Measure.cs 255 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. NLog.Logger log;
  321. #region 变量定义
  322. //Web接口类
  323. public WebResult wr = null;
  324. //SmartSEM远程路径
  325. public String RemoteELYPath = "";
  326. public String RemoteMLFPath = "";
  327. //扫描周期
  328. private float cycle_time = 0;
  329. //人工干预
  330. public int hand_intervene = 2;
  331. //样品台保护值
  332. public float X_Min = 0;
  333. public float X_Max = 0.13f;
  334. public float Y_Min = 0;
  335. public float Y_Max = 0.13f;
  336. public float Z_Min = 0;
  337. public float Z_Max = 0.05f;
  338. public float T_Min = -4;
  339. public float T_Max = 70;
  340. public float R_Min = -380;
  341. public float R_Max = 380;
  342. public float M_Min = 0;
  343. public float M_Max = 0.012f;
  344. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  345. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  346. //定义一个全局的消息类
  347. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  348. //全局只有一个fatorySEM
  349. static FactoryHardware factorySEM = FactoryHardware.Instance;
  350. ISEMControl iSEM = factorySEM.ISEM;
  351. //@的作用是不用转义字符\\只打一个就行
  352. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  354. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  355. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  356. const String ImageName31 = @"FIBBefore.tif";
  357. const String ImageName32 = @"FIBAfter.tif";
  358. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  359. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  360. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  361. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  362. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  364. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  365. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  366. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  367. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  368. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  369. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  370. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  371. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  372. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  373. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  374. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  375. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  376. const String ElyDeposition = @"Deposition.ely"; //沉积
  377. const String ElyCrossSection = @"CrossSection.ely"; //切割
  378. const float fMin = (float)0.0000002; //单位是米
  379. const float fSateyZ = (float)0.03;//单位是米
  380. public Boolean key_stop = false;
  381. String focus_path = "";
  382. String FIBfocus_path = "";
  383. String StigX_path = "";
  384. String StigY_path = "";
  385. String EDS_path = "";
  386. String data_path = "";
  387. int m_nWorkHoleNo = -1;
  388. //测量文件
  389. private MeasureFile m_measureFile;
  390. public MeasureFile MeasureFile
  391. {
  392. get { return this.m_measureFile; }
  393. set { this.m_measureFile = value; }
  394. }
  395. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  396. private List<MeasureData.CutHole> m_cutHoles;
  397. public List<MeasureData.CutHole> cutHoles
  398. {
  399. get { return this.m_cutHoles; }
  400. set { this.m_cutHoles = value; }
  401. }
  402. public MeasureParam MParam//测量参数对象
  403. {
  404. get { return this.m_measureFile.MParam; }
  405. //set { this.m_measureParam = value; }
  406. }
  407. //工作文件夹
  408. private string m_WorkingFolder;
  409. public string WorkingFolder
  410. {
  411. get { return this.m_WorkingFolder; }
  412. set { this.m_WorkingFolder = value; }
  413. }
  414. //程序当前路径
  415. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  416. //线程状态
  417. private ThreadStatus m_ThreadStatus;
  418. public ThreadStatus TStatus
  419. {
  420. get { return this.m_ThreadStatus; }
  421. set { this.m_ThreadStatus = value; }
  422. }
  423. #endregion
  424. //构造函数
  425. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  426. {
  427. log = NLog.LogManager.GetCurrentClassLogger();
  428. TStatus = new ThreadStatus();
  429. cutHoles = new List<MeasureData.CutHole>();
  430. //配置远程连接
  431. wr = new WebResult(webServerIP, webServerPort, webServerUrl);
  432. }
  433. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  434. public bool InitMeas(MeasureFile a_measureFile)
  435. {
  436. log.Info("进入初始化函数");
  437. m_measureFile = a_measureFile;
  438. List<CutHole> listHoles = m_measureFile.ListCutHole;
  439. foreach (CutHole h in listHoles)
  440. {
  441. if (h.SWITCH == true)
  442. {
  443. m_cutHoles.Add(h);
  444. }
  445. }
  446. if (m_cutHoles.Count == 0)
  447. return false;
  448. if (MParam.EDS == true)
  449. {
  450. log.Info("进行能谱分析,初始化Xray数据库", true);
  451. Init_MeasDB();
  452. }
  453. return true;
  454. }
  455. //给前台UI发送消息步骤
  456. public void SendMsg(string step_code)
  457. {
  458. arg.Step_Code = step_code;
  459. arg.Time = DateTime.Now;
  460. SendThreadStatus(this, arg);
  461. }
  462. //给前台UI发送孔状态信息
  463. public void SendCutHoleMsg(string a_state, string a_holeName)
  464. {
  465. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  466. arg.HoleName = a_holeName;
  467. arg.State = a_state;
  468. SendCutHolesStatus(this, arg);
  469. }
  470. //测量流程
  471. public void DoMeasure()
  472. {
  473. //创建线程的测量状态的更新
  474. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  475. //检查硬件连接是否正常
  476. log.Warn("测量线程:开始连接硬件...", true);
  477. if (!ConnectHardware())
  478. {
  479. MessageBox.Show("连接电镜失败!", "重要错误", MessageBoxButtons.OK, MessageBoxIcon.Error);
  480. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  481. log.Error("测量线程报错:连接硬件硬件连接失败", false);
  482. return;
  483. }
  484. //设置工作文件夹
  485. SetWorkingFolderStr();
  486. //设置SmartSEM远程路径
  487. iSEM.SetRemoteELYPath(RemoteELYPath);
  488. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  489. //增加EDS控制
  490. //将停止键复位
  491. key_stop = false;
  492. //开始测量就将模式设置为SEM
  493. log.Info("测量线程:开始切换到SEM模式", true);
  494. if (!iSEM.CmdFIBModeSEM())
  495. {
  496. log.Error("测量线程报错:开始切换到SEM模式失败。", false);
  497. return;
  498. }
  499. arg.Picture_Information.Work_Status = "SEM";
  500. //设置扫描周期
  501. log.Info("测量线程:设置电镜图像扫描周期为对焦接口程序适合的扫描周期", true);
  502. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  503. Thread.Sleep(200);
  504. cycle_time = iSEM.GetCycleTime();
  505. if (cycle_time == 0)
  506. {
  507. log.Error("测量线程报错:获取扫描周期时间失败", false);
  508. return;
  509. }
  510. Thread.Sleep((int)cycle_time + 100);
  511. //开始做各个孔的检测
  512. for (int i = 0; i < m_cutHoles.Count; i++)
  513. {
  514. //自动亮度对比度
  515. log.Info("测量线程:开启自动亮度,对比度调节", true);
  516. iSEM.SetAutoBright(100);
  517. Thread.Sleep(200);
  518. iSEM.SetAutoContrast(100);
  519. Thread.Sleep(200);
  520. //log.Info("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  521. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  522. {
  523. log.Error("测量线程报错:开始设置自动亮度、对比度失败。", false);
  524. return;
  525. }
  526. Thread.Sleep(5000);
  527. log.Warn("测量线程:测试第" + i.ToString() + "个分析点。", true);
  528. //记录测量序号和孔名
  529. m_nWorkHoleNo = i;
  530. arg.HoleName = m_cutHoles[i].HoleName;
  531. //最终数据存放目录
  532. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  533. //对焦数据存放目录
  534. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  535. MParam.AutoFocus.Path = focus_path;
  536. if (!Directory.Exists(focus_path))
  537. {
  538. Directory.CreateDirectory(focus_path);
  539. }
  540. //StigX数据存放目录
  541. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  542. MParam.AutoStigX.Path = StigX_path;
  543. if (!Directory.Exists(StigX_path))
  544. {
  545. Directory.CreateDirectory(StigX_path);
  546. }
  547. //StigY数据存放目录
  548. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  549. MParam.AutoStigY.Path = StigY_path;
  550. if (!Directory.Exists(StigY_path))
  551. {
  552. Directory.CreateDirectory(StigY_path);
  553. }
  554. //EDS数据存放路径
  555. if (MParam.EDS == true)
  556. {
  557. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  558. MParam.EDSParam.Path = EDS_path;
  559. if (!Directory.Exists(EDS_path))
  560. {
  561. Directory.CreateDirectory(EDS_path);
  562. }
  563. }
  564. //判断孔状态
  565. if (m_cutHoles[i].STATE != State.Ready)
  566. {
  567. log.Warn("测试孔" + m_cutHoles[i].HoleName + "状态非就绪,不予测量。", true);
  568. continue;
  569. }
  570. //20201127增加Scanrotate Off
  571. iSEM.SetScanRotationOff();
  572. Thread.Sleep(200);
  573. //20.光束等复位
  574. iSEM.SetBeamShiftX(0);
  575. Thread.Sleep(200);
  576. iSEM.SetBeamShiftY(0);
  577. Thread.Sleep(200);
  578. //开始循环工作
  579. if (i == 0)
  580. {
  581. log.Warn("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  582. m_cutHoles[i].START = DateTime.Now;
  583. //切孔操作-开始
  584. m_cutHoles[i].STATE = State.InProcess;
  585. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  586. log.Warn("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  587. + m_cutHoles[0].Position.X.ToString() + ","
  588. + m_cutHoles[0].Position.Y.ToString() + ","
  589. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  590. #region 坐标恢复
  591. //0、先移动Z轴到比较低的位置上。
  592. if (MParam.Tilt)//如果是倾斜样品台,移动Z轴
  593. {
  594. if (!iSEM.SetStageGotoZ(fSateyZ))
  595. {
  596. arg.State = false;
  597. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  598. SendMsg("0-0");
  599. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  600. m_cutHoles[i].STATE = State.Failed;
  601. m_cutHoles[i].END = DateTime.Now;
  602. m_measureFile.Save();
  603. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  604. Thread.Sleep(3000);
  605. continue;
  606. }
  607. while (true)
  608. {
  609. Thread.Sleep(4000);
  610. if (iSEM.GetStageIs() == 0)
  611. {
  612. break;
  613. }
  614. }
  615. //判断是否停止进程
  616. if (key_stop)
  617. {
  618. m_cutHoles[i].STATE = State.Failed;
  619. m_cutHoles[i].END = DateTime.Now;
  620. m_measureFile.Save();
  621. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  622. log.Info("停止键被按下", true);
  623. return;
  624. }
  625. }
  626. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  627. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  628. {
  629. arg.State = false;
  630. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  631. SendMsg("0-0");
  632. log.Error("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  633. m_cutHoles[i].STATE = State.Failed;
  634. m_cutHoles[i].END = DateTime.Now;
  635. m_measureFile.Save();
  636. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  637. Thread.Sleep(3000);
  638. continue;
  639. }
  640. while (true)
  641. {
  642. Thread.Sleep(4000);
  643. if (iSEM.GetStageIs() == 0)
  644. {
  645. break;
  646. }
  647. }
  648. //判断是否停止进程
  649. if (key_stop)
  650. {
  651. m_cutHoles[i].STATE = State.Failed;
  652. m_cutHoles[i].END = DateTime.Now;
  653. m_measureFile.Save();
  654. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  655. log.Info("停止键被按下", true);
  656. return;
  657. }
  658. //2、移动XY轴
  659. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  660. {
  661. arg.State = false;
  662. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  663. SendMsg("0-0");
  664. log.Error("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  665. + m_cutHoles[0].Position.X.ToString() + ","
  666. + m_cutHoles[0].Position.Y.ToString() + ")", false);
  667. m_cutHoles[i].STATE = State.Failed;
  668. m_cutHoles[i].END = DateTime.Now;
  669. m_measureFile.Save();
  670. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  671. Thread.Sleep(3000);
  672. continue;
  673. }
  674. while (true)
  675. {
  676. Thread.Sleep(4000);
  677. if (iSEM.GetStageIs() == 0)
  678. {
  679. break;
  680. }
  681. }
  682. //判断是否停止进程
  683. if (key_stop)
  684. {
  685. m_cutHoles[i].STATE = State.Failed;
  686. m_cutHoles[i].END = DateTime.Now;
  687. m_measureFile.Save();
  688. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  689. log.Info("停止键被按下", true);
  690. return;
  691. }
  692. //3、恢复Z轴
  693. if (MParam.Tilt)
  694. {
  695. //恢复Z轴
  696. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  697. {
  698. arg.State = false;
  699. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  700. SendMsg("0-0");
  701. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  702. m_cutHoles[i].STATE = State.Failed;
  703. m_cutHoles[i].END = DateTime.Now;
  704. m_measureFile.Save();
  705. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  706. Thread.Sleep(3000);
  707. continue;
  708. }
  709. while (true)
  710. {
  711. Thread.Sleep(4000);
  712. if (iSEM.GetStageIs() == 0)
  713. {
  714. break;
  715. }
  716. }
  717. //判断是否停止进程
  718. if (key_stop)
  719. {
  720. log.Info("停止键按下。", true);
  721. m_cutHoles[i].STATE = State.Failed;
  722. m_cutHoles[i].END = DateTime.Now;
  723. m_measureFile.Save();
  724. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  725. return;
  726. }
  727. }
  728. arg.State = true;
  729. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  730. SendMsg("0-0");
  731. //4、设置WD
  732. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  733. Thread.Sleep(1000);
  734. #endregion
  735. //第一个点开始测量
  736. if (FirstHole())
  737. {
  738. //保存文件,将测量状态更改
  739. m_cutHoles[i].STATE = State.Success;
  740. m_cutHoles[i].END = DateTime.Now;
  741. m_measureFile.Save();
  742. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  743. }
  744. //失败
  745. else
  746. {
  747. m_cutHoles[i].STATE = State.Failed;
  748. m_cutHoles[i].END = DateTime.Now;
  749. m_measureFile.Save();
  750. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  751. }
  752. }
  753. else
  754. {
  755. //其他孔的测量
  756. log.Info("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  757. m_cutHoles[i].START = DateTime.Now;
  758. m_cutHoles[i].STATE = State.InProcess;
  759. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  760. //其他孔测量之前的初始化
  761. if (!OtherHole_Init())
  762. {
  763. arg.State = false;
  764. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  765. SendMsg("0-0");
  766. Thread.Sleep(3000);
  767. log.Info("测量线程:" + arg.Message, true);
  768. continue;
  769. }
  770. arg.State = true;
  771. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  772. SendMsg("0-0");
  773. //其他孔开始测量
  774. if (OtherHole())
  775. {
  776. //保存文件,将测量状态更改
  777. m_cutHoles[i].STATE = State.Success;
  778. m_cutHoles[i].END = DateTime.Now;
  779. m_measureFile.Save();
  780. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  781. }
  782. //失败
  783. else
  784. {
  785. m_cutHoles[i].STATE = State.Failed;
  786. m_cutHoles[i].END = DateTime.Now;
  787. m_measureFile.Save();
  788. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  789. }
  790. }
  791. if (key_stop)
  792. {
  793. m_cutHoles[i].END = DateTime.Now;
  794. m_cutHoles[i].STATE = State.Ready;
  795. m_measureFile.Save();
  796. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  797. arg.Message = "用户停止测量";
  798. SendMsg("0-0");
  799. break;
  800. }
  801. //两个点之间更换,加延时以便完成显示
  802. Thread.Sleep(3000);
  803. }
  804. }
  805. //检查硬件连接是否正常
  806. public bool ConnectHardware()
  807. {
  808. //返回硬件的连接状态
  809. return iSEM.ConnectStatus();
  810. }
  811. //设置工作文件夹
  812. public bool SetWorkingFolderStr()
  813. {
  814. WorkingFolder = m_measureFile.FilePath;
  815. return true;
  816. }
  817. //插入PT针
  818. public bool InsertPT()
  819. {
  820. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  821. //SendMsg("调用宏插入PT针宏文件" + fn);
  822. iSEM.CMDMCFFilename(fn);
  823. //延时1s??
  824. Thread.Sleep(1000);
  825. return true;
  826. }
  827. //撤出PT针
  828. public bool RetractPT()
  829. {
  830. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  831. //SendMsg("调用宏撤出PT针宏文件" + fn);
  832. iSEM.CMDMCFFilename(fn);
  833. //延时1s??
