Measure.cs 50 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. public class ThreadStatusEventArgs
  26. {
  27. //状态
  28. public string State
  29. {
  30. get { return m_state; }
  31. set { m_state = value; }
  32. }
  33. private string m_state;
  34. //时间
  35. public DateTime Time
  36. {
  37. get { return m_time; }
  38. set { m_time = value; }
  39. }
  40. private DateTime m_time;
  41. //步骤代码
  42. public String Step_Code
  43. {
  44. get { return step_Code; }
  45. set { step_Code = value; }
  46. }
  47. private String step_Code;
  48. //其他消息
  49. public String Message
  50. {
  51. get { return this.message; }
  52. set { this.message = value; }
  53. }
  54. private String message;
  55. //图片信息
  56. public class PictureInformation
  57. {
  58. public String Picture_FullPath
  59. {
  60. get { return picture_FullPath; }
  61. set { picture_FullPath = value; }
  62. }
  63. private String picture_FullPath;
  64. public double Work_Voltage
  65. {
  66. get { return work_Voltage; }
  67. set { work_Voltage = value; }
  68. }
  69. private double work_Voltage;
  70. public double Magnification
  71. {
  72. get { return magnification; }
  73. set { magnification = value; }
  74. }
  75. private double magnification;
  76. public double Work_Distance
  77. {
  78. get { return work_Distance; }
  79. set { work_Distance = value; }
  80. }
  81. private double work_Distance;
  82. public String Work_Status
  83. {
  84. get { return work_Status; }
  85. set { work_Status = value; }
  86. }
  87. private String work_Status;
  88. }
  89. //图片信息实例类
  90. public PictureInformation Picture_Information
  91. {
  92. get { return picture_Information; }
  93. set { picture_Information = value; }
  94. }
  95. private PictureInformation picture_Information;
  96. //图像信息
  97. public class ImageInformation
  98. {
  99. public int Method_Name
  100. {
  101. get { return method_Name; }
  102. set { method_Name = value; }
  103. }
  104. private int method_Name;
  105. public Source_Img_Degree_Direction SIDD;
  106. public Cut_Position CP;
  107. public Cut_Success CS;
  108. public Trapezoid_Top_Center_Position TTCP;
  109. public Auto_Foucs AF;
  110. public Auto_Stigmatic AS;
  111. public Center_Position_OffsetAngle_Direction CPOD;
  112. public Measure_Size MS;
  113. public ImageInformation()
  114. {
  115. SIDD = new Source_Img_Degree_Direction();
  116. CP = new Cut_Position();
  117. CS = new Cut_Success();
  118. TTCP = new Trapezoid_Top_Center_Position();
  119. AF = new Auto_Foucs();
  120. AS = new Auto_Stigmatic();
  121. CPOD = new Center_Position_OffsetAngle_Direction();
  122. MS = new Measure_Size();
  123. }
  124. //1-计算原始图像偏移角度及方向
  125. public class Source_Img_Degree_Direction
  126. {
  127. public Boolean Is_Image = false;
  128. public double Degree
  129. {
  130. get { return degree; }
  131. set { degree = value; }
  132. }
  133. private double degree;
  134. public int Direction
  135. {
  136. get { return direction; }
  137. set { direction = value; }
  138. }
  139. private int direction;
  140. public int State
  141. {
  142. get { return state; }
  143. set { state = value; }
  144. }
  145. private int state;
  146. }
  147. //2-计算切割点位置
  148. public class Cut_Position
  149. {
  150. public Boolean Is_Image = false;
  151. public double Offsetx
  152. {
  153. get { return offsetx; }
  154. set { offsetx = value; }
  155. }
  156. private double offsetx;
  157. public double Offsety
  158. {
  159. get { return offsety; }
  160. set { offsety = value; }
  161. }
  162. private double offsety;
  163. public int State
  164. {
  165. get { return state; }
  166. set { state = value; }
  167. }
  168. private int state;
  169. }
  170. //3-是否切割成功
  171. public class Cut_Success
  172. {
  173. public Boolean Is_Image = false;
  174. public int State
  175. {
  176. get { return state; }
  177. set { state = value; }
  178. }
  179. private int state;
  180. }
  181. //4-计算切割后图像梯形区域上边中心点坐标
  182. public class Trapezoid_Top_Center_Position
  183. {
  184. public Boolean Is_Image = false;
  185. public double TopCenterX
  186. {
  187. get { return topCenterX; }
  188. set { topCenterX = value; }
  189. }
  190. private double topCenterX;
  191. public double TopCenterY
  192. {
  193. get { return topCenterY; }
  194. set { topCenterY = value; }
  195. }
  196. private double topCenterY;
  197. public int State
  198. {
  199. get { return state; }
  200. set { state = value; }
  201. }
  202. private int state;
  203. }
  204. //5-自动对焦
  205. public class Auto_Foucs
