. return true;
  2100. }
  2101. //拍图
  2102. public bool GetImage(ImageMode a_mode, String a_fileName)
  2103. {
  2104. //1. 图像解冻
  2105. float foldFrozen = iSEM.GetImageFrozen();
  2106. if (foldFrozen == float.NaN)
  2107. {
  2108. return false;
  2109. }
  2110. if (!iSEM.ImageLive())
  2111. {
  2112. return false;
  2113. }
  2114. //2. 确认图像模式
  2115. if (ImageMode.SEM == a_mode)
  2116. {
  2117. if (!iSEM.CmdFIBModeSEM())
  2118. {
  2119. return false;
  2120. }
  2121. }
  2122. else if (ImageMode.FIB == a_mode)
  2123. {
  2124. if (!iSEM.CmdFIBModeFIB())
  2125. {
  2126. return false;
  2127. }
  2128. }
  2129. else
  2130. {
  2131. return false;
  2132. }
  2133. //3. 获取分辨率
  2134. int[] ImageSize = iSEM.GetImageStore();
  2135. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2136. {
  2137. return false;
  2138. }
  2139. short width = (short)ImageSize[0];
  2140. short height = (short)ImageSize[1];
  2141. //4. 抓图
  2142. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  2143. {
  2144. return false;
  2145. }
  2146. //5. 恢复初始状态
  2147. if (foldFrozen == 0)
  2148. {
  2149. if (!iSEM.ImageLive())
  2150. {
  2151. return false;
  2152. }
  2153. }
  2154. else if (foldFrozen == 1)
  2155. {
  2156. if (!iSEM.ImageFrozen())
  2157. {
  2158. return false;
  2159. }
  2160. }
  2161. return true;
  2162. }
  2163. //自动聚焦
  2164. public bool AutoFocus(FocusParam a_param, out int a_nWd, String step_code)
  2165. {
  2166. a_nWd = 0;
  2167. float wd = iSEM.GetWorkingDistance();
  2168. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  2169. if (a_param == null)
  2170. {
  2171. return false;
  2172. }
  2173. string path = a_param.Path;
  2174. if (!Directory.Exists(path))
  2175. {
  2176. return false;
  2177. }
  2178. string path_coarse = a_param.Path + "\\Coarse";
  2179. if (!Directory.Exists(path_coarse))
  2180. {
  2181. Directory.CreateDirectory(path_coarse);
  2182. }
  2183. string path_fine = a_param.Path + "\\Fine";
  2184. if (!Directory.Exists(path_fine))
  2185. {
  2186. Directory.CreateDirectory(path_fine);
  2187. }
  2188. //1. 拍照
  2189. //1.1, 粗拍照
  2190. //1.1.1, 根据参数计算拍照次数
  2191. double nUp = a_param.UP * 100.0 ;
  2192. double nDown = a_param.Down * 100.0;
  2193. double nStep = a_param.Step * 100.0;
  2194. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  2195. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  2196. //粗拍照
  2197. for (int i = 0; i < nTimes; i++)
  2198. {
  2199. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  2200. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2201. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  2202. Thread.Sleep(8000);
  2203. int swd = cWd / 100;
  2204. //SendMsg("wd = " + swd.ToString() +"um");
  2205. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  2206. arg.Picture_Information.Picture_FullPath = fileName;
  2207. if (!GetImage(ImageMode.SEM, fileName))
  2208. {
  2209. return false;
  2210. }
  2211. SendMsg(step_code);
  2212. }
  2213. //1.2, 选定细拍照的工作距离
  2214. int CorWd;
  2215. ChooseBest(path_coarse,out CorWd);
  2216. a_nWd = CorWd;
  2217. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  2218. //1.3, 细拍照
  2219. if ( (CorWd - a_param.Range * 100.0) <=0)
  2220. {
  2221. return false;
  2222. }
  2223. double nfUp = CorWd - a_param.Range * 100.0;
  2224. double nfStep = a_param.fStep * 100.0;
  2225. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  2226. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  2227. for (int i = 0; i < nfTimes; i++)
  2228. {
  2229. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  2230. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  2231. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  2232. Thread.Sleep(8000);
  2233. int swd = cWd / 100;
  2234. //SendMsg("wd = " + swd.ToString() + "um");
  2235. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  2236. arg.Picture_Information.Picture_FullPath = fileName;
  2237. if (!GetImage(ImageMode.SEM, fileName))
  2238. {
  2239. return false;
  2240. }
  2241. SendMsg(step_code);
  2242. }
  2243. int fineWd;
