Measure.cs 174 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. namespace MeasureThread
  23. {
  24. #region 信息定义
  25. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  26. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  27. //测量线程状态
  28. public class ThreadStatusEventArgs
  29. {
  30. //状态
  31. public Boolean State
  32. {
  33. get { return m_state; }
  34. set { m_state = value; }
  35. }
  36. private Boolean m_state;
  37. //时间
  38. public DateTime Time
  39. {
  40. get { return m_time; }
  41. set { m_time = value; }
  42. }
  43. private DateTime m_time;
  44. //步骤代码
  45. public String Step_Code
  46. {
  47. get { return step_Code; }
  48. set { step_Code = value; }
  49. }
  50. private String step_Code;
  51. //其他消息
  52. public String Message
  53. {
  54. get { return this.message; }
  55. set { this.message = value; }
  56. }
  57. private String message;
  58. //孔名
  59. public String HoleName
  60. {
  61. get { return this.holeName; }
  62. set { this.holeName = value; }
  63. }
  64. private String holeName;
  65. //图片信息
  66. public class PictureInformation
  67. {
  68. public String Picture_FullPath
  69. {
  70. get { return picture_FullPath; }
  71. set { picture_FullPath = value; }
  72. }
  73. private String picture_FullPath;
  74. public double Work_Voltage
  75. {
  76. get { return work_Voltage; }
  77. set { work_Voltage = value; }
  78. }
  79. private double work_Voltage;
  80. public double Magnification
  81. {
  82. get { return magnification; }
  83. set { magnification = value; }
  84. }
  85. private double magnification;
  86. public double Work_Distance
  87. {
  88. get { return work_Distance; }
  89. set { work_Distance = value; }
  90. }
  91. private double work_Distance;
  92. public String Work_Status
  93. {
  94. get { return work_Status; }
  95. set { work_Status = value; }
  96. }
  97. private String work_Status;
  98. }
  99. //图片信息实例类
  100. public PictureInformation Picture_Information
  101. {
  102. get { return picture_Information; }
  103. set { picture_Information = value; }
  104. }
  105. private PictureInformation picture_Information;
  106. //图像处理信息
  107. public class ImageInformation
  108. {
  109. public int Method_Name
  110. {
  111. get { return method_Name; }
  112. set { method_Name = value; }
  113. }
  114. private int method_Name;
  115. public Source_Img_Degree_Direction SIDD;
  116. public Cut_Position CP;
  117. public Cut_Success CS;
  118. public Trapezoid_Top_Center_Position TTCP;
  119. public Auto_Foucs AF;
  120. public Auto_Stigmatic AS;
  121. public Center_Position_OffsetAngle_Direction CPOD;
  122. public Measure_Size MS;
  123. public ImageInformation()
  124. {
  125. SIDD = new Source_Img_Degree_Direction();
  126. CP = new Cut_Position();
  127. CS = new Cut_Success();
  128. TTCP = new Trapezoid_Top_Center_Position();
  129. AF = new Auto_Foucs();
  130. AS = new Auto_Stigmatic();
  131. CPOD = new Center_Position_OffsetAngle_Direction();
  132. MS = new Measure_Size();
  133. }
  134. //1-计算原始图像偏移角度及方向
  135. public class Source_Img_Degree_Direction
  136. {
  137. public Boolean Is_Image = false;
  138. public double Degree
  139. {
  140. get { return degree; }
  141. set { degree = value; }
  142. }
  143. private double degree;
  144. public int Direction
  145. {
  146. get { return direction; }
  147. set { direction = value; }
  148. }
  149. private int direction;
  150. public int State
  151. {
  152. get { return state; }
  153. set { state = value; }
  154. }
  155. private int state;
  156. }
  157. //2-计算切割点位置
  158. public class Cut_Position
  159. {
  160. public Boolean Is_Image = false;
  161. public double Offsetx
  162. {
  163. get { return offsetx; }
  164. set { offsetx = value; }
  165. }
  166. private double offsetx;
  167. public double Offsety
  168. {
  169. get { return offsety; }
  170. set { offsety = value; }
  171. }
  172. private double offsety;
  173. public int State
  174. {
  175. get { return state; }
  176. set { state = value; }
  177. }
  178. private int state;
  179. }
  180. //3-是否切割成功
  181. public class Cut_Success
  182. {
  183. public Boolean Is_Image = false;
  184. public int State
  185. {
  186. get { return state; }
  187. set { state = value; }
  188. }
  189. private int state;
  190. }
  191. //4-计算切割后图像梯形区域上边中心点坐标
  192. public class Trapezoid_Top_Center_Position
  193. {
  194. public Boolean Is_Image = false;
  195. public double TopCenterX
  196. {
  197. get { return topCenterX; }
  198. set { topCenterX = value; }
  199. }
  200. private double topCenterX;
  201. public double TopCenterY
  202. {
  203. get { return topCenterY; }
  204. set { topCenterY = value; }
  205. }
  206. private double topCenterY;
  207. public int State
  208. {
  209. get { return state; }
  210. set { state = value; }
  211. }
  212. private int state;
  213. }
  214. //5-自动对焦
  215. public class Auto_Foucs
  216. {
  217. public Boolean Is_Image = true;
  218. public String Img_Path
  219. {
  220. get { return img_Path; }
  221. set { img_Path = value; }
  222. }
  223. private String img_Path;
  224. }
  225. //6-自动像闪
  226. public class Auto_Stigmatic
  227. {
  228. public Boolean Is_Image = true;
  229. public String Img_Path
  230. {
  231. get { return img_Path; }
  232. set { img_Path = value; }
  233. }
  234. private String img_Path;
  235. }
  236. //7-计算切割面区域中心坐标,以及偏移角度及方向
  237. public class Center_Position_OffsetAngle_Direction
  238. {
  239. public Boolean Is_Image = false;
  240. public double CenterX
  241. {
  242. get { return centerX; }
  243. set { centerX = value; }
  244. }
  245. private double centerX;
  246. public double CenterY
  247. {
  248. get { return centerY; }
  249. set { centerY = value; }
  250. }
  251. private double centerY;
  252. public double Degree
  253. {
  254. get { return degree; }
  255. set { degree = value; }
  256. }
  257. private double degree;
  258. public int Direction
  259. {
  260. get { return direction; }
  261. set { direction = value; }
  262. }
  263. private int direction;
  264. public int State
  265. {
  266. get { return state; }
  267. set { state = value; }
  268. }
  269. private int state;
  270. }
  271. //8-测量尺寸
  272. public class Measure_Size
  273. {
  274. public Boolean Is_Image = false;
  275. public int State
  276. {
  277. get { return state; }
  278. set { state = value; }
  279. }
  280. private int state;
  281. }
  282. }
  283. //图像处理信息实例类
  284. public ImageInformation Image_Information
  285. {
  286. get { return image_Information; }
  287. set { image_Information = value; }
  288. }
  289. private ImageInformation image_Information;
  290. public ThreadStatusEventArgs(string a_State)
  291. {
  292. picture_Information = new PictureInformation();
  293. image_Information = new ImageInformation();
  294. }
  295. }
  296. //切孔状态
  297. public class CutHolesStatusEventArgs
  298. {
  299. public string State
  300. {
  301. get { return m_state; }
  302. set { m_state = value; }
  303. }
  304. private string m_state;
  305. public string HoleName
  306. {
  307. get { return m_holeName; }
  308. set { m_holeName = value; }
  309. }
  310. private string m_holeName;
  311. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  312. {
  313. this.m_state = a_state;
  314. this.m_holeName = a_holeName;
  315. }
  316. }
  317. #endregion
  318. public class Measure
  319. {
  320. NLog.Logger log;
  321. #region 变量定义
  322. //Web接口类
  323. public ImageProcess ImagePro = null;
  324. //SmartSEM远程路径
  325. public String RemoteELYPath = "";
  326. public String RemoteMLFPath = "";
  327. //扫描周期
  328. private float cycle_time = 0;
  329. //人工干预
  330. public int hand_intervene = 2;
  331. //样品台保护值
  332. public float X_Min = 0;
  333. public float X_Max = 0.13f;
  334. public float Y_Min = 0;
  335. public float Y_Max = 0.13f;
  336. public float Z_Min = 0;
  337. public float Z_Max = 0.05f;
  338. public float T_Min = -4;
  339. public float T_Max = 70;
  340. public float R_Min = -380;
  341. public float R_Max = 380;
  342. public float M_Min = 0;
  343. public float M_Max = 0.012f;
  344. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  345. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  346. //定义一个全局的消息类
  347. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  348. //全局只有一个fatorySEM
  349. static FactoryHardware factorySEM = FactoryHardware.Instance;
  350. ISEMControl iSEM = factorySEM.ISEM;
  351. //@的作用是不用转义字符\\只打一个就行
  352. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  354. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  355. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  356. const String ImageName31 = @"FIBBefore.tif";
  357. const String ImageName32 = @"FIBAfter.tif";
  358. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  359. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  360. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  361. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  362. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  364. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  365. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  366. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  367. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  368. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  369. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  370. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  371. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  372. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  373. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  374. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  375. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  376. const String ElyDeposition = @"Deposition.ely"; //沉积
  377. const String ElyCrossSection = @"CrossSection.ely"; //切割
  378. const float fMin = (float)0.0000002; //单位是米
  379. const float fSateyZ = (float)0.007;//单位是米
  380. public Boolean key_stop = false;
  381. String focus_path = "";
  382. String FIBfocus_path = "";
  383. String StigX_path = "";
  384. String StigY_path = "";
  385. String EDS_path = "";
  386. String data_path = "";
  387. int m_nWorkHoleNo = -1;
  388. //测量文件
  389. private MeasureFile m_measureFile;
  390. public MeasureFile MeasureFile
  391. {
  392. get { return this.m_measureFile; }
  393. set { this.m_measureFile = value; }
  394. }
  395. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  396. private List<MeasureData.CutHole> m_cutHoles;
  397. public List<MeasureData.CutHole> cutHoles
  398. {
  399. get { return this.m_cutHoles; }
  400. set { this.m_cutHoles = value; }
  401. }
  402. public MeasureParam MParam//测量参数对象
  403. {
  404. get { return this.m_measureFile.MParam; }
  405. //set { this.m_measureParam = value; }
  406. }
  407. //工作文件夹
  408. private string m_WorkingFolder;
  409. public string WorkingFolder
  410. {
  411. get { return this.m_WorkingFolder; }
  412. set { this.m_WorkingFolder = value; }
  413. }
  414. //程序当前路径
  415. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  416. //线程状态
  417. private ThreadStatus m_ThreadStatus;
  418. public ThreadStatus TStatus
  419. {
  420. get { return this.m_ThreadStatus; }
  421. set { this.m_ThreadStatus = value; }
  422. }
  423. #endregion
  424. //构造函数
  425. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  426. {
  427. log = NLog.LogManager.GetCurrentClassLogger();
  428. TStatus = new ThreadStatus();
  429. cutHoles = new List<MeasureData.CutHole>();
  430. //配置远程连接
  431. ImagePro = new ImageProcess(webServerIP, webServerPort, webServerUrl);
  432. }
  433. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  434. public bool InitMeas(MeasureFile a_measureFile)
  435. {
  436. log.Info("进入初始化函数");
  437. m_measureFile = a_measureFile;
  438. List<CutHole> listHoles = m_measureFile.ListCutHole;
  439. foreach (CutHole h in listHoles)
  440. {
  441. if (h.SWITCH == true)
  442. {
  443. m_cutHoles.Add(h);
  444. }
  445. }
  446. if (m_cutHoles.Count == 0)
  447. return false;
  448. if (MParam.EDS == true)
  449. {
  450. log.Info("进行能谱分析,初始化Xray数据库", true);
  451. Init_MeasDB();
  452. }
  453. return true;
  454. }
  455. //给前台UI发送消息步骤
  456. public void SendMsg(string step_code)
  457. {
  458. arg.Step_Code = step_code;
  459. arg.Time = DateTime.Now;
  460. SendThreadStatus(this, arg);
  461. }
  462. //给前台UI发送孔状态信息
  463. public void SendCutHoleMsg(string a_state, string a_holeName)
  464. {
  465. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  466. arg.HoleName = a_holeName;
  467. arg.State = a_state;
  468. SendCutHolesStatus(this, arg);
  469. }
  470. //测量流程
  471. public void DoMeasure()
  472. {
  473. //创建线程的测量状态的更新
  474. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  475. //检查硬件连接是否正常
  476. log.Warn("测量线程:开始连接硬件...", true);
  477. if (!ConnectHardware())
  478. {
  479. MessageBox.Show("连接电镜失败!", "重要错误", MessageBoxButtons.OK, MessageBoxIcon.Error);
  480. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  481. log.Error("测量线程报错:连接硬件硬件连接失败", false);
  482. return;
  483. }
  484. //设置工作文件夹
  485. SetWorkingFolderStr();
  486. //设置SmartSEM远程路径
  487. iSEM.SetRemoteELYPath(RemoteELYPath);
  488. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  489. //增加EDS控制
  490. //将停止键复位
  491. key_stop = false;
  492. //开始测量就将模式设置为SEM
  493. log.Info("测量线程:开始切换到SEM模式", true);
  494. if (!iSEM.CmdFIBModeSEM())
  495. {
  496. log.Error("测量线程报错:开始切换到SEM模式失败。", false);
  497. return;
  498. }
  499. arg.Picture_Information.Work_Status = "SEM";
  500. //设置扫描周期
  501. log.Info("测量线程:设置电镜图像扫描周期为对焦接口程序适合的扫描周期", true);
  502. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  503. Thread.Sleep(200);
  504. cycle_time = iSEM.GetCycleTime();
  505. if (cycle_time == 0)
  506. {
  507. log.Error("测量线程报错:获取扫描周期时间失败", false);
  508. return;
  509. }
  510. Thread.Sleep((int)cycle_time + 100);
  511. //开始做各个孔的检测
  512. for (int i = 0; i < m_cutHoles.Count; i++)
  513. {
  514. //自动亮度对比度
  515. log.Info("测量线程:开启自动亮度,对比度调节", true);
  516. iSEM.SetAutoBright(100);
  517. Thread.Sleep(200);
  518. iSEM.SetAutoContrast(100);
  519. Thread.Sleep(200);
  520. //log.Info("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  521. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  522. {
  523. log.Error("测量线程报错:开始设置自动亮度、对比度失败。", false);
  524. return;
  525. }
  526. Thread.Sleep(5000);
  527. log.Warn("测量线程:测试第" + i.ToString() + "个分析点。", true);
  528. //记录测量序号和孔名
  529. m_nWorkHoleNo = i;
  530. arg.HoleName = m_cutHoles[i].HoleName;
  531. //最终数据存放目录
  532. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  533. //对焦数据存放目录
