Measure.cs 271 KB

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  1. //时间:20200610
  2. //作者:郝爽
  3. //功能:测量线程
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using System.Windows.Forms;
  10. using System.Threading;
  11. using System.IO;
  12. using System.Drawing;
  13. using System.Xml;
  14. using SmartSEMControl;
  15. using MeasureData;
  16. using FileManager;
  17. using WebManager;
  18. using OpenCvSharp;
  19. using DBManager;
  20. using Extender;
  21. using CookComputing.XmlRpc;
  22. using HOZProject.Helpers;
  23. namespace MeasureThread
  24. {
  25. #region 信息定义
  26. public delegate void ThreadStatusHandler(object sender, ThreadStatusEventArgs e); //声明委托
  27. public delegate void CutHolesStatusHandler(object sender, CutHolesStatusEventArgs e);
  28. //测量线程状态
  29. public class ThreadStatusEventArgs
  30. {
  31. //状态
  32. public Boolean State
  33. {
  34. get { return m_state; }
  35. set { m_state = value; }
  36. }
  37. private Boolean m_state;
  38. //时间
  39. public DateTime Time
  40. {
  41. get { return m_time; }
  42. set { m_time = value; }
  43. }
  44. private DateTime m_time;
  45. //步骤代码
  46. public String Step_Code
  47. {
  48. get { return step_Code; }
  49. set { step_Code = value; }
  50. }
  51. private String step_Code;
  52. //其他消息
  53. public String Message
  54. {
  55. get { return this.message; }
  56. set { this.message = value; }
  57. }
  58. private String message;
  59. //孔名
  60. public String HoleName
  61. {
  62. get { return this.holeName; }
  63. set { this.holeName = value; }
  64. }
  65. private String holeName;
  66. //图片信息
  67. public class PictureInformation
  68. {
  69. public String Picture_FullPath
  70. {
  71. get { return picture_FullPath; }
  72. set { picture_FullPath = value; }
  73. }
  74. private String picture_FullPath;
  75. public double Work_Voltage
  76. {
  77. get { return work_Voltage; }
  78. set { work_Voltage = value; }
  79. }
  80. private double work_Voltage;
  81. public double Magnification
  82. {
  83. get { return magnification; }
  84. set { magnification = value; }
  85. }
  86. private double magnification;
  87. public double Work_Distance
  88. {
  89. get { return work_Distance; }
  90. set { work_Distance = value; }
  91. }
  92. private double work_Distance;
  93. public String Work_Status
  94. {
  95. get { return work_Status; }
  96. set { work_Status = value; }
  97. }
  98. private String work_Status;
  99. }
  100. //图片信息实例类
  101. public PictureInformation Picture_Information
  102. {
  103. get { return picture_Information; }
  104. set { picture_Information = value; }
  105. }
  106. private PictureInformation picture_Information;
  107. //图像处理信息
  108. public class ImageInformation
  109. {
  110. public int Method_Name
  111. {
  112. get { return method_Name; }
  113. set { method_Name = value; }
  114. }
  115. private int method_Name;
  116. public Source_Img_Degree_Direction SIDD;
  117. public Cut_Position CP;
  118. public Cut_Success CS;
  119. public Trapezoid_Top_Center_Position TTCP;
  120. public Auto_Foucs AF;
  121. public Auto_Stigmatic AS;
  122. public Center_Position_OffsetAngle_Direction CPOD;
  123. public Measure_Size MS;
  124. public ImageInformation()
  125. {
  126. SIDD = new Source_Img_Degree_Direction();
  127. CP = new Cut_Position();
  128. CS = new Cut_Success();
  129. TTCP = new Trapezoid_Top_Center_Position();
  130. AF = new Auto_Foucs();
  131. AS = new Auto_Stigmatic();
  132. CPOD = new Center_Position_OffsetAngle_Direction();
  133. MS = new Measure_Size();
  134. }
  135. //1-计算原始图像偏移角度及方向
  136. public class Source_Img_Degree_Direction
  137. {
  138. public Boolean Is_Image = false;
  139. public double Degree
  140. {
  141. get { return degree; }
  142. set { degree = value; }
  143. }
  144. private double degree;
  145. public int Direction
  146. {
  147. get { return direction; }
  148. set { direction = value; }
  149. }
  150. private int direction;
  151. public int State
  152. {
  153. get { return state; }
  154. set { state = value; }
  155. }
  156. private int state;
  157. }
  158. //2-计算切割点位置
  159. public class Cut_Position
  160. {
  161. public Boolean Is_Image = false;
  162. public double Offsetx
  163. {
  164. get { return offsetx; }
  165. set { offsetx = value; }
  166. }
  167. private double offsetx;
  168. public double Offsety
  169. {
  170. get { return offsety; }
  171. set { offsety = value; }
  172. }
  173. private double offsety;
  174. public int State
  175. {
  176. get { return state; }
  177. set { state = value; }
  178. }
  179. private int state;
  180. }
  181. //3-是否切割成功
  182. public class Cut_Success
  183. {
  184. public Boolean Is_Image = false;
  185. public int State
  186. {
  187. get { return state; }
  188. set { state = value; }
  189. }
  190. private int state;
  191. }
  192. //4-计算切割后图像梯形区域上边中心点坐标
  193. public class Trapezoid_Top_Center_Position
  194. {
  195. public Boolean Is_Image = false;
  196. public double TopCenterX
  197. {
  198. get { return topCenterX; }
  199. set { topCenterX = value; }
  200. }
  201. private double topCenterX;
  202. public double TopCenterY
  203. {
  204. get { return topCenterY; }
  205. set { topCenterY = value; }
  206. }
  207. private double topCenterY;
  208. public int State
  209. {
  210. get { return state; }
  211. set { state = value; }
  212. }
  213. private int state;
  214. }
  215. //5-自动对焦
  216. public class Auto_Foucs
  217. {
  218. public Boolean Is_Image = true;
  219. public String Img_Path
  220. {
  221. get { return img_Path; }
  222. set { img_Path = value; }
  223. }
  224. private String img_Path;
  225. }
  226. //6-自动像闪
  227. public class Auto_Stigmatic
  228. {
  229. public Boolean Is_Image = true;
  230. public String Img_Path
  231. {
  232. get { return img_Path; }
  233. set { img_Path = value; }
  234. }
  235. private String img_Path;
  236. }
  237. //7-计算切割面区域中心坐标,以及偏移角度及方向
  238. public class Center_Position_OffsetAngle_Direction
  239. {
  240. public Boolean Is_Image = false;
  241. public double CenterX
  242. {
  243. get { return centerX; }
  244. set { centerX = value; }
  245. }
  246. private double centerX;
  247. public double CenterY
  248. {
  249. get { return centerY; }
  250. set { centerY = value; }
  251. }
  252. private double centerY;
  253. public double Degree
  254. {
  255. get { return degree; }
  256. set { degree = value; }
  257. }
  258. private double degree;
  259. public int Direction
  260. {
  261. get { return direction; }
  262. set { direction = value; }
  263. }
  264. private int direction;
  265. public int State
  266. {
  267. get { return state; }
  268. set { state = value; }
  269. }
  270. private int state;
  271. }
  272. //8-测量尺寸
  273. public class Measure_Size
  274. {
  275. public Boolean Is_Image = false;
  276. public int State
  277. {
  278. get { return state; }
  279. set { state = value; }
  280. }
  281. private int state;
  282. }
  283. }
  284. //图像处理信息实例类
  285. public ImageInformation Image_Information
  286. {
  287. get { return image_Information; }
  288. set { image_Information = value; }
  289. }
  290. private ImageInformation image_Information;
  291. public ThreadStatusEventArgs(string a_State)
  292. {
  293. picture_Information = new PictureInformation();
  294. image_Information = new ImageInformation();
  295. }
  296. }
  297. //切孔状态
  298. public class CutHolesStatusEventArgs
  299. {
  300. public string State
  301. {
  302. get { return m_state; }
  303. set { m_state = value; }
  304. }
  305. private string m_state;
  306. public string HoleName
  307. {
  308. get { return m_holeName; }
  309. set { m_holeName = value; }
  310. }
  311. private string m_holeName;
  312. public CutHolesStatusEventArgs(string a_state, string a_holeName)
  313. {
  314. this.m_state = a_state;
  315. this.m_holeName = a_holeName;
  316. }
  317. }
  318. #endregion
  319. public class Measure
  320. {
  321. #region 变量定义
  322. //Web接口类
  323. public WebResult wr = null;
  324. //SmartSEM远程路径
  325. public String RemoteELYPath = "";
  326. public String RemoteMLFPath = "";
  327. //扫描周期
  328. private float cycle_time = 0;
  329. //人工干预
  330. public int hand_intervene = 2;
  331. //样品台保护值
  332. public float X_Min = 0;
  333. public float X_Max = 0.13f;
  334. public float Y_Min = 0;
  335. public float Y_Max = 0.13f;
  336. public float Z_Min = 0;
  337. public float Z_Max = 0.05f;
  338. public float T_Min = -4;
  339. public float T_Max = 70;
  340. public float R_Min = -380;
  341. public float R_Max = 380;
  342. public float M_Min = 0;
  343. public float M_Max = 0.012f;
  344. public event ThreadStatusHandler SendThreadStatus; // 声明事件
  345. public event CutHolesStatusHandler SendCutHolesStatus; // 声明事件
  346. //定义一个全局的消息类
  347. ThreadStatusEventArgs arg = new ThreadStatusEventArgs("0-0");
  348. //全局只有一个fatorySEM
  349. static FactoryHardware factorySEM = FactoryHardware.Instance;
  350. ISEMControl iSEM = factorySEM.ISEM;
  351. //@的作用是不用转义字符\\只打一个就行
  352. const String ImageName0 = @"SEMStraighten.tif"; //传给客户,原始图像,为拉直操作
  353. const String ImageName1 = @"FIBStraighten.tif"; //传给客户,原始图像,为拉直操作
  354. //const String ImageName1 = @"SEMFindCutPostion.tif"; //传给客户,作水平校正
  355. const String ImageName2 = @"FIBCutPostion.tif";//传给客户,找到切割点
  356. const String ImageName31 = @"FIBBefore.tif";
  357. const String ImageName32 = @"FIBAfter.tif";
  358. const String ImageName4 = @"SEMTrapCP.tif";//传给客户,找到已经切割点
  359. const String ImageName5 = @"SEMDegreeTrap.tif";//传给客户,水平校正
  360. const String ImageName6 = @"SEMMagEnd.tif";//传给客户,测量层高
  361. const String ImageName7 = @"EDSImage.tif";//计算感兴趣的区域
  362. const String ImageName8 = @"SEMAfterMoveToPix.tif";//精确的位置移动后的图像
  363. const String ImageName9 = @"SEMBeforeMoveToPix.tif";//精确的位置移动后的图像
  364. const String ImageName10 = @"SEMTrapCPAfter.tif";//传给客户,找到已经切割点
  365. const String ImageName111 = @"SEMBeforeCut.tif";//切割前SEM拍照
  366. const String ImageName112 = @"SEMAfterCut.tif";//切割后SEM拍照
  367. const String ImageNameTwo_1 = @"SEMRegion.tif";//第一个测量区域拍照
  368. const String ImageNameTwo_2 = @"SEMTwoRegion.tif";//第二个测量区域拍照
  369. const String ImageNameTwo_11 = @"SEMOneRegionMove.tif";//第一个测量区域拍照
  370. const String ImageNameTwo_22 = @"SEMTwoRegionMove.tif";//第二个测量区域拍照
  371. const String MacoInsertPt = "GIS Insert.MLF"; //传入PT针
  372. const String MacoRetractPt = "GIS Retract.MLF"; //退出PT针
  373. const String MacoScanPic = "Scan picture.MLF";//一般质量抓图的宏
  374. const String MacoGoodPic = "Good picture.MLF";//高质量抓图的宏
  375. const String MacoExportTif = "Export TIFF.MLF";// 导出有标尺的图像,这个图像为使用工具SmartSEM工具的图像
  376. const String ElyDeposition = @"Deposition.ely"; //沉积
  377. const String ElyCrossSection = @"CrossSection.ely"; //切割
  378. const float fMin = (float)0.0000002; //单位是米
  379. const float fSateyZ = (float)0.03;//单位是米
  380. public Boolean key_stop = false;
  381. String focus_path = "";
  382. String FIBfocus_path = "";
  383. String StigX_path = "";
  384. String StigY_path = "";
  385. String EDS_path = "";
  386. String data_path = "";
  387. int m_nWorkHoleNo = -1;
  388. //测量文件
  389. private MeasureFile m_measureFile;
  390. public MeasureFile MeasureFile
  391. {
  392. get { return this.m_measureFile; }
  393. set { this.m_measureFile = value; }
  394. }
  395. //测量的切割孔,这个切孔的状态要保存的测量文件中去
  396. private List<MeasureData.CutHole> m_cutHoles;
  397. public List<MeasureData.CutHole> cutHoles
  398. {
  399. get { return this.m_cutHoles; }
  400. set { this.m_cutHoles = value; }
  401. }
  402. //工作文件夹
  403. private string m_WorkingFolder;
  404. public string WorkingFolder
  405. {
  406. get { return this.m_WorkingFolder; }
  407. set { this.m_WorkingFolder = value; }
  408. }
  409. //程序当前路径
  410. private string m_ProgramFolder = Directory.GetCurrentDirectory();
  411. //线程状态
  412. private ThreadStatus m_ThreadStatus;
  413. public ThreadStatus TStatus
  414. {
  415. get { return this.m_ThreadStatus; }
  416. set { this.m_ThreadStatus = value; }
  417. }
  418. #endregion
  419. //构造函数
  420. public Measure(String webServerIP, String webServerPort, String webServerUrl)
  421. {
  422. LogManager.AddHardwareLog("进入构造函数", true);
  423. TStatus = new ThreadStatus();
  424. cutHoles = new List<MeasureData.CutHole>();
  425. //配置远程连接
  426. wr = new WebResult(webServerIP,webServerPort,webServerUrl);
  427. }
  428. //初始化测量业务, 读测量文件,判断是否有可测试的切孔
  429. public bool InitMeas(MeasureFile a_measureFile)
  430. {
  431. LogManager.AddHardwareLog("进入初始化函数", true);
  432. m_measureFile = a_measureFile;
  433. List<CutHole> listHoles = m_measureFile.ListCutHole;
  434. foreach (CutHole h in listHoles)
  435. {
  436. if (h.SWITCH == true)
  437. {
  438. m_cutHoles.Add(h);
  439. }
  440. }
  441. if (m_cutHoles.Count == 0)
  442. return false;
  443. if (m_measureFile.MParam.EDS == true)
  444. {
  445. LogManager.AddHardwareLog("能谱分析", true);
  446. Init_MeasDB();
  447. }
  448. return true;
  449. }
  450. //给前台UI发送消息步骤
  451. public void SendMsg(string step_code)
  452. {
  453. arg.Step_Code = step_code;
  454. arg.Time = DateTime.Now;
  455. SendThreadStatus(this, arg);
  456. }
  457. //给前台UI发送孔状态信息
  458. public void SendCutHoleMsg(string a_state, string a_holeName)
  459. {
  460. CutHolesStatusEventArgs arg = new CutHolesStatusEventArgs(a_state, a_holeName);
  461. arg.HoleName = a_holeName;
  462. arg.State = a_state;
  463. SendCutHolesStatus(this, arg);
  464. }
  465. //测量流程
  466. public void DoMeasure()
  467. {
  468. //创建线程的测量状态的更新
  469. this.TStatus.ComputeTime(THREAD_TIME_TYPE.START);
  470. LogManager.AddHardwareLog("测量线程:开始测量",true);
  471. //检查硬件连接是否正常
  472. LogManager.AddHardwareLog("测量线程:连接硬件", true);
  473. if (!ConnectHardware())
  474. {
  475. MessageBox.Show("连接电镜失败!","重要错误",MessageBoxButtons.OK,MessageBoxIcon.Error);
  476. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  477. LogManager.AddHardwareLog("测量线程报错:连接硬件硬件连接失败", false);
  478. return;
  479. }
  480. //设置工作文件夹
  481. LogManager.AddHardwareLog("测量线程:设置工作文件夹", true);
  482. if (!SetWorkingFolderStr())
  483. {
  484. this.TStatus.ComputeTime(THREAD_TIME_TYPE.STOPPED);
  485. LogManager.AddHardwareLog("测量线程报错:设置文件夹失败", false);
  486. return;
  487. }
  488. //设置SmartSEM远程路径
  489. iSEM.SetRemoteELYPath(RemoteELYPath);
  490. iSEM.SetRemoteMLFPath(RemoteMLFPath);
  491. //增加EDS控制
  492. //将停止键复位
  493. key_stop = false;
  494. //开始测量就将模式设置为SEM
  495. LogManager.AddHardwareLog("测量线程:切换到SEM模式", true);
  496. if (!iSEM.CmdFIBModeSEM())
  497. {
  498. LogManager.AddHardwareLog("测量线程报错:开始切换到SEM模式失败。", false);
  499. return;
  500. }
  501. arg.Picture_Information.Work_Status = "SEM";
  502. //设置扫描周期
  503. LogManager.AddHardwareLog("测量线程:设置图像扫描周期为对焦周期", true);
  504. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  505. Thread.Sleep(200);
  506. cycle_time = iSEM.GetCycleTime();
  507. if (cycle_time == 0)
  508. {
  509. LogManager.AddHardwareLog("测量线程报错:获取扫描周期时间失败", false);
  510. return;
  511. }
  512. Thread.Sleep((int)cycle_time +100);
  513. //开始做各个孔的检测
  514. for (int i = 0; i < m_cutHoles.Count; i++)
  515. {
  516. //自动亮度对比度
  517. LogManager.AddHardwareLog("测量线程:开启自动亮度,对比度调节", true);
  518. iSEM.SetAutoBright(100);
  519. Thread.Sleep(200);
  520. iSEM.SetAutoContrast(100);
  521. Thread.Sleep(200);
  522. //LogManager.AddHardwareLog("SEM模式设置自动亮度调节目标50%,亮度调节目标30%", true);
  523. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  524. {
  525. LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  526. return;
  527. }
  528. Thread.Sleep(5000);
  529. LogManager.AddHardwareLog("测量线程:测试第"+i.ToString()+"个分析点。", true);
  530. //记录测量序号和孔名
  531. m_nWorkHoleNo = i;
  532. arg.HoleName = m_cutHoles[i].HoleName;
  533. //最终数据存放目录
  534. data_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName;
  535. //对焦数据存放目录
  536. focus_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\Focus";
  537. m_measureFile.MParam.AutoFocus.Path = focus_path;
  538. if (!Directory.Exists(focus_path))
  539. {
  540. Directory.CreateDirectory(focus_path);
  541. }
  542. //StigX数据存放目录
  543. StigX_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigX";
  544. m_measureFile.MParam.AutoStigX.Path = StigX_path;
  545. if (!Directory.Exists(StigX_path))
  546. {
  547. Directory.CreateDirectory(StigX_path);
  548. }
  549. //StigY数据存放目录
  550. StigY_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\StigY";
  551. m_measureFile.MParam.AutoStigY.Path = StigY_path;
  552. if (!Directory.Exists(StigY_path))
  553. {
  554. Directory.CreateDirectory(StigY_path);
  555. }
  556. //EDS数据存放路径
  557. if (m_measureFile.MParam.EDS == true)
  558. {
  559. EDS_path = WorkingFolder + "\\" + m_cutHoles[i].HoleName + "\\EDS";
  560. m_measureFile.MParam.EDSP.Path = EDS_path;
  561. if (!Directory.Exists(EDS_path))
  562. {
  563. Directory.CreateDirectory(EDS_path);
  564. }
  565. }
  566. //判断孔状态
  567. if (m_cutHoles[i].STATE != State.Ready)
  568. {
  569. LogManager.AddHardwareLog("测试孔"+ m_cutHoles[i].HoleName+"状态非就绪,不予测量。", true);
  570. continue;
  571. }
  572. //20201127增加Scanrotate Off
  573. iSEM.SetScanRotationOff();
  574. Thread.Sleep(200);
  575. //20.光束等复位
  576. iSEM.SetBeamShiftX(0);
  577. Thread.Sleep(200);
  578. iSEM.SetBeamShiftY(0);
  579. Thread.Sleep(200);
  580. //开始循环工作
  581. if (i == 0)
  582. {
  583. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName+"开始测量。", true);
  584. m_cutHoles[i].START = DateTime.Now;
  585. //切孔操作-开始
  586. m_cutHoles[i].STATE = State.InProcess;
  587. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  588. LogManager.AddHardwareLog("测量线程:控制样品台至样品分析点位置(R,X,Y,Z) = (" + m_cutHoles[0].Position.R.ToString() + ","
  589. + m_cutHoles[0].Position.X.ToString()+","
  590. + m_cutHoles[0].Position.Y.ToString()+","
  591. + m_cutHoles[0].Position.Z.ToString() + ")", true);
  592. #region 坐标恢复
  593. //0、先移动Z轴到比较低的位置上。
  594. if (m_measureFile.MParam.Title)//如果是倾斜样品台,移动Z轴
  595. {
  596. if (!iSEM.SetStageGotoZ(fSateyZ))
  597. {
  598. arg.State = false;
  599. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  600. SendMsg("1-0");
  601. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + fSateyZ.ToString(), false);
  602. m_cutHoles[i].STATE = State.Failed;
  603. m_cutHoles[i].END = DateTime.Now;
  604. m_measureFile.Save();
  605. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  606. Thread.Sleep(3000);
  607. continue;
  608. }
  609. while (true)
  610. {
  611. Thread.Sleep(4000);
  612. if (iSEM.GetStageIs() == 0)
  613. {
  614. break;
  615. }
  616. }
  617. //判断是否停止进程
  618. if (key_stop)
  619. {
  620. m_cutHoles[i].STATE = State.Failed;
  621. m_cutHoles[i].END = DateTime.Now;
  622. m_measureFile.Save();
  623. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  624. LogManager.AddHardwareLog("停止键被按下", true);
  625. return;
  626. }
  627. }
  628. //1、移动样品台到第一个观测点,先移动R轴,再移动XY轴
  629. if (!iSEM.SetStageGotoR(m_cutHoles[0].Position.R))
  630. {
  631. arg.State = false;
  632. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  633. SendMsg("1-0");
  634. LogManager.AddHardwareLog("测量线程报错:样品台R轴移动失败,R为" + m_cutHoles[0].Position.ToString(), false);
  635. m_cutHoles[i].STATE = State.Failed;
  636. m_cutHoles[i].END = DateTime.Now;
  637. m_measureFile.Save();
  638. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  639. Thread.Sleep(3000);
  640. continue;
  641. }
  642. while (true)
  643. {
  644. Thread.Sleep(4000);
  645. if (iSEM.GetStageIs() == 0)
  646. {
  647. break;
  648. }
  649. }
  650. //判断是否停止进程
  651. if (key_stop)
  652. {
  653. m_cutHoles[i].STATE = State.Failed;
  654. m_cutHoles[i].END = DateTime.Now;
  655. m_measureFile.Save();
  656. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  657. LogManager.AddHardwareLog("停止键被按下", true);
  658. return;
  659. }
  660. //2、移动XY轴
  661. if (!iSEM.MoveStageXY(m_cutHoles[0].Position.X, m_cutHoles[0].Position.Y))
  662. {
  663. arg.State = false;
  664. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  665. SendMsg("1-0");
  666. LogManager.AddHardwareLog("测量线程报错:样品台XY轴移动失败,(X,Y)为"
  667. + m_cutHoles[0].Position.X.ToString() + ","
  668. + m_cutHoles[0].Position.Y.ToString()+ ")", false);
  669. m_cutHoles[i].STATE = State.Failed;
  670. m_cutHoles[i].END = DateTime.Now;
  671. m_measureFile.Save();
  672. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  673. Thread.Sleep(3000);
  674. continue;
  675. }
  676. while (true)
  677. {
  678. Thread.Sleep(4000);
  679. if (iSEM.GetStageIs() == 0)
  680. {
  681. break;
  682. }
  683. }
  684. //判断是否停止进程
  685. if (key_stop)
  686. {
  687. m_cutHoles[i].STATE = State.Failed;
  688. m_cutHoles[i].END = DateTime.Now;
  689. m_measureFile.Save();
  690. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  691. LogManager.AddHardwareLog("停止键被按下", true);
  692. return;
  693. }
  694. //3、恢复Z轴
  695. if (m_measureFile.MParam.Title)
  696. {
  697. //恢复Z轴
  698. if (!iSEM.SetStageGotoZ(m_cutHoles[0].Position.Z))
  699. {
  700. arg.State = false;
  701. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  702. SendMsg("1-0");
  703. LogManager.AddHardwareLog("测量线程报错:样品台Z轴移动失败,Z为" + m_cutHoles[0].Position.Z.ToString(), false);
  704. m_cutHoles[i].STATE = State.Failed;
  705. m_cutHoles[i].END = DateTime.Now;
  706. m_measureFile.Save();
  707. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  708. Thread.Sleep(3000);
  709. continue;
  710. }
  711. while (true)
  712. {
  713. Thread.Sleep(4000);
  714. if (iSEM.GetStageIs() == 0)
  715. {
  716. break;
  717. }
  718. }
  719. //判断是否停止进程
  720. if (key_stop)
  721. {
  722. LogManager.AddHardwareLog("停止键按下。", true);
  723. m_cutHoles[i].STATE = State.Failed;
  724. m_cutHoles[i].END = DateTime.Now;
  725. m_measureFile.Save();
  726. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  727. return;
  728. }
  729. }
  730. arg.State = true;
  731. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  732. SendMsg("1-0");
  733. //4、设置WD
  734. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  735. Thread.Sleep(1000);
  736. #endregion
  737. //第一个点开始测量
  738. if (FirstHole())
  739. {
  740. //保存文件,将测量状态更改
  741. m_cutHoles[i].STATE = State.Success;
  742. m_cutHoles[i].END = DateTime.Now;
  743. m_measureFile.Save();
  744. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  745. }
  746. //失败
  747. else
  748. {
  749. m_cutHoles[i].STATE = State.Failed;
  750. m_cutHoles[i].END = DateTime.Now;
  751. m_measureFile.Save();
  752. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  753. }
  754. }
  755. else
  756. {
  757. //其他孔的测量
  758. LogManager.AddHardwareLog("测量线程:分析点" + m_cutHoles[i].HoleName + "开始测量。", true);
  759. m_cutHoles[i].START = DateTime.Now;
  760. m_cutHoles[i].STATE = State.InProcess;
  761. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  762. //其他孔测量之前的初始化
  763. if (!OtherHole_Init())
  764. {
  765. arg.State = false;
  766. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置失败。";
  767. SendMsg("1-0");
  768. Thread.Sleep(3000);
  769. LogManager.AddHardwareLog("测量线程:" + arg.Message, true);
  770. continue;
  771. }
  772. arg.State = true;
  773. arg.Message = "样品台移动到观测点:" + m_cutHoles[i] + "的位置成功。";
  774. SendMsg("1-0");
  775. //其他孔开始测量
  776. if (OtherHole())
  777. {
  778. //保存文件,将测量状态更改
  779. m_cutHoles[i].STATE = State.Success;
  780. m_cutHoles[i].END = DateTime.Now;
  781. m_measureFile.Save();
  782. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  783. }
  784. //失败
  785. else
  786. {
  787. m_cutHoles[i].STATE = State.Failed;
  788. m_cutHoles[i].END = DateTime.Now;
  789. m_measureFile.Save();
  790. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  791. }
  792. }
  793. if(key_stop)
  794. {
  795. m_cutHoles[i].END = DateTime.Now;
  796. m_cutHoles[i].STATE = State.Ready;
  797. m_measureFile.Save();
  798. SendCutHoleMsg(((int)m_cutHoles[i].STATE).ToString(), m_cutHoles[i].HoleName);
  799. arg.Message = "用户停止测量";
  800. SendMsg("0-0");
  801. break;
  802. }
  803. //两个点之间更换,加延时以便完成显示
  804. Thread.Sleep(3000);
  805. }
  806. }
  807. //检查硬件连接是否正常
  808. public bool ConnectHardware()
  809. {
  810. //返回硬件的连接状态
  811. return iSEM.ConnectStatus();
  812. }
  813. //设置工作文件夹
  814. public bool SetWorkingFolderStr()
  815. {
  816. WorkingFolder = m_measureFile.FilePath;
  817. return true;
  818. }
  819. //插入PT针
  820. public bool InsertPT()
  821. {
  822. string fn = m_ProgramFolder + "\\Macro\\" + MacoInsertPt;
  823. //SendMsg("调用宏插入PT针宏文件" + fn);
  824. iSEM.CMDMCFFilename(fn);
  825. //延时1s??
