Measure.cs 50 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using SmartSEMControl;
  13. using MeasureData;
  14. using FileManager;
  15. namespace MeasureThread
  16. {
  17. //图片模式
  18. public enum ImageMode
  19. {
  20. FIB,
  21. SEM
  22. }
  23. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  24. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  25. //线程与界面通信协议
  26. public class ThreadStatusEventArgs
  27. {
  28. //状态,
  29. public string State
  30. {
  31. get { return m_state; }
  32. set { m_state = value; }
  33. }
  34. private string m_state;
  35. //时间
  36. public DateTime Time
  37. {
  38. get { return m_time; }
  39. set { m_time = value; }
  40. }
  41. private DateTime m_time;
  42. //步骤编码与MeasureStructXml.xml文件中的step中的code码一致
  43. public string Step_Code
  44. {
  45. get { return step_Code; }
  46. set { step_Code = value; }
  47. }
  48. private string step_Code;
  49. //图片信息
  50. public class PictureInformation
  51. {
  52. //使用XML中的IsData,不用改字段
  53. public Boolean Is_Picture
  54. {
  55. get { return is_Picture; }
  56. set { is_Picture = value; }
  57. }
  58. private Boolean is_Picture;
  59. public String Picture_FullPath
  60. {
  61. get { return picture_FullPath; }
  62. set { picture_FullPath = value; }
  63. }
  64. private String picture_FullPath;
  65. public double Work_Voltage
  66. {
  67. get { return work_Voltage; }
  68. set { work_Voltage = value; }
  69. }
  70. private double work_Voltage;
  71. public double Magnification
  72. {
  73. get { return magnification; }
  74. set { magnification = value; }
  75. }
  76. private double magnification;
  77. public double Work_Distance
  78. {
  79. get { return work_Distance; }
  80. set { work_Distance = value; }
  81. }
  82. private double work_Distance;
  83. //SEM/FIB
  84. public String Work_Status
  85. {
  86. get { return work_Status; }
  87. set { work_Status = value; }
  88. }
  89. private String work_Status;
  90. }
  91. //图片信息实例类
  92. public PictureInformation Picture_Information
  93. {
  94. get { return picture_Information; }
  95. set { picture_Information = value; }
  96. }
  97. private PictureInformation picture_Information;
  98. //图像信息
  99. public class ImageInformation
  100. {
  101. //8个名
  102. public int Method_Name
  103. {
  104. get { return method_Name; }
  105. set { method_Name = value; }
  106. }
  107. private int method_Name;
  108. public Source_Img_Degree_Direction SIDD;
  109. public Cut_Position CP;
  110. public Cut_Success CS;
  111. public Trapezoid_Top_Center_Position TTCP;
  112. public Auto_Foucs AF;
  113. public Auto_Stigmatic AS;
  114. public Center_Position_OffsetAngle_Direction CPOD;
  115. public Measure_Size MS;
  116. public ImageInformation()
  117. {
  118. SIDD = new Source_Img_Degree_Direction();
  119. CP = new Cut_Position();
  120. CS = new Cut_Success();
  121. TTCP = new Trapezoid_Top_Center_Position();
  122. AF = new Auto_Foucs();
  123. AS = new Auto_Stigmatic();
  124. CPOD = new Center_Position_OffsetAngle_Direction();
  125. MS = new Measure_Size();
  126. }
  127. //1-计算原始图像偏移角度及方向
  128. public class Source_Img_Degree_Direction
  129. {
  130. public Boolean Is_Image = false;
  131. public double Degree
  132. {
  133. get { return degree; }
  134. set { degree = value; }
  135. }
  136. private double degree;
  137. public int Direction
  138. {
  139. get { return direction; }
  140. set { direction = value; }
  141. }
  142. private int direction;
  143. public int State
  144. {
  145. get { return state; }
  146. set { state = value; }
  147. }
  148. private int state;
  149. }
  150. //2-计算切割点位置
  151. public class Cut_Position
  152. {
  153. public Boolean Is_Image = false;
  154. public double Offsetx
  155. {
  156. get { return offsetx; }
  157. set { offsetx = value; }
  158. }
  159. private double offsetx;
  160. public double Offsety
  161. {
  162. get { return offsety; }
  163. set { offsety = value; }
  164. }
  165. private double offsety;
  166. public int State
  167. {
  168. get { return state; }
  169. set { state = value; }
  170. }
  171. private int state;
  172. }
  173. //3-是否切割成功
  174. public class Cut_Success
  175. {
  176. public Boolean Is_Image = false;
  177. public int State
  178. {
  179. get { return state; }
  180. set { state = value; }
  181. }
  182. private int state;
  183. }
  184. //4-计算切割后图像梯形区域上边中心点坐标
  185. public class Trapezoid_Top_Center_Position
  186. {
