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- //时间:20200610
- //作者:郝爽
- //功能:测量线程
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using System.Windows.Forms;
- using System.Threading;
- using System.IO;
- using SmartSEMControl;
- using MeasureData;
- using FileManager;
- namespace MeasureThread
- {
- //图片模式
- public enum ImageMode
- {
- FIB,
- SEM
- }
- public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
- public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
- //线程与界面通信协议
- public class ThreadStatusEventArgs
- {
- //状态,
- public string State
- {
- get { return m_state; }
- set { m_state = value; }
- }
- private string m_state;
-
- //时间
- public DateTime Time
- {
- get { return m_time; }
- set { m_time = value; }
- }
- private DateTime m_time;
- //步骤编码与MeasureStructXml.xml文件中的step中的code码一致
- public string Step_Code
- {
- get { return step_Code; }
- set { step_Code = value; }
- }
- private string step_Code;
- //图片信息
- public class PictureInformation
- {
- //使用XML中的IsData,不用改字段
- public Boolean Is_Picture
- {
- get { return is_Picture; }
- set { is_Picture = value; }
- }
- private Boolean is_Picture;
- public String Picture_FullPath
- {
- get { return picture_FullPath; }
- set { picture_FullPath = value; }
- }
- private String picture_FullPath;
- public double Work_Voltage
- {
- get { return work_Voltage; }
- set { work_Voltage = value; }
- }
- private double work_Voltage;
- public double Magnification
- {
- get { return magnification; }
- set { magnification = value; }
- }
- private double magnification;
- public double Work_Distance
- {
- get { return work_Distance; }
- set { work_Distance = value; }
- }
- private double work_Distance;
- //SEM/FIB
- public String Work_Status
- {
- get { return work_Status; }
- set { work_Status = value; }
- }
- private String work_Status;
- }
- //图片信息实例类
- public PictureInformation Picture_Information
- {
- get { return picture_Information; }
- set { picture_Information = value; }
- }
- private PictureInformation picture_Information;
- //图像信息
- public class ImageInformation
- {
- //8个名
- public int Method_Name
- {
- get { return method_Name; }
- set { method_Name = value; }
- }
- private int method_Name;
- public Source_Img_Degree_Direction SIDD;
- public Cut_Position CP;
- public Cut_Success CS;
- public Trapezoid_Top_Center_Position TTCP;
- public Auto_Foucs AF;
- public Auto_Stigmatic AS;
- public Center_Position_OffsetAngle_Direction CPOD;
- public Measure_Size MS;
- public ImageInformation()
- {
- SIDD = new Source_Img_Degree_Direction();
- CP = new Cut_Position();
- CS = new Cut_Success();
- TTCP = new Trapezoid_Top_Center_Position();
- AF = new Auto_Foucs();
- AS = new Auto_Stigmatic();
- CPOD = new Center_Position_OffsetAngle_Direction();
- MS = new Measure_Size();
- }
- //1-计算原始图像偏移角度及方向
- public class Source_Img_Degree_Direction
- {
- public Boolean Is_Image = false;
- public double Degree
- {
- get { return degree; }
- set { degree = value; }
- }
- private double degree;
- public int Direction
- {
- get { return direction; }
- set { direction = value; }
- }
- private int direction;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //2-计算切割点位置
- public class Cut_Position
- {
- public Boolean Is_Image = false;
- public double Offsetx
- {
- get { return offsetx; }
- set { offsetx = value; }
- }
- private double offsetx;
- public double Offsety
- {
- get { return offsety; }
- set { offsety = value; }
- }
- private double offsety;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //3-是否切割成功
- public class Cut_Success
- {