  826. Thread.Sleep(1000);
  827. return true;
  828. }
  829. //撤出PT针
  830. public bool RetractPT()
  831. {
  832. string fn = m_ProgramFolder + "\\Macro\\" + MacoRetractPt;
  833. //SendMsg("调用宏撤出PT针宏文件" + fn);
  834. iSEM.CMDMCFFilename(fn);
  835. //延时1s??
  836. Thread.Sleep(1000);
  837. return true;
  838. }
  839. //PT沉积
  840. public bool PTWork()
  841. {
  842. //执行PT沉积的ELY文件
  843. if (!ExcuteEly(m_measureFile.MParam.PTTemp))
  844. {
  845. return false;
  846. }
  847. //等待沉积完成
  848. while (true)
  849. {
  850. Thread.Sleep(7000);
  851. if (iSEM.GetFIBMode() == 0)
  852. {
  853. break;
  854. }
  855. }
  856. return true;
  857. }
  858. //FIB切割
  859. public bool FIBWork()
  860. {
  861. //执行PT沉积的ELY文件
  862. if (!ExcuteEly(m_measureFile.MParam.FIBTemp))
  863. {
  864. return false;
  865. }
  866. //等待切割完成
  867. while (true)
  868. {
  869. Thread.Sleep(10000);
  870. if (iSEM.GetFIBMode() == 0)
  871. {
  872. break;
  873. }
  874. }
  875. return true;
  876. }
  877. //执行ELY文件的步骤
  878. public bool ExcuteEly(string a_filename)
  879. {
  880. //执行ELy文件有三个动作
  881. //1. 选择ELY文件
  882. //SendMsg("选择ELY文件");
  883. if (!iSEM.CmdFIBLoadELY(a_filename))
  884. {
  885. //SendMsg("选择ELY文件失败");
  886. return false;
  887. }
  888. Thread.Sleep(1000);
  889. //2. 确认ELY文件
  890. //SendMsg("确认ELY文件");
  891. if (!iSEM.CmdFIBEXPOSUREELY())
  892. {
  893. //SendMsg("确认ELY文件失败");
  894. return false;
  895. }
  896. Thread.Sleep(1000);
  897. //3. 执行ELY文件
  898. //SendMsg("执行ELY文件");
  899. if (!iSEM.CmdFIBSTARTELY())
  900. {
  901. //SendMsg("执行ELY文件失败");
  902. return false;
  903. }
  904. Thread.Sleep(1000);
  905. return true;
  906. }
  907. /// <summary>
  908. ///13. 自动 定位功能,沉积
  909. /// </summary>
  910. /// <returns></returns>
  911. public bool GetPoistion()
  912. {
  913. float x0 = 0, y0 = 0, x1 = 0, y1 = 0, x2 = 0, y2 = 0, px = 0;
  914. int state = 1;
  915. LogManager.AddHardwareLog("测量线程:13.自动定位、沉积-功能自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString(), true);
  916. Thread.Sleep(200);
  917. //1.控制SEM放大600X
  918. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  919. {
  920. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  921. arg.State = false;
  922. SendMsg("1-6");
  923. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位电压" + m_measureFile.MParam.Location_Voltage.ToString() + "控制失败", false);
  924. return false;
  925. }
  926. Thread.Sleep(200);
  927. if (!iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification))
  928. {
  929. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍失败";
  930. arg.State = false;
  931. SendMsg("1-6");
  932. LogManager.AddHardwareLog("测量线程报错:13.自动定位、沉积-自动定位放大倍数" + m_measureFile.MParam.Location_Magnification.ToString() + "控制失败", false);
  933. return false;
  934. }
  935. float current = iSEM.GetMagnification();
  936. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  937. {
  938. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  939. Thread.Sleep(200);
  940. current = iSEM.GetMagnification();
  941. }
  942. arg.State = true;
  943. arg.Message = "放大" + m_measureFile.MParam.Location_Magnification.ToString("0.0") + "倍成功";
  944. SendMsg("1-6");
  945. //判断是否停止进程
  946. if (key_stop)
  947. {
  948. LogManager.AddHardwareLog("停止键按下。", true);
  949. return false;
  950. }
  951. //判断是否为仅拍照,不是则执行FIB操作
  952. if (!m_measureFile.MParam.Is_Photograph)
  953. {
  954. LogManager.AddHardwareLog("测量线程:切换到FIB模式。", true);
  955. //6.设置FIB拍照参数——扫描时间、束流等
  956. //7.控制FIB自动亮度、对比度
  957. Thread.Sleep(200);
  958. if (!iSEM.CmdFIBModeFIB())
  959. {
  960. arg.Message = "FIB模式切换失败";
  961. arg.State = false;
  962. SendMsg("1-8");
  963. LogManager.AddHardwareLog("测量线程报错:切换到FIB模式失败。", false);
  964. return false;
  965. }
  966. arg.State = true;
  967. arg.Picture_Information.Work_Status = "FIB";
  968. arg.Message = "FIB模式切换成功";
  969. SendMsg("1-8");
  970. Thread.Sleep(1000);
  971. //判断是否停止进程
  972. if (key_stop)
  973. {
  974. LogManager.AddHardwareLog("停止键按下。", true);
  975. return false;
  976. }
  977. //8.控制FIB拍照
  978. //9.保存照片======更改路径
  979. //20201103,FIB使用定位的放大倍数
  980. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Location_Magnification.ToString("0") + "_" + ImageName2;
  981. arg.Picture_Information.Picture_FullPath = fileName2;
  982. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  983. Thread.Sleep(200);
  984. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  985. Thread.Sleep(200);
  986. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  987. Thread.Sleep(200);
  988. //FIB的放大位数,将来会改
  989. LogManager.AddHardwareLog("测量线程:设置FIB放大倍数"+ m_measureFile.MParam.Location_Magnification.ToString(), true);
  990. //20201103,FIB使用定位的放大倍数
  991. if (!iSEM.SetFIBMagnification(m_measureFile.MParam.Location_Magnification))
  992. {
  993. arg.Message = "FIB放大倍数设置失败";
  994. arg.State = false;
  995. SendMsg("1-9");
  996. LogManager.AddHardwareLog("测量线程失败:FIB放大倍数设置失败。", false);
  997. return false;
  998. }
  999. arg.Message = "FIB放大倍数设置成功";
  1000. arg.State = true;
  1001. SendMsg("1-9");
  1002. Thread.Sleep(200);
  1003. //判断是否停止进程
  1004. if (key_stop)
  1005. {
  1006. LogManager.AddHardwareLog("停止键按下。", true);
  1007. return false;
  1008. }
  1009. //4、设置WD
  1010. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  1011. Thread.Sleep(1000);
  1012. //20201127增加自动亮度对比度
  1013. if(m_measureFile.MParam.FIBDo)
  1014. {
  1015. if(m_measureFile.MParam.FIBAutoBC)
  1016. {
  1017. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1018. float m_TempBrightness = 50.0f;
  1019. float m_TempContrast = 30.0f;
  1020. if (m_measureFile.MParam.SampleName == "3")
  1021. {
  1022. m_TempBrightness = 50.0f;
  1023. m_TempContrast = 30.0f;
  1024. iSEM.SetAutoVideoOff();
  1025. Thread.Sleep(200);
  1026. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1027. Thread.Sleep(200);
  1028. iSEM.SetContrast(m_TempContrast); //30.0f
  1029. Thread.Sleep(200);
  1030. }
  1031. else //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1032. {
  1033. iSEM.SetAutoVideoBrightnessAndContrast();
  1034. //20201128陈工建议增加
  1035. Thread.Sleep(200);
  1036. iSEM.SetAutoBright(100);
  1037. Thread.Sleep(200);
  1038. iSEM.SetAutoContrast(100);
  1039. Thread.Sleep(5000);
  1040. }
  1041. }
  1042. else
  1043. {
  1044. iSEM.SetAutoVideoOff();
  1045. Thread.Sleep(200);
  1046. iSEM.SetBrightness(m_measureFile.MParam.FIBB);
  1047. Thread.Sleep(200);
  1048. iSEM.SetContrast(m_measureFile.MParam.FIBC);
  1049. Thread.Sleep(200);
  1050. }
  1051. }
  1052. //拍照前改变速度,延时
  1053. iSEM.CloseReduced();
  1054. Thread.Sleep(200);
  1055. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1056. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1057. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1058. Thread.Sleep(200);
  1059. cycle_time = iSEM.GetCycleTime();
  1060. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1061. if (!GetImage(fileName2))
  1062. {
  1063. arg.Message = "FIB拍照失败";
  1064. arg.State = false;
  1065. SendMsg("1-11");
  1066. LogManager.AddHardwareLog("测量线程报错:FIB拍照失败。", false);
  1067. return false;
  1068. }
  1069. arg.State = true;
  1070. arg.Picture_Information.Picture_FullPath = fileName2;
  1071. arg.Message = "FIB拍照成功";
  1072. SendMsg("1-11");
  1073. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1074. Thread.Sleep(200);
  1075. cycle_time = iSEM.GetCycleTime();
  1076. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1077. //判断是否停止进程
  1078. if (key_stop)
  1079. {
  1080. LogManager.AddHardwareLog("停止键按下。", true);
  1081. return false;
  1082. }
  1083. iSEM.CmdFIBModeSEM();
  1084. Thread.Sleep(200);
  1085. //10.将照片传给客户,返回梯形位置坐标,及样品类型参数(是否需要PT沉积,PT坐标位置,PT宽度、PT高度、梯形上、下边及深度、扫描时间、束流、样品放大倍数1、样品放大倍数2等切割参数)
  1086. LogManager.AddHardwareLog("测量线程:调用图像处理接口,准备移动样品台", true);
  1087. LogManager.AddHardwareLog("文件名=" + fileName2, true);
  1088. LogManager.AddHardwareLog("样品类型=" + m_measureFile.MParam.SampleName, true);
  1089. LogManager.AddHardwareLog("供应商名称=" + m_measureFile.MParam.Firm, true);
  1090. wr.Img_Cut_Position(fileName2, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x1, out y1, out x2, out y2, out state);
  1091. LogManager.AddHardwareLog("FIB梯形左上角和右上角位置信息= (" + x1.ToString() + ", " + y1.ToString() + "), (" + x2.ToString() + ", " + y2.ToString()+")", true);
  1092. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1093. if (state == 1)
  1094. {
  1095. //20201128将移动光束改为移动ely文件中的参数来实现沉积和切割
  1096. float xc = (x1 + x2)/2;
  1097. float yc = (y1 + y2)/2;
  1098. x0 = xc - 512;
  1099. y0 = 384 - yc;
  1100. LogManager.AddHardwareLog("移动像素 x = " + x0.ToString() + ",y=" + y0.ToString(), true);
  1101. px = iSEM.GetPixelSize();
  1102. //修改FIB切割的ELY文件坐标
  1103. XmlDocument xmlDoc = new XmlDocument();
  1104. xmlDoc.Load(m_measureFile.MParam.FIBTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1105. XmlNode xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/TRAPEZOID");
  1106. if (xns != null)
  1107. {
  1108. XmlAttributeCollection attributeCol = xns.Attributes;
  1109. //遍历自己点属性
  1110. double width_a = Convert.ToDouble(attributeCol.GetNamedItem("width_a").Value) / 2.0;
  1111. LogManager.AddHardwareLog("XML-Width_a = " + width_a.ToString(), true);
  1112. foreach (XmlAttribute attri in attributeCol)
  1113. {
  1114. if (attri.Name == "x")
  1115. {
  1116. attri.InnerText = ((x0 * px)*1000000 - width_a).ToString();
  1117. LogManager.AddHardwareLog("XML-TopLeft-X = " + attri.InnerText, true);
  1118. }
  1119. else if (attri.Name == "y")
  1120. {
  1121. attri.InnerText = ((y0 * px)*1000000-2.791).ToString();
  1122. LogManager.AddHardwareLog("XML-TopLeft-Y = " + attri.InnerText, true);
  1123. }
  1124. }
  1125. }
  1126. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1127. if (xns != null)
  1128. {
  1129. XmlAttributeCollection attributeCol = xns.Attributes;
  1130. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1131. //遍历自己点属性
  1132. foreach (XmlAttribute attri in attributeCol)
  1133. {
  1134. if (attri.Name == "x")
  1135. {
  1136. attri.InnerText = ((x0 * px)*1000000 - width).ToString();
  1137. }
  1138. else if (attri.Name == "y")
  1139. {
  1140. attri.InnerText = (((y0 * px) *1000000) + 2 - 2.791).ToString();
  1141. }
  1142. }
  1143. }
  1144. xmlDoc.Save(m_measureFile.MParam.FIBTemp);//保存的该XML文件,否则更新无效
  1145. //判断是否需要PT沉积,如果需要也要修改PT的ELY文件
  1146. if (m_measureFile.MParam.PT)
  1147. {
  1148. xmlDoc = new XmlDocument();
  1149. xmlDoc.Load(m_measureFile.MParam.PTTemp);//加载baixml文件,xmlpath 为XML文件的路径du
  1150. xns = xmlDoc.SelectSingleNode("ELAYOUT/STRUCTURE_LIST/STRUCTURE/LAYER_REFERENCE/RECT");
  1151. if (xns != null)
  1152. {
  1153. XmlAttributeCollection attributeCol = xns.Attributes;
  1154. double width = Convert.ToDouble(attributeCol.GetNamedItem("width").Value) / 2.0;
  1155. //因为ELY文件里的矩形高就是负值,所以在下面的Y值加上这个值就好。
  1156. double height = Convert.ToDouble(attributeCol.GetNamedItem("height").Value) / 1.5;
  1157. //遍历自己点属性
  1158. foreach (XmlAttribute attri in attributeCol)
  1159. {
  1160. if (attri.Name == "x")
  1161. {
  1162. attri.InnerText = ((x0 * px) * 1000000 - width).ToString();
  1163. }
  1164. else if (attri.Name == "y")
  1165. {
  1166. attri.InnerText = ((y0 * px) * 1000000 - 2.791 - height).ToString();
  1167. }
  1168. }
  1169. }
  1170. xmlDoc.Save(m_measureFile.MParam.PTTemp);
  1171. }
  1172. if (hand_intervene == 1)
  1173. {
  1174. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1175. }
  1176. }
  1177. else
  1178. {
  1179. arg.Message = "图像接口参数state返回值为零";
  1180. arg.State = false;
  1181. SendMsg("1-12");
  1182. if (hand_intervene == 1)
  1183. {
  1184. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1185. {
  1186. return false;
  1187. }
  1188. }
  1189. else
  1190. {
  1191. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1192. return false;
  1193. }
  1194. LogManager.AddHardwareLog("测量线程报错:自动定位图像接口返回0", false);
  1195. return false;
  1196. }
  1197. //判断是否停止进程
  1198. if (key_stop)
  1199. {
  1200. LogManager.AddHardwareLog("停止键按下", true);
  1201. return false;
  1202. }
  1203. //11.自动工具样品类型参数确定是否需要PT沉积
  1204. if (m_measureFile.MParam.PT)
  1205. {
  1206. if (!iSEM.CmdFIBModeFIB())
  1207. {
  1208. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1209. return false;
  1210. }
  1211. Thread.Sleep(200);
  1212. //12.根据样品类型参数确定是否需要PT沉积,控制PT针插入
  1213. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1214. {
  1215. LogManager.AddHardwareLog("测量线程:插入PT针" + arg.Message, true);
  1216. if (!InsertPT())
  1217. {
  1218. arg.Message = "插入PT针失败";
  1219. arg.State = false;
  1220. SendMsg("1-13");
  1221. LogManager.AddHardwareLog("测量线程报错:"+ arg.Message, false);
  1222. return false;
  1223. }
  1224. arg.State = true;
  1225. arg.Message = "插入PT针成功";
  1226. SendMsg("1-13");
  1227. }
  1228. //判断是否停止进程
  1229. if (key_stop)
  1230. {
  1231. LogManager.AddHardwareLog("停止键按下", true);
  1232. return false;
  1233. }
  1234. //3. 根据坐标进行PT沉积
  1235. if (!PTWork())
  1236. {
  1237. arg.Message = "PT沉积失败";
  1238. arg.State = false;
  1239. SendMsg("1-14");
  1240. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1241. return false;
  1242. }
  1243. arg.State = true;
  1244. arg.Message = "PT沉积成功";
  1245. SendMsg("1-14");
  1246. //判断是否停止进程
  1247. if (key_stop)
  1248. {
  1249. LogManager.AddHardwareLog("停止键按下", true);
  1250. return false;
  1251. }
  1252. //15.根据样品类型决定是否撤出PT针
  1253. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.PT == true)
  1254. {
  1255. if (!RetractPT())
  1256. {
  1257. arg.Message = "撤出PT针失败";
  1258. arg.State = false;
  1259. SendMsg("1-15");
  1260. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1261. return false;
  1262. }
  1263. arg.State = true;
  1264. arg.Message = "撤出PT针成功";
  1265. SendMsg("1-15");
  1266. }
  1267. //判断是否停止进程
  1268. if (key_stop)
  1269. {
  1270. LogManager.AddHardwareLog("停止键按下", true);
  1271. return false;
  1272. }
  1273. if (!iSEM.CmdFIBModeSEM())
  1274. {
  1275. //arg.Message = "切割前SEM拍照失败。";
  1276. //arg.State = false;
  1277. //SendMsg("1-17");
  1278. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1279. return false;
  1280. }
  1281. }
  1282. }
  1283. //14.保存样品1第1号孔中心位置6轴坐标1 XYZMRT到数据库,保存客户返回值信息到数据库
  1284. float[] firstPosition = iSEM.GetStagePosition();
  1285. m_cutHoles[0].Position.X = firstPosition[0];
  1286. m_cutHoles[0].Position.Y = firstPosition[1];
  1287. m_cutHoles[0].Position.Z = firstPosition[2];
  1288. m_cutHoles[0].Position.T = firstPosition[3];
  1289. m_cutHoles[0].Position.R = firstPosition[4];
  1290. m_cutHoles[0].Position.M = firstPosition[5];
  1291. //这里要调用文件保存功能
  1292. arg.Message = "坐标1(" + firstPosition[0].ToString() + ","
  1293. + firstPosition[1].ToString() + ","
  1294. + firstPosition[2].ToString() + ","
  1295. + firstPosition[3].ToString() + ","
  1296. + firstPosition[4].ToString() + ","
  1297. + firstPosition[5].ToString() + ")";
  1298. arg.State = true;
  1299. SendMsg("1-16");
  1300. //判断是否停止进程
  1301. if (key_stop)
  1302. {
  1303. LogManager.AddHardwareLog("停止键按下", true);
  1304. return false;
  1305. }
  1306. return true;
  1307. }
  1308. /// <summary>
  1309. /// 14. FIB切割
  1310. /// </summary>
  1311. /// <returns></returns>
  1312. public bool FIBCross()
  1313. {
  1314. int state = 0;
  1315. #if CHECK
  1316. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1317. if (mag < 200)
  1318. {
  1319. mag = 200;
  1320. }
  1321. String fileName1 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName111;
  1322. iSEM.SetMagnification(mag);
  1323. Thread.Sleep(2000);
  1324. iSEM.CmdSaveRate();
  1325. Thread.Sleep(200);
  1326. cycle_time = iSEM.GetCycleTime();
  1327. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1328. if (!GetImage(fileName1))
  1329. {
  1330. arg.Message = "切割前SEM拍照失败。";
  1331. arg.State = false;
  1332. SendMsg("1-17");
  1333. LogManager.AddHardwareLog("测量线程报错:SEM切割前图像拍照失败", false);
  1334. return false;
  1335. }
  1336. iSEM.CmdFocusRate();
  1337. Thread.Sleep(200);
  1338. cycle_time = iSEM.GetCycleTime();
  1339. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1340. arg.Message = "切割前SEM拍照成功。";
  1341. arg.Picture_Information.Picture_FullPath = fileName1;
  1342. arg.State = true;
  1343. SendMsg("1-17");
  1344. #endif
  1345. if (!iSEM.CmdFIBModeFIB())
  1346. {
  1347. arg.Message = "切换到FIB模式失败。";
  1348. arg.State = false;
  1349. SendMsg("1-18");
  1350. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1351. return false;
  1352. }
  1353. arg.Message = "切换到FIB模式成功。";
  1354. arg.State = true;
  1355. SendMsg("1-18");
  1356. Thread.Sleep(1000);
  1357. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1358. float current = iSEM.GetMagnification();
  1359. while (Math.Abs(current - m_measureFile.MParam.Location_Magnification) > 1)
  1360. {
  1361. iSEM.SetMagnification(m_measureFile.MParam.Location_Magnification);
  1362. Thread.Sleep(200);
  1363. current = iSEM.GetMagnification();
  1364. }
  1365. Thread.Sleep(2000);
  1366. //14.自动控制FIB切割
  1367. //1.根据参数设置FIB草率时间(使图清晰),设置梯形上下边及深度、设置束流
  1368. //2.控制FIB进行切割
  1369. //以上1、2步全部用ELY文件代替
  1370. if (!FIBWork())
  1371. {
  1372. arg.Message = "FIB切割失败";
  1373. arg.State = false;
  1374. SendMsg("1-19");
  1375. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1376. return false;
  1377. }
  1378. arg.State = true;
  1379. arg.Message = "FIB切割成功";
  1380. SendMsg("1-19");
  1381. Thread.Sleep(300);
  1382. //判断是否停止进程
  1383. if (key_stop)
  1384. {
  1385. LogManager.AddHardwareLog("停止键按下", true);
  1386. return false;
  1387. }
  1388. //做切割后SEM的拍照
  1389. LogManager.AddHardwareLog("测量线程:切割后SEM拍照", true);
  1390. if (!iSEM.CmdFIBModeSEM())
  1391. {
  1392. //arg.Message = "切割后SEM拍照失败。";
  1393. //arg.State = false;
  1394. //SendMsg("1-20");
  1395. LogManager.AddHardwareLog("测量线程报错:切换到SEM模式失败", false);
  1396. return false;
  1397. }
  1398. Thread.Sleep(1000);
  1399. #if CHECK
  1400. String fileName2 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName112;
  1401. iSEM.SetMagnification(mag);
  1402. Thread.Sleep(2000);
  1403. iSEM.CmdSaveRate();
  1404. Thread.Sleep(200);
  1405. cycle_time = iSEM.GetCycleTime();
  1406. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1407. if (!GetImage(fileName2))
  1408. {
  1409. arg.Message = "切割后SEM拍照失败。";
  1410. arg.State = false;
  1411. SendMsg("1-20");
  1412. LogManager.AddHardwareLog("测量线程报错:SEM切割后图像拍照失败", false);
  1413. return false;
  1414. }
  1415. arg.Picture_Information.Picture_FullPath = fileName2;
  1416. arg.Message = "切割后SEM拍照成功。";
  1417. arg.State = true;
  1418. SendMsg("1-20");
  1419. iSEM.CmdFocusRate();
  1420. Thread.Sleep(200);
  1421. cycle_time = iSEM.GetCycleTime();
  1422. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1423. //5.验证切割准确性:与切割前对比,如果对比误差大,则停止自动执行,进行报警
  1424. wr.Img_Cut_Success(fileName1, fileName2, out state);
  1425. LogManager.AddHardwareLog("测量线程:验证切割准确性,切割前图像:"+ fileName1 + "切割后图像" + fileName2 + "返回值为" + state.ToString(), true);
  1426. if (state == 0)
  1427. {
  1428. LogManager.AddHardwareLog("测量线程报错:验证切割准确性失败,图像接口参数state返回值为零。", false);
  1429. arg.Message = "图像接口参数state返回值为零";
  1430. arg.State = false;
  1431. SendMsg("1-22");
  1432. if (hand_intervene == 1)
  1433. {
  1434. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1435. {
  1436. return false;
  1437. }
  1438. }
  1439. else
  1440. {
  1441. return false;
  1442. }
  1443. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1444. }
  1445. arg.State = true;
  1446. LogManager.AddHardwareLog("验证切割准确性成功。", true);
  1447. arg.Message = "FIB切割校验成功";
  1448. SendMsg("1-22");
  1449. //判断是否停止进程
  1450. if (key_stop)
  1451. {
  1452. LogManager.AddHardwareLog("停止键按下。", true);
  1453. return false;
  1454. }
  1455. #endif
  1456. return true;
  1457. }
  1458. /// <summary>
  1459. /// 16.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  1460. /// </summary>
  1461. /// <returns></returns>
  1462. public bool FindCross()
  1463. {
  1464. float x2 = 0, y2 = 0;
  1465. int state = 0;
  1466. //切换到SEM模式
  1467. if (!iSEM.CmdFIBModeSEM())
  1468. {
  1469. arg.Message = "SEM模式切换失败";
  1470. arg.State = false;
  1471. SendMsg("1-23");
  1472. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1473. return false;
  1474. }
  1475. arg.State = true;
  1476. arg.Message = "SEM模式切换成功";
  1477. SendMsg("1-23");
  1478. arg.Picture_Information.Work_Status = "SEM";
  1479. Thread.Sleep(1000);
  1480. //判断是否停止进程
  1481. if (key_stop)
  1482. {
  1483. LogManager.AddHardwareLog("停止键按下", true);
  1484. return false;
  1485. }
  1486. //1.控制SEM放大到300倍
  1487. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Location_Voltage))
  1488. {
  1489. arg.Message = "电压设置" + m_measureFile.MParam.Location_Voltage.ToString("0.0") + "失败";
  1490. arg.State = false;
  1491. SendMsg("1-24");
  1492. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1493. return false;
  1494. }
  1495. Thread.Sleep(200);
  1496. //iSEM.SetAutoVideoBrightnessAndContrast();
  1497. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1498. float m_TempBrightness = 50.0f;
  1499. float m_TempContrast = 30.0f;
  1500. if (m_measureFile.MParam.SampleName == "3")
  1501. {
  1502. m_TempBrightness = 48.0f;
  1503. m_TempContrast = 29.0f;
  1504. }
  1505. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1506. iSEM.SetAutoVideoOff();
  1507. Thread.Sleep(200);
  1508. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1509. Thread.Sleep(200);
  1510. iSEM.SetContrast(m_TempContrast); //30.0f
  1511. Thread.Sleep(2000);
  1512. float mag = m_measureFile.MParam.Location_Magnification / 3;
  1513. if (mag < 200)
  1514. {
  1515. //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1516. if (m_measureFile.MParam.SampleName == "3")
  1517. mag = 400;
  1518. else //add by sun 2020-12-17 设置找梯形照片的放大倍数为400,原来设置成200容易识别错乱
  1519. mag = 200;
  1520. }
  1521. if (!iSEM.SetMagnification(mag))
  1522. {
  1523. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  1524. arg.State = false;
  1525. SendMsg("1-24");
  1526. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1527. return false;
  1528. }
  1529. Thread.Sleep(200);
  1530. float current = iSEM.GetMagnification();
  1531. Thread.Sleep(200);
  1532. while (Math.Abs(current - mag) > 2)
  1533. {
  1534. iSEM.SetMagnification(mag);
  1535. Thread.Sleep(200);
  1536. current = iSEM.GetMagnification();
  1537. Thread.Sleep(200);
  1538. }
  1539. arg.State = true;
  1540. arg.Message = "放大" + mag.ToString("0.0") + "倍成功";
  1541. SendMsg("1-24");
  1542. Thread.Sleep(2000);
  1543. //判断是否停止进程
  1544. if (key_stop)
  1545. {
  1546. LogManager.AddHardwareLog("停止键按下", true);
  1547. return false;
  1548. }
  1549. //3.控制SEM拍照
  1550. String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName4;
  1551. arg.Picture_Information.Picture_FullPath = fileName4;
  1552. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1553. Thread.Sleep(200);
  1554. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1555. Thread.Sleep(200);
  1556. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1557. Thread.Sleep(200);
  1558. //拍照前改变速度,延时
  1559. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1560. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1561. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1562. Thread.Sleep(200);
  1563. cycle_time = iSEM.GetCycleTime();
  1564. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1565. if (!GetImage(fileName4))
  1566. {
  1567. arg.State = false;
  1568. arg.Message = "SEM拍照找切割位置失败";
  1569. SendMsg("1-25");
  1570. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1571. return false;
  1572. }
  1573. arg.Picture_Information.Picture_FullPath = fileName4;
  1574. arg.State = true;
  1575. arg.Message = "SEM拍照成功";
  1576. SendMsg("1-25");
  1577. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1578. Thread.Sleep(200);
  1579. cycle_time = iSEM.GetCycleTime();
  1580. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1581. //判断是否停止进程
  1582. if (key_stop)
  1583. {
  1584. return false;
  1585. }
  1586. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  1587. //5.根据坐标控制SEM移动到切孔位置,居中
  1588. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  1589. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  1590. wr.Img_Trapezoid_Top_Center_Position(fileName4,Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  1591. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  1592. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  1593. if (state == 1)
  1594. {
  1595. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  1596. if (!MoveToPixByMoveStage(x2, y2))
  1597. {
  1598. arg.State = false;
  1599. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  1600. SendMsg("1-26");
  1601. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1602. return false;
  1603. }
  1604. //判断是否移动完成
  1605. while (true)
  1606. {
  1607. Thread.Sleep(4000);
  1608. if (iSEM.GetStageIs() == 0)
  1609. {
  1610. break;
  1611. }
  1612. }
  1613. arg.State = true;
  1614. arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  1615. SendMsg("1-26");
  1616. //高倍到低倍不进行对焦
  1617. //拍照前改变速度,延时
  1618. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1619. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1620. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1621. Thread.Sleep(200);
  1622. cycle_time = iSEM.GetCycleTime();
  1623. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1624. String fileName10 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageName10;
  1625. if (!GetImage(fileName10))