  534. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  535. MParam.AutoFocus.Path = focus_path;
  536. if (!Directory.Exists(focus_path))
  537. {
  538. Directory.CreateDirectory(focus_path);
  539. }
  540. //StigX数据存放目录
  541. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  542. MParam.AutoStigX.Path = StigX_path;
  543. if (!Directory.Exists(StigX_path))
  544. {
  545. Directory.CreateDirectory(StigX_path);
  546. }
  547. //StigY数据存放目录
  548. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  549. MParam.AutoStigY.Path = StigY_path;
  550. if (!Directory.Exists(StigY_path))
  551. {
  552. Directory.CreateDirectory(StigY_path);
  553. }
  554. //EDS数据存放路径
  555. if (MParam.EDS == true)
  556. {
  557. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  558. MParam.EDSParam.Path = EDS_path;
  559. if (!Directory.Exists(EDS_path))
  560. {
  561. Directory.CreateDirectory(EDS_path);
  562. }
  563. }
  564. //判断孔状态
  565. if (m_cutHoles[i].STATE != State.Ready)
  566. {
  567. log.Warn("测试孔" + m_cutHoles[i].HoleName + "状态非就绪,不予测量。", true);
  568. continue;
  569. }
  570. //20201127增加Scanrotate Off
  571. iSEM.SetScanRotationOff();
  572. Thread.Sleep(200);
  573. //20.光束等复位
  574. iSEM.SetBeamShiftX(0);
  575. Thread.Sleep(200);
  576. iSEM.SetBeamShiftY(0);
  577. Thread.Sleep(200);
  578. //开始循环工作
  579. if (i == 0)
  580. {
  581. log.Warn("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  582. m_cutHoles[i].START = DateTime.Now;
  583. //切孔操作-开始
  584. m_cutHoles[i].STATE = State.InProcess;
  585. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  586. log.Warn("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  587. + m_cutHoles[0].Position.X.ToString() + ","
  588. + m_cutHoles[0].Position.Y.ToString() + ","
  589. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  590. #region 坐标恢复
  591. //0、先移动Z轴到比较低的位置上。
  592. if (MParam.Tilt)//如果是倾斜样品台,移动Z轴
  593. {
  594. Locate lo = new Locate(iSEM);
  595. if (!lo.MoveZAxis(fSateyZ, Locate.ZAxisDirection.down))
  596. {
  597. arg.State = false;
  598. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  599. SendMsg("0-0");
  600. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  601. m_cutHoles[i].STATE = State.Failed;
  602. m_cutHoles[i].END = DateTime.Now;
  603. m_measureFile.Save();
  604. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  605. Thread.Sleep(3000);
  606. continue;
  607. }
  608. while (true)
  609. {
  610. Thread.Sleep(4000);
  611. if (iSEM.GetStageIs() == 0)
  612. {
  613. break;
  614. }
  615. }
  616. //判断是否停止进程
  617. if (key_stop)
  618. {
  619. m_cutHoles[i].STATE = State.Failed;
  620. m_cutHoles[i].END = DateTime.Now;
  621. m_measureFile.Save();
  622. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  623. log.Info("停止键被按下", true);
  624. return;
  625. }
  626. }
  627. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  628. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  629. {
  630. arg.State = false;
  631. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  632. SendMsg("0-0");
  633. log.Error("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  634. m_cutHoles[i].STATE = State.Failed;
  635. m_cutHoles[i].END = DateTime.Now;
  636. m_measureFile.Save();
  637. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  638. Thread.Sleep(3000);
  639. continue;
  640. }
  641. while (true)
  642. {
  643. Thread.Sleep(4000);
  644. if (iSEM.GetStageIs() == 0)
  645. {
  646. break;
  647. }
  648. }
  649. //判断是否停止进程
  650. if (key_stop)
  651. {
  652. m_cutHoles[i].STATE = State.Failed;
  653. m_cutHoles[i].END = DateTime.Now;
  654. m_measureFile.Save();
  655. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  656. log.Info("停止键被按下", true);
  657. return;
  658. }
  659. //2、移动XY轴
  660. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  661. {
  662. arg.State = false;
  663. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  664. SendMsg("0-0");
  665. log.Error("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  666. + m_cutHoles[0].Position.X.ToString() + ","
  667. + m_cutHoles[0].Position.Y.ToString() + ")", false);
  668. m_cutHoles[i].STATE = State.Failed;
  669. m_cutHoles[i].END = DateTime.Now;
  670. m_measureFile.Save();
  671. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  672. Thread.Sleep(3000);
  673. continue;
  674. }
  675. while (true)
  676. {
  677. Thread.Sleep(4000);
  678. if (iSEM.GetStageIs() == 0)
  679. {
  680. break;
  681. }
  682. }
  683. //判断是否停止进程
  684. if (key_stop)
  685. {
  686. m_cutHoles[i].STATE = State.Failed;
  687. m_cutHoles[i].END = DateTime.Now;
  688. m_measureFile.Save();
  689. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  690. log.Info("停止键被按下", true);
  691. return;
  692. }
  693. //3、恢复Z轴
  694. if (MParam.Tilt)
  695. {
  696. //恢复Z轴
  697. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  698. {
  699. arg.State = false;
  700. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  701. SendMsg("0-0");
  702. log.Error("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  703. m_cutHoles[i].STATE = State.Failed;
  704. m_cutHoles[i].END = DateTime.Now;
  705. m_measureFile.Save();
  706. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  707. Thread.Sleep(3000);
  708. continue;
  709. }
  710. while (true)
  711. {
  712. Thread.Sleep(4000);
  713. if (iSEM.GetStageIs() == 0)
  714. {
  715. break;
  716. }
  717. }
  718. //判断是否停止进程
  719. if (key_stop)
  720. {
  721. log.Info("停止键按下。", true);
  722. m_cutHoles[i].STATE = State.Failed;
  723. m_cutHoles[i].END = DateTime.Now;
  724. m_measureFile.Save();
  725. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  726. return;
  727. }
  728. }
  729. arg.State = true;
  730. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  731. SendMsg("0-0");
  732. //4、设置WD
  733. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  734. Thread.Sleep(1000);
  735. #endregion
  736. //第一个点开始测量
  737. if (FirstHole())
  738. {
  739. //保存文件,将测量状态更改
  740. m_cutHoles[i].STATE = State.Success;
  741. m_cutHoles[i].END = DateTime.Now;
  742. m_measureFile.Save();
  743. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  744. }
  745. //失败
  746. else
  747. {
  748. m_cutHoles[i].STATE = State.Failed;
  749. m_cutHoles[i].END = DateTime.Now;
  750. m_measureFile.Save();
  751. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  752. }
  753. }
  754. else
  755. {
  756. //其他孔的测量
  757. log.Info("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  758. m_cutHoles[i].START = DateTime.Now;
  759. m_cutHoles[i].STATE = State.InProcess;
  760. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  761. //其他孔测量之前的初始化
  762. if (!OtherHole_Init())
  763. {
  764. arg.State = false;
  765. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  766. SendMsg("0-0");
  767. Thread.Sleep(3000);
  768. log.Info("测量线程:" + arg.Message, true);
  769. continue;
  770. }
  771. arg.State = true;
  772. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  773. SendMsg("0-0");
  774. //其他孔开始测量
  775. if (OtherHole())
  776. {
  777. //保存文件,将测量状态更改
  778. m_cutHoles[i].STATE = State.Success;
  779. m_cutHoles[i].END = DateTime.Now;
  780. m_measureFile.Save();
  781. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  782. }
  783. //失败
  784. else
  785. {
  786. m_cutHoles[i].STATE = State.Failed;
  787. m_cutHoles[i].END = DateTime.Now;
  788. m_measureFile.Save();
  789. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  790. }
  791. }
  792. if (key_stop)
  793. {
  794. m_cutHoles[i].END = DateTime.Now;
  795. m_cutHoles[i].STATE = State.Ready;
  796. m_measureFile.Save();
  797. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  798. arg.Message = "用户停止测量";
  799. SendMsg("0-0");
  800. break;
  801. }
  802. //两个点之间更换,加延时以便完成显示
  803. Thread.Sleep(3000);
  804. }
  805. }
  806. //检查硬件连接是否正常
  807. public bool ConnectHardware()
  808. {
  809. //返回硬件的连接状态
  810. return iSEM.ConnectStatus();
  811. }
  812. //设置工作文件夹
  813. public bool SetWorkingFolderStr()
  814. {
  815. WorkingFolder = m_measureFile.FilePath;
  816. return true;
  817. }
  818. //插入PT针
  819. public bool InsertPT()
  820. {
  821. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  822. //SendMsg("调用宏插入PT针宏文件" + fn);
  823. iSEM.CMDMCFFilename(fn);
  824. //延时1s??
  825. Thread.Sleep(1000);
  826. return true;
  827. }
  828. //撤出PT针
  829. public bool RetractPT()
  830. {
  831. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  832. //SendMsg("调用宏撤出PT针宏文件" + fn);
  833. iSEM.CMDMCFFilename(fn);
  834. //延时1s??
  835. Thread.Sleep(1000);
  836. return true;
  837. }
  838. //PT沉积
  839. public bool PTWork()
  840. {
  841. //执行PT沉积的ELY文件
  842. if (!ExcuteEly(MParam.PTTemp))
  843. {
  844. return false;
  845. }
  846. //等待沉积完成
  847. while (true)
  848. {
  849. Thread.Sleep(7000);
  850. if (iSEM.GetFIBMode() == 0)
  851. {
  852. break;
  853. }
  854. }
  855. return true;
  856. }
  857. //FIB切割
  858. public bool FIBWork()
  859. {
  860. //执行PT沉积的ELY文件
  861. if (!ExcuteEly(MParam.FIBTemp))
  862. {
  863. return false;
  864. }
  865. //等待切割完成
  866. while (true)
  867. {
  868. Thread.Sleep(10000);
  869. if (iSEM.GetFIBMode() == 0)
  870. {
  871. break;
  872. }
  873. }
  874. return true;
  875. }
  876. //执行ELY文件的步骤
  877. public bool ExcuteEly(string a_filename)
  878. {
  879. //执行ELy文件有三个动作
  880. //1. 选择ELY文件
  881. //SendMsg("选择ELY文件");
  882. if (!iSEM.CmdFIBLoadELY(a_filename))
  883. {
  884. //SendMsg("选择ELY文件失败");
  885. return false;
  886. }
  887. Thread.Sleep(1000);
  888. //2. 确认ELY文件
  889. //SendMsg("确认ELY文件");
  890. if (!iSEM.CmdFIBEXPOSUREELY())
  891. {
  892. //SendMsg("确认ELY文件失败");
  893. return false;
  894. }
  895. Thread.Sleep(1000);
  896. //3. 执行ELY文件
  897. //SendMsg("执行ELY文件");
  898. if (!iSEM.CmdFIBSTARTELY())
  899. {
  900. //SendMsg("执行ELY文件失败");
  901. return false;
  902. }
  903. Thread.Sleep(1000);
  904. return true;
  905. }
  906. /// <summary>
  907. ///13. 自动 定位功能,沉积
  908. /// </summary>
  909. /// <returns></returns>
  910. public bool GetPoistion()
  911. {
  912. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  913. int state = 1;
  914. log.Info("测量线程:13.自动定位、沉积-功能自动定位电压" + MParam.Location_Voltage.ToString() + "自动定位放大倍数" + MParam.Location_Magnification.ToString(), true);
  915. Thread.Sleep(200);
  916. //1.控制SEM放大600X
  917. if (!iSEM.SetSEMVoltage(MParam.Location_Voltage))
  918. {
  919. arg.Message = "电压设置" + MParam.Location_Voltage.ToString("0.0") + "失败";
  920. arg.State = false;
  921. SendMsg("2-0");
  922. log.Error("测量线程报错:13.自动定位、沉积-自动定位电压" + MParam.Location_Voltage.ToString() + "控制失败", false);
  923. return false;
  924. }
  925. Thread.Sleep(200);
  926. if (!iSEM.SetMagnification(MParam.Location_Magnification))
  927. {
  928. arg.Message = "放大" + MParam.Location_Magnification.ToString("0.0") + "倍失败";
  929. arg.State = false;
  930. SendMsg("2-0");
  931. log.Error("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + MParam.Location_Magnification.ToString() + "控制失败", false);
  932. return false;
  933. }
  934. float current = iSEM.GetMagnification();
  935. while (Math.Abs(current - MParam.Location_Magnification) > 1)
  936. {
  937. iSEM.SetMagnification(MParam.Location_Magnification);
  938. Thread.Sleep(200);
  939. current = iSEM.GetMagnification();
  940. }
  941. arg.State = true;
  942. arg.Message = "放大" + MParam.Location_Magnification.ToString("0.0") + "倍成功";
  943. SendMsg("2-0");
  944. //判断是否停止进程
  945. if (key_stop)
  946. {
  947. log.Info("停止键按下。", true);
  948. return false;
  949. }
  950. //判断是否为仅拍照,不是则执行FIB操作
  951. if (!MParam.Is_Photograph)
  952. {
  953. log.Info("测量线程:切换到FIB模式。", true);
  954. //6.设置FIB拍照参数——扫描时间、束流等
  955. //7.控制FIB自动亮度、对比度
  956. Thread.Sleep(200);
  957. if (!iSEM.CmdFIBModeFIB())
  958. {
  959. arg.Message = "FIB模式切换失败";
  960. arg.State = false;
  961. SendMsg("2-1");
  962. log.Error("测量线程报错:切换到FIB模式失败。", false);
  963. return false;
  964. }
  965. arg.State = true;
  966. arg.Picture_Information.Work_Status = "FIB";
  967. arg.Message = "FIB模式切换成功";
  968. SendMsg("2-1");
  969. Thread.Sleep(1000);
  970. //判断是否停止进程
  971. if (key_stop)
  972. {
  973. log.Info("停止键按下。", true);
  974. return false;
  975. }
  976. //8.控制FIB拍照
  977. //9.保存照片======更改路径
  978. //20201103,FIB使用定位的放大倍数
  979. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  980. arg.Picture_Information.Picture_FullPath = fileName2;
  981. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  982. Thread.Sleep(200);
  983. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  984. Thread.Sleep(200);
  985. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  986. Thread.Sleep(200);
  987. //FIB的放大位数,将来会改
  988. log.Info("测量线程:设置FIB放大倍数" + MParam.Location_Magnification.ToString(), true);
  989. //20201103,FIB使用定位的放大倍数
  990. if (!iSEM.SetFIBMagnification(MParam.Location_Magnification))
  991. {
  992. arg.Message = "FIB放大倍数设置失败";
  993. arg.State = false;
  994. SendMsg("2-2");
  995. log.Error("测量线程失败:FIB放大倍数设置失败。", false);
  996. return false;
  997. }
  998. arg.Message = "FIB放大倍数设置成功";
  999. arg.State = true;
  1000. SendMsg("2-2");
  1001. Thread.Sleep(200);
  1002. //判断是否停止进程
  1003. if (key_stop)
  1004. {
  1005. log.Info("停止键按下。", true);
  1006. return false;
  1007. }
  1008. //4、设置WD
  1009. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1010. Thread.Sleep(1000);
  1011. //20201127增加自动亮度对比度
  1012. if (MParam.FIBDo)
  1013. {
  1014. if (MParam.FIBAutoBC)
  1015. {
  1016. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1017. float m_TempBrightness = 50.0f;
  1018. float m_TempContrast = 30.0f;
  1019. if (MParam.SampleName == "3" || MParam.SampleName == "1")
  1020. {
  1021. m_TempBrightness = 50.0f;
  1022. m_TempContrast = 30.0f;
  1023. iSEM.SetAutoVideoOff();
  1024. Thread.Sleep(200);
  1025. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1026. Thread.Sleep(200);
  1027. iSEM.SetContrast(m_TempContrast); //30.0f
  1028. Thread.Sleep(200);
  1029. }
  1030. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1031. {
  1032. iSEM.SetAutoVideoBrightnessAndContrast();
  1033. //20201128陈工建议增加
  1034. Thread.Sleep(200);
  1035. iSEM.SetAutoBright(100);
  1036. Thread.Sleep(200);
  1037. iSEM.SetAutoContrast(100);
  1038. Thread.Sleep(5000);
  1039. }
  1040. }
  1041. else
  1042. {
  1043. iSEM.SetAutoVideoOff();
  1044. Thread.Sleep(200);
  1045. iSEM.SetBrightness(MParam.FIBB);
  1046. Thread.Sleep(200);
  1047. iSEM.SetContrast(MParam.FIBC);
  1048. Thread.Sleep(200);
  1049. }
  1050. }
  1051. //拍照前改变速度,延时
  1052. iSEM.CloseReduced();
  1053. Thread.Sleep(200);