- public Boolean Is_Image = false;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //4-计算切割后图像梯形区域上边中心点坐标
- public class Trapezoid_Top_Center_Position
- {
- public Boolean Is_Image = false;
- public double TopCenterX
- {
- get { return topCenterX; }
- set { topCenterX = value; }
- }
- private double topCenterX;
- public double TopCenterY
- {
- get { return topCenterY; }
- set { topCenterY = value; }
- }
- private double topCenterY;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //5-自动对焦
- public class Auto_Foucs
- {
- public Boolean Is_Image = true;
- public String Img_Path
- {
- get { return img_Path; }
- set { img_Path = value; }
- }
- private String img_Path;
- }
- //6-自动像闪
- public class Auto_Stigmatic
- {
- public Boolean Is_Image = true;
- public String Img_Path
- {
- get { return img_Path; }
- set { img_Path = value; }
- }
- private String img_Path;
- }
- //7-计算切割面区域中心坐标,以及偏移角度及方向
- public class Center_Position_OffsetAngle_Direction
- {
- public Boolean Is_Image = false;
- public double CenterX
- {
- get { return centerX; }
- set { centerX = value; }
- }
- private double centerX;
- public double CenterY
- {
- get { return centerY; }
- set { centerY = value; }
- }
- private double centerY;
- public double Degree
- {
- get { return degree; }
- set { degree = value; }
- }
- private double degree;
- public int Direction
- {
- get { return direction; }
- set { direction = value; }
- }
- private int direction;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- //8-测量尺寸
- public class Measure_Size
- {
- public Boolean Is_Image = false;
- public int State
- {
- get { return state; }
- set { state = value; }
- }
- private int state;
- }
- }
- public ThreadStatusEventArgs(string a_State)
- {
- this.m_state = a_State;
- picture_Information = new PictureInformation();
- }
- }
- //切孔状态
- public class CutHolesStatusEventArgs
- {
- public string State
- {
- get { return m_state; }
- set { m_state = value; }
- }
- private string m_state;
- public string HoleName
- {
- get { return m_holeName; }
- set { m_holeName = value; }
- }
- private string m_holeName;
- public CutHolesStatusEventArgs(string a_state, string a_holeName)
- {
- this.m_state = a_state;
- this.m_holeName = a_holeName;
- }
- }
- public class Measure
- {
- public event ThreadStatusHandler SendThreadStatus; // 声明事件
- public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
- //全局只有一个fatorySEM
- static FactoryHardware factorySEM = FactoryHardware.Instance;
- ISEMControl iSEM = factorySEM.ISEM;
- //@的作用是不用转义字符\\只打一个就行
- const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
- const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
- const String ImageName3 = @"ImageFIB600X2.tif";
- const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
- const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
- const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
- const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
- const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
- const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
- const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
- const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
- const String ElyDeposition = @"Deposition.ely"; //沉积
- const String ElyCrossSection = @"CrossSection.ely"; //切割
- const float fMin = (float)0.0000002; //单位是米
- int m_nWorkHoleNo = -1;
- //测量文件
- private MeasureFile m_measureFile;
- public MeasureFile MeasureFile
- {
- get { return this.m_measureFile; }
- set { this.m_measureFile = value; }
- }
- //测量的切割孔,取测量文件里的孔
- private List<MeasureData.CutHole> m_cutHoles;
- public List<MeasureData.CutHole> cutHoles