  187. public Boolean Is_Image = false;
  188. public double TopCenterX
  189. {
  190. get { return topCenterX; }
  191. set { topCenterX = value; }
  192. }
  193. private double topCenterX;
  194. public double TopCenterY
  195. {
  196. get { return topCenterY; }
  197. set { topCenterY = value; }
  198. }
  199. private double topCenterY;
  200. public int State
  201. {
  202. get { return state; }
  203. set { state = value; }
  204. }
  205. private int state;
  206. }
  207. //5-自动对焦
  208. public class Auto_Foucs
  209. {
  210. public Boolean Is_Image = true;
  211. public String Img_Path
  212. {
  213. get { return img_Path; }
  214. set { img_Path = value; }
  215. }
  216. private String img_Path;
  217. }
  218. //6-自动像闪
  219. public class Auto_Stigmatic
  220. {
  221. public Boolean Is_Image = true;
  222. public String Img_Path
  223. {
  224. get { return img_Path; }
  225. set { img_Path = value; }
  226. }
  227. private String img_Path;
  228. }
  229. //7-计算切割面区域中心坐标,以及偏移角度及方向
  230. public class Center_Position_OffsetAngle_Direction
  231. {
  232. public Boolean Is_Image = false;
  233. public double CenterX
  234. {
  235. get { return centerX; }
  236. set { centerX = value; }
  237. }
  238. private double centerX;
  239. public double CenterY
  240. {
  241. get { return centerY; }
  242. set { centerY = value; }
  243. }
  244. private double centerY;
  245. public double Degree
  246. {
  247. get { return degree; }
  248. set { degree = value; }
  249. }
  250. private double degree;
  251. public int Direction
  252. {
  253. get { return direction; }
  254. set { direction = value; }
  255. }
  256. private int direction;
  257. public int State
  258. {
  259. get { return state; }
  260. set { state = value; }
  261. }
  262. private int state;
  263. }
  264. //8-测量尺寸
  265. public class Measure_Size
  266. {
  267. public Boolean Is_Image = false;
  268. public int State
  269. {
  270. get { return state; }
  271. set { state = value; }
  272. }
  273. private int state;
  274. }
  275. }
  276. public ThreadStatusEventArgs(string a_State)
  277. {
  278. this.m_state = a_State;
  279. picture_Information = new PictureInformation();
  280. }
  281. }
  282. //切孔状态
  283. public class CutHolesStatusEventArgs
  284. {
  285. public string State
  286. {
  287. get { return m_state; }
  288. set { m_state = value; }
  289. }
  290. private string m_state;
  291. public string HoleName
  292. {
  293. get { return m_holeName; }
  294. set { m_holeName = value; }
  295. }
  296. private string m_holeName;
  297. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  298. {
  299. this.m_state = a_state;
  300. this.m_holeName = a_holeName;
  301. }
  302. }
  303. public class Measure
  304. {
  305. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  306. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  307. //全局只有一个fatorySEM
  308. static FactoryHardware factorySEM = FactoryHardware.Instance;
  309. ISEMControl iSEM = factorySEM.ISEM;
  310. //@的作用是不用转义字符\\只打一个就行
  311. const String ImageName1 = @"ImageSEM600X.tif"; //传给客户,作水平校正
  312. const String ImageName2 = @"ImageFIB600X1.tif";//传给客户,找到切割点
  313. const String ImageName3 = @"ImageFIB600X2.tif";
  314. const String ImageName4 = @"ImageSEM300X.tif";//传给客户,找到已经切割点
  315. const String ImageName5 = @"ImageSEM6000X.tif";//传给客户,水平校正
  316. const String ImageName6 = @"ImageSEMMag.tif";//传给客户,测量层高
  317. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  318. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  319. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  320. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  321. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  322. const String ElyDeposition = @"Deposition.ely"; //沉积
  323. const String ElyCrossSection = @"CrossSection.ely"; //切割
  324. const float fMin = (float)0.0000002; //单位是米
  325. int m_nWorkHoleNo = -1;
  326. //测量文件
  327. private MeasureFile m_measureFile;
  328. public MeasureFile MeasureFile
  329. {
  330. get { return this.m_measureFile; }
  331. set { this.m_measureFile = value; }
  332. }
  333. //测量的切割孔,取测量文件里的孔
  334. private List<MeasureData.CutHole> m_cutHoles;
  335. public List<MeasureData.CutHole> cutHoles
  336. {
  337. get { return this.m_cutHoles; }
  338. set { this.m_cutHoles = value; }
  339. }
  340. //工作文件夹
  341. private string m_WorkingFolder;
  342. public string WorkingFolder
  343. {
  344. get { return this.m_WorkingFolder; }