  1054. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1055. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1056. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1057. Thread.Sleep(200);
  1058. cycle_time = iSEM.GetCycleTime();
  1059. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1060. if (!GetImage(fileName2))
  1061. {
  1062. arg.Message = "FIB拍照失败";
  1063. arg.State = false;
  1064. SendMsg("2-3");
  1065. log.Error("测量线程报错:FIB拍照失败。", false);
  1066. return false;
  1067. }
  1068. arg.State = true;
  1069. arg.Picture_Information.Picture_FullPath = fileName2;
  1070. arg.Message = "FIB拍照成功";
  1071. SendMsg("2-3");
  1072. Thread.Sleep(200);
  1073. //SendMsg("1-16");
  1074. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1075. Thread.Sleep(200);
  1076. cycle_time = iSEM.GetCycleTime();
  1077. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1078. //判断是否停止进程
  1079. if (key_stop)
  1080. {
  1081. log.Info("停止键按下。", true);
  1082. return false;
  1083. }
  1084. iSEM.CmdFIBModeSEM();
  1085. Thread.Sleep(200);
  1086. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1087. log.Info("测量线程:调用图像处理接口,准备移动样品台", true);
  1088. log.Info("文件名=" + fileName2, true);
  1089. log.Info("样品类型=" + MParam.SampleName, true);
  1090. log.Info("供应商名称=" + MParam.Firm, true);
  1091. ImagePro.Img_Cut_Position(fileName2, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1092. log.Info("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString() + ")", true);
  1093. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1094. if (state == 1)
  1095. {
  1096. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1097. float xc = (x1 + x2) / 2;
  1098. float yc = (y1 + y2) / 2;
  1099. x0 = xc - 512;
  1100. y0 = 384 - yc;
  1101. log.Info("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1102. px = iSEM.GetPixelSize();
  1103. //修改FIB切割的ELY文件坐标
  1104. XmlDocument xmlDoc = new XmlDocument();
  1105. xmlDoc.Load(MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1106. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1107. if (xns != null)
  1108. {
  1109. XmlAttributeCollection attributeCol = xns.Attributes;
  1110. //遍历自己点属性
  1111. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1112. log.Info("XML-Width_a = " + width_a.ToString(), true);
  1113. foreach (XmlAttribute attri in attributeCol)
  1114. {
  1115. if (attri.Name == "x")
  1116. {
  1117. attri.InnerText = ((x0 * px) * 1000000 - width_a).ToString();
  1118. log.Info("XML-TopLeft-X = " + attri.InnerText, true);
  1119. }
  1120. else if (attri.Name == "y")
  1121. {
  1122. attri.InnerText = ((y0 * px) * 1000000 - 2.791).ToString();
  1123. log.Info("XML-TopLeft-Y = " + attri.InnerText, true);
  1124. }
  1125. }
  1126. }
  1127. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1128. if (xns != null)
  1129. {
  1130. XmlAttributeCollection attributeCol = xns.Attributes;
  1131. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1132. //遍历自己点属性
  1133. foreach (XmlAttribute attri in attributeCol)
  1134. {
  1135. if (attri.Name == "x")
  1136. {
  1137. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1138. }
  1139. else if (attri.Name == "y")
  1140. {
  1141. attri.InnerText = (((y0 * px) * 1000000) + 2 - 2.791).ToString();
  1142. }
  1143. }
  1144. }
  1145. xmlDoc.Save(MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1146. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1147. if (MParam.PT)
  1148. {
  1149. xmlDoc = new XmlDocument();
  1150. xmlDoc.Load(MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1151. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1152. if (xns != null)
  1153. {
  1154. XmlAttributeCollection attributeCol = xns.Attributes;
  1155. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1156. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1157. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1158. //遍历自己点属性
  1159. foreach (XmlAttribute attri in attributeCol)
  1160. {
  1161. if (attri.Name == "x")
  1162. {
  1163. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1164. }
  1165. else if (attri.Name == "y")
  1166. {
  1167. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1168. }
  1169. }
  1170. }
  1171. xmlDoc.Save(MParam.PTTemp);
  1172. }
  1173. if (hand_intervene == 1)
  1174. {
  1175. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1176. }
  1177. }
  1178. else
  1179. {
  1180. arg.Message = "图像接口参数state返回值为零";
  1181. arg.State = false;
  1182. //SendMsg("1-12");
  1183. if (hand_intervene == 1)
  1184. {
  1185. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1186. {
  1187. return false;
  1188. }
  1189. }
  1190. else
  1191. {
  1192. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1193. return false;
  1194. }
  1195. log.Error("测量线程报错:自动定位图像接口返回0", false);
  1196. return false;
  1197. }
  1198. //判断是否停止进程
  1199. if (key_stop)
  1200. {
  1201. log.Info("停止键按下", true);
  1202. return false;
  1203. }
  1204. //11.自动工具样品类型参数确定是否需要PT沉积
  1205. if (MParam.PT)
  1206. {
  1207. if (!iSEM.CmdFIBModeFIB())
  1208. {
  1209. log.Error("测量线程报错:切换到SEM模式失败", false);
  1210. return false;
  1211. }
  1212. Thread.Sleep(200);
  1213. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1214. if (MParam.Is_Photograph == false && MParam.PT == true)
  1215. {
  1216. log.Info("测量线程:插入PT针" + arg.Message, true);
  1217. if (!InsertPT())
  1218. {
  1219. arg.Message = "插入PT针失败";
  1220. arg.State = false;
  1221. SendMsg("2-4");
  1222. log.Error("测量线程报错:" + arg.Message, false);
  1223. return false;
  1224. }
  1225. arg.State = true;
  1226. arg.Message = "插入PT针成功";
  1227. SendMsg("2-4");
  1228. }
  1229. //判断是否停止进程
  1230. if (key_stop)
  1231. {
  1232. log.Info("停止键按下", true);
  1233. return false;
  1234. }
  1235. //3. 根据坐标进行PT沉积
  1236. if (!PTWork())
  1237. {
  1238. arg.Message = "PT沉积失败";
  1239. arg.State = false;
  1240. SendMsg("2-5");
  1241. log.Error("测量线程报错:" + arg.Message, false);
  1242. return false;
  1243. }
  1244. arg.State = true;
  1245. arg.Message = "PT沉积成功";
  1246. SendMsg("2-5");
  1247. //判断是否停止进程
  1248. if (key_stop)
  1249. {
  1250. log.Info("停止键按下", true);
  1251. return false;
  1252. }
  1253. //15.根据样品类型决定是否撤出PT针
  1254. if (MParam.Is_Photograph == false && MParam.PT == true)
  1255. {
  1256. if (!RetractPT())
  1257. {
  1258. arg.Message = "撤出PT针失败";
  1259. arg.State = false;
  1260. SendMsg("2-6");
  1261. log.Error("测量线程报错:" + arg.Message, false);
  1262. return false;
  1263. }
  1264. arg.State = true;
  1265. arg.Message = "撤出PT针成功";
  1266. SendMsg("2-6");
  1267. }
  1268. //判断是否停止进程
  1269. if (key_stop)
  1270. {
  1271. log.Info("停止键按下", true);
  1272. return false;
  1273. }
  1274. if (!iSEM.CmdFIBModeSEM())
  1275. {
  1276. //arg.Message = "切割前SEM拍照失败。";
  1277. //arg.State = false;
  1278. //SendMsg("1-17");
  1279. log.Error("测量线程报错:切换到SEM模式失败", false);
  1280. return false;
  1281. }
  1282. }
  1283. }
  1284. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1285. float[] firstPosition = iSEM.GetStagePosition();
  1286. m_cutHoles[0].Position.X = firstPosition[0];
  1287. m_cutHoles[0].Position.Y = firstPosition[1];
  1288. m_cutHoles[0].Position.Z = firstPosition[2];
  1289. m_cutHoles[0].Position.T = firstPosition[3];
  1290. m_cutHoles[0].Position.R = firstPosition[4];
  1291. m_cutHoles[0].Position.M = firstPosition[5];
  1292. //这里要调用文件保存功能
  1293. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1294. + firstPosition[1].ToString() + ","
  1295. + firstPosition[2].ToString() + ","
  1296. + firstPosition[3].ToString() + ","
  1297. + firstPosition[4].ToString() + ","
  1298. + firstPosition[5].ToString() + ")";
  1299. arg.State = true;
  1300. //SendMsg("1-16");
  1301. //判断是否停止进程
  1302. if (key_stop)
  1303. {
  1304. log.Info("停止键按下", true);
  1305. return false;
  1306. }
  1307. return true;
  1308. }
  1309. /// <summary>
  1310. /// 14. FIB切割
  1311. /// </summary>
  1312. /// <returns></returns>
  1313. public bool FIBCross()
  1314. {
  1315. int state = 0;
  1316. if (!iSEM.CmdFIBModeFIB())
  1317. {
  1318. arg.Message = "切换到FIB模式失败。";
  1319. arg.State = false;
  1320. SendMsg("2-7");
  1321. log.Error("测量线程报错:切换到SEM模式失败", false);
  1322. return false;
  1323. }
  1324. arg.Message = "切换到FIB模式成功。";
  1325. arg.State = true;
  1326. SendMsg("2-7");
  1327. Thread.Sleep(1000);
  1328. iSEM.SetMagnification(MParam.Location_Magnification);
  1329. float current = iSEM.GetMagnification();
  1330. while (Math.Abs(current - MParam.Location_Magnification) > 1)
  1331. {
  1332. iSEM.SetMagnification(MParam.Location_Magnification);
  1333. Thread.Sleep(200);
  1334. current = iSEM.GetMagnification();
  1335. }
  1336. Thread.Sleep(2000);
  1337. //14.自动控制FIB切割
  1338. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1339. //2.控制FIB进行切割
  1340. //以上1、2步全部用ELY文件代替
  1341. if (!FIBWork())
  1342. {
  1343. arg.Message = "FIB切割失败";
  1344. arg.State = false;
  1345. SendMsg("2-8");
  1346. log.Error("测量线程报错:" + arg.Message, false);
  1347. return false;
  1348. }
  1349. arg.State = true;
  1350. arg.Message = "FIB切割成功";
  1351. SendMsg("2-8");
  1352. Thread.Sleep(300);
  1353. //判断是否停止进程
  1354. if (key_stop)
  1355. {
  1356. log.Info("停止键按下", true);
  1357. return false;
  1358. }
  1359. //做切割后SEM的拍照
  1360. log.Info("测量线程:切割后SEM拍照", true);
  1361. if (!iSEM.CmdFIBModeSEM())
  1362. {
  1363. log.Error("测量线程报错:切换到SEM模式失败", false);
  1364. return false;
  1365. }
  1366. Thread.Sleep(1000);
  1367. return true;
  1368. }
  1369. /// <summary>
  1370. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1371. /// </summary>
  1372. /// <returns></returns>
  1373. public bool FindCross()
  1374. {
  1375. float x2 = 0, y2 = 0;
  1376. int state = 0;
  1377. //切换到SEM模式
  1378. if (!iSEM.CmdFIBModeSEM())
  1379. {
  1380. arg.Message = "SEM模式切换失败";
  1381. arg.State = false;
  1382. SendMsg("3-0");
  1383. log.Error("测量线程报错:" + arg.Message, false);
  1384. return false;
  1385. }
  1386. arg.State = true;
  1387. arg.Message = "SEM模式切换成功";
  1388. SendMsg("3-0");
  1389. arg.Picture_Information.Work_Status = "SEM";
  1390. Thread.Sleep(1000);
  1391. //判断是否停止进程
  1392. if (key_stop)
  1393. {
  1394. log.Info("停止键按下", true);
  1395. return false;
  1396. }
  1397. //1.控制SEM放大到300倍
  1398. log.Info("能谱电压设置:" + MParam.Location_Voltage.ToString("0.0"));
  1399. if (!iSEM.SetSEMVoltage(MParam.Location_Voltage))
  1400. {
  1401. arg.Message = "电压设置" + MParam.Location_Voltage.ToString("0.0") + "失败";
  1402. arg.State = false;
  1403. SendMsg("3-1");
  1404. log.Error("测量线程报错:" + arg.Message, false);
  1405. return false;
  1406. }
  1407. Thread.Sleep(200);
  1408. //iSEM.SetAutoVideoBrightnessAndContrast();
  1409. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1410. float m_TempBrightness = 50.0f;
  1411. float m_TempContrast = 30.0f;
  1412. if (MParam.SampleName == "3")
  1413. {
  1414. m_TempBrightness = 48.0f;
  1415. m_TempContrast = 29.0f;
  1416. }
  1417. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1418. iSEM.SetAutoVideoOff();
  1419. Thread.Sleep(200);
  1420. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1421. Thread.Sleep(200);
  1422. iSEM.SetContrast(m_TempContrast); //30.0f
  1423. Thread.Sleep(2000);
  1424. float mag = MParam.Location_Magnification / 3;
  1425. if (mag < 200)
  1426. {
  1427. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1428. if (MParam.SampleName == "3")
  1429. mag = 400;
  1430. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1431. mag = 200;
  1432. }
  1433. if (!iSEM.SetMagnification(mag))
  1434. {
  1435. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1436. arg.State = false;
  1437. SendMsg("3-1");
  1438. log.Error("测量线程报错:" + arg.Message, false);
  1439. return false;
  1440. }
  1441. Thread.Sleep(200);
  1442. float current = iSEM.GetMagnification();
  1443. Thread.Sleep(200);
  1444. while (Math.Abs(current - mag) > 2)
  1445. {
  1446. iSEM.SetMagnification(mag);
  1447. Thread.Sleep(200);
  1448. current = iSEM.GetMagnification();
  1449. Thread.Sleep(200);
  1450. }
  1451. arg.State = true;
  1452. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1453. SendMsg("3-1");
  1454. Thread.Sleep(2000);
  1455. //判断是否停止进程
  1456. if (key_stop)
  1457. {
  1458. log.Info("停止键按下", true);
  1459. return false;
  1460. }
  1461. //3.控制SEM拍照
  1462. //String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1463. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1464. String fileName4 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName4;
  1465. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1466. log.Info("fileName4====================" + fileName4, true);
  1467. arg.Picture_Information.Picture_FullPath = fileName4;
  1468. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1469. Thread.Sleep(200);
  1470. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1471. Thread.Sleep(200);
  1472. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1473. Thread.Sleep(200);
  1474. //拍照前改变速度,延时
  1475. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1476. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1477. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1478. Thread.Sleep(200);
  1479. cycle_time = iSEM.GetCycleTime();
  1480. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1481. if (!GetImage(fileName4))
  1482. {
  1483. arg.State = false;
  1484. arg.Message = "SEM拍照找切割位置失败";
  1485. SendMsg("3-2");
  1486. log.Error("测量线程报错:" + arg.Message, false);
  1487. return false;
  1488. }
  1489. arg.Picture_Information.Picture_FullPath = fileName4;
  1490. arg.State = true;
  1491. arg.Message = "SEM拍照成功";
  1492. SendMsg("3-2");
  1493. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1494. Thread.Sleep(200);
  1495. cycle_time = iSEM.GetCycleTime();
  1496. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1497. //判断是否停止进程
  1498. if (key_stop)
  1499. {
  1500. return false;
  1501. }
  1502. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1503. //5.根据坐标控制SEM移动到切孔位置,居中
  1504. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  1505. log.Info("文件名=" + fileName4, true);
  1506. ImagePro.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x2, out y2, out state);
  1507. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1508. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  1509. if (state == 1)
  1510. {
  1511. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1512. if (!MoveToPixByMoveStage(x2, y2))
  1513. {
  1514. arg.State = false;
  1515. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1516. SendMsg("3-3");
  1517. log.Error("测量线程报错:" + arg.Message, false);
  1518. return false;
  1519. }
  1520. //判断是否移动完成
  1521. while (true)
  1522. {
  1523. Thread.Sleep(4000);
  1524. if (iSEM.GetStageIs() == 0)
  1525. {
  1526. break;
  1527. }