- {
- get { return this.m_cutHoles; }
- set { this.m_cutHoles = value; }
- }
- //工作文件夹
- private string m_WorkingFolder;
- public string WorkingFolder
- {
- get { return this.m_WorkingFolder; }
- set { this.m_WorkingFolder = value; }
- }
- //程序当前路径
- private string m_ProgramFolder = Directory.GetCurrentDirectory();
- //线程状态
- private ThreadStatus m_ThreadStatus;
- public ThreadStatus TStatus
- {
- get { return this.m_ThreadStatus; }
- set { this.m_ThreadStatus = value; }
- }
- //测量参数,不使用,使用文件中的参数
- private MeasureParam m_MsParam;
- public MeasureParam MeasParam
- {
- get { return this.m_MsParam; }
- set { this.m_MsParam = value; }
- }
- //构造函数
- public Measure()
- {
- Init();
- }
- private void Init()
- {
- //MeasParam = new MeasureParam();
- TStatus = new ThreadStatus();
- cutHoles = new List<MeasureData.CutHole>();
- }
- //初始化测量业务, 读测量文件,判断是否有可测试的切孔
- public bool InitMeas(MeasureFile a_measureFile)
- {
- m_measureFile = a_measureFile;
- List<CutHole> listHoles = m_measureFile.ListCutHole;
- foreach (CutHole h in listHoles)
- {
- if (h.SWITCH == true)
- {
- m_cutHoles.Add(h);
- }
- }
- if (m_cutHoles.Count == 0)
- return false;
- this.m_MsParam = m_measureFile.MParam;
- return true;
- }
- public void SendMsg(string a_StrMsg)
- {
- ThreadStatusEventArgs arg = new ThreadStatusEventArgs(a_StrMsg);
- arg.Time = DateTime.Now;
- SendThreadStatus(this, arg);
- }
- public void SendCutHoleMsg(string a_state, string a_holeName)
- {
- CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
- arg.HoleName = a_holeName;
- arg.State = a_state;
- SendCutHolesStatus(this, arg);
- }
- //测量流程
- public void DoMeasure()
- {
- //创建线程的测量状态的更新
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
- if (SendThreadStatus != null)
- {
- SendMsg("开始测量。");
- }
- //检查硬件连接是否正常
- if (!ConnectHardware())
- {
- SendMsg("连接硬件失败。");
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
- return;
- }
- SendMsg("硬件连接成功。");
- //设置工作文件夹
- if (!SetWorkingFolderStr())
- {
- SendMsg("设置工作文件夹失败");
- this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
- return;
- }
- SendMsg("创建工作文件路径为" + WorkingFolder);
- float[] firstPosition;
- for (int i = 0; i < m_cutHoles.Count; i++)
- {
- m_nWorkHoleNo = i;
- if (i == 0)
- {
- SendMsg("第一个切孔开始测量");
- //切孔操作-开始
- SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
- firstPosition = iSEM.GetStagePosition();
- //第一个孔的测试
- FirstHole();
- //切孔操作-完成
- SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
- }
- else
- {
- //非第一个孔的测试
- SendMsg("第" + i.ToString() + "个切孔开始测量");
- //切孔操作-开始
- SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
- OtherHole();
- //切孔操作-完成
- SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
- }
- }
- }
- //检查硬件连接是否正常
- public bool ConnectHardware()
- {
- //返回硬件的连接状态
- return iSEM.ConnectStatus();
- }
- //设置工作文件夹
- public bool SetWorkingFolderStr()
- {
- WorkingFolder = m_measureFile.FilePath;
- return true;
- ////获取工作文件路径
- //string pathName = m_measureFile.FilePath;
- ////判断工作文件路径是否为空或无效
- //if (string.IsNullOrEmpty(pathName))
- //{
- // SendMsg("路径无效");
- // return false;
- //}
- ////文件未保存
- //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
- //{
- // SendMsg("工程文件未保存");
- // return false;
- //}
- ////获取工作文件所在文件夹
- //string folder = System.IO.Path.GetDirectoryName(pathName);
- //if (string.IsNullOrEmpty(folder))
- //{
- // SendMsg("工程文件无效");
- // return false;
- //}
- //WorkingFolder += @"\\";
- //LogManager.Init(WorkingFolder);
- //return false;
- }
- //插入PT针
- public bool InsertPT()
- {
- string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