  345. set { this.m_WorkingFolder = value; }
  346. }
  347. //程序当前路径
  348. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  349. //线程状态
  350. private ThreadStatus m_ThreadStatus;
  351. public ThreadStatus TStatus
  352. {
  353. get { return this.m_ThreadStatus; }
  354. set { this.m_ThreadStatus = value; }
  355. }
  356. //测量参数,不使用,使用文件中的参数
  357. private MeasureParam m_MsParam;
  358. public MeasureParam MeasParam
  359. {
  360. get { return this.m_MsParam; }
  361. set { this.m_MsParam = value; }
  362. }
  363. //构造函数
  364. public Measure()
  365. {
  366. Init();
  367. }
  368. private void Init()
  369. {
  370. //MeasParam = new MeasureParam();
  371. TStatus = new ThreadStatus();
  372. cutHoles = new List<MeasureData.CutHole>();
  373. }
  374. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  375. public bool InitMeas(MeasureFile a_measureFile)
  376. {
  377. m_measureFile = a_measureFile;
  378. List<CutHole> listHoles = m_measureFile.ListCutHole;
  379. foreach (CutHole h in listHoles)
  380. {
  381. if (h.SWITCH == true)
  382. {
  383. m_cutHoles.Add(h);
  384. }
  385. }
  386. if (m_cutHoles.Count == 0)
  387. return false;
  388. this.m_MsParam = m_measureFile.MParam;
  389. return true;
  390. }
  391. public void SendMsg(string a_StrMsg)
  392. {
  393. ThreadStatusEventArgs arg = new ThreadStatusEventArgs(a_StrMsg);
  394. arg.Time = DateTime.Now;
  395. SendThreadStatus(this, arg);
  396. }
  397. public void SendCutHoleMsg(string a_state, string a_holeName)
  398. {
  399. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  400. arg.HoleName = a_holeName;
  401. arg.State = a_state;
  402. SendCutHolesStatus(this, arg);
  403. }
  404. //测量流程
  405. public void DoMeasure()
  406. {
  407. //创建线程的测量状态的更新
  408. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  409. if (SendThreadStatus != null)
  410. {
  411. SendMsg("开始测量。");
  412. }
  413. //检查硬件连接是否正常
  414. if (!ConnectHardware())
  415. {
  416. SendMsg("连接硬件失败。");
  417. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  418. return;
  419. }
  420. SendMsg("硬件连接成功。");
  421. //设置工作文件夹
  422. if (!SetWorkingFolderStr())
  423. {
  424. SendMsg("设置工作文件夹失败");
  425. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  426. return;
  427. }
  428. SendMsg("创建工作文件路径为" + WorkingFolder);
  429. float[] firstPosition;
  430. for (int i = 0; i < m_cutHoles.Count; i++)
  431. {
  432. m_nWorkHoleNo = i;
  433. if (i == 0)
  434. {
  435. SendMsg("第一个切孔开始测量");
  436. //切孔操作-开始
  437. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  438. firstPosition = iSEM.GetStagePosition();
  439. //第一个孔的测试
  440. FirstHole();
  441. //切孔操作-完成
  442. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  443. }
  444. else
  445. {
  446. //非第一个孔的测试
  447. SendMsg("第" + i.ToString() + "个切孔开始测量");
  448. //切孔操作-开始
  449. SendCutHoleMsg(((int)ThreadState.InProcess).ToString(), m_cutHoles[i].HoleName);
  450. OtherHole();
  451. //切孔操作-完成
  452. SendCutHoleMsg(((int)ThreadState.Success).ToString(), m_cutHoles[i].HoleName);
  453. }
  454. }
  455. }
  456. //检查硬件连接是否正常
  457. public bool ConnectHardware()
  458. {
  459. //返回硬件的连接状态
  460. return iSEM.ConnectStatus();
  461. }
  462. //设置工作文件夹
  463. public bool SetWorkingFolderStr()
  464. {
  465. WorkingFolder = m_measureFile.FilePath;
  466. return true;
  467. ////获取工作文件路径
  468. //string pathName = m_measureFile.FilePath;
  469. ////判断工作文件路径是否为空或无效
  470. //if (string.IsNullOrEmpty(pathName))
  471. //{
  472. // SendMsg("路径无效");
  473. // return false;
  474. //}
  475. ////文件未保存
  476. //else if (pathName.CompareTo(MeasureFile.UNTITLED_FILE_NAME) == 0)
  477. //{
  478. // SendMsg("工程文件未保存");
  479. // return false;
  480. //}
  481. ////获取工作文件所在文件夹
  482. //string folder = System.IO.Path.GetDirectoryName(pathName);
  483. //if (string.IsNullOrEmpty(folder))
  484. //{
  485. // SendMsg("工程文件无效");
  486. // return false;
  487. //}
  488. //WorkingFolder += @"\\";
  489. //LogManager.Init(WorkingFolder);
  490. //return false;
  491. }
  492. //插入PT针
  493. public bool InsertPT()
  494. {
  495. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  496. SendMsg("调用宏插入PT针宏文件" + fn);
  497. iSEM.CMDMCFFilename(fn);
  498. //延时1s??
  499. Thread.Sleep(1000);
  500. return true;
  501. }
  502. //撤出PT针
  503. public bool RetractPT()
  504. {
  505. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  506. SendMsg("调用宏撤出PT针宏文件" + fn);
  507. iSEM.CMDMCFFilename(fn);
  508. //延时1s??