  1626. {
  1627. //arg.State = false;
  1628. //arg.Message = "SEM拍照失败";
  1629. //SendMsg("1-25");
  1630. //return false;
  1631. LogManager.AddHardwareLog("测量线程报错:找到已切割的位置拍照失败", true);
  1632. }
  1633. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1634. Thread.Sleep(200);
  1635. cycle_time = iSEM.GetCycleTime();
  1636. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1637. if (hand_intervene == 1)
  1638. {
  1639. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1640. }
  1641. }
  1642. else
  1643. {
  1644. arg.Message = "图像接口参数state返回值为零";
  1645. arg.State = false;
  1646. SendMsg("1-26");
  1647. if (hand_intervene == 1)
  1648. {
  1649. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1650. {
  1651. return false;
  1652. }
  1653. }
  1654. else
  1655. {
  1656. return false;
  1657. }
  1658. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1659. return false;
  1660. }
  1661. //判断是否停止进程
  1662. if (key_stop)
  1663. {
  1664. LogManager.AddHardwareLog("停止键按下", true);
  1665. return false;
  1666. }
  1667. return true;
  1668. }
  1669. /// <summary>
  1670. /// 17.自动控制SEM拍截面照
  1671. /// </summary>
  1672. /// <returns></returns>
  1673. public bool ShotSection(ref List<String> limg_path, ref List<float> lsize)
  1674. {
  1675. int state = 0;
  1676. #region 设置拍照的电压
  1677. LogManager.AddHardwareLog("测量线程:设置拍照电压" + m_measureFile.MParam.Photograph_Voltage.ToString(), true);
  1678. //1、放大倍数参数photograph_
  1679. if (!iSEM.SetSEMVoltage(m_measureFile.MParam.Photograph_Voltage))
  1680. {
  1681. arg.Message = "电压设置" + m_measureFile.MParam.Photograph_Voltage.ToString("0.0") + "失败";
  1682. arg.State = false;
  1683. SendMsg("1-27");
  1684. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1685. return false;
  1686. }
  1687. //add
  1688. #endregion
  1689. Thread.Sleep(200);
  1690. #region 设置拍照的放大倍数
  1691. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数====" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  1692. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  1693. {
  1694. arg.Message = "放大倍数调整失败";
  1695. arg.State = false;
  1696. SendMsg("1-27");
  1697. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1698. return false;
  1699. }
  1700. float set = m_measureFile.MParam.Photograph_Magnification;
  1701. float current = iSEM.GetMagnification();
  1702. while(Math.Abs(current- set) > 1)
  1703. {
  1704. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  1705. Thread.Sleep(200);
  1706. current = iSEM.GetMagnification();
  1707. }
  1708. arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString()+ "成功";
  1709. arg.State = true;
  1710. SendMsg("1-27");
  1711. Thread.Sleep(3000 + (Int32)cycle_time);
  1712. //判断是否停止进程
  1713. if (key_stop)
  1714. {
  1715. LogManager.AddHardwareLog("停止键按下", true);
  1716. return false;
  1717. }
  1718. #endregion
  1719. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  1720. //if(!iSEM.SetAutoVideoBrightnessAndContrast())
  1721. //{
  1722. // LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1723. // return false;
  1724. //}
  1725. //Thread.Sleep(5000);
  1726. //2.控制SEM自动对焦、亮度、对比度-接口
  1727. //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题
  1728. if ((m_measureFile.MParam.SampleName == "2")||(m_measureFile.MParam.SampleName == "3"))
  1729. iSEM.SetReduced(402, 128, 500, 500);
  1730. else //add by sun 2020-12-16 解决第5/6类样品 2000倍对焦不好问题 end
  1731. iSEM.SetReduced(402, 128, 340, 256);
  1732. Thread.Sleep(200);
  1733. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  1734. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  1735. //add by sun 2020 - 12 - 15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  1736. Thread.Sleep(200);
  1737. cycle_time = iSEM.GetCycleTime();
  1738. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  1739. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度开始!", true);
  1740. if (!iSEM.SetAutoVideoOff())
  1741. {
  1742. LogManager.AddHardwareLog("测量线程报错:关闭自动亮度对比度失败", false);
  1743. return false;
  1744. }
  1745. Thread.Sleep(5000);
  1746. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-关闭自动亮度对比度结束!", true);
  1747. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦开始!", true);
  1748. if (ImageFocus1(false))
  1749. {
  1750. arg.Message = "自动对焦完成";
  1751. arg.State = true;
  1752. SendMsg("1-28");
  1753. }
  1754. else
  1755. {
  1756. arg.Message = "自动对焦失败";
  1757. arg.State = false;
  1758. SendMsg("1-28");
  1759. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1760. return false;
  1761. }
  1762. LogManager.AddHardwareLog("测量线程:17.自动控制SEM拍截面照-自动对焦结束!", true);
  1763. iSEM.CloseReduced();
  1764. Thread.Sleep(200);
  1765. cycle_time = iSEM.GetCycleTime();
  1766. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  1767. //判断是否停止进程
  1768. if (key_stop)
  1769. {
  1770. LogManager.AddHardwareLog("停止键按下", true);
  1771. return false;
  1772. }
  1773. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  1774. float m_TempBrightness = 50.0f;
  1775. float m_TempContrast = 30.0f;
  1776. if (m_measureFile.MParam.SampleName == "3")
  1777. {
  1778. m_TempBrightness = 50f;
  1779. m_TempContrast = 29f;
  1780. iSEM.SetBrightness(m_TempBrightness); //50.0f
  1781. Thread.Sleep(200);
  1782. iSEM.SetContrast(m_TempContrast); //30.0f
  1783. Thread.Sleep(200);
  1784. }
  1785. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  1786. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  1787. {
  1788. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  1789. return false;
  1790. }
  1791. Thread.Sleep(5000);
  1792. //3、设置SEM补偿角度
  1793. if (m_measureFile.MParam.Is_Photograph == false)
  1794. {
  1795. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString()+"度", true);
  1796. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  1797. {
  1798. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  1799. arg.State = false;
  1800. SendMsg("1-29");
  1801. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1802. return false;
  1803. }
  1804. arg.State = true;
  1805. arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  1806. SendMsg("1-29");
  1807. Thread.Sleep(200);
  1808. //判断是否停止进程
  1809. if (key_stop)
  1810. {
  1811. LogManager.AddHardwareLog("停止键按下", false);
  1812. return false;
  1813. }
  1814. }
  1815. //4、拍照,5、保存照片
  1816. String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName5;
  1817. arg.Picture_Information.Picture_FullPath = fileName5;
  1818. arg.Picture_Information.Work_Status = "SEM";
  1819. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1820. Thread.Sleep(200);
  1821. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1822. Thread.Sleep(200);
  1823. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1824. Thread.Sleep(200);
  1825. //拍照前改变速度,延时
  1826. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1827. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1828. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1829. Thread.Sleep(200);
  1830. cycle_time = iSEM.GetCycleTime();
  1831. Thread.Sleep(Convert.ToInt32(cycle_time)*2);
  1832. if (!GetImage(fileName5))
  1833. {
  1834. arg.Message = "SEM拍照失败";
  1835. arg.State = false;
  1836. SendMsg("1-30");
  1837. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1838. return false;
  1839. }
  1840. arg.Picture_Information.Picture_FullPath = fileName5;
  1841. arg.State = true;
  1842. arg.Message = "SEM拍照成功";
  1843. SendMsg("1-30");
  1844. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1845. Thread.Sleep(200);
  1846. cycle_time = iSEM.GetCycleTime();
  1847. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1848. //判断是否停止进程
  1849. if (key_stop)
  1850. {
  1851. LogManager.AddHardwareLog("停止键按下", true);
  1852. return false;
  1853. }
  1854. #endregion
  1855. if (m_measureFile.MParam.Is_Photograph == false)
  1856. {
  1857. #region 对当前矩形进行旋转校正
  1858. //8,计算切割面区域偏移角度及方向
  1859. float degree = 0;
  1860. int direction = 0;
  1861. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  1862. LogManager.AddHardwareLog("测量线程:2000倍===拍照角度移动,输入图像" + fileName5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  1863. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  1864. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  1865. if (state == 1)
  1866. {
  1867. //梯形角度
  1868. iSEM.SetScanRotationOn();
  1869. Thread.Sleep(200);
  1870. //20201128陈工要求,谭博返回角度*0.7
  1871. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  1872. Thread.Sleep(200);
  1873. arg.State = true;
  1874. arg.Message = "图像接口返回角度为:" + degree.ToString();
  1875. SendMsg("1-31");
  1876. if (hand_intervene == 1)
  1877. {
  1878. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  1879. }
  1880. }
  1881. else
  1882. {
  1883. arg.Message = "图像接口参数State返回值为零";
  1884. arg.State = false;
  1885. SendMsg("1-31");
  1886. if(hand_intervene == 1)
  1887. {
  1888. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  1889. {
  1890. return false;
  1891. }
  1892. }
  1893. else
  1894. {
  1895. //return false;
  1896. }
  1897. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1898. }
  1899. //判断是否停止进程
  1900. if (key_stop)
  1901. {
  1902. LogManager.AddHardwareLog("停止键按下", true);
  1903. return false;
  1904. }
  1905. Thread.Sleep(200);
  1906. //12拍照
  1907. String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageName6;
  1908. arg.Picture_Information.Picture_FullPath = fileName6;
  1909. arg.Picture_Information.Work_Status = "SEM";
  1910. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  1911. Thread.Sleep(200);
  1912. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  1913. Thread.Sleep(200);
  1914. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  1915. Thread.Sleep(200);
  1916. //拍照前改变速度,延时
  1917. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  1918. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  1919. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  1920. Thread.Sleep(200);
  1921. cycle_time = iSEM.GetCycleTime();
  1922. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1923. if (!GetImage(fileName6))
  1924. {
  1925. arg.Message = "SEM拍照失败";
  1926. arg.State = false;
  1927. SendMsg("1-33");
  1928. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  1929. return false;
  1930. }
  1931. arg.Picture_Information.Picture_FullPath = fileName6;
  1932. arg.State = true;
  1933. arg.Message = "SEM拍照成功";
  1934. SendMsg("1-33");
  1935. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  1936. Thread.Sleep(200);
  1937. cycle_time = iSEM.GetCycleTime();
  1938. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  1939. //判断是否停止进程
  1940. if (key_stop)
  1941. {
  1942. LogManager.AddHardwareLog("停止键按下", true);
  1943. return false;
  1944. }
  1945. #endregion
  1946. #region 获取两个位置上及放大倍数
  1947. //计算两个测量区域坐标
  1948. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  1949. List<float> mag = new List<float>();
  1950. System.Drawing.Point ct0;
  1951. float mag1, mag2, magMax;
  1952. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  1953. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  1954. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  1955. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  1956. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  1957. "输入产品" + m_measureFile.MParam.Firm.ToString()
  1958. + "输出中心点1为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  1959. + ",输出放大倍数1==" + mag[0]
  1960. + "倍,输出中心点2为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  1961. + "输出放大倍数2==" + mag[0]
  1962. + "倍,输出中心点3为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  1963. #endregion
  1964. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  1965. {
  1966. arg.State = true;
  1967. arg.Message = "获取位置及放大倍数成功";
  1968. SendMsg("1-34");
  1969. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  1970. float xs = iSEM.GetBeamShiftX();
  1971. Thread.Sleep(200);
  1972. float ys = iSEM.GetBeamShiftY();
  1973. Thread.Sleep(200);
  1974. float xpCur = iSEM.GetStageAtX();
  1975. Thread.Sleep(200);
  1976. float ypCur = iSEM.GetStageAtY();
  1977. Thread.Sleep(200);
  1978. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  1979. + "y=" + ys.ToString() + ","
  1980. + "原来样品台的位置x= " + xpCur.ToString()
  1981. + "y=" + ypCur.ToString(), true);
  1982. #endregion
  1983. //找到放大倍数最大值
  1984. magMax = mag[0];
  1985. for (int m = 1; m < mag.Count; m++)
  1986. {
  1987. if (mag[m] > magMax)
  1988. {
  1989. magMax = mag[m];
  1990. }
  1991. }
  1992. #region 移动到梯形左上角
  1993. //20201127将视野移动到梯形左上角位置
  1994. MoveToPix(ct0.X, ct0.Y);
  1995. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  1996. + "," + ct0.Y.ToString() + ")", true);
  1997. //关闭自动亮度对比度
  1998. iSEM.SetAutoVideoOff();
  1999. Thread.Sleep(2000);
  2000. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2001. if (m_measureFile.MParam.SampleName == "3")
  2002. {
  2003. m_TempBrightness = 50f;
  2004. m_TempContrast = 29f;
  2005. iSEM.SetBrightness(m_TempBrightness); //50.0f
  2006. Thread.Sleep(200);
  2007. iSEM.SetContrast(m_TempContrast); //30.0f
  2008. Thread.Sleep(200);
  2009. }
  2010. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  2011. //add by sun 2020-12-16 解决第5/6类样品 6000倍对焦不好问题
  2012. if ( m_measureFile.MParam.SampleName == "3")
  2013. {
  2014. iSEM.SetReduced(402, 128, 480, 450);
  2015. }else
  2016. {
  2017. iSEM.SetReduced(402, 128, 340, 256);
  2018. }
  2019. Thread.Sleep(200);
  2020. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  2021. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2022. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  2023. Thread.Sleep(200);
  2024. cycle_time = iSEM.GetCycleTime();
  2025. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2026. //放大到6000倍
  2027. iSEM.SetMagnification(magMax / 2);
  2028. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2029. set = magMax / 2;
  2030. current = iSEM.GetMagnification();
  2031. while (Math.Abs(current - set) > 1)
  2032. {
  2033. iSEM.SetMagnification(set);
  2034. Thread.Sleep(200);
  2035. current = iSEM.GetMagnification();
  2036. }
  2037. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--6000倍!", true);
  2038. if (m_measureFile.MParam.SampleName == "3")
  2039. {
  2040. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30
  2041. iSEM.SetBrightness(50.0f); //50.0f
  2042. Thread.Sleep(200);
  2043. iSEM.SetContrast(30.0f); //30.0f
  2044. Thread.Sleep(200);
  2045. //add by zjx 2020-12-18 修改亮度对比度 50 29 更成 50 30 end
  2046. }
  2047. //自动对焦
  2048. if (!ImageFocus1(true))
  2049. {
  2050. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦失败!", true);
  2051. return false;
  2052. }
  2053. LogManager.AddHardwareLog("========测量线程:6000倍自动聚焦成功!", true);
  2054. ////自动消像散
  2055. //if (!ImageStig1())
  2056. //{
  2057. // return false;
  2058. //}
  2059. //放大到10000倍
  2060. iSEM.SetMagnification(magMax);
  2061. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2062. set = magMax;
  2063. current = iSEM.GetMagnification();
  2064. while (Math.Abs(current - set) > 1)
  2065. {
  2066. iSEM.SetMagnification(set);
  2067. Thread.Sleep(200);
  2068. current = iSEM.GetMagnification();
  2069. }
  2070. LogManager.AddHardwareLog("========测量线程:开始自动聚焦--12000倍!", true);
  2071. //自动对焦
  2072. if (!ImageFocus1(true))
  2073. {
  2074. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦失败!", true);
  2075. return false;
  2076. }
  2077. LogManager.AddHardwareLog("========测量线程:12000倍自动聚焦成功!", true);
  2078. ////自动消像散
  2079. //if (!ImageStig1())
  2080. //{
  2081. // return false;
  2082. //}
  2083. ////放大到20000倍
  2084. //iSEM.SetMagnification(magMax*2);
  2085. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2086. //set = magMax*2;
  2087. //current = iSEM.GetMagnification();
  2088. //while (Math.Abs(current - set) > 1)
  2089. //{
  2090. // iSEM.SetMagnification(set);
  2091. // Thread.Sleep(200);
  2092. // current = iSEM.GetMagnification();
  2093. //}
  2094. ////自动对焦
  2095. //if (!ImageFocus1())
  2096. //{
  2097. // return false;
  2098. //}
  2099. iSEM.CloseReduced();
  2100. Thread.Sleep(200);
  2101. cycle_time = iSEM.GetCycleTime();
  2102. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2103. #endregion
  2104. #region 循环拍照
  2105. for (int n = 0; n < ct.Count; n++)
  2106. {
  2107. #region 恢复到拍照的状态
  2108. iSEM.SetStageGotoX(xpCur);
  2109. while (true)
  2110. {
  2111. Thread.Sleep(4000);
  2112. if (iSEM.GetStageIs() == 0)
  2113. {
  2114. break;
  2115. }
  2116. }
  2117. iSEM.SetStageGotoY(ypCur);
  2118. while (true)
  2119. {
  2120. Thread.Sleep(4000);
  2121. if (iSEM.GetStageIs() == 0)
  2122. {
  2123. break;
  2124. }
  2125. }
  2126. //恢复原来的放大倍数
  2127. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  2128. {
  2129. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2130. return false;
  2131. }
  2132. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2133. set = m_measureFile.MParam.Photograph_Magnification;
  2134. current = iSEM.GetMagnification();
  2135. while (Math.Abs(current - set) > 1)
  2136. {
  2137. iSEM.SetMagnification(set);
  2138. Thread.Sleep(200);
  2139. current = iSEM.GetMagnification();
  2140. }
  2141. //恢复BeamShift的百分比值
  2142. iSEM.SetBeamShiftX(xs);
  2143. Thread.Sleep(200);
  2144. iSEM.SetBeamShiftY(ys);
  2145. Thread.Sleep(200);
  2146. #endregion
  2147. #region 移动到指定点位置
  2148. if (!MoveToPix(ct[n].X, ct[n].Y))
  2149. {
  2150. arg.State = false;
  2151. arg.Message = "移动到第一个点位置失败";
  2152. SendMsg("1-" + (35 + n).ToString());
  2153. //移动到第一个点失败
  2154. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  2155. }
  2156. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  2157. + "," + ct[n].Y.ToString() + ")", true);
  2158. #endregion
  2159. #region 如果是第一个点,则1W倍对焦
  2160. if (n == 0)
  2161. {
  2162. ////在第一个点上放大1W倍对焦
  2163. //if (!iSEM.SetMagnification(mag[n]))
  2164. //{
  2165. // LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2166. // return false;
  2167. //}
  2168. //Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2169. //while (true)
  2170. //{
  2171. // current = iSEM.GetMagnification();
  2172. // if (Math.Abs(current - mag[n]) < 1)
  2173. // {
  2174. // Thread.Sleep(200);
  2175. // break;
  2176. // }
  2177. // Thread.Sleep(200);
  2178. // iSEM.SetMagnification(set);
  2179. // Thread.Sleep(200);
  2180. //}
  2181. //if (m_measureFile.MParam.SampleName == "2")
  2182. //{
  2183. // //窗口对焦
  2184. // iSEM.SetReduced1(340, 1, 340, 256);
  2185. // Thread.Sleep(200);
  2186. // iSEM.CmdFocusRate();
  2187. // Thread.Sleep(200);
  2188. // cycle_time = iSEM.GetCycleTime();
  2189. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2190. // //自动对焦
  2191. // if (!ImageFocus1(false))
  2192. // {
  2193. // return false;
  2194. // }
  2195. // //恢复全屏
  2196. // iSEM.CloseReduced();
  2197. // Thread.Sleep(200);
  2198. // cycle_time = iSEM.GetCycleTime();
  2199. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2200. //}
  2201. //else
  2202. //{
  2203. // //窗口对焦
  2204. // //iSEM.SetReduced(402, 128, 800, 600);
  2205. // //Thread.Sleep(200);
  2206. // iSEM.CmdFocusRate();
  2207. // Thread.Sleep(200);
  2208. // cycle_time = iSEM.GetCycleTime();
  2209. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2210. // //自动对焦
  2211. // if (!ImageFocus1(false))
  2212. // {
  2213. // return false;
  2214. // }
  2215. // //恢复全屏
  2216. // //iSEM.CloseReduced();
  2217. // //Thread.Sleep(200);
  2218. // cycle_time = iSEM.GetCycleTime();
  2219. // Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2220. //}
  2221. LogManager.AddHardwareLog("========测量线程:进入内部观察,不对焦!", true);
  2222. //增亮图像
  2223. iSEM.SetAutoVideoOff();
  2224. Thread.Sleep(200);
  2225. float currentBright = iSEM.GetBrightness();
  2226. Thread.Sleep(200);
  2227. float currentContrast = iSEM.GetContrast();
  2228. Thread.Sleep(200);
  2229. //add by sun 2020-12-17 黄工觉得太亮
  2230. int m_BrightMore = 2;
  2231. int m_ContrastMore = 2;
  2232. if (m_measureFile.MParam.SampleName == "3")
  2233. {
  2234. m_BrightMore = 0;
  2235. m_ContrastMore = 0;
  2236. }
  2237. //add by sun 2020-12-17 黄工觉得太亮 end
  2238. iSEM.SetBrightness(currentBright + m_BrightMore);
  2239. Thread.Sleep(200);
  2240. iSEM.SetContrast(currentContrast + m_ContrastMore);
  2241. Thread.Sleep(200);
  2242. }
  2243. #endregion
  2244. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  2245. if((m_measureFile.MParam.SampleName=="3")&&(n==0))
  2246. {
  2247. if (!GetImageFromSEM(mag[n]/2))
  2248. LogManager.AddHardwareLog("测量线程报错:第一个区域放大一半倍数" + (mag[n]/2).ToString() + "控制失败", true);
  2249. }
  2250. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  2251. #region 拍照
  2252. if (!iSEM.SetMagnification(mag[n]))
  2253. {
  2254. arg.State = false;
  2255. arg.Message = "移动到第一个点位置拍照失败";
  2256. SendMsg("1-35");
  2257. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  2258. return false;
  2259. }
  2260. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成!", true);
  2261. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2262. set = mag[n];
  2263. current = iSEM.GetMagnification();
  2264. while (Math.Abs(current - set) > 1)
  2265. {
  2266. iSEM.SetMagnification(set);
  2267. Thread.Sleep(200);
  2268. current = iSEM.GetMagnification();
  2269. }
  2270. //获取像素大小
  2271. lsize.Add(iSEM.GetPixelSize());
  2272. Thread.Sleep(200);
  2273. String fileName7 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag[n].ToString() + "_" + n.ToString() + "_" + ImageNameTwo_1;
  2274. arg.Picture_Information.Picture_FullPath = fileName7;
  2275. arg.Picture_Information.Work_Status = "SEM";
  2276. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  2277. Thread.Sleep(200);
  2278. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  2279. Thread.Sleep(200);
  2280. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  2281. Thread.Sleep(200);
  2282. //拍照前改变速度,延时
  2283. iSEM.CmdLineScan();
  2284. Thread.Sleep(200);
  2285. cycle_time = iSEM.GetCycleTime();
  2286. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2287. if (!GetImage(fileName7))
  2288. {
  2289. arg.State = false;
  2290. arg.Message = "移动到第一个点位置失败";
  2291. SendMsg("1-35");
  2292. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2293. return false;
  2294. }
  2295. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  2296. iSEM.CmdPixelScan();
  2297. Thread.Sleep(200);
  2298. limg_path.Add(fileName7);
  2299. arg.Picture_Information.Picture_FullPath = fileName7;
  2300. arg.State = true;
  2301. arg.Message = "移动到第一个点位置拍照成功";
  2302. SendMsg("1-35");
  2303. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2304. Thread.Sleep(200);
  2305. cycle_time = iSEM.GetCycleTime();
  2306. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  2307. #endregion
  2308. }
  2309. #endregion
  2310. if (hand_intervene == 1)
  2311. {
  2312. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  2313. }
  2314. }
  2315. else
  2316. {
  2317. if (hand_intervene == 1)
  2318. {
  2319. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2320. {
  2321. // return false;
  2322. }
  2323. }
  2324. else
  2325. {
  2326. //return false;
  2327. }
  2328. arg.State = false;
  2329. arg.Message = "获取位置及放大倍数失败";
  2330. SendMsg("1-34");
  2331. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  2332. }
  2333. //判断是否停止进程
  2334. if (key_stop)
  2335. {
  2336. LogManager.AddHardwareLog("停止键按下", true);
  2337. return false;
  2338. }
  2339. }
  2340. ////14光束复位和Rotation关闭开关
  2341. //arg.Message = "光束复位成功";
  2342. //arg.State = true;
  2343. //SendMsg("1-36");
  2344. iSEM.SetTiltAngleOff();
  2345. Thread.Sleep(200);
  2346. iSEM.SetScanRotationOff();
  2347. Thread.Sleep(200);
  2348. iSEM.SetBeamShiftX(0);
  2349. Thread.Sleep(200);
  2350. iSEM.SetBeamShiftY(0);
  2351. Thread.Sleep(200);
  2352. //判断是否停止进程
  2353. if (key_stop)
  2354. {
  2355. return false;
  2356. }
  2357. return true;
  2358. }
  2359. //第一个孔的测试过程
  2360. public bool FirstHole()
  2361. {
  2362. // add by zjx 2020-12-18 为了测试只做能谱部分
  2363. if (m_measureFile.MParam.IsonlyEDSForDebug == true)
  2364. {
  2365. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2366. LogManager.AddHardwareLog("测量线程:第一孔=====设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2367. if (!SetVoltageAndIPROBE())
  2368. {
  2369. LogManager.AddHardwareLog("测量线程:第一孔=====设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2370. return false;
  2371. }
  2372. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2373. //设置拉直的放大倍数
  2374. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), true);
  2375. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2376. {
  2377. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-设置SEM放大倍数为拉直放大倍数失败,放大倍数为" + m_measureFile.MParam.Stretch_Magnification.ToString(), false);
  2378. arg.Message = "测量线程报错:拉直放大倍数设置失败!";
  2379. arg.State = false;
  2380. SendMsg("1-1");
  2381. return false;
  2382. }
  2383. float current = iSEM.GetMagnification();
  2384. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2385. {
  2386. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2387. Thread.Sleep(200);
  2388. current = iSEM.GetMagnification();
  2389. }
  2390. arg.Message = "拉直放大倍数设置成功!";
  2391. arg.State = true;
  2392. SendMsg("1-1");
  2393. Thread.Sleep(2000);
  2394. //自动化流程-每个点都需要补偿54度
  2395. if (m_measureFile.MParam.Is_Photograph == false)
  2396. {
  2397. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-倾斜补偿角度为54度", true);
  2398. if (!TiltCorrection(54.0f))
  2399. {
  2400. LogManager.AddHardwareLog("测量线程报错:倾斜补偿角度为54度失败", false);
