| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663 | //时间:20200610//作者:郝爽//功能:测量线程using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using SmartSEMControl;using MeasureData;namespace MeasureThread{    public enum FMode    {        Manual,        Auto    }    public enum ImageMode    {        FIB,        SEM    }    public class Measure    {        //全局只有一个fatorySEM        static FactoryHardware factorySEM = FactoryHardware.Instance;        ISEMControl iSEM = factorySEM.ISEM;        const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正        const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点        const String ImageName3 = @"ImageFIB600X2.tif";        const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点        const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正        const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高        const float fMin = (float)0.0000002; //单位是米        //测量文件        private MeasureFile m_measureFile;        public MeasureFile MeasureFile        {            get { return this.m_measureFile; }            set { this.m_measureFile = value; }        }        //测量的切割孔        private List<MeasureData.CutHole> m_cutHoles;        public List<MeasureData.CutHole> cutHoles        {            get { return this.m_cutHoles; }            set { this.m_cutHoles = value; }        }        //工作文件夹        private string m_WorkingFolder;        public string WorkingFolder        {            get { return this.m_WorkingFolder; }            set { this.m_WorkingFolder = value; }        }        //线程状态        private ThreadStatus m_ThreadStatus;        public ThreadStatus TStatus        {            get { return this.m_ThreadStatus; }            set { this.m_ThreadStatus = value; }        }        //对焦模式        private FMode m_bFocusMode;        public FMode FocusMode        {            get { return this.m_bFocusMode; }            set { this.m_bFocusMode = FocusMode; }        }        //// SEM data general        //CSEMDataGnrPtr m_pSEMDataGnr;        ////MeasureAppFormName        //CString m_strMAppFormName;        //HWND m_hWnd;        //构造函数        public Measure()        {            Init();        }        public void Init()        {            FocusMode = FMode.Manual;        }        //初始化测量业务, 读测量文件,判断是否有可测试的切孔        public bool InitMeas(MeasureFile a_measureFile)        {            m_measureFile = a_measureFile;            List<CutHole> listHoles = m_measureFile.ListCutHole;            foreach (CutHole h in listHoles )            {                if (h.SWITCH == true)                {                    m_cutHoles.Add(h);                }            }            if(m_cutHoles.Count == 0)                return false;            return true;        }        //测量流程        public void DoMeasure()        {            //创建线程的测量状态的更新            this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);            //将这个开始时间传递给主界面            //检查硬件连接是否正常            if (!ConnectHardware())            {                this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);                return;            }            //设置工作文件夹            if (!SetWorkingFolderStr())            {                this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);                return;            }            float[] firstPosition;            for (int i = 0; i < m_cutHoles.Count; i++)            {                if (i == 0)                {                    firstPosition = iSEM.GetStagePosition();                }                else                {                }            }            //第一个孔的测试            FirstHole();            //非第一个孔的测试            OtherHole();        }        //检查硬件连接是否正常        public bool ConnectHardware()        {            //返回硬件的连接状态            return iSEM.ConnectStatus();                    }        //设置工作文件夹        public bool SetWorkingFolderStr()        {            //获取工作文件路径            string pathName = m_measureFile.FilePath;            //判断工作文件路径是否为空或无效            if (string.IsNullOrEmpty(pathName))            {                return false;            }            //文件未保存            else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)            {                return false;            }            //获取工作文件所在文件夹            string folder = System.IO.Path.GetDirectoryName(pathName);            if (string.IsNullOrEmpty(folder))            {                return false;            }            WorkingFolder += @"\\";            return false;        }        //第一个孔的测试过程        public bool FirstHole()        {            MeasureData.CutHole firstHole = m_cutHoles[0];            //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入            if (firstHole.PT == true)            {                if (!iSEM.InsertPT())                {                    return false;                }            }            //13.自动定位切割            {                //1.控制SEM放大600X                if (!iSEM.SetMagnification(600))                {                    return false;                }                //2.控制SEM自动对焦、亮度、对比度                if (FocusMode == FMode.Manual)                {                    //弹出手动对焦的窗口                }                else if (FocusMode == FMode.Auto)                {                    //调用自动对焦模块                }                else                {                    return false;                }                //3.设置SEM进行角度补偿54度                if (!TiltCorrection(54))                {                    return false;                }                //4.控制SEM拍照                //5.保存照片                {                    //1. 创建目录,已经完成                    //2. 设置图片名称                    //3. 