  834. Thread.Sleep(1000);
  835. return true;
  836. }
  837. //PT沉积
  838. public bool PTWork()
  839. {
  840. //执行PT沉积的ELY文件
  841. if (!ExcuteEly(MParam.PTTemp))
  842. {
  843. return false;
  844. }
  845. //等待沉积完成
  846. while (true)
  847. {
  848. Thread.Sleep(7000);
  849. if (iSEM.GetFIBMode() == 0)
  850. {
  851. break;
  852. }
  853. }
  854. return true;
  855. }
  856. //FIB切割
  857. public bool FIBWork()
  858. {
  859. //执行PT沉积的ELY文件
  860. if (!ExcuteEly(MParam.FIBTemp))
  861. {
  862. return false;
  863. }
  864. //等待切割完成
  865. while (true)
  866. {
  867. Thread.Sleep(10000);
  868. if (iSEM.GetFIBMode() == 0)
  869. {
  870. break;
  871. }
  872. }
  873. return true;
  874. }
  875. //执行ELY文件的步骤
  876. public bool ExcuteEly(string a_filename)
  877. {
  878. //执行ELy文件有三个动作
  879. //1. 选择ELY文件
  880. //SendMsg("选择ELY文件");
  881. if (!iSEM.CmdFIBLoadELY(a_filename))
  882. {
  883. //SendMsg("选择ELY文件失败");
  884. return false;
  885. }
  886. Thread.Sleep(1000);
  887. //2. 确认ELY文件
  888. //SendMsg("确认ELY文件");
  889. if (!iSEM.CmdFIBEXPOSUREELY())
  890. {
  891. //SendMsg("确认ELY文件失败");
  892. return false;
  893. }
  894. Thread.Sleep(1000);
  895. //3. 执行ELY文件
  896. //SendMsg("执行ELY文件");
  897. if (!iSEM.CmdFIBSTARTELY())
  898. {
  899. //SendMsg("执行ELY文件失败");
  900. return false;
  901. }
  902. Thread.Sleep(1000);
  903. return true;
  904. }
  905. /// <summary>
  906. ///13. 自动 定位功能,沉积
  907. /// </summary>
  908. /// <returns></returns>
  909. public bool GetPoistion()
  910. {
  911. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  912. int state = 1;
  913. log.Info("测量线程:13.自动定位、沉积-功能自动定位电压" + MParam.Location_Voltage.ToString() + "自动定位放大倍数" + MParam.Location_Magnification.ToString(), true);
  914. Thread.Sleep(200);
  915. //1.控制SEM放大600X
  916. if (!iSEM.SetSEMVoltage(MParam.Location_Voltage))
  917. {
  918. arg.Message = "电压设置" + MParam.Location_Voltage.ToString("0.0") + "失败";
  919. arg.State = false;
  920. SendMsg("2-0");
  921. log.Error("测量线程报错:13.自动定位、沉积-自动定位电压" + MParam.Location_Voltage.ToString() + "控制失败", false);
  922. return false;
  923. }
  924. Thread.Sleep(200);
  925. if (!iSEM.SetMagnification(MParam.Location_Magnification))
  926. {
  927. arg.Message = "放大" + MParam.Location_Magnification.ToString("0.0") + "倍失败";
  928. arg.State = false;
  929. SendMsg("2-0");
  930. log.Error("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + MParam.Location_Magnification.ToString() + "控制失败", false);
  931. return false;
  932. }
  933. float current = iSEM.GetMagnification();
  934. while (Math.Abs(current - MParam.Location_Magnification) > 1)
  935. {
  936. iSEM.SetMagnification(MParam.Location_Magnification);
  937. Thread.Sleep(200);
  938. current = iSEM.GetMagnification();
  939. }
  940. arg.State = true;
  941. arg.Message = "放大" + MParam.Location_Magnification.ToString("0.0") + "倍成功";
  942. SendMsg("2-0");
  943. //判断是否停止进程
  944. if (key_stop)
  945. {
  946. log.Info("停止键按下。", true);
  947. return false;
  948. }
  949. //判断是否为仅拍照,不是则执行FIB操作
  950. if (!MParam.Is_Photograph)
  951. {
  952. log.Info("测量线程:切换到FIB模式。", true);
  953. //6.设置FIB拍照参数——扫描时间、束流等
  954. //7.控制FIB自动亮度、对比度
  955. Thread.Sleep(200);
  956. if (!iSEM.CmdFIBModeFIB())
  957. {
  958. arg.Message = "FIB模式切换失败";
  959. arg.State = false;
  960. SendMsg("2-1");
  961. log.Error("测量线程报错:切换到FIB模式失败。", false);
  962. return false;
  963. }
  964. arg.State = true;
  965. arg.Picture_Information.Work_Status = "FIB";
  966. arg.Message = "FIB模式切换成功";
  967. SendMsg("2-1");
  968. Thread.Sleep(1000);
  969. //判断是否停止进程
  970. if (key_stop)
  971. {
  972. log.Info("停止键按下。", true);
  973. return false;
  974. }
  975. //8.控制FIB拍照
  976. //9.保存照片======更改路径
  977. //20201103,FIB使用定位的放大倍数
  978. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  979. arg.Picture_Information.Picture_FullPath = fileName2;
  980. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  981. Thread.Sleep(200);
  982. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  983. Thread.Sleep(200);
  984. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  985. Thread.Sleep(200);
  986. //FIB的放大位数,将来会改
  987. log.Info("测量线程:设置FIB放大倍数" + MParam.Location_Magnification.ToString(), true);
  988. //20201103,FIB使用定位的放大倍数
  989. if (!iSEM.SetFIBMagnification(MParam.Location_Magnification))
  990. {
  991. arg.Message = "FIB放大倍数设置失败";
  992. arg.State = false;
  993. SendMsg("2-2");
  994. log.Error("测量线程失败:FIB放大倍数设置失败。", false);
  995. return false;
  996. }
  997. arg.Message = "FIB放大倍数设置成功";
  998. arg.State = true;
  999. SendMsg("2-2");
  1000. Thread.Sleep(200);
  1001. //判断是否停止进程
  1002. if (key_stop)
  1003. {
  1004. log.Info("停止键按下。", true);
  1005. return false;
  1006. }
  1007. //4、设置WD
  1008. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1009. Thread.Sleep(1000);
  1010. //20201127增加自动亮度对比度
  1011. if (MParam.FIBDo)
  1012. {
  1013. if (MParam.FIBAutoBC)
  1014. {
  1015. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1016. float m_TempBrightness = 50.0f;
  1017. float m_TempContrast = 30.0f;
  1018. if (MParam.SampleName == "3" || MParam.SampleName == "1")
  1019. {
  1020. m_TempBrightness = 50.0f;
  1021. m_TempContrast = 30.0f;
  1022. iSEM.SetAutoVideoOff();
  1023. Thread.Sleep(200);
  1024. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1025. Thread.Sleep(200);
  1026. iSEM.SetContrast(m_TempContrast); //30.0f
  1027. Thread.Sleep(200);
  1028. }
  1029. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1030. {
  1031. iSEM.SetAutoVideoBrightnessAndContrast();
  1032. //20201128陈工建议增加
  1033. Thread.Sleep(200);
  1034. iSEM.SetAutoBright(100);
  1035. Thread.Sleep(200);
  1036. iSEM.SetAutoContrast(100);
  1037. Thread.Sleep(5000);
  1038. }
  1039. }
  1040. else
  1041. {
  1042. iSEM.SetAutoVideoOff();
  1043. Thread.Sleep(200);
  1044. iSEM.SetBrightness(MParam.FIBB);
  1045. Thread.Sleep(200);
  1046. iSEM.SetContrast(MParam.FIBC);
  1047. Thread.Sleep(200);
  1048. }
  1049. }
  1050. //拍照前改变速度,延时
  1051. iSEM.CloseReduced();
  1052. Thread.Sleep(200);
  1053. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1054. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1055. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1056. Thread.Sleep(200);
  1057. cycle_time = iSEM.GetCycleTime();
  1058. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1059. if (!GetImage(fileName2))
  1060. {
  1061. arg.Message = "FIB拍照失败";
  1062. arg.State = false;
  1063. SendMsg("2-3");
  1064. log.Error("测量线程报错:FIB拍照失败。", false);
  1065. return false;
  1066. }
  1067. arg.State = true;
  1068. arg.Picture_Information.Picture_FullPath = fileName2;
  1069. arg.Message = "FIB拍照成功";
  1070. SendMsg("2-3");
  1071. Thread.Sleep(200);
  1072. //SendMsg("1-16");
  1073. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1074. Thread.Sleep(200);
  1075. cycle_time = iSEM.GetCycleTime();
  1076. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1077. //判断是否停止进程
  1078. if (key_stop)
  1079. {
  1080. log.Info("停止键按下。", true);
  1081. return false;
  1082. }
  1083. iSEM.CmdFIBModeSEM();
  1084. Thread.Sleep(200);
  1085. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1086. log.Info("测量线程:调用图像处理接口,准备移动样品台", true);
  1087. log.Info("文件名=" + fileName2, true);
  1088. log.Info("样品类型=" + MParam.SampleName, true);
  1089. log.Info("供应商名称=" + MParam.Firm, true);
  1090. wr.Img_Cut_Position(fileName2, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1091. log.Info("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString() + ")", true);
  1092. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1093. if (state == 1)
  1094. {
  1095. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1096. float xc = (x1 + x2) / 2;
  1097. float yc = (y1 + y2) / 2;
  1098. x0 = xc - 512;
  1099. y0 = 384 - yc;
  1100. log.Info("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1101. px = iSEM.GetPixelSize();
  1102. //修改FIB切割的ELY文件坐标
  1103. XmlDocument xmlDoc = new XmlDocument();
  1104. xmlDoc.Load(MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1105. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1106. if (xns != null)
  1107. {
  1108. XmlAttributeCollection attributeCol = xns.Attributes;
  1109. //遍历自己点属性
  1110. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1111. log.Info("XML-Width_a = " + width_a.ToString(), true);
  1112. foreach (XmlAttribute attri in attributeCol)
  1113. {
  1114. if (attri.Name == "x")
  1115. {
  1116. attri.InnerText = ((x0 * px) * 1000000 - width_a).ToString();
  1117. log.Info("XML-TopLeft-X = " + attri.InnerText, true);
  1118. }
  1119. else if (attri.Name == "y")
  1120. {
  1121. attri.InnerText = ((y0 * px) * 1000000 - 2.791).ToString();
  1122. log.Info("XML-TopLeft-Y = " + attri.InnerText, true);
  1123. }
  1124. }
  1125. }
  1126. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1127. if (xns != null)
  1128. {
  1129. XmlAttributeCollection attributeCol = xns.Attributes;
  1130. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1131. //遍历自己点属性
  1132. foreach (XmlAttribute attri in attributeCol)
  1133. {
  1134. if (attri.Name == "x")
  1135. {
  1136. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1137. }
  1138. else if (attri.Name == "y")
  1139. {
  1140. attri.InnerText = (((y0 * px) * 1000000) + 2 - 2.791).ToString();
  1141. }
  1142. }
  1143. }
  1144. xmlDoc.Save(MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1145. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1146. if (MParam.PT)
  1147. {
  1148. xmlDoc = new XmlDocument();
  1149. xmlDoc.Load(MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1150. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1151. if (xns != null)
  1152. {
  1153. XmlAttributeCollection attributeCol = xns.Attributes;
  1154. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1155. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1156. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1157. //遍历自己点属性
  1158. foreach (XmlAttribute attri in attributeCol)
  1159. {
  1160. if (attri.Name == "x")
  1161. {
  1162. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1163. }
  1164. else if (attri.Name == "y")
  1165. {
  1166. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1167. }
  1168. }
  1169. }
  1170. xmlDoc.Save(MParam.PTTemp);
  1171. }
  1172. if (hand_intervene == 1)
  1173. {
  1174. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1175. }
  1176. }
  1177. else
  1178. {
  1179. arg.Message = "图像接口参数state返回值为零";
  1180. arg.State = false;
  1181. //SendMsg("1-12");
  1182. if (hand_intervene == 1)
  1183. {
  1184. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1185. {
  1186. return false;
  1187. }
  1188. }
  1189. else
  1190. {
  1191. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1192. return false;
  1193. }
  1194. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1195. return false;
  1196. }
  1197. //判断是否停止进程
  1198. if (key_stop)
  1199. {
  1200. log.Info("停止键按下", true);
  1201. return false;
  1202. }
  1203. //11.自动工具样品类型参数确定是否需要PT沉积
  1204. if (MParam.PT)
  1205. {
  1206. if (!iSEM.CmdFIBModeFIB())
  1207. {
  1208. log.Error("测量线程报错:切换到SEM模式失败", false);
  1209. return false;
  1210. }
  1211. Thread.Sleep(200);
  1212. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1213. if (MParam.Is_Photograph == false && MParam.PT == true)
  1214. {
  1215. log.Info("测量线程:插入PT针" + arg.Message, true);
  1216. if (!InsertPT())
  1217. {
  1218. arg.Message = "插入PT针失败";
  1219. arg.State = false;
  1220. SendMsg("2-4");
  1221. log.Error("测量线程报错:" + arg.Message, false);
  1222. return false;
  1223. }
  1224. arg.State = true;
  1225. arg.Message = "插入PT针成功";
  1226. SendMsg("2-4");
  1227. }
  1228. //判断是否停止进程
  1229. if (key_stop)
  1230. {
  1231. log.Info("停止键按下", true);
  1232. return false;
  1233. }
  1234. //3. 根据坐标进行PT沉积
  1235. if (!PTWork())
  1236. {
  1237. arg.Message = "PT沉积失败";
  1238. arg.State = false;
  1239. SendMsg("2-5");
  1240. log.Error("测量线程报错:" + arg.Message, false);
  1241. return false;
  1242. }
  1243. arg.State = true;
  1244. arg.Message = "PT沉积成功";
  1245. SendMsg("2-5");
  1246. //判断是否停止进程
  1247. if (key_stop)
  1248. {
  1249. log.Info("停止键按下", true);
  1250. return false;
  1251. }
  1252. //15.根据样品类型决定是否撤出PT针
  1253. if (MParam.Is_Photograph == false && MParam.PT == true)
  1254. {
  1255. if (!RetractPT())
  1256. {
  1257. arg.Message = "撤出PT针失败";
  1258. arg.State = false;
  1259. SendMsg("2-6");
  1260. log.Error("测量线程报错:" + arg.Message, false);
  1261. return false;
  1262. }
  1263. arg.State = true;
  1264. arg.Message = "撤出PT针成功";
  1265. SendMsg("2-6");
  1266. }
  1267. //判断是否停止进程
  1268. if (key_stop)
  1269. {
  1270. log.Info("停止键按下", true);
  1271. return false;
  1272. }
  1273. if (!iSEM.CmdFIBModeSEM())
  1274. {
  1275. //arg.Message = "切割前SEM拍照失败。";
  1276. //arg.State = false;
  1277. //SendMsg("1-17");
  1278. log.Error("测量线程报错:切换到SEM模式失败", false);
  1279. return false;
  1280. }
  1281. }
  1282. }
  1283. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1284. float[] firstPosition = iSEM.GetStagePosition();
  1285. m_cutHoles[0].Position.X = firstPosition[0];
  1286. m_cutHoles[0].Position.Y = firstPosition[1];
  1287. m_cutHoles[0].Position.Z = firstPosition[2];
  1288. m_cutHoles[0].Position.T = firstPosition[3];
  1289. m_cutHoles[0].Position.R = firstPosition[4];
  1290. m_cutHoles[0].Position.M = firstPosition[5];
  1291. //这里要调用文件保存功能
  1292. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1293. + firstPosition[1].ToString() + ","
  1294. + firstPosition[2].ToString() + ","
  1295. + firstPosition[3].ToString() + ","
  1296. + firstPosition[4].ToString() + ","
  1297. + firstPosition[5].ToString() + ")";
  1298. arg.State = true;
  1299. //SendMsg("1-16");
  1300. //判断是否停止进程
  1301. if (key_stop)
  1302. {
  1303. log.Info("停止键按下", true);
  1304. return false;
  1305. }
  1306. return true;
  1307. }
  1308. /// <summary>
  1309. /// 14. FIB切割
  1310. /// </summary>
  1311. /// <returns></returns>
  1312. public bool FIBCross()
  1313. {
  1314. int state = 0;
  1315. #if CHECK
  1316. float mag = MParam.Location_Magnification / 3;
  1317. if (mag < 200)
  1318. {
  1319. mag = 200;
  1320. }
  1321. String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
  1322. iSEM.SetMagnification(mag);
  1323. Thread.Sleep(2000);
  1324. iSEM.CmdSaveRate();
  1325. Thread.Sleep(200);
  1326. cycle_time = iSEM.GetCycleTime();
  1327. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1328. if (!GetImage(fileName1))
  1329. {
  1330. arg.Message = "切割前SEM拍照失败。";
  1331. arg.State = false;
  1332. SendMsg("1-17");
  1333. log.Info("测量线程报错:SEM切割前图像拍照失败", false);
  1334. return false;
  1335. }
  1336. iSEM.CmdFocusRate();
  1337. Thread.Sleep(200);
  1338. cycle_time = iSEM.GetCycleTime();
  1339. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1340. arg.Message = "切割前SEM拍照成功。";
  1341. arg.Picture_Information.Picture_FullPath = fileName1;
  1342. arg.State = true;
  1343. SendMsg("1-17");
  1344. #endif
  1345. if (!iSEM.CmdFIBModeFIB())
  1346. {
  1347. arg.Message = "切换到FIB模式失败。";
  1348. arg.State = false;
  1349. SendMsg("2-7");
  1350. log.Error("测量线程报错:切换到SEM模式失败", false);
  1351. return false;
  1352. }
  1353. arg.Message = "切换到FIB模式成功。";
  1354. arg.State = true;
  1355. SendMsg("2-7");
  1356. Thread.Sleep(1000);
  1357. iSEM.SetMagnification(MParam.Location_Magnification);
  1358. float current = iSEM.GetMagnification();
  1359. while (Math.Abs(current - MParam.Location_Magnification) > 1)
  1360. {
  1361. iSEM.SetMagnification(MParam.Location_Magnification);
  1362. Thread.Sleep(200);
  1363. current = iSEM.GetMagnification();
  1364. }
  1365. Thread.Sleep(2000);
  1366. //14.自动控制FIB切割
  1367. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1368. //2.控制FIB进行切割
  1369. //以上1、2步全部用ELY文件代替
  1370. if (!FIBWork())
  1371. {
  1372. arg.Message = "FIB切割失败";
  1373. arg.State = false;
  1374. SendMsg("2-8");
  1375. log.Error("测量线程报错:" + arg.Message, false);
  1376. return false;
  1377. }
  1378. arg.State = true;
  1379. arg.Message = "FIB切割成功";
  1380. SendMsg("2-8");
  1381. Thread.Sleep(300);
  1382. //判断是否停止进程
  1383. if (key_stop)
  1384. {
  1385. log.Info("停止键按下", true);
  1386. return false;
  1387. }
  1388. //做切割后SEM的拍照
  1389. log.Info("测量线程:切割后SEM拍照", true);
  1390. if (!iSEM.CmdFIBModeSEM())
  1391. {
  1392. log.Error("测量线程报错:切换到SEM模式失败", false);
  1393. return false;
  1394. }
  1395. Thread.Sleep(1000);
  1396. #if CHECK
  1397. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
  1398. iSEM.SetMagnification(mag);
  1399. Thread.Sleep(2000);
  1400. iSEM.CmdSaveRate();
  1401. Thread.Sleep(200);
  1402. cycle_time = iSEM.GetCycleTime();
  1403. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1404. if (!GetImage(fileName2))
  1405. {
  1406. arg.Message = "切割后SEM拍照失败。";
  1407. arg.State = false;
  1408. SendMsg("1-20");
  1409. log.Info("测量线程报错:SEM切割后图像拍照失败", false);
  1410. return false;
  1411. }
  1412. arg.Picture_Information.Picture_FullPath = fileName2;
  1413. arg.Message = "切割后SEM拍照成功。";
  1414. arg.State = true;
  1415. SendMsg("1-20");
  1416. iSEM.CmdFocusRate();
  1417. Thread.Sleep(200);
  1418. cycle_time = iSEM.GetCycleTime();
  1419. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1420. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1421. wr.Img_Cut_Success(fileName1, fileName2, out state);
  1422. log.Info("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
  1423. if (state == 0)
  1424. {
  1425. log.Info("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
  1426. arg.Message = "图像接口参数state返回值为零";
  1427. arg.State = false;
  1428. SendMsg("1-22");
  1429. if (hand_intervene == 1)
  1430. {
  1431. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1432. {
  1433. return false;
  1434. }
  1435. }
  1436. else
  1437. {
  1438. return false;
  1439. }
  1440. log.Info("测量线程报错:" + arg.Message, false);
  1441. }
  1442. arg.State = true;
  1443. log.Info("验证切割准确性成功。", true);
  1444. arg.Message = "FIB切割校验成功";
  1445. SendMsg("1-22");
  1446. //判断是否停止进程
  1447. if (key_stop)
  1448. {
  1449. log.Info("停止键按下。", true);
  1450. return false;
  1451. }
  1452. #endif
  1453. return true;
  1454. }
  1455. /// <summary>
  1456. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1457. /// </summary>
  1458. /// <returns></returns>
  1459. public bool FindCross()
  1460. {
  1461. float x2 = 0, y2 = 0;
  1462. int state = 0;
  1463. //切换到SEM模式
  1464. if (!iSEM.CmdFIBModeSEM())
  1465. {
  1466. arg.Message = "SEM模式切换失败";
  1467. arg.State = false;
  1468. SendMsg("3-0");
  1469. log.Error("测量线程报错:" + arg.Message, false);
  1470. return false;
  1471. }
  1472. arg.State = true;
  1473. arg.Message = "SEM模式切换成功";
  1474. SendMsg("3-0");
  1475. arg.Picture_Information.Work_Status = "SEM";
  1476. Thread.Sleep(1000);
  1477. //判断是否停止进程
  1478. if (key_stop)
  1479. {
  1480. log.Info("停止键按下", true);
  1481. return false;
  1482. }
  1483. //1.控制SEM放大到300倍
  1484. log.Info("能谱电压设置:" + MParam.Location_Voltage.ToString("0.0"));
  1485. if (!iSEM.SetSEMVoltage(MParam.Location_Voltage))
  1486. {
  1487. arg.Message = "电压设置" + MParam.Location_Voltage.ToString("0.0") + "失败";
  1488. arg.State = false;
  1489. SendMsg("3-1");
  1490. log.Error("测量线程报错:" + arg.Message, false);
  1491. return false;
  1492. }
  1493. Thread.Sleep(200);
  1494. //iSEM.SetAutoVideoBrightnessAndContrast();
  1495. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1496. float m_TempBrightness = 50.0f;
  1497. float m_TempContrast = 30.0f;
  1498. if (MParam.SampleName == "3")
  1499. {
  1500. m_TempBrightness = 48.0f;
  1501. m_TempContrast = 29.0f;
  1502. }
  1503. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1504. iSEM.SetAutoVideoOff();
  1505. Thread.Sleep(200);
  1506. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1507. Thread.Sleep(200);
  1508. iSEM.SetContrast(m_TempContrast); //30.0f
  1509. Thread.Sleep(2000);
  1510. float mag = MParam.Location_Magnification / 3;
  1511. if (mag < 200)
  1512. {
  1513. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1514. if (MParam.SampleName == "3")
  1515. mag = 400;
  1516. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1517. mag = 200;
  1518. }
  1519. if (!iSEM.SetMagnification(mag))
  1520. {
  1521. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1522. arg.State = false;
  1523. SendMsg("3-1");
  1524. log.Error("测量线程报错:" + arg.Message, false);
  1525. return false;
  1526. }
  1527. Thread.Sleep(200);
  1528. float current = iSEM.GetMagnification();
  1529. Thread.Sleep(200);
  1530. while (Math.Abs(current - mag) > 2)
  1531. {
  1532. iSEM.SetMagnification(mag);
  1533. Thread.Sleep(200);
  1534. current = iSEM.GetMagnification();
  1535. Thread.Sleep(200);
  1536. }
  1537. arg.State = true;
  1538. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1539. SendMsg("3-1");
  1540. Thread.Sleep(2000);
  1541. //判断是否停止进程
  1542. if (key_stop)
  1543. {
  1544. log.Info("停止键按下", true);
  1545. return false;
  1546. }
  1547. //3.控制SEM拍照
  1548. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1549. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1550. String fileName4 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName4;
  1551. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1552. log.Info("fileName4====================" + fileName4, true);
  1553. arg.Picture_Information.Picture_FullPath = fileName4;
  1554. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1555. Thread.Sleep(200);
  1556. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1557. Thread.Sleep(200);
  1558. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1559. Thread.Sleep(200);
  1560. //拍照前改变速度,延时