  1528. }
  1529. arg.State = true;
  1530. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1531. SendMsg("3-3");
  1532. //高倍到低倍不进行对焦
  1533. //拍照前改变速度,延时
  1534. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1535. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1536. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1537. Thread.Sleep(200);
  1538. cycle_time = iSEM.GetCycleTime();
  1539. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1540. //String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1541. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1542. String fileName10 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName10;
  1543. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1544. log.Info("fileName10====================" + fileName10, true);
  1545. if (!GetImage(fileName10))
  1546. {
  1547. log.Error("测量线程报错:找到已切割的位置拍照失败", false);
  1548. }
  1549. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1550. Thread.Sleep(200);
  1551. cycle_time = iSEM.GetCycleTime();
  1552. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1553. if (hand_intervene == 1)
  1554. {
  1555. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1556. }
  1557. }
  1558. else
  1559. {
  1560. arg.Message = "图像接口参数state返回值为零";
  1561. arg.State = false;
  1562. SendMsg("3-3");
  1563. if (hand_intervene == 1)
  1564. {
  1565. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1566. {
  1567. return false;
  1568. }
  1569. }
  1570. else
  1571. {
  1572. return false;
  1573. }
  1574. log.Error("测量线程报错:" + arg.Message, false);
  1575. return false;
  1576. }
  1577. //判断是否停止进程
  1578. if (key_stop)
  1579. {
  1580. log.Info("停止键按下", true);
  1581. return false;
  1582. }
  1583. return true;
  1584. }
  1585. /// <summary>
  1586. /// 17.自动控制SEM拍截面照
  1587. /// </summary>
  1588. /// <returns></returns>
  1589. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1590. {
  1591. int state = 0;
  1592. #region 设置拍照的电压
  1593. log.Info("测量线程:设置拍照电压" + MParam.Photograph_Voltage.ToString(), true);
  1594. //1、放大倍数参数photograph_
  1595. if (!iSEM.SetSEMVoltage(MParam.Photograph_Voltage))
  1596. {
  1597. arg.Message = "电压设置" + MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1598. arg.State = false;
  1599. SendMsg("3-4");
  1600. log.Error("测量线程报错:" + arg.Message, false);
  1601. return false;
  1602. }
  1603. //add
  1604. #endregion
  1605. Thread.Sleep(200);
  1606. #region 设置拍照的放大倍数
  1607. log.Info("测量线程:设置拍照放大倍数====" + MParam.Photograph_Magnification.ToString(), true);
  1608. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  1609. {
  1610. arg.Message = "放大倍数调整失败";
  1611. arg.State = false;
  1612. SendMsg("3-4");
  1613. log.Error("测量线程报错:" + arg.Message, false);
  1614. return false;
  1615. }
  1616. float set = MParam.Photograph_Magnification;
  1617. float current = iSEM.GetMagnification();
  1618. while (Math.Abs(current - set) > 1)
  1619. {
  1620. iSEM.SetMagnification(MParam.Photograph_Magnification);
  1621. Thread.Sleep(200);
  1622. current = iSEM.GetMagnification();
  1623. }
  1624. arg.Message = "放大" + MParam.Photograph_Magnification.ToString() + "成功";
  1625. arg.State = true;
  1626. SendMsg("3-4");
  1627. Thread.Sleep(3000 + (Int32)cycle_time);
  1628. //判断是否停止进程
  1629. if (key_stop)
  1630. {
  1631. log.Info("停止键按下", true);
  1632. return false;
  1633. }
  1634. #endregion
  1635. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1636. //2.控制SEM自动对焦、亮度、对比度-接口
  1637. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1638. if ((MParam.SampleName == "2") || (MParam.SampleName == "3"))
  1639. iSEM.SetReduced(402, 128, 600, 600);
  1640. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1641. iSEM.SetReduced(402, 128, 600, 600);
  1642. Thread.Sleep(200);
  1643. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1644. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1645. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1646. Thread.Sleep(200);
  1647. cycle_time = iSEM.GetCycleTime();
  1648. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1649. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1650. if (!iSEM.SetAutoVideoOff())
  1651. {
  1652. log.Error("测量线程报错:关闭自动亮度对比度失败", false);
  1653. return false;
  1654. }
  1655. Thread.Sleep(5000);
  1656. log.Info("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1657. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1658. if (ImageFocus1(true))
  1659. {
  1660. arg.Message = "自动对焦完成";
  1661. arg.State = true;
  1662. SendMsg("3-5");
  1663. }
  1664. else
  1665. {
  1666. arg.Message = "自动对焦失败";
  1667. arg.State = false;
  1668. SendMsg("3-5");
  1669. log.Error("测量线程报错:" + arg.Message, false);
  1670. return false;
  1671. }
  1672. Thread.Sleep(1000);
  1673. log.Info("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1674. iSEM.CloseReduced();
  1675. Thread.Sleep(200);
  1676. cycle_time = iSEM.GetCycleTime();
  1677. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1678. //判断是否停止进程
  1679. if (key_stop)
  1680. {
  1681. log.Info("停止键按下", true);
  1682. return false;
  1683. }
  1684. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1685. float m_TempBrightness = 50.0f;
  1686. float m_TempContrast = 30.0f;
  1687. if (MParam.SampleName == "3")
  1688. {
  1689. m_TempBrightness = 50f;
  1690. m_TempContrast = 29f;
  1691. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1692. Thread.Sleep(200);
  1693. iSEM.SetContrast(m_TempContrast); //30.0f
  1694. Thread.Sleep(200);
  1695. }
  1696. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1697. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1698. {
  1699. log.Error("测量线程报错:自动开启亮度对比度失败", false);
  1700. return false;
  1701. }
  1702. Thread.Sleep(5000);
  1703. //3、设置SEM补偿角度
  1704. if (MParam.Is_Photograph == false)
  1705. {
  1706. log.Info("测量线程:角度补偿" + MParam.Correction_Angle.ToString() + "度", true);
  1707. if (!TiltCorrection(MParam.Correction_Angle))
  1708. {
  1709. arg.Message = "设置SEM进行角度补偿" + MParam.Correction_Angle.ToString("0") + "度失败";
  1710. arg.State = false;
  1711. SendMsg("3-6");
  1712. log.Error("测量线程报错:" + arg.Message, false);
  1713. return false;
  1714. }
  1715. arg.State = true;
  1716. arg.Message = "设置SEM进行角度补偿" + MParam.Correction_Angle.ToString("0") + "度成功";
  1717. SendMsg("3-6");
  1718. Thread.Sleep(200);
  1719. //判断是否停止进程
  1720. if (key_stop)
  1721. {
  1722. log.Error("停止键按下", false);
  1723. return false;
  1724. }
  1725. }
  1726. //4、拍照,5、保存照片
  1727. //String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1728. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1729. String fileName5 = data_path + "\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  1730. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1731. log.Info("fileName5====================" + fileName5, true);
  1732. arg.Picture_Information.Picture_FullPath = fileName5;
  1733. arg.Picture_Information.Work_Status = "SEM";
  1734. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1735. Thread.Sleep(200);
  1736. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1737. Thread.Sleep(200);
  1738. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1739. Thread.Sleep(200);
  1740. //拍照前改变速度,延时
  1741. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1742. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1743. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1744. Thread.Sleep(200);
  1745. cycle_time = iSEM.GetCycleTime();
  1746. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  1747. if (!GetImage(fileName5))
  1748. {
  1749. arg.Message = "SEM拍照失败";
  1750. arg.State = false;
  1751. SendMsg("3-7");
  1752. log.Error("测量线程报错:" + arg.Message, false);
  1753. return false;
  1754. }
  1755. arg.Picture_Information.Picture_FullPath = fileName5;
  1756. arg.State = true;
  1757. arg.Message = "SEM拍照成功";
  1758. SendMsg("3-7");
  1759. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1760. Thread.Sleep(200);
  1761. cycle_time = iSEM.GetCycleTime();
  1762. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1763. //判断是否停止进程
  1764. if (key_stop)
  1765. {
  1766. log.Info("停止键按下", true);
  1767. return false;
  1768. }
  1769. #endregion
  1770. if (MParam.Is_Photograph == false)
  1771. {
  1772. #region 对当前矩形进行旋转校正
  1773. //8,计算切割面区域偏移角度及方向
  1774. float degree = 0;
  1775. int direction = 0;
  1776. ImagePro.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  1777. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1778. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1779. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1780. if (state == 1)
  1781. {
  1782. //梯形角度
  1783. iSEM.SetScanRotationOn();
  1784. Thread.Sleep(200);
  1785. //20201128陈工要求,谭博返回角度*0.7
  1786. iSEM.SetScanRotation(Convert.ToSingle(degree * MParam.ScanRotCor));
  1787. Thread.Sleep(200);
  1788. arg.State = true;
  1789. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1790. SendMsg("3-8");
  1791. if (hand_intervene == 1)
  1792. {
  1793. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1794. }
  1795. }
  1796. else
  1797. {
  1798. arg.Message = "图像接口参数State返回值为零";
  1799. arg.State = false;
  1800. SendMsg("3-8");
  1801. if (hand_intervene == 1)
  1802. {
  1803. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1804. {
  1805. return false;
  1806. }
  1807. }
  1808. else
  1809. {
  1810. //return false;
  1811. }
  1812. log.Error("测量线程报错:" + arg.Message, false);
  1813. }
  1814. //判断是否停止进程
  1815. if (key_stop)
  1816. {
  1817. log.Info("停止键按下", true);
  1818. return false;
  1819. }
  1820. Thread.Sleep(200);
  1821. //12拍照
  1822. //String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1823. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  1824. String fileName6 = data_path + "\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  1825. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  1826. log.Info("fileName6====================" + fileName6, true);
  1827. arg.Picture_Information.Picture_FullPath = fileName6;
  1828. arg.Picture_Information.Work_Status = "SEM";
  1829. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1830. Thread.Sleep(200);
  1831. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1832. Thread.Sleep(200);
  1833. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1834. Thread.Sleep(200);
  1835. //拍照前改变速度,延时
  1836. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1837. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1838. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1839. Thread.Sleep(200);
  1840. cycle_time = iSEM.GetCycleTime();
  1841. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1842. if (!GetImage(fileName6))
  1843. {
  1844. arg.Message = "SEM拍照失败";
  1845. arg.State = false;
  1846. SendMsg("3-9");
  1847. log.Error("测量线程报错:" + arg.Message, false);
  1848. return false;
  1849. }
  1850. arg.Picture_Information.Picture_FullPath = fileName6;
  1851. arg.State = true;
  1852. arg.Message = "SEM拍照成功";
  1853. SendMsg("3-9");
  1854. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1855. Thread.Sleep(200);
  1856. cycle_time = iSEM.GetCycleTime();
  1857. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  1858. //判断是否停止进程
  1859. if (key_stop)
  1860. {
  1861. log.Info("停止键按下", true);
  1862. return false;
  1863. }
  1864. #endregion
  1865. #region 获取两个位置上及放大倍数
  1866. //计算两个测量区域坐标
  1867. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1868. List<float> mag = new List<float>();
  1869. System.Drawing.Point ct0;
  1870. float mag1, mag2, magMax;
  1871. //log.Info("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1872. ImagePro.Img_Measure_Region_Position(fileName6, Convert.ToInt32(MParam.SampleName), MParam.Firm, out ct, out mag, out ct0, out state);
  1873. string s = "";
  1874. for (int i = 0; i < ct.Count; i++)
  1875. {
  1876. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  1877. + "放大倍数=" + mag[i];
  1878. }
  1879. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  1880. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1881. "输入样品" + Convert.ToInt32(MParam.SampleName) +
  1882. "输入厂商" + MParam.Firm.ToString() +
  1883. s +
  1884. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1885. #endregion
  1886. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1887. {
  1888. arg.State = true;
  1889. arg.Message = "获取位置及放大倍数成功";
  1890. SendMsg("3-10");
  1891. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1892. float xs = iSEM.GetBeamShiftX();
  1893. Thread.Sleep(200);
  1894. float ys = iSEM.GetBeamShiftY();
  1895. Thread.Sleep(200);
  1896. float xpCur = iSEM.GetStageAtX();
  1897. Thread.Sleep(200);
  1898. float ypCur = iSEM.GetStageAtY();
  1899. Thread.Sleep(200);
  1900. log.Info("测量线程:原来的光束偏移量x = " + xs.ToString()
  1901. + "y=" + ys.ToString() + ","
  1902. + "原来样品台的位置x= " + xpCur.ToString()
  1903. + "y=" + ypCur.ToString(), true);
  1904. #endregion
  1905. //找到放大倍数最大值
  1906. magMax = mag[0];
  1907. for (int m = 1; m < mag.Count; m++)
  1908. {
  1909. if (mag[m] > magMax)
  1910. {
  1911. magMax = mag[m];
  1912. }
  1913. }
  1914. #region 移动到梯形左上角
  1915. //20201127将视野移动到梯形左上角位置
  1916. MoveToPix(ct0.X, ct0.Y);
  1917. log.Info("测量线程:移动到对焦点( " + ct0.X.ToString()
  1918. + "," + ct0.Y.ToString() + ")", true);
  1919. //关闭自动亮度对比度
  1920. iSEM.SetAutoVideoOff();
  1921. Thread.Sleep(2000);
  1922. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1923. if (MParam.SampleName == "3")
  1924. {
  1925. m_TempBrightness = 50f;
  1926. m_TempContrast = 29f;
  1927. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1928. Thread.Sleep(200);
  1929. iSEM.SetContrast(m_TempContrast); //30.0f
  1930. Thread.Sleep(200);
  1931. }
  1932. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1933. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  1934. if (MParam.SampleName == "3")
  1935. {
  1936. iSEM.SetReduced(402, 128, 480, 450);
  1937. }
  1938. else
  1939. {
  1940. iSEM.SetReduced(402, 128, 480, 450);
  1941. }
  1942. Thread.Sleep(200);
  1943. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1944. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1945. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1946. Thread.Sleep(200);
  1947. cycle_time = iSEM.GetCycleTime();
  1948. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1949. //放大到6000倍
  1950. iSEM.SetMagnification(magMax / 2);
  1951. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1952. set = magMax / 2;
  1953. current = iSEM.GetMagnification();
  1954. while (Math.Abs(current - set) > 1)
  1955. {
  1956. iSEM.SetMagnification(set);
  1957. Thread.Sleep(200);
  1958. current = iSEM.GetMagnification();
  1959. }
  1960. log.Info("========测量线程:开始自动聚焦 " + set.ToString() + "倍", true);