  206. {
  207. public Boolean Is_Image = true;
  208. public String Img_Path
  209. {
  210. get { return img_Path; }
  211. set { img_Path = value; }
  212. }
  213. private String img_Path;
  214. }
  215. //6-自动像闪
  216. public class Auto_Stigmatic
  217. {
  218. public Boolean Is_Image = true;
  219. public String Img_Path
  220. {
  221. get { return img_Path; }
  222. set { img_Path = value; }
  223. }
  224. private String img_Path;
  225. }
  226. //7-计算切割面区域中心坐标,以及偏移角度及方向
  227. public class Center_Position_OffsetAngle_Direction
  228. {
  229. public Boolean Is_Image = false;
  230. public double CenterX
  231. {
  232. get { return centerX; }
  233. set { centerX = value; }
  234. }
  235. private double centerX;
  236. public double CenterY
  237. {
  238. get { return centerY; }
  239. set { centerY = value; }
  240. }
  241. private double centerY;
  242. public double Degree
  243. {
  244. get { return degree; }
  245. set { degree = value; }
  246. }
  247. private double degree;
  248. public int Direction
  249. {
  250. get { return direction; }
  251. set { direction = value; }
  252. }
  253. private int direction;
  254. public int State
  255. {
  256. get { return state; }
  257. set { state = value; }
  258. }
  259. private int state;
  260. }
  261. //8-测量尺寸
  262. public class Measure_Size
  263. {
  264. public Boolean Is_Image = false;
  265. public int State
  266. {
  267. get { return state; }
  268. set { state = value; }
  269. }
  270. private int state;
  271. }
  272. }
  273. //图像信息实例类
  274. public ImageInformation Image_Information
  275. {
  276. get { return image_Information; }
  277. set { image_Information = value; }
  278. }
  279. private ImageInformation image_Information;
  280. public ThreadStatusEventArgs(string a_State)
  281. {
  282. this.m_state = a_State;
  283. picture_Information = new PictureInformation();
  284. image_Information = new ImageInformation();
  285. }
  286. }
  287. public class CutHolesStatusEventArgs
  288. {
  289. public string State
  290. {
  291. get { return m_state; }
  292. set { m_state = value; }
  293. }
  294. private string m_state;
  295. public string HoleName
  296. {
  297. get { return m_holeName; }
  298. set { m_holeName = value; }
  299. }
  300. private string m_holeName;
  301. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  302. {
  303. this.m_state = a_state;
  304. this.m_holeName = a_holeName;
  305. }
  306. }
  307. public class Measure
  308. {
  309. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  310. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  311. //全局只有一个fatorySEM
  312. static FactoryHardware factorySEM = FactoryHardware.Instance;
  313. ISEMControl iSEM = factorySEM.ISEM;
  314. //@的作用是不用转义字符\\只打一个就行
  315. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  316. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  317. const String ImageName3 = @"ImageFIB600X2.tif";
  318. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  319. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  320. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  321. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  322. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  323. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  324. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  325. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  326. const String ElyDeposition = @"Deposition.ely"; //沉积
  327. const String ElyCrossSection = @"CrossSection.ely"; //切割
  328. const float fMin = (float)0.0000002; //单位是米
  329. int m_nWorkHoleNo = -1;
  330. //测量文件
  331. private MeasureFile m_measureFile;
  332. public MeasureFile MeasureFile
  333. {
  334. get { return this.m_measureFile; }
  335. set { this.m_measureFile = value; }
  336. }
  337. //测量的切割孔
  338. private List<MeasureData.CutHole> m_cutHoles;
  339. public List<MeasureData.CutHole> cutHoles
  340. {
  341. get { return this.m_cutHoles; }
  342. set { this.m_cutHoles = value; }
  343. }
  344. //工作文件夹
  345. private string m_WorkingFolder;
  346. public string WorkingFolder
  347. {
  348. get { return this.m_WorkingFolder; }
  349. set { this.m_WorkingFolder = value; }
  350. }
  351. //程序当前路径
  352. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  353. //线程状态
  354. private ThreadStatus m_ThreadStatus;
  355. public ThreadStatus TStatus
  356. {
  357. get { return this.m_ThreadStatus; }
  358. set { this.m_ThreadStatus = value; }
  359. }
  360. //测量参数
  361. private MeasureParam m_MsParam;