  2244. ChooseBest(path_fine, out fineWd);
  2245. //SendMsg("wd fine max = " + fineWd.ToString());
  2246. a_nWd = fineWd;
  2247. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  2248. return true;
  2249. }
  2250. //LoG算子计算
  2251. private double LoGMean(string a_strImgPath)
  2252. {
  2253. //读入Img文件
  2254. if (!File.Exists(a_strImgPath))
  2255. {
  2256. return 0;
  2257. }
  2258. Mat src, gray_src;
  2259. int kernel_size = 3;
  2260. src = Cv2.ImRead(a_strImgPath);
  2261. gray_src = new Mat();
  2262. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2263. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2264. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2265. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2266. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  2267. Cv2.ConvertScaleAbs(src, src);
  2268. //图像的平均灰度
  2269. double meanValue = 0.0;
  2270. meanValue = Cv2.Mean(src)[0];
  2271. return meanValue;
  2272. }
  2273. //梯度计算
  2274. private double Tenengrad(string a_strImgPath)
  2275. {
  2276. //读入Img文件
  2277. if (!File.Exists(a_strImgPath))
  2278. {
  2279. return 0;
  2280. }
  2281. Mat src;
  2282. src = Cv2.ImRead(a_strImgPath);
  2283. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2284. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2285. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2286. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  2287. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  2288. //图像的平均灰度
  2289. double meanValue = 0.0;
  2290. meanValue = Cv2.Mean(src)[0];
  2291. return meanValue;
  2292. }
  2293. //梯度计算
  2294. private double TTgrad(string a_strImgPath)
  2295. {
  2296. //读入Img文件
  2297. if (!File.Exists(a_strImgPath))
  2298. {
  2299. return 0;
  2300. }
  2301. Mat src;
  2302. src = Cv2.ImRead(a_strImgPath);
  2303. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  2304. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  2305. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  2306. Mat scalex = new Mat();
  2307. Mat scaley = new Mat();
  2308. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  2309. Cv2.ConvertScaleAbs(src, scalex);
  2310. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  2311. Cv2.ConvertScaleAbs(src, scaley);
  2312. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  2313. //图像的平均灰度
  2314. double meanValue = 0.0;
  2315. meanValue = Cv2.Mean(src)[0];
  2316. return meanValue;
  2317. }
  2318. //三选二算法
  2319. private void ChooseBest(string a_strImgPath, out int a_nWd)
  2320. {
  2321. a_nWd = -1;
  2322. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  2323. float[] values = new float[files.Length];
  2324. double smax1 = LoGMean(files[0]);
  2325. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  2326. double smax2 = Tenengrad(files[0]);
  2327. int wdmax2 = wdmax1;
  2328. double smax3 = TTgrad(files[0]);
  2329. int wdmax3 = wdmax1;
  2330. int x = 0;
  2331. foreach (var file in files)
  2332. {
  2333. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  2334. double svalue1 = LoGMean(file);
  2335. double svalue2 = Tenengrad(file);
  2336. double svalue3 = TTgrad(file);
  2337. if (smax1 < svalue1)
  2338. {
  2339. smax1 = svalue1;
  2340. wdmax1 = wd;
  2341. }
  2342. if (smax2 < svalue2)
  2343. {
  2344. smax2 = svalue2;
  2345. wdmax2 = wd;
  2346. }
  2347. if (smax3 < svalue3)
  2348. {
  2349. smax3 = svalue3;
  2350. wdmax3 = wd;
  2351. }
  2352. x++;
  2353. }
  2354. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  2355. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  2356. {
  2357. a_nWd = wdmax1;
  2358. //SendMsg("焦距 = " + wdmax1.ToString());
  2359. }
  2360. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  2361. {
  2362. a_nWd = wdmax2;
  2363. //SendMsg("焦距 = " + wdmax2.ToString());
  2364. }
  2365. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  2366. {
  2367. a_nWd = wdmax3;
  2368. //SendMsg("焦距 = " + wdmax3.ToString());
  2369. }
  2370. else
  2371. {
  2372. //SendMsg("对焦失败。");
  2373. }
  2374. }
  2375. }
  2376. }