  1961. if (MParam.SampleName == "3")
  1962. {
  1963. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  1964. iSEM.SetBrightness(50.0f); //50.0f
  1965. Thread.Sleep(200);
  1966. iSEM.SetContrast(30.0f); //30.0f
  1967. Thread.Sleep(200);
  1968. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  1969. }
  1970. //自动对焦
  1971. if (!ImageFocus1(true))
  1972. {
  1973. log.Error("========测量线程:自动聚焦失败!" + set.ToString() + "倍", false);
  1974. return false;
  1975. }
  1976. log.Info("========测量线程:自动聚焦成功!" + set.ToString() + "倍", true);
  1977. Thread.Sleep(1000);
  1978. //放大到10000倍
  1979. iSEM.SetMagnification(magMax);
  1980. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1981. set = magMax;
  1982. current = iSEM.GetMagnification();
  1983. while (Math.Abs(current - set) > 1)
  1984. {
  1985. iSEM.SetMagnification(set);
  1986. Thread.Sleep(200);
  1987. current = iSEM.GetMagnification();
  1988. }
  1989. log.Info("========测量线程:开始自动聚焦 " + set.ToString() + "倍", true);
  1990. //自动对焦
  1991. if (!ImageFocus1(true))
  1992. {
  1993. log.Info("========测量线程:自动聚焦失败!" + set.ToString() + "倍", true);
  1994. return false;
  1995. }
  1996. log.Info("========测量线程:自动聚焦成功!" + set.ToString() + "倍", true);
  1997. Thread.Sleep(1000);
  1998. iSEM.CloseReduced();
  1999. Thread.Sleep(200);
  2000. cycle_time = iSEM.GetCycleTime();
  2001. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2002. #endregion
  2003. #region 循环拍照
  2004. for (int n = 0; n < ct.Count; n++)
  2005. {
  2006. #region 恢复到拍照的状态
  2007. iSEM.SetStageGotoX(xpCur);
  2008. while (true)
  2009. {
  2010. Thread.Sleep(4000);
  2011. if (iSEM.GetStageIs() == 0)
  2012. {
  2013. break;
  2014. }
  2015. }
  2016. iSEM.SetStageGotoY(ypCur);
  2017. while (true)
  2018. {
  2019. Thread.Sleep(4000);
  2020. if (iSEM.GetStageIs() == 0)
  2021. {
  2022. break;
  2023. }
  2024. }
  2025. //恢复原来的放大倍数
  2026. if (!iSEM.SetMagnification(MParam.Photograph_Magnification))
  2027. {
  2028. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2029. return false;
  2030. }
  2031. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2032. set = MParam.Photograph_Magnification;
  2033. current = iSEM.GetMagnification();
  2034. while (Math.Abs(current - set) > 1)
  2035. {
  2036. iSEM.SetMagnification(set);
  2037. Thread.Sleep(200);
  2038. current = iSEM.GetMagnification();
  2039. }
  2040. //恢复BeamShift的百分比值
  2041. iSEM.SetBeamShiftX(xs);
  2042. Thread.Sleep(200);
  2043. iSEM.SetBeamShiftY(ys);
  2044. Thread.Sleep(200);
  2045. #endregion
  2046. #region 移动到指定点位置
  2047. if (!MoveToPix(ct[n].X, ct[n].Y))
  2048. {
  2049. arg.State = false;
  2050. arg.Message = "移动到第一个点位置失败";
  2051. SendMsg("1-" + (35 + n).ToString());
  2052. //移动到第一个点失败
  2053. log.Error("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2054. }
  2055. log.Info("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2056. + "," + ct[n].Y.ToString() + ")", true);
  2057. #endregion
  2058. #region 如果是第一个点,则1W倍对焦
  2059. if (n == 0)
  2060. {
  2061. log.Info("========测量线程:进入内部观察,不对焦!", true);
  2062. //增亮图像
  2063. iSEM.SetAutoVideoOff();
  2064. Thread.Sleep(200);
  2065. float currentBright = iSEM.GetBrightness();
  2066. Thread.Sleep(200);
  2067. float currentContrast = iSEM.GetContrast();
  2068. Thread.Sleep(200);
  2069. //add by sun 2020-12-17 黄工觉得太亮
  2070. int m_BrightMore = 2;
  2071. int m_ContrastMore = 2;
  2072. if (MParam.SampleName == "3")
  2073. {
  2074. m_BrightMore = 0;
  2075. m_ContrastMore = 0;
  2076. }
  2077. //add by sun 2020-12-17 黄工觉得太亮 end
  2078. iSEM.SetBrightness(currentBright + m_BrightMore);
  2079. Thread.Sleep(200);
  2080. iSEM.SetContrast(currentContrast + m_ContrastMore);
  2081. Thread.Sleep(200);
  2082. }
  2083. #endregion
  2084. #region 拍照
  2085. if (!iSEM.SetMagnification(mag[n]))
  2086. {
  2087. arg.State = false;
  2088. arg.Message = "移动到第一个点位置拍照失败";
  2089. SendMsg("3-11");
  2090. log.Error("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2091. return false;
  2092. }
  2093. log.Info("========测量线程:移动到第一个点位置拍照完成!", true);
  2094. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2095. set = mag[n];
  2096. current = iSEM.GetMagnification();
  2097. while (Math.Abs(current - set) > 1)
  2098. {
  2099. iSEM.SetMagnification(set);
  2100. Thread.Sleep(200);
  2101. current = iSEM.GetMagnification();
  2102. }
  2103. //获取像素大小
  2104. lsize.Add(iSEM.GetPixelSize());
  2105. Thread.Sleep(200);
  2106. //String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2107. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  2108. String fileName7 = data_path + "\\" + MParam.Firm + "-" + mag[n].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + n.ToString() + "-" + ImageNameTwo_1;
  2109. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  2110. log.Info("fileName7====================" + fileName7, true);
  2111. arg.Picture_Information.Picture_FullPath = fileName7;
  2112. arg.Picture_Information.Work_Status = "SEM";
  2113. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2114. Thread.Sleep(200);
  2115. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2116. Thread.Sleep(200);
  2117. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2118. Thread.Sleep(200);
  2119. //拍照前改变速度,延时
  2120. iSEM.CmdLineScan();
  2121. Thread.Sleep(200);
  2122. cycle_time = iSEM.GetCycleTime();
  2123. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2124. if (!GetImage(fileName7))
  2125. {
  2126. arg.State = false;
  2127. arg.Message = "移动到第一个点位置失败";
  2128. SendMsg("3-11");
  2129. log.Error("测量线程报错:" + arg.Message, false);
  2130. return false;
  2131. }
  2132. log.Info("========测量线程:移动到第一个点位置完成!", true);
  2133. iSEM.CmdPixelScan();
  2134. Thread.Sleep(200);
  2135. limg_path.Add(fileName7);
  2136. arg.Picture_Information.Picture_FullPath = fileName7;
  2137. arg.State = true;
  2138. arg.Message = "移动到第一个点位置拍照成功";
  2139. SendMsg("3-11");
  2140. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2141. Thread.Sleep(200);
  2142. cycle_time = iSEM.GetCycleTime();
  2143. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2144. // add by zjx 在测量图上显示放大倍数和像素大小等信息
  2145. float size = iSEM.GetPixelSize();
  2146. SaveMeasDataPic(fileName7, mag[n], size);
  2147. // add by zjx 在测量图上显示放大倍数和像素大小等信息 end
  2148. #endregion
  2149. }
  2150. #endregion
  2151. if (hand_intervene == 1)
  2152. {
  2153. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2154. }
  2155. }
  2156. else
  2157. {
  2158. if (hand_intervene == 1)
  2159. {
  2160. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2161. {
  2162. // return false;
  2163. }
  2164. }
  2165. else
  2166. {
  2167. //return false;
  2168. }
  2169. arg.State = false;
  2170. arg.Message = "获取位置及放大倍数失败";
  2171. SendMsg("3-10");
  2172. log.Error("测量线程报错:" + arg.Message, false);
  2173. }
  2174. //判断是否停止进程
  2175. if (key_stop)
  2176. {
  2177. log.Info("停止键按下", true);
  2178. return false;
  2179. }
  2180. }
  2181. iSEM.SetTiltAngleOff();
  2182. Thread.Sleep(200);
  2183. iSEM.SetScanRotationOff();
  2184. Thread.Sleep(200);
  2185. iSEM.SetBeamShiftX(0);
  2186. Thread.Sleep(200);
  2187. iSEM.SetBeamShiftY(0);
  2188. Thread.Sleep(200);
  2189. //判断是否停止进程
  2190. if (key_stop)
  2191. {
  2192. return false;
  2193. }
  2194. return true;
  2195. }
  2196. //第一个孔的测试过程
  2197. public bool FirstHole()
  2198. {
  2199. // add by zjx 2020-12-18 为了测试只做能谱部分
  2200. if (MParam.IsonlyEDSForDebug == true)
  2201. {
  2202. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2203. log.Warn("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  2204. if (!SetVoltageAndIPROBE())
  2205. {
  2206. log.Error("测量线程:第一孔=====设置电压电流失败!目前是第 " + MParam.SampleName + " 类!", false);
  2207. return false;
  2208. }
  2209. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2210. //设置拉直的放大倍数
  2211. log.Info("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + MParam.Stretch_Magnification.ToString(), true);
  2212. if (!iSEM.SetMagnification(MParam.Stretch_Magnification))
  2213. {
  2214. log.Error("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + MParam.Stretch_Magnification.ToString(), false);
  2215. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2216. arg.State = false;
  2217. SendMsg("0-1");
  2218. return false;
  2219. }
  2220. float current = iSEM.GetMagnification();
  2221. while (Math.Abs(current - MParam.Stretch_Magnification) > 1)
  2222. {
  2223. iSEM.SetMagnification(MParam.Stretch_Magnification);
  2224. Thread.Sleep(200);
  2225. current = iSEM.GetMagnification();
  2226. }
  2227. arg.Message = "拉直放大倍数设置成功!";
  2228. arg.State = true;
  2229. SendMsg("0-1");
  2230. Thread.Sleep(2000);
  2231. //自动化流程-每个点都需要补偿54度
  2232. if (MParam.Is_Photograph == false)
  2233. {
  2234. log.Info("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2235. if (!TiltCorrection(54.0f))
  2236. {
  2237. log.Error("测量线程报错:倾斜补偿角度为54度失败", false);
  2238. arg.Message = "角度补偿54度失败!";
  2239. arg.State = false;
  2240. SendMsg("0-2");
  2241. return false;
  2242. }
  2243. arg.Message = "角度补偿54度成功!";
  2244. arg.State = true;
  2245. SendMsg("0-2");
  2246. Thread.Sleep(1000);
  2247. //判断是否停止进程
  2248. if (key_stop)
  2249. {
  2250. log.Info("停止键按下", true);
  2251. return false;
  2252. }
  2253. }
  2254. // 2是5/6类样品,不需要拉直
  2255. if (MParam.SampleName != "2")
  2256. {
  2257. log.Warn("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2258. if (!Straighten_Handle())
  2259. {
  2260. log.Info("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2261. return false;
  2262. }
  2263. log.Info("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2264. //判断是否停止进程
  2265. if (key_stop)
  2266. {
  2267. log.Info("停止键按下。", true);
  2268. return false;
  2269. }
  2270. }
  2271. else
  2272. {
  2273. arg.Message = "拉直操作自动对焦成功!";
  2274. arg.State = true;
  2275. SendMsg("1-0");
  2276. Thread.Sleep(1000);
  2277. arg.Message = "拉直拍照成功!";
  2278. arg.Picture_Information.Picture_FullPath = "";
  2279. arg.State = true;
  2280. SendMsg("1-1");
  2281. Thread.Sleep(1000);
  2282. arg.Message = "拉直操作完成";
  2283. arg.State = true;
  2284. SendMsg("1-2");
  2285. Thread.Sleep(1000);
  2286. }
  2287. //13. 自动 定位功能 PT沉积
  2288. log.Warn("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2289. if (!GetPoistion())
  2290. {
  2291. log.Error("测量线程报错:自动定位失败,程序退出。", false);
  2292. return false;
  2293. }
  2294. log.Info("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2295. //判断是否停止进程
  2296. if (key_stop)
  2297. {
  2298. log.Info("停止键按下。", true);
  2299. return false;
  2300. }
  2301. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2302. if (MParam.Is_Photograph == false)
  2303. {
  2304. if (MParam.IsCutingForDebug)
  2305. {
  2306. log.Warn("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!==" + MParam.IsCutingForDebug, true);
  2307. if (!FIBCross())
  2308. {
  2309. log.Error("测量线程报错:自动控制FIB切割失败。", false);
  2310. return false;
  2311. }
  2312. log.Info("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2313. }
  2314. }
  2315. //del by sun 2020-12-15 temp end
  2316. //判断是否停止进程
  2317. if (key_stop)
  2318. {
  2319. return false;
  2320. }
  2321. //16.找到切割位置
  2322. if (MParam.Is_Photograph == false)
  2323. {
  2324. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2325. if (!FindCross())
  2326. {
  2327. return false;
  2328. }
  2329. log.Info("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2330. //判断是否停止进程
  2331. if (key_stop)
  2332. {
  2333. return false;
  2334. }
  2335. }
  2336. log.Warn("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2337. //将过程17最后的拍照图片提出给18步进行调用
  2338. List<String> limg_path = new List<string>();
  2339. List<float> lsize = new List<float>();
  2340. //17.自动控制SEM拍截面照
  2341. if (!ShotSection(ref limg_path, ref lsize))
  2342. {
  2343. log.Error("拍截面照失败!");
  2344. return false;
  2345. }
  2346. log.Info("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2347. //判断是否停止进程
  2348. if (key_stop)
  2349. {
  2350. return false;
  2351. }
  2352. //18.自动层高分析
  2353. if (MParam.Is_Photograph == false)
  2354. {
  2355. log.Warn("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2356. float size = iSEM.GetPixelSize();
  2357. int state = 1;
  2358. ImagePro.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(MParam.SampleName), MParam.Firm, out state);
  2359. if (state == 0)
  2360. {
  2361. arg.Message = "测量尺寸失败";
  2362. arg.State = false;
  2363. SendMsg("3-12");
  2364. return false;
  2365. }
  2366. arg.State = true;
  2367. arg.Message = "测量尺寸成功";
  2368. SendMsg("3-12");
  2369. log.Info("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2370. }
  2371. }
  2372. //add by zjx 2020-12-18 为了测试只做能谱部分 end
  2373. //19.能谱分析
  2374. if (MParam.EDS)
  2375. {
  2376. log.Warn("测量线程:第一个孔的测试过程-19.能谱分析开始===" + MParam.EDS, true);
  2377. EDS_Analysis();
  2378. log.Info("测量线程:第一个孔的测试过程-19.能谱分析结束===" + MParam.EDS, true);
  2379. }
  2380. //20.复位
  2381. log.Info("===========测量线程:20.复位开始", true);
  2382. BeamShiftReset();
  2383. return true;
  2384. }
  2385. //非第一个孔的测试过程
  2386. public bool OtherHole()
  2387. {
  2388. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2389. log.Warn("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  2390. if (!SetVoltageAndIPROBE())
  2391. {
  2392. log.Error("测量线程:非第一孔==设置电压电流失败!目前是第 " + MParam.SampleName + " 类!", false);
  2393. return false;
  2394. }
  2395. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2396. //设置拉直的放大倍数
  2397. log.Info("设置拉直放大倍数!");
  2398. if (!iSEM.SetMagnification(MParam.Stretch_Magnification))
  2399. {
  2400. log.Error("拉直放大倍数设置失败,程序退出。", false);
  2401. arg.Message = "拉直放大倍数设置失败!";
  2402. arg.State = false;
  2403. SendMsg("0-1");
  2404. return false;
  2405. }
  2406. float current = iSEM.GetMagnification();
  2407. while (Math.Abs(current - MParam.Stretch_Magnification) > 1)
  2408. {
  2409. iSEM.SetMagnification(MParam.Stretch_Magnification);
  2410. Thread.Sleep(200);
  2411. current = iSEM.GetMagnification();
  2412. }
  2413. arg.Message = "拉直放大倍数设置成功!";
  2414. arg.State = true;
  2415. SendMsg("0-1");
  2416. Thread.Sleep(2000);
  2417. //自动化流程-每个点都需要补偿54度
  2418. if (MParam.Is_Photograph == false)
  2419. {
  2420. log.Info("角度补偿54度!");
  2421. if (!TiltCorrection(54.0f))
  2422. {
  2423. arg.Message = "角度补偿54度失败!";
  2424. arg.State = false;
  2425. SendMsg("0-2");
  2426. return false;
  2427. }
  2428. arg.Message = "角度补偿54度成功!";
  2429. arg.State = true;
  2430. SendMsg("0-2");
  2431. Thread.Sleep(2000);
  2432. //判断是否停止进程
  2433. if (key_stop)
  2434. {
  2435. return false;
  2436. }
  2437. }
  2438. if (MParam.SampleName != "2")
  2439. {
  2440. log.Warn("开始进行拉直操作!");