  1561. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1562. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1563. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1564. Thread.Sleep(200);
  1565. cycle_time = iSEM.GetCycleTime();
  1566. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1567. if (!GetImage(fileName4))
  1568. {
  1569. arg.State = false;
  1570. arg.Message = "SEM拍照找切割位置失败";
  1571. SendMsg("3-2");
  1572. log.Error("测量线程报错:" + arg.Message, false);
  1573. return false;
  1574. }
  1575. arg.Picture_Information.Picture_FullPath = fileName4;
  1576. arg.State = true;
  1577. arg.Message = "SEM拍照成功";
  1578. SendMsg("3-2");
  1579. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1580. Thread.Sleep(200);
  1581. cycle_time = iSEM.GetCycleTime();
  1582. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1583. //判断是否停止进程
  1584. if (key_stop)
  1585. {
  1586. return false;
  1587. }
  1588. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1589. //5.根据坐标控制SEM移动到切孔位置,居中
  1590. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  1591. log.Info("文件名=" + fileName4, true);
  1592. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x2, out y2, out state);
  1593. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1594. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1595. if (state == 1)
  1596. {
  1597. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1598. if (!MoveToPixByMoveStage(x2, y2))
  1599. {
  1600. arg.State = false;
  1601. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1602. SendMsg("3-3");
  1603. log.Error("测量线程报错:" + arg.Message, false);
  1604. return false;
  1605. }
  1606. //判断是否移动完成
  1607. while (true)
  1608. {
  1609. Thread.Sleep(4000);
  1610. if (iSEM.GetStageIs() == 0)
  1611. {
  1612. break;
  1613. }
  1614. }
  1615. arg.State = true;
  1616. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1617. SendMsg("3-3");
  1618. //高倍到低倍不进行对焦
  1619. //拍照前改变速度,延时
  1620. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1621. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1622. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1623. Thread.Sleep(200);
  1624. cycle_time = iSEM.GetCycleTime();
  1625. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1626. //String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1627. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1628. String fileName10 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName10;
  1629. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1630. log.Info("fileName10====================" + fileName10, true);
  1631. if (!GetImage(fileName10))
  1632. {
  1633. log.Error("测量线程报错:找到已切割的位置拍照失败", false);
  1634. }
  1635. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1636. Thread.Sleep(200);
  1637. cycle_time = iSEM.GetCycleTime();
  1638. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1639. if (hand_intervene == 1)
  1640. {
  1641. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1642. }
  1643. }
  1644. else
  1645. {
  1646. arg.Message = "图像接口参数state返回值为零";
  1647. arg.State = false;
  1648. SendMsg("3-3");
  1649. if (hand_intervene == 1)
  1650. {
  1651. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1652. {
  1653. return false;
  1654. }
  1655. }
  1656. else
  1657. {
  1658. return false;
  1659. }
  1660. log.Error("测量线程报错:" + arg.Message, false);
  1661. return false;
  1662. }
  1663. //判断是否停止进程
  1664. if (key_stop)
  1665. {
  1666. log.Info("停止键按下", true);
  1667. return false;
  1668. }
  1669. return true;
  1670. }
  1671. /// <summary>
  1672. /// 17.自动控制SEM拍截面照
  1673. /// </summary>
  1674. /// <returns></returns>
  1675. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1676. {
  1677. int state = 0;
  1678. #region 设置拍照的电压
  1679. log.Info("测量线程:设置拍照电压" + MParam.Photograph_Voltage.ToString(), true);
  1680. //1、放大倍数参数photograph_
  1681. if (!iSEM.SetSEMVoltage(MParam.Photograph_Voltage))
  1682. {
  1683. arg.Message = "电压设置" + MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1684. arg.State = false;
  1685. SendMsg("3-4");
  1686. log.Error("测量线程报错:" + arg.Message, false);
  1687. return false;
  1688. }
  1689. //add
  1690. #endregion
  1691. Thread.Sleep(200);
  1692. #region 设置拍照的放大倍数
  1693. log.Info("测量线程:设置拍照放大倍数====" + MParam.Photograph_Magnification.ToString(), true);
  1694. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  1695. {
  1696. arg.Message = "放大倍数调整失败";
  1697. arg.State = false;
  1698. SendMsg("3-4");
  1699. log.Error("测量线程报错:" + arg.Message, false);
  1700. return false;
  1701. }
  1702. float set = MParam.Photograph_Magnification;
  1703. float current = iSEM.GetMagnification();
  1704. while (Math.Abs(current - set) > 1)
  1705. {
  1706. iSEM.SetMagnification(MParam.Photograph_Magnification);
  1707. Thread.Sleep(200);
  1708. current = iSEM.GetMagnification();
  1709. }
  1710. arg.Message = "放大" + MParam.Photograph_Magnification.ToString() + "成功";
  1711. arg.State = true;
  1712. SendMsg("3-4");
  1713. Thread.Sleep(3000 + (Int32)cycle_time);
  1714. //判断是否停止进程
  1715. if (key_stop)
  1716. {
  1717. log.Info("停止键按下", true);
  1718. return false;
  1719. }
  1720. #endregion
  1721. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1722. //2.控制SEM自动对焦、亮度、对比度-接口
  1723. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1724. if ((MParam.SampleName == "2") || (MParam.SampleName == "3"))
  1725. iSEM.SetReduced(402, 128, 600, 600);
  1726. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1727. iSEM.SetReduced(402, 128, 600, 600);
  1728. Thread.Sleep(200);
  1729. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1730. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1731. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1732. Thread.Sleep(200);
  1733. cycle_time = iSEM.GetCycleTime();
  1734. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1735. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1736. if (!iSEM.SetAutoVideoOff())
  1737. {
  1738. log.Error("测量线程报错:关闭自动亮度对比度失败", false);
  1739. return false;
  1740. }
  1741. Thread.Sleep(5000);
  1742. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1743. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1744. if (ImageFocus1(false))
  1745. {
  1746. arg.Message = "自动对焦完成";
  1747. arg.State = true;
  1748. SendMsg("3-5");
  1749. }
  1750. else
  1751. {
  1752. arg.Message = "自动对焦失败";
  1753. arg.State = false;
  1754. SendMsg("3-5");
  1755. log.Error("测量线程报错:" + arg.Message, false);
  1756. return false;
  1757. }
  1758. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1759. iSEM.CloseReduced();
  1760. Thread.Sleep(200);
  1761. cycle_time = iSEM.GetCycleTime();
  1762. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1763. //判断是否停止进程
  1764. if (key_stop)
  1765. {
  1766. log.Info("停止键按下", true);
  1767. return false;
  1768. }
  1769. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1770. float m_TempBrightness = 50.0f;
  1771. float m_TempContrast = 30.0f;
  1772. if (MParam.SampleName == "3")
  1773. {
  1774. m_TempBrightness = 50f;
  1775. m_TempContrast = 29f;
  1776. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1777. Thread.Sleep(200);
  1778. iSEM.SetContrast(m_TempContrast); //30.0f
  1779. Thread.Sleep(200);
  1780. }
  1781. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1782. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1783. {
  1784. log.Error("测量线程报错:自动开启亮度对比度失败", false);
  1785. return false;
  1786. }
  1787. Thread.Sleep(5000);
  1788. //3、设置SEM补偿角度
  1789. if (MParam.Is_Photograph == false)
  1790. {
  1791. log.Info("测量线程:角度补偿" + MParam.Correction_Angle.ToString() + "度", true);
  1792. if (!TiltCorrection(MParam.Correction_Angle))
  1793. {
  1794. arg.Message = "设置SEM进行角度补偿" + MParam.Correction_Angle.ToString("0") + "度失败";
  1795. arg.State = false;
  1796. SendMsg("3-6");
  1797. log.Error("测量线程报错:" + arg.Message, false);
  1798. return false;
  1799. }
  1800. arg.State = true;
  1801. arg.Message = "设置SEM进行角度补偿" + MParam.Correction_Angle.ToString("0") + "度成功";
  1802. SendMsg("3-6");
  1803. Thread.Sleep(200);
  1804. //判断是否停止进程
  1805. if (key_stop)
  1806. {
  1807. log.Error("停止键按下", false);
  1808. return false;
  1809. }
  1810. }
  1811. //4、拍照,5、保存照片
  1812. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1813. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1814. String fileName5 = data_path + "\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  1815. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1816. log.Info("fileName5====================" + fileName5, true);
  1817. arg.Picture_Information.Picture_FullPath = fileName5;
  1818. arg.Picture_Information.Work_Status = "SEM";
  1819. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1820. Thread.Sleep(200);
  1821. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1822. Thread.Sleep(200);
  1823. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1824. Thread.Sleep(200);
  1825. //拍照前改变速度,延时
  1826. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1827. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1828. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1829. Thread.Sleep(200);
  1830. cycle_time = iSEM.GetCycleTime();
  1831. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  1832. if (!GetImage(fileName5))
  1833. {
  1834. arg.Message = "SEM拍照失败";
  1835. arg.State = false;
  1836. SendMsg("3-7");
  1837. log.Error("测量线程报错:" + arg.Message, false);
  1838. return false;
  1839. }
  1840. arg.Picture_Information.Picture_FullPath = fileName5;
  1841. arg.State = true;
  1842. arg.Message = "SEM拍照成功";
  1843. SendMsg("3-7");
  1844. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1845. Thread.Sleep(200);
  1846. cycle_time = iSEM.GetCycleTime();
  1847. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1848. //判断是否停止进程
  1849. if (key_stop)
  1850. {
  1851. log.Info("停止键按下", true);
  1852. return false;
  1853. }
  1854. #endregion
  1855. if (MParam.Is_Photograph == false)
  1856. {
  1857. #region 对当前矩形进行旋转校正
  1858. //8,计算切割面区域偏移角度及方向
  1859. float degree = 0;
  1860. int direction = 0;
  1861. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  1862. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1863. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1864. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1865. if (state == 1)
  1866. {
  1867. //梯形角度
  1868. iSEM.SetScanRotationOn();
  1869. Thread.Sleep(200);
  1870. //20201128陈工要求,谭博返回角度*0.7
  1871. iSEM.SetScanRotation(Convert.ToSingle(degree * MParam.ScanRotCor));
  1872. Thread.Sleep(200);
  1873. arg.State = true;
  1874. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1875. SendMsg("3-8");
  1876. if (hand_intervene == 1)
  1877. {
  1878. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1879. }
  1880. }
  1881. else
  1882. {
  1883. arg.Message = "图像接口参数State返回值为零";
  1884. arg.State = false;
  1885. SendMsg("3-8");
  1886. if (hand_intervene == 1)
  1887. {
  1888. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1889. {
  1890. return false;
  1891. }
  1892. }
  1893. else
  1894. {
  1895. //return false;
  1896. }
  1897. log.Error("测量线程报错:" + arg.Message, false);
  1898. }
  1899. //判断是否停止进程
  1900. if (key_stop)
  1901. {
  1902. log.Info("停止键按下", true);
  1903. return false;
  1904. }
  1905. Thread.Sleep(200);
  1906. //12拍照
  1907. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1908. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1909. String fileName6 = data_path + "\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  1910. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1911. log.Info("fileName6====================" + fileName6, true);
  1912. arg.Picture_Information.Picture_FullPath = fileName6;
  1913. arg.Picture_Information.Work_Status = "SEM";
  1914. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1915. Thread.Sleep(200);
  1916. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1917. Thread.Sleep(200);
  1918. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1919. Thread.Sleep(200);
  1920. //拍照前改变速度,延时
  1921. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1922. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1923. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1924. Thread.Sleep(200);
  1925. cycle_time = iSEM.GetCycleTime();
  1926. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1927. if (!GetImage(fileName6))
  1928. {
  1929. arg.Message = "SEM拍照失败";
  1930. arg.State = false;
  1931. SendMsg("3-9");
  1932. log.Error("测量线程报错:" + arg.Message, false);
  1933. return false;
  1934. }
  1935. arg.Picture_Information.Picture_FullPath = fileName6;
  1936. arg.State = true;
  1937. arg.Message = "SEM拍照成功";
  1938. SendMsg("3-9");
  1939. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1940. Thread.Sleep(200);
  1941. cycle_time = iSEM.GetCycleTime();
  1942. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1943. //判断是否停止进程
  1944. if (key_stop)
  1945. {
  1946. log.Info("停止键按下", true);
  1947. return false;
  1948. }
  1949. #endregion
  1950. #region 获取两个位置上及放大倍数
  1951. //计算两个测量区域坐标
  1952. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1953. List<float> mag = new List<float>();
  1954. System.Drawing.Point ct0;
  1955. float mag1, mag2, magMax;
  1956. //log.Info("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1957. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(MParam.SampleName), MParam.Firm, out ct, out mag, out ct0, out state);
  1958. string s = "";
  1959. for (int i = 0; i < ct.Count; i++)
  1960. {
  1961. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  1962. + "放大倍数=" + mag[i];
  1963. }
  1964. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  1965. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1966. "输入样品" + Convert.ToInt32(MParam.SampleName) +
  1967. "输入厂商" + MParam.Firm.ToString() +
  1968. s +
  1969. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1970. #endregion
  1971. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1972. {
  1973. arg.State = true;
  1974. arg.Message = "获取位置及放大倍数成功";
  1975. SendMsg("3-10");
  1976. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1977. float xs = iSEM.GetBeamShiftX();
  1978. Thread.Sleep(200);
  1979. float ys = iSEM.GetBeamShiftY();
  1980. Thread.Sleep(200);
  1981. float xpCur = iSEM.GetStageAtX();
  1982. Thread.Sleep(200);
  1983. float ypCur = iSEM.GetStageAtY();
  1984. Thread.Sleep(200);
  1985. log.Info("测量线程:原来的光束偏移量x = " + xs.ToString()
  1986. + "y=" + ys.ToString() + ","
  1987. + "原来样品台的位置x= " + xpCur.ToString()
  1988. + "y=" + ypCur.ToString(), true);
  1989. #endregion
  1990. //找到放大倍数最大值
  1991. magMax = mag[0];
  1992. for (int m = 1; m < mag.Count; m++)
  1993. {
  1994. if (mag[m] > magMax)
  1995. {
  1996. magMax = mag[m];
  1997. }
  1998. }
  1999. #region 移动到梯形左上角
  2000. //20201127将视野移动到梯形左上角位置
  2001. MoveToPix(ct0.X, ct0.Y);
  2002. log.Info("测量线程:移动到对焦点( " + ct0.X.ToString()
  2003. + "," + ct0.Y.ToString() + ")", true);
  2004. //关闭自动亮度对比度
  2005. iSEM.SetAutoVideoOff();
  2006. Thread.Sleep(2000);
  2007. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2008. if (MParam.SampleName == "3")
  2009. {
  2010. m_TempBrightness = 50f;
  2011. m_TempContrast = 29f;
  2012. iSEM.SetBrightness(m_TempBrightness); //50.0f
  2013. Thread.Sleep(200);
  2014. iSEM.SetContrast(m_TempContrast); //30.0f
  2015. Thread.Sleep(200);
  2016. }
  2017. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  2018. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  2019. if (MParam.SampleName == "3")
  2020. {
  2021. iSEM.SetReduced(402, 128, 480, 450);
  2022. }
  2023. else
  2024. {
  2025. iSEM.SetReduced(402, 128, 480, 450);
  2026. }
  2027. Thread.Sleep(200);
  2028. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  2029. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2030. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  2031. Thread.Sleep(200);
  2032. cycle_time = iSEM.GetCycleTime();
  2033. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2034. //放大到6000倍
  2035. iSEM.SetMagnification(magMax / 2);
  2036. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2037. set = magMax / 2;
  2038. current = iSEM.GetMagnification();
  2039. while (Math.Abs(current - set) > 1)
  2040. {
  2041. iSEM.SetMagnification(set);
  2042. Thread.Sleep(200);
  2043. current = iSEM.GetMagnification();
  2044. }
  2045. log.Info("========测量线程:开始自动聚焦 " + set.ToString() + "倍", true);
  2046. if (MParam.SampleName == "3")
  2047. {
  2048. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  2049. iSEM.SetBrightness(50.0f); //50.0f
  2050. Thread.Sleep(200);
  2051. iSEM.SetContrast(30.0f); //30.0f
  2052. Thread.Sleep(200);
  2053. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  2054. }
  2055. //自动对焦
  2056. if (!ImageFocus1(true))
  2057. {
  2058. log.Error("========测量线程:自动聚焦失败!" + set.ToString() + "倍", false);
  2059. return false;
  2060. }
  2061. log.Info("========测量线程:自动聚焦成功!" + set.ToString() + "倍", true);
  2062. //放大到10000倍
  2063. iSEM.SetMagnification(magMax);
  2064. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2065. set = magMax;
  2066. current = iSEM.GetMagnification();
  2067. while (Math.Abs(current - set) > 1)
  2068. {
  2069. iSEM.SetMagnification(set);
  2070. Thread.Sleep(200);
  2071. current = iSEM.GetMagnification();
  2072. }
  2073. log.Info("========测量线程:开始自动聚焦 " + set.ToString() + "倍", true);
  2074. //自动对焦
  2075. if (!ImageFocus1(true))
  2076. {
  2077. log.Info("========测量线程:自动聚焦失败!" + set.ToString() + "倍", true);
  2078. return false;
  2079. }
  2080. log.Info("========测量线程:自动聚焦成功!" + set.ToString() + "倍", true);
  2081. iSEM.CloseReduced();
  2082. Thread.Sleep(200);
  2083. cycle_time = iSEM.GetCycleTime();
  2084. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2085. #endregion
  2086. #region 循环拍照
  2087. for (int n = 0; n < ct.Count; n++)
  2088. {
  2089. #region 恢复到拍照的状态
  2090. iSEM.SetStageGotoX(xpCur);
  2091. while (true)
  2092. {
  2093. Thread.Sleep(4000);
  2094. if (iSEM.GetStageIs() == 0)
  2095. {
  2096. break;
  2097. }
  2098. }
  2099. iSEM.SetStageGotoY(ypCur);
  2100. while (true)
  2101. {
  2102. Thread.Sleep(4000);
  2103. if (iSEM.GetStageIs() == 0)
  2104. {
  2105. break;
  2106. }
  2107. }
  2108. //恢复原来的放大倍数
  2109. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  2110. {
  2111. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2112. return false;
  2113. }
  2114. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2115. set = MParam.Photograph_Magnification;
  2116. current = iSEM.GetMagnification();
  2117. while (Math.Abs(current - set) > 1)
  2118. {
  2119. iSEM.SetMagnification(set);
  2120. Thread.Sleep(200);
  2121. current = iSEM.GetMagnification();
  2122. }
  2123. //恢复BeamShift的百分比值
  2124. iSEM.SetBeamShiftX(xs);
  2125. Thread.Sleep(200);
  2126. iSEM.SetBeamShiftY(ys);
  2127. Thread.Sleep(200);
  2128. #endregion
  2129. #region 移动到指定点位置
  2130. if (!MoveToPix(ct[n].X, ct[n].Y))
  2131. {
  2132. arg.State = false;
  2133. arg.Message = "移动到第一个点位置失败";
  2134. SendMsg("1-" + (35 + n).ToString());
  2135. //移动到第一个点失败
  2136. log.Error("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2137. }
  2138. log.Info("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2139. + "," + ct[n].Y.ToString() + ")", true);
  2140. #endregion
  2141. #region 如果是第一个点,则1W倍对焦
  2142. if (n == 0)
  2143. {
  2144. log.Info("========测量线程:进入内部观察,不对焦!", true);
  2145. //增亮图像
  2146. iSEM.SetAutoVideoOff();
  2147. Thread.Sleep(200);
  2148. float currentBright = iSEM.GetBrightness();
  2149. Thread.Sleep(200);
  2150. float currentContrast = iSEM.GetContrast();
  2151. Thread.Sleep(200);
  2152. //add by sun 2020-12-17 黄工觉得太亮
  2153. int m_BrightMore = 2;
  2154. int m_ContrastMore = 2;
  2155. if (MParam.SampleName == "3")
  2156. {
  2157. m_BrightMore = 0;
  2158. m_ContrastMore = 0;
  2159. }
  2160. //add by sun 2020-12-17 黄工觉得太亮 end
  2161. iSEM.SetBrightness(currentBright + m_BrightMore);
  2162. Thread.Sleep(200);
  2163. iSEM.SetContrast(currentContrast + m_ContrastMore);
  2164. Thread.Sleep(200);
  2165. }
  2166. #endregion
  2167. #region 拍照
  2168. if (!iSEM.SetMagnification(mag[n]))
  2169. {
  2170. arg.State = false;
  2171. arg.Message = "移动到第一个点位置拍照失败";
  2172. SendMsg("3-11");
  2173. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2174. return false;
  2175. }
  2176. log.Info("========测量线程:移动到第一个点位置拍照完成!", true);
  2177. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2178. set = mag[n];
  2179. current = iSEM.GetMagnification();
  2180. while (Math.Abs(current - set) > 1)
  2181. {
  2182. iSEM.SetMagnification(set);
  2183. Thread.Sleep(200);
  2184. current = iSEM.GetMagnification();
  2185. }
  2186. //获取像素大小
  2187. lsize.Add(iSEM.GetPixelSize());
  2188. Thread.Sleep(200);
  2189. //String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2190. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  2191. String fileName7 = data_path + "\\" + MParam.Firm + "-" + mag[n].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + n.ToString() + "-" + ImageNameTwo_1;
  2192. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  2193. log.Info("fileName7====================" + fileName7, true);
  2194. arg.Picture_Information.Picture_FullPath = fileName7;
  2195. arg.Picture_Information.Work_Status = "SEM";
  2196. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2197. Thread.Sleep(200);
  2198. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2199. Thread.Sleep(200);
  2200. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2201. Thread.Sleep(200);
  2202. //拍照前改变速度,延时
  2203. iSEM.CmdLineScan();
  2204. Thread.Sleep(200);
  2205. cycle_time = iSEM.GetCycleTime();
  2206. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2207. if (!GetImage(fileName7))