- SendMsg("调用宏插入PT针宏文件" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(1000);
- return true;
- }
- //撤出PT针
- public bool RetractPT()
- {
- string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
- SendMsg("调用宏撤出PT针宏文件" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(1000);
- return true;
- }
- //PT沉积
- public bool PTWork()
- {
- //执行PT沉积的ELY文件
- string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
- SendMsg("执行PT沉积Ely文件:" + fn);
- if (!ExcuteEly(fn))
- {
- return false;
- }
- //等待沉积完成
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetFIBMode() == 0)
- {
- break;
- }
- }
- return true;
- }
- //FIB切割
- public bool FIBWork()
- {
- //执行PT沉积的ELY文件
- string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
- SendMsg("执行FIB切割Ely文件:" + fn);
- if (!ExcuteEly(fn))
- {
- return false;
- }
- //等待切割完成
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetFIBMode() == 0)
- {
- break;
- }
- }
- return true;
- }
- public bool ExcuteEly(string a_filename)
- {
- //执行ELy文件有三个动作
- //1. 选择ELY文件
- SendMsg("选择ELY文件");
- if (!iSEM.CmdFIBLoadELY(a_filename))
- {
- SendMsg("选择ELY文件失败");
- return false;
- }
- Thread.Sleep(1000);
- //2. 确认ELY文件
- SendMsg("确认ELY文件");
- if (!iSEM.CmdFIBEXPOSUREELY())
- {
- SendMsg("确认ELY文件失败");
- return false;
- }
- Thread.Sleep(1000);
- //3. 执行ELY文件
- SendMsg("执行ELY文件");
- if (!iSEM.CmdFIBSTARTELY())
- {
- SendMsg("执行ELY文件失败");
- return false;
- }
- Thread.Sleep(1000);
- return true;
- }
- /// <summary>
- ///13. 自动 定位功能
- /// </summary>
- /// <returns></returns>
- public bool GetPoistion()
- {
- SendMsg("自动定位");
- //13.自动定位切割
- {
- SendMsg("放大600倍");
- //1.控制SEM放大600X
- if (!iSEM.SetMagnification(600))
- {
- return false;
- }
- //2.控制SEM自动对焦、亮度、对比度
- // if (!MeasParam.FocusMode)
- {
- if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- SendMsg("拍摄照片完成");
- //return true;
- }
- else
- {
- SendMsg("拍摄照片失败");
- return false;
- }
- //弹出手动对焦的窗口
- }
- //else
- //{
- // //调用自动对焦模块
- //}
- //3.设置SEM进行角度补偿54度
- SendMsg("设置校正54度");
- if (!TiltCorrection(54))
- {
- SendMsg("设置SEM进行角度补偿54度");
- return false;
- }
- Thread.Sleep(5000);
- //4.控制SEM拍照
- SendMsg("SEM拍照");
- //5.保存照片
- {
- //1. 创建目录,已经完成
- //2. 设置图片名称
- //3. 保存图片1
- WorkingFolder = m_measureFile.FilePath;
- String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
- SendMsg("SEM拍照存储到" + fileName1);
- if (!GetImage(ImageMode.SEM, fileName1))
- {
- SendMsg("SEM拍照失败");
- return false;
- }
- Thread.Sleep(3000);
- }
- //6.设置FIB拍照参数——扫描时间、束流等
- //7.控制FIB自动亮度、对比度
- SendMsg("切换FIB控制");
- if (!iSEM.CmdFIBModeFIB())
- {
- SendMsg("FIB模式切换失败");
- return false;
- }
- Thread.Sleep(10000);
- //8.控制FIB拍照
- //9.保存照片
- SendMsg("FIB拍照");
- {
- //1. 设置图片名称
- //2. 保存图片2
- String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
- if (!GetImage(ImageMode.FIB, fileName2))
- {
- SendMsg("FIB拍照失败");
- return false;
- }
- Thread.Sleep(3000);
- }
- //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
- SendMsg("调用识别位置");
- if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- SendMsg("移动已完成");
- //return true;
- }
- else
- {
- SendMsg("移动已失败");
- return false;
- }
- SendMsg("进行PT沉积");
- //11.自动工具样品类型参数确定是否需要PT沉积
- {
- //1. 根据客户PT沉积坐标控制FIB调整到中心位置
- //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
- //3. 根据坐标进行PT沉积
- if (!PTWork())
- {
- SendMsg("PT沉积失败");
- return false;
- }
- }
- return true;
- ////模拟为客户返回的坐标值
- //float x0 = 0, y0 = 0;
- //SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
- ////12.根据梯形坐标控制FIB调整到中心位置
- //if (!iSEM.MoveStageXY(x0, y0))
- //{
- // SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
- // return false;
- //}
- ////电镜移动是有一个延时的操作的?