  2441. if (!Straighten_Handle())
  2442. {
  2443. log.Info("测量线程报错:拉直操作失败。", true);
  2444. return false;
  2445. }
  2446. //判断是否停止进程
  2447. if (key_stop)
  2448. {
  2449. log.Info("停止键按下。", true);
  2450. return false;
  2451. }
  2452. }
  2453. else
  2454. {
  2455. arg.Message = "拉直操作自动对焦成功!";
  2456. arg.State = true;
  2457. SendMsg("1-0");
  2458. Thread.Sleep(1000);
  2459. arg.Message = "拉直拍照成功!";
  2460. arg.Picture_Information.Picture_FullPath = "";
  2461. arg.State = true;
  2462. SendMsg("1-1");
  2463. Thread.Sleep(1000);
  2464. arg.Message = "拉直操作完成";
  2465. arg.State = true;
  2466. SendMsg("1-2");
  2467. }
  2468. //13. 自动 定位功能
  2469. log.Info("开始进行自动定位!");
  2470. if (!GetPoistion())
  2471. {
  2472. return false;
  2473. }
  2474. //判断是否停止进程
  2475. if (key_stop)
  2476. {
  2477. return false;
  2478. }
  2479. //14.自动控制FIB切割
  2480. if (MParam.Is_Photograph == false)
  2481. {
  2482. log.Warn("开始进行FIB切割!");
  2483. if (!FIBCross())
  2484. {
  2485. return false;
  2486. }
  2487. }
  2488. //判断是否停止进程
  2489. if (key_stop)
  2490. {
  2491. return false;
  2492. }
  2493. // 16.找到切割位置
  2494. if (MParam.Is_Photograph == false)
  2495. {
  2496. log.Warn("开始找切割位置!");
  2497. if (!FindCross())
  2498. {
  2499. return false;
  2500. }
  2501. //判断是否停止进程
  2502. if (key_stop)
  2503. {
  2504. return false;
  2505. }
  2506. }
  2507. //将过程17最后的拍照图片提出给18步进行调用
  2508. List<String> limg_path = new List<string>();
  2509. List<float> lsize = new List<float>();
  2510. //17.自动控制SEM拍截面照
  2511. log.Warn("开始控制SEM拍截面照!");
  2512. if (!ShotSection(ref limg_path, ref lsize))
  2513. {
  2514. //return false;
  2515. }
  2516. //判断是否停止进程
  2517. if (key_stop)
  2518. {
  2519. return false;
  2520. }
  2521. //18.自动层高分析
  2522. if (MParam.Is_Photograph == false)
  2523. {
  2524. log.Warn("开始进行层高分析!");
  2525. float size = iSEM.GetPixelSize();
  2526. int state = 1;
  2527. ImagePro.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(MParam.SampleName), MParam.Firm, out state);
  2528. if (state == 0)
  2529. {
  2530. arg.Message = "测量尺寸失败";
  2531. arg.State = false;
  2532. SendMsg("3-12");
  2533. return false;
  2534. }
  2535. arg.State = true;
  2536. arg.Message = "测量尺寸成功";
  2537. SendMsg("3-12");
  2538. }
  2539. //19.能谱分析
  2540. if (MParam.EDS)
  2541. {
  2542. log.Warn("开始进行能谱分析!");
  2543. EDS_Analysis();
  2544. }
  2545. return true;
  2546. }
  2547. //测试完第一个孔后的样品台初始化操作。
  2548. //再调用CommonWork执行非第一个孔的测试过程
  2549. public bool OtherHole_Init()
  2550. {
  2551. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2552. #region 初始化
  2553. //1、不只拍照,且不是倾斜观测,则移动T轴
  2554. if (MParam.Is_Photograph == false && MParam.Tilt == false)
  2555. {
  2556. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2557. if (!iSEM.SetStageGotoT(0))
  2558. {
  2559. log.Error("样品台归零失败", false);
  2560. return false;
  2561. }
  2562. while (true)
  2563. {
  2564. Thread.Sleep(5000);
  2565. if (iSEM.GetStageIs() == 0)
  2566. {
  2567. break;
  2568. }
  2569. }
  2570. //判断是否停止进程
  2571. if (key_stop)
  2572. {
  2573. log.Info("停止键按下", true);
  2574. return false;
  2575. }
  2576. }
  2577. //2、如果是倾斜观测,则移动Z轴
  2578. if (MParam.Tilt == true)
  2579. {
  2580. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2581. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - MParam.ZDistance/1000))
  2582. //20201109, Z轴降到安全的位置上
  2583. if (!iSEM.SetStageGotoZ(fSateyZ))
  2584. {
  2585. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2586. return false;
  2587. }
  2588. while (true)
  2589. {
  2590. Thread.Sleep(5000);
  2591. if (iSEM.GetStageIs() == 0)
  2592. {
  2593. break;
  2594. }
  2595. }
  2596. //判断是否停止进程
  2597. if (key_stop)
  2598. {
  2599. log.Info("停止键按下", true);
  2600. return false;
  2601. }
  2602. }
  2603. //3. 根据光镜坐标控制样品台移动
  2604. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2605. {
  2606. //SendMsg("移动失败");
  2607. log.Error("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2608. return false;
  2609. }
  2610. log.Info("移动R轴到=" + currentHole.Position.R.ToString(), true);
  2611. while (true)
  2612. {
  2613. Thread.Sleep(5000);
  2614. if (iSEM.GetStageIs() == 0)
  2615. {
  2616. break;
  2617. }
  2618. }
  2619. //判断是否停止进程
  2620. if (key_stop)
  2621. {
  2622. log.Info("停止键按下", true);
  2623. return false;
  2624. }
  2625. if (!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2626. {
  2627. //SendMsg("移动失败");
  2628. log.Error("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString() + "," + currentHole.Position.X.ToString() + ")", false);
  2629. return false;
  2630. }
  2631. log.Info("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2632. while (true)
  2633. {
  2634. Thread.Sleep(10000);
  2635. if (iSEM.GetStageIs() == 0)
  2636. {
  2637. break;
  2638. }
  2639. }
  2640. //判断是否停止进程
  2641. if (key_stop)
  2642. {
  2643. log.Info("停止键按下", true);
  2644. return false;
  2645. }
  2646. //4、倾斜观测时恢复Z轴
  2647. if (MParam.Tilt == true)
  2648. {
  2649. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2650. if (currentHole.Position.Z > 0.043)
  2651. {
  2652. log.Error("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2653. return false;
  2654. }
  2655. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2656. {
  2657. log.Error("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2658. return false;
  2659. }
  2660. while (true)
  2661. {
  2662. Thread.Sleep(5000);
  2663. if (iSEM.GetStageIs() == 0)
  2664. {
  2665. break;
  2666. }
  2667. }
  2668. //判断是否停止进程
  2669. if (key_stop)
  2670. {
  2671. log.Info("停止键按下", true);
  2672. return false;
  2673. }
  2674. }
  2675. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2676. if (MParam.Is_Photograph == false && MParam.Tilt == false)
  2677. {
  2678. if (!iSEM.SetStageGotoT(54))
  2679. {
  2680. log.Info("测量线程报错:校正54度有误", true);
  2681. return false;
  2682. }
  2683. while (true)
  2684. {
  2685. Thread.Sleep(5000);
  2686. if (iSEM.GetStageIs() == 0)
  2687. {
  2688. break;
  2689. }
  2690. }
  2691. }
  2692. //判断是否停止进程
  2693. if (key_stop)
  2694. {
  2695. log.Info("停止键按下", true);
  2696. return false;
  2697. }
  2698. //4、设置WD
  2699. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2700. Thread.Sleep(1000);
  2701. #endregion
  2702. return true;
  2703. }
  2704. //初始化拉直操作
  2705. public bool Straighten_Handle()
  2706. {
  2707. if (MParam.Tilt)
  2708. {
  2709. //倾斜样品台,SEM视野是黑色的
  2710. log.Info("测量线程:恢复到工作位置后重新调亮图像。", true);
  2711. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2712. {
  2713. log.Error("测量线程报错:重新设置到标准工作距离失败。", false);
  2714. return false;
  2715. }
  2716. Thread.Sleep(7000); //自动亮度对比度使用
  2717. }
  2718. //1、自动对焦
  2719. log.Info("测量线程:拉直操作前自动对焦开始", true);
  2720. iSEM.SetReduced(402, 128, 400, 400);
  2721. Thread.Sleep(200);
  2722. //add by sun 2020-12-15
  2723. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2724. //add by sun 2020-12-15 end
  2725. Thread.Sleep(200);
  2726. cycle_time = iSEM.GetCycleTime();
  2727. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2728. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2729. float m_TempBrightness = 50.0f;
  2730. float m_TempContrast = 30.0f;
  2731. if (MParam.SampleName == "3")
  2732. {
  2733. m_TempBrightness = 48.0f;
  2734. m_TempContrast = 29.0f;
  2735. }
  2736. //add by sun 2020-12-18 解决1(3\4)类样品拉直太白造成无法拉直问题
  2737. if (MParam.SampleName == "1")
  2738. {
  2739. m_TempBrightness = 50.0f;
  2740. m_TempContrast = 29.0f;
  2741. }
  2742. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2743. iSEM.SetAutoVideoOff();
  2744. Thread.Sleep(200);
  2745. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2746. Thread.Sleep(200);
  2747. iSEM.SetContrast(m_TempContrast);//30.0f
  2748. Thread.Sleep(200);
  2749. if (!ImageFocus1(true))
  2750. {
  2751. log.Error("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2752. arg.Message = "拉直操作自动对焦失败!";
  2753. arg.State = false;
  2754. SendMsg("1-0");
  2755. return false;
  2756. }
  2757. Thread.Sleep(1000);
  2758. iSEM.CloseReduced();
  2759. Thread.Sleep(200);
  2760. cycle_time = iSEM.GetCycleTime();
  2761. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2762. iSEM.SetAutoVideoBrightnessAndContrast();
  2763. Thread.Sleep(5000);
  2764. arg.Message = "拉直操作自动对焦成功!";
  2765. arg.State = true;
  2766. SendMsg("1-0");
  2767. //判断是否停止进程
  2768. if (key_stop)
  2769. {
  2770. log.Info("停止键按下。", true);
  2771. return false;
  2772. }
  2773. //2、拍张照片
  2774. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2775. log.Info("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2776. //拍照前改变速度,延时
  2777. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2778. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2779. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2780. Thread.Sleep(200);
  2781. cycle_time = iSEM.GetCycleTime();
  2782. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2783. if (!GetImage(fileName0))
  2784. {
  2785. log.Error("测量线程报错:拉直拍照失败", false);
  2786. arg.Message = "拉直拍照失败";
  2787. arg.State = false;
  2788. SendMsg("1-1");
  2789. return false;
  2790. }
  2791. arg.Message = "拉直拍照成功!";
  2792. arg.Picture_Information.Picture_FullPath = fileName0;
  2793. arg.State = true;
  2794. SendMsg("1-1");
  2795. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2796. Thread.Sleep(200);
  2797. cycle_time = iSEM.GetCycleTime();
  2798. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2799. //3、华为接口,获取旋转角度
  2800. float degree = 0;
  2801. int direction = 0;
  2802. int state = 1;
  2803. ImagePro.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  2804. log.Info("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  2805. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  2806. log.Info("图像处理结果拉直角度=" + degree.ToString(), true);
  2807. if (state == 0)
  2808. {
  2809. log.Info("测量线程:图像处理接口参数state返回为零", false);
  2810. arg.Message = "图像处理接口参数state返回为零";
  2811. arg.State = false;
  2812. SendMsg("1-2");
  2813. if (hand_intervene == 1)
  2814. {
  2815. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2816. {
  2817. return false;
  2818. }
  2819. }
  2820. else
  2821. {
  2822. return false;
  2823. }
  2824. return false;
  2825. }
  2826. if (direction == 2)
  2827. {
  2828. degree = -degree;
  2829. }
  2830. if (degree != 0)
  2831. {
  2832. //4、拉直,旋转R轴
  2833. log.Info("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  2834. //选择之前,先降Z轴
  2835. float Zpos = iSEM.GetStageAtZ();
  2836. Thread.Sleep(200);
  2837. log.Info("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  2838. if (!iSEM.SetStageGotoZ(fSateyZ))
  2839. {
  2840. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2841. return false;
  2842. }
  2843. while (true)
  2844. {
  2845. Thread.Sleep(4000);
  2846. if (iSEM.GetStageIs() == 0)
  2847. {
  2848. break;
  2849. }
  2850. }
  2851. //判断是否停止进程
  2852. if (key_stop)
  2853. {
  2854. log.Info("停止键按下", true);
  2855. return false;
  2856. }
  2857. iSEM.SetStageDeltaR(degree);
  2858. while (true)
  2859. {
  2860. Thread.Sleep(4000);
  2861. if (iSEM.GetStageIs() == 0)
  2862. {
  2863. break;
  2864. }
  2865. }
  2866. if (!iSEM.SetStageGotoZ(Zpos))
  2867. {
  2868. log.Error("测量线程报错:样品台Z回到安全位置失败", false);
  2869. return false;
  2870. }
  2871. while (true)
  2872. {
  2873. Thread.Sleep(4000);
  2874. if (iSEM.GetStageIs() == 0)
  2875. {
  2876. break;
  2877. }
  2878. }
  2879. //判断是否停止进程
  2880. if (key_stop)
  2881. {
  2882. log.Info("停止键按下", true);
  2883. return false;
  2884. }
  2885. //4、设置WD
  2886. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2887. Thread.Sleep(1000);
  2888. }
  2889. arg.Message = "拉直操作完成";
  2890. arg.State = true;
  2891. SendMsg("1-2");
  2892. return true;
  2893. }
  2894. //角度补偿
  2895. public bool TiltCorrection(float a_fAngle)
  2896. {
  2897. if (!iSEM.SetTiltAngleOn())
  2898. {
  2899. return false;
  2900. }
  2901. Thread.Sleep(200);
  2902. //恢复原始状态
  2903. if (!iSEM.SetTiltAngle(a_fAngle))
  2904. {
  2905. return false;
  2906. }
  2907. return true;
  2908. }
  2909. //拍图
  2910. public bool GetImage(String a_fileName)
  2911. {
  2912. log.Info("获取分辨率开始!", true);
  2913. //3. 获取分辨率
  2914. int[] ImageSize = iSEM.GetImageStore();
  2915. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  2916. {
  2917. return false;
  2918. }
  2919. short width = (short)ImageSize[0];
  2920. short height = (short)ImageSize[1];
  2921. log.Info("获取分辨率结束!" + a_fileName + "====" + width + "*" + height, true);
  2922. //4. 抓图
  2923. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  2924. {
  2925. log.Info("抓图失败!", true);
  2926. return false;
  2927. }
  2928. return true;
  2929. }
  2930. //执行自动对焦
  2931. public bool ImageFocus1(Boolean Is_Stig)
  2932. {
  2933. if (MParam.FocusMode == 1)//手动
  2934. {
  2935. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  2936. {
  2937. }
  2938. else
  2939. {
  2940. return false;
  2941. }
  2942. }
  2943. else if (MParam.FocusMode == 2)//自有自动
  2944. {
  2945. #region 执行蔡司自动对焦程序
  2946. //服务地址
  2947. string snumstr = @"http://192.168.1.101:8123";
  2948. bool normalized;
  2949. if (MParam.SampleName == "1")//第1大类代表3、4小类
  2950. {
  2951. normalized = false;
  2952. }
  2953. else
  2954. {
  2955. normalized = true;
  2956. }
  2957. // 调用方法;只对焦不消像散
  2958. if (Is_Stig)
  2959. {
  2960. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);//,normalized
  2961. if (focusstig != "success")
  2962. {
  2963. log.Error("对焦失败" + focusstig, false);
  2964. return false;
  2965. }
  2966. }
  2967. else
  2968. {
  2969. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);//,normalized
  2970. if (onlyfocus != "success")
  2971. {
  2972. return false;
  2973. }
  2974. }
  2975. #endregion
  2976. }
  2977. else if (MParam.FocusMode == 3) //客户自动
  2978. {
  2979. //后期和客户对接接口
  2980. List<string> filenames = new List<string>();
  2981. String retfilename = ImagePro.Img_Auto_Focus(filenames);
  2982. }
  2983. else //蔡司自动对焦
  2984. {
  2985. iSEM.CmdAutoFocusCoarse();
  2986. while (true)
  2987. {
  2988. Thread.Sleep(10000);
  2989. if (0 == iSEM.GetAutoFunction())
  2990. {
  2991. break;
  2992. }
  2993. }
  2994. iSEM.CmdAutoFocusFine();
  2995. while (true)
  2996. {
  2997. Thread.Sleep(10000);
  2998. if (0 == iSEM.GetAutoFunction())
  2999. {
  3000. break;
  3001. }
  3002. }
  3003. }
  3004. return true;
  3005. }
  3006. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  3007. bool MoveToPixByMoveStage(float xc, float yc)
  3008. {
  3009. //单位是m/pix
  3010. float XpixSize = iSEM.GetPixelSize();
  3011. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  3012. float YpixSize = iSEM.GetPixelSize();///(float)MParam.PixelSizeCor);