  2401. arg.Message = "角度补偿54度失败!";
  2402. arg.State = false;
  2403. SendMsg("1-2");
  2404. return false;
  2405. }
  2406. arg.Message = "角度补偿54度成功!";
  2407. arg.State = true;
  2408. SendMsg("1-2");
  2409. Thread.Sleep(1000);
  2410. //判断是否停止进程
  2411. if (key_stop)
  2412. {
  2413. LogManager.AddHardwareLog("停止键按下", true);
  2414. return false;
  2415. }
  2416. }
  2417. // 2是5/6类样品,不需要拉直
  2418. if (m_measureFile.MParam.SampleName != "2")
  2419. {
  2420. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作开始!", true);
  2421. if (!Straighten_Handle())
  2422. {
  2423. LogManager.AddHardwareLog("测量线程报错:第一个孔的测试过程-拉直操作失败。", true);
  2424. return false;
  2425. }
  2426. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-拉直操作结束!", true);
  2427. //判断是否停止进程
  2428. if (key_stop)
  2429. {
  2430. LogManager.AddHardwareLog("停止键按下。", true);
  2431. return false;
  2432. }
  2433. }
  2434. else
  2435. {
  2436. arg.Message = "拉直操作自动对焦成功!";
  2437. arg.State = true;
  2438. SendMsg("1-3");
  2439. Thread.Sleep(1000);
  2440. arg.Message = "拉直拍照成功!";
  2441. arg.Picture_Information.Picture_FullPath = "";
  2442. arg.State = true;
  2443. SendMsg("1-4");
  2444. Thread.Sleep(1000);
  2445. arg.Message = "拉直操作完成";
  2446. arg.State = true;
  2447. SendMsg("1-5");
  2448. Thread.Sleep(1000);
  2449. }
  2450. //13. 自动 定位功能
  2451. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位开始!", true);
  2452. if (!GetPoistion())
  2453. {
  2454. LogManager.AddHardwareLog("测量线程报错:自动定位失败,程序退出。", false);
  2455. return false;
  2456. }
  2457. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-自动定位结束!", true);
  2458. //判断是否停止进程
  2459. if (key_stop)
  2460. {
  2461. LogManager.AddHardwareLog("停止键按下。", true);
  2462. return false;
  2463. }
  2464. //14.自动控制FIB切割 del by sun 2020-12-15 temp
  2465. if (m_measureFile.MParam.Is_Photograph == false)
  2466. {
  2467. if (m_measureFile.MParam.IsCutingForDebug)
  2468. {
  2469. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割开始!=="+ m_measureFile.MParam.IsCutingForDebug, true);
  2470. if (!FIBCross())
  2471. {
  2472. LogManager.AddHardwareLog("测量线程报错:自动控制FIB切割失败。", false);
  2473. return false;
  2474. }
  2475. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-14.自动控制FIB切割结束!", true);
  2476. }
  2477. }
  2478. //del by sun 2020-12-15 temp end
  2479. //判断是否停止进程
  2480. if (key_stop)
  2481. {
  2482. return false;
  2483. }
  2484. //16.找到切割位置
  2485. if (m_measureFile.MParam.Is_Photograph == false)
  2486. {
  2487. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置开始!", true);
  2488. if (!FindCross())
  2489. {
  2490. return false;
  2491. }
  2492. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-16.找到切割位置结束!", true);
  2493. //判断是否停止进程
  2494. if (key_stop)
  2495. {
  2496. return false;
  2497. }
  2498. }
  2499. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照开始", true);
  2500. //将过程17最后的拍照图片提出给18步进行调用
  2501. List<String> limg_path = new List<string>();
  2502. List<float> lsize = new List<float>();
  2503. //17.自动控制SEM拍截面照
  2504. if (!ShotSection(ref limg_path, ref lsize))
  2505. {
  2506. //return false;
  2507. }
  2508. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-17.自动控制SEM拍截面照结束!", true);
  2509. //判断是否停止进程
  2510. if (key_stop)
  2511. {
  2512. return false;
  2513. }
  2514. //这段是临时的
  2515. //arg.State = true;
  2516. //arg.Message = "测量尺寸成功";
  2517. //SendMsg("1-40");
  2518. //18.自动层高分析
  2519. if (m_measureFile.MParam.Is_Photograph == false)
  2520. {
  2521. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析开始", true);
  2522. float size = iSEM.GetPixelSize();
  2523. int state = 1;
  2524. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2525. if (state == 0)
  2526. {
  2527. arg.Message = "测量尺寸失败";
  2528. arg.State = false;
  2529. SendMsg("1-40");
  2530. return false;
  2531. }
  2532. arg.State = true;
  2533. arg.Message = "测量尺寸成功";
  2534. SendMsg("1-40");
  2535. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-18.自动层高分析结束!", true);
  2536. }
  2537. }
  2538. //add by zjx 2020-12-18 为了测试只做能谱部分 end
  2539. //19.能谱分析
  2540. if (m_measureFile.MParam.EDS)
  2541. {
  2542. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析开始===" + m_measureFile.MParam.EDS, true);
  2543. EDSAnalysis();
  2544. LogManager.AddHardwareLog("测量线程:第一个孔的测试过程-19.能谱分析结束===" + m_measureFile.MParam.EDS, true);
  2545. }
  2546. //20.复位
  2547. LogManager.AddHardwareLog("===========测量线程:20.复位开始", true);
  2548. BeamShiftReset();
  2549. return true;
  2550. }
  2551. //非第一个孔的测试过程
  2552. public bool OtherHole()
  2553. {
  2554. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  2555. LogManager.AddHardwareLog("测量线程:非第一孔==设置拍照电压 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2556. if (!SetVoltageAndIPROBE())
  2557. {
  2558. LogManager.AddHardwareLog("测量线程:非第一孔==设置电压电流失败!目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  2559. return false;
  2560. }
  2561. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  2562. //设置拉直的放大倍数
  2563. if (!iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification))
  2564. {
  2565. LogManager.AddHardwareLog("拉直放大倍数设置失败,程序退出。", true);
  2566. arg.Message = "拉直放大倍数设置失败!";
  2567. arg.State = false;
  2568. SendMsg("1-1");
  2569. return false;
  2570. }
  2571. float current = iSEM.GetMagnification();
  2572. while (Math.Abs(current - m_measureFile.MParam.Stretch_Magnification) > 1)
  2573. {
  2574. iSEM.SetMagnification(m_measureFile.MParam.Stretch_Magnification);
  2575. Thread.Sleep(200);
  2576. current = iSEM.GetMagnification();
  2577. }
  2578. arg.Message = "拉直放大倍数设置成功!";
  2579. arg.State = true;
  2580. SendMsg("1-1");
  2581. Thread.Sleep(2000);
  2582. //自动化流程-每个点都需要补偿54度
  2583. if (m_measureFile.MParam.Is_Photograph == false)
  2584. {
  2585. if (!TiltCorrection(54.0f))
  2586. {
  2587. arg.Message = "角度补偿54度失败!";
  2588. arg.State = false;
  2589. SendMsg("1-2");
  2590. return false;
  2591. }
  2592. arg.Message = "角度补偿54度成功!";
  2593. arg.State = true;
  2594. SendMsg("1-2");
  2595. Thread.Sleep(2000);
  2596. //判断是否停止进程
  2597. if (key_stop)
  2598. {
  2599. return false;
  2600. }
  2601. }
  2602. if (m_measureFile.MParam.SampleName != "2")
  2603. {
  2604. if (!Straighten_Handle())
  2605. {
  2606. LogManager.AddHardwareLog("测量线程报错:拉直操作失败。", true);
  2607. return false;
  2608. }
  2609. //判断是否停止进程
  2610. if (key_stop)
  2611. {
  2612. LogManager.AddHardwareLog("停止键按下。", true);
  2613. return false;
  2614. }
  2615. }
  2616. else
  2617. {
  2618. arg.Message = "拉直操作自动对焦成功!";
  2619. arg.State = true;
  2620. SendMsg("1-3");
  2621. Thread.Sleep(1000);
  2622. arg.Message = "拉直拍照成功!";
  2623. arg.Picture_Information.Picture_FullPath = "";
  2624. arg.State = true;
  2625. SendMsg("1-4");
  2626. Thread.Sleep(1000);
  2627. arg.Message = "拉直操作完成";
  2628. arg.State = true;
  2629. SendMsg("1-5");
  2630. }
  2631. //13. 自动 定位功能
  2632. if (!GetPoistion())
  2633. {
  2634. return false;
  2635. }
  2636. //判断是否停止进程
  2637. if (key_stop)
  2638. {
  2639. return false;
  2640. }
  2641. //14.自动控制FIB切割
  2642. if (m_measureFile.MParam.Is_Photograph == false)
  2643. {
  2644. if (!FIBCross())
  2645. {
  2646. return false;
  2647. }
  2648. }
  2649. //判断是否停止进程
  2650. if (key_stop)
  2651. {
  2652. return false;
  2653. }
  2654. // 16.找到切割位置
  2655. if (m_measureFile.MParam.Is_Photograph == false)
  2656. {
  2657. if (!FindCross())
  2658. {
  2659. return false;
  2660. }
  2661. //判断是否停止进程
  2662. if (key_stop)
  2663. {
  2664. return false;
  2665. }
  2666. }
  2667. //将过程17最后的拍照图片提出给18步进行调用
  2668. List<String> limg_path = new List<string>();
  2669. List<float> lsize = new List<float>();
  2670. //17.自动控制SEM拍截面照
  2671. if (!ShotSection(ref limg_path, ref lsize))
  2672. {
  2673. //return false;
  2674. }
  2675. //判断是否停止进程
  2676. if (key_stop)
  2677. {
  2678. return false;
  2679. }
  2680. //这段是临时的
  2681. //arg.State = true;
  2682. //arg.Message = "测量尺寸成功";
  2683. //SendMsg("1-40");
  2684. //18.自动层高分析
  2685. if (m_measureFile.MParam.Is_Photograph == false)
  2686. {
  2687. float size = iSEM.GetPixelSize();
  2688. int state = 1;
  2689. wr.Img_Measure_Height(limg_path, lsize, data_path + "\\", Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out state);
  2690. if (state == 0)
  2691. {
  2692. arg.Message = "测量尺寸失败";
  2693. arg.State = false;
  2694. SendMsg("1-40");
  2695. return false;
  2696. }
  2697. arg.State = true;
  2698. arg.Message = "测量尺寸成功";
  2699. SendMsg("1-40");
  2700. }
  2701. //19.能谱分析
  2702. if (m_measureFile.MParam.EDS)
  2703. {
  2704. EDSAnalysis();
  2705. }
  2706. //20.复位 del by sun 2020-12-15
  2707. //BeamShiftReset();
  2708. //del by sun 2020-12-15 end
  2709. return true;
  2710. }
  2711. //测试完第一个孔后的样品台初始化操作。
  2712. //再调用CommonWork执行非第一个孔的测试过程
  2713. public bool OtherHole_Init()
  2714. {
  2715. CutHole currentHole = m_cutHoles[m_nWorkHoleNo];
  2716. #region 初始化
  2717. //1、不只拍照,且不是倾斜观测,则移动T轴
  2718. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2719. {
  2720. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2721. if (!iSEM.SetStageGotoT(0))
  2722. {
  2723. LogManager.AddHardwareLog("样品台归零失败", false);
  2724. return false;
  2725. }
  2726. while (true)
  2727. {
  2728. Thread.Sleep(5000);
  2729. if (iSEM.GetStageIs() == 0)
  2730. {
  2731. break;
  2732. }
  2733. }
  2734. //判断是否停止进程
  2735. if (key_stop)
  2736. {
  2737. LogManager.AddHardwareLog("停止键按下", true);
  2738. return false;
  2739. }
  2740. }
  2741. //2、如果是倾斜观测,则移动Z轴
  2742. if(m_measureFile.MParam.Title==true)
  2743. {
  2744. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2745. //if (!iSEM.SetStageGotoZ(currentHole.Position.Z - m_measureFile.MParam.ZDistance/1000))
  2746. //20201109, Z轴降到安全的位置上
  2747. if(!iSEM.SetStageGotoZ(fSateyZ))
  2748. {
  2749. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  2750. return false;
  2751. }
  2752. while (true)
  2753. {
  2754. Thread.Sleep(5000);
  2755. if (iSEM.GetStageIs() == 0)
  2756. {
  2757. break;
  2758. }
  2759. }
  2760. //判断是否停止进程
  2761. if (key_stop)
  2762. {
  2763. LogManager.AddHardwareLog("停止键按下", true);
  2764. return false;
  2765. }
  2766. }
  2767. //3. 根据光镜坐标控制样品台移动
  2768. if (!iSEM.SetStageGotoR(currentHole.Position.R))
  2769. {
  2770. //SendMsg("移动失败");
  2771. LogManager.AddHardwareLog("测量线程报错:样品台R旋转失败,目标R" + currentHole.Position.R.ToString(), false);
  2772. return false;
  2773. }
  2774. LogManager.AddHardwareLog("移动R轴到="+ currentHole.Position.R.ToString(), true);
  2775. while (true)
  2776. {
  2777. Thread.Sleep(5000);
  2778. if (iSEM.GetStageIs() == 0)
  2779. {
  2780. break;
  2781. }
  2782. }
  2783. //判断是否停止进程
  2784. if (key_stop)
  2785. {
  2786. LogManager.AddHardwareLog("停止键按下", true);
  2787. return false;
  2788. }
  2789. if(!iSEM.MoveStageXY(currentHole.Position.X, currentHole.Position.Y))
  2790. {
  2791. //SendMsg("移动失败");
  2792. LogManager.AddHardwareLog("测量线程报错:样品台(X,Y)移动失败失败,目标(x,y)为(" + currentHole.Position.X.ToString()+"," +currentHole.Position.X.ToString()+")", false);
  2793. return false;
  2794. }
  2795. LogManager.AddHardwareLog("移动X轴Y轴=" + currentHole.Position.X.ToString() + " " + currentHole.Position.Y.ToString(), true);
  2796. while (true)
  2797. {
  2798. Thread.Sleep(10000);
  2799. if (iSEM.GetStageIs() == 0)
  2800. {
  2801. break;
  2802. }
  2803. }
  2804. //判断是否停止进程
  2805. if (key_stop)
  2806. {
  2807. LogManager.AddHardwareLog("停止键按下", true);
  2808. return false;
  2809. }
  2810. //4、倾斜观测时恢复Z轴
  2811. if (m_measureFile.MParam.Title == true)
  2812. {
  2813. //4. 控制样品台T轴归0,R轴变为坐标1、Z/M轴作为坐标2保存不变
  2814. if (currentHole.Position.Z > 0.043)
  2815. {
  2816. LogManager.AddHardwareLog("测量线程报错:样品台Z过高,目标z" + currentHole.Position.Z.ToString(), false);
  2817. return false;
  2818. }
  2819. if (!iSEM.SetStageGotoZ(currentHole.Position.Z))
  2820. {
  2821. LogManager.AddHardwareLog("测量线程报错:样品台Z移动失败,目标z" + currentHole.Position.Z.ToString(), false);
  2822. return false;
  2823. }
  2824. while (true)
  2825. {
  2826. Thread.Sleep(5000);
  2827. if (iSEM.GetStageIs() == 0)
  2828. {
  2829. break;
  2830. }
  2831. }
  2832. //判断是否停止进程
  2833. if (key_stop)
  2834. {
  2835. LogManager.AddHardwareLog("停止键按下", true);
  2836. return false;
  2837. }
  2838. }
  2839. //5. 控制样品台,调整T轴54度、M/Z/R轴不变
  2840. if (m_measureFile.MParam.Is_Photograph == false && m_measureFile.MParam.Title == false)
  2841. {
  2842. if (!iSEM.SetStageGotoT(54))
  2843. {
  2844. LogManager.AddHardwareLog("测量线程报错:校正54度有误", true);
  2845. return false;
  2846. }
  2847. while (true)
  2848. {
  2849. Thread.Sleep(5000);
  2850. if (iSEM.GetStageIs() == 0)
  2851. {
  2852. break;
  2853. }
  2854. }
  2855. }
  2856. //判断是否停止进程
  2857. if (key_stop)
  2858. {
  2859. LogManager.AddHardwareLog("停止键按下", true);
  2860. return false;
  2861. }
  2862. //4、设置WD
  2863. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  2864. Thread.Sleep(1000);
  2865. #endregion
  2866. return true;
  2867. }
  2868. //初始化拉直操作
  2869. public bool Straighten_Handle()
  2870. {
  2871. if (m_measureFile.MParam.Title)
  2872. {
  2873. //倾斜样品台,SEM视野是黑色的
  2874. LogManager.AddHardwareLog("测量线程:恢复到工作位置后重新调亮图像。", true);
  2875. if (!iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD))//5.1mm
  2876. {
  2877. LogManager.AddHardwareLog("测量线程报错:重新设置到标准工作距离失败。", false);
  2878. return false;
  2879. }
  2880. Thread.Sleep(7000); //自动亮度对比度使用
  2881. }
  2882. //1、自动对焦
  2883. LogManager.AddHardwareLog("测量线程报错:拉直操作前自动对焦开始", true);
  2884. iSEM.SetReduced(402, 128, 340, 256);
  2885. Thread.Sleep(200);
  2886. //add by sun 2020-12-15
  2887. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  2888. //add by sun 2020-12-15 end
  2889. Thread.Sleep(200);
  2890. cycle_time = iSEM.GetCycleTime();
  2891. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2892. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2893. float m_TempBrightness = 50.0f;
  2894. float m_TempContrast = 30.0f;
  2895. if (m_measureFile.MParam.SampleName == "3")
  2896. {
  2897. m_TempBrightness = 48.0f;
  2898. m_TempContrast = 29.0f;
  2899. }
  2900. //add by sun 2020-12-18 解决1类样品拉直太白造成无法拉直问题
  2901. if (m_measureFile.MParam.SampleName == "1")
  2902. {
  2903. m_TempBrightness = 50.0f;
  2904. m_TempContrast = 29.0f;
  2905. }
  2906. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  2907. iSEM.SetAutoVideoOff();
  2908. Thread.Sleep(200);
  2909. iSEM.SetBrightness(m_TempBrightness);//50.0f
  2910. Thread.Sleep(200);
  2911. iSEM.SetContrast(m_TempContrast);//30.0f
  2912. Thread.Sleep(200);
  2913. if (!ImageFocus1(false))
  2914. {
  2915. LogManager.AddHardwareLog("测量线程报错:拉直操作自动对焦失败,程序退出。", false);
  2916. arg.Message = "拉直操作自动对焦失败!";
  2917. arg.State = false;
  2918. SendMsg("1-3");
  2919. return false;
  2920. }
  2921. iSEM.CloseReduced();
  2922. Thread.Sleep(200);
  2923. cycle_time = iSEM.GetCycleTime();
  2924. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  2925. iSEM.SetAutoVideoBrightnessAndContrast();
  2926. Thread.Sleep(5000);
  2927. arg.Message = "拉直操作自动对焦成功!";
  2928. arg.State = true;
  2929. SendMsg("1-3");
  2930. //判断是否停止进程
  2931. if (key_stop)
  2932. {
  2933. LogManager.AddHardwareLog("停止键按下。", true);
  2934. return false;
  2935. }
  2936. //2、拍张照片
  2937. String fileName0 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Stretch_Magnification.ToString("0") + "_" + ImageName0;
  2938. LogManager.AddHardwareLog("测量线程:设置保存图像的是扫描速度保存图像" + fileName0, true);
  2939. //拍照前改变速度,延时
  2940. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  2941. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();//
  2942. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  2943. Thread.Sleep(200);
  2944. cycle_time = iSEM.GetCycleTime();
  2945. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2946. if (!GetImage(fileName0))
  2947. {
  2948. LogManager.AddHardwareLog("测量线程报错:拉直拍照失败", false);
  2949. arg.Message = "拉直拍照失败";
  2950. arg.State = false;
  2951. SendMsg("1-4");
  2952. return false;
  2953. }
  2954. arg.Message = "拉直拍照成功!";
  2955. arg.Picture_Information.Picture_FullPath = fileName0;
  2956. arg.State = true;
  2957. SendMsg("1-4");
  2958. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  2959. Thread.Sleep(200);
  2960. cycle_time = iSEM.GetCycleTime();
  2961. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  2962. //3、华为接口,获取旋转角度
  2963. float degree = 0;
  2964. int direction = 0;
  2965. int state = 1;
  2966. wr.Img_OffsetAngle_Direction(fileName0, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  2967. LogManager.AddHardwareLog("测量线程:使用图像处理接口:样品" + m_nWorkHoleNo.ToString() + "初始化拉直角度=" + degree.ToString(), true);
  2968. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2969. LogManager.AddHardwareLog("图像处理结果拉直角度=" + degree.ToString(), true);
  2970. if (state == 0)
  2971. {
  2972. LogManager.AddHardwareLog("测量线程:图像处理接口参数state返回为零" ,false);
  2973. arg.Message = "图像处理接口参数state返回为零";
  2974. arg.State = false;
  2975. SendMsg("1-5");
  2976. if (hand_intervene == 1)
  2977. {
  2978. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  2979. {
  2980. return false;
  2981. }
  2982. }
  2983. else
  2984. {
  2985. return false;
  2986. }
  2987. return false;
  2988. }
  2989. if (direction == 2)
  2990. {
  2991. degree = -degree;
  2992. }
  2993. if (degree != 0)
  2994. {
  2995. //4、拉直,旋转R轴
  2996. LogManager.AddHardwareLog("测量线程:图像拉直,旋转角度" + degree.ToString(), true);
  2997. //选择之前,先降Z轴
  2998. float Zpos = iSEM.GetStageAtZ();
  2999. Thread.Sleep(200);
  3000. LogManager.AddHardwareLog("测量线程:当前Z轴位置" + Zpos.ToString() + "m", true);
  3001. if (!iSEM.SetStageGotoZ(fSateyZ))
  3002. {
  3003. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  3004. return false;
  3005. }
  3006. while (true)
  3007. {
  3008. Thread.Sleep(4000);
  3009. if (iSEM.GetStageIs() == 0)
  3010. {
  3011. break;
  3012. }
  3013. }
  3014. //判断是否停止进程
  3015. if (key_stop)
  3016. {
  3017. LogManager.AddHardwareLog("停止键按下", true);
  3018. return false;
  3019. }
  3020. iSEM.SetStageDeltaR(degree);
  3021. while (true)
  3022. {
  3023. Thread.Sleep(4000);
  3024. if (iSEM.GetStageIs() == 0)
  3025. {
  3026. break;
  3027. }
  3028. }
  3029. if (!iSEM.SetStageGotoZ(Zpos))
  3030. {
  3031. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  3032. return false;
  3033. }
  3034. while (true)
  3035. {
  3036. Thread.Sleep(4000);
  3037. if (iSEM.GetStageIs() == 0)
  3038. {
  3039. break;
  3040. }
  3041. }
  3042. //判断是否停止进程
  3043. if (key_stop)
  3044. {
  3045. LogManager.AddHardwareLog("停止键按下", true);
  3046. return false;
  3047. }
  3048. //4、设置WD
  3049. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3050. Thread.Sleep(1000);
  3051. }
  3052. arg.Message = "拉直操作完成";
  3053. arg.State = true;
  3054. SendMsg("1-5");
  3055. return true;
  3056. }
  3057. //角度补偿
  3058. public bool TiltCorrection(float a_fAngle)
  3059. {
  3060. if (!iSEM.SetTiltAngleOn())
  3061. {
  3062. return false;
  3063. }
  3064. Thread.Sleep(200);
  3065. //恢复原始状态
  3066. if (!iSEM.SetTiltAngle(a_fAngle))
  3067. {
  3068. return false;
  3069. }
  3070. return true;
  3071. }
  3072. //拍图
  3073. public bool GetImage(String a_fileName)
  3074. {
  3075. LogManager.AddHardwareLog("获取分辨率开始!", true);
  3076. //3. 获取分辨率
  3077. int[] ImageSize = iSEM.GetImageStore();
  3078. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3079. {
  3080. return false;
  3081. }
  3082. short width = (short)ImageSize[0];
  3083. short height = (short)ImageSize[1];
  3084. LogManager.AddHardwareLog("获取分辨率结束!"+ a_fileName +"===="+ width+ "*"+height, true);
  3085. //4. 抓图
  3086. if (!iSEM.GrabImage(a_fileName, 0, 0, width, height, 0))
  3087. {
  3088. LogManager.AddHardwareLog("抓图失败!", true);
  3089. return false;
  3090. }
  3091. return true;
  3092. }
  3093. //拍图1
  3094. public bool GetImage1(String a_fileName)
  3095. {
  3096. //3. 获取分辨率
  3097. int[] ImageSize = iSEM.GetImageStore();
  3098. if (ImageSize[0] == 0 || ImageSize[1] == 0)
  3099. {
  3100. return false;
  3101. }
  3102. short width = (short)ImageSize[0];
  3103. short height = (short)ImageSize[1];
  3104. //4. 抓图
  3105. if (!iSEM.GrabZoneImage(a_fileName, 256, 192, 512, 384, 0))
  3106. {
  3107. return false;
  3108. }
  3109. return true;
  3110. }
  3111. #region 算法设计
  3112. //执行自动对焦
  3113. public bool ImageFocus()
  3114. {
  3115. if (m_measureFile.MParam.FocusMode == 1)//手动
  3116. {
  3117. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3118. {
  3119. }
  3120. else
  3121. {
  3122. return false;
  3123. }
  3124. }
  3125. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3126. {
  3127. //郝工增加自动对焦算法
  3128. //处理文件夹
  3129. if (Directory.Exists(focus_path))
  3130. {
  3131. Directory.Delete(focus_path, true);
  3132. }
  3133. Thread.Sleep(3000);
  3134. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3135. Thread.Sleep(1000);
  3136. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3137. Thread.Sleep(1000);
  3138. //再创建文件夹
  3139. Directory.CreateDirectory(focus_path);
  3140. //1、对焦参数类,2、输出工作距离
  3141. int wd = 0;
  3142. //20201015 根据当前的工作距离重新计算对焦位置
  3143. float currentWd = iSEM.GetWorkingDistance();
  3144. //m_measureFile.MParam.AutoFocus.UP = currentWd * 1000000 - m_measureFile.MParam.AutoFocus.Step;
  3145. //m_measureFile.MParam.AutoFocus.Down = currentWd * 1000000 + m_measureFile.MParam.AutoFocus.Step;
  3146. Thread.Sleep(2000);
  3147. float currentMag = iSEM.GetMagnification();
  3148. Thread.Sleep(2000);
  3149. FocusParam pFoucs = new FocusParam();
  3150. if (currentMag <= m_measureFile.MParam.Photograph_Magnification)
  3151. {
  3152. pFoucs = m_measureFile.MParam.AutoFocus;
  3153. pFoucs.UP = 5050;
  3154. pFoucs.Down = 5150;
  3155. pFoucs.Step = 50;
  3156. pFoucs.fStep = 10;
  3157. pFoucs.Range = 50;
  3158. //4、设置WD
  3159. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3160. Thread.Sleep(1000);
  3161. }
  3162. else
  3163. {
  3164. pFoucs = m_measureFile.MParam.AutoFocus;
  3165. pFoucs.UP = 5000;
  3166. pFoucs.Down = 5200;
  3167. pFoucs.Step = 10;
  3168. pFoucs.fStep = 5;
  3169. pFoucs.Range = 50;
  3170. //4、设置WD
  3171. iSEM.SetWorkingDistance(m_measureFile.ListCutHole[m_nWorkHoleNo].Position.WD);
  3172. Thread.Sleep(1000);
  3173. }
  3174. //LogManager.AddHardwareLog("修改对焦参数", true);
  3175. AutoFocus(pFoucs, out wd);
  3176. LogManager.AddHardwareLog("自动调节算法输出"+ (wd * 0.00000001).ToString(), true);
  3177. //设置工作距离
  3178. iSEM.SetWorkingDistance((float)(wd * 0.00000001));
  3179. //设置完工作距离后必须延迟5秒
  3180. Thread.Sleep(5000);
  3181. //处理图片位置
  3182. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3183. }
  3184. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3185. {
  3186. //后期和客户对接接口
  3187. List<string> filenames = new List<string>();
  3188. String retfilename = wr.Img_Auto_Focus(filenames);
  3189. }
  3190. else //蔡司自动对焦
  3191. {
  3192. iSEM.CmdAutoFocusCoarse();
  3193. while (true)
  3194. {
  3195. Thread.Sleep(10000);
  3196. if (0 == iSEM.GetAutoFunction())
  3197. {
  3198. break;
  3199. }
  3200. }
  3201. iSEM.CmdAutoFocusFine();
  3202. while (true)
  3203. {
  3204. Thread.Sleep(10000);
  3205. if (0 == iSEM.GetAutoFunction())
  3206. {
  3207. break;
  3208. }
  3209. }
  3210. }
  3211. return true;
  3212. }
  3213. //执行自动对焦
  3214. public bool ImageFocus1(Boolean Is_Stig)
  3215. {
  3216. if (m_measureFile.MParam.FocusMode == 1)//手动
  3217. {
  3218. if (DialogResult.Yes == MessageBox.Show("图像自动对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  3219. {
  3220. }
  3221. else
  3222. {
  3223. return false;
  3224. }
  3225. }
  3226. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3227. {
  3228. #region 执行蔡司自动对焦程序
  3229. //服务地址
  3230. string snumstr = @"http://192.168.1.101:8123";
  3231. // 调用方法;只对焦不消像散
  3232. if (Is_Stig)
  3233. {
  3234. string focusstig = XmlRpcClient.autofocusstig(10, 3, 3, 3, 0.7, snumstr);
  3235. if (focusstig != "success")
  3236. {
  3237. LogManager.AddHardwareLog("对焦失败" + focusstig , true);
  3238. return false;
  3239. }
  3240. }
  3241. else
  3242. {
  3243. string onlyfocus = XmlRpcClient.autofocus(10, 3, 3, true, snumstr);
  3244. if (onlyfocus != "success")
  3245. {
  3246. return false;
  3247. }
  3248. }
  3249. #endregion
  3250. }
  3251. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3252. {
  3253. //后期和客户对接接口
  3254. List<string> filenames = new List<string>();
  3255. String retfilename = wr.Img_Auto_Focus(filenames);
  3256. }
  3257. else //蔡司自动对焦
  3258. {
  3259. iSEM.CmdAutoFocusCoarse();
  3260. while (true)
  3261. {
  3262. Thread.Sleep(10000);
  3263. if (0 == iSEM.GetAutoFunction())
  3264. {
  3265. break;
  3266. }
  3267. }
  3268. iSEM.CmdAutoFocusFine();
  3269. while (true)
  3270. {
  3271. Thread.Sleep(10000);
  3272. if (0 == iSEM.GetAutoFunction())
  3273. {
  3274. break;
  3275. }
  3276. }
  3277. }
  3278. return true;
  3279. }
  3280. //执行自动消像散
  3281. public bool ImageStig()
  3282. {
  3283. if (m_measureFile.MParam.FocusMode == 1)//手动
  3284. {
  3285. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3286. {
  3287. }
  3288. else
  3289. {
  3290. return false;
  3291. }
  3292. }
  3293. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3294. {
  3295. //郝工增加自动对焦算法
  3296. //处理文件夹
  3297. if (Directory.Exists(StigX_path))
  3298. {
  3299. Directory.Delete(StigX_path, true);
  3300. }
  3301. Thread.Sleep(3000);
  3302. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3303. Thread.Sleep(1000);
  3304. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3305. Thread.Sleep(1000);