  509. Thread.Sleep(1000);
  510. return true;
  511. }
  512. //PT沉积
  513. public bool PTWork()
  514. {
  515. //执行PT沉积的ELY文件
  516. string fn = m_ProgramFolder + "\\Macro\\" + ElyDeposition;
  517. SendMsg("执行PT沉积Ely文件:" + fn);
  518. if (!ExcuteEly(fn))
  519. {
  520. return false;
  521. }
  522. //等待沉积完成
  523. while (true)
  524. {
  525. Thread.Sleep(10000);
  526. if (iSEM.GetFIBMode() == 0)
  527. {
  528. break;
  529. }
  530. }
  531. return true;
  532. }
  533. //FIB切割
  534. public bool FIBWork()
  535. {
  536. //执行PT沉积的ELY文件
  537. string fn = m_ProgramFolder + "\\Macro\\" + ElyCrossSection;
  538. SendMsg("执行FIB切割Ely文件:" + fn);
  539. if (!ExcuteEly(fn))
  540. {
  541. return false;
  542. }
  543. //等待切割完成
  544. while (true)
  545. {
  546. Thread.Sleep(10000);
  547. if (iSEM.GetFIBMode() == 0)
  548. {
  549. break;
  550. }
  551. }
  552. return true;
  553. }
  554. public bool ExcuteEly(string a_filename)
  555. {
  556. //执行ELy文件有三个动作
  557. //1. 选择ELY文件
  558. SendMsg("选择ELY文件");
  559. if (!iSEM.CmdFIBLoadELY(a_filename))
  560. {
  561. SendMsg("选择ELY文件失败");
  562. return false;
  563. }
  564. Thread.Sleep(1000);
  565. //2. 确认ELY文件
  566. SendMsg("确认ELY文件");
  567. if (!iSEM.CmdFIBEXPOSUREELY())
  568. {
  569. SendMsg("确认ELY文件失败");
  570. return false;
  571. }
  572. Thread.Sleep(1000);
  573. //3. 执行ELY文件
  574. SendMsg("执行ELY文件");
  575. if (!iSEM.CmdFIBSTARTELY())
  576. {
  577. SendMsg("执行ELY文件失败");
  578. return false;
  579. }
  580. Thread.Sleep(1000);
  581. return true;
  582. }
  583. /// <summary>
  584. ///13. 自动 定位功能
  585. /// </summary>
  586. /// <returns></returns>
  587. public bool GetPoistion()
  588. {
  589. SendMsg("自动定位");
  590. //13.自动定位切割
  591. {
  592. SendMsg("放大600倍");
  593. //1.控制SEM放大600X
  594. if (!iSEM.SetMagnification(600))
  595. {
  596. return false;
  597. }
  598. //2.控制SEM自动对焦、亮度、对比度
  599. // if (!MeasParam.FocusMode)
  600. {
  601. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  602. {
  603. SendMsg("拍摄照片完成");
  604. //return true;
  605. }
  606. else
  607. {
  608. SendMsg("拍摄照片失败");
  609. return false;
  610. }
  611. //弹出手动对焦的窗口
  612. }
  613. //else
  614. //{
  615. // //调用自动对焦模块
  616. //}
  617. //3.设置SEM进行角度补偿54度
  618. SendMsg("设置校正54度");
  619. if (!TiltCorrection(54))
  620. {
  621. SendMsg("设置SEM进行角度补偿54度");
  622. return false;
  623. }
  624. Thread.Sleep(5000);
  625. //4.控制SEM拍照
  626. SendMsg("SEM拍照");
  627. //5.保存照片
  628. {
  629. //1. 创建目录,已经完成
  630. //2. 设置图片名称
  631. //3. 保存图片1
  632. WorkingFolder = m_measureFile.FilePath;
  633. String fileName1 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName1;
  634. SendMsg("SEM拍照存储到" + fileName1);
  635. if (!GetImage(ImageMode.SEM, fileName1))
  636. {
  637. SendMsg("SEM拍照失败");
  638. return false;
  639. }
  640. Thread.Sleep(3000);
  641. }
  642. //6.设置FIB拍照参数——扫描时间、束流等
  643. //7.控制FIB自动亮度、对比度
  644. SendMsg("切换FIB控制");
  645. if (!iSEM.CmdFIBModeFIB())
  646. {
  647. SendMsg("FIB模式切换失败");
  648. return false;
  649. }
  650. Thread.Sleep(10000);
  651. //8.控制FIB拍照
  652. //9.保存照片
  653. SendMsg("FIB拍照");
  654. {
  655. //1. 设置图片名称
  656. //2. 保存图片2
  657. String fileName2 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName2;
  658. if (!GetImage(ImageMode.FIB, fileName2))
  659. {
  660. SendMsg("FIB拍照失败");
  661. return false;
  662. }
  663. Thread.Sleep(3000);
  664. }
  665. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  666. SendMsg("调用识别位置");
  667. if (DialogResult.Yes == MessageBox.Show("移动已完成?", "确认消息", MessageBoxButtons.YesNo))
  668. {
  669. SendMsg("移动已完成");
  670. //return true;
  671. }
  672. else
  673. {
  674. SendMsg("移动已失败");
  675. return false;
  676. }
  677. SendMsg("进行PT沉积");
  678. //11.自动工具样品类型参数确定是否需要PT沉积
  679. {
  680. //1. 根据客户PT沉积坐标控制FIB调整到中心位置
  681. //2. 验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否一定正确
  682. //3. 根据坐标进行PT沉积
  683. if (!PTWork())
  684. {
  685. SendMsg("PT沉积失败");
  686. return false;
  687. }
  688. }
  689. return true;
  690. ////模拟为客户返回的坐标值
  691. //float x0 = 0, y0 = 0;
  692. //SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  693. ////12.根据梯形坐标控制FIB调整到中心位置
  694. //if (!iSEM.MoveStageXY(x0, y0))
  695. //{
  696. // SendMsg("移动到新(" + x0.ToString() + "," + y0.ToString() + ")位置失败");
  697. // return false;
  698. //}
  699. ////电镜移动是有一个延时的操作的?