  362. public MeasureParam MeasParam
  363. {
  364. get { return this.m_MsParam; }
  365. set { this.m_MsParam = value; }
  366. }
  367. //构造函数
  368. public Measure()
  369. {
  370. Init();
  371. }
  372. private void Init()
  373. {
  374. MeasParam = new MeasureParam();
  375. TStatus = new ThreadStatus();
  376. cutHoles = new List<MeasureData.CutHole>();
  377. }
  378. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  379. public bool InitMeas(MeasureFile a_measureFile)
  380. {
  381. m_measureFile = a_measureFile;
  382. List<CutHole> listHoles = m_measureFile.ListCutHole;
  383. foreach (CutHole h in listHoles)
  384. {
  385. if (h.SWITCH == true)
  386. {
  387. m_cutHoles.Add(h);
  388. }
  389. }
  390. if (m_cutHoles.Count == 0)
  391. return false;
  392. this.m_MsParam = m_measureFile.MParam;
  393. return true;
  394. }
  395. public void SendMsg(string step_code)
  396. {
  397. ThreadStatusEventArgs arg = new ThreadStatusEventArgs(step_code);
  398. arg.Time = DateTime.Now;
  399. switch(step_code)
  400. {
  401. //拍照
  402. case "1-3":
  403. case "1-9":
  404. //电压、放大倍数、工作距离、位置信息、图片路径
  405. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  406. arg.Picture_Information.Work_Status = "SEM";
  407. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  408. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  409. break;
  410. case "1-10":
  411. //获取偏移信息
  412. break;
  413. case "1-12":
  414. //验证移动准备性
  415. break;
  416. default:
  417. arg.Step_Code = "0-0";
  418. arg.Message = step_code;
  419. break;
  420. }
  421. SendThreadStatus(this, arg);
  422. }
  423. public void SendCutHoleMsg(string a_state, string a_holeName)
  424. {
  425. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  426. arg.HoleName = a_holeName;
  427. arg.State = a_state;
  428. SendCutHolesStatus(this, arg);
  429. }
  430. //测量流程
  431. public void DoMeasure()
  432. {
  433. //创建线程的测量状态的更新
  434. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  435. if (SendThreadStatus != null)
  436. {
  437. SendMsg("开始测量。");
  438. }
  439. //检查硬件连接是否正常
  440. if (!ConnectHardware())
  441. {
  442. SendMsg("连接硬件失败。");
  443. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  444. return;
  445. }
  446. SendMsg("硬件连接成功。");
  447. //设置工作文件夹
  448. if (!SetWorkingFolderStr())
  449. {
  450. SendMsg("设置工作文件夹失败");
  451. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  452. return;
  453. }
  454. SendMsg("创建工作文件路径为" + WorkingFolder);
  455. float[] firstPosition;
  456. for (int i = 0; i < m_cutHoles.Count; i++)
  457. {
  458. m_nWorkHoleNo = i;
  459. if (i == 0)
  460. {
  461. SendMsg("第一个切孔开始测量");
  462. //切孔操作-开始
  463. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  464. firstPosition = iSEM.GetStagePosition();
  465. //第一个孔的测试
  466. FirstHole();
  467. //切孔操作-完成
  468. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  469. }
  470. else
  471. {
  472. //非第一个孔的测试
  473. SendMsg("第" + i.ToString() + "个切孔开始测量");
  474. //切孔操作-开始
  475. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  476. OtherHole();
  477. //切孔操作-完成
  478. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  479. }
  480. }
  481. }
  482. //检查硬件连接是否正常
  483. public bool ConnectHardware()
  484. {
  485. //返回硬件的连接状态
  486. return iSEM.ConnectStatus();
  487. }
  488. //设置工作文件夹
  489. public bool SetWorkingFolderStr()
  490. {
  491. WorkingFolder = m_measureFile.FilePath;
  492. return true;
  493. ////获取工作文件路径
  494. //string pathName = m_measureFile.FilePath;
  495. ////判断工作文件路径是否为空或无效
  496. //if (string.IsNullOrEmpty(pathName))
  497. //{
  498. // SendMsg("路径无效");
  499. // return false;
  500. //}
  501. ////文件未保存
  502. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  503. //{
  504. // SendMsg("工程文件未保存");
  505. // return false;
  506. //}
  507. ////获取工作文件所在文件夹
  508. //string folder = System.IO.Path.GetDirectoryName(pathName);
  509. //if (string.IsNullOrEmpty(folder))
  510. //{
  511. // SendMsg("工程文件无效");
  512. // return false;
  513. //}
  514. //WorkingFolder += @"\\";
  515. //LogManager.Init(WorkingFolder);
  516. //return false;
  517. }
  518. //插入PT针
  519. public bool InsertPT()
  520. {
  521. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  522. SendMsg("调用宏插入PT针宏文件" + fn);
  523. iSEM.CMDMCFFilename(fn);
  524. //延时1s??
  525. Thread.Sleep(1000);
  526. return true;
  527. }
  528. //撤出PT针
  529. public bool RetractPT()
  530. {
  531. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  532. SendMsg("调用宏撤出PT针宏文件" + fn);
  533. iSEM.CMDMCFFilename(fn);
  534. //延时1s??