保存图片1                    String fileName1 = WorkingFolder + ImageName1;                    if (!GetImage(ImageMode.SEM, fileName1))                    {                        return false;                    }                }                //6.设置FIB拍照参数——扫描时间、束流等                //7.控制FIB自动亮度、对比度                //8.控制FIB拍照                //9.保存照片                {                    //1. 设置图片名称                    //2. 保存图片2                    String fileName2 = WorkingFolder + ImageName2;                    if (!GetImage(ImageMode.FIB, fileName2))                    {                        return false;                    }                }                //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)                                //11.自动工具样品类型参数确定是否需要PT沉积                {                    //1. 根据客户PT沉积坐标控制FIB调整到中心位置                    //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确                    //3. 根据坐标进行PT沉积                }                //模拟为客户返回的坐标值                float x0 = 0, y0 = 0;                //12.根据梯形坐标控制FIB调整到中心位置                if (!iSEM.MoveStageXY(x0, y0))                {                    return false;                }                //13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确                float x1 = iSEM.GetStageAtX();                float y1 = iSEM.GetStageAtY();                if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)                {                    return false;                }                //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库                float[] firstPosition = iSEM.GetStagePosition();            }            //14.自动控制FIB切割            {                //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流                //2.控制FIB进行切割                //3.控制FIB拍照600X                //4.保存图片                {                    //1.设置图片名称                    //2.保存图片3                    String fileName3 = WorkingFolder + ImageName3;                    if (!GetImage(ImageMode.FIB, fileName3))                    {                        return false;                    }                }                //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警                //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻            }            //15.根据样品类型决定是否撤出PT针            if (firstHole.PT == false)            {                if (!iSEM.OutputPT())                {                    return false;                }            }            //16.自动调整SEM找到切割位置            {                //1.控制SEM放大到300倍                if (!iSEM.SetMagnification(300))                {                    return false;                }                //2.控制SEM自动对焦、亮度、对比度-接口                if (FocusMode == FMode.Manual)                {                    //弹出手动对焦的窗口                }                else if (FocusMode == FMode.Auto)                {                    //调用自动对焦模块                }                else                {                    return false;                }                //3.控制SEM拍照                String fileName4 = WorkingFolder + ImageName4;                if (!GetImage(ImageMode.SEM, fileName4))                {                    return false;                }                //4.将照片传给客户,获取偏移坐标,以及偏移角度                float x4 = 0, y4 = 0;                float angle = 0;                //5.根据坐标控制SEM移动到切孔位置,居中                if (!iSEM.MoveStageXY(x4, y4))                {                    return false;                }                if (!iSEM.SetScanRotation(angle))                {                    return false;                }                //6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确                float x5 = iSEM.GetStageAtX();                float y5 = iSEM.GetStageAtY();                if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)                {                    return false;                }            }            //17.自动控制SEM拍截面照            {                //1.控制SEM放大到指定参数大小范围,6000x                if (!iSEM.SetMagnification(6000))                {                    return false;                }                //2.控制SEM自动对焦、消像散、亮度、对比度                if (FocusMode == FMode.Manual)                {                    //弹出手动对焦的窗口                }                else if (FocusMode == FMode.Auto)                {                    //调用自动对焦模块                }                else                {                    return false;                }                //3.设置SEM角度补偿cos36度                if (!TiltCorrection(36))                {                    return false;                }                //4.控制SEM拍照                //5.保存照片4                String fileName5 = WorkingFolder + ImageName5;                if (!GetImage(ImageMode.SEM, fileName5))                {                    return false;                }                //6.将照片传给客户,获取偏移坐标                float x6 = 0, y6 = 0;                float angle1 = 0;                float mage = 10000;                //7.根据坐标控制SEM移动到分析位置                if (!iSEM.MoveStageXY(x6, y6))                {                    return false;                }                //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确                float x7 = iSEM.GetStageAtX();                float y7 = iSEM.GetStageAtY();                if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)                {                    return false;                }                //9.控制SEM平行校正,并记录校正前初始值                float foldAnagle = iSEM.GetScanRotation();                if (foldAnagle == float.NaN)                {                    return false;                }                if (!iSEM.SetScanRotation(angle1))                {                    return false;                }                //10.