  3306. //再创建文件夹
  3307. Directory.CreateDirectory(StigX_path);
  3308. //1、对焦参数类,2、输出像散值
  3309. int stigX = 0;
  3310. //根据当前的stigX重新计算像散值
  3311. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3312. //m_measureFile.MParam.AutoStigX.Step = 10; //像散的步长为10
  3313. //m_measureFile.MParam.AutoStigX.UP = currentStigX - m_measureFile.MParam.AutoStigX.Step;
  3314. //m_measureFile.MParam.AutoStigX.Down = currentStigX + m_measureFile.MParam.AutoStigX.Step;
  3315. //设置工作距离
  3316. iSEM.SetAstigmatismX((float)0);
  3317. //设置完工作距离后必须延迟5秒
  3318. Thread.Sleep(5000);
  3319. //LogManager.AddHardwareLog("修改消像散参数", true);
  3320. AutoStig(m_measureFile.MParam.AutoStigX, out stigX);
  3321. LogManager.AddHardwareLog("自动消散算法输出X"+ (stigX * 0.01).ToString(), true);
  3322. //设置工作距离
  3323. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3324. //设置完工作距离后必须延迟5秒
  3325. Thread.Sleep(5000);
  3326. //处理图片位置
  3327. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3328. //处理文件夹
  3329. if (Directory.Exists(StigY_path))
  3330. {
  3331. Directory.Delete(StigY_path, true);
  3332. }
  3333. Thread.Sleep(3000);
  3334. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3335. Thread.Sleep(1000);
  3336. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3337. Thread.Sleep(1000);
  3338. //再创建文件夹
  3339. Directory.CreateDirectory(StigY_path);
  3340. //1、对焦参数类,2、输出像散值
  3341. int stigY = 0;
  3342. //根据当前的stigX重新计算像散值
  3343. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3344. //m_measureFile.MParam.AutoStigY.Step = 10; //像散的步长为10
  3345. //m_measureFile.MParam.AutoStigY.UP = m_measureFile.MParam.AutoStigY.;
  3346. //m_measureFile.MParam.AutoStigY.Down = m_measureFile.MParam.AutoStigY.Step;
  3347. iSEM.SetAstigmatismY((float)0);
  3348. Thread.Sleep(2000);
  3349. LogManager.AddHardwareLog("修改消像散参数", true);
  3350. AutoStig(m_measureFile.MParam.AutoStigY, out stigY);
  3351. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3352. //设置工作距离
  3353. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3354. //设置完工作距离后必须延迟5秒
  3355. Thread.Sleep(5000);
  3356. }
  3357. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3358. {
  3359. //后期和客户对接接口
  3360. List<string> filenames = new List<string>();
  3361. String retfilename = wr.Img_Auto_Focus(filenames);
  3362. }
  3363. else //蔡司自动对焦
  3364. {
  3365. iSEM.CmdAutoFocusCoarse();
  3366. while (true)
  3367. {
  3368. Thread.Sleep(10000);
  3369. if (0 == iSEM.GetAutoFunction())
  3370. {
  3371. break;
  3372. }
  3373. }
  3374. iSEM.CmdAutoFocusFine();
  3375. while (true)
  3376. {
  3377. Thread.Sleep(10000);
  3378. if (0 == iSEM.GetAutoFunction())
  3379. {
  3380. break;
  3381. }
  3382. }
  3383. }
  3384. return true;
  3385. }
  3386. //自动聚焦
  3387. public bool AutoFocus(FocusParam a_param, out int a_nWd)
  3388. {
  3389. a_nWd = 0;
  3390. float wd = iSEM.GetWorkingDistance();
  3391. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3392. if (a_param == null)
  3393. {
  3394. LogManager.AddHardwareLog("空参数", true);
  3395. return false;
  3396. }
  3397. string path = a_param.Path;
  3398. if (!Directory.Exists(path))
  3399. {
  3400. LogManager.AddHardwareLog("文件夹丢失", true);
  3401. return false;
  3402. }
  3403. string path_coarse = a_param.Path + "\\Coarse";
  3404. if (!Directory.Exists(path_coarse))
  3405. {
  3406. Directory.CreateDirectory(path_coarse);
  3407. }
  3408. string path_fine = a_param.Path + "\\Fine";
  3409. if (!Directory.Exists(path_fine))
  3410. {
  3411. Directory.CreateDirectory(path_fine);
  3412. }
  3413. //1. 拍照
  3414. //1.1, 粗拍照
  3415. //1.1.1, 根据参数计算拍照次数
  3416. double nUp = a_param.UP * 100.0 ;
  3417. double nDown = a_param.Down * 100.0;
  3418. double nStep = a_param.Step * 100.0;
  3419. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3420. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3421. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3422. //粗拍照
  3423. for (int i = 0; i < nTimes; i++)
  3424. {
  3425. int cWd =(int) Math.Ceiling(nUp + i * nStep + 0.5);
  3426. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3427. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3428. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3429. int swd = cWd / 100;
  3430. //SendMsg("wd = " + swd.ToString() +"um");
  3431. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3432. arg.Picture_Information.Picture_FullPath = fileName;
  3433. if (!GetImage(fileName))
  3434. {
  3435. return false;
  3436. }
  3437. //arg.State = true;
  3438. //arg.Message = "自动对焦";
  3439. //SendMsg("0-9");
  3440. //判断是否停止进程
  3441. if (key_stop)
  3442. {
  3443. return false;
  3444. }
  3445. //Thread.Sleep(3000);
  3446. }
  3447. //1.2, 选定细拍照的工作距离
  3448. int CorWd = 510000;
  3449. ChooseBest(path_coarse,out CorWd);
  3450. if (CorWd == -1)
  3451. CorWd = 510000;
  3452. else
  3453. a_nWd = CorWd;
  3454. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3455. //1.3, 细拍照
  3456. if ( (CorWd - a_param.Range * 100.0) <=0)
  3457. {
  3458. return false;
  3459. }
  3460. double nfUp = CorWd - a_param.Range * 100.0;
  3461. double nfStep = a_param.fStep * 100.0;
  3462. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3463. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3464. for (int i = 0; i < nfTimes; i++)
  3465. {
  3466. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3467. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3468. arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3469. Thread.Sleep(Convert.ToInt32(cycle_time)+100);
  3470. int swd = cWd / 100;
  3471. //SendMsg("wd = " + swd.ToString() + "um");
  3472. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3473. arg.Picture_Information.Picture_FullPath = fileName;
  3474. if (!GetImage(fileName))
  3475. {
  3476. return false;
  3477. }
  3478. //arg.State = true;
  3479. //arg.Message = "自动对焦";
  3480. //SendMsg("0-9");
  3481. //判断是否停止进程
  3482. if (key_stop)
  3483. {
  3484. return false;
  3485. }
  3486. //Thread.Sleep(2000);
  3487. }
  3488. int fineWd = CorWd;
  3489. ChooseBest(path_fine, out fineWd);
  3490. //SendMsg("wd fine max = " + fineWd.ToString());
  3491. if (fineWd == -1)
  3492. a_nWd = CorWd;
  3493. else
  3494. a_nWd = fineWd;
  3495. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3496. //arg.State = true;
  3497. //arg.Message = "自动对焦";
  3498. //SendMsg(step_code);
  3499. return true;
  3500. }
  3501. //自动聚焦1
  3502. public bool AutoFocus1(FocusParam a_param, out int a_nWd)
  3503. {
  3504. a_nWd = 0;
  3505. float wd = iSEM.GetWorkingDistance();
  3506. a_nWd = (int)Math.Ceiling(wd * 100000000 + 0.5);//获取当前的工作距离
  3507. if (a_param == null)
  3508. {
  3509. LogManager.AddHardwareLog("空参数", true);
  3510. return false;
  3511. }
  3512. string path = a_param.Path;
  3513. if (!Directory.Exists(path))
  3514. {
  3515. LogManager.AddHardwareLog("文件夹丢失", true);
  3516. return false;
  3517. }
  3518. string path_coarse = a_param.Path + "\\Coarse";
  3519. if (!Directory.Exists(path_coarse))
  3520. {
  3521. Directory.CreateDirectory(path_coarse);
  3522. }
  3523. string path_fine = a_param.Path + "\\Fine";
  3524. if (!Directory.Exists(path_fine))
  3525. {
  3526. Directory.CreateDirectory(path_fine);
  3527. }
  3528. //1. 拍照
  3529. //1.1, 粗拍照
  3530. //1.1.1, 根据参数计算拍照次数
  3531. double nUp = a_param.UP * 100.0;
  3532. double nDown = a_param.Down * 100.0;
  3533. double nStep = a_param.Step * 100.0;
  3534. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3535. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3536. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3537. //粗拍照
  3538. for (int i = 0; i < nTimes; i++)
  3539. {
  3540. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3541. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3542. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3543. Thread.Sleep(Convert.ToInt32(cycle_time) + 50);
  3544. int swd = cWd / 100;
  3545. //SendMsg("wd = " + swd.ToString() +"um");
  3546. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3547. //arg.Picture_Information.Picture_FullPath = fileName;
  3548. if (!GetImage1(fileName))
  3549. {
  3550. return false;
  3551. }
  3552. //arg.State = true;
  3553. //arg.Message = "自动对焦";
  3554. //SendMsg(step_code);
  3555. //判断是否停止进程
  3556. if (key_stop)
  3557. {
  3558. return false;
  3559. }
  3560. //Thread.Sleep(3000);
  3561. }
  3562. //1.2, 选定细拍照的工作距离
  3563. int CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3564. ChooseBest(path_coarse, out CorWd);
  3565. if (CorWd == -1)
  3566. CorWd = (int)Math.Ceiling(wd * 100000000 + 0.5);
  3567. else
  3568. a_nWd = CorWd;
  3569. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3570. //1.3, 细拍照
  3571. if ((CorWd - a_param.Range * 100.0) <= 0)
  3572. {
  3573. return false;
  3574. }
  3575. double nfUp = CorWd - a_param.Range * 100.0;
  3576. double nfStep = a_param.fStep * 100.0;
  3577. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3578. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3579. for (int i = 0; i < nfTimes; i++)
  3580. {
  3581. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3582. iSEM.SetWorkingDistance((float)(cWd * 0.00000001));
  3583. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3584. Thread.Sleep(Convert.ToInt32(cycle_time) + 1000);
  3585. int swd = cWd / 100;
  3586. //SendMsg("wd = " + swd.ToString() + "um");
  3587. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3588. //arg.Picture_Information.Picture_FullPath = fileName;
  3589. if (!GetImage1(fileName))
  3590. {
  3591. return false;
  3592. }
  3593. //arg.State = true;
  3594. //arg.Message = "自动对焦";
  3595. //SendMsg(step_code);
  3596. //判断是否停止进程
  3597. if (key_stop)
  3598. {
  3599. return false;
  3600. }
  3601. //Thread.Sleep(2000);
  3602. }
  3603. int fineWd = CorWd;
  3604. ChooseBest(path_fine, out fineWd);
  3605. //SendMsg("wd fine max = " + fineWd.ToString());
  3606. if (fineWd == -1)
  3607. a_nWd = CorWd;
  3608. else
  3609. a_nWd = fineWd;
  3610. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3611. //arg.State = true;
  3612. //arg.Message = "自动对焦";
  3613. //SendMsg("0-9");
  3614. return true;
  3615. }
  3616. //自动消像散 AutoStig
  3617. public bool AutoStig(FocusParam a_param, out int a_nWd)
  3618. {
  3619. a_nWd = 0;
  3620. float wd = 0;
  3621. if (a_param.TYPE == 2)
  3622. {
  3623. wd = iSEM.GetAstigmatismX();
  3624. }
  3625. else if (a_param.TYPE == 3)
  3626. {
  3627. wd = iSEM.GetAstigmatismY();
  3628. }
  3629. else
  3630. {
  3631. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3632. return false;
  3633. }
  3634. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3635. if (a_param == null)
  3636. {
  3637. LogManager.AddHardwareLog("空参数", true);
  3638. return false;
  3639. }
  3640. string path = a_param.Path;
  3641. if (!Directory.Exists(path))
  3642. {
  3643. LogManager.AddHardwareLog("文件夹丢失", true);
  3644. return false;
  3645. }
  3646. string path_coarse = a_param.Path + "\\Coarse";
  3647. if (!Directory.Exists(path_coarse))
  3648. {
  3649. Directory.CreateDirectory(path_coarse);
  3650. }
  3651. string path_fine = a_param.Path + "\\Fine";
  3652. if (!Directory.Exists(path_fine))
  3653. {
  3654. Directory.CreateDirectory(path_fine);
  3655. }
  3656. //1. 拍照
  3657. //1.1, 粗拍照
  3658. //1.1.1, 根据参数计算拍照次数
  3659. double nUp = a_param.UP * 100.0;
  3660. double nDown = a_param.Down * 100.0;
  3661. double nStep = a_param.Step * 100.0;
  3662. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3663. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3664. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3665. //粗拍照
  3666. for (int i = 0; i < nTimes; i++)
  3667. {
  3668. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3669. if (a_param.TYPE == 2)
  3670. {
  3671. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3672. }
  3673. else if (a_param.TYPE == 3)
  3674. {
  3675. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3676. }
  3677. else
  3678. {
  3679. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3680. return false;
  3681. }
  3682. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3683. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3684. int swd = cWd / 100;
  3685. //SendMsg("wd = " + swd.ToString() +"um");
  3686. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3687. arg.Picture_Information.Picture_FullPath = fileName;
  3688. if (!GetImage(fileName))
  3689. {
  3690. return false;
  3691. }
  3692. arg.State = true;
  3693. arg.Message = "自动像散";
  3694. SendMsg("0-8");
  3695. //判断是否停止进程
  3696. if (key_stop)
  3697. {
  3698. return false;
  3699. }
  3700. //Thread.Sleep(3000);
  3701. }
  3702. //1.2, 选定细拍照的工作距离
  3703. int CorWd;
  3704. ChooseBest(path_coarse, out CorWd);
  3705. if (CorWd == -1)
  3706. {
  3707. a_nWd = 0;
  3708. }
  3709. else
  3710. {
  3711. a_nWd = CorWd;
  3712. }
  3713. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  3714. //1.3, 细拍照
  3715. if ((CorWd - a_param.Range * 100.0) <= -10000)
  3716. {
  3717. return false;
  3718. }
  3719. double nfUp = 0;
  3720. if (a_param.Range >= 0)
  3721. nfUp = CorWd - a_param.Range * 100.0;
  3722. else
  3723. nfUp = CorWd + a_param.Range * 100.0;
  3724. double nfStep = a_param.fStep * 100.0;
  3725. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  3726. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  3727. for (int i = 0; i < nfTimes; i++)
  3728. {
  3729. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  3730. if (a_param.TYPE == 2)
  3731. {
  3732. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3733. }
  3734. else if (a_param.TYPE == 3)
  3735. {
  3736. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3737. }
  3738. else
  3739. {
  3740. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3741. return false;
  3742. }
  3743. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3744. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  3745. int swd = cWd / 100;
  3746. //SendMsg("wd = " + swd.ToString() + "um");
  3747. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  3748. arg.Picture_Information.Picture_FullPath = fileName;
  3749. if (!GetImage(fileName))
  3750. {
  3751. return false;
  3752. }
  3753. arg.State = true;
  3754. arg.Message = "自动像散";
  3755. SendMsg("0-8");
  3756. //判断是否停止进程
  3757. if (key_stop)
  3758. {
  3759. return false;
  3760. }
  3761. //Thread.Sleep(2000);
  3762. }
  3763. int fineWd = CorWd;
  3764. ChooseBest(path_fine, out fineWd);
  3765. //SendMsg("wd fine max = " + fineWd.ToString());
  3766. if(fineWd == -1)
  3767. a_nWd = CorWd;
  3768. else
  3769. a_nWd = fineWd;
  3770. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  3771. //arg.State = true;
  3772. //arg.Message = "自动像散";
  3773. //SendMsg(step_code);
  3774. return true;
  3775. }
  3776. //执行自动消像散1
  3777. public bool ImageStig1()
  3778. {
  3779. if (m_measureFile.MParam.FocusMode == 1)//手动
  3780. {
  3781. if (DialogResult.Yes == MessageBox.Show("图像自动消像散已完成?", "确认消息", MessageBoxButtons.YesNo))
  3782. {
  3783. }
  3784. else
  3785. {
  3786. return false;
  3787. }
  3788. }
  3789. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  3790. {
  3791. //郝工增加自动对焦算法
  3792. //处理文件夹
  3793. if (Directory.Exists(StigX_path))
  3794. {
  3795. Directory.Delete(StigX_path, true);
  3796. }
  3797. Thread.Sleep(3000);
  3798. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3799. Thread.Sleep(200);
  3800. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3801. Thread.Sleep(200);
  3802. //再创建文件夹
  3803. Directory.CreateDirectory(StigX_path);
  3804. //1、对焦参数类,2、输出像散值
  3805. int stigX = 0;
  3806. //根据当前的stigX重新计算像散值
  3807. float currentStigX = 0;// iSEM.GetAstigmatismX();
  3808. //m_MsParam.AutoStigX.Step = 10; //像散的步长为10
  3809. //m_MsParam.AutoStigX.UP = currentStigX - m_MsParam.AutoStigX.Step;
  3810. //m_MsParam.AutoStigX.Down = currentStigX + m_MsParam.AutoStigX.Step;
  3811. //设置工作距离
  3812. currentStigX = iSEM.GetAstigmatismX();
  3813. Thread.Sleep(1000);
  3814. FocusParam pFocus = new FocusParam();
  3815. pFocus = m_measureFile.MParam.AutoStigX;
  3816. float old_up = m_measureFile.MParam.AutoStigX.UP;
  3817. float old_down = m_measureFile.MParam.AutoStigX.Down;
  3818. float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3819. pFocus.UP = currentStigX - setvalue;
  3820. pFocus.Down = currentStigX + setvalue;
  3821. //m_measureFile.MParam.AutoStigX.Step = 1;
  3822. //m_measureFile.MParam.AutoStigX.Range = (float)0.5;
  3823. //m_measureFile.MParam.AutoStigX.fStep = (float)0.1;
  3824. LogManager.AddHardwareLog("消像散参数: up = "+pFocus.UP+",down = " + pFocus.Down+ ",step =" + pFocus.Step + ",rang ="+ pFocus.Range + ",fstep = " + pFocus.fStep, true);
  3825. //LogManager.AddHardwareLog("修改消像散参数", true);
  3826. AutoStig1(pFocus, out stigX);
  3827. m_measureFile.MParam.AutoStigX.UP = old_up;
  3828. m_measureFile.MParam.AutoStigX.Down = old_down;
  3829. LogManager.AddHardwareLog("自动消散算法输出X" + (stigX * 0.01).ToString(), true);
  3830. //设置工作距离
  3831. iSEM.SetAstigmatismX((float)(stigX * 0.01));
  3832. //设置完工作距离后必须延迟5秒
  3833. Thread.Sleep(5000);
  3834. //处理图片位置
  3835. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  3836. //处理文件夹
  3837. if (Directory.Exists(StigY_path))
  3838. {
  3839. Directory.Delete(StigY_path, true);
  3840. }
  3841. Thread.Sleep(3000);
  3842. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  3843. Thread.Sleep(200);
  3844. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  3845. Thread.Sleep(200);
  3846. //再创建文件夹
  3847. Directory.CreateDirectory(StigY_path);
  3848. //1、对焦参数类,2、输出像散值
  3849. int stigY = 0;
  3850. //根据当前的stigX重新计算像散值
  3851. float currentStigY = 0;// iSEM.GetAstigmatismY();
  3852. //m_MsParam.AutoStigY.Step = 10; //像散的步长为10
  3853. //m_MsParam.AutoStigY.UP = m_MsParam.AutoStigY.;
  3854. //m_MsParam.AutoStigY.Down = m_MsParam.AutoStigY.Step;
  3855. currentStigY = iSEM.GetAstigmatismY();
  3856. Thread.Sleep(1000);
  3857. //m_measureFile.MParam.AutoStigY.UP = currentStigY - setvalue;
  3858. //m_measureFile.MParam.AutoStigY.Down = currentStigY + setvalue;
  3859. //m_measureFile.MParam.AutoStigY.Step = 1;
  3860. //m_measureFile.MParam.AutoStigY.Range = (float)0.5;
  3861. //m_measureFile.MParam.AutoStigY.fStep = (float)0.1;
  3862. FocusParam pFocusY = new FocusParam();
  3863. pFocusY = m_measureFile.MParam.AutoStigY;
  3864. float old_upY = m_measureFile.MParam.AutoStigY.UP;
  3865. float old_downY = m_measureFile.MParam.AutoStigY.Down;
  3866. //float setvalue = m_measureFile.MParam.AutoStigX.UP;
  3867. pFocusY.UP = currentStigY - setvalue;
  3868. pFocusY.Down = currentStigY + setvalue;
  3869. LogManager.AddHardwareLog("消像散参数: up = " + pFocusY.UP + ",down = " + pFocusY.Down + ",step =" + pFocusY.Step + ",rang =" + pFocusY.Range + ",fstep = " + pFocusY.fStep, true);
  3870. AutoStig1(pFocusY, out stigY);
  3871. m_measureFile.MParam.AutoStigY.UP = old_upY;
  3872. m_measureFile.MParam.AutoStigY.Down = old_downY;
  3873. LogManager.AddHardwareLog("自动消散算法输出Y" + (stigY * 0.01).ToString(), true);
  3874. //设置工作距离
  3875. iSEM.SetAstigmatismY((float)(stigY * 0.01));
  3876. //设置完工作距离后必须延迟5秒
  3877. Thread.Sleep(5000);
  3878. }
  3879. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  3880. {
  3881. //后期和客户对接接口
  3882. List<string> filenames = new List<string>();
  3883. String retfilename = wr.Img_Auto_Focus(filenames);
  3884. }
  3885. else //蔡司自动对焦
  3886. {
  3887. iSEM.CmdAutoFocusCoarse();
  3888. while (true)
  3889. {
  3890. Thread.Sleep(10000);
  3891. if (0 == iSEM.GetAutoFunction())
  3892. {
  3893. break;
  3894. }
  3895. }
  3896. iSEM.CmdAutoFocusFine();
  3897. while (true)
  3898. {
  3899. Thread.Sleep(10000);
  3900. if (0 == iSEM.GetAutoFunction())
  3901. {
  3902. break;
  3903. }
  3904. }
  3905. }
  3906. return true;
  3907. }
  3908. //自动消像散 AutoStig1
  3909. public bool AutoStig1(FocusParam a_param, out int a_nWd)
  3910. {
  3911. a_nWd = 0;
  3912. float wd = 0;
  3913. if (a_param.TYPE == 2)
  3914. {
  3915. wd = iSEM.GetAstigmatismX();
  3916. }
  3917. else if (a_param.TYPE == 3)
  3918. {
  3919. wd = iSEM.GetAstigmatismY();
  3920. }
  3921. else
  3922. {
  3923. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3924. return false;
  3925. }
  3926. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  3927. if (a_param == null)
  3928. {
  3929. LogManager.AddHardwareLog("空参数", true);
  3930. return false;
  3931. }
  3932. string path = a_param.Path;
  3933. if (!Directory.Exists(path))
  3934. {
  3935. LogManager.AddHardwareLog("文件夹丢失", true);
  3936. return false;
  3937. }
  3938. string path_coarse = a_param.Path + "\\Coarse";
  3939. if (!Directory.Exists(path_coarse))
  3940. {
  3941. Directory.CreateDirectory(path_coarse);
  3942. }
  3943. string path_fine = a_param.Path + "\\Fine";
  3944. if (!Directory.Exists(path_fine))
  3945. {
  3946. Directory.CreateDirectory(path_fine);
  3947. }
  3948. //1. 拍照
  3949. //1.1, 粗拍照
  3950. //1.1.1, 根据参数计算拍照次数
  3951. double nUp = a_param.UP * 100.0;
  3952. double nDown = a_param.Down * 100.0;
  3953. double nStep = a_param.Step * 100.0;
  3954. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  3955. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  3956. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  3957. //粗拍照
  3958. for (int i = 0; i < nTimes; i++)
  3959. {
  3960. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  3961. if (a_param.TYPE == 2)
  3962. {
  3963. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  3964. }
  3965. else if (a_param.TYPE == 3)
  3966. {
  3967. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  3968. }
  3969. else
  3970. {
  3971. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  3972. return false;
  3973. }
  3974. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  3975. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  3976. int swd = cWd / 100;
  3977. //SendMsg("wd = " + swd.ToString() +"um");
  3978. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  3979. arg.Picture_Information.Picture_FullPath = fileName;
  3980. if (!GetImage1(fileName))
  3981. {
  3982. return false;
  3983. }
  3984. //arg.State = true;
  3985. //arg.Message = "自动像散";
  3986. //SendMsg(step_code);
  3987. //判断是否停止进程
  3988. if (key_stop)
  3989. {
  3990. return false;
  3991. }
  3992. //Thread.Sleep(3000);
  3993. }
  3994. //1.2, 选定细拍照的工作距离
  3995. int CorWd;
  3996. ChooseBest(path_coarse, out CorWd);
  3997. if (CorWd == -1)
  3998. {
  3999. a_nWd = 0;
  4000. }
  4001. else
  4002. {
  4003. a_nWd = CorWd;
  4004. }
  4005. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4006. //1.3, 细拍照
  4007. if ((CorWd - a_param.Range * 100.0) <= -10000)
  4008. {
  4009. return false;
  4010. }
  4011. double nfUp = 0;
  4012. if (a_param.Range >= 0)
  4013. nfUp = CorWd - a_param.Range * 100.0;
  4014. else
  4015. nfUp = CorWd + a_param.Range * 100.0;
  4016. double nfStep = a_param.fStep * 100.0;
  4017. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4018. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4019. for (int i = 0; i < nfTimes; i++)
  4020. {
  4021. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4022. if (a_param.TYPE == 2)
  4023. {
  4024. iSEM.SetAstigmatismX((float)(cWd * 0.01));
  4025. }
  4026. else if (a_param.TYPE == 3)
  4027. {
  4028. iSEM.SetAstigmatismY((float)(cWd * 0.01));
  4029. }
  4030. else
  4031. {
  4032. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4033. return false;
  4034. }
  4035. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4036. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  4037. int swd = cWd / 100;
  4038. //SendMsg("wd = " + swd.ToString() + "um");
  4039. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4040. arg.Picture_Information.Picture_FullPath = fileName;
  4041. if (!GetImage1(fileName))
  4042. {
  4043. return false;
  4044. }
  4045. //arg.State = true;
  4046. //arg.Message = "自动像散";
  4047. //SendMsg(step_code);
  4048. //判断是否停止进程
  4049. if (key_stop)
  4050. {
  4051. return false;
  4052. }
  4053. //Thread.Sleep(2000);
  4054. }
  4055. int fineWd = CorWd;
  4056. ChooseBest(path_fine, out fineWd);
  4057. //SendMsg("wd fine max = " + fineWd.ToString());
  4058. if (fineWd == -1)
  4059. a_nWd = CorWd;
  4060. else
  4061. a_nWd = fineWd;
  4062. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4063. //arg.State = true;
  4064. //arg.Message = "自动像散";
  4065. //SendMsg("0-9");
  4066. return true;
  4067. }
  4068. //自动FIB对焦 AutoFIBFocus
  4069. public bool AutoFIBFocus(FocusParam a_param, out int a_nWd, String step_code)
  4070. {
  4071. a_nWd = 0;
  4072. float wd = 0;
  4073. if (a_param.TYPE == 4)
  4074. {
  4075. wd = iSEM.GetFIBObjectivePotential();
  4076. }
  4077. else
  4078. {
  4079. LogManager.AddHardwareLog("FIB自动聚焦参数设置有误", true);
  4080. return false;
  4081. }
  4082. a_nWd = (int)Math.Ceiling(wd * 100 + 0.5);//获取当前的工作距离
  4083. if (a_param == null)
  4084. {
  4085. LogManager.AddHardwareLog("空参数", true);
  4086. return false;
  4087. }
  4088. string path = a_param.Path;
  4089. if (!Directory.Exists(path))
  4090. {
  4091. LogManager.AddHardwareLog("文件夹丢失", true);
  4092. return false;
  4093. }
  4094. string path_coarse = a_param.Path + "\\Coarse";
  4095. if (!Directory.Exists(path_coarse))
  4096. {
  4097. Directory.CreateDirectory(path_coarse);
  4098. }
  4099. string path_fine = a_param.Path + "\\Fine";
  4100. if (!Directory.Exists(path_fine))
  4101. {
  4102. Directory.CreateDirectory(path_fine);
  4103. }
  4104. //1. 拍照
  4105. //1.1, 粗拍照