  535. Thread.Sleep(1000);
  536. return true;
  537. }
  538. //PT沉积
  539. public bool PTWork()
  540. {
  541. //执行PT沉积的ELY文件
  542. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  543. SendMsg("执行PT沉积Ely文件:" + fn);
  544. if (!ExcuteEly(fn))
  545. {
  546. return false;
  547. }
  548. //等待沉积完成
  549. while (true)
  550. {
  551. Thread.Sleep(10000);
  552. if (iSEM.GetFIBMode() == 0)
  553. {
  554. break;
  555. }
  556. }
  557. return true;
  558. }
  559. //FIB切割
  560. public bool FIBWork()
  561. {
  562. //执行PT沉积的ELY文件
  563. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  564. SendMsg("执行FIB切割Ely文件:" + fn);
  565. if (!ExcuteEly(fn))
  566. {
  567. return false;
  568. }
  569. //等待切割完成
  570. while (true)
  571. {
  572. Thread.Sleep(10000);
  573. if (iSEM.GetFIBMode() == 0)
  574. {
  575. break;
  576. }
  577. }
  578. return true;
  579. }
  580. public bool ExcuteEly(string a_filename)
  581. {
  582. //执行ELy文件有三个动作
  583. //1. 选择ELY文件
  584. SendMsg("选择ELY文件");
  585. if (!iSEM.CmdFIBLoadELY(a_filename))
  586. {
  587. SendMsg("选择ELY文件失败");
  588. return false;
  589. }
  590. Thread.Sleep(1000);
  591. //2. 确认ELY文件
  592. SendMsg("确认ELY文件");
  593. if (!iSEM.CmdFIBEXPOSUREELY())
  594. {
  595. SendMsg("确认ELY文件失败");
  596. return false;
  597. }
  598. Thread.Sleep(1000);
  599. //3. 执行ELY文件
  600. SendMsg("执行ELY文件");
  601. if (!iSEM.CmdFIBSTARTELY())
  602. {
  603. SendMsg("执行ELY文件失败");
  604. return false;
  605. }
  606. Thread.Sleep(1000);
  607. return true;
  608. }
  609. /// <summary>
  610. ///13. 自动 定位功能
  611. /// </summary>
  612. /// <returns></returns>
  613. public bool GetPoistion()
  614. {
  615. SendMsg("自动定位");
  616. //13.自动定位切割
  617. {
  618. SendMsg("放大600倍");
  619. //1.控制SEM放大600X
  620. if (!iSEM.SetMagnification(600))
  621. {
  622. return false;
  623. }
  624. //2.控制SEM自动对焦、亮度、对比度
  625. // if (!MeasParam.FocusMode)
  626. {
  627. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  628. {
  629. SendMsg("拍摄照片完成");
  630. //return true;
  631. }
  632. else
  633. {
  634. SendMsg("拍摄照片失败");
  635. return false;
  636. }
  637. //弹出手动对焦的窗口
  638. }
  639. //else
  640. //{
  641. // //调用自动对焦模块
  642. //}
  643. //3.设置SEM进行角度补偿54度
  644. SendMsg("设置校正54度");
  645. if (!TiltCorrection(54))
  646. {
  647. SendMsg("设置SEM进行角度补偿54度");
  648. return false;
  649. }
  650. Thread.Sleep(5000);
  651. //4.控制SEM拍照
  652. SendMsg("SEM拍照");
  653. //5.保存照片
  654. {
  655. //1. 创建目录,已经完成
  656. //2. 设置图片名称
  657. //3. 保存图片1
  658. WorkingFolder = m_measureFile.FilePath;
  659. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  660. SendMsg("SEM拍照存储到" + fileName1);
  661. if (!GetImage(ImageMode.SEM, fileName1))
  662. {
  663. SendMsg("SEM拍照失败");
  664. return false;
  665. }
  666. Thread.Sleep(3000);
  667. }
  668. //6.设置FIB拍照参数——扫描时间、束流等
  669. //7.控制FIB自动亮度、对比度
  670. SendMsg("切换FIB控制");
  671. if (!iSEM.CmdFIBModeFIB())
  672. {
  673. SendMsg("FIB模式切换失败");
  674. return false;
  675. }
  676. Thread.Sleep(10000);
  677. //8.控制FIB拍照
  678. //9.保存照片
  679. SendMsg("FIB拍照");
  680. {
  681. //1. 设置图片名称
  682. //2. 保存图片2
  683. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  684. if (!GetImage(ImageMode.FIB, fileName2))
  685. {
  686. SendMsg("FIB拍照失败");
  687. return false;
  688. }
  689. Thread.Sleep(3000);
  690. }
  691. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  692. SendMsg("调用识别位置");
  693. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  694. {
  695. SendMsg("移动已完成");
  696. //return true;
  697. }
  698. else
  699. {
  700. SendMsg("移动已失败");
  701. return false;
  702. }
  703. SendMsg("进行PT沉积");
  704. //11.自动工具样品类型参数确定是否需要PT沉积
  705. {
  706. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  707. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  708. //3. 根据坐标进行PT沉积
  709. if (!PTWork())
  710. {
  711. SendMsg("PT沉积失败");
  712. return false;
  713. }
  714. }
  715. return true;
  716. //模拟为客户返回的坐标值
  717. float x0 = 0, y0 = 0;
  718. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  719. //12.根据梯形坐标控制FIB调整到中心位置
  720. if (!iSEM.MoveStageXY(x0, y0))
  721. {
  722. SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  723. return false;
  724. }
  725. //电镜移动是有一个延时的操作的?