  700. ////13.验证移动准确性:获取当前FIB中心位置坐标,与客户返回坐标对比,验证是否移动正确
  701. //float x1 = iSEM.GetStageAtX();
  702. //float y1 = iSEM.GetStageAtY();
  703. //if (Math.Abs(x0 - x1) > fMin && Math.Abs(y0 - y1) > fMin)
  704. //{
  705. // SendMsg("目标位置(" + x0.ToString() + "," + y0.ToString() + ")移动失败");
  706. // return false;
  707. //}
  708. ////14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  709. //float[] firstPosition = iSEM.GetStagePosition();
  710. ////这里要调用文件保存功能
  711. //SendMsg("坐标1(" + firstPosition[0].ToString() + ","
  712. // + firstPosition[1].ToString() + ","
  713. // + firstPosition[2].ToString() + ","
  714. // + firstPosition[3].ToString() + ","
  715. // + firstPosition[4].ToString() + ","
  716. // + firstPosition[5].ToString() + ")");
  717. }
  718. //return false;
  719. }
  720. /// <summary>
  721. /// 14. FIB切割
  722. /// </summary>
  723. /// <returns></returns>
  724. public bool FIBCross()
  725. {
  726. //14.自动控制FIB切割
  727. {
  728. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  729. //2.控制FIB进行切割
  730. SendMsg("FIB切割");
  731. if (!FIBWork())
  732. {
  733. SendMsg("FIB切割失败");
  734. return false;
  735. }
  736. Thread.Sleep(5000);
  737. //3.控制FIB拍照600X
  738. //4.保存图片
  739. {
  740. //1.设置图片名称
  741. //2.保存图片3
  742. WorkingFolder = m_measureFile.FilePath;
  743. String fileName3 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName3;
  744. SendMsg("SEM拍照存储到" + fileName3);
  745. if (!GetImage(ImageMode.FIB, fileName3))
  746. {
  747. SendMsg("FIB拍照失败");
  748. return false;
  749. }
  750. Thread.Sleep(3000);
  751. }
  752. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  753. //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  754. }
  755. return true;
  756. }
  757. /// <summary>
  758. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  759. /// </summary>
  760. /// <returns></returns>
  761. public bool FindCross()
  762. {
  763. //16.自动调整SEM找到切割位置
  764. {
  765. //1.控制SEM放大到300倍
  766. if (!iSEM.SetMagnification(300))
  767. {
  768. return false;
  769. }
  770. //2.控制SEM自动对焦、亮度、对比度-接口
  771. if (!MeasParam.FocusMode)
  772. {
  773. //弹出手动对焦的窗口
  774. }
  775. else
  776. {
  777. //调用自动对焦模块
  778. }
  779. Thread.Sleep(5000);
  780. //3.控制SEM拍照
  781. String fileName4 = WorkingFolder + ImageName4;
  782. if (!GetImage(ImageMode.SEM, fileName4))
  783. {
  784. return false;
  785. }
  786. Thread.Sleep(3000);
  787. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  788. float x4 = 0, y4 = 0;
  789. float angle = 0;
  790. //5.根据坐标控制SEM移动到切孔位置,居中
  791. if (!iSEM.MoveStageXY(x4, y4))
  792. {
  793. return false;
  794. }
  795. if (!iSEM.SetScanRotation(angle))
  796. {
  797. return false;
  798. }
  799. ////6.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  800. //float x5 = iSEM.GetStageAtX();
  801. //float y5 = iSEM.GetStageAtY();
  802. //if (Math.Abs(x5 - x4) > fMin && Math.Abs(y5 - y4) > fMin)
  803. //{
  804. // return false;
  805. //}
  806. }
  807. return true;
  808. }
  809. public bool CommonWork()
  810. {
  811. SendMsg("插入PT针");
  812. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  813. //if (firstHole.PT == true)
  814. {
  815. if (!InsertPT())
  816. {
  817. SendMsg("插入PT针失败");
  818. return false;
  819. }
  820. }
  821. //13. 自动 定位功能
  822. SendMsg("自动定位切割位置");
  823. if (!GetPoistion())
  824. {
  825. SendMsg("自动定位切割位置失败");
  826. return false;
  827. }
  828. //14.自动控制FIB切割
  829. SendMsg("FIB切割");
  830. if (!FIBCross())
  831. {
  832. SendMsg("FIB切割失败");
  833. return false;
  834. }
  835. //{
  836. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  837. // //2.控制FIB进行切割
  838. // //3.控制FIB拍照600X
  839. // //4.保存图片
  840. // {
  841. // //1.设置图片名称
  842. // //2.保存图片3
  843. // String fileName3 = WorkingFolder + ImageName3;
  844. // if (!GetImage(ImageMode.FIB, fileName3))
  845. // {
  846. // return false;
  847. // }
  848. // }
  849. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  850. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  851. //}
  852. //15.根据样品类型决定是否撤出PT针
  853. SendMsg("撤出PT针");
  854. //if (firstHole.PT == false)
  855. //{
  856. if (!RetractPT())
  857. {
  858. SendMsg("撤出PT针失败");
  859. return false;
  860. }
  861. //}
  862. // 16.找到切割位置
  863. SendMsg("找到切割位置");
  864. //17.自动控制SEM拍截面照
  865. SendMsg("观测层高");
  866. SendMsg("切换SEM控制");
  867. if (!iSEM.CmdFIBModeSEM())
  868. {
  869. SendMsg("SEM模式切换失败");
  870. return false;
  871. }
  872. Thread.Sleep(10000);
  873. SendMsg("放大6000倍");
  874. if (!iSEM.SetMagnification(6000))
  875. {
  876. SendMsg("放大倍数调整失败");
  877. return false;
  878. }
  879. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  880. {
  881. SendMsg("拍摄照片完成");
  882. //return true;
  883. }
  884. else
  885. {
  886. SendMsg("拍摄照片失败");
  887. return false;
  888. }
  889. SendMsg("图像校正36度");
  890. //3.设置SEM角度补偿cos36度
  891. if (!TiltCorrection(36))
  892. {
  893. return false;
  894. }
  895. Thread.Sleep(3000);
  896. string fn;
  897. //用宏抓一般图
  898. Thread.Sleep(5000);
  899. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  900. SendMsg("用宏抓一般图" + fn);
  901. iSEM.CMDMCFFilename(fn);
  902. //延时1s??