  4106. //1.1.1, 根据参数计算拍照次数
  4107. double nUp = a_param.UP * 100.0;
  4108. double nDown = a_param.Down * 100.0;
  4109. double nStep = a_param.Step * 100.0;
  4110. double nTimes = Math.Ceiling((nDown - nUp) / nStep + 0.5);
  4111. LogManager.AddHardwareLog("初调拍照次数=" + nTimes.ToString(), true);
  4112. //SendMsg("粗对焦:最小值" + nUp.ToString() + ",最大值" + nDown.ToString() + ",步长" + nStep.ToString() + "拍照张数" + nTimes.ToString());
  4113. //粗拍照
  4114. for (int i = 0; i < nTimes; i++)
  4115. {
  4116. int cWd = (int)Math.Ceiling(nUp + i * nStep + 0.5);
  4117. if (a_param.TYPE == 4)
  4118. {
  4119. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4120. }
  4121. else
  4122. {
  4123. LogManager.AddHardwareLog("FIB对焦参数设置有误,对焦类型错", true);
  4124. return false;
  4125. }
  4126. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4127. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4128. int swd = cWd / 100;
  4129. //SendMsg("wd = " + swd.ToString() +"um");
  4130. String fileName = path_coarse + "\\" + cWd.ToString() + ".tif";
  4131. arg.Picture_Information.Picture_FullPath = fileName;
  4132. if (!GetImage(fileName))
  4133. {
  4134. return false;
  4135. }
  4136. arg.State = true;
  4137. arg.Message = "FIB自动对焦";
  4138. SendMsg(step_code);
  4139. //判断是否停止进程
  4140. if (key_stop)
  4141. {
  4142. return false;
  4143. }
  4144. //Thread.Sleep(3000);
  4145. }
  4146. //1.2, 选定细拍照的工作距离
  4147. int CorWd;
  4148. ChooseBest(path_coarse, out CorWd);
  4149. a_nWd = CorWd;
  4150. //SendMsg("粗选工作距离wd = " + a_nWd.ToString() );
  4151. //1.3, 细拍照
  4152. if ((CorWd - a_param.Range * 100.0) <0)
  4153. {
  4154. return false;
  4155. }
  4156. double nfUp = CorWd - a_param.Range * 100.0;
  4157. double nfStep = a_param.fStep * 100.0;
  4158. double nfTimes = Math.Ceiling((a_param.Range * 100.0 * 2) / nfStep + 0.5);
  4159. //SendMsg("粗对焦:最小值" + nfUp.ToString() + ",步长" + nfStep.ToString() + "拍照张数" + nfTimes.ToString());
  4160. for (int i = 0; i < nfTimes; i++)
  4161. {
  4162. int cWd = (int)Math.Ceiling(nfUp + i * nfStep + 0.5);
  4163. if (a_param.TYPE == 4)
  4164. {
  4165. iSEM.SetFIBObjectivePotential((float)(cWd * 0.01));
  4166. }
  4167. else
  4168. {
  4169. LogManager.AddHardwareLog("自动消像散参数设置有误", true);
  4170. return false;
  4171. }
  4172. //arg.Picture_Information.Work_Distance = (float)(cWd * 0.00000001);
  4173. Thread.Sleep(Convert.ToInt32(cycle_time) +100);
  4174. int swd = cWd / 100;
  4175. //SendMsg("wd = " + swd.ToString() + "um");
  4176. String fileName = path_fine + "\\" + cWd.ToString() + ".tif";
  4177. arg.Picture_Information.Picture_FullPath = fileName;
  4178. if (!GetImage(fileName))
  4179. {
  4180. return false;
  4181. }
  4182. arg.State = true;
  4183. arg.Message = "FIB自动对焦";
  4184. SendMsg(step_code);
  4185. //判断是否停止进程
  4186. if (key_stop)
  4187. {
  4188. return false;
  4189. }
  4190. //Thread.Sleep(2000);
  4191. }
  4192. int fineWd;
  4193. ChooseBest(path_fine, out fineWd);
  4194. //SendMsg("wd fine max = " + fineWd.ToString());
  4195. a_nWd = fineWd;
  4196. //SendMsg("细选工作距离wd = " + a_nWd.ToString());
  4197. return true;
  4198. }
  4199. //LoG算子计算
  4200. private double LoGMean(string a_strImgPath)
  4201. {
  4202. //读入Img文件
  4203. if (!File.Exists(a_strImgPath))
  4204. {
  4205. return 0;
  4206. }
  4207. Mat src, gray_src;
  4208. int kernel_size = 3;
  4209. src = Cv2.ImRead(a_strImgPath);
  4210. gray_src = new Mat();
  4211. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4212. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4213. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4214. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4215. Cv2.Laplacian(src, src, MatType.CV_8UC3, kernel_size);
  4216. Cv2.ConvertScaleAbs(src, src);
  4217. //图像的平均灰度
  4218. double meanValue = 0.0;
  4219. meanValue = Cv2.Mean(src)[0];
  4220. return meanValue;
  4221. }
  4222. //梯度计算
  4223. private double Tenengrad(string a_strImgPath)
  4224. {
  4225. //读入Img文件
  4226. if (!File.Exists(a_strImgPath))
  4227. {
  4228. return 0;
  4229. }
  4230. Mat src;
  4231. src = Cv2.ImRead(a_strImgPath);
  4232. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4233. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4234. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4235. Cv2.GaussianBlur(src, src, new OpenCvSharp.Size(3, 3), 0, 0);
  4236. Cv2.Sobel(src, src, MatType.CV_8UC1, 1, 1);
  4237. //图像的平均灰度
  4238. double meanValue = 0.0;
  4239. meanValue = Cv2.Mean(src)[0];
  4240. return meanValue;
  4241. }
  4242. //梯度计算
  4243. private double TTgrad(string a_strImgPath)
  4244. {
  4245. //读入Img文件
  4246. if (!File.Exists(a_strImgPath))
  4247. {
  4248. return 0;
  4249. }
  4250. Mat src;
  4251. src = Cv2.ImRead(a_strImgPath);
  4252. src.CvtColor(ColorConversionCodes.BGR2GRAY);
  4253. Mat kernel = Cv2.GetStructuringElement(MorphShapes.Cross, new OpenCvSharp.Size(10, 10));
  4254. Cv2.MorphologyEx(src, src, MorphTypes.Close, kernel);
  4255. Mat scalex = new Mat();
  4256. Mat scaley = new Mat();
  4257. Cv2.Scharr(src, src, src.Depth(), 1, 0);
  4258. Cv2.ConvertScaleAbs(src, scalex);
  4259. Cv2.Scharr(src, src, src.Depth(), 0, 1);
  4260. Cv2.ConvertScaleAbs(src, scaley);
  4261. Cv2.AddWeighted(scalex, 0.5, scaley, 0.5, 0, src);
  4262. //图像的平均灰度
  4263. double meanValue = 0.0;
  4264. meanValue = Cv2.Mean(src)[0];
  4265. return meanValue;
  4266. }
  4267. //三选二算法
  4268. private bool ChooseBest(string a_strImgPath, out int a_nWd)
  4269. {
  4270. a_nWd = -1;
  4271. var files = Directory.GetFiles(a_strImgPath, "*.tif");
  4272. float[] values = new float[files.Length];
  4273. double smax1 = LoGMean(files[0]);
  4274. int wdmax1 = int.Parse(System.IO.Path.GetFileNameWithoutExtension(files[0]));
  4275. double smax2 = Tenengrad(files[0]);
  4276. int wdmax2 = wdmax1;
  4277. double smax3 = TTgrad(files[0]);
  4278. int wdmax3 = wdmax1;
  4279. int x = 0;
  4280. foreach (var file in files)
  4281. {
  4282. int wd = int.Parse(System.IO.Path.GetFileNameWithoutExtension(file));
  4283. double svalue1 = LoGMean(file);
  4284. double svalue2 = Tenengrad(file);
  4285. double svalue3 = TTgrad(file);
  4286. if (smax1 < svalue1)
  4287. {
  4288. smax1 = svalue1;
  4289. wdmax1 = wd;
  4290. }
  4291. if (smax2 < svalue2)
  4292. {
  4293. smax2 = svalue2;
  4294. wdmax2 = wd;
  4295. }
  4296. if (smax3 < svalue3)
  4297. {
  4298. smax3 = svalue3;
  4299. wdmax3 = wd;
  4300. }
  4301. x++;
  4302. }
  4303. //SendMsg("LoG = " + wdmax1.ToString() + ",梯度 = " + wdmax2.ToString() + ",滤波 = " + wdmax3.ToString());
  4304. if (wdmax1 == wdmax2 || wdmax1 == wdmax3)
  4305. {
  4306. a_nWd = wdmax1;
  4307. //SendMsg("焦距 = " + wdmax1.ToString());
  4308. }
  4309. else if (wdmax1 == wdmax2 || wdmax2 == wdmax3)
  4310. {
  4311. a_nWd = wdmax2;
  4312. //SendMsg("焦距 = " + wdmax2.ToString());
  4313. }
  4314. else if (wdmax3 == wdmax2 || wdmax1 == wdmax3)
  4315. {
  4316. a_nWd = wdmax3;
  4317. //SendMsg("焦距 = " + wdmax3.ToString());
  4318. }
  4319. else
  4320. {
  4321. //SendMsg("对焦失败。");
  4322. return false;
  4323. }
  4324. return true;
  4325. }
  4326. //移动到像素位置,这里要靠移动样品台实现,当位移量小于3um时,不予移动
  4327. bool MoveToPixByMoveStage(float xc, float yc)
  4328. {
  4329. //单位是m/pix
  4330. float XpixSize = iSEM.GetPixelSize();
  4331. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel", true);
  4332. float YpixSize = iSEM.GetPixelSize();///(float)m_measureFile.MParam.PixelSizeCor);
  4333. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4334. Thread.Sleep(500);
  4335. //0:width, 1:height
  4336. int[] imageSize = iSEM.GetImageStore();
  4337. int width = imageSize[0] / 2;
  4338. int height = imageSize[1] / 2;
  4339. LogManager.AddHardwareLog("目标像素是(" + xc.ToString() + "," + yc.ToString() + ")", true);
  4340. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4341. float deltX = (xc - (float)width) * XpixSize;
  4342. float deltY = (yc - (float)height) * YpixSize;
  4343. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4344. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4345. float xpCur = iSEM.GetStageAtX();
  4346. float ypCur = iSEM.GetStageAtY();
  4347. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4348. float xpNew = xpCur - deltX;
  4349. float ypNew = ypCur + deltY;
  4350. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4351. //计算光束偏移值:
  4352. //if (deltX >= 0.000003 || deltX <= 0.000003)//大于3um使用移动样品台实现
  4353. {
  4354. LogManager.AddHardwareLog("X方向移动样品台", true);
  4355. if (!iSEM.SetStageGotoX(xpNew))
  4356. {
  4357. return false;
  4358. }
  4359. //判断是否移动完成
  4360. while (true)
  4361. {
  4362. Thread.Sleep(5000);
  4363. if (iSEM.GetStageIs() == 0)
  4364. {
  4365. break;
  4366. }
  4367. }
  4368. }
  4369. //if (deltY >= 0.000003 || deltY <= -0.000003)//大于3um使用移动样品台实现
  4370. {
  4371. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4372. if (!iSEM.SetStageGotoY(ypNew))
  4373. {
  4374. return false;
  4375. }
  4376. //判断是否移动完成
  4377. while (true)
  4378. {
  4379. Thread.Sleep(5000);
  4380. if (iSEM.GetStageIs() == 0)
  4381. {
  4382. break;
  4383. }
  4384. }
  4385. }
  4386. return true;
  4387. }
  4388. //移动到像素位置
  4389. bool MoveToPix(float xc, float yc)
  4390. {
  4391. //单位是m/pix
  4392. float XpixSize = iSEM.GetPixelSize();
  4393. LogManager.AddHardwareLog("X像素尺寸=" + XpixSize.ToString() + "m/pixel",true);
  4394. float YpixSize = (XpixSize/(float)m_measureFile.MParam.PixelSizeCor);
  4395. LogManager.AddHardwareLog("Y像素尺寸=" + YpixSize.ToString() + "m/pixel", true);
  4396. Thread.Sleep(200);
  4397. //0:width, 1:height
  4398. int[] imageSize = iSEM.GetImageStore();
  4399. int width = imageSize[0]/2;
  4400. int height = imageSize[1]/2;
  4401. LogManager.AddHardwareLog("目标像素是(" + xc.ToString()+ ","+ yc.ToString() + ")", true);
  4402. LogManager.AddHardwareLog("中心像素是(" + width.ToString() + "," + height.ToString() + ")", true);
  4403. float deltX = (xc - (float)width) * XpixSize;
  4404. float deltY = (yc - (float)height) * YpixSize;
  4405. LogManager.AddHardwareLog("x位移量 = " + deltX.ToString() + "m", true);
  4406. LogManager.AddHardwareLog("y位移量 = " + deltY.ToString() + "m", true);
  4407. float xpCur = iSEM.GetStageAtX();
  4408. Thread.Sleep(200);
  4409. float ypCur = iSEM.GetStageAtY();
  4410. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString()+ "," + ypCur.ToString() + "),单位m", true);
  4411. float xpNew = xpCur - deltX;
  4412. float ypNew = ypCur + deltY;
  4413. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4414. //计算最大偏移量
  4415. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4416. Thread.Sleep(200);
  4417. iSEM.SetBeamShiftX(100);
  4418. Thread.Sleep(200);
  4419. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4420. Thread.Sleep(200);
  4421. iSEM.SetBeamShiftX(beamXCur);
  4422. Thread.Sleep(200);
  4423. //计算光束偏移值:
  4424. float beamX = iSEM.GetBeamOffsetX();
  4425. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4426. beamX = (-deltX + beamX);
  4427. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4428. if( ((beamX <= beamXMax) && (beamX >=0)) ||
  4429. ((beamX >= -beamXMax)&& (beamX < 0)))
  4430. {
  4431. LogManager.AddHardwareLog("X方向移动光束", true);
  4432. float beamXShift = beamX * 100 / beamXMax;
  4433. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamXShift.ToString() + "%", true);
  4434. if (!iSEM.SetBeamShiftX(beamXShift))
  4435. //if (!iSEM.SetBeamOffsetX(beamX))
  4436. {
  4437. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4438. return false;
  4439. }
  4440. }
  4441. else if(deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4442. {
  4443. LogManager.AddHardwareLog("X方向移动样品台", true);
  4444. if (!iSEM.SetStageGotoX(xpNew))
  4445. {
  4446. return false;
  4447. }
  4448. //判断是否移动完成
  4449. while (true)
  4450. {
  4451. Thread.Sleep(4000);
  4452. if (iSEM.GetStageIs() == 0)
  4453. {
  4454. break;
  4455. }
  4456. }
  4457. }
  4458. float beamY = iSEM.GetBeamOffsetY();
  4459. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4460. beamY = (-deltY + beamY);
  4461. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4462. //计算最大偏移量
  4463. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4464. Thread.Sleep(200);
  4465. iSEM.SetBeamShiftY(100);
  4466. Thread.Sleep(200);
  4467. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4468. Thread.Sleep(200);
  4469. iSEM.SetBeamShiftY(beamYCur);
  4470. Thread.Sleep(200);
  4471. if (((beamY <= beamYMax) && (beamY >= 0)) ||
  4472. ((beamY >= -beamYMax) && (beamY < 0)))
  4473. {
  4474. LogManager.AddHardwareLog("Y方向移动光束", true);
  4475. float beamYShift = beamY * 100 / beamYMax;
  4476. LogManager.AddHardwareLog("Y方向光束偏移量" + beamYShift.ToString() + "%", true);
  4477. //if(!iSEM.SetBeamOffsetY(beamY))
  4478. if (!iSEM.SetBeamShiftY(beamYShift))
  4479. {
  4480. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4481. return false;
  4482. }
  4483. }
  4484. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4485. {
  4486. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4487. if (!iSEM.SetStageGotoY(ypNew))
  4488. {
  4489. return false;
  4490. }
  4491. //判断是否移动完成
  4492. while (true)
  4493. {
  4494. Thread.Sleep(4000);
  4495. if (iSEM.GetStageIs() == 0)
  4496. {
  4497. break;
  4498. }
  4499. }
  4500. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4501. //arg.State = true;
  4502. //SendMsg("1-7");
  4503. }
  4504. return true;
  4505. }
  4506. //自动亮度对比度调节
  4507. //自动亮度对比度
  4508. public bool AutoBC(String step)
  4509. {
  4510. arg.Message = "自动亮度对比度";
  4511. arg.State = true;
  4512. SendMsg("1-10");
  4513. iSEM.SetAutoBright(100);
  4514. iSEM.SetAutoContrast(100);
  4515. //LogManager.AddHardwareLog("FIB模式自动亮度目标51.5,自动对比度目标35.", true);
  4516. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  4517. {
  4518. LogManager.AddHardwareLog("开始设置自动亮度、对比度失败,程序退出。", true);
  4519. return false;
  4520. }
  4521. Thread.Sleep(5000);
  4522. int i = 0;
  4523. float bright = iSEM.GetBrightness();
  4524. float contrast = iSEM.GetContrast();
  4525. //最多调节30s,30s没调节好,认为调节失败
  4526. for (i = 0; i < 5; i++)
  4527. {
  4528. bright = iSEM.GetBrightness();
  4529. contrast = iSEM.GetContrast();
  4530. if ((bright >= 40 && bright <= 60)
  4531. && (contrast >= 35 && contrast <= 40))
  4532. break;
  4533. Thread.Sleep(5000);
  4534. }
  4535. bright = iSEM.GetBrightness();
  4536. contrast = iSEM.GetContrast();
  4537. if (((bright < 40 || bright > 60) || (contrast < 35 && contrast > 40))
  4538. && i == 5)
  4539. {
  4540. LogManager.AddHardwareLog("亮度对比度调节时间过长", true);
  4541. return false;
  4542. }
  4543. iSEM.SetAutoBright(100);
  4544. iSEM.SetAutoContrast(100);
  4545. //LogManager.AddHardwareLog("SEM模式自动亮度目标50,自动对比度目标30.", true);
  4546. return true;
  4547. }
  4548. //执行FIB自动对焦,FIBFocus
  4549. //执行自动消像散
  4550. public bool FIBFocus(String step_code)
  4551. {
  4552. if (m_measureFile.MParam.FocusMode == 1)//手动
  4553. {
  4554. if (DialogResult.Yes == MessageBox.Show("FIB图像对焦已完成?", "确认消息", MessageBoxButtons.YesNo))
  4555. {
  4556. }
  4557. else
  4558. {
  4559. return false;
  4560. }
  4561. }
  4562. else if (m_measureFile.MParam.FocusMode == 2)//自有自动
  4563. {
  4564. //郝工增加自动对焦算法
  4565. //处理文件夹
  4566. if (Directory.Exists(FIBfocus_path))
  4567. {
  4568. Directory.Delete(FIBfocus_path, true);
  4569. }
  4570. Thread.Sleep(3000);
  4571. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  4572. Thread.Sleep(1000);
  4573. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  4574. Thread.Sleep(1000);
  4575. //再创建文件夹
  4576. Directory.CreateDirectory(FIBfocus_path);
  4577. //1、对焦参数类,2、输出对焦值
  4578. int FIBFocus = 0;
  4579. //根据当前的stigX重新计算像散值
  4580. float currentFIBFocus = iSEM.GetFIBObjectivePotential();
  4581. //m_measureFile.MParam.FIBFocus.Step = 10; //像散的步长为10
  4582. m_measureFile.MParam.FIBFocus.UP = currentFIBFocus - m_measureFile.MParam.FIBFocus.Step;
  4583. m_measureFile.MParam.FIBFocus.Down = currentFIBFocus + m_measureFile.MParam.FIBFocus.Step;
  4584. LogManager.AddHardwareLog("修改FIB自动对焦参数", true);
  4585. AutoFIBFocus(m_measureFile.MParam.FIBFocus, out FIBFocus, step_code);
  4586. //LogManager.AddHardwareLog("算法输出"+ wd.ToString(), true);
  4587. //设置工作距离
  4588. iSEM.SetFIBObjectivePotential((float)(FIBFocus * 0.01));
  4589. //设置完工作距离后必须延迟5秒
  4590. Thread.Sleep(5000);
  4591. //处理图片位置
  4592. //File.Copy(focus_path + "\\fine\\" + wd.ToString() + ".tif", data_path + "\\" + ImageName);
  4593. }
  4594. else if (m_measureFile.MParam.FocusMode == 3) //客户自动
  4595. {
  4596. //后期和客户对接接口
  4597. List<string> filenames = new List<string>();
  4598. String retfilename = wr.Img_Auto_Focus(filenames);
  4599. }
  4600. else //蔡司自动对焦
  4601. {
  4602. iSEM.CmdAutoFocusCoarse();
  4603. while (true)
  4604. {
  4605. Thread.Sleep(10000);
  4606. if (0 == iSEM.GetAutoFunction())
  4607. {
  4608. break;
  4609. }
  4610. }
  4611. iSEM.CmdAutoFocusFine();
  4612. while (true)
  4613. {
  4614. Thread.Sleep(10000);
  4615. if (0 == iSEM.GetAutoFunction())
  4616. {
  4617. break;
  4618. }
  4619. }
  4620. }
  4621. return true;
  4622. }
  4623. /// 图像拉直算法
  4624. /// </summary>
  4625. /// <param name="Slope">倾斜角度</param>
  4626. /// <param name="x0">圆心坐标x</param>
  4627. /// <param name="y0">圆心坐标y</param>
  4628. /// <param name="x1">倾斜情况下帧图的坐标x</param>
  4629. /// <param name="y1">倾斜情况下帧图的坐标y</param>
  4630. /// <param name="Hx">复位到原位置需要移动的x值(返回值)</param>
  4631. /// <param name="Hy">复位到原位置需要移动的y值(返回值)</param>
  4632. /// <returns></returns>
  4633. public bool Straightening(float Slope, float x0, float y0, float x1, float y1, ref float Hx, ref float Hy)
  4634. {
  4635. try
  4636. {
  4637. float xr = x1 - x0;//倾斜图到中心的距离差x
  4638. float yr = y1 - y0;//倾斜图到中心的距离差y
  4639. float R = (float)Math.Sqrt(xr * xr + yr * yr);//圆心到倾斜图的长度
  4640. //double D = 2 * R * Math.Sin(ScanRotation / 2);//倾斜图与矫正图底边的长度
  4641. float k = (float)(Math.Atan(yr / xr) / Math.PI * 180);//x1,y1的直角三角形圆心角度
  4642. float k_S = k - Slope;//通过夹角差求x2,y2
  4643. //int y2 = (int)Math.Round(Math.Sin(Math.PI / (180 / k_S)) * R);
  4644. //int x2 = (int)Math.Round(Math.Cos(Math.PI / (180 / k_S)) * R);
  4645. float y2 = (float)(Math.Sin(Math.PI / (180 / k_S)) * R);
  4646. float x2 = (float)(Math.Cos(Math.PI / (180 / k_S)) * R);
  4647. if (Slope > 0 || Slope < 0)
  4648. {
  4649. Hx = x0 + x2;
  4650. Hy = y0 + y2;
  4651. }
  4652. else
  4653. {
  4654. Hx = 0;
  4655. Hy = 0;
  4656. }
  4657. return true;
  4658. }
  4659. catch (Exception)
  4660. {
  4661. return false;
  4662. }
  4663. }
  4664. // 放大倍数差校正
  4665. public bool MagComp(float oldMag, float newMag)
  4666. {
  4667. //开启电压校正时进行电压校正
  4668. if (m_measureFile.MParam.MagComp)
  4669. {
  4670. int oldLevel = -1, newLevel = -1;
  4671. float deltX = 0, deltY = 0;
  4672. if (oldMag < m_measureFile.MParam.MagRange1)
  4673. {
  4674. oldLevel = 1;
  4675. }
  4676. else if ((oldMag <= m_measureFile.MParam.MagRange2)
  4677. && (oldMag > m_measureFile.MParam.MagRange1))
  4678. {
  4679. oldLevel = 2;
  4680. }
  4681. else if ((oldMag <= m_measureFile.MParam.MagRange3)
  4682. && (oldMag > m_measureFile.MParam.MagRange2))
  4683. {
  4684. oldLevel = 3;
  4685. }
  4686. else if ((oldMag <= m_measureFile.MParam.MagRange4)
  4687. && (oldMag > m_measureFile.MParam.MagRange3))
  4688. {
  4689. oldLevel = 4;
  4690. }
  4691. if (newMag < m_measureFile.MParam.MagRange1)
  4692. {
  4693. newLevel = 1;
  4694. }
  4695. else if ((newMag <= m_measureFile.MParam.MagRange2)
  4696. && (newMag > m_measureFile.MParam.MagRange1))
  4697. {
  4698. newLevel = 2;
  4699. }
  4700. else if ((newMag <= m_measureFile.MParam.MagRange3)
  4701. && (newMag > m_measureFile.MParam.MagRange2))
  4702. {
  4703. newLevel = 3;
  4704. }
  4705. else if ((newMag <= m_measureFile.MParam.MagRange4)
  4706. && (newMag > m_measureFile.MParam.MagRange3))
  4707. {
  4708. newLevel = 4;
  4709. }
  4710. if (oldLevel != newLevel)
  4711. {
  4712. if (oldLevel == 1)
  4713. {
  4714. switch (newLevel)
  4715. {
  4716. case 1:
  4717. break;
  4718. case 2:
  4719. deltX = m_measureFile.MParam.MagCompX1;
  4720. deltY = m_measureFile.MParam.MagCompY1;
  4721. break;
  4722. case 3:
  4723. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2;
  4724. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2;
  4725. break;
  4726. case 4:
  4727. deltX = m_measureFile.MParam.MagCompX1 + m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4728. deltY = m_measureFile.MParam.MagCompY1 + m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4729. break;
  4730. }
  4731. }
  4732. else if (oldLevel == 2)
  4733. {
  4734. switch (newLevel)
  4735. {
  4736. case 1:
  4737. deltX = -m_measureFile.MParam.MagCompX1;
  4738. deltY = -m_measureFile.MParam.MagCompY1;
  4739. break;
  4740. case 2:
  4741. break;
  4742. case 3:
  4743. deltX = m_measureFile.MParam.MagCompX2;
  4744. deltY = m_measureFile.MParam.MagCompY2;
  4745. break;
  4746. case 4:
  4747. deltX = m_measureFile.MParam.MagCompX2 + m_measureFile.MParam.MagCompX3;
  4748. deltY = m_measureFile.MParam.MagCompY2 + m_measureFile.MParam.MagCompY3;
  4749. break;
  4750. }
  4751. }
  4752. else if (oldLevel == 3)
  4753. {
  4754. switch (newLevel)
  4755. {
  4756. case 1:
  4757. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2;
  4758. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2;
  4759. break;
  4760. case 2:
  4761. deltX = -m_measureFile.MParam.MagCompX2;
  4762. deltY = -m_measureFile.MParam.MagCompY2;
  4763. break;
  4764. case 3:
  4765. break;
  4766. case 4:
  4767. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4768. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompX3;
  4769. break;
  4770. }
  4771. }
  4772. else if (oldLevel == 4)
  4773. {
  4774. switch (newLevel)
  4775. {
  4776. case 1:
  4777. deltX = -m_measureFile.MParam.MagCompX1 - m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4778. deltY = -m_measureFile.MParam.MagCompY1 - m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4779. break;
  4780. case 2:
  4781. deltX = -m_measureFile.MParam.MagCompX2 - m_measureFile.MParam.MagCompX3;
  4782. deltY = -m_measureFile.MParam.MagCompY2 - m_measureFile.MParam.MagCompY3;
  4783. break;
  4784. case 3:
  4785. deltX = -m_measureFile.MParam.MagCompX3;
  4786. deltY = -m_measureFile.MParam.MagCompY3;
  4787. break;
  4788. case 4:
  4789. break;
  4790. }
  4791. }
  4792. //通过移动光束校正便宜量
  4793. //单位是m/pix
  4794. float pixSize = iSEM.GetPixelSize();
  4795. LogManager.AddHardwareLog("像素尺寸=" + pixSize.ToString() + "m/pixel", true);
  4796. Thread.Sleep(500);
  4797. float xpCur = iSEM.GetStageAtX();
  4798. float ypCur = iSEM.GetStageAtY();
  4799. LogManager.AddHardwareLog("当前位置(" + xpCur.ToString() + "," + ypCur.ToString() + "),单位m", true);
  4800. float xpNew = xpCur - deltX;
  4801. float ypNew = ypCur + deltY;
  4802. LogManager.AddHardwareLog("目标位置(" + xpNew.ToString() + "," + ypNew.ToString() + "),单位m", true);
  4803. //计算最大偏移量
  4804. float beamXCur = iSEM.GetBeamShiftX();//单位是%
  4805. iSEM.SetBeamShiftX(100);
  4806. float beamXMax = iSEM.GetBeamOffsetX();//单位是m
  4807. iSEM.SetBeamShiftX(beamXCur);
  4808. //计算光束偏移值:
  4809. float beamX = iSEM.GetBeamOffsetX();
  4810. LogManager.AddHardwareLog("当前X方向光束偏移量=" + beamX.ToString() + "m", true);
  4811. beamX = (-deltX + beamX);
  4812. LogManager.AddHardwareLog("X方向光束偏移量应为=" + beamX.ToString() + "m", true);
  4813. if (beamX < beamXMax || beamX < -beamXMax)
  4814. {
  4815. LogManager.AddHardwareLog("X方向移动光束", true);
  4816. float beamXShift = beamX * 100 / beamXMax;
  4817. if (!iSEM.SetBeamShiftX(beamXShift))
  4818. {
  4819. LogManager.AddHardwareLog("X方向光束偏移量" + beamX.ToString() + "m失败", true);
  4820. return false;
  4821. }
  4822. }
  4823. else if (deltX > 0.000003 || deltX < -0.000003)//大于3um使用移动样品台实现
  4824. {
  4825. LogManager.AddHardwareLog("X方向移动样品台", true);
  4826. if (!iSEM.SetStageGotoX(xpNew))
  4827. {
  4828. return false;
  4829. }
  4830. //判断是否移动完成
  4831. while (true)
  4832. {
  4833. Thread.Sleep(5000);
  4834. if (iSEM.GetStageIs() == 0)
  4835. {
  4836. break;
  4837. }
  4838. }
  4839. }
  4840. float beamY = iSEM.GetBeamOffsetY();
  4841. LogManager.AddHardwareLog("当前Y方向光束偏移量=" + beamY.ToString() + "m", true);
  4842. beamY = (-deltY + beamY);
  4843. LogManager.AddHardwareLog("Y方向光束偏移量应为=" + beamY.ToString() + "m", true);
  4844. //计算最大偏移量
  4845. float beamYCur = iSEM.GetBeamShiftY();//单位是%
  4846. iSEM.SetBeamShiftY(100);
  4847. float beamYMax = iSEM.GetBeamOffsetY();//单位是m
  4848. iSEM.SetBeamShiftY(beamYCur);
  4849. if (beamY < beamYMax || beamY < -beamYMax)
  4850. {
  4851. LogManager.AddHardwareLog("Y方向移动光束", true);
  4852. float beamYShift = beamY * 100 / beamYMax;
  4853. if (!iSEM.SetBeamShiftY(beamY))
  4854. {
  4855. LogManager.AddHardwareLog("Y方向光束偏移量" + beamY.ToString() + "m失败", true);
  4856. return false;
  4857. }
  4858. }
  4859. else if (deltY > 0.000003 || deltY < -0.000003)//大于3um使用移动样品台实现
  4860. {
  4861. LogManager.AddHardwareLog("Y方向移动样品台", true);
  4862. if (!iSEM.SetStageGotoY(ypNew))
  4863. {
  4864. return false;
  4865. }
  4866. //判断是否移动完成
  4867. while (true)
  4868. {
  4869. Thread.Sleep(5000);
  4870. if (iSEM.GetStageIs() == 0)
  4871. {
  4872. break;
  4873. }
  4874. }
  4875. //arg.Message = "移动到新x" + xpNew.ToString() + "位置失败";
  4876. //arg.State = true;
  4877. //SendMsg("1-7");
  4878. }
  4879. }
  4880. }
  4881. return true;
  4882. }
  4883. #endregion
  4884. #region 测试程序
  4885. //最后保存测量数据-测量文件、测量状态,m_cutHoles[i].STATE!=MeasureData.CutHole.State.Success.