  726. //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  727. float x1 = iSEM.GetStageAtX();
  728. float y1 = iSEM.GetStageAtY();
  729. if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  730. {
  731. SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  732. return false;
  733. }
  734. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  735. float[] firstPosition = iSEM.GetStagePosition();
  736. //这里要调用文件保存功能
  737. SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  738. + firstPosition[1].ToString() + ","
  739. + firstPosition[2].ToString() + ","
  740. + firstPosition[3].ToString() + ","
  741. + firstPosition[4].ToString() + ","
  742. + firstPosition[5].ToString() + ")");
  743. }
  744. return false;
  745. }
  746. /// <summary>
  747. /// 14. FIB切割
  748. /// </summary>
  749. /// <returns></returns>
  750. public bool FIBCross()
  751. {
  752. //14.自动控制FIB切割
  753. {
  754. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  755. //2.控制FIB进行切割
  756. SendMsg("FIB切割");
  757. if (!FIBWork())
  758. {
  759. SendMsg("FIB切割失败");
  760. return false;
  761. }
  762. Thread.Sleep(5000);
  763. //3.控制FIB拍照600X
  764. //4.保存图片
  765. {
  766. //1.设置图片名称
  767. //2.保存图片3
  768. WorkingFolder = m_measureFile.FilePath;
  769. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  770. SendMsg("SEM拍照存储到" + fileName3);
  771. if (!GetImage(ImageMode.FIB, fileName3))
  772. {
  773. SendMsg("FIB拍照失败");
  774. return false;
  775. }
  776. Thread.Sleep(3000);
  777. }
  778. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  779. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  780. }
  781. return true;
  782. }
  783. /// <summary>
  784. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  785. /// </summary>
  786. /// <returns></returns>
  787. public bool FindCross()
  788. {
  789. //16.自动调整SEM找到切割位置
  790. {
  791. //1.控制SEM放大到300倍
  792. if (!iSEM.SetMagnification(300))
  793. {
  794. return false;
  795. }
  796. //2.控制SEM自动对焦、亮度、对比度-接口
  797. if (!MeasParam.FocusMode)
  798. {
  799. //弹出手动对焦的窗口
  800. }
  801. else
  802. {
  803. //调用自动对焦模块
  804. }
  805. Thread.Sleep(5000);
  806. //3.控制SEM拍照
  807. String fileName4 = WorkingFolder + ImageName4;
  808. if (!GetImage(ImageMode.SEM, fileName4))
  809. {
  810. return false;
  811. }
  812. Thread.Sleep(3000);
  813. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  814. float x4 = 0, y4 = 0;
  815. float angle = 0;
  816. //5.根据坐标控制SEM移动到切孔位置,居中
  817. if (!iSEM.MoveStageXY(x4, y4))
  818. {
  819. return false;
  820. }
  821. if (!iSEM.SetScanRotation(angle))
  822. {
  823. return false;
  824. }
  825. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  826. //float x5 = iSEM.GetStageAtX();
  827. //float y5 = iSEM.GetStageAtY();
  828. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  829. //{
  830. // return false;
  831. //}
  832. }
  833. return true;
  834. }
  835. public bool CommonWork()
  836. {
  837. SendMsg("插入PT针");
  838. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  839. //if (firstHole.PT == true)
  840. {
  841. if (!InsertPT())
  842. {
  843. SendMsg("插入PT针失败");
  844. return false;
  845. }
  846. }
  847. //13. 自动 定位功能
  848. SendMsg("自动定位切割位置");
  849. if (!GetPoistion())
  850. {
  851. SendMsg("自动定位切割位置失败");
  852. return false;
  853. }
  854. //14.自动控制FIB切割
  855. SendMsg("FIB切割");
  856. if (!FIBCross())
  857. {
  858. SendMsg("FIB切割失败");
  859. return false;
  860. }
  861. //{
  862. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  863. // //2.控制FIB进行切割
  864. // //3.控制FIB拍照600X
  865. // //4.保存图片
  866. // {
  867. // //1.设置图片名称
  868. // //2.保存图片3
  869. // String fileName3 = WorkingFolder + ImageName3;
  870. // if (!GetImage(ImageMode.FIB, fileName3))
  871. // {
  872. // return false;
  873. // }
  874. // }
  875. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  876. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  877. //}
  878. //15.根据样品类型决定是否撤出PT针
  879. SendMsg("撤出PT针");
  880. //if (firstHole.PT == false)
  881. //{
  882. if (!RetractPT())
  883. {
  884. SendMsg("撤出PT针失败");
  885. return false;
  886. }
  887. //}
  888. // 16.找到切割位置
  889. SendMsg("找到切割位置");
  890. //17.自动控制SEM拍截面照
  891. SendMsg("观测层高");
  892. SendMsg("切换SEM控制");
  893. if (!iSEM.CmdFIBModeSEM())
  894. {
  895. SendMsg("SEM模式切换失败");
  896. return false;
  897. }
  898. Thread.Sleep(10000);
  899. SendMsg("放大6000倍");
  900. if (!iSEM.SetMagnification(6000))
  901. {
  902. SendMsg("放大倍数调整失败");
  903. return false;
  904. }
  905. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  906. {
  907. SendMsg("拍摄照片完成");
  908. //return true;
  909. }
  910. else
  911. {
  912. SendMsg("拍摄照片失败");
  913. return false;
  914. }
  915. SendMsg("图像校正36度");
  916. //3.设置SEM角度补偿cos36度
  917. if (!TiltCorrection(36))
  918. {
  919. return false;
  920. }
  921. Thread.Sleep(3000);
  922. string fn;
  923. //用宏抓一般图
  924. Thread.Sleep(5000);
  925. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  926. SendMsg("用宏抓一般图" + fn);
  927. iSEM.CMDMCFFilename(fn);
  928. //延时1s??