  2208. {
  2209. arg.State = false;
  2210. arg.Message = "移动到第一个点位置失败";
  2211. SendMsg("3-11");
  2212. log.Error("测量线程报错:" + arg.Message, false);
  2213. return false;
  2214. }
  2215. log.Info("========测量线程:移动到第一个点位置完成!", true);
  2216. iSEM.CmdPixelScan();
  2217. Thread.Sleep(200);
  2218. limg_path.Add(fileName7);
  2219. arg.Picture_Information.Picture_FullPath = fileName7;
  2220. arg.State = true;
  2221. arg.Message = "移动到第一个点位置拍照成功";
  2222. SendMsg("3-11");
  2223. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2224. Thread.Sleep(200);
  2225. cycle_time = iSEM.GetCycleTime();
  2226. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2227. // add by zjx 在测量图上显示放大倍数和像素大小等信息
  2228. float size = iSEM.GetPixelSize();
  2229. SaveMeasDataPic(fileName7, mag[n], size);
  2230. // add by zjx 在测量图上显示放大倍数和像素大小等信息 end
  2231. #endregion
  2232. }
  2233. #endregion
  2234. if (hand_intervene == 1)
  2235. {
  2236. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2237. }
  2238. }
  2239. else
  2240. {
  2241. if (hand_intervene == 1)
  2242. {
  2243. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2244. {
  2245. // return false;
  2246. }
  2247. }
  2248. else
  2249. {
  2250. //return false;
  2251. }
  2252. arg.State = false;
  2253. arg.Message = "获取位置及放大倍数失败";
  2254. SendMsg("3-10");
  2255. log.Error("测量线程报错:" + arg.Message, false);
  2256. }
  2257. //判断是否停止进程
  2258. if (key_stop)
  2259. {
  2260. log.Info("停止键按下", true);
  2261. return false;
  2262. }
  2263. }
  2264. iSEM.SetTiltAngleOff();
  2265. Thread.Sleep(200);
  2266. iSEM.SetScanRotationOff();
  2267. Thread.Sleep(200);
  2268. iSEM.SetBeamShiftX(0);
  2269. Thread.Sleep(200);
  2270. iSEM.SetBeamShiftY(0);
  2271. Thread.Sleep(200);
  2272. //判断是否停止进程
  2273. if (key_stop)
  2274. {
  2275. return false;
  2276. }
  2277. return true;
  2278. }
  2279. //第一个孔的测试过程
  2280. public bool FirstHole()
  2281. {
  2282. // add by zjx 2020-12-18 为了测试只做能谱部分
  2283. if (MParam.IsonlyEDSForDebug == true)
  2284. {
  2285. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2286. log.Warn("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  2287. if (!SetVoltageAndIPROBE())
  2288. {
  2289. log.Error("测量线程:第一孔=====设置电压电流失败!目前是第 " + MParam.SampleName + " 类!", false);
  2290. return false;
  2291. }
  2292. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2293. //设置拉直的放大倍数
  2294. log.Info("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + MParam.Stretch_Magnification.ToString(), true);
  2295. if (!iSEM.SetMagnification(MParam.Stretch_Magnification))
  2296. {
  2297. log.Error("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + MParam.Stretch_Magnification.ToString(), false);
  2298. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2299. arg.State = false;
  2300. SendMsg("0-1");
  2301. return false;
  2302. }
  2303. float current = iSEM.GetMagnification();
  2304. while (Math.Abs(current - MParam.Stretch_Magnification) > 1)
  2305. {
  2306. iSEM.SetMagnification(MParam.Stretch_Magnification);
  2307. Thread.Sleep(200);
  2308. current = iSEM.GetMagnification();
  2309. }
  2310. arg.Message = "拉直放大倍数设置成功!";
  2311. arg.State = true;
  2312. SendMsg("0-1");
  2313. Thread.Sleep(2000);
  2314. //自动化流程-每个点都需要补偿54度
  2315. if (MParam.Is_Photograph == false)
  2316. {
  2317. log.Info("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2318. if (!TiltCorrection(54.0f))
  2319. {
  2320. log.Error("测量线程报错:倾斜补偿角度为54度失败", false);
  2321. arg.Message = "角度补偿54度失败!";
  2322. arg.State = false;
  2323. SendMsg("0-2");
  2324. return false;
  2325. }
  2326. arg.Message = "角度补偿54度成功!";
  2327. arg.State = true;
  2328. SendMsg("0-2");
  2329. Thread.Sleep(1000);
  2330. //判断是否停止进程
  2331. if (key_stop)
  2332. {
  2333. log.Info("停止键按下", true);
  2334. return false;
  2335. }
  2336. }
  2337. // 2是5/6类样品,不需要拉直
  2338. if (MParam.SampleName != "2")
  2339. {
  2340. log.Warn("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2341. if (!Straighten_Handle())
  2342. {
  2343. log.Info("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2344. return false;
  2345. }
  2346. log.Info("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2347. //判断是否停止进程
  2348. if (key_stop)
  2349. {
  2350. log.Info("停止键按下。", true);
  2351. return false;
  2352. }
  2353. }
  2354. else
  2355. {
  2356. arg.Message = "拉直操作自动对焦成功!";
  2357. arg.State = true;
  2358. SendMsg("1-0");
  2359. Thread.Sleep(1000);
  2360. arg.Message = "拉直拍照成功!";
  2361. arg.Picture_Information.Picture_FullPath = "";
  2362. arg.State = true;
  2363. SendMsg("1-1");
  2364. Thread.Sleep(1000);
  2365. arg.Message = "拉直操作完成";
  2366. arg.State = true;
  2367. SendMsg("1-2");
  2368. Thread.Sleep(1000);
  2369. }
  2370. //13. 自动 定位功能 PT沉积
  2371. log.Warn("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2372. if (!GetPoistion())
  2373. {
  2374. log.Error("测量线程报错:自动定位失败,程序退出。", false);
  2375. return false;
  2376. }
  2377. log.Info("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2378. //判断是否停止进程
  2379. if (key_stop)
  2380. {
  2381. log.Info("停止键按下。", true);
  2382. return false;
  2383. }
  2384. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2385. if (MParam.Is_Photograph == false)
  2386. {
  2387. if (MParam.IsCutingForDebug)
  2388. {
  2389. log.Warn("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!==" + MParam.IsCutingForDebug, true);
  2390. if (!FIBCross())
  2391. {
  2392. log.Error("测量线程报错:自动控制FIB切割失败。", false);
  2393. return false;
  2394. }
  2395. log.Info("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2396. }
  2397. }
  2398. //del by sun 2020-12-15 temp end
  2399. //判断是否停止进程
  2400. if (key_stop)
  2401. {
  2402. return false;
  2403. }
  2404. //16.找到切割位置
  2405. if (MParam.Is_Photograph == false)
  2406. {
  2407. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2408. if (!FindCross())
  2409. {
  2410. return false;
  2411. }
  2412. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2413. //判断是否停止进程
  2414. if (key_stop)
  2415. {
  2416. return false;
  2417. }
  2418. }
  2419. log.Warn("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2420. //将过程17最后的拍照图片提出给18步进行调用
  2421. List<String> limg_path = new List<string>();
  2422. List<float> lsize = new List<float>();
  2423. //17.自动控制SEM拍截面照
  2424. if (!ShotSection(ref limg_path, ref lsize))
  2425. {
  2426. log.Error("拍截面照失败!");
  2427. return false;
  2428. }
  2429. log.Info("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2430. //判断是否停止进程
  2431. if (key_stop)
  2432. {
  2433. return false;
  2434. }
  2435. //18.自动层高分析
  2436. if (MParam.Is_Photograph == false)
  2437. {
  2438. log.Warn("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2439. float size = iSEM.GetPixelSize();
  2440. int state = 1;
  2441. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(MParam.SampleName), MParam.Firm, out state);
  2442. if (state == 0)
  2443. {
  2444. arg.Message = "测量尺寸失败";
  2445. arg.State = false;
  2446. SendMsg("3-12");
  2447. return false;
  2448. }
  2449. arg.State = true;
  2450. arg.Message = "测量尺寸成功";
  2451. SendMsg("3-12");
  2452. log.Info("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2453. }
  2454. }
  2455. //add by zjx 2020-12-18 为了测试只做能谱部分 end
  2456. //19.能谱分析
  2457. if (MParam.EDS)
  2458. {
  2459. log.Warn("测量线程:第一个孔的测试过程-19.能谱分析开始===" + MParam.EDS, true);
  2460. EDS_Analysis();
  2461. log.Info("测量线程:第一个孔的测试过程-19.能谱分析结束===" + MParam.EDS, true);
  2462. }
  2463. //20.复位
  2464. log.Info("===========测量线程:20.复位开始", true);
  2465. BeamShiftReset();
  2466. return true;
  2467. }
  2468. //非第一个孔的测试过程
  2469. public bool OtherHole()
  2470. {
  2471. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2472. log.Warn("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  2473. if (!SetVoltageAndIPROBE())
  2474. {
  2475. log.Error("测量线程:非第一孔==设置电压电流失败!目前是第 " + MParam.SampleName + " 类!", false);
  2476. return false;
  2477. }
  2478. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2479. //设置拉直的放大倍数
  2480. log.Info("设置拉直放大倍数!");
  2481. if (!iSEM.SetMagnification(MParam.Stretch_Magnification))
  2482. {
  2483. log.Error("拉直放大倍数设置失败,程序退出。", false);
  2484. arg.Message = "拉直放大倍数设置失败!";
  2485. arg.State = false;
  2486. SendMsg("0-1");
  2487. return false;
  2488. }
  2489. float current = iSEM.GetMagnification();
  2490. while (Math.Abs(current - MParam.Stretch_Magnification) > 1)
  2491. {
  2492. iSEM.SetMagnification(MParam.Stretch_Magnification);
  2493. Thread.Sleep(200);
  2494. current = iSEM.GetMagnification();
  2495. }
  2496. arg.Message = "拉直放大倍数设置成功!";
  2497. arg.State = true;
  2498. SendMsg("0-1");
  2499. Thread.Sleep(2000);
  2500. //自动化流程-每个点都需要补偿54度
  2501. if (MParam.Is_Photograph == false)
  2502. {
  2503. log.Info("角度补偿54度!");
  2504. if (!TiltCorrection(54.0f))
  2505. {
  2506. arg.Message = "角度补偿54度失败!";
  2507. arg.State = false;
  2508. SendMsg("0-2");
  2509. return false;
  2510. }
  2511. arg.Message = "角度补偿54度成功!";
  2512. arg.State = true;
  2513. SendMsg("0-2");
  2514. Thread.Sleep(2000);
  2515. //判断是否停止进程
  2516. if (key_stop)
  2517. {
  2518. return false;
  2519. }
  2520. }
  2521. if (MParam.SampleName != "2")
  2522. {
  2523. log.Warn("开始进行拉直操作!");
  2524. if (!Straighten_Handle())
  2525. {
  2526. log.Info("测量线程报错:拉直操作失败。", true);
  2527. return false;
  2528. }
  2529. //判断是否停止进程
  2530. if (key_stop)
  2531. {
  2532. log.Info("停止键按下。", true);
  2533. return false;
  2534. }
  2535. }
  2536. else
  2537. {
  2538. arg.Message = "拉直操作自动对焦成功!";
  2539. arg.State = true;
  2540. SendMsg("1-0");
  2541. Thread.Sleep(1000);
  2542. arg.Message = "拉直拍照成功!";
  2543. arg.Picture_Information.Picture_FullPath = "";
  2544. arg.State = true;
  2545. SendMsg("1-1");
  2546. Thread.Sleep(1000);
  2547. arg.Message = "拉直操作完成";
  2548. arg.State = true;
  2549. SendMsg("1-2");
  2550. }
  2551. //13. 自动 定位功能
  2552. log.Info("开始进行自动定位!");
  2553. if (!GetPoistion())
  2554. {
  2555. return false;
  2556. }
  2557. //判断是否停止进程
  2558. if (key_stop)
  2559. {
  2560. return false;
  2561. }
  2562. //14.自动控制FIB切割
  2563. if (MParam.Is_Photograph == false)
  2564. {
  2565. log.Warn("开始进行FIB切割!");
  2566. if (!FIBCross())
  2567. {
  2568. return false;
  2569. }
  2570. }
  2571. //判断是否停止进程
  2572. if (key_stop)
  2573. {
  2574. return false;
  2575. }
  2576. // 16.找到切割位置
  2577. if (MParam.Is_Photograph == false)
  2578. {
  2579. log.Warn("开始找切割位置!");
  2580. if (!FindCross())
  2581. {
  2582. return false;
  2583. }
  2584. //判断是否停止进程
  2585. if (key_stop)
  2586. {
  2587. return false;
  2588. }
  2589. }
  2590. //将过程17最后的拍照图片提出给18步进行调用
  2591. List<String> limg_path = new List<string>();
  2592. List<float> lsize = new List<float>();
  2593. //17.自动控制SEM拍截面照
  2594. log.Warn("开始控制SEM拍截面照!");
  2595. if (!ShotSection(ref limg_path, ref lsize))
  2596. {
  2597. //return false;
  2598. }
  2599. //判断是否停止进程
  2600. if (key_stop)
  2601. {
  2602. return false;
  2603. }
  2604. //18.自动层高分析
  2605. if (MParam.Is_Photograph == false)
  2606. {
  2607. log.Warn("开始进行层高分析!");
  2608. float size = iSEM.GetPixelSize();
  2609. int state = 1;
  2610. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(MParam.SampleName), MParam.Firm, out state);
  2611. if (state == 0)
  2612. {
  2613. arg.Message = "测量尺寸失败";
  2614. arg.State = false;
  2615. SendMsg("3-12");
  2616. return false;
  2617. }
  2618. arg.State = true;
  2619. arg.Message = "测量尺寸成功";
  2620. SendMsg("3-12");
  2621. }
  2622. //19.能谱分析
  2623. if (MParam.EDS)
  2624. {
  2625. log.Warn("开始进行能谱分析!");
  2626. EDS_Analysis();
  2627. }
  2628. return true;
  2629. }
  2630. //测试完第一个孔后的样品台初始化操作。
  2631. //再调用CommonWork执行非第一个孔的测试过程
  2632. public bool OtherHole_Init()
  2633. {
  2634. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2635. #region 初始化
  2636. //1、不只拍照,且不是倾斜观测,则移动T轴
  2637. if (MParam.Is_Photograph == false && MParam.Tilt == false)
  2638. {
  2639. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2640. if (!iSEM.SetStageGotoT(0))
  2641. {
  2642. log.Error("样品台归零失败", false);
  2643. return false;
  2644. }
  2645. while (true)
  2646. {
  2647. Thread.Sleep(5000);
  2648. if (iSEM.GetStageIs() == 0)
  2649. {
  2650. break;
  2651. }
  2652. }
  2653. //判断是否停止进程
  2654. if (key_stop)
  2655. {
  2656. log.Info("停止键按下", true);
  2657. return false;
  2658. }
  2659. }
  2660. //2、如果是倾斜观测,则移动Z轴
  2661. if (MParam.Tilt == true)
  2662. {
  2663. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2664. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - MParam.ZDistance/1000))
  2665. //20201109, Z轴降到安全的位置上
  2666. if (!iSEM.SetStageGotoZ(fSateyZ))
  2667. {
  2668. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2669. return false;
  2670. }
  2671. while (true)
  2672. {
  2673. Thread.Sleep(5000);
  2674. if (iSEM.GetStageIs() == 0)
  2675. {
  2676. break;
  2677. }
  2678. }
  2679. //判断是否停止进程
  2680. if (key_stop)
  2681. {
  2682. log.Info("停止键按下", true);
  2683. return false;
  2684. }
  2685. }
  2686. //3. 根据光镜坐标控制样品台移动
  2687. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2688. {
  2689. //SendMsg("移动失败");
  2690. log.Error("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2691. return false;
  2692. }
  2693. log.Info("移动R轴到=" + currentHole.Position.R.ToString(), true);
  2694. while (true)
  2695. {
  2696. Thread.Sleep(5000);
  2697. if (iSEM.GetStageIs() == 0)
  2698. {
  2699. break;
  2700. }
  2701. }
  2702. //判断是否停止进程
  2703. if (key_stop)
  2704. {
  2705. log.Info("停止键按下", true);
  2706. return false;
  2707. }
  2708. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2709. {
  2710. //SendMsg("移动失败");
  2711. log.Error("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString() + "," + currentHole.Position.X.ToString() + ")", false);
  2712. return false;
  2713. }
  2714. log.Info("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2715. while (true)
  2716. {
  2717. Thread.Sleep(10000);
  2718. if (iSEM.GetStageIs() == 0)
  2719. {
  2720. break;
  2721. }
  2722. }
  2723. //判断是否停止进程
  2724. if (key_stop)
  2725. {
  2726. log.Info("停止键按下", true);
  2727. return false;
  2728. }
  2729. //4、倾斜观测时恢复Z轴
  2730. if (MParam.Tilt == true)
  2731. {
  2732. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2733. if (currentHole.Position.Z > 0.043)
  2734. {
  2735. log.Error("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2736. return false;
  2737. }
  2738. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2739. {
  2740. log.Error("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2741. return false;
  2742. }
  2743. while (true)
  2744. {
  2745. Thread.Sleep(5000);
  2746. if (iSEM.GetStageIs() == 0)
  2747. {
  2748. break;
  2749. }
  2750. }
  2751. //判断是否停止进程
  2752. if (key_stop)
  2753. {
  2754. log.Info("停止键按下", true);
  2755. return false;
  2756. }
  2757. }
  2758. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2759. if (MParam.Is_Photograph == false && MParam.Tilt == false)
  2760. {
  2761. if (!iSEM.SetStageGotoT(54))
  2762. {
  2763. log.Info("测量线程报错:校正54度有误", true);
  2764. return false;
  2765. }
  2766. while (true)
  2767. {
  2768. Thread.Sleep(5000);
  2769. if (iSEM.GetStageIs() == 0)
  2770. {
  2771. break;
  2772. }
  2773. }
  2774. }
  2775. //判断是否停止进程
  2776. if (key_stop)
  2777. {
  2778. log.Info("停止键按下", true);
  2779. return false;
  2780. }
  2781. //4、设置WD
  2782. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2783. Thread.Sleep(1000);
  2784. #endregion
  2785. return true;
  2786. }
  2787. //初始化拉直操作
  2788. public bool Straighten_Handle()
  2789. {
  2790. if (MParam.Tilt)
  2791. {
  2792. //倾斜样品台,SEM视野是黑色的
  2793. log.Info("测量线程:恢复到工作位置后重新调亮图像。", true);
  2794. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2795. {
  2796. log.Error("测量线程报错:重新设置到标准工作距离失败。", false);
  2797. return false;
  2798. }
  2799. Thread.Sleep(7000); //自动亮度对比度使用
  2800. }
  2801. //1、自动对焦
  2802. log.Info("测量线程:拉直操作前自动对焦开始", true);
  2803. iSEM.SetReduced(402, 128, 400, 400);
  2804. Thread.Sleep(200);
  2805. //add by sun 2020-12-15
  2806. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2807. //add by sun 2020-12-15 end
  2808. Thread.Sleep(200);
  2809. cycle_time = iSEM.GetCycleTime();
  2810. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2811. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2812. float m_TempBrightness = 50.0f;
  2813. float m_TempContrast = 30.0f;
  2814. if (MParam.SampleName == "3")
  2815. {
  2816. m_TempBrightness = 48.0f;
  2817. m_TempContrast = 29.0f;
  2818. }
  2819. //add by sun 2020-12-18 解决1(3\4)类样品拉直太白造成无法拉直问题
  2820. if (MParam.SampleName == "1")
  2821. {
  2822. m_TempBrightness = 50.0f;
  2823. m_TempContrast = 29.0f;
  2824. }
  2825. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2826. iSEM.SetAutoVideoOff();
  2827. Thread.Sleep(200);
  2828. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2829. Thread.Sleep(200);
  2830. iSEM.SetContrast(m_TempContrast);//30.0f
  2831. Thread.Sleep(200);
  2832. if (!ImageFocus1(false))
  2833. {
  2834. log.Error("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2835. arg.Message = "拉直操作自动对焦失败!";
  2836. arg.State = false;
  2837. SendMsg("1-0");
  2838. return false;
  2839. }
  2840. iSEM.CloseReduced();
  2841. Thread.Sleep(200);
  2842. cycle_time = iSEM.GetCycleTime();
  2843. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2844. iSEM.SetAutoVideoBrightnessAndContrast();
  2845. Thread.Sleep(5000);
  2846. arg.Message = "拉直操作自动对焦成功!";
  2847. arg.State = true;
  2848. SendMsg("1-0");
  2849. //判断是否停止进程
  2850. if (key_stop)
  2851. {
  2852. log.Info("停止键按下。", true);
  2853. return false;
  2854. }
  2855. //2、拍张照片
  2856. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2857. log.Info("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2858. //拍照前改变速度,延时
  2859. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2860. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2861. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2862. Thread.Sleep(200);
  2863. cycle_time = iSEM.GetCycleTime();
  2864. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2865. if (!GetImage(fileName0))
  2866. {
  2867. log.Error("测量线程报错:拉直拍照失败", false);
  2868. arg.Message = "拉直拍照失败";
  2869. arg.State = false;
  2870. SendMsg("1-1");
  2871. return false;
  2872. }
  2873. arg.Message = "拉直拍照成功!";
  2874. arg.Picture_Information.Picture_FullPath = fileName0;
  2875. arg.State = true;
  2876. SendMsg("1-1");
  2877. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2878. Thread.Sleep(200);
  2879. cycle_time = iSEM.GetCycleTime();
  2880. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2881. //3、华为接口,获取旋转角度
  2882. float degree = 0;
  2883. int direction = 0;
  2884. int state = 1;
  2885. wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  2886. log.Info("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  2887. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  2888. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  2889. if (state == 0)
  2890. {
  2891. log.Info("测量线程:图像处理接口参数state返回为零", false);
  2892. arg.Message = "图像处理接口参数state返回为零";
  2893. arg.State = false;
  2894. SendMsg("1-2");
  2895. if (hand_intervene == 1)
  2896. {
  2897. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2898. {
  2899. return false;
  2900. }
  2901. }
  2902. else
  2903. {
  2904. return false;
  2905. }
  2906. return false;
  2907. }
  2908. if (direction == 2)
  2909. {
  2910. degree = -degree;
  2911. }
  2912. if (degree != 0)
  2913. {
  2914. //4、拉直,旋转R轴
  2915. log.Info("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  2916. //选择之前,先降Z轴
  2917. float Zpos = iSEM.GetStageAtZ();
  2918. Thread.Sleep(200);
  2919. log.Info("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  2920. if (!iSEM.SetStageGotoZ(fSateyZ))
  2921. {
  2922. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2923. return false;
  2924. }
  2925. while (true)
  2926. {
  2927. Thread.Sleep(4000);
  2928. if (iSEM.GetStageIs() == 0)
  2929. {
  2930. break;
  2931. }
  2932. }
  2933. //判断是否停止进程
  2934. if (key_stop)
  2935. {
  2936. log.Info("停止键按下", true);
  2937. return false;
  2938. }
  2939. iSEM.SetStageDeltaR(degree);
  2940. while (true)
  2941. {
  2942. Thread.Sleep(4000);
  2943. if (iSEM.GetStageIs() == 0)
  2944. {
  2945. break;
  2946. }
  2947. }
  2948. if (!iSEM.SetStageGotoZ(Zpos))
  2949. {
  2950. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2951. return false;
  2952. }
  2953. while (true)
  2954. {
  2955. Thread.Sleep(4000);
  2956. if (iSEM.GetStageIs() == 0)
  2957. {
  2958. break;
  2959. }
  2960. }
  2961. //判断是否停止进程
  2962. if (key_stop)
  2963. {
  2964. log.Info("停止键按下", true);
  2965. return false;
  2966. }
  2967. //4、设置WD
  2968. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2969. Thread.Sleep(1000);
  2970. }
  2971. arg.Message = "拉直操作完成";
  2972. arg.State = true;
  2973. SendMsg("1-2");
  2974. return true;
  2975. }
  2976. //角度补偿
  2977. public bool TiltCorrection(float a_fAngle)
  2978. {
  2979. if (!iSEM.SetTiltAngleOn())
  2980. {
  2981. return false;
  2982. }
  2983. Thread.Sleep(200);
  2984. //恢复原始状态
  2985. if (!iSEM.SetTiltAngle(a_fAngle))
  2986. {
  2987. return false;
  2988. }
  2989. return true;
  2990. }
  2991. //拍图
  2992. public bool GetImage(String a_fileName)
  2993. {
  2994. log.Info("获取分辨率开始!", true);
  2995. //3. 获取分辨率
  2996. int[] ImageSize = iSEM.GetImageStore();
  2997. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2998. {
  2999. return false;
  3000. }
  3001. short width = (short)ImageSize[0];
  3002. short height = (short)ImageSize[1];
  3003. log.Info("获取分辨率结束!" + a_fileName + "====" + width + "*" + height, true);
  3004. //4. 抓图
  3005. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  3006. {