  4886. //中间停止更新状态为Unmeasured,过程中return false时,更新状态为failed,保存测量文件
  4887. //if (DialogResult.Yes == MessageBox.Show("图像拍摄已完成?", "确认消息", MessageBoxButtons.YesNo))
  4888. //{
  4889. // SendMsg("拍摄照片完成");
  4890. // //return true;
  4891. //}
  4892. //else
  4893. //{
  4894. // SendMsg("拍摄照片失败");
  4895. // return false;
  4896. //}
  4897. //SendMsg("图像校正36度");
  4898. ////3.设置SEM角度补偿cos36度
  4899. //if (!TiltCorrection(36))
  4900. //{
  4901. // return false;
  4902. //}
  4903. //Thread.Sleep(3000);
  4904. //string fn;
  4905. //用宏抓一般图
  4906. //Thread.Sleep(5000);
  4907. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4908. //SendMsg("用宏抓一般图" + fn);
  4909. //iSEM.CMDMCFFilename(fn);
  4910. ////延时1s??
  4911. //Thread.Sleep(5000);
  4912. ////用宏抓好图
  4913. //fn = m_ProgramFolder + "\\Macro\\" + MacoGoodPic;
  4914. //SendMsg("用宏抓好图" + fn);
  4915. //iSEM.CMDMCFFilename(fn);
  4916. ////延时1s??
  4917. //Thread.Sleep(30000);
  4918. //Thread.Sleep(10000);
  4919. //WorkingFolder = m_measureFile.FilePath;
  4920. //String fileName6 = WorkingFolder + "\\" + m_nWorkHoleNo.ToString() + "Hole" + ImageName6;
  4921. //SendMsg("SEM拍照存储到" + fileName6);
  4922. //if (!GetImage(ImageMode.SEM, fileName6))
  4923. //{
  4924. // SendMsg("SEM拍照失败");
  4925. // return false;
  4926. //}
  4927. ////用宏抓标志图
  4928. //fn = m_ProgramFolder + "\\Macro\\" + MacoExportTif;
  4929. //SendMsg("用宏抓标志图" + fn);
  4930. //iSEM.CMDMCFFilename(fn);
  4931. ////延时1s??
  4932. //Thread.Sleep(30000);
  4933. //Thread.Sleep(5000);
  4934. //fn = m_ProgramFolder + "\\Macro\\" + MacoScanPic;
  4935. //SendMsg("用宏抓一般图" + fn);
  4936. //iSEM.CMDMCFFilename(fn);
  4937. ////延时1s??
  4938. //Thread.Sleep(5000);
  4939. //SendMsg("所有图结束");
  4940. ////17.自动控制SEM拍截面照
  4941. //{
  4942. // //1.控制SEM放大到指定参数大小范围,6000x
  4943. // if (!iSEM.SetMagnification(6000))
  4944. // {
  4945. // return false;
  4946. // }
  4947. // //2.控制SEM自动对焦、消像散、亮度、对比度
  4948. // if (!MeasParam.FocusMode)
  4949. // {
  4950. // //弹出手动对焦的窗口
  4951. // }
  4952. // else
  4953. // {
  4954. // //调用自动对焦模块
  4955. // }
  4956. // //3.设置SEM角度补偿cos36度
  4957. // if (!TiltCorrection(36))
  4958. // {
  4959. // return false;
  4960. // }
  4961. // //4.控制SEM拍照
  4962. // //5.保存照片4
  4963. // String fileName5 = WorkingFolder + ImageName5;
  4964. // if (!GetImage(ImageMode.SEM, fileName5))
  4965. // {
  4966. // return false;
  4967. // }
  4968. // //6.将照片传给客户,获取偏移坐标
  4969. // float x6 = 0, y6 = 0;
  4970. // float angle1 = 0;
  4971. // float mage = 10000;
  4972. // //7.根据坐标控制SEM移动到分析位置
  4973. // if (!iSEM.MoveStageXY(x6, y6))
  4974. // {
  4975. // return false;
  4976. // }
  4977. // //8.验证移动准确性:获取当前SEM中心位置坐标,与客户返回坐标对比,验证是否移动正确
  4978. // float x7 = iSEM.GetStageAtX();
  4979. // float y7 = iSEM.GetStageAtY();
  4980. // if (Math.Abs(x6 - x7) > fMin && Math.Abs(y6 - y7) > fMin)
  4981. // {
  4982. // return false;
  4983. // }
  4984. // //9.控制SEM平行校正,并记录校正前初始值
  4985. // float foldAnagle = iSEM.GetScanRotation();
  4986. // if (foldAnagle == float.NaN)
  4987. // {
  4988. // return false;
  4989. // }
  4990. // if (!iSEM.SetScanRotation(angle1))
  4991. // {
  4992. // return false;
  4993. // }
  4994. // //10.控制SEM放大到指定参数大小范围
  4995. // if (!iSEM.SetMagnification(mage))
  4996. // {
  4997. // return false;
  4998. // }
  4999. // //11.控制SEM自动对焦、消像散、亮度、对比度
  5000. // if (!MeasParam.FocusMode)
  5001. // {
  5002. // //弹出手动对焦的窗口
  5003. // }
  5004. // else
  5005. // {
  5006. // //调用自动对焦模块
  5007. // }
  5008. // //12.控制SEM对分析位置拍照
  5009. // String fileName6 = WorkingFolder + ImageName6;
  5010. // if (!GetImage(ImageMode.SEM, fileName6))
  5011. // {
  5012. // return false;
  5013. // }
  5014. // //13.保存照片
  5015. // //14.控制SEM取消电子束校正,回到初始值
  5016. // if (!iSEM.SetScanRotation(foldAnagle))
  5017. // {
  5018. // return false;
  5019. // }
  5020. //}
  5021. ////18.自动层高分析
  5022. //{
  5023. // //1.获取SEM Pixel Size给客户传入参数
  5024. // if (iSEM.GetPixelSize() == float.NaN)
  5025. // {
  5026. // return false;
  5027. // }
  5028. // //2.将照片传给客户,客户进行层高分析(返回分析后的图像、相对坐标、分辨率、各层编号以及各层对应的层高数据),如果客户自行出分析报告则无需返回数据
  5029. //}
  5030. ////19.自动能谱分析
  5031. //{
  5032. // //1. 确定能谱位置
  5033. // //2. 控制牛津打能谱
  5034. // //3. 能谱分析——面扫+线扫描
  5035. //}
  5036. #endregion
  5037. #region 能谱所有参数
  5038. //全局只有一个Extender
  5039. static ExtenderInterface factoryExtender = ExtenderInterface.Instance;
  5040. IExtenderControl iExtender;
  5041. MeasureDB m_MeasDB = null;
  5042. int m_nXrayId = 0;
  5043. const String ImageNameEDS = @"EDSImage.tif"; //EDS能谱图片
  5044. const String ImageNameEDS3 = @"EDSImageTag.tif"; //EDS能谱图片
  5045. const String ImageNameEDS4 = @"SEMTrapCPEDS.tif";//传给客户,找到已经切割点
  5046. const String ImageNameEDS5 = @"SEMDegreeTrapEDS.tif";//传给客户,水平校正
  5047. const String ImageNameEDS6 = @"SEMMagEndEDS.tif";//传给客户,测量层高
  5048. /// <summary>
  5049. /// 做能谱分析
  5050. /// </summary>
  5051. /// <param name="a_PointNum">分析点ID,索引号</param>
  5052. /// <param name="PointsName">分析点名称</param>
  5053. /// <param name="num">分析点的位置ID</param>
  5054. /// <returns>成功或失败</returns>
  5055. public bool DoEDS(int a_PointNum, string PointsName, int num)
  5056. {
  5057. try
  5058. {
  5059. iExtender = factoryExtender.IExtender;
  5060. //XrayID记录
  5061. LogManager.AddHardwareLog("程序进入EDS测量!", true);
  5062. EDSParam param = m_measureFile.MParam.EDSP;
  5063. double dDwellTime = param.DwellTime;
  5064. int nImageType = param.ImageType;
  5065. double dScanSizes = param.ScanSize;
  5066. LogManager.AddHardwareLog("dDwellTime=" + dDwellTime.ToString() + " nImageType=" + nImageType.ToString() + " dScanSizes=" + dScanSizes.ToString(), true);
  5067. iExtender.SetImageAcquistionSetting(dDwellTime, nImageType, dScanSizes);
  5068. string path = EDS_path;
  5069. string edsfn = path + "\\" + num.ToString() + "_" + ImageNameEDS;
  5070. LogManager.AddHardwareLog("EDS_PATH=" + edsfn, true);
  5071. iExtender.GrabImage(edsfn, 0, 0, 0, 0, 0);
  5072. //送给客户,计算感兴趣的区域
  5073. List<System.Drawing.Point> listPoints = new List<System.Drawing.Point>();
  5074. List<System.Drawing.Point> listlines = new List<System.Drawing.Point>();
  5075. List<List<Segment>> listFeature = new List<List<Segment>>();
  5076. List<int> lines_height = new List<int>();
  5077. System.Drawing.Point area_pt = new System.Drawing.Point();
  5078. int width = 1;
  5079. int height = 1;
  5080. //点数据
  5081. int state = 0;
  5082. wr.EDS_Param_Points(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listPoints, out state);
  5083. if (state == 0)
  5084. {
  5085. LogManager.AddHardwareLog("点采集失败", true);
  5086. return false;
  5087. }
  5088. //20201223在图像上增加标注
  5089. List<DrawAnalysePoint> darwAPList = new List<DrawAnalysePoint>();
  5090. for (int i = 0; i < listPoints.Count; i++)
  5091. {
  5092. DrawAnalysePoint p = new DrawAnalysePoint();
  5093. p.Title = "谱图" + i.ToString();
  5094. p.Point = listPoints[i];
  5095. p.DrawType = DrawType.Point;
  5096. darwAPList.Add(p);
  5097. }
  5098. //线数据
  5099. LogManager.AddHardwareLog("线扫描", true);
  5100. state = 0;
  5101. wr.EDS_Param_Lines(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out listlines, out lines_height, out state);
  5102. LogManager.AddHardwareLog("线返回数据" + listlines[0].X.ToString() + "," + listlines[0].Y.ToString() + ",lines_height=" + lines_height.Count.ToString(), true);
  5103. if (state == 1)
  5104. {
  5105. //将线转换为segment数据
  5106. LogManager.AddHardwareLog("将线转换为segment数据", true);
  5107. List<Segment> segments = new List<Segment>();
  5108. for (int i = 0; i < listlines.Count; i++)
  5109. {
  5110. List<System.Drawing.Point> linepoint = new List<System.Drawing.Point>();
  5111. for (int j = 0; j <= lines_height[i]; j++)
  5112. {
  5113. System.Drawing.Point p = new System.Drawing.Point();
  5114. Segment segment = new Segment();
  5115. segment.X = listlines[0].X;
  5116. segment.Y = listlines[0].Y + j;
  5117. segment.Length = 1;
  5118. segments.Add(segment);
  5119. p.X = segment.X;
  5120. p.Y = segment.Y;
  5121. linepoint.Add(p);
  5122. }
  5123. listFeature.Add(segments);
  5124. //20201223在图像上增加标注
  5125. DrawAnalysePoint l = new DrawAnalysePoint();
  5126. l.Title = "谱图" + (i+ listPoints.Count).ToString();
  5127. l.LinePoints = linepoint;
  5128. l.DrawType = DrawType.Line;
  5129. darwAPList.Add(l);
  5130. }
  5131. LogManager.AddHardwareLog("将线转换为segment数据完成", true);
  5132. }
  5133. else
  5134. {
  5135. LogManager.AddHardwareLog("线采集失败", true);
  5136. return false;
  5137. }
  5138. //面数据
  5139. state = 0;
  5140. wr.EDS_Param_Areas(edsfn, num, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out area_pt, out width, out height, out state);
  5141. LogManager.AddHardwareLog("面返回数据" + area_pt.X.ToString() + "," + area_pt.Y.ToString() + ",height=" + height.ToString() + ",width=" + width.ToString(), true);
  5142. if (state == 1)
  5143. {
  5144. //将面转换为segment数据
  5145. LogManager.AddHardwareLog("将面转换为segment数据", true);
  5146. List<Segment> segments = new List<Segment>();
  5147. for (int j = 0; j <= height; j++)
  5148. {
  5149. Segment segment = new Segment();
  5150. segment.X = area_pt.X;
  5151. segment.Y = area_pt.Y + j;
  5152. segment.Length = width;
  5153. segments.Add(segment);
  5154. }
  5155. listFeature.Add(segments);
  5156. LogManager.AddHardwareLog("将面转换为segment数据完成", true);
  5157. //20201223在图像上增加标注
  5158. DrawAnalysePoint a = new DrawAnalysePoint();
  5159. System.Drawing.Size asz = new System.Drawing.Size();
  5160. asz.Width = width;
  5161. asz.Height = height;
  5162. a.Point = area_pt;
  5163. a.Title = "谱图" + (1+listPoints.Count + listPoints.Count).ToString();
  5164. a.RectSize = asz;
  5165. a.DrawType = DrawType.Rectangle;
  5166. darwAPList.Add(a);
  5167. }
  5168. else
  5169. {
  5170. LogManager.AddHardwareLog("面采集失败", true);
  5171. return false;
  5172. }
  5173. //存储数据
  5174. //向分析点数据库更新
  5175. LogManager.AddHardwareLog("listPoints=" + listPoints.Count.ToString() + ",listFeature=" + listFeature.Count.ToString(), true);
  5176. if (!m_MeasDB.InsetAPoint(a_PointNum, PointsName, EDS_path, listPoints.Count, listFeature.Count, num))
  5177. {
  5178. LogManager.AddHardwareLog("插入分析点失败", true);
  5179. }
  5180. LogManager.AddHardwareLog("插入分析点成功", true);
  5181. int AreasNo = 0;
  5182. long[] XrayData = new long[2000];
  5183. Dictionary<string, double> listElement = new Dictionary<string, double>();
  5184. //点采集
  5185. foreach (System.Drawing.Point pt in listPoints)
  5186. {
  5187. XrayData = new long[2000];
  5188. listElement = new Dictionary<string, double>();
  5189. //LogManager.AddHardwareLog("点采集开始", true);
  5190. iExtender.XrayPointCollectiong(param.PointTime, pt.X, pt.Y, out XrayData, out listElement);
  5191. //写入数据库
  5192. m_nXrayId++;
  5193. Boolean ret = m_MeasDB.InsertAPointXay(a_PointNum, m_nXrayId, pt.X, pt.Y, XrayData, listElement, num);
  5194. LogManager.AddHardwareLog("点采集结束,写入数据库开始--" + m_nXrayId.ToString() + "," + ret.ToString(), true);
  5195. //LogManager.AddHardwareLog("点采集写入数据库结束", true);
  5196. if (m_nXrayId % 5 == 0)
  5197. {
  5198. Thread.Sleep(5000);
  5199. }
  5200. else
  5201. {
  5202. Thread.Sleep(1000);
  5203. }
  5204. }
  5205. //面采集
  5206. foreach (List<Segment> listSeg in listFeature)
  5207. {
  5208. XrayData = new long[2000];
  5209. listElement = new Dictionary<string, double>();
  5210. LogManager.AddHardwareLog("面采集开始", true);
  5211. LogManager.AddHardwareLog("AreaTime=" + param.AreaTime.ToString(), true);
  5212. iExtender.XrayAreaCollectiong(param.AreaTime, listSeg, out XrayData, out listElement);
  5213. LogManager.AddHardwareLog("面采集结束,写入数据库开始", true);
  5214. //写入数据库
  5215. m_nXrayId++;
  5216. AreasNo++;
  5217. m_MeasDB.InsertAAreaXay(a_PointNum, m_nXrayId, AreasNo, listSeg, XrayData, listElement, num);
  5218. LogManager.AddHardwareLog("面采集写入数据库结束", true);
  5219. }
  5220. //20201223,生成图片
  5221. string edstag = path + "\\" + num.ToString() + "_" + ImageNameEDS3;
  5222. NewFunMethod fun = new NewFunMethod();
  5223. fun.GetBseAnalyticalSite(edsfn, darwAPList,edstag);
  5224. }
  5225. catch (Exception e)
  5226. {
  5227. LogManager.AddHardwareLog(e.Message, false);
  5228. }
  5229. return true;
  5230. }
  5231. /// <summary>
  5232. /// 初始化数据库
  5233. /// </summary>
  5234. public void Init_MeasDB()
  5235. {
  5236. m_MeasDB = new MeasureDB(m_measureFile);
  5237. }
  5238. /// <summary>
  5239. /// 161.自动调整SEM找到切割位置,这里不是简单的拉直旋转
  5240. /// </summary>
  5241. /// <returns></returns>
  5242. public bool EDS_FindCross()
  5243. {
  5244. float x2 = 0, y2 = 0;
  5245. int state = 0;
  5246. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5247. float m_TempBrightness = 50.0f;
  5248. float m_TempContrast = 30.0f;
  5249. if (m_measureFile.MParam.SampleName == "3")
  5250. {
  5251. m_TempBrightness = 48.0f;
  5252. m_TempContrast = 29.0f;
  5253. }
  5254. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5255. iSEM.SetAutoVideoOff();
  5256. Thread.Sleep(200);
  5257. iSEM.SetBrightness(m_TempBrightness);//50.0f
  5258. Thread.Sleep(200);
  5259. iSEM.SetContrast(m_TempContrast);//30.0f
  5260. Thread.Sleep(200);
  5261. //1.控制SEM放大到300倍
  5262. float mag = m_measureFile.MParam.Photograph_Magnification / 3;
  5263. if (mag < 200)
  5264. {
  5265. mag = 200;
  5266. }
  5267. if (!iSEM.SetMagnification(mag))
  5268. {
  5269. arg.Message = "放大" + mag.ToString("0.0") + "倍失败";
  5270. arg.State = false;
  5271. SendMsg("1-24");
  5272. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5273. return false;
  5274. }
  5275. Thread.Sleep(200);
  5276. float current = iSEM.GetMagnification();
  5277. Thread.Sleep(200);
  5278. while (Math.Abs(current - mag) > 2)
  5279. {
  5280. iSEM.SetMagnification(mag);
  5281. Thread.Sleep(200);
  5282. current = iSEM.GetMagnification();
  5283. Thread.Sleep(200);
  5284. }
  5285. Thread.Sleep(2000);
  5286. //判断是否停止进程
  5287. if (key_stop)
  5288. {
  5289. LogManager.AddHardwareLog("停止键按下", true);
  5290. return false;
  5291. }
  5292. //3.控制SEM拍照
  5293. String fileName4 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + mag.ToString("0") + "_" + ImageNameEDS4;
  5294. arg.Picture_Information.Picture_FullPath = fileName4;
  5295. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5296. Thread.Sleep(200);
  5297. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5298. Thread.Sleep(200);
  5299. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5300. Thread.Sleep(200);
  5301. //拍照前改变速度,延时
  5302. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5303. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5304. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5305. Thread.Sleep(200);
  5306. cycle_time = iSEM.GetCycleTime();
  5307. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5308. if (!GetImage(fileName4))
  5309. {
  5310. //arg.State = false;
  5311. //arg.Message = "SEM拍照找切割位置失败";
  5312. //SendMsg("1-25");
  5313. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5314. return false;
  5315. }
  5316. //arg.Picture_Information.Picture_FullPath = fileName4;
  5317. //arg.State = true;
  5318. //arg.Message = "SEM拍照成功";
  5319. //SendMsg("1-25");
  5320. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5321. Thread.Sleep(200);
  5322. cycle_time = iSEM.GetCycleTime();
  5323. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5324. //判断是否停止进程
  5325. if (key_stop)
  5326. {
  5327. return false;
  5328. }
  5329. //4.将照片传给客户,获取偏移坐标,以及偏移角度
  5330. //5.根据坐标控制SEM移动到切孔位置,居中
  5331. LogManager.AddHardwareLog("测量线程:图像处理接口,准备移动样品台", true);
  5332. LogManager.AddHardwareLog("文件名=" + fileName4, true);
  5333. wr.Img_Trapezoid_Top_Center_Position(fileName4, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out x2, out y2, out state);
  5334. LogManager.AddHardwareLog("梯形中心点返回数据=" + x2.ToString() + ", " + y2.ToString(), true);
  5335. LogManager.AddHardwareLog("准备移动样品台返回状态=" + state.ToString(), true);
  5336. if (state == 1)
  5337. {
  5338. //1. 根据客户PT沉积坐标控制FIB调整到中心位置???????