  929. Thread.Sleep(5000);
  930. //用宏抓好图
  931. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  932. SendMsg("用宏抓好图" + fn);
  933. iSEM.CMDMCFFilename(fn);
  934. //延时1s??
  935. Thread.Sleep(30000);
  936. Thread.Sleep(10000);
  937. WorkingFolder = m_measureFile.FilePath;
  938. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  939. SendMsg("SEM拍照存储到" + fileName6);
  940. if (!GetImage(ImageMode.SEM, fileName6))
  941. {
  942. SendMsg("SEM拍照失败");
  943. return false;
  944. }
  945. //用宏抓标志图
  946. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  947. SendMsg("用宏抓标志图" + fn);
  948. iSEM.CMDMCFFilename(fn);
  949. //延时1s??
  950. Thread.Sleep(30000);
  951. //恢复简单抓图
  952. Thread.Sleep(5000);
  953. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  954. SendMsg("用宏抓一般图" + fn);
  955. iSEM.CMDMCFFilename(fn);
  956. SendMsg("所有图结束");
  957. return true;
  958. }
  959. //第一个孔的测试过程
  960. public bool FirstHole()
  961. {
  962. MeasureData.CutHole firstHole = m_cutHoles[0];
  963. SendMsg("插入PT针");
  964. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  965. //if (firstHole.PT == true)
  966. {
  967. if (!InsertPT())
  968. {
  969. SendMsg("插入PT针失败");
  970. return false;
  971. }
  972. }
  973. //13. 自动 定位功能
  974. SendMsg("自动定位切割位置");
  975. if (!GetPoistion())
  976. {
  977. SendMsg("自动定位切割位置失败");
  978. return false;
  979. }
  980. //14.自动控制FIB切割
  981. SendMsg("FIB切割");
  982. if (!FIBCross())
  983. {
  984. SendMsg("FIB切割失败");
  985. return false;
  986. }
  987. //{
  988. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  989. // //2.控制FIB进行切割
  990. // //3.控制FIB拍照600X
  991. // //4.保存图片
  992. // {
  993. // //1.设置图片名称
  994. // //2.保存图片3
  995. // String fileName3 = WorkingFolder + ImageName3;
  996. // if (!GetImage(ImageMode.FIB, fileName3))
  997. // {
  998. // return false;
  999. // }
  1000. // }
  1001. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1002. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  1003. //}
  1004. //15.根据样品类型决定是否撤出PT针
  1005. SendMsg("撤出PT针");
  1006. //if (firstHole.PT == false)
  1007. //{
  1008. if (!RetractPT())
  1009. {
  1010. SendMsg("撤出PT针失败");
  1011. return false;
  1012. }
  1013. //}
  1014. // 16.找到切割位置
  1015. SendMsg("找到切割位置");
  1016. //17.自动控制SEM拍截面照
  1017. SendMsg("观测层高");
  1018. SendMsg("切换SEM控制");
  1019. if (!iSEM.CmdFIBModeSEM())
  1020. {
  1021. SendMsg("SEM模式切换失败");
  1022. return false;
  1023. }
  1024. Thread.Sleep(10000);
  1025. SendMsg("放大6000倍");
  1026. if (!iSEM.SetMagnification(6000))
  1027. {
  1028. SendMsg("放大倍数调整失败");
  1029. return false;
  1030. }
  1031. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1032. {
  1033. SendMsg("拍摄照片完成");
  1034. //return true;
  1035. }
  1036. else
  1037. {
  1038. SendMsg("拍摄照片失败");
  1039. return false;
  1040. }
  1041. SendMsg("图像校正36度");
  1042. //3.设置SEM角度补偿cos36度
  1043. if (!TiltCorrection(36))
  1044. {
  1045. return false;
  1046. }
  1047. Thread.Sleep(3000);
  1048. string fn;
  1049. //用宏抓一般图
  1050. Thread.Sleep(5000);
  1051. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1052. SendMsg("用宏抓一般图" + fn);
  1053. iSEM.CMDMCFFilename(fn);
  1054. //延时1s??
  1055. Thread.Sleep(5000);
  1056. //用宏抓好图
  1057. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1058. SendMsg("用宏抓好图" + fn);
  1059. iSEM.CMDMCFFilename(fn);
  1060. //延时1s??
  1061. Thread.Sleep(30000);
  1062. Thread.Sleep(10000);
  1063. WorkingFolder = m_measureFile.FilePath;
  1064. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1065. SendMsg("SEM拍照存储到" + fileName6);
  1066. if (!GetImage(ImageMode.SEM, fileName6))
  1067. {
  1068. SendMsg("SEM拍照失败");
  1069. return false;
  1070. }
  1071. //用宏抓标志图
  1072. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1073. SendMsg("用宏抓标志图" + fn);
  1074. iSEM.CMDMCFFilename(fn);
  1075. //延时1s??