  3007. log.Info("抓图失败!", true);
  3008. return false;
  3009. }
  3010. return true;
  3011. }
  3012. //拍图1
  3013. public bool GetImage1(String a_fileName)
  3014. {
  3015. //3. 获取分辨率
  3016. int[] ImageSize = iSEM.GetImageStore();
  3017. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3018. {
  3019. return false;
  3020. }
  3021. short width = (short)ImageSize[0];
  3022. short height = (short)ImageSize[1];
  3023. //4. 抓图
  3024. if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
  3025. {
  3026. return false;
  3027. }
  3028. return true;
  3029. }
  3030. #region 算法设计
  3031. //执行自动对焦
  3032. public bool ImageFocus()
  3033. {
  3034. if (MParam.FocusMode == 1)//手动
  3035. {
  3036. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3037. {
  3038. }
  3039. else
  3040. {
  3041. return false;
  3042. }
  3043. }
  3044. else if (MParam.FocusMode == 2)//自有自动
  3045. {
  3046. //郝工增加自动对焦算法
  3047. //处理文件夹
  3048. if (Directory.Exists(focus_path))
  3049. {
  3050. Directory.Delete(focus_path, true);
  3051. }
  3052. Thread.Sleep(3000);
  3053. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3054. Thread.Sleep(1000);
  3055. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3056. Thread.Sleep(1000);
  3057. //再创建文件夹
  3058. Directory.CreateDirectory(focus_path);
  3059. //1、对焦参数类,2、输出工作距离
  3060. int wd = 0;
  3061. //20201015 根据当前的工作距离重新计算对焦位置
  3062. float currentWd = iSEM.GetWorkingDistance();
  3063. //MParam.AutoFocus.UP = currentWd * 1000000 - MParam.AutoFocus.Step;
  3064. //MParam.AutoFocus.Down = currentWd * 1000000 + MParam.AutoFocus.Step;
  3065. Thread.Sleep(2000);
  3066. float currentMag = iSEM.GetMagnification();
  3067. Thread.Sleep(2000);
  3068. FocusParam pFoucs = new FocusParam();
  3069. if (currentMag <= MParam.Photograph_Magnification)
  3070. {
  3071. pFoucs = MParam.AutoFocus;
  3072. pFoucs.UP = 5050;
  3073. pFoucs.Down = 5150;
  3074. pFoucs.Step = 50;
  3075. pFoucs.fStep = 10;
  3076. pFoucs.Range = 50;
  3077. //4、设置WD
  3078. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3079. Thread.Sleep(1000);
  3080. }
  3081. else
  3082. {
  3083. pFoucs = MParam.AutoFocus;
  3084. pFoucs.UP = 5000;
  3085. pFoucs.Down = 5200;
  3086. pFoucs.Step = 10;
  3087. pFoucs.fStep = 5;
  3088. pFoucs.Range = 50;
  3089. //4、设置WD
  3090. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3091. Thread.Sleep(1000);
  3092. }
  3093. //log.Info("修改对焦参数", true);
  3094. AutoFocus(pFoucs, out wd);
  3095. log.Info("自动调节算法输出" + (wd * 0.00000001).ToString(), true);
  3096. //设置工作距离
  3097. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  3098. //设置完工作距离后必须延迟5秒
  3099. Thread.Sleep(5000);
  3100. //处理图片位置
  3101. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3102. }
  3103. else if (MParam.FocusMode == 3) //客户自动
  3104. {
  3105. //后期和客户对接接口
  3106. List<string> filenames = new List<string>();
  3107. String retfilename = wr.Img_Auto_Focus(filenames);
  3108. }
  3109. else //蔡司自动对焦
  3110. {
  3111. iSEM.CmdAutoFocusCoarse();
  3112. while (true)
  3113. {
  3114. Thread.Sleep(10000);
  3115. if (0 == iSEM.GetAutoFunction())
  3116. {
  3117. break;
  3118. }
  3119. }
  3120. iSEM.CmdAutoFocusFine();
  3121. while (true)
  3122. {
  3123. Thread.Sleep(10000);
  3124. if (0 == iSEM.GetAutoFunction())
  3125. {
  3126. break;
  3127. }
  3128. }
  3129. }
  3130. return true;
  3131. }
  3132. //执行自动对焦
  3133. public bool ImageFocus1(Boolean Is_Stig)
  3134. {
  3135. if (MParam.FocusMode == 1)//手动
  3136. {
  3137. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3138. {
  3139. }
  3140. else
  3141. {
  3142. return false;
  3143. }
  3144. }
  3145. else if (MParam.FocusMode == 2)//自有自动
  3146. {
  3147. #region 执行蔡司自动对焦程序
  3148. //服务地址
  3149. string snumstr = @"http://192.168.1.101:8123";
  3150. bool normalized;
  3151. if (MParam.SampleName == "1")//第1大类代表3、4小类
  3152. {
  3153. normalized = false;
  3154. }
  3155. else
  3156. {
  3157. normalized = true;
  3158. }
  3159. // 调用方法;只对焦不消像散
  3160. if (Is_Stig)
  3161. {
  3162. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr,normalized);
  3163. if (focusstig != "success")
  3164. {
  3165. log.Error("对焦失败" + focusstig, false);
  3166. return false;
  3167. }
  3168. }
  3169. else
  3170. {
  3171. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr,normalized);
  3172. if (onlyfocus != "success")
  3173. {
  3174. return false;
  3175. }
  3176. }
  3177. #endregion
  3178. }
  3179. else if (MParam.FocusMode == 3) //客户自动
  3180. {
  3181. //后期和客户对接接口
  3182. List<string> filenames = new List<string>();
  3183. String retfilename = wr.Img_Auto_Focus(filenames);
  3184. }
  3185. else //蔡司自动对焦
  3186. {
  3187. iSEM.CmdAutoFocusCoarse();
  3188. while (true)
  3189. {
  3190. Thread.Sleep(10000);
  3191. if (0 == iSEM.GetAutoFunction())
  3192. {
  3193. break;
  3194. }
  3195. }
  3196. iSEM.CmdAutoFocusFine();
  3197. while (true)
  3198. {
  3199. Thread.Sleep(10000);
  3200. if (0 == iSEM.GetAutoFunction())
  3201. {
  3202. break;
  3203. }
  3204. }
  3205. }
  3206. return true;
  3207. }
  3208. //执行自动消像散
  3209. public bool ImageStig()
  3210. {
  3211. if (MParam.FocusMode == 1)//手动
  3212. {
  3213. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3214. {
  3215. }
  3216. else
  3217. {
  3218. return false;
  3219. }
  3220. }
  3221. else if (MParam.FocusMode == 2)//自有自动
  3222. {
  3223. //郝工增加自动对焦算法
  3224. //处理文件夹
  3225. if (Directory.Exists(StigX_path))
  3226. {
  3227. Directory.Delete(StigX_path, true);
  3228. }
  3229. Thread.Sleep(3000);
  3230. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3231. Thread.Sleep(1000);
  3232. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3233. Thread.Sleep(1000);
  3234. //再创建文件夹
  3235. Directory.CreateDirectory(StigX_path);
  3236. //1、对焦参数类,2、输出像散值
  3237. int stigX = 0;
  3238. //根据当前的stigX重新计算像散值
  3239. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3240. //MParam.AutoStigX.Step = 10; //像散的步长为10
  3241. //MParam.AutoStigX.UP = currentStigX - MParam.AutoStigX.Step;
  3242. //MParam.AutoStigX.Down = currentStigX + MParam.AutoStigX.Step;
  3243. //设置工作距离
  3244. iSEM.SetAstigmatismX((float)0);
  3245. //设置完工作距离后必须延迟5秒
  3246. Thread.Sleep(5000);
  3247. //log.Info("修改消像散参数", true);
  3248. AutoStig(MParam.AutoStigX, out stigX);
  3249. log.Info("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3250. //设置工作距离
  3251. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3252. //设置完工作距离后必须延迟5秒
  3253. Thread.Sleep(5000);
  3254. //处理图片位置
  3255. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3256. //处理文件夹
  3257. if (Directory.Exists(StigY_path))
  3258. {
  3259. Directory.Delete(StigY_path, true);
  3260. }
  3261. Thread.Sleep(3000);
  3262. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3263. Thread.Sleep(1000);
  3264. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3265. Thread.Sleep(1000);
  3266. //再创建文件夹
  3267. Directory.CreateDirectory(StigY_path);
  3268. //1、对焦参数类,2、输出像散值
  3269. int stigY = 0;
  3270. //根据当前的stigX重新计算像散值
  3271. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3272. //MParam.AutoStigY.Step = 10; //像散的步长为10
  3273. //MParam.AutoStigY.UP = MParam.AutoStigY.;
  3274. //MParam.AutoStigY.Down = MParam.AutoStigY.Step;
  3275. iSEM.SetAstigmatismY((float)0);
  3276. Thread.Sleep(2000);
  3277. log.Info("修改消像散参数", true);
  3278. AutoStig(MParam.AutoStigY, out stigY);
  3279. log.Info("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3280. //设置工作距离
  3281. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3282. //设置完工作距离后必须延迟5秒
  3283. Thread.Sleep(5000);
  3284. }
  3285. else if (MParam.FocusMode == 3) //客户自动
  3286. {
  3287. //后期和客户对接接口
  3288. List<string> filenames = new List<string>();
  3289. String retfilename = wr.Img_Auto_Focus(filenames);
  3290. }
  3291. else //蔡司自动对焦
  3292. {
  3293. iSEM.CmdAutoFocusCoarse();
  3294. while (true)
  3295. {
  3296. Thread.Sleep(10000);
  3297. if (0 == iSEM.GetAutoFunction())
  3298. {
  3299. break;
  3300. }
  3301. }
  3302. iSEM.CmdAutoFocusFine();
  3303. while (true)
  3304. {
  3305. Thread.Sleep(10000);
  3306. if (0 == iSEM.GetAutoFunction())
  3307. {
  3308. break;
  3309. }
  3310. }
  3311. }
  3312. return true;
  3313. }
  3314. //自动聚焦
  3315. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  3316. {
  3317. a_nWd = 0;
  3318. float wd = iSEM.GetWorkingDistance();
  3319. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3320. if (a_param == null)
  3321. {
  3322. log.Info("空参数", true);
  3323. return false;
  3324. }
  3325. string path = a_param.Path;
  3326. if (!Directory.Exists(path))
  3327. {
  3328. log.Info("文件夹丢失", true);
  3329. return false;
  3330. }
  3331. string path_coarse = a_param.Path + "\\Coarse";
  3332. if (!Directory.Exists(path_coarse))
  3333. {
  3334. Directory.CreateDirectory(path_coarse);
  3335. }
  3336. string path_fine = a_param.Path + "\\Fine";
  3337. if (!Directory.Exists(path_fine))
  3338. {
  3339. Directory.CreateDirectory(path_fine);
  3340. }
  3341. //1. 拍照
  3342. //1.1, 粗拍照
  3343. //1.1.1, 根据参数计算拍照次数
  3344. double nUp = a_param.UP * 100.0;
  3345. double nDown = a_param.Down * 100.0;
  3346. double nStep = a_param.Step * 100.0;
  3347. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3348. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3349. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3350. //粗拍照
  3351. for (int i = 0; i < nTimes; i++)
  3352. {
  3353. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3354. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3355. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3356. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3357. int swd = cWd / 100;
  3358. //SendMsg("wd = " + swd.ToString() +"um");
  3359. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3360. arg.Picture_Information.Picture_FullPath = fileName;
  3361. if (!GetImage(fileName))
  3362. {
  3363. return false;
  3364. }
  3365. //判断是否停止进程
  3366. if (key_stop)
  3367. {
  3368. return false;
  3369. }
  3370. //Thread.Sleep(3000);
  3371. }
  3372. //1.2, 选定细拍照的工作距离
  3373. int CorWd = 510000;
  3374. ChooseBest(path_coarse, out CorWd);
  3375. if (CorWd == -1)
  3376. CorWd = 510000;
  3377. else
  3378. a_nWd = CorWd;
  3379. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3380. //1.3, 细拍照
  3381. if ((CorWd - a_param.Range * 100.0) <= 0)
  3382. {
  3383. return false;
  3384. }
  3385. double nfUp = CorWd - a_param.Range * 100.0;
  3386. double nfStep = a_param.fStep * 100.0;
  3387. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3388. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3389. for (int i = 0; i < nfTimes; i++)
  3390. {
  3391. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3392. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3393. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3394. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3395. int swd = cWd / 100;
  3396. //SendMsg("wd = " + swd.ToString() + "um");
  3397. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3398. arg.Picture_Information.Picture_FullPath = fileName;
  3399. if (!GetImage(fileName))
  3400. {
  3401. return false;
  3402. }
  3403. //判断是否停止进程
  3404. if (key_stop)
  3405. {
  3406. return false;
  3407. }
  3408. //Thread.Sleep(2000);
  3409. }
  3410. int fineWd = CorWd;
  3411. ChooseBest(path_fine, out fineWd);
  3412. //SendMsg("wd fine max = " + fineWd.ToString());
  3413. if (fineWd == -1)
  3414. a_nWd = CorWd;
  3415. else
  3416. a_nWd = fineWd;
  3417. return true;
  3418. }
  3419. //自动聚焦1
  3420. public bool AutoFocus1(FocusParam a_param, out int a_nWd)
  3421. {
  3422. a_nWd = 0;
  3423. float wd = iSEM.GetWorkingDistance();
  3424. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3425. if (a_param == null)
  3426. {
  3427. log.Info("空参数", true);
  3428. return false;
  3429. }
  3430. string path = a_param.Path;
  3431. if (!Directory.Exists(path))
  3432. {
  3433. log.Info("文件夹丢失", true);
  3434. return false;
  3435. }
  3436. string path_coarse = a_param.Path + "\\Coarse";
  3437. if (!Directory.Exists(path_coarse))
  3438. {
  3439. Directory.CreateDirectory(path_coarse);
  3440. }
  3441. string path_fine = a_param.Path + "\\Fine";
  3442. if (!Directory.Exists(path_fine))
  3443. {
  3444. Directory.CreateDirectory(path_fine);
  3445. }
  3446. //1. 拍照
  3447. //1.1, 粗拍照
  3448. //1.1.1, 根据参数计算拍照次数
  3449. double nUp = a_param.UP * 100.0;
  3450. double nDown = a_param.Down * 100.0;
  3451. double nStep = a_param.Step * 100.0;
  3452. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3453. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3454. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3455. //粗拍照
  3456. for (int i = 0; i < nTimes; i++)
  3457. {
  3458. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3459. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3460. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3461. Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
  3462. int swd = cWd / 100;
  3463. //SendMsg("wd = " + swd.ToString() +"um");
  3464. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3465. //arg.Picture_Information.Picture_FullPath = fileName;
  3466. if (!GetImage1(fileName))
  3467. {
  3468. return false;
  3469. }
  3470. //arg.State = true;
  3471. //arg.Message = "自动对焦";
  3472. //SendMsg(step_code);
  3473. //判断是否停止进程
  3474. if (key_stop)
  3475. {
  3476. return false;
  3477. }
  3478. //Thread.Sleep(3000);
  3479. }
  3480. //1.2, 选定细拍照的工作距离
  3481. int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3482. ChooseBest(path_coarse, out CorWd);
  3483. if (CorWd == -1)
  3484. CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3485. else
  3486. a_nWd = CorWd;
  3487. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3488. //1.3, 细拍照
  3489. if ((CorWd - a_param.Range * 100.0) <= 0)
  3490. {
  3491. return false;
  3492. }
  3493. double nfUp = CorWd - a_param.Range * 100.0;
  3494. double nfStep = a_param.fStep * 100.0;
  3495. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3496. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3497. for (int i = 0; i < nfTimes; i++)
  3498. {
  3499. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3500. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3501. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3502. Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
  3503. int swd = cWd / 100;
  3504. //SendMsg("wd = " + swd.ToString() + "um");
  3505. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3506. //arg.Picture_Information.Picture_FullPath = fileName;
  3507. if (!GetImage1(fileName))
  3508. {
  3509. return false;
  3510. }
  3511. //arg.State = true;
  3512. //arg.Message = "自动对焦";
  3513. //SendMsg(step_code);
  3514. //判断是否停止进程
  3515. if (key_stop)
  3516. {
  3517. return false;
  3518. }
  3519. //Thread.Sleep(2000);
  3520. }
  3521. int fineWd = CorWd;
  3522. ChooseBest(path_fine, out fineWd);
  3523. //SendMsg("wd fine max = " + fineWd.ToString());
  3524. if (fineWd == -1)
  3525. a_nWd = CorWd;
  3526. else
  3527. a_nWd = fineWd;
  3528. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3529. //arg.State = true;
  3530. //arg.Message = "自动对焦";
  3531. //SendMsg("0-9");
  3532. return true;
  3533. }
  3534. //自动消像散 AutoStig
  3535. public bool AutoStig(FocusParam a_param, out int a_nWd)
  3536. {
  3537. a_nWd = 0;
  3538. float wd = 0;
  3539. if (a_param.TYPE == 2)
  3540. {
  3541. wd = iSEM.GetAstigmatismX();
  3542. }
  3543. else if (a_param.TYPE == 3)
  3544. {
  3545. wd = iSEM.GetAstigmatismY();
  3546. }
  3547. else
  3548. {
  3549. log.Info("自动消像散参数设置有误", true);
  3550. return false;
  3551. }
  3552. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3553. if (a_param == null)
  3554. {
  3555. log.Info("空参数", true);
  3556. return false;
  3557. }
  3558. string path = a_param.Path;
  3559. if (!Directory.Exists(path))
  3560. {
  3561. log.Error("文件夹丢失", false);
  3562. return false;
  3563. }
  3564. string path_coarse = a_param.Path + "\\Coarse";
  3565. if (!Directory.Exists(path_coarse))
  3566. {
  3567. Directory.CreateDirectory(path_coarse);
  3568. }
  3569. string path_fine = a_param.Path + "\\Fine";
  3570. if (!Directory.Exists(path_fine))
  3571. {
  3572. Directory.CreateDirectory(path_fine);
  3573. }
  3574. //1. 拍照
  3575. //1.1, 粗拍照
  3576. //1.1.1, 根据参数计算拍照次数
  3577. double nUp = a_param.UP * 100.0;
  3578. double nDown = a_param.Down * 100.0;
  3579. double nStep = a_param.Step * 100.0;
  3580. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3581. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3582. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3583. //粗拍照
  3584. for (int i = 0; i < nTimes; i++)
  3585. {
  3586. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3587. if (a_param.TYPE == 2)
  3588. {
  3589. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3590. }
  3591. else if (a_param.TYPE == 3)
  3592. {
  3593. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3594. }
  3595. else
  3596. {
  3597. log.Info("自动消像散参数设置有误", true);
  3598. return false;
  3599. }
  3600. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3601. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3602. int swd = cWd / 100;
  3603. //SendMsg("wd = " + swd.ToString() +"um");
  3604. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3605. arg.Picture_Information.Picture_FullPath = fileName;
  3606. if (!GetImage(fileName))
  3607. {
  3608. return false;
  3609. }
  3610. arg.State = true;
  3611. arg.Message = "自动像散";
  3612. SendMsg("0-8");
  3613. //判断是否停止进程
  3614. if (key_stop)
  3615. {
  3616. return false;
  3617. }
  3618. //Thread.Sleep(3000);
  3619. }
  3620. //1.2, 选定细拍照的工作距离
  3621. int CorWd;
  3622. ChooseBest(path_coarse, out CorWd);
  3623. if (CorWd == -1)
  3624. {
  3625. a_nWd = 0;
  3626. }
  3627. else
  3628. {
  3629. a_nWd = CorWd;
  3630. }
  3631. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3632. //1.3, 细拍照
  3633. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3634. {
  3635. return false;
  3636. }
  3637. double nfUp = 0;
  3638. if (a_param.Range >= 0)
  3639. nfUp = CorWd - a_param.Range * 100.0;
  3640. else
  3641. nfUp = CorWd + a_param.Range * 100.0;
  3642. double nfStep = a_param.fStep * 100.0;
  3643. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3644. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3645. for (int i = 0; i < nfTimes; i++)
  3646. {
  3647. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3648. if (a_param.TYPE == 2)
  3649. {
  3650. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3651. }
  3652. else if (a_param.TYPE == 3)
  3653. {
  3654. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3655. }
  3656. else
  3657. {
  3658. log.Info("自动消像散参数设置有误", true);
  3659. return false;
  3660. }
  3661. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3662. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3663. int swd = cWd / 100;
  3664. //SendMsg("wd = " + swd.ToString() + "um");
  3665. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3666. arg.Picture_Information.Picture_FullPath = fileName;
  3667. if (!GetImage(fileName))
  3668. {
  3669. return false;
  3670. }
  3671. arg.State = true;
  3672. arg.Message = "自动像散";
  3673. SendMsg("0-8");
  3674. //判断是否停止进程
  3675. if (key_stop)
  3676. {
  3677. return false;
  3678. }
  3679. //Thread.Sleep(2000);
  3680. }
  3681. int fineWd = CorWd;
  3682. ChooseBest(path_fine, out fineWd);
  3683. //SendMsg("wd fine max = " + fineWd.ToString());
  3684. if (fineWd == -1)
  3685. a_nWd = CorWd;
  3686. else
  3687. a_nWd = fineWd;
  3688. return true;
  3689. }
  3690. //执行自动消像散1
  3691. public bool ImageStig1()
  3692. {
  3693. if (MParam.FocusMode == 1)//手动
  3694. {
  3695. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3696. {
  3697. }
  3698. else
  3699. {
  3700. return false;
  3701. }
  3702. }
  3703. else if (MParam.FocusMode == 2)//自有自动
  3704. {
  3705. //郝工增加自动对焦算法
  3706. //处理文件夹
  3707. if (Directory.Exists(StigX_path))
  3708. {
  3709. Directory.Delete(StigX_path, true);
  3710. }
  3711. Thread.Sleep(3000);
  3712. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3713. Thread.Sleep(200);
  3714. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3715. Thread.Sleep(200);
  3716. //再创建文件夹
  3717. Directory.CreateDirectory(StigX_path);
  3718. //1、对焦参数类,2、输出像散值
  3719. int stigX = 0;
  3720. //根据当前的stigX重新计算像散值
  3721. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3722. //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
  3723. //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
  3724. //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
  3725. //设置工作距离
  3726. currentStigX = iSEM.GetAstigmatismX();
  3727. Thread.Sleep(1000);
  3728. FocusParam pFocus = new FocusParam();
  3729. pFocus = MParam.AutoStigX;
  3730. float old_up = MParam.AutoStigX.UP;
  3731. float old_down = MParam.AutoStigX.Down;
  3732. float setvalue = MParam.AutoStigX.UP;
  3733. pFocus.UP = currentStigX - setvalue;
  3734. pFocus.Down = currentStigX + setvalue;
  3735. //MParam.AutoStigX.Step = 1;
  3736. //MParam.AutoStigX.Range = (float)0.5;
  3737. //MParam.AutoStigX.fStep = (float)0.1;
  3738. log.Info("消像散参数: up = " + pFocus.UP + ",down = " + pFocus.Down + ",step =" + pFocus.Step + ",rang =" + pFocus.Range + ",fstep = " + pFocus.fStep, true);
  3739. //log.Info("修改消像散参数", true);
  3740. AutoStig1(pFocus, out stigX);
  3741. MParam.AutoStigX.UP = old_up;
  3742. MParam.AutoStigX.Down = old_down;
  3743. log.Info("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3744. //设置工作距离
  3745. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3746. //设置完工作距离后必须延迟5秒