  5339. if (!MoveToPixByMoveStage(x2, y2))
  5340. {
  5341. //arg.State = false;
  5342. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置失败";
  5343. //SendMsg("1-26");
  5344. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5345. return false;
  5346. }
  5347. //判断是否移动完成
  5348. while (true)
  5349. {
  5350. Thread.Sleep(4000);
  5351. if (iSEM.GetStageIs() == 0)
  5352. {
  5353. break;
  5354. }
  5355. }
  5356. //arg.State = true;
  5357. //arg.Message = "移动到新(" + x2.ToString() + "," + y2.ToString() + ")位置成功";
  5358. //SendMsg("1-26");
  5359. //高倍到低倍不进行对焦
  5360. //拍照前改变速度,延时
  5361. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5362. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5363. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5364. Thread.Sleep(200);
  5365. cycle_time = iSEM.GetCycleTime();
  5366. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5367. if (hand_intervene == 1)
  5368. {
  5369. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5370. }
  5371. }
  5372. else
  5373. {
  5374. arg.Message = "图像接口参数state返回值为零";
  5375. arg.State = false;
  5376. SendMsg("1-26");
  5377. if (hand_intervene == 1)
  5378. {
  5379. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5380. {
  5381. return false;
  5382. }
  5383. }
  5384. else
  5385. {
  5386. return false;
  5387. }
  5388. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5389. return false;
  5390. }
  5391. //判断是否停止进程
  5392. if (key_stop)
  5393. {
  5394. LogManager.AddHardwareLog("停止键按下", true);
  5395. return false;
  5396. }
  5397. return true;
  5398. }
  5399. /// <summary>
  5400. /// 171.能谱第17步找点采集数据
  5401. /// </summary>
  5402. /// <returns></returns>
  5403. public bool EDS_ShotSection()
  5404. {
  5405. int state = 0;
  5406. #region 设置拍照的放大倍数
  5407. LogManager.AddHardwareLog("测量线程:设置拍照放大倍数" + m_measureFile.MParam.Photograph_Magnification.ToString(), true);
  5408. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5409. {
  5410. //arg.Message = "放大倍数调整失败";
  5411. //arg.State = false;
  5412. //SendMsg("1-27");
  5413. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5414. return false;
  5415. }
  5416. float set = m_measureFile.MParam.Photograph_Magnification;
  5417. float current = iSEM.GetMagnification();
  5418. while (Math.Abs(current - set) > 1)
  5419. {
  5420. iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification);
  5421. Thread.Sleep(200);
  5422. current = iSEM.GetMagnification();
  5423. }
  5424. //arg.Message = "放大" + m_measureFile.MParam.Photograph_Magnification.ToString() + "成功";
  5425. //arg.State = true;
  5426. //SendMsg("1-27");
  5427. Thread.Sleep(3000 + (Int32)cycle_time);
  5428. //判断是否停止进程
  5429. if (key_stop)
  5430. {
  5431. LogManager.AddHardwareLog("停止键按下", true);
  5432. return false;
  5433. }
  5434. #endregion
  5435. #region 拍摄矩形的切割孔,使用拍照的放大倍数
  5436. //2.控制SEM自动对焦、亮度、对比度-接口
  5437. iSEM.SetReduced(402, 128, 340, 256);
  5438. Thread.Sleep(200);
  5439. //add by sun 2020-12-15
  5440. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//iSEM.CmdFocusRate(5);//
  5441. //add by sun 2020-12-15 end
  5442. Thread.Sleep(200);
  5443. cycle_time = iSEM.GetCycleTime();
  5444. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5445. if (!iSEM.SetAutoVideoOff())
  5446. {
  5447. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5448. return false;
  5449. }
  5450. Thread.Sleep(5000);
  5451. if (ImageFocus1(false))
  5452. {
  5453. //arg.Message = "自动对焦完成";
  5454. //arg.State = true;
  5455. //SendMsg("1-28");
  5456. }
  5457. else
  5458. {
  5459. //arg.Message = "自动对焦失败";
  5460. //arg.State = false;
  5461. //SendMsg("1-28");
  5462. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5463. return false;
  5464. }
  5465. iSEM.CloseReduced();
  5466. Thread.Sleep(200);
  5467. cycle_time = iSEM.GetCycleTime();
  5468. Thread.Sleep(200 + Convert.ToInt32(cycle_time));
  5469. //判断是否停止进程
  5470. if (key_stop)
  5471. {
  5472. LogManager.AddHardwareLog("停止键按下", true);
  5473. return false;
  5474. }
  5475. if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5476. {
  5477. LogManager.AddHardwareLog("测量线程报错:自动开启亮度对比度失败", false);
  5478. return false;
  5479. }
  5480. Thread.Sleep(5000);
  5481. //3、设置SEM补偿角度
  5482. if (m_measureFile.MParam.Is_Photograph == false)
  5483. {
  5484. LogManager.AddHardwareLog("测量线程:角度补偿" + m_measureFile.MParam.Correction_Angle.ToString() + "度", true);
  5485. if (!TiltCorrection(m_measureFile.MParam.Correction_Angle))
  5486. {
  5487. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度失败";
  5488. //arg.State = false;
  5489. //SendMsg("1-29");
  5490. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5491. return false;
  5492. }
  5493. //arg.State = true;
  5494. //arg.Message = "设置SEM进行角度补偿" + m_measureFile.MParam.Correction_Angle.ToString("0") + "度成功";
  5495. //SendMsg("1-29");
  5496. Thread.Sleep(200);
  5497. //判断是否停止进程
  5498. if (key_stop)
  5499. {
  5500. LogManager.AddHardwareLog("停止键按下", false);
  5501. return false;
  5502. }
  5503. }
  5504. //4、拍照,5、保存照片
  5505. String fileName5 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS5;
  5506. arg.Picture_Information.Picture_FullPath = fileName5;
  5507. arg.Picture_Information.Work_Status = "SEM";
  5508. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5509. Thread.Sleep(200);
  5510. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5511. Thread.Sleep(200);
  5512. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5513. Thread.Sleep(200);
  5514. //拍照前改变速度,延时
  5515. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5516. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5517. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5518. Thread.Sleep(200);
  5519. cycle_time = iSEM.GetCycleTime();
  5520. Thread.Sleep(Convert.ToInt32(cycle_time) * 2);
  5521. if (!GetImage(fileName5))
  5522. {
  5523. //arg.Message = "SEM拍照失败";
  5524. //arg.State = false;
  5525. //SendMsg("1-30");
  5526. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5527. return false;
  5528. }
  5529. //arg.State = true;
  5530. //arg.Message = "SEM拍照成功";
  5531. //SendMsg("1-30");
  5532. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5533. Thread.Sleep(200);
  5534. cycle_time = iSEM.GetCycleTime();
  5535. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5536. //判断是否停止进程
  5537. if (key_stop)
  5538. {
  5539. LogManager.AddHardwareLog("停止键按下", true);
  5540. return false;
  5541. }
  5542. #endregion
  5543. if (m_measureFile.MParam.Is_Photograph == false)
  5544. {
  5545. #region 对当前矩形进行旋转校正
  5546. //8,计算切割面区域偏移角度及方向
  5547. float degree = 0;
  5548. int direction = 0;
  5549. wr.Img_Center_Position_OffsetAngle_Direction(fileName5, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out degree, out direction, out state);
  5550. LogManager.AddHardwareLog("测量线程:拍照角度移动,输入图像" + ImageNameEDS5 + "输出角度为" + degree.ToString() + "输出方向为" + direction.ToString() + "返回值为" + state.ToString(), true);
  5551. LogManager.AddHardwareLog("样品" + m_nWorkHoleNo.ToString() + "计算切割面区域的角度=" + degree.ToString(), true);
  5552. //接口返回像素,*pixelsize,得到坐标点。判断移动方式
  5553. if (state == 1)
  5554. {
  5555. //梯形角度
  5556. iSEM.SetScanRotationOn();
  5557. Thread.Sleep(200);
  5558. //20201128陈工要求,谭博返回角度*0.7
  5559. iSEM.SetScanRotation(Convert.ToSingle(degree * m_measureFile.MParam.ScanRotCor));
  5560. Thread.Sleep(200);
  5561. //arg.State = true;
  5562. //arg.Message = "图像接口返回角度为:" + degree.ToString();
  5563. //SendMsg("1-31");
  5564. if (hand_intervene == 1)
  5565. {
  5566. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5567. }
  5568. }
  5569. else
  5570. {
  5571. //arg.Message = "图像接口参数State返回值为零";
  5572. //arg.State = false;
  5573. //SendMsg("1-31");
  5574. if (hand_intervene == 1)
  5575. {
  5576. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5577. {
  5578. return false;
  5579. }
  5580. }
  5581. else
  5582. {
  5583. //return false;
  5584. }
  5585. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5586. }
  5587. //判断是否停止进程
  5588. if (key_stop)
  5589. {
  5590. LogManager.AddHardwareLog("停止键按下", true);
  5591. return false;
  5592. }
  5593. Thread.Sleep(200);
  5594. //12拍照
  5595. String fileName6 = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_measureFile.MParam.Photograph_Magnification.ToString("0") + "_" + ImageNameEDS6;
  5596. arg.Picture_Information.Picture_FullPath = fileName6;
  5597. arg.Picture_Information.Work_Status = "SEM";
  5598. arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  5599. Thread.Sleep(200);
  5600. arg.Picture_Information.Magnification = iSEM.GetMagnification();
  5601. Thread.Sleep(200);
  5602. arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  5603. Thread.Sleep(200);
  5604. //拍照前改变速度,延时
  5605. //add by sun 2020-12-15 增加不同样品扫描速度参数,每大类样品3种扫描速度
  5606. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedHigh);//iSEM.CmdSaveRate();
  5607. //add by sun 2020 - 12 - 15 增加不同样品扫描速度参数,每大类样品3种扫描速度 end
  5608. Thread.Sleep(200);
  5609. cycle_time = iSEM.GetCycleTime();
  5610. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5611. if (!GetImage(fileName6))
  5612. {
  5613. //arg.Message = "SEM拍照失败";
  5614. //arg.State = false;
  5615. //SendMsg("1-33");
  5616. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5617. return false;
  5618. }
  5619. //arg.State = true;
  5620. //arg.Message = "SEM拍照成功";
  5621. //SendMsg("1-33");
  5622. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedNormal);//CmdFocusRate(4);
  5623. Thread.Sleep(200);
  5624. cycle_time = iSEM.GetCycleTime();
  5625. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  5626. //判断是否停止进程
  5627. if (key_stop)
  5628. {
  5629. LogManager.AddHardwareLog("停止键按下", true);
  5630. return false;
  5631. }
  5632. #endregion
  5633. #region 获取两个位置上及放大倍数
  5634. //计算两个测量区域坐标
  5635. List<System.Drawing.Point> ct = new List<System.Drawing.Point>();
  5636. List<float> mag = new List<float>();
  5637. System.Drawing.Point ct0;
  5638. float magMax = 0;
  5639. //LogManager.AddHardwareLog("测量线程:图像处理接口,计算两个放大区域坐标,输入图像" + fileName6.ToString() + "控制失败", true);
  5640. wr.Img_Measure_Region_Position(fileName6, Convert.ToInt32(m_measureFile.MParam.SampleName), m_measureFile.MParam.Firm, out ct, out mag, out ct0, out state);
  5641. LogManager.AddHardwareLog("测量线程:图像处理接口返回值为" + state.ToString() +
  5642. ",计算两个放大区域坐标,输入图像" + fileName6.ToString() +
  5643. "输入样品" + Convert.ToInt32(m_measureFile.MParam.SampleName) +
  5644. "输入产品" + m_measureFile.MParam.Firm.ToString()
  5645. + "输出中心点1(x,y)为(" + ct[0].X.ToString() + "," + ct[0].Y.ToString() + ")"
  5646. + "输出放大倍数1" + mag[0]
  5647. + "输出中心点2(x,y)为(" + ct[1].X.ToString() + "," + ct[1].Y.ToString() + ")"
  5648. + "输出放大倍数2" + mag[0]
  5649. + "输出中心点3(x,y)为(" + ct0.X.ToString() + "," + ct0.Y.ToString() + ")", true);
  5650. #endregion
  5651. if (state == 1 && ct.Count != 0 && mag.Count != 0)
  5652. {
  5653. //arg.State = true;
  5654. //arg.Message = "获取位置及放大倍数成功";
  5655. //SendMsg("1-34");
  5656. #region 记录初始设置的BeamShift的百分比和样品台XY位置
  5657. float xs = iSEM.GetBeamShiftX();
  5658. Thread.Sleep(200);
  5659. float ys = iSEM.GetBeamShiftY();
  5660. Thread.Sleep(200);
  5661. float xpCur = iSEM.GetStageAtX();
  5662. Thread.Sleep(200);
  5663. float ypCur = iSEM.GetStageAtY();
  5664. Thread.Sleep(200);
  5665. LogManager.AddHardwareLog("测量线程:原来的光束偏移量x = " + xs.ToString()
  5666. + "y=" + ys.ToString() + ","
  5667. + "原来样品台的位置x= " + xpCur.ToString()
  5668. + "y=" + ypCur.ToString(), true);
  5669. #endregion
  5670. #region 移动到梯形左上角
  5671. //找到放大倍数最大值
  5672. magMax = mag[0];
  5673. for (int m = 1; m < mag.Count; m++)
  5674. {
  5675. if (mag[m] > magMax)
  5676. {
  5677. magMax = mag[m];
  5678. }
  5679. }
  5680. //20201127将视野移动到梯形左上角位置
  5681. MoveToPix(ct0.X, ct0.Y);
  5682. LogManager.AddHardwareLog("测量线程:移动到对焦点( " + ct0.X.ToString()
  5683. + "," + ct0.Y.ToString() + ")", true);
  5684. //关闭自动亮度对比度
  5685. iSEM.SetAutoVideoOff();
  5686. Thread.Sleep(2000);
  5687. iSEM.SetReduced(402, 128, 340, 256);
  5688. Thread.Sleep(200);
  5689. //add by sun 2020-12-15
  5690. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5691. //add by sun 2020-12-15 end
  5692. Thread.Sleep(200);
  5693. cycle_time = iSEM.GetCycleTime();
  5694. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5695. //放大到10000倍
  5696. iSEM.SetMagnification(magMax / 2);
  5697. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5698. set = magMax / 2;
  5699. current = iSEM.GetMagnification();
  5700. while (Math.Abs(current - set) > 1)
  5701. {
  5702. iSEM.SetMagnification(set);
  5703. Thread.Sleep(200);
  5704. current = iSEM.GetMagnification();
  5705. }
  5706. //自动对焦
  5707. if (!ImageFocus1(true))
  5708. {
  5709. return false;
  5710. }
  5711. //放大到10000倍
  5712. iSEM.SetMagnification(magMax);
  5713. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5714. set = magMax;
  5715. current = iSEM.GetMagnification();
  5716. while (Math.Abs(current - set) > 1)
  5717. {
  5718. iSEM.SetMagnification(set);
  5719. Thread.Sleep(200);
  5720. current = iSEM.GetMagnification();
  5721. }
  5722. //自动对焦
  5723. if (!ImageFocus1(true))
  5724. {
  5725. return false;
  5726. }
  5727. iSEM.CloseReduced();
  5728. Thread.Sleep(200);
  5729. cycle_time = iSEM.GetCycleTime();
  5730. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5731. #endregion
  5732. #region 恢复到拍照的状态
  5733. iSEM.SetStageGotoX(xpCur);
  5734. while (true)
  5735. {
  5736. Thread.Sleep(4000);
  5737. if (iSEM.GetStageIs() == 0)
  5738. {
  5739. break;
  5740. }
  5741. }
  5742. iSEM.SetStageGotoY(ypCur);
  5743. while (true)
  5744. {
  5745. Thread.Sleep(4000);
  5746. if (iSEM.GetStageIs() == 0)
  5747. {
  5748. break;
  5749. }
  5750. }
  5751. iSEM.CloseReduced();
  5752. Thread.Sleep(200);
  5753. cycle_time = iSEM.GetCycleTime();
  5754. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5755. //增亮图像
  5756. iSEM.SetAutoVideoOff();
  5757. Thread.Sleep(200);
  5758. float currentBright = iSEM.GetBrightness();
  5759. Thread.Sleep(200);
  5760. float currentContrast = iSEM.GetContrast();
  5761. Thread.Sleep(200);
  5762. iSEM.SetBrightness(currentBright + 2);
  5763. Thread.Sleep(200);
  5764. iSEM.SetContrast(currentContrast + 2);//modify by sun 2020-12-16 黄工觉得太亮
  5765. Thread.Sleep(200);
  5766. #endregion
  5767. #region 循环拍照
  5768. for (int n = 0; n < ct.Count; n++)
  5769. {
  5770. #region 恢复到拍照的状态
  5771. iSEM.SetStageGotoX(xpCur);
  5772. while (true)
  5773. {
  5774. Thread.Sleep(4000);
  5775. if (iSEM.GetStageIs() == 0)
  5776. {
  5777. break;
  5778. }
  5779. }
  5780. iSEM.SetStageGotoY(ypCur);
  5781. while (true)
  5782. {
  5783. Thread.Sleep(4000);
  5784. if (iSEM.GetStageIs() == 0)
  5785. {
  5786. break;
  5787. }
  5788. }
  5789. //恢复原来的放大倍数
  5790. if (!iSEM.SetMagnification(m_measureFile.MParam.Photograph_Magnification))
  5791. {
  5792. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5793. return false;
  5794. }
  5795. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5796. set = m_measureFile.MParam.Photograph_Magnification;
  5797. current = iSEM.GetMagnification();
  5798. while (Math.Abs(current - set) > 1)
  5799. {
  5800. iSEM.SetMagnification(set);
  5801. Thread.Sleep(200);
  5802. current = iSEM.GetMagnification();
  5803. }
  5804. //恢复BeamShift的百分比值
  5805. iSEM.SetBeamShiftX(xs);
  5806. Thread.Sleep(200);
  5807. iSEM.SetBeamShiftY(ys);
  5808. Thread.Sleep(200);
  5809. #endregion
  5810. #region 移动到指定点位置
  5811. if (!MoveToPix(ct[n].X, ct[n].Y))
  5812. {
  5813. arg.State = false;
  5814. arg.Message = "移动到第一个点位置失败";
  5815. SendMsg("1-" + (35 + n).ToString());
  5816. //移动到第一个点失败
  5817. LogManager.AddHardwareLog("测量线程报错:移动到点(" + ct[n].X.ToString() + "," + ct[n].Y.ToString() + ")失败", false);
  5818. }
  5819. LogManager.AddHardwareLog("测量线程:移动到第1个点( " + ct[n].X.ToString()
  5820. + "," + ct[n].Y.ToString() + ")", true);
  5821. #endregion
  5822. #region 如果是第一个点,则1W倍对焦
  5823. if (n == 0)
  5824. {
  5825. }
  5826. #endregion
  5827. #region 拍照
  5828. if (!iSEM.SetMagnification(mag[n]))
  5829. {
  5830. arg.State = false;
  5831. arg.Message = "移动到第一个点位置拍照失败";
  5832. SendMsg("1-35");
  5833. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + mag[n].ToString() + "控制失败", false);
  5834. return false;
  5835. }
  5836. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5837. set = mag[n];
  5838. current = iSEM.GetMagnification();
  5839. while (Math.Abs(current - set) > 1)
  5840. {
  5841. iSEM.SetMagnification(set);
  5842. Thread.Sleep(200);
  5843. current = iSEM.GetMagnification();
  5844. }
  5845. DoEDS(m_nWorkHoleNo + 1, cutHoles[m_nWorkHoleNo].HoleName, n + 1);
  5846. #endregion
  5847. }
  5848. #endregion
  5849. if (hand_intervene == 1)
  5850. {
  5851. MessageBox.Show("Web返回数据移动是否正确?\n如果错误请手动移动到指定位置后按确认", "确认消息", MessageBoxButtons.OK);
  5852. }
  5853. }
  5854. else
  5855. {
  5856. if (hand_intervene == 1)
  5857. {
  5858. if (DialogResult.Yes != MessageBox.Show("网络参数State返回为0。\n是否继续操作?。", "确认消息", MessageBoxButtons.YesNo))
  5859. {
  5860. // return false;
  5861. }
  5862. }
  5863. else
  5864. {
  5865. //return false;
  5866. }
  5867. //arg.State = false;
  5868. //arg.Message = "获取位置及放大倍数失败";
  5869. //SendMsg("1-34");
  5870. LogManager.AddHardwareLog("测量线程报错:" + arg.Message, false);
  5871. }
  5872. //判断是否停止进程
  5873. if (key_stop)
  5874. {
  5875. LogManager.AddHardwareLog("停止键按下", true);
  5876. return false;
  5877. }
  5878. }
  5879. //判断是否停止进程
  5880. if (key_stop)
  5881. {
  5882. return false;
  5883. }
  5884. return true;
  5885. }
  5886. /// <summary>
  5887. /// 19.能谱分析
  5888. /// </summary>
  5889. /// <returns></returns>
  5890. public bool EDSAnalysis()
  5891. {
  5892. //1.先降Z轴 37.241左右使工作距离从5mm 变为 10mm,这样方便能谱工作,麻烦是需要从新对焦。由于移动样品台会有误差,容易造成图像偏移,最好从新定位
  5893. if (m_measureFile.MParam.EDSZ < Z_Min || m_measureFile.MParam.EDSZ > Z_Max)
  5894. {
  5895. LogManager.AddHardwareLog("Z轴位置设置超出范围.", true);
  5896. return false;
  5897. }
  5898. LogManager.AddHardwareLog("将Z轴位置指定到:" + m_measureFile.MParam.EDSZ.ToString(), true);
  5899. if (!iSEM.SetStageGotoZ(m_measureFile.MParam.EDSZ))
  5900. {
  5901. LogManager.AddHardwareLog("测量线程报错:样品台Z回到安全位置失败", false);
  5902. return false;
  5903. }
  5904. while (true)
  5905. {
  5906. Thread.Sleep(4000);
  5907. if (iSEM.GetStageIs() == 0)
  5908. {
  5909. break;
  5910. }
  5911. }
  5912. //判断是否停止进程
  5913. if (key_stop)
  5914. {
  5915. LogManager.AddHardwareLog("停止键按下", true);
  5916. return false;
  5917. }
  5918. //2.角度改为54度
  5919. iSEM.SetScanRotationOff();
  5920. Thread.Sleep(200);
  5921. //3.设置电压和电流
  5922. iSEM.SetSEMVoltage(m_measureFile.MParam.EDSV);
  5923. Thread.Sleep(2000);
  5924. iSEM.SetSEMIPROBE(m_measureFile.MParam.EDSA);
  5925. Thread.Sleep(500);
  5926. //4.自动亮度对比度 del by sun 2020-12-17
  5927. //iSEM.SetAutoBright(100);
  5928. //Thread.Sleep(200);
  5929. //iSEM.SetAutoContrast(100);
  5930. //Thread.Sleep(200);
  5931. //if (!iSEM.SetAutoVideoBrightnessAndContrast())
  5932. //{
  5933. // LogManager.AddHardwareLog("测量线程报错:开始设置自动亮度、对比度失败。", false);
  5934. // return false;
  5935. //}
  5936. //Thread.Sleep(5000);
  5937. //del by sun 2020-12-17
  5938. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题
  5939. //关闭自动亮度对比度
  5940. iSEM.SetAutoVideoOff();
  5941. Thread.Sleep(2000);
  5942. float m_TempBrightness = 50f;
  5943. float m_TempContrast = 29f;
  5944. if (m_measureFile.MParam.SampleName == "3")
  5945. {
  5946. m_TempBrightness = 50f;
  5947. m_TempContrast = 29f;
  5948. }
  5949. iSEM.SetBrightness(m_TempBrightness); //50.0f
  5950. Thread.Sleep(200);
  5951. iSEM.SetContrast(m_TempContrast); //30.0f
  5952. Thread.Sleep(5000);
  5953. //add by sun 2020-12-17 解决3大类样品FIB下亮度过白导致无法识别问题 end
  5954. //5.自动对焦
  5955. iSEM.SetReduced(256, 192, 512, 512);
  5956. Thread.Sleep(200);
  5957. //add by sun 2020-12-15
  5958. iSEM.CmdFocusScanSpeed(m_measureFile.MParam.ScanSpeedFocus);//CmdFocusRate(5);
  5959. //add by sun 2020-12-15 end
  5960. Thread.Sleep(200);
  5961. cycle_time = iSEM.GetCycleTime();
  5962. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5963. if (!ImageFocus1(false))
  5964. {
  5965. return false;
  5966. }
  5967. iSEM.CloseReduced();
  5968. Thread.Sleep(200);
  5969. cycle_time = iSEM.GetCycleTime();
  5970. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  5971. //6.调用161步过程
  5972. if (!EDS_FindCross())
  5973. {
  5974. return false;
  5975. }
  5976. //7.调用171步过程
  5977. if (!EDS_ShotSection())
  5978. {
  5979. return false;
  5980. }
  5981. return true;
  5982. }
  5983. /// <summary>
  5984. /// 20.光束等复位
  5985. /// </summary>
  5986. public void BeamShiftReset()
  5987. {
  5988. iSEM.SetTiltAngleOff();
  5989. Thread.Sleep(200);
  5990. iSEM.SetScanRotationOff();
  5991. Thread.Sleep(200);
  5992. iSEM.SetBeamShiftX(0);
  5993. Thread.Sleep(200);
  5994. iSEM.SetBeamShiftY(0);
  5995. Thread.Sleep(200);
  5996. }
  5997. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA
  5998. #region 设置电压电流
  5999. public bool SetVoltageAndIPROBE()
  6000. {
  6001. LogManager.AddHardwareLog("测量线程:设置电压电流 123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA 目前是第 " + m_measureFile.MParam.SampleName + " 类!", true);
  6002. //这块应该做成参数!!! 暂时写死。类型3 则为 5000V 500pA
  6003. bool mRet_VoltageFlag = false;
  6004. bool mRet_ElecFlag = false;
  6005. if (m_measureFile.MParam.SampleName != "3")
  6006. {
  6007. mRet_VoltageFlag = iSEM.SetSEMVoltage(2000);
  6008. Thread.Sleep(500);
  6009. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.2F / 1000000000);
  6010. Thread.Sleep(500);
  6011. }
  6012. else
  6013. {
  6014. mRet_VoltageFlag = iSEM.SetSEMVoltage(5000);
  6015. Thread.Sleep(500);
  6016. mRet_ElecFlag = iSEM.SetSEMIPROBE(0.5F / 1000000000);
  6017. Thread.Sleep(500);
  6018. }
  6019. if (!mRet_VoltageFlag) return false;
  6020. if (!mRet_ElecFlag) return false;
  6021. LogManager.AddHardwareLog("测量线程:设置电压电流完成!" , true);
  6022. return true;
  6023. }
  6024. #endregion
  6025. //add by sun 2020-12-17 不同样品电压、电流不一致,应设置灵活。123456类电压2000V电流200pA,7类5000V 500pA,能谱 7000V 500pA end
  6026. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析
  6027. #region 拍照
  6028. public bool GetImageFromSEM(float m_Mag) {
  6029. if (!iSEM.SetMagnification(m_Mag))
  6030. {
  6031. LogManager.AddHardwareLog("测量线程报错:第一个区域放大倍数" + m_Mag.ToString() + "失败", false);
  6032. return false;
  6033. }
  6034. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置拍照完成(一半倍数)!", true);
  6035. Thread.Sleep(100 + Convert.ToInt32(cycle_time));
  6036. String m_FileName = data_path + "\\" + m_cutHoles[m_nWorkHoleNo].HoleName + "_" + m_Mag.ToString() + "_0_" + ImageNameTwo_1;
  6037. //arg.Picture_Information.Picture_FullPath = m_FileName;
  6038. //arg.Picture_Information.Work_Status = "SEM";
  6039. //arg.Picture_Information.Work_Voltage = iSEM.GetSEMVoltage();
  6040. //Thread.Sleep(200);
  6041. //arg.Picture_Information.Magnification = iSEM.GetMagnification();
  6042. //Thread.Sleep(200);
  6043. //arg.Picture_Information.Work_Distance = iSEM.GetWorkingDistance();
  6044. //Thread.Sleep(200);
  6045. //拍照前改变速度,延时
  6046. iSEM.CmdLineScan();
  6047. Thread.Sleep(200);
  6048. cycle_time = iSEM.GetCycleTime();
  6049. Thread.Sleep(Convert.ToInt32(cycle_time) + 100);
  6050. if (!GetImage(m_FileName))
  6051. {
  6052. LogManager.AddHardwareLog("测量线程报错:========" + arg.Message, false);
  6053. return false;
  6054. }
  6055. LogManager.AddHardwareLog("========测量线程:移动到第一个点位置完成!", true);
  6056. return true;
  6057. }
  6058. #endregion
  6059. //add by sun 2020-12-17 根据客户要求,3大类样品需要在5000倍下在拍摄一张图片,不需要分析 end
  6060. #endregion
  6061. }
  6062. }