  1076. Thread.Sleep(30000);
  1077. Thread.Sleep(5000);
  1078. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1079. SendMsg("用宏抓一般图" + fn);
  1080. iSEM.CMDMCFFilename(fn);
  1081. //延时1s??
  1082. Thread.Sleep(5000);
  1083. SendMsg("所有图结束");
  1084. ////17.自动控制SEM拍截面照
  1085. //{
  1086. // //1.控制SEM放大到指定参数大小范围,6000x
  1087. // if (!iSEM.SetMagnification(6000))
  1088. // {
  1089. // return false;
  1090. // }
  1091. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1092. // if (!MeasParam.FocusMode)
  1093. // {
  1094. // //弹出手动对焦的窗口
  1095. // }
  1096. // else
  1097. // {
  1098. // //调用自动对焦模块
  1099. // }
  1100. // //3.设置SEM角度补偿cos36度
  1101. // if (!TiltCorrection(36))
  1102. // {
  1103. // return false;
  1104. // }
  1105. // //4.控制SEM拍照
  1106. // //5.保存照片4
  1107. // String fileName5 = WorkingFolder + ImageName5;
  1108. // if (!GetImage(ImageMode.SEM, fileName5))
  1109. // {
  1110. // return false;
  1111. // }
  1112. // //6.将照片传给客户,获取偏移坐标
  1113. // float x6 = 0, y6 = 0;
  1114. // float angle1 = 0;
  1115. // float mage = 10000;
  1116. // //7.根据坐标控制SEM移动到分析位置
  1117. // if (!iSEM.MoveStageXY(x6, y6))
  1118. // {
  1119. // return false;
  1120. // }
  1121. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1122. // float x7 = iSEM.GetStageAtX();
  1123. // float y7 = iSEM.GetStageAtY();
  1124. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1125. // {
  1126. // return false;
  1127. // }
  1128. // //9.控制SEM平行校正,并记录校正前初始值
  1129. // float foldAnagle = iSEM.GetScanRotation();
  1130. // if (foldAnagle == float.NaN)
  1131. // {
  1132. // return false;
  1133. // }
  1134. // if (!iSEM.SetScanRotation(angle1))
  1135. // {
  1136. // return false;
  1137. // }
  1138. // //10.控制SEM放大到指定参数大小范围
  1139. // if (!iSEM.SetMagnification(mage))
  1140. // {
  1141. // return false;
  1142. // }
  1143. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1144. // if (!MeasParam.FocusMode)
  1145. // {
  1146. // //弹出手动对焦的窗口
  1147. // }
  1148. // else
  1149. // {
  1150. // //调用自动对焦模块
  1151. // }
  1152. // //12.控制SEM对分析位置拍照
  1153. // String fileName6 = WorkingFolder + ImageName6;
  1154. // if (!GetImage(ImageMode.SEM, fileName6))
  1155. // {
  1156. // return false;
  1157. // }
  1158. // //13.保存照片
  1159. // //14.控制SEM取消电子束校正,回到初始值
  1160. // if (!iSEM.SetScanRotation(foldAnagle))
  1161. // {
  1162. // return false;
  1163. // }
  1164. //}
  1165. ////18.自动层高分析
  1166. //{
  1167. // //1.获取SEM Pixel Size给客户传入参数
  1168. // if (iSEM.GetPixelSize() == float.NaN)
  1169. // {
  1170. // return false;
  1171. // }
  1172. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1173. //}
  1174. ////19.自动能谱分析
  1175. //{
  1176. // //1. 确定能谱位置
  1177. // //2. 控制牛津打能谱
  1178. // //3. 能谱分析——面扫+线扫描
  1179. //}
  1180. return true;
  1181. }
  1182. //非第一个孔的测试过程
  1183. public void OtherHole()
  1184. {
  1185. //for (int i = 1; i < m_cutHoles.Count; i++)
  1186. //{
  1187. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1188. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1189. //1. 初始化
  1190. {
  1191. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1192. //读取图像冻结状态
  1193. float ffrozen = iSEM.GetImageFrozen();
  1194. if (ffrozen == float.NaN)
  1195. {
  1196. return;
  1197. }
  1198. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1199. {
  1200. SendMsg("样品台恢复到水平");
  1201. //return true;
  1202. }
  1203. else
  1204. {
  1205. SendMsg("禁止样品台恢复到水平");
  1206. return;
  1207. }
  1208. //2. 调节样品1号孔的样品台6轴坐标
  1209. //3. 将样品1号孔坐标2存入数据库
  1210. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1211. if (!iSEM.SetStageGotoT(0))
  1212. {
  1213. return;
  1214. }
  1215. while (true)
  1216. {
  1217. Thread.Sleep(10000);
  1218. if (iSEM.GetStageIs() == 0)
  1219. {
  1220. break;
  1221. }
  1222. }
  1223. //5. 获取光镜2号孔XY坐标
  1224. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1225. //6. 根据光镜坐标控制样品台移动