  3747. Thread.Sleep(5000);
  3748. //处理图片位置
  3749. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3750. //处理文件夹
  3751. if (Directory.Exists(StigY_path))
  3752. {
  3753. Directory.Delete(StigY_path, true);
  3754. }
  3755. Thread.Sleep(3000);
  3756. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3757. Thread.Sleep(200);
  3758. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3759. Thread.Sleep(200);
  3760. //再创建文件夹
  3761. Directory.CreateDirectory(StigY_path);
  3762. //1、对焦参数类,2、输出像散值
  3763. int stigY = 0;
  3764. //根据当前的stigX重新计算像散值
  3765. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3766. //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
  3767. //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
  3768. //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
  3769. currentStigY = iSEM.GetAstigmatismY();
  3770. Thread.Sleep(1000);
  3771. //MParam.AutoStigY.UP = currentStigY - setvalue;
  3772. //MParam.AutoStigY.Down = currentStigY + setvalue;
  3773. //MParam.AutoStigY.Step = 1;
  3774. //MParam.AutoStigY.Range = (float)0.5;
  3775. //MParam.AutoStigY.fStep = (float)0.1;
  3776. FocusParam pFocusY = new FocusParam();
  3777. pFocusY = MParam.AutoStigY;
  3778. float old_upY = MParam.AutoStigY.UP;
  3779. float old_downY = MParam.AutoStigY.Down;
  3780. //float setvalue = MParam.AutoStigX.UP;
  3781. pFocusY.UP = currentStigY - setvalue;
  3782. pFocusY.Down = currentStigY + setvalue;
  3783. log.Info("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
  3784. AutoStig1(pFocusY, out stigY);
  3785. MParam.AutoStigY.UP = old_upY;
  3786. MParam.AutoStigY.Down = old_downY;
  3787. log.Info("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3788. //设置工作距离
  3789. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3790. //设置完工作距离后必须延迟5秒
  3791. Thread.Sleep(5000);
  3792. }
  3793. else if (MParam.FocusMode == 3) //客户自动
  3794. {
  3795. //后期和客户对接接口
  3796. List<string> filenames = new List<string>();
  3797. String retfilename = wr.Img_Auto_Focus(filenames);
  3798. }
  3799. else //蔡司自动对焦
  3800. {
  3801. iSEM.CmdAutoFocusCoarse();
  3802. while (true)
  3803. {
  3804. Thread.Sleep(10000);
  3805. if (0 == iSEM.GetAutoFunction())
  3806. {
  3807. break;
  3808. }
  3809. }
  3810. iSEM.CmdAutoFocusFine();
  3811. while (true)
  3812. {
  3813. Thread.Sleep(10000);
  3814. if (0 == iSEM.GetAutoFunction())
  3815. {
  3816. break;
  3817. }
  3818. }
  3819. }
  3820. return true;
  3821. }
  3822. //自动消像散 AutoStig1
  3823. public bool AutoStig1(FocusParam a_param, out int a_nWd)
  3824. {
  3825. a_nWd = 0;
  3826. float wd = 0;
  3827. if (a_param.TYPE == 2)
  3828. {
  3829. wd = iSEM.GetAstigmatismX();
  3830. }
  3831. else if (a_param.TYPE == 3)
  3832. {
  3833. wd = iSEM.GetAstigmatismY();
  3834. }
  3835. else
  3836. {
  3837. log.Info("自动消像散参数设置有误", true);
  3838. return false;
  3839. }
  3840. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3841. if (a_param == null)
  3842. {
  3843. log.Info("空参数", true);
  3844. return false;
  3845. }
  3846. string path = a_param.Path;
  3847. if (!Directory.Exists(path))
  3848. {
  3849. log.Info("文件夹丢失", true);
  3850. return false;
  3851. }
  3852. string path_coarse = a_param.Path + "\\Coarse";
  3853. if (!Directory.Exists(path_coarse))
  3854. {
  3855. Directory.CreateDirectory(path_coarse);
  3856. }
  3857. string path_fine = a_param.Path + "\\Fine";
  3858. if (!Directory.Exists(path_fine))
  3859. {
  3860. Directory.CreateDirectory(path_fine);
  3861. }
  3862. //1. 拍照
  3863. //1.1, 粗拍照
  3864. //1.1.1, 根据参数计算拍照次数
  3865. double nUp = a_param.UP * 100.0;
  3866. double nDown = a_param.Down * 100.0;
  3867. double nStep = a_param.Step * 100.0;
  3868. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3869. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  3870. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3871. //粗拍照
  3872. for (int i = 0; i < nTimes; i++)
  3873. {
  3874. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3875. if (a_param.TYPE == 2)
  3876. {
  3877. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3878. }
  3879. else if (a_param.TYPE == 3)
  3880. {
  3881. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3882. }
  3883. else
  3884. {
  3885. log.Info("自动消像散参数设置有误", true);
  3886. return false;
  3887. }
  3888. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3889. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3890. int swd = cWd / 100;
  3891. //SendMsg("wd = " + swd.ToString() +"um");
  3892. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3893. arg.Picture_Information.Picture_FullPath = fileName;
  3894. if (!GetImage1(fileName))
  3895. {
  3896. return false;
  3897. }
  3898. //判断是否停止进程
  3899. if (key_stop)
  3900. {
  3901. return false;
  3902. }
  3903. //Thread.Sleep(3000);
  3904. }
  3905. //1.2, 选定细拍照的工作距离
  3906. int CorWd;
  3907. ChooseBest(path_coarse, out CorWd);
  3908. if (CorWd == -1)
  3909. {
  3910. a_nWd = 0;
  3911. }
  3912. else
  3913. {
  3914. a_nWd = CorWd;
  3915. }
  3916. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3917. //1.3, 细拍照
  3918. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3919. {
  3920. return false;
  3921. }
  3922. double nfUp = 0;
  3923. if (a_param.Range >= 0)
  3924. nfUp = CorWd - a_param.Range * 100.0;
  3925. else
  3926. nfUp = CorWd + a_param.Range * 100.0;
  3927. double nfStep = a_param.fStep * 100.0;
  3928. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3929. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3930. for (int i = 0; i < nfTimes; i++)
  3931. {
  3932. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3933. if (a_param.TYPE == 2)
  3934. {
  3935. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3936. }
  3937. else if (a_param.TYPE == 3)
  3938. {
  3939. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3940. }
  3941. else
  3942. {
  3943. log.Info("自动消像散参数设置有误", true);
  3944. return false;
  3945. }
  3946. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3947. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3948. int swd = cWd / 100;
  3949. //SendMsg("wd = " + swd.ToString() + "um");
  3950. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3951. arg.Picture_Information.Picture_FullPath = fileName;
  3952. if (!GetImage1(fileName))
  3953. {
  3954. return false;
  3955. }
  3956. //判断是否停止进程
  3957. if (key_stop)
  3958. {
  3959. return false;
  3960. }
  3961. //Thread.Sleep(2000);
  3962. }
  3963. int fineWd = CorWd;
  3964. ChooseBest(path_fine, out fineWd);
  3965. //SendMsg("wd fine max = " + fineWd.ToString());
  3966. if (fineWd == -1)
  3967. a_nWd = CorWd;
  3968. else
  3969. a_nWd = fineWd;
  3970. return true;
  3971. }
  3972. //自动FIB对焦 AutoFIBFocus
  3973. public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
  3974. {
  3975. a_nWd = 0;
  3976. float wd = 0;
  3977. if (a_param.TYPE == 4)
  3978. {
  3979. wd = iSEM.GetFIBObjectivePotential();
  3980. }
  3981. else
  3982. {
  3983. log.Error("FIB自动聚焦参数设置有误", false);
  3984. return false;
  3985. }
  3986. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3987. if (a_param == null)
  3988. {
  3989. log.Error("空参数", false);
  3990. return false;
  3991. }
  3992. string path = a_param.Path;
  3993. if (!Directory.Exists(path))
  3994. {
  3995. log.Error("文件夹丢失", false);
  3996. return false;
  3997. }
  3998. string path_coarse = a_param.Path + "\\Coarse";
  3999. if (!Directory.Exists(path_coarse))
  4000. {
  4001. Directory.CreateDirectory(path_coarse);
  4002. }
  4003. string path_fine = a_param.Path + "\\Fine";
  4004. if (!Directory.Exists(path_fine))
  4005. {
  4006. Directory.CreateDirectory(path_fine);
  4007. }
  4008. //1. 拍照
  4009. //1.1, 粗拍照
  4010. //1.1.1, 根据参数计算拍照次数
  4011. double nUp = a_param.UP * 100.0;
  4012. double nDown = a_param.Down * 100.0;
  4013. double nStep = a_param.Step * 100.0;
  4014. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  4015. log.Info("初调拍照次数=" + nTimes.ToString(), true);
  4016. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  4017. //粗拍照
  4018. for (int i = 0; i < nTimes; i++)
  4019. {
  4020. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  4021. if (a_param.TYPE == 4)
  4022. {
  4023. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4024. }
  4025. else
  4026. {
  4027. log.Error("FIB对焦参数设置有误,对焦类型错", false);
  4028. return false;
  4029. }
  4030. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4031. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4032. int swd = cWd / 100;
  4033. //SendMsg("wd = " + swd.ToString() +"um");
  4034. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4035. arg.Picture_Information.Picture_FullPath = fileName;
  4036. if (!GetImage(fileName))
  4037. {
  4038. return false;
  4039. }
  4040. arg.State = true;
  4041. arg.Message = "FIB自动对焦";
  4042. SendMsg(step_code);
  4043. //判断是否停止进程
  4044. if (key_stop)
  4045. {
  4046. return false;
  4047. }
  4048. //Thread.Sleep(3000);
  4049. }
  4050. //1.2, 选定细拍照的工作距离
  4051. int CorWd;
  4052. ChooseBest(path_coarse, out CorWd);
  4053. a_nWd = CorWd;
  4054. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4055. //1.3, 细拍照
  4056. if ((CorWd - a_param.Range * 100.0) < 0)
  4057. {
  4058. return false;
  4059. }
  4060. double nfUp = CorWd - a_param.Range * 100.0;
  4061. double nfStep = a_param.fStep * 100.0;
  4062. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4063. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4064. for (int i = 0; i < nfTimes; i++)
  4065. {
  4066. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4067. if (a_param.TYPE == 4)
  4068. {
  4069. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4070. }
  4071. else
  4072. {
  4073. log.Error("自动消像散参数设置有误", false);
  4074. return false;
  4075. }
  4076. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4077. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4078. int swd = cWd / 100;
  4079. //SendMsg("wd = " + swd.ToString() + "um");
  4080. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4081. arg.Picture_Information.Picture_FullPath = fileName;
  4082. if (!GetImage(fileName))
  4083. {
  4084. return false;
  4085. }
  4086. arg.State = true;
  4087. arg.Message = "FIB自动对焦";
  4088. SendMsg(step_code);
  4089. //判断是否停止进程
  4090. if (key_stop)
  4091. {
  4092. return false;
  4093. }
  4094. //Thread.Sleep(2000);
  4095. }
  4096. int fineWd;
  4097. ChooseBest(path_fine, out fineWd);
  4098. //SendMsg("wd fine max = " + fineWd.ToString());
  4099. a_nWd = fineWd;
  4100. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4101. return true;
  4102. }
  4103. //LoG算子计算
  4104. private double LoGMean(string a_strImgPath)
  4105. {
  4106. //读入Img文件
  4107. if (!File.Exists(a_strImgPath))
  4108. {
  4109. return 0;
  4110. }
  4111. Mat src, gray_src;
  4112. int kernel_size = 3;
  4113. src = Cv2.ImRead(a_strImgPath);
  4114. gray_src = new Mat();
  4115. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4116. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4117. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4118. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4119. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  4120. Cv2.ConvertScaleAbs(src, src);
  4121. //图像的平均灰度
  4122. double meanValue = 0.0;
  4123. meanValue = Cv2.Mean(src)[0];
  4124. return meanValue;
  4125. }
  4126. //梯度计算
  4127. private double Tenengrad(string a_strImgPath)
  4128. {
  4129. //读入Img文件
  4130. if (!File.Exists(a_strImgPath))
  4131. {
  4132. return 0;
  4133. }
  4134. Mat src;
  4135. src = Cv2.ImRead(a_strImgPath);
  4136. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4137. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4138. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4139. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4140. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  4141. //图像的平均灰度
  4142. double meanValue = 0.0;
  4143. meanValue = Cv2.Mean(src)[0];
  4144. return meanValue;
  4145. }
  4146. //梯度计算
  4147. private double TTgrad(string a_strImgPath)
  4148. {
  4149. //读入Img文件
  4150. if (!File.Exists(a_strImgPath))
  4151. {
  4152. return 0;
  4153. }
  4154. Mat src;
  4155. src = Cv2.ImRead(a_strImgPath);
  4156. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4157. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4158. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4159. Mat scalex = new Mat();
  4160. Mat scaley = new Mat();
  4161. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  4162. Cv2.ConvertScaleAbs(src, scalex);
  4163. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  4164. Cv2.ConvertScaleAbs(src, scaley);
  4165. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  4166. //图像的平均灰度
  4167. double meanValue = 0.0;
  4168. meanValue = Cv2.Mean(src)[0];
  4169. return meanValue;
  4170. }
  4171. //三选二算法
  4172. private bool ChooseBest(string a_strImgPath, out int a_nWd)
  4173. {
  4174. a_nWd = -1;
  4175. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  4176. float[] values = new float[files.Length];
  4177. double smax1 = LoGMean(files[0]);
  4178. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  4179. double smax2 = Tenengrad(files[0]);
  4180. int wdmax2 = wdmax1;
  4181. double smax3 = TTgrad(files[0]);
  4182. int wdmax3 = wdmax1;
  4183. int x = 0;
  4184. foreach (var file in files)
  4185. {
  4186. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  4187. double svalue1 = LoGMean(file);
  4188. double svalue2 = Tenengrad(file);
  4189. double svalue3 = TTgrad(file);
  4190. if (smax1 < svalue1)
  4191. {
  4192. smax1 = svalue1;
  4193. wdmax1 = wd;
  4194. }
  4195. if (smax2 < svalue2)
  4196. {
  4197. smax2 = svalue2;
  4198. wdmax2 = wd;
  4199. }
  4200. if (smax3 < svalue3)
  4201. {
  4202. smax3 = svalue3;
  4203. wdmax3 = wd;
  4204. }
  4205. x++;
  4206. }
  4207. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  4208. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  4209. {
  4210. a_nWd = wdmax1;
  4211. //SendMsg("焦距 = " + wdmax1.ToString());
  4212. }
  4213. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  4214. {
  4215. a_nWd = wdmax2;
  4216. //SendMsg("焦距 = " + wdmax2.ToString());
  4217. }
  4218. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  4219. {
  4220. a_nWd = wdmax3;
  4221. //SendMsg("焦距 = " + wdmax3.ToString());
  4222. }
  4223. else
  4224. {
  4225. //SendMsg("对焦失败。");
  4226. return false;
  4227. }
  4228. return true;
  4229. }
  4230. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  4231. bool MoveToPixByMoveStage(float xc, float yc)
  4232. {
  4233. //单位是m/pix
  4234. float XpixSize = iSEM.GetPixelSize();
  4235. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4236. float YpixSize = iSEM.GetPixelSize();///(float)MParam.PixelSizeCor);
  4237. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4238. Thread.Sleep(500);
  4239. //0:width, 1:height
  4240. int[] imageSize = iSEM.GetImageStore();
  4241. int width = imageSize[0] / 2;
  4242. int height = imageSize[1] / 2;
  4243. log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4244. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4245. float deltX = (xc - (float)width) * XpixSize;
  4246. float deltY = (yc - (float)height) * YpixSize;
  4247. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  4248. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  4249. float xpCur = iSEM.GetStageAtX();
  4250. float ypCur = iSEM.GetStageAtY();
  4251. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4252. float xpNew = xpCur - deltX;
  4253. float ypNew = ypCur + deltY;
  4254. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4255. //计算光束偏移值:
  4256. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  4257. {
  4258. log.Info("X方向移动样品台", true);
  4259. if (!iSEM.SetStageGotoX(xpNew))
  4260. {
  4261. return false;
  4262. }
  4263. //判断是否移动完成
  4264. while (true)
  4265. {
  4266. Thread.Sleep(5000);
  4267. if (iSEM.GetStageIs() == 0)
  4268. {
  4269. break;
  4270. }
  4271. }
  4272. }
  4273. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  4274. {
  4275. log.Info("Y方向移动样品台", true);
  4276. if (!iSEM.SetStageGotoY(ypNew))
  4277. {
  4278. return false;
  4279. }
  4280. //判断是否移动完成
  4281. while (true)
  4282. {
  4283. Thread.Sleep(5000);
  4284. if (iSEM.GetStageIs() == 0)
  4285. {
  4286. break;
  4287. }
  4288. }
  4289. }
  4290. return true;
  4291. }
  4292. //移动到像素位置
  4293. bool MoveToPix(float xc, float yc)
  4294. {
  4295. //单位是m/pix
  4296. float XpixSize = iSEM.GetPixelSize();
  4297. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4298. float YpixSize = (XpixSize / (float)MParam.PixelSizeCor);
  4299. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4300. Thread.Sleep(200);
  4301. //0:width, 1:height
  4302. int[] imageSize = iSEM.GetImageStore();
  4303. int width = imageSize[0] / 2;
  4304. int height = imageSize[1] / 2;
  4305. log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4306. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4307. float deltX = (xc - (float)width) * XpixSize;
  4308. float deltY = (yc - (float)height) * YpixSize;
  4309. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  4310. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  4311. float xpCur = iSEM.GetStageAtX();
  4312. Thread.Sleep(200);
  4313. float ypCur = iSEM.GetStageAtY();
  4314. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4315. float xpNew = xpCur - deltX;
  4316. float ypNew = ypCur + deltY;
  4317. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4318. //计算最大偏移量
  4319. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4320. Thread.Sleep(200);
  4321. iSEM.SetBeamShiftX(100);
  4322. Thread.Sleep(200);
  4323. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4324. Thread.Sleep(200);
  4325. iSEM.SetBeamShiftX(beamXCur);
  4326. Thread.Sleep(200);
  4327. //计算光束偏移值:
  4328. float beamX = iSEM.GetBeamOffsetX();
  4329. log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4330. beamX = (-deltX + beamX);
  4331. log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4332. if (((beamX <= beamXMax) && (beamX >= 0)) ||
  4333. ((beamX >= -beamXMax) && (beamX < 0)))
  4334. {
  4335. log.Info("X方向移动光束", true);
  4336. float beamXShift = beamX * 100 / beamXMax;
  4337. log.Info("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  4338. if (!iSEM.SetBeamShiftX(beamXShift))//if (!iSEM.SetBeamOffsetX(beamX))
  4339. {
  4340. log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4341. return false;
  4342. }
  4343. }
  4344. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4345. {
  4346. log.Info("X方向移动样品台", true);
  4347. if (!iSEM.SetStageGotoX(xpNew))
  4348. {
  4349. return false;
  4350. }
  4351. //判断是否移动完成
  4352. while (true)
  4353. {
  4354. Thread.Sleep(4000);
  4355. if (iSEM.GetStageIs() == 0)
  4356. {
  4357. break;
  4358. }
  4359. }
  4360. }
  4361. float beamY = iSEM.GetBeamOffsetY();
  4362. log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4363. beamY = (-deltY + beamY);
  4364. log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4365. //计算最大偏移量
  4366. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4367. Thread.Sleep(200);
  4368. iSEM.SetBeamShiftY(100);
  4369. Thread.Sleep(200);
  4370. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4371. Thread.Sleep(200);
  4372. iSEM.SetBeamShiftY(beamYCur);
  4373. Thread.Sleep(200);
  4374. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  4375. ((beamY >= -beamYMax) && (beamY < 0)))
  4376. {
  4377. log.Info("Y方向移动光束", true);
  4378. float beamYShift = beamY * 100 / beamYMax;
  4379. log.Info("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  4380. //if(!iSEM.SetBeamOffsetY(beamY))
  4381. if (!iSEM.SetBeamShiftY(beamYShift))
  4382. {
  4383. log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4384. return false;
  4385. }
  4386. }
  4387. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4388. {
  4389. log.Info("Y方向移动样品台", true);
  4390. if (!iSEM.SetStageGotoY(ypNew))
  4391. {
  4392. return false;
  4393. }
  4394. //判断是否移动完成
  4395. while (true)
  4396. {
  4397. Thread.Sleep(4000);
  4398. if (iSEM.GetStageIs() == 0)
  4399. {
  4400. break;
  4401. }
  4402. }
  4403. }
  4404. return true;
  4405. }
  4406. //自动亮度对比度调节
  4407. //自动亮度对比度
  4408. public bool AutoBC(String step)
  4409. {
  4410. arg.Message = "自动亮度对比度";
  4411. arg.State = true;
  4412. //SendMsg("1-10");
  4413. iSEM.SetAutoBright(100);
  4414. iSEM.SetAutoContrast(100);
  4415. //log.Info("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
  4416. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  4417. {
  4418. log.Info("开始设置自动亮度、对比度失败,程序退出。", true);
  4419. return false;
  4420. }
  4421. Thread.Sleep(5000);
  4422. int i = 0;
  4423. float bright = iSEM.GetBrightness();
  4424. float contrast = iSEM.GetContrast();
  4425. //最多调节30s,30s没调节好,认为调节失败
  4426. for (i = 0; i < 5; i++)
  4427. {
  4428. bright = iSEM.GetBrightness();
  4429. contrast = iSEM.GetContrast();
  4430. if ((bright >= 40 && bright <= 60)
  4431. && (contrast >= 35 && contrast <= 40))
  4432. break;
  4433. Thread.Sleep(5000);
  4434. }
  4435. bright = iSEM.GetBrightness();
  4436. contrast = iSEM.GetContrast();
  4437. if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
  4438. && i == 5)
  4439. {
  4440. log.Info("亮度对比度调节时间过长", true);
  4441. return false;
  4442. }
  4443. iSEM.SetAutoBright(100);
  4444. iSEM.SetAutoContrast(100);
  4445. //log.Info("SEM模式自动亮度目标50,自动对比度目标30.", true);
  4446. return true;
  4447. }
  4448. //执行FIB自动对焦,FIBFocus
  4449. //执行自动消像散
  4450. public bool FIBFocus(String step_code)
  4451. {
  4452. if (MParam.FocusMode == 1)//手动
  4453. {