- ////13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
- //float x1 = iSEM.GetStageAtX();
- //float y1 = iSEM.GetStageAtY();
- //if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
- //{
- // SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
- // return false;
- //}
- ////14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
- //float[] firstPosition = iSEM.GetStagePosition();
- ////这里要调用文件保存功能
- //SendMsg("坐标1(" + firstPosition[0].ToString() + ","
- // + firstPosition[1].ToString() + ","
- // + firstPosition[2].ToString() + ","
- // + firstPosition[3].ToString() + ","
- // + firstPosition[4].ToString() + ","
- // + firstPosition[5].ToString() + ")");
- }
- //return false;
- }
- /// <summary>
- /// 14. FIB切割
- /// </summary>
- /// <returns></returns>
- public bool FIBCross()
- {
- //14.自动控制FIB切割
- {
- //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
- //2.控制FIB进行切割
- SendMsg("FIB切割");
- if (!FIBWork())
- {
- SendMsg("FIB切割失败");
- return false;
- }
- Thread.Sleep(5000);
- //3.控制FIB拍照600X
- //4.保存图片
- {
- //1.设置图片名称
- //2.保存图片3
- WorkingFolder = m_measureFile.FilePath;
- String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
- SendMsg("SEM拍照存储到" + fileName3);
- if (!GetImage(ImageMode.FIB, fileName3))
- {
- SendMsg("FIB拍照失败");
- return false;
- }
- Thread.Sleep(3000);
- }
- //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
- //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
- }
- return true;
- }
- /// <summary>
- /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
- /// </summary>
- /// <returns></returns>
- public bool FindCross()
- {
- //16.自动调整SEM找到切割位置
- {
- //1.控制SEM放大到300倍
- if (!iSEM.SetMagnification(300))
- {
- return false;
- }
- //2.控制SEM自动对焦、亮度、对比度-接口
- if (!MeasParam.FocusMode)
- {
- //弹出手动对焦的窗口
- }
- else
- {
- //调用自动对焦模块
- }
- Thread.Sleep(5000);
- //3.控制SEM拍照
- String fileName4 = WorkingFolder + ImageName4;
- if (!GetImage(ImageMode.SEM, fileName4))
- {
- return false;
- }
- Thread.Sleep(3000);
- //4.将照片传给客户,获取偏移坐标,以及偏移角度
- float x4 = 0, y4 = 0;
- float angle = 0;
- //5.根据坐标控制SEM移动到切孔位置,居中
- if (!iSEM.MoveStageXY(x4, y4))
- {
- return false;
- }
- if (!iSEM.SetScanRotation(angle))
- {
- return false;
- }
- ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
- //float x5 = iSEM.GetStageAtX();
- //float y5 = iSEM.GetStageAtY();
- //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
- //{
- // return false;
- //}
- }
- return true;
- }
- public bool CommonWork()
- {
- SendMsg("插入PT针");
- //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
- //if (firstHole.PT == true)
- {
- if (!InsertPT())
- {
- SendMsg("插入PT针失败");
- return false;
- }
- }
- //13. 自动 定位功能
- SendMsg("自动定位切割位置");
- if (!GetPoistion())
- {
- SendMsg("自动定位切割位置失败");
- return false;
- }
- //14.自动控制FIB切割
- SendMsg("FIB切割");
- if (!FIBCross())
- {
- SendMsg("FIB切割失败");
- return false;
- }
- //{
- // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
- // //2.控制FIB进行切割
- // //3.控制FIB拍照600X
- // //4.保存图片
- // {
- // //1.设置图片名称
- // //2.保存图片3
- // String fileName3 = WorkingFolder + ImageName3;
- // if (!GetImage(ImageMode.FIB, fileName3))
- // {
- // return false;
- // }
- // }
- // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
- // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
- //}
- //15.根据样品类型决定是否撤出PT针
- SendMsg("撤出PT针");
- //if (firstHole.PT == false)
- //{
- if (!RetractPT())
- {
- SendMsg("撤出PT针失败");
- return false;
- }
- //}
- // 16.找到切割位置
- SendMsg("找到切割位置");
- //17.自动控制SEM拍截面照
- SendMsg("观测层高");
- SendMsg("切换SEM控制");
- if (!iSEM.CmdFIBModeSEM())
- {
- SendMsg("SEM模式切换失败");
- return false;
- }
- Thread.Sleep(10000);
- SendMsg("放大6000倍");
- if (!iSEM.SetMagnification(6000))
- {