  903. Thread.Sleep(5000);
  904. //用宏抓好图
  905. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  906. SendMsg("用宏抓好图" + fn);
  907. iSEM.CMDMCFFilename(fn);
  908. //延时1s??
  909. Thread.Sleep(30000);
  910. Thread.Sleep(10000);
  911. WorkingFolder = m_measureFile.FilePath;
  912. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  913. SendMsg("SEM拍照存储到" + fileName6);
  914. if (!GetImage(ImageMode.SEM, fileName6))
  915. {
  916. SendMsg("SEM拍照失败");
  917. return false;
  918. }
  919. //用宏抓标志图
  920. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  921. SendMsg("用宏抓标志图" + fn);
  922. iSEM.CMDMCFFilename(fn);
  923. //延时1s??
  924. Thread.Sleep(30000);
  925. //恢复简单抓图
  926. Thread.Sleep(5000);
  927. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  928. SendMsg("用宏抓一般图" + fn);
  929. iSEM.CMDMCFFilename(fn);
  930. SendMsg("所有图结束");
  931. return true;
  932. }
  933. //第一个孔的测试过程
  934. public bool FirstHole()
  935. {
  936. MeasureData.CutHole firstHole = m_cutHoles[0];
  937. SendMsg("插入PT针");
  938. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  939. //if (firstHole.PT == true)
  940. {
  941. if (!InsertPT())
  942. {
  943. SendMsg("插入PT针失败");
  944. return false;
  945. }
  946. }
  947. //13. 自动 定位功能
  948. SendMsg("自动定位切割位置");
  949. if (!GetPoistion())
  950. {
  951. SendMsg("自动定位切割位置失败");
  952. return false;
  953. }
  954. //14.自动控制FIB切割
  955. SendMsg("FIB切割");
  956. if (!FIBCross())
  957. {
  958. SendMsg("FIB切割失败");
  959. return false;
  960. }
  961. //{
  962. // //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  963. // //2.控制FIB进行切割
  964. // //3.控制FIB拍照600X
  965. // //4.保存图片
  966. // {
  967. // //1.设置图片名称
  968. // //2.保存图片3
  969. // String fileName3 = WorkingFolder + ImageName3;
  970. // if (!GetImage(ImageMode.FIB, fileName3))
  971. // {
  972. // return false;
  973. // }
  974. // }
  975. // //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  976. // //6.设置FIB解冻:先读取状态,如果冻结状态则进行解冻
  977. //}
  978. //15.根据样品类型决定是否撤出PT针
  979. SendMsg("撤出PT针");
  980. //if (firstHole.PT == false)
  981. //{
  982. if (!RetractPT())
  983. {
  984. SendMsg("撤出PT针失败");
  985. return false;
  986. }
  987. //}
  988. // 16.找到切割位置
  989. SendMsg("找到切割位置");
  990. //17.自动控制SEM拍截面照
  991. SendMsg("观测层高");
  992. SendMsg("切换SEM控制");
  993. if (!iSEM.CmdFIBModeSEM())
  994. {
  995. SendMsg("SEM模式切换失败");
  996. return false;
  997. }
  998. Thread.Sleep(10000);
  999. SendMsg("放大6000倍");
  1000. if (!iSEM.SetMagnification(6000))
  1001. {
  1002. SendMsg("放大倍数调整失败");
  1003. return false;
  1004. }
  1005. if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  1006. {
  1007. SendMsg("拍摄照片完成");
  1008. //return true;
  1009. }
  1010. else
  1011. {
  1012. SendMsg("拍摄照片失败");
  1013. return false;
  1014. }
  1015. SendMsg("图像校正36度");
  1016. //3.设置SEM角度补偿cos36度
  1017. if (!TiltCorrection(36))
  1018. {
  1019. return false;
  1020. }
  1021. Thread.Sleep(3000);
  1022. string fn;
  1023. //用宏抓一般图
  1024. Thread.Sleep(5000);
  1025. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1026. SendMsg("用宏抓一般图" + fn);
  1027. iSEM.CMDMCFFilename(fn);
  1028. //延时1s??
  1029. Thread.Sleep(5000);
  1030. //用宏抓好图
  1031. fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  1032. SendMsg("用宏抓好图" + fn);
  1033. iSEM.CMDMCFFilename(fn);
  1034. //延时1s??
  1035. Thread.Sleep(30000);
  1036. Thread.Sleep(10000);
  1037. WorkingFolder = m_measureFile.FilePath;
  1038. String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  1039. SendMsg("SEM拍照存储到" + fileName6);
  1040. if (!GetImage(ImageMode.SEM, fileName6))
  1041. {
  1042. SendMsg("SEM拍照失败");
  1043. return false;
  1044. }
  1045. //用宏抓标志图
  1046. fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  1047. SendMsg("用宏抓标志图" + fn);
  1048. iSEM.CMDMCFFilename(fn);
  1049. //延时1s??
  1050. Thread.Sleep(30000);
  1051. Thread.Sleep(5000);
  1052. fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  1053. SendMsg("用宏抓一般图" + fn);
  1054. iSEM.CMDMCFFilename(fn);
  1055. //延时1s??