  4454. if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  4455. {
  4456. }
  4457. else
  4458. {
  4459. return false;
  4460. }
  4461. }
  4462. else if (MParam.FocusMode == 2)//自有自动
  4463. {
  4464. //郝工增加自动对焦算法
  4465. //处理文件夹
  4466. if (Directory.Exists(FIBfocus_path))
  4467. {
  4468. Directory.Delete(FIBfocus_path, true);
  4469. }
  4470. Thread.Sleep(3000);
  4471. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  4472. Thread.Sleep(1000);
  4473. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  4474. Thread.Sleep(1000);
  4475. //再创建文件夹
  4476. Directory.CreateDirectory(FIBfocus_path);
  4477. //1、对焦参数类,2、输出对焦值
  4478. int FIBFocus = 0;
  4479. //根据当前的stigX重新计算像散值
  4480. float currentFIBFocus = iSEM.GetFIBObjectivePotential();
  4481. //MParam.FIBFocus.Step = 10; //像散的步长为10
  4482. MParam.FIBFocus.UP = currentFIBFocus - MParam.FIBFocus.Step;
  4483. MParam.FIBFocus.Down = currentFIBFocus + MParam.FIBFocus.Step;
  4484. log.Info("修改FIB自动对焦参数", true);
  4485. AutoFIBFocus(MParam.FIBFocus, out FIBFocus, step_code);
  4486. //log.Info("算法输出"+ wd.ToString(), true);
  4487. //设置工作距离
  4488. iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
  4489. //设置完工作距离后必须延迟5秒
  4490. Thread.Sleep(5000);
  4491. //处理图片位置
  4492. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  4493. }
  4494. else if (MParam.FocusMode == 3) //客户自动
  4495. {
  4496. //后期和客户对接接口
  4497. List<string> filenames = new List<string>();
  4498. String retfilename = wr.Img_Auto_Focus(filenames);
  4499. }
  4500. else //蔡司自动对焦
  4501. {
  4502. iSEM.CmdAutoFocusCoarse();
  4503. while (true)
  4504. {
  4505. Thread.Sleep(10000);
  4506. if (0 == iSEM.GetAutoFunction())
  4507. {
  4508. break;
  4509. }
  4510. }
  4511. iSEM.CmdAutoFocusFine();
  4512. while (true)
  4513. {
  4514. Thread.Sleep(10000);
  4515. if (0 == iSEM.GetAutoFunction())
  4516. {
  4517. break;
  4518. }
  4519. }
  4520. }
  4521. return true;
  4522. }
  4523. /// 图像拉直算法
  4524. /// </summary>
  4525. /// <param name="Slope">倾斜角度</param>
  4526. /// <param name="x0">圆心坐标x</param>
  4527. /// <param name="y0">圆心坐标y</param>
  4528. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  4529. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  4530. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  4531. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  4532. /// <returns></returns>
  4533. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  4534. {
  4535. try
  4536. {
  4537. float xr = x1 - x0;//倾斜图到中心的距离差x
  4538. float yr = y1 - y0;//倾斜图到中心的距离差y
  4539. float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  4540. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  4541. float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
  4542. float k_S = k - Slope;//通过夹角差求x2,y2
  4543. //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  4544. //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  4545. float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
  4546. float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
  4547. if (Slope > 0 || Slope < 0)
  4548. {
  4549. Hx = x0 + x2;
  4550. Hy = y0 + y2;
  4551. }
  4552. else
  4553. {
  4554. Hx = 0;
  4555. Hy = 0;
  4556. }
  4557. return true;
  4558. }
  4559. catch (Exception)
  4560. {
  4561. return false;
  4562. }
  4563. }
  4564. // 放大倍数差校正
  4565. public bool MagComp(float oldMag, float newMag)
  4566. {
  4567. //开启电压校正时进行电压校正
  4568. if (MParam.MagComp)
  4569. {
  4570. int oldLevel = -1, newLevel = -1;
  4571. float deltX = 0, deltY = 0;
  4572. if (oldMag < MParam.MagRange1)
  4573. {
  4574. oldLevel = 1;
  4575. }
  4576. else if ((oldMag <= MParam.MagRange2)
  4577. && (oldMag > MParam.MagRange1))
  4578. {
  4579. oldLevel = 2;
  4580. }
  4581. else if ((oldMag <= MParam.MagRange3)
  4582. && (oldMag > MParam.MagRange2))
  4583. {
  4584. oldLevel = 3;
  4585. }
  4586. else if ((oldMag <= MParam.MagRange4)
  4587. && (oldMag > MParam.MagRange3))
  4588. {
  4589. oldLevel = 4;
  4590. }
  4591. if (newMag < MParam.MagRange1)
  4592. {
  4593. newLevel = 1;
  4594. }
  4595. else if ((newMag <= MParam.MagRange2)
  4596. && (newMag > MParam.MagRange1))
  4597. {
  4598. newLevel = 2;
  4599. }
  4600. else if ((newMag <= MParam.MagRange3)
  4601. && (newMag > MParam.MagRange2))
  4602. {
  4603. newLevel = 3;
  4604. }
  4605. else if ((newMag <= MParam.MagRange4)
  4606. && (newMag > MParam.MagRange3))
  4607. {
  4608. newLevel = 4;
  4609. }
  4610. if (oldLevel != newLevel)
  4611. {
  4612. if (oldLevel == 1)
  4613. {
  4614. switch (newLevel)
  4615. {
  4616. case 1:
  4617. break;
  4618. case 2:
  4619. deltX = MParam.MagCompX1;
  4620. deltY = MParam.MagCompY1;
  4621. break;
  4622. case 3:
  4623. deltX = MParam.MagCompX1 + MParam.MagCompX2;
  4624. deltY = MParam.MagCompY1 + MParam.MagCompY2;
  4625. break;
  4626. case 4:
  4627. deltX = MParam.MagCompX1 + MParam.MagCompX2 + MParam.MagCompX3;
  4628. deltY = MParam.MagCompY1 + MParam.MagCompY2 + MParam.MagCompY3;
  4629. break;
  4630. }
  4631. }
  4632. else if (oldLevel == 2)
  4633. {
  4634. switch (newLevel)
  4635. {
  4636. case 1:
  4637. deltX = -MParam.MagCompX1;
  4638. deltY = -MParam.MagCompY1;
  4639. break;
  4640. case 2:
  4641. break;
  4642. case 3:
  4643. deltX = MParam.MagCompX2;
  4644. deltY = MParam.MagCompY2;
  4645. break;
  4646. case 4:
  4647. deltX = MParam.MagCompX2 + MParam.MagCompX3;
  4648. deltY = MParam.MagCompY2 + MParam.MagCompY3;
  4649. break;
  4650. }
  4651. }
  4652. else if (oldLevel == 3)
  4653. {
  4654. switch (newLevel)
  4655. {
  4656. case 1:
  4657. deltX = -MParam.MagCompX1 - MParam.MagCompX2;
  4658. deltY = -MParam.MagCompY1 - MParam.MagCompY2;
  4659. break;
  4660. case 2:
  4661. deltX = -MParam.MagCompX2;
  4662. deltY = -MParam.MagCompY2;
  4663. break;
  4664. case 3:
  4665. break;
  4666. case 4:
  4667. deltX = -MParam.MagCompX2 - MParam.MagCompX3;
  4668. deltY = -MParam.MagCompY2 - MParam.MagCompX3;
  4669. break;
  4670. }
  4671. }
  4672. else if (oldLevel == 4)
  4673. {
  4674. switch (newLevel)
  4675. {
  4676. case 1:
  4677. deltX = -MParam.MagCompX1 - MParam.MagCompX2 - MParam.MagCompX3;
  4678. deltY = -MParam.MagCompY1 - MParam.MagCompY2 - MParam.MagCompY3;
  4679. break;
  4680. case 2:
  4681. deltX = -MParam.MagCompX2 - MParam.MagCompX3;
  4682. deltY = -MParam.MagCompY2 - MParam.MagCompY3;
  4683. break;
  4684. case 3:
  4685. deltX = -MParam.MagCompX3;
  4686. deltY = -MParam.MagCompY3;
  4687. break;
  4688. case 4:
  4689. break;
  4690. }
  4691. }
  4692. //通过移动光束校正便宜量
  4693. //单位是m/pix
  4694. float pixSize = iSEM.GetPixelSize();
  4695. log.Info("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
  4696. Thread.Sleep(500);
  4697. float xpCur = iSEM.GetStageAtX();
  4698. float ypCur = iSEM.GetStageAtY();
  4699. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4700. float xpNew = xpCur - deltX;
  4701. float ypNew = ypCur + deltY;
  4702. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4703. //计算最大偏移量
  4704. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4705. iSEM.SetBeamShiftX(100);
  4706. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4707. iSEM.SetBeamShiftX(beamXCur);
  4708. //计算光束偏移值:
  4709. float beamX = iSEM.GetBeamOffsetX();
  4710. log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4711. beamX = (-deltX + beamX);
  4712. log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4713. if (beamX < beamXMax || beamX < -beamXMax)
  4714. {
  4715. log.Info("X方向移动光束", true);
  4716. float beamXShift = beamX * 100 / beamXMax;
  4717. if (!iSEM.SetBeamShiftX(beamXShift))
  4718. {
  4719. log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4720. return false;
  4721. }
  4722. }
  4723. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4724. {
  4725. log.Info("X方向移动样品台", true);
  4726. if (!iSEM.SetStageGotoX(xpNew))
  4727. {
  4728. return false;
  4729. }
  4730. //判断是否移动完成
  4731. while (true)
  4732. {
  4733. Thread.Sleep(5000);
  4734. if (iSEM.GetStageIs() == 0)
  4735. {
  4736. break;
  4737. }
  4738. }
  4739. }
  4740. float beamY = iSEM.GetBeamOffsetY();
  4741. log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4742. beamY = (-deltY + beamY);
  4743. log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4744. //计算最大偏移量
  4745. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4746. iSEM.SetBeamShiftY(100);
  4747. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4748. iSEM.SetBeamShiftY(beamYCur);
  4749. if (beamY < beamYMax || beamY < -beamYMax)
  4750. {
  4751. log.Info("Y方向移动光束", true);
  4752. float beamYShift = beamY * 100 / beamYMax;
  4753. if (!iSEM.SetBeamShiftY(beamY))
  4754. {
  4755. log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4756. return false;
  4757. }
  4758. }
  4759. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4760. {
  4761. log.Info("Y方向移动样品台", true);
  4762. if (!iSEM.SetStageGotoY(ypNew))
  4763. {
  4764. return false;
  4765. }
  4766. //判断是否移动完成
  4767. while (true)
  4768. {
  4769. Thread.Sleep(5000);
  4770. if (iSEM.GetStageIs() == 0)
  4771. {
  4772. break;
  4773. }
  4774. }
  4775. }
  4776. }
  4777. }
  4778. return true;
  4779. }
  4780. #endregion
  4781. #region 能谱所有参数
  4782. //全局只有一个Extender
  4783. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  4784. public IExtenderControl iExtender = null;
  4785. const int ScanFieldSize = 1142;
  4786. MeasureDB m_MeasDB = null;
  4787. int m_nXrayId = 0;
  4788. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  4789. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  4790. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  4791. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  4792. /// <summary>
  4793. /// 做能谱分析
  4794. /// </summary>
  4795. /// <param name="a_CutHoleID">分析点视场ID,索引号</param>
  4796. /// <param name="a_CutHoleName">分析点视场名称</param>
  4797. /// <param name="a_FieldImagePositionID">分析点的视场位置ID,图像处理会返回多个Xray分析点,但我们这里只取第一个点所在的视场</param>
  4798. /// <returns>成功或失败</returns>
  4799. public bool DoEDS(int a_CutHoleID, string a_CutHoleName, int a_FieldImagePositionID)
  4800. {
  4801. try
  4802. {
  4803. //XrayID记录
  4804. log.Info("程序进入EDS测量!", true);
  4805. iExtender = factoryExtender.IExtender;
  4806. Thread.Sleep(500);
  4807. EDSParam param = MParam.EDSParam;
  4808. double dDwellTime = param.DwellTime;
  4809. int nImageType = param.ImageType;
  4810. double dScanSizes = param.ScanSize;
  4811. log.Info("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  4812. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  4813. string path = EDS_path;
  4814. string edsfn = path + "\\" + a_FieldImagePositionID.ToString() + "_" + ImageNameEDS;
  4815. log.Info("EDS_PATH=" + edsfn, true);
  4816. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);//get the field eds image where the anylysis point locate.
  4817. arg.Picture_Information.Picture_FullPath = "";
  4818. arg.State = true;
  4819. SendMsg("4-5");//向界面发送指令:能谱拍照
  4820. //arg.State = false;
  4821. arg.Message = "";
  4822. arg.Picture_Information.Picture_FullPath = edsfn;
  4823. SendMsg("EDSPic");
  4824. //送给客户,计算感兴趣的区域
  4825. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  4826. List<System.Drawing.Point> LinesStartPoint = new List<System.Drawing.Point>();
  4827. List<List<Segment>> listFeature = new List<List<Segment>>();
  4828. List<int> lines_height = new List<int>();
  4829. System.Drawing.Point area_pt = new System.Drawing.Point();
  4830. int width = 1;
  4831. int height = 1;
  4832. int AreasNo = 0;
  4833. long[] XrayData;
  4834. Dictionary<string, double> listElement;
  4835. int xrayCollectMode = param.XrayCollectMode;
  4836. switch (xrayCollectMode)
  4837. {
  4838. case 0://point mode
  4839. //点数据
  4840. int state = 0;
  4841. wr.EDS_Param_Points(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out listPoints, out state);
  4842. if (state == 0)
  4843. {
  4844. log.Error("点采集失败", false);
  4845. return false;
  4846. }
  4847. log.Info("返回 listPoints=" + listPoints.Count.ToString(), true);
  4848. if (!m_MeasDB.InsertAnylysisField(a_CutHoleID, a_CutHoleName, EDS_path, listPoints.Count, listFeature.Count, a_FieldImagePositionID))
  4849. {
  4850. log.Error("插入分析视场失败", false);
  4851. }
  4852. iExtender.BeginMultipleAquisition();
  4853. Thread.Sleep(100);
  4854. //点采集
  4855. m_nXrayId = 0;
  4856. foreach (System.Drawing.Point pt in listPoints)
  4857. {
  4858. XrayData = new long[2000];
  4859. listElement = new Dictionary<string, double>();
  4860. if (iExtender.XrayPointCollecting(param.PointTime, pt.X, pt.Y , out XrayData, out listElement))
  4861. {
  4862. string ele = "";
  4863. foreach (var s in listElement)
  4864. {
  4865. ele += s.ToString();
  4866. }
  4867. log.Info("采集点:(" + pt.X.ToString() + ":" + pt.Y.ToString() + ") 元素:" + ele);
  4868. //写入数据库
  4869. m_nXrayId++;
  4870. log.Info("点采集结束,写入数据库开始--" + m_nXrayId.ToString(), true);
  4871. Boolean ret = m_MeasDB.InsertAPointXray(a_CutHoleID, m_nXrayId, pt.X, pt.Y, XrayData, listElement, a_FieldImagePositionID);
  4872. Thread.Sleep(1000);
  4873. }
  4874. }
  4875. iExtender.EndMultipleAquisition();
  4876. break;
  4877. case 1://line mode
  4878. log.Info("线扫描", true);
  4879. state = 0;
  4880. wr.EDS_Param_Lines(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out LinesStartPoint, out lines_height, out state);
  4881. string sp = "";
  4882. foreach (System.Drawing.Point p in LinesStartPoint)
  4883. {
  4884. sp += "(" + p.X + "," + p.Y + ")";
  4885. }
  4886. log.Info("线返回数据,lines=" + LinesStartPoint.Count.ToString() + " " + sp, true);
  4887. if (state == 1)
  4888. {
  4889. //将线转换为segment数据
  4890. log.Info("将线转换为segment数据", true);
  4891. for (int i = 0; i < LinesStartPoint.Count; i++)
  4892. {
  4893. List<Segment> segments = new List<Segment>();
  4894. for (int j = 0; j <= lines_height[i]; j++)
  4895. {
  4896. Segment segment = new Segment();
  4897. segment.X = LinesStartPoint[i].X;
  4898. segment.Y = LinesStartPoint[i].Y + j;
  4899. segment.Length = 1;
  4900. segments.Add(segment);
  4901. }
  4902. listFeature.Add(segments);
  4903. }
  4904. }
  4905. else
  4906. {
  4907. log.Error("线扫图片处理失败", false);
  4908. return false;
  4909. }
  4910. //线采集
  4911. iExtender.BeginMultipleAquisition();
  4912. Thread.Sleep(100);
  4913. for (int i = 0; i < listFeature.Count; i++)
  4914. {
  4915. List<Segment> listSeg = listFeature[i];
  4916. XrayData = new long[2000];
  4917. listElement = new Dictionary<string, double>();
  4918. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  4919. {
  4920. string ele = "";
  4921. foreach (var s in listElement)
  4922. {
  4923. ele += s.ToString();
  4924. }
  4925. log.Info("采集时间=" + param.AreaTime.ToString(), true);
  4926. log.Info("(" + listSeg[0].X + "," + listSeg[0].Y + ") height=" + lines_height[i] + " 元素:" + ele);
  4927. log.Info("线采集结束,写入数据库开始", true);
  4928. //写入数据库
  4929. m_nXrayId++;
  4930. AreasNo++;
  4931. m_MeasDB.InsertAAreaXay(a_CutHoleID, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  4932. }
  4933. else
  4934. {
  4935. log.Error("线扫xray失败");
  4936. }
  4937. }
  4938. iExtender.EndMultipleAquisition();
  4939. break;
  4940. case 2: //area mode
  4941. //面数据
  4942. state = 0;
  4943. wr.EDS_Param_Areas(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out area_pt, out width, out height, out state);
  4944. log.Info("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  4945. if (state == 1)
  4946. {
  4947. //将面转换为segment数据
  4948. List<Segment> segments = new List<Segment>();
  4949. for (int j = 0; j <= height; j++)
  4950. {
  4951. Segment segment = new Segment();
  4952. segment.X = area_pt.X;
  4953. segment.Y = area_pt.Y + j;
  4954. segment.Length = width;
  4955. segments.Add(segment);
  4956. }
  4957. listFeature.Add(segments);
  4958. }
  4959. else
  4960. {
  4961. log.Error("面扫图片处理失败", false);
  4962. return false;
  4963. }
  4964. //面采集
  4965. iExtender.BeginMultipleAquisition();
  4966. Thread.Sleep(100);
  4967. foreach (List<Segment> listSeg in listFeature)
  4968. {
  4969. XrayData = new long[2000];
  4970. listElement = new Dictionary<string, double>();
  4971. log.Info("AreaTime=" + param.AreaTime.ToString(), true);
  4972. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  4973. {
  4974. string ele = "";
  4975. foreach (var s in listElement)
  4976. {
  4977. ele += s.ToString();
  4978. }
  4979. log.Info(" 元素:" + ele);
  4980. log.Info("面采集结束,写入数据库开始", true);
  4981. //写入数据库
  4982. m_nXrayId++;
  4983. AreasNo++;
  4984. m_MeasDB.InsertAAreaXay(a_CutHoleID, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  4985. }
  4986. else
  4987. {
  4988. log.Error("面扫xray失败");
  4989. }
  4990. }
  4991. iExtender.EndMultipleAquisition();
  4992. break;
  4993. }
  4994. //存储数据
  4995. //向分析点数据库更新
  4996. }
  4997. catch (Exception e)
  4998. {
  4999. iExtender.EndMultipleAquisition();
  5000. log.Error(e.Message, false);
  5001. return false;
  5002. }
  5003. return true;
  5004. }
  5005. /// <summary>
  5006. /// 初始化数据库
  5007. /// </summary>
  5008. public void Init_MeasDB()
  5009. {
  5010. m_MeasDB = new MeasureDB(m_measureFile);
  5011. }
  5012. /// <summary>
  5013. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  5014. /// </summary>
  5015. /// <returns></returns>
  5016. public bool EDS_FindCross()
  5017. {
  5018. float x2 = 0, y2 = 0;
  5019. int state = 0;
  5020. //1.控制SEM放大到300倍
  5021. //float mag = MParam.Photograph_Magnification / 3;
  5022. float mag = 400;
  5023. // float mag = 200;
  5024. if (mag < 200)
  5025. {
  5026. mag = 200;
  5027. }
  5028. if (!iSEM.SetMagnification(mag))
  5029. {
  5030. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  5031. arg.State = false;
  5032. //SendMsg("3-1");
  5033. log.Error("测量线程报错:" + arg.Message, false);
  5034. return false;
  5035. }
  5036. Thread.Sleep(200);
  5037. float current = iSEM.GetMagnification();
  5038. Thread.Sleep(200);
  5039. while (Math.Abs(current - mag) > 2)
  5040. {
  5041. iSEM.SetMagnification(mag);
  5042. Thread.Sleep(200);
  5043. current = iSEM.GetMagnification();
  5044. Thread.Sleep(200);
  5045. }
  5046. Thread.Sleep(2000);
  5047. //判断是否停止进程
  5048. if (key_stop)
  5049. {
  5050. log.Info("停止键按下", true);
  5051. return false;
  5052. }
  5053. //3.控制SEM拍照
  5054. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
  5055. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5056. String fileName4 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS4;
  5057. log.Info("fileName4=============" + fileName4, true);
  5058. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5059. arg.Picture_Information.Picture_FullPath = fileName4;
  5060. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5061. Thread.Sleep(200);
  5062. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5063. Thread.Sleep(200);
  5064. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5065. Thread.Sleep(200);
  5066. //拍照前改变速度,延时
  5067. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5068. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5069. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5070. Thread.Sleep(200);
  5071. cycle_time = iSEM.GetCycleTime();
  5072. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5073. if (!GetImage(fileName4))
  5074. {
  5075. arg.State = false;
  5076. arg.Message = "SEM拍照找切割位置失败";
  5077. //SendMsg("3-2");
  5078. log.Error("测量线程报错:" + arg.Message, false);
  5079. return false;
  5080. }
  5081. //arg.Picture_Information.Picture_FullPath = fileName4;
  5082. arg.State = true;
  5083. arg.Message = "SEM拍照成功";
  5084. log.Info("测量线程" + arg.Message, false);
  5085. //SendMsg("3-2");
  5086. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5087. Thread.Sleep(200);
  5088. cycle_time = iSEM.GetCycleTime();
  5089. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5090. //判断是否停止进程
  5091. if (key_stop)
  5092. {
  5093. return false;
  5094. }
  5095. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  5096. //5.根据坐标控制SEM移动到切孔位置,居中
  5097. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  5098. log.Info("文件名=" + fileName4, true);
  5099. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x2, out y2, out state);
  5100. SendMsg("4-2");
  5101. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  5102. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  5103. if (state == 1)
  5104. {
  5105. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  5106. if (!MoveToPixByMoveStage(x2, y2))
  5107. {
  5108. //arg.State = false;
  5109. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  5110. //SendMsg("3-3");
  5111. log.Error("测量线程报错:" + arg.Message, false);
  5112. return false;
  5113. }
  5114. //判断是否移动完成
  5115. while (true)
  5116. {
  5117. Thread.Sleep(4000);
  5118. if (iSEM.GetStageIs() == 0)
  5119. {
  5120. break;
  5121. }
  5122. }
  5123. //高倍到低倍不进行对焦
  5124. //拍照前改变速度,延时
  5125. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5126. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5127. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5128. Thread.Sleep(200);
  5129. cycle_time = iSEM.GetCycleTime();
  5130. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5131. if (hand_intervene == 1)
  5132. {
  5133. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5134. }
  5135. }
  5136. else
  5137. {
  5138. arg.Message = "图像接口参数state返回值为零";
  5139. arg.State = false;
  5140. //SendMsg("3-3");
  5141. if (hand_intervene == 1)
  5142. {
  5143. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5144. {
  5145. return false;
  5146. }
  5147. }
  5148. else
  5149. {
  5150. return false;
  5151. }
  5152. log.Error("测量线程报错:" + arg.Message, false);
  5153. return false;
  5154. }
  5155. //判断是否停止进程
  5156. if (key_stop)