- SendMsg("放大倍数调整失败");
- return false;
- }
- if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- SendMsg("拍摄照片完成");
- //return true;
- }
- else
- {
- SendMsg("拍摄照片失败");
- return false;
- }
- SendMsg("图像校正36度");
- //3.设置SEM角度补偿cos36度
- if (!TiltCorrection(36))
- {
- return false;
- }
- Thread.Sleep(3000);
- string fn;
- //用宏抓一般图
- Thread.Sleep(5000);
- fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
- SendMsg("用宏抓一般图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(5000);
- //用宏抓好图
- fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
- SendMsg("用宏抓好图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(30000);
- Thread.Sleep(10000);
- WorkingFolder = m_measureFile.FilePath;
- String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
- SendMsg("SEM拍照存储到" + fileName6);
- if (!GetImage(ImageMode.SEM, fileName6))
- {
- SendMsg("SEM拍照失败");
- return false;
- }
- //用宏抓标志图
- fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
- SendMsg("用宏抓标志图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(30000);
- //恢复简单抓图
- Thread.Sleep(5000);
- fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
- SendMsg("用宏抓一般图" + fn);
- iSEM.CMDMCFFilename(fn);
- SendMsg("所有图结束");
- return true;
- }
- //第一个孔的测试过程
- public bool FirstHole()
- {
- MeasureData.CutHole firstHole = m_cutHoles[0];
- SendMsg("插入PT针");
- //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
- //if (firstHole.PT == true)
- {
- if (!InsertPT())
- {
- SendMsg("插入PT针失败");
- return false;
- }
- }
- //13. 自动 定位功能
- SendMsg("自动定位切割位置");
- if (!GetPoistion())
- {
- SendMsg("自动定位切割位置失败");
- return false;
- }
- //14.自动控制FIB切割
- SendMsg("FIB切割");
- if (!FIBCross())
- {
- SendMsg("FIB切割失败");
- return false;
- }
- //{
- // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
- // //2.控制FIB进行切割
- // //3.控制FIB拍照600X
- // //4.保存图片
- // {
- // //1.设置图片名称
- // //2.保存图片3
- // String fileName3 = WorkingFolder + ImageName3;
- // if (!GetImage(ImageMode.FIB, fileName3))
- // {
- // return false;
- // }
- // }
- // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
- // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
- //}
- //15.根据样品类型决定是否撤出PT针
- SendMsg("撤出PT针");
- //if (firstHole.PT == false)
- //{
- if (!RetractPT())
- {
- SendMsg("撤出PT针失败");
- return false;
- }
- //}
- // 16.找到切割位置
- SendMsg("找到切割位置");
- //17.自动控制SEM拍截面照
- SendMsg("观测层高");
- SendMsg("切换SEM控制");
- if (!iSEM.CmdFIBModeSEM())
- {
- SendMsg("SEM模式切换失败");
- return false;
- }
- Thread.Sleep(10000);
- SendMsg("放大6000倍");
- if (!iSEM.SetMagnification(6000))
- {
- SendMsg("放大倍数调整失败");
- return false;
- }
- if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
- {
- SendMsg("拍摄照片完成");
- //return true;
- }
- else
- {
- SendMsg("拍摄照片失败");
- return false;
- }
- SendMsg("图像校正36度");
- //3.设置SEM角度补偿cos36度
- if (!TiltCorrection(36))
- {
- return false;
- }
- Thread.Sleep(3000);
- string fn;
- //用宏抓一般图
- Thread.Sleep(5000);
- fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
- SendMsg("用宏抓一般图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(5000);
- //用宏抓好图
- fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
- SendMsg("用宏抓好图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(30000);
- Thread.Sleep(10000);
- WorkingFolder = m_measureFile.FilePath;
- String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
- SendMsg("SEM拍照存储到" + fileName6);
- if (!GetImage(ImageMode.SEM, fileName6))
- {
- SendMsg("SEM拍照失败");
- return false;
- }
- //用宏抓标志图
- fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
- SendMsg("用宏抓标志图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(30000);
- Thread.Sleep(5000);
- fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
- SendMsg("用宏抓一般图" + fn);
- iSEM.CMDMCFFilename(fn);
- //延时1s??