  1056. Thread.Sleep(5000);
  1057. SendMsg("所有图结束");
  1058. ////17.自动控制SEM拍截面照
  1059. //{
  1060. // //1.控制SEM放大到指定参数大小范围,6000x
  1061. // if (!iSEM.SetMagnification(6000))
  1062. // {
  1063. // return false;
  1064. // }
  1065. // //2.控制SEM自动对焦、消像散、亮度、对比度
  1066. // if (!MeasParam.FocusMode)
  1067. // {
  1068. // //弹出手动对焦的窗口
  1069. // }
  1070. // else
  1071. // {
  1072. // //调用自动对焦模块
  1073. // }
  1074. // //3.设置SEM角度补偿cos36度
  1075. // if (!TiltCorrection(36))
  1076. // {
  1077. // return false;
  1078. // }
  1079. // //4.控制SEM拍照
  1080. // //5.保存照片4
  1081. // String fileName5 = WorkingFolder + ImageName5;
  1082. // if (!GetImage(ImageMode.SEM, fileName5))
  1083. // {
  1084. // return false;
  1085. // }
  1086. // //6.将照片传给客户,获取偏移坐标
  1087. // float x6 = 0, y6 = 0;
  1088. // float angle1 = 0;
  1089. // float mage = 10000;
  1090. // //7.根据坐标控制SEM移动到分析位置
  1091. // if (!iSEM.MoveStageXY(x6, y6))
  1092. // {
  1093. // return false;
  1094. // }
  1095. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  1096. // float x7 = iSEM.GetStageAtX();
  1097. // float y7 = iSEM.GetStageAtY();
  1098. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  1099. // {
  1100. // return false;
  1101. // }
  1102. // //9.控制SEM平行校正,并记录校正前初始值
  1103. // float foldAnagle = iSEM.GetScanRotation();
  1104. // if (foldAnagle == float.NaN)
  1105. // {
  1106. // return false;
  1107. // }
  1108. // if (!iSEM.SetScanRotation(angle1))
  1109. // {
  1110. // return false;
  1111. // }
  1112. // //10.控制SEM放大到指定参数大小范围
  1113. // if (!iSEM.SetMagnification(mage))
  1114. // {
  1115. // return false;
  1116. // }
  1117. // //11.控制SEM自动对焦、消像散、亮度、对比度
  1118. // if (!MeasParam.FocusMode)
  1119. // {
  1120. // //弹出手动对焦的窗口
  1121. // }
  1122. // else
  1123. // {
  1124. // //调用自动对焦模块
  1125. // }
  1126. // //12.控制SEM对分析位置拍照
  1127. // String fileName6 = WorkingFolder + ImageName6;
  1128. // if (!GetImage(ImageMode.SEM, fileName6))
  1129. // {
  1130. // return false;
  1131. // }
  1132. // //13.保存照片
  1133. // //14.控制SEM取消电子束校正,回到初始值
  1134. // if (!iSEM.SetScanRotation(foldAnagle))
  1135. // {
  1136. // return false;
  1137. // }
  1138. //}
  1139. ////18.自动层高分析
  1140. //{
  1141. // //1.获取SEM Pixel Size给客户传入参数
  1142. // if (iSEM.GetPixelSize() == float.NaN)
  1143. // {
  1144. // return false;
  1145. // }
  1146. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  1147. //}
  1148. ////19.自动能谱分析
  1149. //{
  1150. // //1. 确定能谱位置
  1151. // //2. 控制牛津打能谱
  1152. // //3. 能谱分析——面扫+线扫描
  1153. //}
  1154. return true;
  1155. }
  1156. //非第一个孔的测试过程
  1157. public void OtherHole()
  1158. {
  1159. //for (int i = 1; i < m_cutHoles.Count; i++)
  1160. //{
  1161. SendMsg("当前切孔号为"+ m_nWorkHoleNo.ToString());
  1162. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  1163. //1. 初始化
  1164. {
  1165. //1. 设置FIB解冻:先读取状态,如果冻结则进行解冻
  1166. //读取图像冻结状态
  1167. float ffrozen = iSEM.GetImageFrozen();
  1168. if (ffrozen == float.NaN)
  1169. {
  1170. return;
  1171. }
  1172. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转恢复到水平吗?", "确认消息", MessageBoxButtons.YesNo))
  1173. {
  1174. SendMsg("样品台恢复到水平");
  1175. //return true;
  1176. }
  1177. else
  1178. {
  1179. SendMsg("禁止样品台恢复到水平");
  1180. return;
  1181. }
  1182. //2. 调节样品1号孔的样品台6轴坐标
  1183. //3. 将样品1号孔坐标2存入数据库
  1184. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  1185. if (!iSEM.SetStageGotoT(0))
  1186. {
  1187. return;
  1188. }
  1189. while (true)
  1190. {
  1191. Thread.Sleep(10000);
  1192. if (iSEM.GetStageIs() == 0)
  1193. {
  1194. break;
  1195. }
  1196. }
  1197. //5. 获取光镜2号孔XY坐标
  1198. SendMsg("移动到"+m_nWorkHoleNo+"号孔位置:(" + currentHole.Position.X.ToString()+","+currentHole.Position.Y.ToString()+")");
  1199. //6. 根据光镜坐标控制样品台移动
  1200. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  1201. {