  3013. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  3014. Thread.Sleep(500);
  3015. //0:width, 1:height
  3016. int[] imageSize = iSEM.GetImageStore();
  3017. int width = imageSize[0] / 2;
  3018. int height = imageSize[1] / 2;
  3019. log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  3020. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  3021. float deltX = (xc - (float)width) * XpixSize;
  3022. float deltY = (yc - (float)height) * YpixSize;
  3023. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  3024. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  3025. float xpCur = iSEM.GetStageAtX();
  3026. float ypCur = iSEM.GetStageAtY();
  3027. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  3028. float xpNew = xpCur - deltX;
  3029. float ypNew = ypCur + deltY;
  3030. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  3031. //计算光束偏移值:
  3032. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  3033. {
  3034. log.Info("X方向移动样品台", true);
  3035. if (!iSEM.SetStageGotoX(xpNew))
  3036. {
  3037. return false;
  3038. }
  3039. //判断是否移动完成
  3040. while (true)
  3041. {
  3042. Thread.Sleep(5000);
  3043. if (iSEM.GetStageIs() == 0)
  3044. {
  3045. break;
  3046. }
  3047. }
  3048. }
  3049. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  3050. {
  3051. log.Info("Y方向移动样品台", true);
  3052. if (!iSEM.SetStageGotoY(ypNew))
  3053. {
  3054. return false;
  3055. }
  3056. //判断是否移动完成
  3057. while (true)
  3058. {
  3059. Thread.Sleep(5000);
  3060. if (iSEM.GetStageIs() == 0)
  3061. {
  3062. break;
  3063. }
  3064. }
  3065. }
  3066. return true;
  3067. }
  3068. //移动到像素位置
  3069. bool MoveToPix(float xc, float yc)
  3070. {
  3071. //单位是m/pix
  3072. float XpixSize = iSEM.GetPixelSize();
  3073. log.Info("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  3074. float YpixSize = (XpixSize / (float)MParam.PixelSizeCor);
  3075. log.Info("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  3076. Thread.Sleep(200);
  3077. //0:width, 1:height
  3078. int[] imageSize = iSEM.GetImageStore();
  3079. int width = imageSize[0] / 2;
  3080. int height = imageSize[1] / 2;
  3081. log.Info("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  3082. log.Info("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  3083. float deltX = (xc - (float)width) * XpixSize;
  3084. float deltY = (yc - (float)height) * YpixSize;
  3085. log.Info("x位移量 = " + deltX.ToString() + "m", true);
  3086. log.Info("y位移量 = " + deltY.ToString() + "m", true);
  3087. float xpCur = iSEM.GetStageAtX();
  3088. Thread.Sleep(200);
  3089. float ypCur = iSEM.GetStageAtY();
  3090. log.Info("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  3091. float xpNew = xpCur - deltX;
  3092. float ypNew = ypCur + deltY;
  3093. log.Info("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  3094. //计算最大偏移量
  3095. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  3096. Thread.Sleep(200);
  3097. iSEM.SetBeamShiftX(100);
  3098. Thread.Sleep(200);
  3099. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  3100. Thread.Sleep(200);
  3101. iSEM.SetBeamShiftX(beamXCur);
  3102. Thread.Sleep(200);
  3103. //计算光束偏移值:
  3104. float beamX = iSEM.GetBeamOffsetX();
  3105. log.Info("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  3106. beamX = (-deltX + beamX);
  3107. log.Info("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  3108. if (((beamX <= beamXMax) && (beamX >= 0)) ||
  3109. ((beamX >= -beamXMax) && (beamX < 0)))
  3110. {
  3111. log.Info("X方向移动光束", true);
  3112. float beamXShift = beamX * 100 / beamXMax;
  3113. log.Info("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  3114. if (!iSEM.SetBeamShiftX(beamXShift))//if (!iSEM.SetBeamOffsetX(beamX))
  3115. {
  3116. log.Info("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  3117. return false;
  3118. }
  3119. }
  3120. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  3121. {
  3122. log.Info("X方向移动样品台", true);
  3123. if (!iSEM.SetStageGotoX(xpNew))
  3124. {
  3125. return false;
  3126. }
  3127. //判断是否移动完成
  3128. while (true)
  3129. {
  3130. Thread.Sleep(4000);
  3131. if (iSEM.GetStageIs() == 0)
  3132. {
  3133. break;
  3134. }
  3135. }
  3136. }
  3137. float beamY = iSEM.GetBeamOffsetY();
  3138. log.Info("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  3139. beamY = (-deltY + beamY);
  3140. log.Info("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  3141. //计算最大偏移量
  3142. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  3143. Thread.Sleep(200);
  3144. iSEM.SetBeamShiftY(100);
  3145. Thread.Sleep(200);
  3146. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  3147. Thread.Sleep(200);
  3148. iSEM.SetBeamShiftY(beamYCur);
  3149. Thread.Sleep(200);
  3150. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  3151. ((beamY >= -beamYMax) && (beamY < 0)))
  3152. {
  3153. log.Info("Y方向移动光束", true);
  3154. float beamYShift = beamY * 100 / beamYMax;
  3155. log.Info("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  3156. //if(!iSEM.SetBeamOffsetY(beamY))
  3157. if (!iSEM.SetBeamShiftY(beamYShift))
  3158. {
  3159. log.Info("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  3160. return false;
  3161. }
  3162. }
  3163. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  3164. {
  3165. log.Info("Y方向移动样品台", true);
  3166. if (!iSEM.SetStageGotoY(ypNew))
  3167. {
  3168. return false;
  3169. }
  3170. //判断是否移动完成
  3171. while (true)
  3172. {
  3173. Thread.Sleep(4000);
  3174. if (iSEM.GetStageIs() == 0)
  3175. {
  3176. break;
  3177. }
  3178. }
  3179. }
  3180. return true;
  3181. }
  3182. #region 能谱所有参数
  3183. //全局只有一个Extender
  3184. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  3185. public IExtenderControl iExtender = null;
  3186. const int ScanFieldSize = 1142;
  3187. MeasureDB m_MeasDB = null;
  3188. int m_nXrayId = 0;
  3189. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  3190. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  3191. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  3192. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  3193. /// <summary>
  3194. /// 做能谱分析
  3195. /// </summary>
  3196. /// <param name="a_CutHoleID">分析点视场ID,索引号</param>
  3197. /// <param name="a_CutHoleName">分析点视场名称</param>
  3198. /// <param name="a_FieldImagePositionID">分析点的视场位置ID,图像处理会返回多个Xray分析点,但我们这里只取第一个点所在的视场</param>
  3199. /// <returns>成功或失败</returns>
  3200. public bool DoEDS(int a_CutHoleID, string a_CutHoleName, int a_FieldImagePositionID)
  3201. {
  3202. try
  3203. {
  3204. //XrayID记录
  3205. log.Info("程序进入EDS测量!", true);
  3206. iExtender = factoryExtender.IExtender;
  3207. Thread.Sleep(500);
  3208. EDSParam param = MParam.EDSParam;
  3209. double dDwellTime = param.DwellTime;
  3210. int nImageType = param.ImageType;
  3211. double dScanSizes = param.ScanSize;
  3212. log.Info("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  3213. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  3214. string path = EDS_path;
  3215. string edsfn = path + "\\" + a_FieldImagePositionID.ToString() + "_" + ImageNameEDS;
  3216. log.Info("EDS_PATH=" + edsfn, true);
  3217. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);//get the field eds image where the anylysis point locate.
  3218. arg.Picture_Information.Picture_FullPath = "";
  3219. arg.State = true;
  3220. SendMsg("4-5");//向界面发送指令:能谱拍照
  3221. //arg.State = false;
  3222. arg.Message = "";
  3223. arg.Picture_Information.Picture_FullPath = edsfn;
  3224. SendMsg("EDSPic");
  3225. //送给客户,计算感兴趣的区域
  3226. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  3227. List<System.Drawing.Point> LinesStartPoint = new List<System.Drawing.Point>();
  3228. List<List<Segment>> listFeature = new List<List<Segment>>();
  3229. List<int> lines_height = new List<int>();
  3230. System.Drawing.Point area_pt = new System.Drawing.Point();
  3231. int width = 1;
  3232. int height = 1;
  3233. int AreasNo = 0;
  3234. long[] XrayData;
  3235. Dictionary<string, double> listElement;
  3236. int xrayCollectMode = param.XrayCollectMode;
  3237. switch (xrayCollectMode)
  3238. {
  3239. case 0://point mode
  3240. //点数据
  3241. int state = 0;
  3242. ImagePro.EDS_Param_Points(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out listPoints, out state);
  3243. if (state == 0)
  3244. {
  3245. log.Error("点采集失败", false);
  3246. return false;
  3247. }
  3248. log.Info("返回 listPoints=" + listPoints.Count.ToString(), true);
  3249. if (!m_MeasDB.InsertAnylysisField(a_CutHoleID, a_CutHoleName, EDS_path, listPoints.Count, listFeature.Count, a_FieldImagePositionID))
  3250. {
  3251. log.Error("插入分析视场失败", false);
  3252. }
  3253. iExtender.BeginMultipleAquisition();
  3254. Thread.Sleep(100);
  3255. //点采集
  3256. m_nXrayId = 0;
  3257. foreach (System.Drawing.Point pt in listPoints)
  3258. {
  3259. XrayData = new long[2000];
  3260. listElement = new Dictionary<string, double>();
  3261. if (iExtender.XrayPointCollecting(param.PointTime, pt.X, pt.Y , out XrayData, out listElement))
  3262. {
  3263. string ele = "";
  3264. foreach (var s in listElement)
  3265. {
  3266. ele += s.ToString();
  3267. }
  3268. log.Info("采集点:(" + pt.X.ToString() + ":" + pt.Y.ToString() + ") 元素:" + ele);
  3269. //写入数据库
  3270. m_nXrayId++;
  3271. log.Info("点采集结束,写入数据库开始--" + m_nXrayId.ToString(), true);
  3272. Boolean ret = m_MeasDB.InsertAPointXray(a_CutHoleID, m_nXrayId, pt.X, pt.Y, XrayData, listElement, a_FieldImagePositionID);
  3273. Thread.Sleep(1000);
  3274. }
  3275. }
  3276. iExtender.EndMultipleAquisition();
  3277. break;
  3278. case 1://line mode
  3279. log.Info("线扫描", true);
  3280. state = 0;
  3281. ImagePro.EDS_Param_Lines(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out LinesStartPoint, out lines_height, out state);
  3282. string sp = "";
  3283. foreach (System.Drawing.Point p in LinesStartPoint)
  3284. {
  3285. sp += "(" + p.X + "," + p.Y + ")";
  3286. }
  3287. log.Info("线返回数据,lines=" + LinesStartPoint.Count.ToString() + " " + sp, true);
  3288. if (state == 1)
  3289. {
  3290. //将线转换为segment数据
  3291. log.Info("将线转换为segment数据", true);
  3292. for (int i = 0; i < LinesStartPoint.Count; i++)
  3293. {
  3294. List<Segment> segments = new List<Segment>();
  3295. for (int j = 0; j <= lines_height[i]; j++)
  3296. {
  3297. Segment segment = new Segment();
  3298. segment.X = LinesStartPoint[i].X;
  3299. segment.Y = LinesStartPoint[i].Y + j;
  3300. segment.Length = 2;
  3301. segments.Add(segment);
  3302. }
  3303. listFeature.Add(segments);
  3304. }
  3305. }
  3306. else
  3307. {
  3308. log.Error("线扫图片处理失败", false);
  3309. return false;
  3310. }
  3311. //线采集
  3312. iExtender.BeginMultipleAquisition();
  3313. Thread.Sleep(100);
  3314. for (int i = 0; i < listFeature.Count; i++)
  3315. {
  3316. List<Segment> listSeg = listFeature[i];
  3317. XrayData = new long[2000];
  3318. listElement = new Dictionary<string, double>();
  3319. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  3320. {
  3321. string ele = "";
  3322. foreach (var s in listElement)
  3323. {
  3324. ele += s.ToString();
  3325. }
  3326. log.Info("采集时间=" + param.AreaTime.ToString(), true);
  3327. log.Info("(" + listSeg[0].X + "," + listSeg[0].Y + ") height=" + lines_height[i] + " 元素:" + ele);
  3328. log.Info("线采集结束,写入数据库开始", true);
  3329. //写入数据库
  3330. m_nXrayId++;
  3331. AreasNo++;
  3332. m_MeasDB.InsertAAreaXay(a_CutHoleID, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  3333. }
  3334. else
  3335. {
  3336. log.Error("线扫xray失败");
  3337. }
  3338. }
  3339. iExtender.EndMultipleAquisition();
  3340. break;
  3341. case 2: //area mode
  3342. //面数据
  3343. state = 0;
  3344. ImagePro.EDS_Param_Areas(edsfn, a_FieldImagePositionID, Convert.ToInt32(MParam.SampleName), MParam.Firm, out area_pt, out width, out height, out state);
  3345. log.Info("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  3346. if (state == 1)
  3347. {
  3348. //将面转换为segment数据
  3349. List<Segment> segments = new List<Segment>();
  3350. for (int j = 0; j <= height; j++)
  3351. {
  3352. Segment segment = new Segment();
  3353. segment.X = area_pt.X;
  3354. segment.Y = area_pt.Y + j;
  3355. segment.Length = width;
  3356. segments.Add(segment);
  3357. }
  3358. listFeature.Add(segments);
  3359. }
  3360. else
  3361. {
  3362. log.Error("面扫图片处理失败", false);
  3363. return false;
  3364. }
  3365. //面采集
  3366. iExtender.BeginMultipleAquisition();
  3367. Thread.Sleep(100);
  3368. foreach (List<Segment> listSeg in listFeature)
  3369. {
  3370. XrayData = new long[2000];
  3371. listElement = new Dictionary<string, double>();
  3372. log.Info("AreaTime=" + param.AreaTime.ToString(), true);
  3373. if (iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement))
  3374. {
  3375. string ele = "";
  3376. foreach (var s in listElement)
  3377. {
  3378. ele += s.ToString();
  3379. }
  3380. log.Info(" 元素:" + ele);
  3381. log.Info("面采集结束,写入数据库开始", true);
  3382. //写入数据库
  3383. m_nXrayId++;
  3384. AreasNo++;
  3385. m_MeasDB.InsertAAreaXay(a_CutHoleID, m_nXrayId, AreasNo, listSeg, XrayData, listElement, a_FieldImagePositionID);
  3386. }
  3387. else
  3388. {
  3389. log.Error("面扫xray失败");
  3390. }
  3391. }
  3392. iExtender.EndMultipleAquisition();
  3393. break;
  3394. }
  3395. //存储数据
  3396. //向分析点数据库更新
  3397. }
  3398. catch (Exception e)
  3399. {
  3400. iExtender.EndMultipleAquisition();
  3401. log.Error(e.Message, false);
  3402. return false;
  3403. }
  3404. return true;
  3405. }
  3406. /// <summary>
  3407. /// 初始化数据库
  3408. /// </summary>
  3409. public void Init_MeasDB()
  3410. {
  3411. m_MeasDB = new MeasureDB(m_measureFile);
  3412. }
  3413. /// <summary>
  3414. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  3415. /// </summary>
  3416. /// <returns></returns>
  3417. public bool EDS_FindCross()
  3418. {
  3419. float x2 = 0, y2 = 0;
  3420. int state = 0;
  3421. float mag = MParam.Photograph_Magnification / 3;
  3422. String fileName4 = data_path + "\\" + MParam.Firm + "-" + mag.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageNameEDS4;
  3423. PhotoParam prm = new PhotoParam()
  3424. {
  3425. Mag = mag,
  3426. savePath = fileName4,
  3427. scanSpeed= MParam.ScanSpeedHigh,
  3428. scanSpeedAfter=MParam.ScanSpeedNormal,
  3429. };
  3430. Photo pho = new Photo(prm,iSEM);
  3431. pho.TakePhoto();
  3432. arg.Picture_Information.Picture_FullPath = fileName4;
  3433. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3434. //Thread.Sleep(200);
  3435. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3436. //Thread.Sleep(200);
  3437. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  3438. //Thread.Sleep(200);