- Thread.Sleep(5000);
- SendMsg("所有图结束");
- ////17.自动控制SEM拍截面照
- //{
- // //1.控制SEM放大到指定参数大小范围,6000x
- // if (!iSEM.SetMagnification(6000))
- // {
- // return false;
- // }
- // //2.控制SEM自动对焦、消像散、亮度、对比度
- // if (!MeasParam.FocusMode)
- // {
- // //弹出手动对焦的窗口
- // }
- // else
- // {
- // //调用自动对焦模块
- // }
- // //3.设置SEM角度补偿cos36度
- // if (!TiltCorrection(36))
- // {
- // return false;
- // }
- // //4.控制SEM拍照
- // //5.保存照片4
- // String fileName5 = WorkingFolder + ImageName5;
- // if (!GetImage(ImageMode.SEM, fileName5))
- // {
- // return false;
- // }
- // //6.将照片传给客户,获取偏移坐标
- // float x6 = 0, y6 = 0;
- // float angle1 = 0;
- // float mage = 10000;
- // //7.根据坐标控制SEM移动到分析位置
- // if (!iSEM.MoveStageXY(x6, y6))
- // {
- // return false;
- // }
- // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
- // float x7 = iSEM.GetStageAtX();
- // float y7 = iSEM.GetStageAtY();
- // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
- // {
- // return false;
- // }
- // //9.控制SEM平行校正,并记录校正前初始值
- // float foldAnagle = iSEM.GetScanRotation();
- // if (foldAnagle == float.NaN)
- // {
- // return false;
- // }
- // if (!iSEM.SetScanRotation(angle1))
- // {
- // return false;
- // }
- // //10.控制SEM放大到指定参数大小范围
- // if (!iSEM.SetMagnification(mage))
- // {
- // return false;
- // }
- // //11.控制SEM自动对焦、消像散、亮度、对比度
- // if (!MeasParam.FocusMode)
- // {
- // //弹出手动对焦的窗口
- // }
- // else
- // {
- // //调用自动对焦模块
- // }
- // //12.控制SEM对分析位置拍照
- // String fileName6 = WorkingFolder + ImageName6;
- // if (!GetImage(ImageMode.SEM, fileName6))
- // {
- // return false;
- // }
- // //13.保存照片
- // //14.控制SEM取消电子束校正,回到初始值
- // if (!iSEM.SetScanRotation(foldAnagle))
- // {
- // return false;
- // }
- //}
- ////18.自动层高分析
- //{
- // //1.获取SEM Pixel Size给客户传入参数
- // if (iSEM.GetPixelSize() == float.NaN)
- // {
- // return false;
- // }
- // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
- //}
- ////19.自动能谱分析
- //{
- // //1. 确定能谱位置
- // //2. 控制牛津打能谱
- // //3. 能谱分析——面扫+线扫描
- //}
- return true;
- }
- //非第一个孔的测试过程
- public void OtherHole()
- {
- //for (int i = 1; i < m_cutHoles.Count; i++)
- //{
- SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
- CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
- //1. 初始化
- {
- //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
- //读取图像冻结状态
- float ffrozen = iSEM.GetImageFrozen();
- if (ffrozen == float.NaN)
- {
- return;
- }
- if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
- {
- SendMsg("样品台恢复到水平");
- //return true;
- }
- else
- {
- SendMsg("禁止样品台恢复到水平");
- return;
- }
- //2. 调节样品1号孔的样品台6轴坐标
- //3. 将样品1号孔坐标2存入数据库
- //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
- if (!iSEM.SetStageGotoT(0))
- {
- return;
- }
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //5. 获取光镜2号孔XY坐标
- SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