控制SEM放大到指定参数大小范围                if (!iSEM.SetMagnification(mage))                {                    return false;                }                //11.控制SEM自动对焦、消像散、亮度、对比度                if (FocusMode == FMode.Manual)                {                    //弹出手动对焦的窗口                }                else if (FocusMode == FMode.Auto)                {                    //调用自动对焦模块                }                else                {                    return false;                }                //12.控制SEM对分析位置拍照                String fileName6 = WorkingFolder + ImageName6;                if (!GetImage(ImageMode.SEM, fileName6))                {                    return false;                }                //13.保存照片                //14.控制SEM取消电子束校正,回到初始值                if (!iSEM.SetScanRotation(foldAnagle))                {                    return false;                }            }            //18.自动层高分析            {                //1.获取SEM Pixel Size给客户传入参数                if (iSEM.GetPixelSize() == float.NaN)                {                    return false;                }                //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据            }            //19.自动能谱分析            {                //1. 确定能谱位置                //2. 控制牛津打能谱                //3. 能谱分析——面扫+线扫描            }            return true;        }        //非第一个孔的测试过程        public void OtherHole()        {            for (int i = 1; i < m_cutHoles.Count; i++)            {                CutHole currentHole = m_cutHoles[i];                //1. 初始化                {                    //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻                    //读取图像冻结状态                    float ffrozen = iSEM.GetImageFrozen();                    if (ffrozen == float.NaN)                    {                        return;                    }                    //2. 调节样品1号孔的样品台6轴坐标                    //3. 将样品1号孔坐标2存入数据库                    //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变                    if (!iSEM.SetStageGotoT(0))                    {                        return;                    }                    //5. 获取光镜2号孔XY坐标                    //6. 根据光镜坐标控制样品台移动                    //7. 控制样品台,调整T轴54度、M/Z/R轴不变                }                //2. 定位切割                {                    //1. 拉直操作                    {                        //1.1 控制SEM进行拍照                        //1.2 图片传给客户,返回偏移角度                        //1.3 根据返回角度,控制样品台转动                    }                    //2. 与1号孔13步相同                }                //3. 以后步骤与1号孔以后步骤一致            }        }        //角度补偿        public bool TiltCorrection(float a_fAngle)        {            //记录原来电镜的状态            bool bTilt = false;            float fOldTilt = iSEM.GetTiltCorrection();            if (fOldTilt == float.NaN)            {                return false;            }            else if (fOldTilt == 1)            {                bTilt = true;            }            else if (fOldTilt == 0)            {                bTilt = false;            }            float fOldAngle = iSEM.GetTiltAngle();            if (fOldAngle == float.NaN)            {                return false;            }            //开启校正            if (!iSEM.SetTiltCorrectionOn())            {                return false;            }            //设置校正角度            if (!iSEM.SetTiltAngle(fOldAngle))            {                return false;            }            //恢复原始状态            if (!iSEM.SetTiltAngle(a_fAngle))            {                return false;            }            if (bTilt)            {                if (!iSEM.SetTiltCorrectionOn())                {                    return false;                }            }            else            {                if (!iSEM.SetTiltCorrectionOff())                {                    return false;                }            }            return true;        }        //拍图        public bool GetImage(ImageMode a_mode, String a_fileName)        {            //1. 图像解冻            float foldFrozen = iSEM.GetImageFrozen();            if (foldFrozen == float.NaN)            {                return false;            }            if (!iSEM.ImageLive())            {                return false;            }            //2. 确认图像模式            if (ImageMode.SEM == a_mode)            {                if (!iSEM.CmdFIBModeSEM())                {                    return false;                }            }            else if (ImageMode.FIB == a_mode)            {                if (!iSEM.CmdFIBModeFIB())                {                    return false;                }            }            else            {                return false;            }            //3. 获取分辨率            int[] ImageSize = iSEM.GetImageStore();            if (ImageSize[0] == 0 || ImageSize[1] == 0)            {                return false;            }            short width = (short)ImageSize[0];            short height = (short)ImageSize[1];            //4. 抓图            if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))            {                return false;            }            //5. 恢复初始状态            if (foldFrozen == 0)            {                if (!iSEM.ImageLive())                {                    return false;                }            }            else if (foldFrozen == 1)            {                if (!iSEM.ImageFrozen())                {                    return false;                }            }            return true;        }    }}
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