  3439. SendMsg("4-2");
  3440. //拍照前改变速度,延时
  3441. if (key_stop)
  3442. {
  3443. return false;
  3444. }
  3445. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  3446. //5.根据坐标控制SEM移动到切孔位置,居中
  3447. log.Info("测量线程:图像处理接口,准备移动样品台", true);
  3448. log.Info("文件名=" + fileName4, true);
  3449. ImagePro.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(MParam.SampleName), MParam.Firm, out x2, out y2, out state);
  3450. log.Info("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  3451. log.Info("准备移动样品台返回状态=" + state.ToString(), true);
  3452. if (state == 1)
  3453. {
  3454. LocateParam lprm = new LocateParam()
  3455. {
  3456. PositionX = x2,
  3457. PositionY = y2,
  3458. PixelSize_Y_cur = MParam.PixelSizeCor ,
  3459. };
  3460. Locate loc = new Locate(lprm, iSEM);
  3461. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  3462. if (!loc.DoLocateByMoveStage())
  3463. {
  3464. log.Error("测量线程报错:" + arg.Message, false);
  3465. return false;
  3466. }
  3467. }
  3468. else
  3469. {
  3470. arg.Message = "图像接口参数state返回值为零";
  3471. arg.State = false;
  3472. //SendMsg("3-3");
  3473. if (hand_intervene == 1)
  3474. {
  3475. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  3476. {
  3477. return false;
  3478. }
  3479. }
  3480. else
  3481. {
  3482. return false;
  3483. }
  3484. log.Error("测量线程报错:" + arg.Message, false);
  3485. return false;
  3486. }
  3487. //判断是否停止进程
  3488. if (key_stop)
  3489. {
  3490. log.Info("停止键按下", true);
  3491. return false;
  3492. }
  3493. return true;
  3494. }
  3495. /// <summary>
  3496. /// 171.能谱第17步找点采集数据
  3497. /// </summary>
  3498. /// <returns></returns>
  3499. public bool EDS_ShotSection()
  3500. {
  3501. int state = 0;
  3502. log.Info("设置拍照放大倍数=" + MParam.Photograph_Magnification.ToString(), true);
  3503. Focusparam fprm = new Focusparam()
  3504. {
  3505. mag = MParam.Photograph_Magnification,
  3506. reduceWindowPos = new System.Drawing.Point(402, 128),
  3507. reduceWinHeight = 600,
  3508. reduceWinWidth = 600,
  3509. ScanSpeed = MParam.ScanSpeedFocus,
  3510. IfAutoBrightnessAndContrast = true,
  3511. delayTime = 500,
  3512. voltage = 7000,
  3513. Iprobe = 0.5f,
  3514. workingDis = 10,//unit mm
  3515. brightness = 50,
  3516. contrast = 29,
  3517. tiltCorrAngle = 36,
  3518. };
  3519. log.Info("自动对焦开始!", true);
  3520. Focus f = new Focus(fprm, iSEM);
  3521. f.DoFocus();
  3522. SendMsg("4-4");
  3523. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  3524. String fileName5 = data_path + "\\EDS\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName5;
  3525. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  3526. log.Info("fileName5=" + fileName5, true);
  3527. log.Info("开始拍摄截面照!");
  3528. PhotoParam phoPrm = new PhotoParam()
  3529. {
  3530. Mag = MParam.Photograph_Magnification,
  3531. savePath = fileName5,
  3532. scanSpeed = MParam.ScanSpeedHigh,
  3533. scanSpeedAfter = MParam.ScanSpeedNormal,
  3534. };
  3535. Photo pho = new Photo(phoPrm, iSEM);
  3536. pho.TakePhoto();
  3537. //判断是否停止进程
  3538. if (key_stop)
  3539. {
  3540. log.Info("停止键按下", true);
  3541. return false;
  3542. }
  3543. #endregion
  3544. if (MParam.Is_Photograph == false)//Is_Photograph 代表 是否是只拍照
  3545. {
  3546. #region 对当前矩形进行旋转校正
  3547. //8,计算切割面区域偏移角度及方向
  3548. float degree = 0;
  3549. int direction = 0;
  3550. ImagePro.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(MParam.SampleName), MParam.Firm, out degree, out direction, out state);
  3551. log.Info("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  3552. log.Info("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  3553. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  3554. if (state == 1)
  3555. {
  3556. //梯形角度
  3557. iSEM.SetScanRotationOn();
  3558. Thread.Sleep(200);
  3559. //20201128陈工要求,谭博返回角度*0.7
  3560. iSEM.SetScanRotation(Convert.ToSingle(degree * 0.7));
  3561. Thread.Sleep(200);
  3562. arg.State = true;
  3563. arg.Message = "图像接口返回角度为:" + degree.ToString();
  3564. log.Info(arg.Message);
  3565. }
  3566. else
  3567. {
  3568. arg.Message = "图像接口参数State返回值为零";
  3569. log.Error("测量线程报错:" + arg.Message, false);
  3570. }
  3571. //判断是否停止进程
  3572. if (key_stop)
  3573. {
  3574. log.Info("停止键按下", true);
  3575. return false;
  3576. }
  3577. Thread.Sleep(200);
  3578. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  3579. String fileName6 = data_path + "\\EDS\\" + MParam.Firm + "-" + MParam.Photograph_Magnification.ToString("0") + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-" + ImageName6;
  3580. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  3581. log.Info("fileName6=" + fileName6, true);
  3582. log.Info("纠正后拍照!");
  3583. PhotoParam phoprm = new PhotoParam()
  3584. {
  3585. Mag = MParam.Photograph_Magnification,
  3586. scanSpeed = MParam.ScanSpeedHigh,
  3587. scanSpeedAfter = MParam.ScanSpeedNormal,
  3588. savePath=fileName6,
  3589. };
  3590. Photo pho1 = new Photo(phoprm, iSEM);
  3591. pho1.TakePhoto();
  3592. if (key_stop)
  3593. {
  3594. log.Info("停止键按下", true);
  3595. return false;
  3596. }
  3597. #endregion
  3598. #region 获取两个位置上及放大倍数
  3599. //计算两个测量区域坐标
  3600. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  3601. List<float> mag = new List<float>();
  3602. System.Drawing.Point ct0;
  3603. float mag1, mag2, magMax;
  3604. log.Info("图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString(), true);
  3605. ImagePro.Img_Measure_Region_Position(fileName6, Convert.ToInt32(MParam.SampleName), MParam.Firm, out ct, out mag, out ct0, out state);
  3606. string s = "";
  3607. for (int i = 0; i < ct.Count; i++)
  3608. {
  3609. s += "输出观测点" + i.ToString() + "为(" + ct[i].X.ToString() + "," + ct[i].Y.ToString() + ")"
  3610. + "放大倍数=" + mag[i];
  3611. }
  3612. log.Info("测量线程:图像处理接口返回值为" + state.ToString() +
  3613. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  3614. "输入样品" + Convert.ToInt32(MParam.SampleName) +
  3615. "输入厂商" + MParam.Firm.ToString() +
  3616. s +
  3617. "输出对焦点为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  3618. #endregion
  3619. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  3620. {
  3621. Locate recordPostion = new Locate(iSEM);
  3622. recordPostion.RecordCurrentBeamShiftAndStagePosition();
  3623. //找到放大倍数最大值
  3624. magMax = mag[0];
  3625. for (int m = 1; m < mag.Count; m++)
  3626. {
  3627. if (mag[m] > magMax)
  3628. {
  3629. magMax = mag[m];
  3630. }
  3631. }
  3632. #region 移动到梯形左上角
  3633. //20201127将视野移动到梯形左上角位置
  3634. log.Warn("开始对焦 移动到对焦点( " + ct0.X.ToString()
  3635. + "," + ct0.Y.ToString() + ")", true);
  3636. //MoveToPix(ct0.X, ct0.Y);
  3637. LocateParam lprm = new LocateParam()
  3638. {
  3639. PositionX = ct0.X,
  3640. PositionY = ct0.Y,
  3641. PixelSize_Y_cur = MParam.PixelSizeCor ,
  3642. };
  3643. Locate loc = new Locate(lprm, iSEM);
  3644. loc.DoLocateByShiftBeam();
  3645. Focusparam fprm1 = new Focusparam()
  3646. {
  3647. mag = magMax / 4,
  3648. reduceWindowPos = new System.Drawing.Point(402, 128),
  3649. reduceWinHeight = 600,
  3650. reduceWinWidth = 600,
  3651. ScanSpeed = MParam.ScanSpeedFocus,
  3652. IfAutoBrightnessAndContrast = false,
  3653. delayTime = 500,
  3654. voltage = 7000,
  3655. Iprobe = 0.5f,
  3656. workingDis = 10 ,
  3657. brightness = 49.4f,
  3658. contrast = 30.1f,
  3659. tiltCorrAngle =36,
  3660. };
  3661. log.Info("自动对焦1开始!", true);
  3662. Focus f1 = new Focus(fprm1, iSEM);
  3663. f1.DoFocus();
  3664. log.Info("自动对焦2开始!", true);
  3665. f1.DoFocusByNewMagnification(magMax / 2);
  3666. #endregion
  3667. log.Warn("对焦完成,开始用能谱拍摄观测点照片!并分析图片以获得Xray点位置!");
  3668. recordPostion.RestoreLastBeamShiftAndStagePosition();
  3669. log.Warn("移动到指定观测点!并准备打Xray");
  3670. LocateParam locp = new LocateParam()
  3671. {
  3672. PositionX=ct[0].X ,
  3673. PositionY=ct[0].Y,
  3674. PixelSize_Y_cur =MParam.PixelSizeCor ,
  3675. };
  3676. Locate loc2 = new Locate(locp, iSEM);
  3677. loc2.DoLocateByShiftBeam();
  3678. SendMsg("4-4");//向界面发送指令:放大并对拍摄点对焦
  3679. //#endregion
  3680. Thread.Sleep(200);
  3681. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  3682. #region 拍照
  3683. log.Info("进入内部观察,不对焦!", true);
  3684. log.Info("开始拍照,设置放大倍数" + mag[0]);
  3685. if (!iSEM.SetMagnification(mag[0]))
  3686. {
  3687. log.Error("设置放大倍数失败", false);
  3688. return false;
  3689. }
  3690. Thread.Sleep(300 + Convert.ToInt32(cycle_time));
  3691. //add by zjx 2020-12-21 根据客户的需求修改图片的名称
  3692. String fileName7 = data_path + "\\EDS\\" + MParam.Firm + "-" + mag[0].ToString() + "-" + m_cutHoles[m_nWorkHoleNo].HoleName + "-0-" + ImageNameTwo_1;
  3693. //add by zjx 2020-12-21 根据客户的需求修改图片的名称 end
  3694. log.Info("fileName7=" + fileName7, true);
  3695. arg.Picture_Information.Picture_FullPath = fileName7;
  3696. arg.Picture_Information.Work_Status = "SEM";
  3697. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3698. Thread.Sleep(200);
  3699. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3700. Thread.Sleep(200);
  3701. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  3702. Thread.Sleep(200);
  3703. //拍照前改变速度,延时
  3704. iSEM.CmdLineScan();
  3705. Thread.Sleep(200);
  3706. cycle_time = iSEM.GetCycleTime();
  3707. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3708. log.Warn("EDS获取指定观测点图片,并打Xray");
  3709. DoEDS(m_nWorkHoleNo, m_cutHoles[m_nWorkHoleNo].HoleName, 1);
  3710. log.Info("像素扫描:CmdPixelScan");
  3711. iSEM.CmdPixelScan();
  3712. Thread.Sleep(200);
  3713. log.Info("改变刷新率 " + MParam.ScanSpeedNormal);
  3714. iSEM.CmdFocusScanSpeed(MParam.ScanSpeedNormal);//CmdFocusRate(4);
  3715. Thread.Sleep(200);
  3716. cycle_time = iSEM.GetCycleTime();
  3717. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3718. SendMsg("4-6");//向界面发生指令:采集能谱信息
  3719. }
  3720. #endregion
  3721. }
  3722. iSEM.SetTiltAngleOff();
  3723. Thread.Sleep(200);
  3724. iSEM.SetScanRotationOff();
  3725. Thread.Sleep(200);
  3726. iSEM.SetBeamShiftX(0);
  3727. Thread.Sleep(200);
  3728. iSEM.SetBeamShiftY(0);
  3729. Thread.Sleep(200);
  3730. //判断是否停止进程
  3731. return true;
  3732. }
  3733. /// <summary>
  3734. /// 19.能谱分析
  3735. /// </summary>
  3736. /// <returns></returns>
  3737. public bool EDS_Analysis()
  3738. {
  3739. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  3740. Locate lo = new Locate(iSEM);
  3741. lo.MoveZAxisByAbs(MParam.EDSZ);
  3742. //判断是否停止进程
  3743. if (key_stop)
  3744. {
  3745. log.Info("停止键按下", true);
  3746. return false;
  3747. }
  3748. SendMsg("4-0");
  3749. //2.角度改为54度
  3750. iSEM.SetScanRotationOff();
  3751. Thread.Sleep(200);
  3752. Focusparam focusPrm = new Focusparam()
  3753. {
  3754. voltage = 7000,
  3755. Iprobe = 0.5F,
  3756. IfAutoBrightnessAndContrast = true,
  3757. ScanSpeed = MParam.ScanSpeedHigh,
  3758. mag = 600,
  3759. reduceWindowPos = new System.Drawing.Point(256, 192),
  3760. reduceWinWidth = 400,
  3761. reduceWinHeight = 400,
  3762. workingDis = 10,//unit:mm
  3763. brightness = 50,
  3764. contrast = 29,
  3765. tiltCorrAngle =54,
  3766. };
  3767. Focus f = new Focus(focusPrm, iSEM);
  3768. f.DoFocus();
  3769. SendMsg("4-1");
  3770. log.Warn("开始梯形移到视野中心!");
  3771. if (!EDS_FindCross())
  3772. {
  3773. return false;
  3774. }
  3775. SendMsg("4-3");
  3776. //7.调用171步过程
  3777. log.Warn("开始打能谱图和打Xray!");
  3778. if (!EDS_ShotSection())
  3779. {
  3780. return false;
  3781. }
  3782. return true;
  3783. }
  3784. /// <summary>
  3785. /// 20.光束等复位
  3786. /// </summary>
  3787. public void BeamShiftReset()
  3788. {
  3789. iSEM.SetTiltAngleOff();
  3790. Thread.Sleep(200);
  3791. iSEM.SetScanRotationOff();
  3792. Thread.Sleep(200);
  3793. iSEM.SetBeamShiftX(0);
  3794. Thread.Sleep(200);
  3795. iSEM.SetBeamShiftY(0);
  3796. Thread.Sleep(200);
  3797. }
  3798. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  3799. #region 设置电压电流
  3800. public bool SetVoltageAndIPROBE()
  3801. {
  3802. log.Info("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + MParam.SampleName + " 类!", true);
  3803. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  3804. bool mRet_VoltageFlag = false;
  3805. bool mRet_ElecFlag = false;
  3806. if (MParam.SampleName == "4" || MParam.SampleName == "5")
  3807. {
  3808. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  3809. Thread.Sleep(500);
  3810. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  3811. Thread.Sleep(500);
  3812. }
  3813. else if (MParam.SampleName == "3")
  3814. {
  3815. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  3816. Thread.Sleep(500);
  3817. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  3818. Thread.Sleep(500);
  3819. }
  3820. else
  3821. {
  3822. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  3823. Thread.Sleep(500);
  3824. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  3825. Thread.Sleep(500);
  3826. }
  3827. if (!mRet_VoltageFlag) return false;
  3828. if (!mRet_ElecFlag) return false;
  3829. log.Info("测量线程:设置电压电流完成!", true);
  3830. return true;
  3831. }
  3832. #endregion
  3833. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  3834. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  3835. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  3836. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息
  3837. public void SaveMeasDataPic(String picFullPath, float Mag, float pixelsize)
  3838. {
  3839. try
  3840. {
  3841. using (System.Drawing.Image img = Image.FromFile(picFullPath))
  3842. {
  3843. Bitmap bmp = new Bitmap(img.Width, img.Height);
  3844. using (Graphics g = Graphics.FromImage(bmp))
  3845. {
  3846. g.DrawImage(img, 0, 0, img.Width, img.Height);
  3847. String str = "Mag:" + Mag.ToString("0") + "X\tPixelSize:" + (pixelsize * 1000000).ToString("0.00") + "um";
  3848. Font font = new Font("宋体", 16, FontStyle.Bold);
  3849. SolidBrush sbrush = new SolidBrush(Color.LimeGreen);
  3850. g.DrawString(str, font, sbrush, new PointF(40, img.Height - 30));
  3851. }
  3852. System.Drawing.Imaging.BitmapData bmpData = bmp.LockBits(new Rectangle(0, 0, bmp.Width, bmp.Height), System.Drawing.Imaging.ImageLockMode.ReadOnly, System.Drawing.Imaging.PixelFormat.Format8bppIndexed);
  3853. Bitmap newBitmap = new Bitmap(img.Width, img.Height, bmpData.Stride, System.Drawing.Imaging.PixelFormat.Format8bppIndexed, bmpData.Scan0);
  3854. String path = Path.GetDirectoryName(picFullPath) +
  3855. Path.GetFileNameWithoutExtension(picFullPath) +
  3856. "_Data" + Path.GetExtension(picFullPath);
  3857. newBitmap.SetResolution(1, 1);
  3858. newBitmap.Save(path);
  3859. }
  3860. }
  3861. catch
  3862. {
  3863. log.Error("在测量图上显示放大倍数和像素大小信息失败", false);
  3864. }
  3865. }
  3866. //add by zjx 2020-12-21 在测量图上显示放大倍数和像素大小等信息 end
  3867. }
  3868. }