-
- //6. 根据光镜坐标控制样品台移动
- if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
- {
- SendMsg("移动失败");
- }
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- //7. 控制样品台,调整T轴54度、M/Z/R轴不变
- if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
- {
- SendMsg("样品台旋转");
- //return true;
- }
- else
- {
- SendMsg("禁止样品台旋转");
- return;
- }
- if (!iSEM.SetStageGotoT(54))
- {
- return;
- }
- while (true)
- {
- Thread.Sleep(10000);
- if (iSEM.GetStageIs() == 0)
- {
- break;
- }
- }
- }
- SendMsg("拉直操作");
- SendMsg("其他操作与1号孔操作一致");
- if (!CommonWork())
- {
- return;
- }
- //2. 定位切割
- {
- //1. 拉直操作
- {
- //1.1 控制SEM进行拍照
- //1.2 图片传给客户,返回偏移角度
- //1.3 根据返回角度,控制样品台转动
- }
- //2. 与1号孔13步相同
- }
- //3. 以后步骤与1号孔以后步骤一致
- //}
- }
- //角度补偿
- public bool TiltCorrection(float a_fAngle)
- {
- //记录原来电镜的状态
- // bool bTilt = false;
- //float fOldTilt = iSEM.GetTiltCorrection();
- //if (fOldTilt == float.NaN)
- //{
- // return false;
- //}
- //else if (fOldTilt == 1)
- //{
- // bTilt = true;
- //}
- //else if (fOldTilt == 0)
- //{
- // bTilt = false;
- //}
- //float fOldAngle = iSEM.GetTiltAngle();
- //if (fOldAngle == float.NaN)
- //{
- // return false;
- //}
- //开启校正
- SendMsg("开启校正");
- if (!iSEM.SetTiltAngleOn())
- {
- return false;
- }
- //设置校正角度
- //if (!iSEM.SetTiltAngle(fOldAngle))
- //{
- // return false;
- //}
- //恢复原始状态
- SendMsg("校正角度"+ a_fAngle.ToString());
- if (!iSEM.SetTiltAngle(a_fAngle))
- {
- return false;
- }
- //if (bTilt)
- //{
- // if (!iSEM.SetTiltCorrectionOn())
- // {
- // return false;
- // }
- //}
- //else
- //{
- // if (!iSEM.SetTiltCorrectionOff())
- // {
- // return false;
- // }
- //}
- return true;
- }
- //拍图
- public bool GetImage(ImageMode a_mode, String a_fileName)
- {
- //1. 图像解冻
- float foldFrozen = iSEM.GetImageFrozen();
- if (foldFrozen == float.NaN)
- {
- return false;
- }
- if (!iSEM.ImageLive())
- {
- return false;
- }
- //2. 确认图像模式
- if (ImageMode.SEM == a_mode)
- {
- if (!iSEM.CmdFIBModeSEM())
- {
- return false;
- }
- }
- else if (ImageMode.FIB == a_mode)
- {
- if (!iSEM.CmdFIBModeFIB())
- {
- return false;
- }
- }
- else
- {
- return false;
- }
- //3. 获取分辨率
- int[] ImageSize = iSEM.GetImageStore();
- if (ImageSize[0] == 0 || ImageSize[1] == 0)
- {
- return false;
- }
- short width = (short)ImageSize[0];
- short height = (short)ImageSize[1];
- //4. 抓图
- if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
- {
- return false;
- }
- //5. 恢复初始状态
- if (foldFrozen == 0)
- {
- if (!iSEM.ImageLive())
- {
- return false;
- }
- }
- else if (foldFrozen == 1)
- {
- if (!iSEM.ImageFrozen())
- {
- return false;
- }
- }
- return true;
- }
- //自动对焦
- public bool AutoFocus(string a_strPath, out int a_wd)
- {
- a_wd = 10;
- //1. 拍照
- //2. 计算评价函数
- //3. 获取焦距
- return true;
- }
- }
- }
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