  1202. SendMsg("移动失败");
  1203. }
  1204. while (true)
  1205. {
  1206. Thread.Sleep(10000);
  1207. if (iSEM.GetStageIs() == 0)
  1208. {
  1209. break;
  1210. }
  1211. }
  1212. //7. 控制样品台,调整T轴54度、M/Z/R轴不变
  1213. if (DialogResult.Yes == MessageBox.Show("样品台可以旋转吗?", "确认消息", MessageBoxButtons.YesNo))
  1214. {
  1215. SendMsg("样品台旋转");
  1216. //return true;
  1217. }
  1218. else
  1219. {
  1220. SendMsg("禁止样品台旋转");
  1221. return;
  1222. }
  1223. if (!iSEM.SetStageGotoT(54))
  1224. {
  1225. return;
  1226. }
  1227. while (true)
  1228. {
  1229. Thread.Sleep(10000);
  1230. if (iSEM.GetStageIs() == 0)
  1231. {
  1232. break;
  1233. }
  1234. }
  1235. }
  1236. SendMsg("拉直操作");
  1237. SendMsg("其他操作与1号孔操作一致");
  1238. if (!CommonWork())
  1239. {
  1240. return;
  1241. }
  1242. //2. 定位切割
  1243. {
  1244. //1. 拉直操作
  1245. {
  1246. //1.1 控制SEM进行拍照
  1247. //1.2 图片传给客户,返回偏移角度
  1248. //1.3 根据返回角度,控制样品台转动
  1249. }
  1250. //2. 与1号孔13步相同
  1251. }
  1252. //3. 以后步骤与1号孔以后步骤一致
  1253. //}
  1254. }
  1255. //角度补偿
  1256. public bool TiltCorrection(float a_fAngle)
  1257. {
  1258. //记录原来电镜的状态
  1259. // bool bTilt = false;
  1260. //float fOldTilt = iSEM.GetTiltCorrection();
  1261. //if (fOldTilt == float.NaN)
  1262. //{
  1263. // return false;
  1264. //}
  1265. //else if (fOldTilt == 1)
  1266. //{
  1267. // bTilt = true;
  1268. //}
  1269. //else if (fOldTilt == 0)
  1270. //{
  1271. // bTilt = false;
  1272. //}
  1273. //float fOldAngle = iSEM.GetTiltAngle();
  1274. //if (fOldAngle == float.NaN)
  1275. //{
  1276. // return false;
  1277. //}
  1278. //开启校正
  1279. SendMsg("开启校正");
  1280. if (!iSEM.SetTiltAngleOn())
  1281. {
  1282. return false;
  1283. }
  1284. //设置校正角度
  1285. //if (!iSEM.SetTiltAngle(fOldAngle))
  1286. //{
  1287. // return false;
  1288. //}
  1289. //恢复原始状态
  1290. SendMsg("校正角度"+ a_fAngle.ToString());
  1291. if (!iSEM.SetTiltAngle(a_fAngle))
  1292. {
  1293. return false;
  1294. }
  1295. //if (bTilt)
  1296. //{
  1297. // if (!iSEM.SetTiltCorrectionOn())
  1298. // {
  1299. // return false;
  1300. // }
  1301. //}
  1302. //else
  1303. //{
  1304. // if (!iSEM.SetTiltCorrectionOff())
  1305. // {
  1306. // return false;
  1307. // }
  1308. //}
  1309. return true;
  1310. }
  1311. //拍图
  1312. public bool GetImage(ImageMode a_mode, String a_fileName)
  1313. {
  1314. //1. 图像解冻
  1315. float foldFrozen = iSEM.GetImageFrozen();
  1316. if (foldFrozen == float.NaN)
  1317. {
  1318. return false;
  1319. }
  1320. if (!iSEM.ImageLive())
  1321. {
  1322. return false;
  1323. }
  1324. //2. 确认图像模式
  1325. if (ImageMode.SEM == a_mode)
  1326. {
  1327. if (!iSEM.CmdFIBModeSEM())
  1328. {
  1329. return false;
  1330. }
  1331. }
  1332. else if (ImageMode.FIB == a_mode)
  1333. {
  1334. if (!iSEM.CmdFIBModeFIB())
  1335. {
  1336. return false;
  1337. }
  1338. }
  1339. else
  1340. {
  1341. return false;
  1342. }
  1343. //3. 获取分辨率
  1344. int[] ImageSize = iSEM.GetImageStore();
  1345. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  1346. {
  1347. return false;
  1348. }
  1349. short width = (short)ImageSize[0];
  1350. short height = (short)ImageSize[1];
  1351. //4. 抓图
  1352. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  1353. {
  1354. return false;
  1355. }
  1356. //5. 恢复初始状态
  1357. if (foldFrozen == 0)
  1358. {
  1359. if (!iSEM.ImageLive())
  1360. {
  1361. return false;
  1362. }
  1363. }
  1364. else if (foldFrozen == 1)
  1365. {
  1366. if (!iSEM.ImageFrozen())
  1367. {
  1368. return false;
  1369. }
  1370. }
  1371. return true;
  1372. }
  1373. //自动对焦
  1374. public bool AutoFocus(string a_strPath, out int a_wd)
  1375. {
  1376. a_wd = 10;
  1377. //1. 拍照
  1378. //2. 计算评价函数
  1379. //3. 获取焦距
  1380. return true;
  1381. }
  1382. }
  1383. }