  1226. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1227. {
  1228. SendMsg("移动失败");
  1229. }
  1230. while (true)
  1231. {
  1232. Thread.Sleep(10000);
  1233. if (iSEM.GetStageIs() == 0)
  1234. {
  1235. break;
  1236. }
  1237. }
  1238. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1239. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1240. {
  1241. SendMsg("样品台旋转");
  1242. //return true;
  1243. }
  1244. else
  1245. {
  1246. SendMsg("禁止样品台旋转");
  1247. return;
  1248. }
  1249. if (!iSEM.SetStageGotoT(54))
  1250. {
  1251. return;
  1252. }
  1253. while (true)
  1254. {
  1255. Thread.Sleep(10000);
  1256. if (iSEM.GetStageIs() == 0)
  1257. {
  1258. break;
  1259. }
  1260. }
  1261. }
  1262. SendMsg("拉直操作");
  1263. SendMsg("其他操作与1号孔操作一致");
  1264. if (!CommonWork())
  1265. {
  1266. return;
  1267. }
  1268. //2. 定位切割
  1269. {
  1270. //1. 拉直操作
  1271. {
  1272. //1.1 控制SEM进行拍照
  1273. //1.2 图片传给客户,返回偏移角度
  1274. //1.3 根据返回角度,控制样品台转动
  1275. }
  1276. //2. 与1号孔13步相同
  1277. }
  1278. //3. 以后步骤与1号孔以后步骤一致
  1279. //}
  1280. }
  1281. //角度补偿
  1282. public bool TiltCorrection(float a_fAngle)
  1283. {
  1284. //记录原来电镜的状态
  1285. // bool bTilt = false;
  1286. //float fOldTilt = iSEM.GetTiltCorrection();
  1287. //if (fOldTilt == float.NaN)
  1288. //{
  1289. // return false;
  1290. //}
  1291. //else if (fOldTilt == 1)
  1292. //{
  1293. // bTilt = true;
  1294. //}
  1295. //else if (fOldTilt == 0)
  1296. //{
  1297. // bTilt = false;
  1298. //}
  1299. //float fOldAngle = iSEM.GetTiltAngle();
  1300. //if (fOldAngle == float.NaN)
  1301. //{
  1302. // return false;
  1303. //}
  1304. //开启校正
  1305. SendMsg("开启校正");
  1306. if (!iSEM.SetTiltAngleOn())
  1307. {
  1308. return false;
  1309. }
  1310. //设置校正角度
  1311. //if (!iSEM.SetTiltAngle(fOldAngle))
  1312. //{
  1313. // return false;
  1314. //}
  1315. //恢复原始状态
  1316. SendMsg("校正角度"+ a_fAngle.ToString());
  1317. if (!iSEM.SetTiltAngle(a_fAngle))
  1318. {
  1319. return false;
  1320. }
  1321. //if (bTilt)
  1322. //{
  1323. // if (!iSEM.SetTiltCorrectionOn())
  1324. // {
  1325. // return false;
  1326. // }
  1327. //}
  1328. //else
  1329. //{
  1330. // if (!iSEM.SetTiltCorrectionOff())
  1331. // {
  1332. // return false;
  1333. // }
  1334. //}
  1335. return true;
  1336. }
  1337. //拍图
  1338. public bool GetImage(ImageMode a_mode, String a_fileName)
  1339. {
  1340. //1. 图像解冻
  1341. float foldFrozen = iSEM.GetImageFrozen();
  1342. if (foldFrozen == float.NaN)
  1343. {
  1344. return false;
  1345. }
  1346. if (!iSEM.ImageLive())
  1347. {
  1348. return false;
  1349. }
  1350. //2. 确认图像模式
  1351. if (ImageMode.SEM == a_mode)
  1352. {
  1353. if (!iSEM.CmdFIBModeSEM())
  1354. {
  1355. return false;
  1356. }
  1357. }
  1358. else if (ImageMode.FIB == a_mode)
  1359. {
  1360. if (!iSEM.CmdFIBModeFIB())
  1361. {
  1362. return false;
  1363. }
  1364. }
  1365. else
  1366. {
  1367. return false;
  1368. }
  1369. //3. 获取分辨率
  1370. int[] ImageSize = iSEM.GetImageStore();
  1371. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1372. {
  1373. return false;
  1374. }
  1375. short width = (short)ImageSize[0];
  1376. short height = (short)ImageSize[1];
  1377. //4. 抓图
  1378. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1379. {
  1380. return false;
  1381. }
  1382. //5. 恢复初始状态
  1383. if (foldFrozen == 0)
  1384. {
  1385. if (!iSEM.ImageLive())
  1386. {
  1387. return false;
  1388. }
  1389. }
  1390. else if (foldFrozen == 1)
  1391. {
  1392. if (!iSEM.ImageFrozen())
  1393. {
  1394. return false;
  1395. }
  1396. }
  1397. return true;
  1398. }
  1399. //自动聚焦
  1400. public bool AutoFocus(string a_strPath, out int a_nWd)
  1401. {
  1402. a_nWd = 0;
  1403. a_nWd = (int)Math.Ceiling(iSEM.GetWorkingDistance() * 100000000 + 0.5);//获取当前的工作距离
  1404. return true;
  1405. }
  1406. }
  1407. }