  5157. {
  5158. log.Info("停止键按下", true);
  5159. return false;
  5160. }
  5161. return true;
  5162. }
  5163. /// <summary>
  5164. /// 171.能谱第17步找点采集数据
  5165. /// </summary>
  5166. /// <returns></returns>
  5167. public bool EDS_ShotSection()
  5168. {
  5169. int state = 0;
  5170. Thread.Sleep(200);
  5171. #region 设置拍照的放大倍数
  5172. log.Info("设置拍照放大倍数=" + MParam.Photograph_Magnification.ToString(), true);
  5173. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  5174. {
  5175. arg.Message = "放大倍数调整失败";
  5176. log.Error(arg.Message, false);
  5177. return false;
  5178. }
  5179. float set = MParam.Photograph_Magnification;
  5180. float current = iSEM.GetMagnification();
  5181. while (Math.Abs(current - set) > 1)
  5182. {
  5183. iSEM.SetMagnification(MParam.Photograph_Magnification);
  5184. Thread.Sleep(200);
  5185. current = iSEM.GetMagnification();
  5186. }
  5187. Thread.Sleep(3000 + (Int32)cycle_time);
  5188. //判断是否停止进程
  5189. if (key_stop)
  5190. {
  5191. log.Info("停止键按下", true);
  5192. return false;
  5193. }
  5194. #endregion
  5195. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  5196. //2.控制SEM自动对焦、亮度、对比度-接口
  5197. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  5198. if ((MParam.SampleName == "2") || (MParam.SampleName == "3"))
  5199. iSEM.SetReduced(402, 128, 600, 600);
  5200. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  5201. iSEM.SetReduced(402, 128, 340, 256);
  5202. Thread.Sleep(200);
  5203. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  5204. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5205. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  5206. Thread.Sleep(200);
  5207. cycle_time = iSEM.GetCycleTime();
  5208. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5209. log.Info("自动对焦开始!", true);
  5210. if (!ImageFocus1(false))
  5211. {
  5212. log.Error("自动对焦失败", false);
  5213. return false;
  5214. }
  5215. iSEM.CloseReduced();
  5216. Thread.Sleep(200);
  5217. cycle_time = iSEM.GetCycleTime();
  5218. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  5219. //判断是否停止进程
  5220. if (key_stop)
  5221. {
  5222. log.Info("停止键按下", true);
  5223. return false;
  5224. }
  5225. log.Info("开启自动亮度对比度", false);
  5226. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5227. {
  5228. log.Error("开启自动亮度对比度失败", false);
  5229. return false;
  5230. }
  5231. Thread.Sleep(3000);
  5232. //3、设置SEM补偿角度
  5233. if (MParam.Is_Photograph == false)
  5234. {
  5235. log.Info("角度补偿" + MParam.Correction_Angle.ToString() + "度", true);
  5236. if (!TiltCorrection(MParam.Correction_Angle))
  5237. {
  5238. arg.Message = "设置SEM进行角度补偿" + MParam.Correction_Angle.ToString("0") + "度失败";
  5239. arg.State = false;
  5240. log.Error(arg.Message, false);
  5241. return false;
  5242. }
  5243. Thread.Sleep(200);
  5244. //判断是否停止进程
  5245. if (key_stop)
  5246. {
  5247. log.Error("停止键按下", false);
  5248. return false;
  5249. }
  5250. }
  5251. SendMsg("4-4");
  5252. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5253. String fileName5 = data_path + "\\EDS\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  5254. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5255. log.Info("fileName5=" + fileName5, true);
  5256. arg.Picture_Information.Picture_FullPath = fileName5;
  5257. arg.Picture_Information.Work_Status = "SEM";
  5258. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5259. Thread.Sleep(200);
  5260. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5261. Thread.Sleep(200);
  5262. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5263. Thread.Sleep(200);
  5264. //拍照前改变速度,延时
  5265. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5266. log.Info("改变刷新率为 " + MParam.ScanSpeedHigh);
  5267. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5268. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5269. Thread.Sleep(200);
  5270. cycle_time = iSEM.GetCycleTime();
  5271. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  5272. log.Info("开始拍摄截面照!");
  5273. if (!GetImage(fileName5))
  5274. {
  5275. arg.Message = "SEM拍照失败";
  5276. log.Error(arg.Message, false);
  5277. return false;
  5278. }
  5279. log.Info("改变刷新率为 " + MParam.ScanSpeedNormal);
  5280. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5281. Thread.Sleep(200);
  5282. cycle_time = iSEM.GetCycleTime();
  5283. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5284. //判断是否停止进程
  5285. if (key_stop)
  5286. {
  5287. log.Info("停止键按下", true);
  5288. return false;
  5289. }
  5290. #endregion
  5291. if (MParam.Is_Photograph == false)//Is_Photograph 代表 是否是只拍照
  5292. {
  5293. #region 对当前矩形进行旋转校正
  5294. //8,计算切割面区域偏移角度及方向
  5295. float degree = 0;
  5296. int direction = 0;
  5297. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  5298. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  5299. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  5300. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  5301. if (state == 1)
  5302. {
  5303. //梯形角度
  5304. iSEM.SetScanRotationOn();
  5305. Thread.Sleep(200);
  5306. //20201128陈工要求,谭博返回角度*0.7
  5307. iSEM.SetScanRotation(Convert.ToSingle(degree * MParam.ScanRotCor));
  5308. Thread.Sleep(200);
  5309. arg.State = true;
  5310. arg.Message = "图像接口返回角度为:" + degree.ToString();
  5311. //SendMsg("3-8");
  5312. if (hand_intervene == 1)
  5313. {
  5314. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5315. }
  5316. }
  5317. else
  5318. {
  5319. arg.Message = "图像接口参数State返回值为零";
  5320. arg.State = false;
  5321. //SendMsg("3-8");
  5322. if (hand_intervene == 1)
  5323. {
  5324. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5325. {
  5326. return false;
  5327. }
  5328. }
  5329. else
  5330. {
  5331. //return false;
  5332. }
  5333. log.Error("测量线程报错:" + arg.Message, false);
  5334. }
  5335. //判断是否停止进程
  5336. if (key_stop)
  5337. {
  5338. log.Info("停止键按下", true);
  5339. return false;
  5340. }
  5341. Thread.Sleep(200);
  5342. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5343. String fileName6 = data_path + "\\EDS\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  5344. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5345. log.Info("fileName6=" + fileName6, true);
  5346. arg.Picture_Information.Picture_FullPath = fileName6;
  5347. arg.Picture_Information.Work_Status = "SEM";
  5348. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5349. Thread.Sleep(200);
  5350. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5351. Thread.Sleep(200);
  5352. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5353. Thread.Sleep(200);
  5354. //拍照前改变速度,延时
  5355. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5356. log.Info("改变刷新率为 " + MParam.ScanSpeedHigh);
  5357. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5358. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5359. Thread.Sleep(200);
  5360. cycle_time = iSEM.GetCycleTime();
  5361. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5362. log.Info("纠正后拍照!");
  5363. if (!GetImage(fileName6))
  5364. {
  5365. arg.Message = "SEM拍照失败";
  5366. log.Error(arg.Message, false);
  5367. return false;
  5368. }
  5369. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5370. Thread.Sleep(200);
  5371. cycle_time = iSEM.GetCycleTime();
  5372. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5373. //判断是否停止进程
  5374. if (key_stop)
  5375. {
  5376. log.Info("停止键按下", true);
  5377. return false;
  5378. }
  5379. #endregion
  5380. #region 获取两个位置上及放大倍数
  5381. //计算两个测量区域坐标
  5382. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  5383. List<float> mag = new List<float>();
  5384. System.Drawing.Point ct0;
  5385. float mag1, mag2, magMax;
  5386. log.Info("图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString(), true);
  5387. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(MParam.SampleName), MParam.Firm, out ct, out mag, out ct0, out state);
  5388. string s = "";
  5389. for (int i = 0; i < ct.Count; i++)
  5390. {
  5391. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  5392. + "放大倍数=" + mag[i];
  5393. }
  5394. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  5395. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  5396. "输入样品" + Convert.ToInt32(MParam.SampleName) +
  5397. "输入厂商" + MParam.Firm.ToString() +
  5398. s +
  5399. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  5400. #endregion
  5401. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  5402. {
  5403. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  5404. float xs = iSEM.GetBeamShiftX();
  5405. Thread.Sleep(200);
  5406. float ys = iSEM.GetBeamShiftY();
  5407. Thread.Sleep(200);
  5408. float xpCur = iSEM.GetStageAtX();
  5409. Thread.Sleep(200);
  5410. float ypCur = iSEM.GetStageAtY();
  5411. Thread.Sleep(200);
  5412. log.Info("原来的光束偏移量x = " + xs.ToString()
  5413. + "y=" + ys.ToString() + ","
  5414. + "原来样品台的位置x= " + xpCur.ToString()
  5415. + "y=" + ypCur.ToString(), true);
  5416. #endregion
  5417. //找到放大倍数最大值
  5418. magMax = mag[0];
  5419. for (int m = 1; m < mag.Count; m++)
  5420. {
  5421. if (mag[m] > magMax)
  5422. {
  5423. magMax = mag[m];
  5424. }
  5425. }
  5426. #region 移动到梯形左上角
  5427. //20201127将视野移动到梯形左上角位置
  5428. log.Warn("开始对焦 移动到对焦点( " + ct0.X.ToString()
  5429. + "," + ct0.Y.ToString() + ")", true);
  5430. MoveToPix(ct0.X, ct0.Y);
  5431. if (MParam.SampleName == "3")
  5432. {
  5433. iSEM.SetReduced(402, 128, 480, 450);
  5434. }
  5435. else
  5436. {
  5437. iSEM.SetReduced(402, 128, 480, 450);
  5438. }
  5439. Thread.Sleep(200);
  5440. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  5441. log.Info("改变刷新率");
  5442. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5443. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  5444. Thread.Sleep(200);
  5445. cycle_time = iSEM.GetCycleTime();
  5446. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5447. //放大到6000倍
  5448. log.Info("放大到倍数" + magMax / 4);
  5449. iSEM.SetMagnification(magMax / 4);
  5450. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5451. set = magMax / 4;
  5452. current = iSEM.GetMagnification();
  5453. while (Math.Abs(current - set) > 1)
  5454. {
  5455. iSEM.SetMagnification(set);
  5456. Thread.Sleep(200);
  5457. current = iSEM.GetMagnification();
  5458. }
  5459. if (MParam.SampleName == "3")
  5460. {
  5461. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  5462. iSEM.SetBrightness(50.0f); //50.0f
  5463. Thread.Sleep(200);
  5464. iSEM.SetContrast(30.0f); //30.0f
  5465. Thread.Sleep(200);
  5466. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  5467. }
  5468. //自动对焦
  5469. log.Info("开始自动聚焦 " + set.ToString() + "倍", true);
  5470. if (!ImageFocus1(true))
  5471. {
  5472. log.Error("========测量线程:自动聚焦失败!" + set.ToString() + "倍", false);
  5473. return false;
  5474. }
  5475. //放大到10000倍
  5476. log.Info("放大到倍数" + magMax / 2);
  5477. iSEM.SetMagnification(magMax / 2);
  5478. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5479. set = magMax / 2;
  5480. current = iSEM.GetMagnification();
  5481. while (Math.Abs(current - set) > 1)
  5482. {
  5483. iSEM.SetMagnification(set);
  5484. Thread.Sleep(200);
  5485. current = iSEM.GetMagnification();
  5486. }
  5487. //自动对焦
  5488. log.Info("开始自动聚焦 " + set.ToString() + "倍", true);
  5489. if (!ImageFocus1(true))
  5490. {
  5491. log.Info("自动聚焦失败!" + set.ToString() + "倍", true);
  5492. return false;
  5493. }
  5494. iSEM.CloseReduced();
  5495. Thread.Sleep(200);
  5496. cycle_time = iSEM.GetCycleTime();
  5497. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5498. #endregion
  5499. log.Warn("对焦完成,开始用能谱拍摄观测点照片!并分析图片以获得Xray点位置!");
  5500. #region 恢复到拍照的状态
  5501. log.Info("恢复到拍照的状态!");
  5502. iSEM.SetStageGotoX(xpCur);
  5503. while (true)
  5504. {
  5505. Thread.Sleep(4000);
  5506. if (iSEM.GetStageIs() == 0)
  5507. {
  5508. break;
  5509. }
  5510. }
  5511. iSEM.SetStageGotoY(ypCur);
  5512. while (true)
  5513. {
  5514. Thread.Sleep(4000);
  5515. if (iSEM.GetStageIs() == 0)
  5516. {
  5517. break;
  5518. }
  5519. }
  5520. //恢复原来的放大倍数
  5521. log.Info("恢复原来的放大倍数!" + MParam.Photograph_Magnification);
  5522. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  5523. {
  5524. log.Error("恢复放大倍数失败", false);
  5525. return false;
  5526. }
  5527. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5528. set = MParam.Photograph_Magnification;
  5529. current = iSEM.GetMagnification();
  5530. while (Math.Abs(current - set) > 1)
  5531. {
  5532. iSEM.SetMagnification(set);
  5533. Thread.Sleep(200);
  5534. current = iSEM.GetMagnification();
  5535. }
  5536. //恢复BeamShift的百分比值
  5537. iSEM.SetBeamShiftX(xs);
  5538. Thread.Sleep(200);
  5539. iSEM.SetBeamShiftY(ys);
  5540. Thread.Sleep(200);
  5541. #endregion
  5542. log.Warn("移动到指定观测点!并准备打Xray");
  5543. if (!MoveToPix(ct[0].X, ct[0].Y))
  5544. {
  5545. log.Error("移动到第一个点位置失败", false);
  5546. }
  5547. Thread.Sleep(5000);//wait untill the auto brightness and auto contrast finished!
  5548. }
  5549. #endregion
  5550. SendMsg("4-4");//向界面发送指令:放大并对拍摄点对焦
  5551. Thread.Sleep(200);
  5552. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  5553. #region 拍照
  5554. log.Info("进入内部观察,不对焦!", true);
  5555. log.Info("开始拍照,设置放大倍数" + mag[0]);
  5556. if (!iSEM.SetMagnification(mag[0]))
  5557. {
  5558. log.Error("移动到第一个点位置拍照失败", false);
  5559. return false;
  5560. }
  5561. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5562. set = mag[0];
  5563. current = iSEM.GetMagnification();
  5564. while (Math.Abs(current - set) > 1)
  5565. {
  5566. iSEM.SetMagnification(set);
  5567. Thread.Sleep(200);
  5568. current = iSEM.GetMagnification();
  5569. }
  5570. Thread.Sleep(200);
  5571. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  5572. String fileName7 = data_path + "\\EDS\\" + MParam.Firm + "-" + mag[0].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-0-" + ImageNameTwo_1;
  5573. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  5574. log.Info("fileName7=" + fileName7, true);
  5575. arg.Picture_Information.Picture_FullPath = fileName7;
  5576. arg.Picture_Information.Work_Status = "SEM";
  5577. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5578. Thread.Sleep(200);
  5579. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5580. Thread.Sleep(200);
  5581. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5582. Thread.Sleep(200);
  5583. //拍照前改变速度,延时
  5584. iSEM.CmdLineScan();
  5585. Thread.Sleep(200);
  5586. cycle_time = iSEM.GetCycleTime();
  5587. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5588. log.Warn("EDS获取指定观测点图片,并打Xray");
  5589. DoEDS(m_nWorkHoleNo, m_cutHoles[m_nWorkHoleNo].HoleName, 1);
  5590. log.Info("像素扫描:CmdPixelScan");
  5591. iSEM.CmdPixelScan();
  5592. Thread.Sleep(200);
  5593. log.Info("改变刷新率 " + MParam.ScanSpeedNormal);
  5594. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5595. Thread.Sleep(200);
  5596. cycle_time = iSEM.GetCycleTime();
  5597. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5598. SendMsg("4-6");//向界面发生指令:采集能谱信息
  5599. #endregion
  5600. }
  5601. iSEM.SetTiltAngleOff();
  5602. Thread.Sleep(200);
  5603. iSEM.SetScanRotationOff();
  5604. Thread.Sleep(200);
  5605. iSEM.SetBeamShiftX(0);
  5606. Thread.Sleep(200);
  5607. iSEM.SetBeamShiftY(0);
  5608. Thread.Sleep(200);
  5609. //判断是否停止进程
  5610. return true;
  5611. }
  5612. /// <summary>
  5613. /// 19.能谱分析
  5614. /// </summary>
  5615. /// <returns></returns>
  5616. public bool EDS_Analysis()
  5617. {
  5618. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  5619. if (MParam.EDSZ < Z_Min || MParam.EDSZ > Z_Max)
  5620. {
  5621. log.Info("Z轴位置设置超出范围.", true);
  5622. return false;
  5623. }
  5624. log.Info("将Z轴位置指定到:" + MParam.EDSZ.ToString(), true);
  5625. if (!iSEM.SetStageGotoZ(MParam.EDSZ))
  5626. {
  5627. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  5628. return false;
  5629. }
  5630. while (true)
  5631. {
  5632. Thread.Sleep(2000);
  5633. if (iSEM.GetStageIs() == 0)
  5634. {
  5635. break;
  5636. }
  5637. }
  5638. //判断是否停止进程
  5639. if (key_stop)
  5640. {
  5641. log.Info("停止键按下", true);
  5642. return false;
  5643. }
  5644. SendMsg("4-0");
  5645. Thread.Sleep(200);
  5646. //2.角度改为54度
  5647. iSEM.SetScanRotationOff();
  5648. Thread.Sleep(200);
  5649. iSEM.SetSEMVoltage(7000);
  5650. Thread.Sleep(500);
  5651. iSEM.SetSEMIPROBE(0.5F / 1000000000);
  5652. Thread.Sleep(500);
  5653. iSEM.SetAutoVideoBrightnessAndContrast();
  5654. Thread.Sleep(2000);
  5655. iSEM.SetMagnification(600);
  5656. Thread.Sleep(500);
  5657. SendMsg("4-1");
  5658. Thread.Sleep(200);
  5659. //5.自动对焦
  5660. iSEM.SetReduced(256, 192, 512, 512);
  5661. Thread.Sleep(200);
  5662. //add by sun 2020-12-15
  5663. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5664. //add by sun 2020-12-15 end
  5665. Thread.Sleep(200);
  5666. cycle_time = iSEM.GetCycleTime();
  5667. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5668. if (!ImageFocus1(false))
  5669. {
  5670. return false;
  5671. }
  5672. iSEM.CloseReduced();
  5673. Thread.Sleep(200);
  5674. cycle_time = iSEM.GetCycleTime();
  5675. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5676. //SendMsg("4-2");
  5677. //6.调用161步过程
  5678. log.Warn("开始梯形移到视野中心!");
  5679. iSEM.SetMagnification(600);
  5680. Thread.Sleep(300);
  5681. if (!EDS_FindCross())
  5682. {
  5683. return false;
  5684. }
  5685. SendMsg("4-3");
  5686. Thread.Sleep(500);
  5687. //7.调用171步过程
  5688. log.Warn("开始打能谱图和打Xray!");
  5689. if (!EDS_ShotSection())
  5690. {
  5691. return false;
  5692. }
  5693. //SendMsg("4-3");//向界面发送指令:移动到拍摄点位置
  5694. Thread.Sleep(200);
  5695. return true;
  5696. }
  5697. /// <summary>
  5698. /// 20.光束等复位
  5699. /// </summary>
  5700. public void BeamShiftReset()
  5701. {
  5702. iSEM.SetTiltAngleOff();
  5703. Thread.Sleep(200);
  5704. iSEM.SetScanRotationOff();
  5705. Thread.Sleep(200);
  5706. iSEM.SetBeamShiftX(0);
  5707. Thread.Sleep(200);
  5708. iSEM.SetBeamShiftY(0);
  5709. Thread.Sleep(200);
  5710. }
  5711. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  5712. #region 设置电压电流
  5713. public bool SetVoltageAndIPROBE()
  5714. {
  5715. log.Info("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  5716. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  5717. bool mRet_VoltageFlag = false;
  5718. bool mRet_ElecFlag = false;
  5719. if (MParam.SampleName == "4" || MParam.SampleName == "5")
  5720. {
  5721. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  5722. Thread.Sleep(500);
  5723. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  5724. Thread.Sleep(500);
  5725. }
  5726. else if (MParam.SampleName == "3")
  5727. {
  5728. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  5729. Thread.Sleep(500);
  5730. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  5731. Thread.Sleep(500);
  5732. }
  5733. else
  5734. {
  5735. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  5736. Thread.Sleep(500);
  5737. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  5738. Thread.Sleep(500);
  5739. }
  5740. if (!mRet_VoltageFlag) return false;
  5741. if (!mRet_ElecFlag) return false;
  5742. log.Info("测量线程:设置电压电流完成!", true);
  5743. return true;
  5744. }
  5745. #endregion
  5746. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  5747. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  5748. #region 拍照
  5749. public bool GetImageFromSEM(float a_Mag)
  5750. {
  5751. log.Info("设置放大倍数" + a_Mag, true);
  5752. if (!iSEM.SetMagnification(a_Mag))
  5753. {
  5754. log.Error("设置放大倍数" + a_Mag.ToString() + "失败", false);
  5755. return false;
  5756. }
  5757. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5758. String m_FileName = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + a_Mag.ToString() + "_0_" + ImageNameTwo_1;
  5759. //拍照前改变速度,延时
  5760. iSEM.CmdLineScan();
  5761. Thread.Sleep(200);
  5762. cycle_time = iSEM.GetCycleTime();
  5763. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5764. if (!GetImage(m_FileName))
  5765. {
  5766. log.Error("测量线程报错:========" + arg.Message, false);
  5767. return false;
  5768. }
  5769. log.Info("========测量线程:移动到第一个点位置完成!", true);
  5770. return true;
  5771. }
  5772. #endregion
  5773. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  5774. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息
  5775. public void SaveMeasDataPic(String picFullPath, float Mag, float pixelsize)
  5776. {
  5777. try
  5778. {
  5779. using (System.Drawing.Image img = Image.FromFile(picFullPath))
  5780. {
  5781. Bitmap bmp = new Bitmap(img.Width, img.Height);
  5782. using (Graphics g = Graphics.FromImage(bmp))
  5783. {
  5784. g.DrawImage(img, 0, 0, img.Width, img.Height);
  5785. String str = "Mag:" + Mag.ToString("0") + "X\tPixelSize:" + (pixelsize * 1000000).ToString("0.00") + "um";
  5786. Font font = new Font("宋体", 16, FontStyle.Bold);
  5787. SolidBrush sbrush = new SolidBrush(Color.LimeGreen);
  5788. g.DrawString(str, font, sbrush, new PointF(40, img.Height - 30));
  5789. }
  5790. System.Drawing.Imaging.BitmapData bmpData = bmp.LockBits(new Rectangle(0, 0, bmp.Width, bmp.Height), System.Drawing.Imaging.ImageLockMode.ReadOnly, System.Drawing.Imaging.PixelFormat.Format8bppIndexed);
  5791. Bitmap newBitmap = new Bitmap(img.Width, img.Height, bmpData.Stride, System.Drawing.Imaging.PixelFormat.Format8bppIndexed, bmpData.Scan0);
  5792. String path = Path.GetDirectoryName(picFullPath) +
  5793. Path.GetFileNameWithoutExtension(picFullPath) +
  5794. "_Data" + Path.GetExtension(picFullPath);
  5795. newBitmap.SetResolution(1, 1);
  5796. newBitmap.Save(path);
  5797. }
  5798. }
  5799. catch
  5800. {
  5801. log.Error("在测量图上显示放大倍数和像素大小信息失败", false);
  5802. }
  5803. }
  5804. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息 end
  5805. }
  5806. }